id	sid	tid	token	lemma	pos
ap-1316	1	1	bzs	bzs	NOUN
ap-1316	1	2	>	>	X
ap-1316	1	3	gnuplot.ps	gnuplot.ps	PROPN
ap-1316	1	4	acta	acta	PROPN
ap-1316	1	5	polytechnica	polytechnica	PROPN
ap-1316	1	6	vol	vol	NOUN
ap-1316	1	7	.	.	PUNCT
ap-1316	2	1	51	51	NUM
ap-1316	2	2	no	no	NOUN
ap-1316	2	3	.	.	PUNCT
ap-1316	3	1	2/2011	2/2011	NUM
ap-1316	3	2	czech	czech	ADJ
ap-1316	3	3	participation	participation	NOUN
ap-1316	3	4	in	in	ADP
ap-1316	3	5	international	international	ADJ
ap-1316	3	6	x	x	ADJ
ap-1316	3	7	-	-	NOUN
ap-1316	3	8	ray	ray	NOUN
ap-1316	3	9	observatory	observatory	NOUN
ap-1316	3	10	(	(	PUNCT
ap-1316	3	11	ixo	ixo	NOUN
ap-1316	3	12	)	)	PUNCT
ap-1316	3	13	r.	r.	PROPN
ap-1316	3	14	hudec	hudec	PROPN
ap-1316	3	15	,	,	PUNCT
ap-1316	3	16	l.	l.	PROPN
ap-1316	3	17	ṕına	ṕına	PROPN
ap-1316	3	18	,	,	PUNCT
ap-1316	3	19	v.	v.	ADP
ap-1316	3	20	marš́ıková	marš́ıková	PROPN
ap-1316	3	21	,	,	PUNCT
ap-1316	3	22	a.	a.	NOUN
ap-1316	3	23	inneman	inneman	NOUN
ap-1316	3	24	,	,	PUNCT
ap-1316	3	25	m.	m.	NOUN
ap-1316	3	26	skulinová	skulinová	NOUN
ap-1316	3	27	,	,	PUNCT
ap-1316	3	28	m.	m.	NOUN
ap-1316	3	29	mı́ka	mı́ka	ADJ
ap-1316	3	30	abstract	abstract	NOUN
ap-1316	3	31	here	here	ADV
ap-1316	3	32	we	we	PRON
ap-1316	3	33	describe	describe	VERB
ap-1316	3	34	the	the	DET
ap-1316	3	35	recent	recent	ADJ
ap-1316	3	36	status	status	NOUN
ap-1316	3	37	of	of	ADP
ap-1316	3	38	czech	czech	ADJ
ap-1316	3	39	participation	participation	NOUN
ap-1316	3	40	in	in	ADP
ap-1316	3	41	the	the	DET
ap-1316	3	42	ixo	ixo	NOUN
ap-1316	3	43	(	(	PUNCT
ap-1316	3	44	international	international	ADJ
ap-1316	3	45	x	x	ADJ
ap-1316	3	46	-	-	NOUN
ap-1316	3	47	ray	ray	NOUN
ap-1316	3	48	observatory	observatory	NOUN
ap-1316	3	49	)	)	PUNCT
ap-1316	3	50	space	space	NOUN
ap-1316	3	51	mission	mission	NOUN
ap-1316	3	52	,	,	PUNCT
ap-1316	3	53	with	with	ADP
ap-1316	3	54	emphasis	emphasis	NOUN
ap-1316	3	55	on	on	ADP
ap-1316	3	56	the	the	DET
ap-1316	3	57	development	development	NOUN
ap-1316	3	58	of	of	ADP
ap-1316	3	59	new	new	ADJ
ap-1316	3	60	technologies	technology	NOUN
ap-1316	3	61	and	and	CCONJ
ap-1316	3	62	test	test	NOUN
ap-1316	3	63	samples	sample	NOUN
ap-1316	3	64	of	of	ADP
ap-1316	3	65	x	x	NOUN
ap-1316	3	66	-	-	NOUN
ap-1316	3	67	ray	ray	NOUN
ap-1316	3	68	mirrors	mirror	NOUN
ap-1316	3	69	with	with	ADP
ap-1316	3	70	precise	precise	ADJ
ap-1316	3	71	surfaces	surface	NOUN
ap-1316	3	72	,	,	PUNCT
ap-1316	3	73	based	base	VERB
ap-1316	3	74	on	on	ADP
ap-1316	3	75	new	new	ADJ
ap-1316	3	76	materials	material	NOUN
ap-1316	3	77	,	,	PUNCT
ap-1316	3	78	and	and	CCONJ
ap-1316	3	79	their	their	PRON
ap-1316	3	80	applications	application	NOUN
ap-1316	3	81	in	in	ADP
ap-1316	3	82	space	space	NOUN
ap-1316	3	83	.	.	PUNCT
ap-1316	4	1	in	in	ADP
ap-1316	4	2	addition	addition	NOUN
ap-1316	4	3	,	,	PUNCT
ap-1316	4	4	alternative	alternative	ADJ
ap-1316	4	5	x	x	NOUN
ap-1316	4	6	-	-	NOUN
ap-1316	4	7	ray	ray	ADJ
ap-1316	4	8	optical	optical	ADJ
ap-1316	4	9	arrangements	arrangement	NOUN
ap-1316	4	10	are	be	AUX
ap-1316	4	11	investigated	investigate	VERB
ap-1316	4	12	,	,	PUNCT
ap-1316	4	13	such	such	ADJ
ap-1316	4	14	as	as	ADP
ap-1316	4	15	kirkpatrick	kirkpatrick	NOUN
ap-1316	4	16	-	-	PUNCT
ap-1316	4	17	baez	baez	PROPN
ap-1316	4	18	systems	system	NOUN
ap-1316	4	19	.	.	PUNCT
ap-1316	5	1	keywords	keyword	NOUN
ap-1316	5	2	:	:	PUNCT
ap-1316	5	3	x	x	X
ap-1316	5	4	-	-	NOUN
ap-1316	5	5	ray	ray	NOUN
ap-1316	5	6	satellites	satellite	NOUN
ap-1316	5	7	,	,	PUNCT
ap-1316	5	8	x	x	X
ap-1316	5	9	-	-	NOUN
ap-1316	5	10	ray	ray	NOUN
ap-1316	5	11	telescopes	telescope	NOUN
ap-1316	5	12	,	,	PUNCT
ap-1316	5	13	x	x	NOUN
ap-1316	5	14	-	-	NOUN
ap-1316	5	15	ray	ray	NOUN
ap-1316	5	16	optics	optic	NOUN
ap-1316	5	17	.	.	PUNCT
ap-1316	6	1	1	1	NUM
ap-1316	6	2	introduction	introduction	NOUN
ap-1316	6	3	the	the	DET
ap-1316	6	4	design	design	NOUN
ap-1316	6	5	and	and	CCONJ
ap-1316	6	6	development	development	NOUN
ap-1316	6	7	of	of	ADP
ap-1316	6	8	x	x	NOUN
ap-1316	6	9	-	-	NOUN
ap-1316	6	10	ray	ray	NOUN
ap-1316	6	11	optics	optic	NOUN
ap-1316	6	12	has	have	VERB
ap-1316	6	13	a	a	DET
ap-1316	6	14	long	long	ADJ
ap-1316	6	15	tradition	tradition	NOUN
ap-1316	6	16	in	in	ADP
ap-1316	6	17	the	the	DET
ap-1316	6	18	czech	czech	PROPN
ap-1316	6	19	republic	republic	NOUN
ap-1316	6	20	(	(	PUNCT
ap-1316	6	21	e.g.	e.g.	ADV
ap-1316	6	22	hudec	hudec	VERB
ap-1316	6	23	et	et	PROPN
ap-1316	6	24	al	al	PROPN
ap-1316	6	25	.	.	PROPN
ap-1316	6	26	,	,	PUNCT
ap-1316	6	27	1991	1991	NUM
ap-1316	6	28	,	,	PUNCT
ap-1316	6	29	1999	1999	NUM
ap-1316	6	30	,	,	PUNCT
ap-1316	6	31	2000	2000	NUM
ap-1316	6	32	,	,	PUNCT
ap-1316	6	33	2001	2001	NUM
ap-1316	6	34	,	,	PUNCT
ap-1316	6	35	inneman	inneman	NOUN
ap-1316	6	36	et	et	PROPN
ap-1316	6	37	al	al	PROPN
ap-1316	6	38	.	.	PROPN
ap-1316	6	39	1999	1999	NUM
ap-1316	6	40	,	,	PUNCT
ap-1316	6	41	2000	2000	NUM
ap-1316	6	42	)	)	PUNCT
ap-1316	6	43	.	.	PUNCT
ap-1316	7	1	a	a	DET
ap-1316	7	2	range	range	NOUN
ap-1316	7	3	of	of	ADP
ap-1316	7	4	various	various	ADJ
ap-1316	7	5	related	relate	VERB
ap-1316	7	6	technologies	technology	NOUN
ap-1316	7	7	have	have	AUX
ap-1316	7	8	been	be	AUX
ap-1316	7	9	exploited	exploit	VERB
ap-1316	7	10	and	and	CCONJ
ap-1316	7	11	investigated	investigate	VERB
ap-1316	7	12	,	,	PUNCT
ap-1316	7	13	including	include	VERB
ap-1316	7	14	technologies	technology	NOUN
ap-1316	7	15	for	for	ADP
ap-1316	7	16	future	future	ADJ
ap-1316	7	17	large	large	ADJ
ap-1316	7	18	,	,	PUNCT
ap-1316	7	19	light	light	ADJ
ap-1316	7	20	-	-	PUNCT
ap-1316	7	21	weight	weight	NOUN
ap-1316	7	22	x	x	NOUN
ap-1316	7	23	-	-	NOUN
ap-1316	7	24	ray	ray	NOUN
ap-1316	7	25	telescopes	telescope	NOUN
ap-1316	7	26	.	.	PUNCT
ap-1316	8	1	future	future	ADJ
ap-1316	8	2	large	large	ADJ
ap-1316	8	3	space	space	NOUN
ap-1316	8	4	x	x	NOUN
ap-1316	8	5	-	-	NOUN
ap-1316	8	6	ray	ray	NOUN
ap-1316	8	7	telescopes	telescope	NOUN
ap-1316	8	8	(	(	PUNCT
ap-1316	8	9	such	such	ADJ
ap-1316	8	10	as	as	ADP
ap-1316	8	11	ixo	ixo	NOUN
ap-1316	8	12	considered	consider	VERB
ap-1316	8	13	by	by	ADP
ap-1316	8	14	esa	esa	PROPN
ap-1316	8	15	or	or	CCONJ
ap-1316	8	16	ixo	ixo	NOUN
ap-1316	8	17	/	/	SYM
ap-1316	8	18	constellation	constellation	NOUN
ap-1316	8	19	x	x	PUNCT
ap-1316	8	20	by	by	ADP
ap-1316	8	21	nasa	nasa	PROPN
ap-1316	8	22	)	)	PUNCT
ap-1316	8	23	require	require	VERB
ap-1316	8	24	precise	precise	ADJ
ap-1316	8	25	,	,	PUNCT
ap-1316	8	26	light	light	ADJ
ap-1316	8	27	-	-	PUNCT
ap-1316	8	28	weight	weight	NOUN
ap-1316	8	29	x	x	NOUN
ap-1316	8	30	-	-	NOUN
ap-1316	8	31	ray	ray	NOUN
ap-1316	8	32	optics	optic	NOUN
ap-1316	8	33	based	base	VERB
ap-1316	8	34	on	on	ADP
ap-1316	8	35	numerous	numerous	ADJ
ap-1316	8	36	thin	thin	ADJ
ap-1316	8	37	reflecting	reflect	VERB
ap-1316	8	38	shells	shell	NOUN
ap-1316	8	39	.	.	PUNCT
ap-1316	9	1	novel	novel	ADJ
ap-1316	9	2	approaches	approach	NOUN
ap-1316	9	3	and	and	CCONJ
ap-1316	9	4	advanced	advanced	ADJ
ap-1316	9	5	technologies	technology	NOUN
ap-1316	9	6	need	need	VERB
ap-1316	9	7	to	to	PART
ap-1316	9	8	be	be	AUX
ap-1316	9	9	developed	develop	VERB
ap-1316	9	10	and	and	CCONJ
ap-1316	9	11	exploited	exploit	VERB
ap-1316	9	12	.	.	PUNCT
ap-1316	10	1	in	in	ADP
ap-1316	10	2	this	this	DET
ap-1316	10	3	paper	paper	NOUN
ap-1316	10	4	,	,	PUNCT
ap-1316	10	5	we	we	PRON
ap-1316	10	6	refer	refer	VERB
ap-1316	10	7	to	to	ADP
ap-1316	10	8	czech	czech	ADJ
ap-1316	10	9	efforts	effort	NOUN
ap-1316	10	10	in	in	ADP
ap-1316	10	11	connection	connection	NOUN
ap-1316	10	12	with	with	ADP
ap-1316	10	13	ixo	ixo	NOUN
ap-1316	10	14	(	(	PUNCT
ap-1316	10	15	now	now	ADV
ap-1316	10	16	athena	athena	PROPN
ap-1316	10	17	)	)	PUNCT
ap-1316	10	18	,	,	PUNCT
ap-1316	10	19	focusing	focus	VERB
ap-1316	10	20	on	on	ADP
ap-1316	10	21	the	the	DET
ap-1316	10	22	results	result	NOUN
ap-1316	10	23	of	of	ADP
ap-1316	10	24	test	test	NOUN
ap-1316	10	25	x	x	NOUN
ap-1316	10	26	-	-	NOUN
ap-1316	10	27	ray	ray	NOUN
ap-1316	10	28	mirror	mirror	NOUN
ap-1316	10	29	shells	shell	NOUN
ap-1316	10	30	produced	produce	VERB
ap-1316	10	31	by	by	ADP
ap-1316	10	32	glass	glass	NOUN
ap-1316	10	33	thermal	thermal	ADJ
ap-1316	10	34	forming	form	VERB
ap-1316	10	35	(	(	PUNCT
ap-1316	10	36	gtf	gtf	NOUN
ap-1316	10	37	)	)	PUNCT
ap-1316	10	38	and	and	CCONJ
ap-1316	10	39	by	by	ADP
ap-1316	10	40	shaping	shape	VERB
ap-1316	10	41	si	si	NOUN
ap-1316	10	42	wafers	wafer	NOUN
ap-1316	10	43	.	.	PUNCT
ap-1316	11	1	both	both	DET
ap-1316	11	2	glass	glass	NOUN
ap-1316	11	3	foils	foil	NOUN
ap-1316	11	4	and	and	CCONJ
ap-1316	11	5	si	si	NOUN
ap-1316	11	6	wafers	wafer	NOUN
ap-1316	11	7	are	be	AUX
ap-1316	11	8	commercially	commercially	ADV
ap-1316	11	9	available	available	ADJ
ap-1316	11	10	,	,	PUNCT
ap-1316	11	11	have	have	AUX
ap-1316	11	12	excellent	excellent	ADJ
ap-1316	11	13	surface	surface	NOUN
ap-1316	11	14	microroughness	microroughness	NOUN
ap-1316	11	15	of	of	ADP
ap-1316	11	16	a	a	DET
ap-1316	11	17	few	few	ADJ
ap-1316	11	18	0.1	0.1	NUM
ap-1316	11	19	nm	nm	NOUN
ap-1316	11	20	,	,	PUNCT
ap-1316	11	21	and	and	CCONJ
ap-1316	11	22	low	low	ADJ
ap-1316	11	23	weight	weight	NOUN
ap-1316	11	24	(	(	PUNCT
ap-1316	11	25	the	the	DET
ap-1316	11	26	volume	volume	NOUN
ap-1316	11	27	density	density	NOUN
ap-1316	11	28	is	be	AUX
ap-1316	11	29	2.5	2.5	NUM
ap-1316	11	30	g	g	NOUN
ap-1316	11	31	·	·	PUNCT
ap-1316	11	32	cm−3	cm−3	PROPN
ap-1316	11	33	for	for	ADP
ap-1316	11	34	glass	glass	NOUN
ap-1316	11	35	and	and	CCONJ
ap-1316	11	36	2.3	2.3	NUM
ap-1316	11	37	g	g	NOUN
ap-1316	11	38	·	·	PUNCT
ap-1316	11	39	cm−3	cm−3	PROPN
ap-1316	11	40	for	for	ADP
ap-1316	11	41	si	si	NOUN
ap-1316	11	42	)	)	PUNCT
ap-1316	11	43	.	.	PUNCT
ap-1316	12	1	technologies	technology	NOUN
ap-1316	12	2	need	need	VERB
ap-1316	12	3	to	to	PART
ap-1316	12	4	be	be	AUX
ap-1316	12	5	exploited	exploit	VERB
ap-1316	12	6	for	for	ADP
ap-1316	12	7	shaping	shape	VERB
ap-1316	12	8	these	these	DET
ap-1316	12	9	substrates	substrate	NOUN
ap-1316	12	10	to	to	PART
ap-1316	12	11	achieve	achieve	VERB
ap-1316	12	12	the	the	DET
ap-1316	12	13	required	require	VERB
ap-1316	12	14	precise	precise	ADJ
ap-1316	12	15	x	x	ADJ
ap-1316	12	16	-	-	NOUN
ap-1316	12	17	ray	ray	NOUN
ap-1316	12	18	optics	optic	NOUN
ap-1316	12	19	geometries	geometry	NOUN
ap-1316	12	20	without	without	ADP
ap-1316	12	21	degrading	degrade	VERB
ap-1316	12	22	the	the	DET
ap-1316	12	23	fine	fine	ADJ
ap-1316	12	24	surface	surface	NOUN
ap-1316	12	25	microroughness	microroughness	NOUN
ap-1316	12	26	.	.	PUNCT
ap-1316	13	1	although	although	SCONJ
ap-1316	13	2	glass	glass	NOUN
ap-1316	13	3	,	,	PUNCT
ap-1316	13	4	and	and	CCONJ
ap-1316	13	5	more	more	ADV
ap-1316	13	6	recently	recently	ADV
ap-1316	13	7	,	,	PUNCT
ap-1316	13	8	silicon	silicon	NOUN
ap-1316	13	9	wafers	wafer	NOUN
ap-1316	13	10	have	have	AUX
ap-1316	13	11	been	be	AUX
ap-1316	13	12	considered	consider	VERB
ap-1316	13	13	the	the	DET
ap-1316	13	14	most	most	ADV
ap-1316	13	15	promising	promising	ADJ
ap-1316	13	16	materials	material	NOUN
ap-1316	13	17	for	for	ADP
ap-1316	13	18	future	future	ADJ
ap-1316	13	19	advanced	advanced	ADJ
ap-1316	13	20	large	large	ADJ
ap-1316	13	21	aperture	aperture	NOUN
ap-1316	13	22	x	x	NOUN
ap-1316	13	23	-	-	NOUN
ap-1316	13	24	ray	ray	NOUN
ap-1316	13	25	telescopes	telescope	NOUN
ap-1316	13	26	,	,	PUNCT
ap-1316	13	27	other	other	ADJ
ap-1316	13	28	alternative	alternative	ADJ
ap-1316	13	29	materials	material	NOUN
ap-1316	13	30	are	be	AUX
ap-1316	13	31	also	also	ADV
ap-1316	13	32	worth	worth	ADJ
ap-1316	13	33	further	further	ADJ
ap-1316	13	34	study	study	NOUN
ap-1316	13	35	,	,	PUNCT
ap-1316	13	36	such	such	ADJ
ap-1316	13	37	as	as	ADP
ap-1316	13	38	amorphous	amorphous	ADJ
ap-1316	13	39	metals	metal	NOUN
ap-1316	13	40	and	and	CCONJ
ap-1316	13	41	glassy	glassy	NOUN
ap-1316	13	42	carbon	carbon	NOUN
ap-1316	13	43	(	(	PUNCT
ap-1316	13	44	marsch	marsch	PROPN
ap-1316	13	45	et	et	PROPN
ap-1316	13	46	al	al	PROPN
ap-1316	13	47	.	.	PROPN
ap-1316	13	48	,	,	PUNCT
ap-1316	13	49	1997	1997	NUM
ap-1316	13	50	)	)	PUNCT
ap-1316	13	51	.	.	PUNCT
ap-1316	14	1	in	in	ADP
ap-1316	14	2	order	order	NOUN
ap-1316	14	3	to	to	PART
ap-1316	14	4	achieve	achieve	VERB
ap-1316	14	5	sub	sub	ADJ
ap-1316	14	6	-	-	ADJ
ap-1316	14	7	arsec	arsec	ADJ
ap-1316	14	8	angular	angular	ADJ
ap-1316	14	9	resolutions	resolution	NOUN
ap-1316	14	10	,	,	PUNCT
ap-1316	14	11	the	the	DET
ap-1316	14	12	principles	principle	NOUN
ap-1316	14	13	of	of	ADP
ap-1316	14	14	active	active	ADJ
ap-1316	14	15	optics	optic	NOUN
ap-1316	14	16	need	need	VERB
ap-1316	14	17	to	to	PART
ap-1316	14	18	be	be	AUX
ap-1316	14	19	adopted	adopt	VERB
ap-1316	14	20	.	.	PUNCT
ap-1316	15	1	the	the	DET
ap-1316	15	2	international	international	ADJ
ap-1316	15	3	x	x	ADJ
ap-1316	15	4	-	-	NOUN
ap-1316	15	5	ray	ray	NOUN
ap-1316	15	6	observatory	observatory	NOUN
ap-1316	15	7	(	(	PUNCT
ap-1316	15	8	ixo	ixo	NOUN
ap-1316	15	9	)	)	PUNCT
ap-1316	15	10	is	be	AUX
ap-1316	15	11	a	a	DET
ap-1316	15	12	new	new	ADJ
ap-1316	15	13	x	x	ADJ
ap-1316	15	14	-	-	NOUN
ap-1316	15	15	ray	ray	NOUN
ap-1316	15	16	telescope	telescope	NOUN
ap-1316	15	17	with	with	ADP
ap-1316	15	18	joint	joint	ADJ
ap-1316	15	19	participation	participation	NOUN
ap-1316	15	20	of	of	ADP
ap-1316	15	21	nasa	nasa	PROPN
ap-1316	15	22	,	,	PUNCT
ap-1316	15	23	the	the	DET
ap-1316	15	24	european	european	PROPN
ap-1316	15	25	space	space	PROPN
ap-1316	15	26	agency	agency	PROPN
ap-1316	15	27	(	(	PUNCT
ap-1316	15	28	esa	esa	PROPN
ap-1316	15	29	)	)	PUNCT
ap-1316	15	30	and	and	CCONJ
ap-1316	15	31	the	the	DET
ap-1316	15	32	japan	japan	PROPN
ap-1316	15	33	aerospace	aerospace	PROPN
ap-1316	15	34	exploration	exploration	NOUN
ap-1316	15	35	agency	agency	NOUN
ap-1316	15	36	(	(	PUNCT
ap-1316	15	37	jaxa	jaxa	NOUN
ap-1316	15	38	)	)	PUNCT
ap-1316	15	39	.	.	PUNCT
ap-1316	16	1	this	this	DET
ap-1316	16	2	project	project	NOUN
ap-1316	16	3	supersedes	supersede	VERB
ap-1316	16	4	both	both	DET
ap-1316	16	5	nasa	nasa	PROPN
ap-1316	16	6	’s	’s	PART
ap-1316	16	7	constellation	constellation	NOUN
ap-1316	16	8	-	-	PUNCT
ap-1316	16	9	x	x	PROPN
ap-1316	16	10	and	and	CCONJ
ap-1316	16	11	esa	esa	PROPN
ap-1316	16	12	’s	’s	PART
ap-1316	16	13	xeus	xeus	PROPN
ap-1316	16	14	mission	mission	NOUN
ap-1316	16	15	concepts	concept	NOUN
ap-1316	16	16	.	.	PUNCT
ap-1316	17	1	in	in	ADP
ap-1316	17	2	mid-2008	mid-2008	NOUN
ap-1316	17	3	,	,	PUNCT
ap-1316	17	4	officials	official	NOUN
ap-1316	17	5	from	from	ADP
ap-1316	17	6	esa	esa	PROPN
ap-1316	17	7	,	,	PUNCT
ap-1316	17	8	nasa	nasa	PROPN
ap-1316	17	9	and	and	CCONJ
ap-1316	17	10	jaxa	jaxa	PROPN
ap-1316	17	11	headquarters	headquarter	NOUN
ap-1316	17	12	agreed	agree	VERB
ap-1316	17	13	to	to	PART
ap-1316	17	14	conduct	conduct	VERB
ap-1316	17	15	a	a	DET
ap-1316	17	16	joint	joint	ADJ
ap-1316	17	17	study	study	NOUN
ap-1316	17	18	of	of	ADP
ap-1316	17	19	ixo	ixo	NOUN
ap-1316	17	20	with	with	ADP
ap-1316	17	21	a	a	DET
ap-1316	17	22	single	single	ADJ
ap-1316	17	23	merged	merged	ADJ
ap-1316	17	24	set	set	NOUN
ap-1316	17	25	of	of	ADP
ap-1316	17	26	top	top	ADJ
ap-1316	17	27	-	-	PUNCT
ap-1316	17	28	level	level	NOUN
ap-1316	17	29	science	science	NOUN
ap-1316	17	30	goals	goal	NOUN
ap-1316	17	31	.	.	PUNCT
ap-1316	18	1	this	this	DET
ap-1316	18	2	agreement	agreement	NOUN
ap-1316	18	3	established	establish	VERB
ap-1316	18	4	the	the	DET
ap-1316	18	5	key	key	ADJ
ap-1316	18	6	science	science	NOUN
ap-1316	18	7	measurement	measurement	NOUN
ap-1316	18	8	requirements	requirement	NOUN
ap-1316	18	9	(	(	PUNCT
ap-1316	18	10	white	white	PROPN
ap-1316	18	11	et	et	PROPN
ap-1316	18	12	al	al	PROPN
ap-1316	18	13	.	.	PROPN
ap-1316	18	14	,	,	PUNCT
ap-1316	18	15	2009	2009	NUM
ap-1316	18	16	)	)	PUNCT
ap-1316	18	17	.	.	PUNCT
ap-1316	19	1	the	the	DET
ap-1316	19	2	spacecraft	spacecraft	NOUN
ap-1316	19	3	configuration	configuration	NOUN
ap-1316	19	4	for	for	ADP
ap-1316	19	5	the	the	DET
ap-1316	19	6	ixo	ixo	NOUN
ap-1316	19	7	study	study	NOUN
ap-1316	19	8	is	be	AUX
ap-1316	19	9	a	a	DET
ap-1316	19	10	mission	mission	NOUN
ap-1316	19	11	featuring	feature	VERB
ap-1316	19	12	a	a	DET
ap-1316	19	13	single	single	ADJ
ap-1316	19	14	large	large	ADJ
ap-1316	19	15	x	x	ADJ
ap-1316	19	16	-	-	NOUN
ap-1316	19	17	ray	ray	NOUN
ap-1316	19	18	mirror	mirror	NOUN
ap-1316	19	19	,	,	PUNCT
ap-1316	19	20	an	an	DET
ap-1316	19	21	extendible	extendible	ADJ
ap-1316	19	22	optical	optical	ADJ
ap-1316	19	23	bench	bench	NOUN
ap-1316	19	24	with	with	ADP
ap-1316	19	25	a	a	DET
ap-1316	19	26	focal	focal	ADJ
ap-1316	19	27	length	length	NOUN
ap-1316	19	28	of	of	ADP
ap-1316	19	29	∼	∼	NOUN
ap-1316	19	30	20	20	NUM
ap-1316	19	31	m	m	NOUN
ap-1316	19	32	and	and	CCONJ
ap-1316	19	33	a	a	DET
ap-1316	19	34	suite	suite	NOUN
ap-1316	19	35	of	of	ADP
ap-1316	19	36	five	five	NUM
ap-1316	19	37	focal	focal	ADJ
ap-1316	19	38	plane	plane	NOUN
ap-1316	19	39	instruments	instrument	NOUN
ap-1316	19	40	.	.	PUNCT
ap-1316	20	1	the	the	DET
ap-1316	20	2	x	x	NOUN
ap-1316	20	3	-	-	NOUN
ap-1316	20	4	ray	ray	NOUN
ap-1316	20	5	instruments	instrument	NOUN
ap-1316	20	6	under	under	ADP
ap-1316	20	7	study	study	NOUN
ap-1316	20	8	for	for	ADP
ap-1316	20	9	the	the	DET
ap-1316	20	10	ixo	ixo	NOUN
ap-1316	20	11	concept	concept	NOUN
ap-1316	20	12	include	include	VERB
ap-1316	20	13	:	:	PUNCT
ap-1316	20	14	a	a	DET
ap-1316	20	15	wide	wide	ADJ
ap-1316	20	16	field	field	NOUN
ap-1316	20	17	imaging	imaging	NOUN
ap-1316	20	18	detector	detector	NOUN
ap-1316	20	19	,	,	PUNCT
ap-1316	20	20	a	a	DET
ap-1316	20	21	highspectral	highspectral	ADJ
ap-1316	20	22	-	-	PUNCT
ap-1316	20	23	resolution	resolution	NOUN
ap-1316	20	24	imaging	imaging	NOUN
ap-1316	20	25	spectrometer	spectrometer	NOUN
ap-1316	20	26	(	(	PUNCT
ap-1316	20	27	calorimeter	calorimeter	NOUN
ap-1316	20	28	)	)	PUNCT
ap-1316	20	29	,	,	PUNCT
ap-1316	20	30	a	a	DET
ap-1316	20	31	hard	hard	ADJ
ap-1316	20	32	x	x	ADJ
ap-1316	20	33	-	-	NOUN
ap-1316	20	34	ray	ray	NOUN
ap-1316	20	35	imaging	imaging	NOUN
ap-1316	20	36	detector	detector	NOUN
ap-1316	20	37	,	,	PUNCT
ap-1316	20	38	a	a	DET
ap-1316	20	39	grating	grate	VERB
ap-1316	20	40	spectrometer	spectrometer	NOUN
ap-1316	20	41	,	,	PUNCT
ap-1316	20	42	a	a	DET
ap-1316	20	43	high	high	ADJ
ap-1316	20	44	timing	timing	NOUN
ap-1316	20	45	resolution	resolution	NOUN
ap-1316	20	46	spectrometer	spectrometer	NOUN
ap-1316	20	47	and	and	CCONJ
ap-1316	20	48	a	a	DET
ap-1316	20	49	polarimeter	polarimeter	NOUN
ap-1316	20	50	.	.	PUNCT
ap-1316	21	1	the	the	DET
ap-1316	21	2	ixo	ixo	NOUN
ap-1316	21	3	mission	mission	NOUN
ap-1316	21	4	concept	concept	NOUN
ap-1316	21	5	was	be	AUX
ap-1316	21	6	submitted	submit	VERB
ap-1316	21	7	to	to	ADP
ap-1316	21	8	the	the	DET
ap-1316	21	9	u.s	u.s	PROPN
ap-1316	21	10	.	.	PROPN
ap-1316	21	11	decadal	decadal	NOUN
ap-1316	21	12	survey	survey	NOUN
ap-1316	21	13	committee	committee	NOUN
ap-1316	21	14	and	and	CCONJ
ap-1316	21	15	to	to	ADP
ap-1316	21	16	esa	esa	PROPN
ap-1316	21	17	’s	’s	PART
ap-1316	21	18	cosmic	cosmic	ADJ
ap-1316	21	19	vision	vision	NOUN
ap-1316	21	20	process	process	NOUN
ap-1316	21	21	.	.	PUNCT
ap-1316	22	1	note	note	NOUN
ap-1316	22	2	added	add	VERB
ap-1316	22	3	in	in	ADP
ap-1316	22	4	proofs	proof	NOUN
ap-1316	22	5	:	:	PUNCT
ap-1316	22	6	as	as	ADP
ap-1316	22	7	a	a	DET
ap-1316	22	8	consequence	consequence	NOUN
ap-1316	22	9	of	of	ADP
ap-1316	22	10	us	us	PROPN
ap-1316	22	11	decadal	decadal	NOUN
ap-1316	22	12	survey	survey	NOUN
ap-1316	22	13	,	,	PUNCT
ap-1316	22	14	on	on	ADP
ap-1316	22	15	european	european	ADJ
ap-1316	22	16	side	side	NOUN
ap-1316	22	17	(	(	PUNCT
ap-1316	22	18	esa	esa	PROPN
ap-1316	22	19	)	)	PUNCT
ap-1316	22	20	the	the	DET
ap-1316	22	21	ixo	ixo	NOUN
ap-1316	22	22	will	will	AUX
ap-1316	22	23	be	be	AUX
ap-1316	22	24	replaced	replace	VERB
ap-1316	22	25	by	by	ADP
ap-1316	22	26	new	new	ADJ
ap-1316	22	27	project	project	NOUN
ap-1316	22	28	athena	athena	NOUN
ap-1316	22	29	.	.	PUNCT
ap-1316	23	1	as	as	SCONJ
ap-1316	23	2	the	the	DET
ap-1316	23	3	athena	athena	NOUN
ap-1316	23	4	will	will	AUX
ap-1316	23	5	also	also	ADV
ap-1316	23	6	use	use	VERB
ap-1316	23	7	the	the	DET
ap-1316	23	8	imaging	imaging	NOUN
ap-1316	23	9	x	x	NOUN
ap-1316	23	10	-	-	NOUN
ap-1316	23	11	ray	ray	NOUN
ap-1316	23	12	optics	optic	NOUN
ap-1316	23	13	similarly	similarly	ADV
ap-1316	23	14	to	to	ADP
ap-1316	23	15	ixo	ixo	NOUN
ap-1316	23	16	,	,	PUNCT
ap-1316	23	17	the	the	DET
ap-1316	23	18	developments	development	NOUN
ap-1316	23	19	described	describe	VERB
ap-1316	23	20	in	in	ADP
ap-1316	23	21	this	this	DET
ap-1316	23	22	paper	paper	NOUN
ap-1316	23	23	refer	refer	NOUN
ap-1316	23	24	now	now	ADV
ap-1316	23	25	to	to	ADP
ap-1316	23	26	athena	athena	PROPN
ap-1316	23	27	.	.	PROPN
ap-1316	23	28	2	2	NUM
ap-1316	23	29	czech	czech	PROPN
ap-1316	23	30	involvement	involvement	NOUN
ap-1316	23	31	in	in	ADP
ap-1316	23	32	ixo	ixo	NOUN
ap-1316	23	33	-	-	PUNCT
ap-1316	23	34	related	relate	VERB
ap-1316	23	35	studies	study	NOUN
ap-1316	23	36	at	at	ADP
ap-1316	23	37	the	the	DET
ap-1316	23	38	moment	moment	NOUN
ap-1316	23	39	,	,	PUNCT
ap-1316	23	40	the	the	DET
ap-1316	23	41	czech	czech	ADJ
ap-1316	23	42	participation	participation	NOUN
ap-1316	23	43	in	in	ADP
ap-1316	23	44	ixo	ixo	NOUN
ap-1316	23	45	concentrates	concentrate	VERB
ap-1316	23	46	on	on	ADP
ap-1316	23	47	:	:	PUNCT
ap-1316	23	48	(	(	PUNCT
ap-1316	23	49	1	1	X
ap-1316	23	50	)	)	PUNCT
ap-1316	23	51	participating	participate	VERB
ap-1316	23	52	in	in	ADP
ap-1316	23	53	defining	define	VERB
ap-1316	23	54	scientific	scientific	ADJ
ap-1316	23	55	goals	goal	NOUN
ap-1316	23	56	,	,	PUNCT
ap-1316	23	57	justification	justification	NOUN
ap-1316	23	58	and	and	CCONJ
ap-1316	23	59	project	project	NOUN
ap-1316	23	60	preparation	preparation	NOUN
ap-1316	23	61	,	,	PUNCT
ap-1316	23	62	(	(	PUNCT
ap-1316	23	63	2	2	X
ap-1316	23	64	)	)	PUNCT
ap-1316	23	65	participating	participate	VERB
ap-1316	23	66	in	in	ADP
ap-1316	23	67	the	the	DET
ap-1316	23	68	design	design	NOUN
ap-1316	23	69	and	and	CCONJ
ap-1316	23	70	development	development	NOUN
ap-1316	23	71	of	of	ADP
ap-1316	23	72	mirror	mirror	NOUN
ap-1316	23	73	technologies	technology	NOUN
ap-1316	23	74	.	.	PUNCT
ap-1316	24	1	the	the	DET
ap-1316	24	2	first	first	ADJ
ap-1316	24	3	author	author	NOUN
ap-1316	24	4	of	of	ADP
ap-1316	24	5	this	this	DET
ap-1316	24	6	paper	paper	NOUN
ap-1316	24	7	was	be	AUX
ap-1316	24	8	delegated	delegate	VERB
ap-1316	24	9	as	as	ADP
ap-1316	24	10	a	a	DET
ap-1316	24	11	member	member	NOUN
ap-1316	24	12	of	of	ADP
ap-1316	24	13	the	the	DET
ap-1316	24	14	ixo	ixo	NOUN
ap-1316	24	15	telescope	telescope	NOUN
ap-1316	24	16	working	working	NOUN
ap-1316	24	17	group	group	NOUN
ap-1316	24	18	.	.	PUNCT
ap-1316	25	1	in	in	ADP
ap-1316	25	2	the	the	DET
ap-1316	25	3	mirror	mirror	NOUN
ap-1316	25	4	development	development	NOUN
ap-1316	25	5	,	,	PUNCT
ap-1316	25	6	we	we	PRON
ap-1316	25	7	focus	focus	VERB
ap-1316	25	8	on	on	ADP
ap-1316	25	9	supporting	support	VERB
ap-1316	25	10	esa	esa	PROPN
ap-1316	25	11	estec	estec	ADJ
ap-1316	25	12	micropore	micropore	NOUN
ap-1316	25	13	silicon	silicon	NOUN
ap-1316	25	14	technology	technology	NOUN
ap-1316	25	15	design	design	NOUN
ap-1316	25	16	and	and	CCONJ
ap-1316	25	17	also	also	ADV
ap-1316	25	18	on	on	ADP
ap-1316	25	19	designing	design	VERB
ap-1316	25	20	and	and	CCONJ
ap-1316	25	21	developing	develop	VERB
ap-1316	25	22	alternative	alternative	ADJ
ap-1316	25	23	background	background	NOUN
ap-1316	25	24	technologies	technology	NOUN
ap-1316	25	25	discussed	discuss	VERB
ap-1316	25	26	in	in	ADP
ap-1316	25	27	greater	great	ADJ
ap-1316	25	28	detail	detail	NOUN
ap-1316	25	29	below	below	ADV
ap-1316	25	30	.	.	PUNCT
ap-1316	26	1	3	3	NUM
ap-1316	26	2	the	the	DET
ap-1316	26	3	glass	glass	NOUN
ap-1316	26	4	foil	foil	NOUN
ap-1316	26	5	alternative	alternative	NOUN
ap-1316	26	6	for	for	ADP
ap-1316	26	7	ixo	ixo	NOUN
ap-1316	26	8	glass	glass	NOUN
ap-1316	26	9	science	science	NOUN
ap-1316	26	10	and	and	CCONJ
ap-1316	26	11	technology	technology	NOUN
ap-1316	26	12	has	have	VERB
ap-1316	26	13	a	a	DET
ap-1316	26	14	long	long	ADJ
ap-1316	26	15	tradition	tradition	NOUN
ap-1316	26	16	in	in	ADP
ap-1316	26	17	the	the	DET
ap-1316	26	18	czech	czech	PROPN
ap-1316	26	19	republic	republic	NOUN
ap-1316	26	20	.	.	PUNCT
ap-1316	27	1	at	at	ADP
ap-1316	27	2	the	the	DET
ap-1316	27	3	same	same	ADJ
ap-1316	27	4	time	time	NOUN
ap-1316	27	5	,	,	PUNCT
ap-1316	27	6	glass	glass	NOUN
ap-1316	27	7	technol46	technol46	NOUN
ap-1316	27	8	acta	acta	PROPN
ap-1316	27	9	polytechnica	polytechnica	PROPN
ap-1316	27	10	vol	vol	NOUN
ap-1316	27	11	.	.	PUNCT
ap-1316	28	1	51	51	NUM
ap-1316	28	2	no	no	NOUN
ap-1316	28	3	.	.	PUNCT
ap-1316	29	1	2/2011	2/2011	NUM
ap-1316	29	2	ogy	ogy	NOUN
ap-1316	29	3	is	be	AUX
ap-1316	29	4	one	one	NUM
ap-1316	29	5	of	of	ADP
ap-1316	29	6	most	most	ADV
ap-1316	29	7	promising	promising	ADJ
ap-1316	29	8	technologies	technology	NOUN
ap-1316	29	9	for	for	ADP
ap-1316	29	10	producing	produce	VERB
ap-1316	29	11	mirrors	mirror	NOUN
ap-1316	29	12	for	for	ADP
ap-1316	29	13	ixo	ixo	NOUN
ap-1316	29	14	,	,	PUNCT
ap-1316	29	15	as	as	SCONJ
ap-1316	29	16	the	the	DET
ap-1316	29	17	volume	volume	NOUN
ap-1316	29	18	density	density	NOUN
ap-1316	29	19	of	of	ADP
ap-1316	29	20	glass	glass	NOUN
ap-1316	29	21	is	be	AUX
ap-1316	29	22	nearly	nearly	ADV
ap-1316	29	23	four	four	NUM
ap-1316	29	24	times	time	NOUN
ap-1316	29	25	less	less	ADJ
ap-1316	29	26	than	than	ADP
ap-1316	29	27	the	the	DET
ap-1316	29	28	volume	volume	NOUN
ap-1316	29	29	density	density	NOUN
ap-1316	29	30	of	of	ADP
ap-1316	29	31	electroformed	electroformed	ADJ
ap-1316	29	32	nickel	nickel	NOUN
ap-1316	29	33	layers	layer	NOUN
ap-1316	29	34	.	.	PUNCT
ap-1316	30	1	glass	glass	NOUN
ap-1316	30	2	foils	foil	NOUN
ap-1316	30	3	can	can	AUX
ap-1316	30	4	be	be	AUX
ap-1316	30	5	used	use	VERB
ap-1316	30	6	as	as	ADP
ap-1316	30	7	flats	flat	NOUN
ap-1316	30	8	or	or	CCONJ
ap-1316	30	9	may	may	AUX
ap-1316	30	10	be	be	AUX
ap-1316	30	11	shaped	shape	VERB
ap-1316	30	12	or	or	CCONJ
ap-1316	30	13	thermally	thermally	ADV
ap-1316	30	14	slumped	slump	VERB
ap-1316	30	15	to	to	PART
ap-1316	30	16	achieve	achieve	VERB
ap-1316	30	17	the	the	DET
ap-1316	30	18	required	required	ADJ
ap-1316	30	19	geometry	geometry	NOUN
ap-1316	30	20	.	.	PUNCT
ap-1316	31	1	thermal	thermal	ADJ
ap-1316	31	2	forming	forming	NOUN
ap-1316	31	3	of	of	ADP
ap-1316	31	4	glass	glass	NOUN
ap-1316	31	5	is	be	AUX
ap-1316	31	6	not	not	PART
ap-1316	31	7	a	a	DET
ap-1316	31	8	new	new	ADJ
ap-1316	31	9	technology	technology	NOUN
ap-1316	31	10	,	,	PUNCT
ap-1316	31	11	and	and	CCONJ
ap-1316	31	12	it	it	PRON
ap-1316	31	13	has	have	AUX
ap-1316	31	14	been	be	AUX
ap-1316	31	15	used	use	VERB
ap-1316	31	16	in	in	ADP
ap-1316	31	17	various	various	ADJ
ap-1316	31	18	sectors	sector	NOUN
ap-1316	31	19	of	of	ADP
ap-1316	31	20	the	the	DET
ap-1316	31	21	glass	glass	NOUN
ap-1316	31	22	industry	industry	NOUN
ap-1316	31	23	and	and	CCONJ
ap-1316	31	24	in	in	ADP
ap-1316	31	25	glass	glass	NOUN
ap-1316	31	26	art	art	NOUN
ap-1316	31	27	,	,	PUNCT
ap-1316	31	28	as	as	ADV
ap-1316	31	29	well	well	ADV
ap-1316	31	30	as	as	ADP
ap-1316	31	31	in	in	ADP
ap-1316	31	32	the	the	DET
ap-1316	31	33	production	production	NOUN
ap-1316	31	34	of	of	ADP
ap-1316	31	35	cherenkov	cherenkov	PROPN
ap-1316	31	36	mirrors	mirror	NOUN
ap-1316	31	37	.	.	PUNCT
ap-1316	32	1	however	however	ADV
ap-1316	32	2	,	,	PUNCT
ap-1316	32	3	the	the	DET
ap-1316	32	4	application	application	NOUN
ap-1316	32	5	of	of	ADP
ap-1316	32	6	this	this	DET
ap-1316	32	7	technology	technology	NOUN
ap-1316	32	8	in	in	ADP
ap-1316	32	9	x	x	NOUN
ap-1316	32	10	-	-	NOUN
ap-1316	32	11	ray	ray	NOUN
ap-1316	32	12	optics	optic	NOUN
ap-1316	32	13	is	be	AUX
ap-1316	32	14	related	relate	VERB
ap-1316	32	15	with	with	ADP
ap-1316	32	16	the	the	DET
ap-1316	32	17	need	need	NOUN
ap-1316	32	18	to	to	PART
ap-1316	32	19	improve	improve	VERB
ap-1316	32	20	accuracy	accuracy	NOUN
ap-1316	32	21	significantly	significantly	ADV
ap-1316	32	22	and	and	CCONJ
ap-1316	32	23	minimize	minimize	VERB
ap-1316	32	24	errors	error	NOUN
ap-1316	32	25	.	.	PUNCT
ap-1316	33	1	as	as	ADP
ap-1316	33	2	the	the	DET
ap-1316	33	3	first	first	ADJ
ap-1316	33	4	step	step	NOUN
ap-1316	33	5	,	,	PUNCT
ap-1316	33	6	small	small	ADJ
ap-1316	33	7	(	(	PUNCT
ap-1316	33	8	various	various	ADJ
ap-1316	33	9	sizes	size	NOUN
ap-1316	33	10	typically	typically	ADV
ap-1316	33	11	less	less	ADJ
ap-1316	33	12	than	than	ADP
ap-1316	33	13	100×100	100×100	NUM
ap-1316	33	14	mm	mm	NOUN
ap-1316	33	15	)	)	PUNCT
ap-1316	33	16	glass	glass	NOUN
ap-1316	33	17	samples	sample	NOUN
ap-1316	33	18	of	of	ADP
ap-1316	33	19	various	various	ADJ
ap-1316	33	20	types	type	NOUN
ap-1316	33	21	provided	provide	VERB
ap-1316	33	22	by	by	ADP
ap-1316	33	23	various	various	ADJ
ap-1316	33	24	manufacturers	manufacturer	NOUN
ap-1316	33	25	were	be	AUX
ap-1316	33	26	used	use	VERB
ap-1316	33	27	and	and	CCONJ
ap-1316	33	28	thermally	thermally	ADV
ap-1316	33	29	shaped	shape	VERB
ap-1316	33	30	.	.	PUNCT
ap-1316	34	1	the	the	DET
ap-1316	34	2	geometry	geometry	NOUN
ap-1316	34	3	was	be	AUX
ap-1316	34	4	either	either	CCONJ
ap-1316	34	5	flat	flat	ADJ
ap-1316	34	6	or	or	CCONJ
ap-1316	34	7	curved	curved	ADJ
ap-1316	34	8	(	(	PUNCT
ap-1316	34	9	cylindrical	cylindrical	ADJ
ap-1316	34	10	or	or	CCONJ
ap-1316	34	11	parabolic	parabolic	NOUN
ap-1316	34	12	)	)	PUNCT
ap-1316	34	13	.	.	PUNCT
ap-1316	35	1	the	the	DET
ap-1316	35	2	project	project	NOUN
ap-1316	35	3	continued	continue	VERB
ap-1316	35	4	with	with	ADP
ap-1316	35	5	larger	large	ADJ
ap-1316	35	6	samples	sample	NOUN
ap-1316	35	7	(	(	PUNCT
ap-1316	35	8	up	up	ADP
ap-1316	35	9	to	to	PART
ap-1316	35	10	300	300	NUM
ap-1316	35	11	×	×	NOUN
ap-1316	35	12	300	300	NUM
ap-1316	35	13	mm	mm	NOUN
ap-1316	35	14	)	)	PUNCT
ap-1316	35	15	and	and	CCONJ
ap-1316	35	16	further	further	ADJ
ap-1316	35	17	profiles	profile	NOUN
ap-1316	35	18	.	.	PUNCT
ap-1316	36	1	recent	recent	ADJ
ap-1316	36	2	efforts	effort	NOUN
ap-1316	36	3	have	have	AUX
ap-1316	36	4	focused	focus	VERB
ap-1316	36	5	on	on	ADP
ap-1316	36	6	optimizing	optimize	VERB
ap-1316	36	7	the	the	DET
ap-1316	36	8	relevant	relevant	ADJ
ap-1316	36	9	parameters	parameter	NOUN
ap-1316	36	10	of	of	ADP
ap-1316	36	11	both	both	DET
ap-1316	36	12	glass	glass	NOUN
ap-1316	36	13	material	material	NOUN
ap-1316	36	14	and	and	CCONJ
ap-1316	36	15	substrates	substrate	NOUN
ap-1316	36	16	,	,	PUNCT
ap-1316	36	17	as	as	ADV
ap-1316	36	18	well	well	ADV
ap-1316	36	19	as	as	ADP
ap-1316	36	20	the	the	DET
ap-1316	36	21	parameters	parameter	NOUN
ap-1316	36	22	of	of	ADP
ap-1316	36	23	the	the	DET
ap-1316	36	24	slumping	slump	VERB
ap-1316	36	25	process	process	NOUN
ap-1316	36	26	.	.	PUNCT
ap-1316	37	1	various	various	ADJ
ap-1316	37	2	approaches	approach	NOUN
ap-1316	37	3	have	have	AUX
ap-1316	37	4	been	be	AUX
ap-1316	37	5	investigated	investigate	VERB
ap-1316	37	6	(	(	PUNCT
ap-1316	37	7	figure	figure	NOUN
ap-1316	37	8	1	1	NUM
ap-1316	37	9	)	)	PUNCT
ap-1316	37	10	.	.	PUNCT
ap-1316	38	1	we	we	PRON
ap-1316	38	2	note	note	VERB
ap-1316	38	3	that	that	SCONJ
ap-1316	38	4	these	these	PRON
ap-1316	38	5	are	be	AUX
ap-1316	38	6	not	not	PART
ap-1316	38	7	quite	quite	ADV
ap-1316	38	8	identical	identical	ADJ
ap-1316	38	9	with	with	ADP
ap-1316	38	10	efforts	effort	NOUN
ap-1316	38	11	by	by	ADP
ap-1316	38	12	another	another	DET
ap-1316	38	13	teams	team	NOUN
ap-1316	38	14	(	(	PUNCT
ap-1316	38	15	e.g.	e.g.	ADV
ap-1316	38	16	zhang	zhang	PROPN
ap-1316	38	17	et	et	PROPN
ap-1316	38	18	al	al	PROPN
ap-1316	38	19	.	.	PROPN
ap-1316	38	20	,	,	PUNCT
ap-1316	38	21	2010	2010	NUM
ap-1316	38	22	,	,	PUNCT
ap-1316	38	23	ghigo	ghigo	PROPN
ap-1316	38	24	et	et	PROPN
ap-1316	38	25	al	al	PROPN
ap-1316	38	26	.	.	PROPN
ap-1316	38	27	,	,	PUNCT
ap-1316	38	28	2010	2010	NUM
ap-1316	38	29	)	)	PUNCT
ap-1316	38	30	.	.	PUNCT
ap-1316	39	1	the	the	DET
ap-1316	39	2	glass	glass	NOUN
ap-1316	39	3	samples	sample	NOUN
ap-1316	39	4	were	be	AUX
ap-1316	39	5	thermally	thermally	ADV
ap-1316	39	6	formed	form	VERB
ap-1316	39	7	at	at	ADP
ap-1316	39	8	rigaku	rigaku	NOUN
ap-1316	39	9	,	,	PUNCT
ap-1316	39	10	prague	prague	NOUN
ap-1316	39	11	,	,	PUNCT
ap-1316	39	12	and	and	CCONJ
ap-1316	39	13	also	also	ADV
ap-1316	39	14	at	at	ADP
ap-1316	39	15	the	the	DET
ap-1316	39	16	institute	institute	PROPN
ap-1316	39	17	of	of	ADP
ap-1316	39	18	chemical	chemical	PROPN
ap-1316	39	19	technology	technology	NOUN
ap-1316	39	20	in	in	ADP
ap-1316	39	21	prague	prague	PROPN
ap-1316	39	22	.	.	PUNCT
ap-1316	40	1	for	for	ADP
ap-1316	40	2	large	large	ADJ
ap-1316	40	3	samples	sample	NOUN
ap-1316	40	4	(	(	PUNCT
ap-1316	40	5	300×300	300×300	NUM
ap-1316	40	6	mm	mm	NOUN
ap-1316	40	7	)	)	PUNCT
ap-1316	40	8	,	,	PUNCT
ap-1316	40	9	facilities	facility	NOUN
ap-1316	40	10	at	at	ADP
ap-1316	40	11	the	the	DET
ap-1316	40	12	optical	optical	ADJ
ap-1316	40	13	development	development	NOUN
ap-1316	40	14	workshop	workshop	NOUN
ap-1316	40	15	in	in	ADP
ap-1316	40	16	turnov	turnov	NOUN
ap-1316	40	17	were	be	AUX
ap-1316	40	18	used	use	VERB
ap-1316	40	19	.	.	PUNCT
ap-1316	41	1	the	the	DET
ap-1316	41	2	strategy	strategy	NOUN
ap-1316	41	3	is	be	AUX
ap-1316	41	4	to	to	PART
ap-1316	41	5	develop	develop	VERB
ap-1316	41	6	a	a	DET
ap-1316	41	7	technology	technology	NOUN
ap-1316	41	8	suitable	suitable	ADJ
ap-1316	41	9	for	for	ADP
ap-1316	41	10	inexpensive	inexpensive	ADJ
ap-1316	41	11	mass	mass	NOUN
ap-1316	41	12	production	production	NOUN
ap-1316	41	13	of	of	ADP
ap-1316	41	14	thin	thin	ADJ
ap-1316	41	15	x	x	ADJ
ap-1316	41	16	-	-	NOUN
ap-1316	41	17	ray	ray	NOUN
ap-1316	41	18	optics	optic	NOUN
ap-1316	41	19	shells	shell	NOUN
ap-1316	41	20	,	,	PUNCT
ap-1316	41	21	i.e.	i.e.	X
ap-1316	41	22	,	,	PUNCT
ap-1316	41	23	to	to	PART
ap-1316	41	24	avoid	avoid	VERB
ap-1316	41	25	expensive	expensive	ADJ
ap-1316	41	26	mandrels	mandrel	NOUN
ap-1316	41	27	and	and	CCONJ
ap-1316	41	28	techniques	technique	NOUN
ap-1316	41	29	that	that	PRON
ap-1316	41	30	are	be	AUX
ap-1316	41	31	not	not	PART
ap-1316	41	32	suitable	suitable	ADJ
ap-1316	41	33	for	for	ADP
ap-1316	41	34	mass	mass	ADJ
ap-1316	41	35	production	production	NOUN
ap-1316	41	36	or	or	CCONJ
ap-1316	41	37	that	that	PRON
ap-1316	41	38	are	be	AUX
ap-1316	41	39	too	too	ADV
ap-1316	41	40	expensive	expensive	ADJ
ap-1316	41	41	.	.	PUNCT
ap-1316	42	1	numerous	numerous	ADJ
ap-1316	42	2	glass	glass	NOUN
ap-1316	42	3	samples	sample	NOUN
ap-1316	42	4	have	have	AUX
ap-1316	42	5	been	be	AUX
ap-1316	42	6	shaped	shape	VERB
ap-1316	42	7	and	and	CCONJ
ap-1316	42	8	tested	test	VERB
ap-1316	42	9	in	in	ADP
ap-1316	42	10	order	order	NOUN
ap-1316	42	11	to	to	PART
ap-1316	42	12	find	find	VERB
ap-1316	42	13	out	out	ADP
ap-1316	42	14	the	the	DET
ap-1316	42	15	optimal	optimal	ADJ
ap-1316	42	16	parameters	parameter	NOUN
ap-1316	42	17	.	.	PUNCT
ap-1316	43	1	the	the	DET
ap-1316	43	2	shapes	shape	NOUN
ap-1316	43	3	and	and	CCONJ
ap-1316	43	4	profiles	profile	NOUN
ap-1316	43	5	of	of	ADP
ap-1316	43	6	both	both	DET
ap-1316	43	7	mandrels	mandrel	NOUN
ap-1316	43	8	,	,	PUNCT
ap-1316	43	9	as	as	ADV
ap-1316	43	10	well	well	ADV
ap-1316	43	11	as	as	ADP
ap-1316	43	12	the	the	DET
ap-1316	43	13	resulting	result	VERB
ap-1316	43	14	glass	glass	NOUN
ap-1316	43	15	replicas	replica	NOUN
ap-1316	43	16	,	,	PUNCT
ap-1316	43	17	have	have	AUX
ap-1316	43	18	been	be	AUX
ap-1316	43	19	carefully	carefully	ADV
ap-1316	43	20	measured	measure	VERB
ap-1316	43	21	using	use	VERB
ap-1316	43	22	metrological	metrological	ADJ
ap-1316	43	23	devices	device	NOUN
ap-1316	43	24	.	.	PUNCT
ap-1316	44	1	the	the	DET
ap-1316	44	2	results	result	NOUN
ap-1316	44	3	show	show	VERB
ap-1316	44	4	that	that	SCONJ
ap-1316	44	5	the	the	DET
ap-1316	44	6	quality	quality	NOUN
ap-1316	44	7	of	of	ADP
ap-1316	44	8	the	the	DET
ap-1316	44	9	thermal	thermal	ADJ
ap-1316	44	10	glass	glass	NOUN
ap-1316	44	11	replica	replica	NOUN
ap-1316	44	12	can	can	AUX
ap-1316	44	13	be	be	AUX
ap-1316	44	14	significantly	significantly	ADV
ap-1316	44	15	improved	improve	VERB
ap-1316	44	16	by	by	ADP
ap-1316	44	17	optimizing	optimize	VERB
ap-1316	44	18	the	the	DET
ap-1316	44	19	material	material	NOUN
ap-1316	44	20	and	and	CCONJ
ap-1316	44	21	improving	improve	VERB
ap-1316	44	22	the	the	DET
ap-1316	44	23	design	design	NOUN
ap-1316	44	24	of	of	ADP
ap-1316	44	25	the	the	DET
ap-1316	44	26	mandrel	mandrel	NOUN
ap-1316	44	27	,	,	PUNCT
ap-1316	44	28	by	by	ADP
ap-1316	44	29	modifying	modify	VERB
ap-1316	44	30	the	the	DET
ap-1316	44	31	thermal	thermal	ADJ
ap-1316	44	32	forming	form	VERB
ap-1316	44	33	process	process	NOUN
ap-1316	44	34	,	,	PUNCT
ap-1316	44	35	as	as	ADV
ap-1316	44	36	well	well	ADV
ap-1316	44	37	as	as	ADP
ap-1316	44	38	by	by	ADP
ap-1316	44	39	optimizing	optimize	VERB
ap-1316	44	40	the	the	DET
ap-1316	44	41	temperature	temperature	NOUN
ap-1316	44	42	(	(	PUNCT
ap-1316	44	43	figure	figure	NOUN
ap-1316	44	44	2	2	NUM
ap-1316	44	45	)	)	PUNCT
ap-1316	44	46	.	.	PUNCT
ap-1316	45	1	after	after	ADP
ap-1316	45	2	the	the	DET
ap-1316	45	3	modifications	modification	NOUN
ap-1316	45	4	and	and	CCONJ
ap-1316	45	5	improvements	improvement	NOUN
ap-1316	45	6	,	,	PUNCT
ap-1316	45	7	some	some	PRON
ap-1316	45	8	of	of	ADP
ap-1316	45	9	them	they	PRON
ap-1316	45	10	significant	significant	ADJ
ap-1316	45	11	,	,	PUNCT
ap-1316	45	12	we	we	PRON
ap-1316	45	13	obtained	obtain	VERB
ap-1316	45	14	the	the	DET
ap-1316	45	15	resulting	result	VERB
ap-1316	45	16	deviation	deviation	NOUN
ap-1316	45	17	of	of	ADP
ap-1316	45	18	the	the	DET
ap-1316	45	19	thermally	thermally	ADV
ap-1316	45	20	formed	form	VERB
ap-1316	45	21	glass	glass	NOUN
ap-1316	45	22	foil	foil	NOUN
ap-1316	45	23	from	from	ADP
ap-1316	45	24	the	the	DET
ap-1316	45	25	ideal	ideal	NOUN
ap-1316	45	26	designed	design	VERB
ap-1316	45	27	profile	profile	NOUN
ap-1316	45	28	less	less	ADJ
ap-1316	45	29	than	than	ADP
ap-1316	45	30	1	1	NUM
ap-1316	45	31	μm	μm	NOUN
ap-1316	45	32	(	(	PUNCT
ap-1316	45	33	peak	peak	NOUN
ap-1316	45	34	to	to	ADP
ap-1316	45	35	valley	valley	NOUN
ap-1316	45	36	value	value	NOUN
ap-1316	45	37	)	)	PUNCT
ap-1316	45	38	in	in	ADP
ap-1316	45	39	the	the	DET
ap-1316	45	40	best	good	ADJ
ap-1316	45	41	case	case	NOUN
ap-1316	45	42	.	.	PUNCT
ap-1316	46	1	this	this	DET
ap-1316	46	2	value	value	NOUN
ap-1316	46	3	is	be	AUX
ap-1316	46	4	however	however	ADV
ap-1316	46	5	strongly	strongly	ADV
ap-1316	46	6	dependent	dependent	ADJ
ap-1316	46	7	on	on	ADP
ap-1316	46	8	the	the	DET
ap-1316	46	9	exact	exact	ADJ
ap-1316	46	10	temperature	temperature	NOUN
ap-1316	46	11	,	,	PUNCT
ap-1316	46	12	so	so	ADV
ap-1316	46	13	we	we	PRON
ap-1316	46	14	believe	believe	VERB
ap-1316	46	15	that	that	SCONJ
ap-1316	46	16	further	further	ADJ
ap-1316	46	17	improvements	improvement	NOUN
ap-1316	46	18	are	be	AUX
ap-1316	46	19	still	still	ADV
ap-1316	46	20	possible	possible	ADJ
ap-1316	46	21	.	.	PUNCT
ap-1316	47	1	fig	fig	NOUN
ap-1316	47	2	.	.	PUNCT
ap-1316	48	1	1	1	NUM
ap-1316	48	2	:	:	PUNCT
ap-1316	48	3	the	the	DET
ap-1316	48	4	three	three	NUM
ap-1316	48	5	investigated	investigate	VERB
ap-1316	48	6	glass	glass	NOUN
ap-1316	48	7	thermal	thermal	ADJ
ap-1316	48	8	arrangements	arrangement	NOUN
ap-1316	48	9	:	:	PUNCT
ap-1316	48	10	convex	convex	VERB
ap-1316	48	11	and	and	CCONJ
ap-1316	48	12	concave	concave	ADJ
ap-1316	48	13	mandrels	mandrel	NOUN
ap-1316	48	14	and	and	CCONJ
ap-1316	48	15	a	a	DET
ap-1316	48	16	double	double	ADJ
ap-1316	48	17	mandrel	mandrel	NOUN
ap-1316	48	18	fig	fig	NOUN
ap-1316	48	19	.	.	PUNCT
ap-1316	49	1	2	2	NUM
ap-1316	49	2	:	:	PUNCT
ap-1316	49	3	an	an	DET
ap-1316	49	4	example	example	NOUN
ap-1316	49	5	of	of	ADP
ap-1316	49	6	the	the	DET
ap-1316	49	7	optimization	optimization	NOUN
ap-1316	49	8	studies	study	NOUN
ap-1316	49	9	performed	perform	VERB
ap-1316	49	10	for	for	ADP
ap-1316	49	11	glass	glass	NOUN
ap-1316	49	12	thermal	thermal	ADJ
ap-1316	49	13	forming	forming	NOUN
ap-1316	49	14	:	:	PUNCT
ap-1316	49	15	optimization	optimization	NOUN
ap-1316	49	16	map	map	NOUN
ap-1316	49	17	for	for	ADP
ap-1316	49	18	waviness	waviness	NOUN
ap-1316	49	19	(	(	PUNCT
ap-1316	49	20	waviness	waviness	NOUN
ap-1316	49	21	wa	wa	ADJ
ap-1316	49	22	as	as	ADP
ap-1316	49	23	function	function	NOUN
ap-1316	49	24	of	of	ADP
ap-1316	49	25	forming	form	VERB
ap-1316	49	26	process	process	NOUN
ap-1316	49	27	parameters	parameter	NOUN
ap-1316	49	28	i.e.	i.e.	X
ap-1316	49	29	duration	duration	NOUN
ap-1316	49	30	of	of	ADP
ap-1316	49	31	the	the	DET
ap-1316	49	32	thermal	thermal	ADJ
ap-1316	49	33	forming	form	VERB
ap-1316	49	34	process	process	NOUN
ap-1316	49	35	(	(	PUNCT
ap-1316	49	36	τ	τ	X
ap-1316	49	37	)	)	PUNCT
ap-1316	49	38	and	and	CCONJ
ap-1316	49	39	temperature	temperature	NOUN
ap-1316	49	40	(	(	PUNCT
ap-1316	49	41	t	t	PROPN
ap-1316	49	42	)	)	PUNCT
ap-1316	49	43	,	,	PUNCT
ap-1316	49	44	tg	tg	PROPN
ap-1316	49	45	means	mean	VERB
ap-1316	49	46	glass	glass	NOUN
ap-1316	49	47	transformation	transformation	NOUN
ap-1316	49	48	temperature	temperature	NOUN
ap-1316	49	49	)	)	PUNCT
ap-1316	49	50	47	47	NUM
ap-1316	49	51	acta	acta	PROPN
ap-1316	49	52	polytechnica	polytechnica	PROPN
ap-1316	49	53	vol	vol	NOUN
ap-1316	49	54	.	.	PUNCT
ap-1316	50	1	51	51	NUM
ap-1316	50	2	no	no	NOUN
ap-1316	50	3	.	.	PUNCT
ap-1316	51	1	2/2011	2/2011	NUM
ap-1316	51	2	the	the	DET
ap-1316	51	3	fine	fine	ADJ
ap-1316	51	4	original	original	ADJ
ap-1316	51	5	microroughness	microroughness	NOUN
ap-1316	51	6	(	(	PUNCT
ap-1316	51	7	typically	typically	ADV
ap-1316	51	8	better	well	ADJ
ap-1316	51	9	than	than	ADP
ap-1316	51	10	1	1	NUM
ap-1316	51	11	nm	nm	NOUN
ap-1316	51	12	)	)	PUNCT
ap-1316	51	13	of	of	ADP
ap-1316	51	14	the	the	DET
ap-1316	51	15	original	original	ADJ
ap-1316	51	16	float	float	NOUN
ap-1316	51	17	glass	glass	NOUN
ap-1316	51	18	foil	foil	NOUN
ap-1316	51	19	was	be	AUX
ap-1316	51	20	found	find	VERB
ap-1316	51	21	not	not	PART
ap-1316	51	22	to	to	PART
ap-1316	51	23	be	be	AUX
ap-1316	51	24	degraded	degrade	VERB
ap-1316	51	25	by	by	ADP
ap-1316	51	26	the	the	DET
ap-1316	51	27	thermal	thermal	ADJ
ap-1316	51	28	forming	form	VERB
ap-1316	51	29	process	process	NOUN
ap-1316	51	30	.	.	PUNCT
ap-1316	52	1	we	we	PRON
ap-1316	52	2	note	note	VERB
ap-1316	52	3	that	that	SCONJ
ap-1316	52	4	our	our	PRON
ap-1316	52	5	approach	approach	NOUN
ap-1316	52	6	in	in	ADP
ap-1316	52	7	thermal	thermal	ADJ
ap-1316	52	8	glass	glass	NOUN
ap-1316	52	9	forming	form	VERB
ap-1316	52	10	is	be	AUX
ap-1316	52	11	different	different	ADJ
ap-1316	52	12	from	from	ADP
ap-1316	52	13	the	the	DET
ap-1316	52	14	approaches	approach	NOUN
ap-1316	52	15	used	use	VERB
ap-1316	52	16	by	by	ADP
ap-1316	52	17	other	other	ADJ
ap-1316	52	18	authors	author	NOUN
ap-1316	52	19	.	.	PUNCT
ap-1316	53	1	recent	recent	ADJ
ap-1316	53	2	efforts	effort	NOUN
ap-1316	53	3	have	have	AUX
ap-1316	53	4	been	be	AUX
ap-1316	53	5	devoted	devote	VERB
ap-1316	53	6	to	to	ADP
ap-1316	53	7	optimizing	optimize	VERB
ap-1316	53	8	the	the	DET
ap-1316	53	9	whole	whole	ADJ
ap-1316	53	10	process	process	NOUN
ap-1316	53	11	,	,	PUNCT
ap-1316	53	12	using	use	VERB
ap-1316	53	13	and	and	CCONJ
ap-1316	53	14	comparing	compare	VERB
ap-1316	53	15	different	different	ADJ
ap-1316	53	16	forming	form	VERB
ap-1316	53	17	strategies	strategy	NOUN
ap-1316	53	18	etc	etc	X
ap-1316	53	19	.	.	X
ap-1316	53	20	,	,	PUNCT
ap-1316	53	21	as	as	SCONJ
ap-1316	53	22	the	the	DET
ap-1316	53	23	final	final	ADJ
ap-1316	53	24	goal	goal	NOUN
ap-1316	53	25	is	be	AUX
ap-1316	53	26	to	to	PART
ap-1316	53	27	further	far	ADV
ap-1316	53	28	improve	improve	VERB
ap-1316	53	29	the	the	DET
ap-1316	53	30	forming	form	VERB
ap-1316	53	31	accuracy	accuracy	NOUN
ap-1316	53	32	to	to	ADP
ap-1316	53	33	less	less	ADJ
ap-1316	53	34	than	than	ADP
ap-1316	53	35	0.1	0.1	NUM
ap-1316	53	36	μm	μm	NUM
ap-1316	53	37	values	value	NOUN
ap-1316	53	38	.	.	PUNCT
ap-1316	54	1	for	for	ADP
ap-1316	54	2	the	the	DET
ap-1316	54	3	near	near	ADJ
ap-1316	54	4	future	future	NOUN
ap-1316	54	5	,	,	PUNCT
ap-1316	54	6	we	we	PRON
ap-1316	54	7	plan	plan	VERB
ap-1316	54	8	to	to	PART
ap-1316	54	9	continue	continue	VERB
ap-1316	54	10	these	these	DET
ap-1316	54	11	efforts	effort	NOUN
ap-1316	54	12	together	together	ADV
ap-1316	54	13	with	with	ADP
ap-1316	54	14	investigations	investigation	NOUN
ap-1316	54	15	of	of	ADP
ap-1316	54	16	computer	computer	NOUN
ap-1316	54	17	-	-	PUNCT
ap-1316	54	18	controlled	control	VERB
ap-1316	54	19	forming	forming	NOUN
ap-1316	54	20	of	of	ADP
ap-1316	54	21	glass	glass	NOUN
ap-1316	54	22	foils	foil	NOUN
ap-1316	54	23	(	(	PUNCT
ap-1316	54	24	according	accord	VERB
ap-1316	54	25	to	to	ADP
ap-1316	54	26	the	the	DET
ap-1316	54	27	principles	principle	NOUN
ap-1316	54	28	of	of	ADP
ap-1316	54	29	active	active	ADJ
ap-1316	54	30	optics	optic	NOUN
ap-1316	54	31	)	)	PUNCT
ap-1316	54	32	.	.	PUNCT
ap-1316	55	1	4	4	NUM
ap-1316	55	2	the	the	DET
ap-1316	55	3	silicon	silicon	NOUN
ap-1316	55	4	wafer	wafer	NOUN
ap-1316	55	5	alternative	alternative	ADJ
ap-1316	55	6	silicon	silicon	NOUN
ap-1316	55	7	is	be	AUX
ap-1316	55	8	a	a	DET
ap-1316	55	9	relatively	relatively	ADV
ap-1316	55	10	light	light	ADJ
ap-1316	55	11	material	material	NOUN
ap-1316	55	12	and	and	CCONJ
ap-1316	55	13	already	already	ADV
ap-1316	55	14	during	during	ADP
ap-1316	55	15	the	the	DET
ap-1316	55	16	manufacturing	manufacturing	NOUN
ap-1316	55	17	process	process	NOUN
ap-1316	55	18	it	it	PRON
ap-1316	55	19	is	be	AUX
ap-1316	55	20	lapped	lap	VERB
ap-1316	55	21	and	and	CCONJ
ap-1316	55	22	polished	polished	ADJ
ap-1316	55	23	(	(	PUNCT
ap-1316	55	24	either	either	CCONJ
ap-1316	55	25	on	on	ADP
ap-1316	55	26	one	one	NUM
ap-1316	55	27	side	side	NOUN
ap-1316	55	28	or	or	CCONJ
ap-1316	55	29	on	on	ADP
ap-1316	55	30	both	both	DET
ap-1316	55	31	sides	side	NOUN
ap-1316	55	32	)	)	PUNCT
ap-1316	55	33	to	to	ADP
ap-1316	55	34	very	very	ADV
ap-1316	55	35	fine	fine	ADJ
ap-1316	55	36	smoothness	smoothness	NOUN
ap-1316	55	37	(	(	PUNCT
ap-1316	55	38	better	well	ADJ
ap-1316	55	39	than	than	ADP
ap-1316	55	40	a	a	DET
ap-1316	55	41	few	few	ADJ
ap-1316	55	42	0.1	0.1	NUM
ap-1316	55	43	nm	nm	NOUN
ap-1316	55	44	)	)	PUNCT
ap-1316	55	45	and	and	CCONJ
ap-1316	55	46	thickness	thickness	NOUN
ap-1316	55	47	homogeneity	homogeneity	NOUN
ap-1316	55	48	(	(	PUNCT
ap-1316	55	49	of	of	ADP
ap-1316	55	50	the	the	DET
ap-1316	55	51	order	order	NOUN
ap-1316	55	52	of	of	ADP
ap-1316	55	53	1	1	NUM
ap-1316	55	54	μm	μm	NUM
ap-1316	55	55	)	)	PUNCT
ap-1316	55	56	.	.	PUNCT
ap-1316	56	1	another	another	DET
ap-1316	56	2	obvious	obvious	ADJ
ap-1316	56	3	alternative	alternative	NOUN
ap-1316	56	4	,	,	PUNCT
ap-1316	56	5	recently	recently	ADV
ap-1316	56	6	considered	consider	VERB
ap-1316	56	7	as	as	ADP
ap-1316	56	8	one	one	NUM
ap-1316	56	9	of	of	ADP
ap-1316	56	10	most	most	ADV
ap-1316	56	11	promising	promising	ADJ
ap-1316	56	12	for	for	ADP
ap-1316	56	13	high	high	ADJ
ap-1316	56	14	-	-	PUNCT
ap-1316	56	15	precision	precision	NOUN
ap-1316	56	16	x	x	NOUN
ap-1316	56	17	-	-	NOUN
ap-1316	56	18	ray	ray	NOUN
ap-1316	56	19	optics	optic	NOUN
ap-1316	56	20	for	for	ADP
ap-1316	56	21	ixo	ixo	NOUN
ap-1316	56	22	,	,	PUNCT
ap-1316	56	23	is	be	AUX
ap-1316	56	24	the	the	DET
ap-1316	56	25	use	use	NOUN
ap-1316	56	26	of	of	ADP
ap-1316	56	27	x	x	NOUN
ap-1316	56	28	-	-	NOUN
ap-1316	56	29	ray	ray	NOUN
ap-1316	56	30	optics	optic	NOUN
ap-1316	56	31	based	base	VERB
ap-1316	56	32	on	on	ADP
ap-1316	56	33	commercially	commercially	ADV
ap-1316	56	34	available	available	ADJ
ap-1316	56	35	silicon	silicon	NOUN
ap-1316	56	36	wafers	wafer	NOUN
ap-1316	56	37	manufactured	manufacture	VERB
ap-1316	56	38	mainly	mainly	ADV
ap-1316	56	39	for	for	ADP
ap-1316	56	40	the	the	DET
ap-1316	56	41	purposes	purpose	NOUN
ap-1316	56	42	of	of	ADP
ap-1316	56	43	the	the	DET
ap-1316	56	44	semiconductor	semiconductor	NOUN
ap-1316	56	45	industry	industry	NOUN
ap-1316	56	46	.	.	PUNCT
ap-1316	57	1	the	the	DET
ap-1316	57	2	main	main	ADJ
ap-1316	57	3	advantages	advantage	NOUN
ap-1316	57	4	of	of	ADP
ap-1316	57	5	the	the	DET
ap-1316	57	6	application	application	NOUN
ap-1316	57	7	of	of	ADP
ap-1316	57	8	si	si	NOUN
ap-1316	57	9	wafers	wafer	NOUN
ap-1316	57	10	in	in	ADP
ap-1316	57	11	space	space	NOUN
ap-1316	57	12	x	x	NOUN
ap-1316	57	13	-	-	NOUN
ap-1316	57	14	ray	ray	NOUN
ap-1316	57	15	optics	optic	NOUN
ap-1316	57	16	are	be	AUX
ap-1316	57	17	(	(	PUNCT
ap-1316	57	18	i	i	NOUN
ap-1316	57	19	)	)	PUNCT
ap-1316	57	20	the	the	DET
ap-1316	57	21	volume	volume	NOUN
ap-1316	57	22	density	density	NOUN
ap-1316	57	23	,	,	PUNCT
ap-1316	57	24	which	which	PRON
ap-1316	57	25	is	be	AUX
ap-1316	57	26	more	more	ADJ
ap-1316	57	27	than	than	ADP
ap-1316	57	28	4	4	NUM
ap-1316	57	29	times	time	NOUN
ap-1316	57	30	lower	low	ADJ
ap-1316	57	31	than	than	ADP
ap-1316	57	32	the	the	DET
ap-1316	57	33	electroformed	electroformed	ADJ
ap-1316	57	34	nickel	nickel	NOUN
ap-1316	57	35	used	use	VERB
ap-1316	57	36	in	in	ADP
ap-1316	57	37	the	the	DET
ap-1316	57	38	past	past	NOUN
ap-1316	57	39	for	for	ADP
ap-1316	57	40	galvanoplastic	galvanoplastic	ADJ
ap-1316	57	41	replication	replication	NOUN
ap-1316	57	42	of	of	ADP
ap-1316	57	43	multiply	multiply	ADV
ap-1316	57	44	nested	nested	ADJ
ap-1316	57	45	x	x	ADJ
ap-1316	57	46	-	-	NOUN
ap-1316	57	47	ray	ray	NOUN
ap-1316	57	48	mirrors	mirror	NOUN
ap-1316	57	49	,	,	PUNCT
ap-1316	57	50	and	and	CCONJ
ap-1316	57	51	slightly	slightly	ADV
ap-1316	57	52	less	less	ADJ
ap-1316	57	53	than	than	ADP
ap-1316	57	54	the	the	DET
ap-1316	57	55	alternative	alternative	ADJ
ap-1316	57	56	approach	approach	NOUN
ap-1316	57	57	of	of	ADP
ap-1316	57	58	glass	glass	NOUN
ap-1316	57	59	foils	foil	NOUN
ap-1316	57	60	,	,	PUNCT
ap-1316	57	61	(	(	PUNCT
ap-1316	57	62	ii	ii	NOUN
ap-1316	57	63	)	)	PUNCT
ap-1316	57	64	very	very	ADV
ap-1316	57	65	high	high	ADJ
ap-1316	57	66	thickness	thickness	NOUN
ap-1316	57	67	homogeneity	homogeneity	NOUN
ap-1316	57	68	,	,	PUNCT
ap-1316	57	69	typically	typically	ADV
ap-1316	57	70	less	less	ADJ
ap-1316	57	71	than	than	ADP
ap-1316	57	72	1	1	NUM
ap-1316	57	73	μm	μm	NUM
ap-1316	57	74	over	over	ADP
ap-1316	57	75	100	100	NUM
ap-1316	57	76	mm	mm	NOUN
ap-1316	57	77	,	,	PUNCT
ap-1316	57	78	and	and	CCONJ
ap-1316	57	79	(	(	PUNCT
ap-1316	57	80	iii	iii	NOUN
ap-1316	57	81	)	)	PUNCT
ap-1316	57	82	very	very	ADV
ap-1316	57	83	small	small	ADJ
ap-1316	57	84	surface	surface	NOUN
ap-1316	57	85	microroughness	microroughness	NOUN
ap-1316	57	86	either	either	CCONJ
ap-1316	57	87	on	on	ADP
ap-1316	57	88	one	one	NUM
ap-1316	57	89	side	side	NOUN
ap-1316	57	90	or	or	CCONJ
ap-1316	57	91	on	on	ADP
ap-1316	57	92	both	both	DET
ap-1316	57	93	sides	side	NOUN
ap-1316	57	94	(	(	PUNCT
ap-1316	57	95	typically	typically	ADV
ap-1316	57	96	of	of	ADP
ap-1316	57	97	the	the	DET
ap-1316	57	98	order	order	NOUN
ap-1316	57	99	of	of	ADP
ap-1316	57	100	a	a	DET
ap-1316	57	101	few	few	ADJ
ap-1316	57	102	0.1	0.1	NUM
ap-1316	57	103	nm	nm	NOUN
ap-1316	57	104	or	or	CCONJ
ap-1316	57	105	even	even	ADV
ap-1316	57	106	less	less	ADJ
ap-1316	57	107	,	,	PUNCT
ap-1316	57	108	e.g.	e.g.	ADV
ap-1316	57	109	figure	figure	NOUN
ap-1316	57	110	3	3	NUM
ap-1316	57	111	)	)	PUNCT
ap-1316	57	112	.	.	PUNCT
ap-1316	58	1	silicon	silicon	NOUN
ap-1316	58	2	wafers	wafer	NOUN
ap-1316	58	3	were	be	AUX
ap-1316	58	4	expected	expect	VERB
ap-1316	58	5	to	to	PART
ap-1316	58	6	be	be	AUX
ap-1316	58	7	used	use	VERB
ap-1316	58	8	in	in	ADP
ap-1316	58	9	the	the	DET
ap-1316	58	10	esa	esa	PROPN
ap-1316	58	11	xeus	xeus	PROPN
ap-1316	58	12	project	project	NOUN
ap-1316	58	13	and	and	CCONJ
ap-1316	58	14	are	be	AUX
ap-1316	58	15	still	still	ADV
ap-1316	58	16	under	under	ADP
ap-1316	58	17	consideration	consideration	NOUN
ap-1316	58	18	for	for	ADP
ap-1316	58	19	the	the	DET
ap-1316	58	20	ixo	ixo	NOUN
ap-1316	58	21	(	(	PUNCT
ap-1316	58	22	now	now	ADV
ap-1316	58	23	athena	athena	NOUN
ap-1316	58	24	)	)	PUNCT
ap-1316	58	25	project	project	NOUN
ap-1316	58	26	.	.	PUNCT
ap-1316	59	1	the	the	DET
ap-1316	59	2	recent	recent	ADJ
ap-1316	59	3	baseline	baseline	NOUN
ap-1316	59	4	optics	optic	NOUN
ap-1316	59	5	for	for	ADP
ap-1316	59	6	the	the	DET
ap-1316	59	7	ixo	ixo	NOUN
ap-1316	59	8	x	x	PROPN
ap-1316	59	9	-	-	NOUN
ap-1316	59	10	ray	ray	NOUN
ap-1316	59	11	telescope	telescope	NOUN
ap-1316	59	12	design	design	NOUN
ap-1316	59	13	is	be	AUX
ap-1316	59	14	based	base	VERB
ap-1316	59	15	on	on	ADP
ap-1316	59	16	x	x	ADJ
ap-1316	59	17	-	-	NOUN
ap-1316	59	18	ray	ray	ADJ
ap-1316	59	19	high	high	ADJ
ap-1316	59	20	precision	precision	NOUN
ap-1316	59	21	pore	pore	ADJ
ap-1316	59	22	optics	optic	NOUN
ap-1316	59	23	(	(	PUNCT
ap-1316	59	24	x	x	NOUN
ap-1316	59	25	-	-	PUNCT
ap-1316	59	26	hpo	hpo	NOUN
ap-1316	59	27	)	)	PUNCT
ap-1316	59	28	,	,	PUNCT
ap-1316	59	29	a	a	DET
ap-1316	59	30	technology	technology	NOUN
ap-1316	59	31	currently	currently	ADV
ap-1316	59	32	under	under	ADP
ap-1316	59	33	development	development	NOUN
ap-1316	59	34	with	with	ADP
ap-1316	59	35	esa	esa	PROPN
ap-1316	59	36	funding	funding	PROPN
ap-1316	59	37	(	(	PUNCT
ap-1316	59	38	rd	rd	NOUN
ap-1316	59	39	-	-	PUNCT
ap-1316	59	40	opt	opt	PROPN
ap-1316	59	41	,	,	PUNCT
ap-1316	59	42	rd	rd	NOUN
ap-1316	59	43	-	-	PUNCT
ap-1316	59	44	hpo	hpo	PROPN
ap-1316	59	45	)	)	PUNCT
ap-1316	59	46	,	,	PUNCT
ap-1316	59	47	in	in	ADP
ap-1316	59	48	view	view	NOUN
ap-1316	59	49	of	of	ADP
ap-1316	59	50	achieving	achieve	VERB
ap-1316	59	51	large	large	ADJ
ap-1316	59	52	effective	effective	ADJ
ap-1316	59	53	areas	area	NOUN
ap-1316	59	54	with	with	ADP
ap-1316	59	55	low	low	ADJ
ap-1316	59	56	mass	mass	PROPN
ap-1316	59	57	,	,	PUNCT
ap-1316	59	58	reduced	reduce	VERB
ap-1316	59	59	telescope	telescope	NOUN
ap-1316	59	60	length	length	NOUN
ap-1316	59	61	,	,	PUNCT
ap-1316	59	62	high	high	ADJ
ap-1316	59	63	stiffness	stiffness	NOUN
ap-1316	59	64	,	,	PUNCT
ap-1316	59	65	and	and	CCONJ
ap-1316	59	66	a	a	DET
ap-1316	59	67	monolithic	monolithic	ADJ
ap-1316	59	68	structure	structure	NOUN
ap-1316	59	69	,	,	PUNCT
ap-1316	59	70	favoured	favour	VERB
ap-1316	59	71	for	for	ADP
ap-1316	59	72	handling	handle	VERB
ap-1316	59	73	the	the	DET
ap-1316	59	74	thermal	thermal	ADJ
ap-1316	59	75	environment	environment	NOUN
ap-1316	59	76	and	and	CCONJ
ap-1316	59	77	for	for	ADP
ap-1316	59	78	simplifying	simplify	VERB
ap-1316	59	79	the	the	DET
ap-1316	59	80	alignment	alignment	NOUN
ap-1316	59	81	process	process	NOUN
ap-1316	59	82	(	(	PUNCT
ap-1316	59	83	bavdaz	bavdaz	NOUN
ap-1316	59	84	et	et	PROPN
ap-1316	59	85	al	al	PROPN
ap-1316	59	86	.	.	PROPN
ap-1316	59	87	2010	2010	NUM
ap-1316	59	88	)	)	PUNCT
ap-1316	59	89	.	.	PUNCT
ap-1316	60	1	in	in	ADP
ap-1316	60	2	addition	addition	NOUN
ap-1316	60	3	,	,	PUNCT
ap-1316	60	4	due	due	ADP
ap-1316	60	5	to	to	ADP
ap-1316	60	6	the	the	DET
ap-1316	60	7	higher	high	ADJ
ap-1316	60	8	packing	packing	NOUN
ap-1316	60	9	density	density	NOUN
ap-1316	60	10	and	and	CCONJ
ap-1316	60	11	the	the	DET
ap-1316	60	12	associated	associate	VERB
ap-1316	60	13	shorter	short	ADJ
ap-1316	60	14	mirrors	mirror	NOUN
ap-1316	60	15	required	require	VERB
ap-1316	60	16	,	,	PUNCT
ap-1316	60	17	the	the	DET
ap-1316	60	18	conical	conical	ADJ
ap-1316	60	19	approximation	approximation	NOUN
ap-1316	60	20	to	to	ADP
ap-1316	60	21	the	the	DET
ap-1316	60	22	wolter	wolter	NOUN
ap-1316	60	23	-	-	PUNCT
ap-1316	60	24	i	i	PRON
ap-1316	60	25	geometry	geometry	NOUN
ap-1316	60	26	becomes	become	VERB
ap-1316	60	27	possible	possible	ADJ
ap-1316	60	28	.	.	PUNCT
ap-1316	61	1	the	the	DET
ap-1316	61	2	x	x	PROPN
ap-1316	61	3	-	-	ADJ
ap-1316	61	4	hpo	hpo	NOUN
ap-1316	61	5	optics	optic	NOUN
ap-1316	61	6	is	be	AUX
ap-1316	61	7	based	base	VERB
ap-1316	61	8	on	on	ADP
ap-1316	61	9	ribbed	rib	VERB
ap-1316	61	10	si	si	NOUN
ap-1316	61	11	wafers	wafer	NOUN
ap-1316	61	12	stacked	stack	VERB
ap-1316	61	13	together	together	ADV
ap-1316	61	14	.	.	PUNCT
ap-1316	62	1	the	the	DET
ap-1316	62	2	si	si	PROPN
ap-1316	62	3	wafers	wafer	NOUN
ap-1316	62	4	to	to	PART
ap-1316	62	5	achieve	achieve	VERB
ap-1316	62	6	the	the	DET
ap-1316	62	7	conical	conical	ADJ
ap-1316	62	8	approximation	approximation	NOUN
ap-1316	62	9	are	be	AUX
ap-1316	62	10	formed	form	VERB
ap-1316	62	11	by	by	ADP
ap-1316	62	12	stacking	stack	VERB
ap-1316	62	13	large	large	ADJ
ap-1316	62	14	number	number	NOUN
ap-1316	62	15	of	of	ADP
ap-1316	62	16	plates	plate	NOUN
ap-1316	62	17	together	together	ADV
ap-1316	62	18	using	use	VERB
ap-1316	62	19	a	a	DET
ap-1316	62	20	mandrel	mandrel	NOUN
ap-1316	62	21	.	.	PUNCT
ap-1316	63	1	the	the	DET
ap-1316	63	2	typical	typical	ADJ
ap-1316	63	3	size	size	NOUN
ap-1316	63	4	of	of	ADP
ap-1316	63	5	the	the	DET
ap-1316	63	6	si	si	PROPN
ap-1316	63	7	wafers	wafer	NOUN
ap-1316	63	8	is	be	AUX
ap-1316	63	9	10	10	NUM
ap-1316	63	10	×	×	NOUN
ap-1316	63	11	10	10	NUM
ap-1316	63	12	cm	cm	NOUN
ap-1316	63	13	.	.	PUNCT
ap-1316	64	1	there	there	PRON
ap-1316	64	2	are	be	VERB
ap-1316	64	3	also	also	ADV
ap-1316	64	4	alternative	alternative	ADJ
ap-1316	64	5	x	x	NOUN
ap-1316	64	6	-	-	NOUN
ap-1316	64	7	ray	ray	NOUN
ap-1316	64	8	optics	optic	NOUN
ap-1316	64	9	arrangements	arrangement	NOUN
ap-1316	64	10	with	with	ADP
ap-1316	64	11	the	the	DET
ap-1316	64	12	use	use	NOUN
ap-1316	64	13	of	of	ADP
ap-1316	64	14	si	si	NOUN
ap-1316	64	15	wafers	wafer	NOUN
ap-1316	64	16	.	.	PUNCT
ap-1316	65	1	in	in	ADP
ap-1316	65	2	this	this	DET
ap-1316	65	3	paper	paper	NOUN
ap-1316	65	4	,	,	PUNCT
ap-1316	65	5	we	we	PRON
ap-1316	65	6	refer	refer	VERB
ap-1316	65	7	to	to	ADP
ap-1316	65	8	the	the	DET
ap-1316	65	9	development	development	NOUN
ap-1316	65	10	of	of	ADP
ap-1316	65	11	an	an	DET
ap-1316	65	12	alternative	alternative	ADJ
ap-1316	65	13	design	design	NOUN
ap-1316	65	14	of	of	ADP
ap-1316	65	15	innovative	innovative	ADJ
ap-1316	65	16	precise	precise	ADJ
ap-1316	65	17	x	x	NOUN
ap-1316	65	18	-	-	NOUN
ap-1316	65	19	ray	ray	NOUN
ap-1316	65	20	optics	optic	NOUN
ap-1316	65	21	based	base	VERB
ap-1316	65	22	on	on	ADP
ap-1316	65	23	si	si	PROPN
ap-1316	65	24	wafers	wafer	NOUN
ap-1316	65	25	.	.	PUNCT
ap-1316	66	1	our	our	PRON
ap-1316	66	2	approach	approach	NOUN
ap-1316	66	3	is	be	AUX
ap-1316	66	4	based	base	VERB
ap-1316	66	5	on	on	ADP
ap-1316	66	6	two	two	NUM
ap-1316	66	7	steps	step	NOUN
ap-1316	66	8	,	,	PUNCT
ap-1316	66	9	namely	namely	ADV
ap-1316	66	10	(	(	PUNCT
ap-1316	66	11	i	i	NOUN
ap-1316	66	12	)	)	PUNCT
ap-1316	66	13	developing	develop	VERB
ap-1316	66	14	dedicated	dedicate	VERB
ap-1316	66	15	si	si	NOUN
ap-1316	66	16	wafers	wafer	NOUN
ap-1316	66	17	with	with	ADP
ap-1316	66	18	properties	property	NOUN
ap-1316	66	19	optimized	optimize	VERB
ap-1316	66	20	for	for	ADP
ap-1316	66	21	use	use	NOUN
ap-1316	66	22	in	in	ADP
ap-1316	66	23	space	space	NOUN
ap-1316	66	24	x	x	NOUN
ap-1316	66	25	-	-	NOUN
ap-1316	66	26	ray	ray	NOUN
ap-1316	66	27	telescopes	telescope	NOUN
ap-1316	66	28	and	and	CCONJ
ap-1316	66	29	(	(	PUNCT
ap-1316	66	30	ii	ii	NOUN
ap-1316	66	31	)	)	PUNCT
ap-1316	66	32	precisely	precisely	ADV
ap-1316	66	33	shaping	shape	VERB
ap-1316	66	34	the	the	DET
ap-1316	66	35	wafers	wafer	NOUN
ap-1316	66	36	to	to	ADP
ap-1316	66	37	the	the	DET
ap-1316	66	38	optical	optical	ADJ
ap-1316	66	39	surfaces	surface	NOUN
ap-1316	66	40	(	(	PUNCT
ap-1316	66	41	figure	figure	NOUN
ap-1316	66	42	4	4	NUM
ap-1316	66	43	)	)	PUNCT
ap-1316	66	44	.	.	PUNCT
ap-1316	67	1	stacking	stack	VERB
ap-1316	67	2	to	to	PART
ap-1316	67	3	achieve	achieve	VERB
ap-1316	67	4	nested	nested	ADJ
ap-1316	67	5	arrays	array	NOUN
ap-1316	67	6	is	be	AUX
ap-1316	67	7	performed	perform	VERB
ap-1316	67	8	after	after	SCONJ
ap-1316	67	9	the	the	DET
ap-1316	67	10	wafers	wafer	NOUN
ap-1316	67	11	have	have	AUX
ap-1316	67	12	been	be	AUX
ap-1316	67	13	shaped	shape	VERB
ap-1316	67	14	.	.	PUNCT
ap-1316	68	1	in	in	ADP
ap-1316	68	2	this	this	DET
ap-1316	68	3	approach	approach	NOUN
ap-1316	68	4	,	,	PUNCT
ap-1316	68	5	multi	multi	ADJ
ap-1316	68	6	foil	foil	NOUN
ap-1316	68	7	optics	optic	NOUN
ap-1316	68	8	(	(	PUNCT
ap-1316	68	9	mfo	mfo	NOUN
ap-1316	68	10	)	)	PUNCT
ap-1316	68	11	is	be	AUX
ap-1316	68	12	thus	thus	ADV
ap-1316	68	13	created	create	VERB
ap-1316	68	14	from	from	ADP
ap-1316	68	15	shaped	shape	VERB
ap-1316	68	16	si	si	NOUN
ap-1316	68	17	wafers	wafer	NOUN
ap-1316	68	18	(	(	PUNCT
ap-1316	68	19	figure	figure	NOUN
ap-1316	68	20	5	5	NUM
ap-1316	68	21	)	)	PUNCT
ap-1316	68	22	.	.	PUNCT
ap-1316	69	1	for	for	ADP
ap-1316	69	2	more	more	ADJ
ap-1316	69	3	details	detail	NOUN
ap-1316	69	4	on	on	ADP
ap-1316	69	5	mfo	mfo	PROPN
ap-1316	69	6	,	,	PUNCT
ap-1316	69	7	see	see	VERB
ap-1316	69	8	hudec	hudec	NOUN
ap-1316	69	9	et	et	PROPN
ap-1316	69	10	al	al	PROPN
ap-1316	69	11	.	.	PUNCT
ap-1316	70	1	(	(	PUNCT
ap-1316	70	2	2005	2005	NUM
ap-1316	70	3	)	)	PUNCT
ap-1316	70	4	.	.	PUNCT
ap-1316	71	1	fig	fig	NOUN
ap-1316	71	2	.	.	PUNCT
ap-1316	72	1	3	3	NUM
ap-1316	72	2	:	:	PUNCT
ap-1316	72	3	afm	afm	PROPN
ap-1316	72	4	mesurement	mesurement	NOUN
ap-1316	72	5	results	result	VERB
ap-1316	72	6	for	for	ADP
ap-1316	72	7	si	si	NOUN
ap-1316	72	8	wafers	wafer	NOUN
ap-1316	72	9	fig	fig	NOUN
ap-1316	72	10	.	.	PUNCT
ap-1316	73	1	4	4	NUM
ap-1316	73	2	:	:	PUNCT
ap-1316	73	3	taylor	taylor	PROPN
ap-1316	73	4	-	-	PUNCT
ap-1316	73	5	hobson	hobson	PROPN
ap-1316	73	6	profilometric	profilometric	PROPN
ap-1316	73	7	measurement	measurement	NOUN
ap-1316	73	8	of	of	ADP
ap-1316	73	9	a	a	DET
ap-1316	73	10	bent	bent	ADJ
ap-1316	73	11	si	si	NOUN
ap-1316	73	12	wafer	wafer	NOUN
ap-1316	73	13	fig	fig	NOUN
ap-1316	73	14	.	.	PUNCT
ap-1316	74	1	5	5	NUM
ap-1316	74	2	:	:	PUNCT
ap-1316	74	3	multi	multi	ADJ
ap-1316	74	4	foil	foil	NOUN
ap-1316	74	5	optics	optic	NOUN
ap-1316	74	6	(	(	PUNCT
ap-1316	74	7	mfo	mfo	NOUN
ap-1316	74	8	)	)	PUNCT
ap-1316	74	9	in	in	ADP
ap-1316	74	10	the	the	DET
ap-1316	74	11	kirkpatrick	kirkpatrick	NOUN
ap-1316	74	12	-	-	PUNCT
ap-1316	74	13	baez	baez	PROPN
ap-1316	74	14	(	(	PUNCT
ap-1316	74	15	k	k	PROPN
ap-1316	74	16	-	-	PUNCT
ap-1316	74	17	b	b	NOUN
ap-1316	74	18	)	)	PUNCT
ap-1316	74	19	arrangement	arrangement	NOUN
ap-1316	74	20	48	48	NUM
ap-1316	74	21	acta	acta	PROPN
ap-1316	74	22	polytechnica	polytechnica	PROPN
ap-1316	74	23	vol	vol	NOUN
ap-1316	74	24	.	.	PUNCT
ap-1316	75	1	51	51	NUM
ap-1316	75	2	no	no	NOUN
ap-1316	75	3	.	.	PUNCT
ap-1316	76	1	2/2011	2/2011	NUM
ap-1316	76	2	this	this	DET
ap-1316	76	3	alternative	alternative	ADJ
ap-1316	76	4	approach	approach	NOUN
ap-1316	76	5	does	do	AUX
ap-1316	76	6	not	not	PART
ap-1316	76	7	require	require	VERB
ap-1316	76	8	the	the	DET
ap-1316	76	9	si	si	PROPN
ap-1316	76	10	wafers	wafer	NOUN
ap-1316	76	11	to	to	PART
ap-1316	76	12	have	have	VERB
ap-1316	76	13	a	a	DET
ap-1316	76	14	ribbed	rib	VERB
ap-1316	76	15	surface	surface	NOUN
ap-1316	76	16	,	,	PUNCT
ap-1316	76	17	so	so	SCONJ
ap-1316	76	18	problems	problem	NOUN
ap-1316	76	19	with	with	ADP
ap-1316	76	20	transferring	transfer	VERB
ap-1316	76	21	any	any	DET
ap-1316	76	22	deviation	deviation	NOUN
ap-1316	76	23	,	,	PUNCT
ap-1316	76	24	stress	stress	NOUN
ap-1316	76	25	,	,	PUNCT
ap-1316	76	26	and/or	and/or	CCONJ
ap-1316	76	27	inaccuracy	inaccuracy	VERB
ap-1316	76	28	from	from	ADP
ap-1316	76	29	one	one	NUM
ap-1316	76	30	wafer	wafer	NOUN
ap-1316	76	31	to	to	ADP
ap-1316	76	32	the	the	DET
ap-1316	76	33	neighbouring	neighbouring	ADJ
ap-1316	76	34	plates	plate	NOUN
ap-1316	76	35	or	or	CCONJ
ap-1316	76	36	even	even	ADV
ap-1316	76	37	to	to	ADP
ap-1316	76	38	the	the	DET
ap-1316	76	39	whole	whole	ADJ
ap-1316	76	40	stacked	stack	VERB
ap-1316	76	41	assembly	assembly	NOUN
ap-1316	76	42	will	will	AUX
ap-1316	76	43	be	be	AUX
ap-1316	76	44	avoided	avoid	VERB
ap-1316	76	45	.	.	PUNCT
ap-1316	77	1	however	however	ADV
ap-1316	77	2	,	,	PUNCT
ap-1316	77	3	suitable	suitable	ADJ
ap-1316	77	4	technologies	technology	NOUN
ap-1316	77	5	for	for	ADP
ap-1316	77	6	precise	precise	ADJ
ap-1316	77	7	stacking	stacking	NOUN
ap-1316	77	8	of	of	ADP
ap-1316	77	9	optically	optically	ADV
ap-1316	77	10	formed	form	VERB
ap-1316	77	11	wafers	wafer	NOUN
ap-1316	77	12	to	to	ADP
ap-1316	77	13	a	a	DET
ap-1316	77	14	multiple	multiple	ADJ
ap-1316	77	15	array	array	NOUN
ap-1316	77	16	have	have	VERB
ap-1316	77	17	to	to	PART
ap-1316	77	18	be	be	AUX
ap-1316	77	19	developed	develop	VERB
ap-1316	77	20	.	.	PUNCT
ap-1316	78	1	the	the	DET
ap-1316	78	2	si	si	PROPN
ap-1316	78	3	wafers	wafer	NOUN
ap-1316	78	4	available	available	ADJ
ap-1316	78	5	on	on	ADP
ap-1316	78	6	the	the	DET
ap-1316	78	7	market	market	NOUN
ap-1316	78	8	are	be	AUX
ap-1316	78	9	designed	design	VERB
ap-1316	78	10	for	for	ADP
ap-1316	78	11	use	use	NOUN
ap-1316	78	12	mainly	mainly	ADV
ap-1316	78	13	in	in	ADP
ap-1316	78	14	the	the	DET
ap-1316	78	15	semiconductor	semiconductor	NOUN
ap-1316	78	16	industry	industry	NOUN
ap-1316	78	17	.	.	PUNCT
ap-1316	79	1	it	it	PRON
ap-1316	79	2	is	be	AUX
ap-1316	79	3	obvious	obvious	ADJ
ap-1316	79	4	that	that	SCONJ
ap-1316	79	5	the	the	DET
ap-1316	79	6	requirements	requirement	NOUN
ap-1316	79	7	of	of	ADP
ap-1316	79	8	this	this	DET
ap-1316	79	9	industry	industry	NOUN
ap-1316	79	10	are	be	AUX
ap-1316	79	11	not	not	PART
ap-1316	79	12	the	the	DET
ap-1316	79	13	same	same	ADJ
ap-1316	79	14	as	as	ADP
ap-1316	79	15	the	the	DET
ap-1316	79	16	requirements	requirement	NOUN
ap-1316	79	17	of	of	ADP
ap-1316	79	18	precise	precise	ADJ
ap-1316	79	19	space	space	NOUN
ap-1316	79	20	x	x	NOUN
ap-1316	79	21	-	-	NOUN
ap-1316	79	22	ray	ray	NOUN
ap-1316	79	23	optics	optic	NOUN
ap-1316	79	24	.	.	PUNCT
ap-1316	80	1	si	si	PROPN
ap-1316	80	2	wafers	wafer	NOUN
ap-1316	80	3	are	be	AUX
ap-1316	80	4	a	a	DET
ap-1316	80	5	monocrystal	monocrystal	ADJ
ap-1316	80	6	(	(	PUNCT
ap-1316	80	7	single	single	ADJ
ap-1316	80	8	crystal	crystal	NOUN
ap-1316	80	9	)	)	PUNCT
ap-1316	80	10	with	with	ADP
ap-1316	80	11	some	some	DET
ap-1316	80	12	specifics	specific	NOUN
ap-1316	80	13	,	,	PUNCT
ap-1316	80	14	and	and	CCONJ
ap-1316	80	15	this	this	PRON
ap-1316	80	16	must	must	AUX
ap-1316	80	17	also	also	ADV
ap-1316	80	18	be	be	AUX
ap-1316	80	19	taken	take	VERB
ap-1316	80	20	into	into	ADP
ap-1316	80	21	account	account	NOUN
ap-1316	80	22	.	.	PUNCT
ap-1316	81	1	moreover	moreover	ADV
ap-1316	81	2	,	,	PUNCT
ap-1316	81	3	si	si	PROPN
ap-1316	81	4	wafers	wafer	NOUN
ap-1316	81	5	are	be	AUX
ap-1316	81	6	fragile	fragile	ADJ
ap-1316	81	7	,	,	PUNCT
ap-1316	81	8	and	and	CCONJ
ap-1316	81	9	it	it	PRON
ap-1316	81	10	is	be	AUX
ap-1316	81	11	very	very	ADV
ap-1316	81	12	difficult	difficult	ADJ
ap-1316	81	13	to	to	PART
ap-1316	81	14	bend	bend	VERB
ap-1316	81	15	and/or	and/or	CCONJ
ap-1316	81	16	shape	shape	VERB
ap-1316	81	17	them	they	PRON
ap-1316	81	18	precisely	precisely	ADV
ap-1316	81	19	(	(	PUNCT
ap-1316	81	20	for	for	ADP
ap-1316	81	21	thicknesses	thickness	NOUN
ap-1316	81	22	required	require	VERB
ap-1316	81	23	for	for	ADP
ap-1316	81	24	x	x	NOUN
ap-1316	81	25	-	-	NOUN
ap-1316	81	26	ray	ray	NOUN
ap-1316	81	27	telescopes	telescope	NOUN
ap-1316	81	28	,	,	PUNCT
ap-1316	81	29	i.e.	i.e.	X
ap-1316	81	30	around	around	ADV
ap-1316	81	31	0.3–1.0	0.3–1.0	NOUN
ap-1316	82	1	mm	mm	INTJ
ap-1316	82	2	.	.	PUNCT
ap-1316	83	1	an	an	DET
ap-1316	83	2	exception	exception	NOUN
ap-1316	83	3	is	be	AUX
ap-1316	83	4	thin	thin	ADJ
ap-1316	83	5	si	si	NOUN
ap-1316	83	6	wafers	wafer	NOUN
ap-1316	83	7	below	below	ADP
ap-1316	83	8	0.1	0.1	NUM
ap-1316	83	9	mm	mm	NOUN
ap-1316	83	10	in	in	ADP
ap-1316	83	11	thickness	thickness	NOUN
ap-1316	83	12	.	.	PUNCT
ap-1316	84	1	however	however	ADV
ap-1316	84	2	,	,	PUNCT
ap-1316	84	3	these	these	PRON
ap-1316	84	4	can	can	AUX
ap-1316	84	5	be	be	AUX
ap-1316	84	6	hardly	hardly	ADV
ap-1316	84	7	used	use	VERB
ap-1316	84	8	in	in	ADP
ap-1316	84	9	this	this	DET
ap-1316	84	10	type	type	NOUN
ap-1316	84	11	of	of	ADP
ap-1316	84	12	x	x	NOUN
ap-1316	84	13	-	-	NOUN
ap-1316	84	14	ray	ray	NOUN
ap-1316	84	15	optics	optic	NOUN
ap-1316	84	16	because	because	SCONJ
ap-1316	84	17	of	of	ADP
ap-1316	84	18	diffraction	diffraction	NOUN
ap-1316	84	19	limits	limit	NOUN
ap-1316	84	20	.	.	PUNCT
ap-1316	85	1	also	also	ADV
ap-1316	85	2	,	,	PUNCT
ap-1316	85	3	while	while	SCONJ
ap-1316	85	4	their	their	PRON
ap-1316	85	5	thickness	thickness	NOUN
ap-1316	85	6	homogeneity	homogeneity	NOUN
ap-1316	85	7	is	be	AUX
ap-1316	85	8	mostly	mostly	ADV
ap-1316	85	9	perfect	perfect	ADJ
ap-1316	85	10	,	,	PUNCT
ap-1316	85	11	the	the	DET
ap-1316	85	12	same	same	ADJ
ap-1316	85	13	is	be	AUX
ap-1316	85	14	not	not	PART
ap-1316	85	15	true	true	ADJ
ap-1316	85	16	for	for	ADP
ap-1316	85	17	commercially	commercially	ADV
ap-1316	85	18	available	available	ADJ
ap-1316	85	19	wafers	wafer	NOUN
ap-1316	85	20	for	for	ADP
ap-1316	85	21	their	their	PRON
ap-1316	85	22	flatness	flatness	NOUN
ap-1316	85	23	(	(	PUNCT
ap-1316	85	24	note	note	VERB
ap-1316	85	25	that	that	SCONJ
ap-1316	85	26	we	we	PRON
ap-1316	85	27	refer	refer	VERB
ap-1316	85	28	here	here	ADV
ap-1316	85	29	to	to	ADP
ap-1316	85	30	the	the	DET
ap-1316	85	31	deviation	deviation	NOUN
ap-1316	85	32	of	of	ADP
ap-1316	85	33	the	the	DET
ap-1316	85	34	upper	upper	ADJ
ap-1316	85	35	surface	surface	NOUN
ap-1316	85	36	of	of	ADP
ap-1316	85	37	a	a	DET
ap-1316	85	38	free	free	ADV
ap-1316	85	39	-	-	PUNCT
ap-1316	85	40	standing	stand	VERB
ap-1316	85	41	si	si	NOUN
ap-1316	85	42	wafer	wafer	NOUN
ap-1316	85	43	from	from	ADP
ap-1316	85	44	an	an	DET
ap-1316	85	45	ideal	ideal	ADJ
ap-1316	85	46	plane	plane	NOUN
ap-1316	85	47	,	,	PUNCT
ap-1316	85	48	while	while	SCONJ
ap-1316	85	49	in	in	ADP
ap-1316	85	50	the	the	DET
ap-1316	85	51	semiconductor	semiconductor	NOUN
ap-1316	85	52	community	community	NOUN
ap-1316	85	53	flatness	flatness	NOUN
ap-1316	85	54	is	be	AUX
ap-1316	85	55	usually	usually	ADV
ap-1316	85	56	represented	represent	VERB
ap-1316	85	57	by	by	ADP
ap-1316	85	58	a	a	DET
ap-1316	85	59	set	set	NOUN
ap-1316	85	60	of	of	ADP
ap-1316	85	61	parameters	parameter	NOUN
ap-1316	85	62	)	)	PUNCT
ap-1316	85	63	.	.	PUNCT
ap-1316	86	1	in	in	ADP
ap-1316	86	2	order	order	NOUN
ap-1316	86	3	the	the	PRON
ap-1316	86	4	achieve	achieve	VERB
ap-1316	86	5	the	the	DET
ap-1316	86	6	very	very	ADV
ap-1316	86	7	high	high	ADJ
ap-1316	86	8	accuracy	accuracy	NOUN
ap-1316	86	9	required	require	VERB
ap-1316	86	10	by	by	ADP
ap-1316	86	11	future	future	ADJ
ap-1316	86	12	large	large	ADJ
ap-1316	86	13	space	space	NOUN
ap-1316	86	14	x	x	NOUN
ap-1316	86	15	-	-	NOUN
ap-1316	86	16	ray	ray	NOUN
ap-1316	86	17	telescopes	telescope	NOUN
ap-1316	86	18	like	like	ADP
ap-1316	86	19	esa	esa	PROPN
ap-1316	86	20	/	/	SYM
ap-1316	86	21	nasa	nasa	PROPN
ap-1316	86	22	/	/	SYM
ap-1316	86	23	jaxa	jaxa	PROPN
ap-1316	86	24	ixo	ixo	NOUN
ap-1316	86	25	,	,	PUNCT
ap-1316	86	26	now	now	ADV
ap-1316	86	27	athena	athena	PROPN
ap-1316	86	28	by	by	ADP
ap-1316	86	29	esa	esa	PROPN
ap-1316	86	30	,	,	PUNCT
ap-1316	86	31	the	the	DET
ap-1316	86	32	parameters	parameter	NOUN
ap-1316	86	33	of	of	ADP
ap-1316	86	34	the	the	DET
ap-1316	86	35	si	si	PROPN
ap-1316	86	36	wafers	wafer	NOUN
ap-1316	86	37	need	need	VERB
ap-1316	86	38	to	to	PART
ap-1316	86	39	be	be	AUX
ap-1316	86	40	optimized	optimize	VERB
ap-1316	86	41	(	(	PUNCT
ap-1316	86	42	for	for	ADP
ap-1316	86	43	application	application	NOUN
ap-1316	86	44	in	in	ADP
ap-1316	86	45	x	x	NOUN
ap-1316	86	46	-	-	NOUN
ap-1316	86	47	ray	ray	NOUN
ap-1316	86	48	optics	optic	NOUN
ap-1316	86	49	)	)	PUNCT
ap-1316	86	50	at	at	ADP
ap-1316	86	51	the	the	DET
ap-1316	86	52	production	production	NOUN
ap-1316	86	53	stage	stage	NOUN
ap-1316	86	54	.	.	PUNCT
ap-1316	87	1	for	for	ADP
ap-1316	87	2	this	this	DET
ap-1316	87	3	purpose	purpose	NOUN
ap-1316	87	4	we	we	PRON
ap-1316	87	5	have	have	AUX
ap-1316	87	6	established	establish	VERB
ap-1316	87	7	and	and	CCONJ
ap-1316	87	8	developed	develop	VERB
ap-1316	87	9	a	a	DET
ap-1316	87	10	multidisciplinary	multidisciplinary	ADJ
ap-1316	87	11	working	work	VERB
ap-1316	87	12	group	group	NOUN
ap-1316	87	13	including	include	VERB
ap-1316	87	14	specialists	specialist	NOUN
ap-1316	87	15	from	from	ADP
ap-1316	87	16	the	the	DET
ap-1316	87	17	development	development	NOUN
ap-1316	87	18	department	department	PROPN
ap-1316	87	19	of	of	ADP
ap-1316	87	20	the	the	DET
ap-1316	87	21	si	si	NOUN
ap-1316	87	22	wafer	wafer	NOUN
ap-1316	87	23	industry	industry	NOUN
ap-1316	87	24	with	with	ADP
ap-1316	87	25	the	the	DET
ap-1316	87	26	goal	goal	NOUN
ap-1316	87	27	to	to	PART
ap-1316	87	28	design	design	VERB
ap-1316	87	29	and	and	CCONJ
ap-1316	87	30	manufacture	manufacture	VERB
ap-1316	87	31	si	si	NOUN
ap-1316	87	32	wafers	wafer	NOUN
ap-1316	87	33	with	with	ADP
ap-1316	87	34	improved	improved	ADJ
ap-1316	87	35	parameters	parameter	NOUN
ap-1316	87	36	(	(	PUNCT
ap-1316	87	37	mostly	mostly	ADV
ap-1316	87	38	flatness	flatness	NOUN
ap-1316	87	39	)	)	PUNCT
ap-1316	87	40	optimized	optimize	VERB
ap-1316	87	41	for	for	ADP
ap-1316	87	42	application	application	NOUN
ap-1316	87	43	in	in	ADP
ap-1316	87	44	x	x	NOUN
ap-1316	87	45	-	-	NOUN
ap-1316	87	46	ray	ray	NOUN
ap-1316	87	47	telescopes	telescope	NOUN
ap-1316	87	48	.	.	PUNCT
ap-1316	88	1	it	it	PRON
ap-1316	88	2	should	should	AUX
ap-1316	88	3	be	be	AUX
ap-1316	88	4	noted	note	VERB
ap-1316	88	5	that	that	SCONJ
ap-1316	88	6	the	the	DET
ap-1316	88	7	manufacture	manufacture	NOUN
ap-1316	88	8	of	of	ADP
ap-1316	88	9	silicon	silicon	NOUN
ap-1316	88	10	wafers	wafer	NOUN
ap-1316	88	11	is	be	AUX
ap-1316	88	12	a	a	DET
ap-1316	88	13	complicated	complicated	ADJ
ap-1316	88	14	process	process	NOUN
ap-1316	88	15	with	with	ADP
ap-1316	88	16	numerous	numerous	ADJ
ap-1316	88	17	technological	technological	ADJ
ap-1316	88	18	steps	step	NOUN
ap-1316	88	19	and	and	CCONJ
ap-1316	88	20	with	with	ADP
ap-1316	88	21	many	many	ADJ
ap-1316	88	22	free	free	ADJ
ap-1316	88	23	parameters	parameter	NOUN
ap-1316	88	24	that	that	PRON
ap-1316	88	25	can	can	AUX
ap-1316	88	26	be	be	AUX
ap-1316	88	27	modified	modify	VERB
ap-1316	88	28	and	and	CCONJ
ap-1316	88	29	optimized	optimize	VERB
ap-1316	88	30	to	to	PART
ap-1316	88	31	achieve	achieve	VERB
ap-1316	88	32	optimal	optimal	ADJ
ap-1316	88	33	performance	performance	NOUN
ap-1316	88	34	.	.	PUNCT
ap-1316	89	1	this	this	PRON
ap-1316	89	2	can	can	AUX
ap-1316	89	3	also	also	ADV
ap-1316	89	4	be	be	AUX
ap-1316	89	5	useful	useful	ADJ
ap-1316	89	6	for	for	ADP
ap-1316	89	7	further	far	ADV
ap-1316	89	8	improving	improve	VERB
ap-1316	89	9	the	the	DET
ap-1316	89	10	quality	quality	NOUN
ap-1316	89	11	of	of	ADP
ap-1316	89	12	x	x	PROPN
ap-1316	89	13	-	-	ADJ
ap-1316	89	14	hpo	hpo	NOUN
ap-1316	89	15	optics	optic	NOUN
ap-1316	89	16	.	.	PUNCT
ap-1316	90	1	as	as	SCONJ
ap-1316	90	2	we	we	PRON
ap-1316	90	3	are	be	AUX
ap-1316	90	4	dealing	deal	VERB
ap-1316	90	5	with	with	ADP
ap-1316	90	6	high	high	ADJ
ap-1316	90	7	-	-	PUNCT
ap-1316	90	8	quality	quality	NOUN
ap-1316	90	9	x	x	NOUN
ap-1316	90	10	-	-	NOUN
ap-1316	90	11	ray	ray	NOUN
ap-1316	90	12	imaging	imaging	NOUN
ap-1316	90	13	,	,	PUNCT
ap-1316	90	14	the	the	DET
ap-1316	90	15	smoothness	smoothness	NOUN
ap-1316	90	16	of	of	ADP
ap-1316	90	17	the	the	DET
ap-1316	90	18	reflecting	reflect	VERB
ap-1316	90	19	surface	surface	NOUN
ap-1316	90	20	is	be	AUX
ap-1316	90	21	important	important	ADJ
ap-1316	90	22	.	.	PUNCT
ap-1316	91	1	the	the	DET
ap-1316	91	2	standard	standard	ADJ
ap-1316	91	3	microroughness	microroughness	NOUN
ap-1316	91	4	of	of	ADP
ap-1316	91	5	commercially	commercially	ADV
ap-1316	91	6	available	available	ADJ
ap-1316	91	7	si	si	NOUN
ap-1316	91	8	wafers	wafer	NOUN
ap-1316	91	9	(	(	PUNCT
ap-1316	91	10	we	we	PRON
ap-1316	91	11	have	have	AUX
ap-1316	91	12	used	use	VERB
ap-1316	91	13	the	the	DET
ap-1316	91	14	products	product	NOUN
ap-1316	91	15	of	of	ADP
ap-1316	91	16	on	on	ADP
ap-1316	91	17	semiconductor	semiconductor	NOUN
ap-1316	91	18	,	,	PUNCT
ap-1316	91	19	czech	czech	PROPN
ap-1316	91	20	republic	republic	NOUN
ap-1316	91	21	)	)	PUNCT
ap-1316	91	22	is	be	AUX
ap-1316	91	23	of	of	ADP
ap-1316	91	24	the	the	DET
ap-1316	91	25	order	order	NOUN
ap-1316	91	26	of	of	ADP
ap-1316	91	27	0.1	0.1	NUM
ap-1316	91	28	nm	nm	NOUN
ap-1316	91	29	,	,	PUNCT
ap-1316	91	30	as	as	SCONJ
ap-1316	91	31	confirmed	confirm	VERB
ap-1316	91	32	by	by	ADP
ap-1316	91	33	several	several	ADJ
ap-1316	91	34	independent	independent	ADJ
ap-1316	91	35	measurements	measurement	NOUN
ap-1316	91	36	by	by	ADP
ap-1316	91	37	various	various	ADJ
ap-1316	91	38	techniques	technique	NOUN
ap-1316	91	39	including	include	VERB
ap-1316	91	40	the	the	DET
ap-1316	91	41	atomic	atomic	ADJ
ap-1316	91	42	force	force	NOUN
ap-1316	91	43	microscope	microscope	NOUN
ap-1316	91	44	(	(	PUNCT
ap-1316	91	45	afm	afm	PROPN
ap-1316	91	46	)	)	PUNCT
ap-1316	91	47	.	.	PUNCT
ap-1316	92	1	this	this	PRON
ap-1316	92	2	is	be	AUX
ap-1316	92	3	related	relate	VERB
ap-1316	92	4	to	to	ADP
ap-1316	92	5	the	the	DET
ap-1316	92	6	method	method	NOUN
ap-1316	92	7	of	of	ADP
ap-1316	92	8	chemical	chemical	NOUN
ap-1316	92	9	polishing	polishing	NOUN
ap-1316	92	10	used	use	VERB
ap-1316	92	11	in	in	ADP
ap-1316	92	12	the	the	DET
ap-1316	92	13	manufacture	manufacture	NOUN
ap-1316	92	14	of	of	ADP
ap-1316	92	15	si	si	NOUN
ap-1316	92	16	wafers	wafer	NOUN
ap-1316	92	17	.	.	PUNCT
ap-1316	93	1	the	the	DET
ap-1316	93	2	microroughness	microroughness	PROPN
ap-1316	93	3	of	of	ADP
ap-1316	93	4	si	si	NOUN
ap-1316	93	5	wafers	wafer	NOUN
ap-1316	93	6	exceeds	exceed	VERB
ap-1316	93	7	the	the	DET
ap-1316	93	8	microroughness	microroughness	NOUN
ap-1316	93	9	of	of	ADP
ap-1316	93	10	glass	glass	NOUN
ap-1316	93	11	foils	foil	NOUN
ap-1316	93	12	and	and	CCONJ
ap-1316	93	13	most	most	ADJ
ap-1316	93	14	other	other	ADJ
ap-1316	93	15	alternative	alternative	ADJ
ap-1316	93	16	mirror	mirror	NOUN
ap-1316	93	17	materials	material	NOUN
ap-1316	93	18	and	and	CCONJ
ap-1316	93	19	substrates	substrate	NOUN
ap-1316	93	20	.	.	PUNCT
ap-1316	94	1	the	the	DET
ap-1316	94	2	flatness	flatness	NOUN
ap-1316	94	3	(	(	PUNCT
ap-1316	94	4	in	in	ADP
ap-1316	94	5	the	the	DET
ap-1316	94	6	sense	sense	NOUN
ap-1316	94	7	of	of	ADP
ap-1316	94	8	the	the	DET
ap-1316	94	9	deviation	deviation	NOUN
ap-1316	94	10	of	of	ADP
ap-1316	94	11	the	the	DET
ap-1316	94	12	upper	upper	ADJ
ap-1316	94	13	surface	surface	NOUN
ap-1316	94	14	of	of	ADP
ap-1316	94	15	a	a	DET
ap-1316	94	16	freestanding	freestande	VERB
ap-1316	94	17	si	si	NOUN
ap-1316	94	18	wafer	wafer	NOUN
ap-1316	94	19	from	from	ADP
ap-1316	94	20	a	a	DET
ap-1316	94	21	plane	plane	NOUN
ap-1316	94	22	)	)	PUNCT
ap-1316	94	23	of	of	ADP
ap-1316	94	24	commercially	commercially	ADV
ap-1316	94	25	available	available	ADJ
ap-1316	94	26	si	si	PROPN
ap-1316	94	27	wafers	wafer	NOUN
ap-1316	94	28	was	be	AUX
ap-1316	94	29	however	however	ADV
ap-1316	94	30	found	find	VERB
ap-1316	94	31	not	not	PART
ap-1316	94	32	to	to	PART
ap-1316	94	33	be	be	AUX
ap-1316	94	34	optimal	optimal	ADJ
ap-1316	94	35	for	for	ADP
ap-1316	94	36	use	use	NOUN
ap-1316	94	37	in	in	ADP
ap-1316	94	38	high	high	ADJ
ap-1316	94	39	-	-	PUNCT
ap-1316	94	40	quality	quality	NOUN
ap-1316	94	41	(	(	PUNCT
ap-1316	94	42	order	order	NOUN
ap-1316	94	43	of	of	ADP
ap-1316	94	44	arcsec	arcsec	PROPN
ap-1316	94	45	angular	angular	ADJ
ap-1316	94	46	resolutions	resolution	NOUN
ap-1316	94	47	)	)	PUNCT
ap-1316	95	1	x	x	X
ap-1316	95	2	-	-	NOUN
ap-1316	95	3	ray	ray	NOUN
ap-1316	95	4	optics	optic	NOUN
ap-1316	95	5	.	.	PUNCT
ap-1316	96	1	most	most	ADJ
ap-1316	96	2	si	si	NOUN
ap-1316	96	3	wafers	wafer	NOUN
ap-1316	96	4	show	show	VERB
ap-1316	96	5	deviations	deviation	NOUN
ap-1316	96	6	from	from	ADP
ap-1316	96	7	the	the	DET
ap-1316	96	8	plane	plane	NOUN
ap-1316	96	9	of	of	ADP
ap-1316	96	10	the	the	DET
ap-1316	96	11	order	order	NOUN
ap-1316	96	12	of	of	ADP
ap-1316	96	13	a	a	DET
ap-1316	96	14	few	few	ADJ
ap-1316	96	15	tens	ten	NOUN
ap-1316	96	16	of	of	ADP
ap-1316	96	17	microns	micron	NOUN
ap-1316	96	18	.	.	PUNCT
ap-1316	97	1	after	after	ADP
ap-1316	97	2	modifying	modify	VERB
ap-1316	97	3	the	the	DET
ap-1316	97	4	technological	technological	ADJ
ap-1316	97	5	process	process	NOUN
ap-1316	97	6	during	during	ADP
ap-1316	97	7	si	si	PROPN
ap-1316	97	8	wafer	wafer	NOUN
ap-1316	97	9	manufacture	manufacture	NOUN
ap-1316	97	10	,	,	PUNCT
ap-1316	97	11	we	we	PRON
ap-1316	97	12	were	be	AUX
ap-1316	97	13	able	able	ADJ
ap-1316	97	14	to	to	PART
ap-1316	97	15	reduce	reduce	VERB
ap-1316	97	16	this	this	DET
ap-1316	97	17	value	value	NOUN
ap-1316	97	18	to	to	ADP
ap-1316	97	19	just	just	ADV
ap-1316	97	20	a	a	DET
ap-1316	97	21	few	few	ADJ
ap-1316	97	22	microns	micron	NOUN
ap-1316	97	23	.	.	PUNCT
ap-1316	98	1	also	also	ADV
ap-1316	98	2	,	,	PUNCT
ap-1316	98	3	the	the	DET
ap-1316	98	4	thickness	thickness	NOUN
ap-1316	98	5	homogeneity	homogeneity	NOUN
ap-1316	98	6	was	be	AUX
ap-1316	98	7	improved	improve	VERB
ap-1316	98	8	.	.	PUNCT
ap-1316	99	1	in	in	ADP
ap-1316	99	2	collaboration	collaboration	NOUN
ap-1316	99	3	with	with	ADP
ap-1316	99	4	the	the	DET
ap-1316	99	5	manufacturer	manufacturer	NOUN
ap-1316	99	6	,	,	PUNCT
ap-1316	99	7	further	further	ADJ
ap-1316	99	8	steps	step	NOUN
ap-1316	99	9	are	be	AUX
ap-1316	99	10	planned	plan	VERB
ap-1316	99	11	to	to	PART
ap-1316	99	12	improve	improve	VERB
ap-1316	99	13	the	the	DET
ap-1316	99	14	flatness	flatness	NOUN
ap-1316	99	15	(	(	PUNCT
ap-1316	99	16	deviation	deviation	NOUN
ap-1316	99	17	from	from	ADP
ap-1316	99	18	an	an	DET
ap-1316	99	19	ideal	ideal	ADJ
ap-1316	99	20	plane	plane	NOUN
ap-1316	99	21	)	)	PUNCT
ap-1316	99	22	and	and	CCONJ
ap-1316	99	23	the	the	DET
ap-1316	99	24	thickness	thickness	NOUN
ap-1316	99	25	homogeneity	homogeneity	NOUN
ap-1316	99	26	of	of	ADP
ap-1316	99	27	si	si	NOUN
ap-1316	99	28	wafers	wafer	NOUN
ap-1316	99	29	.	.	PUNCT
ap-1316	100	1	these	these	PRON
ap-1316	100	2	and	and	CCONJ
ap-1316	100	3	planned	planned	ADJ
ap-1316	100	4	improvements	improvement	NOUN
ap-1316	100	5	introduced	introduce	VERB
ap-1316	100	6	at	at	ADP
ap-1316	100	7	the	the	DET
ap-1316	100	8	si	si	NOUN
ap-1316	100	9	wafer	wafer	NOUN
ap-1316	100	10	manufacture	manufacture	NOUN
ap-1316	100	11	stage	stage	NOUN
ap-1316	100	12	can	can	AUX
ap-1316	100	13	also	also	ADV
ap-1316	100	14	be	be	AUX
ap-1316	100	15	applied	apply	VERB
ap-1316	100	16	for	for	ADP
ap-1316	100	17	other	other	ADJ
ap-1316	100	18	designs	design	NOUN
ap-1316	100	19	of	of	ADP
ap-1316	100	20	si	si	NOUN
ap-1316	100	21	wafer	wafer	NOUN
ap-1316	100	22	optics	optic	NOUN
ap-1316	100	23	including	include	VERB
ap-1316	100	24	x	x	NOUN
ap-1316	100	25	-	-	NOUN
ap-1316	100	26	hpo	hpo	NOUN
ap-1316	100	27	,	,	PUNCT
ap-1316	100	28	and	and	CCONJ
ap-1316	100	29	can	can	AUX
ap-1316	100	30	play	play	VERB
ap-1316	100	31	a	a	DET
ap-1316	100	32	crucial	crucial	ADJ
ap-1316	100	33	role	role	NOUN
ap-1316	100	34	in	in	ADP
ap-1316	100	35	the	the	DET
ap-1316	100	36	ixo	ixo	NOUN
ap-1316	100	37	project	project	NOUN
ap-1316	100	38	.	.	PUNCT
ap-1316	101	1	the	the	DET
ap-1316	101	2	x	x	NOUN
ap-1316	101	3	-	-	NOUN
ap-1316	101	4	ray	ray	NOUN
ap-1316	101	5	optics	optic	NOUN
ap-1316	101	6	design	design	NOUN
ap-1316	101	7	for	for	ADP
ap-1316	101	8	ixo	ixo	NOUN
ap-1316	101	9	(	(	PUNCT
ap-1316	101	10	now	now	ADV
ap-1316	101	11	athena	athena	NOUN
ap-1316	101	12	)	)	PUNCT
ap-1316	101	13	is	be	AUX
ap-1316	101	14	based	base	VERB
ap-1316	101	15	on	on	ADP
ap-1316	101	16	the	the	DET
ap-1316	101	17	wolter	wolter	NOUN
ap-1316	101	18	1	1	NUM
ap-1316	101	19	arrangement	arrangement	NOUN
ap-1316	101	20	,	,	PUNCT
ap-1316	101	21	and	and	CCONJ
ap-1316	101	22	hence	hence	ADV
ap-1316	101	23	requires	require	VERB
ap-1316	101	24	curved	curved	ADJ
ap-1316	101	25	surfaces	surface	NOUN
ap-1316	101	26	.	.	PUNCT
ap-1316	102	1	however	however	ADV
ap-1316	102	2	,	,	PUNCT
ap-1316	102	3	due	due	ADP
ap-1316	102	4	to	to	ADP
ap-1316	102	5	the	the	DET
ap-1316	102	6	material	material	NOUN
ap-1316	102	7	properties	property	NOUN
ap-1316	102	8	of	of	ADP
ap-1316	102	9	monocrystalline	monocrystalline	ADJ
ap-1316	102	10	si	si	X
ap-1316	102	11	,	,	PUNCT
ap-1316	102	12	si	si	NOUN
ap-1316	102	13	wafers	wafer	NOUN
ap-1316	102	14	(	(	PUNCT
ap-1316	102	15	except	except	SCONJ
ap-1316	102	16	very	very	ADV
ap-1316	102	17	thin	thin	ADJ
ap-1316	102	18	ones	one	NOUN
ap-1316	102	19	)	)	PUNCT
ap-1316	102	20	are	be	AUX
ap-1316	102	21	extremely	extremely	ADV
ap-1316	102	22	difficult	difficult	ADJ
ap-1316	102	23	to	to	PART
ap-1316	102	24	shape	shape	VERB
ap-1316	102	25	.	.	PUNCT
ap-1316	103	1	it	it	PRON
ap-1316	103	2	is	be	AUX
ap-1316	103	3	obvious	obvious	ADJ
ap-1316	103	4	that	that	SCONJ
ap-1316	103	5	we	we	PRON
ap-1316	103	6	have	have	VERB
ap-1316	103	7	to	to	PART
ap-1316	103	8	overcome	overcome	VERB
ap-1316	103	9	this	this	DET
ap-1316	103	10	problem	problem	NOUN
ap-1316	103	11	in	in	ADP
ap-1316	103	12	order	order	NOUN
ap-1316	103	13	to	to	PART
ap-1316	103	14	achieve	achieve	VERB
ap-1316	103	15	the	the	DET
ap-1316	103	16	fine	fine	ADJ
ap-1316	103	17	accuracy	accuracy	NOUN
ap-1316	103	18	and	and	CCONJ
ap-1316	103	19	stability	stability	NOUN
ap-1316	103	20	required	require	VERB
ap-1316	103	21	for	for	ADP
ap-1316	103	22	future	future	ADJ
ap-1316	103	23	large	large	ADJ
ap-1316	103	24	x	x	ADJ
ap-1316	103	25	-	-	NOUN
ap-1316	103	26	ray	ray	NOUN
ap-1316	103	27	telescopes	telescope	NOUN
ap-1316	103	28	.	.	PUNCT
ap-1316	104	1	the	the	DET
ap-1316	104	2	final	final	ADJ
ap-1316	104	3	goal	goal	NOUN
ap-1316	104	4	is	be	AUX
ap-1316	104	5	to	to	PART
ap-1316	104	6	provide	provide	VERB
ap-1316	104	7	optically	optically	ADV
ap-1316	104	8	shaped	shape	VERB
ap-1316	104	9	si	si	NOUN
ap-1316	104	10	wafers	wafer	NOUN
ap-1316	104	11	with	with	ADP
ap-1316	104	12	no	no	PRON
ap-1316	104	13	or	or	CCONJ
ap-1316	104	14	little	little	ADJ
ap-1316	104	15	internal	internal	ADJ
ap-1316	104	16	stress	stress	NOUN
ap-1316	104	17	.	.	PUNCT
ap-1316	105	1	three	three	NUM
ap-1316	105	2	different	different	ADJ
ap-1316	105	3	alternative	alternative	ADJ
ap-1316	105	4	technologies	technology	NOUN
ap-1316	105	5	for	for	ADP
ap-1316	105	6	shaping	shape	VERB
ap-1316	105	7	si	si	NOUN
ap-1316	105	8	wafers	wafer	NOUN
ap-1316	105	9	have	have	AUX
ap-1316	105	10	been	be	AUX
ap-1316	105	11	designed	design	VERB
ap-1316	105	12	and	and	CCONJ
ap-1316	105	13	tested	test	VERB
ap-1316	105	14	to	to	PART
ap-1316	105	15	achieve	achieve	VERB
ap-1316	105	16	precise	precise	ADJ
ap-1316	105	17	optical	optical	ADJ
ap-1316	105	18	surfaces	surface	NOUN
ap-1316	105	19	.	.	PUNCT
ap-1316	106	1	the	the	DET
ap-1316	106	2	samples	sample	NOUN
ap-1316	106	3	shaped	shape	VERB
ap-1316	106	4	and	and	CCONJ
ap-1316	106	5	tested	test	VERB
ap-1316	106	6	were	be	AUX
ap-1316	106	7	typically	typically	ADV
ap-1316	106	8	100	100	NUM
ap-1316	106	9	to	to	PART
ap-1316	106	10	150	150	NUM
ap-1316	106	11	mm	mm	NOUN
ap-1316	106	12	large	large	ADJ
ap-1316	106	13	,	,	PUNCT
ap-1316	106	14	typically	typically	ADV
ap-1316	106	15	0.6	0.6	NUM
ap-1316	106	16	to	to	PART
ap-1316	106	17	1.3	1.3	NUM
ap-1316	106	18	mm	mm	NOUN
ap-1316	106	19	thick	thick	ADJ
ap-1316	106	20	,	,	PUNCT
ap-1316	106	21	and	and	CCONJ
ap-1316	106	22	were	be	AUX
ap-1316	106	23	bent	bent	ADJ
ap-1316	106	24	to	to	ADP
ap-1316	106	25	either	either	CCONJ
ap-1316	106	26	cylindrical	cylindrical	ADJ
ap-1316	106	27	or	or	CCONJ
ap-1316	106	28	parabolic	parabolic	ADJ
ap-1316	106	29	test	test	NOUN
ap-1316	106	30	surfaces	surface	NOUN
ap-1316	106	31	.	.	PUNCT
ap-1316	107	1	the	the	DET
ap-1316	107	2	development	development	NOUN
ap-1316	107	3	described	describe	VERB
ap-1316	107	4	here	here	ADV
ap-1316	107	5	is	be	AUX
ap-1316	107	6	based	base	VERB
ap-1316	107	7	on	on	ADP
ap-1316	107	8	a	a	DET
ap-1316	107	9	scientific	scientific	ADJ
ap-1316	107	10	approach	approach	NOUN
ap-1316	107	11	,	,	PUNCT
ap-1316	107	12	and	and	CCONJ
ap-1316	107	13	hence	hence	ADV
ap-1316	107	14	the	the	DET
ap-1316	107	15	large	large	ADJ
ap-1316	107	16	number	number	NOUN
ap-1316	107	17	of	of	ADP
ap-1316	107	18	samples	sample	NOUN
ap-1316	107	19	formed	form	VERB
ap-1316	107	20	with	with	ADP
ap-1316	107	21	different	different	ADJ
ap-1316	107	22	parameters	parameter	NOUN
ap-1316	107	23	must	must	AUX
ap-1316	107	24	be	be	AUX
ap-1316	107	25	precisely	precisely	ADV
ap-1316	107	26	measured	measure	VERB
ap-1316	107	27	and	and	CCONJ
ap-1316	107	28	investigated	investigate	VERB
ap-1316	107	29	in	in	ADP
ap-1316	107	30	detail	detail	NOUN
ap-1316	107	31	.	.	PUNCT
ap-1316	108	1	especially	especially	ADV
ap-1316	108	2	precise	precise	ADJ
ap-1316	108	3	metrology	metrology	NOUN
ap-1316	108	4	and	and	CCONJ
ap-1316	108	5	measurements	measurement	NOUN
ap-1316	108	6	play	play	VERB
ap-1316	108	7	a	a	DET
ap-1316	108	8	crucial	crucial	ADJ
ap-1316	108	9	role	role	NOUN
ap-1316	108	10	in	in	ADP
ap-1316	108	11	this	this	DET
ap-1316	108	12	type	type	NOUN
ap-1316	108	13	of	of	ADP
ap-1316	108	14	experiment	experiment	NOUN
ap-1316	108	15	.	.	PUNCT
ap-1316	109	1	the	the	DET
ap-1316	109	2	samples	sample	NOUN
ap-1316	109	3	of	of	ADP
ap-1316	109	4	bent	bent	ADJ
ap-1316	109	5	wafers	wafer	NOUN
ap-1316	109	6	with	with	ADP
ap-1316	109	7	the	the	DET
ap-1316	109	8	investigated	investigate	VERB
ap-1316	109	9	technologies	technology	NOUN
ap-1316	109	10	have	have	AUX
ap-1316	109	11	been	be	AUX
ap-1316	109	12	measured	measure	VERB
ap-1316	109	13	,	,	PUNCT
ap-1316	109	14	including	include	VERB
ap-1316	109	15	taylor	taylor	PROPN
ap-1316	109	16	-	-	PUNCT
ap-1316	109	17	hobson	hobson	PROPN
ap-1316	109	18	mechanical	mechanical	ADJ
ap-1316	109	19	and	and	CCONJ
ap-1316	109	20	still	still	ADV
ap-1316	109	21	optical	optical	ADJ
ap-1316	109	22	profilometry	profilometry	NOUN
ap-1316	109	23	,	,	PUNCT
ap-1316	109	24	as	as	ADV
ap-1316	109	25	well	well	ADV
ap-1316	109	26	as	as	ADP
ap-1316	109	27	optical	optical	ADJ
ap-1316	109	28	interferometry	interferometry	NOUN
ap-1316	109	29	(	(	PUNCT
ap-1316	109	30	zygo	zygo	NOUN
ap-1316	109	31	)	)	PUNCT
ap-1316	109	32	and	and	CCONJ
ap-1316	109	33	afm	afm	PROPN
ap-1316	109	34	(	(	PUNCT
ap-1316	109	35	atomic	atomic	ADJ
ap-1316	109	36	force	force	NOUN
ap-1316	109	37	miscroscope	miscroscope	NOUN
ap-1316	109	38	)	)	PUNCT
ap-1316	109	39	analyses	analysis	NOUN
ap-1316	109	40	(	(	PUNCT
ap-1316	109	41	figure	figure	NOUN
ap-1316	109	42	3	3	NUM
ap-1316	109	43	)	)	PUNCT
ap-1316	109	44	.	.	PUNCT
ap-1316	110	1	it	it	PRON
ap-1316	110	2	has	have	AUX
ap-1316	110	3	been	be	AUX
ap-1316	110	4	confirmed	confirm	VERB
ap-1316	110	5	that	that	SCONJ
ap-1316	110	6	all	all	DET
ap-1316	110	7	these	these	DET
ap-1316	110	8	three	three	NUM
ap-1316	110	9	technologies	technology	NOUN
ap-1316	110	10	do	do	AUX
ap-1316	110	11	not	not	PART
ap-1316	110	12	degrade	degrade	VERB
ap-1316	110	13	the	the	DET
ap-1316	110	14	intrinsic	intrinsic	ADJ
ap-1316	110	15	fine	fine	ADJ
ap-1316	110	16	microroughness	microroughness	NOUN
ap-1316	110	17	of	of	ADP
ap-1316	110	18	the	the	DET
ap-1316	110	19	wafer	wafer	NOUN
ap-1316	110	20	.	.	PUNCT
ap-1316	111	1	while	while	SCONJ
ap-1316	111	2	the	the	DET
ap-1316	111	3	two	two	NUM
ap-1316	111	4	physical	physical	ADJ
ap-1316	111	5	/	/	SYM
ap-1316	111	6	chemical	chemical	NOUN
ap-1316	111	7	technologies	technology	NOUN
ap-1316	111	8	exploited	exploit	VERB
ap-1316	111	9	give	give	VERB
ap-1316	111	10	peak	peak	NOUN
ap-1316	111	11	-	-	PUNCT
ap-1316	111	12	to	to	ADP
ap-1316	111	13	-	-	PUNCT
ap-1316	111	14	valley	valley	NOUN
ap-1316	111	15	(	(	PUNCT
ap-1316	111	16	pv	pv	NOUN
ap-1316	111	17	)	)	PUNCT
ap-1316	111	18	deviations	deviation	NOUN
ap-1316	111	19	(	(	PUNCT
ap-1316	111	20	of	of	ADP
ap-1316	111	21	the	the	DET
ap-1316	111	22	real	real	ADJ
ap-1316	111	23	surface	surface	NOUN
ap-1316	111	24	of	of	ADP
ap-1316	111	25	the	the	DET
ap-1316	111	26	sample	sample	NOUN
ap-1316	111	27	compared	compare	VERB
ap-1316	111	28	with	with	ADP
ap-1316	111	29	the	the	DET
ap-1316	111	30	ideal	ideal	ADJ
ap-1316	111	31	optical	optical	ADJ
ap-1316	111	32	surface	surface	NOUN
ap-1316	111	33	)	)	PUNCT
ap-1316	111	34	of	of	ADP
ap-1316	111	35	less	less	ADJ
ap-1316	111	36	than	than	ADP
ap-1316	111	37	1	1	NUM
ap-1316	111	38	to	to	PART
ap-1316	111	39	2	2	NUM
ap-1316	111	40	μm	μm	NOUN
ap-1316	111	41	over	over	ADP
ap-1316	111	42	the	the	DET
ap-1316	111	43	150	150	NUM
ap-1316	111	44	mm	mm	NOUN
ap-1316	111	45	sample	sample	NOUN
ap-1316	111	46	length	length	NOUN
ap-1316	111	47	,	,	PUNCT
ap-1316	111	48	as	as	ADP
ap-1316	111	49	preliminary	preliminary	ADJ
ap-1316	111	50	values	value	NOUN
ap-1316	111	51	,	,	PUNCT
ap-1316	111	52	the	the	DET
ap-1316	111	53	deviations	deviation	NOUN
ap-1316	111	54	of	of	ADP
ap-1316	111	55	the	the	DET
ap-1316	111	56	first	first	ADJ
ap-1316	111	57	thermally	thermally	ADV
ap-1316	111	58	bent	bent	ADJ
ap-1316	111	59	sample	sample	NOUN
ap-1316	111	60	are	be	AUX
ap-1316	111	61	larger	large	ADJ
ap-1316	111	62	,	,	PUNCT
ap-1316	111	63	of	of	ADP
ap-1316	111	64	the	the	DET
ap-1316	111	65	order	order	NOUN
ap-1316	111	66	of	of	ADP
ap-1316	111	67	10	10	NUM
ap-1316	111	68	μm	μm	NOUN
ap-1316	111	69	.	.	PUNCT
ap-1316	112	1	taking	take	VERB
ap-1316	112	2	into	into	ADP
ap-1316	112	3	account	account	NOUN
ap-1316	112	4	that	that	SCONJ
ap-1316	112	5	the	the	DET
ap-1316	112	6	applied	apply	VERB
ap-1316	112	7	temperatures	temperature	NOUN
ap-1316	112	8	,	,	PUNCT
ap-1316	112	9	as	as	ADV
ap-1316	112	10	well	well	ADV
ap-1316	112	11	as	as	ADP
ap-1316	112	12	other	other	ADJ
ap-1316	112	13	parameters	parameter	NOUN
ap-1316	112	14	,	,	PUNCT
ap-1316	112	15	were	be	AUX
ap-1316	112	16	not	not	PART
ap-1316	112	17	optimized	optimize	VERB
ap-1316	112	18	for	for	ADP
ap-1316	112	19	this	this	DET
ap-1316	112	20	first	first	ADJ
ap-1316	112	21	sample	sample	NOUN
ap-1316	112	22	,	,	PUNCT
ap-1316	112	23	we	we	PRON
ap-1316	112	24	anticipate	anticipate	VERB
ap-1316	112	25	that	that	SCONJ
ap-1316	112	26	the	the	DET
ap-1316	112	27	pv	pv	NOUN
ap-1316	112	28	(	(	PUNCT
ap-1316	112	29	peak	peak	NOUN
ap-1316	112	30	to	to	ADP
ap-1316	112	31	valley	valley	NOUN
ap-1316	112	32	)	)	PUNCT
ap-1316	112	33	value	value	NOUN
ap-1316	112	34	can	can	AUX
ap-1316	112	35	be	be	AUX
ap-1316	112	36	further	far	ADV
ap-1316	112	37	reduced	reduce	VERB
ap-1316	112	38	down	down	ADP
ap-1316	112	39	to	to	ADP
ap-1316	112	40	the	the	DET
ap-1316	112	41	order	order	NOUN
ap-1316	112	42	of	of	ADP
ap-1316	112	43	1	1	NUM
ap-1316	112	44	μm	μm	NOUN
ap-1316	112	45	and	and	CCONJ
ap-1316	112	46	perhaps	perhaps	ADV
ap-1316	112	47	even	even	ADV
ap-1316	112	48	below	below	ADV
ap-1316	112	49	.	.	PUNCT
ap-1316	113	1	fine	fine	ADJ
ap-1316	113	2	adjustments	adjustment	NOUN
ap-1316	113	3	of	of	ADP
ap-1316	113	4	the	the	DET
ap-1316	113	5	parameters	parameter	NOUN
ap-1316	113	6	can	can	AUX
ap-1316	113	7	also	also	ADV
ap-1316	113	8	further	far	ADV
ap-1316	113	9	improve	improve	VERB
ap-1316	113	10	the	the	DET
ap-1316	113	11	accuracy	accuracy	NOUN
ap-1316	113	12	of	of	ADP
ap-1316	113	13	the	the	DET
ap-1316	113	14	results	result	NOUN
ap-1316	113	15	for	for	ADP
ap-1316	113	16	the	the	DET
ap-1316	113	17	other	other	ADJ
ap-1316	113	18	two	two	NUM
ap-1316	113	19	techniques	technique	NOUN
ap-1316	113	20	.	.	PUNCT
ap-1316	114	1	49	49	NUM
ap-1316	114	2	acta	acta	PROPN
ap-1316	114	3	polytechnica	polytechnica	PROPN
ap-1316	114	4	vol	vol	NOUN
ap-1316	114	5	.	.	PUNCT
ap-1316	115	1	51	51	NUM
ap-1316	115	2	no	no	NOUN
ap-1316	115	3	.	.	PUNCT
ap-1316	116	1	2/2011	2/2011	NUM
ap-1316	116	2	5	5	NUM
ap-1316	116	3	k	k	NOUN
ap-1316	116	4	-	-	PUNCT
ap-1316	116	5	b	b	NOUN
ap-1316	116	6	alternative	alternative	NOUN
ap-1316	116	7	for	for	ADP
ap-1316	116	8	ixo	ixo	NOUN
ap-1316	116	9	although	although	SCONJ
ap-1316	116	10	the	the	DET
ap-1316	116	11	wolter	wolter	NOUN
ap-1316	116	12	systems	system	NOUN
ap-1316	116	13	are	be	AUX
ap-1316	116	14	generally	generally	ADV
ap-1316	116	15	well	well	ADV
ap-1316	116	16	known	know	VERB
ap-1316	117	1	,	,	PUNCT
ap-1316	117	2	hans	hans	PROPN
ap-1316	117	3	wolter	wolter	PROPN
ap-1316	117	4	was	be	AUX
ap-1316	117	5	not	not	PART
ap-1316	117	6	the	the	DET
ap-1316	117	7	first	first	ADJ
ap-1316	117	8	to	to	PART
ap-1316	117	9	propose	propose	VERB
ap-1316	117	10	xray	xray	ADJ
ap-1316	117	11	imaging	imaging	NOUN
ap-1316	117	12	systems	system	NOUN
ap-1316	117	13	based	base	VERB
ap-1316	117	14	on	on	ADP
ap-1316	117	15	reflection	reflection	NOUN
ap-1316	117	16	of	of	ADP
ap-1316	117	17	x	x	NOUN
ap-1316	117	18	-	-	NOUN
ap-1316	117	19	rays	ray	NOUN
ap-1316	117	20	.	.	PUNCT
ap-1316	118	1	in	in	ADP
ap-1316	118	2	fact	fact	NOUN
ap-1316	118	3	,	,	PUNCT
ap-1316	118	4	the	the	DET
ap-1316	118	5	first	first	ADJ
ap-1316	118	6	grazing	grazing	NOUN
ap-1316	118	7	incidence	incidence	NOUN
ap-1316	118	8	system	system	NOUN
ap-1316	118	9	to	to	PART
ap-1316	118	10	form	form	VERB
ap-1316	118	11	a	a	DET
ap-1316	118	12	real	real	ADJ
ap-1316	118	13	image	image	NOUN
ap-1316	118	14	was	be	AUX
ap-1316	118	15	proposed	propose	VERB
ap-1316	118	16	by	by	ADP
ap-1316	118	17	kirkpatrick	kirkpatrick	PROPN
ap-1316	118	18	and	and	CCONJ
ap-1316	118	19	baez	baez	PROPN
ap-1316	118	20	in	in	ADP
ap-1316	118	21	1948	1948	NUM
ap-1316	118	22	.	.	PUNCT
ap-1316	119	1	this	this	DET
ap-1316	119	2	system	system	NOUN
ap-1316	119	3	consists	consist	VERB
ap-1316	119	4	of	of	ADP
ap-1316	119	5	a	a	DET
ap-1316	119	6	set	set	NOUN
ap-1316	119	7	of	of	ADP
ap-1316	119	8	two	two	NUM
ap-1316	119	9	orthogonal	orthogonal	ADJ
ap-1316	119	10	parabolas	parabola	NOUN
ap-1316	119	11	of	of	ADP
ap-1316	119	12	translation	translation	NOUN
ap-1316	119	13	.	.	PUNCT
ap-1316	120	1	the	the	DET
ap-1316	120	2	first	first	ADJ
ap-1316	120	3	reflection	reflection	NOUN
ap-1316	120	4	focuses	focus	VERB
ap-1316	120	5	to	to	ADP
ap-1316	120	6	a	a	DET
ap-1316	120	7	line	line	NOUN
ap-1316	120	8	,	,	PUNCT
ap-1316	120	9	which	which	PRON
ap-1316	120	10	is	be	AUX
ap-1316	120	11	focused	focus	VERB
ap-1316	120	12	by	by	ADP
ap-1316	120	13	the	the	DET
ap-1316	120	14	second	second	ADJ
ap-1316	120	15	surface	surface	NOUN
ap-1316	120	16	to	to	ADP
ap-1316	120	17	a	a	DET
ap-1316	120	18	point	point	NOUN
ap-1316	120	19	.	.	PUNCT
ap-1316	121	1	this	this	PRON
ap-1316	121	2	was	be	AUX
ap-1316	121	3	necessary	necessary	ADJ
ap-1316	121	4	to	to	PART
ap-1316	121	5	avoid	avoid	VERB
ap-1316	121	6	the	the	DET
ap-1316	121	7	extreme	extreme	ADJ
ap-1316	121	8	astigmatism	astigmatism	NOUN
ap-1316	121	9	suffered	suffer	VERB
ap-1316	121	10	from	from	ADP
ap-1316	121	11	a	a	DET
ap-1316	121	12	single	single	ADJ
ap-1316	121	13	mirror	mirror	NOUN
ap-1316	121	14	,	,	PUNCT
ap-1316	121	15	but	but	CCONJ
ap-1316	121	16	it	it	PRON
ap-1316	121	17	still	still	ADV
ap-1316	121	18	was	be	AUX
ap-1316	121	19	not	not	PART
ap-1316	121	20	free	free	ADJ
ap-1316	121	21	of	of	ADP
ap-1316	121	22	geometric	geometric	ADJ
ap-1316	121	23	aberrations	aberration	NOUN
ap-1316	121	24	.	.	PUNCT
ap-1316	122	1	nevertheless	nevertheless	ADV
ap-1316	122	2	,	,	PUNCT
ap-1316	122	3	the	the	DET
ap-1316	122	4	system	system	NOUN
ap-1316	122	5	is	be	AUX
ap-1316	122	6	attractive	attractive	ADJ
ap-1316	122	7	because	because	SCONJ
ap-1316	122	8	it	it	PRON
ap-1316	122	9	is	be	AUX
ap-1316	122	10	easy	easy	ADJ
ap-1316	122	11	to	to	PART
ap-1316	122	12	construct	construct	VERB
ap-1316	122	13	the	the	DET
ap-1316	122	14	reflecting	reflect	VERB
ap-1316	122	15	surfaces	surface	NOUN
ap-1316	122	16	.	.	PUNCT
ap-1316	123	1	these	these	DET
ap-1316	123	2	surfaces	surface	NOUN
ap-1316	123	3	can	can	AUX
ap-1316	123	4	be	be	AUX
ap-1316	123	5	produced	produce	VERB
ap-1316	123	6	as	as	ADP
ap-1316	123	7	flat	flat	ADJ
ap-1316	123	8	plates	plate	NOUN
ap-1316	123	9	and	and	CCONJ
ap-1316	123	10	then	then	ADV
ap-1316	123	11	mechanically	mechanically	ADV
ap-1316	123	12	bent	bent	ADJ
ap-1316	123	13	to	to	ADP
ap-1316	123	14	the	the	DET
ap-1316	123	15	required	require	VERB
ap-1316	123	16	curvature	curvature	NOUN
ap-1316	123	17	.	.	PUNCT
ap-1316	124	1	in	in	ADP
ap-1316	124	2	order	order	NOUN
ap-1316	124	3	to	to	PART
ap-1316	124	4	increase	increase	VERB
ap-1316	124	5	the	the	DET
ap-1316	124	6	aperture	aperture	NOUN
ap-1316	124	7	a	a	DET
ap-1316	124	8	number	number	NOUN
ap-1316	124	9	of	of	ADP
ap-1316	124	10	mirrors	mirror	NOUN
ap-1316	124	11	can	can	AUX
ap-1316	124	12	be	be	AUX
ap-1316	124	13	nested	nest	VERB
ap-1316	124	14	together	together	ADV
ap-1316	124	15	,	,	PUNCT
ap-1316	124	16	but	but	CCONJ
ap-1316	124	17	it	it	PRON
ap-1316	124	18	should	should	AUX
ap-1316	124	19	be	be	AUX
ap-1316	124	20	noted	note	VERB
ap-1316	124	21	that	that	SCONJ
ap-1316	124	22	this	this	DET
ap-1316	124	23	nesting	nesting	ADJ
ap-1316	124	24	introduces	introduce	NOUN
ap-1316	124	25	additional	additional	ADJ
ap-1316	124	26	aberrations	aberration	NOUN
ap-1316	124	27	.	.	PUNCT
ap-1316	125	1	this	this	DET
ap-1316	125	2	configuration	configuration	NOUN
ap-1316	125	3	is	be	AUX
ap-1316	125	4	used	use	VERB
ap-1316	125	5	mostly	mostly	ADV
ap-1316	125	6	in	in	ADP
ap-1316	125	7	experiments	experiment	NOUN
ap-1316	125	8	not	not	PART
ap-1316	125	9	requiring	require	VERB
ap-1316	125	10	a	a	DET
ap-1316	125	11	large	large	ADJ
ap-1316	125	12	collecting	collecting	NOUN
ap-1316	125	13	area	area	NOUN
ap-1316	125	14	(	(	PUNCT
ap-1316	125	15	solar	solar	ADJ
ap-1316	125	16	,	,	PUNCT
ap-1316	125	17	laboratory	laboratory	NOUN
ap-1316	125	18	)	)	PUNCT
ap-1316	125	19	.	.	PUNCT
ap-1316	126	1	recently	recently	ADV
ap-1316	126	2	,	,	PUNCT
ap-1316	126	3	however	however	ADV
ap-1316	126	4	,	,	PUNCT
ap-1316	126	5	large	large	ADJ
ap-1316	126	6	modules	module	NOUN
ap-1316	126	7	of	of	ADP
ap-1316	126	8	kb	kb	PROPN
ap-1316	126	9	mirrors	mirror	NOUN
ap-1316	126	10	have	have	AUX
ap-1316	126	11	also	also	ADV
ap-1316	126	12	been	be	AUX
ap-1316	126	13	suggested	suggest	VERB
ap-1316	126	14	for	for	ADP
ap-1316	126	15	stellar	stellar	ADJ
ap-1316	126	16	xray	xray	ADJ
ap-1316	126	17	experiments	experiment	NOUN
ap-1316	126	18	.	.	PUNCT
ap-1316	127	1	as	as	SCONJ
ap-1316	127	2	mentioned	mention	VERB
ap-1316	127	3	above	above	ADV
ap-1316	127	4	,	,	PUNCT
ap-1316	127	5	si	si	PROPN
ap-1316	127	6	wafers	wafer	NOUN
ap-1316	127	7	are	be	AUX
ap-1316	127	8	difficult	difficult	ADJ
ap-1316	127	9	to	to	PART
ap-1316	127	10	shape	shape	VERB
ap-1316	127	11	,	,	PUNCT
ap-1316	127	12	especially	especially	ADV
ap-1316	127	13	to	to	ADP
ap-1316	127	14	small	small	ADJ
ap-1316	127	15	radii	radius	NOUN
ap-1316	127	16	.	.	PUNCT
ap-1316	128	1	to	to	PART
ap-1316	128	2	overcome	overcome	VERB
ap-1316	128	3	this	this	DET
ap-1316	128	4	difficulty	difficulty	NOUN
ap-1316	128	5	,	,	PUNCT
ap-1316	128	6	another	another	DET
ap-1316	128	7	x	x	ADJ
ap-1316	128	8	-	-	NOUN
ap-1316	128	9	ray	ray	NOUN
ap-1316	128	10	optics	optic	NOUN
ap-1316	128	11	arrangement	arrangement	NOUN
ap-1316	128	12	can	can	AUX
ap-1316	128	13	be	be	AUX
ap-1316	128	14	considered	consider	VERB
ap-1316	128	15	,	,	PUNCT
ap-1316	128	16	namely	namely	ADV
ap-1316	128	17	the	the	DET
ap-1316	128	18	kirkpatrick	kirkpatrick	PROPN
ap-1316	128	19	-	-	PUNCT
ap-1316	128	20	baez	baez	PROPN
ap-1316	128	21	(	(	PUNCT
ap-1316	128	22	kb	kb	PROPN
ap-1316	128	23	)	)	PUNCT
ap-1316	128	24	system	system	NOUN
ap-1316	128	25	.	.	PUNCT
ap-1316	129	1	then	then	ADV
ap-1316	129	2	the	the	DET
ap-1316	129	3	curvature	curvature	NOUN
ap-1316	129	4	radii	radius	NOUN
ap-1316	129	5	are	be	AUX
ap-1316	129	6	much	much	ADV
ap-1316	129	7	larger	large	ADJ
ap-1316	129	8	,	,	PUNCT
ap-1316	129	9	of	of	ADP
ap-1316	129	10	the	the	DET
ap-1316	129	11	order	order	NOUN
ap-1316	129	12	of	of	ADP
ap-1316	129	13	a	a	DET
ap-1316	129	14	few	few	ADJ
ap-1316	129	15	km	km	NOUN
ap-1316	129	16	,	,	PUNCT
ap-1316	129	17	while	while	SCONJ
ap-1316	129	18	the	the	DET
ap-1316	129	19	imaging	imaging	NOUN
ap-1316	129	20	performance	performance	NOUN
ap-1316	129	21	is	be	AUX
ap-1316	129	22	similar	similar	ADJ
ap-1316	129	23	.	.	PUNCT
ap-1316	130	1	for	for	ADP
ap-1316	130	2	the	the	DET
ap-1316	130	3	same	same	ADJ
ap-1316	130	4	effective	effective	ADJ
ap-1316	130	5	area	area	NOUN
ap-1316	130	6	,	,	PUNCT
ap-1316	130	7	however	however	ADV
ap-1316	130	8	,	,	PUNCT
ap-1316	130	9	the	the	DET
ap-1316	130	10	focal	focal	ADJ
ap-1316	130	11	length	length	NOUN
ap-1316	130	12	of	of	ADP
ap-1316	130	13	the	the	DET
ap-1316	130	14	kb	kb	PROPN
ap-1316	130	15	system	system	NOUN
ap-1316	130	16	is	be	AUX
ap-1316	130	17	about	about	ADV
ap-1316	130	18	twice	twice	ADV
ap-1316	130	19	as	as	ADV
ap-1316	130	20	large	large	ADJ
ap-1316	130	21	as	as	ADP
ap-1316	130	22	the	the	DET
ap-1316	130	23	focal	focal	ADJ
ap-1316	130	24	length	length	NOUN
ap-1316	130	25	of	of	ADP
ap-1316	130	26	the	the	DET
ap-1316	130	27	wolter	wolter	NOUN
ap-1316	130	28	system	system	NOUN
ap-1316	130	29	.	.	PUNCT
ap-1316	131	1	nevertheless	nevertheless	ADV
ap-1316	131	2	,	,	PUNCT
ap-1316	131	3	kb	kb	PROPN
ap-1316	131	4	systems	system	NOUN
ap-1316	131	5	represent	represent	VERB
ap-1316	131	6	a	a	DET
ap-1316	131	7	promising	promising	ADJ
ap-1316	131	8	alternative	alternative	NOUN
ap-1316	131	9	to	to	ADP
ap-1316	131	10	the	the	DET
ap-1316	131	11	classical	classical	ADJ
ap-1316	131	12	wolter	wolter	NOUN
ap-1316	131	13	systems	system	NOUN
ap-1316	131	14	in	in	ADP
ap-1316	131	15	future	future	ADJ
ap-1316	131	16	large	large	ADJ
ap-1316	131	17	space	space	NOUN
ap-1316	131	18	x	x	NOUN
ap-1316	131	19	-	-	NOUN
ap-1316	131	20	ray	ray	NOUN
ap-1316	131	21	telescopes	telescope	NOUN
ap-1316	131	22	.	.	PUNCT
ap-1316	132	1	a	a	DET
ap-1316	132	2	very	very	ADV
ap-1316	132	3	important	important	ADJ
ap-1316	132	4	factor	factor	NOUN
ap-1316	132	5	is	be	AUX
ap-1316	132	6	the	the	DET
ap-1316	132	7	ease	ease	NOUN
ap-1316	132	8	(	(	PUNCT
ap-1316	132	9	and	and	CCONJ
ap-1316	132	10	hence	hence	ADV
ap-1316	132	11	the	the	DET
ap-1316	132	12	reduced	reduced	ADJ
ap-1316	132	13	cost	cost	NOUN
ap-1316	132	14	)	)	PUNCT
ap-1316	132	15	of	of	ADP
ap-1316	132	16	constructing	construct	VERB
ap-1316	132	17	highly	highly	ADV
ap-1316	132	18	segmented	segment	VERB
ap-1316	132	19	modules	module	NOUN
ap-1316	132	20	based	base	VERB
ap-1316	132	21	on	on	ADP
ap-1316	132	22	multiply	multiply	ADV
ap-1316	132	23	nested	nest	VERB
ap-1316	132	24	thin	thin	ADJ
ap-1316	132	25	reflecting	reflect	VERB
ap-1316	132	26	substrates	substrate	NOUN
ap-1316	132	27	in	in	ADP
ap-1316	132	28	comparison	comparison	NOUN
ap-1316	132	29	with	with	ADP
ap-1316	132	30	the	the	DET
ap-1316	132	31	wolter	wolter	NOUN
ap-1316	132	32	design	design	NOUN
ap-1316	132	33	.	.	PUNCT
ap-1316	133	1	while	while	SCONJ
ap-1316	133	2	e.g.	e.g.	ADV
ap-1316	133	3	the	the	DET
ap-1316	133	4	wolter	wolter	NOUN
ap-1316	133	5	design	design	NOUN
ap-1316	133	6	for	for	ADP
ap-1316	133	7	ixo	ixo	NOUN
ap-1316	133	8	requires	require	VERB
ap-1316	133	9	the	the	DET
ap-1316	133	10	substrates	substrate	NOUN
ap-1316	133	11	to	to	PART
ap-1316	133	12	be	be	AUX
ap-1316	133	13	precisely	precisely	ADV
ap-1316	133	14	formed	form	VERB
ap-1316	133	15	with	with	ADP
ap-1316	133	16	curvatures	curvature	NOUN
ap-1316	133	17	as	as	ADV
ap-1316	133	18	small	small	ADJ
ap-1316	133	19	as	as	ADP
ap-1316	133	20	0.25	0.25	NUM
ap-1316	133	21	m	m	NOUN
ap-1316	133	22	,	,	PUNCT
ap-1316	133	23	the	the	DET
ap-1316	133	24	alternative	alternative	ADJ
ap-1316	133	25	kb	kb	PROPN
ap-1316	133	26	arrangement	arrangement	NOUN
ap-1316	133	27	uses	use	VERB
ap-1316	133	28	almost	almost	ADV
ap-1316	133	29	flat	flat	ADJ
ap-1316	133	30	or	or	CCONJ
ap-1316	133	31	only	only	ADV
ap-1316	133	32	slightly	slightly	ADV
ap-1316	133	33	bent	bent	ADJ
ap-1316	133	34	sheets	sheet	NOUN
ap-1316	133	35	.	.	PUNCT
ap-1316	134	1	hence	hence	ADV
ap-1316	134	2	the	the	DET
ap-1316	134	3	feasibility	feasibility	NOUN
ap-1316	134	4	of	of	ADP
ap-1316	134	5	constructing	construct	VERB
ap-1316	134	6	a	a	DET
ap-1316	134	7	kb	kb	PROPN
ap-1316	134	8	module	module	NOUN
ap-1316	134	9	with	with	ADP
ap-1316	134	10	the	the	DET
ap-1316	134	11	required	require	VERB
ap-1316	134	12	5	5	NUM
ap-1316	134	13	arcsec	arcsec	PROPN
ap-1316	134	14	fwhm	fwhm	PROPN
ap-1316	134	15	at	at	ADP
ap-1316	134	16	an	an	DET
ap-1316	134	17	affordable	affordable	ADJ
ap-1316	134	18	cost	cost	NOUN
ap-1316	134	19	is	be	AUX
ap-1316	134	20	higher	high	ADJ
ap-1316	134	21	than	than	ADP
ap-1316	134	22	for	for	ADP
ap-1316	134	23	the	the	DET
ap-1316	134	24	wolter	wolter	NOUN
ap-1316	134	25	arrangement	arrangement	NOUN
ap-1316	134	26	.	.	PUNCT
ap-1316	135	1	advanced	advanced	PROPN
ap-1316	135	2	kb	kb	PROPN
ap-1316	135	3	telescopes	telescope	NOUN
ap-1316	135	4	are	be	AUX
ap-1316	135	5	based	base	VERB
ap-1316	135	6	on	on	ADP
ap-1316	135	7	the	the	DET
ap-1316	135	8	multi	multi	ADJ
ap-1316	135	9	foil	foil	NOUN
ap-1316	135	10	optics	optic	NOUN
ap-1316	135	11	(	(	PUNCT
ap-1316	135	12	mfo	mfo	NOUN
ap-1316	135	13	)	)	PUNCT
ap-1316	135	14	approach	approach	NOUN
ap-1316	135	15	(	(	PUNCT
ap-1316	135	16	x	x	NOUN
ap-1316	135	17	-	-	NOUN
ap-1316	135	18	ray	ray	NOUN
ap-1316	135	19	grazing	grazing	NOUN
ap-1316	135	20	incidence	incidence	NOUN
ap-1316	135	21	imaging	image	VERB
ap-1316	135	22	optics	optic	NOUN
ap-1316	135	23	based	base	VERB
ap-1316	135	24	on	on	ADP
ap-1316	135	25	numerous	numerous	ADJ
ap-1316	135	26	thin	thin	ADJ
ap-1316	135	27	reflecting	reflect	VERB
ap-1316	135	28	substrates	substrate	NOUN
ap-1316	135	29	/	/	SYM
ap-1316	135	30	foils	foil	NOUN
ap-1316	135	31	)	)	PUNCT
ap-1316	135	32	.	.	PUNCT
ap-1316	136	1	the	the	DET
ap-1316	136	2	distinction	distinction	NOUN
ap-1316	136	3	between	between	ADP
ap-1316	136	4	mfo	mfo	PROPN
ap-1316	136	5	and	and	CCONJ
ap-1316	136	6	other	other	ADJ
ap-1316	136	7	optics	optic	NOUN
ap-1316	136	8	using	use	VERB
ap-1316	136	9	packed	packed	ADJ
ap-1316	136	10	or	or	CCONJ
ap-1316	136	11	nested	nested	ADJ
ap-1316	136	12	mirrors	mirror	NOUN
ap-1316	136	13	is	be	AUX
ap-1316	136	14	that	that	SCONJ
ap-1316	136	15	mfo	mfo	PROPN
ap-1316	136	16	is	be	AUX
ap-1316	136	17	based	base	VERB
ap-1316	136	18	on	on	ADP
ap-1316	136	19	numerous	numerous	ADJ
ap-1316	136	20	very	very	ADV
ap-1316	136	21	thin	thin	ADJ
ap-1316	136	22	(	(	PUNCT
ap-1316	136	23	typically	typically	ADV
ap-1316	136	24	less	less	ADJ
ap-1316	136	25	than	than	ADP
ap-1316	136	26	0.1	0.1	NUM
ap-1316	136	27	mm	mm	NOUN
ap-1316	136	28	)	)	PUNCT
ap-1316	136	29	substrates	substrate	NOUN
ap-1316	136	30	.	.	PUNCT
ap-1316	137	1	the	the	DET
ap-1316	137	2	mfo	mfo	PROPN
ap-1316	137	3	kb	kb	PROPN
ap-1316	137	4	test	test	NOUN
ap-1316	137	5	modules	module	NOUN
ap-1316	137	6	were	be	AUX
ap-1316	137	7	recently	recently	ADV
ap-1316	137	8	designed	design	VERB
ap-1316	137	9	and	and	CCONJ
ap-1316	137	10	constructed	construct	VERB
ap-1316	137	11	at	at	ADP
ap-1316	137	12	rigaku	rigaku	NOUN
ap-1316	137	13	innovative	innovative	PROPN
ap-1316	137	14	technologies	technology	NOUN
ap-1316	137	15	europe	europe	PROPN
ap-1316	137	16	(	(	PUNCT
ap-1316	137	17	rite	rite	PROPN
ap-1316	137	18	)	)	PUNCT
ap-1316	137	19	in	in	ADP
ap-1316	137	20	prague	prague	PROPN
ap-1316	137	21	,	,	PUNCT
ap-1316	137	22	and	and	CCONJ
ap-1316	137	23	2	2	NUM
ap-1316	137	24	modules	module	NOUN
ap-1316	137	25	were	be	AUX
ap-1316	137	26	tested	test	VERB
ap-1316	137	27	in	in	ADP
ap-1316	137	28	full	full	ADJ
ap-1316	137	29	aperture	aperture	NOUN
ap-1316	137	30	x	x	NOUN
ap-1316	137	31	-	-	NOUN
ap-1316	137	32	ray	ray	NOUN
ap-1316	137	33	tests	test	NOUN
ap-1316	137	34	in	in	ADP
ap-1316	137	35	the	the	DET
ap-1316	137	36	test	test	NOUN
ap-1316	137	37	facility	facility	NOUN
ap-1316	137	38	of	of	ADP
ap-1316	137	39	the	the	DET
ap-1316	137	40	university	university	NOUN
ap-1316	137	41	of	of	ADP
ap-1316	137	42	boulder	boulder	NOUN
ap-1316	137	43	,	,	PUNCT
ap-1316	137	44	with	with	ADP
ap-1316	137	45	preliminary	preliminary	ADJ
ap-1316	137	46	results	result	NOUN
ap-1316	137	47	of	of	ADP
ap-1316	137	48	fwhm	fwhm	PROPN
ap-1316	137	49	26	26	NUM
ap-1316	137	50	arcsec	arcsec	PROPN
ap-1316	137	51	for	for	ADP
ap-1316	137	52	a	a	DET
ap-1316	137	53	full	full	ADJ
ap-1316	137	54	stack	stack	NOUN
ap-1316	137	55	of	of	ADP
ap-1316	137	56	24	24	NUM
ap-1316	137	57	standard	standard	ADJ
ap-1316	137	58	si	si	NOUN
ap-1316	137	59	plates	plate	NOUN
ap-1316	137	60	at	at	ADP
ap-1316	137	61	5	5	NUM
ap-1316	137	62	kev	kev	PROPN
ap-1316	137	63	(	(	PUNCT
ap-1316	137	64	figures	figure	NOUN
ap-1316	137	65	6	6	NUM
ap-1316	137	66	,	,	PUNCT
ap-1316	137	67	7	7	NUM
ap-1316	137	68	)	)	PUNCT
ap-1316	137	69	.	.	PUNCT
ap-1316	138	1	fig	fig	NOUN
ap-1316	138	2	.	.	PUNCT
ap-1316	139	1	6	6	NUM
ap-1316	139	2	:	:	PUNCT
ap-1316	139	3	left	leave	VERB
ap-1316	139	4	:	:	PUNCT
ap-1316	139	5	test	test	NOUN
ap-1316	139	6	k	k	PROPN
ap-1316	139	7	-	-	PUNCT
ap-1316	139	8	b	b	PROPN
ap-1316	139	9	modules	module	NOUN
ap-1316	139	10	assembled	assemble	VERB
ap-1316	139	11	in	in	ADP
ap-1316	139	12	rigaku	rigaku	NOUN
ap-1316	139	13	rite	rite	ADJ
ap-1316	139	14	in	in	ADP
ap-1316	139	15	prague	prague	PROPN
ap-1316	139	16	,	,	PUNCT
ap-1316	139	17	right	right	ADV
ap-1316	139	18	:	:	PUNCT
ap-1316	139	19	k	k	ADJ
ap-1316	139	20	-	-	PUNCT
ap-1316	139	21	b	b	NOUN
ap-1316	139	22	module	module	NOUN
ap-1316	139	23	during	during	ADP
ap-1316	139	24	full	full	ADJ
ap-1316	139	25	aperture	aperture	NOUN
ap-1316	139	26	x	x	NOUN
ap-1316	139	27	-	-	NOUN
ap-1316	139	28	ray	ray	NOUN
ap-1316	139	29	tests	test	NOUN
ap-1316	139	30	at	at	ADP
ap-1316	139	31	boulder	boulder	PROPN
ap-1316	139	32	university	university	PROPN
ap-1316	139	33	fig	fig	NOUN
ap-1316	139	34	.	.	PUNCT
ap-1316	140	1	7	7	NUM
ap-1316	140	2	:	:	PUNCT
ap-1316	140	3	the	the	DET
ap-1316	140	4	measurement	measurement	NOUN
ap-1316	140	5	results	result	NOUN
ap-1316	140	6	of	of	ADP
ap-1316	140	7	the	the	DET
ap-1316	140	8	k	k	PROPN
ap-1316	140	9	-	-	PUNCT
ap-1316	140	10	b	b	NOUN
ap-1316	140	11	test	test	NOUN
ap-1316	140	12	module	module	NOUN
ap-1316	140	13	with	with	ADP
ap-1316	140	14	24	24	NUM
ap-1316	140	15	si	si	NOUN
ap-1316	140	16	wafers	wafer	NOUN
ap-1316	140	17	,	,	PUNCT
ap-1316	140	18	full	full	ADJ
ap-1316	140	19	aperture	aperture	NOUN
ap-1316	140	20	tests	test	NOUN
ap-1316	140	21	at	at	ADP
ap-1316	140	22	5	5	NUM
ap-1316	140	23	kev	kev	NOUN
ap-1316	140	24	at	at	ADP
ap-1316	140	25	university	university	PROPN
ap-1316	140	26	of	of	ADP
ap-1316	140	27	colorado	colorado	PROPN
ap-1316	140	28	at	at	ADP
ap-1316	140	29	boulder	boulder	NOUN
ap-1316	140	30	.	.	PUNCT
ap-1316	141	1	the	the	DET
ap-1316	141	2	estimated	estimate	VERB
ap-1316	141	3	fwhm	fwhm	NOUN
ap-1316	141	4	is	be	AUX
ap-1316	141	5	26	26	NUM
ap-1316	141	6	arcsec	arcsec	PROPN
ap-1316	141	7	50	50	NUM
ap-1316	141	8	acta	acta	PROPN
ap-1316	141	9	polytechnica	polytechnica	PROPN
ap-1316	141	10	vol	vol	NOUN
ap-1316	141	11	.	.	PUNCT
ap-1316	142	1	51	51	NUM
ap-1316	142	2	no	no	NOUN
ap-1316	142	3	.	.	PUNCT
ap-1316	143	1	2/2011	2/2011	NUM
ap-1316	143	2	6	6	NUM
ap-1316	143	3	conclusion	conclusion	NOUN
ap-1316	143	4	suitable	suitable	ADJ
ap-1316	143	5	technologies	technology	NOUN
ap-1316	143	6	for	for	ADP
ap-1316	143	7	future	future	ADJ
ap-1316	143	8	large	large	ADJ
ap-1316	143	9	x	x	ADJ
ap-1316	143	10	-	-	NOUN
ap-1316	143	11	ray	ray	NOUN
ap-1316	143	12	telescopes	telescope	NOUN
ap-1316	143	13	require	require	VERB
ap-1316	143	14	extensive	extensive	ADJ
ap-1316	143	15	research	research	NOUN
ap-1316	143	16	work	work	NOUN
ap-1316	143	17	.	.	PUNCT
ap-1316	144	1	two	two	NUM
ap-1316	144	2	promising	promising	ADJ
ap-1316	144	3	technologies	technology	NOUN
ap-1316	144	4	suitable	suitable	ADJ
ap-1316	144	5	for	for	ADP
ap-1316	144	6	future	future	ADJ
ap-1316	144	7	large	large	ADJ
ap-1316	144	8	-	-	PUNCT
ap-1316	144	9	aperture	aperture	NOUN
ap-1316	144	10	and	and	CCONJ
ap-1316	144	11	fine	fine	ADJ
ap-1316	144	12	resolution	resolution	NOUN
ap-1316	144	13	x	x	NOUN
ap-1316	144	14	-	-	NOUN
ap-1316	144	15	ray	ray	NOUN
ap-1316	144	16	telescopes	telescope	NOUN
ap-1316	144	17	,	,	PUNCT
ap-1316	144	18	such	such	ADJ
ap-1316	144	19	as	as	ADP
ap-1316	144	20	ixo	ixo	NOUN
ap-1316	144	21	,	,	PUNCT
ap-1316	144	22	were	be	AUX
ap-1316	144	23	exploited	exploit	VERB
ap-1316	144	24	and	and	CCONJ
ap-1316	144	25	investigated	investigate	VERB
ap-1316	144	26	in	in	ADP
ap-1316	144	27	detail	detail	NOUN
ap-1316	144	28	,	,	PUNCT
ap-1316	144	29	namely	namely	ADV
ap-1316	144	30	glass	glass	NOUN
ap-1316	144	31	thermal	thermal	ADJ
ap-1316	144	32	forming	form	VERB
ap-1316	144	33	and	and	CCONJ
ap-1316	144	34	si	si	NOUN
ap-1316	144	35	wafer	wafer	NOUN
ap-1316	144	36	bending	bend	VERB
ap-1316	144	37	.	.	PUNCT
ap-1316	145	1	in	in	ADP
ap-1316	145	2	both	both	DET
ap-1316	145	3	cases	case	NOUN
ap-1316	145	4	,	,	PUNCT
ap-1316	145	5	promising	promising	ADJ
ap-1316	145	6	results	result	NOUN
ap-1316	145	7	have	have	AUX
ap-1316	145	8	been	be	AUX
ap-1316	145	9	achieved	achieve	VERB
ap-1316	145	10	,	,	PUNCT
ap-1316	145	11	with	with	ADP
ap-1316	145	12	peak	peak	NOUN
ap-1316	145	13	-	-	PUNCT
ap-1316	145	14	tovalley	tovalley	NOUN
ap-1316	145	15	deviations	deviation	NOUN
ap-1316	145	16	of	of	ADP
ap-1316	145	17	the	the	DET
ap-1316	145	18	final	final	ADJ
ap-1316	145	19	profiles	profile	NOUN
ap-1316	145	20	from	from	ADP
ap-1316	145	21	the	the	DET
ap-1316	145	22	ideal	ideal	ADJ
ap-1316	145	23	profiles	profile	NOUN
ap-1316	145	24	being	be	AUX
ap-1316	145	25	of	of	ADP
ap-1316	145	26	the	the	DET
ap-1316	145	27	order	order	NOUN
ap-1316	145	28	of	of	ADP
ap-1316	145	29	1	1	NUM
ap-1316	145	30	μm	μm	NOUN
ap-1316	145	31	in	in	ADP
ap-1316	145	32	the	the	DET
ap-1316	145	33	best	good	ADJ
ap-1316	145	34	cases	case	NOUN
ap-1316	145	35	,	,	PUNCT
ap-1316	145	36	with	with	ADP
ap-1316	145	37	space	space	NOUN
ap-1316	145	38	for	for	ADP
ap-1316	145	39	further	further	ADJ
ap-1316	145	40	essential	essential	ADJ
ap-1316	145	41	improvements	improvement	NOUN
ap-1316	145	42	and	and	CCONJ
ap-1316	145	43	optimization	optimization	NOUN
ap-1316	145	44	.	.	PUNCT
ap-1316	146	1	in	in	ADP
ap-1316	146	2	the	the	DET
ap-1316	146	3	czech	czech	PROPN
ap-1316	146	4	republic	republic	NOUN
ap-1316	146	5	,	,	PUNCT
ap-1316	146	6	an	an	DET
ap-1316	146	7	interdisciplinary	interdisciplinary	ADJ
ap-1316	146	8	team	team	NOUN
ap-1316	146	9	with	with	ADP
ap-1316	146	10	10	10	NUM
ap-1316	146	11	members	member	NOUN
ap-1316	146	12	is	be	AUX
ap-1316	146	13	cooperating	cooperate	VERB
ap-1316	146	14	closely	closely	ADV
ap-1316	146	15	with	with	ADP
ap-1316	146	16	experienced	experienced	ADJ
ap-1316	146	17	specialists	specialist	NOUN
ap-1316	146	18	,	,	PUNCT
ap-1316	146	19	including	include	VERB
ap-1316	146	20	researchers	researcher	NOUN
ap-1316	146	21	from	from	ADP
ap-1316	146	22	a	a	DET
ap-1316	146	23	large	large	ADJ
ap-1316	146	24	company	company	NOUN
ap-1316	146	25	producing	produce	VERB
ap-1316	146	26	si	si	NOUN
ap-1316	146	27	wafers	wafer	NOUN
ap-1316	146	28	.	.	PUNCT
ap-1316	147	1	si	si	PROPN
ap-1316	147	2	wafers	wafer	NOUN
ap-1316	147	3	have	have	AUX
ap-1316	147	4	been	be	AUX
ap-1316	147	5	successfully	successfully	ADV
ap-1316	147	6	bent	bent	ADJ
ap-1316	147	7	to	to	ADP
ap-1316	147	8	the	the	DET
ap-1316	147	9	desired	desire	VERB
ap-1316	147	10	geometry	geometry	NOUN
ap-1316	147	11	by	by	ADP
ap-1316	147	12	three	three	NUM
ap-1316	147	13	different	different	ADJ
ap-1316	147	14	techniques	technique	NOUN
ap-1316	147	15	.	.	PUNCT
ap-1316	148	1	in	in	ADP
ap-1316	148	2	the	the	DET
ap-1316	148	3	best	good	ADJ
ap-1316	148	4	cases	case	NOUN
ap-1316	148	5	,	,	PUNCT
ap-1316	148	6	the	the	DET
ap-1316	148	7	accuracy	accuracy	NOUN
ap-1316	148	8	achieved	achieve	VERB
ap-1316	148	9	for	for	ADP
ap-1316	148	10	a	a	DET
ap-1316	148	11	150	150	NUM
ap-1316	148	12	mm	mm	NOUN
ap-1316	148	13	si	si	NOUN
ap-1316	148	14	wafer	wafer	NOUN
ap-1316	148	15	is	be	AUX
ap-1316	148	16	1–2	1–2	NUM
ap-1316	148	17	μm	μm	NOUN
ap-1316	148	18	for	for	ADP
ap-1316	148	19	deviation	deviation	NOUN
ap-1316	148	20	from	from	ADP
ap-1316	148	21	the	the	DET
ap-1316	148	22	ideal	ideal	ADJ
ap-1316	148	23	optical	optical	ADJ
ap-1316	148	24	surface	surface	NOUN
ap-1316	148	25	.	.	PUNCT
ap-1316	149	1	experiments	experiment	NOUN
ap-1316	149	2	are	be	AUX
ap-1316	149	3	continuing	continue	VERB
ap-1316	149	4	in	in	ADP
ap-1316	149	5	an	an	DET
ap-1316	149	6	attempt	attempt	NOUN
ap-1316	149	7	to	to	PART
ap-1316	149	8	further	far	ADV
ap-1316	149	9	improve	improve	VERB
ap-1316	149	10	the	the	DET
ap-1316	149	11	forming	form	VERB
ap-1316	149	12	accuracy	accuracy	NOUN
ap-1316	149	13	.	.	PUNCT
ap-1316	150	1	acknowledgement	acknowledgement	NOUN
ap-1316	150	2	we	we	PRON
ap-1316	150	3	acknowledge	acknowledge	VERB
ap-1316	150	4	the	the	DET
ap-1316	150	5	support	support	NOUN
ap-1316	150	6	provided	provide	VERB
ap-1316	150	7	by	by	ADP
ap-1316	150	8	the	the	DET
ap-1316	150	9	grant	grant	PROPN
ap-1316	150	10	agency	agency	NOUN
ap-1316	150	11	of	of	ADP
ap-1316	150	12	the	the	DET
ap-1316	150	13	academy	academy	PROPN
ap-1316	150	14	of	of	ADP
ap-1316	150	15	sciences	sciences	PROPN
ap-1316	150	16	of	of	ADP
ap-1316	150	17	the	the	DET
ap-1316	150	18	czech	czech	PROPN
ap-1316	150	19	republic	republic	NOUN
ap-1316	150	20	,	,	PUNCT
ap-1316	150	21	grant	grant	VERB
ap-1316	150	22	iaax	iaax	PROPN
ap-1316	150	23	01220701	01220701	NUM
ap-1316	150	24	,	,	PUNCT
ap-1316	150	25	by	by	ADP
ap-1316	150	26	the	the	DET
ap-1316	150	27	ministry	ministry	PROPN
ap-1316	150	28	of	of	ADP
ap-1316	150	29	education	education	PROPN
ap-1316	150	30	and	and	CCONJ
ap-1316	150	31	youth	youth	NOUN
ap-1316	150	32	of	of	ADP
ap-1316	150	33	the	the	DET
ap-1316	150	34	czech	czech	PROPN
ap-1316	150	35	republic	republic	NOUN
ap-1316	150	36	,	,	PUNCT
ap-1316	150	37	projects	project	VERB
ap-1316	150	38	me918	me918	PROPN
ap-1316	150	39	,	,	PUNCT
ap-1316	150	40	me09028	me09028	NOUN
ap-1316	150	41	and	and	CCONJ
ap-1316	150	42	me09004	me09004	PROPN
ap-1316	150	43	.	.	PUNCT
ap-1316	151	1	the	the	DET
ap-1316	151	2	investigations	investigation	NOUN
ap-1316	151	3	related	relate	VERB
ap-1316	151	4	to	to	ADP
ap-1316	151	5	the	the	DET
ap-1316	151	6	esa	esa	PROPN
ap-1316	151	7	ixo	ixo	PROPN
ap-1316	151	8	project	project	NOUN
ap-1316	151	9	were	be	AUX
ap-1316	151	10	supported	support	VERB
ap-1316	151	11	by	by	ADP
ap-1316	151	12	esa	esa	PROPN
ap-1316	151	13	pecs	pecs	PROPN
ap-1316	151	14	project	project	NOUN
ap-1316	151	15	no	no	NOUN
ap-1316	151	16	.	.	PUNCT
ap-1316	151	17	98038	98038	NUM
ap-1316	151	18	.	.	PUNCT
ap-1316	152	1	m.s	m.s	PROPN
ap-1316	152	2	.	.	PROPN
ap-1316	152	3	acknowledges	acknowledge	VERB
ap-1316	152	4	support	support	NOUN
ap-1316	152	5	from	from	ADP
ap-1316	152	6	a	a	DET
ap-1316	152	7	junior	junior	ADJ
ap-1316	152	8	grant	grant	NOUN
ap-1316	152	9	from	from	ADP
ap-1316	152	10	the	the	DET
ap-1316	152	11	grant	grant	NOUN
ap-1316	152	12	agency	agency	NOUN
ap-1316	152	13	of	of	ADP
ap-1316	152	14	the	the	DET
ap-1316	152	15	czech	czech	PROPN
ap-1316	152	16	republic	republic	NOUN
ap-1316	152	17	,	,	PUNCT
ap-1316	152	18	grant	grant	VERB
ap-1316	152	19	202/07	202/07	NUM
ap-1316	152	20	/	/	SYM
ap-1316	152	21	p510	p510	PROPN
ap-1316	152	22	.	.	PUNCT
ap-1316	153	1	we	we	PRON
ap-1316	153	2	also	also	ADV
ap-1316	153	3	acknowledge	acknowledge	VERB
ap-1316	153	4	collaboration	collaboration	NOUN
ap-1316	153	5	with	with	ADP
ap-1316	153	6	drs	dr	NOUN
ap-1316	153	7	.	.	PUNCT
ap-1316	154	1	j.	j.	PROPN
ap-1316	154	2	sik	sik	PROPN
ap-1316	154	3	and	and	CCONJ
ap-1316	154	4	m.	m.	NOUN
ap-1316	154	5	lorenc	lorenc	NOUN
ap-1316	154	6	from	from	ADP
ap-1316	154	7	on	on	ADP
ap-1316	154	8	semiconductor	semiconductor	NOUN
ap-1316	154	9	czech	czech	PROPN
ap-1316	154	10	republic	republic	NOUN
ap-1316	154	11	,	,	PUNCT
ap-1316	154	12	and	and	CCONJ
ap-1316	154	13	with	with	ADP
ap-1316	154	14	the	the	DET
ap-1316	154	15	team	team	NOUN
ap-1316	154	16	of	of	ADP
ap-1316	154	17	prof	prof	PROPN
ap-1316	154	18	.	.	PUNCT
ap-1316	155	1	webster	webster	PROPN
ap-1316	155	2	cash	cash	PROPN
ap-1316	155	3	from	from	ADP
ap-1316	155	4	university	university	NOUN
ap-1316	155	5	of	of	ADP
ap-1316	155	6	colorado	colorado	NOUN
ap-1316	155	7	at	at	ADP
ap-1316	155	8	boulder	boulder	NOUN
ap-1316	155	9	for	for	ADP
ap-1316	155	10	x	x	NOUN
ap-1316	155	11	-	-	NOUN
ap-1316	155	12	ray	ray	NOUN
ap-1316	155	13	tests	test	NOUN
ap-1316	155	14	of	of	ADP
ap-1316	155	15	kb	kb	PROPN
ap-1316	155	16	modules	module	NOUN
ap-1316	155	17	in	in	ADP
ap-1316	155	18	their	their	PRON
ap-1316	155	19	x	x	NOUN
ap-1316	155	20	-	-	NOUN
ap-1316	155	21	ray	ray	NOUN
ap-1316	155	22	facility	facility	NOUN
ap-1316	155	23	.	.	PUNCT
ap-1316	156	1	references	reference	NOUN
ap-1316	156	2	[	[	X
ap-1316	156	3	1	1	NUM
ap-1316	156	4	]	]	PUNCT
ap-1316	156	5	hudec	hudec	PROPN
ap-1316	156	6	,	,	PUNCT
ap-1316	156	7	r.	r.	PROPN
ap-1316	156	8	,	,	PUNCT
ap-1316	156	9	valníček	valníček	PROPN
ap-1316	156	10	,	,	PUNCT
ap-1316	156	11	b.	b.	PROPN
ap-1316	156	12	,	,	PUNCT
ap-1316	156	13	červencl	červencl	NOUN
ap-1316	156	14	,	,	PUNCT
ap-1316	156	15	j.	j.	PROPN
ap-1316	156	16	,	,	PUNCT
ap-1316	156	17	et	et	PROPN
ap-1316	156	18	al	al	PROPN
ap-1316	156	19	.	.	PROPN
ap-1316	156	20	:	:	PUNCT
ap-1316	157	1	spie	spie	ADJ
ap-1316	157	2	,	,	PUNCT
ap-1316	157	3	1991	1991	NUM
ap-1316	157	4	,	,	PUNCT
ap-1316	157	5	1	1	NUM
ap-1316	157	6	343	343	NUM
ap-1316	157	7	,	,	PUNCT
ap-1316	157	8	162	162	NUM
ap-1316	157	9	.	.	PUNCT
ap-1316	158	1	[	[	X
ap-1316	158	2	2	2	NUM
ap-1316	158	3	]	]	PUNCT
ap-1316	158	4	hudec	hudec	PROPN
ap-1316	158	5	,	,	PUNCT
ap-1316	158	6	r.	r.	PROPN
ap-1316	158	7	,	,	PUNCT
ap-1316	158	8	pína	pína	PROPN
ap-1316	158	9	,	,	PUNCT
ap-1316	158	10	l.	l.	PROPN
ap-1316	158	11	,	,	PUNCT
ap-1316	158	12	inneman	inneman	NOUN
ap-1316	158	13	,	,	PUNCT
ap-1316	158	14	a.	a.	NOUN
ap-1316	158	15	:	:	PUNCT
ap-1316	158	16	spie	spie	ADJ
ap-1316	158	17	,	,	PUNCT
ap-1316	158	18	1999	1999	NUM
ap-1316	158	19	,	,	PUNCT
ap-1316	158	20	3	3	NUM
ap-1316	158	21	766	766	NUM
ap-1316	158	22	,	,	PUNCT
ap-1316	158	23	62	62	NUM
ap-1316	158	24	.	.	PUNCT
ap-1316	159	1	[	[	X
ap-1316	159	2	3	3	NUM
ap-1316	159	3	]	]	X
ap-1316	159	4	hudec	hudec	PROPN
ap-1316	159	5	,	,	PUNCT
ap-1316	159	6	r.	r.	PROPN
ap-1316	159	7	,	,	PUNCT
ap-1316	159	8	pína	pína	PROPN
ap-1316	159	9	,	,	PUNCT
ap-1316	159	10	l.	l.	PROPN
ap-1316	159	11	,	,	PUNCT
ap-1316	159	12	inneman	inneman	NOUN
ap-1316	159	13	,	,	PUNCT
ap-1316	159	14	a.	a.	NOUN
ap-1316	159	15	:	:	PUNCT
ap-1316	159	16	spie	spie	ADJ
ap-1316	159	17	,	,	PUNCT
ap-1316	159	18	2000	2000	NUM
ap-1316	159	19	,	,	PUNCT
ap-1316	159	20	4	4	NUM
ap-1316	159	21	012	012	NUM
ap-1316	159	22	,	,	PUNCT
ap-1316	159	23	422	422	NUM
ap-1316	159	24	.	.	PUNCT
ap-1316	160	1	[	[	X
ap-1316	160	2	4	4	NUM
ap-1316	160	3	]	]	X
ap-1316	160	4	hudec	hudec	PROPN
ap-1316	160	5	,	,	PUNCT
ap-1316	160	6	r.	r.	PROPN
ap-1316	160	7	,	,	PUNCT
ap-1316	160	8	inneman	inneman	NOUN
ap-1316	160	9	,	,	PUNCT
ap-1316	160	10	a.	a.	NOUN
ap-1316	160	11	,	,	PUNCT
ap-1316	160	12	pína	pína	PROPN
ap-1316	160	13	,	,	PUNCT
ap-1316	160	14	l.	l.	PROPN
ap-1316	160	15	:	:	PUNCT
ap-1316	160	16	lobster	lobster	NOUN
ap-1316	160	17	-	-	PUNCT
ap-1316	160	18	eye	eye	NOUN
ap-1316	160	19	:	:	PUNCT
ap-1316	160	20	novel	novel	NOUN
ap-1316	160	21	x	x	NOUN
ap-1316	160	22	-	-	NOUN
ap-1316	160	23	ray	ray	NOUN
ap-1316	160	24	telescopes	telescope	NOUN
ap-1316	160	25	for	for	ADP
ap-1316	160	26	the	the	DET
ap-1316	160	27	21st	21st	ADJ
ap-1316	160	28	century	century	NOUN
ap-1316	160	29	,	,	PUNCT
ap-1316	160	30	new	new	ADJ
ap-1316	160	31	century	century	NOUN
ap-1316	160	32	of	of	ADP
ap-1316	160	33	x	x	NOUN
ap-1316	160	34	-	-	NOUN
ap-1316	160	35	ray	ray	NOUN
ap-1316	160	36	astronomy	astronomy	NOUN
ap-1316	160	37	,	,	PUNCT
ap-1316	160	38	asp	asp	PROPN
ap-1316	160	39	conf	conf	NOUN
ap-1316	160	40	.	.	PUNCT
ap-1316	161	1	proc	proc	PROPN
ap-1316	161	2	.	.	PROPN
ap-1316	161	3	,	,	PUNCT
ap-1316	161	4	2001	2001	NUM
ap-1316	161	5	,	,	PUNCT
ap-1316	161	6	251	251	NUM
ap-1316	161	7	,	,	PUNCT
ap-1316	161	8	542	542	NUM
ap-1316	161	9	.	.	PUNCT
ap-1316	162	1	[	[	X
ap-1316	162	2	5	5	NUM
ap-1316	162	3	]	]	PUNCT
ap-1316	162	4	hudec	hudec	PROPN
ap-1316	162	5	,	,	PUNCT
ap-1316	162	6	r.	r.	PROPN
ap-1316	162	7	,	,	PUNCT
ap-1316	162	8	pína	pína	PROPN
ap-1316	162	9	,	,	PUNCT
ap-1316	162	10	l.	l.	PROPN
ap-1316	162	11	,	,	PUNCT
ap-1316	162	12	inneman	inneman	NOUN
ap-1316	162	13	,	,	PUNCT
ap-1316	162	14	a.	a.	PROPN
ap-1316	162	15	,	,	PUNCT
ap-1316	162	16	et	et	PROPN
ap-1316	162	17	al	al	PROPN
ap-1316	162	18	.	.	PROPN
ap-1316	162	19	:	:	PUNCT
ap-1316	163	1	spie	spie	ADJ
ap-1316	163	2	,	,	PUNCT
ap-1316	163	3	2005	2005	NUM
ap-1316	163	4	,	,	PUNCT
ap-1316	163	5	5	5	NUM
ap-1316	163	6	900	900	NUM
ap-1316	163	7	,	,	PUNCT
ap-1316	163	8	276	276	NUM
ap-1316	163	9	.	.	PUNCT
ap-1316	164	1	[	[	X
ap-1316	164	2	6	6	NUM
ap-1316	164	3	]	]	PUNCT
ap-1316	164	4	inneman	inneman	NOUN
ap-1316	164	5	,	,	PUNCT
ap-1316	164	6	a.	a.	NOUN
ap-1316	164	7	,	,	PUNCT
ap-1316	164	8	hudec	hudec	PROPN
ap-1316	164	9	,	,	PUNCT
ap-1316	164	10	r.	r.	PROPN
ap-1316	164	11	,	,	PUNCT
ap-1316	164	12	pína	pína	PROPN
ap-1316	164	13	,	,	PUNCT
ap-1316	164	14	l.	l.	PROPN
ap-1316	164	15	,	,	PUNCT
ap-1316	164	16	gorenstein	gorenstein	NOUN
ap-1316	164	17	,	,	PUNCT
ap-1316	164	18	p.	p.	NOUN
ap-1316	164	19	:	:	PUNCT
ap-1316	164	20	spie	spie	ADJ
ap-1316	164	21	,	,	PUNCT
ap-1316	164	22	1999	1999	NUM
ap-1316	164	23	,	,	PUNCT
ap-1316	164	24	3	3	NUM
ap-1316	164	25	766	766	NUM
ap-1316	164	26	,	,	PUNCT
ap-1316	164	27	72	72	NUM
ap-1316	164	28	.	.	PUNCT
ap-1316	165	1	[	[	X
ap-1316	165	2	7	7	NUM
ap-1316	165	3	]	]	PUNCT
ap-1316	165	4	inneman	inneman	NOUN
ap-1316	165	5	,	,	PUNCT
ap-1316	165	6	a.	a.	NOUN
ap-1316	165	7	,	,	PUNCT
ap-1316	165	8	hudec	hudec	PROPN
ap-1316	165	9	,	,	PUNCT
ap-1316	165	10	r.	r.	PROPN
ap-1316	165	11	,	,	PUNCT
ap-1316	165	12	pína	pína	PROPN
ap-1316	165	13	,	,	PUNCT
ap-1316	165	14	l.	l.	PROPN
ap-1316	165	15	:	:	PUNCT
ap-1316	165	16	spie	spie	PROPN
ap-1316	165	17	,	,	PUNCT
ap-1316	165	18	2000	2000	NUM
ap-1316	165	19	,	,	PUNCT
ap-1316	165	20	4	4	NUM
ap-1316	165	21	138	138	NUM
ap-1316	165	22	,	,	PUNCT
ap-1316	165	23	94	94	NUM
ap-1316	165	24	.	.	PUNCT
ap-1316	166	1	[	[	X
ap-1316	166	2	8	8	NUM
ap-1316	166	3	]	]	PUNCT
ap-1316	166	4	kirkpatrick	kirkpatrick	PROPN
ap-1316	166	5	,	,	PUNCT
ap-1316	166	6	p.	p.	PROPN
ap-1316	166	7	,	,	PUNCT
ap-1316	166	8	baez	baez	PROPN
ap-1316	166	9	,	,	PUNCT
ap-1316	166	10	a.	a.	NOUN
ap-1316	166	11	v.	v.	PROPN
ap-1316	166	12	:	:	PUNCT
ap-1316	166	13	j.	j.	PROPN
ap-1316	166	14	opt	opt	PROPN
ap-1316	166	15	.	.	PUNCT
ap-1316	167	1	soc	soc	PROPN
ap-1316	167	2	.	.	PUNCT
ap-1316	168	1	am	be	AUX
ap-1316	168	2	.	.	PUNCT
ap-1316	169	1	38	38	NUM
ap-1316	169	2	,	,	PUNCT
ap-1316	169	3	766	766	NUM
ap-1316	169	4	(	(	PUNCT
ap-1316	169	5	1948	1948	NUM
ap-1316	169	6	)	)	PUNCT
ap-1316	169	7	.	.	PUNCT
ap-1316	170	1	[	[	X
ap-1316	170	2	9	9	NUM
ap-1316	170	3	]	]	X
ap-1316	170	4	marsch	marsch	PROPN
ap-1316	170	5	,	,	PUNCT
ap-1316	170	6	h.	h.	PROPN
ap-1316	170	7	,	,	PUNCT
ap-1316	170	8	et	et	PROPN
ap-1316	170	9	al	al	PROPN
ap-1316	170	10	.	.	PUNCT
ap-1316	170	11	:	:	PUNCT
ap-1316	170	12	introduction	introduction	NOUN
ap-1316	170	13	to	to	ADP
ap-1316	170	14	carbon	carbon	NOUN
ap-1316	170	15	technologies	technology	NOUN
ap-1316	170	16	,	,	PUNCT
ap-1316	170	17	university	university	PROPN
ap-1316	170	18	of	of	ADP
ap-1316	170	19	alicante	alicante	PROPN
ap-1316	170	20	,	,	PUNCT
ap-1316	170	21	1997	1997	NUM
ap-1316	170	22	.	.	PUNCT
ap-1316	171	1	[	[	X
ap-1316	171	2	10	10	NUM
ap-1316	171	3	]	]	X
ap-1316	171	4	white	white	ADJ
ap-1316	171	5	,	,	PUNCT
ap-1316	171	6	n.	n.	PROPN
ap-1316	171	7	e.	e.	PROPN
ap-1316	171	8	,	,	PUNCT
ap-1316	171	9	hornschemeier	hornschemeier	NOUN
ap-1316	171	10	,	,	PUNCT
ap-1316	171	11	a.	a.	PROPN
ap-1316	171	12	e.	e.	PROPN
ap-1316	171	13	:	:	PUNCT
ap-1316	171	14	bulletin	bulletin	NOUN
ap-1316	171	15	of	of	ADP
ap-1316	171	16	the	the	DET
ap-1316	171	17	american	american	ADJ
ap-1316	171	18	astronomical	astronomical	ADJ
ap-1316	171	19	society	society	NOUN
ap-1316	171	20	,	,	PUNCT
ap-1316	171	21	2009	2009	NUM
ap-1316	171	22	,	,	PUNCT
ap-1316	171	23	vol	vol	NOUN
ap-1316	171	24	.	.	PROPN
ap-1316	171	25	41	41	NUM
ap-1316	171	26	,	,	PUNCT
ap-1316	171	27	p.	p.	NOUN
ap-1316	171	28	388	388	NUM
ap-1316	171	29	.	.	PUNCT
ap-1316	172	1	[	[	X
ap-1316	172	2	11	11	NUM
ap-1316	172	3	]	]	X
ap-1316	172	4	white	white	ADJ
ap-1316	172	5	,	,	PUNCT
ap-1316	172	6	n.	n.	PROPN
ap-1316	172	7	e.	e.	PROPN
ap-1316	172	8	,	,	PUNCT
ap-1316	172	9	parmar	parmar	PROPN
ap-1316	172	10	,	,	PUNCT
ap-1316	172	11	a.	a.	PROPN
ap-1316	172	12	,	,	PUNCT
ap-1316	172	13	kunieda	kunieda	PROPN
ap-1316	172	14	,	,	PUNCT
ap-1316	172	15	h.	h.	PROPN
ap-1316	172	16	,	,	PUNCT
ap-1316	172	17	international	international	ADJ
ap-1316	172	18	x	x	ADJ
ap-1316	172	19	-	-	NOUN
ap-1316	172	20	ray	ray	NOUN
ap-1316	172	21	observatory	observatory	ADJ
ap-1316	172	22	team	team	NOUN
ap-1316	172	23	,	,	PUNCT
ap-1316	172	24	2009	2009	NUM
ap-1316	172	25	,	,	PUNCT
ap-1316	172	26	bulletin	bulletin	NOUN
ap-1316	172	27	of	of	ADP
ap-1316	172	28	the	the	DET
ap-1316	172	29	american	american	ADJ
ap-1316	172	30	astronomical	astronomical	ADJ
ap-1316	172	31	society	society	NOUN
ap-1316	172	32	,	,	PUNCT
ap-1316	172	33	vol	vol	NOUN
ap-1316	172	34	.	.	PROPN
ap-1316	172	35	41	41	NUM
ap-1316	172	36	,	,	PUNCT
ap-1316	172	37	p.	p.	NOUN
ap-1316	172	38	357	357	NUM
ap-1316	172	39	.	.	PUNCT
ap-1316	173	1	[	[	X
ap-1316	173	2	12	12	NUM
ap-1316	173	3	]	]	X
ap-1316	173	4	http://ixo.gsfc.nasa.gov	http://ixo.gsfc.nasa.gov	PROPN
ap-1316	173	5	[	[	PUNCT
ap-1316	173	6	13	13	NUM
ap-1316	173	7	]	]	X
ap-1316	173	8	bavdaz	bavdaz	NOUN
ap-1316	173	9	,	,	PUNCT
ap-1316	173	10	m.	m.	NOUN
ap-1316	173	11	,	,	PUNCT
ap-1316	173	12	et	et	PROPN
ap-1316	173	13	al	al	PROPN
ap-1316	173	14	.	.	PUNCT
ap-1316	173	15	:	:	PUNCT
ap-1316	174	1	proceedings	proceeding	NOUN
ap-1316	174	2	of	of	ADP
ap-1316	174	3	the	the	DET
ap-1316	174	4	spie	spie	NOUN
ap-1316	174	5	,	,	PUNCT
ap-1316	174	6	2010	2010	NUM
ap-1316	174	7	,	,	PUNCT
ap-1316	174	8	vol	vol	NOUN
ap-1316	174	9	.	.	PROPN
ap-1316	174	10	7	7	NUM
ap-1316	174	11	732	732	NUM
ap-1316	174	12	,	,	PUNCT
ap-1316	174	13	pp	pp	ADV
ap-1316	174	14	.	.	PUNCT
ap-1316	175	1	77321e-77321e-9	77321e-77321e-9	NOUN
ap-1316	175	2	.	.	PUNCT
ap-1316	176	1	[	[	X
ap-1316	176	2	14	14	NUM
ap-1316	176	3	]	]	X
ap-1316	176	4	zhang	zhang	PROPN
ap-1316	176	5	,	,	PUNCT
ap-1316	176	6	w.	w.	PROPN
ap-1316	176	7	w.	w.	PROPN
ap-1316	176	8	,	,	PUNCT
ap-1316	176	9	et	et	PROPN
ap-1316	176	10	al	al	PROPN
ap-1316	176	11	.	.	PUNCT
ap-1316	176	12	:	:	PUNCT
ap-1316	176	13	proceedings	proceeding	NOUN
ap-1316	176	14	of	of	ADP
ap-1316	176	15	the	the	DET
ap-1316	176	16	spie	spie	NOUN
ap-1316	176	17	,	,	PUNCT
ap-1316	176	18	2010	2010	NUM
ap-1316	176	19	,	,	PUNCT
ap-1316	176	20	vol	vol	NOUN
ap-1316	176	21	.	.	PROPN
ap-1316	176	22	7	7	NUM
ap-1316	176	23	732	732	NUM
ap-1316	176	24	,	,	PUNCT
ap-1316	176	25	pp	pp	ADV
ap-1316	176	26	.	.	PUNCT
ap-1316	177	1	77321g-77321g-8	77321g-77321g-8	X
ap-1316	177	2	.	.	PUNCT
ap-1316	178	1	[	[	X
ap-1316	178	2	15	15	NUM
ap-1316	178	3	]	]	X
ap-1316	178	4	ghigo	ghigo	ADJ
ap-1316	178	5	,	,	PUNCT
ap-1316	178	6	m.	m.	NOUN
ap-1316	178	7	,	,	PUNCT
ap-1316	178	8	et	et	PROPN
ap-1316	178	9	al	al	PROPN
ap-1316	178	10	.	.	PUNCT
ap-1316	178	11	:	:	PUNCT
ap-1316	178	12	proceedings	proceeding	NOUN
ap-1316	178	13	of	of	ADP
ap-1316	178	14	the	the	DET
ap-1316	178	15	spie	spie	NOUN
ap-1316	178	16	,	,	PUNCT
ap-1316	178	17	2010	2010	NUM
ap-1316	178	18	,	,	PUNCT
ap-1316	178	19	vol	vol	NOUN
ap-1316	178	20	.	.	PROPN
ap-1316	178	21	7	7	NUM
ap-1316	178	22	732	732	NUM
ap-1316	178	23	,	,	PUNCT
ap-1316	178	24	pp	pp	ADJ
ap-1316	178	25	.	.	PUNCT
ap-1316	179	1	77320c-77320c-12	77320c-77320c-12	NOUN
ap-1316	179	2	.	.	PUNCT
ap-1316	180	1	rené	rené	AUX
ap-1316	180	2	hudec	hudec	NOUN
ap-1316	180	3	e	e	NOUN
ap-1316	180	4	-	-	NOUN
ap-1316	180	5	mail	mail	NOUN
ap-1316	180	6	:	:	PUNCT
ap-1316	180	7	r.hudec@asu.cas.cz	r.hudec@asu.cas.cz	ADP
ap-1316	180	8	astronomical	astronomical	PROPN
ap-1316	180	9	institute	institute	PROPN
ap-1316	180	10	academy	academy	PROPN
ap-1316	180	11	of	of	ADP
ap-1316	180	12	sciences	sciences	PROPN
ap-1316	180	13	of	of	ADP
ap-1316	180	14	the	the	DET
ap-1316	180	15	czech	czech	PROPN
ap-1316	180	16	republic	republic	NOUN
ap-1316	180	17	cz-25165	cz-25165	PROPN
ap-1316	180	18	ondřejov	ondřejov	PROPN
ap-1316	180	19	,	,	PUNCT
ap-1316	180	20	czech	czech	PROPN
ap-1316	180	21	republic	republic	NOUN
ap-1316	180	22	czech	czech	PROPN
ap-1316	180	23	technical	technical	PROPN
ap-1316	180	24	university	university	PROPN
ap-1316	180	25	in	in	ADP
ap-1316	180	26	prague	prague	PROPN
ap-1316	180	27	faculty	faculty	NOUN
ap-1316	180	28	of	of	ADP
ap-1316	180	29	electrical	electrical	ADJ
ap-1316	180	30	engineering	engineering	NOUN
ap-1316	180	31	technická	technická	NOUN
ap-1316	180	32	2	2	NUM
ap-1316	180	33	,	,	PUNCT
ap-1316	180	34	cz-166	cz-166	VERB
ap-1316	180	35	27	27	NUM
ap-1316	180	36	prague	prague	NOUN
ap-1316	180	37	,	,	PUNCT
ap-1316	180	38	czech	czech	PROPN
ap-1316	180	39	republic	republic	NOUN
ap-1316	180	40	ladislav	ladislav	PROPN
ap-1316	180	41	ṕına	ṕına	PROPN
ap-1316	180	42	czech	czech	PROPN
ap-1316	180	43	technical	technical	PROPN
ap-1316	180	44	university	university	PROPN
ap-1316	180	45	in	in	ADP
ap-1316	180	46	prague	prague	PROPN
ap-1316	180	47	faculty	faculty	NOUN
ap-1316	180	48	of	of	ADP
ap-1316	180	49	nuclear	nuclear	ADJ
ap-1316	180	50	engineering	engineering	NOUN
ap-1316	180	51	břehová	břehová	NOUN
ap-1316	181	1	78/7	78/7	NUM
ap-1316	181	2	,	,	PUNCT
ap-1316	181	3	cz-110	cz-110	PROPN
ap-1316	181	4	00	00	NUM
ap-1316	181	5	prague	prague	PROPN
ap-1316	181	6	,	,	PUNCT
ap-1316	181	7	czech	czech	PROPN
ap-1316	181	8	republic	republic	NOUN
ap-1316	181	9	veronika	veronika	PROPN
ap-1316	181	10	marš́ıková	marš́ıková	PROPN
ap-1316	181	11	adolf	adolf	PROPN
ap-1316	181	12	inneman	inneman	PROPN
ap-1316	181	13	rigaku	rigaku	PROPN
ap-1316	181	14	innovative	innovative	PROPN
ap-1316	181	15	technologies	technology	NOUN
ap-1316	181	16	europe	europe	PROPN
ap-1316	181	17	,	,	PUNCT
ap-1316	181	18	s.	s.	PROPN
ap-1316	181	19	r.	r.	PROPN
ap-1316	181	20	o.	o.	PROPN
ap-1316	181	21	novodvorská	novodvorská	PROPN
ap-1316	181	22	994	994	NUM
ap-1316	181	23	,	,	PUNCT
ap-1316	181	24	cz-142	cz-142	PROPN
ap-1316	181	25	21	21	NUM
ap-1316	181	26	prague	prague	PROPN
ap-1316	181	27	4	4	NUM
ap-1316	181	28	,	,	PUNCT
ap-1316	182	1	czech	czech	PROPN
ap-1316	182	2	republic	republic	PROPN
ap-1316	182	3	michaela	michaela	PROPN
ap-1316	182	4	skulinová	skulinová	PROPN
ap-1316	182	5	astronomical	astronomical	PROPN
ap-1316	182	6	institute	institute	PROPN
ap-1316	182	7	academy	academy	PROPN
ap-1316	182	8	of	of	ADP
ap-1316	182	9	sciences	sciences	PROPN
ap-1316	182	10	of	of	ADP
ap-1316	182	11	the	the	DET
ap-1316	182	12	czech	czech	PROPN
ap-1316	182	13	republic	republic	NOUN
ap-1316	182	14	cz-251	cz-251	PROPN
ap-1316	182	15	65	65	NUM
ap-1316	182	16	ondřejov	ondřejov	NOUN
ap-1316	182	17	,	,	PUNCT
ap-1316	182	18	czech	czech	PROPN
ap-1316	182	19	republic	republic	NOUN
ap-1316	182	20	martin	martin	PROPN
ap-1316	182	21	mı́ka	mı́ka	PROPN
ap-1316	182	22	institute	institute	PROPN
ap-1316	182	23	of	of	ADP
ap-1316	182	24	chemical	chemical	PROPN
ap-1316	182	25	technology	technology	PROPN
ap-1316	182	26	technická	technická	NOUN
ap-1316	182	27	5	5	NUM
ap-1316	182	28	,	,	PUNCT
ap-1316	182	29	cz-166	cz-166	NOUN
ap-1316	182	30	28	28	NUM
ap-1316	182	31	prague	prague	PROPN
ap-1316	182	32	,	,	PUNCT
ap-1316	182	33	czech	czech	PROPN
ap-1316	182	34	republic	republic	NOUN
ap-1316	182	35	51	51	NUM