id	sid	tid	token	lemma	pos
ap-1727	1	1	acta	acta	PROPN
ap-1727	1	2	polytechnica	polytechnica	PROPN
ap-1727	1	3	acta	acta	PROPN
ap-1727	1	4	polytechnica	polytechnica	PROPN
ap-1727	1	5	53(2):117–122	53(2):117–122	PROPN
ap-1727	1	6	,	,	PUNCT
ap-1727	1	7	2013	2013	NUM
ap-1727	1	8	©	©	PROPN
ap-1727	1	9	czech	czech	PROPN
ap-1727	1	10	technical	technical	PROPN
ap-1727	1	11	university	university	PROPN
ap-1727	1	12	in	in	ADP
ap-1727	1	13	prague	prague	PROPN
ap-1727	1	14	,	,	PUNCT
ap-1727	1	15	2013	2013	NUM
ap-1727	1	16	available	available	ADJ
ap-1727	1	17	online	online	ADV
ap-1727	1	18	at	at	ADP
ap-1727	1	19	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-1727	1	20	the	the	DET
ap-1727	1	21	formation	formation	NOUN
ap-1727	1	22	of	of	ADP
ap-1727	1	23	a	a	DET
ap-1727	1	24	power	power	NOUN
ap-1727	1	25	multi	multi	ADJ
ap-1727	1	26	-	-	ADJ
ap-1727	1	27	pulse	pulse	ADJ
ap-1727	1	28	extreme	extreme	ADJ
ap-1727	1	29	ultraviolet	ultraviolet	ADJ
ap-1727	1	30	radiation	radiation	NOUN
ap-1727	1	31	in	in	ADP
ap-1727	1	32	the	the	DET
ap-1727	1	33	pulse	pulse	NOUN
ap-1727	1	34	plasma	plasma	NOUN
ap-1727	1	35	diode	diode	NOUN
ap-1727	1	36	of	of	ADP
ap-1727	1	37	low	low	ADJ
ap-1727	1	38	pressure	pressure	NOUN
ap-1727	1	39	ievgeniia	ievgeniia	NOUN
ap-1727	1	40	v.	v.	ADP
ap-1727	1	41	borguna,∗	borguna,∗	NOUN
ap-1727	1	42	,	,	PUNCT
ap-1727	1	43	mykola	mykola	PROPN
ap-1727	1	44	o.	o.	PROPN
ap-1727	1	45	azarenkova	azarenkova	PROPN
ap-1727	1	46	,	,	PUNCT
ap-1727	1	47	ahmed	ahmed	PROPN
ap-1727	1	48	hassaneinb	hassaneinb	PROPN
ap-1727	1	49	,	,	PUNCT
ap-1727	1	50	oleksandr	oleksandr	PROPN
ap-1727	1	51	f.	f.	PROPN
ap-1727	1	52	tseluykoa	tseluykoa	PROPN
ap-1727	1	53	,	,	PUNCT
ap-1727	1	54	vasyl	vasyl	NOUN
ap-1727	1	55	i.	i.	PROPN
ap-1727	1	56	maslova	maslova	PROPN
ap-1727	1	57	,	,	PUNCT
ap-1727	1	58	dmitro	dmitro	PROPN
ap-1727	1	59	l.	l.	PROPN
ap-1727	1	60	ryabchikovka	ryabchikovka	PROPN
ap-1727	1	61	a	a	DET
ap-1727	1	62	karazin	karazin	PROPN
ap-1727	1	63	kharkiv	kharkiv	PROPN
ap-1727	1	64	national	national	PROPN
ap-1727	1	65	university	university	PROPN
ap-1727	1	66	,	,	PUNCT
ap-1727	1	67	pl	pl	PROPN
ap-1727	1	68	.	.	PROPN
ap-1727	1	69	svobody	svobody	PROPN
ap-1727	1	70	4	4	NUM
ap-1727	1	71	,	,	PUNCT
ap-1727	1	72	kharkov	kharkov	NOUN
ap-1727	1	73	61022	61022	NUM
ap-1727	1	74	,	,	PUNCT
ap-1727	1	75	ukraine	ukraine	PROPN
ap-1727	1	76	b	b	PROPN
ap-1727	1	77	school	school	NOUN
ap-1727	1	78	of	of	ADP
ap-1727	1	79	nuclear	nuclear	ADJ
ap-1727	1	80	engineering	engineering	NOUN
ap-1727	1	81	,	,	PUNCT
ap-1727	1	82	purdue	purdue	PROPN
ap-1727	1	83	university	university	NOUN
ap-1727	1	84	,	,	PUNCT
ap-1727	1	85	400	400	NUM
ap-1727	1	86	central	central	ADJ
ap-1727	1	87	drive	drive	NOUN
ap-1727	1	88	,	,	PUNCT
ap-1727	1	89	west	west	PROPN
ap-1727	1	90	lafayette	lafayette	PROPN
ap-1727	1	91	,	,	PUNCT
ap-1727	1	92	in	in	ADP
ap-1727	1	93	47907–2017	47907–2017	NUM
ap-1727	1	94	,	,	PUNCT
ap-1727	1	95	usa	usa	PROPN
ap-1727	1	96	∗	∗	PROPN
ap-1727	1	97	corresponding	correspond	VERB
ap-1727	1	98	author	author	NOUN
ap-1727	1	99	:	:	PUNCT
ap-1727	1	100	ievgeniia.borgun@mail.ru	ievgeniia.borgun@mail.ru	PROPN
ap-1727	1	101	abstract	abstract	ADJ
ap-1727	1	102	.	.	PUNCT
ap-1727	2	1	in	in	ADP
ap-1727	2	2	this	this	DET
ap-1727	2	3	paper	paper	NOUN
ap-1727	2	4	results	result	NOUN
ap-1727	2	5	are	be	AUX
ap-1727	2	6	presented	present	VERB
ap-1727	2	7	on	on	ADP
ap-1727	2	8	experimental	experimental	ADJ
ap-1727	2	9	studies	study	NOUN
ap-1727	2	10	of	of	ADP
ap-1727	2	11	the	the	DET
ap-1727	2	12	temporal	temporal	ADJ
ap-1727	2	13	characteristics	characteristic	NOUN
ap-1727	2	14	of	of	ADP
ap-1727	2	15	spike	spike	ADJ
ap-1727	2	16	extreme	extreme	ADJ
ap-1727	2	17	ultraviolet	ultraviolet	NOUN
ap-1727	2	18	(	(	PUNCT
ap-1727	2	19	euv	euv	NOUN
ap-1727	2	20	)	)	PUNCT
ap-1727	2	21	radiation	radiation	NOUN
ap-1727	2	22	in	in	ADP
ap-1727	2	23	the	the	DET
ap-1727	2	24	spectral	spectral	ADJ
ap-1727	2	25	range	range	NOUN
ap-1727	2	26	of	of	ADP
ap-1727	2	27	12.2	12.2	NUM
ap-1727	2	28	÷	÷	NUM
ap-1727	2	29	15.8	15.8	NUM
ap-1727	2	30	nm	nm	NOUN
ap-1727	2	31	from	from	ADP
ap-1727	2	32	the	the	DET
ap-1727	2	33	anode	anode	NOUN
ap-1727	2	34	region	region	NOUN
ap-1727	2	35	of	of	ADP
ap-1727	2	36	high	high	ADJ
ap-1727	2	37	-	-	PUNCT
ap-1727	2	38	current	current	NOUN
ap-1727	2	39	(	(	PUNCT
ap-1727	2	40	i	i	NOUN
ap-1727	2	41	=	=	NUM
ap-1727	2	42	40	40	NUM
ap-1727	2	43	ka	ka	NOUN
ap-1727	2	44	)	)	PUNCT
ap-1727	2	45	pulsed	pulse	VERB
ap-1727	2	46	discharges	discharge	NOUN
ap-1727	2	47	in	in	ADP
ap-1727	2	48	tin	tin	NOUN
ap-1727	2	49	vapor	vapor	NOUN
ap-1727	2	50	.	.	PUNCT
ap-1727	3	1	it	it	PRON
ap-1727	3	2	is	be	AUX
ap-1727	3	3	observed	observe	VERB
ap-1727	3	4	that	that	SCONJ
ap-1727	3	5	the	the	DET
ap-1727	3	6	intense	intense	ADJ
ap-1727	3	7	multi	multi	ADJ
ap-1727	3	8	-	-	ADJ
ap-1727	3	9	spike	spike	ADJ
ap-1727	3	10	radiation	radiation	NOUN
ap-1727	3	11	in	in	ADP
ap-1727	3	12	this	this	DET
ap-1727	3	13	range	range	NOUN
ap-1727	3	14	arises	arise	VERB
ap-1727	3	15	at	at	ADP
ap-1727	3	16	an	an	DET
ap-1727	3	17	inductive	inductive	ADJ
ap-1727	3	18	stage	stage	NOUN
ap-1727	3	19	of	of	ADP
ap-1727	3	20	the	the	DET
ap-1727	3	21	discharge	discharge	NOUN
ap-1727	3	22	.	.	PUNCT
ap-1727	4	1	it	it	PRON
ap-1727	4	2	has	have	AUX
ap-1727	4	3	been	be	AUX
ap-1727	4	4	shown	show	VERB
ap-1727	4	5	that	that	SCONJ
ap-1727	4	6	the	the	DET
ap-1727	4	7	radiation	radiation	NOUN
ap-1727	4	8	spikes	spike	NOUN
ap-1727	4	9	correlate	correlate	VERB
ap-1727	4	10	with	with	ADP
ap-1727	4	11	the	the	DET
ap-1727	4	12	sharp	sharp	ADJ
ap-1727	4	13	increase	increase	NOUN
ap-1727	4	14	of	of	ADP
ap-1727	4	15	active	active	ADJ
ap-1727	4	16	resistance	resistance	NOUN
ap-1727	4	17	and	and	CCONJ
ap-1727	4	18	of	of	ADP
ap-1727	4	19	pumped	pump	VERB
ap-1727	4	20	power	power	NOUN
ap-1727	4	21	,	,	PUNCT
ap-1727	4	22	due	due	ADP
ap-1727	4	23	to	to	ADP
ap-1727	4	24	plasma	plasma	NOUN
ap-1727	4	25	heating	heating	NOUN
ap-1727	4	26	by	by	ADP
ap-1727	4	27	an	an	DET
ap-1727	4	28	electron	electron	NOUN
ap-1727	4	29	beam	beam	NOUN
ap-1727	4	30	,	,	PUNCT
ap-1727	4	31	formed	form	VERB
ap-1727	4	32	in	in	ADP
ap-1727	4	33	the	the	DET
ap-1727	4	34	double	double	ADJ
ap-1727	4	35	layer	layer	NOUN
ap-1727	4	36	of	of	ADP
ap-1727	4	37	charged	charge	VERB
ap-1727	4	38	particles	particle	NOUN
ap-1727	4	39	.	.	PUNCT
ap-1727	5	1	it	it	PRON
ap-1727	5	2	has	have	AUX
ap-1727	5	3	been	be	AUX
ap-1727	5	4	observed	observe	VERB
ap-1727	5	5	that	that	SCONJ
ap-1727	5	6	for	for	ADP
ap-1727	5	7	large	large	ADJ
ap-1727	5	8	number	number	NOUN
ap-1727	5	9	of	of	ADP
ap-1727	5	10	spikes	spike	NOUN
ap-1727	5	11	the	the	DET
ap-1727	5	12	conversion	conversion	NOUN
ap-1727	5	13	efficiency	efficiency	NOUN
ap-1727	5	14	of	of	ADP
ap-1727	5	15	pumped	pump	VERB
ap-1727	5	16	energy	energy	NOUN
ap-1727	5	17	into	into	ADP
ap-1727	5	18	radiation	radiation	NOUN
ap-1727	5	19	at	at	ADP
ap-1727	5	20	double	double	ADJ
ap-1727	5	21	layer	layer	NOUN
ap-1727	5	22	formation	formation	NOUN
ap-1727	5	23	is	be	AUX
ap-1727	5	24	essentially	essentially	ADV
ap-1727	5	25	higher	high	ADJ
ap-1727	5	26	in	in	ADP
ap-1727	5	27	comparison	comparison	NOUN
ap-1727	5	28	with	with	ADP
ap-1727	5	29	collisional	collisional	ADJ
ap-1727	5	30	heating	heating	NOUN
ap-1727	5	31	.	.	PUNCT
ap-1727	6	1	keywords	keyword	NOUN
ap-1727	6	2	:	:	PUNCT
ap-1727	6	3	euv	euv	PRON
ap-1727	6	4	sources	source	NOUN
ap-1727	6	5	,	,	PUNCT
ap-1727	6	6	plasma	plasma	NOUN
ap-1727	6	7	discharge	discharge	NOUN
ap-1727	6	8	,	,	PUNCT
ap-1727	6	9	z	z	NOUN
ap-1727	6	10	–	–	PUNCT
ap-1727	6	11	pinch	pinch	NOUN
ap-1727	6	12	,	,	PUNCT
ap-1727	6	13	euv	euv	DET
ap-1727	6	14	radiation	radiation	NOUN
ap-1727	6	15	,	,	PUNCT
ap-1727	6	16	conversion	conversion	NOUN
ap-1727	6	17	efficiency	efficiency	NOUN
ap-1727	6	18	.	.	PUNCT
ap-1727	7	1	1	1	X
ap-1727	7	2	.	.	X
ap-1727	7	3	introduction	introduction	NOUN
ap-1727	7	4	this	this	DET
ap-1727	7	5	study	study	NOUN
ap-1727	7	6	is	be	AUX
ap-1727	7	7	devoted	devote	VERB
ap-1727	7	8	to	to	ADP
ap-1727	7	9	the	the	DET
ap-1727	7	10	investigation	investigation	NOUN
ap-1727	7	11	of	of	ADP
ap-1727	7	12	phenomena	phenomena	PROPN
ap-1727	7	13	,	,	PUNCT
ap-1727	7	14	occurring	occur	VERB
ap-1727	7	15	in	in	ADP
ap-1727	7	16	a	a	DET
ap-1727	7	17	high	high	ADJ
ap-1727	7	18	-	-	PUNCT
ap-1727	7	19	current	current	ADJ
ap-1727	7	20	pulse	pulse	NOUN
ap-1727	7	21	plasma	plasma	NOUN
ap-1727	7	22	diode	diode	NOUN
ap-1727	7	23	,	,	PUNCT
ap-1727	7	24	where	where	SCONJ
ap-1727	7	25	the	the	DET
ap-1727	7	26	plasma	plasma	NOUN
ap-1727	7	27	with	with	ADP
ap-1727	7	28	tin	tin	NOUN
ap-1727	7	29	multi	multi	ADJ
ap-1727	7	30	-	-	ADJ
ap-1727	7	31	charged	charge	VERB
ap-1727	7	32	ions	ion	NOUN
ap-1727	7	33	generates	generate	VERB
ap-1727	7	34	extreme	extreme	ADJ
ap-1727	7	35	ultraviolet	ultraviolet	NOUN
ap-1727	7	36	(	(	PUNCT
ap-1727	7	37	euv	euv	NOUN
ap-1727	7	38	)	)	PUNCT
ap-1727	7	39	.	.	PUNCT
ap-1727	8	1	one	one	NUM
ap-1727	8	2	of	of	ADP
ap-1727	8	3	the	the	DET
ap-1727	8	4	methods	method	NOUN
ap-1727	8	5	for	for	ADP
ap-1727	8	6	the	the	DET
ap-1727	8	7	creation	creation	NOUN
ap-1727	8	8	of	of	ADP
ap-1727	8	9	high	high	ADJ
ap-1727	8	10	-	-	PUNCT
ap-1727	8	11	power	power	NOUN
ap-1727	8	12	euv	euv	NOUN
ap-1727	8	13	sources	source	NOUN
ap-1727	8	14	for	for	ADP
ap-1727	8	15	nanolithography	nanolithography	NOUN
ap-1727	8	16	is	be	AUX
ap-1727	8	17	an	an	DET
ap-1727	8	18	application	application	NOUN
ap-1727	8	19	of	of	ADP
ap-1727	8	20	high	high	ADJ
ap-1727	8	21	-	-	PUNCT
ap-1727	8	22	current	current	ADJ
ap-1727	8	23	discharges	discharge	NOUN
ap-1727	8	24	in	in	ADP
ap-1727	8	25	tin	tin	NOUN
ap-1727	8	26	vapor	vapor	NOUN
ap-1727	8	27	[	[	X
ap-1727	8	28	3	3	NUM
ap-1727	8	29	,	,	PUNCT
ap-1727	8	30	11	11	NUM
ap-1727	8	31	]	]	PUNCT
ap-1727	8	32	.	.	PUNCT
ap-1727	9	1	an	an	DET
ap-1727	9	2	emission	emission	NOUN
ap-1727	9	3	source	source	NOUN
ap-1727	9	4	based	base	VERB
ap-1727	9	5	on	on	ADP
ap-1727	9	6	the	the	DET
ap-1727	9	7	dense	dense	ADJ
ap-1727	9	8	plasma	plasma	NOUN
ap-1727	9	9	of	of	ADP
ap-1727	9	10	multi	multi	ADJ
ap-1727	9	11	-	-	ADJ
ap-1727	9	12	charged	charge	VERB
ap-1727	9	13	tin	tin	NOUN
ap-1727	9	14	ions	ion	NOUN
ap-1727	9	15	is	be	AUX
ap-1727	9	16	advantageous	advantageous	ADJ
ap-1727	9	17	against	against	ADP
ap-1727	9	18	gas	gas	NOUN
ap-1727	9	19	-	-	PUNCT
ap-1727	9	20	filled	fill	VERB
ap-1727	9	21	systems	system	NOUN
ap-1727	9	22	because	because	SCONJ
ap-1727	9	23	of	of	ADP
ap-1727	9	24	the	the	DET
ap-1727	9	25	expected	expect	VERB
ap-1727	9	26	higher	high	ADJ
ap-1727	9	27	conversion	conversion	NOUN
ap-1727	9	28	efficiency	efficiency	NOUN
ap-1727	9	29	[	[	X
ap-1727	9	30	7	7	X
ap-1727	9	31	]	]	PUNCT
ap-1727	9	32	and	and	CCONJ
ap-1727	9	33	is	be	AUX
ap-1727	9	34	capable	capable	ADJ
ap-1727	9	35	of	of	ADP
ap-1727	9	36	operating	operate	VERB
ap-1727	9	37	at	at	ADP
ap-1727	9	38	ultralow	ultralow	ADJ
ap-1727	9	39	pressures	pressure	NOUN
ap-1727	9	40	.	.	PUNCT
ap-1727	10	1	the	the	DET
ap-1727	10	2	latter	latter	ADJ
ap-1727	10	3	is	be	AUX
ap-1727	10	4	important	important	ADJ
ap-1727	10	5	for	for	ADP
ap-1727	10	6	probability	probability	NOUN
ap-1727	10	7	reduction	reduction	NOUN
ap-1727	10	8	of	of	ADP
ap-1727	10	9	parasitic	parasitic	ADJ
ap-1727	10	10	breakdowns	breakdown	NOUN
ap-1727	10	11	and	and	CCONJ
ap-1727	10	12	for	for	ADP
ap-1727	10	13	reduction	reduction	NOUN
ap-1727	10	14	of	of	ADP
ap-1727	10	15	losses	loss	NOUN
ap-1727	10	16	of	of	ADP
ap-1727	10	17	radiation	radiation	NOUN
ap-1727	10	18	in	in	ADP
ap-1727	10	19	optical	optical	ADJ
ap-1727	10	20	paths	path	NOUN
ap-1727	10	21	.	.	PUNCT
ap-1727	11	1	since	since	SCONJ
ap-1727	11	2	such	such	DET
ap-1727	11	3	a	a	DET
ap-1727	11	4	source	source	NOUN
ap-1727	11	5	is	be	AUX
ap-1727	11	6	required	require	VERB
ap-1727	11	7	to	to	PART
ap-1727	11	8	have	have	VERB
ap-1727	11	9	a	a	DET
ap-1727	11	10	rather	rather	ADV
ap-1727	11	11	high	high	ADJ
ap-1727	11	12	output	output	NOUN
ap-1727	11	13	power	power	NOUN
ap-1727	12	1	[	[	X
ap-1727	12	2	9	9	NUM
ap-1727	12	3	]	]	PUNCT
ap-1727	12	4	,	,	PUNCT
ap-1727	12	5	increasing	increase	VERB
ap-1727	12	6	the	the	DET
ap-1727	12	7	conversion	conversion	NOUN
ap-1727	12	8	efficiency	efficiency	NOUN
ap-1727	12	9	of	of	ADP
ap-1727	12	10	the	the	DET
ap-1727	12	11	supplied	supply	VERB
ap-1727	12	12	electric	electric	ADJ
ap-1727	12	13	power	power	NOUN
ap-1727	12	14	into	into	ADP
ap-1727	12	15	radiation	radiation	NOUN
ap-1727	12	16	is	be	AUX
ap-1727	12	17	an	an	DET
ap-1727	12	18	important	important	ADJ
ap-1727	12	19	goal	goal	NOUN
ap-1727	12	20	.	.	PUNCT
ap-1727	13	1	large	large	ADJ
ap-1727	13	2	conversion	conversion	NOUN
ap-1727	13	3	efficiency	efficiency	NOUN
ap-1727	13	4	of	of	ADP
ap-1727	13	5	the	the	DET
ap-1727	13	6	source	source	NOUN
ap-1727	13	7	is	be	AUX
ap-1727	13	8	predicted	predict	VERB
ap-1727	13	9	for	for	ADP
ap-1727	13	10	the	the	DET
ap-1727	13	11	tin	tin	NOUN
ap-1727	13	12	[	[	X
ap-1727	13	13	9	9	NUM
ap-1727	13	14	]	]	PUNCT
ap-1727	13	15	.	.	PUNCT
ap-1727	14	1	for	for	ADP
ap-1727	14	2	production	production	NOUN
ap-1727	14	3	of	of	ADP
ap-1727	14	4	highcontrast	highcontrast	PROPN
ap-1727	14	5	nonlinear	nonlinear	PROPN
ap-1727	14	6	photoresists	photoresist	NOUN
ap-1727	14	7	,	,	PUNCT
ap-1727	14	8	operating	operate	VERB
ap-1727	14	9	in	in	ADP
ap-1727	14	10	euv	euv	NOUN
ap-1727	14	11	range	range	NOUN
ap-1727	14	12	,	,	PUNCT
ap-1727	14	13	for	for	ADP
ap-1727	14	14	nanolithography	nanolithography	NOUN
ap-1727	14	15	above	above	ADP
ap-1727	14	16	-	-	PUNCT
ap-1727	14	17	threshold	threshold	NOUN
ap-1727	14	18	pulse	pulse	NOUN
ap-1727	14	19	intensities	intensity	NOUN
ap-1727	14	20	are	be	AUX
ap-1727	14	21	required	require	VERB
ap-1727	14	22	[	[	PUNCT
ap-1727	14	23	9	9	NUM
ap-1727	14	24	]	]	PUNCT
ap-1727	14	25	.	.	PUNCT
ap-1727	15	1	it	it	PRON
ap-1727	15	2	can	can	AUX
ap-1727	15	3	be	be	AUX
ap-1727	15	4	provided	provide	VERB
ap-1727	15	5	by	by	ADP
ap-1727	15	6	the	the	DET
ap-1727	15	7	narrow	narrow	ADJ
ap-1727	15	8	peak	peak	NOUN
ap-1727	15	9	pulses	pulse	NOUN
ap-1727	15	10	(	(	PUNCT
ap-1727	15	11	spikes	spike	NOUN
ap-1727	15	12	)	)	PUNCT
ap-1727	15	13	of	of	ADP
ap-1727	15	14	radiation	radiation	NOUN
ap-1727	15	15	.	.	PUNCT
ap-1727	16	1	this	this	DET
ap-1727	16	2	work	work	NOUN
ap-1727	16	3	is	be	AUX
ap-1727	16	4	aimed	aim	VERB
ap-1727	16	5	to	to	ADP
ap-1727	16	6	investigation	investigation	NOUN
ap-1727	16	7	of	of	ADP
ap-1727	16	8	the	the	DET
ap-1727	16	9	processes	process	NOUN
ap-1727	16	10	affecting	affect	VERB
ap-1727	16	11	the	the	DET
ap-1727	16	12	efficiency	efficiency	NOUN
ap-1727	16	13	of	of	ADP
ap-1727	16	14	radiation	radiation	NOUN
ap-1727	16	15	generation	generation	NOUN
ap-1727	16	16	in	in	ADP
ap-1727	16	17	highcurrent	highcurrent	ADJ
ap-1727	16	18	tin	tin	NOUN
ap-1727	16	19	-	-	PUNCT
ap-1727	16	20	vapor	vapor	NOUN
ap-1727	16	21	discharges	discharge	NOUN
ap-1727	16	22	.	.	PUNCT
ap-1727	17	1	the	the	DET
ap-1727	17	2	results	result	NOUN
ap-1727	17	3	are	be	AUX
ap-1727	17	4	presented	present	VERB
ap-1727	17	5	on	on	ADP
ap-1727	17	6	studies	study	NOUN
ap-1727	17	7	of	of	ADP
ap-1727	17	8	the	the	DET
ap-1727	17	9	generation	generation	NOUN
ap-1727	17	10	of	of	ADP
ap-1727	17	11	intense	intense	ADJ
ap-1727	17	12	radiation	radiation	NOUN
ap-1727	17	13	in	in	ADP
ap-1727	17	14	the	the	DET
ap-1727	17	15	range	range	NOUN
ap-1727	17	16	of	of	ADP
ap-1727	17	17	12.2	12.2	NUM
ap-1727	17	18	÷	÷	NUM
ap-1727	17	19	15.8	15.8	NUM
ap-1727	17	20	nm	nm	ADJ
ap-1727	17	21	wavelength	wavelength	NOUN
ap-1727	17	22	from	from	ADP
ap-1727	17	23	an	an	DET
ap-1727	17	24	extended	extended	ADJ
ap-1727	17	25	plasma	plasma	NOUN
ap-1727	17	26	diode	diode	NOUN
ap-1727	17	27	,	,	PUNCT
ap-1727	17	28	operating	operate	VERB
ap-1727	17	29	in	in	ADP
ap-1727	17	30	the	the	DET
ap-1727	17	31	regime	regime	NOUN
ap-1727	17	32	of	of	ADP
ap-1727	17	33	self	self	NOUN
ap-1727	17	34	-	-	PUNCT
ap-1727	17	35	sustained	sustain	VERB
ap-1727	17	36	plasma	plasma	NOUN
ap-1727	17	37	-	-	PUNCT
ap-1727	17	38	beam	beam	NOUN
ap-1727	17	39	discharge	discharge	NOUN
ap-1727	17	40	[	[	X
ap-1727	17	41	1	1	NUM
ap-1727	17	42	]	]	PUNCT
ap-1727	17	43	.	.	PUNCT
ap-1727	18	1	the	the	DET
ap-1727	18	2	dense	dense	ADJ
ap-1727	18	3	high	high	ADJ
ap-1727	18	4	-	-	PUNCT
ap-1727	18	5	temperature	temperature	NOUN
ap-1727	18	6	plasma	plasma	NOUN
ap-1727	18	7	of	of	ADP
ap-1727	18	8	multi	multi	ADJ
ap-1727	18	9	-	-	ADJ
ap-1727	18	10	charged	charge	VERB
ap-1727	18	11	tin	tin	NOUN
ap-1727	18	12	ions	ion	NOUN
ap-1727	18	13	is	be	AUX
ap-1727	18	14	produced	produce	VERB
ap-1727	18	15	by	by	ADP
ap-1727	18	16	pulsed	pulsed	ADJ
ap-1727	18	17	evaporation	evaporation	NOUN
ap-1727	18	18	of	of	ADP
ap-1727	18	19	the	the	DET
ap-1727	18	20	anode	anode	NOUN
ap-1727	18	21	material	material	NOUN
ap-1727	18	22	,	,	PUNCT
ap-1727	18	23	fast	fast	ADJ
ap-1727	18	24	ionization	ionization	NOUN
ap-1727	18	25	of	of	ADP
ap-1727	18	26	the	the	DET
ap-1727	18	27	vapor	vapor	NOUN
ap-1727	18	28	,	,	PUNCT
ap-1727	18	29	and	and	CCONJ
ap-1727	18	30	heating	heating	NOUN
ap-1727	18	31	of	of	ADP
ap-1727	18	32	the	the	DET
ap-1727	18	33	resulting	result	VERB
ap-1727	18	34	plasma	plasma	NOUN
ap-1727	18	35	by	by	ADP
ap-1727	18	36	the	the	DET
ap-1727	18	37	current	current	NOUN
ap-1727	18	38	and	and	CCONJ
ap-1727	18	39	by	by	ADP
ap-1727	18	40	the	the	DET
ap-1727	18	41	electron	electron	NOUN
ap-1727	18	42	beam	beam	NOUN
ap-1727	18	43	,	,	PUNCT
ap-1727	18	44	formed	form	VERB
ap-1727	18	45	by	by	ADP
ap-1727	18	46	the	the	DET
ap-1727	18	47	double	double	ADJ
ap-1727	18	48	electric	electric	ADJ
ap-1727	18	49	layer	layer	NOUN
ap-1727	18	50	in	in	ADP
ap-1727	18	51	the	the	DET
ap-1727	18	52	anode	anode	NOUN
ap-1727	18	53	region	region	NOUN
ap-1727	18	54	of	of	ADP
ap-1727	18	55	the	the	DET
ap-1727	18	56	diode	diode	NOUN
ap-1727	18	57	.	.	PUNCT
ap-1727	19	1	2	2	X
ap-1727	19	2	.	.	X
ap-1727	19	3	experiments	experiment	NOUN
ap-1727	19	4	the	the	DET
ap-1727	19	5	experimental	experimental	ADJ
ap-1727	19	6	setup	setup	NOUN
ap-1727	19	7	dedicated	dedicate	VERB
ap-1727	19	8	to	to	ADP
ap-1727	19	9	studies	study	NOUN
ap-1727	19	10	of	of	ADP
ap-1727	19	11	the	the	DET
ap-1727	19	12	euv	euv	NOUN
ap-1727	19	13	yield	yield	NOUN
ap-1727	19	14	from	from	ADP
ap-1727	19	15	the	the	DET
ap-1727	19	16	plasma	plasma	NOUN
ap-1727	19	17	of	of	ADP
ap-1727	19	18	multi	multi	ADJ
ap-1727	19	19	-	-	ADJ
ap-1727	19	20	charged	charge	VERB
ap-1727	19	21	tin	tin	NOUN
ap-1727	19	22	ions	ion	NOUN
ap-1727	19	23	is	be	AUX
ap-1727	19	24	presented	present	VERB
ap-1727	19	25	in	in	ADP
ap-1727	19	26	fig	fig	NOUN
ap-1727	19	27	.	.	PUNCT
ap-1727	20	1	1	1	X
ap-1727	20	2	.	.	PUNCT
ap-1727	20	3	the	the	DET
ap-1727	20	4	setup	setup	NOUN
ap-1727	20	5	consists	consist	VERB
ap-1727	20	6	of	of	ADP
ap-1727	20	7	the	the	DET
ap-1727	20	8	pulsed	pulse	VERB
ap-1727	20	9	high	high	ADJ
ap-1727	20	10	-	-	PUNCT
ap-1727	20	11	current	current	ADJ
ap-1727	20	12	plasma	plasma	NOUN
ap-1727	20	13	diode	diode	NOUN
ap-1727	20	14	with	with	ADP
ap-1727	20	15	the	the	DET
ap-1727	20	16	igniting	ignite	VERB
ap-1727	20	17	electrode	electrode	NOUN
ap-1727	20	18	,	,	PUNCT
ap-1727	20	19	the	the	DET
ap-1727	20	20	photo	photo	NOUN
ap-1727	20	21	-	-	PUNCT
ap-1727	20	22	detector	detector	NOUN
ap-1727	20	23	for	for	ADP
ap-1727	20	24	measurement	measurement	NOUN
ap-1727	20	25	of	of	ADP
ap-1727	20	26	the	the	DET
ap-1727	20	27	integral	integral	ADJ
ap-1727	20	28	radiation	radiation	NOUN
ap-1727	20	29	intensity	intensity	NOUN
ap-1727	20	30	,	,	PUNCT
ap-1727	20	31	and	and	CCONJ
ap-1727	20	32	the	the	DET
ap-1727	20	33	semicoductor	semicoductor	NOUN
ap-1727	20	34	detector	detector	NOUN
ap-1727	20	35	axuv-20	axuv-20	PROPN
ap-1727	20	36	for	for	ADP
ap-1727	20	37	the	the	DET
ap-1727	20	38	radiation	radiation	NOUN
ap-1727	20	39	intensity	intensity	NOUN
ap-1727	20	40	measurement	measurement	NOUN
ap-1727	20	41	of	of	ADP
ap-1727	20	42	selected	select	VERB
ap-1727	20	43	wavelength	wavelength	NOUN
ap-1727	20	44	range	range	NOUN
ap-1727	20	45	.	.	PUNCT
ap-1727	21	1	axuv-20	axuv-20	DET
ap-1727	21	2	detector	detector	NOUN
ap-1727	21	3	(	(	PUNCT
ap-1727	21	4	fabricated	fabricate	VERB
ap-1727	21	5	by	by	ADP
ap-1727	21	6	international	international	ADJ
ap-1727	21	7	radiation	radiation	NOUN
ap-1727	21	8	detectors	detector	NOUN
ap-1727	21	9	incorporation	incorporation	NOUN
ap-1727	21	10	,	,	PUNCT
ap-1727	21	11	california	california	PROPN
ap-1727	21	12	)	)	PUNCT
ap-1727	21	13	with	with	ADP
ap-1727	21	14	input	input	NOUN
ap-1727	21	15	mo−si	mo−si	ADJ
ap-1727	21	16	optical	optical	ADJ
ap-1727	21	17	filter	filter	NOUN
ap-1727	21	18	on	on	ADP
ap-1727	21	19	12.2	12.2	NUM
ap-1727	21	20	÷	÷	NUM
ap-1727	21	21	15.8	15.8	NUM
ap-1727	21	22	nm	nm	ADJ
ap-1727	21	23	wavelength	wavelength	NOUN
ap-1727	21	24	range	range	NOUN
ap-1727	21	25	was	be	AUX
ap-1727	21	26	calibrated	calibrate	VERB
ap-1727	21	27	by	by	ADP
ap-1727	21	28	intensity	intensity	NOUN
ap-1727	21	29	with	with	ADP
ap-1727	21	30	help	help	NOUN
ap-1727	21	31	of	of	ADP
ap-1727	21	32	the	the	DET
ap-1727	21	33	synchrotron	synchrotron	NOUN
ap-1727	21	34	radiation	radiation	NOUN
ap-1727	21	35	.	.	PUNCT
ap-1727	22	1	the	the	DET
ap-1727	22	2	damped	damped	NOUN
ap-1727	22	3	alternating	alternate	VERB
ap-1727	22	4	current	current	NOUN
ap-1727	22	5	in	in	ADP
ap-1727	22	6	the	the	DET
ap-1727	22	7	diode	diode	NOUN
ap-1727	22	8	is	be	AUX
ap-1727	22	9	excited	excite	VERB
ap-1727	22	10	between	between	ADP
ap-1727	22	11	the	the	DET
ap-1727	22	12	cylindrical	cylindrical	ADJ
ap-1727	22	13	electrodes	electrode	NOUN
ap-1727	22	14	due	due	ADJ
ap-1727	22	15	to	to	ADP
ap-1727	22	16	the	the	DET
ap-1727	22	17	discharge	discharge	NOUN
ap-1727	22	18	of	of	ADP
ap-1727	22	19	the	the	DET
ap-1727	22	20	low	low	ADJ
ap-1727	22	21	-	-	PUNCT
ap-1727	22	22	inductance	inductance	NOUN
ap-1727	22	23	capacitor	capacitor	NOUN
ap-1727	22	24	bank	bank	PROPN
ap-1727	22	25	c0	c0	PROPN
ap-1727	22	26	of	of	ADP
ap-1727	22	27	capacity	capacity	NOUN
ap-1727	22	28	2.0	2.0	NUM
ap-1727	22	29	µf	µf	NOUN
ap-1727	22	30	at	at	ADP
ap-1727	22	31	starting	start	VERB
ap-1727	22	32	pressure	pressure	NOUN
ap-1727	22	33	2	2	NUM
ap-1727	22	34	×	×	NOUN
ap-1727	22	35	10−6	10−6	NUM
ap-1727	22	36	torr	torr	NOUN
ap-1727	22	37	.	.	PUNCT
ap-1727	23	1	the	the	DET
ap-1727	23	2	features	feature	NOUN
ap-1727	23	3	of	of	ADP
ap-1727	23	4	the	the	DET
ap-1727	23	5	applied	apply	VERB
ap-1727	23	6	scheme	scheme	NOUN
ap-1727	23	7	of	of	ADP
ap-1727	23	8	discharge	discharge	NOUN
ap-1727	23	9	gap	gap	NOUN
ap-1727	23	10	are	be	AUX
ap-1727	23	11	the	the	DET
ap-1727	23	12	use	use	NOUN
ap-1727	23	13	of	of	ADP
ap-1727	23	14	electrodes	electrode	NOUN
ap-1727	23	15	with	with	ADP
ap-1727	23	16	a	a	DET
ap-1727	23	17	working	work	VERB
ap-1727	23	18	surface	surface	NOUN
ap-1727	23	19	of	of	ADP
ap-1727	23	20	various	various	ADJ
ap-1727	23	21	sizes	size	NOUN
ap-1727	23	22	and	and	CCONJ
ap-1727	23	23	initially	initially	ADV
ap-1727	23	24	the	the	DET
ap-1727	23	25	applying	apply	VERB
ap-1727	23	26	a	a	DET
ap-1727	23	27	positive	positive	ADJ
ap-1727	23	28	voltage	voltage	NOUN
ap-1727	23	29	to	to	ADP
ap-1727	23	30	the	the	DET
ap-1727	23	31	electrode	electrode	NOUN
ap-1727	23	32	with	with	ADP
ap-1727	23	33	a	a	DET
ap-1727	23	34	small	small	ADJ
ap-1727	23	35	effective	effective	ADJ
ap-1727	23	36	surface	surface	NOUN
ap-1727	23	37	(	(	PUNCT
ap-1727	23	38	the	the	DET
ap-1727	23	39	anode	anode	NOUN
ap-1727	23	40	)	)	PUNCT
ap-1727	23	41	,	,	PUNCT
ap-1727	23	42	the	the	DET
ap-1727	23	43	negative	negative	ADJ
ap-1727	23	44	voltage	voltage	NOUN
ap-1727	23	45	–	–	PUNCT
ap-1727	23	46	to	to	ADP
ap-1727	23	47	the	the	DET
ap-1727	23	48	electrode	electrode	NOUN
ap-1727	23	49	with	with	ADP
ap-1727	23	50	a	a	DET
ap-1727	23	51	larger	large	ADJ
ap-1727	23	52	effective	effective	ADJ
ap-1727	23	53	surface	surface	NOUN
ap-1727	23	54	(	(	PUNCT
ap-1727	23	55	the	the	DET
ap-1727	23	56	cathode	cathode	NOUN
ap-1727	23	57	)	)	PUNCT
ap-1727	23	58	.	.	PUNCT
ap-1727	24	1	at	at	ADP
ap-1727	24	2	the	the	DET
ap-1727	24	3	discharge	discharge	NOUN
ap-1727	24	4	current	current	ADJ
ap-1727	24	5	10	10	NUM
ap-1727	24	6	÷	÷	NUM
ap-1727	24	7	40	40	NUM
ap-1727	24	8	ka	ka	PROPN
ap-1727	24	9	and	and	CCONJ
ap-1727	24	10	the	the	DET
ap-1727	24	11	effective	effective	ADJ
ap-1727	24	12	anode	anode	NOUN
ap-1727	24	13	surface	surface	NOUN
ap-1727	24	14	2	2	NUM
ap-1727	24	15	÷	÷	NUM
ap-1727	24	16	20	20	NUM
ap-1727	24	17	mm2	mm2	NOUN
ap-1727	24	18	the	the	DET
ap-1727	24	19	current	current	ADJ
ap-1727	24	20	density	density	NOUN
ap-1727	24	21	reaches	reach	VERB
ap-1727	24	22	value	value	NOUN
ap-1727	24	23	about	about	ADP
ap-1727	24	24	of	of	ADP
ap-1727	24	25	0.2	0.2	NUM
ap-1727	24	26	÷	÷	NUM
ap-1727	24	27	2.0	2.0	NUM
ap-1727	24	28	ma	ma	PROPN
ap-1727	24	29	cm−2	cm−2	PROPN
ap-1727	24	30	.	.	PUNCT
ap-1727	25	1	this	this	PRON
ap-1727	25	2	leads	lead	VERB
ap-1727	25	3	to	to	ADP
ap-1727	25	4	dense	dense	ADJ
ap-1727	25	5	plasma	plasma	NOUN
ap-1727	25	6	formation	formation	NOUN
ap-1727	25	7	near	near	ADP
ap-1727	25	8	anode	anode	NOUN
ap-1727	25	9	and	and	CCONJ
ap-1727	25	10	to	to	ADP
ap-1727	25	11	the	the	DET
ap-1727	25	12	necessary	necessary	ADJ
ap-1727	25	13	position	position	NOUN
ap-1727	25	14	stabilization	stabilization	NOUN
ap-1727	25	15	of	of	ADP
ap-1727	25	16	this	this	DET
ap-1727	25	17	plasma	plasma	NOUN
ap-1727	25	18	.	.	PUNCT
ap-1727	26	1	in	in	ADP
ap-1727	26	2	addition	addition	NOUN
ap-1727	26	3	the	the	DET
ap-1727	26	4	small	small	ADJ
ap-1727	26	5	anode	anode	NOUN
ap-1727	26	6	effective	effective	ADJ
ap-1727	26	7	area	area	NOUN
ap-1727	26	8	provides	provide	VERB
ap-1727	26	9	suitable	suitable	ADJ
ap-1727	26	10	conditions	condition	NOUN
ap-1727	26	11	of	of	ADP
ap-1727	26	12	the	the	DET
ap-1727	26	13	electrical	electrical	ADJ
ap-1727	26	14	double	double	ADJ
ap-1727	26	15	layer	layer	NOUN
ap-1727	26	16	formation	formation	NOUN
ap-1727	26	17	exactly	exactly	ADV
ap-1727	26	18	in	in	ADP
ap-1727	26	19	near	near	ADP
ap-1727	26	20	anode	anode	NOUN
ap-1727	26	21	region	region	NOUN
ap-1727	26	22	.	.	PUNCT
ap-1727	27	1	the	the	DET
ap-1727	27	2	double	double	ADJ
ap-1727	27	3	layer	layer	NOUN
ap-1727	27	4	formation	formation	NOUN
ap-1727	27	5	has	have	AUX
ap-1727	27	6	been	be	AUX
ap-1727	27	7	117	117	NUM
ap-1727	27	8	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	ADJ
ap-1727	27	9	ievgeniia	ievgeniia	NOUN
ap-1727	27	10	v.	v.	ADP
ap-1727	27	11	borgun	borgun	PROPN
ap-1727	27	12	et	et	PROPN
ap-1727	27	13	al	al	PROPN
ap-1727	27	14	.	.	PROPN
ap-1727	27	15	acta	acta	PROPN
ap-1727	27	16	polytechnica	polytechnica	PROPN
ap-1727	27	17	figure	figure	NOUN
ap-1727	27	18	1	1	NUM
ap-1727	27	19	.	.	PUNCT
ap-1727	28	1	scheme	scheme	NOUN
ap-1727	28	2	of	of	ADP
ap-1727	28	3	the	the	DET
ap-1727	28	4	experimental	experimental	ADJ
ap-1727	28	5	setup	setup	NOUN
ap-1727	28	6	:	:	PUNCT
ap-1727	28	7	vc	vc	PROPN
ap-1727	28	8	–	–	PUNCT
ap-1727	28	9	vacuum	vacuum	PROPN
ap-1727	28	10	chamber	chamber	NOUN
ap-1727	28	11	,	,	PUNCT
ap-1727	28	12	sd	sd	NOUN
ap-1727	28	13	–	–	PUNCT
ap-1727	28	14	detector	detector	NOUN
ap-1727	28	15	axuv-20	axuv-20	PROPN
ap-1727	28	16	,	,	PUNCT
ap-1727	28	17	pd	pd	PROPN
ap-1727	28	18	–	–	PUNCT
ap-1727	28	19	photoelectron	photoelectron	NOUN
ap-1727	28	20	detector	detector	NOUN
ap-1727	28	21	,	,	PUNCT
ap-1727	28	22	a	a	DET
ap-1727	28	23	–	–	PUNCT
ap-1727	28	24	anode	anode	NOUN
ap-1727	28	25	,	,	PUNCT
ap-1727	28	26	c	c	NOUN
ap-1727	28	27	–	–	PUNCT
ap-1727	28	28	cathode	cathode	NOUN
ap-1727	28	29	,	,	PUNCT
ap-1727	28	30	i	i	PROPN
ap-1727	28	31	d	d	PROPN
ap-1727	28	32	–	–	PUNCT
ap-1727	28	33	rogowski	rogowski	ADJ
ap-1727	28	34	coil	coil	NOUN
ap-1727	28	35	,	,	PUNCT
ap-1727	28	36	vd	vd	NOUN
ap-1727	28	37	–	–	PUNCT
ap-1727	28	38	voltage	voltage	NOUN
ap-1727	28	39	divider	divider	NOUN
ap-1727	28	40	,	,	PUNCT
ap-1727	28	41	vig	vig	PROPN
ap-1727	28	42	–	–	PUNCT
ap-1727	28	43	igniting	ignite	VERB
ap-1727	28	44	electrode	electrode	NOUN
ap-1727	28	45	.	.	PUNCT
ap-1727	29	1	observed	observe	VERB
ap-1727	29	2	in	in	ADP
ap-1727	29	3	[	[	X
ap-1727	29	4	10	10	NUM
ap-1727	29	5	,	,	PUNCT
ap-1727	29	6	12	12	NUM
ap-1727	29	7	]	]	PUNCT
ap-1727	29	8	.	.	PUNCT
ap-1727	30	1	in	in	ADP
ap-1727	30	2	these	these	DET
ap-1727	30	3	articles	article	NOUN
ap-1727	30	4	at	at	ADP
ap-1727	30	5	an	an	DET
ap-1727	30	6	achievement	achievement	NOUN
ap-1727	30	7	by	by	ADP
ap-1727	30	8	the	the	DET
ap-1727	30	9	discharge	discharge	NOUN
ap-1727	30	10	current	current	NOUN
ap-1727	30	11	of	of	ADP
ap-1727	30	12	some	some	DET
ap-1727	30	13	critical	critical	ADJ
ap-1727	30	14	value	value	NOUN
ap-1727	30	15	all	all	DET
ap-1727	30	16	voltage	voltage	NOUN
ap-1727	30	17	is	be	AUX
ap-1727	30	18	concentrated	concentrate	VERB
ap-1727	30	19	in	in	ADP
ap-1727	30	20	a	a	DET
ap-1727	30	21	narrow	narrow	ADJ
ap-1727	30	22	region	region	NOUN
ap-1727	30	23	and	and	CCONJ
ap-1727	30	24	a	a	DET
ap-1727	30	25	high	high	ADJ
ap-1727	30	26	-	-	PUNCT
ap-1727	30	27	current	current	ADJ
ap-1727	30	28	electron	electron	NOUN
ap-1727	30	29	beam	beam	NOUN
ap-1727	30	30	is	be	AUX
ap-1727	30	31	formed	form	VERB
ap-1727	30	32	,	,	PUNCT
ap-1727	30	33	which	which	PRON
ap-1727	30	34	carries	carry	VERB
ap-1727	30	35	all	all	DET
ap-1727	30	36	discharge	discharge	NOUN
ap-1727	30	37	current	current	ADJ
ap-1727	30	38	.	.	PUNCT
ap-1727	31	1	this	this	DET
ap-1727	31	2	narrow	narrow	ADJ
ap-1727	31	3	region	region	NOUN
ap-1727	31	4	divides	divide	VERB
ap-1727	31	5	the	the	DET
ap-1727	31	6	discharge	discharge	NOUN
ap-1727	31	7	on	on	ADP
ap-1727	31	8	two	two	NUM
ap-1727	31	9	parts	part	NOUN
ap-1727	31	10	.	.	PUNCT
ap-1727	32	1	further	further	ADJ
ap-1727	32	2	study	study	NOUN
ap-1727	32	3	of	of	ADP
ap-1727	32	4	conditions	condition	NOUN
ap-1727	32	5	of	of	ADP
ap-1727	32	6	facilitation	facilitation	NOUN
ap-1727	32	7	of	of	ADP
ap-1727	32	8	double	double	ADJ
ap-1727	32	9	layer	layer	NOUN
ap-1727	32	10	and	and	CCONJ
ap-1727	32	11	high	high	ADJ
ap-1727	32	12	-	-	PUNCT
ap-1727	32	13	current	current	ADJ
ap-1727	32	14	electron	electron	NOUN
ap-1727	32	15	beam	beam	NOUN
ap-1727	32	16	formation	formation	NOUN
ap-1727	32	17	in	in	ADP
ap-1727	32	18	such	such	ADJ
ap-1727	32	19	type	type	NOUN
ap-1727	32	20	of	of	ADP
ap-1727	32	21	discharge	discharge	NOUN
ap-1727	32	22	studied	study	VERB
ap-1727	32	23	by	by	ADP
ap-1727	32	24	the	the	DET
ap-1727	32	25	authors	author	NOUN
ap-1727	32	26	of	of	ADP
ap-1727	32	27	the	the	DET
ap-1727	32	28	articles	article	NOUN
ap-1727	32	29	[	[	X
ap-1727	32	30	5	5	NUM
ap-1727	32	31	,	,	PUNCT
ap-1727	32	32	4	4	NUM
ap-1727	32	33	,	,	PUNCT
ap-1727	32	34	6	6	NUM
ap-1727	32	35	]	]	PUNCT
ap-1727	32	36	.	.	PUNCT
ap-1727	33	1	in	in	ADP
ap-1727	33	2	our	our	PRON
ap-1727	33	3	article	article	NOUN
ap-1727	33	4	the	the	DET
ap-1727	33	5	double	double	ADJ
ap-1727	33	6	layer	layer	NOUN
ap-1727	33	7	formation	formation	NOUN
ap-1727	33	8	and	and	CCONJ
ap-1727	33	9	its	its	PRON
ap-1727	33	10	dynamics	dynamic	NOUN
ap-1727	33	11	are	be	AUX
ap-1727	33	12	not	not	PART
ap-1727	33	13	investigated	investigate	VERB
ap-1727	33	14	in	in	ADP
ap-1727	33	15	detail	detail	NOUN
ap-1727	33	16	.	.	PUNCT
ap-1727	34	1	based	base	VERB
ap-1727	34	2	on	on	ADP
ap-1727	34	3	the	the	DET
ap-1727	34	4	knowledge	knowledge	NOUN
ap-1727	34	5	of	of	ADP
ap-1727	34	6	methods	method	NOUN
ap-1727	34	7	for	for	ADP
ap-1727	34	8	forming	form	VERB
ap-1727	34	9	the	the	DET
ap-1727	34	10	double	double	ADJ
ap-1727	34	11	layer	layer	NOUN
ap-1727	34	12	and	and	CCONJ
ap-1727	34	13	its	its	PRON
ap-1727	34	14	stabilization	stabilization	NOUN
ap-1727	34	15	,	,	PUNCT
ap-1727	34	16	we	we	PRON
ap-1727	34	17	have	have	AUX
ap-1727	34	18	created	create	VERB
ap-1727	34	19	such	such	ADJ
ap-1727	34	20	experiment	experiment	NOUN
ap-1727	34	21	conditions	condition	NOUN
ap-1727	34	22	to	to	PART
ap-1727	34	23	create	create	VERB
ap-1727	34	24	the	the	DET
ap-1727	34	25	double	double	ADJ
ap-1727	34	26	layer	layer	NOUN
ap-1727	34	27	near	near	ADP
ap-1727	34	28	one	one	NUM
ap-1727	34	29	electrode	electrode	NOUN
ap-1727	34	30	with	with	ADP
ap-1727	34	31	a	a	DET
ap-1727	34	32	small	small	ADJ
ap-1727	34	33	effective	effective	ADJ
ap-1727	34	34	surface	surface	NOUN
ap-1727	34	35	.	.	PUNCT
ap-1727	35	1	the	the	DET
ap-1727	35	2	using	using	NOUN
ap-1727	35	3	of	of	ADP
ap-1727	35	4	double	double	ADJ
ap-1727	35	5	layer	layer	NOUN
ap-1727	35	6	is	be	AUX
ap-1727	35	7	an	an	DET
ap-1727	35	8	effective	effective	ADJ
ap-1727	35	9	method	method	NOUN
ap-1727	35	10	for	for	ADP
ap-1727	35	11	local	local	ADJ
ap-1727	35	12	plasma	plasma	NOUN
ap-1727	35	13	heating	heating	NOUN
ap-1727	35	14	.	.	PUNCT
ap-1727	36	1	thus	thus	ADV
ap-1727	36	2	the	the	DET
ap-1727	36	3	presence	presence	NOUN
ap-1727	36	4	in	in	ADP
ap-1727	36	5	the	the	DET
ap-1727	36	6	same	same	ADJ
ap-1727	36	7	location	location	NOUN
ap-1727	36	8	of	of	ADP
ap-1727	36	9	the	the	DET
ap-1727	36	10	dense	dense	ADJ
ap-1727	36	11	plasma	plasma	NOUN
ap-1727	36	12	and	and	CCONJ
ap-1727	36	13	its	its	PRON
ap-1727	36	14	source	source	NOUN
ap-1727	36	15	of	of	ADP
ap-1727	36	16	heating	heating	NOUN
ap-1727	36	17	makes	make	VERB
ap-1727	36	18	it	it	PRON
ap-1727	36	19	possible	possible	ADJ
ap-1727	36	20	to	to	PART
ap-1727	36	21	form	form	VERB
ap-1727	36	22	dense	dense	ADJ
ap-1727	36	23	plasma	plasma	NOUN
ap-1727	36	24	with	with	ADP
ap-1727	36	25	multi	multi	ADJ
ap-1727	36	26	-	-	ADJ
ap-1727	36	27	charged	charge	VERB
ap-1727	36	28	ions	ion	NOUN
ap-1727	36	29	in	in	ADP
ap-1727	36	30	near	near	ADP
ap-1727	36	31	anode	anode	NOUN
ap-1727	36	32	region	region	NOUN
ap-1727	36	33	.	.	PUNCT
ap-1727	37	1	the	the	DET
ap-1727	37	2	length	length	NOUN
ap-1727	37	3	of	of	ADP
ap-1727	37	4	the	the	DET
ap-1727	37	5	discharge	discharge	NOUN
ap-1727	37	6	space	space	NOUN
ap-1727	37	7	can	can	AUX
ap-1727	37	8	be	be	AUX
ap-1727	37	9	varied	varied	ADJ
ap-1727	37	10	from	from	ADP
ap-1727	37	11	3	3	NUM
ap-1727	37	12	to	to	ADP
ap-1727	37	13	10	10	NUM
ap-1727	37	14	cm	cm	NOUN
ap-1727	37	15	,	,	PUNCT
ap-1727	37	16	the	the	DET
ap-1727	37	17	diameter	diameter	NOUN
ap-1727	37	18	of	of	ADP
ap-1727	37	19	the	the	DET
ap-1727	37	20	cathode	cathode	NOUN
ap-1727	37	21	is	be	AUX
ap-1727	37	22	10	10	NUM
ap-1727	37	23	mm	mm	NOUN
ap-1727	37	24	and	and	CCONJ
ap-1727	37	25	the	the	DET
ap-1727	37	26	anode	anode	NOUN
ap-1727	37	27	diameter	diameter	NOUN
ap-1727	37	28	equals	equal	VERB
ap-1727	37	29	1.5	1.5	NUM
ap-1727	37	30	mm	mm	NOUN
ap-1727	37	31	or	or	CCONJ
ap-1727	37	32	2.5	2.5	NUM
ap-1727	37	33	mm	mm	NOUN
ap-1727	37	34	,	,	PUNCT
ap-1727	37	35	or	or	CCONJ
ap-1727	37	36	5	5	NUM
ap-1727	37	37	mm	mm	NOUN
ap-1727	37	38	.	.	PUNCT
ap-1727	38	1	the	the	DET
ap-1727	38	2	working	work	VERB
ap-1727	38	3	surface	surface	NOUN
ap-1727	38	4	of	of	ADP
ap-1727	38	5	the	the	DET
ap-1727	38	6	electrodes	electrode	NOUN
ap-1727	38	7	are	be	AUX
ap-1727	38	8	covered	cover	VERB
ap-1727	38	9	with	with	ADP
ap-1727	38	10	0.5	0.5	NUM
ap-1727	38	11	mm	mm	PROPN
ap-1727	38	12	thick	thick	ADJ
ap-1727	38	13	tin	tin	NOUN
ap-1727	38	14	layer	layer	NOUN
ap-1727	38	15	.	.	PUNCT
ap-1727	39	1	the	the	DET
ap-1727	39	2	side	side	NOUN
ap-1727	39	3	surface	surface	NOUN
ap-1727	39	4	of	of	ADP
ap-1727	39	5	a	a	DET
ap-1727	39	6	rod	rod	NOUN
ap-1727	39	7	anode	anode	NOUN
ap-1727	39	8	is	be	AUX
ap-1727	39	9	enveloped	envelop	VERB
ap-1727	39	10	by	by	ADP
ap-1727	39	11	tubular	tubular	ADJ
ap-1727	39	12	ceramic	ceramic	ADJ
ap-1727	39	13	insulator	insulator	NOUN
ap-1727	39	14	to	to	PART
ap-1727	39	15	increase	increase	VERB
ap-1727	39	16	the	the	DET
ap-1727	39	17	current	current	ADJ
ap-1727	39	18	density	density	NOUN
ap-1727	39	19	to	to	ADP
ap-1727	39	20	the	the	DET
ap-1727	39	21	anode	anode	NOUN
ap-1727	39	22	.	.	PUNCT
ap-1727	40	1	the	the	DET
ap-1727	40	2	discharge	discharge	NOUN
ap-1727	40	3	voltage	voltage	NOUN
ap-1727	40	4	is	be	AUX
ap-1727	40	5	from	from	ADP
ap-1727	40	6	4	4	NUM
ap-1727	40	7	to	to	PART
ap-1727	40	8	15	15	NUM
ap-1727	40	9	kv	kv	NOUN
ap-1727	40	10	,	,	PUNCT
ap-1727	40	11	the	the	DET
ap-1727	40	12	current	current	ADJ
ap-1727	40	13	amplitude	amplitude	NOUN
ap-1727	40	14	from	from	ADP
ap-1727	40	15	10	10	NUM
ap-1727	40	16	to	to	PART
ap-1727	40	17	40	40	NUM
ap-1727	40	18	ka	ka	PROPN
ap-1727	40	19	,	,	PUNCT
ap-1727	40	20	the	the	DET
ap-1727	40	21	current	current	ADJ
ap-1727	40	22	density	density	NOUN
ap-1727	40	23	on	on	ADP
ap-1727	40	24	the	the	DET
ap-1727	40	25	anode	anode	NOUN
ap-1727	40	26	reaches	reach	VERB
ap-1727	40	27	to	to	ADP
ap-1727	40	28	0.2	0.2	NUM
ap-1727	40	29	÷	÷	NUM
ap-1727	40	30	2.0	2.0	NUM
ap-1727	40	31	ma	ma	PROPN
ap-1727	40	32	cm−2	cm−2	PROPN
ap-1727	40	33	,	,	PUNCT
ap-1727	40	34	the	the	DET
ap-1727	40	35	halfcycle	halfcycle	NOUN
ap-1727	40	36	of	of	ADP
ap-1727	40	37	current	current	ADJ
ap-1727	40	38	oscillations	oscillation	NOUN
ap-1727	40	39	is	be	AUX
ap-1727	40	40	1.7	1.7	NUM
ap-1727	40	41	µs	µs	NOUN
ap-1727	40	42	.	.	PUNCT
ap-1727	41	1	the	the	DET
ap-1727	41	2	discharge	discharge	NOUN
ap-1727	41	3	current	current	ADJ
ap-1727	41	4	and	and	CCONJ
ap-1727	41	5	voltage	voltage	NOUN
ap-1727	41	6	are	be	AUX
ap-1727	41	7	measured	measure	VERB
ap-1727	41	8	with	with	ADP
ap-1727	41	9	rogowski	rogowski	ADJ
ap-1727	41	10	coil	coil	NOUN
ap-1727	41	11	i	i	PROPN
ap-1727	41	12	d	d	PROPN
ap-1727	41	13	and	and	CCONJ
ap-1727	41	14	balanced	balanced	ADJ
ap-1727	41	15	voltage	voltage	NOUN
ap-1727	41	16	divider	divid	ADJ
ap-1727	41	17	vd	vd	NOUN
ap-1727	41	18	,	,	PUNCT
ap-1727	41	19	respectively	respectively	ADV
ap-1727	41	20	.	.	PUNCT
ap-1727	42	1	the	the	DET
ap-1727	42	2	current	current	NOUN
ap-1727	42	3	through	through	ADP
ap-1727	42	4	the	the	DET
ap-1727	42	5	diode	diode	NOUN
ap-1727	42	6	is	be	AUX
ap-1727	42	7	excited	excite	VERB
ap-1727	42	8	after	after	ADP
ap-1727	42	9	filling	fill	VERB
ap-1727	42	10	of	of	ADP
ap-1727	42	11	the	the	DET
ap-1727	42	12	discharge	discharge	NOUN
ap-1727	42	13	interval	interval	NOUN
ap-1727	42	14	by	by	ADP
ap-1727	42	15	preliminary	preliminary	ADJ
ap-1727	42	16	plasma	plasma	NOUN
ap-1727	42	17	due	due	ADP
ap-1727	42	18	to	to	ADP
ap-1727	42	19	surface	surface	NOUN
ap-1727	42	20	discharge	discharge	NOUN
ap-1727	42	21	on	on	ADP
ap-1727	42	22	the	the	DET
ap-1727	42	23	cathode	cathode	NOUN
ap-1727	42	24	,	,	PUNCT
ap-1727	42	25	using	use	VERB
ap-1727	42	26	a	a	DET
ap-1727	42	27	igniting	ignite	VERB
ap-1727	42	28	electrode	electrode	NOUN
ap-1727	42	29	.	.	PUNCT
ap-1727	43	1	the	the	DET
ap-1727	43	2	pulsed	pulse	VERB
ap-1727	43	3	voltage	voltage	NOUN
ap-1727	43	4	0.2	0.2	NUM
ap-1727	43	5	÷	÷	NUM
ap-1727	43	6	5.0	5.0	NUM
ap-1727	43	7	kv	kv	PROPN
ap-1727	43	8	supplies	supply	NOUN
ap-1727	43	9	on	on	ADP
ap-1727	43	10	a	a	DET
ap-1727	43	11	igniting	ignite	VERB
ap-1727	43	12	electrode	electrode	NOUN
ap-1727	43	13	from	from	ADP
ap-1727	43	14	the	the	DET
ap-1727	43	15	capacity	capacity	NOUN
ap-1727	43	16	condenser	condenser	NOUN
ap-1727	43	17	0.025µf	0.025µf	NOUN
ap-1727	43	18	through	through	ADP
ap-1727	43	19	thyratron	thyratron	NUM
ap-1727	43	20	and	and	CCONJ
ap-1727	43	21	inductance	inductance	NOUN
ap-1727	43	22	of	of	ADP
ap-1727	43	23	value	value	NOUN
ap-1727	43	24	400µh	400µh	NOUN
ap-1727	43	25	.	.	PUNCT
ap-1727	44	1	the	the	DET
ap-1727	44	2	integral	integral	ADJ
ap-1727	44	3	radiation	radiation	NOUN
ap-1727	44	4	by	by	ADP
ap-1727	44	5	plasma	plasma	NOUN
ap-1727	44	6	is	be	AUX
ap-1727	44	7	monitored	monitor	VERB
ap-1727	44	8	by	by	ADP
ap-1727	44	9	the	the	DET
ap-1727	44	10	current	current	ADJ
ap-1727	44	11	measurement	measurement	NOUN
ap-1727	44	12	of	of	ADP
ap-1727	44	13	photoelectrons	photoelectron	NOUN
ap-1727	44	14	.	.	PUNCT
ap-1727	45	1	the	the	DET
ap-1727	45	2	photoelectrons	photoelectron	NOUN
ap-1727	45	3	are	be	AUX
ap-1727	45	4	collected	collect	VERB
ap-1727	45	5	by	by	ADP
ap-1727	45	6	fine	fine	ADJ
ap-1727	45	7	-	-	PUNCT
ap-1727	45	8	mesh	mesh	NOUN
ap-1727	45	9	grid	grid	NOUN
ap-1727	45	10	placed	place	VERB
ap-1727	45	11	at	at	ADP
ap-1727	45	12	a	a	DET
ap-1727	45	13	distance	distance	NOUN
ap-1727	45	14	of	of	ADP
ap-1727	45	15	0.5	0.5	NUM
ap-1727	45	16	mm	mm	NOUN
ap-1727	45	17	from	from	ADP
ap-1727	45	18	the	the	DET
ap-1727	45	19	photocathode	photocathode	NOUN
ap-1727	45	20	.	.	PUNCT
ap-1727	46	1	the	the	DET
ap-1727	46	2	grid	grid	NOUN
ap-1727	46	3	is	be	AUX
ap-1727	46	4	grounded	ground	VERB
ap-1727	46	5	,	,	PUNCT
ap-1727	46	6	and	and	CCONJ
ap-1727	46	7	the	the	DET
ap-1727	46	8	photocathode	photocathode	NOUN
ap-1727	46	9	is	be	AUX
ap-1727	46	10	at	at	ADP
ap-1727	46	11	a	a	DET
ap-1727	46	12	negative	negative	ADJ
ap-1727	46	13	potential	potential	NOUN
ap-1727	46	14	of	of	ADP
ap-1727	46	15	−50	−50	PROPN
ap-1727	46	16	v	v	NOUN
ap-1727	46	17	,	,	PUNCT
ap-1727	46	18	supplied	supply	VERB
ap-1727	46	19	from	from	ADP
ap-1727	46	20	an	an	DET
ap-1727	46	21	autonomous	autonomous	ADJ
ap-1727	46	22	voltage	voltage	NOUN
ap-1727	46	23	source	source	NOUN
ap-1727	46	24	.	.	PUNCT
ap-1727	47	1	at	at	ADP
ap-1727	47	2	the	the	DET
ap-1727	47	3	radiarion	radiarion	NOUN
ap-1727	47	4	intensity	intensity	NOUN
ap-1727	47	5	measuring	measure	VERB
ap-1727	47	6	of	of	ADP
ap-1727	47	7	the	the	DET
ap-1727	47	8	selected	select	VERB
ap-1727	47	9	wavelength	wavelength	NOUN
ap-1727	47	10	range	range	NOUN
ap-1727	47	11	it	it	PRON
ap-1727	47	12	is	be	AUX
ap-1727	47	13	used	use	VERB
ap-1727	47	14	the	the	DET
ap-1727	47	15	special	special	ADJ
ap-1727	47	16	measures	measure	NOUN
ap-1727	47	17	.	.	PUNCT
ap-1727	48	1	to	to	PART
ap-1727	48	2	protect	protect	VERB
ap-1727	48	3	the	the	DET
ap-1727	48	4	axuv-20	axuv-20	PROPN
ap-1727	48	5	detector	detector	NOUN
ap-1727	48	6	from	from	ADP
ap-1727	48	7	the	the	DET
ap-1727	48	8	plasma	plasma	NOUN
ap-1727	48	9	and	and	CCONJ
ap-1727	48	10	charged	charge	VERB
ap-1727	48	11	particle	particle	NOUN
ap-1727	48	12	beams	beam	NOUN
ap-1727	48	13	the	the	DET
ap-1727	48	14	inlet	inlet	ADJ
ap-1727	48	15	diafragmatic	diafragmatic	ADJ
ap-1727	48	16	channel	channel	NOUN
ap-1727	48	17	is	be	AUX
ap-1727	48	18	located	locate	VERB
ap-1727	48	19	in	in	ADP
ap-1727	48	20	transverse	transverse	NOUN
ap-1727	48	21	magnetic	magnetic	ADJ
ap-1727	48	22	field	field	NOUN
ap-1727	48	23	(	(	PUNCT
ap-1727	48	24	strength	strength	NOUN
ap-1727	48	25	0.2	0.2	NUM
ap-1727	48	26	t	t	PROPN
ap-1727	48	27	,	,	PUNCT
ap-1727	48	28	length	length	NOUN
ap-1727	48	29	25	25	NUM
ap-1727	48	30	cm	cm	NOUN
ap-1727	48	31	)	)	PUNCT
ap-1727	48	32	.	.	PUNCT
ap-1727	49	1	to	to	PART
ap-1727	49	2	exclude	exclude	VERB
ap-1727	49	3	the	the	DET
ap-1727	49	4	effect	effect	NOUN
ap-1727	49	5	of	of	ADP
ap-1727	49	6	photoelectron	photoelectron	NOUN
ap-1727	49	7	current	current	NOUN
ap-1727	49	8	on	on	ADP
ap-1727	49	9	the	the	DET
ap-1727	49	10	detector	detector	NOUN
ap-1727	49	11	signal	signal	NOUN
ap-1727	49	12	,	,	PUNCT
ap-1727	49	13	we	we	PRON
ap-1727	49	14	use	use	VERB
ap-1727	49	15	a	a	DET
ap-1727	49	16	set	set	NOUN
ap-1727	49	17	of	of	ADP
ap-1727	49	18	shading	shading	NOUN
ap-1727	49	19	diaphragms	diaphragm	NOUN
ap-1727	49	20	and	and	CCONJ
ap-1727	49	21	the	the	DET
ap-1727	49	22	detector	detector	NOUN
ap-1727	49	23	is	be	AUX
ap-1727	49	24	biased	bias	VERB
ap-1727	49	25	by	by	ADP
ap-1727	49	26	+20	+20	NUM
ap-1727	49	27	v	v	NOUN
ap-1727	49	28	with	with	ADP
ap-1727	49	29	respect	respect	NOUN
ap-1727	49	30	to	to	ADP
ap-1727	49	31	the	the	DET
ap-1727	49	32	channel	channel	NOUN
ap-1727	49	33	.	.	PUNCT
ap-1727	50	1	the	the	DET
ap-1727	50	2	diode	diode	NOUN
ap-1727	50	3	discharge	discharge	NOUN
ap-1727	50	4	develops	develop	VERB
ap-1727	50	5	in	in	ADP
ap-1727	50	6	two	two	NUM
ap-1727	50	7	stages	stage	NOUN
ap-1727	50	8	.	.	PUNCT
ap-1727	51	1	the	the	DET
ap-1727	51	2	first	first	ADJ
ap-1727	51	3	stage	stage	NOUN
ap-1727	51	4	begins	begin	VERB
ap-1727	51	5	with	with	ADP
ap-1727	51	6	a	a	DET
ap-1727	51	7	surface	surface	NOUN
ap-1727	51	8	breakdown	breakdown	NOUN
ap-1727	51	9	at	at	ADP
ap-1727	51	10	the	the	DET
ap-1727	51	11	cathode	cathode	NOUN
ap-1727	51	12	and	and	CCONJ
ap-1727	51	13	finished	finish	VERB
ap-1727	51	14	when	when	SCONJ
ap-1727	51	15	the	the	DET
ap-1727	51	16	primary	primary	ADJ
ap-1727	51	17	plasma	plasma	NOUN
ap-1727	51	18	reaches	reach	VERB
ap-1727	51	19	the	the	DET
ap-1727	51	20	anode	anode	NOUN
ap-1727	51	21	.	.	PUNCT
ap-1727	52	1	in	in	ADP
ap-1727	52	2	the	the	DET
ap-1727	52	3	first	first	ADJ
ap-1727	52	4	stage	stage	NOUN
ap-1727	52	5	,	,	PUNCT
ap-1727	52	6	which	which	PRON
ap-1727	52	7	lasts	last	VERB
ap-1727	52	8	for	for	ADP
ap-1727	52	9	2	2	NUM
ap-1727	52	10	÷	÷	NUM
ap-1727	52	11	6	6	NUM
ap-1727	52	12	µs	µs	NOUN
ap-1727	52	13	(	(	PUNCT
ap-1727	52	14	for	for	ADP
ap-1727	52	15	the	the	DET
ap-1727	52	16	electrode	electrode	NOUN
ap-1727	52	17	gap	gap	NOUN
ap-1727	52	18	length	length	NOUN
ap-1727	52	19	of	of	ADP
ap-1727	52	20	5	5	NUM
ap-1727	52	21	cm	cm	NOUN
ap-1727	52	22	)	)	PUNCT
ap-1727	52	23	,	,	PUNCT
ap-1727	52	24	the	the	DET
ap-1727	52	25	discharge	discharge	NOUN
ap-1727	52	26	is	be	AUX
ap-1727	52	27	operated	operate	VERB
ap-1727	52	28	in	in	ADP
ap-1727	52	29	the	the	DET
ap-1727	52	30	regime	regime	NOUN
ap-1727	52	31	of	of	ADP
ap-1727	52	32	a	a	DET
ap-1727	52	33	vacuum	vacuum	NOUN
ap-1727	52	34	diode	diode	NOUN
ap-1727	52	35	with	with	ADP
ap-1727	52	36	a	a	DET
ap-1727	52	37	plasma	plasma	NOUN
ap-1727	52	38	emitter	emitter	NOUN
ap-1727	52	39	.	.	PUNCT
ap-1727	53	1	in	in	ADP
ap-1727	53	2	this	this	DET
ap-1727	53	3	case	case	NOUN
ap-1727	53	4	,	,	PUNCT
ap-1727	53	5	the	the	DET
ap-1727	53	6	discharge	discharge	NOUN
ap-1727	53	7	current	current	NOUN
ap-1727	53	8	is	be	AUX
ap-1727	53	9	carried	carry	VERB
ap-1727	53	10	by	by	ADP
ap-1727	53	11	the	the	DET
ap-1727	53	12	electron	electron	NOUN
ap-1727	53	13	beam	beam	NOUN
ap-1727	53	14	.	.	PUNCT
ap-1727	54	1	thus	thus	ADV
ap-1727	54	2	the	the	DET
ap-1727	54	3	working	work	VERB
ap-1727	54	4	surface	surface	NOUN
ap-1727	54	5	of	of	ADP
ap-1727	54	6	the	the	DET
ap-1727	54	7	anode	anode	NOUN
ap-1727	54	8	is	be	AUX
ap-1727	54	9	preheated	preheat	VERB
ap-1727	54	10	by	by	ADP
ap-1727	54	11	the	the	DET
ap-1727	54	12	beam	beam	NOUN
ap-1727	54	13	and	and	CCONJ
ap-1727	54	14	the	the	DET
ap-1727	54	15	initial	initial	ADJ
ap-1727	54	16	vapor	vapor	NOUN
ap-1727	54	17	envelope	envelope	NOUN
ap-1727	54	18	is	be	AUX
ap-1727	54	19	formed	form	VERB
ap-1727	54	20	.	.	PUNCT
ap-1727	55	1	in	in	ADP
ap-1727	55	2	the	the	DET
ap-1727	55	3	second	second	ADJ
ap-1727	55	4	stage	stage	NOUN
ap-1727	55	5	,	,	PUNCT
ap-1727	55	6	when	when	SCONJ
ap-1727	55	7	the	the	DET
ap-1727	55	8	dense	dense	ADJ
ap-1727	55	9	plasma	plasma	NOUN
ap-1727	55	10	occupied	occupy	VERB
ap-1727	55	11	the	the	DET
ap-1727	55	12	discharge	discharge	NOUN
ap-1727	55	13	gap	gap	NOUN
ap-1727	55	14	,	,	PUNCT
ap-1727	55	15	the	the	DET
ap-1727	55	16	discharge	discharge	NOUN
ap-1727	55	17	switches	switch	NOUN
ap-1727	55	18	to	to	ADP
ap-1727	55	19	the	the	DET
ap-1727	55	20	plasma	plasma	NOUN
ap-1727	55	21	diode	diode	NOUN
ap-1727	55	22	regime	regime	NOUN
ap-1727	55	23	,	,	PUNCT
ap-1727	55	24	in	in	ADP
ap-1727	55	25	which	which	PRON
ap-1727	55	26	the	the	DET
ap-1727	55	27	discharge	discharge	NOUN
ap-1727	55	28	current	current	NOUN
ap-1727	55	29	is	be	AUX
ap-1727	55	30	determined	determine	VERB
ap-1727	55	31	by	by	ADP
ap-1727	55	32	the	the	DET
ap-1727	55	33	parameters	parameter	NOUN
ap-1727	55	34	of	of	ADP
ap-1727	55	35	the	the	DET
ap-1727	55	36	plasma	plasma	NOUN
ap-1727	55	37	and	and	CCONJ
ap-1727	55	38	discharge	discharge	VERB
ap-1727	55	39	circuit	circuit	NOUN
ap-1727	55	40	.	.	PUNCT
ap-1727	56	1	probe	probe	NOUN
ap-1727	56	2	measurements	measurement	NOUN
ap-1727	56	3	have	have	AUX
ap-1727	56	4	shown	show	VERB
ap-1727	56	5	that	that	SCONJ
ap-1727	56	6	beetwen	beetwen	NOUN
ap-1727	56	7	stages	stage	NOUN
ap-1727	56	8	of	of	ADP
ap-1727	56	9	the	the	DET
ap-1727	56	10	vacuum	vacuum	NOUN
ap-1727	56	11	diode	diode	NOUN
ap-1727	56	12	and	and	CCONJ
ap-1727	56	13	the	the	DET
ap-1727	56	14	plasma	plasma	NOUN
ap-1727	56	15	diode	diode	VERB
ap-1727	56	16	the	the	DET
ap-1727	56	17	transition	transition	NOUN
ap-1727	56	18	regime	regime	NOUN
ap-1727	56	19	exists	exist	VERB
ap-1727	56	20	in	in	ADP
ap-1727	56	21	which	which	PRON
ap-1727	56	22	the	the	DET
ap-1727	56	23	double	double	ADJ
ap-1727	56	24	electric	electric	ADJ
ap-1727	56	25	layer	layer	NOUN
ap-1727	56	26	near	near	ADP
ap-1727	56	27	the	the	DET
ap-1727	56	28	anode	anode	NOUN
ap-1727	56	29	surface	surface	NOUN
ap-1727	56	30	is	be	AUX
ap-1727	56	31	formated	format	VERB
ap-1727	56	32	.	.	PUNCT
ap-1727	57	1	the	the	DET
ap-1727	57	2	intense	intense	ADJ
ap-1727	57	3	electron	electron	NOUN
ap-1727	57	4	beam	beam	NOUN
ap-1727	57	5	are	be	AUX
ap-1727	57	6	accelerated	accelerate	VERB
ap-1727	57	7	into	into	ADP
ap-1727	57	8	the	the	DET
ap-1727	57	9	layer	layer	NOUN
ap-1727	57	10	and	and	CCONJ
ap-1727	57	11	affects	affect	VERB
ap-1727	57	12	on	on	ADP
ap-1727	57	13	the	the	DET
ap-1727	57	14	anode	anode	NOUN
ap-1727	57	15	surface	surface	NOUN
ap-1727	57	16	.	.	PUNCT
ap-1727	58	1	a	a	DET
ap-1727	58	2	high	high	ADJ
ap-1727	58	3	-	-	PUNCT
ap-1727	58	4	current	current	ADJ
ap-1727	58	5	double	double	ADJ
ap-1727	58	6	electric	electric	ADJ
ap-1727	58	7	layer	layer	NOUN
ap-1727	58	8	exists	exist	VERB
ap-1727	58	9	for	for	ADP
ap-1727	58	10	0.5	0.5	NUM
ap-1727	58	11	µs	µs	NOUN
ap-1727	58	12	.	.	PUNCT
ap-1727	59	1	under	under	ADP
ap-1727	59	2	these	these	DET
ap-1727	59	3	conditions	condition	NOUN
ap-1727	59	4	,	,	PUNCT
ap-1727	59	5	the	the	DET
ap-1727	59	6	material	material	NOUN
ap-1727	59	7	is	be	AUX
ap-1727	59	8	intensely	intensely	ADV
ap-1727	59	9	evaporated	evaporate	VERB
ap-1727	59	10	from	from	ADP
ap-1727	59	11	the	the	DET
ap-1727	59	12	anode	anode	NOUN
ap-1727	59	13	surface	surface	NOUN
ap-1727	59	14	,	,	PUNCT
ap-1727	59	15	the	the	DET
ap-1727	59	16	vapor	vapor	NOUN
ap-1727	59	17	is	be	AUX
ap-1727	59	18	quickly	quickly	ADV
ap-1727	59	19	ionized	ionized	ADJ
ap-1727	59	20	and	and	CCONJ
ap-1727	59	21	the	the	DET
ap-1727	59	22	plasma	plasma	NOUN
ap-1727	59	23	is	be	AUX
ap-1727	59	24	rapidly	rapidly	ADV
ap-1727	59	25	heated	heated	ADJ
ap-1727	59	26	due	due	ADP
ap-1727	59	27	to	to	ADP
ap-1727	59	28	the	the	DET
ap-1727	59	29	beam	beam	NOUN
ap-1727	59	30	–	–	PUNCT
ap-1727	59	31	plasma	plasma	NOUN
ap-1727	59	32	interaction	interaction	NOUN
ap-1727	59	33	.	.	PUNCT
ap-1727	60	1	the	the	DET
ap-1727	60	2	total	total	ADJ
ap-1727	60	3	energy	energy	NOUN
ap-1727	60	4	pumped	pump	VERB
ap-1727	60	5	in	in	ADP
ap-1727	60	6	the	the	DET
ap-1727	60	7	anode	anode	NOUN
ap-1727	60	8	plasma	plasma	NOUN
ap-1727	60	9	and	and	CCONJ
ap-1727	60	10	the	the	DET
ap-1727	60	11	anode	anode	NOUN
ap-1727	60	12	itself	itself	PRON
ap-1727	60	13	during	during	ADP
ap-1727	60	14	the	the	DET
ap-1727	60	15	first	first	ADJ
ap-1727	60	16	half	half	ADJ
ap-1727	60	17	-	-	PUNCT
ap-1727	60	18	period	period	NOUN
ap-1727	60	19	of	of	ADP
ap-1727	60	20	the	the	DET
ap-1727	60	21	discharge	discharge	NOUN
ap-1727	60	22	current	current	NOUN
ap-1727	60	23	reaches	reach	VERB
ap-1727	60	24	80	80	NUM
ap-1727	60	25	%	%	NOUN
ap-1727	60	26	of	of	ADP
ap-1727	60	27	the	the	DET
ap-1727	60	28	energy	energy	NOUN
ap-1727	60	29	stored	store	VERB
ap-1727	60	30	in	in	ADP
ap-1727	60	31	the	the	DET
ap-1727	60	32	capacitor	capacitor	NOUN
ap-1727	60	33	bank	bank	PROPN
ap-1727	60	34	.	.	PUNCT
ap-1727	61	1	the	the	DET
ap-1727	61	2	formation	formation	NOUN
ap-1727	61	3	of	of	ADP
ap-1727	61	4	the	the	DET
ap-1727	61	5	double	double	ADJ
ap-1727	61	6	layer	layer	NOUN
ap-1727	61	7	in	in	ADP
ap-1727	61	8	the	the	DET
ap-1727	61	9	transition	transition	NOUN
ap-1727	61	10	regime	regime	NOUN
ap-1727	61	11	is	be	AUX
ap-1727	61	12	determined	determine	VERB
ap-1727	61	13	by	by	ADP
ap-1727	61	14	inability	inability	NOUN
ap-1727	61	15	of	of	ADP
ap-1727	61	16	the	the	DET
ap-1727	61	17	discharge	discharge	NOUN
ap-1727	61	18	gap	gap	NOUN
ap-1727	61	19	plasma	plasma	NOUN
ap-1727	61	20	to	to	PART
ap-1727	61	21	provide	provide	VERB
ap-1727	61	22	the	the	DET
ap-1727	61	23	high	high	ADJ
ap-1727	61	24	discharge	discharge	NOUN
ap-1727	61	25	current	current	ADJ
ap-1727	61	26	density	density	NOUN
ap-1727	62	1	[	[	X
ap-1727	62	2	1	1	NUM
ap-1727	62	3	,	,	PUNCT
ap-1727	62	4	5	5	NUM
ap-1727	62	5	]	]	PUNCT
ap-1727	62	6	.	.	PUNCT
ap-1727	63	1	as	as	ADV
ap-1727	63	2	soon	soon	ADV
ap-1727	63	3	as	as	ADP
ap-1727	63	4	the	the	DET
ap-1727	63	5	dense	dense	ADJ
ap-1727	63	6	plasma	plasma	NOUN
ap-1727	63	7	increases	increase	NOUN
ap-1727	63	8	,	,	PUNCT
ap-1727	63	9	the	the	DET
ap-1727	63	10	current	current	NOUN
ap-1727	63	11	is	be	AUX
ap-1727	63	12	no	no	ADV
ap-1727	63	13	longer	long	ADV
ap-1727	63	14	limited	limit	VERB
ap-1727	63	15	and	and	CCONJ
ap-1727	63	16	the	the	DET
ap-1727	63	17	double	double	ADJ
ap-1727	63	18	layer	layer	NOUN
ap-1727	63	19	is	be	AUX
ap-1727	63	20	disappeared	disappear	VERB
ap-1727	63	21	.	.	PUNCT
ap-1727	64	1	then	then	ADV
ap-1727	64	2	,	,	PUNCT
ap-1727	64	3	the	the	DET
ap-1727	64	4	discharge	discharge	NOUN
ap-1727	64	5	operates	operate	VERB
ap-1727	64	6	in	in	ADP
ap-1727	64	7	the	the	DET
ap-1727	64	8	inductive	inductive	ADJ
ap-1727	64	9	phase	phase	NOUN
ap-1727	64	10	.	.	PUNCT
ap-1727	65	1	118	118	NUM
ap-1727	65	2	vol	vol	NOUN
ap-1727	65	3	.	.	PUNCT
ap-1727	66	1	53	53	NUM
ap-1727	66	2	no	no	NOUN
ap-1727	66	3	.	.	PUNCT
ap-1727	67	1	2/2013	2/2013	NUM
ap-1727	67	2	the	the	DET
ap-1727	67	3	formation	formation	NOUN
ap-1727	67	4	of	of	ADP
ap-1727	67	5	a	a	DET
ap-1727	67	6	poser	poser	NOUN
ap-1727	67	7	multi	multi	ADJ
ap-1727	67	8	-	-	ADJ
ap-1727	67	9	pulse	pulse	ADJ
ap-1727	67	10	extreme	extreme	ADJ
ap-1727	67	11	uv	uv	NOUN
ap-1727	67	12	radiation	radiation	NOUN
ap-1727	67	13	3	3	NUM
ap-1727	67	14	.	.	NOUN
ap-1727	67	15	results	result	NOUN
ap-1727	67	16	and	and	CCONJ
ap-1727	67	17	discussion	discussion	NOUN
ap-1727	67	18	from	from	ADP
ap-1727	67	19	the	the	DET
ap-1727	67	20	results	result	NOUN
ap-1727	67	21	of	of	ADP
ap-1727	67	22	the	the	DET
ap-1727	67	23	experiments	experiment	NOUN
ap-1727	67	24	it	it	PRON
ap-1727	67	25	follows	follow	VERB
ap-1727	67	26	that	that	SCONJ
ap-1727	67	27	the	the	DET
ap-1727	67	28	intensive	intensive	ADJ
ap-1727	67	29	radiation	radiation	NOUN
ap-1727	67	30	in	in	ADP
ap-1727	67	31	the	the	DET
ap-1727	67	32	range	range	NOUN
ap-1727	67	33	of	of	ADP
ap-1727	67	34	wavelengths	wavelength	NOUN
ap-1727	67	35	12.2	12.2	NUM
ap-1727	67	36	÷	÷	NUM
ap-1727	67	37	15.8	15.8	NUM
ap-1727	67	38	nm	nm	NOUN
ap-1727	67	39	arises	arise	VERB
ap-1727	67	40	both	both	CCONJ
ap-1727	67	41	at	at	ADP
ap-1727	67	42	the	the	DET
ap-1727	67	43	transition	transition	NOUN
ap-1727	67	44	regime	regime	NOUN
ap-1727	67	45	and	and	CCONJ
ap-1727	67	46	at	at	ADP
ap-1727	67	47	the	the	DET
ap-1727	67	48	inductive	inductive	ADJ
ap-1727	67	49	stage	stage	NOUN
ap-1727	67	50	of	of	ADP
ap-1727	67	51	the	the	DET
ap-1727	67	52	discharge	discharge	NOUN
ap-1727	67	53	.	.	PUNCT
ap-1727	68	1	the	the	DET
ap-1727	68	2	peculiarity	peculiarity	NOUN
ap-1727	68	3	of	of	ADP
ap-1727	68	4	this	this	DET
ap-1727	68	5	radiation	radiation	NOUN
ap-1727	68	6	is	be	AUX
ap-1727	68	7	that	that	SCONJ
ap-1727	68	8	there	there	PRON
ap-1727	68	9	are	be	VERB
ap-1727	68	10	the	the	DET
ap-1727	68	11	powerful	powerful	ADJ
ap-1727	68	12	(	(	PUNCT
ap-1727	68	13	up	up	ADP
ap-1727	68	14	to	to	ADP
ap-1727	68	15	1mw	1mw	NOUN
ap-1727	68	16	)	)	PUNCT
ap-1727	68	17	short	short	ADJ
ap-1727	68	18	(	(	PUNCT
ap-1727	68	19	100÷200	100÷200	NUM
ap-1727	68	20	ns	ns	NUM
ap-1727	68	21	)	)	PUNCT
ap-1727	68	22	spikes	spike	NOUN
ap-1727	68	23	against	against	ADP
ap-1727	68	24	of	of	ADP
ap-1727	68	25	the	the	DET
ap-1727	68	26	background	background	NOUN
ap-1727	68	27	of	of	ADP
ap-1727	68	28	wide	wide	ADJ
ap-1727	68	29	radiation	radiation	NOUN
ap-1727	68	30	pulses	pulse	NOUN
ap-1727	68	31	with	with	ADP
ap-1727	68	32	duration	duration	NOUN
ap-1727	68	33	about	about	ADP
ap-1727	68	34	half	half	ADJ
ap-1727	68	35	-	-	PUNCT
ap-1727	68	36	period	period	NOUN
ap-1727	68	37	of	of	ADP
ap-1727	68	38	discharge	discharge	VERB
ap-1727	68	39	current	current	ADJ
ap-1727	68	40	oscillations	oscillation	NOUN
ap-1727	68	41	.	.	PUNCT
ap-1727	69	1	the	the	DET
ap-1727	69	2	transversal	transversal	ADJ
ap-1727	69	3	dimension	dimension	NOUN
ap-1727	69	4	of	of	ADP
ap-1727	69	5	the	the	DET
ap-1727	69	6	region	region	NOUN
ap-1727	69	7	of	of	ADP
ap-1727	69	8	generation	generation	NOUN
ap-1727	69	9	is	be	AUX
ap-1727	69	10	comparable	comparable	ADJ
ap-1727	69	11	with	with	ADP
ap-1727	69	12	the	the	DET
ap-1727	69	13	diameter	diameter	NOUN
ap-1727	69	14	of	of	ADP
ap-1727	69	15	the	the	DET
ap-1727	69	16	anode	anode	NOUN
ap-1727	69	17	,	,	PUNCT
ap-1727	69	18	and	and	CCONJ
ap-1727	69	19	its	its	PRON
ap-1727	69	20	length	length	NOUN
ap-1727	69	21	changes	change	NOUN
ap-1727	69	22	depending	depend	VERB
ap-1727	69	23	on	on	ADP
ap-1727	69	24	a	a	DET
ap-1727	69	25	discharge	discharge	NOUN
ap-1727	69	26	voltage	voltage	NOUN
ap-1727	69	27	and	and	CCONJ
ap-1727	69	28	equals	equal	VERB
ap-1727	69	29	4	4	NUM
ap-1727	69	30	÷	÷	NUM
ap-1727	69	31	7	7	NUM
ap-1727	69	32	mm	mm	NOUN
ap-1727	69	33	.	.	PUNCT
ap-1727	70	1	typical	typical	ADJ
ap-1727	70	2	waveforms	waveform	NOUN
ap-1727	70	3	of	of	ADP
ap-1727	70	4	discharge	discharge	NOUN
ap-1727	70	5	current	current	ADJ
ap-1727	70	6	and	and	CCONJ
ap-1727	70	7	voltage	voltage	NOUN
ap-1727	70	8	,	,	PUNCT
ap-1727	70	9	the	the	DET
ap-1727	70	10	radiation	radiation	NOUN
ap-1727	70	11	intensity	intensity	NOUN
ap-1727	70	12	in	in	ADP
ap-1727	70	13	the	the	DET
ap-1727	70	14	selected	select	VERB
ap-1727	70	15	wavelength	wavelength	NOUN
ap-1727	70	16	range	range	NOUN
ap-1727	70	17	and	and	CCONJ
ap-1727	70	18	integral	integral	ADJ
ap-1727	70	19	radiation	radiation	NOUN
ap-1727	70	20	versus	versus	ADP
ap-1727	70	21	time	time	NOUN
ap-1727	70	22	are	be	AUX
ap-1727	70	23	shown	show	VERB
ap-1727	70	24	in	in	ADP
ap-1727	70	25	fig	fig	NOUN
ap-1727	70	26	.	.	PUNCT
ap-1727	71	1	2	2	X
ap-1727	71	2	.	.	X
ap-1727	71	3	it	it	PRON
ap-1727	71	4	is	be	AUX
ap-1727	71	5	seen	see	VERB
ap-1727	71	6	that	that	SCONJ
ap-1727	71	7	in	in	ADP
ap-1727	71	8	the	the	DET
ap-1727	71	9	selected	select	VERB
ap-1727	71	10	wavelength	wavelength	NOUN
ap-1727	71	11	range	range	NOUN
ap-1727	71	12	there	there	PRON
ap-1727	71	13	are	be	VERB
ap-1727	71	14	several	several	ADJ
ap-1727	71	15	radiation	radiation	NOUN
ap-1727	71	16	spikes	spike	NOUN
ap-1727	71	17	,	,	PUNCT
ap-1727	71	18	correlating	correlate	VERB
ap-1727	71	19	with	with	ADP
ap-1727	71	20	the	the	DET
ap-1727	71	21	corresponding	corresponding	ADJ
ap-1727	71	22	half	half	ADJ
ap-1727	71	23	-	-	PUNCT
ap-1727	71	24	periods	period	NOUN
ap-1727	71	25	of	of	ADP
ap-1727	71	26	the	the	DET
ap-1727	71	27	discharge	discharge	NOUN
ap-1727	71	28	current	current	ADJ
ap-1727	71	29	.	.	PUNCT
ap-1727	72	1	in	in	ADP
ap-1727	72	2	the	the	DET
ap-1727	72	3	first	first	ADJ
ap-1727	72	4	half	half	ADJ
ap-1727	72	5	-	-	PUNCT
ap-1727	72	6	period	period	NOUN
ap-1727	72	7	there	there	PRON
ap-1727	72	8	are	be	VERB
ap-1727	72	9	as	as	ADP
ap-1727	72	10	the	the	DET
ap-1727	72	11	wide	wide	ADJ
ap-1727	72	12	pulse	pulse	NOUN
ap-1727	72	13	with	with	ADP
ap-1727	72	14	the	the	DET
ap-1727	72	15	relatively	relatively	ADV
ap-1727	72	16	small	small	ADJ
ap-1727	72	17	amplitude	amplitude	NOUN
ap-1727	72	18	and	and	CCONJ
ap-1727	72	19	a	a	DET
ap-1727	72	20	powerful	powerful	ADJ
ap-1727	72	21	spike	spike	NOUN
ap-1727	72	22	.	.	PUNCT
ap-1727	73	1	whereas	whereas	SCONJ
ap-1727	73	2	the	the	DET
ap-1727	73	3	pulses	pulse	NOUN
ap-1727	73	4	emitted	emit	VERB
ap-1727	73	5	during	during	ADP
ap-1727	73	6	the	the	DET
ap-1727	73	7	second	second	ADJ
ap-1727	73	8	and	and	CCONJ
ap-1727	73	9	third	third	ADJ
ap-1727	73	10	half	half	ADJ
ap-1727	73	11	-	-	PUNCT
ap-1727	73	12	periods	period	NOUN
ap-1727	73	13	have	have	VERB
ap-1727	73	14	only	only	ADV
ap-1727	73	15	the	the	DET
ap-1727	73	16	form	form	NOUN
ap-1727	73	17	of	of	ADP
ap-1727	73	18	the	the	DET
ap-1727	73	19	powerful	powerful	ADJ
ap-1727	73	20	shorter	short	ADJ
ap-1727	73	21	narrow	narrow	ADJ
ap-1727	73	22	spikes	spike	NOUN
ap-1727	73	23	.	.	PUNCT
ap-1727	74	1	it	it	PRON
ap-1727	74	2	is	be	AUX
ap-1727	74	3	clearly	clearly	ADV
ap-1727	74	4	seen	see	VERB
ap-1727	74	5	that	that	SCONJ
ap-1727	74	6	the	the	DET
ap-1727	74	7	radiation	radiation	NOUN
ap-1727	74	8	spikes	spike	NOUN
ap-1727	74	9	of	of	ADP
ap-1727	74	10	the	the	DET
ap-1727	74	11	selected	select	VERB
ap-1727	74	12	wavelength	wavelength	NOUN
ap-1727	74	13	range	range	NOUN
ap-1727	74	14	coincide	coincide	NOUN
ap-1727	74	15	with	with	ADP
ap-1727	74	16	spike	spike	ADJ
ap-1727	74	17	pulses	pulse	NOUN
ap-1727	74	18	of	of	ADP
ap-1727	74	19	integral	integral	ADJ
ap-1727	74	20	radiation	radiation	NOUN
ap-1727	74	21	(	(	PUNCT
ap-1727	74	22	see	see	VERB
ap-1727	74	23	fig	fig	NOUN
ap-1727	74	24	.	.	PUNCT
ap-1727	75	1	2c	2c	NOUN
ap-1727	75	2	and	and	CCONJ
ap-1727	75	3	2d	2d	NUM
ap-1727	75	4	)	)	PUNCT
ap-1727	75	5	.	.	PUNCT
ap-1727	76	1	note	note	VERB
ap-1727	76	2	that	that	SCONJ
ap-1727	76	3	during	during	ADP
ap-1727	76	4	first	first	ADJ
ap-1727	76	5	half	half	ADJ
ap-1727	76	6	-	-	PUNCT
ap-1727	76	7	cycle	cycle	NOUN
ap-1727	76	8	the	the	DET
ap-1727	76	9	narrow	narrow	ADJ
ap-1727	76	10	spike	spike	NOUN
ap-1727	76	11	of	of	ADP
ap-1727	76	12	duration	duration	NOUN
ap-1727	76	13	200	200	NUM
ap-1727	76	14	ns	ns	NUM
ap-1727	76	15	is	be	AUX
ap-1727	76	16	observed	observe	VERB
ap-1727	76	17	only	only	ADV
ap-1727	76	18	at	at	ADP
ap-1727	76	19	discharge	discharge	NOUN
ap-1727	76	20	voltage	voltage	NOUN
ap-1727	76	21	more	more	ADJ
ap-1727	76	22	than	than	ADP
ap-1727	76	23	7	7	NUM
ap-1727	76	24	kv	kv	NOUN
ap-1727	76	25	.	.	PUNCT
ap-1727	77	1	its	its	PRON
ap-1727	77	2	intensity	intensity	NOUN
ap-1727	77	3	grows	grow	VERB
ap-1727	77	4	with	with	ADP
ap-1727	77	5	increase	increase	NOUN
ap-1727	77	6	of	of	ADP
ap-1727	77	7	the	the	DET
ap-1727	77	8	discharge	discharge	NOUN
ap-1727	77	9	voltage	voltage	NOUN
ap-1727	77	10	.	.	PUNCT
ap-1727	78	1	more	more	ADJ
ap-1727	78	2	than	than	ADP
ap-1727	78	3	70	70	NUM
ap-1727	78	4	%	%	NOUN
ap-1727	78	5	of	of	ADP
ap-1727	78	6	energy	energy	NOUN
ap-1727	78	7	,	,	PUNCT
ap-1727	78	8	radiated	radiate	VERB
ap-1727	78	9	during	during	ADP
ap-1727	78	10	first	first	ADJ
ap-1727	78	11	half	half	ADJ
ap-1727	78	12	-	-	PUNCT
ap-1727	78	13	cycle	cycle	NOUN
ap-1727	78	14	,	,	PUNCT
ap-1727	78	15	is	be	AUX
ap-1727	78	16	concentrated	concentrate	VERB
ap-1727	78	17	in	in	ADP
ap-1727	78	18	this	this	DET
ap-1727	78	19	peak	peak	NOUN
ap-1727	78	20	pulse	pulse	NOUN
ap-1727	78	21	.	.	PUNCT
ap-1727	79	1	the	the	DET
ap-1727	79	2	time	time	NOUN
ap-1727	79	3	of	of	ADP
ap-1727	79	4	occurrence	occurrence	NOUN
ap-1727	79	5	of	of	ADP
ap-1727	79	6	the	the	DET
ap-1727	79	7	narrow	narrow	ADJ
ap-1727	79	8	peak	peak	NOUN
ap-1727	79	9	pulse	pulse	NOUN
ap-1727	79	10	depends	depend	VERB
ap-1727	79	11	on	on	ADP
ap-1727	79	12	an	an	DET
ap-1727	79	13	ignition	ignition	NOUN
ap-1727	79	14	voltage	voltage	NOUN
ap-1727	79	15	.	.	PUNCT
ap-1727	80	1	(	(	PUNCT
ap-1727	80	2	for	for	ADP
ap-1727	80	3	higher	high	ADJ
ap-1727	80	4	voltage	voltage	NOUN
ap-1727	80	5	the	the	DET
ap-1727	80	6	peak	peak	NOUN
ap-1727	80	7	pulse	pulse	NOUN
ap-1727	80	8	appears	appear	VERB
ap-1727	80	9	earlier	early	ADV
ap-1727	80	10	.	.	PUNCT
ap-1727	80	11	)	)	PUNCT
ap-1727	81	1	in	in	ADP
ap-1727	81	2	second	second	ADJ
ap-1727	81	3	and	and	CCONJ
ap-1727	81	4	third	third	ADJ
ap-1727	81	5	half	half	ADJ
ap-1727	81	6	-	-	PUNCT
ap-1727	81	7	cycles	cycle	NOUN
ap-1727	81	8	these	these	DET
ap-1727	81	9	radiation	radiation	NOUN
ap-1727	81	10	spikes	spike	NOUN
ap-1727	81	11	are	be	AUX
ap-1727	81	12	always	always	ADV
ap-1727	81	13	observed	observe	VERB
ap-1727	81	14	near	near	ADP
ap-1727	81	15	maximum	maximum	NOUN
ap-1727	81	16	of	of	ADP
ap-1727	81	17	the	the	DET
ap-1727	81	18	current	current	NOUN
ap-1727	81	19	.	.	PUNCT
ap-1727	82	1	the	the	DET
ap-1727	82	2	radiation	radiation	NOUN
ap-1727	82	3	spikes	spike	NOUN
ap-1727	82	4	are	be	AUX
ap-1727	82	5	registered	register	VERB
ap-1727	82	6	at	at	ADP
ap-1727	82	7	the	the	DET
ap-1727	82	8	current	current	ADJ
ap-1727	82	9	amplitude	amplitude	NOUN
ap-1727	82	10	more	more	ADJ
ap-1727	82	11	than	than	ADP
ap-1727	82	12	10	10	NUM
ap-1727	82	13	ka	ka	X
ap-1727	82	14	.	.	PUNCT
ap-1727	83	1	their	their	PRON
ap-1727	83	2	intensities	intensity	NOUN
ap-1727	83	3	grow	grow	VERB
ap-1727	83	4	with	with	ADP
ap-1727	83	5	growth	growth	NOUN
ap-1727	83	6	of	of	ADP
ap-1727	83	7	the	the	DET
ap-1727	83	8	discharge	discharge	NOUN
ap-1727	83	9	voltage	voltage	NOUN
ap-1727	83	10	.	.	PUNCT
ap-1727	84	1	note	note	VERB
ap-1727	84	2	that	that	SCONJ
ap-1727	84	3	in	in	ADP
ap-1727	84	4	second	second	ADJ
ap-1727	84	5	half	half	ADJ
ap-1727	84	6	-	-	PUNCT
ap-1727	84	7	cycle	cycle	NOUN
ap-1727	84	8	of	of	ADP
ap-1727	84	9	the	the	DET
ap-1727	84	10	current	current	ADJ
ap-1727	84	11	oscillations	oscillation	NOUN
ap-1727	84	12	an	an	DET
ap-1727	84	13	additional	additional	ADJ
ap-1727	84	14	spike	spike	NOUN
ap-1727	84	15	-	-	PUNCT
ap-1727	84	16	satellite	satellite	NOUN
ap-1727	84	17	of	of	ADP
ap-1727	84	18	duration	duration	NOUN
ap-1727	84	19	200	200	NUM
ap-1727	84	20	ns	ns	NUM
ap-1727	84	21	is	be	AUX
ap-1727	84	22	observed	observe	VERB
ap-1727	84	23	at	at	ADP
ap-1727	84	24	discharge	discharge	NOUN
ap-1727	84	25	voltage	voltage	NOUN
ap-1727	84	26	5	5	NUM
ap-1727	84	27	÷	÷	SYM
ap-1727	84	28	8	8	NUM
ap-1727	84	29	kv	kv	PROPN
ap-1727	84	30	(	(	PUNCT
ap-1727	84	31	fig	fig	NOUN
ap-1727	84	32	.	.	PUNCT
ap-1727	85	1	2c	2c	NUM
ap-1727	85	2	)	)	PUNCT
ap-1727	85	3	.	.	PUNCT
ap-1727	86	1	this	this	DET
ap-1727	86	2	pulse	pulse	NOUN
ap-1727	86	3	follows	follow	VERB
ap-1727	86	4	after	after	ADP
ap-1727	86	5	the	the	DET
ap-1727	86	6	basic	basic	ADJ
ap-1727	86	7	spike	spike	NOUN
ap-1727	86	8	through	through	ADP
ap-1727	86	9	200	200	NUM
ap-1727	86	10	ns	ns	NUM
ap-1727	86	11	.	.	PUNCT
ap-1727	87	1	the	the	DET
ap-1727	87	2	intensity	intensity	NOUN
ap-1727	87	3	of	of	ADP
ap-1727	87	4	the	the	DET
ap-1727	87	5	spike	spike	NOUN
ap-1727	87	6	-	-	PUNCT
ap-1727	87	7	satellite	satellite	NOUN
ap-1727	87	8	also	also	ADV
ap-1727	87	9	grows	grow	VERB
ap-1727	87	10	with	with	ADP
ap-1727	87	11	increase	increase	NOUN
ap-1727	87	12	of	of	ADP
ap-1727	87	13	the	the	DET
ap-1727	87	14	discharge	discharge	NOUN
ap-1727	87	15	voltage	voltage	NOUN
ap-1727	87	16	.	.	PUNCT
ap-1727	88	1	at	at	ADP
ap-1727	88	2	voltage	voltage	NOUN
ap-1727	88	3	more	more	ADJ
ap-1727	88	4	than	than	ADP
ap-1727	88	5	8	8	NUM
ap-1727	88	6	kv	kv	NOUN
ap-1727	88	7	the	the	DET
ap-1727	88	8	spikesatellite	spikesatellite	NOUN
ap-1727	88	9	disappears	disappear	VERB
ap-1727	88	10	.	.	PUNCT
ap-1727	89	1	similar	similar	ADJ
ap-1727	89	2	two	two	NUM
ap-1727	89	3	spikes	spike	NOUN
ap-1727	89	4	during	during	ADP
ap-1727	89	5	the	the	DET
ap-1727	89	6	one	one	NUM
ap-1727	89	7	half	half	ADJ
ap-1727	89	8	-	-	PUNCT
ap-1727	89	9	period	period	NOUN
ap-1727	89	10	have	have	AUX
ap-1727	89	11	been	be	AUX
ap-1727	89	12	observed	observe	VERB
ap-1727	89	13	in	in	ADP
ap-1727	89	14	[	[	X
ap-1727	89	15	8	8	NUM
ap-1727	89	16	]	]	PUNCT
ap-1727	89	17	.	.	PUNCT
ap-1727	90	1	for	for	ADP
ap-1727	90	2	effective	effective	ADJ
ap-1727	90	3	generation	generation	NOUN
ap-1727	90	4	of	of	ADP
ap-1727	90	5	the	the	DET
ap-1727	90	6	radiation	radiation	NOUN
ap-1727	90	7	in	in	ADP
ap-1727	90	8	the	the	DET
ap-1727	90	9	selected	select	VERB
ap-1727	90	10	wavelength	wavelength	NOUN
ap-1727	90	11	range	range	NOUN
ap-1727	90	12	it	it	PRON
ap-1727	90	13	is	be	AUX
ap-1727	90	14	required	require	VERB
ap-1727	90	15	an	an	DET
ap-1727	90	16	additional	additional	ADJ
ap-1727	90	17	energy	energy	NOUN
ap-1727	90	18	pumping	pumping	NOUN
ap-1727	90	19	.	.	PUNCT
ap-1727	91	1	in	in	ADP
ap-1727	91	2	our	our	PRON
ap-1727	91	3	case	case	NOUN
ap-1727	91	4	,	,	PUNCT
ap-1727	91	5	additional	additional	ADJ
ap-1727	91	6	energy	energy	NOUN
ap-1727	91	7	pumping	pumping	NOUN
ap-1727	91	8	is	be	AUX
ap-1727	91	9	provided	provide	VERB
ap-1727	91	10	by	by	ADP
ap-1727	91	11	the	the	DET
ap-1727	91	12	electron	electron	NOUN
ap-1727	91	13	beam	beam	NOUN
ap-1727	91	14	,	,	PUNCT
ap-1727	91	15	generated	generate	VERB
ap-1727	91	16	by	by	ADP
ap-1727	91	17	the	the	DET
ap-1727	91	18	electric	electric	ADJ
ap-1727	91	19	double	double	ADJ
ap-1727	91	20	layer	layer	NOUN
ap-1727	91	21	which	which	PRON
ap-1727	91	22	is	be	AUX
ap-1727	91	23	formed	form	VERB
ap-1727	91	24	periodically	periodically	ADV
ap-1727	91	25	.	.	PUNCT
ap-1727	92	1	in	in	ADP
ap-1727	92	2	fig	fig	NOUN
ap-1727	92	3	.	.	PUNCT
ap-1727	93	1	3	3	NUM
ap-1727	93	2	the	the	DET
ap-1727	93	3	dependence	dependence	NOUN
ap-1727	93	4	of	of	ADP
ap-1727	93	5	power	power	NOUN
ap-1727	93	6	,	,	PUNCT
ap-1727	93	7	pumped	pump	VERB
ap-1727	93	8	in	in	ADP
ap-1727	93	9	discharge	discharge	NOUN
ap-1727	93	10	,	,	PUNCT
ap-1727	93	11	and	and	CCONJ
ap-1727	93	12	corresponding	correspond	VERB
ap-1727	93	13	pulses	pulse	NOUN
ap-1727	93	14	of	of	ADP
ap-1727	93	15	radiation	radiation	NOUN
ap-1727	93	16	on	on	ADP
ap-1727	93	17	time	time	NOUN
ap-1727	93	18	are	be	AUX
ap-1727	93	19	shown	show	VERB
ap-1727	93	20	.	.	PUNCT
ap-1727	94	1	one	one	PRON
ap-1727	94	2	can	can	AUX
ap-1727	94	3	see	see	VERB
ap-1727	94	4	that	that	SCONJ
ap-1727	94	5	the	the	DET
ap-1727	94	6	spikes	spike	NOUN
ap-1727	94	7	of	of	ADP
ap-1727	94	8	radiation	radiation	NOUN
ap-1727	94	9	coincide	coincide	NOUN
ap-1727	94	10	with	with	ADP
ap-1727	94	11	spikes	spike	NOUN
ap-1727	94	12	of	of	ADP
ap-1727	94	13	power	power	NOUN
ap-1727	94	14	,	,	PUNCT
ap-1727	94	15	pumped	pump	VERB
ap-1727	94	16	in	in	ADP
ap-1727	94	17	discharge	discharge	NOUN
ap-1727	94	18	.	.	PUNCT
ap-1727	95	1	the	the	DET
ap-1727	95	2	different	different	ADJ
ap-1727	95	3	time	time	NOUN
ap-1727	95	4	behavior	behavior	NOUN
ap-1727	95	5	of	of	ADP
ap-1727	95	6	radiation	radiation	NOUN
ap-1727	95	7	in	in	ADP
ap-1727	95	8	this	this	DET
ap-1727	95	9	wavelength	wavelength	NOUN
ap-1727	95	10	range	range	NOUN
ap-1727	95	11	in	in	ADP
ap-1727	95	12	the	the	DET
ap-1727	95	13	first	first	ADJ
ap-1727	95	14	and	and	CCONJ
ap-1727	95	15	subsequent	subsequent	ADJ
ap-1727	95	16	half	half	ADJ
ap-1727	95	17	-	-	PUNCT
ap-1727	95	18	periods	period	NOUN
ap-1727	95	19	can	can	AUX
ap-1727	95	20	be	be	AUX
ap-1727	95	21	explained	explain	VERB
ap-1727	95	22	as	as	SCONJ
ap-1727	95	23	follows	follow	VERB
ap-1727	95	24	.	.	PUNCT
ap-1727	96	1	in	in	ADP
ap-1727	96	2	the	the	DET
ap-1727	96	3	first	first	ADJ
ap-1727	96	4	figure	figure	NOUN
ap-1727	96	5	2	2	NUM
ap-1727	96	6	.	.	PUNCT
ap-1727	96	7	waveforms	waveform	NOUN
ap-1727	96	8	of	of	ADP
ap-1727	96	9	the	the	DET
ap-1727	96	10	(	(	PUNCT
ap-1727	96	11	a	a	NOUN
ap-1727	96	12	)	)	PUNCT
ap-1727	96	13	discharge	discharge	NOUN
ap-1727	96	14	current	current	ADJ
ap-1727	96	15	,	,	PUNCT
ap-1727	96	16	(	(	PUNCT
ap-1727	96	17	b	b	X
ap-1727	96	18	)	)	PUNCT
ap-1727	96	19	discharge	discharge	NOUN
ap-1727	96	20	voltage	voltage	NOUN
ap-1727	96	21	,	,	PUNCT
ap-1727	96	22	(	(	PUNCT
ap-1727	96	23	c	c	X
ap-1727	96	24	)	)	PUNCT
ap-1727	96	25	radiation	radiation	NOUN
ap-1727	96	26	intensity	intensity	NOUN
ap-1727	96	27	in	in	ADP
ap-1727	96	28	the	the	DET
ap-1727	96	29	12.2	12.2	NUM
ap-1727	96	30	÷	÷	NUM
ap-1727	96	31	15.8	15.8	NUM
ap-1727	96	32	nm	nm	ADJ
ap-1727	96	33	wavelength	wavelength	NOUN
ap-1727	96	34	range	range	NOUN
ap-1727	96	35	,	,	PUNCT
ap-1727	96	36	and	and	CCONJ
ap-1727	96	37	(	(	PUNCT
ap-1727	96	38	d	d	X
ap-1727	96	39	)	)	PUNCT
ap-1727	96	40	integral	integral	ADJ
ap-1727	96	41	plasma	plasma	NOUN
ap-1727	96	42	radiation	radiation	NOUN
ap-1727	96	43	versus	versus	ADP
ap-1727	96	44	time	time	NOUN
ap-1727	96	45	,	,	PUNCT
ap-1727	96	46	da	da	PROPN
ap-1727	96	47	=	=	PUNCT
ap-1727	96	48	2.5	2.5	NUM
ap-1727	96	49	mm	mm	NOUN
ap-1727	96	50	,	,	PUNCT
ap-1727	96	51	vdis	vdi	NOUN
ap-1727	96	52	=	=	SYM
ap-1727	96	53	8	8	NUM
ap-1727	96	54	kv	kv	PROPN
ap-1727	96	55	,	,	PUNCT
ap-1727	96	56	ldis	ldis	NOUN
ap-1727	96	57	=	=	SYM
ap-1727	96	58	5	5	NUM
ap-1727	96	59	cm	cm	NOUN
ap-1727	96	60	.	.	PUNCT
ap-1727	97	1	half	half	ADJ
ap-1727	97	2	-	-	PUNCT
ap-1727	97	3	period	period	NOUN
ap-1727	97	4	,	,	PUNCT
ap-1727	97	5	there	there	PRON
ap-1727	97	6	is	be	VERB
ap-1727	97	7	still	still	ADV
ap-1727	97	8	an	an	DET
ap-1727	97	9	influx	influx	NOUN
ap-1727	97	10	of	of	ADP
ap-1727	97	11	neutral	neutral	ADJ
ap-1727	97	12	atoms	atom	NOUN
ap-1727	97	13	into	into	ADP
ap-1727	97	14	the	the	DET
ap-1727	97	15	anode	anode	NOUN
ap-1727	97	16	region	region	NOUN
ap-1727	97	17	due	due	ADP
ap-1727	97	18	to	to	ADP
ap-1727	97	19	intense	intense	ADJ
ap-1727	97	20	evaporation	evaporation	NOUN
ap-1727	97	21	of	of	ADP
ap-1727	97	22	the	the	DET
ap-1727	97	23	anode	anode	NOUN
ap-1727	97	24	material	material	NOUN
ap-1727	97	25	.	.	PUNCT
ap-1727	98	1	moreover	moreover	ADV
ap-1727	98	2	,	,	PUNCT
ap-1727	98	3	since	since	SCONJ
ap-1727	98	4	the	the	DET
ap-1727	98	5	discharge	discharge	NOUN
ap-1727	98	6	current	current	NOUN
ap-1727	98	7	is	be	AUX
ap-1727	98	8	high	high	ADJ
ap-1727	98	9	,	,	PUNCT
ap-1727	98	10	the	the	DET
ap-1727	98	11	energy	energy	NOUN
ap-1727	98	12	distribution	distribution	NOUN
ap-1727	98	13	of	of	ADP
ap-1727	98	14	plasma	plasma	NOUN
ap-1727	98	15	electrons	electron	NOUN
ap-1727	98	16	is	be	AUX
ap-1727	98	17	fairly	fairly	ADV
ap-1727	98	18	wide	wide	ADJ
ap-1727	98	19	.	.	PUNCT
ap-1727	99	1	this	this	PRON
ap-1727	99	2	leads	lead	VERB
ap-1727	99	3	to	to	ADP
ap-1727	99	4	a	a	DET
ap-1727	99	5	significant	significant	ADJ
ap-1727	99	6	collisional	collisional	ADJ
ap-1727	99	7	energy	energy	NOUN
ap-1727	99	8	pumping	pumping	NOUN
ap-1727	99	9	;	;	PUNCT
ap-1727	99	10	the	the	DET
ap-1727	99	11	broadening	broadening	NOUN
ap-1727	99	12	of	of	ADP
ap-1727	99	13	the	the	DET
ap-1727	99	14	distribution	distribution	NOUN
ap-1727	99	15	function	function	NOUN
ap-1727	99	16	of	of	ADP
ap-1727	99	17	ions	ion	NOUN
ap-1727	99	18	over	over	ADP
ap-1727	99	19	charge	charge	NOUN
ap-1727	99	20	states	state	NOUN
ap-1727	99	21	;	;	PUNCT
ap-1727	99	22	and	and	CCONJ
ap-1727	99	23	,	,	PUNCT
ap-1727	99	24	accordingly	accordingly	ADV
ap-1727	99	25	,	,	PUNCT
ap-1727	99	26	the	the	DET
ap-1727	99	27	generation	generation	NOUN
ap-1727	99	28	of	of	ADP
ap-1727	99	29	ordinary	ordinary	ADJ
ap-1727	99	30	recombination	recombination	NOUN
ap-1727	99	31	radiation	radiation	NOUN
ap-1727	99	32	within	within	ADP
ap-1727	99	33	a	a	DET
ap-1727	99	34	wide	wide	ADJ
ap-1727	99	35	spectral	spectral	ADJ
ap-1727	99	36	range	range	NOUN
ap-1727	99	37	with	with	ADP
ap-1727	99	38	a	a	DET
ap-1727	99	39	relatively	relatively	ADV
ap-1727	99	40	low	low	ADJ
ap-1727	99	41	intensity	intensity	NOUN
ap-1727	99	42	.	.	PUNCT
ap-1727	100	1	by	by	ADP
ap-1727	100	2	the	the	DET
ap-1727	100	3	end	end	NOUN
ap-1727	100	4	of	of	ADP
ap-1727	100	5	the	the	DET
ap-1727	100	6	first	first	ADJ
ap-1727	100	7	half	half	ADJ
ap-1727	100	8	-	-	PUNCT
ap-1727	100	9	period	period	NOUN
ap-1727	100	10	,	,	PUNCT
ap-1727	100	11	the	the	DET
ap-1727	100	12	number	number	NOUN
ap-1727	100	13	of	of	ADP
ap-1727	100	14	ions	ion	NOUN
ap-1727	100	15	in	in	ADP
ap-1727	100	16	the	the	DET
ap-1727	100	17	charge	charge	NOUN
ap-1727	100	18	states	state	NOUN
ap-1727	100	19	corresponding	correspond	VERB
ap-1727	100	20	to	to	ADP
ap-1727	100	21	radiation	radiation	NOUN
ap-1727	100	22	in	in	ADP
ap-1727	100	23	the	the	DET
ap-1727	100	24	12.2	12.2	NUM
ap-1727	100	25	÷	÷	NUM
ap-1727	100	26	15.8	15.8	NUM
ap-1727	100	27	nm	nm	ADJ
ap-1727	100	28	wavelength	wavelength	NOUN
ap-1727	100	29	range	range	NOUN
ap-1727	100	30	decreases	decrease	VERB
ap-1727	100	31	.	.	PUNCT
ap-1727	101	1	in	in	ADP
ap-1727	101	2	the	the	DET
ap-1727	101	3	second	second	ADJ
ap-1727	101	4	and	and	CCONJ
ap-1727	101	5	third	third	ADJ
ap-1727	101	6	half	half	ADJ
ap-1727	101	7	-	-	PUNCT
ap-1727	101	8	periods	period	NOUN
ap-1727	101	9	the	the	DET
ap-1727	101	10	plasma	plasma	NOUN
ap-1727	101	11	already	already	ADV
ap-1727	101	12	exists	exist	VERB
ap-1727	101	13	.	.	PUNCT
ap-1727	102	1	it	it	PRON
ap-1727	102	2	is	be	AUX
ap-1727	102	3	necessary	necessary	ADJ
ap-1727	102	4	only	only	ADV
ap-1727	102	5	to	to	PART
ap-1727	102	6	increase	increase	VERB
ap-1727	102	7	the	the	DET
ap-1727	102	8	charge	charge	NOUN
ap-1727	102	9	states	state	NOUN
ap-1727	102	10	(	(	PUNCT
ap-1727	102	11	i.e.	i.e.	X
ap-1727	102	12	,	,	PUNCT
ap-1727	102	13	plasma	plasma	NOUN
ap-1727	102	14	temperature	temperature	NOUN
ap-1727	102	15	)	)	PUNCT
ap-1727	102	16	of	of	ADP
ap-1727	102	17	ions	ion	NOUN
ap-1727	102	18	up	up	ADP
ap-1727	102	19	to	to	ADP
ap-1727	102	20	necessary	necessary	ADJ
ap-1727	102	21	ones	one	NOUN
ap-1727	102	22	.	.	PUNCT
ap-1727	103	1	moreover	moreover	ADV
ap-1727	103	2	the	the	DET
ap-1727	103	3	plasma	plasma	NOUN
ap-1727	103	4	is	be	AUX
ap-1727	103	5	relatively	relatively	ADV
ap-1727	103	6	dense	dense	ADJ
ap-1727	103	7	and	and	CCONJ
ap-1727	103	8	focused	focus	VERB
ap-1727	103	9	during	during	ADP
ap-1727	103	10	previous	previous	ADJ
ap-1727	103	11	half	half	ADJ
ap-1727	103	12	-	-	PUNCT
ap-1727	103	13	period(s	period(s	NOUN
ap-1727	103	14	)	)	PUNCT
ap-1727	103	15	.	.	PUNCT
ap-1727	104	1	in	in	ADP
ap-1727	104	2	the	the	DET
ap-1727	104	3	second	second	ADJ
ap-1727	104	4	and	and	CCONJ
ap-1727	104	5	third	third	ADJ
ap-1727	104	6	half	half	ADJ
ap-1727	104	7	-	-	PUNCT
ap-1727	104	8	periods	period	VERB
ap-1727	104	9	the	the	DET
ap-1727	104	10	neutral	neutral	ADJ
ap-1727	104	11	atom	atom	NOUN
ap-1727	104	12	flux	flux	NOUN
ap-1727	104	13	into	into	ADP
ap-1727	104	14	the	the	DET
ap-1727	104	15	anode	anode	NOUN
ap-1727	104	16	region	region	NOUN
ap-1727	104	17	is	be	AUX
ap-1727	104	18	much	much	ADV
ap-1727	104	19	less	less	ADJ
ap-1727	104	20	than	than	ADP
ap-1727	104	21	one	one	NUM
ap-1727	104	22	in	in	ADP
ap-1727	104	23	the	the	DET
ap-1727	104	24	first	first	ADJ
ap-1727	104	25	119	119	NUM
ap-1727	104	26	ievgeniia	ievgeniia	NOUN
ap-1727	104	27	v.	v.	ADP
ap-1727	104	28	borgun	borgun	NOUN
ap-1727	104	29	et	et	PROPN
ap-1727	104	30	al	al	PROPN
ap-1727	104	31	.	.	PROPN
ap-1727	104	32	acta	acta	PROPN
ap-1727	104	33	polytechnica	polytechnica	PROPN
ap-1727	104	34	figure	figure	NOUN
ap-1727	104	35	3	3	NUM
ap-1727	104	36	.	.	PUNCT
ap-1727	105	1	(	(	PUNCT
ap-1727	105	2	a	a	X
ap-1727	105	3	)	)	PUNCT
ap-1727	105	4	the	the	DET
ap-1727	105	5	temporal	temporal	ADJ
ap-1727	105	6	dependences	dependence	NOUN
ap-1727	105	7	of	of	ADP
ap-1727	105	8	power	power	NOUN
ap-1727	105	9	,	,	PUNCT
ap-1727	105	10	pumped	pump	VERB
ap-1727	105	11	in	in	ADP
ap-1727	105	12	discharge	discharge	NOUN
ap-1727	105	13	,	,	PUNCT
ap-1727	105	14	(	(	PUNCT
ap-1727	105	15	b	b	X
ap-1727	105	16	)	)	PUNCT
ap-1727	105	17	radiation	radiation	NOUN
ap-1727	105	18	intensity	intensity	NOUN
ap-1727	105	19	in	in	ADP
ap-1727	105	20	the	the	DET
ap-1727	105	21	12.2	12.2	NUM
ap-1727	105	22	÷	÷	NUM
ap-1727	105	23	15.8	15.8	NUM
ap-1727	105	24	nm	nm	ADJ
ap-1727	105	25	wavelength	wavelength	NOUN
ap-1727	105	26	range	range	NOUN
ap-1727	105	27	;	;	PUNCT
ap-1727	105	28	da	da	NOUN
ap-1727	105	29	=	=	PUNCT
ap-1727	105	30	2.5	2.5	NUM
ap-1727	105	31	mm	mm	NOUN
ap-1727	105	32	,	,	PUNCT
ap-1727	105	33	vdis	vdi	NOUN
ap-1727	105	34	=	=	SYM
ap-1727	105	35	8	8	NUM
ap-1727	105	36	kv	kv	PROPN
ap-1727	105	37	,	,	PUNCT
ap-1727	105	38	ldis	ldis	NOUN
ap-1727	105	39	=	=	SYM
ap-1727	105	40	5	5	NUM
ap-1727	105	41	cm	cm	NOUN
ap-1727	105	42	.	.	PUNCT
ap-1727	106	1	half	half	ADJ
ap-1727	106	2	-	-	PUNCT
ap-1727	106	3	period	period	NOUN
ap-1727	106	4	,	,	PUNCT
ap-1727	106	5	because	because	SCONJ
ap-1727	106	6	existing	exist	VERB
ap-1727	106	7	plasma	plasma	NOUN
ap-1727	106	8	shades	shade	NOUN
ap-1727	106	9	anode	anode	VERB
ap-1727	106	10	from	from	ADP
ap-1727	106	11	electron	electron	NOUN
ap-1727	106	12	beam	beam	NOUN
ap-1727	106	13	bombardment	bombardment	NOUN
ap-1727	106	14	.	.	PUNCT
ap-1727	107	1	thus	thus	ADV
ap-1727	107	2	in	in	ADP
ap-1727	107	3	the	the	DET
ap-1727	107	4	subsequent	subsequent	ADJ
ap-1727	107	5	half	half	ADJ
ap-1727	107	6	-	-	PUNCT
ap-1727	107	7	periods	period	NOUN
ap-1727	107	8	the	the	DET
ap-1727	107	9	energy	energy	NOUN
ap-1727	107	10	expenditure	expenditure	NOUN
ap-1727	107	11	on	on	ADP
ap-1727	107	12	formation	formation	NOUN
ap-1727	107	13	of	of	ADP
ap-1727	107	14	dense	dense	ADJ
ap-1727	107	15	plasma	plasma	NOUN
ap-1727	107	16	with	with	ADP
ap-1727	107	17	necessary	necessary	ADJ
ap-1727	107	18	charge	charge	NOUN
ap-1727	107	19	states	state	NOUN
ap-1727	107	20	of	of	ADP
ap-1727	107	21	ions	ion	NOUN
ap-1727	107	22	is	be	AUX
ap-1727	107	23	essentially	essentially	ADV
ap-1727	107	24	smaller	small	ADJ
ap-1727	107	25	than	than	ADP
ap-1727	107	26	in	in	ADP
ap-1727	107	27	first	first	ADJ
ap-1727	107	28	half	half	ADJ
ap-1727	107	29	-	-	PUNCT
ap-1727	107	30	period	period	NOUN
ap-1727	107	31	.	.	PUNCT
ap-1727	108	1	after	after	ADP
ap-1727	108	2	formation	formation	NOUN
ap-1727	108	3	of	of	ADP
ap-1727	108	4	plasma	plasma	NOUN
ap-1727	108	5	with	with	ADP
ap-1727	108	6	necessary	necessary	ADJ
ap-1727	108	7	charge	charge	NOUN
ap-1727	108	8	states	state	NOUN
ap-1727	108	9	of	of	ADP
ap-1727	108	10	ions	ion	NOUN
ap-1727	108	11	in	in	ADP
ap-1727	108	12	the	the	DET
ap-1727	108	13	second	second	ADJ
ap-1727	108	14	and	and	CCONJ
ap-1727	108	15	third	third	ADJ
ap-1727	108	16	half	half	ADJ
ap-1727	108	17	-	-	PUNCT
ap-1727	108	18	periods	period	VERB
ap-1727	108	19	the	the	DET
ap-1727	108	20	distribution	distribution	NOUN
ap-1727	108	21	function	function	NOUN
ap-1727	108	22	of	of	ADP
ap-1727	108	23	ions	ion	NOUN
ap-1727	108	24	on	on	ADP
ap-1727	108	25	charge	charge	NOUN
ap-1727	108	26	states	state	NOUN
ap-1727	108	27	is	be	AUX
ap-1727	108	28	more	more	ADV
ap-1727	108	29	narrow	narrow	ADJ
ap-1727	108	30	than	than	ADP
ap-1727	108	31	in	in	ADP
ap-1727	108	32	the	the	DET
ap-1727	108	33	first	first	ADJ
ap-1727	108	34	half	half	ADJ
ap-1727	108	35	-	-	PUNCT
ap-1727	108	36	period	period	NOUN
ap-1727	108	37	.	.	PUNCT
ap-1727	109	1	we	we	PRON
ap-1727	109	2	examined	examine	VERB
ap-1727	109	3	how	how	SCONJ
ap-1727	109	4	the	the	DET
ap-1727	109	5	radiation	radiation	NOUN
ap-1727	109	6	intensity	intensity	NOUN
ap-1727	109	7	and	and	CCONJ
ap-1727	109	8	the	the	DET
ap-1727	109	9	conversion	conversion	NOUN
ap-1727	109	10	efficiency	efficiency	NOUN
ap-1727	109	11	of	of	ADP
ap-1727	109	12	the	the	DET
ap-1727	109	13	stored	store	VERB
ap-1727	109	14	energy	energy	NOUN
ap-1727	109	15	into	into	ADP
ap-1727	109	16	radiation	radiation	NOUN
ap-1727	109	17	depend	depend	VERB
ap-1727	109	18	on	on	ADP
ap-1727	109	19	the	the	DET
ap-1727	109	20	external	external	ADJ
ap-1727	109	21	conditions	condition	NOUN
ap-1727	109	22	.	.	PUNCT
ap-1727	110	1	fig	fig	NOUN
ap-1727	110	2	.	.	PUNCT
ap-1727	111	1	4a	4a	NOUN
ap-1727	111	2	shows	show	VERB
ap-1727	111	3	how	how	SCONJ
ap-1727	111	4	the	the	DET
ap-1727	111	5	total	total	NOUN
ap-1727	111	6	(	(	PUNCT
ap-1727	111	7	within	within	ADP
ap-1727	111	8	the	the	DET
ap-1727	111	9	2π	2π	NUM
ap-1727	111	10	solid	solid	ADJ
ap-1727	111	11	angle	angle	NOUN
ap-1727	111	12	)	)	PUNCT
ap-1727	111	13	energy	energy	NOUN
ap-1727	111	14	of	of	ADP
ap-1727	111	15	the	the	DET
ap-1727	111	16	radiation	radiation	NOUN
ap-1727	111	17	pulses	pulse	NOUN
ap-1727	111	18	(	(	PUNCT
ap-1727	111	19	all	all	DET
ap-1727	111	20	pulses	pulse	NOUN
ap-1727	111	21	:	:	PUNCT
ap-1727	111	22	spike	spike	ADJ
ap-1727	111	23	and	and	CCONJ
ap-1727	111	24	wide	wide	ADJ
ap-1727	111	25	)	)	PUNCT
ap-1727	111	26	in	in	ADP
ap-1727	111	27	the	the	DET
ap-1727	111	28	12.2	12.2	NUM
ap-1727	111	29	÷	÷	NUM
ap-1727	111	30	15.8	15.8	NUM
ap-1727	111	31	nm	nm	ADJ
ap-1727	111	32	wavelength	wavelength	NOUN
ap-1727	111	33	range	range	NOUN
ap-1727	111	34	depends	depend	VERB
ap-1727	111	35	on	on	ADP
ap-1727	111	36	the	the	DET
ap-1727	111	37	energy	energy	NOUN
ap-1727	111	38	stored	store	VERB
ap-1727	111	39	in	in	ADP
ap-1727	111	40	the	the	DET
ap-1727	111	41	capacitor	capacitor	NOUN
ap-1727	111	42	bank	bank	PROPN
ap-1727	111	43	.	.	PUNCT
ap-1727	112	1	the	the	DET
ap-1727	112	2	dependence	dependence	NOUN
ap-1727	112	3	is	be	AUX
ap-1727	112	4	seen	see	VERB
ap-1727	112	5	to	to	PART
ap-1727	112	6	reach	reach	VERB
ap-1727	112	7	maximum	maximum	ADV
ap-1727	112	8	at	at	ADP
ap-1727	112	9	stored	store	VERB
ap-1727	112	10	energies	energy	NOUN
ap-1727	112	11	larger	large	ADJ
ap-1727	112	12	than	than	ADP
ap-1727	112	13	140	140	NUM
ap-1727	112	14	j.	j.	PROPN
ap-1727	112	15	it	it	PRON
ap-1727	112	16	is	be	AUX
ap-1727	112	17	necessary	necessary	ADJ
ap-1727	112	18	to	to	PART
ap-1727	112	19	note	note	VERB
ap-1727	112	20	that	that	SCONJ
ap-1727	112	21	this	this	DET
ap-1727	112	22	maximum	maximum	NOUN
ap-1727	112	23	in	in	ADP
ap-1727	112	24	dependence	dependence	NOUN
ap-1727	112	25	of	of	ADP
ap-1727	112	26	the	the	DET
ap-1727	112	27	radiation	radiation	NOUN
ap-1727	112	28	energy	energy	NOUN
ap-1727	112	29	on	on	ADP
ap-1727	112	30	the	the	DET
ap-1727	112	31	energy	energy	NOUN
ap-1727	112	32	stored	store	VERB
ap-1727	112	33	in	in	ADP
ap-1727	112	34	the	the	DET
ap-1727	112	35	capacitor	capacitor	NOUN
ap-1727	112	36	bank	bank	PROPN
ap-1727	112	37	is	be	AUX
ap-1727	112	38	observed	observe	VERB
ap-1727	112	39	at	at	ADP
ap-1727	112	40	use	use	NOUN
ap-1727	112	41	of	of	ADP
ap-1727	112	42	anode	anode	NOUN
ap-1727	112	43	of	of	ADP
ap-1727	112	44	different	different	ADJ
ap-1727	112	45	diameters	diameter	NOUN
ap-1727	112	46	(	(	PUNCT
ap-1727	112	47	from	from	ADP
ap-1727	112	48	1.5	1.5	NUM
ap-1727	112	49	to	to	PART
ap-1727	112	50	5	5	NUM
ap-1727	112	51	mm	mm	NOUN
ap-1727	112	52	)	)	PUNCT
ap-1727	112	53	.	.	PUNCT
ap-1727	113	1	as	as	SCONJ
ap-1727	113	2	it	it	PRON
ap-1727	113	3	is	be	AUX
ap-1727	113	4	shown	show	VERB
ap-1727	113	5	in	in	ADP
ap-1727	113	6	fig	fig	NOUN
ap-1727	113	7	.	.	PUNCT
ap-1727	114	1	5	5	NUM
ap-1727	114	2	for	for	ADP
ap-1727	114	3	larger	large	ADJ
ap-1727	114	4	diameter	diameter	NOUN
ap-1727	114	5	of	of	ADP
ap-1727	114	6	the	the	DET
ap-1727	114	7	anode	anode	NOUN
ap-1727	114	8	this	this	DET
ap-1727	114	9	maximum	maximum	ADJ
ap-1727	114	10	shifts	shift	NOUN
ap-1727	114	11	to	to	ADP
ap-1727	114	12	region	region	NOUN
ap-1727	114	13	of	of	ADP
ap-1727	114	14	larger	large	ADJ
ap-1727	114	15	energy	energy	NOUN
ap-1727	114	16	stored	store	VERB
ap-1727	114	17	in	in	ADP
ap-1727	114	18	the	the	DET
ap-1727	114	19	capacitor	capacitor	NOUN
ap-1727	114	20	bank	bank	PROPN
ap-1727	114	21	.	.	PUNCT
ap-1727	115	1	for	for	ADP
ap-1727	115	2	smaller	small	ADJ
ap-1727	115	3	diameter	diameter	NOUN
ap-1727	115	4	of	of	ADP
ap-1727	115	5	the	the	DET
ap-1727	115	6	anode	anode	NOUN
ap-1727	115	7	this	this	DET
ap-1727	115	8	maximum	maximum	ADJ
ap-1727	115	9	shifts	shift	NOUN
ap-1727	115	10	to	to	ADP
ap-1727	115	11	region	region	NOUN
ap-1727	115	12	of	of	ADP
ap-1727	115	13	smaller	small	ADJ
ap-1727	115	14	energy	energy	NOUN
ap-1727	115	15	stored	store	VERB
ap-1727	115	16	in	in	ADP
ap-1727	115	17	the	the	DET
ap-1727	115	18	capacitor	capacitor	NOUN
ap-1727	115	19	bank	bank	NOUN
ap-1727	115	20	.	.	PUNCT
ap-1727	116	1	in	in	ADP
ap-1727	116	2	fig	fig	NOUN
ap-1727	116	3	.	.	PUNCT
ap-1727	117	1	4	4	NUM
ap-1727	117	2	the	the	DET
ap-1727	117	3	diameter	diameter	NOUN
ap-1727	117	4	of	of	ADP
ap-1727	117	5	the	the	DET
ap-1727	117	6	anode	anode	NOUN
ap-1727	117	7	equals	equal	VERB
ap-1727	117	8	2.5	2.5	NUM
ap-1727	117	9	mm	mm	NOUN
ap-1727	117	10	.	.	PUNCT
ap-1727	118	1	figure	figure	NOUN
ap-1727	118	2	4b	4b	PROPN
ap-1727	118	3	also	also	ADV
ap-1727	118	4	shows	show	VERB
ap-1727	118	5	the	the	DET
ap-1727	118	6	energies	energy	NOUN
ap-1727	118	7	of	of	ADP
ap-1727	118	8	the	the	DET
ap-1727	118	9	radiation	radiation	NOUN
ap-1727	118	10	pulses	pulse	NOUN
ap-1727	118	11	emitted	emit	VERB
ap-1727	118	12	during	during	ADP
ap-1727	118	13	the	the	DET
ap-1727	118	14	first	first	ADJ
ap-1727	118	15	,	,	PUNCT
ap-1727	118	16	second	second	ADJ
ap-1727	118	17	,	,	PUNCT
ap-1727	118	18	and	and	CCONJ
ap-1727	118	19	third	third	ADJ
ap-1727	118	20	half	half	ADJ
ap-1727	118	21	-	-	PUNCT
ap-1727	118	22	periods	period	NOUN
ap-1727	118	23	of	of	ADP
ap-1727	118	24	the	the	DET
ap-1727	118	25	discharge	discharge	NOUN
ap-1727	118	26	current	current	ADJ
ap-1727	118	27	.	.	PUNCT
ap-1727	119	1	at	at	ADP
ap-1727	119	2	low	low	ADJ
ap-1727	119	3	stored	store	VERB
ap-1727	119	4	energies	energy	NOUN
ap-1727	119	5	,	,	PUNCT
ap-1727	119	6	radiation	radiation	NOUN
ap-1727	119	7	is	be	AUX
ap-1727	119	8	mainly	mainly	ADV
ap-1727	119	9	emitted	emit	VERB
ap-1727	119	10	during	during	ADP
ap-1727	119	11	the	the	DET
ap-1727	119	12	first	first	ADJ
ap-1727	119	13	half	half	ADJ
ap-1727	119	14	-	-	PUNCT
ap-1727	119	15	period	period	NOUN
ap-1727	119	16	.	.	PUNCT
ap-1727	120	1	as	as	ADP
ap-1727	120	2	the	the	DET
ap-1727	120	3	stored	store	VERB
ap-1727	120	4	energy	energy	NOUN
ap-1727	120	5	increases	increase	NOUN
ap-1727	120	6	,	,	PUNCT
ap-1727	120	7	the	the	DET
ap-1727	120	8	energies	energy	NOUN
ap-1727	120	9	of	of	ADP
ap-1727	120	10	radiation	radiation	NOUN
ap-1727	120	11	pulses	pulse	NOUN
ap-1727	120	12	emitted	emit	VERB
ap-1727	120	13	in	in	ADP
ap-1727	120	14	different	different	ADJ
ap-1727	120	15	halfperiods	halfperiod	NOUN
ap-1727	120	16	approach	approach	VERB
ap-1727	120	17	one	one	NUM
ap-1727	120	18	another	another	DET
ap-1727	120	19	.	.	PUNCT
ap-1727	121	1	at	at	ADP
ap-1727	121	2	stored	store	VERB
ap-1727	121	3	energies	energy	NOUN
ap-1727	121	4	,	,	PUNCT
ap-1727	121	5	figure	figure	VERB
ap-1727	121	6	4	4	NUM
ap-1727	121	7	.	.	PUNCT
ap-1727	122	1	(	(	PUNCT
ap-1727	122	2	a	a	X
ap-1727	122	3	)	)	PUNCT
ap-1727	122	4	radiation	radiation	NOUN
ap-1727	122	5	energies	energy	NOUN
ap-1727	122	6	(	(	PUNCT
ap-1727	122	7	spike	spike	ADJ
ap-1727	122	8	and	and	CCONJ
ap-1727	122	9	wide	wide	ADJ
ap-1727	122	10	pulse	pulse	NOUN
ap-1727	122	11	energies	energy	NOUN
ap-1727	122	12	)	)	PUNCT
ap-1727	122	13	in	in	ADP
ap-1727	122	14	the	the	DET
ap-1727	122	15	12.2	12.2	NUM
ap-1727	122	16	÷	÷	NUM
ap-1727	122	17	15.8	15.8	NUM
ap-1727	122	18	nm	nm	ADJ
ap-1727	122	19	wavelength	wavelength	NOUN
ap-1727	122	20	range	range	NOUN
ap-1727	122	21	during	during	ADP
ap-1727	122	22	first	first	ADJ
ap-1727	122	23	w1r	w1r	PROPN
ap-1727	122	24	,	,	PUNCT
ap-1727	122	25	second	second	ADJ
ap-1727	122	26	w2r	w2r	NOUN
ap-1727	122	27	,	,	PUNCT
ap-1727	122	28	third	third	ADJ
ap-1727	122	29	w3r	w3r	PROPN
ap-1727	122	30	half	half	ADJ
ap-1727	122	31	-	-	PUNCT
ap-1727	122	32	periods	period	NOUN
ap-1727	122	33	,	,	PUNCT
ap-1727	122	34	(	(	PUNCT
ap-1727	122	35	b	b	X
ap-1727	122	36	)	)	PUNCT
ap-1727	122	37	fractions	fraction	NOUN
ap-1727	122	38	of	of	ADP
ap-1727	122	39	the	the	DET
ap-1727	122	40	energy	energy	NOUN
ap-1727	122	41	radiated	radiate	VERB
ap-1727	122	42	in	in	ADP
ap-1727	122	43	the	the	DET
ap-1727	122	44	selected	select	VERB
ap-1727	122	45	wavelength	wavelength	NOUN
ap-1727	122	46	range	range	NOUN
ap-1727	122	47	in	in	ADP
ap-1727	122	48	different	different	ADJ
ap-1727	122	49	half	half	ADJ
ap-1727	122	50	-	-	PUNCT
ap-1727	122	51	periods	period	NOUN
ap-1727	122	52	of	of	ADP
ap-1727	122	53	the	the	DET
ap-1727	122	54	discharge	discharge	NOUN
ap-1727	122	55	current	current	NOUN
ap-1727	122	56	as	as	ADP
ap-1727	122	57	functions	function	NOUN
ap-1727	122	58	of	of	ADP
ap-1727	122	59	the	the	DET
ap-1727	122	60	stored	store	VERB
ap-1727	122	61	energy	energy	NOUN
ap-1727	122	62	w0	w0	NOUN
ap-1727	122	63	;	;	PUNCT
ap-1727	122	64	herew0r	herew0r	PROPN
ap-1727	122	65	is	be	AUX
ap-1727	122	66	the	the	DET
ap-1727	122	67	total	total	ADJ
ap-1727	122	68	radiation	radiation	NOUN
ap-1727	122	69	energy	energy	NOUN
ap-1727	122	70	,	,	PUNCT
ap-1727	122	71	emitted	emit	VERB
ap-1727	122	72	in	in	ADP
ap-1727	122	73	the	the	DET
ap-1727	122	74	selected	select	VERB
ap-1727	122	75	wavelength	wavelength	NOUN
ap-1727	122	76	range	range	NOUN
ap-1727	122	77	during	during	ADP
ap-1727	122	78	a	a	DET
ap-1727	122	79	discharge	discharge	NOUN
ap-1727	122	80	into	into	ADP
ap-1727	122	81	the	the	DET
ap-1727	122	82	2π	2π	NUM
ap-1727	122	83	solid	solid	ADJ
ap-1727	122	84	angle	angle	NOUN
ap-1727	122	85	;	;	PUNCT
ap-1727	122	86	w1r	w1r	PROPN
ap-1727	122	87	/	/	SYM
ap-1727	122	88	w0r	w0r	PROPN
ap-1727	122	89	,	,	PUNCT
ap-1727	122	90	w2r	w2r	NOUN
ap-1727	122	91	/	/	SYM
ap-1727	122	92	w0r	w0r	PROPN
ap-1727	122	93	,	,	PUNCT
ap-1727	122	94	w3r	w3r	PROPN
ap-1727	122	95	/	/	SYM
ap-1727	122	96	w0r	w0r	PROPN
ap-1727	122	97	are	be	AUX
ap-1727	122	98	the	the	DET
ap-1727	122	99	energy	energy	NOUN
ap-1727	122	100	fractions	fraction	NOUN
ap-1727	122	101	emitted	emit	VERB
ap-1727	122	102	in	in	ADP
ap-1727	122	103	the	the	DET
ap-1727	122	104	first	first	ADJ
ap-1727	122	105	,	,	PUNCT
ap-1727	122	106	second	second	ADJ
ap-1727	122	107	,	,	PUNCT
ap-1727	122	108	and	and	CCONJ
ap-1727	122	109	third	third	ADJ
ap-1727	122	110	half	half	ADJ
ap-1727	122	111	-	-	PUNCT
ap-1727	122	112	periods	period	NOUN
ap-1727	122	113	,	,	PUNCT
ap-1727	122	114	respectively	respectively	ADV
ap-1727	122	115	,	,	PUNCT
ap-1727	122	116	da	da	PROPN
ap-1727	122	117	=	=	SYM
ap-1727	122	118	2.5	2.5	NUM
ap-1727	122	119	mm	mm	NOUN
ap-1727	122	120	,	,	PUNCT
ap-1727	122	121	ldis	ldis	NOUN
ap-1727	122	122	=	=	SYM
ap-1727	122	123	5	5	NUM
ap-1727	122	124	cm	cm	NOUN
ap-1727	122	125	.	.	PUNCT
ap-1727	123	1	exceeding	exceed	VERB
ap-1727	123	2	120	120	NUM
ap-1727	123	3	j	j	NOUN
ap-1727	123	4	,	,	PUNCT
ap-1727	123	5	they	they	PRON
ap-1727	123	6	become	become	VERB
ap-1727	123	7	nearly	nearly	ADV
ap-1727	123	8	equal	equal	ADJ
ap-1727	123	9	.	.	PUNCT
ap-1727	124	1	figure	figure	VERB
ap-1727	124	2	4b	4b	PROPN
ap-1727	124	3	shows	show	VERB
ap-1727	124	4	the	the	DET
ap-1727	124	5	relative	relative	ADJ
ap-1727	124	6	energies	energy	NOUN
ap-1727	124	7	of	of	ADP
ap-1727	124	8	radiation	radiation	NOUN
ap-1727	124	9	pulses	pulse	NOUN
ap-1727	124	10	emitted	emit	VERB
ap-1727	124	11	in	in	ADP
ap-1727	124	12	each	each	DET
ap-1727	124	13	half	half	ADJ
ap-1727	124	14	-	-	PUNCT
ap-1727	124	15	period	period	NOUN
ap-1727	124	16	of	of	ADP
ap-1727	124	17	the	the	DET
ap-1727	124	18	discharge	discharge	NOUN
ap-1727	124	19	current	current	NOUN
ap-1727	124	20	as	as	ADP
ap-1727	124	21	functions	function	NOUN
ap-1727	124	22	of	of	ADP
ap-1727	124	23	the	the	DET
ap-1727	124	24	stored	store	VERB
ap-1727	124	25	energy	energy	NOUN
ap-1727	124	26	.	.	PUNCT
ap-1727	125	1	figure	figure	NOUN
ap-1727	125	2	6a	6a	NOUN
ap-1727	125	3	shows	show	VERB
ap-1727	125	4	the	the	DET
ap-1727	125	5	relative	relative	ADJ
ap-1727	125	6	energy	energy	NOUN
ap-1727	125	7	,	,	PUNCT
ap-1727	125	8	pumped	pump	VERB
ap-1727	125	9	in	in	ADP
ap-1727	125	10	each	each	DET
ap-1727	125	11	half	half	ADJ
ap-1727	125	12	-	-	PUNCT
ap-1727	125	13	period	period	NOUN
ap-1727	125	14	of	of	ADP
ap-1727	125	15	the	the	DET
ap-1727	125	16	discharge	discharge	NOUN
ap-1727	125	17	current	current	ADJ
ap-1727	125	18	,	,	PUNCT
ap-1727	125	19	as	as	ADP
ap-1727	125	20	a	a	DET
ap-1727	125	21	function	function	NOUN
ap-1727	125	22	of	of	ADP
ap-1727	125	23	the	the	DET
ap-1727	125	24	stored	store	VERB
ap-1727	125	25	energy	energy	NOUN
ap-1727	125	26	.	.	PUNCT
ap-1727	126	1	it	it	PRON
ap-1727	126	2	is	be	AUX
ap-1727	126	3	seen	see	VERB
ap-1727	126	4	that	that	SCONJ
ap-1727	126	5	the	the	DET
ap-1727	126	6	energy	energy	NOUN
ap-1727	126	7	is	be	AUX
ap-1727	126	8	mainly	mainly	ADV
ap-1727	126	9	pumped	pump	VERB
ap-1727	126	10	in	in	ADP
ap-1727	126	11	the	the	DET
ap-1727	126	12	first	first	ADJ
ap-1727	126	13	half	half	ADJ
ap-1727	126	14	-	-	PUNCT
ap-1727	126	15	period	period	NOUN
ap-1727	126	16	,	,	PUNCT
ap-1727	126	17	during	during	ADP
ap-1727	126	18	which	which	PRON
ap-1727	126	19	the	the	DET
ap-1727	126	20	anode	anode	NOUN
ap-1727	126	21	material	material	NOUN
ap-1727	126	22	is	be	AUX
ap-1727	126	23	intensely	intensely	ADV
ap-1727	126	24	evaporated	evaporate	VERB
ap-1727	126	25	and	and	CCONJ
ap-1727	126	26	neutral	neutral	ADJ
ap-1727	126	27	atoms	atom	NOUN
ap-1727	126	28	are	be	AUX
ap-1727	126	29	multiply	multiply	ADV
ap-1727	126	30	ionized	ionize	VERB
ap-1727	126	31	.	.	PUNCT
ap-1727	127	1	in	in	ADP
ap-1727	127	2	other	other	ADJ
ap-1727	127	3	words	word	NOUN
ap-1727	127	4	,	,	PUNCT
ap-1727	127	5	the	the	DET
ap-1727	127	6	stored	store	VERB
ap-1727	127	7	energy	energy	NOUN
ap-1727	127	8	is	be	AUX
ap-1727	127	9	mainly	mainly	ADV
ap-1727	127	10	spent	spend	VERB
ap-1727	127	11	on	on	ADP
ap-1727	127	12	the	the	DET
ap-1727	127	13	production	production	NOUN
ap-1727	127	14	of	of	ADP
ap-1727	127	15	dense	dense	ADJ
ap-1727	127	16	plasma	plasma	NOUN
ap-1727	127	17	.	.	PUNCT
ap-1727	128	1	very	very	ADV
ap-1727	128	2	small	small	ADJ
ap-1727	128	3	energy	energy	NOUN
ap-1727	128	4	in	in	ADP
ap-1727	128	5	comparison	comparison	NOUN
ap-1727	128	6	with	with	ADP
ap-1727	128	7	the	the	DET
ap-1727	128	8	plasma	plasma	NOUN
ap-1727	128	9	formation	formation	NOUN
ap-1727	128	10	energy	energy	NOUN
ap-1727	128	11	is	be	AUX
ap-1727	128	12	spent	spend	VERB
ap-1727	128	13	on	on	ADP
ap-1727	128	14	plasma	plasma	NOUN
ap-1727	128	15	support	support	NOUN
ap-1727	128	16	during	during	ADP
ap-1727	128	17	next	next	ADJ
ap-1727	128	18	half	half	ADJ
ap-1727	128	19	-	-	PUNCT
ap-1727	128	20	periods	period	NOUN
ap-1727	128	21	.	.	PUNCT
ap-1727	129	1	therefore	therefore	ADV
ap-1727	129	2	,	,	PUNCT
ap-1727	129	3	when	when	SCONJ
ap-1727	129	4	the	the	DET
ap-1727	129	5	total	total	ADJ
ap-1727	129	6	stored	store	VERB
ap-1727	129	7	energy	energy	NOUN
ap-1727	129	8	is	be	AUX
ap-1727	129	9	low	low	ADJ
ap-1727	129	10	,	,	PUNCT
ap-1727	129	11	the	the	DET
ap-1727	129	12	rest	rest	NOUN
ap-1727	129	13	of	of	ADP
ap-1727	129	14	the	the	DET
ap-1727	129	15	energy	energy	NOUN
ap-1727	129	16	pumped	pump	VERB
ap-1727	129	17	in	in	ADP
ap-1727	129	18	the	the	DET
ap-1727	129	19	subsequent	subsequent	ADJ
ap-1727	129	20	half	half	ADJ
ap-1727	129	21	-	-	PUNCT
ap-1727	129	22	periods	period	NOUN
ap-1727	129	23	is	be	AUX
ap-1727	129	24	low	low	ADJ
ap-1727	129	25	.	.	PUNCT
ap-1727	130	1	however	however	ADV
ap-1727	130	2	,	,	PUNCT
ap-1727	130	3	the	the	DET
ap-1727	130	4	radiation	radiation	NOUN
ap-1727	130	5	intensity	intensity	NOUN
ap-1727	130	6	in	in	ADP
ap-1727	130	7	those	those	DET
ap-1727	130	8	half	half	ADJ
ap-1727	130	9	-	-	PUNCT
ap-1727	130	10	periods	period	NOUN
ap-1727	130	11	is	be	AUX
ap-1727	130	12	relatively	relatively	ADV
ap-1727	130	13	high	high	ADJ
ap-1727	130	14	.	.	PUNCT
ap-1727	131	1	as	as	ADP
ap-1727	131	2	the	the	DET
ap-1727	131	3	stored	store	VERB
ap-1727	131	4	energy	energy	NOUN
ap-1727	131	5	increases	increase	NOUN
ap-1727	131	6	,	,	PUNCT
ap-1727	131	7	the	the	DET
ap-1727	131	8	current	current	NOUN
ap-1727	131	9	in	in	ADP
ap-1727	131	10	the	the	DET
ap-1727	131	11	second	second	ADJ
ap-1727	131	12	and	and	CCONJ
ap-1727	131	13	third	third	ADJ
ap-1727	131	14	half	half	ADJ
ap-1727	131	15	-	-	PUNCT
ap-1727	131	16	periods	period	NOUN
ap-1727	131	17	increases	increase	NOUN
ap-1727	131	18	.	.	PUNCT
ap-1727	132	1	the	the	DET
ap-1727	132	2	energy	energy	NOUN
ap-1727	132	3	fraction	fraction	NOUN
ap-1727	132	4	pumped	pump	VERB
ap-1727	132	5	in	in	ADP
ap-1727	132	6	the	the	DET
ap-1727	132	7	subsequent	subsequent	ADJ
ap-1727	132	8	half	half	ADJ
ap-1727	132	9	-	-	PUNCT
ap-1727	132	10	periods	period	NOUN
ap-1727	132	11	increases	increase	NOUN
ap-1727	132	12	,	,	PUNCT
ap-1727	132	13	thereby	thereby	ADV
ap-1727	132	14	leading	lead	VERB
ap-1727	132	15	to	to	ADP
ap-1727	132	16	an	an	DET
ap-1727	132	17	increase	increase	NOUN
ap-1727	132	18	in	in	ADP
ap-1727	132	19	the	the	DET
ap-1727	132	20	radiation	radiation	NOUN
ap-1727	132	21	energy	energy	NOUN
ap-1727	132	22	.	.	PUNCT
ap-1727	133	1	the	the	DET
ap-1727	133	2	equalization	equalization	NOUN
ap-1727	133	3	of	of	ADP
ap-1727	133	4	the	the	DET
ap-1727	133	5	absolute	absolute	ADJ
ap-1727	133	6	and	and	CCONJ
ap-1727	133	7	relative	relative	ADJ
ap-1727	133	8	radiation	radiation	NOUN
ap-1727	133	9	energies	energy	NOUN
ap-1727	133	10	emitted	emit	VERB
ap-1727	133	11	over	over	ADP
ap-1727	133	12	one	one	NUM
ap-1727	133	13	half	half	ADJ
ap-1727	133	14	-	-	PUNCT
ap-1727	133	15	period	period	NOUN
ap-1727	133	16	of	of	ADP
ap-1727	133	17	the	the	DET
ap-1727	133	18	discharge	discharge	NOUN
ap-1727	133	19	current	current	NOUN
ap-1727	133	20	with	with	ADP
ap-1727	133	21	increasing	increase	VERB
ap-1727	133	22	energy	energy	NOUN
ap-1727	133	23	,	,	PUNCT
ap-1727	133	24	as	as	ADV
ap-1727	133	25	well	well	ADV
ap-1727	133	26	as	as	ADP
ap-1727	133	27	the	the	DET
ap-1727	133	28	fact	fact	NOUN
ap-1727	133	29	that	that	SCONJ
ap-1727	133	30	the	the	DET
ap-1727	133	31	radiation	radiation	NOUN
ap-1727	133	32	intensity	intensity	NOUN
ap-1727	133	33	in	in	ADP
ap-1727	133	34	the	the	DET
ap-1727	133	35	second	second	ADJ
ap-1727	133	36	120	120	NUM
ap-1727	133	37	vol	vol	NOUN
ap-1727	133	38	.	.	PUNCT
ap-1727	134	1	53	53	NUM
ap-1727	134	2	no	no	NOUN
ap-1727	134	3	.	.	PUNCT
ap-1727	135	1	2/2013	2/2013	NUM
ap-1727	135	2	the	the	DET
ap-1727	135	3	formation	formation	NOUN
ap-1727	135	4	of	of	ADP
ap-1727	135	5	a	a	DET
ap-1727	135	6	poser	poser	NOUN
ap-1727	135	7	multi	multi	ADJ
ap-1727	135	8	-	-	ADJ
ap-1727	135	9	pulse	pulse	ADJ
ap-1727	135	10	extreme	extreme	ADJ
ap-1727	135	11	uv	uv	NOUN
ap-1727	135	12	radiation	radiation	NOUN
ap-1727	135	13	figure	figure	NOUN
ap-1727	135	14	5	5	NUM
ap-1727	135	15	.	.	PUNCT
ap-1727	135	16	radiation	radiation	NOUN
ap-1727	135	17	energies	energy	NOUN
ap-1727	135	18	(	(	PUNCT
ap-1727	135	19	spike	spike	ADJ
ap-1727	135	20	and	and	CCONJ
ap-1727	135	21	wide	wide	ADJ
ap-1727	135	22	pulse	pulse	NOUN
ap-1727	135	23	energies	energy	NOUN
ap-1727	135	24	)	)	PUNCT
ap-1727	135	25	in	in	ADP
ap-1727	135	26	the	the	DET
ap-1727	135	27	12.2	12.2	NUM
ap-1727	135	28	÷	÷	NUM
ap-1727	135	29	15.8	15.8	NUM
ap-1727	135	30	nm	nm	ADJ
ap-1727	135	31	wavelength	wavelength	NOUN
ap-1727	135	32	range	range	NOUN
ap-1727	135	33	as	as	ADP
ap-1727	135	34	functions	function	NOUN
ap-1727	135	35	of	of	ADP
ap-1727	135	36	the	the	DET
ap-1727	135	37	stored	store	VERB
ap-1727	135	38	energy	energy	NOUN
ap-1727	135	39	for	for	ADP
ap-1727	135	40	the	the	DET
ap-1727	135	41	different	different	ADJ
ap-1727	135	42	anode	anode	NOUN
ap-1727	135	43	diametres	diametre	NOUN
ap-1727	135	44	:	:	PUNCT
ap-1727	135	45	da	da	NOUN
ap-1727	135	46	=	=	SYM
ap-1727	135	47	1.5	1.5	NUM
ap-1727	135	48	,	,	PUNCT
ap-1727	135	49	2.5	2.5	NUM
ap-1727	135	50	,	,	PUNCT
ap-1727	135	51	5.0	5.0	NUM
ap-1727	135	52	mm	mm	NOUN
ap-1727	135	53	.	.	PUNCT
ap-1727	135	54	and	and	CCONJ
ap-1727	135	55	third	third	ADJ
ap-1727	135	56	half	half	ADJ
ap-1727	135	57	-	-	PUNCT
ap-1727	135	58	periods	period	NOUN
ap-1727	135	59	is	be	AUX
ap-1727	135	60	high	high	ADJ
ap-1727	135	61	in	in	ADP
ap-1727	135	62	spite	spite	NOUN
ap-1727	135	63	of	of	ADP
ap-1727	135	64	a	a	DET
ap-1727	135	65	much	much	ADV
ap-1727	135	66	lower	low	ADJ
ap-1727	135	67	(	(	PUNCT
ap-1727	135	68	as	as	SCONJ
ap-1727	135	69	compared	compare	VERB
ap-1727	135	70	to	to	ADP
ap-1727	135	71	the	the	DET
ap-1727	135	72	first	first	ADJ
ap-1727	135	73	half	half	ADJ
ap-1727	135	74	-	-	PUNCT
ap-1727	135	75	period	period	NOUN
ap-1727	135	76	)	)	PUNCT
ap-1727	135	77	energy	energy	NOUN
ap-1727	135	78	pump	pump	NOUN
ap-1727	135	79	,	,	PUNCT
ap-1727	135	80	indicates	indicate	VERB
ap-1727	135	81	that	that	SCONJ
ap-1727	135	82	the	the	DET
ap-1727	135	83	number	number	NOUN
ap-1727	135	84	of	of	ADP
ap-1727	135	85	particles	particle	NOUN
ap-1727	135	86	in	in	ADP
ap-1727	135	87	the	the	DET
ap-1727	135	88	dense	dense	ADJ
ap-1727	135	89	radiating	radiate	VERB
ap-1727	135	90	plasma	plasma	NOUN
ap-1727	135	91	remains	remain	VERB
ap-1727	135	92	nearly	nearly	ADV
ap-1727	135	93	constant	constant	ADJ
ap-1727	135	94	for	for	ADP
ap-1727	135	95	a	a	DET
ap-1727	135	96	fairly	fairly	ADV
ap-1727	135	97	long	long	ADJ
ap-1727	135	98	time	time	NOUN
ap-1727	135	99	(	(	PUNCT
ap-1727	135	100	approximately	approximately	ADV
ap-1727	135	101	6	6	NUM
ap-1727	135	102	µs	µs	NOUN
ap-1727	135	103	)	)	PUNCT
ap-1727	135	104	.	.	PUNCT
ap-1727	136	1	this	this	PRON
ap-1727	136	2	is	be	AUX
ap-1727	136	3	confirmed	confirm	VERB
ap-1727	136	4	by	by	ADP
ap-1727	136	5	the	the	DET
ap-1727	136	6	results	result	NOUN
ap-1727	136	7	obtained	obtain	VERB
ap-1727	136	8	in	in	ADP
ap-1727	136	9	[	[	X
ap-1727	136	10	2	2	NUM
ap-1727	136	11	]	]	PUNCT
ap-1727	136	12	,	,	PUNCT
ap-1727	136	13	where	where	SCONJ
ap-1727	136	14	long	long	ADV
ap-1727	136	15	-	-	PUNCT
ap-1727	136	16	lived	live	VERB
ap-1727	136	17	dense	dense	ADJ
ap-1727	136	18	plasma	plasma	NOUN
ap-1727	136	19	was	be	AUX
ap-1727	136	20	also	also	ADV
ap-1727	136	21	observed	observe	VERB
ap-1727	136	22	.	.	PUNCT
ap-1727	137	1	thus	thus	ADV
ap-1727	137	2	,	,	PUNCT
ap-1727	137	3	after	after	SCONJ
ap-1727	137	4	the	the	DET
ap-1727	137	5	plasma	plasma	NOUN
ap-1727	137	6	has	have	AUX
ap-1727	137	7	formed	form	VERB
ap-1727	137	8	in	in	ADP
ap-1727	137	9	the	the	DET
ap-1727	137	10	first	first	ADJ
ap-1727	137	11	half	half	ADJ
ap-1727	137	12	-	-	PUNCT
ap-1727	137	13	period	period	NOUN
ap-1727	137	14	,	,	PUNCT
ap-1727	137	15	it	it	PRON
ap-1727	137	16	is	be	AUX
ap-1727	137	17	supplied	supply	VERB
ap-1727	137	18	with	with	ADP
ap-1727	137	19	energy	energy	NOUN
ap-1727	137	20	in	in	ADP
ap-1727	137	21	the	the	DET
ap-1727	137	22	subsequent	subsequent	ADJ
ap-1727	137	23	half	half	ADJ
ap-1727	137	24	-	-	PUNCT
ap-1727	137	25	periods	period	NOUN
ap-1727	137	26	,	,	PUNCT
ap-1727	137	27	a	a	DET
ap-1727	137	28	fraction	fraction	NOUN
ap-1727	137	29	of	of	ADP
ap-1727	137	30	the	the	DET
ap-1727	137	31	supplied	supply	VERB
ap-1727	137	32	energy	energy	NOUN
ap-1727	137	33	being	be	AUX
ap-1727	137	34	instantaneously	instantaneously	ADV
ap-1727	137	35	converted	convert	VERB
ap-1727	137	36	into	into	ADP
ap-1727	137	37	radiation	radiation	NOUN
ap-1727	137	38	.	.	PUNCT
ap-1727	138	1	detailed	detailed	ADJ
ap-1727	138	2	analysis	analysis	NOUN
ap-1727	138	3	of	of	ADP
ap-1727	138	4	the	the	DET
ap-1727	138	5	energy	energy	NOUN
ap-1727	138	6	pumped	pump	VERB
ap-1727	138	7	in	in	ADP
ap-1727	138	8	the	the	DET
ap-1727	138	9	discharge	discharge	NOUN
ap-1727	138	10	during	during	ADP
ap-1727	138	11	one	one	NUM
ap-1727	138	12	half	half	ADJ
ap-1727	138	13	-	-	PUNCT
ap-1727	138	14	period	period	NOUN
ap-1727	138	15	and	and	CCONJ
ap-1727	138	16	the	the	DET
ap-1727	138	17	energy	energy	NOUN
ap-1727	138	18	radiated	radiate	VERB
ap-1727	138	19	over	over	ADP
ap-1727	138	20	the	the	DET
ap-1727	138	21	same	same	ADJ
ap-1727	138	22	time	time	NOUN
ap-1727	138	23	permits	permit	VERB
ap-1727	138	24	to	to	PART
ap-1727	138	25	find	find	VERB
ap-1727	138	26	the	the	DET
ap-1727	138	27	energy	energy	NOUN
ap-1727	138	28	conversion	conversion	NOUN
ap-1727	138	29	efficiency	efficiency	NOUN
ap-1727	138	30	for	for	ADP
ap-1727	138	31	each	each	DET
ap-1727	138	32	half	half	ADJ
ap-1727	138	33	-	-	PUNCT
ap-1727	138	34	period	period	NOUN
ap-1727	138	35	.	.	PUNCT
ap-1727	139	1	figure	figure	NOUN
ap-1727	139	2	6b	6b	PROPN
ap-1727	139	3	shows	show	VERB
ap-1727	139	4	the	the	DET
ap-1727	139	5	conversion	conversion	NOUN
ap-1727	139	6	efficiency	efficiency	NOUN
ap-1727	139	7	of	of	ADP
ap-1727	139	8	the	the	DET
ap-1727	139	9	energy	energy	NOUN
ap-1727	139	10	pumped	pump	VERB
ap-1727	139	11	in	in	ADP
ap-1727	139	12	the	the	DET
ap-1727	139	13	discharge	discharge	NOUN
ap-1727	139	14	during	during	ADP
ap-1727	139	15	each	each	DET
ap-1727	139	16	half	half	ADJ
ap-1727	139	17	-	-	PUNCT
ap-1727	139	18	period	period	NOUN
ap-1727	139	19	into	into	ADP
ap-1727	139	20	the	the	DET
ap-1727	139	21	radiation	radiation	NOUN
ap-1727	139	22	energy	energy	NOUN
ap-1727	139	23	in	in	ADP
ap-1727	139	24	the	the	DET
ap-1727	139	25	12.2	12.2	NUM
ap-1727	139	26	÷	÷	NUM
ap-1727	139	27	15.8	15.8	NUM
ap-1727	139	28	nm	nm	ADJ
ap-1727	139	29	wavelength	wavelength	NOUN
ap-1727	139	30	range	range	NOUN
ap-1727	139	31	,	,	PUNCT
ap-1727	139	32	and	and	CCONJ
ap-1727	139	33	the	the	DET
ap-1727	139	34	total	total	ADJ
ap-1727	139	35	energy	energy	NOUN
ap-1727	139	36	conversion	conversion	NOUN
ap-1727	139	37	efficiency	efficiency	NOUN
ap-1727	139	38	ns0	ns0	NOUN
ap-1727	139	39	=	=	SYM
ap-1727	139	40	w0	w0	PROPN
ap-1727	139	41	r	r	NOUN
ap-1727	139	42	/	/	SYM
ap-1727	139	43	w0	w0	PROPN
ap-1727	139	44	,	,	PUNCT
ap-1727	139	45	as	as	ADP
ap-1727	139	46	a	a	DET
ap-1727	139	47	function	function	NOUN
ap-1727	139	48	of	of	ADP
ap-1727	139	49	the	the	DET
ap-1727	139	50	total	total	ADJ
ap-1727	139	51	stored	store	VERB
ap-1727	139	52	energy	energy	NOUN
ap-1727	139	53	.	.	PUNCT
ap-1727	140	1	it	it	PRON
ap-1727	140	2	is	be	AUX
ap-1727	140	3	seen	see	VERB
ap-1727	140	4	that	that	SCONJ
ap-1727	140	5	the	the	DET
ap-1727	140	6	conversion	conversion	NOUN
ap-1727	140	7	efficiency	efficiency	NOUN
ap-1727	140	8	in	in	ADP
ap-1727	140	9	the	the	DET
ap-1727	140	10	second	second	ADJ
ap-1727	140	11	and	and	CCONJ
ap-1727	140	12	third	third	ADJ
ap-1727	140	13	half	half	ADJ
ap-1727	140	14	-	-	PUNCT
ap-1727	140	15	periods	period	NOUN
ap-1727	140	16	reaches	reach	VERB
ap-1727	140	17	a	a	DET
ap-1727	140	18	few	few	ADJ
ap-1727	140	19	percent	percent	NOUN
ap-1727	140	20	,	,	PUNCT
ap-1727	140	21	the	the	DET
ap-1727	140	22	energy	energy	NOUN
ap-1727	140	23	pumped	pump	VERB
ap-1727	140	24	in	in	ADP
ap-1727	140	25	the	the	DET
ap-1727	140	26	discharge	discharge	NOUN
ap-1727	140	27	being	be	AUX
ap-1727	140	28	10	10	NUM
ap-1727	140	29	j.	j.	NOUN
ap-1727	140	30	for	for	ADP
ap-1727	140	31	a	a	DET
ap-1727	140	32	2.5	2.5	NUM
ap-1727	140	33	mm	mm	NOUN
ap-1727	140	34	diameter	diameter	NOUN
ap-1727	140	35	anode	anode	NOUN
ap-1727	140	36	,	,	PUNCT
ap-1727	140	37	there	there	PRON
ap-1727	140	38	is	be	VERB
ap-1727	140	39	an	an	DET
ap-1727	140	40	optimum	optimum	NOUN
ap-1727	140	41	at	at	ADP
ap-1727	140	42	a	a	DET
ap-1727	140	43	stored	store	VERB
ap-1727	140	44	energy	energy	NOUN
ap-1727	140	45	of	of	ADP
ap-1727	140	46	80	80	NUM
ap-1727	140	47	j	j	NOUN
ap-1727	140	48	(	(	PUNCT
ap-1727	140	49	see	see	VERB
ap-1727	140	50	fig	fig	NOUN
ap-1727	140	51	.	.	PUNCT
ap-1727	141	1	6b	6b	NUM
ap-1727	141	2	)	)	PUNCT
ap-1727	141	3	.	.	PUNCT
ap-1727	142	1	a	a	DET
ap-1727	142	2	comparison	comparison	NOUN
ap-1727	142	3	of	of	ADP
ap-1727	142	4	the	the	DET
ap-1727	142	5	radiation	radiation	NOUN
ap-1727	142	6	intensity	intensity	NOUN
ap-1727	142	7	in	in	ADP
ap-1727	142	8	the	the	DET
ap-1727	142	9	selected	select	VERB
ap-1727	142	10	wavelength	wavelength	NOUN
ap-1727	142	11	range	range	NOUN
ap-1727	142	12	and	and	CCONJ
ap-1727	142	13	the	the	DET
ap-1727	142	14	integral	integral	ADJ
ap-1727	142	15	intensity	intensity	NOUN
ap-1727	142	16	shows	show	VERB
ap-1727	142	17	that	that	SCONJ
ap-1727	142	18	,	,	PUNCT
ap-1727	142	19	when	when	SCONJ
ap-1727	142	20	the	the	DET
ap-1727	142	21	stored	store	VERB
ap-1727	142	22	energy	energy	NOUN
ap-1727	142	23	is	be	AUX
ap-1727	142	24	more	more	ADV
ap-1727	142	25	above	above	ADP
ap-1727	142	26	a	a	DET
ap-1727	142	27	certain	certain	ADJ
ap-1727	142	28	value	value	NOUN
ap-1727	142	29	,	,	PUNCT
ap-1727	142	30	the	the	DET
ap-1727	142	31	integral	integral	ADJ
ap-1727	142	32	radiation	radiation	NOUN
ap-1727	142	33	intensity	intensity	NOUN
ap-1727	142	34	increases	increase	VERB
ap-1727	142	35	sharply	sharply	ADV
ap-1727	142	36	,	,	PUNCT
ap-1727	142	37	whereas	whereas	SCONJ
ap-1727	142	38	the	the	DET
ap-1727	142	39	radiation	radiation	NOUN
ap-1727	142	40	intensity	intensity	NOUN
ap-1727	142	41	in	in	ADP
ap-1727	142	42	the	the	DET
ap-1727	142	43	selected	select	VERB
ap-1727	142	44	wavelength	wavelength	NOUN
ap-1727	142	45	range	range	NOUN
ap-1727	142	46	of	of	ADP
ap-1727	142	47	increases	increase	NOUN
ap-1727	142	48	insignificantly	insignificantly	ADV
ap-1727	142	49	.	.	PUNCT
ap-1727	143	1	presumably	presumably	ADV
ap-1727	143	2	,	,	PUNCT
ap-1727	143	3	this	this	PRON
ap-1727	143	4	is	be	AUX
ap-1727	143	5	related	relate	VERB
ap-1727	143	6	to	to	ADP
ap-1727	143	7	the	the	DET
ap-1727	143	8	increasing	increasing	NOUN
ap-1727	143	9	of	of	ADP
ap-1727	143	10	tin	tin	NOUN
ap-1727	143	11	ion	ion	NOUN
ap-1727	143	12	with	with	ADP
ap-1727	143	13	the	the	DET
ap-1727	143	14	higher	high	ADJ
ap-1727	143	15	charge	charge	NOUN
ap-1727	143	16	states	state	NOUN
ap-1727	143	17	,	,	PUNCT
ap-1727	143	18	which	which	PRON
ap-1727	143	19	leads	lead	VERB
ap-1727	143	20	to	to	ADP
ap-1727	143	21	generation	generation	NOUN
ap-1727	143	22	of	of	ADP
ap-1727	143	23	the	the	DET
ap-1727	143	24	harder	hard	ADJ
ap-1727	143	25	radiation	radiation	NOUN
ap-1727	143	26	and	and	CCONJ
ap-1727	143	27	,	,	PUNCT
ap-1727	143	28	therefore	therefore	ADV
ap-1727	143	29	,	,	PUNCT
ap-1727	143	30	to	to	ADP
ap-1727	143	31	extra	extra	ADJ
ap-1727	143	32	energy	energy	NOUN
ap-1727	143	33	consumption	consumption	NOUN
ap-1727	143	34	.	.	PUNCT
ap-1727	144	1	figure	figure	NOUN
ap-1727	144	2	6	6	NUM
ap-1727	144	3	.	.	PUNCT
ap-1727	145	1	energy	energy	NOUN
ap-1727	145	2	fractions	fraction	NOUN
ap-1727	145	3	,	,	PUNCT
ap-1727	145	4	pumped	pump	VERB
ap-1727	145	5	during	during	ADP
ap-1727	145	6	one	one	NUM
ap-1727	145	7	halfperiod	halfperiod	NOUN
ap-1727	145	8	(	(	PUNCT
ap-1727	145	9	w1	w1	NOUN
ap-1727	145	10	,	,	PUNCT
ap-1727	145	11	w2	w2	NOUN
ap-1727	145	12	,	,	PUNCT
ap-1727	145	13	and	and	CCONJ
ap-1727	145	14	w3	w3	PROPN
ap-1727	145	15	are	be	AUX
ap-1727	145	16	the	the	DET
ap-1727	145	17	pumped	pump	VERB
ap-1727	145	18	energies	energy	NOUN
ap-1727	145	19	and	and	CCONJ
ap-1727	145	20	w1	w1	NOUN
ap-1727	145	21	/	/	SYM
ap-1727	145	22	w0	w0	PROPN
ap-1727	145	23	,	,	PUNCT
ap-1727	145	24	w2	w2	NOUN
ap-1727	145	25	/	/	SYM
ap-1727	145	26	w0	w0	PROPN
ap-1727	145	27	,	,	PUNCT
ap-1727	145	28	andw3	andw3	NOUN
ap-1727	145	29	/	/	SYM
ap-1727	145	30	w0	w0	PROPN
ap-1727	145	31	are	be	AUX
ap-1727	145	32	the	the	DET
ap-1727	145	33	energy	energy	NOUN
ap-1727	145	34	fractions	fraction	NOUN
ap-1727	145	35	pumped	pump	VERB
ap-1727	145	36	in	in	ADP
ap-1727	145	37	the	the	DET
ap-1727	145	38	first	first	ADJ
ap-1727	145	39	,	,	PUNCT
ap-1727	145	40	second	second	ADJ
ap-1727	145	41	,	,	PUNCT
ap-1727	145	42	and	and	CCONJ
ap-1727	145	43	third	third	ADJ
ap-1727	145	44	half	half	ADJ
ap-1727	145	45	-	-	PUNCT
ap-1727	145	46	periods	period	NOUN
ap-1727	145	47	of	of	ADP
ap-1727	145	48	the	the	DET
ap-1727	145	49	discharge	discharge	NOUN
ap-1727	145	50	current	current	ADJ
ap-1727	145	51	,	,	PUNCT
ap-1727	145	52	respectively	respectively	ADV
ap-1727	145	53	)	)	PUNCT
ap-1727	145	54	;	;	PUNCT
ap-1727	145	55	(	(	PUNCT
ap-1727	145	56	b	b	X
ap-1727	145	57	)	)	PUNCT
ap-1727	145	58	conversion	conversion	NOUN
ap-1727	145	59	efficiency	efficiency	NOUN
ap-1727	145	60	ηi	ηi	PROPN
ap-1727	145	61	=	=	PUNCT
ap-1727	145	62	wi	wi	PROPN
ap-1727	145	63	r	r	PROPN
ap-1727	145	64	/	/	SYM
ap-1727	145	65	wi	wi	PROPN
ap-1727	145	66	(	(	PUNCT
ap-1727	145	67	i	i	NOUN
ap-1727	145	68	=	=	NOUN
ap-1727	145	69	1	1	NUM
ap-1727	145	70	,	,	PUNCT
ap-1727	145	71	2	2	NUM
ap-1727	145	72	,	,	PUNCT
ap-1727	145	73	3	3	NUM
ap-1727	145	74	)	)	PUNCT
ap-1727	145	75	of	of	ADP
ap-1727	145	76	the	the	DET
ap-1727	145	77	energy	energy	NOUN
ap-1727	145	78	,	,	PUNCT
ap-1727	145	79	pumped	pump	VERB
ap-1727	145	80	during	during	ADP
ap-1727	145	81	one	one	NUM
ap-1727	145	82	half	half	ADJ
ap-1727	145	83	-	-	PUNCT
ap-1727	145	84	period	period	NOUN
ap-1727	145	85	wi	wi	PROPN
ap-1727	145	86	,	,	PUNCT
ap-1727	145	87	into	into	ADP
ap-1727	145	88	the	the	DET
ap-1727	145	89	radiation	radiation	NOUN
ap-1727	145	90	energy	energy	NOUN
ap-1727	145	91	wi	wi	PROPN
ap-1727	145	92	r	r	NOUN
ap-1727	145	93	in	in	ADP
ap-1727	145	94	the	the	DET
ap-1727	145	95	12.2	12.2	NUM
ap-1727	145	96	÷	÷	NUM
ap-1727	145	97	15.8	15.8	NUM
ap-1727	145	98	nm	nm	ADJ
ap-1727	145	99	wavelength	wavelength	NOUN
ap-1727	145	100	range	range	NOUN
ap-1727	145	101	as	as	ADP
ap-1727	145	102	functions	function	NOUN
ap-1727	145	103	of	of	ADP
ap-1727	145	104	the	the	DET
ap-1727	145	105	stored	store	VERB
ap-1727	145	106	energy	energy	NOUN
ap-1727	145	107	w0	w0	NOUN
ap-1727	145	108	;	;	PUNCT
ap-1727	145	109	w0	w0	PROPN
ap-1727	145	110	r	r	NOUN
ap-1727	145	111	is	be	AUX
ap-1727	145	112	the	the	DET
ap-1727	145	113	radiation	radiation	NOUN
ap-1727	145	114	energy	energy	NOUN
ap-1727	145	115	in	in	ADP
ap-1727	145	116	the	the	DET
ap-1727	145	117	selected	select	VERB
ap-1727	145	118	wavelength	wavelength	NOUN
ap-1727	145	119	range	range	NOUN
ap-1727	145	120	during	during	ADP
ap-1727	145	121	all	all	DET
ap-1727	145	122	half	half	ADJ
ap-1727	145	123	-	-	PUNCT
ap-1727	145	124	periods	period	NOUN
ap-1727	145	125	,	,	PUNCT
ap-1727	145	126	da	da	NOUN
ap-1727	145	127	=	=	PUNCT
ap-1727	145	128	2.5	2.5	NUM
ap-1727	145	129	mm	mm	NOUN
ap-1727	145	130	,	,	PUNCT
ap-1727	145	131	ldis	ldis	NOUN
ap-1727	145	132	=	=	SYM
ap-1727	145	133	5	5	NUM
ap-1727	145	134	cm	cm	NOUN
ap-1727	145	135	.	.	PUNCT
ap-1727	146	1	4	4	NUM
ap-1727	146	2	.	.	X
ap-1727	146	3	conclusions	conclusion	NOUN
ap-1727	146	4	multi	multi	ADJ
ap-1727	146	5	-	-	ADJ
ap-1727	146	6	spike	spike	ADJ
ap-1727	146	7	radiation	radiation	NOUN
ap-1727	146	8	,	,	PUNCT
ap-1727	146	9	important	important	ADJ
ap-1727	146	10	for	for	ADP
ap-1727	146	11	use	use	NOUN
ap-1727	146	12	of	of	ADP
ap-1727	146	13	highcontrast	highcontrast	PROPN
ap-1727	146	14	nonlinear	nonlinear	ADJ
ap-1727	146	15	photoresists	photoresist	NOUN
ap-1727	146	16	for	for	ADP
ap-1727	146	17	nanolithography	nanolithography	NOUN
ap-1727	146	18	,	,	PUNCT
ap-1727	146	19	in	in	ADP
ap-1727	146	20	the	the	DET
ap-1727	146	21	wavelength	wavelength	NOUN
ap-1727	146	22	range	range	NOUN
ap-1727	146	23	12.2	12.2	NUM
ap-1727	146	24	÷	÷	NUM
ap-1727	146	25	15.8	15.8	NUM
ap-1727	146	26	nm	nm	NOUN
ap-1727	146	27	from	from	ADP
ap-1727	146	28	a	a	DET
ap-1727	146	29	tin	tin	NOUN
ap-1727	146	30	vapor	vapor	NOUN
ap-1727	146	31	discharge	discharge	NOUN
ap-1727	146	32	has	have	AUX
ap-1727	146	33	been	be	AUX
ap-1727	146	34	observed	observe	VERB
ap-1727	146	35	.	.	PUNCT
ap-1727	147	1	the	the	DET
ap-1727	147	2	duration	duration	NOUN
ap-1727	147	3	of	of	ADP
ap-1727	147	4	radiation	radiation	NOUN
ap-1727	147	5	spikes	spike	NOUN
ap-1727	147	6	is	be	AUX
ap-1727	147	7	found	find	VERB
ap-1727	147	8	to	to	PART
ap-1727	147	9	be	be	AUX
ap-1727	147	10	much	much	ADV
ap-1727	147	11	shorter	short	ADJ
ap-1727	147	12	than	than	ADP
ap-1727	147	13	the	the	DET
ap-1727	147	14	half	half	ADJ
ap-1727	147	15	-	-	PUNCT
ap-1727	147	16	period	period	NOUN
ap-1727	147	17	of	of	ADP
ap-1727	147	18	the	the	DET
ap-1727	147	19	discharge	discharge	NOUN
ap-1727	147	20	current	current	ADJ
ap-1727	147	21	.	.	PUNCT
ap-1727	148	1	in	in	ADP
ap-1727	148	2	a	a	DET
ap-1727	148	3	narrow	narrow	ADJ
ap-1727	148	4	energy	energy	NOUN
ap-1727	148	5	range	range	NOUN
ap-1727	148	6	in	in	ADP
ap-1727	148	7	second	second	ADJ
ap-1727	148	8	half	half	ADJ
ap-1727	148	9	-	-	PUNCT
ap-1727	148	10	cycle	cycle	NOUN
ap-1727	148	11	the	the	DET
ap-1727	148	12	spike	spike	NOUN
ap-1727	148	13	-	-	PUNCT
ap-1727	148	14	satellite	satellite	NOUN
ap-1727	148	15	is	be	AUX
ap-1727	148	16	observed	observe	VERB
ap-1727	148	17	.	.	PUNCT
ap-1727	149	1	an	an	DET
ap-1727	149	2	analysis	analysis	NOUN
ap-1727	149	3	of	of	ADP
ap-1727	149	4	the	the	DET
ap-1727	149	5	experimental	experimental	ADJ
ap-1727	149	6	data	datum	NOUN
ap-1727	149	7	indicates	indicate	VERB
ap-1727	149	8	the	the	DET
ap-1727	149	9	presence	presence	NOUN
ap-1727	149	10	of	of	ADP
ap-1727	149	11	long	long	ADV
ap-1727	149	12	-	-	PUNCT
ap-1727	149	13	lived	live	VERB
ap-1727	149	14	dense	dense	ADJ
ap-1727	149	15	plasma	plasma	NOUN
ap-1727	149	16	.	.	PUNCT
ap-1727	150	1	when	when	SCONJ
ap-1727	150	2	this	this	DET
ap-1727	150	3	plasma	plasma	NOUN
ap-1727	150	4	is	be	AUX
ap-1727	150	5	optimally	optimally	ADV
ap-1727	150	6	supplied	supply	VERB
ap-1727	150	7	with	with	ADP
ap-1727	150	8	energy	energy	NOUN
ap-1727	150	9	,	,	PUNCT
ap-1727	150	10	radiation	radiation	NOUN
ap-1727	150	11	spikes	spike	NOUN
ap-1727	150	12	are	be	AUX
ap-1727	150	13	generated	generate	VERB
ap-1727	150	14	in	in	ADP
ap-1727	150	15	the	the	DET
ap-1727	150	16	selected	select	VERB
ap-1727	150	17	wavelength	wavelength	NOUN
ap-1727	150	18	range	range	NOUN
ap-1727	150	19	.	.	PUNCT
ap-1727	151	1	analysis	analysis	NOUN
ap-1727	151	2	of	of	ADP
ap-1727	151	3	the	the	DET
ap-1727	151	4	experimental	experimental	ADJ
ap-1727	151	5	data	datum	NOUN
ap-1727	151	6	indicates	indicate	VERB
ap-1727	151	7	that	that	SCONJ
ap-1727	151	8	the	the	DET
ap-1727	151	9	intensity	intensity	NOUN
ap-1727	151	10	of	of	ADP
ap-1727	151	11	these	these	DET
ap-1727	151	12	spikes	spike	NOUN
ap-1727	151	13	is	be	AUX
ap-1727	151	14	mainly	mainly	ADV
ap-1727	151	15	determined	determine	VERB
ap-1727	151	16	by	by	ADP
ap-1727	151	17	the	the	DET
ap-1727	151	18	discharge	discharge	NOUN
ap-1727	151	19	current	current	NOUN
ap-1727	151	20	and	and	CCONJ
ap-1727	151	21	by	by	ADP
ap-1727	151	22	the	the	DET
ap-1727	151	23	energy	energy	NOUN
ap-1727	151	24	pumped	pump	VERB
ap-1727	151	25	in	in	ADP
ap-1727	151	26	the	the	DET
ap-1727	151	27	discharge	discharge	NOUN
ap-1727	151	28	.	.	PUNCT
ap-1727	152	1	for	for	ADP
ap-1727	152	2	an	an	DET
ap-1727	152	3	efficient	efficient	ADJ
ap-1727	152	4	radiation	radiation	NOUN
ap-1727	152	5	source	source	NOUN
ap-1727	152	6	development	development	NOUN
ap-1727	152	7	it	it	PRON
ap-1727	152	8	is	be	AUX
ap-1727	152	9	expedient	expedient	ADJ
ap-1727	152	10	that	that	SCONJ
ap-1727	152	11	the	the	DET
ap-1727	152	12	radiating	radiate	VERB
ap-1727	152	13	plasma	plasma	NOUN
ap-1727	152	14	be	be	AUX
ap-1727	152	15	used	use	VERB
ap-1727	152	16	repeatedly	repeatedly	ADV
ap-1727	152	17	,	,	PUNCT
ap-1727	152	18	because	because	SCONJ
ap-1727	152	19	most	most	ADJ
ap-1727	152	20	of	of	ADP
ap-1727	152	21	the	the	DET
ap-1727	152	22	stored	store	VERB
ap-1727	152	23	energy	energy	NOUN
ap-1727	152	24	is	be	AUX
ap-1727	152	25	spent	spend	VERB
ap-1727	152	26	on	on	ADP
ap-1727	152	27	plasma	plasma	NOUN
ap-1727	152	28	formation	formation	NOUN
ap-1727	152	29	.	.	PUNCT
ap-1727	153	1	in	in	ADP
ap-1727	153	2	order	order	NOUN
ap-1727	153	3	to	to	PART
ap-1727	153	4	achieve	achieve	VERB
ap-1727	153	5	quasi	quasi	ADJ
ap-1727	153	6	-	-	ADJ
ap-1727	153	7	steady	steady	ADJ
ap-1727	153	8	emission	emission	NOUN
ap-1727	153	9	,	,	PUNCT
ap-1727	153	10	the	the	DET
ap-1727	153	11	discharge	discharge	NOUN
ap-1727	153	12	should	should	AUX
ap-1727	153	13	be	be	AUX
ap-1727	153	14	supplied	supply	VERB
ap-1727	153	15	with	with	ADP
ap-1727	153	16	optimal	optimal	ADJ
ap-1727	153	17	portions	portion	NOUN
ap-1727	153	18	of	of	ADP
ap-1727	153	19	energy	energy	NOUN
ap-1727	153	20	.	.	PUNCT
ap-1727	154	1	121	121	NUM
ap-1727	154	2	ievgeniia	ievgeniia	NOUN
ap-1727	154	3	v.	v.	ADP
ap-1727	154	4	borgun	borgun	NOUN
ap-1727	154	5	et	et	PROPN
ap-1727	154	6	al	al	PROPN
ap-1727	154	7	.	.	PROPN
ap-1727	154	8	acta	acta	PROPN
ap-1727	154	9	polytechnica	polytechnica	PROPN
ap-1727	154	10	the	the	DET
ap-1727	154	11	possibility	possibility	NOUN
ap-1727	154	12	of	of	ADP
ap-1727	154	13	the	the	DET
ap-1727	154	14	power	power	NOUN
ap-1727	154	15	(	(	PUNCT
ap-1727	154	16	several	several	ADJ
ap-1727	154	17	mw	mw	NOUN
ap-1727	154	18	)	)	PUNCT
ap-1727	154	19	extreme	extreme	ADJ
ap-1727	154	20	ultraviolet	ultraviolet	ADJ
ap-1727	154	21	generation	generation	NOUN
ap-1727	154	22	in	in	ADP
ap-1727	154	23	kind	kind	NOUN
ap-1727	154	24	of	of	ADP
ap-1727	154	25	train	train	NOUN
ap-1727	154	26	of	of	ADP
ap-1727	154	27	spikes	spike	NOUN
ap-1727	154	28	of	of	ADP
ap-1727	154	29	duration	duration	NOUN
ap-1727	154	30	200	200	NUM
ap-1727	154	31	ns	ns	NUM
ap-1727	154	32	in	in	ADP
ap-1727	154	33	the	the	DET
ap-1727	154	34	high	high	ADJ
ap-1727	154	35	-	-	PUNCT
ap-1727	154	36	current	current	ADJ
ap-1727	154	37	pulse	pulse	NOUN
ap-1727	154	38	plasma	plasma	NOUN
ap-1727	154	39	diode	diode	NOUN
ap-1727	154	40	in	in	ADP
ap-1727	154	41	the	the	DET
ap-1727	154	42	inductive	inductive	ADJ
ap-1727	154	43	stage	stage	NOUN
ap-1727	154	44	of	of	ADP
ap-1727	154	45	discharge	discharge	NOUN
ap-1727	154	46	development	development	NOUN
ap-1727	154	47	at	at	ADP
ap-1727	154	48	the	the	DET
ap-1727	154	49	current	current	ADJ
ap-1727	154	50	density	density	NOUN
ap-1727	154	51	to	to	ADP
ap-1727	154	52	the	the	DET
ap-1727	154	53	anode	anode	NOUN
ap-1727	154	54	0.2÷2.0	0.2÷2.0	X
ap-1727	154	55	ma	ma	PROPN
ap-1727	154	56	cm−2	cm−2	PROPN
ap-1727	154	57	has	have	AUX
ap-1727	154	58	been	be	AUX
ap-1727	154	59	shown	show	VERB
ap-1727	154	60	.	.	PUNCT
ap-1727	155	1	the	the	DET
ap-1727	155	2	power	power	NOUN
ap-1727	155	3	spikes	spike	NOUN
ap-1727	155	4	of	of	ADP
ap-1727	155	5	radiation	radiation	NOUN
ap-1727	155	6	are	be	AUX
ap-1727	155	7	generated	generate	VERB
ap-1727	155	8	in	in	ADP
ap-1727	155	9	conditions	condition	NOUN
ap-1727	155	10	of	of	ADP
ap-1727	155	11	plasma	plasma	NOUN
ap-1727	155	12	heating	heating	NOUN
ap-1727	155	13	by	by	ADP
ap-1727	155	14	electron	electron	NOUN
ap-1727	155	15	beam	beam	NOUN
ap-1727	155	16	.	.	PUNCT
ap-1727	156	1	the	the	DET
ap-1727	156	2	electron	electron	NOUN
ap-1727	156	3	beam	beam	NOUN
ap-1727	156	4	is	be	AUX
ap-1727	156	5	formed	form	VERB
ap-1727	156	6	by	by	ADP
ap-1727	156	7	double	double	ADJ
ap-1727	156	8	electrical	electrical	ADJ
ap-1727	156	9	layer	layer	NOUN
ap-1727	156	10	.	.	PUNCT
ap-1727	157	1	the	the	DET
ap-1727	157	2	conversion	conversion	NOUN
ap-1727	157	3	efficiency	efficiency	NOUN
ap-1727	157	4	of	of	ADP
ap-1727	157	5	pumped	pump	VERB
ap-1727	157	6	energy	energy	NOUN
ap-1727	157	7	into	into	ADP
ap-1727	157	8	radiation	radiation	NOUN
ap-1727	157	9	energy	energy	NOUN
ap-1727	157	10	at	at	ADP
ap-1727	157	11	the	the	DET
ap-1727	157	12	double	double	ADJ
ap-1727	157	13	layer	layer	NOUN
ap-1727	157	14	formation	formation	NOUN
ap-1727	157	15	(	(	PUNCT
ap-1727	157	16	beam	beam	NOUN
ap-1727	157	17	mechanism	mechanism	NOUN
ap-1727	157	18	of	of	ADP
ap-1727	157	19	plasma	plasma	NOUN
ap-1727	157	20	heating	heating	NOUN
ap-1727	157	21	)	)	PUNCT
ap-1727	157	22	is	be	AUX
ap-1727	157	23	essentially	essentially	ADV
ap-1727	157	24	higher	high	ADJ
ap-1727	157	25	in	in	ADP
ap-1727	157	26	comparison	comparison	NOUN
ap-1727	157	27	with	with	ADP
ap-1727	157	28	ordinary	ordinary	ADJ
ap-1727	157	29	heating	heating	NOUN
ap-1727	157	30	by	by	ADP
ap-1727	157	31	current	current	ADJ
ap-1727	157	32	,	,	PUNCT
ap-1727	157	33	because	because	SCONJ
ap-1727	157	34	in	in	ADP
ap-1727	157	35	first	first	ADJ
ap-1727	157	36	case	case	NOUN
ap-1727	157	37	approximately	approximately	ADV
ap-1727	157	38	all	all	DET
ap-1727	157	39	energy	energy	NOUN
ap-1727	157	40	is	be	AUX
ap-1727	157	41	pumped	pump	VERB
ap-1727	157	42	in	in	ADP
ap-1727	157	43	very	very	ADV
ap-1727	157	44	small	small	ADJ
ap-1727	157	45	volume	volume	NOUN
ap-1727	157	46	.	.	PUNCT
ap-1727	158	1	the	the	DET
ap-1727	158	2	use	use	NOUN
ap-1727	158	3	of	of	ADP
ap-1727	158	4	plasma	plasma	NOUN
ap-1727	158	5	diode	diode	NOUN
ap-1727	158	6	with	with	ADP
ap-1727	158	7	anode	anode	NOUN
ap-1727	158	8	of	of	ADP
ap-1727	158	9	small	small	ADJ
ap-1727	158	10	dimension	dimension	NOUN
ap-1727	158	11	(	(	PUNCT
ap-1727	158	12	in	in	ADP
ap-1727	158	13	comparison	comparison	NOUN
ap-1727	158	14	with	with	ADP
ap-1727	158	15	cathode	cathode	NOUN
ap-1727	158	16	dimension	dimension	NOUN
ap-1727	158	17	)	)	PUNCT
ap-1727	158	18	helps	help	VERB
ap-1727	158	19	to	to	PART
ap-1727	158	20	control	control	VERB
ap-1727	158	21	and	and	CCONJ
ap-1727	158	22	stabilize	stabilize	VERB
ap-1727	158	23	in	in	ADP
ap-1727	158	24	space	space	NOUN
ap-1727	158	25	dense	dense	ADJ
ap-1727	158	26	plasma	plasma	NOUN
ap-1727	158	27	localization	localization	NOUN
ap-1727	158	28	and	and	CCONJ
ap-1727	158	29	the	the	DET
ap-1727	158	30	position	position	NOUN
ap-1727	158	31	of	of	ADP
ap-1727	158	32	double	double	ADJ
ap-1727	158	33	layer	layer	NOUN
ap-1727	158	34	formation	formation	NOUN
ap-1727	158	35	.	.	PUNCT
ap-1727	159	1	at	at	ADP
ap-1727	159	2	this	this	DET
ap-1727	159	3	condition	condition	NOUN
ap-1727	159	4	the	the	DET
ap-1727	159	5	space	space	NOUN
ap-1727	159	6	of	of	ADP
ap-1727	159	7	dense	dense	ADJ
ap-1727	159	8	plasma	plasma	NOUN
ap-1727	159	9	localization	localization	NOUN
ap-1727	159	10	coincides	coincide	VERB
ap-1727	159	11	with	with	ADP
ap-1727	159	12	the	the	DET
ap-1727	159	13	source	source	NOUN
ap-1727	159	14	of	of	ADP
ap-1727	159	15	its	its	PRON
ap-1727	159	16	heating	heating	NOUN
ap-1727	159	17	.	.	PUNCT
ap-1727	160	1	references	reference	NOUN
ap-1727	160	2	[	[	X
ap-1727	160	3	1	1	X
ap-1727	160	4	]	]	PUNCT
ap-1727	160	5	v.	v.	ADP
ap-1727	160	6	n.	n.	PROPN
ap-1727	160	7	borisko	borisko	ADV
ap-1727	160	8	,	,	PUNCT
ap-1727	160	9	et	et	PROPN
ap-1727	160	10	al	al	PROPN
ap-1727	160	11	.	.	PUNCT
ap-1727	161	1	the	the	DET
ap-1727	161	2	formation	formation	NOUN
ap-1727	161	3	of	of	ADP
ap-1727	161	4	the	the	DET
ap-1727	161	5	low	low	ADJ
ap-1727	161	6	-	-	PUNCT
ap-1727	161	7	sized	sized	ADJ
ap-1727	161	8	high	high	ADJ
ap-1727	161	9	density	density	NOUN
ap-1727	161	10	plasma	plasma	NOUN
ap-1727	161	11	strucrures	strucrure	VERB
ap-1727	161	12	in	in	ADP
ap-1727	161	13	the	the	DET
ap-1727	161	14	self	self	NOUN
ap-1727	161	15	-	-	PUNCT
ap-1727	161	16	maintained	maintain	VERB
ap-1727	161	17	plasma	plasma	NOUN
ap-1727	161	18	-	-	PUNCT
ap-1727	161	19	beam	beam	NOUN
ap-1727	161	20	discharge	discharge	NOUN
ap-1727	161	21	.	.	PUNCT
ap-1727	162	1	probl	probl	NOUN
ap-1727	162	2	at	at	ADP
ap-1727	162	3	sci	sci	PROPN
ap-1727	162	4	technol	technol	PROPN
ap-1727	162	5	ser	ser	NOUN
ap-1727	162	6	plasma	plasma	NOUN
ap-1727	162	7	phys	phy	NOUN
ap-1727	162	8	12(6):225	12(6):225	PROPN
ap-1727	162	9	,	,	PUNCT
ap-1727	162	10	2006	2006	NUM
ap-1727	162	11	.	.	PUNCT
ap-1727	163	1	[	[	X
ap-1727	163	2	2	2	X
ap-1727	163	3	]	]	PUNCT
ap-1727	163	4	v.	v.	ADP
ap-1727	163	5	a.	a.	NOUN
ap-1727	163	6	burzev	burzev	PROPN
ap-1727	163	7	,	,	PUNCT
ap-1727	163	8	et	et	PROPN
ap-1727	163	9	al	al	PROPN
ap-1727	163	10	.	.	PROPN
ap-1727	164	1	about	about	ADP
ap-1727	164	2	recombination	recombination	NOUN
ap-1727	164	3	nonequilibrium	nonequilibrium	NOUN
ap-1727	164	4	of	of	ADP
ap-1727	164	5	plasma	plasma	NOUN
ap-1727	164	6	in	in	ADP
ap-1727	164	7	low	low	ADJ
ap-1727	164	8	-	-	PUNCT
ap-1727	164	9	inductive	inductive	ADJ
ap-1727	164	10	capillary	capillary	ADJ
ap-1727	164	11	discharges	discharge	NOUN
ap-1727	164	12	.	.	PUNCT
ap-1727	165	1	jetp	jetp	PROPN
ap-1727	165	2	letters	letter	NOUN
ap-1727	165	3	33(1	33(1	NUM
ap-1727	165	4	)	)	PUNCT
ap-1727	165	5	,	,	PUNCT
ap-1727	165	6	2007	2007	NUM
ap-1727	165	7	.	.	PUNCT
ap-1727	166	1	[	[	X
ap-1727	166	2	3	3	NUM
ap-1727	166	3	]	]	PUNCT
ap-1727	166	4	a.	a.	NOUN
ap-1727	166	5	hassanein	hassanein	PROPN
ap-1727	166	6	,	,	PUNCT
ap-1727	166	7	et	et	PROPN
ap-1727	166	8	al	al	PROPN
ap-1727	166	9	.	.	PROPN
ap-1727	166	10	simulation	simulation	NOUN
ap-1727	166	11	and	and	CCONJ
ap-1727	166	12	optimization	optimization	NOUN
ap-1727	166	13	of	of	ADP
ap-1727	166	14	dpp	dpp	PROPN
ap-1727	166	15	hydrodynamics	hydrodynamic	NOUN
ap-1727	166	16	and	and	CCONJ
ap-1727	166	17	radiation	radiation	NOUN
ap-1727	166	18	transport	transport	NOUN
ap-1727	166	19	for	for	ADP
ap-1727	166	20	euv	euv	DET
ap-1727	166	21	lithography	lithography	NOUN
ap-1727	166	22	devices	device	NOUN
ap-1727	166	23	.	.	PUNCT
ap-1727	167	1	proc	proc	NOUN
ap-1727	167	2	of	of	ADP
ap-1727	167	3	spie	spie	NOUN
ap-1727	167	4	5374:413–422	5374:413–422	NOUN
ap-1727	167	5	,	,	PUNCT
ap-1727	167	6	2004	2004	NUM
ap-1727	167	7	.	.	PUNCT
ap-1727	168	1	[	[	X
ap-1727	168	2	4	4	X
ap-1727	168	3	]	]	PUNCT
ap-1727	168	4	e.	e.	PROPN
ap-1727	168	5	i.	i.	PROPN
ap-1727	168	6	lutsenko	lutsenko	PROPN
ap-1727	168	7	,	,	PUNCT
ap-1727	168	8	n.	n.	PROPN
ap-1727	168	9	d.	d.	PROPN
ap-1727	168	10	sereda	sereda	PROPN
ap-1727	168	11	,	,	PUNCT
ap-1727	168	12	a.	a.	PROPN
ap-1727	168	13	f.	f.	PROPN
ap-1727	168	14	tseluyko	tseluyko	PROPN
ap-1727	168	15	.	.	PUNCT
ap-1727	169	1	dynamic	dynamic	ADJ
ap-1727	169	2	double	double	ADJ
ap-1727	169	3	layers	layer	NOUN
ap-1727	169	4	in	in	ADP
ap-1727	169	5	high	high	ADJ
ap-1727	169	6	-	-	PUNCT
ap-1727	169	7	current	current	ADJ
ap-1727	169	8	plasma	plasma	NOUN
ap-1727	169	9	diodes	diode	NOUN
ap-1727	169	10	.	.	PUNCT
ap-1727	170	1	journal	journal	NOUN
ap-1727	170	2	of	of	ADP
ap-1727	170	3	technical	technical	PROPN
ap-1727	170	4	physics	physics	PROPN
ap-1727	170	5	58(7):1299–1309	58(7):1299–1309	PROPN
ap-1727	170	6	,	,	PUNCT
ap-1727	170	7	1988	1988	NUM
ap-1727	170	8	.	.	PUNCT
ap-1727	171	1	(	(	PUNCT
ap-1727	171	2	in	in	ADP
ap-1727	171	3	russian	russian	NOUN
ap-1727	171	4	)	)	PUNCT
ap-1727	171	5	.	.	PUNCT
ap-1727	172	1	[	[	X
ap-1727	172	2	5	5	X
ap-1727	172	3	]	]	PUNCT
ap-1727	172	4	e.	e.	PROPN
ap-1727	172	5	i.	i.	PROPN
ap-1727	172	6	lutsenko	lutsenko	PROPN
ap-1727	172	7	,	,	PUNCT
ap-1727	172	8	n.	n.	PROPN
ap-1727	172	9	d.	d.	PROPN
ap-1727	172	10	sereda	sereda	PROPN
ap-1727	172	11	,	,	PUNCT
ap-1727	172	12	a.	a.	PROPN
ap-1727	172	13	f.	f.	PROPN
ap-1727	172	14	tseluyko	tseluyko	PROPN
ap-1727	172	15	,	,	PUNCT
ap-1727	172	16	a.	a.	NOUN
ap-1727	172	17	a.	a.	NOUN
ap-1727	172	18	bizukov	bizukov	PROPN
ap-1727	172	19	.	.	PUNCT
ap-1727	173	1	the	the	DET
ap-1727	173	2	dynamic	dynamic	ADJ
ap-1727	173	3	characteristics	characteristic	NOUN
ap-1727	173	4	of	of	ADP
ap-1727	173	5	the	the	DET
ap-1727	173	6	beam	beam	NOUN
ap-1727	173	7	-	-	PUNCT
ap-1727	173	8	plasma	plasma	NOUN
ap-1727	173	9	self	self	NOUN
ap-1727	173	10	-	-	PUNCT
ap-1727	173	11	discharge	discharge	NOUN
ap-1727	173	12	.	.	PUNCT
ap-1727	174	1	ukrainian	ukrainian	ADJ
ap-1727	174	2	physics	physics	PROPN
ap-1727	174	3	journal	journal	PROPN
ap-1727	174	4	33(5):730–736	33(5):730–736	PROPN
ap-1727	174	5	,	,	PUNCT
ap-1727	174	6	1988	1988	NUM
ap-1727	174	7	.	.	PUNCT
ap-1727	175	1	(	(	PUNCT
ap-1727	175	2	in	in	ADP
ap-1727	175	3	russian	russian	NOUN
ap-1727	175	4	)	)	PUNCT
ap-1727	175	5	.	.	PUNCT
ap-1727	176	1	[	[	X
ap-1727	176	2	6	6	NUM
ap-1727	176	3	]	]	PUNCT
ap-1727	176	4	v.	v.	PROPN
ap-1727	176	5	i.	i.	PROPN
ap-1727	176	6	maslov	maslov	PROPN
ap-1727	176	7	.	.	PUNCT
ap-1727	177	1	properties	property	NOUN
ap-1727	177	2	and	and	CCONJ
ap-1727	177	3	evolution	evolution	NOUN
ap-1727	177	4	of	of	ADP
ap-1727	177	5	nonstationary	nonstationary	ADJ
ap-1727	177	6	double	double	ADJ
ap-1727	177	7	layers	layer	NOUN
ap-1727	177	8	in	in	ADP
ap-1727	177	9	nonequilibrium	nonequilibrium	NOUN
ap-1727	177	10	plasma	plasma	NOUN
ap-1727	177	11	(	(	PUNCT
ap-1727	177	12	invited	invite	VERB
ap-1727	177	13	lecture	lecture	NOUN
ap-1727	177	14	)	)	PUNCT
ap-1727	177	15	.	.	PUNCT
ap-1727	178	1	in	in	ADP
ap-1727	178	2	proc	proc	PROPN
ap-1727	178	3	.	.	PUNCT
ap-1727	179	1	of	of	ADP
ap-1727	179	2	4th	4th	ADJ
ap-1727	179	3	symp	symp	NOUN
ap-1727	179	4	.	.	PUNCT
ap-1727	180	1	on	on	ADP
ap-1727	180	2	double	double	ADJ
ap-1727	180	3	layers	layer	NOUN
ap-1727	180	4	and	and	CCONJ
ap-1727	180	5	other	other	ADJ
ap-1727	180	6	nonlinear	nonlinear	ADJ
ap-1727	180	7	structures	structure	NOUN
ap-1727	180	8	in	in	ADP
ap-1727	180	9	plasmas	plasma	NOUN
ap-1727	180	10	,	,	PUNCT
ap-1727	180	11	pp	pp	ADJ
ap-1727	180	12	.	.	PUNCT
ap-1727	181	1	82–92	82–92	PROPN
ap-1727	181	2	.	.	PUNCT
ap-1727	182	1	innsbruck	innsbruck	PROPN
ap-1727	182	2	,	,	PUNCT
ap-1727	182	3	1992	1992	NUM
ap-1727	182	4	.	.	PUNCT
ap-1727	183	1	[	[	X
ap-1727	183	2	7	7	X
ap-1727	183	3	]	]	PUNCT
ap-1727	183	4	m.	m.	NOUN
ap-1727	183	5	masnavi	masnavi	PROPN
ap-1727	183	6	,	,	PUNCT
ap-1727	183	7	et	et	PROPN
ap-1727	183	8	al	al	PROPN
ap-1727	183	9	.	.	PUNCT
ap-1727	183	10	estimation	estimation	NOUN
ap-1727	183	11	of	of	ADP
ap-1727	183	12	optimum	optimum	ADJ
ap-1727	183	13	density	density	NOUN
ap-1727	183	14	and	and	CCONJ
ap-1727	183	15	temperature	temperature	NOUN
ap-1727	183	16	for	for	ADP
ap-1727	183	17	maximum	maximum	ADJ
ap-1727	183	18	efficiency	efficiency	NOUN
ap-1727	183	19	of	of	ADP
ap-1727	183	20	tin	tin	NOUN
ap-1727	183	21	ions	ion	NOUN
ap-1727	183	22	in	in	ADP
ap-1727	183	23	z	z	NOUN
ap-1727	183	24	discharge	discharge	NOUN
ap-1727	183	25	extreme	extreme	ADJ
ap-1727	183	26	ultraviolet	ultraviolet	NOUN
ap-1727	183	27	sources	source	NOUN
ap-1727	183	28	.	.	PUNCT
ap-1727	184	1	j	j	PROPN
ap-1727	184	2	appl	appl	PROPN
ap-1727	184	3	phys	phys	PROPN
ap-1727	184	4	101:033306	101:033306	NUM
ap-1727	184	5	,	,	PUNCT
ap-1727	184	6	2007	2007	NUM
ap-1727	184	7	.	.	PUNCT
ap-1727	185	1	[	[	X
ap-1727	185	2	8	8	NUM
ap-1727	185	3	]	]	X
ap-1727	185	4	g.	g.	PROPN
ap-1727	185	5	niimi	niimi	PROPN
ap-1727	185	6	,	,	PUNCT
ap-1727	185	7	et	et	PROPN
ap-1727	185	8	al	al	PROPN
ap-1727	185	9	.	.	PROPN
ap-1727	186	1	observation	observation	NOUN
ap-1727	186	2	of	of	ADP
ap-1727	186	3	multi	multi	ADJ
ap-1727	186	4	-	-	ADJ
ap-1727	186	5	pulse	pulse	ADJ
ap-1727	186	6	soft	soft	ADJ
ap-1727	186	7	x	x	NOUN
ap-1727	186	8	-	-	NOUN
ap-1727	186	9	ray	ray	NOUN
ap-1727	186	10	lasing	lasing	NOUN
ap-1727	186	11	in	in	ADP
ap-1727	186	12	a	a	DET
ap-1727	186	13	fast	fast	ADJ
ap-1727	186	14	capillary	capillary	ADJ
ap-1727	186	15	discharge	discharge	NOUN
ap-1727	186	16	.	.	PUNCT
ap-1727	187	1	j	j	PROPN
ap-1727	187	2	phys	phy	NOUN
ap-1727	187	3	d	d	NOUN
ap-1727	187	4	:	:	PUNCT
ap-1727	187	5	appl	appl	PROPN
ap-1727	187	6	phys	phy	NOUN
ap-1727	187	7	34:2123	34:2123	NUM
ap-1727	187	8	,	,	PUNCT
ap-1727	187	9	2001	2001	NUM
ap-1727	187	10	.	.	PUNCT
ap-1727	188	1	[	[	X
ap-1727	188	2	9	9	NUM
ap-1727	188	3	]	]	X
ap-1727	188	4	r.	r.	PROPN
ap-1727	188	5	seysyan	seysyan	PROPN
ap-1727	188	6	.	.	PUNCT
ap-1727	189	1	nano	nano	NOUN
ap-1727	189	2	-	-	PUNCT
ap-1727	189	3	lithography	lithography	NOUN
ap-1727	189	4	slis	sli	NOUN
ap-1727	189	5	by	by	ADP
ap-1727	189	6	extreme	extreme	ADJ
ap-1727	189	7	ultraviolet	ultraviolet	ADJ
ap-1727	189	8	radiation	radiation	NOUN
ap-1727	189	9	(	(	PUNCT
ap-1727	189	10	review	review	NOUN
ap-1727	189	11	)	)	PUNCT
ap-1727	189	12	.	.	PUNCT
ap-1727	190	1	journal	journal	PROPN
ap-1727	190	2	of	of	ADP
ap-1727	190	3	technical	technical	ADJ
ap-1727	190	4	physics	physics	PROPN
ap-1727	190	5	75(5):1–13	75(5):1–13	NUM
ap-1727	190	6	,	,	PUNCT
ap-1727	190	7	2005	2005	NUM
ap-1727	190	8	.	.	PUNCT
ap-1727	191	1	(	(	PUNCT
ap-1727	191	2	in	in	ADP
ap-1727	191	3	russian	russian	NOUN
ap-1727	191	4	)	)	PUNCT
ap-1727	191	5	.	.	PUNCT
ap-1727	192	1	[	[	X
ap-1727	192	2	10	10	NUM
ap-1727	192	3	]	]	X
ap-1727	192	4	v.	v.	PROPN
ap-1727	192	5	k.	k.	PROPN
ap-1727	192	6	suladze	suladze	PROPN
ap-1727	192	7	,	,	PUNCT
ap-1727	192	8	b.	b.	PROPN
ap-1727	192	9	a.	a.	PROPN
ap-1727	192	10	tshadaya	tshadaya	PROPN
ap-1727	192	11	,	,	PUNCT
ap-1727	192	12	a.	a.	NOUN
ap-1727	192	13	a.	a.	NOUN
ap-1727	192	14	plutto	plutto	NOUN
ap-1727	192	15	.	.	PUNCT
ap-1727	193	1	features	feature	NOUN
ap-1727	193	2	of	of	ADP
ap-1727	193	3	the	the	DET
ap-1727	193	4	formation	formation	NOUN
ap-1727	193	5	of	of	ADP
ap-1727	193	6	intense	intense	ADJ
ap-1727	193	7	beams	beam	NOUN
ap-1727	193	8	of	of	ADP
ap-1727	193	9	electrons	electron	NOUN
ap-1727	193	10	confined	confine	VERB
ap-1727	193	11	plasma	plasma	NOUN
ap-1727	193	12	.	.	PUNCT
ap-1727	194	1	jetp	jetp	PROPN
ap-1727	194	2	letters	letter	NOUN
ap-1727	194	3	10(6):282–285	10(6):282–285	PROPN
ap-1727	194	4	,	,	PUNCT
ap-1727	194	5	1969	1969	NUM
ap-1727	194	6	.	.	PUNCT
ap-1727	195	1	(	(	PUNCT
ap-1727	195	2	in	in	ADP
ap-1727	195	3	russian	russian	NOUN
ap-1727	195	4	)	)	PUNCT
ap-1727	195	5	.	.	PUNCT
ap-1727	196	1	[	[	X
ap-1727	196	2	11	11	NUM
ap-1727	196	3	]	]	X
ap-1727	196	4	y.	y.	PROPN
ap-1727	196	5	tao	tao	PROPN
ap-1727	196	6	,	,	PUNCT
ap-1727	196	7	et	et	PROPN
ap-1727	196	8	al	al	PROPN
ap-1727	196	9	.	.	PROPN
ap-1727	196	10	investigation	investigation	NOUN
ap-1727	196	11	of	of	ADP
ap-1727	196	12	the	the	DET
ap-1727	196	13	interaction	interaction	NOUN
ap-1727	196	14	of	of	ADP
ap-1727	196	15	a	a	DET
ap-1727	196	16	laser	laser	NOUN
ap-1727	196	17	pulse	pulse	NOUN
ap-1727	196	18	with	with	ADP
ap-1727	196	19	a	a	DET
ap-1727	196	20	preformed	preformed	ADJ
ap-1727	196	21	gaussian	gaussian	ADJ
ap-1727	196	22	sn	sn	PROPN
ap-1727	196	23	plume	plume	NOUN
ap-1727	196	24	for	for	ADP
ap-1727	196	25	an	an	DET
ap-1727	196	26	extreme	extreme	ADJ
ap-1727	196	27	ultraviolet	ultraviolet	ADJ
ap-1727	196	28	lithography	lithography	NOUN
ap-1727	196	29	source	source	NOUN
ap-1727	196	30	.	.	PUNCT
ap-1727	197	1	j	j	PROPN
ap-1727	197	2	appl	appl	PROPN
ap-1727	197	3	phys	phy	NOUN
ap-1727	197	4	101:023305	101:023305	NUM
ap-1727	197	5	,	,	PUNCT
ap-1727	197	6	2007	2007	NUM
ap-1727	197	7	.	.	PUNCT
ap-1727	198	1	[	[	X
ap-1727	198	2	12	12	NUM
ap-1727	198	3	]	]	X
ap-1727	198	4	b.	b.	PROPN
ap-1727	198	5	a.	a.	PROPN
ap-1727	198	6	tshadaya	tshadaya	PROPN
ap-1727	198	7	,	,	PUNCT
ap-1727	198	8	a.	a.	NOUN
ap-1727	198	9	a.	a.	NOUN
ap-1727	198	10	plutto	plutto	PROPN
ap-1727	198	11	,	,	PUNCT
ap-1727	198	12	k.	k.	PROPN
ap-1727	199	1	v.	v.	PROPN
ap-1727	199	2	suladze	suladze	PROPN
ap-1727	199	3	.	.	PUNCT
ap-1727	200	1	the	the	DET
ap-1727	200	2	formation	formation	NOUN
ap-1727	200	3	of	of	ADP
ap-1727	200	4	pulse	pulse	NOUN
ap-1727	200	5	ion	ion	NOUN
ap-1727	200	6	beams	beam	NOUN
ap-1727	200	7	in	in	ADP
ap-1727	200	8	the	the	DET
ap-1727	200	9	high	high	ADJ
ap-1727	200	10	-	-	PUNCT
ap-1727	200	11	current	current	ADJ
ap-1727	200	12	plasma	plasma	NOUN
ap-1727	200	13	diode	diode	NOUN
ap-1727	200	14	.	.	PUNCT
ap-1727	201	1	journal	journal	PROPN
ap-1727	201	2	of	of	ADP
ap-1727	201	3	technical	technical	ADJ
ap-1727	201	4	physics	physics	PROPN
ap-1727	201	5	44(8):1779–1780	44(8):1779–1780	PROPN
ap-1727	201	6	,	,	PUNCT
ap-1727	201	7	1974	1974	NUM
ap-1727	201	8	.	.	PUNCT
ap-1727	202	1	(	(	PUNCT
ap-1727	202	2	in	in	ADP
ap-1727	202	3	russian	russian	NOUN
ap-1727	202	4	)	)	PUNCT
ap-1727	202	5	.	.	PUNCT
ap-1727	203	1	122	122	NUM
ap-1727	203	2	acta	acta	PROPN
ap-1727	203	3	polytechnica	polytechnica	PROPN
ap-1727	203	4	53(2):117–122	53(2):117–122	PROPN
ap-1727	203	5	,	,	PUNCT
ap-1727	203	6	2013	2013	NUM
ap-1727	203	7	1	1	NUM
ap-1727	203	8	introduction	introduction	NOUN
ap-1727	203	9	2	2	NUM
ap-1727	203	10	experiments	experiment	NOUN
ap-1727	203	11	3	3	NUM
ap-1727	203	12	results	result	NOUN
ap-1727	203	13	and	and	CCONJ
ap-1727	203	14	discussion	discussion	NOUN
ap-1727	203	15	4	4	NUM
ap-1727	203	16	conclusions	conclusion	NOUN
ap-1727	203	17	references	reference	NOUN