id	sid	tid	token	lemma	pos
ap-2147	1	1	acta	acta	PROPN
ap-2147	1	2	polytechnica	polytechnica	PROPN
ap-2147	1	3	doi:10.14311	doi:10.14311	PROPN
ap-2147	1	4	/	/	SYM
ap-2147	1	5	ap.2014.54.0320	ap.2014.54.0320	PROPN
ap-2147	1	6	acta	acta	PROPN
ap-2147	1	7	polytechnica	polytechnica	PROPN
ap-2147	1	8	54(5):320–324	54(5):320–324	PROPN
ap-2147	1	9	,	,	PUNCT
ap-2147	1	10	2014	2014	NUM
ap-2147	1	11	©	©	PROPN
ap-2147	1	12	czech	czech	PROPN
ap-2147	1	13	technical	technical	PROPN
ap-2147	1	14	university	university	PROPN
ap-2147	1	15	in	in	ADP
ap-2147	1	16	prague	prague	PROPN
ap-2147	1	17	,	,	PUNCT
ap-2147	1	18	2014	2014	NUM
ap-2147	1	19	available	available	ADJ
ap-2147	1	20	online	online	ADV
ap-2147	1	21	at	at	ADP
ap-2147	1	22	http://ojs.cvut.cz/ojs/index.php/ap	http://ojs.cvut.cz/ojs/index.php/ap	PROPN
ap-2147	1	23	structuring	structuring	NOUN
ap-2147	1	24	of	of	ADP
ap-2147	1	25	diamond	diamond	NOUN
ap-2147	1	26	films	film	NOUN
ap-2147	1	27	using	use	VERB
ap-2147	1	28	microsphere	microsphere	NUM
ap-2147	1	29	lithography	lithography	PROPN
ap-2147	1	30	mária	mária	PROPN
ap-2147	1	31	domonkosa	domonkosa	PROPN
ap-2147	1	32	,	,	PUNCT
ap-2147	1	33	b,∗	b,∗	PROPN
ap-2147	1	34	,	,	PUNCT
ap-2147	1	35	tibor	tibor	PROPN
ap-2147	1	36	ižáka	ižáka	PROPN
ap-2147	1	37	,	,	PUNCT
ap-2147	1	38	lucie	lucie	PROPN
ap-2147	1	39	štolcovác	štolcovác	PROPN
ap-2147	1	40	,	,	PUNCT
ap-2147	1	41	jan	jan	PROPN
ap-2147	1	42	proškac	proškac	PROPN
ap-2147	1	43	,	,	PUNCT
ap-2147	1	44	pavel	pavel	PROPN
ap-2147	1	45	demoa	demoa	PROPN
ap-2147	1	46	,	,	PUNCT
ap-2147	1	47	b	b	NOUN
ap-2147	1	48	,	,	PUNCT
ap-2147	1	49	alexander	alexander	PROPN
ap-2147	1	50	kromkaa	kromkaa	PROPN
ap-2147	1	51	a	a	DET
ap-2147	1	52	institute	institute	PROPN
ap-2147	1	53	of	of	ADP
ap-2147	1	54	physics	physics	PROPN
ap-2147	1	55	,	,	PUNCT
ap-2147	1	56	academy	academy	PROPN
ap-2147	1	57	of	of	ADP
ap-2147	1	58	sciences	sciences	PROPN
ap-2147	1	59	of	of	ADP
ap-2147	1	60	the	the	DET
ap-2147	1	61	czech	czech	PROPN
ap-2147	1	62	republic	republic	PROPN
ap-2147	1	63	v.v.i	v.v.i	PROPN
ap-2147	1	64	.	.	PUNCT
ap-2147	1	65	,	,	PUNCT
ap-2147	1	66	cukrovarnická	cukrovarnická	PROPN
ap-2147	1	67	10/112	10/112	NUM
ap-2147	1	68	,	,	PUNCT
ap-2147	1	69	162	162	NUM
ap-2147	1	70	53	53	NUM
ap-2147	1	71	praha	praha	NOUN
ap-2147	1	72	,	,	PUNCT
ap-2147	1	73	czech	czech	PROPN
ap-2147	1	74	republic	republic	PROPN
ap-2147	1	75	b	b	PROPN
ap-2147	1	76	department	department	PROPN
ap-2147	1	77	of	of	ADP
ap-2147	1	78	physics	physics	PROPN
ap-2147	1	79	,	,	PUNCT
ap-2147	1	80	faculty	faculty	NOUN
ap-2147	1	81	of	of	ADP
ap-2147	1	82	civil	civil	ADJ
ap-2147	1	83	engineering	engineering	NOUN
ap-2147	1	84	,	,	PUNCT
ap-2147	1	85	czech	czech	PROPN
ap-2147	1	86	technical	technical	PROPN
ap-2147	1	87	university	university	PROPN
ap-2147	1	88	in	in	ADP
ap-2147	1	89	prague	prague	PROPN
ap-2147	1	90	,	,	PUNCT
ap-2147	1	91	thákurova	thákurova	PROPN
ap-2147	1	92	7	7	NUM
ap-2147	1	93	,	,	PUNCT
ap-2147	1	94	166	166	NUM
ap-2147	1	95	29	29	NUM
ap-2147	1	96	praha	praha	NOUN
ap-2147	1	97	6	6	NUM
ap-2147	1	98	,	,	PUNCT
ap-2147	1	99	czech	czech	PROPN
ap-2147	1	100	republic	republic	NOUN
ap-2147	1	101	c	c	PROPN
ap-2147	1	102	department	department	PROPN
ap-2147	1	103	of	of	ADP
ap-2147	1	104	physical	physical	ADJ
ap-2147	1	105	electronics	electronic	NOUN
ap-2147	1	106	,	,	PUNCT
ap-2147	1	107	faculty	faculty	NOUN
ap-2147	1	108	of	of	ADP
ap-2147	1	109	nuclear	nuclear	ADJ
ap-2147	1	110	sciences	science	NOUN
ap-2147	1	111	and	and	CCONJ
ap-2147	1	112	physical	physical	ADJ
ap-2147	1	113	engineering	engineering	NOUN
ap-2147	1	114	,	,	PUNCT
ap-2147	1	115	czech	czech	PROPN
ap-2147	1	116	technical	technical	PROPN
ap-2147	1	117	university	university	PROPN
ap-2147	1	118	in	in	ADP
ap-2147	1	119	prague	prague	PROPN
ap-2147	1	120	,	,	PUNCT
ap-2147	1	121	břehová	břehová	VERB
ap-2147	1	122	7	7	NUM
ap-2147	1	123	,	,	PUNCT
ap-2147	1	124	115	115	NUM
ap-2147	1	125	19	19	NUM
ap-2147	1	126	praha	praha	NOUN
ap-2147	1	127	,	,	PUNCT
ap-2147	1	128	czech	czech	PROPN
ap-2147	1	129	republic	republic	NOUN
ap-2147	1	130	∗	∗	NOUN
ap-2147	1	131	corresponding	correspond	VERB
ap-2147	1	132	author	author	NOUN
ap-2147	1	133	:	:	PUNCT
ap-2147	1	134	domonkos@fzu.cz	domonkos@fzu.cz	ADP
ap-2147	1	135	abstract	abstract	ADJ
ap-2147	1	136	.	.	PUNCT
ap-2147	2	1	in	in	ADP
ap-2147	2	2	this	this	DET
ap-2147	2	3	study	study	NOUN
ap-2147	2	4	,	,	PUNCT
ap-2147	2	5	the	the	DET
ap-2147	2	6	structuring	structuring	NOUN
ap-2147	2	7	of	of	ADP
ap-2147	2	8	microand	microand	PROPN
ap-2147	2	9	nanocrystalline	nanocrystalline	PROPN
ap-2147	2	10	diamond	diamond	PROPN
ap-2147	2	11	thin	thin	ADJ
ap-2147	2	12	films	film	NOUN
ap-2147	2	13	is	be	AUX
ap-2147	2	14	demonstrated	demonstrate	VERB
ap-2147	2	15	.	.	PUNCT
ap-2147	3	1	the	the	DET
ap-2147	3	2	diamond	diamond	NOUN
ap-2147	3	3	films	film	NOUN
ap-2147	3	4	are	be	AUX
ap-2147	3	5	structured	structure	VERB
ap-2147	3	6	using	use	VERB
ap-2147	3	7	the	the	DET
ap-2147	3	8	technique	technique	NOUN
ap-2147	3	9	of	of	ADP
ap-2147	3	10	microsphere	microsphere	NOUN
ap-2147	3	11	lithography	lithography	NOUN
ap-2147	3	12	followed	follow	VERB
ap-2147	3	13	by	by	ADP
ap-2147	3	14	reactive	reactive	ADJ
ap-2147	3	15	ion	ion	NOUN
ap-2147	3	16	etching	etching	NOUN
ap-2147	3	17	.	.	PUNCT
ap-2147	4	1	specifically	specifically	ADV
ap-2147	4	2	,	,	PUNCT
ap-2147	4	3	this	this	DET
ap-2147	4	4	paper	paper	NOUN
ap-2147	4	5	presents	present	VERB
ap-2147	4	6	a	a	DET
ap-2147	4	7	four	four	NUM
ap-2147	4	8	-	-	PUNCT
ap-2147	4	9	step	step	NOUN
ap-2147	4	10	fabrication	fabrication	NOUN
ap-2147	4	11	process	process	NOUN
ap-2147	4	12	:	:	PUNCT
ap-2147	4	13	diamond	diamond	NOUN
ap-2147	4	14	deposition	deposition	NOUN
ap-2147	4	15	(	(	PUNCT
ap-2147	4	16	microwave	microwave	NOUN
ap-2147	4	17	plasma	plasma	NOUN
ap-2147	4	18	assisted	assist	VERB
ap-2147	4	19	chemical	chemical	ADJ
ap-2147	4	20	vapor	vapor	NOUN
ap-2147	4	21	deposition	deposition	NOUN
ap-2147	4	22	)	)	PUNCT
ap-2147	4	23	,	,	PUNCT
ap-2147	4	24	mask	mask	NOUN
ap-2147	4	25	preparation	preparation	NOUN
ap-2147	4	26	(	(	PUNCT
ap-2147	4	27	by	by	ADP
ap-2147	4	28	the	the	DET
ap-2147	4	29	standard	standard	ADJ
ap-2147	4	30	langmuir	langmuir	PROPN
ap-2147	4	31	-	-	PUNCT
ap-2147	4	32	blodgett	blodgett	PROPN
ap-2147	4	33	method	method	PROPN
ap-2147	4	34	)	)	PUNCT
ap-2147	4	35	,	,	PUNCT
ap-2147	4	36	mask	mask	NOUN
ap-2147	4	37	modification	modification	NOUN
ap-2147	4	38	and	and	CCONJ
ap-2147	4	39	diamond	diamond	NOUN
ap-2147	4	40	etching	etching	NOUN
ap-2147	4	41	.	.	PUNCT
ap-2147	5	1	a	a	DET
ap-2147	5	2	self	self	NOUN
ap-2147	5	3	-	-	PUNCT
ap-2147	5	4	assembled	assemble	VERB
ap-2147	5	5	monolayer	monolayer	NOUN
ap-2147	5	6	of	of	ADP
ap-2147	5	7	monodisperse	monodisperse	NOUN
ap-2147	5	8	polystyrene	polystyrene	NOUN
ap-2147	5	9	(	(	PUNCT
ap-2147	5	10	ps	ps	NOUN
ap-2147	5	11	)	)	PUNCT
ap-2147	5	12	microspheres	microsphere	NOUN
ap-2147	5	13	with	with	ADP
ap-2147	5	14	close	close	ADV
ap-2147	5	15	-	-	PUNCT
ap-2147	5	16	packed	pack	VERB
ap-2147	5	17	ordering	ordering	NOUN
ap-2147	5	18	is	be	AUX
ap-2147	5	19	used	use	VERB
ap-2147	5	20	as	as	ADP
ap-2147	5	21	the	the	DET
ap-2147	5	22	primary	primary	ADJ
ap-2147	5	23	template	template	NOUN
ap-2147	5	24	.	.	PUNCT
ap-2147	6	1	then	then	ADV
ap-2147	6	2	the	the	DET
ap-2147	6	3	ps	ps	NOUN
ap-2147	6	4	microspheres	microsphere	NOUN
ap-2147	6	5	and	and	CCONJ
ap-2147	6	6	the	the	DET
ap-2147	6	7	diamond	diamond	NOUN
ap-2147	6	8	films	film	NOUN
ap-2147	6	9	are	be	AUX
ap-2147	6	10	processed	process	VERB
ap-2147	6	11	in	in	ADP
ap-2147	6	12	capacitively	capacitively	ADV
ap-2147	6	13	coupled	couple	VERB
ap-2147	6	14	radiofrequency	radiofrequency	NOUN
ap-2147	6	15	plasma	plasma	NOUN
ap-2147	6	16	using	use	VERB
ap-2147	6	17	various	various	ADJ
ap-2147	6	18	plasma	plasma	NOUN
ap-2147	6	19	chemistries	chemistry	NOUN
ap-2147	6	20	.	.	PUNCT
ap-2147	7	1	this	this	DET
ap-2147	7	2	fabrication	fabrication	NOUN
ap-2147	7	3	method	method	NOUN
ap-2147	7	4	illustrates	illustrate	VERB
ap-2147	7	5	the	the	DET
ap-2147	7	6	preparation	preparation	NOUN
ap-2147	7	7	of	of	ADP
ap-2147	7	8	large	large	ADJ
ap-2147	7	9	arrays	array	NOUN
ap-2147	7	10	of	of	ADP
ap-2147	7	11	periodic	periodic	ADJ
ap-2147	7	12	and	and	CCONJ
ap-2147	7	13	homogeneous	homogeneous	ADJ
ap-2147	7	14	hillock	hillock	NOUN
ap-2147	7	15	-	-	PUNCT
ap-2147	7	16	like	like	ADJ
ap-2147	7	17	structures	structure	NOUN
ap-2147	7	18	.	.	PUNCT
ap-2147	8	1	the	the	DET
ap-2147	8	2	surface	surface	NOUN
ap-2147	8	3	morphology	morphology	NOUN
ap-2147	8	4	of	of	ADP
ap-2147	8	5	the	the	DET
ap-2147	8	6	processed	process	VERB
ap-2147	8	7	diamond	diamond	NOUN
ap-2147	8	8	films	film	NOUN
ap-2147	8	9	is	be	AUX
ap-2147	8	10	characterized	characterize	VERB
ap-2147	8	11	by	by	ADP
ap-2147	8	12	scanning	scan	VERB
ap-2147	8	13	electron	electron	NOUN
ap-2147	8	14	microscopy	microscopy	NOUN
ap-2147	8	15	and	and	CCONJ
ap-2147	8	16	with	with	ADP
ap-2147	8	17	the	the	DET
ap-2147	8	18	use	use	NOUN
ap-2147	8	19	of	of	ADP
ap-2147	8	20	an	an	DET
ap-2147	8	21	atomic	atomic	ADJ
ap-2147	8	22	force	force	NOUN
ap-2147	8	23	microscope	microscope	NOUN
ap-2147	8	24	.	.	PUNCT
ap-2147	9	1	the	the	DET
ap-2147	9	2	potential	potential	ADJ
ap-2147	9	3	applications	application	NOUN
ap-2147	9	4	of	of	ADP
ap-2147	9	5	these	these	DET
ap-2147	9	6	diamond	diamond	NOUN
ap-2147	9	7	structures	structure	NOUN
ap-2147	9	8	in	in	ADP
ap-2147	9	9	various	various	ADJ
ap-2147	9	10	fields	field	NOUN
ap-2147	9	11	of	of	ADP
ap-2147	9	12	nanotechnology	nanotechnology	NOUN
ap-2147	9	13	are	be	AUX
ap-2147	9	14	also	also	ADV
ap-2147	9	15	briefly	briefly	ADV
ap-2147	9	16	discussed	discuss	VERB
ap-2147	9	17	.	.	PUNCT
ap-2147	10	1	keywords	keyword	NOUN
ap-2147	10	2	:	:	PUNCT
ap-2147	10	3	nanostructuring	nanostructure	VERB
ap-2147	10	4	,	,	PUNCT
ap-2147	10	5	diamond	diamond	NOUN
ap-2147	10	6	thin	thin	ADJ
ap-2147	10	7	films	film	NOUN
ap-2147	10	8	,	,	PUNCT
ap-2147	10	9	polystyrene	polystyrene	NOUN
ap-2147	10	10	microspheres	microsphere	NOUN
ap-2147	10	11	,	,	PUNCT
ap-2147	10	12	reactive	reactive	ADJ
ap-2147	10	13	ion	ion	NOUN
ap-2147	10	14	etching	etching	NOUN
ap-2147	10	15	,	,	PUNCT
ap-2147	10	16	scanning	scan	VERB
ap-2147	10	17	electron	electron	NOUN
ap-2147	10	18	microscopy	microscopy	NOUN
ap-2147	10	19	.	.	PUNCT
ap-2147	11	1	1	1	X
ap-2147	11	2	.	.	X
ap-2147	11	3	introduction	introduction	NOUN
ap-2147	11	4	1.1	1.1	NUM
ap-2147	11	5	.	.	PUNCT
ap-2147	12	1	diamond	diamond	NOUN
ap-2147	12	2	and	and	CCONJ
ap-2147	12	3	its	its	PRON
ap-2147	12	4	applications	application	NOUN
ap-2147	12	5	the	the	DET
ap-2147	12	6	most	most	ADV
ap-2147	12	7	commonly	commonly	ADV
ap-2147	12	8	used	use	VERB
ap-2147	12	9	methods	method	NOUN
ap-2147	12	10	for	for	ADP
ap-2147	12	11	synthesizing	synthesize	VERB
ap-2147	12	12	diamond	diamond	NOUN
ap-2147	12	13	are	be	AUX
ap-2147	12	14	high	high	ADJ
ap-2147	12	15	-	-	PUNCT
ap-2147	12	16	pressure	pressure	NOUN
ap-2147	12	17	,	,	PUNCT
ap-2147	12	18	high	high	ADJ
ap-2147	12	19	temperature	temperature	NOUN
ap-2147	12	20	(	(	PUNCT
ap-2147	12	21	hpht	hpht	NOUN
ap-2147	12	22	)	)	PUNCT
ap-2147	13	1	[	[	X
ap-2147	13	2	1	1	X
ap-2147	13	3	]	]	PUNCT
ap-2147	13	4	and	and	CCONJ
ap-2147	13	5	chemical	chemical	ADJ
ap-2147	13	6	vapour	vapour	NOUN
ap-2147	13	7	deposition	deposition	NOUN
ap-2147	13	8	methods	method	NOUN
ap-2147	13	9	(	(	PUNCT
ap-2147	13	10	cvd	cvd	NOUN
ap-2147	13	11	)	)	PUNCT
ap-2147	14	1	[	[	X
ap-2147	14	2	2	2	NUM
ap-2147	14	3	]	]	PUNCT
ap-2147	14	4	.	.	PUNCT
ap-2147	15	1	other	other	ADJ
ap-2147	15	2	methods	method	NOUN
ap-2147	15	3	include	include	VERB
ap-2147	15	4	explosive	explosive	ADJ
ap-2147	15	5	formation	formation	NOUN
ap-2147	15	6	(	(	PUNCT
ap-2147	15	7	forming	form	VERB
ap-2147	15	8	detonation	detonation	NOUN
ap-2147	15	9	nanodiamonds	nanodiamond	NOUN
ap-2147	15	10	)	)	PUNCT
ap-2147	15	11	,	,	PUNCT
ap-2147	15	12	sonication	sonication	NOUN
ap-2147	15	13	of	of	ADP
ap-2147	15	14	graphite	graphite	NOUN
ap-2147	15	15	solutions	solution	NOUN
ap-2147	15	16	(	(	PUNCT
ap-2147	15	17	ultrasound	ultrasound	NOUN
ap-2147	15	18	cavitation	cavitation	NOUN
ap-2147	15	19	)	)	PUNCT
ap-2147	15	20	,	,	PUNCT
ap-2147	15	21	laser	laser	NOUN
ap-2147	15	22	ablation	ablation	NOUN
ap-2147	15	23	,	,	PUNCT
ap-2147	15	24	etc	etc	X
ap-2147	15	25	.	.	X
ap-2147	15	26	due	due	ADP
ap-2147	15	27	to	to	ADP
ap-2147	15	28	a	a	DET
ap-2147	15	29	unique	unique	ADJ
ap-2147	15	30	combination	combination	NOUN
ap-2147	15	31	of	of	ADP
ap-2147	15	32	properties	property	NOUN
ap-2147	15	33	(	(	PUNCT
ap-2147	15	34	e.g.	e.g.	ADV
ap-2147	15	35	extreme	extreme	ADJ
ap-2147	15	36	hardness	hardness	NOUN
ap-2147	15	37	,	,	PUNCT
ap-2147	15	38	high	high	ADJ
ap-2147	15	39	thermal	thermal	ADJ
ap-2147	15	40	conductivity	conductivity	NOUN
ap-2147	15	41	,	,	PUNCT
ap-2147	15	42	wide	wide	ADJ
ap-2147	15	43	band	band	NOUN
ap-2147	15	44	gap	gap	NOUN
ap-2147	15	45	,	,	PUNCT
ap-2147	15	46	negative	negative	ADJ
ap-2147	15	47	electron	electron	NOUN
ap-2147	15	48	affinity	affinity	NOUN
ap-2147	15	49	,	,	PUNCT
ap-2147	15	50	high	high	ADJ
ap-2147	15	51	mechanical	mechanical	ADJ
ap-2147	15	52	strength	strength	NOUN
ap-2147	15	53	,	,	PUNCT
ap-2147	15	54	chemical	chemical	NOUN
ap-2147	15	55	inertness	inertness	NOUN
ap-2147	15	56	,	,	PUNCT
ap-2147	15	57	resistance	resistance	NOUN
ap-2147	15	58	to	to	ADP
ap-2147	15	59	particle	particle	NOUN
ap-2147	15	60	bombardment	bombardment	NOUN
ap-2147	15	61	,	,	PUNCT
ap-2147	15	62	and	and	CCONJ
ap-2147	15	63	biocompatibility	biocompatibility	NOUN
ap-2147	15	64	)	)	PUNCT
ap-2147	15	65	diamond	diamond	NOUN
ap-2147	15	66	is	be	AUX
ap-2147	15	67	a	a	DET
ap-2147	15	68	promising	promising	ADJ
ap-2147	15	69	material	material	NOUN
ap-2147	15	70	for	for	ADP
ap-2147	15	71	applications	application	NOUN
ap-2147	15	72	in	in	ADP
ap-2147	15	73	various	various	ADJ
ap-2147	15	74	fields	field	NOUN
ap-2147	15	75	of	of	ADP
ap-2147	15	76	electronics	electronic	NOUN
ap-2147	15	77	,	,	PUNCT
ap-2147	15	78	bioelectronics	bioelectronic	NOUN
ap-2147	15	79	,	,	PUNCT
ap-2147	15	80	sensorics	sensoric	NOUN
ap-2147	15	81	,	,	PUNCT
ap-2147	15	82	etc	etc	X
ap-2147	15	83	.	.	X
ap-2147	16	1	[	[	X
ap-2147	16	2	3	3	NUM
ap-2147	16	3	]	]	PUNCT
ap-2147	16	4	.	.	PUNCT
ap-2147	17	1	the	the	DET
ap-2147	17	2	potential	potential	ADJ
ap-2147	17	3	applications	application	NOUN
ap-2147	17	4	of	of	ADP
ap-2147	17	5	diamond	diamond	NOUN
ap-2147	17	6	depend	depend	VERB
ap-2147	17	7	not	not	PART
ap-2147	17	8	only	only	ADV
ap-2147	17	9	on	on	ADP
ap-2147	17	10	its	its	PRON
ap-2147	17	11	intrinsic	intrinsic	ADJ
ap-2147	17	12	physical	physical	ADJ
ap-2147	17	13	and	and	CCONJ
ap-2147	17	14	chemical	chemical	NOUN
ap-2147	17	15	properties	property	NOUN
ap-2147	17	16	,	,	PUNCT
ap-2147	17	17	but	but	CCONJ
ap-2147	17	18	also	also	ADV
ap-2147	17	19	on	on	ADP
ap-2147	17	20	its	its	PRON
ap-2147	17	21	surface	surface	NOUN
ap-2147	17	22	geometry	geometry	NOUN
ap-2147	17	23	.	.	PUNCT
ap-2147	18	1	the	the	DET
ap-2147	18	2	defined	define	VERB
ap-2147	18	3	surface	surface	NOUN
ap-2147	18	4	structuring	structuring	NOUN
ap-2147	18	5	allows	allow	VERB
ap-2147	18	6	these	these	DET
ap-2147	18	7	unique	unique	ADJ
ap-2147	18	8	properties	property	NOUN
ap-2147	18	9	to	to	PART
ap-2147	18	10	be	be	AUX
ap-2147	18	11	tuned	tune	VERB
ap-2147	18	12	and	and	CCONJ
ap-2147	18	13	exploited	exploit	VERB
ap-2147	18	14	for	for	ADP
ap-2147	18	15	a	a	DET
ap-2147	18	16	wider	wide	ADJ
ap-2147	18	17	range	range	NOUN
ap-2147	18	18	of	of	ADP
ap-2147	18	19	applications	application	NOUN
ap-2147	18	20	.	.	PUNCT
ap-2147	19	1	for	for	ADP
ap-2147	19	2	example	example	NOUN
ap-2147	19	3	,	,	PUNCT
ap-2147	19	4	structuring	structuring	NOUN
ap-2147	19	5	of	of	ADP
ap-2147	19	6	films	film	NOUN
ap-2147	19	7	enhances	enhance	VERB
ap-2147	19	8	the	the	DET
ap-2147	19	9	surface	surface	NOUN
ap-2147	19	10	-	-	PUNCT
ap-2147	19	11	tovolume	tovolume	NOUN
ap-2147	19	12	ratio	ratio	NOUN
ap-2147	19	13	and	and	CCONJ
ap-2147	19	14	therefore	therefore	ADV
ap-2147	19	15	increases	increase	VERB
ap-2147	19	16	the	the	DET
ap-2147	19	17	sensitivity	sensitivity	NOUN
ap-2147	19	18	and	and	CCONJ
ap-2147	19	19	other	other	ADJ
ap-2147	19	20	performances	performance	NOUN
ap-2147	19	21	of	of	ADP
ap-2147	19	22	fabricated	fabricate	VERB
ap-2147	19	23	devices	device	NOUN
ap-2147	19	24	[	[	X
ap-2147	19	25	4	4	NUM
ap-2147	19	26	]	]	PUNCT
ap-2147	19	27	.	.	PUNCT
ap-2147	20	1	for	for	ADP
ap-2147	20	2	example	example	NOUN
ap-2147	20	3	,	,	PUNCT
ap-2147	20	4	increasing	increase	VERB
ap-2147	20	5	the	the	DET
ap-2147	20	6	surface	surface	NOUN
ap-2147	20	7	area	area	NOUN
ap-2147	20	8	-	-	PUNCT
ap-2147	20	9	to	to	ADP
ap-2147	20	10	-	-	PUNCT
ap-2147	20	11	volume	volume	NOUN
ap-2147	20	12	ratio	ratio	NOUN
ap-2147	20	13	of	of	ADP
ap-2147	20	14	diamond	diamond	NOUN
ap-2147	20	15	films	film	NOUN
ap-2147	20	16	improves	improve	VERB
ap-2147	20	17	the	the	DET
ap-2147	20	18	field	field	NOUN
ap-2147	20	19	-	-	PUNCT
ap-2147	20	20	emission	emission	NOUN
ap-2147	20	21	properties	property	NOUN
ap-2147	20	22	by	by	ADP
ap-2147	20	23	introducing	introduce	VERB
ap-2147	20	24	the	the	DET
ap-2147	20	25	enhancement	enhancement	NOUN
ap-2147	20	26	effect	effect	NOUN
ap-2147	20	27	of	of	ADP
ap-2147	20	28	the	the	DET
ap-2147	20	29	local	local	ADJ
ap-2147	20	30	field	field	NOUN
ap-2147	20	31	near	near	ADP
ap-2147	20	32	the	the	DET
ap-2147	20	33	tips	tip	NOUN
ap-2147	20	34	[	[	X
ap-2147	20	35	5	5	NUM
ap-2147	20	36	]	]	PUNCT
ap-2147	20	37	.	.	PUNCT
ap-2147	21	1	generally	generally	ADV
ap-2147	21	2	,	,	PUNCT
ap-2147	21	3	various	various	ADJ
ap-2147	21	4	nanostructures	nanostructure	NOUN
ap-2147	21	5	can	can	AUX
ap-2147	21	6	be	be	AUX
ap-2147	21	7	fabricated	fabricate	VERB
ap-2147	21	8	from	from	ADP
ap-2147	21	9	diamond	diamond	NOUN
ap-2147	21	10	films	film	NOUN
ap-2147	21	11	known	know	VERB
ap-2147	21	12	as	as	ADP
ap-2147	21	13	nanowires	nanowire	NOUN
ap-2147	21	14	,	,	PUNCT
ap-2147	21	15	nanorods	nanorod	NOUN
ap-2147	21	16	,	,	PUNCT
ap-2147	21	17	nanoneedles	nanoneedle	NOUN
ap-2147	21	18	,	,	PUNCT
ap-2147	21	19	etc	etc	X
ap-2147	21	20	.	.	X
ap-2147	21	21	therefore	therefore	ADV
ap-2147	21	22	,	,	PUNCT
ap-2147	21	23	there	there	PRON
ap-2147	21	24	is	be	VERB
ap-2147	21	25	still	still	ADV
ap-2147	21	26	great	great	ADJ
ap-2147	21	27	interest	interest	NOUN
ap-2147	21	28	in	in	ADP
ap-2147	21	29	developing	develop	VERB
ap-2147	21	30	methods	method	NOUN
ap-2147	21	31	for	for	ADP
ap-2147	21	32	obtaining	obtain	VERB
ap-2147	21	33	diamond	diamond	NOUN
ap-2147	21	34	nanostructures	nanostructure	NOUN
ap-2147	21	35	with	with	ADP
ap-2147	21	36	high	high	ADJ
ap-2147	21	37	area	area	NOUN
ap-2147	21	38	density	density	NOUN
ap-2147	21	39	,	,	PUNCT
ap-2147	21	40	high	high	ADJ
ap-2147	21	41	aspect	aspect	NOUN
ap-2147	21	42	ratio	ratio	NOUN
ap-2147	21	43	(	(	PUNCT
ap-2147	21	44	depth	depth	NOUN
ap-2147	21	45	/	/	SYM
ap-2147	21	46	width	width	NOUN
ap-2147	21	47	)	)	PUNCT
ap-2147	21	48	,	,	PUNCT
ap-2147	21	49	good	good	ADJ
ap-2147	21	50	uniformity	uniformity	NOUN
ap-2147	21	51	and	and	CCONJ
ap-2147	21	52	controlled	control	VERB
ap-2147	21	53	geometry	geometry	NOUN
ap-2147	21	54	over	over	ADP
ap-2147	21	55	large	large	ADJ
ap-2147	21	56	areas	area	NOUN
ap-2147	22	1	[	[	X
ap-2147	22	2	6	6	NUM
ap-2147	22	3	]	]	PUNCT
ap-2147	22	4	.	.	PUNCT
ap-2147	23	1	1.2	1.2	NUM
ap-2147	23	2	.	.	PUNCT
ap-2147	24	1	structuring	structuring	NOUN
ap-2147	24	2	of	of	ADP
ap-2147	24	3	diamond	diamond	NOUN
ap-2147	24	4	films	film	NOUN
ap-2147	24	5	on	on	ADP
ap-2147	24	6	the	the	DET
ap-2147	24	7	basis	basis	NOUN
ap-2147	24	8	of	of	ADP
ap-2147	24	9	the	the	DET
ap-2147	24	10	fabrication	fabrication	NOUN
ap-2147	24	11	or	or	CCONJ
ap-2147	24	12	structuring	structuring	NOUN
ap-2147	24	13	method	method	NOUN
ap-2147	24	14	,	,	PUNCT
ap-2147	24	15	two	two	NUM
ap-2147	24	16	basic	basic	ADJ
ap-2147	24	17	concepts	concept	NOUN
ap-2147	24	18	can	can	AUX
ap-2147	24	19	be	be	AUX
ap-2147	24	20	defined	define	VERB
ap-2147	24	21	as	as	ADP
ap-2147	24	22	:	:	PUNCT
ap-2147	24	23	a	a	X
ap-2147	24	24	)	)	PUNCT
ap-2147	24	25	the	the	DET
ap-2147	24	26	bottomup	bottomup	NOUN
ap-2147	24	27	strategy	strategy	NOUN
ap-2147	24	28	and	and	CCONJ
ap-2147	24	29	b	b	X
ap-2147	24	30	)	)	PUNCT
ap-2147	24	31	the	the	DET
ap-2147	24	32	top	top	ADJ
ap-2147	24	33	-	-	PUNCT
ap-2147	24	34	down	down	ADP
ap-2147	24	35	strategy	strategy	NOUN
ap-2147	24	36	.	.	PUNCT
ap-2147	25	1	for	for	ADP
ap-2147	25	2	structuring	structure	VERB
ap-2147	25	3	diamond	diamond	NOUN
ap-2147	25	4	films	film	NOUN
ap-2147	25	5	,	,	PUNCT
ap-2147	25	6	the	the	DET
ap-2147	25	7	bottom	bottom	NOUN
ap-2147	25	8	-	-	PUNCT
ap-2147	25	9	up	up	ADP
ap-2147	25	10	strategy	strategy	NOUN
ap-2147	25	11	(	(	PUNCT
ap-2147	25	12	e.g.	e.g.	ADV
ap-2147	25	13	selective	selective	ADJ
ap-2147	25	14	area	area	NOUN
ap-2147	25	15	deposition	deposition	NOUN
ap-2147	26	1	[	[	X
ap-2147	26	2	7	7	NUM
ap-2147	26	3	]	]	PUNCT
ap-2147	26	4	)	)	PUNCT
ap-2147	26	5	is	be	AUX
ap-2147	26	6	rarely	rarely	ADV
ap-2147	26	7	used	use	VERB
ap-2147	26	8	because	because	SCONJ
ap-2147	26	9	of	of	ADP
ap-2147	26	10	the	the	DET
ap-2147	26	11	greater	great	ADJ
ap-2147	26	12	complexity	complexity	NOUN
ap-2147	26	13	and	and	CCONJ
ap-2147	26	14	low	low	ADJ
ap-2147	26	15	process	process	NOUN
ap-2147	26	16	reliability	reliability	NOUN
ap-2147	26	17	.	.	PUNCT
ap-2147	27	1	wet	wet	ADJ
ap-2147	27	2	chemical	chemical	NOUN
ap-2147	27	3	etching	etch	VERB
ap-2147	27	4	is	be	AUX
ap-2147	27	5	not	not	PART
ap-2147	27	6	applicable	applicable	ADJ
ap-2147	27	7	due	due	ADP
ap-2147	27	8	to	to	ADP
ap-2147	27	9	the	the	DET
ap-2147	27	10	hightemperature	hightemperature	NOUN
ap-2147	27	11	stability	stability	NOUN
ap-2147	27	12	,	,	PUNCT
ap-2147	27	13	super	super	ADV
ap-2147	27	14	hardness	hardness	NOUN
ap-2147	27	15	and	and	CCONJ
ap-2147	27	16	chemical	chemical	ADJ
ap-2147	27	17	inertness	inertness	NOUN
ap-2147	27	18	of	of	ADP
ap-2147	27	19	diamond	diamond	NOUN
ap-2147	27	20	.	.	PUNCT
ap-2147	28	1	among	among	ADP
ap-2147	28	2	the	the	DET
ap-2147	28	3	top	top	ADJ
ap-2147	28	4	-	-	PUNCT
ap-2147	28	5	down	down	ADP
ap-2147	28	6	strategies	strategy	NOUN
ap-2147	28	7	,	,	PUNCT
ap-2147	28	8	only	only	ADV
ap-2147	28	9	dry	dry	ADJ
ap-2147	28	10	reactive	reactive	ADJ
ap-2147	28	11	ion	ion	NOUN
ap-2147	28	12	plasma	plasma	NOUN
ap-2147	28	13	etching	etch	VERB
ap-2147	28	14	through	through	ADP
ap-2147	28	15	a	a	DET
ap-2147	28	16	mask	mask	NOUN
ap-2147	28	17	can	can	AUX
ap-2147	28	18	be	be	AUX
ap-2147	28	19	used	use	VERB
ap-2147	28	20	.	.	PUNCT
ap-2147	29	1	the	the	DET
ap-2147	29	2	advantages	advantage	NOUN
ap-2147	29	3	are	be	AUX
ap-2147	29	4	greater	great	ADJ
ap-2147	29	5	reliability	reliability	NOUN
ap-2147	29	6	,	,	PUNCT
ap-2147	29	7	greater	great	ADJ
ap-2147	29	8	reproducibility	reproducibility	NOUN
ap-2147	29	9	,	,	PUNCT
ap-2147	29	10	and	and	CCONJ
ap-2147	29	11	a	a	DET
ap-2147	29	12	broad	broad	ADJ
ap-2147	29	13	family	family	NOUN
ap-2147	29	14	of	of	ADP
ap-2147	29	15	possible	possible	ADJ
ap-2147	29	16	masking	masking	NOUN
ap-2147	29	17	materials	material	NOUN
ap-2147	29	18	(	(	PUNCT
ap-2147	29	19	metals	metal	NOUN
ap-2147	29	20	,	,	PUNCT
ap-2147	29	21	polymers	polymer	NOUN
ap-2147	29	22	,	,	PUNCT
ap-2147	29	23	oxides	oxide	NOUN
ap-2147	29	24	or	or	CCONJ
ap-2147	29	25	nitrides	nitride	NOUN
ap-2147	29	26	)	)	PUNCT
ap-2147	29	27	than	than	ADP
ap-2147	29	28	when	when	SCONJ
ap-2147	29	29	the	the	DET
ap-2147	29	30	bottom	bottom	ADJ
ap-2147	29	31	-	-	PUNCT
ap-2147	29	32	up	up	ADP
ap-2147	29	33	strategy	strategy	NOUN
ap-2147	29	34	is	be	AUX
ap-2147	29	35	used	use	VERB
ap-2147	29	36	.	.	PUNCT
ap-2147	30	1	the	the	DET
ap-2147	30	2	mask	mask	NOUN
ap-2147	30	3	,	,	PUNCT
ap-2147	30	4	which	which	PRON
ap-2147	30	5	defines	define	VERB
ap-2147	30	6	the	the	DET
ap-2147	30	7	required	require	VERB
ap-2147	30	8	geometrical	geometrical	ADJ
ap-2147	30	9	patterns	pattern	NOUN
ap-2147	30	10	,	,	PUNCT
ap-2147	30	11	is	be	AUX
ap-2147	30	12	formed	form	VERB
ap-2147	30	13	using	use	VERB
ap-2147	30	14	standard	standard	ADJ
ap-2147	30	15	lithographic	lithographic	ADJ
ap-2147	30	16	processes	process	NOUN
ap-2147	30	17	(	(	PUNCT
ap-2147	30	18	photolithography	photolithography	NOUN
ap-2147	30	19	,	,	PUNCT
ap-2147	30	20	electron	electron	NOUN
ap-2147	30	21	beam	beam	NOUN
ap-2147	30	22	lithogra320	lithogra320	PROPN
ap-2147	31	1	http://dx.doi.org/10.14311/ap.2014.54.0320	http://dx.doi.org/10.14311/ap.2014.54.0320	VERB
ap-2147	31	2	http://ojs.cvut.cz/ojs/index.php/ap	http://ojs.cvut.cz/ojs/index.php/ap	PROPN
ap-2147	31	3	vol	vol	NOUN
ap-2147	31	4	.	.	PUNCT
ap-2147	32	1	54	54	NUM
ap-2147	32	2	no	no	NOUN
ap-2147	32	3	.	.	PUNCT
ap-2147	33	1	5/2014	5/2014	NUM
ap-2147	33	2	structuring	structuring	NOUN
ap-2147	33	3	of	of	ADP
ap-2147	33	4	diamond	diamond	NOUN
ap-2147	33	5	films	film	NOUN
ap-2147	33	6	using	use	VERB
ap-2147	33	7	microsphere	microsphere	NOUN
ap-2147	33	8	lithography	lithography	NOUN
ap-2147	33	9	steps	step	NOUN
ap-2147	33	10	process	process	NOUN
ap-2147	33	11	parameters	parameter	NOUN
ap-2147	33	12	1a	1a	NOUN
ap-2147	33	13	)	)	PUNCT
ap-2147	33	14	mcd	mcd	NOUN
ap-2147	33	15	deposition	deposition	NOUN
ap-2147	33	16	mw	mw	NOUN
ap-2147	33	17	power	power	NOUN
ap-2147	33	18	3000w	3000w	NOUN
ap-2147	33	19	total	total	ADJ
ap-2147	33	20	gas	gas	NOUN
ap-2147	33	21	pressure	pressure	NOUN
ap-2147	33	22	7000pa	7000pa	PROPN
ap-2147	33	23	ch4	ch4	PROPN
ap-2147	33	24	/	/	SYM
ap-2147	33	25	h2	h2	NOUN
ap-2147	33	26	5	5	NUM
ap-2147	33	27	%	%	NOUN
ap-2147	33	28	co2	co2	NOUN
ap-2147	33	29	/	/	SYM
ap-2147	33	30	h2	h2	NOUN
ap-2147	33	31	1.5	1.5	NUM
ap-2147	33	32	%	%	NOUN
ap-2147	33	33	temperature	temperature	NOUN
ap-2147	33	34	800	800	NUM
ap-2147	33	35	°	°	NOUN
ap-2147	33	36	c	c	NOUN
ap-2147	33	37	process	process	NOUN
ap-2147	33	38	time	time	NOUN
ap-2147	33	39	4	4	NUM
ap-2147	33	40	h	h	NOUN
ap-2147	33	41	(	(	PUNCT
ap-2147	33	42	pre	pre	NOUN
ap-2147	33	43	-	-	NOUN
ap-2147	33	44	deposition	deposition	NOUN
ap-2147	33	45	:	:	PUNCT
ap-2147	33	46	2	2	NUM
ap-2147	33	47	%	%	NOUN
ap-2147	33	48	of	of	ADP
ap-2147	33	49	ch4	ch4	PROPN
ap-2147	33	50	/	/	SYM
ap-2147	33	51	h22	h22	PROPN
ap-2147	33	52	without	without	ADP
ap-2147	33	53	co2	co2	VERB
ap-2147	33	54	for	for	ADP
ap-2147	33	55	10min	10min	NOUN
ap-2147	33	56	)	)	PUNCT
ap-2147	33	57	1b	1b	NUM
ap-2147	33	58	)	)	PUNCT
ap-2147	33	59	ncd	ncd	PROPN
ap-2147	33	60	deposition	deposition	NOUN
ap-2147	33	61	mw	mw	NOUN
ap-2147	33	62	power	power	NOUN
ap-2147	33	63	3000w	3000w	NOUN
ap-2147	33	64	total	total	ADJ
ap-2147	33	65	gas	gas	NOUN
ap-2147	33	66	pressure	pressure	NOUN
ap-2147	33	67	7000pa	7000pa	PROPN
ap-2147	33	68	ch4	ch4	PROPN
ap-2147	33	69	/	/	SYM
ap-2147	33	70	h2	h2	NOUN
ap-2147	33	71	5	5	NUM
ap-2147	33	72	%	%	NOUN
ap-2147	33	73	co2	co2	NOUN
ap-2147	33	74	/	/	SYM
ap-2147	33	75	h2	h2	NOUN
ap-2147	33	76	1.5	1.5	NUM
ap-2147	33	77	%	%	NOUN
ap-2147	33	78	temperature	temperature	NOUN
ap-2147	33	79	800	800	NUM
ap-2147	33	80	°	°	NOUN
ap-2147	33	81	c	c	NOUN
ap-2147	33	82	process	process	NOUN
ap-2147	33	83	time	time	NOUN
ap-2147	33	84	3	3	NUM
ap-2147	33	85	h	h	NOUN
ap-2147	33	86	(	(	PUNCT
ap-2147	33	87	pre	pre	NOUN
ap-2147	33	88	-	-	NOUN
ap-2147	33	89	deposition	deposition	NOUN
ap-2147	33	90	:	:	PUNCT
ap-2147	33	91	2	2	NUM
ap-2147	33	92	%	%	NOUN
ap-2147	33	93	of	of	ADP
ap-2147	33	94	ch4	ch4	PROPN
ap-2147	33	95	/	/	SYM
ap-2147	33	96	h2	h2	PROPN
ap-2147	33	97	without	without	ADP
ap-2147	33	98	n2	n2	NOUN
ap-2147	33	99	for	for	ADP
ap-2147	33	100	10min	10min	NOUN
ap-2147	33	101	)	)	PUNCT
ap-2147	33	102	2a	2a	NUM
ap-2147	33	103	)	)	PUNCT
ap-2147	33	104	rie	rie	ADJ
ap-2147	33	105	process	process	NOUN
ap-2147	33	106	rf	rf	NOUN
ap-2147	33	107	power	power	NOUN
ap-2147	33	108	100w	100w	NOUN
ap-2147	33	109	(	(	PUNCT
ap-2147	33	110	o2	o2	ADJ
ap-2147	33	111	-	-	PUNCT
ap-2147	33	112	plasma	plasma	NOUN
ap-2147	33	113	)	)	PUNCT
ap-2147	33	114	total	total	ADJ
ap-2147	33	115	pressure	pressure	NOUN
ap-2147	33	116	12pa	12pa	ADJ
ap-2147	33	117	o2	o2	PROPN
ap-2147	33	118	flow	flow	NOUN
ap-2147	33	119	rate	rate	NOUN
ap-2147	33	120	50	50	NUM
ap-2147	33	121	sccm	sccm	NOUN
ap-2147	33	122	(	(	PUNCT
ap-2147	33	123	for	for	ADP
ap-2147	33	124	7min	7min	NOUN
ap-2147	33	125	)	)	PUNCT
ap-2147	33	126	self	self	NOUN
ap-2147	33	127	-	-	PUNCT
ap-2147	33	128	bias	bias	NOUN
ap-2147	33	129	voltage	voltage	NOUN
ap-2147	33	130	−57v	−57v	PROPN
ap-2147	33	131	2b	2b	NOUN
ap-2147	33	132	)	)	PUNCT
ap-2147	33	133	rie	rie	ADJ
ap-2147	33	134	process	process	NOUN
ap-2147	33	135	rf	rf	NOUN
ap-2147	33	136	power	power	NOUN
ap-2147	33	137	100w	100w	NOUN
ap-2147	33	138	(	(	PUNCT
ap-2147	33	139	cf4	cf4	PROPN
ap-2147	33	140	/	/	SYM
ap-2147	33	141	o2	o2	ADJ
ap-2147	33	142	-	-	PUNCT
ap-2147	33	143	plasma	plasma	NOUN
ap-2147	33	144	)	)	PUNCT
ap-2147	33	145	total	total	ADJ
ap-2147	33	146	pressure	pressure	NOUN
ap-2147	33	147	12pa	12pa	ADJ
ap-2147	33	148	(	(	PUNCT
ap-2147	33	149	1	1	NUM
ap-2147	33	150	.	.	PUNCT
ap-2147	33	151	)	)	PUNCT
ap-2147	34	1	o2	o2	ADJ
ap-2147	34	2	flow	flow	NOUN
ap-2147	34	3	rate	rate	NOUN
ap-2147	34	4	50	50	NUM
ap-2147	34	5	sccm	sccm	NOUN
ap-2147	34	6	(	(	PUNCT
ap-2147	34	7	for	for	ADP
ap-2147	34	8	2min	2min	NUM
ap-2147	34	9	)	)	PUNCT
ap-2147	34	10	(	(	PUNCT
ap-2147	34	11	2	2	NUM
ap-2147	34	12	.	.	PUNCT
ap-2147	34	13	)	)	PUNCT
ap-2147	34	14	o2	o2	PROPN
ap-2147	34	15	/	/	SYM
ap-2147	34	16	ch4	ch4	PROPN
ap-2147	34	17	flow	flow	NOUN
ap-2147	34	18	rate	rate	NOUN
ap-2147	34	19	40/10	40/10	NUM
ap-2147	34	20	sccm	sccm	NOUN
ap-2147	34	21	(	(	PUNCT
ap-2147	34	22	for	for	ADP
ap-2147	34	23	8min	8min	NOUN
ap-2147	34	24	)	)	PUNCT
ap-2147	34	25	self	self	NOUN
ap-2147	34	26	-	-	PUNCT
ap-2147	34	27	bias	bias	NOUN
ap-2147	34	28	voltage	voltage	NOUN
ap-2147	34	29	−57v	−57v	NOUN
ap-2147	34	30	table	table	NOUN
ap-2147	34	31	1	1	NUM
ap-2147	34	32	.	.	PUNCT
ap-2147	34	33	process	process	NOUN
ap-2147	34	34	parameters	parameter	NOUN
ap-2147	34	35	for	for	ADP
ap-2147	34	36	cvd	cvd	PROPN
ap-2147	34	37	diamond	diamond	PROPN
ap-2147	34	38	deposition	deposition	NOUN
ap-2147	34	39	and	and	CCONJ
ap-2147	34	40	diamond	diamond	NOUN
ap-2147	34	41	etching	etch	VERB
ap-2147	34	42	using	use	VERB
ap-2147	34	43	the	the	DET
ap-2147	34	44	ps	ps	NOUN
ap-2147	34	45	template	template	NOUN
ap-2147	34	46	as	as	ADP
ap-2147	34	47	a	a	DET
ap-2147	34	48	direct	direct	ADJ
ap-2147	34	49	mask	mask	NOUN
ap-2147	34	50	(	(	PUNCT
ap-2147	34	51	for	for	ADP
ap-2147	34	52	ps1500	ps1500	NOUN
ap-2147	34	53	)	)	PUNCT
ap-2147	34	54	.	.	PUNCT
ap-2147	35	1	phy	phy	NOUN
ap-2147	35	2	,	,	PUNCT
ap-2147	35	3	nanoimprinting	nanoimprinting	NOUN
ap-2147	35	4	,	,	PUNCT
ap-2147	35	5	etc	etc	X
ap-2147	35	6	.	.	X
ap-2147	35	7	)	)	PUNCT
ap-2147	35	8	.	.	PUNCT
ap-2147	36	1	however	however	ADV
ap-2147	36	2	,	,	PUNCT
ap-2147	36	3	these	these	DET
ap-2147	36	4	processes	process	NOUN
ap-2147	36	5	are	be	AUX
ap-2147	36	6	expensive	expensive	ADJ
ap-2147	36	7	or	or	CCONJ
ap-2147	36	8	time	time	NOUN
ap-2147	36	9	-	-	PUNCT
ap-2147	36	10	consuming	consume	VERB
ap-2147	36	11	.	.	PUNCT
ap-2147	37	1	a	a	DET
ap-2147	37	2	possible	possible	ADJ
ap-2147	37	3	mask	mask	NOUN
ap-2147	37	4	preparation	preparation	NOUN
ap-2147	37	5	process	process	NOUN
ap-2147	37	6	would	would	AUX
ap-2147	37	7	involve	involve	VERB
ap-2147	37	8	utilizing	utilize	VERB
ap-2147	37	9	a	a	DET
ap-2147	37	10	monolayer	monolayer	NOUN
ap-2147	37	11	of	of	ADP
ap-2147	37	12	plasma	plasma	NOUN
ap-2147	37	13	-	-	PUNCT
ap-2147	37	14	treated	treat	VERB
ap-2147	37	15	microspheres	microsphere	NOUN
ap-2147	37	16	with	with	ADP
ap-2147	37	17	controllable	controllable	ADJ
ap-2147	37	18	size	size	NOUN
ap-2147	37	19	and	and	CCONJ
ap-2147	37	20	gap	gap	NOUN
ap-2147	37	21	.	.	PUNCT
ap-2147	38	1	in	in	ADP
ap-2147	38	2	this	this	DET
ap-2147	38	3	study	study	NOUN
ap-2147	38	4	,	,	PUNCT
ap-2147	38	5	we	we	PRON
ap-2147	38	6	present	present	VERB
ap-2147	38	7	structuring	structuring	NOUN
ap-2147	38	8	of	of	ADP
ap-2147	38	9	diamond	diamond	NOUN
ap-2147	38	10	thin	thin	ADJ
ap-2147	38	11	films	film	NOUN
ap-2147	38	12	using	use	VERB
ap-2147	38	13	the	the	DET
ap-2147	38	14	technique	technique	NOUN
ap-2147	38	15	of	of	ADP
ap-2147	38	16	microsphere	microsphere	NOUN
ap-2147	38	17	lithography	lithography	NOUN
ap-2147	38	18	.	.	PUNCT
ap-2147	39	1	2	2	X
ap-2147	39	2	.	.	X
ap-2147	39	3	experimental	experimental	ADJ
ap-2147	39	4	section	section	NOUN
ap-2147	39	5	a	a	DET
ap-2147	39	6	schematic	schematic	ADJ
ap-2147	39	7	illustration	illustration	NOUN
ap-2147	39	8	of	of	ADP
ap-2147	39	9	the	the	DET
ap-2147	39	10	main	main	ADJ
ap-2147	39	11	technological	technological	ADJ
ap-2147	39	12	steps	step	NOUN
ap-2147	39	13	for	for	ADP
ap-2147	39	14	diamond	diamond	NOUN
ap-2147	39	15	structuring	structuring	NOUN
ap-2147	39	16	is	be	AUX
ap-2147	39	17	shown	show	VERB
ap-2147	39	18	in	in	ADP
ap-2147	39	19	fig	fig	NOUN
ap-2147	39	20	.	.	PUNCT
ap-2147	40	1	1	1	NUM
ap-2147	40	2	:	:	PUNCT
ap-2147	40	3	(	(	PUNCT
ap-2147	40	4	1	1	NUM
ap-2147	40	5	.	.	PUNCT
ap-2147	40	6	)	)	PUNCT
ap-2147	40	7	diamond	diamond	NOUN
ap-2147	40	8	deposition	deposition	NOUN
ap-2147	40	9	.	.	PUNCT
ap-2147	41	1	two	two	NUM
ap-2147	41	2	types	type	NOUN
ap-2147	41	3	of	of	ADP
ap-2147	41	4	diamond	diamond	NOUN
ap-2147	41	5	films	film	NOUN
ap-2147	41	6	were	be	AUX
ap-2147	41	7	grown	grow	VERB
ap-2147	41	8	in	in	ADP
ap-2147	41	9	a	a	DET
ap-2147	41	10	focused	focus	VERB
ap-2147	41	11	microwave	microwave	NOUN
ap-2147	41	12	chemical	chemical	NOUN
ap-2147	41	13	vapor	vapor	NOUN
ap-2147	41	14	deposition	deposition	NOUN
ap-2147	41	15	reactor	reactor	NOUN
ap-2147	41	16	(	(	PUNCT
ap-2147	41	17	aixtron	aixtron	PROPN
ap-2147	41	18	p6	p6	PROPN
ap-2147	41	19	)	)	PUNCT
ap-2147	41	20	on	on	ADP
ap-2147	41	21	a	a	DET
ap-2147	41	22	silicon	silicon	NOUN
ap-2147	41	23	substrate	substrate	NOUN
ap-2147	41	24	1	1	NUM
ap-2147	41	25	×	×	NOUN
ap-2147	41	26	1	1	NUM
ap-2147	41	27	cm2	cm2	NOUN
ap-2147	41	28	in	in	ADP
ap-2147	41	29	size	size	NOUN
ap-2147	41	30	(	(	PUNCT
ap-2147	41	31	for	for	SCONJ
ap-2147	41	32	the	the	DET
ap-2147	41	33	plasma	plasma	NOUN
ap-2147	41	34	parameters	parameter	NOUN
ap-2147	41	35	see	see	VERB
ap-2147	41	36	rows	row	NOUN
ap-2147	41	37	1	1	NUM
ap-2147	41	38	and	and	CCONJ
ap-2147	41	39	2	2	NUM
ap-2147	41	40	in	in	ADP
ap-2147	41	41	table	table	NOUN
ap-2147	41	42	1	1	NUM
ap-2147	41	43	)	)	PUNCT
ap-2147	41	44	.	.	PUNCT
ap-2147	42	1	(	(	PUNCT
ap-2147	42	2	2	2	NUM
ap-2147	42	3	.	.	PUNCT
ap-2147	42	4	)	)	PUNCT
ap-2147	43	1	ps	ps	PROPN
ap-2147	43	2	mask	mask	NOUN
ap-2147	43	3	preparation	preparation	NOUN
ap-2147	43	4	.	.	PUNCT
ap-2147	44	1	uniform	uniform	ADJ
ap-2147	44	2	periodic	periodic	ADJ
ap-2147	44	3	arrays	array	NOUN
ap-2147	44	4	of	of	ADP
ap-2147	44	5	polystyrene	polystyrene	NOUN
ap-2147	44	6	(	(	PUNCT
ap-2147	44	7	ps	ps	NOUN
ap-2147	44	8	)	)	PUNCT
ap-2147	44	9	microspheres	microsphere	NOUN
ap-2147	44	10	were	be	AUX
ap-2147	44	11	achieved	achieve	VERB
ap-2147	44	12	by	by	ADP
ap-2147	44	13	the	the	DET
ap-2147	44	14	standard	standard	PROPN
ap-2147	44	15	langmuir	langmuir	PROPN
ap-2147	44	16	-	-	PUNCT
ap-2147	44	17	blodgett	blodgett	PROPN
ap-2147	44	18	method	method	PROPN
ap-2147	44	19	,	,	PUNCT
ap-2147	44	20	i.e.	i.e.	X
ap-2147	44	21	self	self	NOUN
ap-2147	44	22	-	-	PUNCT
ap-2147	44	23	assembly	assembly	NOUN
ap-2147	44	24	of	of	ADP
ap-2147	44	25	microspheres	microsphere	NOUN
ap-2147	44	26	in	in	ADP
ap-2147	44	27	a	a	DET
ap-2147	44	28	hexagonally	hexagonally	ADV
ap-2147	44	29	closepacked	closepacke	VERB
ap-2147	44	30	monolayer	monolayer	NOUN
ap-2147	44	31	at	at	ADP
ap-2147	44	32	the	the	DET
ap-2147	44	33	water	water	NOUN
ap-2147	44	34	-	-	PUNCT
ap-2147	44	35	air	air	NOUN
ap-2147	44	36	interface	interface	NOUN
ap-2147	44	37	.	.	PUNCT
ap-2147	45	1	the	the	DET
ap-2147	45	2	initial	initial	ADJ
ap-2147	45	3	diameter	diameter	NOUN
ap-2147	45	4	of	of	ADP
ap-2147	45	5	the	the	DET
ap-2147	45	6	ps	ps	PROPN
ap-2147	45	7	microspheres	microsphere	NOUN
ap-2147	45	8	was	be	AUX
ap-2147	45	9	1500	1500	NUM
ap-2147	45	10	nm	nm	NOUN
ap-2147	45	11	.	.	PUNCT
ap-2147	46	1	details	detail	NOUN
ap-2147	46	2	abouth	abouth	VERB
ap-2147	46	3	the	the	DET
ap-2147	46	4	preparation	preparation	NOUN
ap-2147	46	5	of	of	ADP
ap-2147	46	6	the	the	DET
ap-2147	46	7	mask	mask	NOUN
ap-2147	46	8	can	can	AUX
ap-2147	46	9	be	be	AUX
ap-2147	46	10	found	find	VERB
ap-2147	46	11	in	in	ADP
ap-2147	46	12	ref	ref	NOUN
ap-2147	46	13	.	.	PUNCT
ap-2147	47	1	[	[	X
ap-2147	47	2	8	8	NUM
ap-2147	47	3	]	]	PUNCT
ap-2147	47	4	.	.	PUNCT
ap-2147	48	1	(	(	PUNCT
ap-2147	48	2	3	3	NUM
ap-2147	48	3	.	.	PUNCT
ap-2147	48	4	)	)	PUNCT
ap-2147	49	1	mask	mask	NOUN
ap-2147	49	2	modification	modification	NOUN
ap-2147	49	3	–	–	PUNCT
ap-2147	49	4	ps	ps	NOUN
ap-2147	49	5	etching	etch	VERB
ap-2147	49	6	.	.	PUNCT
ap-2147	50	1	the	the	DET
ap-2147	50	2	preparation	preparation	NOUN
ap-2147	50	3	of	of	ADP
ap-2147	50	4	the	the	DET
ap-2147	50	5	hexagonally	hexagonally	ADV
ap-2147	50	6	close	close	ADJ
ap-2147	50	7	packed	pack	VERB
ap-2147	50	8	monolayer	monolayer	NOUN
ap-2147	50	9	figure	figure	NOUN
ap-2147	50	10	1	1	NUM
ap-2147	50	11	.	.	PUNCT
ap-2147	50	12	schematic	schematic	ADJ
ap-2147	50	13	drawing	drawing	NOUN
ap-2147	50	14	of	of	ADP
ap-2147	50	15	diamond	diamond	NOUN
ap-2147	50	16	film	film	NOUN
ap-2147	50	17	structuring	structuring	NOUN
ap-2147	50	18	using	use	VERB
ap-2147	50	19	a	a	DET
ap-2147	50	20	ps	ps	NOUN
ap-2147	50	21	microsphere	microsphere	NOUN
ap-2147	50	22	array	array	NOUN
ap-2147	50	23	.	.	PUNCT
ap-2147	50	24	was	be	AUX
ap-2147	50	25	followed	follow	VERB
ap-2147	50	26	by	by	ADP
ap-2147	50	27	reactive	reactive	ADJ
ap-2147	50	28	ion	ion	NOUN
ap-2147	50	29	etching	etching	NOUN
ap-2147	50	30	.	.	PUNCT
ap-2147	51	1	the	the	DET
ap-2147	51	2	ps	ps	PROPN
ap-2147	51	3	microspheres	microsphere	NOUN
ap-2147	51	4	were	be	AUX
ap-2147	51	5	modified	modify	VERB
ap-2147	51	6	in	in	ADP
ap-2147	51	7	a	a	DET
ap-2147	51	8	capacitively	capacitively	ADV
ap-2147	51	9	coupled	couple	VERB
ap-2147	51	10	plasma	plasma	NOUN
ap-2147	51	11	system	system	NOUN
ap-2147	51	12	(	(	PUNCT
ap-2147	51	13	ccp	ccp	NOUN
ap-2147	51	14	-	-	PUNCT
ap-2147	51	15	rie	rie	ADJ
ap-2147	51	16	,	,	PUNCT
ap-2147	51	17	phantom	phantom	NOUN
ap-2147	51	18	iii	iii	PROPN
ap-2147	51	19	,	,	PUNCT
ap-2147	51	20	trion	trion	PROPN
ap-2147	51	21	technology	technology	PROPN
ap-2147	51	22	)	)	PUNCT
ap-2147	51	23	in	in	ADP
ap-2147	51	24	an	an	DET
ap-2147	51	25	oxygen	oxygen	NOUN
ap-2147	51	26	atmosphere	atmosphere	NOUN
ap-2147	51	27	(	(	PUNCT
ap-2147	51	28	for	for	SCONJ
ap-2147	51	29	the	the	DET
ap-2147	51	30	etching	etch	VERB
ap-2147	51	31	parameters	parameter	NOUN
ap-2147	51	32	see	see	VERB
ap-2147	51	33	table	table	NOUN
ap-2147	51	34	1	1	NUM
ap-2147	51	35	,	,	PUNCT
ap-2147	51	36	row	row	VERB
ap-2147	51	37	3	3	NUM
ap-2147	51	38	)	)	PUNCT
ap-2147	51	39	.	.	PUNCT
ap-2147	52	1	(	(	PUNCT
ap-2147	52	2	4	4	NUM
ap-2147	52	3	.	.	PUNCT
ap-2147	52	4	)	)	PUNCT
ap-2147	52	5	diamond	diamond	NOUN
ap-2147	52	6	etching	etching	NOUN
ap-2147	52	7	.	.	PUNCT
ap-2147	53	1	the	the	DET
ap-2147	53	2	samples	sample	NOUN
ap-2147	53	3	were	be	AUX
ap-2147	53	4	subsequently	subsequently	ADV
ap-2147	53	5	also	also	ADV
ap-2147	53	6	treated	treat	VERB
ap-2147	53	7	by	by	ADP
ap-2147	53	8	the	the	DET
ap-2147	53	9	ccp	ccp	PROPN
ap-2147	53	10	-	-	PUNCT
ap-2147	53	11	rie	rie	ADJ
ap-2147	53	12	system	system	NOUN
ap-2147	53	13	.	.	PUNCT
ap-2147	54	1	two	two	NUM
ap-2147	54	2	different	different	ADJ
ap-2147	54	3	gas	gas	NOUN
ap-2147	54	4	mixtures	mixture	NOUN
ap-2147	54	5	were	be	AUX
ap-2147	54	6	used	use	VERB
ap-2147	54	7	:	:	PUNCT
ap-2147	54	8	pure	pure	ADJ
ap-2147	54	9	o2	o2	PROPN
ap-2147	54	10	and	and	CCONJ
ap-2147	54	11	20	20	NUM
ap-2147	54	12	%	%	NOUN
ap-2147	54	13	of	of	ADP
ap-2147	54	14	cf4	cf4	PROPN
ap-2147	54	15	in	in	ADP
ap-2147	54	16	o2	o2	ADJ
ap-2147	54	17	gas	gas	NOUN
ap-2147	54	18	(	(	PUNCT
ap-2147	54	19	see	see	VERB
ap-2147	54	20	row	row	NOUN
ap-2147	54	21	4	4	NUM
ap-2147	54	22	in	in	ADP
ap-2147	54	23	table	table	NOUN
ap-2147	54	24	1	1	NUM
ap-2147	54	25	)	)	PUNCT
ap-2147	54	26	.	.	PUNCT
ap-2147	55	1	321	321	NUM
ap-2147	55	2	m.	m.	NOUN
ap-2147	55	3	domonkos	domonkos	PROPN
ap-2147	55	4	,	,	PUNCT
ap-2147	55	5	t.	t.	PROPN
ap-2147	55	6	ižák	ižák	PROPN
ap-2147	55	7	,	,	PUNCT
ap-2147	55	8	l.	l.	PROPN
ap-2147	55	9	štolcová	štolcová	PROPN
ap-2147	55	10	et	et	PROPN
ap-2147	55	11	al	al	PROPN
ap-2147	55	12	.	.	PROPN
ap-2147	55	13	acta	acta	PROPN
ap-2147	55	14	polytechnica	polytechnica	PROPN
ap-2147	55	15	figure	figure	NOUN
ap-2147	55	16	2	2	NUM
ap-2147	55	17	.	.	X
ap-2147	55	18	top	top	ADJ
ap-2147	55	19	-	-	PUNCT
ap-2147	55	20	view	view	NOUN
ap-2147	55	21	sem	sem	NOUN
ap-2147	55	22	and	and	CCONJ
ap-2147	55	23	afm	afm	PROPN
ap-2147	55	24	(	(	PUNCT
ap-2147	55	25	2	2	NUM
ap-2147	55	26	×	×	NOUN
ap-2147	55	27	2	2	NUM
ap-2147	55	28	µm	µm	NOUN
ap-2147	55	29	)	)	PUNCT
ap-2147	55	30	images	image	NOUN
ap-2147	55	31	of	of	ADP
ap-2147	55	32	a	a	PRON
ap-2147	55	33	)	)	PUNCT
ap-2147	55	34	,	,	PUNCT
ap-2147	55	35	c	c	X
ap-2147	55	36	)	)	PUNCT
ap-2147	55	37	mcd	mcd	NOUN
ap-2147	55	38	and	and	CCONJ
ap-2147	55	39	b	b	NOUN
ap-2147	55	40	)	)	PUNCT
ap-2147	55	41	,	,	PUNCT
ap-2147	55	42	d	d	X
ap-2147	55	43	)	)	PUNCT
ap-2147	55	44	ncd	ncd	PROPN
ap-2147	55	45	diamond	diamond	PROPN
ap-2147	55	46	thin	thin	ADJ
ap-2147	55	47	films	film	NOUN
ap-2147	55	48	before	before	SCONJ
ap-2147	55	49	the	the	DET
ap-2147	55	50	mask	mask	NOUN
ap-2147	55	51	was	be	AUX
ap-2147	55	52	prepared	prepare	VERB
ap-2147	55	53	.	.	PUNCT
ap-2147	56	1	figure	figure	VERB
ap-2147	56	2	3	3	NUM
ap-2147	56	3	.	.	PUNCT
ap-2147	56	4	raman	raman	ADJ
ap-2147	56	5	spectra	spectra	NOUN
ap-2147	56	6	of	of	ADP
ap-2147	56	7	a	a	DET
ap-2147	56	8	)	)	PUNCT
ap-2147	56	9	mcd	mcd	NOUN
ap-2147	56	10	and	and	CCONJ
ap-2147	56	11	b	b	X
ap-2147	56	12	)	)	PUNCT
ap-2147	56	13	ncd	ncd	PROPN
ap-2147	56	14	films	film	NOUN
ap-2147	56	15	measured	measure	VERB
ap-2147	56	16	by	by	ADP
ap-2147	56	17	an	an	DET
ap-2147	56	18	excitation	excitation	NOUN
ap-2147	56	19	wavelength	wavelength	NOUN
ap-2147	56	20	of	of	ADP
ap-2147	56	21	325	325	NUM
ap-2147	56	22	nm	nm	NOUN
ap-2147	56	23	.	.	PUNCT
ap-2147	57	1	the	the	DET
ap-2147	57	2	plasma	plasma	NOUN
ap-2147	57	3	parameters	parameter	NOUN
ap-2147	57	4	were	be	AUX
ap-2147	57	5	chosen	choose	VERB
ap-2147	57	6	on	on	ADP
ap-2147	57	7	the	the	DET
ap-2147	57	8	basis	basis	NOUN
ap-2147	57	9	of	of	ADP
ap-2147	57	10	our	our	PRON
ap-2147	57	11	previous	previous	ADJ
ap-2147	57	12	study	study	NOUN
ap-2147	57	13	on	on	ADP
ap-2147	57	14	ps	ps	PROPN
ap-2147	57	15	and	and	CCONJ
ap-2147	57	16	diamond	diamond	NOUN
ap-2147	57	17	etching	etch	VERB
ap-2147	57	18	[	[	X
ap-2147	57	19	9	9	NUM
ap-2147	57	20	,	,	PUNCT
ap-2147	57	21	10	10	NUM
ap-2147	57	22	]	]	PUNCT
ap-2147	57	23	.	.	PUNCT
ap-2147	58	1	the	the	DET
ap-2147	58	2	samples	sample	NOUN
ap-2147	58	3	were	be	AUX
ap-2147	58	4	systematically	systematically	ADV
ap-2147	58	5	characterized	characterize	VERB
ap-2147	58	6	after	after	ADP
ap-2147	58	7	each	each	DET
ap-2147	58	8	technological	technological	ADJ
ap-2147	58	9	step	step	NOUN
ap-2147	58	10	.	.	PUNCT
ap-2147	59	1	the	the	DET
ap-2147	59	2	morphology	morphology	NOUN
ap-2147	59	3	of	of	ADP
ap-2147	59	4	the	the	DET
ap-2147	59	5	cvd	cvd	PROPN
ap-2147	59	6	grown	grow	VERB
ap-2147	59	7	and	and	CCONJ
ap-2147	59	8	plasma	plasma	NOUN
ap-2147	59	9	etched	etch	VERB
ap-2147	59	10	samples	sample	NOUN
ap-2147	59	11	was	be	AUX
ap-2147	59	12	characterized	characterize	VERB
ap-2147	59	13	by	by	ADP
ap-2147	59	14	scanning	scan	VERB
ap-2147	59	15	electron	electron	NOUN
ap-2147	59	16	microscopy	microscopy	NOUN
ap-2147	59	17	(	(	PUNCT
ap-2147	59	18	sem	sem	NOUN
ap-2147	59	19	,	,	PUNCT
ap-2147	59	20	e_line	e_line	NOUN
ap-2147	59	21	writer	writer	NOUN
ap-2147	59	22	,	,	PUNCT
ap-2147	59	23	raith	raith	PROPN
ap-2147	59	24	gmbh	gmbh	PROPN
ap-2147	59	25	)	)	PUNCT
ap-2147	59	26	and	and	CCONJ
ap-2147	59	27	with	with	ADP
ap-2147	59	28	the	the	DET
ap-2147	59	29	use	use	NOUN
ap-2147	59	30	of	of	ADP
ap-2147	59	31	an	an	DET
ap-2147	59	32	atomic	atomic	ADJ
ap-2147	59	33	force	force	NOUN
ap-2147	59	34	microscope	microscope	NOUN
ap-2147	59	35	(	(	PUNCT
ap-2147	59	36	veeco	veeco	PROPN
ap-2147	59	37	dimension	dimension	PROPN
ap-2147	59	38	3100	3100	NUM
ap-2147	59	39	,	,	PUNCT
ap-2147	59	40	ntmdt	ntmdt	PROPN
ap-2147	59	41	ntegra	ntegra	PROPN
ap-2147	59	42	)	)	PUNCT
ap-2147	59	43	.	.	PUNCT
ap-2147	60	1	raman	raman	NOUN
ap-2147	60	2	spectroscopy	spectroscopy	NOUN
ap-2147	60	3	(	(	PUNCT
ap-2147	60	4	renishaw	renishaw	ADJ
ap-2147	60	5	invia	invia	X
ap-2147	60	6	reflex	reflex	NOUN
ap-2147	60	7	)	)	PUNCT
ap-2147	60	8	with	with	ADP
ap-2147	60	9	an	an	DET
ap-2147	60	10	excitation	excitation	NOUN
ap-2147	60	11	wavelength	wavelength	NOUN
ap-2147	60	12	of	of	ADP
ap-2147	60	13	325	325	NUM
ap-2147	60	14	nm	nm	NOUN
ap-2147	60	15	was	be	AUX
ap-2147	60	16	employed	employ	VERB
ap-2147	60	17	to	to	PART
ap-2147	60	18	determine	determine	VERB
ap-2147	60	19	the	the	DET
ap-2147	60	20	chemical	chemical	NOUN
ap-2147	60	21	character	character	NOUN
ap-2147	60	22	(	(	PUNCT
ap-2147	60	23	i.e.	i.e.	X
ap-2147	60	24	sp3	sp3	ADJ
ap-2147	60	25	versus	versus	ADP
ap-2147	60	26	sp2	sp2	NOUN
ap-2147	60	27	carbon	carbon	NOUN
ap-2147	60	28	bonds	bond	NOUN
ap-2147	60	29	)	)	PUNCT
ap-2147	60	30	of	of	ADP
ap-2147	60	31	the	the	DET
ap-2147	60	32	diamond	diamond	NOUN
ap-2147	60	33	films	film	NOUN
ap-2147	60	34	.	.	PUNCT
ap-2147	61	1	3	3	X
ap-2147	61	2	.	.	NOUN
ap-2147	61	3	results	result	NOUN
ap-2147	61	4	and	and	CCONJ
ap-2147	61	5	discussions	discussion	NOUN
ap-2147	61	6	figure	figure	NOUN
ap-2147	61	7	2	2	NUM
ap-2147	61	8	shows	show	VERB
ap-2147	61	9	the	the	DET
ap-2147	61	10	surface	surface	NOUN
ap-2147	61	11	morphology	morphology	NOUN
ap-2147	61	12	and	and	CCONJ
ap-2147	61	13	the	the	DET
ap-2147	61	14	topography	topography	NOUN
ap-2147	61	15	of	of	ADP
ap-2147	61	16	the	the	DET
ap-2147	61	17	diamond	diamond	NOUN
ap-2147	61	18	films	film	NOUN
ap-2147	61	19	before	before	SCONJ
ap-2147	61	20	the	the	DET
ap-2147	61	21	mask	mask	NOUN
ap-2147	61	22	was	be	AUX
ap-2147	61	23	prepared	prepare	VERB
ap-2147	61	24	,	,	PUNCT
ap-2147	61	25	taken	take	VERB
ap-2147	61	26	by	by	ADP
ap-2147	61	27	scanning	scan	VERB
ap-2147	61	28	electron	electron	NOUN
ap-2147	61	29	microscopy	microscopy	NOUN
ap-2147	61	30	.	.	PUNCT
ap-2147	62	1	the	the	DET
ap-2147	62	2	diamond	diamond	NOUN
ap-2147	62	3	film	film	NOUN
ap-2147	62	4	with	with	ADP
ap-2147	62	5	larger	large	ADJ
ap-2147	62	6	grain	grain	NOUN
ap-2147	62	7	sizes	size	NOUN
ap-2147	62	8	(	(	PUNCT
ap-2147	62	9	∼	∼	NOUN
ap-2147	62	10	1	1	NUM
ap-2147	62	11	µm	µm	NOUN
ap-2147	62	12	)	)	PUNCT
ap-2147	62	13	was	be	AUX
ap-2147	62	14	labelled	label	VERB
ap-2147	62	15	as	as	ADP
ap-2147	62	16	mcd	mcd	NOUN
ap-2147	62	17	(	(	PUNCT
ap-2147	62	18	microcrystalline	microcrystalline	NOUN
ap-2147	62	19	,	,	PUNCT
ap-2147	62	20	fig	fig	NOUN
ap-2147	62	21	.	.	PUNCT
ap-2147	62	22	2a	2a	NUM
ap-2147	62	23	)	)	PUNCT
ap-2147	62	24	,	,	PUNCT
ap-2147	62	25	and	and	CCONJ
ap-2147	62	26	the	the	DET
ap-2147	62	27	diamond	diamond	NOUN
ap-2147	62	28	film	film	NOUN
ap-2147	62	29	with	with	ADP
ap-2147	62	30	smaller	small	ADJ
ap-2147	62	31	grain	grain	NOUN
ap-2147	62	32	sizes	size	NOUN
ap-2147	62	33	(	(	PUNCT
ap-2147	62	34	<	<	X
ap-2147	62	35	50	50	NUM
ap-2147	62	36	nm	nm	NOUN
ap-2147	62	37	)	)	PUNCT
ap-2147	62	38	was	be	AUX
ap-2147	62	39	labelled	label	VERB
ap-2147	62	40	as	as	ADP
ap-2147	62	41	ncd	ncd	PROPN
ap-2147	62	42	(	(	PUNCT
ap-2147	62	43	nanocrystalline	nanocrystalline	PROPN
ap-2147	62	44	,	,	PUNCT
ap-2147	62	45	fig	fig	NOUN
ap-2147	62	46	.	.	PUNCT
ap-2147	63	1	2a	2a	NUM
ap-2147	63	2	)	)	PUNCT
ap-2147	63	3	.	.	PUNCT
ap-2147	64	1	both	both	DET
ap-2147	64	2	diamond	diamond	NOUN
ap-2147	64	3	films	film	NOUN
ap-2147	64	4	were	be	AUX
ap-2147	64	5	about	about	ADV
ap-2147	64	6	3	3	NUM
ap-2147	64	7	µm	µm	NOUN
ap-2147	64	8	in	in	ADP
ap-2147	64	9	thickness	thickness	NOUN
ap-2147	64	10	.	.	PUNCT
ap-2147	65	1	figure	figure	NOUN
ap-2147	65	2	2c	2c	NUM
ap-2147	65	3	,	,	PUNCT
ap-2147	65	4	d	d	PROPN
ap-2147	65	5	shows	show	VERB
ap-2147	65	6	the	the	DET
ap-2147	65	7	3d	3d	PROPN
ap-2147	65	8	topography	topography	NOUN
ap-2147	65	9	of	of	ADP
ap-2147	65	10	the	the	DET
ap-2147	65	11	diamond	diamond	NOUN
ap-2147	65	12	films	film	NOUN
ap-2147	65	13	(	(	PUNCT
ap-2147	65	14	before	before	SCONJ
ap-2147	65	15	the	the	DET
ap-2147	65	16	mask	mask	NOUN
ap-2147	65	17	was	be	AUX
ap-2147	65	18	prepared	prepare	VERB
ap-2147	65	19	)	)	PUNCT
ap-2147	65	20	,	,	PUNCT
ap-2147	65	21	provided	provide	VERB
ap-2147	65	22	by	by	ADP
ap-2147	65	23	an	an	DET
ap-2147	65	24	atomic	atomic	ADJ
ap-2147	65	25	force	force	NOUN
ap-2147	65	26	microscope	microscope	NOUN
ap-2147	65	27	(	(	PUNCT
ap-2147	65	28	afm	afm	PROPN
ap-2147	65	29	)	)	PUNCT
ap-2147	65	30	.	.	PUNCT
ap-2147	66	1	the	the	DET
ap-2147	66	2	raman	raman	ADJ
ap-2147	66	3	spectra	spectra	NOUN
ap-2147	66	4	clearly	clearly	ADV
ap-2147	66	5	confirmed	confirm	VERB
ap-2147	66	6	the	the	DET
ap-2147	66	7	diamond	diamond	NOUN
ap-2147	66	8	character	character	NOUN
ap-2147	66	9	in	in	ADP
ap-2147	66	10	both	both	DET
ap-2147	66	11	films	film	NOUN
ap-2147	66	12	(	(	PUNCT
ap-2147	66	13	fig	fig	NOUN
ap-2147	66	14	.	.	PUNCT
ap-2147	67	1	4a	4a	NOUN
ap-2147	67	2	,	,	PUNCT
ap-2147	67	3	b	b	NOUN
ap-2147	67	4	)	)	PUNCT
ap-2147	67	5	.	.	PUNCT
ap-2147	68	1	for	for	ADP
ap-2147	68	2	the	the	DET
ap-2147	68	3	mcd	mcd	NOUN
ap-2147	68	4	film	film	NOUN
ap-2147	68	5	,	,	PUNCT
ap-2147	68	6	the	the	DET
ap-2147	68	7	spectrum	spectrum	NOUN
ap-2147	68	8	is	be	AUX
ap-2147	68	9	dominated	dominate	VERB
ap-2147	68	10	by	by	ADP
ap-2147	68	11	a	a	DET
ap-2147	68	12	sharp	sharp	ADJ
ap-2147	68	13	peak	peak	NOUN
ap-2147	68	14	located	locate	VERB
ap-2147	68	15	at	at	ADP
ap-2147	68	16	1332	1332	NUM
ap-2147	68	17	cm−1	cm−1	NOUN
ap-2147	68	18	,	,	PUNCT
ap-2147	68	19	which	which	PRON
ap-2147	68	20	is	be	AUX
ap-2147	68	21	the	the	DET
ap-2147	68	22	characteristic	characteristic	ADJ
ap-2147	68	23	line	line	NOUN
ap-2147	68	24	for	for	ADP
ap-2147	68	25	the	the	DET
ap-2147	68	26	phonon	phonon	NOUN
ap-2147	68	27	mode	mode	NOUN
ap-2147	68	28	of	of	ADP
ap-2147	68	29	the	the	DET
ap-2147	68	30	sp3	sp3	ADJ
ap-2147	68	31	crystalline	crystalline	NOUN
ap-2147	68	32	diamond	diamond	NOUN
ap-2147	68	33	phase	phase	NOUN
ap-2147	68	34	.	.	PUNCT
ap-2147	69	1	two	two	NUM
ap-2147	69	2	broad	broad	ADJ
ap-2147	69	3	bands	band	NOUN
ap-2147	69	4	located	locate	VERB
ap-2147	69	5	at	at	ADP
ap-2147	69	6	frequencies	frequency	NOUN
ap-2147	69	7	∼	∼	VERB
ap-2147	69	8	1374	1374	NUM
ap-2147	69	9	cm−1	cm−1	NOUN
ap-2147	69	10	and	and	CCONJ
ap-2147	69	11	∼	∼	NOUN
ap-2147	69	12	1575	1575	NUM
ap-2147	69	13	cm−1	cm−1	NOUN
ap-2147	69	14	are	be	AUX
ap-2147	69	15	attributed	attribute	VERB
ap-2147	69	16	to	to	ADP
ap-2147	69	17	the	the	DET
ap-2147	69	18	d	d	NOUN
ap-2147	69	19	-	-	NOUN
ap-2147	69	20	band	band	NOUN
ap-2147	69	21	(	(	PUNCT
ap-2147	69	22	defects	defect	NOUN
ap-2147	69	23	)	)	PUNCT
ap-2147	69	24	and	and	CCONJ
ap-2147	69	25	to	to	ADP
ap-2147	69	26	the	the	DET
ap-2147	69	27	g	g	NOUN
ap-2147	69	28	-	-	PUNCT
ap-2147	69	29	band	band	NOUN
ap-2147	69	30	(	(	PUNCT
ap-2147	69	31	graphite	graphite	NOUN
ap-2147	69	32	)	)	PUNCT
ap-2147	69	33	,	,	PUNCT
ap-2147	69	34	which	which	PRON
ap-2147	69	35	represents	represent	VERB
ap-2147	69	36	the	the	DET
ap-2147	69	37	non	non	ADJ
ap-2147	69	38	-	-	ADJ
ap-2147	69	39	diamond	diamond	ADJ
ap-2147	69	40	carbon	carbon	NOUN
ap-2147	69	41	bonds	bond	NOUN
ap-2147	69	42	(	(	PUNCT
ap-2147	69	43	sp2	sp2	NOUN
ap-2147	69	44	phase	phase	NOUN
ap-2147	69	45	)	)	PUNCT
ap-2147	69	46	.	.	PUNCT
ap-2147	70	1	a	a	DET
ap-2147	70	2	weak	weak	ADJ
ap-2147	70	3	band	band	NOUN
ap-2147	70	4	centered	center	VERB
ap-2147	70	5	at	at	ADP
ap-2147	70	6	∼	∼	NOUN
ap-2147	70	7	1154	1154	NUM
ap-2147	70	8	cm−1	cm−1	NOUN
ap-2147	70	9	corresponds	correspond	VERB
ap-2147	70	10	to	to	ADP
ap-2147	70	11	the	the	DET
ap-2147	70	12	trans	trans	ADJ
ap-2147	70	13	-	-	ADJ
ap-2147	70	14	polyacetylene	polyacetylene	ADJ
ap-2147	70	15	-	-	PUNCT
ap-2147	70	16	like	like	ADJ
ap-2147	70	17	groups	group	NOUN
ap-2147	70	18	at	at	ADP
ap-2147	70	19	the	the	DET
ap-2147	70	20	grain	grain	NOUN
ap-2147	70	21	boundaries	boundary	NOUN
ap-2147	70	22	[	[	X
ap-2147	70	23	11	11	NUM
ap-2147	70	24	]	]	PUNCT
ap-2147	70	25	.	.	PUNCT
ap-2147	71	1	this	this	DET
ap-2147	71	2	band	band	NOUN
ap-2147	71	3	is	be	AUX
ap-2147	71	4	more	more	ADV
ap-2147	71	5	intensive	intensive	ADJ
ap-2147	71	6	for	for	ADP
ap-2147	71	7	ncd	ncd	PROPN
ap-2147	71	8	films	film	NOUN
ap-2147	71	9	,	,	PUNCT
ap-2147	71	10	where	where	SCONJ
ap-2147	71	11	the	the	DET
ap-2147	71	12	crystals	crystal	NOUN
ap-2147	71	13	are	be	AUX
ap-2147	71	14	much	much	ADV
ap-2147	71	15	smaller	small	ADJ
ap-2147	71	16	,	,	PUNCT
ap-2147	71	17	and	and	CCONJ
ap-2147	71	18	more	more	ADJ
ap-2147	71	19	sp2	sp2	NOUN
ap-2147	71	20	carbon	carbon	NOUN
ap-2147	71	21	bonds	bond	NOUN
ap-2147	71	22	are	be	AUX
ap-2147	71	23	present	present	ADJ
ap-2147	71	24	at	at	ADP
ap-2147	71	25	grain	grain	NOUN
ap-2147	71	26	boundaries	boundary	NOUN
ap-2147	71	27	.	.	PUNCT
ap-2147	72	1	thus	thus	ADV
ap-2147	72	2	,	,	PUNCT
ap-2147	72	3	322	322	NUM
ap-2147	72	4	vol	vol	NOUN
ap-2147	72	5	.	.	PUNCT
ap-2147	73	1	54	54	NUM
ap-2147	73	2	no	no	NOUN
ap-2147	73	3	.	.	PUNCT
ap-2147	74	1	5/2014	5/2014	NUM
ap-2147	74	2	structuring	structuring	NOUN
ap-2147	74	3	of	of	ADP
ap-2147	74	4	diamond	diamond	NOUN
ap-2147	74	5	films	film	NOUN
ap-2147	74	6	using	use	VERB
ap-2147	74	7	microsphere	microsphere	PROPN
ap-2147	74	8	lithography	lithography	NOUN
ap-2147	74	9	figure	figure	NOUN
ap-2147	74	10	4	4	NUM
ap-2147	74	11	.	.	PUNCT
ap-2147	74	12	tilted	tilt	VERB
ap-2147	74	13	-	-	PUNCT
ap-2147	74	14	angle	angle	NOUN
ap-2147	74	15	view	view	NOUN
ap-2147	74	16	(	(	PUNCT
ap-2147	74	17	45	45	NUM
ap-2147	74	18	°	°	NUM
ap-2147	74	19	)	)	PUNCT
ap-2147	74	20	sem	sem	NOUN
ap-2147	74	21	images	image	NOUN
ap-2147	74	22	of	of	ADP
ap-2147	74	23	etched	etch	VERB
ap-2147	74	24	mcd	mcd	NOUN
ap-2147	74	25	diamond	diamond	NOUN
ap-2147	74	26	films	film	NOUN
ap-2147	74	27	(	(	PUNCT
ap-2147	74	28	columns	column	NOUN
ap-2147	74	29	1	1	NUM
ap-2147	74	30	,	,	PUNCT
ap-2147	74	31	2	2	NUM
ap-2147	74	32	)	)	PUNCT
ap-2147	74	33	and	and	CCONJ
ap-2147	74	34	ncd	ncd	PROPN
ap-2147	74	35	diamond	diamond	NOUN
ap-2147	74	36	films	film	NOUN
ap-2147	74	37	(	(	PUNCT
ap-2147	74	38	columns	column	NOUN
ap-2147	74	39	3	3	NUM
ap-2147	74	40	,	,	PUNCT
ap-2147	74	41	4	4	NUM
ap-2147	74	42	)	)	PUNCT
ap-2147	74	43	prepared	prepare	VERB
ap-2147	74	44	using	use	VERB
ap-2147	74	45	a	a	DET
ap-2147	74	46	ps	ps	PROPN
ap-2147	74	47	microsphere	microsphere	NOUN
ap-2147	74	48	mask	mask	NOUN
ap-2147	74	49	(	(	PUNCT
ap-2147	74	50	ps	ps	PROPN
ap-2147	74	51	1500	1500	NUM
ap-2147	74	52	nm	nm	NOUN
ap-2147	74	53	)	)	PUNCT
ap-2147	74	54	by	by	ADP
ap-2147	74	55	etching	etch	VERB
ap-2147	74	56	in	in	ADP
ap-2147	74	57	oxygen	oxygen	NOUN
ap-2147	74	58	plasma	plasma	NOUN
ap-2147	74	59	(	(	PUNCT
ap-2147	74	60	a	a	PRON
ap-2147	74	61	,	,	PUNCT
ap-2147	74	62	c	c	NOUN
ap-2147	74	63	,	,	PUNCT
ap-2147	74	64	e	e	NOUN
ap-2147	74	65	,	,	PUNCT
ap-2147	74	66	g	g	NOUN
ap-2147	74	67	)	)	PUNCT
ap-2147	74	68	and	and	CCONJ
ap-2147	74	69	with	with	ADP
ap-2147	74	70	the	the	DET
ap-2147	74	71	addition	addition	NOUN
ap-2147	74	72	of	of	ADP
ap-2147	74	73	cf4	cf4	PROPN
ap-2147	74	74	(	(	PUNCT
ap-2147	74	75	b	b	X
ap-2147	74	76	,	,	PUNCT
ap-2147	74	77	d	d	PROPN
ap-2147	74	78	,	,	PUNCT
ap-2147	74	79	f	f	PROPN
ap-2147	74	80	,	,	PUNCT
ap-2147	74	81	h	h	NOUN
ap-2147	74	82	)	)	PUNCT
ap-2147	74	83	.	.	PUNCT
ap-2147	75	1	(	(	PUNCT
ap-2147	75	2	note	note	VERB
ap-2147	75	3	:	:	PUNCT
ap-2147	75	4	the	the	DET
ap-2147	75	5	upper	upper	ADJ
ap-2147	75	6	row	row	NOUN
ap-2147	75	7	and	and	CCONJ
ap-2147	75	8	the	the	DET
ap-2147	75	9	bottom	bottom	NOUN
ap-2147	75	10	row	row	NOUN
ap-2147	75	11	differ	differ	VERB
ap-2147	75	12	only	only	ADV
ap-2147	75	13	in	in	ADP
ap-2147	75	14	magnification	magnification	NOUN
ap-2147	75	15	)	)	PUNCT
ap-2147	75	16	.	.	PUNCT
ap-2147	76	1	the	the	DET
ap-2147	76	2	intensity	intensity	NOUN
ap-2147	76	3	of	of	ADP
ap-2147	76	4	the	the	DET
ap-2147	76	5	g	g	NOUN
ap-2147	76	6	-	-	PUNCT
ap-2147	76	7	band	band	NOUN
ap-2147	76	8	increases	increase	NOUN
ap-2147	76	9	and	and	CCONJ
ap-2147	76	10	the	the	DET
ap-2147	76	11	intensity	intensity	NOUN
ap-2147	76	12	of	of	ADP
ap-2147	76	13	the	the	DET
ap-2147	76	14	diamond	diamond	NOUN
ap-2147	76	15	-	-	PUNCT
ap-2147	76	16	peak	peak	NOUN
ap-2147	76	17	(	(	PUNCT
ap-2147	76	18	at	at	ADP
ap-2147	76	19	1332	1332	NUM
ap-2147	76	20	cm−1	cm−1	NOUN
ap-2147	76	21	)	)	PUNCT
ap-2147	76	22	decreases	decrease	VERB
ap-2147	76	23	,	,	PUNCT
ap-2147	76	24	but	but	CCONJ
ap-2147	76	25	it	it	PRON
ap-2147	76	26	is	be	AUX
ap-2147	76	27	still	still	ADV
ap-2147	76	28	resolvable	resolvable	ADJ
ap-2147	76	29	in	in	ADP
ap-2147	76	30	the	the	DET
ap-2147	76	31	raman	raman	NOUN
ap-2147	76	32	spectrum	spectrum	NOUN
ap-2147	76	33	.	.	PUNCT
ap-2147	77	1	right	right	INTJ
ap-2147	77	2	at	at	ADP
ap-2147	77	3	the	the	DET
ap-2147	77	4	beginning	beginning	NOUN
ap-2147	77	5	of	of	ADP
ap-2147	77	6	the	the	DET
ap-2147	77	7	plasma	plasma	NOUN
ap-2147	77	8	treatment	treatment	NOUN
ap-2147	77	9	(	(	PUNCT
ap-2147	77	10	step	step	NOUN
ap-2147	77	11	2a	2a	NUM
ap-2147	77	12	in	in	ADP
ap-2147	77	13	table	table	NOUN
ap-2147	77	14	1	1	NUM
ap-2147	77	15	)	)	PUNCT
ap-2147	77	16	we	we	PRON
ap-2147	77	17	observed	observe	VERB
ap-2147	77	18	homogeneous	homogeneous	ADJ
ap-2147	77	19	etching	etching	NOUN
ap-2147	77	20	of	of	ADP
ap-2147	77	21	ps	ps	PROPN
ap-2147	77	22	over	over	ADP
ap-2147	77	23	the	the	DET
ap-2147	77	24	whole	whole	ADJ
ap-2147	77	25	sample	sample	NOUN
ap-2147	77	26	.	.	PUNCT
ap-2147	78	1	the	the	DET
ap-2147	78	2	close	close	ADV
ap-2147	78	3	-	-	PUNCT
ap-2147	78	4	packed	pack	VERB
ap-2147	78	5	arrays	array	NOUN
ap-2147	78	6	of	of	ADP
ap-2147	78	7	ps	ps	PROPN
ap-2147	78	8	microspheres	microsphere	NOUN
ap-2147	78	9	were	be	AUX
ap-2147	78	10	converted	convert	VERB
ap-2147	78	11	into	into	ADP
ap-2147	78	12	a	a	DET
ap-2147	78	13	non	non	ADJ
ap-2147	78	14	-	-	ADJ
ap-2147	78	15	closepacked	closepacke	VERB
ap-2147	78	16	template	template	NOUN
ap-2147	78	17	with	with	ADP
ap-2147	78	18	the	the	DET
ap-2147	78	19	preserved	preserve	VERB
ap-2147	78	20	period	period	NOUN
ap-2147	78	21	of	of	ADP
ap-2147	78	22	the	the	DET
ap-2147	78	23	initial	initial	NOUN
ap-2147	78	24	microsphere	microsphere	AUX
ap-2147	78	25	array	array	VERB
ap-2147	78	26	(	(	PUNCT
ap-2147	78	27	not	not	PART
ap-2147	78	28	shown	show	VERB
ap-2147	78	29	here	here	ADV
ap-2147	78	30	)	)	PUNCT
ap-2147	79	1	[	[	X
ap-2147	79	2	10	10	NUM
ap-2147	79	3	]	]	PUNCT
ap-2147	79	4	.	.	PUNCT
ap-2147	80	1	the	the	DET
ap-2147	80	2	surface	surface	NOUN
ap-2147	80	3	morphology	morphology	NOUN
ap-2147	80	4	of	of	ADP
ap-2147	80	5	the	the	DET
ap-2147	80	6	diamond	diamond	NOUN
ap-2147	80	7	films	film	NOUN
ap-2147	80	8	after	after	ADP
ap-2147	80	9	the	the	DET
ap-2147	80	10	ccp	ccp	PROPN
ap-2147	80	11	-	-	PUNCT
ap-2147	80	12	rie	rie	ADJ
ap-2147	80	13	processes	process	NOUN
ap-2147	80	14	(	(	PUNCT
ap-2147	80	15	step	step	NOUN
ap-2147	80	16	2a	2a	NUM
ap-2147	80	17	and	and	CCONJ
ap-2147	80	18	2b	2b	NOUN
ap-2147	80	19	,	,	PUNCT
ap-2147	80	20	table	table	NOUN
ap-2147	80	21	1	1	NUM
ap-2147	80	22	)	)	PUNCT
ap-2147	80	23	is	be	AUX
ap-2147	80	24	shown	show	VERB
ap-2147	80	25	in	in	ADP
ap-2147	80	26	figure	figure	NOUN
ap-2147	80	27	4	4	NUM
ap-2147	80	28	.	.	PUNCT
ap-2147	80	29	periodic	periodic	ADJ
ap-2147	80	30	hillock	hillock	NOUN
ap-2147	80	31	-	-	PUNCT
ap-2147	80	32	like	like	ADJ
ap-2147	80	33	structures	structure	NOUN
ap-2147	80	34	with	with	ADP
ap-2147	80	35	a	a	DET
ap-2147	80	36	period	period	NOUN
ap-2147	80	37	of	of	ADP
ap-2147	80	38	∼	∼	NOUN
ap-2147	80	39	1500	1500	NUM
ap-2147	80	40	nm	nm	NOUN
ap-2147	80	41	were	be	AUX
ap-2147	80	42	observed	observe	VERB
ap-2147	80	43	.	.	PUNCT
ap-2147	81	1	their	their	PRON
ap-2147	81	2	height	height	NOUN
ap-2147	81	3	was	be	AUX
ap-2147	81	4	estimated	estimate	VERB
ap-2147	81	5	from	from	ADP
ap-2147	81	6	the	the	DET
ap-2147	81	7	afm	afm	PROPN
ap-2147	81	8	image	image	NOUN
ap-2147	81	9	to	to	PART
ap-2147	81	10	be	be	AUX
ap-2147	81	11	∼	∼	NOUN
ap-2147	81	12	600	600	NUM
ap-2147	81	13	nm	nm	NOUN
ap-2147	81	14	for	for	ADP
ap-2147	81	15	mcd	mcd	NOUN
ap-2147	81	16	and	and	CCONJ
ap-2147	81	17	∼	∼	NOUN
ap-2147	81	18	800	800	NUM
ap-2147	81	19	nm	nm	NOUN
ap-2147	81	20	for	for	ADP
ap-2147	81	21	ncd	ncd	PROPN
ap-2147	81	22	.	.	PUNCT
ap-2147	82	1	the	the	DET
ap-2147	82	2	fabricated	fabricate	VERB
ap-2147	82	3	hillock	hillock	NOUN
ap-2147	82	4	-	-	PUNCT
ap-2147	82	5	like	like	ADJ
ap-2147	82	6	features	feature	NOUN
ap-2147	82	7	were	be	AUX
ap-2147	82	8	better	well	ADV
ap-2147	82	9	recognized	recognize	VERB
ap-2147	82	10	(	(	PUNCT
ap-2147	82	11	i.e.	i.e.	X
ap-2147	82	12	their	their	PRON
ap-2147	82	13	geometrical	geometrical	ADJ
ap-2147	82	14	border	border	NOUN
ap-2147	82	15	was	be	AUX
ap-2147	82	16	better	well	ADV
ap-2147	82	17	defined	define	VERB
ap-2147	82	18	)	)	PUNCT
ap-2147	82	19	for	for	ADP
ap-2147	82	20	the	the	DET
ap-2147	82	21	ncd	ncd	PROPN
ap-2147	82	22	films	film	NOUN
ap-2147	82	23	.	.	PUNCT
ap-2147	83	1	this	this	PRON
ap-2147	83	2	is	be	AUX
ap-2147	83	3	attributed	attribute	VERB
ap-2147	83	4	to	to	ADP
ap-2147	83	5	the	the	DET
ap-2147	83	6	nanocrystalline	nanocrystalline	ADJ
ap-2147	83	7	character	character	NOUN
ap-2147	83	8	itself	itself	PRON
ap-2147	83	9	.	.	PUNCT
ap-2147	84	1	in	in	ADP
ap-2147	84	2	the	the	DET
ap-2147	84	3	case	case	NOUN
ap-2147	84	4	of	of	ADP
ap-2147	84	5	mcd	mcd	NOUN
ap-2147	84	6	films	film	NOUN
ap-2147	84	7	,	,	PUNCT
ap-2147	84	8	the	the	DET
ap-2147	84	9	fabricated	fabricate	VERB
ap-2147	84	10	structures	structure	NOUN
ap-2147	84	11	reveal	reveal	VERB
ap-2147	84	12	non	non	ADJ
ap-2147	84	13	sharp	sharp	ADJ
ap-2147	84	14	edges	edge	NOUN
ap-2147	84	15	(	(	PUNCT
ap-2147	84	16	borders	border	NOUN
ap-2147	84	17	)	)	PUNCT
ap-2147	84	18	,	,	PUNCT
ap-2147	84	19	which	which	PRON
ap-2147	84	20	we	we	PRON
ap-2147	84	21	assign	assign	VERB
ap-2147	84	22	to	to	ADP
ap-2147	84	23	the	the	DET
ap-2147	84	24	different	different	ADJ
ap-2147	84	25	etching	etch	VERB
ap-2147	84	26	rates	rate	NOUN
ap-2147	84	27	for	for	ADP
ap-2147	84	28	each	each	DET
ap-2147	84	29	crystal	crystal	NOUN
ap-2147	84	30	facet	facet	NOUN
ap-2147	84	31	of	of	ADP
ap-2147	84	32	the	the	DET
ap-2147	84	33	diamond	diamond	NOUN
ap-2147	84	34	.	.	PUNCT
ap-2147	85	1	this	this	PRON
ap-2147	85	2	means	mean	VERB
ap-2147	85	3	that	that	SCONJ
ap-2147	85	4	the	the	DET
ap-2147	85	5	(	(	PUNCT
ap-2147	85	6	111	111	NUM
ap-2147	85	7	)	)	PUNCT
ap-2147	85	8	facets	facet	NOUN
ap-2147	85	9	were	be	AUX
ap-2147	85	10	etched	etch	VERB
ap-2147	85	11	at	at	ADP
ap-2147	85	12	different	different	ADJ
ap-2147	85	13	rates	rate	NOUN
ap-2147	85	14	than	than	ADP
ap-2147	85	15	the	the	DET
ap-2147	85	16	(	(	PUNCT
ap-2147	85	17	100	100	NUM
ap-2147	85	18	)	)	PUNCT
ap-2147	85	19	oriented	orient	VERB
ap-2147	85	20	diamond	diamond	NOUN
ap-2147	85	21	crystals	crystal	NOUN
ap-2147	85	22	,	,	PUNCT
ap-2147	85	23	etc	etc	X
ap-2147	85	24	.	.	X
ap-2147	86	1	[	[	X
ap-2147	86	2	12	12	NUM
ap-2147	86	3	]	]	PUNCT
ap-2147	86	4	.	.	PUNCT
ap-2147	87	1	the	the	DET
ap-2147	87	2	mcd	mcd	PROPN
ap-2147	87	3	films	film	NOUN
ap-2147	87	4	consist	consist	VERB
ap-2147	87	5	of	of	ADP
ap-2147	87	6	randomly	randomly	ADV
ap-2147	87	7	and	and	CCONJ
ap-2147	87	8	well	well	ADV
ap-2147	87	9	faceted	facete	VERB
ap-2147	87	10	crystals	crystal	NOUN
ap-2147	87	11	and	and	CCONJ
ap-2147	87	12	the	the	DET
ap-2147	87	13	surface	surface	NOUN
ap-2147	87	14	roughness	roughness	NOUN
ap-2147	87	15	is	be	AUX
ap-2147	87	16	higher	high	ADJ
ap-2147	87	17	for	for	ADP
ap-2147	87	18	the	the	DET
ap-2147	87	19	thicker	thick	ADJ
ap-2147	87	20	films	film	NOUN
ap-2147	87	21	.	.	PUNCT
ap-2147	88	1	from	from	ADP
ap-2147	88	2	this	this	DET
ap-2147	88	3	point	point	NOUN
ap-2147	88	4	of	of	ADP
ap-2147	88	5	view	view	NOUN
ap-2147	88	6	,	,	PUNCT
ap-2147	88	7	the	the	DET
ap-2147	88	8	ncd	ncd	PROPN
ap-2147	88	9	films	film	NOUN
ap-2147	88	10	do	do	AUX
ap-2147	88	11	not	not	PART
ap-2147	88	12	reveal	reveal	VERB
ap-2147	88	13	such	such	ADJ
ap-2147	88	14	dependences	dependence	NOUN
ap-2147	88	15	or	or	CCONJ
ap-2147	88	16	nonhomogenities	nonhomogenitie	NOUN
ap-2147	88	17	on	on	ADP
ap-2147	88	18	the	the	DET
ap-2147	88	19	microscopic	microscopic	ADJ
ap-2147	88	20	scale	scale	NOUN
ap-2147	88	21	,	,	PUNCT
ap-2147	88	22	i.e.	i.e.	X
ap-2147	88	23	the	the	DET
ap-2147	88	24	grain	grain	NOUN
ap-2147	88	25	size	size	NOUN
ap-2147	88	26	and	and	CCONJ
ap-2147	88	27	the	the	DET
ap-2147	88	28	surface	surface	NOUN
ap-2147	88	29	roughness	roughness	NOUN
ap-2147	88	30	do	do	AUX
ap-2147	88	31	not	not	PART
ap-2147	88	32	vary	vary	VERB
ap-2147	88	33	with	with	ADP
ap-2147	88	34	the	the	DET
ap-2147	88	35	film	film	NOUN
ap-2147	88	36	thickness	thickness	NOUN
ap-2147	88	37	.	.	PUNCT
ap-2147	89	1	the	the	DET
ap-2147	89	2	surface	surface	NOUN
ap-2147	89	3	of	of	ADP
ap-2147	89	4	the	the	DET
ap-2147	89	5	etched	etched	ADJ
ap-2147	89	6	mcd	mcd	NOUN
ap-2147	89	7	and	and	CCONJ
ap-2147	89	8	ncd	ncd	PROPN
ap-2147	89	9	films	film	NOUN
ap-2147	89	10	in	in	ADP
ap-2147	89	11	pure	pure	ADJ
ap-2147	89	12	oxygen	oxygen	NOUN
ap-2147	89	13	plasma	plasma	NOUN
ap-2147	89	14	(	(	PUNCT
ap-2147	89	15	columns	column	NOUN
ap-2147	89	16	1	1	NUM
ap-2147	89	17	and	and	CCONJ
ap-2147	89	18	3	3	NUM
ap-2147	89	19	of	of	ADP
ap-2147	89	20	fig	fig	NOUN
ap-2147	89	21	.	.	PUNCT
ap-2147	90	1	4	4	NUM
ap-2147	90	2	)	)	PUNCT
ap-2147	90	3	corresponds	correspond	VERB
ap-2147	90	4	well	well	ADV
ap-2147	90	5	to	to	ADP
ap-2147	90	6	our	our	PRON
ap-2147	90	7	previous	previous	ADJ
ap-2147	90	8	studies	study	NOUN
ap-2147	90	9	[	[	X
ap-2147	90	10	9	9	NUM
ap-2147	90	11	]	]	PUNCT
ap-2147	90	12	.	.	PUNCT
ap-2147	91	1	rie	rie	PROPN
ap-2147	91	2	etching	etch	VERB
ap-2147	91	3	in	in	ADP
ap-2147	91	4	o2	o2	PROPN
ap-2147	91	5	led	lead	VERB
ap-2147	91	6	to	to	ADP
ap-2147	91	7	the	the	DET
ap-2147	91	8	formation	formation	NOUN
ap-2147	91	9	of	of	ADP
ap-2147	91	10	diamond	diamond	NOUN
ap-2147	91	11	needle	needle	NOUN
ap-2147	91	12	-	-	PUNCT
ap-2147	91	13	like	like	ADJ
ap-2147	91	14	structures	structure	NOUN
ap-2147	91	15	(	(	PUNCT
ap-2147	91	16	or	or	CCONJ
ap-2147	91	17	so	so	ADV
ap-2147	91	18	-	-	PUNCT
ap-2147	91	19	called	call	VERB
ap-2147	91	20	whiskers	whisker	NOUN
ap-2147	91	21	)	)	PUNCT
ap-2147	91	22	.	.	PUNCT
ap-2147	92	1	the	the	DET
ap-2147	92	2	main	main	ADJ
ap-2147	92	3	reason	reason	NOUN
ap-2147	92	4	for	for	ADP
ap-2147	92	5	this	this	DET
ap-2147	92	6	effect	effect	NOUN
ap-2147	92	7	is	be	AUX
ap-2147	92	8	that	that	SCONJ
ap-2147	92	9	the	the	DET
ap-2147	92	10	ions	ion	NOUN
ap-2147	92	11	are	be	AUX
ap-2147	92	12	vertically	vertically	ADV
ap-2147	92	13	accelerated	accelerate	VERB
ap-2147	92	14	to	to	ADP
ap-2147	92	15	the	the	DET
ap-2147	92	16	substrate	substrate	NOUN
ap-2147	92	17	and	and	CCONJ
ap-2147	92	18	not	not	PART
ap-2147	92	19	only	only	ADV
ap-2147	92	20	chemical	chemical	NOUN
ap-2147	92	21	etching	etch	VERB
ap-2147	92	22	but	but	CCONJ
ap-2147	92	23	also	also	ADV
ap-2147	92	24	physical	physical	ADJ
ap-2147	92	25	sputtering	sputtering	NOUN
ap-2147	92	26	takes	take	VERB
ap-2147	92	27	place	place	NOUN
ap-2147	92	28	.	.	PUNCT
ap-2147	93	1	moreover	moreover	ADV
ap-2147	93	2	,	,	PUNCT
ap-2147	93	3	it	it	PRON
ap-2147	93	4	is	be	AUX
ap-2147	93	5	well	well	ADV
ap-2147	93	6	-	-	PUNCT
ap-2147	93	7	known	know	VERB
ap-2147	93	8	that	that	SCONJ
ap-2147	93	9	oxygen	oxygen	NOUN
ap-2147	93	10	etches	etche	NOUN
ap-2147	93	11	sp3	sp3	NOUN
ap-2147	93	12	diamond	diamond	NOUN
ap-2147	93	13	bonds	bond	NOUN
ap-2147	93	14	much	much	ADV
ap-2147	93	15	faster	fast	ADV
ap-2147	93	16	than	than	ADP
ap-2147	93	17	sp2	sp2	NOUN
ap-2147	93	18	carbon	carbon	NOUN
ap-2147	93	19	bonds	bond	NOUN
ap-2147	93	20	[	[	X
ap-2147	93	21	13	13	NUM
ap-2147	93	22	]	]	PUNCT
ap-2147	93	23	,	,	PUNCT
ap-2147	93	24	resulting	result	VERB
ap-2147	93	25	in	in	ADP
ap-2147	93	26	the	the	DET
ap-2147	93	27	formation	formation	NOUN
ap-2147	93	28	of	of	ADP
ap-2147	93	29	needle	needle	NOUN
ap-2147	93	30	-	-	PUNCT
ap-2147	93	31	like	like	ADJ
ap-2147	93	32	structures	structure	NOUN
ap-2147	93	33	.	.	PUNCT
ap-2147	94	1	in	in	ADP
ap-2147	94	2	ncd	ncd	PROPN
ap-2147	94	3	films	film	NOUN
ap-2147	94	4	,	,	PUNCT
ap-2147	94	5	more	more	ADJ
ap-2147	94	6	sp2	sp2	NOUN
ap-2147	94	7	carbon	carbon	NOUN
ap-2147	94	8	bonds	bond	NOUN
ap-2147	94	9	at	at	ADP
ap-2147	94	10	the	the	DET
ap-2147	94	11	grain	grain	NOUN
ap-2147	94	12	boundaries	boundary	NOUN
ap-2147	94	13	correspond	correspond	VERB
ap-2147	94	14	to	to	ADP
ap-2147	94	15	the	the	DET
ap-2147	94	16	formation	formation	NOUN
ap-2147	94	17	of	of	ADP
ap-2147	94	18	needle	needle	NOUN
ap-2147	94	19	-	-	PUNCT
ap-2147	94	20	like	like	ADJ
ap-2147	94	21	structures	structure	NOUN
ap-2147	94	22	[	[	X
ap-2147	94	23	14].however	14].however	PROPN
ap-2147	94	24	,	,	PUNCT
ap-2147	94	25	the	the	DET
ap-2147	94	26	addition	addition	NOUN
ap-2147	94	27	of	of	ADP
ap-2147	94	28	cf4	cf4	PROPN
ap-2147	94	29	into	into	ADP
ap-2147	94	30	o2	o2	PROPN
ap-2147	94	31	resulted	result	VERB
ap-2147	94	32	in	in	ADP
ap-2147	94	33	flattening	flattening	NOUN
ap-2147	94	34	/	/	SYM
ap-2147	94	35	smoothing	smoothing	NOUN
ap-2147	94	36	of	of	ADP
ap-2147	94	37	the	the	DET
ap-2147	94	38	diamond	diamond	NOUN
ap-2147	94	39	surface	surface	NOUN
ap-2147	94	40	.	.	PUNCT
ap-2147	95	1	4	4	X
ap-2147	95	2	.	.	X
ap-2147	95	3	conclusion	conclusion	NOUN
ap-2147	95	4	in	in	ADP
ap-2147	95	5	summary	summary	NOUN
ap-2147	95	6	,	,	PUNCT
ap-2147	95	7	we	we	PRON
ap-2147	95	8	have	have	AUX
ap-2147	95	9	demonstrated	demonstrate	VERB
ap-2147	95	10	that	that	SCONJ
ap-2147	95	11	microsphere	microsphere	AUX
ap-2147	95	12	lithography	lithography	NOUN
ap-2147	95	13	is	be	AUX
ap-2147	95	14	a	a	DET
ap-2147	95	15	promising	promising	ADJ
ap-2147	95	16	technique	technique	NOUN
ap-2147	95	17	for	for	ADP
ap-2147	95	18	structuring	structure	VERB
ap-2147	95	19	diamond	diamond	NOUN
ap-2147	95	20	thin	thin	ADJ
ap-2147	95	21	films	film	NOUN
ap-2147	95	22	in	in	ADP
ap-2147	95	23	the	the	DET
ap-2147	95	24	so	so	ADV
ap-2147	95	25	-	-	PUNCT
ap-2147	95	26	called	call	VERB
ap-2147	95	27	top	top	ADJ
ap-2147	95	28	-	-	PUNCT
ap-2147	95	29	down	down	ADP
ap-2147	95	30	strategy	strategy	NOUN
ap-2147	95	31	.	.	PUNCT
ap-2147	96	1	diamond	diamond	NOUN
ap-2147	96	2	films	film	NOUN
ap-2147	96	3	were	be	AUX
ap-2147	96	4	grown	grow	VERB
ap-2147	96	5	using	use	VERB
ap-2147	96	6	a	a	DET
ap-2147	96	7	focused	focused	ADJ
ap-2147	96	8	microwave	microwave	NOUN
ap-2147	96	9	plasma	plasma	NOUN
ap-2147	96	10	cvd	cvd	PROPN
ap-2147	96	11	process	process	NOUN
ap-2147	96	12	,	,	PUNCT
ap-2147	96	13	and	and	CCONJ
ap-2147	96	14	their	their	PRON
ap-2147	96	15	crystallographic	crystallographic	ADJ
ap-2147	96	16	character	character	NOUN
ap-2147	96	17	was	be	AUX
ap-2147	96	18	controlled	control	VERB
ap-2147	96	19	by	by	ADP
ap-2147	96	20	the	the	DET
ap-2147	96	21	gas	gas	NOUN
ap-2147	96	22	mixture	mixture	NOUN
ap-2147	96	23	that	that	PRON
ap-2147	96	24	was	be	AUX
ap-2147	96	25	used	use	VERB
ap-2147	96	26	.	.	PUNCT
ap-2147	97	1	the	the	DET
ap-2147	97	2	mcd	mcd	PROPN
ap-2147	97	3	films	film	NOUN
ap-2147	97	4	were	be	AUX
ap-2147	97	5	grown	grow	VERB
ap-2147	97	6	from	from	ADP
ap-2147	97	7	a	a	DET
ap-2147	97	8	co2	co2	NOUN
ap-2147	97	9	+	+	CCONJ
ap-2147	97	10	ch4	ch4	NOUN
ap-2147	97	11	+	+	CCONJ
ap-2147	97	12	h2	h2	NOUN
ap-2147	97	13	gas	gas	NOUN
ap-2147	97	14	mixture	mixture	NOUN
ap-2147	97	15	,	,	PUNCT
ap-2147	97	16	and	and	CCONJ
ap-2147	97	17	the	the	DET
ap-2147	97	18	ncd	ncd	PROPN
ap-2147	97	19	films	film	NOUN
ap-2147	97	20	were	be	AUX
ap-2147	97	21	grown	grow	VERB
ap-2147	97	22	from	from	ADP
ap-2147	97	23	a	a	DET
ap-2147	97	24	n2	n2	NOUN
ap-2147	97	25	+	+	CCONJ
ap-2147	97	26	cf4	cf4	ADJ
ap-2147	97	27	+	+	CCONJ
ap-2147	97	28	h2	h2	NOUN
ap-2147	97	29	gas	gas	NOUN
ap-2147	97	30	mixture	mixture	NOUN
ap-2147	97	31	.	.	PUNCT
ap-2147	98	1	self	self	NOUN
ap-2147	98	2	-	-	PUNCT
ap-2147	98	3	assembled	assemble	VERB
ap-2147	98	4	,	,	PUNCT
ap-2147	98	5	hexagonally	hexagonally	ADV
ap-2147	98	6	close	close	ADJ
ap-2147	98	7	packed	packed	ADJ
ap-2147	98	8	ps	ps	NOUN
ap-2147	98	9	microsphere	microsphere	NOUN
ap-2147	98	10	arrays	array	NOUN
ap-2147	98	11	obtained	obtain	VERB
ap-2147	98	12	by	by	ADP
ap-2147	98	13	the	the	DET
ap-2147	98	14	langmuir	langmuir	PROPN
ap-2147	98	15	-	-	PUNCT
ap-2147	98	16	blodgett	blodgett	PROPN
ap-2147	98	17	method	method	PROPN
ap-2147	98	18	were	be	AUX
ap-2147	98	19	used	use	VERB
ap-2147	98	20	as	as	ADP
ap-2147	98	21	the	the	DET
ap-2147	98	22	masking	masking	NOUN
ap-2147	98	23	material	material	NOUN
ap-2147	98	24	.	.	PUNCT
ap-2147	99	1	first	first	ADV
ap-2147	99	2	,	,	PUNCT
ap-2147	99	3	the	the	DET
ap-2147	99	4	ps	ps	NOUN
ap-2147	99	5	layer	layer	NOUN
ap-2147	99	6	was	be	AUX
ap-2147	99	7	treated	treat	VERB
ap-2147	99	8	in	in	ADP
ap-2147	99	9	plasma	plasma	NOUN
ap-2147	99	10	to	to	PART
ap-2147	99	11	predefine	predefine	VERB
ap-2147	99	12	the	the	DET
ap-2147	99	13	final	final	ADJ
ap-2147	99	14	geometry	geometry	NOUN
ap-2147	99	15	of	of	ADP
ap-2147	99	16	the	the	DET
ap-2147	99	17	diamond	diamond	NOUN
ap-2147	99	18	structures	structure	NOUN
ap-2147	99	19	.	.	PUNCT
ap-2147	100	1	during	during	ADP
ap-2147	100	2	continued	continue	VERB
ap-2147	100	3	plasma	plasma	NOUN
ap-2147	100	4	etching	etch	VERB
ap-2147	100	5	,	,	PUNCT
ap-2147	100	6	the	the	DET
ap-2147	100	7	primary	primary	ADJ
ap-2147	100	8	ps	ps	NOUN
ap-2147	100	9	were	be	AUX
ap-2147	100	10	removed	remove	VERB
ap-2147	100	11	.	.	PUNCT
ap-2147	101	1	using	use	VERB
ap-2147	101	2	this	this	DET
ap-2147	101	3	cost	cost	NOUN
ap-2147	101	4	-	-	PUNCT
ap-2147	101	5	effective	effective	ADJ
ap-2147	101	6	and	and	CCONJ
ap-2147	101	7	time	time	NOUN
ap-2147	101	8	-	-	PUNCT
ap-2147	101	9	efficient	efficient	ADJ
ap-2147	101	10	method	method	NOUN
ap-2147	101	11	,	,	PUNCT
ap-2147	101	12	highly	highly	ADV
ap-2147	101	13	periodic	periodic	ADJ
ap-2147	101	14	and	and	CCONJ
ap-2147	101	15	homogeneous	homogeneous	ADJ
ap-2147	101	16	hillock	hillock	NOUN
ap-2147	101	17	-	-	PUNCT
ap-2147	101	18	like	like	ADJ
ap-2147	101	19	structures	structure	NOUN
ap-2147	101	20	were	be	AUX
ap-2147	101	21	achieved	achieve	VERB
ap-2147	101	22	both	both	PRON
ap-2147	101	23	for	for	ADP
ap-2147	101	24	mcd	mcd	NOUN
ap-2147	101	25	films	film	NOUN
ap-2147	101	26	and	and	CCONJ
ap-2147	101	27	for	for	ADP
ap-2147	101	28	ncd	ncd	PROPN
ap-2147	101	29	films	film	NOUN
ap-2147	101	30	.	.	PUNCT
ap-2147	102	1	it	it	PRON
ap-2147	102	2	is	be	AUX
ap-2147	102	3	believed	believe	VERB
ap-2147	102	4	that	that	SCONJ
ap-2147	102	5	diamond	diamond	NOUN
ap-2147	102	6	structures	structure	NOUN
ap-2147	102	7	fabricated	fabricate	VERB
ap-2147	102	8	over	over	ADP
ap-2147	102	9	large	large	ADJ
ap-2147	102	10	areas	area	NOUN
ap-2147	102	11	will	will	AUX
ap-2147	102	12	have	have	VERB
ap-2147	102	13	a	a	DET
ap-2147	102	14	positive	positive	ADJ
ap-2147	102	15	impact	impact	NOUN
ap-2147	102	16	on	on	ADP
ap-2147	102	17	their	their	PRON
ap-2147	102	18	further	further	ADJ
ap-2147	102	19	applications	application	NOUN
ap-2147	102	20	as	as	ADP
ap-2147	102	21	photonic	photonic	ADJ
ap-2147	102	22	crystals	crystal	NOUN
ap-2147	102	23	in	in	ADP
ap-2147	102	24	optics	optic	NOUN
ap-2147	102	25	or	or	CCONJ
ap-2147	102	26	as	as	ADP
ap-2147	102	27	active	active	ADJ
ap-2147	102	28	functional	functional	ADJ
ap-2147	102	29	surfaces	surface	NOUN
ap-2147	102	30	in	in	ADP
ap-2147	102	31	sensorics	sensoric	NOUN
ap-2147	102	32	,	,	PUNCT
ap-2147	102	33	bioelectronics	bioelectronic	NOUN
ap-2147	102	34	,	,	PUNCT
ap-2147	102	35	biomedicine	biomedicine	NOUN
ap-2147	102	36	and	and	CCONJ
ap-2147	102	37	electrochemistry	electrochemistry	NOUN
ap-2147	102	38	.	.	PUNCT
ap-2147	103	1	323	323	NUM
ap-2147	103	2	m.	m.	NOUN
ap-2147	103	3	domonkos	domonkos	PROPN
ap-2147	103	4	,	,	PUNCT
ap-2147	103	5	t.	t.	PROPN
ap-2147	103	6	ižák	ižák	PROPN
ap-2147	103	7	,	,	PUNCT
ap-2147	103	8	l.	l.	PROPN
ap-2147	103	9	štolcová	štolcová	PROPN
ap-2147	103	10	et	et	PROPN
ap-2147	103	11	al	al	PROPN
ap-2147	103	12	.	.	PROPN
ap-2147	104	1	acta	acta	PROPN
ap-2147	104	2	polytechnica	polytechnica	PROPN
ap-2147	104	3	acknowledgements	acknowledgement	NOUN
ap-2147	104	4	this	this	DET
ap-2147	104	5	work	work	NOUN
ap-2147	104	6	was	be	AUX
ap-2147	104	7	supported	support	VERB
ap-2147	104	8	by	by	ADP
ap-2147	104	9	grants	grant	NOUN
ap-2147	104	10	from	from	ADP
ap-2147	104	11	the	the	DET
ap-2147	104	12	czech	czech	PROPN
ap-2147	104	13	science	science	NOUN
ap-2147	104	14	foundation	foundation	NOUN
ap-2147	104	15	p108/12	p108/12	PROPN
ap-2147	104	16	/	/	SYM
ap-2147	104	17	g108	g108	PROPN
ap-2147	104	18	(	(	PUNCT
ap-2147	104	19	t.	t.	PROPN
ap-2147	104	20	i.	i.	PROPN
ap-2147	104	21	,	,	PUNCT
ap-2147	104	22	a.	a.	PROPN
ap-2147	104	23	k.	k.	PROPN
ap-2147	104	24	)	)	PUNCT
ap-2147	104	25	.	.	PUNCT
ap-2147	105	1	the	the	DET
ap-2147	105	2	work	work	NOUN
ap-2147	105	3	was	be	AUX
ap-2147	105	4	carried	carry	VERB
ap-2147	105	5	out	out	ADP
ap-2147	105	6	in	in	ADP
ap-2147	105	7	the	the	DET
ap-2147	105	8	framework	framework	NOUN
ap-2147	105	9	of	of	ADP
ap-2147	105	10	the	the	DET
ap-2147	105	11	lnsm	lnsm	PROPN
ap-2147	105	12	infrastructure	infrastructure	NOUN
ap-2147	105	13	.	.	PUNCT
ap-2147	106	1	references	reference	NOUN
ap-2147	106	2	[	[	X
ap-2147	106	3	1	1	NUM
ap-2147	106	4	]	]	X
ap-2147	106	5	bundy	bundy	NOUN
ap-2147	106	6	,	,	PUNCT
ap-2147	106	7	f.p	f.p	PROPN
ap-2147	106	8	.	.	PROPN
ap-2147	106	9	et	et	PROPN
ap-2147	106	10	al	al	PROPN
ap-2147	106	11	.	.	PUNCT
ap-2147	106	12	:	:	PUNCT
ap-2147	107	1	man	man	NOUN
ap-2147	107	2	-	-	PUNCT
ap-2147	107	3	made	make	VERB
ap-2147	107	4	diamonds	diamond	NOUN
ap-2147	107	5	.	.	PUNCT
ap-2147	108	1	nature	nature	NOUN
ap-2147	108	2	,	,	PUNCT
ap-2147	108	3	176	176	NUM
ap-2147	108	4	,	,	PUNCT
ap-2147	108	5	1955	1955	NUM
ap-2147	108	6	,	,	PUNCT
ap-2147	108	7	pp	pp	ADP
ap-2147	108	8	.	.	PUNCT
ap-2147	109	1	51–54	51–54	NUM
ap-2147	109	2	.	.	PUNCT
ap-2147	109	3	doi:10.1038/176051a0	doi:10.1038/176051a0	PUNCT
ap-2147	110	1	[	[	X
ap-2147	110	2	2	2	NUM
ap-2147	110	3	]	]	PUNCT
ap-2147	110	4	may	may	AUX
ap-2147	110	5	,	,	PUNCT
ap-2147	110	6	p.w	p.w	PROPN
ap-2147	110	7	.	.	PUNCT
ap-2147	110	8	:	:	PUNCT
ap-2147	110	9	diamond	diamond	VERB
ap-2147	110	10	thin	thin	ADJ
ap-2147	110	11	films	film	NOUN
ap-2147	110	12	:	:	PUNCT
ap-2147	110	13	a	a	DET
ap-2147	110	14	21st	21st	ADJ
ap-2147	110	15	-	-	PUNCT
ap-2147	110	16	century	century	NOUN
ap-2147	110	17	material	material	NOUN
ap-2147	110	18	.	.	PUNCT
ap-2147	111	1	philos	philos	PROPN
ap-2147	111	2	.	.	PUNCT
ap-2147	112	1	trans	trans	PROPN
ap-2147	112	2	.	.	PUNCT
ap-2147	112	3	r.	r.	PROPN
ap-2147	112	4	soc	soc	PROPN
ap-2147	112	5	.	.	PUNCT
ap-2147	113	1	lond	lond	PROPN
ap-2147	113	2	.	.	PUNCT
ap-2147	114	1	ser	ser	PROPN
ap-2147	114	2	.	.	PROPN
ap-2147	114	3	math	math	NOUN
ap-2147	114	4	.	.	PUNCT
ap-2147	115	1	phys	phy	NOUN
ap-2147	115	2	.	.	PUNCT
ap-2147	116	1	eng	eng	PROPN
ap-2147	116	2	.	.	PUNCT
ap-2147	117	1	sci	sci	PROPN
ap-2147	117	2	.	.	PROPN
ap-2147	117	3	,	,	PUNCT
ap-2147	117	4	358	358	NUM
ap-2147	117	5	(	(	PUNCT
ap-2147	117	6	1766	1766	NUM
ap-2147	117	7	)	)	PUNCT
ap-2147	117	8	,	,	PUNCT
ap-2147	117	9	2000	2000	NUM
ap-2147	117	10	,	,	PUNCT
ap-2147	117	11	pp	pp	ADJ
ap-2147	117	12	.	.	PUNCT
ap-2147	118	1	473–495	473–495	NUM
ap-2147	118	2	.	.	PUNCT
ap-2147	119	1	doi:10.1038/176051a0	doi:10.1038/176051a0	VERB
ap-2147	120	1	[	[	X
ap-2147	120	2	3	3	NUM
ap-2147	120	3	]	]	X
ap-2147	120	4	koizumi	koizumi	PROPN
ap-2147	120	5	,	,	PUNCT
ap-2147	120	6	s.	s.	PROPN
ap-2147	120	7	et	et	PROPN
ap-2147	120	8	al	al	PROPN
ap-2147	120	9	.	.	PROPN
ap-2147	120	10	:	:	PUNCT
ap-2147	120	11	physics	physics	NOUN
ap-2147	120	12	and	and	CCONJ
ap-2147	120	13	applications	application	NOUN
ap-2147	120	14	of	of	ADP
ap-2147	120	15	cvd	cvd	PROPN
ap-2147	120	16	diamond	diamond	PROPN
ap-2147	120	17	.	.	PUNCT
ap-2147	121	1	weinheim	weinheim	PROPN
ap-2147	121	2	:	:	PUNCT
ap-2147	121	3	wiley	wiley	PROPN
ap-2147	121	4	-	-	PUNCT
ap-2147	121	5	vch	vch	PROPN
ap-2147	121	6	,	,	PUNCT
ap-2147	121	7	2008	2008	NUM
ap-2147	121	8	.	.	PUNCT
ap-2147	122	1	doi:10.1002/9783527623174	doi:10.1002/9783527623174	PUNCT
ap-2147	123	1	[	[	X
ap-2147	123	2	4	4	NUM
ap-2147	123	3	]	]	PUNCT
ap-2147	123	4	babchenko	babchenko	NOUN
ap-2147	123	5	,	,	PUNCT
ap-2147	123	6	o.	o.	PROPN
ap-2147	123	7	et	et	PROPN
ap-2147	123	8	al	al	PROPN
ap-2147	123	9	.	.	PROPN
ap-2147	123	10	:	:	PUNCT
ap-2147	124	1	nanostructuring	nanostructure	VERB
ap-2147	124	2	of	of	ADP
ap-2147	124	3	diamond	diamond	NOUN
ap-2147	124	4	films	film	NOUN
ap-2147	124	5	using	use	VERB
ap-2147	124	6	self	self	NOUN
ap-2147	124	7	-	-	PUNCT
ap-2147	124	8	assembled	assemble	VERB
ap-2147	124	9	nanoparticles	nanoparticle	NOUN
ap-2147	124	10	.	.	PUNCT
ap-2147	125	1	cent	cent	NOUN
ap-2147	125	2	.	.	PUNCT
ap-2147	126	1	eur	eur	PROPN
ap-2147	126	2	.	.	PUNCT
ap-2147	127	1	j.	j.	PROPN
ap-2147	127	2	phys	phys	PROPN
ap-2147	127	3	.	.	PUNCT
ap-2147	127	4	,	,	PUNCT
ap-2147	127	5	7	7	NUM
ap-2147	127	6	(	(	PUNCT
ap-2147	127	7	2	2	NUM
ap-2147	127	8	)	)	PUNCT
ap-2147	127	9	,	,	PUNCT
ap-2147	127	10	2009	2009	NUM
ap-2147	127	11	,	,	PUNCT
ap-2147	127	12	pp	pp	ADV
ap-2147	127	13	.	.	PUNCT
ap-2147	128	1	310–314	310–314	NUM
ap-2147	128	2	.	.	PUNCT
ap-2147	128	3	doi:10.2478	doi:10.2478	PROPN
ap-2147	128	4	/	/	SYM
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ap-2147	128	8	-	-	PUNCT
ap-2147	128	9	0026	0026	NUM
ap-2147	128	10	-	-	SYM
ap-2147	128	11	8	8	NUM
ap-2147	129	1	[	[	SYM
ap-2147	129	2	5	5	NUM
ap-2147	129	3	]	]	X
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ap-2147	129	8	al	al	PROPN
ap-2147	129	9	.	.	PUNCT
ap-2147	129	10	:	:	PUNCT
ap-2147	130	1	icp	icp	PROPN
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ap-2147	130	4	polycrystalline	polycrystalline	ADJ
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ap-2147	130	6	:	:	PUNCT
ap-2147	130	7	fabrication	fabrication	NOUN
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ap-2147	130	9	diamond	diamond	NOUN
ap-2147	130	10	nano	nano	NOUN
ap-2147	130	11	-	-	PUNCT
ap-2147	130	12	tips	tip	NOUN
ap-2147	130	13	for	for	ADP
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ap-2147	130	15	cantilevers	cantilever	NOUN
ap-2147	130	16	.	.	PUNCT
ap-2147	131	1	diam	diam	PROPN
ap-2147	131	2	.	.	PUNCT
ap-2147	131	3	relat	relat	PROPN
ap-2147	131	4	.	.	PUNCT
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ap-2147	132	7	-	-	SYM
ap-2147	132	8	5	5	NUM
ap-2147	132	9	)	)	PUNCT
ap-2147	132	10	,	,	PUNCT
ap-2147	132	11	2008	2008	NUM
ap-2147	132	12	,	,	PUNCT
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ap-2147	132	14	.	.	PUNCT
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ap-2147	133	2	.	.	PUNCT
ap-2147	134	1	doi:10.1016	doi:10.1016	PROPN
ap-2147	134	2	/	/	SYM
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ap-2147	135	1	[	[	X
ap-2147	135	2	6	6	NUM
ap-2147	135	3	]	]	SYM
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ap-2147	135	5	,	,	PUNCT
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ap-2147	136	3	:	:	PUNCT
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ap-2147	137	2	approach	approach	NOUN
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ap-2147	137	4	time	time	NOUN
ap-2147	137	5	lag	lag	VERB
ap-2147	137	6	in	in	ADP
ap-2147	137	7	binary	binary	ADJ
ap-2147	137	8	nucleation	nucleation	NOUN
ap-2147	137	9	.	.	PUNCT
ap-2147	138	1	phys	phy	NOUN
ap-2147	138	2	.	.	PUNCT
ap-2147	139	1	rev	rev	PROPN
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ap-2147	140	1	e	e	X
ap-2147	140	2	,	,	PUNCT
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ap-2147	140	4	(	(	PUNCT
ap-2147	140	5	5	5	NUM
ap-2147	140	6	)	)	PUNCT
ap-2147	140	7	,	,	PUNCT
ap-2147	140	8	1999	1999	NUM
ap-2147	140	9	,	,	PUNCT
ap-2147	140	10	pp	pp	ADP
ap-2147	140	11	.	.	PUNCT
ap-2147	141	1	5124–5127	5124–5127	ADV
ap-2147	141	2	.	.	PUNCT
ap-2147	141	3	doi:10.1103	doi:10.1103	PROPN
ap-2147	141	4	/	/	SYM
ap-2147	141	5	physreve.59.5124	physreve.59.5124	NOUN
ap-2147	141	6	[	[	X
ap-2147	141	7	7	7	NUM
ap-2147	141	8	]	]	PUNCT
ap-2147	141	9	babchenko	babchenko	NOUN
ap-2147	141	10	,	,	PUNCT
ap-2147	141	11	o.	o.	PROPN
ap-2147	141	12	et	et	PROPN
ap-2147	141	13	al	al	PROPN
ap-2147	141	14	.	.	PROPN
ap-2147	141	15	:	:	PUNCT
ap-2147	142	1	toward	toward	ADP
ap-2147	142	2	surface	surface	NOUN
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ap-2147	142	8	layer	layer	NOUN
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ap-2147	142	11	-	-	PUNCT
ap-2147	142	12	area	area	NOUN
ap-2147	142	13	diamond	diamond	NOUN
ap-2147	142	14	growth	growth	NOUN
ap-2147	142	15	.	.	PUNCT
ap-2147	143	1	phys	phy	NOUN
ap-2147	143	2	.	.	PUNCT
ap-2147	144	1	status	status	PROPN
ap-2147	144	2	solidi	solidi	PROPN
ap-2147	144	3	b	b	PROPN
ap-2147	144	4	,	,	PUNCT
ap-2147	144	5	247	247	NUM
ap-2147	144	6	(	(	PUNCT
ap-2147	144	7	11	11	NUM
ap-2147	144	8	-	-	SYM
ap-2147	144	9	12	12	NUM
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ap-2147	144	11	,	,	PUNCT
ap-2147	144	12	2010	2010	NUM
ap-2147	144	13	,	,	PUNCT
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ap-2147	144	15	.	.	PUNCT
ap-2147	144	16	3026–3029	3026–3029	NUM
ap-2147	144	17	.	.	PUNCT
ap-2147	145	1	doi:10.1002	doi:10.1002	NOUN
ap-2147	145	2	/	/	SYM
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ap-2147	147	2	8	8	NUM
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ap-2147	147	5	,	,	PUNCT
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ap-2147	147	7	et	et	PROPN
ap-2147	147	8	al	al	PROPN
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ap-2147	147	10	:	:	PUNCT
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ap-2147	148	4	metal	metal	NOUN
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ap-2147	148	6	as	as	ADP
ap-2147	148	7	sers	ser	NOUN
ap-2147	148	8	-	-	ADJ
ap-2147	148	9	active	active	ADJ
ap-2147	148	10	substrates	substrate	NOUN
ap-2147	148	11	.	.	PUNCT
ap-2147	149	1	nanocon	nanocon	NOUN
ap-2147	149	2	2011	2011	NUM
ap-2147	149	3	.	.	PUNCT
ap-2147	150	1	brno	brno	NOUN
ap-2147	150	2	:	:	PUNCT
ap-2147	150	3	tanger	tanger	PROPN
ap-2147	150	4	,	,	PUNCT
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ap-2147	150	6	,	,	PUNCT
ap-2147	150	7	pp	pp	ADJ
ap-2147	150	8	.	.	PUNCT
ap-2147	151	1	737–741	737–741	NUM
ap-2147	151	2	.	.	PUNCT
ap-2147	152	1	[	[	X
ap-2147	152	2	9	9	NUM
ap-2147	152	3	]	]	X
ap-2147	152	4	domonkos	domonkos	ADJ
ap-2147	152	5	,	,	PUNCT
ap-2147	152	6	m.	m.	NOUN
ap-2147	152	7	et	et	PROPN
ap-2147	152	8	al	al	PROPN
ap-2147	152	9	.	.	PROPN
ap-2147	152	10	:	:	PUNCT
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ap-2147	152	12	-	-	PUNCT
ap-2147	152	13	free	free	ADJ
ap-2147	152	14	surface	surface	NOUN
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ap-2147	152	18	nanocrystalline	nanocrystalline	PROPN
ap-2147	152	19	diamond	diamond	PROPN
ap-2147	152	20	films	film	NOUN
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ap-2147	152	22	reactive	reactive	ADJ
ap-2147	152	23	ion	ion	NOUN
ap-2147	152	24	plasma	plasma	NOUN
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ap-2147	152	26	.	.	PUNCT
ap-2147	153	1	adv	adv	PROPN
ap-2147	153	2	.	.	PUNCT
ap-2147	154	1	sci	sci	PROPN
ap-2147	154	2	.	.	PUNCT
ap-2147	155	1	eng	eng	PROPN
ap-2147	155	2	.	.	PROPN
ap-2147	155	3	med	med	PROPN
ap-2147	155	4	.	.	PROPN
ap-2147	155	5	,	,	PUNCT
ap-2147	155	6	6	6	NUM
ap-2147	155	7	(	(	PUNCT
ap-2147	155	8	7	7	NUM
ap-2147	155	9	)	)	PUNCT
ap-2147	155	10	,	,	PUNCT
ap-2147	155	11	2014	2014	NUM
ap-2147	155	12	,	,	PUNCT
ap-2147	155	13	pp	pp	ADJ
ap-2147	155	14	.	.	PUNCT
ap-2147	156	1	780–784	780–784	NUM
ap-2147	156	2	.	.	PUNCT
ap-2147	156	3	doi:10.1166	doi:10.1166	PROPN
ap-2147	156	4	/	/	SYM
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ap-2147	156	7	10	10	NUM
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ap-2147	156	10	,	,	PUNCT
ap-2147	156	11	m.	m.	NOUN
ap-2147	156	12	et	et	PROPN
ap-2147	156	13	al	al	PROPN
ap-2147	156	14	.	.	PROPN
ap-2147	156	15	:	:	PUNCT
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ap-2147	157	2	structuring	structuring	NOUN
ap-2147	157	3	of	of	ADP
ap-2147	157	4	self	self	NOUN
ap-2147	157	5	-	-	PUNCT
ap-2147	157	6	assembled	assemble	VERB
ap-2147	157	7	polystyrene	polystyrene	NOUN
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ap-2147	157	9	arrays	array	VERB
ap-2147	157	10	by	by	ADP
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ap-2147	157	12	different	different	ADJ
ap-2147	157	13	plasma	plasma	NOUN
ap-2147	157	14	systems	system	NOUN
ap-2147	157	15	.	.	PUNCT
ap-2147	158	1	nanocon	nanocon	NOUN
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ap-2147	158	3	.	.	PUNCT
ap-2147	159	1	brno	brno	NOUN
ap-2147	159	2	:	:	PUNCT
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ap-2147	159	4	,	,	PUNCT
ap-2147	159	5	2013	2013	NUM
ap-2147	159	6	,	,	PUNCT
ap-2147	159	7	p.	p.	NOUN
ap-2147	159	8	34–38	34–38	NUM
ap-2147	159	9	.	.	PUNCT
ap-2147	160	1	[	[	X
ap-2147	160	2	11	11	NUM
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ap-2147	160	6	,	,	PUNCT
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ap-2147	160	8	.	.	PROPN
ap-2147	160	9	:	:	PUNCT
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ap-2147	160	15	cm	cm	NOUN
ap-2147	160	16	−1	−1	NOUN
ap-2147	160	17	raman	raman	NOUN
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ap-2147	160	22	films	film	NOUN
ap-2147	160	23	.	.	PUNCT
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ap-2147	161	2	,	,	PUNCT
ap-2147	161	3	42	42	NUM
ap-2147	161	4	(	(	PUNCT
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ap-2147	161	6	)	)	PUNCT
ap-2147	161	7	,	,	PUNCT
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ap-2147	161	9	,	,	PUNCT
ap-2147	161	10	pp	pp	ADV
ap-2147	161	11	.	.	PUNCT
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ap-2147	162	2	.	.	PUNCT
ap-2147	163	1	doi:10.1016	doi:10.1016	PROPN
ap-2147	163	2	/	/	SYM
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ap-2147	164	2	12	12	NUM
ap-2147	164	3	]	]	PUNCT
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ap-2147	164	5	,	,	PUNCT
ap-2147	164	6	a.j	a.j	PROPN
ap-2147	164	7	.	.	PROPN
ap-2147	164	8	,	,	PUNCT
ap-2147	164	9	nazaré	nazaré	PROPN
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ap-2147	164	11	m.h	m.h	PROPN
ap-2147	164	12	.	.	PROPN
ap-2147	164	13	:	:	PUNCT
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ap-2147	164	15	,	,	PUNCT
ap-2147	164	16	growth	growth	NOUN
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ap-2147	165	1	iet	iet	PROPN
ap-2147	165	2	,	,	PUNCT
ap-2147	165	3	2001	2001	NUM
ap-2147	165	4	.	.	PUNCT
ap-2147	166	1	[	[	X
ap-2147	166	2	13	13	NUM
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ap-2147	166	8	al	al	PROPN
ap-2147	166	9	.	.	PROPN
ap-2147	166	10	:	:	PUNCT
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ap-2147	167	10	by	by	ADP
ap-2147	167	11	plasma	plasma	NOUN
ap-2147	167	12	etching	etch	VERB
ap-2147	167	13	.	.	PUNCT
ap-2147	168	1	j.	j.	PROPN
ap-2147	168	2	appl	appl	PROPN
ap-2147	168	3	.	.	PUNCT
ap-2147	169	1	phys	phy	NOUN
ap-2147	169	2	.	.	PUNCT
ap-2147	169	3	,	,	PUNCT
ap-2147	169	4	102	102	NUM
ap-2147	169	5	(	(	PUNCT
ap-2147	169	6	10	10	NUM
ap-2147	169	7	)	)	PUNCT
ap-2147	169	8	,	,	PUNCT
ap-2147	169	9	2007	2007	NUM
ap-2147	169	10	,	,	PUNCT
ap-2147	169	11	p.	p.	NOUN
ap-2147	169	12	103714	103714	NUM
ap-2147	169	13	.	.	PUNCT
ap-2147	170	1	doi:10.1063/1.2817465	doi:10.1063/1.2817465	NOUN
ap-2147	171	1	[	[	X
ap-2147	171	2	14	14	NUM
ap-2147	171	3	]	]	X
ap-2147	171	4	zou	zou	PROPN
ap-2147	171	5	,	,	PUNCT
ap-2147	171	6	y.s	y.s	PROPN
ap-2147	171	7	.	.	PROPN
ap-2147	171	8	et	et	PROPN
ap-2147	171	9	al	al	PROPN
ap-2147	171	10	.	.	PROPN
ap-2147	171	11	:	:	PUNCT
ap-2147	172	1	fabrication	fabrication	NOUN
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ap-2147	172	3	diamond	diamond	NOUN
ap-2147	172	4	nanopillars	nanopillar	NOUN
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ap-2147	172	8	.	.	PUNCT
ap-2147	173	1	appl	appl	NOUN
ap-2147	173	2	.	.	PUNCT
ap-2147	174	1	phys	phy	NOUN
ap-2147	174	2	.	.	PUNCT
ap-2147	175	1	lett	lett	PROPN
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ap-2147	176	1	,	,	PUNCT
ap-2147	176	2	92	92	NUM
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ap-2147	176	5	)	)	PUNCT
ap-2147	176	6	,	,	PUNCT
ap-2147	176	7	2008	2008	NUM
ap-2147	176	8	,	,	PUNCT
ap-2147	176	9	p.	p.	NOUN
ap-2147	176	10	053105	053105	NUM
ap-2147	176	11	.	.	PUNCT
ap-2147	177	1	doi:10.1063/1.2841822	doi:10.1063/1.2841822	VERB
ap-2147	177	2	324	324	NUM
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ap-2147	177	4	http://dx.doi.org/10.1038/176051a0	http://dx.doi.org/10.1038/176051a0	NUM
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ap-2147	179	2	http://dx.doi.org/10.1016/j.carbon.2003.12.045	http://dx.doi.org/10.1016/j.carbon.2003.12.045	PROPN
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ap-2147	179	4	http://dx.doi.org/10.1063/1.2841822	http://dx.doi.org/10.1063/1.2841822	PROPN
ap-2147	179	5	acta	acta	PROPN
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ap-2147	179	8	,	,	PUNCT
ap-2147	179	9	2014	2014	NUM
ap-2147	179	10	1	1	NUM
ap-2147	179	11	introduction	introduction	NOUN
ap-2147	179	12	1.1	1.1	NUM
ap-2147	179	13	diamond	diamond	NOUN
ap-2147	179	14	and	and	CCONJ
ap-2147	179	15	its	its	PRON
ap-2147	179	16	applications	application	NOUN
ap-2147	179	17	1.2	1.2	NUM
ap-2147	179	18	structuring	structuring	NOUN
ap-2147	179	19	of	of	ADP
ap-2147	179	20	diamond	diamond	NOUN
ap-2147	179	21	films	film	NOUN
ap-2147	179	22	2	2	NUM
ap-2147	179	23	experimental	experimental	ADJ
ap-2147	179	24	section	section	NOUN
ap-2147	179	25	3	3	NUM
ap-2147	179	26	results	result	NOUN
ap-2147	179	27	and	and	CCONJ
ap-2147	179	28	discussions	discussion	NOUN
ap-2147	179	29	4	4	NUM
ap-2147	179	30	conclusion	conclusion	NOUN
ap-2147	179	31	acknowledgements	acknowledgement	NOUN
ap-2147	179	32	references	reference	NOUN