id	sid	tid	token	lemma	pos
ap-2227	1	1	acta	acta	PROPN
ap-2227	1	2	polytechnica	polytechnica	PROPN
ap-2227	1	3	doi:10.14311	doi:10.14311	PROPN
ap-2227	1	4	/	/	SYM
ap-2227	1	5	ap.2015.55.0136	ap.2015.55.0136	PROPN
ap-2227	1	6	acta	acta	PROPN
ap-2227	1	7	polytechnica	polytechnica	PROPN
ap-2227	1	8	55(2):136–139	55(2):136–139	PROPN
ap-2227	1	9	,	,	PUNCT
ap-2227	1	10	2015	2015	NUM
ap-2227	1	11	©	©	PROPN
ap-2227	1	12	czech	czech	PROPN
ap-2227	1	13	technical	technical	PROPN
ap-2227	1	14	university	university	PROPN
ap-2227	1	15	in	in	ADP
ap-2227	1	16	prague	prague	PROPN
ap-2227	1	17	,	,	PUNCT
ap-2227	1	18	2015	2015	NUM
ap-2227	1	19	available	available	ADJ
ap-2227	1	20	online	online	ADV
ap-2227	1	21	at	at	ADP
ap-2227	1	22	http://ojs.cvut.cz/ojs/index.php/ap	http://ojs.cvut.cz/ojs/index.php/ap	PROPN
ap-2227	1	23	modernization	modernization	NOUN
ap-2227	1	24	features	feature	NOUN
ap-2227	1	25	of	of	ADP
ap-2227	1	26	a	a	DET
ap-2227	1	27	vacuum	vacuum	NOUN
ap-2227	1	28	installation	installation	NOUN
ap-2227	1	29	based	base	VERB
ap-2227	1	30	on	on	ADP
ap-2227	1	31	low	low	ADJ
ap-2227	1	32	-	-	PUNCT
ap-2227	1	33	pressure	pressure	NOUN
ap-2227	1	34	arc	arc	NOUN
ap-2227	1	35	discharge	discharge	VERB
ap-2227	1	36	for	for	ADP
ap-2227	1	37	forming	form	VERB
ap-2227	1	38	composite	composite	ADJ
ap-2227	1	39	tin	tin	NOUN
ap-2227	1	40	-	-	PUNCT
ap-2227	1	41	cu	cu	NOUN
ap-2227	1	42	layers	layer	NOUN
ap-2227	1	43	dmitrii	dmitrii	VERB
ap-2227	1	44	tsyrenov∗	tsyrenov∗	PROPN
ap-2227	1	45	,	,	PUNCT
ap-2227	1	46	aleksandr	aleksandr	PROPN
ap-2227	1	47	semenov	semenov	PROPN
ap-2227	1	48	,	,	PUNCT
ap-2227	1	49	natalia	natalia	PROPN
ap-2227	1	50	smirnyagina	smirnyagina	PROPN
ap-2227	1	51	institute	institute	PROPN
ap-2227	1	52	of	of	ADP
ap-2227	1	53	physical	physical	ADJ
ap-2227	1	54	materials	material	NOUN
ap-2227	1	55	science	science	PROPN
ap-2227	1	56	sb	sb	PROPN
ap-2227	1	57	ras	ras	PROPN
ap-2227	1	58	,	,	PUNCT
ap-2227	1	59	laboratory	laboratory	NOUN
ap-2227	1	60	of	of	ADP
ap-2227	1	61	physical	physical	ADJ
ap-2227	1	62	materials	material	NOUN
ap-2227	1	63	science	science	NOUN
ap-2227	1	64	,	,	PUNCT
ap-2227	1	65	sakhyanovoy	sakhyanovoy	PROPN
ap-2227	1	66	st	st	PROPN
ap-2227	1	67	.	.	PROPN
ap-2227	2	1	6,670047	6,670047	PROPN
ap-2227	2	2	ulan	ulan	PROPN
ap-2227	2	3	-	-	PUNCT
ap-2227	2	4	ude	ude	PROPN
ap-2227	2	5	,	,	PUNCT
ap-2227	2	6	russia	russia	PROPN
ap-2227	2	7	.	.	PUNCT
ap-2227	3	1	∗	∗	NOUN
ap-2227	3	2	corresponding	correspond	VERB
ap-2227	3	3	author	author	NOUN
ap-2227	3	4	:	:	PUNCT
ap-2227	3	5	dmitriyzak@mail.ru	dmitriyzak@mail.ru	VERB
ap-2227	3	6	abstract	abstract	NOUN
ap-2227	3	7	.	.	PUNCT
ap-2227	4	1	a	a	DET
ap-2227	4	2	hybrid	hybrid	ADJ
ap-2227	4	3	technology	technology	NOUN
ap-2227	4	4	for	for	ADP
ap-2227	4	5	forming	form	VERB
ap-2227	4	6	composite	composite	ADJ
ap-2227	4	7	tin	tin	NOUN
ap-2227	4	8	-	-	PUNCT
ap-2227	4	9	cu	cu	NOUN
ap-2227	4	10	layers	layer	NOUN
ap-2227	4	11	under	under	ADP
ap-2227	4	12	the	the	DET
ap-2227	4	13	combined	combine	VERB
ap-2227	4	14	influence	influence	NOUN
ap-2227	4	15	of	of	ADP
ap-2227	4	16	a	a	DET
ap-2227	4	17	magnetron	magnetron	NOUN
ap-2227	4	18	and	and	CCONJ
ap-2227	4	19	low	low	ADJ
ap-2227	4	20	pressure	pressure	NOUN
ap-2227	4	21	arc	arc	NOUN
ap-2227	4	22	discharges	discharge	NOUN
ap-2227	4	23	has	have	AUX
ap-2227	4	24	been	be	AUX
ap-2227	4	25	designed	design	VERB
ap-2227	4	26	.	.	PUNCT
ap-2227	5	1	the	the	DET
ap-2227	5	2	parameters	parameter	NOUN
ap-2227	5	3	of	of	ADP
ap-2227	5	4	the	the	DET
ap-2227	5	5	plasma	plasma	NOUN
ap-2227	5	6	generator	generator	NOUN
ap-2227	5	7	have	have	AUX
ap-2227	5	8	been	be	AUX
ap-2227	5	9	studied	study	VERB
ap-2227	5	10	.	.	PUNCT
ap-2227	6	1	the	the	DET
ap-2227	6	2	technological	technological	ADJ
ap-2227	6	3	parameters	parameter	NOUN
ap-2227	6	4	for	for	ADP
ap-2227	6	5	layer	layer	NOUN
ap-2227	6	6	deposition	deposition	NOUN
ap-2227	6	7	in	in	ADP
ap-2227	6	8	the	the	DET
ap-2227	6	9	conditions	condition	NOUN
ap-2227	6	10	of	of	ADP
ap-2227	6	11	coordinated	coordinated	ADJ
ap-2227	6	12	action	action	NOUN
ap-2227	6	13	of	of	ADP
ap-2227	6	14	the	the	DET
ap-2227	6	15	vacuum	vacuum	NOUN
ap-2227	6	16	arc	arc	NOUN
ap-2227	6	17	evaporator	evaporator	NOUN
ap-2227	6	18	and	and	CCONJ
ap-2227	6	19	the	the	DET
ap-2227	6	20	planar	planar	ADJ
ap-2227	6	21	magnetron	magnetron	NOUN
ap-2227	6	22	have	have	AUX
ap-2227	6	23	been	be	AUX
ap-2227	6	24	studied	study	VERB
ap-2227	6	25	.	.	PUNCT
ap-2227	7	1	this	this	DET
ap-2227	7	2	report	report	NOUN
ap-2227	7	3	describes	describe	VERB
ap-2227	7	4	the	the	DET
ap-2227	7	5	phase	phase	NOUN
ap-2227	7	6	composition	composition	NOUN
ap-2227	7	7	of	of	ADP
ap-2227	7	8	tin	tin	ADJ
ap-2227	7	9	-	-	PUNCT
ap-2227	7	10	cu	cu	NOUN
ap-2227	7	11	layers	layer	NOUN
ap-2227	7	12	and	and	CCONJ
ap-2227	7	13	the	the	DET
ap-2227	7	14	structure	structure	NOUN
ap-2227	7	15	on	on	ADP
ap-2227	7	16	fused	fuse	VERB
ap-2227	7	17	silica	silica	NOUN
ap-2227	7	18	substrates	substrate	NOUN
ap-2227	7	19	.	.	PUNCT
ap-2227	8	1	keywords	keyword	NOUN
ap-2227	8	2	:	:	PUNCT
ap-2227	8	3	arc	arc	NOUN
ap-2227	8	4	evaporator	evaporator	NOUN
ap-2227	8	5	;	;	PUNCT
ap-2227	8	6	planar	planar	ADJ
ap-2227	8	7	magnetron	magnetron	NOUN
ap-2227	8	8	;	;	PUNCT
ap-2227	8	9	layers	layer	NOUN
ap-2227	8	10	;	;	PUNCT
ap-2227	8	11	structure	structure	NOUN
ap-2227	8	12	;	;	PUNCT
ap-2227	8	13	phase	phase	NOUN
ap-2227	8	14	composition	composition	NOUN
ap-2227	8	15	;	;	PUNCT
ap-2227	8	16	nanocomposite	nanocomposite	NOUN
ap-2227	8	17	.	.	PUNCT
ap-2227	9	1	1	1	X
ap-2227	9	2	.	.	X
ap-2227	9	3	introduction	introduction	NOUN
ap-2227	9	4	in	in	ADP
ap-2227	9	5	this	this	DET
ap-2227	9	6	paper	paper	NOUN
ap-2227	9	7	,	,	PUNCT
ap-2227	9	8	we	we	PRON
ap-2227	9	9	propose	propose	VERB
ap-2227	9	10	a	a	DET
ap-2227	9	11	hybrid	hybrid	ADJ
ap-2227	9	12	technology	technology	NOUN
ap-2227	9	13	for	for	ADP
ap-2227	9	14	forming	form	VERB
ap-2227	9	15	composite	composite	ADJ
ap-2227	9	16	layers	layer	NOUN
ap-2227	9	17	.	.	PUNCT
ap-2227	10	1	the	the	DET
ap-2227	10	2	main	main	ADJ
ap-2227	10	3	feature	feature	NOUN
ap-2227	10	4	of	of	ADP
ap-2227	10	5	this	this	DET
ap-2227	10	6	technology	technology	NOUN
ap-2227	10	7	lies	lie	VERB
ap-2227	10	8	in	in	ADP
ap-2227	10	9	the	the	DET
ap-2227	10	10	coordinated	coordinated	ADJ
ap-2227	10	11	action	action	NOUN
ap-2227	10	12	of	of	ADP
ap-2227	10	13	a	a	DET
ap-2227	10	14	vacuum	vacuum	NOUN
ap-2227	10	15	arc	arc	NOUN
ap-2227	10	16	and	and	CCONJ
ap-2227	10	17	magnetron	magnetron	NOUN
ap-2227	10	18	discharges	discharge	NOUN
ap-2227	10	19	.	.	PUNCT
ap-2227	11	1	coverings	covering	NOUN
ap-2227	11	2	such	such	ADJ
ap-2227	11	3	as	as	ADP
ap-2227	11	4	tin	tin	NOUN
ap-2227	11	5	,	,	PUNCT
ap-2227	11	6	tialn	tialn	NOUN
ap-2227	11	7	,	,	PUNCT
ap-2227	11	8	ticrn	ticrn	PROPN
ap-2227	11	9	and	and	CCONJ
ap-2227	11	10	others	other	NOUN
ap-2227	11	11	that	that	PRON
ap-2227	11	12	are	be	AUX
ap-2227	11	13	widely	widely	ADV
ap-2227	11	14	used	use	VERB
ap-2227	11	15	in	in	ADP
ap-2227	11	16	mechanical	mechanical	ADJ
ap-2227	11	17	engineering	engineering	NOUN
ap-2227	11	18	and	and	CCONJ
ap-2227	11	19	in	in	ADP
ap-2227	11	20	metal	metal	NOUN
ap-2227	11	21	working	working	NOUN
ap-2227	11	22	are	be	AUX
ap-2227	11	23	characterized	characterize	VERB
ap-2227	11	24	by	by	ADP
ap-2227	11	25	high	high	ADJ
ap-2227	11	26	hardness	hardness	NOUN
ap-2227	11	27	and	and	CCONJ
ap-2227	11	28	low	low	ADJ
ap-2227	11	29	friction	friction	NOUN
ap-2227	11	30	coefficients	coefficient	NOUN
ap-2227	11	31	.	.	PUNCT
ap-2227	12	1	however	however	ADV
ap-2227	12	2	,	,	PUNCT
ap-2227	12	3	their	their	PRON
ap-2227	12	4	main	main	ADJ
ap-2227	12	5	disadvantage	disadvantage	NOUN
ap-2227	12	6	lies	lie	VERB
ap-2227	12	7	in	in	ADP
ap-2227	12	8	their	their	PRON
ap-2227	12	9	substantial	substantial	ADJ
ap-2227	12	10	fragility	fragility	NOUN
ap-2227	12	11	,	,	PUNCT
ap-2227	12	12	which	which	PRON
ap-2227	12	13	greatly	greatly	ADV
ap-2227	12	14	narrows	narrow	VERB
ap-2227	12	15	the	the	DET
ap-2227	12	16	areas	area	NOUN
ap-2227	12	17	in	in	ADP
ap-2227	12	18	which	which	PRON
ap-2227	12	19	they	they	PRON
ap-2227	12	20	can	can	AUX
ap-2227	12	21	be	be	AUX
ap-2227	12	22	applied	apply	VERB
ap-2227	12	23	[	[	PUNCT
ap-2227	12	24	1	1	NUM
ap-2227	12	25	]	]	PUNCT
ap-2227	12	26	.	.	PUNCT
ap-2227	13	1	intensive	intensive	ADJ
ap-2227	13	2	research	research	NOUN
ap-2227	13	3	work	work	NOUN
ap-2227	13	4	in	in	ADP
ap-2227	13	5	the	the	DET
ap-2227	13	6	field	field	NOUN
ap-2227	13	7	of	of	ADP
ap-2227	13	8	nanostructured	nanostructure	VERB
ap-2227	13	9	and	and	CCONJ
ap-2227	13	10	nanocomposite	nanocomposite	ADJ
ap-2227	13	11	coatings	coating	NOUN
ap-2227	13	12	of	of	ADP
ap-2227	13	13	transitional	transitional	ADJ
ap-2227	13	14	metals	metal	NOUN
ap-2227	13	15	is	be	AUX
ap-2227	13	16	currently	currently	ADV
ap-2227	13	17	being	be	AUX
ap-2227	13	18	carried	carry	VERB
ap-2227	13	19	out	out	ADP
ap-2227	13	20	intensively	intensively	ADV
ap-2227	13	21	around	around	ADP
ap-2227	13	22	the	the	DET
ap-2227	13	23	world	world	NOUN
ap-2227	13	24	,	,	PUNCT
ap-2227	13	25	but	but	CCONJ
ap-2227	13	26	much	much	ADJ
ap-2227	13	27	work	work	NOUN
ap-2227	13	28	still	still	ADV
ap-2227	13	29	remains	remain	VERB
ap-2227	13	30	to	to	PART
ap-2227	13	31	be	be	AUX
ap-2227	13	32	done	do	VERB
ap-2227	13	33	.	.	PUNCT
ap-2227	14	1	significant	significant	ADJ
ap-2227	14	2	success	success	NOUN
ap-2227	14	3	in	in	ADP
ap-2227	14	4	applying	apply	VERB
ap-2227	14	5	nanostructured	nanostructure	VERB
ap-2227	14	6	and	and	CCONJ
ap-2227	14	7	nanocomposite	nanocomposite	ADJ
ap-2227	14	8	coatings	coating	NOUN
ap-2227	14	9	,	,	PUNCT
ap-2227	14	10	in	in	ADP
ap-2227	14	11	particular	particular	ADJ
ap-2227	14	12	of	of	ADP
ap-2227	14	13	tin	tin	NOUN
ap-2227	14	14	-	-	PUNCT
ap-2227	14	15	cu	cu	NOUN
ap-2227	14	16	,	,	PUNCT
ap-2227	14	17	has	have	AUX
ap-2227	14	18	been	be	AUX
ap-2227	14	19	achieved	achieve	VERB
ap-2227	14	20	by	by	ADP
ap-2227	14	21	vacuum	vacuum	NOUN
ap-2227	14	22	plasma	plasma	NOUN
ap-2227	14	23	processes	process	NOUN
ap-2227	14	24	[	[	X
ap-2227	14	25	2,3,4,5	2,3,4,5	NUM
ap-2227	14	26	]	]	X
ap-2227	14	27	.	.	PUNCT
ap-2227	15	1	for	for	ADP
ap-2227	15	2	this	this	DET
ap-2227	15	3	reason	reason	NOUN
ap-2227	15	4	,	,	PUNCT
ap-2227	15	5	studies	study	NOUN
ap-2227	15	6	of	of	ADP
ap-2227	15	7	new	new	ADJ
ap-2227	15	8	technologies	technology	NOUN
ap-2227	15	9	for	for	ADP
ap-2227	15	10	making	make	VERB
ap-2227	15	11	composite	composite	ADJ
ap-2227	15	12	layers	layer	NOUN
ap-2227	15	13	with	with	ADP
ap-2227	15	14	good	good	ADJ
ap-2227	15	15	plasticity	plasticity	NOUN
ap-2227	15	16	and	and	CCONJ
ap-2227	15	17	high	high	ADJ
ap-2227	15	18	hardness	hardness	NOUN
ap-2227	15	19	are	be	AUX
ap-2227	15	20	of	of	ADP
ap-2227	15	21	interest	interest	NOUN
ap-2227	15	22	.	.	PUNCT
ap-2227	16	1	to	to	PART
ap-2227	16	2	work	work	VERB
ap-2227	16	3	on	on	ADP
ap-2227	16	4	this	this	DET
ap-2227	16	5	task	task	NOUN
ap-2227	16	6	,	,	PUNCT
ap-2227	16	7	we	we	PRON
ap-2227	16	8	combined	combine	VERB
ap-2227	16	9	a	a	DET
ap-2227	16	10	vacuum	vacuum	NOUN
ap-2227	16	11	arc	arc	NOUN
ap-2227	16	12	evaporator	evaporator	NOUN
ap-2227	16	13	and	and	CCONJ
ap-2227	16	14	a	a	DET
ap-2227	16	15	planar	planar	ADJ
ap-2227	16	16	magnetron	magnetron	NOUN
ap-2227	16	17	in	in	ADP
ap-2227	16	18	a	a	DET
ap-2227	16	19	single	single	ADJ
ap-2227	16	20	chamber	chamber	NOUN
ap-2227	16	21	.	.	PUNCT
ap-2227	17	1	this	this	DET
ap-2227	17	2	combination	combination	NOUN
ap-2227	17	3	provides	provide	VERB
ap-2227	17	4	the	the	DET
ap-2227	17	5	following	following	ADJ
ap-2227	17	6	advantages	advantage	NOUN
ap-2227	17	7	:	:	PUNCT
ap-2227	17	8	coatings	coating	NOUN
ap-2227	17	9	can	can	AUX
ap-2227	17	10	be	be	AUX
ap-2227	17	11	applied	apply	VERB
ap-2227	17	12	on	on	ADP
ap-2227	17	13	details	detail	NOUN
ap-2227	17	14	of	of	ADP
ap-2227	17	15	various	various	ADJ
ap-2227	17	16	geometric	geometric	ADJ
ap-2227	17	17	forms	form	NOUN
ap-2227	17	18	,	,	PUNCT
ap-2227	17	19	high	high	ADJ
ap-2227	17	20	deposition	deposition	NOUN
ap-2227	17	21	speeds	speed	NOUN
ap-2227	17	22	and	and	CCONJ
ap-2227	17	23	low	low	ADJ
ap-2227	17	24	temperature	temperature	NOUN
ap-2227	17	25	of	of	ADP
ap-2227	17	26	the	the	DET
ap-2227	17	27	substrate	substrate	NOUN
ap-2227	17	28	can	can	AUX
ap-2227	17	29	be	be	AUX
ap-2227	17	30	achieved	achieve	VERB
ap-2227	17	31	,	,	PUNCT
ap-2227	17	32	and	and	CCONJ
ap-2227	17	33	an	an	DET
ap-2227	17	34	impurity	impurity	NOUN
ap-2227	17	35	component	component	NOUN
ap-2227	17	36	can	can	AUX
ap-2227	17	37	be	be	AUX
ap-2227	17	38	introduced	introduce	VERB
ap-2227	17	39	.	.	PUNCT
ap-2227	18	1	2	2	X
ap-2227	18	2	.	.	X
ap-2227	18	3	experimental	experimental	ADJ
ap-2227	18	4	part	part	NOUN
ap-2227	18	5	the	the	DET
ap-2227	18	6	experiments	experiment	NOUN
ap-2227	18	7	were	be	AUX
ap-2227	18	8	performed	perform	VERB
ap-2227	18	9	on	on	ADP
ap-2227	18	10	the	the	DET
ap-2227	18	11	vu-1	vu-1	PROPN
ap-2227	18	12	m	m	PROPN
ap-2227	18	13	vacuum	vacuum	NOUN
ap-2227	18	14	installation	installation	NOUN
ap-2227	18	15	(	(	PUNCT
ap-2227	18	16	figure	figure	NOUN
ap-2227	18	17	1	1	NUM
ap-2227	18	18	)	)	PUNCT
ap-2227	18	19	.	.	PUNCT
ap-2227	19	1	the	the	DET
ap-2227	19	2	tin	tin	NOUN
ap-2227	19	3	-	-	PUNCT
ap-2227	19	4	cu	cu	NOUN
ap-2227	19	5	layers	layer	NOUN
ap-2227	19	6	were	be	AUX
ap-2227	19	7	deposited	deposit	VERB
ap-2227	19	8	by	by	ADP
ap-2227	19	9	simultaneous	simultaneous	ADJ
ap-2227	19	10	reactive	reactive	ADJ
ap-2227	19	11	magnetron	magnetron	NOUN
ap-2227	19	12	sputtering	sputtering	NOUN
ap-2227	19	13	of	of	ADP
ap-2227	19	14	the	the	DET
ap-2227	19	15	copper	copper	NOUN
ap-2227	19	16	target	target	NOUN
ap-2227	19	17	and	and	CCONJ
ap-2227	19	18	arc	arc	NOUN
ap-2227	19	19	evaporation	evaporation	NOUN
ap-2227	19	20	of	of	ADP
ap-2227	19	21	the	the	DET
ap-2227	19	22	titanium	titanium	NOUN
ap-2227	19	23	target	target	NOUN
ap-2227	19	24	.	.	PUNCT
ap-2227	20	1	the	the	DET
ap-2227	20	2	industrial	industrial	ADJ
ap-2227	20	3	vu-1b	vu-1b	PROPN
ap-2227	20	4	installation	installation	NOUN
ap-2227	20	5	was	be	AUX
ap-2227	20	6	modernized	modernize	VERB
ap-2227	20	7	to	to	PART
ap-2227	20	8	carry	carry	VERB
ap-2227	20	9	out	out	ADP
ap-2227	20	10	the	the	DET
ap-2227	20	11	deposition	deposition	NOUN
ap-2227	20	12	process	process	NOUN
ap-2227	20	13	.	.	PUNCT
ap-2227	21	1	modernization	modernization	NOUN
ap-2227	21	2	involved	involve	VERB
ap-2227	21	3	figure	figure	NOUN
ap-2227	21	4	1	1	NUM
ap-2227	21	5	.	.	PUNCT
ap-2227	21	6	general	general	ADJ
ap-2227	21	7	view	view	NOUN
ap-2227	21	8	of	of	ADP
ap-2227	21	9	the	the	DET
ap-2227	21	10	installation	installation	NOUN
ap-2227	21	11	.	.	PUNCT
ap-2227	22	1	placing	place	VERB
ap-2227	22	2	the	the	DET
ap-2227	22	3	planar	planar	ADJ
ap-2227	22	4	magnetron	magnetron	NOUN
ap-2227	22	5	in	in	ADP
ap-2227	22	6	the	the	DET
ap-2227	22	7	vacuum	vacuum	PROPN
ap-2227	22	8	chamber	chamber	PROPN
ap-2227	22	9	.	.	PUNCT
ap-2227	23	1	this	this	DET
ap-2227	23	2	planar	planar	ADJ
ap-2227	23	3	magnetron	magnetron	NOUN
ap-2227	23	4	works	work	VERB
ap-2227	23	5	on	on	ADP
ap-2227	23	6	the	the	DET
ap-2227	23	7	basis	basis	NOUN
ap-2227	23	8	of	of	ADP
ap-2227	23	9	an	an	DET
ap-2227	23	10	abnormal	abnormal	ADJ
ap-2227	23	11	smoldering	smoldering	NOUN
ap-2227	23	12	discharge	discharge	NOUN
ap-2227	23	13	of	of	ADP
ap-2227	23	14	the	the	DET
ap-2227	23	15	direct	direct	ADJ
ap-2227	23	16	current	current	NOUN
ap-2227	23	17	.	.	PUNCT
ap-2227	24	1	the	the	DET
ap-2227	24	2	magnetron	magnetron	NOUN
ap-2227	24	3	is	be	AUX
ap-2227	24	4	installed	instal	VERB
ap-2227	24	5	vertically	vertically	ADV
ap-2227	24	6	on	on	ADP
ap-2227	24	7	the	the	DET
ap-2227	24	8	side	side	NOUN
ap-2227	24	9	wall	wall	NOUN
ap-2227	24	10	of	of	ADP
ap-2227	24	11	the	the	DET
ap-2227	24	12	vacuum	vacuum	PROPN
ap-2227	24	13	chamber	chamber	PROPN
ap-2227	24	14	.	.	PUNCT
ap-2227	25	1	the	the	DET
ap-2227	25	2	power	power	NOUN
ap-2227	25	3	supply	supply	NOUN
ap-2227	25	4	for	for	ADP
ap-2227	25	5	the	the	DET
ap-2227	25	6	magnetron	magnetron	NOUN
ap-2227	25	7	is	be	AUX
ap-2227	25	8	up	up	ADP
ap-2227	25	9	to	to	PART
ap-2227	25	10	3	3	NUM
ap-2227	25	11	kw	kw	NOUN
ap-2227	25	12	.	.	PUNCT
ap-2227	26	1	the	the	DET
ap-2227	26	2	magnetron	magnetron	NOUN
ap-2227	26	3	(	(	PUNCT
ap-2227	26	4	figure	figure	NOUN
ap-2227	26	5	2	2	NUM
ap-2227	26	6	)	)	PUNCT
ap-2227	26	7	consists	consist	VERB
ap-2227	26	8	of	of	ADP
ap-2227	26	9	a	a	DET
ap-2227	26	10	cathode	cathode	NOUN
ap-2227	26	11	in	in	ADP
ap-2227	26	12	the	the	DET
ap-2227	26	13	form	form	NOUN
ap-2227	26	14	of	of	ADP
ap-2227	26	15	a	a	DET
ap-2227	26	16	copper	copper	NOUN
ap-2227	26	17	target	target	NOUN
ap-2227	26	18	and	and	CCONJ
ap-2227	26	19	an	an	DET
ap-2227	26	20	annular	annular	ADJ
ap-2227	26	21	anode	anode	NOUN
ap-2227	26	22	.	.	PUNCT
ap-2227	27	1	the	the	DET
ap-2227	27	2	magnetic	magnetic	ADJ
ap-2227	27	3	system	system	NOUN
ap-2227	27	4	is	be	AUX
ap-2227	27	5	produced	produce	VERB
ap-2227	27	6	by	by	ADP
ap-2227	27	7	constant	constant	ADJ
ap-2227	27	8	(	(	PUNCT
ap-2227	27	9	cobaltsamarium	cobaltsamarium	NOUN
ap-2227	27	10	)	)	PUNCT
ap-2227	27	11	magnets	magnet	NOUN
ap-2227	27	12	,	,	PUNCT
ap-2227	27	13	a	a	DET
ap-2227	27	14	magnetic	magnetic	ADJ
ap-2227	27	15	conductor	conductor	NOUN
ap-2227	27	16	and	and	CCONJ
ap-2227	27	17	a	a	DET
ap-2227	27	18	polar	polar	ADJ
ap-2227	27	19	tip	tip	NOUN
ap-2227	27	20	.	.	PUNCT
ap-2227	28	1	these	these	PRON
ap-2227	28	2	make	make	VERB
ap-2227	28	3	a	a	DET
ap-2227	28	4	toroidal	toroidal	ADJ
ap-2227	28	5	magnetic	magnetic	ADJ
ap-2227	28	6	field	field	NOUN
ap-2227	28	7	with	with	ADP
ap-2227	28	8	the	the	DET
ap-2227	28	9	induction	induction	NOUN
ap-2227	28	10	of	of	ADP
ap-2227	28	11	0.2–0.8tl	0.2–0.8tl	NUM
ap-2227	28	12	above	above	ADP
ap-2227	28	13	the	the	DET
ap-2227	28	14	surface	surface	NOUN
ap-2227	28	15	of	of	ADP
ap-2227	28	16	the	the	DET
ap-2227	28	17	target	target	NOUN
ap-2227	28	18	.	.	PUNCT
ap-2227	29	1	the	the	DET
ap-2227	29	2	plate	plate	NOUN
ap-2227	29	3	was	be	AUX
ap-2227	29	4	supplied	supply	VERB
ap-2227	29	5	to	to	ADP
ap-2227	29	6	the	the	DET
ap-2227	29	7	grounded	ground	VERB
ap-2227	29	8	anode	anode	NOUN
ap-2227	29	9	(	(	PUNCT
ap-2227	29	10	positive	positive	ADJ
ap-2227	29	11	potential	potential	NOUN
ap-2227	29	12	)	)	PUNCT
ap-2227	29	13	and	and	CCONJ
ap-2227	29	14	to	to	ADP
ap-2227	29	15	the	the	DET
ap-2227	29	16	isolated	isolated	ADJ
ap-2227	29	17	target	target	NOUN
ap-2227	29	18	(	(	PUNCT
ap-2227	29	19	negative	negative	ADJ
ap-2227	29	20	potential	potential	NOUN
ap-2227	29	21	)	)	PUNCT
ap-2227	29	22	.	.	PUNCT
ap-2227	30	1	the	the	DET
ap-2227	30	2	cathode	cathode	NOUN
ap-2227	30	3	unit	unit	NOUN
ap-2227	30	4	(	(	PUNCT
ap-2227	30	5	figure	figure	NOUN
ap-2227	30	6	3	3	NUM
ap-2227	30	7	)	)	PUNCT
ap-2227	30	8	consists	consist	VERB
ap-2227	30	9	of	of	ADP
ap-2227	30	10	the	the	DET
ap-2227	30	11	welded	weld	VERB
ap-2227	30	12	case	case	NOUN
ap-2227	30	13	,	,	PUNCT
ap-2227	30	14	the	the	DET
ap-2227	30	15	cathode	cathode	NOUN
ap-2227	30	16	,	,	PUNCT
ap-2227	30	17	the	the	DET
ap-2227	30	18	magnetic	magnetic	ADJ
ap-2227	30	19	coil	coil	NOUN
ap-2227	30	20	,	,	PUNCT
ap-2227	30	21	the	the	DET
ap-2227	30	22	additional	additional	ADJ
ap-2227	30	23	anode	anode	NOUN
ap-2227	30	24	,	,	PUNCT
ap-2227	30	25	and	and	CCONJ
ap-2227	30	26	the	the	DET
ap-2227	30	27	electrostatic	electrostatic	ADJ
ap-2227	30	28	screen	screen	NOUN
ap-2227	30	29	isolated	isolate	VERB
ap-2227	30	30	both	both	CCONJ
ap-2227	30	31	from	from	ADP
ap-2227	30	32	the	the	DET
ap-2227	30	33	cathode	cathode	NOUN
ap-2227	30	34	and	and	CCONJ
ap-2227	30	35	from	from	ADP
ap-2227	30	36	the	the	DET
ap-2227	30	37	additional	additional	ADJ
ap-2227	30	38	anode	anode	NOUN
ap-2227	30	39	.	.	PUNCT
ap-2227	31	1	the	the	DET
ap-2227	31	2	magnetic	magnetic	ADJ
ap-2227	31	3	coil	coil	NOUN
ap-2227	31	4	ensures	ensure	VERB
ap-2227	31	5	that	that	SCONJ
ap-2227	31	6	the	the	DET
ap-2227	31	7	cathode	cathode	NOUN
ap-2227	31	8	burns	burn	VERB
ap-2227	31	9	evenly	evenly	ADV
ap-2227	31	10	.	.	PUNCT
ap-2227	32	1	inside	inside	ADP
ap-2227	32	2	the	the	DET
ap-2227	32	3	chamber	chamber	NOUN
ap-2227	32	4	there	there	PRON
ap-2227	32	5	is	be	VERB
ap-2227	32	6	a	a	DET
ap-2227	32	7	rotating	rotate	VERB
ap-2227	32	8	substrate	substrate	NOUN
ap-2227	32	9	holder	holder	NOUN
ap-2227	32	10	,	,	PUNCT
ap-2227	32	11	136	136	NUM
ap-2227	32	12	http://dx.doi.org/10.14311/ap.2015.55.0136	http://dx.doi.org/10.14311/ap.2015.55.0136	NOUN
ap-2227	32	13	http://ojs.cvut.cz/ojs/index.php/ap	http://ojs.cvut.cz/ojs/index.php/ap	NOUN
ap-2227	32	14	vol	vol	NOUN
ap-2227	32	15	.	.	PUNCT
ap-2227	33	1	55	55	NUM
ap-2227	33	2	no	no	NOUN
ap-2227	33	3	.	.	PUNCT
ap-2227	34	1	2/2015	2/2015	NUM
ap-2227	34	2	modernization	modernization	NOUN
ap-2227	34	3	features	feature	NOUN
ap-2227	34	4	of	of	ADP
ap-2227	34	5	a	a	DET
ap-2227	34	6	vacuum	vacuum	NOUN
ap-2227	34	7	installation	installation	NOUN
ap-2227	34	8	number	number	NOUN
ap-2227	34	9	current	current	NOUN
ap-2227	34	10	of	of	ADP
ap-2227	34	11	the	the	DET
ap-2227	34	12	arc	arc	NOUN
ap-2227	34	13	current	current	NOUN
ap-2227	34	14	of	of	ADP
ap-2227	34	15	the	the	DET
ap-2227	34	16	voltage	voltage	NOUN
ap-2227	34	17	on	on	ADP
ap-2227	34	18	the	the	DET
ap-2227	34	19	pressure	pressure	NOUN
ap-2227	34	20	in	in	ADP
ap-2227	34	21	the	the	DET
ap-2227	34	22	discharges	discharge	NOUN
ap-2227	34	23	,	,	PUNCT
ap-2227	34	24	a	a	DET
ap-2227	34	25	magnetron	magnetron	PROPN
ap-2227	34	26	magnetron	magnetron	PROPN
ap-2227	34	27	chamber	chamber	PROPN
ap-2227	34	28	,	,	PUNCT
ap-2227	34	29	10−2	10−2	NUM
ap-2227	34	30	tor	tor	NOUN
ap-2227	34	31	discharges	discharge	NOUN
ap-2227	34	32	,	,	PUNCT
ap-2227	34	33	a	a	DET
ap-2227	34	34	target	target	NOUN
ap-2227	34	35	(	(	PUNCT
ap-2227	34	36	cu	cu	PROPN
ap-2227	34	37	)	)	PUNCT
ap-2227	34	38	,	,	PUNCT
ap-2227	34	39	v	v	ADP
ap-2227	34	40	a	a	DET
ap-2227	34	41	80	80	NUM
ap-2227	34	42	0.2	0.2	NUM
ap-2227	34	43	b	b	NOUN
ap-2227	34	44	90	90	NUM
ap-2227	34	45	0.8	0.8	NUM
ap-2227	34	46	35	35	NUM
ap-2227	34	47	0.2	0.2	NUM
ap-2227	34	48	c	c	NOUN
ap-2227	34	49	60	60	NUM
ap-2227	34	50	0.6	0.6	NUM
ap-2227	34	51	40	40	NUM
ap-2227	34	52	9	9	NUM
ap-2227	34	53	d	d	SYM
ap-2227	34	54	60	60	NUM
ap-2227	34	55	0.6	0.6	NUM
ap-2227	34	56	40	40	NUM
ap-2227	34	57	9	9	NUM
ap-2227	34	58	table	table	NOUN
ap-2227	34	59	1	1	NUM
ap-2227	34	60	.	.	PUNCT
ap-2227	34	61	composite	composite	ADJ
ap-2227	34	62	tin	tin	NOUN
ap-2227	34	63	-	-	PUNCT
ap-2227	34	64	cu	cu	NOUN
ap-2227	34	65	layer	layer	NOUN
ap-2227	34	66	formation	formation	NOUN
ap-2227	34	67	parameters	parameter	NOUN
ap-2227	34	68	figure	figure	VERB
ap-2227	34	69	2	2	NUM
ap-2227	34	70	.	.	PUNCT
ap-2227	35	1	design	design	NOUN
ap-2227	35	2	of	of	ADP
ap-2227	35	3	the	the	DET
ap-2227	35	4	magnetron	magnetron	NOUN
ap-2227	35	5	.	.	PUNCT
ap-2227	35	6	which	which	PRON
ap-2227	35	7	distributes	distribute	VERB
ap-2227	35	8	the	the	DET
ap-2227	35	9	gradually	gradually	ADV
ap-2227	35	10	thickening	thickening	NOUN
ap-2227	35	11	coating	coat	VERB
ap-2227	35	12	evenly	evenly	ADV
ap-2227	35	13	.	.	PUNCT
ap-2227	36	1	the	the	DET
ap-2227	36	2	reference	reference	NOUN
ap-2227	36	3	voltage	voltage	NOUN
ap-2227	36	4	applied	apply	VERB
ap-2227	36	5	to	to	ADP
ap-2227	36	6	the	the	DET
ap-2227	36	7	substrate	substrate	NOUN
ap-2227	36	8	holder	holder	NOUN
ap-2227	36	9	is	be	AUX
ap-2227	36	10	1.5	1.5	NUM
ap-2227	36	11	kv	kv	NOUN
ap-2227	36	12	.	.	PUNCT
ap-2227	37	1	it	it	PRON
ap-2227	37	2	preheats	preheat	VERB
ap-2227	37	3	the	the	DET
ap-2227	37	4	details	detail	NOUN
ap-2227	37	5	and	and	CCONJ
ap-2227	37	6	provides	provide	VERB
ap-2227	37	7	ionic	ionic	ADJ
ap-2227	37	8	removal	removal	NOUN
ap-2227	37	9	of	of	ADP
ap-2227	37	10	gas	gas	NOUN
ap-2227	37	11	inclusions	inclusion	NOUN
ap-2227	37	12	from	from	ADP
ap-2227	37	13	the	the	DET
ap-2227	37	14	growth	growth	NOUN
ap-2227	37	15	surface	surface	NOUN
ap-2227	37	16	.	.	PUNCT
ap-2227	38	1	the	the	DET
ap-2227	38	2	gas	gas	NOUN
ap-2227	38	3	mixture	mixture	NOUN
ap-2227	38	4	is	be	AUX
ap-2227	38	5	prepared	prepare	VERB
ap-2227	38	6	in	in	ADP
ap-2227	38	7	a	a	DET
ap-2227	38	8	separate	separate	ADJ
ap-2227	38	9	vacuum	vacuum	NOUN
ap-2227	38	10	mixer	mixer	NOUN
ap-2227	38	11	.	.	PUNCT
ap-2227	39	1	the	the	DET
ap-2227	39	2	installation	installation	NOUN
ap-2227	39	3	has	have	VERB
ap-2227	39	4	a	a	DET
ap-2227	39	5	unified	unified	ADJ
ap-2227	39	6	vacuum	vacuum	NOUN
ap-2227	39	7	system	system	NOUN
ap-2227	39	8	based	base	VERB
ap-2227	39	9	on	on	ADP
ap-2227	39	10	a	a	DET
ap-2227	39	11	n400	n400	PROPN
ap-2227	39	12	diffusive	diffusive	ADJ
ap-2227	39	13	pump	pump	NOUN
ap-2227	39	14	.	.	PUNCT
ap-2227	40	1	the	the	DET
ap-2227	40	2	tin	tin	NOUN
ap-2227	40	3	-	-	PUNCT
ap-2227	40	4	cu	cu	NOUN
ap-2227	40	5	layers	layer	NOUN
ap-2227	40	6	are	be	AUX
ap-2227	40	7	set	set	VERB
ap-2227	40	8	while	while	SCONJ
ap-2227	40	9	both	both	DET
ap-2227	40	10	devices	device	NOUN
ap-2227	40	11	are	be	AUX
ap-2227	40	12	working	work	VERB
ap-2227	40	13	simultaneously	simultaneously	ADV
ap-2227	40	14	.	.	PUNCT
ap-2227	41	1	the	the	DET
ap-2227	41	2	parameters	parameter	NOUN
ap-2227	41	3	used	use	VERB
ap-2227	41	4	in	in	ADP
ap-2227	41	5	this	this	DET
ap-2227	41	6	experiment	experiment	NOUN
ap-2227	41	7	are	be	AUX
ap-2227	41	8	presented	present	VERB
ap-2227	41	9	in	in	ADP
ap-2227	41	10	table	table	NOUN
ap-2227	41	11	1	1	NUM
ap-2227	41	12	.	.	PUNCT
ap-2227	42	1	plates	plate	NOUN
ap-2227	42	2	of	of	ADP
ap-2227	42	3	fused	fuse	VERB
ap-2227	42	4	quartz	quartz	NOUN
ap-2227	42	5	(	(	PUNCT
ap-2227	42	6	amorphous	amorphous	ADJ
ap-2227	42	7	sio2	sio2	PROPN
ap-2227	42	8	)	)	PUNCT
ap-2227	42	9	1	1	NUM
ap-2227	42	10	mm	mm	NOUN
ap-2227	42	11	in	in	ADP
ap-2227	42	12	thickness	thickness	NOUN
ap-2227	42	13	were	be	AUX
ap-2227	42	14	used	use	VERB
ap-2227	42	15	in	in	ADP
ap-2227	42	16	order	order	NOUN
ap-2227	42	17	to	to	PART
ap-2227	42	18	avoid	avoid	VERB
ap-2227	42	19	the	the	DET
ap-2227	42	20	influence	influence	NOUN
ap-2227	42	21	of	of	ADP
ap-2227	42	22	focusing	focus	VERB
ap-2227	42	23	the	the	DET
ap-2227	42	24	substrate	substrate	NOUN
ap-2227	42	25	material	material	NOUN
ap-2227	42	26	on	on	ADP
ap-2227	42	27	the	the	DET
ap-2227	42	28	structure	structure	NOUN
ap-2227	42	29	of	of	ADP
ap-2227	42	30	the	the	DET
ap-2227	42	31	composite	composite	ADJ
ap-2227	42	32	layer	layer	NOUN
ap-2227	42	33	.	.	PUNCT
ap-2227	43	1	xray	xray	PROPN
ap-2227	43	2	phase	phase	NOUN
ap-2227	43	3	analysis	analysis	NOUN
ap-2227	43	4	was	be	AUX
ap-2227	43	5	carried	carry	VERB
ap-2227	43	6	out	out	ADP
ap-2227	43	7	on	on	ADP
ap-2227	43	8	a	a	DET
ap-2227	43	9	2d	2d	NUM
ap-2227	43	10	bruker	bruker	NOUN
ap-2227	43	11	phaser	phaser	NOUN
ap-2227	43	12	(	(	PUNCT
ap-2227	43	13	cu	cu	PROPN
ap-2227	43	14	kα1	kα1	PROPN
ap-2227	43	15	-	-	PUNCT
ap-2227	43	16	radiation	radiation	NOUN
ap-2227	43	17	)	)	PUNCT
ap-2227	43	18	.	.	PUNCT
ap-2227	44	1	the	the	DET
ap-2227	44	2	microstructure	microstructure	NOUN
ap-2227	44	3	of	of	ADP
ap-2227	44	4	the	the	DET
ap-2227	44	5	layers	layer	NOUN
ap-2227	44	6	was	be	AUX
ap-2227	44	7	investigated	investigate	VERB
ap-2227	44	8	using	use	VERB
ap-2227	44	9	a	a	DET
ap-2227	44	10	metam	metam	NOUN
ap-2227	44	11	pb-22	pb-22	PART
ap-2227	44	12	microscope	microscope	NOUN
ap-2227	44	13	with	with	ADP
ap-2227	44	14	the	the	DET
ap-2227	44	15	nexsys	nexsys	ADJ
ap-2227	44	16	image	image	NOUN
ap-2227	44	17	expert	expert	NOUN
ap-2227	44	18	program	program	NOUN
ap-2227	44	19	.	.	PUNCT
ap-2227	45	1	knoop	knoop	PROPN
ap-2227	45	2	(	(	PUNCT
ap-2227	45	3	hk	hk	PROPN
ap-2227	45	4	)	)	PUNCT
ap-2227	45	5	hardness	hardness	NOUN
ap-2227	45	6	measurements	measurement	NOUN
ap-2227	45	7	were	be	AUX
ap-2227	45	8	made	make	VERB
ap-2227	45	9	by	by	ADP
ap-2227	45	10	pressing	press	VERB
ap-2227	45	11	a	a	DET
ap-2227	45	12	diamond	diamond	NOUN
ap-2227	45	13	indenter	indenter	NOUN
ap-2227	45	14	of	of	ADP
ap-2227	45	15	a	a	DET
ap-2227	45	16	specified	specify	VERB
ap-2227	45	17	shape	shape	NOUN
ap-2227	45	18	into	into	ADP
ap-2227	45	19	a	a	DET
ap-2227	45	20	surface	surface	NOUN
ap-2227	45	21	with	with	ADP
ap-2227	45	22	a	a	DET
ap-2227	45	23	known	know	VERB
ap-2227	45	24	force	force	NOUN
ap-2227	45	25	.	.	PUNCT
ap-2227	46	1	figure	figure	VERB
ap-2227	46	2	3	3	NUM
ap-2227	46	3	.	.	PUNCT
ap-2227	47	1	design	design	NOUN
ap-2227	47	2	of	of	ADP
ap-2227	47	3	the	the	DET
ap-2227	47	4	cathode	cathode	NOUN
ap-2227	47	5	unit	unit	NOUN
ap-2227	47	6	.	.	PUNCT
ap-2227	48	1	3	3	X
ap-2227	48	2	.	.	NOUN
ap-2227	48	3	results	result	NOUN
ap-2227	48	4	and	and	CCONJ
ap-2227	48	5	discussion	discussion	NOUN
ap-2227	48	6	figure	figure	NOUN
ap-2227	48	7	4	4	NUM
ap-2227	48	8	shows	show	VERB
ap-2227	48	9	the	the	DET
ap-2227	48	10	x	x	ADJ
ap-2227	48	11	-	-	NOUN
ap-2227	48	12	ray	ray	NOUN
ap-2227	48	13	diffraction	diffraction	NOUN
ap-2227	48	14	(	(	PUNCT
ap-2227	48	15	xrd	xrd	NOUN
ap-2227	48	16	)	)	PUNCT
ap-2227	48	17	patterns	pattern	NOUN
ap-2227	48	18	of	of	ADP
ap-2227	48	19	the	the	DET
ap-2227	48	20	tin	tin	NOUN
ap-2227	48	21	-	-	PUNCT
ap-2227	48	22	cu	cu	NOUN
ap-2227	48	23	films	film	NOUN
ap-2227	48	24	coated	coat	VERB
ap-2227	48	25	on	on	ADP
ap-2227	48	26	fusing	fuse	VERB
ap-2227	48	27	quartz	quartz	NOUN
ap-2227	48	28	.	.	PUNCT
ap-2227	49	1	polycrystalline	polycrystalline	VERB
ap-2227	49	2	tin	tin	NOUN
ap-2227	49	3	-	-	PUNCT
ap-2227	49	4	cu	cu	NOUN
ap-2227	49	5	layers	layer	NOUN
ap-2227	49	6	are	be	AUX
ap-2227	49	7	obtained	obtain	VERB
ap-2227	49	8	with	with	ADP
ap-2227	49	9	column	column	NOUN
ap-2227	49	10	crystallite	crystallite	NOUN
ap-2227	49	11	and	and	CCONJ
ap-2227	49	12	preferred	preferred	ADJ
ap-2227	49	13	orientation	orientation	NOUN
ap-2227	49	14	on	on	ADP
ap-2227	49	15	the	the	DET
ap-2227	49	16	plane	plane	NOUN
ap-2227	50	1	[	[	X
ap-2227	50	2	111	111	NUM
ap-2227	50	3	]	]	PUNCT
ap-2227	50	4	perpendicular	perpendicular	ADJ
ap-2227	50	5	substrate	substrate	NOUN
ap-2227	50	6	surfaces	surface	NOUN
ap-2227	50	7	of	of	ADP
ap-2227	50	8	the	the	DET
ap-2227	50	9	sample	sample	NOUN
ap-2227	50	10	(	(	PUNCT
ap-2227	50	11	figure	figure	NOUN
ap-2227	50	12	4a	4a	NUM
ap-2227	50	13	)	)	PUNCT
ap-2227	50	14	.	.	PUNCT
ap-2227	51	1	although	although	SCONJ
ap-2227	51	2	x	x	NOUN
ap-2227	51	3	-	-	NOUN
ap-2227	51	4	ray	ray	NOUN
ap-2227	51	5	analyses	analysis	NOUN
ap-2227	51	6	showed	show	VERB
ap-2227	51	7	no	no	DET
ap-2227	51	8	fixed	fix	VERB
ap-2227	51	9	reflexes	reflex	NOUN
ap-2227	51	10	of	of	ADP
ap-2227	51	11	α	α	NOUN
ap-2227	51	12	-	-	PUNCT
ap-2227	51	13	ti	ti	NOUN
ap-2227	51	14	phase	phase	NOUN
ap-2227	51	15	impurities	impurity	NOUN
ap-2227	51	16	in	in	ADP
ap-2227	51	17	a	a	DET
ap-2227	51	18	layer	layer	NOUN
ap-2227	51	19	,	,	PUNCT
ap-2227	51	20	drops	drop	VERB
ap-2227	51	21	700–800	700–800	NUM
ap-2227	51	22	nm	nm	NOUN
ap-2227	51	23	in	in	ADP
ap-2227	51	24	size	size	NOUN
ap-2227	51	25	were	be	AUX
ap-2227	51	26	observed	observe	VERB
ap-2227	51	27	.	.	PUNCT
ap-2227	52	1	deposition	deposition	NOUN
ap-2227	52	2	of	of	ADP
ap-2227	52	3	composite	composite	ADJ
ap-2227	52	4	tincu	tincu	NOUN
ap-2227	52	5	led	lead	VERB
ap-2227	52	6	to	to	ADP
ap-2227	52	7	the	the	DET
ap-2227	52	8	formation	formation	NOUN
ap-2227	52	9	of	of	ADP
ap-2227	52	10	a	a	DET
ap-2227	52	11	layer	layer	NOUN
ap-2227	52	12	containing	contain	VERB
ap-2227	52	13	tin	tin	NOUN
ap-2227	52	14	,	,	PUNCT
ap-2227	52	15	partially	partially	ADV
ap-2227	52	16	orientated	orientate	VERB
ap-2227	52	17	on	on	ADP
ap-2227	52	18	a	a	DET
ap-2227	52	19	plane	plane	NOUN
ap-2227	53	1	[	[	X
ap-2227	53	2	111	111	NUM
ap-2227	53	3	]	]	PUNCT
ap-2227	53	4	,	,	PUNCT
ap-2227	53	5	though	though	SCONJ
ap-2227	53	6	other	other	ADJ
ap-2227	53	7	planes	plane	NOUN
ap-2227	53	8	(	(	PUNCT
ap-2227	53	9	200	200	NUM
ap-2227	53	10	)	)	PUNCT
ap-2227	53	11	,	,	PUNCT
ap-2227	53	12	(	(	PUNCT
ap-2227	53	13	220	220	NUM
ap-2227	53	14	)	)	PUNCT
ap-2227	53	15	can	can	AUX
ap-2227	53	16	be	be	AUX
ap-2227	53	17	allocated	allocate	VERB
ap-2227	53	18	to	to	ADP
ap-2227	53	19	the	the	DET
ap-2227	53	20	reflexes	reflex	NOUN
ap-2227	53	21	(	(	PUNCT
ap-2227	53	22	figure	figure	NOUN
ap-2227	53	23	4b	4b	PROPN
ap-2227	53	24	)	)	PUNCT
ap-2227	53	25	.	.	PUNCT
ap-2227	54	1	as	as	ADP
ap-2227	54	2	an	an	DET
ap-2227	54	3	impurity	impurity	NOUN
ap-2227	54	4	,	,	PUNCT
ap-2227	54	5	x	x	NOUN
ap-2227	54	6	-	-	NOUN
ap-2227	54	7	ray	ray	NOUN
ap-2227	54	8	analysis	analysis	NOUN
ap-2227	54	9	was	be	AUX
ap-2227	54	10	able	able	ADJ
ap-2227	54	11	to	to	PART
ap-2227	54	12	detect	detect	VERB
ap-2227	54	13	the	the	DET
ap-2227	54	14	presence	presence	NOUN
ap-2227	54	15	of	of	ADP
ap-2227	54	16	nitride	nitride	ADJ
ap-2227	54	17	ti2n	ti2n	NOUN
ap-2227	54	18	and	and	CCONJ
ap-2227	54	19	an	an	DET
ap-2227	54	20	α	α	NOUN
ap-2227	54	21	-	-	PUNCT
ap-2227	54	22	ti	ti	ADJ
ap-2227	54	23	drop	drop	NOUN
ap-2227	54	24	phase	phase	NOUN
ap-2227	54	25	.	.	PUNCT
ap-2227	55	1	the	the	DET
ap-2227	55	2	decrease	decrease	NOUN
ap-2227	55	3	from	from	ADP
ap-2227	55	4	90	90	NUM
ap-2227	55	5	to	to	ADP
ap-2227	55	6	60a	60a	NOUN
ap-2227	55	7	in	in	ADP
ap-2227	55	8	the	the	DET
ap-2227	55	9	arc	arc	NOUN
ap-2227	55	10	discharge	discharge	VERB
ap-2227	55	11	current	current	ADJ
ap-2227	55	12	when	when	SCONJ
ap-2227	55	13	titanium	titanium	NOUN
ap-2227	55	14	was	be	AUX
ap-2227	55	15	evaporated	evaporate	VERB
ap-2227	55	16	led	lead	VERB
ap-2227	55	17	to	to	ADP
ap-2227	55	18	a	a	DET
ap-2227	55	19	considerable	considerable	ADJ
ap-2227	55	20	reduction	reduction	NOUN
ap-2227	55	21	in	in	ADP
ap-2227	55	22	the	the	DET
ap-2227	55	23	quantity	quantity	NOUN
ap-2227	55	24	and	and	CCONJ
ap-2227	55	25	in	in	ADP
ap-2227	55	26	the	the	DET
ap-2227	55	27	sizes	size	NOUN
ap-2227	55	28	of	of	ADP
ap-2227	55	29	the	the	DET
ap-2227	55	30	titanium	titanium	NOUN
ap-2227	55	31	drops	drop	NOUN
ap-2227	55	32	in	in	ADP
ap-2227	55	33	a	a	DET
ap-2227	55	34	layer	layer	NOUN
ap-2227	55	35	.	.	PUNCT
ap-2227	56	1	according	accord	VERB
ap-2227	56	2	to	to	ADP
ap-2227	56	3	x	x	NOUN
ap-2227	56	4	-	-	NOUN
ap-2227	56	5	ray	ray	NOUN
ap-2227	56	6	analysis	analysis	NOUN
ap-2227	56	7	(	(	PUNCT
ap-2227	56	8	figure	figure	NOUN
ap-2227	56	9	4c	4c	NOUN
ap-2227	56	10	)	)	PUNCT
ap-2227	56	11	,	,	PUNCT
ap-2227	56	12	there	there	PRON
ap-2227	56	13	are	be	VERB
ap-2227	56	14	reflexes	reflex	NOUN
ap-2227	56	15	of	of	ADP
ap-2227	56	16	tin	tin	NOUN
ap-2227	56	17	in	in	ADP
ap-2227	56	18	the	the	DET
ap-2227	56	19	composite	composite	ADJ
ap-2227	56	20	layer	layer	NOUN
ap-2227	56	21	.	.	PUNCT
ap-2227	57	1	in	in	ADP
ap-2227	57	2	addition	addition	NOUN
ap-2227	57	3	,	,	PUNCT
ap-2227	57	4	the	the	DET
ap-2227	57	5	x	x	NOUN
ap-2227	57	6	-	-	NOUN
ap-2227	57	7	ray	ray	NOUN
ap-2227	57	8	pattern	pattern	NOUN
ap-2227	57	9	contains	contain	VERB
ap-2227	57	10	a	a	DET
ap-2227	57	11	pure	pure	ADJ
ap-2227	57	12	cu	cu	PROPN
ap-2227	57	13	peak	peak	NOUN
ap-2227	57	14	.	.	PUNCT
ap-2227	58	1	note	note	VERB
ap-2227	58	2	that	that	SCONJ
ap-2227	58	3	intensity	intensity	NOUN
ap-2227	58	4	of	of	ADP
ap-2227	58	5	the	the	DET
ap-2227	58	6	cu	cu	PROPN
ap-2227	58	7	reflexes	reflex	NOUN
ap-2227	58	8	on	on	ADP
ap-2227	58	9	the	the	DET
ap-2227	58	10	roentgenogram	roentgenogram	NOUN
ap-2227	58	11	is	be	AUX
ap-2227	58	12	only	only	ADV
ap-2227	58	13	slight	slight	ADJ
ap-2227	58	14	.	.	PUNCT
ap-2227	59	1	a	a	DET
ap-2227	59	2	change	change	NOUN
ap-2227	59	3	in	in	ADP
ap-2227	59	4	the	the	DET
ap-2227	59	5	distance	distance	NOUN
ap-2227	59	6	from	from	ADP
ap-2227	59	7	the	the	DET
ap-2227	59	8	arc	arc	NOUN
ap-2227	59	9	cathode	cathode	NOUN
ap-2227	59	10	(	(	PUNCT
ap-2227	59	11	a	a	DET
ap-2227	59	12	change	change	NOUN
ap-2227	59	13	in	in	ADP
ap-2227	59	14	deposition	deposition	NOUN
ap-2227	59	15	speed	speed	NOUN
ap-2227	59	16	,	,	PUNCT
ap-2227	59	17	and	and	CCONJ
ap-2227	59	18	,	,	PUNCT
ap-2227	59	19	hence	hence	ADV
ap-2227	59	20	,	,	PUNCT
ap-2227	59	21	in	in	ADP
ap-2227	59	22	the	the	DET
ap-2227	59	23	thickness	thickness	NOUN
ap-2227	59	24	of	of	ADP
ap-2227	59	25	the	the	DET
ap-2227	59	26	composite	composite	ADJ
ap-2227	59	27	layer	layer	NOUN
ap-2227	59	28	that	that	PRON
ap-2227	59	29	is	be	AUX
ap-2227	59	30	formed	form	VERB
ap-2227	59	31	,	,	PUNCT
ap-2227	59	32	etc	etc	X
ap-2227	59	33	.	.	X
ap-2227	59	34	)	)	PUNCT
ap-2227	59	35	to	to	PART
ap-2227	59	36	substrates	substrate	VERB
ap-2227	59	37	220	220	NUM
ap-2227	59	38	to	to	PART
ap-2227	59	39	280	280	NUM
ap-2227	59	40	mm	mm	NOUN
ap-2227	59	41	in	in	ADP
ap-2227	59	42	thickness	thickness	NOUN
ap-2227	59	43	led	lead	VERB
ap-2227	59	44	to	to	ADP
ap-2227	59	45	increased	increase	VERB
ap-2227	59	46	cu	cu	PROPN
ap-2227	59	47	in	in	ADP
ap-2227	59	48	the	the	DET
ap-2227	59	49	composite	composite	ADJ
ap-2227	59	50	layer	layer	NOUN
ap-2227	59	51	.	.	PUNCT
ap-2227	60	1	the	the	DET
ap-2227	60	2	x	x	NOUN
ap-2227	60	3	-	-	NOUN
ap-2227	60	4	ray	ray	NOUN
ap-2227	60	5	patterns	pattern	NOUN
ap-2227	60	6	reveal	reveal	VERB
ap-2227	60	7	copper	copper	NOUN
ap-2227	60	8	intensity	intensity	NOUN
ap-2227	60	9	varying	vary	VERB
ap-2227	60	10	from	from	ADP
ap-2227	60	11	10	10	NUM
ap-2227	60	12	%	%	NOUN
ap-2227	60	13	(	(	PUNCT
ap-2227	60	14	figure	figure	NOUN
ap-2227	60	15	4d	4d	NUM
ap-2227	60	16	)	)	PUNCT
ap-2227	60	17	.	.	PUNCT
ap-2227	61	1	the	the	DET
ap-2227	61	2	parameters	parameter	NOUN
ap-2227	61	3	of	of	ADP
ap-2227	61	4	a	a	DET
ap-2227	61	5	tin	tin	NOUN
ap-2227	61	6	crystal	crystal	NOUN
ap-2227	61	7	cell	cell	NOUN
ap-2227	61	8	(	(	PUNCT
ap-2227	61	9	fm3	fm3	NOUN
ap-2227	61	10	m	m	X
ap-2227	61	11	)	)	PUNCT
ap-2227	61	12	are	be	AUX
ap-2227	61	13	defined	define	VERB
ap-2227	61	14	for	for	ADP
ap-2227	61	15	all	all	DET
ap-2227	61	16	composite	composite	ADJ
ap-2227	61	17	tin	tin	NOUN
ap-2227	61	18	-	-	PUNCT
ap-2227	61	19	cu	cu	NOUN
ap-2227	61	20	layers	layer	NOUN
ap-2227	61	21	.	.	PUNCT
ap-2227	62	1	a	a	DET
ap-2227	62	2	considerable	considerable	ADJ
ap-2227	62	3	reduction	reduction	NOUN
ap-2227	62	4	in	in	ADP
ap-2227	62	5	parameter	parameter	NOUN
ap-2227	62	6	a	a	PRON
ap-2227	62	7	with	with	ADP
ap-2227	62	8	a	a	DET
ap-2227	62	9	=	=	SYM
ap-2227	62	10	0.4318	0.4318	NUM
ap-2227	62	11	nm	nm	INTJ
ap-2227	62	12	to	to	ADP
ap-2227	62	13	137	137	NUM
ap-2227	62	14	d.	d.	NOUN
ap-2227	62	15	tsyrenov	tsyrenov	PROPN
ap-2227	62	16	,	,	PUNCT
ap-2227	62	17	a.	a.	NOUN
ap-2227	62	18	semenov	semenov	PROPN
ap-2227	62	19	,	,	PUNCT
ap-2227	62	20	n.	n.	PROPN
ap-2227	62	21	smirnyagina	smirnyagina	PROPN
ap-2227	62	22	acta	acta	PROPN
ap-2227	62	23	polytechnica	polytechnica	PROPN
ap-2227	62	24	figure	figure	NOUN
ap-2227	62	25	4	4	NUM
ap-2227	62	26	.	.	PUNCT
ap-2227	62	27	xrd	xrd	PROPN
ap-2227	62	28	patterns	pattern	NOUN
ap-2227	62	29	for	for	ADP
ap-2227	62	30	tin	tin	NOUN
ap-2227	62	31	-	-	PUNCT
ap-2227	62	32	cu	cu	NOUN
ap-2227	62	33	films	film	NOUN
ap-2227	62	34	:	:	PUNCT
ap-2227	62	35	a	a	X
ap-2227	62	36	)	)	PUNCT
ap-2227	62	37	tin	tin	NOUN
ap-2227	62	38	,	,	PUNCT
ap-2227	62	39	80a	80a	NOUN
ap-2227	62	40	;	;	PUNCT
ap-2227	62	41	b	b	X
ap-2227	62	42	)	)	PUNCT
ap-2227	62	43	tin	tin	NOUN
ap-2227	62	44	-	-	PUNCT
ap-2227	62	45	cu	cu	NOUN
ap-2227	62	46	,	,	PUNCT
ap-2227	62	47	90a	90a	NOUN
ap-2227	62	48	;	;	PUNCT
ap-2227	62	49	c	c	X
ap-2227	62	50	)	)	PUNCT
ap-2227	62	51	tin	tin	NOUN
ap-2227	62	52	-	-	PUNCT
ap-2227	62	53	cu	cu	NOUN
ap-2227	62	54	,	,	PUNCT
ap-2227	62	55	60a	60a	NOUN
ap-2227	62	56	(	(	PUNCT
ap-2227	62	57	220	220	NUM
ap-2227	62	58	mm	mm	NOUN
ap-2227	62	59	)	)	PUNCT
ap-2227	62	60	;	;	PUNCT
ap-2227	62	61	d	d	X
ap-2227	62	62	)	)	PUNCT
ap-2227	62	63	tin	tin	NOUN
ap-2227	62	64	-	-	PUNCT
ap-2227	62	65	cu	cu	NOUN
ap-2227	62	66	,	,	PUNCT
ap-2227	62	67	60a	60a	NOUN
ap-2227	62	68	(	(	PUNCT
ap-2227	62	69	280	280	NUM
ap-2227	62	70	mm	mm	NOUN
ap-2227	62	71	)	)	PUNCT
ap-2227	62	72	.	.	PUNCT
ap-2227	63	1	figure	figure	NOUN
ap-2227	63	2	5	5	NUM
ap-2227	63	3	.	.	PUNCT
ap-2227	63	4	microstructure	microstructure	NOUN
ap-2227	63	5	of	of	ADP
ap-2227	63	6	a	a	DET
ap-2227	63	7	tin	tin	ADJ
ap-2227	63	8	-	-	PUNCT
ap-2227	63	9	cu	cu	NOUN
ap-2227	63	10	layer	layer	NOUN
ap-2227	63	11	.	.	PUNCT
ap-2227	64	1	a	a	DET
ap-2227	64	2	=	=	ADJ
ap-2227	64	3	0.4254	0.4254	NUM
ap-2227	64	4	nm	nm	NOUN
ap-2227	64	5	is	be	AUX
ap-2227	64	6	observed	observe	VERB
ap-2227	64	7	(	(	PUNCT
ap-2227	64	8	table	table	NOUN
ap-2227	64	9	2	2	NUM
ap-2227	64	10	)	)	PUNCT
ap-2227	64	11	.	.	PUNCT
ap-2227	65	1	figure	figure	NOUN
ap-2227	65	2	5	5	NUM
ap-2227	65	3	shows	show	VERB
ap-2227	65	4	the	the	DET
ap-2227	65	5	microstructure	microstructure	NOUN
ap-2227	65	6	of	of	ADP
ap-2227	65	7	the	the	DET
ap-2227	65	8	surface	surface	NOUN
ap-2227	65	9	layer	layer	NOUN
ap-2227	65	10	of	of	ADP
ap-2227	65	11	the	the	DET
ap-2227	65	12	pattern	pattern	NOUN
ap-2227	65	13	with	with	ADP
ap-2227	65	14	copper	copper	NOUN
ap-2227	65	15	reflections	reflection	NOUN
ap-2227	65	16	(	(	PUNCT
ap-2227	65	17	pattern	pattern	NOUN
ap-2227	65	18	d	d	NOUN
ap-2227	65	19	)	)	PUNCT
ap-2227	65	20	.	.	PUNCT
ap-2227	66	1	a	a	DET
ap-2227	66	2	study	study	NOUN
ap-2227	66	3	of	of	ADP
ap-2227	66	4	the	the	DET
ap-2227	66	5	microstructure	microstructure	NOUN
ap-2227	66	6	of	of	ADP
ap-2227	66	7	a	a	DET
ap-2227	66	8	layer	layer	NOUN
ap-2227	66	9	surface	surface	NOUN
ap-2227	66	10	revealed	reveal	VERB
ap-2227	66	11	no	no	DET
ap-2227	66	12	presence	presence	NOUN
ap-2227	66	13	of	of	ADP
ap-2227	66	14	ti	ti	NOUN
ap-2227	66	15	drops	drop	VERB
ap-2227	66	16	.	.	PUNCT
ap-2227	67	1	the	the	DET
ap-2227	67	2	layers	layer	NOUN
ap-2227	67	3	have	have	VERB
ap-2227	67	4	a	a	DET
ap-2227	67	5	homogeneous	homogeneous	ADJ
ap-2227	67	6	grain	grain	NOUN
ap-2227	67	7	structure	structure	NOUN
ap-2227	67	8	.	.	PUNCT
ap-2227	68	1	there	there	PRON
ap-2227	68	2	may	may	AUX
ap-2227	68	3	be	be	AUX
ap-2227	68	4	some	some	DET
ap-2227	68	5	copper	copper	NOUN
ap-2227	68	6	on	on	ADP
ap-2227	68	7	the	the	DET
ap-2227	68	8	grain	grain	NOUN
ap-2227	68	9	borders	border	NOUN
ap-2227	68	10	.	.	PUNCT
ap-2227	69	1	it	it	PRON
ap-2227	69	2	can	can	AUX
ap-2227	69	3	be	be	AUX
ap-2227	69	4	expected	expect	VERB
ap-2227	69	5	that	that	SCONJ
ap-2227	69	6	the	the	DET
ap-2227	69	7	tin	tin	NOUN
ap-2227	69	8	grains	grain	NOUN
ap-2227	69	9	have	have	VERB
ap-2227	69	10	a	a	DET
ap-2227	69	11	column	column	NOUN
ap-2227	69	12	structurethe	structurethe	NOUN
ap-2227	69	13	changes	change	NOUN
ap-2227	69	14	in	in	ADP
ap-2227	69	15	the	the	DET
ap-2227	69	16	hardness	hardness	NOUN
ap-2227	69	17	of	of	ADP
ap-2227	69	18	the	the	DET
ap-2227	69	19	composite	composite	ADJ
ap-2227	69	20	tin	tin	NOUN
ap-2227	69	21	-	-	PUNCT
ap-2227	69	22	cu	cu	NOUN
ap-2227	69	23	films	film	NOUN
ap-2227	69	24	are	be	AUX
ap-2227	69	25	illustrated	illustrate	VERB
ap-2227	69	26	in	in	ADP
ap-2227	69	27	table	table	NOUN
ap-2227	69	28	2	2	NUM
ap-2227	69	29	.	.	PUNCT
ap-2227	70	1	the	the	DET
ap-2227	70	2	maximum	maximum	ADJ
ap-2227	70	3	hardness	hardness	ADJ
ap-2227	70	4	values	value	NOUN
ap-2227	70	5	for	for	ADP
ap-2227	70	6	composite	composite	ADJ
ap-2227	70	7	tin	tin	NOUN
ap-2227	70	8	-	-	PUNCT
ap-2227	70	9	cu	cu	NOUN
ap-2227	70	10	films	film	NOUN
ap-2227	70	11	were	be	AUX
ap-2227	70	12	measured	measure	VERB
ap-2227	70	13	to	to	PART
ap-2227	70	14	be	be	AUX
ap-2227	70	15	3910mpa	3910mpa	NOUN
ap-2227	70	16	.	.	PUNCT
ap-2227	71	1	the	the	DET
ap-2227	71	2	hardness	hardness	NOUN
ap-2227	71	3	of	of	ADP
ap-2227	71	4	the	the	DET
ap-2227	71	5	tin	tin	NOUN
ap-2227	71	6	layers	layer	NOUN
ap-2227	71	7	formed	form	VERB
ap-2227	71	8	by	by	ADP
ap-2227	71	9	reactive	reactive	ADJ
ap-2227	71	10	arc	arc	NOUN
ap-2227	71	11	evaporation	evaporation	NOUN
ap-2227	71	12	was	be	AUX
ap-2227	71	13	2910mpa	2910mpa	NOUN
ap-2227	71	14	.	.	PUNCT
ap-2227	72	1	this	this	DET
ap-2227	72	2	effective	effective	ADJ
ap-2227	72	3	increase	increase	NOUN
ap-2227	72	4	in	in	ADP
ap-2227	72	5	the	the	DET
ap-2227	72	6	hardness	hardness	NOUN
ap-2227	72	7	of	of	ADP
ap-2227	72	8	the	the	DET
ap-2227	72	9	composite	composite	ADJ
ap-2227	72	10	layer	layer	NOUN
ap-2227	72	11	may	may	AUX
ap-2227	72	12	be	be	AUX
ap-2227	72	13	connected	connect	VERB
ap-2227	72	14	with	with	ADP
ap-2227	72	15	the	the	DET
ap-2227	72	16	absence	absence	NOUN
ap-2227	72	17	of	of	ADP
ap-2227	72	18	the	the	DET
ap-2227	72	19	ti	ti	NOUN
ap-2227	72	20	drop	drop	NOUN
ap-2227	72	21	phase	phase	NOUN
ap-2227	72	22	and	and	CCONJ
ap-2227	72	23	with	with	ADP
ap-2227	72	24	the	the	DET
ap-2227	72	25	discovery	discovery	NOUN
ap-2227	72	26	of	of	ADP
ap-2227	72	27	cu	cu	PROPN
ap-2227	72	28	atoms	atom	NOUN
ap-2227	72	29	on	on	ADP
ap-2227	72	30	the	the	DET
ap-2227	72	31	borders	border	NOUN
ap-2227	72	32	of	of	ADP
ap-2227	72	33	the	the	DET
ap-2227	72	34	tin	tin	NOUN
ap-2227	72	35	grains	grain	NOUN
ap-2227	72	36	.	.	PUNCT
ap-2227	73	1	thus	thus	ADV
ap-2227	73	2	,	,	PUNCT
ap-2227	73	3	the	the	DET
ap-2227	73	4	structure	structure	NOUN
ap-2227	73	5	and	and	CCONJ
ap-2227	73	6	the	the	DET
ap-2227	73	7	phase	phase	NOUN
ap-2227	73	8	structure	structure	NOUN
ap-2227	73	9	of	of	ADP
ap-2227	73	10	a	a	DET
ap-2227	73	11	number	number	NOUN
ap-2227	73	12	crystal	crystal	NOUN
ap-2227	73	13	cell	cell	NOUN
ap-2227	73	14	micro	micro	PROPN
ap-2227	73	15	knoop	knoop	PROPN
ap-2227	73	16	tin	tin	PROPN
ap-2227	73	17	a	a	PROPN
ap-2227	73	18	,	,	PUNCT
ap-2227	73	19	nm	nm	ADV
ap-2227	73	20	hardness	hardness	NOUN
ap-2227	73	21	hk	hk	PROPN
ap-2227	73	22	pa	pa	PROPN
ap-2227	73	23	a	a	PRON
ap-2227	73	24	0.4310	0.4310	NUM
ap-2227	73	25	2560	2560	NUM
ap-2227	73	26	b	b	NOUN
ap-2227	73	27	0.4318	0.4318	NUM
ap-2227	73	28	2910	2910	NUM
ap-2227	73	29	c	c	X
ap-2227	73	30	0.4259	0.4259	NUM
ap-2227	73	31	1680	1680	NUM
ap-2227	73	32	d	d	SYM
ap-2227	73	33	0.4254	0.4254	NUM
ap-2227	73	34	3910	3910	NUM
ap-2227	73	35	table	table	NOUN
ap-2227	73	36	2	2	NUM
ap-2227	73	37	.	.	PUNCT
ap-2227	73	38	physical	physical	ADJ
ap-2227	73	39	properties	property	NOUN
ap-2227	73	40	of	of	ADP
ap-2227	73	41	the	the	DET
ap-2227	73	42	tin	tin	ADJ
ap-2227	73	43	-	-	PUNCT
ap-2227	73	44	cu	cu	NOUN
ap-2227	73	45	composite	composite	ADJ
ap-2227	73	46	films	film	NOUN
ap-2227	73	47	.	.	PUNCT
ap-2227	74	1	layer	layer	NOUN
ap-2227	74	2	of	of	ADP
ap-2227	74	3	composite	composite	ADJ
ap-2227	74	4	tin	tin	NOUN
ap-2227	74	5	-	-	PUNCT
ap-2227	74	6	cu	cu	NOUN
ap-2227	74	7	indicates	indicate	VERB
ap-2227	74	8	the	the	DET
ap-2227	74	9	formation	formation	NOUN
ap-2227	74	10	of	of	ADP
ap-2227	74	11	a	a	DET
ap-2227	74	12	composite	composite	ADJ
ap-2227	74	13	material	material	NOUN
ap-2227	74	14	combining	combine	VERB
ap-2227	74	15	firm	firm	ADJ
ap-2227	74	16	titanium	titanium	NOUN
ap-2227	74	17	nitride	nitride	NOUN
ap-2227	74	18	and	and	CCONJ
ap-2227	74	19	plastic	plastic	ADJ
ap-2227	74	20	copper	copper	NOUN
ap-2227	74	21	.	.	PUNCT
ap-2227	75	1	4	4	X
ap-2227	75	2	.	.	X
ap-2227	75	3	conclusion	conclusion	NOUN
ap-2227	75	4	preliminary	preliminary	ADJ
ap-2227	75	5	results	result	NOUN
ap-2227	75	6	have	have	AUX
ap-2227	75	7	been	be	AUX
ap-2227	75	8	obtained	obtain	VERB
ap-2227	75	9	for	for	ADP
ap-2227	75	10	a	a	DET
ap-2227	75	11	hybrid	hybrid	ADJ
ap-2227	75	12	technology	technology	NOUN
ap-2227	75	13	for	for	ADP
ap-2227	75	14	forming	form	VERB
ap-2227	75	15	composite	composite	ADJ
ap-2227	75	16	tin	tin	NOUN
ap-2227	75	17	-	-	PUNCT
ap-2227	75	18	cu	cu	NOUN
ap-2227	75	19	layers	layer	NOUN
ap-2227	75	20	with	with	ADP
ap-2227	75	21	a	a	DET
ap-2227	75	22	simultaneous	simultaneous	ADJ
ap-2227	75	23	combination	combination	NOUN
ap-2227	75	24	of	of	ADP
ap-2227	75	25	a	a	DET
ap-2227	75	26	vacuum	vacuum	NOUN
ap-2227	75	27	arc	arc	NOUN
ap-2227	75	28	evaporator	evaporator	NOUN
ap-2227	75	29	and	and	CCONJ
ap-2227	75	30	a	a	DET
ap-2227	75	31	planar	planar	ADJ
ap-2227	75	32	magnetron	magnetron	NOUN
ap-2227	75	33	.	.	PUNCT
ap-2227	76	1	composite	composite	ADJ
ap-2227	76	2	tin	tin	NOUN
ap-2227	76	3	-	-	PUNCT
ap-2227	76	4	cu	cu	NOUN
ap-2227	76	5	layers	layer	NOUN
ap-2227	76	6	with	with	ADP
ap-2227	76	7	different	different	ADJ
ap-2227	76	8	technological	technological	ADJ
ap-2227	76	9	parameters	parameter	NOUN
ap-2227	76	10	were	be	AUX
ap-2227	76	11	formed	form	VERB
ap-2227	76	12	.	.	PUNCT
ap-2227	77	1	a	a	DET
ap-2227	77	2	layer	layer	NOUN
ap-2227	77	3	of	of	ADP
ap-2227	77	4	the	the	DET
ap-2227	77	5	composite	composite	NOUN
ap-2227	77	6	has	have	VERB
ap-2227	77	7	a	a	DET
ap-2227	77	8	granular	granular	ADJ
ap-2227	77	9	structure	structure	NOUN
ap-2227	77	10	,	,	PUNCT
ap-2227	77	11	and	and	CCONJ
ap-2227	77	12	there	there	PRON
ap-2227	77	13	were	be	VERB
ap-2227	77	14	inclusions	inclusion	NOUN
ap-2227	77	15	of	of	ADP
ap-2227	77	16	copper	copper	NOUN
ap-2227	77	17	atoms	atom	NOUN
ap-2227	77	18	on	on	ADP
ap-2227	77	19	the	the	DET
ap-2227	77	20	border	border	NOUN
ap-2227	77	21	of	of	ADP
ap-2227	77	22	the	the	DET
ap-2227	77	23	tin	tin	NOUN
ap-2227	77	24	grains	grain	NOUN
ap-2227	77	25	.	.	PUNCT
ap-2227	78	1	the	the	DET
ap-2227	78	2	results	result	NOUN
ap-2227	78	3	of	of	ADP
ap-2227	78	4	studies	study	NOUN
ap-2227	78	5	of	of	ADP
ap-2227	78	6	tin	tin	NOUN
ap-2227	78	7	-	-	PUNCT
ap-2227	78	8	cu	cu	NOUN
ap-2227	78	9	layers	layer	NOUN
ap-2227	78	10	will	will	AUX
ap-2227	78	11	be	be	AUX
ap-2227	78	12	used	use	VERB
ap-2227	78	13	for	for	ADP
ap-2227	78	14	optimizing	optimize	VERB
ap-2227	78	15	the	the	DET
ap-2227	78	16	technological	technological	ADJ
ap-2227	78	17	process	process	NOUN
ap-2227	78	18	for	for	ADP
ap-2227	78	19	forming	form	VERB
ap-2227	78	20	a	a	DET
ap-2227	78	21	coating	coating	NOUN
ap-2227	78	22	with	with	ADP
ap-2227	78	23	the	the	DET
ap-2227	78	24	required	require	VERB
ap-2227	78	25	properties	property	NOUN
ap-2227	78	26	.	.	PUNCT
ap-2227	79	1	references	reference	NOUN
ap-2227	79	2	[	[	X
ap-2227	79	3	1	1	NUM
ap-2227	79	4	]	]	PUNCT
ap-2227	79	5	volosova	volosova	X
ap-2227	79	6	m.	m.	NOUN
ap-2227	79	7	a.	a.	PROPN
ap-2227	79	8	:	:	PUNCT
ap-2227	80	1	the	the	DET
ap-2227	80	2	technological	technological	ADJ
ap-2227	80	3	principles	principle	NOUN
ap-2227	80	4	deposition	deposition	NOUN
ap-2227	80	5	of	of	ADP
ap-2227	80	6	wear	wear	NOUN
ap-2227	80	7	-	-	PUNCT
ap-2227	80	8	resistant	resistant	ADJ
ap-2227	80	9	nanocoatings	nanocoating	NOUN
ap-2227	80	10	on	on	ADP
ap-2227	80	11	tool	tool	NOUN
ap-2227	80	12	ceramics	ceramic	NOUN
ap-2227	80	13	.	.	PUNCT
ap-2227	81	1	science	science	NOUN
ap-2227	81	2	and	and	CCONJ
ap-2227	81	3	technologies	technology	NOUN
ap-2227	81	4	.	.	PUNCT
ap-2227	82	1	results	result	NOUN
ap-2227	82	2	of	of	ADP
ap-2227	82	3	dissertation	dissertation	NOUN
ap-2227	82	4	researches	research	VERB
ap-2227	82	5	.	.	PUNCT
ap-2227	83	1	moscow	moscow	PROPN
ap-2227	83	2	:	:	PUNCT
ap-2227	83	3	vol	vol	NOUN
ap-2227	83	4	.	.	PROPN
ap-2227	83	5	1	1	NUM
ap-2227	83	6	,	,	PUNCT
ap-2227	83	7	2009	2009	NUM
ap-2227	83	8	–	–	PUNCT
ap-2227	83	9	p.	p.	NOUN
ap-2227	83	10	75–90	75–90	NUM
ap-2227	83	11	.	.	PUNCT
ap-2227	84	1	[	[	X
ap-2227	84	2	2	2	NUM
ap-2227	84	3	]	]	X
ap-2227	84	4	myung	myung	PROPN
ap-2227	84	5	h.s	h.s	PROPN
ap-2227	84	6	.	.	PROPN
ap-2227	84	7	,	,	PUNCT
ap-2227	84	8	lee	lee	PROPN
ap-2227	85	1	h.m	h.m	PROPN
ap-2227	85	2	.	.	PROPN
ap-2227	85	3	,	,	PUNCT
ap-2227	85	4	shaginyan	shaginyan	PROPN
ap-2227	85	5	l.r	l.r	PROPN
ap-2227	85	6	.	.	PROPN
ap-2227	85	7	,	,	PUNCT
ap-2227	85	8	han	han	PROPN
ap-2227	85	9	j.g	j.g	PROPN
ap-2227	85	10	..	..	PUNCT
ap-2227	85	11	microstructure	microstructure	ADJ
ap-2227	85	12	and	and	CCONJ
ap-2227	85	13	mechanical	mechanical	ADJ
ap-2227	85	14	properties	property	NOUN
ap-2227	85	15	of	of	ADP
ap-2227	85	16	cu	cu	PROPN
ap-2227	85	17	doped	dope	VERB
ap-2227	85	18	138	138	NUM
ap-2227	85	19	vol	vol	NOUN
ap-2227	85	20	.	.	PUNCT
ap-2227	86	1	55	55	NUM
ap-2227	86	2	no	no	NOUN
ap-2227	86	3	.	.	PUNCT
ap-2227	87	1	2/2015	2/2015	NUM
ap-2227	87	2	modernization	modernization	NOUN
ap-2227	87	3	features	feature	NOUN
ap-2227	87	4	of	of	ADP
ap-2227	87	5	a	a	DET
ap-2227	87	6	vacuum	vacuum	NOUN
ap-2227	87	7	installation	installation	NOUN
ap-2227	87	8	tin	tin	NOUN
ap-2227	87	9	superhard	superhard	NOUN
ap-2227	87	10	nanocomposite	nanocomposite	NOUN
ap-2227	87	11	coatings	coating	NOUN
ap-2227	87	12	.	.	PUNCT
ap-2227	88	1	surf	surf	PROPN
ap-2227	88	2	.	.	PUNCT
ap-2227	89	1	and	and	CCONJ
ap-2227	89	2	coat	coat	NOUN
ap-2227	89	3	.	.	PUNCT
ap-2227	90	1	techn	techn	PROPN
ap-2227	90	2	.	.	PROPN
ap-2227	91	1	–	–	PUNCT
ap-2227	91	2	2003	2003	NUM
ap-2227	91	3	.	.	PUNCT
ap-2227	92	1	–	–	PUNCT
ap-2227	92	2	vol	vol	NOUN
ap-2227	92	3	.	.	NOUN
ap-2227	92	4	163	163	NUM
ap-2227	92	5	-	-	SYM
ap-2227	92	6	164	164	NUM
ap-2227	92	7	.	.	PUNCT
ap-2227	92	8	–	–	PUNCT
ap-2227	93	1	p.	p.	NOUN
ap-2227	93	2	591–596	591–596	NUM
ap-2227	93	3	.	.	PUNCT
ap-2227	94	1	[	[	X
ap-2227	94	2	3	3	X
ap-2227	94	3	]	]	PUNCT
ap-2227	94	4	he	he	PRON
ap-2227	94	5	j.l	j.l	PROPN
ap-2227	94	6	.	.	PROPN
ap-2227	94	7	,	,	PUNCT
ap-2227	94	8	sethuhara	sethuhara	PROPN
ap-2227	94	9	y.	y.	PROPN
ap-2227	94	10	,	,	PUNCT
ap-2227	94	11	shimuzu	shimuzu	PROPN
ap-2227	94	12	i.	i.	PROPN
ap-2227	94	13	,	,	PUNCT
ap-2227	94	14	miyake	miyake	PROPN
ap-2227	94	15	s.	s.	PROPN
ap-2227	94	16	structure	structure	PROPN
ap-2227	94	17	refinement	refinement	PROPN
ap-2227	94	18	and	and	CCONJ
ap-2227	94	19	hardness	hardness	NOUN
ap-2227	94	20	enhancement	enhancement	NOUN
ap-2227	94	21	of	of	ADP
ap-2227	94	22	titanium	titanium	NOUN
ap-2227	94	23	nitride	nitride	ADJ
ap-2227	94	24	films	film	NOUN
ap-2227	94	25	by	by	ADP
ap-2227	94	26	addition	addition	NOUN
ap-2227	94	27	of	of	ADP
ap-2227	94	28	copper	copper	NOUN
ap-2227	94	29	.	.	PUNCT
ap-2227	95	1	surf	surf	PROPN
ap-2227	95	2	.	.	PUNCT
ap-2227	96	1	and	and	CCONJ
ap-2227	96	2	coat	coat	NOUN
ap-2227	96	3	.	.	PUNCT
ap-2227	97	1	techn	techn	PROPN
ap-2227	97	2	.	.	PROPN
ap-2227	98	1	–	–	PUNCT
ap-2227	98	2	2001	2001	NUM
ap-2227	98	3	.	.	PUNCT
ap-2227	99	1	–	–	PUNCT
ap-2227	99	2	vol	vol	NOUN
ap-2227	99	3	.	.	PUNCT
ap-2227	99	4	137	137	NUM
ap-2227	99	5	.	.	PUNCT
ap-2227	100	1	–	–	PUNCT
ap-2227	100	2	p.	p.	NOUN
ap-2227	100	3	38142	38142	NUM
ap-2227	100	4	.	.	PUNCT
ap-2227	101	1	[	[	X
ap-2227	101	2	4	4	NUM
ap-2227	101	3	]	]	SYM
ap-2227	101	4	pribytkov	pribytkov	NOUN
ap-2227	101	5	g.a	g.a	PROPN
ap-2227	101	6	.	.	PROPN
ap-2227	101	7	,	,	PUNCT
ap-2227	101	8	korosteleva	korosteleva	PROPN
ap-2227	101	9	e.n	e.n	PROPN
ap-2227	101	10	.	.	PROPN
ap-2227	101	11	,	,	PUNCT
ap-2227	101	12	psakhie	psakhie	PROPN
ap-2227	101	13	s.g	s.g	PROPN
ap-2227	101	14	.	.	PROPN
ap-2227	101	15	,	,	PUNCT
ap-2227	101	16	goncharenko	goncharenko	PROPN
ap-2227	101	17	i.m	i.m	PROPN
ap-2227	101	18	.	.	PROPN
ap-2227	101	19	,	,	PUNCT
ap-2227	101	20	ivanov	ivanov	PROPN
ap-2227	101	21	yu.f	yu.f	PROPN
ap-2227	101	22	.	.	PROPN
ap-2227	101	23	,	,	PUNCT
ap-2227	101	24	koval	koval	PROPN
ap-2227	101	25	n.n	n.n	PROPN
ap-2227	101	26	.	.	PROPN
ap-2227	101	27	,	,	PUNCT
ap-2227	101	28	shanin	shanin	PROPN
ap-2227	101	29	p.m.	p.m.	NOUN
ap-2227	101	30	,	,	PUNCT
ap-2227	101	31	gurskih	gurskih	PROPN
ap-2227	101	32	a.v	a.v	PROPN
ap-2227	101	33	.	.	PROPN
ap-2227	101	34	,	,	PUNCT
ap-2227	101	35	korjova	korjova	PROPN
ap-2227	101	36	v.v	v.v	PROPN
ap-2227	101	37	.	.	PROPN
ap-2227	101	38	,	,	PUNCT
ap-2227	101	39	mironov	mironov	PROPN
ap-2227	101	40	yu.p	yu.p	PROPN
ap-2227	101	41	.	.	PUNCT
ap-2227	102	1	nanostructured	nanostructure	VERB
ap-2227	102	2	titanium	titanium	NOUN
ap-2227	102	3	nitride	nitride	ADJ
ap-2227	102	4	coatings	coating	NOUN
ap-2227	102	5	produced	produce	VERB
ap-2227	102	6	by	by	ADP
ap-2227	102	7	arc	arc	NOUN
ap-2227	102	8	sputtering	sputtering	NOUN
ap-2227	102	9	of	of	ADP
ap-2227	102	10	composite	composite	ADJ
ap-2227	102	11	cathodes	cathode	NOUN
ap-2227	102	12	.	.	PUNCT
ap-2227	103	1	i.	i.	NOUN
ap-2227	103	2	cathodes	cathode	NOUN
ap-2227	103	3	structure	structure	NOUN
ap-2227	103	4	,	,	PUNCT
ap-2227	103	5	phase	phase	NOUN
ap-2227	103	6	composition	composition	NOUN
ap-2227	103	7	and	and	CCONJ
ap-2227	103	8	sputtering	sputtering	ADJ
ap-2227	103	9	peculiarities	peculiarity	NOUN
ap-2227	103	10	.	.	PUNCT
ap-2227	104	1	proceedings	proceeding	NOUN
ap-2227	104	2	of	of	ADP
ap-2227	104	3	7	7	NUM
ap-2227	104	4	int	int	NOUN
ap-2227	104	5	.	.	PUNCT
ap-2227	105	1	conf	conf	PROPN
ap-2227	105	2	.	.	PUNCT
ap-2227	106	1	on	on	ADP
ap-2227	106	2	modification	modification	NOUN
ap-2227	106	3	of	of	ADP
ap-2227	106	4	materials	material	NOUN
ap-2227	106	5	with	with	ADP
ap-2227	106	6	particle	particle	NOUN
ap-2227	106	7	beams	beam	NOUN
ap-2227	106	8	and	and	CCONJ
ap-2227	106	9	plasma	plasma	NOUN
ap-2227	106	10	flows	flow	NOUN
ap-2227	106	11	.	.	PUNCT
ap-2227	107	1	tomsk	tomsk	PROPN
ap-2227	107	2	.	.	PUNCT
ap-2227	107	3	–	–	PUNCT
ap-2227	107	4	2004	2004	NUM
ap-2227	107	5	.	.	PUNCT
ap-2227	107	6	–	–	PUNCT
ap-2227	108	1	p.	p.	NOUN
ap-2227	108	2	163–166	163–166	NUM
ap-2227	108	3	.	.	PUNCT
ap-2227	109	1	[	[	X
ap-2227	109	2	5	5	X
ap-2227	109	3	]	]	X
ap-2227	109	4	korotaev	korotaev	PROPN
ap-2227	109	5	a.d	a.d	PROPN
ap-2227	109	6	.	.	PROPN
ap-2227	109	7	,	,	PUNCT
ap-2227	109	8	moshkov	moshkov	PROPN
ap-2227	110	1	v.yu	v.yu	PROPN
ap-2227	110	2	.	.	PROPN
ap-2227	110	3	,	,	PUNCT
ap-2227	110	4	ovchinnikov	ovchinnikov	PROPN
ap-2227	110	5	s.v	s.v	PROPN
ap-2227	110	6	.	.	PROPN
ap-2227	110	7	,	,	PUNCT
ap-2227	110	8	pinzhin	pinzhin	PROPN
ap-2227	110	9	yu.p	yu.p	PROPN
ap-2227	110	10	.	.	PUNCT
ap-2227	110	11	,	,	PUNCT
ap-2227	110	12	savostikov	savostikov	NOUN
ap-2227	110	13	v.m	v.m	PROPN
ap-2227	110	14	.	.	PROPN
ap-2227	110	15	,	,	PUNCT
ap-2227	110	16	tyumentsev	tyumentsev	PROPN
ap-2227	110	17	a.n	a.n	PROPN
ap-2227	110	18	.	.	PROPN
ap-2227	110	19	nanostructured	nanostructure	VERB
ap-2227	110	20	and	and	CCONJ
ap-2227	110	21	nanocomposite	nanocomposite	PROPN
ap-2227	110	22	superhard	superhard	NOUN
ap-2227	110	23	coatings	coating	NOUN
ap-2227	110	24	.	.	PUNCT
ap-2227	111	1	physical	physical	ADJ
ap-2227	111	2	mesomechanics	mesomechanic	NOUN
ap-2227	111	3	–	–	PUNCT
ap-2227	111	4	2005	2005	NUM
ap-2227	111	5	.	.	PUNCT
ap-2227	112	1	–	–	PUNCT
ap-2227	112	2	vol	vol	NOUN
ap-2227	112	3	.	.	NOUN
ap-2227	112	4	8	8	NUM
ap-2227	112	5	,	,	PUNCT
ap-2227	112	6	№	№	ADV
ap-2227	112	7	5	5	NUM
ap-2227	112	8	.	.	PUNCT
ap-2227	112	9	–	–	PUNCT
ap-2227	113	1	p.	p.	NOUN
ap-2227	113	2	103–116	103–116	NUM
ap-2227	113	3	.	.	PUNCT
ap-2227	114	1	139	139	NUM
ap-2227	114	2	acta	acta	PROPN
ap-2227	114	3	polytechnica	polytechnica	PROPN
ap-2227	114	4	55(2):136–139	55(2):136–139	PROPN
ap-2227	114	5	,	,	PUNCT
ap-2227	114	6	2015	2015	NUM
ap-2227	114	7	1	1	NUM
ap-2227	114	8	introduction	introduction	NOUN
ap-2227	114	9	2	2	NUM
ap-2227	114	10	experimental	experimental	ADJ
ap-2227	114	11	part	part	NOUN
ap-2227	114	12	3	3	NUM
ap-2227	114	13	results	result	NOUN
ap-2227	114	14	and	and	CCONJ
ap-2227	114	15	discussion	discussion	NOUN
ap-2227	114	16	4	4	NUM
ap-2227	114	17	conclusion	conclusion	NOUN
ap-2227	114	18	references	reference	NOUN