id	sid	tid	token	lemma	pos
ap-398	1	1	acta	acta	PROPN
ap-398	1	2	polytechnica	polytechnica	PROPN
ap-398	1	3	vol	vol	NOUN
ap-398	1	4	.	.	PUNCT
ap-398	2	1	43	43	NUM
ap-398	2	2	no	no	NOUN
ap-398	2	3	.	.	PUNCT
ap-398	3	1	l/2003	l/2003	PROPN
ap-398	3	2	dlc	dlc	NOUN
ap-398	3	3	fitms	fitms	NOUN
ap-398	3	4	deposited	deposit	VERB
ap-398	3	5	by	by	ADP
ap-398	3	6	the	the	DET
ap-398	3	7	dc	dc	PROPN
ap-398	3	8	pacvi	pacvi	PROPN
ap-398	3	9	)	)	PUNCT
ap-398	3	10	method	method	PROPN
ap-398	3	11	d.	d.	PROPN
ap-398	3	12	palamarchuk	palamarchuk	PROPN
ap-398	3	13	,	,	PUNCT
ap-398	3	14	m.	m.	NOUN
ap-398	3	15	zoriy	zoriy	PROPN
ap-398	3	16	,	,	PUNCT
ap-398	3	17	j.	j.	PROPN
ap-398	3	18	gurovid	gurovid	PROPN
ap-398	3	19	,	,	PUNCT
ap-398	3	20	f.ierny	f.ierny	PROPN
ap-398	3	21	,	,	PUNCT
ap-398	3	22	s.	s.	PROPN
ap-398	3	23	konvidkov6,i	konvidkov6,i	PROPN
ap-398	3	24	.	.	PUNCT
ap-398	4	1	htittel	htittel	PROPN
ap-398	4	2	dlc	dlc	PROPN
ap-398	4	3	(	(	PUNCT
ap-398	4	4	dinmond,-like	dinmond,-like	ADP
ap-398	4	5	carbon	carbon	NOUN
ap-398	4	6	)	)	PUNCT
ap-398	4	7	coatings	coating	NOUN
ap-398	4	8	haue	haue	NOUN
ap-398	4	9	bee	bee	NOUN
ap-398	4	10	-	-	PUNCT
ap-398	4	11	n	n	PRON
ap-398	4	12	sugguted	suggute	VERB
ap-398	4	13	as	as	ADP
ap-398	4	14	protectiae	protectiae	ADJ
ap-398	4	15	surface	surface	NOUN
ap-398	4	16	layers.against	layers.against	ADP
ap-398	4	17	.uear	.uear	NOUN
ap-398	4	18	'	'	PUNCT
ap-398	4	19	howeuer	howeuer	NOUN
ap-398	4	20	h"ard	h"ard	VERB
ap-398	4	21	dlc	dlc	NOUN
ap-398	4	22	coatings	coating	NOUN
ap-398	4	23	'	'	PART
ap-398	4	24	especially	especially	ADV
ap-398	4	25	those	those	PRON
ap-398	4	26	of	of	ADP
ap-398	4	27	greater	great	ADJ
ap-398	4	28	,	,	PUNCT
ap-398	4	29	hii	hii	PROPN
ap-398	4	30	,	,	PUNCT
ap-398	4	31	inru	inru	NOUN
ap-398	4	32	,	,	PUNCT
ap-398	4	33	hiae	hiae	ADJ
ap-398	4	34	poor	poor	ADJ
ap-398	4	35	ad	ad	NOUN
ap-398	4	36	,	,	PUNCT
ap-398	4	37	hr1l.9.i7o	hr1l.9.i7o	ADJ
ap-398	4	38	substraies	substraie	NOUN
ap-398	4	39	.	.	PUNCT
ap-398	5	1	we	we	PRON
ap-398	5	2	haae	haae	VERB
ap-398	5	3	used	use	VERB
ap-398	5	4	'	'	PUNCT
ap-398	5	5	seieral	seieral	ADJ
ap-398	5	6	iay	iay	PROPN
ap-398	5	7	to	to	ADP
ap-398	5	8	i'ncrease.the	i'ncrease.the	DET
ap-398	5	9	adhesion	adhesion	NOUN
ap-398	5	10	of	of	ADP
ap-398	5	11	dlc	dlc	NOUN
ap-398	5	12	coatings	coating	NOUN
ap-398	5	13	brebared	brebare	VERB
ap-398	5	14	.	.	PUNCT
ap-398	6	1	by	by	ADP
ap-398	6	2	the	the	DET
ap-398	6	3	pacvd	pacvd	NOUN
ap-398	6	4	(	(	PUNCT
ap-398	6	5	plasma	plasma	NOUN
ap-398	6	6	assisted	assist	VERB
ap-398	6	7	.	.	PUNCT
ap-398	7	1	chemicar	chemicar	ADJ
ap-398	7	2	vapour	vapour	NOUN
ap-398	7	3	deposition	deposition	NOUN
ap-398	7	4	)	)	PUNCT
ap-398	7	5	method	method	NOUN
ap-398	7	6	in	in	ADP
ap-398	7	7	steel	steel	NOUN
ap-398	7	8	substrates	substrate	NOUN
ap-398	7	9	.	.	PUNCT
ap-398	8	1	one	one	NUM
ap-398	8	2	of	of	ADP
ap-398	8	3	these	these	PRON
ap-398	8	4	is	be	AUX
ap-398	8	5	the	the	DET
ap-398	8	6	dc	dc	PROPN
ap-398	8	7	pacvd	pacvd	PROPN
ap-398	8	8	method	method	NOUN
ap-398	8	9	'	'	PUNCT
ap-398	8	10	for	for	ADP
ap-398	8	11	'	'	PUNCT
ap-398	8	12	prepaing	prepae	VERB
ap-398	8	13	d	d	PROPN
ap-398	8	14	lc	lc	PROPN
ap-398	8	15	flms	flm	NOUN
ap-398	8	16	.	.	PUNCT
ap-398	9	1	keyu	keyu	NOUN
ap-398	9	2	ords	ords	ADV
ap-398	9	3	:	:	PUNCT
ap-398	9	4	d	d	X
ap-398	9	5	lc	lc	PROPN
ap-398	9	6	,	,	PUNCT
ap-398	9	7	pacvd	pacvd	NOUN
ap-398	9	8	,	,	PUNCT
ap-398	9	9	microhardne	microhardne	PROPN
ap-398	9	10	ss	ss	PROPN
ap-398	9	11	,	,	PUNCT
ap-398	9	12	adhesion	adhesion	NOUN
ap-398	9	13	'	'	PUNCT
ap-398	9	14	electrode	electrode	NOUN
ap-398	9	15	*	*	PUNCT
ap-398	9	16	ltt	ltt	PROPN
ap-398	9	17	ruuto.t	ruuto.t	NOUN
ap-398	9	18	.	.	PUNCT
ap-398	10	1	heating	heating	NOUN
ap-398	10	2	subsffate	subsffate	NOUN
ap-398	10	3	vacuum	vacuum	PROPN
ap-398	10	4	chamber	chamber	PROPN
ap-398	10	5	i	i	PROPN
ap-398	10	6	introduction	introduction	NOUN
ap-398	10	7	diamond	diamond	NOUN
ap-398	10	8	-	-	PUNCT
ap-398	10	9	like	like	ADJ
ap-398	10	10	carbon	carbon	NOUN
ap-398	10	11	(	(	PUNCT
ap-398	10	12	dlc	dlc	NOUN
ap-398	10	13	)	)	PUNCT
ap-398	10	14	films	film	NOUN
ap-398	10	15	have	have	AUX
ap-398	10	16	attracted	attract	VERB
ap-398	10	17	considerable	considerable	ADJ
ap-398	10	18	attention	attention	NOUN
ap-398	10	19	recently	recently	ADV
ap-398	10	20	due	due	ADP
ap-398	10	21	to	to	ADP
ap-398	10	22	their	their	PRON
ap-398	10	23	properties	property	NOUN
ap-398	10	24	of	of	ADP
ap-398	10	25	high	high	ADJ
ap-398	10	26	mechanical	mechanical	ADJ
ap-398	10	27	hardness	hardness	NOUN
ap-398	10	28	,	,	PUNCT
ap-398	10	29	high	high	ADJ
ap-398	10	30	electrical	electrical	ADJ
ap-398	10	31	resistivity	resistivity	NOUN
ap-398	10	32	,	,	PUNCT
ap-398	10	33	low	low	ADJ
ap-398	10	34	friction	friction	NOUN
ap-398	10	35	coeflicient	coeflicient	NOUN
ap-398	10	36	,	,	PUNCT
ap-398	10	37	optical	optical	ADJ
ap-398	10	38	transparency	transparency	NOUN
ap-398	10	39	and	and	CCONJ
ap-398	10	40	chemical^inertness	chemical^inertness	NOUN
ap-398	10	41	il	il	PROPN
ap-398	10	42	]	]	X
ap-398	10	43	'	'	PUNCT
ap-398	10	44	these	these	DET
ap-398	10	45	properties	property	NOUN
ap-398	10	46	make	make	VERB
ap-398	10	47	di	di	NOUN
ap-398	10	48	-	-	PUNCT
ap-398	10	49	c	c	NOUN
ap-398	10	50	films	film	NOUN
ap-398	10	51	suitable	suitable	ADJ
ap-398	10	52	for	for	ADP
ap-398	10	53	numerous	numerous	ADJ
ap-398	10	54	poterrtial	poterrtial	ADJ
ap-398	10	55	applications	application	NOUN
ap-398	10	56	in	in	ADP
ap-398	10	57	hard	hard	ADJ
ap-398	10	58	and	and	CCONJ
ap-398	10	59	wear	wear	VERB
ap-398	10	60	-	-	PUNCT
ap-398	10	61	resistant	resistant	ADJ
ap-398	10	62	coatings	coating	NOUN
ap-398	10	63	'	'	PART
ap-398	10	64	iltfrog.upny	iltfrog.upny	NOUN
ap-398	10	65	,	,	PUNCT
ap-398	10	66	protective	protective	ADJ
ap-398	10	67	optical	optical	ADJ
ap-398	10	68	and	and	CCONJ
ap-398	10	69	biomechanical	biomechanical	ADJ
ap-398	10	70	coatings	coating	NOUN
ap-398	10	71	'	'	PART
ap-398	10	72	electiolumines	electiolumine	NOUN
ap-398	10	73	..	..	PUNCT
ap-398	10	74	n	n	CCONJ
ap-398	10	75	..	..	PUNCT
ap-398	10	76	*	*	PUNCT
ap-398	10	77	uti	uti	PROPN
ap-398	10	78	,	,	PUNCT
ap-398	10	79	ials	ial	NOUN
ap-398	10	80	and	and	CCONJ
ap-398	10	81	held	hold	VERB
ap-398	10	82	-	-	PUNCT
ap-398	10	83	emission	emission	NOUN
ap-398	10	84	devices	device	NOUN
ap-398	10	85	[	[	X
ap-398	10	86	2	2	NUM
ap-398	10	87	'	'	NUM
ap-398	10	88	3	3	NUM
ap-398	10	89	]	]	PUNCT
ap-398	10	90	.	.	PUNCT
ap-398	11	1	various	various	ADJ
ap-398	11	2	techniques	technique	NOUN
ap-398	11	3	have	have	AUX
ap-398	11	4	been	be	AUX
ap-398	11	5	used	use	VERB
ap-398	11	6	for	for	ADP
ap-398	11	7	preparing	prepare	VERB
ap-398	11	8	dlc	dlc	NOUN
ap-398	11	9	fiim	fiim	NOUN
ap-398	11	10	,	,	PUNCT
ap-398	11	11	including	include	VERB
ap-398	11	12	ion	ion	NOUN
ap-398	11	13	-	-	PUNCT
ap-398	11	14	beam	beam	NOUN
ap-398	11	15	deposition	deposition	NOUN
ap-398	11	16	,	,	PUNCT
ap-398	11	17	reactive	reactive	ADJ
ap-398	11	18	magnetron	magnetron	NOUN
ap-398	11	19	,	,	PUNCT
ap-398	11	20	pr	pr	NOUN
ap-398	11	21	:	:	PUNCT
ap-398	11	22	ir	ir	PROPN
ap-398	11	23	..	..	PROPN
ap-398	11	24	ing	ing	ADJ
ap-398	11	25	,	,	PUNCT
ap-398	11	26	pulsed	pulse	VERB
ap-398	11	27	laser	laser	NOUN
ap-398	11	28	deposition	deposition	NOUN
ap-398	11	29	,	,	PUNCT
ap-398	11	30	a	a	DET
ap-398	11	31	filtered	filter	VERB
ap-398	11	32	cathodic	cathodic	NOUN
ap-398	11	33	vacuum	vacuum	NOUN
ap-398	11	34	arc	arc	NOUN
ap-398	11	35	,	,	PUNCT
ap-398	11	36	dire.t.r	dire.t.r	PROPN
ap-398	11	37	.	.	PUNCT
ap-398	11	38	,r.e	,r.e	PUNCT
ap-398	11	39	.	.	PUNCT
ap-398	12	1	,t	,t	PUNCT
ap-398	12	2	plasma	plasma	PROPN
ap-398	12	3	cvd	cvd	PROPN
ap-398	12	4	,	,	PUNCT
ap-398	12	5	radio	radio	NOUN
ap-398	12	6	frequency	frequency	NOUN
ap-398	12	7	plasma	plasma	NOUN
ap-398	12	8	cvd	cvd	PROPN
ap-398	12	9	and	and	CCONJ
ap-398	13	1	electron	electron	NOUN
ap-398	13	2	.yaio,.ott	.yaio,.ott	PUNCT
ap-398	13	3	resonance	resonance	NOUN
ap-398	13	4	microwave	microwave	NOUN
ap-398	13	5	plasma	plasma	PROPN
ap-398	13	6	cvd	cvd	NOUN
ap-398	14	1	[	[	X
ap-398	14	2	4	4	NUM
ap-398	14	3	-	-	SYM
ap-398	14	4	7	7	NUM
ap-398	14	5	]	]	PUNCT
ap-398	14	6	.	.	PUNCT
ap-398	15	1	a	a	DET
ap-398	15	2	problem	problem	NOUN
ap-398	15	3	that	that	PRON
ap-398	15	4	affects	affect	VERB
ap-398	15	5	some	some	PRON
ap-398	15	6	of	of	ADP
ap-398	15	7	these	these	DET
ap-398	15	8	methods	method	NOUN
ap-398	15	9	is	be	AUX
ap-398	15	10	their	their	PRON
ap-398	15	11	poor	poor	ADJ
ap-398	15	12	adhesion	adhesion	NOUN
ap-398	15	13	to	to	ADP
ap-398	15	14	steel	steel	NOUN
ap-398	15	15	substrates	substrate	NOUN
ap-398	15	16	with	with	ADP
ap-398	15	17	no	no	DET
ap-398	15	18	intermediate	intermediate	ADJ
ap-398	15	19	layer	layer	NOUN
ap-398	15	20	'	'	PART
ap-398	15	21	one	one	NUM
ap-398	15	22	fotential	fotential	ADJ
ap-398	15	23	solution	solution	NOUN
ap-398	15	24	to	to	ADP
ap-398	15	25	this	this	DET
ap-398	15	26	problem	problem	NOUN
ap-398	15	27	is	be	AUX
ap-398	15	28	to	to	PART
ap-398	15	29	use	use	VERB
ap-398	15	30	current	current	ADJ
ap-398	15	31	plasma	plasma	NOUN
ap-398	15	32	for	for	ADP
ap-398	15	33	hepositing	heposite	VERB
ap-398	15	34	dlc	dlc	NOUN
ap-398	15	35	films	film	NOUN
ap-398	15	36	with	with	ADP
ap-398	15	37	no	no	DET
ap-398	15	38	intermediate	intermediate	ADJ
ap-398	15	39	layer	layer	NOUN
ap-398	15	40	'	'	PUNCT
ap-398	15	41	this	this	DET
ap-398	15	42	paper	paper	NOUN
ap-398	15	43	,	,	PUNCT
ap-398	15	44	,	,	PUNCT
ap-398	15	45	.idi	.idi	PUNCT
ap-398	15	46	"	"	PUNCT
ap-398	15	47	,	,	PUNCT
ap-398	15	48	th"e	th"e	VERB
ap-398	15	49	adhesion	adhesion	NOUN
ap-398	15	50	of	of	ADP
ap-398	15	51	dlc	dlc	NOUN
ap-398	15	52	films	film	NOUN
ap-398	15	53	to	to	ADP
ap-398	15	54	steel	steel	NOUN
ap-398	15	55	substrates	substrate	NOUN
ap-398	15	56	and	and	CCONJ
ap-398	15	57	the	the	DET
ap-398	15	58	microhardness	microhardness	NOUN
ap-398	15	59	of	of	ADP
ap-398	15	60	the	the	DET
ap-398	15	61	layer	layer	NOUN
ap-398	15	62	.	.	PUNCT
ap-398	16	1	2	2	NUM
ap-398	16	2	experimental	experimental	ADJ
ap-398	16	3	and	and	CCONJ
ap-398	16	4	results	result	VERB
ap-398	16	5	the	the	DET
ap-398	16	6	dlc	dlc	NOUN
ap-398	16	7	films	film	NOUN
ap-398	16	8	were	be	AUX
ap-398	16	9	deposited	deposit	VERB
ap-398	16	10	with	with	ADP
ap-398	16	11	a	a	DET
ap-398	16	12	direct	direct	ADJ
ap-398	16	13	current	current	ADJ
ap-398	16	14	plasma	plasma	NOUN
ap-398	16	15	assisted	assist	VERB
ap-398	16	16	chemical	chemical	ADJ
ap-398	16	17	vapor	vapor	NOUN
ap-398	16	18	deposition	deposition	NOUN
ap-398	16	19	process	process	NOUN
ap-398	16	20	(	(	PUNCT
ap-398	16	21	dc	dc	PROPN
ap-398	16	22	i'ncvo	i'ncvo	PROPN
ap-398	16	23	)	)	PUNCT
ap-398	16	24	on	on	ADP
ap-398	16	25	silicon	silicon	NOUN
ap-398	16	26	(	(	PUNCT
ap-398	16	27	lll	lll	PROPN
ap-398	16	28	)	)	PUNCT
ap-398	16	29	and	and	CCONJ
ap-398	16	30	iteel	iteel	NOUN
ap-398	16	31	substrates	substrate	NOUN
ap-398	16	32	'	'	PART
ap-398	16	33	the	the	DET
ap-398	16	34	steel	steel	NOUN
ap-398	16	35	substrate	substrate	NOUN
ap-398	16	36	consists	consist	VERB
ap-398	16	37	of	of	ADP
ap-398	16	38	0.9	0.9	NUM
ap-398	16	39	7o	7o	NUM
ap-398	16	40	c	c	NOUN
ap-398	16	41	,	,	PUNCT
ap-398	16	42	4'14	4'14	NUM
ap-398	16	43	7o	7o	NUM
ap-398	16	44	cr	cr	PROPN
ap-398	16	45	,	,	PUNCT
ap-398	16	46	6'l	6'l	NUM
ap-398	16	47	vo	vo	NOUN
ap-398	16	48	w	w	PROPN
ap-398	16	49	'	'	PUNCT
ap-398	16	50	5	5	NUM
ap-398	16	51	vo	vo	X
ap-398	16	52	mo	mo	PROPN
ap-398	16	53	'	'	PART
ap-398	16	54	2.02	2.02	NUM
ap-398	16	55	voy.these	voy.these	ADJ
ap-398	16	56	samples	sample	NOUN
ap-398	16	57	were	be	AUX
ap-398	16	58	polished	polish	VERB
ap-398	16	59	up	up	ADP
ap-398	16	60	to	to	ADP
ap-398	16	61	a	a	DET
ap-398	16	62	mirror	mirror	NOUN
ap-398	16	63	finish	finish	NOUN
ap-398	16	64	'	'	PUNCT
ap-398	16	65	using	use	VERB
ap-398	16	66	a	a	DET
ap-398	16	67	series	series	NOUN
ap-398	16	68	of	of	ADP
ap-398	16	69	standard	standard	ADJ
ap-398	16	70	metallurgical	metallurgical	ADJ
ap-398	16	71	polished	polished	ADJ
ap-398	16	72	steps	step	NOUN
ap-398	16	73	'	'	PART
ap-398	16	74	befo	befo	X
ap-398	16	75	..	..	PUNCT
ap-398	16	76	p.epuration	p.epuration	NOUN
ap-398	16	77	,	,	PUNCT
ap-398	16	78	the	the	DET
ap-398	16	79	samples	sample	NOUN
ap-398	16	80	were	be	AUX
ap-398	16	81	,	,	PUNCT
ap-398	16	82	cleaned	clean	VERB
ap-398	16	83	with	with	ADP
ap-398	16	84	acetone	acetone	NOUN
ap-398	16	85	and	and	CCONJ
ap-398	16	86	isopropanollian	isopropanollian	NOUN
ap-398	16	87	in	in	ADP
ap-398	16	88	an	an	DET
ap-398	16	89	ultrasonic	ultrasonic	ADJ
ap-398	16	90	bath	bath	NOUN
ap-398	16	91	'	'	PUNCT
ap-398	16	92	'	'	PUNCT
ap-398	16	93	lhe	lhe	ADJ
ap-398	16	94	apparatus	apparatus	NOUN
ap-398	16	95	for	for	ADP
ap-398	16	96	plasma	plasma	NOUN
ap-398	16	97	assisted	assist	VERB
ap-398	16	98	chemical	chemical	ADJ
ap-398	16	99	vapor	vapor	NOUN
ap-398	16	100	deposition	deposition	NOUN
ap-398	16	101	conslsts	conslst	NOUN
ap-398	16	102	of	of	ADP
ap-398	16	103	a	a	DET
ap-398	16	104	vacuum	vacuum	NOUN
ap-398	16	105	chamber	chamber	NOUN
ap-398	16	106	,	,	PUNCT
ap-398	16	107	a	a	DET
ap-398	16	108	diffusion	diffusion	NOUN
ap-398	16	109	pump	pump	NOUN
ap-398	16	110	'	'	PUNCT
ap-398	16	111	two	two	NUM
ap-398	16	112	oarallel	oarallel	NOUN
ap-398	16	113	electrodes	electrode	NOUN
ap-398	16	114	and	and	CCONJ
ap-398	16	115	a	a	DET
ap-398	16	116	generator	generator	NOUN
ap-398	16	117	of	of	ADP
ap-398	16	118	dc	dc	PROPN
ap-398	16	119	pacvd	pacvd	PROPN
ap-398	16	120	plasma	plasma	PROPN
ap-398	16	121	'	'	PART
ap-398	16	122	i	i	PRON
ap-398	16	123	part	part	NOUN
ap-398	16	124	of	of	ADP
ap-398	16	125	the	the	DET
ap-398	16	126	pacvd	pacvd	NOUN
ap-398	16	127	apparatus	apparatus	NOUN
ap-398	16	128	is	be	AUX
ap-398	16	129	illustrated	illustrate	VERB
ap-398	16	130	in	in	ADP
ap-398	16	131	ftg'l	ftg'l	NOUN
ap-398	16	132	'	'	PART
ap-398	16	133	the	the	DET
ap-398	16	134	dlc	dlc	NOUN
ap-398	16	135	films	film	NOUN
ap-398	16	136	were	be	AUX
ap-398	16	137	prepared	prepare	VERB
ap-398	16	138	on	on	ADP
ap-398	16	139	our	our	PRON
ap-398	16	140	substrates	substrate	NOUN
ap-398	16	141	with	with	ADP
ap-398	16	142	the	the	DET
ap-398	16	143	same	same	ADJ
ap-398	16	144	parameters	parameter	NOUN
ap-398	16	145	,	,	PUNCT
ap-398	16	146	apart	apart	ADV
ap-398	16	147	from	from	ADP
ap-398	16	148	the	the	DET
ap-398	16	149	bias	bias	NOUN
ap-398	16	150	voltage	voltage	NOUN
ap-398	16	151	'	'	PUNCT
ap-398	16	152	which	which	PRON
ap-398	16	153	was	be	AUX
ap-398	16	154	varied	varied	ADJ
ap-398	16	155	.	.	PUNCT
ap-398	17	1	this	this	DET
ap-398	17	2	parameter	parameter	NOUN
ap-398	17	3	was	be	AUX
ap-398	17	4	varied	varied	ADJ
ap-398	17	5	between	between	ADP
ap-398	17	6	-400	-400	PROPN
ap-398	17	7	v	v	NOUN
ap-398	17	8	and	and	CCONJ
ap-398	17	9	-900	-900	PROPN
ap-398	17	10	v.	v.	ADP
ap-398	17	11	other	other	ADJ
ap-398	17	12	processing	processing	NOUN
ap-398	17	13	parameters	parameter	NOUN
ap-398	17	14	of	of	ADP
ap-398	17	15	the	the	DET
ap-398	17	16	dlc	dlc	NOUN
ap-398	17	17	layers	layer	NOUN
ap-398	17	18	'	'	PART
ap-398	17	19	prepared	prepare	VERB
ap-398	17	20	with	with	ADP
ap-398	17	21	different	different	ADJ
ap-398	17	22	uil.t.t	uil.t.t	NOUN
ap-398	17	23	of	of	ADP
ap-398	17	24	the	the	DET
ap-398	17	25	bias	bias	NOUN
ap-398	17	26	voltage	voltage	NOUN
ap-398	17	27	'	'	PUNCT
ap-398	17	28	are	be	AUX
ap-398	17	29	shown	show	VERB
ap-398	17	30	in	in	ADP
ap-398	17	31	thble	thble	PROPN
ap-398	17	32	l.	l.	PROPN
ap-398	17	33	the	the	DET
ap-398	17	34	thickness	thickness	NOUN
ap-398	17	35	of	of	ADP
ap-398	17	36	the	the	DET
ap-398	17	37	deposited	deposit	VERB
ap-398	17	38	dlc	dlc	NOUN
ap-398	17	39	films	film	NOUN
ap-398	17	40	was	be	AUX
ap-398	17	41	approximately	approximately	ADV
ap-398	17	42	lpm	lpm	ADJ
ap-398	17	43	,	,	PUNCT
ap-398	17	44	with	with	ADP
ap-398	17	45	diflerent	diflerent	ADJ
ap-398	17	46	values	value	NOUN
ap-398	17	47	of	of	ADP
ap-398	17	48	bias	bias	NOUN
ap-398	17	49	voltage	voltage	NOUN
ap-398	17	50	'	'	PUNCT
ap-398	17	51	fig	fig	NOUN
ap-398	17	52	.	.	PUNCT
ap-398	18	1	l	l	NOUN
ap-398	18	2	:	:	PUNCT
ap-398	18	3	schematic	schematic	ADJ
ap-398	18	4	view	view	NOUN
ap-398	18	5	of	of	ADP
ap-398	18	6	dc	dc	PROPN
ap-398	18	7	pacvd	pacvd	PROPN
ap-398	18	8	apparatus	apparatus	NOUN
ap-398	18	9	table	table	NOUN
ap-398	18	10	1	1	NUM
ap-398	18	11	:	:	PUNCT
ap-398	18	12	deposition	deposition	NOUN
ap-398	18	13	parameters	parameter	NOUN
ap-398	18	14	of	of	ADP
ap-398	18	15	dlc	dlc	NOUN
ap-398	18	16	films	film	NOUN
ap-398	18	17	then	then	ADV
ap-398	18	18	we	we	PRON
ap-398	18	19	investigated	investigate	VERB
ap-398	18	20	the	the	DET
ap-398	18	21	dependence	dependence	NOUN
ap-398	18	22	of	of	ADP
ap-398	18	23	microhardness	microhardness	PROPN
ap-398	18	24	o.r	o.r	PROPN
ap-398	18	25	biu	biu	PROPN
ap-398	18	26	,	,	PUNCT
ap-398	18	27	voltage	voltage	VERB
ap-398	18	28	anithe	anithe	DET
ap-398	18	29	adhesion	adhesion	NOUN
ap-398	18	30	of	of	ADP
ap-398	18	31	the	the	DET
ap-398	18	32	dlc	dlc	NOUN
ap-398	18	33	layers	layer	NOUN
ap-398	18	34	to	to	ADP
ap-398	18	35	the	the	DET
ap-398	18	36	steel	steel	NOUN
ap-398	18	37	substrate	substrate	NOUN
ap-398	18	38	.	.	PUNCT
ap-398	19	1	the	the	DET
ap-398	19	2	microhardness	microhardness	NOUN
ap-398	19	3	of	of	ADP
ap-398	19	4	the	the	DET
ap-398	19	5	substrates	substrate	NOUN
ap-398	19	6	and	and	CCONJ
ap-398	19	7	substrates	substrate	NOUN
ap-398	19	8	with	with	ADP
ap-398	19	9	dlc	dlc	NOUN
ap-398	19	10	films	film	NOUN
ap-398	19	11	was	be	AUX
ap-398	19	12	measured	measure	VERB
ap-398	19	13	using	use	VERB
ap-398	19	14	a	a	DET
ap-398	19	15	leica	leica	PROPN
ap-398	19	16	dm	dm	NUM
ap-398	19	17	inverter	inverter	PROPN
ap-398	19	18	research	research	PROPN
ap-398	19	19	mi	mi	PROPN
ap-398	19	20	..	..	PROPN
ap-398	19	21	or.op	or.op	PROPN
ap-398	19	22	"	"	PUNCT
ap-398	19	23	for	for	ADP
ap-398	19	24	materials	material	NOUN
ap-398	19	25	tesiing	tesie	VERB
ap-398	19	26	'	'	PUNCT
ap-398	19	27	the	the	DET
ap-398	19	28	measurement	measurement	NOUN
ap-398	19	29	results	result	NOUN
ap-398	19	30	of	of	ADP
ap-398	19	31	microhardness	microhardness	NOUN
ap-398	19	32	for	for	ADP
ap-398	19	33	dlc	dlc	NOUN
ap-398	19	34	layers	layer	NOUN
ap-398	19	35	prepared	prepare	VERB
ap-398	19	36	with	with	ADP
ap-398	19	37	the	the	DET
ap-398	19	38	diflerent	diflerent	ADJ
ap-398	19	39	values	value	NOUN
ap-398	19	40	of	of	ADP
ap-398	19	41	bias	bias	NOUN
ap-398	19	42	voltage	voltage	NOUN
ap-398	19	43	are	be	AUX
ap-398	19	44	shown	show	VERB
ap-398	19	45	in	in	ADP
ap-398	19	46	fig	fig	NOUN
ap-398	19	47	'	'	PART
ap-398	19	48	2	2	NUM
ap-398	19	49	'	'	PUNCT
ap-398	19	50	these	these	DET
ap-398	19	51	graphs	graph	NOUN
ap-398	19	52	show	show	VERB
ap-398	19	53	the	the	DET
ap-398	19	54	microhardness	microhardness	NOUN
ap-398	19	55	of	of	ADP
ap-398	19	56	the	the	DET
ap-398	19	57	dlc	dlc	NOUN
ap-398	19	58	layers	layer	NOUN
ap-398	19	59	'	'	PART
ap-398	19	60	which	which	PRON
ap-398	19	61	incriases	incriase	VERB
ap-398	19	62	with	with	ADP
ap-398	19	63	increasing	increase	VERB
ap-398	19	64	bias	bias	NOUN
ap-398	19	65	voltage	voltage	NOUN
ap-398	19	66	'	'	PUNCT
ap-398	19	67	the	the	DET
ap-398	19	68	photographs	photograph	NOUN
ap-398	19	69	of	of	ADP
ap-398	19	70	the	the	DET
ap-398	19	71	vickers	vicker	NOUN
ap-398	19	72	indentations	indentation	NOUN
ap-398	19	73	clearly	clearly	ADV
ap-398	19	74	demonstrate	demonstrate	VERB
ap-398	19	75	the	the	DET
ap-398	19	76	diilerence	diilerence	NOUN
ap-398	19	77	between	between	ADP
ap-398	19	78	layers	layer	NOUN
ap-398	19	79	with	with	ADP
ap-398	19	80	good	good	ADJ
ap-398	19	81	and	and	CCONJ
ap-398	19	82	poor	poor	ADJ
ap-398	19	83	adhesion	adhesion	NOUN
ap-398	19	84	.	.	PUNCT
ap-398	20	1	the	the	DET
ap-398	20	2	indentation	indentation	NOUN
ap-398	20	3	in	in	ADP
ap-398	20	4	layers	layer	NOUN
ap-398	20	5	with	with	ADP
ap-398	20	6	poor	poor	ADJ
ap-398	20	7	adhesion	adhesion	NOUN
ap-398	20	8	to	to	ADP
ap-398	20	9	the	the	DET
ap-398	20	10	substrate	substrate	NOUN
ap-398	20	11	exhibits	exhibit	VERB
ap-398	20	12	cracks	crack	NOUN
ap-398	20	13	in	in	ADP
ap-398	20	14	the	the	DET
ap-398	20	15	diagonal	diagonal	ADJ
ap-398	20	16	direction	direction	NOUN
ap-398	20	17	'	'	PUNCT
ap-398	20	18	in	in	ADP
ap-398	20	19	the	the	DET
ap-398	20	20	case	case	NOUN
ap-398	20	21	of	of	ADP
ap-398	20	22	good	good	ADJ
ap-398	20	23	adhesion	adhesion	NOUN
ap-398	20	24	no	no	DET
ap-398	20	25	cracks	crack	NOUN
ap-398	20	26	are	be	AUX
ap-398	20	27	visible	visible	ADJ
ap-398	20	28	,	,	PUNCT
ap-398	20	29	and	and	CCONJ
ap-398	20	30	the	the	DET
ap-398	20	31	layer	layer	NOUN
ap-398	20	32	remains	remain	VERB
ap-398	20	33	.oitpu.t	.oitpu.t	PRON
ap-398	20	34	.	.	PUNCT
ap-398	21	1	this	this	DET
ap-398	21	2	difference	difference	NOUN
ap-398	21	3	is	be	AUX
ap-398	21	4	shown	show	VERB
ap-398	21	5	in	in	ADP
ap-398	21	6	!	!	PUNCT
ap-398	22	1	ig	ig	PRON
ap-398	22	2	'	'	PART
ap-398	22	3	3	3	NUM
ap-398	22	4	'	'	NOUN
ap-398	22	5	3.9.10	3.9.10	NUM
ap-398	22	6	-	-	SYM
ap-398	22	7	2	2	NUM
ap-398	22	8	torr3.9	torr3.9	NOUN
ap-398	22	9	'	'	PUNCT
ap-398	22	10	l0	l0	NOUN
ap-398	22	11	-	-	PUNCT
ap-398	22	12	2	2	NUM
ap-398	22	13	torrinitial	torrinitial	ADJ
ap-398	22	14	vacuum	vacuum	NOUN
ap-398	22	15	7.1.10	7.1.10	PROPN
ap-398	22	16	-	-	NOUN
ap-398	22	17	l	l	NOUN
ap-398	22	18	torr7.1.10	torr7.1.10	NOUN
ap-398	22	19	-	-	PUNCT
ap-398	22	20	l	l	NOUN
ap-398	22	21	torrpressure	torrpressure	NOUN
ap-398	22	22	of	of	ADP
ap-398	22	23	ch	ch	NOUN
ap-398	22	24	,	,	PUNCT
ap-398	22	25	bias	bias	VERB
ap-398	22	26	current	current	ADJ
ap-398	22	27	-400v+-900v-400v+-900v	-400v+-900v-400v+-900v	ADJ
ap-398	22	28	thickness	thickness	NOUN
ap-398	22	29	of	of	ADP
ap-398	22	30	dlc	dlc	NOUN
ap-398	22	31	layer	layer	NOUN
ap-398	22	32	27	27	NUM
ap-398	22	33	acta	acta	PROPN
ap-398	22	34	polytechnica	polytechnica	PROPN
ap-398	22	35	vol	vol	NOUN
ap-398	22	36	.	.	PUNCT
ap-398	23	1	43	43	NUM
ap-398	23	2	no	no	NOUN
ap-398	23	3	.	.	PUNCT
ap-398	24	1	l/2003	l/2003	PROPN
ap-398	24	2	aaaa	aaaa	PROPN
ap-398	24	3	o	o	PROPN
ap-398	24	4	go	go	VERB
ap-398	24	5	6	6	NUM
ap-398	24	6	at	at	ADP
ap-398	24	7	oc	oc	ADP
ap-398	24	8	p	p	PROPN
ap-398	24	9	t	t	PROPN
ap-398	24	10	!	!	PUNCT
ap-398	25	1	g	g	NOUN
ap-398	25	2	.9	.9	NUM
ap-398	26	1	=	=	SYM
ap-398	26	2	14	14	NUM
ap-398	26	3	13	13	NUM
ap-398	26	4	12	12	NUM
ap-398	26	5	11	11	NUM
ap-398	26	6	10	10	NUM
ap-398	26	7	i	i	PRON
ap-398	26	8	14	14	NUM
ap-398	26	9	13	13	NUM
ap-398	26	10	12	12	NUM
ap-398	26	11	11	11	NUM
ap-398	26	12	10	10	NUM
ap-398	27	1	i	i	PRON
ap-398	27	2	i	i	PRON
ap-398	28	1	o	o	VERB
ap-398	28	2	g	g	NOUN
ap-398	28	3	(	(	PUNCT
ap-398	28	4	9	9	NUM
ap-398	28	5	oa	oa	NOUN
ap-398	28	6	(	(	PUNCT
ap-398	28	7	,	,	PUNCT
ap-398	28	8	e	e	X
ap-398	28	9	(	(	PUNCT
ap-398	28	10	!	!	PUNCT
ap-398	29	1	o	o	NOUN
ap-398	29	2	.9	.9	PUNCT
ap-398	30	1	=	=	NOUN
ap-398	30	2	400	400	NUM
ap-398	30	3	500	500	NUM
ap-398	30	4	700	700	NUM
ap-398	30	5	negative	negative	ADJ
ap-398	30	6	bias	bias	NOUN
ap-398	30	7	voltage	voltage	NOUN
ap-398	30	8	[	[	X
ap-398	30	9	vl	vl	NOUN
ap-398	30	10	*	*	PUNCT
ap-398	30	11	r	r	NOUN
ap-398	30	12	steel	steel	NOUN
ap-398	30	13	substrate	substrate	NOUN
ap-398	30	14	{	{	PUNCT
ap-398	30	15	:	:	PUNCT
ap-398	30	16	steel	steel	NOUN
ap-398	30	17	substrate	substrate	NOUN
ap-398	30	18	with	with	ADP
ap-398	30	19	dlc	dlc	NOUN
ap-398	30	20	laver	laver	X
ap-398	30	21	900	900	NUM
ap-398	30	22	3uu	3uu	NOUN
ap-398	30	23	negative	negative	ADJ
ap-398	30	24	bias	bias	NOUN
ap-398	30	25	voltage	voltage	NOUN
ap-398	31	1	[	[	X
ap-398	31	2	vl	vl	X
ap-398	31	3	*	*	PUNCT
ap-398	31	4	silicon	silicon	NOUN
ap-398	31	5	substrate	substrate	NOUN
ap-398	31	6	{	{	PUNCT
ap-398	31	7	r	r	NOUN
ap-398	31	8	silicon	silicon	NOUN
ap-398	31	9	substrate	substrate	NOUN
ap-398	31	10	with	with	ADP
ap-398	31	11	dlc	dlc	NOUN
ap-398	31	12	laver	laver	X
ap-398	31	13	700	700	NUM
ap-398	31	14	fig	fig	NOUN
ap-398	31	15	.	.	PUNCT
ap-398	32	1	2	2	NUM
ap-398	32	2	:	:	PUNCT
ap-398	32	3	dependence	dependence	NOUN
ap-398	32	4	ofmicrohardness	ofmicrohardness	NOUN
ap-398	32	5	on	on	ADP
ap-398	32	6	bias	bias	NOUN
ap-398	32	7	voltage	voltage	NOUN
ap-398	32	8	ofdlc	ofdlc	ADJ
ap-398	32	9	layers	layer	NOUN
ap-398	32	10	on	on	ADP
ap-398	32	11	silicon	silicon	NOUN
ap-398	32	12	and	and	CCONJ
ap-398	32	13	steel	steel	NOUN
ap-398	32	14	substrates	substrate	NOUN
ap-398	32	15	fig	fig	NOUN
ap-398	32	16	.	.	PUNCT
ap-398	33	1	3	3	NUM
ap-398	33	2	:	:	PUNCT
ap-398	33	3	shape	shape	NOUN
ap-398	33	4	ofvickers	ofvicker	NOUN
ap-398	33	5	indentation	indentation	NOUN
ap-398	33	6	in	in	ADP
ap-398	33	7	layerswith	layerswith	NOUN
ap-398	33	8	good	good	ADJ
ap-398	33	9	and	and	CCONJ
ap-398	33	10	poor	poor	ADJ
ap-398	33	11	adhesion	adhesion	NOUN
ap-398	33	12	the	the	DET
ap-398	33	13	microhardness	microhardness	NOUN
ap-398	33	14	of	of	ADP
ap-398	33	15	the	the	DET
ap-398	33	16	coated	coated	ADJ
ap-398	33	17	materials	material	NOUN
ap-398	33	18	is	be	AUX
ap-398	33	19	about	about	ADP
ap-398	33	20	l3	l3	PROPN
ap-398	33	21	gpa	gpa	PROPN
ap-398	33	22	higher	high	ADJ
ap-398	33	23	than	than	ADP
ap-398	33	24	the	the	DET
ap-398	33	25	base	base	NOUN
ap-398	33	26	material	material	NOUN
ap-398	33	27	at	at	ADP
ap-398	33	28	a	a	DET
ap-398	33	29	load	load	NOUN
ap-398	33	30	of	of	ADP
ap-398	33	31	50	50	NUM
ap-398	33	32	mn	mn	NOUN
ap-398	33	33	and	and	CCONJ
ap-398	33	34	bias	bias	NOUN
ap-398	33	35	voltage	voltage	NOUN
ap-398	33	36	-900	-900	PROPN
ap-398	33	37	v	v	ADP
ap-398	33	38	these	these	DET
ap-398	33	39	coatings	coating	NOUN
ap-398	33	40	can	can	AUX
ap-398	33	41	be	be	AUX
ap-398	33	42	used	use	VERB
ap-398	33	43	for	for	ADP
ap-398	33	44	example	example	NOUN
ap-398	33	45	for	for	ADP
ap-398	33	46	protecting	protect	VERB
ap-398	33	47	metal	metal	NOUN
ap-398	33	48	bioimplants	bioimplant	NOUN
ap-398	33	49	[	[	X
ap-398	33	50	8	8	NUM
ap-398	33	51	]	]	PUNCT
ap-398	33	52	.	.	PUNCT
ap-398	34	1	acknowledgment	acknowledgment	NOUN
ap-398	34	2	this	this	DET
ap-398	34	3	work	work	NOUN
ap-398	34	4	was	be	AUX
ap-398	34	5	supported	support	VERB
ap-398	34	6	by	by	ADP
ap-398	34	7	a	a	DET
ap-398	34	8	grant	grant	NOUN
ap-398	34	9	from	from	ADP
ap-398	34	10	the	the	DET
ap-398	34	11	grant	grant	NOUN
ap-398	34	12	agency	agency	NOUN
ap-398	34	13	of	of	ADP
ap-398	34	14	the	the	DET
ap-398	34	15	czech	czech	PROPN
ap-398	34	16	republic	republic	NOUN
ap-398	34	17	106/02/1	106/02/1	PROPN
ap-398	34	18	194	194	NUM
ap-398	34	19	,	,	PUNCT
ap-398	34	20	104/98:210000012	104/98:210000012	NUM
ap-398	34	21	and	and	CCONJ
ap-398	34	22	ctu0204	ctu0204	NOUN
ap-398	34	23	t	t	PROPN
ap-398	34	24	12	12	NUM
ap-398	34	25	.	.	PUNCT
ap-398	35	1	references	reference	NOUN
ap-398	35	2	ill	ill	PROPN
ap-398	35	3	robertson	robertson	PROPN
ap-398	35	4	,	,	PUNCT
ap-398	35	5	j.	j.	PROPN
ap-398	35	6	:	:	PUNCT
ap-398	35	7	adv	adv	PROPN
ap-398	35	8	.	.	PUNCT
ap-398	35	9	physics	physics	PROPN
ap-398	35	10	,	,	PUNCT
ap-398	35	11	vol	vol	NOUN
ap-398	35	12	.	.	PROPN
ap-398	35	13	35	35	NUM
ap-398	35	14	,	,	PUNCT
ap-398	35	15	1986	1986	NUM
ap-398	35	16	,	,	PUNCT
ap-398	35	17	p.	p.	NOUN
ap-398	35	18	317	317	NUM
ap-398	35	19	.	.	PUNCT
ap-398	36	1	tzl	tzl	VERB
ap-398	36	2	lettington	lettington	NOUN
ap-398	36	3	,	,	PUNCT
ap-398	36	4	a.	a.	PROPN
ap-398	36	5	h.	h.	PROPN
ap-398	36	6	,	,	PUNCT
ap-398	36	7	smith	smith	PROPN
ap-398	36	8	,	,	PUNCT
ap-398	36	9	c.	c.	PROPN
ap-398	36	10	:	:	PUNCT
ap-398	36	11	diamond	diamond	NOUN
ap-398	36	12	relat	relat	NOUN
ap-398	36	13	.	.	PUNCT
ap-398	37	1	mater	mater	NOUN
ap-398	37	2	.	.	PUNCT
ap-398	37	3	,	,	PUNCT
ap-398	37	4	vol	vol	NOUN
ap-398	37	5	.	.	PUNCT
ap-398	38	1	l.	l.	PROPN
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ap-398	38	3	.	.	PUNCT
ap-398	39	1	t3l	t3l	ADJ
ap-398	40	1	seth	seth	PROPN
ap-398	40	2	,	,	PUNCT
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ap-398	40	4	,	,	PUNCT
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ap-398	40	6	,	,	PUNCT
ap-398	40	7	s.	s.	PROPN
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ap-398	40	9	,	,	PUNCT
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ap-398	40	14	:	:	PUNCT
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ap-398	40	18	,	,	PUNCT
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ap-398	40	20	,	,	PUNCT
ap-398	40	21	1995	1995	NUM
ap-398	40	22	,	,	PUNCT
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ap-398	40	25	.	.	PUNCT
ap-398	41	1	l4l	l4l	PROPN
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ap-398	41	3	,	,	PUNCT
ap-398	41	4	l	l	NOUN
ap-398	41	5	,	,	PUNCT
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ap-398	41	7	,	,	PUNCT
ap-398	41	8	a.	a.	NOUN
ap-398	41	9	,	,	PUNCT
ap-398	41	10	kuroda	kuroda	PROPN
ap-398	41	11	,	,	PUNCT
ap-398	41	12	h.	h.	PROPN
ap-398	41	13	:	:	PUNCT
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ap-398	42	2	.	.	PUNCT
ap-398	42	3	,	,	PUNCT
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ap-398	42	5	,	,	PUNCT
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ap-398	42	7	,	,	PUNCT
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ap-398	42	9	.	.	PUNCT
ap-398	43	1	t5l	t5l	PROPN
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ap-398	43	3	,	,	PUNCT
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ap-398	43	5	,	,	PUNCT
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ap-398	43	7	,	,	PUNCT
ap-398	43	8	s.	s.	PROPN
ap-398	43	9	:	:	PUNCT
ap-398	43	10	journal	journal	NOUN
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ap-398	43	12	.	.	PUNCT
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ap-398	44	2	.	.	PROPN
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ap-398	44	4	.	.	PROPN
ap-398	44	5	,	,	PUNCT
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ap-398	44	7	,	,	PUNCT
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ap-398	44	9	,	,	PUNCT
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ap-398	44	11	.	.	PUNCT
ap-398	45	1	t6l	t6l	NUM
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ap-398	45	3	,	,	PUNCT
ap-398	45	4	l.	l.	PROPN
ap-398	45	5	,	,	PUNCT
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ap-398	45	7	,	,	PUNCT
ap-398	45	8	s.	s.	PROPN
ap-398	45	9	,	,	PUNCT
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ap-398	45	11	,	,	PUNCT
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ap-398	45	13	:	:	PUNCT
ap-398	45	14	appl	appl	PROPN
ap-398	45	15	.	.	PUNCT
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ap-398	46	2	.	.	PUNCT
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ap-398	47	2	.	.	PROPN
ap-398	47	3	,	,	PUNCT
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ap-398	47	5	,	,	PUNCT
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ap-398	47	7	,	,	PUNCT
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ap-398	47	9	.	.	PUNCT
ap-398	48	1	t71	t71	PROPN
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ap-398	48	3	,	,	PUNCT
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ap-398	48	6	,	,	PUNCT
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ap-398	48	8	,	,	PUNCT
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ap-398	48	10	,	,	PUNCT
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ap-398	48	12	,	,	PUNCT
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ap-398	48	15	:	:	PUNCT
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ap-398	49	2	.	.	PUNCT
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ap-398	50	2	.	.	PROPN
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ap-398	50	4	.	.	PROPN
ap-398	50	5	,	,	PUNCT
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ap-398	50	7	.	.	PROPN
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ap-398	50	9	,	,	PUNCT
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ap-398	50	11	,	,	PUNCT
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ap-398	50	13	.	.	PUNCT
ap-398	51	1	i8l	i8l	PROPN
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ap-398	51	3	,	,	PUNCT
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ap-398	51	5	,	,	PUNCT
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ap-398	51	7	,	,	PUNCT
ap-398	51	8	d.	d.	PROPN
ap-398	51	9	:	:	PUNCT
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ap-398	51	13	,	,	PUNCT
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ap-398	51	15	,	,	PUNCT
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ap-398	51	17	,	,	PUNCT
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ap-398	51	22	.	.	PUNCT
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ap-398	53	1	-	-	NOUN
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ap-398	53	3	:	:	PUNCT
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ap-398	54	3	.	.	PUNCT
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ap-398	55	4	.	.	PUNCT
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ap-398	56	4	:	:	PUNCT
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ap-398	56	9	e	e	NOUN
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ap-398	56	12	:	:	PUNCT
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ap-398	57	2	.	.	PUNCT
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ap-398	58	3	,	,	PUNCT
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ap-398	58	7	:	:	PUNCT
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ap-398	58	12	e	e	NOUN
ap-398	58	13	-	-	NOUN
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ap-398	58	15	:	:	PUNCT
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ap-398	59	2	.	.	PUNCT
ap-398	60	1	s.	s.	PROPN
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ap-398	60	3	,	,	PUNCT
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ap-398	60	5	.	.	PROPN
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ap-398	60	7	:	:	PUNCT
ap-398	60	8	+420224352	+420224352	NUM
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ap-398	60	10	e	e	NOUN
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ap-398	60	13	:	:	PUNCT
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ap-398	60	28	4	4	NUM
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ap-398	60	37	.	.	PROPN
ap-398	61	1	ing	ing	PROPN
ap-398	61	2	.	.	PUNCT
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ap-398	62	3	,	,	PUNCT
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ap-398	62	5	.	.	PROPN
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ap-398	62	7	:	:	PUNCT
ap-398	62	8	+420224353205	+420224353205	NUM
ap-398	62	9	e	e	NOUN
ap-398	62	10	-	-	NOUN
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ap-398	62	12	:	:	PUNCT
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ap-398	62	24	,	,	PUNCT
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