id	sid	eid	entity	type
ap-6855	1	1	acta polytechnica https://doi.org/10.14311/ap.2021.61.0684 acta polytechnica	PERSON
ap-6855	1	2	61(6):684–688	CARDINAL
ap-6855	1	3	2021	CARDINAL
ap-6855	1	4	2021	CARDINAL
ap-6855	2	1	4.0	CARDINAL
ap-6855	2	2	the czech technical university	ORG
ap-6855	2	3	prague	GPE
ap-6855	2	4	k. edaan	PERSON
ap-6855	3	1	rebecca cheungb	ORG
ap-6855	3	2	university of basrah	ORG
ap-6855	3	3	basrah	ORG
ap-6855	3	4	61004	DATE
ap-6855	3	5	iraq	GPE
ap-6855	3	6	the university of edinburgh	ORG
ap-6855	3	7	scottish microelectronics centre	ORG
ap-6855	3	8	edinburgh	GPE
ap-6855	3	9	3ff	ORDINAL
ap-6855	3	10	uk ∗	ORG
ap-6855	4	1	nanoelectronic devices	ORG
ap-6855	13	1	1	CARDINAL
ap-6855	16	1	1	CARDINAL
ap-6855	17	1	2	CARDINAL
ap-6855	19	1	3	CARDINAL
ap-6855	20	1	one	CARDINAL
ap-6855	22	1	4	CARDINAL
ap-6855	22	2	5	CARDINAL
ap-6855	24	1	9	CARDINAL
ap-6855	25	1	10–12	CARDINAL
ap-6855	27	1	13	CARDINAL
ap-6855	27	2	14	CARDINAL
ap-6855	30	1	15	CARDINAL
ap-6855	30	2	16	CARDINAL
ap-6855	30	3	17–19	CARDINAL
ap-6855	35	1	i. e.	PERSON
ap-6855	36	1	684	CARDINAL
ap-6855	36	2	https://www.cvut.cz/en	DATE
ap-6855	36	3	61	CARDINAL
ap-6855	37	1	6/2021	CARDINAL
ap-6855	41	1	1	CARDINAL
ap-6855	46	1	2611	CARDINAL
ap-6855	46	2	n-methyl-2	NORP
ap-6855	46	3	85–95 %	PERCENT
ap-6855	46	4	10– 20 %	PERCENT
ap-6855	47	1	2	CARDINAL
ap-6855	47	2	1	CARDINAL
ap-6855	48	1	firstly	ORDINAL
ap-6855	48	2	barrel asher	PERSON
ap-6855	48	3	1a	CARDINAL
ap-6855	50	1	2611	CARDINAL
ap-6855	50	2	4000	CARDINAL
ap-6855	50	3	45 seconds	TIME
ap-6855	50	4	1b	CARDINAL
ap-6855	51	1	110 °	QUANTITY
ap-6855	51	2	90 seconds	TIME
ap-6855	52	1	200 °	QUANTITY
ap-6855	52	2	60 minutes	TIME
ap-6855	53	1	4 µm	DATE
ap-6855	54	1	1c	CARDINAL
ap-6855	54	2	1d	CARDINAL
ap-6855	56	1	3	CARDINAL
ap-6855	57	1	three	CARDINAL
ap-6855	57	2	49 %	PERCENT
ap-6855	57	3	7:1	CARDINAL
ap-6855	57	4	49 %	PERCENT
ap-6855	57	5	1:1	CARDINAL
ap-6855	62	1	2	CARDINAL
ap-6855	64	1	20	CARDINAL
ap-6855	65	1	2a	CARDINAL
ap-6855	66	1	685	CARDINAL
ap-6855	66	2	k. edaan al-mashaal	PERSON
ap-6855	66	3	rebecca cheung acta polytechnica	PERSON
ap-6855	70	1	2	CARDINAL
ap-6855	73	1	4 minutes	TIME
ap-6855	74	1	2b	CARDINAL
ap-6855	76	1	21	CARDINAL
ap-6855	77	1	2b	CARDINAL
ap-6855	78	1	2c	CARDINAL
ap-6855	79	1	2d	DATE
ap-6855	80	1	3	CARDINAL
ap-6855	80	2	three	CARDINAL
ap-6855	81	1	first	ORDINAL
ap-6855	81	2	50 ml	QUANTITY
ap-6855	81	3	49 %	PERCENT
ap-6855	82	1	90 seconds	TIME
ap-6855	83	1	approximately 4 minutes	TIME
ap-6855	84	1	second	ORDINAL
ap-6855	84	2	50 ml	QUANTITY
ap-6855	84	3	49 %	PERCENT
ap-6855	84	4	50 ml	QUANTITY
ap-6855	85	1	approximately 4	CARDINAL
ap-6855	85	2	3	CARDINAL
ap-6855	86	1	first	ORDINAL
ap-6855	86	2	about two	CARDINAL
ap-6855	87	1	third	ORDINAL
ap-6855	87	2	7	CARDINAL
ap-6855	87	3	nh4f	ORG
ap-6855	87	4	1	CARDINAL
ap-6855	87	5	49 %	PERCENT
ap-6855	88	1	3	CARDINAL
ap-6855	88	2	15 minutes	TIME
ap-6855	89	1	more than 20 minutes	TIME
ap-6855	91	1	e. g.	PERSON
ap-6855	91	2	4 µm	DATE
ap-6855	91	3	5 %	PERCENT
ap-6855	92	1	686	CARDINAL
ap-6855	93	1	61	CARDINAL
ap-6855	94	1	6/2021	CARDINAL
ap-6855	94	2	di bhf	PERSON
ap-6855	95	1	3	CARDINAL
ap-6855	97	1	15	CARDINAL
ap-6855	98	1	i. e.	PERSON
ap-6855	101	1	22	CARDINAL
ap-6855	109	1	23–25	CARDINAL
ap-6855	111	1	4.	CARDINAL
ap-6855	114	1	4	CARDINAL
ap-6855	114	2	7 and 15 minutes	TIME
ap-6855	114	3	49 %	PERCENT
ap-6855	114	4	7:1 bhf	QUANTITY
ap-6855	117	1	1	CARDINAL
ap-6855	117	2	j. iannacci	PERSON
ap-6855	119	1	37:62–71	CARDINAL
ap-6855	119	2	2015	DATE
ap-6855	121	1	2	CARDINAL
ap-6855	121	2	e. h. cook	PERSON
ap-6855	121	3	d. j. d. carter	PERSON
ap-6855	123	1	29(6):06fe04	CARDINAL
ap-6855	123	2	2011	DATE
ap-6855	125	1	3	CARDINAL
ap-6855	125	2	b. j. kim	PERSON
ap-6855	125	3	e. meng	PERSON
ap-6855	127	1	microengineering 15(1):013001,	ORG
ap-6855	127	2	2015	DATE
ap-6855	129	1	4	CARDINAL
ap-6855	129	2	a. k. al-mashaal	PERSON
ap-6855	129	3	g. wood	PERSON
ap-6855	129	4	e. mastropaolo	PERSON
ap-6855	129	5	r. cheung	PERSON
ap-6855	131	1	54(6):372	CARDINAL
ap-6855	131	2	374	CARDINAL
ap-6855	131	3	2018	DATE
ap-6855	133	1	687 https://doi.org/10.1016/j.displa.2014.08.003	CARDINAL
ap-6855	133	2	k. edaan	PERSON
ap-6855	134	1	al-mashaal	ORG
ap-6855	134	2	rebecca cheung acta polytechnica	PERSON
ap-6855	135	1	5	CARDINAL
ap-6855	135	2	a. al-mashaal	PERSON
ap-6855	135	3	e. mastropaolo	PERSON
ap-6855	135	4	a. bunting	PERSON
ap-6855	136	1	27(1):015020	CARDINAL
ap-6855	136	2	2017	DATE
ap-6855	138	1	6	CARDINAL
ap-6855	138	2	j. liu	PERSON
ap-6855	138	3	z. shu	PERSON
ap-6855	138	4	c. wang	PERSON
ap-6855	139	1	28(10):105004, 2018.	DATE
ap-6855	141	1	7	CARDINAL
ap-6855	141	2	k. s. choi	PERSON
ap-6855	141	3	d. s. kim	PERSON
ap-6855	141	4	h. j. yang	PERSON
ap-6855	143	1	rsc advances	PERSON
ap-6855	143	2	4(61):32075–32080, 2014	DATE
ap-6855	145	1	8	CARDINAL
ap-6855	145	2	g. zhang	PERSON
ap-6855	145	3	v. chu	PERSON
ap-6855	145	4	j. p. conde	PERSON
ap-6855	147	1	17(4):797–803, 2007	DATE
ap-6855	149	1	9	CARDINAL
ap-6855	150	1	f. zheng	PERSON
ap-6855	153	1	5	CARDINAL
ap-6855	154	1	195–255	CARDINAL
ap-6855	154	2	2018	DATE
ap-6855	155	1	https	PERSON
ap-6855	156	1	//doi.org/10.1016	PERSON
ap-6855	156	2	0	CARDINAL
ap-6855	157	1	10	CARDINAL
ap-6855	157	2	m. gunda	PERSON
ap-6855	157	3	p. kumar	PERSON
ap-6855	157	4	m. katiyar	PERSON
ap-6855	159	1	42(2):129–152	CARDINAL
ap-6855	159	2	2017	DATE
ap-6855	161	1	11	CARDINAL
ap-6855	161	2	s. y. xiao	PERSON
ap-6855	161	3	l. f. che	PERSON
ap-6855	161	4	x. li	PERSON
ap-6855	161	5	y. l. wang	PERSON
ap-6855	163	1	2008	DATE
ap-6855	165	1	12	CARDINAL
ap-6855	165	2	c. liu	PERSON
ap-6855	167	1	19(22):3783–3790, 2007	DATE
ap-6855	169	1	13	CARDINAL
ap-6855	169	2	d. zhuang	PERSON
ap-6855	169	3	j. h. edgar	PERSON
ap-6855	172	1	48(1):1–46, 2005	DATE
ap-6855	173	1	https://doi.org/10.1016/j.mser.2004.11.002	PERSON
ap-6855	174	1	14	CARDINAL
ap-6855	174	2	d. m. knotter	PERSON
ap-6855	175	1	the american chemical	ORG
ap-6855	175	2	society 122(18):4345–4351, 2000	DATE
ap-6855	177	1	15	CARDINAL
ap-6855	177	2	k. r. williams	PERSON
ap-6855	177	3	k. gupta	PERSON
ap-6855	177	4	m. wasilik	PERSON
ap-6855	179	1	journal of microelectromechanical systems 12(6):761–778,	ORG
ap-6855	179	2	2003	DATE
ap-6855	180	1	https://doi.org/10.1109/jmems.2003.820936	ORG
ap-6855	181	1	16	CARDINAL
ap-6855	181	2	h. ji-song	PERSON
ap-6855	181	3	t. zhi-yong	ORG
ap-6855	181	4	k. sato	PERSON
ap-6855	181	5	m. shikida	PERSON
ap-6855	183	1	ieej	PERSON
ap-6855	183	2	2005	DATE
ap-6855	184	1	https://doi.org/10.1541/ieejsmas.125.27	PERSON
ap-6855	185	1	17	CARDINAL
ap-6855	185	2	a. zulfiqar	PERSON
ap-6855	185	3	a. pfreundt	PERSON
ap-6855	185	4	w. e. svendsen	PERSON
ap-6855	185	5	m. dimaki	PERSON
ap-6855	187	1	25(3):035022	CARDINAL
ap-6855	187	2	2015	DATE
ap-6855	188	1	https://doi.org/10.1088/0960-1317/25/3/035022	ORG
ap-6855	189	1	18	CARDINAL
ap-6855	189	2	n. e. lee	PERSON
ap-6855	191	1	the korean physical society 51(3):984–988,	ORG
ap-6855	191	2	2007	DATE
ap-6855	192	1	https://doi.org/10.3938/jkps.51.984	ORG
ap-6855	193	1	19	CARDINAL
ap-6855	193	2	j. p. von klitzing	PERSON
ap-6855	193	3	e. obermeier	PERSON
ap-6855	195	1	132(1):393–399, 2006	DATE
ap-6855	197	1	20	CARDINAL
ap-6855	197	2	k. l. mittal	PERSON
ap-6855	199	1	crc press	ORG
ap-6855	199	2	2014	DATE
ap-6855	201	1	21	CARDINAL
ap-6855	201	2	m. t. a. saif	PERSON
ap-6855	201	3	h. sehitoglu	PERSON
ap-6855	203	1	50(5):1197–1209, 2002	DATE
ap-6855	204	1	https://doi.org/10.1016/s1359-6454(01)00421-9	GPE
ap-6855	205	1	22	CARDINAL
ap-6855	205	2	d. s. wie	PERSON
ap-6855	205	3	y. zhang	PERSON
ap-6855	205	4	m. k. kim	PERSON
ap-6855	206	1	the national academy of sciences	ORG
ap-6855	206	2	the united states of	GPE
ap-6855	206	3	america 115(31):e7236	EVENT
ap-6855	206	4	2018	DATE
ap-6855	207	1	https://doi.org/10.1073/pnas.1806640115	GPE
ap-6855	208	1	23	CARDINAL
ap-6855	208	2	m. w. czabaj	PERSON
ap-6855	208	3	a. t. zehnder	PERSON
ap-6855	208	4	c. y. hui	PERSON
ap-6855	210	1	41(7):568–577	CARDINAL
ap-6855	210	2	2010	DATE
ap-6855	211	1	https	PERSON
ap-6855	212	1	//doi.org/10.1016/j.compositesb.2010.05.008	ORG
ap-6855	213	1	24	CARDINAL
ap-6855	213	2	j. y. oh	PERSON
ap-6855	213	3	d. s. park	PERSON
ap-6855	213	4	b. s. shin	PERSON
ap-6855	214	1	355	CARDINAL
ap-6855	215	1	113:411–415, 2013	DATE
ap-6855	217	1	25	CARDINAL
ap-6855	217	2	t. walter	ORG
ap-6855	217	3	m. lederer	PERSON
ap-6855	217	4	g. khatibi	PERSON
ap-6855	219	1	64:281–286	CARDINAL
ap-6855	219	2	2016	DATE
ap-6855	221	1	688	CARDINAL
ap-6855	221	2	61(6):684–688	CARDINAL
ap-6855	221	3	2021	CARDINAL
ap-6855	221	4	2	CARDINAL
ap-6855	221	5	3	CARDINAL
ap-6855	221	6	4	CARDINAL