id	sid	tid	token	lemma	pos
ap-1638	1	1	acta	acta	PROPN
ap-1638	1	2	polytechnica	polytechnica	PROPN
ap-1638	1	3	vol	vol	NOUN
ap-1638	1	4	.	.	PROPN
ap-1638	2	1	52	52	NUM
ap-1638	2	2	no	no	NOUN
ap-1638	2	3	.	.	PUNCT
ap-1638	3	1	5/2012	5/2012	NUM
ap-1638	3	2	diamond	diamond	NOUN
ap-1638	3	3	films	film	NOUN
ap-1638	3	4	for	for	ADP
ap-1638	3	5	implantable	implantable	ADJ
ap-1638	3	6	electrodes	electrode	NOUN
ap-1638	3	7	petra	petra	ADJ
ap-1638	3	8	henychová	henychová	PROPN
ap-1638	3	9	,	,	PUNCT
ap-1638	3	10	klára	klára	VERB
ap-1638	3	11	hiřmanová	hiřmanová	PROPN
ap-1638	3	12	,	,	PUNCT
ap-1638	3	13	martin	martin	PROPN
ap-1638	3	14	vraný	vraný	PROPN
ap-1638	3	15	department	department	PROPN
ap-1638	3	16	of	of	ADP
ap-1638	3	17	biomedical	biomedical	ADJ
ap-1638	3	18	technology	technology	NOUN
ap-1638	3	19	,	,	PUNCT
ap-1638	3	20	faculty	faculty	NOUN
ap-1638	3	21	of	of	ADP
ap-1638	3	22	biomedical	biomedical	ADJ
ap-1638	3	23	engineering	engineering	NOUN
ap-1638	3	24	,	,	PUNCT
ap-1638	3	25	czech	czech	PROPN
ap-1638	3	26	technical	technical	PROPN
ap-1638	3	27	university	university	PROPN
ap-1638	3	28	,	,	PUNCT
ap-1638	3	29	kladno	kladno	PROPN
ap-1638	3	30	,	,	PUNCT
ap-1638	3	31	czech	czech	PROPN
ap-1638	3	32	republic	republic	NOUN
ap-1638	3	33	corresponding	correspond	VERB
ap-1638	3	34	author	author	NOUN
ap-1638	3	35	:	:	PUNCT
ap-1638	3	36	petra.henychova@fbmi.cvut.cz	petra.henychova@fbmi.cvut.cz	NOUN
ap-1638	3	37	abstract	abstract	ADJ
ap-1638	3	38	diamond	diamond	NOUN
ap-1638	3	39	is	be	AUX
ap-1638	3	40	a	a	DET
ap-1638	3	41	promising	promising	ADJ
ap-1638	3	42	material	material	NOUN
ap-1638	3	43	for	for	ADP
ap-1638	3	44	implantable	implantable	ADJ
ap-1638	3	45	electrodes	electrode	NOUN
ap-1638	3	46	due	due	ADJ
ap-1638	3	47	to	to	ADP
ap-1638	3	48	its	its	PRON
ap-1638	3	49	unique	unique	ADJ
ap-1638	3	50	properties	property	NOUN
ap-1638	3	51	.	.	PUNCT
ap-1638	4	1	the	the	DET
ap-1638	4	2	aim	aim	NOUN
ap-1638	4	3	of	of	ADP
ap-1638	4	4	this	this	DET
ap-1638	4	5	work	work	NOUN
ap-1638	4	6	is	be	AUX
ap-1638	4	7	to	to	PART
ap-1638	4	8	investigate	investigate	VERB
ap-1638	4	9	the	the	DET
ap-1638	4	10	growth	growth	NOUN
ap-1638	4	11	of	of	ADP
ap-1638	4	12	boron	boron	NOUN
ap-1638	4	13	-	-	PUNCT
ap-1638	4	14	doped	dope	VERB
ap-1638	4	15	nanocrystalline	nanocrystalline	ADJ
ap-1638	4	16	diamond	diamond	NOUN
ap-1638	4	17	(	(	PUNCT
ap-1638	4	18	b	b	NOUN
ap-1638	4	19	-	-	PUNCT
ap-1638	4	20	ncd	ncd	NOUN
ap-1638	4	21	)	)	PUNCT
ap-1638	4	22	films	film	NOUN
ap-1638	4	23	by	by	ADP
ap-1638	4	24	plasma	plasma	NOUN
ap-1638	4	25	-	-	PUNCT
ap-1638	4	26	enhanced	enhance	VERB
ap-1638	4	27	microwave	microwave	NOUN
ap-1638	4	28	chemical	chemical	NOUN
ap-1638	4	29	vapor	vapor	NOUN
ap-1638	4	30	deposition	deposition	NOUN
ap-1638	4	31	at	at	ADP
ap-1638	4	32	various	various	ADJ
ap-1638	4	33	temperatures	temperature	NOUN
ap-1638	4	34	,	,	PUNCT
ap-1638	4	35	and	and	CCONJ
ap-1638	4	36	to	to	PART
ap-1638	4	37	propose	propose	VERB
ap-1638	4	38	optimal	optimal	ADJ
ap-1638	4	39	diamond	diamond	NOUN
ap-1638	4	40	growth	growth	NOUN
ap-1638	4	41	conditions	condition	NOUN
ap-1638	4	42	for	for	ADP
ap-1638	4	43	implantable	implantable	ADJ
ap-1638	4	44	electrodes	electrode	NOUN
ap-1638	4	45	.	.	PUNCT
ap-1638	5	1	we	we	PRON
ap-1638	5	2	have	have	AUX
ap-1638	5	3	investigated	investigate	VERB
ap-1638	5	4	the	the	DET
ap-1638	5	5	temperature	temperature	NOUN
ap-1638	5	6	dependence	dependence	NOUN
ap-1638	5	7	(	(	PUNCT
ap-1638	5	8	450	450	NUM
ap-1638	5	9	°	°	NUM
ap-1638	5	10	c–820	c–820	NOUN
ap-1638	5	11	°	°	NOUN
ap-1638	5	12	c	c	NOUN
ap-1638	5	13	)	)	PUNCT
ap-1638	5	14	of	of	ADP
ap-1638	5	15	boron	boron	NOUN
ap-1638	5	16	incorporation	incorporation	NOUN
ap-1638	5	17	,	,	PUNCT
ap-1638	5	18	surface	surface	NOUN
ap-1638	5	19	morphology	morphology	NOUN
ap-1638	5	20	and	and	CCONJ
ap-1638	5	21	growth	growth	NOUN
ap-1638	5	22	rate	rate	NOUN
ap-1638	5	23	on	on	ADP
ap-1638	5	24	a	a	DET
ap-1638	5	25	polished	polished	ADJ
ap-1638	5	26	quartz	quartz	NOUN
ap-1638	5	27	plate	plate	NOUN
ap-1638	5	28	.	.	PUNCT
ap-1638	6	1	surface	surface	NOUN
ap-1638	6	2	morphology	morphology	NOUN
ap-1638	6	3	and	and	CCONJ
ap-1638	6	4	thickness	thickness	NOUN
ap-1638	6	5	were	be	AUX
ap-1638	6	6	examined	examine	VERB
ap-1638	6	7	by	by	ADP
ap-1638	6	8	atomic	atomic	ADJ
ap-1638	6	9	force	force	NOUN
ap-1638	6	10	microscopy	microscopy	NOUN
ap-1638	6	11	(	(	PUNCT
ap-1638	6	12	afm	afm	PROPN
ap-1638	6	13	)	)	PUNCT
ap-1638	6	14	.	.	PUNCT
ap-1638	7	1	the	the	DET
ap-1638	7	2	quality	quality	NOUN
ap-1638	7	3	of	of	ADP
ap-1638	7	4	the	the	DET
ap-1638	7	5	films	film	NOUN
ap-1638	7	6	in	in	ADP
ap-1638	7	7	terms	term	NOUN
ap-1638	7	8	of	of	ADP
ap-1638	7	9	diamond	diamond	NOUN
ap-1638	7	10	and	and	CCONJ
ap-1638	7	11	non	non	ADJ
ap-1638	7	12	-	-	ADJ
ap-1638	7	13	diamond	diamond	ADJ
ap-1638	7	14	phase	phase	NOUN
ap-1638	7	15	of	of	ADP
ap-1638	7	16	carbon	carbon	NOUN
ap-1638	7	17	was	be	AUX
ap-1638	7	18	investigated	investigate	VERB
ap-1638	7	19	by	by	ADP
ap-1638	7	20	raman	raman	NOUN
ap-1638	7	21	spectroscopy	spectroscopy	NOUN
ap-1638	7	22	.	.	PUNCT
ap-1638	8	1	afm	afm	PROPN
ap-1638	8	2	imaging	imaging	PROPN
ap-1638	8	3	showed	show	VERB
ap-1638	8	4	that	that	SCONJ
ap-1638	8	5	the	the	DET
ap-1638	8	6	size	size	NOUN
ap-1638	8	7	of	of	ADP
ap-1638	8	8	the	the	DET
ap-1638	8	9	grains	grain	NOUN
ap-1638	8	10	was	be	AUX
ap-1638	8	11	determined	determine	VERB
ap-1638	8	12	mainly	mainly	ADV
ap-1638	8	13	by	by	ADP
ap-1638	8	14	the	the	DET
ap-1638	8	15	thickness	thickness	NOUN
ap-1638	8	16	of	of	ADP
ap-1638	8	17	the	the	DET
ap-1638	8	18	films	film	NOUN
ap-1638	8	19	,	,	PUNCT
ap-1638	8	20	and	and	CCONJ
ap-1638	8	21	varied	varied	ADJ
ap-1638	8	22	from	from	ADP
ap-1638	8	23	an	an	DET
ap-1638	8	24	average	average	ADJ
ap-1638	8	25	size	size	NOUN
ap-1638	8	26	of	of	ADP
ap-1638	8	27	40	40	NUM
ap-1638	8	28	nm	nm	NOUN
ap-1638	8	29	in	in	ADP
ap-1638	8	30	the	the	DET
ap-1638	8	31	lowest	low	ADJ
ap-1638	8	32	temperature	temperature	NOUN
ap-1638	8	33	sample	sample	NOUN
ap-1638	8	34	to	to	ADP
ap-1638	8	35	an	an	DET
ap-1638	8	36	average	average	ADJ
ap-1638	8	37	size	size	NOUN
ap-1638	8	38	of	of	ADP
ap-1638	8	39	150	150	NUM
ap-1638	8	40	nm	nm	NOUN
ap-1638	8	41	in	in	ADP
ap-1638	8	42	the	the	DET
ap-1638	8	43	sample	sample	NOUN
ap-1638	8	44	prepared	prepare	VERB
ap-1638	8	45	at	at	ADP
ap-1638	8	46	the	the	DET
ap-1638	8	47	highest	high	ADJ
ap-1638	8	48	temperature	temperature	NOUN
ap-1638	8	49	.	.	PUNCT
ap-1638	9	1	the	the	DET
ap-1638	9	2	surface	surface	NOUN
ap-1638	9	3	roughness	roughness	NOUN
ap-1638	9	4	of	of	ADP
ap-1638	9	5	the	the	DET
ap-1638	9	6	measured	measure	VERB
ap-1638	9	7	samples	sample	NOUN
ap-1638	9	8	varied	vary	VERB
ap-1638	9	9	between	between	ADP
ap-1638	9	10	10	10	NUM
ap-1638	9	11	(	(	PUNCT
ap-1638	9	12	495	495	NUM
ap-1638	9	13	°	°	NOUN
ap-1638	9	14	c	c	NOUN
ap-1638	9	15	)	)	PUNCT
ap-1638	9	16	and	and	CCONJ
ap-1638	9	17	25	25	NUM
ap-1638	9	18	nm	nm	NOUN
ap-1638	9	19	(	(	PUNCT
ap-1638	9	20	800	800	NUM
ap-1638	9	21	°	°	NOUN
ap-1638	9	22	c	c	NOUN
ap-1638	9	23	)	)	PUNCT
ap-1638	9	24	.	.	PUNCT
ap-1638	10	1	the	the	DET
ap-1638	10	2	growth	growth	NOUN
ap-1638	10	3	rate	rate	NOUN
ap-1638	10	4	of	of	ADP
ap-1638	10	5	the	the	DET
ap-1638	10	6	sample	sample	NOUN
ap-1638	10	7	increased	increase	VERB
ap-1638	10	8	with	with	ADP
ap-1638	10	9	temperature	temperature	NOUN
ap-1638	10	10	.	.	PUNCT
ap-1638	11	1	we	we	PRON
ap-1638	11	2	found	find	VERB
ap-1638	11	3	that	that	SCONJ
ap-1638	11	4	the	the	DET
ap-1638	11	5	level	level	NOUN
ap-1638	11	6	of	of	ADP
ap-1638	11	7	boron	boron	NOUN
ap-1638	11	8	doping	doping	NOUN
ap-1638	11	9	was	be	AUX
ap-1638	11	10	strongly	strongly	ADV
ap-1638	11	11	dependent	dependent	ADJ
ap-1638	11	12	on	on	ADP
ap-1638	11	13	temperature	temperature	NOUN
ap-1638	11	14	during	during	ADP
ap-1638	11	15	deposition	deposition	NOUN
ap-1638	11	16	.	.	PUNCT
ap-1638	12	1	an	an	DET
ap-1638	12	2	optimal	optimal	ADJ
ap-1638	12	3	b	b	NOUN
ap-1638	12	4	-	-	PUNCT
ap-1638	12	5	ncd	ncd	PROPN
ap-1638	12	6	sample	sample	NOUN
ap-1638	12	7	was	be	AUX
ap-1638	12	8	prepared	prepare	VERB
ap-1638	12	9	at	at	ADP
ap-1638	12	10	595	595	NUM
ap-1638	12	11	°	°	NOUN
ap-1638	12	12	c	c	NOUN
ap-1638	12	13	.	.	PUNCT
ap-1638	13	1	keywords	keyword	NOUN
ap-1638	13	2	:	:	PUNCT
ap-1638	13	3	nanocrystalline	nanocrystalline	ADJ
ap-1638	13	4	diamond	diamond	NOUN
ap-1638	13	5	,	,	PUNCT
ap-1638	13	6	implantable	implantable	ADJ
ap-1638	13	7	electrode	electrode	NOUN
ap-1638	13	8	.	.	PUNCT
ap-1638	14	1	1	1	NUM
ap-1638	14	2	introduction	introduction	NOUN
ap-1638	14	3	an	an	DET
ap-1638	14	4	implantable	implantable	ADJ
ap-1638	14	5	electrode	electrode	NOUN
ap-1638	14	6	is	be	AUX
ap-1638	14	7	an	an	DET
ap-1638	14	8	invasive	invasive	ADJ
ap-1638	14	9	electronic	electronic	ADJ
ap-1638	14	10	device	device	NOUN
ap-1638	14	11	,	,	PUNCT
ap-1638	14	12	and	and	CCONJ
ap-1638	14	13	for	for	ADP
ap-1638	14	14	this	this	DET
ap-1638	14	15	reason	reason	NOUN
ap-1638	14	16	there	there	PRON
ap-1638	14	17	are	be	VERB
ap-1638	14	18	very	very	ADV
ap-1638	14	19	high	high	ADJ
ap-1638	14	20	requirements	requirement	NOUN
ap-1638	14	21	on	on	ADP
ap-1638	14	22	the	the	DET
ap-1638	14	23	materials	material	NOUN
ap-1638	14	24	that	that	PRON
ap-1638	14	25	are	be	AUX
ap-1638	14	26	used	use	VERB
ap-1638	14	27	.	.	PUNCT
ap-1638	15	1	long	long	ADJ
ap-1638	15	2	-	-	PUNCT
ap-1638	15	3	term	term	NOUN
ap-1638	15	4	functionality	functionality	NOUN
ap-1638	15	5	and	and	CCONJ
ap-1638	15	6	good	good	ADJ
ap-1638	15	7	performance	performance	NOUN
ap-1638	15	8	must	must	AUX
ap-1638	15	9	be	be	AUX
ap-1638	15	10	ensured	ensure	VERB
ap-1638	15	11	by	by	ADP
ap-1638	15	12	selecting	select	VERB
ap-1638	15	13	appropriate	appropriate	ADJ
ap-1638	15	14	materials	material	NOUN
ap-1638	15	15	for	for	ADP
ap-1638	15	16	the	the	DET
ap-1638	15	17	electrode	electrode	NOUN
ap-1638	15	18	[	[	X
ap-1638	15	19	4	4	NUM
ap-1638	15	20	]	]	PUNCT
ap-1638	15	21	.	.	PUNCT
ap-1638	16	1	above	above	ADP
ap-1638	16	2	all	all	PRON
ap-1638	16	3	,	,	PUNCT
ap-1638	16	4	the	the	DET
ap-1638	16	5	electrodes	electrode	NOUN
ap-1638	16	6	must	must	AUX
ap-1638	16	7	not	not	PART
ap-1638	16	8	adversely	adversely	ADV
ap-1638	16	9	affect	affect	VERB
ap-1638	16	10	the	the	DET
ap-1638	16	11	health	health	NOUN
ap-1638	16	12	of	of	ADP
ap-1638	16	13	the	the	DET
ap-1638	16	14	patient	patient	NOUN
ap-1638	16	15	[	[	X
ap-1638	16	16	1	1	NUM
ap-1638	16	17	]	]	PUNCT
ap-1638	16	18	.	.	PUNCT
ap-1638	17	1	the	the	DET
ap-1638	17	2	material	material	NOUN
ap-1638	17	3	of	of	ADP
ap-1638	17	4	the	the	DET
ap-1638	17	5	implant	implant	NOUN
ap-1638	17	6	must	must	AUX
ap-1638	17	7	be	be	AUX
ap-1638	17	8	biocompatible	biocompatible	ADJ
ap-1638	17	9	,	,	PUNCT
ap-1638	17	10	and	and	CCONJ
ap-1638	17	11	must	must	AUX
ap-1638	17	12	not	not	PART
ap-1638	17	13	cause	cause	VERB
ap-1638	17	14	an	an	DET
ap-1638	17	15	allergic	allergic	ADJ
ap-1638	17	16	reaction	reaction	NOUN
ap-1638	17	17	[	[	X
ap-1638	17	18	4	4	NUM
ap-1638	17	19	]	]	PUNCT
ap-1638	17	20	.	.	PUNCT
ap-1638	18	1	there	there	PRON
ap-1638	18	2	should	should	AUX
ap-1638	18	3	be	be	AUX
ap-1638	18	4	no	no	DET
ap-1638	18	5	acute	acute	ADJ
ap-1638	18	6	or	or	CCONJ
ap-1638	18	7	chronic	chronic	ADJ
ap-1638	18	8	adverse	adverse	ADJ
ap-1638	18	9	reaction	reaction	NOUN
ap-1638	18	10	,	,	PUNCT
ap-1638	18	11	and	and	CCONJ
ap-1638	18	12	no	no	DET
ap-1638	18	13	evidence	evidence	NOUN
ap-1638	18	14	of	of	ADP
ap-1638	18	15	toxicity	toxicity	NOUN
ap-1638	18	16	.	.	PUNCT
ap-1638	19	1	in	in	ADP
ap-1638	19	2	addition	addition	NOUN
ap-1638	19	3	,	,	PUNCT
ap-1638	19	4	the	the	DET
ap-1638	19	5	host	host	NOUN
ap-1638	19	6	organism	organism	NOUN
ap-1638	19	7	must	must	AUX
ap-1638	19	8	not	not	PART
ap-1638	19	9	affect	affect	VERB
ap-1638	19	10	the	the	DET
ap-1638	19	11	implanted	implant	VERB
ap-1638	19	12	system	system	NOUN
ap-1638	19	13	,	,	PUNCT
ap-1638	19	14	and	and	CCONJ
ap-1638	19	15	the	the	DET
ap-1638	19	16	system	system	NOUN
ap-1638	19	17	must	must	AUX
ap-1638	19	18	preserve	preserve	VERB
ap-1638	19	19	its	its	PRON
ap-1638	19	20	properties	property	NOUN
ap-1638	19	21	in	in	ADP
ap-1638	19	22	the	the	DET
ap-1638	19	23	aggressive	aggressive	ADJ
ap-1638	19	24	environment	environment	NOUN
ap-1638	19	25	of	of	ADP
ap-1638	19	26	a	a	DET
ap-1638	19	27	living	live	VERB
ap-1638	19	28	organism	organism	NOUN
ap-1638	19	29	[	[	X
ap-1638	19	30	1	1	NUM
ap-1638	19	31	]	]	PUNCT
ap-1638	19	32	.	.	PUNCT
ap-1638	20	1	the	the	DET
ap-1638	20	2	impedance	impedance	NOUN
ap-1638	20	3	between	between	ADP
ap-1638	20	4	electrode	electrode	NOUN
ap-1638	20	5	and	and	CCONJ
ap-1638	20	6	tissue	tissue	NOUN
ap-1638	20	7	must	must	AUX
ap-1638	20	8	be	be	AUX
ap-1638	20	9	low	low	ADJ
ap-1638	20	10	and	and	CCONJ
ap-1638	20	11	stable	stable	ADJ
ap-1638	20	12	in	in	ADP
ap-1638	20	13	order	order	NOUN
ap-1638	20	14	to	to	PART
ap-1638	20	15	provide	provide	VERB
ap-1638	20	16	reliable	reliable	ADJ
ap-1638	20	17	measurements	measurement	NOUN
ap-1638	20	18	or	or	CCONJ
ap-1638	20	19	stimulations	stimulation	NOUN
ap-1638	20	20	[	[	X
ap-1638	20	21	4	4	NUM
ap-1638	20	22	]	]	PUNCT
ap-1638	20	23	.	.	PUNCT
ap-1638	21	1	electrodes	electrode	NOUN
ap-1638	21	2	can	can	AUX
ap-1638	21	3	be	be	AUX
ap-1638	21	4	exposed	expose	VERB
ap-1638	21	5	to	to	ADP
ap-1638	21	6	potentials	potential	NOUN
ap-1638	21	7	of	of	ADP
ap-1638	21	8	hundreds	hundred	NOUN
ap-1638	21	9	of	of	ADP
ap-1638	21	10	volts	volts	NOUN
ap-1638	21	11	:	:	PUNCT
ap-1638	21	12	the	the	DET
ap-1638	21	13	material	material	NOUN
ap-1638	21	14	must	must	AUX
ap-1638	21	15	be	be	AUX
ap-1638	21	16	resistant	resistant	ADJ
ap-1638	21	17	to	to	ADP
ap-1638	21	18	electrochemical	electrochemical	ADJ
ap-1638	21	19	degradation	degradation	NOUN
ap-1638	22	1	[	[	X
ap-1638	22	2	5	5	NUM
ap-1638	22	3	]	]	PUNCT
ap-1638	22	4	.	.	PUNCT
ap-1638	23	1	last	last	ADJ
ap-1638	23	2	but	but	CCONJ
ap-1638	23	3	not	not	PART
ap-1638	23	4	least	least	ADJ
ap-1638	23	5	,	,	PUNCT
ap-1638	23	6	the	the	DET
ap-1638	23	7	material	material	NOUN
ap-1638	23	8	should	should	AUX
ap-1638	23	9	be	be	AUX
ap-1638	23	10	compatible	compatible	ADJ
ap-1638	23	11	with	with	ADP
ap-1638	23	12	magnetic	magnetic	ADJ
ap-1638	23	13	resonance	resonance	NOUN
ap-1638	23	14	[	[	X
ap-1638	23	15	4	4	NUM
ap-1638	23	16	]	]	PUNCT
ap-1638	23	17	.	.	PUNCT
ap-1638	24	1	further	further	ADJ
ap-1638	24	2	important	important	ADJ
ap-1638	24	3	factors	factor	NOUN
ap-1638	24	4	are	be	AUX
ap-1638	24	5	manufacturability	manufacturability	NOUN
ap-1638	24	6	,	,	PUNCT
ap-1638	24	7	reproducible	reproducible	ADJ
ap-1638	24	8	quality	quality	NOUN
ap-1638	24	9	,	,	PUNCT
ap-1638	24	10	and	and	CCONJ
ap-1638	24	11	cost	cost	VERB
ap-1638	24	12	[	[	X
ap-1638	24	13	1	1	NUM
ap-1638	24	14	]	]	PUNCT
ap-1638	24	15	.	.	PUNCT
ap-1638	25	1	diamond	diamond	PROPN
ap-1638	25	2	is	be	AUX
ap-1638	25	3	a	a	DET
ap-1638	25	4	promising	promising	ADJ
ap-1638	25	5	material	material	NOUN
ap-1638	25	6	for	for	ADP
ap-1638	25	7	implantable	implantable	ADJ
ap-1638	25	8	electrodes	electrode	NOUN
ap-1638	25	9	due	due	ADJ
ap-1638	25	10	to	to	ADP
ap-1638	25	11	its	its	PRON
ap-1638	25	12	unique	unique	ADJ
ap-1638	25	13	properties	property	NOUN
ap-1638	25	14	.	.	PUNCT
ap-1638	26	1	most	most	ADV
ap-1638	26	2	importantly	importantly	ADV
ap-1638	26	3	,	,	PUNCT
ap-1638	26	4	diamond	diamond	PROPN
ap-1638	26	5	is	be	AUX
ap-1638	26	6	biologically	biologically	ADV
ap-1638	26	7	compatible	compatible	ADJ
ap-1638	26	8	.	.	PUNCT
ap-1638	27	1	it	it	PRON
ap-1638	27	2	is	be	AUX
ap-1638	27	3	the	the	DET
ap-1638	27	4	hardest	hard	ADJ
ap-1638	27	5	material	material	NOUN
ap-1638	27	6	in	in	ADP
ap-1638	27	7	nature	nature	NOUN
ap-1638	27	8	.	.	PUNCT
ap-1638	28	1	it	it	PRON
ap-1638	28	2	has	have	VERB
ap-1638	28	3	extreme	extreme	ADJ
ap-1638	28	4	wear	wear	NOUN
ap-1638	28	5	resistance	resistance	NOUN
ap-1638	28	6	and	and	CCONJ
ap-1638	28	7	resistance	resistance	NOUN
ap-1638	28	8	to	to	ADP
ap-1638	28	9	chemical	chemical	ADJ
ap-1638	28	10	corrosion	corrosion	NOUN
ap-1638	28	11	.	.	PUNCT
ap-1638	29	1	it	it	PRON
ap-1638	29	2	is	be	AUX
ap-1638	29	3	a	a	DET
ap-1638	29	4	great	great	ADJ
ap-1638	29	5	thermal	thermal	ADJ
ap-1638	29	6	conductor	conductor	NOUN
ap-1638	29	7	,	,	PUNCT
ap-1638	29	8	and	and	CCONJ
ap-1638	29	9	its	its	PRON
ap-1638	29	10	thermal	thermal	ADJ
ap-1638	29	11	expansion	expansion	NOUN
ap-1638	29	12	coefficient	coefficient	NOUN
ap-1638	29	13	at	at	ADP
ap-1638	29	14	room	room	NOUN
ap-1638	29	15	temperature	temperature	NOUN
ap-1638	29	16	is	be	AUX
ap-1638	29	17	very	very	ADV
ap-1638	29	18	low	low	ADJ
ap-1638	29	19	.	.	PUNCT
ap-1638	30	1	diamond	diamond	NOUN
ap-1638	30	2	can	can	AUX
ap-1638	30	3	easily	easily	ADV
ap-1638	30	4	be	be	AUX
ap-1638	30	5	doped	dope	VERB
ap-1638	30	6	,	,	PUNCT
ap-1638	30	7	and	and	CCONJ
ap-1638	30	8	then	then	ADV
ap-1638	30	9	it	it	PRON
ap-1638	30	10	becomes	become	VERB
ap-1638	30	11	a	a	DET
ap-1638	30	12	semiconductor	semiconductor	NOUN
ap-1638	30	13	.	.	PUNCT
ap-1638	31	1	it	it	PRON
ap-1638	31	2	does	do	AUX
ap-1638	31	3	not	not	PART
ap-1638	31	4	melt	melt	VERB
ap-1638	31	5	during	during	ADP
ap-1638	31	6	current	current	ADJ
ap-1638	31	7	flow	flow	NOUN
ap-1638	31	8	,	,	PUNCT
ap-1638	31	9	and	and	CCONJ
ap-1638	31	10	it	it	PRON
ap-1638	31	11	has	have	VERB
ap-1638	31	12	a	a	DET
ap-1638	31	13	wide	wide	ADJ
ap-1638	31	14	potential	potential	ADJ
ap-1638	31	15	window	window	NOUN
ap-1638	32	1	[	[	X
ap-1638	32	2	2	2	NUM
ap-1638	32	3	]	]	PUNCT
ap-1638	32	4	.	.	PUNCT
ap-1638	33	1	diamond	diamond	PROPN
ap-1638	33	2	can	can	AUX
ap-1638	33	3	be	be	AUX
ap-1638	33	4	made	make	VERB
ap-1638	33	5	in	in	ADP
ap-1638	33	6	many	many	ADJ
ap-1638	33	7	different	different	ADJ
ap-1638	33	8	ways	way	NOUN
ap-1638	33	9	.	.	PUNCT
ap-1638	34	1	one	one	NUM
ap-1638	34	2	example	example	NOUN
ap-1638	34	3	is	be	AUX
ap-1638	34	4	the	the	DET
ap-1638	34	5	high	high	ADJ
ap-1638	34	6	-	-	PUNCT
ap-1638	34	7	pressure	pressure	NOUN
ap-1638	34	8	high	high	ADJ
ap-1638	34	9	-	-	PUNCT
ap-1638	34	10	temperature	temperature	NOUN
ap-1638	34	11	(	(	PUNCT
ap-1638	34	12	hpht	hpht	NOUN
ap-1638	34	13	)	)	PUNCT
ap-1638	34	14	technique	technique	NOUN
ap-1638	34	15	.	.	PUNCT
ap-1638	35	1	this	this	DET
ap-1638	35	2	method	method	NOUN
ap-1638	35	3	simulates	simulate	VERB
ap-1638	35	4	the	the	DET
ap-1638	35	5	conditions	condition	NOUN
ap-1638	35	6	in	in	ADP
ap-1638	35	7	which	which	PRON
ap-1638	35	8	diamonds	diamond	NOUN
ap-1638	35	9	are	be	AUX
ap-1638	35	10	formed	form	VERB
ap-1638	35	11	in	in	ADP
ap-1638	35	12	nature	nature	NOUN
ap-1638	35	13	.	.	PUNCT
ap-1638	36	1	in	in	ADP
ap-1638	36	2	the	the	DET
ap-1638	36	3	nature	nature	NOUN
ap-1638	36	4	,	,	PUNCT
ap-1638	36	5	diamond	diamond	NOUN
ap-1638	36	6	is	be	AUX
ap-1638	36	7	formed	form	VERB
ap-1638	36	8	deep	deep	ADV
ap-1638	36	9	underground	underground	ADV
ap-1638	36	10	,	,	PUNCT
ap-1638	36	11	under	under	ADP
ap-1638	36	12	very	very	ADV
ap-1638	36	13	high	high	ADJ
ap-1638	36	14	pressure	pressure	NOUN
ap-1638	36	15	and	and	CCONJ
ap-1638	36	16	temperature	temperature	NOUN
ap-1638	36	17	.	.	PUNCT
ap-1638	37	1	this	this	DET
ap-1638	37	2	results	result	VERB
ap-1638	37	3	in	in	ADP
ap-1638	37	4	the	the	DET
ap-1638	37	5	formation	formation	NOUN
ap-1638	37	6	of	of	ADP
ap-1638	37	7	diamond	diamond	NOUN
ap-1638	37	8	monocrystals	monocrystal	NOUN
ap-1638	37	9	.	.	PUNCT
ap-1638	38	1	diamond	diamond	NOUN
ap-1638	38	2	in	in	ADP
ap-1638	38	3	form	form	NOUN
ap-1638	38	4	of	of	ADP
ap-1638	38	5	monocrystals	monocrystal	NOUN
ap-1638	38	6	is	be	AUX
ap-1638	38	7	not	not	PART
ap-1638	38	8	a	a	DET
ap-1638	38	9	convenient	convenient	ADJ
ap-1638	38	10	material	material	NOUN
ap-1638	38	11	for	for	ADP
ap-1638	38	12	most	most	ADJ
ap-1638	38	13	medical	medical	ADJ
ap-1638	38	14	applications	application	NOUN
ap-1638	38	15	.	.	PUNCT
ap-1638	39	1	another	another	DET
ap-1638	39	2	commonly	commonly	ADV
ap-1638	39	3	used	use	VERB
ap-1638	39	4	technique	technique	NOUN
ap-1638	39	5	for	for	ADP
ap-1638	39	6	diamond	diamond	NOUN
ap-1638	39	7	deposition	deposition	NOUN
ap-1638	39	8	is	be	AUX
ap-1638	39	9	cvd	cvd	PROPN
ap-1638	39	10	(	(	PUNCT
ap-1638	39	11	chemical	chemical	NOUN
ap-1638	39	12	vapor	vapor	NOUN
ap-1638	39	13	deposition	deposition	NOUN
ap-1638	39	14	)	)	PUNCT
ap-1638	39	15	.	.	PUNCT
ap-1638	40	1	this	this	DET
ap-1638	40	2	method	method	NOUN
ap-1638	40	3	enables	enable	VERB
ap-1638	40	4	not	not	PART
ap-1638	40	5	only	only	ADV
ap-1638	40	6	single	single	ADJ
ap-1638	40	7	crystalline	crystalline	NOUN
ap-1638	40	8	diamonds	diamond	NOUN
ap-1638	40	9	to	to	PART
ap-1638	40	10	be	be	AUX
ap-1638	40	11	deposited	deposit	VERB
ap-1638	40	12	.	.	PUNCT
ap-1638	41	1	carbon	carbon	NOUN
ap-1638	41	2	atoms	atom	NOUN
ap-1638	41	3	are	be	AUX
ap-1638	41	4	added	add	VERB
ap-1638	41	5	from	from	ADP
ap-1638	41	6	the	the	DET
ap-1638	41	7	gas	gas	NOUN
ap-1638	41	8	phase	phase	NOUN
ap-1638	41	9	to	to	ADP
ap-1638	41	10	the	the	DET
ap-1638	41	11	initial	initial	ADJ
ap-1638	41	12	template	template	NOUN
ap-1638	41	13	.	.	PUNCT
ap-1638	42	1	lower	low	ADJ
ap-1638	42	2	pressure	pressure	NOUN
ap-1638	42	3	and	and	CCONJ
ap-1638	42	4	temperature	temperature	NOUN
ap-1638	42	5	is	be	AUX
ap-1638	42	6	used	use	VERB
ap-1638	42	7	.	.	PUNCT
ap-1638	43	1	cvd	cvd	PROPN
ap-1638	43	2	is	be	AUX
ap-1638	43	3	a	a	DET
ap-1638	43	4	more	more	ADV
ap-1638	43	5	economical	economical	ADJ
ap-1638	43	6	method	method	NOUN
ap-1638	43	7	.	.	PUNCT
ap-1638	44	1	the	the	DET
ap-1638	44	2	biggest	big	ADJ
ap-1638	44	3	advantage	advantage	NOUN
ap-1638	44	4	is	be	AUX
ap-1638	44	5	that	that	SCONJ
ap-1638	44	6	a	a	DET
ap-1638	44	7	very	very	ADV
ap-1638	44	8	thin	thin	ADJ
ap-1638	44	9	layer	layer	NOUN
ap-1638	44	10	of	of	ADP
ap-1638	44	11	diamond	diamond	NOUN
ap-1638	44	12	is	be	AUX
ap-1638	44	13	formed	form	VERB
ap-1638	44	14	[	[	X
ap-1638	44	15	2	2	NUM
ap-1638	44	16	]	]	PUNCT
ap-1638	44	17	.	.	PUNCT
ap-1638	45	1	platforms	platform	NOUN
ap-1638	45	2	for	for	ADP
ap-1638	45	3	implantable	implantable	ADJ
ap-1638	45	4	diamond	diamond	NOUN
ap-1638	45	5	electrodes	electrode	NOUN
ap-1638	45	6	are	be	AUX
ap-1638	45	7	made	make	VERB
ap-1638	45	8	in	in	ADP
ap-1638	45	9	several	several	ADJ
ap-1638	45	10	steps	step	NOUN
ap-1638	45	11	.	.	PUNCT
ap-1638	46	1	a	a	DET
ap-1638	46	2	thin	thin	ADJ
ap-1638	46	3	diamond	diamond	NOUN
ap-1638	46	4	film	film	NOUN
ap-1638	46	5	is	be	AUX
ap-1638	46	6	grown	grow	VERB
ap-1638	46	7	on	on	ADP
ap-1638	46	8	a	a	DET
ap-1638	46	9	silicon	silicon	NOUN
ap-1638	46	10	wafer	wafer	NOUN
ap-1638	46	11	.	.	PUNCT
ap-1638	47	1	the	the	DET
ap-1638	47	2	second	second	ADJ
ap-1638	47	3	step	step	NOUN
ap-1638	47	4	is	be	AUX
ap-1638	47	5	deposition	deposition	NOUN
ap-1638	47	6	of	of	ADP
ap-1638	47	7	a	a	DET
ap-1638	47	8	film	film	NOUN
ap-1638	47	9	of	of	ADP
ap-1638	47	10	a	a	DET
ap-1638	47	11	suitable	suitable	ADJ
ap-1638	47	12	polymer	polymer	NOUN
ap-1638	47	13	(	(	PUNCT
ap-1638	47	14	e.g.	e.g.	ADV
ap-1638	47	15	poly	poly	ADJ
ap-1638	47	16	(	(	PUNCT
ap-1638	47	17	methyl	methyl	NOUN
ap-1638	47	18	methacrylate	methacrylate	NOUN
ap-1638	47	19	)	)	PUNCT
ap-1638	47	20	or	or	CCONJ
ap-1638	47	21	polyimide	polyimide	NOUN
ap-1638	47	22	)	)	PUNCT
ap-1638	47	23	by	by	ADP
ap-1638	47	24	spin	spin	NOUN
ap-1638	47	25	coating	coating	NOUN
ap-1638	47	26	followed	follow	VERB
ap-1638	47	27	by	by	ADP
ap-1638	47	28	hardening	harden	VERB
ap-1638	47	29	of	of	ADP
ap-1638	47	30	the	the	DET
ap-1638	47	31	polymer	polymer	NOUN
ap-1638	47	32	by	by	ADP
ap-1638	47	33	baking	bake	VERB
ap-1638	47	34	.	.	PUNCT
ap-1638	48	1	chemical	chemical	NOUN
ap-1638	48	2	etching	etch	VERB
ap-1638	48	3	of	of	ADP
ap-1638	48	4	the	the	DET
ap-1638	48	5	silicon	silicon	NOUN
ap-1638	48	6	wafer	wafer	NOUN
ap-1638	48	7	leaves	leave	VERB
ap-1638	48	8	a	a	DET
ap-1638	48	9	polycrystalline	polycrystalline	ADJ
ap-1638	48	10	diamond	diamond	NOUN
ap-1638	48	11	film	film	NOUN
ap-1638	48	12	on	on	ADP
ap-1638	48	13	a	a	DET
ap-1638	48	14	flexible	flexible	ADJ
ap-1638	48	15	substrate	substrate	NOUN
ap-1638	48	16	.	.	PUNCT
ap-1638	49	1	in	in	ADP
ap-1638	49	2	this	this	DET
ap-1638	49	3	paper	paper	NOUN
ap-1638	49	4	,	,	PUNCT
ap-1638	49	5	we	we	PRON
ap-1638	49	6	focus	focus	VERB
ap-1638	49	7	on	on	ADP
ap-1638	49	8	optimizing	optimize	VERB
ap-1638	49	9	the	the	DET
ap-1638	49	10	growth	growth	NOUN
ap-1638	49	11	of	of	ADP
ap-1638	49	12	thin	thin	ADJ
ap-1638	49	13	diamond	diamond	NOUN
ap-1638	49	14	films	film	NOUN
ap-1638	49	15	by	by	ADP
ap-1638	49	16	plasma	plasma	NOUN
ap-1638	49	17	-	-	PUNCT
ap-1638	49	18	enhanced	enhance	VERB
ap-1638	49	19	microwave	microwave	NOUN
ap-1638	49	20	chemical	chemical	NOUN
ap-1638	49	21	vapor	vapor	NOUN
ap-1638	49	22	deposition	deposition	NOUN
ap-1638	49	23	.	.	PUNCT
ap-1638	50	1	we	we	PRON
ap-1638	50	2	investigate	investigate	VERB
ap-1638	50	3	the	the	DET
ap-1638	50	4	temperature	temperature	NOUN
ap-1638	50	5	dependence	dependence	NOUN
ap-1638	50	6	of	of	ADP
ap-1638	50	7	boron	boron	NOUN
ap-1638	50	8	incorporation	incorporation	NOUN
ap-1638	50	9	,	,	PUNCT
ap-1638	50	10	surface	surface	NOUN
ap-1638	50	11	morphology	morphology	NOUN
ap-1638	50	12	and	and	CCONJ
ap-1638	50	13	growth	growth	NOUN
ap-1638	50	14	rate	rate	NOUN
ap-1638	50	15	.	.	PUNCT
ap-1638	51	1	we	we	PRON
ap-1638	51	2	propose	propose	VERB
ap-1638	51	3	optimal	optimal	ADJ
ap-1638	51	4	diamond	diamond	NOUN
ap-1638	51	5	conditions	condition	NOUN
ap-1638	51	6	for	for	ADP
ap-1638	51	7	application	application	NOUN
ap-1638	51	8	in	in	ADP
ap-1638	51	9	implantable	implantable	ADJ
ap-1638	51	10	electrodes	electrode	NOUN
ap-1638	51	11	.	.	PUNCT
ap-1638	52	1	58	58	NUM
ap-1638	52	2	acta	acta	PROPN
ap-1638	52	3	polytechnica	polytechnica	PROPN
ap-1638	52	4	vol	vol	NOUN
ap-1638	52	5	.	.	PUNCT
ap-1638	53	1	52	52	NUM
ap-1638	53	2	no	no	NOUN
ap-1638	53	3	.	.	PUNCT
ap-1638	54	1	5/2012	5/2012	NUM
ap-1638	54	2	run	run	NOUN
ap-1638	54	3	i	i	PROPN
ap-1638	54	4	d	d	PROPN
ap-1638	54	5	temperature	temperature	NOUN
ap-1638	54	6	pressure	pressure	NOUN
ap-1638	54	7	power	power	NOUN
ap-1638	54	8	(	(	PUNCT
ap-1638	54	9	°	°	ADP
ap-1638	54	10	c	c	NOUN
ap-1638	54	11	)	)	PUNCT
ap-1638	54	12	(	(	PUNCT
ap-1638	54	13	mbar	mbar	NOUN
ap-1638	54	14	)	)	PUNCT
ap-1638	54	15	(	(	PUNCT
ap-1638	54	16	w	w	NOUN
ap-1638	54	17	)	)	PUNCT
ap-1638	55	1	s820	s820	NUM
ap-1638	55	2	820	820	NUM
ap-1638	55	3	90	90	NUM
ap-1638	55	4	1522	1522	NUM
ap-1638	55	5	s670	s670	PROPN
ap-1638	55	6	670	670	NUM
ap-1638	55	7	50	50	NUM
ap-1638	55	8	1150	1150	NUM
ap-1638	55	9	s595	s595	PROPN
ap-1638	55	10	595	595	NUM
ap-1638	55	11	50	50	NUM
ap-1638	55	12	750	750	NUM
ap-1638	55	13	s450	s450	NUM
ap-1638	55	14	450	450	NUM
ap-1638	55	15	50	50	NUM
ap-1638	55	16	550	550	NUM
ap-1638	55	17	s490	s490	PROPN
ap-1638	55	18	490	490	NUM
ap-1638	55	19	50	50	NUM
ap-1638	55	20	650	650	NUM
ap-1638	55	21	table	table	NOUN
ap-1638	55	22	1	1	NUM
ap-1638	55	23	:	:	PUNCT
ap-1638	55	24	variable	variable	ADJ
ap-1638	55	25	conditions	condition	NOUN
ap-1638	55	26	for	for	ADP
ap-1638	55	27	mwpecvd	mwpecvd	NOUN
ap-1638	55	28	2	2	NUM
ap-1638	55	29	experimental	experimental	NOUN
ap-1638	55	30	the	the	DET
ap-1638	55	31	study	study	NOUN
ap-1638	55	32	was	be	AUX
ap-1638	55	33	performed	perform	VERB
ap-1638	55	34	for	for	ADP
ap-1638	55	35	five	five	NUM
ap-1638	55	36	different	different	ADJ
ap-1638	55	37	substrate	substrate	NOUN
ap-1638	55	38	temperatures	temperature	NOUN
ap-1638	55	39	during	during	ADP
ap-1638	55	40	deposition	deposition	NOUN
ap-1638	55	41	.	.	PUNCT
ap-1638	56	1	during	during	ADP
ap-1638	56	2	the	the	DET
ap-1638	56	3	study	study	NOUN
ap-1638	56	4	,	,	PUNCT
ap-1638	56	5	the	the	DET
ap-1638	56	6	temperatures	temperature	NOUN
ap-1638	56	7	ranged	range	VERB
ap-1638	56	8	between	between	ADP
ap-1638	56	9	450	450	NUM
ap-1638	56	10	°	°	NOUN
ap-1638	56	11	c	c	NOUN
ap-1638	56	12	and	and	CCONJ
ap-1638	56	13	820	820	NUM
ap-1638	56	14	°	°	NOUN
ap-1638	56	15	c	c	NOUN
ap-1638	56	16	.	.	PUNCT
ap-1638	57	1	the	the	DET
ap-1638	57	2	growth	growth	NOUN
ap-1638	57	3	conditions	condition	NOUN
ap-1638	57	4	and	and	CCONJ
ap-1638	57	5	temperatures	temperature	NOUN
ap-1638	57	6	are	be	AUX
ap-1638	57	7	summarized	summarize	VERB
ap-1638	57	8	in	in	ADP
ap-1638	57	9	tab	tab	NOUN
ap-1638	57	10	.	.	PUNCT
ap-1638	58	1	1	1	NUM
ap-1638	58	2	.	.	NOUN
ap-1638	58	3	2.1	2.1	NUM
ap-1638	58	4	substrate	substrate	NOUN
ap-1638	58	5	pretreatment	pretreatment	NOUN
ap-1638	58	6	we	we	PRON
ap-1638	58	7	used	use	VERB
ap-1638	58	8	a	a	DET
ap-1638	58	9	polished	polished	ADJ
ap-1638	58	10	quartz	quartz	NOUN
ap-1638	58	11	plate	plate	NOUN
ap-1638	58	12	10×	10×	NUM
ap-1638	58	13	10×	10×	NUM
ap-1638	58	14	1	1	NUM
ap-1638	58	15	mm	mm	NOUN
ap-1638	58	16	(	(	PUNCT
ap-1638	58	17	mateck	mateck	PROPN
ap-1638	58	18	gmbh	gmbh	PROPN
ap-1638	58	19	,	,	PUNCT
ap-1638	58	20	germany	germany	PROPN
ap-1638	58	21	)	)	PUNCT
ap-1638	58	22	as	as	ADP
ap-1638	58	23	the	the	DET
ap-1638	58	24	substrate	substrate	NOUN
ap-1638	58	25	.	.	PUNCT
ap-1638	59	1	the	the	DET
ap-1638	59	2	substrates	substrate	NOUN
ap-1638	59	3	were	be	AUX
ap-1638	59	4	cleaned	clean	VERB
ap-1638	59	5	using	use	VERB
ap-1638	59	6	isopropyl	isopropyl	NOUN
ap-1638	59	7	on	on	ADP
ap-1638	59	8	dust	dust	NOUN
ap-1638	59	9	-	-	PUNCT
ap-1638	59	10	free	free	ADJ
ap-1638	59	11	cellulose	cellulose	NOUN
ap-1638	59	12	wadding	wadding	NOUN
ap-1638	59	13	.	.	PUNCT
ap-1638	60	1	then	then	ADV
ap-1638	60	2	the	the	DET
ap-1638	60	3	sample	sample	NOUN
ap-1638	60	4	was	be	AUX
ap-1638	60	5	inserted	insert	VERB
ap-1638	60	6	into	into	ADP
ap-1638	60	7	deionized	deionize	VERB
ap-1638	60	8	water	water	NOUN
ap-1638	60	9	(	(	PUNCT
ap-1638	60	10	2mωm	2mωm	NUM
ap-1638	60	11	)	)	PUNCT
ap-1638	60	12	and	and	CCONJ
ap-1638	60	13	sonicated	sonicate	VERB
ap-1638	60	14	in	in	ADP
ap-1638	60	15	an	an	DET
ap-1638	60	16	ultrasonic	ultrasonic	ADJ
ap-1638	60	17	bath	bath	NOUN
ap-1638	60	18	at	at	ADP
ap-1638	60	19	80	80	NUM
ap-1638	60	20	°	°	NUM
ap-1638	60	21	c	c	NOUN
ap-1638	60	22	for	for	ADP
ap-1638	60	23	10	10	NUM
ap-1638	60	24	minutes	minute	NOUN
ap-1638	60	25	.	.	PUNCT
ap-1638	61	1	finally	finally	ADV
ap-1638	61	2	,	,	PUNCT
ap-1638	61	3	we	we	PRON
ap-1638	61	4	dried	dry	VERB
ap-1638	61	5	the	the	DET
ap-1638	61	6	substrate	substrate	NOUN
ap-1638	61	7	with	with	ADP
ap-1638	61	8	dry	dry	ADJ
ap-1638	61	9	compressed	compressed	ADJ
ap-1638	61	10	air	air	NOUN
ap-1638	61	11	.	.	PUNCT
ap-1638	62	1	initial	initial	ADJ
ap-1638	62	2	nucleation	nucleation	NOUN
ap-1638	62	3	of	of	ADP
ap-1638	62	4	the	the	DET
ap-1638	62	5	substrates	substrate	NOUN
ap-1638	62	6	were	be	AUX
ap-1638	62	7	done	do	VERB
ap-1638	62	8	by	by	ADP
ap-1638	62	9	immersion	immersion	NOUN
ap-1638	62	10	in	in	ADP
ap-1638	62	11	a	a	DET
ap-1638	62	12	solution	solution	NOUN
ap-1638	62	13	of	of	ADP
ap-1638	62	14	nanoamando	nanoamando	PROPN
ap-1638	62	15	nanodiamond	nanodiamond	PROPN
ap-1638	62	16	(	(	PUNCT
ap-1638	62	17	nanocarbon	nanocarbon	NOUN
ap-1638	62	18	research	research	PROPN
ap-1638	62	19	institute	institute	PROPN
ap-1638	62	20	,	,	PUNCT
ap-1638	62	21	japan	japan	PROPN
ap-1638	62	22	)	)	PUNCT
ap-1638	62	23	at	at	ADP
ap-1638	62	24	a	a	DET
ap-1638	62	25	concentration	concentration	NOUN
ap-1638	62	26	of	of	ADP
ap-1638	62	27	0.2	0.2	NUM
ap-1638	62	28	g	g	NOUN
ap-1638	62	29	/	/	SYM
ap-1638	62	30	l	l	NOUN
ap-1638	62	31	,	,	PUNCT
ap-1638	62	32	followed	follow	VERB
ap-1638	62	33	by	by	ADP
ap-1638	62	34	spin	spin	NOUN
ap-1638	62	35	coating	coat	VERB
ap-1638	62	36	at	at	ADP
ap-1638	62	37	3800	3800	NUM
ap-1638	62	38	rpm	rpm	NOUN
ap-1638	62	39	for	for	ADP
ap-1638	62	40	30	30	NUM
ap-1638	62	41	s.	s.	PROPN
ap-1638	62	42	the	the	DET
ap-1638	62	43	declared	declare	VERB
ap-1638	62	44	size	size	NOUN
ap-1638	62	45	of	of	ADP
ap-1638	62	46	the	the	DET
ap-1638	62	47	nanodiamonds	nanodiamond	NOUN
ap-1638	62	48	in	in	ADP
ap-1638	62	49	the	the	DET
ap-1638	62	50	solution	solution	NOUN
ap-1638	62	51	was	be	AUX
ap-1638	62	52	5±	5±	PROPN
ap-1638	62	53	0.9	0.9	NUM
ap-1638	62	54	nm	nm	NOUN
ap-1638	62	55	.	.	PUNCT
ap-1638	63	1	2.2	2.2	NUM
ap-1638	63	2	growth	growth	NOUN
ap-1638	63	3	of	of	ADP
ap-1638	63	4	ncd	ncd	PROPN
ap-1638	63	5	ncd	ncd	PROPN
ap-1638	63	6	was	be	AUX
ap-1638	63	7	grown	grow	VERB
ap-1638	63	8	by	by	ADP
ap-1638	63	9	the	the	DET
ap-1638	63	10	microwave	microwave	NOUN
ap-1638	63	11	plasma	plasma	NOUN
ap-1638	63	12	enhanced	enhance	VERB
ap-1638	63	13	chemical	chemical	NOUN
ap-1638	63	14	vapor	vapor	NOUN
ap-1638	63	15	deposition	deposition	NOUN
ap-1638	63	16	method	method	NOUN
ap-1638	63	17	(	(	PUNCT
ap-1638	63	18	mwpecvd	mwpecvd	NOUN
ap-1638	63	19	)	)	PUNCT
ap-1638	63	20	.	.	PUNCT
ap-1638	64	1	we	we	PRON
ap-1638	64	2	used	use	VERB
ap-1638	64	3	an	an	DET
ap-1638	64	4	astex	astex	NOUN
ap-1638	64	5	ax5010	ax5010	PROPN
ap-1638	64	6	reactor	reactor	NOUN
ap-1638	64	7	(	(	PUNCT
ap-1638	64	8	seki	seki	PROPN
ap-1638	64	9	technotro	technotro	PROPN
ap-1638	64	10	corp	corp	PROPN
ap-1638	64	11	.	.	PROPN
ap-1638	64	12	,	,	PUNCT
ap-1638	64	13	japan	japan	PROPN
ap-1638	64	14	)	)	PUNCT
ap-1638	64	15	.	.	PUNCT
ap-1638	65	1	all	all	DET
ap-1638	65	2	samples	sample	NOUN
ap-1638	65	3	were	be	AUX
ap-1638	65	4	grown	grow	VERB
ap-1638	65	5	for	for	ADP
ap-1638	65	6	90	90	NUM
ap-1638	65	7	minutes	minute	NOUN
ap-1638	65	8	with	with	ADP
ap-1638	65	9	a	a	DET
ap-1638	65	10	fixed	fix	VERB
ap-1638	65	11	boron	boron	NOUN
ap-1638	65	12	concentration	concentration	NOUN
ap-1638	65	13	in	in	ADP
ap-1638	65	14	a	a	DET
ap-1638	65	15	gas	gas	NOUN
ap-1638	65	16	mixture	mixture	NOUN
ap-1638	65	17	(	(	PUNCT
ap-1638	65	18	2000	2000	NUM
ap-1638	65	19	ppm	ppm	PROPN
ap-1638	65	20	b	b	PROPN
ap-1638	65	21	/	/	SYM
ap-1638	65	22	c	c	NOUN
ap-1638	65	23	)	)	PUNCT
ap-1638	65	24	,	,	PUNCT
ap-1638	65	25	and	and	CCONJ
ap-1638	65	26	there	there	PRON
ap-1638	65	27	was	be	VERB
ap-1638	65	28	a	a	DET
ap-1638	65	29	fixed	fix	VERB
ap-1638	65	30	concentration	concentration	NOUN
ap-1638	65	31	of	of	ADP
ap-1638	65	32	methane	methane	NOUN
ap-1638	65	33	(	(	PUNCT
ap-1638	65	34	0.5	0.5	NUM
ap-1638	65	35	%	%	NOUN
ap-1638	65	36	)	)	PUNCT
ap-1638	65	37	.	.	PUNCT
ap-1638	66	1	the	the	DET
ap-1638	66	2	variable	variable	ADJ
ap-1638	66	3	growth	growth	NOUN
ap-1638	66	4	conditions	condition	NOUN
ap-1638	66	5	are	be	AUX
ap-1638	66	6	presented	present	VERB
ap-1638	66	7	in	in	ADP
ap-1638	66	8	tab	tab	NOUN
ap-1638	66	9	.	.	PUNCT
ap-1638	67	1	1	1	NUM
ap-1638	67	2	.	.	X
ap-1638	67	3	2.3	2.3	NUM
ap-1638	67	4	characterization	characterization	NOUN
ap-1638	67	5	the	the	DET
ap-1638	67	6	surface	surface	NOUN
ap-1638	67	7	roughness	roughness	NOUN
ap-1638	67	8	and	and	CCONJ
ap-1638	67	9	thickness	thickness	NOUN
ap-1638	67	10	of	of	ADP
ap-1638	67	11	the	the	DET
ap-1638	67	12	layer	layer	NOUN
ap-1638	67	13	was	be	AUX
ap-1638	67	14	obtained	obtain	VERB
ap-1638	67	15	by	by	ADP
ap-1638	67	16	atomic	atomic	ADJ
ap-1638	67	17	force	force	NOUN
ap-1638	67	18	microscopy	microscopy	NOUN
ap-1638	67	19	(	(	PUNCT
ap-1638	67	20	afm	afm	PROPN
ap-1638	67	21	)	)	PUNCT
ap-1638	67	22	.	.	PUNCT
ap-1638	68	1	the	the	DET
ap-1638	68	2	roughness	roughness	NOUN
ap-1638	68	3	(	(	PUNCT
ap-1638	68	4	root	root	NOUN
ap-1638	68	5	mean	mean	ADJ
ap-1638	68	6	square	square	NOUN
ap-1638	68	7	)	)	PUNCT
ap-1638	68	8	is	be	AUX
ap-1638	68	9	calculated	calculate	VERB
ap-1638	68	10	as	as	ADP
ap-1638	68	11	rq	rq	NOUN
ap-1638	68	12	=	=	PUNCT
ap-1638	68	13	√√√√	√√√√	PRON
ap-1638	68	14	1	1	NUM
ap-1638	68	15	n	n	NUM
ap-1638	68	16	n∑	n∑	NOUN
ap-1638	68	17	i=1	i=1	PROPN
ap-1638	68	18	y2i	y2i	NOUN
ap-1638	68	19	figure	figure	NOUN
ap-1638	68	20	1	1	NUM
ap-1638	68	21	:	:	PUNCT
ap-1638	68	22	raman	raman	ADJ
ap-1638	68	23	spectra	spectra	NOUN
ap-1638	68	24	(	(	PUNCT
ap-1638	68	25	excluding	exclude	VERB
ap-1638	68	26	633	633	NUM
ap-1638	68	27	nm	nm	NOUN
ap-1638	68	28	)	)	PUNCT
ap-1638	68	29	of	of	ADP
ap-1638	68	30	boron	boron	NOUN
ap-1638	68	31	-	-	PUNCT
ap-1638	68	32	doped	dope	VERB
ap-1638	68	33	ncd	ncd	PROPN
ap-1638	68	34	films	film	NOUN
ap-1638	68	35	prepared	prepare	VERB
ap-1638	68	36	at	at	ADP
ap-1638	68	37	various	various	ADJ
ap-1638	68	38	temperatures	temperature	NOUN
ap-1638	68	39	.	.	PUNCT
ap-1638	69	1	peaks	peak	NOUN
ap-1638	69	2	at	at	ADP
ap-1638	69	3	500	500	NUM
ap-1638	69	4	cm−1	cm−1	NOUN
ap-1638	69	5	and	and	CCONJ
ap-1638	69	6	1225	1225	NUM
ap-1638	69	7	cm−1	cm−1	NOUN
ap-1638	69	8	related	relate	VERB
ap-1638	69	9	to	to	ADP
ap-1638	69	10	boron	boron	NOUN
ap-1638	69	11	doping	doping	NOUN
ap-1638	69	12	are	be	AUX
ap-1638	69	13	clearly	clearly	ADV
ap-1638	69	14	visible	visible	ADJ
ap-1638	69	15	for	for	ADP
ap-1638	69	16	the	the	DET
ap-1638	69	17	samples	sample	NOUN
ap-1638	69	18	prepared	prepare	VERB
ap-1638	69	19	at	at	ADP
ap-1638	69	20	595	595	NUM
ap-1638	69	21	°	°	NOUN
ap-1638	69	22	c	c	NOUN
ap-1638	69	23	and	and	CCONJ
ap-1638	69	24	670	670	NUM
ap-1638	69	25	°	°	NOUN
ap-1638	69	26	c	c	VERB
ap-1638	69	27	.	.	PUNCT
ap-1638	70	1	this	this	PRON
ap-1638	70	2	is	be	AUX
ap-1638	70	3	analogous	analogous	ADJ
ap-1638	70	4	with	with	ADP
ap-1638	70	5	standard	standard	ADJ
ap-1638	70	6	deviation	deviation	NOUN
ap-1638	70	7	in	in	ADP
ap-1638	70	8	statistics	statistic	NOUN
ap-1638	70	9	.	.	PUNCT
ap-1638	71	1	we	we	PRON
ap-1638	71	2	used	use	VERB
ap-1638	71	3	an	an	DET
ap-1638	71	4	ntegra	ntegra	NOUN
ap-1638	71	5	prima	prima	NOUN
ap-1638	71	6	nt	nt	PROPN
ap-1638	71	7	mdt	mdt	PROPN
ap-1638	71	8	microscope	microscope	PROPN
ap-1638	71	9	and	and	CCONJ
ap-1638	71	10	budget	budget	NOUN
ap-1638	71	11	sensors	sensor	NOUN
ap-1638	71	12	tap	tap	VERB
ap-1638	71	13	ai-150	ai-150	ADV
ap-1638	71	14	g	g	NOUN
ap-1638	71	15	tips	tip	NOUN
ap-1638	71	16	at	at	ADP
ap-1638	71	17	a	a	DET
ap-1638	71	18	frequency	frequency	NOUN
ap-1638	71	19	of	of	ADP
ap-1638	71	20	150	150	NUM
ap-1638	71	21	khz	khz	NOUN
ap-1638	71	22	and	and	CCONJ
ap-1638	71	23	stiffness	stiffness	NOUN
ap-1638	71	24	of	of	ADP
ap-1638	71	25	5n	5n	NUM
ap-1638	71	26	/	/	SYM
ap-1638	71	27	m.	m.	NOUN
ap-1638	71	28	for	for	ADP
ap-1638	71	29	the	the	DET
ap-1638	71	30	thickness	thickness	NOUN
ap-1638	71	31	measurements	measurement	NOUN
ap-1638	71	32	,	,	PUNCT
ap-1638	71	33	a	a	DET
ap-1638	71	34	part	part	NOUN
ap-1638	71	35	of	of	ADP
ap-1638	71	36	the	the	DET
ap-1638	71	37	substrate	substrate	NOUN
ap-1638	71	38	was	be	AUX
ap-1638	71	39	cleared	clear	VERB
ap-1638	71	40	of	of	ADP
ap-1638	71	41	seeds	seed	NOUN
ap-1638	71	42	prior	prior	ADV
ap-1638	71	43	to	to	ADP
ap-1638	71	44	growth	growth	NOUN
ap-1638	71	45	.	.	PUNCT
ap-1638	72	1	this	this	PRON
ap-1638	72	2	resulted	result	VERB
ap-1638	72	3	in	in	ADP
ap-1638	72	4	an	an	DET
ap-1638	72	5	area	area	NOUN
ap-1638	72	6	without	without	ADP
ap-1638	72	7	diamond	diamond	NOUN
ap-1638	72	8	growth	growth	NOUN
ap-1638	72	9	,	,	PUNCT
ap-1638	72	10	which	which	PRON
ap-1638	72	11	was	be	AUX
ap-1638	72	12	used	use	VERB
ap-1638	72	13	as	as	ADP
ap-1638	72	14	a	a	DET
ap-1638	72	15	reference	reference	NOUN
ap-1638	72	16	for	for	ADP
ap-1638	72	17	the	the	DET
ap-1638	72	18	thickness	thickness	NOUN
ap-1638	72	19	evaluation	evaluation	NOUN
ap-1638	72	20	.	.	PUNCT
ap-1638	73	1	the	the	DET
ap-1638	73	2	growth	growth	NOUN
ap-1638	73	3	rate	rate	NOUN
ap-1638	73	4	was	be	AUX
ap-1638	73	5	calculated	calculate	VERB
ap-1638	73	6	by	by	ADP
ap-1638	73	7	dividing	divide	VERB
ap-1638	73	8	thickness	thickness	NOUN
ap-1638	73	9	by	by	ADP
ap-1638	73	10	growth	growth	NOUN
ap-1638	73	11	time	time	NOUN
ap-1638	73	12	.	.	PUNCT
ap-1638	74	1	layer	layer	NOUN
ap-1638	74	2	quality	quality	NOUN
ap-1638	74	3	was	be	AUX
ap-1638	74	4	measured	measure	VERB
ap-1638	74	5	using	use	VERB
ap-1638	74	6	an	an	DET
ap-1638	74	7	invia	invia	NOUN
ap-1638	74	8	raman	raman	NOUN
ap-1638	74	9	microscope	microscope	NOUN
ap-1638	74	10	.	.	PUNCT
ap-1638	75	1	spectra	spectra	PROPN
ap-1638	75	2	were	be	AUX
ap-1638	75	3	taken	take	VERB
ap-1638	75	4	using	use	VERB
ap-1638	75	5	a	a	DET
ap-1638	75	6	laser	laser	NOUN
ap-1638	75	7	power	power	NOUN
ap-1638	75	8	of	of	ADP
ap-1638	75	9	2mw	2mw	ADJ
ap-1638	75	10	633	633	NUM
ap-1638	75	11	nm	nm	NOUN
ap-1638	75	12	at	at	ADP
ap-1638	75	13	room	room	NOUN
ap-1638	75	14	temperature	temperature	NOUN
ap-1638	75	15	.	.	PUNCT
ap-1638	76	1	all	all	DET
ap-1638	76	2	spectra	spectra	PROPN
ap-1638	76	3	were	be	AUX
ap-1638	76	4	normalized	normalize	VERB
ap-1638	76	5	to	to	ADP
ap-1638	76	6	the	the	DET
ap-1638	76	7	characteristic	characteristic	ADJ
ap-1638	76	8	spade	spade	NOUN
ap-1638	76	9	at	at	ADP
ap-1638	76	10	diamond	diamond	NOUN
ap-1638	76	11	wave	wave	NOUN
ap-1638	76	12	number	number	NOUN
ap-1638	76	13	around	around	ADP
ap-1638	76	14	1332	1332	NUM
ap-1638	76	15	cm−1	cm−1	NOUN
ap-1638	76	16	.	.	PUNCT
ap-1638	77	1	the	the	DET
ap-1638	77	2	temperature	temperature	NOUN
ap-1638	77	3	during	during	ADP
ap-1638	77	4	deposition	deposition	NOUN
ap-1638	77	5	was	be	AUX
ap-1638	77	6	measured	measure	VERB
ap-1638	77	7	using	use	VERB
ap-1638	77	8	a	a	DET
ap-1638	77	9	pyrometric	pyrometric	ADJ
ap-1638	77	10	92	92	NUM
ap-1638	77	11	two	two	NUM
ap-1638	77	12	-	-	PUNCT
ap-1638	77	13	color	color	NOUN
ap-1638	77	14	pyrometer	pyrometer	NOUN
ap-1638	77	15	(	(	PUNCT
ap-1638	77	16	williamson	williamson	PROPN
ap-1638	77	17	,	,	PUNCT
ap-1638	77	18	usa	usa	PROPN
ap-1638	77	19	)	)	PUNCT
ap-1638	77	20	.	.	PUNCT
ap-1638	78	1	3	3	NUM
ap-1638	78	2	results	result	NOUN
ap-1638	78	3	and	and	CCONJ
ap-1638	78	4	discussion	discussion	NOUN
ap-1638	78	5	3.1	3.1	NUM
ap-1638	78	6	raman	raman	NOUN
ap-1638	78	7	spectroscopy	spectroscopy	VERB
ap-1638	78	8	all	all	DET
ap-1638	78	9	samples	sample	NOUN
ap-1638	78	10	exhibit	exhibit	VERB
ap-1638	78	11	a	a	DET
ap-1638	78	12	peak	peak	NOUN
ap-1638	78	13	between	between	ADP
ap-1638	78	14	1306	1306	NUM
ap-1638	78	15	cm−1	cm−1	NOUN
ap-1638	78	16	and	and	CCONJ
ap-1638	78	17	1322	1322	NUM
ap-1638	78	18	cm−1	cm−1	NOUN
ap-1638	78	19	attributed	attribute	VERB
ap-1638	78	20	to	to	ADP
ap-1638	78	21	diamond	diamond	NOUN
ap-1638	78	22	(	(	PUNCT
ap-1638	78	23	sp3	sp3	ADJ
ap-1638	78	24	bonds	bond	NOUN
ap-1638	78	25	)	)	PUNCT
ap-1638	78	26	.	.	PUNCT
ap-1638	79	1	the	the	DET
ap-1638	79	2	position	position	NOUN
ap-1638	79	3	intensity	intensity	NOUN
ap-1638	79	4	of	of	ADP
ap-1638	79	5	the	the	DET
ap-1638	79	6	diamond	diamond	NOUN
ap-1638	79	7	peaks	peak	NOUN
ap-1638	79	8	is	be	AUX
ap-1638	79	9	influenced	influence	VERB
ap-1638	79	10	by	by	ADP
ap-1638	79	11	many	many	ADJ
ap-1638	79	12	factors	factor	NOUN
ap-1638	79	13	,	,	PUNCT
ap-1638	79	14	including	include	VERB
ap-1638	79	15	the	the	DET
ap-1638	79	16	number	number	NOUN
ap-1638	79	17	of	of	ADP
ap-1638	79	18	sp3	sp3	ADJ
ap-1638	79	19	bonds	bond	NOUN
ap-1638	79	20	in	in	ADP
ap-1638	79	21	the	the	DET
ap-1638	79	22	material	material	NOUN
ap-1638	79	23	and	and	CCONJ
ap-1638	79	24	the	the	DET
ap-1638	79	25	level	level	NOUN
ap-1638	79	26	of	of	ADP
ap-1638	79	27	boron	boron	NOUN
ap-1638	79	28	doping	doping	NOUN
ap-1638	79	29	.	.	PUNCT
ap-1638	80	1	high	high	ADJ
ap-1638	80	2	boron	boron	NOUN
ap-1638	80	3	doping	doping	NOUN
ap-1638	80	4	shifts	shift	NOUN
ap-1638	80	5	the	the	DET
ap-1638	80	6	diamond	diamond	PROPN
ap-1638	80	7	raman	raman	NOUN
ap-1638	80	8	peak	peak	NOUN
ap-1638	80	9	downwards	downward	NOUN
ap-1638	80	10	and	and	CCONJ
ap-1638	80	11	reduces	reduce	VERB
ap-1638	80	12	its	its	PRON
ap-1638	80	13	intensity	intensity	NOUN
ap-1638	80	14	[	[	X
ap-1638	80	15	6	6	NUM
ap-1638	80	16	]	]	PUNCT
ap-1638	80	17	.	.	PUNCT
ap-1638	81	1	another	another	DET
ap-1638	81	2	prominent	prominent	ADJ
ap-1638	81	3	peak	peak	NOUN
ap-1638	81	4	in	in	ADP
ap-1638	81	5	all	all	DET
ap-1638	81	6	spectra	spectra	NOUN
ap-1638	81	7	is	be	AUX
ap-1638	81	8	at	at	ADP
ap-1638	81	9	500	500	NUM
ap-1638	81	10	cm−1	cm−1	NOUN
ap-1638	81	11	.	.	PUNCT
ap-1638	82	1	this	this	DET
ap-1638	82	2	peak	peak	NOUN
ap-1638	82	3	is	be	AUX
ap-1638	82	4	related	relate	VERB
ap-1638	82	5	to	to	ADP
ap-1638	82	6	the	the	DET
ap-1638	82	7	presence	presence	NOUN
ap-1638	82	8	of	of	ADP
ap-1638	82	9	boron	boron	NOUN
ap-1638	82	10	in	in	ADP
ap-1638	82	11	the	the	DET
ap-1638	82	12	crystal	crystal	NOUN
ap-1638	82	13	lattice	lattice	NOUN
ap-1638	82	14	of	of	ADP
ap-1638	82	15	diamond	diamond	NOUN
ap-1638	82	16	.	.	PUNCT
ap-1638	83	1	the	the	DET
ap-1638	83	2	intensity	intensity	NOUN
ap-1638	83	3	of	of	ADP
ap-1638	83	4	this	this	DET
ap-1638	83	5	peak	peak	NOUN
ap-1638	83	6	can	can	AUX
ap-1638	83	7	be	be	AUX
ap-1638	83	8	used	use	VERB
ap-1638	83	9	for	for	ADP
ap-1638	83	10	a	a	DET
ap-1638	83	11	semiquantitative	semiquantitative	ADJ
ap-1638	83	12	estimate	estimate	NOUN
ap-1638	83	13	of	of	ADP
ap-1638	83	14	the	the	DET
ap-1638	83	15	boron	boron	NOUN
ap-1638	83	16	content	content	NOUN
ap-1638	83	17	[	[	X
ap-1638	83	18	3	3	NUM
ap-1638	83	19	]	]	PUNCT
ap-1638	83	20	.	.	PUNCT
ap-1638	84	1	fano	fano	PROPN
ap-1638	84	2	resonance	resonance	NOUN
ap-1638	84	3	,	,	PUNCT
ap-1638	84	4	another	another	DET
ap-1638	84	5	spectral	spectral	ADJ
ap-1638	84	6	feature	feature	NOUN
ap-1638	84	7	related	relate	VERB
ap-1638	84	8	to	to	ADP
ap-1638	84	9	the	the	DET
ap-1638	84	10	presence	presence	NOUN
ap-1638	84	11	of	of	ADP
ap-1638	84	12	boron	boron	NOUN
ap-1638	84	13	,	,	PUNCT
ap-1638	84	14	is	be	AUX
ap-1638	84	15	also	also	ADV
ap-1638	84	16	distinguishable	distinguishable	ADJ
ap-1638	84	17	in	in	ADP
ap-1638	84	18	all	all	DET
ap-1638	84	19	spectra	spectra	NOUN
ap-1638	84	20	.	.	PROPN
ap-1638	84	21	59	59	NUM
ap-1638	84	22	acta	acta	PROPN
ap-1638	84	23	polytechnica	polytechnica	PROPN
ap-1638	84	24	vol	vol	NOUN
ap-1638	84	25	.	.	PUNCT
ap-1638	85	1	52	52	NUM
ap-1638	85	2	no	no	NOUN
ap-1638	85	3	.	.	PUNCT
ap-1638	86	1	5/2012	5/2012	NUM
ap-1638	86	2	figure	figure	NOUN
ap-1638	86	3	2	2	NUM
ap-1638	86	4	:	:	PUNCT
ap-1638	86	5	position	position	NOUN
ap-1638	86	6	of	of	ADP
ap-1638	86	7	the	the	DET
ap-1638	86	8	diamond	diamond	NOUN
ap-1638	86	9	raman	raman	NOUN
ap-1638	86	10	peak	peak	NOUN
ap-1638	86	11	and	and	CCONJ
ap-1638	86	12	resistance	resistance	NOUN
ap-1638	86	13	measured	measure	VERB
ap-1638	86	14	by	by	ADP
ap-1638	86	15	the	the	DET
ap-1638	86	16	2	2	NUM
ap-1638	86	17	-	-	PUNCT
ap-1638	86	18	point	point	NOUN
ap-1638	86	19	probe	probe	NOUN
ap-1638	86	20	method	method	NOUN
ap-1638	86	21	.	.	PUNCT
ap-1638	87	1	the	the	DET
ap-1638	87	2	relative	relative	ADJ
ap-1638	87	3	intensity	intensity	NOUN
ap-1638	87	4	of	of	ADP
ap-1638	87	5	the	the	DET
ap-1638	87	6	peaks	peak	NOUN
ap-1638	87	7	varies	vary	VERB
ap-1638	87	8	among	among	ADP
ap-1638	87	9	the	the	DET
ap-1638	87	10	investigated	investigate	VERB
ap-1638	87	11	samples	sample	NOUN
ap-1638	87	12	.	.	PUNCT
ap-1638	88	1	according	accord	VERB
ap-1638	88	2	to	to	ADP
ap-1638	88	3	the	the	DET
ap-1638	88	4	raman	raman	NOUN
ap-1638	88	5	spectra	spectra	NOUN
ap-1638	88	6	,	,	PUNCT
ap-1638	88	7	the	the	DET
ap-1638	88	8	highest	high	ADJ
ap-1638	88	9	boron	boron	NOUN
ap-1638	88	10	incorporation	incorporation	NOUN
ap-1638	88	11	was	be	AUX
ap-1638	88	12	achieved	achieve	VERB
ap-1638	88	13	at	at	ADP
ap-1638	88	14	a	a	DET
ap-1638	88	15	temperature	temperature	NOUN
ap-1638	88	16	of	of	ADP
ap-1638	88	17	595	595	NUM
ap-1638	88	18	°	°	NOUN
ap-1638	88	19	c	c	NOUN
ap-1638	88	20	,	,	PUNCT
ap-1638	88	21	followed	follow	VERB
ap-1638	88	22	by	by	ADP
ap-1638	88	23	a	a	DET
ap-1638	88	24	temperature	temperature	NOUN
ap-1638	88	25	of	of	ADP
ap-1638	88	26	670	670	NUM
ap-1638	88	27	°	°	NOUN
ap-1638	88	28	c	c	NOUN
ap-1638	88	29	.	.	PUNCT
ap-1638	89	1	these	these	DET
ap-1638	89	2	samples	sample	NOUN
ap-1638	89	3	feature	feature	VERB
ap-1638	89	4	an	an	DET
ap-1638	89	5	intense	intense	ADJ
ap-1638	89	6	peak	peak	NOUN
ap-1638	89	7	at	at	ADP
ap-1638	89	8	500	500	NUM
ap-1638	89	9	cm−1	cm−1	NOUN
ap-1638	89	10	,	,	PUNCT
ap-1638	89	11	prominent	prominent	ADJ
ap-1638	89	12	fano	fano	NOUN
ap-1638	89	13	resonance	resonance	NOUN
ap-1638	89	14	at	at	ADP
ap-1638	89	15	1225	1225	NUM
ap-1638	89	16	cm−1	cm−1	NOUN
ap-1638	89	17	,	,	PUNCT
ap-1638	89	18	and	and	CCONJ
ap-1638	89	19	a	a	DET
ap-1638	89	20	shifted	shift	VERB
ap-1638	89	21	diamond	diamond	NOUN
ap-1638	89	22	raman	raman	NOUN
ap-1638	89	23	peak	peak	NOUN
ap-1638	89	24	.	.	PUNCT
ap-1638	90	1	the	the	DET
ap-1638	90	2	sample	sample	NOUN
ap-1638	90	3	prepared	prepare	VERB
ap-1638	90	4	at	at	ADP
ap-1638	90	5	820	820	NUM
ap-1638	90	6	°	°	NOUN
ap-1638	90	7	c	c	PROPN
ap-1638	90	8	has	have	VERB
ap-1638	90	9	a	a	DET
ap-1638	90	10	narrow	narrow	ADJ
ap-1638	90	11	raman	raman	NOUN
ap-1638	90	12	peak	peak	NOUN
ap-1638	90	13	,	,	PUNCT
ap-1638	90	14	and	and	CCONJ
ap-1638	90	15	boron	boron	NOUN
ap-1638	90	16	related	relate	VERB
ap-1638	90	17	peaks	peak	NOUN
ap-1638	90	18	were	be	AUX
ap-1638	90	19	less	less	ADV
ap-1638	90	20	apparent	apparent	ADJ
ap-1638	90	21	.	.	PUNCT
ap-1638	91	1	the	the	DET
ap-1638	91	2	spectra	spectra	PROPN
ap-1638	91	3	recorded	record	VERB
ap-1638	91	4	for	for	ADP
ap-1638	91	5	samples	sample	NOUN
ap-1638	91	6	prepared	prepare	VERB
ap-1638	91	7	at	at	ADP
ap-1638	91	8	450	450	NUM
ap-1638	91	9	°	°	NOUN
ap-1638	91	10	c	c	NOUN
ap-1638	91	11	and	and	CCONJ
ap-1638	91	12	490	490	NUM
ap-1638	91	13	°	°	NOUN
ap-1638	91	14	c	c	NOUN
ap-1638	91	15	are	be	AUX
ap-1638	91	16	similar	similar	ADJ
ap-1638	91	17	to	to	ADP
ap-1638	91	18	each	each	DET
ap-1638	91	19	other	other	ADJ
ap-1638	91	20	.	.	PUNCT
ap-1638	92	1	both	both	PRON
ap-1638	92	2	have	have	VERB
ap-1638	92	3	a	a	DET
ap-1638	92	4	broad	broad	ADJ
ap-1638	92	5	diamond	diamond	NOUN
ap-1638	92	6	raman	raman	NOUN
ap-1638	92	7	peak	peak	NOUN
ap-1638	92	8	of	of	ADP
ap-1638	92	9	low	low	ADJ
ap-1638	92	10	intensity	intensity	NOUN
ap-1638	92	11	,	,	PUNCT
ap-1638	92	12	indicating	indicate	VERB
ap-1638	92	13	small	small	ADJ
ap-1638	92	14	grains	grain	NOUN
ap-1638	92	15	and	and	CCONJ
ap-1638	92	16	low	low	ADJ
ap-1638	92	17	quality	quality	NOUN
ap-1638	92	18	of	of	ADP
ap-1638	92	19	the	the	DET
ap-1638	92	20	diamond	diamond	NOUN
ap-1638	92	21	.	.	PUNCT
ap-1638	93	1	the	the	DET
ap-1638	93	2	intensity	intensity	NOUN
ap-1638	93	3	of	of	ADP
ap-1638	93	4	the	the	DET
ap-1638	93	5	peaks	peak	NOUN
ap-1638	93	6	related	relate	VERB
ap-1638	93	7	to	to	ADP
ap-1638	93	8	boron	boron	NOUN
ap-1638	93	9	is	be	AUX
ap-1638	93	10	similar	similar	ADJ
ap-1638	93	11	to	to	ADP
ap-1638	93	12	the	the	DET
ap-1638	93	13	results	result	NOUN
ap-1638	93	14	for	for	ADP
ap-1638	93	15	the	the	DET
ap-1638	93	16	sample	sample	NOUN
ap-1638	93	17	prepared	prepare	VERB
ap-1638	93	18	at	at	ADP
ap-1638	93	19	820	820	NUM
ap-1638	93	20	°	°	NOUN
ap-1638	93	21	c	c	X
ap-1638	93	22	.	.	PUNCT
ap-1638	94	1	raman	raman	NOUN
ap-1638	94	2	spectroscopy	spectroscopy	NOUN
ap-1638	94	3	also	also	ADV
ap-1638	94	4	shows	show	VERB
ap-1638	94	5	the	the	DET
ap-1638	94	6	presence	presence	NOUN
ap-1638	94	7	of	of	ADP
ap-1638	94	8	a	a	DET
ap-1638	94	9	high	high	ADJ
ap-1638	94	10	amount	amount	NOUN
ap-1638	94	11	of	of	ADP
ap-1638	94	12	non	non	ADJ
ap-1638	94	13	-	-	ADJ
ap-1638	94	14	diamond	diamond	ADJ
ap-1638	94	15	phase	phase	NOUN
ap-1638	94	16	in	in	ADP
ap-1638	94	17	some	some	DET
ap-1638	94	18	samples	sample	NOUN
ap-1638	94	19	.	.	PUNCT
ap-1638	95	1	most	most	ADV
ap-1638	95	2	notably	notably	ADV
ap-1638	95	3	,	,	PUNCT
ap-1638	95	4	the	the	DET
ap-1638	95	5	g	g	PROPN
ap-1638	95	6	band	band	NOUN
ap-1638	95	7	(	(	PUNCT
ap-1638	95	8	1580	1580	NUM
ap-1638	95	9	cm−1	cm−1	NOUN
ap-1638	95	10	)	)	PUNCT
ap-1638	95	11	that	that	PRON
ap-1638	95	12	appears	appear	VERB
ap-1638	95	13	in	in	ADP
ap-1638	95	14	the	the	DET
ap-1638	95	15	spectra	spectra	NOUN
ap-1638	95	16	of	of	ADP
ap-1638	95	17	the	the	DET
ap-1638	95	18	b	b	PROPN
ap-1638	95	19	-	-	PUNCT
ap-1638	95	20	ncd	ncd	PROPN
ap-1638	95	21	samples	sample	NOUN
ap-1638	95	22	is	be	AUX
ap-1638	95	23	attributed	attribute	VERB
ap-1638	95	24	to	to	ADP
ap-1638	95	25	crystalline	crystalline	ADJ
ap-1638	95	26	graphite	graphite	NOUN
ap-1638	95	27	.	.	PUNCT
ap-1638	96	1	this	this	DET
ap-1638	96	2	peak	peak	NOUN
ap-1638	96	3	is	be	AUX
ap-1638	96	4	relatively	relatively	ADV
ap-1638	96	5	strong	strong	ADJ
ap-1638	96	6	in	in	ADP
ap-1638	96	7	the	the	DET
ap-1638	96	8	samples	sample	NOUN
ap-1638	96	9	prepared	prepare	VERB
ap-1638	96	10	at	at	ADP
ap-1638	96	11	the	the	DET
ap-1638	96	12	lowest	low	ADJ
ap-1638	96	13	temperature	temperature	NOUN
ap-1638	96	14	(	(	PUNCT
ap-1638	96	15	450	450	NUM
ap-1638	96	16	°	°	NOUN
ap-1638	96	17	c	c	NOUN
ap-1638	96	18	)	)	PUNCT
ap-1638	96	19	and	and	CCONJ
ap-1638	96	20	at	at	ADP
ap-1638	96	21	the	the	DET
ap-1638	96	22	highest	high	ADJ
ap-1638	96	23	temperature	temperature	NOUN
ap-1638	96	24	(	(	PUNCT
ap-1638	96	25	820	820	NUM
ap-1638	96	26	°	°	NOUN
ap-1638	96	27	c	c	NOUN
ap-1638	96	28	)	)	PUNCT
ap-1638	96	29	.	.	PUNCT
ap-1638	97	1	it	it	PRON
ap-1638	97	2	should	should	AUX
ap-1638	97	3	be	be	AUX
ap-1638	97	4	noted	note	VERB
ap-1638	97	5	that	that	SCONJ
ap-1638	97	6	the	the	DET
ap-1638	97	7	laser	laser	NOUN
ap-1638	97	8	excitation	excitation	NOUN
ap-1638	97	9	that	that	PRON
ap-1638	97	10	we	we	PRON
ap-1638	97	11	used	use	VERB
ap-1638	97	12	is	be	AUX
ap-1638	97	13	very	very	ADV
ap-1638	97	14	sensitive	sensitive	ADJ
ap-1638	97	15	to	to	ADP
ap-1638	97	16	sp2	sp2	NOUN
ap-1638	97	17	bonding	bonding	NOUN
ap-1638	97	18	.	.	PUNCT
ap-1638	98	1	to	to	PART
ap-1638	98	2	verify	verify	VERB
ap-1638	98	3	our	our	PRON
ap-1638	98	4	assumption	assumption	NOUN
ap-1638	98	5	,	,	PUNCT
ap-1638	98	6	based	base	VERB
ap-1638	98	7	on	on	ADP
ap-1638	98	8	raman	raman	NOUN
ap-1638	98	9	spectroscopy	spectroscopy	NOUN
ap-1638	98	10	,	,	PUNCT
ap-1638	98	11	that	that	SCONJ
ap-1638	98	12	there	there	PRON
ap-1638	98	13	is	be	VERB
ap-1638	98	14	higher	high	ADJ
ap-1638	98	15	boron	boron	NOUN
ap-1638	98	16	doping	doping	NOUN
ap-1638	98	17	for	for	ADP
ap-1638	98	18	the	the	DET
ap-1638	98	19	sample	sample	NOUN
ap-1638	98	20	prepared	prepare	VERB
ap-1638	98	21	at	at	ADP
ap-1638	98	22	temperature	temperature	NOUN
ap-1638	98	23	595	595	NUM
ap-1638	98	24	°	°	NOUN
ap-1638	98	25	c	c	NOUN
ap-1638	98	26	,	,	PUNCT
ap-1638	98	27	we	we	PRON
ap-1638	98	28	measured	measure	VERB
ap-1638	98	29	the	the	DET
ap-1638	98	30	resistance	resistance	NOUN
ap-1638	98	31	of	of	ADP
ap-1638	98	32	the	the	DET
ap-1638	98	33	films	film	NOUN
ap-1638	98	34	by	by	ADP
ap-1638	98	35	a	a	DET
ap-1638	98	36	simple	simple	ADJ
ap-1638	98	37	2	2	NUM
ap-1638	98	38	-	-	PUNCT
ap-1638	98	39	point	point	NOUN
ap-1638	98	40	probe	probe	NOUN
ap-1638	98	41	method	method	NOUN
ap-1638	98	42	.	.	PUNCT
ap-1638	99	1	the	the	DET
ap-1638	99	2	results	result	NOUN
ap-1638	99	3	adjusted	adjust	VERB
ap-1638	99	4	for	for	ADP
ap-1638	99	5	the	the	DET
ap-1638	99	6	thickness	thickness	NOUN
ap-1638	99	7	of	of	ADP
ap-1638	99	8	the	the	DET
ap-1638	99	9	film	film	NOUN
ap-1638	99	10	are	be	AUX
ap-1638	99	11	plotted	plot	VERB
ap-1638	99	12	in	in	ADP
ap-1638	99	13	fig	fig	NOUN
ap-1638	99	14	.	.	PUNCT
ap-1638	100	1	2	2	X
ap-1638	100	2	.	.	X
ap-1638	101	1	although	although	SCONJ
ap-1638	101	2	2	2	NUM
ap-1638	101	3	-	-	PUNCT
ap-1638	101	4	point	point	NOUN
ap-1638	101	5	probe	probe	NOUN
ap-1638	101	6	measurements	measurement	NOUN
ap-1638	101	7	allow	allow	VERB
ap-1638	101	8	only	only	ADV
ap-1638	101	9	a	a	DET
ap-1638	101	10	crude	crude	ADJ
ap-1638	101	11	estimate	estimate	NOUN
ap-1638	101	12	of	of	ADP
ap-1638	101	13	the	the	DET
ap-1638	101	14	true	true	ADJ
ap-1638	101	15	resistivity	resistivity	NOUN
ap-1638	101	16	of	of	ADP
ap-1638	101	17	the	the	DET
ap-1638	101	18	sample	sample	NOUN
ap-1638	101	19	,	,	PUNCT
ap-1638	101	20	fig	fig	NOUN
ap-1638	101	21	.	.	PUNCT
ap-1638	101	22	2	2	NUM
ap-1638	101	23	clearly	clearly	ADV
ap-1638	101	24	shows	show	VERB
ap-1638	101	25	a	a	DET
ap-1638	101	26	correlation	correlation	NOUN
ap-1638	101	27	between	between	ADP
ap-1638	101	28	the	the	DET
ap-1638	101	29	resistance	resistance	NOUN
ap-1638	101	30	and	and	CCONJ
ap-1638	101	31	the	the	DET
ap-1638	101	32	position	position	NOUN
ap-1638	101	33	of	of	ADP
ap-1638	101	34	the	the	DET
ap-1638	101	35	diamond	diamond	NOUN
ap-1638	101	36	raman	raman	NOUN
ap-1638	101	37	peak	peak	NOUN
ap-1638	101	38	,	,	PUNCT
ap-1638	101	39	which	which	PRON
ap-1638	101	40	is	be	AUX
ap-1638	101	41	influenced	influence	VERB
ap-1638	101	42	by	by	ADP
ap-1638	101	43	the	the	DET
ap-1638	101	44	presence	presence	NOUN
ap-1638	101	45	of	of	ADP
ap-1638	101	46	boron	boron	NOUN
ap-1638	101	47	in	in	ADP
ap-1638	101	48	the	the	DET
ap-1638	101	49	material	material	NOUN
ap-1638	101	50	.	.	PUNCT
ap-1638	102	1	the	the	DET
ap-1638	102	2	higher	high	ADJ
ap-1638	102	3	resistance	resistance	NOUN
ap-1638	102	4	of	of	ADP
ap-1638	102	5	films	film	NOUN
ap-1638	102	6	prepared	prepare	VERB
ap-1638	102	7	at	at	ADP
ap-1638	102	8	lower	low	ADJ
ap-1638	102	9	temperatures	temperature	NOUN
ap-1638	102	10	may	may	AUX
ap-1638	102	11	be	be	AUX
ap-1638	102	12	caused	cause	VERB
ap-1638	102	13	by	by	ADP
ap-1638	102	14	the	the	DET
ap-1638	102	15	fact	fact	NOUN
ap-1638	102	16	that	that	SCONJ
ap-1638	102	17	the	the	DET
ap-1638	102	18	films	film	NOUN
ap-1638	102	19	are	be	AUX
ap-1638	102	20	not	not	PART
ap-1638	102	21	completely	completely	ADV
ap-1638	102	22	continuous	continuous	ADJ
ap-1638	102	23	.	.	PUNCT
ap-1638	103	1	in	in	ADP
ap-1638	103	2	summary	summary	NOUN
ap-1638	103	3	,	,	PUNCT
ap-1638	103	4	all	all	PRON
ap-1638	103	5	of	of	ADP
ap-1638	103	6	the	the	DET
ap-1638	103	7	b	b	PROPN
ap-1638	103	8	-	-	PUNCT
ap-1638	103	9	ncd	ncd	PROPN
ap-1638	103	10	films	film	NOUN
ap-1638	103	11	exhibit	exhibit	VERB
ap-1638	103	12	evidence	evidence	NOUN
ap-1638	103	13	of	of	ADP
ap-1638	103	14	boron	boron	NOUN
ap-1638	103	15	doping	doping	NOUN
ap-1638	103	16	.	.	PUNCT
ap-1638	104	1	there	there	PRON
ap-1638	104	2	is	be	VERB
ap-1638	104	3	a	a	DET
ap-1638	104	4	lower	low	ADJ
ap-1638	104	5	level	level	NOUN
ap-1638	104	6	of	of	ADP
ap-1638	104	7	boron	boron	NOUN
ap-1638	104	8	doping	doping	NOUN
ap-1638	104	9	for	for	ADP
ap-1638	104	10	low	low	ADJ
ap-1638	104	11	temperatures	temperature	NOUN
ap-1638	104	12	.	.	PUNCT
ap-1638	105	1	the	the	DET
ap-1638	105	2	level	level	NOUN
ap-1638	105	3	then	then	ADV
ap-1638	105	4	increases	increase	VERB
ap-1638	105	5	with	with	ADP
ap-1638	105	6	temperature	temperature	NOUN
ap-1638	105	7	,	,	PUNCT
ap-1638	105	8	reaching	reach	VERB
ap-1638	105	9	a	a	DET
ap-1638	105	10	maximum	maximum	NOUN
ap-1638	105	11	at	at	ADP
ap-1638	105	12	around	around	ADV
ap-1638	105	13	600	600	NUM
ap-1638	105	14	°	°	NOUN
ap-1638	105	15	c	c	NOUN
ap-1638	105	16	,	,	PUNCT
ap-1638	105	17	and	and	CCONJ
ap-1638	105	18	then	then	ADV
ap-1638	105	19	decreases	decrease	VERB
ap-1638	105	20	again	again	ADV
ap-1638	105	21	for	for	ADP
ap-1638	105	22	high	high	ADJ
ap-1638	105	23	temperatures	temperature	NOUN
ap-1638	105	24	.	.	PUNCT
ap-1638	106	1	figure	figure	VERB
ap-1638	106	2	3	3	NUM
ap-1638	106	3	:	:	PUNCT
ap-1638	106	4	growth	growth	NOUN
ap-1638	106	5	rate	rate	NOUN
ap-1638	106	6	of	of	ADP
ap-1638	106	7	a	a	DET
ap-1638	106	8	b	b	NOUN
ap-1638	106	9	-	-	PUNCT
ap-1638	106	10	ncd	ncd	NOUN
ap-1638	106	11	film	film	NOUN
ap-1638	106	12	as	as	ADP
ap-1638	106	13	a	a	DET
ap-1638	106	14	function	function	NOUN
ap-1638	106	15	of	of	ADP
ap-1638	106	16	temperature	temperature	NOUN
ap-1638	106	17	.	.	PUNCT
ap-1638	107	1	3.2	3.2	NUM
ap-1638	107	2	growth	growth	NOUN
ap-1638	107	3	rate	rate	NOUN
ap-1638	107	4	and	and	CCONJ
ap-1638	107	5	surface	surface	NOUN
ap-1638	107	6	morphology	morphology	NOUN
ap-1638	107	7	afm	afm	PROPN
ap-1638	107	8	imaging	imaging	NOUN
ap-1638	107	9	showed	show	VERB
ap-1638	107	10	that	that	SCONJ
ap-1638	107	11	the	the	DET
ap-1638	107	12	b	b	PROPN
ap-1638	107	13	-	-	PUNCT
ap-1638	107	14	ncd	ncd	PROPN
ap-1638	107	15	films	film	NOUN
ap-1638	107	16	(	(	PUNCT
ap-1638	107	17	fig	fig	NOUN
ap-1638	107	18	.	.	PUNCT
ap-1638	107	19	4	4	X
ap-1638	107	20	)	)	PUNCT
ap-1638	107	21	consist	consist	NOUN
ap-1638	107	22	of	of	ADP
ap-1638	107	23	randomly	randomly	ADV
ap-1638	107	24	-	-	PUNCT
ap-1638	107	25	oriented	orient	VERB
ap-1638	107	26	grains	grain	NOUN
ap-1638	107	27	of	of	ADP
ap-1638	107	28	submicron	submicron	NOUN
ap-1638	107	29	size	size	NOUN
ap-1638	107	30	.	.	PUNCT
ap-1638	108	1	the	the	DET
ap-1638	108	2	size	size	NOUN
ap-1638	108	3	of	of	ADP
ap-1638	108	4	the	the	DET
ap-1638	108	5	grains	grain	NOUN
ap-1638	108	6	was	be	AUX
ap-1638	108	7	mainly	mainly	ADV
ap-1638	108	8	determined	determine	VERB
ap-1638	108	9	by	by	ADP
ap-1638	108	10	the	the	DET
ap-1638	108	11	thickness	thickness	NOUN
ap-1638	108	12	of	of	ADP
ap-1638	108	13	the	the	DET
ap-1638	108	14	films	film	NOUN
ap-1638	108	15	,	,	PUNCT
ap-1638	108	16	and	and	CCONJ
ap-1638	108	17	varied	varied	ADJ
ap-1638	108	18	from	from	ADP
ap-1638	108	19	an	an	DET
ap-1638	108	20	average	average	ADJ
ap-1638	108	21	size	size	NOUN
ap-1638	108	22	of	of	ADP
ap-1638	108	23	40	40	NUM
ap-1638	108	24	nm	nm	NOUN
ap-1638	108	25	in	in	ADP
ap-1638	108	26	the	the	DET
ap-1638	108	27	lowest	low	ADJ
ap-1638	108	28	temperature	temperature	NOUN
ap-1638	108	29	sample	sample	NOUN
ap-1638	108	30	to	to	ADP
ap-1638	108	31	an	an	DET
ap-1638	108	32	average	average	ADJ
ap-1638	108	33	size	size	NOUN
ap-1638	108	34	of	of	ADP
ap-1638	108	35	150	150	NUM
ap-1638	108	36	nm	nm	NOUN
ap-1638	108	37	in	in	ADP
ap-1638	108	38	the	the	DET
ap-1638	108	39	sample	sample	NOUN
ap-1638	108	40	prepared	prepare	VERB
ap-1638	108	41	at	at	ADP
ap-1638	108	42	the	the	DET
ap-1638	108	43	highest	high	ADJ
ap-1638	108	44	temperature	temperature	NOUN
ap-1638	108	45	.	.	PUNCT
ap-1638	109	1	for	for	ADP
ap-1638	109	2	lower	low	ADJ
ap-1638	109	3	temperature	temperature	NOUN
ap-1638	109	4	,	,	PUNCT
ap-1638	109	5	we	we	PRON
ap-1638	109	6	observe	observe	VERB
ap-1638	109	7	small	small	ADJ
ap-1638	109	8	grains	grain	NOUN
ap-1638	109	9	without	without	ADP
ap-1638	109	10	visible	visible	ADJ
ap-1638	109	11	facets	facet	NOUN
ap-1638	109	12	.	.	PUNCT
ap-1638	110	1	clearly	clearly	ADV
ap-1638	110	2	visible	visible	ADJ
ap-1638	110	3	crystal	crystal	NOUN
ap-1638	110	4	facets	facet	NOUN
ap-1638	110	5	can	can	AUX
ap-1638	110	6	be	be	AUX
ap-1638	110	7	identified	identify	VERB
ap-1638	110	8	on	on	ADP
ap-1638	110	9	the	the	DET
ap-1638	110	10	samples	sample	NOUN
ap-1638	110	11	prepared	prepare	VERB
ap-1638	110	12	at	at	ADP
ap-1638	110	13	595	595	NUM
ap-1638	110	14	°	°	NOUN
ap-1638	110	15	c	c	NOUN
ap-1638	110	16	and	and	CCONJ
ap-1638	110	17	above	above	ADV
ap-1638	110	18	.	.	PUNCT
ap-1638	111	1	the	the	DET
ap-1638	111	2	surface	surface	NOUN
ap-1638	111	3	roughness	roughness	NOUN
ap-1638	111	4	of	of	ADP
ap-1638	111	5	the	the	DET
ap-1638	111	6	measured	measure	VERB
ap-1638	111	7	samples	sample	NOUN
ap-1638	111	8	varies	vary	VERB
ap-1638	111	9	between	between	ADP
ap-1638	111	10	10	10	NUM
ap-1638	111	11	nm	nm	NOUN
ap-1638	111	12	(	(	PUNCT
ap-1638	111	13	495	495	NUM
ap-1638	111	14	°	°	NOUN
ap-1638	111	15	c	c	NOUN
ap-1638	111	16	)	)	PUNCT
ap-1638	111	17	and	and	CCONJ
ap-1638	111	18	25	25	NUM
ap-1638	111	19	nm	nm	NOUN
ap-1638	111	20	(	(	PUNCT
ap-1638	111	21	800	800	NUM
ap-1638	111	22	°	°	NOUN
ap-1638	111	23	c	c	NOUN
ap-1638	111	24	)	)	PUNCT
ap-1638	111	25	.	.	PUNCT
ap-1638	112	1	the	the	DET
ap-1638	112	2	growth	growth	NOUN
ap-1638	112	3	rate	rate	NOUN
ap-1638	112	4	of	of	ADP
ap-1638	112	5	the	the	DET
ap-1638	112	6	film	film	NOUN
ap-1638	112	7	is	be	AUX
ap-1638	112	8	an	an	DET
ap-1638	112	9	important	important	ADJ
ap-1638	112	10	factor	factor	NOUN
ap-1638	112	11	for	for	ADP
ap-1638	112	12	commercial	commercial	ADJ
ap-1638	112	13	applications	application	NOUN
ap-1638	112	14	.	.	PUNCT
ap-1638	113	1	the	the	DET
ap-1638	113	2	growth	growth	NOUN
ap-1638	113	3	rate	rate	NOUN
ap-1638	113	4	must	must	AUX
ap-1638	113	5	be	be	AUX
ap-1638	113	6	sufficiently	sufficiently	ADV
ap-1638	113	7	high	high	ADJ
ap-1638	113	8	to	to	PART
ap-1638	113	9	ensure	ensure	VERB
ap-1638	113	10	a	a	DET
ap-1638	113	11	viable	viable	ADJ
ap-1638	113	12	production	production	NOUN
ap-1638	113	13	rate	rate	NOUN
ap-1638	113	14	.	.	PUNCT
ap-1638	114	1	the	the	DET
ap-1638	114	2	growth	growth	NOUN
ap-1638	114	3	rate	rate	NOUN
ap-1638	114	4	of	of	ADP
ap-1638	114	5	the	the	DET
ap-1638	114	6	b	b	PROPN
ap-1638	114	7	-	-	PUNCT
ap-1638	114	8	ncd	ncd	PROPN
ap-1638	114	9	films	film	NOUN
ap-1638	114	10	prepared	prepare	VERB
ap-1638	114	11	in	in	ADP
ap-1638	114	12	this	this	DET
ap-1638	114	13	study	study	NOUN
ap-1638	114	14	was	be	AUX
ap-1638	114	15	found	find	VERB
ap-1638	114	16	to	to	PART
ap-1638	114	17	be	be	AUX
ap-1638	114	18	linearly	linearly	ADV
ap-1638	114	19	dependent	dependent	ADJ
ap-1638	114	20	on	on	ADP
ap-1638	114	21	temperature	temperature	NOUN
ap-1638	114	22	in	in	ADP
ap-1638	114	23	all	all	DET
ap-1638	114	24	samples	sample	NOUN
ap-1638	114	25	,	,	PUNCT
ap-1638	114	26	and	and	CCONJ
ap-1638	114	27	varied	varied	ADJ
ap-1638	114	28	by	by	ADP
ap-1638	114	29	one	one	NUM
ap-1638	114	30	order	order	NOUN
ap-1638	114	31	of	of	ADP
ap-1638	114	32	magnitude	magnitude	NOUN
ap-1638	114	33	between	between	ADP
ap-1638	114	34	samples	sample	NOUN
ap-1638	114	35	prepared	prepare	VERB
ap-1638	114	36	at	at	ADP
ap-1638	114	37	the	the	DET
ap-1638	114	38	lowest	low	ADJ
ap-1638	114	39	temperature	temperature	NOUN
ap-1638	114	40	and	and	CCONJ
ap-1638	114	41	at	at	ADP
ap-1638	114	42	the	the	DET
ap-1638	114	43	highest	high	ADJ
ap-1638	114	44	temperature	temperature	NOUN
ap-1638	114	45	.	.	PUNCT
ap-1638	115	1	the	the	DET
ap-1638	115	2	growth	growth	NOUN
ap-1638	115	3	rate	rate	NOUN
ap-1638	115	4	of	of	ADP
ap-1638	115	5	the	the	DET
ap-1638	115	6	sample	sample	NOUN
ap-1638	115	7	prepared	prepare	VERB
ap-1638	115	8	at	at	ADP
ap-1638	115	9	450	450	NUM
ap-1638	115	10	°	°	NOUN
ap-1638	115	11	c	c	NOUN
ap-1638	115	12	was	be	AUX
ap-1638	115	13	40	40	NUM
ap-1638	115	14	nm	nm	NOUN
ap-1638	115	15	/	/	SYM
ap-1638	115	16	hour	hour	NOUN
ap-1638	115	17	.	.	PUNCT
ap-1638	116	1	the	the	DET
ap-1638	116	2	highest	high	ADJ
ap-1638	116	3	growth	growth	NOUN
ap-1638	116	4	rate	rate	NOUN
ap-1638	116	5	was	be	AUX
ap-1638	116	6	for	for	SCONJ
ap-1638	116	7	the	the	DET
ap-1638	116	8	sample	sample	NOUN
ap-1638	116	9	prepared	prepare	VERB
ap-1638	116	10	at	at	ADP
ap-1638	116	11	800	800	NUM
ap-1638	116	12	°	°	NOUN
ap-1638	116	13	c	c	NOUN
ap-1638	116	14	,	,	PUNCT
ap-1638	116	15	where	where	SCONJ
ap-1638	116	16	the	the	DET
ap-1638	116	17	value	value	NOUN
ap-1638	116	18	was	be	AUX
ap-1638	116	19	over	over	ADP
ap-1638	116	20	500	500	NUM
ap-1638	116	21	nm	nm	NOUN
ap-1638	116	22	/	/	SYM
ap-1638	116	23	hour	hour	NOUN
ap-1638	116	24	.	.	PUNCT
ap-1638	117	1	the	the	DET
ap-1638	117	2	growth	growth	NOUN
ap-1638	117	3	rates	rate	NOUN
ap-1638	117	4	of	of	ADP
ap-1638	117	5	all	all	DET
ap-1638	117	6	samples	sample	NOUN
ap-1638	117	7	are	be	AUX
ap-1638	117	8	summarized	summarize	VERB
ap-1638	117	9	in	in	ADP
ap-1638	117	10	fig	fig	NOUN
ap-1638	117	11	.	.	PUNCT
ap-1638	118	1	3	3	X
ap-1638	118	2	.	.	X
ap-1638	118	3	the	the	DET
ap-1638	118	4	growth	growth	NOUN
ap-1638	118	5	rate	rate	NOUN
ap-1638	118	6	values	value	NOUN
ap-1638	118	7	at	at	ADP
ap-1638	118	8	various	various	ADJ
ap-1638	118	9	temperatures	temperature	NOUN
ap-1638	118	10	are	be	AUX
ap-1638	118	11	typical	typical	ADJ
ap-1638	118	12	for	for	ADP
ap-1638	118	13	the	the	DET
ap-1638	118	14	given	give	VERB
ap-1638	118	15	methane	methane	NOUN
ap-1638	118	16	concentration	concentration	NOUN
ap-1638	118	17	.	.	PUNCT
ap-1638	119	1	as	as	SCONJ
ap-1638	119	2	the	the	DET
ap-1638	119	3	growth	growth	NOUN
ap-1638	119	4	rates	rate	NOUN
ap-1638	119	5	are	be	AUX
ap-1638	119	6	strongly	strongly	ADV
ap-1638	119	7	dependent	dependent	ADJ
ap-1638	119	8	on	on	ADP
ap-1638	119	9	methane	methane	NOUN
ap-1638	119	10	concentration	concentration	NOUN
ap-1638	119	11	,	,	PUNCT
ap-1638	119	12	an	an	DET
ap-1638	119	13	increase	increase	NOUN
ap-1638	119	14	in	in	ADP
ap-1638	119	15	the	the	DET
ap-1638	119	16	methane	methane	NOUN
ap-1638	119	17	fraction	fraction	NOUN
ap-1638	119	18	during	during	ADP
ap-1638	119	19	deposition	deposition	NOUN
ap-1638	119	20	could	could	AUX
ap-1638	119	21	be	be	AUX
ap-1638	119	22	used	use	VERB
ap-1638	119	23	for	for	ADP
ap-1638	119	24	boosting	boost	VERB
ap-1638	119	25	the	the	DET
ap-1638	119	26	growth	growth	NOUN
ap-1638	119	27	rate	rate	NOUN
ap-1638	119	28	[	[	X
ap-1638	119	29	7	7	NUM
ap-1638	119	30	]	]	PUNCT
ap-1638	119	31	.	.	PUNCT
ap-1638	120	1	4	4	NUM
ap-1638	120	2	conclusions	conclusion	NOUN
ap-1638	120	3	in	in	ADP
ap-1638	120	4	this	this	DET
ap-1638	120	5	work	work	NOUN
ap-1638	120	6	,	,	PUNCT
ap-1638	120	7	we	we	PRON
ap-1638	120	8	have	have	AUX
ap-1638	120	9	investigated	investigate	VERB
ap-1638	120	10	the	the	DET
ap-1638	120	11	quality	quality	NOUN
ap-1638	120	12	of	of	ADP
ap-1638	120	13	boron	boron	NOUN
ap-1638	120	14	-	-	PUNCT
ap-1638	120	15	doped	dope	VERB
ap-1638	120	16	nanodiamond	nanodiamond	NOUN
ap-1638	120	17	films	film	NOUN
ap-1638	120	18	prepared	prepare	VERB
ap-1638	120	19	at	at	ADP
ap-1638	120	20	various	various	ADJ
ap-1638	120	21	temperatures	temperature	NOUN
ap-1638	120	22	in	in	ADP
ap-1638	120	23	order	order	NOUN
ap-1638	120	24	to	to	PART
ap-1638	120	25	find	find	VERB
ap-1638	120	26	the	the	DET
ap-1638	120	27	optimal	optimal	ADJ
ap-1638	120	28	conditions	condition	NOUN
ap-1638	120	29	for	for	ADP
ap-1638	120	30	application	application	NOUN
ap-1638	120	31	in	in	ADP
ap-1638	120	32	implantable	implantable	ADJ
ap-1638	120	33	electrodes	electrode	NOUN
ap-1638	120	34	.	.	PUNCT
ap-1638	121	1	five	five	NUM
ap-1638	121	2	samples	sample	NOUN
ap-1638	121	3	were	be	AUX
ap-1638	121	4	deposited	deposit	VERB
ap-1638	121	5	by	by	ADP
ap-1638	121	6	mwpecvd	mwpecvd	NOUN
ap-1638	121	7	for	for	ADP
ap-1638	121	8	the	the	DET
ap-1638	121	9	experiment	experiment	NOUN
ap-1638	121	10	.	.	PUNCT
ap-1638	122	1	morphology	morphology	NOUN
ap-1638	122	2	and	and	CCONJ
ap-1638	122	3	thickness	thickness	NOUN
ap-1638	122	4	were	be	AUX
ap-1638	122	5	investigated	investigate	VERB
ap-1638	122	6	by	by	ADP
ap-1638	122	7	afm	afm	PROPN
ap-1638	122	8	.	.	PUNCT
ap-1638	122	9	raman	raman	NOUN
ap-1638	122	10	spectroscopy	spectroscopy	NOUN
ap-1638	122	11	was	be	AUX
ap-1638	122	12	used	use	VERB
ap-1638	122	13	for	for	ADP
ap-1638	122	14	estimating	estimate	VERB
ap-1638	122	15	the	the	DET
ap-1638	122	16	boron	boron	NOUN
ap-1638	122	17	content	content	NOUN
ap-1638	122	18	and	and	CCONJ
ap-1638	122	19	for	for	ADP
ap-1638	122	20	determining	determine	VERB
ap-1638	122	21	the	the	DET
ap-1638	122	22	quality	quality	NOUN
ap-1638	122	23	of	of	ADP
ap-1638	122	24	60	60	NUM
ap-1638	122	25	acta	acta	PROPN
ap-1638	122	26	polytechnica	polytechnica	PROPN
ap-1638	122	27	vol	vol	NOUN
ap-1638	122	28	.	.	PUNCT
ap-1638	123	1	52	52	NUM
ap-1638	123	2	no	no	NOUN
ap-1638	123	3	.	.	PUNCT
ap-1638	124	1	5/2012	5/2012	NUM
ap-1638	124	2	figure	figure	NOUN
ap-1638	124	3	4	4	NUM
ap-1638	124	4	:	:	SYM
ap-1638	124	5	5	5	NUM
ap-1638	124	6	µm×	µm×	NOUN
ap-1638	124	7	5	5	NUM
ap-1638	124	8	µm	µm	ADP
ap-1638	124	9	afm	afm	PROPN
ap-1638	124	10	images	image	NOUN
ap-1638	124	11	of	of	ADP
ap-1638	124	12	b	b	NOUN
ap-1638	124	13	-	-	PUNCT
ap-1638	124	14	ncd	ncd	PROPN
ap-1638	124	15	films	film	NOUN
ap-1638	124	16	prepared	prepare	VERB
ap-1638	124	17	at	at	ADP
ap-1638	124	18	various	various	ADJ
ap-1638	124	19	temperatures	temperature	NOUN
ap-1638	124	20	.	.	PUNCT
ap-1638	125	1	the	the	DET
ap-1638	125	2	films	film	NOUN
ap-1638	125	3	.	.	PUNCT
ap-1638	126	1	we	we	PRON
ap-1638	126	2	found	find	VERB
ap-1638	126	3	that	that	SCONJ
ap-1638	126	4	the	the	DET
ap-1638	126	5	level	level	NOUN
ap-1638	126	6	of	of	ADP
ap-1638	126	7	boron	boron	NOUN
ap-1638	126	8	doping	doping	NOUN
ap-1638	126	9	was	be	AUX
ap-1638	126	10	strongly	strongly	ADV
ap-1638	126	11	dependent	dependent	ADJ
ap-1638	126	12	on	on	ADP
ap-1638	126	13	the	the	DET
ap-1638	126	14	deposition	deposition	NOUN
ap-1638	126	15	temperature	temperature	NOUN
ap-1638	126	16	.	.	PUNCT
ap-1638	127	1	low	low	ADJ
ap-1638	127	2	temperatures	temperature	NOUN
ap-1638	127	3	,	,	PUNCT
ap-1638	127	4	and	and	CCONJ
ap-1638	127	5	also	also	ADV
ap-1638	127	6	high	high	ADJ
ap-1638	127	7	temperatures	temperature	NOUN
ap-1638	127	8	,	,	PUNCT
ap-1638	127	9	led	lead	VERB
ap-1638	127	10	to	to	ADP
ap-1638	127	11	low	low	ADJ
ap-1638	127	12	boron	boron	NOUN
ap-1638	127	13	incorporation	incorporation	NOUN
ap-1638	127	14	.	.	PUNCT
ap-1638	128	1	an	an	DET
ap-1638	128	2	optimal	optimal	ADJ
ap-1638	128	3	sample	sample	NOUN
ap-1638	128	4	of	of	ADP
ap-1638	128	5	b	b	PROPN
ap-1638	128	6	-	-	PUNCT
ap-1638	128	7	ncd	ncd	PROPN
ap-1638	128	8	films	film	NOUN
ap-1638	128	9	was	be	AUX
ap-1638	128	10	prepared	prepare	VERB
ap-1638	128	11	at	at	ADP
ap-1638	128	12	595	595	NUM
ap-1638	128	13	°	°	NOUN
ap-1638	128	14	c	c	NOUN
ap-1638	128	15	.	.	PUNCT
ap-1638	129	1	this	this	DET
ap-1638	129	2	sample	sample	NOUN
ap-1638	129	3	had	have	VERB
ap-1638	129	4	the	the	DET
ap-1638	129	5	highest	high	ADJ
ap-1638	129	6	level	level	NOUN
ap-1638	129	7	of	of	ADP
ap-1638	129	8	boron	boron	NOUN
ap-1638	129	9	incorporation	incorporation	NOUN
ap-1638	129	10	and	and	CCONJ
ap-1638	129	11	a	a	DET
ap-1638	129	12	low	low	ADJ
ap-1638	129	13	amount	amount	NOUN
ap-1638	129	14	of	of	ADP
ap-1638	129	15	impurities	impurity	NOUN
ap-1638	129	16	.	.	PUNCT
ap-1638	130	1	the	the	DET
ap-1638	130	2	growth	growth	NOUN
ap-1638	130	3	rate	rate	NOUN
ap-1638	130	4	achieved	achieve	VERB
ap-1638	130	5	at	at	ADP
ap-1638	130	6	this	this	DET
ap-1638	130	7	temperature	temperature	NOUN
ap-1638	130	8	is	be	AUX
ap-1638	130	9	considered	consider	VERB
ap-1638	130	10	sufficient	sufficient	ADJ
ap-1638	130	11	for	for	ADP
ap-1638	130	12	potential	potential	ADJ
ap-1638	130	13	commercial	commercial	ADJ
ap-1638	130	14	production	production	NOUN
ap-1638	130	15	.	.	PUNCT
ap-1638	131	1	acknowledgements	acknowledgement	VERB
ap-1638	131	2	the	the	DET
ap-1638	131	3	research	research	NOUN
ap-1638	131	4	presented	present	VERB
ap-1638	131	5	in	in	ADP
ap-1638	131	6	this	this	DET
ap-1638	131	7	paper	paper	NOUN
ap-1638	131	8	was	be	AUX
ap-1638	131	9	supervised	supervise	VERB
ap-1638	131	10	by	by	ADP
ap-1638	131	11	václav	václav	PROPN
ap-1638	131	12	petrák	petrák	PROPN
ap-1638	131	13	,	,	PUNCT
ap-1638	131	14	fbmi	fbmi	PROPN
ap-1638	131	15	ctu	ctu	VERB
ap-1638	131	16	in	in	ADP
ap-1638	131	17	prague	prague	PROPN
ap-1638	131	18	.	.	PUNCT
ap-1638	132	1	special	special	ADJ
ap-1638	132	2	thanks	thank	NOUN
ap-1638	132	3	to	to	ADP
ap-1638	132	4	vlaďka	vlaďka	NOUN
ap-1638	132	5	petráková	petráková	ADV
ap-1638	132	6	from	from	ADP
ap-1638	132	7	fbmi	fbmi	PROPN
ap-1638	132	8	ctu	ctu	NOUN
ap-1638	132	9	in	in	ADP
ap-1638	132	10	prague	prague	NOUN
ap-1638	132	11	for	for	ADP
ap-1638	132	12	useful	useful	ADJ
ap-1638	132	13	consultations	consultation	NOUN
ap-1638	132	14	.	.	PUNCT
ap-1638	133	1	we	we	PRON
ap-1638	133	2	are	be	AUX
ap-1638	133	3	grateful	grateful	ADJ
ap-1638	133	4	to	to	ADP
ap-1638	133	5	colleagues	colleague	NOUN
ap-1638	133	6	from	from	ADP
ap-1638	133	7	the	the	DET
ap-1638	133	8	institute	institute	PROPN
ap-1638	133	9	of	of	ADP
ap-1638	133	10	physics	physics	PROPN
ap-1638	133	11	as	as	ADP
ap-1638	133	12	cr	cr	NOUN
ap-1638	133	13	for	for	ADP
ap-1638	133	14	their	their	PRON
ap-1638	133	15	help	help	NOUN
ap-1638	133	16	with	with	ADP
ap-1638	133	17	afm	afm	PROPN
ap-1638	133	18	measurements	measurement	NOUN
ap-1638	133	19	,	,	PUNCT
ap-1638	133	20	and	and	CCONJ
ap-1638	133	21	to	to	ADP
ap-1638	133	22	colleagues	colleague	NOUN
ap-1638	133	23	from	from	ADP
ap-1638	133	24	the	the	DET
ap-1638	133	25	heyrovsky	heyrovsky	PROPN
ap-1638	133	26	institute	institute	PROPN
ap-1638	133	27	of	of	ADP
ap-1638	133	28	physical	physical	ADJ
ap-1638	133	29	chemistry	chemistry	NOUN
ap-1638	133	30	as	as	ADP
ap-1638	133	31	cr	cr	NOUN
ap-1638	133	32	for	for	ADP
ap-1638	133	33	their	their	PRON
ap-1638	133	34	help	help	NOUN
ap-1638	133	35	with	with	ADP
ap-1638	133	36	raman	raman	NOUN
ap-1638	133	37	spectroscopy	spectroscopy	NOUN
ap-1638	133	38	measurements	measurement	NOUN
ap-1638	133	39	.	.	PUNCT
ap-1638	134	1	this	this	DET
ap-1638	134	2	work	work	NOUN
ap-1638	134	3	was	be	AUX
ap-1638	134	4	supported	support	VERB
ap-1638	134	5	by	by	ADP
ap-1638	134	6	the	the	DET
ap-1638	134	7	grant	grant	PROPN
ap-1638	134	8	agency	agency	NOUN
ap-1638	134	9	of	of	ADP
ap-1638	134	10	the	the	DET
ap-1638	134	11	czech	czech	PROPN
ap-1638	134	12	technical	technical	PROPN
ap-1638	134	13	university	university	PROPN
ap-1638	134	14	in	in	ADP
ap-1638	134	15	prague	prague	PROPN
ap-1638	134	16	,	,	PUNCT
ap-1638	134	17	grant	grant	VERB
ap-1638	134	18	no	no	INTJ
ap-1638	134	19	.	.	PUNCT
ap-1638	135	1	ctu	ctu	PROPN
ap-1638	135	2	10/811700	10/811700	PROPN
ap-1638	135	3	.	.	PUNCT
ap-1638	136	1	references	reference	NOUN
ap-1638	136	2	[	[	X
ap-1638	136	3	1	1	NUM
ap-1638	136	4	]	]	PUNCT
ap-1638	136	5	m.	m.	NOUN
ap-1638	136	6	houdek	houdek	PROPN
ap-1638	136	7	,	,	PUNCT
ap-1638	136	8	et	et	PROPN
ap-1638	136	9	al	al	PROPN
ap-1638	136	10	.	.	PROPN
ap-1638	136	11	neuromodulace	neuromodulace	PROPN
ap-1638	136	12	.	.	PUNCT
ap-1638	137	1	grada	grada	PROPN
ap-1638	137	2	,	,	PUNCT
ap-1638	137	3	2007	2007	NUM
ap-1638	137	4	.	.	PUNCT
ap-1638	138	1	[	[	X
ap-1638	138	2	2	2	X
ap-1638	138	3	]	]	PUNCT
ap-1638	138	4	p.	p.	NOUN
ap-1638	138	5	w.	w.	PROPN
ap-1638	138	6	may	may	AUX
ap-1638	138	7	.	.	PUNCT
ap-1638	139	1	diamond	diamond	VERB
ap-1638	139	2	thin	thin	ADJ
ap-1638	139	3	films	film	NOUN
ap-1638	139	4	:	:	PUNCT
ap-1638	139	5	a	a	DET
ap-1638	139	6	21st	21st	ADJ
ap-1638	139	7	-	-	PUNCT
ap-1638	139	8	century	century	NOUN
ap-1638	139	9	material	material	NOUN
ap-1638	139	10	.	.	PUNCT
ap-1638	140	1	philosophical	philosophical	ADJ
ap-1638	140	2	transactions	transaction	NOUN
ap-1638	140	3	of	of	ADP
ap-1638	140	4	the	the	DET
ap-1638	140	5	royal	royal	ADJ
ap-1638	140	6	society	society	NOUN
ap-1638	140	7	of	of	ADP
ap-1638	140	8	london	london	PROPN
ap-1638	140	9	series	series	PROPN
ap-1638	140	10	a	a	DET
ap-1638	140	11	mathematical	mathematical	ADJ
ap-1638	140	12	physical	physical	ADJ
ap-1638	140	13	and	and	CCONJ
ap-1638	140	14	engineering	engineering	NOUN
ap-1638	140	15	sciences	science	NOUN
ap-1638	140	16	358(1766):473–495	358(1766):473–495	NUM
ap-1638	140	17	,	,	PUNCT
ap-1638	140	18	2000	2000	NUM
ap-1638	140	19	.	.	PUNCT
ap-1638	141	1	[	[	X
ap-1638	141	2	3	3	X
ap-1638	141	3	]	]	X
ap-1638	141	4	p.	p.	NOUN
ap-1638	141	5	w.	w.	PROPN
ap-1638	142	1	may	may	PROPN
ap-1638	142	2	,	,	PUNCT
ap-1638	142	3	w.	w.	PROPN
ap-1638	142	4	j.	j.	PROPN
ap-1638	142	5	ludlow	ludlow	PROPN
ap-1638	142	6	,	,	PUNCT
ap-1638	142	7	m.	m.	NOUN
ap-1638	142	8	hannaway	hannaway	PROPN
ap-1638	142	9	,	,	PUNCT
ap-1638	142	10	et	et	PROPN
ap-1638	142	11	al	al	PROPN
ap-1638	142	12	.	.	PROPN
ap-1638	142	13	raman	raman	NOUN
ap-1638	142	14	and	and	CCONJ
ap-1638	142	15	conductivity	conductivity	NOUN
ap-1638	142	16	studies	study	NOUN
ap-1638	142	17	of	of	ADP
ap-1638	142	18	boron	boron	NOUN
ap-1638	142	19	-	-	PUNCT
ap-1638	142	20	doped	dope	VERB
ap-1638	142	21	microcrystalline	microcrystalline	NOUN
ap-1638	142	22	diamond	diamond	NOUN
ap-1638	142	23	,	,	PUNCT
ap-1638	142	24	faceted	facete	VERB
ap-1638	142	25	nanocrystalline	nanocrystalline	ADJ
ap-1638	142	26	diamond	diamond	PROPN
ap-1638	142	27	and	and	CCONJ
ap-1638	142	28	cauliflower	cauliflower	NOUN
ap-1638	142	29	diamond	diamond	NOUN
ap-1638	142	30	films	film	NOUN
ap-1638	142	31	.	.	PUNCT
ap-1638	143	1	diamond	diamond	PROPN
ap-1638	143	2	&	&	CCONJ
ap-1638	143	3	related	related	ADJ
ap-1638	143	4	materials	material	NOUN
ap-1638	143	5	17(2):105–117	17(2):105–117	NUM
ap-1638	143	6	,	,	PUNCT
ap-1638	143	7	2008	2008	NUM
ap-1638	143	8	.	.	PUNCT
ap-1638	144	1	[	[	X
ap-1638	144	2	4	4	X
ap-1638	144	3	]	]	PUNCT
ap-1638	144	4	s.	s.	PROPN
ap-1638	144	5	myllymaa	myllymaa	PROPN
ap-1638	144	6	,	,	PUNCT
ap-1638	144	7	k.	k.	PROPN
ap-1638	144	8	myllymaa	myllymaa	PROPN
ap-1638	144	9	,	,	PUNCT
ap-1638	144	10	r.	r.	PROPN
ap-1638	144	11	lappalainen	lappalainen	PROPN
ap-1638	144	12	.	.	PUNCT
ap-1638	145	1	flexible	flexible	ADJ
ap-1638	145	2	implantable	implantable	ADJ
ap-1638	145	3	thin	thin	ADJ
ap-1638	145	4	film	film	NOUN
ap-1638	145	5	neural	neural	ADJ
ap-1638	145	6	electrodes	electrode	NOUN
ap-1638	145	7	.	.	PUNCT
ap-1638	146	1	http://cdn.intechweb.org/pdfs/9218	http://cdn.intechweb.org/pdfs/9218	NOUN
ap-1638	146	2	.	.	PUNCT
ap-1638	147	1	pdf	pdf	PROPN
ap-1638	147	2	,	,	PUNCT
ap-1638	147	3	[	[	X
ap-1638	147	4	2012	2012	NUM
ap-1638	147	5	-	-	SYM
ap-1638	147	6	03	03	NUM
ap-1638	147	7	-	-	SYM
ap-1638	147	8	14	14	NUM
ap-1638	147	9	]	]	PUNCT
ap-1638	147	10	.	.	PUNCT
ap-1638	148	1	[	[	X
ap-1638	148	2	5	5	NUM
ap-1638	148	3	]	]	PUNCT
ap-1638	148	4	a.	a.	NOUN
ap-1638	148	5	norlin	norlin	PROPN
ap-1638	148	6	,	,	PUNCT
ap-1638	148	7	j.	j.	PROPN
ap-1638	148	8	pan	pan	PROPN
ap-1638	148	9	,	,	PUNCT
ap-1638	148	10	c.	c.	PROPN
ap-1638	148	11	leygraf	leygraf	PROPN
ap-1638	148	12	.	.	PUNCT
ap-1638	149	1	investigation	investigation	NOUN
ap-1638	149	2	of	of	ADP
ap-1638	149	3	pt	pt	PROPN
ap-1638	149	4	,	,	PUNCT
ap-1638	149	5	ti	ti	NOUN
ap-1638	149	6	,	,	PUNCT
ap-1638	149	7	tin	tin	NOUN
ap-1638	149	8	,	,	PUNCT
ap-1638	149	9	and	and	CCONJ
ap-1638	149	10	nano	nano	NOUN
ap-1638	149	11	-	-	PUNCT
ap-1638	149	12	porous	porous	ADJ
ap-1638	149	13	carbon	carbon	NOUN
ap-1638	149	14	electrodes	electrode	NOUN
ap-1638	149	15	for	for	ADP
ap-1638	149	16	implantable	implantable	ADJ
ap-1638	149	17	cardioverter	cardioverter	NOUN
ap-1638	149	18	-	-	PUNCT
ap-1638	149	19	defibrillator	defibrillator	NOUN
ap-1638	149	20	applications	application	NOUN
ap-1638	149	21	.	.	PUNCT
ap-1638	150	1	electrochimica	electrochimica	PROPN
ap-1638	150	2	acta	acta	PROPN
ap-1638	150	3	49(22–23):4011–4020	49(22–23):4011–4020	NUM
ap-1638	150	4	,	,	PUNCT
ap-1638	150	5	2004	2004	NUM
ap-1638	150	6	.	.	PUNCT
ap-1638	151	1	[	[	X
ap-1638	151	2	6	6	NUM
ap-1638	151	3	]	]	PUNCT
ap-1638	151	4	s.	s.	PROPN
ap-1638	151	5	prawer	prawer	PROPN
ap-1638	151	6	,	,	PUNCT
ap-1638	151	7	r.	r.	PROPN
ap-1638	151	8	j.	j.	PROPN
ap-1638	151	9	nemanich	nemanich	PROPN
ap-1638	151	10	.	.	PUNCT
ap-1638	152	1	raman	raman	ADJ
ap-1638	152	2	spectroscopy	spectroscopy	NOUN
ap-1638	152	3	of	of	ADP
ap-1638	152	4	diamond	diamond	NOUN
ap-1638	152	5	and	and	CCONJ
ap-1638	152	6	doped	dope	VERB
ap-1638	152	7	diamond	diamond	NOUN
ap-1638	152	8	.	.	PUNCT
ap-1638	153	1	philosophical	philosophical	ADJ
ap-1638	153	2	transactions	transaction	NOUN
ap-1638	153	3	of	of	ADP
ap-1638	153	4	the	the	DET
ap-1638	153	5	royal	royal	ADJ
ap-1638	153	6	society	society	NOUN
ap-1638	153	7	of	of	ADP
ap-1638	153	8	london	london	PROPN
ap-1638	153	9	series	series	PROPN
ap-1638	153	10	a	a	DET
ap-1638	153	11	362(1824):2537–2565	362(1824):2537–2565	NUM
ap-1638	153	12	,	,	PUNCT
ap-1638	153	13	2004	2004	NUM
ap-1638	153	14	.	.	PUNCT
ap-1638	154	1	[	[	X
ap-1638	154	2	7	7	X
ap-1638	154	3	]	]	X
ap-1638	154	4	o.a	o.a	PROPN
ap-1638	154	5	.	.	PROPN
ap-1638	154	6	williams	williams	PROPN
ap-1638	154	7	,	,	PUNCT
ap-1638	154	8	m.	m.	PROPN
ap-1638	154	9	nesladek	nesladek	PROPN
ap-1638	154	10	,	,	PUNCT
ap-1638	154	11	m.	m.	NOUN
ap-1638	154	12	daenen	daenen	PROPN
ap-1638	154	13	,	,	PUNCT
ap-1638	154	14	et	et	PROPN
ap-1638	154	15	al	al	PROPN
ap-1638	154	16	.	.	PUNCT
ap-1638	154	17	growth	growth	NOUN
ap-1638	154	18	,	,	PUNCT
ap-1638	154	19	electronic	electronic	ADJ
ap-1638	154	20	properties	property	NOUN
ap-1638	154	21	and	and	CCONJ
ap-1638	154	22	applications	application	NOUN
ap-1638	154	23	of	of	ADP
ap-1638	154	24	nanodiamond	nanodiamond	NOUN
ap-1638	154	25	.	.	PUNCT
ap-1638	155	1	diamond	diamond	PROPN
ap-1638	155	2	&	&	CCONJ
ap-1638	155	3	related	related	ADJ
ap-1638	155	4	materials	material	NOUN
ap-1638	155	5	17(7–10):1080–1088	17(7–10):1080–1088	NUM
ap-1638	155	6	,	,	PUNCT
ap-1638	155	7	2008	2008	NUM
ap-1638	155	8	.	.	PUNCT
ap-1638	156	1	61	61	NUM