id	sid	tid	token	lemma	pos
ap-3766	1	1	acta	acta	PROPN
ap-3766	1	2	polytechnica	polytechnica	PROPN
ap-3766	1	3	doi:10.14311	doi:10.14311	PROPN
ap-3766	1	4	/	/	SYM
ap-3766	1	5	ap.2016.56.0425	ap.2016.56.0425	PROPN
ap-3766	1	6	acta	acta	PROPN
ap-3766	1	7	polytechnica	polytechnica	PROPN
ap-3766	1	8	56(6):425–431	56(6):425–431	PROPN
ap-3766	1	9	,	,	PUNCT
ap-3766	1	10	2016	2016	NUM
ap-3766	1	11	©	©	PROPN
ap-3766	1	12	czech	czech	PROPN
ap-3766	1	13	technical	technical	PROPN
ap-3766	1	14	university	university	PROPN
ap-3766	1	15	in	in	ADP
ap-3766	1	16	prague	prague	PROPN
ap-3766	1	17	,	,	PUNCT
ap-3766	1	18	2016	2016	NUM
ap-3766	1	19	available	available	ADJ
ap-3766	1	20	online	online	ADV
ap-3766	1	21	at	at	ADP
ap-3766	1	22	http://ojs.cvut.cz/ojs/index.php/ap	http://ojs.cvut.cz/ojs/index.php/ap	PROPN
ap-3766	1	23	magnetron	magnetron	NOUN
ap-3766	1	24	sputtering	sputtering	NOUN
ap-3766	1	25	with	with	ADP
ap-3766	1	26	hot	hot	ADJ
ap-3766	1	27	solid	solid	ADJ
ap-3766	1	28	target	target	NOUN
ap-3766	1	29	:	:	PUNCT
ap-3766	1	30	thermal	thermal	ADJ
ap-3766	1	31	processes	process	NOUN
ap-3766	1	32	and	and	CCONJ
ap-3766	1	33	erosion	erosion	NOUN
ap-3766	1	34	alena	alena	PROPN
ap-3766	1	35	o.	o.	PROPN
ap-3766	1	36	borduleva∗	borduleva∗	PROPN
ap-3766	1	37	,	,	PUNCT
ap-3766	1	38	galina	galina	PROPN
ap-3766	1	39	a.	a.	PROPN
ap-3766	1	40	bleykher	bleykher	PROPN
ap-3766	1	41	,	,	PUNCT
ap-3766	1	42	dmitrii	dmitrii	PROPN
ap-3766	1	43	v.	v.	ADP
ap-3766	1	44	sidelev	sidelev	PROPN
ap-3766	1	45	,	,	PUNCT
ap-3766	1	46	valeriy	valeriy	NOUN
ap-3766	1	47	p.	p.	PROPN
ap-3766	1	48	krivobokov	krivobokov	PROPN
ap-3766	1	49	institute	institute	PROPN
ap-3766	1	50	of	of	ADP
ap-3766	1	51	physics	physics	PROPN
ap-3766	1	52	and	and	CCONJ
ap-3766	1	53	technology	technology	NOUN
ap-3766	1	54	,	,	PUNCT
ap-3766	1	55	tomsk	tomsk	PROPN
ap-3766	1	56	polytechnic	polytechnic	PROPN
ap-3766	1	57	university	university	PROPN
ap-3766	1	58	,	,	PUNCT
ap-3766	1	59	lenin	lenin	PROPN
ap-3766	1	60	avenue	avenue	PROPN
ap-3766	1	61	2a	2a	NUM
ap-3766	1	62	,	,	PUNCT
ap-3766	1	63	tomsk	tomsk	PROPN
ap-3766	1	64	634028	634028	NUM
ap-3766	1	65	,	,	PUNCT
ap-3766	1	66	russia	russia	PROPN
ap-3766	1	67	∗	∗	NOUN
ap-3766	1	68	corresponding	correspond	VERB
ap-3766	1	69	author	author	NOUN
ap-3766	1	70	:	:	PUNCT
ap-3766	1	71	tcybenkoao@gmail.com	tcybenkoao@gmail.com	X
ap-3766	1	72	abstract	abstract	ADJ
ap-3766	1	73	.	.	PUNCT
ap-3766	2	1	this	this	DET
ap-3766	2	2	work	work	NOUN
ap-3766	2	3	focuses	focus	VERB
ap-3766	2	4	on	on	ADP
ap-3766	2	5	erosion	erosion	NOUN
ap-3766	2	6	and	and	CCONJ
ap-3766	2	7	thermal	thermal	ADJ
ap-3766	2	8	processes	process	NOUN
ap-3766	2	9	taking	take	VERB
ap-3766	2	10	place	place	NOUN
ap-3766	2	11	on	on	ADP
ap-3766	2	12	the	the	DET
ap-3766	2	13	surface	surface	NOUN
ap-3766	2	14	of	of	ADP
ap-3766	2	15	the	the	DET
ap-3766	2	16	titanium	titanium	NOUN
ap-3766	2	17	target	target	NOUN
ap-3766	2	18	in	in	ADP
ap-3766	2	19	magnetron	magnetron	NOUN
ap-3766	2	20	sputtering	sputtering	NOUN
ap-3766	2	21	.	.	PUNCT
ap-3766	3	1	the	the	DET
ap-3766	3	2	study	study	NOUN
ap-3766	3	3	was	be	AUX
ap-3766	3	4	carried	carry	VERB
ap-3766	3	5	out	out	ADP
ap-3766	3	6	using	use	VERB
ap-3766	3	7	magnetron	magnetron	ADJ
ap-3766	3	8	sputtering	sputter	VERB
ap-3766	3	9	systems	system	NOUN
ap-3766	3	10	(	(	PUNCT
ap-3766	3	11	mss	mss	PROPN
ap-3766	3	12	)	)	PUNCT
ap-3766	3	13	with	with	ADP
ap-3766	3	14	different	different	ADJ
ap-3766	3	15	thermal	thermal	ADJ
ap-3766	3	16	insulation	insulation	NOUN
ap-3766	3	17	target	target	NOUN
ap-3766	3	18	types	type	NOUN
ap-3766	3	19	from	from	ADP
ap-3766	3	20	the	the	DET
ap-3766	3	21	magnetron	magnetron	NOUN
ap-3766	3	22	body	body	NOUN
ap-3766	3	23	.	.	PUNCT
ap-3766	4	1	it	it	PRON
ap-3766	4	2	was	be	AUX
ap-3766	4	3	found	find	VERB
ap-3766	4	4	that	that	SCONJ
ap-3766	4	5	the	the	DET
ap-3766	4	6	presence	presence	NOUN
ap-3766	4	7	of	of	ADP
ap-3766	4	8	an	an	DET
ap-3766	4	9	evaporation	evaporation	NOUN
ap-3766	4	10	component	component	NOUN
ap-3766	4	11	allows	allow	VERB
ap-3766	4	12	the	the	DET
ap-3766	4	13	rate	rate	NOUN
ap-3766	4	14	of	of	ADP
ap-3766	4	15	removal	removal	NOUN
ap-3766	4	16	of	of	ADP
ap-3766	4	17	atoms	atom	NOUN
ap-3766	4	18	from	from	ADP
ap-3766	4	19	the	the	DET
ap-3766	4	20	surface	surface	NOUN
ap-3766	4	21	of	of	ADP
ap-3766	4	22	a	a	DET
ap-3766	4	23	solid	solid	ADJ
ap-3766	4	24	target	target	NOUN
ap-3766	4	25	to	to	PART
ap-3766	4	26	be	be	AUX
ap-3766	4	27	increased	increase	VERB
ap-3766	4	28	with	with	ADP
ap-3766	4	29	limited	limited	ADJ
ap-3766	4	30	thermal	thermal	ADJ
ap-3766	4	31	conduction	conduction	NOUN
ap-3766	4	32	.	.	PUNCT
ap-3766	5	1	a	a	DET
ap-3766	5	2	mathematical	mathematical	ADJ
ap-3766	5	3	simulation	simulation	NOUN
ap-3766	5	4	was	be	AUX
ap-3766	5	5	used	use	VERB
ap-3766	5	6	to	to	PART
ap-3766	5	7	evaluate	evaluate	VERB
ap-3766	5	8	the	the	DET
ap-3766	5	9	contribution	contribution	NOUN
ap-3766	5	10	of	of	ADP
ap-3766	5	11	evaporation	evaporation	NOUN
ap-3766	5	12	to	to	ADP
ap-3766	5	13	the	the	DET
ap-3766	5	14	increase	increase	NOUN
ap-3766	5	15	in	in	ADP
ap-3766	5	16	the	the	DET
ap-3766	5	17	coating	coat	VERB
ap-3766	5	18	deposition	deposition	NOUN
ap-3766	5	19	rate	rate	NOUN
ap-3766	5	20	for	for	ADP
ap-3766	5	21	complete	complete	ADJ
ap-3766	5	22	and	and	CCONJ
ap-3766	5	23	partial	partial	ADJ
ap-3766	5	24	thermal	thermal	ADJ
ap-3766	5	25	insulation	insulation	NOUN
ap-3766	5	26	.	.	PUNCT
ap-3766	6	1	it	it	PRON
ap-3766	6	2	was	be	AUX
ap-3766	6	3	found	find	VERB
ap-3766	6	4	that	that	SCONJ
ap-3766	6	5	non	non	ADJ
ap-3766	6	6	-	-	NOUN
ap-3766	6	7	uniformity	uniformity	NOUN
ap-3766	6	8	of	of	ADP
ap-3766	6	9	the	the	DET
ap-3766	6	10	direct	direct	ADJ
ap-3766	6	11	-	-	PUNCT
ap-3766	6	12	axis	axis	NOUN
ap-3766	6	13	component	component	NOUN
ap-3766	6	14	of	of	ADP
ap-3766	6	15	the	the	DET
ap-3766	6	16	magnetic	magnetic	ADJ
ap-3766	6	17	induction	induction	NOUN
ap-3766	6	18	vector	vector	NOUN
ap-3766	6	19	helps	help	VERB
ap-3766	6	20	to	to	PART
ap-3766	6	21	localize	localize	VERB
ap-3766	6	22	the	the	DET
ap-3766	6	23	heating	heating	NOUN
ap-3766	6	24	.	.	PUNCT
ap-3766	7	1	also	also	ADV
ap-3766	7	2	increases	increase	VERB
ap-3766	7	3	the	the	DET
ap-3766	7	4	evaporation	evaporation	NOUN
ap-3766	7	5	rate	rate	NOUN
ap-3766	7	6	on	on	ADP
ap-3766	7	7	the	the	DET
ap-3766	7	8	surface	surface	NOUN
ap-3766	7	9	of	of	ADP
ap-3766	7	10	the	the	DET
ap-3766	7	11	target	target	NOUN
ap-3766	7	12	.	.	PUNCT
ap-3766	8	1	it	it	PRON
ap-3766	8	2	was	be	AUX
ap-3766	8	3	proved	prove	VERB
ap-3766	8	4	that	that	SCONJ
ap-3766	8	5	local	local	ADJ
ap-3766	8	6	evaporation	evaporation	NOUN
ap-3766	8	7	including	include	VERB
ap-3766	8	8	sublimations	sublimation	NOUN
ap-3766	8	9	on	on	ADP
ap-3766	8	10	the	the	DET
ap-3766	8	11	surface	surface	NOUN
ap-3766	8	12	of	of	ADP
ap-3766	8	13	a	a	DET
ap-3766	8	14	hot	hot	ADJ
ap-3766	8	15	target	target	NOUN
ap-3766	8	16	is	be	AUX
ap-3766	8	17	a	a	DET
ap-3766	8	18	significant	significant	ADJ
ap-3766	8	19	factor	factor	NOUN
ap-3766	8	20	in	in	ADP
ap-3766	8	21	increasing	increase	VERB
ap-3766	8	22	the	the	DET
ap-3766	8	23	coating	coat	VERB
ap-3766	8	24	deposition	deposition	NOUN
ap-3766	8	25	rate	rate	NOUN
ap-3766	8	26	.	.	PUNCT
ap-3766	9	1	due	due	ADP
ap-3766	9	2	to	to	ADP
ap-3766	9	3	this	this	DET
ap-3766	9	4	mechanism	mechanism	NOUN
ap-3766	9	5	,	,	PUNCT
ap-3766	9	6	the	the	DET
ap-3766	9	7	coating	coat	VERB
ap-3766	9	8	deposition	deposition	NOUN
ap-3766	9	9	rate	rate	NOUN
ap-3766	9	10	can	can	AUX
ap-3766	9	11	be	be	AUX
ap-3766	9	12	increased	increase	VERB
ap-3766	9	13	5	5	NUM
ap-3766	9	14	times	time	NOUN
ap-3766	9	15	for	for	ADP
ap-3766	9	16	ti	ti	NOUN
ap-3766	9	17	in	in	ADP
ap-3766	9	18	comparison	comparison	NOUN
ap-3766	9	19	with	with	ADP
ap-3766	9	20	fully	fully	ADV
ap-3766	9	21	cooled	cool	VERB
ap-3766	9	22	targets	target	NOUN
ap-3766	9	23	.	.	PUNCT
ap-3766	10	1	this	this	DET
ap-3766	10	2	result	result	NOUN
ap-3766	10	3	can	can	AUX
ap-3766	10	4	be	be	AUX
ap-3766	10	5	applied	apply	VERB
ap-3766	10	6	for	for	ADP
ap-3766	10	7	direct	direct	ADJ
ap-3766	10	8	current	current	ADJ
ap-3766	10	9	magnetrons	magnetron	NOUN
ap-3766	10	10	and	and	CCONJ
ap-3766	10	11	also	also	ADV
ap-3766	10	12	for	for	ADP
ap-3766	10	13	pulsed	pulsed	ADJ
ap-3766	10	14	systems	system	NOUN
ap-3766	10	15	.	.	PUNCT
ap-3766	11	1	it	it	PRON
ap-3766	11	2	was	be	AUX
ap-3766	11	3	also	also	ADV
ap-3766	11	4	found	find	VERB
ap-3766	11	5	that	that	SCONJ
ap-3766	11	6	evaporation	evaporation	NOUN
ap-3766	11	7	increased	increase	VERB
ap-3766	11	8	the	the	DET
ap-3766	11	9	energy	energy	NOUN
ap-3766	11	10	efficiency	efficiency	NOUN
ap-3766	11	11	of	of	ADP
ap-3766	11	12	the	the	DET
ap-3766	11	13	target	target	NOUN
ap-3766	11	14	erosion	erosion	NOUN
ap-3766	11	15	.	.	PUNCT
ap-3766	12	1	the	the	DET
ap-3766	12	2	most	most	ADV
ap-3766	12	3	suitable	suitable	ADJ
ap-3766	12	4	metals	metal	NOUN
ap-3766	12	5	were	be	AUX
ap-3766	12	6	selected	select	VERB
ap-3766	12	7	for	for	ADP
ap-3766	12	8	obtaining	obtain	VERB
ap-3766	12	9	high	high	ADJ
ap-3766	12	10	-	-	PUNCT
ap-3766	12	11	intensity	intensity	NOUN
ap-3766	12	12	emission	emission	NOUN
ap-3766	12	13	of	of	ADP
ap-3766	12	14	atoms	atom	NOUN
ap-3766	12	15	from	from	ADP
ap-3766	12	16	a	a	DET
ap-3766	12	17	solid	solid	ADJ
ap-3766	12	18	target	target	NOUN
ap-3766	12	19	.	.	PUNCT
ap-3766	13	1	keywords	keyword	NOUN
ap-3766	13	2	:	:	PUNCT
ap-3766	13	3	magnetron	magnetron	NOUN
ap-3766	13	4	sputtering	sputtering	NOUN
ap-3766	13	5	;	;	PUNCT
ap-3766	13	6	hot	hot	ADJ
ap-3766	13	7	target	target	NOUN
ap-3766	13	8	;	;	PUNCT
ap-3766	13	9	evaporation	evaporation	NOUN
ap-3766	13	10	;	;	PUNCT
ap-3766	13	11	high	high	ADJ
ap-3766	13	12	rate	rate	NOUN
ap-3766	13	13	deposition	deposition	NOUN
ap-3766	13	14	.	.	PUNCT
ap-3766	14	1	1	1	X
ap-3766	14	2	.	.	X
ap-3766	14	3	introduction	introduction	NOUN
ap-3766	14	4	in	in	ADP
ap-3766	14	5	recent	recent	ADJ
ap-3766	14	6	decades	decade	NOUN
ap-3766	14	7	,	,	PUNCT
ap-3766	14	8	magnetron	magnetron	NOUN
ap-3766	14	9	sputtering	sputtering	NOUN
ap-3766	14	10	has	have	AUX
ap-3766	14	11	been	be	AUX
ap-3766	14	12	considered	consider	VERB
ap-3766	14	13	as	as	ADP
ap-3766	14	14	one	one	NUM
ap-3766	14	15	of	of	ADP
ap-3766	14	16	the	the	DET
ap-3766	14	17	most	most	ADV
ap-3766	14	18	effective	effective	ADJ
ap-3766	14	19	methods	method	NOUN
ap-3766	14	20	for	for	ADP
ap-3766	14	21	depositing	deposit	VERB
ap-3766	14	22	high	high	ADJ
ap-3766	14	23	-	-	PUNCT
ap-3766	14	24	quality	quality	NOUN
ap-3766	14	25	functional	functional	ADJ
ap-3766	14	26	coatings	coating	NOUN
ap-3766	14	27	on	on	ADP
ap-3766	14	28	a	a	DET
ap-3766	14	29	solid	solid	ADJ
ap-3766	14	30	surface	surface	NOUN
ap-3766	14	31	.	.	PUNCT
ap-3766	15	1	the	the	DET
ap-3766	15	2	deposition	deposition	NOUN
ap-3766	15	3	is	be	AUX
ap-3766	15	4	carried	carry	VERB
ap-3766	15	5	out	out	ADP
ap-3766	15	6	in	in	ADP
ap-3766	15	7	a	a	DET
ap-3766	15	8	vacuum	vacuum	NOUN
ap-3766	15	9	diode	diode	NOUN
ap-3766	15	10	system	system	NOUN
ap-3766	15	11	under	under	ADP
ap-3766	15	12	conditions	condition	NOUN
ap-3766	15	13	of	of	ADP
ap-3766	15	14	crossed	cross	VERB
ap-3766	15	15	electric	electric	ADJ
ap-3766	15	16	and	and	CCONJ
ap-3766	15	17	magnetic	magnetic	ADJ
ap-3766	15	18	fields	field	NOUN
ap-3766	15	19	.	.	PUNCT
ap-3766	16	1	the	the	DET
ap-3766	16	2	gas	gas	NOUN
ap-3766	16	3	discharge	discharge	NOUN
ap-3766	16	4	plasma	plasma	NOUN
ap-3766	16	5	that	that	PRON
ap-3766	16	6	is	be	AUX
ap-3766	16	7	formed	form	VERB
ap-3766	16	8	is	be	AUX
ap-3766	16	9	located	locate	VERB
ap-3766	16	10	close	close	ADV
ap-3766	16	11	to	to	ADP
ap-3766	16	12	the	the	DET
ap-3766	16	13	surface	surface	NOUN
ap-3766	16	14	of	of	ADP
ap-3766	16	15	the	the	DET
ap-3766	16	16	target	target	NOUN
ap-3766	16	17	,	,	PUNCT
ap-3766	16	18	which	which	PRON
ap-3766	16	19	is	be	AUX
ap-3766	16	20	fixed	fix	VERB
ap-3766	16	21	to	to	ADP
ap-3766	16	22	the	the	DET
ap-3766	16	23	cathode	cathode	NOUN
ap-3766	16	24	.	.	PUNCT
ap-3766	17	1	positively	positively	ADV
ap-3766	17	2	charged	charge	VERB
ap-3766	17	3	ions	ion	NOUN
ap-3766	17	4	extracted	extract	VERB
ap-3766	17	5	from	from	ADP
ap-3766	17	6	the	the	DET
ap-3766	17	7	plasma	plasma	NOUN
ap-3766	17	8	move	move	NOUN
ap-3766	17	9	to	to	ADP
ap-3766	17	10	the	the	DET
ap-3766	17	11	cathode	cathode	NOUN
ap-3766	17	12	and	and	CCONJ
ap-3766	17	13	accelerate	accelerate	NOUN
ap-3766	17	14	to	to	ADP
ap-3766	17	15	energies	energy	NOUN
ap-3766	17	16	from	from	ADP
ap-3766	17	17	100	100	NUM
ap-3766	17	18	to	to	PART
ap-3766	17	19	1000	1000	NUM
ap-3766	17	20	ev	ev	INTJ
ap-3766	17	21	in	in	ADP
ap-3766	17	22	the	the	DET
ap-3766	17	23	area	area	NOUN
ap-3766	17	24	of	of	ADP
ap-3766	17	25	a	a	DET
ap-3766	17	26	potential	potential	ADJ
ap-3766	17	27	fall	fall	NOUN
ap-3766	17	28	.	.	PUNCT
ap-3766	18	1	on	on	ADP
ap-3766	18	2	the	the	DET
ap-3766	18	3	surface	surface	NOUN
ap-3766	18	4	of	of	ADP
ap-3766	18	5	the	the	DET
ap-3766	18	6	target	target	NOUN
ap-3766	18	7	,	,	PUNCT
ap-3766	18	8	the	the	DET
ap-3766	18	9	ions	ion	NOUN
ap-3766	18	10	transfer	transfer	VERB
ap-3766	18	11	their	their	PRON
ap-3766	18	12	energy	energy	NOUN
ap-3766	18	13	to	to	ADP
ap-3766	18	14	atoms	atom	NOUN
ap-3766	18	15	on	on	ADP
ap-3766	18	16	the	the	DET
ap-3766	18	17	surface	surface	NOUN
ap-3766	18	18	layer	layer	NOUN
ap-3766	18	19	,	,	PUNCT
ap-3766	18	20	make	make	VERB
ap-3766	18	21	the	the	DET
ap-3766	18	22	surface	surface	NOUN
ap-3766	18	23	layer	layer	NOUN
ap-3766	18	24	sputtered	sputter	VERB
ap-3766	18	25	and	and	CCONJ
ap-3766	18	26	initiate	initiate	VERB
ap-3766	18	27	a	a	DET
ap-3766	18	28	secondary	secondary	ADJ
ap-3766	18	29	emission	emission	NOUN
ap-3766	18	30	of	of	ADP
ap-3766	18	31	electrons	electron	NOUN
ap-3766	18	32	,	,	PUNCT
ap-3766	18	33	which	which	PRON
ap-3766	18	34	are	be	AUX
ap-3766	18	35	necessary	necessary	ADJ
ap-3766	18	36	to	to	PART
ap-3766	18	37	maintain	maintain	VERB
ap-3766	18	38	the	the	DET
ap-3766	18	39	discharge	discharge	NOUN
ap-3766	18	40	.	.	PUNCT
ap-3766	19	1	the	the	DET
ap-3766	19	2	flow	flow	NOUN
ap-3766	19	3	of	of	ADP
ap-3766	19	4	sputtered	sputtered	ADJ
ap-3766	19	5	atoms	atom	NOUN
ap-3766	19	6	moves	move	NOUN
ap-3766	19	7	mainly	mainly	ADV
ap-3766	19	8	forward	forward	ADV
ap-3766	19	9	from	from	ADP
ap-3766	19	10	the	the	DET
ap-3766	19	11	surface	surface	NOUN
ap-3766	19	12	of	of	ADP
ap-3766	19	13	the	the	DET
ap-3766	19	14	target	target	NOUN
ap-3766	19	15	.	.	PUNCT
ap-3766	20	1	the	the	DET
ap-3766	20	2	particles	particle	NOUN
ap-3766	20	3	of	of	ADP
ap-3766	20	4	this	this	DET
ap-3766	20	5	flow	flow	NOUN
ap-3766	20	6	reach	reach	VERB
ap-3766	20	7	the	the	DET
ap-3766	20	8	substrate	substrate	NOUN
ap-3766	20	9	surface	surface	NOUN
ap-3766	20	10	and	and	CCONJ
ap-3766	20	11	are	be	AUX
ap-3766	20	12	deposited	deposit	VERB
ap-3766	20	13	on	on	ADP
ap-3766	20	14	it	it	PRON
ap-3766	20	15	,	,	PUNCT
ap-3766	20	16	forming	form	VERB
ap-3766	20	17	a	a	DET
ap-3766	20	18	coating	coating	NOUN
ap-3766	20	19	.	.	PUNCT
ap-3766	21	1	due	due	ADP
ap-3766	21	2	to	to	ADP
ap-3766	21	3	the	the	DET
ap-3766	21	4	magnetic	magnetic	ADJ
ap-3766	21	5	field	field	NOUN
ap-3766	21	6	near	near	ADP
ap-3766	21	7	the	the	DET
ap-3766	21	8	surface	surface	NOUN
ap-3766	21	9	of	of	ADP
ap-3766	21	10	the	the	DET
ap-3766	21	11	target	target	NOUN
ap-3766	21	12	,	,	PUNCT
ap-3766	21	13	the	the	DET
ap-3766	21	14	flux	flux	NOUN
ap-3766	21	15	density	density	NOUN
ap-3766	21	16	of	of	ADP
ap-3766	21	17	the	the	DET
ap-3766	21	18	ions	ion	NOUN
ap-3766	21	19	that	that	PRON
ap-3766	21	20	bombard	bombard	VERB
ap-3766	21	21	the	the	DET
ap-3766	21	22	target	target	NOUN
ap-3766	21	23	is	be	AUX
ap-3766	21	24	is	be	AUX
ap-3766	21	25	much	much	ADV
ap-3766	21	26	greater	great	ADJ
ap-3766	21	27	than	than	ADP
ap-3766	21	28	for	for	ADP
ap-3766	21	29	simple	simple	ADJ
ap-3766	21	30	diode	diode	NOUN
ap-3766	21	31	systems	system	NOUN
ap-3766	21	32	.	.	PUNCT
ap-3766	22	1	the	the	DET
ap-3766	22	2	ion	ion	NOUN
ap-3766	22	3	flux	flux	NOUN
ap-3766	22	4	density	density	NOUN
ap-3766	22	5	is	be	AUX
ap-3766	22	6	proportional	proportional	ADJ
ap-3766	22	7	to	to	ADP
ap-3766	22	8	the	the	DET
ap-3766	22	9	direct	direct	ADJ
ap-3766	22	10	-	-	PUNCT
ap-3766	22	11	axis	axis	NOUN
ap-3766	22	12	component	component	NOUN
ap-3766	22	13	of	of	ADP
ap-3766	22	14	a	a	DET
ap-3766	22	15	magnetic	magnetic	ADJ
ap-3766	22	16	induction	induction	NOUN
ap-3766	22	17	vector	vector	NOUN
ap-3766	22	18	.	.	PUNCT
ap-3766	23	1	the	the	DET
ap-3766	23	2	sputtering	sputtering	ADJ
ap-3766	23	3	rate	rate	NOUN
ap-3766	23	4	of	of	ADP
ap-3766	23	5	magnetron	magnetron	NOUN
ap-3766	23	6	sputtering	sputtering	NOUN
ap-3766	23	7	systems	system	NOUN
ap-3766	23	8	(	(	PUNCT
ap-3766	23	9	mss	mss	PROPN
ap-3766	23	10	)	)	PUNCT
ap-3766	23	11	is	be	AUX
ap-3766	23	12	crucial	crucial	ADJ
ap-3766	23	13	for	for	ADP
ap-3766	23	14	the	the	DET
ap-3766	23	15	whole	whole	ADJ
ap-3766	23	16	technology	technology	NOUN
ap-3766	23	17	,	,	PUNCT
ap-3766	23	18	since	since	SCONJ
ap-3766	23	19	it	it	PRON
ap-3766	23	20	determines	determine	VERB
ap-3766	23	21	its	its	PRON
ap-3766	23	22	productivity	productivity	NOUN
ap-3766	23	23	and	and	CCONJ
ap-3766	23	24	depends	depend	VERB
ap-3766	23	25	linearly	linearly	ADV
ap-3766	23	26	on	on	ADP
ap-3766	23	27	the	the	DET
ap-3766	23	28	ion	ion	NOUN
ap-3766	23	29	current	current	ADJ
ap-3766	23	30	density	density	NOUN
ap-3766	24	1	[	[	X
ap-3766	24	2	1	1	NUM
ap-3766	24	3	]	]	PUNCT
ap-3766	24	4	.	.	PUNCT
ap-3766	25	1	unfortunately	unfortunately	ADV
ap-3766	25	2	,	,	PUNCT
ap-3766	25	3	the	the	DET
ap-3766	25	4	productivity	productivity	NOUN
ap-3766	25	5	of	of	ADP
ap-3766	25	6	modern	modern	ADJ
ap-3766	25	7	mss	mss	NOUN
ap-3766	25	8	with	with	ADP
ap-3766	25	9	solid	solid	ADJ
ap-3766	25	10	targets	target	NOUN
ap-3766	25	11	often	often	ADV
ap-3766	25	12	does	do	AUX
ap-3766	25	13	not	not	PART
ap-3766	25	14	meet	meet	VERB
ap-3766	25	15	industrial	industrial	ADJ
ap-3766	25	16	needs	need	NOUN
ap-3766	25	17	.	.	PUNCT
ap-3766	26	1	attempts	attempt	VERB
ap-3766	26	2	to	to	PART
ap-3766	26	3	improve	improve	VERB
ap-3766	26	4	their	their	PRON
ap-3766	26	5	efficiency	efficiency	NOUN
ap-3766	26	6	just	just	ADV
ap-3766	26	7	by	by	ADP
ap-3766	26	8	increasing	increase	VERB
ap-3766	26	9	the	the	DET
ap-3766	26	10	current	current	ADJ
ap-3766	26	11	density	density	NOUN
ap-3766	26	12	have	have	AUX
ap-3766	26	13	turned	turn	VERB
ap-3766	26	14	out	out	ADP
ap-3766	26	15	to	to	PART
ap-3766	26	16	be	be	AUX
ap-3766	26	17	ineffective	ineffective	ADJ
ap-3766	26	18	,	,	PUNCT
ap-3766	26	19	since	since	SCONJ
ap-3766	26	20	the	the	DET
ap-3766	26	21	sputtering	sputtering	ADJ
ap-3766	26	22	rate	rate	NOUN
ap-3766	26	23	depends	depend	VERB
ap-3766	26	24	linearly	linearly	ADV
ap-3766	26	25	on	on	ADP
ap-3766	26	26	the	the	DET
ap-3766	26	27	current	current	ADJ
ap-3766	26	28	density	density	NOUN
ap-3766	26	29	.	.	PUNCT
ap-3766	27	1	for	for	ADP
ap-3766	27	2	high	high	ADJ
ap-3766	27	3	-	-	PUNCT
ap-3766	27	4	power	power	NOUN
ap-3766	27	5	pulsed	pulse	VERB
ap-3766	27	6	mss	mss	PROPN
ap-3766	27	7	,	,	PUNCT
ap-3766	27	8	the	the	DET
ap-3766	27	9	issue	issue	NOUN
ap-3766	27	10	related	relate	VERB
ap-3766	27	11	to	to	ADP
ap-3766	27	12	the	the	DET
ap-3766	27	13	increase	increase	NOUN
ap-3766	27	14	in	in	ADP
ap-3766	27	15	the	the	DET
ap-3766	27	16	coating	coat	VERB
ap-3766	27	17	deposition	deposition	NOUN
ap-3766	27	18	rate	rate	NOUN
ap-3766	27	19	is	be	AUX
ap-3766	27	20	further	far	ADV
ap-3766	27	21	aggravated	aggravate	VERB
ap-3766	27	22	by	by	ADP
ap-3766	27	23	intense	intense	ADJ
ap-3766	27	24	ionization	ionization	NOUN
ap-3766	27	25	of	of	ADP
ap-3766	27	26	the	the	DET
ap-3766	27	27	sputtered	sputtered	ADJ
ap-3766	27	28	particles	particle	NOUN
ap-3766	27	29	and	and	CCONJ
ap-3766	27	30	by	by	ADP
ap-3766	27	31	the	the	DET
ap-3766	27	32	return	return	NOUN
ap-3766	27	33	of	of	ADP
ap-3766	27	34	the	the	DET
ap-3766	27	35	particles	particle	NOUN
ap-3766	27	36	to	to	ADP
ap-3766	27	37	the	the	DET
ap-3766	27	38	target	target	NOUN
ap-3766	27	39	[	[	X
ap-3766	27	40	2	2	NUM
ap-3766	27	41	]	]	PUNCT
ap-3766	27	42	.	.	PUNCT
ap-3766	28	1	however	however	ADV
ap-3766	28	2	,	,	PUNCT
ap-3766	28	3	this	this	DET
ap-3766	28	4	situation	situation	NOUN
ap-3766	28	5	might	might	AUX
ap-3766	28	6	be	be	AUX
ap-3766	28	7	improved	improve	VERB
ap-3766	28	8	by	by	ADP
ap-3766	28	9	adding	add	VERB
ap-3766	28	10	evaporation	evaporation	NOUN
ap-3766	28	11	to	to	ADP
ap-3766	28	12	sputtering	sputter	VERB
ap-3766	28	13	.	.	PUNCT
ap-3766	29	1	previous	previous	ADJ
ap-3766	29	2	research	research	NOUN
ap-3766	29	3	has	have	AUX
ap-3766	29	4	proved	prove	VERB
ap-3766	29	5	that	that	SCONJ
ap-3766	29	6	this	this	DET
ap-3766	29	7	method	method	NOUN
ap-3766	29	8	,	,	PUNCT
ap-3766	29	9	aimed	aim	VERB
ap-3766	29	10	at	at	ADP
ap-3766	29	11	increasing	increase	VERB
ap-3766	29	12	the	the	DET
ap-3766	29	13	removal	removal	NOUN
ap-3766	29	14	rate	rate	NOUN
ap-3766	29	15	of	of	ADP
ap-3766	29	16	particles	particle	NOUN
ap-3766	29	17	from	from	ADP
ap-3766	29	18	the	the	DET
ap-3766	29	19	surface	surface	NOUN
ap-3766	29	20	of	of	ADP
ap-3766	29	21	target	target	NOUN
ap-3766	29	22	(	(	PUNCT
ap-3766	29	23	or	or	CCONJ
ap-3766	29	24	its	its	PRON
ap-3766	29	25	erosion	erosion	NOUN
ap-3766	29	26	)	)	PUNCT
ap-3766	29	27	during	during	ADP
ap-3766	29	28	mss	mss	PROPN
ap-3766	29	29	operation	operation	NOUN
ap-3766	30	1	[	[	X
ap-3766	30	2	3	3	NUM
ap-3766	30	3	-	-	SYM
ap-3766	30	4	5	5	NUM
ap-3766	30	5	]	]	PUNCT
ap-3766	30	6	is	be	AUX
ap-3766	30	7	promising	promise	VERB
ap-3766	30	8	.	.	PUNCT
ap-3766	31	1	for	for	ADP
ap-3766	31	2	this	this	DET
ap-3766	31	3	purpose	purpose	NOUN
ap-3766	31	4	,	,	PUNCT
ap-3766	31	5	certain	certain	ADJ
ap-3766	31	6	conditions	condition	NOUN
ap-3766	31	7	need	need	VERB
ap-3766	31	8	to	to	PART
ap-3766	31	9	be	be	AUX
ap-3766	31	10	provided	provide	VERB
ap-3766	31	11	,	,	PUNCT
ap-3766	31	12	so	so	SCONJ
ap-3766	31	13	that	that	SCONJ
ap-3766	31	14	the	the	DET
ap-3766	31	15	thermal	thermal	ADJ
ap-3766	31	16	energy	energy	NOUN
ap-3766	31	17	supplied	supply	VERB
ap-3766	31	18	to	to	ADP
ap-3766	31	19	the	the	DET
ap-3766	31	20	target	target	NOUN
ap-3766	31	21	from	from	ADP
ap-3766	31	22	the	the	DET
ap-3766	31	23	plasma	plasma	NOUN
ap-3766	31	24	can	can	AUX
ap-3766	31	25	be	be	AUX
ap-3766	31	26	retained	retain	VERB
ap-3766	31	27	in	in	ADP
ap-3766	31	28	it	it	PRON
ap-3766	31	29	,	,	PUNCT
ap-3766	31	30	and	and	CCONJ
ap-3766	31	31	can	can	AUX
ap-3766	31	32	heat	heat	VERB
ap-3766	31	33	the	the	DET
ap-3766	31	34	target	target	NOUN
ap-3766	31	35	to	to	ADP
ap-3766	31	36	a	a	DET
ap-3766	31	37	high	high	ADJ
ap-3766	31	38	temperature	temperature	NOUN
ap-3766	31	39	.	.	PUNCT
ap-3766	32	1	in	in	ADP
ap-3766	32	2	conventional	conventional	ADJ
ap-3766	32	3	magnetrons	magnetron	NOUN
ap-3766	32	4	,	,	PUNCT
ap-3766	32	5	the	the	DET
ap-3766	32	6	target	target	NOUN
ap-3766	32	7	has	have	VERB
ap-3766	32	8	a	a	DET
ap-3766	32	9	very	very	ADV
ap-3766	32	10	good	good	ADJ
ap-3766	32	11	heat	heat	NOUN
ap-3766	32	12	-	-	PUNCT
ap-3766	32	13	conducting	conduct	VERB
ap-3766	32	14	contact	contact	NOUN
ap-3766	32	15	with	with	ADP
ap-3766	32	16	an	an	DET
ap-3766	32	17	intensely	intensely	ADV
ap-3766	32	18	cooled	cool	VERB
ap-3766	32	19	magnetron	magnetron	NOUN
ap-3766	32	20	body	body	NOUN
ap-3766	32	21	,	,	PUNCT
ap-3766	32	22	into	into	ADP
ap-3766	32	23	which	which	PRON
ap-3766	32	24	magnets	magnet	NOUN
ap-3766	32	25	are	be	AUX
ap-3766	32	26	placed	place	VERB
ap-3766	32	27	.	.	PUNCT
ap-3766	33	1	as	as	ADP
ap-3766	33	2	a	a	DET
ap-3766	33	3	rule	rule	NOUN
ap-3766	33	4	,	,	PUNCT
ap-3766	33	5	its	its	PRON
ap-3766	33	6	temperature	temperature	NOUN
ap-3766	33	7	is	be	AUX
ap-3766	33	8	therefore	therefore	ADV
ap-3766	33	9	low	low	ADJ
ap-3766	33	10	.	.	PUNCT
ap-3766	34	1	if	if	SCONJ
ap-3766	34	2	the	the	DET
ap-3766	34	3	structure	structure	NOUN
ap-3766	34	4	of	of	ADP
ap-3766	34	5	the	the	DET
ap-3766	34	6	magnetron	magnetron	NOUN
ap-3766	34	7	is	be	AUX
ap-3766	34	8	changed	change	VERB
ap-3766	34	9	so	so	SCONJ
ap-3766	34	10	that	that	SCONJ
ap-3766	34	11	the	the	DET
ap-3766	34	12	flow	flow	NOUN
ap-3766	34	13	of	of	ADP
ap-3766	34	14	heat	heat	NOUN
ap-3766	34	15	from	from	ADP
ap-3766	34	16	the	the	DET
ap-3766	34	17	target	target	NOUN
ap-3766	34	18	is	be	AUX
ap-3766	34	19	decreased	decrease	VERB
ap-3766	34	20	,	,	PUNCT
ap-3766	34	21	the	the	DET
ap-3766	34	22	target	target	NOUN
ap-3766	34	23	can	can	AUX
ap-3766	34	24	be	be	AUX
ap-3766	34	25	warmed	warm	VERB
ap-3766	34	26	up	up	ADP
ap-3766	34	27	strongly	strongly	ADV
ap-3766	34	28	.	.	PUNCT
ap-3766	35	1	in	in	ADP
ap-3766	35	2	other	other	ADJ
ap-3766	35	3	words	word	NOUN
ap-3766	35	4	,	,	PUNCT
ap-3766	35	5	it	it	PRON
ap-3766	35	6	will	will	AUX
ap-3766	35	7	become	become	VERB
ap-3766	35	8	possible	possible	ADJ
ap-3766	35	9	for	for	SCONJ
ap-3766	35	10	mss	mss	PROPN
ap-3766	35	11	to	to	PART
ap-3766	35	12	operate	operate	VERB
ap-3766	35	13	with	with	ADP
ap-3766	35	14	a	a	DET
ap-3766	35	15	“	"	PUNCT
ap-3766	35	16	hot	hot	ADJ
ap-3766	35	17	target	target	NOUN
ap-3766	35	18	”	"	PUNCT
ap-3766	35	19	.	.	PUNCT
ap-3766	36	1	moreover	moreover	ADV
ap-3766	36	2	,	,	PUNCT
ap-3766	36	3	for	for	ADP
ap-3766	36	4	some	some	DET
ap-3766	36	5	materials	material	NOUN
ap-3766	36	6	,	,	PUNCT
ap-3766	36	7	significant	significant	ADJ
ap-3766	36	8	evaporation	evaporation	NOUN
ap-3766	36	9	can	can	AUX
ap-3766	36	10	be	be	AUX
ap-3766	36	11	created	create	VERB
ap-3766	36	12	by	by	ADP
ap-3766	36	13	keeping	keep	VERB
ap-3766	36	14	most	most	ADJ
ap-3766	36	15	of	of	ADP
ap-3766	36	16	the	the	DET
ap-3766	36	17	target	target	NOUN
ap-3766	36	18	in	in	ADP
ap-3766	36	19	the	the	DET
ap-3766	36	20	solid	solid	ADJ
ap-3766	36	21	state	state	NOUN
ap-3766	36	22	.	.	PUNCT
ap-3766	37	1	425	425	NUM
ap-3766	37	2	http://dx.doi.org/10.14311/ap.2016.56.0425	http://dx.doi.org/10.14311/ap.2016.56.0425	X
ap-3766	37	3	http://ojs.cvut.cz/ojs/index.php/ap	http://ojs.cvut.cz/ojs/index.php/ap	PROPN
ap-3766	37	4	a.	a.	NOUN
ap-3766	37	5	o.	o.	PROPN
ap-3766	37	6	borduleva	borduleva	PROPN
ap-3766	37	7	,	,	PUNCT
ap-3766	37	8	g.	g.	PROPN
ap-3766	37	9	a.	a.	PROPN
ap-3766	37	10	bleykher	bleykher	PROPN
ap-3766	37	11	,	,	PUNCT
ap-3766	37	12	d.	d.	PROPN
ap-3766	37	13	v.	v.	PROPN
ap-3766	37	14	sidelev	sidelev	PROPN
ap-3766	37	15	,	,	PUNCT
ap-3766	37	16	v.	v.	PROPN
ap-3766	37	17	p.	p.	PROPN
ap-3766	37	18	krivobokov	krivobokov	PROPN
ap-3766	37	19	acta	acta	PROPN
ap-3766	37	20	polytechnica	polytechnica	PROPN
ap-3766	37	21	figure	figure	NOUN
ap-3766	37	22	1	1	NUM
ap-3766	37	23	.	.	PUNCT
ap-3766	37	24	magnetron	magnetron	NOUN
ap-3766	37	25	sputtering	sputtering	ADJ
ap-3766	37	26	scheme	scheme	NOUN
ap-3766	37	27	with	with	ADP
ap-3766	37	28	different	different	ADJ
ap-3766	37	29	types	type	NOUN
ap-3766	37	30	of	of	ADP
ap-3766	37	31	heat	heat	NOUN
ap-3766	37	32	conducting	conduct	VERB
ap-3766	37	33	contact	contact	NOUN
ap-3766	37	34	between	between	ADP
ap-3766	37	35	the	the	DET
ap-3766	37	36	target	target	NOUN
ap-3766	37	37	and	and	CCONJ
ap-3766	37	38	the	the	DET
ap-3766	37	39	cooled	cool	VERB
ap-3766	37	40	magnetron	magnetron	NOUN
ap-3766	37	41	body	body	NOUN
ap-3766	37	42	:	:	PUNCT
ap-3766	37	43	(	(	PUNCT
ap-3766	37	44	a	a	X
ap-3766	37	45	)	)	PUNCT
ap-3766	37	46	total	total	ADJ
ap-3766	37	47	heat	heat	NOUN
ap-3766	37	48	conductivity	conductivity	NOUN
ap-3766	37	49	insulation	insulation	NOUN
ap-3766	37	50	,	,	PUNCT
ap-3766	37	51	when	when	SCONJ
ap-3766	37	52	the	the	DET
ap-3766	37	53	target	target	NOUN
ap-3766	37	54	is	be	AUX
ap-3766	37	55	fixed	fix	VERB
ap-3766	37	56	to	to	ADP
ap-3766	37	57	the	the	DET
ap-3766	37	58	cathode	cathode	NOUN
ap-3766	37	59	by	by	ADP
ap-3766	37	60	thin	thin	ADJ
ap-3766	37	61	insulating	insulate	VERB
ap-3766	37	62	insertions	insertion	NOUN
ap-3766	37	63	,	,	PUNCT
ap-3766	37	64	(	(	PUNCT
ap-3766	37	65	b	b	X
ap-3766	37	66	)	)	PUNCT
ap-3766	37	67	complete	complete	ADJ
ap-3766	37	68	cooling	cooling	NOUN
ap-3766	37	69	,	,	PUNCT
ap-3766	37	70	(	(	PUNCT
ap-3766	37	71	c	c	X
ap-3766	37	72	)	)	PUNCT
ap-3766	37	73	partial	partial	ADJ
ap-3766	37	74	heat	heat	NOUN
ap-3766	37	75	insulation	insulation	NOUN
ap-3766	37	76	,	,	PUNCT
ap-3766	37	77	when	when	SCONJ
ap-3766	37	78	the	the	DET
ap-3766	37	79	magnetron	magnetron	NOUN
ap-3766	37	80	body	body	NOUN
ap-3766	37	81	has	have	VERB
ap-3766	37	82	a	a	DET
ap-3766	37	83	small	small	ADJ
ap-3766	37	84	spacer	spacer	NOUN
ap-3766	37	85	disk	disk	NOUN
ap-3766	37	86	in	in	ADP
ap-3766	37	87	the	the	DET
ap-3766	37	88	center	center	NOUN
ap-3766	37	89	to	to	PART
ap-3766	37	90	which	which	PRON
ap-3766	37	91	the	the	DET
ap-3766	37	92	target	target	NOUN
ap-3766	37	93	is	be	AUX
ap-3766	37	94	fixed	fix	VERB
ap-3766	37	95	.	.	PUNCT
ap-3766	38	1	a	a	DET
ap-3766	38	2	scheme	scheme	NOUN
ap-3766	38	3	of	of	ADP
ap-3766	38	4	magnetron	magnetron	NOUN
ap-3766	38	5	sputtering	sputter	VERB
ap-3766	38	6	with	with	ADP
ap-3766	38	7	different	different	ADJ
ap-3766	38	8	types	type	NOUN
ap-3766	38	9	of	of	ADP
ap-3766	38	10	heat	heat	NOUN
ap-3766	38	11	conductive	conductive	ADJ
ap-3766	38	12	contact	contact	NOUN
ap-3766	38	13	of	of	ADP
ap-3766	38	14	the	the	DET
ap-3766	38	15	target	target	NOUN
ap-3766	38	16	and	and	CCONJ
ap-3766	38	17	the	the	DET
ap-3766	38	18	magnetron	magnetron	NOUN
ap-3766	38	19	body	body	NOUN
ap-3766	38	20	is	be	AUX
ap-3766	38	21	shown	show	VERB
ap-3766	38	22	in	in	ADP
ap-3766	38	23	figure	figure	NOUN
ap-3766	38	24	1	1	NUM
ap-3766	38	25	.	.	PUNCT
ap-3766	38	26	examples	example	NOUN
ap-3766	38	27	of	of	ADP
ap-3766	38	28	magnetron	magnetron	NOUN
ap-3766	38	29	sputtering	sputter	VERB
ap-3766	38	30	with	with	ADP
ap-3766	38	31	the	the	DET
ap-3766	38	32	implementation	implementation	NOUN
ap-3766	38	33	of	of	ADP
ap-3766	38	34	hot	hot	ADJ
ap-3766	38	35	targets	target	NOUN
ap-3766	38	36	for	for	ADP
ap-3766	38	37	increasing	increase	VERB
ap-3766	38	38	the	the	DET
ap-3766	38	39	coating	coat	VERB
ap-3766	38	40	deposition	deposition	NOUN
ap-3766	38	41	rate	rate	NOUN
ap-3766	38	42	have	have	AUX
ap-3766	38	43	been	be	AUX
ap-3766	38	44	published	publish	VERB
ap-3766	38	45	in	in	ADP
ap-3766	38	46	the	the	DET
ap-3766	38	47	scientific	scientific	ADJ
ap-3766	38	48	literature	literature	NOUN
ap-3766	39	1	[	[	X
ap-3766	39	2	6	6	NUM
ap-3766	39	3	-	-	SYM
ap-3766	39	4	8	8	NUM
ap-3766	39	5	]	]	PUNCT
ap-3766	39	6	.	.	PUNCT
ap-3766	40	1	this	this	DET
ap-3766	40	2	effect	effect	NOUN
ap-3766	40	3	occurs	occur	VERB
ap-3766	40	4	not	not	PART
ap-3766	40	5	only	only	ADV
ap-3766	40	6	because	because	SCONJ
ap-3766	40	7	of	of	ADP
ap-3766	40	8	the	the	DET
ap-3766	40	9	increase	increase	NOUN
ap-3766	40	10	in	in	ADP
ap-3766	40	11	the	the	DET
ap-3766	40	12	surface	surface	NOUN
ap-3766	40	13	erosion	erosion	NOUN
ap-3766	40	14	rate	rate	NOUN
ap-3766	40	15	,	,	PUNCT
ap-3766	40	16	but	but	CCONJ
ap-3766	40	17	also	also	ADV
ap-3766	40	18	due	due	ADP
ap-3766	40	19	to	to	ADP
ap-3766	40	20	other	other	ADJ
ap-3766	40	21	processes	process	NOUN
ap-3766	40	22	such	such	ADJ
ap-3766	40	23	as	as	ADP
ap-3766	40	24	discharge	discharge	NOUN
ap-3766	40	25	stabilization	stabilization	NOUN
ap-3766	40	26	in	in	ADP
ap-3766	40	27	the	the	DET
ap-3766	40	28	presence	presence	NOUN
ap-3766	40	29	of	of	ADP
ap-3766	40	30	a	a	DET
ap-3766	40	31	hot	hot	ADJ
ap-3766	40	32	target	target	NOUN
ap-3766	40	33	during	during	ADP
ap-3766	40	34	coating	coat	VERB
ap-3766	40	35	deposition	deposition	NOUN
ap-3766	40	36	when	when	SCONJ
ap-3766	40	37	reactive	reactive	ADJ
ap-3766	40	38	gases	gas	NOUN
ap-3766	40	39	are	be	AUX
ap-3766	40	40	used	use	VERB
ap-3766	40	41	[	[	PUNCT
ap-3766	40	42	8	8	NUM
ap-3766	40	43	]	]	PUNCT
ap-3766	40	44	.	.	PUNCT
ap-3766	41	1	it	it	PRON
ap-3766	41	2	should	should	AUX
ap-3766	41	3	be	be	AUX
ap-3766	41	4	noted	note	VERB
ap-3766	41	5	that	that	SCONJ
ap-3766	41	6	the	the	DET
ap-3766	41	7	role	role	NOUN
ap-3766	41	8	of	of	ADP
ap-3766	41	9	the	the	DET
ap-3766	41	10	high	high	ADJ
ap-3766	41	11	temperature	temperature	NOUN
ap-3766	41	12	of	of	ADP
ap-3766	41	13	the	the	DET
ap-3766	41	14	target	target	NOUN
ap-3766	41	15	and	and	CCONJ
ap-3766	41	16	of	of	ADP
ap-3766	41	17	the	the	DET
ap-3766	41	18	evaporation	evaporation	NOUN
ap-3766	41	19	from	from	ADP
ap-3766	41	20	its	its	PRON
ap-3766	41	21	surface	surface	NOUN
ap-3766	41	22	in	in	ADP
ap-3766	41	23	the	the	DET
ap-3766	41	24	formation	formation	NOUN
ap-3766	41	25	of	of	ADP
ap-3766	41	26	the	the	DET
ap-3766	41	27	coatings	coating	NOUN
ap-3766	41	28	during	during	ADP
ap-3766	41	29	the	the	DET
ap-3766	41	30	operation	operation	NOUN
ap-3766	41	31	of	of	ADP
ap-3766	41	32	different	different	ADJ
ap-3766	41	33	types	type	NOUN
ap-3766	41	34	of	of	ADP
ap-3766	41	35	mss	mss	PROPN
ap-3766	41	36	has	have	AUX
ap-3766	41	37	not	not	PART
ap-3766	41	38	been	be	AUX
ap-3766	41	39	studied	study	VERB
ap-3766	41	40	in	in	ADP
ap-3766	41	41	full	full	ADJ
ap-3766	41	42	.	.	PUNCT
ap-3766	42	1	our	our	PRON
ap-3766	42	2	hypothesis	hypothesis	NOUN
ap-3766	42	3	is	be	AUX
ap-3766	42	4	that	that	SCONJ
ap-3766	42	5	advances	advance	NOUN
ap-3766	42	6	in	in	ADP
ap-3766	42	7	the	the	DET
ap-3766	42	8	solution	solution	NOUN
ap-3766	42	9	of	of	ADP
ap-3766	42	10	this	this	DET
ap-3766	42	11	task	task	NOUN
ap-3766	42	12	will	will	AUX
ap-3766	42	13	contribute	contribute	VERB
ap-3766	42	14	to	to	ADP
ap-3766	42	15	the	the	DET
ap-3766	42	16	further	further	ADJ
ap-3766	42	17	development	development	NOUN
ap-3766	42	18	of	of	ADP
ap-3766	42	19	high	high	ADJ
ap-3766	42	20	-	-	PUNCT
ap-3766	42	21	rate	rate	NOUN
ap-3766	42	22	magnetron	magnetron	NOUN
ap-3766	42	23	coating	coating	NOUN
ap-3766	42	24	deposition	deposition	NOUN
ap-3766	42	25	technologies	technology	NOUN
ap-3766	42	26	,	,	PUNCT
ap-3766	42	27	including	include	VERB
ap-3766	42	28	such	such	ADJ
ap-3766	42	29	promising	promising	ADJ
ap-3766	42	30	areas	area	NOUN
ap-3766	42	31	as	as	ADP
ap-3766	42	32	high	high	ADJ
ap-3766	42	33	power	power	NOUN
ap-3766	42	34	impulse	impulse	ADJ
ap-3766	42	35	magnetron	magnetron	NOUN
ap-3766	42	36	sputtering	sputtering	NOUN
ap-3766	42	37	.	.	PUNCT
ap-3766	43	1	the	the	DET
ap-3766	43	2	purpose	purpose	NOUN
ap-3766	43	3	of	of	ADP
ap-3766	43	4	the	the	DET
ap-3766	43	5	research	research	NOUN
ap-3766	43	6	presented	present	VERB
ap-3766	43	7	in	in	ADP
ap-3766	43	8	this	this	DET
ap-3766	43	9	paper	paper	NOUN
ap-3766	43	10	was	be	AUX
ap-3766	43	11	to	to	PART
ap-3766	43	12	reveal	reveal	VERB
ap-3766	43	13	the	the	DET
ap-3766	43	14	regularities	regularity	NOUN
ap-3766	43	15	of	of	ADP
ap-3766	43	16	heat	heat	NOUN
ap-3766	43	17	and	and	CCONJ
ap-3766	43	18	erosion	erosion	NOUN
ap-3766	43	19	processes	process	NOUN
ap-3766	43	20	in	in	ADP
ap-3766	43	21	a	a	DET
ap-3766	43	22	solid	solid	ADJ
ap-3766	43	23	target	target	NOUN
ap-3766	43	24	with	with	ADP
ap-3766	43	25	partial	partial	ADJ
ap-3766	43	26	or	or	CCONJ
ap-3766	43	27	complete	complete	ADJ
ap-3766	43	28	heat	heat	NOUN
ap-3766	43	29	conductive	conductive	ADJ
ap-3766	43	30	insulation	insulation	NOUN
ap-3766	43	31	in	in	ADP
ap-3766	43	32	dependence	dependence	NOUN
ap-3766	43	33	on	on	ADP
ap-3766	43	34	the	the	DET
ap-3766	43	35	power	power	NOUN
ap-3766	43	36	parameters	parameter	NOUN
ap-3766	43	37	of	of	ADP
ap-3766	43	38	pulse	pulse	NOUN
ap-3766	43	39	magnetron	magnetron	NOUN
ap-3766	43	40	sputtering	sputtering	NOUN
ap-3766	43	41	systems	system	NOUN
ap-3766	43	42	,	,	PUNCT
ap-3766	43	43	and	and	CCONJ
ap-3766	43	44	also	also	ADV
ap-3766	43	45	to	to	PART
ap-3766	43	46	evaluate	evaluate	VERB
ap-3766	43	47	the	the	DET
ap-3766	43	48	contribution	contribution	NOUN
ap-3766	43	49	of	of	ADP
ap-3766	43	50	evaporation	evaporation	NOUN
ap-3766	43	51	to	to	ADP
ap-3766	43	52	an	an	DET
ap-3766	43	53	increase	increase	NOUN
ap-3766	43	54	in	in	ADP
ap-3766	43	55	the	the	DET
ap-3766	43	56	coating	coat	VERB
ap-3766	43	57	deposition	deposition	NOUN
ap-3766	43	58	rate	rate	NOUN
ap-3766	43	59	.	.	PUNCT
ap-3766	44	1	in	in	ADP
ap-3766	44	2	addition	addition	NOUN
ap-3766	44	3	,	,	PUNCT
ap-3766	44	4	a	a	DET
ap-3766	44	5	mathematical	mathematical	ADJ
ap-3766	44	6	simulation	simulation	NOUN
ap-3766	44	7	was	be	AUX
ap-3766	44	8	applied	apply	VERB
ap-3766	44	9	to	to	PART
ap-3766	44	10	solve	solve	VERB
ap-3766	44	11	this	this	DET
ap-3766	44	12	task	task	NOUN
ap-3766	44	13	.	.	PUNCT
ap-3766	45	1	the	the	DET
ap-3766	45	2	adequacy	adequacy	NOUN
ap-3766	45	3	of	of	ADP
ap-3766	45	4	the	the	DET
ap-3766	45	5	model	model	NOUN
ap-3766	45	6	that	that	PRON
ap-3766	45	7	has	have	AUX
ap-3766	45	8	been	be	AUX
ap-3766	45	9	developed	develop	VERB
ap-3766	45	10	was	be	AUX
ap-3766	45	11	tested	test	VERB
ap-3766	45	12	by	by	ADP
ap-3766	45	13	comparing	compare	VERB
ap-3766	45	14	the	the	DET
ap-3766	45	15	calculations	calculation	NOUN
ap-3766	45	16	with	with	ADP
ap-3766	45	17	empirical	empirical	ADJ
ap-3766	45	18	data	datum	NOUN
ap-3766	45	19	.	.	PUNCT
ap-3766	46	1	2	2	X
ap-3766	46	2	.	.	X
ap-3766	46	3	a	a	DET
ap-3766	46	4	theoretical	theoretical	ADJ
ap-3766	46	5	description	description	NOUN
ap-3766	46	6	and	and	CCONJ
ap-3766	46	7	modeling	model	VERB
ap-3766	46	8	representations	representation	NOUN
ap-3766	46	9	surface	surface	NOUN
ap-3766	46	10	sputtering	sputtering	NOUN
ap-3766	46	11	of	of	ADP
ap-3766	46	12	a	a	DET
ap-3766	46	13	magnetron	magnetron	ADJ
ap-3766	46	14	target	target	NOUN
ap-3766	46	15	is	be	AUX
ap-3766	46	16	the	the	DET
ap-3766	46	17	result	result	NOUN
ap-3766	46	18	of	of	ADP
ap-3766	46	19	an	an	DET
ap-3766	46	20	elastic	elastic	ADJ
ap-3766	46	21	interaction	interaction	NOUN
ap-3766	46	22	between	between	ADP
ap-3766	46	23	high	high	ADJ
ap-3766	46	24	-	-	PUNCT
ap-3766	46	25	energy	energy	NOUN
ap-3766	46	26	ions	ion	NOUN
ap-3766	46	27	from	from	ADP
ap-3766	46	28	plasma	plasma	NOUN
ap-3766	46	29	and	and	CCONJ
ap-3766	46	30	atoms	atom	NOUN
ap-3766	46	31	of	of	ADP
ap-3766	46	32	the	the	DET
ap-3766	46	33	target	target	NOUN
ap-3766	46	34	material	material	NOUN
ap-3766	46	35	.	.	PUNCT
ap-3766	47	1	the	the	DET
ap-3766	47	2	sputtering	sputter	VERB
ap-3766	47	3	rate	rate	NOUN
ap-3766	47	4	is	be	AUX
ap-3766	47	5	equal	equal	ADJ
ap-3766	47	6	to	to	ADP
ap-3766	47	7	the	the	DET
ap-3766	47	8	product	product	NOUN
ap-3766	47	9	of	of	ADP
ap-3766	47	10	the	the	DET
ap-3766	47	11	ion	ion	NOUN
ap-3766	47	12	flux	flux	NOUN
ap-3766	47	13	density	density	NOUN
ap-3766	47	14	and	and	CCONJ
ap-3766	47	15	the	the	DET
ap-3766	47	16	sputtering	sputtering	ADJ
ap-3766	47	17	yield	yield	NOUN
ap-3766	47	18	.	.	PUNCT
ap-3766	48	1	during	during	ADP
ap-3766	48	2	mss	mss	PROPN
ap-3766	48	3	operation	operation	NOUN
ap-3766	48	4	,	,	PUNCT
ap-3766	48	5	the	the	DET
ap-3766	48	6	energy	energy	NOUN
ap-3766	48	7	of	of	ADP
ap-3766	48	8	the	the	DET
ap-3766	48	9	ions	ion	NOUN
ap-3766	48	10	bombarding	bombard	VERB
ap-3766	48	11	the	the	DET
ap-3766	48	12	target	target	NOUN
ap-3766	48	13	does	do	AUX
ap-3766	48	14	not	not	PART
ap-3766	48	15	,	,	PUNCT
ap-3766	48	16	as	as	ADP
ap-3766	48	17	a	a	DET
ap-3766	48	18	rule	rule	NOUN
ap-3766	48	19	,	,	PUNCT
ap-3766	48	20	exceed	exceed	VERB
ap-3766	48	21	several	several	ADJ
ap-3766	48	22	kev	kev	NOUN
ap-3766	48	23	.	.	PUNCT
ap-3766	49	1	according	accord	VERB
ap-3766	49	2	to	to	ADP
ap-3766	49	3	peter	peter	PROPN
ap-3766	49	4	sigmund	sigmund	PROPN
ap-3766	49	5	’s	’s	PART
ap-3766	49	6	classification	classification	NOUN
ap-3766	49	7	of	of	ADP
ap-3766	49	8	sputtering	sputtering	ADJ
ap-3766	49	9	modes	mode	NOUN
ap-3766	49	10	[	[	X
ap-3766	49	11	1	1	NUM
ap-3766	49	12	]	]	PUNCT
ap-3766	49	13	,	,	PUNCT
ap-3766	49	14	this	this	PRON
ap-3766	49	15	is	be	AUX
ap-3766	49	16	the	the	DET
ap-3766	49	17	primary	primary	ADJ
ap-3766	49	18	knock	knock	NOUN
ap-3766	49	19	-	-	PUNCT
ap-3766	49	20	out	out	ADP
ap-3766	49	21	mode	mode	NOUN
ap-3766	49	22	.	.	PUNCT
ap-3766	50	1	his	his	PRON
ap-3766	50	2	formula	formula	NOUN
ap-3766	50	3	for	for	ADP
ap-3766	50	4	this	this	DET
ap-3766	50	5	case	case	NOUN
ap-3766	50	6	can	can	AUX
ap-3766	50	7	therefore	therefore	ADV
ap-3766	50	8	be	be	AUX
ap-3766	50	9	used	use	VERB
ap-3766	50	10	to	to	PART
ap-3766	50	11	calculate	calculate	VERB
ap-3766	50	12	the	the	DET
ap-3766	50	13	sputtering	sputter	VERB
ap-3766	50	14	yield	yield	NOUN
ap-3766	50	15	[	[	X
ap-3766	50	16	1	1	NUM
ap-3766	50	17	]	]	PUNCT
ap-3766	50	18	.	.	PUNCT
ap-3766	51	1	the	the	DET
ap-3766	51	2	sputtering	sputtering	ADJ
ap-3766	51	3	rate	rate	NOUN
ap-3766	51	4	vsput	vsput	NOUN
ap-3766	51	5	will	will	AUX
ap-3766	51	6	therefore	therefore	ADV
ap-3766	51	7	be	be	AUX
ap-3766	51	8	expressed	express	VERB
ap-3766	51	9	by	by	ADP
ap-3766	51	10	the	the	DET
ap-3766	51	11	following	follow	VERB
ap-3766	51	12	expression	expression	NOUN
ap-3766	51	13	[	[	X
ap-3766	51	14	4	4	NUM
ap-3766	51	15	]	]	PUNCT
ap-3766	51	16	:	:	PUNCT
ap-3766	51	17	vsput	vsput	NOUN
ap-3766	51	18	=	=	SYM
ap-3766	51	19	3αm1m2wion	3αm1m2wion	NUM
ap-3766	51	20	π2(m1	π2(m1	NUM
ap-3766	51	21	+	+	NOUN
ap-3766	51	22	m2)2n0us	m2)2n0us	PROPN
ap-3766	51	23	,	,	PUNCT
ap-3766	51	24	(	(	PUNCT
ap-3766	51	25	1	1	X
ap-3766	51	26	)	)	PUNCT
ap-3766	51	27	where	where	SCONJ
ap-3766	51	28	m1	m1	PROPN
ap-3766	51	29	and	and	CCONJ
ap-3766	51	30	m2	m2	PROPN
ap-3766	51	31	refer	refer	VERB
ap-3766	51	32	to	to	ADP
ap-3766	51	33	the	the	DET
ap-3766	51	34	atomic	atomic	ADJ
ap-3766	51	35	masses	masse	NOUN
ap-3766	51	36	of	of	ADP
ap-3766	51	37	the	the	DET
ap-3766	51	38	incident	incident	NOUN
ap-3766	51	39	particle	particle	NOUN
ap-3766	51	40	and	and	CCONJ
ap-3766	51	41	the	the	DET
ap-3766	51	42	target	target	NOUN
ap-3766	51	43	material	material	NOUN
ap-3766	51	44	;	;	PUNCT
ap-3766	51	45	α	α	PRON
ap-3766	51	46	is	be	AUX
ap-3766	51	47	a	a	DET
ap-3766	51	48	parameter	parameter	NOUN
ap-3766	51	49	that	that	PRON
ap-3766	51	50	depends	depend	VERB
ap-3766	51	51	on	on	ADP
ap-3766	51	52	the	the	DET
ap-3766	51	53	mass	mass	PROPN
ap-3766	51	54	relation	relation	PROPN
ap-3766	51	55	m2	m2	PROPN
ap-3766	51	56	/	/	SYM
ap-3766	51	57	m1	m1	PROPN
ap-3766	51	58	;	;	PUNCT
ap-3766	51	59	us	we	PRON
ap-3766	51	60	is	be	AUX
ap-3766	51	61	the	the	DET
ap-3766	51	62	target	target	NOUN
ap-3766	51	63	surface	surface	NOUN
ap-3766	51	64	binding	bind	VERB
ap-3766	51	65	energy	energy	NOUN
ap-3766	51	66	;	;	PUNCT
ap-3766	51	67	wion	wion	NOUN
ap-3766	51	68	is	be	AUX
ap-3766	51	69	the	the	DET
ap-3766	51	70	ion	ion	NOUN
ap-3766	51	71	current	current	ADJ
ap-3766	51	72	power	power	NOUN
ap-3766	51	73	density	density	NOUN
ap-3766	51	74	;	;	PUNCT
ap-3766	51	75	and	and	CCONJ
ap-3766	51	76	n0	n0	NUM
ap-3766	51	77	is	be	AUX
ap-3766	51	78	the	the	DET
ap-3766	51	79	nuclear	nuclear	ADJ
ap-3766	51	80	density	density	NOUN
ap-3766	51	81	of	of	ADP
ap-3766	51	82	the	the	DET
ap-3766	51	83	target	target	NOUN
ap-3766	51	84	material	material	NOUN
ap-3766	51	85	.	.	PUNCT
ap-3766	52	1	investigations	investigation	NOUN
ap-3766	52	2	carried	carry	VERB
ap-3766	52	3	out	out	ADP
ap-3766	52	4	by	by	ADP
ap-3766	52	5	various	various	ADJ
ap-3766	52	6	authors	author	NOUN
ap-3766	52	7	have	have	AUX
ap-3766	52	8	shown	show	VERB
ap-3766	52	9	that	that	SCONJ
ap-3766	52	10	the	the	DET
ap-3766	52	11	effect	effect	NOUN
ap-3766	52	12	of	of	ADP
ap-3766	52	13	temperature	temperature	NOUN
ap-3766	52	14	on	on	ADP
ap-3766	52	15	the	the	DET
ap-3766	52	16	sputtering	sputtering	ADJ
ap-3766	52	17	yield	yield	NOUN
ap-3766	52	18	and	and	CCONJ
ap-3766	52	19	rate	rate	NOUN
ap-3766	52	20	is	be	AUX
ap-3766	52	21	negligible	negligible	ADJ
ap-3766	52	22	[	[	X
ap-3766	52	23	9–12	9–12	NOUN
ap-3766	52	24	]	]	PUNCT
ap-3766	52	25	.	.	PUNCT
ap-3766	53	1	it	it	PRON
ap-3766	53	2	was	be	AUX
ap-3766	53	3	therefore	therefore	ADV
ap-3766	53	4	not	not	PART
ap-3766	53	5	taken	take	VERB
ap-3766	53	6	into	into	ADP
ap-3766	53	7	account	account	NOUN
ap-3766	53	8	in	in	ADP
ap-3766	53	9	the	the	DET
ap-3766	53	10	calculations	calculation	NOUN
ap-3766	53	11	.	.	PUNCT
ap-3766	54	1	sublimation	sublimation	NOUN
ap-3766	54	2	and	and	CCONJ
ap-3766	54	3	evaporation	evaporation	NOUN
ap-3766	54	4	have	have	VERB
ap-3766	54	5	a	a	DET
ap-3766	54	6	different	different	ADJ
ap-3766	54	7	nature	nature	NOUN
ap-3766	54	8	from	from	ADP
ap-3766	54	9	sputtering	sputter	VERB
ap-3766	54	10	.	.	PUNCT
ap-3766	55	1	since	since	SCONJ
ap-3766	55	2	sublimation	sublimation	NOUN
ap-3766	55	3	and	and	CCONJ
ap-3766	55	4	evaporation	evaporation	NOUN
ap-3766	55	5	are	be	AUX
ap-3766	55	6	almost	almost	ADV
ap-3766	55	7	identical	identical	ADJ
ap-3766	55	8	,	,	PUNCT
ap-3766	55	9	the	the	DET
ap-3766	55	10	term	term	NOUN
ap-3766	55	11	“	"	PUNCT
ap-3766	55	12	evaporation	evaporation	NOUN
ap-3766	55	13	”	"	PUNCT
ap-3766	55	14	will	will	AUX
ap-3766	55	15	be	be	AUX
ap-3766	55	16	used	use	VERB
ap-3766	55	17	throughout	throughout	ADP
ap-3766	55	18	the	the	DET
ap-3766	55	19	paper	paper	NOUN
ap-3766	55	20	in	in	ADP
ap-3766	55	21	reference	reference	NOUN
ap-3766	55	22	to	to	ADP
ap-3766	55	23	both	both	DET
ap-3766	55	24	processes	process	NOUN
ap-3766	55	25	.	.	PUNCT
ap-3766	56	1	their	their	PRON
ap-3766	56	2	intensity	intensity	NOUN
ap-3766	56	3	is	be	AUX
ap-3766	56	4	determined	determine	VERB
ap-3766	56	5	by	by	ADP
ap-3766	56	6	the	the	DET
ap-3766	56	7	surface	surface	NOUN
ap-3766	56	8	temperature	temperature	NOUN
ap-3766	56	9	of	of	ADP
ap-3766	56	10	the	the	DET
ap-3766	56	11	target	target	NOUN
ap-3766	56	12	.	.	PUNCT
ap-3766	57	1	in	in	ADP
ap-3766	57	2	a	a	DET
ap-3766	57	3	vacuum	vacuum	NOUN
ap-3766	57	4	,	,	PUNCT
ap-3766	57	5	the	the	DET
ap-3766	57	6	evaporation	evaporation	NOUN
ap-3766	57	7	rate	rate	NOUN
ap-3766	57	8	is	be	AUX
ap-3766	57	9	described	describe	VERB
ap-3766	57	10	by	by	ADP
ap-3766	57	11	the	the	DET
ap-3766	57	12	hertz	hertz	NOUN
ap-3766	57	13	-	-	PUNCT
ap-3766	57	14	knudsen	knudsen	NOUN
ap-3766	57	15	equation	equation	NOUN
ap-3766	57	16	[	[	X
ap-3766	57	17	13	13	NUM
ap-3766	57	18	]	]	SYM
ap-3766	57	19	:	:	PUNCT
ap-3766	57	20	vev(t	vev(t	X
ap-3766	57	21	)	)	PUNCT
ap-3766	57	22	=	=	SYM
ap-3766	57	23	1	1	NUM
ap-3766	57	24	n0	n0	NUM
ap-3766	57	25	√	√	PROPN
ap-3766	57	26	2πmkt	2πmkt	NUM
ap-3766	57	27	(	(	PUNCT
ap-3766	57	28	psat(t	psat(t	NUM
ap-3766	57	29	)	)	PUNCT
ap-3766	57	30	−	−	PROPN
ap-3766	57	31	p	p	NOUN
ap-3766	57	32	∗	∗	NOUN
ap-3766	57	33	)	)	PUNCT
ap-3766	57	34	,	,	PUNCT
ap-3766	57	35	(	(	PUNCT
ap-3766	57	36	2	2	X
ap-3766	57	37	)	)	PUNCT
ap-3766	57	38	wherem	wherem	PROPN
ap-3766	57	39	is	be	AUX
ap-3766	57	40	the	the	DET
ap-3766	57	41	mass	mass	NOUN
ap-3766	57	42	of	of	ADP
ap-3766	57	43	an	an	DET
ap-3766	57	44	evaporated	evaporated	ADJ
ap-3766	57	45	atom	atom	NOUN
ap-3766	57	46	(	(	PUNCT
ap-3766	57	47	molecule	molecule	NOUN
ap-3766	57	48	)	)	PUNCT
ap-3766	57	49	,	,	PUNCT
ap-3766	57	50	k	k	PROPN
ap-3766	57	51	is	be	AUX
ap-3766	57	52	the	the	DET
ap-3766	57	53	boltzmann	boltzmann	PROPN
ap-3766	57	54	constant	constant	PROPN
ap-3766	57	55	,	,	PUNCT
ap-3766	57	56	psat(t	psat(t	PROPN
ap-3766	57	57	)	)	PUNCT
ap-3766	57	58	is	be	AUX
ap-3766	57	59	the	the	DET
ap-3766	57	60	saturated	saturate	VERB
ap-3766	57	61	vapor	vapor	NOUN
ap-3766	57	62	pressure	pressure	NOUN
ap-3766	57	63	at	at	ADP
ap-3766	57	64	surface	surface	NOUN
ap-3766	57	65	temperature	temperature	NOUN
ap-3766	57	66	t	t	NOUN
ap-3766	57	67	,	,	PUNCT
ap-3766	57	68	and	and	CCONJ
ap-3766	57	69	p	p	NOUN
ap-3766	57	70	∗	∗	NOUN
ap-3766	57	71	is	be	AUX
ap-3766	57	72	the	the	DET
ap-3766	57	73	hydrostatic	hydrostatic	ADJ
ap-3766	57	74	pressure	pressure	NOUN
ap-3766	57	75	above	above	ADP
ap-3766	57	76	the	the	DET
ap-3766	57	77	evaporation	evaporation	NOUN
ap-3766	57	78	surface	surface	NOUN
ap-3766	57	79	.	.	PUNCT
ap-3766	58	1	the	the	DET
ap-3766	58	2	p	p	PROPN
ap-3766	58	3	∗	∗	NOUN
ap-3766	58	4	value	value	NOUN
ap-3766	58	5	includes	include	VERB
ap-3766	58	6	the	the	DET
ap-3766	58	7	pressure	pressure	NOUN
ap-3766	58	8	of	of	ADP
ap-3766	58	9	the	the	DET
ap-3766	58	10	evaporated	evaporate	VERB
ap-3766	58	11	material	material	NOUN
ap-3766	58	12	above	above	ADP
ap-3766	58	13	the	the	DET
ap-3766	58	14	surface	surface	NOUN
ap-3766	58	15	and	and	CCONJ
ap-3766	58	16	the	the	DET
ap-3766	58	17	working	work	VERB
ap-3766	58	18	gas	gas	NOUN
ap-3766	58	19	pressure	pressure	NOUN
ap-3766	58	20	in	in	ADP
ap-3766	58	21	the	the	DET
ap-3766	58	22	vacuum	vacuum	PROPN
ap-3766	58	23	chamber	chamber	NOUN
ap-3766	58	24	.	.	PUNCT
ap-3766	59	1	thus	thus	ADV
ap-3766	59	2	,	,	PUNCT
ap-3766	59	3	in	in	ADP
ap-3766	59	4	order	order	NOUN
ap-3766	59	5	to	to	PART
ap-3766	59	6	determine	determine	VERB
ap-3766	59	7	the	the	DET
ap-3766	59	8	evaporation	evaporation	NOUN
ap-3766	59	9	rate	rate	NOUN
ap-3766	59	10	on	on	ADP
ap-3766	59	11	the	the	DET
ap-3766	59	12	surface	surface	NOUN
ap-3766	59	13	of	of	ADP
ap-3766	59	14	the	the	DET
ap-3766	59	15	mss	mss	PROPN
ap-3766	59	16	target	target	PROPN
ap-3766	59	17	,	,	PUNCT
ap-3766	59	18	its	its	PRON
ap-3766	59	19	temperature	temperature	NOUN
ap-3766	59	20	needs	need	VERB
ap-3766	59	21	to	to	PART
ap-3766	59	22	be	be	AUX
ap-3766	59	23	calculated	calculate	VERB
ap-3766	59	24	.	.	PUNCT
ap-3766	60	1	the	the	DET
ap-3766	60	2	spatial	spatial	ADJ
ap-3766	60	3	and	and	CCONJ
ap-3766	60	4	temporal	temporal	ADJ
ap-3766	60	5	temperature	temperature	NOUN
ap-3766	60	6	distribution	distribution	NOUN
ap-3766	60	7	depending	depend	VERB
ap-3766	60	8	on	on	ADP
ap-3766	60	9	the	the	DET
ap-3766	60	10	mss	mss	PROPN
ap-3766	60	11	parameters	parameter	NOUN
ap-3766	60	12	is	be	AUX
ap-3766	60	13	also	also	ADV
ap-3766	60	14	of	of	ADP
ap-3766	60	15	interest	interest	NOUN
ap-3766	60	16	,	,	PUNCT
ap-3766	60	17	because	because	SCONJ
ap-3766	60	18	the	the	DET
ap-3766	60	19	heat	heat	NOUN
ap-3766	60	20	radiation	radiation	NOUN
ap-3766	60	21	flux	flux	NOUN
ap-3766	60	22	can	can	AUX
ap-3766	60	23	have	have	VERB
ap-3766	60	24	a	a	DET
ap-3766	60	25	significant	significant	ADJ
ap-3766	60	26	influence	influence	NOUN
ap-3766	60	27	on	on	ADP
ap-3766	60	28	the	the	DET
ap-3766	60	29	properties	property	NOUN
ap-3766	60	30	of	of	ADP
ap-3766	60	31	the	the	DET
ap-3766	60	32	deposited	deposit	VERB
ap-3766	60	33	coating	coating	NOUN
ap-3766	60	34	and	and	CCONJ
ap-3766	60	35	the	the	DET
ap-3766	60	36	treated	treat	VERB
ap-3766	60	37	workpiece	workpiece	NOUN
ap-3766	60	38	.	.	PUNCT
ap-3766	61	1	for	for	ADP
ap-3766	61	2	this	this	DET
ap-3766	61	3	purpose	purpose	NOUN
ap-3766	61	4	,	,	PUNCT
ap-3766	61	5	the	the	DET
ap-3766	61	6	heat	heat	NOUN
ap-3766	61	7	conductivity	conductivity	NOUN
ap-3766	61	8	equation	equation	NOUN
ap-3766	61	9	written	write	VERB
ap-3766	61	10	in	in	ADP
ap-3766	61	11	the	the	DET
ap-3766	61	12	cylindrical	cylindrical	ADJ
ap-3766	61	13	coordinate	coordinate	NOUN
ap-3766	61	14	system	system	NOUN
ap-3766	61	15	with	with	ADP
ap-3766	61	16	az426	az426	PROPN
ap-3766	61	17	vol	vol	NOUN
ap-3766	61	18	.	.	PUNCT
ap-3766	62	1	56	56	NUM
ap-3766	62	2	no	no	NOUN
ap-3766	62	3	.	.	PUNCT
ap-3766	63	1	6/2016	6/2016	NUM
ap-3766	63	2	magnetron	magnetron	NOUN
ap-3766	63	3	sputtering	sputter	VERB
ap-3766	63	4	with	with	ADP
ap-3766	63	5	hot	hot	ADJ
ap-3766	63	6	solid	solid	ADJ
ap-3766	63	7	target	target	NOUN
ap-3766	63	8	imuthal	imuthal	ADJ
ap-3766	63	9	symmetry	symmetry	NOUN
ap-3766	63	10	was	be	AUX
ap-3766	63	11	used	use	VERB
ap-3766	63	12	:	:	PUNCT
ap-3766	63	13	∂e(z	∂e(z	PROPN
ap-3766	63	14	,	,	PUNCT
ap-3766	63	15	r	r	NOUN
ap-3766	63	16	,	,	PUNCT
ap-3766	63	17	t	t	PROPN
ap-3766	63	18	)	)	PUNCT
ap-3766	63	19	∂t	∂t	PROPN
ap-3766	63	20	−	−	PROPN
ap-3766	63	21	v	v	PROPN
ap-3766	63	22	(	(	PUNCT
ap-3766	63	23	t)∂e(z	t)∂e(z	NOUN
ap-3766	63	24	,	,	PUNCT
ap-3766	63	25	r	r	PROPN
ap-3766	63	26	,	,	PUNCT
ap-3766	63	27	t	t	PROPN
ap-3766	63	28	)	)	PUNCT
ap-3766	63	29	∂z	∂z	PROPN
ap-3766	64	1	=	=	SYM
ap-3766	64	2	λ	λ	PROPN
ap-3766	64	3	(	(	PUNCT
ap-3766	64	4	∂2	∂2	PROPN
ap-3766	64	5	t	t	PROPN
ap-3766	64	6	(	(	PUNCT
ap-3766	64	7	z	z	NOUN
ap-3766	64	8	,	,	PUNCT
ap-3766	64	9	r	r	NOUN
ap-3766	64	10	,	,	PUNCT
ap-3766	64	11	t	t	PROPN
ap-3766	64	12	)	)	PUNCT
ap-3766	64	13	∂z2	∂z2	NOUN
ap-3766	65	1	+	+	CCONJ
ap-3766	65	2	1	1	NUM
ap-3766	65	3	r	r	NOUN
ap-3766	65	4	∂t	∂t	PROPN
ap-3766	65	5	(	(	PUNCT
ap-3766	65	6	z	z	NOUN
ap-3766	65	7	,	,	PUNCT
ap-3766	65	8	r	r	NOUN
ap-3766	65	9	,	,	PUNCT
ap-3766	65	10	t	t	PROPN
ap-3766	65	11	)	)	PUNCT
ap-3766	66	1	∂r	∂r	PROPN
ap-3766	67	1	+	+	CCONJ
ap-3766	67	2	∂2	∂2	PROPN
ap-3766	67	3	t	t	NOUN
ap-3766	67	4	(	(	PUNCT
ap-3766	67	5	z	z	NOUN
ap-3766	67	6	,	,	PUNCT
ap-3766	67	7	r	r	NOUN
ap-3766	67	8	,	,	PUNCT
ap-3766	67	9	t	t	PROPN
ap-3766	67	10	)	)	PUNCT
ap-3766	67	11	∂r2	∂r2	PROPN
ap-3766	67	12	)	)	PUNCT
ap-3766	67	13	,	,	PUNCT
ap-3766	67	14	(	(	PUNCT
ap-3766	67	15	3	3	X
ap-3766	67	16	)	)	PUNCT
ap-3766	67	17	where	where	SCONJ
ap-3766	67	18	v	v	NOUN
ap-3766	67	19	(	(	PUNCT
ap-3766	67	20	t	t	NOUN
ap-3766	67	21	)	)	PUNCT
ap-3766	67	22	=	=	SYM
ap-3766	67	23	vsput(t	vsput(t	PROPN
ap-3766	67	24	)	)	PUNCT
ap-3766	67	25	+	+	CCONJ
ap-3766	68	1	vev(t	vev(t	X
ap-3766	68	2	)	)	PUNCT
ap-3766	68	3	is	be	AUX
ap-3766	68	4	the	the	DET
ap-3766	68	5	total	total	ADJ
ap-3766	68	6	rate	rate	NOUN
ap-3766	68	7	of	of	ADP
ap-3766	68	8	removal	removal	NOUN
ap-3766	68	9	of	of	ADP
ap-3766	68	10	particles	particle	NOUN
ap-3766	68	11	from	from	ADP
ap-3766	68	12	the	the	DET
ap-3766	68	13	surface	surface	NOUN
ap-3766	68	14	of	of	ADP
ap-3766	68	15	the	the	DET
ap-3766	68	16	target	target	NOUN
ap-3766	68	17	,	,	PUNCT
ap-3766	68	18	or	or	CCONJ
ap-3766	68	19	the	the	DET
ap-3766	68	20	erosion	erosion	NOUN
ap-3766	68	21	rate	rate	NOUN
ap-3766	68	22	.	.	PUNCT
ap-3766	69	1	the	the	DET
ap-3766	69	2	boundary	boundary	ADJ
ap-3766	69	3	condition	condition	NOUN
ap-3766	69	4	on	on	ADP
ap-3766	69	5	the	the	DET
ap-3766	69	6	treated	treat	VERB
ap-3766	69	7	surface	surface	NOUN
ap-3766	69	8	is	be	AUX
ap-3766	69	9	as	as	SCONJ
ap-3766	69	10	follows	follow	VERB
ap-3766	69	11	:	:	PUNCT
ap-3766	69	12	λ	λ	X
ap-3766	69	13	∂t	∂t	PROPN
ap-3766	69	14	(	(	PUNCT
ap-3766	69	15	z	z	PROPN
ap-3766	69	16	,	,	PUNCT
ap-3766	69	17	r	r	NOUN
ap-3766	69	18	,	,	PUNCT
ap-3766	69	19	t	t	PROPN
ap-3766	69	20	)	)	PUNCT
ap-3766	69	21	∂z	∂z	PROPN
ap-3766	69	22	∣∣∣	∣∣∣	NOUN
ap-3766	69	23	z=0	z=0	PROPN
ap-3766	69	24	=	=	SYM
ap-3766	69	25	−q(r	−q(r	PROPN
ap-3766	69	26	,	,	PUNCT
ap-3766	69	27	t	t	PROPN
ap-3766	69	28	)	)	PUNCT
ap-3766	70	1	+	+	NOUN
ap-3766	70	2	qev(r	qev(r	PROPN
ap-3766	70	3	,	,	PUNCT
ap-3766	70	4	t	t	NOUN
ap-3766	70	5	)	)	PUNCT
ap-3766	70	6	+	+	NOUN
ap-3766	70	7	qrad(r	qrad(r	PROPN
ap-3766	70	8	,	,	PUNCT
ap-3766	70	9	t	t	PROPN
ap-3766	70	10	)	)	PUNCT
ap-3766	71	1	+	+	NOUN
ap-3766	71	2	qsput(r	qsput(r	PROPN
ap-3766	71	3	,	,	PUNCT
ap-3766	71	4	t	t	PROPN
ap-3766	71	5	)	)	PUNCT
ap-3766	71	6	+	+	NOUN
ap-3766	71	7	qref(r	qref(r	NOUN
ap-3766	71	8	,	,	PUNCT
ap-3766	71	9	t	t	PROPN
ap-3766	71	10	)	)	PUNCT
ap-3766	71	11	.	.	PUNCT
ap-3766	72	1	(	(	PUNCT
ap-3766	72	2	4	4	X
ap-3766	72	3	)	)	PUNCT
ap-3766	72	4	the	the	DET
ap-3766	72	5	initial	initial	ADJ
ap-3766	72	6	conditions	condition	NOUN
ap-3766	72	7	are	be	AUX
ap-3766	72	8	:	:	PUNCT
ap-3766	72	9	t	t	X
ap-3766	72	10	(	(	PUNCT
ap-3766	72	11	z	z	NOUN
ap-3766	72	12	,	,	PUNCT
ap-3766	72	13	r	r	NOUN
ap-3766	72	14	)	)	PUNCT
ap-3766	72	15	=	=	SYM
ap-3766	73	1	t0(z	t0(z	PROPN
ap-3766	73	2	,	,	PUNCT
ap-3766	73	3	r	r	NOUN
ap-3766	73	4	)	)	PUNCT
ap-3766	73	5	.	.	PUNCT
ap-3766	74	1	(	(	PUNCT
ap-3766	74	2	5	5	X
ap-3766	74	3	)	)	PUNCT
ap-3766	74	4	the	the	DET
ap-3766	74	5	oz	oz	NOUN
ap-3766	74	6	axis	axis	NOUN
ap-3766	74	7	is	be	AUX
ap-3766	74	8	perpendicular	perpendicular	ADJ
ap-3766	74	9	to	to	ADP
ap-3766	74	10	the	the	DET
ap-3766	74	11	treated	treat	VERB
ap-3766	74	12	surface	surface	NOUN
ap-3766	74	13	,	,	PUNCT
ap-3766	74	14	along	along	ADP
ap-3766	74	15	the	the	DET
ap-3766	74	16	direction	direction	NOUN
ap-3766	74	17	of	of	ADP
ap-3766	74	18	the	the	DET
ap-3766	74	19	falling	fall	VERB
ap-3766	74	20	ion	ion	NOUN
ap-3766	74	21	flux	flux	NOUN
ap-3766	74	22	;	;	PUNCT
ap-3766	74	23	the	the	DET
ap-3766	74	24	or	or	CCONJ
ap-3766	74	25	axis	axis	NOUN
ap-3766	74	26	is	be	AUX
ap-3766	74	27	directed	direct	VERB
ap-3766	74	28	along	along	ADP
ap-3766	74	29	the	the	DET
ap-3766	74	30	surface	surface	NOUN
ap-3766	74	31	(	(	PUNCT
ap-3766	74	32	figure	figure	NOUN
ap-3766	74	33	1	1	NUM
ap-3766	74	34	)	)	PUNCT
ap-3766	74	35	.	.	PUNCT
ap-3766	75	1	e(z	e(z	PROPN
ap-3766	75	2	,	,	PUNCT
ap-3766	75	3	r	r	NOUN
ap-3766	75	4	,	,	PUNCT
ap-3766	75	5	t	t	PROPN
ap-3766	75	6	)	)	PUNCT
ap-3766	75	7	is	be	AUX
ap-3766	75	8	the	the	DET
ap-3766	75	9	function	function	NOUN
ap-3766	75	10	of	of	ADP
ap-3766	75	11	the	the	DET
ap-3766	75	12	thermal	thermal	ADJ
ap-3766	75	13	component	component	NOUN
ap-3766	75	14	of	of	ADP
ap-3766	75	15	the	the	DET
ap-3766	75	16	internal	internal	ADJ
ap-3766	75	17	energy	energy	NOUN
ap-3766	75	18	,	,	PUNCT
ap-3766	75	19	and	and	CCONJ
ap-3766	75	20	t	t	PROPN
ap-3766	75	21	(	(	PUNCT
ap-3766	75	22	z	z	NOUN
ap-3766	75	23	,	,	PUNCT
ap-3766	75	24	r	r	NOUN
ap-3766	75	25	,	,	PUNCT
ap-3766	75	26	t	t	PROPN
ap-3766	75	27	)	)	PUNCT
ap-3766	75	28	is	be	AUX
ap-3766	75	29	the	the	DET
ap-3766	75	30	temperature	temperature	NOUN
ap-3766	75	31	in	in	ADP
ap-3766	75	32	the	the	DET
ap-3766	75	33	“	"	PUNCT
ap-3766	75	34	target	target	NOUN
ap-3766	75	35	in	in	ADP
ap-3766	75	36	the	the	DET
ap-3766	75	37	crucible	crucible	ADJ
ap-3766	75	38	”	"	PUNCT
ap-3766	75	39	system	system	NOUN
ap-3766	75	40	;	;	PUNCT
ap-3766	75	41	λ	λ	X
ap-3766	75	42	is	be	AUX
ap-3766	75	43	the	the	DET
ap-3766	75	44	heat	heat	NOUN
ap-3766	75	45	conductivity	conductivity	NOUN
ap-3766	75	46	coefficient	coefficient	NOUN
ap-3766	75	47	.	.	PUNCT
ap-3766	76	1	in	in	ADP
ap-3766	76	2	(	(	PUNCT
ap-3766	76	3	4	4	NUM
ap-3766	76	4	)	)	PUNCT
ap-3766	76	5	,	,	PUNCT
ap-3766	76	6	q(r	q(r	PROPN
ap-3766	76	7	,	,	PUNCT
ap-3766	76	8	t	t	PROPN
ap-3766	76	9	)	)	PUNCT
ap-3766	76	10	is	be	AUX
ap-3766	76	11	the	the	DET
ap-3766	76	12	power	power	NOUN
ap-3766	76	13	density	density	NOUN
ap-3766	76	14	of	of	ADP
ap-3766	76	15	the	the	DET
ap-3766	76	16	plasma	plasma	NOUN
ap-3766	76	17	acting	act	VERB
ap-3766	76	18	on	on	ADP
ap-3766	76	19	the	the	DET
ap-3766	76	20	surface	surface	NOUN
ap-3766	76	21	of	of	ADP
ap-3766	76	22	the	the	DET
ap-3766	76	23	target	target	NOUN
ap-3766	76	24	.	.	PUNCT
ap-3766	77	1	our	our	PRON
ap-3766	77	2	previous	previous	ADJ
ap-3766	77	3	studies	study	NOUN
ap-3766	77	4	show	show	VERB
ap-3766	77	5	that	that	SCONJ
ap-3766	77	6	this	this	DET
ap-3766	77	7	value	value	NOUN
ap-3766	77	8	is	be	AUX
ap-3766	77	9	almost	almost	ADV
ap-3766	77	10	the	the	DET
ap-3766	77	11	same	same	ADJ
ap-3766	77	12	as	as	ADP
ap-3766	77	13	the	the	DET
ap-3766	77	14	power	power	NOUN
ap-3766	77	15	density	density	NOUN
ap-3766	77	16	of	of	ADP
ap-3766	77	17	the	the	DET
ap-3766	77	18	ion	ion	NOUN
ap-3766	77	19	flux	flux	NOUN
ap-3766	77	20	bombarding	bombard	VERB
ap-3766	77	21	the	the	DET
ap-3766	77	22	surface	surface	NOUN
ap-3766	77	23	of	of	ADP
ap-3766	77	24	the	the	DET
ap-3766	77	25	target	target	NOUN
ap-3766	77	26	,	,	PUNCT
ap-3766	77	27	i.e.	i.e.	X
ap-3766	77	28	wion	wion	NOUN
ap-3766	77	29	[	[	X
ap-3766	77	30	14	14	NUM
ap-3766	77	31	]	]	PUNCT
ap-3766	77	32	.	.	PUNCT
ap-3766	78	1	the	the	DET
ap-3766	78	2	variation	variation	NOUN
ap-3766	78	3	of	of	ADP
ap-3766	78	4	wion	wion	NOUN
ap-3766	78	5	in	in	ADP
ap-3766	78	6	time	time	NOUN
ap-3766	78	7	is	be	AUX
ap-3766	78	8	defined	define	VERB
ap-3766	78	9	by	by	ADP
ap-3766	78	10	the	the	DET
ap-3766	78	11	power	power	NOUN
ap-3766	78	12	oscillogram	oscillogram	PROPN
ap-3766	78	13	of	of	ADP
ap-3766	78	14	the	the	DET
ap-3766	78	15	magnetron	magnetron	ADJ
ap-3766	78	16	energy	energy	NOUN
ap-3766	78	17	supply	supply	NOUN
ap-3766	78	18	.	.	PUNCT
ap-3766	79	1	the	the	DET
ap-3766	79	2	wion	wion	NOUN
ap-3766	79	3	distribution	distribution	NOUN
ap-3766	79	4	along	along	ADP
ap-3766	79	5	the	the	DET
ap-3766	79	6	surface	surface	NOUN
ap-3766	79	7	of	of	ADP
ap-3766	79	8	the	the	DET
ap-3766	79	9	target	target	NOUN
ap-3766	79	10	corresponds	correspond	VERB
ap-3766	79	11	to	to	ADP
ap-3766	79	12	the	the	DET
ap-3766	79	13	spatial	spatial	ADJ
ap-3766	79	14	distribution	distribution	NOUN
ap-3766	79	15	of	of	ADP
ap-3766	79	16	the	the	DET
ap-3766	79	17	direct	direct	ADJ
ap-3766	79	18	-	-	PUNCT
ap-3766	79	19	axis	axis	NOUN
ap-3766	79	20	component	component	NOUN
ap-3766	79	21	of	of	ADP
ap-3766	79	22	the	the	DET
ap-3766	79	23	magnetic	magnetic	ADJ
ap-3766	79	24	induction	induction	NOUN
ap-3766	79	25	vector	vector	NOUN
ap-3766	79	26	near	near	ADP
ap-3766	79	27	it	it	PRON
ap-3766	79	28	(	(	PUNCT
ap-3766	79	29	br(r	br(r	NOUN
ap-3766	79	30	)	)	PUNCT
ap-3766	79	31	)	)	PUNCT
ap-3766	79	32	.	.	PUNCT
ap-3766	80	1	br(r	br(r	PUNCT
ap-3766	80	2	)	)	PUNCT
ap-3766	80	3	does	do	AUX
ap-3766	80	4	not	not	PART
ap-3766	80	5	usually	usually	ADV
ap-3766	80	6	change	change	VERB
ap-3766	80	7	over	over	ADP
ap-3766	80	8	time	time	NOUN
ap-3766	80	9	,	,	PUNCT
ap-3766	80	10	so	so	CCONJ
ap-3766	80	11	the	the	DET
ap-3766	80	12	wion(r	wion(r	NOUN
ap-3766	80	13	,	,	PUNCT
ap-3766	80	14	t	t	PROPN
ap-3766	80	15	)	)	PUNCT
ap-3766	80	16	function	function	NOUN
ap-3766	80	17	can	can	AUX
ap-3766	80	18	be	be	AUX
ap-3766	80	19	represented	represent	VERB
ap-3766	80	20	as	as	SCONJ
ap-3766	80	21	follows	follow	VERB
ap-3766	80	22	:	:	PUNCT
ap-3766	81	1	wion(r	wion(r	NOUN
ap-3766	81	2	,	,	PUNCT
ap-3766	81	3	t	t	PROPN
ap-3766	81	4	)	)	PUNCT
ap-3766	81	5	=	=	SYM
ap-3766	82	1	pion(t)br(r	pion(t)br(r	NOUN
ap-3766	82	2	)	)	PUNCT
ap-3766	82	3	2π	2π	PROPN
ap-3766	82	4	∫	∫	NOUN
ap-3766	83	1	r	r	NOUN
ap-3766	83	2	0	0	NUM
ap-3766	83	3	rbr(r)dr	rbr(r)dr	NUM
ap-3766	83	4	,	,	PUNCT
ap-3766	83	5	(	(	PUNCT
ap-3766	83	6	6	6	NUM
ap-3766	83	7	)	)	PUNCT
ap-3766	83	8	where	where	SCONJ
ap-3766	83	9	pion(t	pion(t	NOUN
ap-3766	83	10	)	)	PUNCT
ap-3766	83	11	is	be	AUX
ap-3766	83	12	the	the	DET
ap-3766	83	13	total	total	ADJ
ap-3766	83	14	power	power	NOUN
ap-3766	83	15	of	of	ADP
ap-3766	83	16	the	the	DET
ap-3766	83	17	ion	ion	NOUN
ap-3766	83	18	current	current	NOUN
ap-3766	83	19	of	of	ADP
ap-3766	83	20	the	the	DET
ap-3766	83	21	magnetron	magnetron	NOUN
ap-3766	83	22	discharge	discharge	NOUN
ap-3766	83	23	,	,	PUNCT
ap-3766	84	1	which	which	PRON
ap-3766	84	2	in	in	ADP
ap-3766	84	3	general	general	ADJ
ap-3766	84	4	changes	change	NOUN
ap-3766	84	5	over	over	ADP
ap-3766	84	6	time	time	NOUN
ap-3766	84	7	,	,	PUNCT
ap-3766	84	8	and	and	CCONJ
ap-3766	84	9	r	r	NOUN
ap-3766	84	10	is	be	AUX
ap-3766	84	11	the	the	DET
ap-3766	84	12	radius	radius	NOUN
ap-3766	84	13	of	of	ADP
ap-3766	84	14	the	the	DET
ap-3766	84	15	target	target	NOUN
ap-3766	84	16	.	.	PUNCT
ap-3766	85	1	ion	ion	NOUN
ap-3766	85	2	energy	energy	NOUN
ap-3766	85	3	is	be	AUX
ap-3766	85	4	spent	spend	VERB
ap-3766	85	5	on	on	ADP
ap-3766	85	6	target	target	NOUN
ap-3766	85	7	sputtering	sputtering	NOUN
ap-3766	85	8	,	,	PUNCT
ap-3766	85	9	heating	heating	NOUN
ap-3766	85	10	,	,	PUNCT
ap-3766	85	11	melting	melting	NOUN
ap-3766	85	12	and	and	CCONJ
ap-3766	85	13	evaporation	evaporation	NOUN
ap-3766	85	14	.	.	PUNCT
ap-3766	86	1	some	some	DET
ap-3766	86	2	proportion	proportion	NOUN
ap-3766	86	3	of	of	ADP
ap-3766	86	4	the	the	DET
ap-3766	86	5	high	high	ADJ
ap-3766	86	6	energy	energy	NOUN
ap-3766	86	7	particles	particle	NOUN
ap-3766	86	8	and	and	CCONJ
ap-3766	86	9	,	,	PUNCT
ap-3766	86	10	consequently	consequently	ADV
ap-3766	86	11	,	,	PUNCT
ap-3766	86	12	their	their	PRON
ap-3766	86	13	energy	energy	NOUN
ap-3766	86	14	,	,	PUNCT
ap-3766	86	15	is	be	AUX
ap-3766	86	16	reflected	reflect	VERB
ap-3766	86	17	from	from	ADP
ap-3766	86	18	the	the	DET
ap-3766	86	19	irradiated	irradiated	ADJ
ap-3766	86	20	surface	surface	NOUN
ap-3766	86	21	.	.	PUNCT
ap-3766	87	1	the	the	DET
ap-3766	87	2	heat	heat	NOUN
ap-3766	87	3	radiation	radiation	NOUN
ap-3766	87	4	from	from	ADP
ap-3766	87	5	strongly	strongly	ADV
ap-3766	87	6	heated	heat	VERB
ap-3766	87	7	target	target	NOUN
ap-3766	87	8	surfaces	surface	NOUN
ap-3766	87	9	should	should	AUX
ap-3766	87	10	also	also	ADV
ap-3766	87	11	be	be	AUX
ap-3766	87	12	taken	take	VERB
ap-3766	87	13	into	into	ADP
ap-3766	87	14	account	account	NOUN
ap-3766	87	15	.	.	PUNCT
ap-3766	88	1	the	the	DET
ap-3766	88	2	following	follow	VERB
ap-3766	88	3	energy	energy	NOUN
ap-3766	88	4	losses	loss	NOUN
ap-3766	88	5	from	from	ADP
ap-3766	88	6	the	the	DET
ap-3766	88	7	treated	treat	VERB
ap-3766	88	8	target	target	NOUN
ap-3766	88	9	surface	surface	NOUN
ap-3766	88	10	are	be	AUX
ap-3766	88	11	therefore	therefore	ADV
ap-3766	88	12	presented	present	VERB
ap-3766	88	13	in	in	ADP
ap-3766	88	14	(	(	PUNCT
ap-3766	88	15	4	4	NUM
ap-3766	88	16	):	):	PUNCT
ap-3766	88	17	qev	qev	NOUN
ap-3766	88	18	stands	stand	VERB
ap-3766	88	19	for	for	ADP
ap-3766	88	20	evaporation	evaporation	NOUN
ap-3766	88	21	,	,	PUNCT
ap-3766	88	22	qrad	qrad	PROPN
ap-3766	88	23	is	be	AUX
ap-3766	88	24	heat	heat	NOUN
ap-3766	88	25	radiation	radiation	NOUN
ap-3766	88	26	,	,	PUNCT
ap-3766	88	27	qs	qs	PROPN
ap-3766	88	28	is	be	AUX
ap-3766	88	29	sputtering	sputter	VERB
ap-3766	88	30	,	,	PUNCT
ap-3766	88	31	and	and	CCONJ
ap-3766	88	32	qref	qref	NOUN
ap-3766	88	33	is	be	AUX
ap-3766	88	34	the	the	DET
ap-3766	88	35	energy	energy	NOUN
ap-3766	88	36	of	of	ADP
ap-3766	88	37	the	the	DET
ap-3766	88	38	reflected	reflect	VERB
ap-3766	88	39	particles	particle	NOUN
ap-3766	88	40	.	.	PUNCT
ap-3766	89	1	on	on	ADP
ap-3766	89	2	the	the	DET
ap-3766	89	3	lateral	lateral	ADJ
ap-3766	89	4	surfaces	surface	NOUN
ap-3766	89	5	of	of	ADP
ap-3766	89	6	the	the	DET
ap-3766	89	7	target	target	NOUN
ap-3766	89	8	,	,	PUNCT
ap-3766	89	9	the	the	DET
ap-3766	89	10	heat	heat	NOUN
ap-3766	89	11	is	be	AUX
ap-3766	89	12	passed	pass	VERB
ap-3766	89	13	into	into	ADP
ap-3766	89	14	the	the	DET
ap-3766	89	15	environment	environment	NOUN
ap-3766	89	16	due	due	ADP
ap-3766	89	17	to	to	ADP
ap-3766	89	18	heat	heat	VERB
ap-3766	89	19	radiation	radiation	NOUN
ap-3766	89	20	.	.	PUNCT
ap-3766	90	1	particular	particular	ADJ
ap-3766	90	2	attention	attention	NOUN
ap-3766	90	3	should	should	AUX
ap-3766	90	4	be	be	AUX
ap-3766	90	5	paid	pay	VERB
ap-3766	90	6	to	to	ADP
ap-3766	90	7	the	the	DET
ap-3766	90	8	boundary	boundary	ADJ
ap-3766	90	9	condition	condition	NOUN
ap-3766	90	10	on	on	ADP
ap-3766	90	11	the	the	DET
ap-3766	90	12	back	back	ADJ
ap-3766	90	13	surface	surface	NOUN
ap-3766	90	14	of	of	ADP
ap-3766	90	15	the	the	DET
ap-3766	90	16	target	target	NOUN
ap-3766	90	17	,	,	PUNCT
ap-3766	90	18	which	which	PRON
ap-3766	90	19	contacts	contact	VERB
ap-3766	90	20	the	the	DET
ap-3766	90	21	cooled	cool	VERB
ap-3766	90	22	magnetron	magnetron	NOUN
ap-3766	90	23	body	body	NOUN
ap-3766	90	24	.	.	PUNCT
ap-3766	91	1	there	there	PRON
ap-3766	91	2	are	be	VERB
ap-3766	91	3	two	two	NUM
ap-3766	91	4	cases	case	NOUN
ap-3766	91	5	of	of	ADP
ap-3766	91	6	heat	heat	NOUN
ap-3766	91	7	exchange	exchange	NOUN
ap-3766	91	8	with	with	ADP
ap-3766	91	9	the	the	DET
ap-3766	91	10	environment	environment	NOUN
ap-3766	91	11	.	.	PUNCT
ap-3766	92	1	in	in	ADP
ap-3766	92	2	the	the	DET
ap-3766	92	3	case	case	NOUN
ap-3766	92	4	when	when	SCONJ
ap-3766	92	5	there	there	PRON
ap-3766	92	6	is	be	VERB
ap-3766	92	7	no	no	DET
ap-3766	92	8	direct	direct	ADJ
ap-3766	92	9	contact	contact	NOUN
ap-3766	92	10	of	of	ADP
ap-3766	92	11	the	the	DET
ap-3766	92	12	back	back	ADJ
ap-3766	92	13	surface	surface	NOUN
ap-3766	92	14	of	of	ADP
ap-3766	92	15	the	the	DET
ap-3766	92	16	target	target	NOUN
ap-3766	92	17	with	with	ADP
ap-3766	92	18	the	the	DET
ap-3766	92	19	cooled	cool	VERB
ap-3766	92	20	magnetron	magnetron	NOUN
ap-3766	92	21	body	body	NOUN
ap-3766	92	22	,	,	PUNCT
ap-3766	92	23	the	the	DET
ap-3766	92	24	energy	energy	NOUN
ap-3766	92	25	loss	loss	NOUN
ap-3766	92	26	due	due	ADP
ap-3766	92	27	to	to	ADP
ap-3766	92	28	heat	heat	NOUN
ap-3766	92	29	radiation	radiation	NOUN
ap-3766	92	30	is	be	AUX
ap-3766	92	31	specified	specify	VERB
ap-3766	92	32	.	.	PUNCT
ap-3766	93	1	in	in	ADP
ap-3766	93	2	the	the	DET
ap-3766	93	3	contact	contact	NOUN
ap-3766	93	4	area	area	NOUN
ap-3766	93	5	,	,	PUNCT
ap-3766	93	6	the	the	DET
ap-3766	93	7	condition	condition	NOUN
ap-3766	93	8	of	of	ADP
ap-3766	93	9	heat	heat	NOUN
ap-3766	93	10	conduction	conduction	NOUN
ap-3766	93	11	flux	flux	NOUN
ap-3766	93	12	continuity	continuity	NOUN
ap-3766	93	13	is	be	AUX
ap-3766	93	14	accepted	accept	VERB
ap-3766	93	15	.	.	PUNCT
ap-3766	94	1	solving	solve	VERB
ap-3766	94	2	this	this	DET
ap-3766	94	3	task	task	NOUN
ap-3766	94	4	enables	enable	VERB
ap-3766	94	5	a	a	DET
ap-3766	94	6	calculation	calculation	NOUN
ap-3766	94	7	to	to	PART
ap-3766	94	8	be	be	AUX
ap-3766	94	9	made	make	VERB
ap-3766	94	10	of	of	ADP
ap-3766	94	11	the	the	DET
ap-3766	94	12	temperature	temperature	NOUN
ap-3766	94	13	of	of	ADP
ap-3766	94	14	the	the	DET
ap-3766	94	15	target	target	NOUN
ap-3766	94	16	and	and	CCONJ
ap-3766	94	17	of	of	ADP
ap-3766	94	18	the	the	DET
ap-3766	94	19	atom	atom	NOUN
ap-3766	94	20	removal	removal	NOUN
ap-3766	94	21	rate	rate	NOUN
ap-3766	94	22	from	from	ADP
ap-3766	94	23	any	any	DET
ap-3766	94	24	element	element	NOUN
ap-3766	94	25	on	on	ADP
ap-3766	94	26	its	its	PRON
ap-3766	94	27	surface	surface	NOUN
ap-3766	94	28	at	at	ADP
ap-3766	94	29	any	any	DET
ap-3766	94	30	given	give	VERB
ap-3766	94	31	time	time	NOUN
ap-3766	94	32	,	,	PUNCT
ap-3766	94	33	using	use	VERB
ap-3766	94	34	dc	dc	PROPN
ap-3766	94	35	and	and	CCONJ
ap-3766	94	36	repetitively	repetitively	ADV
ap-3766	94	37	-	-	PUNCT
ap-3766	94	38	pulsed	pulse	VERB
ap-3766	94	39	mss	mss	PROPN
ap-3766	94	40	power	power	NOUN
ap-3766	94	41	supplies	supply	NOUN
ap-3766	94	42	.	.	PUNCT
ap-3766	95	1	3	3	X
ap-3766	95	2	.	.	NOUN
ap-3766	95	3	results	result	NOUN
ap-3766	95	4	and	and	CCONJ
ap-3766	95	5	discussion	discussion	NOUN
ap-3766	95	6	the	the	DET
ap-3766	95	7	calculations	calculation	NOUN
ap-3766	95	8	were	be	AUX
ap-3766	95	9	carried	carry	VERB
ap-3766	95	10	out	out	ADP
ap-3766	95	11	for	for	ADP
ap-3766	95	12	planar	planar	ADJ
ap-3766	95	13	magnetrons	magnetron	NOUN
ap-3766	95	14	,	,	PUNCT
ap-3766	95	15	which	which	PRON
ap-3766	95	16	operate	operate	VERB
ap-3766	95	17	in	in	ADP
ap-3766	95	18	repetitively	repetitively	ADV
ap-3766	95	19	-	-	PUNCT
ap-3766	95	20	pulsed	pulse	VERB
ap-3766	95	21	power	power	NOUN
ap-3766	95	22	mode	mode	NOUN
ap-3766	95	23	with	with	ADP
ap-3766	95	24	a	a	DET
ap-3766	95	25	pulse	pulse	NOUN
ap-3766	95	26	repetition	repetition	NOUN
ap-3766	95	27	frequency	frequency	NOUN
ap-3766	95	28	of	of	ADP
ap-3766	95	29	1	1	NUM
ap-3766	95	30	khz	khz	NOUN
ap-3766	95	31	.	.	PUNCT
ap-3766	96	1	the	the	DET
ap-3766	96	2	average	average	ADJ
ap-3766	96	3	power	power	NOUN
ap-3766	96	4	in	in	ADP
ap-3766	96	5	a	a	DET
ap-3766	96	6	pulse	pulse	NOUN
ap-3766	96	7	was	be	AUX
ap-3766	96	8	from	from	ADP
ap-3766	96	9	102	102	NUM
ap-3766	96	10	to	to	PART
ap-3766	96	11	104	104	NUM
ap-3766	96	12	w	w	NOUN
ap-3766	96	13	,	,	PUNCT
ap-3766	96	14	which	which	PRON
ap-3766	96	15	corresponds	correspond	VERB
ap-3766	96	16	to	to	ADP
ap-3766	96	17	power	power	NOUN
ap-3766	96	18	density	density	NOUN
ap-3766	96	19	transferred	transfer	VERB
ap-3766	96	20	to	to	ADP
ap-3766	96	21	the	the	DET
ap-3766	96	22	target	target	NOUN
ap-3766	96	23	from	from	ADP
ap-3766	96	24	10	10	NUM
ap-3766	96	25	to	to	PART
ap-3766	96	26	103	103	NUM
ap-3766	96	27	w	w	NOUN
ap-3766	96	28	/	/	SYM
ap-3766	96	29	cm2	cm2	NOUN
ap-3766	96	30	.	.	PUNCT
ap-3766	97	1	the	the	DET
ap-3766	97	2	working	work	VERB
ap-3766	97	3	gas	gas	NOUN
ap-3766	97	4	was	be	AUX
ap-3766	97	5	argon	argon	VERB
ap-3766	97	6	.	.	PUNCT
ap-3766	98	1	the	the	DET
ap-3766	98	2	dependence	dependence	NOUN
ap-3766	98	3	of	of	ADP
ap-3766	98	4	the	the	DET
ap-3766	98	5	ion	ion	NOUN
ap-3766	98	6	current	current	ADJ
ap-3766	98	7	power	power	NOUN
ap-3766	98	8	on	on	ADP
ap-3766	98	9	time	time	NOUN
ap-3766	98	10	wion(t	wion(t	NOUN
ap-3766	98	11	)	)	PUNCT
ap-3766	98	12	repeats	repeat	VERB
ap-3766	98	13	the	the	DET
ap-3766	98	14	change	change	NOUN
ap-3766	98	15	in	in	ADP
ap-3766	98	16	discharge	discharge	NOUN
ap-3766	98	17	power	power	NOUN
ap-3766	98	18	q(t	q(t	PROPN
ap-3766	98	19	)	)	PUNCT
ap-3766	98	20	=	=	SYM
ap-3766	98	21	u(t)i(t	u(t)i(t	NOUN
ap-3766	98	22	)	)	PUNCT
ap-3766	98	23	,	,	PUNCT
ap-3766	98	24	where	where	SCONJ
ap-3766	98	25	u	u	PRON
ap-3766	98	26	refers	refer	VERB
ap-3766	98	27	to	to	ADP
ap-3766	98	28	the	the	DET
ap-3766	98	29	voltage	voltage	NOUN
ap-3766	98	30	and	and	CCONJ
ap-3766	98	31	i	i	PRON
ap-3766	98	32	and	and	CCONJ
ap-3766	98	33	refers	refer	VERB
ap-3766	98	34	to	to	ADP
ap-3766	98	35	the	the	DET
ap-3766	98	36	current	current	NOUN
ap-3766	98	37	of	of	ADP
ap-3766	98	38	the	the	DET
ap-3766	98	39	discharge	discharge	NOUN
ap-3766	98	40	.	.	PUNCT
ap-3766	99	1	their	their	PRON
ap-3766	99	2	change	change	NOUN
ap-3766	99	3	during	during	ADP
ap-3766	99	4	a	a	DET
ap-3766	99	5	pulse	pulse	NOUN
ap-3766	99	6	of	of	ADP
ap-3766	99	7	duration	duration	NOUN
ap-3766	99	8	τ	τ	PROPN
ap-3766	99	9	is	be	AUX
ap-3766	99	10	determined	determine	VERB
ap-3766	99	11	by	by	ADP
ap-3766	99	12	the	the	DET
ap-3766	99	13	type	type	NOUN
ap-3766	99	14	of	of	ADP
ap-3766	99	15	power	power	NOUN
ap-3766	99	16	supply	supply	NOUN
ap-3766	99	17	.	.	PUNCT
ap-3766	100	1	for	for	ADP
ap-3766	100	2	a	a	DET
ap-3766	100	3	repetitively	repetitively	ADV
ap-3766	100	4	-	-	PUNCT
ap-3766	100	5	pulsed	pulse	VERB
ap-3766	100	6	impact	impact	NOUN
ap-3766	100	7	,	,	PUNCT
ap-3766	100	8	the	the	DET
ap-3766	100	9	average	average	ADJ
ap-3766	100	10	values	value	NOUN
ap-3766	100	11	of	of	ADP
ap-3766	100	12	these	these	DET
ap-3766	100	13	quantities	quantity	NOUN
ap-3766	100	14	should	should	AUX
ap-3766	100	15	be	be	AUX
ap-3766	100	16	taken	take	VERB
ap-3766	100	17	into	into	ADP
ap-3766	100	18	account	account	NOUN
ap-3766	100	19	.	.	PUNCT
ap-3766	101	1	in	in	ADP
ap-3766	101	2	this	this	DET
ap-3766	101	3	work	work	NOUN
ap-3766	101	4	,	,	PUNCT
ap-3766	101	5	two	two	NUM
ap-3766	101	6	types	type	NOUN
ap-3766	101	7	of	of	ADP
ap-3766	101	8	power	power	NOUN
ap-3766	101	9	and	and	CCONJ
ap-3766	101	10	ion	ion	NOUN
ap-3766	101	11	current	current	ADJ
ap-3766	101	12	power	power	NOUN
ap-3766	101	13	density	density	NOUN
ap-3766	101	14	averaging	averaging	NOUN
ap-3766	101	15	were	be	AUX
ap-3766	101	16	used	use	VERB
ap-3766	101	17	:	:	PUNCT
ap-3766	101	18	averaging	average	VERB
ap-3766	101	19	over	over	ADP
ap-3766	101	20	pulse	pulse	NOUN
ap-3766	101	21	wimp	wimp	NOUN
ap-3766	101	22	=	=	PROPN
ap-3766	101	23	∫	∫	PROPN
ap-3766	101	24	τ	τ	PROPN
ap-3766	101	25	0	0	NUM
ap-3766	101	26	wiondt	wiondt	PROPN
ap-3766	101	27	and	and	CCONJ
ap-3766	101	28	averaging	average	VERB
ap-3766	101	29	over	over	ADP
ap-3766	101	30	period	period	NOUN
ap-3766	101	31	wper	wper	NOUN
ap-3766	102	1	=	=	NOUN
ap-3766	102	2	τνwimp	τνwimp	NOUN
ap-3766	102	3	=	=	PUNCT
ap-3766	102	4	δwimp	δwimp	NOUN
ap-3766	102	5	,	,	PUNCT
ap-3766	102	6	where	where	SCONJ
ap-3766	102	7	δ	δ	PROPN
ap-3766	102	8	is	be	AUX
ap-3766	102	9	the	the	DET
ap-3766	102	10	duty	duty	NOUN
ap-3766	102	11	cycle	cycle	NOUN
ap-3766	102	12	,	,	PUNCT
ap-3766	102	13	and	and	CCONJ
ap-3766	102	14	ν	ν	NOUN
ap-3766	102	15	is	be	AUX
ap-3766	102	16	the	the	DET
ap-3766	102	17	pulse	pulse	NOUN
ap-3766	102	18	repetition	repetition	NOUN
ap-3766	102	19	frequency	frequency	NOUN
ap-3766	102	20	.	.	PUNCT
ap-3766	103	1	considering	consider	VERB
ap-3766	103	2	the	the	DET
ap-3766	103	3	effect	effect	NOUN
ap-3766	103	4	of	of	ADP
ap-3766	103	5	temperature	temperature	NOUN
ap-3766	103	6	on	on	ADP
ap-3766	103	7	the	the	DET
ap-3766	103	8	intensity	intensity	NOUN
ap-3766	103	9	of	of	ADP
ap-3766	103	10	the	the	DET
ap-3766	103	11	mss	mss	PROPN
ap-3766	103	12	target	target	PROPN
ap-3766	103	13	surface	surface	NOUN
ap-3766	103	14	erosion	erosion	NOUN
ap-3766	103	15	,	,	PUNCT
ap-3766	103	16	the	the	DET
ap-3766	103	17	question	question	NOUN
ap-3766	103	18	arises	arise	VERB
ap-3766	103	19	of	of	ADP
ap-3766	103	20	the	the	DET
ap-3766	103	21	evolution	evolution	NOUN
ap-3766	103	22	of	of	ADP
ap-3766	103	23	the	the	DET
ap-3766	103	24	heating	heating	NOUN
ap-3766	103	25	up	up	ADP
ap-3766	103	26	and	and	CCONJ
ap-3766	103	27	the	the	DET
ap-3766	103	28	impact	impact	NOUN
ap-3766	103	29	of	of	ADP
ap-3766	103	30	the	the	DET
ap-3766	103	31	power	power	NOUN
ap-3766	103	32	supply	supply	NOUN
ap-3766	103	33	on	on	ADP
ap-3766	103	34	this	this	DET
ap-3766	103	35	process	process	NOUN
ap-3766	103	36	.	.	PUNCT
ap-3766	104	1	our	our	PRON
ap-3766	104	2	calculations	calculation	NOUN
ap-3766	104	3	have	have	AUX
ap-3766	104	4	shown	show	VERB
ap-3766	104	5	that	that	SCONJ
ap-3766	104	6	in	in	ADP
ap-3766	104	7	repetitivelypulsed	repetitivelypulsed	ADJ
ap-3766	104	8	mode	mode	NOUN
ap-3766	104	9	with	with	ADP
ap-3766	104	10	period	period	NOUN
ap-3766	104	11	averaged	average	VERB
ap-3766	104	12	power	power	NOUN
ap-3766	104	13	density	density	PROPN
ap-3766	104	14	wper	wper	PROPN
ap-3766	104	15	≤	≤	PROPN
ap-3766	104	16	103	103	NUM
ap-3766	104	17	w	w	PROPN
ap-3766	104	18	/	/	SYM
ap-3766	104	19	cm2	cm2	NOUN
ap-3766	104	20	,	,	PUNCT
ap-3766	104	21	even	even	ADV
ap-3766	104	22	in	in	ADP
ap-3766	104	23	the	the	DET
ap-3766	104	24	case	case	NOUN
ap-3766	104	25	of	of	ADP
ap-3766	104	26	complete	complete	ADJ
ap-3766	104	27	heat	heat	NOUN
ap-3766	104	28	target	target	NOUN
ap-3766	104	29	insulation	insulation	NOUN
ap-3766	104	30	,	,	PUNCT
ap-3766	104	31	the	the	DET
ap-3766	104	32	heating	heating	NOUN
ap-3766	104	33	takes	take	VERB
ap-3766	104	34	place	place	NOUN
ap-3766	104	35	gradually	gradually	ADV
ap-3766	104	36	while	while	SCONJ
ap-3766	104	37	the	the	DET
ap-3766	104	38	heat	heat	NOUN
ap-3766	104	39	energy	energy	NOUN
ap-3766	104	40	is	be	AUX
ap-3766	104	41	accumulating	accumulate	VERB
ap-3766	104	42	from	from	ADP
ap-3766	104	43	the	the	DET
ap-3766	104	44	plasma	plasma	NOUN
ap-3766	104	45	.	.	PUNCT
ap-3766	105	1	at	at	ADP
ap-3766	105	2	first	first	ADV
ap-3766	105	3	,	,	PUNCT
ap-3766	105	4	the	the	DET
ap-3766	105	5	temperature	temperature	NOUN
ap-3766	105	6	increases	increase	VERB
ap-3766	105	7	rapidly	rapidly	ADV
ap-3766	105	8	.	.	PUNCT
ap-3766	106	1	after	after	ADP
ap-3766	106	2	that	that	PRON
ap-3766	106	3	,	,	PUNCT
ap-3766	106	4	it	it	PRON
ap-3766	106	5	slows	slow	VERB
ap-3766	106	6	down	down	ADP
ap-3766	106	7	due	due	ADP
ap-3766	106	8	to	to	ADP
ap-3766	106	9	an	an	DET
ap-3766	106	10	increase	increase	NOUN
ap-3766	106	11	in	in	ADP
ap-3766	106	12	energy	energy	NOUN
ap-3766	106	13	losses	loss	NOUN
ap-3766	106	14	due	due	ADJ
ap-3766	106	15	to	to	ADP
ap-3766	106	16	heat	heat	VERB
ap-3766	106	17	radiation	radiation	NOUN
ap-3766	106	18	.	.	PUNCT
ap-3766	107	1	a	a	DET
ap-3766	107	2	balance	balance	NOUN
ap-3766	107	3	between	between	ADP
ap-3766	107	4	incoming	incoming	ADJ
ap-3766	107	5	and	and	CCONJ
ap-3766	107	6	outgoing	outgoing	ADJ
ap-3766	107	7	power	power	NOUN
ap-3766	107	8	is	be	AUX
ap-3766	107	9	established	establish	VERB
ap-3766	107	10	.	.	PUNCT
ap-3766	108	1	the	the	DET
ap-3766	108	2	thermal	thermal	ADJ
ap-3766	108	3	field	field	NOUN
ap-3766	108	4	in	in	ADP
ap-3766	108	5	the	the	DET
ap-3766	108	6	target	target	NOUN
ap-3766	108	7	becomes	become	VERB
ap-3766	108	8	stationary	stationary	ADJ
ap-3766	108	9	and	and	CCONJ
ap-3766	108	10	is	be	AUX
ap-3766	108	11	determined	determine	VERB
ap-3766	108	12	by	by	ADP
ap-3766	108	13	period	period	NOUN
ap-3766	108	14	averaged	average	VERB
ap-3766	108	15	power	power	NOUN
ap-3766	108	16	.	.	PUNCT
ap-3766	109	1	the	the	DET
ap-3766	109	2	pulse	pulse	NOUN
ap-3766	109	3	repetition	repetition	NOUN
ap-3766	109	4	frequency	frequency	NOUN
ap-3766	109	5	and	and	CCONJ
ap-3766	109	6	the	the	DET
ap-3766	109	7	power	power	NOUN
ap-3766	109	8	during	during	ADP
ap-3766	109	9	the	the	DET
ap-3766	109	10	individual	individual	ADJ
ap-3766	109	11	pulses	pulse	NOUN
ap-3766	109	12	do	do	AUX
ap-3766	109	13	not	not	PART
ap-3766	109	14	influence	influence	VERB
ap-3766	109	15	this	this	DET
ap-3766	109	16	valuethe	valuethe	DET
ap-3766	109	17	period	period	NOUN
ap-3766	109	18	averaged	average	VERB
ap-3766	109	19	power	power	NOUN
ap-3766	109	20	.	.	PUNCT
ap-3766	110	1	the	the	DET
ap-3766	110	2	results	result	NOUN
ap-3766	110	3	for	for	ADP
ap-3766	110	4	erosion	erosion	NOUN
ap-3766	110	5	enhancement	enhancement	NOUN
ap-3766	110	6	due	due	ADP
ap-3766	110	7	to	to	ADP
ap-3766	110	8	evaporation	evaporation	NOUN
ap-3766	110	9	obtained	obtain	VERB
ap-3766	110	10	for	for	ADP
ap-3766	110	11	the	the	DET
ap-3766	110	12	period	period	NOUN
ap-3766	110	13	averaged	average	VERB
ap-3766	110	14	power	power	NOUN
ap-3766	110	15	can	can	AUX
ap-3766	110	16	therefore	therefore	ADV
ap-3766	110	17	be	be	AUX
ap-3766	110	18	applied	apply	VERB
ap-3766	110	19	for	for	ADP
ap-3766	110	20	mss	mss	PROPN
ap-3766	110	21	with	with	ADP
ap-3766	110	22	a	a	DET
ap-3766	110	23	different	different	ADJ
ap-3766	110	24	power	power	NOUN
ap-3766	110	25	supply	supply	NOUN
ap-3766	110	26	(	(	PUNCT
ap-3766	110	27	dc	dc	PROPN
ap-3766	110	28	,	,	PUNCT
ap-3766	110	29	mid	mid	ADJ
ap-3766	110	30	-	-	NOUN
ap-3766	110	31	frequency	frequency	ADJ
ap-3766	110	32	and	and	CCONJ
ap-3766	110	33	high	high	ADJ
ap-3766	110	34	-	-	PUNCT
ap-3766	110	35	frequency	frequency	NOUN
ap-3766	110	36	,	,	PUNCT
ap-3766	110	37	and	and	CCONJ
ap-3766	110	38	high	high	ADJ
ap-3766	110	39	-	-	PUNCT
ap-3766	110	40	power	power	NOUN
ap-3766	110	41	pulsed	pulse	VERB
ap-3766	110	42	magnetron	magnetron	NOUN
ap-3766	110	43	sputtering	sputtering	NOUN
ap-3766	110	44	)	)	PUNCT
ap-3766	110	45	.	.	PUNCT
ap-3766	111	1	when	when	SCONJ
ap-3766	111	2	the	the	DET
ap-3766	111	3	temperature	temperature	NOUN
ap-3766	111	4	stabilizes	stabilize	VERB
ap-3766	111	5	,	,	PUNCT
ap-3766	111	6	the	the	DET
ap-3766	111	7	evaporation	evaporation	NOUN
ap-3766	111	8	rate	rate	NOUN
ap-3766	111	9	remains	remain	VERB
ap-3766	111	10	almost	almost	ADV
ap-3766	111	11	constant	constant	ADJ
ap-3766	111	12	throughout	throughout	ADP
ap-3766	111	13	the	the	DET
ap-3766	111	14	current	current	ADJ
ap-3766	111	15	period	period	NOUN
ap-3766	111	16	,	,	PUNCT
ap-3766	111	17	because	because	SCONJ
ap-3766	111	18	the	the	DET
ap-3766	111	19	surface	surface	NOUN
ap-3766	111	20	temperature	temperature	NOUN
ap-3766	111	21	of	of	ADP
ap-3766	111	22	the	the	DET
ap-3766	111	23	target	target	NOUN
ap-3766	111	24	does	do	AUX
ap-3766	111	25	not	not	PART
ap-3766	111	26	have	have	VERB
ap-3766	111	27	time	time	NOUN
ap-3766	111	28	to	to	PART
ap-3766	111	29	change	change	VERB
ap-3766	111	30	significantly	significantly	ADV
ap-3766	111	31	between	between	ADP
ap-3766	111	32	two	two	NUM
ap-3766	111	33	adjacent	adjacent	ADJ
ap-3766	111	34	pulses	pulse	NOUN
ap-3766	111	35	(	(	PUNCT
ap-3766	111	36	figure	figure	NOUN
ap-3766	111	37	2	2	NUM
ap-3766	111	38	)	)	PUNCT
ap-3766	111	39	.	.	PUNCT
ap-3766	112	1	the	the	DET
ap-3766	112	2	sputtering	sputter	VERB
ap-3766	112	3	rate	rate	NOUN
ap-3766	112	4	follows	follow	VERB
ap-3766	112	5	the	the	DET
ap-3766	112	6	current	current	ADJ
ap-3766	112	7	variation	variation	NOUN
ap-3766	112	8	in	in	ADP
ap-3766	112	9	time	time	NOUN
ap-3766	112	10	.	.	PUNCT
ap-3766	113	1	therefore	therefore	ADV
ap-3766	113	2	,	,	PUNCT
ap-3766	113	3	the	the	DET
ap-3766	113	4	erosive	erosive	NOUN
ap-3766	113	5	427	427	NUM
ap-3766	113	6	a.	a.	NOUN
ap-3766	113	7	o.	o.	PROPN
ap-3766	113	8	borduleva	borduleva	PROPN
ap-3766	113	9	,	,	PUNCT
ap-3766	113	10	g.	g.	PROPN
ap-3766	113	11	a.	a.	PROPN
ap-3766	113	12	bleykher	bleykher	PROPN
ap-3766	113	13	,	,	PUNCT
ap-3766	113	14	d.	d.	PROPN
ap-3766	113	15	v.	v.	PROPN
ap-3766	113	16	sidelev	sidelev	PROPN
ap-3766	113	17	,	,	PUNCT
ap-3766	113	18	v.	v.	PROPN
ap-3766	113	19	p.	p.	PROPN
ap-3766	113	20	krivobokov	krivobokov	PROPN
ap-3766	114	1	acta	acta	PROPN
ap-3766	114	2	polytechnica	polytechnica	PROPN
ap-3766	114	3	figure	figure	NOUN
ap-3766	114	4	3	3	NUM
ap-3766	114	5	.	.	PUNCT
ap-3766	114	6	temperature	temperature	NOUN
ap-3766	114	7	radial	radial	ADJ
ap-3766	114	8	distribution	distribution	NOUN
ap-3766	114	9	(	(	PUNCT
ap-3766	114	10	tsurf	tsurf	ADJ
ap-3766	114	11	—	—	PUNCT
ap-3766	114	12	on	on	ADP
ap-3766	114	13	the	the	DET
ap-3766	114	14	treated	treat	VERB
ap-3766	114	15	surface	surface	NOUN
ap-3766	114	16	;	;	PUNCT
ap-3766	114	17	tback	tback	NOUN
ap-3766	114	18	—	—	PUNCT
ap-3766	114	19	on	on	ADP
ap-3766	114	20	the	the	DET
ap-3766	114	21	surface	surface	NOUN
ap-3766	114	22	of	of	ADP
ap-3766	114	23	the	the	DET
ap-3766	114	24	rear	rear	ADJ
ap-3766	114	25	side	side	NOUN
ap-3766	114	26	)	)	PUNCT
ap-3766	114	27	,	,	PUNCT
ap-3766	114	28	evaporation	evaporation	NOUN
ap-3766	114	29	rate	rate	NOUN
ap-3766	114	30	(	(	PUNCT
ap-3766	114	31	vev	vev	ADJ
ap-3766	114	32	)	)	PUNCT
ap-3766	114	33	and	and	CCONJ
ap-3766	114	34	sputtering	sputtering	ADJ
ap-3766	114	35	rate	rate	NOUN
ap-3766	114	36	averaged	average	VERB
ap-3766	114	37	over	over	ADP
ap-3766	114	38	the	the	DET
ap-3766	114	39	period	period	NOUN
ap-3766	114	40	(	(	PUNCT
ap-3766	114	41	vsput	vsput	NOUN
ap-3766	114	42	,	,	PUNCT
ap-3766	114	43	per	per	ADP
ap-3766	114	44	)	)	PUNCT
ap-3766	114	45	of	of	ADP
ap-3766	114	46	the	the	DET
ap-3766	114	47	heat	heat	NOUN
ap-3766	114	48	insulated	insulate	VERB
ap-3766	114	49	ti	ti	NOUN
ap-3766	114	50	target	target	NOUN
ap-3766	114	51	in	in	ADP
ap-3766	114	52	the	the	DET
ap-3766	114	53	stage	stage	NOUN
ap-3766	114	54	of	of	ADP
ap-3766	114	55	stabilization	stabilization	NOUN
ap-3766	114	56	of	of	ADP
ap-3766	114	57	mss	mss	PROPN
ap-3766	114	58	operation	operation	NOUN
ap-3766	114	59	with	with	ADP
ap-3766	114	60	power	power	NOUN
ap-3766	114	61	1900w	1900w	NUM
ap-3766	114	62	averaged	average	VERB
ap-3766	114	63	over	over	ADP
ap-3766	114	64	the	the	DET
ap-3766	114	65	period	period	NOUN
ap-3766	114	66	(	(	PUNCT
ap-3766	114	67	a	a	X
ap-3766	114	68	)	)	PUNCT
ap-3766	114	69	;	;	PUNCT
ap-3766	114	70	distribution	distribution	NOUN
ap-3766	114	71	of	of	ADP
ap-3766	114	72	the	the	DET
ap-3766	114	73	direct	direct	ADJ
ap-3766	114	74	-	-	PUNCT
ap-3766	114	75	axis	axis	NOUN
ap-3766	114	76	component	component	NOUN
ap-3766	114	77	of	of	ADP
ap-3766	114	78	magnetic	magnetic	ADJ
ap-3766	114	79	induction	induction	NOUN
ap-3766	114	80	vector	vector	NOUN
ap-3766	114	81	br	br	NOUN
ap-3766	114	82	(	(	PUNCT
ap-3766	114	83	b	b	NOUN
ap-3766	114	84	)	)	PUNCT
ap-3766	114	85	.	.	PUNCT
ap-3766	115	1	the	the	DET
ap-3766	115	2	target	target	NOUN
ap-3766	115	3	has	have	VERB
ap-3766	115	4	a	a	DET
ap-3766	115	5	radius	radius	NOUN
ap-3766	115	6	of	of	ADP
ap-3766	115	7	5	5	NUM
ap-3766	115	8	cm	cm	NOUN
ap-3766	115	9	,	,	PUNCT
ap-3766	115	10	and	and	CCONJ
ap-3766	115	11	is	be	AUX
ap-3766	115	12	0.6	0.6	NUM
ap-3766	115	13	cm	cm	NOUN
ap-3766	115	14	in	in	ADP
ap-3766	115	15	thickness	thickness	NOUN
ap-3766	115	16	.	.	PUNCT
ap-3766	116	1	figure	figure	NOUN
ap-3766	116	2	2	2	NUM
ap-3766	116	3	.	.	PUNCT
ap-3766	116	4	maximum	maximum	ADJ
ap-3766	116	5	temperature	temperature	NOUN
ap-3766	116	6	evolution	evolution	NOUN
ap-3766	116	7	on	on	ADP
ap-3766	116	8	the	the	DET
ap-3766	116	9	surface	surface	NOUN
ap-3766	116	10	of	of	ADP
ap-3766	116	11	the	the	DET
ap-3766	116	12	insulated	insulated	ADJ
ap-3766	116	13	ti	ti	NOUN
ap-3766	116	14	target	target	NOUN
ap-3766	116	15	(	(	PUNCT
ap-3766	116	16	tsurf	tsurf	ADJ
ap-3766	116	17	)	)	PUNCT
ap-3766	116	18	,	,	PUNCT
ap-3766	116	19	evaporation	evaporation	NOUN
ap-3766	116	20	rate	rate	NOUN
ap-3766	116	21	(	(	PUNCT
ap-3766	116	22	vev	vev	ADJ
ap-3766	116	23	)	)	PUNCT
ap-3766	116	24	and	and	CCONJ
ap-3766	116	25	sputtering	sputtering	ADJ
ap-3766	116	26	rate	rate	NOUN
ap-3766	116	27	(	(	PUNCT
ap-3766	116	28	vsput	vsput	NOUN
ap-3766	116	29	)	)	PUNCT
ap-3766	116	30	during	during	ADP
ap-3766	116	31	one	one	NUM
ap-3766	116	32	period	period	NOUN
ap-3766	116	33	of	of	ADP
ap-3766	116	34	the	the	DET
ap-3766	116	35	pulsed	pulse	VERB
ap-3766	116	36	mss	mss	NOUN
ap-3766	116	37	(	(	PUNCT
ap-3766	116	38	wper	wper	NOUN
ap-3766	116	39	=	=	NOUN
ap-3766	116	40	24.2w	24.2w	NUM
ap-3766	116	41	/	/	SYM
ap-3766	116	42	cm2	cm2	NOUN
ap-3766	116	43	,	,	PUNCT
ap-3766	116	44	ν	ν	X
ap-3766	116	45	=	=	SYM
ap-3766	116	46	1	1	NUM
ap-3766	116	47	khz	khz	NOUN
ap-3766	116	48	,	,	PUNCT
ap-3766	116	49	δ	δ	PROPN
ap-3766	116	50	=	=	PUNCT
ap-3766	116	51	20	20	NUM
ap-3766	116	52	%	%	NOUN
ap-3766	116	53	)	)	PUNCT
ap-3766	116	54	in	in	ADP
ap-3766	116	55	steady	steady	ADJ
ap-3766	116	56	state	state	NOUN
ap-3766	116	57	mode	mode	NOUN
ap-3766	116	58	.	.	PUNCT
ap-3766	117	1	the	the	DET
ap-3766	117	2	target	target	NOUN
ap-3766	117	3	has	have	VERB
ap-3766	117	4	a	a	DET
ap-3766	117	5	radius	radius	NOUN
ap-3766	117	6	of	of	ADP
ap-3766	117	7	5	5	NUM
ap-3766	117	8	cm	cm	NOUN
ap-3766	117	9	,	,	PUNCT
ap-3766	117	10	and	and	CCONJ
ap-3766	117	11	is	be	AUX
ap-3766	117	12	0.6	0.6	NUM
ap-3766	117	13	cm	cm	NOUN
ap-3766	117	14	in	in	ADP
ap-3766	117	15	thickness	thickness	NOUN
ap-3766	117	16	.	.	PUNCT
ap-3766	118	1	flow	flow	NOUN
ap-3766	118	2	from	from	ADP
ap-3766	118	3	the	the	DET
ap-3766	118	4	surface	surface	NOUN
ap-3766	118	5	of	of	ADP
ap-3766	118	6	the	the	DET
ap-3766	118	7	target	target	NOUN
ap-3766	118	8	is	be	AUX
ap-3766	118	9	a	a	DET
ap-3766	118	10	continuous	continuous	ADJ
ap-3766	118	11	flow	flow	NOUN
ap-3766	118	12	of	of	ADP
ap-3766	118	13	vaporized	vaporize	VERB
ap-3766	118	14	particles	particle	NOUN
ap-3766	118	15	on	on	ADP
ap-3766	118	16	the	the	DET
ap-3766	118	17	background	background	NOUN
ap-3766	118	18	of	of	ADP
ap-3766	118	19	which	which	PRON
ap-3766	118	20	sputtered	sputter	VERB
ap-3766	118	21	atoms	atom	NOUN
ap-3766	118	22	appear	appear	VERB
ap-3766	118	23	periodically	periodically	ADV
ap-3766	118	24	.	.	PUNCT
ap-3766	119	1	for	for	ADP
ap-3766	119	2	example	example	NOUN
ap-3766	119	3	,	,	PUNCT
ap-3766	119	4	figure	figure	NOUN
ap-3766	119	5	2	2	NUM
ap-3766	119	6	presents	present	VERB
ap-3766	119	7	the	the	DET
ap-3766	119	8	situation	situation	NOUN
ap-3766	119	9	during	during	ADP
ap-3766	119	10	the	the	DET
ap-3766	119	11	current	current	ADJ
ap-3766	119	12	period	period	NOUN
ap-3766	119	13	at	at	ADP
ap-3766	119	14	a	a	DET
ap-3766	119	15	pulse	pulse	NOUN
ap-3766	119	16	repetition	repetition	NOUN
ap-3766	119	17	frequency	frequency	NOUN
ap-3766	119	18	of	of	ADP
ap-3766	119	19	ν	ν	PROPN
ap-3766	119	20	=	=	SYM
ap-3766	119	21	1	1	NUM
ap-3766	119	22	khz	khz	NOUN
ap-3766	119	23	,	,	PUNCT
ap-3766	119	24	duty	duty	NOUN
ap-3766	119	25	cycle	cycle	NOUN
ap-3766	119	26	δ	δ	NOUN
ap-3766	119	27	=	=	PUNCT
ap-3766	119	28	20	20	NUM
ap-3766	119	29	%	%	NOUN
ap-3766	119	30	and	and	CCONJ
ap-3766	119	31	wper	wper	NOUN
ap-3766	120	1	=	=	NOUN
ap-3766	120	2	24.2w	24.2w	NUM
ap-3766	120	3	/	/	SYM
ap-3766	120	4	cm2	cm2	NOUN
ap-3766	120	5	.	.	PUNCT
ap-3766	121	1	the	the	DET
ap-3766	121	2	power	power	NOUN
ap-3766	121	3	oscillogram	oscillogram	PROPN
ap-3766	121	4	is	be	AUX
ap-3766	121	5	close	close	ADJ
ap-3766	121	6	to	to	ADP
ap-3766	121	7	trigonal	trigonal	ADJ
ap-3766	121	8	in	in	ADP
ap-3766	121	9	shape	shape	NOUN
ap-3766	121	10	.	.	PUNCT
ap-3766	122	1	in	in	ADP
ap-3766	122	2	this	this	DET
ap-3766	122	3	case	case	NOUN
ap-3766	122	4	,	,	PUNCT
ap-3766	122	5	the	the	DET
ap-3766	122	6	evaporation	evaporation	NOUN
ap-3766	122	7	rate	rate	NOUN
ap-3766	122	8	vev	vev	NOUN
ap-3766	122	9	almost	almost	ADV
ap-3766	122	10	coincides	coincide	VERB
ap-3766	122	11	with	with	ADP
ap-3766	122	12	the	the	DET
ap-3766	122	13	period	period	NOUN
ap-3766	122	14	averaged	average	VERB
ap-3766	122	15	sputtering	sputtering	ADJ
ap-3766	122	16	rate	rate	NOUN
ap-3766	122	17	(	(	PUNCT
ap-3766	122	18	vsput	vsput	NOUN
ap-3766	122	19	,	,	PUNCT
ap-3766	122	20	per	per	ADP
ap-3766	122	21	)	)	PUNCT
ap-3766	122	22	.	.	PUNCT
ap-3766	123	1	however	however	ADV
ap-3766	123	2	,	,	PUNCT
ap-3766	123	3	the	the	DET
ap-3766	123	4	sputtering	sputtering	ADJ
ap-3766	123	5	rate	rate	NOUN
ap-3766	123	6	during	during	ADP
ap-3766	123	7	the	the	DET
ap-3766	123	8	current	current	ADJ
ap-3766	123	9	pulse	pulse	NOUN
ap-3766	123	10	is	be	AUX
ap-3766	123	11	proportional	proportional	ADJ
ap-3766	123	12	to	to	ADP
ap-3766	123	13	the	the	DET
ap-3766	123	14	instantaneous	instantaneous	ADJ
ap-3766	123	15	power	power	NOUN
ap-3766	123	16	density	density	NOUN
ap-3766	123	17	,	,	PUNCT
ap-3766	123	18	and	and	CCONJ
ap-3766	123	19	is	be	AUX
ap-3766	123	20	significantly	significantly	ADV
ap-3766	123	21	greater	great	ADJ
ap-3766	123	22	than	than	ADP
ap-3766	123	23	vev	vev	PROPN
ap-3766	123	24	.	.	PUNCT
ap-3766	124	1	evaporated	evaporate	VERB
ap-3766	124	2	particles	particle	NOUN
ap-3766	124	3	leave	leave	VERB
ap-3766	124	4	the	the	DET
ap-3766	124	5	target	target	NOUN
ap-3766	124	6	not	not	PART
ap-3766	124	7	only	only	ADV
ap-3766	124	8	during	during	ADP
ap-3766	124	9	the	the	DET
ap-3766	124	10	action	action	NOUN
ap-3766	124	11	of	of	ADP
ap-3766	124	12	the	the	DET
ap-3766	124	13	current	current	ADJ
ap-3766	124	14	pulse	pulse	NOUN
ap-3766	124	15	,	,	PUNCT
ap-3766	124	16	but	but	CCONJ
ap-3766	124	17	also	also	ADV
ap-3766	124	18	between	between	ADP
ap-3766	124	19	pulses	pulse	NOUN
ap-3766	124	20	.	.	PUNCT
ap-3766	125	1	this	this	PRON
ap-3766	125	2	should	should	AUX
ap-3766	125	3	make	make	VERB
ap-3766	125	4	it	it	PRON
ap-3766	125	5	possible	possible	ADJ
ap-3766	125	6	to	to	PART
ap-3766	125	7	enhance	enhance	VERB
ap-3766	125	8	the	the	DET
ap-3766	125	9	coating	coat	VERB
ap-3766	125	10	deposition	deposition	NOUN
ap-3766	125	11	rate	rate	NOUN
ap-3766	125	12	for	for	ADP
ap-3766	125	13	high	high	ADJ
ap-3766	125	14	-	-	PUNCT
ap-3766	125	15	power	power	NOUN
ap-3766	125	16	pulsed	pulse	VERB
ap-3766	125	17	magnetron	magnetron	NOUN
ap-3766	125	18	sputtering	sputtering	NOUN
ap-3766	125	19	.	.	PUNCT
ap-3766	126	1	between	between	ADP
ap-3766	126	2	the	the	DET
ap-3766	126	3	current	current	ADJ
ap-3766	126	4	pulses	pulse	NOUN
ap-3766	126	5	,	,	PUNCT
ap-3766	126	6	there	there	PRON
ap-3766	126	7	are	be	VERB
ap-3766	126	8	almost	almost	ADV
ap-3766	126	9	no	no	PRON
ap-3766	126	10	intensive	intensive	ADJ
ap-3766	126	11	ionization	ionization	NOUN
ap-3766	126	12	processes	process	NOUN
ap-3766	126	13	in	in	ADP
ap-3766	126	14	the	the	DET
ap-3766	126	15	gas	gas	NOUN
ap-3766	126	16	discharge	discharge	NOUN
ap-3766	126	17	area	area	NOUN
ap-3766	126	18	.	.	PUNCT
ap-3766	127	1	in	in	ADP
ap-3766	127	2	this	this	DET
ap-3766	127	3	case	case	NOUN
ap-3766	127	4	,	,	PUNCT
ap-3766	127	5	the	the	DET
ap-3766	127	6	probability	probability	NOUN
ap-3766	127	7	of	of	ADP
ap-3766	127	8	the	the	DET
ap-3766	127	9	emitted	emitted	ADJ
ap-3766	127	10	particles	particle	NOUN
ap-3766	127	11	reaching	reach	VERB
ap-3766	127	12	the	the	DET
ap-3766	127	13	substrate	substrate	NOUN
ap-3766	127	14	significantly	significantly	ADV
ap-3766	127	15	increases	increase	NOUN
ap-3766	127	16	.	.	PUNCT
ap-3766	128	1	the	the	PRON
ap-3766	128	2	greater	great	ADJ
ap-3766	128	3	the	the	DET
ap-3766	128	4	number	number	NOUN
ap-3766	128	5	of	of	ADP
ap-3766	128	6	these	these	DET
ap-3766	128	7	particles	particle	NOUN
ap-3766	128	8	,	,	PUNCT
ap-3766	128	9	the	the	PRON
ap-3766	128	10	higher	high	ADJ
ap-3766	128	11	the	the	DET
ap-3766	128	12	coating	coat	VERB
ap-3766	128	13	growth	growth	NOUN
ap-3766	128	14	rate	rate	NOUN
ap-3766	128	15	should	should	AUX
ap-3766	128	16	be	be	AUX
ap-3766	128	17	.	.	PUNCT
ap-3766	129	1	it	it	PRON
ap-3766	129	2	is	be	AUX
ap-3766	129	3	known	know	VERB
ap-3766	129	4	that	that	SCONJ
ap-3766	129	5	the	the	DET
ap-3766	129	6	sputtering	sputter	VERB
ap-3766	129	7	rate	rate	NOUN
ap-3766	129	8	is	be	AUX
ap-3766	129	9	non	non	ADJ
ap-3766	129	10	-	-	ADJ
ap-3766	129	11	uniform	uniform	ADJ
ap-3766	129	12	along	along	ADP
ap-3766	129	13	the	the	DET
ap-3766	129	14	target	target	NOUN
ap-3766	129	15	surface	surface	NOUN
ap-3766	129	16	during	during	ADP
ap-3766	129	17	mss	mss	PROPN
ap-3766	129	18	operation	operation	NOUN
ap-3766	129	19	,	,	PUNCT
ap-3766	129	20	because	because	SCONJ
ap-3766	129	21	the	the	DET
ap-3766	129	22	ion	ion	NOUN
ap-3766	129	23	current	current	ADJ
ap-3766	129	24	power	power	NOUN
ap-3766	129	25	density	density	NOUN
ap-3766	129	26	is	be	AUX
ap-3766	129	27	proportional	proportional	ADJ
ap-3766	129	28	to	to	ADP
ap-3766	129	29	the	the	DET
ap-3766	129	30	direct	direct	ADJ
ap-3766	129	31	-	-	PUNCT
ap-3766	129	32	axis	axis	NOUN
ap-3766	129	33	component	component	NOUN
ap-3766	129	34	of	of	ADP
ap-3766	129	35	the	the	DET
ap-3766	129	36	magnetic	magnetic	ADJ
ap-3766	129	37	induction	induction	NOUN
ap-3766	129	38	vector	vector	NOUN
ap-3766	129	39	(	(	PUNCT
ap-3766	129	40	br	br	NOUN
ap-3766	129	41	)	)	PUNCT
ap-3766	129	42	.	.	PUNCT
ap-3766	130	1	calculations	calculation	NOUN
ap-3766	130	2	show	show	VERB
ap-3766	130	3	that	that	SCONJ
ap-3766	130	4	wion(r	wion(r	NOUN
ap-3766	130	5	)	)	PUNCT
ap-3766	130	6	non	non	ADJ
ap-3766	130	7	-	-	NOUN
ap-3766	130	8	uniformity	uniformity	NOUN
ap-3766	130	9	also	also	ADV
ap-3766	130	10	influences	influence	VERB
ap-3766	130	11	the	the	DET
ap-3766	130	12	radial	radial	ADJ
ap-3766	130	13	distribution	distribution	NOUN
ap-3766	130	14	of	of	ADP
ap-3766	130	15	the	the	DET
ap-3766	130	16	temperature	temperature	NOUN
ap-3766	130	17	and	and	CCONJ
ap-3766	130	18	evaporation	evaporation	NOUN
ap-3766	130	19	rate	rate	NOUN
ap-3766	130	20	.	.	PUNCT
ap-3766	131	1	the	the	DET
ap-3766	131	2	temperature	temperature	NOUN
ap-3766	131	3	behavior	behavior	NOUN
ap-3766	131	4	and	and	CCONJ
ap-3766	131	5	the	the	DET
ap-3766	131	6	erosion	erosion	NOUN
ap-3766	131	7	rate	rate	NOUN
ap-3766	131	8	components	component	NOUN
ap-3766	131	9	on	on	ADP
ap-3766	131	10	the	the	DET
ap-3766	131	11	surface	surface	NOUN
ap-3766	131	12	of	of	ADP
ap-3766	131	13	the	the	DET
ap-3766	131	14	ti	ti	NOUN
ap-3766	131	15	target	target	NOUN
ap-3766	131	16	in	in	ADP
ap-3766	131	17	steady	steady	ADJ
ap-3766	131	18	state	state	NOUN
ap-3766	131	19	magnetron	magnetron	NOUN
ap-3766	131	20	operation	operation	NOUN
ap-3766	131	21	are	be	AUX
ap-3766	131	22	presented	present	VERB
ap-3766	131	23	in	in	ADP
ap-3766	131	24	figure	figure	NOUN
ap-3766	131	25	3	3	NUM
ap-3766	131	26	,	,	PUNCT
ap-3766	131	27	where	where	SCONJ
ap-3766	131	28	r	r	NOUN
ap-3766	131	29	=	=	SYM
ap-3766	131	30	0	0	NUM
ap-3766	131	31	is	be	AUX
ap-3766	131	32	the	the	DET
ap-3766	131	33	centre	centre	NOUN
ap-3766	131	34	of	of	ADP
ap-3766	131	35	target	target	PROPN
ap-3766	131	36	r.	r.	PROPN
ap-3766	131	37	they	they	PRON
ap-3766	131	38	were	be	AUX
ap-3766	131	39	calculated	calculate	VERB
ap-3766	131	40	for	for	ADP
ap-3766	131	41	the	the	DET
ap-3766	131	42	real	real	ADJ
ap-3766	131	43	and	and	CCONJ
ap-3766	131	44	the	the	DET
ap-3766	131	45	hypothetical	hypothetical	ADJ
ap-3766	131	46	uniform	uniform	ADJ
ap-3766	131	47	distribution	distribution	NOUN
ap-3766	131	48	of	of	ADP
ap-3766	131	49	br(r	br(r	NOUN
ap-3766	131	50	)	)	PUNCT
ap-3766	131	51	.	.	PUNCT
ap-3766	132	1	its	its	PRON
ap-3766	132	2	profile	profile	NOUN
ap-3766	132	3	,	,	PUNCT
ap-3766	132	4	which	which	PRON
ap-3766	132	5	we	we	PRON
ap-3766	132	6	measured	measure	VERB
ap-3766	132	7	for	for	ADP
ap-3766	132	8	a	a	DET
ap-3766	132	9	planar	planar	ADJ
ap-3766	132	10	magnetron	magnetron	NOUN
ap-3766	132	11	with	with	ADP
ap-3766	132	12	permanent	permanent	ADJ
ap-3766	132	13	magnets	magnet	NOUN
ap-3766	132	14	,	,	PUNCT
ap-3766	132	15	is	be	AUX
ap-3766	132	16	also	also	ADV
ap-3766	132	17	shown	show	VERB
ap-3766	132	18	in	in	ADP
ap-3766	132	19	figure	figure	NOUN
ap-3766	132	20	3b	3b	NUM
ap-3766	132	21	.	.	PUNCT
ap-3766	133	1	this	this	PRON
ap-3766	133	2	is	be	AUX
ap-3766	133	3	a	a	DET
ap-3766	133	4	typical	typical	ADJ
ap-3766	133	5	profile	profile	NOUN
ap-3766	133	6	for	for	ADP
ap-3766	133	7	modern	modern	ADJ
ap-3766	133	8	mss	mss	PROPN
ap-3766	133	9	.	.	PUNCT
ap-3766	134	1	this	this	DET
ap-3766	134	2	distribution	distribution	NOUN
ap-3766	134	3	was	be	AUX
ap-3766	134	4	used	use	VERB
ap-3766	134	5	for	for	ADP
ap-3766	134	6	calculations	calculation	NOUN
ap-3766	134	7	of	of	ADP
ap-3766	134	8	the	the	DET
ap-3766	134	9	temperature	temperature	NOUN
ap-3766	134	10	,	,	PUNCT
ap-3766	134	11	evaporation	evaporation	NOUN
ap-3766	134	12	and	and	CCONJ
ap-3766	134	13	sputtering	sputtering	ADJ
ap-3766	134	14	rates	rate	NOUN
ap-3766	134	15	.	.	PUNCT
ap-3766	135	1	tsurf	tsurf	ADJ
ap-3766	135	2	,	,	PUNCT
ap-3766	135	3	uniform	uniform	NOUN
ap-3766	135	4	and	and	CCONJ
ap-3766	135	5	vev	vev	NOUN
ap-3766	135	6	,	,	PUNCT
ap-3766	135	7	uniform	uniform	NOUN
ap-3766	135	8	are	be	AUX
ap-3766	135	9	the	the	DET
ap-3766	135	10	temperature	temperature	NOUN
ap-3766	135	11	and	and	CCONJ
ap-3766	135	12	evaporation	evaporation	NOUN
ap-3766	135	13	rates	rate	NOUN
ap-3766	135	14	when	when	SCONJ
ap-3766	135	15	the	the	DET
ap-3766	135	16	ion	ion	NOUN
ap-3766	135	17	current	current	ADJ
ap-3766	135	18	density	density	NOUN
ap-3766	135	19	distribution	distribution	NOUN
ap-3766	135	20	along	along	ADP
ap-3766	135	21	the	the	DET
ap-3766	135	22	target	target	NOUN
ap-3766	135	23	surface	surface	NOUN
ap-3766	135	24	is	be	AUX
ap-3766	135	25	uniform	uniform	ADJ
ap-3766	135	26	.	.	PUNCT
ap-3766	136	1	figure	figure	NOUN
ap-3766	136	2	3	3	NUM
ap-3766	136	3	shows	show	VERB
ap-3766	136	4	that	that	SCONJ
ap-3766	136	5	non	non	ADJ
ap-3766	136	6	-	-	NOUN
ap-3766	136	7	uniformity	uniformity	NOUN
ap-3766	136	8	of	of	ADP
ap-3766	136	9	magnetic	magnetic	ADJ
ap-3766	136	10	induction	induction	NOUN
ap-3766	136	11	along	along	ADP
ap-3766	136	12	the	the	DET
ap-3766	136	13	target	target	NOUN
ap-3766	136	14	surface	surface	NOUN
ap-3766	136	15	is	be	AUX
ap-3766	136	16	a	a	DET
ap-3766	136	17	favorable	favorable	ADJ
ap-3766	136	18	factor	factor	NOUN
ap-3766	136	19	for	for	ADP
ap-3766	136	20	evaporation	evaporation	NOUN
ap-3766	136	21	,	,	PUNCT
ap-3766	136	22	because	because	SCONJ
ap-3766	136	23	the	the	DET
ap-3766	136	24	heating	heating	NOUN
ap-3766	136	25	of	of	ADP
ap-3766	136	26	local	local	ADJ
ap-3766	136	27	areas	area	NOUN
ap-3766	136	28	increases	increase	VERB
ap-3766	136	29	.	.	PUNCT
ap-3766	137	1	this	this	DET
ap-3766	137	2	evaporation	evaporation	NOUN
ap-3766	137	3	enhancement	enhancement	NOUN
ap-3766	137	4	apparently	apparently	ADV
ap-3766	137	5	should	should	AUX
ap-3766	137	6	occur	occur	VERB
ap-3766	137	7	for	for	ADP
ap-3766	137	8	materials	material	NOUN
ap-3766	137	9	with	with	ADP
ap-3766	137	10	a	a	DET
ap-3766	137	11	relatively	relatively	ADV
ap-3766	137	12	low	low	ADJ
ap-3766	137	13	thermal	thermal	ADJ
ap-3766	137	14	conductivity	conductivity	NOUN
ap-3766	137	15	coefficient	coefficient	NOUN
ap-3766	137	16	.	.	PUNCT
ap-3766	138	1	figure	figure	NOUN
ap-3766	138	2	3b	3b	PROPN
ap-3766	138	3	indicates	indicate	VERB
ap-3766	138	4	that	that	SCONJ
ap-3766	138	5	the	the	DET
ap-3766	138	6	area	area	NOUN
ap-3766	138	7	on	on	ADP
ap-3766	138	8	the	the	DET
ap-3766	138	9	surface	surface	NOUN
ap-3766	138	10	of	of	ADP
ap-3766	138	11	the	the	DET
ap-3766	138	12	target	target	NOUN
ap-3766	138	13	where	where	SCONJ
ap-3766	138	14	the	the	DET
ap-3766	138	15	evaporation	evaporation	NOUN
ap-3766	138	16	rate	rate	NOUN
ap-3766	138	17	is	be	AUX
ap-3766	138	18	highest	high	ADJ
ap-3766	138	19	may	may	AUX
ap-3766	138	20	be	be	AUX
ap-3766	138	21	different	different	ADJ
ap-3766	138	22	from	from	ADP
ap-3766	138	23	the	the	DET
ap-3766	138	24	area	area	NOUN
ap-3766	138	25	where	where	SCONJ
ap-3766	138	26	the	the	DET
ap-3766	138	27	sputtering	sputtering	ADJ
ap-3766	138	28	rate	rate	NOUN
ap-3766	138	29	reaches	reach	VERB
ap-3766	138	30	its	its	PRON
ap-3766	138	31	peak	peak	NOUN
ap-3766	138	32	.	.	PUNCT
ap-3766	139	1	figure	figure	NOUN
ap-3766	139	2	4	4	NUM
ap-3766	139	3	shows	show	VERB
ap-3766	139	4	the	the	DET
ap-3766	139	5	dependence	dependence	NOUN
ap-3766	139	6	of	of	ADP
ap-3766	139	7	the	the	DET
ap-3766	139	8	surface	surface	NOUN
ap-3766	139	9	temperature	temperature	NOUN
ap-3766	139	10	of	of	ADP
ap-3766	139	11	the	the	DET
ap-3766	139	12	ti	ti	NOUN
ap-3766	139	13	target	target	NOUN
ap-3766	139	14	and	and	CCONJ
ap-3766	139	15	the	the	DET
ap-3766	139	16	coating	coat	VERB
ap-3766	139	17	deposition	deposition	NOUN
ap-3766	139	18	rate	rate	NOUN
ap-3766	139	19	on	on	ADP
ap-3766	139	20	the	the	DET
ap-3766	139	21	period	period	NOUN
ap-3766	139	22	averaged	average	VERB
ap-3766	139	23	ion	ion	NOUN
ap-3766	139	24	current	current	ADJ
ap-3766	139	25	power	power	NOUN
ap-3766	139	26	density	density	NOUN
ap-3766	139	27	.	.	PUNCT
ap-3766	140	1	the	the	DET
ap-3766	140	2	temperature	temperature	NOUN
ap-3766	140	3	was	be	AUX
ap-3766	140	4	calculated	calculate	VERB
ap-3766	140	5	on	on	ADP
ap-3766	140	6	the	the	DET
ap-3766	140	7	highest	high	ADJ
ap-3766	140	8	heating	heating	NOUN
ap-3766	140	9	area	area	NOUN
ap-3766	140	10	.	.	PUNCT
ap-3766	141	1	the	the	DET
ap-3766	141	2	deposition	deposition	NOUN
ap-3766	141	3	rate	rate	NOUN
ap-3766	141	4	was	be	AUX
ap-3766	141	5	calculated	calculate	VERB
ap-3766	141	6	for	for	ADP
ap-3766	141	7	the	the	DET
ap-3766	141	8	substrate	substrate	NOUN
ap-3766	141	9	area	area	NOUN
ap-3766	141	10	opposite	opposite	ADJ
ap-3766	141	11	to	to	ADP
ap-3766	141	12	the	the	DET
ap-3766	141	13	center	center	NOUN
ap-3766	141	14	of	of	ADP
ap-3766	141	15	the	the	DET
ap-3766	141	16	target	target	NOUN
ap-3766	141	17	.	.	PUNCT
ap-3766	142	1	the	the	DET
ap-3766	142	2	methodology	methodology	NOUN
ap-3766	142	3	for	for	ADP
ap-3766	142	4	calculating	calculate	VERB
ap-3766	142	5	the	the	DET
ap-3766	142	6	deposition	deposition	NOUN
ap-3766	142	7	rate	rate	NOUN
ap-3766	142	8	428	428	NUM
ap-3766	142	9	vol	vol	NOUN
ap-3766	142	10	.	.	PUNCT
ap-3766	143	1	56	56	NUM
ap-3766	143	2	no	no	NOUN
ap-3766	143	3	.	.	PUNCT
ap-3766	144	1	6/2016	6/2016	NUM
ap-3766	144	2	magnetron	magnetron	NOUN
ap-3766	144	3	sputtering	sputter	VERB
ap-3766	144	4	with	with	ADP
ap-3766	144	5	hot	hot	ADJ
ap-3766	144	6	solid	solid	ADJ
ap-3766	144	7	target	target	NOUN
ap-3766	144	8	figure	figure	NOUN
ap-3766	144	9	4	4	NUM
ap-3766	144	10	.	.	PUNCT
ap-3766	145	1	the	the	DET
ap-3766	145	2	dependence	dependence	NOUN
ap-3766	145	3	of	of	ADP
ap-3766	145	4	the	the	DET
ap-3766	145	5	maximum	maximum	ADJ
ap-3766	145	6	temperature	temperature	NOUN
ap-3766	145	7	on	on	ADP
ap-3766	145	8	the	the	DET
ap-3766	145	9	surface	surface	NOUN
ap-3766	145	10	of	of	ADP
ap-3766	145	11	the	the	DET
ap-3766	145	12	ti	ti	PROPN
ap-3766	145	13	target	target	NOUN
ap-3766	145	14	(	(	PUNCT
ap-3766	145	15	twc	twc	PROPN
ap-3766	145	16	—	—	PUNCT
ap-3766	145	17	without	without	ADP
ap-3766	145	18	cooling	cool	VERB
ap-3766	145	19	,	,	PUNCT
ap-3766	145	20	t	t	PROPN
ap-3766	145	21	c	c	PROPN
ap-3766	145	22	—	—	PUNCT
ap-3766	145	23	with	with	ADP
ap-3766	145	24	partial	partial	ADJ
ap-3766	145	25	cooling	cooling	NOUN
ap-3766	145	26	)	)	PUNCT
ap-3766	145	27	and	and	CCONJ
ap-3766	145	28	on	on	ADP
ap-3766	145	29	the	the	DET
ap-3766	145	30	coating	coat	VERB
ap-3766	145	31	deposition	deposition	NOUN
ap-3766	145	32	rate	rate	NOUN
ap-3766	145	33	(	(	PUNCT
ap-3766	145	34	a	a	DET
ap-3766	145	35	point	point	NOUN
ap-3766	145	36	opposite	opposite	ADP
ap-3766	145	37	the	the	DET
ap-3766	145	38	center	center	NOUN
ap-3766	145	39	of	of	ADP
ap-3766	145	40	the	the	DET
ap-3766	145	41	target	target	NOUN
ap-3766	145	42	at	at	ADP
ap-3766	145	43	a	a	DET
ap-3766	145	44	distance	distance	NOUN
ap-3766	145	45	of	of	ADP
ap-3766	145	46	8	8	NUM
ap-3766	145	47	cm	cm	NOUN
ap-3766	145	48	)	)	PUNCT
ap-3766	145	49	due	due	ADP
ap-3766	145	50	to	to	ADP
ap-3766	145	51	sputtered	sputter	VERB
ap-3766	145	52	particles	particle	NOUN
ap-3766	145	53	(	(	PUNCT
ap-3766	145	54	vdep	vdep	NOUN
ap-3766	145	55	,	,	PUNCT
ap-3766	145	56	sput	sput	NOUN
ap-3766	145	57	)	)	PUNCT
ap-3766	145	58	and	and	CCONJ
ap-3766	145	59	evaporated	evaporate	VERB
ap-3766	145	60	particles	particle	NOUN
ap-3766	145	61	(	(	PUNCT
ap-3766	145	62	v	v	PROPN
ap-3766	145	63	wc	wc	PROPN
ap-3766	145	64	dep	dep	PROPN
ap-3766	145	65	,	,	PUNCT
ap-3766	145	66	ev	ev	INTJ
ap-3766	145	67	—	—	PUNCT
ap-3766	145	68	without	without	ADP
ap-3766	145	69	cooling	cool	VERB
ap-3766	145	70	;	;	PUNCT
ap-3766	145	71	v	v	ADP
ap-3766	145	72	c	c	PROPN
ap-3766	145	73	dep	dep	NOUN
ap-3766	145	74	,	,	PUNCT
ap-3766	145	75	ev	ev	X
ap-3766	145	76	—	—	PUNCT
ap-3766	145	77	with	with	ADP
ap-3766	145	78	partial	partial	ADJ
ap-3766	145	79	target	target	NOUN
ap-3766	145	80	cooling	cooling	NOUN
ap-3766	145	81	)	)	PUNCT
ap-3766	145	82	on	on	ADP
ap-3766	145	83	the	the	DET
ap-3766	145	84	averaged	average	VERB
ap-3766	145	85	power	power	NOUN
ap-3766	145	86	density	density	NOUN
ap-3766	145	87	wper	wper	PROPN
ap-3766	145	88	.	.	PUNCT
ap-3766	146	1	the	the	DET
ap-3766	146	2	target	target	NOUN
ap-3766	146	3	has	have	VERB
ap-3766	146	4	a	a	DET
ap-3766	146	5	radius	radius	NOUN
ap-3766	146	6	of	of	ADP
ap-3766	146	7	5	5	NUM
ap-3766	146	8	cm	cm	NOUN
ap-3766	146	9	,	,	PUNCT
ap-3766	146	10	and	and	CCONJ
ap-3766	146	11	is	be	AUX
ap-3766	146	12	0.6	0.6	NUM
ap-3766	146	13	cm	cm	NOUN
ap-3766	146	14	in	in	ADP
ap-3766	146	15	thickness	thickness	NOUN
ap-3766	146	16	.	.	PUNCT
ap-3766	147	1	the	the	DET
ap-3766	147	2	cooling	cooling	NOUN
ap-3766	147	3	is	be	AUX
ap-3766	147	4	according	accord	VERB
ap-3766	147	5	to	to	PART
ap-3766	147	6	figure	figure	VERB
ap-3766	147	7	1c	1c	NOUN
ap-3766	147	8	,	,	PUNCT
ap-3766	147	9	where	where	SCONJ
ap-3766	147	10	r1	r1	PROPN
ap-3766	147	11	=	=	PUNCT
ap-3766	147	12	0.5	0.5	NUM
ap-3766	147	13	cm	cm	NOUN
ap-3766	147	14	,	,	PUNCT
ap-3766	147	15	h2	h2	NOUN
ap-3766	147	16	=	=	NUM
ap-3766	147	17	0.2	0.2	NUM
ap-3766	147	18	cm	cm	NUM
ap-3766	147	19	;	;	PUNCT
ap-3766	147	20	the	the	DET
ap-3766	147	21	body	body	NOUN
ap-3766	147	22	and	and	CCONJ
ap-3766	147	23	the	the	DET
ap-3766	147	24	disk	disk	NOUN
ap-3766	147	25	of	of	ADP
ap-3766	147	26	the	the	DET
ap-3766	147	27	magnetron	magnetron	NOUN
ap-3766	147	28	are	be	AUX
ap-3766	147	29	prepared	prepare	VERB
ap-3766	147	30	from	from	ADP
ap-3766	147	31	copper	copper	NOUN
ap-3766	147	32	.	.	PUNCT
ap-3766	148	1	the	the	DET
ap-3766	148	2	solid	solid	ADJ
ap-3766	148	3	lines	line	NOUN
ap-3766	148	4	are	be	AUX
ap-3766	148	5	for	for	ADP
ap-3766	148	6	the	the	DET
ap-3766	148	7	calculation	calculation	NOUN
ap-3766	148	8	results	result	NOUN
ap-3766	148	9	;	;	PUNCT
ap-3766	148	10	the	the	DET
ap-3766	148	11	dots	dot	NOUN
ap-3766	148	12	are	be	AUX
ap-3766	148	13	for	for	ADP
ap-3766	148	14	the	the	DET
ap-3766	148	15	experimental	experimental	ADJ
ap-3766	148	16	results	result	NOUN
ap-3766	148	17	for	for	ADP
ap-3766	148	18	tmax	tmax	ADV
ap-3766	148	19	from	from	ADP
ap-3766	148	20	[	[	X
ap-3766	148	21	14	14	NUM
ap-3766	148	22	,	,	PUNCT
ap-3766	148	23	15	15	NUM
ap-3766	148	24	]	]	PUNCT
ap-3766	148	25	.	.	PUNCT
ap-3766	149	1	is	be	AUX
ap-3766	149	2	described	describe	VERB
ap-3766	149	3	in	in	ADP
ap-3766	149	4	[	[	X
ap-3766	149	5	5	5	NUM
ap-3766	149	6	]	]	PUNCT
ap-3766	149	7	.	.	PUNCT
ap-3766	150	1	the	the	DET
ap-3766	150	2	results	result	NOUN
ap-3766	150	3	were	be	AUX
ap-3766	150	4	obtained	obtain	VERB
ap-3766	150	5	for	for	ADP
ap-3766	150	6	the	the	DET
ap-3766	150	7	cases	case	NOUN
ap-3766	150	8	of	of	ADP
ap-3766	150	9	complete	complete	ADJ
ap-3766	150	10	insulation	insulation	NOUN
ap-3766	150	11	of	of	ADP
ap-3766	150	12	the	the	DET
ap-3766	150	13	target	target	NOUN
ap-3766	150	14	(	(	PUNCT
ap-3766	150	15	superscript	superscript	PROPN
ap-3766	150	16	“	"	PUNCT
ap-3766	150	17	wc	wc	PROPN
ap-3766	150	18	”	"	PUNCT
ap-3766	150	19	)	)	PUNCT
ap-3766	150	20	and	and	CCONJ
ap-3766	150	21	partial	partial	ADJ
ap-3766	150	22	insulation	insulation	NOUN
ap-3766	150	23	of	of	ADP
ap-3766	150	24	the	the	DET
ap-3766	150	25	target	target	NOUN
ap-3766	150	26	(	(	PUNCT
ap-3766	150	27	superscript	superscript	NOUN
ap-3766	150	28	“	"	PUNCT
ap-3766	150	29	c	c	NOUN
ap-3766	150	30	”	"	PUNCT
ap-3766	150	31	)	)	PUNCT
ap-3766	150	32	in	in	ADP
ap-3766	150	33	the	the	DET
ap-3766	150	34	steady	steady	ADJ
ap-3766	150	35	thermal	thermal	ADJ
ap-3766	150	36	state	state	NOUN
ap-3766	150	37	of	of	ADP
ap-3766	150	38	mss	mss	PROPN
ap-3766	150	39	operation	operation	NOUN
ap-3766	150	40	.	.	PUNCT
ap-3766	151	1	the	the	DET
ap-3766	151	2	partial	partial	ADJ
ap-3766	151	3	insulation	insulation	NOUN
ap-3766	151	4	parameters	parameter	NOUN
ap-3766	151	5	correspond	correspond	VERB
ap-3766	151	6	to	to	PART
ap-3766	151	7	figure	figure	VERB
ap-3766	151	8	1b	1b	NUM
ap-3766	151	9	,	,	PUNCT
ap-3766	151	10	where	where	SCONJ
ap-3766	151	11	the	the	DET
ap-3766	151	12	spacer	spacer	NOUN
ap-3766	151	13	disk	disk	NOUN
ap-3766	151	14	radius	radius	NOUN
ap-3766	151	15	r1	r1	NOUN
ap-3766	151	16	is	be	AUX
ap-3766	151	17	equal	equal	ADJ
ap-3766	151	18	to	to	ADP
ap-3766	151	19	0.5	0.5	NUM
ap-3766	151	20	cm	cm	NOUN
ap-3766	151	21	,	,	PUNCT
ap-3766	151	22	its	its	PRON
ap-3766	151	23	thickness	thickness	NOUN
ap-3766	151	24	h2	h2	NOUN
ap-3766	151	25	is	be	AUX
ap-3766	151	26	0.2	0.2	NUM
ap-3766	151	27	cm	cm	NUM
ap-3766	151	28	,	,	PUNCT
ap-3766	151	29	and	and	CCONJ
ap-3766	151	30	both	both	PRON
ap-3766	151	31	the	the	DET
ap-3766	151	32	disk	disk	NOUN
ap-3766	151	33	and	and	CCONJ
ap-3766	151	34	the	the	DET
ap-3766	151	35	magnetron	magnetron	NOUN
ap-3766	151	36	body	body	NOUN
ap-3766	151	37	are	be	AUX
ap-3766	151	38	made	make	VERB
ap-3766	151	39	of	of	ADP
ap-3766	151	40	copper	copper	NOUN
ap-3766	151	41	.	.	PUNCT
ap-3766	152	1	the	the	DET
ap-3766	152	2	surface	surface	NOUN
ap-3766	152	3	temperature	temperature	NOUN
ap-3766	152	4	of	of	ADP
ap-3766	152	5	the	the	DET
ap-3766	152	6	target	target	NOUN
ap-3766	152	7	increases	increase	VERB
ap-3766	152	8	non	non	ADJ
ap-3766	152	9	-	-	ADJ
ap-3766	152	10	linearly	linearly	ADV
ap-3766	152	11	withwper	withwper	ADJ
ap-3766	152	12	growth	growth	NOUN
ap-3766	152	13	.	.	PUNCT
ap-3766	153	1	the	the	DET
ap-3766	153	2	heat	heat	NOUN
ap-3766	153	3	conductivity	conductivity	NOUN
ap-3766	153	4	value	value	NOUN
ap-3766	153	5	is	be	AUX
ap-3766	153	6	lower	low	ADJ
ap-3766	153	7	than	than	ADP
ap-3766	153	8	for	for	ADP
ap-3766	153	9	complete	complete	ADJ
ap-3766	153	10	insulation	insulation	NOUN
ap-3766	153	11	.	.	PUNCT
ap-3766	154	1	the	the	DET
ap-3766	154	2	developmental	developmental	ADJ
ap-3766	154	3	character	character	NOUN
ap-3766	154	4	of	of	ADP
ap-3766	154	5	the	the	DET
ap-3766	154	6	heating	heating	NOUN
ap-3766	154	7	processes	process	NOUN
ap-3766	154	8	in	in	ADP
ap-3766	154	9	the	the	DET
ap-3766	154	10	target	target	NOUN
ap-3766	154	11	obtained	obtain	VERB
ap-3766	154	12	by	by	ADP
ap-3766	154	13	calculation	calculation	NOUN
ap-3766	154	14	was	be	AUX
ap-3766	154	15	verified	verify	VERB
ap-3766	154	16	by	by	ADP
ap-3766	154	17	the	the	DET
ap-3766	154	18	experimental	experimental	ADJ
ap-3766	154	19	results	result	NOUN
ap-3766	154	20	published	publish	VERB
ap-3766	154	21	in	in	ADP
ap-3766	154	22	[	[	X
ap-3766	154	23	15	15	NUM
ap-3766	154	24	]	]	PUNCT
ap-3766	154	25	.	.	PUNCT
ap-3766	155	1	the	the	DET
ap-3766	155	2	authors	author	NOUN
ap-3766	155	3	measured	measure	VERB
ap-3766	155	4	the	the	DET
ap-3766	155	5	temperature	temperature	NOUN
ap-3766	155	6	evolution	evolution	NOUN
ap-3766	155	7	on	on	ADP
ap-3766	155	8	the	the	DET
ap-3766	155	9	surface	surface	NOUN
ap-3766	155	10	of	of	ADP
ap-3766	155	11	the	the	DET
ap-3766	155	12	ti	ti	NOUN
ap-3766	155	13	target	target	NOUN
ap-3766	155	14	of	of	ADP
ap-3766	155	15	pulsed	pulse	VERB
ap-3766	155	16	mss	mss	NOUN
ap-3766	155	17	with	with	ADP
ap-3766	155	18	an	an	DET
ap-3766	155	19	infrared	infrared	ADJ
ap-3766	155	20	camera	camera	NOUN
ap-3766	155	21	.	.	PUNCT
ap-3766	156	1	the	the	DET
ap-3766	156	2	power	power	NOUN
ap-3766	156	3	supply	supply	NOUN
ap-3766	156	4	frequency	frequency	NOUN
ap-3766	156	5	was	be	AUX
ap-3766	156	6	equal	equal	ADJ
ap-3766	156	7	to	to	ADP
ap-3766	156	8	1	1	NUM
ap-3766	156	9	khz	khz	NOUN
ap-3766	156	10	and	and	CCONJ
ap-3766	156	11	10	10	NUM
ap-3766	156	12	khz	khz	NOUN
ap-3766	156	13	,	,	PUNCT
ap-3766	156	14	and	and	CCONJ
ap-3766	156	15	the	the	DET
ap-3766	156	16	duty	duty	NOUN
ap-3766	156	17	cycle	cycle	NOUN
ap-3766	156	18	was	be	AUX
ap-3766	156	19	20	20	NUM
ap-3766	156	20	%	%	NOUN
ap-3766	156	21	.	.	PUNCT
ap-3766	157	1	the	the	DET
ap-3766	157	2	measured	measure	VERB
ap-3766	157	3	temperature	temperature	NOUN
ap-3766	157	4	values	value	NOUN
ap-3766	157	5	are	be	AUX
ap-3766	157	6	shown	show	VERB
ap-3766	157	7	as	as	ADP
ap-3766	157	8	dots	dot	NOUN
ap-3766	157	9	in	in	ADP
ap-3766	157	10	figure	figure	NOUN
ap-3766	157	11	4	4	NUM
ap-3766	157	12	.	.	PUNCT
ap-3766	158	1	the	the	DET
ap-3766	158	2	good	good	ADJ
ap-3766	158	3	agreement	agreement	NOUN
ap-3766	158	4	between	between	ADP
ap-3766	158	5	the	the	DET
ap-3766	158	6	calculation	calculation	NOUN
ap-3766	158	7	results	result	NOUN
ap-3766	158	8	and	and	CCONJ
ap-3766	158	9	the	the	DET
ap-3766	158	10	experimental	experimental	ADJ
ap-3766	158	11	results	result	NOUN
ap-3766	158	12	gives	give	VERB
ap-3766	158	13	reason	reason	NOUN
ap-3766	158	14	to	to	PART
ap-3766	158	15	believe	believe	VERB
ap-3766	158	16	that	that	SCONJ
ap-3766	158	17	our	our	PRON
ap-3766	158	18	modeling	modeling	NOUN
ap-3766	158	19	representations	representation	NOUN
ap-3766	158	20	of	of	ADP
ap-3766	158	21	the	the	DET
ap-3766	158	22	development	development	NOUN
ap-3766	158	23	of	of	ADP
ap-3766	158	24	the	the	DET
ap-3766	158	25	heating	heating	NOUN
ap-3766	158	26	processes	process	NOUN
ap-3766	158	27	in	in	ADP
ap-3766	158	28	the	the	DET
ap-3766	158	29	target	target	NOUN
ap-3766	158	30	of	of	ADP
ap-3766	158	31	the	the	DET
ap-3766	158	32	pulse	pulse	NOUN
ap-3766	158	33	magnetron	magnetron	NOUN
ap-3766	158	34	are	be	AUX
ap-3766	158	35	correct	correct	ADJ
ap-3766	158	36	.	.	PUNCT
ap-3766	159	1	the	the	DET
ap-3766	159	2	data	datum	NOUN
ap-3766	159	3	from	from	ADP
ap-3766	159	4	figure	figure	NOUN
ap-3766	159	5	4	4	NUM
ap-3766	159	6	indicate	indicate	VERB
ap-3766	159	7	that	that	SCONJ
ap-3766	159	8	at	at	ADP
ap-3766	159	9	low	low	ADJ
ap-3766	159	10	wper	wper	NOUN
ap-3766	159	11	the	the	DET
ap-3766	159	12	target	target	NOUN
ap-3766	159	13	is	be	AUX
ap-3766	159	14	just	just	ADV
ap-3766	159	15	sputtered	sputter	VERB
ap-3766	159	16	.	.	PUNCT
ap-3766	160	1	in	in	ADP
ap-3766	160	2	this	this	DET
ap-3766	160	3	case	case	NOUN
ap-3766	160	4	,	,	PUNCT
ap-3766	160	5	the	the	DET
ap-3766	160	6	deposition	deposition	NOUN
ap-3766	160	7	rate	rate	NOUN
ap-3766	160	8	is	be	AUX
ap-3766	160	9	proportional	proportional	ADJ
ap-3766	160	10	to	to	ADP
ap-3766	160	11	the	the	DET
ap-3766	160	12	power	power	NOUN
ap-3766	160	13	density	density	NOUN
ap-3766	160	14	,	,	PUNCT
ap-3766	160	15	and	and	CCONJ
ap-3766	160	16	is	be	AUX
ap-3766	160	17	no	no	PRON
ap-3766	160	18	more	more	ADJ
ap-3766	160	19	than	than	ADP
ap-3766	160	20	several	several	ADJ
ap-3766	160	21	nm	nm	NOUN
ap-3766	160	22	/	/	SYM
ap-3766	160	23	s.	s.	PROPN
ap-3766	160	24	the	the	DET
ap-3766	160	25	evaporation	evaporation	NOUN
ap-3766	160	26	becomes	become	VERB
ap-3766	160	27	noticeable	noticeable	ADJ
ap-3766	160	28	at	at	ADP
ap-3766	160	29	wper	wper	PROPN
ap-3766	160	30	≈	≈	PROPN
ap-3766	160	31	17w	17w	NOUN
ap-3766	160	32	/	/	SYM
ap-3766	160	33	cm2	cm2	NOUN
ap-3766	160	34	,	,	PUNCT
ap-3766	160	35	when	when	SCONJ
ap-3766	160	36	the	the	DET
ap-3766	160	37	target	target	NOUN
ap-3766	160	38	is	be	AUX
ap-3766	160	39	completely	completely	ADV
ap-3766	160	40	heat	heat	NOUN
ap-3766	160	41	insulated	insulate	VERB
ap-3766	160	42	,	,	PUNCT
ap-3766	160	43	and	and	CCONJ
ap-3766	160	44	at	at	ADP
ap-3766	160	45	28w	28w	NOUN
ap-3766	160	46	/	/	SYM
ap-3766	160	47	cm2	cm2	NOUN
ap-3766	160	48	,	,	PUNCT
ap-3766	160	49	when	when	SCONJ
ap-3766	160	50	figure	figure	NOUN
ap-3766	160	51	5	5	NUM
ap-3766	160	52	.	.	PUNCT
ap-3766	161	1	the	the	DET
ap-3766	161	2	dependence	dependence	NOUN
ap-3766	161	3	of	of	ADP
ap-3766	161	4	the	the	DET
ap-3766	161	5	energy	energy	NOUN
ap-3766	161	6	that	that	PRON
ap-3766	161	7	has	have	VERB
ap-3766	161	8	to	to	PART
ap-3766	161	9	be	be	AUX
ap-3766	161	10	supplied	supply	VERB
ap-3766	161	11	in	in	ADP
ap-3766	161	12	the	the	DET
ap-3766	161	13	ti	ti	NOUN
ap-3766	161	14	target	target	NOUN
ap-3766	161	15	to	to	PART
ap-3766	161	16	remove	remove	VERB
ap-3766	161	17	one	one	NUM
ap-3766	161	18	atom	atom	NOUN
ap-3766	161	19	from	from	ADP
ap-3766	161	20	its	its	PRON
ap-3766	161	21	surface	surface	NOUN
ap-3766	161	22	(	(	PUNCT
ap-3766	161	23	ea	ea	NOUN
ap-3766	161	24	)	)	PUNCT
ap-3766	161	25	on	on	ADP
ap-3766	161	26	the	the	DET
ap-3766	161	27	ion	ion	NOUN
ap-3766	161	28	current	current	ADJ
ap-3766	161	29	power	power	NOUN
ap-3766	161	30	density	density	NOUN
ap-3766	161	31	averaged	average	VERB
ap-3766	161	32	over	over	ADP
ap-3766	161	33	period	period	NOUN
ap-3766	161	34	(	(	PUNCT
ap-3766	161	35	wper	wper	NOUN
ap-3766	161	36	)	)	PUNCT
ap-3766	161	37	for	for	ADP
ap-3766	161	38	complete	complete	ADJ
ap-3766	161	39	heat	heat	NOUN
ap-3766	161	40	conduction	conduction	NOUN
ap-3766	161	41	insulation	insulation	NOUN
ap-3766	161	42	(	(	PUNCT
ap-3766	161	43	“	"	PUNCT
ap-3766	161	44	wc	wc	PROPN
ap-3766	161	45	”	"	PUNCT
ap-3766	161	46	)	)	PUNCT
ap-3766	161	47	and	and	CCONJ
ap-3766	161	48	for	for	ADP
ap-3766	161	49	partial	partial	ADJ
ap-3766	161	50	heat	heat	NOUN
ap-3766	161	51	conduction	conduction	NOUN
ap-3766	161	52	insulation	insulation	NOUN
ap-3766	161	53	(	(	PUNCT
ap-3766	161	54	“	"	PUNCT
ap-3766	161	55	c	c	NOUN
ap-3766	161	56	”	"	PUNCT
ap-3766	161	57	)	)	PUNCT
ap-3766	161	58	of	of	ADP
ap-3766	161	59	the	the	DET
ap-3766	161	60	target	target	NOUN
ap-3766	161	61	.	.	PUNCT
ap-3766	162	1	the	the	DET
ap-3766	162	2	target	target	NOUN
ap-3766	162	3	has	have	VERB
ap-3766	162	4	a	a	DET
ap-3766	162	5	partial	partial	ADJ
ap-3766	162	6	heat	heat	NOUN
ap-3766	162	7	conductive	conductive	ADJ
ap-3766	162	8	contact	contact	NOUN
ap-3766	162	9	with	with	ADP
ap-3766	162	10	the	the	DET
ap-3766	162	11	cooled	cool	VERB
ap-3766	162	12	magnetron	magnetron	NOUN
ap-3766	162	13	body	body	NOUN
ap-3766	162	14	.	.	PUNCT
ap-3766	163	1	at	at	ADP
ap-3766	163	2	wper	wper	NOUN
ap-3766	163	3	≈	≈	PROPN
ap-3766	163	4	24.2	24.2	NUM
ap-3766	163	5	and	and	CCONJ
ap-3766	163	6	40w	40w	NOUN
ap-3766	163	7	/	/	SYM
ap-3766	163	8	cm2	cm2	PROPN
ap-3766	163	9	,	,	PUNCT
ap-3766	163	10	the	the	DET
ap-3766	163	11	deposition	deposition	NOUN
ap-3766	163	12	rates	rate	NOUN
ap-3766	163	13	due	due	ADP
ap-3766	163	14	to	to	ADP
ap-3766	163	15	evaporation	evaporation	NOUN
ap-3766	163	16	and	and	CCONJ
ap-3766	163	17	sputtering	sputtering	NOUN
ap-3766	163	18	are	be	AUX
ap-3766	163	19	approximately	approximately	ADV
ap-3766	163	20	the	the	DET
ap-3766	163	21	same	same	ADJ
ap-3766	163	22	.	.	PUNCT
ap-3766	164	1	at	at	ADP
ap-3766	164	2	higher	high	ADJ
ap-3766	164	3	power	power	NOUN
ap-3766	164	4	of	of	ADP
ap-3766	164	5	the	the	DET
ap-3766	164	6	magnetron	magnetron	NOUN
ap-3766	164	7	,	,	PUNCT
ap-3766	164	8	the	the	DET
ap-3766	164	9	evaporation	evaporation	NOUN
ap-3766	164	10	component	component	NOUN
ap-3766	164	11	in	in	ADP
ap-3766	164	12	the	the	DET
ap-3766	164	13	deposited	deposit	VERB
ap-3766	164	14	flux	flux	NOUN
ap-3766	164	15	rapidly	rapidly	ADV
ap-3766	164	16	becomes	become	VERB
ap-3766	164	17	predominant	predominant	ADJ
ap-3766	164	18	.	.	PUNCT
ap-3766	165	1	the	the	DET
ap-3766	165	2	calculations	calculation	NOUN
ap-3766	165	3	show	show	VERB
ap-3766	165	4	that	that	SCONJ
ap-3766	165	5	the	the	DET
ap-3766	165	6	increase	increase	NOUN
ap-3766	165	7	in	in	ADP
ap-3766	165	8	the	the	DET
ap-3766	165	9	ti	ti	NOUN
ap-3766	165	10	coating	coat	VERB
ap-3766	165	11	growth	growth	NOUN
ap-3766	165	12	rate	rate	NOUN
ap-3766	165	13	because	because	SCONJ
ap-3766	165	14	of	of	ADP
ap-3766	165	15	the	the	DET
ap-3766	165	16	evaporation	evaporation	NOUN
ap-3766	165	17	from	from	ADP
ap-3766	165	18	the	the	DET
ap-3766	165	19	hot	hot	ADJ
ap-3766	165	20	target	target	NOUN
ap-3766	165	21	can	can	AUX
ap-3766	165	22	be	be	AUX
ap-3766	165	23	about	about	ADV
ap-3766	165	24	five	five	NUM
ap-3766	165	25	times	time	NOUN
ap-3766	165	26	higher	high	ADJ
ap-3766	165	27	than	than	ADP
ap-3766	165	28	for	for	ADP
ap-3766	165	29	usual	usual	ADJ
ap-3766	165	30	sputtering	sputtering	NOUN
ap-3766	165	31	with	with	ADP
ap-3766	165	32	complete	complete	ADJ
ap-3766	165	33	cooling	cooling	NOUN
ap-3766	165	34	of	of	ADP
ap-3766	165	35	the	the	DET
ap-3766	165	36	target	target	NOUN
ap-3766	165	37	.	.	PUNCT
ap-3766	166	1	when	when	SCONJ
ap-3766	166	2	there	there	PRON
ap-3766	166	3	are	be	VERB
ap-3766	166	4	a	a	DET
ap-3766	166	5	significant	significant	ADJ
ap-3766	166	6	number	number	NOUN
ap-3766	166	7	of	of	ADP
ap-3766	166	8	evaporated	evaporate	VERB
ap-3766	166	9	particles	particle	NOUN
ap-3766	166	10	,	,	PUNCT
ap-3766	166	11	the	the	DET
ap-3766	166	12	dependence	dependence	NOUN
ap-3766	166	13	vdep(wper	vdep(wper	NOUN
ap-3766	166	14	)	)	PUNCT
ap-3766	166	15	becomes	become	VERB
ap-3766	166	16	nonlinear	nonlinear	ADJ
ap-3766	166	17	.	.	PUNCT
ap-3766	167	1	in	in	ADP
ap-3766	167	2	this	this	DET
ap-3766	167	3	case	case	NOUN
ap-3766	167	4	,	,	PUNCT
ap-3766	167	5	the	the	DET
ap-3766	167	6	amount	amount	NOUN
ap-3766	167	7	of	of	ADP
ap-3766	167	8	energy	energy	NOUN
ap-3766	167	9	ea	ea	NOUN
ap-3766	167	10	that	that	PRON
ap-3766	167	11	should	should	AUX
ap-3766	167	12	be	be	AUX
ap-3766	167	13	transferred	transfer	VERB
ap-3766	167	14	to	to	ADP
ap-3766	167	15	the	the	DET
ap-3766	167	16	target	target	NOUN
ap-3766	167	17	from	from	ADP
ap-3766	167	18	the	the	DET
ap-3766	167	19	plasma	plasma	NOUN
ap-3766	167	20	in	in	ADP
ap-3766	167	21	order	order	NOUN
ap-3766	167	22	to	to	PART
ap-3766	167	23	remove	remove	VERB
ap-3766	167	24	an	an	DET
ap-3766	167	25	atom	atom	NOUN
ap-3766	167	26	from	from	ADP
ap-3766	167	27	its	its	PRON
ap-3766	167	28	surface	surface	NOUN
ap-3766	167	29	decreases	decrease	NOUN
ap-3766	167	30	.	.	PUNCT
ap-3766	168	1	this	this	DET
ap-3766	168	2	parameter	parameter	NOUN
ap-3766	168	3	was	be	AUX
ap-3766	168	4	calculated	calculate	VERB
ap-3766	168	5	as	as	ADP
ap-3766	168	6	:	:	PUNCT
ap-3766	168	7	ea	ea	NOUN
ap-3766	168	8	=	=	SYM
ap-3766	168	9	wper	wper	PROPN
ap-3766	168	10	verosion	verosion	NOUN
ap-3766	168	11	(	(	PUNCT
ap-3766	168	12	7	7	NUM
ap-3766	168	13	)	)	PUNCT
ap-3766	168	14	figure	figure	NOUN
ap-3766	168	15	5	5	NUM
ap-3766	168	16	presents	present	VERB
ap-3766	168	17	the	the	DET
ap-3766	168	18	dependence	dependence	NOUN
ap-3766	168	19	of	of	ADP
ap-3766	168	20	ea(wper	ea(wper	NOUN
ap-3766	168	21	)	)	PUNCT
ap-3766	168	22	for	for	ADP
ap-3766	168	23	cases	case	NOUN
ap-3766	168	24	of	of	ADP
ap-3766	168	25	complete	complete	ADJ
ap-3766	168	26	and	and	CCONJ
ap-3766	168	27	partial	partial	ADJ
ap-3766	168	28	target	target	NOUN
ap-3766	168	29	heat	heat	NOUN
ap-3766	168	30	insulation	insulation	NOUN
ap-3766	168	31	(	(	PUNCT
ap-3766	168	32	the	the	DET
ap-3766	168	33	partial	partial	ADJ
ap-3766	168	34	insulation	insulation	NOUN
ap-3766	168	35	scheme	scheme	NOUN
ap-3766	168	36	is	be	AUX
ap-3766	168	37	similar	similar	ADJ
ap-3766	168	38	to	to	ADP
ap-3766	168	39	the	the	DET
ap-3766	168	40	previously	previously	ADV
ap-3766	168	41	described	describe	VERB
ap-3766	168	42	scheme	scheme	NOUN
ap-3766	168	43	)	)	PUNCT
ap-3766	168	44	.	.	PUNCT
ap-3766	169	1	when	when	SCONJ
ap-3766	169	2	there	there	PRON
ap-3766	169	3	is	be	VERB
ap-3766	169	4	only	only	ADV
ap-3766	169	5	sputtering	sputtering	ADJ
ap-3766	169	6	,	,	PUNCT
ap-3766	169	7	ea	ea	NUM
ap-3766	169	8	is	be	AUX
ap-3766	169	9	equal	equal	ADJ
ap-3766	169	10	to	to	ADP
ap-3766	169	11	224	224	NUM
ap-3766	169	12	ev	ev	NOUN
ap-3766	169	13	/	/	SYM
ap-3766	169	14	atom	atom	NOUN
ap-3766	169	15	.	.	PUNCT
ap-3766	170	1	the	the	DET
ap-3766	170	2	presence	presence	NOUN
ap-3766	170	3	of	of	ADP
ap-3766	170	4	evaporation	evaporation	NOUN
ap-3766	170	5	reduces	reduce	VERB
ap-3766	170	6	this	this	DET
ap-3766	170	7	value	value	NOUN
ap-3766	170	8	to	to	ADP
ap-3766	170	9	42.2	42.2	NUM
ap-3766	170	10	ev	ev	NOUN
ap-3766	170	11	/	/	SYM
ap-3766	170	12	atom	atom	NOUN
ap-3766	170	13	,	,	PUNCT
ap-3766	170	14	i.e.	i.e.	X
ap-3766	170	15	,	,	PUNCT
ap-3766	170	16	almost	almost	ADV
ap-3766	170	17	fivefold	fivefold	ADJ
ap-3766	170	18	.	.	PUNCT
ap-3766	171	1	the	the	DET
ap-3766	171	2	change	change	NOUN
ap-3766	171	3	in	in	ADP
ap-3766	171	4	the	the	DET
ap-3766	171	5	energy	energy	NOUN
ap-3766	171	6	losses	loss	NOUN
ap-3766	171	7	from	from	ADP
ap-3766	171	8	the	the	DET
ap-3766	171	9	ti	ti	NOUN
ap-3766	171	10	target	target	NOUN
ap-3766	171	11	depending	depend	VERB
ap-3766	171	12	on	on	ADP
ap-3766	171	13	the	the	DET
ap-3766	171	14	period	period	NOUN
ap-3766	171	15	averaged	average	VERB
ap-3766	171	16	ion	ion	NOUN
ap-3766	171	17	current	current	ADJ
ap-3766	171	18	power	power	NOUN
ap-3766	171	19	density	density	NOUN
ap-3766	171	20	is	be	AUX
ap-3766	171	21	shown	show	VERB
ap-3766	171	22	in	in	ADP
ap-3766	171	23	figure	figure	NOUN
ap-3766	171	24	6	6	NUM
ap-3766	171	25	.	.	PUNCT
ap-3766	172	1	the	the	DET
ap-3766	172	2	cases	case	NOUN
ap-3766	172	3	of	of	ADP
ap-3766	172	4	complete	complete	ADJ
ap-3766	172	5	insulation	insulation	NOUN
ap-3766	172	6	and	and	CCONJ
ap-3766	172	7	(	(	PUNCT
ap-3766	172	8	the	the	DET
ap-3766	172	9	scheme	scheme	NOUN
ap-3766	172	10	described	describe	VERB
ap-3766	172	11	above	above	ADV
ap-3766	172	12	)	)	PUNCT
ap-3766	172	13	are	be	AUX
ap-3766	172	14	analyzed	analyze	VERB
ap-3766	172	15	here	here	ADV
ap-3766	172	16	.	.	PUNCT
ap-3766	173	1	in	in	ADP
ap-3766	173	2	the	the	DET
ap-3766	173	3	case	case	NOUN
ap-3766	173	4	of	of	ADP
ap-3766	173	5	complete	complete	ADJ
ap-3766	173	6	insulation	insulation	NOUN
ap-3766	173	7	,	,	PUNCT
ap-3766	173	8	the	the	DET
ap-3766	173	9	main	main	ADJ
ap-3766	173	10	energy	energy	NOUN
ap-3766	173	11	loss	loss	NOUN
ap-3766	173	12	is	be	AUX
ap-3766	173	13	through	through	ADP
ap-3766	173	14	heat	heat	NOUN
ap-3766	173	15	radiation	radiation	NOUN
ap-3766	173	16	within	within	ADP
ap-3766	173	17	all	all	DET
ap-3766	173	18	the	the	DET
ap-3766	173	19	possible	possible	ADJ
ap-3766	173	20	range	range	NOUN
ap-3766	173	21	of	of	ADP
ap-3766	173	22	the	the	DET
ap-3766	173	23	mss	mss	PROPN
ap-3766	173	24	power	power	NOUN
ap-3766	173	25	density	density	PROPN
ap-3766	173	26	.	.	PUNCT
ap-3766	174	1	in	in	ADP
ap-3766	174	2	the	the	DET
ap-3766	174	3	case	case	NOUN
ap-3766	174	4	of	of	ADP
ap-3766	174	5	partial	partial	ADJ
ap-3766	174	6	cooling	cooling	NOUN
ap-3766	174	7	,	,	PUNCT
ap-3766	174	8	the	the	DET
ap-3766	174	9	main	main	ADJ
ap-3766	174	10	energy	energy	NOUN
ap-3766	174	11	loss	loss	NOUN
ap-3766	174	12	at	at	ADP
ap-3766	174	13	low	low	ADJ
ap-3766	174	14	power	power	NOUN
ap-3766	174	15	is	be	AUX
ap-3766	174	16	through	through	ADP
ap-3766	174	17	heat	heat	NOUN
ap-3766	174	18	conduction	conduction	NOUN
ap-3766	174	19	from	from	ADP
ap-3766	174	20	the	the	DET
ap-3766	174	21	target	target	NOUN
ap-3766	174	22	.	.	PUNCT
ap-3766	175	1	then	then	ADV
ap-3766	175	2	heat	heat	NOUN
ap-3766	175	3	radiation	radiation	NOUN
ap-3766	175	4	becomes	become	VERB
ap-3766	175	5	predominant	predominant	ADJ
ap-3766	175	6	.	.	PUNCT
ap-3766	176	1	about	about	ADV
ap-3766	176	2	0.9	0.9	NUM
ap-3766	176	3	%	%	NOUN
ap-3766	176	4	of	of	ADP
ap-3766	176	5	the	the	DET
ap-3766	176	6	energy	energy	NOUN
ap-3766	176	7	from	from	ADP
ap-3766	176	8	the	the	DET
ap-3766	176	9	plasma	plasma	NOUN
ap-3766	176	10	is	be	AUX
ap-3766	176	11	spent	spend	VERB
ap-3766	176	12	on	on	ADP
ap-3766	176	13	sputtering	sputter	VERB
ap-3766	176	14	.	.	PUNCT
ap-3766	177	1	429	429	NUM
ap-3766	177	2	a.	a.	NOUN
ap-3766	177	3	o.	o.	PROPN
ap-3766	177	4	borduleva	borduleva	PROPN
ap-3766	177	5	,	,	PUNCT
ap-3766	177	6	g.	g.	PROPN
ap-3766	177	7	a.	a.	PROPN
ap-3766	177	8	bleykher	bleykher	PROPN
ap-3766	177	9	,	,	PUNCT
ap-3766	177	10	d.	d.	PROPN
ap-3766	177	11	v.	v.	PROPN
ap-3766	177	12	sidelev	sidelev	PROPN
ap-3766	177	13	,	,	PUNCT
ap-3766	177	14	v.	v.	PROPN
ap-3766	177	15	p.	p.	PROPN
ap-3766	177	16	krivobokov	krivobokov	PROPN
ap-3766	178	1	acta	acta	PROPN
ap-3766	178	2	polytechnica	polytechnica	PROPN
ap-3766	178	3	target	target	NOUN
ap-3766	178	4	material	material	NOUN
ap-3766	178	5	wion	wion	NOUN
ap-3766	178	6	(	(	PUNCT
ap-3766	178	7	w	w	NOUN
ap-3766	178	8	/	/	SYM
ap-3766	178	9	cm2	cm2	NOUN
ap-3766	178	10	)	)	PUNCT
ap-3766	178	11	tsurf	tsurf	ADJ
ap-3766	178	12	,	,	PUNCT
ap-3766	178	13	max	max	PROPN
ap-3766	178	14	/	/	SYM
ap-3766	178	15	tmelt	tmelt	VERB
ap-3766	178	16	vev	vev	NOUN
ap-3766	178	17	(	(	PUNCT
ap-3766	178	18	nm	nm	NOUN
ap-3766	178	19	/	/	SYM
ap-3766	178	20	s	s	NOUN
ap-3766	178	21	)	)	PUNCT
ap-3766	178	22	vsput	vsput	NOUN
ap-3766	178	23	,	,	PUNCT
ap-3766	178	24	per	per	X
ap-3766	178	25	(	(	PUNCT
ap-3766	178	26	nm	nm	NOUN
ap-3766	178	27	/	/	SYM
ap-3766	178	28	s	s	NOUN
ap-3766	178	29	)	)	PUNCT
ap-3766	178	30	cr	cr	NOUN
ap-3766	178	31	12.7	12.7	NUM
ap-3766	178	32	0.8	0.8	NUM
ap-3766	178	33	190	190	NUM
ap-3766	178	34	130	130	NUM
ap-3766	178	35	ti	ti	NOUN
ap-3766	178	36	24.2	24.2	NUM
ap-3766	178	37	1	1	NUM
ap-3766	178	38	270	270	NUM
ap-3766	178	39	280	280	NUM
ap-3766	178	40	zn	zn	NUM
ap-3766	178	41	1.66	1.66	NUM
ap-3766	178	42	0.9	0.9	NUM
ap-3766	178	43	78	78	NUM
ap-3766	178	44	81	81	NUM
ap-3766	178	45	cu	cu	NOUN
ap-3766	178	46	58.6	58.6	NUM
ap-3766	178	47	1.2	1.2	NUM
ap-3766	178	48	360	360	NUM
ap-3766	178	49	980	980	NUM
ap-3766	178	50	table	table	NOUN
ap-3766	178	51	1	1	NUM
ap-3766	178	52	.	.	PUNCT
ap-3766	179	1	pure	pure	ADJ
ap-3766	179	2	metals	metal	NOUN
ap-3766	179	3	that	that	PRON
ap-3766	179	4	can	can	AUX
ap-3766	179	5	be	be	AUX
ap-3766	179	6	used	use	VERB
ap-3766	179	7	as	as	ADP
ap-3766	179	8	a	a	DET
ap-3766	179	9	hot	hot	ADJ
ap-3766	179	10	target	target	NOUN
ap-3766	179	11	in	in	ADP
ap-3766	179	12	mss	mss	PROPN
ap-3766	179	13	(	(	PUNCT
ap-3766	179	14	wion	wion	NOUN
ap-3766	179	15	)	)	PUNCT
ap-3766	179	16	is	be	AUX
ap-3766	179	17	ion	ion	NOUN
ap-3766	179	18	current	current	ADJ
ap-3766	179	19	power	power	NOUN
ap-3766	179	20	density	density	NOUN
ap-3766	179	21	,	,	PUNCT
ap-3766	179	22	tsurf	tsurf	ADJ
ap-3766	179	23	,	,	PUNCT
ap-3766	179	24	max	max	PROPN
ap-3766	179	25	/	/	SYM
ap-3766	179	26	tmelt	tmelt	PRON
ap-3766	179	27	is	be	AUX
ap-3766	179	28	the	the	DET
ap-3766	179	29	ratio	ratio	NOUN
ap-3766	179	30	of	of	ADP
ap-3766	179	31	the	the	DET
ap-3766	179	32	maximum	maximum	ADJ
ap-3766	179	33	target	target	NOUN
ap-3766	179	34	surface	surface	NOUN
ap-3766	179	35	temperature	temperature	NOUN
ap-3766	179	36	to	to	ADP
ap-3766	179	37	the	the	DET
ap-3766	179	38	target	target	NOUN
ap-3766	179	39	melting	melting	NOUN
ap-3766	179	40	temperature	temperature	NOUN
ap-3766	179	41	,	,	PUNCT
ap-3766	179	42	vev	vev	ADV
ap-3766	179	43	is	be	AUX
ap-3766	179	44	the	the	DET
ap-3766	179	45	evaporation	evaporation	NOUN
ap-3766	179	46	rate	rate	NOUN
ap-3766	179	47	,	,	PUNCT
ap-3766	179	48	vsput	vsput	NOUN
ap-3766	179	49	,	,	PUNCT
ap-3766	179	50	per	per	ADP
ap-3766	179	51	is	be	AUX
ap-3766	179	52	the	the	DET
ap-3766	179	53	period	period	NOUN
ap-3766	179	54	averaged	average	VERB
ap-3766	179	55	sputtering	sputtering	ADJ
ap-3766	179	56	rate	rate	NOUN
ap-3766	179	57	)	)	PUNCT
ap-3766	179	58	.	.	PUNCT
ap-3766	180	1	the	the	DET
ap-3766	180	2	cooling	cool	VERB
ap-3766	180	3	system	system	NOUN
ap-3766	180	4	was	be	AUX
ap-3766	180	5	as	as	ADP
ap-3766	180	6	in	in	ADP
ap-3766	180	7	figure	figure	NOUN
ap-3766	180	8	1a	1a	NOUN
ap-3766	180	9	.	.	PUNCT
ap-3766	181	1	calculations	calculation	NOUN
ap-3766	181	2	were	be	AUX
ap-3766	181	3	carried	carry	VERB
ap-3766	181	4	out	out	ADP
ap-3766	181	5	at	at	ADP
ap-3766	181	6	ν	ν	X
ap-3766	181	7	=	=	SYM
ap-3766	181	8	1	1	NUM
ap-3766	181	9	khz	khz	NOUN
ap-3766	181	10	,	,	PUNCT
ap-3766	181	11	δ	δ	PROPN
ap-3766	181	12	=	=	PUNCT
ap-3766	181	13	20	20	NUM
ap-3766	181	14	%	%	NOUN
ap-3766	181	15	.	.	PUNCT
ap-3766	182	1	figure	figure	NOUN
ap-3766	182	2	6	6	NUM
ap-3766	182	3	.	.	PUNCT
ap-3766	183	1	dependence	dependence	NOUN
ap-3766	183	2	of	of	ADP
ap-3766	183	3	the	the	DET
ap-3766	183	4	power	power	NOUN
ap-3766	183	5	density	density	NOUN
ap-3766	183	6	of	of	ADP
ap-3766	183	7	the	the	DET
ap-3766	183	8	energy	energy	NOUN
ap-3766	183	9	losses	loss	NOUN
ap-3766	183	10	from	from	ADP
ap-3766	183	11	the	the	DET
ap-3766	183	12	ti	ti	NOUN
ap-3766	183	13	target	target	NOUN
ap-3766	183	14	for	for	ADP
ap-3766	183	15	complete	complete	ADJ
ap-3766	183	16	heat	heat	NOUN
ap-3766	183	17	insulation	insulation	NOUN
ap-3766	183	18	(	(	PUNCT
ap-3766	183	19	superscript	superscript	PROPN
ap-3766	183	20	“	"	PUNCT
ap-3766	183	21	wc	wc	PROPN
ap-3766	183	22	”	"	PUNCT
ap-3766	183	23	)	)	PUNCT
ap-3766	183	24	and	and	CCONJ
ap-3766	183	25	for	for	ADP
ap-3766	183	26	partial	partial	ADJ
ap-3766	183	27	heat	heat	NOUN
ap-3766	183	28	insulation	insulation	NOUN
ap-3766	183	29	(	(	PUNCT
ap-3766	183	30	superscript	superscript	NOUN
ap-3766	183	31	“	"	PUNCT
ap-3766	183	32	c	c	NOUN
ap-3766	183	33	”	"	PUNCT
ap-3766	183	34	)	)	PUNCT
ap-3766	183	35	according	accord	VERB
ap-3766	183	36	to	to	PART
ap-3766	183	37	figure	figure	VERB
ap-3766	183	38	1c	1c	NOUN
ap-3766	183	39	on	on	ADP
ap-3766	183	40	the	the	DET
ap-3766	183	41	ion	ion	NOUN
ap-3766	183	42	current	current	ADJ
ap-3766	183	43	power	power	NOUN
ap-3766	183	44	density	density	NOUN
ap-3766	183	45	averaged	average	VERB
ap-3766	183	46	over	over	ADP
ap-3766	183	47	the	the	DET
ap-3766	183	48	period	period	NOUN
ap-3766	183	49	.	.	PUNCT
ap-3766	184	1	qrad	qrad	PROPN
ap-3766	184	2	is	be	AUX
ap-3766	184	3	heat	heat	NOUN
ap-3766	184	4	radiation	radiation	NOUN
ap-3766	184	5	,	,	PUNCT
ap-3766	184	6	qhc	qhc	PROPN
ap-3766	184	7	is	be	AUX
ap-3766	184	8	heat	heat	NOUN
ap-3766	184	9	conduction	conduction	NOUN
ap-3766	184	10	,	,	PUNCT
ap-3766	184	11	qev	qev	NOUN
ap-3766	184	12	is	be	AUX
ap-3766	184	13	energy	energy	NOUN
ap-3766	184	14	for	for	ADP
ap-3766	184	15	evaporation	evaporation	NOUN
ap-3766	184	16	,	,	PUNCT
ap-3766	184	17	qsput	qsput	PROPN
ap-3766	184	18	is	be	AUX
ap-3766	184	19	the	the	DET
ap-3766	184	20	energy	energy	NOUN
ap-3766	184	21	taken	take	VERB
ap-3766	184	22	away	away	ADV
ap-3766	184	23	by	by	ADP
ap-3766	184	24	sputtered	sputtered	ADJ
ap-3766	184	25	particles	particle	NOUN
ap-3766	184	26	.	.	PUNCT
ap-3766	185	1	the	the	DET
ap-3766	185	2	thickness	thickness	NOUN
ap-3766	185	3	of	of	ADP
ap-3766	185	4	the	the	DET
ap-3766	185	5	target	target	NOUN
ap-3766	185	6	is	be	AUX
ap-3766	185	7	0.6	0.6	NUM
ap-3766	185	8	cm	cm	NOUN
ap-3766	185	9	.	.	PUNCT
ap-3766	186	1	the	the	DET
ap-3766	186	2	evaporation	evaporation	NOUN
ap-3766	186	3	consumption	consumption	NOUN
ap-3766	186	4	within	within	ADP
ap-3766	186	5	the	the	DET
ap-3766	186	6	power	power	NOUN
ap-3766	186	7	range	range	NOUN
ap-3766	186	8	suitable	suitable	ADJ
ap-3766	186	9	for	for	ADP
ap-3766	186	10	implementing	implement	VERB
ap-3766	186	11	the	the	DET
ap-3766	186	12	solid	solid	ADJ
ap-3766	186	13	hot	hot	ADJ
ap-3766	186	14	target	target	NOUN
ap-3766	186	15	mode	mode	NOUN
ap-3766	186	16	does	do	AUX
ap-3766	186	17	not	not	PART
ap-3766	186	18	exceed	exceed	VERB
ap-3766	186	19	a	a	DET
ap-3766	186	20	few	few	ADJ
ap-3766	186	21	percent	percent	NOUN
ap-3766	186	22	.	.	PUNCT
ap-3766	187	1	in	in	ADP
ap-3766	187	2	this	this	DET
ap-3766	187	3	way	way	NOUN
ap-3766	187	4	,	,	PUNCT
ap-3766	187	5	the	the	DET
ap-3766	187	6	mode	mode	NOUN
ap-3766	187	7	of	of	ADP
ap-3766	187	8	erosion	erosion	NOUN
ap-3766	187	9	from	from	ADP
ap-3766	187	10	the	the	DET
ap-3766	187	11	solid	solid	ADJ
ap-3766	187	12	phase	phase	NOUN
ap-3766	187	13	is	be	AUX
ap-3766	187	14	different	different	ADJ
ap-3766	187	15	from	from	ADP
ap-3766	187	16	the	the	DET
ap-3766	187	17	mss	mss	NOUN
ap-3766	187	18	with	with	ADP
ap-3766	187	19	the	the	DET
ap-3766	187	20	liquid	liquid	ADJ
ap-3766	187	21	phase	phase	NOUN
ap-3766	187	22	,	,	PUNCT
ap-3766	187	23	when	when	SCONJ
ap-3766	187	24	plasma	plasma	NOUN
ap-3766	187	25	energy	energy	NOUN
ap-3766	187	26	consumption	consumption	NOUN
ap-3766	187	27	by	by	ADP
ap-3766	187	28	atom	atom	NOUN
ap-3766	187	29	evaporation	evaporation	NOUN
ap-3766	187	30	may	may	AUX
ap-3766	187	31	become	become	VERB
ap-3766	187	32	predominant	predominant	ADJ
ap-3766	187	33	[	[	X
ap-3766	187	34	5	5	NUM
ap-3766	187	35	]	]	PUNCT
ap-3766	187	36	.	.	PUNCT
ap-3766	188	1	a	a	DET
ap-3766	188	2	combination	combination	NOUN
ap-3766	188	3	of	of	ADP
ap-3766	188	4	evaporation	evaporation	NOUN
ap-3766	188	5	and	and	CCONJ
ap-3766	188	6	sputtering	sputtering	NOUN
ap-3766	188	7	with	with	ADP
ap-3766	188	8	the	the	DET
ap-3766	188	9	target	target	NOUN
ap-3766	188	10	kept	keep	VERB
ap-3766	188	11	primarily	primarily	ADV
ap-3766	188	12	in	in	ADP
ap-3766	188	13	the	the	DET
ap-3766	188	14	solid	solid	ADJ
ap-3766	188	15	state	state	NOUN
ap-3766	188	16	is	be	AUX
ap-3766	188	17	possible	possible	ADJ
ap-3766	188	18	only	only	ADV
ap-3766	188	19	for	for	ADP
ap-3766	188	20	some	some	DET
ap-3766	188	21	materials	material	NOUN
ap-3766	188	22	.	.	PUNCT
ap-3766	189	1	table	table	NOUN
ap-3766	189	2	1	1	NUM
ap-3766	189	3	presents	present	NOUN
ap-3766	189	4	data	datum	NOUN
ap-3766	189	5	for	for	ADP
ap-3766	189	6	pure	pure	ADJ
ap-3766	189	7	metals	metal	NOUN
ap-3766	189	8	;	;	PUNCT
ap-3766	189	9	they	they	PRON
ap-3766	189	10	characterize	characterize	VERB
ap-3766	189	11	the	the	DET
ap-3766	189	12	situation	situation	NOUN
ap-3766	189	13	when	when	SCONJ
ap-3766	189	14	the	the	DET
ap-3766	189	15	evaporation	evaporation	NOUN
ap-3766	189	16	rate	rate	NOUN
ap-3766	189	17	on	on	ADP
ap-3766	189	18	the	the	DET
ap-3766	189	19	surface	surface	NOUN
ap-3766	189	20	of	of	ADP
ap-3766	189	21	the	the	DET
ap-3766	189	22	target	target	NOUN
ap-3766	189	23	in	in	ADP
ap-3766	189	24	the	the	DET
ap-3766	189	25	steady	steady	ADJ
ap-3766	189	26	thermal	thermal	ADJ
ap-3766	189	27	mode	mode	NOUN
ap-3766	189	28	is	be	AUX
ap-3766	189	29	approximately	approximately	ADV
ap-3766	189	30	equal	equal	ADJ
ap-3766	189	31	to	to	ADP
ap-3766	189	32	the	the	DET
ap-3766	189	33	period	period	NOUN
ap-3766	189	34	averaged	average	VERB
ap-3766	189	35	sputtering	sputtering	ADJ
ap-3766	189	36	rate	rate	NOUN
ap-3766	189	37	.	.	PUNCT
ap-3766	190	1	here	here	ADV
ap-3766	190	2	vev	vev	NOUN
ap-3766	190	3	is	be	AUX
ap-3766	190	4	the	the	DET
ap-3766	190	5	highest	high	ADJ
ap-3766	190	6	value	value	NOUN
ap-3766	190	7	on	on	ADP
ap-3766	190	8	the	the	DET
ap-3766	190	9	surface	surface	NOUN
ap-3766	190	10	,	,	PUNCT
ap-3766	190	11	and	and	CCONJ
ap-3766	190	12	vsput	vsput	VERB
ap-3766	190	13	,	,	PUNCT
ap-3766	190	14	per	per	ADP
ap-3766	190	15	corresponds	correspond	NOUN
ap-3766	190	16	to	to	ADP
ap-3766	190	17	the	the	DET
ap-3766	190	18	area	area	NOUN
ap-3766	190	19	with	with	ADP
ap-3766	190	20	the	the	DET
ap-3766	190	21	maximum	maximum	ADJ
ap-3766	190	22	power	power	NOUN
ap-3766	190	23	density	density	NOUN
ap-3766	190	24	.	.	PUNCT
ap-3766	191	1	calculations	calculation	NOUN
ap-3766	191	2	were	be	AUX
ap-3766	191	3	carried	carry	VERB
ap-3766	191	4	out	out	ADP
ap-3766	191	5	for	for	ADP
ap-3766	191	6	complete	complete	ADJ
ap-3766	191	7	heat	heat	NOUN
ap-3766	191	8	insulation	insulation	NOUN
ap-3766	191	9	of	of	ADP
ap-3766	191	10	the	the	DET
ap-3766	191	11	target	target	NOUN
ap-3766	191	12	.	.	PUNCT
ap-3766	192	1	titanium	titanium	NOUN
ap-3766	192	2	,	,	PUNCT
ap-3766	192	3	chromium	chromium	NOUN
ap-3766	192	4	and	and	CCONJ
ap-3766	192	5	zinc	zinc	NOUN
ap-3766	192	6	are	be	AUX
ap-3766	192	7	pure	pure	ADJ
ap-3766	192	8	metals	metal	NOUN
ap-3766	192	9	for	for	ADP
ap-3766	192	10	which	which	PRON
ap-3766	192	11	,	,	PUNCT
ap-3766	192	12	when	when	SCONJ
ap-3766	192	13	they	they	PRON
ap-3766	192	14	are	be	AUX
ap-3766	192	15	sputtered	sputter	VERB
ap-3766	192	16	from	from	ADP
ap-3766	192	17	a	a	DET
ap-3766	192	18	hot	hot	ADJ
ap-3766	192	19	solid	solid	ADJ
ap-3766	192	20	target	target	NOUN
ap-3766	192	21	,	,	PUNCT
ap-3766	192	22	enhancement	enhancement	NOUN
ap-3766	192	23	of	of	ADP
ap-3766	192	24	the	the	DET
ap-3766	192	25	coating	coat	VERB
ap-3766	192	26	deposition	deposition	NOUN
ap-3766	192	27	rate	rate	NOUN
ap-3766	192	28	due	due	ADP
ap-3766	192	29	to	to	ADP
ap-3766	192	30	the	the	DET
ap-3766	192	31	evaporating	evaporating	NOUN
ap-3766	192	32	component	component	NOUN
ap-3766	192	33	can	can	AUX
ap-3766	192	34	be	be	AUX
ap-3766	192	35	expected	expect	VERB
ap-3766	192	36	.	.	PUNCT
ap-3766	193	1	copper	copper	NOUN
ap-3766	193	2	is	be	AUX
ap-3766	193	3	not	not	PART
ap-3766	193	4	suitable	suitable	ADJ
ap-3766	193	5	for	for	ADP
ap-3766	193	6	this	this	DET
ap-3766	193	7	purpose	purpose	NOUN
ap-3766	193	8	.	.	PUNCT
ap-3766	194	1	4	4	X
ap-3766	194	2	.	.	X
ap-3766	194	3	conclusion	conclusion	NOUN
ap-3766	194	4	local	local	ADJ
ap-3766	194	5	evaporation	evaporation	NOUN
ap-3766	194	6	(	(	PUNCT
ap-3766	194	7	including	include	VERB
ap-3766	194	8	sublimation	sublimation	NOUN
ap-3766	194	9	)	)	PUNCT
ap-3766	194	10	on	on	ADP
ap-3766	194	11	the	the	DET
ap-3766	194	12	surface	surface	NOUN
ap-3766	194	13	of	of	ADP
ap-3766	194	14	the	the	DET
ap-3766	194	15	mss	mss	PROPN
ap-3766	194	16	solid	solid	ADJ
ap-3766	194	17	hot	hot	ADJ
ap-3766	194	18	target	target	NOUN
ap-3766	194	19	is	be	AUX
ap-3766	194	20	a	a	DET
ap-3766	194	21	significant	significant	ADJ
ap-3766	194	22	factor	factor	NOUN
ap-3766	194	23	for	for	ADP
ap-3766	194	24	enhancing	enhance	VERB
ap-3766	194	25	the	the	DET
ap-3766	194	26	coating	coat	VERB
ap-3766	194	27	deposition	deposition	NOUN
ap-3766	194	28	rate	rate	NOUN
ap-3766	194	29	.	.	PUNCT
ap-3766	195	1	its	its	PRON
ap-3766	195	2	contribution	contribution	NOUN
ap-3766	195	3	is	be	AUX
ap-3766	195	4	determined	determine	VERB
ap-3766	195	5	by	by	ADP
ap-3766	195	6	the	the	DET
ap-3766	195	7	mss	mss	PROPN
ap-3766	195	8	period	period	NOUN
ap-3766	195	9	averaged	average	VERB
ap-3766	195	10	power	power	NOUN
ap-3766	195	11	density	density	NOUN
ap-3766	195	12	and	and	CCONJ
ap-3766	195	13	by	by	ADP
ap-3766	195	14	the	the	DET
ap-3766	195	15	thermophysical	thermophysical	ADJ
ap-3766	195	16	properties	property	NOUN
ap-3766	195	17	of	of	ADP
ap-3766	195	18	the	the	DET
ap-3766	195	19	target	target	NOUN
ap-3766	195	20	.	.	PUNCT
ap-3766	196	1	for	for	ADP
ap-3766	196	2	magnetrons	magnetron	NOUN
ap-3766	196	3	with	with	ADP
ap-3766	196	4	a	a	DET
ap-3766	196	5	completely	completely	ADV
ap-3766	196	6	heat	heat	NOUN
ap-3766	196	7	insulated	insulate	VERB
ap-3766	196	8	ti	ti	NOUN
ap-3766	196	9	target	target	NOUN
ap-3766	196	10	,	,	PUNCT
ap-3766	196	11	a	a	DET
ap-3766	196	12	contribution	contribution	NOUN
ap-3766	196	13	of	of	ADP
ap-3766	196	14	evaporation	evaporation	NOUN
ap-3766	196	15	that	that	PRON
ap-3766	196	16	is	be	AUX
ap-3766	196	17	commensurate	commensurate	ADJ
ap-3766	196	18	with	with	ADP
ap-3766	196	19	sputtering	sputtering	NOUN
ap-3766	196	20	occurs	occur	VERB
ap-3766	196	21	at	at	ADP
ap-3766	196	22	about	about	ADP
ap-3766	196	23	24w	24w	NOUN
ap-3766	196	24	/	/	SYM
ap-3766	196	25	cm2	cm2	NOUN
ap-3766	196	26	.	.	PROPN
ap-3766	196	27	in	in	ADP
ap-3766	196	28	this	this	DET
ap-3766	196	29	case	case	NOUN
ap-3766	196	30	,	,	PUNCT
ap-3766	196	31	the	the	DET
ap-3766	196	32	power	power	NOUN
ap-3766	196	33	limit	limit	NOUN
ap-3766	196	34	is	be	AUX
ap-3766	196	35	equal	equal	ADJ
ap-3766	196	36	to	to	ADP
ap-3766	196	37	40w	40w	NOUN
ap-3766	196	38	/	/	SYM
ap-3766	197	1	cm2	cm2	NOUN
ap-3766	197	2	.	.	PROPN
ap-3766	198	1	above	above	ADP
ap-3766	198	2	this	this	DET
ap-3766	198	3	limit	limit	NOUN
ap-3766	198	4	,	,	PUNCT
ap-3766	198	5	the	the	DET
ap-3766	198	6	target	target	NOUN
ap-3766	198	7	can	can	AUX
ap-3766	198	8	melt	melt	VERB
ap-3766	198	9	significantly	significantly	ADV
ap-3766	198	10	and	and	CCONJ
ap-3766	198	11	lose	lose	VERB
ap-3766	198	12	its	its	PRON
ap-3766	198	13	shape	shape	NOUN
ap-3766	198	14	.	.	PUNCT
ap-3766	199	1	due	due	ADP
ap-3766	199	2	to	to	ADP
ap-3766	199	3	evaporation	evaporation	NOUN
ap-3766	199	4	,	,	PUNCT
ap-3766	199	5	the	the	DET
ap-3766	199	6	deposition	deposition	NOUN
ap-3766	199	7	rate	rate	NOUN
ap-3766	199	8	of	of	ADP
ap-3766	199	9	a	a	DET
ap-3766	199	10	ti	ti	NOUN
ap-3766	199	11	coating	coating	NOUN
ap-3766	199	12	can	can	AUX
ap-3766	199	13	be	be	AUX
ap-3766	199	14	increased	increase	VERB
ap-3766	199	15	by	by	ADP
ap-3766	199	16	about	about	ADV
ap-3766	199	17	five	five	NUM
ap-3766	199	18	times	time	NOUN
ap-3766	199	19	in	in	ADP
ap-3766	199	20	comparison	comparison	NOUN
ap-3766	199	21	with	with	ADP
ap-3766	199	22	a	a	DET
ap-3766	199	23	completely	completely	ADV
ap-3766	199	24	cooled	cool	VERB
ap-3766	199	25	target	target	NOUN
ap-3766	199	26	.	.	PUNCT
ap-3766	200	1	creating	create	VERB
ap-3766	200	2	evaporation	evaporation	NOUN
ap-3766	200	3	on	on	ADP
ap-3766	200	4	the	the	DET
ap-3766	200	5	surface	surface	NOUN
ap-3766	200	6	of	of	ADP
ap-3766	200	7	a	a	DET
ap-3766	200	8	high	high	ADJ
ap-3766	200	9	-	-	PUNCT
ap-3766	200	10	power	power	NOUN
ap-3766	200	11	pulsed	pulse	VERB
ap-3766	200	12	magnetron	magnetron	NOUN
ap-3766	200	13	target	target	NOUN
ap-3766	200	14	by	by	ADP
ap-3766	200	15	insulating	insulate	VERB
ap-3766	200	16	it	it	PRON
ap-3766	200	17	thermally	thermally	ADV
ap-3766	200	18	could	could	AUX
ap-3766	200	19	be	be	AUX
ap-3766	200	20	a	a	DET
ap-3766	200	21	way	way	NOUN
ap-3766	200	22	to	to	PART
ap-3766	200	23	increase	increase	VERB
ap-3766	200	24	the	the	DET
ap-3766	200	25	coating	coating	NOUN
ap-3766	200	26	deposition	deposition	NOUN
ap-3766	200	27	rate	rate	NOUN
ap-3766	200	28	,	,	PUNCT
ap-3766	200	29	due	due	ADP
ap-3766	200	30	to	to	ADP
ap-3766	200	31	the	the	DET
ap-3766	200	32	fact	fact	NOUN
ap-3766	200	33	that	that	SCONJ
ap-3766	200	34	it	it	PRON
ap-3766	200	35	occurs	occur	VERB
ap-3766	200	36	continuously	continuously	ADV
ap-3766	200	37	,	,	PUNCT
ap-3766	200	38	and	and	CCONJ
ap-3766	200	39	the	the	DET
ap-3766	200	40	particles	particle	NOUN
ap-3766	200	41	removed	remove	VERB
ap-3766	200	42	from	from	ADP
ap-3766	200	43	the	the	DET
ap-3766	200	44	surface	surface	NOUN
ap-3766	200	45	between	between	ADP
ap-3766	200	46	pulses	pulse	NOUN
ap-3766	200	47	will	will	AUX
ap-3766	200	48	not	not	PART
ap-3766	200	49	be	be	AUX
ap-3766	200	50	involved	involve	VERB
ap-3766	200	51	in	in	ADP
ap-3766	200	52	the	the	DET
ap-3766	200	53	ionization	ionization	NOUN
ap-3766	200	54	processes	process	NOUN
ap-3766	200	55	near	near	ADP
ap-3766	200	56	the	the	DET
ap-3766	200	57	target	target	NOUN
ap-3766	200	58	.	.	PUNCT
ap-3766	201	1	it	it	PRON
ap-3766	201	2	has	have	AUX
ap-3766	201	3	been	be	AUX
ap-3766	201	4	found	find	VERB
ap-3766	201	5	that	that	SCONJ
ap-3766	201	6	the	the	DET
ap-3766	201	7	non	non	NOUN
ap-3766	201	8	-	-	NOUN
ap-3766	201	9	uniformity	uniformity	NOUN
ap-3766	201	10	of	of	ADP
ap-3766	201	11	the	the	DET
ap-3766	201	12	direct	direct	ADJ
ap-3766	201	13	-	-	PUNCT
ap-3766	201	14	axis	axis	NOUN
ap-3766	201	15	component	component	NOUN
ap-3766	201	16	of	of	ADP
ap-3766	201	17	a	a	DET
ap-3766	201	18	magnetic	magnetic	ADJ
ap-3766	201	19	induction	induction	NOUN
ap-3766	201	20	vector	vector	NOUN
ap-3766	201	21	is	be	AUX
ap-3766	201	22	conducive	conducive	ADJ
ap-3766	201	23	to	to	ADP
ap-3766	201	24	heating	heating	NOUN
ap-3766	201	25	localization	localization	NOUN
ap-3766	201	26	and	and	CCONJ
ap-3766	201	27	increases	increase	VERB
ap-3766	201	28	the	the	DET
ap-3766	201	29	evaporation	evaporation	NOUN
ap-3766	201	30	rate	rate	NOUN
ap-3766	201	31	on	on	ADP
ap-3766	201	32	the	the	DET
ap-3766	201	33	surface	surface	NOUN
ap-3766	201	34	of	of	ADP
ap-3766	201	35	the	the	DET
ap-3766	201	36	target	target	NOUN
ap-3766	201	37	.	.	PUNCT
ap-3766	202	1	the	the	DET
ap-3766	202	2	occurrence	occurrence	NOUN
ap-3766	202	3	of	of	ADP
ap-3766	202	4	evaporation	evaporation	NOUN
ap-3766	202	5	reduces	reduce	VERB
ap-3766	202	6	the	the	DET
ap-3766	202	7	plasma	plasma	NOUN
ap-3766	202	8	energy	energy	NOUN
ap-3766	202	9	that	that	PRON
ap-3766	202	10	is	be	AUX
ap-3766	202	11	needed	need	VERB
ap-3766	202	12	to	to	PART
ap-3766	202	13	remove	remove	VERB
ap-3766	202	14	one	one	NUM
ap-3766	202	15	atom	atom	NOUN
ap-3766	202	16	from	from	ADP
ap-3766	202	17	the	the	DET
ap-3766	202	18	surface	surface	NOUN
ap-3766	202	19	of	of	ADP
ap-3766	202	20	a	a	DET
ap-3766	202	21	solid	solid	ADJ
ap-3766	202	22	target	target	NOUN
ap-3766	202	23	.	.	PUNCT
ap-3766	203	1	the	the	DET
ap-3766	203	2	amount	amount	NOUN
ap-3766	203	3	that	that	PRON
ap-3766	203	4	is	be	AUX
ap-3766	203	5	required	require	VERB
ap-3766	203	6	can	can	AUX
ap-3766	203	7	be	be	AUX
ap-3766	203	8	about	about	ADV
ap-3766	203	9	5	5	NUM
ap-3766	203	10	times	time	NOUN
ap-3766	203	11	less	less	ADJ
ap-3766	203	12	than	than	ADP
ap-3766	203	13	for	for	ADP
ap-3766	203	14	a	a	DET
ap-3766	203	15	completely	completely	ADV
ap-3766	203	16	cooled	cool	VERB
ap-3766	203	17	target	target	NOUN
ap-3766	203	18	.	.	PUNCT
ap-3766	204	1	the	the	DET
ap-3766	204	2	main	main	ADJ
ap-3766	204	3	energy	energy	NOUN
ap-3766	204	4	flow	flow	NOUN
ap-3766	204	5	from	from	ADP
ap-3766	204	6	a	a	DET
ap-3766	204	7	hot	hot	ADJ
ap-3766	204	8	solid	solid	ADJ
ap-3766	204	9	target	target	NOUN
ap-3766	204	10	is	be	AUX
ap-3766	204	11	heat	heat	NOUN
ap-3766	204	12	radiation	radiation	NOUN
ap-3766	204	13	.	.	PUNCT
ap-3766	205	1	not	not	PART
ap-3766	205	2	more	more	ADJ
ap-3766	205	3	than	than	ADP
ap-3766	205	4	a	a	DET
ap-3766	205	5	few	few	ADJ
ap-3766	205	6	percent	percent	NOUN
ap-3766	205	7	of	of	ADP
ap-3766	205	8	the	the	DET
ap-3766	205	9	plasma	plasma	NOUN
ap-3766	205	10	energy	energy	NOUN
ap-3766	205	11	is	be	AUX
ap-3766	205	12	spent	spend	VERB
ap-3766	205	13	on	on	ADP
ap-3766	205	14	removing	remove	VERB
ap-3766	205	15	particles	particle	NOUN
ap-3766	205	16	from	from	ADP
ap-3766	205	17	the	the	DET
ap-3766	205	18	surface	surface	NOUN
ap-3766	205	19	of	of	ADP
ap-3766	205	20	the	the	DET
ap-3766	205	21	target	target	NOUN
ap-3766	205	22	surface	surface	NOUN
ap-3766	205	23	,	,	PUNCT
ap-3766	205	24	even	even	ADV
ap-3766	205	25	in	in	ADP
ap-3766	205	26	the	the	DET
ap-3766	205	27	case	case	NOUN
ap-3766	205	28	of	of	ADP
ap-3766	205	29	complete	complete	ADJ
ap-3766	205	30	heat	heat	NOUN
ap-3766	205	31	insulation	insulation	NOUN
ap-3766	205	32	.	.	PUNCT
ap-3766	206	1	acknowledgements	acknowledgement	NOUN
ap-3766	206	2	this	this	DET
ap-3766	206	3	research	research	NOUN
ap-3766	206	4	was	be	AUX
ap-3766	206	5	supported	support	VERB
ap-3766	206	6	by	by	ADP
ap-3766	206	7	the	the	DET
ap-3766	206	8	russian	russian	ADJ
ap-3766	206	9	foundation	foundation	NOUN
ap-3766	206	10	for	for	ADP
ap-3766	206	11	basic	basic	ADJ
ap-3766	206	12	research	research	NOUN
ap-3766	206	13	(	(	PUNCT
ap-3766	206	14	project	project	NOUN
ap-3766	206	15	15	15	NUM
ap-3766	206	16	-	-	SYM
ap-3766	206	17	08	08	NUM
ap-3766	206	18	-	-	PUNCT
ap-3766	206	19	01632	01632	NUM
ap-3766	206	20	)	)	PUNCT
ap-3766	206	21	.	.	PUNCT
ap-3766	207	1	references	reference	NOUN
ap-3766	207	2	[	[	X
ap-3766	207	3	1	1	NUM
ap-3766	207	4	]	]	PUNCT
ap-3766	207	5	sputtering	sputtering	NOUN
ap-3766	207	6	by	by	ADP
ap-3766	207	7	particle	particle	NOUN
ap-3766	207	8	bombardment	bombardment	NOUN
ap-3766	207	9	i.	i.	PROPN
ap-3766	207	10	springer	springer	PROPN
ap-3766	207	11	berlin	berlin	PROPN
ap-3766	207	12	heidelberg	heidelberg	PROPN
ap-3766	207	13	.	.	PUNCT
ap-3766	208	1	edited	edit	VERB
ap-3766	208	2	by	by	ADP
ap-3766	208	3	behrisch	behrisch	PROPN
ap-3766	208	4	,	,	PUNCT
ap-3766	208	5	r.	r.	PROPN
ap-3766	208	6	,	,	PUNCT
ap-3766	208	7	1981	1981	NUM
ap-3766	208	8	.	.	PUNCT
ap-3766	209	1	doi:10.1007/3	doi:10.1007/3	PROPN
ap-3766	209	2	-	-	PUNCT
ap-3766	209	3	540	540	NUM
ap-3766	209	4	-	-	PUNCT
ap-3766	209	5	10521	10521	NUM
ap-3766	209	6	-	-	SYM
ap-3766	209	7	2	2	NUM
ap-3766	209	8	[	[	X
ap-3766	209	9	2	2	NUM
ap-3766	209	10	]	]	X
ap-3766	209	11	anders	ander	NOUN
ap-3766	209	12	,	,	PUNCT
ap-3766	209	13	a.	a.	NOUN
ap-3766	209	14	:	:	PUNCT
ap-3766	209	15	deposition	deposition	NOUN
ap-3766	209	16	rates	rate	NOUN
ap-3766	209	17	of	of	ADP
ap-3766	209	18	high	high	ADJ
ap-3766	209	19	power	power	NOUN
ap-3766	209	20	impulse	impulse	ADJ
ap-3766	209	21	magnetron	magnetron	NOUN
ap-3766	209	22	sputtering	sputtering	NOUN
ap-3766	209	23	:	:	PUNCT
ap-3766	209	24	physics	physics	NOUN
ap-3766	209	25	and	and	CCONJ
ap-3766	209	26	economics	economic	NOUN
ap-3766	209	27	.	.	PUNCT
ap-3766	210	1	j.	j.	PROPN
ap-3766	210	2	vac	vac	PROPN
ap-3766	210	3	.	.	PUNCT
ap-3766	211	1	sci	sci	PROPN
ap-3766	211	2	.	.	PROPN
ap-3766	211	3	technol	technol	PROPN
ap-3766	211	4	.	.	PUNCT
ap-3766	212	1	a	a	DET
ap-3766	212	2	28	28	NUM
ap-3766	212	3	,	,	PUNCT
ap-3766	212	4	783	783	NUM
ap-3766	212	5	,	,	PUNCT
ap-3766	212	6	2010	2010	NUM
ap-3766	212	7	.	.	PUNCT
ap-3766	213	1	doi:10.1116/1.3299267	doi:10.1116/1.3299267	VERB
ap-3766	213	2	430	430	NUM
ap-3766	213	3	http://dx.doi.org/10.1007/3-540-10521-2	http://dx.doi.org/10.1007/3-540-10521-2	NOUN
ap-3766	213	4	http://dx.doi.org/10.1116/1.3299267	http://dx.doi.org/10.1116/1.3299267	PROPN
ap-3766	213	5	vol	vol	NOUN
ap-3766	213	6	.	.	PUNCT
ap-3766	214	1	56	56	NUM
ap-3766	214	2	no	no	NOUN
ap-3766	214	3	.	.	PUNCT
ap-3766	215	1	6/2016	6/2016	NUM
ap-3766	215	2	magnetron	magnetron	NOUN
ap-3766	215	3	sputtering	sputter	VERB
ap-3766	215	4	with	with	ADP
ap-3766	215	5	hot	hot	ADJ
ap-3766	215	6	solid	solid	ADJ
ap-3766	215	7	target	target	NOUN
ap-3766	215	8	[	[	X
ap-3766	215	9	3	3	NUM
ap-3766	215	10	]	]	PUNCT
ap-3766	215	11	bleykher	bleykher	NOUN
ap-3766	215	12	,	,	PUNCT
ap-3766	215	13	g.a	g.a	PROPN
ap-3766	215	14	.	.	PROPN
ap-3766	215	15	et	et	PROPN
ap-3766	215	16	al	al	PROPN
ap-3766	215	17	.	.	PROPN
ap-3766	215	18	:	:	PUNCT
ap-3766	215	19	thermal	thermal	ADJ
ap-3766	215	20	processes	process	NOUN
ap-3766	215	21	and	and	CCONJ
ap-3766	215	22	emission	emission	NOUN
ap-3766	215	23	of	of	ADP
ap-3766	215	24	atoms	atom	NOUN
ap-3766	215	25	from	from	ADP
ap-3766	215	26	the	the	DET
ap-3766	215	27	liquid	liquid	ADJ
ap-3766	215	28	phase	phase	NOUN
ap-3766	215	29	target	target	NOUN
ap-3766	215	30	surface	surface	NOUN
ap-3766	215	31	of	of	ADP
ap-3766	215	32	magnetron	magnetron	NOUN
ap-3766	215	33	sputtering	sputtering	NOUN
ap-3766	215	34	system	system	NOUN
ap-3766	215	35	.	.	PUNCT
ap-3766	216	1	russ	russ	PROPN
ap-3766	216	2	phys	phy	NOUN
ap-3766	216	3	j	j	PROPN
ap-3766	216	4	58	58	NUM
ap-3766	216	5	:	:	PUNCT
ap-3766	216	6	431	431	NUM
ap-3766	216	7	,	,	PUNCT
ap-3766	216	8	2015	2015	NUM
ap-3766	216	9	.	.	PUNCT
ap-3766	217	1	doi:10.1007	doi:10.1007	VERB
ap-3766	217	2	/	/	SYM
ap-3766	217	3	s11182	s11182	NOUN
ap-3766	217	4	-	-	PUNCT
ap-3766	217	5	015	015	NUM
ap-3766	217	6	-	-	PUNCT
ap-3766	217	7	0517	0517	NUM
ap-3766	217	8	-	-	SYM
ap-3766	217	9	6	6	NUM
ap-3766	218	1	[	[	SYM
ap-3766	218	2	4	4	NUM
ap-3766	218	3	]	]	PUNCT
ap-3766	218	4	bleykher	bleykher	NOUN
ap-3766	218	5	,	,	PUNCT
ap-3766	218	6	g.a	g.a	PROPN
ap-3766	218	7	.	.	PROPN
ap-3766	218	8	et	et	PROPN
ap-3766	218	9	al	al	PROPN
ap-3766	218	10	.	.	PROPN
ap-3766	218	11	:	:	PUNCT
ap-3766	219	1	magnetron	magnetron	VERB
ap-3766	219	2	deposition	deposition	NOUN
ap-3766	219	3	of	of	ADP
ap-3766	219	4	coatings	coating	NOUN
ap-3766	219	5	with	with	ADP
ap-3766	219	6	evaporation	evaporation	NOUN
ap-3766	219	7	of	of	ADP
ap-3766	219	8	the	the	DET
ap-3766	219	9	target	target	NOUN
ap-3766	219	10	.	.	PUNCT
ap-3766	220	1	tech	tech	NOUN
ap-3766	220	2	.	.	PUNCT
ap-3766	221	1	phys	phy	NOUN
ap-3766	221	2	.	.	PUNCT
ap-3766	222	1	60	60	NUM
ap-3766	222	2	:	:	SYM
ap-3766	222	3	1790	1790	NUM
ap-3766	222	4	,	,	PUNCT
ap-3766	222	5	2015	2015	NUM
ap-3766	222	6	.	.	PUNCT
ap-3766	223	1	doi:10.1134	doi:10.1134	NOUN
ap-3766	223	2	/	/	SYM
ap-3766	223	3	s1063784215120026	s1063784215120026	PROPN
ap-3766	224	1	[	[	X
ap-3766	224	2	5	5	NUM
ap-3766	224	3	]	]	PUNCT
ap-3766	224	4	bleykher	bleykher	NOUN
ap-3766	224	5	,	,	PUNCT
ap-3766	224	6	g.a	g.a	PROPN
ap-3766	224	7	.	.	PROPN
ap-3766	224	8	et	et	PROPN
ap-3766	224	9	al	al	PROPN
ap-3766	224	10	.	.	PROPN
ap-3766	224	11	:	:	PUNCT
ap-3766	225	1	energy	energy	NOUN
ap-3766	225	2	and	and	CCONJ
ap-3766	225	3	substance	substance	NOUN
ap-3766	225	4	transfer	transfer	NOUN
ap-3766	225	5	in	in	ADP
ap-3766	225	6	magnetron	magnetron	ADJ
ap-3766	225	7	sputtering	sputtering	NOUN
ap-3766	225	8	systems	system	NOUN
ap-3766	225	9	with	with	ADP
ap-3766	225	10	liquid	liquid	NOUN
ap-3766	225	11	-	-	PUNCT
ap-3766	225	12	phase	phase	NOUN
ap-3766	225	13	target	target	NOUN
ap-3766	225	14	.	.	PUNCT
ap-3766	226	1	vacuum	vacuum	NOUN
ap-3766	226	2	v.	v.	ADP
ap-3766	226	3	124	124	NUM
ap-3766	226	4	:	:	PUNCT
ap-3766	226	5	11	11	NUM
ap-3766	226	6	-	-	SYM
ap-3766	226	7	17	17	NUM
ap-3766	226	8	,	,	PUNCT
ap-3766	226	9	2016	2016	NUM
ap-3766	226	10	.	.	PUNCT
ap-3766	227	1	doi:10.1016	doi:10.1016	PROPN
ap-3766	227	2	/	/	SYM
ap-3766	227	3	j.vacuum.2015.11.009	j.vacuum.2015.11.009	PROPN
ap-3766	228	1	[	[	X
ap-3766	228	2	6	6	NUM
ap-3766	228	3	]	]	PUNCT
ap-3766	228	4	vlček	vlček	PROPN
ap-3766	228	5	,	,	PUNCT
ap-3766	228	6	j.	j.	PROPN
ap-3766	228	7	et	et	PROPN
ap-3766	228	8	al	al	PROPN
ap-3766	228	9	.	.	PROPN
ap-3766	228	10	:	:	PUNCT
ap-3766	228	11	pulsed	pulse	VERB
ap-3766	228	12	magnetron	magnetron	NOUN
ap-3766	228	13	sputtering	sputtering	NOUN
ap-3766	228	14	of	of	ADP
ap-3766	228	15	metallic	metallic	ADJ
ap-3766	228	16	films	film	NOUN
ap-3766	228	17	using	use	VERB
ap-3766	228	18	a	a	DET
ap-3766	228	19	hot	hot	ADJ
ap-3766	228	20	target	target	NOUN
ap-3766	228	21	.	.	PUNCT
ap-3766	229	1	in	in	ADP
ap-3766	229	2	society	society	NOUN
ap-3766	229	3	of	of	ADP
ap-3766	229	4	vacuum	vacuum	NOUN
ap-3766	229	5	coaters	coater	NOUN
ap-3766	229	6	:	:	PUNCT
ap-3766	229	7	technical	technical	ADJ
ap-3766	229	8	conference	conference	NOUN
ap-3766	229	9	proceedings	proceeding	NOUN
ap-3766	229	10	.	.	PUNCT
ap-3766	230	1	santa	santa	PROPN
ap-3766	230	2	clara	clara	PROPN
ap-3766	230	3	:	:	PUNCT
ap-3766	230	4	society	society	NOUN
ap-3766	230	5	of	of	ADP
ap-3766	230	6	vacuum	vacuum	NOUN
ap-3766	230	7	coaters	coater	NOUN
ap-3766	230	8	:	:	PUNCT
ap-3766	230	9	219	219	NUM
ap-3766	230	10	-	-	SYM
ap-3766	230	11	223	223	NUM
ap-3766	230	12	,	,	PUNCT
ap-3766	230	13	2009	2009	NUM
ap-3766	230	14	.	.	PUNCT
ap-3766	231	1	https://www.scopus.com/record/display.uri?eid=	https://www.scopus.com/record/display.uri?eid=	NOUN
ap-3766	231	2	2	2	NUM
ap-3766	231	3	-	-	PUNCT
ap-3766	231	4	s2.0	s2.0	PROPN
ap-3766	231	5	-	-	PUNCT
ap-3766	231	6	77749242269&origin	77749242269&origin	NUM
ap-3766	231	7	=	=	NOUN
ap-3766	231	8	inward&txgid=0	inward&txgid=0	PROPN
ap-3766	232	1	[	[	X
ap-3766	232	2	7	7	NUM
ap-3766	232	3	]	]	SYM
ap-3766	232	4	mercs	mercs	NOUN
ap-3766	232	5	,	,	PUNCT
ap-3766	232	6	d.	d.	PROPN
ap-3766	232	7	et	et	PROPN
ap-3766	232	8	al	al	PROPN
ap-3766	232	9	.	.	PROPN
ap-3766	232	10	:	:	PUNCT
ap-3766	233	1	hot	hot	ADJ
ap-3766	233	2	target	target	NOUN
ap-3766	233	3	sputtering	sputtering	NOUN
ap-3766	233	4	:	:	PUNCT
ap-3766	233	5	a	a	DET
ap-3766	233	6	new	new	ADJ
ap-3766	233	7	way	way	NOUN
ap-3766	233	8	for	for	ADP
ap-3766	233	9	high	high	ADJ
ap-3766	233	10	-	-	PUNCT
ap-3766	233	11	rate	rate	NOUN
ap-3766	233	12	deposition	deposition	NOUN
ap-3766	233	13	of	of	ADP
ap-3766	233	14	stoichiometric	stoichiometric	ADJ
ap-3766	233	15	ceramic	ceramic	ADJ
ap-3766	233	16	films	film	NOUN
ap-3766	233	17	.	.	PUNCT
ap-3766	234	1	surf	surf	NOUN
ap-3766	234	2	.	.	PUNCT
ap-3766	235	1	coat	coat	NOUN
ap-3766	235	2	.	.	PUNCT
ap-3766	236	1	technol	technol	NOUN
ap-3766	236	2	.	.	PUNCT
ap-3766	237	1	201	201	NUM
ap-3766	237	2	:	:	PUNCT
ap-3766	237	3	2276	2276	NUM
ap-3766	237	4	-	-	SYM
ap-3766	237	5	2281	2281	NUM
ap-3766	237	6	,	,	PUNCT
ap-3766	237	7	2006	2006	NUM
ap-3766	237	8	.	.	PUNCT
ap-3766	238	1	doi	doi	NOUN
ap-3766	238	2	:	:	PUNCT
ap-3766	238	3	10.1016	10.1016	NUM
ap-3766	238	4	/	/	SYM
ap-3766	238	5	j.surfcoat.2006.03.035	j.surfcoat.2006.03.035	NOUN
ap-3766	238	6	.	.	PUNCT
ap-3766	239	1	[	[	X
ap-3766	239	2	8	8	NUM
ap-3766	239	3	]	]	PUNCT
ap-3766	239	4	čyvienė	čyvienė	NOUN
ap-3766	239	5	,	,	PUNCT
ap-3766	239	6	j.	j.	PROPN
ap-3766	239	7	et	et	PROPN
ap-3766	239	8	al	al	PROPN
ap-3766	239	9	.	.	PUNCT
ap-3766	239	10	:	:	PUNCT
ap-3766	240	1	lithuanian	lithuanian	PROPN
ap-3766	240	2	j.	j.	PROPN
ap-3766	240	3	phys	phys	PROPN
ap-3766	240	4	.	.	PUNCT
ap-3766	241	1	44	44	NUM
ap-3766	241	2	:	:	PUNCT
ap-3766	241	3	353–358	353–358	NUM
ap-3766	241	4	,	,	PUNCT
ap-3766	241	5	2004	2004	NUM
ap-3766	241	6	.	.	PUNCT
ap-3766	242	1	http://www.itpa.lt/~lfd/lfz/445/05/ljp44505.pdf	http://www.itpa.lt/~lfd/lfz/445/05/ljp44505.pdf	NOUN
ap-3766	243	1	[	[	X
ap-3766	243	2	9	9	NUM
ap-3766	243	3	]	]	PUNCT
ap-3766	243	4	behrish	behrish	PROPN
ap-3766	243	5	,	,	PUNCT
ap-3766	243	6	r.	r.	PROPN
ap-3766	243	7	et	et	PROPN
ap-3766	243	8	al	al	PROPN
ap-3766	243	9	.	.	PROPN
ap-3766	243	10	:	:	PUNCT
ap-3766	243	11	sputtering	sputter	VERB
ap-3766	243	12	yield	yield	NOUN
ap-3766	243	13	increase	increase	NOUN
ap-3766	243	14	with	with	ADP
ap-3766	243	15	target	target	NOUN
ap-3766	243	16	temperature	temperature	NOUN
ap-3766	243	17	for	for	ADP
ap-3766	243	18	ar	ar	PROPN
ap-3766	243	19	.	.	PROPN
ap-3766	243	20	nucl	nucl	PROPN
ap-3766	243	21	.	.	PUNCT
ap-3766	244	1	instr	instr	PROPN
ap-3766	244	2	.	.	PROPN
ap-3766	244	3	and	and	CCONJ
ap-3766	244	4	meth	meth	NOUN
ap-3766	244	5	.	.	PUNCT
ap-3766	245	1	in	in	ADP
ap-3766	245	2	phys	phy	NOUN
ap-3766	245	3	.	.	PUNCT
ap-3766	246	1	res	re	NOUN
ap-3766	246	2	.	.	PUNCT
ap-3766	247	1	b.	b.	PROPN
ap-3766	248	1	v.	v.	ADP
ap-3766	248	2	82	82	NUM
ap-3766	248	3	:	:	PUNCT
ap-3766	248	4	255	255	NUM
ap-3766	248	5	-	-	SYM
ap-3766	248	6	258	258	NUM
ap-3766	248	7	,	,	PUNCT
ap-3766	248	8	1993	1993	NUM
ap-3766	248	9	.	.	PUNCT
ap-3766	249	1	doi:10.1016/0168	doi:10.1016/0168	NOUN
ap-3766	249	2	-	-	PUNCT
ap-3766	249	3	583x(93)96027	583x(93)96027	NUM
ap-3766	249	4	-	-	PUNCT
ap-3766	249	5	a	a	DET
ap-3766	249	6	[	[	X
ap-3766	249	7	10	10	NUM
ap-3766	249	8	]	]	X
ap-3766	249	9	coventry	coventry	NOUN
ap-3766	249	10	,	,	PUNCT
ap-3766	249	11	m.d	m.d	PROPN
ap-3766	249	12	.	.	PROPN
ap-3766	249	13	et	et	PROPN
ap-3766	249	14	al	al	PROPN
ap-3766	249	15	.	.	PROPN
ap-3766	249	16	:	:	PUNCT
ap-3766	250	1	temperature	temperature	NOUN
ap-3766	250	2	dependence	dependence	NOUN
ap-3766	250	3	of	of	ADP
ap-3766	250	4	liquid	liquid	ADJ
ap-3766	250	5	sn	sn	NOUN
ap-3766	250	6	sputtering	sputtering	NOUN
ap-3766	250	7	by	by	ADP
ap-3766	250	8	low	low	ADJ
ap-3766	250	9	-	-	PUNCT
ap-3766	250	10	energy	energy	NOUN
ap-3766	250	11	he+	he+	NOUN
ap-3766	250	12	and	and	CCONJ
ap-3766	250	13	d+	d+	PROPN
ap-3766	250	14	bombardment	bombardment	NOUN
ap-3766	250	15	.	.	PUNCT
ap-3766	250	16	journal	journal	PROPN
ap-3766	250	17	of	of	ADP
ap-3766	250	18	nuclear	nuclear	ADJ
ap-3766	250	19	materials	material	NOUN
ap-3766	250	20	v.	v.	ADP
ap-3766	250	21	335	335	NUM
ap-3766	250	22	:	:	PUNCT
ap-3766	250	23	115–120	115–120	NUM
ap-3766	250	24	,	,	PUNCT
ap-3766	250	25	2004	2004	NUM
ap-3766	250	26	.	.	PUNCT
ap-3766	251	1	doi:10.1016	doi:10.1016	PROPN
ap-3766	251	2	/	/	SYM
ap-3766	251	3	j.jnucmat.2004.06.009	j.jnucmat.2004.06.009	PROPN
ap-3766	252	1	[	[	X
ap-3766	252	2	11	11	NUM
ap-3766	252	3	]	]	X
ap-3766	252	4	grossman	grossman	NOUN
ap-3766	252	5	,	,	PUNCT
ap-3766	252	6	a.	a.	PROPN
ap-3766	252	7	et	et	PROPN
ap-3766	252	8	al	al	PROPN
ap-3766	252	9	.	.	PUNCT
ap-3766	252	10	:	:	PUNCT
ap-3766	253	1	surface	surface	NOUN
ap-3766	253	2	tension	tension	NOUN
ap-3766	253	3	enhancement	enhancement	NOUN
ap-3766	253	4	of	of	ADP
ap-3766	253	5	trim	trim	ADJ
ap-3766	253	6	sputtering	sputtering	ADJ
ap-3766	253	7	yields	yield	NOUN
ap-3766	253	8	for	for	ADP
ap-3766	253	9	liquid	liquid	ADJ
ap-3766	253	10	metal	metal	NOUN
ap-3766	253	11	targets	target	NOUN
ap-3766	253	12	.	.	PUNCT
ap-3766	254	1	journal	journal	NOUN
ap-3766	254	2	of	of	ADP
ap-3766	254	3	nuclear	nuclear	ADJ
ap-3766	254	4	materials	material	NOUN
ap-3766	254	5	v.	v.	ADP
ap-3766	254	6	290	290	NUM
ap-3766	254	7	-	-	SYM
ap-3766	254	8	293	293	NUM
ap-3766	254	9	:	:	PUNCT
ap-3766	254	10	80–84	80–84	NOUN
ap-3766	254	11	,	,	PUNCT
ap-3766	254	12	2001	2001	NUM
ap-3766	254	13	.	.	PUNCT
ap-3766	255	1	doi:10.1016	doi:10.1016	PROPN
ap-3766	255	2	/	/	SYM
ap-3766	255	3	s0022	s0022	PROPN
ap-3766	255	4	-	-	PUNCT
ap-3766	255	5	3115(00)00616	3115(00)00616	NUM
ap-3766	255	6	-	-	SYM
ap-3766	255	7	4	4	NUM
ap-3766	255	8	[	[	NOUN
ap-3766	255	9	12	12	NUM
ap-3766	255	10	]	]	PUNCT
ap-3766	255	11	bleykher	bleykher	PROPN
ap-3766	255	12	g.a	g.a	PROPN
ap-3766	255	13	.	.	PROPN
ap-3766	255	14	et	et	PROPN
ap-3766	255	15	al	al	PROPN
ap-3766	255	16	.	.	PROPN
ap-3766	255	17	model	model	PROPN
ap-3766	255	18	of	of	ADP
ap-3766	255	19	metal	metal	NOUN
ap-3766	255	20	surface	surface	NOUN
ap-3766	255	21	erosion	erosion	NOUN
ap-3766	255	22	under	under	ADP
ap-3766	255	23	irradiation	irradiation	NOUN
ap-3766	255	24	by	by	ADP
ap-3766	255	25	high	high	ADJ
ap-3766	255	26	-	-	PUNCT
ap-3766	255	27	power	power	NOUN
ap-3766	255	28	pulsed	pulse	VERB
ap-3766	255	29	ion	ion	NOUN
ap-3766	255	30	beams	beam	NOUN
ap-3766	255	31	.	.	PUNCT
ap-3766	256	1	journal	journal	NOUN
ap-3766	256	2	of	of	ADP
ap-3766	256	3	engineering	engineering	NOUN
ap-3766	256	4	thermophysics	thermophysic	NOUN
ap-3766	256	5	v.	v.	ADP
ap-3766	256	6	17	17	NUM
ap-3766	256	7	,	,	PUNCT
ap-3766	256	8	issue	issue	NOUN
ap-3766	256	9	1	1	NUM
ap-3766	256	10	.	.	PUNCT
ap-3766	256	11	:	:	PUNCT
ap-3766	257	1	24	24	NUM
ap-3766	257	2	-	-	SYM
ap-3766	257	3	29	29	NUM
ap-3766	257	4	,	,	PUNCT
ap-3766	257	5	2008	2008	NUM
ap-3766	257	6	.	.	PUNCT
ap-3766	257	7	doi:10.1007	doi:10.1007	VERB
ap-3766	257	8	/	/	SYM
ap-3766	257	9	s11823	s11823	PROPN
ap-3766	257	10	-	-	PUNCT
ap-3766	257	11	008	008	NUM
ap-3766	257	12	-	-	PUNCT
ap-3766	257	13	1003	1003	NUM
ap-3766	257	14	-	-	SYM
ap-3766	257	15	3	3	NUM
ap-3766	257	16	[	[	X
ap-3766	257	17	13	13	NUM
ap-3766	257	18	]	]	SYM
ap-3766	257	19	handbook	handbook	NOUN
ap-3766	257	20	of	of	ADP
ap-3766	257	21	thin	thin	ADJ
ap-3766	257	22	film	film	NOUN
ap-3766	257	23	technology	technology	NOUN
ap-3766	257	24	,	,	PUNCT
ap-3766	257	25	v.	v.	ADP
ap-3766	257	26	1	1	X
ap-3766	257	27	.	.	PUNCT
ap-3766	257	28	edited	edit	VERB
ap-3766	257	29	by	by	ADP
ap-3766	257	30	l.	l.	PROPN
ap-3766	257	31	i.	i.	PROPN
ap-3766	257	32	maissel	maissel	PROPN
ap-3766	257	33	,	,	PUNCT
ap-3766	257	34	r.	r.	PROPN
ap-3766	257	35	glang	glang	PROPN
ap-3766	257	36	.	.	PUNCT
ap-3766	258	1	mcgraw	mcgraw	PROPN
ap-3766	258	2	-	-	PUNCT
ap-3766	258	3	hill	hill	NOUN
ap-3766	258	4	book	book	NOUN
ap-3766	258	5	company	company	NOUN
ap-3766	258	6	,	,	PUNCT
ap-3766	258	7	1970	1970	NUM
ap-3766	258	8	.	.	PUNCT
ap-3766	259	1	[	[	X
ap-3766	259	2	14	14	NUM
ap-3766	259	3	]	]	PUNCT
ap-3766	259	4	bleykher	bleykher	PROPN
ap-3766	259	5	g.a	g.a	PROPN
ap-3766	259	6	.	.	PROPN
ap-3766	259	7	et	et	PROPN
ap-3766	259	8	al	al	PROPN
ap-3766	259	9	.	.	PROPN
ap-3766	259	10	:	:	PUNCT
ap-3766	260	1	evaporation	evaporation	NOUN
ap-3766	260	2	factor	factor	NOUN
ap-3766	260	3	in	in	ADP
ap-3766	260	4	productivity	productivity	NOUN
ap-3766	260	5	increase	increase	NOUN
ap-3766	260	6	of	of	ADP
ap-3766	260	7	hot	hot	ADJ
ap-3766	260	8	target	target	NOUN
ap-3766	260	9	magnetron	magnetron	NOUN
ap-3766	260	10	sputtering	sputtering	NOUN
ap-3766	260	11	systems	system	NOUN
ap-3766	260	12	.	.	PUNCT
ap-3766	261	1	vacuum	vacuum	NOUN
ap-3766	261	2	v.	v.	ADP
ap-3766	261	3	132	132	NUM
ap-3766	261	4	:	:	PUNCT
ap-3766	261	5	62	62	NUM
ap-3766	261	6	-	-	SYM
ap-3766	261	7	69	69	NUM
ap-3766	261	8	,	,	PUNCT
ap-3766	261	9	2016	2016	NUM
ap-3766	261	10	.	.	PUNCT
ap-3766	262	1	doi:10.1016	doi:10.1016	PROPN
ap-3766	262	2	/	/	SYM
ap-3766	262	3	j.vacuum.2016.07.030	j.vacuum.2016.07.030	PROPN
ap-3766	263	1	[	[	X
ap-3766	263	2	15	15	NUM
ap-3766	263	3	]	]	X
ap-3766	263	4	tesar	tesar	PROPN
ap-3766	263	5	,	,	PUNCT
ap-3766	263	6	j.	j.	PROPN
ap-3766	263	7	et	et	PROPN
ap-3766	263	8	al	al	PROPN
ap-3766	263	9	.	.	PROPN
ap-3766	263	10	:	:	PUNCT
ap-3766	263	11	on	on	ADP
ap-3766	263	12	surface	surface	NOUN
ap-3766	263	13	temperatures	temperature	NOUN
ap-3766	263	14	during	during	ADP
ap-3766	263	15	high	high	ADJ
ap-3766	263	16	power	power	NOUN
ap-3766	263	17	pulsed	pulse	VERB
ap-3766	263	18	magnetron	magnetron	NOUN
ap-3766	263	19	sputtering	sputtering	NOUN
ap-3766	263	20	using	use	VERB
ap-3766	263	21	a	a	DET
ap-3766	263	22	hot	hot	ADJ
ap-3766	263	23	target	target	NOUN
ap-3766	263	24	.	.	PUNCT
ap-3766	264	1	surface	surface	NOUN
ap-3766	264	2	&	&	CCONJ
ap-3766	264	3	coatings	coating	NOUN
ap-3766	264	4	technology	technology	NOUN
ap-3766	264	5	v.	v.	ADP
ap-3766	264	6	206	206	NUM
ap-3766	264	7	:	:	SYM
ap-3766	264	8	1155–1159	1155–1159	NUM
ap-3766	264	9	,	,	PUNCT
ap-3766	264	10	2011	2011	NUM
ap-3766	264	11	.	.	PUNCT
ap-3766	265	1	doi:10.1016	doi:10.1016	PROPN
ap-3766	265	2	/	/	SYM
ap-3766	265	3	j.surfcoat.2011.08.005	j.surfcoat.2011.08.005	PROPN
ap-3766	265	4	431	431	NUM
ap-3766	265	5	http://dx.doi.org/10.1007/s11182-015-0517-6	http://dx.doi.org/10.1007/s11182-015-0517-6	NUM
ap-3766	265	6	http://dx.doi.org/10.1134/s1063784215120026	http://dx.doi.org/10.1134/s1063784215120026	PROPN
ap-3766	265	7	http://dx.doi.org/10.1016/j.vacuum.2015.11.009	http://dx.doi.org/10.1016/j.vacuum.2015.11.009	PROPN
ap-3766	265	8	https://www.scopus.com/record/display.uri?eid=2-s2.0-77749242269&origin=inward&txgid=0	https://www.scopus.com/record/display.uri?eid=2-s2.0-77749242269&origin=inward&txgid=0	PART
ap-3766	265	9	https://www.scopus.com/record/display.uri?eid=2-s2.0-77749242269&origin=inward&txgid=0	https://www.scopus.com/record/display.uri?eid=2-s2.0-77749242269&origin=inward&txgid=0	PRON
ap-3766	265	10	http://www.itpa.lt/~lfd/lfz/445/05/ljp44505.pdf	http://www.itpa.lt/~lfd/lfz/445/05/ljp44505.pdf	NOUN
ap-3766	265	11	http://dx.doi.org/10.1016/0168-583x(93)96027-a	http://dx.doi.org/10.1016/0168-583x(93)96027-a	NOUN
ap-3766	265	12	http://dx.doi.org/10.1016/j.jnucmat.2004.06.009	http://dx.doi.org/10.1016/j.jnucmat.2004.06.009	PROPN
ap-3766	265	13	http://dx.doi.org/10.1016/s0022-3115(00)00616-4	http://dx.doi.org/10.1016/s0022-3115(00)00616-4	PROPN
ap-3766	265	14	http://dx.doi.org/10.1007/s11823-008-1003-3	http://dx.doi.org/10.1007/s11823-008-1003-3	X
ap-3766	266	1	http://dx.doi.org/10.1016/j.vacuum.2016.07.030	http://dx.doi.org/10.1016/j.vacuum.2016.07.030	PROPN
ap-3766	266	2	http://dx.doi.org/10.1016/j.surfcoat.2011.08.005	http://dx.doi.org/10.1016/j.surfcoat.2011.08.005	PROPN
ap-3766	266	3	acta	acta	PROPN
ap-3766	266	4	polytechnica	polytechnica	PROPN
ap-3766	266	5	56(6):425–431	56(6):425–431	PROPN
ap-3766	266	6	,	,	PUNCT
ap-3766	266	7	2016	2016	NUM
ap-3766	266	8	1	1	NUM
ap-3766	266	9	introduction	introduction	NOUN
ap-3766	266	10	2	2	NUM
ap-3766	266	11	a	a	DET
ap-3766	266	12	theoretical	theoretical	ADJ
ap-3766	266	13	description	description	NOUN
ap-3766	266	14	and	and	CCONJ
ap-3766	266	15	modeling	model	VERB
ap-3766	266	16	representations	representation	NOUN
ap-3766	266	17	3	3	NUM
ap-3766	266	18	results	result	NOUN
ap-3766	266	19	and	and	CCONJ
ap-3766	266	20	discussion	discussion	NOUN
ap-3766	266	21	4	4	NUM
ap-3766	266	22	conclusion	conclusion	NOUN
ap-3766	266	23	acknowledgements	acknowledgement	NOUN
ap-3766	266	24	references	reference	NOUN