id	sid	tid	token	lemma	pos
ap-1708	1	1	acta	acta	PROPN
ap-1708	1	2	polytechnica	polytechnica	PROPN
ap-1708	1	3	acta	acta	PROPN
ap-1708	1	4	polytechnica	polytechnica	PROPN
ap-1708	1	5	53(1):33–37	53(1):33–37	NUM
ap-1708	1	6	,	,	PUNCT
ap-1708	1	7	2013	2013	NUM
ap-1708	1	8	©	©	PROPN
ap-1708	1	9	czech	czech	PROPN
ap-1708	1	10	technical	technical	PROPN
ap-1708	1	11	university	university	PROPN
ap-1708	1	12	in	in	ADP
ap-1708	1	13	prague	prague	PROPN
ap-1708	1	14	,	,	PUNCT
ap-1708	1	15	2013	2013	NUM
ap-1708	1	16	available	available	ADJ
ap-1708	1	17	online	online	ADV
ap-1708	1	18	at	at	ADP
ap-1708	1	19	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-1708	1	20	the	the	DET
ap-1708	1	21	czech	czech	PROPN
ap-1708	1	22	contribution	contribution	NOUN
ap-1708	1	23	to	to	ADP
ap-1708	1	24	future	future	ADJ
ap-1708	1	25	large	large	ADJ
ap-1708	1	26	x	x	ADJ
ap-1708	1	27	-	-	NOUN
ap-1708	1	28	ray	ray	NOUN
ap-1708	1	29	astronomy	astronomy	NOUN
ap-1708	1	30	telescopes	telescope	NOUN
ap-1708	1	31	:	:	PUNCT
ap-1708	1	32	recent	recent	ADJ
ap-1708	1	33	progress	progress	NOUN
ap-1708	1	34	rené	rené	PROPN
ap-1708	1	35	hudeca	hudeca	NOUN
ap-1708	1	36	,	,	PUNCT
ap-1708	1	37	b,∗	b,∗	NOUN
ap-1708	1	38	,	,	PUNCT
ap-1708	1	39	ladislav	ladislav	NOUN
ap-1708	1	40	pínac	pínac	NOUN
ap-1708	1	41	,	,	PUNCT
ap-1708	1	42	adolf	adolf	PROPN
ap-1708	1	43	innemand	innemand	PROPN
ap-1708	1	44	,	,	PUNCT
ap-1708	1	45	daniela	daniela	PROPN
ap-1708	1	46	černád	černád	PROPN
ap-1708	1	47	,	,	PUNCT
ap-1708	1	48	veronika	veronika	PROPN
ap-1708	1	49	maršíkovád	maršíkovád	PROPN
ap-1708	1	50	,	,	PUNCT
ap-1708	1	51	vladimír	vladimír	NOUN
ap-1708	1	52	tichýe	tichýe	PROPN
ap-1708	1	53	,	,	PUNCT
ap-1708	1	54	martin	martin	PROPN
ap-1708	1	55	míkaf	míkaf	PROPN
ap-1708	1	56	a	a	DET
ap-1708	1	57	astronomical	astronomical	PROPN
ap-1708	1	58	institute	institute	NOUN
ap-1708	1	59	,	,	PUNCT
ap-1708	1	60	academy	academy	PROPN
ap-1708	1	61	of	of	ADP
ap-1708	1	62	sciences	sciences	PROPN
ap-1708	1	63	of	of	ADP
ap-1708	1	64	the	the	DET
ap-1708	1	65	czech	czech	PROPN
ap-1708	1	66	republic	republic	NOUN
ap-1708	1	67	,	,	PUNCT
ap-1708	1	68	cz-25165	cz-25165	NOUN
ap-1708	1	69	ondřejov	ondřejov	PROPN
ap-1708	1	70	,	,	PUNCT
ap-1708	1	71	czech	czech	PROPN
ap-1708	1	72	republic	republic	PROPN
ap-1708	1	73	b	b	PROPN
ap-1708	1	74	czech	czech	PROPN
ap-1708	1	75	technical	technical	PROPN
ap-1708	1	76	university	university	PROPN
ap-1708	1	77	in	in	ADP
ap-1708	1	78	prague	prague	PROPN
ap-1708	1	79	,	,	PUNCT
ap-1708	1	80	faculty	faculty	NOUN
ap-1708	1	81	of	of	ADP
ap-1708	1	82	electrical	electrical	ADJ
ap-1708	1	83	engineering	engineering	NOUN
ap-1708	1	84	,	,	PUNCT
ap-1708	1	85	technická	technická	NOUN
ap-1708	1	86	2	2	NUM
ap-1708	1	87	,	,	PUNCT
ap-1708	1	88	cz-16627	cz-16627	PROPN
ap-1708	1	89	prague	prague	PROPN
ap-1708	1	90	,	,	PUNCT
ap-1708	1	91	czech	czech	PROPN
ap-1708	1	92	republic	republic	NOUN
ap-1708	1	93	c	c	PROPN
ap-1708	1	94	czech	czech	PROPN
ap-1708	1	95	technical	technical	PROPN
ap-1708	1	96	university	university	PROPN
ap-1708	1	97	in	in	ADP
ap-1708	1	98	prague	prague	PROPN
ap-1708	1	99	,	,	PUNCT
ap-1708	1	100	faculty	faculty	NOUN
ap-1708	1	101	of	of	ADP
ap-1708	1	102	nuclear	nuclear	ADJ
ap-1708	1	103	science	science	NOUN
ap-1708	1	104	and	and	CCONJ
ap-1708	1	105	physical	physical	ADJ
ap-1708	1	106	engineering	engineering	NOUN
ap-1708	1	107	,	,	PUNCT
ap-1708	1	108	břehová	břehová	NOUN
ap-1708	1	109	78/7	78/7	NUM
ap-1708	1	110	,	,	PUNCT
ap-1708	1	111	cz-11000	cz-11000	ADJ
ap-1708	1	112	prague	prague	NOUN
ap-1708	1	113	,	,	PUNCT
ap-1708	1	114	czech	czech	PROPN
ap-1708	1	115	republic	republic	NOUN
ap-1708	2	1	d	d	PROPN
ap-1708	2	2	rigaku	rigaku	NOUN
ap-1708	2	3	innovative	innovative	PROPN
ap-1708	2	4	technologies	technology	NOUN
ap-1708	2	5	europe	europe	PROPN
ap-1708	2	6	s.r.o	s.r.o	PROPN
ap-1708	2	7	.	.	PROPN
ap-1708	2	8	,	,	PUNCT
ap-1708	2	9	novodvorská	novodvorská	NOUN
ap-1708	2	10	994	994	NUM
ap-1708	2	11	,	,	PUNCT
ap-1708	2	12	cz-14221	cz-14221	NOUN
ap-1708	2	13	prague	prague	NOUN
ap-1708	2	14	4	4	NUM
ap-1708	2	15	,	,	PUNCT
ap-1708	2	16	czech	czech	PROPN
ap-1708	2	17	republic	republic	NOUN
ap-1708	2	18	e	e	PROPN
ap-1708	2	19	czech	czech	PROPN
ap-1708	2	20	technical	technical	PROPN
ap-1708	2	21	university	university	PROPN
ap-1708	2	22	in	in	ADP
ap-1708	2	23	prague	prague	PROPN
ap-1708	2	24	,	,	PUNCT
ap-1708	2	25	faculty	faculty	NOUN
ap-1708	2	26	of	of	ADP
ap-1708	2	27	biomedical	biomedical	ADJ
ap-1708	2	28	engineering	engineering	NOUN
ap-1708	2	29	,	,	PUNCT
ap-1708	2	30	nám	nám	PROPN
ap-1708	2	31	.	.	PUNCT
ap-1708	3	1	sítná	sítná	PROPN
ap-1708	3	2	3105	3105	NUM
ap-1708	3	3	,	,	PUNCT
ap-1708	3	4	272	272	NUM
ap-1708	3	5	01	01	NUM
ap-1708	3	6	kladno	kladno	PROPN
ap-1708	3	7	,	,	PUNCT
ap-1708	3	8	czech	czech	PROPN
ap-1708	3	9	republic	republic	PROPN
ap-1708	3	10	f	f	PROPN
ap-1708	3	11	institute	institute	PROPN
ap-1708	3	12	of	of	ADP
ap-1708	3	13	chemical	chemical	PROPN
ap-1708	3	14	technology	technology	NOUN
ap-1708	3	15	,	,	PUNCT
ap-1708	3	16	technická	technická	NOUN
ap-1708	3	17	5	5	NUM
ap-1708	3	18	,	,	PUNCT
ap-1708	3	19	cz-16628	cz-16628	PROPN
ap-1708	3	20	prague	prague	PROPN
ap-1708	3	21	,	,	PUNCT
ap-1708	3	22	czech	czech	PROPN
ap-1708	3	23	republic	republic	NOUN
ap-1708	3	24	∗	∗	NOUN
ap-1708	3	25	corresponding	correspond	VERB
ap-1708	3	26	author	author	NOUN
ap-1708	3	27	:	:	PUNCT
ap-1708	3	28	rhudec@asu.cas.cz	rhudec@asu.cas.cz	NOUN
ap-1708	3	29	abstract	abstract	NOUN
ap-1708	3	30	.	.	PUNCT
ap-1708	4	1	we	we	PRON
ap-1708	4	2	briefly	briefly	ADV
ap-1708	4	3	review	review	VERB
ap-1708	4	4	the	the	DET
ap-1708	4	5	recent	recent	ADJ
ap-1708	4	6	status	status	NOUN
ap-1708	4	7	of	of	ADP
ap-1708	4	8	the	the	DET
ap-1708	4	9	czech	czech	PROPN
ap-1708	4	10	contribution	contribution	NOUN
ap-1708	4	11	to	to	ADP
ap-1708	4	12	future	future	ADJ
ap-1708	4	13	space	space	NOUN
ap-1708	4	14	x	x	NOUN
ap-1708	4	15	-	-	NOUN
ap-1708	4	16	ray	ray	NOUN
ap-1708	4	17	astronomy	astronomy	NOUN
ap-1708	4	18	missions	mission	NOUN
ap-1708	4	19	with	with	ADP
ap-1708	4	20	emphasis	emphasis	NOUN
ap-1708	4	21	on	on	ADP
ap-1708	4	22	the	the	DET
ap-1708	4	23	development	development	NOUN
ap-1708	4	24	of	of	ADP
ap-1708	4	25	new	new	ADJ
ap-1708	4	26	technologies	technology	NOUN
ap-1708	4	27	and	and	CCONJ
ap-1708	4	28	test	test	NOUN
ap-1708	4	29	samples	sample	NOUN
ap-1708	4	30	of	of	ADP
ap-1708	4	31	x	x	NOUN
ap-1708	4	32	-	-	NOUN
ap-1708	4	33	ray	ray	NOUN
ap-1708	4	34	mirrors	mirror	NOUN
ap-1708	4	35	with	with	ADP
ap-1708	4	36	precise	precise	ADJ
ap-1708	4	37	surfaces	surface	NOUN
ap-1708	4	38	based	base	VERB
ap-1708	4	39	on	on	ADP
ap-1708	4	40	new	new	ADJ
ap-1708	4	41	materials	material	NOUN
ap-1708	4	42	and	and	CCONJ
ap-1708	4	43	alternative	alternative	ADJ
ap-1708	4	44	designs	design	NOUN
ap-1708	4	45	.	.	PUNCT
ap-1708	5	1	we	we	PRON
ap-1708	5	2	report	report	VERB
ap-1708	5	3	on	on	ADP
ap-1708	5	4	further	further	ADJ
ap-1708	5	5	investigations	investigation	NOUN
ap-1708	5	6	and	and	CCONJ
ap-1708	5	7	tests	test	NOUN
ap-1708	5	8	of	of	ADP
ap-1708	5	9	x	x	NOUN
ap-1708	5	10	-	-	NOUN
ap-1708	5	11	ray	ray	NOUN
ap-1708	5	12	optical	optical	ADJ
ap-1708	5	13	arrangements	arrangement	NOUN
ap-1708	5	14	,	,	PUNCT
ap-1708	5	15	such	such	ADJ
ap-1708	5	16	as	as	ADP
ap-1708	5	17	kirkpatrick	kirkpatrick	NOUN
ap-1708	5	18	-	-	PUNCT
ap-1708	5	19	baez	baez	PROPN
ap-1708	5	20	systems	systems	PROPN
ap-1708	5	21	and	and	CCONJ
ap-1708	5	22	multi	multi	ADJ
ap-1708	5	23	-	-	ADJ
ap-1708	5	24	foil	foil	ADJ
ap-1708	5	25	optics	optic	NOUN
ap-1708	5	26	.	.	PUNCT
ap-1708	6	1	keywords	keyword	NOUN
ap-1708	6	2	:	:	PUNCT
ap-1708	6	3	x	x	X
ap-1708	6	4	-	-	NOUN
ap-1708	6	5	ray	ray	NOUN
ap-1708	6	6	astronomy	astronomy	NOUN
ap-1708	6	7	,	,	PUNCT
ap-1708	6	8	x	x	NOUN
ap-1708	6	9	-	-	NOUN
ap-1708	6	10	ray	ray	NOUN
ap-1708	6	11	telescopes	telescope	NOUN
ap-1708	6	12	,	,	PUNCT
ap-1708	6	13	x	x	NOUN
ap-1708	6	14	-	-	NOUN
ap-1708	6	15	ray	ray	NOUN
ap-1708	6	16	optics	optic	NOUN
ap-1708	6	17	.	.	PUNCT
ap-1708	7	1	1	1	X
ap-1708	7	2	.	.	X
ap-1708	7	3	introduction	introduction	NOUN
ap-1708	7	4	this	this	DET
ap-1708	7	5	paper	paper	NOUN
ap-1708	7	6	gives	give	VERB
ap-1708	7	7	a	a	DET
ap-1708	7	8	brief	brief	ADJ
ap-1708	7	9	review	review	NOUN
ap-1708	7	10	of	of	ADP
ap-1708	7	11	recent	recent	ADJ
ap-1708	7	12	efforts	effort	NOUN
ap-1708	7	13	in	in	ADP
ap-1708	7	14	the	the	DET
ap-1708	7	15	czech	czech	PROPN
ap-1708	7	16	republic	republic	NOUN
ap-1708	7	17	in	in	ADP
ap-1708	7	18	the	the	DET
ap-1708	7	19	development	development	NOUN
ap-1708	7	20	of	of	ADP
ap-1708	7	21	novel	novel	ADJ
ap-1708	7	22	space	space	NOUN
ap-1708	7	23	xray	xray	NOUN
ap-1708	7	24	imaging	image	VERB
ap-1708	7	25	optics	optic	NOUN
ap-1708	7	26	.	.	PUNCT
ap-1708	8	1	the	the	DET
ap-1708	8	2	design	design	NOUN
ap-1708	8	3	and	and	CCONJ
ap-1708	8	4	development	development	NOUN
ap-1708	8	5	of	of	ADP
ap-1708	8	6	xray	xray	ADJ
ap-1708	8	7	optics	optic	NOUN
ap-1708	8	8	have	have	VERB
ap-1708	8	9	a	a	DET
ap-1708	8	10	long	long	ADJ
ap-1708	8	11	tradition	tradition	NOUN
ap-1708	8	12	in	in	ADP
ap-1708	8	13	the	the	DET
ap-1708	8	14	czech	czech	PROPN
ap-1708	8	15	republic	republic	NOUN
ap-1708	8	16	(	(	PUNCT
ap-1708	8	17	e.g.	e.g.	ADV
ap-1708	8	18	hudec	hudec	VERB
ap-1708	8	19	et	et	PROPN
ap-1708	8	20	al	al	PROPN
ap-1708	8	21	.	.	PROPN
ap-1708	8	22	,	,	PUNCT
ap-1708	8	23	1991	1991	NUM
ap-1708	8	24	,	,	PUNCT
ap-1708	8	25	1999	1999	NUM
ap-1708	8	26	,	,	PUNCT
ap-1708	8	27	2000	2000	NUM
ap-1708	8	28	,	,	PUNCT
ap-1708	8	29	2001	2001	NUM
ap-1708	8	30	,	,	PUNCT
ap-1708	8	31	inneman	inneman	NOUN
ap-1708	8	32	et	et	PROPN
ap-1708	8	33	al	al	PROPN
ap-1708	8	34	.	.	PROPN
ap-1708	8	35	1999	1999	NUM
ap-1708	8	36	,	,	PUNCT
ap-1708	8	37	2000	2000	NUM
ap-1708	8	38	)	)	PUNCT
ap-1708	8	39	.	.	PUNCT
ap-1708	9	1	a	a	DET
ap-1708	9	2	range	range	NOUN
ap-1708	9	3	of	of	ADP
ap-1708	9	4	related	relate	VERB
ap-1708	9	5	technologies	technology	NOUN
ap-1708	9	6	have	have	AUX
ap-1708	9	7	been	be	AUX
ap-1708	9	8	exploited	exploit	VERB
ap-1708	9	9	and	and	CCONJ
ap-1708	9	10	investigated	investigate	VERB
ap-1708	9	11	over	over	ADP
ap-1708	9	12	the	the	DET
ap-1708	9	13	years	year	NOUN
ap-1708	9	14	,	,	PUNCT
ap-1708	9	15	including	include	VERB
ap-1708	9	16	technologies	technology	NOUN
ap-1708	9	17	for	for	ADP
ap-1708	9	18	future	future	ADJ
ap-1708	9	19	large	large	ADJ
ap-1708	9	20	,	,	PUNCT
ap-1708	9	21	light	light	ADJ
ap-1708	9	22	-	-	PUNCT
ap-1708	9	23	weight	weight	NOUN
ap-1708	9	24	x	x	NOUN
ap-1708	9	25	-	-	NOUN
ap-1708	9	26	ray	ray	NOUN
ap-1708	9	27	telescopes	telescope	NOUN
ap-1708	9	28	.	.	PUNCT
ap-1708	10	1	future	future	ADJ
ap-1708	10	2	large	large	ADJ
ap-1708	10	3	space	space	NOUN
ap-1708	10	4	x	x	NOUN
ap-1708	10	5	-	-	NOUN
ap-1708	10	6	ray	ray	NOUN
ap-1708	10	7	telescopes	telescope	NOUN
ap-1708	10	8	(	(	PUNCT
ap-1708	10	9	such	such	ADJ
ap-1708	10	10	as	as	ADP
ap-1708	10	11	athena	athena	NOUN
ap-1708	10	12	[	[	X
ap-1708	10	13	16	16	NUM
ap-1708	10	14	]	]	PUNCT
ap-1708	10	15	)	)	PUNCT
ap-1708	10	16	require	require	VERB
ap-1708	10	17	precise	precise	ADJ
ap-1708	10	18	,	,	PUNCT
ap-1708	10	19	light	light	ADJ
ap-1708	10	20	-	-	PUNCT
ap-1708	10	21	weight	weight	NOUN
ap-1708	10	22	x	x	NOUN
ap-1708	10	23	-	-	NOUN
ap-1708	10	24	ray	ray	NOUN
ap-1708	10	25	optics	optic	NOUN
ap-1708	10	26	based	base	VERB
ap-1708	10	27	on	on	ADP
ap-1708	10	28	numerous	numerous	ADJ
ap-1708	10	29	thin	thin	ADJ
ap-1708	10	30	reflecting	reflect	VERB
ap-1708	10	31	shells	shell	NOUN
ap-1708	10	32	.	.	PUNCT
ap-1708	11	1	novel	novel	ADJ
ap-1708	11	2	approaches	approach	NOUN
ap-1708	11	3	and	and	CCONJ
ap-1708	11	4	advanced	advanced	ADJ
ap-1708	11	5	technologies	technology	NOUN
ap-1708	11	6	need	need	VERB
ap-1708	11	7	to	to	PART
ap-1708	11	8	be	be	AUX
ap-1708	11	9	developed	develop	VERB
ap-1708	11	10	and	and	CCONJ
ap-1708	11	11	exploited	exploit	VERB
ap-1708	11	12	.	.	PUNCT
ap-1708	12	1	in	in	ADP
ap-1708	12	2	this	this	DET
ap-1708	12	3	paper	paper	NOUN
ap-1708	12	4	,	,	PUNCT
ap-1708	12	5	we	we	PRON
ap-1708	12	6	refer	refer	VERB
ap-1708	12	7	to	to	ADP
ap-1708	12	8	czech	czech	ADJ
ap-1708	12	9	efforts	effort	NOUN
ap-1708	12	10	focusing	focus	VERB
ap-1708	12	11	on	on	ADP
ap-1708	12	12	various	various	ADJ
ap-1708	12	13	novel	novel	ADJ
ap-1708	12	14	designs	design	NOUN
ap-1708	12	15	,	,	PUNCT
ap-1708	12	16	approaches	approach	NOUN
ap-1708	12	17	and	and	CCONJ
ap-1708	12	18	technologies	technology	NOUN
ap-1708	12	19	.	.	PUNCT
ap-1708	13	1	in	in	ADP
ap-1708	13	2	order	order	NOUN
ap-1708	13	3	to	to	PART
ap-1708	13	4	achieve	achieve	VERB
ap-1708	13	5	sub	sub	ADJ
ap-1708	13	6	-	-	ADJ
ap-1708	13	7	arsec	arsec	ADJ
ap-1708	13	8	angular	angular	ADJ
ap-1708	13	9	resolution	resolution	NOUN
ap-1708	13	10	,	,	PUNCT
ap-1708	13	11	the	the	DET
ap-1708	13	12	principles	principle	NOUN
ap-1708	13	13	of	of	ADP
ap-1708	13	14	active	active	ADJ
ap-1708	13	15	optics	optic	NOUN
ap-1708	13	16	also	also	ADV
ap-1708	13	17	need	need	VERB
ap-1708	13	18	to	to	PART
ap-1708	13	19	be	be	AUX
ap-1708	13	20	addressed	address	VERB
ap-1708	13	21	.	.	PUNCT
ap-1708	14	1	2	2	X
ap-1708	14	2	.	.	X
ap-1708	14	3	progress	progress	NOUN
ap-1708	14	4	in	in	ADP
ap-1708	14	5	silicon	silicon	NOUN
ap-1708	14	6	wafer	wafer	NOUN
ap-1708	14	7	shaping	shape	VERB
ap-1708	14	8	silicon	silicon	NOUN
ap-1708	14	9	wafers	wafer	NOUN
ap-1708	14	10	are	be	AUX
ap-1708	14	11	intended	intend	VERB
ap-1708	14	12	for	for	ADP
ap-1708	14	13	use	use	NOUN
ap-1708	14	14	as	as	ADP
ap-1708	14	15	mirrors	mirror	NOUN
ap-1708	14	16	in	in	ADP
ap-1708	14	17	the	the	DET
ap-1708	14	18	esa	esa	PROPN
ap-1708	14	19	xeus	xeus	PROPN
ap-1708	14	20	,	,	PUNCT
ap-1708	14	21	ixo	ixo	NOUN
ap-1708	14	22	and	and	CCONJ
ap-1708	14	23	athena	athena	NOUN
ap-1708	14	24	projects	project	NOUN
ap-1708	14	25	.	.	PUNCT
ap-1708	15	1	as	as	ADP
ap-1708	15	2	in	in	ADP
ap-1708	15	3	the	the	DET
ap-1708	15	4	case	case	NOUN
ap-1708	15	5	of	of	ADP
ap-1708	15	6	xeus	xeus	PROPN
ap-1708	15	7	and	and	CCONJ
ap-1708	15	8	ixo	ixo	NOUN
ap-1708	15	9	,	,	PUNCT
ap-1708	15	10	the	the	DET
ap-1708	15	11	baseline	baseline	NOUN
ap-1708	15	12	optics	optic	NOUN
ap-1708	15	13	for	for	ADP
ap-1708	15	14	the	the	DET
ap-1708	15	15	athena	athena	PROPN
ap-1708	15	16	x	x	PROPN
ap-1708	15	17	-	-	NOUN
ap-1708	15	18	ray	ray	NOUN
ap-1708	15	19	telescope	telescope	NOUN
ap-1708	15	20	design	design	NOUN
ap-1708	15	21	was	be	AUX
ap-1708	15	22	based	base	VERB
ap-1708	15	23	on	on	ADP
ap-1708	15	24	x	x	ADJ
ap-1708	15	25	-	-	NOUN
ap-1708	15	26	ray	ray	ADJ
ap-1708	15	27	high	high	ADJ
ap-1708	15	28	precision	precision	NOUN
ap-1708	15	29	pore	pore	ADJ
ap-1708	15	30	optics	optic	NOUN
ap-1708	15	31	(	(	PUNCT
ap-1708	15	32	x	x	NOUN
ap-1708	15	33	-	-	PUNCT
ap-1708	15	34	hpo	hpo	NOUN
ap-1708	15	35	)	)	PUNCT
ap-1708	15	36	,	,	PUNCT
ap-1708	15	37	a	a	DET
ap-1708	15	38	technology	technology	NOUN
ap-1708	15	39	developed	develop	VERB
ap-1708	15	40	with	with	ADP
ap-1708	15	41	esa	esa	PROPN
ap-1708	15	42	funding	funding	PROPN
ap-1708	15	43	(	(	PUNCT
ap-1708	15	44	rd	rd	NOUN
ap-1708	15	45	-	-	PUNCT
ap-1708	15	46	opt	opt	PROPN
ap-1708	15	47	,	,	PUNCT
ap-1708	15	48	rd	rd	NOUN
ap-1708	15	49	-	-	PUNCT
ap-1708	15	50	hpo	hpo	PROPN
ap-1708	15	51	)	)	PUNCT
ap-1708	15	52	,	,	PUNCT
ap-1708	15	53	with	with	ADP
ap-1708	15	54	a	a	DET
ap-1708	15	55	view	view	NOUN
ap-1708	15	56	to	to	ADP
ap-1708	15	57	achieving	achieve	VERB
ap-1708	15	58	large	large	ADJ
ap-1708	15	59	effective	effective	ADJ
ap-1708	15	60	areas	area	NOUN
ap-1708	15	61	with	with	ADP
ap-1708	15	62	low	low	ADJ
ap-1708	15	63	mass	mass	PROPN
ap-1708	15	64	,	,	PUNCT
ap-1708	15	65	reduced	reduce	VERB
ap-1708	15	66	telescope	telescope	NOUN
ap-1708	15	67	length	length	NOUN
ap-1708	15	68	,	,	PUNCT
ap-1708	15	69	high	high	ADJ
ap-1708	15	70	stiffness	stiffness	NOUN
ap-1708	15	71	,	,	PUNCT
ap-1708	15	72	and	and	CCONJ
ap-1708	15	73	a	a	DET
ap-1708	15	74	monolithic	monolithic	ADJ
ap-1708	15	75	structure	structure	NOUN
ap-1708	15	76	,	,	PUNCT
ap-1708	15	77	favoured	favour	VERB
ap-1708	15	78	for	for	ADP
ap-1708	15	79	handling	handle	VERB
ap-1708	15	80	a	a	DET
ap-1708	15	81	thermal	thermal	ADJ
ap-1708	15	82	environment	environment	NOUN
ap-1708	15	83	and	and	CCONJ
ap-1708	15	84	for	for	ADP
ap-1708	15	85	simplifying	simplify	VERB
ap-1708	15	86	the	the	DET
ap-1708	15	87	alignment	alignment	NOUN
ap-1708	15	88	process	process	NOUN
ap-1708	15	89	(	(	PUNCT
ap-1708	15	90	bavdaz	bavdaz	NOUN
ap-1708	15	91	et	et	PROPN
ap-1708	15	92	al	al	PROPN
ap-1708	15	93	.	.	PROPN
ap-1708	15	94	2010	2010	NUM
ap-1708	15	95	)	)	PUNCT
ap-1708	15	96	.	.	PUNCT
ap-1708	16	1	in	in	ADP
ap-1708	16	2	addition	addition	NOUN
ap-1708	16	3	,	,	PUNCT
ap-1708	16	4	due	due	ADP
ap-1708	16	5	to	to	ADP
ap-1708	16	6	the	the	DET
ap-1708	16	7	higher	high	ADJ
ap-1708	16	8	packing	packing	NOUN
ap-1708	16	9	density	density	NOUN
ap-1708	16	10	and	and	CCONJ
ap-1708	16	11	the	the	DET
ap-1708	16	12	associated	associated	ADJ
ap-1708	16	13	need	need	NOUN
ap-1708	16	14	for	for	ADP
ap-1708	16	15	shorter	short	ADJ
ap-1708	16	16	mirrors	mirror	NOUN
ap-1708	16	17	,	,	PUNCT
ap-1708	16	18	conical	conical	ADJ
ap-1708	16	19	approximation	approximation	NOUN
ap-1708	16	20	to	to	ADP
ap-1708	16	21	the	the	DET
ap-1708	16	22	wolter	wolter	NOUN
ap-1708	16	23	-	-	PUNCT
ap-1708	16	24	i	i	PRON
ap-1708	16	25	geometry	geometry	NOUN
ap-1708	16	26	becomes	become	VERB
ap-1708	16	27	possible	possible	ADJ
ap-1708	16	28	.	.	PUNCT
ap-1708	17	1	x	x	X
ap-1708	17	2	-	-	PUNCT
ap-1708	17	3	hpo	hpo	NOUN
ap-1708	17	4	optics	optic	NOUN
ap-1708	17	5	is	be	AUX
ap-1708	17	6	based	base	VERB
ap-1708	17	7	on	on	ADP
ap-1708	17	8	ribbed	rib	VERB
ap-1708	17	9	si	si	NOUN
ap-1708	17	10	wafers	wafer	NOUN
ap-1708	17	11	stacked	stack	VERB
ap-1708	17	12	together	together	ADV
ap-1708	17	13	.	.	PUNCT
ap-1708	18	1	to	to	PART
ap-1708	18	2	achieve	achieve	VERB
ap-1708	18	3	conical	conical	NOUN
ap-1708	18	4	approximation	approximation	NOUN
ap-1708	18	5	,	,	PUNCT
ap-1708	18	6	the	the	DET
ap-1708	18	7	si	si	PROPN
ap-1708	18	8	wafers	wafer	NOUN
ap-1708	18	9	are	be	AUX
ap-1708	18	10	formed	form	VERB
ap-1708	18	11	by	by	ADP
ap-1708	18	12	stacking	stack	VERB
ap-1708	18	13	a	a	DET
ap-1708	18	14	large	large	ADJ
ap-1708	18	15	number	number	NOUN
ap-1708	18	16	of	of	ADP
ap-1708	18	17	plates	plate	NOUN
ap-1708	18	18	together	together	ADV
ap-1708	18	19	using	use	VERB
ap-1708	18	20	a	a	DET
ap-1708	18	21	mandrel	mandrel	NOUN
ap-1708	18	22	.	.	PUNCT
ap-1708	19	1	the	the	DET
ap-1708	19	2	typical	typical	ADJ
ap-1708	19	3	size	size	NOUN
ap-1708	19	4	of	of	ADP
ap-1708	19	5	the	the	DET
ap-1708	19	6	si	si	PROPN
ap-1708	19	7	wafers	wafer	NOUN
ap-1708	19	8	is	be	AUX
ap-1708	19	9	100×	100×	PROPN
ap-1708	19	10	100	100	NUM
ap-1708	19	11	mm	mm	NOUN
ap-1708	19	12	.	.	PUNCT
ap-1708	20	1	there	there	PRON
ap-1708	20	2	are	be	VERB
ap-1708	20	3	also	also	ADV
ap-1708	20	4	alternative	alternative	ADJ
ap-1708	20	5	x	x	NOUN
ap-1708	20	6	-	-	NOUN
ap-1708	20	7	ray	ray	NOUN
ap-1708	20	8	optics	optic	NOUN
ap-1708	20	9	arrangements	arrangement	NOUN
ap-1708	20	10	using	use	VERB
ap-1708	20	11	si	si	NOUN
ap-1708	20	12	wafers	wafer	NOUN
ap-1708	20	13	.	.	PUNCT
ap-1708	21	1	in	in	ADP
ap-1708	21	2	this	this	DET
ap-1708	21	3	paper	paper	NOUN
ap-1708	21	4	,	,	PUNCT
ap-1708	21	5	we	we	PRON
ap-1708	21	6	refer	refer	VERB
ap-1708	21	7	to	to	ADP
ap-1708	21	8	the	the	DET
ap-1708	21	9	further	further	ADJ
ap-1708	21	10	development	development	NOUN
ap-1708	21	11	of	of	ADP
ap-1708	21	12	an	an	DET
ap-1708	21	13	alternative	alternative	ADJ
ap-1708	21	14	design	design	NOUN
ap-1708	21	15	of	of	ADP
ap-1708	21	16	innovative	innovative	ADJ
ap-1708	21	17	precise	precise	ADJ
ap-1708	21	18	x	x	NOUN
ap-1708	21	19	-	-	NOUN
ap-1708	21	20	ray	ray	NOUN
ap-1708	21	21	optics	optic	NOUN
ap-1708	21	22	based	base	VERB
ap-1708	21	23	on	on	ADP
ap-1708	21	24	si	si	PROPN
ap-1708	21	25	wafers	wafer	NOUN
ap-1708	21	26	.	.	PUNCT
ap-1708	22	1	our	our	PRON
ap-1708	22	2	approach	approach	NOUN
ap-1708	22	3	is	be	AUX
ap-1708	22	4	based	base	VERB
ap-1708	22	5	on	on	ADP
ap-1708	22	6	two	two	NUM
ap-1708	22	7	steps	step	NOUN
ap-1708	22	8	,	,	PUNCT
ap-1708	22	9	namely	namely	ADV
ap-1708	22	10	:	:	PUNCT
ap-1708	22	11	(	(	PUNCT
ap-1708	22	12	1	1	X
ap-1708	22	13	.	.	PUNCT
ap-1708	22	14	)	)	PUNCT
ap-1708	22	15	developing	develop	VERB
ap-1708	22	16	dedicated	dedicate	VERB
ap-1708	22	17	si	si	NOUN
ap-1708	22	18	wafers	wafer	NOUN
ap-1708	22	19	with	with	ADP
ap-1708	22	20	properties	property	NOUN
ap-1708	22	21	optimized	optimize	VERB
ap-1708	22	22	for	for	ADP
ap-1708	22	23	use	use	NOUN
ap-1708	22	24	in	in	ADP
ap-1708	22	25	space	space	NOUN
ap-1708	22	26	x	x	NOUN
ap-1708	22	27	-	-	NOUN
ap-1708	22	28	ray	ray	NOUN
ap-1708	22	29	telescopes	telescope	NOUN
ap-1708	22	30	;	;	PUNCT
ap-1708	22	31	(	(	PUNCT
ap-1708	22	32	2	2	NUM
ap-1708	22	33	.	.	PUNCT
ap-1708	22	34	)	)	PUNCT
ap-1708	22	35	precise	precise	ADJ
ap-1708	22	36	shaping	shaping	NOUN
ap-1708	22	37	of	of	ADP
ap-1708	22	38	the	the	DET
ap-1708	22	39	wafers	wafer	NOUN
ap-1708	22	40	to	to	ADP
ap-1708	22	41	the	the	DET
ap-1708	22	42	optical	optical	ADJ
ap-1708	22	43	surfaces	surface	NOUN
ap-1708	22	44	.	.	PUNCT
ap-1708	23	1	to	to	PART
ap-1708	23	2	achieve	achieve	VERB
ap-1708	23	3	nested	nested	ADJ
ap-1708	23	4	arrays	array	NOUN
ap-1708	23	5	,	,	PUNCT
ap-1708	23	6	stacking	stacking	NOUN
ap-1708	23	7	is	be	AUX
ap-1708	23	8	performed	perform	VERB
ap-1708	23	9	after	after	SCONJ
ap-1708	23	10	the	the	DET
ap-1708	23	11	wafers	wafer	NOUN
ap-1708	23	12	have	have	AUX
ap-1708	23	13	been	be	AUX
ap-1708	23	14	shaped	shape	VERB
ap-1708	23	15	.	.	PUNCT
ap-1708	24	1	in	in	ADP
ap-1708	24	2	this	this	DET
ap-1708	24	3	approach	approach	NOUN
ap-1708	24	4	,	,	PUNCT
ap-1708	24	5	multi	multi	ADJ
ap-1708	24	6	foil	foil	NOUN
ap-1708	24	7	optics	optic	NOUN
ap-1708	24	8	(	(	PUNCT
ap-1708	24	9	mfo	mfo	NOUN
ap-1708	24	10	)	)	PUNCT
ap-1708	24	11	is	be	AUX
ap-1708	24	12	thus	thus	ADV
ap-1708	24	13	created	create	VERB
ap-1708	24	14	from	from	ADP
ap-1708	24	15	shaped	shape	VERB
ap-1708	24	16	si	si	NOUN
ap-1708	24	17	wafers	wafer	NOUN
ap-1708	24	18	.	.	PUNCT
ap-1708	25	1	for	for	ADP
ap-1708	25	2	more	more	ADJ
ap-1708	25	3	details	detail	NOUN
ap-1708	25	4	on	on	ADP
ap-1708	25	5	mfo	mfo	PROPN
ap-1708	25	6	,	,	PUNCT
ap-1708	25	7	see	see	VERB
ap-1708	25	8	hudec	hudec	NOUN
ap-1708	25	9	et	et	PROPN
ap-1708	25	10	al	al	PROPN
ap-1708	25	11	.	.	PUNCT
ap-1708	26	1	(	(	PUNCT
ap-1708	26	2	2005	2005	NUM
ap-1708	26	3	)	)	PUNCT
ap-1708	26	4	.	.	PUNCT
ap-1708	27	1	this	this	DET
ap-1708	27	2	alternative	alternative	ADJ
ap-1708	27	3	approach	approach	NOUN
ap-1708	27	4	does	do	AUX
ap-1708	27	5	not	not	PART
ap-1708	27	6	require	require	VERB
ap-1708	27	7	the	the	DET
ap-1708	27	8	si	si	PROPN
ap-1708	27	9	wafers	wafer	NOUN
ap-1708	27	10	to	to	PART
ap-1708	27	11	have	have	VERB
ap-1708	27	12	a	a	DET
ap-1708	27	13	ribbed	rib	VERB
ap-1708	27	14	surface	surface	NOUN
ap-1708	27	15	,	,	PUNCT
ap-1708	27	16	so	so	SCONJ
ap-1708	27	17	problems	problem	NOUN
ap-1708	27	18	with	with	ADP
ap-1708	27	19	transferring	transfer	VERB
ap-1708	27	20	any	any	DET
ap-1708	27	21	deviation	deviation	NOUN
ap-1708	27	22	,	,	PUNCT
ap-1708	27	23	stress	stress	NOUN
ap-1708	27	24	,	,	PUNCT
ap-1708	27	25	and/or	and/or	CCONJ
ap-1708	27	26	inaccuracy	inaccuracy	VERB
ap-1708	27	27	from	from	ADP
ap-1708	27	28	one	one	NUM
ap-1708	27	29	wafer	wafer	NOUN
ap-1708	27	30	to	to	ADP
ap-1708	27	31	the	the	DET
ap-1708	27	32	neighbouring	neighbouring	ADJ
ap-1708	27	33	plates	plate	NOUN
ap-1708	27	34	,	,	PUNCT
ap-1708	27	35	or	or	CCONJ
ap-1708	27	36	even	even	ADV
ap-1708	27	37	to	to	ADP
ap-1708	27	38	the	the	DET
ap-1708	27	39	whole	whole	ADJ
ap-1708	27	40	stacked	stack	VERB
ap-1708	27	41	assembly	assembly	NOUN
ap-1708	27	42	,	,	PUNCT
ap-1708	27	43	will	will	AUX
ap-1708	27	44	be	be	AUX
ap-1708	27	45	avoided	avoid	VERB
ap-1708	27	46	.	.	PUNCT
ap-1708	28	1	however	however	ADV
ap-1708	28	2	,	,	PUNCT
ap-1708	28	3	suitable	suitable	ADJ
ap-1708	28	4	technologies	technology	NOUN
ap-1708	28	5	for	for	ADP
ap-1708	28	6	precise	precise	ADJ
ap-1708	28	7	stacking	stacking	NOUN
ap-1708	28	8	of	of	ADP
ap-1708	28	9	optically	optically	ADV
ap-1708	28	10	33	33	NUM
ap-1708	28	11	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-1708	28	12	rené	rené	PROPN
ap-1708	28	13	hudec	hudec	PROPN
ap-1708	28	14	,	,	PUNCT
ap-1708	28	15	ladislav	ladislav	PROPN
ap-1708	28	16	pína	pína	VERB
ap-1708	28	17	et	et	PROPN
ap-1708	29	1	al	al	PROPN
ap-1708	29	2	.	.	PROPN
ap-1708	29	3	acta	acta	PROPN
ap-1708	29	4	polytechnica	polytechnica	PROPN
ap-1708	29	5	figure	figure	NOUN
ap-1708	29	6	1	1	NUM
ap-1708	29	7	.	.	NOUN
ap-1708	29	8	example	example	NOUN
ap-1708	29	9	of	of	ADP
ap-1708	29	10	precise	precise	ADJ
ap-1708	29	11	silicon	silicon	NOUN
ap-1708	29	12	wafer	wafer	NOUN
ap-1708	29	13	shaping	shaping	NOUN
ap-1708	29	14	by	by	ADP
ap-1708	29	15	thin	thin	ADJ
ap-1708	29	16	layer	layer	NOUN
ap-1708	29	17	deposition	deposition	NOUN
ap-1708	29	18	.	.	PUNCT
ap-1708	30	1	after	after	ADP
ap-1708	30	2	the	the	DET
ap-1708	30	3	deposition	deposition	NOUN
ap-1708	30	4	of	of	ADP
ap-1708	30	5	poly	poly	ADJ
ap-1708	30	6	-	-	PUNCT
ap-1708	30	7	si	si	NOUN
ap-1708	30	8	(	(	PUNCT
ap-1708	30	9	thickness	thickness	NOUN
ap-1708	30	10	1436	1436	NUM
ap-1708	30	11	nm	nm	NOUN
ap-1708	30	12	at	at	ADP
ap-1708	30	13	temperature	temperature	NOUN
ap-1708	30	14	615	615	NUM
ap-1708	30	15	°	°	NOUN
ap-1708	30	16	c	c	NOUN
ap-1708	30	17	)	)	PUNCT
ap-1708	30	18	and	and	CCONJ
ap-1708	30	19	for	for	ADP
ap-1708	30	20	wafer	wafer	NOUN
ap-1708	30	21	thickness	thickness	NOUN
ap-1708	30	22	507	507	NUM
ap-1708	30	23	µm	µm	NOUN
ap-1708	30	24	,	,	PUNCT
ap-1708	30	25	a	a	DET
ap-1708	30	26	warp	warp	NOUN
ap-1708	30	27	of	of	ADP
ap-1708	30	28	110	110	NUM
ap-1708	30	29	µm	µm	NOUN
ap-1708	30	30	(	(	PUNCT
ap-1708	30	31	r	r	NOUN
ap-1708	30	32	=	=	SYM
ap-1708	30	33	25.6	25.6	NUM
ap-1708	30	34	m	m	NOUN
ap-1708	30	35	)	)	PUNCT
ap-1708	30	36	was	be	AUX
ap-1708	30	37	achieved	achieve	VERB
ap-1708	30	38	.	.	PUNCT
ap-1708	31	1	left	leave	VERB
ap-1708	31	2	:	:	PUNCT
ap-1708	31	3	si	si	NOUN
ap-1708	31	4	wafer	wafer	NOUN
ap-1708	31	5	deformation	deformation	NOUN
ap-1708	31	6	map	map	NOUN
ap-1708	31	7	.	.	PUNCT
ap-1708	32	1	right	right	ADJ
ap-1708	32	2	:	:	PUNCT
ap-1708	32	3	warp	warp	VERB
ap-1708	32	4	profile	profile	NOUN
ap-1708	32	5	perpendicular	perpendicular	NOUN
ap-1708	32	6	to	to	ADP
ap-1708	32	7	the	the	DET
ap-1708	32	8	facet	facet	PROPN
ap-1708	32	9	.	.	PUNCT
ap-1708	33	1	figure	figure	NOUN
ap-1708	33	2	2	2	NUM
ap-1708	33	3	.	.	PUNCT
ap-1708	34	1	microphotograph	microphotograph	NOUN
ap-1708	34	2	of	of	ADP
ap-1708	34	3	slip	slip	NOUN
ap-1708	34	4	systems	system	NOUN
ap-1708	34	5	on	on	ADP
ap-1708	34	6	an	an	DET
ap-1708	34	7	si	si	NOUN
ap-1708	34	8	wafer	wafer	NOUN
ap-1708	34	9	after	after	ADP
ap-1708	34	10	plastic	plastic	ADJ
ap-1708	34	11	deformation	deformation	NOUN
ap-1708	34	12	.	.	PUNCT
ap-1708	35	1	this	this	DET
ap-1708	35	2	study	study	NOUN
ap-1708	35	3	was	be	AUX
ap-1708	35	4	aimed	aim	VERB
ap-1708	35	5	at	at	ADP
ap-1708	35	6	achieving	achieve	VERB
ap-1708	35	7	a	a	DET
ap-1708	35	8	better	well	ADJ
ap-1708	35	9	understanding	understanding	NOUN
ap-1708	35	10	of	of	ADP
ap-1708	35	11	the	the	DET
ap-1708	35	12	process	process	NOUN
ap-1708	35	13	of	of	ADP
ap-1708	35	14	si	si	NOUN
ap-1708	35	15	plastic	plastic	ADJ
ap-1708	35	16	deformation	deformation	NOUN
ap-1708	35	17	in	in	ADP
ap-1708	35	18	order	order	NOUN
ap-1708	35	19	to	to	PART
ap-1708	35	20	retain	retain	VERB
ap-1708	35	21	the	the	DET
ap-1708	35	22	surface	surface	NOUN
ap-1708	35	23	quality	quality	NOUN
ap-1708	35	24	.	.	PUNCT
ap-1708	36	1	figure	figure	NOUN
ap-1708	36	2	3	3	NUM
ap-1708	36	3	.	.	PUNCT
ap-1708	37	1	the	the	DET
ap-1708	37	2	si	si	PROPN
ap-1708	37	3	(	(	PUNCT
ap-1708	37	4	100	100	NUM
ap-1708	37	5	)	)	PUNCT
ap-1708	37	6	wafer	wafer	NOUN
ap-1708	37	7	surface	surface	NOUN
ap-1708	37	8	morphology	morphology	NOUN
ap-1708	37	9	after	after	ADP
ap-1708	37	10	plastic	plastic	ADJ
ap-1708	37	11	deformation	deformation	NOUN
ap-1708	37	12	—	—	PUNCT
ap-1708	37	13	afm	afm	PROPN
ap-1708	37	14	measurements	measurement	NOUN
ap-1708	37	15	.	.	PUNCT
ap-1708	38	1	figure	figure	VERB
ap-1708	38	2	4	4	NUM
ap-1708	38	3	.	.	PUNCT
ap-1708	39	1	dependence	dependence	NOUN
ap-1708	39	2	of	of	ADP
ap-1708	39	3	rms	rm	NOUN
ap-1708	39	4	on	on	ADP
ap-1708	39	5	scan	scan	ADJ
ap-1708	39	6	size	size	NOUN
ap-1708	39	7	,	,	PUNCT
ap-1708	39	8	measured	measure	VERB
ap-1708	39	9	on	on	ADP
ap-1708	39	10	8	8	NUM
ap-1708	39	11	-	-	PUNCT
ap-1708	39	12	inch	inch	NOUN
ap-1708	39	13	silicon	silicon	NOUN
ap-1708	39	14	wafers	wafer	NOUN
ap-1708	39	15	at	at	ADP
ap-1708	39	16	brno	brno	PROPN
ap-1708	39	17	university	university	PROPN
ap-1708	39	18	of	of	ADP
ap-1708	39	19	technology	technology	NOUN
ap-1708	39	20	.	.	PUNCT
ap-1708	40	1	formed	form	VERB
ap-1708	40	2	wafers	wafer	NOUN
ap-1708	40	3	to	to	ADP
ap-1708	40	4	a	a	DET
ap-1708	40	5	multiple	multiple	ADJ
ap-1708	40	6	array	array	NOUN
ap-1708	40	7	have	have	VERB
ap-1708	40	8	yet	yet	ADV
ap-1708	40	9	to	to	PART
ap-1708	40	10	be	be	AUX
ap-1708	40	11	developed	develop	VERB
ap-1708	40	12	.	.	PUNCT
ap-1708	41	1	in	in	ADP
ap-1708	41	2	order	order	NOUN
ap-1708	41	3	to	to	PART
ap-1708	41	4	achieve	achieve	VERB
ap-1708	41	5	the	the	DET
ap-1708	41	6	very	very	ADV
ap-1708	41	7	high	high	ADJ
ap-1708	41	8	accuracy	accuracy	NOUN
ap-1708	41	9	required	require	VERB
ap-1708	41	10	for	for	ADP
ap-1708	41	11	future	future	ADJ
ap-1708	41	12	large	large	ADJ
ap-1708	41	13	space	space	NOUN
ap-1708	41	14	x	x	NOUN
ap-1708	41	15	-	-	NOUN
ap-1708	41	16	ray	ray	NOUN
ap-1708	41	17	telescopes	telescope	NOUN
ap-1708	41	18	,	,	PUNCT
ap-1708	41	19	the	the	DET
ap-1708	41	20	parameters	parameter	NOUN
ap-1708	41	21	of	of	ADP
ap-1708	41	22	the	the	DET
ap-1708	41	23	si	si	PROPN
ap-1708	41	24	wafers	wafer	NOUN
ap-1708	41	25	need	need	VERB
ap-1708	41	26	to	to	PART
ap-1708	41	27	be	be	AUX
ap-1708	41	28	optimized	optimize	VERB
ap-1708	41	29	(	(	PUNCT
ap-1708	41	30	for	for	ADP
ap-1708	41	31	application	application	NOUN
ap-1708	41	32	in	in	ADP
ap-1708	41	33	x	x	NOUN
ap-1708	41	34	-	-	NOUN
ap-1708	41	35	ray	ray	NOUN
ap-1708	41	36	optics	optic	NOUN
ap-1708	41	37	)	)	PUNCT
ap-1708	41	38	at	at	ADP
ap-1708	41	39	the	the	DET
ap-1708	41	40	production	production	NOUN
ap-1708	41	41	stage	stage	NOUN
ap-1708	41	42	.	.	PUNCT
ap-1708	42	1	for	for	ADP
ap-1708	42	2	this	this	DET
ap-1708	42	3	purpose	purpose	NOUN
ap-1708	42	4	,	,	PUNCT
ap-1708	42	5	we	we	PRON
ap-1708	42	6	have	have	AUX
ap-1708	42	7	established	establish	VERB
ap-1708	42	8	and	and	CCONJ
ap-1708	42	9	developed	develop	VERB
ap-1708	42	10	a	a	DET
ap-1708	42	11	multidisciplinary	multidisciplinary	ADJ
ap-1708	42	12	working	work	VERB
ap-1708	42	13	group	group	NOUN
ap-1708	42	14	including	include	VERB
ap-1708	42	15	development	development	NOUN
ap-1708	42	16	specialists	specialist	NOUN
ap-1708	42	17	from	from	ADP
ap-1708	42	18	the	the	DET
ap-1708	42	19	si	si	NOUN
ap-1708	42	20	wafer	wafer	NOUN
ap-1708	42	21	industry	industry	NOUN
ap-1708	42	22	with	with	ADP
ap-1708	42	23	the	the	DET
ap-1708	42	24	goal	goal	NOUN
ap-1708	42	25	of	of	ADP
ap-1708	42	26	designing	design	VERB
ap-1708	42	27	and	and	CCONJ
ap-1708	42	28	manufacturing	manufacture	VERB
ap-1708	42	29	si	si	NOUN
ap-1708	42	30	wafers	wafer	NOUN
ap-1708	42	31	with	with	ADP
ap-1708	42	32	improved	improved	ADJ
ap-1708	42	33	parameters	parameter	NOUN
ap-1708	42	34	(	(	PUNCT
ap-1708	42	35	mostly	mostly	ADV
ap-1708	42	36	flatness	flatness	NOUN
ap-1708	42	37	)	)	PUNCT
ap-1708	42	38	optimized	optimize	VERB
ap-1708	42	39	for	for	ADP
ap-1708	42	40	application	application	NOUN
ap-1708	42	41	in	in	ADP
ap-1708	42	42	x	x	NOUN
ap-1708	42	43	-	-	NOUN
ap-1708	42	44	ray	ray	NOUN
ap-1708	42	45	telescopes	telescope	NOUN
ap-1708	42	46	.	.	PUNCT
ap-1708	43	1	it	it	PRON
ap-1708	43	2	should	should	AUX
ap-1708	43	3	be	be	AUX
ap-1708	43	4	noted	note	VERB
ap-1708	43	5	that	that	SCONJ
ap-1708	43	6	the	the	DET
ap-1708	43	7	manufacture	manufacture	NOUN
ap-1708	43	8	of	of	ADP
ap-1708	43	9	silicon	silicon	NOUN
ap-1708	43	10	wafers	wafer	NOUN
ap-1708	43	11	is	be	AUX
ap-1708	43	12	a	a	DET
ap-1708	43	13	complicated	complicated	ADJ
ap-1708	43	14	process	process	NOUN
ap-1708	43	15	with	with	ADP
ap-1708	43	16	numerous	numerous	ADJ
ap-1708	43	17	technological	technological	ADJ
ap-1708	43	18	steps	step	NOUN
ap-1708	43	19	and	and	CCONJ
ap-1708	43	20	with	with	ADP
ap-1708	43	21	many	many	ADJ
ap-1708	43	22	free	free	ADJ
ap-1708	43	23	parameters	parameter	NOUN
ap-1708	43	24	that	that	PRON
ap-1708	43	25	can	can	AUX
ap-1708	43	26	be	be	AUX
ap-1708	43	27	modified	modify	VERB
ap-1708	43	28	and	and	CCONJ
ap-1708	43	29	optimized	optimize	VERB
ap-1708	43	30	to	to	PART
ap-1708	43	31	achieve	achieve	VERB
ap-1708	43	32	optimal	optimal	ADJ
ap-1708	43	33	performance	performance	NOUN
ap-1708	43	34	.	.	PUNCT
ap-1708	44	1	this	this	PRON
ap-1708	44	2	can	can	AUX
ap-1708	44	3	also	also	ADV
ap-1708	44	4	be	be	AUX
ap-1708	44	5	useful	useful	ADJ
ap-1708	44	6	for	for	ADP
ap-1708	44	7	further	far	ADV
ap-1708	44	8	improving	improve	VERB
ap-1708	44	9	the	the	DET
ap-1708	44	10	quality	quality	NOUN
ap-1708	44	11	of	of	ADP
ap-1708	44	12	x	x	PROPN
ap-1708	44	13	-	-	ADJ
ap-1708	44	14	hpo	hpo	NOUN
ap-1708	44	15	optics	optic	NOUN
ap-1708	44	16	.	.	PUNCT
ap-1708	45	1	as	as	SCONJ
ap-1708	45	2	we	we	PRON
ap-1708	45	3	are	be	AUX
ap-1708	45	4	dealing	deal	VERB
ap-1708	45	5	with	with	ADP
ap-1708	45	6	high	high	ADJ
ap-1708	45	7	-	-	PUNCT
ap-1708	45	8	quality	quality	NOUN
ap-1708	45	9	x	x	NOUN
ap-1708	45	10	-	-	NOUN
ap-1708	45	11	ray	ray	NOUN
ap-1708	45	12	imaging	imaging	NOUN
ap-1708	45	13	,	,	PUNCT
ap-1708	45	14	the	the	DET
ap-1708	45	15	smoothness	smoothness	NOUN
ap-1708	45	16	of	of	ADP
ap-1708	45	17	the	the	DET
ap-1708	45	18	reflecting	reflect	VERB
ap-1708	45	19	surface	surface	NOUN
ap-1708	45	20	is	be	AUX
ap-1708	45	21	important	important	ADJ
ap-1708	45	22	.	.	PUNCT
ap-1708	46	1	the	the	DET
ap-1708	46	2	standard	standard	ADJ
ap-1708	46	3	microroughness	microroughness	NOUN
ap-1708	46	4	of	of	ADP
ap-1708	46	5	34	34	NUM
ap-1708	46	6	vol	vol	NOUN
ap-1708	46	7	.	.	PUNCT
ap-1708	47	1	53	53	NUM
ap-1708	47	2	no	no	NOUN
ap-1708	47	3	.	.	PUNCT
ap-1708	48	1	1/2013	1/2013	NUM
ap-1708	49	1	the	the	DET
ap-1708	49	2	czech	czech	PROPN
ap-1708	49	3	contribution	contribution	NOUN
ap-1708	49	4	to	to	ADP
ap-1708	49	5	future	future	ADJ
ap-1708	49	6	large	large	ADJ
ap-1708	49	7	x	x	ADJ
ap-1708	49	8	-	-	NOUN
ap-1708	49	9	ray	ray	NOUN
ap-1708	49	10	astronomy	astronomy	NOUN
ap-1708	49	11	telescopes	telescope	NOUN
ap-1708	49	12	figure	figure	VERB
ap-1708	49	13	5	5	NUM
ap-1708	49	14	.	.	PUNCT
ap-1708	49	15	test	test	NOUN
ap-1708	49	16	k	k	PROPN
ap-1708	49	17	-	-	PUNCT
ap-1708	49	18	b	b	PROPN
ap-1708	49	19	modules	module	NOUN
ap-1708	49	20	recently	recently	ADV
ap-1708	49	21	assembled	assemble	VERB
ap-1708	49	22	at	at	ADP
ap-1708	49	23	rite	rite	NOUN
ap-1708	49	24	in	in	ADP
ap-1708	49	25	prague	prague	PROPN
ap-1708	49	26	.	.	PUNCT
ap-1708	50	1	the	the	DET
ap-1708	50	2	largest	large	ADJ
ap-1708	50	3	kb	kb	PROPN
ap-1708	50	4	module	module	NOUN
ap-1708	50	5	includes	include	VERB
ap-1708	50	6	72	72	NUM
ap-1708	50	7	silicon	silicon	NOUN
ap-1708	50	8	mirrors	mirror	NOUN
ap-1708	50	9	,	,	PUNCT
ap-1708	50	10	squared	square	VERB
ap-1708	50	11	to	to	ADP
ap-1708	50	12	100×	100×	PROPN
ap-1708	50	13	100	100	NUM
ap-1708	50	14	mm	mm	NOUN
ap-1708	50	15	,	,	PUNCT
ap-1708	50	16	0.525	0.525	NUM
ap-1708	50	17	mm	mm	NOUN
ap-1708	50	18	in	in	ADP
ap-1708	50	19	thickness	thickness	NOUN
ap-1708	50	20	,	,	PUNCT
ap-1708	50	21	with	with	ADP
ap-1708	50	22	typical	typical	ADJ
ap-1708	50	23	plate	plate	NOUN
ap-1708	50	24	separation	separation	NOUN
ap-1708	50	25	between	between	ADP
ap-1708	50	26	2	2	NUM
ap-1708	50	27	and	and	CCONJ
ap-1708	50	28	3	3	NUM
ap-1708	50	29	mm	mm	NOUN
ap-1708	50	30	.	.	PUNCT
ap-1708	51	1	figure	figure	NOUN
ap-1708	51	2	6	6	NUM
ap-1708	51	3	.	.	PUNCT
ap-1708	52	1	the	the	DET
ap-1708	52	2	kb	kb	PROPN
ap-1708	52	3	test	test	NOUN
ap-1708	52	4	modules	module	NOUN
ap-1708	52	5	during	during	ADP
ap-1708	52	6	the	the	DET
ap-1708	52	7	tests	test	NOUN
ap-1708	52	8	in	in	ADP
ap-1708	52	9	spring	spring	NOUN
ap-1708	52	10	2012	2012	NUM
ap-1708	52	11	at	at	ADP
ap-1708	52	12	the	the	DET
ap-1708	52	13	facility	facility	NOUN
ap-1708	52	14	for	for	ADP
ap-1708	52	15	full	full	ADJ
ap-1708	52	16	aperture	aperture	NOUN
ap-1708	52	17	x	x	NOUN
ap-1708	52	18	-	-	NOUN
ap-1708	52	19	ray	ray	NOUN
ap-1708	52	20	tests	test	NOUN
ap-1708	52	21	at	at	ADP
ap-1708	52	22	the	the	DET
ap-1708	52	23	university	university	NOUN
ap-1708	52	24	of	of	ADP
ap-1708	52	25	colorado	colorado	PROPN
ap-1708	52	26	at	at	ADP
ap-1708	52	27	boulder	boulder	NOUN
ap-1708	52	28	.	.	PUNCT
ap-1708	53	1	all	all	DET
ap-1708	53	2	tested	test	VERB
ap-1708	53	3	modules	module	NOUN
ap-1708	53	4	were	be	AUX
ap-1708	53	5	tested	test	VERB
ap-1708	53	6	in	in	ADP
ap-1708	53	7	full	full	ADJ
ap-1708	53	8	aperture	aperture	NOUN
ap-1708	53	9	(	(	PUNCT
ap-1708	53	10	diamater	diamater	NOUN
ap-1708	53	11	80	80	NUM
ap-1708	53	12	mm	mm	NOUN
ap-1708	53	13	)	)	PUNCT
ap-1708	53	14	focus	focus	NOUN
ap-1708	53	15	to	to	PART
ap-1708	53	16	focus	focus	VERB
ap-1708	53	17	arrangement	arrangement	NOUN
ap-1708	53	18	(	(	PUNCT
ap-1708	53	19	2×	2×	NUM
ap-1708	53	20	10	10	NUM
ap-1708	53	21	m	m	NOUN
ap-1708	53	22	)	)	PUNCT
ap-1708	53	23	.	.	PUNCT
ap-1708	54	1	commercially	commercially	ADV
ap-1708	54	2	available	available	ADJ
ap-1708	54	3	si	si	NOUN
ap-1708	54	4	wafers	wafer	NOUN
ap-1708	54	5	(	(	PUNCT
ap-1708	54	6	we	we	PRON
ap-1708	54	7	have	have	AUX
ap-1708	54	8	used	use	VERB
ap-1708	54	9	products	product	NOUN
ap-1708	54	10	from	from	ADP
ap-1708	54	11	on	on	ADP
ap-1708	54	12	semiconductor	semiconductor	NOUN
ap-1708	54	13	,	,	PUNCT
ap-1708	54	14	czech	czech	PROPN
ap-1708	54	15	republic	republic	NOUN
ap-1708	54	16	)	)	PUNCT
ap-1708	54	17	is	be	AUX
ap-1708	54	18	of	of	ADP
ap-1708	54	19	the	the	DET
ap-1708	54	20	order	order	NOUN
ap-1708	54	21	of	of	ADP
ap-1708	54	22	0.1	0.1	NUM
ap-1708	54	23	nm	nm	NOUN
ap-1708	54	24	,	,	PUNCT
ap-1708	54	25	as	as	SCONJ
ap-1708	54	26	confirmed	confirm	VERB
ap-1708	54	27	by	by	ADP
ap-1708	54	28	several	several	ADJ
ap-1708	54	29	independent	independent	ADJ
ap-1708	54	30	measurements	measurement	NOUN
ap-1708	54	31	by	by	ADP
ap-1708	54	32	various	various	ADJ
ap-1708	54	33	techniques	technique	NOUN
ap-1708	54	34	,	,	PUNCT
ap-1708	54	35	including	include	VERB
ap-1708	54	36	the	the	DET
ap-1708	54	37	atomic	atomic	ADJ
ap-1708	54	38	force	force	NOUN
ap-1708	54	39	microscope	microscope	NOUN
ap-1708	54	40	(	(	PUNCT
ap-1708	54	41	afm	afm	PROPN
ap-1708	54	42	)	)	PUNCT
ap-1708	54	43	.	.	PUNCT
ap-1708	55	1	this	this	PRON
ap-1708	55	2	is	be	AUX
ap-1708	55	3	related	relate	VERB
ap-1708	55	4	to	to	ADP
ap-1708	55	5	the	the	DET
ap-1708	55	6	method	method	NOUN
ap-1708	55	7	of	of	ADP
ap-1708	55	8	chemical	chemical	NOUN
ap-1708	55	9	polishing	polishing	NOUN
ap-1708	55	10	used	use	VERB
ap-1708	55	11	in	in	ADP
ap-1708	55	12	the	the	DET
ap-1708	55	13	manufacture	manufacture	NOUN
ap-1708	55	14	of	of	ADP
ap-1708	55	15	si	si	NOUN
ap-1708	55	16	wafers	wafer	NOUN
ap-1708	55	17	.	.	PUNCT
ap-1708	56	1	the	the	DET
ap-1708	56	2	microroughness	microroughness	PROPN
ap-1708	56	3	of	of	ADP
ap-1708	56	4	si	si	NOUN
ap-1708	56	5	wafers	wafer	NOUN
ap-1708	56	6	is	be	AUX
ap-1708	56	7	lower	low	ADJ
ap-1708	56	8	than	than	ADP
ap-1708	56	9	the	the	DET
ap-1708	56	10	microroughness	microroughness	NOUN
ap-1708	56	11	of	of	ADP
ap-1708	56	12	glass	glass	NOUN
ap-1708	56	13	foils	foil	NOUN
ap-1708	56	14	and	and	CCONJ
ap-1708	56	15	most	most	ADJ
ap-1708	56	16	other	other	ADJ
ap-1708	56	17	alternative	alternative	ADJ
ap-1708	56	18	mirror	mirror	NOUN
ap-1708	56	19	materials	material	NOUN
ap-1708	56	20	and	and	CCONJ
ap-1708	56	21	substrates	substrate	NOUN
ap-1708	56	22	.	.	PUNCT
ap-1708	57	1	below	below	ADV
ap-1708	57	2	,	,	PUNCT
ap-1708	57	3	we	we	PRON
ap-1708	57	4	present	present	VERB
ap-1708	57	5	examples	example	NOUN
ap-1708	57	6	of	of	ADP
ap-1708	57	7	results	result	NOUN
ap-1708	57	8	obtained	obtain	VERB
ap-1708	57	9	recently	recently	ADV
ap-1708	57	10	,	,	PUNCT
ap-1708	57	11	illustrating	illustrate	VERB
ap-1708	57	12	current	current	ADJ
ap-1708	57	13	progress	progress	NOUN
ap-1708	57	14	in	in	ADP
ap-1708	57	15	si	si	NOUN
ap-1708	57	16	wafer	wafer	NOUN
ap-1708	57	17	shaping	shaping	NOUN
ap-1708	57	18	for	for	ADP
ap-1708	57	19	x	x	NOUN
ap-1708	57	20	-	-	NOUN
ap-1708	57	21	ray	ray	NOUN
ap-1708	57	22	optics	optic	NOUN
ap-1708	57	23	applications	application	NOUN
ap-1708	57	24	.	.	PUNCT
ap-1708	58	1	the	the	DET
ap-1708	58	2	goal	goal	NOUN
ap-1708	58	3	was	be	AUX
ap-1708	58	4	to	to	PART
ap-1708	58	5	achieve	achieve	VERB
ap-1708	58	6	improved	improved	ADJ
ap-1708	58	7	quality	quality	NOUN
ap-1708	58	8	,	,	PUNCT
ap-1708	58	9	improving	improve	VERB
ap-1708	58	10	the	the	DET
ap-1708	58	11	precision	precision	NOUN
ap-1708	58	12	and	and	CCONJ
ap-1708	58	13	hence	hence	ADV
ap-1708	58	14	the	the	DET
ap-1708	58	15	parameters	parameter	NOUN
ap-1708	58	16	and	and	CCONJ
ap-1708	58	17	performance	performance	NOUN
ap-1708	58	18	of	of	ADP
ap-1708	58	19	the	the	DET
ap-1708	58	20	optics	optic	NOUN
ap-1708	58	21	.	.	PUNCT
ap-1708	59	1	3	3	X
ap-1708	59	2	.	.	X
ap-1708	59	3	advanced	advanced	PROPN
ap-1708	59	4	kirkpatrick	kirkpatrick	PROPN
ap-1708	59	5	-	-	PUNCT
ap-1708	59	6	baez	baez	PROPN
ap-1708	59	7	x	x	PROPN
ap-1708	59	8	-	-	NOUN
ap-1708	59	9	ray	ray	NOUN
ap-1708	59	10	test	test	NOUN
ap-1708	59	11	modules	module	NOUN
ap-1708	59	12	as	as	SCONJ
ap-1708	59	13	was	be	AUX
ap-1708	59	14	mentioned	mention	VERB
ap-1708	59	15	in	in	ADP
ap-1708	59	16	the	the	DET
ap-1708	59	17	previous	previous	ADJ
ap-1708	59	18	section	section	NOUN
ap-1708	59	19	,	,	PUNCT
ap-1708	59	20	si	si	PROPN
ap-1708	59	21	wafers	wafer	NOUN
ap-1708	59	22	are	be	AUX
ap-1708	59	23	difficult	difficult	ADJ
ap-1708	59	24	to	to	PART
ap-1708	59	25	shape	shape	VERB
ap-1708	59	26	,	,	PUNCT
ap-1708	59	27	especially	especially	ADV
ap-1708	59	28	to	to	ADP
ap-1708	59	29	small	small	ADJ
ap-1708	59	30	radii	radius	NOUN
ap-1708	59	31	.	.	PUNCT
ap-1708	60	1	to	to	PART
ap-1708	60	2	overcome	overcome	VERB
ap-1708	60	3	this	this	DET
ap-1708	60	4	difficulty	difficulty	NOUN
ap-1708	60	5	,	,	PUNCT
ap-1708	60	6	another	another	DET
ap-1708	60	7	x	x	ADJ
ap-1708	60	8	-	-	NOUN
ap-1708	60	9	ray	ray	NOUN
ap-1708	60	10	optics	optic	NOUN
ap-1708	60	11	arrangement	arrangement	NOUN
ap-1708	60	12	can	can	AUX
ap-1708	60	13	be	be	AUX
ap-1708	60	14	considered	consider	VERB
ap-1708	60	15	,	,	PUNCT
ap-1708	60	16	namely	namely	ADV
ap-1708	60	17	the	the	DET
ap-1708	60	18	kirkpatrick	kirkpatrick	PROPN
ap-1708	60	19	-	-	PUNCT
ap-1708	60	20	baez	baez	PROPN
ap-1708	60	21	(	(	PUNCT
ap-1708	60	22	kb	kb	PROPN
ap-1708	60	23	)	)	PUNCT
ap-1708	60	24	system	system	NOUN
ap-1708	60	25	.	.	PUNCT
ap-1708	61	1	then	then	ADV
ap-1708	61	2	the	the	DET
ap-1708	61	3	curvature	curvature	NOUN
ap-1708	61	4	radii	radius	NOUN
ap-1708	61	5	are	be	AUX
ap-1708	61	6	much	much	ADV
ap-1708	61	7	larger	large	ADJ
ap-1708	61	8	,	,	PUNCT
ap-1708	61	9	of	of	ADP
ap-1708	61	10	the	the	DET
ap-1708	61	11	order	order	NOUN
ap-1708	61	12	of	of	ADP
ap-1708	61	13	a	a	DET
ap-1708	61	14	few	few	ADJ
ap-1708	61	15	km	km	NOUN
ap-1708	61	16	,	,	PUNCT
ap-1708	61	17	while	while	SCONJ
ap-1708	61	18	the	the	DET
ap-1708	61	19	imaging	imaging	NOUN
ap-1708	61	20	performance	performance	NOUN
ap-1708	61	21	is	be	AUX
ap-1708	61	22	similar	similar	ADJ
ap-1708	61	23	.	.	PUNCT
ap-1708	62	1	for	for	ADP
ap-1708	62	2	the	the	DET
ap-1708	62	3	same	same	ADJ
ap-1708	62	4	effective	effective	ADJ
ap-1708	62	5	area	area	NOUN
ap-1708	62	6	,	,	PUNCT
ap-1708	62	7	however	however	ADV
ap-1708	62	8	,	,	PUNCT
ap-1708	62	9	the	the	DET
ap-1708	62	10	focal	focal	ADJ
ap-1708	62	11	length	length	NOUN
ap-1708	62	12	of	of	ADP
ap-1708	62	13	the	the	DET
ap-1708	62	14	kb	kb	PROPN
ap-1708	62	15	system	system	NOUN
ap-1708	62	16	is	be	AUX
ap-1708	62	17	twice	twice	ADV
ap-1708	62	18	as	as	ADV
ap-1708	62	19	large	large	ADJ
ap-1708	62	20	as	as	ADP
ap-1708	62	21	the	the	DET
ap-1708	62	22	focal	focal	ADJ
ap-1708	62	23	length	length	NOUN
ap-1708	62	24	of	of	ADP
ap-1708	62	25	the	the	DET
ap-1708	62	26	wolter	wolter	NOUN
ap-1708	62	27	system	system	NOUN
ap-1708	62	28	.	.	PUNCT
ap-1708	63	1	nevertheless	nevertheless	ADV
ap-1708	63	2	,	,	PUNCT
ap-1708	63	3	kb	kb	PROPN
ap-1708	63	4	systems	system	NOUN
ap-1708	63	5	offer	offer	VERB
ap-1708	63	6	a	a	DET
ap-1708	63	7	promising	promising	ADJ
ap-1708	63	8	alternative	alternative	NOUN
ap-1708	63	9	to	to	ADP
ap-1708	63	10	the	the	DET
ap-1708	63	11	classical	classical	ADJ
ap-1708	63	12	wolter	wolter	NOUN
ap-1708	63	13	systems	system	NOUN
ap-1708	63	14	in	in	ADP
ap-1708	63	15	future	future	ADJ
ap-1708	63	16	large	large	ADJ
ap-1708	63	17	space	space	NOUN
ap-1708	63	18	x	x	NOUN
ap-1708	63	19	-	-	NOUN
ap-1708	63	20	ray	ray	NOUN
ap-1708	63	21	telescopes	telescope	NOUN
ap-1708	63	22	.	.	PUNCT
ap-1708	64	1	a	a	DET
ap-1708	64	2	very	very	ADV
ap-1708	64	3	important	important	ADJ
ap-1708	64	4	consideration	consideration	NOUN
ap-1708	64	5	is	be	AUX
ap-1708	64	6	the	the	DET
ap-1708	64	7	ease	ease	NOUN
ap-1708	64	8	(	(	PUNCT
ap-1708	64	9	and	and	CCONJ
ap-1708	64	10	hence	hence	ADV
ap-1708	64	11	the	the	DET
ap-1708	64	12	reduced	reduced	ADJ
ap-1708	64	13	cost	cost	NOUN
ap-1708	64	14	)	)	PUNCT
ap-1708	64	15	of	of	ADP
ap-1708	64	16	constructing	construct	VERB
ap-1708	64	17	highly	highly	ADV
ap-1708	64	18	segmented	segment	VERB
ap-1708	64	19	modules	module	NOUN
ap-1708	64	20	based	base	VERB
ap-1708	64	21	on	on	ADP
ap-1708	64	22	multiply	multiply	ADV
ap-1708	64	23	nested	nest	VERB
ap-1708	64	24	thin	thin	ADJ
ap-1708	64	25	reflecting	reflect	VERB
ap-1708	64	26	substrates	substrate	NOUN
ap-1708	64	27	in	in	ADP
ap-1708	64	28	comparison	comparison	NOUN
ap-1708	64	29	with	with	ADP
ap-1708	64	30	the	the	DET
ap-1708	64	31	wolter	wolter	NOUN
ap-1708	64	32	design	design	NOUN
ap-1708	64	33	.	.	PUNCT
ap-1708	65	1	while	while	SCONJ
ap-1708	65	2	,	,	PUNCT
ap-1708	65	3	for	for	ADP
ap-1708	65	4	example	example	NOUN
ap-1708	65	5	,	,	PUNCT
ap-1708	65	6	the	the	DET
ap-1708	65	7	wolter	wolter	NOUN
ap-1708	65	8	design	design	NOUN
ap-1708	65	9	for	for	ADP
ap-1708	65	10	athena	athena	NOUN
ap-1708	65	11	required	require	VERB
ap-1708	65	12	the	the	DET
ap-1708	65	13	substrates	substrate	NOUN
ap-1708	65	14	to	to	PART
ap-1708	65	15	be	be	AUX
ap-1708	65	16	precisely	precisely	ADV
ap-1708	65	17	formed	form	VERB
ap-1708	65	18	with	with	ADP
ap-1708	65	19	curvatures	curvature	NOUN
ap-1708	65	20	as	as	ADV
ap-1708	65	21	small	small	ADJ
ap-1708	65	22	as	as	ADP
ap-1708	65	23	0.25	0.25	NUM
ap-1708	65	24	m	m	NOUN
ap-1708	65	25	,	,	PUNCT
ap-1708	65	26	the	the	DET
ap-1708	65	27	alternative	alternative	ADJ
ap-1708	65	28	kb	kb	PROPN
ap-1708	65	29	arrangement	arrangement	NOUN
ap-1708	65	30	uses	use	VERB
ap-1708	65	31	only	only	ADV
ap-1708	65	32	slightly	slightly	ADV
ap-1708	65	33	bent	bent	ADJ
ap-1708	65	34	mirrors	mirror	NOUN
ap-1708	65	35	.	.	PUNCT
ap-1708	66	1	hence	hence	ADV
ap-1708	66	2	the	the	DET
ap-1708	66	3	feasibility	feasibility	NOUN
ap-1708	66	4	of	of	ADP
ap-1708	66	5	constructing	construct	VERB
ap-1708	66	6	a	a	DET
ap-1708	66	7	kb	kb	PROPN
ap-1708	66	8	module	module	NOUN
ap-1708	66	9	with	with	ADP
ap-1708	66	10	the	the	DET
ap-1708	66	11	required	require	VERB
ap-1708	66	12	5	5	NUM
ap-1708	66	13	arcsec	arcsec	PROPN
ap-1708	66	14	fwhm	fwhm	PROPN
ap-1708	66	15	at	at	ADP
ap-1708	66	16	an	an	DET
ap-1708	66	17	affordable	affordable	ADJ
ap-1708	66	18	cost	cost	NOUN
ap-1708	66	19	is	be	AUX
ap-1708	66	20	higher	high	ADJ
ap-1708	66	21	than	than	ADP
ap-1708	66	22	for	for	ADP
ap-1708	66	23	the	the	DET
ap-1708	66	24	wolter	wolter	NOUN
ap-1708	66	25	arrangement	arrangement	NOUN
ap-1708	66	26	.	.	PUNCT
ap-1708	67	1	advanced	advanced	PROPN
ap-1708	67	2	kb	kb	PROPN
ap-1708	67	3	telescopes	telescope	NOUN
ap-1708	67	4	are	be	AUX
ap-1708	67	5	based	base	VERB
ap-1708	67	6	on	on	ADP
ap-1708	67	7	the	the	DET
ap-1708	67	8	multi	multi	ADJ
ap-1708	67	9	foil	foil	NOUN
ap-1708	67	10	optics	optic	NOUN
ap-1708	67	11	(	(	PUNCT
ap-1708	67	12	mfo	mfo	NOUN
ap-1708	67	13	)	)	PUNCT
ap-1708	67	14	approach	approach	NOUN
ap-1708	67	15	(	(	PUNCT
ap-1708	67	16	x	x	NOUN
ap-1708	67	17	-	-	NOUN
ap-1708	67	18	ray	ray	NOUN
ap-1708	67	19	grazing	grazing	NOUN
ap-1708	67	20	incidence	incidence	NOUN
ap-1708	67	21	imaging	image	VERB
ap-1708	67	22	optics	optic	NOUN
ap-1708	67	23	based	base	VERB
ap-1708	67	24	on	on	ADP
ap-1708	67	25	numerous	numerous	ADJ
ap-1708	67	26	thin	thin	ADJ
ap-1708	67	27	reflecting	reflect	VERB
ap-1708	67	28	mirrors	mirror	NOUN
ap-1708	67	29	/	/	SYM
ap-1708	67	30	foils	foil	NOUN
ap-1708	67	31	)	)	PUNCT
ap-1708	67	32	.	.	PUNCT
ap-1708	68	1	the	the	DET
ap-1708	68	2	distinction	distinction	NOUN
ap-1708	68	3	between	between	ADP
ap-1708	68	4	mfo	mfo	PROPN
ap-1708	68	5	and	and	CCONJ
ap-1708	68	6	other	other	ADJ
ap-1708	68	7	optics	optic	NOUN
ap-1708	68	8	using	use	VERB
ap-1708	68	9	packed	packed	ADJ
ap-1708	68	10	or	or	CCONJ
ap-1708	68	11	nested	nested	ADJ
ap-1708	68	12	mirrors	mirror	NOUN
ap-1708	68	13	is	be	AUX
ap-1708	68	14	that	that	SCONJ
ap-1708	68	15	mfo	mfo	PROPN
ap-1708	68	16	is	be	AUX
ap-1708	68	17	based	base	VERB
ap-1708	68	18	on	on	ADP
ap-1708	68	19	numerous	numerous	ADJ
ap-1708	68	20	very	very	ADV
ap-1708	68	21	thin	thin	ADJ
ap-1708	68	22	substrates	substrate	NOUN
ap-1708	68	23	(	(	PUNCT
ap-1708	68	24	typically	typically	ADV
ap-1708	68	25	less	less	ADJ
ap-1708	68	26	than	than	ADP
ap-1708	68	27	0.1	0.1	NUM
ap-1708	68	28	mm	mm	NUM
ap-1708	68	29	)	)	PUNCT
ap-1708	68	30	.	.	PUNCT
ap-1708	69	1	advanced	advanced	PROPN
ap-1708	69	2	mfo	mfo	PROPN
ap-1708	69	3	kb	kb	PROPN
ap-1708	69	4	test	test	NOUN
ap-1708	69	5	modules	module	NOUN
ap-1708	69	6	35	35	NUM
ap-1708	69	7	rené	rené	PROPN
ap-1708	69	8	hudec	hudec	PROPN
ap-1708	69	9	,	,	PUNCT
ap-1708	69	10	ladislav	ladislav	PROPN
ap-1708	69	11	pína	pína	VERB
ap-1708	69	12	et	et	PROPN
ap-1708	70	1	al	al	PROPN
ap-1708	70	2	.	.	PROPN
ap-1708	70	3	acta	acta	PROPN
ap-1708	70	4	polytechnica	polytechnica	PROPN
ap-1708	70	5	figure	figure	NOUN
ap-1708	70	6	7	7	NUM
ap-1708	70	7	.	.	PUNCT
ap-1708	70	8	measurement	measurement	NOUN
ap-1708	70	9	results	result	NOUN
ap-1708	70	10	of	of	ADP
ap-1708	70	11	the	the	DET
ap-1708	70	12	kb	kb	PROPN
ap-1708	70	13	advanced	advanced	ADJ
ap-1708	70	14	test	test	NOUN
ap-1708	70	15	module	module	NOUN
ap-1708	70	16	with	with	ADP
ap-1708	70	17	si	si	PROPN
ap-1708	70	18	mirrors	mirror	NOUN
ap-1708	70	19	,	,	PUNCT
ap-1708	70	20	full	full	ADJ
ap-1708	70	21	aperture	aperture	NOUN
ap-1708	70	22	tests	test	NOUN
ap-1708	70	23	at	at	ADP
ap-1708	70	24	5	5	NUM
ap-1708	70	25	kev	kev	NOUN
ap-1708	70	26	at	at	ADP
ap-1708	70	27	the	the	DET
ap-1708	70	28	university	university	PROPN
ap-1708	70	29	of	of	ADP
ap-1708	70	30	colorado	colorado	PROPN
ap-1708	70	31	at	at	ADP
ap-1708	70	32	boulder	boulder	NOUN
ap-1708	70	33	.	.	PUNCT
ap-1708	71	1	detector	detector	NOUN
ap-1708	71	2	based	base	VERB
ap-1708	71	3	on	on	ADP
ap-1708	71	4	mcp	mcp	PROPN
ap-1708	71	5	,	,	PUNCT
ap-1708	71	6	diameter	diameter	NOUN
ap-1708	71	7	1	1	NUM
ap-1708	71	8	inch	inch	NOUN
ap-1708	71	9	.	.	PUNCT
ap-1708	72	1	the	the	DET
ap-1708	72	2	estimated	estimate	VERB
ap-1708	72	3	fwhm	fwhm	NOUN
ap-1708	72	4	of	of	ADP
ap-1708	72	5	2d	2d	NUM
ap-1708	72	6	focus	focus	NOUN
ap-1708	72	7	(	(	PUNCT
ap-1708	72	8	after	after	ADP
ap-1708	72	9	correction	correction	NOUN
ap-1708	72	10	for	for	ADP
ap-1708	72	11	final	final	ADJ
ap-1708	72	12	focal	focal	ADJ
ap-1708	72	13	length	length	NOUN
ap-1708	72	14	)	)	PUNCT
ap-1708	72	15	is	be	AUX
ap-1708	72	16	11	11	NUM
ap-1708	72	17	arcsec	arcsec	PROPN
ap-1708	72	18	,	,	PUNCT
ap-1708	72	19	and	and	CCONJ
ap-1708	72	20	hew	hew	VERB
ap-1708	72	21	is	be	AUX
ap-1708	72	22	14	14	NUM
ap-1708	72	23	arcsec	arcsec	PROPN
ap-1708	72	24	.	.	PUNCT
ap-1708	73	1	figure	figure	NOUN
ap-1708	73	2	8	8	NUM
ap-1708	73	3	.	.	PUNCT
ap-1708	74	1	examples	example	NOUN
ap-1708	74	2	of	of	ADP
ap-1708	74	3	test	test	NOUN
ap-1708	74	4	modules	module	NOUN
ap-1708	74	5	of	of	ADP
ap-1708	74	6	x	x	NOUN
ap-1708	74	7	-	-	NOUN
ap-1708	74	8	ray	ray	NOUN
ap-1708	74	9	mfo	mfo	NOUN
ap-1708	74	10	optics	optic	NOUN
ap-1708	74	11	recently	recently	ADV
ap-1708	74	12	assembled	assemble	VERB
ap-1708	74	13	(	(	PUNCT
ap-1708	74	14	spring	spring	NOUN
ap-1708	74	15	2012	2012	NUM
ap-1708	74	16	)	)	PUNCT
ap-1708	74	17	at	at	ADP
ap-1708	74	18	rite	rite	NOUN
ap-1708	74	19	in	in	ADP
ap-1708	74	20	prague	prague	PROPN
ap-1708	74	21	,	,	PUNCT
ap-1708	74	22	with	with	SCONJ
ap-1708	74	23	both	both	DET
ap-1708	74	24	glass	glass	NOUN
ap-1708	74	25	foils	foil	NOUN
ap-1708	74	26	and	and	CCONJ
ap-1708	74	27	silicon	silicon	NOUN
ap-1708	74	28	mirrors	mirror	NOUN
ap-1708	74	29	,	,	PUNCT
ap-1708	74	30	prepared	prepare	VERB
ap-1708	74	31	for	for	ADP
ap-1708	74	32	full	full	ADJ
ap-1708	74	33	aperture	aperture	NOUN
ap-1708	74	34	tests	test	NOUN
ap-1708	74	35	at	at	ADP
ap-1708	74	36	the	the	DET
ap-1708	74	37	university	university	NOUN
ap-1708	74	38	of	of	ADP
ap-1708	74	39	colorado	colorado	PROPN
ap-1708	74	40	in	in	ADP
ap-1708	74	41	boulder	boulder	NOUN
ap-1708	74	42	test	test	NOUN
ap-1708	74	43	facility	facility	NOUN
ap-1708	74	44	.	.	PUNCT
ap-1708	75	1	were	be	AUX
ap-1708	75	2	recently	recently	ADV
ap-1708	75	3	designed	design	VERB
ap-1708	75	4	and	and	CCONJ
ap-1708	75	5	assembled	assemble	VERB
ap-1708	75	6	at	at	ADP
ap-1708	75	7	rigaku	rigaku	NOUN
ap-1708	75	8	innovative	innovative	PROPN
ap-1708	75	9	technologies	technology	NOUN
ap-1708	75	10	europe	europe	PROPN
ap-1708	75	11	(	(	PUNCT
ap-1708	75	12	rite	rite	PROPN
ap-1708	75	13	)	)	PUNCT
ap-1708	75	14	in	in	ADP
ap-1708	75	15	prague	prague	NOUN
ap-1708	75	16	,	,	PUNCT
ap-1708	75	17	and	and	CCONJ
ap-1708	75	18	several	several	ADJ
ap-1708	75	19	modules	module	NOUN
ap-1708	75	20	were	be	AUX
ap-1708	75	21	tested	test	VERB
ap-1708	75	22	in	in	ADP
ap-1708	75	23	full	full	ADJ
ap-1708	75	24	aperture	aperture	NOUN
ap-1708	75	25	x	x	NOUN
ap-1708	75	26	-	-	NOUN
ap-1708	75	27	ray	ray	NOUN
ap-1708	75	28	tests	test	NOUN
ap-1708	75	29	at	at	ADP
ap-1708	75	30	the	the	DET
ap-1708	75	31	test	test	NOUN
ap-1708	75	32	facility	facility	NOUN
ap-1708	75	33	of	of	ADP
ap-1708	75	34	the	the	DET
ap-1708	75	35	university	university	PROPN
ap-1708	75	36	of	of	ADP
ap-1708	75	37	colorado	colorado	PROPN
ap-1708	75	38	at	at	ADP
ap-1708	75	39	boulder	boulder	NOUN
ap-1708	75	40	in	in	ADP
ap-1708	75	41	april	april	PROPN
ap-1708	75	42	and	and	CCONJ
ap-1708	75	43	may	may	PROPN
ap-1708	75	44	2012	2012	NUM
ap-1708	75	45	,	,	PUNCT
ap-1708	75	46	with	with	ADP
ap-1708	75	47	preliminary	preliminary	ADJ
ap-1708	75	48	results	result	NOUN
ap-1708	75	49	of	of	ADP
ap-1708	75	50	about	about	ADP
ap-1708	75	51	fwhm	fwhm	PROPN
ap-1708	75	52	10–20	10–20	PROPN
ap-1708	75	53	arcsec	arcsec	PROPN
ap-1708	75	54	for	for	ADP
ap-1708	75	55	a	a	DET
ap-1708	75	56	full	full	ADJ
ap-1708	75	57	stack	stack	NOUN
ap-1708	75	58	of	of	ADP
ap-1708	75	59	a	a	DET
ap-1708	75	60	module	module	NOUN
ap-1708	75	61	with	with	ADP
ap-1708	75	62	si	si	PROPN
ap-1708	75	63	mirrors	mirror	NOUN
ap-1708	75	64	at	at	ADP
ap-1708	75	65	5	5	NUM
ap-1708	75	66	kev	kev	NOUN
ap-1708	75	67	.	.	PUNCT
ap-1708	76	1	in	in	ADP
ap-1708	76	2	our	our	PRON
ap-1708	76	3	opinion	opinion	NOUN
ap-1708	76	4	,	,	PUNCT
ap-1708	76	5	the	the	DET
ap-1708	76	6	use	use	NOUN
ap-1708	76	7	of	of	ADP
ap-1708	76	8	the	the	DET
ap-1708	76	9	kb	kb	PROPN
ap-1708	76	10	design	design	NOUN
ap-1708	76	11	instead	instead	ADV
ap-1708	76	12	of	of	ADP
ap-1708	76	13	wolter	wolter	NOUN
ap-1708	76	14	in	in	ADP
ap-1708	76	15	future	future	ADJ
ap-1708	76	16	large	large	ADJ
ap-1708	76	17	space	space	NOUN
ap-1708	76	18	x	x	NOUN
ap-1708	76	19	-	-	NOUN
ap-1708	76	20	ray	ray	NOUN
ap-1708	76	21	telescopes	telescope	NOUN
ap-1708	76	22	may	may	AUX
ap-1708	76	23	help	help	VERB
ap-1708	76	24	to	to	PART
ap-1708	76	25	retain	retain	VERB
ap-1708	76	26	high	high	ADJ
ap-1708	76	27	performance	performance	NOUN
ap-1708	76	28	(	(	PUNCT
ap-1708	76	29	e.g.	e.g.	ADV
ap-1708	76	30	effective	effective	ADJ
ap-1708	76	31	area	area	NOUN
ap-1708	76	32	)	)	PUNCT
ap-1708	76	33	even	even	ADV
ap-1708	76	34	with	with	ADP
ap-1708	76	35	a	a	DET
ap-1708	76	36	reduced	reduce	VERB
ap-1708	76	37	budget	budget	NOUN
ap-1708	76	38	.	.	PUNCT
ap-1708	77	1	4	4	X
ap-1708	77	2	.	.	X
ap-1708	77	3	multi	multi	ADJ
ap-1708	77	4	foil	foil	PROPN
ap-1708	77	5	(	(	PUNCT
ap-1708	77	6	mfo	mfo	PROPN
ap-1708	77	7	)	)	PUNCT
ap-1708	77	8	x	x	NOUN
ap-1708	77	9	-	-	NOUN
ap-1708	77	10	ray	ray	NOUN
ap-1708	77	11	optics	optic	NOUN
ap-1708	77	12	novel	novel	NOUN
ap-1708	77	13	mirrors	mirror	NOUN
ap-1708	77	14	for	for	ADP
ap-1708	77	15	x	x	NOUN
ap-1708	77	16	-	-	NOUN
ap-1708	77	17	ray	ray	NOUN
ap-1708	77	18	optics	optic	NOUN
ap-1708	77	19	,	,	PUNCT
ap-1708	77	20	e.g.	e.g.	ADV
ap-1708	77	21	thin	thin	ADJ
ap-1708	77	22	glass	glass	NOUN
ap-1708	77	23	foils	foil	NOUN
ap-1708	77	24	and	and	CCONJ
ap-1708	77	25	thin	thin	ADJ
ap-1708	77	26	silicon	silicon	NOUN
ap-1708	77	27	wafers	wafer	NOUN
ap-1708	77	28	,	,	PUNCT
ap-1708	77	29	allow	allow	VERB
ap-1708	77	30	various	various	ADJ
ap-1708	77	31	multi	multi	ADJ
ap-1708	77	32	foil	foil	NOUN
ap-1708	77	33	x	x	NOUN
ap-1708	77	34	-	-	NOUN
ap-1708	77	35	ray	ray	NOUN
ap-1708	77	36	optics	optic	NOUN
ap-1708	77	37	designs	design	NOUN
ap-1708	77	38	(	(	PUNCT
ap-1708	77	39	mfo	mfo	NOUN
ap-1708	77	40	)	)	PUNCT
ap-1708	77	41	to	to	PART
ap-1708	77	42	be	be	AUX
ap-1708	77	43	considered	consider	VERB
ap-1708	77	44	and	and	CCONJ
ap-1708	77	45	tested	test	VERB
ap-1708	77	46	.	.	PUNCT
ap-1708	78	1	these	these	DET
ap-1708	78	2	systems	system	NOUN
ap-1708	78	3	,	,	PUNCT
ap-1708	78	4	with	with	ADP
ap-1708	78	5	different	different	ADJ
ap-1708	78	6	designs	design	NOUN
ap-1708	78	7	and	and	CCONJ
ap-1708	78	8	geometries	geometry	NOUN
ap-1708	78	9	,	,	PUNCT
ap-1708	78	10	may	may	AUX
ap-1708	78	11	have	have	VERB
ap-1708	78	12	various	various	ADJ
ap-1708	78	13	applications	application	NOUN
ap-1708	78	14	both	both	CCONJ
ap-1708	78	15	in	in	ADP
ap-1708	78	16	space	space	NOUN
ap-1708	78	17	and	and	CCONJ
ap-1708	78	18	in	in	ADP
ap-1708	78	19	the	the	DET
ap-1708	78	20	laboratory	laboratory	NOUN
ap-1708	78	21	.	.	PUNCT
ap-1708	79	1	figure	figure	NOUN
ap-1708	79	2	9	9	NUM
ap-1708	79	3	.	.	PUNCT
ap-1708	80	1	the	the	DET
ap-1708	80	2	mfo	mfo	PROPN
ap-1708	80	3	test	test	NOUN
ap-1708	80	4	module	module	NOUN
ap-1708	80	5	in	in	ADP
ap-1708	80	6	active	active	ADJ
ap-1708	80	7	arrangement	arrangement	NOUN
ap-1708	80	8	at	at	ADP
ap-1708	80	9	the	the	DET
ap-1708	80	10	x	x	ADJ
ap-1708	80	11	-	-	NOUN
ap-1708	80	12	ray	ray	NOUN
ap-1708	80	13	test	test	NOUN
ap-1708	80	14	facility	facility	NOUN
ap-1708	80	15	of	of	ADP
ap-1708	80	16	the	the	DET
ap-1708	80	17	university	university	PROPN
ap-1708	80	18	of	of	ADP
ap-1708	80	19	colorado	colorado	PROPN
ap-1708	80	20	at	at	ADP
ap-1708	80	21	boulder	boulder	NOUN
ap-1708	80	22	.	.	PUNCT
ap-1708	81	1	the	the	DET
ap-1708	81	2	piezo	piezo	PROPN
ap-1708	81	3	actuators	actuator	NOUN
ap-1708	81	4	were	be	AUX
ap-1708	81	5	2	2	NUM
ap-1708	81	6	mm	mm	NOUN
ap-1708	81	7	in	in	ADP
ap-1708	81	8	diameter	diameter	NOUN
ap-1708	81	9	,	,	PUNCT
ap-1708	81	10	0,7	0,7	NUM
ap-1708	81	11	mm	mm	NOUN
ap-1708	81	12	in	in	ADP
ap-1708	81	13	thickness	thickness	NOUN
ap-1708	81	14	,	,	PUNCT
ap-1708	81	15	with	with	ADP
ap-1708	81	16	maximum	maximum	ADJ
ap-1708	81	17	bending	bending	NOUN
ap-1708	81	18	length	length	NOUN
ap-1708	81	19	of	of	ADP
ap-1708	81	20	0.025	0.025	NUM
ap-1708	81	21	mm	mm	NOUN
ap-1708	81	22	.	.	PROPN
ap-1708	81	23	5	5	NUM
ap-1708	81	24	.	.	PUNCT
ap-1708	81	25	active	active	ADJ
ap-1708	81	26	multi	multi	ADJ
ap-1708	81	27	foils	foil	NOUN
ap-1708	81	28	x	x	ADJ
ap-1708	81	29	-	-	NOUN
ap-1708	81	30	ray	ray	NOUN
ap-1708	81	31	optics	optic	NOUN
ap-1708	81	32	multi	multi	VERB
ap-1708	81	33	foil	foil	NOUN
ap-1708	81	34	x	x	NOUN
ap-1708	81	35	-	-	NOUN
ap-1708	81	36	ray	ray	NOUN
ap-1708	81	37	optics	optic	NOUN
ap-1708	81	38	can	can	AUX
ap-1708	81	39	be	be	AUX
ap-1708	81	40	further	far	ADV
ap-1708	81	41	improved	improve	VERB
ap-1708	81	42	by	by	ADP
ap-1708	81	43	applying	apply	VERB
ap-1708	81	44	the	the	DET
ap-1708	81	45	principles	principle	NOUN
ap-1708	81	46	of	of	ADP
ap-1708	81	47	active	active	ADJ
ap-1708	81	48	x	x	ADJ
ap-1708	81	49	-	-	NOUN
ap-1708	81	50	ray	ray	NOUN
ap-1708	81	51	optics	optic	NOUN
ap-1708	81	52	.	.	PUNCT
ap-1708	82	1	to	to	PART
ap-1708	82	2	exploit	exploit	VERB
ap-1708	82	3	this	this	DET
ap-1708	82	4	possibility	possibility	NOUN
ap-1708	82	5	,	,	PUNCT
ap-1708	82	6	we	we	PRON
ap-1708	82	7	performed	perform	VERB
ap-1708	82	8	experiments	experiment	NOUN
ap-1708	82	9	with	with	ADP
ap-1708	82	10	adjusting	adjust	VERB
ap-1708	82	11	the	the	DET
ap-1708	82	12	optical	optical	ADJ
ap-1708	82	13	profiles	profile	NOUN
ap-1708	82	14	of	of	ADP
ap-1708	82	15	the	the	DET
ap-1708	82	16	surfaces	surface	NOUN
ap-1708	82	17	of	of	ADP
ap-1708	82	18	x	x	NOUN
ap-1708	82	19	-	-	NOUN
ap-1708	82	20	ray	ray	NOUN
ap-1708	82	21	optics	optic	NOUN
ap-1708	82	22	mirrors	mirror	NOUN
ap-1708	82	23	and	and	CCONJ
ap-1708	82	24	modules	module	NOUN
ap-1708	82	25	with	with	ADP
ap-1708	82	26	active	active	ADJ
ap-1708	82	27	elements	element	NOUN
ap-1708	82	28	(	(	PUNCT
ap-1708	82	29	piezo	piezo	X
ap-1708	82	30	actuators	actuator	NOUN
ap-1708	82	31	)	)	PUNCT
ap-1708	82	32	.	.	PUNCT
ap-1708	83	1	these	these	DET
ap-1708	83	2	tests	test	NOUN
ap-1708	83	3	were	be	AUX
ap-1708	83	4	performed	perform	VERB
ap-1708	83	5	both	both	PRON
ap-1708	83	6	in	in	ADP
ap-1708	83	7	the	the	DET
ap-1708	83	8	laboratory	laboratory	NOUN
ap-1708	83	9	and	and	CCONJ
ap-1708	83	10	at	at	ADP
ap-1708	83	11	the	the	DET
ap-1708	83	12	university	university	PROPN
ap-1708	83	13	of	of	ADP
ap-1708	83	14	colorado	colorado	PROPN
ap-1708	83	15	boulder	boulder	PROPN
ap-1708	83	16	x	x	PROPN
ap-1708	83	17	-	-	PROPN
ap-1708	83	18	ray	ray	NOUN
ap-1708	83	19	facility	facility	NOUN
ap-1708	83	20	in	in	ADP
ap-1708	83	21	the	the	DET
ap-1708	83	22	course	course	NOUN
ap-1708	83	23	of	of	ADP
ap-1708	83	24	full	full	ADJ
ap-1708	83	25	aperture	aperture	NOUN
ap-1708	83	26	tests	test	NOUN
ap-1708	83	27	in	in	ADP
ap-1708	83	28	2012	2012	NUM
ap-1708	83	29	.	.	PUNCT
ap-1708	84	1	one	one	NUM
ap-1708	84	2	of	of	ADP
ap-1708	84	3	the	the	DET
ap-1708	84	4	modules	module	NOUN
ap-1708	84	5	was	be	AUX
ap-1708	84	6	tested	test	VERB
ap-1708	84	7	in	in	ADP
ap-1708	84	8	an	an	DET
ap-1708	84	9	active	active	ADJ
ap-1708	84	10	x	x	ADJ
ap-1708	84	11	-	-	NOUN
ap-1708	84	12	ray	ray	NOUN
ap-1708	84	13	approach	approach	NOUN
ap-1708	84	14	,	,	PUNCT
ap-1708	84	15	adjusting	adjust	VERB
ap-1708	84	16	the	the	DET
ap-1708	84	17	mirrors	mirror	NOUN
ap-1708	84	18	/	/	SYM
ap-1708	84	19	system	system	NOUN
ap-1708	84	20	surfaces	surface	NOUN
ap-1708	84	21	with	with	ADP
ap-1708	84	22	actuators	actuator	NOUN
ap-1708	84	23	.	.	PUNCT
ap-1708	85	1	the	the	DET
ap-1708	85	2	x	x	NOUN
ap-1708	85	3	-	-	NOUN
ap-1708	85	4	ray	ray	NOUN
ap-1708	85	5	tests	test	NOUN
ap-1708	85	6	confirmed	confirm	VERB
ap-1708	85	7	expectations	expectation	NOUN
ap-1708	85	8	that	that	SCONJ
ap-1708	85	9	the	the	DET
ap-1708	85	10	application	application	NOUN
ap-1708	85	11	of	of	ADP
ap-1708	85	12	active	active	ADJ
ap-1708	85	13	x	x	ADJ
ap-1708	85	14	-	-	NOUN
ap-1708	85	15	ray	ray	NOUN
ap-1708	85	16	optics	optic	NOUN
ap-1708	85	17	principles	principle	NOUN
ap-1708	85	18	can	can	AUX
ap-1708	85	19	further	far	ADV
ap-1708	85	20	improve	improve	VERB
ap-1708	85	21	the	the	DET
ap-1708	85	22	performance	performance	NOUN
ap-1708	85	23	of	of	ADP
ap-1708	85	24	mfo	mfo	PROPN
ap-1708	85	25	modules	module	NOUN
ap-1708	85	26	.	.	PUNCT
ap-1708	86	1	36	36	NUM
ap-1708	86	2	vol	vol	NOUN
ap-1708	86	3	.	.	PUNCT
ap-1708	87	1	53	53	NUM
ap-1708	87	2	no	no	NOUN
ap-1708	87	3	.	.	PUNCT
ap-1708	88	1	1/2013	1/2013	NUM
ap-1708	89	1	the	the	DET
ap-1708	89	2	czech	czech	PROPN
ap-1708	89	3	contribution	contribution	NOUN
ap-1708	89	4	to	to	ADP
ap-1708	89	5	future	future	ADJ
ap-1708	89	6	large	large	ADJ
ap-1708	89	7	x	x	ADJ
ap-1708	89	8	-	-	NOUN
ap-1708	89	9	ray	ray	NOUN
ap-1708	89	10	astronomy	astronomy	NOUN
ap-1708	89	11	telescopes	telescope	NOUN
ap-1708	89	12	figure	figure	VERB
ap-1708	89	13	10	10	NUM
ap-1708	89	14	.	.	PUNCT
ap-1708	90	1	test	test	NOUN
ap-1708	90	2	specimens	specimen	NOUN
ap-1708	90	3	of	of	ADP
ap-1708	90	4	x	x	NOUN
ap-1708	90	5	-	-	NOUN
ap-1708	90	6	ray	ray	NOUN
ap-1708	90	7	optics	optic	NOUN
ap-1708	90	8	mirrors	mirror	NOUN
ap-1708	90	9	with	with	ADP
ap-1708	90	10	glued	glue	VERB
ap-1708	90	11	thin	thin	ADJ
ap-1708	90	12	piezo	piezo	NOUN
ap-1708	90	13	actuators	actuator	NOUN
ap-1708	90	14	.	.	PUNCT
ap-1708	91	1	6	6	X
ap-1708	91	2	.	.	X
ap-1708	91	3	conclusion	conclusion	VERB
ap-1708	91	4	various	various	ADJ
ap-1708	91	5	innovative	innovative	ADJ
ap-1708	91	6	designs	design	NOUN
ap-1708	91	7	and	and	CCONJ
ap-1708	91	8	technologies	technology	NOUN
ap-1708	91	9	for	for	ADP
ap-1708	91	10	future	future	ADJ
ap-1708	91	11	large	large	ADJ
ap-1708	91	12	x	x	ADJ
ap-1708	91	13	-	-	NOUN
ap-1708	91	14	ray	ray	NOUN
ap-1708	91	15	telescopes	telescope	NOUN
ap-1708	91	16	have	have	AUX
ap-1708	91	17	been	be	AUX
ap-1708	91	18	analysed	analyse	VERB
ap-1708	91	19	in	in	ADP
ap-1708	91	20	detail	detail	NOUN
ap-1708	91	21	on	on	ADP
ap-1708	91	22	the	the	DET
ap-1708	91	23	basis	basis	NOUN
ap-1708	91	24	of	of	ADP
ap-1708	91	25	extensive	extensive	ADJ
ap-1708	91	26	research	research	NOUN
ap-1708	91	27	work	work	NOUN
ap-1708	91	28	.	.	PUNCT
ap-1708	92	1	experiments	experiment	NOUN
ap-1708	92	2	are	be	AUX
ap-1708	92	3	continuing	continue	VERB
ap-1708	92	4	in	in	ADP
ap-1708	92	5	an	an	DET
ap-1708	92	6	effort	effort	NOUN
ap-1708	92	7	to	to	PART
ap-1708	92	8	further	far	ADV
ap-1708	92	9	improve	improve	VERB
ap-1708	92	10	the	the	DET
ap-1708	92	11	accuracy	accuracy	NOUN
ap-1708	92	12	and	and	CCONJ
ap-1708	92	13	performance	performance	NOUN
ap-1708	92	14	of	of	ADP
ap-1708	92	15	the	the	DET
ap-1708	92	16	optics	optic	NOUN
ap-1708	92	17	.	.	PUNCT
ap-1708	93	1	the	the	DET
ap-1708	93	2	kb	kb	PROPN
ap-1708	93	3	alternative	alternative	NOUN
ap-1708	93	4	for	for	ADP
ap-1708	93	5	astronomical	astronomical	ADJ
ap-1708	93	6	x	x	ADJ
ap-1708	93	7	-	-	NOUN
ap-1708	93	8	ray	ray	NOUN
ap-1708	93	9	telescopes	telescope	NOUN
ap-1708	93	10	was	be	AUX
ap-1708	93	11	investigated	investigate	VERB
ap-1708	93	12	in	in	ADP
ap-1708	93	13	detail	detail	NOUN
ap-1708	93	14	,	,	PUNCT
ap-1708	93	15	based	base	VERB
ap-1708	93	16	on	on	ADP
ap-1708	93	17	new	new	ADJ
ap-1708	93	18	test	test	NOUN
ap-1708	93	19	modules	module	NOUN
ap-1708	93	20	.	.	PUNCT
ap-1708	94	1	the	the	DET
ap-1708	94	2	results	result	NOUN
ap-1708	94	3	were	be	AUX
ap-1708	94	4	quite	quite	ADV
ap-1708	94	5	promising	promising	ADJ
ap-1708	94	6	,	,	PUNCT
ap-1708	94	7	and	and	CCONJ
ap-1708	94	8	justified	justify	VERB
ap-1708	94	9	further	further	ADJ
ap-1708	94	10	efforts	effort	NOUN
ap-1708	94	11	in	in	ADP
ap-1708	94	12	this	this	DET
ap-1708	94	13	direction	direction	NOUN
ap-1708	94	14	.	.	PUNCT
ap-1708	95	1	the	the	DET
ap-1708	95	2	important	important	ADJ
ap-1708	95	3	advantage	advantage	NOUN
ap-1708	95	4	of	of	ADP
ap-1708	95	5	kb	kb	PROPN
ap-1708	95	6	is	be	AUX
ap-1708	95	7	its	its	PRON
ap-1708	95	8	low	low	ADJ
ap-1708	95	9	cost	cost	NOUN
ap-1708	95	10	,	,	PUNCT
ap-1708	95	11	as	as	SCONJ
ap-1708	95	12	there	there	PRON
ap-1708	95	13	is	be	VERB
ap-1708	95	14	no	no	DET
ap-1708	95	15	need	need	NOUN
ap-1708	95	16	for	for	ADP
ap-1708	95	17	bending	bend	VERB
ap-1708	95	18	to	to	ADP
ap-1708	95	19	small	small	ADJ
ap-1708	95	20	curvatures	curvature	NOUN
ap-1708	95	21	and/or	and/or	CCONJ
ap-1708	95	22	to	to	PART
ap-1708	95	23	use	use	VERB
ap-1708	95	24	expensive	expensive	ADJ
ap-1708	95	25	mandrels	mandrel	NOUN
ap-1708	95	26	.	.	PUNCT
ap-1708	96	1	less	less	ADV
ap-1708	96	2	expensive	expensive	ADJ
ap-1708	96	3	optics	optic	NOUN
ap-1708	96	4	can	can	AUX
ap-1708	96	5	maintain	maintain	VERB
ap-1708	96	6	a	a	DET
ap-1708	96	7	high	high	ADJ
ap-1708	96	8	effective	effective	ADJ
ap-1708	96	9	area	area	NOUN
ap-1708	96	10	even	even	ADV
ap-1708	96	11	with	with	ADP
ap-1708	96	12	a	a	DET
ap-1708	96	13	reduced	reduce	VERB
ap-1708	96	14	budget	budget	NOUN
ap-1708	96	15	.	.	PUNCT
ap-1708	97	1	acknowledgements	acknowledgement	NOUN
ap-1708	97	2	we	we	PRON
ap-1708	97	3	acknowledge	acknowledge	VERB
ap-1708	97	4	the	the	DET
ap-1708	97	5	support	support	NOUN
ap-1708	97	6	provided	provide	VERB
ap-1708	97	7	by	by	ADP
ap-1708	97	8	the	the	DET
ap-1708	97	9	ministry	ministry	PROPN
ap-1708	97	10	of	of	ADP
ap-1708	97	11	education	education	PROPN
ap-1708	97	12	,	,	PUNCT
ap-1708	97	13	youth	youth	NOUN
ap-1708	97	14	and	and	CCONJ
ap-1708	97	15	sports	sport	NOUN
ap-1708	97	16	of	of	ADP
ap-1708	97	17	the	the	DET
ap-1708	97	18	czech	czech	PROPN
ap-1708	97	19	republic	republic	NOUN
ap-1708	97	20	,	,	PUNCT
ap-1708	97	21	in	in	ADP
ap-1708	97	22	the	the	DET
ap-1708	97	23	framework	framework	NOUN
ap-1708	97	24	of	of	ADP
ap-1708	97	25	project	project	NOUN
ap-1708	97	26	me09028	me09028	NOUN
ap-1708	97	27	and	and	CCONJ
ap-1708	97	28	me09004	me09004	PROPN
ap-1708	97	29	.	.	PUNCT
ap-1708	98	1	the	the	DET
ap-1708	98	2	investigations	investigation	NOUN
ap-1708	98	3	related	relate	VERB
ap-1708	98	4	to	to	ADP
ap-1708	98	5	the	the	DET
ap-1708	98	6	esa	esa	PROPN
ap-1708	98	7	ixo	ixo	PROPN
ap-1708	98	8	/	/	SYM
ap-1708	98	9	athena	athena	PROPN
ap-1708	98	10	project	project	NOUN
ap-1708	98	11	were	be	AUX
ap-1708	98	12	supported	support	VERB
ap-1708	98	13	by	by	ADP
ap-1708	98	14	esa	esa	PROPN
ap-1708	98	15	pecs	pecs	PROPN
ap-1708	98	16	project	project	NOUN
ap-1708	98	17	no	no	NOUN
ap-1708	98	18	.	.	PUNCT
ap-1708	98	19	98039	98039	NUM
ap-1708	98	20	.	.	PUNCT
ap-1708	99	1	we	we	PRON
ap-1708	99	2	also	also	ADV
ap-1708	99	3	acknowledge	acknowledge	VERB
ap-1708	99	4	collaboration	collaboration	NOUN
ap-1708	99	5	with	with	ADP
ap-1708	99	6	dr	dr	PROPN
ap-1708	99	7	.	.	PROPN
ap-1708	99	8	j.	j.	PROPN
ap-1708	99	9	sik	sik	PROPN
ap-1708	99	10	and	and	CCONJ
ap-1708	99	11	dr	dr	PROPN
ap-1708	99	12	.	.	PROPN
ap-1708	99	13	m.	m.	PROPN
ap-1708	99	14	lorenc	lorenc	PROPN
ap-1708	99	15	from	from	ADP
ap-1708	99	16	on	on	ADP
ap-1708	99	17	semiconductor	semiconductor	NOUN
ap-1708	99	18	czech	czech	PROPN
ap-1708	99	19	republic	republic	NOUN
ap-1708	99	20	,	,	PUNCT
ap-1708	99	21	and	and	CCONJ
ap-1708	99	22	with	with	ADP
ap-1708	99	23	the	the	DET
ap-1708	99	24	team	team	NOUN
ap-1708	99	25	of	of	ADP
ap-1708	99	26	prof	prof	PROPN
ap-1708	99	27	.	.	PUNCT
ap-1708	100	1	webster	webster	PROPN
ap-1708	100	2	cash	cash	PROPN
ap-1708	100	3	from	from	ADP
ap-1708	100	4	the	the	DET
ap-1708	100	5	university	university	NOUN
ap-1708	100	6	of	of	ADP
ap-1708	100	7	colorado	colorado	PROPN
ap-1708	100	8	at	at	ADP
ap-1708	100	9	boulder	boulder	NOUN
ap-1708	100	10	for	for	ADP
ap-1708	100	11	x	x	NOUN
ap-1708	100	12	-	-	NOUN
ap-1708	100	13	ray	ray	NOUN
ap-1708	100	14	tests	test	NOUN
ap-1708	100	15	of	of	ADP
ap-1708	100	16	kb	kb	PROPN
ap-1708	100	17	modules	module	NOUN
ap-1708	100	18	in	in	ADP
ap-1708	100	19	their	their	PRON
ap-1708	100	20	x	x	NOUN
ap-1708	100	21	-	-	NOUN
ap-1708	100	22	ray	ray	NOUN
ap-1708	100	23	facility	facility	NOUN
ap-1708	100	24	.	.	PUNCT
ap-1708	101	1	vt	vt	PROPN
ap-1708	101	2	acknowledges	acknowledge	VERB
ap-1708	101	3	the	the	DET
ap-1708	101	4	meys	mey	NOUN
ap-1708	101	5	esf	esf	PROPN
ap-1708	101	6	project	project	NOUN
ap-1708	101	7	cz.1.07/2.3.00/20.0092	cz.1.07/2.3.00/20.0092	PROPN
ap-1708	101	8	,	,	PUNCT
ap-1708	101	9	under	under	ADP
ap-1708	101	10	the	the	DET
ap-1708	101	11	title	title	NOUN
ap-1708	101	12	“	"	PUNCT
ap-1708	101	13	bioopt	bioopt	VERB
ap-1708	101	14	-	-	PUNCT
ap-1708	101	15	xuv	xuv	NOUN
ap-1708	101	16	research	research	NOUN
ap-1708	101	17	team	team	NOUN
ap-1708	101	18	advancement	advancement	NOUN
ap-1708	101	19	at	at	ADP
ap-1708	101	20	the	the	DET
ap-1708	101	21	faculty	faculty	NOUN
ap-1708	101	22	of	of	ADP
ap-1708	101	23	biomedical	biomedical	ADJ
ap-1708	101	24	engineering	engineering	NOUN
ap-1708	101	25	,	,	PUNCT
ap-1708	101	26	czech	czech	PROPN
ap-1708	101	27	technical	technical	PROPN
ap-1708	101	28	university	university	PROPN
ap-1708	101	29	in	in	ADP
ap-1708	101	30	prague	prague	PROPN
ap-1708	101	31	”	"	PUNCT
ap-1708	101	32	references	reference	NOUN
ap-1708	101	33	[	[	X
ap-1708	101	34	1	1	NUM
ap-1708	101	35	]	]	PUNCT
ap-1708	101	36	hudec	hudec	PROPN
ap-1708	101	37	r.	r.	PROPN
ap-1708	101	38	,	,	PUNCT
ap-1708	101	39	valnicek	valnicek	PROPN
ap-1708	101	40	b.	b.	PROPN
ap-1708	101	41	,	,	PUNCT
ap-1708	101	42	cervencl	cervencl	PROPN
ap-1708	101	43	j.	j.	PROPN
ap-1708	101	44	et	et	PROPN
ap-1708	101	45	al	al	PROPN
ap-1708	101	46	.	.	PROPN
ap-1708	101	47	1991	1991	NUM
ap-1708	101	48	,	,	PUNCT
ap-1708	101	49	spie	spie	NOUN
ap-1708	101	50	,	,	PUNCT
ap-1708	101	51	1343	1343	NUM
ap-1708	101	52	,	,	PUNCT
ap-1708	101	53	162	162	NUM
ap-1708	101	54	.	.	PUNCT
ap-1708	102	1	[	[	X
ap-1708	102	2	2	2	NUM
ap-1708	102	3	]	]	PUNCT
ap-1708	102	4	hudec	hudec	PROPN
ap-1708	102	5	r.	r.	PROPN
ap-1708	102	6	,	,	PUNCT
ap-1708	102	7	pina	pina	PROPN
ap-1708	102	8	l.	l.	PROPN
ap-1708	102	9	,	,	PUNCT
ap-1708	102	10	inneman	inneman	NOUN
ap-1708	102	11	a.	a.	NOUN
ap-1708	102	12	1999	1999	NUM
ap-1708	102	13	,	,	PUNCT
ap-1708	102	14	spie	spie	NOUN
ap-1708	102	15	,	,	PUNCT
ap-1708	102	16	3766	3766	NUM
ap-1708	102	17	,	,	PUNCT
ap-1708	102	18	62	62	NUM
ap-1708	102	19	.	.	PUNCT
ap-1708	103	1	[	[	X
ap-1708	103	2	3	3	X
ap-1708	103	3	]	]	X
ap-1708	103	4	hudec	hudec	PROPN
ap-1708	103	5	r.	r.	PROPN
ap-1708	103	6	,	,	PUNCT
ap-1708	103	7	pina	pina	PROPN
ap-1708	103	8	l.	l.	PROPN
ap-1708	103	9	,	,	PUNCT
ap-1708	103	10	inneman	inneman	NOUN
ap-1708	103	11	a.	a.	PROPN
ap-1708	103	12	2000	2000	NUM
ap-1708	103	13	,	,	PUNCT
ap-1708	103	14	spie	spie	NOUN
ap-1708	103	15	,	,	PUNCT
ap-1708	103	16	4012	4012	NUM
ap-1708	103	17	,	,	PUNCT
ap-1708	103	18	422	422	NUM
ap-1708	103	19	.	.	PUNCT
ap-1708	104	1	[	[	X
ap-1708	104	2	4	4	X
ap-1708	104	3	]	]	X
ap-1708	104	4	hudec	hudec	PROPN
ap-1708	104	5	r.	r.	PROPN
ap-1708	104	6	,	,	PUNCT
ap-1708	104	7	inneman	inneman	PROPN
ap-1708	104	8	a.	a.	PROPN
ap-1708	104	9	,	,	PUNCT
ap-1708	104	10	pina	pina	PROPN
ap-1708	104	11	l.	l.	PROPN
ap-1708	104	12	2001	2001	NUM
ap-1708	104	13	,	,	PUNCT
ap-1708	104	14	in	in	ADP
ap-1708	104	15	lobster	lobster	NOUN
ap-1708	104	16	-	-	PUNCT
ap-1708	104	17	eye	eye	NOUN
ap-1708	104	18	:	:	PUNCT
ap-1708	104	19	novel	novel	NOUN
ap-1708	104	20	x	x	NOUN
ap-1708	104	21	-	-	NOUN
ap-1708	104	22	ray	ray	NOUN
ap-1708	104	23	telescopes	telescope	NOUN
ap-1708	104	24	for	for	ADP
ap-1708	104	25	the	the	DET
ap-1708	104	26	21st	21st	ADJ
ap-1708	104	27	century	century	NOUN
ap-1708	104	28	,	,	PUNCT
ap-1708	104	29	new	new	ADJ
ap-1708	104	30	century	century	NOUN
ap-1708	104	31	of	of	ADP
ap-1708	104	32	x	x	NOUN
ap-1708	104	33	-	-	NOUN
ap-1708	104	34	ray	ray	NOUN
ap-1708	104	35	astronomy	astronomy	NOUN
ap-1708	104	36	,	,	PUNCT
ap-1708	104	37	asp	asp	PROPN
ap-1708	104	38	conf	conf	NOUN
ap-1708	104	39	.	.	PUNCT
ap-1708	105	1	proc	proc	PROPN
ap-1708	105	2	.	.	PROPN
ap-1708	105	3	,	,	PUNCT
ap-1708	105	4	251	251	NUM
ap-1708	105	5	,	,	PUNCT
ap-1708	105	6	542	542	NUM
ap-1708	105	7	.	.	PUNCT
ap-1708	106	1	[	[	X
ap-1708	106	2	5	5	NUM
ap-1708	106	3	]	]	PUNCT
ap-1708	106	4	hudec	hudec	PROPN
ap-1708	106	5	r.	r.	PROPN
ap-1708	106	6	,	,	PUNCT
ap-1708	106	7	pina	pina	PROPN
ap-1708	106	8	l.	l.	PROPN
ap-1708	106	9	,	,	PUNCT
ap-1708	106	10	inneman	inneman	NOUN
ap-1708	106	11	a.	a.	PROPN
ap-1708	106	12	et	et	PROPN
ap-1708	106	13	al	al	PROPN
ap-1708	106	14	.	.	PROPN
ap-1708	106	15	2005	2005	NUM
ap-1708	106	16	,	,	PUNCT
ap-1708	106	17	spie	spie	NOUN
ap-1708	106	18	,	,	PUNCT
ap-1708	106	19	5900	5900	NUM
ap-1708	106	20	,	,	PUNCT
ap-1708	106	21	276	276	NUM
ap-1708	106	22	.	.	PUNCT
ap-1708	107	1	[	[	X
ap-1708	107	2	6	6	NUM
ap-1708	107	3	]	]	PUNCT
ap-1708	107	4	inneman	inneman	NOUN
ap-1708	107	5	a.	a.	NOUN
ap-1708	107	6	,	,	PUNCT
ap-1708	107	7	hudec	hudec	PROPN
ap-1708	107	8	r.	r.	PROPN
ap-1708	107	9	,	,	PUNCT
ap-1708	107	10	pina	pina	PROPN
ap-1708	107	11	l.	l.	PROPN
ap-1708	107	12	,	,	PUNCT
ap-1708	107	13	gorenstein	gorenstein	ADJ
ap-1708	107	14	p.	p.	NOUN
ap-1708	107	15	1999	1999	NUM
ap-1708	107	16	,	,	PUNCT
ap-1708	107	17	spie	spie	NOUN
ap-1708	107	18	,	,	PUNCT
ap-1708	107	19	3766	3766	NUM
ap-1708	107	20	,	,	PUNCT
ap-1708	107	21	72	72	NUM
ap-1708	107	22	.	.	PUNCT
ap-1708	108	1	[	[	X
ap-1708	108	2	7	7	NUM
ap-1708	108	3	]	]	X
ap-1708	108	4	inneman	inneman	NOUN
ap-1708	108	5	a.	a.	NOUN
ap-1708	108	6	,	,	PUNCT
ap-1708	108	7	hudec	hudec	PROPN
ap-1708	108	8	r.	r.	PROPN
ap-1708	108	9	,	,	PUNCT
ap-1708	108	10	pina	pina	PROPN
ap-1708	108	11	l.	l.	PROPN
ap-1708	108	12	2000	2000	NUM
ap-1708	108	13	,	,	PUNCT
ap-1708	108	14	spie	spie	NOUN
ap-1708	108	15	,	,	PUNCT
ap-1708	108	16	4138	4138	NUM
ap-1708	108	17	,	,	PUNCT
ap-1708	108	18	94	94	NUM
ap-1708	108	19	.	.	PUNCT
ap-1708	109	1	[	[	X
ap-1708	109	2	8	8	NUM
ap-1708	109	3	]	]	PUNCT
ap-1708	109	4	kirkpatrick	kirkpatrick	PROPN
ap-1708	109	5	p.	p.	PROPN
ap-1708	109	6	and	and	CCONJ
ap-1708	109	7	baez	baez	PROPN
ap-1708	109	8	a.	a.	PROPN
ap-1708	109	9	v.	v.	PROPN
ap-1708	109	10	,	,	PUNCT
ap-1708	109	11	j.	j.	PROPN
ap-1708	109	12	opt	opt	PROPN
ap-1708	109	13	.	.	PUNCT
ap-1708	110	1	soc	soc	PROPN
ap-1708	110	2	.	.	PUNCT
ap-1708	111	1	am	be	AUX
ap-1708	111	2	.	.	PUNCT
ap-1708	112	1	38	38	NUM
ap-1708	112	2	,	,	PUNCT
ap-1708	112	3	766	766	NUM
ap-1708	112	4	(	(	PUNCT
ap-1708	112	5	1948	1948	NUM
ap-1708	112	6	)	)	PUNCT
ap-1708	112	7	.	.	PUNCT
ap-1708	113	1	[	[	X
ap-1708	113	2	9	9	NUM
ap-1708	113	3	]	]	X
ap-1708	113	4	marsch	marsch	PROPN
ap-1708	113	5	h.	h.	PROPN
ap-1708	113	6	et	et	PROPN
ap-1708	113	7	al	al	PROPN
ap-1708	113	8	.	.	PROPN
ap-1708	113	9	1997	1997	NUM
ap-1708	113	10	,	,	PUNCT
ap-1708	113	11	introduction	introduction	NOUN
ap-1708	113	12	to	to	ADP
ap-1708	113	13	carbon	carbon	NOUN
ap-1708	113	14	technologies	technology	NOUN
ap-1708	113	15	,	,	PUNCT
ap-1708	113	16	university	university	NOUN
ap-1708	113	17	of	of	ADP
ap-1708	113	18	alicante	alicante	PROPN
ap-1708	113	19	.	.	PUNCT
ap-1708	114	1	[	[	X
ap-1708	114	2	10]white	10]white	NUM
ap-1708	114	3	,	,	PUNCT
ap-1708	114	4	n.	n.	PROPN
ap-1708	114	5	e.	e.	PROPN
ap-1708	114	6	;	;	PUNCT
ap-1708	114	7	hornschemeier	hornschemeier	NOUN
ap-1708	114	8	,	,	PUNCT
ap-1708	114	9	a.	a.	PROPN
ap-1708	114	10	e.	e.	PROPN
ap-1708	114	11	2009	2009	NUM
ap-1708	114	12	,	,	PUNCT
ap-1708	114	13	bulletin	bulletin	NOUN
ap-1708	114	14	of	of	ADP
ap-1708	114	15	the	the	DET
ap-1708	114	16	american	american	ADJ
ap-1708	114	17	astronomical	astronomical	ADJ
ap-1708	114	18	society	society	NOUN
ap-1708	114	19	,	,	PUNCT
ap-1708	114	20	vol	vol	NOUN
ap-1708	114	21	.	.	PROPN
ap-1708	114	22	41	41	NUM
ap-1708	114	23	,	,	PUNCT
ap-1708	114	24	p.388	p.388	X
ap-1708	114	25	.	.	PUNCT
ap-1708	115	1	[	[	X
ap-1708	115	2	11	11	NUM
ap-1708	115	3	]	]	X
ap-1708	115	4	white	white	ADJ
ap-1708	115	5	,	,	PUNCT
ap-1708	115	6	n.	n.	PROPN
ap-1708	115	7	e.	e.	PROPN
ap-1708	115	8	;	;	PUNCT
ap-1708	115	9	parmar	parmar	PROPN
ap-1708	115	10	,	,	PUNCT
ap-1708	115	11	a.	a.	NOUN
ap-1708	115	12	;	;	PUNCT
ap-1708	115	13	kunieda	kunieda	PROPN
ap-1708	115	14	,	,	PUNCT
ap-1708	115	15	h.	h.	PROPN
ap-1708	115	16	;	;	PUNCT
ap-1708	115	17	international	international	ADJ
ap-1708	115	18	x	x	ADJ
ap-1708	115	19	-	-	NOUN
ap-1708	115	20	ray	ray	NOUN
ap-1708	115	21	observatory	observatory	ADJ
ap-1708	115	22	team	team	NOUN
ap-1708	115	23	,	,	PUNCT
ap-1708	115	24	2009	2009	NUM
ap-1708	115	25	,	,	PUNCT
ap-1708	115	26	bulletin	bulletin	NOUN
ap-1708	115	27	of	of	ADP
ap-1708	115	28	the	the	DET
ap-1708	115	29	american	american	ADJ
ap-1708	115	30	astronomical	astronomical	ADJ
ap-1708	115	31	society	society	NOUN
ap-1708	115	32	,	,	PUNCT
ap-1708	115	33	vol	vol	NOUN
ap-1708	115	34	.	.	PROPN
ap-1708	115	35	41	41	NUM
ap-1708	115	36	,	,	PUNCT
ap-1708	115	37	p.357	p.357	ADV
ap-1708	115	38	.	.	PUNCT
ap-1708	116	1	[	[	X
ap-1708	116	2	12	12	NUM
ap-1708	116	3	]	]	X
ap-1708	116	4	http://ixo.gsfc.nasa.gov	http://ixo.gsfc.nasa.gov	PROPN
ap-1708	116	5	[	[	X
ap-1708	116	6	13]bavdaz	13]bavdaz	NUM
ap-1708	116	7	m.	m.	NOUN
ap-1708	116	8	et	et	PROPN
ap-1708	116	9	al	al	PROPN
ap-1708	116	10	.	.	PROPN
ap-1708	116	11	,	,	PUNCT
ap-1708	116	12	2010	2010	NUM
ap-1708	116	13	,	,	PUNCT
ap-1708	116	14	proceedings	proceeding	NOUN
ap-1708	116	15	of	of	ADP
ap-1708	116	16	the	the	DET
ap-1708	116	17	spie	spie	NOUN
ap-1708	116	18	,	,	PUNCT
ap-1708	116	19	volume	volume	NOUN
ap-1708	116	20	7732	7732	NUM
ap-1708	116	21	,	,	PUNCT
ap-1708	116	22	pp	pp	ADV
ap-1708	116	23	.	.	PUNCT
ap-1708	117	1	77321e-77321e-9	77321e-77321e-9	NOUN
ap-1708	117	2	.	.	PUNCT
ap-1708	118	1	[	[	X
ap-1708	118	2	14]zhang	14]zhang	NUM
ap-1708	118	3	w.w	w.w	PROPN
ap-1708	118	4	.	.	PROPN
ap-1708	118	5	et	et	PROPN
ap-1708	118	6	al	al	PROPN
ap-1708	118	7	.	.	PROPN
ap-1708	118	8	2010	2010	NUM
ap-1708	118	9	,	,	PUNCT
ap-1708	118	10	proceedings	proceeding	NOUN
ap-1708	118	11	of	of	ADP
ap-1708	118	12	the	the	DET
ap-1708	118	13	spie	spie	NOUN
ap-1708	118	14	,	,	PUNCT
ap-1708	118	15	volume	volume	NOUN
ap-1708	118	16	7732	7732	NUM
ap-1708	118	17	,	,	PUNCT
ap-1708	118	18	pp	pp	ADV
ap-1708	118	19	.	.	PUNCT
ap-1708	119	1	77321g-77321g-8	77321g-77321g-8	X
ap-1708	119	2	.	.	PUNCT
ap-1708	120	1	[	[	X
ap-1708	120	2	15	15	NUM
ap-1708	120	3	]	]	X
ap-1708	120	4	ghigo	ghigo	ADJ
ap-1708	120	5	m.	m.	NOUN
ap-1708	120	6	et	et	PROPN
ap-1708	120	7	al	al	PROPN
ap-1708	120	8	.	.	PROPN
ap-1708	120	9	2010	2010	NUM
ap-1708	120	10	,	,	PUNCT
ap-1708	120	11	proceedings	proceeding	NOUN
ap-1708	120	12	of	of	ADP
ap-1708	120	13	the	the	DET
ap-1708	120	14	spie	spie	NOUN
ap-1708	120	15	,	,	PUNCT
ap-1708	120	16	volume	volume	NOUN
ap-1708	120	17	7732	7732	NUM
ap-1708	120	18	,	,	PUNCT
ap-1708	120	19	pp	pp	ADV
ap-1708	120	20	.	.	PUNCT
ap-1708	121	1	77320c-77320c-12	77320c-77320c-12	NOUN
ap-1708	121	2	.	.	PUNCT
ap-1708	122	1	[	[	X
ap-1708	122	2	16	16	NUM
ap-1708	122	3	]	]	PUNCT
ap-1708	122	4	http://www.mpe.mpg.de/athena/home.php?lang=en	http://www.mpe.mpg.de/athena/home.php?lang=en	X
ap-1708	122	5	37	37	NUM
ap-1708	122	6	http://ixo.gsfc.nasa.gov	http://ixo.gsfc.nasa.gov	PROPN
ap-1708	122	7	http://www.mpe.mpg.de/athena/home.php?lang=en	http://www.mpe.mpg.de/athena/home.php?lang=en	PROPN
ap-1708	122	8	acta	acta	PROPN
ap-1708	122	9	polytechnica	polytechnica	PROPN
ap-1708	122	10	53(1):33	53(1):33	PROPN
ap-1708	122	11	-	-	PUNCT
ap-1708	122	12	-37	-37	NOUN
ap-1708	122	13	,	,	PUNCT
ap-1708	122	14	2013	2013	NUM
ap-1708	122	15	1	1	NUM
ap-1708	122	16	introduction	introduction	NOUN
ap-1708	122	17	2	2	NUM
ap-1708	122	18	progress	progress	NOUN
ap-1708	122	19	in	in	ADP
ap-1708	122	20	silicon	silicon	NOUN
ap-1708	122	21	wafer	wafer	NOUN
ap-1708	122	22	shaping	shape	VERB
ap-1708	122	23	3	3	NUM
ap-1708	122	24	advanced	advanced	ADJ
ap-1708	122	25	kirkpatrick	kirkpatrick	NOUN
ap-1708	122	26	-	-	PUNCT
ap-1708	122	27	baez	baez	PROPN
ap-1708	122	28	x	x	PROPN
ap-1708	122	29	-	-	NOUN
ap-1708	122	30	ray	ray	NOUN
ap-1708	122	31	test	test	NOUN
ap-1708	122	32	modules	module	NOUN
ap-1708	122	33	4	4	NUM
ap-1708	122	34	multi	multi	NOUN
ap-1708	122	35	foil	foil	NOUN
ap-1708	122	36	(	(	PUNCT
ap-1708	122	37	mfo	mfo	PROPN
ap-1708	122	38	)	)	PUNCT
ap-1708	122	39	x	x	NOUN
ap-1708	122	40	-	-	NOUN
ap-1708	122	41	ray	ray	NOUN
ap-1708	122	42	optics	optic	NOUN
ap-1708	122	43	5	5	NUM
ap-1708	122	44	active	active	ADJ
ap-1708	122	45	multi	multi	ADJ
ap-1708	122	46	foils	foil	NOUN
ap-1708	122	47	x	x	ADJ
ap-1708	122	48	-	-	NOUN
ap-1708	122	49	ray	ray	NOUN
ap-1708	122	50	optics	optic	NOUN
ap-1708	122	51	6	6	NUM
ap-1708	122	52	conclusion	conclusion	NOUN
ap-1708	122	53	acknowledgements	acknowledgement	NOUN
ap-1708	122	54	references	reference	NOUN