id	sid	eid	entity	type
ap-876	1	1	1m	CARDINAL
ap-876	1	2	2	CARDINAL
ap-876	1	3	cm2v�	WORK_OF_ART
ap-876	1	4	cm2s�1	WORK_OF_ART
ap-876	1	5	kb boltzmann	PERSON
ap-876	1	6	sn	ORG
ap-876	1	7	wcm	ORG
ap-876	1	8	2	CARDINAL
ap-876	1	9	1	CARDINAL
ap-876	1	10	mn carrier	ORG
ap-876	1	11	1	CARDINAL
ap-876	1	12	1	CARDINAL
ap-876	2	1	2005	DATE
ap-876	2	2	up to 15	CARDINAL
ap-876	2	3	the next ten years	DATE
ap-876	4	1	two	CARDINAL
ap-876	7	1	2	CARDINAL
ap-876	8	1	1	CARDINAL
ap-876	8	2	2	CARDINAL
ap-876	8	3	3	CARDINAL
ap-876	12	1	4	CARDINAL
ap-876	14	1	2	CARDINAL
ap-876	15	1	3	CARDINAL
ap-876	16	1	4	CARDINAL
ap-876	16	2	5	CARDINAL
ap-876	16	3	czech	NORP
ap-876	16	4	35	CARDINAL
ap-876	16	5	acta polytechnica vol	PERSON
ap-876	17	1	46	CARDINAL
ap-876	18	1	r. stenzel	PERSON
ap-876	18	2	l. müller	PERSON
ap-876	18	3	t. herrmann	PERSON
ap-876	18	4	w. klix	PERSON
ap-876	19	1	2d/3d	CARDINAL
ap-876	20	1	30	CARDINAL
ap-876	22	1	15	CARDINAL
ap-876	23	1	about 0.15	CARDINAL
ap-876	25	1	3	CARDINAL
ap-876	26	1	t k t pt k t r g	FAC
ap-876	26	2	2	CARDINAL
ap-876	26	3	6	CARDINAL
ap-876	26	4	3	CARDINAL
ap-876	28	1	2	CARDINAL
ap-876	28	2	7	CARDINAL
ap-876	29	1	9	CARDINAL
ap-876	29	2	10	CARDINAL
ap-876	30	1	1	CARDINAL
ap-876	30	2	11	CARDINAL
ap-876	30	3	tp	GPE
ap-876	31	1	10	CARDINAL
ap-876	31	2	11	CARDINAL
ap-876	31	3	i. e.	PERSON
ap-876	32	1	6	CARDINAL
ap-876	32	2	9	CARDINAL
ap-876	35	1	newton	GPE
ap-876	36	1	three-dimensionally	DATE
ap-876	36	2	5	CARDINAL
ap-876	36	3	6	CARDINAL
ap-876	37	1	3	CARDINAL
ap-876	38	1	1	CARDINAL
ap-876	39	1	30	CARDINAL
ap-876	39	2	100	CARDINAL
ap-876	39	3	100	CARDINAL
ap-876	39	4	20	CARDINAL
ap-876	39	5	2	CARDINAL
ap-876	39	6	1×1016 cm	QUANTITY
ap-876	39	7	3×1020 cm	QUANTITY
ap-876	40	1	2	CARDINAL
ap-876	40	2	36	CARDINAL
ap-876	40	3	czech	NORP
ap-876	40	4	acta polytechnica vol	PERSON
ap-876	41	1	46	CARDINAL
ap-876	42	1	5/2006	CARDINAL
ap-876	43	1	1	CARDINAL
ap-876	44	1	0.2 0.4 0.6 0.8 1.0	QUANTITY
ap-876	44	2	1.2	CARDINAL
ap-876	45	1	0.4	CARDINAL
ap-876	45	2	0.6	CARDINAL
ap-876	45	3	0.8	CARDINAL
ap-876	45	4	1.0	CARDINAL
ap-876	45	5	1.2	CARDINAL
ap-876	46	1	2	CARDINAL
ap-876	46	2	0.2 0.4 0.6 0.8 1.0 1.2	QUANTITY
ap-876	47	1	0.05	CARDINAL
ap-876	47	2	1	CARDINAL
ap-876	47	3	7	CARDINAL
ap-876	47	4	0.2 10	TIME
ap-876	48	1	3	CARDINAL
ap-876	50	1	1	CARDINAL
ap-876	50	2	45	CARDINAL
ap-876	50	3	2.5	CARDINAL
ap-876	50	4	2×1020 cm	QUANTITY
ap-876	52	1	3	CARDINAL
ap-876	53	1	8	CARDINAL
ap-876	54	1	4	CARDINAL
ap-876	56	1	4	CARDINAL
ap-876	56	2	5	CARDINAL
ap-876	57	1	30	CARDINAL
ap-876	60	1	6	CARDINAL
ap-876	61	1	20	CARDINAL
ap-876	65	1	czech	NORP
ap-876	65	2	37	CARDINAL
ap-876	65	3	acta polytechnica vol	PERSON
ap-876	66	1	46	CARDINAL
ap-876	67	1	1.2	CARDINAL
ap-876	68	1	90	CARDINAL
ap-876	68	2	45	CARDINAL
ap-876	68	3	30	CARDINAL
ap-876	68	4	15	CARDINAL
ap-876	68	5	10	CARDINAL
ap-876	68	6	1	CARDINAL
ap-876	69	1	4	CARDINAL
ap-876	69	2	0	CARDINAL
ap-876	69	3	0.4 0.8 1.2	CARDINAL
ap-876	70	1	1	CARDINAL
ap-876	70	2	90	CARDINAL
ap-876	70	3	0.8 10	CARDINAL
ap-876	70	4	45	CARDINAL
ap-876	70	5	30	CARDINAL
ap-876	70	6	15	CARDINAL
ap-876	70	7	10	CARDINAL
ap-876	71	1	5	CARDINAL
ap-876	71	2	0.2 0.4 0.6 0.8 1.0	QUANTITY
ap-876	71	3	1.2	CARDINAL
ap-876	72	1	1	CARDINAL
ap-876	72	2	30	CARDINAL
ap-876	73	1	25	CARDINAL
ap-876	73	2	20	CARDINAL
ap-876	73	3	15	CARDINAL
ap-876	73	4	10	CARDINAL
ap-876	73	5	5	CARDINAL
ap-876	74	1	6	CARDINAL
ap-876	75	1	0.2 0.4 0.6 0.8 1.0	QUANTITY
ap-876	75	2	1.2	CARDINAL
ap-876	76	1	1	CARDINAL
ap-876	76	2	1.5	CARDINAL
ap-876	76	3	2	CARDINAL
ap-876	76	4	2.5	CARDINAL
ap-876	76	5	3	CARDINAL
ap-876	76	6	1	CARDINAL
ap-876	77	1	1017 cm�3	QUANTITY
ap-876	84	1	9	CARDINAL
ap-876	86	1	15	CARDINAL
ap-876	86	2	1.5	CARDINAL
ap-876	87	1	0.1	CARDINAL
ap-876	88	1	3	CARDINAL
ap-876	88	2	2.8×1019 cm�3	QUANTITY
ap-876	90	1	10	CARDINAL
ap-876	91	1	11	CARDINAL
ap-876	93	1	0 v to 1	QUANTITY
ap-876	93	2	1	CARDINAL
ap-876	94	1	38	CARDINAL
ap-876	94	2	czech technical university publishing house	ORG
ap-876	94	3	acta polytechnica vol	PERSON
ap-876	95	1	46	CARDINAL
ap-876	96	1	1.2	CARDINAL
ap-876	97	1	1×10	CARDINAL
ap-876	97	2	cm17 3	PRODUCT
ap-876	97	3	1.0	CARDINAL
ap-876	97	4	3 na	QUANTITY
ap-876	98	1	8	CARDINAL
ap-876	100	1	0.2 0.4 0.6 0.8 1.0	QUANTITY
ap-876	100	2	1.2	CARDINAL
ap-876	101	1	cm21	FAC
ap-876	101	2	3vgs	CARDINAL
ap-876	101	3	1	CARDINAL
ap-876	101	4	cm20	ORG
ap-876	101	5	3	CARDINAL
ap-876	101	6	cm20	ORG
ap-876	101	7	3	CARDINAL
ap-876	101	8	cm20	ORG
ap-876	101	9	3 nd	QUANTITY
ap-876	101	10	1×10 cm 20	QUANTITY
ap-876	102	1	9	CARDINAL
ap-876	103	1	0.2 0.4 0.6 0.8 1.0	QUANTITY
ap-876	103	2	1.2	CARDINAL
ap-876	104	1	0.4	CARDINAL
ap-876	104	2	0.6	CARDINAL
ap-876	104	3	0.8	CARDINAL
ap-876	104	4	1.0	CARDINAL
ap-876	104	5	1.2	CARDINAL
ap-876	105	1	10	CARDINAL
ap-876	106	1	0.2 0.4 0.6 0.8 1 1.2	QUANTITY
ap-876	106	2	1	CARDINAL
ap-876	106	3	10	CARDINAL
ap-876	107	1	11	CARDINAL
ap-876	108	1	12	CARDINAL
ap-876	110	1	0.6	CARDINAL
ap-876	111	1	5	CARDINAL
ap-876	115	1	15	CARDINAL
ap-876	116	1	about 0.15	CARDINAL
ap-876	116	2	1	CARDINAL
ap-876	116	3	gardner	PERSON
ap-876	116	4	c. l.	PERSON
ap-876	117	1	j. appl	PERSON
ap-876	119	1	54	CARDINAL
ap-876	119	2	1994	DATE
ap-876	120	1	2	CARDINAL
ap-876	120	2	409–427	CARDINAL
ap-876	121	1	2	CARDINAL
ap-876	121	2	z.	PERSON
ap-876	125	1	31(1996	CARDINAL
ap-876	126	1	17–26	CARDINAL
ap-876	127	1	3	CARDINAL
ap-876	127	2	schenk	PERSON
ap-876	127	3	a.	PERSON
ap-876	127	4	fichtner	PERSON
ap-876	127	5	w.	PERSON
ap-876	128	1	ieee trans. electron devices	ORG
ap-876	129	1	48 (2001	DATE
ap-876	129	2	2	CARDINAL
ap-876	129	3	279–284	CARDINAL
ap-876	130	1	4	CARDINAL
ap-876	130	2	s.	PERSON
ap-876	131	1	berlin	GPE
ap-876	131	2	germany	GPE
ap-876	131	3	springer-verlag 1984	ORG
ap-876	132	1	5	CARDINAL
ap-876	132	2	w.	PERSON
ap-876	132	3	stenzel	GPE
ap-876	132	4	r.	NORP
ap-876	133	1	6	CARDINAL
ap-876	133	2	j.	PERSON
ap-876	133	3	stenzel	GPE
ap-876	133	4	r.	NORP
ap-876	133	5	klix	GPE
ap-876	133	6	w.	PERSON
ap-876	133	7	in0.53ga0.47as-in0.52al0.48as	ORG
ap-876	133	8	hemts	ORG
ap-876	135	1	51 (2004	DATE
ap-876	135	2	5	CARDINAL
ap-876	135	3	684-692	CARDINAL
ap-876	136	1	7	CARDINAL
ap-876	136	2	lee	PERSON
ap-876	136	3	j. h.	PERSON
ap-876	139	1	1999	DATE
ap-876	140	1	3.5.1–3.5.4	CARDINAL
ap-876	141	1	8	CARDINAL
ap-876	141	2	m.	PERSON
ap-876	141	3	10	CARDINAL
ap-876	142	1	26 (2005	DATE
ap-876	142	2	317–319	CARDINAL
ap-876	143	1	dr.	PERSON
ap-876	144	1	habil roland	PERSON
ap-876	144	2	stenzel e-mail	PERSON
ap-876	144	3	stenzel@et.htw-dresden.de leif müller tom herrmann prof	PERSON
ap-876	145	1	dr.	PERSON
ap-876	146	1	habil wilfried klix	PERSON
ap-876	146	2	dresden friedrich	GPE
ap-876	146	3	1	CARDINAL
ap-876	146	4	dresden	GPE
ap-876	146	5	germany	GPE
ap-876	146	6	czech technical university publishing house	ORG
ap-876	146	7	39	CARDINAL
ap-876	146	8	acta polytechnica vol	PERSON
ap-876	147	1	46	CARDINAL
ap-876	149	1	1	CARDINAL
ap-876	149	2	0	CARDINAL
ap-876	149	3	1	CARDINAL
ap-876	149	4	0	CARDINAL
ap-876	149	5	1	CARDINAL
ap-876	150	1	12	CARDINAL