id	sid	tid	token	lemma	pos
ap-10001	1	1	acta	acta	PROPN
ap-10001	1	2	polytechnica	polytechnica	PROPN
ap-10001	1	3	https://doi.org/10.14311/ap.2025.65.0406	https://doi.org/10.14311/ap.2025.65.0406	PUNCT
ap-10001	1	4	acta	acta	PROPN
ap-10001	1	5	polytechnica	polytechnica	PROPN
ap-10001	1	6	65(4):406–419	65(4):406–419	PROPN
ap-10001	1	7	,	,	PUNCT
ap-10001	1	8	2025	2025	NUM
ap-10001	1	9	©	©	ADP
ap-10001	1	10	2025	2025	NUM
ap-10001	1	11	the	the	DET
ap-10001	1	12	author(s	author(s	NOUN
ap-10001	1	13	)	)	PUNCT
ap-10001	1	14	.	.	PUNCT
ap-10001	2	1	licensed	license	VERB
ap-10001	2	2	under	under	ADP
ap-10001	2	3	a	a	DET
ap-10001	2	4	cc	cc	NOUN
ap-10001	2	5	-	-	PUNCT
ap-10001	2	6	by	by	ADP
ap-10001	2	7	4.0	4.0	NUM
ap-10001	2	8	licence	licence	NOUN
ap-10001	2	9	published	publish	VERB
ap-10001	2	10	by	by	ADP
ap-10001	2	11	the	the	DET
ap-10001	2	12	czech	czech	PROPN
ap-10001	2	13	technical	technical	PROPN
ap-10001	2	14	university	university	PROPN
ap-10001	2	15	in	in	ADP
ap-10001	2	16	prague	prague	NOUN
ap-10001	2	17	improving	improve	VERB
ap-10001	2	18	the	the	DET
ap-10001	2	19	production	production	NOUN
ap-10001	2	20	process	process	NOUN
ap-10001	2	21	of	of	ADP
ap-10001	2	22	silicon	silicon	NOUN
ap-10001	2	23	nanoparticle	nanoparticle	NOUN
ap-10001	2	24	and	and	CCONJ
ap-10001	2	25	quartz	quartz	NOUN
ap-10001	2	26	microlens	microlen	VERB
ap-10001	2	27	muaath	muaath	NOUN
ap-10001	2	28	j.	j.	PROPN
ap-10001	2	29	mahmouda,∗	mahmouda,∗	PROPN
ap-10001	2	30	,	,	PUNCT
ap-10001	2	31	bassam	bassam	PROPN
ap-10001	2	32	g.	g.	PROPN
ap-10001	2	33	rasheedb	rasheedb	PROPN
ap-10001	2	34	,	,	PUNCT
ap-10001	2	35	muammel	muammel	ADJ
ap-10001	2	36	m.	m.	PROPN
ap-10001	3	1	hanonc,†	hanonc,†	PROPN
ap-10001	3	2	a	a	DET
ap-10001	3	3	scientific	scientific	ADJ
ap-10001	3	4	research	research	NOUN
ap-10001	3	5	commission	commission	PROPN
ap-10001	3	6	,	,	PUNCT
ap-10001	3	7	jadriyah	jadriyah	NOUN
ap-10001	3	8	,	,	PUNCT
ap-10001	3	9	10070	10070	NUM
ap-10001	3	10	baghdad	baghdad	PROPN
ap-10001	3	11	,	,	PUNCT
ap-10001	3	12	iraq	iraq	PROPN
ap-10001	3	13	b	b	PROPN
ap-10001	3	14	al	al	PROPN
ap-10001	3	15	-	-	PUNCT
ap-10001	3	16	nahrain	nahrain	PROPN
ap-10001	3	17	university	university	NOUN
ap-10001	3	18	,	,	PUNCT
ap-10001	3	19	college	college	NOUN
ap-10001	3	20	of	of	ADP
ap-10001	3	21	engineering	engineering	NOUN
ap-10001	3	22	,	,	PUNCT
ap-10001	3	23	laser	laser	NOUN
ap-10001	3	24	&	&	CCONJ
ap-10001	3	25	optoelectronics	optoelectronics	PROPN
ap-10001	3	26	engineering	engineering	PROPN
ap-10001	3	27	department	department	PROPN
ap-10001	3	28	,	,	PUNCT
ap-10001	3	29	jadriyah	jadriyah	NOUN
ap-10001	3	30	,	,	PUNCT
ap-10001	3	31	10072	10072	NUM
ap-10001	3	32	baghdad	baghdad	PROPN
ap-10001	3	33	,	,	PUNCT
ap-10001	3	34	iraq	iraq	PROPN
ap-10001	3	35	c	c	PROPN
ap-10001	3	36	middle	middle	PROPN
ap-10001	3	37	technical	technical	PROPN
ap-10001	3	38	university	university	PROPN
ap-10001	3	39	,	,	PUNCT
ap-10001	3	40	baquba	baquba	PROPN
ap-10001	3	41	technical	technical	PROPN
ap-10001	3	42	institute	institute	PROPN
ap-10001	3	43	,	,	PUNCT
ap-10001	3	44	muasker	muasker	PROPN
ap-10001	3	45	al	al	PROPN
ap-10001	3	46	rashid	rashid	PROPN
ap-10001	3	47	street	street	PROPN
ap-10001	3	48	,	,	PUNCT
ap-10001	3	49	10074	10074	NUM
ap-10001	3	50	baghdad	baghdad	PROPN
ap-10001	3	51	,	,	PUNCT
ap-10001	3	52	iraq	iraq	PROPN
ap-10001	3	53	∗	∗	VERB
ap-10001	3	54	corresponding	correspond	VERB
ap-10001	3	55	author	author	NOUN
ap-10001	3	56	:	:	PUNCT
ap-10001	3	57	muaathjamal@yahoo.com	muaathjamal@yahoo.com	X
ap-10001	3	58	†	†	PROPN
ap-10001	3	59	corresponding	corresponding	ADJ
ap-10001	3	60	author	author	NOUN
ap-10001	3	61	:	:	PUNCT
ap-10001	3	62	muammel.m.hanon@mtu.edu.iq	muammel.m.hanon@mtu.edu.iq	ADJ
ap-10001	3	63	abstract	abstract	NOUN
ap-10001	3	64	.	.	PUNCT
ap-10001	4	1	this	this	DET
ap-10001	4	2	study	study	NOUN
ap-10001	4	3	presents	present	VERB
ap-10001	4	4	a	a	DET
ap-10001	4	5	comprehensive	comprehensive	ADJ
ap-10001	4	6	investigation	investigation	NOUN
ap-10001	4	7	into	into	ADP
ap-10001	4	8	advanced	advanced	ADJ
ap-10001	4	9	laser	laser	NOUN
ap-10001	4	10	micro	micro	NOUN
ap-10001	4	11	/	/	NOUN
ap-10001	4	12	nano	nano	NOUN
ap-10001	4	13	machining	machining	NOUN
ap-10001	4	14	techniques	technique	NOUN
ap-10001	4	15	,	,	PUNCT
ap-10001	4	16	utilising	utilise	VERB
ap-10001	4	17	three	three	NUM
ap-10001	4	18	distinct	distinct	ADJ
ap-10001	4	19	laser	laser	NOUN
ap-10001	4	20	sources	source	NOUN
ap-10001	4	21	:	:	PUNCT
ap-10001	4	22	a	a	DET
ap-10001	4	23	q	q	ADV
ap-10001	4	24	-	-	PUNCT
ap-10001	4	25	switched	switch	VERB
ap-10001	4	26	nd	nd	NOUN
ap-10001	4	27	:	:	PUNCT
ap-10001	4	28	yag	yag	NOUN
ap-10001	4	29	laser	laser	NOUN
ap-10001	4	30	,	,	PUNCT
ap-10001	4	31	a	a	DET
ap-10001	4	32	fibre	fibre	NOUN
ap-10001	4	33	laser	laser	NOUN
ap-10001	4	34	,	,	PUNCT
ap-10001	4	35	and	and	CCONJ
ap-10001	4	36	a	a	DET
ap-10001	4	37	co2	co2	NOUN
ap-10001	4	38	laser	laser	NOUN
ap-10001	4	39	.	.	PUNCT
ap-10001	5	1	notably	notably	ADV
ap-10001	5	2	,	,	PUNCT
ap-10001	5	3	the	the	DET
ap-10001	5	4	creation	creation	NOUN
ap-10001	5	5	of	of	ADP
ap-10001	5	6	remarkably	remarkably	ADV
ap-10001	5	7	stable	stable	ADJ
ap-10001	5	8	silicon	silicon	NOUN
ap-10001	5	9	nanoparticles	nanoparticle	NOUN
ap-10001	5	10	was	be	AUX
ap-10001	5	11	achieved	achieve	VERB
ap-10001	5	12	,	,	PUNCT
ap-10001	5	13	opening	open	VERB
ap-10001	5	14	up	up	ADP
ap-10001	5	15	promising	promise	VERB
ap-10001	5	16	avenues	avenue	NOUN
ap-10001	5	17	for	for	ADP
ap-10001	5	18	new	new	ADJ
ap-10001	5	19	applications	application	NOUN
ap-10001	5	20	.	.	PUNCT
ap-10001	6	1	the	the	DET
ap-10001	6	2	potential	potential	NOUN
ap-10001	6	3	of	of	ADP
ap-10001	6	4	quartz	quartz	NOUN
ap-10001	6	5	sheets	sheet	NOUN
ap-10001	6	6	was	be	AUX
ap-10001	6	7	exploited	exploit	VERB
ap-10001	6	8	to	to	PART
ap-10001	6	9	produce	produce	VERB
ap-10001	6	10	spherical	spherical	ADJ
ap-10001	6	11	microlens	microlen	NOUN
ap-10001	6	12	arrays	array	NOUN
ap-10001	6	13	,	,	PUNCT
ap-10001	6	14	thereby	thereby	ADV
ap-10001	6	15	demonstrating	demonstrate	VERB
ap-10001	6	16	the	the	DET
ap-10001	6	17	precision	precision	NOUN
ap-10001	6	18	of	of	ADP
ap-10001	6	19	optical	optical	ADJ
ap-10001	6	20	element	element	NOUN
ap-10001	6	21	engineering	engineering	NOUN
ap-10001	6	22	.	.	PUNCT
ap-10001	7	1	the	the	DET
ap-10001	7	2	distribution	distribution	NOUN
ap-10001	7	3	of	of	ADP
ap-10001	7	4	surface	surface	NOUN
ap-10001	7	5	and	and	CCONJ
ap-10001	7	6	subsurface	subsurface	NOUN
ap-10001	7	7	temperatures	temperature	NOUN
ap-10001	7	8	for	for	ADP
ap-10001	7	9	both	both	DET
ap-10001	7	10	silicon	silicon	NOUN
ap-10001	7	11	and	and	CCONJ
ap-10001	7	12	quartz	quartz	NOUN
ap-10001	7	13	materials	material	NOUN
ap-10001	7	14	during	during	ADP
ap-10001	7	15	laser	laser	NOUN
ap-10001	7	16	processing	processing	NOUN
ap-10001	7	17	was	be	AUX
ap-10001	7	18	determined	determine	VERB
ap-10001	7	19	through	through	ADP
ap-10001	7	20	an	an	DET
ap-10001	7	21	in	in	ADP
ap-10001	7	22	-	-	PUNCT
ap-10001	7	23	depth	depth	NOUN
ap-10001	7	24	thermal	thermal	ADJ
ap-10001	7	25	analysis	analysis	NOUN
ap-10001	7	26	facilitated	facilitate	VERB
ap-10001	7	27	by	by	ADP
ap-10001	7	28	comsol	comsol	NOUN
ap-10001	7	29	software	software	NOUN
ap-10001	7	30	.	.	PUNCT
ap-10001	8	1	notably	notably	ADV
ap-10001	8	2	,	,	PUNCT
ap-10001	8	3	peak	peak	ADJ
ap-10001	8	4	temperatures	temperature	NOUN
ap-10001	8	5	of	of	ADP
ap-10001	8	6	5	5	NUM
ap-10001	8	7	700	700	NUM
ap-10001	8	8	k	k	NOUN
ap-10001	8	9	and	and	CCONJ
ap-10001	8	10	2	2	NUM
ap-10001	8	11	630	630	NUM
ap-10001	8	12	k	k	NOUN
ap-10001	8	13	were	be	AUX
ap-10001	8	14	achieved	achieve	VERB
ap-10001	8	15	for	for	ADP
ap-10001	8	16	silicon	silicon	NOUN
ap-10001	8	17	and	and	CCONJ
ap-10001	8	18	quartz	quartz	NOUN
ap-10001	8	19	,	,	PUNCT
ap-10001	8	20	respectively	respectively	ADV
ap-10001	8	21	,	,	PUNCT
ap-10001	8	22	highlighting	highlight	VERB
ap-10001	8	23	the	the	DET
ap-10001	8	24	effectiveness	effectiveness	NOUN
ap-10001	8	25	of	of	ADP
ap-10001	8	26	the	the	DET
ap-10001	8	27	laser	laser	NOUN
ap-10001	8	28	methodologies	methodology	NOUN
ap-10001	8	29	employed	employ	VERB
ap-10001	8	30	.	.	PUNCT
ap-10001	9	1	numerical	numerical	ADJ
ap-10001	9	2	optimisations	optimisation	NOUN
ap-10001	9	3	were	be	AUX
ap-10001	9	4	conducted	conduct	VERB
ap-10001	9	5	using	use	VERB
ap-10001	9	6	design	design	NOUN
ap-10001	9	7	of	of	ADP
ap-10001	9	8	experiments	experiment	NOUN
ap-10001	9	9	(	(	PUNCT
ap-10001	9	10	doe	doe	NOUN
ap-10001	9	11	)	)	PUNCT
ap-10001	9	12	software	software	NOUN
ap-10001	9	13	to	to	PART
ap-10001	9	14	enhance	enhance	VERB
ap-10001	9	15	silicon	silicon	NOUN
ap-10001	9	16	nanoparticle	nanoparticle	NOUN
ap-10001	9	17	production	production	NOUN
ap-10001	9	18	,	,	PUNCT
ap-10001	9	19	yielding	yield	VERB
ap-10001	9	20	nanoparticles	nanoparticle	NOUN
ap-10001	9	21	with	with	ADP
ap-10001	9	22	a	a	DET
ap-10001	9	23	remarkable	remarkable	ADJ
ap-10001	9	24	stability	stability	NOUN
ap-10001	9	25	parameter	parameter	NOUN
ap-10001	9	26	of	of	ADP
ap-10001	9	27	33.5	33.5	NUM
ap-10001	9	28	mv	mv	NOUN
ap-10001	9	29	.	.	PUNCT
ap-10001	10	1	furthermore	furthermore	ADV
ap-10001	10	2	,	,	PUNCT
ap-10001	10	3	notable	notable	ADJ
ap-10001	10	4	outcomes	outcome	NOUN
ap-10001	10	5	were	be	AUX
ap-10001	10	6	achieved	achieve	VERB
ap-10001	10	7	in	in	ADP
ap-10001	10	8	the	the	DET
ap-10001	10	9	production	production	NOUN
ap-10001	10	10	of	of	ADP
ap-10001	10	11	quartz	quartz	NOUN
ap-10001	10	12	microlenses	microlense	NOUN
ap-10001	10	13	with	with	ADP
ap-10001	10	14	a	a	DET
ap-10001	10	15	numerical	numerical	ADJ
ap-10001	10	16	aperture	aperture	NOUN
ap-10001	10	17	of	of	ADP
ap-10001	10	18	0.494	0.494	NUM
ap-10001	10	19	and	and	CCONJ
ap-10001	10	20	a	a	DET
ap-10001	10	21	surface	surface	NOUN
ap-10001	10	22	roughness	roughness	NOUN
ap-10001	10	23	of	of	ADP
ap-10001	10	24	4.5	4.5	NUM
ap-10001	10	25	nm	nm	NOUN
ap-10001	10	26	.	.	PUNCT
ap-10001	11	1	the	the	DET
ap-10001	11	2	controllable	controllable	ADJ
ap-10001	11	3	and	and	CCONJ
ap-10001	11	4	precise	precise	ADJ
ap-10001	11	5	nature	nature	NOUN
ap-10001	11	6	of	of	ADP
ap-10001	11	7	the	the	DET
ap-10001	11	8	laser	laser	PROPN
ap-10001	11	9	micro	micro	NOUN
ap-10001	11	10	/	/	NOUN
ap-10001	11	11	nano	nano	NOUN
ap-10001	11	12	machining	machining	NOUN
ap-10001	11	13	techniques	technique	NOUN
ap-10001	11	14	enables	enable	VERB
ap-10001	11	15	applications	application	NOUN
ap-10001	11	16	in	in	ADP
ap-10001	11	17	optoelectronics	optoelectronic	NOUN
ap-10001	11	18	and	and	CCONJ
ap-10001	11	19	advanced	advanced	ADJ
ap-10001	11	20	biological	biological	ADJ
ap-10001	11	21	imaging	imaging	NOUN
ap-10001	11	22	.	.	PUNCT
ap-10001	12	1	the	the	DET
ap-10001	12	2	exceptional	exceptional	ADJ
ap-10001	12	3	properties	property	NOUN
ap-10001	12	4	of	of	ADP
ap-10001	12	5	the	the	DET
ap-10001	12	6	engineered	engineer	VERB
ap-10001	12	7	silicon	silicon	NOUN
ap-10001	12	8	nanoparticles	nanoparticle	NOUN
ap-10001	12	9	and	and	CCONJ
ap-10001	12	10	microlens	microlen	NOUN
ap-10001	12	11	arrays	array	NOUN
ap-10001	12	12	demonstrate	demonstrate	VERB
ap-10001	12	13	their	their	PRON
ap-10001	12	14	potential	potential	NOUN
ap-10001	12	15	across	across	ADP
ap-10001	12	16	various	various	ADJ
ap-10001	12	17	scientific	scientific	ADJ
ap-10001	12	18	and	and	CCONJ
ap-10001	12	19	technological	technological	ADJ
ap-10001	12	20	domains	domain	NOUN
ap-10001	12	21	.	.	PUNCT
ap-10001	13	1	keywords	keyword	NOUN
ap-10001	13	2	:	:	PUNCT
ap-10001	13	3	quartz	quartz	NOUN
ap-10001	13	4	microlens	microlen	VERB
ap-10001	13	5	,	,	PUNCT
ap-10001	13	6	silicon	silicon	NOUN
ap-10001	13	7	nanoparticles	nanoparticle	NOUN
ap-10001	13	8	,	,	PUNCT
ap-10001	13	9	laser	laser	NOUN
ap-10001	13	10	microprocessing	microprocessing	NOUN
ap-10001	13	11	,	,	PUNCT
ap-10001	13	12	box	box	NOUN
ap-10001	13	13	behnken	behnken	NOUN
ap-10001	13	14	design	design	NOUN
ap-10001	13	15	,	,	PUNCT
ap-10001	13	16	anova	anova	PROPN
ap-10001	13	17	analysis	analysis	NOUN
ap-10001	13	18	.	.	PUNCT
ap-10001	14	1	1	1	X
ap-10001	14	2	.	.	X
ap-10001	14	3	introduction	introduction	NOUN
ap-10001	14	4	over	over	ADP
ap-10001	14	5	the	the	DET
ap-10001	14	6	past	past	ADJ
ap-10001	14	7	decade	decade	NOUN
ap-10001	14	8	,	,	PUNCT
ap-10001	14	9	there	there	PRON
ap-10001	14	10	has	have	AUX
ap-10001	14	11	been	be	AUX
ap-10001	14	12	significant	significant	ADJ
ap-10001	14	13	attention	attention	NOUN
ap-10001	14	14	and	and	CCONJ
ap-10001	14	15	research	research	NOUN
ap-10001	14	16	efforts	effort	NOUN
ap-10001	14	17	surrounding	surround	VERB
ap-10001	14	18	the	the	DET
ap-10001	14	19	laser	laser	NOUN
ap-10001	14	20	microprocessing	microprocessing	NOUN
ap-10001	14	21	of	of	ADP
ap-10001	14	22	brittle	brittle	ADJ
ap-10001	14	23	materials	material	NOUN
ap-10001	14	24	,	,	PUNCT
ap-10001	14	25	including	include	VERB
ap-10001	14	26	glass	glass	NOUN
ap-10001	14	27	,	,	PUNCT
ap-10001	14	28	ceramics	ceramic	NOUN
ap-10001	14	29	,	,	PUNCT
ap-10001	14	30	and	and	CCONJ
ap-10001	14	31	semiconductors	semiconductor	NOUN
ap-10001	14	32	[	[	X
ap-10001	14	33	1	1	NUM
ap-10001	14	34	]	]	PUNCT
ap-10001	14	35	.	.	PUNCT
ap-10001	15	1	this	this	DET
ap-10001	15	2	pivotal	pivotal	ADJ
ap-10001	15	3	technology	technology	NOUN
ap-10001	15	4	is	be	AUX
ap-10001	15	5	crucial	crucial	ADJ
ap-10001	15	6	in	in	ADP
ap-10001	15	7	producing	produce	VERB
ap-10001	15	8	precise	precise	ADJ
ap-10001	15	9	parts	part	NOUN
ap-10001	15	10	and	and	CCONJ
ap-10001	15	11	components	component	NOUN
ap-10001	15	12	used	use	VERB
ap-10001	15	13	across	across	ADP
ap-10001	15	14	various	various	ADJ
ap-10001	15	15	industries	industry	NOUN
ap-10001	15	16	,	,	PUNCT
ap-10001	15	17	such	such	ADJ
ap-10001	15	18	as	as	ADP
ap-10001	15	19	electronics	electronic	NOUN
ap-10001	15	20	,	,	PUNCT
ap-10001	15	21	optoelectronics	optoelectronic	NOUN
ap-10001	15	22	,	,	PUNCT
ap-10001	15	23	and	and	CCONJ
ap-10001	15	24	aerospace	aerospace	NOUN
ap-10001	15	25	engineering	engineering	NOUN
ap-10001	15	26	[	[	X
ap-10001	15	27	2	2	NUM
ap-10001	15	28	]	]	PUNCT
ap-10001	15	29	.	.	PUNCT
ap-10001	16	1	one	one	NUM
ap-10001	16	2	of	of	ADP
ap-10001	16	3	the	the	DET
ap-10001	16	4	challenges	challenge	NOUN
ap-10001	16	5	in	in	ADP
ap-10001	16	6	laser	laser	NOUN
ap-10001	16	7	microprocessing	microprocessing	NOUN
ap-10001	16	8	of	of	ADP
ap-10001	16	9	brittle	brittle	ADJ
ap-10001	16	10	materials	material	NOUN
ap-10001	16	11	is	be	AUX
ap-10001	16	12	the	the	DET
ap-10001	16	13	tendency	tendency	NOUN
ap-10001	16	14	of	of	ADP
ap-10001	16	15	these	these	DET
ap-10001	16	16	materials	material	NOUN
ap-10001	16	17	to	to	PART
ap-10001	16	18	crack	crack	VERB
ap-10001	16	19	and	and	CCONJ
ap-10001	16	20	fracture	fracture	VERB
ap-10001	16	21	under	under	ADP
ap-10001	16	22	stress	stress	NOUN
ap-10001	16	23	[	[	X
ap-10001	16	24	3	3	NUM
ap-10001	16	25	]	]	PUNCT
ap-10001	16	26	.	.	PUNCT
ap-10001	17	1	this	this	PRON
ap-10001	17	2	can	can	AUX
ap-10001	17	3	occur	occur	VERB
ap-10001	17	4	due	due	ADJ
ap-10001	17	5	to	to	ADP
ap-10001	17	6	thermal	thermal	ADJ
ap-10001	17	7	stress	stress	NOUN
ap-10001	17	8	generated	generate	VERB
ap-10001	17	9	by	by	ADP
ap-10001	17	10	heat	heat	NOUN
ap-10001	17	11	from	from	ADP
ap-10001	17	12	laser	laser	NOUN
ap-10001	17	13	absorption	absorption	NOUN
ap-10001	17	14	,	,	PUNCT
ap-10001	17	15	as	as	ADV
ap-10001	17	16	well	well	ADV
ap-10001	17	17	as	as	ADP
ap-10001	17	18	mechanical	mechanical	ADJ
ap-10001	17	19	stress	stress	NOUN
ap-10001	17	20	.	.	PUNCT
ap-10001	18	1	to	to	PART
ap-10001	18	2	minimise	minimise	VERB
ap-10001	18	3	the	the	DET
ap-10001	18	4	risk	risk	NOUN
ap-10001	18	5	of	of	ADP
ap-10001	18	6	cracking	cracking	NOUN
ap-10001	18	7	and	and	CCONJ
ap-10001	18	8	other	other	ADJ
ap-10001	18	9	forms	form	NOUN
ap-10001	18	10	of	of	ADP
ap-10001	18	11	damage	damage	NOUN
ap-10001	18	12	,	,	PUNCT
ap-10001	18	13	laser	laser	NOUN
ap-10001	18	14	parameters	parameter	NOUN
ap-10001	18	15	,	,	PUNCT
ap-10001	18	16	such	such	ADJ
ap-10001	18	17	as	as	ADP
ap-10001	18	18	pulse	pulse	NOUN
ap-10001	18	19	duration	duration	NOUN
ap-10001	18	20	,	,	PUNCT
ap-10001	18	21	intensity	intensity	NOUN
ap-10001	18	22	,	,	PUNCT
ap-10001	18	23	and	and	CCONJ
ap-10001	18	24	wavelength	wavelength	NOUN
ap-10001	18	25	,	,	PUNCT
ap-10001	18	26	must	must	AUX
ap-10001	18	27	be	be	AUX
ap-10001	18	28	carefully	carefully	ADV
ap-10001	18	29	chosen	choose	VERB
ap-10001	18	30	[	[	PUNCT
ap-10001	18	31	4	4	NUM
ap-10001	18	32	]	]	PUNCT
ap-10001	18	33	.	.	PUNCT
ap-10001	19	1	silicon	silicon	NOUN
ap-10001	19	2	has	have	AUX
ap-10001	19	3	been	be	AUX
ap-10001	19	4	extensively	extensively	ADV
ap-10001	19	5	studied	study	VERB
ap-10001	19	6	due	due	ADP
ap-10001	19	7	to	to	ADP
ap-10001	19	8	its	its	PRON
ap-10001	19	9	critical	critical	ADJ
ap-10001	19	10	role	role	NOUN
ap-10001	19	11	in	in	ADP
ap-10001	19	12	modern	modern	ADJ
ap-10001	19	13	electronics	electronic	NOUN
ap-10001	19	14	and	and	CCONJ
ap-10001	19	15	semiconductor	semiconductor	NOUN
ap-10001	19	16	applications	application	NOUN
ap-10001	19	17	[	[	X
ap-10001	19	18	5	5	NUM
ap-10001	19	19	]	]	PUNCT
ap-10001	19	20	.	.	PUNCT
ap-10001	20	1	it	it	PRON
ap-10001	20	2	serves	serve	VERB
ap-10001	20	3	as	as	ADP
ap-10001	20	4	a	a	DET
ap-10001	20	5	fundamental	fundamental	ADJ
ap-10001	20	6	substrate	substrate	NOUN
ap-10001	20	7	material	material	NOUN
ap-10001	20	8	for	for	ADP
ap-10001	20	9	various	various	ADJ
ap-10001	20	10	electronic	electronic	ADJ
ap-10001	20	11	devices	device	NOUN
ap-10001	20	12	.	.	PUNCT
ap-10001	21	1	in	in	ADP
ap-10001	21	2	both	both	DET
ap-10001	21	3	solar	solar	ADJ
ap-10001	21	4	cells	cell	NOUN
ap-10001	21	5	and	and	CCONJ
ap-10001	21	6	other	other	ADJ
ap-10001	21	7	semiconductor	semiconductor	NOUN
ap-10001	21	8	components	component	NOUN
ap-10001	21	9	,	,	PUNCT
ap-10001	21	10	crystalline	crystalline	NOUN
ap-10001	21	11	and	and	CCONJ
ap-10001	21	12	amorphous	amorphous	ADJ
ap-10001	21	13	silicon	silicon	NOUN
ap-10001	21	14	are	be	AUX
ap-10001	21	15	widely	widely	ADV
ap-10001	21	16	used	use	VERB
ap-10001	21	17	[	[	PUNCT
ap-10001	21	18	6	6	NUM
ap-10001	21	19	]	]	PUNCT
ap-10001	21	20	.	.	PUNCT
ap-10001	22	1	silicon	silicon	NOUN
ap-10001	22	2	nanoparticles	nanoparticle	NOUN
ap-10001	22	3	(	(	PUNCT
ap-10001	22	4	nps	nps	PROPN
ap-10001	22	5	)	)	PUNCT
ap-10001	22	6	are	be	AUX
ap-10001	22	7	also	also	ADV
ap-10001	22	8	widely	widely	ADV
ap-10001	22	9	used	use	VERB
ap-10001	22	10	in	in	ADP
ap-10001	22	11	photovoltaics	photovoltaic	NOUN
ap-10001	22	12	,	,	PUNCT
ap-10001	22	13	optoelectronics	optoelectronic	NOUN
ap-10001	22	14	,	,	PUNCT
ap-10001	22	15	biomedical	biomedical	ADJ
ap-10001	22	16	applications	application	NOUN
ap-10001	22	17	,	,	PUNCT
ap-10001	22	18	and	and	CCONJ
ap-10001	22	19	energy	energy	NOUN
ap-10001	22	20	storage	storage	NOUN
ap-10001	22	21	due	due	ADP
ap-10001	22	22	to	to	ADP
ap-10001	22	23	their	their	PRON
ap-10001	22	24	environmentally	environmentally	ADV
ap-10001	22	25	friendly	friendly	ADJ
ap-10001	22	26	nature	nature	NOUN
ap-10001	22	27	,	,	PUNCT
ap-10001	22	28	high	high	ADJ
ap-10001	22	29	surface	surface	NOUN
ap-10001	22	30	-	-	PUNCT
ap-10001	22	31	area	area	NOUN
ap-10001	22	32	-	-	PUNCT
ap-10001	22	33	to	to	ADP
ap-10001	22	34	-	-	PUNCT
ap-10001	22	35	volume	volume	NOUN
ap-10001	22	36	ratio	ratio	NOUN
ap-10001	22	37	,	,	PUNCT
ap-10001	22	38	tunable	tunable	ADJ
ap-10001	22	39	optical	optical	ADJ
ap-10001	22	40	properties	property	NOUN
ap-10001	22	41	,	,	PUNCT
ap-10001	22	42	and	and	CCONJ
ap-10001	22	43	biocompatibility	biocompatibility	NOUN
ap-10001	23	1	[	[	X
ap-10001	23	2	7	7	NUM
ap-10001	23	3	]	]	PUNCT
ap-10001	23	4	.	.	PUNCT
ap-10001	24	1	however	however	ADV
ap-10001	24	2	,	,	PUNCT
ap-10001	24	3	they	they	PRON
ap-10001	24	4	are	be	AUX
ap-10001	24	5	susceptible	susceptible	ADJ
ap-10001	24	6	to	to	ADP
ap-10001	24	7	oxidation	oxidation	NOUN
ap-10001	24	8	,	,	PUNCT
ap-10001	24	9	present	present	ADJ
ap-10001	24	10	synthesis	synthesis	NOUN
ap-10001	24	11	challenges	challenge	NOUN
ap-10001	24	12	,	,	PUNCT
ap-10001	24	13	and	and	CCONJ
ap-10001	24	14	exhibit	exhibit	VERB
ap-10001	24	15	low	low	ADJ
ap-10001	24	16	electrical	electrical	ADJ
ap-10001	24	17	conductivity	conductivity	NOUN
ap-10001	24	18	.	.	PUNCT
ap-10001	25	1	on	on	ADP
ap-10001	25	2	the	the	DET
ap-10001	25	3	other	other	ADJ
ap-10001	25	4	hand	hand	NOUN
ap-10001	25	5	,	,	PUNCT
ap-10001	25	6	glass	glass	NOUN
ap-10001	25	7	microstructures	microstructure	NOUN
ap-10001	25	8	are	be	AUX
ap-10001	25	9	used	use	VERB
ap-10001	25	10	in	in	ADP
ap-10001	25	11	many	many	ADJ
ap-10001	25	12	fields	field	NOUN
ap-10001	25	13	,	,	PUNCT
ap-10001	25	14	such	such	ADJ
ap-10001	25	15	as	as	ADP
ap-10001	25	16	biomedicine	biomedicine	NOUN
ap-10001	25	17	,	,	PUNCT
ap-10001	25	18	biochemistry	biochemistry	NOUN
ap-10001	25	19	,	,	PUNCT
ap-10001	25	20	lab	lab	NOUN
ap-10001	25	21	-	-	PUNCT
ap-10001	25	22	on	on	ADP
ap-10001	25	23	-	-	PUNCT
ap-10001	25	24	a	a	DET
ap-10001	25	25	-	-	PUNCT
ap-10001	25	26	chip	chip	NOUN
ap-10001	25	27	devices	device	NOUN
ap-10001	25	28	,	,	PUNCT
ap-10001	25	29	sensors	sensor	NOUN
ap-10001	25	30	,	,	PUNCT
ap-10001	25	31	and	and	CCONJ
ap-10001	25	32	hydrophobic	hydrophobic	NOUN
ap-10001	25	33	applications	application	NOUN
ap-10001	25	34	,	,	PUNCT
ap-10001	25	35	glass	glass	NOUN
ap-10001	25	36	machining	machining	NOUN
ap-10001	25	37	,	,	PUNCT
ap-10001	25	38	therefore	therefore	ADV
ap-10001	25	39	,	,	PUNCT
ap-10001	25	40	attracts	attract	VERB
ap-10001	25	41	much	much	ADJ
ap-10001	25	42	attention	attention	NOUN
ap-10001	25	43	[	[	X
ap-10001	25	44	8	8	NUM
ap-10001	25	45	]	]	PUNCT
ap-10001	25	46	.	.	PUNCT
ap-10001	26	1	there	there	PRON
ap-10001	26	2	is	be	VERB
ap-10001	26	3	a	a	DET
ap-10001	26	4	significant	significant	ADJ
ap-10001	26	5	demand	demand	NOUN
ap-10001	26	6	for	for	ADP
ap-10001	26	7	hightech	hightech	NOUN
ap-10001	26	8	macro	macro	ADJ
ap-10001	26	9	products	product	NOUN
ap-10001	26	10	for	for	ADP
ap-10001	26	11	applications	application	NOUN
ap-10001	26	12	in	in	ADP
ap-10001	26	13	biotechnology	biotechnology	NOUN
ap-10001	26	14	,	,	PUNCT
ap-10001	26	15	microelectronics	microelectronic	NOUN
ap-10001	26	16	,	,	PUNCT
ap-10001	26	17	telecommunications	telecommunication	NOUN
ap-10001	26	18	,	,	PUNCT
ap-10001	26	19	microelectromechanical	microelectromechanical	ADJ
ap-10001	26	20	systems	system	NOUN
ap-10001	26	21	(	(	PUNCT
ap-10001	26	22	mems	mem	NOUN
ap-10001	26	23	)	)	PUNCT
ap-10001	26	24	,	,	PUNCT
ap-10001	26	25	and	and	CCONJ
ap-10001	26	26	medical	medical	ADJ
ap-10001	26	27	sector	sector	NOUN
ap-10001	26	28	.	.	PUNCT
ap-10001	27	1	quartz	quartz	NOUN
ap-10001	27	2	microlenses	microlense	NOUN
ap-10001	27	3	,	,	PUNCT
ap-10001	27	4	in	in	ADP
ap-10001	27	5	particular	particular	ADJ
ap-10001	27	6	,	,	PUNCT
ap-10001	27	7	play	play	VERB
ap-10001	27	8	a	a	DET
ap-10001	27	9	vital	vital	ADJ
ap-10001	27	10	role	role	NOUN
ap-10001	27	11	in	in	ADP
ap-10001	27	12	fibre	fibre	NOUN
ap-10001	27	13	optic	optic	NOUN
ap-10001	27	14	communications	communication	NOUN
ap-10001	27	15	,	,	PUNCT
ap-10001	27	16	imaging	imaging	NOUN
ap-10001	27	17	and	and	CCONJ
ap-10001	27	18	sensing	sense	VERB
ap-10001	27	19	,	,	PUNCT
ap-10001	27	20	laser	laser	NOUN
ap-10001	27	21	processing	processing	NOUN
ap-10001	27	22	,	,	PUNCT
ap-10001	27	23	and	and	CCONJ
ap-10001	27	24	lithography	lithography	NOUN
ap-10001	27	25	due	due	ADP
ap-10001	27	26	to	to	ADP
ap-10001	27	27	their	their	PRON
ap-10001	27	28	broad	broad	ADJ
ap-10001	27	29	optical	optical	ADJ
ap-10001	27	30	transmission	transmission	NOUN
ap-10001	27	31	(	(	PUNCT
ap-10001	27	32	uv	uv	NOUN
ap-10001	27	33	to	to	ADP
ap-10001	27	34	ir	ir	PROPN
ap-10001	27	35	)	)	PUNCT
ap-10001	27	36	,	,	PUNCT
ap-10001	27	37	high	high	ADJ
ap-10001	27	38	thermal	thermal	ADJ
ap-10001	27	39	stability	stability	NOUN
ap-10001	27	40	,	,	PUNCT
ap-10001	27	41	and	and	CCONJ
ap-10001	27	42	low	low	ADJ
ap-10001	27	43	optical	optical	ADJ
ap-10001	27	44	loss	loss	NOUN
ap-10001	27	45	.	.	PUNCT
ap-10001	28	1	despite	despite	SCONJ
ap-10001	28	2	these	these	DET
ap-10001	28	3	advantages	advantage	NOUN
ap-10001	28	4	,	,	PUNCT
ap-10001	28	5	their	their	PRON
ap-10001	28	6	widespread	widespread	ADJ
ap-10001	28	7	adoption	adoption	NOUN
ap-10001	28	8	is	be	AUX
ap-10001	28	9	sometimes	sometimes	ADV
ap-10001	28	10	hindered	hinder	VERB
ap-10001	28	11	by	by	ADP
ap-10001	28	12	the	the	DET
ap-10001	28	13	complexity	complexity	NOUN
ap-10001	28	14	of	of	ADP
ap-10001	28	15	production	production	NOUN
ap-10001	28	16	,	,	PUNCT
ap-10001	28	17	high	high	ADJ
ap-10001	28	18	production	production	NOUN
ap-10001	28	19	costs	cost	NOUN
ap-10001	28	20	,	,	PUNCT
ap-10001	28	21	and	and	CCONJ
ap-10001	28	22	the	the	DET
ap-10001	28	23	material	material	NOUN
ap-10001	28	24	brittleness	brittleness	NOUN
ap-10001	28	25	[	[	X
ap-10001	28	26	9	9	NUM
ap-10001	28	27	]	]	PUNCT
ap-10001	28	28	.	.	PUNCT
ap-10001	29	1	response	response	NOUN
ap-10001	29	2	surface	surface	NOUN
ap-10001	29	3	methodology	methodology	NOUN
ap-10001	29	4	(	(	PUNCT
ap-10001	29	5	rsm	rsm	NOUN
ap-10001	29	6	)	)	PUNCT
ap-10001	29	7	is	be	AUX
ap-10001	29	8	also	also	ADV
ap-10001	29	9	known	know	VERB
ap-10001	29	10	as	as	ADP
ap-10001	29	11	the	the	DET
ap-10001	29	12	box	box	PROPN
ap-10001	29	13	-	-	PUNCT
ap-10001	29	14	wilson	wilson	PROPN
ap-10001	29	15	methodology	methodology	NOUN
ap-10001	29	16	.	.	PUNCT
ap-10001	30	1	surface	surface	NOUN
ap-10001	30	2	methodology	methodology	NOUN
ap-10001	30	3	responses	response	NOUN
ap-10001	30	4	are	be	AUX
ap-10001	30	5	a	a	DET
ap-10001	30	6	set	set	NOUN
ap-10001	30	7	of	of	ADP
ap-10001	30	8	statistical	statistical	ADJ
ap-10001	30	9	and	and	CCONJ
ap-10001	30	10	mathematical	mathematical	ADJ
ap-10001	30	11	406	406	NUM
ap-10001	30	12	https://doi.org/10.14311/ap.2025.65.0406	https://doi.org/10.14311/ap.2025.65.0406	NOUN
ap-10001	30	13	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
ap-10001	30	14	https://www.cvut.cz/en	https://www.cvut.cz/en	PROPN
ap-10001	30	15	vol	vol	NOUN
ap-10001	30	16	.	.	PROPN
ap-10001	31	1	65	65	NUM
ap-10001	31	2	no	no	NOUN
ap-10001	31	3	.	.	PUNCT
ap-10001	32	1	4/2025	4/2025	NUM
ap-10001	32	2	improving	improve	VERB
ap-10001	32	3	the	the	DET
ap-10001	32	4	production	production	NOUN
ap-10001	32	5	process	process	NOUN
ap-10001	32	6	of	of	ADP
ap-10001	32	7	silicon	silicon	NOUN
ap-10001	32	8	nanoparticle	nanoparticle	NOUN
ap-10001	32	9	.	.	PUNCT
ap-10001	32	10	.	.	PUNCT
ap-10001	32	11	.	.	PUNCT
ap-10001	33	1	name	name	NOUN
ap-10001	33	2	symbol	symbol	NOUN
ap-10001	33	3	range	range	NOUN
ap-10001	33	4	unitnd	unitnd	ADJ
ap-10001	33	5	:	:	PUNCT
ap-10001	33	6	yag	yag	NOUN
ap-10001	33	7	laser	laser	NOUN
ap-10001	33	8	fiber	fiber	NOUN
ap-10001	33	9	laser	laser	NOUN
ap-10001	33	10	co2	co2	NOUN
ap-10001	33	11	laser	laser	NOUN
ap-10001	33	12	wavelength	wavelength	NOUN
ap-10001	33	13	λ	λ	PROPN
ap-10001	33	14	1	1	NUM
ap-10001	33	15	064	064	NUM
ap-10001	33	16	nm	nm	PRON
ap-10001	33	17	1	1	NUM
ap-10001	33	18	064	064	NUM
ap-10001	33	19	nm	nm	DET
ap-10001	33	20	10.6	10.6	NUM
ap-10001	33	21	µm	µm	ADP
ap-10001	33	22	nm	nm	ADJ
ap-10001	33	23	energy	energy	NOUN
ap-10001	33	24	e	e	NOUN
ap-10001	33	25	0.1–2	0.1–2	PROPN
ap-10001	33	26	j	j	PROPN
ap-10001	33	27	beam	beam	PROPN
ap-10001	33	28	diameter	diameter	NOUN
ap-10001	34	1	d	d	NOUN
ap-10001	34	2	1	1	NUM
ap-10001	34	3	0.1	0.1	NUM
ap-10001	34	4	2	2	NUM
ap-10001	34	5	mm	mm	NOUN
ap-10001	34	6	pulse	pulse	NOUN
ap-10001	34	7	duration	duration	NOUN
ap-10001	34	8	τ	τ	PROPN
ap-10001	34	9	10	10	NUM
ap-10001	34	10	130	130	NUM
ap-10001	34	11	ns	ns	NUM
ap-10001	34	12	repetition	repetition	NOUN
ap-10001	34	13	rate	rate	NOUN
ap-10001	34	14	r	r	NOUN
ap-10001	34	15	6	6	NUM
ap-10001	34	16	30	30	NUM
ap-10001	34	17	000	000	NUM
ap-10001	34	18	hz	hz	VERB
ap-10001	34	19	power	power	NOUN
ap-10001	34	20	p	p	PROPN
ap-10001	34	21	0.1–30	0.1–30	PROPN
ap-10001	34	22	0.1–100	0.1–100	PROPN
ap-10001	35	1	w	w	NOUN
ap-10001	35	2	laser	laser	NOUN
ap-10001	35	3	speed	speed	NOUN
ap-10001	35	4	s	s	PART
ap-10001	35	5	10–1	10–1	PROPN
ap-10001	35	6	000	000	NUM
ap-10001	35	7	1–6	1–6	NUM
ap-10001	35	8	mm	mm	NOUN
ap-10001	35	9	s−1	s−1	PROPN
ap-10001	35	10	operation	operation	NOUN
ap-10001	35	11	mode	mode	NOUN
ap-10001	35	12	o	o	PROPN
ap-10001	35	13	pulse	pulse	NOUN
ap-10001	35	14	pulse	pulse	NOUN
ap-10001	35	15	cw	cw	NOUN
ap-10001	35	16	table	table	NOUN
ap-10001	35	17	1	1	NUM
ap-10001	35	18	.	.	PUNCT
ap-10001	35	19	laser	laser	NOUN
ap-10001	35	20	parameters	parameter	NOUN
ap-10001	35	21	.	.	PUNCT
ap-10001	36	1	techniques	technique	NOUN
ap-10001	36	2	used	use	VERB
ap-10001	36	3	to	to	PART
ap-10001	36	4	model	model	VERB
ap-10001	36	5	and	and	CCONJ
ap-10001	36	6	analyse	analyse	NOUN
ap-10001	36	7	problems	problem	NOUN
ap-10001	36	8	for	for	ADP
ap-10001	36	9	which	which	PRON
ap-10001	36	10	the	the	DET
ap-10001	36	11	answer	answer	NOUN
ap-10001	36	12	is	be	AUX
ap-10001	36	13	influenced	influence	VERB
ap-10001	36	14	by	by	ADP
ap-10001	36	15	a	a	DET
ap-10001	36	16	variety	variety	NOUN
ap-10001	36	17	of	of	ADP
ap-10001	36	18	variables	variable	NOUN
ap-10001	36	19	.	.	PUNCT
ap-10001	37	1	the	the	DET
ap-10001	37	2	rsm	rsm	PROPN
ap-10001	37	3	ties	tie	VERB
ap-10001	37	4	a	a	DET
ap-10001	37	5	response	response	NOUN
ap-10001	37	6	or	or	CCONJ
ap-10001	37	7	result	result	VERB
ap-10001	37	8	variable	variable	NOUN
ap-10001	37	9	(	(	PUNCT
ap-10001	37	10	output	output	NOUN
ap-10001	37	11	)	)	PUNCT
ap-10001	37	12	to	to	ADP
ap-10001	37	13	the	the	DET
ap-10001	37	14	data	datum	NOUN
ap-10001	37	15	(	(	PUNCT
ap-10001	37	16	input	input	NOUN
ap-10001	37	17	)	)	PUNCT
ap-10001	37	18	that	that	PRON
ap-10001	37	19	influences	influence	VERB
ap-10001	37	20	it	it	PRON
ap-10001	37	21	.	.	PUNCT
ap-10001	38	1	if	if	SCONJ
ap-10001	38	2	an	an	DET
ap-10001	38	3	area	area	NOUN
ap-10001	38	4	with	with	ADP
ap-10001	38	5	an	an	DET
ap-10001	38	6	ideal	ideal	ADJ
ap-10001	38	7	response	response	NOUN
ap-10001	38	8	is	be	AUX
ap-10001	38	9	discovered	discover	VERB
ap-10001	38	10	,	,	PUNCT
ap-10001	38	11	the	the	DET
ap-10001	38	12	model	model	NOUN
ap-10001	38	13	is	be	AUX
ap-10001	38	14	modified	modify	VERB
ap-10001	38	15	to	to	PART
ap-10001	38	16	connect	connect	VERB
ap-10001	38	17	to	to	ADP
ap-10001	38	18	that	that	DET
ap-10001	38	19	area	area	NOUN
ap-10001	38	20	so	so	SCONJ
ap-10001	38	21	that	that	SCONJ
ap-10001	38	22	the	the	DET
ap-10001	38	23	analysis	analysis	NOUN
ap-10001	38	24	can	can	AUX
ap-10001	38	25	be	be	AUX
ap-10001	38	26	performed	perform	VERB
ap-10001	38	27	to	to	PART
ap-10001	38	28	determine	determine	VERB
ap-10001	38	29	the	the	DET
ap-10001	38	30	optimal	optimal	ADJ
ap-10001	38	31	area	area	NOUN
ap-10001	38	32	.	.	PUNCT
ap-10001	39	1	the	the	DET
ap-10001	39	2	rsm	rsm	PROPN
ap-10001	39	3	must	must	AUX
ap-10001	39	4	be	be	AUX
ap-10001	39	5	used	use	VERB
ap-10001	39	6	in	in	ADP
ap-10001	39	7	the	the	DET
ap-10001	39	8	correct	correct	ADJ
ap-10001	39	9	sequence	sequence	NOUN
ap-10001	39	10	according	accord	VERB
ap-10001	39	11	to	to	ADP
ap-10001	39	12	the	the	DET
ap-10001	39	13	method	method	NOUN
ap-10001	39	14	used	use	VERB
ap-10001	39	15	[	[	PUNCT
ap-10001	39	16	10	10	NUM
ap-10001	39	17	]	]	PUNCT
ap-10001	39	18	.	.	PUNCT
ap-10001	40	1	tewari	tewari	PROPN
ap-10001	40	2	et	et	PROPN
ap-10001	40	3	al	al	PROPN
ap-10001	40	4	.	.	PUNCT
ap-10001	41	1	[	[	X
ap-10001	41	2	11	11	NUM
ap-10001	41	3	]	]	PUNCT
ap-10001	41	4	investigated	investigate	VERB
ap-10001	41	5	the	the	DET
ap-10001	41	6	quality	quality	NOUN
ap-10001	41	7	of	of	ADP
ap-10001	41	8	holes	hole	NOUN
ap-10001	41	9	in	in	ADP
ap-10001	41	10	laser	laser	NOUN
ap-10001	41	11	-	-	PUNCT
ap-10001	41	12	drilled	drill	VERB
ap-10001	41	13	kenaf	kenaf	NOUN
ap-10001	41	14	/	/	SYM
ap-10001	41	15	high	high	ADJ
ap-10001	41	16	-	-	PUNCT
ap-10001	41	17	density	density	NOUN
ap-10001	41	18	polyethylene	polyethylene	NOUN
ap-10001	41	19	composites	composite	NOUN
ap-10001	41	20	by	by	ADP
ap-10001	41	21	measuring	measure	VERB
ap-10001	41	22	the	the	DET
ap-10001	41	23	kerf	kerf	NOUN
ap-10001	41	24	taper	taper	NOUN
ap-10001	41	25	angle	angle	NOUN
ap-10001	41	26	,	,	PUNCT
ap-10001	41	27	the	the	DET
ap-10001	41	28	size	size	NOUN
ap-10001	41	29	of	of	ADP
ap-10001	41	30	the	the	DET
ap-10001	41	31	heat	heat	NOUN
ap-10001	41	32	-	-	PUNCT
ap-10001	41	33	affected	affect	VERB
ap-10001	41	34	zone	zone	NOUN
ap-10001	41	35	,	,	PUNCT
ap-10001	41	36	and	and	CCONJ
ap-10001	41	37	the	the	DET
ap-10001	41	38	surface	surface	NOUN
ap-10001	41	39	roughness	roughness	NOUN
ap-10001	41	40	.	.	PUNCT
ap-10001	42	1	they	they	PRON
ap-10001	42	2	used	use	VERB
ap-10001	42	3	microwave	microwave	NOUN
ap-10001	42	4	-	-	PUNCT
ap-10001	42	5	assisted	assist	VERB
ap-10001	42	6	compression	compression	NOUN
ap-10001	42	7	moulding	moulding	NOUN
ap-10001	42	8	to	to	PART
ap-10001	42	9	create	create	VERB
ap-10001	42	10	composites	composite	NOUN
ap-10001	42	11	with	with	ADP
ap-10001	42	12	20	20	NUM
ap-10001	42	13	wt	wt	NOUN
ap-10001	43	1	.	.	PUNCT
ap-10001	43	2	%	%	NOUN
ap-10001	43	3	kenaf	kenaf	PROPN
ap-10001	43	4	fibre	fibre	NOUN
ap-10001	44	1	and	and	CCONJ
ap-10001	45	1	investigated	investigate	VERB
ap-10001	45	2	the	the	DET
ap-10001	45	3	effects	effect	NOUN
ap-10001	45	4	of	of	ADP
ap-10001	45	5	laser	laser	NOUN
ap-10001	45	6	power	power	NOUN
ap-10001	45	7	and	and	CCONJ
ap-10001	45	8	cutting	cut	VERB
ap-10001	45	9	speed	speed	NOUN
ap-10001	45	10	.	.	PUNCT
ap-10001	46	1	a	a	DET
ap-10001	46	2	central	central	ADJ
ap-10001	46	3	composite	composite	ADJ
ap-10001	46	4	design	design	NOUN
ap-10001	46	5	produced	produce	VERB
ap-10001	46	6	a	a	DET
ap-10001	46	7	minimum	minimum	ADJ
ap-10001	46	8	kerf	kerf	NOUN
ap-10001	46	9	taper	taper	NOUN
ap-10001	46	10	of	of	ADP
ap-10001	46	11	0.056	0.056	NUM
ap-10001	46	12	°	°	NOUN
ap-10001	46	13	and	and	CCONJ
ap-10001	46	14	a	a	DET
ap-10001	46	15	surface	surface	NOUN
ap-10001	46	16	roughness	roughness	NOUN
ap-10001	46	17	of	of	ADP
ap-10001	46	18	3.83	3.83	NUM
ap-10001	46	19	±	±	NUM
ap-10001	46	20	0.19	0.19	NUM
ap-10001	46	21	µm	µm	NOUN
ap-10001	46	22	at	at	ADP
ap-10001	46	23	120	120	NUM
ap-10001	46	24	w	w	NOUN
ap-10001	46	25	and	and	CCONJ
ap-10001	46	26	2	2	NUM
ap-10001	46	27	mm	mm	NOUN
ap-10001	46	28	s−1	s−1	PROPN
ap-10001	46	29	.	.	PUNCT
ap-10001	47	1	a	a	DET
ap-10001	47	2	regression	regression	NOUN
ap-10001	47	3	model	model	NOUN
ap-10001	47	4	demonstrated	demonstrate	VERB
ap-10001	47	5	a	a	DET
ap-10001	47	6	high	high	ADJ
ap-10001	47	7	level	level	NOUN
ap-10001	47	8	of	of	ADP
ap-10001	47	9	agreement	agreement	NOUN
ap-10001	47	10	with	with	ADP
ap-10001	47	11	the	the	DET
ap-10001	47	12	experimental	experimental	ADJ
ap-10001	47	13	data	datum	NOUN
ap-10001	47	14	,	,	PUNCT
ap-10001	47	15	with	with	ADP
ap-10001	47	16	errors	error	NOUN
ap-10001	47	17	of	of	ADP
ap-10001	47	18	less	less	ADJ
ap-10001	47	19	than	than	ADP
ap-10001	47	20	5.35	5.35	NUM
ap-10001	47	21	%	%	NOUN
ap-10001	47	22	,	,	PUNCT
ap-10001	47	23	validating	validate	VERB
ap-10001	47	24	the	the	DET
ap-10001	47	25	method	method	NOUN
ap-10001	47	26	’s	’s	PART
ap-10001	47	27	suitability	suitability	NOUN
ap-10001	47	28	for	for	ADP
ap-10001	47	29	precision	precision	NOUN
ap-10001	47	30	machining	machining	NOUN
ap-10001	47	31	.	.	PUNCT
ap-10001	48	1	theeda	theeda	PROPN
ap-10001	48	2	et	et	PROPN
ap-10001	48	3	al	al	PROPN
ap-10001	48	4	.	.	PUNCT
ap-10001	49	1	[	[	X
ap-10001	49	2	12	12	NUM
ap-10001	49	3	]	]	PUNCT
ap-10001	49	4	studied	study	VERB
ap-10001	49	5	industrial	industrial	ADJ
ap-10001	49	6	ultrafast	ultrafast	ADJ
ap-10001	49	7	lasers	laser	NOUN
ap-10001	49	8	with	with	ADP
ap-10001	49	9	pulse	pulse	NOUN
ap-10001	49	10	durations	duration	NOUN
ap-10001	49	11	ranging	range	VERB
ap-10001	49	12	from	from	ADP
ap-10001	49	13	300	300	NUM
ap-10001	49	14	fs	f	NOUN
ap-10001	49	15	to	to	ADP
ap-10001	49	16	10	10	NUM
ap-10001	49	17	ps	p	NOUN
ap-10001	49	18	,	,	PUNCT
ap-10001	49	19	powers	power	NOUN
ap-10001	49	20	of	of	ADP
ap-10001	49	21	up	up	ADP
ap-10001	49	22	to	to	PART
ap-10001	49	23	150	150	NUM
ap-10001	49	24	w	w	NOUN
ap-10001	49	25	,	,	PUNCT
ap-10001	49	26	and	and	CCONJ
ap-10001	49	27	pulse	pulse	VERB
ap-10001	49	28	energy	energy	NOUN
ap-10001	49	29	of	of	ADP
ap-10001	49	30	10–250	10–250	NUM
ap-10001	49	31	µj	µj	PROPN
ap-10001	49	32	for	for	ADP
ap-10001	49	33	precision	precision	NOUN
ap-10001	49	34	micro	micro	NOUN
ap-10001	49	35	-	-	NOUN
ap-10001	49	36	machining	machining	NOUN
ap-10001	49	37	.	.	PUNCT
ap-10001	50	1	their	their	PRON
ap-10001	50	2	research	research	NOUN
ap-10001	50	3	examines	examine	VERB
ap-10001	50	4	the	the	DET
ap-10001	50	5	influence	influence	NOUN
ap-10001	50	6	of	of	ADP
ap-10001	50	7	major	major	ADJ
ap-10001	50	8	laser	laser	NOUN
ap-10001	50	9	settings	setting	NOUN
ap-10001	50	10	on	on	ADP
ap-10001	50	11	machining	machine	VERB
ap-10001	50	12	speed	speed	NOUN
ap-10001	50	13	and	and	CCONJ
ap-10001	50	14	quality	quality	NOUN
ap-10001	50	15	.	.	PUNCT
ap-10001	51	1	it	it	PRON
ap-10001	51	2	provides	provide	VERB
ap-10001	51	3	recommendations	recommendation	NOUN
ap-10001	51	4	for	for	ADP
ap-10001	51	5	optimisation	optimisation	NOUN
ap-10001	51	6	based	base	VERB
ap-10001	51	7	on	on	ADP
ap-10001	51	8	experimental	experimental	ADJ
ap-10001	51	9	data	datum	NOUN
ap-10001	51	10	for	for	ADP
ap-10001	51	11	25	25	NUM
ap-10001	51	12	materials	material	NOUN
ap-10001	51	13	.	.	PUNCT
ap-10001	52	1	furthermore	furthermore	ADV
ap-10001	52	2	,	,	PUNCT
ap-10001	52	3	they	they	PRON
ap-10001	52	4	examine	examine	VERB
ap-10001	52	5	the	the	DET
ap-10001	52	6	ultrafast	ultrafast	ADJ
ap-10001	52	7	laser	laser	NOUN
ap-10001	52	8	business	business	NOUN
ap-10001	52	9	and	and	CCONJ
ap-10001	52	10	its	its	PRON
ap-10001	52	11	industrial	industrial	ADJ
ap-10001	52	12	uses	use	NOUN
ap-10001	52	13	.	.	PUNCT
ap-10001	53	1	zheng	zheng	PROPN
ap-10001	53	2	et	et	PROPN
ap-10001	53	3	al	al	PROPN
ap-10001	53	4	.	.	PUNCT
ap-10001	54	1	[	[	X
ap-10001	54	2	13	13	NUM
ap-10001	54	3	]	]	PUNCT
ap-10001	54	4	investigated	investigate	VERB
ap-10001	54	5	the	the	DET
ap-10001	54	6	use	use	NOUN
ap-10001	54	7	of	of	ADP
ap-10001	54	8	picosecond	picosecond	NOUN
ap-10001	54	9	laser	laser	NOUN
ap-10001	54	10	for	for	ADP
ap-10001	54	11	drilling	drill	VERB
ap-10001	54	12	carbon	carbon	NOUN
ap-10001	54	13	-	-	PUNCT
ap-10001	54	14	fibre	fibre	NOUN
ap-10001	54	15	reinforced	reinforce	VERB
ap-10001	54	16	polymer	polymer	NOUN
ap-10001	54	17	machining	machining	NOUN
ap-10001	54	18	and	and	CCONJ
ap-10001	54	19	found	find	VERB
ap-10001	54	20	that	that	SCONJ
ap-10001	54	21	it	it	PRON
ap-10001	54	22	outperformed	outperform	VERB
ap-10001	54	23	existing	exist	VERB
ap-10001	54	24	approaches	approach	NOUN
ap-10001	54	25	in	in	ADP
ap-10001	54	26	terms	term	NOUN
ap-10001	54	27	of	of	ADP
ap-10001	54	28	reducing	reduce	VERB
ap-10001	54	29	heat	heat	NOUN
ap-10001	54	30	-	-	PUNCT
ap-10001	54	31	affected	affect	VERB
ap-10001	54	32	zones	zone	NOUN
ap-10001	54	33	and	and	CCONJ
ap-10001	54	34	improving	improve	VERB
ap-10001	54	35	the	the	DET
ap-10001	54	36	hole	hole	NOUN
ap-10001	54	37	quality	quality	NOUN
ap-10001	54	38	.	.	PUNCT
ap-10001	55	1	using	use	VERB
ap-10001	55	2	the	the	DET
ap-10001	55	3	rsm	rsm	NOUN
ap-10001	55	4	,	,	PUNCT
ap-10001	55	5	they	they	PRON
ap-10001	55	6	optimised	optimise	VERB
ap-10001	55	7	laser	laser	NOUN
ap-10001	55	8	parameters	parameter	NOUN
ap-10001	55	9	,	,	PUNCT
ap-10001	55	10	attaining	attain	VERB
ap-10001	55	11	a	a	DET
ap-10001	55	12	hole	hole	NOUN
ap-10001	55	13	wall	wall	NOUN
ap-10001	55	14	taper	taper	NOUN
ap-10001	55	15	of	of	ADP
ap-10001	55	16	4.160	4.160	NUM
ap-10001	55	17	°	°	NOUN
ap-10001	55	18	and	and	CCONJ
ap-10001	55	19	a	a	DET
ap-10001	55	20	haz	haz	NOUN
ap-10001	55	21	of	of	ADP
ap-10001	55	22	18.577	18.577	NUM
ap-10001	55	23	µm	µm	NOUN
ap-10001	55	24	.	.	PUNCT
ap-10001	56	1	experimental	experimental	ADJ
ap-10001	56	2	validation	validation	NOUN
ap-10001	56	3	showed	show	VERB
ap-10001	56	4	negligible	negligible	ADJ
ap-10001	56	5	variance	variance	NOUN
ap-10001	56	6	,	,	PUNCT
ap-10001	56	7	proving	prove	VERB
ap-10001	56	8	the	the	DET
ap-10001	56	9	technique	technique	NOUN
ap-10001	56	10	’s	’s	PART
ap-10001	56	11	industrial	industrial	ADJ
ap-10001	56	12	viability	viability	NOUN
ap-10001	56	13	for	for	ADP
ap-10001	56	14	high	high	ADJ
ap-10001	56	15	-	-	PUNCT
ap-10001	56	16	tech	tech	NOUN
ap-10001	56	17	applications	application	NOUN
ap-10001	56	18	.	.	PUNCT
ap-10001	57	1	in	in	ADP
ap-10001	57	2	this	this	DET
ap-10001	57	3	paper	paper	NOUN
ap-10001	57	4	,	,	PUNCT
ap-10001	57	5	the	the	DET
ap-10001	57	6	experimental	experimental	ADJ
ap-10001	57	7	and	and	CCONJ
ap-10001	57	8	theoretical	theoretical	ADJ
ap-10001	57	9	investigations	investigation	NOUN
ap-10001	57	10	were	be	AUX
ap-10001	57	11	carried	carry	VERB
ap-10001	57	12	out	out	ADP
ap-10001	57	13	to	to	PART
ap-10001	57	14	optimise	optimise	VERB
ap-10001	57	15	the	the	DET
ap-10001	57	16	laser	laser	NOUN
ap-10001	57	17	micro	micro	NOUN
ap-10001	57	18	/	/	SYM
ap-10001	57	19	nano	nano	NOUN
ap-10001	57	20	processing	processing	NOUN
ap-10001	57	21	of	of	ADP
ap-10001	57	22	brittle	brittle	ADJ
ap-10001	57	23	materials	material	NOUN
ap-10001	57	24	by	by	ADP
ap-10001	57	25	applying	apply	VERB
ap-10001	57	26	three	three	NUM
ap-10001	57	27	lasers	laser	NOUN
ap-10001	57	28	to	to	ADP
ap-10001	57	29	silicon	silicon	NOUN
ap-10001	57	30	and	and	CCONJ
ap-10001	57	31	quartz	quartz	NOUN
ap-10001	57	32	substrates	substrate	NOUN
ap-10001	57	33	to	to	PART
ap-10001	57	34	synthesise	synthesise	VERB
ap-10001	57	35	silicon	silicon	NOUN
ap-10001	57	36	nanoparticles	nanoparticle	NOUN
ap-10001	57	37	and	and	CCONJ
ap-10001	57	38	produce	produce	VERB
ap-10001	57	39	quartz	quartz	NOUN
ap-10001	57	40	microlens	microlen	NOUN
ap-10001	57	41	.	.	PUNCT
ap-10001	58	1	additionally	additionally	ADV
ap-10001	58	2	,	,	PUNCT
ap-10001	58	3	incorporating	incorporate	VERB
ap-10001	58	4	box	box	NOUN
ap-10001	58	5	behnken	behnken	NOUN
ap-10001	58	6	design	design	NOUN
ap-10001	58	7	and	and	CCONJ
ap-10001	58	8	anova	anova	VERB
ap-10001	58	9	analysis	analysis	NOUN
ap-10001	58	10	together	together	ADV
ap-10001	58	11	with	with	ADP
ap-10001	58	12	design	design	NOUN
ap-10001	58	13	of	of	ADP
ap-10001	58	14	experiments	experiment	NOUN
ap-10001	58	15	(	(	PUNCT
ap-10001	58	16	doe	doe	NOUN
ap-10001	58	17	)	)	PUNCT
ap-10001	58	18	software	software	NOUN
ap-10001	58	19	offers	offer	VERB
ap-10001	58	20	a	a	DET
ap-10001	58	21	unique	unique	ADJ
ap-10001	58	22	and	and	CCONJ
ap-10001	58	23	systematic	systematic	ADJ
ap-10001	58	24	approach	approach	NOUN
ap-10001	58	25	to	to	ADP
ap-10001	58	26	optimising	optimise	VERB
ap-10001	58	27	the	the	DET
ap-10001	58	28	production	production	NOUN
ap-10001	58	29	of	of	ADP
ap-10001	58	30	silicon	silicon	NOUN
ap-10001	58	31	nanoparticles	nanoparticle	NOUN
ap-10001	58	32	and	and	CCONJ
ap-10001	58	33	quartz	quartz	NOUN
ap-10001	58	34	microlenses	microlense	NOUN
ap-10001	58	35	[	[	X
ap-10001	58	36	14	14	NUM
ap-10001	58	37	]	]	PUNCT
ap-10001	58	38	.	.	PUNCT
ap-10001	59	1	this	this	DET
ap-10001	59	2	comprehensive	comprehensive	ADJ
ap-10001	59	3	methodology	methodology	NOUN
ap-10001	59	4	not	not	PART
ap-10001	59	5	only	only	ADV
ap-10001	59	6	expands	expand	VERB
ap-10001	59	7	the	the	DET
ap-10001	59	8	understanding	understanding	NOUN
ap-10001	59	9	of	of	ADP
ap-10001	59	10	the	the	DET
ap-10001	59	11	underlying	underlie	VERB
ap-10001	59	12	processes	process	NOUN
ap-10001	59	13	but	but	CCONJ
ap-10001	59	14	also	also	ADV
ap-10001	59	15	enables	enable	VERB
ap-10001	59	16	precise	precise	ADJ
ap-10001	59	17	control	control	NOUN
ap-10001	59	18	over	over	ADP
ap-10001	59	19	the	the	DET
ap-10001	59	20	final	final	ADJ
ap-10001	59	21	properties	property	NOUN
ap-10001	59	22	of	of	ADP
ap-10001	59	23	the	the	DET
ap-10001	59	24	synthesised	synthesise	VERB
ap-10001	59	25	nanoparticles	nanoparticle	NOUN
ap-10001	59	26	and	and	CCONJ
ap-10001	59	27	microlens	microlen	NOUN
ap-10001	59	28	arrays	array	NOUN
ap-10001	59	29	,	,	PUNCT
ap-10001	59	30	thus	thus	ADV
ap-10001	59	31	paving	pave	VERB
ap-10001	59	32	the	the	DET
ap-10001	59	33	way	way	NOUN
ap-10001	59	34	for	for	ADP
ap-10001	59	35	more	more	ADV
ap-10001	59	36	efficient	efficient	ADJ
ap-10001	59	37	and	and	CCONJ
ap-10001	59	38	tailored	tailor	VERB
ap-10001	59	39	applications	application	NOUN
ap-10001	59	40	in	in	ADP
ap-10001	59	41	optoelectronics	optoelectronic	NOUN
ap-10001	59	42	and	and	CCONJ
ap-10001	59	43	biological	biological	ADJ
ap-10001	59	44	imaging	imaging	NOUN
ap-10001	59	45	.	.	PUNCT
ap-10001	60	1	2	2	X
ap-10001	60	2	.	.	X
ap-10001	60	3	experimental	experimental	ADJ
ap-10001	60	4	methodology	methodology	NOUN
ap-10001	60	5	a	a	DET
ap-10001	60	6	q	q	ADV
ap-10001	60	7	-	-	PUNCT
ap-10001	60	8	switched	switch	VERB
ap-10001	60	9	nd	nd	NUM
ap-10001	60	10	:	:	PUNCT
ap-10001	60	11	yag	yag	NOUN
ap-10001	60	12	laser	laser	NOUN
ap-10001	60	13	(	(	PUNCT
ap-10001	60	14	1	1	NUM
ap-10001	60	15	j	j	PROPN
ap-10001	60	16	pulse	pulse	NOUN
ap-10001	60	17	laser	laser	PROPN
ap-10001	60	18	,	,	PUNCT
ap-10001	60	19	china	china	PROPN
ap-10001	60	20	)	)	PUNCT
ap-10001	60	21	was	be	AUX
ap-10001	60	22	used	use	VERB
ap-10001	60	23	on	on	ADP
ap-10001	60	24	a	a	DET
ap-10001	60	25	pure	pure	ADJ
ap-10001	60	26	p	p	NOUN
ap-10001	60	27	-	-	PUNCT
ap-10001	60	28	type	type	NOUN
ap-10001	60	29	<	<	NOUN
ap-10001	60	30	100	100	NUM
ap-10001	60	31	>	>	PUNCT
ap-10001	60	32	silicon	silicon	NOUN
ap-10001	60	33	wafer	wafer	NOUN
ap-10001	60	34	with	with	ADP
ap-10001	60	35	dimensions	dimension	NOUN
ap-10001	60	36	of	of	ADP
ap-10001	60	37	20	20	NUM
ap-10001	60	38	mm	mm	NOUN
ap-10001	60	39	×	×	NOUN
ap-10001	60	40	20	20	NUM
ap-10001	60	41	mm	mm	INTJ
ap-10001	60	42	×	×	NOUN
ap-10001	60	43	500	500	NUM
ap-10001	60	44	µm	µm	NOUN
ap-10001	60	45	.	.	PUNCT
ap-10001	61	1	the	the	DET
ap-10001	61	2	fibre	fibre	NOUN
ap-10001	61	3	(	(	PUNCT
ap-10001	61	4	sm-30w	sm-30w	PROPN
ap-10001	61	5	,	,	PUNCT
ap-10001	61	6	china	china	PROPN
ap-10001	61	7	)	)	PUNCT
ap-10001	61	8	and	and	CCONJ
ap-10001	61	9	co2	co2	NOUN
ap-10001	61	10	lasers	laser	NOUN
ap-10001	61	11	(	(	PUNCT
ap-10001	61	12	co2	co2	NOUN
ap-10001	61	13	laser	laser	NOUN
ap-10001	61	14	work	work	NOUN
ap-10001	61	15	station	station	NOUN
ap-10001	61	16	,	,	PUNCT
ap-10001	61	17	pi	pi	PROPN
ap-10001	61	18	micos	micos	PROPN
ap-10001	61	19	,	,	PUNCT
ap-10001	61	20	germany	germany	PROPN
ap-10001	61	21	)	)	PUNCT
ap-10001	61	22	were	be	AUX
ap-10001	61	23	used	use	VERB
ap-10001	61	24	on	on	ADP
ap-10001	61	25	a	a	DET
ap-10001	61	26	quartz	quartz	NOUN
ap-10001	61	27	sheet	sheet	NOUN
ap-10001	61	28	with	with	ADP
ap-10001	61	29	dimensions	dimension	NOUN
ap-10001	61	30	of	of	ADP
ap-10001	61	31	10	10	NUM
ap-10001	61	32	mm	mm	NOUN
ap-10001	61	33	×	×	NOUN
ap-10001	61	34	10	10	NUM
ap-10001	61	35	mm	mm	NOUN
ap-10001	61	36	×	×	NOUN
ap-10001	61	37	1.1	1.1	NUM
ap-10001	61	38	mm	mm	NOUN
ap-10001	61	39	in	in	ADP
ap-10001	61	40	the	the	DET
ap-10001	61	41	first	first	ADJ
ap-10001	61	42	and	and	CCONJ
ap-10001	61	43	second	second	ADJ
ap-10001	61	44	stages	stage	NOUN
ap-10001	61	45	,	,	PUNCT
ap-10001	61	46	respectively	respectively	ADV
ap-10001	61	47	.	.	PUNCT
ap-10001	62	1	all	all	DET
ap-10001	62	2	laser	laser	NOUN
ap-10001	62	3	parameters	parameter	NOUN
ap-10001	62	4	are	be	AUX
ap-10001	62	5	given	give	VERB
ap-10001	62	6	in	in	ADP
ap-10001	62	7	table	table	NOUN
ap-10001	62	8	1	1	NUM
ap-10001	62	9	.	.	PUNCT
ap-10001	62	10	before	before	ADP
ap-10001	62	11	commencing	commence	VERB
ap-10001	62	12	any	any	DET
ap-10001	62	13	processing	processing	NOUN
ap-10001	62	14	procedures	procedure	NOUN
ap-10001	62	15	,	,	PUNCT
ap-10001	62	16	the	the	DET
ap-10001	62	17	silicon	silicon	NOUN
ap-10001	62	18	wafer	wafer	NOUN
ap-10001	62	19	and	and	CCONJ
ap-10001	62	20	quartz	quartz	NOUN
ap-10001	62	21	sheets	sheet	NOUN
ap-10001	62	22	were	be	AUX
ap-10001	62	23	cleaned	clean	VERB
ap-10001	62	24	in	in	ADP
ap-10001	62	25	an	an	DET
ap-10001	62	26	ultrasonic	ultrasonic	ADJ
ap-10001	62	27	bath	bath	NOUN
ap-10001	62	28	using	use	VERB
ap-10001	62	29	an	an	DET
ap-10001	62	30	ultrasonic	ultrasonic	ADJ
ap-10001	62	31	device	device	NOUN
ap-10001	62	32	,	,	PUNCT
ap-10001	62	33	using	use	VERB
ap-10001	62	34	ethanol	ethanol	NOUN
ap-10001	62	35	and	and	CCONJ
ap-10001	62	36	distilled	distil	VERB
ap-10001	62	37	water	water	NOUN
ap-10001	62	38	as	as	ADP
ap-10001	62	39	cleaning	clean	VERB
ap-10001	62	40	agents	agent	NOUN
ap-10001	62	41	.	.	PUNCT
ap-10001	63	1	ethanol	ethanol	NOUN
ap-10001	63	2	was	be	AUX
ap-10001	63	3	selected	select	VERB
ap-10001	63	4	for	for	ADP
ap-10001	63	5	cleaning	clean	VERB
ap-10001	63	6	the	the	DET
ap-10001	63	7	silicon	silicon	NOUN
ap-10001	63	8	wafer	wafer	NOUN
ap-10001	63	9	due	due	ADP
ap-10001	63	10	to	to	ADP
ap-10001	63	11	its	its	PRON
ap-10001	63	12	effectiveness	effectiveness	NOUN
ap-10001	63	13	in	in	ADP
ap-10001	63	14	ensuring	ensure	VERB
ap-10001	63	15	the	the	DET
ap-10001	63	16	required	require	VERB
ap-10001	63	17	surface	surface	NOUN
ap-10001	63	18	cleanliness	cleanliness	NOUN
ap-10001	63	19	while	while	SCONJ
ap-10001	63	20	providing	provide	VERB
ap-10001	63	21	a	a	DET
ap-10001	63	22	milder	mild	ADJ
ap-10001	63	23	cleaning	cleaning	NOUN
ap-10001	63	24	method	method	NOUN
ap-10001	63	25	.	.	PUNCT
ap-10001	64	1	its	its	PRON
ap-10001	64	2	rapid	rapid	ADJ
ap-10001	64	3	evaporation	evaporation	NOUN
ap-10001	64	4	helps	help	VERB
ap-10001	64	5	minimising	minimise	VERB
ap-10001	64	6	water	water	NOUN
ap-10001	64	7	-	-	PUNCT
ap-10001	64	8	related	relate	VERB
ap-10001	64	9	contamination	contamination	NOUN
ap-10001	64	10	and	and	CCONJ
ap-10001	64	11	defects	defect	NOUN
ap-10001	64	12	,	,	PUNCT
ap-10001	64	13	making	make	VERB
ap-10001	64	14	it	it	PRON
ap-10001	64	15	a	a	DET
ap-10001	64	16	suitable	suitable	ADJ
ap-10001	64	17	choice	choice	NOUN
ap-10001	64	18	for	for	ADP
ap-10001	64	19	precision	precision	NOUN
ap-10001	64	20	cleaning	cleaning	NOUN
ap-10001	64	21	.	.	PUNCT
ap-10001	65	1	although	although	SCONJ
ap-10001	65	2	radio	radio	NOUN
ap-10001	65	3	corporation	corporation	NOUN
ap-10001	65	4	of	of	ADP
ap-10001	65	5	america	america	PROPN
ap-10001	65	6	(	(	PUNCT
ap-10001	65	7	rca	rca	PROPN
ap-10001	65	8	)	)	PUNCT
ap-10001	65	9	cleaning	cleaning	NOUN
ap-10001	65	10	is	be	AUX
ap-10001	65	11	commonly	commonly	ADV
ap-10001	65	12	used	use	VERB
ap-10001	65	13	to	to	PART
ap-10001	65	14	remove	remove	VERB
ap-10001	65	15	both	both	CCONJ
ap-10001	65	16	organic	organic	ADJ
ap-10001	65	17	and	and	CCONJ
ap-10001	65	18	inorganic	inorganic	ADJ
ap-10001	65	19	contaminants	contaminant	NOUN
ap-10001	65	20	,	,	PUNCT
ap-10001	65	21	ethanol	ethanol	NOUN
ap-10001	65	22	was	be	AUX
ap-10001	65	23	preferred	prefer	VERB
ap-10001	65	24	for	for	ADP
ap-10001	65	25	its	its	PRON
ap-10001	65	26	efficiency	efficiency	NOUN
ap-10001	65	27	in	in	ADP
ap-10001	65	28	eliminating	eliminate	VERB
ap-10001	65	29	organic	organic	ADJ
ap-10001	65	30	residues	residue	NOUN
ap-10001	65	31	and	and	CCONJ
ap-10001	65	32	its	its	PRON
ap-10001	65	33	ease	ease	NOUN
ap-10001	65	34	of	of	ADP
ap-10001	65	35	handling	handling	NOUN
ap-10001	65	36	.	.	PUNCT
ap-10001	66	1	laser	laser	NOUN
ap-10001	66	2	ablation	ablation	NOUN
ap-10001	66	3	is	be	AUX
ap-10001	66	4	a	a	DET
ap-10001	66	5	process	process	NOUN
ap-10001	66	6	involving	involve	VERB
ap-10001	66	7	the	the	DET
ap-10001	66	8	expulsion	expulsion	NOUN
ap-10001	66	9	of	of	ADP
ap-10001	66	10	material	material	NOUN
ap-10001	66	11	as	as	ADP
ap-10001	66	12	a	a	DET
ap-10001	66	13	result	result	NOUN
ap-10001	66	14	of	of	ADP
ap-10001	66	15	the	the	DET
ap-10001	66	16	generation	generation	NOUN
ap-10001	66	17	of	of	ADP
ap-10001	66	18	a	a	DET
ap-10001	66	19	significantly	significantly	ADV
ap-10001	66	20	elevated	elevate	VERB
ap-10001	66	21	vapour	vapour	NOUN
ap-10001	66	22	pressure	pressure	NOUN
ap-10001	66	23	[	[	X
ap-10001	66	24	7	7	NUM
ap-10001	66	25	]	]	PUNCT
ap-10001	66	26	.	.	PUNCT
ap-10001	67	1	laser	laser	NOUN
ap-10001	67	2	ablation	ablation	NOUN
ap-10001	67	3	of	of	ADP
ap-10001	67	4	solid	solid	ADJ
ap-10001	67	5	targets	target	NOUN
ap-10001	67	6	in	in	ADP
ap-10001	67	7	liquids	liquid	NOUN
ap-10001	67	8	(	(	PUNCT
ap-10001	67	9	lal	lal	PROPN
ap-10001	67	10	)	)	PUNCT
ap-10001	67	11	is	be	AUX
ap-10001	67	12	a	a	DET
ap-10001	67	13	very	very	ADV
ap-10001	67	14	effective	effective	ADJ
ap-10001	67	15	way	way	NOUN
ap-10001	67	16	to	to	PART
ap-10001	67	17	make	make	VERB
ap-10001	67	18	nanoparticles	nanoparticle	NOUN
ap-10001	67	19	because	because	SCONJ
ap-10001	67	20	it	it	PRON
ap-10001	67	21	is	be	AUX
ap-10001	67	22	easy	easy	ADJ
ap-10001	67	23	to	to	PART
ap-10001	67	24	control	control	VERB
ap-10001	67	25	and	and	CCONJ
ap-10001	67	26	does	do	AUX
ap-10001	67	27	not	not	PART
ap-10001	67	28	harm	harm	VERB
ap-10001	67	29	the	the	DET
ap-10001	67	30	environment	environment	NOUN
ap-10001	67	31	.	.	PUNCT
ap-10001	68	1	it	it	PRON
ap-10001	68	2	provides	provide	VERB
ap-10001	68	3	significant	significant	ADJ
ap-10001	68	4	protection	protection	NOUN
ap-10001	68	5	against	against	ADP
ap-10001	68	6	potential	potential	ADJ
ap-10001	68	7	contamination	contamination	NOUN
ap-10001	68	8	during	during	ADP
ap-10001	68	9	the	the	DET
ap-10001	68	10	production	production	NOUN
ap-10001	68	11	of	of	ADP
ap-10001	68	12	nanoparticles	nanoparticle	NOUN
ap-10001	68	13	[	[	X
ap-10001	68	14	15	15	NUM
ap-10001	68	15	]	]	PUNCT
ap-10001	68	16	.	.	PUNCT
ap-10001	69	1	the	the	DET
ap-10001	69	2	pulse	pulse	NOUN
ap-10001	69	3	laser	laser	NOUN
ap-10001	69	4	ablation	ablation	NOUN
ap-10001	69	5	in	in	ADP
ap-10001	69	6	liquid	liquid	NOUN
ap-10001	69	7	(	(	PUNCT
ap-10001	69	8	plal	plal	NOUN
ap-10001	69	9	)	)	PUNCT
ap-10001	69	10	process	process	NOUN
ap-10001	69	11	successfully	successfully	ADV
ap-10001	69	12	synthesised	synthesise	VERB
ap-10001	69	13	silicon	silicon	NOUN
ap-10001	69	14	nanoparticles	nanoparticle	NOUN
ap-10001	69	15	in	in	ADP
ap-10001	69	16	an	an	DET
ap-10001	69	17	407	407	NUM
ap-10001	69	18	m.	m.	NOUN
ap-10001	69	19	j.	j.	PROPN
ap-10001	69	20	mahmoud	mahmoud	PROPN
ap-10001	69	21	,	,	PUNCT
ap-10001	69	22	b.	b.	PROPN
ap-10001	69	23	g.	g.	PROPN
ap-10001	69	24	rasheed	rasheed	PROPN
ap-10001	69	25	,	,	PUNCT
ap-10001	69	26	m.	m.	NOUN
ap-10001	69	27	m.	m.	PROPN
ap-10001	69	28	hanon	hanon	PROPN
ap-10001	69	29	acta	acta	PROPN
ap-10001	69	30	polytechnica	polytechnica	PROPN
ap-10001	69	31	figure	figure	NOUN
ap-10001	69	32	1	1	NUM
ap-10001	69	33	.	.	PUNCT
ap-10001	69	34	optimisation	optimisation	NOUN
ap-10001	69	35	procedure	procedure	NOUN
ap-10001	69	36	for	for	ADP
ap-10001	69	37	silicon	silicon	NOUN
ap-10001	69	38	nanoparticles	nanoparticle	NOUN
ap-10001	69	39	and	and	CCONJ
ap-10001	69	40	quartz	quartz	NOUN
ap-10001	69	41	microlens	microlen	NOUN
ap-10001	69	42	.	.	PUNCT
ap-10001	70	1	nd	nd	PRON
ap-10001	70	2	:	:	PUNCT
ap-10001	70	3	yag	yag	NOUN
ap-10001	70	4	laser	laser	NOUN
ap-10001	70	5	fiber	fiber	NOUN
ap-10001	70	6	laser	laser	NOUN
ap-10001	70	7	co2	co2	NOUN
ap-10001	70	8	laser	laser	NOUN
ap-10001	70	9	energy	energy	NOUN
ap-10001	71	1	[	[	X
ap-10001	71	2	j	j	X
ap-10001	71	3	]	]	X
ap-10001	71	4	silicon	silicon	NOUN
ap-10001	71	5	surface	surface	NOUN
ap-10001	71	6	power	power	NOUN
ap-10001	71	7	[	[	X
ap-10001	71	8	w	w	X
ap-10001	71	9	]	]	X
ap-10001	71	10	quartz	quartz	NOUN
ap-10001	71	11	surface	surface	NOUN
ap-10001	71	12	power	power	NOUN
ap-10001	71	13	[	[	X
ap-10001	71	14	w	w	X
ap-10001	71	15	]	]	PUNCT
ap-10001	71	16	quartz	quartz	NOUN
ap-10001	71	17	surface	surface	NOUN
ap-10001	71	18	temp	temp	NOUN
ap-10001	71	19	.	.	PUNCT
ap-10001	72	1	[	[	X
ap-10001	72	2	k	k	X
ap-10001	72	3	]	]	X
ap-10001	72	4	temp	temp	NOUN
ap-10001	72	5	.	.	PUNCT
ap-10001	73	1	[	[	X
ap-10001	73	2	k	k	X
ap-10001	73	3	]	]	X
ap-10001	73	4	temp	temp	NOUN
ap-10001	73	5	.	.	PUNCT
ap-10001	74	1	[	[	X
ap-10001	74	2	k	k	X
ap-10001	74	3	]	]	X
ap-10001	74	4	0.1	0.1	NUM
ap-10001	74	5	569	569	NUM
ap-10001	74	6	1	1	NUM
ap-10001	74	7	190	190	NUM
ap-10001	74	8	1	1	NUM
ap-10001	74	9	415	415	NUM
ap-10001	74	10	0.2	0.2	NUM
ap-10001	74	11	1	1	NUM
ap-10001	74	12	137	137	NUM
ap-10001	74	13	4	4	NUM
ap-10001	74	14	760	760	NUM
ap-10001	74	15	2	2	NUM
ap-10001	74	16	825	825	NUM
ap-10001	74	17	0.4	0.4	NUM
ap-10001	74	18	2	2	NUM
ap-10001	74	19	275	275	NUM
ap-10001	74	20	7	7	NUM
ap-10001	74	21	1	1	NUM
ap-10001	74	22	320	320	NUM
ap-10001	74	23	4	4	NUM
ap-10001	74	24	1	1	NUM
ap-10001	74	25	650	650	NUM
ap-10001	74	26	0.6	0.6	NUM
ap-10001	74	27	3	3	NUM
ap-10001	74	28	411	411	NUM
ap-10001	74	29	13	13	NUM
ap-10001	74	30	2	2	NUM
ap-10001	74	31	480	480	NUM
ap-10001	74	32	6	6	NUM
ap-10001	74	33	2	2	NUM
ap-10001	74	34	480	480	NUM
ap-10001	74	35	0.8	0.8	NUM
ap-10001	74	36	4	4	NUM
ap-10001	74	37	548	548	NUM
ap-10001	74	38	19	19	NUM
ap-10001	74	39	3	3	NUM
ap-10001	74	40	590	590	NUM
ap-10001	74	41	8	8	NUM
ap-10001	74	42	3	3	NUM
ap-10001	74	43	300	300	NUM
ap-10001	74	44	1	1	NUM
ap-10001	74	45	5	5	NUM
ap-10001	74	46	685	685	NUM
ap-10001	74	47	22	22	NUM
ap-10001	74	48	4	4	NUM
ap-10001	74	49	150	150	NUM
ap-10001	74	50	10	10	NUM
ap-10001	74	51	4	4	NUM
ap-10001	74	52	130	130	NUM
ap-10001	74	53	table	table	NOUN
ap-10001	74	54	2	2	NUM
ap-10001	74	55	.	.	PUNCT
ap-10001	75	1	the	the	DET
ap-10001	75	2	surface	surface	NOUN
ap-10001	75	3	temperature	temperature	NOUN
ap-10001	75	4	of	of	ADP
ap-10001	75	5	silicon	silicon	NOUN
ap-10001	75	6	wafers	wafer	NOUN
ap-10001	75	7	and	and	CCONJ
ap-10001	75	8	quartz	quartz	NOUN
ap-10001	75	9	sheets	sheet	NOUN
ap-10001	75	10	depending	depend	VERB
ap-10001	75	11	on	on	ADP
ap-10001	75	12	the	the	DET
ap-10001	75	13	applied	applied	ADJ
ap-10001	75	14	laser	laser	NOUN
ap-10001	75	15	.	.	PUNCT
ap-10001	76	1	aqueous	aqueous	ADJ
ap-10001	76	2	medium	medium	NOUN
ap-10001	76	3	through	through	ADP
ap-10001	76	4	a	a	DET
ap-10001	76	5	two	two	NUM
ap-10001	76	6	-	-	PUNCT
ap-10001	76	7	step	step	NOUN
ap-10001	76	8	procedure	procedure	NOUN
ap-10001	76	9	.	.	PUNCT
ap-10001	77	1	initially	initially	ADV
ap-10001	77	2	,	,	PUNCT
ap-10001	77	3	the	the	DET
ap-10001	77	4	silicon	silicon	NOUN
ap-10001	77	5	wafer	wafer	NOUN
ap-10001	77	6	was	be	AUX
ap-10001	77	7	carefully	carefully	ADV
ap-10001	77	8	positioned	position	VERB
ap-10001	77	9	within	within	ADP
ap-10001	77	10	a	a	DET
ap-10001	77	11	plastic	plastic	ADJ
ap-10001	77	12	container	container	NOUN
ap-10001	77	13	,	,	PUNCT
ap-10001	77	14	which	which	PRON
ap-10001	77	15	was	be	AUX
ap-10001	77	16	subsequently	subsequently	ADV
ap-10001	77	17	filled	fill	VERB
ap-10001	77	18	with	with	ADP
ap-10001	77	19	a	a	DET
ap-10001	77	20	precise	precise	ADJ
ap-10001	77	21	volume	volume	NOUN
ap-10001	77	22	of	of	ADP
ap-10001	77	23	2.5	2.5	NUM
ap-10001	77	24	millilitres	millilitre	NOUN
ap-10001	77	25	of	of	ADP
ap-10001	77	26	deionised	deionise	VERB
ap-10001	77	27	water	water	NOUN
ap-10001	77	28	(	(	PUNCT
ap-10001	77	29	dw	dw	NOUN
ap-10001	77	30	)	)	PUNCT
ap-10001	77	31	.	.	PUNCT
ap-10001	78	1	next	next	ADV
ap-10001	78	2	,	,	PUNCT
ap-10001	78	3	the	the	DET
ap-10001	78	4	wafer	wafer	NOUN
ap-10001	78	5	was	be	AUX
ap-10001	78	6	subjected	subject	VERB
ap-10001	78	7	to	to	ADP
ap-10001	78	8	a	a	DET
ap-10001	78	9	controlled	control	VERB
ap-10001	78	10	exposure	exposure	NOUN
ap-10001	78	11	of	of	ADP
ap-10001	78	12	300	300	NUM
ap-10001	78	13	laser	laser	NOUN
ap-10001	78	14	pulses	pulse	NOUN
ap-10001	78	15	.	.	PUNCT
ap-10001	79	1	in	in	ADP
ap-10001	79	2	the	the	DET
ap-10001	79	3	subsequent	subsequent	ADJ
ap-10001	79	4	stage	stage	NOUN
ap-10001	79	5	,	,	PUNCT
ap-10001	79	6	the	the	DET
ap-10001	79	7	suspension	suspension	NOUN
ap-10001	79	8	underwent	underwent	NOUN
ap-10001	79	9	exposure	exposure	NOUN
ap-10001	79	10	to	to	ADP
ap-10001	79	11	a	a	DET
ap-10001	79	12	fibre	fibre	NOUN
ap-10001	79	13	laser	laser	NOUN
ap-10001	79	14	for	for	ADP
ap-10001	79	15	10	10	NUM
ap-10001	79	16	minutes	minute	NOUN
ap-10001	79	17	,	,	PUNCT
ap-10001	79	18	producing	produce	VERB
ap-10001	79	19	reduced	reduce	VERB
ap-10001	79	20	-	-	PUNCT
ap-10001	79	21	size	size	NOUN
ap-10001	79	22	silicon	silicon	NOUN
ap-10001	79	23	nanoparticles	nanoparticle	NOUN
ap-10001	79	24	.	.	PUNCT
ap-10001	80	1	the	the	DET
ap-10001	80	2	production	production	NOUN
ap-10001	80	3	of	of	ADP
ap-10001	80	4	quartz	quartz	NOUN
ap-10001	80	5	microlenses	microlense	NOUN
ap-10001	80	6	involved	involve	VERB
ap-10001	80	7	a	a	DET
ap-10001	80	8	two	two	NUM
ap-10001	80	9	-	-	PUNCT
ap-10001	80	10	step	step	NOUN
ap-10001	80	11	procedure	procedure	NOUN
ap-10001	80	12	.	.	PUNCT
ap-10001	81	1	firstly	firstly	ADV
ap-10001	81	2	,	,	PUNCT
ap-10001	81	3	a	a	DET
ap-10001	81	4	fibre	fibre	NOUN
ap-10001	81	5	laser	laser	NOUN
ap-10001	81	6	with	with	ADP
ap-10001	81	7	a	a	DET
ap-10001	81	8	galvanometer	galvanometer	NOUN
ap-10001	81	9	system	system	NOUN
ap-10001	81	10	was	be	AUX
ap-10001	81	11	used	use	VERB
ap-10001	81	12	to	to	PART
ap-10001	81	13	selectively	selectively	ADV
ap-10001	81	14	eliminate	eliminate	VERB
ap-10001	81	15	material	material	NOUN
ap-10001	81	16	from	from	ADP
ap-10001	81	17	the	the	DET
ap-10001	81	18	sheet	sheet	NOUN
ap-10001	81	19	’s	’s	PART
ap-10001	81	20	surface	surface	NOUN
ap-10001	81	21	with	with	ADP
ap-10001	81	22	predetermined	predetermine	VERB
ap-10001	81	23	laser	laser	NOUN
ap-10001	81	24	parameters	parameter	NOUN
ap-10001	81	25	.	.	PUNCT
ap-10001	82	1	the	the	DET
ap-10001	82	2	subsequent	subsequent	ADJ
ap-10001	82	3	stage	stage	NOUN
ap-10001	82	4	involves	involve	VERB
ap-10001	82	5	using	use	VERB
ap-10001	82	6	a	a	DET
ap-10001	82	7	co2	co2	NOUN
ap-10001	82	8	laser	laser	NOUN
ap-10001	82	9	beam	beam	NOUN
ap-10001	82	10	to	to	PART
ap-10001	82	11	modify	modify	VERB
ap-10001	82	12	the	the	DET
ap-10001	82	13	surface	surface	NOUN
ap-10001	82	14	of	of	ADP
ap-10001	82	15	the	the	DET
ap-10001	82	16	quartz	quartz	NOUN
ap-10001	82	17	sheet	sheet	NOUN
ap-10001	82	18	,	,	PUNCT
ap-10001	82	19	resulting	result	VERB
ap-10001	82	20	in	in	ADP
ap-10001	82	21	the	the	DET
ap-10001	82	22	formation	formation	NOUN
ap-10001	82	23	of	of	ADP
ap-10001	82	24	polished	polished	ADJ
ap-10001	82	25	,	,	PUNCT
ap-10001	82	26	spherical	spherical	ADJ
ap-10001	82	27	microlenses	microlense	NOUN
ap-10001	82	28	.	.	PUNCT
ap-10001	83	1	the	the	DET
ap-10001	83	2	high	high	ADJ
ap-10001	83	3	-	-	PUNCT
ap-10001	83	4	resolution	resolution	NOUN
ap-10001	83	5	optical	optical	ADJ
ap-10001	83	6	microscope	microscope	NOUN
ap-10001	83	7	(	(	PUNCT
ap-10001	83	8	olympus	olympus	PROPN
ap-10001	83	9	bx60	bx60	PROPN
ap-10001	83	10	m	m	PART
ap-10001	83	11	)	)	PUNCT
ap-10001	83	12	was	be	AUX
ap-10001	83	13	used	use	VERB
ap-10001	83	14	to	to	PART
ap-10001	83	15	analyse	analyse	VERB
ap-10001	83	16	the	the	DET
ap-10001	83	17	interaction	interaction	NOUN
ap-10001	83	18	between	between	ADP
ap-10001	83	19	the	the	DET
ap-10001	83	20	silicon	silicon	NOUN
ap-10001	83	21	wafer	wafer	NOUN
ap-10001	83	22	and	and	CCONJ
ap-10001	83	23	the	the	DET
ap-10001	83	24	quartz	quartz	NOUN
ap-10001	83	25	sheet	sheet	NOUN
ap-10001	83	26	.	.	PUNCT
ap-10001	84	1	the	the	DET
ap-10001	84	2	acquired	acquire	VERB
ap-10001	84	3	optical	optical	ADJ
ap-10001	84	4	microscope	microscope	NOUN
ap-10001	84	5	images	image	NOUN
ap-10001	84	6	were	be	AUX
ap-10001	84	7	then	then	ADV
ap-10001	84	8	stored	store	VERB
ap-10001	84	9	,	,	PUNCT
ap-10001	84	10	and	and	CCONJ
ap-10001	84	11	the	the	DET
ap-10001	84	12	dimensions	dimension	NOUN
ap-10001	84	13	of	of	ADP
ap-10001	84	14	the	the	DET
ap-10001	84	15	produced	produce	VERB
ap-10001	84	16	microlenses	microlense	NOUN
ap-10001	84	17	were	be	AUX
ap-10001	84	18	measured	measure	VERB
ap-10001	84	19	using	use	VERB
ap-10001	84	20	the	the	DET
ap-10001	84	21	imagej	imagej	ADJ
ap-10001	84	22	software	software	NOUN
ap-10001	84	23	.	.	PUNCT
ap-10001	85	1	the	the	DET
ap-10001	85	2	absorption	absorption	NOUN
ap-10001	85	3	spectrum	spectrum	NOUN
ap-10001	85	4	in	in	ADP
ap-10001	85	5	the	the	DET
ap-10001	85	6	300–700	300–700	NUM
ap-10001	85	7	nm	nm	PRON
ap-10001	85	8	wavelength	wavelength	NOUN
ap-10001	85	9	range	range	NOUN
ap-10001	85	10	was	be	AUX
ap-10001	85	11	conducted	conduct	VERB
ap-10001	85	12	using	use	VERB
ap-10001	85	13	an	an	DET
ap-10001	85	14	optical	optical	ADJ
ap-10001	85	15	absorption	absorption	NOUN
ap-10001	85	16	spectrometer	spectrometer	NOUN
ap-10001	85	17	(	(	PUNCT
ap-10001	85	18	metrech	metrech	NOUN
ap-10001	85	19	sp8001	sp8001	PROPN
ap-10001	85	20	)	)	PUNCT
ap-10001	85	21	.	.	PUNCT
ap-10001	86	1	finally	finally	ADV
ap-10001	86	2	,	,	PUNCT
ap-10001	86	3	the	the	DET
ap-10001	86	4	residual	residual	ADJ
ap-10001	86	5	colloidal	colloidal	NOUN
ap-10001	86	6	solution	solution	NOUN
ap-10001	86	7	was	be	AUX
ap-10001	86	8	transferred	transfer	VERB
ap-10001	86	9	to	to	ADP
ap-10001	86	10	a	a	DET
ap-10001	86	11	quartz	quartz	NOUN
ap-10001	86	12	tube	tube	NOUN
ap-10001	86	13	for	for	ADP
ap-10001	86	14	zeta	zeta	PROPN
ap-10001	86	15	potential	potential	ADJ
ap-10001	86	16	analysis	analysis	NOUN
ap-10001	86	17	silicon	silicon	NOUN
ap-10001	86	18	np	np	ADP
ap-10001	86	19	stability	stability	NOUN
ap-10001	86	20	using	use	VERB
ap-10001	86	21	(	(	PUNCT
ap-10001	86	22	brookhaven	brookhaven	PROPN
ap-10001	86	23	-	-	PUNCT
ap-10001	86	24	usa	usa	PROPN
ap-10001	86	25	)	)	PUNCT
ap-10001	86	26	.	.	PUNCT
ap-10001	87	1	3	3	X
ap-10001	87	2	.	.	NOUN
ap-10001	87	3	results	result	NOUN
ap-10001	87	4	and	and	CCONJ
ap-10001	87	5	discussion	discussion	NOUN
ap-10001	87	6	a	a	DET
ap-10001	87	7	comprehensive	comprehensive	ADJ
ap-10001	87	8	examination	examination	NOUN
ap-10001	87	9	of	of	ADP
ap-10001	87	10	the	the	DET
ap-10001	87	11	fabricated	fabricate	VERB
ap-10001	87	12	silicon	silicon	NOUN
ap-10001	87	13	nanoparticles	nanoparticle	NOUN
ap-10001	87	14	and	and	CCONJ
ap-10001	87	15	microlenses	microlense	NOUN
ap-10001	87	16	involved	involve	VERB
ap-10001	87	17	both	both	PRON
ap-10001	87	18	empirical	empirical	ADJ
ap-10001	87	19	investigation	investigation	NOUN
ap-10001	87	20	and	and	CCONJ
ap-10001	87	21	mathematical	mathematical	ADJ
ap-10001	87	22	models	model	NOUN
ap-10001	87	23	.	.	PUNCT
ap-10001	88	1	the	the	DET
ap-10001	88	2	procedures	procedure	NOUN
ap-10001	88	3	of	of	ADP
ap-10001	88	4	all	all	DET
ap-10001	88	5	steps	step	NOUN
ap-10001	88	6	are	be	AUX
ap-10001	88	7	shown	show	VERB
ap-10001	88	8	in	in	ADP
ap-10001	88	9	figure	figure	NOUN
ap-10001	88	10	1	1	NUM
ap-10001	88	11	.	.	PUNCT
ap-10001	89	1	the	the	DET
ap-10001	89	2	first	first	ADJ
ap-10001	89	3	one	one	NOUN
ap-10001	89	4	is	be	AUX
ap-10001	89	5	related	relate	VERB
ap-10001	89	6	to	to	ADP
ap-10001	89	7	the	the	DET
ap-10001	89	8	material	material	NOUN
ap-10001	89	9	(	(	PUNCT
ap-10001	89	10	silicon	silicon	NOUN
ap-10001	89	11	and	and	CCONJ
ap-10001	89	12	quartz	quartz	NOUN
ap-10001	89	13	)	)	PUNCT
ap-10001	89	14	properties	property	NOUN
ap-10001	89	15	,	,	PUNCT
ap-10001	89	16	and	and	CCONJ
ap-10001	89	17	calculating	calculate	VERB
ap-10001	89	18	the	the	DET
ap-10001	89	19	temperature	temperature	NOUN
ap-10001	89	20	generated	generate	VERB
ap-10001	89	21	at	at	ADP
ap-10001	89	22	the	the	DET
ap-10001	89	23	surface	surface	NOUN
ap-10001	89	24	and	and	CCONJ
ap-10001	89	25	beneath	beneath	ADP
ap-10001	89	26	the	the	DET
ap-10001	89	27	surface	surface	NOUN
ap-10001	89	28	of	of	ADP
ap-10001	89	29	each	each	DET
ap-10001	89	30	material	material	NOUN
ap-10001	89	31	when	when	SCONJ
ap-10001	89	32	a	a	DET
ap-10001	89	33	laser	laser	NOUN
ap-10001	89	34	is	be	AUX
ap-10001	89	35	applied	apply	VERB
ap-10001	89	36	.	.	PUNCT
ap-10001	90	1	after	after	ADP
ap-10001	90	2	setting	set	VERB
ap-10001	90	3	the	the	DET
ap-10001	90	4	laser	laser	NOUN
ap-10001	90	5	range	range	NOUN
ap-10001	90	6	and	and	CCONJ
ap-10001	90	7	other	other	ADJ
ap-10001	90	8	parameters	parameter	NOUN
ap-10001	90	9	in	in	ADP
ap-10001	90	10	the	the	DET
ap-10001	90	11	doe	doe	NOUN
ap-10001	90	12	software	software	NOUN
ap-10001	90	13	,	,	PUNCT
ap-10001	90	14	the	the	DET
ap-10001	90	15	experimental	experimental	ADJ
ap-10001	90	16	began	begin	VERB
ap-10001	90	17	,	,	PUNCT
ap-10001	90	18	during	during	ADP
ap-10001	90	19	which	which	PRON
ap-10001	90	20	the	the	DET
ap-10001	90	21	optimisation	optimisation	NOUN
ap-10001	90	22	process	process	NOUN
ap-10001	90	23	in	in	ADP
ap-10001	90	24	the	the	DET
ap-10001	90	25	software	software	NOUN
ap-10001	90	26	took	take	VERB
ap-10001	90	27	place	place	NOUN
ap-10001	90	28	.	.	PUNCT
ap-10001	91	1	in	in	ADP
ap-10001	91	2	the	the	DET
ap-10001	91	3	final	final	ADJ
ap-10001	91	4	step	step	NOUN
ap-10001	91	5	,	,	PUNCT
ap-10001	91	6	the	the	DET
ap-10001	91	7	optimisation	optimisation	NOUN
ap-10001	91	8	parameters	parameter	NOUN
ap-10001	91	9	were	be	AUX
ap-10001	91	10	determined	determine	VERB
ap-10001	91	11	for	for	ADP
ap-10001	91	12	future	future	ADJ
ap-10001	91	13	processing	processing	NOUN
ap-10001	91	14	.	.	PUNCT
ap-10001	92	1	3.1	3.1	NUM
ap-10001	92	2	.	.	PUNCT
ap-10001	93	1	theoretical	theoretical	ADJ
ap-10001	93	2	calculations	calculation	NOUN
ap-10001	93	3	the	the	DET
ap-10001	93	4	material	material	NOUN
ap-10001	93	5	is	be	AUX
ap-10001	93	6	heated	heat	VERB
ap-10001	93	7	,	,	PUNCT
ap-10001	93	8	melted	melt	VERB
ap-10001	93	9	,	,	PUNCT
ap-10001	93	10	and	and	CCONJ
ap-10001	93	11	evaporated	evaporate	VERB
ap-10001	93	12	when	when	SCONJ
ap-10001	93	13	the	the	DET
ap-10001	93	14	laser	laser	NOUN
ap-10001	93	15	beam	beam	NOUN
ap-10001	93	16	is	be	AUX
ap-10001	93	17	applied	apply	VERB
ap-10001	93	18	because	because	SCONJ
ap-10001	93	19	the	the	DET
ap-10001	93	20	target	target	NOUN
ap-10001	93	21	’s	’s	PART
ap-10001	93	22	surface	surface	NOUN
ap-10001	93	23	absorbs	absorb	VERB
ap-10001	93	24	the	the	DET
ap-10001	93	25	energy	energy	NOUN
ap-10001	93	26	of	of	ADP
ap-10001	93	27	the	the	DET
ap-10001	93	28	laser	laser	NOUN
ap-10001	94	1	[	[	X
ap-10001	94	2	16	16	NUM
ap-10001	94	3	]	]	PUNCT
ap-10001	94	4	.	.	PUNCT
ap-10001	95	1	the	the	DET
ap-10001	95	2	melting	melting	NOUN
ap-10001	95	3	point	point	NOUN
ap-10001	95	4	of	of	ADP
ap-10001	95	5	silicon	silicon	NOUN
ap-10001	95	6	is	be	AUX
ap-10001	95	7	1	1	NUM
ap-10001	95	8	687	687	NUM
ap-10001	95	9	k	k	NOUN
ap-10001	95	10	,	,	PUNCT
ap-10001	95	11	while	while	SCONJ
ap-10001	95	12	its	its	PRON
ap-10001	95	13	vaporisation	vaporisation	NOUN
ap-10001	95	14	point	point	NOUN
ap-10001	95	15	is	be	AUX
ap-10001	95	16	3	3	NUM
ap-10001	95	17	538	538	NUM
ap-10001	95	18	k	k	NOUN
ap-10001	96	1	[	[	X
ap-10001	96	2	17	17	NUM
ap-10001	96	3	]	]	PUNCT
ap-10001	96	4	.	.	PUNCT
ap-10001	97	1	according	accord	VERB
ap-10001	97	2	to	to	ADP
ap-10001	97	3	measurements	measurement	NOUN
ap-10001	97	4	,	,	PUNCT
ap-10001	97	5	the	the	DET
ap-10001	97	6	melting	melting	NOUN
ap-10001	97	7	and	and	CCONJ
ap-10001	97	8	vaporisation	vaporisation	NOUN
ap-10001	97	9	points	point	NOUN
ap-10001	97	10	of	of	ADP
ap-10001	97	11	quartz	quartz	NOUN
ap-10001	97	12	are	be	AUX
ap-10001	97	13	1	1	NUM
ap-10001	97	14	923	923	NUM
ap-10001	97	15	k	k	NOUN
ap-10001	97	16	and	and	CCONJ
ap-10001	97	17	2	2	NUM
ap-10001	97	18	503	503	NUM
ap-10001	97	19	k	k	NOUN
ap-10001	97	20	,	,	PUNCT
ap-10001	97	21	respectively	respectively	ADV
ap-10001	97	22	[	[	X
ap-10001	97	23	18	18	NUM
ap-10001	97	24	]	]	PUNCT
ap-10001	97	25	.	.	PUNCT
ap-10001	98	1	the	the	DET
ap-10001	98	2	high	high	ADJ
ap-10001	98	3	energy	energy	NOUN
ap-10001	98	4	density	density	NOUN
ap-10001	98	5	of	of	ADP
ap-10001	98	6	the	the	DET
ap-10001	98	7	laser	laser	NOUN
ap-10001	98	8	causes	cause	VERB
ap-10001	98	9	the	the	DET
ap-10001	98	10	surface	surface	NOUN
ap-10001	98	11	temperatures	temperature	NOUN
ap-10001	98	12	of	of	ADP
ap-10001	98	13	silicon	silicon	NOUN
ap-10001	98	14	and	and	CCONJ
ap-10001	98	15	quartz	quartz	NOUN
ap-10001	98	16	to	to	PART
ap-10001	98	17	rapidly	rapidly	ADV
ap-10001	98	18	raise	raise	VERB
ap-10001	98	19	after	after	ADP
ap-10001	98	20	just	just	ADV
ap-10001	98	21	a	a	DET
ap-10001	98	22	brief	brief	ADJ
ap-10001	98	23	moment	moment	NOUN
ap-10001	98	24	of	of	ADP
ap-10001	98	25	exposure	exposure	NOUN
ap-10001	98	26	to	to	ADP
ap-10001	98	27	the	the	DET
ap-10001	98	28	laser	laser	NOUN
ap-10001	98	29	beam	beam	NOUN
ap-10001	98	30	.	.	PUNCT
ap-10001	99	1	the	the	DET
ap-10001	99	2	surface	surface	NOUN
ap-10001	99	3	temperature	temperature	NOUN
ap-10001	99	4	for	for	ADP
ap-10001	99	5	each	each	DET
ap-10001	99	6	material	material	NOUN
ap-10001	99	7	can	can	AUX
ap-10001	99	8	be	be	AUX
ap-10001	99	9	calculated	calculate	VERB
ap-10001	99	10	theoretically	theoretically	ADV
ap-10001	99	11	using	use	VERB
ap-10001	99	12	the	the	DET
ap-10001	99	13	relationship	relationship	NOUN
ap-10001	99	14	[	[	X
ap-10001	99	15	19	19	NUM
ap-10001	99	16	]	]	PUNCT
ap-10001	99	17	:	:	PUNCT
ap-10001	99	18	t	t	X
ap-10001	99	19	=	=	PUNCT
ap-10001	100	1	α	α	NUM
ap-10001	100	2	×	×	NOUN
ap-10001	100	3	f	f	X
ap-10001	100	4	×	×	NOUN
ap-10001	101	1	a	a	DET
ap-10001	101	2	p	p	X
ap-10001	101	3	×	×	NOUN
ap-10001	101	4	cp	cp	INTJ
ap-10001	101	5	,	,	PUNCT
ap-10001	101	6	(	(	PUNCT
ap-10001	101	7	1	1	X
ap-10001	101	8	)	)	PUNCT
ap-10001	101	9	where	where	SCONJ
ap-10001	101	10	α	α	NOUN
ap-10001	101	11	is	be	AUX
ap-10001	101	12	the	the	DET
ap-10001	101	13	absorption	absorption	NOUN
ap-10001	101	14	coefficient	coefficient	NOUN
ap-10001	101	15	[	[	X
ap-10001	101	16	cm−1	cm−1	NOUN
ap-10001	101	17	]	]	X
ap-10001	101	18	,	,	PUNCT
ap-10001	101	19	f	f	PROPN
ap-10001	101	20	is	be	AUX
ap-10001	101	21	the	the	DET
ap-10001	101	22	energy	energy	NOUN
ap-10001	101	23	density	density	NOUN
ap-10001	102	1	[	[	X
ap-10001	102	2	w	w	PROPN
ap-10001	102	3	a−1	a−1	PROPN
ap-10001	102	4	]	]	PUNCT
ap-10001	102	5	,	,	PUNCT
ap-10001	102	6	a	a	PRON
ap-10001	102	7	is	be	AUX
ap-10001	102	8	the	the	DET
ap-10001	102	9	absorptivity	absorptivity	NOUN
ap-10001	102	10	[	[	PUNCT
ap-10001	102	11	litres	litre	NOUN
ap-10001	102	12	mole	mole	NOUN
ap-10001	102	13	cm	cm	NOUN
ap-10001	102	14	]	]	PUNCT
ap-10001	102	15	,	,	PUNCT
ap-10001	102	16	p	p	PROPN
ap-10001	102	17	is	be	AUX
ap-10001	102	18	the	the	DET
ap-10001	102	19	density	density	NOUN
ap-10001	102	20	,	,	PUNCT
ap-10001	102	21	and	and	CCONJ
ap-10001	102	22	cp	cp	PROPN
ap-10001	102	23	is	be	AUX
ap-10001	102	24	the	the	DET
ap-10001	102	25	specific	specific	ADJ
ap-10001	102	26	heat	heat	NOUN
ap-10001	103	1	[	[	X
ap-10001	103	2	j	j	X
ap-10001	103	3	kg−1	kg−1	PROPN
ap-10001	103	4	°	°	PROPN
ap-10001	103	5	c−1	c−1	PROPN
ap-10001	103	6	]	]	PUNCT
ap-10001	103	7	.	.	PUNCT
ap-10001	104	1	table	table	NOUN
ap-10001	104	2	2	2	NUM
ap-10001	104	3	presents	present	VERB
ap-10001	104	4	the	the	DET
ap-10001	104	5	relationship	relationship	NOUN
ap-10001	104	6	between	between	ADP
ap-10001	104	7	the	the	DET
ap-10001	104	8	laser	laser	NOUN
ap-10001	104	9	energy	energy	NOUN
ap-10001	104	10	/	/	SYM
ap-10001	104	11	power	power	NOUN
ap-10001	104	12	and	and	CCONJ
ap-10001	104	13	surface	surface	NOUN
ap-10001	104	14	temperature	temperature	NOUN
ap-10001	104	15	408	408	NUM
ap-10001	104	16	vol	vol	NOUN
ap-10001	104	17	.	.	PUNCT
ap-10001	105	1	65	65	NUM
ap-10001	105	2	no	no	NOUN
ap-10001	105	3	.	.	PUNCT
ap-10001	106	1	4/2025	4/2025	NUM
ap-10001	106	2	improving	improve	VERB
ap-10001	106	3	the	the	DET
ap-10001	106	4	production	production	NOUN
ap-10001	106	5	process	process	NOUN
ap-10001	106	6	of	of	ADP
ap-10001	106	7	silicon	silicon	NOUN
ap-10001	106	8	nanoparticle	nanoparticle	NOUN
ap-10001	106	9	.	.	PUNCT
ap-10001	106	10	.	.	PUNCT
ap-10001	107	1	.	.	PUNCT
ap-10001	108	1	for	for	ADP
ap-10001	108	2	silicon	silicon	NOUN
ap-10001	108	3	and	and	CCONJ
ap-10001	108	4	quartz	quartz	NOUN
ap-10001	108	5	,	,	PUNCT
ap-10001	108	6	derived	derive	VERB
ap-10001	108	7	from	from	ADP
ap-10001	108	8	theoretical	theoretical	ADJ
ap-10001	108	9	calculations	calculation	NOUN
ap-10001	108	10	using	use	VERB
ap-10001	108	11	equation	equation	NOUN
ap-10001	108	12	(	(	PUNCT
ap-10001	108	13	1	1	NUM
ap-10001	108	14	)	)	PUNCT
ap-10001	108	15	,	,	PUNCT
ap-10001	108	16	where	where	SCONJ
ap-10001	108	17	the	the	DET
ap-10001	108	18	laser	laser	NOUN
ap-10001	108	19	energy	energy	NOUN
ap-10001	108	20	varies	vary	VERB
ap-10001	108	21	in	in	ADP
ap-10001	108	22	order	order	NOUN
ap-10001	108	23	to	to	PART
ap-10001	108	24	determine	determine	VERB
ap-10001	108	25	the	the	DET
ap-10001	108	26	corresponding	correspond	VERB
ap-10001	108	27	surface	surface	NOUN
ap-10001	108	28	temperature	temperature	NOUN
ap-10001	108	29	.	.	PUNCT
ap-10001	109	1	in	in	ADP
ap-10001	109	2	order	order	NOUN
ap-10001	109	3	to	to	PART
ap-10001	109	4	theoretically	theoretically	ADV
ap-10001	109	5	model	model	VERB
ap-10001	109	6	the	the	DET
ap-10001	109	7	laser	laser	NOUN
ap-10001	109	8	’s	’s	PART
ap-10001	109	9	interaction	interaction	NOUN
ap-10001	109	10	with	with	ADP
ap-10001	109	11	the	the	DET
ap-10001	109	12	silicon	silicon	NOUN
ap-10001	109	13	and	and	CCONJ
ap-10001	109	14	quartz	quartz	NOUN
ap-10001	109	15	,	,	PUNCT
ap-10001	109	16	the	the	DET
ap-10001	109	17	comsol	comsol	NOUN
ap-10001	109	18	6.1	6.1	NUM
ap-10001	109	19	program	program	NOUN
ap-10001	109	20	was	be	AUX
ap-10001	109	21	used	use	VERB
ap-10001	109	22	[	[	PUNCT
ap-10001	109	23	20	20	NUM
ap-10001	109	24	]	]	PUNCT
ap-10001	109	25	.	.	PUNCT
ap-10001	110	1	figure	figure	NOUN
ap-10001	110	2	2	2	NUM
ap-10001	110	3	displays	display	VERB
ap-10001	110	4	the	the	DET
ap-10001	110	5	geometry	geometry	NOUN
ap-10001	110	6	and	and	CCONJ
ap-10001	110	7	mesh	mesh	NOUN
ap-10001	110	8	for	for	ADP
ap-10001	110	9	each	each	DET
ap-10001	110	10	model	model	NOUN
ap-10001	110	11	.	.	PUNCT
ap-10001	111	1	figure	figure	NOUN
ap-10001	111	2	2a	2a	PROPN
ap-10001	111	3	shows	show	VERB
ap-10001	111	4	the	the	DET
ap-10001	111	5	silicon	silicon	NOUN
ap-10001	111	6	wafer	wafer	NOUN
ap-10001	111	7	geometry	geometry	NOUN
ap-10001	111	8	with	with	ADP
ap-10001	111	9	a	a	DET
ap-10001	111	10	point	point	NOUN
ap-10001	111	11	heat	heat	NOUN
ap-10001	111	12	source	source	NOUN
ap-10001	111	13	in	in	ADP
ap-10001	111	14	the	the	DET
ap-10001	111	15	centre	centre	NOUN
ap-10001	111	16	(	(	PUNCT
ap-10001	111	17	nd	nd	NOUN
ap-10001	111	18	:	:	PUNCT
ap-10001	111	19	yag	yag	NOUN
ap-10001	111	20	laser	laser	PROPN
ap-10001	111	21	source	source	NOUN
ap-10001	111	22	)	)	PUNCT
ap-10001	111	23	with	with	ADP
ap-10001	111	24	mesh	mesh	NOUN
ap-10001	111	25	parameters	parameter	NOUN
ap-10001	111	26	:	:	PUNCT
ap-10001	111	27	maximum	maximum	ADJ
ap-10001	111	28	element	element	NOUN
ap-10001	111	29	size	size	NOUN
ap-10001	111	30	,	,	PUNCT
ap-10001	111	31	minimum	minimum	ADJ
ap-10001	111	32	element	element	NOUN
ap-10001	111	33	size	size	NOUN
ap-10001	111	34	,	,	PUNCT
ap-10001	111	35	maximum	maximum	ADJ
ap-10001	111	36	element	element	NOUN
ap-10001	111	37	growth	growth	NOUN
ap-10001	111	38	rate	rate	NOUN
ap-10001	111	39	,	,	PUNCT
ap-10001	111	40	curvature	curvature	NOUN
ap-10001	111	41	factor	factor	NOUN
ap-10001	111	42	,	,	PUNCT
ap-10001	111	43	and	and	CCONJ
ap-10001	111	44	the	the	DET
ap-10001	111	45	resolution	resolution	NOUN
ap-10001	111	46	of	of	ADP
ap-10001	111	47	the	the	DET
ap-10001	111	48	narrow	narrow	ADJ
ap-10001	111	49	region	region	NOUN
ap-10001	111	50	:	:	PUNCT
ap-10001	111	51	7.0	7.0	NUM
ap-10001	111	52	×	×	NOUN
ap-10001	111	53	10−5	10−5	NUM
ap-10001	111	54	,	,	PUNCT
ap-10001	111	55	3	3	NUM
ap-10001	111	56	×	×	NOUN
ap-10001	111	57	10−6	10−6	NUM
ap-10001	111	58	,	,	PUNCT
ap-10001	111	59	1.35	1.35	NUM
ap-10001	111	60	,	,	PUNCT
ap-10001	111	61	0.3	0.3	NUM
ap-10001	111	62	,	,	PUNCT
ap-10001	111	63	and	and	CCONJ
ap-10001	111	64	0.85	0.85	NUM
ap-10001	111	65	,	,	PUNCT
ap-10001	111	66	respectively	respectively	ADV
ap-10001	111	67	.	.	PUNCT
ap-10001	112	1	moreover	moreover	ADV
ap-10001	112	2	,	,	PUNCT
ap-10001	112	3	figure	figure	VERB
ap-10001	112	4	2b	2b	NUM
ap-10001	112	5	depicts	depict	VERB
ap-10001	112	6	the	the	DET
ap-10001	112	7	quartz	quartz	NOUN
ap-10001	112	8	wafer	wafer	NOUN
ap-10001	112	9	geometry	geometry	NOUN
ap-10001	112	10	with	with	ADP
ap-10001	112	11	a	a	DET
ap-10001	112	12	point	point	NOUN
ap-10001	112	13	heat	heat	NOUN
ap-10001	112	14	source	source	NOUN
ap-10001	112	15	in	in	ADP
ap-10001	112	16	the	the	DET
ap-10001	112	17	centre	centre	NOUN
ap-10001	112	18	(	(	PUNCT
ap-10001	112	19	fibre	fibre	NOUN
ap-10001	112	20	laser	laser	NOUN
ap-10001	112	21	source	source	NOUN
ap-10001	112	22	)	)	PUNCT
ap-10001	112	23	with	with	ADP
ap-10001	112	24	mesh	mesh	NOUN
ap-10001	112	25	parameters	parameter	NOUN
ap-10001	112	26	:	:	PUNCT
ap-10001	112	27	maximum	maximum	ADJ
ap-10001	112	28	element	element	NOUN
ap-10001	112	29	size	size	NOUN
ap-10001	112	30	,	,	PUNCT
ap-10001	112	31	minimum	minimum	ADJ
ap-10001	112	32	element	element	NOUN
ap-10001	112	33	size	size	NOUN
ap-10001	112	34	,	,	PUNCT
ap-10001	112	35	maximum	maximum	ADJ
ap-10001	112	36	element	element	NOUN
ap-10001	112	37	growth	growth	NOUN
ap-10001	112	38	rate	rate	NOUN
ap-10001	112	39	,	,	PUNCT
ap-10001	112	40	curvature	curvature	NOUN
ap-10001	112	41	factor	factor	NOUN
ap-10001	112	42	,	,	PUNCT
ap-10001	112	43	and	and	CCONJ
ap-10001	112	44	the	the	DET
ap-10001	112	45	resolution	resolution	NOUN
ap-10001	112	46	of	of	ADP
ap-10001	112	47	the	the	DET
ap-10001	112	48	narrow	narrow	ADJ
ap-10001	112	49	region	region	NOUN
ap-10001	112	50	:	:	PUNCT
ap-10001	112	51	5	5	NUM
ap-10001	112	52	×	×	NOUN
ap-10001	112	53	10−5	10−5	NUM
ap-10001	112	54	,	,	PUNCT
ap-10001	112	55	5	5	NUM
ap-10001	112	56	×	×	NOUN
ap-10001	112	57	10−6	10−6	NUM
ap-10001	112	58	,	,	PUNCT
ap-10001	112	59	1.3	1.3	NUM
ap-10001	112	60	,	,	PUNCT
ap-10001	112	61	0.2	0.2	NUM
ap-10001	112	62	,	,	PUNCT
ap-10001	112	63	and	and	CCONJ
ap-10001	112	64	1	1	NUM
ap-10001	112	65	,	,	PUNCT
ap-10001	112	66	respectively	respectively	ADV
ap-10001	112	67	.	.	PUNCT
ap-10001	113	1	figure	figure	NOUN
ap-10001	113	2	2c	2c	NOUN
ap-10001	113	3	displays	display	VERB
ap-10001	113	4	the	the	DET
ap-10001	113	5	quartz	quartz	NOUN
ap-10001	113	6	wafer	wafer	NOUN
ap-10001	113	7	geometry	geometry	NOUN
ap-10001	113	8	with	with	ADP
ap-10001	113	9	a	a	DET
ap-10001	113	10	point	point	NOUN
ap-10001	113	11	heat	heat	NOUN
ap-10001	113	12	source	source	NOUN
ap-10001	113	13	in	in	ADP
ap-10001	113	14	the	the	DET
ap-10001	113	15	centre	centre	NOUN
ap-10001	113	16	(	(	PUNCT
ap-10001	113	17	co2	co2	NOUN
ap-10001	113	18	laser	laser	NOUN
ap-10001	113	19	source	source	NOUN
ap-10001	113	20	)	)	PUNCT
ap-10001	113	21	with	with	ADP
ap-10001	113	22	mesh	mesh	NOUN
ap-10001	113	23	parameters	parameter	NOUN
ap-10001	113	24	:	:	PUNCT
ap-10001	113	25	maximum	maximum	ADJ
ap-10001	113	26	element	element	NOUN
ap-10001	113	27	size	size	NOUN
ap-10001	113	28	,	,	PUNCT
ap-10001	113	29	minimum	minimum	ADJ
ap-10001	113	30	element	element	NOUN
ap-10001	113	31	size	size	NOUN
ap-10001	113	32	,	,	PUNCT
ap-10001	113	33	maximum	maximum	ADJ
ap-10001	113	34	element	element	NOUN
ap-10001	113	35	growth	growth	NOUN
ap-10001	113	36	rate	rate	NOUN
ap-10001	113	37	,	,	PUNCT
ap-10001	113	38	curvature	curvature	NOUN
ap-10001	113	39	factor	factor	NOUN
ap-10001	113	40	,	,	PUNCT
ap-10001	113	41	and	and	CCONJ
ap-10001	113	42	the	the	DET
ap-10001	113	43	resolution	resolution	NOUN
ap-10001	113	44	of	of	ADP
ap-10001	113	45	the	the	DET
ap-10001	113	46	narrow	narrow	ADJ
ap-10001	113	47	region	region	NOUN
ap-10001	113	48	:	:	PUNCT
ap-10001	113	49	4	4	NUM
ap-10001	113	50	×	×	NOUN
ap-10001	113	51	10−5	10−5	NUM
ap-10001	113	52	,	,	PUNCT
ap-10001	113	53	4	4	NUM
ap-10001	113	54	×	×	NOUN
ap-10001	113	55	10−6	10−6	NUM
ap-10001	113	56	,	,	PUNCT
ap-10001	113	57	1.3	1.3	NUM
ap-10001	113	58	,	,	PUNCT
ap-10001	113	59	0.2	0.2	NUM
ap-10001	113	60	,	,	PUNCT
ap-10001	113	61	and	and	CCONJ
ap-10001	113	62	1	1	NUM
ap-10001	113	63	,	,	PUNCT
ap-10001	113	64	respectively	respectively	ADV
ap-10001	113	65	.	.	PUNCT
ap-10001	114	1	surface	surface	NOUN
ap-10001	114	2	and	and	CCONJ
ap-10001	114	3	sub	sub	ADJ
ap-10001	114	4	-	-	ADJ
ap-10001	114	5	surface	surface	ADJ
ap-10001	114	6	temperatures	temperature	NOUN
ap-10001	114	7	are	be	AUX
ap-10001	114	8	simulated	simulate	VERB
ap-10001	114	9	in	in	ADP
ap-10001	114	10	the	the	DET
ap-10001	114	11	model	model	NOUN
ap-10001	114	12	for	for	ADP
ap-10001	114	13	silicon	silicon	NOUN
ap-10001	114	14	and	and	CCONJ
ap-10001	114	15	quartz	quartz	NOUN
ap-10001	114	16	,	,	PUNCT
ap-10001	114	17	as	as	SCONJ
ap-10001	114	18	shown	show	VERB
ap-10001	114	19	in	in	ADP
ap-10001	114	20	figure	figure	NOUN
ap-10001	114	21	3	3	NUM
ap-10001	114	22	.	.	PUNCT
ap-10001	114	23	figures	figure	NOUN
ap-10001	114	24	3a	3a	NUM
ap-10001	114	25	,	,	PUNCT
ap-10001	114	26	3c	3c	NUM
ap-10001	114	27	and	and	CCONJ
ap-10001	114	28	3e	3e	NUM
ap-10001	114	29	show	show	VERB
ap-10001	114	30	the	the	DET
ap-10001	114	31	temperature	temperature	NOUN
ap-10001	114	32	of	of	ADP
ap-10001	114	33	silicon	silicon	NOUN
ap-10001	114	34	and	and	CCONJ
ap-10001	114	35	quartz	quartz	NOUN
ap-10001	114	36	at	at	ADP
ap-10001	114	37	different	different	ADJ
ap-10001	114	38	time	time	NOUN
ap-10001	114	39	intervals	interval	NOUN
ap-10001	114	40	(	(	PUNCT
ap-10001	114	41	1	1	NUM
ap-10001	114	42	ns	ns	ADJ
ap-10001	114	43	,	,	PUNCT
ap-10001	114	44	0.1	0.1	NUM
ap-10001	114	45	s	s	NOUN
ap-10001	114	46	,	,	PUNCT
ap-10001	114	47	and	and	CCONJ
ap-10001	114	48	0.1	0.1	NUM
ap-10001	114	49	s	s	NOUN
ap-10001	114	50	)	)	PUNCT
ap-10001	114	51	for	for	ADP
ap-10001	114	52	nd	nd	PRON
ap-10001	114	53	:	:	PUNCT
ap-10001	114	54	yag	yag	NOUN
ap-10001	114	55	,	,	PUNCT
ap-10001	114	56	fibre	fibre	NOUN
ap-10001	114	57	,	,	PUNCT
ap-10001	114	58	and	and	CCONJ
ap-10001	114	59	co2	co2	NOUN
ap-10001	114	60	lasers	laser	NOUN
ap-10001	114	61	,	,	PUNCT
ap-10001	114	62	respectively	respectively	ADV
ap-10001	114	63	.	.	PUNCT
ap-10001	115	1	as	as	SCONJ
ap-10001	115	2	illustrated	illustrate	VERB
ap-10001	115	3	in	in	ADP
ap-10001	115	4	figure	figure	NOUN
ap-10001	115	5	3	3	NUM
ap-10001	115	6	,	,	PUNCT
ap-10001	115	7	the	the	DET
ap-10001	115	8	temperature	temperature	NOUN
ap-10001	115	9	of	of	ADP
ap-10001	115	10	the	the	DET
ap-10001	115	11	silicon	silicon	NOUN
ap-10001	115	12	surface	surface	NOUN
ap-10001	115	13	is	be	AUX
ap-10001	115	14	approximately	approximately	ADV
ap-10001	115	15	5	5	NUM
ap-10001	115	16	700	700	NUM
ap-10001	115	17	k.	k.	NOUN
ap-10001	115	18	in	in	ADP
ap-10001	115	19	contrast	contrast	NOUN
ap-10001	115	20	,	,	PUNCT
ap-10001	115	21	the	the	DET
ap-10001	115	22	temperature	temperature	NOUN
ap-10001	115	23	of	of	ADP
ap-10001	115	24	the	the	DET
ap-10001	115	25	quartz	quartz	NOUN
ap-10001	115	26	surface	surface	NOUN
ap-10001	115	27	is	be	AUX
ap-10001	115	28	approximately	approximately	ADV
ap-10001	115	29	2	2	NUM
ap-10001	115	30	630	630	NUM
ap-10001	115	31	k	k	NOUN
ap-10001	115	32	for	for	ADP
ap-10001	115	33	the	the	DET
ap-10001	115	34	fibre	fibre	NOUN
ap-10001	115	35	laser	laser	NOUN
ap-10001	115	36	and	and	CCONJ
ap-10001	115	37	2	2	NUM
ap-10001	115	38	140	140	NUM
ap-10001	115	39	k	k	NOUN
ap-10001	115	40	for	for	ADP
ap-10001	115	41	the	the	DET
ap-10001	115	42	co2	co2	NOUN
ap-10001	115	43	laser	laser	NOUN
ap-10001	115	44	,	,	PUNCT
ap-10001	115	45	as	as	SCONJ
ap-10001	115	46	shown	show	VERB
ap-10001	115	47	in	in	ADP
ap-10001	115	48	figures	figure	NOUN
ap-10001	115	49	3a	3a	NUM
ap-10001	115	50	,	,	PUNCT
ap-10001	115	51	3c	3c	NUM
ap-10001	115	52	and	and	CCONJ
ap-10001	115	53	3e	3e	NOUN
ap-10001	115	54	.	.	PUNCT
ap-10001	116	1	due	due	ADP
ap-10001	116	2	to	to	ADP
ap-10001	116	3	silicon	silicon	NOUN
ap-10001	116	4	’s	’s	PART
ap-10001	116	5	strong	strong	ADJ
ap-10001	116	6	absorption	absorption	NOUN
ap-10001	116	7	rates	rate	NOUN
ap-10001	116	8	of	of	ADP
ap-10001	116	9	1	1	NUM
ap-10001	116	10	064	064	NUM
ap-10001	116	11	nm	nm	NOUN
ap-10001	116	12	,	,	PUNCT
ap-10001	116	13	it	it	PRON
ap-10001	116	14	requires	require	VERB
ap-10001	116	15	low	low	ADJ
ap-10001	116	16	energy	energy	NOUN
ap-10001	116	17	with	with	ADP
ap-10001	116	18	a	a	DET
ap-10001	116	19	short	short	ADJ
ap-10001	116	20	time	time	NOUN
ap-10001	116	21	to	to	PART
ap-10001	116	22	achieve	achieve	VERB
ap-10001	116	23	the	the	DET
ap-10001	116	24	ablation	ablation	NOUN
ap-10001	116	25	process	process	NOUN
ap-10001	116	26	.	.	PUNCT
ap-10001	117	1	this	this	PRON
ap-10001	117	2	occurs	occur	VERB
ap-10001	117	3	because	because	SCONJ
ap-10001	117	4	the	the	DET
ap-10001	117	5	laser	laser	NOUN
ap-10001	117	6	energy	energy	NOUN
ap-10001	117	7	used	use	VERB
ap-10001	117	8	in	in	ADP
ap-10001	117	9	the	the	DET
ap-10001	117	10	experiment	experiment	NOUN
ap-10001	117	11	is	be	AUX
ap-10001	117	12	comparable	comparable	ADJ
ap-10001	117	13	to	to	ADP
ap-10001	117	14	the	the	DET
ap-10001	117	15	bandgap	bandgap	NOUN
ap-10001	117	16	energy	energy	NOUN
ap-10001	117	17	of	of	ADP
ap-10001	117	18	silicon	silicon	NOUN
ap-10001	117	19	(	(	PUNCT
ap-10001	117	20	1.12	1.12	NUM
ap-10001	117	21	ev	ev	NOUN
ap-10001	117	22	)	)	PUNCT
ap-10001	117	23	,	,	PUNCT
ap-10001	117	24	which	which	PRON
ap-10001	117	25	enables	enable	VERB
ap-10001	117	26	the	the	DET
ap-10001	117	27	excitation	excitation	NOUN
ap-10001	117	28	of	of	ADP
ap-10001	117	29	electrons	electron	NOUN
ap-10001	117	30	from	from	ADP
ap-10001	117	31	the	the	DET
ap-10001	117	32	valence	valence	NOUN
ap-10001	117	33	band	band	NOUN
ap-10001	117	34	to	to	ADP
ap-10001	117	35	the	the	DET
ap-10001	117	36	conduction	conduction	NOUN
ap-10001	117	37	band	band	NOUN
ap-10001	117	38	.	.	PUNCT
ap-10001	118	1	as	as	ADP
ap-10001	118	2	a	a	DET
ap-10001	118	3	result	result	NOUN
ap-10001	118	4	,	,	PUNCT
ap-10001	118	5	increased	increase	VERB
ap-10001	118	6	absorption	absorption	NOUN
ap-10001	118	7	,	,	PUNCT
ap-10001	118	8	photocarrier	photocarrier	NOUN
ap-10001	118	9	generation	generation	NOUN
ap-10001	118	10	,	,	PUNCT
ap-10001	118	11	and	and	CCONJ
ap-10001	118	12	material	material	NOUN
ap-10001	118	13	modifications	modification	NOUN
ap-10001	118	14	take	take	VERB
ap-10001	118	15	place	place	NOUN
ap-10001	118	16	,	,	PUNCT
ap-10001	118	17	facilitating	facilitate	VERB
ap-10001	118	18	the	the	DET
ap-10001	118	19	ablation	ablation	NOUN
ap-10001	118	20	process	process	NOUN
ap-10001	118	21	.	.	PUNCT
ap-10001	119	1	in	in	ADP
ap-10001	119	2	contrast	contrast	NOUN
ap-10001	119	3	,	,	PUNCT
ap-10001	119	4	quartz	quartz	NOUN
ap-10001	119	5	has	have	VERB
ap-10001	119	6	a	a	DET
ap-10001	119	7	low	low	ADJ
ap-10001	119	8	absorption	absorption	NOUN
ap-10001	119	9	rate	rate	NOUN
ap-10001	119	10	of	of	ADP
ap-10001	119	11	1	1	NUM
ap-10001	119	12	064	064	NUM
ap-10001	119	13	nm	nm	NOUN
ap-10001	119	14	,	,	PUNCT
ap-10001	119	15	requiring	require	VERB
ap-10001	119	16	higher	high	ADJ
ap-10001	119	17	power	power	NOUN
ap-10001	119	18	and	and	CCONJ
ap-10001	119	19	a	a	DET
ap-10001	119	20	longer	long	ADJ
ap-10001	119	21	duration	duration	NOUN
ap-10001	119	22	for	for	ADP
ap-10001	119	23	ablation	ablation	NOUN
ap-10001	119	24	.	.	PUNCT
ap-10001	120	1	unlike	unlike	ADP
ap-10001	120	2	the	the	DET
ap-10001	120	3	co2	co2	NOUN
ap-10001	120	4	laser	laser	NOUN
ap-10001	120	5	/	/	SYM
ap-10001	120	6	quartz	quartz	NOUN
ap-10001	120	7	interaction	interaction	NOUN
ap-10001	120	8	,	,	PUNCT
ap-10001	120	9	where	where	SCONJ
ap-10001	120	10	the	the	DET
ap-10001	120	11	laser	laser	NOUN
ap-10001	120	12	power	power	NOUN
ap-10001	120	13	is	be	AUX
ap-10001	120	14	sufficient	sufficient	ADJ
ap-10001	120	15	to	to	PART
ap-10001	120	16	heat	heat	VERB
ap-10001	120	17	the	the	DET
ap-10001	120	18	quartz	quartz	NOUN
ap-10001	120	19	due	due	ADP
ap-10001	120	20	to	to	ADP
ap-10001	120	21	its	its	PRON
ap-10001	120	22	strong	strong	ADJ
ap-10001	120	23	absorption	absorption	NOUN
ap-10001	120	24	of	of	ADP
ap-10001	120	25	10.6	10.6	NUM
ap-10001	120	26	µm	µm	NOUN
ap-10001	120	27	[	[	X
ap-10001	120	28	21	21	NUM
ap-10001	120	29	]	]	PUNCT
ap-10001	120	30	.	.	PUNCT
ap-10001	121	1	figures	figure	NOUN
ap-10001	121	2	3b	3b	NUM
ap-10001	121	3	,	,	PUNCT
ap-10001	121	4	3d	3d	PROPN
ap-10001	121	5	and	and	CCONJ
ap-10001	121	6	3f	3f	PROPN
ap-10001	121	7	show	show	VERB
ap-10001	121	8	that	that	SCONJ
ap-10001	121	9	the	the	DET
ap-10001	121	10	nd	nd	NOUN
ap-10001	121	11	:	:	PUNCT
ap-10001	121	12	yag	yag	NOUN
ap-10001	121	13	and	and	CCONJ
ap-10001	121	14	fibre	fibre	NOUN
ap-10001	121	15	lasers	laser	NOUN
ap-10001	121	16	immediately	immediately	ADV
ap-10001	121	17	heated	heat	VERB
ap-10001	121	18	the	the	DET
ap-10001	121	19	surface	surface	NOUN
ap-10001	121	20	and	and	CCONJ
ap-10001	121	21	the	the	DET
ap-10001	121	22	area	area	NOUN
ap-10001	121	23	beneath	beneath	ADP
ap-10001	121	24	it	it	PRON
ap-10001	121	25	immediately	immediately	ADV
ap-10001	121	26	,	,	PUNCT
ap-10001	121	27	whereas	whereas	SCONJ
ap-10001	121	28	the	the	DET
ap-10001	121	29	co2	co2	NOUN
ap-10001	121	30	laser	laser	NOUN
ap-10001	121	31	operating	operate	VERB
ap-10001	121	32	continuously	continuously	ADV
ap-10001	121	33	heated	heat	VERB
ap-10001	121	34	the	the	DET
ap-10001	121	35	entire	entire	ADJ
ap-10001	121	36	quartz	quartz	NOUN
ap-10001	121	37	surface	surface	NOUN
ap-10001	121	38	and	and	CCONJ
ap-10001	121	39	the	the	DET
ap-10001	121	40	area	area	NOUN
ap-10001	121	41	beneath	beneath	ADP
ap-10001	121	42	it	it	PRON
ap-10001	121	43	over	over	ADP
ap-10001	121	44	a	a	DET
ap-10001	121	45	longer	long	ADJ
ap-10001	121	46	period	period	NOUN
ap-10001	121	47	.	.	PUNCT
ap-10001	122	1	in	in	ADP
ap-10001	122	2	addition	addition	NOUN
ap-10001	122	3	,	,	PUNCT
ap-10001	122	4	as	as	SCONJ
ap-10001	122	5	illustrated	illustrate	VERB
ap-10001	122	6	in	in	ADP
ap-10001	122	7	table	table	NOUN
ap-10001	122	8	3	3	NUM
ap-10001	122	9	,	,	PUNCT
ap-10001	122	10	the	the	DET
ap-10001	122	11	surface	surface	NOUN
ap-10001	122	12	temperature	temperature	NOUN
ap-10001	122	13	of	of	ADP
ap-10001	122	14	each	each	DET
ap-10001	122	15	material	material	NOUN
ap-10001	122	16	at	at	ADP
ap-10001	122	17	various	various	ADJ
ap-10001	122	18	time	time	NOUN
ap-10001	122	19	points	point	NOUN
ap-10001	122	20	was	be	AUX
ap-10001	122	21	determined	determine	VERB
ap-10001	122	22	by	by	ADP
ap-10001	122	23	executing	execute	VERB
ap-10001	122	24	the	the	DET
ap-10001	122	25	model	model	NOUN
ap-10001	122	26	in	in	ADP
ap-10001	122	27	the	the	DET
ap-10001	122	28	com(a	com(a	PROPN
ap-10001	122	29	)	)	PUNCT
ap-10001	122	30	.	.	PUNCT
ap-10001	123	1	silicon	silicon	NOUN
ap-10001	123	2	irradiated	irradiate	VERB
ap-10001	123	3	by	by	ADP
ap-10001	123	4	nd	nd	PRON
ap-10001	123	5	:	:	PUNCT
ap-10001	123	6	yag	yag	NOUN
ap-10001	123	7	laser	laser	NOUN
ap-10001	123	8	.	.	PUNCT
ap-10001	124	1	(	(	PUNCT
ap-10001	124	2	b	b	NOUN
ap-10001	124	3	)	)	PUNCT
ap-10001	124	4	.	.	PUNCT
ap-10001	125	1	quartz	quartz	PROPN
ap-10001	125	2	irradiated	irradiate	VERB
ap-10001	125	3	by	by	ADP
ap-10001	125	4	fibre	fibre	NOUN
ap-10001	125	5	laser	laser	NOUN
ap-10001	125	6	at	at	ADP
ap-10001	125	7	first	first	ADJ
ap-10001	125	8	stage	stage	NOUN
ap-10001	125	9	.	.	PUNCT
ap-10001	126	1	(	(	PUNCT
ap-10001	126	2	c	c	NOUN
ap-10001	126	3	)	)	PUNCT
ap-10001	126	4	.	.	PUNCT
ap-10001	127	1	quartz	quartz	PROPN
ap-10001	127	2	irradiated	irradiate	VERB
ap-10001	127	3	by	by	ADP
ap-10001	127	4	co2	co2	VERB
ap-10001	127	5	laser	laser	NOUN
ap-10001	127	6	at	at	ADP
ap-10001	127	7	final	final	ADJ
ap-10001	127	8	stage	stage	NOUN
ap-10001	127	9	.	.	PUNCT
ap-10001	128	1	figure	figure	NOUN
ap-10001	128	2	2	2	NUM
ap-10001	128	3	.	.	PUNCT
ap-10001	129	1	the	the	DET
ap-10001	129	2	model	model	NOUN
ap-10001	129	3	geometry	geometry	NOUN
ap-10001	129	4	,	,	PUNCT
ap-10001	129	5	mesh	mesh	NOUN
ap-10001	129	6	,	,	PUNCT
ap-10001	129	7	and	and	CCONJ
ap-10001	129	8	heat	heat	NOUN
ap-10001	129	9	source	source	NOUN
ap-10001	129	10	for	for	ADP
ap-10001	129	11	materials	material	NOUN
ap-10001	129	12	irradiated	irradiate	VERB
ap-10001	129	13	by	by	ADP
ap-10001	129	14	lasers	laser	NOUN
ap-10001	129	15	.	.	PUNCT
ap-10001	130	1	sol	sol	NOUN
ap-10001	130	2	software	software	PROPN
ap-10001	130	3	.	.	PUNCT
ap-10001	131	1	the	the	DET
ap-10001	131	2	results	result	NOUN
ap-10001	131	3	indicate	indicate	VERB
ap-10001	131	4	that	that	SCONJ
ap-10001	131	5	laser	laser	NOUN
ap-10001	131	6	microprocessing	microprocessing	NOUN
ap-10001	131	7	begins	begin	VERB
ap-10001	131	8	instantly	instantly	ADV
ap-10001	131	9	when	when	SCONJ
ap-10001	131	10	lasers	laser	NOUN
ap-10001	131	11	are	be	AUX
ap-10001	131	12	applied	apply	VERB
ap-10001	131	13	to	to	ADP
ap-10001	131	14	silicon	silicon	NOUN
ap-10001	131	15	and	and	CCONJ
ap-10001	131	16	quartz	quartz	NOUN
ap-10001	131	17	surface	surface	NOUN
ap-10001	131	18	areas	area	NOUN
ap-10001	131	19	.	.	PUNCT
ap-10001	132	1	3.2	3.2	NUM
ap-10001	132	2	.	.	PUNCT
ap-10001	133	1	the	the	DET
ap-10001	133	2	irradiation	irradiation	NOUN
ap-10001	133	3	area	area	NOUN
ap-10001	133	4	figure	figure	NOUN
ap-10001	133	5	4	4	NUM
ap-10001	133	6	shows	show	VERB
ap-10001	133	7	the	the	DET
ap-10001	133	8	irradiation	irradiation	NOUN
ap-10001	133	9	areas	area	NOUN
ap-10001	133	10	of	of	ADP
ap-10001	133	11	a	a	DET
ap-10001	133	12	silicon	silicon	NOUN
ap-10001	133	13	wafer	wafer	NOUN
ap-10001	133	14	that	that	PRON
ap-10001	133	15	were	be	AUX
ap-10001	133	16	irradiated	irradiate	VERB
ap-10001	133	17	using	use	VERB
ap-10001	133	18	an	an	DET
ap-10001	133	19	nd	nd	NOUN
ap-10001	133	20	:	:	PUNCT
ap-10001	133	21	yag	yag	NOUN
ap-10001	133	22	laser	laser	NOUN
ap-10001	133	23	and	and	CCONJ
ap-10001	133	24	a	a	DET
ap-10001	133	25	quartz	quartz	NOUN
ap-10001	133	26	sheet	sheet	NOUN
ap-10001	133	27	that	that	PRON
ap-10001	133	28	was	be	AUX
ap-10001	133	29	first	first	ADV
ap-10001	133	30	irradiated	irradiate	VERB
ap-10001	133	31	using	use	VERB
ap-10001	133	32	a	a	DET
ap-10001	133	33	fibre	fibre	NOUN
ap-10001	133	34	laser	laser	NOUN
ap-10001	133	35	and	and	CCONJ
ap-10001	133	36	then	then	ADV
ap-10001	133	37	using	use	VERB
ap-10001	133	38	a	a	DET
ap-10001	133	39	co2	co2	NOUN
ap-10001	133	40	laser	laser	NOUN
ap-10001	133	41	.	.	PUNCT
ap-10001	134	1	the	the	DET
ap-10001	134	2	observation	observation	NOUN
ap-10001	134	3	has	have	AUX
ap-10001	134	4	revealed	reveal	VERB
ap-10001	134	5	that	that	SCONJ
ap-10001	134	6	the	the	DET
ap-10001	134	7	shape	shape	NOUN
ap-10001	134	8	of	of	ADP
ap-10001	134	9	the	the	DET
ap-10001	134	10	interaction	interaction	NOUN
ap-10001	134	11	region	region	NOUN
ap-10001	134	12	on	on	ADP
ap-10001	134	13	the	the	DET
ap-10001	134	14	silicon	silicon	NOUN
ap-10001	134	15	surface	surface	NOUN
ap-10001	134	16	exhibits	exhibit	VERB
ap-10001	134	17	a	a	DET
ap-10001	134	18	remarkable	remarkable	ADJ
ap-10001	134	19	resemblance	resemblance	NOUN
ap-10001	134	20	to	to	ADP
ap-10001	134	21	a	a	DET
ap-10001	134	22	sphere	sphere	NOUN
ap-10001	134	23	.	.	PUNCT
ap-10001	135	1	as	as	SCONJ
ap-10001	135	2	depicted	depict	VERB
ap-10001	135	3	in	in	ADP
ap-10001	135	4	figure	figure	NOUN
ap-10001	135	5	4a	4a	NOUN
ap-10001	135	6	,	,	PUNCT
ap-10001	135	7	the	the	DET
ap-10001	135	8	diameter	diameter	NOUN
ap-10001	135	9	of	of	ADP
ap-10001	135	10	the	the	DET
ap-10001	135	11	interaction	interaction	NOUN
ap-10001	135	12	area	area	NOUN
ap-10001	135	13	is	be	AUX
ap-10001	135	14	800	800	NUM
ap-10001	135	15	µm	µm	NOUN
ap-10001	135	16	.	.	PUNCT
ap-10001	136	1	the	the	DET
ap-10001	136	2	interaction	interaction	NOUN
ap-10001	136	3	area	area	NOUN
ap-10001	136	4	for	for	ADP
ap-10001	136	5	quartz	quartz	NOUN
ap-10001	136	6	,	,	PUNCT
ap-10001	136	7	as	as	SCONJ
ap-10001	136	8	depicted	depict	VERB
ap-10001	136	9	in	in	ADP
ap-10001	136	10	figure	figure	NOUN
ap-10001	136	11	4b	4b	PROPN
ap-10001	136	12	,	,	PUNCT
ap-10001	136	13	exhibits	exhibit	VERB
ap-10001	136	14	spherical	spherical	ADJ
ap-10001	136	15	morphologies	morphology	NOUN
ap-10001	136	16	with	with	ADP
ap-10001	136	17	a	a	DET
ap-10001	136	18	diameter	diameter	NOUN
ap-10001	136	19	of	of	ADP
ap-10001	136	20	200	200	NUM
ap-10001	136	21	µm	µm	NOUN
ap-10001	136	22	.	.	PUNCT
ap-10001	137	1	the	the	DET
ap-10001	137	2	variation	variation	NOUN
ap-10001	137	3	in	in	ADP
ap-10001	137	4	diameter	diameter	NOUN
ap-10001	137	5	among	among	ADP
ap-10001	137	6	the	the	DET
ap-10001	137	7	shapes	shape	NOUN
ap-10001	137	8	can	can	AUX
ap-10001	137	9	be	be	AUX
ap-10001	137	10	attributed	attribute	VERB
ap-10001	137	11	to	to	ADP
ap-10001	137	12	the	the	DET
ap-10001	137	13	disparity	disparity	NOUN
ap-10001	137	14	in	in	ADP
ap-10001	137	15	the	the	DET
ap-10001	137	16	spot	spot	NOUN
ap-10001	137	17	size	size	NOUN
ap-10001	137	18	for	for	ADP
ap-10001	137	19	each	each	DET
ap-10001	137	20	laser	laser	NOUN
ap-10001	137	21	type	type	NOUN
ap-10001	137	22	.	.	PUNCT
ap-10001	138	1	the	the	DET
ap-10001	138	2	nd	nd	NOUN
ap-10001	138	3	:	:	PUNCT
ap-10001	138	4	yag	yag	NOUN
ap-10001	138	5	laser	laser	NOUN
ap-10001	138	6	has	have	VERB
ap-10001	138	7	a	a	DET
ap-10001	138	8	spot	spot	NOUN
ap-10001	138	9	size	size	NOUN
ap-10001	138	10	of	of	ADP
ap-10001	138	11	2	2	NUM
ap-10001	138	12	mm	mm	NOUN
ap-10001	138	13	,	,	PUNCT
ap-10001	138	14	while	while	SCONJ
ap-10001	138	15	the	the	DET
ap-10001	138	16	fibre	fibre	NOUN
ap-10001	138	17	laser	laser	NOUN
ap-10001	138	18	has	have	VERB
ap-10001	138	19	a	a	DET
ap-10001	138	20	spot	spot	NOUN
ap-10001	138	21	size	size	NOUN
ap-10001	138	22	of	of	ADP
ap-10001	138	23	0.1	0.1	NUM
ap-10001	138	24	mm	mm	NOUN
ap-10001	138	25	.	.	PROPN
ap-10001	138	26	409	409	NUM
ap-10001	138	27	m.	m.	NOUN
ap-10001	138	28	j.	j.	PROPN
ap-10001	138	29	mahmoud	mahmoud	PROPN
ap-10001	138	30	,	,	PUNCT
ap-10001	138	31	b.	b.	PROPN
ap-10001	138	32	g.	g.	PROPN
ap-10001	138	33	rasheed	rasheed	PROPN
ap-10001	138	34	,	,	PUNCT
ap-10001	138	35	m.	m.	NOUN
ap-10001	138	36	m.	m.	PROPN
ap-10001	138	37	hanon	hanon	PROPN
ap-10001	138	38	acta	acta	PROPN
ap-10001	138	39	polytechnica	polytechnica	PROPN
ap-10001	138	40	(	(	PUNCT
ap-10001	138	41	a	a	NOUN
ap-10001	138	42	)	)	PUNCT
ap-10001	138	43	.	.	PUNCT
ap-10001	139	1	thermal	thermal	ADJ
ap-10001	139	2	distribution	distribution	NOUN
ap-10001	139	3	at	at	ADP
ap-10001	139	4	the	the	DET
ap-10001	139	5	surface	surface	NOUN
ap-10001	139	6	of	of	ADP
ap-10001	139	7	si	si	PROPN
ap-10001	139	8	.	.	PUNCT
ap-10001	139	9	(	(	PUNCT
ap-10001	139	10	b	b	NOUN
ap-10001	139	11	)	)	PUNCT
ap-10001	139	12	.	.	PUNCT
ap-10001	140	1	sub	sub	ADJ
ap-10001	140	2	-	-	ADJ
ap-10001	140	3	surface	surface	ADJ
ap-10001	140	4	temperature	temperature	NOUN
ap-10001	140	5	of	of	ADP
ap-10001	140	6	si	si	PROPN
ap-10001	140	7	.	.	PUNCT
ap-10001	140	8	(	(	PUNCT
ap-10001	140	9	c	c	NOUN
ap-10001	140	10	)	)	PUNCT
ap-10001	140	11	.	.	PUNCT
ap-10001	141	1	thermal	thermal	ADJ
ap-10001	141	2	distribution	distribution	NOUN
ap-10001	141	3	at	at	ADP
ap-10001	141	4	the	the	DET
ap-10001	141	5	surface	surface	NOUN
ap-10001	141	6	of	of	ADP
ap-10001	141	7	quartz	quartz	NOUN
ap-10001	141	8	.	.	PUNCT
ap-10001	142	1	(	(	PUNCT
ap-10001	142	2	d	d	NOUN
ap-10001	142	3	)	)	PUNCT
ap-10001	142	4	.	.	PUNCT
ap-10001	143	1	sub	sub	ADJ
ap-10001	143	2	-	-	ADJ
ap-10001	143	3	surface	surface	ADJ
ap-10001	143	4	temperature	temperature	NOUN
ap-10001	143	5	of	of	ADP
ap-10001	143	6	quartz	quartz	NOUN
ap-10001	143	7	at	at	ADP
ap-10001	143	8	first	first	ADJ
ap-10001	143	9	stage	stage	NOUN
ap-10001	143	10	.	.	PUNCT
ap-10001	144	1	(	(	PUNCT
ap-10001	144	2	e	e	NOUN
ap-10001	144	3	)	)	PUNCT
ap-10001	144	4	.	.	PUNCT
ap-10001	145	1	thermal	thermal	ADJ
ap-10001	145	2	distribution	distribution	NOUN
ap-10001	145	3	at	at	ADP
ap-10001	145	4	the	the	DET
ap-10001	145	5	surface	surface	NOUN
ap-10001	145	6	.	.	PUNCT
ap-10001	146	1	(	(	PUNCT
ap-10001	146	2	f	f	X
ap-10001	146	3	)	)	PUNCT
ap-10001	146	4	.	.	PUNCT
ap-10001	147	1	sub	sub	ADJ
ap-10001	147	2	-	-	ADJ
ap-10001	147	3	surface	surface	ADJ
ap-10001	147	4	temperature	temperature	NOUN
ap-10001	147	5	of	of	ADP
ap-10001	147	6	quartz	quartz	NOUN
ap-10001	147	7	at	at	ADP
ap-10001	147	8	second	second	ADJ
ap-10001	147	9	stage	stage	NOUN
ap-10001	147	10	.	.	PUNCT
ap-10001	148	1	figure	figure	NOUN
ap-10001	148	2	3	3	NUM
ap-10001	148	3	.	.	PUNCT
ap-10001	149	1	the	the	DET
ap-10001	149	2	theoretical	theoretical	ADJ
ap-10001	149	3	model	model	NOUN
ap-10001	149	4	of	of	ADP
ap-10001	149	5	silicon	silicon	NOUN
ap-10001	149	6	and	and	CCONJ
ap-10001	149	7	quartz	quartz	NOUN
ap-10001	149	8	irradiated	irradiate	VERB
ap-10001	149	9	by	by	ADP
ap-10001	149	10	nd	nd	PRON
ap-10001	149	11	:	:	PUNCT
ap-10001	149	12	yag	yag	NOUN
ap-10001	149	13	laser	laser	NOUN
ap-10001	149	14	and	and	CCONJ
ap-10001	149	15	fibre	fibre	NOUN
ap-10001	149	16	laser	laser	NOUN
ap-10001	149	17	,	,	PUNCT
ap-10001	149	18	followed	follow	VERB
ap-10001	149	19	by	by	ADP
ap-10001	149	20	co2	co2	NOUN
ap-10001	149	21	laser	laser	NOUN
ap-10001	149	22	,	,	PUNCT
ap-10001	149	23	respectively	respectively	ADV
ap-10001	149	24	.	.	PUNCT
ap-10001	150	1	silicon	silicon	PROPN
ap-10001	150	2	nd	nd	PRON
ap-10001	150	3	:	:	PUNCT
ap-10001	150	4	yag	yag	NOUN
ap-10001	150	5	laser	laser	NOUN
ap-10001	150	6	time	time	NOUN
ap-10001	151	1	[	[	X
ap-10001	151	2	ns	ns	X
ap-10001	151	3	]	]	X
ap-10001	151	4	tmax	tmax	ADP
ap-10001	151	5	[	[	X
ap-10001	151	6	k	k	X
ap-10001	151	7	]	]	X
ap-10001	151	8	1	1	NUM
ap-10001	151	9	835	835	NUM
ap-10001	151	10	2	2	NUM
ap-10001	151	11	1	1	NUM
ap-10001	151	12	377	377	NUM
ap-10001	151	13	3	3	NUM
ap-10001	151	14	1	1	NUM
ap-10001	151	15	919	919	NUM
ap-10001	151	16	4	4	NUM
ap-10001	151	17	2	2	NUM
ap-10001	151	18	460	460	NUM
ap-10001	151	19	5	5	NUM
ap-10001	151	20	3	3	NUM
ap-10001	151	21	002	002	NUM
ap-10001	151	22	6	6	NUM
ap-10001	151	23	3	3	NUM
ap-10001	151	24	544	544	NUM
ap-10001	151	25	7	7	NUM
ap-10001	151	26	4	4	NUM
ap-10001	151	27	049	049	NUM
ap-10001	151	28	8	8	NUM
ap-10001	151	29	4	4	NUM
ap-10001	151	30	626	626	NUM
ap-10001	151	31	9	9	NUM
ap-10001	151	32	5	5	NUM
ap-10001	151	33	166	166	NUM
ap-10001	151	34	10	10	NUM
ap-10001	151	35	5	5	NUM
ap-10001	151	36	700	700	NUM
ap-10001	151	37	quartz	quartz	NOUN
ap-10001	151	38	time	time	NOUN
ap-10001	151	39	[	[	X
ap-10001	151	40	s	s	X
ap-10001	151	41	]	]	X
ap-10001	151	42	fiber	fiber	NOUN
ap-10001	151	43	laser	laser	NOUN
ap-10001	151	44	co2	co2	NOUN
ap-10001	151	45	laser	laser	NOUN
ap-10001	151	46	tmax	tmax	ADP
ap-10001	151	47	[	[	X
ap-10001	151	48	k	k	X
ap-10001	151	49	]	]	X
ap-10001	151	50	tmax	tmax	ADP
ap-10001	151	51	[	[	X
ap-10001	151	52	k	k	X
ap-10001	151	53	]	]	X
ap-10001	151	54	0.1	0.1	NUM
ap-10001	151	55	2	2	NUM
ap-10001	151	56	200	200	NUM
ap-10001	151	57	1	1	NUM
ap-10001	151	58	345	345	NUM
ap-10001	151	59	0.2	0.2	NUM
ap-10001	151	60	2	2	NUM
ap-10001	151	61	250	250	NUM
ap-10001	151	62	1	1	NUM
ap-10001	151	63	600	600	NUM
ap-10001	151	64	0.3	0.3	NUM
ap-10001	151	65	2	2	NUM
ap-10001	151	66	300	300	NUM
ap-10001	151	67	1	1	NUM
ap-10001	151	68	725	725	NUM
ap-10001	151	69	0.4	0.4	NUM
ap-10001	151	70	2	2	NUM
ap-10001	151	71	350	350	NUM
ap-10001	151	72	1	1	NUM
ap-10001	151	73	825	825	NUM
ap-10001	151	74	0.5	0.5	NUM
ap-10001	151	75	2	2	NUM
ap-10001	151	76	400	400	NUM
ap-10001	151	77	1	1	NUM
ap-10001	151	78	900	900	NUM
ap-10001	151	79	0.6	0.6	NUM
ap-10001	151	80	2	2	NUM
ap-10001	151	81	450	450	NUM
ap-10001	151	82	1	1	NUM
ap-10001	151	83	960	960	NUM
ap-10001	151	84	0.7	0.7	NUM
ap-10001	151	85	2	2	NUM
ap-10001	151	86	500	500	NUM
ap-10001	151	87	2	2	NUM
ap-10001	151	88	015	015	NUM
ap-10001	151	89	0.8	0.8	NUM
ap-10001	151	90	2	2	NUM
ap-10001	151	91	545	545	NUM
ap-10001	151	92	2	2	NUM
ap-10001	151	93	060	060	NUM
ap-10001	151	94	0.9	0.9	NUM
ap-10001	151	95	2	2	NUM
ap-10001	151	96	590	590	NUM
ap-10001	151	97	2	2	NUM
ap-10001	151	98	100	100	NUM
ap-10001	151	99	1	1	NUM
ap-10001	151	100	2	2	NUM
ap-10001	151	101	630	630	NUM
ap-10001	151	102	2	2	NUM
ap-10001	151	103	140	140	NUM
ap-10001	151	104	table	table	NOUN
ap-10001	151	105	3	3	NUM
ap-10001	151	106	.	.	PUNCT
ap-10001	151	107	silicon	silicon	NOUN
ap-10001	151	108	and	and	CCONJ
ap-10001	151	109	quartz	quartz	NOUN
ap-10001	151	110	maximum	maximum	PROPN
ap-10001	151	111	surface	surface	NOUN
ap-10001	151	112	temperature	temperature	NOUN
ap-10001	151	113	as	as	ADP
ap-10001	151	114	a	a	DET
ap-10001	151	115	function	function	NOUN
ap-10001	151	116	of	of	ADP
ap-10001	151	117	time	time	NOUN
ap-10001	151	118	.	.	PUNCT
ap-10001	152	1	410	410	NUM
ap-10001	152	2	vol	vol	NOUN
ap-10001	152	3	.	.	PUNCT
ap-10001	153	1	65	65	NUM
ap-10001	153	2	no	no	NOUN
ap-10001	153	3	.	.	PUNCT
ap-10001	154	1	4/2025	4/2025	NUM
ap-10001	154	2	improving	improve	VERB
ap-10001	154	3	the	the	DET
ap-10001	154	4	production	production	NOUN
ap-10001	154	5	process	process	NOUN
ap-10001	154	6	of	of	ADP
ap-10001	154	7	silicon	silicon	NOUN
ap-10001	154	8	nanoparticle	nanoparticle	NOUN
ap-10001	154	9	.	.	PUNCT
ap-10001	154	10	.	.	PUNCT
ap-10001	154	11	.	.	PUNCT
ap-10001	155	1	(	(	PUNCT
ap-10001	155	2	a	a	X
ap-10001	155	3	)	)	PUNCT
ap-10001	155	4	.	.	PUNCT
ap-10001	156	1	silicon	silicon	PROPN
ap-10001	156	2	.	.	PUNCT
ap-10001	157	1	(	(	PUNCT
ap-10001	157	2	b	b	NOUN
ap-10001	157	3	)	)	PUNCT
ap-10001	157	4	.	.	PUNCT
ap-10001	158	1	quartz	quartz	PROPN
ap-10001	158	2	.	.	PUNCT
ap-10001	159	1	figure	figure	VERB
ap-10001	159	2	4	4	NUM
ap-10001	159	3	.	.	PUNCT
ap-10001	160	1	the	the	DET
ap-10001	160	2	optical	optical	ADJ
ap-10001	160	3	microscope	microscope	NOUN
ap-10001	160	4	image	image	NOUN
ap-10001	160	5	of	of	ADP
ap-10001	160	6	the	the	DET
ap-10001	160	7	interaction	interaction	NOUN
ap-10001	160	8	area	area	NOUN
ap-10001	160	9	of	of	ADP
ap-10001	160	10	:	:	PUNCT
ap-10001	160	11	silicon	silicon	NOUN
ap-10001	160	12	and	and	CCONJ
ap-10001	160	13	quartz	quartz	NOUN
ap-10001	160	14	.	.	PUNCT
ap-10001	161	1	3.3	3.3	NUM
ap-10001	161	2	.	.	PUNCT
ap-10001	162	1	statistical	statistical	ADJ
ap-10001	162	2	analysis	analysis	NOUN
ap-10001	162	3	and	and	CCONJ
ap-10001	162	4	numerical	numerical	ADJ
ap-10001	162	5	optimization	optimization	PROPN
ap-10001	162	6	the	the	DET
ap-10001	162	7	box	box	NOUN
ap-10001	162	8	behnken	behnken	NOUN
ap-10001	162	9	design	design	NOUN
ap-10001	162	10	(	(	PUNCT
ap-10001	162	11	bbd	bbd	PROPN
ap-10001	162	12	)	)	PUNCT
ap-10001	162	13	was	be	AUX
ap-10001	162	14	used	use	VERB
ap-10001	162	15	to	to	PART
ap-10001	162	16	investigate	investigate	VERB
ap-10001	162	17	the	the	DET
ap-10001	162	18	effects	effect	NOUN
ap-10001	162	19	of	of	ADP
ap-10001	162	20	three	three	NUM
ap-10001	162	21	independent	independent	ADJ
ap-10001	162	22	input	input	NOUN
ap-10001	162	23	variables	variable	NOUN
ap-10001	163	1	[	[	X
ap-10001	163	2	22	22	NUM
ap-10001	163	3	]	]	PUNCT
ap-10001	163	4	,	,	PUNCT
ap-10001	163	5	energy	energy	NOUN
ap-10001	163	6	,	,	PUNCT
ap-10001	163	7	pulse	pulse	NOUN
ap-10001	163	8	rate	rate	NOUN
ap-10001	163	9	,	,	PUNCT
ap-10001	163	10	and	and	CCONJ
ap-10001	163	11	pulse	pulse	NOUN
ap-10001	163	12	width	width	NOUN
ap-10001	163	13	of	of	ADP
ap-10001	163	14	an	an	DET
ap-10001	163	15	nd	nd	NOUN
ap-10001	163	16	:	:	PUNCT
ap-10001	163	17	yag	yag	NOUN
ap-10001	163	18	laser	laser	NOUN
ap-10001	163	19	on	on	ADP
ap-10001	163	20	a	a	DET
ap-10001	163	21	silicon	silicon	NOUN
ap-10001	163	22	wafer	wafer	NOUN
ap-10001	163	23	.	.	PUNCT
ap-10001	164	1	additionally	additionally	ADV
ap-10001	164	2	,	,	PUNCT
ap-10001	164	3	a	a	DET
ap-10001	164	4	quartz	quartz	NOUN
ap-10001	164	5	sheet	sheet	NOUN
ap-10001	164	6	was	be	AUX
ap-10001	164	7	used	use	VERB
ap-10001	164	8	to	to	PART
ap-10001	164	9	determine	determine	VERB
ap-10001	164	10	the	the	DET
ap-10001	164	11	impact	impact	NOUN
ap-10001	164	12	of	of	ADP
ap-10001	164	13	laser	laser	NOUN
ap-10001	164	14	intensity	intensity	NOUN
ap-10001	164	15	,	,	PUNCT
ap-10001	164	16	exposure	exposure	NOUN
ap-10001	164	17	time	time	NOUN
ap-10001	164	18	,	,	PUNCT
ap-10001	164	19	and	and	CCONJ
ap-10001	164	20	speed	speed	NOUN
ap-10001	164	21	,	,	PUNCT
ap-10001	164	22	which	which	PRON
ap-10001	164	23	are	be	AUX
ap-10001	164	24	input	input	ADJ
ap-10001	164	25	parameters	parameter	NOUN
ap-10001	164	26	of	of	ADP
ap-10001	164	27	a	a	DET
ap-10001	164	28	fibre	fibre	NOUN
ap-10001	164	29	laser	laser	NOUN
ap-10001	164	30	,	,	PUNCT
ap-10001	164	31	followed	follow	VERB
ap-10001	164	32	by	by	ADP
ap-10001	164	33	a	a	DET
ap-10001	164	34	co2	co2	NOUN
ap-10001	164	35	laser	laser	NOUN
ap-10001	164	36	for	for	ADP
ap-10001	164	37	the	the	DET
ap-10001	164	38	first	first	ADJ
ap-10001	164	39	and	and	CCONJ
ap-10001	164	40	second	second	ADJ
ap-10001	164	41	stages	stage	NOUN
ap-10001	164	42	.	.	PUNCT
ap-10001	165	1	the	the	DET
ap-10001	165	2	effect	effect	NOUN
ap-10001	165	3	of	of	ADP
ap-10001	165	4	various	various	ADJ
ap-10001	165	5	input	input	NOUN
ap-10001	165	6	parameters	parameter	NOUN
ap-10001	165	7	on	on	ADP
ap-10001	165	8	the	the	DET
ap-10001	165	9	output	output	NOUN
ap-10001	165	10	parameters	parameter	NOUN
ap-10001	165	11	was	be	AUX
ap-10001	165	12	analysed	analyse	VERB
ap-10001	165	13	using	use	VERB
ap-10001	165	14	an	an	DET
ap-10001	165	15	anova	anova	PROPN
ap-10001	165	16	.	.	PUNCT
ap-10001	166	1	different	different	ADJ
ap-10001	166	2	input	input	NOUN
ap-10001	166	3	parameters	parameter	NOUN
ap-10001	166	4	were	be	AUX
ap-10001	166	5	used	use	VERB
ap-10001	166	6	to	to	PART
ap-10001	166	7	measure	measure	VERB
ap-10001	166	8	various	various	ADJ
ap-10001	166	9	results	result	NOUN
ap-10001	166	10	in	in	ADP
ap-10001	166	11	each	each	DET
ap-10001	166	12	experiment	experiment	NOUN
ap-10001	166	13	to	to	PART
ap-10001	166	14	make	make	VERB
ap-10001	166	15	an	an	DET
ap-10001	166	16	error	error	NOUN
ap-10001	166	17	-	-	PUNCT
ap-10001	166	18	free	free	ADJ
ap-10001	166	19	mathematical	mathematical	ADJ
ap-10001	166	20	model	model	NOUN
ap-10001	166	21	that	that	PRON
ap-10001	166	22	connects	connect	VERB
ap-10001	166	23	input	input	NOUN
ap-10001	166	24	variables	variable	NOUN
ap-10001	166	25	to	to	PART
ap-10001	166	26	outcome	outcome	VERB
ap-10001	166	27	responses	response	NOUN
ap-10001	166	28	.	.	PUNCT
ap-10001	167	1	the	the	DET
ap-10001	167	2	response	response	NOUN
ap-10001	167	3	was	be	AUX
ap-10001	167	4	predicted	predict	VERB
ap-10001	167	5	using	use	VERB
ap-10001	167	6	a	a	DET
ap-10001	167	7	general	general	ADJ
ap-10001	167	8	quadratic	quadratic	ADJ
ap-10001	167	9	equation	equation	NOUN
ap-10001	167	10	for	for	ADP
ap-10001	167	11	varying	vary	VERB
ap-10001	167	12	amounts	amount	NOUN
ap-10001	167	13	of	of	ADP
ap-10001	167	14	each	each	DET
ap-10001	167	15	constituent	constituent	NOUN
ap-10001	167	16	,	,	PUNCT
ap-10001	167	17	as	as	SCONJ
ap-10001	167	18	shown	show	VERB
ap-10001	167	19	by	by	ADP
ap-10001	167	20	[	[	X
ap-10001	167	21	23	23	NUM
ap-10001	167	22	]	]	X
ap-10001	167	23	:	:	PUNCT
ap-10001	168	1	y	y	PROPN
ap-10001	168	2	=	=	PUNCT
ap-10001	168	3	γo	γo	PROPN
ap-10001	168	4	+	+	NUM
ap-10001	168	5	n∑	n∑	ADJ
ap-10001	168	6	i=1	i=1	PROPN
ap-10001	168	7	γixi	γixi	NOUN
ap-10001	168	8	+	+	CCONJ
ap-10001	168	9	n∑	n∑	ADJ
ap-10001	168	10	i=1	i=1	PROPN
ap-10001	168	11	γiix	γiix	ADJ
ap-10001	168	12	2	2	NUM
ap-10001	169	1	i	i	NOUN
ap-10001	169	2	+	+	CCONJ
ap-10001	169	3	∑	∑	PROPN
ap-10001	169	4	i	i	PROPN
ap-10001	169	5	∑	∑	PROPN
ap-10001	169	6	j	j	PROPN
ap-10001	169	7	γijxixj	γijxixj	PROPN
ap-10001	169	8	+	+	CCONJ
ap-10001	169	9	e	e	NOUN
ap-10001	169	10	,	,	PUNCT
ap-10001	169	11	(	(	PUNCT
ap-10001	169	12	2	2	X
ap-10001	169	13	)	)	PUNCT
ap-10001	169	14	where	where	SCONJ
ap-10001	169	15	γo	γo	ADV
ap-10001	169	16	is	be	AUX
ap-10001	169	17	a	a	DET
ap-10001	169	18	constant	constant	ADJ
ap-10001	169	19	number	number	NOUN
ap-10001	169	20	,	,	PUNCT
ap-10001	169	21	n	n	X
ap-10001	169	22	is	be	AUX
ap-10001	169	23	the	the	DET
ap-10001	169	24	parameter	parameter	NOUN
ap-10001	169	25	number	number	NOUN
ap-10001	169	26	,	,	PUNCT
ap-10001	169	27	γi	γi	X
ap-10001	169	28	is	be	AUX
ap-10001	169	29	a	a	DET
ap-10001	169	30	linear	linear	ADJ
ap-10001	169	31	coefficient	coefficient	NOUN
ap-10001	169	32	,	,	PUNCT
ap-10001	169	33	γii	γii	NOUN
ap-10001	169	34	is	be	AUX
ap-10001	169	35	a	a	DET
ap-10001	169	36	quadratic	quadratic	ADJ
ap-10001	169	37	coefficient	coefficient	NOUN
ap-10001	169	38	,	,	PUNCT
ap-10001	169	39	γij	γij	PRON
ap-10001	169	40	is	be	AUX
ap-10001	169	41	a	a	DET
ap-10001	169	42	coefficient	coefficient	NOUN
ap-10001	169	43	of	of	ADP
ap-10001	169	44	laser	laser	NOUN
ap-10001	169	45	-	-	PUNCT
ap-10001	169	46	material	material	NOUN
ap-10001	169	47	interaction	interaction	NOUN
ap-10001	169	48	,	,	PUNCT
ap-10001	169	49	and	and	CCONJ
ap-10001	169	50	e	e	NOUN
ap-10001	169	51	is	be	AUX
ap-10001	169	52	the	the	DET
ap-10001	169	53	parameter	parameter	NOUN
ap-10001	169	54	error	error	NOUN
ap-10001	169	55	.	.	PUNCT
ap-10001	170	1	the	the	DET
ap-10001	170	2	optimisation	optimisation	NOUN
ap-10001	170	3	process	process	NOUN
ap-10001	170	4	includes	include	VERB
ap-10001	170	5	the	the	DET
ap-10001	170	6	combination	combination	NOUN
ap-10001	170	7	of	of	ADP
ap-10001	170	8	various	various	ADJ
ap-10001	170	9	components	component	NOUN
ap-10001	170	10	that	that	PRON
ap-10001	170	11	were	be	AUX
ap-10001	170	12	used	use	VERB
ap-10001	170	13	in	in	ADP
ap-10001	170	14	combination	combination	NOUN
ap-10001	170	15	[	[	X
ap-10001	170	16	24	24	NUM
ap-10001	170	17	]	]	PUNCT
ap-10001	170	18	.	.	PUNCT
ap-10001	171	1	the	the	DET
ap-10001	171	2	utilisation	utilisation	NOUN
ap-10001	171	3	of	of	ADP
ap-10001	171	4	numerical	numerical	ADJ
ap-10001	171	5	optimisation	optimisation	NOUN
ap-10001	171	6	holds	hold	VERB
ap-10001	171	7	significant	significant	ADJ
ap-10001	171	8	importance	importance	NOUN
ap-10001	171	9	within	within	ADP
ap-10001	171	10	the	the	DET
ap-10001	171	11	design	design	NOUN
ap-10001	171	12	of	of	ADP
ap-10001	171	13	experiments	experiment	NOUN
ap-10001	171	14	(	(	PUNCT
ap-10001	171	15	doe	doe	NOUN
ap-10001	171	16	)	)	PUNCT
ap-10001	171	17	software	software	NOUN
ap-10001	171	18	domain	domain	NOUN
ap-10001	171	19	[	[	X
ap-10001	171	20	25	25	NUM
ap-10001	171	21	,	,	PUNCT
ap-10001	171	22	26	26	NUM
ap-10001	171	23	]	]	PUNCT
ap-10001	171	24	.	.	PUNCT
ap-10001	172	1	3.4	3.4	NUM
ap-10001	172	2	.	.	PUNCT
ap-10001	172	3	silicon	silicon	NOUN
ap-10001	172	4	nanoparticles	nanoparticle	NOUN
ap-10001	172	5	according	accord	VERB
ap-10001	172	6	to	to	ADP
ap-10001	172	7	the	the	DET
ap-10001	172	8	experimental	experimental	ADJ
ap-10001	172	9	plan	plan	NOUN
ap-10001	172	10	in	in	ADP
ap-10001	172	11	tables	table	NOUN
ap-10001	172	12	4	4	NUM
ap-10001	172	13	and	and	CCONJ
ap-10001	172	14	5	5	NUM
ap-10001	172	15	,	,	PUNCT
ap-10001	172	16	silicon	silicon	NOUN
ap-10001	172	17	nanoparticles	nanoparticle	NOUN
ap-10001	172	18	were	be	AUX
ap-10001	172	19	subjected	subject	VERB
ap-10001	172	20	to	to	ADP
ap-10001	172	21	many	many	ADJ
ap-10001	172	22	tests	test	NOUN
ap-10001	172	23	using	use	VERB
ap-10001	172	24	the	the	DET
ap-10001	172	25	design	design	NOUN
ap-10001	172	26	expert	expert	NOUN
ap-10001	172	27	12	12	NUM
ap-10001	172	28	software	software	NOUN
ap-10001	172	29	.	.	PUNCT
ap-10001	173	1	the	the	DET
ap-10001	173	2	design	design	NOUN
ap-10001	173	3	of	of	ADP
ap-10001	173	4	experiments	experiment	NOUN
ap-10001	173	5	(	(	PUNCT
ap-10001	173	6	doe	doe	NOUN
ap-10001	173	7	)	)	PUNCT
ap-10001	173	8	approach	approach	NOUN
ap-10001	173	9	is	be	AUX
ap-10001	173	10	a	a	DET
ap-10001	173	11	valuable	valuable	ADJ
ap-10001	173	12	tool	tool	NOUN
ap-10001	173	13	in	in	ADP
ap-10001	173	14	engineering	engineering	NOUN
ap-10001	173	15	research	research	NOUN
ap-10001	173	16	,	,	PUNCT
ap-10001	173	17	as	as	SCONJ
ap-10001	173	18	it	it	PRON
ap-10001	173	19	systematically	systematically	ADV
ap-10001	173	20	determines	determine	VERB
ap-10001	173	21	optimal	optimal	ADJ
ap-10001	173	22	values	value	NOUN
ap-10001	173	23	by	by	ADP
ap-10001	173	24	analysing	analyse	VERB
ap-10001	173	25	the	the	DET
ap-10001	173	26	relationship	relationship	NOUN
ap-10001	173	27	between	between	ADP
ap-10001	173	28	the	the	DET
ap-10001	173	29	input	input	NOUN
ap-10001	173	30	and	and	CCONJ
ap-10001	173	31	output	output	NOUN
ap-10001	173	32	parameters	parameter	NOUN
ap-10001	173	33	.	.	PUNCT
ap-10001	174	1	the	the	DET
ap-10001	174	2	first	first	ADJ
ap-10001	174	3	step	step	NOUN
ap-10001	174	4	involves	involve	VERB
ap-10001	174	5	selecting	select	VERB
ap-10001	174	6	the	the	DET
ap-10001	174	7	input	input	NOUN
ap-10001	174	8	parameters	parameter	NOUN
ap-10001	174	9	and	and	CCONJ
ap-10001	174	10	defining	define	VERB
ap-10001	174	11	their	their	PRON
ap-10001	174	12	respective	respective	ADJ
ap-10001	174	13	ranges	range	NOUN
ap-10001	174	14	.	.	PUNCT
ap-10001	175	1	the	the	DET
ap-10001	175	2	software	software	NOUN
ap-10001	175	3	then	then	ADV
ap-10001	175	4	arranges	arrange	VERB
ap-10001	175	5	these	these	DET
ap-10001	175	6	parameters	parameter	NOUN
ap-10001	175	7	using	use	VERB
ap-10001	175	8	a	a	DET
ap-10001	175	9	specific	specific	ADJ
ap-10001	175	10	algorithm	algorithm	NOUN
ap-10001	175	11	,	,	PUNCT
ap-10001	175	12	allowing	allow	VERB
ap-10001	175	13	for	for	ADP
ap-10001	175	14	a	a	DET
ap-10001	175	15	structured	structured	ADJ
ap-10001	175	16	experimental	experimental	ADJ
ap-10001	175	17	design	design	NOUN
ap-10001	175	18	.	.	PUNCT
ap-10001	176	1	in	in	ADP
ap-10001	176	2	the	the	DET
ap-10001	176	3	experimental	experimental	ADJ
ap-10001	176	4	step	step	NOUN
ap-10001	176	5	,	,	PUNCT
ap-10001	176	6	the	the	DET
ap-10001	176	7	corresponding	corresponding	ADJ
ap-10001	176	8	output	output	NOUN
ap-10001	176	9	parameters	parameter	NOUN
ap-10001	176	10	are	be	AUX
ap-10001	176	11	obtained	obtain	VERB
ap-10001	176	12	and	and	CCONJ
ap-10001	176	13	recorded	record	VERB
ap-10001	176	14	based	base	VERB
ap-10001	176	15	on	on	ADP
ap-10001	176	16	the	the	DET
ap-10001	176	17	arranged	arrange	VERB
ap-10001	176	18	input	input	NOUN
ap-10001	176	19	values	value	NOUN
ap-10001	176	20	.	.	PUNCT
ap-10001	177	1	table	table	NOUN
ap-10001	177	2	4	4	NUM
ap-10001	177	3	presents	present	VERB
ap-10001	177	4	the	the	DET
ap-10001	177	5	experimental	experimental	ADJ
ap-10001	177	6	results	result	NOUN
ap-10001	177	7	for	for	ADP
ap-10001	177	8	silicon	silicon	NOUN
ap-10001	177	9	nanoparticles	nanoparticle	NOUN
ap-10001	177	10	,	,	PUNCT
ap-10001	177	11	where	where	SCONJ
ap-10001	177	12	the	the	DET
ap-10001	177	13	input	input	NOUN
ap-10001	177	14	parameters	parameter	NOUN
ap-10001	177	15	include	include	VERB
ap-10001	177	16	the	the	DET
ap-10001	177	17	laser	laser	NOUN
ap-10001	177	18	energy	energy	NOUN
ap-10001	177	19	,	,	PUNCT
ap-10001	177	20	the	the	DET
ap-10001	177	21	number	number	NOUN
ap-10001	177	22	of	of	ADP
ap-10001	177	23	pulses	pulse	NOUN
ap-10001	177	24	,	,	PUNCT
ap-10001	177	25	and	and	CCONJ
ap-10001	177	26	the	the	DET
ap-10001	177	27	pulse	pulse	NOUN
ap-10001	177	28	repetition	repetition	NOUN
ap-10001	177	29	rate	rate	NOUN
ap-10001	177	30	(	(	PUNCT
ap-10001	177	31	prr	prr	PROPN
ap-10001	177	32	)	)	PUNCT
ap-10001	177	33	.	.	PUNCT
ap-10001	178	1	the	the	DET
ap-10001	178	2	lower	low	ADJ
ap-10001	178	3	and	and	CCONJ
ap-10001	178	4	upper	upper	ADJ
ap-10001	178	5	values	value	NOUN
ap-10001	178	6	for	for	ADP
ap-10001	178	7	laser	laser	NOUN
ap-10001	178	8	energy	energy	NOUN
ap-10001	178	9	are	be	AUX
ap-10001	178	10	100	100	NUM
ap-10001	178	11	and	and	CCONJ
ap-10001	178	12	500	500	NUM
ap-10001	178	13	mj	mj	NOUN
ap-10001	178	14	,	,	PUNCT
ap-10001	178	15	respectively	respectively	ADV
ap-10001	178	16	,	,	PUNCT
ap-10001	178	17	while	while	SCONJ
ap-10001	178	18	the	the	DET
ap-10001	178	19	number	number	NOUN
ap-10001	178	20	of	of	ADP
ap-10001	178	21	laser	laser	NOUN
ap-10001	178	22	pulses	pulse	NOUN
ap-10001	178	23	ranges	range	VERB
ap-10001	178	24	from	from	ADP
ap-10001	178	25	10	10	NUM
ap-10001	178	26	to	to	PART
ap-10001	178	27	90	90	NUM
ap-10001	178	28	.	.	PUNCT
ap-10001	179	1	similarly	similarly	ADV
ap-10001	179	2	,	,	PUNCT
ap-10001	179	3	the	the	DET
ap-10001	179	4	prr	prr	PROPN
ap-10001	179	5	values	value	NOUN
ap-10001	179	6	range	range	VERB
ap-10001	179	7	from	from	ADP
ap-10001	179	8	1	1	NUM
ap-10001	179	9	to	to	PART
ap-10001	179	10	5	5	NUM
ap-10001	179	11	hz	hz	NOUN
ap-10001	179	12	.	.	PUNCT
ap-10001	180	1	the	the	DET
ap-10001	180	2	output	output	NOUN
ap-10001	180	3	parameters	parameter	NOUN
ap-10001	180	4	measured	measure	VERB
ap-10001	180	5	are	be	AUX
ap-10001	180	6	the	the	DET
ap-10001	180	7	peak	peak	NOUN
ap-10001	180	8	wavelength	wavelength	NOUN
ap-10001	180	9	and	and	CCONJ
ap-10001	180	10	the	the	DET
ap-10001	180	11	absorption	absorption	NOUN
ap-10001	180	12	peak	peak	NOUN
ap-10001	180	13	.	.	PUNCT
ap-10001	181	1	this	this	DET
ap-10001	181	2	structured	structured	ADJ
ap-10001	181	3	experimental	experimental	ADJ
ap-10001	181	4	design	design	NOUN
ap-10001	181	5	ensures	ensure	VERB
ap-10001	181	6	a	a	DET
ap-10001	181	7	comprehensive	comprehensive	ADJ
ap-10001	181	8	analysis	analysis	NOUN
ap-10001	181	9	of	of	ADP
ap-10001	181	10	the	the	DET
ap-10001	181	11	relationship	relationship	NOUN
ap-10001	181	12	between	between	ADP
ap-10001	181	13	the	the	DET
ap-10001	181	14	laser	laser	NOUN
ap-10001	181	15	parameters	parameter	NOUN
ap-10001	181	16	and	and	CCONJ
ap-10001	181	17	the	the	DET
ap-10001	181	18	silicon	silicon	NOUN
ap-10001	181	19	nanoparticles	nanoparticle	NOUN
ap-10001	181	20	.	.	PUNCT
ap-10001	182	1	the	the	DET
ap-10001	182	2	graphical	graphical	ADJ
ap-10001	182	3	representation	representation	NOUN
ap-10001	182	4	of	of	ADP
ap-10001	182	5	table	table	NOUN
ap-10001	182	6	4	4	NUM
ap-10001	182	7	is	be	AUX
ap-10001	182	8	shown	show	VERB
ap-10001	182	9	in	in	ADP
ap-10001	182	10	figure	figure	NOUN
ap-10001	182	11	5	5	NUM
ap-10001	182	12	and	and	CCONJ
ap-10001	182	13	figure	figure	VERB
ap-10001	182	14	6	6	NUM
ap-10001	182	15	.	.	PUNCT
ap-10001	183	1	figure	figure	NOUN
ap-10001	183	2	5	5	NUM
ap-10001	183	3	shows	show	VERB
ap-10001	183	4	a	a	DET
ap-10001	183	5	three	three	NUM
ap-10001	183	6	-	-	PUNCT
ap-10001	183	7	dimensional	dimensional	ADJ
ap-10001	183	8	graph	graph	NOUN
ap-10001	183	9	of	of	ADP
ap-10001	183	10	the	the	DET
ap-10001	183	11	peak	peak	NOUN
ap-10001	183	12	wavelength	wavelength	NOUN
ap-10001	183	13	at	at	ADP
ap-10001	183	14	1–5	1–5	PROPN
ap-10001	183	15	prr	prr	NOUN
ap-10001	183	16	.	.	PUNCT
ap-10001	184	1	the	the	DET
ap-10001	184	2	max	max	PROPN
ap-10001	184	3	.	.	PROPN
ap-10001	185	1	and	and	CCONJ
ap-10001	185	2	min	min	PROPN
ap-10001	185	3	.	.	PROPN
ap-10001	185	4	peaks	peak	NOUN
ap-10001	185	5	were	be	AUX
ap-10001	185	6	396	396	NUM
ap-10001	185	7	and	and	CCONJ
ap-10001	185	8	327	327	NUM
ap-10001	185	9	nm	nm	NOUN
ap-10001	185	10	,	,	PUNCT
ap-10001	185	11	respectively	respectively	ADV
ap-10001	185	12	.	.	PUNCT
ap-10001	186	1	increased	increase	VERB
ap-10001	186	2	laser	laser	NOUN
ap-10001	186	3	energy	energy	NOUN
ap-10001	186	4	resulted	result	VERB
ap-10001	186	5	in	in	ADP
ap-10001	186	6	the	the	DET
ap-10001	186	7	creation	creation	NOUN
ap-10001	186	8	of	of	ADP
ap-10001	186	9	smaller	small	ADJ
ap-10001	186	10	silicon	silicon	NOUN
ap-10001	186	11	nanoparticles	nanoparticle	NOUN
ap-10001	186	12	,	,	PUNCT
ap-10001	186	13	most	most	ADV
ap-10001	186	14	likely	likely	ADJ
ap-10001	186	15	due	due	ADP
ap-10001	186	16	to	to	ADP
ap-10001	186	17	more	more	ADV
ap-10001	186	18	intense	intense	ADJ
ap-10001	186	19	ablation	ablation	NOUN
ap-10001	186	20	dynamics	dynamic	NOUN
ap-10001	186	21	and	and	CCONJ
ap-10001	186	22	greater	great	ADJ
ap-10001	186	23	energy	energy	NOUN
ap-10001	186	24	densities	density	NOUN
ap-10001	186	25	that	that	PRON
ap-10001	186	26	promote	promote	VERB
ap-10001	186	27	finer	fine	ADJ
ap-10001	186	28	fragmentation	fragmentation	NOUN
ap-10001	186	29	of	of	ADP
ap-10001	186	30	the	the	DET
ap-10001	186	31	material	material	NOUN
ap-10001	186	32	.	.	PUNCT
ap-10001	187	1	additionally	additionally	ADV
ap-10001	187	2	,	,	PUNCT
ap-10001	187	3	a	a	DET
ap-10001	187	4	blue	blue	ADJ
ap-10001	187	5	shift	shift	NOUN
ap-10001	187	6	was	be	AUX
ap-10001	187	7	observed	observe	VERB
ap-10001	187	8	.	.	PUNCT
ap-10001	188	1	figure	figure	NOUN
ap-10001	188	2	6	6	NUM
ap-10001	188	3	shows	show	VERB
ap-10001	188	4	a	a	DET
ap-10001	188	5	three	three	NUM
ap-10001	188	6	-	-	PUNCT
ap-10001	188	7	dimensional	dimensional	ADJ
ap-10001	188	8	graph	graph	NOUN
ap-10001	188	9	of	of	ADP
ap-10001	188	10	the	the	DET
ap-10001	188	11	absorption	absorption	NOUN
ap-10001	188	12	peak	peak	NOUN
ap-10001	188	13	at	at	ADP
ap-10001	188	14	1–5	1–5	PROPN
ap-10001	188	15	prr	prr	NOUN
ap-10001	188	16	.	.	PUNCT
ap-10001	189	1	the	the	DET
ap-10001	189	2	max	max	PROPN
ap-10001	189	3	.	.	PROPN
ap-10001	190	1	and	and	CCONJ
ap-10001	190	2	min	min	PROPN
ap-10001	190	3	.	.	PROPN
ap-10001	190	4	absorption	absorption	NOUN
ap-10001	190	5	peaks	peak	NOUN
ap-10001	190	6	were	be	AUX
ap-10001	190	7	0.389	0.389	NUM
ap-10001	190	8	and	and	CCONJ
ap-10001	190	9	0.038	0.038	NUM
ap-10001	190	10	,	,	PUNCT
ap-10001	190	11	respectively	respectively	ADV
ap-10001	190	12	.	.	PUNCT
ap-10001	191	1	an	an	DET
ap-10001	191	2	increase	increase	NOUN
ap-10001	191	3	in	in	ADP
ap-10001	191	4	the	the	DET
ap-10001	191	5	number	number	NOUN
ap-10001	191	6	of	of	ADP
ap-10001	191	7	laser	laser	NOUN
ap-10001	191	8	pulses	pulse	NOUN
ap-10001	191	9	leads	lead	VERB
ap-10001	191	10	to	to	ADP
ap-10001	191	11	a	a	DET
ap-10001	191	12	higher	high	ADJ
ap-10001	191	13	concentration	concentration	NOUN
ap-10001	191	14	of	of	ADP
ap-10001	191	15	silicon	silicon	NOUN
ap-10001	191	16	nanoparticles	nanoparticle	NOUN
ap-10001	191	17	in	in	ADP
ap-10001	191	18	the	the	DET
ap-10001	191	19	suspension	suspension	NOUN
ap-10001	191	20	,	,	PUNCT
ap-10001	191	21	as	as	SCONJ
ap-10001	191	22	repeated	repeat	VERB
ap-10001	191	23	irradiation	irradiation	NOUN
ap-10001	191	24	enhances	enhance	VERB
ap-10001	191	25	the	the	DET
ap-10001	191	26	ablation	ablation	NOUN
ap-10001	191	27	rate	rate	NOUN
ap-10001	191	28	and	and	CCONJ
ap-10001	191	29	cumulative	cumulative	ADJ
ap-10001	191	30	material	material	NOUN
ap-10001	191	31	removal	removal	NOUN
ap-10001	191	32	.	.	PUNCT
ap-10001	192	1	this	this	DET
ap-10001	192	2	elevated	elevated	ADJ
ap-10001	192	3	nanoparticle	nanoparticle	NOUN
ap-10001	192	4	concentration	concentration	NOUN
ap-10001	192	5	contributes	contribute	VERB
ap-10001	192	6	to	to	ADP
ap-10001	192	7	stronger	strong	ADJ
ap-10001	192	8	op411	op411	PROPN
ap-10001	192	9	m.	m.	NOUN
ap-10001	192	10	j.	j.	PROPN
ap-10001	192	11	mahmoud	mahmoud	PROPN
ap-10001	192	12	,	,	PUNCT
ap-10001	192	13	b.	b.	PROPN
ap-10001	192	14	g.	g.	PROPN
ap-10001	192	15	rasheed	rasheed	PROPN
ap-10001	192	16	,	,	PUNCT
ap-10001	192	17	m.	m.	NOUN
ap-10001	192	18	m.	m.	PROPN
ap-10001	192	19	hanon	hanon	PROPN
ap-10001	192	20	acta	acta	PROPN
ap-10001	192	21	polytechnica	polytechnica	PROPN
ap-10001	192	22	run	run	NOUN
ap-10001	193	1	input	input	NOUN
ap-10001	193	2	parameters	parameter	NOUN
ap-10001	193	3	output	output	NOUN
ap-10001	193	4	parameters	parameter	NOUN
ap-10001	193	5	a	a	DET
ap-10001	193	6	:	:	PUNCT
ap-10001	193	7	energy	energy	NOUN
ap-10001	194	1	[	[	X
ap-10001	194	2	mj	mj	X
ap-10001	194	3	]	]	X
ap-10001	194	4	b	b	NOUN
ap-10001	194	5	:	:	PUNCT
ap-10001	194	6	no	no	INTJ
ap-10001	194	7	.	.	NOUN
ap-10001	194	8	of	of	ADP
ap-10001	194	9	pulses	pulse	NOUN
ap-10001	194	10	c	c	X
ap-10001	194	11	:	:	PUNCT
ap-10001	194	12	prr	prr	PROPN
ap-10001	194	13	[	[	X
ap-10001	194	14	hz	hz	X
ap-10001	194	15	]	]	X
ap-10001	194	16	wavelength	wavelength	NOUN
ap-10001	195	1	[	[	X
ap-10001	195	2	nm	nm	NOUN
ap-10001	195	3	]	]	X
ap-10001	195	4	absorbance	absorbance	NOUN
ap-10001	195	5	1	1	NUM
ap-10001	195	6	500	500	NUM
ap-10001	195	7	50	50	NUM
ap-10001	195	8	5	5	NUM
ap-10001	195	9	332	332	NUM
ap-10001	195	10	0.237	0.237	NUM
ap-10001	195	11	2	2	NUM
ap-10001	195	12	300	300	NUM
ap-10001	195	13	50	50	NUM
ap-10001	195	14	3	3	NUM
ap-10001	195	15	364	364	NUM
ap-10001	195	16	0.151	0.151	NUM
ap-10001	195	17	3	3	NUM
ap-10001	195	18	100	100	NUM
ap-10001	195	19	50	50	NUM
ap-10001	195	20	5	5	NUM
ap-10001	195	21	381	381	NUM
ap-10001	195	22	0.091	0.091	NUM
ap-10001	195	23	4	4	NUM
ap-10001	195	24	500	500	NUM
ap-10001	195	25	90	90	NUM
ap-10001	195	26	3	3	NUM
ap-10001	195	27	331	331	NUM
ap-10001	195	28	0.389	0.389	NUM
ap-10001	195	29	5	5	NUM
ap-10001	195	30	300	300	NUM
ap-10001	195	31	50	50	NUM
ap-10001	195	32	3	3	NUM
ap-10001	195	33	365	365	NUM
ap-10001	195	34	0.156	0.156	NUM
ap-10001	195	35	6	6	NUM
ap-10001	195	36	100	100	NUM
ap-10001	195	37	50	50	NUM
ap-10001	195	38	1	1	NUM
ap-10001	195	39	396	396	NUM
ap-10001	195	40	0.089	0.089	NUM
ap-10001	195	41	7	7	NUM
ap-10001	195	42	300	300	NUM
ap-10001	195	43	10	10	NUM
ap-10001	195	44	5	5	NUM
ap-10001	195	45	388	388	NUM
ap-10001	195	46	0.164	0.164	NUM
ap-10001	195	47	8	8	NUM
ap-10001	195	48	300	300	NUM
ap-10001	195	49	50	50	NUM
ap-10001	195	50	3	3	NUM
ap-10001	195	51	365	365	NUM
ap-10001	195	52	0.156	0.156	NUM
ap-10001	195	53	9	9	NUM
ap-10001	195	54	300	300	NUM
ap-10001	195	55	10	10	NUM
ap-10001	195	56	1	1	NUM
ap-10001	195	57	376	376	NUM
ap-10001	195	58	0.038	0.038	NUM
ap-10001	195	59	10	10	NUM
ap-10001	195	60	300	300	NUM
ap-10001	195	61	50	50	NUM
ap-10001	195	62	3	3	NUM
ap-10001	195	63	367	367	NUM
ap-10001	195	64	0.160	0.160	NUM
ap-10001	195	65	11	11	NUM
ap-10001	195	66	300	300	NUM
ap-10001	195	67	90	90	NUM
ap-10001	195	68	5	5	NUM
ap-10001	195	69	342	342	NUM
ap-10001	195	70	0.312	0.312	NUM
ap-10001	195	71	12	12	NUM
ap-10001	195	72	100	100	NUM
ap-10001	195	73	90	90	NUM
ap-10001	195	74	3	3	NUM
ap-10001	195	75	356	356	NUM
ap-10001	195	76	0.221	0.221	NUM
ap-10001	195	77	13	13	NUM
ap-10001	195	78	500	500	NUM
ap-10001	195	79	10	10	NUM
ap-10001	195	80	3	3	NUM
ap-10001	195	81	327	327	NUM
ap-10001	195	82	0.056	0.056	NUM
ap-10001	195	83	14	14	NUM
ap-10001	195	84	500	500	NUM
ap-10001	195	85	50	50	NUM
ap-10001	195	86	1	1	NUM
ap-10001	195	87	346	346	NUM
ap-10001	195	88	0.226	0.226	NUM
ap-10001	195	89	15	15	NUM
ap-10001	195	90	100	100	NUM
ap-10001	195	91	10	10	NUM
ap-10001	195	92	3	3	NUM
ap-10001	195	93	376	376	NUM
ap-10001	195	94	0.039	0.039	NUM
ap-10001	195	95	16	16	NUM
ap-10001	195	96	300	300	NUM
ap-10001	195	97	50	50	NUM
ap-10001	195	98	3	3	NUM
ap-10001	195	99	367	367	NUM
ap-10001	195	100	0.152	0.152	NUM
ap-10001	195	101	17	17	NUM
ap-10001	195	102	300	300	NUM
ap-10001	195	103	90	90	NUM
ap-10001	195	104	1	1	NUM
ap-10001	195	105	362	362	NUM
ap-10001	195	106	0.291	0.291	NUM
ap-10001	195	107	table	table	NOUN
ap-10001	195	108	4	4	NUM
ap-10001	195	109	.	.	PUNCT
ap-10001	195	110	effects	effect	NOUN
ap-10001	195	111	of	of	ADP
ap-10001	195	112	laser	laser	NOUN
ap-10001	195	113	energy	energy	NOUN
ap-10001	195	114	,	,	PUNCT
ap-10001	195	115	the	the	DET
ap-10001	195	116	number	number	NOUN
ap-10001	195	117	of	of	ADP
ap-10001	195	118	pulses	pulse	NOUN
ap-10001	195	119	,	,	PUNCT
ap-10001	195	120	and	and	CCONJ
ap-10001	195	121	(	(	PUNCT
ap-10001	195	122	ppr	ppr	NOUN
ap-10001	195	123	)	)	PUNCT
ap-10001	195	124	on	on	ADP
ap-10001	195	125	the	the	DET
ap-10001	195	126	peak	peak	NOUN
ap-10001	195	127	wavelength	wavelength	NOUN
ap-10001	195	128	and	and	CCONJ
ap-10001	195	129	absorption	absorption	NOUN
ap-10001	195	130	as	as	SCONJ
ap-10001	195	131	determined	determine	VERB
ap-10001	195	132	by	by	ADP
ap-10001	195	133	the	the	DET
ap-10001	195	134	doe	doe	NOUN
ap-10001	195	135	software	software	NOUN
ap-10001	195	136	.	.	PUNCT
ap-10001	196	1	run	run	VERB
ap-10001	196	2	input	input	NOUN
ap-10001	196	3	parameters	parameter	NOUN
ap-10001	197	1	output	output	VERB
ap-10001	197	2	parameter	parameter	NOUN
ap-10001	197	3	a	a	DET
ap-10001	197	4	:	:	PUNCT
ap-10001	197	5	time	time	NOUN
ap-10001	197	6	[	[	X
ap-10001	197	7	month	month	NOUN
ap-10001	197	8	]	]	X
ap-10001	197	9	b	b	X
ap-10001	197	10	:	:	PUNCT
ap-10001	197	11	energy	energy	NOUN
ap-10001	198	1	[	[	X
ap-10001	198	2	mj	mj	X
ap-10001	198	3	]	]	X
ap-10001	198	4	c	c	NOUN
ap-10001	198	5	:	:	PUNCT
ap-10001	198	6	no	no	INTJ
ap-10001	198	7	.	.	NOUN
ap-10001	198	8	of	of	ADP
ap-10001	198	9	pulses	pulse	NOUN
ap-10001	198	10	zeta	zeta	NOUN
ap-10001	198	11	potential	potential	NOUN
ap-10001	199	1	[	[	X
ap-10001	199	2	mv	mv	X
ap-10001	199	3	]	]	X
ap-10001	199	4	1	1	NUM
ap-10001	199	5	2	2	NUM
ap-10001	199	6	300	300	NUM
ap-10001	199	7	500	500	NUM
ap-10001	199	8	19.08	19.08	NUM
ap-10001	199	9	2	2	NUM
ap-10001	199	10	2	2	NUM
ap-10001	199	11	100	100	NUM
ap-10001	199	12	100	100	NUM
ap-10001	199	13	31.43	31.43	NUM
ap-10001	199	14	3	3	NUM
ap-10001	199	15	1	1	NUM
ap-10001	199	16	200	200	NUM
ap-10001	199	17	500	500	NUM
ap-10001	199	18	27.21	27.21	NUM
ap-10001	199	19	4	4	NUM
ap-10001	199	20	2	2	NUM
ap-10001	199	21	200	200	NUM
ap-10001	199	22	300	300	NUM
ap-10001	199	23	25.65	25.65	NUM
ap-10001	199	24	5	5	NUM
ap-10001	199	25	1	1	NUM
ap-10001	199	26	200	200	NUM
ap-10001	199	27	100	100	NUM
ap-10001	199	28	32.72	32.72	NUM
ap-10001	199	29	6	6	NUM
ap-10001	199	30	3	3	NUM
ap-10001	199	31	300	300	NUM
ap-10001	199	32	300	300	NUM
ap-10001	199	33	20.45	20.45	NUM
ap-10001	199	34	7	7	NUM
ap-10001	199	35	1	1	NUM
ap-10001	199	36	300	300	NUM
ap-10001	199	37	300	300	NUM
ap-10001	199	38	27.76	27.76	NUM
ap-10001	199	39	8	8	NUM
ap-10001	199	40	2	2	NUM
ap-10001	199	41	300	300	NUM
ap-10001	199	42	100	100	NUM
ap-10001	199	43	24.29	24.29	NUM
ap-10001	199	44	9	9	NUM
ap-10001	199	45	3	3	NUM
ap-10001	199	46	100	100	NUM
ap-10001	199	47	300	300	NUM
ap-10001	199	48	22.6	22.6	NUM
ap-10001	199	49	10	10	NUM
ap-10001	199	50	2	2	NUM
ap-10001	199	51	200	200	NUM
ap-10001	199	52	300	300	NUM
ap-10001	199	53	25.61	25.61	NUM
ap-10001	199	54	11	11	NUM
ap-10001	199	55	2	2	NUM
ap-10001	199	56	200	200	NUM
ap-10001	199	57	300	300	NUM
ap-10001	199	58	25.68	25.68	NUM
ap-10001	199	59	12	12	NUM
ap-10001	199	60	3	3	NUM
ap-10001	199	61	200	200	NUM
ap-10001	199	62	500	500	NUM
ap-10001	199	63	20.09	20.09	NUM
ap-10001	199	64	13	13	NUM
ap-10001	199	65	2	2	NUM
ap-10001	199	66	200	200	NUM
ap-10001	199	67	300	300	NUM
ap-10001	199	68	25.64	25.64	NUM
ap-10001	199	69	14	14	NUM
ap-10001	199	70	1	1	NUM
ap-10001	199	71	100	100	NUM
ap-10001	199	72	300	300	NUM
ap-10001	199	73	32.51	32.51	NUM
ap-10001	199	74	15	15	NUM
ap-10001	199	75	3	3	NUM
ap-10001	199	76	200	200	NUM
ap-10001	199	77	100	100	NUM
ap-10001	199	78	24.03	24.03	NUM
ap-10001	199	79	16	16	NUM
ap-10001	199	80	2	2	NUM
ap-10001	199	81	200	200	NUM
ap-10001	199	82	300	300	NUM
ap-10001	199	83	25.62	25.62	NUM
ap-10001	199	84	17	17	NUM
ap-10001	199	85	2	2	NUM
ap-10001	199	86	100	100	NUM
ap-10001	199	87	500	500	NUM
ap-10001	199	88	25.6	25.6	NUM
ap-10001	199	89	table	table	NOUN
ap-10001	199	90	5	5	NUM
ap-10001	199	91	.	.	PUNCT
ap-10001	199	92	effects	effect	NOUN
ap-10001	199	93	of	of	ADP
ap-10001	199	94	aging	age	VERB
ap-10001	199	95	time	time	NOUN
ap-10001	199	96	,	,	PUNCT
ap-10001	199	97	laser	laser	NOUN
ap-10001	199	98	energy	energy	NOUN
ap-10001	199	99	,	,	PUNCT
ap-10001	199	100	and	and	CCONJ
ap-10001	199	101	the	the	DET
ap-10001	199	102	number	number	NOUN
ap-10001	199	103	of	of	ADP
ap-10001	199	104	pulses	pulse	NOUN
ap-10001	199	105	on	on	ADP
ap-10001	199	106	the	the	DET
ap-10001	199	107	stability	stability	NOUN
ap-10001	199	108	as	as	SCONJ
ap-10001	199	109	determined	determine	VERB
ap-10001	199	110	by	by	ADP
ap-10001	199	111	the	the	DET
ap-10001	199	112	doe	doe	NOUN
ap-10001	199	113	software	software	NOUN
ap-10001	199	114	.	.	PUNCT
ap-10001	200	1	tical	tical	ADJ
ap-10001	200	2	absorption	absorption	NOUN
ap-10001	200	3	within	within	ADP
ap-10001	200	4	the	the	DET
ap-10001	200	5	medium	medium	NOUN
ap-10001	200	6	,	,	PUNCT
ap-10001	200	7	due	due	ADP
ap-10001	200	8	to	to	ADP
ap-10001	200	9	increased	increase	VERB
ap-10001	200	10	scattering	scattering	NOUN
ap-10001	200	11	and	and	CCONJ
ap-10001	200	12	interaction	interaction	NOUN
ap-10001	200	13	of	of	ADP
ap-10001	200	14	the	the	DET
ap-10001	200	15	laser	laser	NOUN
ap-10001	200	16	beam	beam	NOUN
ap-10001	200	17	with	with	ADP
ap-10001	200	18	the	the	DET
ap-10001	200	19	suspended	suspend	VERB
ap-10001	200	20	particles	particle	NOUN
ap-10001	200	21	.	.	PUNCT
ap-10001	201	1	the	the	DET
ap-10001	201	2	quadric	quadric	ADJ
ap-10001	201	3	equation	equation	NOUN
ap-10001	201	4	that	that	PRON
ap-10001	201	5	should	should	AUX
ap-10001	201	6	be	be	AUX
ap-10001	201	7	used	use	VERB
ap-10001	201	8	to	to	PART
ap-10001	201	9	evaluate	evaluate	VERB
ap-10001	201	10	the	the	DET
ap-10001	201	11	peak	peak	NOUN
ap-10001	201	12	wavelength	wavelength	NOUN
ap-10001	201	13	(	(	PUNCT
ap-10001	201	14	λ	λ	NOUN
ap-10001	201	15	)	)	PUNCT
ap-10001	201	16	and	and	CCONJ
ap-10001	201	17	absorption	absorption	NOUN
ap-10001	201	18	(	(	PUNCT
ap-10001	201	19	a	a	NOUN
ap-10001	201	20	)	)	PUNCT
ap-10001	201	21	of	of	ADP
ap-10001	201	22	silicon	silicon	NOUN
ap-10001	201	23	nanoparticles	nanoparticle	NOUN
ap-10001	201	24	,	,	PUNCT
ap-10001	201	25	as	as	SCONJ
ap-10001	201	26	shown	show	VERB
ap-10001	201	27	below	below	ADV
ap-10001	201	28	:	:	PUNCT
ap-10001	201	29	λ	λ	X
ap-10001	201	30	=	=	PROPN
ap-10001	201	31	399.117	399.117	NUM
ap-10001	201	32	+	+	NUM
ap-10001	201	33	0.0081e	0.0081e	ADJ
ap-10001	201	34	+	+	CCONJ
ap-10001	201	35	0.2828n	0.2828n	ADJ
ap-10001	201	36	+	+	CCONJ
ap-10001	201	37	(	(	PUNCT
ap-10001	201	38	−11.1875)r	−11.1875)r	PROPN
ap-10001	201	39	+	+	CCONJ
ap-10001	201	40	0.0008e	0.0008e	PROPN
ap-10001	201	41	×	×	NOUN
ap-10001	201	42	n	n	NOUN
ap-10001	201	43	+	+	CCONJ
ap-10001	201	44	0.0006e	0.0006e	PROPN
ap-10001	201	45	×	×	NOUN
ap-10001	201	46	r	r	NOUN
ap-10001	201	47	+	+	CCONJ
ap-10001	201	48	(	(	PUNCT
ap-10001	201	49	−0.1)n	−0.1)n	X
ap-10001	201	50	×	×	NOUN
ap-10001	201	51	r	r	NOUN
ap-10001	201	52	+	+	CCONJ
ap-10001	201	53	(	(	PUNCT
ap-10001	201	54	−0.0003)e2	−0.0003)e2	PROPN
ap-10001	201	55	+	+	CCONJ
ap-10001	201	56	(	(	PUNCT
ap-10001	201	57	−0.0045)n2	−0.0045)n2	ADJ
ap-10001	201	58	+	+	CCONJ
ap-10001	201	59	2.2813r2	2.2813r2	NUM
ap-10001	201	60	,	,	PUNCT
ap-10001	201	61	(	(	PUNCT
ap-10001	201	62	3	3	X
ap-10001	201	63	)	)	PUNCT
ap-10001	201	64	a	a	DET
ap-10001	201	65	=	=	SYM
ap-10001	201	66	−	−	PROPN
ap-10001	201	67	0.0201	0.0201	NUM
ap-10001	201	68	+	+	NUM
ap-10001	201	69	0.0002e	0.0002e	NOUN
ap-10001	201	70	+	+	CCONJ
ap-10001	201	71	0.0005n	0.0005n	X
ap-10001	201	72	+	+	NUM
ap-10001	201	73	0.0024r	0.0024r	NOUN
ap-10001	202	1	+	+	NOUN
ap-10001	202	2	4.7187	4.7187	NUM
ap-10001	202	3	×	×	NOUN
ap-10001	202	4	10−6	10−6	NUM
ap-10001	202	5	×	×	NOUN
ap-10001	202	6	e	e	X
ap-10001	202	7	×	×	NOUN
ap-10001	202	8	n	n	NOUN
ap-10001	202	9	+	+	CCONJ
ap-10001	202	10	5.625	5.625	NUM
ap-10001	202	11	×	×	NOUN
ap-10001	202	12	10−6	10−6	NUM
ap-10001	202	13	×	×	NOUN
ap-10001	202	14	e	e	NOUN
ap-10001	202	15	×	×	NOUN
ap-10001	202	16	r	r	NOUN
ap-10001	202	17	+	+	CCONJ
ap-10001	202	18	(	(	PUNCT
ap-10001	202	19	−0.0003)n	−0.0003)n	NUM
ap-10001	202	20	×	×	NOUN
ap-10001	202	21	r	r	NOUN
ap-10001	202	22	+	+	CCONJ
ap-10001	202	23	(	(	PUNCT
ap-10001	202	24	−2.5312	−2.5312	NUM
ap-10001	202	25	)	)	PUNCT
ap-10001	202	26	×	×	NOUN
ap-10001	202	27	10−7	10−7	NUM
ap-10001	202	28	×	×	NOUN
ap-10001	202	29	e2	e2	PROPN
ap-10001	202	30	+	+	CCONJ
ap-10001	202	31	1.898	1.898	NUM
ap-10001	202	32	×	×	NOUN
ap-10001	202	33	10−5	10−5	NUM
ap-10001	202	34	×	×	NOUN
ap-10001	202	35	n2	n2	NOUN
ap-10001	202	36	+	+	CCONJ
ap-10001	202	37	0.0037r2	0.0037r2	NUM
ap-10001	202	38	,	,	PUNCT
ap-10001	202	39	(	(	PUNCT
ap-10001	202	40	4	4	NUM
ap-10001	202	41	)	)	PUNCT
ap-10001	202	42	where	where	SCONJ
ap-10001	202	43	e	e	NOUN
ap-10001	202	44	is	be	AUX
ap-10001	202	45	the	the	DET
ap-10001	202	46	laser	laser	NOUN
ap-10001	202	47	energy	energy	NOUN
ap-10001	203	1	[	[	X
ap-10001	203	2	j	j	X
ap-10001	203	3	]	]	X
ap-10001	203	4	,	,	PUNCT
ap-10001	203	5	n	n	X
ap-10001	203	6	is	be	AUX
ap-10001	203	7	the	the	DET
ap-10001	203	8	no	no	NOUN
ap-10001	203	9	.	.	PUNCT
ap-10001	203	10	of	of	ADP
ap-10001	203	11	laser	laser	NOUN
ap-10001	203	12	pulses	pulse	NOUN
ap-10001	203	13	,	,	PUNCT
ap-10001	203	14	and	and	CCONJ
ap-10001	203	15	r	r	NOUN
ap-10001	203	16	is	be	AUX
ap-10001	203	17	prr	prr	NOUN
ap-10001	204	1	[	[	X
ap-10001	204	2	hz	hz	X
ap-10001	204	3	]	]	X
ap-10001	204	4	.	.	PUNCT
ap-10001	205	1	the	the	DET
ap-10001	205	2	final	final	ADJ
ap-10001	205	3	regression	regression	NOUN
ap-10001	205	4	equations	equation	NOUN
ap-10001	205	5	were	be	AUX
ap-10001	205	6	also	also	ADV
ap-10001	205	7	an	an	DET
ap-10001	205	8	excellent	excellent	ADJ
ap-10001	205	9	way	way	NOUN
ap-10001	205	10	to	to	PART
ap-10001	205	11	predict	predict	VERB
ap-10001	205	12	and	and	CCONJ
ap-10001	205	13	study	study	VERB
ap-10001	205	14	how	how	SCONJ
ap-10001	205	15	the	the	DET
ap-10001	205	16	parameters	parameter	NOUN
ap-10001	205	17	affect	affect	VERB
ap-10001	205	18	each	each	DET
ap-10001	205	19	other	other	ADJ
ap-10001	205	20	.	.	PUNCT
ap-10001	206	1	412	412	NUM
ap-10001	206	2	vol	vol	NOUN
ap-10001	206	3	.	.	PUNCT
ap-10001	207	1	65	65	NUM
ap-10001	207	2	no	no	NOUN
ap-10001	207	3	.	.	PUNCT
ap-10001	208	1	4/2025	4/2025	NUM
ap-10001	208	2	improving	improve	VERB
ap-10001	208	3	the	the	DET
ap-10001	208	4	production	production	NOUN
ap-10001	208	5	process	process	NOUN
ap-10001	208	6	of	of	ADP
ap-10001	208	7	silicon	silicon	NOUN
ap-10001	208	8	nanoparticle	nanoparticle	NOUN
ap-10001	208	9	.	.	PUNCT
ap-10001	208	10	.	.	PUNCT
ap-10001	208	11	.	.	PUNCT
ap-10001	209	1	(	(	PUNCT
ap-10001	209	2	a	a	X
ap-10001	209	3	)	)	PUNCT
ap-10001	209	4	.	.	PUNCT
ap-10001	210	1	prr	prr	PROPN
ap-10001	210	2	:	:	PUNCT
ap-10001	210	3	1	1	X
ap-10001	210	4	.	.	PUNCT
ap-10001	210	5	(	(	PUNCT
ap-10001	210	6	b	b	NOUN
ap-10001	210	7	)	)	PUNCT
ap-10001	210	8	.	.	PUNCT
ap-10001	211	1	prr	prr	PROPN
ap-10001	211	2	:	:	PUNCT
ap-10001	211	3	3	3	X
ap-10001	211	4	.	.	PUNCT
ap-10001	211	5	(	(	PUNCT
ap-10001	211	6	c	c	NOUN
ap-10001	211	7	)	)	PUNCT
ap-10001	211	8	.	.	PUNCT
ap-10001	212	1	prr	prr	PROPN
ap-10001	212	2	:	:	PUNCT
ap-10001	212	3	5	5	X
ap-10001	212	4	.	.	X
ap-10001	212	5	figure	figure	NOUN
ap-10001	212	6	5	5	NUM
ap-10001	212	7	.	.	PUNCT
ap-10001	213	1	the	the	DET
ap-10001	213	2	wavelength	wavelength	NOUN
ap-10001	213	3	peak	peak	NOUN
ap-10001	213	4	curve	curve	NOUN
ap-10001	213	5	for	for	ADP
ap-10001	213	6	no	no	NOUN
ap-10001	213	7	.	.	NOUN
ap-10001	213	8	of	of	ADP
ap-10001	213	9	pulses	pulse	NOUN
ap-10001	213	10	and	and	CCONJ
ap-10001	213	11	energy	energy	NOUN
ap-10001	213	12	at	at	ADP
ap-10001	213	13	prr	prr	PROPN
ap-10001	213	14	:	:	PUNCT
ap-10001	213	15	1	1	NUM
ap-10001	213	16	,	,	PUNCT
ap-10001	213	17	3	3	NUM
ap-10001	213	18	,	,	PUNCT
ap-10001	213	19	and	and	CCONJ
ap-10001	213	20	5	5	NUM
ap-10001	213	21	.	.	PUNCT
ap-10001	214	1	(	(	PUNCT
ap-10001	214	2	a	a	NOUN
ap-10001	214	3	)	)	PUNCT
ap-10001	214	4	.	.	PUNCT
ap-10001	215	1	prr	prr	PROPN
ap-10001	215	2	:	:	PUNCT
ap-10001	215	3	1	1	X
ap-10001	215	4	.	.	PUNCT
ap-10001	215	5	(	(	PUNCT
ap-10001	215	6	b	b	NOUN
ap-10001	215	7	)	)	PUNCT
ap-10001	215	8	.	.	PUNCT
ap-10001	216	1	prr	prr	PROPN
ap-10001	216	2	:	:	PUNCT
ap-10001	216	3	3	3	X
ap-10001	216	4	.	.	PUNCT
ap-10001	216	5	(	(	PUNCT
ap-10001	216	6	c	c	NOUN
ap-10001	216	7	)	)	PUNCT
ap-10001	216	8	.	.	PUNCT
ap-10001	217	1	prr	prr	PROPN
ap-10001	217	2	:	:	PUNCT
ap-10001	217	3	5	5	X
ap-10001	217	4	.	.	X
ap-10001	217	5	figure	figure	NOUN
ap-10001	217	6	6	6	NUM
ap-10001	217	7	.	.	PUNCT
ap-10001	218	1	the	the	DET
ap-10001	218	2	absorption	absorption	NOUN
ap-10001	218	3	peak	peak	NOUN
ap-10001	218	4	curve	curve	NOUN
ap-10001	218	5	for	for	ADP
ap-10001	218	6	energy	energy	NOUN
ap-10001	218	7	and	and	CCONJ
ap-10001	218	8	no	no	NOUN
ap-10001	218	9	.	.	NOUN
ap-10001	218	10	of	of	ADP
ap-10001	218	11	pulses	pulse	NOUN
ap-10001	218	12	at	at	ADP
ap-10001	218	13	prr	prr	PROPN
ap-10001	218	14	:	:	PUNCT
ap-10001	218	15	1	1	NUM
ap-10001	218	16	,	,	PUNCT
ap-10001	218	17	3	3	NUM
ap-10001	218	18	,	,	PUNCT
ap-10001	218	19	and	and	CCONJ
ap-10001	218	20	5	5	NUM
ap-10001	218	21	.	.	X
ap-10001	218	22	413	413	NUM
ap-10001	218	23	m.	m.	NOUN
ap-10001	218	24	j.	j.	PROPN
ap-10001	218	25	mahmoud	mahmoud	PROPN
ap-10001	218	26	,	,	PUNCT
ap-10001	218	27	b.	b.	PROPN
ap-10001	218	28	g.	g.	PROPN
ap-10001	218	29	rasheed	rasheed	PROPN
ap-10001	218	30	,	,	PUNCT
ap-10001	218	31	m.	m.	NOUN
ap-10001	218	32	m.	m.	PROPN
ap-10001	218	33	hanon	hanon	PROPN
ap-10001	218	34	acta	acta	PROPN
ap-10001	218	35	polytechnica	polytechnica	PROPN
ap-10001	218	36	the	the	DET
ap-10001	218	37	optimum	optimum	ADJ
ap-10001	218	38	values	value	NOUN
ap-10001	218	39	of	of	ADP
ap-10001	218	40	the	the	DET
ap-10001	218	41	output	output	NOUN
ap-10001	218	42	parameters	parameter	NOUN
ap-10001	218	43	for	for	ADP
ap-10001	218	44	table	table	NOUN
ap-10001	218	45	4	4	NUM
ap-10001	218	46	are	be	AUX
ap-10001	218	47	shown	show	VERB
ap-10001	218	48	in	in	ADP
ap-10001	218	49	figure	figure	NOUN
ap-10001	218	50	7	7	NUM
ap-10001	218	51	.	.	PUNCT
ap-10001	218	52	figure	figure	NOUN
ap-10001	218	53	7	7	NUM
ap-10001	218	54	illustrates	illustrate	VERB
ap-10001	218	55	the	the	DET
ap-10001	218	56	optimal	optimal	ADJ
ap-10001	218	57	values	value	NOUN
ap-10001	218	58	of	of	ADP
ap-10001	218	59	the	the	DET
ap-10001	218	60	output	output	NOUN
ap-10001	218	61	response	response	NOUN
ap-10001	218	62	for	for	ADP
ap-10001	218	63	si	si	PROPN
ap-10001	218	64	nps	nps	PROPN
ap-10001	218	65	.	.	PUNCT
ap-10001	219	1	when	when	SCONJ
ap-10001	219	2	using	use	VERB
ap-10001	219	3	the	the	DET
ap-10001	219	4	nd	nd	NOUN
ap-10001	219	5	:	:	PUNCT
ap-10001	219	6	yag	yag	NOUN
ap-10001	219	7	laser	laser	NOUN
ap-10001	219	8	,	,	PUNCT
ap-10001	219	9	it	it	PRON
ap-10001	219	10	was	be	AUX
ap-10001	219	11	observed	observe	VERB
ap-10001	219	12	that	that	SCONJ
ap-10001	219	13	the	the	DET
ap-10001	219	14	optimal	optimal	ADJ
ap-10001	219	15	wavelength	wavelength	NOUN
ap-10001	219	16	for	for	ADP
ap-10001	219	17	peak	peak	NOUN
ap-10001	219	18	absorption	absorption	NOUN
ap-10001	219	19	was	be	AUX
ap-10001	219	20	318.5	318.5	NUM
ap-10001	219	21	nm	nm	NOUN
ap-10001	219	22	,	,	PUNCT
ap-10001	219	23	with	with	ADP
ap-10001	219	24	a	a	DET
ap-10001	219	25	corresponding	correspond	VERB
ap-10001	219	26	absorption	absorption	NOUN
ap-10001	219	27	value	value	NOUN
ap-10001	219	28	of	of	ADP
ap-10001	219	29	0.389	0.389	NUM
ap-10001	219	30	.	.	PUNCT
ap-10001	220	1	the	the	DET
ap-10001	220	2	stability	stability	NOUN
ap-10001	220	3	of	of	ADP
ap-10001	220	4	silicon	silicon	NOUN
ap-10001	220	5	nanoparticles	nanoparticle	NOUN
ap-10001	220	6	was	be	AUX
ap-10001	220	7	examined	examine	VERB
ap-10001	220	8	using	use	VERB
ap-10001	220	9	a	a	DET
ap-10001	220	10	separate	separate	ADJ
ap-10001	220	11	software	software	NOUN
ap-10001	220	12	package	package	NOUN
ap-10001	220	13	,	,	PUNCT
ap-10001	220	14	as	as	SCONJ
ap-10001	220	15	stability	stability	NOUN
ap-10001	220	16	analysis	analysis	NOUN
ap-10001	220	17	requires	require	VERB
ap-10001	220	18	different	different	ADJ
ap-10001	220	19	computational	computational	ADJ
ap-10001	220	20	methods	method	NOUN
ap-10001	220	21	compared	compare	VERB
ap-10001	220	22	to	to	ADP
ap-10001	220	23	wavelength	wavelength	NOUN
ap-10001	220	24	and	and	CCONJ
ap-10001	220	25	absorption	absorption	NOUN
ap-10001	220	26	measurements	measurement	NOUN
ap-10001	220	27	.	.	PUNCT
ap-10001	221	1	table	table	NOUN
ap-10001	221	2	5	5	NUM
ap-10001	221	3	presents	present	VERB
ap-10001	221	4	the	the	DET
ap-10001	221	5	stability	stability	NOUN
ap-10001	221	6	analysis	analysis	NOUN
ap-10001	221	7	of	of	ADP
ap-10001	221	8	silicon	silicon	NOUN
ap-10001	221	9	nanoparticles	nanoparticle	NOUN
ap-10001	221	10	,	,	PUNCT
ap-10001	221	11	where	where	SCONJ
ap-10001	221	12	the	the	DET
ap-10001	221	13	input	input	NOUN
ap-10001	221	14	parameters	parameter	NOUN
ap-10001	221	15	include	include	VERB
ap-10001	221	16	aging	age	VERB
ap-10001	221	17	time	time	NOUN
ap-10001	221	18	,	,	PUNCT
ap-10001	221	19	laser	laser	NOUN
ap-10001	221	20	energy	energy	NOUN
ap-10001	221	21	,	,	PUNCT
ap-10001	221	22	and	and	CCONJ
ap-10001	221	23	the	the	DET
ap-10001	221	24	number	number	NOUN
ap-10001	221	25	of	of	ADP
ap-10001	221	26	pulses	pulse	NOUN
ap-10001	221	27	.	.	PUNCT
ap-10001	222	1	each	each	DET
ap-10001	222	2	output	output	NOUN
ap-10001	222	3	parameter	parameter	NOUN
ap-10001	222	4	is	be	AUX
ap-10001	222	5	influenced	influence	VERB
ap-10001	222	6	by	by	ADP
ap-10001	222	7	different	different	ADJ
ap-10001	222	8	input	input	NOUN
ap-10001	222	9	parameters	parameter	NOUN
ap-10001	222	10	,	,	PUNCT
ap-10001	222	11	ensuring	ensure	VERB
ap-10001	222	12	a	a	DET
ap-10001	222	13	comprehensive	comprehensive	ADJ
ap-10001	222	14	evaluation	evaluation	NOUN
ap-10001	222	15	of	of	ADP
ap-10001	222	16	stability	stability	NOUN
ap-10001	222	17	under	under	ADP
ap-10001	222	18	varying	vary	VERB
ap-10001	222	19	conditions	condition	NOUN
ap-10001	222	20	.	.	PUNCT
ap-10001	223	1	the	the	DET
ap-10001	223	2	lower	low	ADJ
ap-10001	223	3	and	and	CCONJ
ap-10001	223	4	upper	upper	ADJ
ap-10001	223	5	aging	age	VERB
ap-10001	223	6	time	time	NOUN
ap-10001	223	7	values	value	NOUN
ap-10001	223	8	are	be	AUX
ap-10001	223	9	1	1	NUM
ap-10001	223	10	and	and	CCONJ
ap-10001	223	11	3	3	NUM
ap-10001	223	12	months	month	NOUN
ap-10001	223	13	,	,	PUNCT
ap-10001	223	14	respectively	respectively	ADV
ap-10001	223	15	.	.	PUNCT
ap-10001	224	1	the	the	DET
ap-10001	224	2	lower	low	ADJ
ap-10001	224	3	and	and	CCONJ
ap-10001	224	4	upper	upper	ADJ
ap-10001	224	5	values	value	NOUN
ap-10001	224	6	of	of	ADP
ap-10001	224	7	the	the	DET
ap-10001	224	8	laser	laser	NOUN
ap-10001	224	9	energy	energy	NOUN
ap-10001	224	10	are	be	AUX
ap-10001	224	11	100	100	NUM
ap-10001	224	12	and	and	CCONJ
ap-10001	224	13	300	300	NUM
ap-10001	224	14	mj	mj	NOUN
ap-10001	224	15	,	,	PUNCT
ap-10001	224	16	respectively	respectively	ADV
ap-10001	224	17	.	.	PUNCT
ap-10001	225	1	the	the	DET
ap-10001	225	2	lower	low	ADJ
ap-10001	225	3	and	and	CCONJ
ap-10001	225	4	upper	upper	ADJ
ap-10001	225	5	number	number	NOUN
ap-10001	225	6	of	of	ADP
ap-10001	225	7	laser	laser	NOUN
ap-10001	225	8	pulse	pulse	NOUN
ap-10001	225	9	values	value	NOUN
ap-10001	225	10	are	be	AUX
ap-10001	225	11	100	100	NUM
ap-10001	225	12	and	and	CCONJ
ap-10001	225	13	500	500	NUM
ap-10001	225	14	pulses	pulse	NOUN
ap-10001	225	15	,	,	PUNCT
ap-10001	225	16	respectively	respectively	ADV
ap-10001	225	17	.	.	PUNCT
ap-10001	226	1	moreover	moreover	ADV
ap-10001	226	2	,	,	PUNCT
ap-10001	226	3	the	the	DET
ap-10001	226	4	output	output	NOUN
ap-10001	226	5	parameter	parameter	NOUN
ap-10001	226	6	is	be	AUX
ap-10001	226	7	the	the	DET
ap-10001	226	8	stability	stability	NOUN
ap-10001	226	9	of	of	ADP
ap-10001	226	10	si	si	PROPN
ap-10001	226	11	nps	nps	PROPN
ap-10001	226	12	.	.	PUNCT
ap-10001	227	1	a	a	DET
ap-10001	227	2	graphical	graphical	ADJ
ap-10001	227	3	representation	representation	NOUN
ap-10001	227	4	of	of	ADP
ap-10001	227	5	table	table	NOUN
ap-10001	227	6	4	4	NUM
ap-10001	227	7	is	be	AUX
ap-10001	227	8	shown	show	VERB
ap-10001	227	9	in	in	ADP
ap-10001	227	10	figure	figure	NOUN
ap-10001	227	11	8	8	NUM
ap-10001	227	12	.	.	PUNCT
ap-10001	228	1	figure	figure	NOUN
ap-10001	228	2	8	8	NUM
ap-10001	228	3	shows	show	VERB
ap-10001	228	4	a	a	DET
ap-10001	228	5	three	three	NUM
ap-10001	228	6	-	-	PUNCT
ap-10001	228	7	dimensional	dimensional	ADJ
ap-10001	228	8	graph	graph	NOUN
ap-10001	228	9	of	of	ADP
ap-10001	228	10	the	the	DET
ap-10001	228	11	high	high	ADJ
ap-10001	228	12	stability	stability	NOUN
ap-10001	228	13	at	at	ADP
ap-10001	228	14	100–300	100–300	NUM
ap-10001	228	15	pulses	pulse	NOUN
ap-10001	228	16	.	.	PUNCT
ap-10001	229	1	the	the	DET
ap-10001	229	2	max	max	PROPN
ap-10001	229	3	.	.	PROPN
ap-10001	229	4	and	and	CCONJ
ap-10001	229	5	min	min	PROPN
ap-10001	229	6	.	.	PROPN
ap-10001	229	7	stability	stability	NOUN
ap-10001	229	8	values	value	NOUN
ap-10001	229	9	were	be	AUX
ap-10001	229	10	31.43	31.43	NUM
ap-10001	229	11	and	and	CCONJ
ap-10001	229	12	19.08	19.08	NUM
ap-10001	229	13	mv	mv	NOUN
ap-10001	229	14	,	,	PUNCT
ap-10001	229	15	respectively	respectively	ADV
ap-10001	229	16	.	.	PUNCT
ap-10001	230	1	large	large	ADJ
ap-10001	230	2	silicon	silicon	NOUN
ap-10001	230	3	nanoparticles	nanoparticle	NOUN
ap-10001	230	4	were	be	AUX
ap-10001	230	5	formed	form	VERB
ap-10001	230	6	due	due	ADP
ap-10001	230	7	to	to	ADP
ap-10001	230	8	the	the	DET
ap-10001	230	9	aggregation	aggregation	NOUN
ap-10001	230	10	effect	effect	NOUN
ap-10001	230	11	when	when	SCONJ
ap-10001	230	12	the	the	DET
ap-10001	230	13	laser	laser	NOUN
ap-10001	230	14	energy	energy	NOUN
ap-10001	230	15	was	be	AUX
ap-10001	230	16	high	high	ADJ
ap-10001	230	17	with	with	ADP
ap-10001	230	18	a	a	DET
ap-10001	230	19	low	low	ADJ
ap-10001	230	20	laser	laser	NOUN
ap-10001	230	21	pulse	pulse	NOUN
ap-10001	230	22	number	number	NOUN
ap-10001	230	23	.	.	PUNCT
ap-10001	231	1	the	the	DET
ap-10001	231	2	stability	stability	NOUN
ap-10001	231	3	value	value	NOUN
ap-10001	231	4	decreased	decrease	VERB
ap-10001	231	5	when	when	SCONJ
ap-10001	231	6	the	the	DET
ap-10001	231	7	laser	laser	NOUN
ap-10001	231	8	energy	energy	NOUN
ap-10001	231	9	increased	increase	VERB
ap-10001	231	10	.	.	PUNCT
ap-10001	232	1	equation	equation	NOUN
ap-10001	232	2	(	(	PUNCT
ap-10001	232	3	5	5	NUM
ap-10001	232	4	)	)	PUNCT
ap-10001	232	5	is	be	AUX
ap-10001	232	6	the	the	DET
ap-10001	232	7	quadratic	quadratic	ADJ
ap-10001	232	8	equation	equation	NOUN
ap-10001	232	9	that	that	PRON
ap-10001	232	10	should	should	AUX
ap-10001	232	11	be	be	AUX
ap-10001	232	12	used	use	VERB
ap-10001	232	13	to	to	PART
ap-10001	232	14	evaluate	evaluate	VERB
ap-10001	232	15	stability	stability	NOUN
ap-10001	232	16	:	:	PUNCT
ap-10001	232	17	z	z	NOUN
ap-10001	232	18	=	=	SYM
ap-10001	232	19	47.5541	47.5541	NUM
ap-10001	233	1	+	+	CCONJ
ap-10001	233	2	(	(	PUNCT
ap-10001	233	3	−8.2525)t	−8.2525)t	X
ap-10001	233	4	+	+	CCONJ
ap-10001	233	5	(	(	PUNCT
ap-10001	233	6	−0.02702)e	−0.02702)e	PUNCT
ap-10001	233	7	+	+	X
ap-10001	233	8	(	(	PUNCT
ap-10001	233	9	−0.01572)n	−0.01572)n	NUM
ap-10001	234	1	+	+	X
ap-10001	234	2	0.0065	0.0065	NUM
ap-10001	234	3	t	t	NOUN
ap-10001	234	4	×	×	NOUN
ap-10001	234	5	e	e	NOUN
ap-10001	234	6	+	+	NOUN
ap-10001	234	7	0.0019625	0.0019625	NUM
ap-10001	234	8	t	t	NOUN
ap-10001	234	9	×	×	NOUN
ap-10001	234	10	n	n	NOUN
ap-10001	234	11	+	+	CCONJ
ap-10001	234	12	7.5	7.5	NUM
ap-10001	234	13	×	×	NOUN
ap-10001	234	14	10−6	10−6	NUM
ap-10001	234	15	×	×	NOUN
ap-10001	234	16	e	e	X
ap-10001	234	17	×	×	NOUN
ap-10001	234	18	n	n	NOUN
ap-10001	234	19	+	+	NOUN
ap-10001	234	20	0.5588	0.5588	NUM
ap-10001	234	21	t	t	NOUN
ap-10001	234	22	2	2	NUM
ap-10001	234	23	+	+	CCONJ
ap-10001	234	24	(	(	PUNCT
ap-10001	234	25	−3.4875	−3.4875	NUM
ap-10001	234	26	)	)	PUNCT
ap-10001	234	27	×	×	NOUN
ap-10001	234	28	10−5	10−5	NUM
ap-10001	234	29	×	×	PROPN
ap-10001	234	30	e2	e2	PROPN
ap-10001	234	31	+	+	CCONJ
ap-10001	234	32	(	(	PUNCT
ap-10001	234	33	−4.15625	−4.15625	NOUN
ap-10001	234	34	)	)	PUNCT
ap-10001	234	35	×	×	NOUN
ap-10001	234	36	10−6	10−6	NUM
ap-10001	234	37	×	×	NOUN
ap-10001	234	38	n2	n2	NOUN
ap-10001	234	39	,	,	PUNCT
ap-10001	234	40	(	(	PUNCT
ap-10001	234	41	5	5	NUM
ap-10001	234	42	)	)	PUNCT
ap-10001	234	43	where	where	SCONJ
ap-10001	234	44	z	z	NOUN
ap-10001	234	45	is	be	AUX
ap-10001	234	46	the	the	DET
ap-10001	234	47	zeta	zeta	PROPN
ap-10001	234	48	potential	potential	NOUN
ap-10001	235	1	[	[	X
ap-10001	235	2	mv	mv	X
ap-10001	235	3	]	]	X
ap-10001	235	4	,	,	PUNCT
ap-10001	235	5	t	t	PROPN
ap-10001	235	6	is	be	AUX
ap-10001	235	7	the	the	DET
ap-10001	235	8	aging	age	VERB
ap-10001	235	9	time	time	NOUN
ap-10001	235	10	[	[	X
ap-10001	235	11	months	month	NOUN
ap-10001	235	12	]	]	PUNCT
ap-10001	235	13	,	,	PUNCT
ap-10001	235	14	e	e	X
ap-10001	235	15	is	be	AUX
ap-10001	235	16	the	the	DET
ap-10001	235	17	laser	laser	NOUN
ap-10001	235	18	energy	energy	NOUN
ap-10001	236	1	[	[	X
ap-10001	236	2	j	j	X
ap-10001	236	3	]	]	X
ap-10001	236	4	,	,	PUNCT
ap-10001	236	5	and	and	CCONJ
ap-10001	236	6	n	n	PRON
ap-10001	236	7	is	be	AUX
ap-10001	236	8	the	the	DET
ap-10001	236	9	number	number	NOUN
ap-10001	236	10	of	of	ADP
ap-10001	236	11	laser	laser	NOUN
ap-10001	236	12	pulses	pulse	NOUN
ap-10001	236	13	.	.	PUNCT
ap-10001	237	1	the	the	DET
ap-10001	237	2	final	final	ADJ
ap-10001	237	3	regression	regression	NOUN
ap-10001	237	4	equation	equation	NOUN
ap-10001	237	5	was	be	AUX
ap-10001	237	6	also	also	ADV
ap-10001	237	7	an	an	DET
ap-10001	237	8	excellent	excellent	ADJ
ap-10001	237	9	way	way	NOUN
ap-10001	237	10	to	to	PART
ap-10001	237	11	predict	predict	VERB
ap-10001	237	12	and	and	CCONJ
ap-10001	237	13	study	study	VERB
ap-10001	237	14	how	how	SCONJ
ap-10001	237	15	the	the	DET
ap-10001	237	16	parameters	parameter	NOUN
ap-10001	237	17	affect	affect	VERB
ap-10001	237	18	each	each	DET
ap-10001	237	19	other	other	ADJ
ap-10001	237	20	.	.	PUNCT
ap-10001	238	1	the	the	DET
ap-10001	238	2	optimum	optimum	ADJ
ap-10001	238	3	values	value	NOUN
ap-10001	238	4	of	of	ADP
ap-10001	238	5	the	the	DET
ap-10001	238	6	output	output	NOUN
ap-10001	238	7	parameters	parameter	NOUN
ap-10001	238	8	for	for	ADP
ap-10001	238	9	table	table	NOUN
ap-10001	238	10	4	4	NUM
ap-10001	238	11	are	be	AUX
ap-10001	238	12	shown	show	VERB
ap-10001	238	13	in	in	ADP
ap-10001	238	14	figure	figure	NOUN
ap-10001	238	15	9	9	NUM
ap-10001	238	16	.	.	PUNCT
ap-10001	239	1	figure	figure	NOUN
ap-10001	239	2	9	9	NUM
ap-10001	239	3	shows	show	VERB
ap-10001	239	4	the	the	DET
ap-10001	239	5	optimum	optimum	ADJ
ap-10001	239	6	value	value	NOUN
ap-10001	239	7	of	of	ADP
ap-10001	239	8	the	the	DET
ap-10001	239	9	output	output	NOUN
ap-10001	239	10	response	response	NOUN
ap-10001	239	11	(	(	PUNCT
ap-10001	239	12	stability	stability	NOUN
ap-10001	239	13	)	)	PUNCT
ap-10001	239	14	for	for	ADP
ap-10001	239	15	silicon	silicon	NOUN
ap-10001	239	16	nanoparticles	nanoparticle	NOUN
ap-10001	239	17	.	.	PUNCT
ap-10001	240	1	when	when	SCONJ
ap-10001	240	2	nd	nd	NOUN
ap-10001	240	3	:	:	PUNCT
ap-10001	240	4	yag	yag	NOUN
ap-10001	240	5	laser	laser	NOUN
ap-10001	240	6	was	be	AUX
ap-10001	240	7	used	use	VERB
ap-10001	240	8	,	,	PUNCT
ap-10001	240	9	the	the	DET
ap-10001	240	10	optimum	optimum	ADJ
ap-10001	240	11	stability	stability	NOUN
ap-10001	240	12	value	value	NOUN
ap-10001	240	13	was	be	AUX
ap-10001	240	14	33.5	33.5	NUM
ap-10001	240	15	mv	mv	NOUN
ap-10001	240	16	.	.	PROPN
ap-10001	240	17	3.5	3.5	NUM
ap-10001	240	18	.	.	PUNCT
ap-10001	241	1	quartz	quartz	NOUN
ap-10001	241	2	microprocessing	microprocesse	VERB
ap-10001	241	3	3.5.1	3.5.1	NUM
ap-10001	241	4	.	.	PUNCT
ap-10001	241	5	microlens	microlen	VERB
ap-10001	241	6	fabrication	fabrication	NOUN
ap-10001	241	7	the	the	DET
ap-10001	241	8	fabrication	fabrication	NOUN
ap-10001	241	9	of	of	ADP
ap-10001	241	10	quartz	quartz	NOUN
ap-10001	241	11	microlens	microlen	VERB
ap-10001	241	12	can	can	AUX
ap-10001	241	13	be	be	AUX
ap-10001	241	14	accomplished	accomplish	VERB
ap-10001	241	15	by	by	ADP
ap-10001	241	16	two	two	NUM
ap-10001	241	17	subsequent	subsequent	ADJ
ap-10001	241	18	stages	stage	NOUN
ap-10001	241	19	:	:	PUNCT
ap-10001	241	20	material	material	NOUN
ap-10001	241	21	removal	removal	NOUN
ap-10001	241	22	by	by	ADP
ap-10001	241	23	fibre	fibre	NOUN
ap-10001	241	24	laser	laser	NOUN
ap-10001	241	25	and	and	CCONJ
ap-10001	241	26	the	the	DET
ap-10001	241	27	reshaping	reshaping	NOUN
ap-10001	241	28	process	process	NOUN
ap-10001	241	29	by	by	ADP
ap-10001	241	30	co2	co2	NOUN
ap-10001	241	31	laser	laser	NOUN
ap-10001	241	32	.	.	PUNCT
ap-10001	242	1	the	the	DET
ap-10001	242	2	parameters	parameter	NOUN
ap-10001	242	3	used	use	VERB
ap-10001	242	4	in	in	ADP
ap-10001	242	5	the	the	DET
ap-10001	242	6	design	design	NOUN
ap-10001	242	7	expert	expert	NOUN
ap-10001	242	8	software	software	NOUN
ap-10001	242	9	(	(	PUNCT
ap-10001	242	10	a	a	NOUN
ap-10001	242	11	)	)	PUNCT
ap-10001	242	12	.	.	PUNCT
ap-10001	243	1	wavelength	wavelength	NOUN
ap-10001	243	2	peak	peak	NOUN
ap-10001	243	3	.	.	PUNCT
ap-10001	244	1	(	(	PUNCT
ap-10001	244	2	b	b	NOUN
ap-10001	244	3	)	)	PUNCT
ap-10001	244	4	.	.	PUNCT
ap-10001	245	1	absorption	absorption	NOUN
ap-10001	245	2	peak	peak	NOUN
ap-10001	245	3	.	.	PUNCT
ap-10001	246	1	figure	figure	VERB
ap-10001	246	2	7	7	NUM
ap-10001	246	3	.	.	PUNCT
ap-10001	247	1	the	the	DET
ap-10001	247	2	contour	contour	NOUN
ap-10001	247	3	graph	graph	NOUN
ap-10001	247	4	of	of	ADP
ap-10001	247	5	optimum	optimum	ADJ
ap-10001	247	6	value	value	NOUN
ap-10001	247	7	for	for	ADP
ap-10001	247	8	silicon	silicon	PROPN
ap-10001	247	9	nps	nps	PROPN
ap-10001	247	10	.	.	PROPN
ap-10001	248	1	for	for	ADP
ap-10001	248	2	the	the	DET
ap-10001	248	3	experimental	experimental	ADJ
ap-10001	248	4	stage	stage	NOUN
ap-10001	248	5	are	be	AUX
ap-10001	248	6	presented	present	VERB
ap-10001	248	7	in	in	ADP
ap-10001	248	8	table	table	NOUN
ap-10001	248	9	6	6	NUM
ap-10001	248	10	.	.	PUNCT
ap-10001	249	1	in	in	ADP
ap-10001	249	2	this	this	DET
ap-10001	249	3	study	study	NOUN
ap-10001	249	4	,	,	PUNCT
ap-10001	249	5	all	all	DET
ap-10001	249	6	input	input	NOUN
ap-10001	249	7	parameters	parameter	NOUN
ap-10001	249	8	,	,	PUNCT
ap-10001	249	9	including	include	VERB
ap-10001	249	10	power	power	NOUN
ap-10001	249	11	,	,	PUNCT
ap-10001	249	12	speed	speed	NOUN
ap-10001	249	13	,	,	PUNCT
ap-10001	249	14	and	and	CCONJ
ap-10001	249	15	count	count	NOUN
ap-10001	249	16	,	,	PUNCT
ap-10001	249	17	were	be	AUX
ap-10001	249	18	experimentally	experimentally	ADV
ap-10001	249	19	determined	determined	ADJ
ap-10001	249	20	to	to	PART
ap-10001	249	21	analyse	analyse	VERB
ap-10001	249	22	their	their	PRON
ap-10001	249	23	influence	influence	NOUN
ap-10001	249	24	on	on	ADP
ap-10001	249	25	the	the	DET
ap-10001	249	26	output	output	NOUN
ap-10001	249	27	parameters	parameter	NOUN
ap-10001	249	28	,	,	PUNCT
ap-10001	249	29	such	such	ADJ
ap-10001	249	30	as	as	ADP
ap-10001	249	31	lens	lens	NOUN
ap-10001	249	32	diameter	diameter	NOUN
ap-10001	249	33	,	,	PUNCT
ap-10001	249	34	depth	depth	NOUN
ap-10001	249	35	,	,	PUNCT
ap-10001	249	36	focal	focal	ADJ
ap-10001	249	37	point	point	NOUN
ap-10001	249	38	,	,	PUNCT
ap-10001	249	39	f	f	NOUN
ap-10001	249	40	#	#	NOUN
ap-10001	249	41	,	,	PUNCT
ap-10001	249	42	and	and	CCONJ
ap-10001	249	43	na	na	AUX
ap-10001	249	44	.	.	PUNCT
ap-10001	250	1	the	the	DET
ap-10001	250	2	software	software	NOUN
ap-10001	250	3	organises	organise	VERB
ap-10001	250	4	the	the	DET
ap-10001	250	5	experimental	experimental	ADJ
ap-10001	250	6	data	datum	NOUN
ap-10001	250	7	,	,	PUNCT
ap-10001	250	8	generates	generate	VERB
ap-10001	250	9	equations	equation	NOUN
ap-10001	250	10	that	that	PRON
ap-10001	250	11	establish	establish	VERB
ap-10001	250	12	relationships	relationship	NOUN
ap-10001	250	13	between	between	ADP
ap-10001	250	14	the	the	DET
ap-10001	250	15	input	input	NOUN
ap-10001	250	16	and	and	CCONJ
ap-10001	250	17	output	output	NOUN
ap-10001	250	18	parameters	parameter	NOUN
ap-10001	250	19	,	,	PUNCT
ap-10001	250	20	and	and	CCONJ
ap-10001	250	21	then	then	ADV
ap-10001	250	22	performs	perform	VERB
ap-10001	250	23	an	an	DET
ap-10001	250	24	optimisation	optimisation	NOUN
ap-10001	250	25	process	process	NOUN
ap-10001	250	26	to	to	PART
ap-10001	250	27	determine	determine	VERB
ap-10001	250	28	the	the	DET
ap-10001	250	29	most	most	ADV
ap-10001	250	30	effective	effective	ADJ
ap-10001	250	31	conditions	condition	NOUN
ap-10001	250	32	.	.	PUNCT
ap-10001	251	1	table	table	NOUN
ap-10001	251	2	6	6	NUM
ap-10001	251	3	shows	show	VERB
ap-10001	251	4	the	the	DET
ap-10001	251	5	experimental	experimental	ADJ
ap-10001	251	6	results	result	NOUN
ap-10001	251	7	of	of	ADP
ap-10001	251	8	the	the	DET
ap-10001	251	9	quartz	quartz	NOUN
ap-10001	251	10	microlens	microlen	VERB
ap-10001	251	11	fabrication	fabrication	NOUN
ap-10001	251	12	.	.	PUNCT
ap-10001	252	1	the	the	DET
ap-10001	252	2	input	input	NOUN
ap-10001	252	3	parameters	parameter	NOUN
ap-10001	252	4	were	be	AUX
ap-10001	252	5	laser	laser	NOUN
ap-10001	252	6	power	power	NOUN
ap-10001	252	7	,	,	PUNCT
ap-10001	252	8	laser	laser	NOUN
ap-10001	252	9	speed	speed	NOUN
ap-10001	252	10	,	,	PUNCT
ap-10001	252	11	and	and	CCONJ
ap-10001	252	12	the	the	DET
ap-10001	252	13	number	number	NOUN
ap-10001	252	14	of	of	ADP
ap-10001	252	15	repeated	repeat	VERB
ap-10001	252	16	processes	process	NOUN
ap-10001	252	17	.	.	PUNCT
ap-10001	253	1	the	the	DET
ap-10001	253	2	laser	laser	NOUN
ap-10001	253	3	power	power	NOUN
ap-10001	253	4	lower	low	ADJ
ap-10001	253	5	and	and	CCONJ
ap-10001	253	6	upper	upper	ADJ
ap-10001	253	7	values	value	NOUN
ap-10001	253	8	are	be	AUX
ap-10001	253	9	10	10	NUM
ap-10001	253	10	and	and	CCONJ
ap-10001	253	11	20	20	NUM
ap-10001	253	12	w	w	NOUN
ap-10001	253	13	,	,	PUNCT
ap-10001	253	14	respectively	respectively	ADV
ap-10001	253	15	.	.	PUNCT
ap-10001	254	1	the	the	DET
ap-10001	254	2	lower	low	ADJ
ap-10001	254	3	and	and	CCONJ
ap-10001	254	4	upper	upper	ADJ
ap-10001	254	5	values	value	NOUN
ap-10001	254	6	of	of	ADP
ap-10001	254	7	the	the	DET
ap-10001	254	8	laser	laser	NOUN
ap-10001	254	9	speed	speed	NOUN
ap-10001	254	10	are	be	AUX
ap-10001	254	11	50	50	NUM
ap-10001	254	12	and	and	CCONJ
ap-10001	254	13	150	150	NUM
ap-10001	254	14	mm	mm	NOUN
ap-10001	254	15	s−1	s−1	PROPN
ap-10001	254	16	,	,	PUNCT
ap-10001	254	17	respectively	respectively	ADV
ap-10001	254	18	,	,	PUNCT
ap-10001	254	19	414	414	NUM
ap-10001	254	20	vol	vol	NOUN
ap-10001	254	21	.	.	PUNCT
ap-10001	255	1	65	65	NUM
ap-10001	255	2	no	no	NOUN
ap-10001	255	3	.	.	PUNCT
ap-10001	256	1	4/2025	4/2025	NUM
ap-10001	256	2	improving	improve	VERB
ap-10001	256	3	the	the	DET
ap-10001	256	4	production	production	NOUN
ap-10001	256	5	process	process	NOUN
ap-10001	256	6	of	of	ADP
ap-10001	256	7	silicon	silicon	NOUN
ap-10001	256	8	nanoparticle	nanoparticle	NOUN
ap-10001	256	9	.	.	PUNCT
ap-10001	256	10	.	.	PUNCT
ap-10001	256	11	.	.	PUNCT
ap-10001	257	1	(	(	PUNCT
ap-10001	257	2	a	a	X
ap-10001	257	3	)	)	PUNCT
ap-10001	257	4	.	.	PUNCT
ap-10001	258	1	no	no	INTJ
ap-10001	258	2	.	.	NOUN
ap-10001	259	1	of	of	ADP
ap-10001	259	2	pulses	pulse	NOUN
ap-10001	259	3	:	:	PUNCT
ap-10001	259	4	100	100	NUM
ap-10001	259	5	.	.	PUNCT
ap-10001	260	1	(	(	PUNCT
ap-10001	260	2	b	b	NOUN
ap-10001	260	3	)	)	PUNCT
ap-10001	260	4	.	.	PUNCT
ap-10001	261	1	no	no	INTJ
ap-10001	261	2	.	.	NOUN
ap-10001	262	1	of	of	ADP
ap-10001	262	2	pulses	pulse	NOUN
ap-10001	262	3	:	:	PUNCT
ap-10001	262	4	300	300	NUM
ap-10001	262	5	.	.	PUNCT
ap-10001	263	1	(	(	PUNCT
ap-10001	263	2	c	c	NOUN
ap-10001	263	3	)	)	PUNCT
ap-10001	263	4	.	.	PUNCT
ap-10001	264	1	no	no	INTJ
ap-10001	264	2	.	.	NOUN
ap-10001	265	1	of	of	ADP
ap-10001	265	2	pulses	pulse	NOUN
ap-10001	265	3	:	:	PUNCT
ap-10001	265	4	500	500	NUM
ap-10001	265	5	.	.	PUNCT
ap-10001	265	6	figure	figure	VERB
ap-10001	265	7	8	8	NUM
ap-10001	265	8	.	.	PUNCT
ap-10001	266	1	the	the	DET
ap-10001	266	2	stability	stability	NOUN
ap-10001	266	3	curve	curve	NOUN
ap-10001	266	4	for	for	ADP
ap-10001	266	5	aging	age	VERB
ap-10001	266	6	time	time	NOUN
ap-10001	266	7	and	and	CCONJ
ap-10001	266	8	energy	energy	NOUN
ap-10001	266	9	at	at	ADP
ap-10001	266	10	no	no	NOUN
ap-10001	266	11	.	.	NOUN
ap-10001	266	12	of	of	ADP
ap-10001	266	13	pulses	pulse	NOUN
ap-10001	266	14	:	:	PUNCT
ap-10001	266	15	100	100	NUM
ap-10001	266	16	,	,	PUNCT
ap-10001	266	17	300	300	NUM
ap-10001	266	18	,	,	PUNCT
ap-10001	266	19	and	and	CCONJ
ap-10001	266	20	500	500	NUM
ap-10001	266	21	.	.	PUNCT
ap-10001	266	22	figure	figure	VERB
ap-10001	266	23	9	9	NUM
ap-10001	266	24	.	.	PUNCT
ap-10001	267	1	the	the	DET
ap-10001	267	2	contour	contour	NOUN
ap-10001	267	3	graph	graph	NOUN
ap-10001	267	4	of	of	ADP
ap-10001	267	5	optimum	optimum	ADJ
ap-10001	267	6	value	value	NOUN
ap-10001	267	7	for	for	ADP
ap-10001	267	8	stability	stability	NOUN
ap-10001	267	9	.	.	PUNCT
ap-10001	268	1	while	while	SCONJ
ap-10001	268	2	the	the	DET
ap-10001	268	3	number	number	NOUN
ap-10001	268	4	of	of	ADP
ap-10001	268	5	repeated	repeat	VERB
ap-10001	268	6	processes	process	NOUN
ap-10001	268	7	ranges	range	VERB
ap-10001	268	8	from	from	ADP
ap-10001	268	9	1	1	NUM
ap-10001	268	10	to	to	ADP
ap-10001	268	11	9	9	NUM
ap-10001	268	12	.	.	PUNCT
ap-10001	269	1	the	the	DET
ap-10001	269	2	output	output	NOUN
ap-10001	269	3	parameters	parameter	NOUN
ap-10001	269	4	were	be	AUX
ap-10001	269	5	the	the	DET
ap-10001	269	6	lens	lens	NOUN
ap-10001	269	7	diameter	diameter	NOUN
ap-10001	269	8	,	,	PUNCT
ap-10001	269	9	depth	depth	NOUN
ap-10001	269	10	,	,	PUNCT
ap-10001	269	11	focal	focal	ADJ
ap-10001	269	12	length	length	NOUN
ap-10001	269	13	,	,	PUNCT
ap-10001	269	14	f	f	PROPN
ap-10001	269	15	#	#	NOUN
ap-10001	269	16	,	,	PUNCT
ap-10001	269	17	and	and	CCONJ
ap-10001	269	18	numerical	numerical	ADJ
ap-10001	269	19	aperture	aperture	NOUN
ap-10001	269	20	.	.	PUNCT
ap-10001	270	1	the	the	DET
ap-10001	270	2	f	f	NOUN
ap-10001	270	3	-	-	PUNCT
ap-10001	270	4	number	number	NOUN
ap-10001	270	5	of	of	ADP
ap-10001	270	6	a	a	DET
ap-10001	270	7	lens	lens	NOUN
ap-10001	270	8	(	(	PUNCT
ap-10001	270	9	f	f	NOUN
ap-10001	270	10	#	#	NOUN
ap-10001	270	11	)	)	PUNCT
ap-10001	270	12	is	be	AUX
ap-10001	270	13	a	a	DET
ap-10001	270	14	dimensionless	dimensionless	NOUN
ap-10001	270	15	number	number	NOUN
ap-10001	270	16	that	that	PRON
ap-10001	270	17	expresses	express	VERB
ap-10001	270	18	the	the	DET
ap-10001	270	19	ratio	ratio	NOUN
ap-10001	270	20	of	of	ADP
ap-10001	270	21	the	the	DET
ap-10001	270	22	focal	focal	ADJ
ap-10001	270	23	length	length	NOUN
ap-10001	270	24	(	(	PUNCT
ap-10001	270	25	f	f	X
ap-10001	270	26	)	)	PUNCT
ap-10001	270	27	to	to	ADP
ap-10001	270	28	the	the	DET
ap-10001	270	29	diameter	diameter	NOUN
ap-10001	270	30	of	of	ADP
ap-10001	270	31	the	the	DET
ap-10001	270	32	entrance	entrance	NOUN
ap-10001	270	33	pupil	pupil	NOUN
ap-10001	270	34	.	.	PUNCT
ap-10001	271	1	it	it	PRON
ap-10001	271	2	controls	control	VERB
ap-10001	271	3	the	the	DET
ap-10001	271	4	amount	amount	NOUN
ap-10001	271	5	of	of	ADP
ap-10001	271	6	light	light	NOUN
ap-10001	271	7	that	that	PRON
ap-10001	271	8	enters	enter	VERB
ap-10001	271	9	the	the	DET
ap-10001	271	10	lens	lens	NOUN
ap-10001	271	11	and	and	CCONJ
ap-10001	271	12	affects	affect	VERB
ap-10001	271	13	the	the	DET
ap-10001	271	14	depth	depth	NOUN
ap-10001	271	15	of	of	ADP
ap-10001	271	16	field	field	NOUN
ap-10001	271	17	in	in	ADP
ap-10001	271	18	imaging	imaging	NOUN
ap-10001	271	19	devices	device	NOUN
ap-10001	271	20	.	.	PUNCT
ap-10001	272	1	the	the	DET
ap-10001	272	2	numerical	numerical	ADJ
ap-10001	272	3	aperture	aperture	NOUN
ap-10001	272	4	(	(	PUNCT
ap-10001	272	5	na	na	NOUN
ap-10001	272	6	)	)	PUNCT
ap-10001	272	7	of	of	ADP
ap-10001	272	8	a	a	DET
ap-10001	272	9	lens	lens	NOUN
ap-10001	272	10	is	be	AUX
ap-10001	272	11	a	a	DET
ap-10001	272	12	dimensionless	dimensionless	ADJ
ap-10001	272	13	metric	metric	NOUN
ap-10001	272	14	that	that	PRON
ap-10001	272	15	indicates	indicate	VERB
ap-10001	272	16	its	its	PRON
ap-10001	272	17	ability	ability	NOUN
ap-10001	272	18	to	to	PART
ap-10001	272	19	collect	collect	VERB
ap-10001	272	20	light	light	NOUN
ap-10001	272	21	and	and	CCONJ
ap-10001	272	22	resolve	resolve	VERB
ap-10001	272	23	fine	fine	ADJ
ap-10001	272	24	detail	detail	NOUN
ap-10001	272	25	.	.	PUNCT
ap-10001	273	1	a	a	DET
ap-10001	273	2	graphical	graphical	ADJ
ap-10001	273	3	representation	representation	NOUN
ap-10001	273	4	of	of	ADP
ap-10001	273	5	the	the	DET
ap-10001	273	6	numerical	numerical	ADJ
ap-10001	273	7	aperture	aperture	NOUN
ap-10001	273	8	,	,	PUNCT
ap-10001	273	9	which	which	PRON
ap-10001	273	10	is	be	AUX
ap-10001	273	11	given	give	VERB
ap-10001	273	12	in	in	ADP
ap-10001	273	13	table	table	NOUN
ap-10001	273	14	6	6	NUM
ap-10001	273	15	,	,	PUNCT
ap-10001	273	16	is	be	AUX
ap-10001	273	17	shown	show	VERB
ap-10001	273	18	in	in	ADP
ap-10001	273	19	figure	figure	NOUN
ap-10001	273	20	10	10	NUM
ap-10001	273	21	.	.	PUNCT
ap-10001	274	1	figure	figure	NOUN
ap-10001	274	2	10	10	NUM
ap-10001	274	3	shows	show	VERB
ap-10001	274	4	the	the	DET
ap-10001	274	5	three	three	NUM
ap-10001	274	6	-	-	PUNCT
ap-10001	274	7	dimensional	dimensional	ADJ
ap-10001	274	8	graph	graph	NOUN
ap-10001	274	9	of	of	ADP
ap-10001	274	10	the	the	DET
ap-10001	274	11	microlens	microlen	NOUN
ap-10001	274	12	na	na	NOUN
ap-10001	274	13	for	for	ADP
ap-10001	274	14	one	one	NUM
ap-10001	274	15	to	to	PART
ap-10001	274	16	nine	nine	NUM
ap-10001	274	17	times	time	NOUN
ap-10001	274	18	repeated	repeat	VERB
ap-10001	274	19	processes	process	NOUN
ap-10001	274	20	.	.	PUNCT
ap-10001	275	1	the	the	DET
ap-10001	275	2	max	max	PROPN
ap-10001	275	3	.	.	PROPN
ap-10001	275	4	and	and	CCONJ
ap-10001	275	5	min	min	PROPN
ap-10001	275	6	.	.	PROPN
ap-10001	275	7	na	na	PROPN
ap-10001	275	8	values	value	NOUN
ap-10001	275	9	were	be	AUX
ap-10001	275	10	0.108	0.108	NUM
ap-10001	275	11	and	and	CCONJ
ap-10001	275	12	0.543	0.543	NUM
ap-10001	275	13	mv	mv	PROPN
ap-10001	275	14	,	,	PUNCT
ap-10001	275	15	respectively	respectively	ADV
ap-10001	275	16	.	.	PUNCT
ap-10001	276	1	a	a	DET
ap-10001	276	2	deeper	deep	ADJ
ap-10001	276	3	dip	dip	NOUN
ap-10001	276	4	is	be	AUX
ap-10001	276	5	produced	produce	VERB
ap-10001	276	6	when	when	SCONJ
ap-10001	276	7	the	the	DET
ap-10001	276	8	laser	laser	NOUN
ap-10001	276	9	power	power	NOUN
ap-10001	276	10	is	be	AUX
ap-10001	276	11	increased	increase	VERB
ap-10001	276	12	and	and	CCONJ
ap-10001	276	13	the	the	DET
ap-10001	276	14	laser	laser	NOUN
ap-10001	276	15	speed	speed	NOUN
ap-10001	276	16	is	be	AUX
ap-10001	276	17	decreased	decrease	VERB
ap-10001	276	18	,	,	PUNCT
ap-10001	276	19	along	along	ADP
ap-10001	276	20	with	with	ADP
ap-10001	276	21	a	a	DET
ap-10001	276	22	higher	high	ADJ
ap-10001	276	23	number	number	NOUN
ap-10001	276	24	of	of	ADP
ap-10001	276	25	repeated	repeat	VERB
ap-10001	276	26	processes	process	NOUN
ap-10001	276	27	.	.	PUNCT
ap-10001	277	1	this	this	PRON
ap-10001	277	2	is	be	AUX
ap-10001	277	3	due	due	ADJ
ap-10001	277	4	to	to	ADP
ap-10001	277	5	an	an	DET
ap-10001	277	6	increase	increase	NOUN
ap-10001	277	7	in	in	ADP
ap-10001	277	8	ablated	ablated	ADJ
ap-10001	277	9	material	material	NOUN
ap-10001	277	10	and	and	CCONJ
ap-10001	277	11	a	a	DET
ap-10001	277	12	greater	great	ADJ
ap-10001	277	13	numerical	numerical	ADJ
ap-10001	277	14	aperture	aperture	NOUN
ap-10001	277	15	(	(	PUNCT
ap-10001	277	16	na	na	NOUN
ap-10001	277	17	)	)	PUNCT
ap-10001	277	18	.	.	PUNCT
ap-10001	278	1	the	the	DET
ap-10001	278	2	quadric	quadric	ADJ
ap-10001	278	3	equation	equation	NOUN
ap-10001	278	4	that	that	PRON
ap-10001	278	5	should	should	AUX
ap-10001	278	6	be	be	AUX
ap-10001	278	7	used	use	VERB
ap-10001	278	8	to	to	PART
ap-10001	278	9	evaluate	evaluate	VERB
ap-10001	278	10	the	the	DET
ap-10001	278	11	numerical	numerical	ADJ
ap-10001	278	12	aperture	aperture	NOUN
ap-10001	278	13	of	of	ADP
ap-10001	278	14	quartz	quartz	NOUN
ap-10001	278	15	microlens	microlen	VERB
ap-10001	278	16	is	be	AUX
ap-10001	278	17	shown	show	VERB
ap-10001	278	18	below	below	ADP
ap-10001	278	19	:	:	PUNCT
ap-10001	278	20	na	na	ADP
ap-10001	278	21	=	=	SYM
ap-10001	278	22	0.5495	0.5495	NUM
ap-10001	279	1	+	+	CCONJ
ap-10001	279	2	0.00054p	0.00054p	NOUN
ap-10001	280	1	+	+	CCONJ
ap-10001	280	2	0.0149s	0.0149	NOUN
ap-10001	280	3	+	+	CCONJ
ap-10001	280	4	0.0073c	0.0073c	NOUN
ap-10001	280	5	+	+	CCONJ
ap-10001	280	6	0.0017p	0.0017p	NUM
ap-10001	280	7	×	×	PROPN
ap-10001	280	8	s	s	X
ap-10001	280	9	+	+	CCONJ
ap-10001	280	10	(	(	PUNCT
ap-10001	280	11	−0.0002)p	−0.0002)p	NUM
ap-10001	280	12	×	×	NOUN
ap-10001	280	13	c	c	NOUN
ap-10001	280	14	+	+	CCONJ
ap-10001	280	15	(	(	PUNCT
ap-10001	280	16	−0.0145)s	−0.0145)s	NUM
ap-10001	280	17	×	×	NOUN
ap-10001	280	18	c	c	NOUN
ap-10001	281	1	+	+	CCONJ
ap-10001	281	2	0.0050p	0.0050p	NUM
ap-10001	281	3	2	2	NUM
ap-10001	282	1	+	+	CCONJ
ap-10001	282	2	(	(	PUNCT
ap-10001	282	3	−0.0125401)s2	−0.0125401)s2	PROPN
ap-10001	282	4	+	+	CCONJ
ap-10001	282	5	(	(	PUNCT
ap-10001	282	6	−0.0054)c2	−0.0054)c2	PROPN
ap-10001	282	7	+	+	CCONJ
ap-10001	282	8	(	(	PUNCT
ap-10001	282	9	−0.0133)p	−0.0133)p	ADP
ap-10001	282	10	2	2	NUM
ap-10001	282	11	×	×	NOUN
ap-10001	282	12	s	s	NOUN
ap-10001	282	13	,	,	PUNCT
ap-10001	282	14	(	(	PUNCT
ap-10001	282	15	6	6	NUM
ap-10001	282	16	)	)	PUNCT
ap-10001	282	17	where	where	SCONJ
ap-10001	282	18	p	p	NOUN
ap-10001	282	19	is	be	AUX
ap-10001	282	20	the	the	DET
ap-10001	282	21	fibre	fibre	NOUN
ap-10001	282	22	laser	laser	NOUN
ap-10001	282	23	power	power	NOUN
ap-10001	283	1	[	[	X
ap-10001	283	2	p	p	X
ap-10001	283	3	]	]	X
ap-10001	283	4	,	,	PUNCT
ap-10001	283	5	s	s	X
ap-10001	283	6	is	be	AUX
ap-10001	283	7	the	the	DET
ap-10001	283	8	laser	laser	NOUN
ap-10001	283	9	speed	speed	NOUN
ap-10001	283	10	[	[	X
ap-10001	283	11	mm	mm	NOUN
ap-10001	283	12	s−1	s−1	PROPN
ap-10001	283	13	]	]	PUNCT
ap-10001	283	14	,	,	PUNCT
ap-10001	283	15	and	and	CCONJ
ap-10001	283	16	c	c	NOUN
ap-10001	283	17	is	be	AUX
ap-10001	283	18	the	the	DET
ap-10001	283	19	number	number	NOUN
ap-10001	283	20	of	of	ADP
ap-10001	283	21	repeated	repeat	VERB
ap-10001	283	22	processes	process	NOUN
ap-10001	283	23	.	.	PUNCT
ap-10001	284	1	the	the	DET
ap-10001	284	2	final	final	ADJ
ap-10001	284	3	regression	regression	NOUN
ap-10001	284	4	equation	equation	NOUN
ap-10001	284	5	was	be	AUX
ap-10001	284	6	also	also	ADV
ap-10001	284	7	an	an	DET
ap-10001	284	8	excellent	excellent	ADJ
ap-10001	284	9	way	way	NOUN
ap-10001	284	10	to	to	PART
ap-10001	284	11	predict	predict	VERB
ap-10001	284	12	and	and	CCONJ
ap-10001	284	13	study	study	VERB
ap-10001	284	14	how	how	SCONJ
ap-10001	284	15	parameters	parameter	NOUN
ap-10001	284	16	affect	affect	VERB
ap-10001	284	17	each	each	DET
ap-10001	284	18	other	other	ADJ
ap-10001	284	19	.	.	PUNCT
ap-10001	285	1	415	415	NUM
ap-10001	285	2	m.	m.	NOUN
ap-10001	285	3	j.	j.	PROPN
ap-10001	285	4	mahmoud	mahmoud	PROPN
ap-10001	285	5	,	,	PUNCT
ap-10001	285	6	b.	b.	PROPN
ap-10001	285	7	g.	g.	PROPN
ap-10001	285	8	rasheed	rasheed	PROPN
ap-10001	285	9	,	,	PUNCT
ap-10001	285	10	m.	m.	NOUN
ap-10001	285	11	m.	m.	PROPN
ap-10001	285	12	hanon	hanon	PROPN
ap-10001	285	13	acta	acta	PROPN
ap-10001	285	14	polytechnica	polytechnica	PROPN
ap-10001	285	15	run	run	NOUN
ap-10001	285	16	input	input	NOUN
ap-10001	285	17	parameters	parameter	NOUN
ap-10001	285	18	output	output	NOUN
ap-10001	285	19	parameters	parameter	NOUN
ap-10001	285	20	a	a	DET
ap-10001	285	21	:	:	PUNCT
ap-10001	285	22	power	power	NOUN
ap-10001	285	23	b	b	NOUN
ap-10001	285	24	:	:	PUNCT
ap-10001	285	25	speed	speed	NOUN
ap-10001	285	26	c	c	NOUN
ap-10001	285	27	:	:	PUNCT
ap-10001	285	28	count	count	VERB
ap-10001	285	29	lens	lens	NOUN
ap-10001	285	30	diameter	diameter	NOUN
ap-10001	285	31	depth	depth	NOUN
ap-10001	285	32	focal	focal	ADJ
ap-10001	285	33	point	point	NOUN
ap-10001	285	34	f	f	X
ap-10001	285	35	#	#	NOUN
ap-10001	285	36	na[w	na[w	PROPN
ap-10001	285	37	]	]	X
ap-10001	286	1	[	[	X
ap-10001	286	2	mm	mm	X
ap-10001	286	3	s−1	s−1	PROPN
ap-10001	286	4	]	]	PUNCT
ap-10001	287	1	[	[	X
ap-10001	287	2	µm	µm	X
ap-10001	287	3	]	]	X
ap-10001	288	1	[	[	X
ap-10001	288	2	µm	µm	X
ap-10001	288	3	]	]	X
ap-10001	288	4	[	[	X
ap-10001	288	5	µm	µm	X
ap-10001	288	6	]	]	SYM
ap-10001	288	7	1	1	NUM
ap-10001	288	8	15	15	NUM
ap-10001	288	9	100	100	NUM
ap-10001	288	10	5	5	NUM
ap-10001	288	11	446	446	NUM
ap-10001	288	12	154	154	NUM
ap-10001	288	13	433.560	433.560	NUM
ap-10001	288	14	0.972	0.972	NUM
ap-10001	288	15	0.514	0.514	NUM
ap-10001	288	16	2	2	NUM
ap-10001	288	17	15	15	NUM
ap-10001	288	18	100	100	NUM
ap-10001	288	19	5	5	NUM
ap-10001	288	20	445	445	NUM
ap-10001	288	21	155	155	NUM
ap-10001	288	22	431.268	431.268	NUM
ap-10001	288	23	0.969	0.969	NUM
ap-10001	288	24	0.516	0.516	NUM
ap-10001	288	25	3	3	NUM
ap-10001	288	26	15	15	NUM
ap-10001	288	27	50	50	NUM
ap-10001	288	28	9	9	NUM
ap-10001	288	29	190	190	NUM
ap-10001	288	30	590	590	NUM
ap-10001	288	31	550.27	550.27	NUM
ap-10001	288	32	2.897	2.897	NUM
ap-10001	288	33	0.173	0.173	NUM
ap-10001	288	34	4	4	NUM
ap-10001	288	35	10	10	NUM
ap-10001	288	36	100	100	NUM
ap-10001	288	37	1	1	NUM
ap-10001	288	38	720	720	NUM
ap-10001	288	39	70	70	NUM
ap-10001	288	40	1	1	NUM
ap-10001	288	41	746.75	746.75	NUM
ap-10001	288	42	2.426	2.426	NUM
ap-10001	288	43	0.206	0.206	NUM
ap-10001	288	44	5	5	NUM
ap-10001	288	45	15	15	NUM
ap-10001	288	46	50	50	NUM
ap-10001	288	47	1	1	NUM
ap-10001	288	48	320	320	NUM
ap-10001	288	49	420	420	NUM
ap-10001	288	50	437.229	437.229	NUM
ap-10001	288	51	1.366	1.366	NUM
ap-10001	288	52	0.366	0.366	NUM
ap-10001	288	53	6	6	NUM
ap-10001	288	54	20	20	NUM
ap-10001	288	55	150	150	NUM
ap-10001	288	56	5	5	NUM
ap-10001	288	57	350	350	NUM
ap-10001	288	58	205	205	NUM
ap-10001	288	59	322.173	322.173	NUM
ap-10001	288	60	0.92	0.92	NUM
ap-10001	288	61	0.543	0.543	NUM
ap-10001	288	62	7	7	NUM
ap-10001	288	63	20	20	NUM
ap-10001	288	64	50	50	NUM
ap-10001	288	65	5	5	NUM
ap-10001	288	66	130	130	NUM
ap-10001	288	67	657	657	NUM
ap-10001	288	68	603.119	603.119	NUM
ap-10001	288	69	4.639	4.639	NUM
ap-10001	288	70	0.108	0.108	NUM
ap-10001	288	71	8	8	NUM
ap-10001	288	72	10	10	NUM
ap-10001	288	73	150	150	NUM
ap-10001	288	74	5	5	NUM
ap-10001	288	75	775	775	NUM
ap-10001	288	76	91	91	NUM
ap-10001	288	77	1	1	NUM
ap-10001	288	78	582.79	582.79	NUM
ap-10001	288	79	2.042	2.042	NUM
ap-10001	288	80	0.245	0.245	NUM
ap-10001	288	81	9	9	NUM
ap-10001	288	82	20	20	NUM
ap-10001	288	83	100	100	NUM
ap-10001	288	84	9	9	NUM
ap-10001	288	85	150	150	NUM
ap-10001	288	86	297	297	NUM
ap-10001	288	87	287.218	287.218	NUM
ap-10001	288	88	1.915	1.915	NUM
ap-10001	288	89	0.261	0.261	NUM
ap-10001	288	90	10	10	NUM
ap-10001	288	91	15	15	NUM
ap-10001	288	92	150	150	NUM
ap-10001	288	93	9	9	NUM
ap-10001	288	94	595	595	NUM
ap-10001	288	95	175	175	NUM
ap-10001	288	96	618.864	618.864	NUM
ap-10001	288	97	1.04	1.04	NUM
ap-10001	288	98	0.48	0.48	NUM
ap-10001	288	99	11	11	NUM
ap-10001	288	100	15	15	NUM
ap-10001	288	101	100	100	NUM
ap-10001	288	102	5	5	NUM
ap-10001	288	103	446	446	NUM
ap-10001	288	104	154	154	NUM
ap-10001	288	105	433.560	433.560	NUM
ap-10001	288	106	0.972	0.972	NUM
ap-10001	288	107	0.514	0.514	NUM
ap-10001	288	108	12	12	NUM
ap-10001	288	109	15	15	NUM
ap-10001	288	110	100	100	NUM
ap-10001	288	111	5	5	NUM
ap-10001	288	112	445	445	NUM
ap-10001	288	113	155	155	NUM
ap-10001	288	114	431.268	431.268	NUM
ap-10001	288	115	0.969	0.969	NUM
ap-10001	288	116	0.516	0.516	NUM
ap-10001	288	117	13	13	NUM
ap-10001	288	118	10	10	NUM
ap-10001	288	119	50	50	NUM
ap-10001	288	120	5	5	NUM
ap-10001	288	121	382	382	NUM
ap-10001	288	122	470	470	NUM
ap-10001	288	123	497.836	497.836	NUM
ap-10001	288	124	1.303	1.303	NUM
ap-10001	288	125	0.384	0.384	NUM
ap-10001	288	126	14	14	NUM
ap-10001	288	127	10	10	NUM
ap-10001	288	128	100	100	NUM
ap-10001	288	129	9	9	NUM
ap-10001	288	130	470	470	NUM
ap-10001	288	131	145	145	NUM
ap-10001	288	132	478.056	478.056	NUM
ap-10001	288	133	1.017	1.017	NUM
ap-10001	288	134	0.492	0.492	NUM
ap-10001	288	135	15	15	NUM
ap-10001	288	136	20	20	NUM
ap-10001	288	137	100	100	NUM
ap-10001	288	138	1	1	NUM
ap-10001	288	139	210	210	NUM
ap-10001	288	140	240	240	NUM
ap-10001	288	141	259.943	259.943	NUM
ap-10001	288	142	1.238	1.238	NUM
ap-10001	288	143	0.404	0.404	NUM
ap-10001	288	144	16	16	NUM
ap-10001	288	145	15	15	NUM
ap-10001	288	146	100	100	NUM
ap-10001	288	147	5	5	NUM
ap-10001	288	148	444	444	NUM
ap-10001	288	149	156	156	NUM
ap-10001	288	150	429.021	429.021	NUM
ap-10001	288	151	0.966	0.966	NUM
ap-10001	288	152	0.517	0.517	NUM
ap-10001	288	153	17	17	NUM
ap-10001	288	154	15	15	NUM
ap-10001	288	155	150	150	NUM
ap-10001	288	156	1	1	NUM
ap-10001	288	157	705	705	NUM
ap-10001	288	158	91	91	NUM
ap-10001	288	159	1	1	NUM
ap-10001	288	160	324.05	324.05	NUM
ap-10001	288	161	1.878	1.878	NUM
ap-10001	288	162	0.266	0.266	NUM
ap-10001	288	163	table	table	NOUN
ap-10001	288	164	6	6	NUM
ap-10001	288	165	.	.	PUNCT
ap-10001	288	166	effects	effect	NOUN
ap-10001	288	167	of	of	ADP
ap-10001	288	168	laser	laser	NOUN
ap-10001	288	169	power	power	NOUN
ap-10001	288	170	,	,	PUNCT
ap-10001	288	171	laser	laser	NOUN
ap-10001	288	172	speed	speed	NOUN
ap-10001	288	173	,	,	PUNCT
ap-10001	288	174	and	and	CCONJ
ap-10001	288	175	no	no	INTJ
ap-10001	288	176	.	.	NOUN
ap-10001	289	1	of	of	ADP
ap-10001	289	2	repeated	repeat	VERB
ap-10001	289	3	processes	process	NOUN
ap-10001	289	4	on	on	ADP
ap-10001	289	5	the	the	DET
ap-10001	289	6	lens	lens	NOUN
ap-10001	289	7	diameter	diameter	NOUN
ap-10001	289	8	,	,	PUNCT
ap-10001	289	9	lens	lens	NOUN
ap-10001	289	10	depth	depth	NOUN
ap-10001	289	11	,	,	PUNCT
ap-10001	289	12	focal	focal	ADJ
ap-10001	289	13	point	point	NOUN
ap-10001	289	14	,	,	PUNCT
ap-10001	289	15	f	f	NOUN
ap-10001	289	16	#	#	NOUN
ap-10001	289	17	,	,	PUNCT
ap-10001	289	18	and	and	CCONJ
ap-10001	289	19	na	na	INTJ
ap-10001	289	20	as	as	ADV
ap-10001	289	21	determined	determine	VERB
ap-10001	289	22	by	by	ADP
ap-10001	289	23	the	the	DET
ap-10001	289	24	doe	doe	NOUN
ap-10001	289	25	software	software	NOUN
ap-10001	289	26	.	.	PUNCT
ap-10001	290	1	(	(	PUNCT
ap-10001	290	2	a	a	X
ap-10001	290	3	)	)	PUNCT
ap-10001	290	4	.	.	PUNCT
ap-10001	291	1	no	no	INTJ
ap-10001	291	2	.	.	PUNCT
ap-10001	292	1	of	of	ADP
ap-10001	292	2	repeated	repeat	VERB
ap-10001	292	3	processes	process	NOUN
ap-10001	292	4	:	:	PUNCT
ap-10001	292	5	1	1	X
ap-10001	292	6	.	.	PUNCT
ap-10001	292	7	(	(	PUNCT
ap-10001	292	8	b	b	NOUN
ap-10001	292	9	)	)	PUNCT
ap-10001	292	10	.	.	PUNCT
ap-10001	293	1	no	no	INTJ
ap-10001	293	2	.	.	PUNCT
ap-10001	294	1	of	of	ADP
ap-10001	294	2	repeated	repeat	VERB
ap-10001	294	3	processes	process	NOUN
ap-10001	294	4	:	:	PUNCT
ap-10001	294	5	5	5	X
ap-10001	294	6	.	.	PUNCT
ap-10001	294	7	(	(	PUNCT
ap-10001	294	8	c	c	NOUN
ap-10001	294	9	)	)	PUNCT
ap-10001	294	10	.	.	PUNCT
ap-10001	295	1	no	no	INTJ
ap-10001	295	2	.	.	PUNCT
ap-10001	296	1	of	of	ADP
ap-10001	296	2	repeated	repeat	VERB
ap-10001	296	3	processes	process	NOUN
ap-10001	297	1	:	:	PUNCT
ap-10001	297	2	9	9	X
ap-10001	297	3	.	.	X
ap-10001	297	4	figure	figure	NOUN
ap-10001	297	5	10	10	NUM
ap-10001	297	6	.	.	PUNCT
ap-10001	298	1	the	the	DET
ap-10001	298	2	na	na	PROPN
ap-10001	298	3	3d	3d	PROPN
ap-10001	298	4	curve	curve	NOUN
ap-10001	298	5	for	for	ADP
ap-10001	298	6	laser	laser	NOUN
ap-10001	298	7	power	power	NOUN
ap-10001	298	8	and	and	CCONJ
ap-10001	298	9	laser	laser	NOUN
ap-10001	298	10	speed	speed	NOUN
ap-10001	298	11	at	at	ADP
ap-10001	298	12	no	no	NOUN
ap-10001	298	13	.	.	PUNCT
ap-10001	298	14	of	of	ADP
ap-10001	298	15	repeated	repeat	VERB
ap-10001	298	16	processes	process	NOUN
ap-10001	298	17	:	:	PUNCT
ap-10001	298	18	1	1	NUM
ap-10001	298	19	,	,	PUNCT
ap-10001	298	20	5	5	NUM
ap-10001	298	21	,	,	PUNCT
ap-10001	298	22	and	and	CCONJ
ap-10001	298	23	9	9	NUM
ap-10001	298	24	times	time	NOUN
ap-10001	298	25	.	.	PUNCT
ap-10001	299	1	416	416	NUM
ap-10001	299	2	vol	vol	NOUN
ap-10001	299	3	.	.	PUNCT
ap-10001	300	1	65	65	NUM
ap-10001	300	2	no	no	NOUN
ap-10001	300	3	.	.	PUNCT
ap-10001	301	1	4/2025	4/2025	NUM
ap-10001	301	2	improving	improve	VERB
ap-10001	301	3	the	the	DET
ap-10001	301	4	production	production	NOUN
ap-10001	301	5	process	process	NOUN
ap-10001	301	6	of	of	ADP
ap-10001	301	7	silicon	silicon	NOUN
ap-10001	301	8	nanoparticle	nanoparticle	NOUN
ap-10001	301	9	.	.	PUNCT
ap-10001	301	10	.	.	PUNCT
ap-10001	302	1	.	.	PUNCT
ap-10001	303	1	run	run	VERB
ap-10001	303	2	input	input	NOUN
ap-10001	303	3	parameters	parameter	NOUN
ap-10001	303	4	output	output	VERB
ap-10001	303	5	parameter	parameter	NOUN
ap-10001	304	1	a	a	DET
ap-10001	304	2	:	:	PUNCT
ap-10001	304	3	power	power	NOUN
ap-10001	304	4	[	[	X
ap-10001	304	5	w	w	X
ap-10001	304	6	]	]	X
ap-10001	304	7	b	b	NOUN
ap-10001	304	8	:	:	PUNCT
ap-10001	304	9	speed	speed	NOUN
ap-10001	304	10	[	[	X
ap-10001	304	11	mm	mm	INTJ
ap-10001	304	12	s−1	s−1	PROPN
ap-10001	304	13	]	]	X
ap-10001	304	14	c	c	NOUN
ap-10001	304	15	:	:	PUNCT
ap-10001	304	16	count	count	VERB
ap-10001	304	17	roughness	roughness	NOUN
ap-10001	304	18	[	[	X
ap-10001	304	19	nm	nm	X
ap-10001	304	20	]	]	X
ap-10001	304	21	1	1	NUM
ap-10001	304	22	4	4	NUM
ap-10001	304	23	3	3	NUM
ap-10001	304	24	3	3	NUM
ap-10001	304	25	12.3	12.3	NUM
ap-10001	304	26	2	2	NUM
ap-10001	304	27	4	4	NUM
ap-10001	304	28	3	3	NUM
ap-10001	304	29	3	3	NUM
ap-10001	304	30	12.2	12.2	NUM
ap-10001	304	31	3	3	NUM
ap-10001	304	32	4	4	NUM
ap-10001	304	33	1	1	NUM
ap-10001	304	34	5	5	NUM
ap-10001	304	35	6.7	6.7	NUM
ap-10001	304	36	4	4	NUM
ap-10001	304	37	3	3	NUM
ap-10001	304	38	3	3	NUM
ap-10001	304	39	1	1	NUM
ap-10001	304	40	85.1	85.1	NUM
ap-10001	304	41	5	5	NUM
ap-10001	304	42	4	4	NUM
ap-10001	304	43	1	1	NUM
ap-10001	304	44	1	1	NUM
ap-10001	304	45	13.4	13.4	NUM
ap-10001	304	46	6	6	NUM
ap-10001	304	47	5	5	NUM
ap-10001	304	48	5	5	NUM
ap-10001	304	49	3	3	NUM
ap-10001	304	50	11.9	11.9	NUM
ap-10001	304	51	7	7	NUM
ap-10001	304	52	5	5	NUM
ap-10001	304	53	1	1	NUM
ap-10001	304	54	3	3	NUM
ap-10001	304	55	5.2	5.2	NUM
ap-10001	304	56	8	8	NUM
ap-10001	304	57	3	3	NUM
ap-10001	304	58	5	5	NUM
ap-10001	304	59	3	3	NUM
ap-10001	304	60	70.5	70.5	NUM
ap-10001	304	61	9	9	NUM
ap-10001	304	62	5	5	NUM
ap-10001	304	63	3	3	NUM
ap-10001	304	64	5	5	NUM
ap-10001	304	65	6.7	6.7	NUM
ap-10001	304	66	10	10	NUM
ap-10001	304	67	4	4	NUM
ap-10001	304	68	5	5	NUM
ap-10001	304	69	5	5	NUM
ap-10001	304	70	12.1	12.1	NUM
ap-10001	304	71	11	11	NUM
ap-10001	304	72	4	4	NUM
ap-10001	304	73	3	3	NUM
ap-10001	304	74	3	3	NUM
ap-10001	304	75	12.4	12.4	NUM
ap-10001	304	76	12	12	NUM
ap-10001	304	77	4	4	NUM
ap-10001	304	78	3	3	NUM
ap-10001	304	79	3	3	NUM
ap-10001	304	80	12.2	12.2	NUM
ap-10001	304	81	13	13	NUM
ap-10001	304	82	3	3	NUM
ap-10001	304	83	1	1	NUM
ap-10001	304	84	3	3	NUM
ap-10001	304	85	57.1	57.1	NUM
ap-10001	304	86	14	14	NUM
ap-10001	304	87	3	3	NUM
ap-10001	304	88	3	3	NUM
ap-10001	304	89	5	5	NUM
ap-10001	304	90	47	47	NUM
ap-10001	304	91	15	15	NUM
ap-10001	304	92	5	5	NUM
ap-10001	304	93	3	3	NUM
ap-10001	304	94	1	1	NUM
ap-10001	304	95	13.2	13.2	NUM
ap-10001	304	96	16	16	NUM
ap-10001	304	97	4	4	NUM
ap-10001	304	98	3	3	NUM
ap-10001	304	99	3	3	NUM
ap-10001	304	100	12.1	12.1	NUM
ap-10001	304	101	17	17	NUM
ap-10001	304	102	4	4	NUM
ap-10001	304	103	5	5	NUM
ap-10001	304	104	1	1	NUM
ap-10001	304	105	22.8	22.8	NUM
ap-10001	304	106	table	table	NOUN
ap-10001	304	107	7	7	NUM
ap-10001	304	108	.	.	PUNCT
ap-10001	304	109	effects	effect	NOUN
ap-10001	304	110	of	of	ADP
ap-10001	304	111	laser	laser	NOUN
ap-10001	304	112	power	power	NOUN
ap-10001	304	113	,	,	PUNCT
ap-10001	304	114	laser	laser	NOUN
ap-10001	304	115	speed	speed	NOUN
ap-10001	304	116	,	,	PUNCT
ap-10001	304	117	and	and	CCONJ
ap-10001	304	118	no	no	INTJ
ap-10001	304	119	.	.	NOUN
ap-10001	305	1	of	of	ADP
ap-10001	305	2	repeated	repeat	VERB
ap-10001	305	3	processes	process	NOUN
ap-10001	305	4	on	on	ADP
ap-10001	305	5	the	the	DET
ap-10001	305	6	lens	lens	NOUN
ap-10001	305	7	diameter	diameter	NOUN
ap-10001	305	8	,	,	PUNCT
ap-10001	305	9	lens	lens	NOUN
ap-10001	305	10	depth	depth	NOUN
ap-10001	305	11	,	,	PUNCT
ap-10001	305	12	focal	focal	ADJ
ap-10001	305	13	point	point	NOUN
ap-10001	305	14	,	,	PUNCT
ap-10001	305	15	f	f	NOUN
ap-10001	305	16	#	#	NOUN
ap-10001	305	17	,	,	PUNCT
ap-10001	305	18	and	and	CCONJ
ap-10001	305	19	na	na	AUX
ap-10001	305	20	as	as	ADV
ap-10001	305	21	measured	measure	VERB
ap-10001	305	22	by	by	ADP
ap-10001	305	23	the	the	DET
ap-10001	305	24	doe	doe	NOUN
ap-10001	305	25	software	software	NOUN
ap-10001	305	26	.	.	PUNCT
ap-10001	306	1	3.5.2	3.5.2	X
ap-10001	306	2	.	.	PUNCT
ap-10001	306	3	microlens	microlen	VERB
ap-10001	306	4	enhancement	enhancement	NOUN
ap-10001	306	5	using	use	VERB
ap-10001	306	6	the	the	DET
ap-10001	306	7	co2	co2	NOUN
ap-10001	306	8	laser	laser	NOUN
ap-10001	306	9	during	during	ADP
ap-10001	306	10	the	the	DET
ap-10001	306	11	reshaping	reshape	VERB
ap-10001	306	12	stage	stage	NOUN
ap-10001	306	13	is	be	AUX
ap-10001	306	14	of	of	ADP
ap-10001	306	15	considerable	considerable	ADJ
ap-10001	306	16	importance	importance	NOUN
ap-10001	306	17	for	for	ADP
ap-10001	306	18	enhancing	enhance	VERB
ap-10001	306	19	the	the	DET
ap-10001	306	20	quality	quality	NOUN
ap-10001	306	21	of	of	ADP
ap-10001	306	22	microlenses	microlense	NOUN
ap-10001	306	23	.	.	PUNCT
ap-10001	307	1	table	table	NOUN
ap-10001	307	2	7	7	NUM
ap-10001	307	3	presents	present	VERB
ap-10001	307	4	the	the	DET
ap-10001	307	5	parameters	parameter	NOUN
ap-10001	307	6	of	of	ADP
ap-10001	307	7	this	this	DET
ap-10001	307	8	stage	stage	NOUN
ap-10001	307	9	,	,	PUNCT
ap-10001	307	10	which	which	PRON
ap-10001	307	11	were	be	AUX
ap-10001	307	12	determined	determine	VERB
ap-10001	307	13	using	use	VERB
ap-10001	307	14	the	the	DET
ap-10001	307	15	design	design	NOUN
ap-10001	307	16	of	of	ADP
ap-10001	307	17	expert	expert	ADJ
ap-10001	307	18	software	software	NOUN
ap-10001	307	19	for	for	ADP
ap-10001	307	20	the	the	DET
ap-10001	307	21	experimental	experimental	ADJ
ap-10001	307	22	strategy	strategy	NOUN
ap-10001	307	23	.	.	PUNCT
ap-10001	308	1	all	all	DET
ap-10001	308	2	input	input	NOUN
ap-10001	308	3	parameters	parameter	NOUN
ap-10001	308	4	,	,	PUNCT
ap-10001	308	5	including	include	VERB
ap-10001	308	6	laser	laser	NOUN
ap-10001	308	7	power	power	NOUN
ap-10001	308	8	,	,	PUNCT
ap-10001	308	9	laser	laser	NOUN
ap-10001	308	10	speed	speed	NOUN
ap-10001	308	11	,	,	PUNCT
ap-10001	308	12	and	and	CCONJ
ap-10001	308	13	the	the	DET
ap-10001	308	14	number	number	NOUN
ap-10001	308	15	of	of	ADP
ap-10001	308	16	repeated	repeat	VERB
ap-10001	308	17	processes	process	NOUN
ap-10001	308	18	,	,	PUNCT
ap-10001	308	19	were	be	AUX
ap-10001	308	20	experimentally	experimentally	ADV
ap-10001	308	21	determined	determined	ADJ
ap-10001	308	22	to	to	PART
ap-10001	308	23	analyse	analyse	VERB
ap-10001	308	24	their	their	PRON
ap-10001	308	25	influence	influence	NOUN
ap-10001	308	26	on	on	ADP
ap-10001	308	27	the	the	DET
ap-10001	308	28	output	output	NOUN
ap-10001	308	29	parameter	parameter	NOUN
ap-10001	308	30	,	,	PUNCT
ap-10001	308	31	which	which	PRON
ap-10001	308	32	is	be	AUX
ap-10001	308	33	lens	lens	NOUN
ap-10001	308	34	roughness	roughness	NOUN
ap-10001	308	35	.	.	PUNCT
ap-10001	309	1	the	the	DET
ap-10001	309	2	laser	laser	NOUN
ap-10001	309	3	power	power	NOUN
ap-10001	309	4	has	have	VERB
ap-10001	309	5	lower	low	ADJ
ap-10001	309	6	and	and	CCONJ
ap-10001	309	7	upper	upper	ADJ
ap-10001	309	8	values	value	NOUN
ap-10001	309	9	of	of	ADP
ap-10001	309	10	3	3	NUM
ap-10001	309	11	and	and	CCONJ
ap-10001	309	12	5	5	NUM
ap-10001	309	13	w	w	NOUN
ap-10001	309	14	,	,	PUNCT
ap-10001	309	15	respectively	respectively	ADV
ap-10001	309	16	.	.	PUNCT
ap-10001	310	1	the	the	DET
ap-10001	310	2	lower	low	ADJ
ap-10001	310	3	and	and	CCONJ
ap-10001	310	4	upper	upper	ADJ
ap-10001	310	5	values	value	NOUN
ap-10001	310	6	of	of	ADP
ap-10001	310	7	the	the	DET
ap-10001	310	8	laser	laser	NOUN
ap-10001	310	9	speed	speed	NOUN
ap-10001	310	10	are	be	AUX
ap-10001	310	11	1	1	NUM
ap-10001	310	12	and	and	CCONJ
ap-10001	310	13	5	5	NUM
ap-10001	310	14	mm	mm	NOUN
ap-10001	310	15	s−1	s−1	PROPN
ap-10001	310	16	,	,	PUNCT
ap-10001	310	17	respectively	respectively	ADV
ap-10001	310	18	,	,	PUNCT
ap-10001	310	19	while	while	SCONJ
ap-10001	310	20	the	the	DET
ap-10001	310	21	number	number	NOUN
ap-10001	310	22	of	of	ADP
ap-10001	310	23	repeated	repeat	VERB
ap-10001	310	24	processes	process	NOUN
ap-10001	310	25	ranges	range	VERB
ap-10001	310	26	from	from	ADP
ap-10001	310	27	1	1	NUM
ap-10001	310	28	to	to	ADP
ap-10001	310	29	5	5	NUM
ap-10001	310	30	.	.	PUNCT
ap-10001	311	1	the	the	DET
ap-10001	311	2	software	software	NOUN
ap-10001	311	3	organises	organise	VERB
ap-10001	311	4	the	the	DET
ap-10001	311	5	experimental	experimental	ADJ
ap-10001	311	6	data	datum	NOUN
ap-10001	311	7	,	,	PUNCT
ap-10001	311	8	generates	generate	VERB
ap-10001	311	9	equations	equation	NOUN
ap-10001	311	10	that	that	PRON
ap-10001	311	11	establish	establish	VERB
ap-10001	311	12	the	the	DET
ap-10001	311	13	relationship	relationship	NOUN
ap-10001	311	14	between	between	ADP
ap-10001	311	15	the	the	DET
ap-10001	311	16	input	input	NOUN
ap-10001	311	17	parameters	parameter	NOUN
ap-10001	311	18	and	and	CCONJ
ap-10001	311	19	lens	lens	NOUN
ap-10001	311	20	roughness	roughness	NOUN
ap-10001	311	21	,	,	PUNCT
ap-10001	311	22	and	and	CCONJ
ap-10001	311	23	then	then	ADV
ap-10001	311	24	performs	perform	VERB
ap-10001	311	25	the	the	DET
ap-10001	311	26	optimisation	optimisation	NOUN
ap-10001	311	27	process	process	NOUN
ap-10001	311	28	to	to	PART
ap-10001	311	29	determine	determine	VERB
ap-10001	311	30	the	the	DET
ap-10001	311	31	most	most	ADV
ap-10001	311	32	effective	effective	ADJ
ap-10001	311	33	conditions	condition	NOUN
ap-10001	311	34	.	.	PUNCT
ap-10001	312	1	a	a	DET
ap-10001	312	2	graphical	graphical	ADJ
ap-10001	312	3	representation	representation	NOUN
ap-10001	312	4	of	of	ADP
ap-10001	312	5	the	the	DET
ap-10001	312	6	results	result	NOUN
ap-10001	312	7	in	in	ADP
ap-10001	312	8	table	table	NOUN
ap-10001	312	9	7	7	NUM
ap-10001	312	10	is	be	AUX
ap-10001	312	11	shown	show	VERB
ap-10001	312	12	in	in	ADP
ap-10001	312	13	figure	figure	NOUN
ap-10001	312	14	11	11	NUM
ap-10001	312	15	.	.	PUNCT
ap-10001	313	1	figure	figure	VERB
ap-10001	313	2	11	11	NUM
ap-10001	313	3	shows	show	VERB
ap-10001	313	4	a	a	DET
ap-10001	313	5	three	three	NUM
ap-10001	313	6	-	-	PUNCT
ap-10001	313	7	dimensional	dimensional	ADJ
ap-10001	313	8	graph	graph	NOUN
ap-10001	313	9	of	of	ADP
ap-10001	313	10	the	the	DET
ap-10001	313	11	lens	lens	NOUN
ap-10001	313	12	height	height	NOUN
ap-10001	313	13	at	at	ADP
ap-10001	313	14	one	one	NUM
ap-10001	313	15	-	-	PUNCT
ap-10001	313	16	fifth	fifth	NOUN
ap-10001	313	17	of	of	ADP
ap-10001	313	18	the	the	DET
ap-10001	313	19	process	process	NOUN
ap-10001	313	20	.	.	PUNCT
ap-10001	314	1	the	the	DET
ap-10001	314	2	max	max	PROPN
ap-10001	314	3	.	.	PROPN
ap-10001	315	1	and	and	CCONJ
ap-10001	315	2	min	min	PROPN
ap-10001	315	3	.	.	PROPN
ap-10001	315	4	roughness	roughness	NOUN
ap-10001	315	5	values	value	NOUN
ap-10001	315	6	were	be	AUX
ap-10001	315	7	5	5	NUM
ap-10001	315	8	and	and	CCONJ
ap-10001	315	9	85	85	NUM
ap-10001	315	10	nm	nm	NOUN
ap-10001	315	11	,	,	PUNCT
ap-10001	315	12	respectively	respectively	ADV
ap-10001	315	13	.	.	PUNCT
ap-10001	316	1	when	when	SCONJ
ap-10001	316	2	the	the	DET
ap-10001	316	3	laser	laser	NOUN
ap-10001	316	4	power	power	NOUN
ap-10001	316	5	reached	reach	VERB
ap-10001	316	6	a	a	DET
ap-10001	316	7	high	high	ADJ
ap-10001	316	8	level	level	NOUN
ap-10001	316	9	,	,	PUNCT
ap-10001	316	10	the	the	DET
ap-10001	316	11	laser	laser	NOUN
ap-10001	316	12	speed	speed	NOUN
ap-10001	316	13	decreased	decrease	VERB
ap-10001	316	14	,	,	PUNCT
ap-10001	316	15	and	and	CCONJ
ap-10001	316	16	the	the	DET
ap-10001	316	17	number	number	NOUN
ap-10001	316	18	of	of	ADP
ap-10001	316	19	repeated	repeat	VERB
ap-10001	316	20	processes	process	NOUN
ap-10001	316	21	increased	increase	VERB
ap-10001	316	22	,	,	PUNCT
ap-10001	316	23	resulting	result	VERB
ap-10001	316	24	in	in	ADP
ap-10001	316	25	the	the	DET
ap-10001	316	26	complete	complete	ADJ
ap-10001	316	27	melting	melting	NOUN
ap-10001	316	28	of	of	ADP
ap-10001	316	29	the	the	DET
ap-10001	316	30	surface	surface	NOUN
ap-10001	316	31	.	.	PUNCT
ap-10001	317	1	this	this	PRON
ap-10001	317	2	occurred	occur	VERB
ap-10001	317	3	because	because	SCONJ
ap-10001	317	4	the	the	DET
ap-10001	317	5	laser	laser	NOUN
ap-10001	317	6	power	power	NOUN
ap-10001	317	7	exceeded	exceed	VERB
ap-10001	317	8	the	the	DET
ap-10001	317	9	melting	melting	NOUN
ap-10001	317	10	point	point	NOUN
ap-10001	317	11	of	of	ADP
ap-10001	317	12	the	the	DET
ap-10001	317	13	quartz	quartz	NOUN
ap-10001	317	14	material	material	NOUN
ap-10001	317	15	.	.	PUNCT
ap-10001	318	1	furthermore	furthermore	ADV
ap-10001	318	2	,	,	PUNCT
ap-10001	318	3	it	it	PRON
ap-10001	318	4	was	be	AUX
ap-10001	318	5	observed	observe	VERB
ap-10001	318	6	that	that	SCONJ
ap-10001	318	7	there	there	PRON
ap-10001	318	8	was	be	VERB
ap-10001	318	9	an	an	DET
ap-10001	318	10	increase	increase	NOUN
ap-10001	318	11	in	in	ADP
ap-10001	318	12	the	the	DET
ap-10001	318	13	roughness	roughness	NOUN
ap-10001	318	14	value	value	NOUN
ap-10001	318	15	as	as	SCONJ
ap-10001	318	16	the	the	DET
ap-10001	318	17	laser	laser	NOUN
ap-10001	318	18	speed	speed	NOUN
ap-10001	318	19	increased	increase	VERB
ap-10001	318	20	.	.	PUNCT
ap-10001	319	1	the	the	DET
ap-10001	319	2	quadric	quadric	ADJ
ap-10001	319	3	equation	equation	NOUN
ap-10001	319	4	that	that	PRON
ap-10001	319	5	should	should	AUX
ap-10001	319	6	be	be	AUX
ap-10001	319	7	used	use	VERB
ap-10001	319	8	to	to	PART
ap-10001	319	9	evaluate	evaluate	VERB
ap-10001	319	10	the	the	DET
ap-10001	319	11	roughness	roughness	NOUN
ap-10001	319	12	of	of	ADP
ap-10001	319	13	quartz	quartz	NOUN
ap-10001	319	14	microlens	microlen	VERB
ap-10001	319	15	is	be	AUX
ap-10001	319	16	shown	show	VERB
ap-10001	319	17	below	below	ADP
ap-10001	319	18	:	:	PUNCT
ap-10001	320	1	r	r	NOUN
ap-10001	320	2	=	=	NOUN
ap-10001	320	3	12	12	NUM
ap-10001	320	4	+	+	CCONJ
ap-10001	320	5	(	(	PUNCT
ap-10001	320	6	−28)p	−28)p	NOUN
ap-10001	321	1	+	+	CCONJ
ap-10001	321	2	4.25s	4.25s	NUM
ap-10001	321	3	+	+	CCONJ
ap-10001	321	4	(	(	PUNCT
ap-10001	321	5	−7.75)c	−7.75)c	PROPN
ap-10001	321	6	+	+	CCONJ
ap-10001	321	7	(	(	PUNCT
ap-10001	321	8	−1.75)p	−1.75)p	PROPN
ap-10001	321	9	×	×	NOUN
ap-10001	321	10	s	s	PART
ap-10001	321	11	+	+	NUM
ap-10001	321	12	7.75p	7.75p	NUM
ap-10001	321	13	×	×	NOUN
ap-10001	321	14	c	c	NOUN
ap-10001	321	15	+	+	CCONJ
ap-10001	321	16	(	(	PUNCT
ap-10001	321	17	−0.75	−0.75	ADJ
ap-10001	321	18	)	)	PUNCT
ap-10001	321	19	×	×	PROPN
ap-10001	321	20	s	s	PART
ap-10001	321	21	×	×	NOUN
ap-10001	321	22	c	c	NOUN
ap-10001	321	23	+	+	CCONJ
ap-10001	321	24	24.125p	24.125p	NUM
ap-10001	321	25	2	2	NUM
ap-10001	322	1	+	+	CCONJ
ap-10001	322	2	(	(	PUNCT
ap-10001	322	3	−0.375)s2	−0.375)s2	NOUN
ap-10001	322	4	+	+	NOUN
ap-10001	322	5	1.625c2	1.625c2	NUM
ap-10001	322	6	,	,	PUNCT
ap-10001	322	7	(	(	PUNCT
ap-10001	322	8	7	7	X
ap-10001	322	9	)	)	PUNCT
ap-10001	322	10	where	where	SCONJ
ap-10001	322	11	r	r	NOUN
ap-10001	322	12	is	be	AUX
ap-10001	322	13	the	the	DET
ap-10001	322	14	roughness	roughness	NOUN
ap-10001	322	15	[	[	X
ap-10001	322	16	nm	nm	X
ap-10001	322	17	]	]	X
ap-10001	322	18	,	,	PUNCT
ap-10001	322	19	p	p	NOUN
ap-10001	322	20	is	be	AUX
ap-10001	322	21	the	the	DET
ap-10001	322	22	co2	co2	NOUN
ap-10001	322	23	laser	laser	NOUN
ap-10001	322	24	power	power	NOUN
ap-10001	323	1	[	[	X
ap-10001	323	2	w	w	X
ap-10001	323	3	]	]	X
ap-10001	323	4	,	,	PUNCT
ap-10001	323	5	s	s	X
ap-10001	323	6	is	be	AUX
ap-10001	323	7	the	the	DET
ap-10001	323	8	laser	laser	NOUN
ap-10001	323	9	speed	speed	NOUN
ap-10001	323	10	[	[	X
ap-10001	323	11	mm	mm	NOUN
ap-10001	323	12	s−1	s−1	PROPN
ap-10001	323	13	]	]	PUNCT
ap-10001	323	14	,	,	PUNCT
ap-10001	323	15	and	and	CCONJ
ap-10001	323	16	c	c	NOUN
ap-10001	323	17	is	be	AUX
ap-10001	323	18	the	the	DET
ap-10001	323	19	repeated	repeat	VERB
ap-10001	323	20	processes	process	NOUN
ap-10001	323	21	.	.	PUNCT
ap-10001	324	1	the	the	DET
ap-10001	324	2	final	final	ADJ
ap-10001	324	3	regression	regression	NOUN
ap-10001	324	4	equation	equation	NOUN
ap-10001	324	5	was	be	AUX
ap-10001	324	6	also	also	ADV
ap-10001	324	7	an	an	DET
ap-10001	324	8	excellent	excellent	ADJ
ap-10001	324	9	way	way	NOUN
ap-10001	324	10	to	to	PART
ap-10001	324	11	predict	predict	VERB
ap-10001	324	12	and	and	CCONJ
ap-10001	324	13	study	study	VERB
ap-10001	324	14	how	how	SCONJ
ap-10001	324	15	the	the	DET
ap-10001	324	16	parameters	parameter	NOUN
ap-10001	324	17	affect	affect	VERB
ap-10001	324	18	each	each	DET
ap-10001	324	19	other	other	ADJ
ap-10001	324	20	.	.	PUNCT
ap-10001	325	1	the	the	DET
ap-10001	325	2	optimum	optimum	ADJ
ap-10001	325	3	values	value	NOUN
ap-10001	325	4	of	of	ADP
ap-10001	325	5	the	the	DET
ap-10001	325	6	output	output	NOUN
ap-10001	325	7	parameters	parameter	NOUN
ap-10001	325	8	for	for	ADP
ap-10001	325	9	tables	table	NOUN
ap-10001	325	10	5	5	NUM
ap-10001	325	11	and	and	CCONJ
ap-10001	325	12	6	6	NUM
ap-10001	325	13	are	be	AUX
ap-10001	325	14	shown	show	VERB
ap-10001	325	15	in	in	ADP
ap-10001	325	16	figure	figure	NOUN
ap-10001	325	17	12	12	NUM
ap-10001	325	18	.	.	PUNCT
ap-10001	326	1	figure	figure	NOUN
ap-10001	326	2	12	12	NUM
ap-10001	326	3	shows	show	VERB
ap-10001	326	4	the	the	DET
ap-10001	326	5	optimum	optimum	ADJ
ap-10001	326	6	values	value	NOUN
ap-10001	326	7	of	of	ADP
ap-10001	326	8	the	the	DET
ap-10001	326	9	output	output	NOUN
ap-10001	326	10	response	response	NOUN
ap-10001	326	11	for	for	SCONJ
ap-10001	326	12	the	the	DET
ap-10001	326	13	quartz	quartz	NOUN
ap-10001	326	14	microlens	microlen	VERB
ap-10001	326	15	.	.	PUNCT
ap-10001	327	1	the	the	DET
ap-10001	327	2	optimum	optimum	ADJ
ap-10001	327	3	na	na	NOUN
ap-10001	327	4	and	and	CCONJ
ap-10001	327	5	roughness	roughness	NOUN
ap-10001	327	6	values	value	NOUN
ap-10001	327	7	were	be	AUX
ap-10001	327	8	0.494	0.494	NUM
ap-10001	327	9	and	and	CCONJ
ap-10001	327	10	4.5	4.5	NUM
ap-10001	327	11	nm	nm	NOUN
ap-10001	327	12	,	,	PUNCT
ap-10001	327	13	respectively	respectively	ADV
ap-10001	327	14	.	.	PUNCT
ap-10001	328	1	4	4	X
ap-10001	328	2	.	.	X
ap-10001	328	3	conclusion	conclusion	NOUN
ap-10001	328	4	this	this	DET
ap-10001	328	5	study	study	NOUN
ap-10001	328	6	used	use	VERB
ap-10001	328	7	expert	expert	NOUN
ap-10001	328	8	analysis	analysis	NOUN
ap-10001	328	9	software	software	NOUN
ap-10001	328	10	to	to	PART
ap-10001	328	11	optimise	optimise	VERB
ap-10001	328	12	the	the	DET
ap-10001	328	13	parameters	parameter	NOUN
ap-10001	328	14	of	of	ADP
ap-10001	328	15	laser	laser	PROPN
ap-10001	328	16	micro	micro	PROPN
ap-10001	328	17	/	/	PROPN
ap-10001	328	18	nano	nano	NOUN
ap-10001	328	19	processing	processing	NOUN
ap-10001	328	20	.	.	PUNCT
ap-10001	329	1	the	the	DET
ap-10001	329	2	comsol	comsol	NOUN
ap-10001	329	3	software	software	PROPN
ap-10001	329	4	simulation	simulation	NOUN
ap-10001	329	5	was	be	AUX
ap-10001	329	6	used	use	VERB
ap-10001	329	7	to	to	PART
ap-10001	329	8	analyse	analyse	VERB
ap-10001	329	9	the	the	DET
ap-10001	329	10	thermal	thermal	ADJ
ap-10001	329	11	distribution	distribution	NOUN
ap-10001	329	12	on	on	ADP
ap-10001	329	13	the	the	DET
ap-10001	329	14	surface	surface	NOUN
ap-10001	329	15	and	and	CCONJ
ap-10001	329	16	in	in	ADP
ap-10001	329	17	the	the	DET
ap-10001	329	18	area	area	NOUN
ap-10001	329	19	beneath	beneath	ADP
ap-10001	329	20	the	the	DET
ap-10001	329	21	surface	surface	NOUN
ap-10001	329	22	of	of	ADP
ap-10001	329	23	silicon	silicon	NOUN
ap-10001	329	24	wafers	wafer	NOUN
ap-10001	329	25	and	and	CCONJ
ap-10001	329	26	quartz	quartz	NOUN
ap-10001	329	27	sheets	sheet	NOUN
ap-10001	329	28	under	under	ADP
ap-10001	329	29	laser	laser	NOUN
ap-10001	329	30	irradiation	irradiation	NOUN
ap-10001	329	31	.	.	PUNCT
ap-10001	330	1	using	use	VERB
ap-10001	330	2	the	the	DET
ap-10001	330	3	nd	nd	NOUN
ap-10001	330	4	:	:	PUNCT
ap-10001	330	5	yag	yag	NOUN
ap-10001	330	6	laser	laser	NOUN
ap-10001	330	7	,	,	PUNCT
ap-10001	330	8	fibre	fibre	NOUN
ap-10001	330	9	laser	laser	NOUN
ap-10001	330	10	,	,	PUNCT
ap-10001	330	11	and	and	CCONJ
ap-10001	330	12	co2	co2	NOUN
ap-10001	330	13	laser	laser	NOUN
ap-10001	330	14	in	in	ADP
ap-10001	330	15	micro	micro	PROPN
ap-10001	330	16	/	/	NOUN
ap-10001	330	17	nano	nano	NOUN
ap-10001	330	18	machining	machining	NOUN
ap-10001	330	19	of	of	ADP
ap-10001	330	20	silicon	silicon	NOUN
ap-10001	330	21	and	and	CCONJ
ap-10001	330	22	quartz	quartz	NOUN
ap-10001	330	23	resulted	result	VERB
ap-10001	330	24	in	in	ADP
ap-10001	330	25	the	the	DET
ap-10001	330	26	formation	formation	NOUN
ap-10001	330	27	of	of	ADP
ap-10001	330	28	stable	stable	ADJ
ap-10001	330	29	silicon	silicon	NOUN
ap-10001	330	30	nanoparticles	nanoparticle	NOUN
ap-10001	330	31	and	and	CCONJ
ap-10001	330	32	the	the	DET
ap-10001	330	33	creation	creation	NOUN
ap-10001	330	34	of	of	ADP
ap-10001	330	35	a	a	DET
ap-10001	330	36	quartz	quartz	NOUN
ap-10001	330	37	microlens	microlen	VERB
ap-10001	330	38	array	array	NOUN
ap-10001	330	39	.	.	PUNCT
ap-10001	331	1	furthermore	furthermore	ADV
ap-10001	331	2	,	,	PUNCT
ap-10001	331	3	the	the	DET
ap-10001	331	4	numerical	numerical	ADJ
ap-10001	331	5	optimisation	optimisation	NOUN
ap-10001	331	6	using	use	VERB
ap-10001	331	7	the	the	DET
ap-10001	331	8	doe	doe	NOUN
ap-10001	331	9	software	software	NOUN
ap-10001	331	10	yielded	yield	VERB
ap-10001	331	11	silicon	silicon	NOUN
ap-10001	331	12	nanoparticles	nanoparticle	NOUN
ap-10001	331	13	with	with	ADP
ap-10001	331	14	desired	desire	VERB
ap-10001	331	15	properties	property	NOUN
ap-10001	331	16	and	and	CCONJ
ap-10001	331	17	quartz	quartz	NOUN
ap-10001	331	18	microlenses	microlense	NOUN
ap-10001	331	19	with	with	ADP
ap-10001	331	20	specific	specific	ADJ
ap-10001	331	21	dimensions	dimension	NOUN
ap-10001	331	22	and	and	CCONJ
ap-10001	331	23	characteristics	characteristic	NOUN
ap-10001	331	24	.	.	PUNCT
ap-10001	332	1	the	the	DET
ap-10001	332	2	optimal	optimal	ADJ
ap-10001	332	3	parameter	parameter	NOUN
ap-10001	332	4	for	for	ADP
ap-10001	332	5	silicon	silicon	PROPN
ap-10001	332	6	nps	nps	PROPN
ap-10001	332	7	(	(	PUNCT
ap-10001	332	8	stability	stability	NOUN
ap-10001	332	9	)	)	PUNCT
ap-10001	332	10	was	be	AUX
ap-10001	332	11	33	33	NUM
ap-10001	332	12	mv	mv	NOUN
ap-10001	332	13	,	,	PUNCT
ap-10001	332	14	while	while	SCONJ
ap-10001	332	15	for	for	ADP
ap-10001	332	16	quartz	quartz	NOUN
ap-10001	332	17	microlenses	microlense	NOUN
ap-10001	332	18	(	(	PUNCT
ap-10001	332	19	na	na	NOUN
ap-10001	332	20	and	and	CCONJ
ap-10001	332	21	roughness	roughness	NOUN
ap-10001	332	22	)	)	PUNCT
ap-10001	332	23	,	,	PUNCT
ap-10001	332	24	it	it	PRON
ap-10001	332	25	was	be	AUX
ap-10001	332	26	0.494	0.494	NUM
ap-10001	332	27	and	and	CCONJ
ap-10001	332	28	4.5	4.5	NUM
ap-10001	332	29	nm	nm	NOUN
ap-10001	332	30	,	,	PUNCT
ap-10001	332	31	respectively	respectively	ADV
ap-10001	332	32	.	.	PUNCT
ap-10001	333	1	finally	finally	ADV
ap-10001	333	2	,	,	PUNCT
ap-10001	333	3	the	the	DET
ap-10001	333	4	controllable	controllable	ADJ
ap-10001	333	5	laser	laser	NOUN
ap-10001	333	6	micro	micro	NOUN
ap-10001	333	7	/	/	NOUN
ap-10001	333	8	nano	nano	NOUN
ap-10001	333	9	machining	machining	NOUN
ap-10001	333	10	process	process	NOUN
ap-10001	333	11	demonstrated	demonstrate	VERB
ap-10001	333	12	the	the	DET
ap-10001	333	13	potential	potential	ADJ
ap-10001	333	14	applications	application	NOUN
ap-10001	333	15	of	of	ADP
ap-10001	333	16	silicon	silicon	NOUN
ap-10001	333	17	nanoparticles	nanoparticle	NOUN
ap-10001	333	18	and	and	CCONJ
ap-10001	333	19	quartz	quartz	NOUN
ap-10001	333	20	microlenses	microlense	NOUN
ap-10001	333	21	in	in	ADP
ap-10001	333	22	optoelectronics	optoelectronic	NOUN
ap-10001	333	23	and	and	CCONJ
ap-10001	333	24	biological	biological	ADJ
ap-10001	333	25	imaging	imaging	NOUN
ap-10001	333	26	,	,	PUNCT
ap-10001	333	27	which	which	PRON
ap-10001	333	28	can	can	AUX
ap-10001	333	29	benefit	benefit	VERB
ap-10001	333	30	from	from	ADP
ap-10001	333	31	the	the	DET
ap-10001	333	32	unique	unique	ADJ
ap-10001	333	33	features	feature	NOUN
ap-10001	333	34	offered	offer	VERB
ap-10001	333	35	by	by	ADP
ap-10001	333	36	these	these	DET
ap-10001	333	37	lenses	lense	NOUN
ap-10001	333	38	.	.	PUNCT
ap-10001	334	1	future	future	ADJ
ap-10001	334	2	endeavours	endeavour	VERB
ap-10001	334	3	417	417	NUM
ap-10001	334	4	m.	m.	NOUN
ap-10001	334	5	j.	j.	PROPN
ap-10001	334	6	mahmoud	mahmoud	PROPN
ap-10001	334	7	,	,	PUNCT
ap-10001	334	8	b.	b.	PROPN
ap-10001	334	9	g.	g.	PROPN
ap-10001	334	10	rasheed	rasheed	PROPN
ap-10001	334	11	,	,	PUNCT
ap-10001	334	12	m.	m.	NOUN
ap-10001	334	13	m.	m.	PROPN
ap-10001	334	14	hanon	hanon	PROPN
ap-10001	334	15	acta	acta	PROPN
ap-10001	334	16	polytechnica	polytechnica	PROPN
ap-10001	334	17	(	(	PUNCT
ap-10001	334	18	a	a	NOUN
ap-10001	334	19	)	)	PUNCT
ap-10001	334	20	.	.	PUNCT
ap-10001	335	1	no	no	INTJ
ap-10001	335	2	.	.	PUNCT
ap-10001	336	1	of	of	ADP
ap-10001	336	2	repeated	repeat	VERB
ap-10001	336	3	processes	process	NOUN
ap-10001	336	4	:	:	PUNCT
ap-10001	336	5	1	1	X
ap-10001	336	6	.	.	PUNCT
ap-10001	336	7	(	(	PUNCT
ap-10001	336	8	b	b	NOUN
ap-10001	336	9	)	)	PUNCT
ap-10001	336	10	.	.	PUNCT
ap-10001	337	1	no	no	INTJ
ap-10001	337	2	.	.	PUNCT
ap-10001	338	1	of	of	ADP
ap-10001	338	2	repeated	repeat	VERB
ap-10001	338	3	processes	process	NOUN
ap-10001	338	4	:	:	PUNCT
ap-10001	338	5	3	3	X
ap-10001	338	6	.	.	PUNCT
ap-10001	338	7	(	(	PUNCT
ap-10001	338	8	c	c	NOUN
ap-10001	338	9	)	)	PUNCT
ap-10001	338	10	.	.	PUNCT
ap-10001	339	1	no	no	INTJ
ap-10001	339	2	.	.	PUNCT
ap-10001	340	1	of	of	ADP
ap-10001	340	2	repeated	repeat	VERB
ap-10001	340	3	processes	process	NOUN
ap-10001	340	4	:	:	PUNCT
ap-10001	340	5	5	5	X
ap-10001	340	6	.	.	X
ap-10001	340	7	figure	figure	NOUN
ap-10001	340	8	11	11	NUM
ap-10001	340	9	.	.	PUNCT
ap-10001	341	1	the	the	DET
ap-10001	341	2	roughness	roughness	NOUN
ap-10001	341	3	3d	3d	PROPN
ap-10001	341	4	curve	curve	NOUN
ap-10001	341	5	for	for	ADP
ap-10001	341	6	laser	laser	NOUN
ap-10001	341	7	power	power	NOUN
ap-10001	341	8	and	and	CCONJ
ap-10001	341	9	laser	laser	NOUN
ap-10001	341	10	speed	speed	NOUN
ap-10001	341	11	at	at	ADP
ap-10001	341	12	no	no	NOUN
ap-10001	341	13	.	.	PUNCT
ap-10001	341	14	of	of	ADP
ap-10001	341	15	repeated	repeat	VERB
ap-10001	341	16	processes	process	NOUN
ap-10001	341	17	:	:	PUNCT
ap-10001	341	18	1	1	NUM
ap-10001	341	19	,	,	PUNCT
ap-10001	341	20	3	3	NUM
ap-10001	341	21	,	,	PUNCT
ap-10001	341	22	and	and	CCONJ
ap-10001	341	23	5	5	NUM
ap-10001	341	24	times	time	NOUN
ap-10001	341	25	.	.	PUNCT
ap-10001	342	1	should	should	AUX
ap-10001	342	2	focus	focus	VERB
ap-10001	342	3	on	on	ADP
ap-10001	342	4	further	further	ADJ
ap-10001	342	5	parameter	parameter	NOUN
ap-10001	342	6	optimisation	optimisation	NOUN
ap-10001	342	7	for	for	ADP
ap-10001	342	8	laser	laser	NOUN
ap-10001	342	9	microprocessing	microprocessing	NOUN
ap-10001	342	10	,	,	PUNCT
ap-10001	342	11	investigating	investigate	VERB
ap-10001	342	12	alternative	alternative	ADJ
ap-10001	342	13	materials	material	NOUN
ap-10001	342	14	and	and	CCONJ
ap-10001	342	15	scalable	scalable	ADJ
ap-10001	342	16	production	production	NOUN
ap-10001	342	17	methods	method	NOUN
ap-10001	342	18	.	.	PUNCT
ap-10001	343	1	the	the	DET
ap-10001	343	2	aim	aim	NOUN
ap-10001	343	3	is	be	AUX
ap-10001	343	4	to	to	PART
ap-10001	343	5	improve	improve	VERB
ap-10001	343	6	precision	precision	NOUN
ap-10001	343	7	engineering	engineering	NOUN
ap-10001	343	8	,	,	PUNCT
ap-10001	343	9	increase	increase	VERB
ap-10001	343	10	the	the	DET
ap-10001	343	11	versatility	versatility	NOUN
ap-10001	343	12	of	of	ADP
ap-10001	343	13	materials	material	NOUN
ap-10001	343	14	,	,	PUNCT
ap-10001	343	15	and	and	CCONJ
ap-10001	343	16	enable	enable	VERB
ap-10001	343	17	the	the	DET
ap-10001	343	18	real	real	ADJ
ap-10001	343	19	-	-	PUNCT
ap-10001	343	20	world	world	NOUN
ap-10001	343	21	application	application	NOUN
ap-10001	343	22	of	of	ADP
ap-10001	343	23	silicon	silicon	NOUN
ap-10001	343	24	nanoparticles	nanoparticle	NOUN
ap-10001	343	25	and	and	CCONJ
ap-10001	343	26	quartz	quartz	NOUN
ap-10001	343	27	microlenses	microlense	NOUN
ap-10001	343	28	for	for	ADP
ap-10001	343	29	various	various	ADJ
ap-10001	343	30	purposes	purpose	NOUN
ap-10001	343	31	.	.	PUNCT
ap-10001	344	1	(	(	PUNCT
ap-10001	344	2	a	a	X
ap-10001	344	3	)	)	PUNCT
ap-10001	344	4	.	.	PUNCT
ap-10001	345	1	na	na	X
ap-10001	345	2	.	.	PUNCT
ap-10001	346	1	(	(	PUNCT
ap-10001	346	2	b	b	NOUN
ap-10001	346	3	)	)	PUNCT
ap-10001	346	4	.	.	PUNCT
ap-10001	347	1	roughness	roughness	NOUN
ap-10001	347	2	.	.	PUNCT
ap-10001	348	1	figure	figure	NOUN
ap-10001	348	2	12	12	NUM
ap-10001	348	3	.	.	PUNCT
ap-10001	349	1	the	the	DET
ap-10001	349	2	contour	contour	NOUN
ap-10001	349	3	graph	graph	NOUN
ap-10001	349	4	of	of	ADP
ap-10001	349	5	optimum	optimum	ADJ
ap-10001	349	6	value	value	NOUN
ap-10001	349	7	for	for	ADP
ap-10001	349	8	:	:	PUNCT
ap-10001	349	9	na	na	NOUN
ap-10001	349	10	and	and	CCONJ
ap-10001	349	11	roughness	roughness	NOUN
ap-10001	349	12	.	.	PUNCT
ap-10001	350	1	references	reference	NOUN
ap-10001	350	2	[	[	X
ap-10001	350	3	1	1	NUM
ap-10001	350	4	]	]	PUNCT
ap-10001	350	5	l.	l.	PROPN
ap-10001	350	6	rihakova	rihakova	PROPN
ap-10001	350	7	,	,	PUNCT
ap-10001	350	8	h.	h.	PROPN
ap-10001	350	9	chmelickova	chmelickova	PROPN
ap-10001	350	10	.	.	PUNCT
ap-10001	351	1	laser	laser	NOUN
ap-10001	351	2	micromachining	micromachining	NOUN
ap-10001	351	3	of	of	ADP
ap-10001	351	4	glass	glass	NOUN
ap-10001	351	5	,	,	PUNCT
ap-10001	351	6	silicon	silicon	NOUN
ap-10001	351	7	,	,	PUNCT
ap-10001	351	8	and	and	CCONJ
ap-10001	351	9	ceramics	ceramic	NOUN
ap-10001	351	10	.	.	PUNCT
ap-10001	352	1	a	a	DET
ap-10001	352	2	review	review	NOUN
ap-10001	352	3	.	.	PUNCT
ap-10001	353	1	european	european	PROPN
ap-10001	353	2	international	international	PROPN
ap-10001	353	3	journal	journal	PROPN
ap-10001	353	4	of	of	ADP
ap-10001	353	5	science	science	NOUN
ap-10001	353	6	and	and	CCONJ
ap-10001	353	7	technology	technology	NOUN
ap-10001	353	8	4(7):41–49	4(7):41–49	NUM
ap-10001	353	9	,	,	PUNCT
ap-10001	353	10	2015	2015	NUM
ap-10001	353	11	.	.	PUNCT
ap-10001	354	1	[	[	X
ap-10001	354	2	2	2	X
ap-10001	354	3	]	]	PUNCT
ap-10001	354	4	j.	j.	PROPN
ap-10001	354	5	wang	wang	PROPN
ap-10001	354	6	,	,	PUNCT
ap-10001	354	7	f.	f.	PROPN
ap-10001	354	8	fang	fang	PROPN
ap-10001	354	9	,	,	PUNCT
ap-10001	354	10	h.	h.	PROPN
ap-10001	354	11	an	an	PROPN
ap-10001	354	12	,	,	PUNCT
ap-10001	354	13	et	et	PROPN
ap-10001	354	14	al	al	PROPN
ap-10001	354	15	.	.	PROPN
ap-10001	354	16	laser	laser	NOUN
ap-10001	354	17	machining	machining	NOUN
ap-10001	354	18	fundamentals	fundamental	NOUN
ap-10001	354	19	:	:	PUNCT
ap-10001	354	20	micro	micro	NOUN
ap-10001	354	21	,	,	PUNCT
ap-10001	354	22	nano	nano	NOUN
ap-10001	354	23	,	,	PUNCT
ap-10001	354	24	atomic	atomic	ADJ
ap-10001	354	25	and	and	CCONJ
ap-10001	354	26	close	close	ADJ
ap-10001	354	27	-	-	PUNCT
ap-10001	354	28	to	to	ADP
ap-10001	354	29	-	-	PUNCT
ap-10001	354	30	atomic	atomic	ADJ
ap-10001	354	31	scales	scale	NOUN
ap-10001	354	32	.	.	PUNCT
ap-10001	355	1	international	international	ADJ
ap-10001	355	2	journal	journal	NOUN
ap-10001	355	3	of	of	ADP
ap-10001	355	4	extreme	extreme	ADJ
ap-10001	355	5	manufacturing	manufacturing	NOUN
ap-10001	355	6	5(1):012005	5(1):012005	NUM
ap-10001	355	7	,	,	PUNCT
ap-10001	355	8	2023	2023	NUM
ap-10001	355	9	.	.	PUNCT
ap-10001	356	1	https://doi.org/10.1088/2631-7990/acb134	https://doi.org/10.1088/2631-7990/acb134	PROPN
ap-10001	357	1	[	[	X
ap-10001	357	2	3	3	X
ap-10001	357	3	]	]	PUNCT
ap-10001	357	4	s.	s.	PROPN
ap-10001	357	5	n.	n.	PROPN
ap-10001	357	6	grigoriev	grigoriev	PROPN
ap-10001	357	7	,	,	PUNCT
ap-10001	357	8	m.	m.	NOUN
ap-10001	357	9	a.	a.	PROPN
ap-10001	357	10	volosova	volosova	PROPN
ap-10001	357	11	,	,	PUNCT
ap-10001	357	12	a.	a.	NOUN
ap-10001	357	13	a.	a.	NOUN
ap-10001	357	14	okunkova	okunkova	PROPN
ap-10001	357	15	.	.	PUNCT
ap-10001	358	1	advances	advance	NOUN
ap-10001	358	2	in	in	ADP
ap-10001	358	3	laser	laser	NOUN
ap-10001	358	4	materials	material	NOUN
ap-10001	358	5	processing	processing	NOUN
ap-10001	358	6	.	.	PUNCT
ap-10001	359	1	metals	metal	NOUN
ap-10001	359	2	12(6):917	12(6):917	NUM
ap-10001	359	3	,	,	PUNCT
ap-10001	359	4	2022	2022	NUM
ap-10001	359	5	.	.	PUNCT
ap-10001	360	1	https://doi.org/10.3390/met12060917	https://doi.org/10.3390/met12060917	NOUN
ap-10001	360	2	[	[	X
ap-10001	360	3	4	4	X
ap-10001	360	4	]	]	X
ap-10001	360	5	h.	h.	PROPN
ap-10001	360	6	minghui	minghui	PROPN
ap-10001	360	7	.	.	PUNCT
ap-10001	361	1	laser	laser	NOUN
ap-10001	361	2	-	-	PUNCT
ap-10001	361	3	material	material	NOUN
ap-10001	361	4	interaction	interaction	NOUN
ap-10001	361	5	and	and	CCONJ
ap-10001	361	6	its	its	PRON
ap-10001	361	7	applications	application	NOUN
ap-10001	361	8	in	in	ADP
ap-10001	361	9	surface	surface	NOUN
ap-10001	361	10	micro	micro	NOUN
ap-10001	361	11	/	/	NOUN
ap-10001	361	12	nanoprocessing	nanoprocessing	NOUN
ap-10001	361	13	.	.	PUNCT
ap-10001	362	1	aip	aip	PROPN
ap-10001	362	2	conference	conference	NOUN
ap-10001	362	3	proceedings	proceeding	NOUN
ap-10001	362	4	1278(1):293–302	1278(1):293–302	NUM
ap-10001	362	5	,	,	PUNCT
ap-10001	362	6	2010	2010	NUM
ap-10001	362	7	.	.	PUNCT
ap-10001	363	1	https://doi.org/10.1063/1.3507115	https://doi.org/10.1063/1.3507115	PROPN
ap-10001	363	2	418	418	NUM
ap-10001	363	3	https://doi.org/10.1088/2631-7990/acb134	https://doi.org/10.1088/2631-7990/acb134	PROPN
ap-10001	363	4	https://doi.org/10.3390/met12060917	https://doi.org/10.3390/met12060917	NOUN
ap-10001	363	5	https://doi.org/10.1063/1.3507115	https://doi.org/10.1063/1.3507115	PROPN
ap-10001	363	6	vol	vol	NOUN
ap-10001	363	7	.	.	PROPN
ap-10001	364	1	65	65	NUM
ap-10001	364	2	no	no	NOUN
ap-10001	364	3	.	.	PUNCT
ap-10001	365	1	4/2025	4/2025	NUM
ap-10001	365	2	improving	improve	VERB
ap-10001	365	3	the	the	DET
ap-10001	365	4	production	production	NOUN
ap-10001	365	5	process	process	NOUN
ap-10001	365	6	of	of	ADP
ap-10001	365	7	silicon	silicon	NOUN
ap-10001	365	8	nanoparticle	nanoparticle	NOUN
ap-10001	365	9	.	.	PUNCT
ap-10001	365	10	.	.	PUNCT
ap-10001	365	11	.	.	PUNCT
ap-10001	366	1	[	[	X
ap-10001	366	2	5	5	X
ap-10001	366	3	]	]	PUNCT
ap-10001	366	4	f.	f.	PROPN
ap-10001	366	5	a.	a.	PROPN
ap-10001	366	6	lasagni	lasagni	PROPN
ap-10001	366	7	,	,	PUNCT
ap-10001	366	8	a.	a.	PROPN
ap-10001	366	9	f.	f.	PROPN
ap-10001	366	10	lasagni	lasagni	PROPN
ap-10001	366	11	(	(	PUNCT
ap-10001	366	12	eds	ed	NOUN
ap-10001	366	13	.	.	PUNCT
ap-10001	366	14	)	)	PUNCT
ap-10001	366	15	.	.	PUNCT
ap-10001	367	1	fabrication	fabrication	NOUN
ap-10001	367	2	and	and	CCONJ
ap-10001	367	3	characterization	characterization	NOUN
ap-10001	367	4	in	in	ADP
ap-10001	367	5	the	the	DET
ap-10001	367	6	micro	micro	ADJ
ap-10001	367	7	-	-	ADJ
ap-10001	367	8	nano	nano	ADJ
ap-10001	367	9	range	range	NOUN
ap-10001	367	10	.	.	PUNCT
ap-10001	368	1	advanced	advanced	ADJ
ap-10001	368	2	structured	structured	ADJ
ap-10001	368	3	materials	material	NOUN
ap-10001	368	4	.	.	PUNCT
ap-10001	369	1	springer	springer	PROPN
ap-10001	369	2	berlin	berlin	PROPN
ap-10001	369	3	,	,	PUNCT
ap-10001	369	4	heidelberg	heidelberg	PROPN
ap-10001	369	5	,	,	PUNCT
ap-10001	369	6	germany	germany	PROPN
ap-10001	369	7	,	,	PUNCT
ap-10001	369	8	2011	2011	NUM
ap-10001	369	9	.	.	PUNCT
ap-10001	370	1	https://doi.org/10.1007/978-3-642-17782-8	https://doi.org/10.1007/978-3-642-17782-8	PROPN
ap-10001	371	1	[	[	X
ap-10001	371	2	6	6	NUM
ap-10001	371	3	]	]	PUNCT
ap-10001	371	4	w.	w.	PROPN
ap-10001	371	5	a.	a.	PROPN
ap-10001	371	6	ghaly	ghaly	PROPN
ap-10001	371	7	,	,	PUNCT
ap-10001	371	8	h.	h.	PROPN
ap-10001	371	9	t.	t.	PROPN
ap-10001	371	10	mohsen	mohsen	PROPN
ap-10001	371	11	.	.	PUNCT
ap-10001	372	1	laser	laser	NOUN
ap-10001	372	2	-	-	PUNCT
ap-10001	372	3	induced	induce	VERB
ap-10001	372	4	silicon	silicon	NOUN
ap-10001	372	5	nanocolumns	nanocolumn	NOUN
ap-10001	372	6	by	by	ADP
ap-10001	372	7	ablation	ablation	NOUN
ap-10001	372	8	technique	technique	NOUN
ap-10001	372	9	.	.	PUNCT
ap-10001	373	1	journal	journal	NOUN
ap-10001	373	2	of	of	ADP
ap-10001	373	3	radiation	radiation	NOUN
ap-10001	373	4	research	research	NOUN
ap-10001	373	5	and	and	CCONJ
ap-10001	373	6	applied	apply	VERB
ap-10001	373	7	sciences	science	NOUN
ap-10001	373	8	13(1):398–405	13(1):398–405	PROPN
ap-10001	373	9	,	,	PUNCT
ap-10001	373	10	2020	2020	NUM
ap-10001	373	11	.	.	PUNCT
ap-10001	373	12	https://doi.org/10.1080/16878507.2020.1740395	https://doi.org/10.1080/16878507.2020.1740395	PUNCT
ap-10001	374	1	[	[	X
ap-10001	374	2	7	7	NUM
ap-10001	374	3	]	]	PUNCT
ap-10001	374	4	m.	m.	NOUN
ap-10001	374	5	j.	j.	PROPN
ap-10001	374	6	mahmoud	mahmoud	PROPN
ap-10001	374	7	,	,	PUNCT
ap-10001	374	8	b.	b.	PROPN
ap-10001	374	9	g.	g.	PROPN
ap-10001	374	10	rasheed	rasheed	PROPN
ap-10001	374	11	.	.	PUNCT
ap-10001	374	12	synthesis	synthesis	NOUN
ap-10001	374	13	of	of	ADP
ap-10001	374	14	nano	nano	NOUN
ap-10001	374	15	silicon	silicon	NOUN
ap-10001	374	16	using	use	VERB
ap-10001	374	17	lasers	laser	NOUN
ap-10001	374	18	.	.	PUNCT
ap-10001	375	1	international	international	ADJ
ap-10001	375	2	journal	journal	PROPN
ap-10001	375	3	of	of	ADP
ap-10001	375	4	nanoelectronics	nanoelectronic	NOUN
ap-10001	375	5	and	and	CCONJ
ap-10001	375	6	materials	material	NOUN
ap-10001	375	7	17(1):28–34	17(1):28–34	NUM
ap-10001	375	8	,	,	PUNCT
ap-10001	375	9	2024	2024	NUM
ap-10001	375	10	.	.	PUNCT
ap-10001	376	1	https://doi.org/10.58915/ijneam.v17i1.449	https://doi.org/10.58915/ijneam.v17i1.449	NOUN
ap-10001	377	1	[	[	X
ap-10001	377	2	8	8	NUM
ap-10001	377	3	]	]	X
ap-10001	377	4	c.	c.	PROPN
ap-10001	377	5	gaudiuso	gaudiuso	PROPN
ap-10001	377	6	,	,	PUNCT
ap-10001	377	7	a.	a.	PROPN
ap-10001	377	8	volpe	volpe	PROPN
ap-10001	377	9	,	,	PUNCT
ap-10001	377	10	a.	a.	PROPN
ap-10001	377	11	ancona	ancona	PROPN
ap-10001	377	12	.	.	PUNCT
ap-10001	378	1	single	single	ADJ
ap-10001	378	2	-	-	PUNCT
ap-10001	378	3	pass	pass	VERB
ap-10001	378	4	direct	direct	ADJ
ap-10001	378	5	laser	laser	NOUN
ap-10001	378	6	cutting	cutting	NOUN
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ap-10001	378	8	quartz	quartz	NOUN
ap-10001	378	9	by	by	ADP
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ap-10001	378	13	.	.	PUNCT
ap-10001	379	1	in	in	ADP
ap-10001	379	2	u.	u.	PROPN
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ap-10001	379	5	a.	a.	PROPN
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ap-10001	379	12	.	.	PUNCT
ap-10001	379	13	)	)	PUNCT
ap-10001	379	14	,	,	PUNCT
ap-10001	379	15	laserbased	laserbase	VERB
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ap-10001	379	17	nanoprocessing	nanoprocesse	VERB
ap-10001	379	18	xv	xv	PROPN
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ap-10001	379	20	vol	vol	NOUN
ap-10001	379	21	.	.	PROPN
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ap-10001	379	23	,	,	PUNCT
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ap-10001	379	25	116740e	116740e	NOUN
ap-10001	379	26	.	.	PUNCT
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ap-10001	380	2	society	society	NOUN
ap-10001	380	3	for	for	ADP
ap-10001	380	4	optics	optic	NOUN
ap-10001	380	5	and	and	CCONJ
ap-10001	380	6	photonics	photonic	NOUN
ap-10001	380	7	,	,	PUNCT
ap-10001	380	8	spie	spie	NOUN
ap-10001	380	9	,	,	PUNCT
ap-10001	380	10	2021	2021	NUM
ap-10001	380	11	.	.	PUNCT
ap-10001	381	1	https://doi.org/10.1117/12.2577177	https://doi.org/10.1117/12.2577177	X
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ap-10001	382	3	]	]	PUNCT
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ap-10001	382	5	d.	d.	PROPN
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ap-10001	382	8	b.	b.	PROPN
ap-10001	382	9	b.	b.	PROPN
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ap-10001	383	2	-	-	NOUN
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ap-10001	383	6	wafer	wafer	NOUN
ap-10001	383	7	by	by	ADP
ap-10001	383	8	nd	nd	ADP
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ap-10001	383	12	beam	beam	NOUN
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ap-10001	383	14	.	.	PUNCT
ap-10001	384	1	iop	iop	PROPN
ap-10001	384	2	conference	conference	PROPN
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ap-10001	384	4	:	:	PUNCT
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ap-10001	384	6	science	science	NOUN
ap-10001	384	7	and	and	CCONJ
ap-10001	384	8	engineering	engineering	NOUN
ap-10001	384	9	377(1):012219	377(1):012219	PROPN
ap-10001	384	10	,	,	PUNCT
ap-10001	384	11	2018	2018	NUM
ap-10001	384	12	.	.	PUNCT
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ap-10001	385	3	10	10	NUM
ap-10001	385	4	]	]	X
ap-10001	385	5	i.	i.	PROPN
ap-10001	385	6	sopyan	sopyan	PROPN
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ap-10001	385	8	d.	d.	PROPN
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ap-10001	385	11	s.	s.	PROPN
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ap-10001	385	15	k.	k.	PROPN
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ap-10001	385	22	(	(	PUNCT
ap-10001	385	23	doe	doe	NOUN
ap-10001	385	24	):	):	PUNCT
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ap-10001	385	32	preparations	preparation	NOUN
ap-10001	385	33	formulation	formulation	NOUN
ap-10001	385	34	.	.	PUNCT
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ap-10001	386	6	14(4):55–63	14(4):55–63	NUM
ap-10001	386	7	,	,	PUNCT
ap-10001	386	8	2022	2022	NUM
ap-10001	386	9	.	.	PUNCT
ap-10001	387	1	https://doi.org/10.22159/ijap.2022v14i4.45144	https://doi.org/10.22159/ijap.2022v14i4.45144	X
ap-10001	388	1	[	[	X
ap-10001	388	2	11	11	NUM
ap-10001	388	3	]	]	PUNCT
ap-10001	388	4	r.	r.	PROPN
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ap-10001	388	8	k.	k.	PROPN
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ap-10001	388	14	s.	s.	PROPN
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ap-10001	389	8	-	-	PUNCT
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ap-10001	389	10	kenaf	kenaf	NOUN
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ap-10001	389	14	.	.	PUNCT
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ap-10001	390	4	composites	composite	NOUN
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ap-10001	390	6	,	,	PUNCT
ap-10001	390	7	2021	2021	NUM
ap-10001	390	8	.	.	PUNCT
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ap-10001	392	2	12	12	NUM
ap-10001	392	3	]	]	X
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ap-10001	392	7	b.	b.	PROPN
ap-10001	392	8	b.	b.	PROPN
ap-10001	392	9	ravichander	ravichander	PROPN
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ap-10001	392	11	s.	s.	PROPN
ap-10001	392	12	h.	h.	PROPN
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ap-10001	393	8	learning	learn	VERB
ap-10001	393	9	algorithms	algorithm	NOUN
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ap-10001	394	7	international	international	ADJ
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ap-10001	394	12	,	,	PUNCT
ap-10001	394	13	pp	pp	ADJ
ap-10001	394	14	.	.	PUNCT
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ap-10001	395	2	.	.	PUNCT
ap-10001	396	1	2022	2022	NUM
ap-10001	396	2	.	.	PUNCT
ap-10001	397	1	https://doi.org/10.26153/tsw/44608	https://doi.org/10.26153/tsw/44608	PROPN
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ap-10001	398	7	y.	y.	PROPN
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ap-10001	398	10	z.	z.	PROPN
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ap-10001	398	17	-	-	PUNCT
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ap-10001	398	32	.	.	PUNCT
ap-10001	399	1	polymers	polymer	NOUN
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ap-10001	399	3	,	,	PUNCT
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ap-10001	401	9	s.	s.	PROPN
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ap-10001	402	12	-	-	PUNCT
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ap-10001	403	12	.	.	PUNCT
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ap-10001	404	3	15	15	NUM
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ap-10001	405	5	,	,	PUNCT
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