id	sid	tid	token	lemma	pos
ap-1767	1	1	acta	acta	PROPN
ap-1767	1	2	polytechnica	polytechnica	PROPN
ap-1767	1	3	acta	acta	PROPN
ap-1767	1	4	polytechnica	polytechnica	PROPN
ap-1767	1	5	53(2):223–227	53(2):223–227	PROPN
ap-1767	1	6	,	,	PUNCT
ap-1767	1	7	2013	2013	NUM
ap-1767	1	8	©	©	PROPN
ap-1767	1	9	czech	czech	PROPN
ap-1767	1	10	technical	technical	PROPN
ap-1767	1	11	university	university	PROPN
ap-1767	1	12	in	in	ADP
ap-1767	1	13	prague	prague	PROPN
ap-1767	1	14	,	,	PUNCT
ap-1767	1	15	2013	2013	NUM
ap-1767	1	16	available	available	ADJ
ap-1767	1	17	online	online	ADV
ap-1767	1	18	at	at	ADP
ap-1767	1	19	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	ADJ
ap-1767	1	20	positioning	positioning	NOUN
ap-1767	1	21	of	of	ADP
ap-1767	1	22	the	the	DET
ap-1767	1	23	precursor	precursor	NOUN
ap-1767	1	24	gas	gas	NOUN
ap-1767	1	25	inlet	inlet	NOUN
ap-1767	1	26	in	in	ADP
ap-1767	1	27	an	an	DET
ap-1767	1	28	atmospheric	atmospheric	ADJ
ap-1767	1	29	dielectric	dielectric	ADJ
ap-1767	1	30	barrier	barrier	NOUN
ap-1767	1	31	reactor	reactor	NOUN
ap-1767	1	32	,	,	PUNCT
ap-1767	1	33	and	and	CCONJ
ap-1767	1	34	its	its	PRON
ap-1767	1	35	effect	effect	NOUN
ap-1767	1	36	on	on	ADP
ap-1767	1	37	the	the	DET
ap-1767	1	38	quality	quality	NOUN
ap-1767	1	39	of	of	ADP
ap-1767	1	40	deposited	deposit	VERB
ap-1767	1	41	tiox	tiox	NOUN
ap-1767	1	42	thin	thin	ADJ
ap-1767	1	43	film	film	NOUN
ap-1767	1	44	surface	surface	PROPN
ap-1767	1	45	jan	jan	PROPN
ap-1767	1	46	pichal∗	pichal∗	PROPN
ap-1767	1	47	,	,	PUNCT
ap-1767	1	48	julia	julia	PROPN
ap-1767	1	49	klenko	klenko	PROPN
ap-1767	1	50	czech	czech	PROPN
ap-1767	1	51	technical	technical	PROPN
ap-1767	1	52	university	university	PROPN
ap-1767	1	53	in	in	ADP
ap-1767	1	54	prague	prague	PROPN
ap-1767	1	55	,	,	PUNCT
ap-1767	1	56	faculty	faculty	NOUN
ap-1767	1	57	of	of	ADP
ap-1767	1	58	electrical	electrical	ADJ
ap-1767	1	59	engineering	engineering	NOUN
ap-1767	1	60	,	,	PUNCT
ap-1767	1	61	technicka	technicka	NOUN
ap-1767	1	62	2	2	NUM
ap-1767	1	63	,	,	PUNCT
ap-1767	1	64	prague	prague	NOUN
ap-1767	1	65	6	6	NUM
ap-1767	1	66	,	,	PUNCT
ap-1767	1	67	czech	czech	PROPN
ap-1767	1	68	republic	republic	NOUN
ap-1767	1	69	∗	∗	NOUN
ap-1767	1	70	corresponding	correspond	VERB
ap-1767	1	71	author	author	NOUN
ap-1767	1	72	:	:	PUNCT
ap-1767	1	73	pichal@fel.cvut.cz	pichal@fel.cvut.cz	NOUN
ap-1767	1	74	abstract	abstract	NOUN
ap-1767	1	75	.	.	PUNCT
ap-1767	2	1	thin	thin	ADJ
ap-1767	2	2	film	film	NOUN
ap-1767	2	3	technology	technology	NOUN
ap-1767	2	4	has	have	AUX
ap-1767	2	5	become	become	VERB
ap-1767	2	6	pervasive	pervasive	ADJ
ap-1767	2	7	in	in	ADP
ap-1767	2	8	many	many	ADJ
ap-1767	2	9	applications	application	NOUN
ap-1767	2	10	in	in	ADP
ap-1767	2	11	recent	recent	ADJ
ap-1767	2	12	years	year	NOUN
ap-1767	2	13	,	,	PUNCT
ap-1767	2	14	but	but	CCONJ
ap-1767	2	15	it	it	PRON
ap-1767	2	16	remains	remain	VERB
ap-1767	2	17	difficult	difficult	ADJ
ap-1767	2	18	to	to	PART
ap-1767	2	19	select	select	VERB
ap-1767	2	20	the	the	DET
ap-1767	2	21	best	good	ADJ
ap-1767	2	22	deposition	deposition	NOUN
ap-1767	2	23	technique	technique	NOUN
ap-1767	2	24	.	.	PUNCT
ap-1767	3	1	a	a	DET
ap-1767	3	2	further	further	ADJ
ap-1767	3	3	consideration	consideration	NOUN
ap-1767	3	4	is	be	AUX
ap-1767	3	5	that	that	SCONJ
ap-1767	3	6	,	,	PUNCT
ap-1767	3	7	due	due	ADP
ap-1767	3	8	to	to	ADP
ap-1767	3	9	ecological	ecological	ADJ
ap-1767	3	10	demands	demand	NOUN
ap-1767	3	11	,	,	PUNCT
ap-1767	3	12	we	we	PRON
ap-1767	3	13	are	be	AUX
ap-1767	3	14	forced	force	VERB
ap-1767	3	15	to	to	PART
ap-1767	3	16	search	search	VERB
ap-1767	3	17	for	for	ADP
ap-1767	3	18	environmentally	environmentally	ADV
ap-1767	3	19	benign	benign	ADJ
ap-1767	3	20	methods	method	NOUN
ap-1767	3	21	.	.	PUNCT
ap-1767	4	1	one	one	NUM
ap-1767	4	2	such	such	ADJ
ap-1767	4	3	method	method	NOUN
ap-1767	4	4	might	might	AUX
ap-1767	4	5	be	be	AUX
ap-1767	4	6	the	the	DET
ap-1767	4	7	application	application	NOUN
ap-1767	4	8	of	of	ADP
ap-1767	4	9	cold	cold	ADJ
ap-1767	4	10	plasmas	plasma	NOUN
ap-1767	4	11	,	,	PUNCT
ap-1767	4	12	and	and	CCONJ
ap-1767	4	13	there	there	PRON
ap-1767	4	14	has	have	AUX
ap-1767	4	15	already	already	ADV
ap-1767	4	16	been	be	AUX
ap-1767	4	17	a	a	DET
ap-1767	4	18	rapid	rapid	ADJ
ap-1767	4	19	growth	growth	NOUN
ap-1767	4	20	in	in	ADP
ap-1767	4	21	studies	study	NOUN
ap-1767	4	22	of	of	ADP
ap-1767	4	23	cold	cold	ADJ
ap-1767	4	24	plasma	plasma	NOUN
ap-1767	4	25	techniques	technique	NOUN
ap-1767	4	26	.	.	PUNCT
ap-1767	5	1	plasma	plasma	NOUN
ap-1767	5	2	technologies	technology	NOUN
ap-1767	5	3	operating	operate	VERB
ap-1767	5	4	at	at	ADP
ap-1767	5	5	atmospheric	atmospheric	ADJ
ap-1767	5	6	pressure	pressure	NOUN
ap-1767	5	7	have	have	AUX
ap-1767	5	8	been	be	AUX
ap-1767	5	9	attracting	attract	VERB
ap-1767	5	10	increasing	increase	VERB
ap-1767	5	11	attention	attention	NOUN
ap-1767	5	12	.	.	PUNCT
ap-1767	6	1	the	the	DET
ap-1767	6	2	easiest	easy	ADJ
ap-1767	6	3	way	way	NOUN
ap-1767	6	4	to	to	PART
ap-1767	6	5	obtain	obtain	VERB
ap-1767	6	6	low	low	ADJ
ap-1767	6	7	temperature	temperature	NOUN
ap-1767	6	8	plasma	plasma	NOUN
ap-1767	6	9	at	at	ADP
ap-1767	6	10	atmospheric	atmospheric	ADJ
ap-1767	6	11	pressure	pressure	NOUN
ap-1767	6	12	seems	seem	VERB
ap-1767	6	13	to	to	PART
ap-1767	6	14	be	be	AUX
ap-1767	6	15	through	through	ADP
ap-1767	6	16	atmospheric	atmospheric	ADJ
ap-1767	6	17	dielectric	dielectric	ADJ
ap-1767	6	18	barrier	barrier	NOUN
ap-1767	6	19	discharge	discharge	NOUN
ap-1767	6	20	(	(	PUNCT
ap-1767	6	21	adbd	adbd	NOUN
ap-1767	6	22	)	)	PUNCT
ap-1767	6	23	.	.	PUNCT
ap-1767	7	1	we	we	PRON
ap-1767	7	2	used	use	VERB
ap-1767	7	3	the	the	DET
ap-1767	7	4	plasma	plasma	NOUN
ap-1767	7	5	enhanced	enhance	VERB
ap-1767	7	6	chemical	chemical	NOUN
ap-1767	7	7	vapour	vapour	NOUN
ap-1767	7	8	deposition	deposition	NOUN
ap-1767	7	9	(	(	PUNCT
ap-1767	7	10	pecvd	pecvd	NOUN
ap-1767	7	11	)	)	PUNCT
ap-1767	7	12	method	method	NOUN
ap-1767	7	13	applying	apply	VERB
ap-1767	7	14	atmospheric	atmospheric	ADJ
ap-1767	7	15	dielectric	dielectric	ADJ
ap-1767	7	16	barrier	barrier	NOUN
ap-1767	7	17	discharge	discharge	NOUN
ap-1767	7	18	(	(	PUNCT
ap-1767	7	19	adbd	adbd	NOUN
ap-1767	7	20	)	)	PUNCT
ap-1767	7	21	plasma	plasma	NOUN
ap-1767	7	22	for	for	ADP
ap-1767	7	23	tiox	tiox	NOUN
ap-1767	7	24	thin	thin	ADJ
ap-1767	7	25	films	film	NOUN
ap-1767	7	26	deposition	deposition	NOUN
ap-1767	7	27	,	,	PUNCT
ap-1767	7	28	employing	employ	VERB
ap-1767	7	29	titanium	titanium	NOUN
ap-1767	7	30	isopropoxide	isopropoxide	NOUN
ap-1767	7	31	(	(	PUNCT
ap-1767	7	32	ttip	ttip	NOUN
ap-1767	7	33	)	)	PUNCT
ap-1767	7	34	and	and	CCONJ
ap-1767	7	35	oxygen	oxygen	NOUN
ap-1767	7	36	as	as	ADP
ap-1767	7	37	reactants	reactant	NOUN
ap-1767	7	38	,	,	PUNCT
ap-1767	7	39	and	and	CCONJ
ap-1767	7	40	argon	argon	NOUN
ap-1767	7	41	as	as	ADP
ap-1767	7	42	a	a	DET
ap-1767	7	43	working	work	VERB
ap-1767	7	44	gas	gas	NOUN
ap-1767	7	45	.	.	PUNCT
ap-1767	8	1	adbd	adbd	PROPN
ap-1767	8	2	was	be	AUX
ap-1767	8	3	operated	operate	VERB
ap-1767	8	4	in	in	ADP
ap-1767	8	5	filamentary	filamentary	ADJ
ap-1767	8	6	mode	mode	NOUN
ap-1767	8	7	.	.	PUNCT
ap-1767	9	1	the	the	DET
ap-1767	9	2	films	film	NOUN
ap-1767	9	3	were	be	AUX
ap-1767	9	4	deposited	deposit	VERB
ap-1767	9	5	on	on	ADP
ap-1767	9	6	glass	glass	NOUN
ap-1767	9	7	.	.	PUNCT
ap-1767	10	1	we	we	PRON
ap-1767	10	2	studied	study	VERB
ap-1767	10	3	the	the	DET
ap-1767	10	4	quality	quality	NOUN
ap-1767	10	5	of	of	ADP
ap-1767	10	6	the	the	DET
ap-1767	10	7	deposited	deposit	VERB
ap-1767	10	8	tiox	tiox	NOUN
ap-1767	10	9	thin	thin	ADJ
ap-1767	10	10	film	film	NOUN
ap-1767	10	11	surface	surface	NOUN
ap-1767	10	12	for	for	ADP
ap-1767	10	13	various	various	ADJ
ap-1767	10	14	precursor	precursor	NOUN
ap-1767	10	15	gas	gas	NOUN
ap-1767	10	16	inlet	inlet	NOUN
ap-1767	10	17	positions	position	NOUN
ap-1767	10	18	in	in	ADP
ap-1767	10	19	the	the	DET
ap-1767	10	20	adbd	adbd	ADJ
ap-1767	10	21	reactor	reactor	NOUN
ap-1767	10	22	.	.	PUNCT
ap-1767	11	1	the	the	DET
ap-1767	11	2	best	good	ADJ
ap-1767	11	3	thin	thin	ADJ
ap-1767	11	4	films	film	NOUN
ap-1767	11	5	quality	quality	NOUN
ap-1767	11	6	was	be	AUX
ap-1767	11	7	achieved	achieve	VERB
ap-1767	11	8	when	when	SCONJ
ap-1767	11	9	the	the	DET
ap-1767	11	10	precursor	precursor	NOUN
ap-1767	11	11	gases	gas	NOUN
ap-1767	11	12	were	be	AUX
ap-1767	11	13	brought	bring	VERB
ap-1767	11	14	close	close	ADV
ap-1767	11	15	to	to	ADP
ap-1767	11	16	the	the	DET
ap-1767	11	17	substrate	substrate	NOUN
ap-1767	11	18	surface	surface	NOUN
ap-1767	11	19	directly	directly	ADV
ap-1767	11	20	through	through	ADP
ap-1767	11	21	the	the	DET
ap-1767	11	22	inlet	inlet	NOUN
ap-1767	11	23	placed	place	VERB
ap-1767	11	24	in	in	ADP
ap-1767	11	25	one	one	NUM
ap-1767	11	26	of	of	ADP
ap-1767	11	27	the	the	DET
ap-1767	11	28	electrodes	electrode	NOUN
ap-1767	11	29	.	.	PUNCT
ap-1767	12	1	high	high	ADJ
ap-1767	12	2	hydrophilicity	hydrophilicity	NOUN
ap-1767	12	3	of	of	ADP
ap-1767	12	4	the	the	DET
ap-1767	12	5	samples	sample	NOUN
ap-1767	12	6	was	be	AUX
ap-1767	12	7	proved	prove	VERB
ap-1767	12	8	by	by	ADP
ap-1767	12	9	contact	contact	NOUN
ap-1767	12	10	angle	angle	NOUN
ap-1767	12	11	tests	test	NOUN
ap-1767	12	12	(	(	PUNCT
ap-1767	12	13	ca	ca	NOUN
ap-1767	12	14	)	)	PUNCT
ap-1767	12	15	.	.	PUNCT
ap-1767	13	1	the	the	DET
ap-1767	13	2	film	film	NOUN
ap-1767	13	3	morphology	morphology	NOUN
ap-1767	13	4	was	be	AUX
ap-1767	13	5	tested	test	VERB
ap-1767	13	6	by	by	ADP
ap-1767	13	7	atomic	atomic	ADJ
ap-1767	13	8	force	force	NOUN
ap-1767	13	9	microscopy	microscopy	NOUN
ap-1767	13	10	(	(	PUNCT
ap-1767	13	11	afm	afm	PROPN
ap-1767	13	12	)	)	PUNCT
ap-1767	13	13	.	.	PUNCT
ap-1767	14	1	the	the	DET
ap-1767	14	2	thickness	thickness	NOUN
ap-1767	14	3	of	of	ADP
ap-1767	14	4	the	the	DET
ap-1767	14	5	thin	thin	ADJ
ap-1767	14	6	films	film	NOUN
ap-1767	14	7	varied	varied	ADJ
ap-1767	14	8	in	in	ADP
ap-1767	14	9	the	the	DET
ap-1767	14	10	range	range	NOUN
ap-1767	14	11	of	of	ADP
ap-1767	14	12	(	(	PUNCT
ap-1767	14	13	80	80	NUM
ap-1767	14	14	÷	÷	NUM
ap-1767	14	15	210	210	NUM
ap-1767	14	16	)	)	PUNCT
ap-1767	14	17	nm	nm	NOUN
ap-1767	14	18	in	in	ADP
ap-1767	14	19	dependence	dependence	NOUN
ap-1767	14	20	on	on	ADP
ap-1767	14	21	the	the	DET
ap-1767	14	22	composition	composition	NOUN
ap-1767	14	23	of	of	ADP
ap-1767	14	24	the	the	DET
ap-1767	14	25	reactor	reactor	NOUN
ap-1767	14	26	atmosphere	atmosphere	NOUN
ap-1767	14	27	.	.	PUNCT
ap-1767	15	1	xps	xps	PROPN
ap-1767	15	2	analyses	analysis	NOUN
ap-1767	15	3	indicate	indicate	VERB
ap-1767	15	4	that	that	SCONJ
ap-1767	15	5	composition	composition	NOUN
ap-1767	15	6	of	of	ADP
ap-1767	15	7	the	the	DET
ap-1767	15	8	films	film	NOUN
ap-1767	15	9	is	be	AUX
ap-1767	15	10	more	more	ADV
ap-1767	15	11	like	like	ADP
ap-1767	15	12	the	the	DET
ap-1767	15	13	composition	composition	NOUN
ap-1767	15	14	of	of	ADP
ap-1767	15	15	tioxcy	tioxcy	PROPN
ap-1767	15	16	.	.	PUNCT
ap-1767	16	1	keywords	keyword	NOUN
ap-1767	16	2	:	:	PUNCT
ap-1767	16	3	afm	afm	PROPN
ap-1767	16	4	,	,	PUNCT
ap-1767	16	5	atmospheric	atmospheric	ADJ
ap-1767	16	6	dielectric	dielectric	ADJ
ap-1767	16	7	barrier	barrier	NOUN
ap-1767	16	8	discharge	discharge	VERB
ap-1767	16	9	,	,	PUNCT
ap-1767	16	10	chemical	chemical	NOUN
ap-1767	16	11	composition	composition	NOUN
ap-1767	16	12	,	,	PUNCT
ap-1767	16	13	chemical	chemical	NOUN
ap-1767	16	14	vapour	vapour	NOUN
ap-1767	16	15	deposition	deposition	NOUN
ap-1767	16	16	,	,	PUNCT
ap-1767	16	17	inlet	inlet	NOUN
ap-1767	16	18	position	position	NOUN
ap-1767	16	19	,	,	PUNCT
ap-1767	16	20	precursor	precursor	NOUN
ap-1767	16	21	gas	gas	NOUN
ap-1767	16	22	,	,	PUNCT
ap-1767	16	23	surface	surface	NOUN
ap-1767	16	24	quality	quality	NOUN
ap-1767	16	25	,	,	PUNCT
ap-1767	16	26	thin	thin	ADJ
ap-1767	16	27	film	film	NOUN
ap-1767	16	28	,	,	PUNCT
ap-1767	16	29	tiox	tiox	NOUN
ap-1767	16	30	,	,	PUNCT
ap-1767	16	31	tioxcy	tioxcy	PROPN
ap-1767	16	32	,	,	PUNCT
ap-1767	16	33	xps	xps	PROPN
ap-1767	16	34	.	.	PROPN
ap-1767	17	1	1	1	NUM
ap-1767	17	2	.	.	X
ap-1767	17	3	introduction	introduction	NOUN
ap-1767	17	4	thin	thin	ADJ
ap-1767	17	5	film	film	NOUN
ap-1767	17	6	deposition	deposition	NOUN
ap-1767	17	7	techniques	technique	NOUN
ap-1767	17	8	and	and	CCONJ
ap-1767	17	9	technologies	technology	NOUN
ap-1767	17	10	have	have	AUX
ap-1767	17	11	undergone	undergo	VERB
ap-1767	17	12	serious	serious	ADJ
ap-1767	17	13	development	development	NOUN
ap-1767	17	14	and	and	CCONJ
ap-1767	17	15	cultivation	cultivation	NOUN
ap-1767	17	16	in	in	ADP
ap-1767	17	17	recent	recent	ADJ
ap-1767	17	18	decades	decade	NOUN
ap-1767	17	19	.	.	PUNCT
ap-1767	18	1	a	a	DET
ap-1767	18	2	vast	vast	ADJ
ap-1767	18	3	number	number	NOUN
ap-1767	18	4	of	of	ADP
ap-1767	18	5	deposition	deposition	NOUN
ap-1767	18	6	methods	method	NOUN
ap-1767	18	7	are	be	AUX
ap-1767	18	8	now	now	ADV
ap-1767	18	9	available	available	ADJ
ap-1767	18	10	[	[	X
ap-1767	18	11	6	6	NUM
ap-1767	18	12	,	,	PUNCT
ap-1767	18	13	7	7	NUM
ap-1767	18	14	]	]	PUNCT
ap-1767	18	15	,	,	PUNCT
ap-1767	18	16	but	but	CCONJ
ap-1767	18	17	it	it	PRON
ap-1767	18	18	still	still	ADV
ap-1767	18	19	remains	remain	VERB
ap-1767	18	20	arduous	arduous	ADJ
ap-1767	18	21	to	to	PART
ap-1767	18	22	select	select	VERB
ap-1767	18	23	the	the	DET
ap-1767	18	24	best	good	ADJ
ap-1767	18	25	deposition	deposition	NOUN
ap-1767	18	26	method	method	NOUN
ap-1767	18	27	which	which	PRON
ap-1767	18	28	is	be	AUX
ap-1767	18	29	,	,	PUNCT
ap-1767	18	30	at	at	ADP
ap-1767	18	31	the	the	DET
ap-1767	18	32	same	same	ADJ
ap-1767	18	33	time	time	NOUN
ap-1767	18	34	,	,	PUNCT
ap-1767	18	35	environment	environment	NOUN
ap-1767	18	36	friendly	friendly	ADJ
ap-1767	18	37	.	.	PUNCT
ap-1767	19	1	the	the	DET
ap-1767	19	2	application	application	NOUN
ap-1767	19	3	of	of	ADP
ap-1767	19	4	cold	cold	ADJ
ap-1767	19	5	plasmas	plasma	NOUN
ap-1767	19	6	sustaining	sustain	VERB
ap-1767	19	7	under	under	ADP
ap-1767	19	8	atmospheric	atmospheric	ADJ
ap-1767	19	9	pressure	pressure	NOUN
ap-1767	19	10	in	in	ADP
ap-1767	19	11	combination	combination	NOUN
ap-1767	19	12	with	with	ADP
ap-1767	19	13	the	the	DET
ap-1767	19	14	chemical	chemical	ADJ
ap-1767	19	15	vapour	vapour	NOUN
ap-1767	19	16	deposition	deposition	NOUN
ap-1767	19	17	method	method	NOUN
ap-1767	19	18	seems	seem	VERB
ap-1767	19	19	to	to	PART
ap-1767	19	20	be	be	AUX
ap-1767	19	21	a	a	DET
ap-1767	19	22	promising	promising	ADJ
ap-1767	19	23	approach	approach	NOUN
ap-1767	19	24	.	.	PUNCT
ap-1767	20	1	cold	cold	ADJ
ap-1767	20	2	plasma	plasma	NOUN
ap-1767	20	3	is	be	AUX
ap-1767	20	4	often	often	ADV
ap-1767	20	5	produced	produce	VERB
ap-1767	20	6	in	in	ADP
ap-1767	20	7	plasma	plasma	NOUN
ap-1767	20	8	jets	jet	NOUN
ap-1767	20	9	,	,	PUNCT
ap-1767	20	10	plasma	plasma	NOUN
ap-1767	20	11	torches	torch	NOUN
ap-1767	20	12	and	and	CCONJ
ap-1767	20	13	adbd	adbd	NOUN
ap-1767	20	14	(	(	PUNCT
ap-1767	20	15	for	for	ADP
ap-1767	20	16	details	detail	NOUN
ap-1767	20	17	about	about	ADP
ap-1767	20	18	adbd	adbd	NOUN
ap-1767	20	19	,	,	PUNCT
ap-1767	20	20	see	see	VERB
ap-1767	21	1	e.g.	e.g.	ADV
ap-1767	21	2	[	[	X
ap-1767	21	3	5	5	NUM
ap-1767	21	4	]	]	NUM
ap-1767	21	5	)	)	PUNCT
ap-1767	21	6	.	.	PUNCT
ap-1767	22	1	however	however	ADV
ap-1767	22	2	,	,	PUNCT
ap-1767	22	3	research	research	NOUN
ap-1767	22	4	in	in	ADP
ap-1767	22	5	this	this	DET
ap-1767	22	6	area	area	NOUN
ap-1767	22	7	is	be	AUX
ap-1767	22	8	still	still	ADV
ap-1767	22	9	mostly	mostly	ADV
ap-1767	22	10	restricted	restrict	VERB
ap-1767	22	11	to	to	ADP
ap-1767	22	12	the	the	DET
ap-1767	22	13	laboratory	laboratory	NOUN
ap-1767	22	14	stage	stage	NOUN
ap-1767	22	15	.	.	PUNCT
ap-1767	23	1	for	for	ADP
ap-1767	23	2	practical	practical	ADJ
ap-1767	23	3	reasons	reason	NOUN
ap-1767	23	4	,	,	PUNCT
ap-1767	23	5	the	the	DET
ap-1767	23	6	most	most	ADV
ap-1767	23	7	tested	test	VERB
ap-1767	23	8	films	film	NOUN
ap-1767	23	9	are	be	AUX
ap-1767	23	10	siox	siox	ADJ
ap-1767	23	11	and	and	CCONJ
ap-1767	23	12	tiox	tiox	NOUN
ap-1767	23	13	coatings	coating	NOUN
ap-1767	23	14	.	.	PUNCT
ap-1767	24	1	this	this	DET
ap-1767	24	2	paper	paper	NOUN
ap-1767	24	3	summarizes	summarize	NOUN
ap-1767	24	4	results	result	NOUN
ap-1767	24	5	obtained	obtain	VERB
ap-1767	24	6	when	when	SCONJ
ap-1767	24	7	tiox	tiox	NOUN
ap-1767	24	8	films	film	NOUN
ap-1767	24	9	are	be	AUX
ap-1767	24	10	deposited	deposit	VERB
ap-1767	24	11	on	on	ADP
ap-1767	24	12	glass	glass	NOUN
ap-1767	24	13	substrates	substrate	NOUN
ap-1767	24	14	using	use	VERB
ap-1767	24	15	the	the	DET
ap-1767	24	16	pecvd	pecvd	NOUN
ap-1767	24	17	method	method	NOUN
ap-1767	24	18	in	in	ADP
ap-1767	24	19	an	an	DET
ap-1767	24	20	adbd	adbd	ADJ
ap-1767	24	21	plasma	plasma	NOUN
ap-1767	24	22	reactor	reactor	NOUN
ap-1767	24	23	when	when	SCONJ
ap-1767	24	24	ttip	ttip	NOUN
ap-1767	24	25	,	,	PUNCT
ap-1767	24	26	(	(	PUNCT
ap-1767	24	27	less	less	ADV
ap-1767	24	28	toxic	toxic	ADJ
ap-1767	24	29	than	than	ADP
ap-1767	24	30	ticl4	ticl4	PROPN
ap-1767	24	31	,	,	PUNCT
ap-1767	24	32	which	which	PRON
ap-1767	24	33	was	be	AUX
ap-1767	24	34	used	use	VERB
ap-1767	24	35	e.g.	e.g.	ADV
ap-1767	24	36	in	in	ADP
ap-1767	24	37	[	[	X
ap-1767	24	38	2	2	NUM
ap-1767	24	39	]	]	PUNCT
ap-1767	24	40	)	)	PUNCT
ap-1767	24	41	,	,	PUNCT
ap-1767	24	42	is	be	AUX
ap-1767	24	43	applied	apply	VERB
ap-1767	24	44	as	as	ADP
ap-1767	24	45	a	a	DET
ap-1767	24	46	precursor	precursor	NOUN
ap-1767	24	47	,	,	PUNCT
ap-1767	24	48	namely	namely	ADV
ap-1767	24	49	the	the	DET
ap-1767	24	50	connection	connection	NOUN
ap-1767	24	51	between	between	ADP
ap-1767	24	52	the	the	DET
ap-1767	24	53	precursor	precursor	NOUN
ap-1767	24	54	gas	gas	NOUN
ap-1767	24	55	inlet	inlet	NOUN
ap-1767	24	56	position	position	NOUN
ap-1767	24	57	in	in	ADP
ap-1767	24	58	the	the	DET
ap-1767	24	59	adbd	adbd	ADJ
ap-1767	24	60	reactor	reactor	NOUN
ap-1767	24	61	and	and	CCONJ
ap-1767	24	62	the	the	DET
ap-1767	24	63	deposited	deposit	VERB
ap-1767	24	64	film	film	NOUN
ap-1767	24	65	quality	quality	NOUN
ap-1767	24	66	.	.	PUNCT
ap-1767	25	1	some	some	DET
ap-1767	25	2	preliminary	preliminary	ADJ
ap-1767	25	3	results	result	NOUN
ap-1767	25	4	have	have	AUX
ap-1767	25	5	been	be	AUX
ap-1767	25	6	published	publish	VERB
ap-1767	25	7	in	in	ADP
ap-1767	25	8	[	[	X
ap-1767	25	9	3	3	NUM
ap-1767	25	10	,	,	PUNCT
ap-1767	25	11	4	4	NUM
ap-1767	25	12	]	]	PUNCT
ap-1767	25	13	.	.	PUNCT
ap-1767	26	1	2	2	X
ap-1767	26	2	.	.	X
ap-1767	26	3	experimental	experimental	ADJ
ap-1767	26	4	2.1	2.1	NUM
ap-1767	26	5	.	.	PUNCT
ap-1767	27	1	the	the	DET
ap-1767	27	2	reactor	reactor	NOUN
ap-1767	27	3	and	and	CCONJ
ap-1767	27	4	the	the	DET
ap-1767	27	5	experimental	experimental	ADJ
ap-1767	27	6	conditions	condition	NOUN
ap-1767	27	7	film	film	NOUN
ap-1767	27	8	deposition	deposition	NOUN
ap-1767	27	9	was	be	AUX
ap-1767	27	10	performed	perform	VERB
ap-1767	27	11	with	with	ADP
ap-1767	27	12	discharge	discharge	NOUN
ap-1767	27	13	power	power	NOUN
ap-1767	27	14	of	of	ADP
ap-1767	27	15	about	about	ADP
ap-1767	27	16	350mw	350mw	PROPN
ap-1767	28	1	[	[	PUNCT
ap-1767	28	2	14	14	NUM
ap-1767	28	3	kv	kv	PROPN
ap-1767	28	4	,	,	PUNCT
ap-1767	28	5	50hz	50hz	NOUN
ap-1767	28	6	]	]	PUNCT
ap-1767	28	7	.	.	PUNCT
ap-1767	29	1	the	the	DET
ap-1767	29	2	experiments	experiment	NOUN
ap-1767	29	3	were	be	AUX
ap-1767	29	4	carried	carry	VERB
ap-1767	29	5	out	out	ADP
ap-1767	29	6	in	in	ADP
ap-1767	29	7	an	an	DET
ap-1767	29	8	open	open	ADJ
ap-1767	29	9	flow	flow	NOUN
ap-1767	29	10	-	-	PUNCT
ap-1767	29	11	through	through	ADP
ap-1767	29	12	type	type	NOUN
ap-1767	29	13	plasma	plasma	NOUN
ap-1767	29	14	reactor	reactor	NOUN
ap-1767	29	15	with	with	ADP
ap-1767	29	16	dimensions	dimension	NOUN
ap-1767	29	17	(	(	PUNCT
ap-1767	29	18	90	90	NUM
ap-1767	29	19	×	×	NOUN
ap-1767	29	20	79	79	NUM
ap-1767	29	21	×	×	NOUN
ap-1767	29	22	41	41	NUM
ap-1767	29	23	)	)	PUNCT
ap-1767	29	24	mm	mm	NOUN
ap-1767	29	25	.	.	PUNCT
ap-1767	30	1	the	the	DET
ap-1767	30	2	scheme	scheme	NOUN
ap-1767	30	3	of	of	ADP
ap-1767	30	4	the	the	DET
ap-1767	30	5	plasma	plasma	NOUN
ap-1767	30	6	reactor	reactor	NOUN
ap-1767	30	7	is	be	AUX
ap-1767	30	8	shown	show	VERB
ap-1767	30	9	in	in	ADP
ap-1767	30	10	fig	fig	NOUN
ap-1767	30	11	.	.	PUNCT
ap-1767	31	1	1	1	X
ap-1767	31	2	.	.	X
ap-1767	31	3	plasma	plasma	NOUN
ap-1767	31	4	sustained	sustain	VERB
ap-1767	31	5	between	between	ADP
ap-1767	31	6	two	two	NUM
ap-1767	31	7	brass	brass	NOUN
ap-1767	31	8	electrodes	electrode	NOUN
ap-1767	31	9	[	[	X
ap-1767	31	10	(	(	PUNCT
ap-1767	31	11	45	45	NUM
ap-1767	31	12	×	×	NOUN
ap-1767	31	13	8	8	NUM
ap-1767	31	14	×	×	NOUN
ap-1767	31	15	18	18	NUM
ap-1767	31	16	)	)	PUNCT
ap-1767	31	17	mm	mm	PROPN
ap-1767	31	18	hv	hv	PROPN
ap-1767	31	19	electrode	electrode	PROPN
ap-1767	31	20	,	,	PUNCT
ap-1767	31	21	(	(	PUNCT
ap-1767	31	22	40	40	NUM
ap-1767	31	23	×	×	NOUN
ap-1767	31	24	17	17	NUM
ap-1767	31	25	×	×	NOUN
ap-1767	31	26	18	18	NUM
ap-1767	31	27	)	)	PUNCT
ap-1767	31	28	mm	mm	PROPN
ap-1767	31	29	ground	ground	NOUN
ap-1767	31	30	electrode	electrode	NOUN
ap-1767	31	31	]	]	PUNCT
ap-1767	31	32	placed	place	VERB
ap-1767	31	33	within	within	ADP
ap-1767	31	34	the	the	DET
ap-1767	31	35	reactor	reactor	NOUN
ap-1767	31	36	.	.	PUNCT
ap-1767	32	1	a	a	DET
ap-1767	32	2	barrier	barrier	NOUN
ap-1767	32	3	manufactured	manufacture	VERB
ap-1767	32	4	from	from	ADP
ap-1767	32	5	glass	glass	NOUN
ap-1767	32	6	plate	plate	NOUN
ap-1767	32	7	(	(	PUNCT
ap-1767	32	8	(	(	PUNCT
ap-1767	32	9	70	70	NUM
ap-1767	32	10	×	×	NOUN
ap-1767	32	11	46	46	NUM
ap-1767	32	12	×	×	NOUN
ap-1767	32	13	1	1	NUM
ap-1767	32	14	)	)	PUNCT
ap-1767	32	15	mm	mm	PROPN
ap-1767	32	16	)	)	PUNCT
ap-1767	32	17	covered	cover	VERB
ap-1767	32	18	the	the	DET
ap-1767	32	19	ground	ground	NOUN
ap-1767	32	20	electrode	electrode	NOUN
ap-1767	32	21	.	.	PUNCT
ap-1767	33	1	the	the	DET
ap-1767	33	2	distance	distance	NOUN
ap-1767	33	3	between	between	ADP
ap-1767	33	4	the	the	DET
ap-1767	33	5	electrodes	electrode	NOUN
ap-1767	33	6	was	be	AUX
ap-1767	33	7	fixed	fix	VERB
ap-1767	33	8	at	at	ADP
ap-1767	33	9	4	4	NUM
ap-1767	33	10	mm	mm	NOUN
ap-1767	33	11	.	.	PUNCT
ap-1767	34	1	three	three	NUM
ap-1767	34	2	types	type	NOUN
ap-1767	34	3	of	of	ADP
ap-1767	34	4	hv	hv	PROPN
ap-1767	34	5	electrode	electrode	PROPN
ap-1767	34	6	were	be	AUX
ap-1767	34	7	used	use	VERB
ap-1767	34	8	in	in	ADP
ap-1767	34	9	the	the	DET
ap-1767	34	10	experiments	experiment	NOUN
ap-1767	34	11	,	,	PUNCT
ap-1767	34	12	all	all	PRON
ap-1767	34	13	of	of	ADP
ap-1767	34	14	them	they	PRON
ap-1767	34	15	with	with	ADP
ap-1767	34	16	identical	identical	ADJ
ap-1767	34	17	external	external	ADJ
ap-1767	34	18	dimensions	dimension	NOUN
ap-1767	34	19	,	,	PUNCT
ap-1767	34	20	but	but	CCONJ
ap-1767	34	21	they	they	PRON
ap-1767	34	22	were	be	AUX
ap-1767	34	23	differentiated	differentiate	VERB
ap-1767	34	24	by	by	ADP
ap-1767	34	25	the	the	DET
ap-1767	34	26	hole	hole	NOUN
ap-1767	34	27	(	(	PUNCT
ap-1767	34	28	diameter	diameter	NOUN
ap-1767	34	29	3	3	NUM
ap-1767	34	30	mm	mm	NOUN
ap-1767	34	31	)	)	PUNCT
ap-1767	34	32	leading	lead	VERB
ap-1767	34	33	into	into	ADP
ap-1767	34	34	the	the	DET
ap-1767	34	35	interelectrode	interelectrode	PROPN
ap-1767	34	36	region	region	NOUN
ap-1767	34	37	.	.	PUNCT
ap-1767	35	1	the	the	DET
ap-1767	35	2	first	first	ADJ
ap-1767	35	3	electrode	electrode	NOUN
ap-1767	35	4	was	be	AUX
ap-1767	35	5	without	without	ADP
ap-1767	35	6	a	a	DET
ap-1767	35	7	hole	hole	NOUN
ap-1767	35	8	,	,	PUNCT
ap-1767	35	9	the	the	DET
ap-1767	35	10	hole	hole	NOUN
ap-1767	35	11	of	of	ADP
ap-1767	35	12	the	the	DET
ap-1767	35	13	second	second	ADJ
ap-1767	35	14	type	type	NOUN
ap-1767	35	15	was	be	AUX
ap-1767	35	16	connected	connect	VERB
ap-1767	35	17	with	with	ADP
ap-1767	35	18	one	one	NUM
ap-1767	35	19	inlet	inlet	NOUN
ap-1767	35	20	(	(	PUNCT
ap-1767	35	21	c	c	NOUN
ap-1767	35	22	)	)	PUNCT
ap-1767	35	23	only	only	ADV
ap-1767	35	24	,	,	PUNCT
ap-1767	35	25	and	and	CCONJ
ap-1767	35	26	the	the	DET
ap-1767	35	27	third	third	ADJ
ap-1767	35	28	type	type	NOUN
ap-1767	35	29	had	have	VERB
ap-1767	35	30	two	two	NUM
ap-1767	35	31	inlets	inlet	NOUN
ap-1767	35	32	,	,	PUNCT
ap-1767	35	33	c	c	NOUN
ap-1767	35	34	and	and	CCONJ
ap-1767	35	35	d	d	PROPN
ap-1767	35	36	(	(	PUNCT
ap-1767	35	37	see	see	VERB
ap-1767	35	38	fig	fig	NOUN
ap-1767	35	39	.	.	PUNCT
ap-1767	36	1	1	1	NUM
ap-1767	36	2	,	,	PUNCT
ap-1767	36	3	for	for	ADP
ap-1767	36	4	simplicity	simplicity	NOUN
ap-1767	36	5	all	all	DET
ap-1767	36	6	four	four	NUM
ap-1767	36	7	inlets	inlet	NOUN
ap-1767	36	8	possitions	possition	NOUN
ap-1767	36	9	are	be	AUX
ap-1767	36	10	drawn	draw	VERB
ap-1767	36	11	here	here	ADV
ap-1767	36	12	,	,	PUNCT
ap-1767	36	13	although	although	SCONJ
ap-1767	36	14	only	only	ADV
ap-1767	36	15	one	one	NUM
ap-1767	36	16	pair	pair	NOUN
ap-1767	36	17	of	of	ADP
ap-1767	36	18	inlets	inlet	NOUN
ap-1767	36	19	was	be	AUX
ap-1767	36	20	used	use	VERB
ap-1767	36	21	in	in	ADP
ap-1767	36	22	each	each	DET
ap-1767	36	23	experiment	experiment	NOUN
ap-1767	36	24	)	)	PUNCT
ap-1767	36	25	.	.	PUNCT
ap-1767	37	1	adbd	adbd	PROPN
ap-1767	37	2	sustained	sustain	VERB
ap-1767	37	3	in	in	ADP
ap-1767	37	4	filamentary	filamentary	ADJ
ap-1767	37	5	mode	mode	NOUN
ap-1767	37	6	.	.	PUNCT
ap-1767	38	1	thin	thin	ADJ
ap-1767	38	2	films	film	NOUN
ap-1767	38	3	223	223	NUM
ap-1767	38	4	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-1767	38	5	jan	jan	PROPN
ap-1767	38	6	pichal	pichal	NOUN
ap-1767	38	7	,	,	PUNCT
ap-1767	38	8	julia	julia	PROPN
ap-1767	38	9	klenko	klenko	PROPN
ap-1767	38	10	acta	acta	PROPN
ap-1767	38	11	polytechnica	polytechnica	PROPN
ap-1767	38	12	figure	figure	NOUN
ap-1767	38	13	1	1	NUM
ap-1767	38	14	.	.	PUNCT
ap-1767	38	15	scheme	scheme	NOUN
ap-1767	38	16	of	of	ADP
ap-1767	38	17	the	the	DET
ap-1767	38	18	plasma	plasma	NOUN
ap-1767	38	19	reactor	reactor	NOUN
ap-1767	38	20	;	;	PUNCT
ap-1767	38	21	1	1	NUM
ap-1767	38	22	–	–	PUNCT
ap-1767	38	23	ground	ground	NOUN
ap-1767	38	24	electrode	electrode	NOUN
ap-1767	38	25	,	,	PUNCT
ap-1767	38	26	2	2	NUM
ap-1767	38	27	–	–	PUNCT
ap-1767	38	28	dielectric	dielectric	ADJ
ap-1767	38	29	barrier	barrier	NOUN
ap-1767	38	30	,	,	PUNCT
ap-1767	38	31	3	3	NUM
ap-1767	38	32	–	–	PUNCT
ap-1767	38	33	substrate	substrate	NOUN
ap-1767	38	34	,	,	PUNCT
ap-1767	38	35	4	4	NUM
ap-1767	38	36	–	–	PUNCT
ap-1767	38	37	hv	hv	NOUN
ap-1767	38	38	electrode	electrode	NOUN
ap-1767	38	39	,	,	PUNCT
ap-1767	38	40	5	5	NUM
ap-1767	38	41	–	–	PUNCT
ap-1767	38	42	evaporator	evaporator	NOUN
ap-1767	38	43	,	,	PUNCT
ap-1767	38	44	6	6	NUM
ap-1767	38	45	–	–	PUNCT
ap-1767	38	46	mass	mass	NOUN
ap-1767	38	47	flow	flow	NOUN
ap-1767	38	48	controller	controller	NOUN
ap-1767	38	49	,	,	PUNCT
ap-1767	38	50	7	7	NUM
ap-1767	38	51	–	–	PUNCT
ap-1767	38	52	hv	hv	NOUN
ap-1767	38	53	supply	supply	NOUN
ap-1767	38	54	,	,	PUNCT
ap-1767	38	55	a	a	DET
ap-1767	38	56	,	,	PUNCT
ap-1767	38	57	b	b	NOUN
ap-1767	38	58	,	,	PUNCT
ap-1767	38	59	c	c	NOUN
ap-1767	38	60	,	,	PUNCT
ap-1767	38	61	d	d	PROPN
ap-1767	38	62	–	–	PUNCT
ap-1767	38	63	inlet	inlet	NOUN
ap-1767	38	64	positions	position	NOUN
ap-1767	38	65	.	.	PUNCT
ap-1767	39	1	were	be	AUX
ap-1767	39	2	obtained	obtain	VERB
ap-1767	39	3	at	at	ADP
ap-1767	39	4	atmospheric	atmospheric	ADJ
ap-1767	39	5	pressure	pressure	NOUN
ap-1767	39	6	using	use	VERB
ap-1767	39	7	titanium	titanium	NOUN
ap-1767	39	8	(	(	PUNCT
ap-1767	39	9	iv	iv	NOUN
ap-1767	39	10	)	)	PUNCT
ap-1767	39	11	isopropoxide	isopropoxide	NOUN
ap-1767	39	12	as	as	ADP
ap-1767	39	13	a	a	DET
ap-1767	39	14	precursor	precursor	NOUN
ap-1767	39	15	(	(	PUNCT
ap-1767	39	16	ttip	ttip	NOUN
ap-1767	39	17	,	,	PUNCT
ap-1767	39	18	ti[och(ch2)]4	ti[och(ch2)]4	NOUN
ap-1767	39	19	and	and	CCONJ
ap-1767	39	20	97	97	NUM
ap-1767	39	21	%	%	NOUN
ap-1767	39	22	purity	purity	NOUN
ap-1767	39	23	)	)	PUNCT
ap-1767	39	24	.	.	PUNCT
ap-1767	40	1	ttip	ttip	PROPN
ap-1767	40	2	volatilized	volatilize	VERB
ap-1767	40	3	at	at	ADP
ap-1767	40	4	temperatures	temperature	NOUN
ap-1767	40	5	of	of	ADP
ap-1767	40	6	(	(	PUNCT
ap-1767	40	7	30.0	30.0	NUM
ap-1767	40	8	±	±	NUM
ap-1767	40	9	0.5	0.5	NUM
ap-1767	40	10	)	)	PUNCT
ap-1767	40	11	◦	◦	NOUN
ap-1767	40	12	c.	c.	NOUN
ap-1767	40	13	it	it	PRON
ap-1767	40	14	was	be	AUX
ap-1767	40	15	mixed	mix	VERB
ap-1767	40	16	with	with	ADP
ap-1767	40	17	argon	argon	NOUN
ap-1767	40	18	in	in	ADP
ap-1767	40	19	the	the	DET
ap-1767	40	20	evaporator	evaporator	NOUN
ap-1767	40	21	,	,	PUNCT
ap-1767	40	22	transported	transport	VERB
ap-1767	40	23	into	into	ADP
ap-1767	40	24	the	the	DET
ap-1767	40	25	reactor	reactor	NOUN
ap-1767	40	26	and	and	CCONJ
ap-1767	40	27	reacted	react	VERB
ap-1767	40	28	with	with	ADP
ap-1767	40	29	oxygen	oxygen	NOUN
ap-1767	40	30	(	(	PUNCT
ap-1767	40	31	or	or	CCONJ
ap-1767	40	32	,	,	PUNCT
ap-1767	40	33	in	in	ADP
ap-1767	40	34	the	the	DET
ap-1767	40	35	first	first	ADJ
ap-1767	40	36	experiments	experiment	NOUN
ap-1767	40	37	,	,	PUNCT
ap-1767	40	38	merely	merely	ADV
ap-1767	40	39	with	with	ADP
ap-1767	40	40	dry	dry	ADJ
ap-1767	40	41	air	air	NOUN
ap-1767	40	42	,	,	PUNCT
ap-1767	40	43	when	when	SCONJ
ap-1767	40	44	atmospheric	atmospheric	ADJ
ap-1767	40	45	oxygen	oxygen	NOUN
ap-1767	40	46	took	take	VERB
ap-1767	40	47	part	part	NOUN
ap-1767	40	48	in	in	ADP
ap-1767	40	49	the	the	DET
ap-1767	40	50	reaction	reaction	NOUN
ap-1767	40	51	)	)	PUNCT
ap-1767	40	52	.	.	PUNCT
ap-1767	41	1	the	the	DET
ap-1767	41	2	gas	gas	NOUN
ap-1767	41	3	flow	flow	NOUN
ap-1767	41	4	rates	rate	NOUN
ap-1767	41	5	were	be	AUX
ap-1767	41	6	adjusted	adjust	VERB
ap-1767	41	7	by	by	ADP
ap-1767	41	8	means	mean	NOUN
ap-1767	41	9	of	of	ADP
ap-1767	41	10	the	the	DET
ap-1767	41	11	mass	mass	NOUN
ap-1767	41	12	flow	flow	NOUN
ap-1767	41	13	controllers	controller	NOUN
ap-1767	41	14	.	.	PUNCT
ap-1767	42	1	deposition	deposition	NOUN
ap-1767	42	2	tests	test	NOUN
ap-1767	42	3	were	be	AUX
ap-1767	42	4	performed	perform	VERB
ap-1767	42	5	with	with	ADP
ap-1767	42	6	ttip	ttip	NOUN
ap-1767	42	7	/	/	SYM
ap-1767	42	8	ar	ar	NOUN
ap-1767	42	9	flows	flow	NOUN
ap-1767	42	10	(	(	PUNCT
ap-1767	42	11	0.5	0.5	NUM
ap-1767	42	12	÷	÷	NUM
ap-1767	42	13	4.0	4.0	NUM
ap-1767	42	14	)	)	PUNCT
ap-1767	42	15	slm	slm	PROPN
ap-1767	42	16	.	.	PUNCT
ap-1767	43	1	the	the	DET
ap-1767	43	2	oxygen	oxygen	NOUN
ap-1767	43	3	/	/	SYM
ap-1767	43	4	dry	dry	ADJ
ap-1767	43	5	air	air	NOUN
ap-1767	43	6	flow	flow	NOUN
ap-1767	43	7	was	be	AUX
ap-1767	43	8	controlled	control	VERB
ap-1767	43	9	within	within	ADP
ap-1767	43	10	(	(	PUNCT
ap-1767	43	11	2.5	2.5	NUM
ap-1767	43	12	÷	÷	NUM
ap-1767	43	13	10	10	NUM
ap-1767	43	14	)	)	PUNCT
ap-1767	43	15	slm	slm	PROPN
ap-1767	43	16	.	.	PUNCT
ap-1767	44	1	the	the	DET
ap-1767	44	2	outer	outer	ADJ
ap-1767	44	3	atmosphere	atmosphere	NOUN
ap-1767	44	4	was	be	AUX
ap-1767	44	5	air	air	NOUN
ap-1767	44	6	with	with	ADP
ap-1767	44	7	relative	relative	ADJ
ap-1767	44	8	humidity	humidity	NOUN
ap-1767	44	9	of	of	ADP
ap-1767	44	10	(	(	PUNCT
ap-1767	44	11	36	36	NUM
ap-1767	44	12	÷	÷	NUM
ap-1767	44	13	47	47	NUM
ap-1767	44	14	)	)	PUNCT
ap-1767	44	15	%	%	NOUN
ap-1767	44	16	and	and	CCONJ
ap-1767	44	17	room	room	NOUN
ap-1767	44	18	temperature	temperature	NOUN
ap-1767	44	19	about	about	ADV
ap-1767	44	20	20	20	NUM
ap-1767	44	21	◦	◦	NOUN
ap-1767	44	22	c.	c.	NOUN
ap-1767	44	23	the	the	DET
ap-1767	44	24	deposition	deposition	NOUN
ap-1767	44	25	time	time	NOUN
ap-1767	44	26	was	be	AUX
ap-1767	44	27	10	10	NUM
ap-1767	44	28	minutes	minute	NOUN
ap-1767	44	29	in	in	ADP
ap-1767	44	30	all	all	DET
ap-1767	44	31	experiments	experiment	NOUN
ap-1767	44	32	.	.	PUNCT
ap-1767	45	1	unfortunately	unfortunately	ADV
ap-1767	45	2	,	,	PUNCT
ap-1767	45	3	the	the	DET
ap-1767	45	4	reactor	reactor	NOUN
ap-1767	45	5	has	have	VERB
ap-1767	45	6	no	no	DET
ap-1767	45	7	“	"	PUNCT
ap-1767	45	8	clean	clean	ADJ
ap-1767	45	9	interface	interface	NOUN
ap-1767	45	10	”	"	PUNCT
ap-1767	45	11	,	,	PUNCT
ap-1767	45	12	so	so	SCONJ
ap-1767	45	13	surface	surface	NOUN
ap-1767	45	14	-	-	PUNCT
ap-1767	45	15	related	relate	VERB
ap-1767	45	16	chemical	chemical	NOUN
ap-1767	45	17	reactions	reaction	NOUN
ap-1767	45	18	or	or	CCONJ
ap-1767	45	19	contamination	contamination	NOUN
ap-1767	45	20	by	by	ADP
ap-1767	45	21	ambient	ambient	ADJ
ap-1767	45	22	air	air	NOUN
ap-1767	45	23	species	specie	NOUN
ap-1767	45	24	began	begin	VERB
ap-1767	45	25	while	while	SCONJ
ap-1767	45	26	the	the	DET
ap-1767	45	27	films	film	NOUN
ap-1767	45	28	being	be	AUX
ap-1767	45	29	removed	remove	VERB
ap-1767	45	30	from	from	ADP
ap-1767	45	31	the	the	DET
ap-1767	45	32	reactor	reactor	NOUN
ap-1767	45	33	,	,	PUNCT
ap-1767	45	34	before	before	SCONJ
ap-1767	45	35	any	any	DET
ap-1767	45	36	test	test	NOUN
ap-1767	45	37	was	be	AUX
ap-1767	45	38	initialized	initialize	VERB
ap-1767	45	39	.	.	PUNCT
ap-1767	46	1	these	these	DET
ap-1767	46	2	chemical	chemical	ADJ
ap-1767	46	3	reactions	reaction	NOUN
ap-1767	46	4	also	also	ADV
ap-1767	46	5	proceeded	proceed	VERB
ap-1767	46	6	while	while	SCONJ
ap-1767	46	7	the	the	DET
ap-1767	46	8	films	film	NOUN
ap-1767	46	9	were	be	AUX
ap-1767	46	10	being	be	AUX
ap-1767	46	11	stored	store	VERB
ap-1767	46	12	.	.	PUNCT
ap-1767	47	1	the	the	DET
ap-1767	47	2	deposited	deposit	VERB
ap-1767	47	3	films	film	NOUN
ap-1767	47	4	were	be	AUX
ap-1767	47	5	stored	store	VERB
ap-1767	47	6	in	in	ADP
ap-1767	47	7	darkness	darkness	NOUN
ap-1767	47	8	at	at	ADP
ap-1767	47	9	room	room	NOUN
ap-1767	47	10	temperature	temperature	NOUN
ap-1767	47	11	(	(	PUNCT
ap-1767	47	12	20	20	NUM
ap-1767	47	13	÷	÷	NUM
ap-1767	47	14	23	23	NUM
ap-1767	47	15	)	)	PUNCT
ap-1767	47	16	◦	◦	NOUN
ap-1767	47	17	c	c	NOUN
ap-1767	47	18	,	,	PUNCT
ap-1767	47	19	relative	relative	ADJ
ap-1767	47	20	humidity	humidity	NOUN
ap-1767	47	21	(	(	PUNCT
ap-1767	47	22	30	30	NUM
ap-1767	47	23	÷	÷	NUM
ap-1767	47	24	40	40	NUM
ap-1767	47	25	)	)	PUNCT
ap-1767	47	26	%	%	INTJ
ap-1767	47	27	,	,	PUNCT
ap-1767	47	28	in	in	ADP
ap-1767	47	29	plastic	plastic	ADJ
ap-1767	47	30	boxes	box	NOUN
ap-1767	47	31	in	in	ADP
ap-1767	47	32	air	air	NOUN
ap-1767	47	33	at	at	ADP
ap-1767	47	34	atmospheric	atmospheric	ADJ
ap-1767	47	35	pressure	pressure	NOUN
ap-1767	47	36	.	.	PUNCT
ap-1767	48	1	2.2	2.2	NUM
ap-1767	48	2	.	.	PUNCT
ap-1767	49	1	film	film	NOUN
ap-1767	49	2	analysis	analysis	NOUN
ap-1767	49	3	the	the	DET
ap-1767	49	4	surface	surface	NOUN
ap-1767	49	5	morphology	morphology	NOUN
ap-1767	49	6	of	of	ADP
ap-1767	49	7	the	the	DET
ap-1767	49	8	films	film	NOUN
ap-1767	49	9	was	be	AUX
ap-1767	49	10	examined	examine	VERB
ap-1767	49	11	using	use	VERB
ap-1767	49	12	the	the	DET
ap-1767	49	13	atomic	atomic	ADJ
ap-1767	49	14	force	force	NOUN
ap-1767	49	15	microscopy	microscopy	NOUN
ap-1767	49	16	(	(	PUNCT
ap-1767	49	17	afm	afm	PROPN
ap-1767	49	18	)	)	PUNCT
ap-1767	49	19	technique	technique	NOUN
ap-1767	49	20	in	in	ADP
ap-1767	49	21	noncontact	noncontact	ADJ
ap-1767	49	22	mode	mode	NOUN
ap-1767	49	23	,	,	PUNCT
ap-1767	49	24	performed	perform	VERB
ap-1767	49	25	under	under	ADP
ap-1767	49	26	ambient	ambient	ADJ
ap-1767	49	27	conditions	condition	NOUN
ap-1767	49	28	on	on	ADP
ap-1767	49	29	an	an	DET
ap-1767	49	30	frt	frt	NOUN
ap-1767	49	31	afm	afm	NOUN
ap-1767	49	32	scanning	scan	VERB
ap-1767	49	33	probe	probe	NOUN
ap-1767	49	34	microscope	microscope	NOUN
ap-1767	49	35	at	at	ADP
ap-1767	49	36	the	the	DET
ap-1767	49	37	technical	technical	ADJ
ap-1767	49	38	university	university	PROPN
ap-1767	49	39	of	of	ADP
ap-1767	49	40	liberec	liberec	PROPN
ap-1767	49	41	.	.	PUNCT
ap-1767	50	1	all	all	PRON
ap-1767	50	2	(	(	PUNCT
ap-1767	50	3	2	2	NUM
ap-1767	50	4	×	×	NOUN
ap-1767	50	5	2	2	NUM
ap-1767	50	6	)	)	PUNCT
ap-1767	50	7	µm	µm	ADP
ap-1767	50	8	scans	scan	NOUN
ap-1767	50	9	were	be	AUX
ap-1767	50	10	processed	process	VERB
ap-1767	50	11	by	by	ADP
ap-1767	50	12	gwyddion	gwyddion	NOUN
ap-1767	50	13	software	software	NOUN
ap-1767	50	14	for	for	ADP
ap-1767	50	15	spm	spm	PROPN
ap-1767	50	16	(	(	PUNCT
ap-1767	50	17	scanning	scan	VERB
ap-1767	50	18	probe	probe	NOUN
ap-1767	50	19	microscopy	microscopy	NOUN
ap-1767	50	20	)	)	PUNCT
ap-1767	50	21	data	datum	NOUN
ap-1767	50	22	visualization	visualization	NOUN
ap-1767	50	23	and	and	CCONJ
ap-1767	50	24	analysis	analysis	NOUN
ap-1767	50	25	.	.	PUNCT
ap-1767	51	1	to	to	PART
ap-1767	51	2	analyse	analyse	VERB
ap-1767	51	3	the	the	DET
ap-1767	51	4	hydrophilicity	hydrophilicity	NOUN
ap-1767	51	5	,	,	PUNCT
ap-1767	51	6	a	a	DET
ap-1767	51	7	contact	contact	NOUN
ap-1767	51	8	angle	angle	NOUN
ap-1767	51	9	test	test	NOUN
ap-1767	51	10	(	(	PUNCT
ap-1767	51	11	ca	ca	NOUN
ap-1767	51	12	)	)	PUNCT
ap-1767	51	13	was	be	AUX
ap-1767	51	14	applied	apply	VERB
ap-1767	51	15	.	.	PUNCT
ap-1767	52	1	ca	can	AUX
ap-1767	52	2	was	be	AUX
ap-1767	52	3	measured	measure	VERB
ap-1767	52	4	by	by	ADP
ap-1767	52	5	a	a	DET
ap-1767	52	6	sessile	sessile	ADJ
ap-1767	52	7	drop	drop	NOUN
ap-1767	52	8	technique	technique	NOUN
ap-1767	52	9	when	when	SCONJ
ap-1767	52	10	a	a	DET
ap-1767	52	11	constant	constant	ADJ
ap-1767	52	12	time	time	NOUN
ap-1767	52	13	(	(	PUNCT
ap-1767	52	14	30	30	NUM
ap-1767	52	15	s	s	NOUN
ap-1767	52	16	)	)	PUNCT
ap-1767	52	17	passed	pass	VERB
ap-1767	52	18	after	after	ADP
ap-1767	52	19	the	the	DET
ap-1767	52	20	dropping	dropping	NOUN
ap-1767	52	21	of	of	ADP
ap-1767	52	22	distilled	distil	VERB
ap-1767	52	23	water	water	NOUN
ap-1767	52	24	about	about	ADV
ap-1767	52	25	0.5	0.5	NUM
ap-1767	52	26	µl	µl	NOUN
ap-1767	52	27	in	in	ADP
ap-1767	52	28	volume	volume	NOUN
ap-1767	52	29	.	.	PUNCT
ap-1767	53	1	the	the	DET
ap-1767	53	2	ca	ca	NOUN
ap-1767	53	3	of	of	ADP
ap-1767	53	4	each	each	DET
ap-1767	53	5	sample	sample	NOUN
ap-1767	53	6	was	be	AUX
ap-1767	53	7	performed	perform	VERB
ap-1767	53	8	in	in	ADP
ap-1767	53	9	5	5	NUM
ap-1767	53	10	different	different	ADJ
ap-1767	53	11	positions	position	NOUN
ap-1767	53	12	at	at	ADP
ap-1767	53	13	room	room	NOUN
ap-1767	53	14	temperature	temperature	NOUN
ap-1767	53	15	.	.	PUNCT
ap-1767	54	1	the	the	DET
ap-1767	54	2	surface	surface	NOUN
ap-1767	54	3	chemfigure	chemfigure	NOUN
ap-1767	54	4	2	2	NUM
ap-1767	54	5	.	.	PUNCT
ap-1767	54	6	topography	topography	NOUN
ap-1767	54	7	of	of	ADP
ap-1767	54	8	the	the	DET
ap-1767	54	9	tiox	tiox	NOUN
ap-1767	54	10	films	film	NOUN
ap-1767	54	11	;	;	PUNCT
ap-1767	54	12	inlets	inlet	NOUN
ap-1767	54	13	:	:	PUNCT
ap-1767	54	14	a	a	DET
ap-1767	54	15	(	(	PUNCT
ap-1767	54	16	dry	dry	ADJ
ap-1767	54	17	air	air	NOUN
ap-1767	54	18	from	from	ADP
ap-1767	54	19	the	the	DET
ap-1767	54	20	atmosph	atmosph	NOUN
ap-1767	54	21	.	.	PUNCT
ap-1767	54	22	)	)	PUNCT
ap-1767	54	23	,	,	PUNCT
ap-1767	55	1	c	c	X
ap-1767	55	2	(	(	PUNCT
ap-1767	55	3	ttip	ttip	PROPN
ap-1767	55	4	/	/	SYM
ap-1767	55	5	ar	ar	PROPN
ap-1767	55	6	,	,	PUNCT
ap-1767	55	7	0.5	0.5	NUM
ap-1767	55	8	slm	slm	NOUN
ap-1767	55	9	)	)	PUNCT
ap-1767	55	10	.	.	PUNCT
ap-1767	56	1	ical	ical	ADJ
ap-1767	56	2	composition	composition	NOUN
ap-1767	56	3	of	of	ADP
ap-1767	56	4	the	the	DET
ap-1767	56	5	films	film	NOUN
ap-1767	56	6	was	be	AUX
ap-1767	56	7	investigated	investigate	VERB
ap-1767	56	8	by	by	ADP
ap-1767	56	9	x	x	NOUN
ap-1767	56	10	-	-	NOUN
ap-1767	56	11	ray	ray	NOUN
ap-1767	56	12	photoelectron	photoelectron	NOUN
ap-1767	56	13	spectroscopy	spectroscopy	NOUN
ap-1767	56	14	(	(	PUNCT
ap-1767	56	15	xps	xps	PROPN
ap-1767	56	16	)	)	PUNCT
ap-1767	56	17	.	.	PUNCT
ap-1767	57	1	a	a	DET
ap-1767	57	2	multi	multi	ADJ
ap-1767	57	3	-	-	ADJ
ap-1767	57	4	channel	channel	ADJ
ap-1767	57	5	hemispherical	hemispherical	ADJ
ap-1767	57	6	electrostatic	electrostatic	ADJ
ap-1767	57	7	analyser	analyser	NOUN
ap-1767	57	8	(	(	PUNCT
ap-1767	57	9	phobios	phobios	PROPN
ap-1767	57	10	100	100	NUM
ap-1767	57	11	,	,	PUNCT
ap-1767	57	12	specs	spec	NOUN
ap-1767	57	13	)	)	PUNCT
ap-1767	57	14	was	be	AUX
ap-1767	57	15	used	use	VERB
ap-1767	57	16	.	.	PUNCT
ap-1767	58	1	the	the	DET
ap-1767	58	2	al	al	PROPN
ap-1767	58	3	kα	kα	PROPN
ap-1767	58	4	line	line	NOUN
ap-1767	58	5	(	(	PUNCT
ap-1767	58	6	1486.6	1486.6	NUM
ap-1767	58	7	ev	ev	NOUN
ap-1767	58	8	)	)	PUNCT
ap-1767	58	9	was	be	AUX
ap-1767	58	10	used	use	VERB
ap-1767	58	11	with	with	ADP
ap-1767	58	12	an	an	DET
ap-1767	58	13	x	x	ADJ
ap-1767	58	14	-	-	NOUN
ap-1767	58	15	ray	ray	NOUN
ap-1767	58	16	incidence	incidence	NOUN
ap-1767	58	17	angle	angle	NOUN
ap-1767	58	18	45	45	NUM
ap-1767	58	19	◦	◦	NOUN
ap-1767	58	20	to	to	ADP
ap-1767	58	21	the	the	DET
ap-1767	58	22	surface	surface	NOUN
ap-1767	58	23	plane	plane	NOUN
ap-1767	58	24	.	.	PUNCT
ap-1767	59	1	the	the	DET
ap-1767	59	2	analyser	analyser	NOUN
ap-1767	59	3	was	be	AUX
ap-1767	59	4	operated	operate	VERB
ap-1767	59	5	in	in	ADP
ap-1767	59	6	retarding	retard	VERB
ap-1767	59	7	-	-	PUNCT
ap-1767	59	8	field	field	NOUN
ap-1767	59	9	mode	mode	NOUN
ap-1767	59	10	,	,	PUNCT
ap-1767	59	11	applying	apply	VERB
ap-1767	59	12	pass	pass	NOUN
ap-1767	59	13	energy	energy	NOUN
ap-1767	59	14	of	of	ADP
ap-1767	59	15	40	40	NUM
ap-1767	59	16	ev	ev	INTJ
ap-1767	59	17	for	for	ADP
ap-1767	59	18	the	the	DET
ap-1767	59	19	survey	survey	NOUN
ap-1767	59	20	scans	scan	NOUN
ap-1767	59	21	and	and	CCONJ
ap-1767	59	22	10	10	NUM
ap-1767	59	23	ev	ev	INTJ
ap-1767	59	24	for	for	ADP
ap-1767	59	25	all	all	DET
ap-1767	59	26	core	core	NOUN
ap-1767	59	27	level	level	NOUN
ap-1767	59	28	data	datum	NOUN
ap-1767	59	29	.	.	PUNCT
ap-1767	60	1	the	the	DET
ap-1767	60	2	xps	xps	PROPN
ap-1767	60	3	peak	peak	PROPN
ap-1767	60	4	positions	position	NOUN
ap-1767	60	5	were	be	AUX
ap-1767	60	6	referenced	reference	VERB
ap-1767	60	7	at	at	ADP
ap-1767	60	8	the	the	DET
ap-1767	60	9	aliphatic	aliphatic	ADJ
ap-1767	60	10	carbon	carbon	NOUN
ap-1767	60	11	component	component	NOUN
ap-1767	60	12	at	at	ADP
ap-1767	60	13	285.0	285.0	NUM
ap-1767	60	14	ev	ev	NOUN
ap-1767	60	15	.	.	PROPN
ap-1767	61	1	due	due	ADP
ap-1767	61	2	to	to	ADP
ap-1767	61	3	inadequate	inadequate	ADJ
ap-1767	61	4	equipment	equipment	NOUN
ap-1767	61	5	we	we	PRON
ap-1767	61	6	were	be	AUX
ap-1767	61	7	unfortunately	unfortunately	ADV
ap-1767	61	8	not	not	PART
ap-1767	61	9	able	able	ADJ
ap-1767	61	10	to	to	PART
ap-1767	61	11	clean	clean	VERB
ap-1767	61	12	the	the	DET
ap-1767	61	13	film	film	NOUN
ap-1767	61	14	profile	profile	NOUN
ap-1767	61	15	by	by	ADP
ap-1767	61	16	sputtering	sputter	VERB
ap-1767	61	17	and	and	CCONJ
ap-1767	61	18	perform	perform	VERB
ap-1767	61	19	xps	xps	PROPN
ap-1767	61	20	profile	profile	NOUN
ap-1767	61	21	tests	test	NOUN
ap-1767	61	22	,	,	PUNCT
ap-1767	61	23	so	so	ADV
ap-1767	61	24	our	our	PRON
ap-1767	61	25	research	research	NOUN
ap-1767	61	26	had	have	VERB
ap-1767	61	27	to	to	PART
ap-1767	61	28	focus	focus	VERB
ap-1767	61	29	on	on	ADP
ap-1767	61	30	film	film	NOUN
ap-1767	61	31	surface	surface	NOUN
ap-1767	61	32	tests	test	NOUN
ap-1767	61	33	only	only	ADV
ap-1767	61	34	.	.	PUNCT
ap-1767	62	1	3	3	X
ap-1767	62	2	.	.	NOUN
ap-1767	62	3	results	result	VERB
ap-1767	62	4	deposition	deposition	NOUN
ap-1767	62	5	of	of	ADP
ap-1767	62	6	the	the	DET
ap-1767	62	7	films	film	NOUN
ap-1767	62	8	proceeds	proceed	VERB
ap-1767	62	9	in	in	ADP
ap-1767	62	10	substrate	substrate	NOUN
ap-1767	62	11	-	-	PUNCT
ap-1767	62	12	surface	surface	NOUN
ap-1767	62	13	limited	limited	ADJ
ap-1767	62	14	reactions	reaction	NOUN
ap-1767	62	15	.	.	PUNCT
ap-1767	63	1	the	the	DET
ap-1767	63	2	films	film	NOUN
ap-1767	63	3	were	be	AUX
ap-1767	63	4	deposited	deposit	VERB
ap-1767	63	5	in	in	ADP
ap-1767	63	6	adbd	adbd	NOUN
ap-1767	63	7	sustaining	sustain	VERB
ap-1767	63	8	in	in	ADP
ap-1767	63	9	filamentary	filamentary	ADJ
ap-1767	63	10	mode	mode	NOUN
ap-1767	63	11	.	.	PUNCT
ap-1767	64	1	the	the	DET
ap-1767	64	2	deposited	deposit	VERB
ap-1767	64	3	surface	surface	NOUN
ap-1767	64	4	was	be	AUX
ap-1767	64	5	in	in	ADP
ap-1767	64	6	general	general	ADJ
ap-1767	64	7	irregularly	irregularly	ADV
ap-1767	64	8	corrugated	corrugate	VERB
ap-1767	64	9	,	,	PUNCT
ap-1767	64	10	hummocky	hummocky	PROPN
ap-1767	64	11	,	,	PUNCT
ap-1767	64	12	with	with	ADP
ap-1767	64	13	growing	grow	VERB
ap-1767	64	14	thickness	thickness	NOUN
ap-1767	64	15	in	in	ADP
ap-1767	64	16	spots	spot	NOUN
ap-1767	64	17	where	where	SCONJ
ap-1767	64	18	filaments	filament	NOUN
ap-1767	64	19	bridged	bridged	ADJ
ap-1767	64	20	electrodes	electrode	NOUN
ap-1767	64	21	.	.	PUNCT
ap-1767	65	1	growing	grow	VERB
ap-1767	65	2	/	/	SYM
ap-1767	65	3	diminishing	diminish	VERB
ap-1767	65	4	thickness	thickness	NOUN
ap-1767	65	5	of	of	ADP
ap-1767	65	6	the	the	DET
ap-1767	65	7	film	film	NOUN
ap-1767	65	8	area	area	NOUN
ap-1767	65	9	reflects	reflect	VERB
ap-1767	65	10	local	local	ADJ
ap-1767	65	11	electric	electric	ADJ
ap-1767	65	12	field	field	NOUN
ap-1767	65	13	inhomogeneities	inhomogeneity	NOUN
ap-1767	65	14	associated	associate	VERB
ap-1767	65	15	with	with	ADP
ap-1767	65	16	the	the	DET
ap-1767	65	17	existence	existence	NOUN
ap-1767	65	18	of	of	ADP
ap-1767	65	19	filaments	filament	NOUN
ap-1767	65	20	.	.	PUNCT
ap-1767	66	1	the	the	DET
ap-1767	66	2	surface	surface	NOUN
ap-1767	66	3	topography	topography	NOUN
ap-1767	66	4	was	be	AUX
ap-1767	66	5	similar	similar	ADJ
ap-1767	66	6	to	to	ADP
ap-1767	66	7	layers	layer	NOUN
ap-1767	66	8	deposited	deposit	VERB
ap-1767	66	9	with	with	ADP
ap-1767	66	10	ticl4	ticl4	PROPN
ap-1767	66	11	precursor	precursor	NOUN
ap-1767	66	12	[	[	X
ap-1767	66	13	2	2	NUM
ap-1767	66	14	,	,	PUNCT
ap-1767	66	15	10	10	NUM
ap-1767	66	16	]	]	PUNCT
ap-1767	66	17	.	.	PUNCT
ap-1767	67	1	the	the	DET
ap-1767	67	2	gassing	gassing	NOUN
ap-1767	67	3	of	of	ADP
ap-1767	67	4	the	the	DET
ap-1767	67	5	reactor	reactor	NOUN
ap-1767	67	6	was	be	AUX
ap-1767	67	7	performed	perform	VERB
ap-1767	67	8	through	through	ADP
ap-1767	67	9	various	various	ADJ
ap-1767	67	10	pairs	pair	NOUN
ap-1767	67	11	of	of	ADP
ap-1767	67	12	gas	gas	NOUN
ap-1767	67	13	inlets	inlet	NOUN
ap-1767	67	14	(	(	PUNCT
ap-1767	67	15	see	see	VERB
ap-1767	67	16	fig	fig	NOUN
ap-1767	67	17	.	.	PUNCT
ap-1767	68	1	1	1	NUM
ap-1767	68	2	)	)	PUNCT
ap-1767	68	3	.	.	PUNCT
ap-1767	69	1	we	we	PRON
ap-1767	69	2	used	use	VERB
ap-1767	69	3	following	follow	VERB
ap-1767	69	4	combinations	combination	NOUN
ap-1767	69	5	:	:	PUNCT
ap-1767	69	6	(	(	PUNCT
ap-1767	69	7	1	1	NUM
ap-1767	69	8	.	.	PUNCT
ap-1767	69	9	)	)	PUNCT
ap-1767	70	1	a	a	DET
ap-1767	70	2	(	(	PUNCT
ap-1767	70	3	air	air	NOUN
ap-1767	70	4	at	at	ADP
ap-1767	70	5	atm	atm	PROPN
ap-1767	70	6	.	.	PUNCT
ap-1767	70	7	pressure	pressure	NOUN
ap-1767	70	8	)	)	PUNCT
ap-1767	70	9	and	and	CCONJ
ap-1767	70	10	b	b	X
ap-1767	70	11	(	(	PUNCT
ap-1767	70	12	ttip	ttip	PROPN
ap-1767	70	13	/	/	SYM
ap-1767	70	14	ar	ar	NOUN
ap-1767	70	15	)	)	PUNCT
ap-1767	70	16	(	(	PUNCT
ap-1767	70	17	2	2	NUM
ap-1767	70	18	.	.	PUNCT
ap-1767	70	19	)	)	PUNCT
ap-1767	71	1	a	a	DET
ap-1767	71	2	(	(	PUNCT
ap-1767	71	3	air	air	NOUN
ap-1767	71	4	at	at	ADP
ap-1767	71	5	atm	atm	PROPN
ap-1767	71	6	.	.	PUNCT
ap-1767	71	7	pressure	pressure	NOUN
ap-1767	71	8	)	)	PUNCT
ap-1767	71	9	and	and	CCONJ
ap-1767	71	10	c	c	PROPN
ap-1767	71	11	(	(	PUNCT
ap-1767	71	12	ttip	ttip	PROPN
ap-1767	71	13	/	/	SYM
ap-1767	71	14	ar	ar	NOUN
ap-1767	71	15	)	)	PUNCT
ap-1767	71	16	(	(	PUNCT
ap-1767	71	17	3	3	NUM
ap-1767	71	18	.	.	PUNCT
ap-1767	71	19	)	)	PUNCT
ap-1767	72	1	c	c	NOUN
ap-1767	72	2	(	(	PUNCT
ap-1767	72	3	ttip	ttip	NOUN
ap-1767	72	4	/	/	SYM
ap-1767	72	5	ar	ar	NOUN
ap-1767	72	6	)	)	PUNCT
ap-1767	72	7	and	and	CCONJ
ap-1767	72	8	d	d	PROPN
ap-1767	72	9	(	(	PUNCT
ap-1767	72	10	oxygen	oxygen	NOUN
ap-1767	72	11	)	)	PUNCT
ap-1767	72	12	(	(	PUNCT
ap-1767	72	13	4	4	NUM
ap-1767	72	14	.	.	PUNCT
ap-1767	72	15	)	)	PUNCT
ap-1767	73	1	c	c	NOUN
ap-1767	73	2	(	(	PUNCT
ap-1767	73	3	oxygen	oxygen	NOUN
ap-1767	73	4	)	)	PUNCT
ap-1767	73	5	and	and	CCONJ
ap-1767	73	6	d	d	X
ap-1767	73	7	(	(	PUNCT
ap-1767	73	8	ttip	ttip	NOUN
ap-1767	73	9	/	/	SYM
ap-1767	73	10	ar	ar	NOUN
ap-1767	73	11	)	)	PUNCT
ap-1767	73	12	for	for	ADP
ap-1767	73	13	each	each	DET
ap-1767	73	14	combination	combination	NOUN
ap-1767	73	15	of	of	ADP
ap-1767	73	16	inlets	inlet	NOUN
ap-1767	73	17	we	we	PRON
ap-1767	73	18	tested	test	VERB
ap-1767	73	19	the	the	DET
ap-1767	73	20	effect	effect	NOUN
ap-1767	73	21	of	of	ADP
ap-1767	73	22	ttip	ttip	NOUN
ap-1767	73	23	and	and	CCONJ
ap-1767	73	24	o2	o2	PROPN
ap-1767	73	25	in	in	ADP
ap-1767	73	26	various	various	ADJ
ap-1767	73	27	concentrations	concentration	NOUN
ap-1767	73	28	in	in	ADP
ap-1767	73	29	the	the	DET
ap-1767	73	30	ttip	ttip	NOUN
ap-1767	73	31	/	/	SYM
ap-1767	73	32	ar	ar	NOUN
ap-1767	73	33	/	/	SYM
ap-1767	73	34	o2	o2	ADJ
ap-1767	73	35	mixture	mixture	NOUN
ap-1767	73	36	on	on	ADP
ap-1767	73	37	the	the	DET
ap-1767	73	38	film	film	NOUN
ap-1767	73	39	characteristics	characteristic	NOUN
ap-1767	73	40	.	.	PUNCT
ap-1767	74	1	only	only	ADV
ap-1767	74	2	the	the	DET
ap-1767	74	3	best	good	ADJ
ap-1767	74	4	results	result	NOUN
ap-1767	74	5	are	be	AUX
ap-1767	74	6	mentioned	mention	VERB
ap-1767	74	7	in	in	ADP
ap-1767	74	8	the	the	DET
ap-1767	74	9	following	following	ADJ
ap-1767	74	10	summary	summary	NOUN
ap-1767	74	11	.	.	PUNCT
ap-1767	75	1	224	224	NUM
ap-1767	75	2	vol	vol	NOUN
ap-1767	75	3	.	.	PUNCT
ap-1767	76	1	53	53	NUM
ap-1767	76	2	no	no	NOUN
ap-1767	76	3	.	.	PUNCT
ap-1767	77	1	2/2013	2/2013	NUM
ap-1767	77	2	positioning	positioning	NOUN
ap-1767	77	3	of	of	ADP
ap-1767	77	4	the	the	DET
ap-1767	77	5	precursor	precursor	NOUN
ap-1767	77	6	gas	gas	NOUN
ap-1767	77	7	inlet	inlet	NOUN
ap-1767	77	8	in	in	ADP
ap-1767	77	9	an	an	DET
ap-1767	77	10	atmospheric	atmospheric	ADJ
ap-1767	77	11	dielectric	dielectric	ADJ
ap-1767	77	12	barrier	barrier	NOUN
ap-1767	77	13	reactory	reactory	NOUN
ap-1767	77	14	figure	figure	NOUN
ap-1767	77	15	3	3	NUM
ap-1767	77	16	.	.	NOUN
ap-1767	77	17	ti	ti	PROPN
ap-1767	77	18	2p	2p	NUM
ap-1767	77	19	xps	xps	PROPN
ap-1767	77	20	spectrum	spectrum	NOUN
ap-1767	77	21	of	of	ADP
ap-1767	77	22	the	the	DET
ap-1767	77	23	film	film	NOUN
ap-1767	77	24	,	,	PUNCT
ap-1767	77	25	inlets	inlet	VERB
ap-1767	77	26	a	a	PRON
ap-1767	77	27	,	,	PUNCT
ap-1767	77	28	c.	c.	PROPN
ap-1767	77	29	1	1	NUM
ap-1767	77	30	.	.	PUNCT
ap-1767	78	1	the	the	DET
ap-1767	78	2	reactor	reactor	NOUN
ap-1767	78	3	was	be	AUX
ap-1767	78	4	gassed	gas	VERB
ap-1767	78	5	both	both	PRON
ap-1767	78	6	with	with	ADP
ap-1767	78	7	ttip	ttip	PROPN
ap-1767	78	8	/	/	SYM
ap-1767	78	9	ar	ar	PROPN
ap-1767	78	10	(	(	PUNCT
ap-1767	78	11	0.5	0.5	NUM
ap-1767	78	12	slm	slm	PROPN
ap-1767	78	13	)	)	PUNCT
ap-1767	78	14	and	and	CCONJ
ap-1767	78	15	with	with	ADP
ap-1767	78	16	dry	dry	ADJ
ap-1767	78	17	air	air	NOUN
ap-1767	78	18	through	through	ADP
ap-1767	78	19	inlets	inlet	NOUN
ap-1767	78	20	a	a	PRON
ap-1767	78	21	and	and	CCONJ
ap-1767	78	22	b	b	NOUN
ap-1767	78	23	in	in	ADP
ap-1767	78	24	the	the	DET
ap-1767	78	25	walls	wall	NOUN
ap-1767	78	26	of	of	ADP
ap-1767	78	27	the	the	DET
ap-1767	78	28	reactor	reactor	NOUN
ap-1767	78	29	.	.	PUNCT
ap-1767	79	1	several	several	ADJ
ap-1767	79	2	differents	different	NOUN
ap-1767	79	3	positions	position	NOUN
ap-1767	79	4	of	of	ADP
ap-1767	79	5	both	both	DET
ap-1767	79	6	inlets	inlet	NOUN
ap-1767	79	7	were	be	AUX
ap-1767	79	8	tested	test	VERB
ap-1767	79	9	,	,	PUNCT
ap-1767	79	10	but	but	CCONJ
ap-1767	79	11	only	only	ADV
ap-1767	79	12	powder	powder	NOUN
ap-1767	79	13	-	-	PUNCT
ap-1767	79	14	like	like	ADJ
ap-1767	79	15	structures	structure	NOUN
ap-1767	79	16	were	be	AUX
ap-1767	79	17	deposited	deposit	VERB
ap-1767	79	18	on	on	ADP
ap-1767	79	19	the	the	DET
ap-1767	79	20	glass	glass	NOUN
ap-1767	79	21	substrate	substrate	NOUN
ap-1767	79	22	for	for	ADP
ap-1767	79	23	all	all	DET
ap-1767	79	24	used	use	VERB
ap-1767	79	25	combinations	combination	NOUN
ap-1767	79	26	of	of	ADP
ap-1767	79	27	a	a	PRON
ap-1767	79	28	and	and	CCONJ
ap-1767	79	29	b.	b.	PROPN
ap-1767	79	30	2	2	NUM
ap-1767	79	31	.	.	PUNCT
ap-1767	79	32	to	to	PART
ap-1767	79	33	reduce	reduce	VERB
ap-1767	79	34	pulverization	pulverization	NOUN
ap-1767	79	35	,	,	PUNCT
ap-1767	79	36	the	the	DET
ap-1767	79	37	reactor	reactor	NOUN
ap-1767	79	38	was	be	AUX
ap-1767	79	39	gassed	gas	VERB
ap-1767	79	40	through	through	ADP
ap-1767	79	41	inlet	inlet	VERB
ap-1767	79	42	a	a	PRON
ap-1767	79	43	in	in	ADP
ap-1767	79	44	the	the	DET
ap-1767	79	45	wall	wall	NOUN
ap-1767	79	46	of	of	ADP
ap-1767	79	47	the	the	DET
ap-1767	79	48	reactor	reactor	NOUN
ap-1767	79	49	with	with	ADP
ap-1767	79	50	dry	dry	ADJ
ap-1767	79	51	air	air	NOUN
ap-1767	79	52	,	,	PUNCT
ap-1767	79	53	and	and	CCONJ
ap-1767	79	54	ttip	ttip	PROPN
ap-1767	79	55	/	/	SYM
ap-1767	79	56	ar	ar	PROPN
ap-1767	79	57	(	(	PUNCT
ap-1767	79	58	0.5	0.5	NUM
ap-1767	79	59	slm	slm	NOUN
ap-1767	79	60	)	)	PUNCT
ap-1767	79	61	was	be	AUX
ap-1767	79	62	fed	feed	VERB
ap-1767	79	63	through	through	ADP
ap-1767	79	64	inlet	inlet	PROPN
ap-1767	79	65	c	c	PROPN
ap-1767	79	66	(	(	PUNCT
ap-1767	79	67	the	the	DET
ap-1767	79	68	hole	hole	NOUN
ap-1767	79	69	,	,	PUNCT
ap-1767	79	70	3	3	NUM
ap-1767	79	71	mm	mm	NOUN
ap-1767	79	72	in	in	ADP
ap-1767	79	73	diameter	diameter	NOUN
ap-1767	79	74	,	,	PUNCT
ap-1767	79	75	in	in	ADP
ap-1767	79	76	the	the	DET
ap-1767	79	77	hv	hv	PROPN
ap-1767	79	78	electrode	electrode	PROPN
ap-1767	79	79	)	)	PUNCT
ap-1767	79	80	.	.	PUNCT
ap-1767	80	1	the	the	DET
ap-1767	80	2	film	film	NOUN
ap-1767	80	3	that	that	PRON
ap-1767	80	4	formed	form	VERB
ap-1767	80	5	on	on	ADP
ap-1767	80	6	the	the	DET
ap-1767	80	7	glass	glass	NOUN
ap-1767	80	8	substrate	substrate	NOUN
ap-1767	80	9	was	be	AUX
ap-1767	80	10	very	very	ADV
ap-1767	80	11	thin	thin	ADJ
ap-1767	80	12	and	and	CCONJ
ap-1767	80	13	was	be	AUX
ap-1767	80	14	barely	barely	ADV
ap-1767	80	15	detectable	detectable	ADJ
ap-1767	80	16	.	.	PUNCT
ap-1767	81	1	we	we	PRON
ap-1767	81	2	suppose	suppose	VERB
ap-1767	81	3	that	that	SCONJ
ap-1767	81	4	the	the	DET
ap-1767	81	5	ttip	ttip	NOUN
ap-1767	81	6	/	/	SYM
ap-1767	81	7	oxygen	oxygen	NOUN
ap-1767	81	8	reaction	reaction	NOUN
ap-1767	81	9	was	be	AUX
ap-1767	81	10	weak	weak	ADJ
ap-1767	81	11	,	,	PUNCT
ap-1767	81	12	due	due	ADP
ap-1767	81	13	to	to	ADP
ap-1767	81	14	the	the	DET
ap-1767	81	15	low	low	ADJ
ap-1767	81	16	concentration	concentration	NOUN
ap-1767	81	17	of	of	ADP
ap-1767	81	18	oxygen	oxygen	NOUN
ap-1767	81	19	atoms	atom	NOUN
ap-1767	81	20	(	(	PUNCT
ap-1767	81	21	from	from	ADP
ap-1767	81	22	the	the	DET
ap-1767	81	23	air	air	NOUN
ap-1767	81	24	)	)	PUNCT
ap-1767	81	25	in	in	ADP
ap-1767	81	26	the	the	DET
ap-1767	81	27	reactor	reactor	NOUN
ap-1767	81	28	atmosphere	atmosphere	NOUN
ap-1767	81	29	.	.	PUNCT
ap-1767	82	1	then	then	ADV
ap-1767	82	2	the	the	DET
ap-1767	82	3	precursor	precursor	NOUN
ap-1767	82	4	molecules	molecule	NOUN
ap-1767	82	5	flew	fly	VERB
ap-1767	82	6	out	out	ADV
ap-1767	82	7	from	from	ADP
ap-1767	82	8	the	the	DET
ap-1767	82	9	inter	inter	ADJ
ap-1767	82	10	-	-	ADJ
ap-1767	82	11	electrode	electrode	ADJ
ap-1767	82	12	space	space	NOUN
ap-1767	82	13	and	and	CCONJ
ap-1767	82	14	later	later	ADV
ap-1767	82	15	reacted	react	VERB
ap-1767	82	16	with	with	ADP
ap-1767	82	17	oxygen	oxygen	NOUN
ap-1767	82	18	atoms	atom	NOUN
ap-1767	82	19	(	(	PUNCT
ap-1767	82	20	and	and	CCONJ
ap-1767	82	21	we	we	PRON
ap-1767	82	22	observed	observe	VERB
ap-1767	82	23	the	the	DET
ap-1767	82	24	tiox	tiox	NOUN
ap-1767	82	25	thin	thin	ADJ
ap-1767	82	26	film	film	NOUN
ap-1767	82	27	deposited	deposit	VERB
ap-1767	82	28	on	on	ADP
ap-1767	82	29	the	the	DET
ap-1767	82	30	inner	inner	ADJ
ap-1767	82	31	walls	wall	NOUN
ap-1767	82	32	of	of	ADP
ap-1767	82	33	the	the	DET
ap-1767	82	34	reactor	reactor	NOUN
ap-1767	82	35	)	)	PUNCT
ap-1767	82	36	.	.	PUNCT
ap-1767	83	1	afm	afm	PROPN
ap-1767	83	2	measurements	measurement	NOUN
ap-1767	83	3	revealed	reveal	VERB
ap-1767	83	4	the	the	DET
ap-1767	83	5	existence	existence	NOUN
ap-1767	83	6	of	of	ADP
ap-1767	83	7	some	some	DET
ap-1767	83	8	salient	salient	ADJ
ap-1767	83	9	parts	part	NOUN
ap-1767	83	10	on	on	ADP
ap-1767	83	11	the	the	DET
ap-1767	83	12	uniform	uniform	ADJ
ap-1767	83	13	powder	powder	NOUN
ap-1767	83	14	-	-	PUNCT
ap-1767	83	15	like	like	ADJ
ap-1767	83	16	film	film	NOUN
ap-1767	83	17	surface	surface	NOUN
ap-1767	83	18	(	(	PUNCT
ap-1767	83	19	fig	fig	NOUN
ap-1767	83	20	.	.	PUNCT
ap-1767	84	1	2	2	NUM
ap-1767	84	2	)	)	PUNCT
ap-1767	84	3	.	.	PUNCT
ap-1767	85	1	small	small	ADJ
ap-1767	85	2	hummocks	hummock	NOUN
ap-1767	85	3	were	be	AUX
ap-1767	85	4	also	also	ADV
ap-1767	85	5	visible	visible	ADJ
ap-1767	85	6	.	.	PUNCT
ap-1767	86	1	ca	can	AUX
ap-1767	86	2	measurements	measurement	NOUN
ap-1767	86	3	were	be	AUX
ap-1767	86	4	almost	almost	ADV
ap-1767	86	5	impossible	impossible	ADJ
ap-1767	86	6	due	due	ADP
ap-1767	86	7	to	to	ADP
ap-1767	86	8	the	the	DET
ap-1767	86	9	inhomogeneity	inhomogeneity	NOUN
ap-1767	86	10	and	and	CCONJ
ap-1767	86	11	the	the	DET
ap-1767	86	12	thinness	thinness	NOUN
ap-1767	86	13	of	of	ADP
ap-1767	86	14	the	the	DET
ap-1767	86	15	film	film	NOUN
ap-1767	86	16	,	,	PUNCT
ap-1767	86	17	and	and	CCONJ
ap-1767	86	18	the	the	DET
ap-1767	86	19	results	result	NOUN
ap-1767	86	20	were	be	AUX
ap-1767	86	21	not	not	PART
ap-1767	86	22	reproduciable	reproduciable	ADJ
ap-1767	86	23	.	.	PUNCT
ap-1767	87	1	only	only	ADV
ap-1767	87	2	powderlike	powderlike	ADJ
ap-1767	87	3	tiox	tiox	NOUN
ap-1767	87	4	structures	structure	NOUN
ap-1767	87	5	were	be	AUX
ap-1767	87	6	deposited	deposit	VERB
ap-1767	87	7	on	on	ADP
ap-1767	87	8	the	the	DET
ap-1767	87	9	substrate	substrate	NOUN
ap-1767	87	10	for	for	ADP
ap-1767	87	11	ttip	ttip	NOUN
ap-1767	87	12	/	/	SYM
ap-1767	87	13	ar	ar	NOUN
ap-1767	87	14	flows	flow	VERB
ap-1767	87	15	higher	high	ADJ
ap-1767	87	16	than	than	ADP
ap-1767	87	17	0.5	0.5	NUM
ap-1767	87	18	slm	slm	NOUN
ap-1767	87	19	.	.	PUNCT
ap-1767	88	1	the	the	DET
ap-1767	88	2	high	high	ADJ
ap-1767	88	3	-	-	PUNCT
ap-1767	88	4	resolution	resolution	NOUN
ap-1767	88	5	xps	xps	PROPN
ap-1767	88	6	spectra	spectra	PROPN
ap-1767	88	7	for	for	ADP
ap-1767	88	8	the	the	DET
ap-1767	88	9	main	main	ADJ
ap-1767	88	10	elements	element	NOUN
ap-1767	88	11	in	in	ADP
ap-1767	88	12	the	the	DET
ap-1767	88	13	films	film	NOUN
ap-1767	88	14	are	be	AUX
ap-1767	88	15	shown	show	VERB
ap-1767	88	16	in	in	ADP
ap-1767	88	17	figs	fig	NOUN
ap-1767	88	18	.	.	PUNCT
ap-1767	89	1	3–5	3–5	X
ap-1767	89	2	.	.	PUNCT
ap-1767	89	3	figure	figure	NOUN
ap-1767	89	4	3	3	NUM
ap-1767	89	5	represents	represent	VERB
ap-1767	89	6	the	the	DET
ap-1767	89	7	ti	ti	PROPN
ap-1767	89	8	2p	2p	NUM
ap-1767	89	9	spectrum	spectrum	NOUN
ap-1767	89	10	that	that	PRON
ap-1767	89	11	consists	consist	VERB
ap-1767	89	12	of	of	ADP
ap-1767	89	13	2p3/2	2p3/2	PROPN
ap-1767	89	14	and	and	CCONJ
ap-1767	89	15	2p1/2	2p1/2	NUM
ap-1767	89	16	spin	spin	NOUN
ap-1767	89	17	orbit	orbit	NOUN
ap-1767	89	18	components	component	NOUN
ap-1767	89	19	located	locate	VERB
ap-1767	89	20	at	at	ADP
ap-1767	89	21	458.8	458.8	NUM
ap-1767	89	22	ev	ev	NOUN
ap-1767	89	23	and	and	CCONJ
ap-1767	89	24	464.6	464.6	NUM
ap-1767	89	25	ev	ev	NOUN
ap-1767	89	26	,	,	PUNCT
ap-1767	89	27	respectively	respectively	ADV
ap-1767	89	28	.	.	PUNCT
ap-1767	90	1	this	this	DET
ap-1767	90	2	position	position	NOUN
ap-1767	90	3	of	of	ADP
ap-1767	90	4	the	the	DET
ap-1767	90	5	peak	peak	NOUN
ap-1767	90	6	maxima	maxima	NOUN
ap-1767	90	7	indicates	indicate	VERB
ap-1767	90	8	that	that	SCONJ
ap-1767	90	9	the	the	DET
ap-1767	90	10	main	main	ADJ
ap-1767	90	11	titanium	titanium	NOUN
ap-1767	90	12	compound	compound	NOUN
ap-1767	90	13	is	be	AUX
ap-1767	90	14	tio2	tio2	VERB
ap-1767	90	15	.	.	PUNCT
ap-1767	91	1	the	the	DET
ap-1767	91	2	small	small	ADJ
ap-1767	91	3	components	component	NOUN
ap-1767	91	4	on	on	ADP
ap-1767	91	5	the	the	DET
ap-1767	91	6	lower	lower	ADV
ap-1767	91	7	binding	bind	VERB
ap-1767	91	8	energy	energy	NOUN
ap-1767	91	9	side	side	NOUN
ap-1767	91	10	correspond	correspond	NOUN
ap-1767	91	11	to	to	ADP
ap-1767	91	12	sub	sub	ADJ
ap-1767	91	13	-	-	ADJ
ap-1767	91	14	stoichiometric	stoichiometric	ADJ
ap-1767	91	15	titanium	titanium	NOUN
ap-1767	91	16	oxide	oxide	NOUN
ap-1767	91	17	tiox	tiox	NOUN
ap-1767	91	18	,	,	PUNCT
ap-1767	91	19	x	x	X
ap-1767	91	20	<	<	X
ap-1767	91	21	2	2	NUM
ap-1767	91	22	.	.	PUNCT
ap-1767	92	1	the	the	DET
ap-1767	92	2	o	o	PROPN
ap-1767	92	3	1s	1s	NUM
ap-1767	92	4	spectrum	spectrum	NOUN
ap-1767	92	5	is	be	AUX
ap-1767	92	6	shown	show	VERB
ap-1767	92	7	in	in	ADP
ap-1767	92	8	fig	fig	NOUN
ap-1767	92	9	.	.	PUNCT
ap-1767	93	1	4	4	X
ap-1767	93	2	.	.	X
ap-1767	93	3	the	the	DET
ap-1767	93	4	peak	peak	NOUN
ap-1767	93	5	consists	consist	VERB
ap-1767	93	6	of	of	ADP
ap-1767	93	7	two	two	NUM
ap-1767	93	8	distinct	distinct	ADJ
ap-1767	93	9	components	component	NOUN
ap-1767	93	10	at	at	ADP
ap-1767	93	11	530.5	530.5	NUM
ap-1767	93	12	ev	ev	NOUN
ap-1767	93	13	and	and	CCONJ
ap-1767	93	14	532.7	532.7	NUM
ap-1767	93	15	ev	ev	NOUN
ap-1767	93	16	.	.	PUNCT
ap-1767	94	1	the	the	DET
ap-1767	94	2	first	first	ADJ
ap-1767	94	3	component	component	NOUN
ap-1767	94	4	is	be	AUX
ap-1767	94	5	classified	classify	VERB
ap-1767	94	6	as	as	ADP
ap-1767	94	7	tio2	tio2	NOUN
ap-1767	94	8	,	,	PUNCT
ap-1767	94	9	whereas	whereas	SCONJ
ap-1767	94	10	the	the	DET
ap-1767	94	11	second	second	ADJ
ap-1767	94	12	component	component	NOUN
ap-1767	94	13	corresponds	correspond	VERB
ap-1767	94	14	to	to	ADP
ap-1767	94	15	the	the	DET
ap-1767	94	16	carbon	carbon	NOUN
ap-1767	94	17	-	-	PUNCT
ap-1767	94	18	oxygen	oxygen	NOUN
ap-1767	94	19	species	specie	NOUN
ap-1767	94	20	.	.	PUNCT
ap-1767	95	1	the	the	DET
ap-1767	95	2	carbon	carbon	NOUN
ap-1767	95	3	-	-	PUNCT
ap-1767	95	4	oxygen	oxygen	NOUN
ap-1767	95	5	species	specie	NOUN
ap-1767	95	6	are	be	AUX
ap-1767	95	7	about	about	ADV
ap-1767	95	8	three	three	NUM
ap-1767	95	9	times	time	NOUN
ap-1767	95	10	more	more	ADV
ap-1767	95	11	abundant	abundant	ADJ
ap-1767	95	12	than	than	ADP
ap-1767	95	13	oxygen	oxygen	NOUN
ap-1767	95	14	figure	figure	NOUN
ap-1767	95	15	4	4	NUM
ap-1767	95	16	.	.	PUNCT
ap-1767	96	1	o	o	NOUN
ap-1767	96	2	1s	1s	NUM
ap-1767	96	3	xps	xps	PROPN
ap-1767	96	4	spectrum	spectrum	NOUN
ap-1767	96	5	of	of	ADP
ap-1767	96	6	the	the	DET
ap-1767	96	7	film	film	NOUN
ap-1767	96	8	,	,	PUNCT
ap-1767	96	9	inlets	inlet	VERB
ap-1767	96	10	a	a	DET
ap-1767	96	11	,	,	PUNCT
ap-1767	96	12	c.	c.	NOUN
ap-1767	96	13	figure	figure	NOUN
ap-1767	96	14	5	5	NUM
ap-1767	96	15	.	.	PUNCT
ap-1767	97	1	c	c	NOUN
ap-1767	97	2	1s	1s	PROPN
ap-1767	97	3	xps	xps	PROPN
ap-1767	97	4	spectrum	spectrum	NOUN
ap-1767	97	5	of	of	ADP
ap-1767	97	6	the	the	DET
ap-1767	97	7	film	film	NOUN
ap-1767	97	8	,	,	PUNCT
ap-1767	97	9	inlets	inlet	VERB
ap-1767	97	10	a	a	PRON
ap-1767	97	11	,	,	PUNCT
ap-1767	97	12	c.	c.	PROPN
ap-1767	97	13	bound	bind	VERB
ap-1767	97	14	in	in	ADP
ap-1767	97	15	titanium	titanium	NOUN
ap-1767	97	16	(	(	PUNCT
ap-1767	97	17	24	24	NUM
ap-1767	97	18	%	%	NOUN
ap-1767	97	19	against	against	ADP
ap-1767	97	20	76	76	NUM
ap-1767	97	21	%	%	NOUN
ap-1767	97	22	)	)	PUNCT
ap-1767	97	23	.	.	PUNCT
ap-1767	98	1	we	we	PRON
ap-1767	98	2	suppose	suppose	VERB
ap-1767	98	3	that	that	SCONJ
ap-1767	98	4	the	the	DET
ap-1767	98	5	carbon	carbon	NOUN
ap-1767	98	6	contamination	contamination	NOUN
ap-1767	98	7	was	be	AUX
ap-1767	98	8	probably	probably	ADV
ap-1767	98	9	only	only	ADV
ap-1767	98	10	superficial	superficial	ADJ
ap-1767	98	11	.	.	PUNCT
ap-1767	99	1	this	this	DET
ap-1767	99	2	contamination	contamination	NOUN
ap-1767	99	3	may	may	AUX
ap-1767	99	4	have	have	AUX
ap-1767	99	5	originated	originate	VERB
ap-1767	99	6	both	both	CCONJ
ap-1767	99	7	during	during	ADP
ap-1767	99	8	the	the	DET
ap-1767	99	9	deposition	deposition	NOUN
ap-1767	99	10	process	process	NOUN
ap-1767	99	11	by	by	ADP
ap-1767	99	12	impurities	impurity	NOUN
ap-1767	99	13	from	from	ADP
ap-1767	99	14	the	the	DET
ap-1767	99	15	air	air	NOUN
ap-1767	99	16	and	and	CCONJ
ap-1767	99	17	by	by	ADP
ap-1767	99	18	post	post	ADJ
ap-1767	99	19	-	-	ADJ
ap-1767	99	20	discharge	discharge	ADJ
ap-1767	99	21	reactions	reaction	NOUN
ap-1767	99	22	and	and	CCONJ
ap-1767	99	23	adsorption	adsorption	NOUN
ap-1767	99	24	of	of	ADP
ap-1767	99	25	various	various	ADJ
ap-1767	99	26	species	specie	NOUN
ap-1767	99	27	from	from	ADP
ap-1767	99	28	the	the	DET
ap-1767	99	29	ambient	ambient	ADJ
ap-1767	99	30	air	air	NOUN
ap-1767	99	31	atmosphere	atmosphere	NOUN
ap-1767	99	32	after	after	ADP
ap-1767	99	33	the	the	DET
ap-1767	99	34	film	film	NOUN
ap-1767	99	35	removal	removal	NOUN
ap-1767	99	36	from	from	ADP
ap-1767	99	37	the	the	DET
ap-1767	99	38	reactor	reactor	NOUN
ap-1767	99	39	.	.	PUNCT
ap-1767	100	1	3	3	X
ap-1767	100	2	.	.	PUNCT
ap-1767	100	3	to	to	PART
ap-1767	100	4	improve	improve	VERB
ap-1767	100	5	the	the	DET
ap-1767	100	6	quality	quality	NOUN
ap-1767	100	7	of	of	ADP
ap-1767	100	8	the	the	DET
ap-1767	100	9	films	film	NOUN
ap-1767	100	10	and	and	CCONJ
ap-1767	100	11	optimize	optimize	VERB
ap-1767	100	12	the	the	DET
ap-1767	100	13	deposition	deposition	NOUN
ap-1767	100	14	conditions	condition	NOUN
ap-1767	100	15	,	,	PUNCT
ap-1767	100	16	both	both	DET
ap-1767	100	17	components	component	NOUN
ap-1767	100	18	were	be	AUX
ap-1767	100	19	introduced	introduce	VERB
ap-1767	100	20	through	through	ADP
ap-1767	100	21	the	the	DET
ap-1767	100	22	inlets	inlet	NOUN
ap-1767	100	23	in	in	ADP
ap-1767	100	24	the	the	DET
ap-1767	100	25	hv	hv	NOUN
ap-1767	100	26	electrode	electrode	NOUN
ap-1767	100	27	,	,	PUNCT
ap-1767	100	28	and	and	CCONJ
ap-1767	100	29	the	the	DET
ap-1767	100	30	atmospheric	atmospheric	ADJ
ap-1767	100	31	air	air	NOUN
ap-1767	100	32	was	be	AUX
ap-1767	100	33	replaced	replace	VERB
ap-1767	100	34	by	by	ADP
ap-1767	100	35	oxygen	oxygen	NOUN
ap-1767	100	36	(	(	PUNCT
ap-1767	100	37	c	c	NOUN
ap-1767	100	38	(	(	PUNCT
ap-1767	100	39	ttip	ttip	PROPN
ap-1767	100	40	/	/	SYM
ap-1767	100	41	ar	ar	NOUN
ap-1767	100	42	)	)	PUNCT
ap-1767	100	43	and	and	CCONJ
ap-1767	100	44	d	d	PROPN
ap-1767	100	45	(	(	PUNCT
ap-1767	100	46	oxygen	oxygen	NOUN
ap-1767	100	47	)	)	PUNCT
ap-1767	100	48	)	)	PUNCT
ap-1767	100	49	.	.	PUNCT
ap-1767	101	1	nevertheless	nevertheless	ADV
ap-1767	101	2	problems	problem	NOUN
ap-1767	101	3	still	still	ADV
ap-1767	101	4	persisted	persist	VERB
ap-1767	101	5	.	.	PUNCT
ap-1767	102	1	afm	afm	PROPN
ap-1767	102	2	analysis	analysis	NOUN
ap-1767	102	3	proved	prove	VERB
ap-1767	102	4	that	that	SCONJ
ap-1767	102	5	the	the	DET
ap-1767	102	6	deposited	deposit	VERB
ap-1767	102	7	films	film	NOUN
ap-1767	102	8	were	be	AUX
ap-1767	102	9	not	not	PART
ap-1767	102	10	fully	fully	ADV
ap-1767	102	11	homogeneous	homogeneous	ADJ
ap-1767	102	12	(	(	PUNCT
ap-1767	102	13	fig	fig	NOUN
ap-1767	102	14	.	.	PUNCT
ap-1767	102	15	6	6	NUM
ap-1767	102	16	)	)	PUNCT
ap-1767	102	17	,	,	PUNCT
ap-1767	102	18	and	and	CCONJ
ap-1767	102	19	there	there	PRON
ap-1767	102	20	were	be	VERB
ap-1767	102	21	problems	problem	NOUN
ap-1767	102	22	with	with	ADP
ap-1767	102	23	creating	create	VERB
ap-1767	102	24	the	the	DET
ap-1767	102	25	powder	powder	NOUN
ap-1767	102	26	-	-	PUNCT
ap-1767	102	27	like	like	ADJ
ap-1767	102	28	structures	structure	NOUN
ap-1767	102	29	.	.	PUNCT
ap-1767	103	1	for	for	ADP
ap-1767	103	2	further	further	ADJ
ap-1767	103	3	details	detail	NOUN
ap-1767	103	4	,	,	PUNCT
ap-1767	103	5	see	see	VERB
ap-1767	103	6	[	[	X
ap-1767	103	7	3	3	NUM
ap-1767	103	8	]	]	PUNCT
ap-1767	103	9	.	.	PUNCT
ap-1767	104	1	4	4	X
ap-1767	104	2	.	.	X
ap-1767	104	3	the	the	DET
ap-1767	104	4	best	good	ADJ
ap-1767	104	5	quality	quality	NOUN
ap-1767	104	6	films	film	NOUN
ap-1767	104	7	were	be	AUX
ap-1767	104	8	deposited	deposit	VERB
ap-1767	104	9	in	in	ADP
ap-1767	104	10	the	the	DET
ap-1767	104	11	same	same	ADJ
ap-1767	104	12	adjustment	adjustment	NOUN
ap-1767	104	13	,	,	PUNCT
ap-1767	104	14	but	but	CCONJ
ap-1767	104	15	unlike	unlike	ADP
ap-1767	104	16	with	with	ADP
ap-1767	104	17	the	the	DET
ap-1767	104	18	previous	previous	ADJ
ap-1767	104	19	combination	combination	NOUN
ap-1767	104	20	of	of	ADP
ap-1767	104	21	inlets	inlet	NOUN
ap-1767	104	22	,	,	PUNCT
ap-1767	104	23	oxygen	oxygen	NOUN
ap-1767	104	24	(	(	PUNCT
ap-1767	104	25	2.5	2.5	NUM
ap-1767	104	26	slm	slm	NOUN
ap-1767	104	27	)	)	PUNCT
ap-1767	104	28	was	be	AUX
ap-1767	104	29	fed	feed	VERB
ap-1767	104	30	through	through	ADP
ap-1767	104	31	inlet	inlet	PROPN
ap-1767	104	32	c	c	PROPN
ap-1767	104	33	and	and	CCONJ
ap-1767	104	34	ttip	ttip	PROPN
ap-1767	104	35	/	/	SYM
ap-1767	104	36	ar	ar	NOUN
ap-1767	104	37	mixture	mixture	NOUN
ap-1767	104	38	(	(	PUNCT
ap-1767	104	39	1	1	NUM
ap-1767	104	40	slm	slm	NOUN
ap-1767	104	41	or	or	CCONJ
ap-1767	104	42	2	2	NUM
ap-1767	104	43	slm	slm	NOUN
ap-1767	104	44	)	)	PUNCT
ap-1767	104	45	,	,	PUNCT
ap-1767	104	46	i.e.	i.e.	X
ap-1767	104	47	the	the	DET
ap-1767	104	48	ttip	ttip	NOUN
ap-1767	104	49	content	content	NOUN
ap-1767	104	50	(	(	PUNCT
ap-1767	104	51	0.05	0.05	NUM
ap-1767	104	52	or	or	CCONJ
ap-1767	104	53	0.10)%	0.10)%	PROPN
ap-1767	104	54	was	be	AUX
ap-1767	104	55	fed	feed	VERB
ap-1767	104	56	in	in	ADP
ap-1767	104	57	through	through	ADP
ap-1767	104	58	inlet	inlet	PROPN
ap-1767	104	59	d.	d.	PROPN
ap-1767	104	60	the	the	DET
ap-1767	104	61	mixture	mixture	NOUN
ap-1767	104	62	entered	enter	VERB
ap-1767	104	63	through	through	ADP
ap-1767	104	64	the	the	DET
ap-1767	104	65	hole	hole	NOUN
ap-1767	104	66	(	(	PUNCT
ap-1767	104	67	diameter	diameter	NOUN
ap-1767	104	68	3	3	NUM
ap-1767	104	69	mm	mm	NOUN
ap-1767	104	70	)	)	PUNCT
ap-1767	104	71	in	in	ADP
ap-1767	104	72	the	the	DET
ap-1767	104	73	hv	hv	PROPN
ap-1767	104	74	electrode	electrode	NOUN
ap-1767	104	75	into	into	ADP
ap-1767	104	76	the	the	DET
ap-1767	104	77	inter	inter	ADJ
ap-1767	104	78	-	-	ADJ
ap-1767	104	79	electrode	electrode	ADJ
ap-1767	104	80	space	space	NOUN
ap-1767	104	81	.	.	PUNCT
ap-1767	105	1	225	225	NUM
ap-1767	105	2	jan	jan	PROPN
ap-1767	105	3	pichal	pichal	PROPN
ap-1767	105	4	,	,	PUNCT
ap-1767	105	5	julia	julia	PROPN
ap-1767	105	6	klenko	klenko	PROPN
ap-1767	105	7	acta	acta	PROPN
ap-1767	105	8	polytechnica	polytechnica	PROPN
ap-1767	105	9	figure	figure	NOUN
ap-1767	105	10	6	6	NUM
ap-1767	105	11	.	.	PUNCT
ap-1767	105	12	inlets	inlet	NOUN
ap-1767	105	13	:	:	PUNCT
ap-1767	106	1	c	c	X
ap-1767	106	2	(	(	PUNCT
ap-1767	106	3	ttip	ttip	PROPN
ap-1767	106	4	/	/	SYM
ap-1767	106	5	ar	ar	NOUN
ap-1767	106	6	,	,	PUNCT
ap-1767	106	7	1	1	NUM
ap-1767	106	8	slm	slm	NOUN
ap-1767	106	9	)	)	PUNCT
ap-1767	106	10	,	,	PUNCT
ap-1767	106	11	d	d	X
ap-1767	106	12	(	(	PUNCT
ap-1767	106	13	o2	o2	PROPN
ap-1767	106	14	,	,	PUNCT
ap-1767	106	15	2.5	2.5	NUM
ap-1767	106	16	slm	slm	NOUN
ap-1767	106	17	)	)	PUNCT
ap-1767	106	18	.	.	PUNCT
ap-1767	107	1	figure	figure	VERB
ap-1767	107	2	7	7	NUM
ap-1767	107	3	.	.	PUNCT
ap-1767	108	1	topography	topography	NOUN
ap-1767	108	2	of	of	ADP
ap-1767	108	3	the	the	DET
ap-1767	108	4	tiox	tiox	NOUN
ap-1767	108	5	films	film	NOUN
ap-1767	108	6	;	;	PUNCT
ap-1767	108	7	inlets	inlet	NOUN
ap-1767	108	8	:	:	PUNCT
ap-1767	109	1	c	c	X
ap-1767	109	2	(	(	PUNCT
ap-1767	109	3	ttip	ttip	PROPN
ap-1767	109	4	/	/	SYM
ap-1767	109	5	ar	ar	NOUN
ap-1767	109	6	,	,	PUNCT
ap-1767	109	7	1	1	NUM
ap-1767	109	8	slm	slm	NOUN
ap-1767	109	9	)	)	PUNCT
ap-1767	109	10	,	,	PUNCT
ap-1767	109	11	d	d	X
ap-1767	109	12	(	(	PUNCT
ap-1767	109	13	o2	o2	PROPN
ap-1767	109	14	,	,	PUNCT
ap-1767	109	15	2.5	2.5	NUM
ap-1767	109	16	slm	slm	NOUN
ap-1767	109	17	)	)	PUNCT
ap-1767	109	18	.	.	PUNCT
ap-1767	110	1	figure	figure	NOUN
ap-1767	110	2	7	7	NUM
ap-1767	110	3	is	be	AUX
ap-1767	110	4	afm	afm	PROPN
ap-1767	110	5	scan	scan	NOUN
ap-1767	110	6	of	of	ADP
ap-1767	110	7	the	the	DET
ap-1767	110	8	film	film	NOUN
ap-1767	110	9	surface	surface	NOUN
ap-1767	110	10	deposited	deposit	VERB
ap-1767	110	11	under	under	ADP
ap-1767	110	12	optimum	optimum	ADJ
ap-1767	110	13	conditions	condition	NOUN
ap-1767	110	14	.	.	PUNCT
ap-1767	111	1	the	the	DET
ap-1767	111	2	surface	surface	NOUN
ap-1767	111	3	is	be	AUX
ap-1767	111	4	similar	similar	ADJ
ap-1767	111	5	to	to	ADP
ap-1767	111	6	the	the	DET
ap-1767	111	7	surface	surface	NOUN
ap-1767	111	8	described	describe	VERB
ap-1767	111	9	in	in	ADP
ap-1767	111	10	[	[	X
ap-1767	111	11	10	10	NUM
ap-1767	111	12	]	]	PUNCT
ap-1767	111	13	.	.	PUNCT
ap-1767	112	1	it	it	PRON
ap-1767	112	2	is	be	AUX
ap-1767	112	3	characterised	characterise	VERB
ap-1767	112	4	by	by	ADP
ap-1767	112	5	higher	high	ADJ
ap-1767	112	6	hummocks	hummock	NOUN
ap-1767	112	7	than	than	ADP
ap-1767	112	8	in	in	ADP
ap-1767	112	9	fig	fig	NOUN
ap-1767	112	10	.	.	PUNCT
ap-1767	113	1	6	6	NUM
ap-1767	113	2	,	,	PUNCT
ap-1767	113	3	when	when	SCONJ
ap-1767	113	4	film	film	NOUN
ap-1767	113	5	deposition	deposition	NOUN
ap-1767	113	6	in	in	ADP
ap-1767	113	7	surface	surface	NOUN
ap-1767	113	8	-	-	PUNCT
ap-1767	113	9	limited	limit	VERB
ap-1767	113	10	reactions	reaction	NOUN
ap-1767	113	11	was	be	AUX
ap-1767	113	12	accompanied	accompany	VERB
ap-1767	113	13	by	by	ADP
ap-1767	113	14	volume	volume	NOUN
ap-1767	113	15	-	-	PUNCT
ap-1767	113	16	limited	limit	VERB
ap-1767	113	17	dust	dust	NOUN
ap-1767	113	18	generating	generating	NOUN
ap-1767	113	19	reactions	reaction	NOUN
ap-1767	113	20	.	.	PUNCT
ap-1767	114	1	the	the	DET
ap-1767	114	2	ca	ca	NOUN
ap-1767	114	3	tests	test	NOUN
ap-1767	114	4	proved	prove	VERB
ap-1767	114	5	that	that	SCONJ
ap-1767	114	6	all	all	DET
ap-1767	114	7	samples	sample	NOUN
ap-1767	114	8	were	be	AUX
ap-1767	114	9	hydrophilic	hydrophilic	ADJ
ap-1767	114	10	immediately	immediately	ADV
ap-1767	114	11	after	after	ADP
ap-1767	114	12	deposition	deposition	NOUN
ap-1767	114	13	.	.	PUNCT
ap-1767	115	1	for	for	ADP
ap-1767	115	2	an	an	DET
ap-1767	115	3	ar	ar	NOUN
ap-1767	115	4	/	/	SYM
ap-1767	115	5	ttip	ttip	NOUN
ap-1767	115	6	flow	flow	NOUN
ap-1767	115	7	rate	rate	NOUN
ap-1767	115	8	of	of	ADP
ap-1767	115	9	1	1	NUM
ap-1767	115	10	slm	slm	PROPN
ap-1767	115	11	,	,	PUNCT
ap-1767	115	12	the	the	DET
ap-1767	115	13	ca	ca	NOUN
ap-1767	115	14	value	value	NOUN
ap-1767	115	15	attained	attain	VERB
ap-1767	115	16	5	5	NUM
ap-1767	115	17	◦	◦	NOUN
ap-1767	115	18	immediately	immediately	ADV
ap-1767	115	19	after	after	ADP
ap-1767	115	20	deposition	deposition	NOUN
ap-1767	115	21	.	.	PUNCT
ap-1767	116	1	the	the	DET
ap-1767	116	2	hydrophilicity	hydrophilicity	NOUN
ap-1767	116	3	of	of	ADP
ap-1767	116	4	the	the	DET
ap-1767	116	5	films	film	NOUN
ap-1767	116	6	remained	remain	VERB
ap-1767	116	7	almost	almost	ADV
ap-1767	116	8	invariable	invariable	ADJ
ap-1767	116	9	in	in	ADP
ap-1767	116	10	the	the	DET
ap-1767	116	11	first	first	ADJ
ap-1767	116	12	7	7	NUM
ap-1767	116	13	days	day	NOUN
ap-1767	116	14	after	after	ADP
ap-1767	116	15	deposition	deposition	NOUN
ap-1767	116	16	.	.	PUNCT
ap-1767	117	1	later	later	ADV
ap-1767	117	2	,	,	PUNCT
ap-1767	117	3	the	the	DET
ap-1767	117	4	wettability	wettability	NOUN
ap-1767	117	5	had	have	AUX
ap-1767	117	6	worsened	worsen	VERB
ap-1767	117	7	and	and	CCONJ
ap-1767	117	8	within	within	ADP
ap-1767	117	9	28	28	NUM
ap-1767	117	10	days	day	NOUN
ap-1767	117	11	after	after	ADP
ap-1767	117	12	deposition	deposition	NOUN
ap-1767	117	13	the	the	DET
ap-1767	117	14	ca	ca	NOUN
ap-1767	117	15	value	value	NOUN
ap-1767	117	16	of	of	ADP
ap-1767	117	17	all	all	DET
ap-1767	117	18	samples	sample	NOUN
ap-1767	117	19	exceeded	exceed	VERB
ap-1767	117	20	40	40	NUM
ap-1767	117	21	◦	◦	NOUN
ap-1767	117	22	.	.	PUNCT
ap-1767	118	1	films	film	NOUN
ap-1767	118	2	deposited	deposit	VERB
ap-1767	118	3	with	with	ADP
ap-1767	118	4	ttip	ttip	NOUN
ap-1767	118	5	/	/	SYM
ap-1767	118	6	ar	ar	NOUN
ap-1767	118	7	flow	flow	NOUN
ap-1767	118	8	2	2	NUM
ap-1767	118	9	slm	slm	NOUN
ap-1767	118	10	changed	change	VERB
ap-1767	118	11	more	more	ADV
ap-1767	118	12	rapidly	rapidly	ADV
ap-1767	118	13	from	from	ADP
ap-1767	118	14	hydrophilic	hydrophilic	NOUN
ap-1767	118	15	to	to	ADP
ap-1767	118	16	hydrophobic	hydrophobic	NOUN
ap-1767	118	17	.	.	PUNCT
ap-1767	119	1	the	the	DET
ap-1767	119	2	chemical	chemical	NOUN
ap-1767	119	3	composition	composition	NOUN
ap-1767	119	4	of	of	ADP
ap-1767	119	5	the	the	DET
ap-1767	119	6	films	film	NOUN
ap-1767	119	7	(	(	PUNCT
ap-1767	119	8	ttip	ttip	NOUN
ap-1767	119	9	/	/	SYM
ap-1767	119	10	ar	ar	NOUN
ap-1767	119	11	flows	flow	NOUN
ap-1767	119	12	(	(	PUNCT
ap-1767	119	13	0.5	0.5	NUM
ap-1767	119	14	÷	÷	NUM
ap-1767	119	15	4.0	4.0	NUM
ap-1767	119	16	slm	slm	NOUN
ap-1767	119	17	)	)	PUNCT
ap-1767	119	18	,	,	PUNCT
ap-1767	119	19	oxygen	oxygen	NOUN
ap-1767	119	20	(	(	PUNCT
ap-1767	119	21	2.5	2.5	NUM
ap-1767	119	22	÷	÷	NUM
ap-1767	119	23	10	10	NUM
ap-1767	119	24	)	)	PUNCT
ap-1767	119	25	slm	slm	PROPN
ap-1767	119	26	was	be	AUX
ap-1767	119	27	almost	almost	ADV
ap-1767	119	28	constant	constant	ADJ
ap-1767	119	29	.	.	PUNCT
ap-1767	120	1	high	high	ADJ
ap-1767	120	2	-	-	PUNCT
ap-1767	120	3	resolution	resolution	NOUN
ap-1767	120	4	spectra	spectra	NOUN
ap-1767	120	5	for	for	ADP
ap-1767	120	6	the	the	DET
ap-1767	120	7	main	main	ADJ
ap-1767	120	8	elements	element	NOUN
ap-1767	120	9	in	in	ADP
ap-1767	120	10	films	film	NOUN
ap-1767	120	11	are	be	AUX
ap-1767	120	12	shown	show	VERB
ap-1767	120	13	in	in	ADP
ap-1767	120	14	figs	fig	NOUN
ap-1767	120	15	.	.	PUNCT
ap-1767	121	1	8–10	8–10	NOUN
ap-1767	121	2	.	.	PUNCT
ap-1767	122	1	the	the	DET
ap-1767	122	2	relatively	relatively	ADV
ap-1767	122	3	high	high	ADJ
ap-1767	122	4	hydrocarbon	hydrocarbon	NOUN
ap-1767	122	5	contamination	contamination	NOUN
ap-1767	122	6	on	on	ADP
ap-1767	122	7	the	the	DET
ap-1767	122	8	film	film	NOUN
ap-1767	122	9	surface	surface	NOUN
ap-1767	122	10	was	be	AUX
ap-1767	122	11	again	again	ADV
ap-1767	122	12	most	most	ADV
ap-1767	122	13	probably	probably	ADV
ap-1767	122	14	produced	produce	VERB
ap-1767	122	15	by	by	ADP
ap-1767	122	16	the	the	DET
ap-1767	122	17	post	post	ADJ
ap-1767	122	18	-	-	ADJ
ap-1767	122	19	discharge	discharge	ADJ
ap-1767	122	20	reactions	reaction	NOUN
ap-1767	122	21	,	,	PUNCT
ap-1767	122	22	and	and	CCONJ
ap-1767	122	23	by	by	ADP
ap-1767	122	24	the	the	DET
ap-1767	122	25	adsorption	adsorption	NOUN
ap-1767	122	26	of	of	ADP
ap-1767	122	27	various	various	ADJ
ap-1767	122	28	species	specie	NOUN
ap-1767	122	29	from	from	ADP
ap-1767	122	30	the	the	DET
ap-1767	122	31	ambient	ambient	ADJ
ap-1767	122	32	air	air	NOUN
ap-1767	122	33	atmosphere	atmosphere	NOUN
ap-1767	122	34	after	after	SCONJ
ap-1767	122	35	the	the	DET
ap-1767	122	36	film	film	NOUN
ap-1767	122	37	was	be	AUX
ap-1767	122	38	removed	remove	VERB
ap-1767	122	39	from	from	ADP
ap-1767	122	40	the	the	DET
ap-1767	122	41	reactor	reactor	NOUN
ap-1767	122	42	.	.	PUNCT
ap-1767	123	1	figure	figure	NOUN
ap-1767	123	2	8	8	NUM
ap-1767	123	3	.	.	PUNCT
ap-1767	124	1	c	c	NOUN
ap-1767	124	2	1s	1s	NUM
ap-1767	124	3	xps	xps	PROPN
ap-1767	124	4	spectrum	spectrum	NOUN
ap-1767	124	5	of	of	ADP
ap-1767	124	6	the	the	DET
ap-1767	124	7	film	film	NOUN
ap-1767	124	8	;	;	PUNCT
ap-1767	124	9	inlets	inlet	NOUN
ap-1767	124	10	c	c	NOUN
ap-1767	124	11	(	(	PUNCT
ap-1767	124	12	oxygen	oxygen	NOUN
ap-1767	124	13	,	,	PUNCT
ap-1767	124	14	2.5	2.5	NUM
ap-1767	124	15	slm	slm	NOUN
ap-1767	124	16	)	)	PUNCT
ap-1767	124	17	,	,	PUNCT
ap-1767	124	18	d	d	X
ap-1767	124	19	(	(	PUNCT
ap-1767	124	20	ttip	ttip	PROPN
ap-1767	124	21	/	/	SYM
ap-1767	124	22	ar	ar	NOUN
ap-1767	124	23	,	,	PUNCT
ap-1767	124	24	2	2	NUM
ap-1767	124	25	slm	slm	NOUN
ap-1767	124	26	)	)	PUNCT
ap-1767	124	27	.	.	PUNCT
ap-1767	125	1	figure	figure	NOUN
ap-1767	125	2	9	9	NUM
ap-1767	125	3	.	.	PUNCT
ap-1767	126	1	o	o	NOUN
ap-1767	126	2	1s	1s	NUM
ap-1767	126	3	xps	xps	PROPN
ap-1767	126	4	spectrum	spectrum	NOUN
ap-1767	126	5	of	of	ADP
ap-1767	126	6	the	the	DET
ap-1767	126	7	film	film	NOUN
ap-1767	126	8	;	;	PUNCT
ap-1767	126	9	inlets	inlet	NOUN
ap-1767	126	10	c	c	NOUN
ap-1767	126	11	(	(	PUNCT
ap-1767	126	12	oxygen	oxygen	NOUN
ap-1767	126	13	,	,	PUNCT
ap-1767	126	14	2.5	2.5	NUM
ap-1767	126	15	slm	slm	NOUN
ap-1767	126	16	)	)	PUNCT
ap-1767	126	17	,	,	PUNCT
ap-1767	127	1	d	d	X
ap-1767	127	2	(	(	PUNCT
ap-1767	127	3	ttip	ttip	PROPN
ap-1767	127	4	/	/	SYM
ap-1767	127	5	ar	ar	NOUN
ap-1767	127	6	,	,	PUNCT
ap-1767	127	7	2	2	NUM
ap-1767	127	8	slm	slm	NOUN
ap-1767	127	9	)	)	PUNCT
ap-1767	127	10	.	.	PUNCT
ap-1767	128	1	the	the	DET
ap-1767	128	2	carbon	carbon	NOUN
ap-1767	128	3	(	(	PUNCT
ap-1767	128	4	contamination	contamination	NOUN
ap-1767	128	5	)	)	PUNCT
ap-1767	128	6	is	be	AUX
ap-1767	128	7	partially	partially	ADV
ap-1767	128	8	bonded	bond	VERB
ap-1767	128	9	with	with	ADP
ap-1767	128	10	titanium	titanium	NOUN
ap-1767	128	11	(	(	PUNCT
ap-1767	128	12	the	the	DET
ap-1767	128	13	c−ti	c−ti	NOUN
ap-1767	128	14	bond	bond	NOUN
ap-1767	128	15	is	be	AUX
ap-1767	128	16	about	about	ADV
ap-1767	128	17	283	283	NUM
ap-1767	128	18	ev	ev	NOUN
ap-1767	128	19	)	)	PUNCT
ap-1767	128	20	.	.	PUNCT
ap-1767	129	1	carbon	carbon	NOUN
ap-1767	129	2	forms	form	NOUN
ap-1767	129	3	mostly	mostly	ADV
ap-1767	129	4	c−c	c−c	VERB
ap-1767	129	5	(	(	PUNCT
ap-1767	129	6	285	285	NUM
ap-1767	129	7	ev	ev	NOUN
ap-1767	129	8	)	)	PUNCT
ap-1767	129	9	backbone	backbone	NOUN
ap-1767	129	10	chains	chain	NOUN
ap-1767	129	11	,	,	PUNCT
ap-1767	129	12	some	some	PRON
ap-1767	129	13	of	of	ADP
ap-1767	129	14	which	which	PRON
ap-1767	129	15	are	be	AUX
ap-1767	129	16	partly	partly	ADV
ap-1767	129	17	oxidized	oxidize	VERB
ap-1767	129	18	(	(	PUNCT
ap-1767	129	19	fig	fig	NOUN
ap-1767	129	20	.	.	PUNCT
ap-1767	130	1	8)	8)	NUM
ap-1767	130	2	.	.	PUNCT
ap-1767	131	1	the	the	DET
ap-1767	131	2	o	o	PROPN
ap-1767	131	3	1s	1s	X
ap-1767	131	4	spectra	spectra	NOUN
ap-1767	131	5	are	be	AUX
ap-1767	131	6	shown	show	VERB
ap-1767	131	7	in	in	ADP
ap-1767	131	8	fig	fig	NOUN
ap-1767	131	9	.	.	PUNCT
ap-1767	132	1	9	9	X
ap-1767	132	2	.	.	X
ap-1767	132	3	note	note	NOUN
ap-1767	132	4	,	,	PUNCT
ap-1767	132	5	that	that	PRON
ap-1767	132	6	fwhm	fwhm	NOUN
ap-1767	132	7	(	(	PUNCT
ap-1767	132	8	full	full	ADJ
ap-1767	132	9	width	width	NOUN
ap-1767	132	10	at	at	ADP
ap-1767	132	11	half	half	NOUN
ap-1767	132	12	of	of	ADP
ap-1767	132	13	maximum	maximum	ADJ
ap-1767	132	14	)	)	PUNCT
ap-1767	132	15	is	be	AUX
ap-1767	132	16	more	more	ADJ
ap-1767	132	17	than	than	ADP
ap-1767	132	18	2	2	NUM
ap-1767	132	19	ev	ev	NOUN
ap-1767	132	20	.	.	PUNCT
ap-1767	133	1	this	this	DET
ap-1767	133	2	broadening	broadening	NOUN
ap-1767	133	3	is	be	AUX
ap-1767	133	4	evidently	evidently	ADV
ap-1767	133	5	caused	cause	VERB
ap-1767	133	6	by	by	ADP
ap-1767	133	7	substoichiometric	substoichiometric	ADJ
ap-1767	133	8	titanium	titanium	NOUN
ap-1767	133	9	oxides	oxide	NOUN
ap-1767	133	10	[	[	X
ap-1767	133	11	1	1	NUM
ap-1767	133	12	]	]	PUNCT
ap-1767	133	13	.	.	PUNCT
ap-1767	134	1	in	in	ADP
ap-1767	134	2	addition	addition	NOUN
ap-1767	134	3	,	,	PUNCT
ap-1767	134	4	the	the	DET
ap-1767	134	5	second	second	ADJ
ap-1767	134	6	peak	peak	NOUN
ap-1767	134	7	at	at	ADP
ap-1767	134	8	532.8	532.8	NUM
ap-1767	134	9	ev	ev	NOUN
ap-1767	134	10	can	can	AUX
ap-1767	134	11	be	be	AUX
ap-1767	134	12	considered	consider	VERB
ap-1767	134	13	as	as	ADP
ap-1767	134	14	a	a	DET
ap-1767	134	15	contribution	contribution	NOUN
ap-1767	134	16	from	from	ADP
ap-1767	134	17	single	single	ADJ
ap-1767	134	18	and	and	CCONJ
ap-1767	134	19	double	double	ADJ
ap-1767	134	20	oxygen	oxygen	NOUN
ap-1767	134	21	-	-	PUNCT
ap-1767	134	22	carbon	carbon	NOUN
ap-1767	134	23	bonds	bond	NOUN
ap-1767	134	24	[	[	X
ap-1767	134	25	9	9	NUM
ap-1767	134	26	]	]	PUNCT
ap-1767	134	27	.	.	PUNCT
ap-1767	135	1	titanium	titanium	NOUN
ap-1767	135	2	is	be	AUX
ap-1767	135	3	a	a	DET
ap-1767	135	4	reactive	reactive	ADJ
ap-1767	135	5	element	element	NOUN
ap-1767	135	6	and	and	CCONJ
ap-1767	135	7	easily	easily	ADV
ap-1767	135	8	forms	form	VERB
ap-1767	135	9	oxides	oxide	NOUN
ap-1767	135	10	and	and	CCONJ
ap-1767	135	11	carbides	carbide	NOUN
ap-1767	135	12	,	,	PUNCT
ap-1767	135	13	which	which	PRON
ap-1767	135	14	can	can	AUX
ap-1767	135	15	be	be	AUX
ap-1767	135	16	seen	see	VERB
ap-1767	135	17	in	in	ADP
ap-1767	135	18	the	the	DET
ap-1767	135	19	curve	curve	NOUN
ap-1767	135	20	of	of	ADP
ap-1767	135	21	ti	ti	NOUN
ap-1767	135	22	2p	2p	NUM
ap-1767	135	23	(	(	PUNCT
ap-1767	135	24	fig	fig	NOUN
ap-1767	135	25	.	.	PUNCT
ap-1767	135	26	10	10	NUM
ap-1767	135	27	)	)	PUNCT
ap-1767	135	28	.	.	PUNCT
ap-1767	136	1	the	the	DET
ap-1767	136	2	location	location	NOUN
ap-1767	136	3	of	of	ADP
ap-1767	136	4	the	the	DET
ap-1767	136	5	strongest	strong	ADJ
ap-1767	136	6	peaks	peak	NOUN
ap-1767	136	7	at	at	ADP
ap-1767	136	8	458.8	458.8	NUM
ap-1767	136	9	ev	ev	NOUN
ap-1767	136	10	and	and	CCONJ
ap-1767	136	11	465	465	NUM
ap-1767	136	12	ev	ev	NOUN
ap-1767	136	13	indicates	indicate	VERB
ap-1767	136	14	that	that	SCONJ
ap-1767	136	15	the	the	DET
ap-1767	136	16	main	main	ADJ
ap-1767	136	17	titanium	titanium	NOUN
ap-1767	136	18	species	species	NOUN
ap-1767	136	19	is	be	AUX
ap-1767	136	20	tio2	tio2	VERB
ap-1767	136	21	[	[	X
ap-1767	136	22	8	8	NUM
ap-1767	136	23	]	]	PUNCT
ap-1767	136	24	.	.	PUNCT
ap-1767	137	1	the	the	DET
ap-1767	137	2	small	small	ADJ
ap-1767	137	3	peaks	peak	NOUN
ap-1767	137	4	at	at	ADP
ap-1767	137	5	457	457	NUM
ap-1767	137	6	ev	ev	X
ap-1767	137	7	and	and	CCONJ
ap-1767	137	8	462.6	462.6	NUM
ap-1767	137	9	ev	ev	NOUN
ap-1767	137	10	indicate	indicate	VERB
ap-1767	137	11	mixed	mixed	ADJ
ap-1767	137	12	presence	presence	NOUN
ap-1767	137	13	of	of	ADP
ap-1767	137	14	substoichiometric	substoichiometric	ADJ
ap-1767	137	15	titanium	titanium	NOUN
ap-1767	137	16	oxides	oxide	NOUN
ap-1767	137	17	tixoy	tixoy	NOUN
ap-1767	137	18	and	and	CCONJ
ap-1767	137	19	titanium	titanium	NOUN
ap-1767	137	20	carbides	carbide	NOUN
ap-1767	137	21	tic	tic	ADJ
ap-1767	137	22	.	.	PUNCT
ap-1767	138	1	the	the	DET
ap-1767	138	2	xps	xps	PROPN
ap-1767	138	3	spectra	spectra	PROPN
ap-1767	138	4	demonstrate	demonstrate	VERB
ap-1767	138	5	that	that	SCONJ
ap-1767	138	6	the	the	DET
ap-1767	138	7	titanium	titanium	NOUN
ap-1767	138	8	in	in	ADP
ap-1767	138	9	the	the	DET
ap-1767	138	10	near	near	PROPN
ap-1767	138	11	surface	surface	NOUN
ap-1767	138	12	area	area	NOUN
ap-1767	138	13	is	be	AUX
ap-1767	138	14	strongly	strongly	ADV
ap-1767	138	15	oxidized	oxidize	VERB
ap-1767	138	16	,	,	PUNCT
ap-1767	138	17	the	the	DET
ap-1767	138	18	dominant	dominant	ADJ
ap-1767	138	19	species	specie	NOUN
ap-1767	138	20	being	be	AUX
ap-1767	138	21	tio2	tio2	NOUN
ap-1767	138	22	and	and	CCONJ
ap-1767	138	23	substoichiometric	substoichiometric	ADJ
ap-1767	138	24	titanium	titanium	NOUN
ap-1767	138	25	oxides	oxide	NOUN
ap-1767	138	26	.	.	PUNCT
ap-1767	139	1	the	the	DET
ap-1767	139	2	deposition	deposition	NOUN
ap-1767	139	3	process	process	NOUN
ap-1767	139	4	more	more	ADJ
ap-1767	139	5	226	226	NUM
ap-1767	139	6	vol	vol	NOUN
ap-1767	139	7	.	.	PUNCT
ap-1767	140	1	53	53	NUM
ap-1767	140	2	no	no	NOUN
ap-1767	140	3	.	.	PUNCT
ap-1767	141	1	2/2013	2/2013	NUM
ap-1767	141	2	positioning	positioning	NOUN
ap-1767	141	3	of	of	ADP
ap-1767	141	4	the	the	DET
ap-1767	141	5	precursor	precursor	NOUN
ap-1767	141	6	gas	gas	NOUN
ap-1767	141	7	inlet	inlet	NOUN
ap-1767	141	8	in	in	ADP
ap-1767	141	9	an	an	DET
ap-1767	141	10	atmospheric	atmospheric	ADJ
ap-1767	141	11	dielectric	dielectric	ADJ
ap-1767	141	12	barrier	barrier	NOUN
ap-1767	141	13	reactory	reactory	NOUN
ap-1767	141	14	figure	figure	NOUN
ap-1767	141	15	10	10	NUM
ap-1767	141	16	.	.	PUNCT
ap-1767	142	1	ti	ti	PROPN
ap-1767	142	2	2p	2p	NUM
ap-1767	142	3	xps	xps	PROPN
ap-1767	142	4	spectrum	spectrum	NOUN
ap-1767	142	5	of	of	ADP
ap-1767	142	6	the	the	DET
ap-1767	142	7	film	film	NOUN
ap-1767	142	8	;	;	PUNCT
ap-1767	142	9	inlets	inlet	NOUN
ap-1767	142	10	c	c	NOUN
ap-1767	142	11	(	(	PUNCT
ap-1767	142	12	oxygen	oxygen	NOUN
ap-1767	142	13	,	,	PUNCT
ap-1767	142	14	2.5	2.5	NUM
ap-1767	142	15	slm	slm	NOUN
ap-1767	142	16	)	)	PUNCT
ap-1767	142	17	,	,	PUNCT
ap-1767	143	1	d	d	X
ap-1767	143	2	(	(	PUNCT
ap-1767	143	3	ttip	ttip	PROPN
ap-1767	143	4	/	/	SYM
ap-1767	143	5	ar	ar	NOUN
ap-1767	143	6	,	,	PUNCT
ap-1767	143	7	2	2	NUM
ap-1767	143	8	slm	slm	NOUN
ap-1767	143	9	)	)	PUNCT
ap-1767	143	10	.	.	PUNCT
ap-1767	144	1	likely	likely	ADV
ap-1767	144	2	produced	produce	VERB
ap-1767	144	3	tioxcy	tioxcy	NOUN
ap-1767	144	4	films	film	NOUN
ap-1767	144	5	instead	instead	ADV
ap-1767	144	6	of	of	ADP
ap-1767	144	7	the	the	DET
ap-1767	144	8	primarily	primarily	ADV
ap-1767	144	9	desired	desire	VERB
ap-1767	144	10	tiox	tiox	NOUN
ap-1767	144	11	films	film	NOUN
ap-1767	144	12	.	.	PUNCT
ap-1767	145	1	for	for	SCONJ
ap-1767	145	2	more	more	ADJ
ap-1767	145	3	details	detail	NOUN
ap-1767	145	4	see	see	VERB
ap-1767	145	5	[	[	X
ap-1767	145	6	4	4	NUM
ap-1767	145	7	]	]	PUNCT
ap-1767	145	8	.	.	PUNCT
ap-1767	146	1	4	4	X
ap-1767	146	2	.	.	X
ap-1767	146	3	conclusion	conclusion	NOUN
ap-1767	146	4	film	film	NOUN
ap-1767	146	5	deposition	deposition	NOUN
ap-1767	146	6	on	on	ADP
ap-1767	146	7	glass	glass	NOUN
ap-1767	146	8	substrates	substrate	NOUN
ap-1767	146	9	was	be	AUX
ap-1767	146	10	performed	perform	VERB
ap-1767	146	11	by	by	ADP
ap-1767	146	12	the	the	DET
ap-1767	146	13	pecvd	pecvd	NOUN
ap-1767	146	14	method	method	NOUN
ap-1767	146	15	in	in	ADP
ap-1767	146	16	the	the	DET
ap-1767	146	17	adbd	adbd	ADJ
ap-1767	146	18	plasma	plasma	NOUN
ap-1767	146	19	reactor	reactor	NOUN
ap-1767	146	20	.	.	PUNCT
ap-1767	147	1	the	the	DET
ap-1767	147	2	plasma	plasma	NOUN
ap-1767	147	3	reactor	reactor	NOUN
ap-1767	147	4	was	be	AUX
ap-1767	147	5	an	an	DET
ap-1767	147	6	open	open	ADJ
ap-1767	147	7	flow	flow	NOUN
ap-1767	147	8	-	-	PUNCT
ap-1767	147	9	through	through	ADP
ap-1767	147	10	type	type	NOUN
ap-1767	147	11	.	.	PUNCT
ap-1767	148	1	adbd	adbd	PROPN
ap-1767	148	2	sustained	sustain	VERB
ap-1767	148	3	in	in	ADP
ap-1767	148	4	filamentary	filamentary	ADJ
ap-1767	148	5	mode	mode	NOUN
ap-1767	148	6	.	.	PUNCT
ap-1767	149	1	the	the	DET
ap-1767	149	2	reactor	reactor	NOUN
ap-1767	149	3	atmosphere	atmosphere	NOUN
ap-1767	149	4	consisted	consist	VERB
ap-1767	149	5	either	either	PRON
ap-1767	149	6	of	of	ADP
ap-1767	149	7	ttip	ttip	NOUN
ap-1767	149	8	/	/	SYM
ap-1767	149	9	ar	ar	NOUN
ap-1767	149	10	/	/	SYM
ap-1767	149	11	dry	dry	ADJ
ap-1767	149	12	air	air	NOUN
ap-1767	149	13	or	or	CCONJ
ap-1767	149	14	of	of	ADP
ap-1767	149	15	a	a	DET
ap-1767	149	16	ttip	ttip	NOUN
ap-1767	149	17	/	/	SYM
ap-1767	149	18	ar	ar	NOUN
ap-1767	149	19	/	/	SYM
ap-1767	149	20	oxygen	oxygen	NOUN
ap-1767	149	21	mixture	mixture	NOUN
ap-1767	149	22	.	.	PUNCT
ap-1767	150	1	we	we	PRON
ap-1767	150	2	studied	study	VERB
ap-1767	150	3	the	the	DET
ap-1767	150	4	quality	quality	NOUN
ap-1767	150	5	of	of	ADP
ap-1767	150	6	the	the	DET
ap-1767	150	7	deposited	deposit	VERB
ap-1767	150	8	tiox	tiox	NOUN
ap-1767	150	9	thin	thin	ADJ
ap-1767	150	10	film	film	NOUN
ap-1767	150	11	surface	surface	NOUN
ap-1767	150	12	for	for	ADP
ap-1767	150	13	various	various	ADJ
ap-1767	150	14	precursor	precursor	NOUN
ap-1767	150	15	gas	gas	NOUN
ap-1767	150	16	inlet	inlet	NOUN
ap-1767	150	17	positions	position	NOUN
ap-1767	150	18	in	in	ADP
ap-1767	150	19	the	the	DET
ap-1767	150	20	adbd	adbd	NOUN
ap-1767	150	21	reactor	reactor	NOUN
ap-1767	150	22	,	,	PUNCT
ap-1767	150	23	and	and	CCONJ
ap-1767	150	24	various	various	ADJ
ap-1767	150	25	precursor	precursor	NOUN
ap-1767	150	26	/	/	SYM
ap-1767	150	27	oxidizer	oxidizer	NOUN
ap-1767	150	28	mixture	mixture	NOUN
ap-1767	150	29	compositions	composition	NOUN
ap-1767	150	30	.	.	PUNCT
ap-1767	151	1	the	the	DET
ap-1767	151	2	best	good	ADJ
ap-1767	151	3	film	film	NOUN
ap-1767	151	4	quality	quality	NOUN
ap-1767	151	5	was	be	AUX
ap-1767	151	6	achieved	achieve	VERB
ap-1767	151	7	when	when	SCONJ
ap-1767	151	8	the	the	DET
ap-1767	151	9	precursor	precursor	NOUN
ap-1767	151	10	and	and	CCONJ
ap-1767	151	11	the	the	DET
ap-1767	151	12	oxydizer	oxydizer	NOUN
ap-1767	151	13	entered	enter	VERB
ap-1767	151	14	the	the	DET
ap-1767	151	15	discharge	discharge	NOUN
ap-1767	151	16	region	region	NOUN
ap-1767	151	17	instantly	instantly	ADV
ap-1767	151	18	after	after	SCONJ
ap-1767	151	19	they	they	PRON
ap-1767	151	20	were	be	AUX
ap-1767	151	21	mixed	mix	VERB
ap-1767	151	22	,	,	PUNCT
ap-1767	151	23	through	through	ADP
ap-1767	151	24	the	the	DET
ap-1767	151	25	hole	hole	NOUN
ap-1767	151	26	adjacent	adjacent	ADJ
ap-1767	151	27	to	to	ADP
ap-1767	151	28	the	the	DET
ap-1767	151	29	substrate	substrate	NOUN
ap-1767	151	30	.	.	PUNCT
ap-1767	152	1	the	the	DET
ap-1767	152	2	surface	surface	NOUN
ap-1767	152	3	topography	topography	NOUN
ap-1767	152	4	was	be	AUX
ap-1767	152	5	influenced	influence	VERB
ap-1767	152	6	by	by	ADP
ap-1767	152	7	the	the	DET
ap-1767	152	8	nonequilibrium	nonequilibrium	NOUN
ap-1767	152	9	character	character	NOUN
ap-1767	152	10	of	of	ADP
ap-1767	152	11	adbd	adbd	NOUN
ap-1767	152	12	,	,	PUNCT
ap-1767	152	13	leading	lead	VERB
ap-1767	152	14	to	to	ADP
ap-1767	152	15	the	the	DET
ap-1767	152	16	irregularly	irregularly	ADV
ap-1767	152	17	corrugated	corrugate	VERB
ap-1767	152	18	and	and	CCONJ
ap-1767	152	19	hummocky	hummocky	ADJ
ap-1767	152	20	surface	surface	NOUN
ap-1767	152	21	of	of	ADP
ap-1767	152	22	the	the	DET
ap-1767	152	23	film	film	NOUN
ap-1767	152	24	.	.	PUNCT
ap-1767	153	1	ca	can	AUX
ap-1767	153	2	tests	test	NOUN
ap-1767	153	3	proved	prove	VERB
ap-1767	153	4	the	the	DET
ap-1767	153	5	high	high	ADJ
ap-1767	153	6	hydrophilicity	hydrophilicity	NOUN
ap-1767	153	7	of	of	ADP
ap-1767	153	8	the	the	DET
ap-1767	153	9	samples	sample	NOUN
ap-1767	153	10	immediately	immediately	ADV
ap-1767	153	11	after	after	ADP
ap-1767	153	12	deposition	deposition	NOUN
ap-1767	153	13	.	.	PUNCT
ap-1767	154	1	later	later	ADV
ap-1767	154	2	,	,	PUNCT
ap-1767	154	3	the	the	DET
ap-1767	154	4	wettability	wettability	NOUN
ap-1767	154	5	of	of	ADP
ap-1767	154	6	the	the	DET
ap-1767	154	7	films	film	NOUN
ap-1767	154	8	diminished	diminish	VERB
ap-1767	154	9	,	,	PUNCT
ap-1767	154	10	and	and	CCONJ
ap-1767	154	11	the	the	DET
ap-1767	154	12	ca	ca	NOUN
ap-1767	154	13	value	value	NOUN
ap-1767	154	14	of	of	ADP
ap-1767	154	15	all	all	DET
ap-1767	154	16	samples	sample	NOUN
ap-1767	154	17	exceeded	exceed	VERB
ap-1767	154	18	40	40	NUM
ap-1767	154	19	degrees	degree	NOUN
ap-1767	154	20	after	after	ADP
ap-1767	154	21	28	28	NUM
ap-1767	154	22	days	day	NOUN
ap-1767	154	23	;	;	PUNCT
ap-1767	154	24	the	the	DET
ap-1767	154	25	changes	change	NOUN
ap-1767	154	26	were	be	AUX
ap-1767	154	27	probably	probably	ADV
ap-1767	154	28	related	relate	VERB
ap-1767	154	29	with	with	ADP
ap-1767	154	30	chemical	chemical	ADJ
ap-1767	154	31	reactions	reaction	NOUN
ap-1767	154	32	between	between	ADP
ap-1767	154	33	the	the	DET
ap-1767	154	34	surface	surface	NOUN
ap-1767	154	35	of	of	ADP
ap-1767	154	36	the	the	DET
ap-1767	154	37	film	film	NOUN
ap-1767	154	38	and	and	CCONJ
ap-1767	154	39	the	the	DET
ap-1767	154	40	chemical	chemical	NOUN
ap-1767	154	41	groups	group	NOUN
ap-1767	154	42	involved	involve	VERB
ap-1767	154	43	in	in	ADP
ap-1767	154	44	the	the	DET
ap-1767	154	45	air	air	NOUN
ap-1767	154	46	atmosphere	atmosphere	NOUN
ap-1767	154	47	.	.	PUNCT
ap-1767	155	1	xps	xps	PROPN
ap-1767	155	2	tests	test	NOUN
ap-1767	155	3	indicate	indicate	VERB
ap-1767	155	4	that	that	SCONJ
ap-1767	155	5	the	the	DET
ap-1767	155	6	deposition	deposition	NOUN
ap-1767	155	7	process	process	NOUN
ap-1767	155	8	more	more	ADV
ap-1767	155	9	likely	likely	ADV
ap-1767	155	10	produced	produce	VERB
ap-1767	155	11	tioxcy	tioxcy	NOUN
ap-1767	155	12	films	film	NOUN
ap-1767	155	13	instead	instead	ADV
ap-1767	155	14	of	of	ADP
ap-1767	155	15	the	the	DET
ap-1767	155	16	primarily	primarily	ADV
ap-1767	155	17	desired	desire	VERB
ap-1767	155	18	tio2	tio2	NOUN
ap-1767	155	19	or	or	CCONJ
ap-1767	155	20	tiox	tiox	NOUN
ap-1767	155	21	films	film	NOUN
ap-1767	155	22	.	.	PUNCT
ap-1767	156	1	all	all	DET
ap-1767	156	2	samples	sample	NOUN
ap-1767	156	3	exhibit	exhibit	VERB
ap-1767	156	4	contamination	contamination	NOUN
ap-1767	156	5	with	with	ADP
ap-1767	156	6	carbon	carbon	NOUN
ap-1767	156	7	,	,	PUNCT
ap-1767	156	8	probably	probably	ADV
ap-1767	156	9	caused	cause	VERB
ap-1767	156	10	by	by	ADP
ap-1767	156	11	postdischarge	postdischarge	ADJ
ap-1767	156	12	reactions	reaction	NOUN
ap-1767	156	13	and	and	CCONJ
ap-1767	156	14	by	by	ADP
ap-1767	156	15	adsorption	adsorption	NOUN
ap-1767	156	16	of	of	ADP
ap-1767	156	17	various	various	ADJ
ap-1767	156	18	species	specie	NOUN
ap-1767	156	19	from	from	ADP
ap-1767	156	20	the	the	DET
ap-1767	156	21	ambient	ambient	ADJ
ap-1767	156	22	air	air	NOUN
ap-1767	156	23	atmosphere	atmosphere	NOUN
ap-1767	156	24	after	after	SCONJ
ap-1767	156	25	the	the	DET
ap-1767	156	26	film	film	NOUN
ap-1767	156	27	was	be	AUX
ap-1767	156	28	removed	remove	VERB
ap-1767	156	29	from	from	ADP
ap-1767	156	30	the	the	DET
ap-1767	156	31	reactor	reactor	NOUN
ap-1767	156	32	.	.	PUNCT
ap-1767	157	1	some	some	DET
ap-1767	157	2	problems	problem	NOUN
ap-1767	157	3	of	of	ADP
ap-1767	157	4	this	this	DET
ap-1767	157	5	deposition	deposition	NOUN
ap-1767	157	6	method	method	NOUN
ap-1767	157	7	are	be	AUX
ap-1767	157	8	related	relate	VERB
ap-1767	157	9	with	with	ADP
ap-1767	157	10	two	two	NUM
ap-1767	157	11	different	different	ADJ
ap-1767	157	12	chemical	chemical	NOUN
ap-1767	157	13	processes	process	NOUN
ap-1767	157	14	that	that	PRON
ap-1767	157	15	take	take	VERB
ap-1767	157	16	place	place	NOUN
ap-1767	157	17	during	during	ADP
ap-1767	157	18	deposition	deposition	NOUN
ap-1767	157	19	:	:	PUNCT
ap-1767	157	20	surface	surface	NOUN
ap-1767	157	21	-	-	PUNCT
ap-1767	157	22	related	relate	VERB
ap-1767	157	23	chemical	chemical	NOUN
ap-1767	157	24	processes	process	NOUN
ap-1767	157	25	resulting	result	VERB
ap-1767	157	26	in	in	ADP
ap-1767	157	27	conventional	conventional	ADJ
ap-1767	157	28	pecvd	pecvd	NOUN
ap-1767	157	29	film	film	NOUN
ap-1767	157	30	deposition	deposition	NOUN
ap-1767	157	31	,	,	PUNCT
ap-1767	157	32	and	and	CCONJ
ap-1767	157	33	undesired	undesired	ADJ
ap-1767	157	34	volume	volume	NOUN
ap-1767	157	35	-	-	PUNCT
ap-1767	157	36	related	relate	VERB
ap-1767	157	37	chemical	chemical	NOUN
ap-1767	157	38	processes	process	NOUN
ap-1767	157	39	resulting	result	VERB
ap-1767	157	40	in	in	ADP
ap-1767	157	41	dust	dust	NOUN
ap-1767	157	42	production	production	NOUN
ap-1767	157	43	.	.	PUNCT
ap-1767	158	1	the	the	DET
ap-1767	158	2	dust	dust	NOUN
ap-1767	158	3	-	-	PUNCT
ap-1767	158	4	producing	produce	VERB
ap-1767	158	5	mechanism	mechanism	NOUN
ap-1767	158	6	prevails	prevail	VERB
ap-1767	158	7	under	under	ADP
ap-1767	158	8	certain	certain	ADJ
ap-1767	158	9	working	work	VERB
ap-1767	158	10	conditions	condition	NOUN
ap-1767	158	11	(	(	PUNCT
ap-1767	158	12	e.g.	e.g.	ADV
ap-1767	158	13	higher	high	ADJ
ap-1767	158	14	oxygen	oxygen	NOUN
ap-1767	158	15	flow	flow	NOUN
ap-1767	158	16	rate	rate	NOUN
ap-1767	158	17	values	value	NOUN
ap-1767	158	18	)	)	PUNCT
ap-1767	158	19	.	.	PUNCT
ap-1767	159	1	dust	dust	NOUN
ap-1767	159	2	particles	particle	NOUN
ap-1767	159	3	,	,	PUNCT
ap-1767	159	4	when	when	SCONJ
ap-1767	159	5	created	create	VERB
ap-1767	159	6	,	,	PUNCT
ap-1767	159	7	remain	remain	VERB
ap-1767	159	8	in	in	ADP
ap-1767	159	9	the	the	DET
ap-1767	159	10	discharge	discharge	NOUN
ap-1767	159	11	region	region	NOUN
ap-1767	159	12	and	and	CCONJ
ap-1767	159	13	their	their	PRON
ap-1767	159	14	layer(s	layer(s	NOUN
ap-1767	159	15	)	)	PUNCT
ap-1767	159	16	on	on	ADP
ap-1767	159	17	the	the	DET
ap-1767	159	18	substrate	substrate	NOUN
ap-1767	159	19	hinder	hinder	VERB
ap-1767	159	20	the	the	DET
ap-1767	159	21	effective	effective	ADJ
ap-1767	159	22	formation	formation	NOUN
ap-1767	159	23	of	of	ADP
ap-1767	159	24	a	a	DET
ap-1767	159	25	more	more	ADV
ap-1767	159	26	homogeneous	homogeneous	ADJ
ap-1767	159	27	film	film	NOUN
ap-1767	159	28	,	,	PUNCT
ap-1767	159	29	and	and	CCONJ
ap-1767	159	30	influence	influence	VERB
ap-1767	159	31	the	the	DET
ap-1767	159	32	quality	quality	NOUN
ap-1767	159	33	of	of	ADP
ap-1767	159	34	the	the	DET
ap-1767	159	35	film	film	NOUN
ap-1767	159	36	.	.	PUNCT
ap-1767	160	1	another	another	DET
ap-1767	160	2	problem	problem	NOUN
ap-1767	160	3	of	of	ADP
ap-1767	160	4	pecvd	pecvd	NOUN
ap-1767	160	5	thin	thin	ADJ
ap-1767	160	6	film	film	NOUN
ap-1767	160	7	deposition	deposition	NOUN
ap-1767	160	8	with	with	ADP
ap-1767	160	9	adbd	adbd	NOUN
ap-1767	160	10	seems	seem	VERB
ap-1767	160	11	to	to	PART
ap-1767	160	12	be	be	AUX
ap-1767	160	13	with	with	ADP
ap-1767	160	14	the	the	DET
ap-1767	160	15	filamentary	filamentary	ADJ
ap-1767	160	16	character	character	NOUN
ap-1767	160	17	of	of	ADP
ap-1767	160	18	the	the	DET
ap-1767	160	19	adbd	adbd	NOUN
ap-1767	160	20	in	in	ADP
ap-1767	160	21	some	some	DET
ap-1767	160	22	applications	application	NOUN
ap-1767	160	23	,	,	PUNCT
ap-1767	160	24	leading	lead	VERB
ap-1767	160	25	to	to	ADP
ap-1767	160	26	generation	generation	NOUN
ap-1767	160	27	of	of	ADP
ap-1767	160	28	hummocks	hummock	NOUN
ap-1767	160	29	that	that	PRON
ap-1767	160	30	form	form	VERB
ap-1767	160	31	a	a	DET
ap-1767	160	32	rough	rough	ADJ
ap-1767	160	33	surface	surface	NOUN
ap-1767	160	34	of	of	ADP
ap-1767	160	35	the	the	DET
ap-1767	160	36	films	film	NOUN
ap-1767	160	37	.	.	PUNCT
ap-1767	161	1	acknowledgements	acknowledgement	NOUN
ap-1767	161	2	this	this	DET
ap-1767	161	3	work	work	NOUN
ap-1767	161	4	was	be	AUX
ap-1767	161	5	supported	support	VERB
ap-1767	161	6	by	by	ADP
ap-1767	161	7	czech	czech	PROPN
ap-1767	161	8	technical	technical	PROPN
ap-1767	161	9	university	university	PROPN
ap-1767	161	10	in	in	ADP
ap-1767	161	11	prague	prague	PROPN
ap-1767	161	12	grant	grant	VERB
ap-1767	161	13	no	no	INTJ
ap-1767	161	14	.	.	PUNCT
ap-1767	162	1	sgs10/266	sgs10/266	NOUN
ap-1767	162	2	/	/	SYM
ap-1767	162	3	ohk3/3t/13	ohk3/3t/13	ADJ
ap-1767	162	4	.	.	PUNCT
ap-1767	163	1	references	reference	NOUN
ap-1767	163	2	[	[	X
ap-1767	163	3	1	1	NUM
ap-1767	163	4	]	]	PUNCT
ap-1767	163	5	i.	i.	PROPN
ap-1767	163	6	bertoti	bertoti	PROPN
ap-1767	163	7	,	,	PUNCT
ap-1767	163	8	m.	m.	NOUN
ap-1767	163	9	mohai	mohai	NOUN
ap-1767	163	10	,	,	PUNCT
ap-1767	163	11	j.	j.	PROPN
ap-1767	163	12	l.	l.	PROPN
ap-1767	163	13	sullivan	sullivan	PROPN
ap-1767	163	14	,	,	PUNCT
ap-1767	163	15	s.	s.	PROPN
ap-1767	163	16	o.	o.	PROPN
ap-1767	163	17	saied	saie	VERB
ap-1767	163	18	.	.	PUNCT
ap-1767	164	1	surface	surface	NOUN
ap-1767	164	2	characterisation	characterisation	NOUN
ap-1767	164	3	of	of	ADP
ap-1767	164	4	plasma	plasma	NOUN
ap-1767	164	5	-	-	PUNCT
ap-1767	164	6	nitrided	nitride	VERB
ap-1767	164	7	titanium	titanium	NOUN
ap-1767	164	8	:	:	PUNCT
ap-1767	164	9	an	an	DET
ap-1767	164	10	xps	xps	PROPN
ap-1767	164	11	study	study	PROPN
ap-1767	164	12	.	.	PUNCT
ap-1767	165	1	appl	appl	PROPN
ap-1767	165	2	surf	surf	PROPN
ap-1767	165	3	sci	sci	PROPN
ap-1767	165	4	84:357–371	84:357–371	PROPN
ap-1767	165	5	,	,	PUNCT
ap-1767	165	6	1995	1995	NUM
ap-1767	165	7	.	.	PUNCT
ap-1767	166	1	[	[	X
ap-1767	166	2	2	2	NUM
ap-1767	166	3	]	]	X
ap-1767	166	4	lan	lan	PROPN
ap-1767	166	5	-	-	PUNCT
ap-1767	166	6	bo	bo	PROPN
ap-1767	166	7	di	di	PROPN
ap-1767	166	8	,	,	PUNCT
ap-1767	166	9	xiao	xiao	PROPN
ap-1767	166	10	-	-	PUNCT
ap-1767	166	11	song	song	PROPN
ap-1767	166	12	li	li	PROPN
ap-1767	166	13	,	,	PUNCT
ap-1767	166	14	chuan	chuan	PROPN
ap-1767	166	15	shi	shi	PROPN
ap-1767	166	16	,	,	PUNCT
ap-1767	166	17	et	et	PROPN
ap-1767	166	18	al	al	PROPN
ap-1767	166	19	.	.	PUNCT
ap-1767	166	20	atmospheric	atmospheric	ADJ
ap-1767	166	21	-	-	PUNCT
ap-1767	166	22	pressure	pressure	NOUN
ap-1767	166	23	plasma	plasma	NOUN
ap-1767	166	24	cvd	cvd	PROPN
ap-1767	166	25	of	of	ADP
ap-1767	166	26	tio2	tio2	PROPN
ap-1767	166	27	photocatalytic	photocatalytic	ADJ
ap-1767	166	28	films	film	NOUN
ap-1767	166	29	using	use	VERB
ap-1767	166	30	surface	surface	NOUN
ap-1767	166	31	dielectric	dielectric	ADJ
ap-1767	166	32	barrier	barrier	NOUN
ap-1767	166	33	discharge	discharge	NOUN
ap-1767	166	34	.	.	PUNCT
ap-1767	167	1	j	j	PROPN
ap-1767	167	2	physd	physd	PROPN
ap-1767	167	3	:	:	PUNCT
ap-1767	167	4	applied	apply	VERB
ap-1767	167	5	physics	physics	NOUN
ap-1767	167	6	42:032001	42:032001	PROPN
ap-1767	167	7	,	,	PUNCT
ap-1767	167	8	2009	2009	NUM
ap-1767	167	9	.	.	PUNCT
ap-1767	168	1	[	[	X
ap-1767	168	2	3	3	X
ap-1767	168	3	]	]	X
ap-1767	168	4	y.	y.	PROPN
ap-1767	168	5	klenko	klenko	PROPN
ap-1767	168	6	,	,	PUNCT
ap-1767	168	7	j.	j.	PROPN
ap-1767	168	8	pichal	pichal	PROPN
ap-1767	168	9	.	.	PUNCT
ap-1767	169	1	deposition	deposition	NOUN
ap-1767	169	2	of	of	ADP
ap-1767	169	3	tio2	tio2	NOUN
ap-1767	169	4	thin	thin	ADJ
ap-1767	169	5	films	film	NOUN
ap-1767	169	6	using	use	VERB
ap-1767	169	7	atmospheric	atmospheric	ADJ
ap-1767	169	8	dielectric	dielectric	ADJ
ap-1767	169	9	barrier	barrier	NOUN
ap-1767	169	10	discharge	discharge	NOUN
ap-1767	169	11	.	.	PUNCT
ap-1767	170	1	problems	problem	NOUN
ap-1767	170	2	of	of	ADP
ap-1767	170	3	atomic	atomic	ADJ
ap-1767	170	4	science	science	NOUN
ap-1767	170	5	and	and	CCONJ
ap-1767	170	6	technology	technology	NOUN
ap-1767	170	7	series	series	NOUN
ap-1767	170	8	:	:	PUNCT
ap-1767	170	9	plasma	plasma	NOUN
ap-1767	170	10	physics	physics	PROPN
ap-1767	170	11	48:177–179	48:177–179	PROPN
ap-1767	170	12	,	,	PUNCT
ap-1767	170	13	2008	2008	NUM
ap-1767	170	14	.	.	PUNCT
ap-1767	171	1	[	[	X
ap-1767	171	2	4	4	NUM
ap-1767	171	3	]	]	X
ap-1767	171	4	y.	y.	PROPN
ap-1767	171	5	klenko	klenko	PROPN
ap-1767	171	6	,	,	PUNCT
ap-1767	171	7	j.	j.	PROPN
ap-1767	171	8	pichal	pichal	PROPN
ap-1767	171	9	.	.	PUNCT
ap-1767	172	1	tiox	tiox	NOUN
ap-1767	172	2	films	film	NOUN
ap-1767	172	3	deposited	deposit	VERB
ap-1767	172	4	by	by	ADP
ap-1767	172	5	plasma	plasma	NOUN
ap-1767	172	6	enhanced	enhance	VERB
ap-1767	172	7	chemical	chemical	NOUN
ap-1767	172	8	vapour	vapour	NOUN
ap-1767	172	9	deposition	deposition	NOUN
ap-1767	172	10	method	method	NOUN
ap-1767	172	11	in	in	ADP
ap-1767	172	12	atmospheric	atmospheric	ADJ
ap-1767	172	13	dielectric	dielectric	ADJ
ap-1767	172	14	barrier	barrier	NOUN
ap-1767	172	15	discharge	discharge	NOUN
ap-1767	172	16	plasma	plasma	NOUN
ap-1767	172	17	.	.	PUNCT
ap-1767	173	1	plasma	plasma	NOUN
ap-1767	173	2	chemistry	chemistry	NOUN
ap-1767	173	3	and	and	CCONJ
ap-1767	173	4	plasma	plasma	NOUN
ap-1767	173	5	processing	processing	NOUN
ap-1767	173	6	32:1215–1225	32:1215–1225	NUM
ap-1767	173	7	,	,	PUNCT
ap-1767	173	8	2012	2012	NUM
ap-1767	173	9	.	.	PUNCT
ap-1767	174	1	[	[	X
ap-1767	174	2	5	5	X
ap-1767	174	3	]	]	X
ap-1767	174	4	u.	u.	PROPN
ap-1767	174	5	kogelschatz	kogelschatz	PROPN
ap-1767	174	6	.	.	PUNCT
ap-1767	175	1	dielectric	dielectric	ADJ
ap-1767	175	2	-	-	PUNCT
ap-1767	175	3	barrier	barrier	NOUN
ap-1767	175	4	discharges	discharge	NOUN
ap-1767	175	5	:	:	PUNCT
ap-1767	175	6	their	their	PRON
ap-1767	175	7	history	history	NOUN
ap-1767	175	8	,	,	PUNCT
ap-1767	175	9	discharge	discharge	NOUN
ap-1767	175	10	physics	physics	NOUN
ap-1767	175	11	and	and	CCONJ
ap-1767	175	12	industrial	industrial	ADJ
ap-1767	175	13	applications	application	NOUN
ap-1767	175	14	.	.	PUNCT
ap-1767	176	1	plasma	plasma	NOUN
ap-1767	176	2	chemistry	chemistry	NOUN
ap-1767	176	3	and	and	CCONJ
ap-1767	176	4	plasma	plasma	NOUN
ap-1767	176	5	processing	processing	NOUN
ap-1767	176	6	23:1–46	23:1–46	NUM
ap-1767	176	7	,	,	PUNCT
ap-1767	176	8	2003	2003	NUM
ap-1767	176	9	.	.	PUNCT
ap-1767	177	1	[	[	X
ap-1767	177	2	6	6	NUM
ap-1767	177	3	]	]	SYM
ap-1767	177	4	seshan	seshan	ADJ
ap-1767	177	5	krishna	krishna	PROPN
ap-1767	177	6	(	(	PUNCT
ap-1767	177	7	ed	ed	NOUN
ap-1767	177	8	.	.	PUNCT
ap-1767	177	9	)	)	PUNCT
ap-1767	177	10	.	.	PUNCT
ap-1767	178	1	handbook	handbook	NOUN
ap-1767	178	2	of	of	ADP
ap-1767	178	3	thin	thin	ADJ
ap-1767	178	4	-	-	PUNCT
ap-1767	178	5	film	film	NOUN
ap-1767	178	6	deposition	deposition	NOUN
ap-1767	178	7	.	.	PUNCT
ap-1767	179	1	elsevier	elsevier	NOUN
ap-1767	179	2	,	,	PUNCT
ap-1767	179	3	oxford	oxford	PROPN
ap-1767	179	4	,	,	PUNCT
ap-1767	179	5	2012	2012	NUM
ap-1767	179	6	.	.	PUNCT
ap-1767	180	1	[	[	X
ap-1767	180	2	7	7	X
ap-1767	180	3	]	]	X
ap-1767	180	4	d.	d.	PROPN
ap-1767	180	5	m.	m.	PROPN
ap-1767	180	6	mattox	mattox	PROPN
ap-1767	180	7	.	.	PROPN
ap-1767	181	1	handbook	handbook	PROPN
ap-1767	181	2	of	of	ADP
ap-1767	181	3	physical	physical	ADJ
ap-1767	181	4	vapor	vapor	NOUN
ap-1767	181	5	deposition	deposition	NOUN
ap-1767	181	6	(	(	PUNCT
ap-1767	181	7	pvd	pvd	NOUN
ap-1767	181	8	)	)	PUNCT
ap-1767	181	9	processing	processing	NOUN
ap-1767	181	10	.	.	PUNCT
ap-1767	182	1	elsevier	elsevier	NOUN
ap-1767	182	2	(	(	PUNCT
ap-1767	182	3	william	william	PROPN
ap-1767	182	4	andrew	andrew	PROPN
ap-1767	182	5	)	)	PUNCT
ap-1767	182	6	,	,	PUNCT
ap-1767	182	7	oxford	oxford	PROPN
ap-1767	182	8	,	,	PUNCT
ap-1767	182	9	2010	2010	NUM
ap-1767	182	10	.	.	PUNCT
ap-1767	183	1	[	[	X
ap-1767	183	2	8	8	X
ap-1767	183	3	]	]	PUNCT
ap-1767	183	4	s.	s.	PROPN
ap-1767	183	5	w.	w.	PROPN
ap-1767	183	6	ryu	ryu	PROPN
ap-1767	183	7	,	,	PUNCT
ap-1767	183	8	e.	e.	PROPN
ap-1767	183	9	j.	j.	PROPN
ap-1767	183	10	kim	kim	PROPN
ap-1767	183	11	,	,	PUNCT
ap-1767	183	12	s.	s.	PROPN
ap-1767	183	13	k.	k.	PROPN
ap-1767	183	14	ko	ko	PROPN
ap-1767	183	15	,	,	PUNCT
ap-1767	183	16	s.	s.	PROPN
ap-1767	183	17	h.	h.	PROPN
ap-1767	183	18	hahn	hahn	PROPN
ap-1767	183	19	.	.	PUNCT
ap-1767	184	1	effect	effect	NOUN
ap-1767	184	2	of	of	ADP
ap-1767	184	3	calcination	calcination	NOUN
ap-1767	184	4	on	on	ADP
ap-1767	184	5	the	the	DET
ap-1767	184	6	structural	structural	ADJ
ap-1767	184	7	and	and	CCONJ
ap-1767	184	8	optical	optical	ADJ
ap-1767	184	9	properties	property	NOUN
ap-1767	184	10	of	of	ADP
ap-1767	184	11	m	m	NOUN
ap-1767	184	12	/	/	SYM
ap-1767	184	13	tio2	tio2	VERB
ap-1767	184	14	thin	thin	ADJ
ap-1767	184	15	films	film	NOUN
ap-1767	184	16	by	by	ADP
ap-1767	184	17	rf	rf	NOUN
ap-1767	184	18	magnetron	magnetron	ADJ
ap-1767	184	19	co	co	NOUN
ap-1767	184	20	-	-	ADJ
ap-1767	184	21	sputtering	sputtering	ADJ
ap-1767	184	22	.	.	PUNCT
ap-1767	185	1	materials	material	NOUN
ap-1767	185	2	letters	letter	NOUN
ap-1767	185	3	58:582–587	58:582–587	NUM
ap-1767	185	4	,	,	PUNCT
ap-1767	185	5	2004	2004	NUM
ap-1767	185	6	.	.	PUNCT
ap-1767	186	1	[	[	X
ap-1767	186	2	9	9	NUM
ap-1767	186	3	]	]	X
ap-1767	186	4	t.	t.	PROPN
ap-1767	186	5	solomun	solomun	PROPN
ap-1767	186	6	,	,	PUNCT
ap-1767	186	7	a.	a.	NOUN
ap-1767	186	8	schimanski	schimanski	PROPN
ap-1767	186	9	,	,	PUNCT
ap-1767	186	10	h.	h.	PROPN
ap-1767	186	11	sturm	sturm	PROPN
ap-1767	186	12	,	,	PUNCT
ap-1767	186	13	e.	e.	PROPN
ap-1767	186	14	illenberger	illenberger	PROPN
ap-1767	186	15	.	.	PUNCT
ap-1767	187	1	reactions	reaction	NOUN
ap-1767	187	2	of	of	ADP
ap-1767	187	3	amide	amide	NOUN
ap-1767	187	4	group	group	NOUN
ap-1767	187	5	with	with	ADP
ap-1767	187	6	fluorine	fluorine	NOUN
ap-1767	187	7	as	as	SCONJ
ap-1767	187	8	revealed	reveal	VERB
ap-1767	187	9	with	with	ADP
ap-1767	187	10	surface	surface	NOUN
ap-1767	187	11	analytics	analytic	NOUN
ap-1767	187	12	.	.	PUNCT
ap-1767	188	1	chemical	chemical	PROPN
ap-1767	188	2	physics	physics	PROPN
ap-1767	188	3	letters	letter	NOUN
ap-1767	188	4	387:312–316	387:312–316	NUM
ap-1767	188	5	,	,	PUNCT
ap-1767	188	6	2004	2004	NUM
ap-1767	188	7	.	.	PUNCT
ap-1767	189	1	[	[	X
ap-1767	189	2	10	10	NUM
ap-1767	189	3	]	]	PUNCT
ap-1767	189	4	x.	x.	PROPN
ap-1767	189	5	w.	w.	PROPN
ap-1767	189	6	zhang	zhang	PROPN
ap-1767	189	7	,	,	PUNCT
ap-1767	189	8	g.	g.	PROPN
ap-1767	189	9	r.	r.	PROPN
ap-1767	189	10	han	han	PROPN
ap-1767	189	11	.	.	PROPN
ap-1767	190	1	microporous	microporous	ADJ
ap-1767	190	2	textured	texture	VERB
ap-1767	190	3	titanium	titanium	NOUN
ap-1767	190	4	dioxide	dioxide	NOUN
ap-1767	190	5	films	film	NOUN
ap-1767	190	6	deposited	deposit	VERB
ap-1767	190	7	at	at	ADP
ap-1767	190	8	atmospheric	atmospheric	ADJ
ap-1767	190	9	pressure	pressure	NOUN
ap-1767	190	10	using	use	VERB
ap-1767	190	11	dielectric	dielectric	ADJ
ap-1767	190	12	barrier	barrier	NOUN
ap-1767	190	13	discharge	discharge	VERB
ap-1767	190	14	assisted	assist	VERB
ap-1767	190	15	chemical	chemical	NOUN
ap-1767	190	16	vapor	vapor	NOUN
ap-1767	190	17	deposition	deposition	NOUN
ap-1767	190	18	.	.	PUNCT
ap-1767	191	1	thin	thin	ADJ
ap-1767	191	2	solid	solid	ADJ
ap-1767	191	3	films	film	NOUN
ap-1767	191	4	516:6140–6144	516:6140–6144	NUM
ap-1767	191	5	,	,	PUNCT
ap-1767	191	6	2008	2008	NUM
ap-1767	191	7	.	.	PUNCT
ap-1767	192	1	227	227	NUM
ap-1767	192	2	acta	acta	PROPN
ap-1767	192	3	polytechnica	polytechnica	PROPN
ap-1767	192	4	53(2):223–227	53(2):223–227	PROPN
ap-1767	192	5	,	,	PUNCT
ap-1767	192	6	2013	2013	NUM
ap-1767	192	7	1	1	NUM
ap-1767	192	8	introduction	introduction	NOUN
ap-1767	192	9	2	2	NUM
ap-1767	192	10	experimental	experimental	ADJ
ap-1767	192	11	2.1	2.1	NUM
ap-1767	192	12	the	the	DET
ap-1767	192	13	reactor	reactor	NOUN
ap-1767	192	14	and	and	CCONJ
ap-1767	192	15	the	the	DET
ap-1767	192	16	experimental	experimental	ADJ
ap-1767	192	17	conditions	condition	NOUN
ap-1767	192	18	2.2	2.2	NUM
ap-1767	192	19	film	film	NOUN
ap-1767	192	20	analysis	analysis	NOUN
ap-1767	192	21	3	3	NUM
ap-1767	192	22	results	result	VERB
ap-1767	192	23	4	4	NUM
ap-1767	192	24	conclusion	conclusion	NOUN
ap-1767	192	25	acknowledgements	acknowledgement	NOUN
ap-1767	192	26	references	reference	NOUN