id	sid	tid	token	lemma	pos
ap-1662	1	1	acta	acta	PROPN
ap-1662	1	2	polytechnica	polytechnica	PROPN
ap-1662	1	3	vol	vol	NOUN
ap-1662	1	4	.	.	PROPN
ap-1662	2	1	52	52	NUM
ap-1662	2	2	no	no	NOUN
ap-1662	2	3	.	.	PUNCT
ap-1662	3	1	5/2012	5/2012	NUM
ap-1662	3	2	flexible	flexible	ADJ
ap-1662	3	3	multi	multi	ADJ
ap-1662	3	4	-	-	ADJ
ap-1662	3	5	electrode	electrode	ADJ
ap-1662	3	6	array	array	NOUN
ap-1662	3	7	for	for	ADP
ap-1662	3	8	medical	medical	ADJ
ap-1662	3	9	applications	application	NOUN
ap-1662	3	10	nadine	nadine	PROPN
ap-1662	3	11	winkin	winkin	PROPN
ap-1662	3	12	,	,	PUNCT
ap-1662	3	13	wilfried	wilfried	PROPN
ap-1662	3	14	mokwa	mokwa	PROPN
ap-1662	3	15	institute	institute	PROPN
ap-1662	3	16	of	of	ADP
ap-1662	3	17	materials	material	NOUN
ap-1662	3	18	in	in	ADP
ap-1662	3	19	electrical	electrical	ADJ
ap-1662	3	20	engineering	engineering	NOUN
ap-1662	3	21	1	1	NUM
ap-1662	3	22	,	,	PUNCT
ap-1662	3	23	rwth	rwth	PROPN
ap-1662	3	24	aachen	aachen	PROPN
ap-1662	3	25	university	university	PROPN
ap-1662	3	26	,	,	PUNCT
ap-1662	3	27	sommerfeldstr	sommerfeldstr	PROPN
ap-1662	3	28	.	.	PUNCT
ap-1662	4	1	24	24	NUM
ap-1662	4	2	,	,	PUNCT
ap-1662	4	3	52074	52074	NUM
ap-1662	4	4	aachen	aachen	PROPN
ap-1662	4	5	,	,	PUNCT
ap-1662	4	6	germany	germany	PROPN
ap-1662	4	7	corresponding	corresponding	ADJ
ap-1662	4	8	author	author	NOUN
ap-1662	4	9	:	:	PUNCT
ap-1662	4	10	winkin@iwe1.rwth-aachen.de	winkin@iwe1.rwth-aachen.de	PROPN
ap-1662	4	11	abstract	abstract	ADJ
ap-1662	4	12	a	a	DET
ap-1662	4	13	flexible	flexible	ADJ
ap-1662	4	14	multi	multi	ADJ
ap-1662	4	15	-	-	ADJ
ap-1662	4	16	electrode	electrode	ADJ
ap-1662	4	17	array	array	NOUN
ap-1662	4	18	(	(	PUNCT
ap-1662	4	19	mea	mea	NOUN
ap-1662	4	20	)	)	PUNCT
ap-1662	4	21	with	with	ADP
ap-1662	4	22	an	an	DET
ap-1662	4	23	embedded	embed	VERB
ap-1662	4	24	silicon	silicon	NOUN
ap-1662	4	25	chip	chip	NOUN
ap-1662	4	26	for	for	ADP
ap-1662	4	27	electrical	electrical	ADJ
ap-1662	4	28	stimulation	stimulation	NOUN
ap-1662	4	29	of	of	ADP
ap-1662	4	30	neurons	neuron	NOUN
ap-1662	4	31	or	or	CCONJ
ap-1662	4	32	for	for	ADP
ap-1662	4	33	recording	recording	NOUN
ap-1662	4	34	action	action	NOUN
ap-1662	4	35	potentials	potential	NOUN
ap-1662	4	36	has	have	AUX
ap-1662	4	37	been	be	AUX
ap-1662	4	38	manufactured	manufacture	VERB
ap-1662	4	39	and	and	CCONJ
ap-1662	4	40	characterized	characterize	VERB
ap-1662	4	41	.	.	PUNCT
ap-1662	5	1	possible	possible	ADJ
ap-1662	5	2	improvements	improvement	NOUN
ap-1662	5	3	for	for	ADP
ap-1662	5	4	medical	medical	ADJ
ap-1662	5	5	applications	application	NOUN
ap-1662	5	6	using	use	VERB
ap-1662	5	7	this	this	DET
ap-1662	5	8	novel	novel	ADJ
ap-1662	5	9	approach	approach	NOUN
ap-1662	5	10	are	be	AUX
ap-1662	5	11	presented	present	VERB
ap-1662	5	12	.	.	PUNCT
ap-1662	6	1	by	by	ADP
ap-1662	6	2	connecting	connect	VERB
ap-1662	6	3	and	and	CCONJ
ap-1662	6	4	addressing	address	VERB
ap-1662	6	5	several	several	ADJ
ap-1662	6	6	of	of	ADP
ap-1662	6	7	these	these	DET
ap-1662	6	8	meas	mea	NOUN
ap-1662	6	9	via	via	ADP
ap-1662	6	10	a	a	DET
ap-1662	6	11	bus	bus	NOUN
ap-1662	6	12	system	system	NOUN
ap-1662	6	13	,	,	PUNCT
ap-1662	6	14	the	the	DET
ap-1662	6	15	number	number	NOUN
ap-1662	6	16	and	and	CCONJ
ap-1662	6	17	the	the	DET
ap-1662	6	18	density	density	NOUN
ap-1662	6	19	of	of	ADP
ap-1662	6	20	electrodes	electrode	NOUN
ap-1662	6	21	can	can	AUX
ap-1662	6	22	be	be	AUX
ap-1662	6	23	increased	increase	VERB
ap-1662	6	24	significantly	significantly	ADV
ap-1662	6	25	.	.	PUNCT
ap-1662	7	1	this	this	PRON
ap-1662	7	2	is	be	AUX
ap-1662	7	3	interesting	interesting	ADJ
ap-1662	7	4	for	for	ADP
ap-1662	7	5	medical	medical	ADJ
ap-1662	7	6	applications	application	NOUN
ap-1662	7	7	such	such	ADJ
ap-1662	7	8	as	as	ADP
ap-1662	7	9	retinal	retinal	ADJ
ap-1662	7	10	implants	implant	NOUN
ap-1662	7	11	and	and	CCONJ
ap-1662	7	12	cochlear	cochlear	VERB
ap-1662	7	13	implants	implant	NOUN
ap-1662	7	14	,	,	PUNCT
ap-1662	7	15	and	and	CCONJ
ap-1662	7	16	also	also	ADV
ap-1662	7	17	for	for	ADP
ap-1662	7	18	deep	deep	ADJ
ap-1662	7	19	brain	brain	NOUN
ap-1662	7	20	stimulators	stimulator	NOUN
ap-1662	7	21	.	.	PUNCT
ap-1662	8	1	design	design	NOUN
ap-1662	8	2	and	and	CCONJ
ap-1662	8	3	fabrication	fabrication	NOUN
ap-1662	8	4	techniques	technique	NOUN
ap-1662	8	5	for	for	ADP
ap-1662	8	6	the	the	DET
ap-1662	8	7	multi	multi	ADJ
ap-1662	8	8	-	-	ADJ
ap-1662	8	9	electrode	electrode	ADJ
ap-1662	8	10	array	array	NOUN
ap-1662	8	11	are	be	AUX
ap-1662	8	12	presented	present	VERB
ap-1662	8	13	.	.	PUNCT
ap-1662	9	1	finally	finally	ADV
ap-1662	9	2	,	,	PUNCT
ap-1662	9	3	first	first	ADJ
ap-1662	9	4	results	result	NOUN
ap-1662	9	5	of	of	ADP
ap-1662	9	6	mechanical	mechanical	ADJ
ap-1662	9	7	stress	stress	NOUN
ap-1662	9	8	tests	test	NOUN
ap-1662	9	9	are	be	AUX
ap-1662	9	10	shown	show	VERB
ap-1662	9	11	.	.	PUNCT
ap-1662	10	1	keywords	keyword	NOUN
ap-1662	10	2	:	:	PUNCT
ap-1662	10	3	flexible	flexible	ADJ
ap-1662	10	4	multi	multi	ADJ
ap-1662	10	5	-	-	ADJ
ap-1662	10	6	electrode	electrode	ADJ
ap-1662	10	7	array	array	NOUN
ap-1662	10	8	,	,	PUNCT
ap-1662	10	9	thinned	thin	VERB
ap-1662	10	10	silicon	silicon	NOUN
ap-1662	10	11	chip	chip	NOUN
ap-1662	10	12	,	,	PUNCT
ap-1662	10	13	electrical	electrical	ADJ
ap-1662	10	14	stimulation	stimulation	NOUN
ap-1662	10	15	,	,	PUNCT
ap-1662	10	16	retinal	retinal	ADJ
ap-1662	10	17	implant	implant	NOUN
ap-1662	10	18	.	.	PUNCT
ap-1662	11	1	1	1	NUM
ap-1662	11	2	introduction	introduction	NOUN
ap-1662	11	3	micro	micro	NOUN
ap-1662	11	4	-	-	NOUN
ap-1662	11	5	electrodes	electrode	NOUN
ap-1662	11	6	for	for	ADP
ap-1662	11	7	stimulating	stimulate	VERB
ap-1662	11	8	neurons	neuron	NOUN
ap-1662	11	9	or	or	CCONJ
ap-1662	11	10	for	for	ADP
ap-1662	11	11	recording	recording	NOUN
ap-1662	11	12	action	action	NOUN
ap-1662	11	13	potentials	potential	NOUN
ap-1662	11	14	are	be	AUX
ap-1662	11	15	widely	widely	ADV
ap-1662	11	16	used	use	VERB
ap-1662	11	17	in	in	ADP
ap-1662	11	18	medical	medical	ADJ
ap-1662	11	19	applications	application	NOUN
ap-1662	11	20	.	.	PUNCT
ap-1662	12	1	this	this	DET
ap-1662	12	2	paper	paper	NOUN
ap-1662	12	3	concentrates	concentrate	VERB
ap-1662	12	4	on	on	ADP
ap-1662	12	5	the	the	DET
ap-1662	12	6	example	example	NOUN
ap-1662	12	7	of	of	ADP
ap-1662	12	8	an	an	DET
ap-1662	12	9	intraocular	intraocular	ADJ
ap-1662	12	10	implant	implant	NOUN
ap-1662	12	11	.	.	PUNCT
ap-1662	13	1	worldwide	worldwide	ADV
ap-1662	13	2	more	more	ADJ
ap-1662	13	3	than	than	ADP
ap-1662	13	4	3	3	NUM
ap-1662	13	5	million	million	NUM
ap-1662	13	6	people	people	NOUN
ap-1662	13	7	suffer	suffer	VERB
ap-1662	13	8	from	from	ADP
ap-1662	13	9	retinitis	retinitis	ADJ
ap-1662	13	10	pigmentosa	pigmentosa	NOUN
ap-1662	13	11	(	(	PUNCT
ap-1662	13	12	rp	rp	NOUN
ap-1662	13	13	)	)	PUNCT
ap-1662	13	14	.	.	PUNCT
ap-1662	14	1	this	this	DET
ap-1662	14	2	hereditary	hereditary	ADJ
ap-1662	14	3	disease	disease	NOUN
ap-1662	14	4	leads	lead	VERB
ap-1662	14	5	to	to	ADP
ap-1662	14	6	gradual	gradual	ADJ
ap-1662	14	7	degeneration	degeneration	NOUN
ap-1662	14	8	of	of	ADP
ap-1662	14	9	the	the	DET
ap-1662	14	10	light	light	ADJ
ap-1662	14	11	-	-	PUNCT
ap-1662	14	12	sensitive	sensitive	ADJ
ap-1662	14	13	cells	cell	NOUN
ap-1662	14	14	(	(	PUNCT
ap-1662	14	15	rods	rod	NOUN
ap-1662	14	16	and	and	CCONJ
ap-1662	14	17	cones	cone	NOUN
ap-1662	14	18	)	)	PUNCT
ap-1662	14	19	of	of	ADP
ap-1662	14	20	the	the	DET
ap-1662	14	21	retina	retina	NOUN
ap-1662	14	22	.	.	PUNCT
ap-1662	15	1	as	as	ADP
ap-1662	15	2	a	a	DET
ap-1662	15	3	result	result	NOUN
ap-1662	15	4	,	,	PUNCT
ap-1662	15	5	the	the	DET
ap-1662	15	6	field	field	NOUN
ap-1662	15	7	of	of	ADP
ap-1662	15	8	sight	sight	NOUN
ap-1662	15	9	becomes	become	VERB
ap-1662	15	10	smaller	small	ADJ
ap-1662	15	11	over	over	ADP
ap-1662	15	12	the	the	DET
ap-1662	15	13	years	year	NOUN
ap-1662	15	14	,	,	PUNCT
ap-1662	15	15	and	and	CCONJ
ap-1662	15	16	in	in	ADP
ap-1662	15	17	most	most	ADJ
ap-1662	15	18	cases	case	NOUN
ap-1662	15	19	,	,	PUNCT
ap-1662	15	20	this	this	DET
ap-1662	15	21	disease	disease	NOUN
ap-1662	15	22	ends	end	VERB
ap-1662	15	23	up	up	ADP
ap-1662	15	24	in	in	ADP
ap-1662	15	25	total	total	ADJ
ap-1662	15	26	blindness	blindness	NOUN
ap-1662	15	27	.	.	PUNCT
ap-1662	16	1	unfortunately	unfortunately	ADV
ap-1662	16	2	,	,	PUNCT
ap-1662	16	3	rp	rp	NOUN
ap-1662	16	4	is	be	AUX
ap-1662	16	5	still	still	ADV
ap-1662	16	6	incurable	incurable	ADJ
ap-1662	16	7	.	.	PUNCT
ap-1662	17	1	however	however	ADV
ap-1662	17	2	,	,	PUNCT
ap-1662	17	3	it	it	PRON
ap-1662	17	4	has	have	AUX
ap-1662	17	5	been	be	AUX
ap-1662	17	6	shown	show	VERB
ap-1662	17	7	,	,	PUNCT
ap-1662	17	8	that	that	SCONJ
ap-1662	17	9	even	even	ADV
ap-1662	17	10	after	after	ADP
ap-1662	17	11	many	many	ADJ
ap-1662	17	12	years	year	NOUN
ap-1662	17	13	of	of	ADP
ap-1662	17	14	blindness	blindness	NOUN
ap-1662	17	15	,	,	PUNCT
ap-1662	17	16	about	about	ADV
ap-1662	17	17	30	30	NUM
ap-1662	17	18	%	%	NOUN
ap-1662	17	19	of	of	ADP
ap-1662	17	20	the	the	DET
ap-1662	17	21	retinal	retinal	ADJ
ap-1662	17	22	ganglion	ganglion	NOUN
ap-1662	17	23	cells	cell	NOUN
ap-1662	17	24	of	of	ADP
ap-1662	17	25	rp	rp	NOUN
ap-1662	17	26	patients	patient	NOUN
ap-1662	17	27	are	be	AUX
ap-1662	17	28	still	still	ADV
ap-1662	17	29	intact	intact	ADJ
ap-1662	17	30	.	.	PUNCT
ap-1662	18	1	electrical	electrical	ADJ
ap-1662	18	2	stimulation	stimulation	NOUN
ap-1662	18	3	of	of	ADP
ap-1662	18	4	these	these	DET
ap-1662	18	5	remaining	remain	VERB
ap-1662	18	6	cells	cell	NOUN
ap-1662	18	7	can	can	AUX
ap-1662	18	8	evoke	evoke	VERB
ap-1662	18	9	visual	visual	ADJ
ap-1662	18	10	perceptions	perception	NOUN
ap-1662	18	11	[	[	X
ap-1662	18	12	1	1	NUM
ap-1662	18	13	,	,	PUNCT
ap-1662	18	14	2	2	NUM
ap-1662	18	15	,	,	PUNCT
ap-1662	18	16	3	3	NUM
ap-1662	18	17	,	,	PUNCT
ap-1662	18	18	9	9	NUM
ap-1662	18	19	]	]	PUNCT
ap-1662	18	20	.	.	PUNCT
ap-1662	19	1	several	several	ADJ
ap-1662	19	2	research	research	NOUN
ap-1662	19	3	groups	group	NOUN
ap-1662	19	4	worldwide	worldwide	ADV
ap-1662	19	5	are	be	AUX
ap-1662	19	6	working	work	VERB
ap-1662	19	7	on	on	ADP
ap-1662	19	8	the	the	DET
ap-1662	19	9	development	development	NOUN
ap-1662	19	10	of	of	ADP
ap-1662	19	11	epiretinal	epiretinal	ADJ
ap-1662	19	12	implants	implant	NOUN
ap-1662	19	13	for	for	ADP
ap-1662	19	14	stimulating	stimulate	VERB
ap-1662	19	15	these	these	DET
ap-1662	19	16	remaining	remain	VERB
ap-1662	19	17	intact	intact	ADJ
ap-1662	19	18	ganglion	ganglion	NOUN
ap-1662	19	19	cells	cell	NOUN
ap-1662	19	20	.	.	PUNCT
ap-1662	20	1	one	one	NUM
ap-1662	20	2	electrical	electrical	ADJ
ap-1662	20	3	stimulation	stimulation	NOUN
ap-1662	20	4	concept	concept	NOUN
ap-1662	20	5	that	that	PRON
ap-1662	20	6	has	have	AUX
ap-1662	20	7	been	be	AUX
ap-1662	20	8	realized	realize	VERB
ap-1662	20	9	is	be	AUX
ap-1662	20	10	the	the	DET
ap-1662	20	11	“	"	PUNCT
ap-1662	20	12	epi	epi	NOUN
ap-1662	20	13	-	-	PUNCT
ap-1662	20	14	ret-3	ret-3	NOUN
ap-1662	20	15	”	"	PUNCT
ap-1662	20	16	wireless	wireless	NOUN
ap-1662	20	17	-	-	PUNCT
ap-1662	20	18	powered	power	VERB
ap-1662	20	19	implant	implant	ADJ
ap-1662	20	20	system	system	NOUN
ap-1662	20	21	funded	fund	VERB
ap-1662	20	22	by	by	ADP
ap-1662	20	23	the	the	DET
ap-1662	20	24	german	german	ADJ
ap-1662	20	25	ministry	ministry	PROPN
ap-1662	20	26	of	of	ADP
ap-1662	20	27	education	education	PROPN
ap-1662	20	28	and	and	CCONJ
ap-1662	20	29	research	research	NOUN
ap-1662	20	30	(	(	PUNCT
ap-1662	20	31	bmbf	bmbf	NOUN
ap-1662	20	32	)	)	PUNCT
ap-1662	20	33	.	.	PUNCT
ap-1662	21	1	this	this	DET
ap-1662	21	2	system	system	NOUN
ap-1662	21	3	consists	consist	VERB
ap-1662	21	4	of	of	ADP
ap-1662	21	5	an	an	DET
ap-1662	21	6	extraocular	extraocular	ADJ
ap-1662	21	7	part	part	NOUN
ap-1662	21	8	and	and	CCONJ
ap-1662	21	9	an	an	DET
ap-1662	21	10	intraocular	intraocular	ADJ
ap-1662	21	11	part	part	NOUN
ap-1662	21	12	,	,	PUNCT
ap-1662	21	13	see	see	VERB
ap-1662	21	14	fig	fig	NOUN
ap-1662	21	15	.	.	PUNCT
ap-1662	22	1	1	1	X
ap-1662	22	2	.	.	X
ap-1662	22	3	a	a	DET
ap-1662	22	4	portable	portable	ADJ
ap-1662	22	5	computer	computer	NOUN
ap-1662	22	6	system	system	NOUN
ap-1662	22	7	,	,	PUNCT
ap-1662	22	8	a	a	DET
ap-1662	22	9	transmitter	transmitter	NOUN
ap-1662	22	10	unit	unit	NOUN
ap-1662	22	11	and	and	CCONJ
ap-1662	22	12	a	a	DET
ap-1662	22	13	transmitter	transmitter	NOUN
ap-1662	22	14	coil	coil	NOUN
ap-1662	22	15	form	form	VERB
ap-1662	22	16	the	the	DET
ap-1662	22	17	extraocular	extraocular	ADJ
ap-1662	22	18	part	part	NOUN
ap-1662	22	19	.	.	PUNCT
ap-1662	23	1	the	the	DET
ap-1662	23	2	transmitter	transmitter	NOUN
ap-1662	23	3	coil	coil	NOUN
ap-1662	23	4	is	be	AUX
ap-1662	23	5	attached	attach	VERB
ap-1662	23	6	to	to	ADP
ap-1662	23	7	a	a	DET
ap-1662	23	8	special	special	ADJ
ap-1662	23	9	holder	holder	NOUN
ap-1662	23	10	similar	similar	ADJ
ap-1662	23	11	to	to	ADP
ap-1662	23	12	an	an	DET
ap-1662	23	13	eyeglass	eyeglass	NOUN
ap-1662	23	14	frame	frame	NOUN
ap-1662	23	15	.	.	PUNCT
ap-1662	24	1	the	the	DET
ap-1662	24	2	intraocular	intraocular	ADJ
ap-1662	24	3	part	part	NOUN
ap-1662	24	4	—	—	PUNCT
ap-1662	24	5	the	the	DET
ap-1662	24	6	epiretinal	epiretinal	ADJ
ap-1662	24	7	implant	implant	NOUN
ap-1662	24	8	—	—	PUNCT
ap-1662	24	9	consists	consist	VERB
ap-1662	24	10	of	of	ADP
ap-1662	24	11	a	a	DET
ap-1662	24	12	flexible	flexible	ADJ
ap-1662	24	13	micro	micro	ADJ
ap-1662	24	14	cable	cable	NOUN
ap-1662	24	15	with	with	ADP
ap-1662	24	16	an	an	DET
ap-1662	24	17	integrated	integrated	ADJ
ap-1662	24	18	receiver	receiver	ADJ
ap-1662	24	19	coil	coil	NOUN
ap-1662	24	20	,	,	PUNCT
ap-1662	24	21	a	a	DET
ap-1662	24	22	receiver	receiver	ADJ
ap-1662	24	23	chip	chip	NOUN
ap-1662	24	24	,	,	PUNCT
ap-1662	24	25	a	a	DET
ap-1662	24	26	stimulation	stimulation	NOUN
ap-1662	24	27	chip	chip	NOUN
ap-1662	24	28	,	,	PUNCT
ap-1662	24	29	and	and	CCONJ
ap-1662	24	30	stimulation	stimulation	NOUN
ap-1662	24	31	electrodes	electrode	NOUN
ap-1662	24	32	.	.	PUNCT
ap-1662	25	1	the	the	DET
ap-1662	25	2	electrode	electrode	NOUN
ap-1662	25	3	array	array	NOUN
ap-1662	25	4	with	with	ADP
ap-1662	25	5	25	25	NUM
ap-1662	25	6	electrodes	electrode	NOUN
ap-1662	25	7	is	be	AUX
ap-1662	25	8	placed	place	VERB
ap-1662	25	9	directly	directly	ADV
ap-1662	25	10	onto	onto	ADP
ap-1662	25	11	the	the	DET
ap-1662	25	12	retina	retina	NOUN
ap-1662	25	13	and	and	CCONJ
ap-1662	25	14	is	be	AUX
ap-1662	25	15	fixed	fix	VERB
ap-1662	25	16	with	with	ADP
ap-1662	25	17	retinal	retinal	ADJ
ap-1662	25	18	tacks	tack	NOUN
ap-1662	25	19	.	.	PUNCT
ap-1662	26	1	the	the	DET
ap-1662	26	2	electrode	electrode	NOUN
ap-1662	26	3	array	array	NOUN
ap-1662	26	4	is	be	AUX
ap-1662	26	5	connected	connect	VERB
ap-1662	26	6	via	via	ADP
ap-1662	26	7	conductor	conductor	NOUN
ap-1662	26	8	tracks	track	NOUN
ap-1662	26	9	with	with	ADP
ap-1662	26	10	the	the	DET
ap-1662	26	11	electronic	electronic	ADJ
ap-1662	26	12	components	component	NOUN
ap-1662	26	13	located	locate	VERB
ap-1662	26	14	in	in	ADP
ap-1662	26	15	an	an	DET
ap-1662	26	16	artificial	artificial	ADJ
ap-1662	26	17	lens	lens	NOUN
ap-1662	26	18	in	in	ADP
ap-1662	26	19	the	the	DET
ap-1662	26	20	posterior	posterior	ADJ
ap-1662	26	21	chamber	chamber	NOUN
ap-1662	26	22	figure	figure	NOUN
ap-1662	26	23	1	1	NUM
ap-1662	26	24	:	:	PUNCT
ap-1662	26	25	schematic	schematic	ADJ
ap-1662	26	26	view	view	NOUN
ap-1662	26	27	of	of	ADP
ap-1662	26	28	the	the	DET
ap-1662	26	29	epi	epi	NOUN
ap-1662	26	30	-	-	PUNCT
ap-1662	26	31	ret-3	ret-3	ADJ
ap-1662	26	32	implant	implant	ADJ
ap-1662	26	33	system	system	NOUN
ap-1662	27	1	[	[	X
ap-1662	27	2	3	3	X
ap-1662	27	3	]	]	PUNCT
ap-1662	27	4	of	of	ADP
ap-1662	27	5	the	the	DET
ap-1662	27	6	eye	eye	NOUN
ap-1662	27	7	.	.	PUNCT
ap-1662	28	1	this	this	DET
ap-1662	28	2	epiretinal	epiretinal	ADJ
ap-1662	28	3	implant	implant	NOUN
ap-1662	28	4	not	not	PART
ap-1662	28	5	only	only	ADV
ap-1662	28	6	has	have	AUX
ap-1662	28	7	been	be	AUX
ap-1662	28	8	tested	test	VERB
ap-1662	28	9	in	in	ADP
ap-1662	28	10	animal	animal	NOUN
ap-1662	28	11	experiments	experiment	NOUN
ap-1662	28	12	,	,	PUNCT
ap-1662	28	13	but	but	CCONJ
ap-1662	28	14	has	have	AUX
ap-1662	28	15	already	already	ADV
ap-1662	28	16	been	be	AUX
ap-1662	28	17	implanted	implant	VERB
ap-1662	28	18	in	in	ADP
ap-1662	28	19	the	the	DET
ap-1662	28	20	eyes	eye	NOUN
ap-1662	28	21	of	of	ADP
ap-1662	28	22	six	six	NUM
ap-1662	28	23	blind	blind	ADJ
ap-1662	28	24	rp	rp	NOUN
ap-1662	28	25	patients	patient	NOUN
ap-1662	28	26	.	.	PUNCT
ap-1662	29	1	they	they	PRON
ap-1662	29	2	wore	wear	VERB
ap-1662	29	3	the	the	DET
ap-1662	29	4	implant	implant	NOUN
ap-1662	29	5	for	for	ADP
ap-1662	29	6	a	a	DET
ap-1662	29	7	trial	trial	NOUN
ap-1662	29	8	period	period	NOUN
ap-1662	29	9	of	of	ADP
ap-1662	29	10	four	four	NUM
ap-1662	29	11	weeks	week	NOUN
ap-1662	29	12	,	,	PUNCT
ap-1662	29	13	without	without	ADP
ap-1662	29	14	any	any	DET
ap-1662	29	15	complications	complication	NOUN
ap-1662	29	16	.	.	PUNCT
ap-1662	30	1	the	the	DET
ap-1662	30	2	surgeries	surgery	NOUN
ap-1662	30	3	for	for	ADP
ap-1662	30	4	implantation	implantation	NOUN
ap-1662	30	5	and	and	CCONJ
ap-1662	30	6	explantation	explantation	NOUN
ap-1662	30	7	,	,	PUNCT
ap-1662	30	8	and	and	CCONJ
ap-1662	30	9	also	also	ADV
ap-1662	30	10	the	the	DET
ap-1662	30	11	stimulation	stimulation	NOUN
ap-1662	30	12	tests	test	NOUN
ap-1662	30	13	,	,	PUNCT
ap-1662	30	14	were	be	AUX
ap-1662	30	15	performed	perform	VERB
ap-1662	30	16	at	at	ADP
ap-1662	30	17	the	the	DET
ap-1662	30	18	eye	eye	NOUN
ap-1662	30	19	clinics	clinic	NOUN
ap-1662	30	20	of	of	ADP
ap-1662	30	21	the	the	DET
ap-1662	30	22	universities	university	NOUN
ap-1662	30	23	of	of	ADP
ap-1662	30	24	aachen	aachen	PROPN
ap-1662	30	25	and	and	CCONJ
ap-1662	30	26	essen	essen	PROPN
ap-1662	30	27	,	,	PUNCT
ap-1662	30	28	germany	germany	PROPN
ap-1662	30	29	.	.	PUNCT
ap-1662	31	1	the	the	DET
ap-1662	31	2	rp	rp	PROPN
ap-1662	31	3	patients	patient	NOUN
ap-1662	31	4	reported	report	VERB
ap-1662	31	5	dots	dot	NOUN
ap-1662	31	6	,	,	PUNCT
ap-1662	31	7	lines	line	NOUN
ap-1662	31	8	,	,	PUNCT
ap-1662	31	9	arcs	arc	NOUN
ap-1662	31	10	or	or	CCONJ
ap-1662	31	11	circles	circle	NOUN
ap-1662	31	12	in	in	ADP
ap-1662	31	13	different	different	ADJ
ap-1662	31	14	colours	colour	NOUN
ap-1662	31	15	and	and	CCONJ
ap-1662	31	16	intensities	intensity	NOUN
ap-1662	31	17	,	,	PUNCT
ap-1662	31	18	depending	depend	VERB
ap-1662	31	19	on	on	ADP
ap-1662	31	20	the	the	DET
ap-1662	31	21	stimulations	stimulation	NOUN
ap-1662	31	22	[	[	X
ap-1662	31	23	3	3	NUM
ap-1662	31	24	,	,	PUNCT
ap-1662	31	25	2	2	NUM
ap-1662	31	26	]	]	PUNCT
ap-1662	31	27	.	.	PUNCT
ap-1662	32	1	the	the	DET
ap-1662	32	2	next	next	ADJ
ap-1662	32	3	step	step	NOUN
ap-1662	32	4	will	will	AUX
ap-1662	32	5	now	now	ADV
ap-1662	32	6	be	be	AUX
ap-1662	32	7	to	to	PART
ap-1662	32	8	design	design	VERB
ap-1662	32	9	and	and	CCONJ
ap-1662	32	10	develop	develop	VERB
ap-1662	32	11	a	a	DET
ap-1662	32	12	second	second	ADJ
ap-1662	32	13	-	-	PUNCT
ap-1662	32	14	generation	generation	NOUN
ap-1662	32	15	wireless	wireless	ADJ
ap-1662	32	16	implant	implant	ADJ
ap-1662	32	17	system	system	NOUN
ap-1662	32	18	with	with	ADP
ap-1662	32	19	a	a	DET
ap-1662	32	20	considerably	considerably	ADV
ap-1662	32	21	higher	high	ADJ
ap-1662	32	22	number	number	NOUN
ap-1662	32	23	of	of	ADP
ap-1662	32	24	electrodes	electrode	NOUN
ap-1662	32	25	,	,	PUNCT
ap-1662	32	26	increasing	increase	VERB
ap-1662	32	27	the	the	DET
ap-1662	32	28	spatial	spatial	ADJ
ap-1662	32	29	resolution	resolution	NOUN
ap-1662	32	30	as	as	ADV
ap-1662	32	31	well	well	ADV
ap-1662	32	32	as	as	ADP
ap-1662	32	33	the	the	DET
ap-1662	32	34	sight	sight	NOUN
ap-1662	32	35	of	of	ADP
ap-1662	32	36	view	view	NOUN
ap-1662	32	37	[	[	X
ap-1662	32	38	2	2	NUM
ap-1662	32	39	]	]	PUNCT
ap-1662	32	40	.	.	PUNCT
ap-1662	33	1	however	however	ADV
ap-1662	33	2	,	,	PUNCT
ap-1662	33	3	it	it	PRON
ap-1662	33	4	would	would	AUX
ap-1662	33	5	be	be	AUX
ap-1662	33	6	a	a	DET
ap-1662	33	7	major	major	ADJ
ap-1662	33	8	technical	technical	ADJ
ap-1662	33	9	task	task	NOUN
ap-1662	33	10	to	to	PART
ap-1662	33	11	contact	contact	VERB
ap-1662	33	12	a	a	DET
ap-1662	33	13	microelectrode	microelectrode	ADJ
ap-1662	33	14	array	array	NOUN
ap-1662	33	15	with	with	ADP
ap-1662	33	16	for	for	ADP
ap-1662	33	17	example	example	NOUN
ap-1662	33	18	1000	1000	NUM
ap-1662	33	19	electrodes	electrode	NOUN
ap-1662	33	20	by	by	ADP
ap-1662	33	21	separate	separate	ADJ
ap-1662	33	22	tracks	track	NOUN
ap-1662	33	23	and	and	CCONJ
ap-1662	33	24	to	to	PART
ap-1662	33	25	control	control	VERB
ap-1662	33	26	them	they	PRON
ap-1662	33	27	125	125	NUM
ap-1662	33	28	acta	acta	PROPN
ap-1662	33	29	polytechnica	polytechnica	PROPN
ap-1662	33	30	vol	vol	NOUN
ap-1662	33	31	.	.	PUNCT
ap-1662	34	1	52	52	NUM
ap-1662	34	2	no	no	NOUN
ap-1662	34	3	.	.	PUNCT
ap-1662	35	1	5/2012	5/2012	NUM
ap-1662	35	2	figure	figure	NOUN
ap-1662	35	3	2	2	NUM
ap-1662	35	4	:	:	PUNCT
ap-1662	35	5	flexible	flexible	ADJ
ap-1662	35	6	microelectrode	microelectrode	PROPN
ap-1662	35	7	array	array	NOUN
ap-1662	35	8	with	with	ADP
ap-1662	35	9	distributed	distribute	VERB
ap-1662	35	10	control	control	NOUN
ap-1662	35	11	electronics	electronic	NOUN
ap-1662	35	12	and	and	CCONJ
ap-1662	35	13	distributed	distribute	VERB
ap-1662	35	14	electrodes	electrode	NOUN
ap-1662	35	15	.	.	PUNCT
ap-1662	36	1	figure	figure	NOUN
ap-1662	36	2	3	3	NUM
ap-1662	36	3	:	:	PUNCT
ap-1662	36	4	design	design	NOUN
ap-1662	36	5	of	of	ADP
ap-1662	36	6	flex	flex	ADJ
ap-1662	36	7	-	-	PUNCT
ap-1662	36	8	mea	mea	NOUN
ap-1662	36	9	(	(	PUNCT
ap-1662	36	10	schematic	schematic	ADJ
ap-1662	36	11	)	)	PUNCT
ap-1662	36	12	.	.	PUNCT
ap-1662	37	1	individually	individually	ADV
ap-1662	37	2	.	.	PUNCT
ap-1662	38	1	a	a	DET
ap-1662	38	2	feasible	feasible	ADJ
ap-1662	38	3	approach	approach	NOUN
ap-1662	38	4	is	be	AUX
ap-1662	38	5	to	to	PART
ap-1662	38	6	control	control	VERB
ap-1662	38	7	the	the	DET
ap-1662	38	8	electrodes	electrode	NOUN
ap-1662	38	9	locally	locally	ADV
ap-1662	38	10	with	with	ADP
ap-1662	38	11	intelligent	intelligent	ADJ
ap-1662	38	12	cmos	cmos	ADJ
ap-1662	38	13	circuits	circuit	NOUN
ap-1662	38	14	,	,	PUNCT
ap-1662	38	15	each	each	PRON
ap-1662	38	16	driving	drive	VERB
ap-1662	38	17	for	for	ADP
ap-1662	38	18	example	example	NOUN
ap-1662	38	19	25	25	NUM
ap-1662	38	20	electrodes	electrode	NOUN
ap-1662	38	21	.	.	PUNCT
ap-1662	39	1	several	several	ADJ
ap-1662	39	2	of	of	ADP
ap-1662	39	3	these	these	DET
ap-1662	39	4	circuits	circuit	NOUN
ap-1662	39	5	could	could	AUX
ap-1662	39	6	be	be	AUX
ap-1662	39	7	connected	connect	VERB
ap-1662	39	8	and	and	CCONJ
ap-1662	39	9	addressed	address	VERB
ap-1662	39	10	via	via	ADP
ap-1662	39	11	a	a	DET
ap-1662	39	12	bus	bus	NOUN
ap-1662	39	13	system	system	NOUN
ap-1662	39	14	.	.	PUNCT
ap-1662	40	1	the	the	DET
ap-1662	40	2	whole	whole	NOUN
ap-1662	40	3	has	have	VERB
ap-1662	40	4	to	to	PART
ap-1662	40	5	be	be	AUX
ap-1662	40	6	embedded	embed	VERB
ap-1662	40	7	into	into	ADP
ap-1662	40	8	a	a	DET
ap-1662	40	9	flexible	flexible	ADJ
ap-1662	40	10	carrier	carrier	NOUN
ap-1662	40	11	for	for	ADP
ap-1662	40	12	better	well	ADJ
ap-1662	40	13	adaption	adaption	NOUN
ap-1662	40	14	to	to	ADP
ap-1662	40	15	the	the	DET
ap-1662	40	16	human	human	ADJ
ap-1662	40	17	eye	eye	NOUN
ap-1662	40	18	.	.	PUNCT
ap-1662	41	1	the	the	DET
ap-1662	41	2	idea	idea	NOUN
ap-1662	41	3	is	be	AUX
ap-1662	41	4	shown	show	VERB
ap-1662	41	5	in	in	ADP
ap-1662	41	6	fig	fig	NOUN
ap-1662	41	7	.	.	PUNCT
ap-1662	42	1	2	2	X
ap-1662	42	2	.	.	X
ap-1662	42	3	the	the	DET
ap-1662	42	4	following	follow	VERB
ap-1662	42	5	sections	section	NOUN
ap-1662	42	6	will	will	AUX
ap-1662	42	7	present	present	VERB
ap-1662	42	8	the	the	DET
ap-1662	42	9	design	design	NOUN
ap-1662	42	10	and	and	CCONJ
ap-1662	42	11	the	the	DET
ap-1662	42	12	fabrication	fabrication	NOUN
ap-1662	42	13	of	of	ADP
ap-1662	42	14	a	a	DET
ap-1662	42	15	“	"	PUNCT
ap-1662	42	16	flexible	flexible	ADJ
ap-1662	42	17	intelligent	intelligent	ADJ
ap-1662	42	18	electrode	electrode	NOUN
ap-1662	42	19	”	"	PUNCT
ap-1662	42	20	.	.	PUNCT
ap-1662	43	1	2	2	NUM
ap-1662	43	2	design	design	NOUN
ap-1662	43	3	and	and	CCONJ
ap-1662	43	4	fabrication	fabrication	NOUN
ap-1662	43	5	2.1	2.1	NUM
ap-1662	43	6	design	design	NOUN
ap-1662	43	7	to	to	PART
ap-1662	43	8	obtain	obtain	VERB
ap-1662	43	9	the	the	DET
ap-1662	43	10	desired	desire	VERB
ap-1662	43	11	flexibility	flexibility	NOUN
ap-1662	43	12	of	of	ADP
ap-1662	43	13	the	the	DET
ap-1662	43	14	cmos	cmos	NOUN
ap-1662	43	15	-	-	PUNCT
ap-1662	43	16	chips	chip	NOUN
ap-1662	43	17	,	,	PUNCT
ap-1662	43	18	they	they	PRON
ap-1662	43	19	have	have	VERB
ap-1662	43	20	to	to	PART
ap-1662	43	21	be	be	AUX
ap-1662	43	22	thinned	thin	VERB
ap-1662	43	23	to	to	ADP
ap-1662	43	24	thicknesses	thickness	NOUN
ap-1662	43	25	below	below	ADP
ap-1662	43	26	20	20	NUM
ap-1662	43	27	µm	µm	NOUN
ap-1662	43	28	.	.	PUNCT
ap-1662	44	1	these	these	DET
ap-1662	44	2	thinned	thin	VERB
ap-1662	44	3	cmos	cmos	NOUN
ap-1662	44	4	-	-	PUNCT
ap-1662	44	5	chips	chip	NOUN
ap-1662	44	6	,	,	PUNCT
ap-1662	44	7	the	the	DET
ap-1662	44	8	gold	gold	NOUN
ap-1662	44	9	conductors	conductor	NOUN
ap-1662	44	10	to	to	ADP
ap-1662	44	11	the	the	DET
ap-1662	44	12	electrodes	electrode	NOUN
ap-1662	44	13	and	and	CCONJ
ap-1662	44	14	25	25	NUM
ap-1662	44	15	electrodes	electrode	NOUN
ap-1662	44	16	are	be	AUX
ap-1662	44	17	integrated	integrate	VERB
ap-1662	44	18	into	into	ADP
ap-1662	44	19	a	a	DET
ap-1662	44	20	polyimide	polyimide	ADJ
ap-1662	44	21	carrier	carrier	NOUN
ap-1662	44	22	,	,	PUNCT
ap-1662	44	23	and	and	CCONJ
ap-1662	44	24	are	be	AUX
ap-1662	44	25	encapsulated	encapsulate	VERB
ap-1662	44	26	with	with	ADP
ap-1662	44	27	parylene	parylene	NOUN
ap-1662	44	28	.	.	PUNCT
ap-1662	45	1	in	in	ADP
ap-1662	45	2	the	the	DET
ap-1662	45	3	following	follow	VERB
ap-1662	45	4	text	text	NOUN
ap-1662	45	5	,	,	PUNCT
ap-1662	45	6	this	this	DET
ap-1662	45	7	structure	structure	NOUN
ap-1662	45	8	is	be	AUX
ap-1662	45	9	called	call	VERB
ap-1662	45	10	“	"	PUNCT
ap-1662	45	11	flexmea	flexmea	PROPN
ap-1662	45	12	”	"	PUNCT
ap-1662	45	13	(	(	PUNCT
ap-1662	45	14	fig	fig	NOUN
ap-1662	45	15	.	.	PUNCT
ap-1662	46	1	3	3	NUM
ap-1662	46	2	)	)	PUNCT
ap-1662	46	3	.	.	PUNCT
ap-1662	47	1	flex	flex	ADJ
ap-1662	47	2	-	-	PUNCT
ap-1662	47	3	mea	mea	NOUN
ap-1662	47	4	will	will	AUX
ap-1662	47	5	act	act	VERB
ap-1662	47	6	as	as	ADP
ap-1662	47	7	the	the	DET
ap-1662	47	8	basic	basic	ADJ
ap-1662	47	9	unit	unit	NOUN
ap-1662	47	10	for	for	ADP
ap-1662	47	11	the	the	DET
ap-1662	47	12	“	"	PUNCT
ap-1662	47	13	flexible	flexible	ADJ
ap-1662	47	14	intelligent	intelligent	ADJ
ap-1662	47	15	electrode	electrode	NOUN
ap-1662	47	16	”	"	PUNCT
ap-1662	47	17	.	.	PUNCT
ap-1662	48	1	during	during	ADP
ap-1662	48	2	the	the	DET
ap-1662	48	3	development	development	NOUN
ap-1662	48	4	phase	phase	NOUN
ap-1662	48	5	,	,	PUNCT
ap-1662	48	6	a	a	DET
ap-1662	48	7	dummy	dummy	ADJ
ap-1662	48	8	stimulator	stimulator	NOUN
ap-1662	48	9	chip	chip	NOUN
ap-1662	48	10	was	be	AUX
ap-1662	48	11	used	use	VERB
ap-1662	48	12	to	to	PART
ap-1662	48	13	optimize	optimize	VERB
ap-1662	48	14	integration	integration	NOUN
ap-1662	48	15	into	into	ADP
ap-1662	48	16	the	the	DET
ap-1662	48	17	polyimide	polyimide	NOUN
ap-1662	48	18	.	.	PUNCT
ap-1662	49	1	this	this	DET
ap-1662	49	2	silicon	silicon	NOUN
ap-1662	49	3	chip	chip	NOUN
ap-1662	49	4	has	have	VERB
ap-1662	49	5	aluminum	aluminum	NOUN
ap-1662	49	6	pads	pad	NOUN
ap-1662	49	7	on	on	ADP
ap-1662	49	8	top	top	ADJ
ap-1662	49	9	,	,	PUNCT
ap-1662	49	10	as	as	SCONJ
ap-1662	49	11	shown	show	VERB
ap-1662	49	12	in	in	ADP
ap-1662	49	13	fig	fig	NOUN
ap-1662	49	14	.	.	PUNCT
ap-1662	50	1	4	4	X
ap-1662	50	2	.	.	X
ap-1662	50	3	the	the	DET
ap-1662	50	4	pad	pad	NOUN
ap-1662	50	5	dimensions	dimension	NOUN
ap-1662	50	6	and	and	CCONJ
ap-1662	50	7	the	the	DET
ap-1662	50	8	spacings	spacing	NOUN
ap-1662	50	9	are	be	AUX
ap-1662	50	10	identical	identical	ADJ
ap-1662	50	11	to	to	ADP
ap-1662	50	12	those	those	PRON
ap-1662	50	13	of	of	ADP
ap-1662	50	14	the	the	DET
ap-1662	50	15	cmos	cmos	NOUN
ap-1662	50	16	-	-	PUNCT
ap-1662	50	17	chips	chip	NOUN
ap-1662	50	18	,	,	PUNCT
ap-1662	50	19	used	use	VERB
ap-1662	50	20	in	in	ADP
ap-1662	50	21	the	the	DET
ap-1662	50	22	epi	epi	NOUN
ap-1662	50	23	-	-	PUNCT
ap-1662	50	24	ret-3	ret-3	NOUN
ap-1662	50	25	implant	implant	NOUN
ap-1662	50	26	.	.	PUNCT
ap-1662	51	1	the	the	DET
ap-1662	51	2	5	5	NUM
ap-1662	51	3	pads	pad	NOUN
ap-1662	51	4	on	on	ADP
ap-1662	51	5	the	the	DET
ap-1662	51	6	left	left	ADJ
ap-1662	51	7	side	side	NOUN
ap-1662	51	8	are	be	AUX
ap-1662	51	9	used	use	VERB
ap-1662	51	10	for	for	ADP
ap-1662	51	11	controlling	control	VERB
ap-1662	51	12	the	the	DET
ap-1662	51	13	cmos	cmos	NOUN
ap-1662	51	14	-	-	PUNCT
ap-1662	51	15	chip	chip	NOUN
ap-1662	51	16	,	,	PUNCT
ap-1662	51	17	and	and	CCONJ
ap-1662	51	18	the	the	DET
ap-1662	51	19	25	25	NUM
ap-1662	51	20	pads	pad	NOUN
ap-1662	51	21	on	on	ADP
ap-1662	51	22	the	the	DET
ap-1662	51	23	right	right	ADJ
ap-1662	51	24	side	side	NOUN
ap-1662	51	25	are	be	AUX
ap-1662	51	26	intended	intend	VERB
ap-1662	51	27	for	for	ADP
ap-1662	51	28	driving	drive	VERB
ap-1662	51	29	the	the	DET
ap-1662	51	30	stimulation	stimulation	NOUN
ap-1662	51	31	electrodes	electrode	NOUN
ap-1662	51	32	.	.	PUNCT
ap-1662	52	1	figure	figure	VERB
ap-1662	52	2	4	4	NUM
ap-1662	52	3	:	:	PUNCT
ap-1662	52	4	dummy	dummy	ADJ
ap-1662	52	5	stimulator	stimulator	NOUN
ap-1662	52	6	chip	chip	NOUN
ap-1662	52	7	(	(	PUNCT
ap-1662	52	8	schematic	schematic	ADJ
ap-1662	52	9	)	)	PUNCT
ap-1662	52	10	.	.	PUNCT
ap-1662	53	1	figure	figure	VERB
ap-1662	53	2	5	5	NUM
ap-1662	53	3	:	:	PUNCT
ap-1662	53	4	polyimide	polyimide	ADJ
ap-1662	53	5	base	base	NOUN
ap-1662	53	6	structure	structure	NOUN
ap-1662	53	7	of	of	ADP
ap-1662	53	8	flex	flex	ADJ
ap-1662	53	9	-	-	PUNCT
ap-1662	53	10	mea	mea	NOUN
ap-1662	53	11	.	.	PROPN
ap-1662	53	12	2.2	2.2	NUM
ap-1662	53	13	fabrication	fabrication	NOUN
ap-1662	53	14	flex	flex	ADJ
ap-1662	53	15	-	-	PUNCT
ap-1662	53	16	mea	mea	NOUN
ap-1662	53	17	was	be	AUX
ap-1662	53	18	fabricated	fabricate	VERB
ap-1662	53	19	in	in	ADP
ap-1662	53	20	the	the	DET
ap-1662	53	21	institute	institute	NOUN
ap-1662	53	22	’s	’s	PART
ap-1662	53	23	own	own	ADJ
ap-1662	53	24	clean	clean	ADJ
ap-1662	53	25	room	room	NOUN
ap-1662	53	26	at	at	ADP
ap-1662	53	27	rwth	rwth	PROPN
ap-1662	53	28	aachen	aachen	PROPN
ap-1662	53	29	.	.	PUNCT
ap-1662	54	1	the	the	DET
ap-1662	54	2	first	first	ADJ
ap-1662	54	3	step	step	NOUN
ap-1662	54	4	was	be	AUX
ap-1662	54	5	to	to	PART
ap-1662	54	6	prepare	prepare	VERB
ap-1662	54	7	the	the	DET
ap-1662	54	8	polyimide	polyimide	ADJ
ap-1662	54	9	base	base	NOUN
ap-1662	54	10	structure	structure	NOUN
ap-1662	54	11	.	.	PUNCT
ap-1662	55	1	“	"	PUNCT
ap-1662	55	2	pi	pi	NOUN
ap-1662	55	3	2611	2611	NUM
ap-1662	55	4	”	"	PUNCT
ap-1662	55	5	liquid	liquid	ADJ
ap-1662	55	6	polyimide	polyimide	NOUN
ap-1662	55	7	from	from	ADP
ap-1662	55	8	hd	hd	NOUN
ap-1662	55	9	microsystems	microsystem	NOUN
ap-1662	55	10	was	be	AUX
ap-1662	55	11	applied	apply	VERB
ap-1662	55	12	to	to	ADP
ap-1662	55	13	an	an	DET
ap-1662	55	14	alu	alu	NOUN
ap-1662	55	15	-	-	PUNCT
ap-1662	55	16	sub	sub	NOUN
ap-1662	55	17	-	-	NOUN
ap-1662	55	18	wafer	wafer	NOUN
ap-1662	55	19	using	use	VERB
ap-1662	55	20	a	a	DET
ap-1662	55	21	spin	spin	NOUN
ap-1662	55	22	coater	coater	NOUN
ap-1662	55	23	.	.	PUNCT
ap-1662	56	1	the	the	DET
ap-1662	56	2	alu	alu	NOUN
ap-1662	56	3	-	-	PUNCT
ap-1662	56	4	sub	sub	NOUN
ap-1662	56	5	-	-	ADJ
ap-1662	56	6	wafer	wafer	NOUN
ap-1662	56	7	consists	consist	NOUN
ap-1662	56	8	of	of	ADP
ap-1662	56	9	a	a	DET
ap-1662	56	10	silicon	silicon	NOUN
ap-1662	56	11	wafer	wafer	NOUN
ap-1662	56	12	coated	coat	VERB
ap-1662	56	13	with	with	ADP
ap-1662	56	14	50	50	NUM
ap-1662	56	15	nm	nm	NOUN
ap-1662	56	16	titanium	titanium	NOUN
ap-1662	56	17	,	,	PUNCT
ap-1662	56	18	1	1	NUM
ap-1662	56	19	µm	µm	NOUN
ap-1662	56	20	aluminum	aluminum	NOUN
ap-1662	56	21	and	and	CCONJ
ap-1662	56	22	150	150	NUM
ap-1662	56	23	nm	nm	NOUN
ap-1662	56	24	titanium	titanium	NOUN
ap-1662	56	25	.	.	PUNCT
ap-1662	57	1	the	the	DET
ap-1662	57	2	first	first	ADJ
ap-1662	57	3	titanium	titanium	NOUN
ap-1662	57	4	coating	coating	NOUN
ap-1662	57	5	serves	serve	VERB
ap-1662	57	6	as	as	ADP
ap-1662	57	7	an	an	DET
ap-1662	57	8	adhesion	adhesion	NOUN
ap-1662	57	9	layer	layer	NOUN
ap-1662	57	10	for	for	ADP
ap-1662	57	11	the	the	DET
ap-1662	57	12	aluminum	aluminum	NOUN
ap-1662	57	13	.	.	PUNCT
ap-1662	58	1	the	the	DET
ap-1662	58	2	aluminum	aluminum	NOUN
ap-1662	58	3	itself	itself	PRON
ap-1662	58	4	serves	serve	VERB
ap-1662	58	5	as	as	ADP
ap-1662	58	6	a	a	DET
ap-1662	58	7	sacrificial	sacrificial	ADJ
ap-1662	58	8	layer	layer	NOUN
ap-1662	58	9	during	during	ADP
ap-1662	58	10	the	the	DET
ap-1662	58	11	separation	separation	NOUN
ap-1662	58	12	of	of	ADP
ap-1662	58	13	the	the	DET
ap-1662	58	14	final	final	ADJ
ap-1662	58	15	prepared	prepared	ADJ
ap-1662	58	16	polyimide	polyimide	NOUN
ap-1662	58	17	carrier	carrier	NOUN
ap-1662	58	18	from	from	ADP
ap-1662	58	19	the	the	DET
ap-1662	58	20	wafer	wafer	NOUN
ap-1662	58	21	.	.	PUNCT
ap-1662	59	1	the	the	DET
ap-1662	59	2	second	second	ADJ
ap-1662	59	3	titanium	titanium	NOUN
ap-1662	59	4	coating	coating	NOUN
ap-1662	59	5	protects	protect	VERB
ap-1662	59	6	the	the	DET
ap-1662	59	7	aluminum	aluminum	NOUN
ap-1662	59	8	from	from	ADP
ap-1662	59	9	unwanted	unwanted	ADJ
ap-1662	59	10	etching	etch	VERB
ap-1662	59	11	attacks	attack	NOUN
ap-1662	59	12	during	during	ADP
ap-1662	59	13	the	the	DET
ap-1662	59	14	processing	processing	NOUN
ap-1662	59	15	steps	step	NOUN
ap-1662	59	16	.	.	PUNCT
ap-1662	60	1	pi	pi	NOUN
ap-1662	60	2	2611	2611	NUM
ap-1662	60	3	has	have	VERB
ap-1662	60	4	excellent	excellent	ADJ
ap-1662	60	5	biocompatibility	biocompatibility	NOUN
ap-1662	60	6	and	and	CCONJ
ap-1662	60	7	biostability	biostability	NOUN
ap-1662	60	8	[	[	X
ap-1662	60	9	7	7	NUM
ap-1662	60	10	]	]	PUNCT
ap-1662	60	11	.	.	PUNCT
ap-1662	61	1	depending	depend	VERB
ap-1662	61	2	on	on	ADP
ap-1662	61	3	the	the	DET
ap-1662	61	4	number	number	NOUN
ap-1662	61	5	of	of	ADP
ap-1662	61	6	revolutions	revolution	NOUN
ap-1662	61	7	(	(	PUNCT
ap-1662	61	8	rpm	rpm	PROPN
ap-1662	61	9	)	)	PUNCT
ap-1662	61	10	of	of	ADP
ap-1662	61	11	the	the	DET
ap-1662	61	12	spin	spin	NOUN
ap-1662	61	13	coater	coater	NOUN
ap-1662	61	14	,	,	PUNCT
ap-1662	61	15	various	various	ADJ
ap-1662	61	16	layer	layer	NOUN
ap-1662	61	17	thicknesses	thickness	NOUN
ap-1662	61	18	between	between	ADP
ap-1662	61	19	1	1	NUM
ap-1662	61	20	µm	µm	NOUN
ap-1662	61	21	and	and	CCONJ
ap-1662	61	22	11	11	NUM
ap-1662	61	23	µm	µm	NOUN
ap-1662	61	24	can	can	AUX
ap-1662	61	25	be	be	AUX
ap-1662	61	26	produced	produce	VERB
ap-1662	61	27	.	.	PUNCT
ap-1662	62	1	a	a	DET
ap-1662	62	2	layer	layer	NOUN
ap-1662	62	3	thickness	thickness	NOUN
ap-1662	62	4	of	of	ADP
ap-1662	62	5	5	5	NUM
ap-1662	62	6	µm	µm	NOUN
ap-1662	62	7	was	be	AUX
ap-1662	62	8	used	use	VERB
ap-1662	62	9	for	for	ADP
ap-1662	62	10	the	the	DET
ap-1662	62	11	base	base	NOUN
ap-1662	62	12	structure	structure	NOUN
ap-1662	62	13	of	of	ADP
ap-1662	62	14	flex	flex	ADJ
ap-1662	62	15	-	-	PUNCT
ap-1662	62	16	mea	mea	NOUN
ap-1662	62	17	.	.	PROPN
ap-1662	63	1	after	after	ADP
ap-1662	63	2	photolithographic	photolithographic	ADJ
ap-1662	63	3	and	and	CCONJ
ap-1662	63	4	wet	wet	ADJ
ap-1662	63	5	chemical	chemical	NOUN
ap-1662	63	6	patterning	patterning	NOUN
ap-1662	63	7	,	,	PUNCT
ap-1662	63	8	structures	structure	NOUN
ap-1662	63	9	with	with	ADP
ap-1662	63	10	dimensions	dimension	NOUN
ap-1662	63	11	of	of	ADP
ap-1662	63	12	7000×7000×5	7000×7000×5	PROPN
ap-1662	63	13	µm	µm	NUM
ap-1662	63	14	were	be	AUX
ap-1662	63	15	created	create	VERB
ap-1662	63	16	(	(	PUNCT
ap-1662	63	17	fig	fig	NOUN
ap-1662	63	18	.	.	PUNCT
ap-1662	64	1	5	5	NUM
ap-1662	64	2	)	)	PUNCT
ap-1662	64	3	.	.	PUNCT
ap-1662	65	1	next	next	ADV
ap-1662	65	2	,	,	PUNCT
ap-1662	65	3	the	the	DET
ap-1662	65	4	polyimide	polyimide	ADJ
ap-1662	65	5	base	base	NOUN
ap-1662	65	6	structure	structure	NOUN
ap-1662	65	7	(	(	PUNCT
ap-1662	65	8	1	1	X
ap-1662	65	9	.	.	PUNCT
ap-1662	65	10	pi	pi	NOUN
ap-1662	65	11	)	)	PUNCT
ap-1662	65	12	had	have	VERB
ap-1662	65	13	to	to	PART
ap-1662	65	14	be	be	AUX
ap-1662	65	15	cured	cure	VERB
ap-1662	65	16	entirely	entirely	ADV
ap-1662	65	17	.	.	PUNCT
ap-1662	66	1	this	this	PRON
ap-1662	66	2	is	be	AUX
ap-1662	66	3	done	do	VERB
ap-1662	66	4	in	in	ADP
ap-1662	66	5	an	an	DET
ap-1662	66	6	oven	oven	NOUN
ap-1662	66	7	at	at	ADP
ap-1662	66	8	temperatures	temperature	NOUN
ap-1662	66	9	around	around	ADP
ap-1662	66	10	350	350	NUM
ap-1662	66	11	°	°	NOUN
ap-1662	66	12	c	c	NOUN
ap-1662	66	13	to	to	ADP
ap-1662	66	14	400	400	NUM
ap-1662	66	15	°	°	NOUN
ap-1662	66	16	c	c	NOUN
ap-1662	66	17	under	under	ADP
ap-1662	66	18	a	a	DET
ap-1662	66	19	nitrogen	nitrogen	NOUN
ap-1662	66	20	atmosphere	atmosphere	NOUN
ap-1662	66	21	.	.	PUNCT
ap-1662	67	1	after	after	ADP
ap-1662	67	2	this	this	DET
ap-1662	67	3	treatment	treatment	NOUN
ap-1662	67	4	,	,	PUNCT
ap-1662	67	5	the	the	DET
ap-1662	67	6	pi	pi	NOUN
ap-1662	67	7	is	be	AUX
ap-1662	67	8	resistant	resistant	ADJ
ap-1662	67	9	to	to	ADP
ap-1662	67	10	most	most	ADJ
ap-1662	67	11	solvents	solvent	NOUN
ap-1662	67	12	,	,	PUNCT
ap-1662	67	13	acids	acid	NOUN
ap-1662	67	14	and	and	CCONJ
ap-1662	67	15	bases	basis	NOUN
ap-1662	67	16	.	.	PUNCT
ap-1662	68	1	as	as	SCONJ
ap-1662	68	2	has	have	AUX
ap-1662	68	3	already	already	ADV
ap-1662	68	4	been	be	AUX
ap-1662	68	5	described	describe	VERB
ap-1662	68	6	,	,	PUNCT
ap-1662	68	7	just	just	ADV
ap-1662	68	8	polyimide	polyimide	ADJ
ap-1662	68	9	layers	layer	NOUN
ap-1662	68	10	between	between	ADP
ap-1662	68	11	1	1	NUM
ap-1662	68	12	µm	µm	NOUN
ap-1662	68	13	and	and	CCONJ
ap-1662	68	14	11	11	NUM
ap-1662	68	15	µm	µm	NOUN
ap-1662	68	16	in	in	ADP
ap-1662	68	17	thickness	thickness	NOUN
ap-1662	68	18	can	can	AUX
ap-1662	68	19	be	be	AUX
ap-1662	68	20	prepared	prepare	VERB
ap-1662	68	21	.	.	PUNCT
ap-1662	69	1	greater	great	ADJ
ap-1662	69	2	thicknesses	thickness	NOUN
ap-1662	69	3	of	of	ADP
ap-1662	69	4	the	the	DET
ap-1662	69	5	polyimide	polyimide	ADJ
ap-1662	69	6	layer	layer	NOUN
ap-1662	69	7	can	can	AUX
ap-1662	69	8	be	be	AUX
ap-1662	69	9	formed	form	VERB
ap-1662	69	10	by	by	ADP
ap-1662	69	11	alternating	alternate	VERB
ap-1662	69	12	coating	coating	NOUN
ap-1662	69	13	and	and	CCONJ
ap-1662	69	14	bake	bake	NOUN
ap-1662	69	15	-	-	PUNCT
ap-1662	69	16	out	out	ADP
ap-1662	69	17	steps	step	NOUN
ap-1662	69	18	.	.	PUNCT
ap-1662	70	1	based	base	VERB
ap-1662	70	2	on	on	ADP
ap-1662	70	3	this	this	DET
ap-1662	70	4	approach	approach	NOUN
ap-1662	70	5	,	,	PUNCT
ap-1662	70	6	iwe1	iwe1	PROPN
ap-1662	70	7	developed	develop	VERB
ap-1662	70	8	a	a	DET
ap-1662	70	9	25µm	25µm	ADJ
ap-1662	70	10	–	–	PUNCT
ap-1662	70	11	process	process	NOUN
ap-1662	70	12	,	,	PUNCT
ap-1662	70	13	which	which	PRON
ap-1662	70	14	was	be	AUX
ap-1662	70	15	applied	apply	VERB
ap-1662	70	16	here	here	ADV
ap-1662	70	17	.	.	PUNCT
ap-1662	71	1	in	in	ADP
ap-1662	71	2	the	the	DET
ap-1662	71	3	following	following	ADJ
ap-1662	71	4	step	step	NOUN
ap-1662	71	5	,	,	PUNCT
ap-1662	71	6	the	the	DET
ap-1662	71	7	20	20	NUM
ap-1662	71	8	µm	µm	NOUN
ap-1662	71	9	thinned	thin	VERB
ap-1662	71	10	dummy	dummy	ADJ
ap-1662	71	11	stimulator	stimulator	NOUN
ap-1662	71	12	chip	chip	NOUN
ap-1662	71	13	had	have	VERB
ap-1662	71	14	to	to	PART
ap-1662	71	15	be	be	AUX
ap-1662	71	16	embedded	embed	VERB
ap-1662	71	17	into	into	ADP
ap-1662	71	18	the	the	DET
ap-1662	71	19	polyimide	polyimide	NOUN
ap-1662	71	20	.	.	PUNCT
ap-1662	72	1	after	after	SCONJ
ap-1662	72	2	photolithographic	photolithographic	ADJ
ap-1662	72	3	and	and	CCONJ
ap-1662	72	4	wet	wet	ADJ
ap-1662	72	5	chemical	chemical	NOUN
ap-1662	72	6	patterning	patterning	NOUN
ap-1662	72	7	,	,	PUNCT
ap-1662	72	8	a	a	DET
ap-1662	72	9	trench	trench	NOUN
ap-1662	72	10	of	of	ADP
ap-1662	72	11	about	about	ADV
ap-1662	72	12	2790×2170	2790×2170	NUM
ap-1662	72	13	µm	µm	NOUN
ap-1662	72	14	was	be	AUX
ap-1662	72	15	created	create	VERB
ap-1662	72	16	126	126	NUM
ap-1662	72	17	acta	acta	PROPN
ap-1662	72	18	polytechnica	polytechnica	PROPN
ap-1662	72	19	vol	vol	NOUN
ap-1662	72	20	.	.	PUNCT
ap-1662	73	1	52	52	NUM
ap-1662	73	2	no	no	NOUN
ap-1662	73	3	.	.	PUNCT
ap-1662	74	1	5/2012	5/2012	NUM
ap-1662	74	2	figure	figure	NOUN
ap-1662	74	3	6	6	NUM
ap-1662	74	4	:	:	PUNCT
ap-1662	74	5	generating	generate	VERB
ap-1662	74	6	a	a	DET
ap-1662	74	7	polyimide	polyimide	ADJ
ap-1662	74	8	trench	trench	NOUN
ap-1662	74	9	.	.	PUNCT
ap-1662	75	1	figure	figure	VERB
ap-1662	75	2	7	7	NUM
ap-1662	75	3	:	:	PUNCT
ap-1662	75	4	setting	set	VERB
ap-1662	75	5	a	a	DET
ap-1662	75	6	polyimide	polyimide	ADJ
ap-1662	75	7	drop	drop	NOUN
ap-1662	75	8	for	for	ADP
ap-1662	75	9	fixing	fix	VERB
ap-1662	75	10	the	the	DET
ap-1662	75	11	chip	chip	NOUN
ap-1662	75	12	.	.	PUNCT
ap-1662	76	1	figure	figure	NOUN
ap-1662	76	2	8	8	NUM
ap-1662	76	3	:	:	PUNCT
ap-1662	76	4	gluing	glue	VERB
ap-1662	76	5	the	the	DET
ap-1662	76	6	dummy	dummy	ADJ
ap-1662	76	7	stimulator	stimulator	NOUN
ap-1662	76	8	chip	chip	NOUN
ap-1662	76	9	into	into	ADP
ap-1662	76	10	the	the	DET
ap-1662	76	11	polyimide	polyimide	NOUN
ap-1662	76	12	.	.	PUNCT
ap-1662	77	1	on	on	ADP
ap-1662	77	2	the	the	DET
ap-1662	77	3	thick	thick	ADJ
ap-1662	77	4	polyimide	polyimide	NOUN
ap-1662	77	5	layer	layer	NOUN
ap-1662	77	6	(	(	PUNCT
ap-1662	77	7	see	see	VERB
ap-1662	77	8	fig	fig	NOUN
ap-1662	77	9	.	.	PUNCT
ap-1662	78	1	6	6	NUM
ap-1662	78	2	)	)	PUNCT
ap-1662	78	3	.	.	PUNCT
ap-1662	79	1	to	to	AUX
ap-1662	79	2	glue	glue	VERB
ap-1662	79	3	and	and	CCONJ
ap-1662	79	4	fix	fix	VERB
ap-1662	79	5	the	the	DET
ap-1662	79	6	chip	chip	NOUN
ap-1662	79	7	,	,	PUNCT
ap-1662	79	8	a	a	DET
ap-1662	79	9	drop	drop	NOUN
ap-1662	79	10	of	of	ADP
ap-1662	79	11	liquid	liquid	ADJ
ap-1662	79	12	polyimide	polyimide	NOUN
ap-1662	79	13	was	be	AUX
ap-1662	79	14	given	give	VERB
ap-1662	79	15	into	into	ADP
ap-1662	79	16	the	the	DET
ap-1662	79	17	trench	trench	NOUN
ap-1662	79	18	using	use	VERB
ap-1662	79	19	a	a	DET
ap-1662	79	20	swab	swab	NOUN
ap-1662	79	21	(	(	PUNCT
ap-1662	79	22	fig	fig	NOUN
ap-1662	79	23	.	.	PUNCT
ap-1662	80	1	7	7	NUM
ap-1662	80	2	)	)	PUNCT
ap-1662	80	3	.	.	PUNCT
ap-1662	81	1	in	in	ADP
ap-1662	81	2	the	the	DET
ap-1662	81	3	subsequent	subsequent	ADJ
ap-1662	81	4	step	step	NOUN
ap-1662	81	5	,	,	PUNCT
ap-1662	81	6	the	the	DET
ap-1662	81	7	chip	chip	NOUN
ap-1662	81	8	was	be	AUX
ap-1662	81	9	placed	place	VERB
ap-1662	81	10	into	into	ADP
ap-1662	81	11	the	the	DET
ap-1662	81	12	trench	trench	NOUN
ap-1662	81	13	,	,	PUNCT
ap-1662	81	14	centered	center	VERB
ap-1662	81	15	and	and	CCONJ
ap-1662	81	16	fixed	fix	VERB
ap-1662	81	17	,	,	PUNCT
ap-1662	81	18	using	use	VERB
ap-1662	81	19	tweezers	tweezer	NOUN
ap-1662	81	20	.	.	PUNCT
ap-1662	82	1	the	the	DET
ap-1662	82	2	glued	glue	VERB
ap-1662	82	3	chip	chip	NOUN
ap-1662	82	4	is	be	AUX
ap-1662	82	5	shown	show	VERB
ap-1662	82	6	in	in	ADP
ap-1662	82	7	fig	fig	NOUN
ap-1662	82	8	.	.	PUNCT
ap-1662	83	1	8	8	X
ap-1662	83	2	.	.	PUNCT
ap-1662	84	1	the	the	DET
ap-1662	84	2	dummy	dummy	ADJ
ap-1662	84	3	stimulator	stimulator	NOUN
ap-1662	84	4	chip	chip	NOUN
ap-1662	84	5	protruded	protrude	VERB
ap-1662	84	6	slightly	slightly	ADV
ap-1662	84	7	from	from	ADP
ap-1662	84	8	the	the	DET
ap-1662	84	9	trench	trench	NOUN
ap-1662	84	10	.	.	PUNCT
ap-1662	85	1	to	to	PART
ap-1662	85	2	integrate	integrate	VERB
ap-1662	85	3	the	the	DET
ap-1662	85	4	chip	chip	NOUN
ap-1662	85	5	entirely	entirely	ADV
ap-1662	85	6	,	,	PUNCT
ap-1662	85	7	an	an	DET
ap-1662	85	8	additional	additional	ADJ
ap-1662	85	9	layer	layer	NOUN
ap-1662	85	10	of	of	ADP
ap-1662	85	11	7	7	NUM
ap-1662	85	12	µm	µm	NOUN
ap-1662	85	13	polyimide	polyimide	NOUN
ap-1662	85	14	was	be	AUX
ap-1662	85	15	deposited	deposit	VERB
ap-1662	85	16	,	,	PUNCT
ap-1662	85	17	as	as	SCONJ
ap-1662	85	18	shown	show	VERB
ap-1662	85	19	in	in	ADP
ap-1662	85	20	fig	fig	NOUN
ap-1662	85	21	.	.	PUNCT
ap-1662	86	1	9	9	X
ap-1662	86	2	.	.	X
ap-1662	86	3	then	then	ADV
ap-1662	86	4	,	,	PUNCT
ap-1662	86	5	clearance	clearance	NOUN
ap-1662	86	6	holes	hole	NOUN
ap-1662	86	7	were	be	AUX
ap-1662	86	8	processed	process	VERB
ap-1662	86	9	for	for	ADP
ap-1662	86	10	the	the	DET
ap-1662	86	11	aluminum	aluminum	NOUN
ap-1662	86	12	pads	pad	NOUN
ap-1662	86	13	.	.	PUNCT
ap-1662	87	1	30	30	NUM
ap-1662	87	2	nm	nm	NOUN
ap-1662	87	3	chromium	chromium	NOUN
ap-1662	87	4	and	and	CCONJ
ap-1662	87	5	100	100	NUM
ap-1662	87	6	nm	nm	ADJ
ap-1662	87	7	gold	gold	NOUN
ap-1662	87	8	were	be	AUX
ap-1662	87	9	evaporated	evaporate	VERB
ap-1662	87	10	onto	onto	ADP
ap-1662	87	11	the	the	DET
ap-1662	87	12	whole	whole	ADJ
ap-1662	87	13	area	area	NOUN
ap-1662	87	14	as	as	ADP
ap-1662	87	15	a	a	DET
ap-1662	87	16	plating	plating	NOUN
ap-1662	87	17	base	base	NOUN
ap-1662	87	18	.	.	PUNCT
ap-1662	88	1	next	next	ADV
ap-1662	88	2	,	,	PUNCT
ap-1662	88	3	a	a	DET
ap-1662	88	4	resist	resist	NOUN
ap-1662	88	5	mask	mask	NOUN
ap-1662	88	6	was	be	AUX
ap-1662	88	7	applied	apply	VERB
ap-1662	88	8	and	and	CCONJ
ap-1662	88	9	8	8	NUM
ap-1662	88	10	µm	µm	NOUN
ap-1662	88	11	figure	figure	NOUN
ap-1662	88	12	9	9	NUM
ap-1662	88	13	:	:	PUNCT
ap-1662	88	14	embedding	embed	VERB
ap-1662	88	15	the	the	DET
ap-1662	88	16	dummy	dummy	ADJ
ap-1662	88	17	stimulator	stimulator	NOUN
ap-1662	88	18	chip	chip	NOUN
ap-1662	88	19	into	into	ADP
ap-1662	88	20	the	the	DET
ap-1662	88	21	polyimide	polyimide	NOUN
ap-1662	88	22	.	.	PUNCT
ap-1662	89	1	figure	figure	NOUN
ap-1662	89	2	10	10	NUM
ap-1662	89	3	:	:	PUNCT
ap-1662	89	4	contacting	contact	VERB
ap-1662	89	5	the	the	DET
ap-1662	89	6	dummy	dummy	ADJ
ap-1662	89	7	stimulator	stimulator	NOUN
ap-1662	89	8	chip	chip	NOUN
ap-1662	89	9	to	to	ADP
ap-1662	89	10	the	the	DET
ap-1662	89	11	gold	gold	NOUN
ap-1662	89	12	surfaces	surface	NOUN
ap-1662	89	13	of	of	ADP
ap-1662	89	14	the	the	DET
ap-1662	89	15	electrodes	electrode	NOUN
ap-1662	89	16	.	.	PUNCT
ap-1662	90	1	gold	gold	NOUN
ap-1662	90	2	was	be	AUX
ap-1662	90	3	electroplated	electroplate	VERB
ap-1662	90	4	.	.	PUNCT
ap-1662	91	1	the	the	DET
ap-1662	91	2	resist	resist	NOUN
ap-1662	91	3	mask	mask	NOUN
ap-1662	91	4	was	be	AUX
ap-1662	91	5	removed	remove	VERB
ap-1662	91	6	with	with	ADP
ap-1662	91	7	acetone	acetone	NOUN
ap-1662	91	8	,	,	PUNCT
ap-1662	91	9	and	and	CCONJ
ap-1662	91	10	the	the	DET
ap-1662	91	11	plating	plating	NOUN
ap-1662	91	12	base	base	NOUN
ap-1662	91	13	was	be	AUX
ap-1662	91	14	etched	etch	VERB
ap-1662	91	15	wet	wet	ADJ
ap-1662	91	16	chemically	chemically	ADV
ap-1662	91	17	.	.	PUNCT
ap-1662	92	1	the	the	DET
ap-1662	92	2	gold	gold	NOUN
ap-1662	92	3	pads	pad	NOUN
ap-1662	92	4	and	and	CCONJ
ap-1662	92	5	the	the	DET
ap-1662	92	6	gold	gold	NOUN
ap-1662	92	7	surfaces	surface	NOUN
ap-1662	92	8	of	of	ADP
ap-1662	92	9	the	the	DET
ap-1662	92	10	electrodes	electrode	NOUN
ap-1662	92	11	finally	finally	ADV
ap-1662	92	12	remained	remain	VERB
ap-1662	92	13	as	as	SCONJ
ap-1662	92	14	shown	show	VERB
ap-1662	92	15	in	in	ADP
ap-1662	92	16	fig	fig	NOUN
ap-1662	92	17	.	.	PUNCT
ap-1662	93	1	10	10	NUM
ap-1662	93	2	.	.	PUNCT
ap-1662	94	1	the	the	DET
ap-1662	94	2	gold	gold	NOUN
ap-1662	94	3	surfaces	surface	NOUN
ap-1662	94	4	were	be	AUX
ap-1662	94	5	then	then	ADV
ap-1662	94	6	coated	coat	VERB
ap-1662	94	7	with	with	ADP
ap-1662	94	8	the	the	DET
ap-1662	94	9	electrode	electrode	NOUN
ap-1662	94	10	material	material	NOUN
ap-1662	94	11	,	,	PUNCT
ap-1662	94	12	here	here	ADV
ap-1662	94	13	iridium	iridium	NOUN
ap-1662	94	14	oxide	oxide	NOUN
ap-1662	94	15	(	(	PUNCT
ap-1662	94	16	irox	irox	PROPN
ap-1662	94	17	)	)	PUNCT
ap-1662	94	18	,	,	PUNCT
ap-1662	94	19	which	which	PRON
ap-1662	94	20	is	be	AUX
ap-1662	94	21	biocompatible	biocompatible	ADJ
ap-1662	94	22	and	and	CCONJ
ap-1662	94	23	biostable	biostable	ADJ
ap-1662	94	24	[	[	X
ap-1662	94	25	4	4	NUM
ap-1662	94	26	]	]	PUNCT
ap-1662	94	27	.	.	PUNCT
ap-1662	95	1	it	it	PRON
ap-1662	95	2	is	be	AUX
ap-1662	95	3	used	use	VERB
ap-1662	95	4	worldwide	worldwide	ADV
ap-1662	95	5	by	by	ADP
ap-1662	95	6	many	many	ADJ
ap-1662	95	7	research	research	NOUN
ap-1662	95	8	groups	group	NOUN
ap-1662	95	9	,	,	PUNCT
ap-1662	95	10	since	since	SCONJ
ap-1662	95	11	it	it	PRON
ap-1662	95	12	is	be	AUX
ap-1662	95	13	adequate	adequate	ADJ
ap-1662	95	14	for	for	ADP
ap-1662	95	15	stimulating	stimulate	VERB
ap-1662	95	16	neurons	neuron	NOUN
ap-1662	95	17	with	with	ADP
ap-1662	95	18	a	a	DET
ap-1662	95	19	charge	charge	NOUN
ap-1662	95	20	-	-	PUNCT
ap-1662	95	21	transfer	transfer	NOUN
ap-1662	95	22	-	-	PUNCT
ap-1662	95	23	capacity	capacity	NOUN
ap-1662	95	24	of	of	ADP
ap-1662	95	25	up	up	ADP
ap-1662	95	26	to	to	PART
ap-1662	95	27	95	95	NUM
ap-1662	95	28	mc	mc	PROPN
ap-1662	95	29	/	/	SYM
ap-1662	95	30	cm2	cm2	PROPN
ap-1662	95	31	after	after	ADP
ap-1662	95	32	electrochemical	electrochemical	ADJ
ap-1662	95	33	activation	activation	NOUN
ap-1662	95	34	[	[	X
ap-1662	95	35	5	5	NUM
ap-1662	95	36	]	]	PUNCT
ap-1662	95	37	.	.	PUNCT
ap-1662	96	1	iridium	iridium	NOUN
ap-1662	96	2	oxide	oxide	NOUN
ap-1662	96	3	is	be	AUX
ap-1662	96	4	a	a	DET
ap-1662	96	5	highly	highly	ADV
ap-1662	96	6	porous	porous	ADJ
ap-1662	96	7	material	material	NOUN
ap-1662	96	8	.	.	PUNCT
ap-1662	97	1	to	to	PART
ap-1662	97	2	block	block	VERB
ap-1662	97	3	corrosion	corrosion	NOUN
ap-1662	97	4	of	of	ADP
ap-1662	97	5	the	the	DET
ap-1662	97	6	gold	gold	NOUN
ap-1662	97	7	surfaces	surface	NOUN
ap-1662	97	8	,	,	PUNCT
ap-1662	97	9	platinum	platinum	NOUN
ap-1662	97	10	(	(	PUNCT
ap-1662	97	11	pt	pt	NOUN
ap-1662	97	12	)	)	PUNCT
ap-1662	97	13	was	be	AUX
ap-1662	97	14	used	use	VERB
ap-1662	97	15	as	as	ADP
ap-1662	97	16	an	an	DET
ap-1662	97	17	intermediate	intermediate	ADJ
ap-1662	97	18	layer	layer	NOUN
ap-1662	97	19	.	.	PUNCT
ap-1662	98	1	deposition	deposition	NOUN
ap-1662	98	2	of	of	ADP
ap-1662	98	3	150	150	NUM
ap-1662	98	4	nm	nm	NOUN
ap-1662	98	5	platinum	platinum	NOUN
ap-1662	98	6	and	and	CCONJ
ap-1662	98	7	500	500	NUM
ap-1662	98	8	nm	nm	NOUN
ap-1662	98	9	iridium	iridium	NOUN
ap-1662	98	10	oxide	oxide	NOUN
ap-1662	98	11	is	be	AUX
ap-1662	98	12	a	a	DET
ap-1662	98	13	proven	prove	VERB
ap-1662	98	14	standard	standard	ADJ
ap-1662	98	15	process	process	NOUN
ap-1662	98	16	,	,	PUNCT
ap-1662	98	17	and	and	CCONJ
ap-1662	98	18	was	be	AUX
ap-1662	98	19	performed	perform	VERB
ap-1662	98	20	in	in	ADP
ap-1662	98	21	a	a	DET
ap-1662	98	22	sputtering	sputtering	ADJ
ap-1662	98	23	system	system	NOUN
ap-1662	98	24	.	.	PUNCT
ap-1662	99	1	for	for	ADP
ap-1662	99	2	subsequent	subsequent	ADJ
ap-1662	99	3	deposition	deposition	NOUN
ap-1662	99	4	and	and	CCONJ
ap-1662	99	5	patterning	patterning	NOUN
ap-1662	99	6	of	of	ADP
ap-1662	99	7	the	the	DET
ap-1662	99	8	iridium	iridium	NOUN
ap-1662	99	9	oxide	oxide	NOUN
ap-1662	99	10	electrodes	electrode	NOUN
ap-1662	99	11	,	,	PUNCT
ap-1662	99	12	the	the	DET
ap-1662	99	13	structures	structure	NOUN
ap-1662	99	14	were	be	AUX
ap-1662	99	15	protected	protect	VERB
ap-1662	99	16	by	by	ADP
ap-1662	99	17	a	a	DET
ap-1662	99	18	negative	negative	ADJ
ap-1662	99	19	mask	mask	NOUN
ap-1662	99	20	while	while	SCONJ
ap-1662	99	21	the	the	DET
ap-1662	99	22	excess	excess	ADJ
ap-1662	99	23	material	material	NOUN
ap-1662	99	24	was	be	AUX
ap-1662	99	25	removed	remove	VERB
ap-1662	99	26	using	use	VERB
ap-1662	99	27	the	the	DET
ap-1662	99	28	lift	lift	NOUN
ap-1662	99	29	-	-	PUNCT
ap-1662	99	30	off	off	ADP
ap-1662	99	31	method	method	NOUN
ap-1662	99	32	.	.	PUNCT
ap-1662	100	1	the	the	DET
ap-1662	100	2	resist	resist	NOUN
ap-1662	100	3	mask	mask	NOUN
ap-1662	100	4	was	be	AUX
ap-1662	100	5	subsequently	subsequently	ADV
ap-1662	100	6	removed	remove	VERB
ap-1662	100	7	with	with	ADP
ap-1662	100	8	hot	hot	ADJ
ap-1662	100	9	n	n	CCONJ
ap-1662	100	10	-	-	PUNCT
ap-1662	100	11	methyl-2	methyl-2	NOUN
ap-1662	100	12	-	-	PUNCT
ap-1662	100	13	pyrrolidon	pyrrolidon	VERB
ap-1662	100	14	.	.	PUNCT
ap-1662	101	1	after	after	ADP
ap-1662	101	2	successful	successful	ADJ
ap-1662	101	3	structuring	structuring	NOUN
ap-1662	101	4	,	,	PUNCT
ap-1662	101	5	flex	flex	ADJ
ap-1662	101	6	-	-	PUNCT
ap-1662	101	7	mea	mea	NOUN
ap-1662	101	8	looks	look	NOUN
ap-1662	101	9	like	like	ADP
ap-1662	101	10	in	in	ADP
ap-1662	101	11	fig	fig	NOUN
ap-1662	101	12	.	.	PUNCT
ap-1662	102	1	11	11	NUM
ap-1662	102	2	.	.	PUNCT
ap-1662	103	1	then	then	ADV
ap-1662	103	2	,	,	PUNCT
ap-1662	103	3	parylene	parylene	PROPN
ap-1662	103	4	c	c	PROPN
ap-1662	103	5	(	(	PUNCT
ap-1662	103	6	pa	pa	PROPN
ap-1662	103	7	)	)	PUNCT
ap-1662	103	8	was	be	AUX
ap-1662	103	9	used	use	VERB
ap-1662	103	10	for	for	ADP
ap-1662	103	11	electrical	electrical	ADJ
ap-1662	103	12	isolation	isolation	NOUN
ap-1662	103	13	and	and	CCONJ
ap-1662	103	14	for	for	ADP
ap-1662	103	15	generating	generate	VERB
ap-1662	103	16	well	well	ADV
ap-1662	103	17	-	-	PUNCT
ap-1662	103	18	defined	define	VERB
ap-1662	103	19	electrode	electrode	NOUN
ap-1662	103	20	openings	opening	NOUN
ap-1662	103	21	of	of	ADP
ap-1662	103	22	100	100	NUM
ap-1662	103	23	µm	µm	NOUN
ap-1662	103	24	in	in	ADP
ap-1662	103	25	diameter	diameter	NOUN
ap-1662	103	26	(	(	PUNCT
ap-1662	103	27	fig	fig	NOUN
ap-1662	103	28	.	.	PUNCT
ap-1662	104	1	12	12	NUM
ap-1662	104	2	)	)	PUNCT
ap-1662	104	3	.	.	PUNCT
ap-1662	105	1	it	it	PRON
ap-1662	105	2	was	be	AUX
ap-1662	105	3	separated	separate	VERB
ap-1662	105	4	127	127	NUM
ap-1662	105	5	acta	acta	PROPN
ap-1662	105	6	polytechnica	polytechnica	PROPN
ap-1662	105	7	vol	vol	NOUN
ap-1662	105	8	.	.	PUNCT
ap-1662	106	1	52	52	NUM
ap-1662	106	2	no	no	NOUN
ap-1662	106	3	.	.	PUNCT
ap-1662	107	1	5/2012	5/2012	NUM
ap-1662	107	2	figure	figure	NOUN
ap-1662	107	3	11	11	NUM
ap-1662	107	4	:	:	PUNCT
ap-1662	107	5	flex	flex	ADJ
ap-1662	107	6	-	-	PUNCT
ap-1662	107	7	mea	mea	NOUN
ap-1662	107	8	with	with	ADP
ap-1662	107	9	iridium	iridium	NOUN
ap-1662	107	10	oxide	oxide	NOUN
ap-1662	107	11	electrodes	electrode	NOUN
ap-1662	107	12	.	.	PUNCT
ap-1662	108	1	figure	figure	NOUN
ap-1662	108	2	12	12	NUM
ap-1662	108	3	:	:	PUNCT
ap-1662	108	4	flex	flex	ADJ
ap-1662	108	5	-	-	PUNCT
ap-1662	108	6	mea	mea	NOUN
ap-1662	108	7	(	(	PUNCT
ap-1662	108	8	schematic	schematic	ADJ
ap-1662	108	9	)	)	PUNCT
ap-1662	108	10	.	.	PUNCT
ap-1662	109	1	from	from	ADP
ap-1662	109	2	the	the	DET
ap-1662	109	3	gas	gas	NOUN
ap-1662	109	4	phase	phase	NOUN
ap-1662	109	5	in	in	ADP
ap-1662	109	6	a	a	DET
ap-1662	109	7	3.5µm	3.5µm	NUM
ap-1662	109	8	-	-	PUNCT
ap-1662	109	9	process	process	NOUN
ap-1662	109	10	,	,	PUNCT
ap-1662	109	11	and	and	CCONJ
ap-1662	109	12	can	can	AUX
ap-1662	109	13	be	be	AUX
ap-1662	109	14	dry	dry	ADJ
ap-1662	109	15	etched	etch	VERB
ap-1662	109	16	afterwards	afterwards	ADV
ap-1662	109	17	.	.	PUNCT
ap-1662	110	1	parylene	parylene	NOUN
ap-1662	110	2	c	c	PROPN
ap-1662	110	3	is	be	AUX
ap-1662	110	4	widely	widely	ADV
ap-1662	110	5	used	use	VERB
ap-1662	110	6	as	as	ADP
ap-1662	110	7	coating	coat	VERB
ap-1662	110	8	material	material	NOUN
ap-1662	110	9	for	for	ADP
ap-1662	110	10	medical	medical	ADJ
ap-1662	110	11	applications	application	NOUN
ap-1662	110	12	[	[	X
ap-1662	110	13	6	6	NUM
ap-1662	110	14	]	]	PUNCT
ap-1662	110	15	.	.	PUNCT
ap-1662	111	1	next	next	ADV
ap-1662	111	2	,	,	PUNCT
ap-1662	111	3	the	the	DET
ap-1662	111	4	structure	structure	NOUN
ap-1662	111	5	was	be	AUX
ap-1662	111	6	separated	separate	VERB
ap-1662	111	7	from	from	ADP
ap-1662	111	8	the	the	DET
ap-1662	111	9	alu	alu	NOUN
ap-1662	111	10	-	-	NOUN
ap-1662	111	11	subwafer	subwafer	NOUN
ap-1662	111	12	.	.	PUNCT
ap-1662	112	1	first	first	ADV
ap-1662	112	2	,	,	PUNCT
ap-1662	112	3	150	150	NUM
ap-1662	112	4	nm	nm	NOUN
ap-1662	112	5	titanium	titanium	NOUN
ap-1662	112	6	was	be	AUX
ap-1662	112	7	etched	etch	VERB
ap-1662	112	8	between	between	ADP
ap-1662	112	9	the	the	DET
ap-1662	112	10	individual	individual	ADJ
ap-1662	112	11	structures	structure	NOUN
ap-1662	112	12	.	.	PUNCT
ap-1662	113	1	then	then	ADV
ap-1662	113	2	the	the	DET
ap-1662	113	3	entire	entire	ADJ
ap-1662	113	4	sacrificial	sacrificial	ADJ
ap-1662	113	5	layer	layer	NOUN
ap-1662	113	6	was	be	AUX
ap-1662	113	7	etched	etch	VERB
ap-1662	113	8	,	,	PUNCT
ap-1662	113	9	and	and	CCONJ
ap-1662	113	10	the	the	DET
ap-1662	113	11	flex	flex	ADJ
ap-1662	113	12	-	-	PUNCT
ap-1662	113	13	meas	mea	NOUN
ap-1662	113	14	were	be	AUX
ap-1662	113	15	detached	detach	VERB
ap-1662	113	16	from	from	ADP
ap-1662	113	17	the	the	DET
ap-1662	113	18	carrier	carrier	NOUN
ap-1662	113	19	wafer	wafer	NOUN
ap-1662	113	20	.	.	PUNCT
ap-1662	114	1	finally	finally	ADV
ap-1662	114	2	,	,	PUNCT
ap-1662	114	3	the	the	DET
ap-1662	114	4	remaining	remain	VERB
ap-1662	114	5	titanium	titanium	NOUN
ap-1662	114	6	was	be	AUX
ap-1662	114	7	etched	etch	VERB
ap-1662	114	8	away	away	ADV
ap-1662	114	9	.	.	PUNCT
ap-1662	115	1	during	during	ADP
ap-1662	115	2	these	these	DET
ap-1662	115	3	etch	etch	NOUN
ap-1662	115	4	processes	process	NOUN
ap-1662	115	5	,	,	PUNCT
ap-1662	115	6	the	the	DET
ap-1662	115	7	structures	structure	NOUN
ap-1662	115	8	were	be	AUX
ap-1662	115	9	protected	protect	VERB
ap-1662	115	10	with	with	ADP
ap-1662	115	11	a	a	DET
ap-1662	115	12	resist	resist	NOUN
ap-1662	115	13	.	.	PUNCT
ap-1662	116	1	a	a	DET
ap-1662	116	2	photograph	photograph	NOUN
ap-1662	116	3	of	of	ADP
ap-1662	116	4	the	the	DET
ap-1662	116	5	finalized	finalized	ADJ
ap-1662	116	6	flex	flex	ADJ
ap-1662	116	7	-	-	PUNCT
ap-1662	116	8	mea	mea	NOUN
ap-1662	116	9	is	be	AUX
ap-1662	116	10	shown	show	VERB
ap-1662	116	11	in	in	ADP
ap-1662	116	12	fig	fig	NOUN
ap-1662	116	13	.	.	PUNCT
ap-1662	117	1	13	13	NUM
ap-1662	117	2	.	.	NOUN
ap-1662	117	3	3	3	NUM
ap-1662	117	4	experiments	experiment	NOUN
ap-1662	117	5	bending	bend	VERB
ap-1662	117	6	tests	test	NOUN
ap-1662	117	7	were	be	AUX
ap-1662	117	8	performed	perform	VERB
ap-1662	117	9	to	to	PART
ap-1662	117	10	prove	prove	VERB
ap-1662	117	11	the	the	DET
ap-1662	117	12	flexibility	flexibility	NOUN
ap-1662	117	13	of	of	ADP
ap-1662	117	14	the	the	DET
ap-1662	117	15	structures	structure	NOUN
ap-1662	117	16	.	.	PUNCT
ap-1662	118	1	first	first	ADV
ap-1662	118	2	,	,	PUNCT
ap-1662	118	3	flex	flex	ADJ
ap-1662	118	4	-	-	PUNCT
ap-1662	118	5	mea	mea	NOUN
ap-1662	118	6	was	be	AUX
ap-1662	118	7	bent	bent	ADJ
ap-1662	118	8	around	around	ADP
ap-1662	118	9	a	a	DET
ap-1662	118	10	pen	pen	NOUN
ap-1662	118	11	with	with	ADP
ap-1662	118	12	a	a	DET
ap-1662	118	13	radius	radius	NOUN
ap-1662	118	14	of	of	ADP
ap-1662	118	15	5	5	NUM
ap-1662	118	16	mm	mm	NOUN
ap-1662	118	17	(	(	PUNCT
ap-1662	118	18	fig	fig	NOUN
ap-1662	118	19	.	.	PUNCT
ap-1662	119	1	14	14	NUM
ap-1662	119	2	,	,	PUNCT
ap-1662	119	3	left	leave	VERB
ap-1662	119	4	)	)	PUNCT
ap-1662	119	5	.	.	PUNCT
ap-1662	120	1	the	the	DET
ap-1662	120	2	microscope	microscope	NOUN
ap-1662	120	3	pictures	picture	NOUN
ap-1662	120	4	show	show	VERB
ap-1662	120	5	,	,	PUNCT
ap-1662	120	6	that	that	SCONJ
ap-1662	120	7	the	the	DET
ap-1662	120	8	integrated	integrate	VERB
ap-1662	120	9	dummy	dummy	ADJ
ap-1662	120	10	stimulator	stimulator	NOUN
ap-1662	120	11	chip	chip	NOUN
ap-1662	120	12	had	have	VERB
ap-1662	120	13	no	no	DET
ap-1662	120	14	visible	visible	ADJ
ap-1662	120	15	fracture	fracture	NOUN
ap-1662	120	16	traces	trace	NOUN
ap-1662	120	17	afterwards	afterwards	ADV
ap-1662	120	18	(	(	PUNCT
ap-1662	120	19	fig	fig	NOUN
ap-1662	120	20	.	.	PUNCT
ap-1662	120	21	15	15	NUM
ap-1662	120	22	,	,	PUNCT
ap-1662	120	23	left	leave	VERB
ap-1662	120	24	)	)	PUNCT
ap-1662	120	25	.	.	PUNCT
ap-1662	121	1	then	then	ADV
ap-1662	121	2	,	,	PUNCT
ap-1662	121	3	flex	flex	ADJ
ap-1662	121	4	-	-	PUNCT
ap-1662	121	5	mea	mea	NOUN
ap-1662	121	6	was	be	AUX
ap-1662	121	7	bent	bent	ADJ
ap-1662	121	8	around	around	ADP
ap-1662	121	9	a	a	DET
ap-1662	121	10	ball	ball	NOUN
ap-1662	121	11	pen	pen	NOUN
ap-1662	121	12	refill	refill	NOUN
ap-1662	121	13	with	with	ADP
ap-1662	121	14	a	a	DET
ap-1662	121	15	small	small	ADJ
ap-1662	121	16	radius	radius	NOUN
ap-1662	121	17	of	of	ADP
ap-1662	121	18	1.5	1.5	NUM
ap-1662	121	19	mm	mm	NOUN
ap-1662	121	20	(	(	PUNCT
ap-1662	121	21	fig	fig	NOUN
ap-1662	121	22	.	.	PUNCT
ap-1662	122	1	14	14	NUM
ap-1662	122	2	,	,	PUNCT
ap-1662	122	3	right	right	ADJ
ap-1662	122	4	)	)	PUNCT
ap-1662	122	5	.	.	PUNCT
ap-1662	123	1	unfortunately	unfortunately	ADV
ap-1662	123	2	,	,	PUNCT
ap-1662	123	3	fracture	fracture	NOUN
ap-1662	123	4	traces	trace	NOUN
ap-1662	123	5	were	be	AUX
ap-1662	123	6	visible	visible	ADJ
ap-1662	123	7	after	after	ADP
ap-1662	123	8	this	this	DET
ap-1662	123	9	demanding	demand	VERB
ap-1662	123	10	stress	stress	NOUN
ap-1662	123	11	test	test	NOUN
ap-1662	123	12	(	(	PUNCT
ap-1662	123	13	fig	fig	NOUN
ap-1662	123	14	.	.	PUNCT
ap-1662	124	1	15	15	NUM
ap-1662	124	2	,	,	PUNCT
ap-1662	124	3	right	right	ADJ
ap-1662	124	4	)	)	PUNCT
ap-1662	124	5	.	.	PUNCT
ap-1662	125	1	figure	figure	VERB
ap-1662	125	2	13	13	NUM
ap-1662	125	3	:	:	PUNCT
ap-1662	125	4	flex	flex	ADJ
ap-1662	125	5	-	-	PUNCT
ap-1662	125	6	mea	mea	NOUN
ap-1662	125	7	.	.	PROPN
ap-1662	125	8	figure	figure	NOUN
ap-1662	125	9	14	14	NUM
ap-1662	125	10	:	:	PUNCT
ap-1662	125	11	bending	bend	VERB
ap-1662	125	12	tests	test	NOUN
ap-1662	125	13	with	with	ADP
ap-1662	125	14	a	a	DET
ap-1662	125	15	pen	pen	NOUN
ap-1662	125	16	(	(	PUNCT
ap-1662	125	17	5	5	NUM
ap-1662	125	18	mm	mm	NOUN
ap-1662	125	19	radius	radius	NOUN
ap-1662	125	20	)	)	PUNCT
ap-1662	125	21	and	and	CCONJ
ap-1662	125	22	with	with	ADP
ap-1662	125	23	a	a	DET
ap-1662	125	24	ball	ball	NOUN
ap-1662	125	25	pen	pen	NOUN
ap-1662	125	26	refill	refill	NOUN
ap-1662	125	27	(	(	PUNCT
ap-1662	125	28	1.5	1.5	NUM
ap-1662	125	29	mm	mm	NOUN
ap-1662	125	30	radius	radius	NOUN
ap-1662	125	31	)	)	PUNCT
ap-1662	125	32	.	.	PUNCT
ap-1662	126	1	figure	figure	VERB
ap-1662	126	2	15	15	NUM
ap-1662	126	3	:	:	PUNCT
ap-1662	126	4	microscope	microscope	NOUN
ap-1662	126	5	pictures	picture	NOUN
ap-1662	126	6	of	of	ADP
ap-1662	126	7	flex	flex	ADJ
ap-1662	126	8	-	-	PUNCT
ap-1662	126	9	mea	mea	NOUN
ap-1662	126	10	after	after	ADP
ap-1662	126	11	being	be	AUX
ap-1662	126	12	bent	bent	ADJ
ap-1662	126	13	around	around	ADP
ap-1662	126	14	the	the	DET
ap-1662	126	15	pen	pen	NOUN
ap-1662	126	16	(	(	PUNCT
ap-1662	126	17	left	left	ADJ
ap-1662	126	18	)	)	PUNCT
ap-1662	126	19	and	and	CCONJ
ap-1662	126	20	around	around	ADP
ap-1662	126	21	the	the	DET
ap-1662	126	22	ball	ball	NOUN
ap-1662	126	23	pen	pen	NOUN
ap-1662	126	24	refill	refill	NOUN
ap-1662	126	25	(	(	PUNCT
ap-1662	126	26	right	right	NOUN
ap-1662	126	27	)	)	PUNCT
ap-1662	126	28	.	.	PUNCT
ap-1662	127	1	figure	figure	VERB
ap-1662	127	2	16	16	NUM
ap-1662	127	3	:	:	PUNCT
ap-1662	127	4	modified	modify	VERB
ap-1662	127	5	flex	flex	ADJ
ap-1662	127	6	-	-	PUNCT
ap-1662	127	7	mea	mea	NOUN
ap-1662	127	8	.	.	PROPN
ap-1662	127	9	128	128	NUM
ap-1662	127	10	acta	acta	PROPN
ap-1662	127	11	polytechnica	polytechnica	PROPN
ap-1662	127	12	vol	vol	NOUN
ap-1662	127	13	.	.	PUNCT
ap-1662	128	1	52	52	NUM
ap-1662	128	2	no	no	NOUN
ap-1662	128	3	.	.	PUNCT
ap-1662	129	1	5/2012	5/2012	NUM
ap-1662	129	2	to	to	PART
ap-1662	129	3	prove	prove	VERB
ap-1662	129	4	the	the	DET
ap-1662	129	5	robustness	robustness	NOUN
ap-1662	129	6	of	of	ADP
ap-1662	129	7	the	the	DET
ap-1662	129	8	gold	gold	NOUN
ap-1662	129	9	conductors	conductor	NOUN
ap-1662	129	10	against	against	ADP
ap-1662	129	11	mechanical	mechanical	ADJ
ap-1662	129	12	stress	stress	NOUN
ap-1662	129	13	,	,	PUNCT
ap-1662	129	14	a	a	DET
ap-1662	129	15	modified	modify	VERB
ap-1662	129	16	version	version	NOUN
ap-1662	129	17	of	of	ADP
ap-1662	129	18	flexmea	flexmea	NOUN
ap-1662	129	19	was	be	AUX
ap-1662	129	20	designed	design	VERB
ap-1662	129	21	.	.	PUNCT
ap-1662	130	1	the	the	DET
ap-1662	130	2	design	design	NOUN
ap-1662	130	3	adds	add	VERB
ap-1662	130	4	5	5	NUM
ap-1662	130	5	gold	gold	NOUN
ap-1662	130	6	conductors	conductor	NOUN
ap-1662	130	7	connecting	connect	VERB
ap-1662	130	8	the	the	DET
ap-1662	130	9	5	5	NUM
ap-1662	130	10	control	control	NOUN
ap-1662	130	11	pads	pad	NOUN
ap-1662	130	12	on	on	ADP
ap-1662	130	13	the	the	DET
ap-1662	130	14	left	left	ADJ
ap-1662	130	15	side	side	NOUN
ap-1662	130	16	with	with	ADP
ap-1662	130	17	5	5	NUM
ap-1662	130	18	electrode	electrode	NOUN
ap-1662	130	19	pads	pad	NOUN
ap-1662	130	20	on	on	ADP
ap-1662	130	21	the	the	DET
ap-1662	130	22	right	right	ADJ
ap-1662	130	23	side	side	NOUN
ap-1662	130	24	,	,	PUNCT
ap-1662	130	25	see	see	VERB
ap-1662	130	26	fig	fig	NOUN
ap-1662	130	27	.	.	PUNCT
ap-1662	131	1	16	16	NUM
ap-1662	131	2	.	.	NOUN
ap-1662	132	1	ten	ten	NUM
ap-1662	132	2	additional	additional	ADJ
ap-1662	132	3	pads	pad	NOUN
ap-1662	132	4	facilitate	facilitate	VERB
ap-1662	132	5	measurements	measurement	NOUN
ap-1662	132	6	of	of	ADP
ap-1662	132	7	the	the	DET
ap-1662	132	8	ohmic	ohmic	ADJ
ap-1662	132	9	resistance	resistance	NOUN
ap-1662	132	10	of	of	ADP
ap-1662	132	11	these	these	DET
ap-1662	132	12	5	5	NUM
ap-1662	132	13	conductors	conductor	NOUN
ap-1662	132	14	with	with	ADP
ap-1662	132	15	the	the	DET
ap-1662	132	16	fourpoint	fourpoint	ADJ
ap-1662	132	17	measurement	measurement	NOUN
ap-1662	132	18	method	method	NOUN
ap-1662	132	19	,	,	PUNCT
ap-1662	132	20	during	during	ADP
ap-1662	132	21	or	or	CCONJ
ap-1662	132	22	after	after	ADP
ap-1662	132	23	mechanical	mechanical	ADJ
ap-1662	132	24	stress	stress	NOUN
ap-1662	132	25	.	.	PUNCT
ap-1662	133	1	these	these	DET
ap-1662	133	2	measurements	measurement	NOUN
ap-1662	133	3	are	be	AUX
ap-1662	133	4	still	still	ADV
ap-1662	133	5	ongoing	ongoing	ADJ
ap-1662	133	6	.	.	PUNCT
ap-1662	134	1	4	4	NUM
ap-1662	134	2	conclusion	conclusion	NOUN
ap-1662	134	3	a	a	DET
ap-1662	134	4	novel	novel	ADJ
ap-1662	134	5	flexible	flexible	ADJ
ap-1662	134	6	multi	multi	ADJ
ap-1662	134	7	-	-	ADJ
ap-1662	134	8	electrode	electrode	ADJ
ap-1662	134	9	array	array	NOUN
ap-1662	134	10	with	with	ADP
ap-1662	134	11	embedded	embed	VERB
ap-1662	134	12	silicon	silicon	NOUN
ap-1662	134	13	chips	chip	NOUN
ap-1662	134	14	has	have	AUX
ap-1662	134	15	been	be	AUX
ap-1662	134	16	manufactured	manufacture	VERB
ap-1662	134	17	.	.	PUNCT
ap-1662	135	1	mechanical	mechanical	ADJ
ap-1662	135	2	stress	stress	NOUN
ap-1662	135	3	tests	test	NOUN
ap-1662	135	4	were	be	AUX
ap-1662	135	5	carried	carry	VERB
ap-1662	135	6	out	out	ADP
ap-1662	135	7	,	,	PUNCT
ap-1662	135	8	giving	give	VERB
ap-1662	135	9	promising	promising	ADJ
ap-1662	135	10	results	result	NOUN
ap-1662	135	11	.	.	PUNCT
ap-1662	136	1	electrical	electrical	ADJ
ap-1662	136	2	measurements	measurement	NOUN
ap-1662	136	3	of	of	ADP
ap-1662	136	4	the	the	DET
ap-1662	136	5	ohmic	ohmic	ADJ
ap-1662	136	6	resistances	resistance	NOUN
ap-1662	136	7	of	of	ADP
ap-1662	136	8	the	the	DET
ap-1662	136	9	integrated	integrate	VERB
ap-1662	136	10	conductors	conductor	NOUN
ap-1662	136	11	during	during	ADP
ap-1662	136	12	or	or	CCONJ
ap-1662	136	13	after	after	ADP
ap-1662	136	14	mechanical	mechanical	ADJ
ap-1662	136	15	stress	stress	NOUN
ap-1662	136	16	will	will	AUX
ap-1662	136	17	follow	follow	VERB
ap-1662	136	18	soon	soon	ADV
ap-1662	136	19	.	.	PUNCT
ap-1662	137	1	acknowledgements	acknowledgement	VERB
ap-1662	137	2	the	the	DET
ap-1662	137	3	research	research	NOUN
ap-1662	137	4	described	describe	VERB
ap-1662	137	5	in	in	ADP
ap-1662	137	6	this	this	DET
ap-1662	137	7	paper	paper	NOUN
ap-1662	137	8	was	be	AUX
ap-1662	137	9	supervised	supervise	VERB
ap-1662	137	10	by	by	ADP
ap-1662	137	11	prof	prof	PROPN
ap-1662	137	12	.	.	PUNCT
ap-1662	138	1	w.	w.	PROPN
ap-1662	138	2	mokwa	mokwa	PROPN
ap-1662	138	3	,	,	PUNCT
ap-1662	138	4	rwth	rwth	PROPN
ap-1662	138	5	aachen	aachen	PROPN
ap-1662	138	6	university	university	PROPN
ap-1662	138	7	,	,	PUNCT
ap-1662	138	8	and	and	CCONJ
ap-1662	138	9	was	be	AUX
ap-1662	138	10	supported	support	VERB
ap-1662	138	11	by	by	ADP
ap-1662	138	12	the	the	DET
ap-1662	138	13	german	german	ADJ
ap-1662	138	14	federal	federal	PROPN
ap-1662	138	15	ministry	ministry	PROPN
ap-1662	138	16	of	of	ADP
ap-1662	138	17	education	education	PROPN
ap-1662	138	18	and	and	CCONJ
ap-1662	138	19	research	research	NOUN
ap-1662	138	20	(	(	PUNCT
ap-1662	138	21	bmbf	bmbf	NOUN
ap-1662	138	22	)	)	PUNCT
ap-1662	138	23	,	,	PUNCT
ap-1662	138	24	grant	grant	VERB
ap-1662	138	25	no	no	INTJ
ap-1662	138	26	.	.	PUNCT
ap-1662	139	1	16sv5322k	16sv5322k	NOUN
ap-1662	139	2	.	.	PUNCT
ap-1662	140	1	references	reference	NOUN
ap-1662	140	2	[	[	X
ap-1662	140	3	1	1	NUM
ap-1662	140	4	]	]	PUNCT
ap-1662	140	5	e.	e.	PROPN
ap-1662	140	6	margalit	margalit	PROPN
ap-1662	140	7	,	,	PUNCT
ap-1662	140	8	m.	m.	PROPN
ap-1662	140	9	maia	maia	PROPN
ap-1662	140	10	,	,	PUNCT
ap-1662	140	11	j.	j.	PROPN
ap-1662	140	12	d.	d.	PROPN
ap-1662	140	13	weiland	weiland	PROPN
ap-1662	140	14	et	et	PROPN
ap-1662	141	1	al	al	PROPN
ap-1662	141	2	.	.	PUNCT
ap-1662	142	1	retinal	retinal	ADJ
ap-1662	142	2	prosthesis	prosthesis	NOUN
ap-1662	142	3	for	for	ADP
ap-1662	142	4	the	the	DET
ap-1662	142	5	blind	blind	ADJ
ap-1662	142	6	.	.	PUNCT
ap-1662	143	1	survey	survey	NOUN
ap-1662	143	2	of	of	ADP
ap-1662	143	3	ophthalmology	ophthalmology	NOUN
ap-1662	143	4	47(4):335–356	47(4):335–356	NOUN
ap-1662	143	5	,	,	PUNCT
ap-1662	143	6	2002	2002	NUM
ap-1662	143	7	.	.	PUNCT
ap-1662	144	1	[	[	X
ap-1662	144	2	2	2	X
ap-1662	144	3	]	]	PUNCT
ap-1662	144	4	w.	w.	PROPN
ap-1662	144	5	mokwa	mokwa	PROPN
ap-1662	144	6	.	.	PUNCT
ap-1662	145	1	retinal	retinal	ADJ
ap-1662	145	2	implants	implant	NOUN
ap-1662	145	3	to	to	PART
ap-1662	145	4	restore	restore	VERB
ap-1662	145	5	vision	vision	NOUN
ap-1662	145	6	in	in	ADP
ap-1662	145	7	blind	blind	ADJ
ap-1662	145	8	people	people	NOUN
ap-1662	145	9	.	.	PUNCT
ap-1662	146	1	in	in	ADP
ap-1662	146	2	16th	16th	ADJ
ap-1662	146	3	international	international	ADJ
ap-1662	146	4	conference	conference	NOUN
ap-1662	146	5	on	on	ADP
ap-1662	146	6	solid	solid	ADJ
ap-1662	146	7	-	-	PUNCT
ap-1662	146	8	state	state	NOUN
ap-1662	146	9	sensors	sensor	NOUN
ap-1662	146	10	,	,	PUNCT
ap-1662	146	11	actuators	actuator	NOUN
ap-1662	146	12	and	and	CCONJ
ap-1662	146	13	microsystems	microsystem	NOUN
ap-1662	146	14	,	,	PUNCT
ap-1662	146	15	transducers	transducer	NOUN
ap-1662	146	16	2011	2011	NUM
ap-1662	146	17	,	,	PUNCT
ap-1662	146	18	beijing	beijing	NOUN
ap-1662	146	19	,	,	PUNCT
ap-1662	146	20	2011	2011	NUM
ap-1662	146	21	,	,	PUNCT
ap-1662	146	22	pp	pp	ADJ
ap-1662	146	23	.	.	PUNCT
ap-1662	146	24	2825	2825	NUM
ap-1662	146	25	–	–	PUNCT
ap-1662	146	26	2830	2830	NUM
ap-1662	146	27	.	.	PUNCT
ap-1662	147	1	[	[	X
ap-1662	147	2	3	3	X
ap-1662	147	3	]	]	X
ap-1662	147	4	w.	w.	PROPN
ap-1662	147	5	mokwa	mokwa	PROPN
ap-1662	147	6	,	,	PUNCT
ap-1662	147	7	m.	m.	NOUN
ap-1662	147	8	goertz	goertz	PROPN
ap-1662	147	9	,	,	PUNCT
ap-1662	147	10	c.	c.	PROPN
ap-1662	147	11	koch	koch	PROPN
ap-1662	147	12	et	et	PROPN
ap-1662	147	13	al	al	PROPN
ap-1662	147	14	.	.	PUNCT
ap-1662	148	1	intraocular	intraocular	ADJ
ap-1662	148	2	epiretinal	epiretinal	ADJ
ap-1662	148	3	prosthesis	prosthesis	NOUN
ap-1662	148	4	to	to	PART
ap-1662	148	5	restore	restore	VERB
ap-1662	148	6	vision	vision	NOUN
ap-1662	148	7	in	in	ADP
ap-1662	148	8	blind	blind	ADJ
ap-1662	148	9	humans	human	NOUN
ap-1662	148	10	.	.	PUNCT
ap-1662	149	1	in	in	ADP
ap-1662	149	2	30th	30th	NUM
ap-1662	149	3	ieee	ieee	NOUN
ap-1662	149	4	annual	annual	ADJ
ap-1662	149	5	international	international	ADJ
ap-1662	149	6	conference	conference	NOUN
ap-1662	149	7	:	:	PUNCT
ap-1662	149	8	engineering	engineering	NOUN
ap-1662	149	9	in	in	ADP
ap-1662	149	10	medicine	medicine	NOUN
ap-1662	149	11	and	and	CCONJ
ap-1662	149	12	biology	biology	NOUN
ap-1662	149	13	society	society	NOUN
ap-1662	149	14	,	,	PUNCT
ap-1662	149	15	embs	embs	ADJ
ap-1662	149	16	2008	2008	NUM
ap-1662	149	17	,	,	PUNCT
ap-1662	149	18	vancouver	vancouver	NOUN
ap-1662	149	19	,	,	PUNCT
ap-1662	149	20	2008	2008	NUM
ap-1662	149	21	,	,	PUNCT
ap-1662	149	22	pp	pp	ADJ
ap-1662	149	23	.	.	PUNCT
ap-1662	150	1	5790–5793	5790–5793	NUM
ap-1662	150	2	.	.	PUNCT
ap-1662	151	1	[	[	X
ap-1662	151	2	4	4	X
ap-1662	151	3	]	]	PUNCT
ap-1662	151	4	l.	l.	PROPN
ap-1662	151	5	s.	s.	PROPN
ap-1662	151	6	robblee	robblee	PROPN
ap-1662	151	7	,	,	PUNCT
ap-1662	151	8	j.	j.	PROPN
ap-1662	151	9	l.	l.	PROPN
ap-1662	151	10	lefko	lefko	PROPN
ap-1662	151	11	,	,	PUNCT
ap-1662	151	12	s.	s.	PROPN
ap-1662	151	13	b.	b.	PROPN
ap-1662	151	14	brummer	brummer	PROPN
ap-1662	151	15	.	.	PUNCT
ap-1662	152	1	activated	activate	VERB
ap-1662	152	2	ir	ir	NOUN
ap-1662	152	3	:	:	PUNCT
ap-1662	152	4	an	an	DET
ap-1662	152	5	electrode	electrode	NOUN
ap-1662	152	6	suitable	suitable	ADJ
ap-1662	152	7	for	for	ADP
ap-1662	152	8	reversible	reversible	ADJ
ap-1662	152	9	charge	charge	NOUN
ap-1662	152	10	injection	injection	NOUN
ap-1662	152	11	in	in	ADP
ap-1662	152	12	saline	saline	ADJ
ap-1662	152	13	solution	solution	NOUN
ap-1662	152	14	.	.	PUNCT
ap-1662	153	1	journal	journal	NOUN
ap-1662	153	2	of	of	ADP
ap-1662	153	3	the	the	DET
ap-1662	153	4	electrochemical	electrochemical	ADJ
ap-1662	153	5	society	society	NOUN
ap-1662	153	6	130(3):731–733	130(3):731–733	NUM
ap-1662	153	7	,	,	PUNCT
ap-1662	153	8	1983	1983	NUM
ap-1662	153	9	.	.	PUNCT
ap-1662	154	1	[	[	X
ap-1662	154	2	5	5	X
ap-1662	154	3	]	]	PUNCT
ap-1662	154	4	e.	e.	PROPN
ap-1662	154	5	slavcheva	slavcheva	PROPN
ap-1662	154	6	,	,	PUNCT
ap-1662	154	7	r.	r.	PROPN
ap-1662	154	8	,	,	PUNCT
ap-1662	154	9	vitushinsky	vitushinsky	ADV
ap-1662	154	10	,	,	PUNCT
ap-1662	154	11	w.	w.	PROPN
ap-1662	154	12	mokwa	mokwa	PROPN
ap-1662	154	13	et	et	PROPN
ap-1662	154	14	al	al	PROPN
ap-1662	154	15	.	.	PROPN
ap-1662	154	16	sputtered	sputter	VERB
ap-1662	154	17	iridium	iridium	NOUN
ap-1662	154	18	oxide	oxide	NOUN
ap-1662	154	19	films	film	NOUN
ap-1662	154	20	as	as	ADP
ap-1662	154	21	charge	charge	NOUN
ap-1662	154	22	injection	injection	NOUN
ap-1662	154	23	material	material	NOUN
ap-1662	154	24	for	for	ADP
ap-1662	154	25	functional	functional	ADJ
ap-1662	154	26	electrostimulation	electrostimulation	NOUN
ap-1662	154	27	.	.	PUNCT
ap-1662	155	1	journal	journal	NOUN
ap-1662	155	2	of	of	ADP
ap-1662	155	3	the	the	DET
ap-1662	155	4	electrochemical	electrochemical	ADJ
ap-1662	155	5	society	society	NOUN
ap-1662	155	6	151(7):e226	151(7):e226	NUM
ap-1662	155	7	–	–	PUNCT
ap-1662	155	8	e237	e237	PROPN
ap-1662	155	9	,	,	PUNCT
ap-1662	155	10	2004	2004	NUM
ap-1662	155	11	.	.	PUNCT
ap-1662	156	1	[	[	X
ap-1662	156	2	6	6	NUM
ap-1662	156	3	]	]	X
ap-1662	156	4	speciality	speciality	NOUN
ap-1662	156	5	coating	coating	NOUN
ap-1662	156	6	systems	system	NOUN
ap-1662	156	7	.	.	PUNCT
ap-1662	157	1	scs	scs	PROPN
ap-1662	157	2	medical	medical	ADJ
ap-1662	157	3	coatings	coating	NOUN
ap-1662	157	4	.	.	PUNCT
ap-1662	158	1	http://scscoatings.com/docs/biostabl	http://scscoatings.com/docs/biostabl	PROPN
ap-1662	158	2	.	.	PUNCT
ap-1662	159	1	pdf	pdf	NOUN
ap-1662	159	2	,	,	PUNCT
ap-1662	159	3	[	[	X
ap-1662	159	4	2011	2011	NUM
ap-1662	159	5	-	-	SYM
ap-1662	159	6	03	03	NUM
ap-1662	159	7	-	-	PUNCT
ap-1662	159	8	03	03	NUM
ap-1662	159	9	]	]	PUNCT
ap-1662	159	10	,	,	PUNCT
ap-1662	159	11	2010	2010	NUM
ap-1662	159	12	.	.	PUNCT
ap-1662	160	1	[	[	X
ap-1662	160	2	7	7	X
ap-1662	160	3	]	]	X
ap-1662	160	4	t.	t.	PROPN
ap-1662	160	5	stieglitz	stieglitz	PROPN
ap-1662	160	6	,	,	PUNCT
ap-1662	160	7	h.	h.	PROPN
ap-1662	160	8	beutel	beutel	PROPN
ap-1662	160	9	,	,	PUNCT
ap-1662	160	10	m.	m.	NOUN
ap-1662	160	11	schuettler	schuettler	NOUN
ap-1662	160	12	et	et	PROPN
ap-1662	160	13	al	al	PROPN
ap-1662	160	14	.	.	PROPN
ap-1662	160	15	micromachined	micromachine	VERB
ap-1662	160	16	,	,	PUNCT
ap-1662	160	17	polyimide	polyimide	NOUN
ap-1662	160	18	-	-	PUNCT
ap-1662	160	19	based	base	VERB
ap-1662	160	20	devices	device	NOUN
ap-1662	160	21	for	for	ADP
ap-1662	160	22	flexible	flexible	ADJ
ap-1662	160	23	neural	neural	ADJ
ap-1662	160	24	interfaces	interface	NOUN
ap-1662	160	25	.	.	PUNCT
ap-1662	161	1	biomedical	biomedical	ADJ
ap-1662	161	2	microdevices	microdevice	NOUN
ap-1662	161	3	2(4):283–294	2(4):283–294	NUM
ap-1662	161	4	,	,	PUNCT
ap-1662	161	5	2000	2000	NUM
ap-1662	161	6	.	.	PUNCT
ap-1662	162	1	[	[	X
ap-1662	162	2	8	8	NUM
ap-1662	162	3	]	]	X
ap-1662	162	4	n.	n.	NOUN
ap-1662	162	5	winkin	winkin	PROPN
ap-1662	162	6	.	.	PUNCT
ap-1662	163	1	flexible	flexible	ADJ
ap-1662	163	2	multi	multi	ADJ
ap-1662	163	3	-	-	ADJ
ap-1662	163	4	electrode	electrode	ADJ
ap-1662	163	5	array	array	NOUN
ap-1662	163	6	for	for	ADP
ap-1662	163	7	medical	medical	ADJ
ap-1662	163	8	applications	application	NOUN
ap-1662	163	9	.	.	PUNCT
ap-1662	164	1	in	in	ADP
ap-1662	164	2	16th	16th	ADJ
ap-1662	164	3	international	international	ADJ
ap-1662	164	4	student	student	NOUN
ap-1662	164	5	conference	conference	NOUN
ap-1662	164	6	on	on	ADP
ap-1662	164	7	electrical	electrical	ADJ
ap-1662	164	8	engineering	engineering	NOUN
ap-1662	164	9	,	,	PUNCT
ap-1662	164	10	poster	poster	NOUN
ap-1662	164	11	2012	2012	NUM
ap-1662	164	12	,	,	PUNCT
ap-1662	164	13	prague	prague	NOUN
ap-1662	164	14	,	,	PUNCT
ap-1662	164	15	2012	2012	NUM
ap-1662	164	16	.	.	PUNCT
ap-1662	165	1	[	[	X
ap-1662	165	2	9	9	NUM
ap-1662	165	3	]	]	PUNCT
ap-1662	165	4	j.	j.	PROPN
ap-1662	165	5	l.	l.	PROPN
ap-1662	165	6	wyatt	wyatt	PROPN
ap-1662	165	7	,	,	PUNCT
ap-1662	165	8	j.	j.	PROPN
ap-1662	165	9	f.	f.	PROPN
ap-1662	165	10	rizzo	rizzo	PROPN
ap-1662	165	11	,	,	PUNCT
ap-1662	165	12	a.	a.	NOUN
ap-1662	165	13	grumet	grumet	NOUN
ap-1662	165	14	et	et	PROPN
ap-1662	165	15	al	al	PROPN
ap-1662	165	16	.	.	PROPN
ap-1662	165	17	development	development	NOUN
ap-1662	165	18	of	of	ADP
ap-1662	165	19	a	a	DET
ap-1662	165	20	silicon	silicon	NOUN
ap-1662	165	21	retinal	retinal	ADJ
ap-1662	165	22	implant	implant	NOUN
ap-1662	165	23	—	—	PUNCT
ap-1662	165	24	epiretinal	epiretinal	ADJ
ap-1662	165	25	stimulation	stimulation	NOUN
ap-1662	165	26	of	of	ADP
ap-1662	165	27	retinal	retinal	ADJ
ap-1662	165	28	ganglion	ganglion	NOUN
ap-1662	165	29	-	-	PUNCT
ap-1662	165	30	cells	cell	NOUN
ap-1662	165	31	in	in	ADP
ap-1662	165	32	the	the	DET
ap-1662	165	33	rabbit	rabbit	NOUN
ap-1662	165	34	.	.	PUNCT
ap-1662	166	1	investigative	investigative	ADJ
ap-1662	166	2	ophthalmology	ophthalmology	NOUN
ap-1662	166	3	&	&	CCONJ
ap-1662	166	4	visual	visual	ADJ
ap-1662	166	5	science	science	PROPN
ap-1662	166	6	35(4):1380	35(4):1380	NUM
ap-1662	166	7	,	,	PUNCT
ap-1662	166	8	1994	1994	NUM
ap-1662	166	9	.	.	PUNCT
ap-1662	167	1	129	129	NUM