id	sid	tid	token	lemma	pos
ap-396	1	1	acta	acta	PROPN
ap-396	1	2	polytechnica	polytechnica	PROPN
ap-396	1	3	vol	vol	NOUN
ap-396	1	4	.	.	PUNCT
ap-396	2	1	43	43	NUM
ap-396	2	2	no	no	NOUN
ap-396	2	3	.	.	NOUN
ap-396	2	4	112003	112003	NUM
ap-396	2	5	measuring	measure	VERB
ap-396	2	6	the	the	DET
ap-396	2	7	process	process	NOUN
ap-396	2	8	parameters	parameter	NOUN
ap-396	2	9	of	of	ADP
ap-396	2	10	the	the	DET
ap-396	2	11	ibad	ibad	PROPN
ap-396	2	12	method	method	PROPN
ap-396	2	13	m.	m.	PROPN
ap-396	2	14	zoriy	zoriy	PROPN
ap-396	2	15	,	,	PUNCT
ap-396	2	16	f.	f.	PROPN
ap-396	2	17	iernf	iernf	PROPN
ap-396	2	18	,	,	PUNCT
ap-396	2	19	d.	d.	PROPN
ap-396	2	20	palamarchuk	palamarchuk	PROPN
ap-396	2	21	,	,	PUNCT
ap-396	2	22	s.	s.	PROPN
ap-396	2	23	konvidkov|,l	konvidkov|,l	PROPN
ap-396	2	24	.	.	PUNCT
ap-396	3	1	hiittel	hiittel	PROPN
ap-396	3	2	chromi	chromi	PROPN
ap-396	3	3	,	,	PUNCT
ap-396	3	4	um	um	INTJ
ap-396	3	5	nitride	nitride	ADJ
ap-396	3	6	flms	flm	NOUN
ap-396	3	7	are	be	AUX
ap-396	3	8	knoun	knoun	ADJ
ap-396	3	9	as	as	ADP
ap-396	3	10	good	good	ADJ
ap-396	3	11	protective	protective	ADJ
ap-396	3	12	layrs	layr	NOUN
ap-396	3	13	for	for	ADP
ap-396	3	14	against	against	ADP
ap-396	3	15	both	both	DET
ap-396	3	16	corrosi	corrosi	NOUN
ap-396	3	17	,	,	PUNCT
ap-396	3	18	on	on	ADV
ap-396	3	19	and	and	CCONJ
ap-396	3	20	wear	wear	VERB
ap-396	3	21	.	.	PUNCT
ap-396	4	1	these	these	DET
ap-396	4	2	coatings	coating	NOUN
ap-396	4	3	haae	haae	NOUN
ap-396	4	4	been	be	AUX
ap-396	4	5	studied	study	VERB
ap-396	4	6	in	in	ADP
ap-396	4	7	denil	denil	NOUN
ap-396	4	8	during	during	ADP
ap-396	4	9	recent	recent	ADJ
ap-396	4	10	years	year	NOUN
ap-396	4	11	.	.	PUNCT
ap-396	5	1	their	their	PRON
ap-396	5	2	protectiae	protectiae	NOUN
ap-396	5	3	capabilitl	capabilitl	NOUN
ap-396	5	4	strongly	strongly	ADV
ap-396	5	5	depends	depend	VERB
ap-396	5	6	on	on	ADP
ap-396	5	7	the	the	DET
ap-396	5	8	deposition	deposition	NOUN
ap-396	5	9	conditions	condition	NOUN
ap-396	5	10	.	.	PUNCT
ap-396	6	1	a	a	DET
ap-396	6	2	modern	modern	ADJ
ap-396	6	3	method	method	NOUN
ap-396	6	4	for	for	ADP
ap-396	6	5	preparing	prepare	VERB
ap-396	6	6	chromium	chromium	NOUN
ap-396	6	7	nitride	nitride	NOUN
ap-396	6	8	is	be	AUX
ap-396	6	9	the	the	DET
ap-396	6	10	ibad	ibad	PROPN
ap-396	6	11	(	(	PUNCT
ap-396	6	12	ion	ion	NOUN
ap-396	6	13	beam	beam	NOUN
ap-396	6	14	assisted	assist	VERB
ap-396	6	15	deposition	deposition	NOUN
ap-396	6	16	)	)	PUNCT
ap-396	6	17	method	method	NOUN
ap-396	6	18	.	.	PUNCT
ap-396	7	1	the	the	DET
ap-396	7	2	mrtin	mrtin	NOUN
ap-396	7	3	parameter	parameter	NOUN
ap-396	7	4	deterrnining	deterrnine	VERB
ap-396	7	5	the	the	DET
ap-396	7	6	compositi	compositi	NOUN
ap-396	7	7	,	,	PUNCT
ap-396	7	8	on	on	ADP
ap-396	7	9	and	and	CCONJ
ap-396	7	10	properties	property	NOUN
ap-396	7	11	of	of	ADP
ap-396	7	12	the	the	DET
ap-396	7	13	f.lms	f.lm	NOUN
ap-396	7	14	prepared	prepare	VERB
ap-396	7	15	b1	b1	VERB
ap-396	7	16	the	the	DET
ap-396	7	17	ibad	ibad	PROPN
ap-396	7	18	method	method	NOUN
ap-396	7	19	is	be	AUX
ap-396	7	20	the	the	DET
ap-396	7	21	arriaal	arriaal	NOUN
ap-396	7	22	ratio	ratio	NOUN
ap-396	7	23	of	of	ADP
ap-396	7	24	impinging	impinge	VERB
ap-396	7	25	nitrogen	nitrogen	NOUN
ap-396	7	26	ions	ion	NOUN
ap-396	7	27	to	to	ADP
ap-396	7	28	chromiunt	chromiunt	ADJ
ap-396	7	29	atoms	atom	NOUN
ap-396	7	30	.	.	PUNCT
ap-396	8	1	in	in	ADP
ap-396	8	2	orfur	orfur	NOUN
ap-396	8	3	to	to	PART
ap-396	8	4	calibrate	calibrate	VERB
ap-396	8	5	the	the	DET
ap-396	8	6	ion	ion	NOUN
ap-396	8	7	beam	beam	NOUN
ap-396	8	8	xy	xy	ADJ
ap-396	8	9	-	-	ADJ
ap-396	8	10	mechanical	mechanical	ADJ
ap-396	8	11	scanner	scanner	NOUN
ap-396	8	12	uith	uith	ADP
ap-396	8	13	a	a	DET
ap-396	8	14	faradal	faradal	ADJ
ap-396	8	15	cup	cup	NOUN
ap-396	8	16	,	,	PUNCT
ap-396	8	17	a	a	DET
ap-396	8	18	detector	detector	NOUN
ap-396	8	19	uas	uas	NOUN
ap-396	8	20	designed	design	VERB
ap-396	8	21	and	and	CCONJ
ap-396	8	22	consltucted	consltucte	VERB
ap-396	8	23	.	.	PUNCT
ap-396	9	1	by	by	ADP
ap-396	9	2	mathematical	mathematical	ADJ
ap-396	9	3	processing	processing	NOUN
ap-396	9	4	of	of	ADP
ap-396	9	5	the	the	DET
ap-396	9	6	data	datum	NOUN
ap-396	9	7	,	,	PUNCT
ap-396	9	8	the	the	DET
ap-396	9	9	flux	flux	NOUN
ap-396	9	10	of	of	ADP
ap-396	9	11	the	the	DET
ap-396	9	12	nitrogen	nitrogen	NOUN
ap-396	9	13	atorns	atorn	NOUN
ap-396	9	14	was	be	AUX
ap-396	9	15	found	find	VERB
ap-396	9	16	.	.	PUNCT
ap-396	10	1	fo	fo	AUX
ap-396	10	2	obtain	obtain	VERB
ap-396	10	3	the	the	DET
ap-396	10	4	llux	llux	NOUN
ap-396	10	5	of	of	ADP
ap-396	10	6	the	the	DET
ap-396	10	7	chromiuln	chromiuln	NOUN
ap-396	10	8	atoms	atom	VERB
ap-396	10	9	the	the	DET
ap-396	10	10	rbs	rbs	NOUN
ap-396	10	11	and	and	CCONJ
ap-396	10	12	talystep	talystep	NOUN
ap-396	10	13	methods	method	NOUN
ap-396	10	14	uere	uere	ADV
ap-396	10	15	usea	usea	NOUN
ap-396	10	16	.	.	PUNCT
ap-396	11	1	nou	nou	NOUN
ap-396	11	2	,	,	PUNCT
ap-396	11	3	on	on	ADP
ap-396	11	4	the	the	DET
ap-396	11	5	basis	basis	NOUN
ap-396	11	6	of	of	ADP
ap-396	11	7	this	this	DET
ap-396	11	8	d	d	PROPN
ap-396	11	9	,	,	PUNCT
ap-396	11	10	ata	ata	INTJ
ap-396	11	11	,	,	PUNCT
ap-396	11	12	arc	arc	NOUN
ap-396	11	13	can	can	AUX
ap-396	11	14	perfonn	perfonn	VERB
ap-396	11	15	crn	crn	NOUN
ap-396	11	16	,	,	PUNCT
ap-396	11	17	coutings	couting	NOUN
ap-396	11	18	uith	uith	ADP
ap-396	11	19	controlled	control	VERB
ap-396	11	20	composition	composition	NOUN
ap-396	11	21	and	and	CCONJ
ap-396	11	22	propeflies	propeflie	NOUN
ap-396	11	23	.	.	PUNCT
ap-396	12	1	kelwords	kelword	NOUN
ap-396	12	2	:	:	PUNCT
ap-396	12	3	ibad	ibad	PROPN
ap-396	12	4	,	,	PUNCT
ap-396	12	5	crn	crn	PROPN
ap-396	12	6	,	,	PUNCT
ap-396	12	7	crn2	crn2	NOUN
ap-396	12	8	,	,	PUNCT
ap-396	12	9	calibration	calibration	NOUN
ap-396	12	10	,	,	PUNCT
ap-396	12	11	eleclron	eleclron	NOUN
ap-396	12	12	beatn	beatn	NOUN
ap-396	12	13	.	.	PUNCT
ap-396	13	1	1	1	NUM
ap-396	13	2	introduction	introduction	NOUN
ap-396	13	3	in	in	ADP
ap-396	13	4	recent	recent	ADJ
ap-396	13	5	years	year	NOUN
ap-396	13	6	the	the	DET
ap-396	13	7	hard	hard	ADJ
ap-396	13	8	coatings	coating	NOUN
ap-396	13	9	have	have	AUX
ap-396	13	10	play	play	VERB
ap-396	13	11	a	a	DET
ap-396	13	12	major	major	ADJ
ap-396	13	13	role	role	NOUN
ap-396	13	14	in	in	ADP
ap-396	13	15	mechanical	mechanical	ADJ
ap-396	13	16	engineering	engineering	NOUN
ap-396	13	17	.	.	PUNCT
ap-396	14	1	hard	hard	ADJ
ap-396	14	2	coatings	coating	NOUN
ap-396	14	3	are	be	AUX
ap-396	14	4	used	use	VERB
ap-396	14	5	to	to	PART
ap-396	14	6	increase	increase	VERB
ap-396	14	7	resistance	resistance	NOUN
ap-396	14	8	against	against	ADP
ap-396	14	9	wear	wear	NOUN
ap-396	14	10	and	and	CCONJ
ap-396	14	11	fatigue	fatigue	NOUN
ap-396	14	12	.	.	PUNCT
ap-396	15	1	many	many	ADJ
ap-396	15	2	kinds	kind	NOUN
ap-396	15	3	of	of	ADP
ap-396	15	4	hard	hard	ADJ
ap-396	15	5	coatings	coating	NOUN
ap-396	15	6	are	be	AUX
ap-396	15	7	now	now	ADV
ap-396	15	8	known	know	VERB
ap-396	15	9	.	.	PUNCT
ap-396	16	1	'	'	PUNCT
ap-396	16	2	lhe	lhe	VERB
ap-396	16	3	most	most	ADV
ap-396	16	4	widely	widely	ADV
ap-396	16	5	used	use	VERB
ap-396	16	6	is	be	AUX
ap-396	16	7	titanium	titanium	NOUN
ap-396	16	8	nitride	nitride	NOUN
ap-396	16	9	,	,	PUNCT
ap-396	16	10	because	because	SCONJ
ap-396	16	11	of	of	ADP
ap-396	16	12	its	its	PRON
ap-396	16	13	high	high	ADJ
ap-396	16	14	hardness	hardness	NOUN
ap-396	17	1	[	[	X
ap-396	17	2	]	]	X
ap-396	17	3	.	.	PUNCT
ap-396	18	1	chromium	chromium	NOUN
ap-396	18	2	nitride	nitride	NOUN
ap-396	18	3	is	be	AUX
ap-396	18	4	used	use	VERB
ap-396	18	5	for	for	ADP
ap-396	18	6	the	the	DET
ap-396	18	7	same	same	ADJ
ap-396	18	8	pr	pr	NOUN
ap-396	18	9	<	<	X
ap-396	18	10	rpose	rpose	X
ap-396	19	1	[	[	X
ap-396	19	2	2	2	NUM
ap-396	19	3	]	]	PUNCT
ap-396	19	4	.	.	PUNCT
ap-396	20	1	in	in	ADP
ap-396	20	2	addition	addition	NOUN
ap-396	20	3	to	to	ADP
ap-396	20	4	high	high	ADJ
ap-396	20	5	hardness	hardness	NOUN
ap-396	20	6	it	it	PRON
ap-396	20	7	has	have	VERB
ap-396	20	8	a	a	DET
ap-396	20	9	very	very	ADV
ap-396	20	10	goocl	goocl	NOUN
ap-396	20	11	corrosion	corrosion	NOUN
ap-396	20	12	resistance	resistance	NOUN
ap-396	20	13	,	,	PUNCT
ap-396	20	14	especially	especially	ADV
ap-396	20	15	under	under	ADP
ap-396	20	16	high	high	ADJ
ap-396	20	17	temperatures	temperature	NOUN
ap-396	20	18	in	in	ADP
ap-396	20	19	various	various	ADJ
ap-396	20	20	atmospheres	atmosphere	NOUN
ap-396	20	21	.	.	PUNCT
ap-396	21	1	the	the	DET
ap-396	21	2	hardness	hardness	NOUN
ap-396	21	3	and	and	CCONJ
ap-396	21	4	friction	friction	NOUN
ap-396	21	5	properties	property	NOUN
ap-396	21	6	of	of	ADP
ap-396	21	7	chrrcmium	chrrcmium	NOUN
ap-396	21	8	nitride	nitride	ADJ
ap-396	21	9	coatings	coating	NOUN
ap-396	21	10	depend	depend	VERB
ap-396	21	11	on	on	ADP
ap-396	21	12	the	the	DET
ap-396	21	13	structute	structute	NOUN
ap-396	21	14	and	and	CCONJ
ap-396	21	15	orientation	orientation	NOUN
ap-396	21	16	of	of	ADP
ap-396	21	17	the	the	DET
ap-396	21	18	crystals	crystal	NOUN
ap-396	21	19	in	in	ADP
ap-396	21	20	the	the	DET
ap-396	21	21	film	film	NOUN
ap-396	21	22	[	[	X
ap-396	21	23	3	3	NUM
ap-396	21	24	]	]	PUNCT
ap-396	21	25	.	.	PUNCT
ap-396	22	1	the	the	DET
ap-396	22	2	corrosion	corrosion	NOUN
ap-396	22	3	properties	property	NOUN
ap-396	22	4	also	also	ADV
ap-396	22	5	depend	depend	VERB
ap-396	22	6	on	on	ADP
ap-396	22	7	the	the	DET
ap-396	22	8	porosity	porosity	NOUN
ap-396	22	9	/	/	SYM
ap-396	22	10	densitv	densitv	NOUN
ap-396	22	11	of	of	ADP
ap-396	22	12	the	the	DET
ap-396	22	13	coatings	coating	NOUN
ap-396	22	14	[	[	X
ap-396	22	15	4	4	NUM
ap-396	22	16	]	]	PUNCT
ap-396	22	17	.	.	PUNCT
ap-396	23	1	the	the	DET
ap-396	23	2	importance	importance	NOUN
ap-396	23	3	of	of	ADP
ap-396	23	4	the	the	DET
ap-396	23	5	deposition	deposition	NOUN
ap-396	23	6	parameters	parameter	NOUN
ap-396	23	7	is	be	AUX
ap-396	23	8	critical	critical	ADJ
ap-396	23	9	.	.	PUNCT
ap-396	24	1	there	there	PRON
ap-396	24	2	are	be	VERB
ap-396	24	3	many	many	ADJ
ap-396	24	4	methods	method	NOUN
ap-396	24	5	for	for	ADP
ap-396	24	6	preparing	prepare	VERB
ap-396	24	7	these	these	DET
ap-396	24	8	coatings	coating	NOUN
ap-396	24	9	,	,	PUNCT
ap-396	24	10	which	which	PRON
ap-396	24	11	can	can	AUX
ap-396	24	12	be	be	AUX
ap-396	24	13	classified	classify	VERB
ap-396	24	14	in	in	ADP
ap-396	24	15	various	various	ADJ
ap-396	24	16	ways	way	NOUN
ap-396	24	17	.	.	PUNCT
ap-396	25	1	eflective	eflective	ADJ
ap-396	25	2	modern	modern	ADJ
ap-396	25	3	methods	method	NOUN
ap-396	25	4	are	be	AUX
ap-396	25	5	based	base	VERB
ap-396	25	6	on	on	ADP
ap-396	25	7	plasma	plasma	NOUN
ap-396	25	8	and	and	CCONJ
ap-396	25	9	ion	ion	NOUN
ap-396	25	10	beam	beam	NOUN
ap-396	25	11	processing	processing	NOUN
ap-396	25	12	technology	technology	NOUN
ap-396	25	13	.	.	PUNCT
ap-396	26	1	one	one	NUM
ap-396	26	2	of	of	ADP
ap-396	26	3	these	these	PRON
ap-396	26	4	is	be	AUX
ap-396	26	5	the	the	DET
ap-396	26	6	ibad	ibad	PROPN
ap-396	26	7	method	method	NOUN
ap-396	26	8	[	[	X
ap-396	26	9	5	5	NUM
ap-396	26	10	]	]	PUNCT
ap-396	26	11	.	.	PUNCT
ap-396	27	1	a	a	DET
ap-396	27	2	schematic	schematic	ADJ
ap-396	27	3	view	view	NOUN
ap-396	27	4	of	of	ADP
ap-396	27	5	the	the	DET
ap-396	27	6	experimental	experimental	ADJ
ap-396	27	7	arrangement	arrangement	NOUN
ap-396	27	8	for	for	ADP
ap-396	27	9	the	the	DET
ap-396	27	10	ibad	ibad	PROPN
ap-396	27	11	method	method	NOUN
ap-396	27	12	is	be	AUX
ap-396	27	13	shown	show	VERB
ap-396	27	14	in	in	ADP
ap-396	27	15	fig	fig	NOUN
ap-396	27	16	l.	l.	PROPN
ap-396	27	17	rotary	rotary	PROPN
ap-396	27	18	iy'anipulator	iy'anipulator	PROPN
ap-396	27	19	lon	lon	PROPN
ap-396	27	20	source	source	PROPN
ap-396	27	21	lon	lon	PROPN
ap-396	27	22	beam	beam	PROPN
ap-396	27	23	ni	ni	PROPN
ap-396	27	24	+	+	PROPN
ap-396	27	25	nit	nit	NOUN
ap-396	27	26	involves	involve	VERB
ap-396	27	27	deposition	deposition	NOUN
ap-396	27	28	of	of	ADP
ap-396	27	29	a	a	DET
ap-396	27	30	desired	desire	VERB
ap-396	27	31	material	material	NOUN
ap-396	27	32	using	use	VERB
ap-396	27	33	a	a	DET
ap-396	27	34	vacuum	vacuum	NOUN
ap-396	27	35	electron	electron	NOUN
ap-396	27	36	beam	beam	NOUN
ap-396	27	37	evaporation	evaporation	NOUN
ap-396	27	38	technique	technique	NOUN
ap-396	27	39	and	and	CCONJ
ap-396	27	40	simultaneous	simultaneous	ADJ
ap-396	27	41	bombardment	bombardment	NOUN
ap-396	27	42	by	by	ADP
ap-396	27	43	an	an	DET
ap-396	27	44	energetic	energetic	ADJ
ap-396	27	45	ion	ion	NOUN
ap-396	27	46	beam	beam	NOUN
ap-396	27	47	.	.	PUNCT
ap-396	28	1	chromium	chromium	NOUN
ap-396	28	2	nitride	nitride	NOUN
ap-396	28	3	has	have	VERB
ap-396	28	4	nvo	nvo	PROPN
ap-396	28	5	stoichiometric	stoichiometric	PROPN
ap-396	28	6	modifications	modification	NOUN
ap-396	28	7	crn	crn	NOUN
ap-396	28	8	and	and	CCONJ
ap-396	28	9	crrn	crrn	NOUN
ap-396	29	1	[	[	X
ap-396	29	2	6	6	NUM
ap-396	29	3	]	]	PUNCT
ap-396	29	4	.	.	PUNCT
ap-396	30	1	howeveq	howeveq	INTJ
ap-396	30	2	wewill	wewill	ADV
ap-396	30	3	be	be	AUX
ap-396	30	4	preparing	prepare	VERB
ap-396	30	5	a	a	DET
ap-396	30	6	customary	customary	ADJ
ap-396	30	7	composition	composition	NOUN
ap-396	30	8	crn	crn	NOUN
ap-396	30	9	*	*	NOUN
ap-396	30	10	,	,	PUNCT
ap-396	30	11	where	where	SCONJ
ap-396	30	12	x	x	PRON
ap-396	30	13	is	be	AUX
ap-396	30	14	in	in	ADP
ap-396	30	15	the	the	DET
ap-396	30	16	range	range	NOUN
ap-396	30	17	of	of	ADP
ap-396	30	18	[	[	X
ap-396	30	19	0+l	0+l	X
ap-396	30	20	]	]	X
ap-396	30	21	,	,	PUNCT
ap-396	30	22	and	and	CCONJ
ap-396	30	23	we	we	PRON
ap-396	30	24	will	will	AUX
ap-396	30	25	investigate	investigate	VERB
ap-396	30	26	the	the	DET
ap-396	30	27	characteristics	characteristic	NOUN
ap-396	30	28	of	of	ADP
ap-396	30	29	the	the	DET
ap-396	30	30	process	process	NOUN
ap-396	30	31	in	in	ADP
ap-396	30	32	dependence	dependence	NOUN
ap-396	30	33	on	on	ADP
ap-396	30	34	the	the	DET
ap-396	30	35	x	x	NOUN
ap-396	30	36	ratio	ratio	NOUN
ap-396	30	37	.	.	PUNCT
ap-396	31	1	to	to	PART
ap-396	31	2	do	do	VERB
ap-396	31	3	this	this	PRON
ap-396	31	4	,	,	PUNCT
ap-396	31	5	we	we	PRON
ap-396	31	6	need	need	VERB
ap-396	31	7	to	to	PART
ap-396	31	8	calibrate	calibrate	VERB
ap-396	31	9	the	the	DET
ap-396	31	10	deposition	deposition	NOUN
ap-396	31	11	subprocesses	subprocesse	VERB
ap-396	31	12	the	the	DET
ap-396	31	13	atomic	atomic	ADJ
ap-396	31	14	fluxes	flux	NOUN
ap-396	31	15	of	of	ADP
ap-396	31	16	chromium	chromium	NOUN
ap-396	31	17	and	and	CCONJ
ap-396	31	18	nitrogen	nitrogen	NOUN
ap-396	31	19	in	in	ADP
ap-396	31	20	ibad	ibad	PROPN
ap-396	31	21	equipment	equipment	NOUN
ap-396	31	22	.	.	PUNCT
ap-396	32	1	2	2	NUM
ap-396	32	2	calibration	calibration	NOUN
ap-396	32	3	of	of	ADP
ap-396	32	4	an	an	DET
ap-396	32	5	ion	ion	NOUN
ap-396	32	6	beam	beam	NOUN
ap-396	32	7	a	a	DET
ap-396	32	8	flow	flow	NOUN
ap-396	32	9	of	of	ADP
ap-396	32	10	nitrogen	nitrogen	NOUN
ap-396	32	11	of	of	ADP
ap-396	32	12	high	high	ADJ
ap-396	32	13	purity	purity	NOUN
ap-396	32	14	is	be	AUX
ap-396	32	15	fed	feed	VERB
ap-396	32	16	into	into	ADP
ap-396	32	17	the	the	DET
ap-396	32	18	ion	ion	NOUN
ap-396	32	19	source	source	NOUN
ap-396	32	20	,	,	PUNCT
ap-396	32	21	where	where	SCONJ
ap-396	32	22	ionization	ionization	NOUN
ap-396	32	23	of	of	ADP
ap-396	32	24	the	the	DET
ap-396	32	25	nitrogen	nitrogen	NOUN
ap-396	32	26	takes	take	VERB
ap-396	32	27	place	place	NOUN
ap-396	32	28	.	.	PUNCT
ap-396	33	1	the	the	DET
ap-396	33	2	ion	ion	NOUN
ap-396	33	3	source	source	NOUN
ap-396	33	4	was	be	AUX
ap-396	33	5	developed	develop	VERB
ap-396	33	6	from	from	ADP
ap-396	33	7	the	the	DET
ap-396	33	8	franks	frank	NOUN
ap-396	33	9	jivin	jivin	PROPN
ap-396	33	10	anode	anode	PROPN
ap-396	33	11	design	design	NOUN
ap-396	33	12	.	.	PUNCT
ap-396	34	1	it	it	PRON
ap-396	34	2	consists	consist	VERB
ap-396	34	3	of	of	ADP
ap-396	34	4	a	a	DET
ap-396	34	5	graphite	graphite	NOUN
ap-396	34	6	outer	outer	ADJ
ap-396	34	7	tubewith	tubewith	NOUN
ap-396	34	8	closed	close	VERB
ap-396	34	9	ends	end	NOUN
ap-396	34	10	,	,	PUNCT
ap-396	34	11	mounted	mount	VERB
ap-396	34	12	in	in	ADP
ap-396	34	13	an	an	DET
ap-396	34	14	insulator	insulator	NOUN
ap-396	34	15	.	.	PUNCT
ap-396	35	1	inside	inside	ADP
ap-396	35	2	the	the	DET
ap-396	35	3	tube	tube	NOUN
ap-396	35	4	there	there	PRON
ap-396	35	5	are	be	VERB
ap-396	35	6	two	two	NUM
ap-396	35	7	tungsten	tungsten	ADJ
ap-396	35	8	electrodes	electrode	NOUN
ap-396	35	9	,	,	PUNCT
ap-396	35	10	closely	closely	ADV
ap-396	35	11	spaced	space	VERB
ap-396	35	12	about	about	ADP
ap-396	35	13	the	the	DET
ap-396	35	14	centerline	centerline	NOUN
ap-396	35	15	ofthe	ofthe	NOUN
ap-396	35	16	tube	tube	NOUN
ap-396	35	17	.	.	PUNCT
ap-396	36	1	at	at	ADP
ap-396	36	2	a	a	DET
ap-396	36	3	distance	distance	NOUN
ap-396	36	4	of	of	ADP
ap-396	36	5	35	35	NUM
ap-396	36	6	mm	mm	NOUN
ap-396	36	7	away	away	ADV
ap-396	36	8	,	,	PUNCT
ap-396	36	9	there	there	PRON
ap-396	36	10	is	be	VERB
ap-396	36	11	a	a	DET
ap-396	36	12	corresponding	correspond	VERB
ap-396	36	13	wider	wide	ADJ
ap-396	36	14	slit	slit	NOUN
ap-396	36	15	in	in	ADP
ap-396	36	16	the	the	DET
ap-396	36	17	extractor	extractor	NOUN
ap-396	36	18	electrode	electrode	NOUN
ap-396	36	19	.	.	PUNCT
ap-396	37	1	during	during	ADP
ap-396	37	2	operation	operation	NOUN
ap-396	37	3	a	a	DET
ap-396	37	4	high	high	ADJ
ap-396	37	5	tension	tension	NOUN
ap-396	37	6	of	of	ADP
ap-396	37	7	90	90	NUM
ap-396	37	8	kev	kev	NOUN
ap-396	37	9	is	be	AUX
ap-396	37	10	supplied	supply	VERB
ap-396	37	11	to	to	ADP
ap-396	37	12	the	the	DET
ap-396	37	13	ion	ion	NOUN
ap-396	37	14	source	source	NOUN
ap-396	37	15	.	.	PUNCT
ap-396	38	1	the	the	DET
ap-396	38	2	large	large	ADJ
ap-396	38	3	potential	potential	ADJ
ap-396	38	4	diflerence	diflerence	NOUN
ap-396	38	5	between	between	ADP
ap-396	38	6	the	the	DET
ap-396	38	7	positive	positive	ADJ
ap-396	38	8	ht	ht	NOUN
ap-396	38	9	in	in	ADP
ap-396	38	10	the	the	DET
ap-396	38	11	ion	ion	NOUN
ap-396	38	12	source	source	NOUN
ap-396	38	13	and	and	CCONJ
ap-396	38	14	the	the	DET
ap-396	38	15	zero	zero	NUM
ap-396	38	16	voltage	voltage	NOUN
ap-396	38	17	of	of	ADP
ap-396	38	18	the	the	DET
ap-396	38	19	extractor	extractor	NOUN
ap-396	38	20	electrode	electrode	NOUN
ap-396	38	21	provides	provide	VERB
ap-396	38	22	the	the	DET
ap-396	38	23	force	force	NOUN
ap-396	38	24	to	to	PART
ap-396	38	25	accelerate	accelerate	VERB
ap-396	38	26	the	the	DET
ap-396	38	27	positive	positive	ADJ
ap-396	38	28	nitrogen	nitrogen	NOUN
ap-396	38	29	ions	ion	NOUN
ap-396	38	30	to	to	ADP
ap-396	38	31	a	a	DET
ap-396	38	32	high	high	ADJ
ap-396	38	33	velocity	velocity	NOUN
ap-396	38	34	and	and	CCONJ
ap-396	38	35	form	form	VERB
ap-396	38	36	the	the	DET
ap-396	38	37	ion	ion	NOUN
ap-396	38	38	beam	beam	NOUN
ap-396	38	39	.	.	PUNCT
ap-396	39	1	once	once	SCONJ
ap-396	39	2	the	the	DET
ap-396	39	3	ions	ion	NOUN
ap-396	39	4	pass	pass	VERB
ap-396	39	5	through	through	ADP
ap-396	39	6	the	the	DET
ap-396	39	7	slit	slit	NOUN
ap-396	39	8	in	in	ADP
ap-396	39	9	the	the	DET
ap-396	39	10	extraction	extraction	NOUN
ap-396	39	11	electrode	electrode	NOUN
ap-396	39	12	they	they	PRON
ap-396	39	13	continue	continue	VERB
ap-396	39	14	at	at	ADP
ap-396	39	15	constant	constant	ADJ
ap-396	39	16	velocity	velocity	NOUN
ap-396	39	17	until	until	SCONJ
ap-396	39	18	they	they	PRON
ap-396	39	19	hit	hit	VERB
ap-396	39	20	the	the	DET
ap-396	39	21	work	work	NOUN
ap-396	39	22	piece	piece	NOUN
ap-396	39	23	.	.	PUNCT
ap-396	40	1	the	the	DET
ap-396	40	2	ion	ion	NOUN
ap-396	40	3	beam	beam	NOUN
ap-396	40	4	is	be	AUX
ap-396	40	5	a	a	DET
ap-396	40	6	mixture	mixture	NOUN
ap-396	40	7	of	of	ADP
ap-396	40	8	molecular	molecular	ADJ
ap-396	40	9	and	and	CCONJ
ap-396	40	10	atomic	atomic	ADJ
ap-396	40	11	ions	ion	NOUN
ap-396	40	12	in	in	ADP
ap-396	40	13	proportion	proportion	NOUN
ap-396	40	14	3:1	3:1	NOUN
ap-396	40	15	.	.	PUNCT
ap-396	41	1	as	as	ADP
ap-396	41	2	a	a	DET
ap-396	41	3	goal	goal	NOUN
ap-396	41	4	we	we	PRON
ap-396	41	5	need	need	VERB
ap-396	41	6	to	to	PART
ap-396	41	7	know	know	VERB
ap-396	41	8	the	the	DET
ap-396	41	9	quantity	quantity	NOUN
ap-396	41	10	of	of	ADP
ap-396	41	11	nitrogen	nitrogen	NOUN
ap-396	41	12	atoms	atom	NOUN
ap-396	41	13	that	that	PRON
ap-396	41	14	the	the	DET
ap-396	41	15	sample	sample	NOUN
ap-396	41	16	per	per	ADP
ap-396	41	17	unit	unit	NOUN
ap-396	41	18	area	area	NOUN
ap-396	41	19	per	per	ADP
ap-396	41	20	unit	unit	NOUN
ap-396	41	21	time	time	NOUN
ap-396	41	22	the	the	DET
ap-396	41	23	flux	flux	NOUN
ap-396	41	24	of	of	ADP
ap-396	41	25	the	the	DET
ap-396	41	26	nitrogen	nitrogen	NOUN
ap-396	41	27	atoms	atom	NOUN
ap-396	41	28	.	.	PUNCT
ap-396	42	1	the	the	DET
ap-396	42	2	tecvac	tecvac	NOUN
ap-396	42	3	221	221	NUM
ap-396	42	4	ion	ion	NOUN
ap-396	42	5	implanter	implanter	NOUN
ap-396	42	6	has	have	VERB
ap-396	42	7	no	no	DET
ap-396	42	8	suitable	suitable	ADJ
ap-396	42	9	measuring	measuring	NOUN
ap-396	42	10	instrument	instrument	NOUN
ap-396	42	11	for	for	ADP
ap-396	42	12	this	this	PRON
ap-396	42	13	,	,	PUNCT
ap-396	42	14	so	so	ADV
ap-396	42	15	we	we	PRON
ap-396	42	16	made	make	VERB
ap-396	42	17	an	an	DET
ap-396	42	18	appropriate	appropriate	ADJ
ap-396	42	19	device	device	NOUN
ap-396	42	20	ourselves	ourselves	PRON
ap-396	42	21	and	and	CCONJ
ap-396	42	22	used	use	VERB
ap-396	42	23	it	it	PRON
ap-396	42	24	to	to	PART
ap-396	42	25	perform	perform	VERB
ap-396	42	26	the	the	DET
ap-396	42	27	calibration	calibration	NOUN
ap-396	42	28	of	of	ADP
ap-396	42	29	the	the	DET
ap-396	42	30	ion	ion	NOUN
ap-396	42	31	beam	beam	NOUN
ap-396	42	32	.	.	PUNCT
ap-396	43	1	c=-r	c=-r	PROPN
ap-396	43	2	evapomted	evapomte	VERB
ap-396	43	3	cr	cr	ADP
ap-396	43	4	l	l	NOUN
ap-396	43	5	:	:	PUNCT
ap-396	43	6	schematic	schematic	ADJ
ap-396	43	7	view	view	NOUN
ap-396	43	8	of	of	ADP
ap-396	43	9	experimental	experimental	ADJ
ap-396	43	10	ibad	ibad	PROPN
ap-396	43	11	method	method	PROPN
ap-396	43	12	eleclron	eleclron	PROPN
ap-396	43	13	beam	beam	PROPN
ap-396	43	14	fig	fig	PROPN
ap-396	43	15	.	.	PUNCT
ap-396	44	1	arrangement	arrangement	NOUN
ap-396	44	2	for	for	ADP
ap-396	44	3	the	the	DET
ap-396	44	4	23	23	NUM
ap-396	44	5	acta	acta	PROPN
ap-396	44	6	polytechnica	polytechnica	PROPN
ap-396	44	7	vol	vol	NOUN
ap-396	44	8	.	.	PUNCT
ap-396	45	1	43	43	NUM
ap-396	45	2	no	no	NOUN
ap-396	45	3	.	.	PUNCT
ap-396	46	1	l/2003	l/2003	NOUN
ap-396	46	2	this	this	DET
ap-396	46	3	device	device	NOUN
ap-396	46	4	is	be	AUX
ap-396	46	5	a	a	DET
ap-396	46	6	mechanical	mechanical	ADJ
ap-396	46	7	xy	xy	NOUN
ap-396	46	8	-	-	PUNCT
ap-396	46	9	scanner	scanner	NOUN
ap-396	46	10	that	that	PRON
ap-396	46	11	consists	consist	VERB
ap-396	46	12	of	of	ADP
ap-396	46	13	a	a	DET
ap-396	46	14	faraday	faraday	PROPN
ap-396	46	15	cup	cup	PROPN
ap-396	46	16	detectos	detectos	PROPN
ap-396	46	17	nvo	nvo	PROPN
ap-396	46	18	stepping	stepping	PROPN
ap-396	46	19	-	-	PUNCT
ap-396	46	20	motors	motors	PROPN
ap-396	46	21	,	,	PUNCT
ap-396	46	22	a	a	DET
ap-396	46	23	scrolling	scrolling	ADJ
ap-396	46	24	mechanism	mechanism	NOUN
ap-396	46	25	and	and	CCONJ
ap-396	46	26	other	other	ADJ
ap-396	46	27	accessories	accessory	NOUN
ap-396	46	28	.	.	PUNCT
ap-396	47	1	a	a	DET
ap-396	47	2	program	program	NOUN
ap-396	47	3	was	be	AUX
ap-396	47	4	written	write	VERB
ap-396	47	5	in	in	ADP
ap-396	47	6	c	c	PROPN
ap-396	47	7	language	language	NOUN
ap-396	47	8	to	to	PART
ap-396	47	9	conrrol	conrrol	VERB
ap-396	47	10	rwo	rwo	PROPN
ap-396	47	11	stepping	stepping	PROPN
ap-396	47	12	-	-	PUNCT
ap-396	47	13	motors	motor	NOUN
ap-396	47	14	,	,	PUNCT
ap-396	47	15	which	which	PRON
ap-396	47	16	moved	move	VERB
ap-396	47	17	the	the	DET
ap-396	47	18	detector	detector	NOUN
ap-396	47	19	into	into	ADP
ap-396	47	20	selected	select	VERB
ap-396	47	21	points	point	NOUN
ap-396	47	22	of	of	ADP
ap-396	47	23	cross	cross	NOUN
ap-396	47	24	-	-	NOUN
ap-396	47	25	sections	section	NOUN
ap-396	47	26	of	of	ADP
ap-396	47	27	the	the	DET
ap-396	47	28	ion	ion	NOUN
ap-396	47	29	beam	beam	NOUN
ap-396	47	30	.	.	PUNCT
ap-396	48	1	an	an	DET
ap-396	48	2	xy	xy	NOUN
ap-396	48	3	-	-	PUNCT
ap-396	48	4	scanner	scanner	NOUN
ap-396	48	5	was	be	AUX
ap-396	48	6	applied	apply	VERB
ap-396	48	7	in	in	ADP
ap-396	48	8	ttre	ttre	NOUN
ap-396	48	9	region	region	NOUN
ap-396	48	10	of	of	ADP
ap-396	48	11	dimensions	dimension	NOUN
ap-396	48	12	200	200	NUM
ap-396	48	13	x	x	SYM
ap-396	48	14	200	200	NUM
ap-396	48	15	mm	mm	NOUN
ap-396	48	16	with	with	ADP
ap-396	48	17	a	a	DET
ap-396	48	18	step	step	NOUN
ap-396	48	19	of	of	ADP
ap-396	48	20	2	2	NUM
ap-396	48	21	mm	mm	NOUN
ap-396	48	22	.	.	PUNCT
ap-396	49	1	another	another	DET
ap-396	49	2	program	program	NOUN
ap-396	49	3	estimated	estimate	VERB
ap-396	49	4	the	the	DET
ap-396	49	5	value	value	NOUN
ap-396	49	6	of	of	ADP
ap-396	49	7	ion	ion	NOUN
ap-396	49	8	beam	beam	NOUN
ap-396	49	9	densiry	densiry	NOUN
ap-396	49	10	and	and	CCONJ
ap-396	49	11	plotted	plot	VERB
ap-396	49	12	the	the	DET
ap-396	49	13	graph	graph	NOUN
ap-396	49	14	that	that	PRON
ap-396	49	15	illustrated	illustrate	VERB
ap-396	49	16	the	the	DET
ap-396	49	17	profile	profile	NOUN
ap-396	49	18	of	of	ADP
ap-396	49	19	ion	ion	NOUN
ap-396	49	20	beam	beam	NOUN
ap-396	49	21	density	density	NOUN
ap-396	49	22	.	.	PUNCT
ap-396	50	1	the	the	DET
ap-396	50	2	resulting	result	VERB
ap-396	50	3	distribution	distribution	NOUN
ap-396	50	4	of	of	ADP
ap-396	50	5	ion	ion	NOUN
ap-396	50	6	beam	beam	NOUN
ap-396	50	7	density	density	NOUN
ap-396	50	8	in	in	ADP
ap-396	50	9	the	the	DET
ap-396	50	10	tecvac	tecvac	NOUN
ap-396	50	11	ion	ion	NOUN
ap-396	50	12	implanter	implanter	NOUN
ap-396	50	13	is	be	AUX
ap-396	50	14	shown	show	VERB
ap-396	50	15	in	in	ADP
ap-396	50	16	fig	fig	NOUN
ap-396	50	17	.	.	PUNCT
ap-396	51	1	2	2	X
ap-396	51	2	.	.	X
ap-396	51	3	this	this	PRON
ap-396	51	4	is	be	AUX
ap-396	51	5	the	the	DET
ap-396	51	6	profile	profile	NOUN
ap-396	51	7	of	of	ADP
ap-396	51	8	the	the	DET
ap-396	51	9	ion	ion	NOUN
ap-396	51	10	beam	beam	NOUN
ap-396	51	11	current	current	ADJ
ap-396	51	12	density	density	NOUN
ap-396	51	13	,	,	PUNCT
ap-396	51	14	but	but	CCONJ
ap-396	51	15	we	we	PRON
ap-396	51	16	need	need	VERB
ap-396	51	17	a	a	DET
ap-396	51	18	profile	profile	NOUN
ap-396	51	19	of	of	ADP
ap-396	51	20	the	the	DET
ap-396	51	21	flux	flux	NOUN
ap-396	51	22	of	of	ADP
ap-396	51	23	the	the	DET
ap-396	51	24	nitrogen	nitrogen	NOUN
ap-396	51	25	atoms	atom	NOUN
ap-396	51	26	.	.	PUNCT
ap-396	52	1	we	we	PRON
ap-396	52	2	therefore	therefore	ADV
ap-396	52	3	need	need	VERB
ap-396	52	4	to	to	PART
ap-396	52	5	perform	perform	VERB
ap-396	52	6	a	a	DET
ap-396	52	7	mathematical	mathematical	ADJ
ap-396	52	8	procedure	procedure	NOUN
ap-396	52	9	to	to	PART
ap-396	52	10	transform	transform	VERB
ap-396	52	11	ion	ion	NOUN
ap-396	52	12	beam	beam	NOUN
ap-396	52	13	density	density	NOUN
ap-396	52	14	into	into	ADP
ap-396	52	15	atomic	atomic	ADJ
ap-396	52	16	nitrogen	nitrogen	NOUN
ap-396	52	17	flux	flux	NOUN
ap-396	52	18	.	.	PUNCT
ap-396	53	1	we	we	PRON
ap-396	53	2	calculated	calculate	VERB
ap-396	53	3	the	the	DET
ap-396	53	4	quantity	quantity	NOUN
ap-396	53	5	of	of	ADP
ap-396	53	6	nitrogen	nitrogen	NOUN
ap-396	53	7	atoms	atom	NOUN
ap-396	53	8	as	as	SCONJ
ap-396	53	9	follows	follow	VERB
ap-396	53	10	:	:	PUNCT
ap-396	53	11	so	so	SCONJ
ap-396	53	12	the	the	DET
ap-396	53	13	fluxes	flux	NOUN
ap-396	53	14	of	of	ADP
ap-396	53	15	the	the	DET
ap-396	53	16	atomic	atomic	ADJ
ap-396	53	17	and	and	CCONJ
ap-396	53	18	molecular	molecular	ADJ
ap-396	53	19	ions	ion	NOUN
ap-396	53	20	will	will	AUX
ap-396	53	21	be	be	AUX
ap-396	53	22	.	.	PUNCT
ap-396	54	1	respectively	respectively	ADV
ap-396	54	2	:	:	PUNCT
ap-396	54	3	^	^	PUNCT
ap-396	54	4	p	p	X
ap-396	54	5	6.2	6.2	NUM
ap-396	54	6	+	+	NOUN
ap-396	54	7	2.tot3p	2.tot3p	NOUN
ap-396	54	8	*	*	NOUN
ap-396	55	1	=	=	NOUN
ap-396	55	2	i	i	NOUN
ap-396	55	3	=	=	NOUN
ap-396	55	4	14355'lol3	14355'lol3	NUM
ap-396	55	5	cm-2's	cm-2's	PROPN
ap-396	55	6	-	-	PUNCT
ap-396	55	7	l	l	NOUN
ap-396	55	8	;	;	PUNCT
ap-396	55	9	p2n	p2n	X
ap-396	55	10	=	=	PUNCT
ap-396	55	11	p	p	X
ap-396	55	12	px	px	X
ap-396	55	13	=	=	PUNCT
ap-396	55	14	5.742	5.742	NUM
ap-396	55	15	'	'	PUNCT
ap-396	55	16	l0l3	l0l3	PUNCT
ap-396	55	17	1.4355	1.4355	NUM
ap-396	55	18	'	'	PUNCT
ap-396	55	19	l013=	l013=	NOUN
ap-396	56	1	=	=	X
ap-396	56	2	4.3065.1013	4.3065.1013	PROPN
ap-396	56	3	cm-2.ii	cm-2.ii	VERB
ap-396	56	4	the	the	DET
ap-396	56	5	flux	flux	NOUN
ap-396	56	6	of	of	ADP
ap-396	56	7	the	the	DET
ap-396	56	8	atoms	atom	NOUN
ap-396	56	9	included	include	VERB
ap-396	56	10	in	in	ADP
ap-396	56	11	the	the	DET
ap-396	56	12	atomic	atomic	ADJ
ap-396	56	13	nitrogen	nitrogen	NOUN
ap-396	56	14	ions	ion	NOUN
ap-396	56	15	equals	equal	VERB
ap-396	56	16	the	the	DET
ap-396	56	17	flux	flux	NOUN
ap-396	56	18	of	of	ADP
ap-396	56	19	the	the	DET
ap-396	56	20	nitrogen	nitrogen	NOUN
ap-396	56	21	ions	ion	NOUN
ap-396	56	22	:	:	PUNCT
ap-396	57	1	nn=	nn=	PROPN
ap-396	57	2	pn	pn	PROPN
ap-396	57	3	=	=	PUNCT
ap-396	57	4	i.4355	i.4355	PROPN
ap-396	57	5	'	'	PUNCT
ap-396	57	6	i0r3	i0r3	X
ap-396	57	7	.--2',-	.--2',-	PUNCT
ap-396	57	8	'	'	PUNCT
ap-396	57	9	;	;	PUNCT
ap-396	57	10	the	the	DET
ap-396	57	11	flux	flux	NOUN
ap-396	57	12	of	of	ADP
ap-396	57	13	the	the	DET
ap-396	57	14	atoms	atom	NOUN
ap-396	57	15	included	include	VERB
ap-396	57	16	in	in	ADP
ap-396	57	17	the	the	DET
ap-396	57	18	molecular	molecular	ADJ
ap-396	57	19	nitrogen	nitrogen	NOUN
ap-396	57	20	ions	ion	NOUN
ap-396	57	21	equals	equal	VERB
ap-396	57	22	flux	flux	NOUN
ap-396	57	23	of	of	ADP
ap-396	57	24	equal	equal	ADJ
ap-396	57	25	rwice	rwice	NOUN
ap-396	57	26	the	the	DET
ap-396	57	27	flux	flux	NOUN
ap-396	57	28	of	of	ADP
ap-396	57	29	the	the	DET
ap-396	57	30	molecular	molecular	ADJ
ap-396	57	31	nitrogen	nitrogen	NOUN
ap-396	57	32	ions	ion	NOUN
ap-396	57	33	:	:	PUNCT
ap-396	57	34	nr*=	nr*=	PROPN
ap-396	57	35	t'pr"=	t'pr"=	PROPN
ap-396	57	36	8.613'10t3	8.613'10t3	NUM
ap-396	57	37	cm-2's-	cm-2's-	PROPN
ap-396	57	38	'	'	PUNCT
ap-396	57	39	;	;	PUNCT
ap-396	57	40	so	so	ADV
ap-396	57	41	th	th	X
ap-396	57	42	.	.	PUNCT
ap-396	57	43	tot"ljq	tot"ljq	NOUN
ap-396	57	44	*	*	NOUN
ap-396	57	45	of	of	ADP
ap-396	57	46	.tit	.tit	PROPN
ap-396	57	47	-	-	PUNCT
ap-396	57	48	g.n	g.n	PROPN
ap-396	57	49	utornr	utornr	ADJ
ap-396	57	50	it	it	PRON
ap-396	57	51	ln	ln	ADJ
ap-396	57	52	,	,	PUNCT
ap-396	57	53	=	=	NOUN
ap-396	57	54	t"ll	t"ll	NOUN
ap-396	57	55	,	,	PUNCT
ap-396	57	56	rr	rr	PROPN
ap-396	57	57	=	=	NOUN
ap-396	57	58	t.oou'rotn.--t	t.oou'rotn.--t	PROPN
ap-396	57	59	,	,	PUNCT
ap-396	57	60	i'l	i'l	ADV
ap-396	57	61	total	total	ADJ
ap-396	57	62	flux	flux	NOUN
ap-396	57	63	of	of	ADP
ap-396	57	64	nitrogen	nitrogen	NOUN
ap-396	57	65	atoms	atom	NOUN
ap-396	57	66	.	.	PUNCT
ap-396	58	1	the	the	DET
ap-396	58	2	profile	profile	NOUN
ap-396	58	3	monitoring	monitoring	NOUN
ap-396	58	4	of	of	ADP
ap-396	58	5	the	the	DET
ap-396	58	6	flux	flux	NOUN
ap-396	58	7	of	of	ADP
ap-396	58	8	aroms	arom	NOUN
ap-396	58	9	is	be	AUX
ap-396	58	10	shown	show	VERB
ap-396	58	11	in	in	ADP
ap-396	58	12	iig.3	iig.3	NOUN
ap-396	58	13	0	0	NUM
ap-396	58	14	50	50	NUM
ap-396	58	15	x	x	NOUN
ap-396	58	16	-	-	NOUN
ap-396	58	17	axis	axis	NOUN
ap-396	59	1	[	[	X
ap-396	59	2	mm	mm	X
ap-396	59	3	]	]	X
ap-396	59	4	o	o	X
ap-396	59	5	-so	-so	ADP
ap-396	59	6	-so	-so	ADJ
ap-396	59	7	y	y	NOUN
ap-396	59	8	-	-	PUNCT
ap-396	59	9	axis	axis	NOUN
ap-396	60	1	[	[	X
ap-396	60	2	mm	mm	X
ap-396	60	3	]	]	X
ap-396	60	4	fig	fig	NOUN
ap-396	60	5	.	.	PUNCT
ap-396	61	1	3	3	NUM
ap-396	61	2	:	:	PUNCT
ap-396	61	3	profrle	profrle	NOUN
ap-396	61	4	monitoring	monitoring	NOUN
ap-396	61	5	of	of	ADP
ap-396	61	6	total	total	ADJ
ap-396	61	7	flux	flux	NOUN
ap-396	61	8	of	of	ADP
ap-396	61	9	nitrogen	nitrogen	NOUN
ap-396	61	10	atoms	atom	NOUN
ap-396	61	11	another	another	DET
ap-396	61	12	view	view	NOUN
ap-396	61	13	of	of	ADP
ap-396	61	14	the	the	DET
ap-396	61	15	same	same	ADJ
ap-396	61	16	profile	profile	NOUN
ap-396	61	17	is	be	AUX
ap-396	61	18	presented	present	VERB
ap-396	61	19	in	in	ADP
ap-396	61	20	frg	frg	PROPN
ap-396	61	21	.	.	PROPN
ap-396	62	1	4	4	NUM
ap-396	62	2	.	.	X
ap-396	63	1	this	this	DET
ap-396	63	2	figure	figure	NOUN
ap-396	63	3	shows	show	VERB
ap-396	63	4	that	that	SCONJ
ap-396	63	5	the	the	DET
ap-396	63	6	profile	profile	NOUN
ap-396	63	7	of	of	ADP
ap-396	63	8	the	the	DET
ap-396	63	9	flux	flux	NOUN
ap-396	63	10	has	have	VERB
ap-396	63	11	its	its	PRON
ap-396	63	12	maximum	maximum	NOUN
ap-396	63	13	in	in	ADP
ap-396	63	14	the	the	DET
ap-396	63	15	ellipse	ellipse	NOUN
ap-396	63	16	region	region	NOUN
ap-396	63	17	,	,	PUNCT
ap-396	63	18	extended	extend	VERB
ap-396	63	19	along	along	ADP
ap-396	63	20	the	the	DET
ap-396	63	21	x	x	NOUN
ap-396	63	22	-	-	NOUN
ap-396	63	23	axis	axis	ADJ
ap-396	63	24	.	.	PUNCT
ap-396	64	1	-60	-60	PUNCT
ap-396	65	1	so	so	ADV
ap-396	65	2	to	to	PART
ap-396	65	3	y_axis	y_axis	VERB
ap-396	65	4	[	[	X
ap-396	65	5	mm	mm	X
ap-396	65	6	]	]	X
ap-396	65	7	fig	fig	NOUN
ap-396	65	8	.	.	PUNCT
ap-396	66	1	4	4	NUM
ap-396	66	2	:	:	PUNCT
ap-396	66	3	profile	profile	NOUN
ap-396	66	4	monitoring	monitoring	NOUN
ap-396	66	5	of	of	ADP
ap-396	66	6	total	total	ADJ
ap-396	66	7	flux	flux	NOUN
ap-396	66	8	of	of	ADP
ap-396	66	9	nitrogen	nitrogen	NOUN
ap-396	66	10	atoms	atom	NOUN
ap-396	66	11	(	(	PUNCT
ap-396	66	12	another	another	DET
ap-396	66	13	view	view	NOUN
ap-396	66	14	)	)	PUNCT
ap-396	66	15	q.i	q.i	PROPN
ap-396	66	16	12	12	NUM
ap-396	66	17	c	c	NOUN
ap-396	66	18	'	'	PUNCT
ap-396	66	19	b	b	X
ap-396	66	20	10	10	NUM
ap-396	66	21	=	=	SYM
ap-396	66	22	b	b	SYM
ap-396	66	23	50	50	NUM
ap-396	66	24	50	50	NUM
ap-396	66	25	y	y	PROPN
ap-396	66	26	-	-	PUNCT
ap-396	66	27	die	die	NOUN
ap-396	66	28	mmxdinm	mmxdinm	NOUN
ap-396	66	29	.50	.50	NUM
ap-396	66	30	-50	-50	PUNCT
ap-396	66	31	fig	fig	NOUN
ap-396	66	32	.	.	PUNCT
ap-396	67	1	2	2	NUM
ap-396	67	2	:	:	PUNCT
ap-396	67	3	profile	profile	NOUN
ap-396	67	4	monitoring	monitoring	NOUN
ap-396	67	5	of	of	ADP
ap-396	67	6	total	total	ADJ
ap-396	67	7	flux	flux	NOUN
ap-396	67	8	of	of	ADP
ap-396	67	9	ions	ion	NOUN
ap-396	67	10	giaen	giaen	PROPN
ap-396	67	11	dnta	dnta	NOUN
ap-396	67	12	:	:	PUNCT
ap-396	67	13	i	i	PROPN
ap-396	67	14	=	=	NOUN
ap-396	67	15	9.2	9.2	NUM
ap-396	67	16	pncm2	pncm2	NOUN
ap-396	67	17	example	example	NOUN
ap-396	67	18	of	of	ADP
ap-396	67	19	value	value	NOUN
ap-396	67	20	of	of	ADP
ap-396	67	21	ion	ion	NOUN
ap-396	67	22	beam	beam	NOUN
ap-396	67	23	density	density	NOUN
ap-396	67	24	(	(	PUNCT
ap-396	67	25	measured	measure	VERB
ap-396	67	26	by	by	ADP
ap-396	67	27	faraday	faraday	PROPN
ap-396	67	28	cup	cup	PROPN
ap-396	67	29	detector	detector	NOUN
ap-396	67	30	)	)	PUNCT
ap-396	67	31	;	;	PUNCT
ap-396	68	1	e	e	X
ap-396	68	2	=	=	SYM
ap-396	68	3	1.6021892	1.6021892	NUM
ap-396	68	4	.	.	PUNCT
ap-396	68	5	l0	l0	PROPN
ap-396	68	6	-	-	PUNCT
ap-396	68	7	lsc	lsc	PROPN
ap-396	68	8	electron	electron	PROPN
ap-396	68	9	charge	charge	NOUN
ap-396	68	10	magnitude	magnitude	NOUN
ap-396	68	11	;	;	PUNCT
ap-396	68	12	p1	p1	PROPN
ap-396	68	13	g	g	PROPN
ap-396	68	14	flux	flux	NOUN
ap-396	68	15	of	of	ADP
ap-396	68	16	atomic	atomic	ADJ
ap-396	68	17	nitrogen	nitrogen	NOUN
ap-396	68	18	ions	ion	NOUN
ap-396	68	19	;	;	PUNCT
ap-396	68	20	p2^	p2^	VERB
ap-396	68	21	*	*	NOUN
ap-396	68	22	'	'	PUNCT
ap-396	68	23	flux	flux	NOUN
ap-396	68	24	of	of	ADP
ap-396	68	25	molecular	molecular	ADJ
ap-396	68	26	nitrogen	nitrogen	NOUN
ap-396	68	27	ions	ion	NOUN
ap-396	68	28	;	;	PUNCT
ap-396	68	29	p	p	NOUN
ap-396	68	30	total	total	ADJ
ap-396	68	31	flux	flux	NOUN
ap-396	68	32	of	of	ADP
ap-396	68	33	ions	ion	NOUN
ap-396	68	34	;	;	PUNCT
ap-396	68	35	n1,'flux	n1,'flux	ADV
ap-396	68	36	of	of	ADP
ap-396	68	37	nitrogen	nitrogen	NOUN
ap-396	68	38	atoms	atom	NOUN
ap-396	68	39	included	include	VERB
ap-396	68	40	in	in	ADP
ap-396	68	41	atomic	atomic	ADJ
ap-396	68	42	nitrogen	nitrogen	NOUN
ap-396	68	43	ions	ion	NOUN
ap-396	68	44	;	;	PUNCT
ap-396	68	45	n2.iy	n2.iy	NOUN
ap-396	68	46	flux	flux	NOUN
ap-396	68	47	of	of	ADP
ap-396	68	48	nitrogen	nitrogen	NOUN
ap-396	68	49	atoms	atom	NOUN
ap-396	68	50	included	include	VERB
ap-396	68	51	in	in	ADP
ap-396	68	52	molecular	molecular	ADJ
ap-396	68	53	nitrogen	nitrogen	NOUN
ap-396	68	54	ions	ion	NOUN
ap-396	68	55	;	;	PUNCT
ap-396	68	56	n	n	NUM
ap-396	68	57	total	total	ADJ
ap-396	68	58	flux	flux	NOUN
ap-396	68	59	of	of	ADP
ap-396	68	60	nitrogen	nitrogen	NOUN
ap-396	68	61	atoms	atom	NOUN
ap-396	68	62	.	.	PUNCT
ap-396	69	1	pr	pr	AUX
ap-396	69	2	o	o	NOUN
ap-396	69	3	cedur	cedur	NOUN
ap-396	69	4	e	e	PROPN
ap-396	69	5	for	for	ADP
ap-396	69	6	s	s	PROPN
ap-396	69	7	ohrti	ohrti	PROPN
ap-396	69	8	,	,	PUNCT
ap-396	69	9	on	on	ADP
ap-396	69	10	:	:	PUNCT
ap-396	69	11	we	we	PRON
ap-396	69	12	know	know	VERB
ap-396	69	13	the	the	DET
ap-396	69	14	ion	ion	NOUN
ap-396	69	15	beam	beam	NOUN
ap-396	69	16	density	density	NOUN
ap-396	69	17	and	and	CCONJ
ap-396	69	18	charge	charge	NOUN
ap-396	69	19	of	of	ADP
ap-396	69	20	one	one	NUM
ap-396	69	21	ion	ion	NOUN
ap-396	69	22	.	.	PUNCT
ap-396	70	1	from	from	ADP
ap-396	70	2	this	this	DET
ap-396	70	3	data	datum	NOUN
ap-396	70	4	we	we	PRON
ap-396	70	5	are	be	AUX
ap-396	70	6	able	able	ADJ
ap-396	70	7	to	to	PART
ap-396	70	8	calculate	calculate	VERB
ap-396	70	9	the	the	DET
ap-396	70	10	total	total	ADJ
ap-396	70	11	flux	flux	NOUN
ap-396	70	12	of	of	ADP
ap-396	70	13	ions	ion	NOUN
ap-396	70	14	:	:	PUNCT
ap-396	70	15	p	p	X
ap-396	71	1	=	=	NOUN
ap-396	71	2	!	!	PUNCT
ap-396	72	1	=	=	PUNCT
ap-396	72	2	-g+rr	-g+rr	NOUN
ap-396	72	3	=	=	VERB
ap-396	72	4	5.742	5.742	NUM
ap-396	72	5	'	'	PART
ap-396	72	6	1013	1013	NUM
ap-396	72	7	cm-2's	cm-2's	NOUN
ap-396	72	8	-	-	PUNCT
ap-396	72	9	r	r	NOUN
ap-396	72	10	totul	totul	NOUN
ap-396	72	11	fl,,*e	fl,,*e	PROPN
ap-396	73	1	1.60221892.10	1.60221892.10	PROPN
ap-396	73	2	-	-	PUNCT
ap-396	73	3	r	r	NOUN
ap-396	73	4	of	of	ADP
ap-396	73	5	ions	ion	NOUN
ap-396	73	6	;	;	PUNCT
ap-396	73	7	"	"	PUNCT
ap-396	73	8	'	'	PUNCT
ap-396	73	9	*	*	PUNCT
ap-396	74	1	=	=	NOUN
ap-396	74	2	?	?	SYM
ap-396	74	3	number	number	NOUN
ap-396	74	4	of	of	ADP
ap-396	74	5	molecular	molecular	ADJ
ap-396	74	6	ions	ion	NOUN
ap-396	74	7	:	:	PUNCT
ap-396	74	8	number	number	NOUN
ap-396	74	9	of	of	ADP
ap-396	74	10	atomic	atomic	ADJ
ap-396	74	11	ions	ion	NOUN
ap-396	74	12	:	:	PUNCT
ap-396	74	13	pni	pni	NOUN
ap-396	74	14	p	p	NOUN
ap-396	74	15	=	=	NOUN
ap-396	74	16	px,*porr=	px,*porr=	NOUN
ap-396	74	17	)	)	PUNCT
ap-396	74	18	p	p	NOUN
ap-396	75	1	=	=	NOUN
ap-396	75	2	l+3=4	l+3=4	X
ap-396	75	3	.	.	PUNCT
ap-396	76	1	py	py	PROPN
ap-396	76	2	24	24	NUM
ap-396	76	3	eo	eo	PROPN
ap-396	76	4	a	a	DET
ap-396	76	5	acta	acta	PROPN
ap-396	76	6	polytechnica	polytechnica	PROPN
ap-396	76	7	vol	vol	NOUN
ap-396	76	8	.	.	PUNCT
ap-396	77	1	43	43	NUM
ap-396	77	2	no	no	NOUN
ap-396	77	3	.	.	NOUN
ap-396	77	4	112003	112003	NUM
ap-396	77	5	;	;	PUNCT
ap-396	77	6	e	e	X
ap-396	77	7	c(g	c(g	PROPN
ap-396	77	8	=	=	PUNCT
ap-396	77	9	'	'	PART
ap-396	77	10	fi'oe	fi'oe	NOUN
ap-396	77	11	i	i	PRON
ap-396	77	12	=(	=(	VERB
ap-396	77	13	5	5	NUM
ap-396	77	14	e50	e50	NOUN
ap-396	77	15	e	e	PROPN
ap-396	77	16	.9x	.9x	PROPN
ap-396	78	1	i.o	i.o	PRON
ap-396	78	2	fig	fig	NOUN
ap-396	78	3	.	.	PUNCT
ap-396	79	1	5	5	NUM
ap-396	79	2	shows	show	VERB
ap-396	79	3	a	a	DET
ap-396	79	4	view	view	NOUN
ap-396	79	5	fiom	fiom	NOUN
ap-396	79	6	below	below	ADP
ap-396	79	7	of	of	ADP
ap-396	79	8	the	the	DET
ap-396	79	9	profile	profile	NOUN
ap-396	79	10	monitoring	monitoring	NOUN
ap-396	79	11	of	of	ADP
ap-396	79	12	the	the	DET
ap-396	79	13	total	total	ADJ
ap-396	79	14	flux	flux	NOUN
ap-396	79	15	of	of	ADP
ap-396	79	16	the	the	DET
ap-396	79	17	nitrogen	nitrogen	NOUN
ap-396	79	18	atoms	atom	NOUN
ap-396	79	19	,	,	PUNCT
ap-396	79	20	and	and	CCONJ
ap-396	79	21	gives	give	VERB
ap-396	79	22	more	more	ADJ
ap-396	79	23	information	information	NOUN
ap-396	79	24	about	about	ADP
ap-396	79	25	the	the	DET
ap-396	79	26	distribution	distribution	NOUN
ap-396	79	27	the	the	DET
ap-396	79	28	flux	flux	NOUN
ap-396	79	29	in	in	ADP
ap-396	79	30	the	the	DET
ap-396	79	31	cross	cross	NOUN
ap-396	79	32	-	-	NOUN
ap-396	79	33	section	section	NOUN
ap-396	79	34	of	of	ADP
ap-396	79	35	the	the	DET
ap-396	79	36	ion	ion	NOUN
ap-396	79	37	beam	beam	NOUN
ap-396	79	38	.	.	PUNCT
ap-396	80	1	using	use	VERB
ap-396	80	2	this	this	DET
ap-396	80	3	figure	figure	NOUN
ap-396	80	4	we	we	PRON
ap-396	80	5	can	can	AUX
ap-396	80	6	select	select	VERB
ap-396	80	7	a	a	DET
ap-396	80	8	zone	zone	NOUN
ap-396	80	9	approximately	approximately	ADV
ap-396	80	10	50	50	NUM
ap-396	80	11	mm	mm	NOUN
ap-396	80	12	long	long	ADJ
ap-396	80	13	and	and	CCONJ
ap-396	80	14	30	30	NUM
ap-396	80	15	mm	mm	NOUN
ap-396	80	16	wide	wide	ADV
ap-396	80	17	,	,	PUNCT
ap-396	80	18	where	where	SCONJ
ap-396	80	19	the	the	DET
ap-396	80	20	flux	flux	NOUN
ap-396	80	21	of	of	ADP
ap-396	80	22	the	the	DET
ap-396	80	23	nitrogen	nitrogen	NOUN
ap-396	80	24	will	will	AUX
ap-396	80	25	vary	vary	VERB
ap-396	80	26	within	within	ADP
ap-396	80	27	a	a	DET
ap-396	80	28	range	range	NOUN
ap-396	80	29	of	of	ADP
ap-396	80	30	15vo	15vo	NOUN
ap-396	80	31	.	.	PUNCT
ap-396	81	1	-!o	-!o	NUM
ap-396	81	2	30	30	NUM
ap-396	81	3	o	o	NOUN
ap-396	81	4	-30	-30	NUM
ap-396	81	5	-50	-50	PROPN
ap-396	81	6	y	y	NOUN
ap-396	81	7	-	-	PUNCT
ap-396	81	8	axis	axis	NOUN
ap-396	82	1	[	[	X
ap-396	82	2	mm	mm	X
ap-396	82	3	]	]	X
ap-396	82	4	fig	fig	NOUN
ap-396	82	5	.	.	PUNCT
ap-396	83	1	5	5	NUM
ap-396	83	2	:	:	PUNCT
ap-396	83	3	profile	profile	NOUN
ap-396	83	4	monitoring	monitoring	NOUN
ap-396	83	5	of	of	ADP
ap-396	83	6	total	total	ADJ
ap-396	83	7	flux	flux	NOUN
ap-396	83	8	of	of	ADP
ap-396	83	9	nitrogen	nitrogen	NOUN
ap-396	83	10	atoms	atom	NOUN
ap-396	83	11	,	,	PUNCT
ap-396	83	12	seen	see	VERB
ap-396	83	13	from	from	ADP
ap-396	83	14	below	below	ADP
ap-396	83	15	so	so	ADV
ap-396	83	16	if	if	SCONJ
ap-396	83	17	we	we	PRON
ap-396	83	18	locate	locate	VERB
ap-396	83	19	our	our	PRON
ap-396	83	20	samples	sample	NOUN
ap-396	83	21	in	in	ADP
ap-396	83	22	this	this	DET
ap-396	83	23	region	region	NOUN
ap-396	83	24	we	we	PRON
ap-396	83	25	will	will	AUX
ap-396	83	26	achieve	achieve	VERB
ap-396	83	27	satisfactory	satisfactory	ADJ
ap-396	83	28	homogeneity	homogeneity	NOUN
ap-396	83	29	and	and	CCONJ
ap-396	83	30	will	will	AUX
ap-396	83	31	be	be	AUX
ap-396	83	32	able	able	ADJ
ap-396	83	33	to	to	PART
ap-396	83	34	control	control	VERB
ap-396	83	35	the	the	DET
ap-396	83	36	quantity	quantity	NOUN
ap-396	83	37	of	of	ADP
ap-396	83	38	the	the	DET
ap-396	83	39	nitrogen	nitrogen	NOUN
ap-396	83	40	atoms	atom	NOUN
ap-396	83	41	that	that	PRON
ap-396	83	42	arrive	arrive	VERB
ap-396	83	43	on	on	ADP
ap-396	83	44	a	a	DET
ap-396	83	45	unit	unit	NOUN
ap-396	83	46	area	area	NOUN
ap-396	83	47	per	per	ADP
ap-396	83	48	one	one	NUM
ap-396	83	49	second	second	NOUN
ap-396	83	50	.	.	PUNCT
ap-396	84	1	3	3	NUM
ap-396	84	2	calibration	calibration	NOUN
ap-396	84	3	of	of	ADP
ap-396	84	4	the	the	DET
ap-396	84	5	electron	electron	NOUN
ap-396	84	6	beam	beam	NOUN
ap-396	84	7	evaporation	evaporation	NOUN
ap-396	84	8	system	system	NOUN
ap-396	84	9	to	to	PART
ap-396	84	10	check	check	VERB
ap-396	84	11	the	the	DET
ap-396	84	12	composition	composition	NOUN
ap-396	84	13	of	of	ADP
ap-396	84	14	chromium	chromium	NOUN
ap-396	84	15	nitride	nitride	NOUN
ap-396	84	16	we	we	PRON
ap-396	84	17	also	also	ADV
ap-396	84	18	need	need	VERB
ap-396	84	19	to	to	PART
ap-396	84	20	calibrate	calibrate	VERB
ap-396	84	21	the	the	DET
ap-396	84	22	flux	flux	NOUN
ap-396	84	23	of	of	ADP
ap-396	84	24	the	the	DET
ap-396	84	25	evaporated	evaporate	VERB
ap-396	84	26	chromtum	chromtum	NOUN
ap-396	84	27	atoms	atom	NOUN
ap-396	84	28	.	.	PUNCT
ap-396	85	1	in	in	ADP
ap-396	85	2	the	the	DET
ap-396	85	3	tecvac	tecvac	NOUN
ap-396	85	4	ion	ion	NOUN
ap-396	85	5	implanter	implanter	NOUN
ap-396	85	6	the	the	DET
ap-396	85	7	evaporation	evaporation	NOUN
ap-396	85	8	is	be	AUX
ap-396	85	9	supplied	supply	VERB
ap-396	85	10	by	by	ADP
ap-396	85	11	an	an	DET
ap-396	85	12	electron	electron	NOUN
ap-396	85	13	beam	beam	NOUN
ap-396	85	14	grn	grn	PROPN
ap-396	85	15	.	.	PUNCT
ap-396	86	1	when	when	SCONJ
ap-396	86	2	the	the	DET
ap-396	86	3	electron	electron	NOUN
ap-396	86	4	beam	beam	NOUN
ap-396	86	5	gun	gun	NOUN
ap-396	86	6	is	be	AUX
ap-396	86	7	running	run	VERB
ap-396	86	8	,	,	PUNCT
ap-396	86	9	it	it	PRON
ap-396	86	10	produces	produce	VERB
ap-396	86	11	a	a	DET
ap-396	86	12	powerful	powerful	ADJ
ap-396	86	13	beam	beam	NOUN
ap-396	86	14	ofelectrons	ofelectron	NOUN
ap-396	86	15	that	that	PRON
ap-396	86	16	are	be	AUX
ap-396	86	17	accelerated	accelerate	VERB
ap-396	86	18	by	by	ADP
ap-396	86	19	negative	negative	ADJ
ap-396	86	20	high	high	ADJ
ap-396	86	21	-	-	PUNCT
ap-396	86	22	tension	tension	NOUN
ap-396	86	23	up	up	ADP
ap-396	86	24	to	to	ADP
ap-396	86	25	-10	-10	PUNCT
ap-396	86	26	kv	kv	PROPN
ap-396	86	27	this	this	DET
ap-396	86	28	electron	electron	NOUN
ap-396	86	29	beam	beam	NOUN
ap-396	86	30	melts	melt	NOUN
ap-396	86	31	and	and	CCONJ
ap-396	86	32	evaporates	evaporate	VERB
ap-396	86	33	the	the	DET
ap-396	86	34	chromium	chromium	NOUN
ap-396	86	35	that	that	PRON
ap-396	86	36	deposits	deposit	VERB
ap-396	86	37	on	on	ADP
ap-396	86	38	the	the	DET
ap-396	86	39	sample	sample	NOUN
ap-396	86	40	.	.	PUNCT
ap-396	87	1	besides	besides	SCONJ
ap-396	87	2	depositing	deposit	VERB
ap-396	87	3	chromium	chromium	NOUN
ap-396	87	4	on	on	ADP
ap-396	87	5	the	the	DET
ap-396	87	6	sample	sample	NOUN
ap-396	87	7	that	that	PRON
ap-396	87	8	is	be	AUX
ap-396	87	9	mounted	mount	VERB
ap-396	87	10	on	on	ADP
ap-396	87	11	the	the	DET
ap-396	87	12	rotary	rotary	NOUN
ap-396	87	13	manipulator	manipulator	NOUN
ap-396	87	14	,	,	PUNCT
ap-396	87	15	chromium	chromium	NOUN
ap-396	87	16	is	be	AUX
ap-396	87	17	also	also	ADV
ap-396	87	18	deposited	deposit	VERB
ap-396	87	19	on	on	ADP
ap-396	87	20	the	the	DET
ap-396	87	21	quartz	quartz	NOUN
ap-396	87	22	crystal	crystal	NOUN
ap-396	87	23	microbalance	microbalance	NOUN
ap-396	87	24	.	.	PUNCT
ap-396	88	1	this	this	DET
ap-396	88	2	crystal	crystal	NOUN
ap-396	88	3	oscillates	oscillate	NOUN
ap-396	88	4	with	with	ADP
ap-396	88	5	an	an	DET
ap-396	88	6	original	original	ADJ
ap-396	88	7	frequency	frequency	NOUN
ap-396	88	8	,	,	PUNCT
ap-396	88	9	of	of	ADP
ap-396	88	10	5	5	NUM
ap-396	88	11	mhz	mhz	NOUN
ap-396	88	12	,	,	PUNCT
ap-396	88	13	and	and	CCONJ
ap-396	88	14	the	the	DET
ap-396	88	15	frequency	frequency	NOUN
ap-396	88	16	of	of	ADP
ap-396	88	17	oscillation	oscillation	NOUN
ap-396	88	18	decreases	decrease	VERB
ap-396	88	19	with	with	ADP
ap-396	88	20	the	the	DET
ap-396	88	21	mass	mass	NOUN
ap-396	88	22	of	of	ADP
ap-396	88	23	deposited	deposit	VERB
ap-396	88	24	chromium	chromium	NOUN
ap-396	88	25	.	.	PUNCT
ap-396	89	1	in	in	ADP
ap-396	89	2	this	this	DET
ap-396	89	3	way	way	NOUN
ap-396	89	4	we	we	PRON
ap-396	89	5	can	can	AUX
ap-396	89	6	measure	measure	VERB
ap-396	89	7	the	the	DET
ap-396	89	8	thickness	thickness	NOUN
ap-396	89	9	of	of	ADP
ap-396	89	10	the	the	DET
ap-396	89	11	deposited	deposit	VERB
ap-396	89	12	coatings	coating	NOUN
ap-396	89	13	.	.	PUNCT
ap-396	90	1	to	to	PART
ap-396	90	2	check	check	VERB
ap-396	90	3	the	the	DET
ap-396	90	4	measured	measured	ADJ
ap-396	90	5	thickness	thickness	NOUN
ap-396	90	6	of	of	ADP
ap-396	90	7	the	the	DET
ap-396	90	8	coatings	coating	NOUN
ap-396	90	9	,	,	PUNCT
ap-396	90	10	the	the	DET
ap-396	90	11	thlystep	thlystep	NOUN
ap-396	90	12	m€thod	m€thod	NOUN
ap-396	90	13	was	be	AUX
ap-396	90	14	used	use	VERB
ap-396	90	15	.	.	PUNCT
ap-396	91	1	in	in	ADP
ap-396	91	2	this	this	DET
ap-396	91	3	method	method	NOUN
ap-396	91	4	,	,	PUNCT
ap-396	91	5	a	a	DET
ap-396	91	6	thin	thin	ADJ
ap-396	91	7	needle	needle	NOUN
ap-396	91	8	moves	move	NOUN
ap-396	91	9	along	along	ADP
ap-396	91	10	the	the	DET
ap-396	91	11	surface	surface	NOUN
ap-396	91	12	and	and	CCONJ
ap-396	91	13	detects	detect	VERB
ap-396	91	14	the	the	DET
ap-396	91	15	step	step	NOUN
ap-396	91	16	between	between	ADP
ap-396	91	17	the	the	DET
ap-396	91	18	surface	surface	NOUN
ap-396	91	19	ofthe	ofthe	NOUN
ap-396	91	20	substrate	substrate	NOUN
ap-396	91	21	and	and	CCONJ
ap-396	91	22	the	the	DET
ap-396	91	23	surface	surface	NOUN
ap-396	91	24	ofthe	ofthe	NOUN
ap-396	91	25	coating	coating	NOUN
ap-396	91	26	.	.	PUNCT
ap-396	92	1	then	then	ADV
ap-396	92	2	the	the	DET
ap-396	92	3	value	value	NOUN
ap-396	92	4	of	of	ADP
ap-396	92	5	this	this	DET
ap-396	92	6	step	step	NOUN
ap-396	92	7	is	be	AUX
ap-396	92	8	converted	convert	VERB
ap-396	92	9	into	into	ADP
ap-396	92	10	an	an	DET
ap-396	92	11	electrical	electrical	ADJ
ap-396	92	12	signal	signal	NOUN
ap-396	92	13	and	and	CCONJ
ap-396	92	14	the	the	DET
ap-396	92	15	thickness	thickness	NOUN
ap-396	92	16	of	of	ADP
ap-396	92	17	the	the	DET
ap-396	92	18	coating	coating	NOUN
ap-396	92	19	is	be	AUX
ap-396	92	20	displayed	display	VERB
ap-396	92	21	.	.	PUNCT
ap-396	93	1	to	to	PART
ap-396	93	2	obtain	obtain	VERB
ap-396	93	3	the	the	DET
ap-396	93	4	quantity	quantity	NOUN
ap-396	93	5	of	of	ADP
ap-396	93	6	the	the	DET
ap-396	93	7	chromium	chromium	NOUN
ap-396	93	8	atoms	atom	NOUN
ap-396	93	9	in	in	ADP
ap-396	93	10	our	our	PRON
ap-396	93	11	coatings	coating	NOUN
ap-396	93	12	,	,	PUNCT
ap-396	93	13	the	the	DET
ap-396	93	14	rbs	rbs	PROPN
ap-396	93	15	(	(	PUNCT
ap-396	93	16	rutherford	rutherford	PROPN
ap-396	93	17	backscattering	backscattering	NOUN
ap-396	93	18	spectroscopy	spectroscopy	NOUN
ap-396	93	19	)	)	PUNCT
ap-396	93	20	method	method	NOUN
ap-396	93	21	was	be	AUX
ap-396	93	22	used	use	VERB
ap-396	93	23	.	.	PUNCT
ap-396	94	1	our	our	PRON
ap-396	94	2	samples	sample	NOUN
ap-396	94	3	were	be	AUX
ap-396	94	4	bombarded	bombard	VERB
ap-396	94	5	by	by	ADP
ap-396	94	6	alpha	alpha	ADJ
ap-396	94	7	particles	particle	NOUN
ap-396	94	8	with	with	ADP
ap-396	94	9	energy	energy	NOUN
ap-396	94	10	2mev	2mev	NOUN
ap-396	94	11	.	.	PUNCT
ap-396	95	1	by	by	ADP
ap-396	95	2	measuring	measure	VERB
ap-396	95	3	the	the	DET
ap-396	95	4	energy	energy	NOUN
ap-396	95	5	of	of	ADP
ap-396	95	6	the	the	DET
ap-396	95	7	backscattered	backscattered	ADJ
ap-396	95	8	particles	particle	NOUN
ap-396	95	9	the	the	DET
ap-396	95	10	exact	exact	ADJ
ap-396	95	11	quantity	quantity	NOUN
ap-396	95	12	of	of	ADP
ap-396	95	13	chromium	chromium	NOUN
ap-396	95	14	atoms	atom	NOUN
ap-396	95	15	was	be	AUX
ap-396	95	16	determined	determine	VERB
ap-396	95	17	.	.	PUNCT
ap-396	96	1	examples	example	NOUN
ap-396	96	2	of	of	ADP
ap-396	96	3	the	the	DET
ap-396	96	4	energetic	energetic	ADJ
ap-396	96	5	spectra	spectra	NOUN
ap-396	96	6	are	be	AUX
ap-396	96	7	shown	show	VERB
ap-396	96	8	in	in	ADP
ap-396	96	9	fig	fig	NOUN
ap-396	96	10	.	.	PUNCT
ap-396	97	1	6	6	NUM
ap-396	97	2	and	and	CCONJ
ap-396	97	3	tig	tig	X
ap-396	97	4	.	.	PUNCT
ap-396	98	1	7	7	X
ap-396	98	2	.	.	X
ap-396	99	1	k	k	NOUN
ap-396	99	2	i+	i+	NUM
ap-396	100	1	it	it	PRON
ap-396	100	2	bsac	bsac	ADJ
ap-396	100	3	.	.	PUNCT
ap-396	101	1	i.	i.	PROPN
ap-396	101	2	ii	ii	PROPN
ap-396	101	3	exp.7201(200	exp.7201(200	PROPN
ap-396	102	1	nm	nm	NOUN
ap-396	102	2	)	)	PUNCT
ap-396	102	3	o	o	NOUN
ap-396	102	4	si	si	X
ap-396	102	5	f'\	f'\	PROPN
ap-396	102	6	)	)	PUNCT
ap-396	102	7	\	\	PROPN
ap-396	102	8	1	1	NUM
ap-396	102	9	000	000	NUM
ap-396	102	10	200	200	NUM
ap-396	102	11	400	400	NUM
ap-396	102	12	600	600	NUM
ap-396	102	13	800	800	NUM
ap-396	102	14	1000	1000	NUM
ap-396	102	15	1200	1200	NUM
ap-396	102	16	1400	1400	NUM
ap-396	102	17	energy	energy	NOUN
ap-396	102	18	(	(	PUNCT
ap-396	102	19	kev	kev	PROPN
ap-396	102	20	)	)	PUNCT
ap-396	102	21	r600	r600	PROPN
ap-396	102	22	fig	fig	NOUN
ap-396	102	23	6	6	NUM
ap-396	102	24	:	:	PUNCT
ap-396	102	25	sample	sample	NOUN
ap-396	102	26	200	200	NUM
ap-396	102	27	nm	nm	NOUN
ap-396	102	28	..	..	PROPN
ap-396	102	29	2	2	NUM
ap-396	102	30	mev	mev	PROPN
ap-396	102	31	alpha	alpha	NOUN
ap-396	102	32	particles	particle	NOUN
ap-396	102	33	.	.	PUNCT
ap-396	103	1	the	the	DET
ap-396	103	2	quantity	quantity	NOUN
ap-396	103	3	of	of	ADP
ap-396	103	4	cr	cr	NOUN
ap-396	103	5	atoms	atom	NOUN
ap-396	103	6	is	be	AUX
ap-396	103	7	2.1	2.1	NUM
ap-396	103	8	.	.	PUNCT
ap-396	104	1	i0"'cm	i0"'cm	NOUN
ap-396	104	2	-	-	PUNCT
ap-396	104	3	t.	t.	NOUN
ap-396	104	4	exp.7204	exp.7204	PROPN
ap-396	104	5	(	(	PUNCT
ap-396	104	6	300	300	NUM
ap-396	104	7	nm	nm	NOUN
ap-396	104	8	)	)	PUNCT
ap-396	104	9	cr	cr	NOUN
ap-396	104	10	-	-	PUNCT
ap-396	104	11	tt\	tt\	NOUN
ap-396	104	12	\	\	PUNCT
ap-396	105	1	i	i	PRON
ap-396	105	2	e	e	X
ap-396	105	3	(	(	PUNCT
ap-396	105	4	5	5	NUM
ap-396	105	5	5b	5b	NUM
ap-396	105	6	c	c	NOUN
ap-396	105	7	a	a	DET
ap-396	105	8	n	n	ADV
ap-396	105	9	-t200	-t200	PROPN
ap-396	105	10	400	400	NUM
ap-396	105	11	600	600	NUM
ap-396	105	12	800	800	NUM
ap-396	105	13	1000	1000	NUM
ap-396	105	14	1200	1200	NUM
ap-396	105	15	1400	1400	NUM
ap-396	105	16	1600	1600	NUM
ap-396	105	17	energy	energy	NOUN
ap-396	105	18	(	(	PUNCT
ap-396	105	19	kev	kev	PROPN
ap-396	105	20	)	)	PUNCT
ap-396	105	21	fig	fig	NOUN
ap-396	105	22	.	.	PUNCT
ap-396	106	1	7	7	NUM
ap-396	106	2	:	:	PUNCT
ap-396	106	3	sample	sample	NOUN
ap-396	106	4	300	300	NUM
ap-396	106	5	nm	nm	NOUN
ap-396	106	6	,	,	PUNCT
ap-396	106	7	2_mev^alpha	2_mev^alpha	ADJ
ap-396	106	8	particles	particle	NOUN
ap-396	106	9	.	.	PUNCT
ap-396	107	1	the	the	DET
ap-396	107	2	quantity	quantity	NOUN
ap-396	107	3	of	of	ADP
ap-396	107	4	cr	cr	NOUN
ap-396	107	5	aroms	arom	NOUN
ap-396	107	6	is	be	AUX
ap-396	107	7	5.05	5.05	NUM
ap-396	107	8	.	.	PUNCT
ap-396	108	1	i0''cm-	i0''cm-	NOUN
ap-396	108	2	'	'	PUNCT
ap-396	108	3	.	.	PUNCT
ap-396	109	1	by	by	ADP
ap-396	109	2	comparing	compare	VERB
ap-396	109	3	this	this	DET
ap-396	109	4	data	datum	NOUN
ap-396	109	5	with	with	ADP
ap-396	109	6	the	the	DET
ap-396	109	7	data	datum	NOUN
ap-396	109	8	measured	measure	VERB
ap-396	109	9	by	by	ADP
ap-396	109	10	our	our	PRON
ap-396	109	11	ibad	ibad	NOUN
ap-396	109	12	equipment	equipment	NOUN
ap-396	109	13	we	we	PRON
ap-396	109	14	calibrated	calibrate	VERB
ap-396	109	15	the	the	DET
ap-396	109	16	electron	electron	NOUN
ap-396	109	17	beam	beam	NOUN
ap-396	109	18	evaporation	evaporation	NOUN
ap-396	109	19	system	system	NOUN
ap-396	109	20	.	.	PUNCT
ap-396	110	1	for	for	ADP
ap-396	110	2	example	example	NOUN
ap-396	110	3	,	,	PUNCT
ap-396	110	4	when	when	SCONJ
ap-396	110	5	the	the	DET
ap-396	110	6	electron	electron	NOUN
ap-396	110	7	beam	beam	NOUN
ap-396	110	8	currentwas	currentwas	PROPN
ap-396	110	9	l00ma	l00ma	PROPN
ap-396	110	10	,	,	PUNCT
ap-396	110	11	the	the	DET
ap-396	110	12	flux	flux	NOUN
ap-396	110	13	of	of	ADP
ap-396	110	14	the	the	DET
ap-396	110	15	chromium	chromium	NOUN
ap-396	110	16	atoms	atom	NOUN
ap-396	110	17	was	be	AUX
ap-396	110	18	2'1013	2'1013	PROPN
ap-396	110	19	at'cm-2	at'cm-2	NUM
ap-396	110	20	.	.	PUNCT
ap-396	111	1	conclusions	conclusion	NOUN
ap-396	111	2	our	our	PRON
ap-396	111	3	ultimate	ultimate	ADJ
ap-396	111	4	goal	goal	NOUN
ap-396	111	5	is	be	AUX
ap-396	111	6	to	to	PART
ap-396	111	7	prepare	prepare	VERB
ap-396	111	8	coatings	coating	NOUN
ap-396	111	9	of	of	ADP
ap-396	111	10	chromium	chromium	NOUN
ap-396	111	11	nitride	nitride	NOUN
ap-396	111	12	.	.	PUNCT
ap-396	112	1	to	to	PART
ap-396	112	2	check	check	VERB
ap-396	112	3	the	the	DET
ap-396	112	4	properties	property	NOUN
ap-396	112	5	of	of	ADP
ap-396	112	6	these	these	DET
ap-396	112	7	coatings	coating	NOUN
ap-396	112	8	we	we	PRON
ap-396	112	9	need	need	VERB
ap-396	112	10	to	to	PART
ap-396	112	11	calibrate	calibrate	VERB
ap-396	112	12	the	the	DET
ap-396	112	13	deposition	deposition	NOUN
ap-396	112	14	subprocesses	subprocesse	VERB
ap-396	112	15	the	the	DET
ap-396	112	16	atomic	atomic	ADJ
ap-396	112	17	fluxes	flux	NOUN
ap-396	112	18	of	of	ADP
ap-396	112	19	chromium	chromium	NOUN
ap-396	112	20	and	and	CCONJ
ap-396	112	21	nitrogen	nitrogen	NOUN
ap-396	112	22	in	in	ADP
ap-396	112	23	the	the	DET
ap-396	112	24	ibad	ibad	PROPN
ap-396	112	25	equipment	equipment	NOUN
ap-396	112	26	.	.	PUNCT
ap-396	113	1	these	these	DET
ap-396	113	2	calibrations	calibration	NOUN
ap-396	113	3	have	have	AUX
ap-396	113	4	been	be	AUX
ap-396	113	5	done	do	VERB
ap-396	113	6	.	.	PUNCT
ap-396	114	1	in	in	ADP
ap-396	114	2	order	order	NOUN
ap-396	114	3	to	to	PART
ap-396	114	4	calibrate	calibrate	VERB
ap-396	114	5	the	the	DET
ap-396	114	6	ion	ion	NOUN
ap-396	114	7	beam	beam	NOUN
ap-396	114	8	we	we	PRON
ap-396	114	9	designed	design	VERB
ap-396	114	10	and	and	CCONJ
ap-396	114	11	constructed	construct	VERB
ap-396	114	12	an	an	DET
ap-396	114	13	xy	xy	ADJ
ap-396	114	14	-	-	PUNCT
ap-396	114	15	mechanical	mechanical	ADJ
ap-396	114	16	scanner	scanner	NOUN
ap-396	114	17	with	with	ADP
ap-396	114	18	a	a	DET
ap-396	114	19	faraday	faraday	PROPN
ap-396	114	20	cup	cup	NOUN
ap-396	114	21	detector	detector	NOUN
ap-396	114	22	.	.	PUNCT
ap-396	115	1	by	by	ADP
ap-396	115	2	mathematical	mathematical	ADJ
ap-396	115	3	processing	processing	NOUN
ap-396	115	4	of	of	ADP
ap-396	115	5	the	the	DET
ap-396	115	6	data	datum	NOUN
ap-396	115	7	we	we	PRON
ap-396	115	8	found	find	VERB
ap-396	115	9	the	the	DET
ap-396	115	10	flux	flux	NOUN
ap-396	115	11	of	of	ADP
ap-396	115	12	the	the	DET
ap-396	115	13	nitrogen	nitrogen	NOUN
ap-396	115	14	atoms	atom	NOUN
ap-396	115	15	.	.	PUNCT
ap-396	116	1	to	to	PART
ap-396	116	2	obtain	obtain	VERB
ap-396	116	3	the	the	DET
ap-396	116	4	flux	flux	NOUN
ap-396	116	5	of	of	ADP
ap-396	116	6	the	the	DET
ap-396	116	7	chromium	chromium	NOUN
ap-396	116	8	atoms	atom	NOUN
ap-396	116	9	we	we	PRON
ap-396	116	10	used	use	VERB
ap-396	116	11	the	the	DET
ap-396	116	12	rbs	rbs	PROPN
ap-396	116	13	and	and	CCONJ
ap-396	116	14	talystep	talystep	NOUN
ap-396	116	15	methods	method	NOUN
ap-396	116	16	.	.	PUNCT
ap-396	117	1	25	25	NUM
ap-396	117	2	acta	acta	PROPN
ap-396	117	3	polytechnica	polytechnica	PROPN
ap-396	117	4	vol	vol	NOUN
ap-396	117	5	.	.	PUNCT
ap-396	118	1	43	43	NUM
ap-396	118	2	no	no	NOUN
ap-396	118	3	.	.	NOUN
ap-396	118	4	112003	112003	NUM
ap-396	118	5	now	now	ADV
ap-396	118	6	,	,	PUNCT
ap-396	118	7	on	on	ADP
ap-396	118	8	the	the	DET
ap-396	118	9	basis	basis	NOUN
ap-396	118	10	of	of	ADP
ap-396	118	11	this	this	DET
ap-396	118	12	data	datum	NOUN
ap-396	118	13	,	,	PUNCT
ap-396	118	14	we	we	PRON
ap-396	118	15	can	can	AUX
ap-396	118	16	perform	perform	VERB
ap-396	118	17	crn	crn	PROPN
ap-396	118	18	*	*	PUNCT
ap-396	118	19	coatdoc	coatdoc	PROPN
ap-396	118	20	.	.	PUNCT
ap-396	119	1	ing	ing	ADJ
ap-396	119	2	.	.	PUNCT
ap-396	120	1	frantisek	frantisek	PROPN
ap-396	120	2	ierny	ierny	PROPN
ap-396	120	3	,	,	PUNCT
ap-396	120	4	csc	csc	PROPN
ap-396	120	5	.	.	PROPN
ap-396	120	6	ings	ing	NOUN
ap-396	120	7	with	with	ADP
ap-396	120	8	controlled	control	VERB
ap-396	120	9	composirion	composirion	NOUN
ap-396	120	10	and	and	CCONJ
ap-396	120	11	properties	property	NOUN
ap-396	120	12	.	.	PUNCT
ap-396	121	1	phone	phone	NOUN
ap-396	121	2	:	:	PUNCT
ap-396	121	3	1420	1420	NUM
ap-396	121	4	224	224	NUM
ap-396	121	5	zbz	zbz	NOUN
ap-396	121	6	$	$	SYM
ap-396	121	7	;	;	PUNCT
ap-396	121	8	7	7	NUM
ap-396	121	9	e	e	NOUN
ap-396	121	10	-	-	NOUN
ap-396	121	11	mail	mail	NOUN
ap-396	121	12	:	:	PUNCT
ap-396	121	13	cernyf@fsid.cvur.cz	cernyf@fsid.cvur.cz	NOUN
ap-396	121	14	acknowledment	acknowledment	NOUN
ap-396	121	15	this	this	DET
ap-396	121	16	research	research	NOUN
ap-396	121	17	has	have	AUX
ap-396	121	18	been	be	AUX
ap-396	121	19	supported	support	VERB
ap-396	121	20	by	by	ADP
ap-396	121	21	gacr	gacr	NOUN
ap-396	121	22	grant	grant	NOUN
ap-396	121	23	no	no	PROPN
ap-396	121	24	.	.	PROPN
ap-396	121	25	106/02/1194	106/02/1194	NOUN
ap-396	121	26	and	and	CCONJ
ap-396	121	27	conducted	conduct	VERB
ap-396	121	28	within	within	ADP
ap-396	121	29	the	the	DET
ap-396	121	30	fiamework	fiamework	NOUN
ap-396	121	31	of	of	ADP
ap-396	121	32	research	research	NOUN
ap-396	121	33	project	project	NOUN
ap-396	121	34	no	no	PROPN
ap-396	121	35	.	.	PUNCT
ap-396	122	1	j04l98	j04l98	NOUN
ap-396	122	2	:	:	PUNCT
ap-396	123	1	2	2	NUM
ap-396	123	2	i	i	NOUN
ap-396	123	3	00000	00000	NUM
ap-396	123	4	i	i	PRON
ap-396	123	5	2	2	X
ap-396	123	6	.	.	PUNCT
ap-396	123	7	references	reference	NOUN
ap-396	123	8	tll	tll	PROPN
ap-396	123	9	galvanetto	galvanetto	PROPN
ap-396	123	10	,	,	PUNCT
ap-396	123	11	e.	e.	PROPN
ap-396	123	12	,	,	PUNCT
ap-396	123	13	galliano	galliano	PROPN
ap-396	123	14	,	,	PUNCT
ap-396	123	15	f.	f.	PROPN
ap-396	123	16	p.	p.	PROPN
ap-396	123	17	,	,	PUNCT
ap-396	123	18	fossati	fossati	PROPN
ap-396	123	19	,	,	PUNCT
ap-396	123	20	a.	a.	PROPN
ap-396	123	21	,	,	PUNCT
ap-396	123	22	borgioli	borgioli	PROPN
ap-396	123	23	,	,	PUNCT
ap-396	123	24	f.	f.	PROPN
ap-396	123	25	:	:	PUNCT
ap-396	123	26	surf	surf	NOUN
ap-396	123	27	.	.	PUNCT
ap-396	124	1	coat	coat	NOUN
ap-396	124	2	.	.	PUNCT
ap-396	125	1	technol	technol	PROPN
ap-396	125	2	.	.	PROPN
ap-396	125	3	,	,	PUNCT
ap-396	125	4	yol	yol	PROPN
ap-396	125	5	.	.	PUNCT
ap-396	126	1	44,2002	44,2002	NUM
ap-396	126	2	,	,	PUNCT
ap-396	126	3	p.	p.	NOUN
ap-396	126	4	1593	1593	NUM
ap-396	126	5	-	-	PUNCT
ap-396	126	6	lo0o	lo0o	PROPN
ap-396	126	7	.	.	PUNCT
ap-396	127	1	i2l	i2l	PROPN
ap-396	127	2	mernagh	mernagh	PROPN
ap-396	127	3	,	,	PUNCT
ap-396	127	4	v.	v.	ADP
ap-396	127	5	a	a	PRON
ap-396	127	6	,	,	PUNCT
ap-396	127	7	kelly	kelly	PROPN
ap-396	127	8	,	,	PUNCT
ap-396	127	9	t.	t.	PROPN
ap-396	127	10	c.	c.	PROPN
ap-396	127	11	,	,	PUNCT
ap-396	127	12	ahern	ahern	PROPN
ap-396	127	13	,	,	PUNCT
ap-396	127	14	m.	m.	NOUN
ap-396	127	15	,	,	PUNCT
ap-396	127	16	kennedy	kennedy	PROPN
ap-396	127	17	,	,	PUNCT
ap-396	127	18	a.	a.	PROPN
ap-396	127	19	d.	d.	PROPN
ap-396	127	20	,	,	PUNCT
ap-396	127	21	adriansen	adriansen	PROPN
ap-396	127	22	,	,	PUNCT
ap-396	127	23	a	a	DET
ap-396	127	24	p.	p.	NOUN
ap-396	127	25	m.	m.	NOUN
ap-396	127	26	,	,	PUNCT
ap-396	127	27	ramackers	ramacker	NOUN
ap-396	127	28	,	,	PUNCT
ap-396	127	29	p.	p.	PROPN
ap-396	127	30	p.j	p.j	PROPN
ap-396	127	31	.	.	PROPN
ap-396	127	32	,	,	PUNCT
ap-396	127	33	mcdonnel	mcdonnel	PROPN
ap-396	127	34	,	,	PUNCT
ap-396	127	35	l.	l.	PROPN
ap-396	127	36	,	,	PUNCT
ap-396	127	37	kockoek	kockoek	PROPN
ap-396	127	38	,	,	PUNCT
ap-396	127	39	r.	r.	PROPN
ap-396	127	40	:	:	PUNCT
ap-396	127	41	surf	surf	NOUN
ap-396	127	42	.	.	PUNCT
ap-396	128	1	coat	coat	NOUN
ap-396	128	2	.	.	PUNCT
ap-396	129	1	technol	technol	PROPN
ap-396	129	2	.	.	PROPN
ap-396	129	3	,	,	PUNCT
ap-396	129	4	vol	vol	NOUN
ap-396	129	5	.	.	PROPN
ap-396	129	6	49	49	NUM
ap-396	129	7	,	,	PUNCT
ap-396	129	8	1991	1991	NUM
ap-396	129	9	,	,	PUNCT
ap-396	129	10	p.	p.	NOUN
ap-396	129	11	a62	a62	PROPN
ap-396	129	12	.	.	PUNCT
ap-396	130	1	t3l	t3l	ADJ
ap-396	130	2	smidt	smidt	NOUN
ap-396	130	3	,	,	PUNCT
ap-396	130	4	f.	f.	PROPN
ap-396	130	5	a.	a.	PROPN
ap-396	130	6	:	:	PUNCT
ap-396	131	1	int	int	NOUN
ap-396	131	2	.	.	PUNCT
ap-396	132	1	mater	mater	PROPN
ap-396	132	2	.	.	PUNCT
ap-396	133	1	rev	rev	PROPN
ap-396	133	2	.	.	PROPN
ap-396	133	3	,	,	PUNCT
ap-396	133	4	vol	vol	NOUN
ap-396	133	5	.	.	PROPN
ap-396	133	6	35	35	NUM
ap-396	133	7	,	,	PUNCT
ap-396	133	8	1990	1990	NUM
ap-396	133	9	,	,	PUNCT
ap-396	133	10	p.	p.	NOUN
ap-396	133	11	61	61	NUM
ap-396	133	12	.	.	PUNCT
ap-396	134	1	t4l	t4l	PROPN
ap-396	134	2	kumar	kumar	PROPN
ap-396	134	3	,	,	PUNCT
ap-396	134	4	s.	s.	PROPN
ap-396	134	5	,	,	PUNCT
ap-396	134	6	rajul	rajul	PROPN
ap-396	134	7	,	,	PUNCT
ap-396	134	8	v.	v.	PROPN
ap-396	134	9	s.	s.	PROPN
ap-396	134	10	,	,	PUNCT
ap-396	134	11	arunachalam	arunachalam	PROPN
ap-396	134	12	,	,	PUNCT
ap-396	134	13	j.	j.	PROPN
ap-396	134	14	,	,	PUNCT
ap-396	134	15	khanna	khanna	PROPN
ap-396	134	16	,	,	PUNCT
ap-396	134	17	a.	a.	PROPN
ap-396	134	18	,	,	PUNCT
ap-396	134	19	prasad	prasad	PROPN
ap-396	134	20	,	,	PUNCT
ap-396	134	21	k.	k.	PROPN
ap-396	134	22	:	:	PUNCT
ap-396	134	23	thin	thin	ADJ
ap-396	134	24	solid	solid	ADJ
ap-396	134	25	films	film	NOUN
ap-396	134	26	,	,	PUNCT
ap-396	134	27	vol	vol	NOUN
ap-396	134	28	.	.	PROPN
ap-396	134	29	388	388	NUM
ap-396	134	30	,	,	PUNCT
ap-396	134	31	2001	2001	NUM
ap-396	134	32	,	,	PUNCT
ap-396	134	33	p.	p.	NOUN
ap-396	134	34	195	195	NUM
ap-396	134	35	-	-	SYM
ap-396	134	36	200	200	NUM
ap-396	134	37	.	.	PUNCT
ap-396	135	1	t5l	t5l	NOUN
ap-396	135	2	pakala	pakala	PROPN
ap-396	135	3	,	,	PUNCT
ap-396	135	4	m.	m.	NOUN
ap-396	135	5	,	,	PUNCT
ap-396	135	6	lin	lin	PROPN
ap-396	135	7	,	,	PUNCT
ap-396	135	8	r.	r.	PROPN
ap-396	135	9	y.	y.	PROPN
ap-396	135	10	:	:	PUNCT
ap-396	135	11	surf	surf	NOUN
ap-396	135	12	.	.	PUNCT
ap-396	136	1	coat	coat	NOUN
ap-396	136	2	.	.	PUNCT
ap-396	137	1	technol	technol	PROPN
ap-396	137	2	.	.	PROPN
ap-396	137	3	,	,	PUNCT
ap-396	137	4	vol	vol	NOUN
ap-396	137	5	.	.	PROPN
ap-396	137	6	81	81	NUM
ap-396	137	7	,	,	PUNCT
ap-396	137	8	1996	1996	NUM
ap-396	137	9	,	,	PUNCT
ap-396	137	10	p.	p.	NOUN
ap-396	137	11	233	233	NUM
ap-396	137	12	-	-	SYM
ap-396	137	13	239	239	NUM
ap-396	137	14	.	.	PUNCT
ap-396	138	1	t6l	t6l	PROPN
ap-396	138	2	cunha	cunha	NOUN
ap-396	138	3	,	,	PUNCT
ap-396	138	4	l.	l.	PROPN
ap-396	138	5	,	,	PUNCT
ap-396	138	6	andritschky	andritschky	NOUN
ap-396	138	7	,	,	PUNCT
ap-396	138	8	m.	m.	NOUN
ap-396	138	9	,	,	PUNCT
ap-396	138	10	rebouta	rebouta	PROPN
ap-396	138	11	,	,	PUNCT
ap-396	138	12	l.	l.	PROPN
ap-396	138	13	,	,	PUNCT
ap-396	138	14	pischow	pischow	NOUN
ap-396	138	15	,	,	PUNCT
ap-396	138	16	k.	k.	PROPN
ap-396	138	17	:	:	PUNCT
ap-396	138	18	surf	surf	NOUN
ap-396	138	19	'	'	PUNCT
ap-396	138	20	.	.	PUNCT
ap-396	139	1	coat	coat	NOUN
ap-396	139	2	.	.	PUNCT
ap-396	140	1	technol	technol	PROPN
ap-396	140	2	.	.	PROPN
ap-396	140	3	,	,	PUNCT
ap-396	140	4	vol	vol	NOUN
ap-396	140	5	.	.	PUNCT
ap-396	141	1	i19	i19	PROPN
ap-396	141	2	,	,	PUNCT
ap-396	141	3	1999	1999	NUM
ap-396	141	4	,	,	PUNCT
ap-396	141	5	p.	p.	NOUN
ap-396	142	1	i152	i152	PROPN
ap-396	142	2	-	-	PUNCT
ap-396	142	3	l160	l160	PROPN
ap-396	142	4	.	.	PUNCT
ap-396	143	1	ing	ing	PROPN
ap-396	143	2	.	.	PUNCT
ap-396	143	3	miroslav	miroslav	PROPN
ap-396	143	4	zoriy	zoriy	PROPN
ap-396	143	5	e	e	NOUN
ap-396	143	6	-	-	NOUN
ap-396	143	7	mail	mail	NOUN
ap-396	143	8	:	:	PUNCT
ap-396	143	9	mzorij@seznam.cz	mzorij@seznam.cz	PROPN
ap-396	143	10	ing	ing	PROPN
ap-396	143	11	.	.	PUNCT
ap-396	144	1	dmytro	dmytro	PROPN
ap-396	144	2	palamarchuk	palamarchuk	PROPN
ap-396	144	3	department	department	PROPN
ap-396	144	4	of	of	ADP
ap-396	144	5	physics	physics	PROPN
ap-396	144	6	doc	doc	PROPN
ap-396	144	7	.	.	PROPN
ap-396	145	1	ing	ing	PROPN
ap-396	145	2	.	.	PUNCT
ap-396	146	1	svatava	svatava	PROPN
ap-396	146	2	konviikovd	konviikovd	PROPN
ap-396	146	3	,	,	PUNCT
ap-396	146	4	csc	csc	PROPN
ap-396	146	5	.	.	PROPN
ap-396	146	6	phone	phone	NOUN
ap-396	146	7	:	:	PUNCT
ap-396	146	8	+420224	+420224	NUM
ap-396	146	9	352	352	NUM
ap-396	146	10	5ll	5ll	ADJ
ap-396	146	11	e	e	NOUN
ap-396	146	12	-	-	NOUN
ap-396	146	13	mail	mail	NOUN
ap-396	146	14	:	:	PUNCT
ap-396	146	15	konvicko@fsid.cvut.cz	konvicko@fsid.cvut.cz	PROPN
ap-396	146	16	department	department	PROPN
ap-396	146	17	of	of	ADP
ap-396	146	18	mechanics	mechanic	NOUN
ap-396	146	19	czech	czech	PROPN
ap-396	146	20	technical	technical	PROPN
ap-396	146	21	university	university	PROPN
ap-396	146	22	in	in	ADP
ap-396	146	23	prague	prague	PROPN
ap-396	146	24	faculty	faculty	NOUN
ap-396	146	25	of	of	ADP
ap-396	146	26	mechanical	mechanical	ADJ
ap-396	146	27	engineering	engineering	NOUN
ap-396	146	28	technickii	technickii	ADJ
ap-396	146	29	4	4	NUM
ap-396	146	30	.	.	NOUN
ap-396	146	31	166	166	NUM
ap-396	146	32	07	07	NUM
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ap-396	146	34	6	6	NUM
ap-396	146	35	,	,	PUNCT
ap-396	146	36	czech	czech	PROPN
ap-396	146	37	republic	republic	PROPN
ap-396	146	38	doc	doc	PROPN
ap-396	146	39	.	.	PROPN
ap-396	147	1	ing	ing	PROPN
ap-396	147	2	.	.	PUNCT
ap-396	148	1	ivan	ivan	PROPN
ap-396	148	2	htittel	htittel	PROPN
ap-396	148	3	,	,	PUNCT
ap-396	148	4	csc	csc	PROPN
ap-396	148	5	.	.	PROPN
ap-396	148	6	phone	phone	NOUN
ap-396	148	7	:	:	PUNCT
ap-396	148	8	+420	+420	PROPN
ap-396	148	9	224	224	NUM
ap-396	148	10	353	353	NUM
ap-396	148	11	205	205	NUM
ap-396	148	12	e	e	NOUN
ap-396	148	13	-	-	NOUN
ap-396	148	14	mail	mail	NOUN
ap-396	148	15	:	:	PUNCT
ap-396	148	16	huttel@vscht.cz	huttel@vscht.cz	PROPN
ap-396	148	17	institute	institute	PROPN
ap-396	148	18	of	of	ADP
ap-396	148	19	chemical	chemical	PROPN
ap-396	148	20	technology	technology	NOUN
ap-396	148	21	technickd	technickd	VERB
ap-396	148	22	3	3	NUM
ap-396	148	23	,	,	PUNCT
ap-396	148	24	166	166	NUM
ap-396	148	25	28	28	NUM
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ap-396	148	27	6	6	NUM
ap-396	148	28	,	,	PUNCT
ap-396	148	29	czech	czech	PROPN
ap-396	148	30	republic	republic	NOUN
ap-396	149	1	26	26	NUM
ap-396	149	2	scan	scan	NOUN
ap-396	149	3	23	23	NUM
ap-396	149	4	scan	scan	NOUN
ap-396	149	5	24	24	NUM
ap-396	149	6	scan	scan	NOUN
ap-396	149	7	25	25	NUM
ap-396	149	8	scan	scan	NOUN
ap-396	149	9	26	26	NUM