id	sid	tid	token	lemma	pos
ap-1729	1	1	acta	acta	PROPN
ap-1729	1	2	polytechnica	polytechnica	PROPN
ap-1729	1	3	acta	acta	PROPN
ap-1729	1	4	polytechnica	polytechnica	PROPN
ap-1729	1	5	53(2):123–126	53(2):123–126	PROPN
ap-1729	1	6	,	,	PUNCT
ap-1729	1	7	2013	2013	NUM
ap-1729	1	8	©	©	PROPN
ap-1729	1	9	czech	czech	PROPN
ap-1729	1	10	technical	technical	PROPN
ap-1729	1	11	university	university	PROPN
ap-1729	1	12	in	in	ADP
ap-1729	1	13	prague	prague	PROPN
ap-1729	1	14	,	,	PUNCT
ap-1729	1	15	2013	2013	NUM
ap-1729	1	16	available	available	ADJ
ap-1729	1	17	online	online	ADV
ap-1729	1	18	at	at	ADP
ap-1729	1	19	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	ADJ
ap-1729	1	20	growth	growth	NOUN
ap-1729	1	21	and	and	CCONJ
ap-1729	1	22	physical	physical	ADJ
ap-1729	1	23	structure	structure	NOUN
ap-1729	1	24	of	of	ADP
ap-1729	1	25	amorphous	amorphous	ADJ
ap-1729	1	26	boron	boron	NOUN
ap-1729	1	27	carbide	carbide	NOUN
ap-1729	1	28	deposited	deposit	VERB
ap-1729	1	29	by	by	ADP
ap-1729	1	30	magnetron	magnetron	NOUN
ap-1729	1	31	sputtering	sputtering	NOUN
ap-1729	1	32	on	on	ADP
ap-1729	1	33	a	a	DET
ap-1729	1	34	silicon	silicon	NOUN
ap-1729	1	35	substrate	substrate	NOUN
ap-1729	1	36	with	with	ADP
ap-1729	1	37	a	a	DET
ap-1729	1	38	titanium	titanium	NOUN
ap-1729	1	39	interlayer	interlayer	NOUN
ap-1729	1	40	roberto	roberto	PROPN
ap-1729	1	41	canielloa,∗	canielloa,∗	PROPN
ap-1729	1	42	,	,	PUNCT
ap-1729	1	43	espedito	espedito	ADJ
ap-1729	1	44	vassalloa	vassalloa	NOUN
ap-1729	1	45	,	,	PUNCT
ap-1729	1	46	anna	anna	PROPN
ap-1729	1	47	cremonaa	cremonaa	PROPN
ap-1729	1	48	,	,	PUNCT
ap-1729	1	49	giovanni	giovanni	PROPN
ap-1729	1	50	grossoa	grossoa	NOUN
ap-1729	1	51	,	,	PUNCT
ap-1729	1	52	david	david	PROPN
ap-1729	1	53	dellasegab	dellasegab	PROPN
ap-1729	1	54	,	,	PUNCT
ap-1729	1	55	maurizio	maurizio	PROPN
ap-1729	1	56	canettic	canettic	PROPN
ap-1729	1	57	,	,	PUNCT
ap-1729	1	58	enrico	enrico	PROPN
ap-1729	1	59	miorind	miorind	VERB
ap-1729	1	60	a	a	DET
ap-1729	1	61	cnr	cnr	PROPN
ap-1729	1	62	,	,	PUNCT
ap-1729	1	63	institute	institute	NOUN
ap-1729	1	64	of	of	ADP
ap-1729	1	65	plasma	plasma	PROPN
ap-1729	1	66	physics	physics	NOUN
ap-1729	1	67	‘	'	PUNCT
ap-1729	1	68	p.	p.	PROPN
ap-1729	1	69	caldirola	caldirola	PROPN
ap-1729	1	70	’	'	PUNCT
ap-1729	1	71	,	,	PUNCT
ap-1729	1	72	milan	milan	PROPN
ap-1729	1	73	,	,	PUNCT
ap-1729	1	74	italy	italy	PROPN
ap-1729	1	75	b	b	PROPN
ap-1729	1	76	department	department	PROPN
ap-1729	1	77	of	of	ADP
ap-1729	1	78	energy	energy	NOUN
ap-1729	1	79	,	,	PUNCT
ap-1729	1	80	polytechnic	polytechnic	ADJ
ap-1729	1	81	of	of	ADP
ap-1729	1	82	milan	milan	PROPN
ap-1729	1	83	,	,	PUNCT
ap-1729	1	84	milan	milan	PROPN
ap-1729	1	85	,	,	PUNCT
ap-1729	1	86	italy	italy	PROPN
ap-1729	1	87	c	c	PROPN
ap-1729	1	88	cnr	cnr	PROPN
ap-1729	1	89	,	,	PUNCT
ap-1729	1	90	institute	institute	NOUN
ap-1729	1	91	for	for	ADP
ap-1729	1	92	macromolecular	macromolecular	PROPN
ap-1729	1	93	studies	study	NOUN
ap-1729	1	94	,	,	PUNCT
ap-1729	1	95	milan	milan	PROPN
ap-1729	1	96	,	,	PUNCT
ap-1729	1	97	italy	italy	PROPN
ap-1729	1	98	d	d	PROPN
ap-1729	1	99	cnr	cnr	PROPN
ap-1729	1	100	,	,	PUNCT
ap-1729	1	101	institute	institute	NOUN
ap-1729	1	102	for	for	ADP
ap-1729	1	103	energetics	energetic	NOUN
ap-1729	1	104	and	and	CCONJ
ap-1729	1	105	interphases	interphase	NOUN
ap-1729	1	106	,	,	PUNCT
ap-1729	1	107	padua	padua	PROPN
ap-1729	1	108	,	,	PUNCT
ap-1729	1	109	italy	italy	PROPN
ap-1729	1	110	∗	∗	VERB
ap-1729	1	111	corresponding	correspond	VERB
ap-1729	1	112	author	author	NOUN
ap-1729	1	113	:	:	PUNCT
ap-1729	1	114	caniello@ifp.cnr.it	caniello@ifp.cnr.it	NOUN
ap-1729	1	115	abstract	abstract	NOUN
ap-1729	1	116	.	.	PUNCT
ap-1729	2	1	multilayer	multilayer	ADJ
ap-1729	2	2	amorphous	amorphous	ADJ
ap-1729	2	3	boron	boron	NOUN
ap-1729	2	4	carbide	carbide	NOUN
ap-1729	2	5	coatings	coating	NOUN
ap-1729	2	6	were	be	AUX
ap-1729	2	7	produced	produce	VERB
ap-1729	2	8	by	by	ADP
ap-1729	2	9	radiofrequency	radiofrequency	NOUN
ap-1729	2	10	magnetron	magnetron	NOUN
ap-1729	2	11	sputtering	sputter	VERB
ap-1729	2	12	on	on	ADP
ap-1729	2	13	silicon	silicon	NOUN
ap-1729	2	14	substrates	substrate	NOUN
ap-1729	2	15	.	.	PUNCT
ap-1729	3	1	to	to	PART
ap-1729	3	2	improve	improve	VERB
ap-1729	3	3	the	the	DET
ap-1729	3	4	adhesion	adhesion	NOUN
ap-1729	3	5	,	,	PUNCT
ap-1729	3	6	titanium	titanium	NOUN
ap-1729	3	7	interlayers	interlayer	NOUN
ap-1729	3	8	with	with	ADP
ap-1729	3	9	different	different	ADJ
ap-1729	3	10	thickness	thickness	NOUN
ap-1729	3	11	were	be	AUX
ap-1729	3	12	interposed	interpose	VERB
ap-1729	3	13	between	between	ADP
ap-1729	3	14	the	the	DET
ap-1729	3	15	substrate	substrate	NOUN
ap-1729	3	16	and	and	CCONJ
ap-1729	3	17	the	the	DET
ap-1729	3	18	coating	coating	NOUN
ap-1729	3	19	.	.	PUNCT
ap-1729	4	1	above	above	ADP
ap-1729	4	2	three	three	NUM
ap-1729	4	3	hundreds	hundred	NOUN
ap-1729	4	4	nanometer	nanometer	NOUN
ap-1729	4	5	,	,	PUNCT
ap-1729	4	6	the	the	DET
ap-1729	4	7	enhanced	enhanced	ADJ
ap-1729	4	8	roughness	roughness	NOUN
ap-1729	4	9	of	of	ADP
ap-1729	4	10	the	the	DET
ap-1729	4	11	titanium	titanium	NOUN
ap-1729	4	12	led	lead	VERB
ap-1729	4	13	to	to	ADP
ap-1729	4	14	the	the	DET
ap-1729	4	15	growth	growth	NOUN
ap-1729	4	16	of	of	ADP
ap-1729	4	17	an	an	DET
ap-1729	4	18	amorphous	amorphous	ADJ
ap-1729	4	19	boron	boron	NOUN
ap-1729	4	20	carbide	carbide	NOUN
ap-1729	4	21	with	with	ADP
ap-1729	4	22	a	a	DET
ap-1729	4	23	dense	dense	ADJ
ap-1729	4	24	and	and	CCONJ
ap-1729	4	25	continuing	continue	VERB
ap-1729	4	26	columnar	columnar	ADJ
ap-1729	4	27	structure	structure	NOUN
ap-1729	4	28	,	,	PUNCT
ap-1729	4	29	and	and	CCONJ
ap-1729	4	30	no	no	DET
ap-1729	4	31	delamination	delamination	NOUN
ap-1729	4	32	effect	effect	NOUN
ap-1729	4	33	was	be	AUX
ap-1729	4	34	observed	observe	VERB
ap-1729	4	35	.	.	PUNCT
ap-1729	5	1	correspondingly	correspondingly	ADV
ap-1729	5	2	,	,	PUNCT
ap-1729	5	3	the	the	DET
ap-1729	5	4	adhesion	adhesion	NOUN
ap-1729	5	5	of	of	ADP
ap-1729	5	6	the	the	DET
ap-1729	5	7	coating	coating	NOUN
ap-1729	5	8	became	become	VERB
ap-1729	5	9	three	three	NUM
ap-1729	5	10	time	time	NOUN
ap-1729	5	11	stronger	strong	ADJ
ap-1729	5	12	than	than	ADP
ap-1729	5	13	in	in	ADP
ap-1729	5	14	the	the	DET
ap-1729	5	15	case	case	NOUN
ap-1729	5	16	of	of	ADP
ap-1729	5	17	a	a	DET
ap-1729	5	18	bare	bare	ADJ
ap-1729	5	19	silicon	silicon	NOUN
ap-1729	5	20	substrate	substrate	NOUN
ap-1729	5	21	.	.	PUNCT
ap-1729	6	1	physical	physical	ADJ
ap-1729	6	2	structure	structure	NOUN
ap-1729	6	3	and	and	CCONJ
ap-1729	6	4	microstructural	microstructural	ADJ
ap-1729	6	5	proprieties	propriety	NOUN
ap-1729	6	6	of	of	ADP
ap-1729	6	7	the	the	DET
ap-1729	6	8	coatings	coating	NOUN
ap-1729	6	9	were	be	AUX
ap-1729	6	10	investigated	investigate	VERB
ap-1729	6	11	by	by	ADP
ap-1729	6	12	means	mean	NOUN
ap-1729	6	13	of	of	ADP
ap-1729	6	14	a	a	DET
ap-1729	6	15	scan	scan	PROPN
ap-1729	6	16	electron	electron	NOUN
ap-1729	6	17	microscopy	microscopy	NOUN
ap-1729	6	18	,	,	PUNCT
ap-1729	6	19	atomic	atomic	ADJ
ap-1729	6	20	force	force	NOUN
ap-1729	6	21	microscopy	microscopy	NOUN
ap-1729	6	22	and	and	CCONJ
ap-1729	6	23	x	x	NOUN
ap-1729	6	24	-	-	NOUN
ap-1729	6	25	ray	ray	NOUN
ap-1729	6	26	diffraction	diffraction	NOUN
ap-1729	6	27	.	.	PUNCT
ap-1729	7	1	the	the	DET
ap-1729	7	2	adhesion	adhesion	NOUN
ap-1729	7	3	of	of	ADP
ap-1729	7	4	the	the	DET
ap-1729	7	5	films	film	NOUN
ap-1729	7	6	was	be	AUX
ap-1729	7	7	measured	measure	VERB
ap-1729	7	8	by	by	ADP
ap-1729	7	9	a	a	DET
ap-1729	7	10	scratch	scratch	NOUN
ap-1729	7	11	tester	tester	NOUN
ap-1729	7	12	.	.	PUNCT
ap-1729	8	1	keywords	keyword	NOUN
ap-1729	8	2	:	:	PUNCT
ap-1729	8	3	boron	boron	NOUN
ap-1729	8	4	carbide	carbide	NOUN
ap-1729	8	5	,	,	PUNCT
ap-1729	8	6	magnetron	magnetron	NOUN
ap-1729	8	7	sputtering	sputtering	NOUN
ap-1729	8	8	,	,	PUNCT
ap-1729	8	9	titanium	titanium	NOUN
ap-1729	8	10	,	,	PUNCT
ap-1729	8	11	interlayer	interlayer	NOUN
ap-1729	8	12	,	,	PUNCT
ap-1729	8	13	scratch	scratch	NOUN
ap-1729	8	14	test	test	NOUN
ap-1729	8	15	.	.	PUNCT
ap-1729	9	1	1	1	X
ap-1729	9	2	.	.	X
ap-1729	9	3	introduction	introduction	NOUN
ap-1729	9	4	boron	boron	NOUN
ap-1729	9	5	b4c	b4c	NOUN
ap-1729	9	6	carbide	carbide	NOUN
ap-1729	9	7	is	be	AUX
ap-1729	9	8	one	one	NUM
ap-1729	9	9	of	of	ADP
ap-1729	9	10	the	the	DET
ap-1729	9	11	most	most	ADV
ap-1729	9	12	relevant	relevant	ADJ
ap-1729	9	13	material	material	NOUN
ap-1729	9	14	because	because	SCONJ
ap-1729	9	15	of	of	ADP
ap-1729	9	16	its	its	PRON
ap-1729	9	17	very	very	ADV
ap-1729	9	18	interesting	interesting	ADJ
ap-1729	9	19	characteristics	characteristic	NOUN
ap-1729	9	20	such	such	ADJ
ap-1729	9	21	as	as	ADP
ap-1729	9	22	high	high	ADJ
ap-1729	9	23	hardness	hardness	NOUN
ap-1729	9	24	,	,	PUNCT
ap-1729	9	25	good	good	ADJ
ap-1729	9	26	electronic	electronic	ADJ
ap-1729	9	27	and	and	CCONJ
ap-1729	9	28	tribological	tribological	ADJ
ap-1729	9	29	properties	property	NOUN
ap-1729	9	30	,	,	PUNCT
ap-1729	9	31	chemical	chemical	NOUN
ap-1729	9	32	and	and	CCONJ
ap-1729	9	33	thermal	thermal	ADJ
ap-1729	9	34	stability	stability	NOUN
ap-1729	9	35	[	[	X
ap-1729	9	36	24	24	NUM
ap-1729	9	37	,	,	PUNCT
ap-1729	9	38	18	18	NUM
ap-1729	9	39	,	,	PUNCT
ap-1729	9	40	9	9	NUM
ap-1729	9	41	]	]	PUNCT
ap-1729	9	42	.	.	PUNCT
ap-1729	10	1	at	at	ADP
ap-1729	10	2	room	room	NOUN
ap-1729	10	3	temperature	temperature	NOUN
ap-1729	10	4	,	,	PUNCT
ap-1729	10	5	boron	boron	NOUN
ap-1729	10	6	carbide	carbide	NOUN
ap-1729	10	7	is	be	AUX
ap-1729	10	8	the	the	DET
ap-1729	10	9	third	third	ADV
ap-1729	10	10	hardest	hard	ADV
ap-1729	10	11	known	know	VERB
ap-1729	10	12	material	material	NOUN
ap-1729	10	13	and	and	CCONJ
ap-1729	10	14	above	above	ADP
ap-1729	10	15	1100	1100	NUM
ap-1729	10	16	◦	◦	NOUN
ap-1729	10	17	c	c	NOUN
ap-1729	10	18	is	be	AUX
ap-1729	10	19	the	the	DET
ap-1729	10	20	hardest	hard	ADJ
ap-1729	10	21	one	one	NUM
ap-1729	10	22	[	[	X
ap-1729	10	23	22	22	NUM
ap-1729	10	24	]	]	PUNCT
ap-1729	10	25	.	.	PUNCT
ap-1729	11	1	the	the	DET
ap-1729	11	2	films	film	NOUN
ap-1729	11	3	of	of	ADP
ap-1729	11	4	few	few	ADJ
ap-1729	11	5	microns	micron	NOUN
ap-1729	11	6	show	show	VERB
ap-1729	11	7	good	good	ADJ
ap-1729	11	8	performance	performance	NOUN
ap-1729	11	9	on	on	ADP
ap-1729	11	10	cutting	cut	VERB
ap-1729	11	11	tools	tool	NOUN
ap-1729	11	12	[	[	X
ap-1729	11	13	9	9	NUM
ap-1729	11	14	]	]	PUNCT
ap-1729	11	15	and	and	CCONJ
ap-1729	11	16	can	can	AUX
ap-1729	11	17	be	be	AUX
ap-1729	11	18	used	use	VERB
ap-1729	11	19	as	as	ADP
ap-1729	11	20	mirrors	mirror	NOUN
ap-1729	11	21	with	with	ADP
ap-1729	11	22	high	high	ADJ
ap-1729	11	23	reflectivity	reflectivity	NOUN
ap-1729	11	24	in	in	ADP
ap-1729	11	25	the	the	DET
ap-1729	11	26	ultraviolet	ultraviolet	ADJ
ap-1729	11	27	range	range	NOUN
ap-1729	12	1	[	[	X
ap-1729	12	2	4	4	NUM
ap-1729	12	3	]	]	PUNCT
ap-1729	12	4	.	.	PUNCT
ap-1729	13	1	boron	boron	NOUN
ap-1729	13	2	-	-	PUNCT
ap-1729	13	3	based	base	VERB
ap-1729	13	4	coatings	coating	NOUN
ap-1729	13	5	can	can	AUX
ap-1729	13	6	also	also	ADV
ap-1729	13	7	be	be	AUX
ap-1729	13	8	very	very	ADV
ap-1729	13	9	useful	useful	ADJ
ap-1729	13	10	in	in	ADP
ap-1729	13	11	neutrons	neutron	NOUN
ap-1729	13	12	detection	detection	NOUN
ap-1729	13	13	application	application	NOUN
ap-1729	13	14	[	[	X
ap-1729	13	15	17	17	NUM
ap-1729	13	16	]	]	PUNCT
ap-1729	13	17	due	due	ADP
ap-1729	13	18	to	to	ADP
ap-1729	13	19	their	their	PRON
ap-1729	13	20	high	high	ADJ
ap-1729	13	21	neutron	neutron	NOUN
ap-1729	13	22	absorption	absorption	PROPN
ap-1729	13	23	cross	cross	PROPN
ap-1729	13	24	section	section	PROPN
ap-1729	13	25	.	.	PUNCT
ap-1729	14	1	several	several	ADJ
ap-1729	14	2	techniques	technique	NOUN
ap-1729	14	3	such	such	ADJ
ap-1729	14	4	as	as	ADP
ap-1729	14	5	chemical	chemical	ADJ
ap-1729	14	6	vapor	vapor	NOUN
ap-1729	14	7	deposition	deposition	NOUN
ap-1729	14	8	,	,	PUNCT
ap-1729	14	9	plasma	plasma	NOUN
ap-1729	14	10	enhanced	enhance	VERB
ap-1729	14	11	chemical	chemical	NOUN
ap-1729	14	12	vapor	vapor	NOUN
ap-1729	14	13	deposition	deposition	NOUN
ap-1729	15	1	[	[	X
ap-1729	15	2	1	1	NUM
ap-1729	15	3	]	]	PUNCT
ap-1729	15	4	,	,	PUNCT
ap-1729	15	5	hot	hot	ADJ
ap-1729	15	6	filament	filament	NOUN
ap-1729	15	7	chemical	chemical	NOUN
ap-1729	15	8	vapor	vapor	NOUN
ap-1729	15	9	deposition	deposition	NOUN
ap-1729	16	1	[	[	X
ap-1729	16	2	6	6	NUM
ap-1729	16	3	]	]	PUNCT
ap-1729	16	4	,	,	PUNCT
ap-1729	16	5	ion	ion	NOUN
ap-1729	16	6	beam	beam	NOUN
ap-1729	16	7	assisted	assist	VERB
ap-1729	16	8	evaporation	evaporation	NOUN
ap-1729	16	9	[	[	X
ap-1729	16	10	7	7	NUM
ap-1729	16	11	]	]	PUNCT
ap-1729	16	12	,	,	PUNCT
ap-1729	16	13	and	and	CCONJ
ap-1729	16	14	vacuum	vacuum	NOUN
ap-1729	16	15	arc	arc	NOUN
ap-1729	16	16	deposition	deposition	NOUN
ap-1729	16	17	technology	technology	NOUN
ap-1729	16	18	[	[	X
ap-1729	16	19	11	11	NUM
ap-1729	16	20	]	]	PUNCT
ap-1729	16	21	were	be	AUX
ap-1729	16	22	utilized	utilize	VERB
ap-1729	16	23	to	to	PART
ap-1729	16	24	synthetize	synthetize	VERB
ap-1729	16	25	boron	boron	NOUN
ap-1729	16	26	carbide	carbide	NOUN
ap-1729	16	27	films	film	NOUN
ap-1729	16	28	.	.	PUNCT
ap-1729	17	1	magnetron	magnetron	NOUN
ap-1729	17	2	sputtering	sputter	VERB
ap-1729	18	1	[	[	X
ap-1729	18	2	5	5	NUM
ap-1729	18	3	]	]	PUNCT
ap-1729	18	4	is	be	AUX
ap-1729	18	5	one	one	NUM
ap-1729	18	6	of	of	ADP
ap-1729	18	7	the	the	DET
ap-1729	18	8	most	most	ADV
ap-1729	18	9	used	use	VERB
ap-1729	18	10	technique	technique	NOUN
ap-1729	18	11	in	in	ADP
ap-1729	18	12	thin	thin	ADJ
ap-1729	18	13	film	film	NOUN
ap-1729	18	14	deposition	deposition	NOUN
ap-1729	18	15	on	on	ADP
ap-1729	18	16	industrial	industrial	ADJ
ap-1729	18	17	scale	scale	NOUN
ap-1729	18	18	due	due	ADP
ap-1729	18	19	to	to	ADP
ap-1729	18	20	its	its	PRON
ap-1729	18	21	application	application	NOUN
ap-1729	18	22	at	at	ADP
ap-1729	18	23	low	low	ADJ
ap-1729	18	24	temperature	temperature	NOUN
ap-1729	18	25	and	and	CCONJ
ap-1729	18	26	without	without	ADP
ap-1729	18	27	dangerous	dangerous	ADJ
ap-1729	18	28	gases	gas	NOUN
ap-1729	18	29	.	.	PUNCT
ap-1729	19	1	coatings	coating	NOUN
ap-1729	19	2	produced	produce	VERB
ap-1729	19	3	by	by	ADP
ap-1729	19	4	this	this	DET
ap-1729	19	5	technique	technique	NOUN
ap-1729	19	6	often	often	ADV
ap-1729	19	7	show	show	VERB
ap-1729	19	8	internal	internal	ADJ
ap-1729	19	9	stress	stress	NOUN
ap-1729	19	10	induced	induce	VERB
ap-1729	19	11	from	from	ADP
ap-1729	19	12	the	the	DET
ap-1729	19	13	deposition	deposition	NOUN
ap-1729	19	14	conditions	condition	NOUN
ap-1729	19	15	.	.	PUNCT
ap-1729	20	1	in	in	ADP
ap-1729	20	2	order	order	NOUN
ap-1729	20	3	to	to	PART
ap-1729	20	4	reduce	reduce	VERB
ap-1729	20	5	the	the	DET
ap-1729	20	6	stress	stress	NOUN
ap-1729	20	7	of	of	ADP
ap-1729	20	8	the	the	DET
ap-1729	20	9	deposited	deposit	VERB
ap-1729	20	10	coatings	coating	NOUN
ap-1729	20	11	,	,	PUNCT
ap-1729	20	12	many	many	ADJ
ap-1729	20	13	suitable	suitable	ADJ
ap-1729	20	14	deposition	deposition	NOUN
ap-1729	20	15	recipes	recipe	NOUN
ap-1729	20	16	have	have	AUX
ap-1729	20	17	been	be	AUX
ap-1729	20	18	studied	study	VERB
ap-1729	20	19	and	and	CCONJ
ap-1729	20	20	optimized	optimize	VERB
ap-1729	20	21	in	in	ADP
ap-1729	20	22	terms	term	NOUN
ap-1729	20	23	of	of	ADP
ap-1729	20	24	deposition	deposition	NOUN
ap-1729	20	25	parameters	parameter	NOUN
ap-1729	20	26	[	[	X
ap-1729	20	27	9	9	NUM
ap-1729	20	28	,	,	PUNCT
ap-1729	20	29	26	26	NUM
ap-1729	20	30	,	,	PUNCT
ap-1729	20	31	8	8	NUM
ap-1729	20	32	]	]	PUNCT
ap-1729	20	33	,	,	PUNCT
ap-1729	20	34	and	and	CCONJ
ap-1729	20	35	several	several	ADJ
ap-1729	20	36	methods	method	NOUN
ap-1729	20	37	such	such	ADJ
ap-1729	20	38	as	as	ADP
ap-1729	20	39	postprocess	postprocess	NOUN
ap-1729	20	40	annealing	annealing	NOUN
ap-1729	20	41	have	have	AUX
ap-1729	20	42	been	be	AUX
ap-1729	20	43	explored	explore	VERB
ap-1729	20	44	[	[	PUNCT
ap-1729	20	45	13	13	NUM
ap-1729	20	46	]	]	PUNCT
ap-1729	20	47	.	.	PUNCT
ap-1729	21	1	in	in	ADP
ap-1729	21	2	several	several	ADJ
ap-1729	21	3	cases	case	NOUN
ap-1729	21	4	,	,	PUNCT
ap-1729	21	5	examples	example	NOUN
ap-1729	21	6	are	be	AUX
ap-1729	21	7	reported	report	VERB
ap-1729	21	8	in	in	ADP
ap-1729	21	9	literature	literature	NOUN
ap-1729	21	10	on	on	ADP
ap-1729	21	11	the	the	DET
ap-1729	21	12	possibility	possibility	NOUN
ap-1729	21	13	to	to	PART
ap-1729	21	14	control	control	VERB
ap-1729	21	15	thin	thin	ADJ
ap-1729	21	16	films	film	NOUN
ap-1729	21	17	stress	stress	VERB
ap-1729	21	18	by	by	ADP
ap-1729	21	19	using	use	VERB
ap-1729	21	20	a	a	DET
ap-1729	21	21	multilayer	multilayer	ADJ
ap-1729	21	22	structure	structure	NOUN
ap-1729	21	23	[	[	X
ap-1729	21	24	14	14	NUM
ap-1729	21	25	,	,	PUNCT
ap-1729	21	26	25	25	NUM
ap-1729	21	27	,	,	PUNCT
ap-1729	21	28	23	23	NUM
ap-1729	21	29	]	]	PUNCT
ap-1729	21	30	or	or	CCONJ
ap-1729	21	31	to	to	PART
ap-1729	21	32	increase	increase	VERB
ap-1729	21	33	the	the	DET
ap-1729	21	34	adhesion	adhesion	NOUN
ap-1729	21	35	by	by	ADP
ap-1729	21	36	interposing	interpose	VERB
ap-1729	21	37	a	a	DET
ap-1729	21	38	metallic	metallic	ADJ
ap-1729	21	39	inter	inter	NOUN
ap-1729	21	40	-	-	NOUN
ap-1729	21	41	layers	layer	NOUN
ap-1729	21	42	between	between	ADP
ap-1729	21	43	the	the	DET
ap-1729	21	44	substrate	substrate	NOUN
ap-1729	21	45	and	and	CCONJ
ap-1729	21	46	the	the	DET
ap-1729	21	47	coating	coating	NOUN
ap-1729	21	48	[	[	X
ap-1729	21	49	20	20	NUM
ap-1729	21	50	,	,	PUNCT
ap-1729	21	51	12	12	NUM
ap-1729	21	52	,	,	PUNCT
ap-1729	21	53	10	10	NUM
ap-1729	21	54	,	,	PUNCT
ap-1729	21	55	19	19	NUM
ap-1729	21	56	]	]	PUNCT
ap-1729	21	57	.	.	PUNCT
ap-1729	22	1	mechanical	mechanical	ADJ
ap-1729	22	2	proprieties	propriety	NOUN
ap-1729	22	3	,	,	PUNCT
ap-1729	22	4	time	time	NOUN
ap-1729	22	5	stability	stability	NOUN
ap-1729	22	6	and	and	CCONJ
ap-1729	22	7	adhesion	adhesion	NOUN
ap-1729	22	8	to	to	ADP
ap-1729	22	9	the	the	DET
ap-1729	22	10	substrate	substrate	NOUN
ap-1729	22	11	are	be	AUX
ap-1729	22	12	fundamental	fundamental	ADJ
ap-1729	22	13	requirements	requirement	NOUN
ap-1729	22	14	to	to	PART
ap-1729	22	15	achieve	achieve	VERB
ap-1729	22	16	useful	useful	ADJ
ap-1729	22	17	coatings	coating	NOUN
ap-1729	22	18	in	in	ADP
ap-1729	22	19	many	many	ADJ
ap-1729	22	20	applicative	applicative	ADJ
ap-1729	22	21	fields	field	NOUN
ap-1729	22	22	.	.	PUNCT
ap-1729	23	1	in	in	ADP
ap-1729	23	2	this	this	DET
ap-1729	23	3	study	study	NOUN
ap-1729	23	4	we	we	PRON
ap-1729	23	5	report	report	VERB
ap-1729	23	6	on	on	ADP
ap-1729	23	7	the	the	DET
ap-1729	23	8	structure	structure	NOUN
ap-1729	23	9	of	of	ADP
ap-1729	23	10	an	an	DET
ap-1729	23	11	amorphous	amorphous	ADJ
ap-1729	23	12	boron	boron	NOUN
ap-1729	23	13	carbide	carbide	NOUN
ap-1729	23	14	(	(	PUNCT
ap-1729	23	15	a	a	DET
ap-1729	23	16	-	-	PUNCT
ap-1729	23	17	b4c	b4c	NOUN
ap-1729	23	18	)	)	PUNCT
ap-1729	23	19	coating	coating	NOUN
ap-1729	23	20	prepared	prepare	VERB
ap-1729	23	21	by	by	ADP
ap-1729	23	22	radio	radio	NOUN
ap-1729	23	23	frequency	frequency	NOUN
ap-1729	23	24	(	(	PUNCT
ap-1729	23	25	rf	rf	NOUN
ap-1729	23	26	)	)	PUNCT
ap-1729	23	27	magnetron	magnetron	NOUN
ap-1729	23	28	sputtering	sputtering	NOUN
ap-1729	23	29	as	as	ADP
ap-1729	23	30	function	function	NOUN
ap-1729	23	31	of	of	ADP
ap-1729	23	32	the	the	DET
ap-1729	23	33	titanium	titanium	NOUN
ap-1729	23	34	interlayer	interlayer	NOUN
ap-1729	23	35	(	(	PUNCT
ap-1729	23	36	ti	ti	PROPN
ap-1729	23	37	-	-	ADJ
ap-1729	23	38	i	i	NOUN
ap-1729	23	39	)	)	PUNCT
ap-1729	23	40	thickness	thickness	NOUN
ap-1729	23	41	deposited	deposit	VERB
ap-1729	23	42	on	on	ADP
ap-1729	23	43	(	(	PUNCT
ap-1729	23	44	100	100	NUM
ap-1729	23	45	)	)	PUNCT
ap-1729	23	46	silicon	silicon	NOUN
ap-1729	23	47	substrate	substrate	NOUN
ap-1729	23	48	at	at	ADP
ap-1729	23	49	room	room	NOUN
ap-1729	23	50	temperature	temperature	NOUN
ap-1729	23	51	.	.	PUNCT
ap-1729	24	1	we	we	PRON
ap-1729	24	2	found	find	VERB
ap-1729	24	3	that	that	SCONJ
ap-1729	24	4	a	a	DET
ap-1729	24	5	-	-	PUNCT
ap-1729	24	6	b4c	b4c	NOUN
ap-1729	24	7	films	film	NOUN
ap-1729	24	8	are	be	AUX
ap-1729	24	9	time	time	NOUN
ap-1729	24	10	instable	instable	ADJ
ap-1729	24	11	if	if	SCONJ
ap-1729	24	12	deposited	deposit	VERB
ap-1729	24	13	on	on	ADP
ap-1729	24	14	bare	bare	ADJ
ap-1729	24	15	silicon	silicon	NOUN
ap-1729	24	16	or	or	CCONJ
ap-1729	24	17	in	in	ADP
ap-1729	24	18	presence	presence	NOUN
ap-1729	24	19	of	of	ADP
ap-1729	24	20	ti	ti	NOUN
ap-1729	24	21	-	-	NOUN
ap-1729	24	22	i	i	PRON
ap-1729	24	23	with	with	ADP
ap-1729	24	24	thickness	thickness	NOUN
ap-1729	24	25	lower	low	ADJ
ap-1729	24	26	than	than	ADP
ap-1729	24	27	100	100	NUM
ap-1729	24	28	÷	÷	NUM
ap-1729	24	29	150	150	NUM
ap-1729	24	30	nm	nm	NOUN
ap-1729	24	31	.	.	PUNCT
ap-1729	25	1	in	in	ADP
ap-1729	25	2	some	some	DET
ap-1729	25	3	cases	case	NOUN
ap-1729	25	4	the	the	DET
ap-1729	25	5	coatings	coating	NOUN
ap-1729	25	6	start	start	VERB
ap-1729	25	7	to	to	PART
ap-1729	25	8	delaminate	delaminate	VERB
ap-1729	25	9	and	and	CCONJ
ap-1729	25	10	peel	peel	VERB
ap-1729	25	11	off	off	ADP
ap-1729	25	12	in	in	ADP
ap-1729	25	13	a	a	DET
ap-1729	25	14	few	few	ADJ
ap-1729	25	15	hours	hour	NOUN
ap-1729	25	16	after	after	ADP
ap-1729	25	17	being	be	AUX
ap-1729	25	18	taken	take	VERB
ap-1729	25	19	out	out	ADP
ap-1729	25	20	of	of	ADP
ap-1729	25	21	the	the	DET
ap-1729	25	22	deposition	deposition	NOUN
ap-1729	25	23	chamber	chamber	NOUN
ap-1729	25	24	.	.	PUNCT
ap-1729	26	1	as	as	SCONJ
ap-1729	26	2	ti	ti	PROPN
ap-1729	26	3	-	-	ADJ
ap-1729	26	4	i	i	PRON
ap-1729	26	5	thickness	thickness	NOUN
ap-1729	26	6	further	far	ADV
ap-1729	26	7	increases	increase	VERB
ap-1729	26	8	up	up	ADP
ap-1729	26	9	to	to	PART
ap-1729	26	10	400	400	NUM
ap-1729	26	11	nm	nm	NOUN
ap-1729	26	12	thickness	thickness	NOUN
ap-1729	26	13	,	,	PUNCT
ap-1729	26	14	the	the	DET
ap-1729	26	15	films	film	NOUN
ap-1729	26	16	show	show	VERB
ap-1729	26	17	a	a	DET
ap-1729	26	18	very	very	ADV
ap-1729	26	19	good	good	ADJ
ap-1729	26	20	stability	stability	NOUN
ap-1729	26	21	and	and	CCONJ
ap-1729	26	22	adhesion	adhesion	NOUN
ap-1729	26	23	.	.	PUNCT
ap-1729	27	1	emphasis	emphasis	NOUN
ap-1729	27	2	is	be	AUX
ap-1729	27	3	given	give	VERB
ap-1729	27	4	to	to	ADP
ap-1729	27	5	the	the	DET
ap-1729	27	6	relationship	relationship	NOUN
ap-1729	27	7	between	between	ADP
ap-1729	27	8	substrate	substrate	NOUN
ap-1729	27	9	roughness	roughness	NOUN
ap-1729	27	10	and	and	CCONJ
ap-1729	27	11	physical	physical	ADJ
ap-1729	27	12	structure	structure	NOUN
ap-1729	27	13	of	of	ADP
ap-1729	27	14	the	the	DET
ap-1729	27	15	sputterdeposited	sputterdeposite	VERB
ap-1729	27	16	a	a	PROPN
ap-1729	27	17	-	-	PUNCT
ap-1729	27	18	b4cs	b4cs	NOUN
ap-1729	27	19	.	.	PUNCT
ap-1729	28	1	physical	physical	ADJ
ap-1729	28	2	structure	structure	NOUN
ap-1729	28	3	and	and	CCONJ
ap-1729	28	4	microstructural	microstructural	ADJ
ap-1729	28	5	proprieties	propriety	NOUN
ap-1729	28	6	of	of	ADP
ap-1729	28	7	the	the	DET
ap-1729	28	8	a	a	DET
ap-1729	28	9	-	-	PUNCT
ap-1729	28	10	b4c	b4c	NOUN
ap-1729	28	11	coating	coating	NOUN
ap-1729	28	12	and	and	CCONJ
ap-1729	28	13	ti	ti	NOUN
ap-1729	28	14	interlayers	interlayer	NOUN
ap-1729	28	15	are	be	AUX
ap-1729	28	16	determined	determine	VERB
ap-1729	28	17	by	by	ADP
ap-1729	28	18	scan	scan	PROPN
ap-1729	28	19	electron	electron	PROPN
ap-1729	28	20	microscopy	microscopy	NOUN
ap-1729	28	21	(	(	PUNCT
ap-1729	28	22	sem	sem	NOUN
ap-1729	28	23	)	)	PUNCT
ap-1729	28	24	,	,	PUNCT
ap-1729	28	25	atomic	atomic	ADJ
ap-1729	28	26	force	force	NOUN
ap-1729	28	27	microscopy	microscopy	NOUN
ap-1729	28	28	(	(	PUNCT
ap-1729	28	29	afm	afm	PROPN
ap-1729	28	30	)	)	PUNCT
ap-1729	28	31	and	and	CCONJ
ap-1729	28	32	x	x	X
ap-1729	28	33	-	-	NOUN
ap-1729	28	34	ray	ray	NOUN
ap-1729	28	35	diffraction	diffraction	NOUN
ap-1729	28	36	(	(	PUNCT
ap-1729	28	37	xrd	xrd	PROPN
ap-1729	28	38	)	)	PUNCT
ap-1729	28	39	.	.	PUNCT
ap-1729	29	1	a	a	DET
ap-1729	29	2	comparison	comparison	NOUN
ap-1729	29	3	between	between	ADP
ap-1729	29	4	the	the	DET
ap-1729	29	5	adhesion	adhesion	NOUN
ap-1729	29	6	of	of	ADP
ap-1729	29	7	a	a	DET
ap-1729	29	8	-	-	PUNCT
ap-1729	29	9	b4c	b4c	NOUN
ap-1729	29	10	coating	coat	VERB
ap-1729	29	11	to	to	ADP
ap-1729	29	12	the	the	DET
ap-1729	29	13	bare	bare	ADJ
ap-1729	29	14	silicon	silicon	NOUN
ap-1729	29	15	and	and	CCONJ
ap-1729	29	16	to	to	ADP
ap-1729	29	17	a	a	DET
ap-1729	29	18	400	400	NUM
ap-1729	29	19	nm	nm	ADV
ap-1729	29	20	ti	ti	NOUN
ap-1729	29	21	coated	coat	VERB
ap-1729	29	22	silicon	silicon	NOUN
ap-1729	29	23	is	be	AUX
ap-1729	29	24	reported	report	VERB
ap-1729	29	25	as	as	SCONJ
ap-1729	29	26	measured	measure	VERB
ap-1729	29	27	by	by	ADP
ap-1729	29	28	a	a	DET
ap-1729	29	29	cetr	cetr	NOUN
ap-1729	29	30	umt-2	umt-2	CCONJ
ap-1729	29	31	scratch	scratch	NOUN
ap-1729	29	32	tester	tester	NOUN
ap-1729	29	33	.	.	PUNCT
ap-1729	30	1	2	2	NUM
ap-1729	30	2	.	.	X
ap-1729	30	3	material	material	NOUN
ap-1729	30	4	and	and	CCONJ
ap-1729	30	5	methods	method	NOUN
ap-1729	30	6	amorphous	amorphous	ADJ
ap-1729	30	7	boron	boron	NOUN
ap-1729	30	8	carbide	carbide	NOUN
ap-1729	30	9	films	film	NOUN
ap-1729	30	10	and	and	CCONJ
ap-1729	30	11	ti	ti	NOUN
ap-1729	30	12	interlayers	interlayer	NOUN
ap-1729	30	13	were	be	AUX
ap-1729	30	14	prepared	prepare	VERB
ap-1729	30	15	by	by	ADP
ap-1729	30	16	rf	rf	ADJ
ap-1729	30	17	(	(	PUNCT
ap-1729	30	18	13.56mhz	13.56mhz	PROPN
ap-1729	30	19	)	)	PUNCT
ap-1729	30	20	magnetron	magnetron	NOUN
ap-1729	30	21	sputtering	sputtering	NOUN
ap-1729	30	22	of	of	ADP
ap-1729	30	23	a	a	DET
ap-1729	30	24	b4c	b4c	NOUN
ap-1729	30	25	and	and	CCONJ
ap-1729	30	26	ti	ti	NOUN
ap-1729	30	27	targets	target	NOUN
ap-1729	30	28	,	,	PUNCT
ap-1729	30	29	respectively	respectively	ADV
ap-1729	30	30	.	.	PUNCT
ap-1729	31	1	silicon	silicon	NOUN
ap-1729	31	2	substrates	substrate	NOUN
ap-1729	31	3	were	be	AUX
ap-1729	31	4	ultrasonically	ultrasonically	ADV
ap-1729	31	5	cleaned	clean	VERB
ap-1729	31	6	with	with	ADP
ap-1729	31	7	acetone	acetone	NOUN
ap-1729	31	8	123	123	NUM
ap-1729	31	9	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-1729	31	10	roberto	roberto	PROPN
ap-1729	31	11	caniello	caniello	PROPN
ap-1729	31	12	et	et	PROPN
ap-1729	31	13	al	al	PROPN
ap-1729	31	14	.	.	PROPN
ap-1729	31	15	acta	acta	PROPN
ap-1729	31	16	polytechnica	polytechnica	PROPN
ap-1729	31	17	and	and	CCONJ
ap-1729	31	18	ethanol	ethanol	NOUN
ap-1729	31	19	,	,	PUNCT
ap-1729	31	20	and	and	CCONJ
ap-1729	31	21	carefully	carefully	ADV
ap-1729	31	22	placed	place	VERB
ap-1729	31	23	on	on	ADP
ap-1729	31	24	the	the	DET
ap-1729	31	25	grounded	ground	VERB
ap-1729	31	26	substrate	substrate	NOUN
ap-1729	31	27	holder	holder	NOUN
ap-1729	31	28	kept	keep	VERB
ap-1729	31	29	at	at	ADP
ap-1729	31	30	7	7	NUM
ap-1729	31	31	cm	cm	NOUN
ap-1729	31	32	distance	distance	NOUN
ap-1729	31	33	from	from	ADP
ap-1729	31	34	the	the	DET
ap-1729	31	35	rf	rf	NOUN
ap-1729	31	36	powered	power	VERB
ap-1729	31	37	electrode	electrode	NOUN
ap-1729	31	38	.	.	PUNCT
ap-1729	32	1	the	the	DET
ap-1729	32	2	vacuum	vacuum	NOUN
ap-1729	32	3	before	before	ADP
ap-1729	32	4	deposition	deposition	NOUN
ap-1729	32	5	was	be	AUX
ap-1729	32	6	less	less	ADJ
ap-1729	32	7	than	than	ADP
ap-1729	32	8	1	1	NUM
ap-1729	32	9	×	×	NOUN
ap-1729	32	10	10−4	10−4	NUM
ap-1729	32	11	pa	pa	NOUN
ap-1729	32	12	and	and	CCONJ
ap-1729	32	13	the	the	DET
ap-1729	32	14	substrate	substrate	NOUN
ap-1729	32	15	temperature	temperature	NOUN
ap-1729	32	16	was	be	AUX
ap-1729	32	17	monitored	monitor	VERB
ap-1729	32	18	by	by	ADP
ap-1729	32	19	using	use	VERB
ap-1729	32	20	a	a	DET
ap-1729	32	21	k	k	NOUN
ap-1729	32	22	thermocouple	thermocouple	PROPN
ap-1729	32	23	placed	place	VERB
ap-1729	32	24	in	in	ADP
ap-1729	32	25	contact	contact	NOUN
ap-1729	32	26	with	with	ADP
ap-1729	32	27	the	the	DET
ap-1729	32	28	sample	sample	NOUN
ap-1729	32	29	.	.	PUNCT
ap-1729	33	1	high	high	ADJ
ap-1729	33	2	purity	purity	PROPN
ap-1729	33	3	ar	ar	PROPN
ap-1729	33	4	(	(	PUNCT
ap-1729	33	5	99.9	99.9	NUM
ap-1729	33	6	%	%	NOUN
ap-1729	33	7	)	)	PUNCT
ap-1729	33	8	gas	gas	NOUN
ap-1729	33	9	was	be	AUX
ap-1729	33	10	introduced	introduce	VERB
ap-1729	33	11	into	into	ADP
ap-1729	33	12	the	the	DET
ap-1729	33	13	chamber	chamber	NOUN
ap-1729	33	14	through	through	ADP
ap-1729	33	15	a	a	DET
ap-1729	33	16	mass	mass	ADJ
ap-1729	33	17	flow	flow	NOUN
ap-1729	33	18	controller	controller	NOUN
ap-1729	33	19	and	and	CCONJ
ap-1729	33	20	a	a	DET
ap-1729	33	21	gate	gate	NOUN
ap-1729	33	22	valve	valve	NOUN
ap-1729	33	23	was	be	AUX
ap-1729	33	24	used	use	VERB
ap-1729	33	25	to	to	PART
ap-1729	33	26	adjust	adjust	VERB
ap-1729	33	27	the	the	DET
ap-1729	33	28	pressure	pressure	NOUN
ap-1729	33	29	during	during	ADP
ap-1729	33	30	the	the	DET
ap-1729	33	31	process	process	NOUN
ap-1729	33	32	.	.	PUNCT
ap-1729	34	1	three	three	NUM
ap-1729	34	2	samples	sample	NOUN
ap-1729	34	3	of	of	ADP
ap-1729	34	4	ti	ti	X
ap-1729	34	5	interlayer	interlayer	NOUN
ap-1729	34	6	with	with	ADP
ap-1729	34	7	thicknesses	thickness	NOUN
ap-1729	34	8	of	of	ADP
ap-1729	34	9	25	25	NUM
ap-1729	34	10	nm	nm	NOUN
ap-1729	34	11	,	,	PUNCT
ap-1729	34	12	200	200	NUM
ap-1729	34	13	nm	nm	NOUN
ap-1729	34	14	,	,	PUNCT
ap-1729	34	15	and	and	CCONJ
ap-1729	34	16	400	400	NUM
ap-1729	34	17	nm	nm	NOUN
ap-1729	34	18	were	be	AUX
ap-1729	34	19	sputter	sputter	VERB
ap-1729	34	20	-	-	PUNCT
ap-1729	34	21	deposited	deposit	VERB
ap-1729	34	22	on	on	ADP
ap-1729	34	23	si	si	NOUN
ap-1729	34	24	substrates	substrate	NOUN
ap-1729	34	25	in	in	ADP
ap-1729	34	26	the	the	DET
ap-1729	34	27	same	same	ADJ
ap-1729	34	28	experimental	experimental	ADJ
ap-1729	34	29	conditions	condition	NOUN
ap-1729	34	30	for	for	ADP
ap-1729	34	31	4	4	NUM
ap-1729	34	32	,	,	PUNCT
ap-1729	34	33	30	30	NUM
ap-1729	34	34	and	and	CCONJ
ap-1729	34	35	60minutes	60minute	NOUN
ap-1729	34	36	,	,	PUNCT
ap-1729	34	37	respectively	respectively	ADV
ap-1729	34	38	,	,	PUNCT
ap-1729	34	39	implying	imply	VERB
ap-1729	34	40	a	a	DET
ap-1729	34	41	6.6	6.6	NUM
ap-1729	34	42	nm	nm	NOUN
ap-1729	34	43	/	/	SYM
ap-1729	34	44	min	min	NOUN
ap-1729	34	45	constant	constant	ADJ
ap-1729	34	46	deposition	deposition	NOUN
ap-1729	34	47	rate	rate	NOUN
ap-1729	34	48	.	.	PUNCT
ap-1729	35	1	the	the	DET
ap-1729	35	2	rf	rf	NOUN
ap-1729	35	3	power	power	NOUN
ap-1729	35	4	was	be	AUX
ap-1729	35	5	fixed	fix	VERB
ap-1729	35	6	at	at	ADP
ap-1729	35	7	150w	150w	NUM
ap-1729	35	8	and	and	CCONJ
ap-1729	35	9	the	the	DET
ap-1729	35	10	plasma	plasma	NOUN
ap-1729	35	11	pressure	pressure	NOUN
ap-1729	35	12	at	at	ADP
ap-1729	35	13	1pa	1pa	NOUN
ap-1729	35	14	.	.	PUNCT
ap-1729	36	1	amorphous	amorphous	ADJ
ap-1729	36	2	boron	boron	NOUN
ap-1729	36	3	carbide	carbide	NOUN
ap-1729	36	4	was	be	AUX
ap-1729	36	5	deposited	deposit	VERB
ap-1729	36	6	on	on	ADP
ap-1729	36	7	bare	bare	ADJ
ap-1729	36	8	and	and	CCONJ
ap-1729	36	9	ti	ti	ADJ
ap-1729	36	10	-	-	ADJ
ap-1729	36	11	coated	coated	ADJ
ap-1729	36	12	silicon	silicon	NOUN
ap-1729	36	13	substrates	substrate	NOUN
ap-1729	36	14	with	with	ADP
ap-1729	36	15	a	a	DET
ap-1729	36	16	multilayer	multilayer	ADJ
ap-1729	36	17	structure	structure	NOUN
ap-1729	36	18	which	which	PRON
ap-1729	36	19	consists	consist	VERB
ap-1729	36	20	in	in	ADP
ap-1729	36	21	the	the	DET
ap-1729	36	22	growth	growth	NOUN
ap-1729	36	23	of	of	ADP
ap-1729	36	24	four	four	NUM
ap-1729	36	25	layers	layer	NOUN
ap-1729	36	26	at	at	ADP
ap-1729	36	27	two	two	NUM
ap-1729	36	28	different	different	ADJ
ap-1729	36	29	pressure	pressure	NOUN
ap-1729	36	30	.	.	PUNCT
ap-1729	37	1	for	for	ADP
ap-1729	37	2	the	the	DET
ap-1729	37	3	first	first	ADJ
ap-1729	37	4	and	and	CCONJ
ap-1729	37	5	third	third	ADJ
ap-1729	37	6	layer	layer	NOUN
ap-1729	37	7	,	,	PUNCT
ap-1729	37	8	the	the	DET
ap-1729	37	9	working	work	VERB
ap-1729	37	10	pressure	pressure	NOUN
ap-1729	37	11	was	be	AUX
ap-1729	37	12	fixed	fix	VERB
ap-1729	37	13	at	at	ADP
ap-1729	37	14	2pa	2pa	ADJ
ap-1729	37	15	,	,	PUNCT
ap-1729	37	16	while	while	SCONJ
ap-1729	37	17	,	,	PUNCT
ap-1729	37	18	for	for	ADP
ap-1729	37	19	the	the	DET
ap-1729	37	20	second	second	ADJ
ap-1729	37	21	and	and	CCONJ
ap-1729	37	22	fourth	fourth	ADJ
ap-1729	37	23	layer	layer	NOUN
ap-1729	37	24	a	a	DET
ap-1729	37	25	pressure	pressure	NOUN
ap-1729	37	26	of	of	ADP
ap-1729	37	27	0.8pa	0.8pa	PROPN
ap-1729	37	28	was	be	AUX
ap-1729	37	29	used	use	VERB
ap-1729	37	30	.	.	PUNCT
ap-1729	38	1	the	the	DET
ap-1729	38	2	morphological	morphological	ADJ
ap-1729	38	3	properties	property	NOUN
ap-1729	38	4	and	and	CCONJ
ap-1729	38	5	physical	physical	ADJ
ap-1729	38	6	structure	structure	NOUN
ap-1729	38	7	of	of	ADP
ap-1729	38	8	the	the	DET
ap-1729	38	9	films	film	NOUN
ap-1729	38	10	were	be	AUX
ap-1729	38	11	investigated	investigate	VERB
ap-1729	38	12	by	by	ADP
ap-1729	38	13	atomic	atomic	ADJ
ap-1729	38	14	force	force	NOUN
ap-1729	38	15	microscopy	microscopy	NOUN
ap-1729	38	16	(	(	PUNCT
ap-1729	38	17	afm	afm	PROPN
ap-1729	38	18	)	)	PUNCT
ap-1729	38	19	and	and	CCONJ
ap-1729	38	20	scanning	scan	VERB
ap-1729	38	21	electron	electron	NOUN
ap-1729	38	22	microscopy	microscopy	NOUN
ap-1729	38	23	(	(	PUNCT
ap-1729	38	24	sem	sem	NOUN
ap-1729	38	25	)	)	PUNCT
ap-1729	38	26	.	.	PUNCT
ap-1729	39	1	afm	afm	PROPN
ap-1729	39	2	measurements	measurement	NOUN
ap-1729	39	3	were	be	AUX
ap-1729	39	4	made	make	VERB
ap-1729	39	5	in	in	ADP
ap-1729	39	6	air	air	NOUN
ap-1729	39	7	by	by	ADP
ap-1729	39	8	a	a	DET
ap-1729	39	9	nano	nano	NOUN
ap-1729	39	10	-	-	PUNCT
ap-1729	39	11	rtm	rtm	NOUN
ap-1729	39	12	afm	afm	NOUN
ap-1729	39	13	system	system	NOUN
ap-1729	39	14	(	(	PUNCT
ap-1729	39	15	pacific	pacific	PROPN
ap-1729	39	16	nanotechnology	nanotechnology	PROPN
ap-1729	39	17	,	,	PUNCT
ap-1729	39	18	santa	santa	PROPN
ap-1729	39	19	clara	clara	PROPN
ap-1729	39	20	,	,	PUNCT
ap-1729	39	21	ca	ca	PROPN
ap-1729	39	22	,	,	PUNCT
ap-1729	39	23	usa	usa	PROPN
ap-1729	39	24	)	)	PUNCT
ap-1729	39	25	operating	operate	VERB
ap-1729	39	26	in	in	ADP
ap-1729	39	27	close	close	ADJ
ap-1729	39	28	contact	contact	NOUN
ap-1729	39	29	mode	mode	NOUN
ap-1729	39	30	.	.	PUNCT
ap-1729	40	1	silicon	silicon	NOUN
ap-1729	40	2	conical	conical	ADJ
ap-1729	40	3	tips	tip	NOUN
ap-1729	40	4	of	of	ADP
ap-1729	40	5	10	10	NUM
ap-1729	40	6	nm	nm	NOUN
ap-1729	40	7	radius	radius	NOUN
ap-1729	40	8	mounted	mount	VERB
ap-1729	40	9	on	on	ADP
ap-1729	40	10	silicon	silicon	NOUN
ap-1729	40	11	cantilevers	cantilever	NOUN
ap-1729	40	12	of	of	ADP
ap-1729	40	13	1250	1250	NUM
ap-1729	40	14	nm	nm	NOUN
ap-1729	40	15	length	length	NOUN
ap-1729	40	16	,	,	PUNCT
ap-1729	40	17	42n	42n	NUM
ap-1729	40	18	/	/	SYM
ap-1729	40	19	m	m	VERB
ap-1729	40	20	force	force	NOUN
ap-1729	40	21	constant	constant	ADJ
ap-1729	40	22	and	and	CCONJ
ap-1729	40	23	320	320	NUM
ap-1729	40	24	khz	khz	NOUN
ap-1729	40	25	resonance	resonance	NOUN
ap-1729	40	26	frequency	frequency	NOUN
ap-1729	40	27	were	be	AUX
ap-1729	40	28	used	use	VERB
ap-1729	40	29	.	.	PUNCT
ap-1729	41	1	images	image	NOUN
ap-1729	41	2	were	be	AUX
ap-1729	41	3	processed	process	VERB
ap-1729	41	4	and	and	CCONJ
ap-1729	41	5	analyzed	analyze	VERB
ap-1729	41	6	by	by	ADP
ap-1729	41	7	means	mean	NOUN
ap-1729	41	8	of	of	ADP
ap-1729	41	9	the	the	DET
ap-1729	41	10	nanorule+tm	nanorule+tm	NUM
ap-1729	41	11	software	software	NOUN
ap-1729	41	12	provided	provide	VERB
ap-1729	41	13	by	by	ADP
ap-1729	41	14	pacific	pacific	PROPN
ap-1729	41	15	nanotechnology	nanotechnology	PROPN
ap-1729	41	16	.	.	PUNCT
ap-1729	42	1	sem	sem	PROPN
ap-1729	42	2	measurements	measurement	NOUN
ap-1729	42	3	were	be	AUX
ap-1729	42	4	performed	perform	VERB
ap-1729	42	5	using	use	VERB
ap-1729	42	6	a	a	DET
ap-1729	42	7	zeiss	zeiss	PROPN
ap-1729	42	8	supra	supra	NOUN
ap-1729	42	9	system	system	NOUN
ap-1729	42	10	with	with	ADP
ap-1729	42	11	an	an	DET
ap-1729	42	12	accelerating	accelerate	VERB
ap-1729	42	13	voltage	voltage	NOUN
ap-1729	42	14	of	of	ADP
ap-1729	42	15	15	15	NUM
ap-1729	42	16	kv	kv	NOUN
ap-1729	42	17	.	.	PUNCT
ap-1729	43	1	the	the	DET
ap-1729	43	2	structural	structural	ADJ
ap-1729	43	3	properties	property	NOUN
ap-1729	43	4	studied	study	VERB
ap-1729	43	5	by	by	ADP
ap-1729	43	6	x	x	ADJ
ap-1729	43	7	-	-	NOUN
ap-1729	43	8	ray	ray	NOUN
ap-1729	43	9	diffraction	diffraction	NOUN
ap-1729	43	10	measurements	measurement	NOUN
ap-1729	43	11	were	be	AUX
ap-1729	43	12	performed	perform	VERB
ap-1729	43	13	with	with	ADP
ap-1729	43	14	a	a	DET
ap-1729	43	15	wide	wide	ADJ
ap-1729	43	16	angle	angle	NOUN
ap-1729	43	17	siemens	siemen	NOUN
ap-1729	43	18	d-500	d-500	PROPN
ap-1729	43	19	diffractometer	diffractometer	PROPN
ap-1729	43	20	(	(	PUNCT
ap-1729	43	21	waxd	waxd	NOUN
ap-1729	43	22	)	)	PUNCT
ap-1729	43	23	equipped	equip	VERB
ap-1729	43	24	with	with	ADP
ap-1729	43	25	a	a	DET
ap-1729	43	26	siemens	siemen	NOUN
ap-1729	43	27	fk	fk	INTJ
ap-1729	43	28	60	60	NUM
ap-1729	43	29	-	-	SYM
ap-1729	43	30	10	10	NUM
ap-1729	43	31	2000w	2000w	NOUN
ap-1729	43	32	tube	tube	NOUN
ap-1729	43	33	.	.	PUNCT
ap-1729	44	1	the	the	DET
ap-1729	44	2	radiation	radiation	NOUN
ap-1729	44	3	was	be	AUX
ap-1729	44	4	a	a	DET
ap-1729	44	5	monochromatized	monochromatize	VERB
ap-1729	44	6	cu	cu	NOUN
ap-1729	44	7	kα	kα	PROPN
ap-1729	44	8	beam	beam	VERB
ap-1729	44	9	with	with	ADP
ap-1729	44	10	wavelength	wavelength	NOUN
ap-1729	44	11	λ	λ	PROPN
ap-1729	44	12	=	=	PROPN
ap-1729	44	13	0.15418	0.15418	NUM
ap-1729	44	14	nm	nm	NOUN
ap-1729	44	15	.	.	PUNCT
ap-1729	45	1	the	the	DET
ap-1729	45	2	operating	operate	VERB
ap-1729	45	3	voltage	voltage	NOUN
ap-1729	45	4	and	and	CCONJ
ap-1729	45	5	current	current	ADJ
ap-1729	45	6	were	be	AUX
ap-1729	45	7	40	40	NUM
ap-1729	45	8	kv	kv	NOUN
ap-1729	45	9	and	and	CCONJ
ap-1729	45	10	40ma	40ma	ADJ
ap-1729	45	11	,	,	PUNCT
ap-1729	45	12	respectively	respectively	ADV
ap-1729	45	13	.	.	PUNCT
ap-1729	46	1	the	the	DET
ap-1729	46	2	data	datum	NOUN
ap-1729	46	3	were	be	AUX
ap-1729	46	4	collected	collect	VERB
ap-1729	46	5	from	from	ADP
ap-1729	46	6	10	10	NUM
ap-1729	46	7	to	to	PART
ap-1729	46	8	80	80	NUM
ap-1729	46	9	2θ	2θ	NUM
ap-1729	46	10	at	at	ADP
ap-1729	46	11	0.02	0.02	NUM
ap-1729	46	12	2θ	2θ	NUM
ap-1729	46	13	intervals	interval	NOUN
ap-1729	46	14	by	by	ADP
ap-1729	46	15	means	mean	NOUN
ap-1729	46	16	of	of	ADP
ap-1729	46	17	a	a	DET
ap-1729	46	18	silicon	silicon	NOUN
ap-1729	46	19	multi	multi	ADJ
ap-1729	46	20	-	-	ADJ
ap-1729	46	21	cathode	cathode	ADJ
ap-1729	46	22	detector	detector	NOUN
ap-1729	46	23	vortex	vortex	NOUN
ap-1729	46	24	-	-	PUNCT
ap-1729	46	25	ex	ex	X
ap-1729	46	26	(	(	PUNCT
ap-1729	46	27	sii	sii	PROPN
ap-1729	46	28	)	)	PUNCT
ap-1729	46	29	.	.	PUNCT
ap-1729	47	1	scratch	scratch	NOUN
ap-1729	47	2	test	test	NOUN
ap-1729	47	3	measurements	measurement	NOUN
ap-1729	47	4	were	be	AUX
ap-1729	47	5	made	make	VERB
ap-1729	47	6	in	in	ADP
ap-1729	47	7	compliance	compliance	NOUN
ap-1729	47	8	with	with	ADP
ap-1729	47	9	the	the	DET
ap-1729	47	10	european	european	PROPN
ap-1729	47	11	standard	standard	PROPN
ap-1729	47	12	uni	uni	PROPN
ap-1729	47	13	en	en	PROPN
ap-1729	47	14	1071	1071	NUM
ap-1729	47	15	-	-	SYM
ap-1729	47	16	3	3	NUM
ap-1729	47	17	-	-	NUM
ap-1729	47	18	2005	2005	NUM
ap-1729	47	19	by	by	ADP
ap-1729	47	20	using	use	VERB
ap-1729	47	21	a	a	DET
ap-1729	47	22	cetr	cetr	NOUN
ap-1729	47	23	umt-2	umt-2	PRON
ap-1729	47	24	tester	tester	NOUN
ap-1729	47	25	equipped	equip	VERB
ap-1729	47	26	with	with	ADP
ap-1729	47	27	a	a	DET
ap-1729	47	28	rockwell	rockwell	PROPN
ap-1729	47	29	c	c	PROPN
ap-1729	47	30	standard	standard	ADJ
ap-1729	47	31	spherical	spherical	ADJ
ap-1729	47	32	diamond	diamond	NOUN
ap-1729	47	33	indenter	indenter	NOUN
ap-1729	47	34	of	of	ADP
ap-1729	47	35	50	50	NUM
ap-1729	47	36	µm	µm	NOUN
ap-1729	47	37	radius	radius	NOUN
ap-1729	47	38	and	and	CCONJ
ap-1729	47	39	a	a	DET
ap-1729	47	40	400×	400×	PROPN
ap-1729	47	41	optical	optical	ADJ
ap-1729	47	42	microscope	microscope	NOUN
ap-1729	47	43	.	.	PUNCT
ap-1729	48	1	3	3	X
ap-1729	48	2	.	.	NOUN
ap-1729	48	3	results	result	NOUN
ap-1729	48	4	and	and	CCONJ
ap-1729	48	5	discussion	discussion	NOUN
ap-1729	48	6	figure	figure	NOUN
ap-1729	48	7	1	1	NUM
ap-1729	48	8	shows	show	VERB
ap-1729	48	9	sem	sem	PROPN
ap-1729	48	10	cross	cross	ADJ
ap-1729	48	11	-	-	ADJ
ap-1729	48	12	section	section	ADJ
ap-1729	48	13	micrographs	micrograph	NOUN
ap-1729	48	14	of	of	ADP
ap-1729	48	15	the	the	DET
ap-1729	48	16	boron	boron	NOUN
ap-1729	48	17	carbide	carbide	NOUN
ap-1729	48	18	coatings	coating	NOUN
ap-1729	48	19	grown	grow	VERB
ap-1729	48	20	on	on	ADP
ap-1729	48	21	bare	bare	ADJ
ap-1729	48	22	si	si	NOUN
ap-1729	48	23	substrate	substrate	NOUN
ap-1729	48	24	and	and	CCONJ
ap-1729	48	25	on	on	ADP
ap-1729	48	26	different	different	ADJ
ap-1729	48	27	ti	ti	NOUN
ap-1729	48	28	-	-	NOUN
ap-1729	48	29	i	i	PRON
ap-1729	48	30	thicknesses	thicknesse	VERB
ap-1729	48	31	.	.	PUNCT
ap-1729	49	1	the	the	DET
ap-1729	49	2	cross	cross	NOUN
ap-1729	49	3	sectional	sectional	ADJ
ap-1729	49	4	view	view	NOUN
ap-1729	49	5	allows	allow	VERB
ap-1729	49	6	to	to	PART
ap-1729	49	7	determine	determine	VERB
ap-1729	49	8	the	the	DET
ap-1729	49	9	b−c	b−c	NOUN
ap-1729	49	10	deposited	deposit	VERB
ap-1729	49	11	coating	coating	NOUN
ap-1729	49	12	thickness	thickness	NOUN
ap-1729	49	13	,	,	PUNCT
ap-1729	49	14	which	which	PRON
ap-1729	49	15	is	be	AUX
ap-1729	49	16	about	about	ADV
ap-1729	49	17	0.5	0.5	NUM
ap-1729	49	18	micron	micron	NOUN
ap-1729	49	19	(	(	PUNCT
ap-1729	49	20	obtained	obtain	VERB
ap-1729	49	21	by	by	ADP
ap-1729	49	22	a	a	DET
ap-1729	49	23	sequential	sequential	ADJ
ap-1729	49	24	deposition	deposition	NOUN
ap-1729	49	25	of	of	ADP
ap-1729	49	26	four	four	NUM
ap-1729	49	27	layers	layer	NOUN
ap-1729	49	28	)	)	PUNCT
ap-1729	49	29	,	,	PUNCT
ap-1729	49	30	implying	imply	VERB
ap-1729	49	31	a	a	DET
ap-1729	49	32	deposition	deposition	NOUN
ap-1729	49	33	rate	rate	NOUN
ap-1729	49	34	of	of	ADP
ap-1729	49	35	about	about	ADV
ap-1729	49	36	0.9	0.9	NUM
ap-1729	49	37	nm	nm	NOUN
ap-1729	49	38	/	/	SYM
ap-1729	49	39	min	min	NOUN
ap-1729	49	40	.	.	PROPN
ap-1729	49	41	as	as	SCONJ
ap-1729	49	42	expected	expect	VERB
ap-1729	49	43	,	,	PUNCT
ap-1729	49	44	amorphous	amorphous	ADJ
ap-1729	49	45	boron	boron	NOUN
ap-1729	49	46	carbide	carbide	NOUN
ap-1729	49	47	starts	start	VERB
ap-1729	49	48	to	to	ADP
ap-1729	49	49	growth	growth	NOUN
ap-1729	49	50	with	with	ADP
ap-1729	49	51	columns	column	NOUN
ap-1729	49	52	(	(	PUNCT
ap-1729	49	53	fig	fig	NOUN
ap-1729	49	54	.	.	PUNCT
ap-1729	50	1	1a	1a	X
ap-1729	50	2	)	)	PUNCT
ap-1729	50	3	much	much	ADV
ap-1729	50	4	thinner	thin	ADJ
ap-1729	50	5	than	than	ADP
ap-1729	50	6	figure	figure	NOUN
ap-1729	50	7	1	1	NUM
ap-1729	50	8	.	.	PUNCT
ap-1729	50	9	sem	sem	PROPN
ap-1729	50	10	cross	cross	ADJ
ap-1729	50	11	-	-	ADJ
ap-1729	50	12	section	section	ADJ
ap-1729	50	13	images	image	NOUN
ap-1729	50	14	of	of	ADP
ap-1729	50	15	the	the	DET
ap-1729	50	16	boron	boron	NOUN
ap-1729	50	17	carbide	carbide	NOUN
ap-1729	50	18	coatings	coating	NOUN
ap-1729	50	19	deposited	deposit	VERB
ap-1729	50	20	on	on	ADP
ap-1729	50	21	(	(	PUNCT
ap-1729	50	22	a	a	X
ap-1729	50	23	)	)	PUNCT
ap-1729	50	24	bare	bare	ADJ
ap-1729	50	25	si	si	NOUN
ap-1729	50	26	,	,	PUNCT
ap-1729	50	27	and	and	CCONJ
ap-1729	50	28	on	on	ADP
ap-1729	50	29	(	(	PUNCT
ap-1729	50	30	b	b	NOUN
ap-1729	50	31	)	)	PUNCT
ap-1729	50	32	25	25	NUM
ap-1729	50	33	nm	nm	NOUN
ap-1729	50	34	,	,	PUNCT
ap-1729	50	35	(	(	PUNCT
ap-1729	50	36	c	c	X
ap-1729	50	37	)	)	PUNCT
ap-1729	50	38	200	200	NUM
ap-1729	50	39	nm	nm	NOUN
ap-1729	50	40	,	,	PUNCT
ap-1729	50	41	(	(	PUNCT
ap-1729	50	42	d	d	X
ap-1729	50	43	)	)	PUNCT
ap-1729	50	44	400	400	NUM
ap-1729	50	45	nm	nm	NOUN
ap-1729	50	46	of	of	ADP
ap-1729	50	47	ti	ti	PROPN
ap-1729	50	48	interlayer	interlayer	NOUN
ap-1729	50	49	thickness	thickness	NOUN
ap-1729	50	50	.	.	PUNCT
ap-1729	51	1	the	the	DET
ap-1729	51	2	ones	one	NOUN
ap-1729	51	3	deposited	deposit	VERB
ap-1729	51	4	on	on	ADP
ap-1729	51	5	si	si	NOUN
ap-1729	51	6	substrate	substrate	NOUN
ap-1729	51	7	with	with	ADP
ap-1729	51	8	a	a	DET
ap-1729	51	9	25	25	NUM
ap-1729	51	10	nm	nm	ADJ
ap-1729	51	11	ti	ti	NOUN
ap-1729	51	12	interlayer	interlayer	NOUN
ap-1729	51	13	.	.	PUNCT
ap-1729	52	1	this	this	PRON
ap-1729	52	2	can	can	AUX
ap-1729	52	3	be	be	AUX
ap-1729	52	4	clearly	clearly	ADV
ap-1729	52	5	related	relate	VERB
ap-1729	52	6	with	with	ADP
ap-1729	52	7	the	the	DET
ap-1729	52	8	high	high	ADJ
ap-1729	52	9	flatness	flatness	NOUN
ap-1729	52	10	of	of	ADP
ap-1729	52	11	si	si	NOUN
ap-1729	52	12	substrate	substrate	NOUN
ap-1729	52	13	(	(	PUNCT
ap-1729	52	14	rrms	rrm	NOUN
ap-1729	52	15	less	less	ADJ
ap-1729	52	16	than	than	ADP
ap-1729	52	17	0.1	0.1	NUM
ap-1729	52	18	nm	nm	NOUN
ap-1729	52	19	)	)	PUNCT
ap-1729	52	20	and	and	CCONJ
ap-1729	52	21	with	with	ADP
ap-1729	52	22	the	the	DET
ap-1729	52	23	poor	poor	ADJ
ap-1729	52	24	surface	surface	NOUN
ap-1729	52	25	diffusion	diffusion	NOUN
ap-1729	52	26	due	due	ADP
ap-1729	52	27	to	to	ADP
ap-1729	52	28	the	the	DET
ap-1729	52	29	high	high	ADJ
ap-1729	52	30	working	working	NOUN
ap-1729	52	31	pressure	pressure	NOUN
ap-1729	52	32	.	.	PUNCT
ap-1729	53	1	at	at	ADP
ap-1729	53	2	25	25	NUM
ap-1729	53	3	nm	nm	PRON
ap-1729	53	4	ti	ti	NOUN
ap-1729	53	5	-	-	ADJ
ap-1729	53	6	i	i	PRON
ap-1729	53	7	thickness	thickness	NOUN
ap-1729	53	8	(	(	PUNCT
ap-1729	53	9	fig	fig	NOUN
ap-1729	53	10	.	.	PUNCT
ap-1729	53	11	1b	1b	NUM
ap-1729	53	12	)	)	PUNCT
ap-1729	53	13	,	,	PUNCT
ap-1729	53	14	the	the	DET
ap-1729	53	15	coating	coating	NOUN
ap-1729	53	16	exhibits	exhibit	VERB
ap-1729	53	17	both	both	DET
ap-1729	53	18	fine	fine	ADJ
ap-1729	53	19	columnar	columnar	ADJ
ap-1729	53	20	structure	structure	NOUN
ap-1729	53	21	(	(	PUNCT
ap-1729	53	22	layer	layer	NOUN
ap-1729	53	23	1	1	NUM
ap-1729	53	24	and	and	CCONJ
ap-1729	53	25	3	3	NUM
ap-1729	53	26	)	)	PUNCT
ap-1729	53	27	and	and	CCONJ
ap-1729	53	28	compact	compact	ADJ
ap-1729	53	29	structure	structure	NOUN
ap-1729	53	30	(	(	PUNCT
ap-1729	53	31	layer	layer	NOUN
ap-1729	53	32	2	2	NUM
ap-1729	53	33	and	and	CCONJ
ap-1729	53	34	4	4	NUM
ap-1729	53	35	)	)	PUNCT
ap-1729	53	36	.	.	PUNCT
ap-1729	54	1	the	the	DET
ap-1729	54	2	interface	interface	NOUN
ap-1729	54	3	separation	separation	NOUN
ap-1729	54	4	of	of	ADP
ap-1729	54	5	the	the	DET
ap-1729	54	6	four	four	NUM
ap-1729	54	7	layers	layer	NOUN
ap-1729	54	8	is	be	AUX
ap-1729	54	9	quite	quite	ADV
ap-1729	54	10	clear	clear	ADJ
ap-1729	54	11	.	.	PUNCT
ap-1729	55	1	the	the	DET
ap-1729	55	2	four	four	NUM
ap-1729	55	3	layer	layer	NOUN
ap-1729	55	4	structure	structure	NOUN
ap-1729	55	5	becomes	become	VERB
ap-1729	55	6	less	less	ADV
ap-1729	55	7	pronounced	pronounced	ADJ
ap-1729	55	8	as	as	SCONJ
ap-1729	55	9	the	the	DET
ap-1729	55	10	ti	ti	NOUN
ap-1729	55	11	interlayer	interlayer	NOUN
ap-1729	55	12	thickness	thickness	NOUN
ap-1729	55	13	increases	increase	VERB
ap-1729	55	14	further	far	ADV
ap-1729	55	15	up	up	ADP
ap-1729	55	16	to	to	ADP
ap-1729	55	17	200	200	NUM
ap-1729	55	18	nm	nm	NOUN
ap-1729	55	19	(	(	PUNCT
ap-1729	55	20	fig	fig	NOUN
ap-1729	55	21	.	.	PUNCT
ap-1729	56	1	1c	1c	NOUN
ap-1729	56	2	)	)	PUNCT
ap-1729	56	3	.	.	PUNCT
ap-1729	57	1	the	the	DET
ap-1729	57	2	columnar	columnar	ADJ
ap-1729	57	3	structure	structure	NOUN
ap-1729	57	4	becomes	become	VERB
ap-1729	57	5	more	more	ADV
ap-1729	57	6	continuous	continuous	ADJ
ap-1729	57	7	and	and	CCONJ
ap-1729	57	8	the	the	DET
ap-1729	57	9	interface	interface	NOUN
ap-1729	57	10	separation	separation	NOUN
ap-1729	57	11	less	less	ADV
ap-1729	57	12	visible	visible	ADJ
ap-1729	57	13	.	.	PUNCT
ap-1729	58	1	as	as	SCONJ
ap-1729	58	2	the	the	DET
ap-1729	58	3	ti	ti	NOUN
ap-1729	58	4	-	-	ADJ
ap-1729	58	5	i	i	PRON
ap-1729	58	6	thickness	thickness	NOUN
ap-1729	58	7	further	further	ADJ
ap-1729	58	8	increases	increase	NOUN
ap-1729	58	9	(	(	PUNCT
ap-1729	58	10	fig	fig	NOUN
ap-1729	58	11	.	.	PUNCT
ap-1729	59	1	1d	1d	NUM
ap-1729	59	2	)	)	PUNCT
ap-1729	59	3	,	,	PUNCT
ap-1729	59	4	the	the	DET
ap-1729	59	5	layered	layered	ADJ
ap-1729	59	6	structure	structure	NOUN
ap-1729	59	7	completely	completely	ADV
ap-1729	59	8	disappeared	disappear	VERB
ap-1729	59	9	and	and	CCONJ
ap-1729	59	10	the	the	DET
ap-1729	59	11	coating	coating	NOUN
ap-1729	59	12	assumes	assume	VERB
ap-1729	59	13	a	a	DET
ap-1729	59	14	continuous	continuous	ADJ
ap-1729	59	15	columnar	columnar	ADJ
ap-1729	59	16	structure	structure	NOUN
ap-1729	59	17	.	.	PUNCT
ap-1729	60	1	the	the	DET
ap-1729	60	2	coating	coating	NOUN
ap-1729	60	3	structure	structure	NOUN
ap-1729	60	4	remained	remain	VERB
ap-1729	60	5	columnar	columnar	ADJ
ap-1729	60	6	as	as	SCONJ
ap-1729	60	7	the	the	DET
ap-1729	60	8	ti	ti	NOUN
ap-1729	60	9	-	-	ADJ
ap-1729	60	10	i	i	PRON
ap-1729	60	11	thickness	thickness	NOUN
ap-1729	60	12	increased	increase	VERB
ap-1729	60	13	above	above	ADP
ap-1729	60	14	400	400	NUM
ap-1729	60	15	nm	nm	NOUN
ap-1729	60	16	.	.	PUNCT
ap-1729	61	1	we	we	PRON
ap-1729	61	2	have	have	AUX
ap-1729	61	3	observed	observe	VERB
ap-1729	61	4	that	that	SCONJ
ap-1729	61	5	the	the	DET
ap-1729	61	6	coatings	coating	NOUN
ap-1729	61	7	without	without	ADP
ap-1729	61	8	ti	ti	NOUN
ap-1729	61	9	-	-	PUNCT
ap-1729	61	10	i	i	PRON
ap-1729	61	11	gradually	gradually	ADV
ap-1729	61	12	start	start	VERB
ap-1729	61	13	to	to	PART
ap-1729	61	14	delaminate	delaminate	VERB
ap-1729	61	15	after	after	ADP
ap-1729	61	16	being	be	AUX
ap-1729	61	17	taken	take	VERB
ap-1729	61	18	out	out	ADP
ap-1729	61	19	of	of	ADP
ap-1729	61	20	the	the	DET
ap-1729	61	21	coating	coat	VERB
ap-1729	61	22	chamber	chamber	NOUN
ap-1729	61	23	and	and	CCONJ
ap-1729	61	24	brought	bring	VERB
ap-1729	61	25	in	in	ADP
ap-1729	61	26	atmospheric	atmospheric	ADJ
ap-1729	61	27	pressure	pressure	NOUN
ap-1729	61	28	at	at	ADP
ap-1729	61	29	room	room	NOUN
ap-1729	61	30	temperature	temperature	NOUN
ap-1729	61	31	.	.	PUNCT
ap-1729	62	1	these	these	DET
ap-1729	62	2	stresses	stress	NOUN
ap-1729	62	3	can	can	AUX
ap-1729	62	4	be	be	AUX
ap-1729	62	5	caused	cause	VERB
ap-1729	62	6	by	by	ADP
ap-1729	62	7	the	the	DET
ap-1729	62	8	large	large	ADJ
ap-1729	62	9	discrepancy	discrepancy	NOUN
ap-1729	62	10	between	between	ADP
ap-1729	62	11	the	the	DET
ap-1729	62	12	lattice	lattice	NOUN
ap-1729	62	13	parameters	parameter	NOUN
ap-1729	62	14	of	of	ADP
ap-1729	62	15	the	the	DET
ap-1729	62	16	(	(	PUNCT
ap-1729	62	17	100	100	NUM
ap-1729	62	18	)	)	PUNCT
ap-1729	62	19	silicon	silicon	NOUN
ap-1729	62	20	plane	plane	NOUN
ap-1729	62	21	and	and	CCONJ
ap-1729	62	22	the	the	DET
ap-1729	62	23	structure	structure	NOUN
ap-1729	62	24	of	of	ADP
ap-1729	62	25	the	the	DET
ap-1729	62	26	growing	grow	VERB
ap-1729	62	27	coating	coating	NOUN
ap-1729	62	28	.	.	PUNCT
ap-1729	63	1	the	the	DET
ap-1729	63	2	delamination	delamination	NOUN
ap-1729	63	3	effect	effect	NOUN
ap-1729	63	4	has	have	AUX
ap-1729	63	5	also	also	ADV
ap-1729	63	6	been	be	AUX
ap-1729	63	7	found	find	VERB
ap-1729	63	8	with	with	ADP
ap-1729	63	9	ti	ti	NOUN
ap-1729	63	10	-	-	ADJ
ap-1729	63	11	i	i	PRON
ap-1729	63	12	thickness	thickness	NOUN
ap-1729	63	13	less	less	ADJ
ap-1729	63	14	than	than	ADP
ap-1729	63	15	100÷150	100÷150	PROPN
ap-1729	63	16	nm	nm	NOUN
ap-1729	63	17	.	.	PUNCT
ap-1729	64	1	the	the	DET
ap-1729	64	2	introduction	introduction	NOUN
ap-1729	64	3	of	of	ADP
ap-1729	64	4	a	a	DET
ap-1729	64	5	ti	ti	NOUN
ap-1729	64	6	interlayer	interlayer	NOUN
ap-1729	64	7	with	with	ADP
ap-1729	64	8	thickness	thickness	NOUN
ap-1729	64	9	above	above	ADP
ap-1729	64	10	200	200	NUM
ap-1729	64	11	nm	nm	NOUN
ap-1729	64	12	produced	produce	VERB
ap-1729	64	13	a	a	DET
ap-1729	64	14	b−c	b−c	ADJ
ap-1729	64	15	stable	stable	ADJ
ap-1729	64	16	coatings	coating	NOUN
ap-1729	64	17	.	.	PUNCT
ap-1729	65	1	the	the	DET
ap-1729	65	2	effect	effect	NOUN
ap-1729	65	3	of	of	ADP
ap-1729	65	4	the	the	DET
ap-1729	65	5	ti	ti	NOUN
ap-1729	65	6	interlayer	interlayer	NOUN
ap-1729	65	7	is	be	AUX
ap-1729	65	8	likely	likely	ADJ
ap-1729	65	9	to	to	PART
ap-1729	65	10	decrease	decrease	VERB
ap-1729	65	11	the	the	DET
ap-1729	65	12	internal	internal	ADJ
ap-1729	65	13	stress	stress	NOUN
ap-1729	65	14	at	at	ADP
ap-1729	65	15	the	the	DET
ap-1729	65	16	substrate	substrate	NOUN
ap-1729	65	17	-	-	PUNCT
ap-1729	65	18	film	film	NOUN
ap-1729	65	19	interface	interface	NOUN
ap-1729	65	20	,	,	PUNCT
ap-1729	65	21	thus	thus	ADV
ap-1729	65	22	smoothing	smooth	VERB
ap-1729	65	23	the	the	DET
ap-1729	65	24	difference	difference	NOUN
ap-1729	65	25	in	in	ADP
ap-1729	65	26	lattice	lattice	NOUN
ap-1729	65	27	parameters	parameter	NOUN
ap-1729	65	28	between	between	ADP
ap-1729	65	29	the	the	DET
ap-1729	65	30	thin	thin	ADJ
ap-1729	65	31	film	film	NOUN
ap-1729	65	32	and	and	CCONJ
ap-1729	65	33	the	the	DET
ap-1729	65	34	substrate	substrate	NOUN
ap-1729	65	35	.	.	PUNCT
ap-1729	66	1	x	x	X
ap-1729	66	2	-	-	NOUN
ap-1729	66	3	ray	ray	NOUN
ap-1729	66	4	diffraction	diffraction	NOUN
ap-1729	66	5	has	have	AUX
ap-1729	66	6	been	be	AUX
ap-1729	66	7	used	use	VERB
ap-1729	66	8	to	to	PART
ap-1729	66	9	characterize	characterize	VERB
ap-1729	66	10	the	the	DET
ap-1729	66	11	structure	structure	NOUN
ap-1729	66	12	.	.	PUNCT
ap-1729	67	1	the	the	DET
ap-1729	67	2	diffraction	diffraction	NOUN
ap-1729	67	3	(	(	PUNCT
ap-1729	67	4	fig	fig	NOUN
ap-1729	67	5	.	.	NOUN
ap-1729	67	6	2	2	X
ap-1729	67	7	)	)	PUNCT
ap-1729	67	8	spectrum	spectrum	NOUN
ap-1729	67	9	of	of	ADP
ap-1729	67	10	the	the	DET
ap-1729	67	11	boron	boron	NOUN
ap-1729	67	12	carbide	carbide	NOUN
ap-1729	67	13	deposited	deposit	VERB
ap-1729	67	14	on	on	ADP
ap-1729	67	15	400	400	NUM
ap-1729	67	16	nm	nm	ADV
ap-1729	67	17	ti	ti	NOUN
ap-1729	67	18	interlayer	interlayer	NOUN
ap-1729	67	19	reveals	reveal	VERB
ap-1729	67	20	the	the	DET
ap-1729	67	21	amorphous	amorphous	ADJ
ap-1729	67	22	character	character	NOUN
ap-1729	67	23	of	of	ADP
ap-1729	67	24	the	the	DET
ap-1729	67	25	coating	coating	NOUN
ap-1729	67	26	.	.	PUNCT
ap-1729	68	1	this	this	DET
ap-1729	68	2	result	result	NOUN
ap-1729	68	3	also	also	ADV
ap-1729	68	4	applies	apply	VERB
ap-1729	68	5	to	to	ADP
ap-1729	68	6	the	the	DET
ap-1729	68	7	other	other	ADJ
ap-1729	68	8	coatings	coating	NOUN
ap-1729	68	9	with	with	ADP
ap-1729	68	10	different	different	ADJ
ap-1729	68	11	ti	ti	NOUN
ap-1729	68	12	-	-	NOUN
ap-1729	68	13	i	i	PRON
ap-1729	68	14	thicknesses	thicknesse	VERB
ap-1729	68	15	.	.	PUNCT
ap-1729	69	1	the	the	DET
ap-1729	69	2	analysis	analysis	NOUN
ap-1729	69	3	shows	show	NOUN
ap-1729	69	4	,	,	PUNCT
ap-1729	69	5	besides	besides	SCONJ
ap-1729	69	6	the	the	DET
ap-1729	69	7	reflection	reflection	NOUN
ap-1729	69	8	at	at	ADP
ap-1729	69	9	an	an	DET
ap-1729	69	10	angle	angle	NOUN
ap-1729	69	11	of	of	ADP
ap-1729	69	12	69.3	69.3	NUM
ap-1729	69	13	degree	degree	NOUN
ap-1729	69	14	corresponding	correspond	VERB
ap-1729	69	15	to	to	ADP
ap-1729	69	16	the	the	DET
ap-1729	69	17	(	(	PUNCT
ap-1729	69	18	100	100	NUM
ap-1729	69	19	)	)	PUNCT
ap-1729	69	20	si	si	NOUN
ap-1729	69	21	substrate	substrate	NOUN
ap-1729	69	22	,	,	PUNCT
ap-1729	69	23	some	some	DET
ap-1729	69	24	crystallographic	crystallographic	ADJ
ap-1729	69	25	orientations	orientation	NOUN
ap-1729	69	26	of	of	ADP
ap-1729	69	27	124	124	NUM
ap-1729	69	28	vol	vol	NOUN
ap-1729	69	29	.	.	PUNCT
ap-1729	70	1	53	53	NUM
ap-1729	70	2	no	no	NOUN
ap-1729	70	3	.	.	PUNCT
ap-1729	71	1	2/2013	2/2013	NUM
ap-1729	71	2	growth	growth	NOUN
ap-1729	71	3	and	and	CCONJ
ap-1729	71	4	physical	physical	ADJ
ap-1729	71	5	structure	structure	NOUN
ap-1729	71	6	of	of	ADP
ap-1729	71	7	amorphous	amorphous	ADJ
ap-1729	71	8	boron	boron	NOUN
ap-1729	71	9	carbide	carbide	NOUN
ap-1729	71	10	figure	figure	NOUN
ap-1729	71	11	2	2	NUM
ap-1729	71	12	.	.	PUNCT
ap-1729	71	13	xrd	xrd	PROPN
ap-1729	71	14	spectra	spectra	PROPN
ap-1729	71	15	of	of	ADP
ap-1729	71	16	amorphous	amorphous	ADJ
ap-1729	71	17	boron	boron	NOUN
ap-1729	71	18	carbide	carbide	NOUN
ap-1729	71	19	deposited	deposit	VERB
ap-1729	71	20	on	on	ADP
ap-1729	71	21	400	400	NUM
ap-1729	71	22	nm	nm	NOUN
ap-1729	71	23	of	of	ADP
ap-1729	71	24	ti	ti	NOUN
ap-1729	71	25	-	-	NOUN
ap-1729	71	26	interlayer	interlayer	NOUN
ap-1729	71	27	(	(	PUNCT
ap-1729	71	28	green	green	ADJ
ap-1729	71	29	line	line	NOUN
ap-1729	71	30	)	)	PUNCT
ap-1729	71	31	and	and	CCONJ
ap-1729	71	32	bare	bare	ADJ
ap-1729	71	33	si	si	INTJ
ap-1729	71	34	(	(	PUNCT
ap-1729	71	35	black	black	ADJ
ap-1729	71	36	line	line	NOUN
ap-1729	71	37	)	)	PUNCT
ap-1729	71	38	;	;	PUNCT
ap-1729	71	39	for	for	ADP
ap-1729	71	40	comparison	comparison	NOUN
ap-1729	71	41	,	,	PUNCT
ap-1729	71	42	the	the	DET
ap-1729	71	43	spectrum	spectrum	NOUN
ap-1729	71	44	of	of	ADP
ap-1729	71	45	ti	ti	PROPN
ap-1729	71	46	interlayer	interlayer	NOUN
ap-1729	71	47	(	(	PUNCT
ap-1729	71	48	red	red	ADJ
ap-1729	71	49	line	line	NOUN
ap-1729	71	50	)	)	PUNCT
ap-1729	71	51	is	be	AUX
ap-1729	71	52	also	also	ADV
ap-1729	71	53	reported	report	VERB
ap-1729	71	54	.	.	PUNCT
ap-1729	72	1	the	the	DET
ap-1729	72	2	hexagonal	hexagonal	ADJ
ap-1729	72	3	α	α	NOUN
ap-1729	72	4	-	-	PUNCT
ap-1729	72	5	titanium	titanium	NOUN
ap-1729	72	6	phase	phase	NOUN
ap-1729	72	7	[	[	X
ap-1729	72	8	2	2	NUM
ap-1729	72	9	,	,	PUNCT
ap-1729	72	10	21	21	NUM
ap-1729	72	11	]	]	PUNCT
ap-1729	72	12	.	.	PUNCT
ap-1729	73	1	the	the	DET
ap-1729	73	2	main	main	ADJ
ap-1729	73	3	orientation	orientation	NOUN
ap-1729	73	4	is	be	AUX
ap-1729	73	5	(	(	PUNCT
ap-1729	73	6	002	002	NUM
ap-1729	73	7	)	)	PUNCT
ap-1729	73	8	at	at	ADP
ap-1729	73	9	a	a	DET
ap-1729	73	10	2θ	2θ	NUM
ap-1729	73	11	angle	angle	NOUN
ap-1729	73	12	of	of	ADP
ap-1729	73	13	38.5	38.5	NUM
ap-1729	73	14	degree	degree	NOUN
ap-1729	73	15	;	;	PUNCT
ap-1729	73	16	other	other	ADJ
ap-1729	73	17	three	three	NUM
ap-1729	73	18	less	less	ADV
ap-1729	73	19	intense	intense	ADJ
ap-1729	73	20	peaks	peak	NOUN
ap-1729	73	21	are	be	AUX
ap-1729	73	22	visible	visible	ADJ
ap-1729	73	23	.	.	PUNCT
ap-1729	74	1	the	the	DET
ap-1729	74	2	columnar	columnar	ADJ
ap-1729	74	3	geometry	geometry	NOUN
ap-1729	74	4	depends	depend	VERB
ap-1729	74	5	on	on	ADP
ap-1729	74	6	the	the	DET
ap-1729	74	7	substrate	substrate	NOUN
ap-1729	74	8	topology	topology	NOUN
ap-1729	74	9	,	,	PUNCT
ap-1729	74	10	because	because	SCONJ
ap-1729	74	11	it	it	PRON
ap-1729	74	12	results	result	VERB
ap-1729	74	13	from	from	ADP
ap-1729	74	14	the	the	DET
ap-1729	74	15	competition	competition	NOUN
ap-1729	74	16	between	between	ADP
ap-1729	74	17	the	the	DET
ap-1729	74	18	growth	growth	NOUN
ap-1729	74	19	of	of	ADP
ap-1729	74	20	the	the	DET
ap-1729	74	21	irregularities	irregularity	NOUN
ap-1729	74	22	and	and	CCONJ
ap-1729	74	23	the	the	DET
ap-1729	74	24	surface	surface	NOUN
ap-1729	74	25	atoms	atom	NOUN
ap-1729	74	26	diffusion	diffusion	NOUN
ap-1729	75	1	[	[	X
ap-1729	75	2	16	16	NUM
ap-1729	75	3	,	,	PUNCT
ap-1729	75	4	15	15	NUM
ap-1729	75	5	]	]	PUNCT
ap-1729	75	6	.	.	PUNCT
ap-1729	76	1	the	the	DET
ap-1729	76	2	substrate	substrate	NOUN
ap-1729	76	3	roughness	roughness	NOUN
ap-1729	76	4	influences	influence	VERB
ap-1729	76	5	strongly	strongly	ADV
ap-1729	76	6	the	the	DET
ap-1729	76	7	initial	initial	ADJ
ap-1729	76	8	stage	stage	NOUN
ap-1729	76	9	of	of	ADP
ap-1729	76	10	the	the	DET
ap-1729	76	11	coating	coat	VERB
ap-1729	76	12	growth	growth	NOUN
ap-1729	76	13	[	[	X
ap-1729	76	14	3	3	X
ap-1729	76	15	]	]	PUNCT
ap-1729	76	16	and	and	CCONJ
ap-1729	76	17	it	it	PRON
ap-1729	76	18	also	also	ADV
ap-1729	76	19	plays	play	VERB
ap-1729	76	20	an	an	DET
ap-1729	76	21	important	important	ADJ
ap-1729	76	22	role	role	NOUN
ap-1729	76	23	in	in	ADP
ap-1729	76	24	the	the	DET
ap-1729	76	25	evolution	evolution	NOUN
ap-1729	76	26	of	of	ADP
ap-1729	76	27	the	the	DET
ap-1729	76	28	physical	physical	ADJ
ap-1729	76	29	structure	structure	NOUN
ap-1729	76	30	.	.	PUNCT
ap-1729	77	1	surface	surface	NOUN
ap-1729	77	2	roughness	roughness	NOUN
ap-1729	77	3	usually	usually	ADV
ap-1729	77	4	increases	increase	VERB
ap-1729	77	5	during	during	ADP
ap-1729	77	6	the	the	DET
ap-1729	77	7	deposition	deposition	NOUN
ap-1729	77	8	,	,	PUNCT
ap-1729	77	9	and	and	CCONJ
ap-1729	77	10	in	in	ADP
ap-1729	77	11	some	some	DET
ap-1729	77	12	cases	case	NOUN
ap-1729	77	13	[	[	X
ap-1729	77	14	27	27	NUM
ap-1729	77	15	]	]	PUNCT
ap-1729	77	16	,	,	PUNCT
ap-1729	77	17	columnar	columnar	ADJ
ap-1729	77	18	structures	structure	NOUN
ap-1729	77	19	gradually	gradually	ADV
ap-1729	77	20	appear	appear	VERB
ap-1729	77	21	in	in	ADP
ap-1729	77	22	sputtered	sputtered	ADJ
ap-1729	77	23	thick	thick	ADJ
ap-1729	77	24	films	film	NOUN
ap-1729	77	25	in	in	ADP
ap-1729	77	26	correspondence	correspondence	NOUN
ap-1729	77	27	of	of	ADP
ap-1729	77	28	a	a	DET
ap-1729	77	29	certain	certain	ADJ
ap-1729	77	30	roughness	roughness	NOUN
ap-1729	77	31	value	value	NOUN
ap-1729	77	32	.	.	PUNCT
ap-1729	78	1	as	as	SCONJ
ap-1729	78	2	shown	show	VERB
ap-1729	78	3	in	in	ADP
ap-1729	78	4	fig	fig	NOUN
ap-1729	78	5	.	.	PUNCT
ap-1729	79	1	3	3	NUM
ap-1729	79	2	,	,	PUNCT
ap-1729	79	3	the	the	DET
ap-1729	79	4	roughness	roughness	NOUN
ap-1729	79	5	of	of	ADP
ap-1729	79	6	the	the	DET
ap-1729	79	7	ti	ti	NOUN
ap-1729	79	8	interlayer	interlayer	NOUN
ap-1729	79	9	increases	increase	VERB
ap-1729	79	10	as	as	ADP
ap-1729	79	11	a	a	DET
ap-1729	79	12	function	function	NOUN
ap-1729	79	13	of	of	ADP
ap-1729	79	14	the	the	DET
ap-1729	79	15	thickness	thickness	NOUN
ap-1729	79	16	.	.	PUNCT
ap-1729	80	1	correspondingly	correspondingly	ADV
ap-1729	80	2	,	,	PUNCT
ap-1729	80	3	an	an	DET
ap-1729	80	4	increase	increase	NOUN
ap-1729	80	5	of	of	ADP
ap-1729	80	6	the	the	DET
ap-1729	80	7	lateral	lateral	ADJ
ap-1729	80	8	dimension	dimension	NOUN
ap-1729	80	9	of	of	ADP
ap-1729	80	10	the	the	DET
ap-1729	80	11	a	a	DET
ap-1729	80	12	-	-	PUNCT
ap-1729	80	13	b4c	b4c	NOUN
ap-1729	80	14	columns	column	NOUN
ap-1729	80	15	is	be	AUX
ap-1729	80	16	observed	observe	VERB
ap-1729	80	17	(	(	PUNCT
ap-1729	80	18	fig	fig	NOUN
ap-1729	80	19	.	.	NOUN
ap-1729	80	20	1	1	NUM
ap-1729	80	21	)	)	PUNCT
ap-1729	80	22	.	.	PUNCT
ap-1729	81	1	furthermore	furthermore	ADV
ap-1729	81	2	,	,	PUNCT
ap-1729	81	3	the	the	DET
ap-1729	81	4	interface	interface	NOUN
ap-1729	81	5	of	of	ADP
ap-1729	81	6	each	each	DET
ap-1729	81	7	layers	layer	NOUN
ap-1729	81	8	becomes	become	VERB
ap-1729	81	9	less	less	ADV
ap-1729	81	10	clear	clear	ADJ
ap-1729	81	11	until	until	SCONJ
ap-1729	81	12	it	it	PRON
ap-1729	81	13	disappears	disappear	VERB
ap-1729	81	14	at	at	ADP
ap-1729	81	15	a	a	DET
ap-1729	81	16	value	value	NOUN
ap-1729	81	17	of	of	ADP
ap-1729	81	18	about	about	ADV
ap-1729	81	19	300	300	NUM
ap-1729	81	20	nm	nm	NOUN
ap-1729	81	21	of	of	ADP
ap-1729	81	22	ti	ti	NOUN
ap-1729	81	23	-	-	NOUN
ap-1729	81	24	i	i	PRON
ap-1729	81	25	thickness	thickness	NOUN
ap-1729	81	26	.	.	PUNCT
ap-1729	82	1	another	another	DET
ap-1729	82	2	interesting	interesting	ADJ
ap-1729	82	3	feature	feature	NOUN
ap-1729	82	4	to	to	PART
ap-1729	82	5	note	note	VERB
ap-1729	82	6	is	be	AUX
ap-1729	82	7	that	that	SCONJ
ap-1729	82	8	above	above	ADP
ap-1729	82	9	this	this	DET
ap-1729	82	10	thickness	thickness	NOUN
ap-1729	82	11	the	the	DET
ap-1729	82	12	samples	sample	NOUN
ap-1729	82	13	(	(	PUNCT
ap-1729	82	14	fig	fig	NOUN
ap-1729	82	15	.	.	PUNCT
ap-1729	83	1	1d	1d	NUM
ap-1729	83	2	)	)	PUNCT
ap-1729	84	1	show	show	VERB
ap-1729	84	2	dense	dense	ADJ
ap-1729	84	3	and	and	CCONJ
ap-1729	84	4	continue	continue	VERB
ap-1729	84	5	columns	column	NOUN
ap-1729	84	6	independent	independent	ADJ
ap-1729	84	7	of	of	ADP
ap-1729	84	8	which	which	PRON
ap-1729	84	9	working	work	VERB
ap-1729	84	10	pressure	pressure	NOUN
ap-1729	84	11	has	have	AUX
ap-1729	84	12	been	be	AUX
ap-1729	84	13	used	use	VERB
ap-1729	84	14	.	.	PUNCT
ap-1729	85	1	as	as	SCONJ
ap-1729	85	2	previously	previously	ADV
ap-1729	85	3	reported	report	VERB
ap-1729	85	4	in	in	ADP
ap-1729	85	5	literature	literature	NOUN
ap-1729	85	6	[	[	X
ap-1729	85	7	3	3	NUM
ap-1729	85	8	]	]	PUNCT
ap-1729	85	9	,	,	PUNCT
ap-1729	85	10	if	if	SCONJ
ap-1729	85	11	the	the	DET
ap-1729	85	12	surface	surface	NOUN
ap-1729	85	13	adatoms	adatom	NOUN
ap-1729	85	14	diffusion	diffusion	NOUN
ap-1729	85	15	length	length	NOUN
ap-1729	85	16	is	be	AUX
ap-1729	85	17	longer	long	ADJ
ap-1729	85	18	than	than	ADP
ap-1729	85	19	the	the	DET
ap-1729	85	20	irregularities	irregularity	NOUN
ap-1729	85	21	characteristic	characteristic	ADJ
ap-1729	85	22	length	length	NOUN
ap-1729	85	23	,	,	PUNCT
ap-1729	85	24	the	the	DET
ap-1729	85	25	roughness	roughness	NOUN
ap-1729	85	26	of	of	ADP
ap-1729	85	27	the	the	DET
ap-1729	85	28	deposited	deposit	VERB
ap-1729	85	29	coating	coating	NOUN
ap-1729	85	30	is	be	AUX
ap-1729	85	31	smoothed	smooth	VERB
ap-1729	85	32	out	out	ADP
ap-1729	85	33	and	and	CCONJ
ap-1729	85	34	the	the	DET
ap-1729	85	35	coating	coating	NOUN
ap-1729	85	36	becomes	become	VERB
ap-1729	85	37	denser	dense	ADJ
ap-1729	85	38	.	.	PUNCT
ap-1729	86	1	so	so	ADV
ap-1729	86	2	we	we	PRON
ap-1729	86	3	explain	explain	VERB
ap-1729	86	4	the	the	DET
ap-1729	86	5	growth	growth	NOUN
ap-1729	86	6	features	feature	NOUN
ap-1729	86	7	of	of	ADP
ap-1729	86	8	our	our	PRON
ap-1729	86	9	coatings	coating	NOUN
ap-1729	86	10	by	by	ADP
ap-1729	86	11	this	this	DET
ap-1729	86	12	notion	notion	NOUN
ap-1729	86	13	.	.	PUNCT
ap-1729	87	1	decreasing	decrease	VERB
ap-1729	87	2	the	the	DET
ap-1729	87	3	working	working	NOUN
ap-1729	87	4	pressure	pressure	NOUN
ap-1729	87	5	,	,	PUNCT
ap-1729	87	6	when	when	SCONJ
ap-1729	87	7	the	the	DET
ap-1729	87	8	deposition	deposition	NOUN
ap-1729	87	9	is	be	AUX
ap-1729	87	10	switched	switch	VERB
ap-1729	87	11	from	from	ADP
ap-1729	87	12	layer	layer	NOUN
ap-1729	87	13	1	1	NUM
ap-1729	87	14	to	to	ADP
ap-1729	87	15	layer	layer	NOUN
ap-1729	87	16	2	2	NUM
ap-1729	87	17	(	(	PUNCT
ap-1729	87	18	fig	fig	NOUN
ap-1729	87	19	.	.	PUNCT
ap-1729	88	1	1a	1a	NOUN
ap-1729	88	2	)	)	PUNCT
ap-1729	88	3	,	,	PUNCT
ap-1729	88	4	the	the	DET
ap-1729	88	5	energy	energy	NOUN
ap-1729	88	6	released	release	VERB
ap-1729	88	7	from	from	ADP
ap-1729	88	8	the	the	DET
ap-1729	88	9	particles	particle	NOUN
ap-1729	88	10	at	at	ADP
ap-1729	88	11	the	the	DET
ap-1729	88	12	surface	surface	NOUN
ap-1729	88	13	will	will	AUX
ap-1729	88	14	be	be	AUX
ap-1729	88	15	higher	high	ADJ
ap-1729	88	16	,	,	PUNCT
ap-1729	88	17	consequently	consequently	ADV
ap-1729	88	18	,	,	PUNCT
ap-1729	88	19	the	the	DET
ap-1729	88	20	increased	increase	VERB
ap-1729	88	21	surface	surface	NOUN
ap-1729	88	22	adatoms	adatom	NOUN
ap-1729	88	23	diffusion	diffusion	NOUN
ap-1729	88	24	length	length	NOUN
ap-1729	88	25	will	will	AUX
ap-1729	88	26	give	give	VERB
ap-1729	88	27	rise	rise	NOUN
ap-1729	88	28	to	to	ADP
ap-1729	88	29	an	an	DET
ap-1729	88	30	a	a	DET
ap-1729	88	31	-	-	PUNCT
ap-1729	88	32	b4c	b4c	NOUN
ap-1729	88	33	denser	dense	ADJ
ap-1729	88	34	layer	layer	NOUN
ap-1729	88	35	.	.	PUNCT
ap-1729	89	1	with	with	ADP
ap-1729	89	2	regard	regard	NOUN
ap-1729	89	3	to	to	ADP
ap-1729	89	4	the	the	DET
ap-1729	89	5	sample	sample	NOUN
ap-1729	89	6	d	d	X
ap-1729	89	7	(	(	PUNCT
ap-1729	89	8	fig	fig	NOUN
ap-1729	89	9	.	.	NOUN
ap-1729	89	10	1	1	NUM
ap-1729	89	11	)	)	PUNCT
ap-1729	89	12	,	,	PUNCT
ap-1729	89	13	the	the	DET
ap-1729	89	14	a	a	DET
ap-1729	89	15	-	-	PUNCT
ap-1729	89	16	b4c	b4c	NOUN
ap-1729	89	17	coating	coating	NOUN
ap-1729	89	18	has	have	AUX
ap-1729	89	19	started	start	VERB
ap-1729	89	20	to	to	PART
ap-1729	89	21	grow	grow	VERB
ap-1729	89	22	with	with	ADP
ap-1729	89	23	a	a	DET
ap-1729	89	24	large	large	ADJ
ap-1729	89	25	basal	basal	ADJ
ap-1729	89	26	lateral	lateral	ADJ
ap-1729	89	27	dimension	dimension	NOUN
ap-1729	89	28	of	of	ADP
ap-1729	89	29	the	the	DET
ap-1729	89	30	columns	column	NOUN
ap-1729	89	31	and	and	CCONJ
ap-1729	89	32	,	,	PUNCT
ap-1729	89	33	when	when	SCONJ
ap-1729	89	34	the	the	DET
ap-1729	89	35	pressure	pressure	NOUN
ap-1729	89	36	was	be	AUX
ap-1729	89	37	decreased	decrease	VERB
ap-1729	89	38	,	,	PUNCT
ap-1729	89	39	the	the	DET
ap-1729	89	40	growth	growth	NOUN
ap-1729	89	41	figure	figure	NOUN
ap-1729	89	42	3	3	NUM
ap-1729	89	43	.	.	PUNCT
ap-1729	89	44	afm	afm	PROPN
ap-1729	89	45	images	image	NOUN
ap-1729	89	46	of	of	ADP
ap-1729	89	47	ti	ti	NOUN
ap-1729	89	48	-	-	ADJ
ap-1729	89	49	i	i	PRON
ap-1729	89	50	interlayers	interlayer	NOUN
ap-1729	89	51	of	of	ADP
ap-1729	89	52	thickness	thickness	NOUN
ap-1729	89	53	a	a	PRON
ap-1729	89	54	)	)	PUNCT
ap-1729	89	55	25	25	NUM
ap-1729	89	56	nm	nm	NOUN
ap-1729	89	57	,	,	PUNCT
ap-1729	89	58	b	b	NOUN
ap-1729	89	59	)	)	PUNCT
ap-1729	89	60	200	200	NUM
ap-1729	89	61	nm	nm	NOUN
ap-1729	89	62	and	and	CCONJ
ap-1729	89	63	c	c	NOUN
ap-1729	89	64	)	)	PUNCT
ap-1729	89	65	400	400	NUM
ap-1729	89	66	nm	nm	NOUN
ap-1729	89	67	;	;	PUNCT
ap-1729	89	68	the	the	DET
ap-1729	89	69	root	root	NOUN
ap-1729	89	70	mean	mean	VERB
ap-1729	89	71	square	square	ADJ
ap-1729	89	72	roughness	roughness	NOUN
ap-1729	89	73	is	be	AUX
ap-1729	89	74	indicated	indicate	VERB
ap-1729	89	75	with	with	ADP
ap-1729	89	76	rrms	rrm	NOUN
ap-1729	89	77	.	.	PUNCT
ap-1729	90	1	figure	figure	VERB
ap-1729	90	2	4	4	NUM
ap-1729	90	3	.	.	PUNCT
ap-1729	90	4	optical	optical	ADJ
ap-1729	90	5	micrographs	micrograph	NOUN
ap-1729	90	6	of	of	ADP
ap-1729	90	7	the	the	DET
ap-1729	90	8	scratch	scratch	NOUN
ap-1729	90	9	track	track	NOUN
ap-1729	90	10	generated	generate	VERB
ap-1729	90	11	from	from	ADP
ap-1729	90	12	the	the	DET
ap-1729	90	13	indenter	indenter	NOUN
ap-1729	90	14	on	on	ADP
ap-1729	90	15	a	a	DET
ap-1729	90	16	-	-	PUNCT
ap-1729	90	17	b4c	b4c	NOUN
ap-1729	90	18	deposited	deposit	VERB
ap-1729	90	19	on	on	ADP
ap-1729	90	20	bare	bare	ADJ
ap-1729	90	21	and	and	CCONJ
ap-1729	90	22	400	400	NUM
ap-1729	90	23	nm	nm	PRON
ap-1729	90	24	ti	ti	NOUN
ap-1729	90	25	coated	coat	VERB
ap-1729	90	26	silicon	silicon	NOUN
ap-1729	90	27	substrate	substrate	NOUN
ap-1729	90	28	.	.	PUNCT
ap-1729	91	1	was	be	AUX
ap-1729	91	2	proceeded	proceed	VERB
ap-1729	91	3	with	with	ADP
ap-1729	91	4	the	the	DET
ap-1729	91	5	same	same	ADJ
ap-1729	91	6	texture	texture	NOUN
ap-1729	91	7	of	of	ADP
ap-1729	91	8	the	the	DET
ap-1729	91	9	previous	previous	ADJ
ap-1729	91	10	layer	layer	NOUN
ap-1729	91	11	.	.	PUNCT
ap-1729	92	1	we	we	PRON
ap-1729	92	2	estimate	estimate	VERB
ap-1729	92	3	that	that	SCONJ
ap-1729	92	4	at	at	ADP
ap-1729	92	5	this	this	DET
ap-1729	92	6	value	value	NOUN
ap-1729	92	7	of	of	ADP
ap-1729	92	8	ti	ti	NOUN
ap-1729	92	9	-	-	PROPN
ap-1729	92	10	i	i	PRON
ap-1729	92	11	roughness	roughness	NOUN
ap-1729	92	12	,	,	PUNCT
ap-1729	92	13	an	an	DET
ap-1729	92	14	equilibrium	equilibrium	NOUN
ap-1729	92	15	between	between	ADP
ap-1729	92	16	surface	surface	NOUN
ap-1729	92	17	adatoms	adatom	NOUN
ap-1729	92	18	diffusion	diffusion	NOUN
ap-1729	92	19	length	length	NOUN
ap-1729	92	20	and	and	CCONJ
ap-1729	92	21	roughness	roughness	NOUN
ap-1729	92	22	length	length	NOUN
ap-1729	92	23	scale	scale	NOUN
ap-1729	92	24	of	of	ADP
ap-1729	92	25	the	the	DET
ap-1729	92	26	substrate	substrate	NOUN
ap-1729	92	27	was	be	AUX
ap-1729	92	28	achieved	achieve	VERB
ap-1729	92	29	.	.	PUNCT
ap-1729	93	1	we	we	PRON
ap-1729	93	2	emphasize	emphasize	VERB
ap-1729	93	3	that	that	SCONJ
ap-1729	93	4	,	,	PUNCT
ap-1729	93	5	during	during	ADP
ap-1729	93	6	the	the	DET
ap-1729	93	7	deposition	deposition	NOUN
ap-1729	93	8	process	process	NOUN
ap-1729	93	9	,	,	PUNCT
ap-1729	93	10	the	the	DET
ap-1729	93	11	temperature	temperature	NOUN
ap-1729	93	12	of	of	ADP
ap-1729	93	13	the	the	DET
ap-1729	93	14	substrate	substrate	NOUN
ap-1729	93	15	was	be	AUX
ap-1729	93	16	very	very	ADV
ap-1729	93	17	low	low	ADJ
ap-1729	93	18	(	(	PUNCT
ap-1729	93	19	about	about	ADP
ap-1729	93	20	320k	320k	NOUN
ap-1729	93	21	)	)	PUNCT
ap-1729	93	22	,	,	PUNCT
ap-1729	93	23	indicating	indicate	VERB
ap-1729	93	24	that	that	SCONJ
ap-1729	93	25	thermal	thermal	ADJ
ap-1729	93	26	induced	induced	ADJ
ap-1729	93	27	surface	surface	NOUN
ap-1729	93	28	diffusivity	diffusivity	NOUN
ap-1729	93	29	can	can	AUX
ap-1729	93	30	be	be	AUX
ap-1729	93	31	neglected	neglect	VERB
ap-1729	93	32	.	.	PUNCT
ap-1729	94	1	in	in	ADP
ap-1729	94	2	order	order	NOUN
ap-1729	94	3	to	to	PART
ap-1729	94	4	investigate	investigate	VERB
ap-1729	94	5	the	the	DET
ap-1729	94	6	mechanical	mechanical	ADJ
ap-1729	94	7	properties	property	NOUN
ap-1729	94	8	of	of	ADP
ap-1729	94	9	the	the	DET
ap-1729	94	10	coatings	coating	NOUN
ap-1729	94	11	,	,	PUNCT
ap-1729	94	12	scratch	scratch	NOUN
ap-1729	94	13	test	test	NOUN
ap-1729	94	14	measurements	measurement	NOUN
ap-1729	94	15	have	have	AUX
ap-1729	94	16	been	be	AUX
ap-1729	94	17	performed	perform	VERB
ap-1729	94	18	on	on	ADP
ap-1729	94	19	a	a	DET
ap-1729	94	20	-	-	PUNCT
ap-1729	94	21	b4c	b4c	NOUN
ap-1729	94	22	films	film	NOUN
ap-1729	94	23	grown	grow	VERB
ap-1729	94	24	on	on	ADP
ap-1729	94	25	bare	bare	ADJ
ap-1729	94	26	silicon	silicon	NOUN
ap-1729	94	27	and	and	CCONJ
ap-1729	94	28	on	on	ADP
ap-1729	94	29	400	400	NUM
ap-1729	94	30	nm	nm	NOUN
ap-1729	94	31	of	of	ADP
ap-1729	94	32	ti	ti	NOUN
ap-1729	94	33	-	-	NOUN
ap-1729	94	34	i	i	PRON
ap-1729	94	35	thickness	thickness	NOUN
ap-1729	94	36	.	.	PUNCT
ap-1729	95	1	the	the	DET
ap-1729	95	2	scratches	scratch	NOUN
ap-1729	95	3	were	be	AUX
ap-1729	95	4	performed	perform	VERB
ap-1729	95	5	by	by	ADP
ap-1729	95	6	progressive	progressive	ADJ
ap-1729	95	7	load	load	NOUN
ap-1729	95	8	scratch	scratch	NOUN
ap-1729	95	9	test	test	NOUN
ap-1729	95	10	(	(	PUNCT
ap-1729	95	11	plst	plst	PROPN
ap-1729	95	12	)	)	PUNCT
ap-1729	95	13	mode	mode	NOUN
ap-1729	95	14	in	in	ADP
ap-1729	95	15	which	which	PRON
ap-1729	95	16	the	the	DET
ap-1729	95	17	applied	apply	VERB
ap-1729	95	18	normal	normal	ADJ
ap-1729	95	19	load	load	NOUN
ap-1729	95	20	increases	increase	NOUN
ap-1729	95	21	linearly	linearly	ADV
ap-1729	95	22	with	with	ADP
ap-1729	95	23	time	time	NOUN
ap-1729	95	24	.	.	PUNCT
ap-1729	96	1	the	the	DET
ap-1729	96	2	slide	slide	NOUN
ap-1729	96	3	velocity	velocity	NOUN
ap-1729	96	4	of	of	ADP
ap-1729	96	5	the	the	DET
ap-1729	96	6	indenter	indenter	NOUN
ap-1729	96	7	and	and	CCONJ
ap-1729	96	8	the	the	DET
ap-1729	96	9	applied	apply	VERB
ap-1729	96	10	load	load	NOUN
ap-1729	96	11	were	be	AUX
ap-1729	96	12	fixed	fix	VERB
ap-1729	96	13	to	to	ADP
ap-1729	96	14	9.0mm	9.0mm	NUM
ap-1729	96	15	/	/	SYM
ap-1729	96	16	min	min	PROPN
ap-1729	96	17	and	and	CCONJ
ap-1729	96	18	9.0n	9.0n	NUM
ap-1729	96	19	/	/	SYM
ap-1729	96	20	min	min	NOUN
ap-1729	96	21	,	,	PUNCT
ap-1729	96	22	respectively	respectively	ADV
ap-1729	96	23	.	.	PUNCT
ap-1729	97	1	a	a	DET
ap-1729	97	2	comparison	comparison	NOUN
ap-1729	97	3	between	between	ADP
ap-1729	97	4	the	the	DET
ap-1729	97	5	two	two	NUM
ap-1729	97	6	scratch	scratch	NOUN
ap-1729	97	7	test	test	NOUN
ap-1729	97	8	clearly	clearly	ADV
ap-1729	97	9	shows	show	VERB
ap-1729	97	10	an	an	DET
ap-1729	97	11	increase	increase	NOUN
ap-1729	97	12	of	of	ADP
ap-1729	97	13	the	the	DET
ap-1729	97	14	adhesion	adhesion	NOUN
ap-1729	97	15	,	,	PUNCT
ap-1729	97	16	that	that	PRON
ap-1729	97	17	becomes	become	VERB
ap-1729	97	18	three	three	NUM
ap-1729	97	19	times	time	NOUN
ap-1729	97	20	stronger	strong	ADJ
ap-1729	97	21	in	in	ADP
ap-1729	97	22	the	the	DET
ap-1729	97	23	presence	presence	NOUN
ap-1729	97	24	of	of	ADP
ap-1729	97	25	ti	ti	NOUN
ap-1729	97	26	-	-	PROPN
ap-1729	97	27	i	i	PRON
ap-1729	97	28	,	,	PUNCT
ap-1729	97	29	thus	thus	ADV
ap-1729	97	30	changing	change	VERB
ap-1729	97	31	from	from	ADP
ap-1729	97	32	1.4n	1.4n	NUM
ap-1729	97	33	(	(	PUNCT
ap-1729	97	34	without	without	ADP
ap-1729	97	35	ti	ti	NOUN
ap-1729	97	36	-	-	NOUN
ap-1729	97	37	i	i	NOUN
ap-1729	97	38	)	)	PUNCT
ap-1729	97	39	to	to	ADP
ap-1729	97	40	5.1n	5.1n	NUM
ap-1729	97	41	(	(	PUNCT
ap-1729	97	42	with	with	ADP
ap-1729	97	43	ti	ti	NOUN
ap-1729	97	44	-	-	PROPN
ap-1729	97	45	i	i	NOUN
ap-1729	97	46	)	)	PUNCT
ap-1729	97	47	.	.	PUNCT
ap-1729	98	1	the	the	DET
ap-1729	98	2	destructive	destructive	ADJ
ap-1729	98	3	effect	effect	NOUN
ap-1729	98	4	generated	generate	VERB
ap-1729	98	5	by	by	ADP
ap-1729	98	6	the	the	DET
ap-1729	98	7	indenter	indenter	NOUN
ap-1729	98	8	while	while	SCONJ
ap-1729	98	9	scratching	scratch	VERB
ap-1729	98	10	along	along	ADP
ap-1729	98	11	the	the	DET
ap-1729	98	12	two	two	NUM
ap-1729	98	13	samples	sample	NOUN
ap-1729	98	14	is	be	AUX
ap-1729	98	15	shown	show	VERB
ap-1729	98	16	in	in	ADP
ap-1729	98	17	fig	fig	NOUN
ap-1729	98	18	.	.	PUNCT
ap-1729	99	1	4	4	NUM
ap-1729	99	2	.	.	X
ap-1729	99	3	4	4	NUM
ap-1729	99	4	.	.	X
ap-1729	99	5	conclusions	conclusion	NOUN
ap-1729	99	6	boron	boron	NOUN
ap-1729	99	7	carbide	carbide	NOUN
ap-1729	99	8	has	have	AUX
ap-1729	99	9	been	be	AUX
ap-1729	99	10	deposited	deposit	VERB
ap-1729	99	11	by	by	ADP
ap-1729	99	12	magnetron	magnetron	NOUN
ap-1729	99	13	sputtering	sputtering	NOUN
ap-1729	99	14	on	on	ADP
ap-1729	99	15	silicon	silicon	NOUN
ap-1729	99	16	substrate	substrate	NOUN
ap-1729	99	17	with	with	ADP
ap-1729	99	18	different	different	ADJ
ap-1729	99	19	titanium	titanium	NOUN
ap-1729	99	20	interlayer	interlayer	NOUN
ap-1729	99	21	thickness	thickness	NOUN
ap-1729	99	22	.	.	PUNCT
ap-1729	100	1	ti	ti	PROPN
ap-1729	100	2	thickness	thickness	NOUN
ap-1729	100	3	above	above	ADP
ap-1729	100	4	300	300	NUM
ap-1729	100	5	nm	nm	NOUN
ap-1729	100	6	leads	lead	VERB
ap-1729	100	7	to	to	ADP
ap-1729	100	8	the	the	DET
ap-1729	100	9	growth	growth	NOUN
ap-1729	100	10	of	of	ADP
ap-1729	100	11	a	a	DET
ap-1729	100	12	-	-	PUNCT
ap-1729	100	13	b4c	b4c	NOUN
ap-1729	100	14	with	with	ADP
ap-1729	100	15	a	a	DET
ap-1729	100	16	dense	dense	ADJ
ap-1729	100	17	and	and	CCONJ
ap-1729	100	18	continue	continue	VERB
ap-1729	100	19	columnar	columnar	ADJ
ap-1729	100	20	structure	structure	NOUN
ap-1729	100	21	.	.	PUNCT
ap-1729	101	1	in	in	ADP
ap-1729	101	2	this	this	DET
ap-1729	101	3	case	case	NOUN
ap-1729	101	4	,	,	PUNCT
ap-1729	101	5	no	no	DET
ap-1729	101	6	delamination	delamination	NOUN
ap-1729	101	7	125	125	NUM
ap-1729	101	8	roberto	roberto	PROPN
ap-1729	101	9	caniello	caniello	PROPN
ap-1729	101	10	et	et	PROPN
ap-1729	101	11	al	al	PROPN
ap-1729	101	12	.	.	PROPN
ap-1729	101	13	acta	acta	PROPN
ap-1729	101	14	polytechnica	polytechnica	PROPN
ap-1729	101	15	effects	effect	NOUN
ap-1729	101	16	were	be	AUX
ap-1729	101	17	found	find	VERB
ap-1729	101	18	.	.	PUNCT
ap-1729	102	1	correspondingly	correspondingly	ADV
ap-1729	102	2	,	,	PUNCT
ap-1729	102	3	scratch	scratch	NOUN
ap-1729	102	4	test	test	NOUN
ap-1729	102	5	measurements	measurement	NOUN
ap-1729	102	6	show	show	VERB
ap-1729	102	7	that	that	SCONJ
ap-1729	102	8	the	the	DET
ap-1729	102	9	adhesion	adhesion	NOUN
ap-1729	102	10	of	of	ADP
ap-1729	102	11	the	the	DET
ap-1729	102	12	a	a	DET
ap-1729	102	13	-	-	PUNCT
ap-1729	102	14	b4c	b4c	NOUN
ap-1729	102	15	coating	coating	NOUN
ap-1729	102	16	becomes	become	VERB
ap-1729	102	17	three	three	NUM
ap-1729	102	18	times	time	NOUN
ap-1729	102	19	stronger	strong	ADJ
ap-1729	102	20	.	.	PUNCT
ap-1729	103	1	we	we	PRON
ap-1729	103	2	attribute	attribute	VERB
ap-1729	103	3	this	this	DET
ap-1729	103	4	result	result	NOUN
ap-1729	103	5	to	to	ADP
ap-1729	103	6	the	the	DET
ap-1729	103	7	ti	ti	NOUN
ap-1729	103	8	-	-	PROPN
ap-1729	103	9	i	i	PRON
ap-1729	103	10	which	which	PRON
ap-1729	103	11	decreases	decrease	VERB
ap-1729	103	12	the	the	DET
ap-1729	103	13	internal	internal	ADJ
ap-1729	103	14	stress	stress	NOUN
ap-1729	103	15	at	at	ADP
ap-1729	103	16	the	the	DET
ap-1729	103	17	substrate	substrate	NOUN
ap-1729	103	18	-	-	PUNCT
ap-1729	103	19	film	film	NOUN
ap-1729	103	20	interface	interface	NOUN
ap-1729	103	21	.	.	PUNCT
ap-1729	104	1	this	this	DET
ap-1729	104	2	result	result	NOUN
ap-1729	104	3	is	be	AUX
ap-1729	104	4	connected	connect	VERB
ap-1729	104	5	to	to	ADP
ap-1729	104	6	the	the	DET
ap-1729	104	7	enhanced	enhanced	ADJ
ap-1729	104	8	roughness	roughness	NOUN
ap-1729	104	9	of	of	ADP
ap-1729	104	10	ti	ti	NOUN
ap-1729	104	11	-	-	PROPN
ap-1729	104	12	i	i	PRON
ap-1729	104	13	which	which	PRON
ap-1729	104	14	induces	induce	VERB
ap-1729	104	15	the	the	DET
ap-1729	104	16	growth	growth	NOUN
ap-1729	104	17	of	of	ADP
ap-1729	104	18	a	a	DET
ap-1729	104	19	dense	dense	ADJ
ap-1729	104	20	and	and	CCONJ
ap-1729	104	21	continue	continue	VERB
ap-1729	104	22	columnar	columnar	ADJ
ap-1729	104	23	structure	structure	NOUN
ap-1729	104	24	.	.	PUNCT
ap-1729	105	1	references	reference	NOUN
ap-1729	105	2	[	[	X
ap-1729	105	3	1	1	NUM
ap-1729	105	4	]	]	PUNCT
ap-1729	105	5	a.	a.	NOUN
ap-1729	105	6	annen	annen	PROPN
ap-1729	105	7	,	,	PUNCT
ap-1729	105	8	et	et	PROPN
ap-1729	105	9	al	al	PROPN
ap-1729	105	10	.	.	PUNCT
ap-1729	105	11	structure	structure	NOUN
ap-1729	105	12	of	of	ADP
ap-1729	105	13	plasma	plasma	NOUN
ap-1729	105	14	-	-	PUNCT
ap-1729	105	15	deposited	deposit	VERB
ap-1729	105	16	amorphous	amorphous	ADJ
ap-1729	105	17	hydrogenated	hydrogenate	VERB
ap-1729	105	18	boron	boron	NOUN
ap-1729	105	19	-	-	PUNCT
ap-1729	105	20	carbon	carbon	NOUN
ap-1729	105	21	thin	thin	ADJ
ap-1729	105	22	films	film	NOUN
ap-1729	105	23	.	.	PUNCT
ap-1729	106	1	thin	thin	ADJ
ap-1729	106	2	solid	solid	ADJ
ap-1729	106	3	films	film	NOUN
ap-1729	106	4	312(1–2):147–155	312(1–2):147–155	NUM
ap-1729	106	5	,	,	PUNCT
ap-1729	106	6	1998	1998	NUM
ap-1729	106	7	.	.	PUNCT
ap-1729	107	1	[	[	X
ap-1729	107	2	2	2	X
ap-1729	107	3	]	]	PUNCT
ap-1729	107	4	j.	j.	PROPN
ap-1729	107	5	c.	c.	PROPN
ap-1729	107	6	avelar	avelar	PROPN
ap-1729	107	7	-	-	PUNCT
ap-1729	107	8	batista	batista	PROPN
ap-1729	107	9	,	,	PUNCT
ap-1729	107	10	et	et	PROPN
ap-1729	107	11	al	al	PROPN
ap-1729	107	12	.	.	PUNCT
ap-1729	108	1	x	x	X
ap-1729	108	2	-	-	PUNCT
ap-1729	108	3	ray	ray	NOUN
ap-1729	108	4	diffraction	diffraction	NOUN
ap-1729	108	5	analyses	analysis	NOUN
ap-1729	108	6	of	of	ADP
ap-1729	108	7	titanium	titanium	NOUN
ap-1729	108	8	coatings	coating	NOUN
ap-1729	108	9	produced	produce	VERB
ap-1729	108	10	by	by	ADP
ap-1729	108	11	electron	electron	NOUN
ap-1729	108	12	beam	beam	NOUN
ap-1729	108	13	evaporation	evaporation	NOUN
ap-1729	108	14	in	in	ADP
ap-1729	108	15	neon	neon	NOUN
ap-1729	108	16	and	and	CCONJ
ap-1729	108	17	argon	argon	NOUN
ap-1729	108	18	inert	inert	NOUN
ap-1729	108	19	gases	gas	NOUN
ap-1729	108	20	.	.	PUNCT
ap-1729	109	1	journal	journal	NOUN
ap-1729	109	2	of	of	ADP
ap-1729	109	3	vacuum	vacuum	PROPN
ap-1729	109	4	science	science	NOUN
ap-1729	109	5	and	and	CCONJ
ap-1729	109	6	technology	technology	NOUN
ap-1729	109	7	a	a	DET
ap-1729	109	8	21(5):1702–1707	21(5):1702–1707	NUM
ap-1729	109	9	,	,	PUNCT
ap-1729	109	10	2003	2003	NUM
ap-1729	109	11	.	.	PUNCT
ap-1729	110	1	[	[	X
ap-1729	110	2	3	3	X
ap-1729	110	3	]	]	X
ap-1729	110	4	p.	p.	NOUN
ap-1729	110	5	bai	bai	PROPN
ap-1729	110	6	,	,	PUNCT
ap-1729	110	7	et	et	PROPN
ap-1729	110	8	al	al	PROPN
ap-1729	110	9	.	.	PROPN
ap-1729	110	10	effect	effect	NOUN
ap-1729	110	11	of	of	ADP
ap-1729	110	12	substrate	substrate	NOUN
ap-1729	110	13	surface	surface	NOUN
ap-1729	110	14	roughness	roughness	NOUN
ap-1729	110	15	on	on	ADP
ap-1729	110	16	the	the	DET
ap-1729	110	17	columnar	columnar	ADJ
ap-1729	110	18	growth	growth	NOUN
ap-1729	110	19	of	of	ADP
ap-1729	110	20	cu	cu	PROPN
ap-1729	110	21	films	film	NOUN
ap-1729	110	22	.	.	PUNCT
ap-1729	111	1	journal	journal	NOUN
ap-1729	111	2	of	of	ADP
ap-1729	111	3	vacuum	vacuum	PROPN
ap-1729	111	4	science	science	NOUN
ap-1729	111	5	and	and	CCONJ
ap-1729	111	6	technology	technology	NOUN
ap-1729	111	7	a	a	DET
ap-1729	111	8	9(4):2113–2117	9(4):2113–2117	NOUN
ap-1729	111	9	,	,	PUNCT
ap-1729	111	10	1991	1991	NUM
ap-1729	111	11	.	.	PUNCT
ap-1729	112	1	[	[	X
ap-1729	112	2	4	4	X
ap-1729	112	3	]	]	X
ap-1729	112	4	g.	g.	PROPN
ap-1729	112	5	m.	m.	PROPN
ap-1729	112	6	blumenstock	blumenstock	PROPN
ap-1729	112	7	,	,	PUNCT
ap-1729	112	8	r.	r.	PROPN
ap-1729	112	9	a.	a.	PROPN
ap-1729	112	10	m.	m.	PROPN
ap-1729	112	11	keski	keski	PROPN
ap-1729	112	12	-	-	PUNCT
ap-1729	112	13	kuha	kuha	NOUN
ap-1729	112	14	.	.	PUNCT
ap-1729	112	15	ion	ion	NOUN
ap-1729	112	16	beam	beam	NOUN
ap-1729	112	17	deposited	deposit	VERB
ap-1729	112	18	boron	boron	NOUN
ap-1729	112	19	carbide	carbide	NOUN
ap-1729	112	20	coatings	coating	NOUN
ap-1729	112	21	for	for	ADP
ap-1729	112	22	the	the	DET
ap-1729	112	23	euv	euv	PROPN
ap-1729	112	24	.	.	PUNCT
ap-1729	113	1	applied	apply	VERB
ap-1729	113	2	optics	optic	NOUN
ap-1729	113	3	33(25):5962–5963	33(25):5962–5963	NUM
ap-1729	113	4	,	,	PUNCT
ap-1729	113	5	1994	1994	NUM
ap-1729	113	6	.	.	PUNCT
ap-1729	114	1	[	[	X
ap-1729	114	2	5	5	X
ap-1729	114	3	]	]	PUNCT
ap-1729	114	4	j.	j.	PROPN
ap-1729	114	5	s.	s.	PROPN
ap-1729	114	6	chapin	chapin	PROPN
ap-1729	114	7	.	.	PUNCT
ap-1729	115	1	the	the	DET
ap-1729	115	2	planar	planar	ADJ
ap-1729	115	3	magnetron	magnetron	NOUN
ap-1729	115	4	(	(	PUNCT
ap-1729	115	5	sputtering	sputter	VERB
ap-1729	115	6	source	source	NOUN
ap-1729	115	7	)	)	PUNCT
ap-1729	115	8	.	.	PUNCT
ap-1729	116	1	research	research	NOUN
ap-1729	116	2	development	development	NOUN
ap-1729	116	3	25:37–40	25:37–40	NUM
ap-1729	116	4	,	,	PUNCT
ap-1729	116	5	1974	1974	NUM
ap-1729	116	6	.	.	PUNCT
ap-1729	117	1	[	[	X
ap-1729	117	2	6	6	NUM
ap-1729	117	3	]	]	PUNCT
ap-1729	117	4	s.	s.	PROPN
ap-1729	117	5	v.	v.	PROPN
ap-1729	117	6	deshpande	deshpande	PROPN
ap-1729	117	7	,	,	PUNCT
ap-1729	117	8	et	et	PROPN
ap-1729	117	9	al	al	PROPN
ap-1729	117	10	.	.	PROPN
ap-1729	117	11	filament	filament	PROPN
ap-1729	117	12	activated	activate	VERB
ap-1729	117	13	chemical	chemical	NOUN
ap-1729	117	14	vapor	vapor	NOUN
ap-1729	117	15	deposition	deposition	NOUN
ap-1729	117	16	of	of	ADP
ap-1729	117	17	boron	boron	NOUN
ap-1729	117	18	carbide	carbide	NOUN
ap-1729	117	19	coatings	coating	NOUN
ap-1729	117	20	.	.	PUNCT
ap-1729	118	1	applied	apply	VERB
ap-1729	118	2	physics	physics	NOUN
ap-1729	118	3	letters	letter	NOUN
ap-1729	118	4	65(14):1757–1759	65(14):1757–1759	NUM
ap-1729	118	5	,	,	PUNCT
ap-1729	118	6	1994	1994	NUM
ap-1729	118	7	.	.	PUNCT
ap-1729	119	1	[	[	X
ap-1729	119	2	7	7	X
ap-1729	119	3	]	]	X
ap-1729	119	4	r.	r.	PROPN
ap-1729	119	5	gago	gago	PROPN
ap-1729	119	6	,	,	PUNCT
ap-1729	119	7	et	et	PROPN
ap-1729	119	8	al	al	PROPN
ap-1729	119	9	.	.	PUNCT
ap-1729	119	10	boron	boron	NOUN
ap-1729	119	11	-	-	PUNCT
ap-1729	119	12	carbon	carbon	NOUN
ap-1729	119	13	-	-	PUNCT
ap-1729	119	14	nitrogen	nitrogen	NOUN
ap-1729	119	15	compounds	compound	NOUN
ap-1729	119	16	grown	grow	VERB
ap-1729	119	17	by	by	ADP
ap-1729	119	18	ion	ion	NOUN
ap-1729	119	19	beam	beam	NOUN
ap-1729	119	20	assisted	assist	VERB
ap-1729	119	21	evaporation	evaporation	NOUN
ap-1729	119	22	.	.	PUNCT
ap-1729	120	1	thin	thin	ADJ
ap-1729	120	2	solid	solid	ADJ
ap-1729	120	3	films	film	NOUN
ap-1729	120	4	373(1–2):277–281	373(1–2):277–281	NUM
ap-1729	120	5	,	,	PUNCT
ap-1729	120	6	2000	2000	NUM
ap-1729	120	7	.	.	PUNCT
ap-1729	121	1	[	[	X
ap-1729	121	2	8	8	NUM
ap-1729	121	3	]	]	PUNCT
ap-1729	121	4	z.	z.	PROPN
ap-1729	121	5	han	han	PROPN
ap-1729	121	6	,	,	PUNCT
ap-1729	121	7	g.	g.	PROPN
ap-1729	121	8	li	li	PROPN
ap-1729	121	9	,	,	PUNCT
ap-1729	121	10	j.	j.	PROPN
ap-1729	121	11	tian	tian	PROPN
ap-1729	121	12	,	,	PUNCT
ap-1729	121	13	m.	m.	NOUN
ap-1729	121	14	gu	gu	PROPN
ap-1729	121	15	.	.	PUNCT
ap-1729	121	16	microstructure	microstructure	ADJ
ap-1729	121	17	and	and	CCONJ
ap-1729	121	18	mechanical	mechanical	ADJ
ap-1729	121	19	properties	property	NOUN
ap-1729	121	20	of	of	ADP
ap-1729	121	21	boron	boron	NOUN
ap-1729	121	22	carbide	carbide	VERB
ap-1729	121	23	thin	thin	ADJ
ap-1729	121	24	films	film	NOUN
ap-1729	121	25	.	.	PUNCT
ap-1729	122	1	materials	material	NOUN
ap-1729	122	2	letters	letter	NOUN
ap-1729	122	3	57(4):899–903	57(4):899–903	PROPN
ap-1729	122	4	,	,	PUNCT
ap-1729	122	5	2002	2002	NUM
ap-1729	122	6	.	.	PUNCT
ap-1729	123	1	[	[	X
ap-1729	123	2	9	9	NUM
ap-1729	123	3	]	]	PUNCT
ap-1729	123	4	t.	t.	PROPN
ap-1729	123	5	hu	hu	PROPN
ap-1729	123	6	,	,	PUNCT
ap-1729	123	7	et	et	PROPN
ap-1729	123	8	al	al	PROPN
ap-1729	123	9	.	.	PROPN
ap-1729	123	10	structures	structure	NOUN
ap-1729	123	11	and	and	CCONJ
ap-1729	123	12	properties	property	NOUN
ap-1729	123	13	of	of	ADP
ap-1729	123	14	disordered	disordered	ADJ
ap-1729	123	15	boron	boron	NOUN
ap-1729	123	16	carbide	carbide	NOUN
ap-1729	123	17	coatings	coating	NOUN
ap-1729	123	18	generated	generate	VERB
ap-1729	123	19	by	by	ADP
ap-1729	123	20	magnetron	magnetron	NOUN
ap-1729	123	21	sputtering	sputtering	NOUN
ap-1729	123	22	.	.	PUNCT
ap-1729	124	1	thin	thin	ADJ
ap-1729	124	2	solid	solid	ADJ
ap-1729	124	3	films	film	NOUN
ap-1729	124	4	332(1–2):80–86	332(1–2):80–86	NUM
ap-1729	124	5	,	,	PUNCT
ap-1729	124	6	1998	1998	NUM
ap-1729	124	7	.	.	PUNCT
ap-1729	125	1	[	[	X
ap-1729	125	2	10	10	NUM
ap-1729	125	3	]	]	X
ap-1729	125	4	j.-h	j.-h	NOUN
ap-1729	125	5	.	.	PUNCT
ap-1729	126	1	huang	huang	PROPN
ap-1729	126	2	,	,	PUNCT
ap-1729	126	3	et	et	PROPN
ap-1729	126	4	al	al	PROPN
ap-1729	126	5	.	.	PROPN
ap-1729	126	6	effect	effect	NOUN
ap-1729	126	7	of	of	ADP
ap-1729	126	8	ti	ti	PROPN
ap-1729	126	9	interlayer	interlayer	NOUN
ap-1729	126	10	on	on	ADP
ap-1729	126	11	the	the	DET
ap-1729	126	12	residual	residual	ADJ
ap-1729	126	13	stress	stress	NOUN
ap-1729	126	14	and	and	CCONJ
ap-1729	126	15	texture	texture	ADJ
ap-1729	126	16	development	development	NOUN
ap-1729	126	17	of	of	ADP
ap-1729	126	18	tin	tin	NOUN
ap-1729	126	19	thin	thin	ADJ
ap-1729	126	20	films	film	NOUN
ap-1729	126	21	.	.	PUNCT
ap-1729	127	1	surface	surface	NOUN
ap-1729	127	2	and	and	CCONJ
ap-1729	127	3	coatings	coating	NOUN
ap-1729	127	4	technology	technology	NOUN
ap-1729	127	5	200(20–21):5937–5945	200(20–21):5937–5945	NUM
ap-1729	127	6	,	,	PUNCT
ap-1729	127	7	2006	2006	NUM
ap-1729	127	8	.	.	PUNCT
ap-1729	128	1	[	[	X
ap-1729	128	2	11	11	NUM
ap-1729	128	3	]	]	X
ap-1729	128	4	c.	c.	PROPN
ap-1729	128	5	c.	c.	PROPN
ap-1729	128	6	klepper	klepper	PROPN
ap-1729	128	7	,	,	PUNCT
ap-1729	128	8	et	et	PROPN
ap-1729	129	1	al	al	PROPN
ap-1729	129	2	.	.	PROPN
ap-1729	129	3	amorphous	amorphous	ADJ
ap-1729	129	4	boron	boron	NOUN
ap-1729	129	5	coatings	coating	NOUN
ap-1729	129	6	produced	produce	VERB
ap-1729	129	7	with	with	ADP
ap-1729	129	8	vacuum	vacuum	NOUN
ap-1729	129	9	arc	arc	NOUN
ap-1729	129	10	deposition	deposition	NOUN
ap-1729	129	11	technology	technology	NOUN
ap-1729	129	12	.	.	PUNCT
ap-1729	130	1	journal	journal	PROPN
ap-1729	130	2	of	of	ADP
ap-1729	130	3	vacuum	vacuum	PROPN
ap-1729	130	4	science	science	NOUN
ap-1729	130	5	and	and	CCONJ
ap-1729	130	6	technology	technology	NOUN
ap-1729	130	7	a	a	DET
ap-1729	130	8	20(3):725–732	20(3):725–732	PROPN
ap-1729	130	9	,	,	PUNCT
ap-1729	130	10	2002	2002	NUM
ap-1729	130	11	.	.	PUNCT
ap-1729	131	1	[	[	X
ap-1729	131	2	12	12	NUM
ap-1729	131	3	]	]	PUNCT
ap-1729	131	4	m.	m.	PROPN
ap-1729	131	5	d.	d.	PROPN
ap-1729	131	6	kriese	kriese	PROPN
ap-1729	131	7	,	,	PUNCT
ap-1729	131	8	et	et	PROPN
ap-1729	131	9	al	al	PROPN
ap-1729	131	10	.	.	PUNCT
ap-1729	131	11	effects	effect	NOUN
ap-1729	131	12	of	of	ADP
ap-1729	131	13	annealing	annealing	NOUN
ap-1729	131	14	and	and	CCONJ
ap-1729	131	15	interlayers	interlayer	NOUN
ap-1729	131	16	on	on	ADP
ap-1729	131	17	the	the	DET
ap-1729	131	18	adhesion	adhesion	NOUN
ap-1729	131	19	energy	energy	NOUN
ap-1729	131	20	of	of	ADP
ap-1729	131	21	copper	copper	NOUN
ap-1729	131	22	thin	thin	ADJ
ap-1729	131	23	films	film	NOUN
ap-1729	131	24	to	to	ADP
ap-1729	131	25	sio2	sio2	PROPN
ap-1729	131	26	/	/	SYM
ap-1729	131	27	si	si	NOUN
ap-1729	131	28	substrates	substrate	NOUN
ap-1729	131	29	.	.	PUNCT
ap-1729	132	1	acta	acta	PROPN
ap-1729	132	2	materialia	materialia	PROPN
ap-1729	132	3	46(18):6623–6630	46(18):6623–6630	PROPN
ap-1729	132	4	,	,	PUNCT
ap-1729	132	5	1998	1998	NUM
ap-1729	132	6	.	.	PUNCT
ap-1729	133	1	[	[	X
ap-1729	133	2	13	13	NUM
ap-1729	133	3	]	]	X
ap-1729	133	4	v.	v.	NOUN
ap-1729	133	5	kulikovsky	kulikovsky	NOUN
ap-1729	133	6	,	,	PUNCT
ap-1729	133	7	et	et	PROPN
ap-1729	133	8	al	al	PROPN
ap-1729	133	9	.	.	PROPN
ap-1729	133	10	effect	effect	NOUN
ap-1729	133	11	of	of	ADP
ap-1729	133	12	air	air	NOUN
ap-1729	133	13	annealing	annealing	NOUN
ap-1729	133	14	on	on	ADP
ap-1729	133	15	mechanical	mechanical	ADJ
ap-1729	133	16	properties	property	NOUN
ap-1729	133	17	and	and	CCONJ
ap-1729	133	18	structure	structure	NOUN
ap-1729	133	19	of	of	ADP
ap-1729	133	20	amorphous	amorphous	ADJ
ap-1729	133	21	b4c	b4c	NOUN
ap-1729	133	22	.	.	PUNCT
ap-1729	134	1	surface	surface	NOUN
ap-1729	134	2	and	and	CCONJ
ap-1729	134	3	coatings	coating	NOUN
ap-1729	134	4	technology	technology	NOUN
ap-1729	134	5	205(205):4052–4057	205(205):4052–4057	NUM
ap-1729	134	6	,	,	PUNCT
ap-1729	134	7	2011	2011	NUM
ap-1729	134	8	.	.	PUNCT
ap-1729	135	1	[	[	X
ap-1729	135	2	14	14	NUM
ap-1729	135	3	]	]	X
ap-1729	135	4	n.	n.	PROPN
ap-1729	135	5	kuratani	kuratani	PROPN
ap-1729	135	6	,	,	PUNCT
ap-1729	135	7	et	et	PROPN
ap-1729	135	8	al	al	PROPN
ap-1729	135	9	.	.	PUNCT
ap-1729	136	1	internal	internal	ADJ
ap-1729	136	2	stress	stress	NOUN
ap-1729	136	3	in	in	ADP
ap-1729	136	4	thin	thin	ADJ
ap-1729	136	5	films	film	NOUN
ap-1729	136	6	prepared	prepare	VERB
ap-1729	136	7	by	by	ADP
ap-1729	136	8	ion	ion	NOUN
ap-1729	136	9	beam	beam	NOUN
ap-1729	136	10	and	and	CCONJ
ap-1729	136	11	vapor	vapor	NOUN
ap-1729	136	12	deposition	deposition	NOUN
ap-1729	136	13	.	.	PUNCT
ap-1729	137	1	surface	surface	NOUN
ap-1729	137	2	and	and	CCONJ
ap-1729	137	3	coatings	coating	NOUN
ap-1729	137	4	technology	technology	NOUN
ap-1729	137	5	66(1–3):310–312	66(1–3):310–312	NOUN
ap-1729	137	6	,	,	PUNCT
ap-1729	137	7	1994	1994	NUM
ap-1729	137	8	.	.	PUNCT
ap-1729	138	1	[	[	X
ap-1729	138	2	15	15	NUM
ap-1729	138	3	]	]	X
ap-1729	138	4	s.	s.	PROPN
ap-1729	138	5	lichter	lichter	PROPN
ap-1729	138	6	,	,	PUNCT
ap-1729	138	7	j.	j.	PROPN
ap-1729	138	8	chen	chen	PROPN
ap-1729	138	9	.	.	PUNCT
ap-1729	138	10	model	model	PROPN
ap-1729	138	11	for	for	ADP
ap-1729	138	12	columnar	columnar	ADJ
ap-1729	138	13	microstructure	microstructure	NOUN
ap-1729	138	14	of	of	ADP
ap-1729	138	15	thin	thin	ADJ
ap-1729	138	16	solid	solid	ADJ
ap-1729	138	17	films	film	NOUN
ap-1729	138	18	.	.	PUNCT
ap-1729	139	1	physical	physical	ADJ
ap-1729	139	2	review	review	NOUN
ap-1729	139	3	letters	letter	VERB
ap-1729	139	4	56(13):1396–1399	56(13):1396–1399	NUM
ap-1729	139	5	,	,	PUNCT
ap-1729	139	6	1986	1986	NUM
ap-1729	139	7	.	.	PUNCT
ap-1729	140	1	[	[	X
ap-1729	140	2	16	16	NUM
ap-1729	140	3	]	]	PUNCT
ap-1729	140	4	a.	a.	NOUN
ap-1729	140	5	mazor	mazor	PROPN
ap-1729	140	6	,	,	PUNCT
ap-1729	140	7	et	et	PROPN
ap-1729	140	8	al	al	PROPN
ap-1729	140	9	.	.	PROPN
ap-1729	140	10	columnar	columnar	ADJ
ap-1729	140	11	growth	growth	NOUN
ap-1729	140	12	in	in	ADP
ap-1729	140	13	thin	thin	ADJ
ap-1729	140	14	films	film	NOUN
ap-1729	140	15	.	.	PUNCT
ap-1729	141	1	physical	physical	ADJ
ap-1729	141	2	review	review	NOUN
ap-1729	141	3	letters	letter	VERB
ap-1729	141	4	60(5):424–428	60(5):424–428	NUM
ap-1729	141	5	,	,	PUNCT
ap-1729	141	6	1988	1988	NUM
ap-1729	141	7	.	.	PUNCT
ap-1729	142	1	[	[	X
ap-1729	142	2	17	17	NUM
ap-1729	142	3	]	]	X
ap-1729	142	4	d.	d.	PROPN
ap-1729	142	5	s.	s.	PROPN
ap-1729	142	6	mcgregor	mcgregor	PROPN
ap-1729	142	7	,	,	PUNCT
ap-1729	142	8	et	et	PROPN
ap-1729	142	9	al	al	PROPN
ap-1729	142	10	.	.	PUNCT
ap-1729	142	11	new	new	ADJ
ap-1729	142	12	surface	surface	NOUN
ap-1729	142	13	morphology	morphology	NOUN
ap-1729	142	14	for	for	ADP
ap-1729	142	15	low	low	ADJ
ap-1729	142	16	stress	stress	NOUN
ap-1729	142	17	thin	thin	ADJ
ap-1729	142	18	-	-	PUNCT
ap-1729	142	19	film	film	NOUN
ap-1729	142	20	-	-	PUNCT
ap-1729	142	21	coated	coat	VERB
ap-1729	142	22	thermal	thermal	ADJ
ap-1729	142	23	neutron	neutron	NOUN
ap-1729	142	24	detectors	detector	NOUN
ap-1729	142	25	.	.	PUNCT
ap-1729	143	1	ieee	ieee	NOUN
ap-1729	143	2	transactions	transaction	NOUN
ap-1729	143	3	on	on	ADP
ap-1729	143	4	nuclear	nuclear	ADJ
ap-1729	143	5	science	science	NOUN
ap-1729	143	6	49(4):1999–2004	49(4):1999–2004	NUM
ap-1729	143	7	,	,	PUNCT
ap-1729	143	8	2002	2002	NUM
ap-1729	143	9	.	.	PUNCT
ap-1729	144	1	[	[	X
ap-1729	144	2	18	18	NUM
ap-1729	144	3	]	]	X
ap-1729	144	4	e.	e.	PROPN
ap-1729	144	5	pascual	pascual	PROPN
ap-1729	144	6	,	,	PUNCT
ap-1729	144	7	e.	e.	PROPN
ap-1729	144	8	martinez	martinez	PROPN
ap-1729	144	9	,	,	PUNCT
ap-1729	144	10	j.	j.	PROPN
ap-1729	144	11	esteve	esteve	PROPN
ap-1729	144	12	,	,	PUNCT
ap-1729	144	13	a.	a.	NOUN
ap-1729	144	14	lousa	lousa	PROPN
ap-1729	144	15	.	.	PUNCT
ap-1729	145	1	boron	boron	NOUN
ap-1729	145	2	carbide	carbide	NOUN
ap-1729	145	3	thin	thin	ADJ
ap-1729	145	4	films	film	NOUN
ap-1729	145	5	deposited	deposit	VERB
ap-1729	145	6	by	by	ADP
ap-1729	145	7	tuned	tune	VERB
ap-1729	145	8	-	-	PUNCT
ap-1729	145	9	substrate	substrate	NOUN
ap-1729	145	10	rf	rf	NOUN
ap-1729	145	11	magnetron	magnetron	NOUN
ap-1729	145	12	sputtering	sputtering	NOUN
ap-1729	145	13	.	.	PUNCT
ap-1729	146	1	diamond	diamond	NOUN
ap-1729	146	2	and	and	CCONJ
ap-1729	146	3	related	related	ADJ
ap-1729	146	4	materials	material	NOUN
ap-1729	146	5	8(2–5):402–405	8(2–5):402–405	NOUN
ap-1729	146	6	,	,	PUNCT
ap-1729	146	7	1999	1999	NUM
ap-1729	146	8	.	.	PUNCT
ap-1729	147	1	[	[	X
ap-1729	147	2	19	19	NUM
ap-1729	147	3	]	]	PUNCT
ap-1729	147	4	k.	k.	PROPN
ap-1729	147	5	a.	a.	PROPN
ap-1729	147	6	pischow	pischow	PROPN
ap-1729	147	7	,	,	PUNCT
ap-1729	147	8	et	et	PROPN
ap-1729	147	9	al	al	PROPN
ap-1729	147	10	.	.	PUNCT
ap-1729	148	1	the	the	DET
ap-1729	148	2	influence	influence	NOUN
ap-1729	148	3	of	of	ADP
ap-1729	148	4	titanium	titanium	NOUN
ap-1729	148	5	interlayers	interlayer	NOUN
ap-1729	148	6	on	on	ADP
ap-1729	148	7	the	the	DET
ap-1729	148	8	adhesion	adhesion	NOUN
ap-1729	148	9	of	of	ADP
ap-1729	148	10	pvd	pvd	PROPN
ap-1729	148	11	tin	tin	NOUN
ap-1729	148	12	coatings	coating	NOUN
ap-1729	148	13	on	on	ADP
ap-1729	148	14	oxidized	oxidize	VERB
ap-1729	148	15	stainless	stainless	ADJ
ap-1729	148	16	steel	steel	NOUN
ap-1729	148	17	substrates	substrate	NOUN
ap-1729	148	18	.	.	PUNCT
ap-1729	149	1	surface	surface	NOUN
ap-1729	149	2	and	and	CCONJ
ap-1729	149	3	coatings	coating	NOUN
ap-1729	149	4	technology	technology	NOUN
ap-1729	149	5	58(3):163–172	58(3):163–172	NOUN
ap-1729	149	6	,	,	PUNCT
ap-1729	149	7	1993	1993	NUM
ap-1729	149	8	.	.	PUNCT
ap-1729	150	1	[	[	X
ap-1729	150	2	20	20	NUM
ap-1729	150	3	]	]	PUNCT
ap-1729	150	4	s.	s.	PROPN
ap-1729	150	5	w.	w.	PROPN
ap-1729	150	6	russell	russell	PROPN
ap-1729	150	7	,	,	PUNCT
ap-1729	150	8	et	et	PROPN
ap-1729	150	9	al	al	PROPN
ap-1729	150	10	.	.	PROPN
ap-1729	150	11	enhanced	enhance	VERB
ap-1729	150	12	adhesion	adhesion	NOUN
ap-1729	150	13	of	of	ADP
ap-1729	150	14	copper	copper	NOUN
ap-1729	150	15	to	to	ADP
ap-1729	150	16	dielectrics	dielectric	NOUN
ap-1729	150	17	via	via	ADP
ap-1729	150	18	titanium	titanium	NOUN
ap-1729	150	19	and	and	CCONJ
ap-1729	150	20	chromium	chromium	NOUN
ap-1729	150	21	additions	addition	NOUN
ap-1729	150	22	and	and	CCONJ
ap-1729	150	23	sacrificial	sacrificial	ADJ
ap-1729	150	24	reactions	reaction	NOUN
ap-1729	150	25	.	.	PUNCT
ap-1729	151	1	thin	thin	ADJ
ap-1729	151	2	solid	solid	ADJ
ap-1729	151	3	films	film	NOUN
ap-1729	151	4	262(1–2):154–167	262(1–2):154–167	NUM
ap-1729	151	5	,	,	PUNCT
ap-1729	151	6	1995	1995	NUM
ap-1729	151	7	.	.	PUNCT
ap-1729	152	1	[	[	X
ap-1729	152	2	21	21	NUM
ap-1729	152	3	]	]	PUNCT
ap-1729	152	4	a.	a.	PROPN
ap-1729	152	5	z.	z.	PROPN
ap-1729	152	6	sadek	sadek	PROPN
ap-1729	152	7	,	,	PUNCT
ap-1729	152	8	et	et	PROPN
ap-1729	152	9	al	al	PROPN
ap-1729	152	10	.	.	PROPN
ap-1729	152	11	anodization	anodization	NOUN
ap-1729	152	12	of	of	ADP
ap-1729	152	13	ti	ti	PROPN
ap-1729	152	14	thin	thin	ADJ
ap-1729	152	15	film	film	NOUN
ap-1729	152	16	deposited	deposit	VERB
ap-1729	152	17	on	on	ADP
ap-1729	152	18	ito	ito	PROPN
ap-1729	152	19	.	.	PROPN
ap-1729	152	20	langmuir	langmuir	PROPN
ap-1729	152	21	25(1):509–514	25(1):509–514	PROPN
ap-1729	152	22	,	,	PUNCT
ap-1729	152	23	2009	2009	NUM
ap-1729	152	24	.	.	PUNCT
ap-1729	153	1	[	[	X
ap-1729	153	2	22	22	NUM
ap-1729	153	3	]	]	X
ap-1729	153	4	s.	s.	PROPN
ap-1729	153	5	ulrich	ulrich	PROPN
ap-1729	153	6	,	,	PUNCT
ap-1729	153	7	et	et	PROPN
ap-1729	153	8	al	al	PROPN
ap-1729	153	9	.	.	PROPN
ap-1729	153	10	subplantation	subplantation	NOUN
ap-1729	153	11	effect	effect	NOUN
ap-1729	153	12	in	in	ADP
ap-1729	153	13	magnetron	magnetron	NOUN
ap-1729	153	14	sputtered	sputter	VERB
ap-1729	153	15	superhard	superhard	NOUN
ap-1729	153	16	boron	boron	NOUN
ap-1729	153	17	carbide	carbide	VERB
ap-1729	153	18	thin	thin	ADJ
ap-1729	153	19	films	film	NOUN
ap-1729	153	20	.	.	PUNCT
ap-1729	154	1	diamond	diamond	NOUN
ap-1729	154	2	and	and	CCONJ
ap-1729	154	3	related	related	ADJ
ap-1729	154	4	materials	material	NOUN
ap-1729	154	5	7(6):835–838	7(6):835–838	NOUN
ap-1729	154	6	,	,	PUNCT
ap-1729	154	7	1998	1998	NUM
ap-1729	154	8	.	.	PUNCT
ap-1729	155	1	[	[	X
ap-1729	155	2	23	23	NUM
ap-1729	155	3	]	]	PUNCT
ap-1729	155	4	e.	e.	PROPN
ap-1729	155	5	vassallo	vassallo	PROPN
ap-1729	155	6	,	,	PUNCT
ap-1729	155	7	et	et	PROPN
ap-1729	155	8	al	al	PROPN
ap-1729	155	9	.	.	PUNCT
ap-1729	155	10	deposition	deposition	NOUN
ap-1729	155	11	of	of	ADP
ap-1729	155	12	boron	boron	NOUN
ap-1729	155	13	-	-	PUNCT
ap-1729	155	14	carbon	carbon	NOUN
ap-1729	155	15	multilayer	multilayer	ADJ
ap-1729	155	16	coatings	coating	NOUN
ap-1729	155	17	by	by	ADP
ap-1729	155	18	rf	rf	NOUN
ap-1729	155	19	plasma	plasma	NOUN
ap-1729	155	20	sputtering	sputtering	NOUN
ap-1729	155	21	.	.	PUNCT
ap-1729	156	1	surface	surface	NOUN
ap-1729	156	2	and	and	CCONJ
ap-1729	156	3	coatings	coating	NOUN
ap-1729	156	4	technology	technology	NOUN
ap-1729	156	5	214:59–62	214:59–62	NUM
ap-1729	156	6	,	,	PUNCT
ap-1729	156	7	2013	2013	NUM
ap-1729	156	8	.	.	PUNCT
ap-1729	157	1	[	[	X
ap-1729	157	2	24	24	NUM
ap-1729	157	3	]	]	X
ap-1729	157	4	h.	h.	NOUN
ap-1729	157	5	werheit	werheit	PROPN
ap-1729	157	6	.	.	PUNCT
ap-1729	158	1	thermoelectric	thermoelectric	ADJ
ap-1729	158	2	properties	property	NOUN
ap-1729	158	3	of	of	ADP
ap-1729	158	4	boron	boron	NOUN
ap-1729	158	5	-	-	PUNCT
ap-1729	158	6	rich	rich	ADJ
ap-1729	158	7	solids	solid	NOUN
ap-1729	158	8	and	and	CCONJ
ap-1729	158	9	their	their	PRON
ap-1729	158	10	possibilities	possibility	NOUN
ap-1729	158	11	of	of	ADP
ap-1729	158	12	technical	technical	ADJ
ap-1729	158	13	apllication	apllication	NOUN
ap-1729	158	14	.	.	PUNCT
ap-1729	159	1	in	in	ADP
ap-1729	159	2	ieee	ieee	PROPN
ap-1729	159	3	,	,	PUNCT
ap-1729	159	4	international	international	ADJ
ap-1729	159	5	conference	conference	NOUN
ap-1729	159	6	on	on	ADP
ap-1729	159	7	thermoelectrics	thermoelectric	NOUN
ap-1729	159	8	,	,	PUNCT
ap-1729	159	9	pp	pp	ADJ
ap-1729	159	10	.	.	PUNCT
ap-1729	160	1	159–163	159–163	NUM
ap-1729	160	2	.	.	PUNCT
ap-1729	161	1	2006	2006	NUM
ap-1729	161	2	.	.	PUNCT
ap-1729	162	1	[	[	X
ap-1729	162	2	25	25	NUM
ap-1729	162	3	]	]	X
ap-1729	162	4	d.	d.	PROPN
ap-1729	162	5	l.	l.	PROPN
ap-1729	162	6	windt	windt	PROPN
ap-1729	162	7	.	.	PUNCT
ap-1729	163	1	low	low	ADJ
ap-1729	163	2	-	-	PUNCT
ap-1729	163	3	stress	stress	NOUN
ap-1729	163	4	w	w	PROPN
ap-1729	163	5	/	/	SYM
ap-1729	163	6	cr	cr	PROPN
ap-1729	163	7	films	film	NOUN
ap-1729	163	8	for	for	ADP
ap-1729	163	9	scalpel	scalpel	NOUN
ap-1729	163	10	mask	mask	NOUN
ap-1729	163	11	scattering	scatter	VERB
ap-1729	163	12	layers	layer	NOUN
ap-1729	163	13	.	.	PUNCT
ap-1729	164	1	journal	journal	NOUN
ap-1729	164	2	of	of	ADP
ap-1729	164	3	vacuum	vacuum	PROPN
ap-1729	164	4	science	science	NOUN
ap-1729	164	5	and	and	CCONJ
ap-1729	164	6	technology	technology	NOUN
ap-1729	164	7	b	b	PROPN
ap-1729	164	8	17(4):1385–1389	17(4):1385–1389	NUM
ap-1729	164	9	,	,	PUNCT
ap-1729	164	10	1999	1999	NUM
ap-1729	164	11	.	.	PUNCT
ap-1729	165	1	[	[	X
ap-1729	165	2	26	26	NUM
ap-1729	165	3	]	]	X
ap-1729	165	4	m.-l	m.-l	PROPN
ap-1729	165	5	.	.	PUNCT
ap-1729	166	1	wu	wu	PROPN
ap-1729	166	2	,	,	PUNCT
ap-1729	166	3	et	et	PROPN
ap-1729	166	4	al	al	PROPN
ap-1729	166	5	.	.	PROPN
ap-1729	166	6	process	process	NOUN
ap-1729	166	7	-	-	PUNCT
ap-1729	166	8	property	property	NOUN
ap-1729	166	9	relationship	relationship	NOUN
ap-1729	166	10	of	of	ADP
ap-1729	166	11	boron	boron	NOUN
ap-1729	166	12	carbide	carbide	VERB
ap-1729	166	13	thin	thin	ADJ
ap-1729	166	14	films	film	NOUN
ap-1729	166	15	by	by	ADP
ap-1729	166	16	magnetron	magnetron	NOUN
ap-1729	166	17	sputtering	sputtering	NOUN
ap-1729	166	18	.	.	PUNCT
ap-1729	167	1	thin	thin	ADJ
ap-1729	167	2	solid	solid	ADJ
ap-1729	167	3	films	film	NOUN
ap-1729	167	4	449(1–2):120–124	449(1–2):120–124	NUM
ap-1729	167	5	,	,	PUNCT
ap-1729	167	6	2004	2004	NUM
ap-1729	167	7	.	.	PUNCT
ap-1729	168	1	[	[	X
ap-1729	168	2	27	27	NUM
ap-1729	168	3	]	]	X
ap-1729	168	4	w.	w.	PROPN
ap-1729	168	5	xu	xu	PROPN
ap-1729	168	6	,	,	PUNCT
ap-1729	168	7	et	et	PROPN
ap-1729	168	8	al	al	PROPN
ap-1729	168	9	.	.	PUNCT
ap-1729	168	10	suppressing	suppress	VERB
ap-1729	168	11	the	the	DET
ap-1729	168	12	surface	surface	NOUN
ap-1729	168	13	roughness	roughness	NOUN
ap-1729	168	14	and	and	CCONJ
ap-1729	168	15	columnar	columnar	ADJ
ap-1729	168	16	growth	growth	NOUN
ap-1729	168	17	of	of	ADP
ap-1729	168	18	silicon	silicon	NOUN
ap-1729	168	19	nitride	nitride	ADJ
ap-1729	168	20	films	film	NOUN
ap-1729	168	21	.	.	PUNCT
ap-1729	169	1	surface	surface	NOUN
ap-1729	169	2	and	and	CCONJ
ap-1729	169	3	coatings	coating	NOUN
ap-1729	169	4	technology	technology	NOUN
ap-1729	169	5	135(2):274–278	135(2):274–278	NUM
ap-1729	169	6	,	,	PUNCT
ap-1729	169	7	2001	2001	NUM
ap-1729	169	8	.	.	PUNCT
ap-1729	170	1	126	126	NUM
ap-1729	170	2	acta	acta	PROPN
ap-1729	170	3	polytechnica	polytechnica	PROPN
ap-1729	170	4	53(2):123–126	53(2):123–126	PROPN
ap-1729	170	5	,	,	PUNCT
ap-1729	170	6	2013	2013	NUM
ap-1729	170	7	1	1	NUM
ap-1729	170	8	introduction	introduction	NOUN
ap-1729	170	9	2	2	NUM
ap-1729	170	10	material	material	NOUN
ap-1729	170	11	and	and	CCONJ
ap-1729	170	12	methods	method	NOUN
ap-1729	170	13	3	3	NUM
ap-1729	170	14	results	result	NOUN
ap-1729	170	15	and	and	CCONJ
ap-1729	170	16	discussion	discussion	NOUN
ap-1729	170	17	4	4	NUM
ap-1729	170	18	conclusions	conclusion	NOUN
ap-1729	170	19	references	reference	NOUN