id	sid	eid	entity	type
ap-572	1	1	1	CARDINAL
ap-572	2	1	this century	DATE
ap-572	3	1	more than 3	CARDINAL
ap-572	3	2	0.003 mm	QUANTITY
ap-572	3	3	about 5 to 20	CARDINAL
ap-572	5	1	the mid-1990s	DATE
ap-572	5	2	asia	LOC
ap-572	5	3	japan	GPE
ap-572	5	4	south korea	GPE
ap-572	5	5	china	GPE
ap-572	5	6	australia	GPE
ap-572	5	7	europe	LOC
ap-572	6	1	one	CARDINAL
ap-572	6	2	japan	GPE
ap-572	6	3	10-year	DATE
ap-572	6	4	800	CARDINAL
ap-572	6	5	1	CARDINAL
ap-572	6	6	2	CARDINAL
ap-572	8	1	more than 3	CARDINAL
ap-572	8	2	0.003 mm	QUANTITY
ap-572	9	1	3	CARDINAL
ap-572	10	1	japan	GPE
ap-572	11	1	2	CARDINAL
ap-572	11	2	finland	GPE
ap-572	12	1	4	CARDINAL
ap-572	13	1	6	CARDINAL
ap-572	16	1	4	CARDINAL
ap-572	16	2	5	CARDINAL
ap-572	17	1	2	CARDINAL
ap-572	20	1	1	CARDINAL
ap-572	20	2	the 1990s	DATE
ap-572	21	1	one	CARDINAL
ap-572	21	2	japan	GPE
ap-572	21	3	10-year	DATE
ap-572	21	4	800	CARDINAL
ap-572	21	5	1	CARDINAL
ap-572	21	6	2	CARDINAL
ap-572	22	1	about 0.5	CARDINAL
ap-572	23	1	1	CARDINAL
ap-572	24	1	2	CARDINAL
ap-572	25	1	czech	NORP
ap-572	25	2	37	CARDINAL
ap-572	25	3	acta polytechnica vol.	PERSON
ap-572	26	1	44	CARDINAL
ap-572	27	1	j. i. leinonen	PERSON
ap-572	29	1	2 to 3μm	CARDINAL
ap-572	31	1	one	CARDINAL
ap-572	33	1	fig	PERSON
ap-572	34	1	1	CARDINAL
ap-572	34	2	1 μm	QUANTITY
ap-572	34	3	8	CARDINAL
ap-572	35	1	2	CARDINAL
ap-572	35	2	1	CARDINAL
ap-572	36	1	about 1000	CARDINAL
ap-572	36	2	5	CARDINAL
ap-572	38	1	about 10	CARDINAL
ap-572	38	2	2	CARDINAL
ap-572	39	1	9	CARDINAL
ap-572	41	1	85 °	QUANTITY
ap-572	41	2	96	CARDINAL
ap-572	42	1	2	CARDINAL
ap-572	42	2	j.	PERSON
ap-572	42	3	at least 40 °	QUANTITY
ap-572	45	1	2	CARDINAL
ap-572	45	2	100 °	QUANTITY
ap-572	49	1	3	CARDINAL
ap-572	51	1	10	CARDINAL
ap-572	52	1	suf steel	ORG
ap-572	53	1	11	CARDINAL
ap-572	54	1	recent years	DATE
ap-572	55	1	12	CARDINAL
ap-572	58	1	13	CARDINAL
ap-572	58	2	14	CARDINAL
ap-572	59	1	3	CARDINAL
ap-572	59	2	japan	GPE
ap-572	60	1	2	CARDINAL
ap-572	60	2	finland	GPE
ap-572	61	1	4	CARDINAL
ap-572	62	1	6	CARDINAL
ap-572	63	1	fig	ORG
ap-572	63	2	1	CARDINAL
ap-572	63	3	4	CARDINAL
ap-572	64	1	first	ORDINAL
ap-572	65	1	more than 1000 °	CARDINAL
ap-572	65	2	more than 1150	CARDINAL
ap-572	65	3	38	CARDINAL
ap-572	65	4	czech technical university publishing	ORG
ap-572	65	5	acta polytechnica vol.	PERSON
ap-572	66	1	44	CARDINAL
ap-572	67	1	3/2004	CARDINAL
ap-572	68	1	2	CARDINAL
ap-572	69	1	0.05 %	PERCENT
ap-572	69	2	0.1 %	PERCENT
ap-572	69	3	2.5 %	PERCENT
ap-572	70	1	9	CARDINAL
ap-572	71	1	3	CARDINAL
ap-572	72	1	0.33 %	PERCENT
ap-572	72	2	0.3 %	PERCENT
ap-572	72	3	1.2 %	PERCENT
ap-572	73	1	9	CARDINAL
ap-572	74	1	less than 20	CARDINAL
ap-572	74	2	10	CARDINAL
ap-572	78	1	less than 20 to	CARDINAL
ap-572	81	1	fig.	DATE
ap-572	82	1	5	CARDINAL
ap-572	82	2	about 3	CARDINAL
ap-572	82	3	0.08 %	PERCENT
ap-572	82	4	0.20 %	PERCENT
ap-572	82	5	1.68 %	PERCENT
ap-572	82	6	0.04 %	PERCENT
ap-572	83	1	fig.	DATE
ap-572	84	1	4	CARDINAL
ap-572	84	2	8 mm	QUANTITY
ap-572	84	3	900 °	CARDINAL
ap-572	84	4	30 min	TIME
ap-572	84	5	800 °	QUANTITY
ap-572	85	1	36 %	PERCENT
ap-572	86	1	about 15 °	CARDINAL
ap-572	86	2	114	CARDINAL
ap-572	86	3	90 °	QUANTITY
ap-572	87	1	100 °	QUANTITY
ap-572	87	2	4	CARDINAL
ap-572	87	3	1	CARDINAL
ap-572	87	4	more than 3	CARDINAL
ap-572	87	5	m. 2	PERSON
ap-572	88	1	3	CARDINAL
ap-572	88	2	one	CARDINAL
ap-572	89	1	1	CARDINAL
ap-572	89	2	sato s.	PERSON
ap-572	89	3	japan	GPE
ap-572	89	4	48	DATE
ap-572	89	5	1997	DATE
ap-572	89	6	12	CARDINAL
ap-572	89	7	14–15	CARDINAL
ap-572	90	1	2	CARDINAL
ap-572	90	2	american	NORP
ap-572	90	3	106	CARDINAL
ap-572	90	4	1997	DATE
ap-572	90	5	84	CARDINAL
ap-572	91	1	3	CARDINAL
ap-572	91	2	hanamura t.	PERSON
ap-572	91	3	yamashita t.	PERSON
ap-572	91	4	torizuka s.	PERSON
ap-572	91	5	nagai k.: proc	PERSON
ap-572	94	1	isugs 2001	DATE
ap-572	94	2	uminonakamichi	GPE
ap-572	94	3	fukuoka	GPE
ap-572	94	4	japan	GPE
ap-572	94	5	september 20–22, 2001	DATE
ap-572	94	6	228–231	CARDINAL
ap-572	95	1	4	CARDINAL
ap-572	95	2	leinonen j.:	PERSON
ap-572	95	3	2000	DATE
ap-572	96	1	5	CARDINAL
ap-572	96	2	j. i.:	PERSON
ap-572	96	3	advanced materials &	ORG
ap-572	96	4	159, nov. 2001	DATE
ap-572	96	5	31–33	CARDINAL
ap-572	97	1	6	CARDINAL
ap-572	97	2	d.	NORP
ap-572	97	3	hickson m. r.	PERSON
ap-572	97	4	gibbs r. k.:	PERSON
ap-572	97	5	u.s.	GPE
ap-572	97	6	6,027,587	CARDINAL
ap-572	97	7	2000	DATE
ap-572	98	1	7	CARDINAL
ap-572	98	2	howe a. a.	PERSON
ap-572	99	1	16, november–	DATE
ap-572	99	2	december 2000	DATE
ap-572	99	3	1264–1266	CARDINAL
ap-572	100	1	8	CARDINAL
ap-572	100	2	a. k.	PERSON
ap-572	101	1	j. j. jonas	PERSON
ap-572	102	1	august 20–23, 2000	DATE
ap-572	102	2	ottawa	GPE
ap-572	102	3	ontario	GPE
ap-572	102	4	canada	GPE
ap-572	102	5	351–363	CARDINAL
ap-572	103	1	9	CARDINAL
ap-572	103	2	j. i.	PERSON
ap-572	105	1	2nd	ORDINAL
ap-572	108	1	norway	GPE
ap-572	108	2	23–24 april 2002	DATE
ap-572	108	3	10	CARDINAL
ap-572	109	1	10	CARDINAL
ap-572	109	2	kimura h.	PERSON
ap-572	109	3	tanaka k.	PERSON
ap-572	109	4	kondo j.	PERSON
ap-572	109	5	ishikawa t.	PERSON
ap-572	113	1	czech technical university publishing house	ORG
ap-572	113	2	39	CARDINAL
ap-572	113	3	acta polytechnica vol.	PERSON
ap-572	114	1	44	CARDINAL
ap-572	115	1	3/2004	CARDINAL
ap-572	116	1	4	CARDINAL
ap-572	117	1	9	CARDINAL
ap-572	118	1	5	CARDINAL
ap-572	118	2	isugs 2001	DATE
ap-572	118	3	uminonakamichi	GPE
ap-572	118	4	fukuoka	GPE
ap-572	118	5	japan	GPE
ap-572	118	6	september 20–22 2001	DATE
ap-572	118	7	248–251	CARDINAL
ap-572	119	1	11	CARDINAL
ap-572	119	2	fukui t.	GPE
ap-572	119	3	yajima h.	GPE
ap-572	119	4	ishikawa t.	PERSON
ap-572	123	1	isugs 2001	DATE
ap-572	123	2	uminonakamichi	GPE
ap-572	123	3	japan	GPE
ap-572	123	4	september 20–22 2001	DATE
ap-572	123	5	240–243	CARDINAL
ap-572	124	1	12	CARDINAL
ap-572	125	1	kawasaki steel technical	ORG
ap-572	125	2	oct. 2000	DATE
ap-572	125	3	43	CARDINAL
ap-572	126	1	55–57	CARDINAL
ap-572	127	1	13	CARDINAL
ap-572	127	2	chen w.	PERSON
ap-572	127	3	peng y.	PERSON
ap-572	127	4	wan c.	PERSON
ap-572	127	5	bao g.	PERSON
ap-572	127	6	tian z.	PERSON
ap-572	127	7	400mpa	CARDINAL
ap-572	131	1	isugs 2001	DATE
ap-572	131	2	uminonakamichi	GPE
ap-572	131	3	japan	GPE
ap-572	131	4	september 20–22 2001	DATE
ap-572	131	5	252–255	CARDINAL
ap-572	132	1	14	CARDINAL
ap-572	132	2	ito r.	PERSON
ap-572	132	3	shiga c.	PERSON
ap-572	132	4	kawaguchi y.	ORG
ap-572	132	5	nakamura	PERSON
ap-572	132	6	t.	GPE
ap-572	132	7	hiraoka k.	PERSON
ap-572	132	8	hayashi t.	PERSON
ap-572	132	9	torizuka s.	PERSON
ap-572	134	1	40 (2000	DATE
ap-572	136	1	jouko i. leinonen	PERSON
ap-572	136	2	ph.d	ORG
ap-572	137	1	eng	GPE
ap-572	139	1	0926	DATE
ap-572	139	2	2165	DATE
ap-572	140	1	czech technical university publishing	ORG
ap-572	140	2	acta polytechnica vol.	PERSON
ap-572	141	1	44	CARDINAL