id	sid	tid	token	lemma	pos
ap-1470	1	1	ap-6-11.dvi	ap-6-11.dvi	PROPN
ap-1470	1	2	acta	acta	PROPN
ap-1470	1	3	polytechnica	polytechnica	PROPN
ap-1470	1	4	vol	vol	NOUN
ap-1470	1	5	.	.	PUNCT
ap-1470	2	1	51	51	NUM
ap-1470	2	2	no	no	INTJ
ap-1470	2	3	.	.	PUNCT
ap-1470	3	1	6/2011	6/2011	NUM
ap-1470	3	2	czech	czech	ADJ
ap-1470	3	3	contribution	contribution	NOUN
ap-1470	3	4	to	to	ADP
ap-1470	3	5	athena	athena	PROPN
ap-1470	3	6	r.	r.	PROPN
ap-1470	3	7	hudec	hudec	PROPN
ap-1470	3	8	,	,	PUNCT
ap-1470	3	9	l.	l.	PROPN
ap-1470	3	10	ṕına	ṕına	PROPN
ap-1470	3	11	,	,	PUNCT
ap-1470	3	12	v.	v.	ADP
ap-1470	3	13	marš́ıková	marš́ıková	PROPN
ap-1470	3	14	,	,	PUNCT
ap-1470	3	15	a.	a.	NOUN
ap-1470	3	16	inneman	inneman	NOUN
ap-1470	3	17	,	,	PUNCT
ap-1470	3	18	m.	m.	NOUN
ap-1470	3	19	skulinová	skulinová	NOUN
ap-1470	3	20	,	,	PUNCT
ap-1470	3	21	m.	m.	NOUN
ap-1470	3	22	mı́ka	mı́ka	ADJ
ap-1470	3	23	abstract	abstract	NOUN
ap-1470	3	24	we	we	PRON
ap-1470	3	25	describe	describe	VERB
ap-1470	3	26	the	the	DET
ap-1470	3	27	recent	recent	ADJ
ap-1470	3	28	status	status	NOUN
ap-1470	3	29	of	of	ADP
ap-1470	3	30	the	the	DET
ap-1470	3	31	czech	czech	PROPN
ap-1470	3	32	contribution	contribution	NOUN
ap-1470	3	33	to	to	ADP
ap-1470	3	34	the	the	DET
ap-1470	3	35	esa	esa	PROPN
ap-1470	3	36	athena	athena	PROPN
ap-1470	3	37	space	space	NOUN
ap-1470	3	38	mission	mission	NOUN
ap-1470	3	39	,	,	PUNCT
ap-1470	3	40	with	with	ADP
ap-1470	3	41	emphasis	emphasis	NOUN
ap-1470	3	42	on	on	ADP
ap-1470	3	43	the	the	DET
ap-1470	3	44	development	development	NOUN
ap-1470	3	45	of	of	ADP
ap-1470	3	46	new	new	ADJ
ap-1470	3	47	technologies	technology	NOUN
ap-1470	3	48	and	and	CCONJ
ap-1470	3	49	test	test	NOUN
ap-1470	3	50	samples	sample	NOUN
ap-1470	3	51	of	of	ADP
ap-1470	3	52	x	x	NOUN
ap-1470	3	53	-	-	NOUN
ap-1470	3	54	ray	ray	NOUN
ap-1470	3	55	mirrors	mirror	NOUN
ap-1470	3	56	with	with	ADP
ap-1470	3	57	precise	precise	ADJ
ap-1470	3	58	surfaces	surface	NOUN
ap-1470	3	59	,	,	PUNCT
ap-1470	3	60	based	base	VERB
ap-1470	3	61	on	on	ADP
ap-1470	3	62	new	new	ADJ
ap-1470	3	63	materials	material	NOUN
ap-1470	3	64	,	,	PUNCT
ap-1470	3	65	and	and	CCONJ
ap-1470	3	66	their	their	PRON
ap-1470	3	67	applications	application	NOUN
ap-1470	3	68	in	in	ADP
ap-1470	3	69	space	space	NOUN
ap-1470	3	70	.	.	PUNCT
ap-1470	4	1	in	in	ADP
ap-1470	4	2	addition	addition	NOUN
ap-1470	4	3	,	,	PUNCT
ap-1470	4	4	alternative	alternative	ADJ
ap-1470	4	5	x	x	NOUN
ap-1470	4	6	-	-	NOUN
ap-1470	4	7	ray	ray	ADJ
ap-1470	4	8	optical	optical	ADJ
ap-1470	4	9	arrangements	arrangement	NOUN
ap-1470	4	10	are	be	AUX
ap-1470	4	11	investigated	investigate	VERB
ap-1470	4	12	,	,	PUNCT
ap-1470	4	13	such	such	ADJ
ap-1470	4	14	as	as	ADP
ap-1470	4	15	kirkpatrick	kirkpatrick	NOUN
ap-1470	4	16	-	-	PUNCT
ap-1470	4	17	baez	baez	PROPN
ap-1470	4	18	systems	system	NOUN
ap-1470	4	19	.	.	PUNCT
ap-1470	5	1	1	1	NUM
ap-1470	5	2	introduction	introduction	NOUN
ap-1470	5	3	design	design	NOUN
ap-1470	5	4	and	and	CCONJ
ap-1470	5	5	development	development	NOUN
ap-1470	5	6	of	of	ADP
ap-1470	5	7	x	x	NOUN
ap-1470	5	8	-	-	NOUN
ap-1470	5	9	ray	ray	NOUN
ap-1470	5	10	optics	optic	NOUN
ap-1470	5	11	have	have	VERB
ap-1470	5	12	a	a	DET
ap-1470	5	13	long	long	ADJ
ap-1470	5	14	tradition	tradition	NOUN
ap-1470	5	15	in	in	ADP
ap-1470	5	16	the	the	DET
ap-1470	5	17	czech	czech	PROPN
ap-1470	5	18	republic	republic	NOUN
ap-1470	5	19	(	(	PUNCT
ap-1470	5	20	e.g.	e.g.	ADV
ap-1470	5	21	hudec	hudec	VERB
ap-1470	5	22	et	et	PROPN
ap-1470	5	23	al	al	PROPN
ap-1470	5	24	.	.	PROPN
ap-1470	5	25	,	,	PUNCT
ap-1470	5	26	1991	1991	NUM
ap-1470	5	27	,	,	PUNCT
ap-1470	5	28	1999	1999	NUM
ap-1470	5	29	,	,	PUNCT
ap-1470	5	30	2000	2000	NUM
ap-1470	5	31	,	,	PUNCT
ap-1470	5	32	2001	2001	NUM
ap-1470	5	33	,	,	PUNCT
ap-1470	5	34	inneman	inneman	NOUN
ap-1470	5	35	et	et	PROPN
ap-1470	5	36	al	al	PROPN
ap-1470	5	37	.	.	PROPN
ap-1470	5	38	1999	1999	NUM
ap-1470	5	39	,	,	PUNCT
ap-1470	5	40	2000	2000	NUM
ap-1470	5	41	)	)	PUNCT
ap-1470	5	42	.	.	PUNCT
ap-1470	6	1	a	a	DET
ap-1470	6	2	range	range	NOUN
ap-1470	6	3	of	of	ADP
ap-1470	6	4	related	relate	VERB
ap-1470	6	5	technologies	technology	NOUN
ap-1470	6	6	have	have	AUX
ap-1470	6	7	been	be	AUX
ap-1470	6	8	exploited	exploit	VERB
ap-1470	6	9	and	and	CCONJ
ap-1470	6	10	investigated	investigate	VERB
ap-1470	6	11	,	,	PUNCT
ap-1470	6	12	including	include	VERB
ap-1470	6	13	technologies	technology	NOUN
ap-1470	6	14	for	for	ADP
ap-1470	6	15	future	future	ADJ
ap-1470	6	16	large	large	ADJ
ap-1470	6	17	light	light	ADJ
ap-1470	6	18	-	-	PUNCT
ap-1470	6	19	weight	weight	NOUN
ap-1470	6	20	x	x	NOUN
ap-1470	6	21	-	-	NOUN
ap-1470	6	22	ray	ray	NOUN
ap-1470	6	23	telescopes	telescope	NOUN
ap-1470	6	24	.	.	PUNCT
ap-1470	7	1	future	future	ADJ
ap-1470	7	2	large	large	ADJ
ap-1470	7	3	space	space	NOUN
ap-1470	7	4	x	x	NOUN
ap-1470	7	5	-	-	NOUN
ap-1470	7	6	ray	ray	NOUN
ap-1470	7	7	telescopes	telescope	NOUN
ap-1470	7	8	(	(	PUNCT
ap-1470	7	9	such	such	ADJ
ap-1470	7	10	as	as	ADP
ap-1470	7	11	athena	athena	NOUN
ap-1470	7	12	,	,	PUNCT
ap-1470	7	13	considered	consider	VERB
ap-1470	7	14	by	by	ADP
ap-1470	7	15	esa	esa	PROPN
ap-1470	7	16	[	[	X
ap-1470	7	17	16	16	NUM
ap-1470	7	18	]	]	PUNCT
ap-1470	7	19	)	)	PUNCT
ap-1470	7	20	require	require	VERB
ap-1470	7	21	precise	precise	ADJ
ap-1470	7	22	lightweight	lightweight	NOUN
ap-1470	7	23	x	x	NOUN
ap-1470	7	24	-	-	NOUN
ap-1470	7	25	ray	ray	NOUN
ap-1470	7	26	optics	optic	NOUN
ap-1470	7	27	based	base	VERB
ap-1470	7	28	on	on	ADP
ap-1470	7	29	numerous	numerous	ADJ
ap-1470	7	30	thin	thin	ADJ
ap-1470	7	31	reflecting	reflect	VERB
ap-1470	7	32	shells	shell	NOUN
ap-1470	7	33	.	.	PUNCT
ap-1470	8	1	novel	novel	ADJ
ap-1470	8	2	approaches	approach	NOUN
ap-1470	8	3	and	and	CCONJ
ap-1470	8	4	advanced	advanced	ADJ
ap-1470	8	5	technologies	technology	NOUN
ap-1470	8	6	need	need	VERB
ap-1470	8	7	to	to	PART
ap-1470	8	8	be	be	AUX
ap-1470	8	9	developed	develop	VERB
ap-1470	8	10	and	and	CCONJ
ap-1470	8	11	exploited	exploit	VERB
ap-1470	8	12	.	.	PUNCT
ap-1470	9	1	in	in	ADP
ap-1470	9	2	this	this	DET
ap-1470	9	3	paper	paper	NOUN
ap-1470	9	4	,	,	PUNCT
ap-1470	9	5	we	we	PRON
ap-1470	9	6	refer	refer	VERB
ap-1470	9	7	to	to	ADP
ap-1470	9	8	czech	czech	ADJ
ap-1470	9	9	efforts	effort	NOUN
ap-1470	9	10	in	in	ADP
ap-1470	9	11	connection	connection	NOUN
ap-1470	9	12	with	with	ADP
ap-1470	9	13	athena	athena	NOUN
ap-1470	9	14	,	,	PUNCT
ap-1470	9	15	focusing	focus	VERB
ap-1470	9	16	on	on	ADP
ap-1470	9	17	the	the	DET
ap-1470	9	18	results	result	NOUN
ap-1470	9	19	of	of	ADP
ap-1470	9	20	test	test	NOUN
ap-1470	9	21	x	x	NOUN
ap-1470	9	22	-	-	NOUN
ap-1470	9	23	ray	ray	NOUN
ap-1470	9	24	mirror	mirror	NOUN
ap-1470	9	25	shells	shell	NOUN
ap-1470	9	26	produced	produce	VERB
ap-1470	9	27	by	by	ADP
ap-1470	9	28	glass	glass	NOUN
ap-1470	9	29	thermal	thermal	ADJ
ap-1470	9	30	forming	form	VERB
ap-1470	9	31	(	(	PUNCT
ap-1470	9	32	gtf	gtf	NOUN
ap-1470	9	33	)	)	PUNCT
ap-1470	9	34	and	and	CCONJ
ap-1470	9	35	by	by	ADP
ap-1470	9	36	shaping	shape	VERB
ap-1470	9	37	si	si	NOUN
ap-1470	9	38	wafers	wafer	NOUN
ap-1470	9	39	.	.	PUNCT
ap-1470	10	1	both	both	DET
ap-1470	10	2	glass	glass	NOUN
ap-1470	10	3	foils	foil	NOUN
ap-1470	10	4	and	and	CCONJ
ap-1470	10	5	si	si	NOUN
ap-1470	10	6	wafers	wafer	NOUN
ap-1470	10	7	are	be	AUX
ap-1470	10	8	commercially	commercially	ADV
ap-1470	10	9	available	available	ADJ
ap-1470	10	10	,	,	PUNCT
ap-1470	10	11	have	have	AUX
ap-1470	10	12	excellent	excellent	ADJ
ap-1470	10	13	surface	surface	NOUN
ap-1470	10	14	microroughness	microroughness	NOUN
ap-1470	10	15	of	of	ADP
ap-1470	10	16	a	a	DET
ap-1470	10	17	few	few	ADJ
ap-1470	10	18	0.1	0.1	NUM
ap-1470	10	19	nm	nm	NOUN
ap-1470	10	20	,	,	PUNCT
ap-1470	10	21	and	and	CCONJ
ap-1470	10	22	low	low	ADJ
ap-1470	10	23	weight	weight	NOUN
ap-1470	10	24	(	(	PUNCT
ap-1470	10	25	the	the	DET
ap-1470	10	26	volume	volume	NOUN
ap-1470	10	27	density	density	NOUN
ap-1470	10	28	is	be	AUX
ap-1470	10	29	2.5	2.5	NUM
ap-1470	10	30	g	g	NOUN
ap-1470	10	31	·	·	PUNCT
ap-1470	10	32	cm−3	cm−3	PROPN
ap-1470	10	33	for	for	ADP
ap-1470	10	34	glass	glass	NOUN
ap-1470	10	35	and	and	CCONJ
ap-1470	10	36	2.3	2.3	NUM
ap-1470	10	37	g	g	NOUN
ap-1470	10	38	·	·	PUNCT
ap-1470	10	39	cm−3	cm−3	PROPN
ap-1470	10	40	for	for	ADP
ap-1470	10	41	si	si	NOUN
ap-1470	10	42	)	)	PUNCT
ap-1470	10	43	.	.	PUNCT
ap-1470	11	1	technologies	technology	NOUN
ap-1470	11	2	need	need	VERB
ap-1470	11	3	to	to	PART
ap-1470	11	4	be	be	AUX
ap-1470	11	5	exploited	exploit	VERB
ap-1470	11	6	for	for	ADP
ap-1470	11	7	shaping	shape	VERB
ap-1470	11	8	these	these	DET
ap-1470	11	9	substrates	substrate	NOUN
ap-1470	11	10	to	to	PART
ap-1470	11	11	achieve	achieve	VERB
ap-1470	11	12	the	the	DET
ap-1470	11	13	required	require	VERB
ap-1470	11	14	precise	precise	ADJ
ap-1470	11	15	x	x	ADJ
ap-1470	11	16	-	-	NOUN
ap-1470	11	17	ray	ray	NOUN
ap-1470	11	18	optic	optic	NOUN
ap-1470	11	19	geometries	geometry	NOUN
ap-1470	11	20	without	without	ADP
ap-1470	11	21	degrading	degrade	VERB
ap-1470	11	22	the	the	DET
ap-1470	11	23	fine	fine	ADJ
ap-1470	11	24	surface	surface	NOUN
ap-1470	11	25	microroughness	microroughness	NOUN
ap-1470	11	26	.	.	PUNCT
ap-1470	12	1	although	although	SCONJ
ap-1470	12	2	glass	glass	NOUN
ap-1470	12	3	and	and	CCONJ
ap-1470	12	4	,	,	PUNCT
ap-1470	12	5	more	more	ADV
ap-1470	12	6	recently	recently	ADV
ap-1470	12	7	,	,	PUNCT
ap-1470	12	8	silicon	silicon	NOUN
ap-1470	12	9	wafers	wafer	NOUN
ap-1470	12	10	have	have	AUX
ap-1470	12	11	been	be	AUX
ap-1470	12	12	considered	consider	VERB
ap-1470	12	13	the	the	DET
ap-1470	12	14	most	most	ADV
ap-1470	12	15	promising	promising	ADJ
ap-1470	12	16	materials	material	NOUN
ap-1470	12	17	for	for	ADP
ap-1470	12	18	future	future	ADJ
ap-1470	12	19	advanced	advanced	ADJ
ap-1470	12	20	large	large	ADJ
ap-1470	12	21	aperture	aperture	NOUN
ap-1470	12	22	x	x	NOUN
ap-1470	12	23	-	-	NOUN
ap-1470	12	24	ray	ray	NOUN
ap-1470	12	25	telescopes	telescope	NOUN
ap-1470	12	26	,	,	PUNCT
ap-1470	12	27	other	other	ADJ
ap-1470	12	28	alternative	alternative	ADJ
ap-1470	12	29	materials	material	NOUN
ap-1470	12	30	are	be	AUX
ap-1470	12	31	also	also	ADV
ap-1470	12	32	worth	worth	ADJ
ap-1470	12	33	further	further	ADJ
ap-1470	12	34	study	study	NOUN
ap-1470	12	35	,	,	PUNCT
ap-1470	12	36	such	such	ADJ
ap-1470	12	37	as	as	ADP
ap-1470	12	38	amorphous	amorphous	ADJ
ap-1470	12	39	metals	metal	NOUN
ap-1470	12	40	and	and	CCONJ
ap-1470	12	41	glassy	glassy	NOUN
ap-1470	12	42	carbon	carbon	NOUN
ap-1470	12	43	(	(	PUNCT
ap-1470	12	44	marsch	marsch	PROPN
ap-1470	12	45	et	et	PROPN
ap-1470	12	46	al	al	PROPN
ap-1470	12	47	.	.	PROPN
ap-1470	12	48	,	,	PUNCT
ap-1470	12	49	1997	1997	NUM
ap-1470	12	50	)	)	PUNCT
ap-1470	12	51	.	.	PUNCT
ap-1470	13	1	in	in	ADP
ap-1470	13	2	order	order	NOUN
ap-1470	13	3	to	to	PART
ap-1470	13	4	achieve	achieve	VERB
ap-1470	13	5	sub	sub	ADJ
ap-1470	13	6	-	-	ADJ
ap-1470	13	7	arsec	arsec	ADJ
ap-1470	13	8	angular	angular	ADJ
ap-1470	13	9	resolutions	resolution	NOUN
ap-1470	13	10	,	,	PUNCT
ap-1470	13	11	the	the	DET
ap-1470	13	12	principles	principle	NOUN
ap-1470	13	13	of	of	ADP
ap-1470	13	14	active	active	ADJ
ap-1470	13	15	optics	optic	NOUN
ap-1470	13	16	need	need	VERB
ap-1470	13	17	to	to	PART
ap-1470	13	18	be	be	AUX
ap-1470	13	19	adopted	adopt	VERB
ap-1470	13	20	.	.	PUNCT
ap-1470	14	1	the	the	DET
ap-1470	14	2	athena	athena	PROPN
ap-1470	14	3	x	x	PROPN
ap-1470	14	4	-	-	NOUN
ap-1470	14	5	ray	ray	NOUN
ap-1470	14	6	observatory	observatory	NOUN
ap-1470	14	7	is	be	AUX
ap-1470	14	8	a	a	DET
ap-1470	14	9	new	new	ADJ
ap-1470	14	10	x	x	ADJ
ap-1470	14	11	-	-	NOUN
ap-1470	14	12	ray	ray	NOUN
ap-1470	14	13	telescope	telescope	NOUN
ap-1470	14	14	of	of	ADP
ap-1470	14	15	the	the	DET
ap-1470	14	16	european	european	PROPN
ap-1470	14	17	space	space	PROPN
ap-1470	14	18	agency	agency	PROPN
ap-1470	14	19	(	(	PUNCT
ap-1470	14	20	esa	esa	PROPN
ap-1470	14	21	)	)	PUNCT
ap-1470	14	22	.	.	PUNCT
ap-1470	15	1	this	this	DET
ap-1470	15	2	project	project	NOUN
ap-1470	15	3	supersedes	supersede	VERB
ap-1470	15	4	ixo	ixo	NOUN
ap-1470	15	5	(	(	PUNCT
ap-1470	15	6	international	international	ADJ
ap-1470	15	7	x	x	ADJ
ap-1470	15	8	-	-	NOUN
ap-1470	15	9	ray	ray	NOUN
ap-1470	15	10	observatory	observatory	NOUN
ap-1470	15	11	)	)	PUNCT
ap-1470	15	12	as	as	ADV
ap-1470	15	13	well	well	ADV
ap-1470	15	14	as	as	ADP
ap-1470	15	15	nasa	nasa	PROPN
ap-1470	15	16	’s	’s	PART
ap-1470	15	17	constellationx	constellationx	ADJ
ap-1470	15	18	concept	concept	NOUN
ap-1470	15	19	and	and	CCONJ
ap-1470	15	20	also	also	ADV
ap-1470	15	21	esa	esa	PROPN
ap-1470	15	22	’s	’s	PART
ap-1470	15	23	xeus	xeus	PROPN
ap-1470	15	24	mission	mission	NOUN
ap-1470	15	25	concept	concept	NOUN
ap-1470	15	26	(	(	PUNCT
ap-1470	15	27	white	white	PROPN
ap-1470	15	28	et	et	PROPN
ap-1470	15	29	al	al	PROPN
ap-1470	15	30	.	.	PROPN
ap-1470	15	31	,	,	PUNCT
ap-1470	15	32	2009	2009	NUM
ap-1470	15	33	)	)	PUNCT
ap-1470	15	34	.	.	PUNCT
ap-1470	16	1	the	the	DET
ap-1470	16	2	spacecraft	spacecraft	NOUN
ap-1470	16	3	configuration	configuration	NOUN
ap-1470	16	4	for	for	ADP
ap-1470	16	5	the	the	DET
ap-1470	16	6	athena	athena	PROPN
ap-1470	16	7	study	study	NOUN
ap-1470	16	8	is	be	AUX
ap-1470	16	9	a	a	DET
ap-1470	16	10	mission	mission	NOUN
ap-1470	16	11	featuring	feature	VERB
ap-1470	16	12	two	two	NUM
ap-1470	16	13	large	large	ADJ
ap-1470	16	14	x	x	ADJ
ap-1470	16	15	-	-	NOUN
ap-1470	16	16	ray	ray	NOUN
ap-1470	16	17	telecopes	telecope	NOUN
ap-1470	16	18	,	,	PUNCT
ap-1470	16	19	each	each	PRON
ap-1470	16	20	with	with	ADP
ap-1470	16	21	an	an	DET
ap-1470	16	22	optical	optical	ADJ
ap-1470	16	23	bench	bench	NOUN
ap-1470	16	24	with	with	ADP
ap-1470	16	25	a	a	DET
ap-1470	16	26	focal	focal	ADJ
ap-1470	16	27	length	length	NOUN
ap-1470	16	28	of	of	ADP
ap-1470	16	29	approx	approx	PROPN
ap-1470	16	30	.	.	PUNCT
ap-1470	17	1	11.5	11.5	NUM
ap-1470	17	2	m	m	NOUN
ap-1470	17	3	and	and	CCONJ
ap-1470	17	4	a	a	DET
ap-1470	17	5	suite	suite	NOUN
ap-1470	17	6	of	of	ADP
ap-1470	17	7	focal	focal	ADJ
ap-1470	17	8	plane	plane	NOUN
ap-1470	17	9	instruments	instrument	NOUN
ap-1470	17	10	.	.	PUNCT
ap-1470	18	1	the	the	DET
ap-1470	18	2	athena	athena	PROPN
ap-1470	18	3	mission	mission	PROPN
ap-1470	18	4	concept	concept	NOUN
ap-1470	18	5	was	be	AUX
ap-1470	18	6	presented	present	VERB
ap-1470	18	7	and	and	CCONJ
ap-1470	18	8	discussed	discuss	VERB
ap-1470	18	9	in	in	ADP
ap-1470	18	10	detail	detail	NOUN
ap-1470	18	11	at	at	ADP
ap-1470	18	12	the	the	DET
ap-1470	18	13	1st	1st	ADJ
ap-1470	18	14	athena	athena	PROPN
ap-1470	18	15	science	science	PROPN
ap-1470	18	16	meeting	meeting	NOUN
ap-1470	18	17	held	hold	VERB
ap-1470	18	18	at	at	ADP
ap-1470	18	19	mpe	mpe	PROPN
ap-1470	18	20	in	in	ADP
ap-1470	18	21	garching	garching	PROPN
ap-1470	18	22	,	,	PUNCT
ap-1470	18	23	germany	germany	PROPN
ap-1470	18	24	,	,	PUNCT
ap-1470	18	25	in	in	ADP
ap-1470	18	26	june	june	PROPN
ap-1470	18	27	2011	2011	NUM
ap-1470	19	1	[	[	X
ap-1470	19	2	16	16	NUM
ap-1470	19	3	]	]	SYM
ap-1470	19	4	.	.	PUNCT
ap-1470	19	5	2	2	NUM
ap-1470	19	6	czech	czech	ADJ
ap-1470	19	7	contribution	contribution	NOUN
ap-1470	19	8	to	to	ADP
ap-1470	19	9	athena	athena	NOUN
ap-1470	19	10	-	-	PUNCT
ap-1470	19	11	related	relate	VERB
ap-1470	19	12	studies	study	NOUN
ap-1470	19	13	at	at	ADP
ap-1470	19	14	the	the	DET
ap-1470	19	15	moment	moment	NOUN
ap-1470	19	16	,	,	PUNCT
ap-1470	19	17	the	the	DET
ap-1470	19	18	czech	czech	PROPN
ap-1470	19	19	contribution	contribution	NOUN
ap-1470	19	20	to	to	ADP
ap-1470	19	21	athena	athena	PROPN
ap-1470	19	22	concentrates	concentrate	VERB
ap-1470	19	23	on	on	ADP
ap-1470	19	24	:	:	PUNCT
ap-1470	19	25	(	(	PUNCT
ap-1470	19	26	1	1	X
ap-1470	19	27	)	)	PUNCT
ap-1470	19	28	participating	participate	VERB
ap-1470	19	29	in	in	ADP
ap-1470	19	30	defining	define	VERB
ap-1470	19	31	scientific	scientific	ADJ
ap-1470	19	32	goals	goal	NOUN
ap-1470	19	33	,	,	PUNCT
ap-1470	19	34	justification	justification	NOUN
ap-1470	19	35	and	and	CCONJ
ap-1470	19	36	project	project	NOUN
ap-1470	19	37	preparation	preparation	NOUN
ap-1470	19	38	,	,	PUNCT
ap-1470	19	39	(	(	PUNCT
ap-1470	19	40	2	2	X
ap-1470	19	41	)	)	PUNCT
ap-1470	19	42	participating	participate	VERB
ap-1470	19	43	in	in	ADP
ap-1470	19	44	the	the	DET
ap-1470	19	45	design	design	NOUN
ap-1470	19	46	and	and	CCONJ
ap-1470	19	47	development	development	NOUN
ap-1470	19	48	of	of	ADP
ap-1470	19	49	mirror	mirror	NOUN
ap-1470	19	50	technologies	technology	NOUN
ap-1470	19	51	.	.	PUNCT
ap-1470	20	1	the	the	DET
ap-1470	20	2	first	first	ADJ
ap-1470	20	3	author	author	NOUN
ap-1470	20	4	of	of	ADP
ap-1470	20	5	this	this	DET
ap-1470	20	6	paper	paper	NOUN
ap-1470	20	7	was	be	AUX
ap-1470	20	8	delegated	delegate	VERB
ap-1470	20	9	as	as	ADP
ap-1470	20	10	a	a	DET
ap-1470	20	11	member	member	NOUN
ap-1470	20	12	of	of	ADP
ap-1470	20	13	the	the	DET
ap-1470	20	14	athena	athena	PROPN
ap-1470	20	15	telescope	telescope	PROPN
ap-1470	20	16	working	working	NOUN
ap-1470	20	17	group	group	NOUN
ap-1470	20	18	.	.	PUNCT
ap-1470	21	1	in	in	ADP
ap-1470	21	2	mirror	mirror	NOUN
ap-1470	21	3	development	development	NOUN
ap-1470	21	4	,	,	PUNCT
ap-1470	21	5	we	we	PRON
ap-1470	21	6	focus	focus	VERB
ap-1470	21	7	on	on	ADP
ap-1470	21	8	supporting	support	VERB
ap-1470	21	9	esa	esa	PROPN
ap-1470	21	10	estec	estec	ADJ
ap-1470	21	11	micropore	micropore	NOUN
ap-1470	21	12	silicon	silicon	NOUN
ap-1470	21	13	technology	technology	NOUN
ap-1470	21	14	design	design	NOUN
ap-1470	21	15	and	and	CCONJ
ap-1470	21	16	also	also	ADV
ap-1470	21	17	on	on	ADP
ap-1470	21	18	designing	design	VERB
ap-1470	21	19	and	and	CCONJ
ap-1470	21	20	developing	develop	VERB
ap-1470	21	21	alternative	alternative	ADJ
ap-1470	21	22	background	background	NOUN
ap-1470	21	23	technologies	technology	NOUN
ap-1470	21	24	and	and	CCONJ
ap-1470	21	25	designs	design	NOUN
ap-1470	21	26	,	,	PUNCT
ap-1470	21	27	as	as	SCONJ
ap-1470	21	28	discussed	discuss	VERB
ap-1470	21	29	in	in	ADP
ap-1470	21	30	greater	great	ADJ
ap-1470	21	31	detail	detail	NOUN
ap-1470	21	32	below	below	ADV
ap-1470	21	33	.	.	PUNCT
ap-1470	22	1	originally	originally	ADV
ap-1470	22	2	,	,	PUNCT
ap-1470	22	3	these	these	DET
ap-1470	22	4	technologies	technology	NOUN
ap-1470	22	5	were	be	AUX
ap-1470	22	6	studied	study	VERB
ap-1470	22	7	for	for	ADP
ap-1470	22	8	the	the	DET
ap-1470	22	9	esa	esa	PROPN
ap-1470	22	10	/	/	SYM
ap-1470	22	11	nasa	nasa	PROPN
ap-1470	22	12	/	/	SYM
ap-1470	22	13	jaxa	jaxa	PROPN
ap-1470	22	14	ixo	ixo	NOUN
ap-1470	22	15	project	project	NOUN
ap-1470	22	16	,	,	PUNCT
ap-1470	22	17	but	but	CCONJ
ap-1470	22	18	we	we	PRON
ap-1470	22	19	believe	believe	VERB
ap-1470	22	20	that	that	SCONJ
ap-1470	22	21	at	at	ADV
ap-1470	22	22	least	least	ADJ
ap-1470	22	23	some	some	PRON
ap-1470	22	24	of	of	ADP
ap-1470	22	25	them	they	PRON
ap-1470	22	26	might	might	AUX
ap-1470	22	27	be	be	AUX
ap-1470	22	28	valuable	valuable	ADJ
ap-1470	22	29	for	for	ADP
ap-1470	22	30	athena	athena	NOUN
ap-1470	22	31	.	.	PROPN
ap-1470	23	1	3	3	NUM
ap-1470	23	2	the	the	DET
ap-1470	23	3	glass	glass	NOUN
ap-1470	23	4	foil	foil	NOUN
ap-1470	23	5	option	option	NOUN
ap-1470	23	6	glass	glass	NOUN
ap-1470	23	7	science	science	NOUN
ap-1470	23	8	and	and	CCONJ
ap-1470	23	9	technology	technology	NOUN
ap-1470	23	10	has	have	VERB
ap-1470	23	11	a	a	DET
ap-1470	23	12	long	long	ADJ
ap-1470	23	13	tradition	tradition	NOUN
ap-1470	23	14	in	in	ADP
ap-1470	23	15	the	the	DET
ap-1470	23	16	czech	czech	PROPN
ap-1470	23	17	republic	republic	NOUN
ap-1470	23	18	.	.	PUNCT
ap-1470	24	1	at	at	ADP
ap-1470	24	2	the	the	DET
ap-1470	24	3	same	same	ADJ
ap-1470	24	4	time	time	NOUN
ap-1470	24	5	,	,	PUNCT
ap-1470	24	6	glass	glass	NOUN
ap-1470	24	7	technology	technology	NOUN
ap-1470	24	8	is	be	AUX
ap-1470	24	9	one	one	NUM
ap-1470	24	10	of	of	ADP
ap-1470	24	11	the	the	DET
ap-1470	24	12	most	most	ADV
ap-1470	24	13	promising	promising	ADJ
ap-1470	24	14	technologies	technology	NOUN
ap-1470	24	15	for	for	ADP
ap-1470	24	16	producing	produce	VERB
ap-1470	24	17	mirrors	mirror	NOUN
ap-1470	24	18	for	for	ADP
ap-1470	24	19	athena	athena	NOUN
ap-1470	24	20	and/or	and/or	CCONJ
ap-1470	24	21	similar	similar	ADJ
ap-1470	24	22	space	space	NOUN
ap-1470	24	23	telescopes	telescope	NOUN
ap-1470	24	24	,	,	PUNCT
ap-1470	24	25	as	as	SCONJ
ap-1470	24	26	the	the	DET
ap-1470	24	27	volume	volume	NOUN
ap-1470	24	28	density	density	NOUN
ap-1470	24	29	of	of	ADP
ap-1470	24	30	glass	glass	NOUN
ap-1470	24	31	is	be	AUX
ap-1470	24	32	more	more	ADJ
ap-1470	24	33	than	than	ADP
ap-1470	24	34	3	3	NUM
ap-1470	24	35	times	time	NOUN
ap-1470	24	36	less	less	ADJ
ap-1470	24	37	than	than	ADP
ap-1470	24	38	the	the	DET
ap-1470	24	39	volume	volume	NOUN
ap-1470	24	40	density	density	NOUN
ap-1470	24	41	of	of	ADP
ap-1470	24	42	electroformed	electroformed	ADJ
ap-1470	24	43	nickel	nickel	NOUN
ap-1470	24	44	layers	layer	NOUN
ap-1470	24	45	.	.	PUNCT
ap-1470	25	1	glass	glass	NOUN
ap-1470	25	2	foils	foil	NOUN
ap-1470	25	3	can	can	AUX
ap-1470	25	4	be	be	AUX
ap-1470	25	5	used	use	VERB
ap-1470	25	6	as	as	ADP
ap-1470	25	7	flats	flat	NOUN
ap-1470	25	8	,	,	PUNCT
ap-1470	25	9	or	or	CCONJ
ap-1470	25	10	may	may	AUX
ap-1470	25	11	be	be	AUX
ap-1470	25	12	shaped	shape	VERB
ap-1470	25	13	or	or	CCONJ
ap-1470	25	14	thermally	thermally	ADV
ap-1470	25	15	slumped	slump	VERB
ap-1470	25	16	to	to	PART
ap-1470	25	17	achieve	achieve	VERB
ap-1470	25	18	the	the	DET
ap-1470	25	19	required	required	ADJ
ap-1470	25	20	geometry	geometry	NOUN
ap-1470	25	21	.	.	PUNCT
ap-1470	26	1	thermal	thermal	ADJ
ap-1470	26	2	forming	forming	NOUN
ap-1470	26	3	of	of	ADP
ap-1470	26	4	glass	glass	NOUN
ap-1470	26	5	is	be	AUX
ap-1470	26	6	not	not	PART
ap-1470	26	7	a	a	DET
ap-1470	26	8	new	new	ADJ
ap-1470	26	9	technology	technology	NOUN
ap-1470	26	10	.	.	PUNCT
ap-1470	27	1	it	it	PRON
ap-1470	27	2	has	have	AUX
ap-1470	27	3	been	be	AUX
ap-1470	27	4	used	use	VERB
ap-1470	27	5	in	in	ADP
ap-1470	27	6	various	various	ADJ
ap-1470	27	7	sectors	sector	NOUN
ap-1470	27	8	of	of	ADP
ap-1470	27	9	the	the	DET
ap-1470	27	10	glass	glass	NOUN
ap-1470	27	11	industry	industry	NOUN
ap-1470	27	12	and	and	CCONJ
ap-1470	27	13	in	in	ADP
ap-1470	27	14	glass	glass	NOUN
ap-1470	27	15	art	art	NOUN
ap-1470	27	16	,	,	PUNCT
ap-1470	27	17	as	as	ADV
ap-1470	27	18	well	well	ADV
ap-1470	27	19	as	as	ADP
ap-1470	27	20	in	in	ADP
ap-1470	27	21	the	the	DET
ap-1470	27	22	production	production	NOUN
ap-1470	27	23	of	of	ADP
ap-1470	27	24	cherenkov	cherenkov	PROPN
ap-1470	27	25	mirrors	mirror	NOUN
ap-1470	27	26	.	.	PUNCT
ap-1470	28	1	however	however	ADV
ap-1470	28	2	,	,	PUNCT
ap-1470	28	3	the	the	DET
ap-1470	28	4	application	application	NOUN
ap-1470	28	5	of	of	ADP
ap-1470	28	6	this	this	DET
ap-1470	28	7	technology	technology	NOUN
ap-1470	28	8	in	in	ADP
ap-1470	28	9	x	x	NOUN
ap-1470	28	10	-	-	NOUN
ap-1470	28	11	ray	ray	NOUN
ap-1470	28	12	optics	optic	NOUN
ap-1470	28	13	is	be	AUX
ap-1470	28	14	related	relate	VERB
ap-1470	28	15	to	to	ADP
ap-1470	28	16	the	the	DET
ap-1470	28	17	need	need	NOUN
ap-1470	28	18	to	to	PART
ap-1470	28	19	improve	improve	VERB
ap-1470	28	20	accuracy	accuracy	NOUN
ap-1470	28	21	significantly	significantly	ADV
ap-1470	28	22	and	and	CCONJ
ap-1470	28	23	minimize	minimize	VERB
ap-1470	28	24	errors	error	NOUN
ap-1470	28	25	.	.	PUNCT
ap-1470	29	1	as	as	ADP
ap-1470	29	2	the	the	DET
ap-1470	29	3	first	first	ADJ
ap-1470	29	4	step	step	NOUN
ap-1470	29	5	,	,	PUNCT
ap-1470	29	6	small	small	ADJ
ap-1470	29	7	(	(	PUNCT
ap-1470	29	8	various	various	ADJ
ap-1470	29	9	sizes	size	NOUN
ap-1470	29	10	typically	typically	ADV
ap-1470	29	11	less	less	ADJ
ap-1470	29	12	than	than	ADP
ap-1470	29	13	100	100	NUM
ap-1470	29	14	×	×	NOUN
ap-1470	29	15	100	100	NUM
ap-1470	29	16	mm	mm	NOUN
ap-1470	29	17	)	)	PUNCT
ap-1470	29	18	glass	glass	NOUN
ap-1470	29	19	samples	sample	NOUN
ap-1470	29	20	of	of	ADP
ap-1470	29	21	various	various	ADJ
ap-1470	29	22	types	type	NOUN
ap-1470	29	23	provided	provide	VERB
ap-1470	29	24	by	by	ADP
ap-1470	29	25	various	various	ADJ
ap-1470	29	26	manufacturers	manufacturer	NOUN
ap-1470	29	27	were	be	AUX
ap-1470	29	28	used	use	VERB
ap-1470	29	29	and	and	CCONJ
ap-1470	29	30	thermally	thermally	ADV
ap-1470	29	31	shaped	shape	VERB
ap-1470	29	32	.	.	PUNCT
ap-1470	30	1	the	the	DET
ap-1470	30	2	geometry	geometry	NOUN
ap-1470	30	3	28	28	NUM
ap-1470	30	4	acta	acta	PROPN
ap-1470	30	5	polytechnica	polytechnica	PROPN
ap-1470	30	6	vol	vol	NOUN
ap-1470	30	7	.	.	PUNCT
ap-1470	31	1	51	51	NUM
ap-1470	31	2	no	no	INTJ
ap-1470	31	3	.	.	PUNCT
ap-1470	32	1	6/2011	6/2011	NUM
ap-1470	32	2	was	be	AUX
ap-1470	32	3	either	either	CCONJ
ap-1470	32	4	flat	flat	ADJ
ap-1470	32	5	or	or	CCONJ
ap-1470	32	6	curved	curved	ADJ
ap-1470	32	7	(	(	PUNCT
ap-1470	32	8	cylindrical	cylindrical	ADJ
ap-1470	32	9	or	or	CCONJ
ap-1470	32	10	parabolic	parabolic	NOUN
ap-1470	32	11	)	)	PUNCT
ap-1470	32	12	.	.	PUNCT
ap-1470	33	1	the	the	DET
ap-1470	33	2	project	project	NOUN
ap-1470	33	3	continued	continue	VERB
ap-1470	33	4	with	with	ADP
ap-1470	33	5	larger	large	ADJ
ap-1470	33	6	samples	sample	NOUN
ap-1470	33	7	(	(	PUNCT
ap-1470	33	8	up	up	ADP
ap-1470	33	9	to	to	PART
ap-1470	33	10	300	300	NUM
ap-1470	33	11	×	×	NOUN
ap-1470	33	12	300	300	NUM
ap-1470	33	13	mm	mm	NOUN
ap-1470	33	14	)	)	PUNCT
ap-1470	33	15	and	and	CCONJ
ap-1470	33	16	further	further	ADJ
ap-1470	33	17	profiles	profile	NOUN
ap-1470	33	18	.	.	PUNCT
ap-1470	34	1	recent	recent	ADJ
ap-1470	34	2	efforts	effort	NOUN
ap-1470	34	3	have	have	AUX
ap-1470	34	4	focused	focus	VERB
ap-1470	34	5	on	on	ADP
ap-1470	34	6	optimizing	optimize	VERB
ap-1470	34	7	the	the	DET
ap-1470	34	8	relevant	relevant	ADJ
ap-1470	34	9	parameters	parameter	NOUN
ap-1470	34	10	of	of	ADP
ap-1470	34	11	both	both	DET
ap-1470	34	12	glass	glass	NOUN
ap-1470	34	13	material	material	NOUN
ap-1470	34	14	and	and	CCONJ
ap-1470	34	15	substrates	substrate	NOUN
ap-1470	34	16	,	,	PUNCT
ap-1470	34	17	as	as	ADV
ap-1470	34	18	well	well	ADV
ap-1470	34	19	as	as	ADP
ap-1470	34	20	the	the	DET
ap-1470	34	21	parameters	parameter	NOUN
ap-1470	34	22	of	of	ADP
ap-1470	34	23	the	the	DET
ap-1470	34	24	slumping	slump	VERB
ap-1470	34	25	process	process	NOUN
ap-1470	34	26	.	.	PUNCT
ap-1470	35	1	various	various	ADJ
ap-1470	35	2	approaches	approach	NOUN
ap-1470	35	3	have	have	AUX
ap-1470	35	4	been	be	AUX
ap-1470	35	5	investigated	investigate	VERB
ap-1470	35	6	.	.	PUNCT
ap-1470	36	1	we	we	PRON
ap-1470	36	2	note	note	VERB
ap-1470	36	3	that	that	SCONJ
ap-1470	36	4	these	these	PRON
ap-1470	36	5	are	be	AUX
ap-1470	36	6	not	not	PART
ap-1470	36	7	quite	quite	ADV
ap-1470	36	8	identical	identical	ADJ
ap-1470	36	9	with	with	ADP
ap-1470	36	10	efforts	effort	NOUN
ap-1470	36	11	by	by	ADP
ap-1470	36	12	other	other	ADJ
ap-1470	36	13	teams	team	NOUN
ap-1470	36	14	(	(	PUNCT
ap-1470	36	15	e.g.	e.g.	ADV
ap-1470	36	16	zhang	zhang	PROPN
ap-1470	36	17	et	et	PROPN
ap-1470	36	18	al	al	PROPN
ap-1470	36	19	.	.	PROPN
ap-1470	36	20	,	,	PUNCT
ap-1470	36	21	2010	2010	NUM
ap-1470	36	22	,	,	PUNCT
ap-1470	36	23	ghigo	ghigo	PROPN
ap-1470	36	24	et	et	PROPN
ap-1470	36	25	al	al	PROPN
ap-1470	36	26	.	.	PROPN
ap-1470	36	27	,	,	PUNCT
ap-1470	36	28	2010	2010	NUM
ap-1470	36	29	)	)	PUNCT
ap-1470	36	30	.	.	PUNCT
ap-1470	37	1	the	the	DET
ap-1470	37	2	glass	glass	NOUN
ap-1470	37	3	samples	sample	NOUN
ap-1470	37	4	were	be	AUX
ap-1470	37	5	thermally	thermally	ADV
ap-1470	37	6	formed	form	VERB
ap-1470	37	7	at	at	ADP
ap-1470	37	8	rigaku	rigaku	NOUN
ap-1470	37	9	,	,	PUNCT
ap-1470	37	10	prague	prague	NOUN
ap-1470	37	11	,	,	PUNCT
ap-1470	37	12	and	and	CCONJ
ap-1470	37	13	also	also	ADV
ap-1470	37	14	at	at	ADP
ap-1470	37	15	the	the	DET
ap-1470	37	16	institute	institute	PROPN
ap-1470	37	17	of	of	ADP
ap-1470	37	18	chemical	chemical	PROPN
ap-1470	37	19	technology	technology	NOUN
ap-1470	37	20	in	in	ADP
ap-1470	37	21	prague	prague	PROPN
ap-1470	37	22	.	.	PUNCT
ap-1470	38	1	for	for	ADP
ap-1470	38	2	large	large	ADJ
ap-1470	38	3	samples	sample	NOUN
ap-1470	38	4	(	(	PUNCT
ap-1470	38	5	300×300	300×300	NUM
ap-1470	38	6	mm	mm	NOUN
ap-1470	38	7	)	)	PUNCT
ap-1470	38	8	,	,	PUNCT
ap-1470	38	9	facilities	facility	NOUN
ap-1470	38	10	at	at	ADP
ap-1470	38	11	the	the	DET
ap-1470	38	12	optical	optical	ADJ
ap-1470	38	13	development	development	NOUN
ap-1470	38	14	workshop	workshop	NOUN
ap-1470	38	15	in	in	ADP
ap-1470	38	16	turnov	turnov	NOUN
ap-1470	38	17	were	be	AUX
ap-1470	38	18	used	use	VERB
ap-1470	38	19	.	.	PUNCT
ap-1470	39	1	the	the	DET
ap-1470	39	2	strategy	strategy	NOUN
ap-1470	39	3	is	be	AUX
ap-1470	39	4	to	to	PART
ap-1470	39	5	develop	develop	VERB
ap-1470	39	6	a	a	DET
ap-1470	39	7	technology	technology	NOUN
ap-1470	39	8	suitable	suitable	ADJ
ap-1470	39	9	for	for	ADP
ap-1470	39	10	inexpensive	inexpensive	ADJ
ap-1470	39	11	mass	mass	NOUN
ap-1470	39	12	production	production	NOUN
ap-1470	39	13	of	of	ADP
ap-1470	39	14	thin	thin	ADJ
ap-1470	39	15	x	x	ADJ
ap-1470	39	16	-	-	NOUN
ap-1470	39	17	ray	ray	NOUN
ap-1470	39	18	optics	optic	NOUN
ap-1470	39	19	shells	shell	NOUN
ap-1470	39	20	,	,	PUNCT
ap-1470	39	21	i.e.	i.e.	X
ap-1470	39	22	,	,	PUNCT
ap-1470	39	23	to	to	PART
ap-1470	39	24	avoid	avoid	VERB
ap-1470	39	25	expensive	expensive	ADJ
ap-1470	39	26	mandrels	mandrel	NOUN
ap-1470	39	27	and	and	CCONJ
ap-1470	39	28	techniques	technique	NOUN
ap-1470	39	29	that	that	PRON
ap-1470	39	30	are	be	AUX
ap-1470	39	31	not	not	PART
ap-1470	39	32	suitable	suitable	ADJ
ap-1470	39	33	for	for	ADP
ap-1470	39	34	mass	mass	ADJ
ap-1470	39	35	production	production	NOUN
ap-1470	39	36	,	,	PUNCT
ap-1470	39	37	or	or	CCONJ
ap-1470	39	38	that	that	PRON
ap-1470	39	39	are	be	AUX
ap-1470	39	40	too	too	ADV
ap-1470	39	41	expensive	expensive	ADJ
ap-1470	39	42	.	.	PUNCT
ap-1470	40	1	numerous	numerous	ADJ
ap-1470	40	2	glass	glass	NOUN
ap-1470	40	3	samples	sample	NOUN
ap-1470	40	4	have	have	AUX
ap-1470	40	5	been	be	AUX
ap-1470	40	6	shaped	shape	VERB
ap-1470	40	7	and	and	CCONJ
ap-1470	40	8	tested	test	VERB
ap-1470	40	9	in	in	ADP
ap-1470	40	10	order	order	NOUN
ap-1470	40	11	to	to	PART
ap-1470	40	12	find	find	VERB
ap-1470	40	13	the	the	DET
ap-1470	40	14	optimal	optimal	ADJ
ap-1470	40	15	parameters	parameter	NOUN
ap-1470	40	16	.	.	PUNCT
ap-1470	41	1	the	the	DET
ap-1470	41	2	shapes	shape	NOUN
ap-1470	41	3	and	and	CCONJ
ap-1470	41	4	profiles	profile	NOUN
ap-1470	41	5	of	of	ADP
ap-1470	41	6	both	both	DET
ap-1470	41	7	mandrels	mandrel	NOUN
ap-1470	41	8	,	,	PUNCT
ap-1470	41	9	as	as	ADV
ap-1470	41	10	well	well	ADV
ap-1470	41	11	as	as	ADP
ap-1470	41	12	the	the	DET
ap-1470	41	13	resulting	result	VERB
ap-1470	41	14	glass	glass	NOUN
ap-1470	41	15	replicas	replica	NOUN
ap-1470	41	16	,	,	PUNCT
ap-1470	41	17	have	have	AUX
ap-1470	41	18	been	be	AUX
ap-1470	41	19	carefully	carefully	ADV
ap-1470	41	20	measured	measure	VERB
ap-1470	41	21	using	use	VERB
ap-1470	41	22	metrological	metrological	ADJ
ap-1470	41	23	devices	device	NOUN
ap-1470	41	24	.	.	PUNCT
ap-1470	42	1	the	the	DET
ap-1470	42	2	results	result	NOUN
ap-1470	42	3	show	show	VERB
ap-1470	42	4	that	that	SCONJ
ap-1470	42	5	the	the	DET
ap-1470	42	6	quality	quality	NOUN
ap-1470	42	7	of	of	ADP
ap-1470	42	8	the	the	DET
ap-1470	42	9	thermal	thermal	ADJ
ap-1470	42	10	glass	glass	NOUN
ap-1470	42	11	replica	replica	NOUN
ap-1470	42	12	can	can	AUX
ap-1470	42	13	be	be	AUX
ap-1470	42	14	significantly	significantly	ADV
ap-1470	42	15	improved	improve	VERB
ap-1470	42	16	by	by	ADP
ap-1470	42	17	optimizing	optimize	VERB
ap-1470	42	18	the	the	DET
ap-1470	42	19	material	material	NOUN
ap-1470	42	20	and	and	CCONJ
ap-1470	42	21	improving	improve	VERB
ap-1470	42	22	the	the	DET
ap-1470	42	23	design	design	NOUN
ap-1470	42	24	of	of	ADP
ap-1470	42	25	the	the	DET
ap-1470	42	26	mandrel	mandrel	NOUN
ap-1470	42	27	,	,	PUNCT
ap-1470	42	28	by	by	ADP
ap-1470	42	29	modifying	modify	VERB
ap-1470	42	30	the	the	DET
ap-1470	42	31	thermal	thermal	ADJ
ap-1470	42	32	forming	form	VERB
ap-1470	42	33	process	process	NOUN
ap-1470	42	34	,	,	PUNCT
ap-1470	42	35	as	as	ADV
ap-1470	42	36	well	well	ADV
ap-1470	42	37	as	as	ADP
ap-1470	42	38	by	by	ADP
ap-1470	42	39	optimizing	optimize	VERB
ap-1470	42	40	the	the	DET
ap-1470	42	41	temperature	temperature	NOUN
ap-1470	42	42	.	.	PUNCT
ap-1470	43	1	after	after	ADP
ap-1470	43	2	the	the	DET
ap-1470	43	3	modifications	modification	NOUN
ap-1470	43	4	and	and	CCONJ
ap-1470	43	5	improvements	improvement	NOUN
ap-1470	43	6	,	,	PUNCT
ap-1470	43	7	some	some	PRON
ap-1470	43	8	of	of	ADP
ap-1470	43	9	them	they	PRON
ap-1470	43	10	significant	significant	ADJ
ap-1470	43	11	,	,	PUNCT
ap-1470	43	12	we	we	PRON
ap-1470	43	13	obtained	obtain	VERB
ap-1470	43	14	the	the	DET
ap-1470	43	15	resulting	result	VERB
ap-1470	43	16	deviation	deviation	NOUN
ap-1470	43	17	of	of	ADP
ap-1470	43	18	the	the	DET
ap-1470	43	19	thermally	thermally	ADV
ap-1470	43	20	formed	form	VERB
ap-1470	43	21	glass	glass	NOUN
ap-1470	43	22	foil	foil	NOUN
ap-1470	43	23	from	from	ADP
ap-1470	43	24	the	the	DET
ap-1470	43	25	ideal	ideal	NOUN
ap-1470	43	26	designed	design	VERB
ap-1470	43	27	profile	profile	NOUN
ap-1470	43	28	to	to	PART
ap-1470	43	29	be	be	AUX
ap-1470	43	30	less	less	ADJ
ap-1470	43	31	than	than	ADP
ap-1470	43	32	1	1	NUM
ap-1470	43	33	μm	μm	NOUN
ap-1470	43	34	(	(	PUNCT
ap-1470	43	35	peak	peak	NOUN
ap-1470	43	36	to	to	ADP
ap-1470	43	37	valley	valley	NOUN
ap-1470	43	38	value	value	NOUN
ap-1470	43	39	)	)	PUNCT
ap-1470	43	40	in	in	ADP
ap-1470	43	41	the	the	DET
ap-1470	43	42	best	good	ADJ
ap-1470	43	43	case	case	NOUN
ap-1470	43	44	.	.	PUNCT
ap-1470	44	1	this	this	DET
ap-1470	44	2	value	value	NOUN
ap-1470	44	3	is	be	AUX
ap-1470	44	4	,	,	PUNCT
ap-1470	44	5	however	however	ADV
ap-1470	44	6	,	,	PUNCT
ap-1470	44	7	strongly	strongly	ADV
ap-1470	44	8	dependent	dependent	ADJ
ap-1470	44	9	on	on	ADP
ap-1470	44	10	the	the	DET
ap-1470	44	11	exact	exact	ADJ
ap-1470	44	12	temperature	temperature	NOUN
ap-1470	44	13	,	,	PUNCT
ap-1470	44	14	so	so	ADV
ap-1470	44	15	we	we	PRON
ap-1470	44	16	believe	believe	VERB
ap-1470	44	17	that	that	SCONJ
ap-1470	44	18	further	further	ADJ
ap-1470	44	19	improvements	improvement	NOUN
ap-1470	44	20	are	be	AUX
ap-1470	44	21	still	still	ADV
ap-1470	44	22	possible	possible	ADJ
ap-1470	44	23	.	.	PUNCT
ap-1470	45	1	the	the	DET
ap-1470	45	2	fine	fine	ADJ
ap-1470	45	3	original	original	ADJ
ap-1470	45	4	microroughness	microroughness	NOUN
ap-1470	45	5	(	(	PUNCT
ap-1470	45	6	typically	typically	ADV
ap-1470	45	7	better	well	ADJ
ap-1470	45	8	than	than	ADP
ap-1470	45	9	1	1	NUM
ap-1470	45	10	nm	nm	NOUN
ap-1470	45	11	)	)	PUNCT
ap-1470	45	12	of	of	ADP
ap-1470	45	13	the	the	DET
ap-1470	45	14	original	original	ADJ
ap-1470	45	15	float	float	NOUN
ap-1470	45	16	glass	glass	NOUN
ap-1470	45	17	foil	foil	NOUN
ap-1470	45	18	was	be	AUX
ap-1470	45	19	found	find	VERB
ap-1470	45	20	not	not	PART
ap-1470	45	21	to	to	PART
ap-1470	45	22	be	be	AUX
ap-1470	45	23	degraded	degrade	VERB
ap-1470	45	24	by	by	ADP
ap-1470	45	25	the	the	DET
ap-1470	45	26	thermal	thermal	ADJ
ap-1470	45	27	forming	form	VERB
ap-1470	45	28	process	process	NOUN
ap-1470	45	29	.	.	PUNCT
ap-1470	46	1	we	we	PRON
ap-1470	46	2	note	note	VERB
ap-1470	46	3	that	that	SCONJ
ap-1470	46	4	our	our	PRON
ap-1470	46	5	approach	approach	NOUN
ap-1470	46	6	in	in	ADP
ap-1470	46	7	thermal	thermal	ADJ
ap-1470	46	8	glass	glass	NOUN
ap-1470	46	9	forming	form	VERB
ap-1470	46	10	is	be	AUX
ap-1470	46	11	different	different	ADJ
ap-1470	46	12	from	from	ADP
ap-1470	46	13	the	the	DET
ap-1470	46	14	approaches	approach	NOUN
ap-1470	46	15	used	use	VERB
ap-1470	46	16	by	by	ADP
ap-1470	46	17	other	other	ADJ
ap-1470	46	18	authors	author	NOUN
ap-1470	46	19	.	.	PUNCT
ap-1470	47	1	recent	recent	ADJ
ap-1470	47	2	efforts	effort	NOUN
ap-1470	47	3	have	have	AUX
ap-1470	47	4	been	be	AUX
ap-1470	47	5	devoted	devote	VERB
ap-1470	47	6	to	to	ADP
ap-1470	47	7	optimizing	optimize	VERB
ap-1470	47	8	the	the	DET
ap-1470	47	9	whole	whole	ADJ
ap-1470	47	10	process	process	NOUN
ap-1470	47	11	,	,	PUNCT
ap-1470	47	12	using	use	VERB
ap-1470	47	13	and	and	CCONJ
ap-1470	47	14	comparing	compare	VERB
ap-1470	47	15	different	different	ADJ
ap-1470	47	16	forming	form	VERB
ap-1470	47	17	strategies	strategy	NOUN
ap-1470	47	18	etc	etc	X
ap-1470	47	19	.	.	X
ap-1470	47	20	,	,	PUNCT
ap-1470	47	21	as	as	SCONJ
ap-1470	47	22	the	the	DET
ap-1470	47	23	final	final	ADJ
ap-1470	47	24	goal	goal	NOUN
ap-1470	47	25	is	be	AUX
ap-1470	47	26	to	to	PART
ap-1470	47	27	further	far	ADV
ap-1470	47	28	improve	improve	VERB
ap-1470	47	29	the	the	DET
ap-1470	47	30	forming	form	VERB
ap-1470	47	31	accuracy	accuracy	NOUN
ap-1470	47	32	to	to	ADP
ap-1470	47	33	less	less	ADJ
ap-1470	47	34	than	than	ADP
ap-1470	47	35	0.1	0.1	NUM
ap-1470	47	36	μm	μm	NUM
ap-1470	47	37	values	value	NOUN
ap-1470	47	38	.	.	PUNCT
ap-1470	48	1	for	for	ADP
ap-1470	48	2	the	the	DET
ap-1470	48	3	near	near	ADJ
ap-1470	48	4	future	future	NOUN
ap-1470	48	5	,	,	PUNCT
ap-1470	48	6	we	we	PRON
ap-1470	48	7	plan	plan	VERB
ap-1470	48	8	to	to	PART
ap-1470	48	9	continue	continue	VERB
ap-1470	48	10	these	these	DET
ap-1470	48	11	efforts	effort	NOUN
ap-1470	48	12	together	together	ADV
ap-1470	48	13	with	with	ADP
ap-1470	48	14	investigations	investigation	NOUN
ap-1470	48	15	of	of	ADP
ap-1470	48	16	computer	computer	NOUN
ap-1470	48	17	-	-	PUNCT
ap-1470	48	18	controlled	control	VERB
ap-1470	48	19	forming	forming	NOUN
ap-1470	48	20	of	of	ADP
ap-1470	48	21	glass	glass	NOUN
ap-1470	48	22	foils	foil	NOUN
ap-1470	48	23	(	(	PUNCT
ap-1470	48	24	according	accord	VERB
ap-1470	48	25	to	to	ADP
ap-1470	48	26	the	the	DET
ap-1470	48	27	principles	principle	NOUN
ap-1470	48	28	of	of	ADP
ap-1470	48	29	active	active	ADJ
ap-1470	48	30	optics	optic	NOUN
ap-1470	48	31	)	)	PUNCT
ap-1470	48	32	.	.	PUNCT
ap-1470	49	1	4	4	NUM
ap-1470	49	2	the	the	DET
ap-1470	49	3	silicon	silicon	NOUN
ap-1470	49	4	wafer	wafer	NOUN
ap-1470	49	5	option	option	NOUN
ap-1470	49	6	silicon	silicon	NOUN
ap-1470	49	7	is	be	AUX
ap-1470	49	8	a	a	DET
ap-1470	49	9	relatively	relatively	ADV
ap-1470	49	10	light	light	ADJ
ap-1470	49	11	material	material	NOUN
ap-1470	49	12	and	and	CCONJ
ap-1470	49	13	already	already	ADV
ap-1470	49	14	during	during	ADP
ap-1470	49	15	the	the	DET
ap-1470	49	16	manufacturing	manufacturing	NOUN
ap-1470	49	17	process	process	NOUN
ap-1470	49	18	it	it	PRON
ap-1470	49	19	is	be	AUX
ap-1470	49	20	lapped	lap	VERB
ap-1470	49	21	and	and	CCONJ
ap-1470	49	22	polished	polished	ADJ
ap-1470	49	23	(	(	PUNCT
ap-1470	49	24	either	either	CCONJ
ap-1470	49	25	on	on	ADP
ap-1470	49	26	one	one	NUM
ap-1470	49	27	side	side	NOUN
ap-1470	49	28	or	or	CCONJ
ap-1470	49	29	on	on	ADP
ap-1470	49	30	both	both	DET
ap-1470	49	31	sides	side	NOUN
ap-1470	49	32	)	)	PUNCT
ap-1470	49	33	to	to	ADP
ap-1470	49	34	very	very	ADV
ap-1470	49	35	fine	fine	ADJ
ap-1470	49	36	smoothness	smoothness	NOUN
ap-1470	49	37	(	(	PUNCT
ap-1470	49	38	better	well	ADJ
ap-1470	49	39	than	than	ADP
ap-1470	49	40	a	a	DET
ap-1470	49	41	few	few	ADJ
ap-1470	49	42	0.1	0.1	NUM
ap-1470	49	43	nm	nm	NOUN
ap-1470	49	44	)	)	PUNCT
ap-1470	49	45	and	and	CCONJ
ap-1470	49	46	thickness	thickness	NOUN
ap-1470	49	47	homogeneity	homogeneity	NOUN
ap-1470	49	48	(	(	PUNCT
ap-1470	49	49	of	of	ADP
ap-1470	49	50	the	the	DET
ap-1470	49	51	order	order	NOUN
ap-1470	49	52	of	of	ADP
ap-1470	49	53	1	1	NUM
ap-1470	49	54	μm	μm	NUM
ap-1470	49	55	)	)	PUNCT
ap-1470	49	56	.	.	PUNCT
ap-1470	50	1	another	another	DET
ap-1470	50	2	obvious	obvious	ADJ
ap-1470	50	3	option	option	NOUN
ap-1470	50	4	,	,	PUNCT
ap-1470	50	5	recently	recently	ADV
ap-1470	50	6	considered	consider	VERB
ap-1470	50	7	as	as	ADP
ap-1470	50	8	one	one	NUM
ap-1470	50	9	of	of	ADP
ap-1470	50	10	most	most	ADV
ap-1470	50	11	promising	promising	ADJ
ap-1470	50	12	for	for	ADP
ap-1470	50	13	high	high	ADJ
ap-1470	50	14	-	-	PUNCT
ap-1470	50	15	precision	precision	NOUN
ap-1470	50	16	x	x	NOUN
ap-1470	50	17	-	-	NOUN
ap-1470	50	18	ray	ray	NOUN
ap-1470	50	19	optics	optic	NOUN
ap-1470	50	20	for	for	ADP
ap-1470	50	21	athena	athena	NOUN
ap-1470	50	22	,	,	PUNCT
ap-1470	50	23	is	be	AUX
ap-1470	50	24	the	the	DET
ap-1470	50	25	use	use	NOUN
ap-1470	50	26	of	of	ADP
ap-1470	50	27	x	x	NOUN
ap-1470	50	28	-	-	NOUN
ap-1470	50	29	ray	ray	NOUN
ap-1470	50	30	optics	optic	NOUN
ap-1470	50	31	based	base	VERB
ap-1470	50	32	on	on	ADP
ap-1470	50	33	commercially	commercially	ADV
ap-1470	50	34	available	available	ADJ
ap-1470	50	35	silicon	silicon	NOUN
ap-1470	50	36	wafers	wafer	NOUN
ap-1470	50	37	manufactured	manufacture	VERB
ap-1470	50	38	mainly	mainly	ADV
ap-1470	50	39	for	for	ADP
ap-1470	50	40	the	the	DET
ap-1470	50	41	purposes	purpose	NOUN
ap-1470	50	42	of	of	ADP
ap-1470	50	43	the	the	DET
ap-1470	50	44	semiconductor	semiconductor	NOUN
ap-1470	50	45	industry	industry	NOUN
ap-1470	50	46	.	.	PUNCT
ap-1470	51	1	the	the	DET
ap-1470	51	2	main	main	ADJ
ap-1470	51	3	advantages	advantage	NOUN
ap-1470	51	4	of	of	ADP
ap-1470	51	5	the	the	DET
ap-1470	51	6	application	application	NOUN
ap-1470	51	7	of	of	ADP
ap-1470	51	8	si	si	NOUN
ap-1470	51	9	wafers	wafer	NOUN
ap-1470	51	10	in	in	ADP
ap-1470	51	11	space	space	NOUN
ap-1470	51	12	x	x	NOUN
ap-1470	51	13	-	-	NOUN
ap-1470	51	14	ray	ray	NOUN
ap-1470	51	15	optics	optic	NOUN
ap-1470	51	16	are	be	AUX
ap-1470	51	17	(	(	PUNCT
ap-1470	51	18	i	i	NOUN
ap-1470	51	19	)	)	PUNCT
ap-1470	51	20	the	the	DET
ap-1470	51	21	volume	volume	NOUN
ap-1470	51	22	density	density	NOUN
ap-1470	51	23	,	,	PUNCT
ap-1470	51	24	which	which	PRON
ap-1470	51	25	is	be	AUX
ap-1470	51	26	more	more	ADJ
ap-1470	51	27	than	than	ADP
ap-1470	51	28	3	3	NUM
ap-1470	51	29	times	time	NOUN
ap-1470	51	30	lower	low	ADJ
ap-1470	51	31	than	than	ADP
ap-1470	51	32	the	the	DET
ap-1470	51	33	electroformed	electroformed	ADJ
ap-1470	51	34	nickel	nickel	NOUN
ap-1470	51	35	used	use	VERB
ap-1470	51	36	in	in	ADP
ap-1470	51	37	the	the	DET
ap-1470	51	38	past	past	NOUN
ap-1470	51	39	for	for	ADP
ap-1470	51	40	galvanoplastic	galvanoplastic	ADJ
ap-1470	51	41	replication	replication	NOUN
ap-1470	51	42	of	of	ADP
ap-1470	51	43	multiply	multiply	ADV
ap-1470	51	44	nested	nested	ADJ
ap-1470	51	45	x	x	ADJ
ap-1470	51	46	-	-	NOUN
ap-1470	51	47	ray	ray	NOUN
ap-1470	51	48	mirrors	mirror	NOUN
ap-1470	51	49	,	,	PUNCT
ap-1470	51	50	and	and	CCONJ
ap-1470	51	51	slightly	slightly	ADV
ap-1470	51	52	less	less	ADJ
ap-1470	51	53	than	than	ADP
ap-1470	51	54	the	the	DET
ap-1470	51	55	alternative	alternative	ADJ
ap-1470	51	56	approach	approach	NOUN
ap-1470	51	57	of	of	ADP
ap-1470	51	58	glass	glass	NOUN
ap-1470	51	59	foils	foil	NOUN
ap-1470	51	60	,	,	PUNCT
ap-1470	51	61	(	(	PUNCT
ap-1470	51	62	ii	ii	NOUN
ap-1470	51	63	)	)	PUNCT
ap-1470	51	64	very	very	ADV
ap-1470	51	65	high	high	ADJ
ap-1470	51	66	thickness	thickness	NOUN
ap-1470	51	67	homogeneity	homogeneity	NOUN
ap-1470	51	68	,	,	PUNCT
ap-1470	51	69	typically	typically	ADV
ap-1470	51	70	less	less	ADJ
ap-1470	51	71	than	than	ADP
ap-1470	51	72	1	1	NUM
ap-1470	51	73	μm	μm	NUM
ap-1470	51	74	over	over	ADP
ap-1470	51	75	100	100	NUM
ap-1470	51	76	mm	mm	NOUN
ap-1470	51	77	,	,	PUNCT
ap-1470	51	78	and	and	CCONJ
ap-1470	51	79	(	(	PUNCT
ap-1470	51	80	iii	iii	NOUN
ap-1470	51	81	)	)	PUNCT
ap-1470	51	82	very	very	ADV
ap-1470	51	83	small	small	ADJ
ap-1470	51	84	surface	surface	NOUN
ap-1470	51	85	microroughness	microroughness	NOUN
ap-1470	51	86	either	either	CCONJ
ap-1470	51	87	on	on	ADP
ap-1470	51	88	one	one	NUM
ap-1470	51	89	side	side	NOUN
ap-1470	51	90	or	or	CCONJ
ap-1470	51	91	on	on	ADP
ap-1470	51	92	both	both	DET
ap-1470	51	93	sides	side	NOUN
ap-1470	51	94	(	(	PUNCT
ap-1470	51	95	typically	typically	ADV
ap-1470	51	96	of	of	ADP
ap-1470	51	97	the	the	DET
ap-1470	51	98	order	order	NOUN
ap-1470	51	99	of	of	ADP
ap-1470	51	100	a	a	DET
ap-1470	51	101	few	few	ADJ
ap-1470	51	102	0.1	0.1	NUM
ap-1470	51	103	nm	nm	NOUN
ap-1470	51	104	or	or	CCONJ
ap-1470	51	105	even	even	ADV
ap-1470	51	106	less	less	ADJ
ap-1470	51	107	)	)	PUNCT
ap-1470	51	108	.	.	PUNCT
ap-1470	52	1	silicon	silicon	NOUN
ap-1470	52	2	wafers	wafer	NOUN
ap-1470	52	3	were	be	AUX
ap-1470	52	4	expected	expect	VERB
ap-1470	52	5	to	to	PART
ap-1470	52	6	be	be	AUX
ap-1470	52	7	used	use	VERB
ap-1470	52	8	in	in	ADP
ap-1470	52	9	the	the	DET
ap-1470	52	10	esa	esa	PROPN
ap-1470	52	11	xeus	xeus	PROPN
ap-1470	52	12	and	and	CCONJ
ap-1470	52	13	ixo	ixo	NOUN
ap-1470	52	14	projects	project	NOUN
ap-1470	52	15	,	,	PUNCT
ap-1470	52	16	and	and	CCONJ
ap-1470	52	17	are	be	AUX
ap-1470	52	18	still	still	ADV
ap-1470	52	19	under	under	ADP
ap-1470	52	20	consideration	consideration	NOUN
ap-1470	52	21	for	for	ADP
ap-1470	52	22	the	the	DET
ap-1470	52	23	athena	athena	PROPN
ap-1470	52	24	project	project	NOUN
ap-1470	52	25	.	.	PUNCT
ap-1470	53	1	the	the	DET
ap-1470	53	2	recent	recent	ADJ
ap-1470	53	3	baseline	baseline	NOUN
ap-1470	53	4	optics	optic	NOUN
ap-1470	53	5	for	for	ADP
ap-1470	53	6	the	the	DET
ap-1470	53	7	athena	athena	PROPN
ap-1470	53	8	x	x	PROPN
ap-1470	53	9	-	-	NOUN
ap-1470	53	10	ray	ray	NOUN
ap-1470	53	11	telescope	telescope	NOUN
ap-1470	53	12	design	design	NOUN
ap-1470	53	13	is	be	AUX
ap-1470	53	14	,	,	PUNCT
ap-1470	53	15	like	like	ADP
ap-1470	53	16	xeus	xeus	NOUN
ap-1470	53	17	and	and	CCONJ
ap-1470	53	18	ixo	ixo	NOUN
ap-1470	53	19	,	,	PUNCT
ap-1470	53	20	based	base	VERB
ap-1470	53	21	on	on	ADP
ap-1470	53	22	x	x	ADJ
ap-1470	53	23	-	-	NOUN
ap-1470	53	24	ray	ray	ADJ
ap-1470	53	25	high	high	ADJ
ap-1470	53	26	precision	precision	NOUN
ap-1470	53	27	pore	pore	ADJ
ap-1470	53	28	optics	optic	NOUN
ap-1470	53	29	(	(	PUNCT
ap-1470	53	30	x	x	NOUN
ap-1470	53	31	-	-	PUNCT
ap-1470	53	32	hpo	hpo	NOUN
ap-1470	53	33	)	)	PUNCT
ap-1470	53	34	,	,	PUNCT
ap-1470	53	35	a	a	DET
ap-1470	53	36	technology	technology	NOUN
ap-1470	53	37	currently	currently	ADV
ap-1470	53	38	under	under	ADP
ap-1470	53	39	development	development	NOUN
ap-1470	53	40	with	with	ADP
ap-1470	53	41	esa	esa	PROPN
ap-1470	53	42	funding	funding	PROPN
ap-1470	53	43	(	(	PUNCT
ap-1470	53	44	rdopt	rdopt	PROPN
ap-1470	53	45	,	,	PUNCT
ap-1470	53	46	rd	rd	NOUN
ap-1470	53	47	-	-	PUNCT
ap-1470	53	48	hpo	hpo	PROPN
ap-1470	53	49	)	)	PUNCT
ap-1470	53	50	,	,	PUNCT
ap-1470	53	51	with	with	ADP
ap-1470	53	52	a	a	DET
ap-1470	53	53	view	view	NOUN
ap-1470	53	54	to	to	ADP
ap-1470	53	55	achieving	achieve	VERB
ap-1470	53	56	large	large	ADJ
ap-1470	53	57	effective	effective	ADJ
ap-1470	53	58	areas	area	NOUN
ap-1470	53	59	with	with	ADP
ap-1470	53	60	low	low	ADJ
ap-1470	53	61	mass	mass	PROPN
ap-1470	53	62	,	,	PUNCT
ap-1470	53	63	reduced	reduce	VERB
ap-1470	53	64	telescope	telescope	NOUN
ap-1470	53	65	length	length	NOUN
ap-1470	53	66	,	,	PUNCT
ap-1470	53	67	high	high	ADJ
ap-1470	53	68	stiffness	stiffness	NOUN
ap-1470	53	69	,	,	PUNCT
ap-1470	53	70	and	and	CCONJ
ap-1470	53	71	a	a	DET
ap-1470	53	72	monolithic	monolithic	ADJ
ap-1470	53	73	structure	structure	NOUN
ap-1470	53	74	,	,	PUNCT
ap-1470	53	75	favoured	favour	VERB
ap-1470	53	76	for	for	ADP
ap-1470	53	77	handling	handle	VERB
ap-1470	53	78	the	the	DET
ap-1470	53	79	thermal	thermal	ADJ
ap-1470	53	80	environment	environment	NOUN
ap-1470	53	81	and	and	CCONJ
ap-1470	53	82	for	for	ADP
ap-1470	53	83	simplifying	simplify	VERB
ap-1470	53	84	the	the	DET
ap-1470	53	85	alignment	alignment	NOUN
ap-1470	53	86	process	process	NOUN
ap-1470	53	87	(	(	PUNCT
ap-1470	53	88	bavdaz	bavdaz	NOUN
ap-1470	53	89	et	et	PROPN
ap-1470	53	90	al	al	PROPN
ap-1470	53	91	.	.	PROPN
ap-1470	53	92	2010	2010	NUM
ap-1470	53	93	)	)	PUNCT
ap-1470	53	94	.	.	PUNCT
ap-1470	54	1	in	in	ADP
ap-1470	54	2	addition	addition	NOUN
ap-1470	54	3	,	,	PUNCT
ap-1470	54	4	due	due	ADP
ap-1470	54	5	to	to	ADP
ap-1470	54	6	the	the	DET
ap-1470	54	7	higher	high	ADJ
ap-1470	54	8	packing	packing	NOUN
ap-1470	54	9	density	density	NOUN
ap-1470	54	10	and	and	CCONJ
ap-1470	54	11	the	the	DET
ap-1470	54	12	associated	associate	VERB
ap-1470	54	13	shorter	short	ADJ
ap-1470	54	14	mirrors	mirror	NOUN
ap-1470	54	15	required	require	VERB
ap-1470	54	16	,	,	PUNCT
ap-1470	54	17	conical	conical	ADJ
ap-1470	54	18	approximation	approximation	NOUN
ap-1470	54	19	to	to	ADP
ap-1470	54	20	the	the	DET
ap-1470	54	21	wolter	wolter	NOUN
ap-1470	54	22	-	-	PUNCT
ap-1470	54	23	i	i	PRON
ap-1470	54	24	geometry	geometry	NOUN
ap-1470	54	25	becomes	become	VERB
ap-1470	54	26	possible	possible	ADJ
ap-1470	54	27	.	.	PUNCT
ap-1470	55	1	x	x	X
ap-1470	55	2	-	-	PUNCT
ap-1470	55	3	hpo	hpo	NOUN
ap-1470	55	4	optics	optic	NOUN
ap-1470	55	5	is	be	AUX
ap-1470	55	6	based	base	VERB
ap-1470	55	7	on	on	ADP
ap-1470	55	8	ribbed	rib	VERB
ap-1470	55	9	si	si	NOUN
ap-1470	55	10	wafers	wafer	NOUN
ap-1470	55	11	stacked	stack	VERB
ap-1470	55	12	together	together	ADV
ap-1470	55	13	.	.	PUNCT
ap-1470	56	1	the	the	DET
ap-1470	56	2	si	si	PROPN
ap-1470	56	3	wafers	wafer	NOUN
ap-1470	56	4	for	for	ADP
ap-1470	56	5	achieving	achieve	VERB
ap-1470	56	6	the	the	DET
ap-1470	56	7	conical	conical	ADJ
ap-1470	56	8	approximation	approximation	NOUN
ap-1470	56	9	are	be	AUX
ap-1470	56	10	formed	form	VERB
ap-1470	56	11	by	by	ADP
ap-1470	56	12	stacking	stack	VERB
ap-1470	56	13	a	a	DET
ap-1470	56	14	large	large	ADJ
ap-1470	56	15	number	number	NOUN
ap-1470	56	16	of	of	ADP
ap-1470	56	17	plates	plate	NOUN
ap-1470	56	18	together	together	ADV
ap-1470	56	19	using	use	VERB
ap-1470	56	20	a	a	DET
ap-1470	56	21	mandrel	mandrel	NOUN
ap-1470	56	22	.	.	PUNCT
ap-1470	57	1	the	the	DET
ap-1470	57	2	typical	typical	ADJ
ap-1470	57	3	size	size	NOUN
ap-1470	57	4	of	of	ADP
ap-1470	57	5	the	the	DET
ap-1470	57	6	si	si	PROPN
ap-1470	57	7	wafers	wafer	NOUN
ap-1470	57	8	is	be	AUX
ap-1470	57	9	10×	10×	NUM
ap-1470	57	10	10	10	NUM
ap-1470	57	11	cm	cm	NOUN
ap-1470	57	12	.	.	PUNCT
ap-1470	58	1	there	there	PRON
ap-1470	58	2	are	be	VERB
ap-1470	58	3	also	also	ADV
ap-1470	58	4	alternative	alternative	ADJ
ap-1470	58	5	x	x	NOUN
ap-1470	58	6	-	-	NOUN
ap-1470	58	7	ray	ray	NOUN
ap-1470	58	8	optics	optic	NOUN
ap-1470	58	9	arrangements	arrangement	NOUN
ap-1470	58	10	with	with	ADP
ap-1470	58	11	the	the	DET
ap-1470	58	12	use	use	NOUN
ap-1470	58	13	of	of	ADP
ap-1470	58	14	si	si	NOUN
ap-1470	58	15	wafers	wafer	NOUN
ap-1470	58	16	.	.	PUNCT
ap-1470	59	1	in	in	ADP
ap-1470	59	2	this	this	DET
ap-1470	59	3	paper	paper	NOUN
ap-1470	59	4	,	,	PUNCT
ap-1470	59	5	we	we	PRON
ap-1470	59	6	refer	refer	VERB
ap-1470	59	7	to	to	ADP
ap-1470	59	8	the	the	DET
ap-1470	59	9	development	development	NOUN
ap-1470	59	10	of	of	ADP
ap-1470	59	11	an	an	DET
ap-1470	59	12	alternative	alternative	ADJ
ap-1470	59	13	design	design	NOUN
ap-1470	59	14	of	of	ADP
ap-1470	59	15	innovative	innovative	ADJ
ap-1470	59	16	precise	precise	ADJ
ap-1470	59	17	x	x	NOUN
ap-1470	59	18	-	-	NOUN
ap-1470	59	19	ray	ray	NOUN
ap-1470	59	20	optics	optic	NOUN
ap-1470	59	21	based	base	VERB
ap-1470	59	22	on	on	ADP
ap-1470	59	23	si	si	PROPN
ap-1470	59	24	wafers	wafer	NOUN
ap-1470	59	25	.	.	PUNCT
ap-1470	60	1	our	our	PRON
ap-1470	60	2	approach	approach	NOUN
ap-1470	60	3	is	be	AUX
ap-1470	60	4	based	base	VERB
ap-1470	60	5	on	on	ADP
ap-1470	60	6	two	two	NUM
ap-1470	60	7	steps	step	NOUN
ap-1470	60	8	,	,	PUNCT
ap-1470	60	9	namely	namely	ADV
ap-1470	60	10	(	(	PUNCT
ap-1470	60	11	i	i	NOUN
ap-1470	60	12	)	)	PUNCT
ap-1470	60	13	developing	develop	VERB
ap-1470	60	14	dedicated	dedicate	VERB
ap-1470	60	15	si	si	NOUN
ap-1470	60	16	wafers	wafer	NOUN
ap-1470	60	17	with	with	ADP
ap-1470	60	18	properties	property	NOUN
ap-1470	60	19	optimized	optimize	VERB
ap-1470	60	20	for	for	ADP
ap-1470	60	21	use	use	NOUN
ap-1470	60	22	in	in	ADP
ap-1470	60	23	space	space	NOUN
ap-1470	60	24	x	x	NOUN
ap-1470	60	25	-	-	NOUN
ap-1470	60	26	ray	ray	NOUN
ap-1470	60	27	telescopes	telescope	NOUN
ap-1470	60	28	,	,	PUNCT
ap-1470	60	29	and	and	CCONJ
ap-1470	60	30	(	(	PUNCT
ap-1470	60	31	ii	ii	NOUN
ap-1470	60	32	)	)	PUNCT
ap-1470	60	33	precisely	precisely	ADV
ap-1470	60	34	shaping	shape	VERB
ap-1470	60	35	the	the	DET
ap-1470	60	36	wafers	wafer	NOUN
ap-1470	60	37	to	to	ADP
ap-1470	60	38	the	the	DET
ap-1470	60	39	optical	optical	ADJ
ap-1470	60	40	surfaces	surface	NOUN
ap-1470	60	41	(	(	PUNCT
ap-1470	60	42	figure	figure	NOUN
ap-1470	60	43	4	4	NUM
ap-1470	60	44	)	)	PUNCT
ap-1470	60	45	.	.	PUNCT
ap-1470	61	1	stacking	stack	VERB
ap-1470	61	2	to	to	PART
ap-1470	61	3	achieve	achieve	VERB
ap-1470	61	4	nested	nested	ADJ
ap-1470	61	5	arrays	array	NOUN
ap-1470	61	6	is	be	AUX
ap-1470	61	7	performed	perform	VERB
ap-1470	61	8	after	after	SCONJ
ap-1470	61	9	the	the	DET
ap-1470	61	10	wafers	wafer	NOUN
ap-1470	61	11	have	have	AUX
ap-1470	61	12	been	be	AUX
ap-1470	61	13	shaped	shape	VERB
ap-1470	61	14	.	.	PUNCT
ap-1470	62	1	in	in	ADP
ap-1470	62	2	this	this	DET
ap-1470	62	3	approach	approach	NOUN
ap-1470	62	4	,	,	PUNCT
ap-1470	62	5	multi	multi	ADJ
ap-1470	62	6	foil	foil	NOUN
ap-1470	62	7	optics	optic	NOUN
ap-1470	62	8	(	(	PUNCT
ap-1470	62	9	mfo	mfo	NOUN
ap-1470	62	10	)	)	PUNCT
ap-1470	62	11	is	be	AUX
ap-1470	62	12	thus	thus	ADV
ap-1470	62	13	created	create	VERB
ap-1470	62	14	from	from	ADP
ap-1470	62	15	shaped	shape	VERB
ap-1470	62	16	si	si	NOUN
ap-1470	62	17	wafers	wafer	NOUN
ap-1470	62	18	.	.	PUNCT
ap-1470	63	1	for	for	ADP
ap-1470	63	2	more	more	ADJ
ap-1470	63	3	details	detail	NOUN
ap-1470	63	4	on	on	ADP
ap-1470	63	5	mfo	mfo	PROPN
ap-1470	63	6	,	,	PUNCT
ap-1470	63	7	see	see	VERB
ap-1470	63	8	hudec	hudec	NOUN
ap-1470	63	9	et	et	PROPN
ap-1470	63	10	al	al	PROPN
ap-1470	63	11	.	.	PUNCT
ap-1470	64	1	(	(	PUNCT
ap-1470	64	2	2005	2005	NUM
ap-1470	64	3	)	)	PUNCT
ap-1470	64	4	.	.	PUNCT
ap-1470	65	1	this	this	DET
ap-1470	65	2	alternative	alternative	ADJ
ap-1470	65	3	approach	approach	NOUN
ap-1470	65	4	does	do	AUX
ap-1470	65	5	not	not	PART
ap-1470	65	6	require	require	VERB
ap-1470	65	7	the	the	DET
ap-1470	65	8	si	si	PROPN
ap-1470	65	9	wafers	wafer	NOUN
ap-1470	65	10	to	to	PART
ap-1470	65	11	have	have	VERB
ap-1470	65	12	a	a	DET
ap-1470	65	13	ribbed	rib	VERB
ap-1470	65	14	surface	surface	NOUN
ap-1470	65	15	,	,	PUNCT
ap-1470	65	16	so	so	SCONJ
ap-1470	65	17	problems	problem	NOUN
ap-1470	65	18	with	with	ADP
ap-1470	65	19	transferring	transfer	VERB
ap-1470	65	20	any	any	DET
ap-1470	65	21	deviation	deviation	NOUN
ap-1470	65	22	,	,	PUNCT
ap-1470	65	23	stress	stress	NOUN
ap-1470	65	24	,	,	PUNCT
ap-1470	65	25	and/or	and/or	CCONJ
ap-1470	65	26	inaccuracy	inaccuracy	VERB
ap-1470	65	27	from	from	ADP
ap-1470	65	28	one	one	NUM
ap-1470	65	29	wafer	wafer	NOUN
ap-1470	65	30	to	to	ADP
ap-1470	65	31	the	the	DET
ap-1470	65	32	neighbouring	neighbouring	ADJ
ap-1470	65	33	plates	plate	NOUN
ap-1470	65	34	or	or	CCONJ
ap-1470	65	35	even	even	ADV
ap-1470	65	36	to	to	ADP
ap-1470	65	37	the	the	DET
ap-1470	65	38	whole	whole	ADJ
ap-1470	65	39	stacked	stack	VERB
ap-1470	65	40	assembly	assembly	NOUN
ap-1470	65	41	will	will	AUX
ap-1470	65	42	be	be	AUX
ap-1470	65	43	avoided	avoid	VERB
ap-1470	65	44	.	.	PUNCT
ap-1470	66	1	however	however	ADV
ap-1470	66	2	,	,	PUNCT
ap-1470	66	3	suitable	suitable	ADJ
ap-1470	66	4	technologies	technology	NOUN
ap-1470	66	5	for	for	ADP
ap-1470	66	6	precise	precise	ADJ
ap-1470	66	7	stacking	stacking	NOUN
ap-1470	66	8	of	of	ADP
ap-1470	66	9	optically	optically	ADV
ap-1470	66	10	formed	form	VERB
ap-1470	66	11	wafers	wafer	NOUN
ap-1470	66	12	to	to	ADP
ap-1470	66	13	a	a	DET
ap-1470	66	14	multiple	multiple	ADJ
ap-1470	66	15	array	array	NOUN
ap-1470	66	16	have	have	VERB
ap-1470	66	17	to	to	PART
ap-1470	66	18	be	be	AUX
ap-1470	66	19	developed	develop	VERB
ap-1470	66	20	.	.	PUNCT
ap-1470	67	1	the	the	DET
ap-1470	67	2	si	si	PROPN
ap-1470	67	3	wafers	wafer	NOUN
ap-1470	67	4	available	available	ADJ
ap-1470	67	5	on	on	ADP
ap-1470	67	6	the	the	DET
ap-1470	67	7	market	market	NOUN
ap-1470	67	8	are	be	AUX
ap-1470	67	9	designed	design	VERB
ap-1470	67	10	for	for	ADP
ap-1470	67	11	use	use	NOUN
ap-1470	67	12	mainly	mainly	ADV
ap-1470	67	13	in	in	ADP
ap-1470	67	14	the	the	DET
ap-1470	67	15	semiconductor	semiconductor	NOUN
ap-1470	67	16	industry	industry	NOUN
ap-1470	67	17	.	.	PUNCT
ap-1470	68	1	it	it	PRON
ap-1470	68	2	is	be	AUX
ap-1470	68	3	obvious	obvious	ADJ
ap-1470	68	4	that	that	SCONJ
ap-1470	68	5	the	the	DET
ap-1470	68	6	requirements	requirement	NOUN
ap-1470	68	7	of	of	ADP
ap-1470	68	8	this	this	DET
ap-1470	68	9	industry	industry	NOUN
ap-1470	68	10	29	29	NUM
ap-1470	68	11	acta	acta	PROPN
ap-1470	68	12	polytechnica	polytechnica	PROPN
ap-1470	68	13	vol	vol	NOUN
ap-1470	68	14	.	.	PUNCT
ap-1470	69	1	51	51	NUM
ap-1470	69	2	no	no	INTJ
ap-1470	69	3	.	.	PUNCT
ap-1470	70	1	6/2011	6/2011	NUM
ap-1470	70	2	are	be	AUX
ap-1470	70	3	not	not	PART
ap-1470	70	4	the	the	DET
ap-1470	70	5	same	same	ADJ
ap-1470	70	6	as	as	ADP
ap-1470	70	7	the	the	DET
ap-1470	70	8	requirements	requirement	NOUN
ap-1470	70	9	of	of	ADP
ap-1470	70	10	precise	precise	ADJ
ap-1470	70	11	space	space	NOUN
ap-1470	70	12	x	x	NOUN
ap-1470	70	13	-	-	NOUN
ap-1470	70	14	ray	ray	NOUN
ap-1470	70	15	optics	optic	NOUN
ap-1470	70	16	.	.	PUNCT
ap-1470	71	1	si	si	PROPN
ap-1470	71	2	wafers	wafer	NOUN
ap-1470	71	3	are	be	AUX
ap-1470	71	4	a	a	DET
ap-1470	71	5	monocrystal	monocrystal	ADJ
ap-1470	71	6	(	(	PUNCT
ap-1470	71	7	single	single	ADJ
ap-1470	71	8	crystal	crystal	NOUN
ap-1470	71	9	)	)	PUNCT
ap-1470	71	10	with	with	ADP
ap-1470	71	11	some	some	DET
ap-1470	71	12	specifics	specific	NOUN
ap-1470	71	13	,	,	PUNCT
ap-1470	71	14	and	and	CCONJ
ap-1470	71	15	this	this	PRON
ap-1470	71	16	must	must	AUX
ap-1470	71	17	also	also	ADV
ap-1470	71	18	be	be	AUX
ap-1470	71	19	taken	take	VERB
ap-1470	71	20	into	into	ADP
ap-1470	71	21	account	account	NOUN
ap-1470	71	22	.	.	PUNCT
ap-1470	72	1	moreover	moreover	ADV
ap-1470	72	2	,	,	PUNCT
ap-1470	72	3	si	si	PROPN
ap-1470	72	4	wafers	wafer	NOUN
ap-1470	72	5	are	be	AUX
ap-1470	72	6	fragile	fragile	ADJ
ap-1470	72	7	,	,	PUNCT
ap-1470	72	8	and	and	CCONJ
ap-1470	72	9	it	it	PRON
ap-1470	72	10	is	be	AUX
ap-1470	72	11	very	very	ADV
ap-1470	72	12	difficult	difficult	ADJ
ap-1470	72	13	to	to	PART
ap-1470	72	14	bend	bend	VERB
ap-1470	72	15	and/or	and/or	CCONJ
ap-1470	72	16	shape	shape	VERB
ap-1470	72	17	them	they	PRON
ap-1470	72	18	precisely	precisely	ADV
ap-1470	72	19	for	for	ADP
ap-1470	72	20	the	the	DET
ap-1470	72	21	thicknesses	thickness	NOUN
ap-1470	72	22	required	require	VERB
ap-1470	72	23	for	for	ADP
ap-1470	72	24	x	x	NOUN
ap-1470	72	25	-	-	NOUN
ap-1470	72	26	ray	ray	NOUN
ap-1470	72	27	telescopes	telescope	NOUN
ap-1470	72	28	,	,	PUNCT
ap-1470	72	29	i.e.	i.e.	X
ap-1470	72	30	around	around	ADV
ap-1470	72	31	0.3–1.0	0.3–1.0	NOUN
ap-1470	73	1	mm	mm	INTJ
ap-1470	73	2	.	.	PUNCT
ap-1470	74	1	an	an	DET
ap-1470	74	2	exception	exception	NOUN
ap-1470	74	3	is	be	AUX
ap-1470	74	4	thin	thin	ADJ
ap-1470	74	5	si	si	NOUN
ap-1470	74	6	wafers	wafer	NOUN
ap-1470	74	7	below	below	ADP
ap-1470	74	8	0.1	0.1	NUM
ap-1470	74	9	mm	mm	NOUN
ap-1470	74	10	in	in	ADP
ap-1470	74	11	thickness	thickness	NOUN
ap-1470	74	12	.	.	PUNCT
ap-1470	75	1	however	however	ADV
ap-1470	75	2	,	,	PUNCT
ap-1470	75	3	these	these	PRON
ap-1470	75	4	can	can	AUX
ap-1470	75	5	be	be	AUX
ap-1470	75	6	hardly	hardly	ADV
ap-1470	75	7	used	use	VERB
ap-1470	75	8	in	in	ADP
ap-1470	75	9	this	this	DET
ap-1470	75	10	type	type	NOUN
ap-1470	75	11	of	of	ADP
ap-1470	75	12	x	x	NOUN
ap-1470	75	13	-	-	NOUN
ap-1470	75	14	ray	ray	NOUN
ap-1470	75	15	optics	optic	NOUN
ap-1470	75	16	because	because	SCONJ
ap-1470	75	17	of	of	ADP
ap-1470	75	18	diffraction	diffraction	NOUN
ap-1470	75	19	limits	limit	NOUN
ap-1470	75	20	.	.	PUNCT
ap-1470	76	1	also	also	ADV
ap-1470	76	2	,	,	PUNCT
ap-1470	76	3	while	while	SCONJ
ap-1470	76	4	their	their	PRON
ap-1470	76	5	thickness	thickness	NOUN
ap-1470	76	6	homogeneity	homogeneity	NOUN
ap-1470	76	7	is	be	AUX
ap-1470	76	8	mostly	mostly	ADV
ap-1470	76	9	perfect	perfect	ADJ
ap-1470	76	10	,	,	PUNCT
ap-1470	76	11	the	the	DET
ap-1470	76	12	same	same	ADJ
ap-1470	76	13	is	be	AUX
ap-1470	76	14	not	not	PART
ap-1470	76	15	true	true	ADJ
ap-1470	76	16	in	in	ADP
ap-1470	76	17	the	the	DET
ap-1470	76	18	case	case	NOUN
ap-1470	76	19	of	of	ADP
ap-1470	76	20	commercially	commercially	ADV
ap-1470	76	21	available	available	ADJ
ap-1470	76	22	wafers	wafer	NOUN
ap-1470	76	23	for	for	ADP
ap-1470	76	24	their	their	PRON
ap-1470	76	25	flatness	flatness	NOUN
ap-1470	76	26	(	(	PUNCT
ap-1470	76	27	note	note	VERB
ap-1470	76	28	that	that	SCONJ
ap-1470	76	29	we	we	PRON
ap-1470	76	30	refer	refer	VERB
ap-1470	76	31	here	here	ADV
ap-1470	76	32	to	to	ADP
ap-1470	76	33	the	the	DET
ap-1470	76	34	deviation	deviation	NOUN
ap-1470	76	35	of	of	ADP
ap-1470	76	36	the	the	DET
ap-1470	76	37	upper	upper	ADJ
ap-1470	76	38	surface	surface	NOUN
ap-1470	76	39	of	of	ADP
ap-1470	76	40	a	a	DET
ap-1470	76	41	free	free	ADV
ap-1470	76	42	-	-	PUNCT
ap-1470	76	43	standing	stand	VERB
ap-1470	76	44	si	si	NOUN
ap-1470	76	45	wafer	wafer	NOUN
ap-1470	76	46	from	from	ADP
ap-1470	76	47	the	the	DET
ap-1470	76	48	ideal	ideal	ADJ
ap-1470	76	49	plane	plane	NOUN
ap-1470	76	50	,	,	PUNCT
ap-1470	76	51	while	while	SCONJ
ap-1470	76	52	in	in	ADP
ap-1470	76	53	the	the	DET
ap-1470	76	54	semiconductor	semiconductor	NOUN
ap-1470	76	55	community	community	NOUN
ap-1470	76	56	flatness	flatness	NOUN
ap-1470	76	57	is	be	AUX
ap-1470	76	58	usually	usually	ADV
ap-1470	76	59	represented	represent	VERB
ap-1470	76	60	by	by	ADP
ap-1470	76	61	a	a	DET
ap-1470	76	62	set	set	NOUN
ap-1470	76	63	of	of	ADP
ap-1470	76	64	parameters	parameter	NOUN
ap-1470	76	65	)	)	PUNCT
ap-1470	76	66	.	.	PUNCT
ap-1470	77	1	in	in	ADP
ap-1470	77	2	order	order	NOUN
ap-1470	77	3	to	to	PART
ap-1470	77	4	achieve	achieve	VERB
ap-1470	77	5	the	the	DET
ap-1470	77	6	very	very	ADV
ap-1470	77	7	high	high	ADJ
ap-1470	77	8	accuracy	accuracy	NOUN
ap-1470	77	9	required	require	VERB
ap-1470	77	10	by	by	ADP
ap-1470	77	11	esa	esa	PROPN
ap-1470	77	12	for	for	ADP
ap-1470	77	13	future	future	ADJ
ap-1470	77	14	large	large	ADJ
ap-1470	77	15	space	space	NOUN
ap-1470	77	16	x	x	NOUN
ap-1470	77	17	-	-	NOUN
ap-1470	77	18	ray	ray	NOUN
ap-1470	77	19	telescopes	telescope	NOUN
ap-1470	77	20	like	like	ADP
ap-1470	77	21	athena	athena	PROPN
ap-1470	77	22	,	,	PUNCT
ap-1470	77	23	the	the	DET
ap-1470	77	24	parameters	parameter	NOUN
ap-1470	77	25	of	of	ADP
ap-1470	77	26	the	the	DET
ap-1470	77	27	si	si	PROPN
ap-1470	77	28	wafers	wafer	NOUN
ap-1470	77	29	need	need	VERB
ap-1470	77	30	to	to	PART
ap-1470	77	31	be	be	AUX
ap-1470	77	32	optimized	optimize	VERB
ap-1470	77	33	(	(	PUNCT
ap-1470	77	34	for	for	ADP
ap-1470	77	35	application	application	NOUN
ap-1470	77	36	in	in	ADP
ap-1470	77	37	x	x	NOUN
ap-1470	77	38	-	-	NOUN
ap-1470	77	39	ray	ray	NOUN
ap-1470	77	40	optics	optic	NOUN
ap-1470	77	41	)	)	PUNCT
ap-1470	77	42	at	at	ADP
ap-1470	77	43	the	the	DET
ap-1470	77	44	production	production	NOUN
ap-1470	77	45	stage	stage	NOUN
ap-1470	77	46	.	.	PUNCT
ap-1470	78	1	for	for	ADP
ap-1470	78	2	this	this	DET
ap-1470	78	3	purpose	purpose	NOUN
ap-1470	78	4	we	we	PRON
ap-1470	78	5	have	have	AUX
ap-1470	78	6	established	establish	VERB
ap-1470	78	7	and	and	CCONJ
ap-1470	78	8	developed	develop	VERB
ap-1470	78	9	a	a	DET
ap-1470	78	10	multidisciplinary	multidisciplinary	ADJ
ap-1470	78	11	working	work	VERB
ap-1470	78	12	group	group	NOUN
ap-1470	78	13	including	include	VERB
ap-1470	78	14	specialists	specialist	NOUN
ap-1470	78	15	from	from	ADP
ap-1470	78	16	the	the	DET
ap-1470	78	17	development	development	NOUN
ap-1470	78	18	department	department	PROPN
ap-1470	78	19	of	of	ADP
ap-1470	78	20	the	the	DET
ap-1470	78	21	si	si	NOUN
ap-1470	78	22	wafer	wafer	NOUN
ap-1470	78	23	industry	industry	NOUN
ap-1470	78	24	with	with	ADP
ap-1470	78	25	the	the	DET
ap-1470	78	26	goal	goal	NOUN
ap-1470	78	27	to	to	PART
ap-1470	78	28	design	design	VERB
ap-1470	78	29	and	and	CCONJ
ap-1470	78	30	manufacture	manufacture	VERB
ap-1470	78	31	si	si	NOUN
ap-1470	78	32	wafers	wafer	NOUN
ap-1470	78	33	with	with	ADP
ap-1470	78	34	improved	improved	ADJ
ap-1470	78	35	parameters	parameter	NOUN
ap-1470	78	36	(	(	PUNCT
ap-1470	78	37	mostly	mostly	ADV
ap-1470	78	38	flatness	flatness	NOUN
ap-1470	78	39	)	)	PUNCT
ap-1470	78	40	optimized	optimize	VERB
ap-1470	78	41	for	for	ADP
ap-1470	78	42	application	application	NOUN
ap-1470	78	43	in	in	ADP
ap-1470	78	44	x	x	NOUN
ap-1470	78	45	-	-	NOUN
ap-1470	78	46	ray	ray	NOUN
ap-1470	78	47	telescopes	telescope	NOUN
ap-1470	78	48	.	.	PUNCT
ap-1470	79	1	it	it	PRON
ap-1470	79	2	should	should	AUX
ap-1470	79	3	be	be	AUX
ap-1470	79	4	noted	note	VERB
ap-1470	79	5	that	that	SCONJ
ap-1470	79	6	the	the	DET
ap-1470	79	7	manufacture	manufacture	NOUN
ap-1470	79	8	of	of	ADP
ap-1470	79	9	silicon	silicon	NOUN
ap-1470	79	10	wafers	wafer	NOUN
ap-1470	79	11	is	be	AUX
ap-1470	79	12	a	a	DET
ap-1470	79	13	complicated	complicated	ADJ
ap-1470	79	14	process	process	NOUN
ap-1470	79	15	with	with	ADP
ap-1470	79	16	numerous	numerous	ADJ
ap-1470	79	17	technological	technological	ADJ
ap-1470	79	18	steps	step	NOUN
ap-1470	79	19	and	and	CCONJ
ap-1470	79	20	with	with	ADP
ap-1470	79	21	many	many	ADJ
ap-1470	79	22	free	free	ADJ
ap-1470	79	23	parameters	parameter	NOUN
ap-1470	79	24	that	that	PRON
ap-1470	79	25	can	can	AUX
ap-1470	79	26	be	be	AUX
ap-1470	79	27	modified	modify	VERB
ap-1470	79	28	and	and	CCONJ
ap-1470	79	29	optimized	optimize	VERB
ap-1470	79	30	to	to	PART
ap-1470	79	31	achieve	achieve	VERB
ap-1470	79	32	optimal	optimal	ADJ
ap-1470	79	33	performance	performance	NOUN
ap-1470	79	34	.	.	PUNCT
ap-1470	80	1	this	this	PRON
ap-1470	80	2	can	can	AUX
ap-1470	80	3	also	also	ADV
ap-1470	80	4	be	be	AUX
ap-1470	80	5	useful	useful	ADJ
ap-1470	80	6	for	for	ADP
ap-1470	80	7	further	far	ADV
ap-1470	80	8	improving	improve	VERB
ap-1470	80	9	the	the	DET
ap-1470	80	10	quality	quality	NOUN
ap-1470	80	11	of	of	ADP
ap-1470	80	12	x	x	PROPN
ap-1470	80	13	-	-	ADJ
ap-1470	80	14	hpo	hpo	NOUN
ap-1470	80	15	optics	optic	NOUN
ap-1470	80	16	.	.	PUNCT
ap-1470	81	1	as	as	SCONJ
ap-1470	81	2	we	we	PRON
ap-1470	81	3	are	be	AUX
ap-1470	81	4	dealing	deal	VERB
ap-1470	81	5	with	with	ADP
ap-1470	81	6	high	high	ADJ
ap-1470	81	7	-	-	PUNCT
ap-1470	81	8	quality	quality	NOUN
ap-1470	81	9	x	x	NOUN
ap-1470	81	10	-	-	NOUN
ap-1470	81	11	ray	ray	NOUN
ap-1470	81	12	imaging	imaging	NOUN
ap-1470	81	13	,	,	PUNCT
ap-1470	81	14	the	the	DET
ap-1470	81	15	smoothness	smoothness	NOUN
ap-1470	81	16	of	of	ADP
ap-1470	81	17	the	the	DET
ap-1470	81	18	reflecting	reflect	VERB
ap-1470	81	19	surface	surface	NOUN
ap-1470	81	20	is	be	AUX
ap-1470	81	21	important	important	ADJ
ap-1470	81	22	.	.	PUNCT
ap-1470	82	1	the	the	DET
ap-1470	82	2	standard	standard	ADJ
ap-1470	82	3	microroughness	microroughness	NOUN
ap-1470	82	4	of	of	ADP
ap-1470	82	5	commercially	commercially	ADV
ap-1470	82	6	available	available	ADJ
ap-1470	82	7	si	si	NOUN
ap-1470	82	8	wafers	wafer	NOUN
ap-1470	82	9	(	(	PUNCT
ap-1470	82	10	we	we	PRON
ap-1470	82	11	have	have	AUX
ap-1470	82	12	used	use	VERB
ap-1470	82	13	the	the	DET
ap-1470	82	14	products	product	NOUN
ap-1470	82	15	of	of	ADP
ap-1470	82	16	on	on	ADP
ap-1470	82	17	semiconductor	semiconductor	NOUN
ap-1470	82	18	,	,	PUNCT
ap-1470	82	19	czech	czech	PROPN
ap-1470	82	20	republic	republic	NOUN
ap-1470	82	21	)	)	PUNCT
ap-1470	82	22	is	be	AUX
ap-1470	82	23	of	of	ADP
ap-1470	82	24	the	the	DET
ap-1470	82	25	order	order	NOUN
ap-1470	82	26	of	of	ADP
ap-1470	82	27	0.1	0.1	NUM
ap-1470	82	28	nm	nm	NOUN
ap-1470	82	29	,	,	PUNCT
ap-1470	82	30	as	as	SCONJ
ap-1470	82	31	confirmed	confirm	VERB
ap-1470	82	32	by	by	ADP
ap-1470	82	33	several	several	ADJ
ap-1470	82	34	independent	independent	ADJ
ap-1470	82	35	measurements	measurement	NOUN
ap-1470	82	36	using	use	VERB
ap-1470	82	37	various	various	ADJ
ap-1470	82	38	techniques	technique	NOUN
ap-1470	82	39	including	include	VERB
ap-1470	82	40	the	the	DET
ap-1470	82	41	atomic	atomic	ADJ
ap-1470	82	42	force	force	NOUN
ap-1470	82	43	microscope	microscope	NOUN
ap-1470	82	44	(	(	PUNCT
ap-1470	82	45	afm	afm	PROPN
ap-1470	82	46	)	)	PUNCT
ap-1470	82	47	.	.	PUNCT
ap-1470	83	1	this	this	PRON
ap-1470	83	2	is	be	AUX
ap-1470	83	3	related	relate	VERB
ap-1470	83	4	to	to	ADP
ap-1470	83	5	the	the	DET
ap-1470	83	6	method	method	NOUN
ap-1470	83	7	of	of	ADP
ap-1470	83	8	chemical	chemical	NOUN
ap-1470	83	9	polishing	polishing	NOUN
ap-1470	83	10	used	use	VERB
ap-1470	83	11	in	in	ADP
ap-1470	83	12	the	the	DET
ap-1470	83	13	manufacture	manufacture	NOUN
ap-1470	83	14	of	of	ADP
ap-1470	83	15	si	si	NOUN
ap-1470	83	16	wafers	wafer	NOUN
ap-1470	83	17	.	.	PUNCT
ap-1470	84	1	the	the	DET
ap-1470	84	2	microroughness	microroughness	PROPN
ap-1470	84	3	of	of	ADP
ap-1470	84	4	si	si	NOUN
ap-1470	84	5	wafers	wafer	NOUN
ap-1470	84	6	exceeds	exceed	VERB
ap-1470	84	7	the	the	DET
ap-1470	84	8	microroughness	microroughness	NOUN
ap-1470	84	9	of	of	ADP
ap-1470	84	10	glass	glass	NOUN
ap-1470	84	11	foils	foil	NOUN
ap-1470	84	12	and	and	CCONJ
ap-1470	84	13	most	most	ADJ
ap-1470	84	14	other	other	ADJ
ap-1470	84	15	alternative	alternative	ADJ
ap-1470	84	16	mirror	mirror	NOUN
ap-1470	84	17	materials	material	NOUN
ap-1470	84	18	and	and	CCONJ
ap-1470	84	19	substrates	substrate	NOUN
ap-1470	84	20	.	.	PUNCT
ap-1470	85	1	the	the	DET
ap-1470	85	2	flatness	flatness	NOUN
ap-1470	85	3	(	(	PUNCT
ap-1470	85	4	in	in	ADP
ap-1470	85	5	the	the	DET
ap-1470	85	6	sense	sense	NOUN
ap-1470	85	7	of	of	ADP
ap-1470	85	8	the	the	DET
ap-1470	85	9	deviation	deviation	NOUN
ap-1470	85	10	of	of	ADP
ap-1470	85	11	the	the	DET
ap-1470	85	12	upper	upper	ADJ
ap-1470	85	13	surface	surface	NOUN
ap-1470	85	14	of	of	ADP
ap-1470	85	15	a	a	DET
ap-1470	85	16	free	free	ADV
ap-1470	85	17	-	-	PUNCT
ap-1470	85	18	standing	stand	VERB
ap-1470	85	19	si	si	NOUN
ap-1470	85	20	wafer	wafer	NOUN
ap-1470	85	21	from	from	ADP
ap-1470	85	22	a	a	DET
ap-1470	85	23	plane	plane	NOUN
ap-1470	85	24	)	)	PUNCT
ap-1470	85	25	of	of	ADP
ap-1470	85	26	commercially	commercially	ADV
ap-1470	85	27	available	available	ADJ
ap-1470	85	28	si	si	PROPN
ap-1470	85	29	wafers	wafer	NOUN
ap-1470	85	30	was	be	AUX
ap-1470	85	31	however	however	ADV
ap-1470	85	32	found	find	VERB
ap-1470	85	33	not	not	PART
ap-1470	85	34	to	to	PART
ap-1470	85	35	be	be	AUX
ap-1470	85	36	optimal	optimal	ADJ
ap-1470	85	37	for	for	ADP
ap-1470	85	38	use	use	NOUN
ap-1470	85	39	in	in	ADP
ap-1470	85	40	high	high	ADJ
ap-1470	85	41	-	-	PUNCT
ap-1470	85	42	quality	quality	NOUN
ap-1470	85	43	(	(	PUNCT
ap-1470	85	44	order	order	NOUN
ap-1470	85	45	of	of	ADP
ap-1470	85	46	arcsec	arcsec	PROPN
ap-1470	85	47	angular	angular	ADJ
ap-1470	85	48	resolutions	resolution	NOUN
ap-1470	85	49	)	)	PUNCT
ap-1470	86	1	x	x	X
ap-1470	86	2	-	-	NOUN
ap-1470	86	3	ray	ray	NOUN
ap-1470	86	4	optics	optic	NOUN
ap-1470	86	5	.	.	PUNCT
ap-1470	87	1	most	most	ADJ
ap-1470	87	2	si	si	NOUN
ap-1470	87	3	wafers	wafer	NOUN
ap-1470	87	4	show	show	VERB
ap-1470	87	5	deviations	deviation	NOUN
ap-1470	87	6	from	from	ADP
ap-1470	87	7	the	the	DET
ap-1470	87	8	plane	plane	NOUN
ap-1470	87	9	of	of	ADP
ap-1470	87	10	the	the	DET
ap-1470	87	11	order	order	NOUN
ap-1470	87	12	of	of	ADP
ap-1470	87	13	a	a	DET
ap-1470	87	14	few	few	ADJ
ap-1470	87	15	tens	ten	NOUN
ap-1470	87	16	of	of	ADP
ap-1470	87	17	microns	micron	NOUN
ap-1470	87	18	.	.	PUNCT
ap-1470	88	1	after	after	ADP
ap-1470	88	2	modifying	modify	VERB
ap-1470	88	3	the	the	DET
ap-1470	88	4	technological	technological	ADJ
ap-1470	88	5	process	process	NOUN
ap-1470	88	6	during	during	ADP
ap-1470	88	7	si	si	PROPN
ap-1470	88	8	wafer	wafer	NOUN
ap-1470	88	9	manufacture	manufacture	NOUN
ap-1470	88	10	,	,	PUNCT
ap-1470	88	11	we	we	PRON
ap-1470	88	12	were	be	AUX
ap-1470	88	13	able	able	ADJ
ap-1470	88	14	to	to	PART
ap-1470	88	15	reduce	reduce	VERB
ap-1470	88	16	this	this	DET
ap-1470	88	17	value	value	NOUN
ap-1470	88	18	to	to	ADP
ap-1470	88	19	just	just	ADV
ap-1470	88	20	a	a	DET
ap-1470	88	21	few	few	ADJ
ap-1470	88	22	microns	micron	NOUN
ap-1470	88	23	.	.	PUNCT
ap-1470	89	1	also	also	ADV
ap-1470	89	2	,	,	PUNCT
ap-1470	89	3	the	the	DET
ap-1470	89	4	thickness	thickness	NOUN
ap-1470	89	5	homogeneity	homogeneity	NOUN
ap-1470	89	6	was	be	AUX
ap-1470	89	7	improved	improve	VERB
ap-1470	89	8	.	.	PUNCT
ap-1470	90	1	in	in	ADP
ap-1470	90	2	collaboration	collaboration	NOUN
ap-1470	90	3	with	with	ADP
ap-1470	90	4	the	the	DET
ap-1470	90	5	manufacturer	manufacturer	NOUN
ap-1470	90	6	,	,	PUNCT
ap-1470	90	7	further	further	ADJ
ap-1470	90	8	steps	step	NOUN
ap-1470	90	9	are	be	AUX
ap-1470	90	10	planned	plan	VERB
ap-1470	90	11	to	to	PART
ap-1470	90	12	improve	improve	VERB
ap-1470	90	13	the	the	DET
ap-1470	90	14	flatness	flatness	NOUN
ap-1470	90	15	(	(	PUNCT
ap-1470	90	16	deviation	deviation	NOUN
ap-1470	90	17	from	from	ADP
ap-1470	90	18	an	an	DET
ap-1470	90	19	ideal	ideal	ADJ
ap-1470	90	20	plane	plane	NOUN
ap-1470	90	21	)	)	PUNCT
ap-1470	90	22	and	and	CCONJ
ap-1470	90	23	the	the	DET
ap-1470	90	24	thickness	thickness	NOUN
ap-1470	90	25	homogeneity	homogeneity	NOUN
ap-1470	90	26	of	of	ADP
ap-1470	90	27	si	si	NOUN
ap-1470	90	28	wafers	wafer	NOUN
ap-1470	90	29	.	.	PUNCT
ap-1470	91	1	these	these	PRON
ap-1470	91	2	and	and	CCONJ
ap-1470	91	3	planned	planned	ADJ
ap-1470	91	4	improvements	improvement	NOUN
ap-1470	91	5	introduced	introduce	VERB
ap-1470	91	6	at	at	ADP
ap-1470	91	7	the	the	DET
ap-1470	91	8	si	si	NOUN
ap-1470	91	9	wafer	wafer	NOUN
ap-1470	91	10	manufacture	manufacture	NOUN
ap-1470	91	11	stage	stage	NOUN
ap-1470	91	12	can	can	AUX
ap-1470	91	13	also	also	ADV
ap-1470	91	14	be	be	AUX
ap-1470	91	15	applied	apply	VERB
ap-1470	91	16	for	for	ADP
ap-1470	91	17	other	other	ADJ
ap-1470	91	18	designs	design	NOUN
ap-1470	91	19	of	of	ADP
ap-1470	91	20	si	si	NOUN
ap-1470	91	21	wafer	wafer	NOUN
ap-1470	91	22	optics	optic	NOUN
ap-1470	91	23	including	include	VERB
ap-1470	91	24	x	x	NOUN
ap-1470	91	25	-	-	NOUN
ap-1470	91	26	hpo	hpo	NOUN
ap-1470	91	27	,	,	PUNCT
ap-1470	91	28	and	and	CCONJ
ap-1470	91	29	can	can	AUX
ap-1470	91	30	play	play	VERB
ap-1470	91	31	a	a	DET
ap-1470	91	32	crucial	crucial	ADJ
ap-1470	91	33	role	role	NOUN
ap-1470	91	34	in	in	ADP
ap-1470	91	35	the	the	DET
ap-1470	91	36	athena	athena	NOUN
ap-1470	91	37	project	project	NOUN
ap-1470	91	38	.	.	PUNCT
ap-1470	92	1	the	the	DET
ap-1470	92	2	x	x	NOUN
ap-1470	92	3	-	-	NOUN
ap-1470	92	4	ray	ray	NOUN
ap-1470	92	5	optics	optic	NOUN
ap-1470	92	6	design	design	NOUN
ap-1470	92	7	for	for	ADP
ap-1470	92	8	athena	athena	NOUN
ap-1470	92	9	is	be	AUX
ap-1470	92	10	based	base	VERB
ap-1470	92	11	on	on	ADP
ap-1470	92	12	the	the	DET
ap-1470	92	13	wolter	wolter	NOUN
ap-1470	92	14	1	1	NUM
ap-1470	92	15	arrangement	arrangement	NOUN
ap-1470	92	16	,	,	PUNCT
ap-1470	92	17	and	and	CCONJ
ap-1470	92	18	hence	hence	ADV
ap-1470	92	19	requires	require	VERB
ap-1470	92	20	curved	curved	ADJ
ap-1470	92	21	surfaces	surface	NOUN
ap-1470	92	22	.	.	PUNCT
ap-1470	93	1	however	however	ADV
ap-1470	93	2	,	,	PUNCT
ap-1470	93	3	due	due	ADP
ap-1470	93	4	to	to	ADP
ap-1470	93	5	the	the	DET
ap-1470	93	6	material	material	NOUN
ap-1470	93	7	properties	property	NOUN
ap-1470	93	8	of	of	ADP
ap-1470	93	9	monocrystalline	monocrystalline	ADJ
ap-1470	93	10	si	si	X
ap-1470	93	11	,	,	PUNCT
ap-1470	93	12	si	si	NOUN
ap-1470	93	13	wafers	wafer	NOUN
ap-1470	93	14	(	(	PUNCT
ap-1470	93	15	except	except	SCONJ
ap-1470	93	16	very	very	ADV
ap-1470	93	17	thin	thin	ADJ
ap-1470	93	18	ones	one	NOUN
ap-1470	93	19	)	)	PUNCT
ap-1470	93	20	are	be	AUX
ap-1470	93	21	extremely	extremely	ADV
ap-1470	93	22	difficult	difficult	ADJ
ap-1470	93	23	to	to	PART
ap-1470	93	24	shape	shape	VERB
ap-1470	93	25	.	.	PUNCT
ap-1470	94	1	it	it	PRON
ap-1470	94	2	is	be	AUX
ap-1470	94	3	obvious	obvious	ADJ
ap-1470	94	4	that	that	SCONJ
ap-1470	94	5	we	we	PRON
ap-1470	94	6	have	have	VERB
ap-1470	94	7	to	to	PART
ap-1470	94	8	overcome	overcome	VERB
ap-1470	94	9	this	this	DET
ap-1470	94	10	problem	problem	NOUN
ap-1470	94	11	in	in	ADP
ap-1470	94	12	order	order	NOUN
ap-1470	94	13	to	to	PART
ap-1470	94	14	achieve	achieve	VERB
ap-1470	94	15	the	the	DET
ap-1470	94	16	fine	fine	ADJ
ap-1470	94	17	accuracy	accuracy	NOUN
ap-1470	94	18	and	and	CCONJ
ap-1470	94	19	stability	stability	NOUN
ap-1470	94	20	required	require	VERB
ap-1470	94	21	for	for	ADP
ap-1470	94	22	future	future	ADJ
ap-1470	94	23	large	large	ADJ
ap-1470	94	24	x	x	ADJ
ap-1470	94	25	-	-	NOUN
ap-1470	94	26	ray	ray	NOUN
ap-1470	94	27	telescopes	telescope	NOUN
ap-1470	94	28	.	.	PUNCT
ap-1470	95	1	the	the	DET
ap-1470	95	2	final	final	ADJ
ap-1470	95	3	goal	goal	NOUN
ap-1470	95	4	is	be	AUX
ap-1470	95	5	to	to	PART
ap-1470	95	6	provide	provide	VERB
ap-1470	95	7	optically	optically	ADV
ap-1470	95	8	shaped	shape	VERB
ap-1470	95	9	si	si	NOUN
ap-1470	95	10	wafers	wafer	NOUN
ap-1470	95	11	with	with	ADP
ap-1470	95	12	no	no	PRON
ap-1470	95	13	or	or	CCONJ
ap-1470	95	14	little	little	ADJ
ap-1470	95	15	internal	internal	ADJ
ap-1470	95	16	stress	stress	NOUN
ap-1470	95	17	.	.	PUNCT
ap-1470	96	1	three	three	NUM
ap-1470	96	2	different	different	ADJ
ap-1470	96	3	alternative	alternative	ADJ
ap-1470	96	4	technologies	technology	NOUN
ap-1470	96	5	for	for	ADP
ap-1470	96	6	shaping	shape	VERB
ap-1470	96	7	si	si	NOUN
ap-1470	96	8	wafers	wafer	NOUN
ap-1470	96	9	have	have	AUX
ap-1470	96	10	been	be	AUX
ap-1470	96	11	designed	design	VERB
ap-1470	96	12	and	and	CCONJ
ap-1470	96	13	tested	test	VERB
ap-1470	96	14	to	to	PART
ap-1470	96	15	achieve	achieve	VERB
ap-1470	96	16	precise	precise	ADJ
ap-1470	96	17	optical	optical	ADJ
ap-1470	96	18	surfaces	surface	NOUN
ap-1470	96	19	(	(	PUNCT
ap-1470	96	20	figure	figure	NOUN
ap-1470	96	21	1	1	NUM
ap-1470	96	22	)	)	PUNCT
ap-1470	96	23	.	.	PUNCT
ap-1470	97	1	the	the	DET
ap-1470	97	2	samples	sample	NOUN
ap-1470	97	3	shaped	shape	VERB
ap-1470	97	4	and	and	CCONJ
ap-1470	97	5	tested	test	VERB
ap-1470	97	6	were	be	AUX
ap-1470	97	7	typically	typically	ADV
ap-1470	97	8	100	100	NUM
ap-1470	97	9	to	to	PART
ap-1470	97	10	150	150	NUM
ap-1470	97	11	mm	mm	NOUN
ap-1470	97	12	large	large	ADJ
ap-1470	97	13	,	,	PUNCT
ap-1470	97	14	typically	typically	ADV
ap-1470	97	15	0.6	0.6	NUM
ap-1470	97	16	to	to	PART
ap-1470	97	17	1.3	1.3	NUM
ap-1470	97	18	mm	mm	NOUN
ap-1470	97	19	thick	thick	ADJ
ap-1470	97	20	,	,	PUNCT
ap-1470	97	21	and	and	CCONJ
ap-1470	97	22	were	be	AUX
ap-1470	97	23	bent	bent	ADJ
ap-1470	97	24	to	to	ADP
ap-1470	97	25	either	either	CCONJ
ap-1470	97	26	cylindrical	cylindrical	ADJ
ap-1470	97	27	or	or	CCONJ
ap-1470	97	28	parabolic	parabolic	ADJ
ap-1470	97	29	test	test	NOUN
ap-1470	97	30	surfaces	surface	NOUN
ap-1470	97	31	.	.	PUNCT
ap-1470	98	1	fig	fig	NOUN
ap-1470	98	2	.	.	PUNCT
ap-1470	99	1	1	1	NUM
ap-1470	99	2	:	:	PUNCT
ap-1470	99	3	example	example	NOUN
ap-1470	99	4	of	of	ADP
ap-1470	99	5	precise	precise	ADJ
ap-1470	99	6	silicon	silicon	NOUN
ap-1470	99	7	wafer	wafer	NOUN
ap-1470	99	8	shaping	shaping	NOUN
ap-1470	99	9	.	.	PUNCT
ap-1470	100	1	after	after	ADP
ap-1470	100	2	deposition	deposition	NOUN
ap-1470	100	3	of	of	ADP
ap-1470	100	4	poly	poly	ADJ
ap-1470	100	5	-	-	PUNCT
ap-1470	100	6	si	si	NOUN
ap-1470	100	7	(	(	PUNCT
ap-1470	100	8	thickness	thickness	NOUN
ap-1470	100	9	1	1	NUM
ap-1470	100	10	436	436	NUM
ap-1470	100	11	nm	nm	NOUN
ap-1470	100	12	at	at	ADP
ap-1470	100	13	temperature	temperature	NOUN
ap-1470	100	14	615	615	NUM
ap-1470	100	15	◦	◦	NOUN
ap-1470	100	16	c	c	NOUN
ap-1470	100	17	)	)	PUNCT
ap-1470	100	18	and	and	CCONJ
ap-1470	100	19	for	for	ADP
ap-1470	100	20	wafer	wafer	NOUN
ap-1470	100	21	thickness	thickness	NOUN
ap-1470	100	22	507	507	NUM
ap-1470	100	23	μm	μm	NOUN
ap-1470	100	24	,	,	PUNCT
ap-1470	100	25	a	a	DET
ap-1470	100	26	warp	warp	NOUN
ap-1470	100	27	of	of	ADP
ap-1470	100	28	110	110	NUM
ap-1470	100	29	mm	mm	NOUN
ap-1470	100	30	(	(	PUNCT
ap-1470	100	31	r	r	NOUN
ap-1470	100	32	=	=	SYM
ap-1470	100	33	25.6	25.6	NUM
ap-1470	100	34	m	m	NOUN
ap-1470	100	35	)	)	PUNCT
ap-1470	100	36	was	be	AUX
ap-1470	100	37	achieved	achieve	VERB
ap-1470	100	38	.	.	PUNCT
ap-1470	101	1	left	leave	VERB
ap-1470	101	2	:	:	PUNCT
ap-1470	101	3	wafer	wafer	VERB
ap-1470	101	4	deformation	deformation	NOUN
ap-1470	101	5	map	map	NOUN
ap-1470	101	6	.	.	PUNCT
ap-1470	102	1	right	right	ADJ
ap-1470	102	2	:	:	PUNCT
ap-1470	102	3	warp	warp	VERB
ap-1470	102	4	profile	profile	NOUN
ap-1470	102	5	perpendicular	perpendicular	NOUN
ap-1470	102	6	to	to	ADP
ap-1470	102	7	the	the	DET
ap-1470	102	8	facet	facet	ADJ
ap-1470	102	9	30	30	NUM
ap-1470	102	10	acta	acta	PROPN
ap-1470	102	11	polytechnica	polytechnica	PROPN
ap-1470	102	12	vol	vol	NOUN
ap-1470	102	13	.	.	PUNCT
ap-1470	103	1	51	51	NUM
ap-1470	103	2	no	no	INTJ
ap-1470	103	3	.	.	PUNCT
ap-1470	104	1	6/2011	6/2011	NUM
ap-1470	104	2	the	the	DET
ap-1470	104	3	development	development	NOUN
ap-1470	104	4	described	describe	VERB
ap-1470	104	5	here	here	ADV
ap-1470	104	6	is	be	AUX
ap-1470	104	7	based	base	VERB
ap-1470	104	8	on	on	ADP
ap-1470	104	9	a	a	DET
ap-1470	104	10	scientific	scientific	ADJ
ap-1470	104	11	approach	approach	NOUN
ap-1470	104	12	,	,	PUNCT
ap-1470	104	13	and	and	CCONJ
ap-1470	104	14	hence	hence	ADV
ap-1470	104	15	the	the	DET
ap-1470	104	16	large	large	ADJ
ap-1470	104	17	number	number	NOUN
ap-1470	104	18	of	of	ADP
ap-1470	104	19	samples	sample	NOUN
ap-1470	104	20	formed	form	VERB
ap-1470	104	21	with	with	ADP
ap-1470	104	22	different	different	ADJ
ap-1470	104	23	parameters	parameter	NOUN
ap-1470	104	24	must	must	AUX
ap-1470	104	25	be	be	AUX
ap-1470	104	26	precisely	precisely	ADV
ap-1470	104	27	measured	measure	VERB
ap-1470	104	28	and	and	CCONJ
ap-1470	104	29	investigated	investigate	VERB
ap-1470	104	30	in	in	ADP
ap-1470	104	31	detail	detail	NOUN
ap-1470	104	32	.	.	PUNCT
ap-1470	105	1	especially	especially	ADV
ap-1470	105	2	precise	precise	ADJ
ap-1470	105	3	metrology	metrology	NOUN
ap-1470	105	4	and	and	CCONJ
ap-1470	105	5	measurements	measurement	NOUN
ap-1470	105	6	play	play	VERB
ap-1470	105	7	a	a	DET
ap-1470	105	8	crucial	crucial	ADJ
ap-1470	105	9	role	role	NOUN
ap-1470	105	10	in	in	ADP
ap-1470	105	11	this	this	DET
ap-1470	105	12	type	type	NOUN
ap-1470	105	13	of	of	ADP
ap-1470	105	14	experiment	experiment	NOUN
ap-1470	105	15	.	.	PUNCT
ap-1470	106	1	the	the	DET
ap-1470	106	2	samples	sample	NOUN
ap-1470	106	3	of	of	ADP
ap-1470	106	4	bent	bent	ADJ
ap-1470	106	5	wafers	wafer	NOUN
ap-1470	106	6	with	with	ADP
ap-1470	106	7	the	the	DET
ap-1470	106	8	investigated	investigate	VERB
ap-1470	106	9	technologies	technology	NOUN
ap-1470	106	10	have	have	AUX
ap-1470	106	11	been	be	AUX
ap-1470	106	12	measured	measure	VERB
ap-1470	106	13	,	,	PUNCT
ap-1470	106	14	including	include	VERB
ap-1470	106	15	taylor	taylor	PROPN
ap-1470	106	16	-	-	PUNCT
ap-1470	106	17	hobson	hobson	PROPN
ap-1470	106	18	mechanical	mechanical	ADJ
ap-1470	106	19	and	and	CCONJ
ap-1470	106	20	still	still	ADV
ap-1470	106	21	optical	optical	ADJ
ap-1470	106	22	profilometry	profilometry	NOUN
ap-1470	106	23	,	,	PUNCT
ap-1470	106	24	as	as	ADV
ap-1470	106	25	well	well	ADV
ap-1470	106	26	as	as	ADP
ap-1470	106	27	optical	optical	ADJ
ap-1470	106	28	interferometry	interferometry	NOUN
ap-1470	106	29	(	(	PUNCT
ap-1470	106	30	zygo	zygo	NOUN
ap-1470	106	31	)	)	PUNCT
ap-1470	106	32	and	and	CCONJ
ap-1470	106	33	afm	afm	PROPN
ap-1470	106	34	(	(	PUNCT
ap-1470	106	35	atomic	atomic	ADJ
ap-1470	106	36	force	force	NOUN
ap-1470	106	37	miscroscope	miscroscope	NOUN
ap-1470	106	38	)	)	PUNCT
ap-1470	106	39	analyses	analysis	NOUN
ap-1470	106	40	.	.	PUNCT
ap-1470	107	1	it	it	PRON
ap-1470	107	2	has	have	AUX
ap-1470	107	3	been	be	AUX
ap-1470	107	4	confirmed	confirm	VERB
ap-1470	107	5	that	that	SCONJ
ap-1470	107	6	all	all	DET
ap-1470	107	7	these	these	DET
ap-1470	107	8	three	three	NUM
ap-1470	107	9	technologies	technology	NOUN
ap-1470	107	10	do	do	AUX
ap-1470	107	11	not	not	PART
ap-1470	107	12	degrade	degrade	VERB
ap-1470	107	13	the	the	DET
ap-1470	107	14	intrinsic	intrinsic	ADJ
ap-1470	107	15	fine	fine	ADJ
ap-1470	107	16	microroughness	microroughness	NOUN
ap-1470	107	17	of	of	ADP
ap-1470	107	18	the	the	DET
ap-1470	107	19	wafer	wafer	NOUN
ap-1470	107	20	.	.	PUNCT
ap-1470	108	1	while	while	SCONJ
ap-1470	108	2	the	the	DET
ap-1470	108	3	two	two	NUM
ap-1470	108	4	physical	physical	ADJ
ap-1470	108	5	/	/	SYM
ap-1470	108	6	chemical	chemical	NOUN
ap-1470	108	7	technologies	technology	NOUN
ap-1470	108	8	exploited	exploit	VERB
ap-1470	108	9	give	give	VERB
ap-1470	108	10	peakto	peakto	NOUN
ap-1470	108	11	-	-	PUNCT
ap-1470	108	12	valley	valley	NOUN
ap-1470	108	13	(	(	PUNCT
ap-1470	108	14	pv	pv	NOUN
ap-1470	108	15	)	)	PUNCT
ap-1470	108	16	deviations	deviation	NOUN
ap-1470	108	17	(	(	PUNCT
ap-1470	108	18	of	of	ADP
ap-1470	108	19	the	the	DET
ap-1470	108	20	real	real	ADJ
ap-1470	108	21	surface	surface	NOUN
ap-1470	108	22	of	of	ADP
ap-1470	108	23	the	the	DET
ap-1470	108	24	sample	sample	NOUN
ap-1470	108	25	compared	compare	VERB
ap-1470	108	26	with	with	ADP
ap-1470	108	27	the	the	DET
ap-1470	108	28	ideal	ideal	ADJ
ap-1470	108	29	optical	optical	ADJ
ap-1470	108	30	surface	surface	NOUN
ap-1470	108	31	)	)	PUNCT
ap-1470	108	32	of	of	ADP
ap-1470	108	33	less	less	ADJ
ap-1470	108	34	than	than	ADP
ap-1470	108	35	1	1	NUM
ap-1470	108	36	to	to	PART
ap-1470	108	37	2	2	NUM
ap-1470	108	38	μm	μm	NOUN
ap-1470	108	39	over	over	ADP
ap-1470	108	40	the	the	DET
ap-1470	108	41	150	150	NUM
ap-1470	108	42	mm	mm	NOUN
ap-1470	108	43	sample	sample	NOUN
ap-1470	108	44	length	length	NOUN
ap-1470	108	45	as	as	ADP
ap-1470	108	46	preliminary	preliminary	ADJ
ap-1470	108	47	values	value	NOUN
ap-1470	108	48	,	,	PUNCT
ap-1470	108	49	the	the	DET
ap-1470	108	50	deviations	deviation	NOUN
ap-1470	108	51	of	of	ADP
ap-1470	108	52	the	the	DET
ap-1470	108	53	first	first	ADJ
ap-1470	108	54	thermally	thermally	ADV
ap-1470	108	55	bent	bent	ADJ
ap-1470	108	56	sample	sample	NOUN
ap-1470	108	57	are	be	AUX
ap-1470	108	58	larger	large	ADJ
ap-1470	108	59	,	,	PUNCT
ap-1470	108	60	of	of	ADP
ap-1470	108	61	the	the	DET
ap-1470	108	62	order	order	NOUN
ap-1470	108	63	of	of	ADP
ap-1470	108	64	10	10	NUM
ap-1470	108	65	μm	μm	NOUN
ap-1470	108	66	.	.	PUNCT
ap-1470	109	1	taking	take	VERB
ap-1470	109	2	into	into	ADP
ap-1470	109	3	account	account	NOUN
ap-1470	109	4	that	that	SCONJ
ap-1470	109	5	the	the	DET
ap-1470	109	6	applied	apply	VERB
ap-1470	109	7	temperatures	temperature	NOUN
ap-1470	109	8	,	,	PUNCT
ap-1470	109	9	as	as	ADV
ap-1470	109	10	well	well	ADV
ap-1470	109	11	as	as	ADP
ap-1470	109	12	other	other	ADJ
ap-1470	109	13	parameters	parameter	NOUN
ap-1470	109	14	,	,	PUNCT
ap-1470	109	15	were	be	AUX
ap-1470	109	16	not	not	PART
ap-1470	109	17	optimized	optimize	VERB
ap-1470	109	18	for	for	ADP
ap-1470	109	19	this	this	DET
ap-1470	109	20	first	first	ADJ
ap-1470	109	21	sample	sample	NOUN
ap-1470	109	22	,	,	PUNCT
ap-1470	109	23	we	we	PRON
ap-1470	109	24	anticipate	anticipate	VERB
ap-1470	109	25	that	that	SCONJ
ap-1470	109	26	the	the	DET
ap-1470	109	27	pv	pv	NOUN
ap-1470	109	28	(	(	PUNCT
ap-1470	109	29	peak	peak	NOUN
ap-1470	109	30	to	to	ADP
ap-1470	109	31	valley	valley	NOUN
ap-1470	109	32	)	)	PUNCT
ap-1470	109	33	value	value	NOUN
ap-1470	109	34	can	can	AUX
ap-1470	109	35	be	be	AUX
ap-1470	109	36	further	far	ADV
ap-1470	109	37	reduced	reduce	VERB
ap-1470	109	38	down	down	ADP
ap-1470	109	39	to	to	ADP
ap-1470	109	40	the	the	DET
ap-1470	109	41	order	order	NOUN
ap-1470	109	42	of	of	ADP
ap-1470	109	43	1	1	NUM
ap-1470	109	44	μm	μm	NOUN
ap-1470	109	45	and	and	CCONJ
ap-1470	109	46	perhaps	perhaps	ADV
ap-1470	109	47	even	even	ADV
ap-1470	109	48	below	below	ADV
ap-1470	109	49	.	.	PUNCT
ap-1470	110	1	fine	fine	ADJ
ap-1470	110	2	adjustments	adjustment	NOUN
ap-1470	110	3	of	of	ADP
ap-1470	110	4	the	the	DET
ap-1470	110	5	parameters	parameter	NOUN
ap-1470	110	6	can	can	AUX
ap-1470	110	7	also	also	ADV
ap-1470	110	8	further	far	ADV
ap-1470	110	9	improve	improve	VERB
ap-1470	110	10	the	the	DET
ap-1470	110	11	accuracy	accuracy	NOUN
ap-1470	110	12	of	of	ADP
ap-1470	110	13	the	the	DET
ap-1470	110	14	results	result	NOUN
ap-1470	110	15	for	for	ADP
ap-1470	110	16	the	the	DET
ap-1470	110	17	other	other	ADJ
ap-1470	110	18	two	two	NUM
ap-1470	110	19	techniques	technique	NOUN
ap-1470	110	20	.	.	PUNCT
ap-1470	111	1	5	5	NUM
ap-1470	111	2	the	the	DET
ap-1470	111	3	kirkpatrick	kirkpatrick	PROPN
ap-1470	111	4	-	-	PUNCT
ap-1470	111	5	baez	baez	NOUN
ap-1470	111	6	option	option	NOUN
ap-1470	111	7	although	although	SCONJ
ap-1470	111	8	wolter	wolter	NOUN
ap-1470	111	9	systems	system	NOUN
ap-1470	111	10	are	be	AUX
ap-1470	111	11	generally	generally	ADV
ap-1470	111	12	well	well	ADV
ap-1470	111	13	-	-	PUNCT
ap-1470	111	14	known	know	VERB
ap-1470	111	15	and	and	CCONJ
ap-1470	111	16	widely	widely	ADV
ap-1470	111	17	used	use	VERB
ap-1470	111	18	,	,	PUNCT
ap-1470	111	19	hans	hans	PROPN
ap-1470	111	20	wolter	wolter	PROPN
ap-1470	111	21	was	be	AUX
ap-1470	111	22	not	not	PART
ap-1470	111	23	the	the	DET
ap-1470	111	24	first	first	ADJ
ap-1470	111	25	to	to	PART
ap-1470	111	26	propose	propose	VERB
ap-1470	111	27	x	x	ADJ
ap-1470	111	28	-	-	NOUN
ap-1470	111	29	ray	ray	NOUN
ap-1470	111	30	imaging	imaging	NOUN
ap-1470	111	31	systems	system	NOUN
ap-1470	111	32	based	base	VERB
ap-1470	111	33	on	on	ADP
ap-1470	111	34	reflection	reflection	NOUN
ap-1470	111	35	of	of	ADP
ap-1470	111	36	x	x	NOUN
ap-1470	111	37	-	-	NOUN
ap-1470	111	38	rays	ray	NOUN
ap-1470	111	39	.	.	PUNCT
ap-1470	112	1	in	in	ADP
ap-1470	112	2	fact	fact	NOUN
ap-1470	112	3	,	,	PUNCT
ap-1470	112	4	the	the	DET
ap-1470	112	5	first	first	ADJ
ap-1470	112	6	grazing	grazing	NOUN
ap-1470	112	7	incidence	incidence	NOUN
ap-1470	112	8	system	system	NOUN
ap-1470	112	9	to	to	PART
ap-1470	112	10	form	form	VERB
ap-1470	112	11	a	a	DET
ap-1470	112	12	real	real	ADJ
ap-1470	112	13	image	image	NOUN
ap-1470	112	14	was	be	AUX
ap-1470	112	15	proposed	propose	VERB
ap-1470	112	16	by	by	ADP
ap-1470	112	17	kirkpatrick	kirkpatrick	PROPN
ap-1470	112	18	and	and	CCONJ
ap-1470	112	19	baez	baez	PROPN
ap-1470	112	20	in	in	ADP
ap-1470	112	21	1948	1948	NUM
ap-1470	112	22	.	.	PUNCT
ap-1470	113	1	this	this	DET
ap-1470	113	2	system	system	NOUN
ap-1470	113	3	consists	consist	VERB
ap-1470	113	4	of	of	ADP
ap-1470	113	5	a	a	DET
ap-1470	113	6	set	set	NOUN
ap-1470	113	7	of	of	ADP
ap-1470	113	8	two	two	NUM
ap-1470	113	9	orthogonal	orthogonal	ADJ
ap-1470	113	10	parabolas	parabola	NOUN
ap-1470	113	11	of	of	ADP
ap-1470	113	12	translation	translation	NOUN
ap-1470	113	13	(	(	PUNCT
ap-1470	113	14	figure	figure	NOUN
ap-1470	113	15	2	2	NUM
ap-1470	113	16	)	)	PUNCT
ap-1470	113	17	.	.	PUNCT
ap-1470	114	1	the	the	DET
ap-1470	114	2	first	first	ADJ
ap-1470	114	3	reflection	reflection	NOUN
ap-1470	114	4	focuses	focus	VERB
ap-1470	114	5	to	to	ADP
ap-1470	114	6	a	a	DET
ap-1470	114	7	line	line	NOUN
ap-1470	114	8	,	,	PUNCT
ap-1470	114	9	which	which	PRON
ap-1470	114	10	is	be	AUX
ap-1470	114	11	focused	focus	VERB
ap-1470	114	12	by	by	ADP
ap-1470	114	13	the	the	DET
ap-1470	114	14	second	second	ADJ
ap-1470	114	15	surface	surface	NOUN
ap-1470	114	16	to	to	ADP
ap-1470	114	17	a	a	DET
ap-1470	114	18	point	point	NOUN
ap-1470	114	19	.	.	PUNCT
ap-1470	115	1	this	this	PRON
ap-1470	115	2	was	be	AUX
ap-1470	115	3	necessary	necessary	ADJ
ap-1470	115	4	to	to	PART
ap-1470	115	5	avoid	avoid	VERB
ap-1470	115	6	the	the	DET
ap-1470	115	7	extreme	extreme	ADJ
ap-1470	115	8	astigmatism	astigmatism	NOUN
ap-1470	115	9	suffered	suffer	VERB
ap-1470	115	10	by	by	ADP
ap-1470	115	11	a	a	DET
ap-1470	115	12	single	single	ADJ
ap-1470	115	13	mirror	mirror	NOUN
ap-1470	115	14	,	,	PUNCT
ap-1470	115	15	but	but	CCONJ
ap-1470	115	16	it	it	PRON
ap-1470	115	17	still	still	ADV
ap-1470	115	18	was	be	AUX
ap-1470	115	19	not	not	PART
ap-1470	115	20	free	free	ADJ
ap-1470	115	21	of	of	ADP
ap-1470	115	22	geometric	geometric	ADJ
ap-1470	115	23	aberrations	aberration	NOUN
ap-1470	115	24	.	.	PUNCT
ap-1470	116	1	nevertheless	nevertheless	ADV
ap-1470	116	2	,	,	PUNCT
ap-1470	116	3	the	the	DET
ap-1470	116	4	system	system	NOUN
ap-1470	116	5	is	be	AUX
ap-1470	116	6	attractive	attractive	ADJ
ap-1470	116	7	because	because	SCONJ
ap-1470	116	8	it	it	PRON
ap-1470	116	9	is	be	AUX
ap-1470	116	10	easy	easy	ADJ
ap-1470	116	11	to	to	PART
ap-1470	116	12	construct	construct	VERB
ap-1470	116	13	the	the	DET
ap-1470	116	14	reflecting	reflect	VERB
ap-1470	116	15	surfaces	surface	NOUN
ap-1470	116	16	.	.	PUNCT
ap-1470	117	1	these	these	DET
ap-1470	117	2	surfaces	surface	NOUN
ap-1470	117	3	can	can	AUX
ap-1470	117	4	be	be	AUX
ap-1470	117	5	produced	produce	VERB
ap-1470	117	6	as	as	ADP
ap-1470	117	7	flat	flat	ADJ
ap-1470	117	8	plates	plate	NOUN
ap-1470	117	9	and	and	CCONJ
ap-1470	117	10	then	then	ADV
ap-1470	117	11	mechanically	mechanically	ADV
ap-1470	117	12	bent	bent	ADJ
ap-1470	117	13	to	to	ADP
ap-1470	117	14	the	the	DET
ap-1470	117	15	required	require	VERB
ap-1470	117	16	curvature	curvature	NOUN
ap-1470	117	17	.	.	PUNCT
ap-1470	118	1	in	in	ADP
ap-1470	118	2	order	order	NOUN
ap-1470	118	3	to	to	PART
ap-1470	118	4	increase	increase	VERB
ap-1470	118	5	the	the	DET
ap-1470	118	6	aperture	aperture	NOUN
ap-1470	118	7	,	,	PUNCT
ap-1470	118	8	a	a	DET
ap-1470	118	9	number	number	NOUN
ap-1470	118	10	of	of	ADP
ap-1470	118	11	mirrors	mirror	NOUN
ap-1470	118	12	can	can	AUX
ap-1470	118	13	be	be	AUX
ap-1470	118	14	nested	nest	VERB
ap-1470	118	15	together	together	ADV
ap-1470	118	16	,	,	PUNCT
ap-1470	118	17	but	but	CCONJ
ap-1470	118	18	it	it	PRON
ap-1470	118	19	should	should	AUX
ap-1470	118	20	be	be	AUX
ap-1470	118	21	noted	note	VERB
ap-1470	118	22	that	that	SCONJ
ap-1470	118	23	this	this	DET
ap-1470	118	24	nesting	nesting	ADJ
ap-1470	118	25	introduces	introduce	NOUN
ap-1470	118	26	additional	additional	ADJ
ap-1470	118	27	aberrations	aberration	NOUN
ap-1470	118	28	.	.	PUNCT
ap-1470	119	1	this	this	DET
ap-1470	119	2	configuration	configuration	NOUN
ap-1470	119	3	is	be	AUX
ap-1470	119	4	used	use	VERB
ap-1470	119	5	mostly	mostly	ADV
ap-1470	119	6	in	in	ADP
ap-1470	119	7	experiments	experiment	NOUN
ap-1470	119	8	not	not	PART
ap-1470	119	9	requiring	require	VERB
ap-1470	119	10	a	a	DET
ap-1470	119	11	large	large	ADJ
ap-1470	119	12	collecting	collecting	NOUN
ap-1470	119	13	area	area	NOUN
ap-1470	119	14	(	(	PUNCT
ap-1470	119	15	solar	solar	ADJ
ap-1470	119	16	,	,	PUNCT
ap-1470	119	17	laboratory	laboratory	NOUN
ap-1470	119	18	)	)	PUNCT
ap-1470	119	19	.	.	PUNCT
ap-1470	120	1	the	the	DET
ap-1470	120	2	applications	application	NOUN
ap-1470	120	3	in	in	ADP
ap-1470	120	4	x	x	NOUN
ap-1470	120	5	-	-	NOUN
ap-1470	120	6	ray	ray	NOUN
ap-1470	120	7	astronomy	astronomy	NOUN
ap-1470	120	8	and	and	CCONJ
ap-1470	120	9	astrophysics	astrophysic	NOUN
ap-1470	120	10	were	be	AUX
ap-1470	120	11	limited	limit	VERB
ap-1470	120	12	in	in	ADP
ap-1470	120	13	the	the	DET
ap-1470	120	14	past	past	NOUN
ap-1470	120	15	,	,	PUNCT
ap-1470	120	16	despite	despite	SCONJ
ap-1470	120	17	initial	initial	ADJ
ap-1470	120	18	success	success	NOUN
ap-1470	120	19	on	on	ADP
ap-1470	120	20	sounding	sound	VERB
ap-1470	120	21	rockets	rocket	NOUN
ap-1470	120	22	(	(	PUNCT
ap-1470	120	23	e.g.	e.g.	ADV
ap-1470	120	24	gorenstein	gorenstein	VERB
ap-1470	120	25	et	et	PROPN
ap-1470	120	26	al	al	PROPN
ap-1470	120	27	.	.	PROPN
ap-1470	120	28	,	,	PUNCT
ap-1470	120	29	1978	1978	NUM
ap-1470	120	30	)	)	PUNCT
ap-1470	120	31	.	.	PUNCT
ap-1470	121	1	nevertheless	nevertheless	ADV
ap-1470	121	2	,	,	PUNCT
ap-1470	121	3	large	large	ADJ
ap-1470	121	4	modules	module	NOUN
ap-1470	121	5	of	of	ADP
ap-1470	121	6	kirkpatrick	kirkpatrick	PROPN
ap-1470	121	7	-	-	PUNCT
ap-1470	121	8	baez	baez	PROPN
ap-1470	121	9	(	(	PUNCT
ap-1470	121	10	kb	kb	PROPN
ap-1470	121	11	)	)	PUNCT
ap-1470	121	12	mirrors	mirror	NOUN
ap-1470	121	13	based	base	VERB
ap-1470	121	14	on	on	ADP
ap-1470	121	15	float	float	ADJ
ap-1470	121	16	glass	glass	NOUN
ap-1470	121	17	have	have	AUX
ap-1470	121	18	also	also	ADV
ap-1470	121	19	been	be	AUX
ap-1470	121	20	suggested	suggest	VERB
ap-1470	121	21	for	for	ADP
ap-1470	121	22	stellar	stellar	ADJ
ap-1470	121	23	x	x	ADJ
ap-1470	121	24	-	-	NOUN
ap-1470	121	25	ray	ray	NOUN
ap-1470	121	26	experiments	experiment	NOUN
ap-1470	121	27	(	(	PUNCT
ap-1470	121	28	lamar	lamar	PROPN
ap-1470	121	29	experiment	experiment	NOUN
ap-1470	121	30	in	in	ADP
ap-1470	121	31	kb	kb	PROPN
ap-1470	121	32	configuration	configuration	NOUN
ap-1470	121	33	designed	design	VERB
ap-1470	121	34	for	for	ADP
ap-1470	121	35	the	the	DET
ap-1470	121	36	shuttle	shuttle	NOUN
ap-1470	121	37	experiment	experiment	NOUN
ap-1470	121	38	,	,	PUNCT
ap-1470	121	39	e.g.	e.g.	ADV
ap-1470	121	40	fabricant	fabricant	X
ap-1470	121	41	et	et	PROPN
ap-1470	121	42	al	al	PROPN
ap-1470	121	43	.	.	PROPN
ap-1470	121	44	1988	1988	NUM
ap-1470	121	45	)	)	PUNCT
ap-1470	121	46	.	.	PUNCT
ap-1470	122	1	fig	fig	NOUN
ap-1470	122	2	.	.	PUNCT
ap-1470	123	1	2	2	NUM
ap-1470	123	2	:	:	PUNCT
ap-1470	123	3	multi	multi	ADJ
ap-1470	123	4	foil	foil	NOUN
ap-1470	123	5	optics	optic	NOUN
ap-1470	123	6	(	(	PUNCT
ap-1470	123	7	mfo	mfo	NOUN
ap-1470	123	8	)	)	PUNCT
ap-1470	123	9	in	in	ADP
ap-1470	123	10	the	the	DET
ap-1470	123	11	kirkpatrick	kirkpatrick	NOUN
ap-1470	123	12	-	-	PUNCT
ap-1470	123	13	baez	baez	PROPN
ap-1470	123	14	(	(	PUNCT
ap-1470	123	15	k	k	PROPN
ap-1470	123	16	-	-	PUNCT
ap-1470	123	17	b	b	NOUN
ap-1470	123	18	)	)	PUNCT
ap-1470	123	19	arrangement	arrangement	NOUN
ap-1470	123	20	superior	superior	ADJ
ap-1470	123	21	silicon	silicon	NOUN
ap-1470	123	22	substrates	substrate	NOUN
ap-1470	123	23	have	have	AUX
ap-1470	123	24	recently	recently	ADV
ap-1470	123	25	become	become	VERB
ap-1470	123	26	available	available	ADJ
ap-1470	123	27	that	that	PRON
ap-1470	123	28	make	make	VERB
ap-1470	123	29	it	it	PRON
ap-1470	123	30	possible	possible	ADJ
ap-1470	123	31	to	to	PART
ap-1470	123	32	consider	consider	VERB
ap-1470	123	33	designing	design	VERB
ap-1470	123	34	large	large	ADJ
ap-1470	123	35	kb	kb	NOUN
ap-1470	123	36	modules	module	NOUN
ap-1470	123	37	with	with	ADP
ap-1470	123	38	this	this	DET
ap-1470	123	39	novel	novel	ADJ
ap-1470	123	40	material	material	NOUN
ap-1470	123	41	.	.	PUNCT
ap-1470	124	1	as	as	SCONJ
ap-1470	124	2	mentioned	mention	VERB
ap-1470	124	3	above	above	ADV
ap-1470	124	4	,	,	PUNCT
ap-1470	124	5	si	si	PROPN
ap-1470	124	6	wafers	wafer	NOUN
ap-1470	124	7	are	be	AUX
ap-1470	124	8	difficult	difficult	ADJ
ap-1470	124	9	to	to	PART
ap-1470	124	10	shape	shape	VERB
ap-1470	124	11	,	,	PUNCT
ap-1470	124	12	especially	especially	ADV
ap-1470	124	13	to	to	ADP
ap-1470	124	14	small	small	ADJ
ap-1470	124	15	radii	radius	NOUN
ap-1470	124	16	.	.	PUNCT
ap-1470	125	1	to	to	PART
ap-1470	125	2	overcome	overcome	VERB
ap-1470	125	3	this	this	DET
ap-1470	125	4	difficulty	difficulty	NOUN
ap-1470	125	5	,	,	PUNCT
ap-1470	125	6	another	another	DET
ap-1470	125	7	x	x	ADJ
ap-1470	125	8	-	-	NOUN
ap-1470	125	9	ray	ray	NOUN
ap-1470	125	10	optics	optic	NOUN
ap-1470	125	11	arrangement	arrangement	NOUN
ap-1470	125	12	can	can	AUX
ap-1470	125	13	be	be	AUX
ap-1470	125	14	considered	consider	VERB
ap-1470	125	15	,	,	PUNCT
ap-1470	125	16	namely	namely	ADV
ap-1470	125	17	the	the	DET
ap-1470	125	18	kirkpatrick	kirkpatrick	PROPN
ap-1470	125	19	-	-	PUNCT
ap-1470	125	20	baez	baez	PROPN
ap-1470	125	21	(	(	PUNCT
ap-1470	125	22	kb	kb	PROPN
ap-1470	125	23	)	)	PUNCT
ap-1470	125	24	system	system	NOUN
ap-1470	125	25	.	.	PUNCT
ap-1470	126	1	then	then	ADV
ap-1470	126	2	the	the	DET
ap-1470	126	3	curvature	curvature	NOUN
ap-1470	126	4	radii	radius	NOUN
ap-1470	126	5	are	be	AUX
ap-1470	126	6	much	much	ADV
ap-1470	126	7	larger	large	ADJ
ap-1470	126	8	,	,	PUNCT
ap-1470	126	9	of	of	ADP
ap-1470	126	10	the	the	DET
ap-1470	126	11	order	order	NOUN
ap-1470	126	12	of	of	ADP
ap-1470	126	13	a	a	DET
ap-1470	126	14	few	few	ADJ
ap-1470	126	15	km	km	NOUN
ap-1470	126	16	,	,	PUNCT
ap-1470	126	17	while	while	SCONJ
ap-1470	126	18	the	the	DET
ap-1470	126	19	imaging	imaging	NOUN
ap-1470	126	20	performance	performance	NOUN
ap-1470	126	21	is	be	AUX
ap-1470	126	22	similar	similar	ADJ
ap-1470	126	23	.	.	PUNCT
ap-1470	127	1	for	for	ADP
ap-1470	127	2	the	the	DET
ap-1470	127	3	same	same	ADJ
ap-1470	127	4	effective	effective	ADJ
ap-1470	127	5	area	area	NOUN
ap-1470	127	6	,	,	PUNCT
ap-1470	127	7	however	however	ADV
ap-1470	127	8	,	,	PUNCT
ap-1470	127	9	the	the	DET
ap-1470	127	10	focal	focal	ADJ
ap-1470	127	11	length	length	NOUN
ap-1470	127	12	of	of	ADP
ap-1470	127	13	the	the	DET
ap-1470	127	14	kb	kb	PROPN
ap-1470	127	15	system	system	NOUN
ap-1470	127	16	is	be	AUX
ap-1470	127	17	about	about	ADV
ap-1470	127	18	twice	twice	ADV
ap-1470	127	19	as	as	ADV
ap-1470	127	20	large	large	ADJ
ap-1470	127	21	as	as	ADP
ap-1470	127	22	the	the	DET
ap-1470	127	23	focal	focal	ADJ
ap-1470	127	24	length	length	NOUN
ap-1470	127	25	of	of	ADP
ap-1470	127	26	the	the	DET
ap-1470	127	27	wolter	wolter	NOUN
ap-1470	127	28	system	system	NOUN
ap-1470	127	29	.	.	PUNCT
ap-1470	128	1	nevertheless	nevertheless	ADV
ap-1470	128	2	,	,	PUNCT
ap-1470	128	3	kb	kb	PROPN
ap-1470	128	4	systems	system	NOUN
ap-1470	128	5	represent	represent	VERB
ap-1470	128	6	a	a	DET
ap-1470	128	7	promising	promising	ADJ
ap-1470	128	8	alternative	alternative	NOUN
ap-1470	128	9	to	to	ADP
ap-1470	128	10	the	the	DET
ap-1470	128	11	classical	classical	ADJ
ap-1470	128	12	wolter	wolter	NOUN
ap-1470	128	13	systems	system	NOUN
ap-1470	128	14	in	in	ADP
ap-1470	128	15	future	future	ADJ
ap-1470	128	16	large	large	ADJ
ap-1470	128	17	space	space	NOUN
ap-1470	128	18	x	x	NOUN
ap-1470	128	19	-	-	NOUN
ap-1470	128	20	ray	ray	NOUN
ap-1470	128	21	telescopes	telescope	NOUN
ap-1470	128	22	.	.	PUNCT
ap-1470	129	1	a	a	DET
ap-1470	129	2	very	very	ADV
ap-1470	129	3	important	important	ADJ
ap-1470	129	4	factor	factor	NOUN
ap-1470	129	5	is	be	AUX
ap-1470	129	6	the	the	DET
ap-1470	129	7	ease	ease	NOUN
ap-1470	129	8	(	(	PUNCT
ap-1470	129	9	and	and	CCONJ
ap-1470	129	10	hence	hence	ADV
ap-1470	129	11	the	the	DET
ap-1470	129	12	reduced	reduced	ADJ
ap-1470	129	13	cost	cost	NOUN
ap-1470	129	14	)	)	PUNCT
ap-1470	129	15	of	of	ADP
ap-1470	129	16	constructing	construct	VERB
ap-1470	129	17	highly	highly	ADV
ap-1470	129	18	segmented	segment	VERB
ap-1470	129	19	modules	module	NOUN
ap-1470	129	20	based	base	VERB
ap-1470	129	21	on	on	ADP
ap-1470	129	22	multiply	multiply	ADV
ap-1470	129	23	nested	nest	VERB
ap-1470	129	24	thin	thin	ADJ
ap-1470	129	25	reflecting	reflect	VERB
ap-1470	129	26	substrates	substrate	NOUN
ap-1470	129	27	,	,	PUNCT
ap-1470	129	28	in	in	ADP
ap-1470	129	29	comparison	comparison	NOUN
ap-1470	129	30	with	with	ADP
ap-1470	129	31	the	the	DET
ap-1470	129	32	wolter	wolter	NOUN
ap-1470	129	33	design	design	NOUN
ap-1470	129	34	.	.	PUNCT
ap-1470	130	1	while	while	SCONJ
ap-1470	130	2	e.g.	e.g.	ADV
ap-1470	130	3	the	the	DET
ap-1470	130	4	wolter	wolter	NOUN
ap-1470	130	5	design	design	NOUN
ap-1470	130	6	for	for	ADP
ap-1470	130	7	athena	athena	NOUN
ap-1470	130	8	requires	require	VERB
ap-1470	130	9	the	the	DET
ap-1470	130	10	substrates	substrate	NOUN
ap-1470	130	11	to	to	PART
ap-1470	130	12	be	be	AUX
ap-1470	130	13	precisely	precisely	ADV
ap-1470	130	14	formed	form	VERB
ap-1470	130	15	with	with	ADP
ap-1470	130	16	curvatures	curvature	NOUN
ap-1470	130	17	as	as	ADV
ap-1470	130	18	small	small	ADJ
ap-1470	130	19	as	as	ADP
ap-1470	130	20	0.25	0.25	NUM
ap-1470	130	21	m	m	NOUN
ap-1470	130	22	,	,	PUNCT
ap-1470	130	23	the	the	DET
ap-1470	130	24	alternative	alternative	ADJ
ap-1470	130	25	kb	kb	PROPN
ap-1470	130	26	arrangement	arrangement	NOUN
ap-1470	130	27	uses	use	VERB
ap-1470	130	28	almost	almost	ADV
ap-1470	130	29	flat	flat	ADJ
ap-1470	130	30	or	or	CCONJ
ap-1470	130	31	only	only	ADV
ap-1470	130	32	slightly	slightly	ADV
ap-1470	130	33	bent	bent	ADJ
ap-1470	130	34	sheets	sheet	NOUN
ap-1470	130	35	.	.	PUNCT
ap-1470	131	1	hence	hence	ADV
ap-1470	131	2	the	the	DET
ap-1470	131	3	feasibility	feasibility	NOUN
ap-1470	131	4	of	of	ADP
ap-1470	131	5	constructing	construct	VERB
ap-1470	131	6	a	a	DET
ap-1470	131	7	kb	kb	PROPN
ap-1470	131	8	module	module	NOUN
ap-1470	131	9	with	with	ADP
ap-1470	131	10	the	the	DET
ap-1470	131	11	required	require	VERB
ap-1470	131	12	5	5	NUM
ap-1470	131	13	arcsec	arcsec	PROPN
ap-1470	131	14	fwhm	fwhm	PROPN
ap-1470	131	15	at	at	ADP
ap-1470	131	16	an	an	DET
ap-1470	131	17	affordable	affordable	ADJ
ap-1470	131	18	cost	cost	NOUN
ap-1470	131	19	is	be	AUX
ap-1470	131	20	higher	high	ADJ
ap-1470	131	21	than	than	ADP
ap-1470	131	22	for	for	ADP
ap-1470	131	23	the	the	DET
ap-1470	131	24	wolter	wolter	NOUN
ap-1470	131	25	arrangement	arrangement	NOUN
ap-1470	131	26	.	.	PUNCT
ap-1470	132	1	advanced	advanced	PROPN
ap-1470	132	2	kb	kb	PROPN
ap-1470	132	3	telescopes	telescope	NOUN
ap-1470	132	4	are	be	AUX
ap-1470	132	5	based	base	VERB
ap-1470	132	6	on	on	ADP
ap-1470	132	7	the	the	DET
ap-1470	132	8	multi	multi	ADJ
ap-1470	132	9	foil	foil	NOUN
ap-1470	132	10	optics	optic	NOUN
ap-1470	132	11	(	(	PUNCT
ap-1470	132	12	mfo	mfo	NOUN
ap-1470	132	13	)	)	PUNCT
ap-1470	132	14	approach	approach	NOUN
ap-1470	132	15	(	(	PUNCT
ap-1470	132	16	x	x	NOUN
ap-1470	132	17	-	-	NOUN
ap-1470	132	18	ray	ray	NOUN
ap-1470	132	19	grazing	grazing	NOUN
ap-1470	132	20	incidence	incidence	NOUN
ap-1470	132	21	imaging	image	VERB
ap-1470	132	22	optics	optic	NOUN
ap-1470	132	23	based	base	VERB
ap-1470	132	24	on	on	ADP
ap-1470	132	25	numerous	numerous	ADJ
ap-1470	132	26	thin	thin	ADJ
ap-1470	132	27	reflecting	reflect	VERB
ap-1470	132	28	substrates	substrate	NOUN
ap-1470	132	29	/	/	SYM
ap-1470	132	30	foils	foil	NOUN
ap-1470	132	31	)	)	PUNCT
ap-1470	132	32	.	.	PUNCT
ap-1470	133	1	the	the	DET
ap-1470	133	2	distinction	distinction	NOUN
ap-1470	133	3	between	between	ADP
ap-1470	133	4	mfo	mfo	PROPN
ap-1470	133	5	and	and	CCONJ
ap-1470	133	6	other	other	ADJ
ap-1470	133	7	optics	optic	NOUN
ap-1470	133	8	using	use	VERB
ap-1470	133	9	packed	packed	ADJ
ap-1470	133	10	or	or	CCONJ
ap-1470	133	11	nested	nested	ADJ
ap-1470	133	12	mirrors	mirror	NOUN
ap-1470	133	13	is	be	AUX
ap-1470	133	14	that	that	SCONJ
ap-1470	133	15	mfo	mfo	PROPN
ap-1470	133	16	is	be	AUX
ap-1470	133	17	based	base	VERB
ap-1470	133	18	on	on	ADP
ap-1470	133	19	numerous	numerous	ADJ
ap-1470	133	20	very	very	ADV
ap-1470	133	21	thin	thin	ADJ
ap-1470	133	22	(	(	PUNCT
ap-1470	133	23	typically	typically	ADV
ap-1470	133	24	less	less	ADJ
ap-1470	133	25	than	than	ADP
ap-1470	133	26	0.1	0.1	NUM
ap-1470	133	27	mm	mm	NOUN
ap-1470	133	28	)	)	PUNCT
ap-1470	133	29	substrates	substrate	NOUN
ap-1470	133	30	.	.	PUNCT
ap-1470	134	1	the	the	DET
ap-1470	134	2	mfo	mfo	PROPN
ap-1470	134	3	kb	kb	PROPN
ap-1470	134	4	test	test	NOUN
ap-1470	134	5	modules	module	NOUN
ap-1470	134	6	were	be	AUX
ap-1470	134	7	recently	recently	ADV
ap-1470	134	8	designed	design	VERB
ap-1470	134	9	and	and	CCONJ
ap-1470	134	10	constructed	construct	VERB
ap-1470	134	11	at	at	ADP
ap-1470	134	12	rigaku	rigaku	NOUN
ap-1470	134	13	innovative	innovative	PROPN
ap-1470	134	14	technologies	technology	NOUN
ap-1470	134	15	europe	europe	PROPN
ap-1470	134	16	(	(	PUNCT
ap-1470	134	17	rite	rite	PROPN
ap-1470	134	18	)	)	PUNCT
ap-1470	134	19	in	in	ADP
ap-1470	134	20	prague	prague	PROPN
ap-1470	134	21	,	,	PUNCT
ap-1470	134	22	and	and	CCONJ
ap-1470	134	23	2	2	NUM
ap-1470	134	24	modules	module	NOUN
ap-1470	134	25	were	be	AUX
ap-1470	134	26	tested	test	VERB
ap-1470	134	27	in	in	ADP
ap-1470	134	28	full	full	ADJ
ap-1470	134	29	aperture	aperture	NOUN
ap-1470	134	30	x	x	NOUN
ap-1470	134	31	-	-	NOUN
ap-1470	134	32	ray	ray	NOUN
ap-1470	134	33	tests	test	NOUN
ap-1470	134	34	in	in	ADP
ap-1470	134	35	the	the	DET
ap-1470	134	36	test	test	NOUN
ap-1470	134	37	facility	facility	NOUN
ap-1470	134	38	of	of	ADP
ap-1470	134	39	the	the	DET
ap-1470	134	40	university	university	NOUN
ap-1470	134	41	of	of	ADP
ap-1470	134	42	boulder	boulder	NOUN
ap-1470	134	43	,	,	PUNCT
ap-1470	134	44	with	with	ADP
ap-1470	134	45	preliminary	preliminary	ADJ
ap-1470	134	46	results	result	NOUN
ap-1470	134	47	of	of	ADP
ap-1470	134	48	fwhm	fwhm	PROPN
ap-1470	134	49	26	26	NUM
ap-1470	134	50	arcsec	arcsec	PROPN
ap-1470	134	51	for	for	ADP
ap-1470	134	52	a	a	DET
ap-1470	134	53	full	full	ADJ
ap-1470	134	54	stack	stack	NOUN
ap-1470	134	55	of	of	ADP
ap-1470	134	56	24	24	NUM
ap-1470	134	57	standard	standard	ADJ
ap-1470	134	58	si	si	NOUN
ap-1470	134	59	plates	plate	NOUN
ap-1470	134	60	at	at	ADP
ap-1470	134	61	5	5	NUM
ap-1470	134	62	kev	kev	NOUN
ap-1470	134	63	,	,	PUNCT
ap-1470	134	64	and	and	CCONJ
ap-1470	134	65	even	even	ADV
ap-1470	134	66	better	well	ADJ
ap-1470	134	67	for	for	ADP
ap-1470	134	68	glass	glass	NOUN
ap-1470	134	69	foils	foil	NOUN
ap-1470	134	70	and	and	CCONJ
ap-1470	134	71	1d	1d	NUM
ap-1470	134	72	imaging	imaging	NOUN
ap-1470	134	73	(	(	PUNCT
ap-1470	134	74	figures	figure	NOUN
ap-1470	134	75	3	3	NUM
ap-1470	134	76	,	,	PUNCT
ap-1470	134	77	4	4	NUM
ap-1470	134	78	)	)	PUNCT
ap-1470	134	79	.	.	PUNCT
ap-1470	135	1	31	31	NUM
ap-1470	135	2	acta	acta	PROPN
ap-1470	135	3	polytechnica	polytechnica	PROPN
ap-1470	135	4	vol	vol	NOUN
ap-1470	135	5	.	.	PUNCT
ap-1470	136	1	51	51	NUM
ap-1470	136	2	no	no	NOUN
ap-1470	136	3	.	.	PUNCT
ap-1470	137	1	6/2011	6/2011	NUM
ap-1470	137	2	fig	fig	NOUN
ap-1470	137	3	.	.	PUNCT
ap-1470	138	1	3	3	X
ap-1470	138	2	:	:	PUNCT
ap-1470	138	3	left	leave	VERB
ap-1470	138	4	:	:	PUNCT
ap-1470	139	1	test	test	NOUN
ap-1470	139	2	k	k	PROPN
ap-1470	139	3	-	-	PUNCT
ap-1470	139	4	b	b	PROPN
ap-1470	139	5	modules	module	NOUN
ap-1470	139	6	assembled	assemble	VERB
ap-1470	139	7	at	at	ADP
ap-1470	139	8	rigaku	rigaku	NOUN
ap-1470	139	9	rite	rite	ADJ
ap-1470	139	10	in	in	ADP
ap-1470	139	11	prague	prague	PROPN
ap-1470	139	12	,	,	PUNCT
ap-1470	139	13	right	right	ADV
ap-1470	139	14	:	:	PUNCT
ap-1470	139	15	the	the	DET
ap-1470	139	16	x	x	ADJ
ap-1470	139	17	-	-	NOUN
ap-1470	139	18	ray	ray	NOUN
ap-1470	139	19	test	test	NOUN
ap-1470	139	20	facility	facility	NOUN
ap-1470	139	21	for	for	ADP
ap-1470	139	22	full	full	ADJ
ap-1470	139	23	aperture	aperture	NOUN
ap-1470	139	24	x	x	NOUN
ap-1470	139	25	-	-	NOUN
ap-1470	139	26	ray	ray	NOUN
ap-1470	139	27	tests	test	NOUN
ap-1470	139	28	at	at	ADP
ap-1470	139	29	the	the	DET
ap-1470	139	30	university	university	NOUN
ap-1470	139	31	of	of	ADP
ap-1470	139	32	colorado	colorado	PROPN
ap-1470	139	33	in	in	ADP
ap-1470	139	34	boulder	boulder	PROPN
ap-1470	139	35	fig	fig	NOUN
ap-1470	139	36	.	.	PUNCT
ap-1470	140	1	4	4	NUM
ap-1470	140	2	:	:	PUNCT
ap-1470	140	3	the	the	DET
ap-1470	140	4	measurement	measurement	NOUN
ap-1470	140	5	results	result	NOUN
ap-1470	140	6	of	of	ADP
ap-1470	140	7	the	the	DET
ap-1470	140	8	k	k	PROPN
ap-1470	140	9	-	-	PUNCT
ap-1470	140	10	b	b	PROPN
ap-1470	140	11	1d	1d	NUM
ap-1470	140	12	test	test	NOUN
ap-1470	140	13	module	module	NOUN
ap-1470	140	14	with	with	ADP
ap-1470	140	15	glass	glass	NOUN
ap-1470	140	16	foils	foil	NOUN
ap-1470	140	17	,	,	PUNCT
ap-1470	140	18	full	full	ADJ
ap-1470	140	19	aperture	aperture	NOUN
ap-1470	140	20	tests	test	NOUN
ap-1470	140	21	at	at	ADP
ap-1470	140	22	5	5	NUM
ap-1470	140	23	kev	kev	NOUN
ap-1470	140	24	at	at	ADP
ap-1470	140	25	the	the	DET
ap-1470	140	26	university	university	PROPN
ap-1470	140	27	of	of	ADP
ap-1470	140	28	colorado	colorado	PROPN
ap-1470	140	29	at	at	ADP
ap-1470	140	30	boulder	boulder	NOUN
ap-1470	140	31	.	.	PUNCT
ap-1470	141	1	the	the	DET
ap-1470	141	2	estimated	estimate	VERB
ap-1470	141	3	fwhm	fwhm	NOUN
ap-1470	141	4	of	of	ADP
ap-1470	141	5	1d	1d	NUM
ap-1470	141	6	focus	focus	NOUN
ap-1470	141	7	is	be	AUX
ap-1470	141	8	4	4	NUM
ap-1470	141	9	arcsec	arcsec	NOUN
ap-1470	141	10	in	in	ADP
ap-1470	141	11	our	our	PRON
ap-1470	141	12	opinion	opinion	NOUN
ap-1470	141	13	,	,	PUNCT
ap-1470	141	14	the	the	DET
ap-1470	141	15	use	use	NOUN
ap-1470	141	16	of	of	ADP
ap-1470	141	17	kb	kb	PROPN
ap-1470	141	18	design	design	NOUN
ap-1470	141	19	instead	instead	ADV
ap-1470	141	20	of	of	ADP
ap-1470	141	21	wolter	wolter	NOUN
ap-1470	141	22	in	in	ADP
ap-1470	141	23	athena	athena	PROPN
ap-1470	141	24	might	might	AUX
ap-1470	141	25	help	help	VERB
ap-1470	141	26	to	to	PART
ap-1470	141	27	retain	retain	VERB
ap-1470	141	28	high	high	ADJ
ap-1470	141	29	performance	performance	NOUN
ap-1470	141	30	(	(	PUNCT
ap-1470	141	31	such	such	ADJ
ap-1470	141	32	as	as	ADP
ap-1470	141	33	effective	effective	ADJ
ap-1470	141	34	area	area	NOUN
ap-1470	141	35	)	)	PUNCT
ap-1470	141	36	even	even	ADV
ap-1470	141	37	in	in	ADP
ap-1470	141	38	the	the	DET
ap-1470	141	39	event	event	NOUN
ap-1470	141	40	of	of	ADP
ap-1470	141	41	a	a	DET
ap-1470	141	42	reduced	reduced	ADJ
ap-1470	141	43	budget	budget	NOUN
ap-1470	141	44	for	for	ADP
ap-1470	141	45	athena	athena	NOUN
ap-1470	141	46	.	.	PUNCT
ap-1470	142	1	6	6	NUM
ap-1470	142	2	conclusion	conclusion	NOUN
ap-1470	142	3	suitable	suitable	ADJ
ap-1470	142	4	technologies	technology	NOUN
ap-1470	142	5	for	for	ADP
ap-1470	142	6	future	future	ADJ
ap-1470	142	7	large	large	ADJ
ap-1470	142	8	x	x	ADJ
ap-1470	142	9	-	-	NOUN
ap-1470	142	10	ray	ray	NOUN
ap-1470	142	11	telescopes	telescope	NOUN
ap-1470	142	12	require	require	VERB
ap-1470	142	13	extensive	extensive	ADJ
ap-1470	142	14	research	research	NOUN
ap-1470	142	15	work	work	NOUN
ap-1470	142	16	.	.	PUNCT
ap-1470	143	1	two	two	NUM
ap-1470	143	2	promising	promising	ADJ
ap-1470	143	3	technologies	technology	NOUN
ap-1470	143	4	suitable	suitable	ADJ
ap-1470	143	5	for	for	ADP
ap-1470	143	6	future	future	ADJ
ap-1470	143	7	large	large	ADJ
ap-1470	143	8	-	-	PUNCT
ap-1470	143	9	aperture	aperture	NOUN
ap-1470	143	10	and	and	CCONJ
ap-1470	143	11	fine	fine	ADJ
ap-1470	143	12	resolution	resolution	NOUN
ap-1470	143	13	x	x	NOUN
ap-1470	143	14	-	-	NOUN
ap-1470	143	15	ray	ray	NOUN
ap-1470	143	16	telescopes	telescope	NOUN
ap-1470	143	17	,	,	PUNCT
ap-1470	143	18	such	such	ADJ
ap-1470	143	19	as	as	ADP
ap-1470	143	20	athena	athena	NOUN
ap-1470	143	21	,	,	PUNCT
ap-1470	143	22	were	be	AUX
ap-1470	143	23	exploited	exploit	VERB
ap-1470	143	24	and	and	CCONJ
ap-1470	143	25	investigated	investigate	VERB
ap-1470	143	26	in	in	ADP
ap-1470	143	27	detail	detail	NOUN
ap-1470	143	28	,	,	PUNCT
ap-1470	143	29	namely	namely	ADV
ap-1470	143	30	glass	glass	NOUN
ap-1470	143	31	thermal	thermal	ADJ
ap-1470	143	32	forming	form	VERB
ap-1470	143	33	and	and	CCONJ
ap-1470	143	34	si	si	NOUN
ap-1470	143	35	wafer	wafer	NOUN
ap-1470	143	36	bending	bend	VERB
ap-1470	143	37	.	.	PUNCT
ap-1470	144	1	in	in	ADP
ap-1470	144	2	both	both	DET
ap-1470	144	3	cases	case	NOUN
ap-1470	144	4	,	,	PUNCT
ap-1470	144	5	promising	promising	ADJ
ap-1470	144	6	results	result	NOUN
ap-1470	144	7	have	have	AUX
ap-1470	144	8	been	be	AUX
ap-1470	144	9	achieved	achieve	VERB
ap-1470	144	10	,	,	PUNCT
ap-1470	144	11	with	with	ADP
ap-1470	144	12	peak	peak	NOUN
ap-1470	144	13	-	-	PUNCT
ap-1470	144	14	to	to	ADP
ap-1470	144	15	-	-	PUNCT
ap-1470	144	16	valley	valley	NOUN
ap-1470	144	17	deviations	deviation	NOUN
ap-1470	144	18	of	of	ADP
ap-1470	144	19	the	the	DET
ap-1470	144	20	final	final	ADJ
ap-1470	144	21	profiles	profile	NOUN
ap-1470	144	22	from	from	ADP
ap-1470	144	23	the	the	DET
ap-1470	144	24	ideal	ideal	ADJ
ap-1470	144	25	profiles	profile	NOUN
ap-1470	144	26	being	be	AUX
ap-1470	144	27	of	of	ADP
ap-1470	144	28	the	the	DET
ap-1470	144	29	order	order	NOUN
ap-1470	144	30	of	of	ADP
ap-1470	144	31	1	1	NUM
ap-1470	144	32	μm	μm	NOUN
ap-1470	144	33	in	in	ADP
ap-1470	144	34	the	the	DET
ap-1470	144	35	best	good	ADJ
ap-1470	144	36	cases	case	NOUN
ap-1470	144	37	,	,	PUNCT
ap-1470	144	38	with	with	ADP
ap-1470	144	39	space	space	NOUN
ap-1470	144	40	for	for	ADP
ap-1470	144	41	further	further	ADJ
ap-1470	144	42	essential	essential	ADJ
ap-1470	144	43	improvements	improvement	NOUN
ap-1470	144	44	and	and	CCONJ
ap-1470	144	45	optimization	optimization	NOUN
ap-1470	144	46	.	.	PUNCT
ap-1470	145	1	in	in	ADP
ap-1470	145	2	the	the	DET
ap-1470	145	3	czech	czech	PROPN
ap-1470	145	4	republic	republic	NOUN
ap-1470	145	5	,	,	PUNCT
ap-1470	145	6	an	an	DET
ap-1470	145	7	interdisciplinary	interdisciplinary	ADJ
ap-1470	145	8	team	team	NOUN
ap-1470	145	9	with	with	ADP
ap-1470	145	10	10	10	NUM
ap-1470	145	11	members	member	NOUN
ap-1470	145	12	is	be	AUX
ap-1470	145	13	cooperating	cooperate	VERB
ap-1470	145	14	closely	closely	ADV
ap-1470	145	15	with	with	ADP
ap-1470	145	16	experienced	experienced	ADJ
ap-1470	145	17	specialists	specialist	NOUN
ap-1470	145	18	,	,	PUNCT
ap-1470	145	19	including	include	VERB
ap-1470	145	20	researchers	researcher	NOUN
ap-1470	145	21	from	from	ADP
ap-1470	145	22	a	a	DET
ap-1470	145	23	large	large	ADJ
ap-1470	145	24	company	company	NOUN
ap-1470	145	25	producing	produce	VERB
ap-1470	145	26	si	si	NOUN
ap-1470	145	27	wafers	wafer	NOUN
ap-1470	145	28	.	.	PUNCT
ap-1470	146	1	si	si	PROPN
ap-1470	146	2	wafers	wafer	NOUN
ap-1470	146	3	have	have	AUX
ap-1470	146	4	been	be	AUX
ap-1470	146	5	successfully	successfully	ADV
ap-1470	146	6	bent	bent	ADJ
ap-1470	146	7	to	to	ADP
ap-1470	146	8	the	the	DET
ap-1470	146	9	desired	desire	VERB
ap-1470	146	10	geometry	geometry	NOUN
ap-1470	146	11	by	by	ADP
ap-1470	146	12	three	three	NUM
ap-1470	146	13	different	different	ADJ
ap-1470	146	14	techniques	technique	NOUN
ap-1470	146	15	.	.	PUNCT
ap-1470	147	1	in	in	ADP
ap-1470	147	2	the	the	DET
ap-1470	147	3	best	good	ADJ
ap-1470	147	4	cases	case	NOUN
ap-1470	147	5	,	,	PUNCT
ap-1470	147	6	the	the	DET
ap-1470	147	7	accuracy	accuracy	NOUN
ap-1470	147	8	achieved	achieve	VERB
ap-1470	147	9	for	for	ADP
ap-1470	147	10	a	a	DET
ap-1470	147	11	150	150	NUM
ap-1470	147	12	mm	mm	NOUN
ap-1470	147	13	si	si	NOUN
ap-1470	147	14	wafer	wafer	NOUN
ap-1470	147	15	is	be	AUX
ap-1470	147	16	1–2	1–2	NUM
ap-1470	147	17	μm	μm	NOUN
ap-1470	147	18	for	for	ADP
ap-1470	147	19	deviation	deviation	NOUN
ap-1470	147	20	from	from	ADP
ap-1470	147	21	the	the	DET
ap-1470	147	22	ideal	ideal	ADJ
ap-1470	147	23	optical	optical	ADJ
ap-1470	147	24	surface	surface	NOUN
ap-1470	147	25	.	.	PUNCT
ap-1470	148	1	experiments	experiment	NOUN
ap-1470	148	2	are	be	AUX
ap-1470	148	3	continuing	continue	VERB
ap-1470	148	4	in	in	ADP
ap-1470	148	5	an	an	DET
ap-1470	148	6	attempt	attempt	NOUN
ap-1470	148	7	to	to	PART
ap-1470	148	8	further	far	ADV
ap-1470	148	9	improve	improve	VERB
ap-1470	148	10	the	the	DET
ap-1470	148	11	forming	form	VERB
ap-1470	148	12	accuracy	accuracy	NOUN
ap-1470	148	13	.	.	PUNCT
ap-1470	149	1	as	as	ADP
ap-1470	149	2	an	an	DET
ap-1470	149	3	alternative	alternative	NOUN
ap-1470	149	4	,	,	PUNCT
ap-1470	149	5	we	we	PRON
ap-1470	149	6	have	have	AUX
ap-1470	149	7	investigated	investigate	VERB
ap-1470	149	8	the	the	DET
ap-1470	149	9	kb	kb	PROPN
ap-1470	149	10	option	option	NOUN
ap-1470	149	11	for	for	ADP
ap-1470	149	12	athena	athena	NOUN
ap-1470	149	13	,	,	PUNCT
ap-1470	149	14	with	with	ADP
ap-1470	149	15	quite	quite	ADV
ap-1470	149	16	promising	promising	ADJ
ap-1470	149	17	results	result	NOUN
ap-1470	149	18	justifying	justify	VERB
ap-1470	149	19	further	further	ADJ
ap-1470	149	20	efforts	effort	NOUN
ap-1470	149	21	in	in	ADP
ap-1470	149	22	this	this	DET
ap-1470	149	23	direction	direction	NOUN
ap-1470	149	24	.	.	PUNCT
ap-1470	150	1	a	a	DET
ap-1470	150	2	major	major	ADJ
ap-1470	150	3	advantage	advantage	NOUN
ap-1470	150	4	of	of	ADP
ap-1470	150	5	kb	kb	PROPN
ap-1470	150	6	is	be	AUX
ap-1470	150	7	its	its	PRON
ap-1470	150	8	low	low	ADJ
ap-1470	150	9	cost	cost	NOUN
ap-1470	150	10	,	,	PUNCT
ap-1470	150	11	as	as	SCONJ
ap-1470	150	12	there	there	PRON
ap-1470	150	13	is	be	VERB
ap-1470	150	14	no	no	DET
ap-1470	150	15	need	need	NOUN
ap-1470	150	16	for	for	ADP
ap-1470	150	17	bending	bend	VERB
ap-1470	150	18	to	to	ADP
ap-1470	150	19	small	small	ADJ
ap-1470	150	20	curvatures	curvature	NOUN
ap-1470	150	21	and/or	and/or	CCONJ
ap-1470	150	22	for	for	ADP
ap-1470	150	23	the	the	DET
ap-1470	150	24	use	use	NOUN
ap-1470	150	25	of	of	ADP
ap-1470	150	26	(	(	PUNCT
ap-1470	150	27	expensive	expensive	ADJ
ap-1470	150	28	)	)	PUNCT
ap-1470	150	29	mandrels	mandrel	NOUN
ap-1470	150	30	.	.	PUNCT
ap-1470	151	1	less	less	ADV
ap-1470	151	2	expensive	expensive	ADJ
ap-1470	151	3	optics	optic	NOUN
ap-1470	151	4	can	can	AUX
ap-1470	151	5	maintain	maintain	VERB
ap-1470	151	6	a	a	DET
ap-1470	151	7	high	high	ADJ
ap-1470	151	8	effective	effective	ADJ
ap-1470	151	9	area	area	NOUN
ap-1470	151	10	even	even	ADV
ap-1470	151	11	on	on	ADP
ap-1470	151	12	a	a	DET
ap-1470	151	13	reduced	reduced	ADJ
ap-1470	151	14	budget	budget	NOUN
ap-1470	151	15	.	.	PUNCT
ap-1470	152	1	32	32	NUM
ap-1470	152	2	acta	acta	PROPN
ap-1470	152	3	polytechnica	polytechnica	PROPN
ap-1470	152	4	vol	vol	NOUN
ap-1470	152	5	.	.	PUNCT
ap-1470	153	1	51	51	NUM
ap-1470	153	2	no	no	INTJ
ap-1470	153	3	.	.	PUNCT
ap-1470	154	1	6/2011	6/2011	NUM
ap-1470	154	2	acknowledgement	acknowledgement	NOUN
ap-1470	154	3	we	we	PRON
ap-1470	154	4	acknowledge	acknowledge	VERB
ap-1470	154	5	the	the	DET
ap-1470	154	6	support	support	NOUN
ap-1470	154	7	provided	provide	VERB
ap-1470	154	8	by	by	ADP
ap-1470	154	9	the	the	DET
ap-1470	154	10	grant	grant	PROPN
ap-1470	154	11	agency	agency	NOUN
ap-1470	154	12	of	of	ADP
ap-1470	154	13	the	the	DET
ap-1470	154	14	academy	academy	PROPN
ap-1470	154	15	of	of	ADP
ap-1470	154	16	sciences	sciences	PROPN
ap-1470	154	17	of	of	ADP
ap-1470	154	18	the	the	DET
ap-1470	154	19	czech	czech	PROPN
ap-1470	154	20	republic	republic	NOUN
ap-1470	154	21	,	,	PUNCT
ap-1470	154	22	grant	grant	VERB
ap-1470	154	23	iaax	iaax	PROPN
ap-1470	154	24	01220701	01220701	NUM
ap-1470	154	25	,	,	PUNCT
ap-1470	154	26	by	by	ADP
ap-1470	154	27	the	the	DET
ap-1470	154	28	ministry	ministry	PROPN
ap-1470	154	29	of	of	ADP
ap-1470	154	30	education	education	PROPN
ap-1470	154	31	and	and	CCONJ
ap-1470	154	32	youth	youth	NOUN
ap-1470	154	33	of	of	ADP
ap-1470	154	34	the	the	DET
ap-1470	154	35	czech	czech	PROPN
ap-1470	154	36	republic	republic	NOUN
ap-1470	154	37	,	,	PUNCT
ap-1470	154	38	projects	project	VERB
ap-1470	154	39	me918	me918	PROPN
ap-1470	154	40	,	,	PUNCT
ap-1470	154	41	me09028	me09028	NOUN
ap-1470	154	42	and	and	CCONJ
ap-1470	154	43	me09004	me09004	PROPN
ap-1470	154	44	.	.	PUNCT
ap-1470	155	1	the	the	DET
ap-1470	155	2	investigations	investigation	NOUN
ap-1470	155	3	related	relate	VERB
ap-1470	155	4	to	to	ADP
ap-1470	155	5	the	the	DET
ap-1470	155	6	esa	esa	PROPN
ap-1470	155	7	ixo	ixo	PROPN
ap-1470	155	8	(	(	PUNCT
ap-1470	155	9	now	now	ADV
ap-1470	155	10	athena	athena	NOUN
ap-1470	155	11	)	)	PUNCT
ap-1470	155	12	project	project	NOUN
ap-1470	155	13	were	be	AUX
ap-1470	155	14	supported	support	VERB
ap-1470	155	15	by	by	ADP
ap-1470	155	16	esa	esa	PROPN
ap-1470	155	17	pecs	pecs	PROPN
ap-1470	155	18	project	project	NOUN
ap-1470	155	19	no	no	NOUN
ap-1470	155	20	.	.	PUNCT
ap-1470	155	21	98038	98038	NUM
ap-1470	155	22	.	.	PUNCT
ap-1470	156	1	we	we	PRON
ap-1470	156	2	also	also	ADV
ap-1470	156	3	acknowledge	acknowledge	VERB
ap-1470	156	4	collaboration	collaboration	NOUN
ap-1470	156	5	with	with	ADP
ap-1470	156	6	drs	dr	NOUN
ap-1470	156	7	.	.	PUNCT
ap-1470	157	1	j.	j.	PROPN
ap-1470	157	2	sik	sik	PROPN
ap-1470	157	3	and	and	CCONJ
ap-1470	157	4	m.	m.	NOUN
ap-1470	157	5	lorenc	lorenc	NOUN
ap-1470	157	6	from	from	ADP
ap-1470	157	7	on	on	ADP
ap-1470	157	8	semiconductor	semiconductor	NOUN
ap-1470	157	9	czech	czech	PROPN
ap-1470	157	10	republic	republic	NOUN
ap-1470	157	11	,	,	PUNCT
ap-1470	157	12	and	and	CCONJ
ap-1470	157	13	with	with	ADP
ap-1470	157	14	the	the	DET
ap-1470	157	15	team	team	NOUN
ap-1470	157	16	of	of	ADP
ap-1470	157	17	prof	prof	PROPN
ap-1470	157	18	.	.	PUNCT
ap-1470	158	1	webster	webster	PROPN
ap-1470	158	2	cash	cash	PROPN
ap-1470	158	3	from	from	ADP
ap-1470	158	4	the	the	DET
ap-1470	158	5	university	university	NOUN
ap-1470	158	6	of	of	ADP
ap-1470	158	7	colorado	colorado	PROPN
ap-1470	158	8	at	at	ADP
ap-1470	158	9	boulder	boulder	NOUN
ap-1470	158	10	for	for	ADP
ap-1470	158	11	x	x	NOUN
ap-1470	158	12	-	-	NOUN
ap-1470	158	13	ray	ray	NOUN
ap-1470	158	14	tests	test	NOUN
ap-1470	158	15	of	of	ADP
ap-1470	158	16	kb	kb	PROPN
ap-1470	158	17	modules	module	NOUN
ap-1470	158	18	in	in	ADP
ap-1470	158	19	their	their	PRON
ap-1470	158	20	x	x	NOUN
ap-1470	158	21	-	-	NOUN
ap-1470	158	22	ray	ray	NOUN
ap-1470	158	23	facility	facility	NOUN
ap-1470	158	24	.	.	PUNCT
ap-1470	159	1	references	reference	NOUN
ap-1470	159	2	[	[	X
ap-1470	159	3	1	1	NUM
ap-1470	159	4	]	]	PUNCT
ap-1470	159	5	hudec	hudec	PROPN
ap-1470	159	6	,	,	PUNCT
ap-1470	159	7	r.	r.	PROPN
ap-1470	159	8	,	,	PUNCT
ap-1470	159	9	valnicek	valnicek	PROPN
ap-1470	159	10	,	,	PUNCT
ap-1470	159	11	b.	b.	PROPN
ap-1470	159	12	,	,	PUNCT
ap-1470	159	13	cervencl	cervencl	PROPN
ap-1470	159	14	,	,	PUNCT
ap-1470	159	15	j.	j.	PROPN
ap-1470	159	16	,	,	PUNCT
ap-1470	159	17	et	et	PROPN
ap-1470	159	18	al	al	PROPN
ap-1470	159	19	.	.	PROPN
ap-1470	159	20	:	:	PUNCT
ap-1470	160	1	spie	spie	ADJ
ap-1470	160	2	,	,	PUNCT
ap-1470	160	3	1	1	NUM
ap-1470	160	4	343	343	NUM
ap-1470	160	5	,	,	PUNCT
ap-1470	160	6	162	162	NUM
ap-1470	160	7	,	,	PUNCT
ap-1470	160	8	1991	1991	NUM
ap-1470	160	9	.	.	PUNCT
ap-1470	161	1	[	[	X
ap-1470	161	2	2	2	NUM
ap-1470	161	3	]	]	PUNCT
ap-1470	161	4	hudec	hudec	PROPN
ap-1470	161	5	,	,	PUNCT
ap-1470	161	6	r.	r.	PROPN
ap-1470	161	7	,	,	PUNCT
ap-1470	161	8	pina	pina	NOUN
ap-1470	161	9	,	,	PUNCT
ap-1470	161	10	l.	l.	PROPN
ap-1470	161	11	,	,	PUNCT
ap-1470	161	12	inneman	inneman	NOUN
ap-1470	161	13	,	,	PUNCT
ap-1470	161	14	a.	a.	NOUN
ap-1470	161	15	:	:	PUNCT
ap-1470	161	16	spie	spie	ADJ
ap-1470	161	17	,	,	PUNCT
ap-1470	161	18	3	3	NUM
ap-1470	161	19	766	766	NUM
ap-1470	161	20	,	,	PUNCT
ap-1470	161	21	62	62	NUM
ap-1470	161	22	,	,	PUNCT
ap-1470	161	23	1999	1999	NUM
ap-1470	161	24	.	.	PUNCT
ap-1470	162	1	[	[	X
ap-1470	162	2	3	3	NUM
ap-1470	162	3	]	]	X
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ap-1470	162	5	,	,	PUNCT
ap-1470	162	6	r.	r.	PROPN
ap-1470	162	7	,	,	PUNCT
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ap-1470	162	10	l.	l.	PROPN
ap-1470	162	11	,	,	PUNCT
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ap-1470	162	13	,	,	PUNCT
ap-1470	162	14	a.	a.	NOUN
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ap-1470	162	16	spie	spie	ADJ
ap-1470	162	17	,	,	PUNCT
ap-1470	162	18	4	4	NUM
ap-1470	162	19	012	012	NUM
ap-1470	162	20	,	,	PUNCT
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ap-1470	162	22	,	,	PUNCT
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ap-1470	162	24	.	.	PUNCT
ap-1470	163	1	[	[	X
ap-1470	163	2	4	4	NUM
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ap-1470	163	5	,	,	PUNCT
ap-1470	163	6	r.	r.	PROPN
ap-1470	163	7	,	,	PUNCT
ap-1470	163	8	inneman	inneman	NOUN
ap-1470	163	9	,	,	PUNCT
ap-1470	163	10	a.	a.	NOUN
ap-1470	163	11	,	,	PUNCT
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ap-1470	163	13	,	,	PUNCT
ap-1470	163	14	l.	l.	PROPN
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ap-1470	163	16	in	in	ADP
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ap-1470	163	18	:	:	PUNCT
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ap-1470	163	20	x	x	NOUN
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ap-1470	163	22	ray	ray	NOUN
ap-1470	163	23	telescopes	telescope	NOUN
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ap-1470	163	34	ray	ray	NOUN
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ap-1470	163	36	,	,	PUNCT
ap-1470	163	37	asp	asp	PROPN
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ap-1470	163	39	.	.	PUNCT
ap-1470	164	1	proc	proc	PROPN
ap-1470	164	2	.	.	PROPN
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ap-1470	164	5	,	,	PUNCT
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ap-1470	164	7	,	,	PUNCT
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ap-1470	164	9	.	.	PUNCT
ap-1470	165	1	[	[	X
ap-1470	165	2	5	5	NUM
ap-1470	165	3	]	]	PUNCT
ap-1470	165	4	hudec	hudec	PROPN
ap-1470	165	5	,	,	PUNCT
ap-1470	165	6	r.	r.	PROPN
ap-1470	165	7	,	,	PUNCT
ap-1470	165	8	pina	pina	NOUN
ap-1470	165	9	,	,	PUNCT
ap-1470	165	10	l.	l.	PROPN
ap-1470	165	11	,	,	PUNCT
ap-1470	165	12	inneman	inneman	NOUN
ap-1470	165	13	,	,	PUNCT
ap-1470	165	14	a.	a.	PROPN
ap-1470	165	15	et	et	PROPN
ap-1470	165	16	al	al	PROPN
ap-1470	165	17	.	.	PROPN
ap-1470	165	18	:	:	PUNCT
ap-1470	166	1	spie	spie	ADJ
ap-1470	166	2	,	,	PUNCT
ap-1470	166	3	5	5	NUM
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ap-1470	166	5	,	,	PUNCT
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ap-1470	166	7	,	,	PUNCT
ap-1470	166	8	2005	2005	NUM
ap-1470	166	9	.	.	PUNCT
ap-1470	167	1	[	[	X
ap-1470	167	2	6	6	NUM
ap-1470	167	3	]	]	PUNCT
ap-1470	167	4	inneman	inneman	NOUN
ap-1470	167	5	,	,	PUNCT
ap-1470	167	6	a.	a.	NOUN
ap-1470	167	7	,	,	PUNCT
ap-1470	167	8	hudec	hudec	PROPN
ap-1470	167	9	,	,	PUNCT
ap-1470	167	10	r.	r.	PROPN
ap-1470	167	11	,	,	PUNCT
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ap-1470	167	13	,	,	PUNCT
ap-1470	167	14	l.	l.	PROPN
ap-1470	167	15	,	,	PUNCT
ap-1470	167	16	gorenstein	gorenstein	NOUN
ap-1470	167	17	,	,	PUNCT
ap-1470	167	18	p.	p.	NOUN
ap-1470	167	19	:	:	PUNCT
ap-1470	167	20	spie	spie	ADJ
ap-1470	167	21	,	,	PUNCT
ap-1470	167	22	3	3	NUM
ap-1470	167	23	766	766	NUM
ap-1470	167	24	,	,	PUNCT
ap-1470	167	25	72	72	NUM
ap-1470	167	26	,	,	PUNCT
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ap-1470	167	28	.	.	PUNCT
ap-1470	168	1	[	[	X
ap-1470	168	2	7	7	NUM
ap-1470	168	3	]	]	PUNCT
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ap-1470	168	5	,	,	PUNCT
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ap-1470	168	7	,	,	PUNCT
ap-1470	168	8	hudec	hudec	PROPN
ap-1470	168	9	,	,	PUNCT
ap-1470	168	10	r.	r.	PROPN
ap-1470	168	11	,	,	PUNCT
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ap-1470	168	13	,	,	PUNCT
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ap-1470	168	17	,	,	PUNCT
ap-1470	168	18	4	4	NUM
ap-1470	168	19	138	138	NUM
ap-1470	168	20	,	,	PUNCT
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ap-1470	168	22	,	,	PUNCT
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ap-1470	168	24	.	.	PUNCT
ap-1470	169	1	[	[	X
ap-1470	169	2	8	8	NUM
ap-1470	169	3	]	]	PUNCT
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ap-1470	169	9	,	,	PUNCT
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ap-1470	169	15	.	.	PUNCT
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ap-1470	170	2	.	.	PUNCT
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ap-1470	171	2	.	.	PUNCT
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ap-1470	172	2	,	,	PUNCT
ap-1470	172	3	766	766	NUM
ap-1470	172	4	,	,	PUNCT
ap-1470	172	5	1948	1948	NUM
ap-1470	172	6	.	.	PUNCT
ap-1470	173	1	[	[	X
ap-1470	173	2	9	9	NUM
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ap-1470	173	9	al	al	PROPN
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ap-1470	173	11	:	:	PUNCT
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ap-1470	173	22	.	.	PUNCT
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ap-1470	174	2	10	10	NUM
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ap-1470	174	5	,	,	PUNCT
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ap-1470	174	8	,	,	PUNCT
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ap-1470	174	10	,	,	PUNCT
ap-1470	174	11	a.	a.	PROPN
ap-1470	174	12	e.	e.	PROPN
ap-1470	174	13	:	:	PUNCT
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ap-1470	174	16	the	the	DET
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ap-1470	174	18	astronomical	astronomical	ADJ
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ap-1470	174	20	,	,	PUNCT
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ap-1470	175	1	[	[	X
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ap-1470	175	5	,	,	PUNCT
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ap-1470	175	8	,	,	PUNCT
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ap-1470	175	10	,	,	PUNCT
ap-1470	175	11	a.	a.	PROPN
ap-1470	175	12	,	,	PUNCT
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ap-1470	175	14	,	,	PUNCT
ap-1470	175	15	h.	h.	PROPN
ap-1470	175	16	:	:	PUNCT
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ap-1470	175	18	x	x	ADJ
ap-1470	175	19	-	-	NOUN
ap-1470	175	20	ray	ray	NOUN
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ap-1470	175	24	2009	2009	NUM
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ap-1470	175	30	astronomical	astronomical	ADJ
ap-1470	175	31	society	society	NOUN
ap-1470	175	32	,	,	PUNCT
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ap-1470	175	39	.	.	PUNCT
ap-1470	176	1	[	[	X
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ap-1470	176	7	]	]	X
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ap-1470	177	4	spie	spie	ADJ
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ap-1470	177	10	,	,	PUNCT
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ap-1470	177	12	,	,	PUNCT
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ap-1470	178	2	14	14	NUM
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ap-1470	178	6	w.	w.	PROPN
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ap-1470	178	8	,	,	PUNCT
ap-1470	178	9	et	et	PROPN
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ap-1470	178	12	:	:	PUNCT
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ap-1470	178	17	,	,	PUNCT
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ap-1470	178	20	7	7	NUM
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ap-1470	178	22	,	,	PUNCT
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ap-1470	179	1	[	[	X
ap-1470	179	2	15	15	NUM
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ap-1470	179	21	,	,	PUNCT
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ap-1470	179	23	,	,	PUNCT
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ap-1470	181	1	[	[	X
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ap-1470	181	4	gorenstein	gorenstein	NOUN
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ap-1470	181	9	al	al	PROPN
ap-1470	181	10	.	.	PUNCT
ap-1470	181	11	:	:	PUNCT
ap-1470	182	1	astrophys	astrophy	NOUN
ap-1470	182	2	.	.	PUNCT
ap-1470	183	1	j.	j.	PROPN
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ap-1470	183	3	,	,	PUNCT
ap-1470	183	4	718	718	NUM
ap-1470	183	5	,	,	PUNCT
ap-1470	183	6	1978	1978	NUM
ap-1470	183	7	.	.	PUNCT
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ap-1470	184	2	18	18	NUM
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ap-1470	184	6	d.	d.	PROPN
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ap-1470	184	9	et	et	PROPN
ap-1470	184	10	al	al	PROPN
ap-1470	184	11	.	.	PROPN
ap-1470	184	12	:	:	PUNCT
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ap-1470	184	14	optics	optic	NOUN
ap-1470	184	15	,	,	PUNCT
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ap-1470	184	21	,	,	PUNCT
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ap-1470	184	24	,	,	PUNCT
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ap-1470	184	26	.	.	PUNCT
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ap-1470	184	44	65	65	NUM
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ap-1470	184	74	technical	technical	PROPN
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ap-1470	184	77	prague	prague	PROPN
ap-1470	184	78	břehová	břehová	PROPN
ap-1470	184	79	78/7	78/7	NUM
ap-1470	184	80	,	,	PUNCT
ap-1470	184	81	110	110	NUM
ap-1470	184	82	00	00	NUM
ap-1470	184	83	prague	prague	PROPN
ap-1470	184	84	,	,	PUNCT
ap-1470	184	85	czech	czech	PROPN
ap-1470	184	86	republic	republic	NOUN
ap-1470	184	87	veronika	veronika	PROPN
ap-1470	184	88	marš́ıková	marš́ıková	PROPN
ap-1470	184	89	adolf	adolf	PROPN
ap-1470	184	90	inneman	inneman	PROPN
ap-1470	184	91	rigaku	rigaku	PROPN
ap-1470	184	92	innovative	innovative	PROPN
ap-1470	184	93	technologies	technology	NOUN
ap-1470	184	94	europe	europe	PROPN
ap-1470	184	95	,	,	PUNCT
ap-1470	184	96	s.	s.	PROPN
ap-1470	184	97	r.	r.	PROPN
ap-1470	184	98	o.	o.	PROPN
ap-1470	184	99	novodvorská	novodvorská	PROPN
ap-1470	185	1	994	994	NUM
ap-1470	185	2	,	,	PUNCT
ap-1470	185	3	142	142	NUM
ap-1470	185	4	21	21	NUM
ap-1470	185	5	,	,	PUNCT
ap-1470	185	6	prague	prague	NOUN
ap-1470	185	7	4	4	NUM
ap-1470	185	8	,	,	PUNCT
ap-1470	185	9	czech	czech	PROPN
ap-1470	185	10	republic	republic	PROPN
ap-1470	185	11	michaela	michaela	PROPN
ap-1470	185	12	skulinová	skulinová	PROPN
ap-1470	185	13	astronomical	astronomical	PROPN
ap-1470	185	14	institute	institute	PROPN
ap-1470	185	15	academy	academy	PROPN
ap-1470	185	16	of	of	ADP
ap-1470	185	17	sciences	sciences	PROPN
ap-1470	185	18	of	of	ADP
ap-1470	185	19	the	the	DET
ap-1470	185	20	czech	czech	PROPN
ap-1470	185	21	republic	republic	NOUN
ap-1470	185	22	251	251	NUM
ap-1470	185	23	65	65	NUM
ap-1470	185	24	ondřejov	ondřejov	PROPN
ap-1470	185	25	,	,	PUNCT
ap-1470	185	26	czech	czech	PROPN
ap-1470	185	27	republic	republic	NOUN
ap-1470	185	28	martin	martin	PROPN
ap-1470	185	29	mı́ka	mı́ka	PROPN
ap-1470	185	30	institute	institute	PROPN
ap-1470	185	31	of	of	ADP
ap-1470	185	32	chemical	chemical	PROPN
ap-1470	185	33	technology	technology	PROPN
ap-1470	185	34	technická	technická	NOUN
ap-1470	185	35	5	5	NUM
ap-1470	185	36	,	,	PUNCT
ap-1470	185	37	166	166	NUM
ap-1470	185	38	28	28	NUM
ap-1470	185	39	prague	prague	NOUN
ap-1470	185	40	,	,	PUNCT
ap-1470	185	41	czech	czech	PROPN
ap-1470	185	42	republic	republic	NOUN
ap-1470	185	43	33	33	NUM