id	sid	tid	token	lemma	pos
ap-1743	1	1	acta	acta	PROPN
ap-1743	1	2	polytechnica	polytechnica	PROPN
ap-1743	1	3	acta	acta	PROPN
ap-1743	1	4	polytechnica	polytechnica	PROPN
ap-1743	1	5	53(2):155–159	53(2):155–159	PROPN
ap-1743	1	6	,	,	PUNCT
ap-1743	1	7	2013	2013	NUM
ap-1743	1	8	©	©	PROPN
ap-1743	1	9	czech	czech	PROPN
ap-1743	1	10	technical	technical	PROPN
ap-1743	1	11	university	university	PROPN
ap-1743	1	12	in	in	ADP
ap-1743	1	13	prague	prague	PROPN
ap-1743	1	14	,	,	PUNCT
ap-1743	1	15	2013	2013	NUM
ap-1743	1	16	available	available	ADJ
ap-1743	1	17	online	online	ADV
ap-1743	1	18	at	at	ADP
ap-1743	1	19	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-1743	1	20	physical	physical	ADJ
ap-1743	1	21	and	and	CCONJ
ap-1743	1	22	electrical	electrical	ADJ
ap-1743	1	23	properties	property	NOUN
ap-1743	1	24	of	of	ADP
ap-1743	1	25	yttria	yttria	NOUN
ap-1743	1	26	-	-	PUNCT
ap-1743	1	27	stabilized	stabilize	VERB
ap-1743	1	28	zirconia	zirconia	ADJ
ap-1743	1	29	thin	thin	ADJ
ap-1743	1	30	films	film	NOUN
ap-1743	1	31	prepared	prepare	VERB
ap-1743	1	32	by	by	ADP
ap-1743	1	33	radio	radio	NOUN
ap-1743	1	34	frequency	frequency	NOUN
ap-1743	1	35	magnetron	magnetron	NOUN
ap-1743	1	36	sputtering	sputter	VERB
ap-1743	1	37	dmitriy	dmitriy	PROPN
ap-1743	1	38	a.	a.	NOUN
ap-1743	1	39	golosov∗	golosov∗	PROPN
ap-1743	1	40	,	,	PUNCT
ap-1743	1	41	sergey	sergey	PROPN
ap-1743	1	42	m.	m.	PROPN
ap-1743	1	43	zavatskiy	zavatskiy	PROPN
ap-1743	1	44	,	,	PUNCT
ap-1743	1	45	sergey	sergey	PROPN
ap-1743	1	46	n.	n.	PROPN
ap-1743	1	47	melnikov	melnikov	PROPN
ap-1743	1	48	thin	thin	ADJ
ap-1743	1	49	film	film	NOUN
ap-1743	1	50	research	research	NOUN
ap-1743	1	51	laboratory	laboratory	NOUN
ap-1743	1	52	,	,	PUNCT
ap-1743	1	53	belarusian	belarusian	ADJ
ap-1743	1	54	state	state	PROPN
ap-1743	1	55	university	university	PROPN
ap-1743	1	56	of	of	ADP
ap-1743	1	57	informatics	informatic	NOUN
ap-1743	1	58	and	and	CCONJ
ap-1743	1	59	radioelectronics	radioelectronic	NOUN
ap-1743	1	60	,	,	PUNCT
ap-1743	1	61	minsk	minsk	PROPN
ap-1743	1	62	,	,	PUNCT
ap-1743	2	1	belarus	belarus	PROPN
ap-1743	2	2	∗	∗	NOUN
ap-1743	2	3	corresponding	correspond	VERB
ap-1743	2	4	author	author	NOUN
ap-1743	2	5	:	:	PUNCT
ap-1743	2	6	dmgolosov@gmail.com	dmgolosov@gmail.com	X
ap-1743	2	7	abstract	abstract	ADJ
ap-1743	2	8	.	.	PUNCT
ap-1743	3	1	this	this	DET
ap-1743	3	2	paper	paper	NOUN
ap-1743	3	3	presents	present	VERB
ap-1743	3	4	the	the	DET
ap-1743	3	5	electrophysical	electrophysical	ADJ
ap-1743	3	6	characteristics	characteristic	NOUN
ap-1743	3	7	of	of	ADP
ap-1743	3	8	a	a	DET
ap-1743	3	9	7	7	NUM
ap-1743	3	10	mol.%	mol.%	NOUN
ap-1743	3	11	yttria	yttria	NOUN
ap-1743	3	12	-	-	PUNCT
ap-1743	3	13	stabilized	stabilize	VERB
ap-1743	3	14	zirconia	zirconia	NOUN
ap-1743	3	15	(	(	PUNCT
ap-1743	3	16	ysz	ysz	NOUN
ap-1743	3	17	)	)	PUNCT
ap-1743	3	18	thin	thin	ADJ
ap-1743	3	19	film	film	NOUN
ap-1743	3	20	deposited	deposit	VERB
ap-1743	3	21	by	by	ADP
ap-1743	3	22	radio	radio	NOUN
ap-1743	3	23	-	-	PUNCT
ap-1743	3	24	frequency	frequency	NOUN
ap-1743	3	25	magnetron	magnetron	NOUN
ap-1743	3	26	sputtering	sputtering	NOUN
ap-1743	3	27	.	.	PUNCT
ap-1743	4	1	in	in	ADP
ap-1743	4	2	order	order	NOUN
ap-1743	4	3	to	to	PART
ap-1743	4	4	form	form	VERB
ap-1743	4	5	the	the	DET
ap-1743	4	6	crystalline	crystalline	NOUN
ap-1743	4	7	structure	structure	NOUN
ap-1743	4	8	,	,	PUNCT
ap-1743	4	9	the	the	DET
ap-1743	4	10	deposited	deposit	VERB
ap-1743	4	11	films	film	NOUN
ap-1743	4	12	were	be	AUX
ap-1743	4	13	annealed	anneal	VERB
ap-1743	4	14	in	in	ADP
ap-1743	4	15	air	air	NOUN
ap-1743	4	16	over	over	ADP
ap-1743	4	17	a	a	DET
ap-1743	4	18	temperature	temperature	NOUN
ap-1743	4	19	range	range	NOUN
ap-1743	4	20	of	of	ADP
ap-1743	4	21	700	700	NUM
ap-1743	4	22	÷	÷	NUM
ap-1743	4	23	900	900	NUM
ap-1743	4	24	◦	◦	NOUN
ap-1743	4	25	c.	c.	NOUN
ap-1743	4	26	by	by	ADP
ap-1743	4	27	xrd	xrd	NOUN
ap-1743	4	28	analysis	analysis	NOUN
ap-1743	4	29	it	it	PRON
ap-1743	4	30	was	be	AUX
ap-1743	4	31	established	establish	VERB
ap-1743	4	32	that	that	SCONJ
ap-1743	4	33	as	as	SCONJ
ap-1743	4	34	the	the	DET
ap-1743	4	35	deposited	deposit	VERB
ap-1743	4	36	films	film	NOUN
ap-1743	4	37	were	be	AUX
ap-1743	4	38	amorphous	amorphous	ADJ
ap-1743	4	39	,	,	PUNCT
ap-1743	4	40	they	they	PRON
ap-1743	4	41	crystallized	crystallize	VERB
ap-1743	4	42	into	into	ADP
ap-1743	4	43	a	a	DET
ap-1743	4	44	pure	pure	ADJ
ap-1743	4	45	cubic	cubic	ADJ
ap-1743	4	46	structure	structure	NOUN
ap-1743	4	47	as	as	ADP
ap-1743	4	48	a	a	DET
ap-1743	4	49	result	result	NOUN
ap-1743	4	50	of	of	ADP
ap-1743	4	51	annealing	anneal	VERB
ap-1743	4	52	in	in	ADP
ap-1743	4	53	air	air	NOUN
ap-1743	4	54	at	at	ADP
ap-1743	4	55	a	a	DET
ap-1743	4	56	temperature	temperature	NOUN
ap-1743	4	57	above	above	ADP
ap-1743	4	58	820	820	NUM
ap-1743	4	59	◦	◦	NOUN
ap-1743	4	60	c.	c.	NOUN
ap-1743	4	61	the	the	DET
ap-1743	4	62	electrophysical	electrophysical	ADJ
ap-1743	4	63	properties	property	NOUN
ap-1743	4	64	of	of	ADP
ap-1743	4	65	ysz	ysz	NOUN
ap-1743	4	66	films	film	NOUN
ap-1743	4	67	were	be	AUX
ap-1743	4	68	investigated	investigate	VERB
ap-1743	4	69	on	on	ADP
ap-1743	4	70	structures	structure	NOUN
ap-1743	4	71	such	such	ADJ
ap-1743	4	72	as	as	ADP
ap-1743	4	73	ni	ni	PROPN
ap-1743	4	74	/	/	SYM
ap-1743	4	75	ysz	ysz	NOUN
ap-1743	4	76	/	/	SYM
ap-1743	4	77	pt	pt	PROPN
ap-1743	4	78	/	/	SYM
ap-1743	4	79	ti	ti	NOUN
ap-1743	4	80	/	/	SYM
ap-1743	4	81	si	si	X
ap-1743	4	82	and	and	CCONJ
ap-1743	4	83	ni	ni	PROPN
ap-1743	4	84	/	/	SYM
ap-1743	4	85	ysz	ysz	NOUN
ap-1743	4	86	/	/	SYM
ap-1743	4	87	si	si	PROPN
ap-1743	4	88	.	.	NOUN
ap-1743	4	89	film	film	NOUN
ap-1743	4	90	features	feature	VERB
ap-1743	4	91	ε	ε	PROPN
ap-1743	4	92	>	>	X
ap-1743	4	93	20	20	NUM
ap-1743	4	94	and	and	CCONJ
ap-1743	4	95	tg	tg	PRON
ap-1743	4	96	δ	δ	PROPN
ap-1743	4	97	<	<	X
ap-1743	4	98	0.05	0.05	NUM
ap-1743	4	99	were	be	AUX
ap-1743	4	100	obtained	obtain	VERB
ap-1743	4	101	.	.	PUNCT
ap-1743	5	1	an	an	DET
ap-1743	5	2	estimate	estimate	NOUN
ap-1743	5	3	of	of	ADP
ap-1743	5	4	the	the	DET
ap-1743	5	5	capacity	capacity	NOUN
ap-1743	5	6	–	–	PUNCT
ap-1743	5	7	voltage	voltage	NOUN
ap-1743	5	8	characteristic	characteristic	NOUN
ap-1743	5	9	proved	prove	VERB
ap-1743	5	10	that	that	SCONJ
ap-1743	5	11	the	the	DET
ap-1743	5	12	ni	ni	PROPN
ap-1743	5	13	/	/	SYM
ap-1743	5	14	ysz	ysz	NOUN
ap-1743	5	15	/	/	SYM
ap-1743	5	16	si	si	NOUN
ap-1743	5	17	structures	structure	NOUN
ap-1743	5	18	possessed	possess	VERB
ap-1743	5	19	a	a	DET
ap-1743	5	20	hysteresis	hysteresis	NOUN
ap-1743	5	21	.	.	PUNCT
ap-1743	6	1	this	this	DET
ap-1743	6	2	hysteresis	hysteresis	NOUN
ap-1743	6	3	resulted	result	VERB
ap-1743	6	4	from	from	ADP
ap-1743	6	5	the	the	DET
ap-1743	6	6	drift	drift	NOUN
ap-1743	6	7	of	of	ADP
ap-1743	6	8	the	the	DET
ap-1743	6	9	mobile	mobile	ADJ
ap-1743	6	10	ions	ion	NOUN
ap-1743	6	11	in	in	ADP
ap-1743	6	12	the	the	DET
ap-1743	6	13	ysz	ysz	NOUN
ap-1743	6	14	film	film	NOUN
ap-1743	6	15	.	.	PUNCT
ap-1743	7	1	high	high	ADJ
ap-1743	7	2	-	-	PUNCT
ap-1743	7	3	temperature	temperature	NOUN
ap-1743	7	4	ionic	ionic	ADJ
ap-1743	7	5	conductivity	conductivity	NOUN
ap-1743	7	6	of	of	ADP
ap-1743	7	7	the	the	DET
ap-1743	7	8	stabilized	stabilize	VERB
ap-1743	7	9	zirconia	zirconia	NOUN
ap-1743	7	10	was	be	AUX
ap-1743	7	11	determined	determine	VERB
ap-1743	7	12	by	by	ADP
ap-1743	7	13	the	the	DET
ap-1743	7	14	measurements	measurement	NOUN
ap-1743	7	15	of	of	ADP
ap-1743	7	16	the	the	DET
ap-1743	7	17	electric	electric	ADJ
ap-1743	7	18	resistivity	resistivity	NOUN
ap-1743	7	19	of	of	ADP
ap-1743	7	20	the	the	DET
ap-1743	7	21	ysz	ysz	NOUN
ap-1743	7	22	films	film	NOUN
ap-1743	7	23	at	at	ADP
ap-1743	7	24	1	1	NUM
ap-1743	7	25	khz	khz	NOUN
ap-1743	7	26	over	over	ADP
ap-1743	7	27	the	the	DET
ap-1743	7	28	temperature	temperature	NOUN
ap-1743	7	29	range	range	NOUN
ap-1743	7	30	from	from	ADP
ap-1743	7	31	ambient	ambient	NOUN
ap-1743	7	32	to	to	ADP
ap-1743	7	33	800	800	NUM
ap-1743	7	34	◦	◦	NOUN
ap-1743	7	35	c.	c.	NOUN
ap-1743	7	36	the	the	DET
ap-1743	7	37	ysz	ysz	NOUN
ap-1743	7	38	film	film	NOUN
ap-1743	7	39	conductivity	conductivity	NOUN
ap-1743	7	40	obtained	obtain	VERB
ap-1743	7	41	was	be	AUX
ap-1743	7	42	1.96	1.96	NUM
ap-1743	7	43	×	×	NOUN
ap-1743	7	44	10−2	10−2	NUM
ap-1743	7	45	s	s	NOUN
ap-1743	7	46	/	/	SYM
ap-1743	7	47	cm	cm	NOUN
ap-1743	7	48	under	under	ADP
ap-1743	7	49	800	800	NUM
ap-1743	7	50	◦	◦	NOUN
ap-1743	7	51	c.	c.	NOUN
ap-1743	7	52	keywords	keyword	NOUN
ap-1743	7	53	:	:	PUNCT
ap-1743	7	54	yttria	yttria	NOUN
ap-1743	7	55	-	-	PUNCT
ap-1743	7	56	stabilized	stabilize	VERB
ap-1743	7	57	zirconia	zirconia	NOUN
ap-1743	7	58	,	,	PUNCT
ap-1743	7	59	rf	rf	NOUN
ap-1743	7	60	sputtering	sputtering	NOUN
ap-1743	7	61	,	,	PUNCT
ap-1743	7	62	x	x	ADJ
ap-1743	7	63	-	-	NOUN
ap-1743	7	64	ray	ray	NOUN
ap-1743	7	65	diffraction	diffraction	NOUN
ap-1743	7	66	,	,	PUNCT
ap-1743	7	67	dielectric	dielectric	ADJ
ap-1743	7	68	constant	constant	ADJ
ap-1743	7	69	,	,	PUNCT
ap-1743	7	70	loss	loss	NOUN
ap-1743	7	71	tangent	tangent	NOUN
ap-1743	7	72	,	,	PUNCT
ap-1743	7	73	capacity	capacity	NOUN
ap-1743	7	74	-	-	PUNCT
ap-1743	7	75	voltage	voltage	NOUN
ap-1743	7	76	characteristic	characteristic	NOUN
ap-1743	7	77	,	,	PUNCT
ap-1743	7	78	ionic	ionic	ADJ
ap-1743	7	79	conductivity	conductivity	NOUN
ap-1743	7	80	.	.	PUNCT
ap-1743	8	1	1	1	X
ap-1743	8	2	.	.	X
ap-1743	8	3	introduction	introduction	NOUN
ap-1743	8	4	yttria	yttria	NOUN
ap-1743	8	5	-	-	PUNCT
ap-1743	8	6	stabilized	stabilize	VERB
ap-1743	8	7	zirconia	zirconia	NOUN
ap-1743	8	8	(	(	PUNCT
ap-1743	8	9	ysz	ysz	NOUN
ap-1743	8	10	)	)	PUNCT
ap-1743	8	11	is	be	AUX
ap-1743	8	12	recognized	recognize	VERB
ap-1743	8	13	as	as	ADP
ap-1743	8	14	a	a	DET
ap-1743	8	15	very	very	ADV
ap-1743	8	16	attractive	attractive	ADJ
ap-1743	8	17	electrical	electrical	ADJ
ap-1743	8	18	insulator	insulator	NOUN
ap-1743	8	19	because	because	SCONJ
ap-1743	8	20	it	it	PRON
ap-1743	8	21	is	be	AUX
ap-1743	8	22	characterized	characterize	VERB
ap-1743	8	23	by	by	ADP
ap-1743	8	24	high	high	ADJ
ap-1743	8	25	chemical	chemical	NOUN
ap-1743	8	26	stability	stability	NOUN
ap-1743	8	27	,	,	PUNCT
ap-1743	8	28	resistivity	resistivity	NOUN
ap-1743	8	29	,	,	PUNCT
ap-1743	8	30	and	and	CCONJ
ap-1743	8	31	relative	relative	ADJ
ap-1743	8	32	dielectric	dielectric	ADJ
ap-1743	8	33	constant	constant	ADJ
ap-1743	8	34	.	.	PUNCT
ap-1743	9	1	in	in	ADP
ap-1743	9	2	microelectronics	microelectronic	NOUN
ap-1743	9	3	,	,	PUNCT
ap-1743	9	4	films	film	NOUN
ap-1743	9	5	of	of	ADP
ap-1743	9	6	stabilized	stabilize	VERB
ap-1743	9	7	zirconia	zirconia	NOUN
ap-1743	9	8	are	be	AUX
ap-1743	9	9	used	use	VERB
ap-1743	9	10	as	as	ADP
ap-1743	9	11	buffer	buffer	NOUN
ap-1743	9	12	layers	layer	NOUN
ap-1743	9	13	,	,	PUNCT
ap-1743	9	14	preventing	prevent	VERB
ap-1743	9	15	the	the	DET
ap-1743	9	16	functional	functional	ADJ
ap-1743	9	17	layers	layer	NOUN
ap-1743	9	18	from	from	ADP
ap-1743	9	19	interacting	interact	VERB
ap-1743	9	20	chemically	chemically	ADV
ap-1743	9	21	with	with	ADP
ap-1743	9	22	silicon	silicon	NOUN
ap-1743	9	23	,	,	PUNCT
ap-1743	9	24	in	in	ADP
ap-1743	9	25	particular	particular	ADJ
ap-1743	9	26	,	,	PUNCT
ap-1743	9	27	in	in	ADP
ap-1743	9	28	high	high	ADJ
ap-1743	9	29	-	-	PUNCT
ap-1743	9	30	temperature	temperature	NOUN
ap-1743	9	31	superconductors	superconductor	NOUN
ap-1743	9	32	[	[	X
ap-1743	9	33	2	2	NUM
ap-1743	9	34	,	,	PUNCT
ap-1743	9	35	8	8	NUM
ap-1743	9	36	]	]	PUNCT
ap-1743	9	37	.	.	PUNCT
ap-1743	10	1	today	today	NOUN
ap-1743	10	2	these	these	DET
ap-1743	10	3	films	film	NOUN
ap-1743	10	4	are	be	AUX
ap-1743	10	5	widely	widely	ADV
ap-1743	10	6	applied	apply	VERB
ap-1743	10	7	as	as	ADP
ap-1743	10	8	gate	gate	NOUN
ap-1743	10	9	dielectrics	dielectric	NOUN
ap-1743	10	10	in	in	ADP
ap-1743	10	11	field	field	NOUN
ap-1743	10	12	-	-	PUNCT
ap-1743	10	13	effect	effect	NOUN
ap-1743	10	14	transistors	transistor	NOUN
ap-1743	10	15	and	and	CCONJ
ap-1743	10	16	dynamic	dynamic	ADJ
ap-1743	10	17	random	random	ADJ
ap-1743	10	18	-	-	PUNCT
ap-1743	10	19	access	access	NOUN
ap-1743	10	20	memories	memory	NOUN
ap-1743	10	21	(	(	PUNCT
ap-1743	10	22	dram	dram	PROPN
ap-1743	10	23	)	)	PUNCT
ap-1743	11	1	[	[	X
ap-1743	11	2	15	15	NUM
ap-1743	11	3	,	,	PUNCT
ap-1743	11	4	11	11	NUM
ap-1743	11	5	]	]	PUNCT
ap-1743	11	6	,	,	PUNCT
ap-1743	11	7	and	and	CCONJ
ap-1743	11	8	also	also	ADV
ap-1743	11	9	as	as	ADP
ap-1743	11	10	an	an	DET
ap-1743	11	11	insulator	insulator	NOUN
ap-1743	11	12	in	in	ADP
ap-1743	11	13	silicon	silicon	NOUN
ap-1743	11	14	-	-	PUNCT
ap-1743	11	15	on	on	ADP
ap-1743	11	16	-	-	PUNCT
ap-1743	11	17	insulator	insulator	NOUN
ap-1743	11	18	structures	structure	NOUN
ap-1743	11	19	[	[	X
ap-1743	11	20	7	7	NUM
ap-1743	11	21	,	,	PUNCT
ap-1743	11	22	5	5	NUM
ap-1743	11	23	]	]	PUNCT
ap-1743	11	24	.	.	PUNCT
ap-1743	12	1	doped	dope	VERB
ap-1743	12	2	zirconia	zirconia	NOUN
ap-1743	12	3	has	have	VERB
ap-1743	12	4	ionic	ionic	ADJ
ap-1743	12	5	transport	transport	NOUN
ap-1743	12	6	properties	property	NOUN
ap-1743	12	7	under	under	ADP
ap-1743	12	8	high	high	ADJ
ap-1743	12	9	temperatures	temperature	NOUN
ap-1743	12	10	,	,	PUNCT
ap-1743	12	11	and	and	CCONJ
ap-1743	12	12	thus	thus	ADV
ap-1743	12	13	can	can	AUX
ap-1743	12	14	be	be	AUX
ap-1743	12	15	used	use	VERB
ap-1743	12	16	as	as	ADP
ap-1743	12	17	a	a	DET
ap-1743	12	18	solid	solid	ADJ
ap-1743	12	19	electrolyte	electrolyte	NOUN
ap-1743	12	20	in	in	ADP
ap-1743	12	21	micro	micro	ADJ
ap-1743	12	22	solid	solid	ADJ
ap-1743	12	23	-	-	PUNCT
ap-1743	12	24	oxide	oxide	NOUN
ap-1743	12	25	fuel	fuel	NOUN
ap-1743	12	26	cells	cell	NOUN
ap-1743	12	27	(	(	PUNCT
ap-1743	12	28	msofc	msofc	PROPN
ap-1743	12	29	)	)	PUNCT
ap-1743	13	1	[	[	X
ap-1743	13	2	3	3	NUM
ap-1743	13	3	,	,	PUNCT
ap-1743	13	4	13	13	NUM
ap-1743	13	5	,	,	PUNCT
ap-1743	13	6	10	10	NUM
ap-1743	13	7	]	]	PUNCT
ap-1743	13	8	or	or	CCONJ
ap-1743	13	9	as	as	ADP
ap-1743	13	10	sensitivity	sensitivity	NOUN
ap-1743	13	11	elements	element	NOUN
ap-1743	13	12	in	in	ADP
ap-1743	13	13	integrated	integrate	VERB
ap-1743	13	14	gas	gas	NOUN
ap-1743	13	15	sensors	sensor	NOUN
ap-1743	13	16	(	(	PUNCT
ap-1743	13	17	gs	gs	NOUN
ap-1743	13	18	)	)	PUNCT
ap-1743	13	19	[	[	X
ap-1743	13	20	4	4	NUM
ap-1743	13	21	,	,	PUNCT
ap-1743	13	22	14	14	NUM
ap-1743	13	23	]	]	PUNCT
ap-1743	13	24	.	.	PUNCT
ap-1743	14	1	for	for	ADP
ap-1743	14	2	these	these	DET
ap-1743	14	3	devices	device	NOUN
ap-1743	14	4	,	,	PUNCT
ap-1743	14	5	the	the	DET
ap-1743	14	6	thickness	thickness	NOUN
ap-1743	14	7	of	of	ADP
ap-1743	14	8	the	the	DET
ap-1743	14	9	solid	solid	ADJ
ap-1743	14	10	electrolyte	electrolyte	NOUN
ap-1743	14	11	layer	layer	NOUN
ap-1743	14	12	must	must	AUX
ap-1743	14	13	not	not	PART
ap-1743	14	14	exceed	exceed	VERB
ap-1743	14	15	1	1	NUM
ap-1743	14	16	÷	÷	NUM
ap-1743	14	17	2	2	NUM
ap-1743	14	18	µm	µm	NOUN
ap-1743	14	19	in	in	ADP
ap-1743	14	20	order	order	NOUN
ap-1743	14	21	to	to	PART
ap-1743	14	22	reduce	reduce	VERB
ap-1743	14	23	ohmic	ohmic	ADJ
ap-1743	14	24	loss	loss	NOUN
ap-1743	14	25	and	and	CCONJ
ap-1743	14	26	decrease	decrease	VERB
ap-1743	14	27	the	the	DET
ap-1743	14	28	operating	operating	NOUN
ap-1743	14	29	temperatures	temperature	NOUN
ap-1743	14	30	down	down	ADV
ap-1743	14	31	to	to	ADP
ap-1743	14	32	500	500	NUM
ap-1743	14	33	÷	÷	NUM
ap-1743	14	34	600	600	NUM
ap-1743	14	35	◦	◦	NOUN
ap-1743	14	36	c	c	NOUN
ap-1743	15	1	[	[	X
ap-1743	15	2	6	6	NUM
ap-1743	15	3	]	]	PUNCT
ap-1743	15	4	.	.	PUNCT
ap-1743	16	1	the	the	DET
ap-1743	16	2	requirements	requirement	NOUN
ap-1743	16	3	imposed	impose	VERB
ap-1743	16	4	on	on	ADP
ap-1743	16	5	the	the	DET
ap-1743	16	6	solid	solid	ADJ
ap-1743	16	7	electrolyte	electrolyte	NOUN
ap-1743	16	8	are	be	AUX
ap-1743	16	9	rather	rather	ADV
ap-1743	16	10	tough	tough	ADJ
ap-1743	16	11	:	:	PUNCT
ap-1743	16	12	it	it	PRON
ap-1743	16	13	has	have	VERB
ap-1743	16	14	to	to	PART
ap-1743	16	15	be	be	AUX
ap-1743	16	16	mechanically	mechanically	ADV
ap-1743	16	17	strong	strong	ADJ
ap-1743	16	18	and	and	CCONJ
ap-1743	16	19	chemically	chemically	ADV
ap-1743	16	20	reliable	reliable	ADJ
ap-1743	16	21	at	at	ADP
ap-1743	16	22	high	high	ADJ
ap-1743	16	23	temperatures	temperature	NOUN
ap-1743	16	24	,	,	PUNCT
ap-1743	16	25	mechanically	mechanically	ADV
ap-1743	16	26	and	and	CCONJ
ap-1743	16	27	chemically	chemically	ADV
ap-1743	16	28	stable	stable	ADJ
ap-1743	16	29	in	in	ADP
ap-1743	16	30	time	time	NOUN
ap-1743	16	31	,	,	PUNCT
ap-1743	16	32	should	should	AUX
ap-1743	16	33	have	have	VERB
ap-1743	16	34	maximal	maximal	ADJ
ap-1743	16	35	ionic	ionic	ADJ
ap-1743	16	36	and	and	CCONJ
ap-1743	16	37	minimal	minimal	ADJ
ap-1743	16	38	electronic	electronic	ADJ
ap-1743	16	39	conductivity	conductivity	NOUN
ap-1743	16	40	,	,	PUNCT
ap-1743	16	41	and	and	CCONJ
ap-1743	16	42	also	also	ADV
ap-1743	16	43	be	be	AUX
ap-1743	16	44	gasproof	gasproof	NOUN
ap-1743	16	45	.	.	PUNCT
ap-1743	17	1	the	the	DET
ap-1743	17	2	aim	aim	NOUN
ap-1743	17	3	is	be	AUX
ap-1743	17	4	therefore	therefore	ADV
ap-1743	17	5	to	to	PART
ap-1743	17	6	obtain	obtain	VERB
ap-1743	17	7	and	and	CCONJ
ap-1743	17	8	study	study	VERB
ap-1743	17	9	the	the	DET
ap-1743	17	10	properties	property	NOUN
ap-1743	17	11	of	of	ADP
ap-1743	17	12	doped	dope	VERB
ap-1743	17	13	zirconia	zirconia	NOUN
ap-1743	17	14	films	film	NOUN
ap-1743	17	15	grown	grow	VERB
ap-1743	17	16	by	by	ADP
ap-1743	17	17	plasma	plasma	NOUN
ap-1743	17	18	deposition	deposition	NOUN
ap-1743	17	19	methods	method	NOUN
ap-1743	17	20	[	[	X
ap-1743	17	21	1	1	NUM
ap-1743	17	22	]	]	PUNCT
ap-1743	17	23	.	.	PUNCT
ap-1743	18	1	rf	rf	NOUN
ap-1743	18	2	magnetron	magnetron	PROPN
ap-1743	18	3	sputtering	sputtering	NOUN
ap-1743	18	4	,	,	PUNCT
ap-1743	18	5	unlike	unlike	ADP
ap-1743	18	6	other	other	ADJ
ap-1743	18	7	techniques	technique	NOUN
ap-1743	18	8	,	,	PUNCT
ap-1743	18	9	enables	enable	VERB
ap-1743	18	10	dense	dense	ADJ
ap-1743	18	11	uniform	uniform	ADJ
ap-1743	18	12	films	film	NOUN
ap-1743	18	13	to	to	PART
ap-1743	18	14	be	be	AUX
ap-1743	18	15	deposited	deposit	VERB
ap-1743	18	16	under	under	ADP
ap-1743	18	17	comparatively	comparatively	ADV
ap-1743	18	18	low	low	ADJ
ap-1743	18	19	temperatures	temperature	NOUN
ap-1743	18	20	;	;	PUNCT
ap-1743	18	21	features	feature	VERB
ap-1743	18	22	stability	stability	NOUN
ap-1743	18	23	of	of	ADP
ap-1743	18	24	the	the	DET
ap-1743	18	25	process	process	NOUN
ap-1743	18	26	,	,	PUNCT
ap-1743	18	27	the	the	DET
ap-1743	18	28	possibility	possibility	NOUN
ap-1743	18	29	of	of	ADP
ap-1743	18	30	standalone	standalone	ADJ
ap-1743	18	31	control	control	NOUN
ap-1743	18	32	of	of	ADP
ap-1743	18	33	the	the	DET
ap-1743	18	34	deposition	deposition	NOUN
ap-1743	18	35	parameters	parameter	NOUN
ap-1743	18	36	,	,	PUNCT
ap-1743	18	37	and	and	CCONJ
ap-1743	18	38	supports	support	VERB
ap-1743	18	39	deposition	deposition	NOUN
ap-1743	18	40	over	over	ADP
ap-1743	18	41	large	large	ADJ
ap-1743	18	42	-	-	PUNCT
ap-1743	18	43	area	area	NOUN
ap-1743	18	44	substrates	substrate	NOUN
ap-1743	18	45	[	[	X
ap-1743	18	46	9	9	NUM
ap-1743	18	47	]	]	PUNCT
ap-1743	18	48	.	.	PUNCT
ap-1743	19	1	however	however	ADV
ap-1743	19	2	,	,	PUNCT
ap-1743	19	3	the	the	DET
ap-1743	19	4	electrophysical	electrophysical	ADJ
ap-1743	19	5	properties	property	NOUN
ap-1743	19	6	of	of	ADP
ap-1743	19	7	rf	rf	ADP
ap-1743	19	8	sputtered	sputter	VERB
ap-1743	19	9	doped	dope	VERB
ap-1743	19	10	zirconia	zirconia	PROPN
ap-1743	19	11	thin	thin	PROPN
ap-1743	19	12	films	film	NOUN
ap-1743	19	13	need	need	VERB
ap-1743	19	14	further	further	ADJ
ap-1743	19	15	study	study	NOUN
ap-1743	19	16	.	.	PUNCT
ap-1743	20	1	in	in	ADP
ap-1743	20	2	the	the	DET
ap-1743	20	3	present	present	ADJ
ap-1743	20	4	paper	paper	NOUN
ap-1743	20	5	,	,	PUNCT
ap-1743	20	6	the	the	DET
ap-1743	20	7	authors	author	NOUN
ap-1743	20	8	report	report	VERB
ap-1743	20	9	the	the	DET
ap-1743	20	10	synthesis	synthesis	NOUN
ap-1743	20	11	of	of	ADP
ap-1743	20	12	ysz	ysz	NOUN
ap-1743	20	13	thin	thin	ADJ
ap-1743	20	14	films	film	NOUN
ap-1743	20	15	by	by	ADP
ap-1743	20	16	rf	rf	NOUN
ap-1743	20	17	magnetron	magnetron	NOUN
ap-1743	20	18	sputtering	sputtering	NOUN
ap-1743	20	19	and	and	CCONJ
ap-1743	20	20	report	report	VERB
ap-1743	20	21	the	the	DET
ap-1743	20	22	results	result	NOUN
ap-1743	20	23	of	of	ADP
ap-1743	20	24	studying	study	VERB
ap-1743	20	25	the	the	DET
ap-1743	20	26	structural	structural	ADJ
ap-1743	20	27	and	and	CCONJ
ap-1743	20	28	electrical	electrical	ADJ
ap-1743	20	29	properties	property	NOUN
ap-1743	20	30	of	of	ADP
ap-1743	20	31	ysz	ysz	NOUN
ap-1743	20	32	films	film	NOUN
ap-1743	20	33	.	.	PUNCT
ap-1743	21	1	2	2	X
ap-1743	21	2	.	.	X
ap-1743	21	3	experiment	experiment	NOUN
ap-1743	21	4	figure	figure	NOUN
ap-1743	21	5	1	1	NUM
ap-1743	21	6	illustrates	illustrate	VERB
ap-1743	21	7	our	our	PRON
ap-1743	21	8	experimental	experimental	ADJ
ap-1743	21	9	installation	installation	NOUN
ap-1743	21	10	for	for	ADP
ap-1743	21	11	thin	thin	ADJ
ap-1743	21	12	-	-	PUNCT
ap-1743	21	13	film	film	NOUN
ap-1743	21	14	ysz	ysz	NOUN
ap-1743	21	15	deposition	deposition	NOUN
ap-1743	21	16	by	by	ADP
ap-1743	21	17	rf	rf	VERB
ap-1743	21	18	magnetron	magnetron	NOUN
ap-1743	21	19	sputtering	sputtering	NOUN
ap-1743	21	20	.	.	PUNCT
ap-1743	22	1	the	the	DET
ap-1743	22	2	installation	installation	NOUN
ap-1743	22	3	is	be	AUX
ap-1743	22	4	based	base	VERB
ap-1743	22	5	on	on	ADP
ap-1743	22	6	the	the	DET
ap-1743	22	7	leybold	leybold	NOUN
ap-1743	22	8	–	–	PUNCT
ap-1743	22	9	heraeus	heraeus	NOUN
ap-1743	22	10	a550	a550	PROPN
ap-1743	22	11	vzk	vzk	ADP
ap-1743	22	12	exhaust	exhaust	NOUN
ap-1743	22	13	cart	cart	NOUN
ap-1743	22	14	.	.	PUNCT
ap-1743	23	1	the	the	DET
ap-1743	23	2	vacuum	vacuum	PROPN
ap-1743	23	3	chamber	chamber	PROPN
ap-1743	23	4	is	be	AUX
ap-1743	23	5	equipped	equip	VERB
ap-1743	23	6	with	with	ADP
ap-1743	23	7	an	an	DET
ap-1743	23	8	external	external	ADJ
ap-1743	23	9	flanged	flange	VERB
ap-1743	23	10	hall	hall	NOUN
ap-1743	23	11	current	current	ADJ
ap-1743	23	12	ion	ion	NOUN
ap-1743	23	13	source	source	NOUN
ap-1743	23	14	.	.	PUNCT
ap-1743	24	1	it	it	PRON
ap-1743	24	2	is	be	AUX
ap-1743	24	3	used	use	VERB
ap-1743	24	4	for	for	ADP
ap-1743	24	5	substrate	substrate	NOUN
ap-1743	24	6	pre	pre	ADJ
ap-1743	24	7	-	-	ADJ
ap-1743	24	8	cleaning	cleaning	ADJ
ap-1743	24	9	.	.	PUNCT
ap-1743	25	1	the	the	DET
ap-1743	25	2	originally	originally	ADV
ap-1743	25	3	designed	design	VERB
ap-1743	25	4	rif.039.001	rif.039.001	ADJ
ap-1743	25	5	magnetron	magnetron	NOUN
ap-1743	25	6	sputtering	sputter	VERB
ap-1743	25	7	system	system	NOUN
ap-1743	25	8	with	with	ADP
ap-1743	25	9	a	a	DET
ap-1743	25	10	�	�	PROPN
ap-1743	25	11	39	39	NUM
ap-1743	25	12	mm	mm	NOUN
ap-1743	25	13	target	target	NOUN
ap-1743	25	14	was	be	AUX
ap-1743	25	15	used	use	VERB
ap-1743	25	16	to	to	PART
ap-1743	25	17	sputter	sputter	VERB
ap-1743	25	18	a	a	DET
ap-1743	25	19	ceramic	ceramic	ADJ
ap-1743	25	20	zro2	zro2	NOUN
ap-1743	25	21	+	+	CCONJ
ap-1743	25	22	7	7	NUM
ap-1743	25	23	mol.%	mol.%	NOUN
ap-1743	25	24	y2o3	y2o3	PROPN
ap-1743	25	25	target	target	NOUN
ap-1743	25	26	.	.	PUNCT
ap-1743	26	1	the	the	DET
ap-1743	26	2	magnetron	magnetron	NOUN
ap-1743	26	3	was	be	AUX
ap-1743	26	4	mounted	mount	VERB
ap-1743	26	5	in	in	ADP
ap-1743	26	6	the	the	DET
ap-1743	26	7	place	place	NOUN
ap-1743	26	8	of	of	ADP
ap-1743	26	9	the	the	DET
ap-1743	26	10	target	target	NOUN
ap-1743	26	11	unit	unit	NOUN
ap-1743	26	12	in	in	ADP
ap-1743	26	13	the	the	DET
ap-1743	26	14	ion	ion	NOUN
ap-1743	26	15	source	source	NOUN
ap-1743	26	16	.	.	PUNCT
ap-1743	27	1	a	a	DET
ap-1743	27	2	13.56mhz	13.56mhz	PROPN
ap-1743	27	3	rf	rf	NOUN
ap-1743	27	4	power	power	NOUN
ap-1743	27	5	source	source	NOUN
ap-1743	27	6	having	have	VERB
ap-1743	27	7	1	1	NUM
ap-1743	27	8	300w	300w	NOUN
ap-1743	27	9	in	in	ADP
ap-1743	27	10	the	the	DET
ap-1743	27	11	maximal	maximal	ADJ
ap-1743	27	12	power	power	NOUN
ap-1743	27	13	output	output	NOUN
ap-1743	27	14	,	,	PUNCT
ap-1743	27	15	was	be	AUX
ap-1743	27	16	used	use	VERB
ap-1743	27	17	as	as	ADP
ap-1743	27	18	the	the	DET
ap-1743	27	19	power	power	NOUN
ap-1743	27	20	supply	supply	NOUN
ap-1743	27	21	.	.	PUNCT
ap-1743	28	1	monocrystalline	monocrystalline	PROPN
ap-1743	28	2	superalloyed	superalloye	VERB
ap-1743	28	3	silicon	silicon	NOUN
ap-1743	28	4	si	si	X
ap-1743	28	5	(	(	PUNCT
ap-1743	28	6	100	100	NUM
ap-1743	28	7	)	)	PUNCT
ap-1743	28	8	,	,	PUNCT
ap-1743	28	9	and	and	CCONJ
ap-1743	28	10	structures	structure	NOUN
ap-1743	28	11	of	of	ADP
ap-1743	28	12	si3n4	si3n4	PROPN
ap-1743	28	13	(	(	PUNCT
ap-1743	28	14	1	1	NUM
ap-1743	28	15	µm)/si	µm)/si	NOUN
ap-1743	28	16	,	,	PUNCT
ap-1743	28	17	pt	pt	X
ap-1743	28	18	(	(	PUNCT
ap-1743	28	19	150	150	NUM
ap-1743	28	20	nm)/ti	nm)/ti	NUM
ap-1743	28	21	155	155	NUM
ap-1743	28	22	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-1743	28	23	dmitriy	dmitriy	PROPN
ap-1743	28	24	a.	a.	NOUN
ap-1743	28	25	golosov	golosov	PROPN
ap-1743	28	26	,	,	PUNCT
ap-1743	28	27	sergey	sergey	PROPN
ap-1743	28	28	m.	m.	PROPN
ap-1743	28	29	zavatskiy	zavatskiy	PROPN
ap-1743	28	30	,	,	PUNCT
ap-1743	28	31	sergey	sergey	PROPN
ap-1743	28	32	n.	n.	PROPN
ap-1743	28	33	melnikov	melnikov	PROPN
ap-1743	28	34	acta	acta	PROPN
ap-1743	28	35	polytechnica	polytechnica	PROPN
ap-1743	28	36	s	s	PART
ap-1743	28	37	s	s	NOUN
ap-1743	28	38	n	n	PRON
ap-1743	28	39	s	s	NOUN
ap-1743	28	40	s	s	X
ap-1743	28	41	n	n	PRON
ap-1743	28	42	n	n	NOUN
ap-1743	28	43	to	to	PART
ap-1743	28	44	pump	pump	VERB
ap-1743	28	45	substrate	substrate	NOUN
ap-1743	28	46	is	be	AUX
ap-1743	28	47	ar	ar	PROPN
ap-1743	28	48	o2	o2	PROPN
ap-1743	28	49	mfc	mfc	PROPN
ap-1743	28	50	mss	mss	PROPN
ap-1743	28	51	rf	rf	PROPN
ap-1743	28	52	power	power	NOUN
ap-1743	28	53	suppl	suppl	PROPN
ap-1743	28	54	13.56	13.56	NUM
ap-1743	28	55	mhz	mhz	NOUN
ap-1743	28	56	y	y	PROPN
ap-1743	28	57	matching	matching	NOUN
ap-1743	28	58	network	network	NOUN
ap-1743	28	59	is	be	AUX
ap-1743	28	60	ps	ps	PROPN
ap-1743	28	61	5.0	5.0	NUM
ap-1743	28	62	kv	kv	PROPN
ap-1743	28	63	300	300	NUM
ap-1743	28	64	ma	ma	PROPN
ap-1743	28	65	figure	figure	NOUN
ap-1743	28	66	1	1	NUM
ap-1743	28	67	.	.	PUNCT
ap-1743	29	1	experimental	experimental	ADJ
ap-1743	29	2	installation	installation	NOUN
ap-1743	29	3	for	for	ADP
ap-1743	29	4	deposition	deposition	NOUN
ap-1743	29	5	of	of	ADP
ap-1743	29	6	thin	thin	ADJ
ap-1743	29	7	-	-	PUNCT
ap-1743	29	8	film	film	NOUN
ap-1743	29	9	doped	dope	VERB
ap-1743	29	10	zirconia	zirconia	NOUN
ap-1743	29	11	by	by	ADP
ap-1743	29	12	rf	rf	NOUN
ap-1743	29	13	magnetron	magnetron	NOUN
ap-1743	29	14	sputtering	sputtering	NOUN
ap-1743	29	15	:	:	PUNCT
ap-1743	29	16	mss	mss	PROPN
ap-1743	29	17	–	–	PUNCT
ap-1743	29	18	magnetron	magnetron	NOUN
ap-1743	29	19	sputtering	sputter	VERB
ap-1743	29	20	system	system	NOUN
ap-1743	29	21	,	,	PUNCT
ap-1743	29	22	is	be	AUX
ap-1743	29	23	–	–	PUNCT
ap-1743	29	24	ion	ion	NOUN
ap-1743	29	25	source	source	NOUN
ap-1743	29	26	,	,	PUNCT
ap-1743	29	27	mfc	mfc	PROPN
ap-1743	29	28	–	–	PUNCT
ap-1743	29	29	mass	mass	NOUN
ap-1743	29	30	flow	flow	NOUN
ap-1743	29	31	controller	controller	NOUN
ap-1743	29	32	.	.	PUNCT
ap-1743	30	1	(	(	PUNCT
ap-1743	30	2	100	100	NUM
ap-1743	30	3	nm)/si	nm)/si	NOUN
ap-1743	30	4	were	be	AUX
ap-1743	30	5	used	use	VERB
ap-1743	30	6	as	as	ADP
ap-1743	30	7	substrates	substrate	NOUN
ap-1743	30	8	.	.	PUNCT
ap-1743	31	1	in	in	ADP
ap-1743	31	2	the	the	DET
ap-1743	31	3	series	series	NOUN
ap-1743	31	4	of	of	ADP
ap-1743	31	5	experiments	experiment	NOUN
ap-1743	31	6	,	,	PUNCT
ap-1743	31	7	the	the	DET
ap-1743	31	8	substrates	substrate	NOUN
ap-1743	31	9	were	be	AUX
ap-1743	31	10	mounted	mount	VERB
ap-1743	31	11	in	in	ADP
ap-1743	31	12	a	a	DET
ap-1743	31	13	rotating	rotate	VERB
ap-1743	31	14	substrate	substrate	NOUN
ap-1743	31	15	holder	holder	NOUN
ap-1743	31	16	.	.	PUNCT
ap-1743	32	1	the	the	DET
ap-1743	32	2	vacuum	vacuum	PROPN
ap-1743	32	3	chamber	chamber	PROPN
ap-1743	32	4	was	be	AUX
ap-1743	32	5	pumped	pump	VERB
ap-1743	32	6	down	down	ADP
ap-1743	32	7	to	to	ADP
ap-1743	32	8	a	a	DET
ap-1743	32	9	residual	residual	ADJ
ap-1743	32	10	pressure	pressure	NOUN
ap-1743	32	11	of	of	ADP
ap-1743	32	12	8	8	NUM
ap-1743	32	13	×	×	NOUN
ap-1743	32	14	10−4	10−4	NUM
ap-1743	32	15	pa	pa	PROPN
ap-1743	32	16	.	.	PUNCT
ap-1743	33	1	the	the	DET
ap-1743	33	2	substrates	substrate	NOUN
ap-1743	33	3	were	be	AUX
ap-1743	33	4	pre	pre	VERB
ap-1743	33	5	-	-	VERB
ap-1743	33	6	cleaned	clean	VERB
ap-1743	33	7	with	with	ADP
ap-1743	33	8	an	an	DET
ap-1743	33	9	ion	ion	NOUN
ap-1743	33	10	beam	beam	NOUN
ap-1743	33	11	.	.	PUNCT
ap-1743	34	1	for	for	ADP
ap-1743	34	2	this	this	DET
ap-1743	34	3	purpose	purpose	NOUN
ap-1743	34	4	,	,	PUNCT
ap-1743	34	5	ar	ar	PROPN
ap-1743	34	6	was	be	AUX
ap-1743	34	7	added	add	VERB
ap-1743	34	8	into	into	ADP
ap-1743	34	9	the	the	DET
ap-1743	34	10	gas	gas	NOUN
ap-1743	34	11	distribution	distribution	NOUN
ap-1743	34	12	system	system	NOUN
ap-1743	34	13	of	of	ADP
ap-1743	34	14	the	the	DET
ap-1743	34	15	ion	ion	NOUN
ap-1743	34	16	source	source	NOUN
ap-1743	34	17	at	at	ADP
ap-1743	34	18	the	the	DET
ap-1743	34	19	flow	flow	NOUN
ap-1743	34	20	rate	rate	NOUN
ap-1743	34	21	qar	qar	PROPN
ap-1743	34	22	=	=	NOUN
ap-1743	34	23	10	10	NUM
ap-1743	34	24	sccm	sccm	NOUN
ap-1743	34	25	.	.	PUNCT
ap-1743	35	1	during	during	ADP
ap-1743	35	2	all	all	DET
ap-1743	35	3	the	the	DET
ap-1743	35	4	experiments	experiment	NOUN
ap-1743	35	5	the	the	DET
ap-1743	35	6	cleaning	cleaning	NOUN
ap-1743	35	7	time	time	NOUN
ap-1743	35	8	,	,	PUNCT
ap-1743	35	9	ion	ion	NOUN
ap-1743	35	10	energies	energy	NOUN
ap-1743	35	11	and	and	CCONJ
ap-1743	35	12	discharge	discharge	VERB
ap-1743	35	13	currents	current	NOUN
ap-1743	35	14	were	be	AUX
ap-1743	35	15	constant	constant	ADJ
ap-1743	35	16	,	,	PUNCT
ap-1743	35	17	at	at	ADP
ap-1743	35	18	3min	3min	NUM
ap-1743	35	19	,	,	PUNCT
ap-1743	35	20	700	700	NUM
ap-1743	35	21	ev	ev	NOUN
ap-1743	35	22	,	,	PUNCT
ap-1743	35	23	and	and	CCONJ
ap-1743	35	24	40ma	40ma	ADJ
ap-1743	35	25	,	,	PUNCT
ap-1743	35	26	respectively	respectively	ADV
ap-1743	35	27	.	.	PUNCT
ap-1743	36	1	then	then	ADV
ap-1743	36	2	the	the	DET
ap-1743	36	3	targets	target	NOUN
ap-1743	36	4	were	be	AUX
ap-1743	36	5	cleaned	clean	VERB
ap-1743	36	6	of	of	ADP
ap-1743	36	7	impurities	impurity	NOUN
ap-1743	36	8	,	,	PUNCT
ap-1743	36	9	for	for	ADP
ap-1743	36	10	which	which	PRON
ap-1743	36	11	the	the	DET
ap-1743	36	12	substrates	substrate	NOUN
ap-1743	36	13	were	be	AUX
ap-1743	36	14	taken	take	VERB
ap-1743	36	15	away	away	ADV
ap-1743	36	16	from	from	ADP
ap-1743	36	17	the	the	DET
ap-1743	36	18	deposition	deposition	NOUN
ap-1743	36	19	zone	zone	NOUN
ap-1743	36	20	,	,	PUNCT
ap-1743	36	21	and	and	CCONJ
ap-1743	36	22	the	the	DET
ap-1743	36	23	working	work	VERB
ap-1743	36	24	gases	gas	NOUN
ap-1743	36	25	were	be	AUX
ap-1743	36	26	supplied	supply	VERB
ap-1743	36	27	directly	directly	ADV
ap-1743	36	28	into	into	ADP
ap-1743	36	29	the	the	DET
ap-1743	36	30	magnetron	magnetron	ADJ
ap-1743	36	31	discharge	discharge	NOUN
ap-1743	36	32	zone	zone	NOUN
ap-1743	36	33	(	(	PUNCT
ap-1743	36	34	ar	ar	PROPN
ap-1743	36	35	/	/	SYM
ap-1743	36	36	o2	o2	ADJ
ap-1743	36	37	mixture	mixture	NOUN
ap-1743	36	38	)	)	PUNCT
ap-1743	36	39	.	.	PUNCT
ap-1743	37	1	the	the	DET
ap-1743	37	2	argon	argon	NOUN
ap-1743	37	3	flow	flow	NOUN
ap-1743	37	4	rate	rate	NOUN
ap-1743	37	5	was	be	AUX
ap-1743	37	6	qar	qar	NOUN
ap-1743	37	7	=	=	NOUN
ap-1743	37	8	50	50	NUM
ap-1743	37	9	sccm	sccm	NOUN
ap-1743	37	10	,	,	PUNCT
ap-1743	37	11	while	while	SCONJ
ap-1743	37	12	the	the	DET
ap-1743	37	13	oxygen	oxygen	NOUN
ap-1743	37	14	flow	flow	NOUN
ap-1743	37	15	rate	rate	NOUN
ap-1743	37	16	was	be	AUX
ap-1743	37	17	qo2	qo2	X
ap-1743	37	18	=	=	SYM
ap-1743	37	19	10	10	NUM
ap-1743	37	20	sccm	sccm	NOUN
ap-1743	37	21	.	.	PUNCT
ap-1743	38	1	the	the	DET
ap-1743	38	2	target	target	NOUN
ap-1743	38	3	cleaning	cleaning	NOUN
ap-1743	38	4	modes	mode	NOUN
ap-1743	38	5	for	for	ADP
ap-1743	38	6	all	all	DET
ap-1743	38	7	the	the	DET
ap-1743	38	8	experiments	experiment	NOUN
ap-1743	38	9	were	be	AUX
ap-1743	38	10	constant	constant	ADJ
ap-1743	38	11	:	:	PUNCT
ap-1743	38	12	forward	forward	ADJ
ap-1743	38	13	power	power	NOUN
ap-1743	38	14	pf	pf	NOUN
ap-1743	38	15	=	=	SYM
ap-1743	38	16	70	70	NUM
ap-1743	38	17	w	w	NOUN
ap-1743	38	18	,	,	PUNCT
ap-1743	38	19	reflected	reflect	VERB
ap-1743	38	20	power	power	NOUN
ap-1743	38	21	pr	pr	NOUN
ap-1743	38	22	=	=	SYM
ap-1743	38	23	5	5	NUM
ap-1743	38	24	w	w	NOUN
ap-1743	38	25	,	,	PUNCT
ap-1743	38	26	and	and	CCONJ
ap-1743	38	27	sputtering	sputtering	ADJ
ap-1743	38	28	time	time	NOUN
ap-1743	38	29	of	of	ADP
ap-1743	38	30	20min	20min	NOUN
ap-1743	38	31	.	.	PUNCT
ap-1743	39	1	then	then	ADV
ap-1743	39	2	the	the	DET
ap-1743	39	3	substrates	substrate	NOUN
ap-1743	39	4	were	be	AUX
ap-1743	39	5	placed	place	VERB
ap-1743	39	6	into	into	ADP
ap-1743	39	7	the	the	DET
ap-1743	39	8	deposition	deposition	NOUN
ap-1743	39	9	zone	zone	NOUN
ap-1743	39	10	.	.	PUNCT
ap-1743	40	1	the	the	DET
ap-1743	40	2	total	total	ADJ
ap-1743	40	3	gas	gas	NOUN
ap-1743	40	4	flow	flow	NOUN
ap-1743	40	5	rate	rate	NOUN
ap-1743	40	6	was	be	AUX
ap-1743	40	7	kept	keep	VERB
ap-1743	40	8	constant	constant	ADJ
ap-1743	40	9	at	at	ADP
ap-1743	40	10	a	a	DET
ap-1743	40	11	level	level	NOUN
ap-1743	40	12	of	of	ADP
ap-1743	40	13	60	60	NUM
ap-1743	40	14	sccm	sccm	NOUN
ap-1743	40	15	.	.	PUNCT
ap-1743	41	1	the	the	DET
ap-1743	41	2	oxygen	oxygen	NOUN
ap-1743	41	3	content	content	NOUN
ap-1743	41	4	in	in	ADP
ap-1743	41	5	the	the	DET
ap-1743	41	6	gas	gas	NOUN
ap-1743	41	7	mixture	mixture	NOUN
ap-1743	41	8	was	be	AUX
ap-1743	41	9	varied	varied	ADJ
ap-1743	41	10	from	from	ADP
ap-1743	41	11	0	0	NUM
ap-1743	41	12	to	to	ADP
ap-1743	41	13	30	30	NUM
ap-1743	41	14	%	%	NOUN
ap-1743	41	15	,	,	PUNCT
ap-1743	41	16	whereas	whereas	SCONJ
ap-1743	41	17	the	the	DET
ap-1743	41	18	pressure	pressure	NOUN
ap-1743	41	19	in	in	ADP
ap-1743	41	20	the	the	DET
ap-1743	41	21	chamber	chamber	NOUN
ap-1743	41	22	was	be	AUX
ap-1743	41	23	maintained	maintain	VERB
ap-1743	41	24	at	at	ADP
ap-1743	41	25	0.2	0.2	NUM
ap-1743	41	26	pa	pa	PROPN
ap-1743	41	27	.	.	PUNCT
ap-1743	42	1	the	the	DET
ap-1743	42	2	discharge	discharge	NOUN
ap-1743	42	3	power	power	NOUN
ap-1743	42	4	stabilization	stabilization	NOUN
ap-1743	42	5	mode	mode	NOUN
ap-1743	42	6	with	with	ADP
ap-1743	42	7	125w	125w	PROPN
ap-1743	42	8	and	and	CCONJ
ap-1743	42	9	80w	80w	NOUN
ap-1743	42	10	in	in	ADP
ap-1743	42	11	the	the	DET
ap-1743	42	12	forward	forward	ADJ
ap-1743	42	13	power	power	NOUN
ap-1743	42	14	was	be	AUX
ap-1743	42	15	used	use	VERB
ap-1743	42	16	for	for	ADP
ap-1743	42	17	thin	thin	ADJ
ap-1743	42	18	-	-	PUNCT
ap-1743	42	19	film	film	NOUN
ap-1743	42	20	deposition	deposition	NOUN
ap-1743	42	21	,	,	PUNCT
ap-1743	42	22	while	while	SCONJ
ap-1743	42	23	the	the	DET
ap-1743	42	24	level	level	NOUN
ap-1743	42	25	of	of	ADP
ap-1743	42	26	the	the	DET
ap-1743	42	27	reflected	reflect	VERB
ap-1743	42	28	power	power	NOUN
ap-1743	42	29	did	do	AUX
ap-1743	42	30	not	not	PART
ap-1743	42	31	exceed	exceed	VERB
ap-1743	42	32	10	10	NUM
ap-1743	42	33	%	%	NOUN
ap-1743	42	34	of	of	ADP
ap-1743	42	35	the	the	DET
ap-1743	42	36	forward	forward	ADJ
ap-1743	42	37	power	power	NOUN
ap-1743	42	38	.	.	PUNCT
ap-1743	43	1	the	the	DET
ap-1743	43	2	deposition	deposition	NOUN
ap-1743	43	3	time	time	NOUN
ap-1743	43	4	in	in	ADP
ap-1743	43	5	all	all	DET
ap-1743	43	6	the	the	DET
ap-1743	43	7	experiments	experiment	NOUN
ap-1743	43	8	was	be	AUX
ap-1743	43	9	kept	keep	VERB
ap-1743	43	10	constant	constant	ADJ
ap-1743	43	11	at	at	ADP
ap-1743	43	12	180min	180min	NUM
ap-1743	43	13	.	.	PUNCT
ap-1743	44	1	the	the	DET
ap-1743	44	2	substrate	substrate	NOUN
ap-1743	44	3	was	be	AUX
ap-1743	44	4	placed	place	VERB
ap-1743	44	5	82	82	NUM
ap-1743	44	6	mm	mm	NOUN
ap-1743	44	7	away	away	ADV
ap-1743	44	8	from	from	ADP
ap-1743	44	9	the	the	DET
ap-1743	44	10	target	target	NOUN
ap-1743	44	11	surface	surface	NOUN
ap-1743	44	12	.	.	PUNCT
ap-1743	45	1	the	the	DET
ap-1743	45	2	thickness	thickness	NOUN
ap-1743	45	3	of	of	ADP
ap-1743	45	4	the	the	DET
ap-1743	45	5	deposited	deposit	VERB
ap-1743	45	6	films	film	NOUN
ap-1743	45	7	varied	varied	ADJ
ap-1743	45	8	within	within	ADP
ap-1743	45	9	200÷400	200÷400	NUM
ap-1743	45	10	nm	nm	NOUN
ap-1743	45	11	,	,	PUNCT
ap-1743	45	12	depending	depend	VERB
ap-1743	45	13	on	on	ADP
ap-1743	45	14	the	the	DET
ap-1743	45	15	oxygen	oxygen	NOUN
ap-1743	45	16	content	content	NOUN
ap-1743	45	17	in	in	ADP
ap-1743	45	18	the	the	DET
ap-1743	45	19	ar	ar	PROPN
ap-1743	45	20	/	/	SYM
ap-1743	45	21	o2	o2	ADJ
ap-1743	45	22	gas	gas	NOUN
ap-1743	45	23	mixture	mixture	NOUN
ap-1743	45	24	.	.	PUNCT
ap-1743	46	1	then	then	ADV
ap-1743	46	2	the	the	DET
ap-1743	46	3	deposited	deposit	VERB
ap-1743	46	4	films	film	NOUN
ap-1743	46	5	were	be	AUX
ap-1743	46	6	annealed	anneal	VERB
ap-1743	46	7	in	in	ADP
ap-1743	46	8	air	air	NOUN
ap-1743	46	9	,	,	PUNCT
ap-1743	46	10	using	use	VERB
ap-1743	46	11	the	the	DET
ap-1743	46	12	isoprin	isoprin	NOUN
ap-1743	46	13	ir	ir	PROPN
ap-1743	46	14	heating	heating	NOUN
ap-1743	46	15	system	system	NOUN
ap-1743	46	16	.	.	PUNCT
ap-1743	47	1	the	the	DET
ap-1743	47	2	annealing	anneal	VERB
ap-1743	47	3	temperature	temperature	NOUN
ap-1743	47	4	varied	varied	ADJ
ap-1743	47	5	within	within	ADP
ap-1743	47	6	the	the	DET
ap-1743	47	7	temperature	temperature	NOUN
ap-1743	47	8	range	range	NOUN
ap-1743	47	9	of	of	ADP
ap-1743	47	10	700	700	NUM
ap-1743	47	11	÷	÷	NUM
ap-1743	47	12	900	900	NUM
ap-1743	47	13	◦	◦	NOUN
ap-1743	47	14	c	c	NOUN
ap-1743	47	15	(	(	PUNCT
ap-1743	47	16	annealing	anneal	VERB
ap-1743	47	17	time	time	NOUN
ap-1743	47	18	15min	15min	NUM
ap-1743	47	19	)	)	PUNCT
ap-1743	47	20	.	.	PUNCT
ap-1743	48	1	the	the	DET
ap-1743	48	2	phase	phase	NOUN
ap-1743	48	3	composition	composition	NOUN
ap-1743	48	4	of	of	ADP
ap-1743	48	5	the	the	DET
ap-1743	48	6	ysz	ysz	NOUN
ap-1743	48	7	films	film	NOUN
ap-1743	48	8	was	be	AUX
ap-1743	48	9	determined	determine	VERB
ap-1743	48	10	by	by	ADP
ap-1743	48	11	means	mean	NOUN
ap-1743	48	12	of	of	ADP
ap-1743	48	13	the	the	DET
ap-1743	48	14	x	x	ADJ
ap-1743	48	15	-	-	NOUN
ap-1743	48	16	ray	ray	NOUN
ap-1743	48	17	diffraction	diffraction	NOUN
ap-1743	48	18	(	(	PUNCT
ap-1743	48	19	xrd	xrd	NOUN
ap-1743	48	20	)	)	PUNCT
ap-1743	48	21	method	method	NOUN
ap-1743	48	22	,	,	PUNCT
ap-1743	48	23	using	use	VERB
ap-1743	48	24	the	the	DET
ap-1743	48	25	dron-3	dron-3	NUM
ap-1743	48	26	system	system	NOUN
ap-1743	48	27	in	in	ADP
ap-1743	48	28	cukα	cukα	ADJ
ap-1743	48	29	radiation	radiation	NOUN
ap-1743	48	30	.	.	PUNCT
ap-1743	49	1	si	si	X
ap-1743	49	2	(	(	PUNCT
ap-1743	49	3	100	100	NUM
ap-1743	49	4	)	)	PUNCT
ap-1743	49	5	substrate	substrate	NOUN
ap-1743	49	6	sio	sio	NOUN
ap-1743	49	7	ti	ti	NOUN
ap-1743	49	8	pt	pt	PROPN
ap-1743	49	9	nizro	nizro	PROPN
ap-1743	49	10	+	+	PROPN
ap-1743	49	11	y	y	PROPN
ap-1743	49	12	o2	o2	ADJ
ap-1743	49	13	2	2	NUM
ap-1743	49	14	3	3	NUM
ap-1743	49	15	2	2	NUM
ap-1743	49	16	figure	figure	NOUN
ap-1743	49	17	2	2	NUM
ap-1743	49	18	.	.	PUNCT
ap-1743	49	19	ni	ni	PROPN
ap-1743	49	20	/	/	SYM
ap-1743	49	21	ysz	ysz	NOUN
ap-1743	49	22	/	/	SYM
ap-1743	49	23	pt	pt	NOUN
ap-1743	49	24	capacitor	capacitor	NOUN
ap-1743	49	25	stucture	stucture	NOUN
ap-1743	49	26	.	.	PUNCT
ap-1743	50	1	the	the	DET
ap-1743	50	2	x	x	NOUN
ap-1743	50	3	-	-	NOUN
ap-1743	50	4	ray	ray	NOUN
ap-1743	50	5	patterns	pattern	NOUN
ap-1743	50	6	were	be	AUX
ap-1743	50	7	obtained	obtain	VERB
ap-1743	50	8	at	at	ADP
ap-1743	50	9	a	a	DET
ap-1743	50	10	rate	rate	NOUN
ap-1743	50	11	of	of	ADP
ap-1743	50	12	60	60	NUM
ap-1743	50	13	◦	◦	NOUN
ap-1743	50	14	/h	/h	NOUN
ap-1743	50	15	in	in	ADP
ap-1743	50	16	the	the	DET
ap-1743	50	17	angular	angular	ADJ
ap-1743	50	18	range	range	NOUN
ap-1743	50	19	of	of	ADP
ap-1743	50	20	2θ	2θ	NUM
ap-1743	50	21	=	=	SYM
ap-1743	51	1	20	20	NUM
ap-1743	51	2	÷	÷	NUM
ap-1743	51	3	80	80	NUM
ap-1743	51	4	◦	◦	NOUN
ap-1743	51	5	,	,	PUNCT
ap-1743	51	6	and	and	CCONJ
ap-1743	51	7	room	room	NOUN
ap-1743	51	8	temperature	temperature	NOUN
ap-1743	51	9	.	.	PUNCT
ap-1743	52	1	the	the	DET
ap-1743	52	2	thickness	thickness	NOUN
ap-1743	52	3	of	of	ADP
ap-1743	52	4	the	the	DET
ap-1743	52	5	deposited	deposit	VERB
ap-1743	52	6	layers	layer	NOUN
ap-1743	52	7	was	be	AUX
ap-1743	52	8	determined	determine	VERB
ap-1743	52	9	with	with	ADP
ap-1743	52	10	the	the	DET
ap-1743	52	11	poi	poi	PROPN
ap-1743	52	12	-	-	PUNCT
ap-1743	52	13	o8	o8	NOUN
ap-1743	52	14	optical	optical	ADJ
ap-1743	52	15	interferometric	interferometric	ADJ
ap-1743	52	16	profilometer	profilometer	NOUN
ap-1743	52	17	.	.	PUNCT
ap-1743	53	1	the	the	DET
ap-1743	53	2	capacitor	capacitor	NOUN
ap-1743	53	3	structures	structure	NOUN
ap-1743	53	4	(	(	PUNCT
ap-1743	53	5	fig	fig	NOUN
ap-1743	53	6	.	.	NOUN
ap-1743	53	7	2	2	NUM
ap-1743	53	8	)	)	PUNCT
ap-1743	53	9	were	be	AUX
ap-1743	53	10	formed	form	VERB
ap-1743	53	11	to	to	PART
ap-1743	53	12	measure	measure	VERB
ap-1743	53	13	the	the	DET
ap-1743	53	14	electrophysical	electrophysical	ADJ
ap-1743	53	15	characteristics	characteristic	NOUN
ap-1743	53	16	of	of	ADP
ap-1743	53	17	the	the	DET
ap-1743	53	18	ysz	ysz	NOUN
ap-1743	53	19	films	film	NOUN
ap-1743	53	20	.	.	PUNCT
ap-1743	54	1	the	the	DET
ap-1743	54	2	doped	dope	VERB
ap-1743	54	3	zirconia	zirconia	NOUN
ap-1743	54	4	thin	thin	ADJ
ap-1743	54	5	film	film	NOUN
ap-1743	54	6	(	(	PUNCT
ap-1743	54	7	200	200	NUM
ap-1743	54	8	÷	÷	NUM
ap-1743	54	9	400	400	NUM
ap-1743	54	10	nm	nm	NOUN
ap-1743	54	11	in	in	ADP
ap-1743	54	12	thickness	thickness	NOUN
ap-1743	54	13	)	)	PUNCT
ap-1743	54	14	was	be	AUX
ap-1743	54	15	deposited	deposit	VERB
ap-1743	54	16	onto	onto	ADP
ap-1743	54	17	superalloyed	superalloye	VERB
ap-1743	54	18	silicon	silicon	NOUN
ap-1743	54	19	si	si	X
ap-1743	54	20	(	(	PUNCT
ap-1743	54	21	100	100	NUM
ap-1743	54	22	)	)	PUNCT
ap-1743	54	23	and	and	CCONJ
ap-1743	54	24	pt	pt	X
ap-1743	54	25	/	/	SYM
ap-1743	54	26	ti	ti	NOUN
ap-1743	54	27	/	/	SYM
ap-1743	54	28	si	si	ADJ
ap-1743	54	29	structures	structure	NOUN
ap-1743	54	30	,	,	PUNCT
ap-1743	54	31	followed	follow	VERB
ap-1743	54	32	by	by	ADP
ap-1743	54	33	film	film	NOUN
ap-1743	54	34	annealing	annealing	NOUN
ap-1743	54	35	.	.	PUNCT
ap-1743	55	1	the	the	DET
ap-1743	55	2	upper	upper	ADJ
ap-1743	55	3	ni	ni	PROPN
ap-1743	55	4	electrode	electrode	NOUN
ap-1743	55	5	was	be	AUX
ap-1743	55	6	deposited	deposit	VERB
ap-1743	55	7	by	by	ADP
ap-1743	55	8	ion	ion	NOUN
ap-1743	55	9	-	-	PUNCT
ap-1743	55	10	beam	beam	NOUN
ap-1743	55	11	sputtering	sputtering	NOUN
ap-1743	55	12	through	through	ADP
ap-1743	55	13	a	a	DET
ap-1743	55	14	mask	mask	NOUN
ap-1743	55	15	.	.	PUNCT
ap-1743	56	1	the	the	DET
ap-1743	56	2	capacitors	capacitor	NOUN
ap-1743	56	3	obtained	obtain	VERB
ap-1743	56	4	were	be	AUX
ap-1743	56	5	0.8	0.8	NUM
ap-1743	56	6	×	×	NOUN
ap-1743	56	7	0.8	0.8	NUM
ap-1743	56	8	mm	mm	NOUN
ap-1743	56	9	.	.	PUNCT
ap-1743	57	1	the	the	DET
ap-1743	57	2	capacitance	capacitance	NOUN
ap-1743	57	3	,	,	PUNCT
ap-1743	57	4	the	the	DET
ap-1743	57	5	dielectric	dielectric	ADJ
ap-1743	57	6	loss	loss	NOUN
ap-1743	57	7	tangent	tangent	NOUN
ap-1743	57	8	,	,	PUNCT
ap-1743	57	9	and	and	CCONJ
ap-1743	57	10	the	the	DET
ap-1743	57	11	c	c	PROPN
ap-1743	57	12	–	–	PUNCT
ap-1743	57	13	v	v	NUM
ap-1743	57	14	characteristics	characteristic	NOUN
ap-1743	57	15	were	be	AUX
ap-1743	57	16	obtained	obtain	VERB
ap-1743	57	17	using	use	VERB
ap-1743	57	18	the	the	DET
ap-1743	57	19	lcr	lcr	NOUN
ap-1743	57	20	meter	meter	NOUN
ap-1743	57	21	e7	e7	PROPN
ap-1743	57	22	-	-	PUNCT
ap-1743	57	23	20	20	NUM
ap-1743	57	24	at	at	ADP
ap-1743	57	25	frequencies	frequency	NOUN
ap-1743	57	26	between	between	ADP
ap-1743	57	27	25hz	25hz	ADJ
ap-1743	57	28	and	and	CCONJ
ap-1743	57	29	1.0mhz	1.0mhz	NUM
ap-1743	57	30	.	.	PUNCT
ap-1743	58	1	the	the	DET
ap-1743	58	2	dielectric	dielectric	ADJ
ap-1743	58	3	constant	constant	ADJ
ap-1743	58	4	values	value	NOUN
ap-1743	58	5	were	be	AUX
ap-1743	58	6	calculated	calculate	VERB
ap-1743	58	7	on	on	ADP
ap-1743	58	8	the	the	DET
ap-1743	58	9	basis	basis	NOUN
ap-1743	58	10	of	of	ADP
ap-1743	58	11	the	the	DET
ap-1743	58	12	thickness	thickness	NOUN
ap-1743	58	13	and	and	CCONJ
ap-1743	58	14	capacitance	capacitance	NOUN
ap-1743	58	15	of	of	ADP
ap-1743	58	16	the	the	DET
ap-1743	58	17	ysz	ysz	NOUN
ap-1743	58	18	layer	layer	NOUN
ap-1743	58	19	,	,	PUNCT
ap-1743	58	20	using	use	VERB
ap-1743	58	21	the	the	DET
ap-1743	58	22	formula	formula	NOUN
ap-1743	58	23	ε	ε	PROPN
ap-1743	58	24	=	=	SYM
ap-1743	58	25	cd	cd	PROPN
ap-1743	58	26	/	/	SYM
ap-1743	58	27	ε0s	ε0s	PROPN
ap-1743	58	28	,	,	PUNCT
ap-1743	58	29	where	where	SCONJ
ap-1743	58	30	ε0	ε0	NOUN
ap-1743	58	31	=	=	NOUN
ap-1743	58	32	8.85	8.85	NUM
ap-1743	58	33	×	×	NOUN
ap-1743	58	34	10−12	10−12	NOUN
ap-1743	58	35	f	f	PROPN
ap-1743	58	36	/	/	SYM
ap-1743	58	37	m	m	PROPN
ap-1743	58	38	,	,	PUNCT
ap-1743	58	39	and	and	CCONJ
ap-1743	58	40	s	s	VERB
ap-1743	58	41	is	be	AUX
ap-1743	58	42	the	the	DET
ap-1743	58	43	capacitor	capacitor	NOUN
ap-1743	58	44	area	area	NOUN
ap-1743	58	45	s	s	PART
ap-1743	58	46	=	=	SYM
ap-1743	58	47	6.4	6.4	NUM
ap-1743	58	48	×	×	NOUN
ap-1743	58	49	10−7	10−7	NUM
ap-1743	58	50	m2	m2	PROPN
ap-1743	58	51	.	.	PUNCT
ap-1743	59	1	the	the	DET
ap-1743	59	2	ionic	ionic	ADJ
ap-1743	59	3	conductivity	conductivity	NOUN
ap-1743	59	4	of	of	ADP
ap-1743	59	5	the	the	DET
ap-1743	59	6	stabilized	stabilize	VERB
ap-1743	59	7	zirconia	zirconia	NOUN
ap-1743	59	8	was	be	AUX
ap-1743	59	9	determined	determine	VERB
ap-1743	59	10	through	through	ADP
ap-1743	59	11	measurements	measurement	NOUN
ap-1743	59	12	of	of	ADP
ap-1743	59	13	the	the	DET
ap-1743	59	14	ysz	ysz	NOUN
ap-1743	59	15	film	film	NOUN
ap-1743	59	16	electric	electric	ADJ
ap-1743	59	17	resistance	resistance	NOUN
ap-1743	59	18	at	at	ADP
ap-1743	59	19	1	1	NUM
ap-1743	59	20	khz	khz	NOUN
ap-1743	59	21	and	and	CCONJ
ap-1743	59	22	over	over	ADP
ap-1743	59	23	the	the	DET
ap-1743	59	24	temperature	temperature	NOUN
ap-1743	59	25	range	range	NOUN
ap-1743	59	26	from	from	ADP
ap-1743	59	27	room	room	NOUN
ap-1743	59	28	temperature	temperature	NOUN
ap-1743	59	29	up	up	ADP
ap-1743	59	30	to	to	PART
ap-1743	59	31	800	800	NUM
ap-1743	59	32	◦	◦	NOUN
ap-1743	59	33	c.	c.	NOUN
ap-1743	59	34	3	3	NUM
ap-1743	59	35	.	.	PUNCT
ap-1743	60	1	results	result	NOUN
ap-1743	60	2	we	we	PRON
ap-1743	60	3	aimed	aim	VERB
ap-1743	60	4	to	to	PART
ap-1743	60	5	show	show	VERB
ap-1743	60	6	how	how	SCONJ
ap-1743	60	7	the	the	DET
ap-1743	60	8	rf	rf	ADJ
ap-1743	60	9	magnetron	magnetron	NOUN
ap-1743	60	10	sputtering	sputtering	ADJ
ap-1743	60	11	conditions	condition	NOUN
ap-1743	60	12	of	of	ADP
ap-1743	60	13	zro2	zro2	PROPN
ap-1743	60	14	+	+	CCONJ
ap-1743	60	15	7	7	NUM
ap-1743	60	16	%	%	NOUN
ap-1743	60	17	y2o3	y2o3	PROPN
ap-1743	60	18	target	target	NOUN
ap-1743	60	19	affect	affect	VERB
ap-1743	60	20	the	the	DET
ap-1743	60	21	deposition	deposition	NOUN
ap-1743	60	22	rate	rate	NOUN
ap-1743	60	23	.	.	PUNCT
ap-1743	61	1	the	the	DET
ap-1743	61	2	deposition	deposition	NOUN
ap-1743	61	3	rate	rate	NOUN
ap-1743	61	4	vs.	vs.	ADP
ap-1743	61	5	discharge	discharge	NOUN
ap-1743	61	6	power	power	NOUN
ap-1743	61	7	and	and	CCONJ
ap-1743	61	8	vs.	vs.	ADP
ap-1743	61	9	ar	ar	PROPN
ap-1743	61	10	/	/	SYM
ap-1743	61	11	o2	o2	ADJ
ap-1743	61	12	producer	producer	NOUN
ap-1743	61	13	gas	gas	NOUN
ap-1743	61	14	mixture	mixture	NOUN
ap-1743	61	15	curves	curve	NOUN
ap-1743	61	16	were	be	AUX
ap-1743	61	17	plotted	plot	VERB
ap-1743	61	18	in	in	ADP
ap-1743	61	19	fig	fig	NOUN
ap-1743	61	20	.	.	PUNCT
ap-1743	62	1	3	3	X
ap-1743	62	2	.	.	X
ap-1743	63	1	the	the	DET
ap-1743	63	2	deposition	deposition	NOUN
ap-1743	63	3	rate	rate	NOUN
ap-1743	63	4	decreased	decrease	VERB
ap-1743	63	5	practically	practically	ADV
ap-1743	63	6	linearly	linearly	ADV
ap-1743	63	7	as	as	SCONJ
ap-1743	63	8	the	the	DET
ap-1743	63	9	oxygen	oxygen	NOUN
ap-1743	63	10	content	content	NOUN
ap-1743	63	11	in	in	ADP
ap-1743	63	12	the	the	DET
ap-1743	63	13	ar	ar	PROPN
ap-1743	63	14	/	/	SYM
ap-1743	63	15	o2	o2	ADJ
ap-1743	63	16	gas	gas	NOUN
ap-1743	63	17	mixture	mixture	NOUN
ap-1743	63	18	was	be	AUX
ap-1743	63	19	raised	raise	VERB
ap-1743	63	20	,	,	PUNCT
ap-1743	63	21	and	and	CCONJ
ap-1743	63	22	the	the	DET
ap-1743	63	23	discharge	discharge	NOUN
ap-1743	63	24	power	power	NOUN
ap-1743	63	25	dropped	drop	VERB
ap-1743	63	26	.	.	PUNCT
ap-1743	64	1	when	when	SCONJ
ap-1743	64	2	the	the	DET
ap-1743	64	3	oxygen	oxygen	NOUN
ap-1743	64	4	content	content	NOUN
ap-1743	64	5	in	in	ADP
ap-1743	64	6	the	the	DET
ap-1743	64	7	ar	ar	PROPN
ap-1743	64	8	/	/	SYM
ap-1743	64	9	o2	o2	ADJ
ap-1743	64	10	gas	gas	NOUN
ap-1743	64	11	mixture	mixture	NOUN
ap-1743	64	12	was	be	AUX
ap-1743	64	13	increased	increase	VERB
ap-1743	64	14	to	to	ADP
ap-1743	64	15	5	5	NUM
ap-1743	64	16	÷	÷	NUM
ap-1743	64	17	7	7	NUM
ap-1743	64	18	%	%	NOUN
ap-1743	64	19	,	,	PUNCT
ap-1743	64	20	the	the	DET
ap-1743	64	21	deposition	deposition	NOUN
ap-1743	64	22	rate	rate	NOUN
ap-1743	64	23	was	be	AUX
ap-1743	64	24	observed	observe	VERB
ap-1743	64	25	to	to	PART
ap-1743	64	26	drop	drop	VERB
ap-1743	64	27	by	by	ADP
ap-1743	64	28	20	20	NUM
ap-1743	64	29	÷	÷	NUM
ap-1743	64	30	25	25	NUM
ap-1743	64	31	%	%	NOUN
ap-1743	64	32	.	.	PUNCT
ap-1743	65	1	the	the	DET
ap-1743	65	2	estimated	estimate	VERB
ap-1743	65	3	sputtering	sputtering	ADJ
ap-1743	65	4	coefficient	coefficient	NOUN
ap-1743	65	5	for	for	ADP
ap-1743	65	6	the	the	DET
ap-1743	65	7	zro2	zro2	PROPN
ap-1743	65	8	+	+	CCONJ
ap-1743	65	9	7	7	NUM
ap-1743	65	10	%	%	NOUN
ap-1743	65	11	y2o3	y2o3	PROPN
ap-1743	65	12	target	target	NOUN
ap-1743	65	13	was	be	AUX
ap-1743	65	14	yysz	yysz	NOUN
ap-1743	65	15	=	=	PUNCT
ap-1743	65	16	0.17	0.17	NUM
ap-1743	65	17	.	.	PUNCT
ap-1743	66	1	the	the	DET
ap-1743	66	2	dependence	dependence	NOUN
ap-1743	66	3	of	of	ADP
ap-1743	66	4	the	the	DET
ap-1743	66	5	phase	phase	NOUN
ap-1743	66	6	composition	composition	NOUN
ap-1743	66	7	in	in	ADP
ap-1743	66	8	the	the	DET
ap-1743	66	9	ysz	ysz	NOUN
ap-1743	66	10	films	film	NOUN
ap-1743	66	11	on	on	ADP
ap-1743	66	12	the	the	DET
ap-1743	66	13	annealing	anneal	VERB
ap-1743	66	14	temperature	temperature	NOUN
ap-1743	66	15	was	be	AUX
ap-1743	66	16	studied	study	VERB
ap-1743	66	17	,	,	PUNCT
ap-1743	66	18	with	with	ADP
ap-1743	66	19	si3n4	si3n4	PROPN
ap-1743	66	20	/	/	SYM
ap-1743	66	21	si	si	X
ap-1743	66	22	(	(	PUNCT
ap-1743	66	23	100	100	NUM
ap-1743	66	24	)	)	PUNCT
ap-1743	66	25	structures	structure	NOUN
ap-1743	66	26	used	use	VERB
ap-1743	66	27	as	as	ADP
ap-1743	66	28	substrates	substrate	NOUN
ap-1743	66	29	.	.	PUNCT
ap-1743	67	1	a	a	DET
ap-1743	67	2	silicon	silicon	NOUN
ap-1743	67	3	nitride	nitride	ADJ
ap-1743	67	4	layer	layer	NOUN
ap-1743	67	5	1	1	NUM
ap-1743	67	6	µm	µm	NOUN
ap-1743	67	7	in	in	ADP
ap-1743	67	8	thickness	thickness	NOUN
ap-1743	67	9	was	be	AUX
ap-1743	67	10	formed	form	VERB
ap-1743	67	11	on	on	ADP
ap-1743	67	12	the	the	DET
ap-1743	67	13	surface	surface	NOUN
ap-1743	67	14	of	of	ADP
ap-1743	67	15	the	the	DET
ap-1743	67	16	monocrystalline	monocrystalline	ADJ
ap-1743	67	17	silicon	silicon	NOUN
ap-1743	67	18	by	by	ADP
ap-1743	67	19	the	the	DET
ap-1743	67	20	cvd	cvd	PROPN
ap-1743	67	21	method	method	NOUN
ap-1743	67	22	.	.	PUNCT
ap-1743	68	1	yttria	yttria	NOUN
ap-1743	68	2	-	-	PUNCT
ap-1743	68	3	stabilized	stabilize	VERB
ap-1743	68	4	zirconia	zirconia	PROPN
ap-1743	68	5	thin	thin	ADJ
ap-1743	68	6	films	film	NOUN
ap-1743	68	7	were	be	AUX
ap-1743	68	8	deposited	deposit	VERB
ap-1743	68	9	up	up	ADP
ap-1743	68	10	to	to	ADP
ap-1743	68	11	a	a	DET
ap-1743	68	12	thickness	thickness	NOUN
ap-1743	68	13	of	of	ADP
ap-1743	68	14	more	more	ADJ
ap-1743	68	15	than	than	ADP
ap-1743	68	16	500	500	NUM
ap-1743	68	17	nm	nm	NOUN
ap-1743	68	18	under	under	ADP
ap-1743	68	19	the	the	DET
ap-1743	68	20	following	following	ADJ
ap-1743	68	21	conditions	condition	NOUN
ap-1743	68	22	:	:	PUNCT
ap-1743	68	23	forward	forward	PROPN
ap-1743	68	24	power	power	PROPN
ap-1743	68	25	125w	125w	PROPN
ap-1743	68	26	,	,	PUNCT
ap-1743	68	27	reflected	reflect	VERB
ap-1743	68	28	power	power	NOUN
ap-1743	68	29	10w	10w	NOUN
ap-1743	68	30	,	,	PUNCT
ap-1743	68	31	qar	qar	NOUN
ap-1743	68	32	=	=	NOUN
ap-1743	68	33	35	35	NUM
ap-1743	68	34	sccm	sccm	NOUN
ap-1743	68	35	,	,	PUNCT
ap-1743	68	36	qo2	qo2	X
ap-1743	69	1	=	=	NOUN
ap-1743	69	2	25	25	NUM
ap-1743	69	3	sccm	sccm	NOUN
ap-1743	69	4	.	.	PUNCT
ap-1743	70	1	then	then	ADV
ap-1743	70	2	the	the	DET
ap-1743	70	3	samples	sample	NOUN
ap-1743	70	4	were	be	AUX
ap-1743	70	5	annealed	anneal	VERB
ap-1743	70	6	in	in	ADP
ap-1743	70	7	air	air	NOUN
ap-1743	70	8	over	over	ADP
ap-1743	70	9	the	the	DET
ap-1743	70	10	temperature	temperature	NOUN
ap-1743	70	11	range	range	NOUN
ap-1743	70	12	of	of	ADP
ap-1743	70	13	700÷900	700÷900	NUM
ap-1743	70	14	◦	◦	NOUN
ap-1743	70	15	c	c	NOUN
ap-1743	70	16	,	,	PUNCT
ap-1743	70	17	for	for	ADP
ap-1743	70	18	15min	15min	NUM
ap-1743	70	19	.	.	PUNCT
ap-1743	71	1	xrd	xrd	PROPN
ap-1743	71	2	was	be	AUX
ap-1743	71	3	used	use	VERB
ap-1743	71	4	to	to	PART
ap-1743	71	5	analyze	analyze	VERB
ap-1743	71	6	the	the	DET
ap-1743	71	7	positions	position	NOUN
ap-1743	71	8	and	and	CCONJ
ap-1743	71	9	the	the	DET
ap-1743	71	10	intensity	intensity	NOUN
ap-1743	71	11	of	of	ADP
ap-1743	71	12	the	the	DET
ap-1743	71	13	peaks	peak	NOUN
ap-1743	71	14	in	in	ADP
ap-1743	71	15	the	the	DET
ap-1743	71	16	respective	respective	ADJ
ap-1743	71	17	zirconia	zirconia	NOUN
ap-1743	71	18	phases	phase	NOUN
ap-1743	71	19	156	156	NUM
ap-1743	71	20	vol	vol	NOUN
ap-1743	71	21	.	.	PUNCT
ap-1743	72	1	53	53	NUM
ap-1743	72	2	no	no	NOUN
ap-1743	72	3	.	.	PUNCT
ap-1743	73	1	2/2013	2/2013	NUM
ap-1743	73	2	physical	physical	ADJ
ap-1743	73	3	and	and	CCONJ
ap-1743	73	4	electrical	electrical	ADJ
ap-1743	73	5	properties	property	NOUN
ap-1743	73	6	of	of	ADP
ap-1743	73	7	yttria	yttria	NOUN
ap-1743	73	8	-	-	PUNCT
ap-1743	73	9	stabilized	stabilize	VERB
ap-1743	73	10	zirconia	zirconia	NOUN
ap-1743	73	11	thin	thin	ADJ
ap-1743	73	12	films	film	NOUN
ap-1743	73	13	d	d	X
ap-1743	73	14	e	e	NOUN
ap-1743	73	15	p	p	NOUN
ap-1743	73	16	o	o	X
ap-1743	73	17	s	s	VERB
ap-1743	73	18	i	i	PRON
ap-1743	74	1	t	t	X
ap-1743	75	1	i	i	PRON
ap-1743	75	2	o	o	VERB
ap-1743	76	1	n	n	CCONJ
ap-1743	76	2	r	r	NOUN
ap-1743	76	3	a	a	DET
ap-1743	76	4	t	t	NOUN
ap-1743	76	5	e	e	NOUN
ap-1743	76	6	,	,	PUNCT
ap-1743	76	7	n	n	CCONJ
ap-1743	76	8	m	m	PROPN
ap-1743	76	9	/	/	SYM
ap-1743	76	10	s	s	PROPN
ap-1743	76	11	0	0	NUM
ap-1743	76	12	0.01	0.01	NUM
ap-1743	76	13	0.02	0.02	NUM
ap-1743	76	14	0.03	0.03	NUM
ap-1743	76	15	0.04	0.04	NUM
ap-1743	76	16	0.05	0.05	NUM
ap-1743	76	17	5	5	NUM
ap-1743	76	18	10	10	NUM
ap-1743	76	19	15	15	NUM
ap-1743	76	20	20	20	NUM
ap-1743	76	21	25	25	NUM
ap-1743	76	22	o	o	NOUN
ap-1743	76	23	,	,	PUNCT
ap-1743	77	1	%	%	INTJ
ap-1743	77	2	2	2	NUM
ap-1743	77	3	а	а	NOUN
ap-1743	77	4	b	b	PROPN
ap-1743	77	5	figure	figure	NOUN
ap-1743	77	6	3	3	NUM
ap-1743	77	7	.	.	PUNCT
ap-1743	77	8	ysz	ysz	NOUN
ap-1743	77	9	film	film	NOUN
ap-1743	77	10	deposition	deposition	NOUN
ap-1743	77	11	rate	rate	NOUN
ap-1743	77	12	as	as	ADP
ap-1743	77	13	a	a	DET
ap-1743	77	14	function	function	NOUN
ap-1743	77	15	of	of	ADP
ap-1743	77	16	oxygen	oxygen	NOUN
ap-1743	77	17	percentage	percentage	NOUN
ap-1743	77	18	in	in	ADP
ap-1743	77	19	the	the	DET
ap-1743	77	20	ar	ar	PROPN
ap-1743	77	21	/	/	SYM
ap-1743	77	22	o2	o2	ADJ
ap-1743	77	23	gas	gas	NOUN
ap-1743	77	24	mixture	mixture	NOUN
ap-1743	77	25	at	at	ADP
ap-1743	77	26	various	various	ADJ
ap-1743	77	27	forward	forward	ADJ
ap-1743	77	28	power	power	NOUN
ap-1743	77	29	values	value	NOUN
ap-1743	77	30	:	:	PUNCT
ap-1743	77	31	a	a	PRON
ap-1743	77	32	–	–	PUNCT
ap-1743	77	33	80w	80w	NOUN
ap-1743	77	34	,	,	PUNCT
ap-1743	77	35	b	b	X
ap-1743	77	36	–	–	PUNCT
ap-1743	77	37	125w	125w	PROPN
ap-1743	77	38	.	.	PUNCT
ap-1743	78	1	(	(	PUNCT
ap-1743	78	2	fig	fig	NOUN
ap-1743	78	3	.	.	PUNCT
ap-1743	79	1	4	4	NUM
ap-1743	79	2	)	)	PUNCT
ap-1743	79	3	.	.	PUNCT
ap-1743	80	1	it	it	PRON
ap-1743	80	2	was	be	AUX
ap-1743	80	3	determined	determine	VERB
ap-1743	80	4	that	that	SCONJ
ap-1743	80	5	regardless	regardless	ADV
ap-1743	80	6	of	of	ADP
ap-1743	80	7	the	the	DET
ap-1743	80	8	deposition	deposition	NOUN
ap-1743	80	9	conditions	condition	NOUN
ap-1743	80	10	,	,	PUNCT
ap-1743	80	11	wide	wide	ADJ
ap-1743	80	12	implicit	implicit	ADJ
ap-1743	80	13	peaks	peak	NOUN
ap-1743	80	14	with	with	ADP
ap-1743	80	15	a	a	DET
ap-1743	80	16	high	high	ADJ
ap-1743	80	17	noise	noise	NOUN
ap-1743	80	18	level	level	NOUN
ap-1743	80	19	were	be	AUX
ap-1743	80	20	present	present	ADJ
ap-1743	80	21	in	in	ADP
ap-1743	80	22	the	the	DET
ap-1743	80	23	x	x	NOUN
ap-1743	80	24	-	-	NOUN
ap-1743	80	25	ray	ray	NOUN
ap-1743	80	26	diagrams	diagram	NOUN
ap-1743	80	27	of	of	ADP
ap-1743	80	28	the	the	DET
ap-1743	80	29	asdeposited	asdeposite	VERB
ap-1743	80	30	films	film	NOUN
ap-1743	80	31	,	,	PUNCT
ap-1743	80	32	implying	imply	VERB
ap-1743	80	33	that	that	SCONJ
ap-1743	80	34	originally	originally	ADV
ap-1743	80	35	the	the	DET
ap-1743	80	36	films	film	NOUN
ap-1743	80	37	were	be	AUX
ap-1743	80	38	almost	almost	ADV
ap-1743	80	39	non	non	ADJ
ap-1743	80	40	-	-	ADJ
ap-1743	80	41	crystalline	crystalline	ADJ
ap-1743	80	42	and/or	and/or	CCONJ
ap-1743	80	43	amorphous	amorphous	ADJ
ap-1743	80	44	(	(	PUNCT
ap-1743	80	45	fig	fig	NOUN
ap-1743	80	46	.	.	PUNCT
ap-1743	80	47	4a	4a	NUM
ap-1743	80	48	)	)	PUNCT
ap-1743	80	49	.	.	PUNCT
ap-1743	81	1	the	the	DET
ap-1743	81	2	positions	position	NOUN
ap-1743	81	3	of	of	ADP
ap-1743	81	4	the	the	DET
ap-1743	81	5	peaks	peak	NOUN
ap-1743	81	6	corresponded	correspond	VERB
ap-1743	81	7	to	to	ADP
ap-1743	81	8	the	the	DET
ap-1743	81	9	monoclinic	monoclinic	ADJ
ap-1743	81	10	modification	modification	NOUN
ap-1743	81	11	of	of	ADP
ap-1743	81	12	the	the	DET
ap-1743	81	13	crystalline	crystalline	NOUN
ap-1743	81	14	structure	structure	NOUN
ap-1743	81	15	.	.	PUNCT
ap-1743	82	1	annealing	anneal	VERB
ap-1743	82	2	at	at	ADP
ap-1743	82	3	temperatures	temperature	NOUN
ap-1743	82	4	up	up	ADV
ap-1743	82	5	to	to	PART
ap-1743	82	6	800	800	NUM
ap-1743	82	7	◦	◦	NOUN
ap-1743	82	8	c	c	NOUN
ap-1743	82	9	resulted	result	VERB
ap-1743	82	10	in	in	ADP
ap-1743	82	11	an	an	DET
ap-1743	82	12	increase	increase	NOUN
ap-1743	82	13	(	(	PUNCT
ap-1743	82	14	−111	−111	NOUN
ap-1743	82	15	)	)	PUNCT
ap-1743	82	16	and	and	CCONJ
ap-1743	82	17	(	(	PUNCT
ap-1743	82	18	022	022	NUM
ap-1743	82	19	)	)	PUNCT
ap-1743	82	20	in	in	ADP
ap-1743	82	21	the	the	DET
ap-1743	82	22	peak	peak	NOUN
ap-1743	82	23	intensity	intensity	NOUN
ap-1743	82	24	of	of	ADP
ap-1743	82	25	the	the	DET
ap-1743	82	26	monoclinic	monoclinic	ADJ
ap-1743	82	27	modification	modification	NOUN
ap-1743	82	28	of	of	ADP
ap-1743	82	29	the	the	DET
ap-1743	82	30	crystal	crystal	NOUN
ap-1743	82	31	lattice	lattice	NOUN
ap-1743	82	32	,	,	PUNCT
ap-1743	82	33	and	and	CCONJ
ap-1743	82	34	evoked	evoke	VERB
ap-1743	82	35	cubic	cubic	ADJ
ap-1743	82	36	lattice	lattice	NOUN
ap-1743	82	37	peaks	peak	NOUN
ap-1743	82	38	(	(	PUNCT
ap-1743	82	39	fig	fig	NOUN
ap-1743	82	40	.	.	PUNCT
ap-1743	83	1	4b	4b	PROPN
ap-1743	83	2	,	,	PUNCT
ap-1743	83	3	c	c	NOUN
ap-1743	83	4	)	)	PUNCT
ap-1743	83	5	.	.	PUNCT
ap-1743	84	1	the	the	DET
ap-1743	84	2	peak	peak	NOUN
ap-1743	84	3	positions	position	NOUN
ap-1743	84	4	in	in	ADP
ap-1743	84	5	the	the	DET
ap-1743	84	6	films	film	NOUN
ap-1743	84	7	annealed	anneal	VERB
ap-1743	84	8	at	at	ADP
ap-1743	84	9	temperatures	temperature	NOUN
ap-1743	84	10	above	above	ADP
ap-1743	84	11	820	820	NUM
ap-1743	84	12	◦	◦	NOUN
ap-1743	84	13	c	c	NOUN
ap-1743	84	14	corresponded	correspond	VERB
ap-1743	84	15	to	to	ADP
ap-1743	84	16	the	the	DET
ap-1743	84	17	pure	pure	ADJ
ap-1743	84	18	cubic	cubic	ADJ
ap-1743	84	19	modification	modification	NOUN
ap-1743	84	20	of	of	ADP
ap-1743	84	21	the	the	DET
ap-1743	84	22	crystal	crystal	PROPN
ap-1743	84	23	lattice	lattice	PROPN
ap-1743	84	24	.	.	PUNCT
ap-1743	85	1	(	(	PUNCT
ap-1743	85	2	111	111	NUM
ap-1743	85	3	)	)	PUNCT
ap-1743	85	4	,	,	PUNCT
ap-1743	85	5	(	(	PUNCT
ap-1743	85	6	200	200	NUM
ap-1743	85	7	)	)	PUNCT
ap-1743	85	8	,	,	PUNCT
ap-1743	85	9	(	(	PUNCT
ap-1743	85	10	220	220	NUM
ap-1743	85	11	)	)	PUNCT
ap-1743	85	12	,	,	PUNCT
ap-1743	85	13	(	(	PUNCT
ap-1743	85	14	311	311	NUM
ap-1743	85	15	)	)	PUNCT
ap-1743	85	16	,	,	PUNCT
ap-1743	85	17	and	and	CCONJ
ap-1743	85	18	(	(	PUNCT
ap-1743	85	19	400	400	X
ap-1743	85	20	)	)	PUNCT
ap-1743	85	21	cubic	cubic	ADJ
ap-1743	85	22	peaks	peak	NOUN
ap-1743	85	23	with	with	ADP
ap-1743	85	24	preferable	preferable	ADJ
ap-1743	85	25	orientation	orientation	NOUN
ap-1743	85	26	(	(	PUNCT
ap-1743	85	27	200	200	NUM
ap-1743	85	28	)	)	PUNCT
ap-1743	85	29	were	be	AUX
ap-1743	85	30	observed	observe	VERB
ap-1743	85	31	(	(	PUNCT
ap-1743	85	32	fig	fig	NOUN
ap-1743	85	33	.	.	PUNCT
ap-1743	85	34	4d	4d	NUM
ap-1743	85	35	)	)	PUNCT
ap-1743	85	36	.	.	PUNCT
ap-1743	86	1	the	the	DET
ap-1743	86	2	frequency	frequency	NOUN
ap-1743	86	3	curves	curve	NOUN
ap-1743	86	4	for	for	ADP
ap-1743	86	5	the	the	DET
ap-1743	86	6	dielectric	dielectric	ADJ
ap-1743	86	7	constant	constant	ADJ
ap-1743	86	8	and	and	CCONJ
ap-1743	86	9	the	the	DET
ap-1743	86	10	dielectric	dielectric	ADJ
ap-1743	86	11	loss	loss	NOUN
ap-1743	86	12	tangent	tangent	NOUN
ap-1743	86	13	in	in	ADP
ap-1743	86	14	ysz	ysz	NOUN
ap-1743	86	15	films	film	NOUN
ap-1743	86	16	were	be	AUX
ap-1743	86	17	obtained	obtain	VERB
ap-1743	86	18	.	.	PUNCT
ap-1743	87	1	figures	figure	NOUN
ap-1743	87	2	5	5	NUM
ap-1743	87	3	and	and	CCONJ
ap-1743	87	4	6	6	NUM
ap-1743	87	5	plot	plot	NOUN
ap-1743	87	6	the	the	DET
ap-1743	87	7	dielectric	dielectric	ADJ
ap-1743	87	8	constant	constant	ADJ
ap-1743	88	1	and	and	CCONJ
ap-1743	88	2	the	the	DET
ap-1743	88	3	loss	loss	NOUN
ap-1743	88	4	tangent	tangent	NOUN
ap-1743	88	5	curves	curve	NOUN
ap-1743	88	6	of	of	ADP
ap-1743	88	7	the	the	DET
ap-1743	88	8	deposited	deposit	VERB
ap-1743	88	9	ysz	ysz	NOUN
ap-1743	88	10	films	film	NOUN
ap-1743	88	11	in	in	ADP
ap-1743	88	12	ni	ni	PROPN
ap-1743	88	13	/	/	SYM
ap-1743	88	14	ysz	ysz	NOUN
ap-1743	88	15	/	/	SYM
ap-1743	88	16	pt	pt	PROPN
ap-1743	88	17	and	and	CCONJ
ap-1743	88	18	ni	ni	PROPN
ap-1743	88	19	/	/	SYM
ap-1743	88	20	ysz	ysz	NOUN
ap-1743	88	21	/	/	SYM
ap-1743	88	22	si	si	NOUN
ap-1743	88	23	structures	structure	NOUN
ap-1743	88	24	.	.	PUNCT
ap-1743	89	1	the	the	DET
ap-1743	89	2	following	follow	VERB
ap-1743	89	3	thin	thin	ADJ
ap-1743	89	4	-	-	PUNCT
ap-1743	89	5	film	film	NOUN
ap-1743	89	6	ysz	ysz	NOUN
ap-1743	89	7	deposition	deposition	NOUN
ap-1743	89	8	conditions	condition	NOUN
ap-1743	89	9	were	be	AUX
ap-1743	89	10	applied	apply	VERB
ap-1743	89	11	:	:	PUNCT
ap-1743	89	12	forward	forward	ADJ
ap-1743	89	13	power	power	PROPN
ap-1743	89	14	125w	125w	PROPN
ap-1743	89	15	,	,	PUNCT
ap-1743	89	16	reflected	reflect	VERB
ap-1743	89	17	power	power	NOUN
ap-1743	89	18	11w	11w	NOUN
ap-1743	89	19	,	,	PUNCT
ap-1743	89	20	qar	qar	NOUN
ap-1743	89	21	=	=	PROPN
ap-1743	89	22	50	50	NUM
ap-1743	89	23	sccm	sccm	NOUN
ap-1743	89	24	,	,	PUNCT
ap-1743	89	25	qo2	qo2	X
ap-1743	90	1	=	=	SYM
ap-1743	90	2	10	10	NUM
ap-1743	90	3	sccm	sccm	NOUN
ap-1743	90	4	.	.	PUNCT
ap-1743	91	1	the	the	DET
ap-1743	91	2	dielectric	dielectric	ADJ
ap-1743	91	3	constant	constant	ADJ
ap-1743	91	4	ε	ε	PROPN
ap-1743	91	5	=	=	SYM
ap-1743	91	6	6.0	6.0	NUM
ap-1743	91	7	and	and	CCONJ
ap-1743	91	8	the	the	DET
ap-1743	91	9	loss	loss	NOUN
ap-1743	91	10	tangent	tangent	NOUN
ap-1743	91	11	tg	tg	PROPN
ap-1743	91	12	δ	δ	PROPN
ap-1743	91	13	=	=	PUNCT
ap-1743	92	1	0.11	0.11	NUM
ap-1743	92	2	were	be	AUX
ap-1743	92	3	observed	observe	VERB
ap-1743	92	4	at	at	ADP
ap-1743	92	5	1mhz	1mhz	NUM
ap-1743	92	6	of	of	ADP
ap-1743	92	7	frequency	frequency	NOUN
ap-1743	92	8	for	for	ADP
ap-1743	92	9	the	the	DET
ap-1743	92	10	deposited	deposit	VERB
ap-1743	92	11	films	film	NOUN
ap-1743	92	12	in	in	ADP
ap-1743	92	13	ni	ni	PROPN
ap-1743	92	14	/	/	SYM
ap-1743	92	15	ysz	ysz	NOUN
ap-1743	92	16	/	/	SYM
ap-1743	92	17	pt	pt	NOUN
ap-1743	92	18	structures	structure	NOUN
ap-1743	92	19	,	,	PUNCT
ap-1743	92	20	whereas	whereas	SCONJ
ap-1743	92	21	ε	ε	PROPN
ap-1743	92	22	=	=	SYM
ap-1743	92	23	13.2	13.2	NUM
ap-1743	92	24	,	,	PUNCT
ap-1743	92	25	tg	tg	PROPN
ap-1743	92	26	δ	δ	PROPN
ap-1743	92	27	=	=	PUNCT
ap-1743	92	28	0.4	0.4	NUM
ap-1743	92	29	were	be	AUX
ap-1743	92	30	observed	observe	VERB
ap-1743	92	31	at	at	ADP
ap-1743	92	32	1	1	NUM
ap-1743	92	33	khz	khz	NOUN
ap-1743	92	34	of	of	ADP
ap-1743	92	35	frequency	frequency	NOUN
ap-1743	92	36	,	,	PUNCT
ap-1743	92	37	respectively	respectively	ADV
ap-1743	92	38	.	.	PUNCT
ap-1743	93	1	ni	ni	PROPN
ap-1743	93	2	/	/	SYM
ap-1743	93	3	ysz	ysz	NOUN
ap-1743	93	4	/	/	SYM
ap-1743	93	5	si	si	NOUN
ap-1743	93	6	structures	structure	NOUN
ap-1743	93	7	exhibited	exhibit	VERB
ap-1743	93	8	dielectric	dielectric	ADJ
ap-1743	93	9	constant	constant	ADJ
ap-1743	93	10	ε	ε	PROPN
ap-1743	93	11	=	=	SYM
ap-1743	93	12	6.0	6.0	NUM
ap-1743	93	13	and	and	CCONJ
ap-1743	93	14	the	the	DET
ap-1743	93	15	loss	loss	NOUN
ap-1743	93	16	tangent	tangent	NOUN
ap-1743	93	17	tg	tg	PROPN
ap-1743	93	18	δ	δ	PROPN
ap-1743	93	19	=	=	PROPN
ap-1743	93	20	0.06	0.06	NUM
ap-1743	93	21	at	at	ADP
ap-1743	93	22	1mhz	1mhz	NUM
ap-1743	93	23	,	,	PUNCT
ap-1743	93	24	and	and	CCONJ
ap-1743	93	25	ε	ε	PROPN
ap-1743	93	26	=	=	SYM
ap-1743	93	27	6.8	6.8	NUM
ap-1743	93	28	and	and	CCONJ
ap-1743	93	29	tg	tg	ADP
ap-1743	93	30	δ	δ	PROPN
ap-1743	93	31	=	=	NOUN
ap-1743	93	32	0.34	0.34	NUM
ap-1743	93	33	at	at	ADP
ap-1743	93	34	1	1	NUM
ap-1743	93	35	khz	khz	NOUN
ap-1743	93	36	,	,	PUNCT
ap-1743	93	37	respectively	respectively	ADV
ap-1743	93	38	.	.	PUNCT
ap-1743	94	1	at	at	ADP
ap-1743	94	2	frequencies	frequency	NOUN
ap-1743	94	3	below	below	ADP
ap-1743	94	4	500hz	500hz	NOUN
ap-1743	94	5	,	,	PUNCT
ap-1743	94	6	the	the	DET
ap-1743	94	7	capacitor	capacitor	NOUN
ap-1743	94	8	structures	structure	NOUN
ap-1743	94	9	were	be	AUX
ap-1743	94	10	characterized	characterize	VERB
ap-1743	94	11	by	by	ADP
ap-1743	94	12	high	high	ADJ
ap-1743	94	13	values	value	NOUN
ap-1743	94	14	of	of	ADP
ap-1743	94	15	dielectric	dielectric	ADJ
ap-1743	94	16	loss	loss	NOUN
ap-1743	94	17	and	and	CCONJ
ap-1743	94	18	electric	electric	ADJ
ap-1743	94	19	conductivity	conductivity	NOUN
ap-1743	94	20	.	.	PUNCT
ap-1743	95	1	as	as	ADP
ap-1743	95	2	a	a	DET
ap-1743	95	3	result	result	NOUN
ap-1743	95	4	of	of	ADP
ap-1743	95	5	annealing	anneal	VERB
ap-1743	95	6	in	in	ADP
ap-1743	95	7	air	air	NOUN
ap-1743	95	8	under	under	ADP
ap-1743	95	9	a	a	DET
ap-1743	95	10	temperature	temperature	NOUN
ap-1743	95	11	exceeding	exceed	VERB
ap-1743	95	12	820	820	NUM
ap-1743	95	13	◦	◦	NOUN
ap-1743	95	14	c	c	NOUN
ap-1743	95	15	as	as	SCONJ
ap-1743	95	16	the	the	DET
ap-1743	95	17	ysz	ysz	NOUN
ap-1743	95	18	cubic	cubic	ADJ
ap-1743	95	19	structure	structure	NOUN
ap-1743	95	20	was	be	AUX
ap-1743	95	21	formed	form	VERB
ap-1743	95	22	,	,	PUNCT
ap-1743	95	23	the	the	DET
ap-1743	95	24	dielectric	dielectric	ADJ
ap-1743	95	25	constant	constant	ADJ
ap-1743	95	26	of	of	ADP
ap-1743	95	27	the	the	DET
ap-1743	95	28	films	film	NOUN
ap-1743	95	29	increased	increase	VERB
ap-1743	95	30	,	,	PUNCT
ap-1743	95	31	whereas	whereas	SCONJ
ap-1743	95	32	the	the	DET
ap-1743	95	33	loss	loss	NOUN
ap-1743	95	34	tangent	tangent	NOUN
ap-1743	95	35	dropped	drop	VERB
ap-1743	95	36	.	.	PUNCT
ap-1743	96	1	figures	figure	NOUN
ap-1743	96	2	7	7	NUM
ap-1743	96	3	and	and	CCONJ
ap-1743	96	4	8	8	NUM
ap-1743	96	5	plot	plot	NOUN
ap-1743	96	6	the	the	DET
ap-1743	96	7	dielectric	dielectric	ADJ
ap-1743	96	8	constant	constant	ADJ
ap-1743	96	9	and	and	CCONJ
ap-1743	96	10	loss	loss	NOUN
ap-1743	96	11	tangent	tangent	NOUN
ap-1743	96	12	curves	curve	NOUN
ap-1743	96	13	for	for	SCONJ
ap-1743	96	14	ni	ni	PROPN
ap-1743	96	15	/	/	SYM
ap-1743	96	16	ysz	ysz	NOUN
ap-1743	96	17	/	/	SYM
ap-1743	96	18	pt	pt	PROPN
ap-1743	96	19	and	and	CCONJ
ap-1743	96	20	ni	ni	PROPN
ap-1743	96	21	/	/	SYM
ap-1743	96	22	ysz	ysz	NOUN
ap-1743	96	23	/	/	SYM
ap-1743	96	24	si	si	NOUN
ap-1743	96	25	structures	structure	NOUN
ap-1743	96	26	annealed	anneal	VERB
ap-1743	96	27	in	in	ADP
ap-1743	96	28	air	air	NOUN
ap-1743	96	29	at	at	ADP
ap-1743	96	30	a	a	DET
ap-1743	96	31	temperature	temperature	NOUN
ap-1743	96	32	of	of	ADP
ap-1743	96	33	850	850	NUM
ap-1743	96	34	◦	◦	NOUN
ap-1743	96	35	c	c	NOUN
ap-1743	96	36	(	(	PUNCT
ap-1743	96	37	annealing	anneal	VERB
ap-1743	96	38	time	time	NOUN
ap-1743	96	39	15min	15min	NUM
ap-1743	96	40	)	)	PUNCT
ap-1743	96	41	.	.	PUNCT
ap-1743	97	1	the	the	DET
ap-1743	97	2	ysz	ysz	NOUN
ap-1743	97	3	films	film	NOUN
ap-1743	97	4	deposited	deposit	VERB
ap-1743	97	5	on	on	ADP
ap-1743	97	6	the	the	DET
ap-1743	97	7	pt	pt	PROPN
ap-1743	97	8	electrode	electrode	NOUN
ap-1743	97	9	demonstrate	demonstrate	VERB
ap-1743	97	10	a	a	DET
ap-1743	97	11	dielectric	dielectric	ADJ
ap-1743	97	12	constant	constant	ADJ
ap-1743	97	13	such	such	ADJ
ap-1743	97	14	as	as	ADP
ap-1743	97	15	ε	ε	PROPN
ap-1743	97	16	>	>	X
ap-1743	97	17	20	20	NUM
ap-1743	97	18	and	and	CCONJ
ap-1743	97	19	loss	loss	NOUN
ap-1743	97	20	tangent	tangent	NOUN
ap-1743	97	21	tg	tg	PROPN
ap-1743	97	22	δ	δ	PROPN
ap-1743	97	23	<	<	X
ap-1743	97	24	0.05	0.05	NUM
ap-1743	97	25	in	in	ADP
ap-1743	97	26	25	25	NUM
ap-1743	97	27	hz	hz	VERB
ap-1743	97	28	÷	÷	NUM
ap-1743	97	29	1.0	1.0	NUM
ap-1743	97	30	mhz	mhz	NOUN
ap-1743	97	31	frequency	frequency	NOUN
ap-1743	97	32	figure	figure	NOUN
ap-1743	97	33	4	4	NUM
ap-1743	97	34	.	.	PUNCT
ap-1743	97	35	xrd	xrd	PROPN
ap-1743	97	36	patterns	pattern	NOUN
ap-1743	97	37	of	of	ADP
ap-1743	97	38	the	the	DET
ap-1743	97	39	ysz	ysz	NOUN
ap-1743	97	40	films	film	NOUN
ap-1743	97	41	annealed	anneal	VERB
ap-1743	97	42	at	at	ADP
ap-1743	97	43	different	different	ADJ
ap-1743	97	44	temperatures	temperature	NOUN
ap-1743	97	45	:	:	PUNCT
ap-1743	97	46	a	a	PRON
ap-1743	97	47	–	–	PUNCT
ap-1743	97	48	as	as	ADV
ap-1743	97	49	-	-	PUNCT
ap-1743	97	50	deposited	deposit	VERB
ap-1743	97	51	,	,	PUNCT
ap-1743	97	52	b	b	X
ap-1743	97	53	–	–	PUNCT
ap-1743	97	54	700	700	NUM
ap-1743	97	55	◦	◦	NOUN
ap-1743	97	56	c	c	NOUN
ap-1743	97	57	,	,	PUNCT
ap-1743	97	58	c	c	X
ap-1743	97	59	–	–	PUNCT
ap-1743	97	60	800	800	NUM
ap-1743	97	61	◦	◦	NOUN
ap-1743	97	62	c	c	NOUN
ap-1743	97	63	,	,	PUNCT
ap-1743	97	64	d	d	NOUN
ap-1743	97	65	–	–	PUNCT
ap-1743	97	66	900	900	NUM
ap-1743	97	67	◦	◦	NOUN
ap-1743	97	68	c	c	NOUN
ap-1743	97	69	(	(	PUNCT
ap-1743	97	70	annealing	anneal	VERB
ap-1743	97	71	time	time	NOUN
ap-1743	97	72	15min	15min	NUM
ap-1743	97	73	)	)	PUNCT
ap-1743	97	74	.	.	PUNCT
ap-1743	98	1	l	l	NOUN
ap-1743	99	1	o	o	X
ap-1743	99	2	s	s	X
ap-1743	99	3	s	s	X
ap-1743	99	4	t	t	NOUN
ap-1743	99	5	a	a	DET
ap-1743	99	6	n	n	CCONJ
ap-1743	99	7	g	g	NOUN
ap-1743	99	8	e	e	PROPN
ap-1743	99	9	n	n	PRON
ap-1743	99	10	t	t	PROPN
ap-1743	99	11	,	,	PUNCT
ap-1743	99	12	t	t	PROPN
ap-1743	99	13	g	g	PROPN
ap-1743	99	14	δ	δ	PROPN
ap-1743	99	15	10	10	NUM
ap-1743	99	16	10	10	NUM
ap-1743	99	17	10101010	10101010	NUM
ap-1743	99	18	5	5	NUM
ap-1743	99	19	0.2	0.2	NUM
ap-1743	99	20	0	0	NUM
ap-1743	99	21	0	0	NUM
ap-1743	99	22	10	10	NUM
ap-1743	99	23	0.4	0.4	NUM
ap-1743	99	24	0.6	0.6	NUM
ap-1743	99	25	15	15	NUM
ap-1743	99	26	0.8	0.8	NUM
ap-1743	99	27	20	20	NUM
ap-1743	99	28	1.0	1.0	NUM
ap-1743	99	29	32	32	NUM
ap-1743	99	30	4	4	NUM
ap-1743	99	31	5	5	NUM
ap-1743	99	32	6	6	NUM
ap-1743	99	33	frequency	frequency	NOUN
ap-1743	99	34	,	,	PUNCT
ap-1743	99	35	hz	hz	VERB
ap-1743	99	36	d	d	NOUN
ap-1743	99	37	i	i	NOUN
ap-1743	99	38	e	e	NOUN
ap-1743	99	39	l	l	NOUN
ap-1743	99	40	e	e	X
ap-1743	99	41	c	c	NOUN
ap-1743	99	42	t	t	NOUN
ap-1743	99	43	r	r	NOUN
ap-1743	100	1	i	i	NOUN
ap-1743	100	2	c	c	NOUN
ap-1743	100	3	c	c	NOUN
ap-1743	101	1	o	o	NOUN
ap-1743	101	2	n	n	X
ap-1743	101	3	s	s	PROPN
ap-1743	101	4	t	t	NOUN
ap-1743	101	5	a	a	PRON
ap-1743	101	6	n	n	NUM
ap-1743	101	7	t	t	NOUN
ap-1743	101	8	,	,	PUNCT
ap-1743	101	9	ε	ε	PROPN
ap-1743	101	10	figure	figure	VERB
ap-1743	101	11	5	5	NUM
ap-1743	101	12	.	.	PUNCT
ap-1743	101	13	dielectric	dielectric	ADJ
ap-1743	101	14	constant	constant	ADJ
ap-1743	101	15	and	and	CCONJ
ap-1743	101	16	loss	loss	NOUN
ap-1743	101	17	tangent	tangent	NOUN
ap-1743	101	18	vs.	vs.	ADP
ap-1743	101	19	frequency	frequency	NOUN
ap-1743	101	20	curves	curve	NOUN
ap-1743	101	21	for	for	ADP
ap-1743	101	22	as	as	ADV
ap-1743	101	23	-	-	PUNCT
ap-1743	101	24	deposited	deposit	VERB
ap-1743	101	25	ysz	ysz	NOUN
ap-1743	101	26	films	film	NOUN
ap-1743	101	27	in	in	ADP
ap-1743	101	28	ni	ni	PROPN
ap-1743	101	29	/	/	SYM
ap-1743	101	30	ysz	ysz	NOUN
ap-1743	101	31	/	/	SYM
ap-1743	101	32	pt	pt	NOUN
ap-1743	101	33	structures	structure	NOUN
ap-1743	101	34	.	.	PUNCT
ap-1743	102	1	10	10	NUM
ap-1743	102	2	2	2	NUM
ap-1743	102	3	5	5	NUM
ap-1743	102	4	0	0	NUM
ap-1743	102	5	10	10	NUM
ap-1743	102	6	15	15	NUM
ap-1743	102	7	20	20	NUM
ap-1743	102	8	d	d	NOUN
ap-1743	102	9	i	i	NOUN
ap-1743	102	10	e	e	NOUN
ap-1743	102	11	l	l	NOUN
ap-1743	102	12	e	e	X
ap-1743	102	13	c	c	NOUN
ap-1743	102	14	t	t	NOUN
ap-1743	102	15	r	r	NOUN
ap-1743	103	1	i	i	NOUN
ap-1743	103	2	c	c	NOUN
ap-1743	103	3	c	c	NOUN
ap-1743	104	1	o	o	NOUN
ap-1743	104	2	n	n	X
ap-1743	104	3	s	s	PROPN
ap-1743	104	4	t	t	NOUN
ap-1743	104	5	a	a	PRON
ap-1743	104	6	n	n	NUM
ap-1743	104	7	t	t	NOUN
ap-1743	104	8	,	,	PUNCT
ap-1743	104	9	ε	ε	PROPN
ap-1743	104	10	l	l	NOUN
ap-1743	105	1	o	o	X
ap-1743	105	2	s	s	X
ap-1743	105	3	s	s	X
ap-1743	105	4	t	t	NOUN
ap-1743	105	5	a	a	DET
ap-1743	105	6	n	n	CCONJ
ap-1743	105	7	g	g	NOUN
ap-1743	105	8	e	e	PROPN
ap-1743	105	9	n	n	DET
ap-1743	105	10	t	t	PROPN
ap-1743	105	11	,	,	PUNCT
ap-1743	105	12	t	t	PROPN
ap-1743	105	13	g	g	PROPN
ap-1743	105	14	δ	δ	PROPN
ap-1743	105	15	10	10	NUM
ap-1743	105	16	10	10	NUM
ap-1743	105	17	101010	101010	NUM
ap-1743	105	18	0.2	0.2	NUM
ap-1743	105	19	0	0	NUM
ap-1743	105	20	0.4	0.4	NUM
ap-1743	105	21	0.6	0.6	NUM
ap-1743	105	22	0.8	0.8	NUM
ap-1743	105	23	1.0	1.0	NUM
ap-1743	105	24	3	3	NUM
ap-1743	105	25	4	4	NUM
ap-1743	105	26	5	5	NUM
ap-1743	105	27	6	6	NUM
ap-1743	105	28	frequency	frequency	NOUN
ap-1743	105	29	,	,	PUNCT
ap-1743	105	30	hz	hz	VERB
ap-1743	105	31	figure	figure	NOUN
ap-1743	105	32	6	6	NUM
ap-1743	105	33	.	.	PUNCT
ap-1743	105	34	dielectric	dielectric	ADJ
ap-1743	105	35	constant	constant	ADJ
ap-1743	105	36	and	and	CCONJ
ap-1743	105	37	loss	loss	NOUN
ap-1743	105	38	tangent	tangent	NOUN
ap-1743	105	39	vs.	vs.	ADP
ap-1743	105	40	frequency	frequency	NOUN
ap-1743	105	41	curves	curve	NOUN
ap-1743	105	42	for	for	ADP
ap-1743	105	43	as	as	ADV
ap-1743	105	44	-	-	PUNCT
ap-1743	105	45	deposited	deposit	VERB
ap-1743	105	46	ysz	ysz	NOUN
ap-1743	105	47	films	film	NOUN
ap-1743	105	48	in	in	ADP
ap-1743	105	49	ni	ni	PROPN
ap-1743	105	50	/	/	SYM
ap-1743	105	51	ysz	ysz	NOUN
ap-1743	105	52	/	/	SYM
ap-1743	105	53	si	si	NOUN
ap-1743	105	54	structures	structure	NOUN
ap-1743	105	55	.	.	PUNCT
ap-1743	106	1	range	range	NOUN
ap-1743	106	2	.	.	PUNCT
ap-1743	107	1	ysz	ysz	NOUN
ap-1743	107	2	films	film	NOUN
ap-1743	107	3	deposited	deposit	VERB
ap-1743	107	4	on	on	ADP
ap-1743	107	5	an	an	DET
ap-1743	107	6	si	si	NOUN
ap-1743	107	7	substrate	substrate	NOUN
ap-1743	107	8	in	in	ADP
ap-1743	107	9	that	that	DET
ap-1743	107	10	frequency	frequency	NOUN
ap-1743	107	11	range	range	NOUN
ap-1743	107	12	showed	show	VERB
ap-1743	107	13	the	the	DET
ap-1743	107	14	dielectric	dielectric	ADJ
ap-1743	107	15	constant	constant	ADJ
ap-1743	107	16	as	as	ADV
ap-1743	107	17	low	low	ADJ
ap-1743	107	18	as	as	ADP
ap-1743	107	19	ε	ε	PROPN
ap-1743	107	20	=	=	SYM
ap-1743	107	21	13	13	NUM
ap-1743	107	22	÷	÷	NUM
ap-1743	107	23	15	15	NUM
ap-1743	107	24	and	and	CCONJ
ap-1743	107	25	loss	loss	NOUN
ap-1743	107	26	tangent	tangent	NOUN
ap-1743	107	27	tg	tg	PROPN
ap-1743	107	28	δ	δ	PROPN
ap-1743	107	29	=	=	PUNCT
ap-1743	108	1	0.04	0.04	NUM
ap-1743	108	2	÷	÷	NUM
ap-1743	108	3	0.1	0.1	NUM
ap-1743	108	4	.	.	PUNCT
ap-1743	109	1	the	the	DET
ap-1743	109	2	c	c	NOUN
ap-1743	109	3	–	–	PUNCT
ap-1743	109	4	v	v	NOUN
ap-1743	109	5	relationships	relationship	NOUN
ap-1743	109	6	for	for	ADP
ap-1743	109	7	ni	ni	PROPN
ap-1743	109	8	/	/	SYM
ap-1743	109	9	ysz	ysz	NOUN
ap-1743	109	10	/	/	SYM
ap-1743	109	11	pt	pt	PROPN
ap-1743	109	12	and	and	CCONJ
ap-1743	109	13	ni	ni	PROPN
ap-1743	109	14	/	/	SYM
ap-1743	109	15	ysz	ysz	NOUN
ap-1743	109	16	/	/	SYM
ap-1743	109	17	si	si	NOUN
ap-1743	109	18	capacitor	capacitor	NOUN
ap-1743	109	19	structures	structure	NOUN
ap-1743	109	20	annealed	anneal	VERB
ap-1743	109	21	at	at	ADP
ap-1743	109	22	850	850	NUM
ap-1743	109	23	◦	◦	NOUN
ap-1743	109	24	c	c	NOUN
ap-1743	109	25	were	be	AUX
ap-1743	109	26	received	receive	VERB
ap-1743	109	27	at	at	ADP
ap-1743	109	28	dc	dc	PROPN
ap-1743	109	29	bias	bias	NOUN
ap-1743	109	30	up	up	ADP
ap-1743	109	31	to	to	PART
ap-1743	109	32	±10	±10	VERB
ap-1743	109	33	v	v	NOUN
ap-1743	109	34	(	(	PUNCT
ap-1743	109	35	fig	fig	NOUN
ap-1743	109	36	.	.	PUNCT
ap-1743	110	1	9	9	NUM
ap-1743	110	2	)	)	PUNCT
ap-1743	110	3	.	.	PUNCT
ap-1743	111	1	it	it	PRON
ap-1743	111	2	was	be	AUX
ap-1743	111	3	established	establish	VERB
ap-1743	111	4	that	that	SCONJ
ap-1743	111	5	the	the	DET
ap-1743	111	6	capacitance	capacitance	NOUN
ap-1743	111	7	of	of	ADP
ap-1743	111	8	ni	ni	PROPN
ap-1743	111	9	/	/	SYM
ap-1743	111	10	ysz	ysz	NOUN
ap-1743	111	11	/	/	SYM
ap-1743	111	12	pt	pt	NOUN
ap-1743	111	13	structures	structure	NOUN
ap-1743	111	14	did	do	AUX
ap-1743	111	15	not	not	PART
ap-1743	111	16	depend	depend	VERB
ap-1743	111	17	on	on	ADP
ap-1743	111	18	the	the	DET
ap-1743	111	19	bias	bias	NOUN
ap-1743	111	20	voltage	voltage	NOUN
ap-1743	111	21	,	,	PUNCT
ap-1743	111	22	which	which	PRON
ap-1743	111	23	was	be	AUX
ap-1743	111	24	typical	typical	ADJ
ap-1743	111	25	for	for	ADP
ap-1743	111	26	conventional	conventional	ADJ
ap-1743	111	27	dielectrics	dielectric	NOUN
ap-1743	111	28	.	.	PUNCT
ap-1743	112	1	as	as	ADP
ap-1743	112	2	for	for	ADP
ap-1743	112	3	the	the	DET
ap-1743	112	4	ni	ni	PROPN
ap-1743	112	5	/	/	SYM
ap-1743	112	6	ysz	ysz	NOUN
ap-1743	112	7	/	/	SYM
ap-1743	112	8	si	si	NOUN
ap-1743	112	9	structures	structure	NOUN
ap-1743	112	10	,	,	PUNCT
ap-1743	112	11	estimates	estimate	NOUN
ap-1743	112	12	of	of	ADP
ap-1743	112	13	the	the	DET
ap-1743	112	14	capacitance	capacitance	NOUN
ap-1743	112	15	–	–	PUNCT
ap-1743	112	16	voltage	voltage	NOUN
ap-1743	112	17	relationships	relationship	NOUN
ap-1743	112	18	proved	prove	VERB
ap-1743	112	19	that	that	SCONJ
ap-1743	112	20	these	these	DET
ap-1743	112	21	structures	structure	NOUN
ap-1743	112	22	had	have	VERB
ap-1743	112	23	hysteresis	hysteresis	NOUN
ap-1743	112	24	(	(	PUNCT
ap-1743	112	25	fig	fig	NOUN
ap-1743	112	26	.	.	PUNCT
ap-1743	113	1	9b	9b	NUM
ap-1743	113	2	)	)	PUNCT
ap-1743	113	3	.	.	PUNCT
ap-1743	114	1	capacitance	capacitance	NOUN
ap-1743	114	2	variation	variation	NOUN
ap-1743	114	3	at	at	ADP
ap-1743	114	4	dc	dc	PROPN
ap-1743	114	5	bias	bias	NOUN
ap-1743	114	6	is	be	AUX
ap-1743	114	7	typical	typical	ADJ
ap-1743	114	8	of	of	ADP
ap-1743	114	9	metal	metal	NOUN
ap-1743	114	10	–	–	PUNCT
ap-1743	114	11	insulator	insulator	NOUN
ap-1743	114	12	–	–	PUNCT
ap-1743	114	13	semicon157	semicon157	PROPN
ap-1743	114	14	dmitriy	dmitriy	PROPN
ap-1743	114	15	a.	a.	NOUN
ap-1743	114	16	golosov	golosov	PROPN
ap-1743	114	17	,	,	PUNCT
ap-1743	114	18	sergey	sergey	PROPN
ap-1743	114	19	m.	m.	PROPN
ap-1743	114	20	zavatskiy	zavatskiy	PROPN
ap-1743	114	21	,	,	PUNCT
ap-1743	114	22	sergey	sergey	PROPN
ap-1743	114	23	n.	n.	PROPN
ap-1743	114	24	melnikov	melnikov	PROPN
ap-1743	114	25	acta	acta	PROPN
ap-1743	114	26	polytechnica	polytechnica	PROPN
ap-1743	114	27	10	10	NUM
ap-1743	114	28	10	10	NUM
ap-1743	114	29	10101010	10101010	NUM
ap-1743	114	30	14	14	NUM
ap-1743	114	31	0.02	0.02	NUM
ap-1743	114	32	12	12	NUM
ap-1743	114	33	0	0	NUM
ap-1743	114	34	16	16	NUM
ap-1743	114	35	0.04	0.04	NUM
ap-1743	114	36	18	18	NUM
ap-1743	114	37	0.06	0.06	NUM
ap-1743	114	38	20	20	NUM
ap-1743	114	39	0.08	0.08	NUM
ap-1743	114	40	22	22	NUM
ap-1743	114	41	0.1	0.1	NUM
ap-1743	114	42	3	3	NUM
ap-1743	114	43	4	4	NUM
ap-1743	114	44	5	5	NUM
ap-1743	114	45	6	6	NUM
ap-1743	114	46	frequency	frequency	NOUN
ap-1743	114	47	,	,	PUNCT
ap-1743	114	48	hz	hz	VERB
ap-1743	114	49	d	d	NOUN
ap-1743	114	50	i	i	NOUN
ap-1743	115	1	e	e	NOUN
ap-1743	115	2	l	l	NOUN
ap-1743	115	3	e	e	X
ap-1743	115	4	c	c	NOUN
ap-1743	115	5	t	t	NOUN
ap-1743	115	6	r	r	NOUN
ap-1743	115	7	i	i	NOUN
ap-1743	115	8	c	c	NOUN
ap-1743	116	1	c	c	NOUN
ap-1743	116	2	o	o	NOUN
ap-1743	117	1	n	n	X
ap-1743	117	2	s	s	PROPN
ap-1743	117	3	t	t	NOUN
ap-1743	117	4	a	a	PRON
ap-1743	117	5	n	n	NUM
ap-1743	117	6	t	t	NOUN
ap-1743	117	7	,	,	PUNCT
ap-1743	117	8	ε	ε	PROPN
ap-1743	117	9	2	2	NUM
ap-1743	117	10	l	l	NOUN
ap-1743	118	1	o	o	X
ap-1743	118	2	s	s	X
ap-1743	118	3	s	s	X
ap-1743	118	4	t	t	NOUN
ap-1743	118	5	a	a	DET
ap-1743	118	6	n	n	CCONJ
ap-1743	118	7	g	g	NOUN
ap-1743	118	8	e	e	PROPN
ap-1743	118	9	n	n	DET
ap-1743	118	10	t	t	PROPN
ap-1743	118	11	,	,	PUNCT
ap-1743	118	12	t	t	PROPN
ap-1743	118	13	g	g	PROPN
ap-1743	118	14	δ	δ	PROPN
ap-1743	118	15	figure	figure	NOUN
ap-1743	118	16	7	7	NUM
ap-1743	118	17	.	.	PUNCT
ap-1743	118	18	dielectric	dielectric	ADJ
ap-1743	118	19	constant	constant	ADJ
ap-1743	118	20	and	and	CCONJ
ap-1743	118	21	loss	loss	NOUN
ap-1743	118	22	tangent	tangent	NOUN
ap-1743	118	23	vs.	vs.	ADP
ap-1743	118	24	frequency	frequency	NOUN
ap-1743	118	25	curves	curve	NOUN
ap-1743	118	26	for	for	SCONJ
ap-1743	118	27	ni	ni	PROPN
ap-1743	118	28	/	/	SYM
ap-1743	118	29	ysz	ysz	NOUN
ap-1743	118	30	/	/	SYM
ap-1743	118	31	pt	pt	PROPN
ap-1743	118	32	structures	structure	NOUN
ap-1743	118	33	annealed	anneal	VERB
ap-1743	118	34	in	in	ADP
ap-1743	118	35	air	air	NOUN
ap-1743	118	36	at	at	ADP
ap-1743	118	37	850	850	NUM
ap-1743	118	38	◦	◦	NOUN
ap-1743	118	39	c	c	NOUN
ap-1743	118	40	(	(	PUNCT
ap-1743	118	41	annealing	anneal	VERB
ap-1743	118	42	time	time	NOUN
ap-1743	118	43	15min	15min	NUM
ap-1743	118	44	)	)	PUNCT
ap-1743	118	45	.	.	PUNCT
ap-1743	119	1	10	10	NUM
ap-1743	119	2	10	10	NUM
ap-1743	119	3	10101010	10101010	NUM
ap-1743	119	4	14	14	NUM
ap-1743	119	5	0.02	0.02	NUM
ap-1743	119	6	12	12	NUM
ap-1743	119	7	0	0	NUM
ap-1743	119	8	16	16	NUM
ap-1743	119	9	0.04	0.04	NUM
ap-1743	119	10	18	18	NUM
ap-1743	119	11	0.06	0.06	NUM
ap-1743	119	12	20	20	NUM
ap-1743	119	13	0.08	0.08	NUM
ap-1743	119	14	22	22	NUM
ap-1743	119	15	0.1	0.1	NUM
ap-1743	119	16	3	3	NUM
ap-1743	119	17	4	4	NUM
ap-1743	119	18	5	5	NUM
ap-1743	119	19	6	6	NUM
ap-1743	119	20	frequency	frequency	NOUN
ap-1743	119	21	,	,	PUNCT
ap-1743	119	22	hz	hz	VERB
ap-1743	119	23	d	d	NOUN
ap-1743	119	24	i	i	NOUN
ap-1743	119	25	e	e	NOUN
ap-1743	119	26	l	l	NOUN
ap-1743	119	27	e	e	X
ap-1743	119	28	c	c	NOUN
ap-1743	119	29	t	t	NOUN
ap-1743	119	30	r	r	NOUN
ap-1743	120	1	i	i	NOUN
ap-1743	120	2	c	c	NOUN
ap-1743	120	3	c	c	NOUN
ap-1743	121	1	o	o	NOUN
ap-1743	121	2	n	n	X
ap-1743	121	3	s	s	PROPN
ap-1743	121	4	t	t	NOUN
ap-1743	121	5	a	a	PRON
ap-1743	121	6	n	n	NUM
ap-1743	121	7	t	t	NOUN
ap-1743	121	8	,	,	PUNCT
ap-1743	121	9	ε	ε	PROPN
ap-1743	121	10	2	2	NUM
ap-1743	121	11	l	l	NOUN
ap-1743	122	1	o	o	X
ap-1743	122	2	s	s	X
ap-1743	122	3	s	s	X
ap-1743	122	4	t	t	NOUN
ap-1743	122	5	a	a	DET
ap-1743	122	6	n	n	CCONJ
ap-1743	122	7	g	g	NOUN
ap-1743	122	8	e	e	PROPN
ap-1743	122	9	n	n	DET
ap-1743	122	10	t	t	PROPN
ap-1743	122	11	,	,	PUNCT
ap-1743	122	12	t	t	PROPN
ap-1743	122	13	g	g	PROPN
ap-1743	122	14	δ	δ	PROPN
ap-1743	122	15	figure	figure	NOUN
ap-1743	122	16	8	8	NUM
ap-1743	122	17	.	.	PUNCT
ap-1743	123	1	dielectric	dielectric	ADJ
ap-1743	123	2	constant	constant	ADJ
ap-1743	123	3	and	and	CCONJ
ap-1743	123	4	loss	loss	NOUN
ap-1743	123	5	tangent	tangent	NOUN
ap-1743	123	6	vs.	vs.	ADP
ap-1743	123	7	frequency	frequency	NOUN
ap-1743	123	8	curves	curve	NOUN
ap-1743	123	9	of	of	ADP
ap-1743	123	10	ni	ni	PROPN
ap-1743	123	11	/	/	SYM
ap-1743	123	12	ysz	ysz	NOUN
ap-1743	123	13	/	/	SYM
ap-1743	123	14	si	si	NOUN
ap-1743	123	15	structures	structure	NOUN
ap-1743	123	16	annealed	anneal	VERB
ap-1743	123	17	in	in	ADP
ap-1743	123	18	air	air	NOUN
ap-1743	123	19	at	at	ADP
ap-1743	123	20	850	850	NUM
ap-1743	123	21	◦	◦	NOUN
ap-1743	123	22	c	c	NOUN
ap-1743	123	23	(	(	PUNCT
ap-1743	123	24	annealing	anneal	VERB
ap-1743	123	25	time	time	NOUN
ap-1743	123	26	15min	15min	NUM
ap-1743	123	27	)	)	PUNCT
ap-1743	123	28	.	.	PUNCT
ap-1743	124	1	0	0	NUM
ap-1743	125	1	5	5	NUM
ap-1743	125	2	10	10	NUM
ap-1743	125	3	15	15	NUM
ap-1743	125	4	-	-	SYM
ap-1743	125	5	5	5	NUM
ap-1743	125	6	-	-	PUNCT
ap-1743	125	7	10	10	NUM
ap-1743	125	8	-	-	SYM
ap-1743	125	9	15	15	NUM
ap-1743	125	10	437	437	NUM
ap-1743	125	11	439	439	NUM
ap-1743	125	12	441	441	NUM
ap-1743	125	13	443	443	NUM
ap-1743	125	14	445	445	NUM
ap-1743	125	15	bias	bias	NOUN
ap-1743	125	16	voltage	voltage	NOUN
ap-1743	125	17	,	,	PUNCT
ap-1743	125	18	v	v	ADP
ap-1743	125	19	c	c	PROPN
ap-1743	125	20	a	a	DET
ap-1743	125	21	p	p	NOUN
ap-1743	125	22	a	a	DET
ap-1743	125	23	c	c	NOUN
ap-1743	126	1	i	i	PRON
ap-1743	126	2	t	t	VERB
ap-1743	126	3	a	a	DET
ap-1743	126	4	n	n	NOUN
ap-1743	126	5	c	c	NOUN
ap-1743	126	6	e	e	NOUN
ap-1743	126	7	,	,	PUNCT
ap-1743	126	8	p	p	PROPN
ap-1743	126	9	f	f	PROPN
ap-1743	126	10	0	0	NUM
ap-1743	126	11	5	5	NUM
ap-1743	126	12	10	10	NUM
ap-1743	126	13	15	15	NUM
ap-1743	126	14	-	-	SYM
ap-1743	126	15	5	5	NUM
ap-1743	126	16	-	-	PUNCT
ap-1743	126	17	10	10	NUM
ap-1743	126	18	-	-	SYM
ap-1743	126	19	15	15	NUM
ap-1743	126	20	490	490	NUM
ap-1743	126	21	480	480	NUM
ap-1743	126	22	500	500	NUM
ap-1743	126	23	510	510	NUM
ap-1743	126	24	520	520	NUM
ap-1743	126	25	530	530	NUM
ap-1743	126	26	540	540	NUM
ap-1743	126	27	bias	bias	NOUN
ap-1743	126	28	voltage	voltage	NOUN
ap-1743	126	29	,	,	PUNCT
ap-1743	126	30	v	v	ADP
ap-1743	126	31	c	c	PROPN
ap-1743	126	32	a	a	DET
ap-1743	126	33	p	p	NOUN
ap-1743	127	1	a	a	DET
ap-1743	127	2	c	c	NOUN
ap-1743	128	1	i	i	PRON
ap-1743	128	2	t	t	VERB
ap-1743	128	3	a	a	DET
ap-1743	128	4	n	n	NOUN
ap-1743	128	5	c	c	NOUN
ap-1743	128	6	e	e	NOUN
ap-1743	128	7	,	,	PUNCT
ap-1743	128	8	p	p	PROPN
ap-1743	128	9	f	f	PROPN
ap-1743	128	10	a	a	PRON
ap-1743	128	11	b	b	PROPN
ap-1743	128	12	figure	figure	NOUN
ap-1743	128	13	9	9	NUM
ap-1743	128	14	.	.	PUNCT
ap-1743	129	1	c	c	X
ap-1743	129	2	-	-	PUNCT
ap-1743	129	3	v	v	NOUN
ap-1743	129	4	characteristics	characteristic	NOUN
ap-1743	129	5	of	of	ADP
ap-1743	129	6	structures	structure	NOUN
ap-1743	129	7	such	such	ADJ
ap-1743	129	8	as	as	ADP
ap-1743	129	9	ni	ni	PROPN
ap-1743	129	10	/	/	SYM
ap-1743	129	11	ysz	ysz	NOUN
ap-1743	129	12	/	/	SYM
ap-1743	129	13	pt	pt	PROPN
ap-1743	129	14	(	(	PUNCT
ap-1743	129	15	a	a	NOUN
ap-1743	129	16	)	)	PUNCT
ap-1743	129	17	and	and	CCONJ
ap-1743	129	18	ni	ni	PROPN
ap-1743	129	19	/	/	SYM
ap-1743	129	20	ysz	ysz	NOUN
ap-1743	129	21	/	/	SYM
ap-1743	129	22	si	si	X
ap-1743	129	23	(	(	PUNCT
ap-1743	129	24	b	b	NOUN
ap-1743	129	25	)	)	PUNCT
ap-1743	129	26	annealed	anneal	VERB
ap-1743	129	27	in	in	ADP
ap-1743	129	28	air	air	NOUN
ap-1743	129	29	at	at	ADP
ap-1743	129	30	850	850	NUM
ap-1743	129	31	◦	◦	NOUN
ap-1743	129	32	c	c	NOUN
ap-1743	129	33	(	(	PUNCT
ap-1743	129	34	annealing	anneal	VERB
ap-1743	129	35	time	time	NOUN
ap-1743	129	36	15min	15min	NUM
ap-1743	129	37	)	)	PUNCT
ap-1743	129	38	.	.	PUNCT
ap-1743	130	1	ductor	ductor	NOUN
ap-1743	130	2	structures	structure	NOUN
ap-1743	130	3	and	and	CCONJ
ap-1743	130	4	can	can	AUX
ap-1743	130	5	account	account	VERB
ap-1743	130	6	for	for	ADP
ap-1743	130	7	the	the	DET
ap-1743	130	8	charge	charge	NOUN
ap-1743	130	9	carrier	carrier	NOUN
ap-1743	130	10	drift	drift	NOUN
ap-1743	130	11	at	at	ADP
ap-1743	130	12	the	the	DET
ap-1743	130	13	ysz	ysz	NOUN
ap-1743	130	14	/	/	SYM
ap-1743	130	15	si	si	PROPN
ap-1743	130	16	boundary	boundary	NOUN
ap-1743	130	17	affected	affect	VERB
ap-1743	130	18	by	by	ADP
ap-1743	130	19	the	the	DET
ap-1743	130	20	electric	electric	ADJ
ap-1743	130	21	field	field	NOUN
ap-1743	130	22	.	.	PUNCT
ap-1743	131	1	the	the	DET
ap-1743	131	2	measured	measured	ADJ
ap-1743	131	3	p	p	PROPN
ap-1743	131	4	–	–	PUNCT
ap-1743	131	5	e	e	NOUN
ap-1743	131	6	characteristics	characteristic	NOUN
ap-1743	131	7	of	of	ADP
ap-1743	131	8	the	the	DET
ap-1743	131	9	ysz	ysz	NOUN
ap-1743	131	10	layers	layer	NOUN
ap-1743	131	11	showed	show	VERB
ap-1743	131	12	the	the	DET
ap-1743	131	13	absence	absence	NOUN
ap-1743	131	14	of	of	ADP
ap-1743	131	15	dielectric	dielectric	ADJ
ap-1743	131	16	polarization	polarization	NOUN
ap-1743	131	17	,	,	PUNCT
ap-1743	131	18	proving	prove	VERB
ap-1743	131	19	that	that	SCONJ
ap-1743	131	20	the	the	DET
ap-1743	131	21	deposited	deposit	VERB
ap-1743	131	22	ysz	ysz	NOUN
ap-1743	131	23	films	film	NOUN
ap-1743	131	24	can	can	AUX
ap-1743	131	25	be	be	AUX
ap-1743	131	26	referred	refer	VERB
ap-1743	131	27	to	to	ADP
ap-1743	131	28	as	as	ADP
ap-1743	131	29	linear	linear	PROPN
ap-1743	131	30	dielectrics	dielectric	NOUN
ap-1743	131	31	.	.	PUNCT
ap-1743	132	1	the	the	DET
ap-1743	132	2	high	high	ADJ
ap-1743	132	3	-	-	PUNCT
ap-1743	132	4	temperature	temperature	NOUN
ap-1743	132	5	ionic	ionic	ADJ
ap-1743	132	6	conductivity	conductivity	NOUN
ap-1743	132	7	of	of	ADP
ap-1743	132	8	the	the	DET
ap-1743	132	9	sta600	sta600	PROPN
ap-1743	132	10	800	800	NUM
ap-1743	132	11	10004002000	10004002000	NUM
ap-1743	132	12	10	10	NUM
ap-1743	132	13	10	10	NUM
ap-1743	132	14	10	10	NUM
ap-1743	132	15	10	10	NUM
ap-1743	132	16	10	10	NUM
ap-1743	132	17	10	10	NUM
ap-1743	132	18	temperature	temperature	NOUN
ap-1743	132	19	,	,	PUNCT
ap-1743	132	20	с	с	PROPN
ap-1743	132	21	c	c	NOUN
ap-1743	132	22	o	o	NOUN
ap-1743	132	23	n	n	PROPN
ap-1743	132	24	d	d	X
ap-1743	132	25	u	u	X
ap-1743	132	26	c	c	NOUN
ap-1743	132	27	t	t	NOUN
ap-1743	133	1	i	i	PRON
ap-1743	133	2	v	v	INTJ
ap-1743	134	1	i	i	PRON
ap-1743	134	2	t	t	PROPN
ap-1743	134	3	y	y	PROPN
ap-1743	134	4	,	,	PUNCT
ap-1743	134	5	s	s	PART
ap-1743	134	6	/	/	SYM
ap-1743	134	7	c	c	NOUN
ap-1743	134	8	m	m	VERB
ap-1743	134	9	-2	-2	INTJ
ap-1743	135	1	-3	-3	INTJ
ap-1743	135	2	-5	-5	INTJ
ap-1743	136	1	-6	-6	INTJ
ap-1743	136	2	-4	-4	INTJ
ap-1743	136	3	-1	-1	PUNCT
ap-1743	136	4	figure	figure	NOUN
ap-1743	136	5	10	10	NUM
ap-1743	136	6	.	.	PUNCT
ap-1743	137	1	ionic	ionic	ADJ
ap-1743	137	2	conductivity	conductivity	NOUN
ap-1743	137	3	the	the	DET
ap-1743	137	4	ysz	ysz	NOUN
ap-1743	137	5	films	film	NOUN
ap-1743	137	6	in	in	ADP
ap-1743	137	7	ni	ni	PROPN
ap-1743	137	8	/	/	SYM
ap-1743	137	9	ysz	ysz	NOUN
ap-1743	137	10	/	/	SYM
ap-1743	137	11	pt	pt	PROPN
ap-1743	137	12	structures	structure	NOUN
ap-1743	137	13	annealed	anneal	VERB
ap-1743	137	14	in	in	ADP
ap-1743	137	15	air	air	NOUN
ap-1743	137	16	at	at	ADP
ap-1743	137	17	850	850	NUM
ap-1743	137	18	◦	◦	NOUN
ap-1743	137	19	c	c	NOUN
ap-1743	137	20	(	(	PUNCT
ap-1743	137	21	annealing	anneal	VERB
ap-1743	137	22	time	time	NOUN
ap-1743	137	23	15min	15min	NUM
ap-1743	137	24	)	)	PUNCT
ap-1743	137	25	as	as	ADP
ap-1743	137	26	a	a	DET
ap-1743	137	27	function	function	NOUN
ap-1743	137	28	of	of	ADP
ap-1743	137	29	temperature	temperature	NOUN
ap-1743	137	30	(	(	PUNCT
ap-1743	137	31	f	f	NOUN
ap-1743	137	32	=	=	SYM
ap-1743	137	33	1.0	1.0	NUM
ap-1743	137	34	khz	khz	NOUN
ap-1743	137	35	)	)	PUNCT
ap-1743	137	36	.	.	PUNCT
ap-1743	138	1	bilized	bilize	VERB
ap-1743	138	2	zirconia	zirconia	NOUN
ap-1743	138	3	was	be	AUX
ap-1743	138	4	determined	determine	VERB
ap-1743	138	5	by	by	ADP
ap-1743	138	6	measuring	measure	VERB
ap-1743	138	7	the	the	DET
ap-1743	138	8	electric	electric	ADJ
ap-1743	138	9	resistance	resistance	NOUN
ap-1743	138	10	of	of	ADP
ap-1743	138	11	the	the	DET
ap-1743	138	12	ni	ni	PROPN
ap-1743	138	13	/	/	SYM
ap-1743	138	14	ysz	ysz	NOUN
ap-1743	138	15	/	/	SYM
ap-1743	138	16	pt	pt	NOUN
ap-1743	138	17	capacitor	capacitor	NOUN
ap-1743	138	18	structures	structure	NOUN
ap-1743	138	19	annealed	anneal	VERB
ap-1743	138	20	at	at	ADP
ap-1743	138	21	850	850	NUM
ap-1743	138	22	◦	◦	NOUN
ap-1743	138	23	c	c	NOUN
ap-1743	138	24	at	at	ADP
ap-1743	138	25	1	1	NUM
ap-1743	138	26	khz	khz	NOUN
ap-1743	138	27	of	of	ADP
ap-1743	138	28	frequency	frequency	NOUN
ap-1743	138	29	with	with	ADP
ap-1743	138	30	the	the	DET
ap-1743	138	31	temperature	temperature	NOUN
ap-1743	138	32	varied	varied	ADJ
ap-1743	138	33	from	from	ADP
ap-1743	138	34	ambient	ambient	NOUN
ap-1743	138	35	up	up	ADP
ap-1743	138	36	to	to	PART
ap-1743	138	37	800	800	NUM
ap-1743	138	38	◦	◦	NOUN
ap-1743	138	39	c.	c.	NOUN
ap-1743	138	40	it	it	PRON
ap-1743	138	41	was	be	AUX
ap-1743	138	42	established	establish	VERB
ap-1743	138	43	that	that	SCONJ
ap-1743	138	44	as	as	SCONJ
ap-1743	138	45	the	the	DET
ap-1743	138	46	temperature	temperature	NOUN
ap-1743	138	47	was	be	AUX
ap-1743	138	48	increased	increase	VERB
ap-1743	138	49	,	,	PUNCT
ap-1743	138	50	the	the	DET
ap-1743	138	51	film	film	NOUN
ap-1743	138	52	conductivity	conductivity	NOUN
ap-1743	138	53	was	be	AUX
ap-1743	138	54	also	also	ADV
ap-1743	138	55	grown	grow	VERB
ap-1743	138	56	in	in	ADP
ap-1743	138	57	proportion	proportion	NOUN
ap-1743	138	58	to	to	ADP
ap-1743	138	59	the	the	DET
ap-1743	138	60	temperature	temperature	NOUN
ap-1743	138	61	.	.	PUNCT
ap-1743	139	1	when	when	SCONJ
ap-1743	139	2	the	the	DET
ap-1743	139	3	substrate	substrate	NOUN
ap-1743	139	4	temperature	temperature	NOUN
ap-1743	139	5	was	be	AUX
ap-1743	139	6	800	800	NUM
ap-1743	139	7	◦	◦	NOUN
ap-1743	139	8	c	c	PROPN
ap-1743	139	9	,	,	PUNCT
ap-1743	139	10	the	the	DET
ap-1743	139	11	ionic	ionic	ADJ
ap-1743	139	12	conductivity	conductivity	NOUN
ap-1743	139	13	of	of	ADP
ap-1743	139	14	the	the	DET
ap-1743	139	15	ysz	ysz	NOUN
ap-1743	139	16	films	film	NOUN
ap-1743	139	17	reached	reach	VERB
ap-1743	139	18	0.0196	0.0196	NUM
ap-1743	139	19	s	s	NOUN
ap-1743	139	20	/	/	SYM
ap-1743	139	21	cm	cm	NOUN
ap-1743	139	22	(	(	PUNCT
ap-1743	139	23	fig	fig	NOUN
ap-1743	139	24	.	.	PUNCT
ap-1743	140	1	10	10	NUM
ap-1743	140	2	)	)	PUNCT
ap-1743	140	3	.	.	PUNCT
ap-1743	141	1	for	for	ADP
ap-1743	141	2	comparison	comparison	NOUN
ap-1743	141	3	:	:	PUNCT
ap-1743	141	4	the	the	DET
ap-1743	141	5	ion	ion	NOUN
ap-1743	141	6	conductivity	conductivity	NOUN
ap-1743	141	7	of	of	ADP
ap-1743	141	8	the	the	DET
ap-1743	141	9	bulk	bulk	ADJ
ap-1743	141	10	ysz	ysz	NOUN
ap-1743	141	11	samples	sample	NOUN
ap-1743	141	12	is	be	AUX
ap-1743	141	13	about	about	ADV
ap-1743	141	14	0.025	0.025	NUM
ap-1743	141	15	s	s	NOUN
ap-1743	141	16	/	/	SYM
ap-1743	141	17	cm	cm	NOUN
ap-1743	141	18	at	at	ADP
ap-1743	141	19	800	800	NUM
ap-1743	141	20	◦	◦	NOUN
ap-1743	141	21	c	c	NOUN
ap-1743	141	22	[	[	X
ap-1743	141	23	12	12	NUM
ap-1743	141	24	]	]	PUNCT
ap-1743	141	25	.	.	PUNCT
ap-1743	142	1	4	4	X
ap-1743	142	2	.	.	X
ap-1743	142	3	conclusion	conclusion	NOUN
ap-1743	142	4	the	the	DET
ap-1743	142	5	rf	rf	NOUN
ap-1743	142	6	magnetron	magnetron	NOUN
ap-1743	142	7	sputtering	sputtering	NOUN
ap-1743	142	8	method	method	NOUN
ap-1743	142	9	was	be	AUX
ap-1743	142	10	used	use	VERB
ap-1743	142	11	to	to	PART
ap-1743	142	12	deposit	deposit	VERB
ap-1743	142	13	thin	thin	ADJ
ap-1743	142	14	-	-	PUNCT
ap-1743	142	15	film	film	NOUN
ap-1743	142	16	7mol.%-yttria	7mol.%-yttria	NOUN
ap-1743	142	17	-	-	PUNCT
ap-1743	142	18	stabilized	stabilize	VERB
ap-1743	142	19	zirconia	zirconia	NOUN
ap-1743	142	20	.	.	PUNCT
ap-1743	143	1	by	by	ADP
ap-1743	143	2	means	mean	NOUN
ap-1743	143	3	of	of	ADP
ap-1743	143	4	xrd	xrd	PROPN
ap-1743	143	5	analysis	analysis	NOUN
ap-1743	143	6	,	,	PUNCT
ap-1743	143	7	it	it	PRON
ap-1743	143	8	was	be	AUX
ap-1743	143	9	established	establish	VERB
ap-1743	143	10	that	that	SCONJ
ap-1743	143	11	the	the	DET
ap-1743	143	12	deposited	deposit	VERB
ap-1743	143	13	films	film	NOUN
ap-1743	143	14	were	be	AUX
ap-1743	143	15	amorphous	amorphous	ADJ
ap-1743	143	16	,	,	PUNCT
ap-1743	143	17	they	they	PRON
ap-1743	143	18	could	could	AUX
ap-1743	143	19	crystallize	crystallize	VERB
ap-1743	143	20	into	into	ADP
ap-1743	143	21	pure	pure	ADJ
ap-1743	143	22	cubic	cubic	ADJ
ap-1743	143	23	structures	structure	NOUN
ap-1743	143	24	after	after	ADP
ap-1743	143	25	being	be	AUX
ap-1743	143	26	annealed	anneal	VERB
ap-1743	143	27	in	in	ADP
ap-1743	143	28	air	air	NOUN
ap-1743	143	29	under	under	ADP
ap-1743	143	30	temperatures	temperature	NOUN
ap-1743	143	31	above	above	ADP
ap-1743	143	32	820	820	NUM
ap-1743	143	33	◦	◦	NOUN
ap-1743	143	34	c.	c.	NOUN
ap-1743	143	35	the	the	DET
ap-1743	143	36	annealing	anneal	VERB
ap-1743	143	37	treatment	treatment	NOUN
ap-1743	143	38	of	of	ADP
ap-1743	143	39	ysz	ysz	NOUN
ap-1743	143	40	films	film	NOUN
ap-1743	143	41	at	at	ADP
ap-1743	143	42	temperatures	temperature	NOUN
ap-1743	143	43	above	above	ADP
ap-1743	143	44	700	700	NUM
ap-1743	143	45	◦	◦	NOUN
ap-1743	143	46	c	c	NOUN
ap-1743	143	47	causes	cause	VERB
ap-1743	143	48	the	the	DET
ap-1743	143	49	dielectric	dielectric	ADJ
ap-1743	143	50	constant	constant	ADJ
ap-1743	143	51	to	to	PART
ap-1743	143	52	rise	rise	VERB
ap-1743	143	53	,	,	PUNCT
ap-1743	143	54	and	and	CCONJ
ap-1743	143	55	the	the	DET
ap-1743	143	56	dielectric	dielectric	ADJ
ap-1743	143	57	loss	loss	NOUN
ap-1743	143	58	tangent	tangent	NOUN
ap-1743	143	59	to	to	PART
ap-1743	143	60	go	go	VERB
ap-1743	143	61	down	down	ADV
ap-1743	143	62	.	.	PUNCT
ap-1743	144	1	the	the	DET
ap-1743	144	2	films	film	NOUN
ap-1743	144	3	that	that	PRON
ap-1743	144	4	are	be	AUX
ap-1743	144	5	obtained	obtain	VERB
ap-1743	144	6	are	be	AUX
ap-1743	144	7	characterized	characterize	VERB
ap-1743	144	8	by	by	ADP
ap-1743	144	9	ε	ε	PROPN
ap-1743	144	10	>	>	X
ap-1743	144	11	20	20	NUM
ap-1743	144	12	and	and	CCONJ
ap-1743	144	13	tg	tg	PRON
ap-1743	144	14	δ	δ	PROPN
ap-1743	144	15	<	<	X
ap-1743	144	16	0.05	0.05	NUM
ap-1743	144	17	.	.	PUNCT
ap-1743	145	1	estimates	estimate	NOUN
ap-1743	145	2	of	of	ADP
ap-1743	145	3	the	the	DET
ap-1743	145	4	capacitance	capacitance	NOUN
ap-1743	145	5	–	–	PUNCT
ap-1743	145	6	voltage	voltage	NOUN
ap-1743	145	7	relationships	relationship	NOUN
ap-1743	145	8	proved	prove	VERB
ap-1743	145	9	that	that	SCONJ
ap-1743	145	10	the	the	DET
ap-1743	145	11	ni	ni	PROPN
ap-1743	145	12	/	/	SYM
ap-1743	145	13	ysz	ysz	NOUN
ap-1743	145	14	/	/	SYM
ap-1743	145	15	si	si	NOUN
ap-1743	145	16	structures	structure	NOUN
ap-1743	145	17	have	have	VERB
ap-1743	145	18	hysteresis	hysteresis	NOUN
ap-1743	145	19	,	,	PUNCT
ap-1743	145	20	resulting	result	VERB
ap-1743	145	21	from	from	ADP
ap-1743	145	22	the	the	DET
ap-1743	145	23	drift	drift	NOUN
ap-1743	145	24	of	of	ADP
ap-1743	145	25	the	the	DET
ap-1743	145	26	mobile	mobile	ADJ
ap-1743	145	27	ions	ion	NOUN
ap-1743	145	28	in	in	ADP
ap-1743	145	29	the	the	DET
ap-1743	145	30	ysz	ysz	NOUN
ap-1743	145	31	film	film	NOUN
ap-1743	145	32	.	.	PUNCT
ap-1743	146	1	it	it	PRON
ap-1743	146	2	was	be	AUX
ap-1743	146	3	discovered	discover	VERB
ap-1743	146	4	that	that	SCONJ
ap-1743	146	5	the	the	DET
ap-1743	146	6	high	high	ADJ
ap-1743	146	7	-	-	PUNCT
ap-1743	146	8	temperature	temperature	NOUN
ap-1743	146	9	ionic	ionic	ADJ
ap-1743	146	10	conductivity	conductivity	NOUN
ap-1743	146	11	of	of	ADP
ap-1743	146	12	thin	thin	ADJ
ap-1743	146	13	-	-	PUNCT
ap-1743	146	14	film	film	NOUN
ap-1743	146	15	ysz	ysz	NOUN
ap-1743	146	16	to	to	ADP
ap-1743	146	17	the	the	DET
ap-1743	146	18	temperature	temperature	NOUN
ap-1743	146	19	and	and	CCONJ
ap-1743	146	20	reached	reach	VERB
ap-1743	146	21	0.0196	0.0196	NUM
ap-1743	146	22	s	s	NOUN
ap-1743	146	23	/	/	SYM
ap-1743	146	24	cm	cm	NOUN
ap-1743	146	25	with	with	ADP
ap-1743	146	26	the	the	DET
ap-1743	146	27	substrate	substrate	NOUN
ap-1743	146	28	temperature	temperature	NOUN
ap-1743	146	29	of	of	ADP
ap-1743	146	30	800	800	NUM
ap-1743	146	31	◦	◦	NOUN
ap-1743	146	32	c.	c.	NOUN
ap-1743	146	33	thus	thus	ADV
ap-1743	146	34	,	,	PUNCT
ap-1743	146	35	annealed	anneal	VERB
ap-1743	146	36	ysz	ysz	NOUN
ap-1743	146	37	films	film	NOUN
ap-1743	146	38	can	can	AUX
ap-1743	146	39	be	be	AUX
ap-1743	146	40	used	use	VERB
ap-1743	146	41	as	as	ADP
ap-1743	146	42	electrical	electrical	ADJ
ap-1743	146	43	insulators	insulator	NOUN
ap-1743	146	44	at	at	ADP
ap-1743	146	45	room	room	NOUN
ap-1743	146	46	temperature	temperature	NOUN
ap-1743	146	47	,	,	PUNCT
ap-1743	146	48	and	and	CCONJ
ap-1743	146	49	as	as	ADP
ap-1743	146	50	an	an	DET
ap-1743	146	51	efficient	efficient	ADJ
ap-1743	146	52	ion	ion	NOUN
ap-1743	146	53	conductor	conductor	NOUN
ap-1743	146	54	of	of	ADP
ap-1743	146	55	high	high	ADJ
ap-1743	146	56	temperatures	temperature	NOUN
ap-1743	146	57	.	.	PUNCT
ap-1743	147	1	references	reference	NOUN
ap-1743	147	2	[	[	X
ap-1743	147	3	1	1	X
ap-1743	147	4	]	]	PUNCT
ap-1743	147	5	j.	j.	PROPN
ap-1743	147	6	w.	w.	PROPN
ap-1743	147	7	bae	bae	PROPN
ap-1743	147	8	,	,	PUNCT
ap-1743	147	9	et	et	PROPN
ap-1743	147	10	al	al	PROPN
ap-1743	147	11	.	.	PUNCT
ap-1743	147	12	characterization	characterization	NOUN
ap-1743	147	13	of	of	ADP
ap-1743	147	14	yttria	yttria	NOUN
ap-1743	147	15	-	-	PUNCT
ap-1743	147	16	stabilized	stabilize	VERB
ap-1743	147	17	zirconia	zirconia	ADJ
ap-1743	147	18	thin	thin	ADJ
ap-1743	147	19	films	film	NOUN
ap-1743	147	20	prepared	prepare	VERB
ap-1743	147	21	by	by	ADP
ap-1743	147	22	radio	radio	NOUN
ap-1743	147	23	frequency	frequency	NOUN
ap-1743	147	24	magnetron	magnetron	NOUN
ap-1743	147	25	sputtering	sputtering	NOUN
ap-1743	147	26	for	for	ADP
ap-1743	147	27	a	a	DET
ap-1743	147	28	combustion	combustion	NOUN
ap-1743	147	29	control	control	NOUN
ap-1743	147	30	oxygen	oxygen	NOUN
ap-1743	147	31	sensor	sensor	NOUN
ap-1743	147	32	.	.	PUNCT
ap-1743	148	1	journal	journal	NOUN
ap-1743	148	2	of	of	ADP
ap-1743	148	3	the	the	DET
ap-1743	148	4	electrochemical	electrochemical	ADJ
ap-1743	148	5	society	society	NOUN
ap-1743	148	6	147(6):2380–2384	147(6):2380–2384	PROPN
ap-1743	148	7	,	,	PUNCT
ap-1743	148	8	2000	2000	NUM
ap-1743	148	9	.	.	PUNCT
ap-1743	149	1	[	[	X
ap-1743	149	2	2	2	NUM
ap-1743	149	3	]	]	PUNCT
ap-1743	149	4	a.	a.	NOUN
ap-1743	149	5	barda	barda	PROPN
ap-1743	149	6	,	,	PUNCT
ap-1743	149	7	et	et	PROPN
ap-1743	149	8	al	al	PROPN
ap-1743	149	9	.	.	PROPN
ap-1743	149	10	initial	initial	ADJ
ap-1743	149	11	stages	stage	NOUN
ap-1743	149	12	of	of	ADP
ap-1743	149	13	epitaxial	epitaxial	ADJ
ap-1743	149	14	growth	growth	NOUN
ap-1743	149	15	of	of	ADP
ap-1743	149	16	y	y	PROPN
ap-1743	149	17	-	-	PUNCT
ap-1743	149	18	stabilized	stabilize	VERB
ap-1743	149	19	zro2	zro2	PROPN
ap-1743	149	20	thin	thin	ADJ
ap-1743	149	21	films	film	NOUN
ap-1743	149	22	on	on	ADP
ap-1743	149	23	a	a	DET
ap-1743	149	24	-	-	PUNCT
ap-1743	149	25	siox	siox	NOUN
ap-1743	149	26	/	/	SYM
ap-1743	149	27	si(001	si(001	NOUN
ap-1743	149	28	)	)	PUNCT
ap-1743	149	29	substrates	substrate	NOUN
ap-1743	149	30	.	.	PUNCT
ap-1743	150	1	appl	appl	NOUN
ap-1743	150	2	phys	phy	NOUN
ap-1743	150	3	75(6):2902–2910	75(6):2902–2910	PROPN
ap-1743	150	4	,	,	PUNCT
ap-1743	150	5	1994	1994	NUM
ap-1743	150	6	.	.	PUNCT
ap-1743	151	1	[	[	X
ap-1743	151	2	3	3	X
ap-1743	151	3	]	]	X
ap-1743	151	4	d.	d.	PROPN
ap-1743	151	5	beckel	beckel	PROPN
ap-1743	151	6	,	,	PUNCT
ap-1743	151	7	et	et	PROPN
ap-1743	151	8	al	al	PROPN
ap-1743	151	9	.	.	PUNCT
ap-1743	152	1	thin	thin	ADJ
ap-1743	152	2	films	film	NOUN
ap-1743	152	3	for	for	ADP
ap-1743	152	4	micro	micro	X
ap-1743	152	5	solid	solid	ADJ
ap-1743	152	6	oxide	oxide	NOUN
ap-1743	152	7	fuel	fuel	NOUN
ap-1743	152	8	cells	cell	NOUN
ap-1743	152	9	.	.	PUNCT
ap-1743	153	1	journal	journal	NOUN
ap-1743	153	2	of	of	ADP
ap-1743	153	3	power	power	NOUN
ap-1743	153	4	sources	source	NOUN
ap-1743	153	5	173:325–345	173:325–345	NUM
ap-1743	153	6	,	,	PUNCT
ap-1743	153	7	2007	2007	NUM
ap-1743	153	8	.	.	PUNCT
ap-1743	154	1	158	158	NUM
ap-1743	154	2	vol	vol	NOUN
ap-1743	154	3	.	.	PUNCT
ap-1743	155	1	53	53	NUM
ap-1743	155	2	no	no	NOUN
ap-1743	155	3	.	.	PUNCT
ap-1743	156	1	2/2013	2/2013	NUM
ap-1743	156	2	physical	physical	ADJ
ap-1743	156	3	and	and	CCONJ
ap-1743	156	4	electrical	electrical	ADJ
ap-1743	156	5	properties	property	NOUN
ap-1743	156	6	of	of	ADP
ap-1743	156	7	yttria	yttria	NOUN
ap-1743	156	8	-	-	PUNCT
ap-1743	156	9	stabilized	stabilize	VERB
ap-1743	156	10	zirconia	zirconia	ADJ
ap-1743	156	11	thin	thin	ADJ
ap-1743	156	12	films	film	NOUN
ap-1743	156	13	[	[	X
ap-1743	156	14	4	4	NUM
ap-1743	156	15	]	]	PUNCT
ap-1743	156	16	a.	a.	NOUN
ap-1743	156	17	dubbe	dubbe	NOUN
ap-1743	156	18	.	.	PUNCT
ap-1743	157	1	fundamentals	fundamental	NOUN
ap-1743	157	2	of	of	ADP
ap-1743	157	3	solid	solid	ADJ
ap-1743	157	4	state	state	NOUN
ap-1743	157	5	ionic	ionic	PROPN
ap-1743	157	6	micro	micro	NOUN
ap-1743	157	7	gas	gas	NOUN
ap-1743	157	8	sensors	sensor	NOUN
ap-1743	157	9	.	.	PUNCT
ap-1743	158	1	sensors	sensor	NOUN
ap-1743	158	2	and	and	CCONJ
ap-1743	158	3	actuators	actuator	NOUN
ap-1743	158	4	b	b	PROPN
ap-1743	158	5	88:138–148	88:138–148	PROPN
ap-1743	158	6	,	,	PUNCT
ap-1743	158	7	2003	2003	NUM
ap-1743	158	8	.	.	PUNCT
ap-1743	159	1	[	[	X
ap-1743	159	2	5	5	X
ap-1743	159	3	]	]	PUNCT
ap-1743	159	4	m.	m.	NOUN
ap-1743	159	5	hartmanova	hartmanova	PROPN
ap-1743	159	6	,	,	PUNCT
ap-1743	159	7	et	et	PROPN
ap-1743	159	8	al	al	PROPN
ap-1743	159	9	.	.	PUNCT
ap-1743	159	10	characterization	characterization	NOUN
ap-1743	159	11	of	of	ADP
ap-1743	159	12	ceria	ceria	PROPN
ap-1743	159	13	/	/	SYM
ap-1743	159	14	yttria	yttria	PROPN
ap-1743	159	15	stabilized	stabilize	VERB
ap-1743	159	16	zirconia	zirconia	NOUN
ap-1743	159	17	grown	grow	VERB
ap-1743	159	18	on	on	ADP
ap-1743	159	19	silicon	silicon	NOUN
ap-1743	159	20	substrate	substrate	NOUN
ap-1743	159	21	.	.	PUNCT
ap-1743	160	1	thin	thin	ADJ
ap-1743	160	2	solid	solid	ADJ
ap-1743	160	3	films	film	NOUN
ap-1743	160	4	345:330–337	345:330–337	NUM
ap-1743	160	5	,	,	PUNCT
ap-1743	160	6	1999	1999	NUM
ap-1743	160	7	.	.	PUNCT
ap-1743	161	1	[	[	X
ap-1743	161	2	6	6	NUM
ap-1743	161	3	]	]	PUNCT
ap-1743	161	4	j.	j.	PROPN
ap-1743	161	5	van	van	PROPN
ap-1743	161	6	herle	herle	PROPN
ap-1743	161	7	,	,	PUNCT
ap-1743	161	8	et	et	PROPN
ap-1743	161	9	al	al	PROPN
ap-1743	161	10	.	.	PROPN
ap-1743	161	11	concept	concept	NOUN
ap-1743	161	12	and	and	CCONJ
ap-1743	161	13	technology	technology	NOUN
ap-1743	161	14	of	of	ADP
ap-1743	161	15	sofc	sofc	NOUN
ap-1743	161	16	for	for	ADP
ap-1743	161	17	electric	electric	ADJ
ap-1743	161	18	vehicles	vehicle	NOUN
ap-1743	161	19	.	.	PUNCT
ap-1743	162	1	solid	solid	ADJ
ap-1743	162	2	state	state	NOUN
ap-1743	162	3	ionics	ionic	NOUN
ap-1743	162	4	132:333–342	132:333–342	NUM
ap-1743	162	5	,	,	PUNCT
ap-1743	162	6	2000	2000	NUM
ap-1743	162	7	.	.	PUNCT
ap-1743	163	1	[	[	X
ap-1743	163	2	7	7	X
ap-1743	163	3	]	]	PUNCT
ap-1743	163	4	t.	t.	PROPN
ap-1743	163	5	koch	koch	PROPN
ap-1743	163	6	,	,	PUNCT
ap-1743	163	7	p.	p.	PROPN
ap-1743	163	8	ziemann	ziemann	PROPN
ap-1743	163	9	.	.	PUNCT
ap-1743	164	1	effects	effect	NOUN
ap-1743	164	2	of	of	ADP
ap-1743	164	3	ion	ion	NOUN
ap-1743	164	4	-	-	PUNCT
ap-1743	164	5	beam	beam	NOUN
ap-1743	164	6	-	-	PUNCT
ap-1743	164	7	assisted	assist	VERB
ap-1743	164	8	deposition	deposition	NOUN
ap-1743	164	9	on	on	ADP
ap-1743	164	10	the	the	DET
ap-1743	164	11	growth	growth	NOUN
ap-1743	164	12	of	of	ADP
ap-1743	164	13	zirconia	zirconia	NOUN
ap-1743	164	14	films	film	NOUN
ap-1743	164	15	.	.	PUNCT
ap-1743	165	1	thin	thin	ADJ
ap-1743	165	2	solid	solid	ADJ
ap-1743	165	3	films	film	NOUN
ap-1743	165	4	303:122–127	303:122–127	NUM
ap-1743	165	5	,	,	PUNCT
ap-1743	165	6	1997	1997	NUM
ap-1743	165	7	.	.	PUNCT
ap-1743	166	1	[	[	X
ap-1743	166	2	8	8	NUM
ap-1743	166	3	]	]	X
ap-1743	166	4	l.	l.	PROPN
ap-1743	166	5	mechin	mechin	PROPN
ap-1743	166	6	,	,	PUNCT
ap-1743	166	7	et	et	PROPN
ap-1743	166	8	al	al	PROPN
ap-1743	166	9	.	.	PROPN
ap-1743	166	10	double	double	ADJ
ap-1743	166	11	ceo2	ceo2	NOUN
ap-1743	166	12	/	/	SYM
ap-1743	166	13	ysz	ysz	NOUN
ap-1743	166	14	buffer	buffer	NOUN
ap-1743	166	15	layer	layer	NOUN
ap-1743	166	16	for	for	ADP
ap-1743	166	17	the	the	DET
ap-1743	166	18	epitaxial	epitaxial	ADJ
ap-1743	166	19	growth	growth	NOUN
ap-1743	166	20	of	of	ADP
ap-1743	166	21	yba2cu3o7−δ	yba2cu3o7−δ	PROPN
ap-1743	166	22	films	film	NOUN
ap-1743	166	23	on	on	ADP
ap-1743	166	24	si(001	si(001	NOUN
ap-1743	166	25	)	)	PUNCT
ap-1743	166	26	substrates	substrate	NOUN
ap-1743	166	27	.	.	PUNCT
ap-1743	167	1	physica	physica	NOUN
ap-1743	167	2	c	c	NOUN
ap-1743	167	3	:	:	PUNCT
ap-1743	167	4	superconductivity	superconductivity	NOUN
ap-1743	167	5	and	and	CCONJ
ap-1743	167	6	applications	application	NOUN
ap-1743	167	7	269(1–2):124–130	269(1–2):124–130	NUM
ap-1743	167	8	,	,	PUNCT
ap-1743	167	9	1996	1996	NUM
ap-1743	167	10	.	.	PUNCT
ap-1743	168	1	[	[	X
ap-1743	168	2	9	9	NUM
ap-1743	168	3	]	]	PUNCT
ap-1743	168	4	l.	l.	PROPN
ap-1743	168	5	r.	r.	PROPN
ap-1743	168	6	pederson	pederson	PROPN
ap-1743	168	7	,	,	PUNCT
ap-1743	168	8	p.	p.	PROPN
ap-1743	168	9	singh	singh	PROPN
ap-1743	168	10	,	,	PUNCT
ap-1743	168	11	zhou	zhou	PROPN
ap-1743	168	12	x.-d	x.-d	PROPN
ap-1743	168	13	.	.	PUNCT
ap-1743	168	14	review	review	NOUN
ap-1743	168	15	.	.	PUNCT
ap-1743	169	1	application	application	NOUN
ap-1743	169	2	of	of	ADP
ap-1743	169	3	vacuum	vacuum	NOUN
ap-1743	169	4	deposition	deposition	NOUN
ap-1743	169	5	methods	method	NOUN
ap-1743	169	6	to	to	ADP
ap-1743	169	7	solid	solid	ADJ
ap-1743	169	8	oxide	oxide	NOUN
ap-1743	169	9	fuel	fuel	NOUN
ap-1743	169	10	cells	cell	NOUN
ap-1743	169	11	.	.	PUNCT
ap-1743	170	1	vacuum	vacuum	PROPN
ap-1743	170	2	80:1066–1083	80:1066–1083	NUM
ap-1743	170	3	,	,	PUNCT
ap-1743	170	4	2006	2006	NUM
ap-1743	170	5	.	.	PUNCT
ap-1743	171	1	[	[	X
ap-1743	171	2	10	10	NUM
ap-1743	171	3	]	]	X
ap-1743	171	4	l.	l.	PROPN
ap-1743	171	5	r.	r.	PROPN
ap-1743	171	6	pederson	pederson	PROPN
ap-1743	171	7	,	,	PUNCT
ap-1743	171	8	p.	p.	PROPN
ap-1743	171	9	singh	singh	PROPN
ap-1743	171	10	,	,	PUNCT
ap-1743	171	11	x.-d	x.-d	PROPN
ap-1743	171	12	.	.	PUNCT
ap-1743	172	1	zhou	zhou	PROPN
ap-1743	172	2	.	.	PUNCT
ap-1743	173	1	application	application	NOUN
ap-1743	173	2	of	of	ADP
ap-1743	173	3	vacuum	vacuum	NOUN
ap-1743	173	4	deposition	deposition	NOUN
ap-1743	173	5	methods	method	NOUN
ap-1743	173	6	to	to	ADP
ap-1743	173	7	solid	solid	ADJ
ap-1743	173	8	oxide	oxide	NOUN
ap-1743	173	9	fuel	fuel	NOUN
ap-1743	173	10	cells	cell	NOUN
ap-1743	173	11	.	.	PUNCT
ap-1743	174	1	review	review	NOUN
ap-1743	174	2	.	.	PUNCT
ap-1743	175	1	vacuum	vacuum	PROPN
ap-1743	175	2	80:1066–1083	80:1066–1083	NUM
ap-1743	175	3	,	,	PUNCT
ap-1743	175	4	2006	2006	NUM
ap-1743	175	5	.	.	PUNCT
ap-1743	176	1	[	[	X
ap-1743	176	2	11	11	NUM
ap-1743	176	3	]	]	PUNCT
ap-1743	176	4	k.	k.	PROPN
ap-1743	176	5	sasaki	sasaki	PROPN
ap-1743	176	6	,	,	PUNCT
ap-1743	176	7	et	et	PROPN
ap-1743	176	8	al	al	PROPN
ap-1743	176	9	.	.	PROPN
ap-1743	176	10	limited	limited	ADJ
ap-1743	176	11	reaction	reaction	NOUN
ap-1743	176	12	growth	growth	NOUN
ap-1743	176	13	of	of	ADP
ap-1743	176	14	ysz	ysz	NOUN
ap-1743	176	15	(	(	PUNCT
ap-1743	176	16	zro2	zro2	PROPN
ap-1743	176	17	:	:	PUNCT
ap-1743	176	18	y2o3	y2o3	NOUN
ap-1743	176	19	)	)	PUNCT
ap-1743	176	20	thin	thin	ADJ
ap-1743	176	21	films	film	NOUN
ap-1743	176	22	for	for	ADP
ap-1743	176	23	gate	gate	NOUN
ap-1743	176	24	insulator	insulator	NOUN
ap-1743	176	25	.	.	PUNCT
ap-1743	177	1	vacuum	vacuum	PROPN
ap-1743	177	2	66:403–408	66:403–408	PROPN
ap-1743	177	3	,	,	PUNCT
ap-1743	177	4	2002	2002	NUM
ap-1743	177	5	.	.	PUNCT
ap-1743	178	1	[	[	X
ap-1743	178	2	12	12	NUM
ap-1743	178	3	]	]	X
ap-1743	178	4	s.c	s.c	PROPN
ap-1743	178	5	.	.	PROPN
ap-1743	178	6	singhal	singhal	PROPN
ap-1743	178	7	.	.	PUNCT
ap-1743	179	1	high	high	ADJ
ap-1743	179	2	-	-	PUNCT
ap-1743	179	3	temperature	temperature	NOUN
ap-1743	179	4	solid	solid	ADJ
ap-1743	179	5	oxide	oxide	NOUN
ap-1743	179	6	fuel	fuel	NOUN
ap-1743	179	7	cells	cell	NOUN
ap-1743	179	8	:	:	PUNCT
ap-1743	179	9	fundamentals	fundamental	NOUN
ap-1743	179	10	,	,	PUNCT
ap-1743	179	11	design	design	NOUN
ap-1743	179	12	and	and	CCONJ
ap-1743	179	13	applications	application	NOUN
ap-1743	179	14	.	.	PUNCT
ap-1743	180	1	elsevier	elsevi	ADJ
ap-1743	180	2	science	science	PROPN
ap-1743	180	3	,	,	PUNCT
ap-1743	180	4	oxford	oxford	PROPN
ap-1743	180	5	,	,	PUNCT
ap-1743	180	6	2003	2003	NUM
ap-1743	180	7	.	.	PUNCT
ap-1743	181	1	[	[	X
ap-1743	181	2	13	13	NUM
ap-1743	181	3	]	]	X
ap-1743	181	4	j.	j.	PROPN
ap-1743	181	5	will	will	AUX
ap-1743	181	6	,	,	PUNCT
ap-1743	181	7	et	et	PROPN
ap-1743	181	8	al	al	PROPN
ap-1743	181	9	.	.	PROPN
ap-1743	181	10	fabrication	fabrication	NOUN
ap-1743	181	11	of	of	ADP
ap-1743	181	12	thin	thin	ADJ
ap-1743	181	13	electrolytes	electrolyte	NOUN
ap-1743	181	14	for	for	ADP
ap-1743	181	15	second	second	ADJ
ap-1743	181	16	-	-	PUNCT
ap-1743	181	17	generation	generation	NOUN
ap-1743	181	18	solid	solid	ADJ
ap-1743	181	19	oxide	oxide	NOUN
ap-1743	181	20	fuel	fuel	NOUN
ap-1743	181	21	cells	cell	NOUN
ap-1743	181	22	.	.	PUNCT
ap-1743	182	1	solid	solid	ADJ
ap-1743	182	2	state	state	NOUN
ap-1743	182	3	ionics	ionic	NOUN
ap-1743	182	4	131:79–96	131:79–96	NUM
ap-1743	182	5	,	,	PUNCT
ap-1743	182	6	2000	2000	NUM
ap-1743	182	7	.	.	PUNCT
ap-1743	183	1	[	[	X
ap-1743	183	2	14	14	NUM
ap-1743	183	3	]	]	X
ap-1743	183	4	s.	s.	PROPN
ap-1743	183	5	yu	yu	PROPN
ap-1743	183	6	,	,	PUNCT
ap-1743	183	7	et	et	PROPN
ap-1743	183	8	al	al	PROPN
ap-1743	183	9	.	.	PUNCT
ap-1743	183	10	development	development	NOUN
ap-1743	183	11	of	of	ADP
ap-1743	183	12	a	a	DET
ap-1743	183	13	silicon	silicon	NOUN
ap-1743	183	14	-	-	PUNCT
ap-1743	183	15	based	base	VERB
ap-1743	183	16	yttria	yttria	NOUN
ap-1743	183	17	-	-	PUNCT
ap-1743	183	18	stabilized	stabilize	VERB
ap-1743	183	19	-	-	PUNCT
ap-1743	183	20	zirconia	zirconia	NOUN
ap-1743	183	21	(	(	PUNCT
ap-1743	183	22	ysz	ysz	NOUN
ap-1743	183	23	)	)	PUNCT
ap-1743	183	24	,	,	PUNCT
ap-1743	183	25	amperometric	amperometric	NOUN
ap-1743	183	26	oxygen	oxygen	NOUN
ap-1743	183	27	sensor	sensor	NOUN
ap-1743	183	28	.	.	PUNCT
ap-1743	184	1	sensors	sensor	NOUN
ap-1743	184	2	actuators	actuator	NOUN
ap-1743	184	3	b	b	PROPN
ap-1743	184	4	85:212–218	85:212–218	NUM
ap-1743	184	5	,	,	PUNCT
ap-1743	184	6	2002	2002	NUM
ap-1743	184	7	.	.	PUNCT
ap-1743	185	1	[	[	X
ap-1743	185	2	15	15	NUM
ap-1743	185	3	]	]	X
ap-1743	185	4	j.	j.	PROPN
ap-1743	185	5	zhu	zhu	PROPN
ap-1743	185	6	,	,	PUNCT
ap-1743	185	7	z.g	z.g	PROPN
ap-1743	185	8	.	.	PUNCT
ap-1743	185	9	liu	liu	PROPN
ap-1743	185	10	.	.	PUNCT
ap-1743	186	1	dielectric	dielectric	ADJ
ap-1743	186	2	properties	property	NOUN
ap-1743	186	3	of	of	ADP
ap-1743	186	4	ysz	ysz	NOUN
ap-1743	186	5	high	high	ADJ
ap-1743	186	6	-	-	PUNCT
ap-1743	186	7	k	k	NOUN
ap-1743	186	8	thin	thin	ADJ
ap-1743	186	9	films	film	NOUN
ap-1743	186	10	fabricated	fabricate	VERB
ap-1743	186	11	at	at	ADP
ap-1743	186	12	low	low	ADJ
ap-1743	186	13	temperature	temperature	NOUN
ap-1743	186	14	by	by	ADP
ap-1743	186	15	pulsed	pulse	VERB
ap-1743	186	16	laser	laser	NOUN
ap-1743	186	17	deposition	deposition	NOUN
ap-1743	186	18	.	.	PUNCT
ap-1743	187	1	materials	material	NOUN
ap-1743	187	2	letters	letter	NOUN
ap-1743	187	3	57(26–27):4297–4301	57(26–27):4297–4301	NUM
ap-1743	187	4	,	,	PUNCT
ap-1743	187	5	2003	2003	NUM
ap-1743	187	6	.	.	PUNCT
ap-1743	188	1	159	159	NUM
ap-1743	188	2	acta	acta	PROPN
ap-1743	188	3	polytechnica	polytechnica	PROPN
ap-1743	188	4	53(2):155–159	53(2):155–159	PROPN
ap-1743	188	5	,	,	PUNCT
ap-1743	188	6	2013	2013	NUM
ap-1743	188	7	1	1	NUM
ap-1743	188	8	introduction	introduction	NOUN
ap-1743	188	9	2	2	NUM
ap-1743	188	10	experiment	experiment	NOUN
ap-1743	188	11	3	3	NUM
ap-1743	188	12	results	result	VERB
ap-1743	188	13	4	4	NUM
ap-1743	188	14	conclusion	conclusion	NOUN
ap-1743	188	15	references	reference	NOUN