id	sid	tid	token	lemma	pos
ap-2228	1	1	acta	acta	PROPN
ap-2228	1	2	polytechnica	polytechnica	PROPN
ap-2228	1	3	doi:10.14311	doi:10.14311	PROPN
ap-2228	1	4	/	/	SYM
ap-2228	1	5	ap.2014.54.0389	ap.2014.54.0389	PROPN
ap-2228	1	6	acta	acta	PROPN
ap-2228	1	7	polytechnica	polytechnica	PROPN
ap-2228	1	8	54(6):389–393	54(6):389–393	PROPN
ap-2228	1	9	,	,	PUNCT
ap-2228	1	10	2014	2014	NUM
ap-2228	1	11	©	©	PROPN
ap-2228	1	12	czech	czech	PROPN
ap-2228	1	13	technical	technical	PROPN
ap-2228	1	14	university	university	PROPN
ap-2228	1	15	in	in	ADP
ap-2228	1	16	prague	prague	PROPN
ap-2228	1	17	,	,	PUNCT
ap-2228	1	18	2014	2014	NUM
ap-2228	1	19	available	available	ADJ
ap-2228	1	20	online	online	ADV
ap-2228	1	21	at	at	ADP
ap-2228	1	22	http://ojs.cvut.cz/ojs/index.php/ap	http://ojs.cvut.cz/ojs/index.php/ap	PROPN
ap-2228	1	23	deposition	deposition	NOUN
ap-2228	1	24	of	of	ADP
ap-2228	1	25	carbon	carbon	NOUN
ap-2228	1	26	nanostructures	nanostructure	NOUN
ap-2228	1	27	by	by	ADP
ap-2228	1	28	surfatron	surfatron	NOUN
ap-2228	1	29	generated	generate	VERB
ap-2228	1	30	discharge	discharge	NOUN
ap-2228	1	31	marina	marina	NOUN
ap-2228	1	32	davydovaa,∗	davydovaa,∗	PROPN
ap-2228	1	33	,	,	PUNCT
ap-2228	1	34	jiri	jiri	PROPN
ap-2228	1	35	smidb	smidb	PROPN
ap-2228	1	36	,	,	PUNCT
ap-2228	1	37	zdenek	zdenek	PROPN
ap-2228	1	38	hubickab	hubickab	PROPN
ap-2228	1	39	,	,	PUNCT
ap-2228	1	40	alexander	alexander	PROPN
ap-2228	1	41	kromkaa	kromkaa	PROPN
ap-2228	1	42	a	a	DET
ap-2228	1	43	institute	institute	PROPN
ap-2228	1	44	of	of	ADP
ap-2228	1	45	physics	physics	NOUN
ap-2228	1	46	ascr	ascr	NOUN
ap-2228	1	47	,	,	PUNCT
ap-2228	1	48	cukrovarnicka	cukrovarnicka	NOUN
ap-2228	1	49	10	10	NUM
ap-2228	1	50	,	,	PUNCT
ap-2228	1	51	prague	prague	NOUN
ap-2228	1	52	,	,	PUNCT
ap-2228	1	53	czech	czech	PROPN
ap-2228	1	54	republic	republic	PROPN
ap-2228	1	55	b	b	PROPN
ap-2228	1	56	institute	institute	PROPN
ap-2228	1	57	of	of	ADP
ap-2228	1	58	physics	physics	NOUN
ap-2228	1	59	ascr	ascr	NOUN
ap-2228	1	60	,	,	PUNCT
ap-2228	1	61	na	na	AUX
ap-2228	1	62	slovance	slovance	NOUN
ap-2228	1	63	2	2	NUM
ap-2228	1	64	,	,	PUNCT
ap-2228	1	65	prague	prague	NOUN
ap-2228	1	66	,	,	PUNCT
ap-2228	1	67	czech	czech	PROPN
ap-2228	1	68	republic	republic	NOUN
ap-2228	1	69	∗	∗	NOUN
ap-2228	1	70	corresponding	correspond	VERB
ap-2228	1	71	author	author	NOUN
ap-2228	1	72	:	:	PUNCT
ap-2228	1	73	davydova@fzu.cz	davydova@fzu.cz	NOUN
ap-2228	1	74	abstract	abstract	ADJ
ap-2228	1	75	.	.	PUNCT
ap-2228	2	1	various	various	ADJ
ap-2228	2	2	carbon	carbon	NOUN
ap-2228	2	3	nanostructures	nanostructure	NOUN
ap-2228	2	4	were	be	AUX
ap-2228	2	5	deposited	deposit	VERB
ap-2228	2	6	by	by	ADP
ap-2228	2	7	surface	surface	NOUN
ap-2228	2	8	wave	wave	NOUN
ap-2228	2	9	discharge	discharge	NOUN
ap-2228	2	10	from	from	ADP
ap-2228	2	11	an	an	DET
ap-2228	2	12	ar	ar	PROPN
ap-2228	2	13	/	/	SYM
ap-2228	2	14	ch4	ch4	NOUN
ap-2228	2	15	/	/	SYM
ap-2228	2	16	co2	co2	NOUN
ap-2228	2	17	gas	gas	NOUN
ap-2228	2	18	mixture	mixture	NOUN
ap-2228	2	19	.	.	PUNCT
ap-2228	3	1	the	the	DET
ap-2228	3	2	type	type	NOUN
ap-2228	3	3	and	and	CCONJ
ap-2228	3	4	the	the	DET
ap-2228	3	5	form	form	NOUN
ap-2228	3	6	of	of	ADP
ap-2228	3	7	the	the	DET
ap-2228	3	8	carbon	carbon	NOUN
ap-2228	3	9	nanostructure	nanostructure	NOUN
ap-2228	3	10	were	be	AUX
ap-2228	3	11	controlled	control	VERB
ap-2228	3	12	by	by	ADP
ap-2228	3	13	the	the	DET
ap-2228	3	14	gas	gas	NOUN
ap-2228	3	15	mixture	mixture	NOUN
ap-2228	3	16	and	and	CCONJ
ap-2228	3	17	the	the	DET
ap-2228	3	18	gas	gas	NOUN
ap-2228	3	19	inlet	inlet	NOUN
ap-2228	3	20	.	.	PUNCT
ap-2228	4	1	the	the	DET
ap-2228	4	2	nanostructures	nanostructure	NOUN
ap-2228	4	3	that	that	PRON
ap-2228	4	4	formed	form	VERB
ap-2228	4	5	were	be	AUX
ap-2228	4	6	investigated	investigate	VERB
ap-2228	4	7	by	by	ADP
ap-2228	4	8	scanning	scan	VERB
ap-2228	4	9	electron	electron	NOUN
ap-2228	4	10	microscopy	microscopy	NOUN
ap-2228	4	11	and	and	CCONJ
ap-2228	4	12	by	by	ADP
ap-2228	4	13	raman	raman	NOUN
ap-2228	4	14	measurements	measurement	NOUN
ap-2228	4	15	.	.	PUNCT
ap-2228	5	1	the	the	DET
ap-2228	5	2	influence	influence	NOUN
ap-2228	5	3	of	of	ADP
ap-2228	5	4	the	the	DET
ap-2228	5	5	geometrical	geometrical	ADJ
ap-2228	5	6	combination	combination	NOUN
ap-2228	5	7	of	of	ADP
ap-2228	5	8	the	the	DET
ap-2228	5	9	gas	gas	NOUN
ap-2228	5	10	inlets	inlet	NOUN
ap-2228	5	11	(	(	PUNCT
ap-2228	5	12	via	via	ADP
ap-2228	5	13	surfatrons	surfatron	NOUN
ap-2228	5	14	or	or	CCONJ
ap-2228	5	15	via	via	ADP
ap-2228	5	16	the	the	DET
ap-2228	5	17	gas	gas	NOUN
ap-2228	5	18	shower	shower	NOUN
ap-2228	5	19	system	system	NOUN
ap-2228	5	20	)	)	PUNCT
ap-2228	5	21	into	into	ADP
ap-2228	5	22	the	the	DET
ap-2228	5	23	chamber	chamber	NOUN
ap-2228	5	24	is	be	AUX
ap-2228	5	25	found	find	VERB
ap-2228	5	26	to	to	PART
ap-2228	5	27	be	be	AUX
ap-2228	5	28	a	a	DET
ap-2228	5	29	crucial	crucial	ADJ
ap-2228	5	30	deposition	deposition	NOUN
ap-2228	5	31	parameter	parameter	NOUN
ap-2228	5	32	for	for	ADP
ap-2228	5	33	the	the	DET
ap-2228	5	34	controllable	controllable	ADJ
ap-2228	5	35	growth	growth	NOUN
ap-2228	5	36	of	of	ADP
ap-2228	5	37	desired	desire	VERB
ap-2228	5	38	carbon	carbon	NOUN
ap-2228	5	39	nanostructures	nanostructure	NOUN
ap-2228	5	40	.	.	PUNCT
ap-2228	6	1	keywords	keyword	NOUN
ap-2228	6	2	:	:	PUNCT
ap-2228	6	3	surfatron	surfatron	NOUN
ap-2228	6	4	,	,	PUNCT
ap-2228	6	5	carbon	carbon	NOUN
ap-2228	6	6	nanostructures	nanostructure	NOUN
ap-2228	6	7	,	,	PUNCT
ap-2228	6	8	microwave	microwave	NOUN
ap-2228	6	9	plasma	plasma	NOUN
ap-2228	6	10	,	,	PUNCT
ap-2228	6	11	pecvd	pecvd	NOUN
ap-2228	6	12	.	.	PUNCT
ap-2228	7	1	1	1	X
ap-2228	7	2	.	.	X
ap-2228	7	3	introduction	introduction	NOUN
ap-2228	7	4	plasmas	plasma	NOUN
ap-2228	7	5	are	be	AUX
ap-2228	7	6	extremely	extremely	ADV
ap-2228	7	7	successful	successful	ADJ
ap-2228	7	8	in	in	ADP
ap-2228	7	9	many	many	ADJ
ap-2228	7	10	industrial	industrial	ADJ
ap-2228	7	11	thin	thin	ADJ
ap-2228	7	12	-	-	PUNCT
ap-2228	7	13	film	film	NOUN
ap-2228	7	14	applications	application	NOUN
ap-2228	7	15	,	,	PUNCT
ap-2228	7	16	e.g.	e.g.	ADV
ap-2228	7	17	in	in	ADP
ap-2228	7	18	the	the	DET
ap-2228	7	19	production	production	NOUN
ap-2228	7	20	of	of	ADP
ap-2228	7	21	microelectronic	microelectronic	ADJ
ap-2228	7	22	devices	device	NOUN
ap-2228	7	23	and	and	CCONJ
ap-2228	7	24	solar	solar	ADJ
ap-2228	7	25	cells	cell	NOUN
ap-2228	7	26	[	[	X
ap-2228	7	27	1	1	X
ap-2228	7	28	]	]	PUNCT
ap-2228	7	29	and	and	CCONJ
ap-2228	7	30	for	for	ADP
ap-2228	7	31	biomedical	biomedical	ADJ
ap-2228	7	32	applications	application	NOUN
ap-2228	7	33	[	[	X
ap-2228	7	34	2	2	NUM
ap-2228	7	35	]	]	PUNCT
ap-2228	7	36	.	.	PUNCT
ap-2228	8	1	many	many	ADJ
ap-2228	8	2	of	of	ADP
ap-2228	8	3	these	these	DET
ap-2228	8	4	thin	thin	ADJ
ap-2228	8	5	-	-	PUNCT
ap-2228	8	6	film	film	NOUN
ap-2228	8	7	materials	material	NOUN
ap-2228	8	8	have	have	AUX
ap-2228	8	9	been	be	AUX
ap-2228	8	10	successfully	successfully	ADV
ap-2228	8	11	developed	develop	VERB
ap-2228	8	12	using	use	VERB
ap-2228	8	13	mainly	mainly	ADV
ap-2228	8	14	empirical	empirical	ADJ
ap-2228	8	15	methods	method	NOUN
ap-2228	8	16	.	.	PUNCT
ap-2228	9	1	microwave	microwave	NOUN
ap-2228	9	2	(	(	PUNCT
ap-2228	9	3	mw	mw	PROPN
ap-2228	9	4	)	)	PUNCT
ap-2228	9	5	plasma	plasma	NOUN
ap-2228	9	6	is	be	AUX
ap-2228	9	7	frequently	frequently	ADV
ap-2228	9	8	used	use	VERB
ap-2228	9	9	in	in	ADP
ap-2228	9	10	so	so	ADV
ap-2228	9	11	-	-	PUNCT
ap-2228	9	12	called	call	VERB
ap-2228	9	13	plasma	plasma	NOUN
ap-2228	9	14	-	-	PUNCT
ap-2228	9	15	enhanced	enhance	VERB
ap-2228	9	16	chemical	chemical	NOUN
ap-2228	9	17	vapor	vapor	NOUN
ap-2228	9	18	deposition	deposition	NOUN
ap-2228	9	19	(	(	PUNCT
ap-2228	9	20	pecvd	pecvd	NOUN
ap-2228	9	21	)	)	PUNCT
ap-2228	9	22	.	.	PUNCT
ap-2228	10	1	in	in	ADP
ap-2228	10	2	mw	mw	PROPN
ap-2228	10	3	pecvd	pecvd	NOUN
ap-2228	10	4	,	,	PUNCT
ap-2228	10	5	the	the	DET
ap-2228	10	6	feed	feed	NOUN
ap-2228	10	7	gas	gas	NOUN
ap-2228	10	8	mixture	mixture	NOUN
ap-2228	10	9	is	be	AUX
ap-2228	10	10	ionized	ionize	VERB
ap-2228	10	11	and	and	CCONJ
ap-2228	10	12	excited	excite	VERB
ap-2228	10	13	by	by	ADP
ap-2228	10	14	microwave	microwave	NOUN
ap-2228	10	15	radiation	radiation	NOUN
ap-2228	10	16	in	in	ADP
ap-2228	10	17	a	a	DET
ap-2228	10	18	reaction	reaction	NOUN
ap-2228	10	19	chamber	chamber	NOUN
ap-2228	10	20	.	.	PUNCT
ap-2228	11	1	ionized	ionize	VERB
ap-2228	11	2	and	and	CCONJ
ap-2228	11	3	exited	exit	VERB
ap-2228	11	4	neutral	neutral	ADJ
ap-2228	11	5	atomic	atomic	ADJ
ap-2228	11	6	and	and	CCONJ
ap-2228	11	7	molecular	molecular	ADJ
ap-2228	11	8	components	component	NOUN
ap-2228	11	9	from	from	ADP
ap-2228	11	10	plasma	plasma	NOUN
ap-2228	11	11	,	,	PUNCT
ap-2228	11	12	generally	generally	ADV
ap-2228	11	13	of	of	ADP
ap-2228	11	14	low	low	ADJ
ap-2228	11	15	fractional	fractional	ADJ
ap-2228	11	16	ionization	ionization	NOUN
ap-2228	11	17	,	,	PUNCT
ap-2228	11	18	in	in	ADP
ap-2228	11	19	which	which	PRON
ap-2228	11	20	radicals	radical	NOUN
ap-2228	11	21	and	and	CCONJ
ap-2228	11	22	neutral	neutral	ADJ
ap-2228	11	23	react	react	NOUN
ap-2228	11	24	and/or	and/or	CCONJ
ap-2228	11	25	recombine	recombine	VERB
ap-2228	11	26	and	and	CCONJ
ap-2228	11	27	finally	finally	ADV
ap-2228	11	28	condense	condense	VERB
ap-2228	11	29	onto	onto	ADP
ap-2228	11	30	the	the	DET
ap-2228	11	31	substrate	substrate	NOUN
ap-2228	11	32	as	as	ADP
ap-2228	11	33	a	a	DET
ap-2228	11	34	thin	thin	ADJ
ap-2228	11	35	film	film	NOUN
ap-2228	11	36	[	[	X
ap-2228	11	37	3	3	NUM
ap-2228	11	38	]	]	PUNCT
ap-2228	11	39	.	.	PUNCT
ap-2228	12	1	the	the	DET
ap-2228	12	2	commercial	commercial	ADJ
ap-2228	12	3	and	and	CCONJ
ap-2228	12	4	technical	technical	ADJ
ap-2228	12	5	value	value	NOUN
ap-2228	12	6	of	of	ADP
ap-2228	12	7	low	low	ADJ
ap-2228	12	8	temperature	temperature	NOUN
ap-2228	12	9	plasmas	plasma	NOUN
ap-2228	12	10	is	be	AUX
ap-2228	12	11	well	well	ADV
ap-2228	12	12	established	establish	VERB
ap-2228	12	13	.	.	PUNCT
ap-2228	13	1	among	among	ADP
ap-2228	13	2	the	the	DET
ap-2228	13	3	broad	broad	ADJ
ap-2228	13	4	range	range	NOUN
ap-2228	13	5	of	of	ADP
ap-2228	13	6	plasmas	plasma	NOUN
ap-2228	13	7	,	,	PUNCT
ap-2228	13	8	surface	surface	NOUN
ap-2228	13	9	wave	wave	NOUN
ap-2228	13	10	discharge	discharge	NOUN
ap-2228	13	11	(	(	PUNCT
ap-2228	13	12	swd	swd	PROPN
ap-2228	13	13	)	)	PUNCT
ap-2228	13	14	is	be	AUX
ap-2228	13	15	nowadays	nowadays	ADV
ap-2228	13	16	considered	consider	VERB
ap-2228	13	17	promising	promise	VERB
ap-2228	13	18	as	as	ADP
ap-2228	13	19	a	a	DET
ap-2228	13	20	low	low	ADJ
ap-2228	13	21	-	-	PUNCT
ap-2228	13	22	temperature	temperature	NOUN
ap-2228	13	23	process	process	NOUN
ap-2228	13	24	for	for	ADP
ap-2228	13	25	depositing	deposit	VERB
ap-2228	13	26	various	various	ADJ
ap-2228	13	27	coatings	coating	NOUN
ap-2228	13	28	.	.	PUNCT
ap-2228	14	1	swd	swd	PROPN
ap-2228	14	2	is	be	AUX
ap-2228	14	3	widely	widely	ADV
ap-2228	14	4	used	use	VERB
ap-2228	14	5	in	in	ADP
ap-2228	14	6	the	the	DET
ap-2228	14	7	engineering	engineering	NOUN
ap-2228	14	8	industries	industry	NOUN
ap-2228	14	9	as	as	ADP
ap-2228	14	10	a	a	DET
ap-2228	14	11	source	source	NOUN
ap-2228	14	12	of	of	ADP
ap-2228	14	13	reactive	reactive	ADJ
ap-2228	14	14	radicals	radical	NOUN
ap-2228	14	15	and	and	CCONJ
ap-2228	14	16	for	for	ADP
ap-2228	14	17	depositing	deposit	VERB
ap-2228	14	18	zno	zno	NOUN
ap-2228	14	19	thin	thin	ADJ
ap-2228	14	20	films	film	NOUN
ap-2228	14	21	,	,	PUNCT
ap-2228	14	22	sioxcyh	sioxcyh	VERB
ap-2228	14	23	thin	thin	ADJ
ap-2228	14	24	films	film	NOUN
ap-2228	14	25	,	,	PUNCT
ap-2228	14	26	semiconductive	semiconductive	ADJ
ap-2228	14	27	sige	sige	ADJ
ap-2228	14	28	films	film	NOUN
ap-2228	14	29	,	,	PUNCT
ap-2228	14	30	and	and	CCONJ
ap-2228	14	31	some	some	DET
ap-2228	14	32	others	other	NOUN
ap-2228	15	1	[	[	X
ap-2228	15	2	4–7	4–7	NOUN
ap-2228	15	3	]	]	X
ap-2228	15	4	.	.	PUNCT
ap-2228	16	1	however	however	ADV
ap-2228	16	2	,	,	PUNCT
ap-2228	16	3	deposition	deposition	NOUN
ap-2228	16	4	of	of	ADP
ap-2228	16	5	carbon	carbon	NOUN
ap-2228	16	6	nanostructures	nanostructure	NOUN
ap-2228	16	7	by	by	ADP
ap-2228	16	8	swd	swd	PROPN
ap-2228	16	9	is	be	AUX
ap-2228	16	10	not	not	PART
ap-2228	16	11	broadly	broadly	ADV
ap-2228	16	12	used	use	VERB
ap-2228	16	13	.	.	PUNCT
ap-2228	17	1	swd	swd	PROPN
ap-2228	17	2	is	be	AUX
ap-2228	17	3	characterized	characterize	VERB
ap-2228	17	4	by	by	ADP
ap-2228	17	5	the	the	DET
ap-2228	17	6	transport	transport	NOUN
ap-2228	17	7	of	of	ADP
ap-2228	17	8	energy	energy	NOUN
ap-2228	17	9	toward	toward	ADP
ap-2228	17	10	an	an	DET
ap-2228	17	11	active	active	ADJ
ap-2228	17	12	plasma	plasma	NOUN
ap-2228	17	13	area	area	NOUN
ap-2228	17	14	by	by	ADP
ap-2228	17	15	an	an	DET
ap-2228	17	16	electromagnetic	electromagnetic	ADJ
ap-2228	17	17	wave	wave	NOUN
ap-2228	17	18	that	that	PRON
ap-2228	17	19	is	be	AUX
ap-2228	17	20	spread	spread	VERB
ap-2228	17	21	along	along	ADP
ap-2228	17	22	the	the	DET
ap-2228	17	23	plasma	plasma	NOUN
ap-2228	17	24	column	column	NOUN
ap-2228	17	25	[	[	X
ap-2228	17	26	7	7	NUM
ap-2228	17	27	]	]	PUNCT
ap-2228	17	28	.	.	PUNCT
ap-2228	18	1	the	the	DET
ap-2228	18	2	so	so	ADV
ap-2228	18	3	-	-	PUNCT
ap-2228	18	4	called	call	VERB
ap-2228	18	5	surfatron	surfatron	NOUN
ap-2228	18	6	waveguide	waveguide	NOUN
ap-2228	18	7	can	can	AUX
ap-2228	18	8	operate	operate	VERB
ap-2228	18	9	both	both	PRON
ap-2228	18	10	in	in	ADP
ap-2228	18	11	a	a	DET
ap-2228	18	12	continuous	continuous	ADJ
ap-2228	18	13	regime	regime	NOUN
ap-2228	18	14	and	and	CCONJ
ap-2228	18	15	in	in	ADP
ap-2228	18	16	a	a	DET
ap-2228	18	17	pulsed	pulse	VERB
ap-2228	18	18	regime	regime	NOUN
ap-2228	18	19	employing	employ	VERB
ap-2228	18	20	a	a	DET
ap-2228	18	21	microwave	microwave	NOUN
ap-2228	18	22	generator	generator	NOUN
ap-2228	18	23	.	.	PUNCT
ap-2228	19	1	low	low	ADJ
ap-2228	19	2	-	-	PUNCT
ap-2228	19	3	temperature	temperature	NOUN
ap-2228	19	4	mw	mw	NOUN
ap-2228	19	5	plasma	plasma	NOUN
ap-2228	19	6	is	be	AUX
ap-2228	19	7	a	a	DET
ap-2228	19	8	strongly	strongly	ADV
ap-2228	19	9	nonequilibrium	nonequilibrium	NOUN
ap-2228	19	10	system	system	NOUN
ap-2228	19	11	generating	generate	VERB
ap-2228	19	12	an	an	DET
ap-2228	19	13	exotic	exotic	ADJ
ap-2228	19	14	physical	physical	ADJ
ap-2228	19	15	and	and	CCONJ
ap-2228	19	16	chemical	chemical	NOUN
ap-2228	19	17	environment	environment	NOUN
ap-2228	19	18	through	through	ADP
ap-2228	19	19	free	free	ADJ
ap-2228	19	20	electrons	electron	NOUN
ap-2228	19	21	at	at	ADP
ap-2228	19	22	low	low	ADJ
ap-2228	19	23	gas	gas	NOUN
ap-2228	19	24	temperatures	temperature	NOUN
ap-2228	19	25	.	.	PUNCT
ap-2228	20	1	this	this	DET
ap-2228	20	2	unique	unique	ADJ
ap-2228	20	3	environment	environment	NOUN
ap-2228	20	4	allows	allow	VERB
ap-2228	20	5	the	the	DET
ap-2228	20	6	treatment	treatment	NOUN
ap-2228	20	7	of	of	ADP
ap-2228	20	8	temperature	temperature	NOUN
ap-2228	20	9	-	-	PUNCT
ap-2228	20	10	sensitive	sensitive	ADJ
ap-2228	20	11	materials	material	NOUN
ap-2228	20	12	at	at	ADP
ap-2228	20	13	molecular	molecular	ADJ
ap-2228	20	14	precision	precision	NOUN
ap-2228	20	15	.	.	PUNCT
ap-2228	21	1	in	in	ADP
ap-2228	21	2	the	the	DET
ap-2228	21	3	present	present	ADJ
ap-2228	21	4	work	work	NOUN
ap-2228	21	5	we	we	PRON
ap-2228	21	6	investigate	investigate	VERB
ap-2228	21	7	the	the	DET
ap-2228	21	8	growth	growth	NOUN
ap-2228	21	9	of	of	ADP
ap-2228	21	10	various	various	ADJ
ap-2228	21	11	carbon	carbon	NOUN
ap-2228	21	12	nanostructures	nanostructure	NOUN
ap-2228	21	13	by	by	ADP
ap-2228	21	14	surface	surface	NOUN
ap-2228	21	15	wave	wave	NOUN
ap-2228	21	16	discharge	discharge	NOUN
ap-2228	21	17	.	.	PUNCT
ap-2228	22	1	the	the	DET
ap-2228	22	2	influence	influence	NOUN
ap-2228	22	3	on	on	ADP
ap-2228	22	4	the	the	DET
ap-2228	22	5	deposition	deposition	NOUN
ap-2228	22	6	process	process	NOUN
ap-2228	22	7	of	of	ADP
ap-2228	22	8	gas	gas	NOUN
ap-2228	22	9	flow	flow	NOUN
ap-2228	22	10	rate	rate	NOUN
ap-2228	22	11	,	,	PUNCT
ap-2228	22	12	gas	gas	NOUN
ap-2228	22	13	mixture	mixture	NOUN
ap-2228	22	14	and	and	CCONJ
ap-2228	22	15	the	the	DET
ap-2228	22	16	geometrical	geometrical	ADJ
ap-2228	22	17	combination	combination	NOUN
ap-2228	22	18	of	of	ADP
ap-2228	22	19	gas	gas	NOUN
ap-2228	22	20	inlets	inlet	NOUN
ap-2228	22	21	(	(	PUNCT
ap-2228	22	22	via	via	ADP
ap-2228	22	23	surfatrons	surfatron	NOUN
ap-2228	22	24	or	or	CCONJ
ap-2228	22	25	via	via	ADP
ap-2228	22	26	a	a	DET
ap-2228	22	27	gas	gas	NOUN
ap-2228	22	28	shower	shower	NOUN
ap-2228	22	29	system	system	NOUN
ap-2228	22	30	)	)	PUNCT
ap-2228	22	31	into	into	ADP
ap-2228	22	32	the	the	DET
ap-2228	22	33	chamber	chamber	NOUN
ap-2228	22	34	is	be	AUX
ap-2228	22	35	discussed	discuss	VERB
ap-2228	22	36	here	here	ADV
ap-2228	22	37	.	.	PUNCT
ap-2228	23	1	2	2	X
ap-2228	23	2	.	.	X
ap-2228	23	3	experimental	experimental	ADJ
ap-2228	23	4	details	detail	NOUN
ap-2228	23	5	2.1	2.1	NUM
ap-2228	23	6	.	.	PUNCT
ap-2228	23	7	deposition	deposition	NOUN
ap-2228	23	8	system	system	NOUN
ap-2228	23	9	figure	figure	NOUN
ap-2228	23	10	1	1	NUM
ap-2228	23	11	shows	show	VERB
ap-2228	23	12	the	the	DET
ap-2228	23	13	experimental	experimental	ADJ
ap-2228	23	14	set	set	NOUN
ap-2228	23	15	-	-	PUNCT
ap-2228	23	16	up	up	NOUN
ap-2228	23	17	of	of	ADP
ap-2228	23	18	a	a	DET
ap-2228	23	19	modified	modify	VERB
ap-2228	23	20	plasma	plasma	NOUN
ap-2228	23	21	-	-	PUNCT
ap-2228	23	22	enhanced	enhance	VERB
ap-2228	23	23	cvd	cvd	PROPN
ap-2228	23	24	reactor	reactor	NOUN
ap-2228	23	25	[	[	X
ap-2228	23	26	7	7	NUM
ap-2228	23	27	]	]	PUNCT
ap-2228	23	28	.	.	PUNCT
ap-2228	24	1	the	the	DET
ap-2228	24	2	plasma	plasma	NOUN
ap-2228	24	3	system	system	NOUN
ap-2228	24	4	consists	consist	VERB
ap-2228	24	5	of	of	ADP
ap-2228	24	6	4	4	NUM
ap-2228	24	7	independent	independent	ADJ
ap-2228	24	8	nozzles	nozzle	NOUN
ap-2228	24	9	(	(	PUNCT
ap-2228	24	10	surfatrons	surfatron	NOUN
ap-2228	24	11	)	)	PUNCT
ap-2228	24	12	which	which	PRON
ap-2228	24	13	form	form	VERB
ap-2228	24	14	a	a	DET
ap-2228	24	15	single	single	ADJ
ap-2228	24	16	swd	swd	PROPN
ap-2228	24	17	.	.	PUNCT
ap-2228	25	1	the	the	DET
ap-2228	25	2	nozzles	nozzle	NOUN
ap-2228	25	3	are	be	AUX
ap-2228	25	4	connected	connect	VERB
ap-2228	25	5	to	to	ADP
ap-2228	25	6	the	the	DET
ap-2228	25	7	microwave	microwave	NOUN
ap-2228	25	8	source	source	NOUN
ap-2228	25	9	(	(	PUNCT
ap-2228	25	10	2.45ghz	2.45ghz	NUM
ap-2228	25	11	)	)	PUNCT
ap-2228	25	12	.	.	PUNCT
ap-2228	26	1	the	the	DET
ap-2228	26	2	mw	mw	PROPN
ap-2228	26	3	generator	generator	NOUN
ap-2228	26	4	used	use	VERB
ap-2228	26	5	here	here	ADV
ap-2228	26	6	can	can	AUX
ap-2228	26	7	be	be	AUX
ap-2228	26	8	operated	operate	VERB
ap-2228	26	9	both	both	CCONJ
ap-2228	26	10	in	in	ADP
ap-2228	26	11	continuous	continuous	ADJ
ap-2228	26	12	mode	mode	NOUN
ap-2228	26	13	and	and	CCONJ
ap-2228	26	14	in	in	ADP
ap-2228	26	15	pulsed	pulsed	ADJ
ap-2228	26	16	mode	mode	NOUN
ap-2228	26	17	,	,	PUNCT
ap-2228	26	18	with	with	ADP
ap-2228	26	19	averaged	average	VERB
ap-2228	26	20	absorbed	absorb	VERB
ap-2228	26	21	power	power	NOUN
ap-2228	26	22	of	of	ADP
ap-2228	26	23	about	about	ADP
ap-2228	26	24	300w	300w	NOUN
ap-2228	26	25	per	per	ADP
ap-2228	26	26	surfatron	surfatron	NOUN
ap-2228	26	27	and	and	CCONJ
ap-2228	26	28	with	with	ADP
ap-2228	26	29	repetition	repetition	NOUN
ap-2228	26	30	frequency	frequency	NOUN
ap-2228	26	31	f	f	NOUN
ap-2228	26	32	=	=	PUNCT
ap-2228	26	33	60hz	60hz	NOUN
ap-2228	26	34	.	.	PUNCT
ap-2228	27	1	the	the	DET
ap-2228	27	2	process	process	NOUN
ap-2228	27	3	gases	gas	NOUN
ap-2228	27	4	were	be	AUX
ap-2228	27	5	introduced	introduce	VERB
ap-2228	27	6	into	into	ADP
ap-2228	27	7	the	the	DET
ap-2228	27	8	vacuum	vacuum	PROPN
ap-2228	27	9	chamber	chamber	PROPN
ap-2228	27	10	via	via	ADP
ap-2228	27	11	surfatrons	surfatron	NOUN
ap-2228	27	12	(	(	PUNCT
ap-2228	27	13	1	1	NUM
ap-2228	27	14	or	or	CCONJ
ap-2228	27	15	4	4	NUM
ap-2228	27	16	nozzles	nozzle	NOUN
ap-2228	27	17	)	)	PUNCT
ap-2228	27	18	or	or	CCONJ
ap-2228	27	19	via	via	ADP
ap-2228	27	20	a	a	DET
ap-2228	27	21	gas	gas	NOUN
ap-2228	27	22	shower	shower	NOUN
ap-2228	27	23	.	.	PUNCT
ap-2228	28	1	the	the	DET
ap-2228	28	2	distance	distance	NOUN
ap-2228	28	3	between	between	ADP
ap-2228	28	4	the	the	DET
ap-2228	28	5	sample	sample	NOUN
ap-2228	28	6	and	and	CCONJ
ap-2228	28	7	the	the	DET
ap-2228	28	8	surfatron	surfatron	NOUN
ap-2228	28	9	outlet(s	outlet(s	NUM
ap-2228	28	10	)	)	PUNCT
ap-2228	28	11	,	,	PUNCT
ap-2228	28	12	i.e.	i.e.	X
ap-2228	28	13	,	,	PUNCT
ap-2228	28	14	the	the	DET
ap-2228	28	15	quartz	quartz	NOUN
ap-2228	28	16	tube	tube	NOUN
ap-2228	28	17	,	,	PUNCT
ap-2228	28	18	varied	varied	ADJ
ap-2228	28	19	in	in	ADP
ap-2228	28	20	the	the	DET
ap-2228	28	21	range	range	NOUN
ap-2228	28	22	from	from	ADP
ap-2228	28	23	1	1	NUM
ap-2228	28	24	to	to	ADP
ap-2228	28	25	3	3	NUM
ap-2228	28	26	cm	cm	NOUN
ap-2228	28	27	.	.	PUNCT
ap-2228	29	1	2.2	2.2	NUM
ap-2228	29	2	.	.	PUNCT
ap-2228	29	3	deposition	deposition	NOUN
ap-2228	29	4	of	of	ADP
ap-2228	29	5	carbon	carbon	NOUN
ap-2228	29	6	nanostructures	nanostructure	NOUN
ap-2228	29	7	the	the	DET
ap-2228	29	8	deposition	deposition	NOUN
ap-2228	29	9	of	of	ADP
ap-2228	29	10	the	the	DET
ap-2228	29	11	carbon	carbon	NOUN
ap-2228	29	12	nanostructures	nanostructure	NOUN
ap-2228	29	13	comprised	comprise	VERB
ap-2228	29	14	three	three	NUM
ap-2228	29	15	steps	step	NOUN
ap-2228	29	16	:	:	PUNCT
ap-2228	29	17	(	(	PUNCT
ap-2228	29	18	1	1	NUM
ap-2228	29	19	.	.	PUNCT
ap-2228	29	20	)	)	PUNCT
ap-2228	30	1	a	a	DET
ap-2228	30	2	catalyst	catalyst	NOUN
ap-2228	30	3	fabrication	fabrication	NOUN
ap-2228	30	4	step	step	NOUN
ap-2228	30	5	,	,	PUNCT
ap-2228	30	6	which	which	PRON
ap-2228	30	7	employed	employ	VERB
ap-2228	30	8	thermal	thermal	ADJ
ap-2228	30	9	evaporation	evaporation	NOUN
ap-2228	30	10	of	of	ADP
ap-2228	30	11	an	an	DET
ap-2228	30	12	ni	ni	NOUN
ap-2228	30	13	layer	layer	NOUN
ap-2228	30	14	(	(	PUNCT
ap-2228	30	15	6	6	NUM
ap-2228	30	16	nm	nm	NOUN
ap-2228	30	17	in	in	ADP
ap-2228	30	18	thickness	thickness	NOUN
ap-2228	30	19	)	)	PUNCT
ap-2228	30	20	on	on	ADP
ap-2228	30	21	10	10	NUM
ap-2228	30	22	×	×	NOUN
ap-2228	30	23	10mm2	10mm2	NUM
ap-2228	30	24	si	si	PROPN
ap-2228	30	25	/	/	SYM
ap-2228	30	26	sio2	sio2	NOUN
ap-2228	30	27	substrates	substrate	NOUN
ap-2228	30	28	.	.	PUNCT
ap-2228	31	1	the	the	DET
ap-2228	31	2	thickness	thickness	NOUN
ap-2228	31	3	of	of	ADP
ap-2228	31	4	the	the	DET
ap-2228	31	5	ni	ni	PROPN
ap-2228	31	6	was	be	AUX
ap-2228	31	7	monitored	monitor	VERB
ap-2228	31	8	by	by	ADP
ap-2228	31	9	in	in	ADP
ap-2228	31	10	situ	situ	ADJ
ap-2228	31	11	measurements	measurement	NOUN
ap-2228	31	12	,	,	PUNCT
ap-2228	31	13	using	use	VERB
ap-2228	31	14	a	a	DET
ap-2228	31	15	quartz	quartz	NOUN
ap-2228	31	16	-	-	PUNCT
ap-2228	31	17	crystal	crystal	NOUN
ap-2228	31	18	-	-	PUNCT
ap-2228	31	19	based	base	VERB
ap-2228	31	20	thickness	thickness	NOUN
ap-2228	31	21	monitor	monitor	NOUN
ap-2228	31	22	(	(	PUNCT
ap-2228	31	23	inficon	inficon	VERB
ap-2228	31	24	xtc/2	xtc/2	PROPN
ap-2228	31	25	)	)	PUNCT
ap-2228	31	26	.	.	PUNCT
ap-2228	32	1	(	(	PUNCT
ap-2228	32	2	2	2	NUM
ap-2228	32	3	.	.	PUNCT
ap-2228	32	4	)	)	PUNCT
ap-2228	33	1	a	a	DET
ap-2228	33	2	thermal	thermal	ADJ
ap-2228	33	3	treatment	treatment	NOUN
ap-2228	33	4	step	step	NOUN
ap-2228	33	5	,	,	PUNCT
ap-2228	33	6	during	during	ADP
ap-2228	33	7	which	which	PRON
ap-2228	33	8	the	the	DET
ap-2228	33	9	si	si	PROPN
ap-2228	33	10	/	/	SYM
ap-2228	33	11	sio2	sio2	NOUN
ap-2228	33	12	substrates	substrate	NOUN
ap-2228	33	13	covered	cover	VERB
ap-2228	33	14	with	with	ADP
ap-2228	33	15	a	a	DET
ap-2228	33	16	catalyst	catalyst	NOUN
ap-2228	33	17	layer	layer	NOUN
ap-2228	33	18	were	be	AUX
ap-2228	33	19	thermally	thermally	ADV
ap-2228	33	20	treated	treat	VERB
ap-2228	33	21	in	in	ADP
ap-2228	33	22	hydrogen	hydrogen	NOUN
ap-2228	33	23	plasma	plasma	NOUN
ap-2228	33	24	using	use	VERB
ap-2228	33	25	the	the	DET
ap-2228	33	26	large	large	ADJ
ap-2228	33	27	area	area	NOUN
ap-2228	33	28	pulsed	pulse	VERB
ap-2228	33	29	linear	linear	ADJ
ap-2228	33	30	-	-	PUNCT
ap-2228	33	31	antenna	antenna	NOUN
ap-2228	33	32	microwave	microwave	NOUN
ap-2228	33	33	plasma	plasma	NOUN
ap-2228	33	34	389	389	NUM
ap-2228	33	35	http://dx.doi.org/10.14311/ap.2014.54.0389	http://dx.doi.org/10.14311/ap.2014.54.0389	NOUN
ap-2228	33	36	http://ojs.cvut.cz/ojs/index.php/ap	http://ojs.cvut.cz/ojs/index.php/ap	PROPN
ap-2228	33	37	m.	m.	NOUN
ap-2228	33	38	davydova	davydova	NOUN
ap-2228	33	39	,	,	PUNCT
ap-2228	33	40	j.	j.	PROPN
ap-2228	33	41	smid	smid	PROPN
ap-2228	33	42	,	,	PUNCT
ap-2228	33	43	z.	z.	PROPN
ap-2228	33	44	hubicka	hubicka	PROPN
ap-2228	33	45	,	,	PUNCT
ap-2228	33	46	a.	a.	NOUN
ap-2228	33	47	kromka	kromka	PROPN
ap-2228	33	48	acta	acta	PROPN
ap-2228	33	49	polytechnica	polytechnica	PROPN
ap-2228	33	50	(	(	PUNCT
ap-2228	33	51	a	a	NOUN
ap-2228	33	52	)	)	PUNCT
ap-2228	33	53	(	(	PUNCT
ap-2228	33	54	b	b	X
ap-2228	33	55	)	)	PUNCT
ap-2228	33	56	figure	figure	NOUN
ap-2228	33	57	1	1	NUM
ap-2228	33	58	.	.	PUNCT
ap-2228	33	59	schematic	schematic	ADJ
ap-2228	33	60	view	view	NOUN
ap-2228	33	61	of	of	ADP
ap-2228	33	62	the	the	DET
ap-2228	33	63	modified	modify	VERB
ap-2228	33	64	plasma	plasma	NOUN
ap-2228	33	65	-	-	PUNCT
ap-2228	33	66	enhanced	enhance	VERB
ap-2228	33	67	cvd	cvd	PROPN
ap-2228	33	68	surface	surface	NOUN
ap-2228	33	69	-	-	PUNCT
ap-2228	33	70	wave	wave	NOUN
ap-2228	33	71	discharge	discharge	NOUN
ap-2228	33	72	set	set	NOUN
ap-2228	33	73	-	-	PUNCT
ap-2228	33	74	up	up	NOUN
ap-2228	33	75	used	use	VERB
ap-2228	33	76	for	for	ADP
ap-2228	33	77	depositing	deposit	VERB
ap-2228	33	78	the	the	DET
ap-2228	33	79	carbon	carbon	NOUN
ap-2228	33	80	nanostructures	nanostructure	NOUN
ap-2228	33	81	(	(	PUNCT
ap-2228	33	82	a	a	NOUN
ap-2228	33	83	)	)	PUNCT
ap-2228	33	84	and	and	CCONJ
ap-2228	33	85	the	the	DET
ap-2228	33	86	digital	digital	ADJ
ap-2228	33	87	photography	photography	NOUN
ap-2228	33	88	inside	inside	ADP
ap-2228	33	89	the	the	DET
ap-2228	33	90	vacuum	vacuum	PROPN
ap-2228	33	91	chamber	chamber	PROPN
ap-2228	33	92	(	(	PUNCT
ap-2228	33	93	b	b	NOUN
ap-2228	33	94	)	)	PUNCT
ap-2228	33	95	.	.	PUNCT
ap-2228	34	1	(	(	PUNCT
ap-2228	34	2	a	a	X
ap-2228	34	3	)	)	PUNCT
ap-2228	34	4	(	(	PUNCT
ap-2228	34	5	b	b	X
ap-2228	34	6	)	)	PUNCT
ap-2228	34	7	(	(	PUNCT
ap-2228	34	8	c	c	X
ap-2228	34	9	)	)	PUNCT
ap-2228	34	10	(	(	PUNCT
ap-2228	34	11	d	d	X
ap-2228	34	12	)	)	PUNCT
ap-2228	34	13	figure	figure	NOUN
ap-2228	34	14	2	2	NUM
ap-2228	34	15	.	.	PUNCT
ap-2228	34	16	surface	surface	NOUN
ap-2228	34	17	morphology	morphology	NOUN
ap-2228	34	18	of	of	ADP
ap-2228	34	19	carbon	carbon	NOUN
ap-2228	34	20	nanostructures	nanostructure	NOUN
ap-2228	34	21	deposited	deposit	VERB
ap-2228	34	22	under	under	ADP
ap-2228	34	23	various	various	ADJ
ap-2228	34	24	conditions	condition	NOUN
ap-2228	34	25	:	:	PUNCT
ap-2228	34	26	(	(	PUNCT
ap-2228	34	27	a	a	X
ap-2228	34	28	,	,	PUNCT
ap-2228	34	29	c	c	NOUN
ap-2228	34	30	)	)	PUNCT
ap-2228	34	31	ar	ar	NOUN
ap-2228	34	32	/	/	SYM
ap-2228	34	33	co2	co2	NOUN
ap-2228	34	34	gases	gas	NOUN
ap-2228	34	35	were	be	AUX
ap-2228	34	36	injected	inject	VERB
ap-2228	34	37	through	through	ADP
ap-2228	34	38	the	the	DET
ap-2228	34	39	single	single	ADJ
ap-2228	34	40	surfatron	surfatron	NOUN
ap-2228	34	41	,	,	PUNCT
ap-2228	34	42	and	and	CCONJ
ap-2228	34	43	ch4	ch4	NOUN
ap-2228	34	44	was	be	AUX
ap-2228	34	45	transported	transport	VERB
ap-2228	34	46	via	via	ADP
ap-2228	34	47	a	a	DET
ap-2228	34	48	parallel	parallel	ADJ
ap-2228	34	49	surfatron	surfatron	NOUN
ap-2228	34	50	,	,	PUNCT
ap-2228	34	51	(	(	PUNCT
ap-2228	34	52	b	b	X
ap-2228	34	53	,	,	PUNCT
ap-2228	34	54	d	d	NOUN
ap-2228	34	55	)	)	PUNCT
ap-2228	34	56	ar	ar	ADJ
ap-2228	34	57	/	/	SYM
ap-2228	34	58	co2	co2	NOUN
ap-2228	34	59	gases	gas	NOUN
ap-2228	34	60	were	be	AUX
ap-2228	34	61	injected	inject	VERB
ap-2228	34	62	via	via	ADP
ap-2228	34	63	4	4	NUM
ap-2228	34	64	surfatrons	surfatron	NOUN
ap-2228	34	65	and	and	CCONJ
ap-2228	34	66	co2	co2	NOUN
ap-2228	34	67	/	/	SYM
ap-2228	34	68	ch4	ch4	NOUN
ap-2228	34	69	gases	gas	NOUN
ap-2228	34	70	were	be	AUX
ap-2228	34	71	introduced	introduce	VERB
ap-2228	34	72	through	through	ADP
ap-2228	34	73	the	the	DET
ap-2228	34	74	shower	shower	NOUN
ap-2228	34	75	head	head	NOUN
ap-2228	34	76	.	.	PUNCT
ap-2228	35	1	cvd	cvd	PROPN
ap-2228	35	2	process	process	VERB
ap-2228	35	3	[	[	X
ap-2228	35	4	8	8	NUM
ap-2228	35	5	]	]	PUNCT
ap-2228	35	6	.	.	PUNCT
ap-2228	36	1	the	the	DET
ap-2228	36	2	process	process	NOUN
ap-2228	36	3	conditions	condition	NOUN
ap-2228	36	4	were	be	AUX
ap-2228	36	5	as	as	SCONJ
ap-2228	36	6	follows	follow	VERB
ap-2228	36	7	:	:	PUNCT
ap-2228	36	8	p	p	X
ap-2228	36	9	=	=	NOUN
ap-2228	36	10	1700w	1700w	NOUN
ap-2228	36	11	,	,	PUNCT
ap-2228	36	12	gas	gas	NOUN
ap-2228	36	13	pressure	pressure	NOUN
ap-2228	36	14	20	20	NUM
ap-2228	36	15	mbar	mbar	NOUN
ap-2228	36	16	,	,	PUNCT
ap-2228	36	17	h2	h2	NOUN
ap-2228	36	18	flow	flow	NOUN
ap-2228	36	19	300	300	NUM
ap-2228	36	20	sccm	sccm	NOUN
ap-2228	36	21	,	,	PUNCT
ap-2228	36	22	substrate	substrate	NOUN
ap-2228	36	23	temperature	temperature	NOUN
ap-2228	36	24	ts	ts	ADP
ap-2228	36	25	=	=	PUNCT
ap-2228	36	26	650	650	NUM
ap-2228	36	27	°	°	NUM
ap-2228	36	28	c	c	NOUN
ap-2228	36	29	and	and	CCONJ
ap-2228	36	30	treatment	treatment	NOUN
ap-2228	36	31	time	time	NOUN
ap-2228	36	32	10min	10min	NOUN
ap-2228	36	33	.	.	PUNCT
ap-2228	37	1	after	after	ADP
ap-2228	37	2	the	the	DET
ap-2228	37	3	annealing	annealing	NOUN
ap-2228	37	4	process	process	NOUN
ap-2228	37	5	,	,	PUNCT
ap-2228	37	6	the	the	DET
ap-2228	37	7	catalyst	catalyst	NOUN
ap-2228	37	8	layer	layer	NOUN
ap-2228	37	9	decomposed	decompose	VERB
ap-2228	37	10	into	into	ADP
ap-2228	37	11	small	small	ADJ
ap-2228	37	12	nickel	nickel	NOUN
ap-2228	37	13	clusters	cluster	NOUN
ap-2228	37	14	about	about	ADV
ap-2228	37	15	40	40	NUM
ap-2228	37	16	nm	nm	NOUN
ap-2228	37	17	in	in	ADP
ap-2228	37	18	diameter	diameter	NOUN
ap-2228	37	19	.	.	PUNCT
ap-2228	38	1	(	(	PUNCT
ap-2228	38	2	3	3	NUM
ap-2228	38	3	.	.	PUNCT
ap-2228	38	4	)	)	PUNCT
ap-2228	38	5	deposition	deposition	NOUN
ap-2228	38	6	of	of	ADP
ap-2228	38	7	carbon	carbon	NOUN
ap-2228	38	8	nanostructures	nanostructure	NOUN
ap-2228	38	9	,	,	PUNCT
ap-2228	38	10	which	which	PRON
ap-2228	38	11	was	be	AUX
ap-2228	38	12	carried	carry	VERB
ap-2228	38	13	out	out	ADP
ap-2228	38	14	using	use	VERB
ap-2228	38	15	the	the	DET
ap-2228	38	16	modified	modify	VERB
ap-2228	38	17	plasma	plasma	NOUN
ap-2228	38	18	swd	swd	PROPN
ap-2228	38	19	pecvd	pecvd	NOUN
ap-2228	38	20	system	system	NOUN
ap-2228	38	21	.	.	PUNCT
ap-2228	39	1	the	the	DET
ap-2228	39	2	system	system	NOUN
ap-2228	39	3	was	be	AUX
ap-2228	39	4	pumped	pump	VERB
ap-2228	39	5	to	to	ADP
ap-2228	39	6	a	a	DET
ap-2228	39	7	base	base	NOUN
ap-2228	39	8	pressure	pressure	NOUN
ap-2228	39	9	of	of	ADP
ap-2228	39	10	0.008	0.008	NUM
ap-2228	39	11	mbar	mbar	NOUN
ap-2228	39	12	and	and	CCONJ
ap-2228	39	13	was	be	AUX
ap-2228	39	14	then	then	ADV
ap-2228	39	15	maintained	maintain	VERB
ap-2228	39	16	at	at	ADP
ap-2228	39	17	a	a	DET
ap-2228	39	18	pressure	pressure	NOUN
ap-2228	39	19	of	of	ADP
ap-2228	39	20	0.2	0.2	NUM
ap-2228	39	21	mbar	mbar	NOUN
ap-2228	39	22	by	by	ADP
ap-2228	39	23	introducing	introduce	VERB
ap-2228	39	24	an	an	DET
ap-2228	39	25	ar	ar	NOUN
ap-2228	39	26	carrier	carrier	NOUN
ap-2228	39	27	gas	gas	NOUN
ap-2228	39	28	at	at	ADP
ap-2228	39	29	a	a	DET
ap-2228	39	30	flow	flow	NOUN
ap-2228	39	31	rate	rate	NOUN
ap-2228	39	32	of	of	ADP
ap-2228	39	33	100	100	NUM
ap-2228	39	34	sccm	sccm	NOUN
ap-2228	39	35	and	and	CCONJ
ap-2228	39	36	various	various	ADJ
ap-2228	39	37	ratios	ratio	NOUN
ap-2228	39	38	of	of	ADP
ap-2228	39	39	co2	co2	NOUN
ap-2228	39	40	and	and	CCONJ
ap-2228	39	41	ch4	ch4	NOUN
ap-2228	39	42	.	.	PUNCT
ap-2228	40	1	the	the	DET
ap-2228	40	2	flow	flow	NOUN
ap-2228	40	3	of	of	ADP
ap-2228	40	4	methane	methane	NOUN
ap-2228	40	5	was	be	AUX
ap-2228	40	6	changed	change	VERB
ap-2228	40	7	from	from	ADP
ap-2228	40	8	60	60	NUM
ap-2228	40	9	to	to	PART
ap-2228	40	10	90	90	NUM
ap-2228	40	11	sccm	sccm	NOUN
ap-2228	40	12	,	,	PUNCT
ap-2228	40	13	while	while	SCONJ
ap-2228	40	14	the	the	DET
ap-2228	40	15	flow	flow	NOUN
ap-2228	40	16	of	of	ADP
ap-2228	40	17	carbon	carbon	NOUN
ap-2228	40	18	dioxide	dioxide	NOUN
ap-2228	40	19	was	be	AUX
ap-2228	40	20	kept	keep	VERB
ap-2228	40	21	at	at	ADP
ap-2228	40	22	a	a	DET
ap-2228	40	23	constant	constant	ADJ
ap-2228	40	24	value	value	NOUN
ap-2228	40	25	of	of	ADP
ap-2228	40	26	30	30	NUM
ap-2228	40	27	sccm	sccm	NOUN
ap-2228	40	28	.	.	PUNCT
ap-2228	41	1	a	a	DET
ap-2228	41	2	microwave	microwave	NOUN
ap-2228	41	3	power	power	NOUN
ap-2228	41	4	input	input	NOUN
ap-2228	41	5	of	of	ADP
ap-2228	41	6	300w	300w	NOUN
ap-2228	41	7	operated	operate	VERB
ap-2228	41	8	in	in	ADP
ap-2228	41	9	the	the	DET
ap-2228	41	10	external	external	ADJ
ap-2228	41	11	modulation	modulation	NOUN
ap-2228	41	12	mode	mode	NOUN
ap-2228	41	13	was	be	AUX
ap-2228	41	14	used	use	VERB
ap-2228	41	15	in	in	ADP
ap-2228	41	16	all	all	DET
ap-2228	41	17	the	the	DET
ap-2228	41	18	experiments	experiment	NOUN
ap-2228	41	19	.	.	PUNCT
ap-2228	42	1	dur390	dur390	ADJ
ap-2228	42	2	vol	vol	NOUN
ap-2228	42	3	.	.	PUNCT
ap-2228	43	1	54	54	NUM
ap-2228	43	2	no	no	NOUN
ap-2228	43	3	.	.	PUNCT
ap-2228	44	1	6/2014	6/2014	NUM
ap-2228	44	2	deposition	deposition	NOUN
ap-2228	44	3	of	of	ADP
ap-2228	44	4	carbon	carbon	NOUN
ap-2228	44	5	nanostructures	nanostructure	NOUN
ap-2228	44	6	by	by	ADP
ap-2228	44	7	surfatron	surfatron	NOUN
ap-2228	44	8	generated	generate	VERB
ap-2228	44	9	discharge	discharge	NOUN
ap-2228	44	10	(	(	PUNCT
ap-2228	44	11	a	a	NOUN
ap-2228	44	12	)	)	PUNCT
ap-2228	44	13	(	(	PUNCT
ap-2228	44	14	b	b	X
ap-2228	44	15	)	)	PUNCT
ap-2228	44	16	figure	figure	NOUN
ap-2228	44	17	3	3	NUM
ap-2228	44	18	.	.	PUNCT
ap-2228	44	19	top	top	ADJ
ap-2228	44	20	-	-	PUNCT
ap-2228	44	21	view	view	NOUN
ap-2228	44	22	sem	sem	NOUN
ap-2228	44	23	image	image	NOUN
ap-2228	44	24	(	(	PUNCT
ap-2228	44	25	a	a	NOUN
ap-2228	44	26	)	)	PUNCT
ap-2228	44	27	and	and	CCONJ
ap-2228	44	28	raman	raman	NOUN
ap-2228	44	29	spectrum	spectrum	NOUN
ap-2228	44	30	(	(	PUNCT
ap-2228	44	31	b	b	NOUN
ap-2228	44	32	)	)	PUNCT
ap-2228	44	33	of	of	ADP
ap-2228	44	34	carbon	carbon	NOUN
ap-2228	44	35	nanostructures	nanostructure	NOUN
ap-2228	44	36	deposited	deposit	VERB
ap-2228	44	37	under	under	ADP
ap-2228	44	38	the	the	DET
ap-2228	44	39	following	following	ADJ
ap-2228	44	40	conditions	condition	NOUN
ap-2228	44	41	:	:	PUNCT
ap-2228	44	42	ar	ar	NOUN
ap-2228	44	43	/	/	SYM
ap-2228	44	44	co2	co2	NOUN
ap-2228	44	45	gases	gas	NOUN
ap-2228	44	46	were	be	AUX
ap-2228	44	47	injected	inject	VERB
ap-2228	44	48	through	through	ADP
ap-2228	44	49	a	a	DET
ap-2228	44	50	single	single	ADJ
ap-2228	44	51	surfatron	surfatron	NOUN
ap-2228	44	52	,	,	PUNCT
ap-2228	44	53	and	and	CCONJ
ap-2228	44	54	ch4	ch4	PROPN
ap-2228	44	55	gas	gas	NOUN
ap-2228	44	56	flowed	flow	VERB
ap-2228	44	57	through	through	ADP
ap-2228	44	58	parallel	parallel	ADJ
ap-2228	44	59	surfatrons	surfatron	NOUN
ap-2228	44	60	.	.	PUNCT
ap-2228	45	1	ing	e	VERB
ap-2228	45	2	the	the	DET
ap-2228	45	3	deposition	deposition	NOUN
ap-2228	45	4	process	process	NOUN
ap-2228	45	5	the	the	DET
ap-2228	45	6	substrate	substrate	NOUN
ap-2228	45	7	temperature	temperature	NOUN
ap-2228	45	8	was	be	AUX
ap-2228	45	9	maintained	maintain	VERB
ap-2228	45	10	at	at	ADP
ap-2228	45	11	650	650	NUM
ap-2228	45	12	°	°	NOUN
ap-2228	45	13	c	c	NOUN
ap-2228	45	14	and	and	CCONJ
ap-2228	45	15	the	the	DET
ap-2228	45	16	deposition	deposition	NOUN
ap-2228	45	17	time	time	NOUN
ap-2228	45	18	was	be	AUX
ap-2228	45	19	15min	15min	NUM
ap-2228	45	20	.	.	PUNCT
ap-2228	46	1	the	the	DET
ap-2228	46	2	distance	distance	NOUN
ap-2228	46	3	between	between	ADP
ap-2228	46	4	substrate	substrate	NOUN
ap-2228	46	5	holder	holder	NOUN
ap-2228	46	6	and	and	CCONJ
ap-2228	46	7	precursor	precursor	NOUN
ap-2228	46	8	outlet	outlet	NOUN
ap-2228	46	9	was	be	AUX
ap-2228	46	10	varied	varied	ADJ
ap-2228	46	11	from	from	ADP
ap-2228	46	12	1	1	NUM
ap-2228	46	13	to	to	ADP
ap-2228	46	14	3	3	NUM
ap-2228	46	15	cm	cm	NOUN
ap-2228	46	16	.	.	PUNCT
ap-2228	47	1	2.3	2.3	NUM
ap-2228	47	2	.	.	PUNCT
ap-2228	48	1	material	material	NOUN
ap-2228	48	2	characterization	characterization	NOUN
ap-2228	48	3	the	the	DET
ap-2228	48	4	surface	surface	NOUN
ap-2228	48	5	morphology	morphology	NOUN
ap-2228	48	6	of	of	ADP
ap-2228	48	7	the	the	DET
ap-2228	48	8	coatings	coating	NOUN
ap-2228	48	9	(	(	PUNCT
ap-2228	48	10	carbon	carbon	NOUN
ap-2228	48	11	nanostructures	nanostructure	NOUN
ap-2228	48	12	)	)	PUNCT
ap-2228	48	13	was	be	AUX
ap-2228	48	14	characterized	characterize	VERB
ap-2228	48	15	by	by	ADP
ap-2228	48	16	scanning	scan	VERB
ap-2228	48	17	electron	electron	NOUN
ap-2228	48	18	microscopy	microscopy	NOUN
ap-2228	48	19	(	(	PUNCT
ap-2228	48	20	sem	sem	NOUN
ap-2228	48	21	e_line	e_line	NOUN
ap-2228	48	22	writer	writer	NOUN
ap-2228	48	23	,	,	PUNCT
ap-2228	48	24	raith	raith	PROPN
ap-2228	48	25	gmbh	gmbh	PROPN
ap-2228	48	26	)	)	PUNCT
ap-2228	48	27	and	and	CCONJ
ap-2228	48	28	was	be	AUX
ap-2228	48	29	confirmed	confirm	VERB
ap-2228	48	30	by	by	ADP
ap-2228	48	31	uv	uv	NOUN
ap-2228	48	32	-	-	PUNCT
ap-2228	48	33	raman	raman	NOUN
ap-2228	48	34	spectroscopy	spectroscopy	NOUN
ap-2228	48	35	(	(	PUNCT
ap-2228	48	36	renishaw	renishaw	PROPN
ap-2228	48	37	invia	invia	PROPN
ap-2228	48	38	reflex	reflex	PROPN
ap-2228	48	39	raman	raman	NOUN
ap-2228	48	40	spectrometer	spectrometer	NOUN
ap-2228	48	41	,	,	PUNCT
ap-2228	48	42	442	442	NUM
ap-2228	48	43	nm	nm	ADJ
ap-2228	48	44	excitation	excitation	NOUN
ap-2228	48	45	wavelength	wavelength	NOUN
ap-2228	48	46	)	)	PUNCT
ap-2228	48	47	.	.	PUNCT
ap-2228	49	1	3	3	X
ap-2228	49	2	.	.	NOUN
ap-2228	49	3	results	result	NOUN
ap-2228	49	4	and	and	CCONJ
ap-2228	49	5	discussion	discussion	NOUN
ap-2228	49	6	figure	figure	NOUN
ap-2228	49	7	2	2	NUM
ap-2228	49	8	shows	show	VERB
ap-2228	49	9	the	the	DET
ap-2228	49	10	surface	surface	NOUN
ap-2228	49	11	morphology	morphology	NOUN
ap-2228	49	12	of	of	ADP
ap-2228	49	13	carbon	carbon	NOUN
ap-2228	49	14	nanostructures	nanostructure	NOUN
ap-2228	49	15	deposited	deposit	VERB
ap-2228	49	16	using	use	VERB
ap-2228	49	17	various	various	ADJ
ap-2228	49	18	ch4	ch4	NOUN
ap-2228	49	19	/	/	SYM
ap-2228	49	20	co2	co2	NOUN
ap-2228	49	21	flow	flow	NOUN
ap-2228	49	22	rates	rate	NOUN
ap-2228	49	23	.	.	PUNCT
ap-2228	50	1	the	the	DET
ap-2228	50	2	distance	distance	NOUN
ap-2228	50	3	between	between	ADP
ap-2228	50	4	substrate	substrate	NOUN
ap-2228	50	5	holder	holder	NOUN
ap-2228	50	6	and	and	CCONJ
ap-2228	50	7	quartz	quartz	NOUN
ap-2228	50	8	nozzle	nozzle	NOUN
ap-2228	50	9	outlet	outlet	NOUN
ap-2228	50	10	was	be	AUX
ap-2228	50	11	1	1	NUM
ap-2228	50	12	cm	cm	NOUN
ap-2228	50	13	.	.	PUNCT
ap-2228	51	1	the	the	DET
ap-2228	51	2	sem	sem	PROPN
ap-2228	51	3	images	image	NOUN
ap-2228	51	4	clearly	clearly	ADV
ap-2228	51	5	confirm	confirm	VERB
ap-2228	51	6	that	that	SCONJ
ap-2228	51	7	only	only	ADV
ap-2228	51	8	isolated	isolated	ADJ
ap-2228	51	9	nanoislands	nanoisland	NOUN
ap-2228	51	10	were	be	AUX
ap-2228	51	11	formed	form	VERB
ap-2228	51	12	using	use	VERB
ap-2228	51	13	an	an	DET
ap-2228	51	14	ar	ar	NOUN
ap-2228	51	15	/	/	SYM
ap-2228	51	16	co2	co2	NOUN
ap-2228	51	17	/	/	SYM
ap-2228	51	18	ch4	ch4	NOUN
ap-2228	51	19	gas	gas	NOUN
ap-2228	51	20	mixture	mixture	NOUN
ap-2228	51	21	(	(	PUNCT
ap-2228	51	22	100/30/60	100/30/60	NUM
ap-2228	51	23	sccm	sccm	NOUN
ap-2228	51	24	)	)	PUNCT
ap-2228	51	25	(	(	PUNCT
ap-2228	51	26	figure	figure	NOUN
ap-2228	51	27	2ac	2ac	PROPN
ap-2228	51	28	)	)	PUNCT
ap-2228	51	29	.	.	PUNCT
ap-2228	52	1	the	the	DET
ap-2228	52	2	surface	surface	NOUN
ap-2228	52	3	morphology	morphology	NOUN
ap-2228	52	4	changed	change	VERB
ap-2228	52	5	considerably	considerably	ADV
ap-2228	52	6	after	after	SCONJ
ap-2228	52	7	the	the	DET
ap-2228	52	8	ch4	ch4	PROPN
ap-2228	52	9	gas	gas	NOUN
ap-2228	52	10	flow	flow	NOUN
ap-2228	52	11	was	be	AUX
ap-2228	52	12	increased	increase	VERB
ap-2228	52	13	from	from	ADP
ap-2228	52	14	60	60	NUM
ap-2228	52	15	to	to	PART
ap-2228	52	16	90	90	NUM
ap-2228	52	17	sccm	sccm	NOUN
ap-2228	52	18	(	(	PUNCT
ap-2228	52	19	figure	figure	NOUN
ap-2228	52	20	2bd	2bd	NOUN
ap-2228	52	21	)	)	PUNCT
ap-2228	52	22	.	.	PUNCT
ap-2228	53	1	in	in	ADP
ap-2228	53	2	this	this	DET
ap-2228	53	3	case	case	NOUN
ap-2228	53	4	,	,	PUNCT
ap-2228	53	5	the	the	DET
ap-2228	53	6	semmeasurements	semmeasurement	NOUN
ap-2228	53	7	indicate	indicate	VERB
ap-2228	53	8	the	the	DET
ap-2228	53	9	development	development	NOUN
ap-2228	53	10	of	of	ADP
ap-2228	53	11	nanotube	nanotube	NOUN
ap-2228	53	12	-	-	PUNCT
ap-2228	53	13	like	like	ADJ
ap-2228	53	14	structures	structure	NOUN
ap-2228	53	15	.	.	PUNCT
ap-2228	54	1	the	the	DET
ap-2228	54	2	raman	raman	NOUN
ap-2228	54	3	spectroscopy	spectroscopy	NOUN
ap-2228	54	4	measurements	measurement	NOUN
ap-2228	54	5	did	do	AUX
ap-2228	54	6	not	not	PART
ap-2228	54	7	reveal	reveal	VERB
ap-2228	54	8	a	a	DET
ap-2228	54	9	reasonable	reasonable	ADJ
ap-2228	54	10	signal	signal	NOUN
ap-2228	54	11	of	of	ADP
ap-2228	54	12	carbon	carbon	NOUN
ap-2228	54	13	phases	phase	NOUN
ap-2228	54	14	.	.	PUNCT
ap-2228	55	1	next	next	ADV
ap-2228	55	2	we	we	PRON
ap-2228	55	3	investigated	investigate	VERB
ap-2228	55	4	the	the	DET
ap-2228	55	5	influence	influence	NOUN
ap-2228	55	6	of	of	ADP
ap-2228	55	7	sample	sample	NOUN
ap-2228	55	8	position	position	NOUN
ap-2228	55	9	.	.	PUNCT
ap-2228	56	1	the	the	DET
ap-2228	56	2	distance	distance	NOUN
ap-2228	56	3	between	between	ADP
ap-2228	56	4	substrate	substrate	NOUN
ap-2228	56	5	holder	holder	NOUN
ap-2228	56	6	and	and	CCONJ
ap-2228	56	7	precursor	precursor	NOUN
ap-2228	56	8	outlet	outlet	NOUN
ap-2228	56	9	increased	increase	VERB
ap-2228	56	10	to	to	ADP
ap-2228	56	11	3	3	NUM
ap-2228	56	12	cm	cm	NOUN
ap-2228	56	13	.	.	PUNCT
ap-2228	57	1	as	as	ADP
ap-2228	57	2	in	in	ADP
ap-2228	57	3	the	the	DET
ap-2228	57	4	previous	previous	ADJ
ap-2228	57	5	case	case	NOUN
ap-2228	57	6	,	,	PUNCT
ap-2228	57	7	a	a	DET
ap-2228	57	8	gas	gas	NOUN
ap-2228	57	9	mixture	mixture	NOUN
ap-2228	57	10	of	of	ADP
ap-2228	57	11	ar	ar	NOUN
ap-2228	57	12	/	/	SYM
ap-2228	57	13	co2	co2	NOUN
ap-2228	57	14	/	/	SYM
ap-2228	57	15	ch4	ch4	PROPN
ap-2228	57	16	(	(	PUNCT
ap-2228	57	17	100/30/60	100/30/60	NUM
ap-2228	57	18	sccm	sccm	NOUN
ap-2228	57	19	)	)	PUNCT
ap-2228	57	20	was	be	AUX
ap-2228	57	21	introduced	introduce	VERB
ap-2228	57	22	to	to	ADP
ap-2228	57	23	the	the	DET
ap-2228	57	24	chamber	chamber	NOUN
ap-2228	57	25	.	.	PUNCT
ap-2228	58	1	the	the	DET
ap-2228	58	2	sem	sem	PROPN
ap-2228	58	3	image	image	NOUN
ap-2228	58	4	reveals	reveal	VERB
ap-2228	58	5	the	the	DET
ap-2228	58	6	formation	formation	NOUN
ap-2228	58	7	of	of	ADP
ap-2228	58	8	a	a	DET
ap-2228	58	9	porous	porous	ADJ
ap-2228	58	10	-	-	PUNCT
ap-2228	58	11	like	like	ADJ
ap-2228	58	12	structure	structure	NOUN
ap-2228	58	13	consisting	consist	VERB
ap-2228	58	14	of	of	ADP
ap-2228	58	15	nanosized	nanosized	ADJ
ap-2228	58	16	features	feature	NOUN
ap-2228	58	17	(	(	PUNCT
ap-2228	58	18	figure	figure	NOUN
ap-2228	58	19	3a	3a	NUM
ap-2228	58	20	)	)	PUNCT
ap-2228	58	21	.	.	PUNCT
ap-2228	59	1	the	the	DET
ap-2228	59	2	raman	raman	NOUN
ap-2228	59	3	spectrum	spectrum	NOUN
ap-2228	59	4	(	(	PUNCT
ap-2228	59	5	figure	figure	NOUN
ap-2228	59	6	3b	3b	NUM
ap-2228	59	7	)	)	PUNCT
ap-2228	59	8	is	be	AUX
ap-2228	59	9	represented	represent	VERB
ap-2228	59	10	by	by	ADP
ap-2228	59	11	three	three	NUM
ap-2228	59	12	strong	strong	ADJ
ap-2228	59	13	contributions	contribution	NOUN
ap-2228	59	14	:	:	PUNCT
ap-2228	59	15	the	the	DET
ap-2228	59	16	silicon	silicon	NOUN
ap-2228	59	17	characteristic	characteristic	ADJ
ap-2228	59	18	peak	peak	NOUN
ap-2228	59	19	centered	center	VERB
ap-2228	59	20	at	at	ADP
ap-2228	59	21	520	520	NUM
ap-2228	59	22	cm−1	cm−1	NOUN
ap-2228	59	23	(	(	PUNCT
ap-2228	59	24	si	si	NOUN
ap-2228	59	25	-	-	PUNCT
ap-2228	59	26	peak	peak	NOUN
ap-2228	59	27	)	)	PUNCT
ap-2228	59	28	and	and	CCONJ
ap-2228	59	29	two	two	NUM
ap-2228	59	30	broad	broad	ADJ
ap-2228	59	31	bands	band	NOUN
ap-2228	59	32	centered	center	VERB
ap-2228	59	33	at	at	ADP
ap-2228	59	34	approximately	approximately	ADV
ap-2228	59	35	1350	1350	NUM
ap-2228	59	36	cm−1	cm−1	NOUN
ap-2228	59	37	,	,	PUNCT
ap-2228	59	38	which	which	PRON
ap-2228	59	39	is	be	AUX
ap-2228	59	40	attributed	attribute	VERB
ap-2228	59	41	to	to	ADP
ap-2228	59	42	the	the	DET
ap-2228	59	43	d	d	PROPN
ap-2228	59	44	band	band	NOUN
ap-2228	59	45	,	,	PUNCT
ap-2228	59	46	and	and	CCONJ
ap-2228	59	47	at	at	ADP
ap-2228	59	48	approximately	approximately	ADV
ap-2228	59	49	1590	1590	NUM
ap-2228	59	50	cm−1	cm−1	NOUN
ap-2228	59	51	,	,	PUNCT
ap-2228	59	52	which	which	PRON
ap-2228	59	53	is	be	AUX
ap-2228	59	54	attributed	attribute	VERB
ap-2228	59	55	to	to	ADP
ap-2228	59	56	the	the	DET
ap-2228	59	57	g	g	PROPN
ap-2228	59	58	band	band	NOUN
ap-2228	59	59	.	.	PUNCT
ap-2228	60	1	the	the	DET
ap-2228	60	2	d	d	PROPN
ap-2228	60	3	band	band	NOUN
ap-2228	60	4	is	be	AUX
ap-2228	60	5	usually	usually	ADV
ap-2228	60	6	assigned	assign	VERB
ap-2228	60	7	to	to	ADP
ap-2228	60	8	the	the	DET
ap-2228	60	9	disorder	disorder	NOUN
ap-2228	60	10	and	and	CCONJ
ap-2228	60	11	imperfection	imperfection	NOUN
ap-2228	60	12	of	of	ADP
ap-2228	60	13	the	the	DET
ap-2228	60	14	carbon	carbon	NOUN
ap-2228	60	15	crystallites	crystallite	NOUN
ap-2228	60	16	,	,	PUNCT
ap-2228	60	17	whereas	whereas	SCONJ
ap-2228	60	18	the	the	DET
ap-2228	60	19	g	g	PROPN
ap-2228	60	20	band	band	NOUN
ap-2228	60	21	is	be	AUX
ap-2228	60	22	one	one	NUM
ap-2228	60	23	of	of	ADP
ap-2228	60	24	the	the	DET
ap-2228	60	25	two	two	NUM
ap-2228	60	26	e2	e2	PROPN
ap-2228	60	27	g	g	NOUN
ap-2228	60	28	modes	mode	NOUN
ap-2228	60	29	of	of	ADP
ap-2228	60	30	the	the	DET
ap-2228	60	31	stretching	stretch	VERB
ap-2228	60	32	vibrations	vibration	NOUN
ap-2228	60	33	in	in	ADP
ap-2228	60	34	the	the	DET
ap-2228	60	35	sp2	sp2	NOUN
ap-2228	60	36	domains	domain	NOUN
ap-2228	60	37	of	of	ADP
ap-2228	60	38	perfect	perfect	ADJ
ap-2228	60	39	graphite	graphite	NOUN
ap-2228	61	1	[	[	X
ap-2228	61	2	9	9	NUM
ap-2228	61	3	]	]	PUNCT
ap-2228	61	4	.	.	PUNCT
ap-2228	62	1	in	in	ADP
ap-2228	62	2	addition	addition	NOUN
ap-2228	62	3	,	,	PUNCT
ap-2228	62	4	a	a	DET
ap-2228	62	5	weak	weak	ADJ
ap-2228	62	6	broad	broad	ADJ
ap-2228	62	7	band	band	NOUN
ap-2228	62	8	resolvable	resolvable	ADJ
ap-2228	62	9	at	at	ADP
ap-2228	62	10	970	970	NUM
ap-2228	62	11	cm−1	cm−1	NOUN
ap-2228	62	12	reflects	reflect	VERB
ap-2228	62	13	the	the	DET
ap-2228	62	14	second	second	ADJ
ap-2228	62	15	-	-	PUNCT
ap-2228	62	16	order	order	NOUN
ap-2228	62	17	peak	peak	NOUN
ap-2228	62	18	of	of	ADP
ap-2228	62	19	the	the	DET
ap-2228	62	20	si	si	NOUN
ap-2228	62	21	substrate	substrate	NOUN
ap-2228	62	22	[	[	X
ap-2228	62	23	10	10	NUM
ap-2228	62	24	]	]	PUNCT
ap-2228	62	25	.	.	PUNCT
ap-2228	63	1	increasing	increase	VERB
ap-2228	63	2	the	the	DET
ap-2228	63	3	methane	methane	NOUN
ap-2228	63	4	flow	flow	NOUN
ap-2228	63	5	from	from	ADP
ap-2228	63	6	60	60	NUM
ap-2228	63	7	to	to	PART
ap-2228	63	8	90	90	NUM
ap-2228	63	9	sccm	sccm	NOUN
ap-2228	63	10	in	in	ADP
ap-2228	63	11	combination	combination	NOUN
ap-2228	63	12	with	with	ADP
ap-2228	63	13	varying	vary	VERB
ap-2228	63	14	the	the	DET
ap-2228	63	15	gas	gas	NOUN
ap-2228	63	16	inlet(s	inlet(s	PROPN
ap-2228	63	17	)	)	PUNCT
ap-2228	63	18	resulted	result	VERB
ap-2228	63	19	in	in	ADP
ap-2228	63	20	the	the	DET
ap-2228	63	21	formation	formation	NOUN
ap-2228	63	22	of	of	ADP
ap-2228	63	23	vertically	vertically	ADV
ap-2228	63	24	ordered	order	VERB
ap-2228	63	25	carbon	carbon	NOUN
ap-2228	63	26	nanowalls	nanowall	NOUN
ap-2228	63	27	(	(	PUNCT
ap-2228	63	28	figure	figure	NOUN
ap-2228	63	29	4ab	4ab	NOUN
ap-2228	63	30	)	)	PUNCT
ap-2228	63	31	.	.	PUNCT
ap-2228	64	1	the	the	DET
ap-2228	64	2	distance	distance	NOUN
ap-2228	64	3	between	between	ADP
ap-2228	64	4	substrate	substrate	NOUN
ap-2228	64	5	holder	holder	NOUN
ap-2228	64	6	and	and	CCONJ
ap-2228	64	7	precursor	precursor	NOUN
ap-2228	64	8	outlet	outlet	NOUN
ap-2228	64	9	was	be	AUX
ap-2228	64	10	kept	keep	VERB
ap-2228	64	11	at	at	ADP
ap-2228	64	12	3	3	NUM
ap-2228	64	13	cm	cm	NOUN
ap-2228	64	14	.	.	PUNCT
ap-2228	65	1	figure	figure	NOUN
ap-2228	65	2	4c	4c	NOUN
ap-2228	65	3	shows	show	VERB
ap-2228	65	4	the	the	DET
ap-2228	65	5	raman	raman	NOUN
ap-2228	65	6	spectrum	spectrum	NOUN
ap-2228	65	7	of	of	ADP
ap-2228	65	8	the	the	DET
ap-2228	65	9	nanostructures	nanostructure	NOUN
ap-2228	65	10	that	that	PRON
ap-2228	65	11	formed	form	VERB
ap-2228	65	12	.	.	PUNCT
ap-2228	66	1	four	four	NUM
ap-2228	66	2	basic	basic	ADJ
ap-2228	66	3	features	feature	NOUN
ap-2228	66	4	are	be	AUX
ap-2228	66	5	recognized	recognize	VERB
ap-2228	66	6	in	in	ADP
ap-2228	66	7	the	the	DET
ap-2228	66	8	raman	raman	NOUN
ap-2228	66	9	spectrum	spectrum	NOUN
ap-2228	66	10	:	:	PUNCT
ap-2228	66	11	a	a	DET
ap-2228	66	12	sharp	sharp	ADJ
ap-2228	66	13	si	si	NOUN
ap-2228	66	14	peak	peak	NOUN
ap-2228	66	15	centered	center	VERB
ap-2228	66	16	at	at	ADP
ap-2228	66	17	520	520	NUM
ap-2228	66	18	cm−1	cm−1	NOUN
ap-2228	66	19	,	,	PUNCT
ap-2228	66	20	the	the	DET
ap-2228	66	21	d	d	PROPN
ap-2228	66	22	band	band	NOUN
ap-2228	66	23	(	(	PUNCT
ap-2228	66	24	1369	1369	NUM
ap-2228	66	25	cm−1	cm−1	NOUN
ap-2228	66	26	)	)	PUNCT
ap-2228	66	27	,	,	PUNCT
ap-2228	66	28	the	the	DET
ap-2228	66	29	g	g	PROPN
ap-2228	66	30	band	band	NOUN
ap-2228	66	31	(	(	PUNCT
ap-2228	66	32	1570	1570	NUM
ap-2228	66	33	cm−1	cm−1	NOUN
ap-2228	66	34	)	)	PUNCT
ap-2228	66	35	,	,	PUNCT
ap-2228	66	36	and	and	CCONJ
ap-2228	66	37	the	the	DET
ap-2228	66	38	second	second	ADJ
ap-2228	66	39	-	-	PUNCT
ap-2228	66	40	order	order	NOUN
ap-2228	66	41	d	d	NOUN
ap-2228	66	42	band	band	NOUN
ap-2228	66	43	(	(	PUNCT
ap-2228	66	44	2d	2d	NOUN
ap-2228	66	45	-	-	PUNCT
ap-2228	66	46	band	band	NOUN
ap-2228	66	47	)	)	PUNCT
ap-2228	66	48	.	.	PUNCT
ap-2228	67	1	the	the	DET
ap-2228	67	2	2d	2d	NUM
ap-2228	67	3	band	band	NOUN
ap-2228	67	4	centered	center	VERB
ap-2228	67	5	at	at	ADP
ap-2228	67	6	2720	2720	NUM
ap-2228	67	7	cm−1	cm−1	NOUN
ap-2228	67	8	is	be	AUX
ap-2228	67	9	attributed	attribute	VERB
ap-2228	67	10	to	to	ADP
ap-2228	67	11	the	the	DET
ap-2228	67	12	typical	typical	ADJ
ap-2228	67	13	symbol	symbol	NOUN
ap-2228	67	14	of	of	ADP
ap-2228	67	15	graphitic	graphitic	ADJ
ap-2228	67	16	carbon	carbon	NOUN
ap-2228	67	17	[	[	X
ap-2228	67	18	11–13	11–13	NUM
ap-2228	67	19	]	]	X
ap-2228	67	20	.	.	PUNCT
ap-2228	68	1	moreover	moreover	ADV
ap-2228	68	2	,	,	PUNCT
ap-2228	68	3	it	it	PRON
ap-2228	68	4	should	should	AUX
ap-2228	68	5	be	be	AUX
ap-2228	68	6	noted	note	VERB
ap-2228	68	7	that	that	SCONJ
ap-2228	68	8	the	the	DET
ap-2228	68	9	radial	radial	ADJ
ap-2228	68	10	breathing	breathing	NOUN
ap-2228	68	11	mode	mode	NOUN
ap-2228	68	12	(	(	PUNCT
ap-2228	68	13	rbm	rbm	PROPN
ap-2228	68	14	)	)	PUNCT
ap-2228	68	15	was	be	AUX
ap-2228	68	16	not	not	PART
ap-2228	68	17	detected	detect	VERB
ap-2228	68	18	in	in	ADP
ap-2228	68	19	any	any	DET
ap-2228	68	20	samples	sample	NOUN
ap-2228	68	21	,	,	PUNCT
ap-2228	68	22	i.e.	i.e.	X
ap-2228	68	23	,	,	PUNCT
ap-2228	68	24	absence	absence	NOUN
ap-2228	68	25	of	of	ADP
ap-2228	68	26	single	single	ADJ
ap-2228	68	27	or	or	CCONJ
ap-2228	68	28	multiwall	multiwall	NOUN
ap-2228	68	29	carbon	carbon	NOUN
ap-2228	68	30	nanotubes	nanotube	NOUN
ap-2228	68	31	.	.	PUNCT
ap-2228	69	1	these	these	DET
ap-2228	69	2	results	result	NOUN
ap-2228	69	3	clearly	clearly	ADV
ap-2228	69	4	confirm	confirm	VERB
ap-2228	69	5	that	that	SCONJ
ap-2228	69	6	various	various	ADJ
ap-2228	69	7	carbon	carbon	NOUN
ap-2228	69	8	nanostructures	nanostructure	NOUN
ap-2228	69	9	can	can	AUX
ap-2228	69	10	be	be	AUX
ap-2228	69	11	deposited	deposit	VERB
ap-2228	69	12	by	by	ADP
ap-2228	69	13	a	a	DET
ap-2228	69	14	surface	surface	NOUN
ap-2228	69	15	wave	wave	NOUN
ap-2228	69	16	discharge	discharge	NOUN
ap-2228	69	17	.	.	PUNCT
ap-2228	70	1	the	the	DET
ap-2228	70	2	gas	gas	NOUN
ap-2228	70	3	mixture	mixture	NOUN
ap-2228	70	4	and	and	CCONJ
ap-2228	70	5	the	the	DET
ap-2228	70	6	working	work	VERB
ap-2228	70	7	gas	gas	NOUN
ap-2228	70	8	inlet	inlet	NOUN
ap-2228	70	9	to	to	ADP
ap-2228	70	10	the	the	DET
ap-2228	70	11	process	process	NOUN
ap-2228	70	12	chamber	chamber	NOUN
ap-2228	70	13	were	be	AUX
ap-2228	70	14	found	find	VERB
ap-2228	70	15	to	to	PART
ap-2228	70	16	be	be	AUX
ap-2228	70	17	the	the	DET
ap-2228	70	18	crucial	crucial	ADJ
ap-2228	70	19	parameters	parameter	NOUN
ap-2228	70	20	for	for	ADP
ap-2228	70	21	the	the	DET
ap-2228	70	22	growth	growth	NOUN
ap-2228	70	23	of	of	ADP
ap-2228	70	24	various	various	ADJ
ap-2228	70	25	carbon	carbon	NOUN
ap-2228	70	26	forms	form	NOUN
ap-2228	70	27	/	/	SYM
ap-2228	70	28	types	type	NOUN
ap-2228	70	29	.	.	PUNCT
ap-2228	71	1	increasing	increase	VERB
ap-2228	71	2	the	the	DET
ap-2228	71	3	ch4	ch4	NOUN
ap-2228	71	4	concentration	concentration	NOUN
ap-2228	71	5	and	and	CCONJ
ap-2228	71	6	using	use	VERB
ap-2228	71	7	the	the	DET
ap-2228	71	8	shower	shower	NOUN
ap-2228	71	9	head	head	NOUN
ap-2228	71	10	for	for	ADP
ap-2228	71	11	introducing	introduce	VERB
ap-2228	71	12	working	work	VERB
ap-2228	71	13	gases	gas	NOUN
ap-2228	71	14	into	into	ADP
ap-2228	71	15	the	the	DET
ap-2228	71	16	chamber	chamber	NOUN
ap-2228	71	17	led	lead	VERB
ap-2228	71	18	to	to	ADP
ap-2228	71	19	the	the	DET
ap-2228	71	20	formation	formation	NOUN
ap-2228	71	21	of	of	ADP
ap-2228	71	22	carbon	carbon	NOUN
ap-2228	71	23	nanowalls	nanowall	NOUN
ap-2228	71	24	(	(	PUNCT
ap-2228	71	25	figure	figure	NOUN
ap-2228	71	26	4ab	4ab	NOUN
ap-2228	71	27	)	)	PUNCT
ap-2228	71	28	.	.	PUNCT
ap-2228	72	1	we	we	PRON
ap-2228	72	2	found	find	VERB
ap-2228	72	3	that	that	SCONJ
ap-2228	72	4	reactive	reactive	ADJ
ap-2228	72	5	gases	gas	NOUN
ap-2228	72	6	(	(	PUNCT
ap-2228	72	7	co2	co2	NOUN
ap-2228	72	8	and	and	CCONJ
ap-2228	72	9	ch4	ch4	NOUN
ap-2228	72	10	)	)	PUNCT
ap-2228	72	11	are	be	AUX
ap-2228	72	12	optimally	optimally	ADV
ap-2228	72	13	decomposed	decompose	VERB
ap-2228	72	14	at	at	ADP
ap-2228	72	15	the	the	DET
ap-2228	72	16	substrate	substrate	NOUN
ap-2228	72	17	by	by	ADP
ap-2228	72	18	ar	ar	NOUN
ap-2228	72	19	plasma	plasma	NOUN
ap-2228	72	20	due	due	ADP
ap-2228	72	21	to	to	ADP
ap-2228	72	22	a	a	DET
ap-2228	72	23	set	set	NOUN
ap-2228	72	24	of	of	ADP
ap-2228	72	25	plasma	plasma	NOUN
ap-2228	72	26	-	-	PUNCT
ap-2228	72	27	chemical	chemical	NOUN
ap-2228	72	28	reactions	reaction	NOUN
ap-2228	72	29	which	which	PRON
ap-2228	72	30	finally	finally	ADV
ap-2228	72	31	support	support	VERB
ap-2228	72	32	the	the	DET
ap-2228	72	33	growth	growth	NOUN
ap-2228	72	34	of	of	ADP
ap-2228	72	35	carbon	carbon	NOUN
ap-2228	72	36	nanostructures	nanostructure	NOUN
ap-2228	72	37	.	.	PUNCT
ap-2228	73	1	moreover	moreover	ADV
ap-2228	73	2	,	,	PUNCT
ap-2228	73	3	we	we	PRON
ap-2228	73	4	found	find	VERB
ap-2228	73	5	that	that	SCONJ
ap-2228	73	6	the	the	DET
ap-2228	73	7	optimal	optimal	ADJ
ap-2228	73	8	distance	distance	NOUN
ap-2228	73	9	for	for	ADP
ap-2228	73	10	deposition	deposition	NOUN
ap-2228	73	11	of	of	ADP
ap-2228	73	12	carbon	carbon	NOUN
ap-2228	73	13	nanostructures	nanostructure	NOUN
ap-2228	73	14	is	be	AUX
ap-2228	73	15	3	3	NUM
ap-2228	73	16	cm	cm	NOUN
ap-2228	73	17	for	for	ADP
ap-2228	73	18	our	our	PRON
ap-2228	73	19	experimental	experimental	ADJ
ap-2228	73	20	swd	swd	PROPN
ap-2228	73	21	process	process	NOUN
ap-2228	73	22	.	.	PUNCT
ap-2228	74	1	these	these	DET
ap-2228	74	2	observations	observation	NOUN
ap-2228	74	3	represent	represent	VERB
ap-2228	74	4	unique	unique	ADJ
ap-2228	74	5	and	and	CCONJ
ap-2228	74	6	,	,	PUNCT
ap-2228	74	7	in	in	ADP
ap-2228	74	8	certain	certain	ADJ
ap-2228	74	9	cases	case	NOUN
ap-2228	74	10	,	,	PUNCT
ap-2228	74	11	advanced	advanced	ADJ
ap-2228	74	12	features	feature	NOUN
ap-2228	74	13	of	of	ADP
ap-2228	74	14	the	the	DET
ap-2228	74	15	surfatron	surfatron	NOUN
ap-2228	74	16	system	system	NOUN
ap-2228	74	17	.	.	PUNCT
ap-2228	75	1	391	391	NUM
ap-2228	75	2	m.	m.	NOUN
ap-2228	75	3	davydova	davydova	PROPN
ap-2228	75	4	,	,	PUNCT
ap-2228	75	5	j.	j.	PROPN
ap-2228	75	6	smid	smid	PROPN
ap-2228	75	7	,	,	PUNCT
ap-2228	75	8	z.	z.	PROPN
ap-2228	75	9	hubicka	hubicka	PROPN
ap-2228	75	10	,	,	PUNCT
ap-2228	75	11	a.	a.	NOUN
ap-2228	75	12	kromka	kromka	PROPN
ap-2228	75	13	acta	acta	PROPN
ap-2228	75	14	polytechnica	polytechnica	PROPN
ap-2228	75	15	(	(	PUNCT
ap-2228	75	16	a	a	NOUN
ap-2228	75	17	)	)	PUNCT
ap-2228	75	18	(	(	PUNCT
ap-2228	75	19	b	b	X
ap-2228	75	20	)	)	PUNCT
ap-2228	75	21	(	(	PUNCT
ap-2228	75	22	c	c	X
ap-2228	75	23	)	)	PUNCT
ap-2228	75	24	figure	figure	NOUN
ap-2228	75	25	4	4	NUM
ap-2228	75	26	.	.	PUNCT
ap-2228	75	27	top	top	ADJ
ap-2228	75	28	-	-	PUNCT
ap-2228	75	29	view	view	NOUN
ap-2228	75	30	sem	sem	NOUN
ap-2228	75	31	images	image	NOUN
ap-2228	75	32	(	(	PUNCT
ap-2228	75	33	a	a	DET
ap-2228	75	34	,	,	PUNCT
ap-2228	75	35	b	b	NOUN
ap-2228	75	36	)	)	PUNCT
ap-2228	75	37	and	and	CCONJ
ap-2228	75	38	the	the	DET
ap-2228	75	39	raman	raman	NOUN
ap-2228	75	40	spectrum	spectrum	NOUN
ap-2228	75	41	(	(	PUNCT
ap-2228	75	42	c	c	NOUN
ap-2228	75	43	)	)	PUNCT
ap-2228	75	44	of	of	ADP
ap-2228	75	45	carbon	carbon	NOUN
ap-2228	75	46	nanostructures	nanostructure	NOUN
ap-2228	75	47	deposited	deposit	VERB
ap-2228	75	48	under	under	ADP
ap-2228	75	49	the	the	DET
ap-2228	75	50	following	following	ADJ
ap-2228	75	51	conditions	condition	NOUN
ap-2228	75	52	:	:	PUNCT
ap-2228	75	53	ar	ar	NOUN
ap-2228	75	54	gas	gas	NOUN
ap-2228	75	55	was	be	AUX
ap-2228	75	56	injected	inject	VERB
ap-2228	75	57	via	via	ADP
ap-2228	75	58	4	4	NUM
ap-2228	75	59	surfatrons	surfatron	NOUN
ap-2228	75	60	,	,	PUNCT
ap-2228	75	61	and	and	CCONJ
ap-2228	75	62	co2	co2	NOUN
ap-2228	75	63	/	/	SYM
ap-2228	75	64	ch4	ch4	NOUN
ap-2228	75	65	gases	gas	NOUN
ap-2228	75	66	were	be	AUX
ap-2228	75	67	introduced	introduce	VERB
ap-2228	75	68	through	through	ADP
ap-2228	75	69	the	the	DET
ap-2228	75	70	shower	shower	NOUN
ap-2228	75	71	head	head	NOUN
ap-2228	75	72	.	.	PUNCT
ap-2228	76	1	4	4	X
ap-2228	76	2	.	.	X
ap-2228	76	3	conclusions	conclusion	NOUN
ap-2228	76	4	we	we	PRON
ap-2228	76	5	have	have	AUX
ap-2228	76	6	introduced	introduce	VERB
ap-2228	76	7	the	the	DET
ap-2228	76	8	modified	modify	VERB
ap-2228	76	9	plasma	plasma	NOUN
ap-2228	76	10	enhanced	enhance	VERB
ap-2228	76	11	cvd	cvd	PROPN
ap-2228	76	12	system	system	NOUN
ap-2228	76	13	working	work	VERB
ap-2228	76	14	on	on	ADP
ap-2228	76	15	the	the	DET
ap-2228	76	16	principle	principle	ADJ
ap-2228	76	17	swd	swd	PROPN
ap-2228	76	18	as	as	ADP
ap-2228	76	19	a	a	DET
ap-2228	76	20	versatile	versatile	ADJ
ap-2228	76	21	deposition	deposition	NOUN
ap-2228	76	22	system	system	NOUN
ap-2228	76	23	for	for	ADP
ap-2228	76	24	the	the	DET
ap-2228	76	25	growth	growth	NOUN
ap-2228	76	26	of	of	ADP
ap-2228	76	27	various	various	ADJ
ap-2228	76	28	carbon	carbon	NOUN
ap-2228	76	29	nanostructures	nanostructure	NOUN
ap-2228	76	30	.	.	PUNCT
ap-2228	77	1	we	we	PRON
ap-2228	77	2	have	have	AUX
ap-2228	77	3	shown	show	VERB
ap-2228	77	4	that	that	SCONJ
ap-2228	77	5	the	the	DET
ap-2228	77	6	carbon	carbon	NOUN
ap-2228	77	7	structures	structure	NOUN
ap-2228	77	8	that	that	PRON
ap-2228	77	9	are	be	AUX
ap-2228	77	10	formed	form	VERB
ap-2228	77	11	are	be	AUX
ap-2228	77	12	significantly	significantly	ADV
ap-2228	77	13	influenced	influence	VERB
ap-2228	77	14	by	by	ADP
ap-2228	77	15	the	the	DET
ap-2228	77	16	gas	gas	NOUN
ap-2228	77	17	mixture	mixture	NOUN
ap-2228	77	18	(	(	PUNCT
ap-2228	77	19	i.e.	i.e.	X
ap-2228	77	20	,	,	PUNCT
ap-2228	77	21	ratios	ratio	NOUN
ap-2228	77	22	of	of	ADP
ap-2228	77	23	co2	co2	NOUN
ap-2228	77	24	/	/	SYM
ap-2228	77	25	ch4	ch4	NOUN
ap-2228	77	26	)	)	PUNCT
ap-2228	77	27	and	and	CCONJ
ap-2228	77	28	by	by	ADP
ap-2228	77	29	the	the	DET
ap-2228	77	30	chosen	choose	VERB
ap-2228	77	31	gas	gas	NOUN
ap-2228	77	32	inlet(s	inlet(s	PROPN
ap-2228	77	33	)	)	PUNCT
ap-2228	77	34	for	for	ADP
ap-2228	77	35	achieving	achieve	VERB
ap-2228	77	36	the	the	DET
ap-2228	77	37	proper	proper	ADJ
ap-2228	77	38	gas	gas	NOUN
ap-2228	77	39	decomposition	decomposition	NOUN
ap-2228	77	40	and/or	and/or	CCONJ
ap-2228	77	41	plasma	plasma	NOUN
ap-2228	77	42	-	-	PUNCT
ap-2228	77	43	chemically	chemically	ADV
ap-2228	77	44	driven	drive	VERB
ap-2228	77	45	reactions	reaction	NOUN
ap-2228	77	46	at	at	ADP
ap-2228	77	47	the	the	DET
ap-2228	77	48	substrate	substrate	NOUN
ap-2228	77	49	surface	surface	NOUN
ap-2228	77	50	.	.	PUNCT
ap-2228	78	1	the	the	DET
ap-2228	78	2	formation	formation	NOUN
ap-2228	78	3	of	of	ADP
ap-2228	78	4	carbon	carbon	NOUN
ap-2228	78	5	nanowalls	nanowall	NOUN
ap-2228	78	6	was	be	AUX
ap-2228	78	7	observed	observe	VERB
ap-2228	78	8	after	after	SCONJ
ap-2228	78	9	the	the	DET
ap-2228	78	10	methane	methane	NOUN
ap-2228	78	11	content	content	NOUN
ap-2228	78	12	was	be	AUX
ap-2228	78	13	increased	increase	VERB
ap-2228	78	14	and	and	CCONJ
ap-2228	78	15	its	its	PRON
ap-2228	78	16	flow	flow	NOUN
ap-2228	78	17	via	via	ADP
ap-2228	78	18	the	the	DET
ap-2228	78	19	shower	shower	NOUN
ap-2228	78	20	head	head	NOUN
ap-2228	78	21	was	be	AUX
ap-2228	78	22	forced	force	VERB
ap-2228	78	23	.	.	PUNCT
ap-2228	79	1	we	we	PRON
ap-2228	79	2	assume	assume	VERB
ap-2228	79	3	that	that	SCONJ
ap-2228	79	4	the	the	DET
ap-2228	79	5	implementation	implementation	NOUN
ap-2228	79	6	of	of	ADP
ap-2228	79	7	swd	swd	PROPN
ap-2228	79	8	will	will	AUX
ap-2228	79	9	open	open	VERB
ap-2228	79	10	new	new	ADJ
ap-2228	79	11	prospects	prospect	NOUN
ap-2228	79	12	in	in	ADP
ap-2228	79	13	deposition	deposition	NOUN
ap-2228	79	14	of	of	ADP
ap-2228	79	15	carbon	carbon	NOUN
ap-2228	79	16	allotrope	allotrope	NOUN
ap-2228	79	17	forms	form	NOUN
ap-2228	79	18	,	,	PUNCT
ap-2228	79	19	or	or	CCONJ
ap-2228	79	20	even	even	ADV
ap-2228	79	21	for	for	ADP
ap-2228	79	22	gentle	gentle	ADJ
ap-2228	79	23	surface	surface	NOUN
ap-2228	79	24	modification	modification	NOUN
ap-2228	79	25	.	.	PUNCT
ap-2228	80	1	acknowledgements	acknowledgement	NOUN
ap-2228	80	2	this	this	DET
ap-2228	80	3	work	work	NOUN
ap-2228	80	4	was	be	AUX
ap-2228	80	5	supported	support	VERB
ap-2228	80	6	by	by	ADP
ap-2228	80	7	grants	grant	NOUN
ap-2228	80	8	14	14	NUM
ap-2228	80	9	-	-	PUNCT
ap-2228	80	10	06054p	06054p	NUM
ap-2228	80	11	(	(	PUNCT
ap-2228	80	12	czech	czech	PROPN
ap-2228	80	13	science	science	PROPN
ap-2228	80	14	foundation	foundation	PROPN
ap-2228	80	15	)	)	PUNCT
ap-2228	80	16	and	and	CCONJ
ap-2228	80	17	ta01011740	ta01011740	NOUN
ap-2228	80	18	(	(	PUNCT
ap-2228	80	19	technological	technological	ADJ
ap-2228	80	20	agency	agency	NOUN
ap-2228	80	21	of	of	ADP
ap-2228	80	22	the	the	DET
ap-2228	80	23	czech	czech	PROPN
ap-2228	80	24	republic	republic	NOUN
ap-2228	80	25	)	)	PUNCT
ap-2228	80	26	.	.	PUNCT
ap-2228	81	1	references	reference	NOUN
ap-2228	81	2	[	[	X
ap-2228	81	3	1	1	NUM
ap-2228	81	4	]	]	PUNCT
ap-2228	81	5	soppe	soppe	NOUN
ap-2228	81	6	,	,	PUNCT
ap-2228	81	7	w.	w.	PROPN
ap-2228	81	8	et	et	PROPN
ap-2228	81	9	al	al	PROPN
ap-2228	81	10	.	.	PROPN
ap-2228	81	11	:	:	PUNCT
ap-2228	82	1	bulk	bulk	ADJ
ap-2228	82	2	and	and	CCONJ
ap-2228	82	3	surface	surface	NOUN
ap-2228	82	4	passivation	passivation	NOUN
ap-2228	82	5	of	of	ADP
ap-2228	82	6	silicon	silicon	NOUN
ap-2228	82	7	solar	solar	ADJ
ap-2228	82	8	cells	cell	NOUN
ap-2228	82	9	accomplished	accomplish	VERB
ap-2228	82	10	by	by	ADP
ap-2228	82	11	silicon	silicon	NOUN
ap-2228	82	12	nitride	nitride	NOUN
ap-2228	82	13	deposited	deposit	VERB
ap-2228	82	14	on	on	ADP
ap-2228	82	15	industrial	industrial	ADJ
ap-2228	82	16	scale	scale	NOUN
ap-2228	82	17	by	by	ADP
ap-2228	82	18	microwave	microwave	NOUN
ap-2228	82	19	pecvd	pecvd	NOUN
ap-2228	82	20	.	.	PUNCT
ap-2228	83	1	prog	prog	PROPN
ap-2228	83	2	.	.	PUNCT
ap-2228	84	1	photovolt	photovolt	PROPN
ap-2228	84	2	.	.	PUNCT
ap-2228	85	1	res	re	NOUN
ap-2228	85	2	.	.	PUNCT
ap-2228	85	3	appl	appl	PROPN
ap-2228	85	4	.	.	PROPN
ap-2228	85	5	,	,	PUNCT
ap-2228	85	6	13	13	NUM
ap-2228	85	7	(	(	PUNCT
ap-2228	85	8	7	7	NUM
ap-2228	85	9	)	)	PUNCT
ap-2228	85	10	,	,	PUNCT
ap-2228	85	11	2005	2005	NUM
ap-2228	85	12	,	,	PUNCT
ap-2228	85	13	p.	p.	NOUN
ap-2228	85	14	551–569	551–569	NUM
ap-2228	85	15	.	.	PUNCT
ap-2228	86	1	doi:10.1002	doi:10.1002	NOUN
ap-2228	86	2	/	/	SYM
ap-2228	86	3	pip.611	pip.611	NOUN
ap-2228	86	4	[	[	X
ap-2228	86	5	2	2	NUM
ap-2228	86	6	]	]	X
ap-2228	86	7	ferreira	ferreira	PROPN
ap-2228	86	8	,	,	PUNCT
ap-2228	86	9	c.m	c.m	PROPN
ap-2228	86	10	.	.	PROPN
ap-2228	86	11	et	et	PROPN
ap-2228	86	12	al	al	PROPN
ap-2228	86	13	.	.	PROPN
ap-2228	86	14	:	:	PUNCT
ap-2228	87	1	air	air	NOUN
ap-2228	87	2	–	–	PUNCT
ap-2228	87	3	water	water	NOUN
ap-2228	87	4	microwave	microwave	NOUN
ap-2228	87	5	plasma	plasma	NOUN
ap-2228	87	6	torch	torch	NOUN
ap-2228	87	7	as	as	ADP
ap-2228	87	8	a	a	DET
ap-2228	87	9	no	no	DET
ap-2228	87	10	source	source	NOUN
ap-2228	87	11	for	for	ADP
ap-2228	87	12	biomedical	biomedical	ADJ
ap-2228	87	13	applications	application	NOUN
ap-2228	87	14	.	.	PUNCT
ap-2228	88	1	chem	chem	NOUN
ap-2228	88	2	.	.	PUNCT
ap-2228	89	1	phys	phy	NOUN
ap-2228	89	2	.	.	PUNCT
ap-2228	89	3	,	,	PUNCT
ap-2228	89	4	398	398	NUM
ap-2228	89	5	,	,	PUNCT
ap-2228	89	6	2012	2012	NUM
ap-2228	89	7	,	,	PUNCT
ap-2228	89	8	p.	p.	NOUN
ap-2228	89	9	248–254	248–254	NUM
ap-2228	89	10	.	.	PUNCT
ap-2228	90	1	doi:10.1016	doi:10.1016	PROPN
ap-2228	90	2	/	/	SYM
ap-2228	90	3	j.chemphys.2011.05.024	j.chemphys.2011.05.024	PROPN
ap-2228	91	1	[	[	X
ap-2228	91	2	3	3	NUM
ap-2228	91	3	]	]	PUNCT
ap-2228	91	4	brewer	brewer	NOUN
ap-2228	91	5	,	,	PUNCT
ap-2228	91	6	m.a	m.a	PROPN
ap-2228	91	7	.	.	PROPN
ap-2228	91	8	et	et	PROPN
ap-2228	91	9	al	al	PROPN
ap-2228	91	10	.	.	PROPN
ap-2228	91	11	:	:	PUNCT
ap-2228	92	1	simple	simple	ADJ
ap-2228	92	2	,	,	PUNCT
ap-2228	92	3	safe	safe	ADJ
ap-2228	92	4	,	,	PUNCT
ap-2228	92	5	and	and	CCONJ
ap-2228	92	6	economical	economical	ADJ
ap-2228	92	7	microwave	microwave	NOUN
ap-2228	92	8	plasma	plasma	NOUN
ap-2228	92	9	-	-	PUNCT
ap-2228	92	10	assisted	assist	VERB
ap-2228	92	11	chemical	chemical	NOUN
ap-2228	92	12	vapor	vapor	NOUN
ap-2228	92	13	deposition	deposition	NOUN
ap-2228	92	14	facility	facility	NOUN
ap-2228	92	15	.	.	PUNCT
ap-2228	93	1	rev	rev	PROPN
ap-2228	93	2	.	.	PUNCT
ap-2228	94	1	sci	sci	PROPN
ap-2228	94	2	.	.	PROPN
ap-2228	94	3	instrum	instrum	PROPN
ap-2228	94	4	.	.	PROPN
ap-2228	94	5	,	,	PUNCT
ap-2228	94	6	63	63	NUM
ap-2228	94	7	(	(	PUNCT
ap-2228	94	8	6	6	NUM
ap-2228	94	9	)	)	PUNCT
ap-2228	94	10	,	,	PUNCT
ap-2228	94	11	1992	1992	NUM
ap-2228	94	12	,	,	PUNCT
ap-2228	94	13	p.	p.	NOUN
ap-2228	94	14	3389–3393	3389–3393	NUM
ap-2228	94	15	.	.	PUNCT
ap-2228	95	1	doi:10.1063/1.1142557	doi:10.1063/1.1142557	PROPN
ap-2228	96	1	[	[	X
ap-2228	96	2	4	4	NUM
ap-2228	96	3	]	]	PUNCT
ap-2228	96	4	takanishi	takanishi	PROPN
ap-2228	96	5	,	,	PUNCT
ap-2228	96	6	y.	y.	PROPN
ap-2228	96	7	et	et	PROPN
ap-2228	96	8	al	al	PROPN
ap-2228	96	9	.	.	PUNCT
ap-2228	96	10	:	:	PUNCT
ap-2228	97	1	deposition	deposition	NOUN
ap-2228	97	2	of	of	ADP
ap-2228	97	3	polycrystalline	polycrystalline	ADJ
ap-2228	97	4	sige	sige	NOUN
ap-2228	97	5	by	by	ADP
ap-2228	97	6	surface	surface	NOUN
ap-2228	97	7	wave	wave	NOUN
ap-2228	97	8	excited	excite	VERB
ap-2228	97	9	plasma	plasma	NOUN
ap-2228	97	10	.	.	PUNCT
ap-2228	98	1	thin	thin	ADJ
ap-2228	98	2	solid	solid	ADJ
ap-2228	98	3	films	film	NOUN
ap-2228	98	4	,	,	PUNCT
ap-2228	98	5	516	516	NUM
ap-2228	98	6	(	(	PUNCT
ap-2228	98	7	11	11	NUM
ap-2228	98	8	)	)	PUNCT
ap-2228	98	9	,	,	PUNCT
ap-2228	98	10	2008	2008	NUM
ap-2228	98	11	,	,	PUNCT
ap-2228	98	12	p.	p.	NOUN
ap-2228	98	13	3554–3557	3554–3557	NUM
ap-2228	98	14	.	.	PUNCT
ap-2228	99	1	doi:10.1016	doi:10.1016	PROPN
ap-2228	99	2	/	/	SYM
ap-2228	99	3	j.tsf.2007.08.025	j.tsf.2007.08.025	PROPN
ap-2228	99	4	[	[	X
ap-2228	99	5	5	5	NUM
ap-2228	99	6	]	]	X
ap-2228	99	7	kment	kment	NOUN
ap-2228	99	8	,	,	PUNCT
ap-2228	99	9	s.	s.	PROPN
ap-2228	99	10	et	et	PROPN
ap-2228	99	11	al	al	PROPN
ap-2228	99	12	.	.	PROPN
ap-2228	99	13	:	:	PUNCT
ap-2228	100	1	photo	photo	NOUN
ap-2228	100	2	-	-	PUNCT
ap-2228	100	3	induced	induce	VERB
ap-2228	100	4	electrochemical	electrochemical	ADJ
ap-2228	100	5	functionality	functionality	NOUN
ap-2228	100	6	of	of	ADP
ap-2228	100	7	the	the	DET
ap-2228	100	8	tio2	tio2	NOUN
ap-2228	100	9	nanoscale	nanoscale	NOUN
ap-2228	100	10	films	film	NOUN
ap-2228	100	11	.	.	PUNCT
ap-2228	101	1	electrochimica	electrochimica	PROPN
ap-2228	101	2	acta	acta	PROPN
ap-2228	101	3	,	,	PUNCT
ap-2228	101	4	54	54	NUM
ap-2228	101	5	(	(	PUNCT
ap-2228	101	6	12	12	NUM
ap-2228	101	7	)	)	PUNCT
ap-2228	101	8	,	,	PUNCT
ap-2228	101	9	2009	2009	NUM
ap-2228	101	10	,	,	PUNCT
ap-2228	101	11	p.	p.	NOUN
ap-2228	101	12	3352–3359	3352–3359	NUM
ap-2228	101	13	.	.	PUNCT
ap-2228	102	1	doi:10.1016	doi:10.1016	PROPN
ap-2228	102	2	/	/	SYM
ap-2228	102	3	j.electacta.2008.12.036	j.electacta.2008.12.036	X
ap-2228	103	1	[	[	X
ap-2228	103	2	6	6	NUM
ap-2228	103	3	]	]	PUNCT
ap-2228	103	4	šerá	šerá	NOUN
ap-2228	103	5	,	,	PUNCT
ap-2228	103	6	b.	b.	PROPN
ap-2228	103	7	et	et	PROPN
ap-2228	103	8	al	al	PROPN
ap-2228	103	9	.	.	PROPN
ap-2228	103	10	:	:	PUNCT
ap-2228	104	1	new	new	ADJ
ap-2228	104	2	physicochemical	physicochemical	ADJ
ap-2228	104	3	treatment	treatment	NOUN
ap-2228	104	4	method	method	NOUN
ap-2228	104	5	of	of	ADP
ap-2228	104	6	poppy	poppy	ADJ
ap-2228	104	7	seeds	seed	NOUN
ap-2228	104	8	for	for	ADP
ap-2228	104	9	agriculture	agriculture	NOUN
ap-2228	104	10	and	and	CCONJ
ap-2228	104	11	food	food	NOUN
ap-2228	104	12	industries	industry	NOUN
ap-2228	104	13	.	.	PUNCT
ap-2228	105	1	plasma	plasma	PROPN
ap-2228	105	2	sci	sci	PROPN
ap-2228	105	3	.	.	PROPN
ap-2228	105	4	technol	technol	PROPN
ap-2228	105	5	.	.	PROPN
ap-2228	105	6	,	,	PUNCT
ap-2228	105	7	15	15	NUM
ap-2228	105	8	(	(	PUNCT
ap-2228	105	9	9	9	NUM
ap-2228	105	10	)	)	PUNCT
ap-2228	105	11	,	,	PUNCT
ap-2228	105	12	2013	2013	NUM
ap-2228	105	13	,	,	PUNCT
ap-2228	105	14	p.	p.	NOUN
ap-2228	105	15	935	935	NUM
ap-2228	105	16	.	.	PUNCT
ap-2228	106	1	doi:10.1088/1009	doi:10.1088/1009	NOUN
ap-2228	106	2	-	-	PUNCT
ap-2228	106	3	0630/15/9/19	0630/15/9/19	X
ap-2228	107	1	[	[	X
ap-2228	107	2	7	7	NUM
ap-2228	107	3	]	]	X
ap-2228	107	4	olejníček	olejníček	PROPN
ap-2228	107	5	,	,	PUNCT
ap-2228	107	6	j.	j.	PROPN
ap-2228	107	7	et	et	PROPN
ap-2228	107	8	al	al	PROPN
ap-2228	107	9	.	.	PROPN
ap-2228	107	10	:	:	PUNCT
ap-2228	108	1	zno	zno	PROPN
ap-2228	108	2	thin	thin	ADJ
ap-2228	108	3	films	film	NOUN
ap-2228	108	4	prepared	prepare	VERB
ap-2228	108	5	by	by	ADP
ap-2228	108	6	surfatron	surfatron	NOUN
ap-2228	108	7	produced	produce	VERB
ap-2228	108	8	discharge	discharge	NOUN
ap-2228	108	9	.	.	PUNCT
ap-2228	109	1	catal	catal	NOUN
ap-2228	109	2	.	.	PUNCT
ap-2228	110	1	today	today	NOUN
ap-2228	110	2	,	,	PUNCT
ap-2228	110	3	230	230	NUM
ap-2228	110	4	,	,	PUNCT
ap-2228	110	5	2014	2014	NUM
ap-2228	110	6	,	,	PUNCT
ap-2228	110	7	p.	p.	NOUN
ap-2228	110	8	119–124	119–124	NUM
ap-2228	110	9	.	.	PUNCT
ap-2228	111	1	doi:10.1016	doi:10.1016	PROPN
ap-2228	111	2	/	/	SYM
ap-2228	111	3	j.cattod.2013.11.024	j.cattod.2013.11.024	PROPN
ap-2228	111	4	392	392	NUM
ap-2228	111	5	http://dx.doi.org/10.1002/pip.611	http://dx.doi.org/10.1002/pip.611	NOUN
ap-2228	111	6	http://dx.doi.org/10.1016/j.chemphys.2011.05.024	http://dx.doi.org/10.1016/j.chemphys.2011.05.024	PROPN
ap-2228	111	7	http://dx.doi.org/10.1063/1.1142557	http://dx.doi.org/10.1063/1.1142557	PROPN
ap-2228	111	8	http://dx.doi.org/10.1016/j.tsf.2007.08.025	http://dx.doi.org/10.1016/j.tsf.2007.08.025	NOUN
ap-2228	111	9	http://dx.doi.org/10.1016/j.electacta.2008.12.036	http://dx.doi.org/10.1016/j.electacta.2008.12.036	NOUN
ap-2228	111	10	http://dx.doi.org/10.1088/1009-0630/15/9/19	http://dx.doi.org/10.1088/1009-0630/15/9/19	NOUN
ap-2228	111	11	http://dx.doi.org/10.1016/j.cattod.2013.11.024	http://dx.doi.org/10.1016/j.cattod.2013.11.024	NOUN
ap-2228	111	12	vol	vol	NOUN
ap-2228	111	13	.	.	PUNCT
ap-2228	112	1	54	54	NUM
ap-2228	112	2	no	no	NOUN
ap-2228	112	3	.	.	PUNCT
ap-2228	113	1	6/2014	6/2014	NUM
ap-2228	113	2	deposition	deposition	NOUN
ap-2228	113	3	of	of	ADP
ap-2228	113	4	carbon	carbon	NOUN
ap-2228	113	5	nanostructures	nanostructure	NOUN
ap-2228	113	6	by	by	ADP
ap-2228	113	7	surfatron	surfatron	NOUN
ap-2228	113	8	generated	generate	VERB
ap-2228	113	9	discharge	discharge	NOUN
ap-2228	113	10	[	[	X
ap-2228	113	11	8	8	NUM
ap-2228	113	12	]	]	SYM
ap-2228	113	13	kromka	kromka	NOUN
ap-2228	113	14	,	,	PUNCT
ap-2228	113	15	a.	a.	NOUN
ap-2228	113	16	et	et	PROPN
ap-2228	113	17	al	al	PROPN
ap-2228	113	18	.	.	PUNCT
ap-2228	113	19	:	:	PUNCT
ap-2228	114	1	linear	linear	ADJ
ap-2228	114	2	antenna	antenna	NOUN
ap-2228	114	3	microwave	microwave	NOUN
ap-2228	114	4	plasma	plasma	PROPN
ap-2228	114	5	cvd	cvd	PROPN
ap-2228	114	6	deposition	deposition	NOUN
ap-2228	114	7	of	of	ADP
ap-2228	114	8	diamond	diamond	NOUN
ap-2228	114	9	films	film	NOUN
ap-2228	114	10	over	over	ADP
ap-2228	114	11	large	large	ADJ
ap-2228	114	12	areas	area	NOUN
ap-2228	114	13	.	.	PUNCT
ap-2228	115	1	vacuum	vacuum	PROPN
ap-2228	115	2	,	,	PUNCT
ap-2228	115	3	86	86	NUM
ap-2228	115	4	(	(	PUNCT
ap-2228	115	5	6	6	NUM
ap-2228	115	6	)	)	PUNCT
ap-2228	115	7	,	,	PUNCT
ap-2228	115	8	2012	2012	NUM
ap-2228	115	9	,	,	PUNCT
ap-2228	115	10	p.	p.	NOUN
ap-2228	115	11	776–779	776–779	NUM
ap-2228	115	12	.	.	PUNCT
ap-2228	116	1	doi:10.1016	doi:10.1016	PROPN
ap-2228	116	2	/	/	SYM
ap-2228	116	3	j.vacuum.2011.07.008	j.vacuum.2011.07.008	PROPN
ap-2228	117	1	[	[	X
ap-2228	117	2	9	9	NUM
ap-2228	117	3	]	]	X
ap-2228	117	4	kruk	kruk	PROPN
ap-2228	117	5	,	,	PUNCT
ap-2228	117	6	m.	m.	NOUN
ap-2228	117	7	et	et	PROPN
ap-2228	117	8	al	al	PROPN
ap-2228	117	9	.	.	PROPN
ap-2228	117	10	:	:	PUNCT
ap-2228	117	11	partially	partially	ADV
ap-2228	117	12	graphitic	graphitic	ADJ
ap-2228	117	13	,	,	PUNCT
ap-2228	117	14	high	high	ADJ
ap-2228	117	15	-	-	PUNCT
ap-2228	117	16	surface	surface	NOUN
ap-2228	117	17	-	-	PUNCT
ap-2228	117	18	area	area	NOUN
ap-2228	117	19	mesoporous	mesoporous	ADJ
ap-2228	117	20	carbons	carbon	NOUN
ap-2228	117	21	from	from	ADP
ap-2228	117	22	polyacrylonitrile	polyacrylonitrile	ADJ
ap-2228	117	23	templated	template	VERB
ap-2228	117	24	by	by	ADP
ap-2228	117	25	ordered	order	VERB
ap-2228	117	26	and	and	CCONJ
ap-2228	117	27	disordered	disordered	ADJ
ap-2228	117	28	mesoporous	mesoporous	ADJ
ap-2228	117	29	silicas	silicas	NOUN
ap-2228	117	30	.	.	PUNCT
ap-2228	118	1	microporous	microporous	ADJ
ap-2228	118	2	mesoporous	mesoporous	ADJ
ap-2228	118	3	mater	mater	NOUN
ap-2228	118	4	.	.	PUNCT
ap-2228	118	5	,	,	PUNCT
ap-2228	118	6	102	102	NUM
ap-2228	118	7	,	,	PUNCT
ap-2228	118	8	2007	2007	NUM
ap-2228	118	9	,	,	PUNCT
ap-2228	118	10	p.	p.	NOUN
ap-2228	118	11	178–187	178–187	NUM
ap-2228	118	12	.	.	PUNCT
ap-2228	119	1	doi:10.1016	doi:10.1016	PROPN
ap-2228	119	2	/	/	SYM
ap-2228	119	3	j.micromeso.2006.12.027	j.micromeso.2006.12.027	PROPN
ap-2228	120	1	[	[	X
ap-2228	120	2	10	10	NUM
ap-2228	120	3	]	]	X
ap-2228	120	4	woo	woo	NOUN
ap-2228	120	5	,	,	PUNCT
ap-2228	120	6	h.	h.	PROPN
ap-2228	120	7	k.	k.	PROPN
ap-2228	120	8	et	et	PROPN
ap-2228	120	9	al	al	PROPN
ap-2228	120	10	.	.	PUNCT
ap-2228	120	11	:	:	PUNCT
ap-2228	121	1	growth	growth	NOUN
ap-2228	121	2	of	of	ADP
ap-2228	121	3	epitaxial	epitaxial	ADJ
ap-2228	121	4	beta	beta	NOUN
ap-2228	121	5	-	-	PUNCT
ap-2228	121	6	sic	sic	ADJ
ap-2228	121	7	films	film	NOUN
ap-2228	121	8	on	on	ADP
ap-2228	121	9	silicon	silicon	NOUN
ap-2228	121	10	using	use	VERB
ap-2228	121	11	solid	solid	ADJ
ap-2228	121	12	graphite	graphite	NOUN
ap-2228	121	13	and	and	CCONJ
ap-2228	121	14	silicon	silicon	NOUN
ap-2228	121	15	sources	source	NOUN
ap-2228	121	16	.	.	PUNCT
ap-2228	122	1	diam	diam	PROPN
ap-2228	122	2	.	.	PUNCT
ap-2228	122	3	relat	relat	PROPN
ap-2228	122	4	.	.	PUNCT
ap-2228	123	1	mater	mater	PROPN
ap-2228	123	2	.	.	PROPN
ap-2228	123	3	,	,	PUNCT
ap-2228	123	4	8	8	NUM
ap-2228	123	5	,	,	PUNCT
ap-2228	123	6	1999	1999	NUM
ap-2228	123	7	,	,	PUNCT
ap-2228	123	8	p.	p.	NOUN
ap-2228	123	9	1737	1737	NUM
ap-2228	123	10	-	-	SYM
ap-2228	123	11	1740	1740	NUM
ap-2228	123	12	.	.	PUNCT
ap-2228	124	1	doi:10.1016	doi:10.1016	PROPN
ap-2228	124	2	/	/	SYM
ap-2228	124	3	s0925	s0925	PROPN
ap-2228	124	4	-	-	PUNCT
ap-2228	124	5	9635(99)00016	9635(99)00016	NUM
ap-2228	124	6	-	-	SYM
ap-2228	124	7	3	3	NUM
ap-2228	125	1	[	[	X
ap-2228	125	2	11	11	NUM
ap-2228	125	3	]	]	X
ap-2228	125	4	krivchenko	krivchenko	NOUN
ap-2228	125	5	,	,	PUNCT
ap-2228	125	6	v.	v.	ADP
ap-2228	125	7	a.	a.	NOUN
ap-2228	125	8	et	et	PROPN
ap-2228	125	9	al	al	PROPN
ap-2228	125	10	.	.	PROPN
ap-2228	125	11	:	:	PUNCT
ap-2228	126	1	carbon	carbon	NOUN
ap-2228	126	2	nanowalls	nanowall	VERB
ap-2228	126	3	:	:	PUNCT
ap-2228	126	4	the	the	DET
ap-2228	126	5	next	next	ADJ
ap-2228	126	6	step	step	NOUN
ap-2228	126	7	for	for	ADP
ap-2228	126	8	physical	physical	ADJ
ap-2228	126	9	manifestation	manifestation	NOUN
ap-2228	126	10	of	of	ADP
ap-2228	126	11	the	the	DET
ap-2228	126	12	black	black	ADJ
ap-2228	126	13	body	body	NOUN
ap-2228	126	14	rating	rating	NOUN
ap-2228	126	15	.	.	PUNCT
ap-2228	127	1	sci	sci	PROPN
ap-2228	127	2	.	.	PROPN
ap-2228	127	3	rep	rep	PROPN
ap-2228	127	4	.	.	PROPN
ap-2228	127	5	,	,	PUNCT
ap-2228	127	6	3	3	NUM
ap-2228	127	7	,	,	PUNCT
ap-2228	127	8	2013	2013	NUM
ap-2228	127	9	,	,	PUNCT
ap-2228	127	10	p.	p.	NOUN
ap-2228	127	11	1	1	NUM
ap-2228	127	12	-	-	SYM
ap-2228	127	13	6	6	NUM
ap-2228	127	14	.	.	PUNCT
ap-2228	127	15	doi:10.1038	doi:10.1038	NOUN
ap-2228	127	16	/	/	SYM
ap-2228	127	17	srep03328	srep03328	PROPN
ap-2228	128	1	[	[	X
ap-2228	128	2	12	12	NUM
ap-2228	128	3	]	]	X
ap-2228	128	4	wang	wang	PROPN
ap-2228	128	5	,	,	PUNCT
ap-2228	128	6	l.	l.	PROPN
ap-2228	128	7	et	et	PROPN
ap-2228	128	8	al	al	PROPN
ap-2228	128	9	.	.	PUNCT
ap-2228	128	10	:	:	PUNCT
ap-2228	129	1	b	b	X
ap-2228	129	2	and	and	CCONJ
ap-2228	129	3	n	n	CCONJ
ap-2228	129	4	isolate	isolate	NOUN
ap-2228	129	5	-	-	PUNCT
ap-2228	129	6	doped	dope	VERB
ap-2228	129	7	graphitic	graphitic	ADJ
ap-2228	129	8	carbon	carbon	NOUN
ap-2228	129	9	nanosheets	nanosheet	NOUN
ap-2228	129	10	from	from	ADP
ap-2228	129	11	nitrogen	nitrogen	NOUN
ap-2228	129	12	-	-	PUNCT
ap-2228	129	13	containing	contain	VERB
ap-2228	129	14	ion	ion	NOUN
ap-2228	129	15	-	-	PUNCT
ap-2228	129	16	exchanged	exchange	VERB
ap-2228	129	17	resins	resin	NOUN
ap-2228	129	18	for	for	ADP
ap-2228	129	19	enhanced	enhanced	ADJ
ap-2228	129	20	oxygen	oxygen	NOUN
ap-2228	129	21	reduction	reduction	NOUN
ap-2228	129	22	.	.	PUNCT
ap-2228	130	1	sci	sci	PROPN
ap-2228	130	2	.	.	PROPN
ap-2228	130	3	rep	rep	PROPN
ap-2228	130	4	.	.	PROPN
ap-2228	130	5	,	,	PUNCT
ap-2228	130	6	4	4	NUM
ap-2228	130	7	,	,	PUNCT
ap-2228	130	8	2014	2014	NUM
ap-2228	130	9	,	,	PUNCT
ap-2228	130	10	p.	p.	NOUN
ap-2228	130	11	1	1	NUM
ap-2228	130	12	-	-	SYM
ap-2228	130	13	8	8	NUM
ap-2228	130	14	.	.	PUNCT
ap-2228	131	1	[	[	X
ap-2228	131	2	13	13	NUM
ap-2228	131	3	]	]	X
ap-2228	131	4	ghosh	ghosh	PROPN
ap-2228	131	5	,	,	PUNCT
ap-2228	131	6	s.	s.	PROPN
ap-2228	131	7	et	et	PROPN
ap-2228	131	8	al	al	PROPN
ap-2228	131	9	.	.	PROPN
ap-2228	131	10	:	:	PUNCT
ap-2228	131	11	evolution	evolution	NOUN
ap-2228	131	12	and	and	CCONJ
ap-2228	131	13	defect	defect	VERB
ap-2228	131	14	analysis	analysis	NOUN
ap-2228	131	15	of	of	ADP
ap-2228	131	16	vertical	vertical	ADJ
ap-2228	131	17	graphene	graphene	NOUN
ap-2228	131	18	nanosheets	nanosheet	NOUN
ap-2228	131	19	.	.	PUNCT
ap-2228	132	1	j.	j.	PROPN
ap-2228	132	2	raman	raman	PROPN
ap-2228	132	3	spectrosc	spectrosc	PROPN
ap-2228	132	4	.	.	PUNCT
ap-2228	132	5	,	,	PUNCT
ap-2228	132	6	45	45	NUM
ap-2228	132	7	,	,	PUNCT
ap-2228	132	8	2014	2014	NUM
ap-2228	132	9	,	,	PUNCT
ap-2228	132	10	p.	p.	NOUN
ap-2228	132	11	642	642	NUM
ap-2228	132	12	-	-	SYM
ap-2228	132	13	649	649	NUM
ap-2228	132	14	.	.	NOUN
ap-2228	132	15	393	393	NUM
ap-2228	132	16	http://dx.doi.org/10.1016/j.vacuum.2011.07.008	http://dx.doi.org/10.1016/j.vacuum.2011.07.008	NOUN
ap-2228	132	17	http://dx.doi.org/10.1016/j.micromeso.2006.12.027	http://dx.doi.org/10.1016/j.micromeso.2006.12.027	PROPN
ap-2228	132	18	http://dx.doi.org/10.1016/s0925-9635(99)00016-3	http://dx.doi.org/10.1016/s0925-9635(99)00016-3	VERB
ap-2228	132	19	http://dx.doi.org/10.1038/srep03328	http://dx.doi.org/10.1038/srep03328	PROPN
ap-2228	132	20	acta	acta	PROPN
ap-2228	132	21	polytechnica	polytechnica	PROPN
ap-2228	132	22	54(6):389–393	54(6):389–393	PROPN
ap-2228	132	23	,	,	PUNCT
ap-2228	132	24	2014	2014	NUM
ap-2228	132	25	1	1	NUM
ap-2228	132	26	introduction	introduction	NOUN
ap-2228	132	27	2	2	NUM
ap-2228	132	28	experimental	experimental	ADJ
ap-2228	132	29	details	detail	NOUN
ap-2228	132	30	2.1	2.1	NUM
ap-2228	132	31	deposition	deposition	NOUN
ap-2228	132	32	system	system	NOUN
ap-2228	132	33	2.2	2.2	NUM
ap-2228	132	34	deposition	deposition	NOUN
ap-2228	132	35	of	of	ADP
ap-2228	132	36	carbon	carbon	NOUN
ap-2228	132	37	nanostructures	nanostructure	NOUN
ap-2228	132	38	2.3	2.3	NUM
ap-2228	132	39	material	material	NOUN
ap-2228	132	40	characterization	characterization	NOUN
ap-2228	132	41	3	3	NUM
ap-2228	132	42	results	result	NOUN
ap-2228	132	43	and	and	CCONJ
ap-2228	132	44	discussion	discussion	NOUN
ap-2228	132	45	4	4	NUM
ap-2228	132	46	conclusions	conclusion	NOUN
ap-2228	132	47	acknowledgements	acknowledgement	NOUN
ap-2228	132	48	references	reference	NOUN