id	sid	tid	token	lemma	pos
ap-5383	1	1	acta	acta	PROPN
ap-5383	1	2	polytechnica	polytechnica	PROPN
ap-5383	1	3	doi:10.14311	doi:10.14311	PROPN
ap-5383	1	4	/	/	SYM
ap-5383	1	5	ap.2019.59.0587	ap.2019.59.0587	PROPN
ap-5383	1	6	acta	acta	PROPN
ap-5383	1	7	polytechnica	polytechnica	PROPN
ap-5383	1	8	59(6):587–592	59(6):587–592	PROPN
ap-5383	1	9	,	,	PUNCT
ap-5383	1	10	2019	2019	NUM
ap-5383	1	11	©	©	PROPN
ap-5383	1	12	czech	czech	PROPN
ap-5383	1	13	technical	technical	PROPN
ap-5383	1	14	university	university	PROPN
ap-5383	1	15	in	in	ADP
ap-5383	1	16	prague	prague	PROPN
ap-5383	1	17	,	,	PUNCT
ap-5383	1	18	2019	2019	NUM
ap-5383	1	19	available	available	ADJ
ap-5383	1	20	online	online	ADV
ap-5383	1	21	at	at	ADP
ap-5383	1	22	https://ojs.cvut.cz/ojs/index.php/ap	https://ojs.cvut.cz/ojs/index.php/ap	PROPN
ap-5383	1	23	gas	gas	NOUN
ap-5383	1	24	-	-	PUNCT
ap-5383	1	25	puff	puff	NOUN
ap-5383	1	26	target	target	NOUN
ap-5383	1	27	for	for	ADP
ap-5383	1	28	laser	laser	NOUN
ap-5383	1	29	-	-	PUNCT
ap-5383	1	30	producing	produce	VERB
ap-5383	1	31	plasma	plasma	NOUN
ap-5383	1	32	sxr	sxr	PROPN
ap-5383	1	33	source	source	NOUN
ap-5383	1	34	šárka	šárka	PROPN
ap-5383	1	35	salačováa,∗	salačováa,∗	PROPN
ap-5383	1	36	,	,	PUNCT
ap-5383	1	37	przemyslaw	przemyslaw	NOUN
ap-5383	1	38	wachulakb	wachulakb	NOUN
ap-5383	1	39	,	,	PUNCT
ap-5383	1	40	milan	milan	PROPN
ap-5383	1	41	tatíčeka	tatíčeka	PROPN
ap-5383	1	42	,	,	PUNCT
ap-5383	1	43	miroslava	miroslava	NOUN
ap-5383	1	44	vrbováa	vrbováa	PROPN
ap-5383	1	45	a	a	DET
ap-5383	1	46	czech	czech	PROPN
ap-5383	1	47	technical	technical	PROPN
ap-5383	1	48	university	university	PROPN
ap-5383	1	49	in	in	ADP
ap-5383	1	50	prague	prague	PROPN
ap-5383	1	51	,	,	PUNCT
ap-5383	1	52	faculty	faculty	NOUN
ap-5383	1	53	of	of	ADP
ap-5383	1	54	biomedical	biomedical	ADJ
ap-5383	1	55	engineering	engineering	NOUN
ap-5383	1	56	,	,	PUNCT
ap-5383	1	57	sitná	sitná	PROPN
ap-5383	1	58	3105	3105	NUM
ap-5383	1	59	,	,	PUNCT
ap-5383	1	60	kladno	kladno	PROPN
ap-5383	1	61	,	,	PUNCT
ap-5383	1	62	czech	czech	PROPN
ap-5383	1	63	republic	republic	PROPN
ap-5383	1	64	b	b	PROPN
ap-5383	1	65	military	military	ADJ
ap-5383	1	66	university	university	PROPN
ap-5383	1	67	of	of	ADP
ap-5383	1	68	technology	technology	PROPN
ap-5383	1	69	,	,	PUNCT
ap-5383	1	70	institute	institute	NOUN
ap-5383	1	71	of	of	ADP
ap-5383	1	72	optoelectronics	optoelectronic	NOUN
ap-5383	1	73	,	,	PUNCT
ap-5383	1	74	gen	gen	PROPN
ap-5383	1	75	.	.	PROPN
ap-5383	1	76	sylwestra	sylwestra	PROPN
ap-5383	1	77	kaliskiego	kaliskiego	PROPN
ap-5383	1	78	2	2	NUM
ap-5383	1	79	str	str	NOUN
ap-5383	1	80	.	.	PUNCT
ap-5383	1	81	,	,	PUNCT
ap-5383	1	82	00	00	NUM
ap-5383	1	83	-	-	SYM
ap-5383	1	84	908	908	NUM
ap-5383	1	85	warszawa	warszawa	PROPN
ap-5383	1	86	49	49	NUM
ap-5383	1	87	,	,	PUNCT
ap-5383	1	88	poland	poland	PROPN
ap-5383	1	89	∗	∗	NOUN
ap-5383	1	90	corresponding	correspond	VERB
ap-5383	1	91	author	author	NOUN
ap-5383	1	92	:	:	PUNCT
ap-5383	1	93	sarka.salacova@fjfi.cvut.cz	sarka.salacova@fjfi.cvut.cz	NOUN
ap-5383	1	94	abstract	abstract	NOUN
ap-5383	1	95	.	.	PUNCT
ap-5383	2	1	mass	mass	PROPN
ap-5383	2	2	density	density	PROPN
ap-5383	2	3	spatial	spatial	ADJ
ap-5383	2	4	distributions	distribution	NOUN
ap-5383	2	5	of	of	ADP
ap-5383	2	6	selected	select	VERB
ap-5383	2	7	gas	gas	NOUN
ap-5383	2	8	-	-	PUNCT
ap-5383	2	9	puff	puff	NOUN
ap-5383	2	10	targets	target	NOUN
ap-5383	2	11	have	have	AUX
ap-5383	2	12	been	be	AUX
ap-5383	2	13	determined	determine	VERB
ap-5383	2	14	by	by	ADP
ap-5383	2	15	radiography	radiography	NOUN
ap-5383	2	16	,	,	PUNCT
ap-5383	2	17	using	use	VERB
ap-5383	2	18	quasi	quasi	ADJ
ap-5383	2	19	-	-	ADJ
ap-5383	2	20	monochromatic	monochromatic	ADJ
ap-5383	2	21	radiation	radiation	NOUN
ap-5383	2	22	at	at	ADP
ap-5383	2	23	a	a	DET
ap-5383	2	24	wavelength	wavelength	NOUN
ap-5383	2	25	of	of	ADP
ap-5383	2	26	13	13	NUM
ap-5383	2	27	nm	nm	NOUN
ap-5383	2	28	.	.	PUNCT
ap-5383	3	1	results	result	NOUN
ap-5383	3	2	of	of	ADP
ap-5383	3	3	spatial	spatial	ADJ
ap-5383	3	4	distributions	distribution	NOUN
ap-5383	3	5	of	of	ADP
ap-5383	3	6	mass	mass	ADJ
ap-5383	3	7	densities	density	NOUN
ap-5383	3	8	at	at	ADP
ap-5383	3	9	various	various	ADJ
ap-5383	3	10	initial	initial	ADJ
ap-5383	3	11	reservoir	reservoir	NOUN
ap-5383	3	12	pressures	pressure	NOUN
ap-5383	3	13	for	for	ADP
ap-5383	3	14	nitrogen	nitrogen	NOUN
ap-5383	3	15	,	,	PUNCT
ap-5383	3	16	argon	argon	NOUN
ap-5383	3	17	and	and	CCONJ
ap-5383	3	18	krypton	krypton	PROPN
ap-5383	3	19	targets	target	NOUN
ap-5383	3	20	are	be	AUX
ap-5383	3	21	presented	present	VERB
ap-5383	3	22	.	.	PUNCT
ap-5383	4	1	changes	change	NOUN
ap-5383	4	2	in	in	ADP
ap-5383	4	3	the	the	DET
ap-5383	4	4	mass	mass	ADJ
ap-5383	4	5	density	density	NOUN
ap-5383	4	6	spatial	spatial	ADJ
ap-5383	4	7	distribution	distribution	NOUN
ap-5383	4	8	due	due	ADP
ap-5383	4	9	to	to	ADP
ap-5383	4	10	a	a	DET
ap-5383	4	11	nozzle	nozzle	NOUN
ap-5383	4	12	wear	wear	NOUN
ap-5383	4	13	are	be	AUX
ap-5383	4	14	reported	report	VERB
ap-5383	4	15	.	.	PUNCT
ap-5383	5	1	keywords	keyword	NOUN
ap-5383	5	2	:	:	PUNCT
ap-5383	5	3	soft	soft	ADJ
ap-5383	5	4	x	x	NOUN
ap-5383	5	5	-	-	NOUN
ap-5383	5	6	rays	ray	NOUN
ap-5383	5	7	,	,	PUNCT
ap-5383	5	8	gas	gas	NOUN
ap-5383	5	9	-	-	PUNCT
ap-5383	5	10	puff	puff	NOUN
ap-5383	5	11	target	target	NOUN
ap-5383	5	12	,	,	PUNCT
ap-5383	5	13	nitrogen	nitrogen	NOUN
ap-5383	5	14	,	,	PUNCT
ap-5383	5	15	argon	argon	NOUN
ap-5383	5	16	,	,	PUNCT
ap-5383	5	17	krypton	krypton	PROPN
ap-5383	5	18	.	.	PUNCT
ap-5383	6	1	1	1	X
ap-5383	6	2	.	.	X
ap-5383	6	3	introduction	introduction	NOUN
ap-5383	6	4	our	our	PRON
ap-5383	6	5	goal	goal	NOUN
ap-5383	6	6	is	be	AUX
ap-5383	6	7	to	to	PART
ap-5383	6	8	optimize	optimize	VERB
ap-5383	6	9	the	the	DET
ap-5383	6	10	soft	soft	ADJ
ap-5383	6	11	x	x	NOUN
ap-5383	6	12	-	-	NOUN
ap-5383	6	13	ray	ray	NOUN
ap-5383	6	14	(	(	PUNCT
ap-5383	6	15	sxr	sxr	PROPN
ap-5383	6	16	;	;	PUNCT
ap-5383	6	17	photon	photon	NOUN
ap-5383	6	18	energies	energy	NOUN
ap-5383	6	19	of	of	ADP
ap-5383	6	20	about	about	ADV
ap-5383	6	21	250	250	NUM
ap-5383	6	22	ev	ev	NOUN
ap-5383	6	23	to	to	ADP
ap-5383	6	24	several	several	ADJ
ap-5383	6	25	kev	kev	NOUN
ap-5383	7	1	[	[	X
ap-5383	7	2	1	1	NUM
ap-5383	7	3	]	]	PUNCT
ap-5383	7	4	)	)	PUNCT
ap-5383	7	5	source	source	NOUN
ap-5383	7	6	based	base	VERB
ap-5383	7	7	on	on	ADP
ap-5383	7	8	laser	laser	NOUN
ap-5383	7	9	-	-	PUNCT
ap-5383	7	10	plasma	plasma	NOUN
ap-5383	7	11	created	create	VERB
ap-5383	7	12	by	by	ADP
ap-5383	7	13	the	the	DET
ap-5383	7	14	focused	focused	ADJ
ap-5383	7	15	laser	laser	NOUN
ap-5383	7	16	radiation	radiation	NOUN
ap-5383	7	17	in	in	ADP
ap-5383	7	18	the	the	DET
ap-5383	7	19	gas	gas	NOUN
ap-5383	7	20	.	.	PUNCT
ap-5383	8	1	if	if	SCONJ
ap-5383	8	2	the	the	DET
ap-5383	8	3	intensity	intensity	NOUN
ap-5383	8	4	of	of	ADP
ap-5383	8	5	the	the	DET
ap-5383	8	6	laser	laser	NOUN
ap-5383	8	7	radiation	radiation	NOUN
ap-5383	8	8	is	be	AUX
ap-5383	8	9	high	high	ADJ
ap-5383	8	10	enough	enough	ADV
ap-5383	8	11	,	,	PUNCT
ap-5383	8	12	highly	highly	ADV
ap-5383	8	13	ionized	ionized	ADJ
ap-5383	8	14	ions	ion	NOUN
ap-5383	8	15	are	be	AUX
ap-5383	8	16	formed	form	VERB
ap-5383	8	17	in	in	ADP
ap-5383	8	18	the	the	DET
ap-5383	8	19	plasma	plasma	NOUN
ap-5383	8	20	and	and	CCONJ
ap-5383	8	21	soft	soft	ADJ
ap-5383	8	22	x	x	NOUN
ap-5383	8	23	-	-	NOUN
ap-5383	8	24	rays	ray	NOUN
ap-5383	8	25	with	with	ADP
ap-5383	8	26	the	the	DET
ap-5383	8	27	wavelength	wavelength	NOUN
ap-5383	8	28	range	range	NOUN
ap-5383	8	29	1	1	NUM
ap-5383	8	30	-	-	SYM
ap-5383	8	31	100	100	NUM
ap-5383	8	32	nm	nm	NOUN
ap-5383	8	33	are	be	AUX
ap-5383	8	34	emitted	emit	VERB
ap-5383	8	35	.	.	PUNCT
ap-5383	9	1	the	the	DET
ap-5383	9	2	emitted	emitted	ADJ
ap-5383	9	3	radiation	radiation	NOUN
ap-5383	9	4	consists	consist	VERB
ap-5383	9	5	of	of	ADP
ap-5383	9	6	a	a	DET
ap-5383	9	7	continuous	continuous	ADJ
ap-5383	9	8	spectral	spectral	ADJ
ap-5383	9	9	part	part	NOUN
ap-5383	9	10	due	due	ADP
ap-5383	9	11	to	to	ADP
ap-5383	9	12	inverse	inverse	NOUN
ap-5383	9	13	bremsstrahlung	bremsstrahlung	NOUN
ap-5383	9	14	and	and	CCONJ
ap-5383	9	15	line	line	NOUN
ap-5383	9	16	part	part	NOUN
ap-5383	9	17	of	of	ADP
ap-5383	9	18	spectra	spectra	NOUN
ap-5383	9	19	due	due	ADP
ap-5383	9	20	to	to	ADP
ap-5383	9	21	spontaneous	spontaneous	ADJ
ap-5383	9	22	quantum	quantum	ADJ
ap-5383	9	23	transitions	transition	NOUN
ap-5383	9	24	between	between	ADP
ap-5383	9	25	inner	inner	ADJ
ap-5383	9	26	states	state	NOUN
ap-5383	9	27	of	of	ADP
ap-5383	9	28	ions	ion	NOUN
ap-5383	9	29	.	.	PUNCT
ap-5383	10	1	the	the	PRON
ap-5383	10	2	higher	high	ADJ
ap-5383	10	3	the	the	DET
ap-5383	10	4	plasma	plasma	NOUN
ap-5383	10	5	electron	electron	NOUN
ap-5383	10	6	temperature	temperature	NOUN
ap-5383	10	7	is	be	AUX
ap-5383	10	8	,	,	PUNCT
ap-5383	10	9	the	the	DET
ap-5383	10	10	shorter	short	ADJ
ap-5383	10	11	wavelengths	wavelength	NOUN
ap-5383	10	12	are	be	AUX
ap-5383	10	13	emitted	emit	VERB
ap-5383	10	14	.	.	PUNCT
ap-5383	11	1	the	the	DET
ap-5383	11	2	interest	interest	NOUN
ap-5383	11	3	in	in	ADP
ap-5383	11	4	laser	laser	NOUN
ap-5383	11	5	-	-	PUNCT
ap-5383	11	6	plasma	plasma	NOUN
ap-5383	11	7	sources	source	NOUN
ap-5383	11	8	is	be	AUX
ap-5383	11	9	stimulated	stimulate	VERB
ap-5383	11	10	by	by	ADP
ap-5383	11	11	potential	potential	ADJ
ap-5383	11	12	innovative	innovative	ADJ
ap-5383	11	13	applications	application	NOUN
ap-5383	11	14	,	,	PUNCT
ap-5383	11	15	where	where	SCONJ
ap-5383	11	16	intensive	intensive	ADJ
ap-5383	11	17	sources	source	NOUN
ap-5383	11	18	of	of	ADP
ap-5383	11	19	monochromatic	monochromatic	ADJ
ap-5383	11	20	radiation	radiation	NOUN
ap-5383	11	21	are	be	AUX
ap-5383	11	22	required	require	VERB
ap-5383	11	23	.	.	PUNCT
ap-5383	12	1	if	if	SCONJ
ap-5383	12	2	the	the	DET
ap-5383	12	3	objective	objective	NOUN
ap-5383	12	4	is	be	AUX
ap-5383	12	5	to	to	PART
ap-5383	12	6	develop	develop	VERB
ap-5383	12	7	sxr	sxr	PROPN
ap-5383	12	8	microscopy	microscopy	NOUN
ap-5383	12	9	[	[	X
ap-5383	12	10	2–4	2–4	NUM
ap-5383	12	11	]	]	X
ap-5383	12	12	of	of	ADP
ap-5383	12	13	biological	biological	ADJ
ap-5383	12	14	samples	sample	NOUN
ap-5383	12	15	[	[	X
ap-5383	12	16	5–7	5–7	X
ap-5383	12	17	]	]	PUNCT
ap-5383	12	18	,	,	PUNCT
ap-5383	12	19	the	the	DET
ap-5383	12	20	preference	preference	NOUN
ap-5383	12	21	is	be	AUX
ap-5383	12	22	given	give	VERB
ap-5383	12	23	to	to	ADP
ap-5383	12	24	a	a	DET
ap-5383	12	25	radiation	radiation	NOUN
ap-5383	12	26	with	with	ADP
ap-5383	12	27	a	a	DET
ap-5383	12	28	wavelength	wavelength	NOUN
ap-5383	12	29	in	in	ADP
ap-5383	12	30	the	the	DET
ap-5383	12	31	“	"	PUNCT
ap-5383	12	32	water	water	NOUN
ap-5383	12	33	window	window	NOUN
ap-5383	12	34	”	"	PUNCT
ap-5383	12	35	spectral	spectral	ADJ
ap-5383	12	36	range	range	NOUN
ap-5383	12	37	(	(	PUNCT
ap-5383	12	38	i.e.	i.e.	X
ap-5383	12	39	2.3	2.3	NUM
ap-5383	12	40	–	–	PUNCT
ap-5383	12	41	4.4	4.4	NUM
ap-5383	12	42	nm	nm	NOUN
ap-5383	12	43	)	)	PUNCT
ap-5383	12	44	.	.	PUNCT
ap-5383	13	1	in	in	ADP
ap-5383	13	2	this	this	DET
ap-5383	13	3	spectral	spectral	ADJ
ap-5383	13	4	range	range	NOUN
ap-5383	13	5	,	,	PUNCT
ap-5383	13	6	a	a	DET
ap-5383	13	7	high	high	ADJ
ap-5383	13	8	contrast	contrast	NOUN
ap-5383	13	9	between	between	ADP
ap-5383	13	10	the	the	DET
ap-5383	13	11	absorption	absorption	NOUN
ap-5383	13	12	of	of	ADP
ap-5383	13	13	water	water	NOUN
ap-5383	13	14	and	and	CCONJ
ap-5383	13	15	organic	organic	ADJ
ap-5383	13	16	molecules	molecule	NOUN
ap-5383	13	17	containing	contain	VERB
ap-5383	13	18	carbon	carbon	NOUN
ap-5383	13	19	is	be	AUX
ap-5383	13	20	achieved	achieve	VERB
ap-5383	13	21	.	.	PUNCT
ap-5383	14	1	in	in	ADP
ap-5383	14	2	particular	particular	ADJ
ap-5383	14	3	,	,	PUNCT
ap-5383	14	4	when	when	SCONJ
ap-5383	14	5	studying	study	VERB
ap-5383	14	6	the	the	DET
ap-5383	14	7	nitrogen	nitrogen	NOUN
ap-5383	14	8	plasma	plasma	NOUN
ap-5383	14	9	emission	emission	NOUN
ap-5383	14	10	,	,	PUNCT
ap-5383	14	11	it	it	PRON
ap-5383	14	12	is	be	AUX
ap-5383	14	13	possible	possible	ADJ
ap-5383	14	14	to	to	PART
ap-5383	14	15	observe	observe	VERB
ap-5383	14	16	that	that	SCONJ
ap-5383	14	17	a	a	DET
ap-5383	14	18	line	line	NOUN
ap-5383	14	19	emission	emission	NOUN
ap-5383	14	20	at	at	ADP
ap-5383	14	21	2.88	2.88	NUM
ap-5383	14	22	nm	nm	PRON
ap-5383	14	23	dominates	dominate	VERB
ap-5383	14	24	in	in	ADP
ap-5383	14	25	plasma	plasma	NOUN
ap-5383	14	26	with	with	ADP
ap-5383	14	27	an	an	DET
ap-5383	14	28	electron	electron	NOUN
ap-5383	14	29	temperature	temperature	NOUN
ap-5383	14	30	about	about	ADP
ap-5383	14	31	ev	ev	PROPN
ap-5383	14	32	[	[	X
ap-5383	14	33	8	8	NUM
ap-5383	14	34	,	,	PUNCT
ap-5383	14	35	9	9	NUM
ap-5383	14	36	]	]	PUNCT
ap-5383	14	37	.	.	PUNCT
ap-5383	15	1	to	to	PART
ap-5383	15	2	get	get	VERB
ap-5383	15	3	a	a	DET
ap-5383	15	4	high	high	ADJ
ap-5383	15	5	intensity	intensity	NOUN
ap-5383	15	6	of	of	ADP
ap-5383	15	7	this	this	DET
ap-5383	15	8	monochromatic	monochromatic	ADJ
ap-5383	15	9	radiation	radiation	NOUN
ap-5383	15	10	,	,	PUNCT
ap-5383	15	11	a	a	DET
ap-5383	15	12	high	high	ADJ
ap-5383	15	13	density	density	NOUN
ap-5383	15	14	of	of	ADP
ap-5383	15	15	nitrogen	nitrogen	NOUN
ap-5383	15	16	ions	ion	NOUN
ap-5383	15	17	is	be	AUX
ap-5383	15	18	required	require	VERB
ap-5383	15	19	.	.	PUNCT
ap-5383	16	1	the	the	DET
ap-5383	16	2	high	high	ADJ
ap-5383	16	3	density	density	NOUN
ap-5383	16	4	of	of	ADP
ap-5383	16	5	gas	gas	NOUN
ap-5383	16	6	atoms	atom	NOUN
ap-5383	16	7	in	in	ADP
ap-5383	16	8	a	a	DET
ap-5383	16	9	defined	define	VERB
ap-5383	16	10	region	region	NOUN
ap-5383	16	11	of	of	ADP
ap-5383	16	12	space	space	NOUN
ap-5383	16	13	is	be	AUX
ap-5383	16	14	achieved	achieve	VERB
ap-5383	16	15	by	by	ADP
ap-5383	16	16	the	the	DET
ap-5383	16	17	gas	gas	NOUN
ap-5383	16	18	-	-	PUNCT
ap-5383	16	19	puff	puff	NOUN
ap-5383	16	20	target	target	NOUN
ap-5383	16	21	technique	technique	NOUN
ap-5383	16	22	.	.	PUNCT
ap-5383	17	1	the	the	DET
ap-5383	17	2	target	target	NOUN
ap-5383	17	3	forms	form	VERB
ap-5383	17	4	a	a	DET
ap-5383	17	5	gas	gas	NOUN
ap-5383	17	6	spreading	spread	VERB
ap-5383	17	7	into	into	ADP
ap-5383	17	8	the	the	DET
ap-5383	17	9	vacuum	vacuum	NOUN
ap-5383	17	10	after	after	SCONJ
ap-5383	17	11	the	the	DET
ap-5383	17	12	nozzle	nozzle	NOUN
ap-5383	17	13	is	be	AUX
ap-5383	17	14	quickly	quickly	ADV
ap-5383	17	15	opened	open	VERB
ap-5383	17	16	.	.	PUNCT
ap-5383	18	1	the	the	DET
ap-5383	18	2	spatial	spatial	ADJ
ap-5383	18	3	-	-	PUNCT
ap-5383	18	4	temporal	temporal	ADJ
ap-5383	18	5	distribution	distribution	NOUN
ap-5383	18	6	of	of	ADP
ap-5383	18	7	atomic	atomic	ADJ
ap-5383	18	8	density	density	NOUN
ap-5383	18	9	represents	represent	VERB
ap-5383	18	10	a	a	DET
ap-5383	18	11	spatial	spatial	ADJ
ap-5383	18	12	-	-	PUNCT
ap-5383	18	13	temporal	temporal	ADJ
ap-5383	18	14	variable	variable	ADJ
ap-5383	18	15	gas	gas	NOUN
ap-5383	18	16	target	target	NOUN
ap-5383	18	17	.	.	PUNCT
ap-5383	19	1	the	the	DET
ap-5383	19	2	efficiency	efficiency	NOUN
ap-5383	19	3	of	of	ADP
ap-5383	19	4	the	the	DET
ap-5383	19	5	sxr	sxr	PROPN
ap-5383	19	6	generation	generation	NOUN
ap-5383	19	7	depends	depend	VERB
ap-5383	19	8	on	on	ADP
ap-5383	19	9	the	the	DET
ap-5383	19	10	moment	moment	NOUN
ap-5383	19	11	and	and	CCONJ
ap-5383	19	12	place	place	NOUN
ap-5383	19	13	of	of	ADP
ap-5383	19	14	the	the	DET
ap-5383	19	15	impact	impact	NOUN
ap-5383	19	16	of	of	ADP
ap-5383	19	17	the	the	DET
ap-5383	19	18	focused	focused	ADJ
ap-5383	19	19	laser	laser	NOUN
ap-5383	19	20	beam	beam	NOUN
ap-5383	19	21	on	on	ADP
ap-5383	19	22	the	the	DET
ap-5383	19	23	target	target	NOUN
ap-5383	19	24	.	.	PUNCT
ap-5383	20	1	in	in	ADP
ap-5383	20	2	this	this	DET
ap-5383	20	3	paper	paper	NOUN
ap-5383	20	4	,	,	PUNCT
ap-5383	20	5	we	we	PRON
ap-5383	20	6	present	present	VERB
ap-5383	20	7	the	the	DET
ap-5383	20	8	results	result	NOUN
ap-5383	20	9	of	of	ADP
ap-5383	20	10	an	an	DET
ap-5383	20	11	experimental	experimental	ADJ
ap-5383	20	12	determination	determination	NOUN
ap-5383	20	13	of	of	ADP
ap-5383	20	14	spatial	spatial	ADJ
ap-5383	20	15	densities	density	NOUN
ap-5383	20	16	of	of	ADP
ap-5383	20	17	gas	gas	NOUN
ap-5383	20	18	in	in	ADP
ap-5383	20	19	our	our	PRON
ap-5383	20	20	gas	gas	NOUN
ap-5383	20	21	-	-	PUNCT
ap-5383	20	22	puff	puff	NOUN
ap-5383	20	23	target	target	NOUN
ap-5383	20	24	by	by	ADP
ap-5383	20	25	radiography	radiography	NOUN
ap-5383	20	26	.	.	PUNCT
ap-5383	21	1	the	the	DET
ap-5383	21	2	spatial	spatial	ADJ
ap-5383	21	3	dependence	dependence	NOUN
ap-5383	21	4	of	of	ADP
ap-5383	21	5	the	the	DET
ap-5383	21	6	transmittance	transmittance	NOUN
ap-5383	21	7	of	of	ADP
ap-5383	21	8	a	a	DET
ap-5383	21	9	cylindrically	cylindrically	ADV
ap-5383	21	10	symmetric	symmetric	ADJ
ap-5383	21	11	shape	shape	NOUN
ap-5383	21	12	perpendicular	perpendicular	NOUN
ap-5383	21	13	to	to	PART
ap-5383	21	14	symmetry	symmetry	NOUN
ap-5383	21	15	axis	axis	NOUN
ap-5383	21	16	has	have	AUX
ap-5383	21	17	been	be	AUX
ap-5383	21	18	measured	measure	VERB
ap-5383	21	19	using	use	VERB
ap-5383	21	20	the	the	DET
ap-5383	21	21	quasi	quasi	ADJ
ap-5383	21	22	-	-	ADJ
ap-5383	21	23	monochromatic	monochromatic	ADJ
ap-5383	21	24	euv	euv	NOUN
ap-5383	21	25	radiation	radiation	NOUN
ap-5383	21	26	at	at	ADP
ap-5383	21	27	a	a	DET
ap-5383	21	28	wavelength	wavelength	NOUN
ap-5383	21	29	of	of	ADP
ap-5383	21	30	13.4	13.4	NUM
ap-5383	21	31	nm	nm	NOUN
ap-5383	21	32	from	from	ADP
ap-5383	21	33	another	another	DET
ap-5383	21	34	laser	laser	NOUN
ap-5383	21	35	plasma	plasma	NOUN
ap-5383	21	36	-	-	PUNCT
ap-5383	21	37	source	source	NOUN
ap-5383	21	38	.	.	PUNCT
ap-5383	22	1	the	the	DET
ap-5383	22	2	experiments	experiment	NOUN
ap-5383	22	3	were	be	AUX
ap-5383	22	4	performed	perform	VERB
ap-5383	22	5	in	in	ADP
ap-5383	22	6	the	the	DET
ap-5383	22	7	cooperating	cooperate	VERB
ap-5383	22	8	laboratory	laboratory	NOUN
ap-5383	22	9	of	of	ADP
ap-5383	22	10	laser	laser	NOUN
ap-5383	22	11	-	-	PUNCT
ap-5383	22	12	matter	matter	NOUN
ap-5383	22	13	interaction	interaction	NOUN
ap-5383	22	14	group	group	NOUN
ap-5383	22	15	,	,	PUNCT
ap-5383	22	16	institute	institute	NOUN
ap-5383	22	17	of	of	ADP
ap-5383	22	18	optoelectronics	optoelectronic	NOUN
ap-5383	22	19	,	,	PUNCT
ap-5383	22	20	military	military	ADJ
ap-5383	22	21	university	university	NOUN
ap-5383	22	22	of	of	ADP
ap-5383	22	23	technology	technology	NOUN
ap-5383	22	24	in	in	ADP
ap-5383	22	25	warsaw	warsaw	PROPN
ap-5383	22	26	[	[	X
ap-5383	22	27	10	10	NUM
ap-5383	22	28	]	]	PUNCT
ap-5383	22	29	.	.	PUNCT
ap-5383	23	1	2	2	X
ap-5383	23	2	.	.	X
ap-5383	23	3	gas	gas	NOUN
ap-5383	23	4	-	-	PUNCT
ap-5383	23	5	puff	puff	NOUN
ap-5383	23	6	target	target	NOUN
ap-5383	23	7	description	description	NOUN
ap-5383	23	8	the	the	DET
ap-5383	23	9	gas	gas	NOUN
ap-5383	23	10	-	-	PUNCT
ap-5383	23	11	puff	puff	NOUN
ap-5383	23	12	target	target	NOUN
ap-5383	23	13	presented	present	VERB
ap-5383	23	14	herein	herein	NOUN
ap-5383	23	15	was	be	AUX
ap-5383	23	16	designed	design	VERB
ap-5383	23	17	in	in	ADP
ap-5383	23	18	laser	laser	NOUN
ap-5383	23	19	laboratory	laboratory	NOUN
ap-5383	23	20	goettingen	goettingen	NOUN
ap-5383	24	1	[	[	X
ap-5383	24	2	11	11	NUM
ap-5383	24	3	,	,	PUNCT
ap-5383	24	4	12	12	NUM
ap-5383	24	5	]	]	PUNCT
ap-5383	24	6	and	and	CCONJ
ap-5383	24	7	is	be	AUX
ap-5383	24	8	used	use	VERB
ap-5383	24	9	in	in	ADP
ap-5383	24	10	the	the	DET
ap-5383	24	11	ctu	ctu	NOUN
ap-5383	24	12	laboratory	laboratory	NOUN
ap-5383	24	13	.	.	PUNCT
ap-5383	25	1	a	a	DET
ap-5383	25	2	simple	simple	ADJ
ap-5383	25	3	single	single	ADJ
ap-5383	25	4	-	-	PUNCT
ap-5383	25	5	stream	stream	NOUN
ap-5383	25	6	supersonic	supersonic	ADJ
ap-5383	25	7	nozzle	nozzle	NOUN
ap-5383	25	8	forms	form	NOUN
ap-5383	25	9	the	the	DET
ap-5383	25	10	gas	gas	NOUN
ap-5383	25	11	target	target	NOUN
ap-5383	25	12	.	.	PUNCT
ap-5383	26	1	the	the	DET
ap-5383	26	2	simplified	simplified	ADJ
ap-5383	26	3	scheme	scheme	NOUN
ap-5383	26	4	of	of	ADP
ap-5383	26	5	the	the	DET
ap-5383	26	6	nozzle	nozzle	NOUN
ap-5383	26	7	and	and	CCONJ
ap-5383	26	8	target	target	NOUN
ap-5383	26	9	is	be	AUX
ap-5383	26	10	seen	see	VERB
ap-5383	26	11	in	in	ADP
ap-5383	26	12	fig	fig	NOUN
ap-5383	26	13	.	.	PUNCT
ap-5383	27	1	1	1	X
ap-5383	27	2	.	.	X
ap-5383	27	3	the	the	DET
ap-5383	27	4	nozzle	nozzle	NOUN
ap-5383	27	5	is	be	AUX
ap-5383	27	6	a	a	DET
ap-5383	27	7	conical	conical	ADJ
ap-5383	27	8	hole	hole	NOUN
ap-5383	27	9	in	in	ADP
ap-5383	27	10	a	a	DET
ap-5383	27	11	metal	metal	NOUN
ap-5383	27	12	plate	plate	NOUN
ap-5383	27	13	,	,	PUNCT
ap-5383	27	14	located	locate	VERB
ap-5383	27	15	above	above	ADP
ap-5383	27	16	a	a	DET
ap-5383	27	17	high	high	ADJ
ap-5383	27	18	-	-	PUNCT
ap-5383	27	19	pressure	pressure	NOUN
ap-5383	27	20	reservoir	reservoir	NOUN
ap-5383	27	21	and	and	CCONJ
ap-5383	27	22	an	an	DET
ap-5383	27	23	evacuated	evacuate	VERB
ap-5383	27	24	space	space	NOUN
ap-5383	27	25	above	above	ADP
ap-5383	27	26	the	the	DET
ap-5383	27	27	nozzle	nozzle	NOUN
ap-5383	27	28	.	.	PUNCT
ap-5383	28	1	at	at	ADP
ap-5383	28	2	the	the	DET
ap-5383	28	3	beginning	beginning	NOUN
ap-5383	28	4	of	of	ADP
ap-5383	28	5	the	the	DET
ap-5383	28	6	experiment	experiment	NOUN
ap-5383	28	7	,	,	PUNCT
ap-5383	28	8	the	the	DET
ap-5383	28	9	gas	gas	NOUN
ap-5383	28	10	pressure	pressure	NOUN
ap-5383	28	11	in	in	ADP
ap-5383	28	12	the	the	DET
ap-5383	28	13	reservoir	reservoir	NOUN
ap-5383	28	14	is	be	AUX
ap-5383	28	15	increased	increase	VERB
ap-5383	28	16	almost	almost	ADV
ap-5383	28	17	immediately	immediately	ADV
ap-5383	28	18	.	.	PUNCT
ap-5383	29	1	the	the	DET
ap-5383	29	2	gas	gas	NOUN
ap-5383	29	3	flows	flow	VERB
ap-5383	29	4	through	through	ADP
ap-5383	29	5	the	the	DET
ap-5383	29	6	nozzle	nozzle	NOUN
ap-5383	29	7	by	by	ADP
ap-5383	29	8	supersonic	supersonic	ADJ
ap-5383	29	9	speed	speed	NOUN
ap-5383	29	10	.	.	PUNCT
ap-5383	30	1	a	a	DET
ap-5383	30	2	variable	variable	ADJ
ap-5383	30	3	gaseous	gaseous	ADJ
ap-5383	30	4	target	target	NOUN
ap-5383	30	5	is	be	AUX
ap-5383	30	6	formed	form	VERB
ap-5383	30	7	above	above	ADP
ap-5383	30	8	the	the	DET
ap-5383	30	9	nozzle	nozzle	NOUN
ap-5383	30	10	,	,	PUNCT
ap-5383	30	11	having	have	VERB
ap-5383	30	12	,	,	PUNCT
ap-5383	30	13	in	in	ADP
ap-5383	30	14	principle	principle	NOUN
ap-5383	30	15	,	,	PUNCT
ap-5383	30	16	the	the	DET
ap-5383	30	17	cylindrical	cylindrical	ADJ
ap-5383	30	18	symmetry	symmetry	NOUN
ap-5383	30	19	.	.	PUNCT
ap-5383	31	1	for	for	ADP
ap-5383	31	2	our	our	PRON
ap-5383	31	3	purpose	purpose	NOUN
ap-5383	31	4	,	,	PUNCT
ap-5383	31	5	it	it	PRON
ap-5383	31	6	is	be	AUX
ap-5383	31	7	important	important	ADJ
ap-5383	31	8	to	to	PART
ap-5383	31	9	know	know	VERB
ap-5383	31	10	especially	especially	ADV
ap-5383	31	11	the	the	DET
ap-5383	31	12	density	density	NOUN
ap-5383	31	13	of	of	ADP
ap-5383	31	14	the	the	DET
ap-5383	31	15	target	target	NOUN
ap-5383	31	16	at	at	ADP
ap-5383	31	17	the	the	DET
ap-5383	31	18	time	time	NOUN
ap-5383	31	19	when	when	SCONJ
ap-5383	31	20	the	the	DET
ap-5383	31	21	laser	laser	NOUN
ap-5383	31	22	is	be	AUX
ap-5383	31	23	fired	fire	VERB
ap-5383	31	24	and	and	CCONJ
ap-5383	31	25	at	at	ADP
ap-5383	31	26	the	the	DET
ap-5383	31	27	place	place	NOUN
ap-5383	31	28	where	where	SCONJ
ap-5383	31	29	the	the	DET
ap-5383	31	30	laser	laser	NOUN
ap-5383	31	31	beam	beam	NOUN
ap-5383	31	32	hits	hit	VERB
ap-5383	31	33	the	the	DET
ap-5383	31	34	target	target	NOUN
ap-5383	31	35	,	,	PUNCT
ap-5383	31	36	i.e.	i.e.	X
ap-5383	31	37	at	at	ADP
ap-5383	31	38	a	a	DET
ap-5383	31	39	distance	distance	NOUN
ap-5383	31	40	∆z	∆z	NOUN
ap-5383	31	41	from	from	ADP
ap-5383	31	42	the	the	DET
ap-5383	31	43	nozzle	nozzle	NOUN
ap-5383	31	44	.	.	PUNCT
ap-5383	32	1	3	3	X
ap-5383	32	2	.	.	X
ap-5383	32	3	description	description	NOUN
ap-5383	32	4	of	of	ADP
ap-5383	32	5	gas	gas	NOUN
ap-5383	32	6	stream	stream	NOUN
ap-5383	32	7	radiography	radiography	NOUN
ap-5383	32	8	our	our	PRON
ap-5383	32	9	gas	gas	NOUN
ap-5383	32	10	-	-	PUNCT
ap-5383	32	11	puff	puff	NOUN
ap-5383	32	12	target	target	NOUN
ap-5383	32	13	has	have	VERB
ap-5383	32	14	a	a	DET
ap-5383	32	15	cylindrical	cylindrical	ADJ
ap-5383	32	16	symmetry	symmetry	NOUN
ap-5383	32	17	.	.	PUNCT
ap-5383	33	1	the	the	DET
ap-5383	33	2	axis	axis	NOUN
ap-5383	33	3	of	of	ADP
ap-5383	33	4	symmetry	symmetry	NOUN
ap-5383	33	5	coincides	coincide	VERB
ap-5383	33	6	with	with	ADP
ap-5383	33	7	our	our	PRON
ap-5383	33	8	coordinate	coordinate	NOUN
ap-5383	33	9	z.	z.	PROPN
ap-5383	33	10	for	for	ADP
ap-5383	33	11	the	the	DET
ap-5383	33	12	assessment	assessment	NOUN
ap-5383	33	13	of	of	ADP
ap-5383	33	14	the	the	DET
ap-5383	33	15	spatial	spatial	ADJ
ap-5383	33	16	distribution	distribution	NOUN
ap-5383	33	17	of	of	ADP
ap-5383	33	18	working	work	VERB
ap-5383	33	19	gas	gas	NOUN
ap-5383	33	20	mass	mass	NOUN
ap-5383	33	21	density	density	NOUN
ap-5383	33	22	ρ(x	ρ(x	PROPN
ap-5383	33	23	,	,	PUNCT
ap-5383	33	24	y	y	PROPN
ap-5383	33	25	,	,	PUNCT
ap-5383	33	26	z	z	NOUN
ap-5383	33	27	)	)	PUNCT
ap-5383	33	28	,	,	PUNCT
ap-5383	33	29	we	we	PRON
ap-5383	33	30	record	record	VERB
ap-5383	33	31	the	the	DET
ap-5383	33	32	shadowgraph	shadowgraph	ADJ
ap-5383	33	33	587	587	NUM
ap-5383	33	34	https://doi.org/10.14311/ap.2019.59.0587	https://doi.org/10.14311/ap.2019.59.0587	ADJ
ap-5383	33	35	https://ojs.cvut.cz/ojs/index.php/ap	https://ojs.cvut.cz/ojs/index.php/ap	PROPN
ap-5383	33	36	š	š	NOUN
ap-5383	33	37	.	.	PUNCT
ap-5383	34	1	salačová	salačová	PROPN
ap-5383	34	2	,	,	PUNCT
ap-5383	34	3	p.	p.	NOUN
ap-5383	34	4	wachulak	wachulak	NOUN
ap-5383	34	5	,	,	PUNCT
ap-5383	34	6	m.	m.	NOUN
ap-5383	34	7	tatíček	tatíček	PROPN
ap-5383	34	8	,	,	PUNCT
ap-5383	34	9	m.	m.	NOUN
ap-5383	34	10	vrbová	vrbová	PROPN
ap-5383	34	11	acta	acta	PROPN
ap-5383	34	12	polytechnica	polytechnica	PROPN
ap-5383	34	13	figure	figure	NOUN
ap-5383	34	14	1	1	NUM
ap-5383	34	15	.	.	PUNCT
ap-5383	34	16	scheme	scheme	NOUN
ap-5383	34	17	of	of	ADP
ap-5383	34	18	gas	gas	NOUN
ap-5383	34	19	-	-	PUNCT
ap-5383	34	20	puff	puff	NOUN
ap-5383	34	21	target	target	NOUN
ap-5383	34	22	.	.	PUNCT
ap-5383	35	1	of	of	ADP
ap-5383	35	2	the	the	DET
ap-5383	35	3	gas	gas	NOUN
ap-5383	35	4	stream	stream	NOUN
ap-5383	35	5	in	in	ADP
ap-5383	35	6	y	y	NOUN
ap-5383	35	7	-	-	PUNCT
ap-5383	35	8	direction	direction	NOUN
ap-5383	35	9	(	(	PUNCT
ap-5383	35	10	perpendicular	perpendicular	ADJ
ap-5383	35	11	to	to	ADP
ap-5383	35	12	the	the	DET
ap-5383	35	13	axis	axis	NOUN
ap-5383	35	14	of	of	ADP
ap-5383	35	15	symmetry	symmetry	NOUN
ap-5383	35	16	z	z	PROPN
ap-5383	35	17	)	)	PUNCT
ap-5383	35	18	.	.	PUNCT
ap-5383	36	1	the	the	DET
ap-5383	36	2	resulting	result	VERB
ap-5383	36	3	x−z	x−z	PROPN
ap-5383	36	4	dependence	dependence	NOUN
ap-5383	36	5	of	of	ADP
ap-5383	36	6	the	the	DET
ap-5383	36	7	object	object	NOUN
ap-5383	36	8	radiography	radiography	NOUN
ap-5383	36	9	is	be	AUX
ap-5383	36	10	determined	determine	VERB
ap-5383	36	11	by	by	ADP
ap-5383	36	12	transmittance	transmittance	NOUN
ap-5383	36	13	t	t	PROPN
ap-5383	36	14	(	(	PUNCT
ap-5383	36	15	x	x	X
ap-5383	36	16	,	,	PUNCT
ap-5383	36	17	z	z	NOUN
ap-5383	36	18	)	)	PUNCT
ap-5383	36	19	t	t	NOUN
ap-5383	36	20	(	(	PUNCT
ap-5383	36	21	x	x	X
ap-5383	36	22	,	,	PUNCT
ap-5383	36	23	z	z	NOUN
ap-5383	36	24	)	)	PUNCT
ap-5383	36	25	=	=	SYM
ap-5383	36	26	e−µ	e−µ	PROPN
ap-5383	36	27	∫	∫	PROPN
ap-5383	36	28	ρ(x	ρ(x	PROPN
ap-5383	36	29	,	,	PUNCT
ap-5383	36	30	y	y	PROPN
ap-5383	36	31	,	,	PUNCT
ap-5383	36	32	z)dy	z)dy	PROPN
ap-5383	36	33	,	,	PUNCT
ap-5383	36	34	(	(	PUNCT
ap-5383	36	35	1	1	X
ap-5383	36	36	)	)	PUNCT
ap-5383	36	37	where	where	SCONJ
ap-5383	36	38	ρ(x	ρ(x	NOUN
ap-5383	36	39	,	,	PUNCT
ap-5383	36	40	y	y	PROPN
ap-5383	36	41	,	,	PUNCT
ap-5383	36	42	z	z	NOUN
ap-5383	36	43	)	)	PUNCT
ap-5383	36	44	is	be	AUX
ap-5383	36	45	the	the	DET
ap-5383	36	46	mass	mass	ADJ
ap-5383	36	47	density	density	NOUN
ap-5383	36	48	of	of	ADP
ap-5383	36	49	the	the	DET
ap-5383	36	50	gas	gas	NOUN
ap-5383	36	51	and	and	CCONJ
ap-5383	36	52	µ	µ	NOUN
ap-5383	36	53	is	be	AUX
ap-5383	36	54	the	the	DET
ap-5383	36	55	photo	photo	NOUN
ap-5383	36	56	-	-	PUNCT
ap-5383	36	57	absorption	absorption	NOUN
ap-5383	36	58	cross	cross	NOUN
ap-5383	36	59	-	-	NOUN
ap-5383	36	60	section	section	NOUN
ap-5383	36	61	of	of	ADP
ap-5383	36	62	the	the	DET
ap-5383	36	63	gas	gas	NOUN
ap-5383	36	64	at	at	ADP
ap-5383	36	65	the	the	DET
ap-5383	36	66	wavelength	wavelength	NOUN
ap-5383	36	67	used	use	VERB
ap-5383	36	68	for	for	ADP
ap-5383	36	69	the	the	DET
ap-5383	36	70	radiography	radiography	NOUN
ap-5383	36	71	experiment	experiment	NOUN
ap-5383	36	72	.	.	PUNCT
ap-5383	37	1	the	the	DET
ap-5383	37	2	recorded	record	VERB
ap-5383	37	3	transmission	transmission	NOUN
ap-5383	37	4	along	along	ADP
ap-5383	37	5	the	the	DET
ap-5383	37	6	x	x	NOUN
ap-5383	37	7	coordinate	coordinate	NOUN
ap-5383	37	8	at	at	ADP
ap-5383	37	9	the	the	DET
ap-5383	37	10	distance	distance	NOUN
ap-5383	37	11	∆z	∆z	PROPN
ap-5383	37	12	is	be	AUX
ap-5383	37	13	t	t	PROPN
ap-5383	37	14	(	(	PUNCT
ap-5383	37	15	x,∆z	x,∆z	NUM
ap-5383	37	16	)	)	PUNCT
ap-5383	37	17	=	=	SYM
ap-5383	37	18	e−µ	e−µ	NOUN
ap-5383	37	19	∫	∫	PROPN
ap-5383	37	20	ρ(x	ρ(x	PROPN
ap-5383	37	21	,	,	PUNCT
ap-5383	37	22	y,∆z)dy	y,∆z)dy	PROPN
ap-5383	37	23	.	.	PUNCT
ap-5383	38	1	(	(	PUNCT
ap-5383	38	2	2	2	X
ap-5383	38	3	)	)	PUNCT
ap-5383	38	4	assuming	assume	VERB
ap-5383	38	5	the	the	DET
ap-5383	38	6	gaussian	gaussian	ADJ
ap-5383	38	7	gas	gas	NOUN
ap-5383	38	8	density	density	NOUN
ap-5383	38	9	profile	profile	NOUN
ap-5383	38	10	ρ(r,∆z	ρ(r,∆z	NOUN
ap-5383	38	11	)	)	PUNCT
ap-5383	38	12	=	=	SYM
ap-5383	38	13	ρ0(∆z	ρ0(∆z	ADJ
ap-5383	38	14	)	)	PUNCT
ap-5383	38	15	·	·	PUNCT
ap-5383	39	1	e−	e−	NUM
ap-5383	39	2	r2	r2	PROPN
ap-5383	39	3	σ2	σ2	PROPN
ap-5383	39	4	,	,	PUNCT
ap-5383	39	5	where	where	SCONJ
ap-5383	39	6	σ	σ	PROPN
ap-5383	39	7	is	be	AUX
ap-5383	39	8	the	the	DET
ap-5383	39	9	standard	standard	ADJ
ap-5383	39	10	deviation	deviation	NOUN
ap-5383	39	11	of	of	ADP
ap-5383	39	12	gaussian	gaussian	ADJ
ap-5383	39	13	function	function	NOUN
ap-5383	39	14	,	,	PUNCT
ap-5383	39	15	we	we	PRON
ap-5383	39	16	get	get	VERB
ap-5383	39	17	transmittance	transmittance	NOUN
ap-5383	39	18	:	:	PUNCT
ap-5383	39	19	tg(x,∆z	tg(x,∆z	NUM
ap-5383	39	20	)	)	PUNCT
ap-5383	40	1	=	=	SYM
ap-5383	40	2	e	e	NOUN
ap-5383	40	3	−µ	−µ	ADJ
ap-5383	40	4	∫∞	∫∞	NOUN
ap-5383	40	5	−∞	−∞	ADP
ap-5383	40	6	ρ0(∆z)·e−	ρ0(∆z)·e−	NOUN
ap-5383	40	7	(	(	PUNCT
ap-5383	40	8	x2+y2	x2+y2	NOUN
ap-5383	40	9	)	)	PUNCT
ap-5383	40	10	σ2	σ2	NOUN
ap-5383	40	11	dy	dy	NOUN
ap-5383	40	12	.	.	PUNCT
ap-5383	41	1	(	(	PUNCT
ap-5383	41	2	3	3	X
ap-5383	41	3	)	)	PUNCT
ap-5383	41	4	after	after	ADP
ap-5383	41	5	integration	integration	NOUN
ap-5383	41	6	,	,	PUNCT
ap-5383	41	7	we	we	PRON
ap-5383	41	8	found	find	VERB
ap-5383	41	9	the	the	DET
ap-5383	41	10	transmittance	transmittance	NOUN
ap-5383	41	11	function	function	NOUN
ap-5383	41	12	tg(x,∆z	tg(x,∆z	NUM
ap-5383	41	13	)	)	PUNCT
ap-5383	41	14	=	=	PUNCT
ap-5383	42	1	e−µρ0(∆z)e−	e−µρ0(∆z)e−	PROPN
ap-5383	42	2	x2	x2	PROPN
ap-5383	42	3	σ2	σ2	PROPN
ap-5383	42	4	σ	σ	PROPN
ap-5383	42	5	√	√	PROPN
ap-5383	42	6	π	π	PROPN
ap-5383	42	7	.	.	PUNCT
ap-5383	43	1	(	(	PUNCT
ap-5383	43	2	4	4	X
ap-5383	43	3	)	)	PUNCT
ap-5383	43	4	the	the	DET
ap-5383	43	5	transmittance	transmittance	NOUN
ap-5383	43	6	at	at	ADP
ap-5383	43	7	the	the	DET
ap-5383	43	8	target	target	NOUN
ap-5383	43	9	axis	axis	NOUN
ap-5383	43	10	(	(	PUNCT
ap-5383	43	11	for	for	ADP
ap-5383	43	12	x	x	SYM
ap-5383	43	13	=	=	SYM
ap-5383	43	14	0	0	NUM
ap-5383	43	15	)	)	PUNCT
ap-5383	43	16	allows	allow	VERB
ap-5383	43	17	us	we	PRON
ap-5383	43	18	to	to	PART
ap-5383	43	19	state	state	VERB
ap-5383	43	20	the	the	DET
ap-5383	43	21	gas	gas	NOUN
ap-5383	43	22	mass	mass	NOUN
ap-5383	43	23	density	density	NOUN
ap-5383	43	24	on	on	ADP
ap-5383	43	25	the	the	DET
ap-5383	43	26	axis	axis	NOUN
ap-5383	43	27	ρ0(∆z	ρ0(∆z	ADJ
ap-5383	43	28	)	)	PUNCT
ap-5383	44	1	=	=	SYM
ap-5383	44	2	−1	−1	NOUN
ap-5383	44	3	µ	µ	X
ap-5383	44	4	·	·	PUNCT
ap-5383	44	5	σ	σ	PROPN
ap-5383	44	6	·	·	PUNCT
ap-5383	44	7	√	√	NUM
ap-5383	44	8	π	π	PROPN
ap-5383	44	9	lntg(0,∆z	lntg(0,∆z	PROPN
ap-5383	44	10	)	)	PUNCT
ap-5383	44	11	,	,	PUNCT
ap-5383	44	12	(	(	PUNCT
ap-5383	44	13	5	5	X
ap-5383	44	14	)	)	PUNCT
ap-5383	44	15	if	if	SCONJ
ap-5383	44	16	the	the	DET
ap-5383	44	17	standard	standard	ADJ
ap-5383	44	18	deviation	deviation	NOUN
ap-5383	44	19	σ	σ	NOUN
ap-5383	44	20	is	be	AUX
ap-5383	44	21	determined	determine	VERB
ap-5383	44	22	from	from	ADP
ap-5383	44	23	the	the	DET
ap-5383	44	24	solution	solution	NOUN
ap-5383	44	25	of	of	ADP
ap-5383	44	26	the	the	DET
ap-5383	44	27	transcendent	transcendent	ADJ
ap-5383	44	28	equation	equation	NOUN
ap-5383	44	29	lntg(σ,∆z	lntg(σ,∆z	PROPN
ap-5383	44	30	)	)	PUNCT
ap-5383	44	31	lntg(0,∆z	lntg(0,∆z	PROPN
ap-5383	44	32	)	)	PUNCT
ap-5383	44	33	=	=	SYM
ap-5383	45	1	e−1	e−1	PROPN
ap-5383	45	2	.	.	PUNCT
ap-5383	46	1	(	(	PUNCT
ap-5383	46	2	6	6	NUM
ap-5383	46	3	)	)	SYM
ap-5383	46	4	4	4	NUM
ap-5383	46	5	.	.	PUNCT
ap-5383	46	6	experimental	experimental	ADJ
ap-5383	46	7	arrangement	arrangement	NOUN
ap-5383	46	8	our	our	PRON
ap-5383	46	9	scheme	scheme	NOUN
ap-5383	46	10	of	of	ADP
ap-5383	46	11	the	the	DET
ap-5383	46	12	radiography	radiography	NOUN
ap-5383	46	13	experiment	experiment	NOUN
ap-5383	46	14	can	can	AUX
ap-5383	46	15	be	be	AUX
ap-5383	46	16	seen	see	VERB
ap-5383	46	17	in	in	ADP
ap-5383	46	18	fig	fig	NOUN
ap-5383	46	19	.	.	PUNCT
ap-5383	47	1	2	2	X
ap-5383	47	2	.	.	X
ap-5383	47	3	the	the	DET
ap-5383	47	4	investigated	investigate	VERB
ap-5383	47	5	gas	gas	NOUN
ap-5383	47	6	-	-	PUNCT
ap-5383	47	7	puff	puff	NOUN
ap-5383	47	8	target	target	NOUN
ap-5383	47	9	was	be	AUX
ap-5383	47	10	located	locate	VERB
ap-5383	47	11	640	640	NUM
ap-5383	47	12	mm	mm	NOUN
ap-5383	47	13	away	away	ADV
ap-5383	47	14	from	from	ADP
ap-5383	47	15	the	the	DET
ap-5383	47	16	laser	laser	NOUN
ap-5383	47	17	-	-	PUNCT
ap-5383	47	18	plasma	plasma	NOUN
ap-5383	47	19	source	source	NOUN
ap-5383	47	20	and	and	CCONJ
ap-5383	47	21	155	155	NUM
ap-5383	47	22	mm	mm	NOUN
ap-5383	47	23	from	from	ADP
ap-5383	47	24	the	the	DET
ap-5383	47	25	ccd	ccd	NOUN
ap-5383	47	26	detector	detector	NOUN
ap-5383	47	27	,	,	PUNCT
ap-5383	47	28	all	all	PRON
ap-5383	47	29	of	of	ADP
ap-5383	47	30	them	they	PRON
ap-5383	47	31	placed	place	VERB
ap-5383	47	32	inside	inside	ADP
ap-5383	47	33	a	a	DET
ap-5383	47	34	vacuum	vacuum	NOUN
ap-5383	47	35	chamber	chamber	NOUN
ap-5383	47	36	.	.	PUNCT
ap-5383	48	1	the	the	DET
ap-5383	48	2	source	source	NOUN
ap-5383	48	3	of	of	ADP
ap-5383	48	4	radiation	radiation	NOUN
ap-5383	48	5	was	be	AUX
ap-5383	48	6	laser	laser	NOUN
ap-5383	48	7	-	-	PUNCT
ap-5383	48	8	plasma	plasma	NOUN
ap-5383	48	9	created	create	VERB
ap-5383	48	10	by	by	ADP
ap-5383	48	11	nd	nd	PRON
ap-5383	48	12	:	:	PUNCT
ap-5383	48	13	yag	yag	NOUN
ap-5383	48	14	laser	laser	NOUN
ap-5383	48	15	(	(	PUNCT
ap-5383	48	16	λ	λ	X
ap-5383	48	17	=	=	SYM
ap-5383	48	18	1064	1064	NUM
ap-5383	48	19	nm	nm	NOUN
ap-5383	48	20	,	,	PUNCT
ap-5383	48	21	e	e	X
ap-5383	48	22	=	=	SYM
ap-5383	48	23	450mj	450mj	PROPN
ap-5383	48	24	)	)	PUNCT
ap-5383	48	25	in	in	ADP
ap-5383	48	26	n	n	CCONJ
ap-5383	48	27	/	/	SYM
ap-5383	48	28	he	he	PRON
ap-5383	48	29	figure	figure	VERB
ap-5383	48	30	2	2	NUM
ap-5383	48	31	.	.	PUNCT
ap-5383	48	32	principle	principle	ADJ
ap-5383	48	33	scheme	scheme	NOUN
ap-5383	48	34	of	of	ADP
ap-5383	48	35	the	the	DET
ap-5383	48	36	radiography	radiography	NOUN
ap-5383	48	37	experiment	experiment	NOUN
ap-5383	48	38	.	.	PUNCT
ap-5383	49	1	double	double	ADJ
ap-5383	49	2	gas	gas	NOUN
ap-5383	49	3	-	-	PUNCT
ap-5383	49	4	puff	puff	NOUN
ap-5383	49	5	,	,	PUNCT
ap-5383	49	6	then	then	ADV
ap-5383	49	7	transmitted	transmit	VERB
ap-5383	49	8	through	through	ADP
ap-5383	49	9	a	a	DET
ap-5383	49	10	set	set	NOUN
ap-5383	49	11	of	of	ADP
ap-5383	49	12	self	self	NOUN
ap-5383	49	13	-	-	PUNCT
ap-5383	49	14	standing	stand	VERB
ap-5383	49	15	x	x	NOUN
ap-5383	49	16	-	-	NOUN
ap-5383	49	17	ray	ray	NOUN
ap-5383	49	18	filters	filter	NOUN
ap-5383	49	19	composed	compose	VERB
ap-5383	49	20	from	from	ADP
ap-5383	49	21	20	20	NUM
ap-5383	49	22	mm	mm	PROPN
ap-5383	49	23	thick	thick	ADJ
ap-5383	49	24	si	si	NOUN
ap-5383	49	25	and	and	CCONJ
ap-5383	49	26	10	10	NUM
ap-5383	49	27	mm	mm	PROPN
ap-5383	49	28	thick	thick	ADJ
ap-5383	49	29	be	be	AUX
ap-5383	49	30	foils	foil	NOUN
ap-5383	49	31	to	to	PART
ap-5383	49	32	get	get	VERB
ap-5383	49	33	the	the	DET
ap-5383	49	34	wavelength	wavelength	NOUN
ap-5383	49	35	of	of	ADP
ap-5383	49	36	13	13	NUM
ap-5383	49	37	nm	nm	NOUN
ap-5383	50	1	[	[	X
ap-5383	50	2	13	13	NUM
ap-5383	50	3	]	]	PUNCT
ap-5383	50	4	.	.	PUNCT
ap-5383	51	1	the	the	DET
ap-5383	51	2	ccd	ccd	PROPN
ap-5383	51	3	camera	camera	NOUN
ap-5383	51	4	used	use	VERB
ap-5383	51	5	was	be	AUX
ap-5383	51	6	m25	m25	NUM
ap-5383	51	7	x	x	ADJ
ap-5383	51	8	-	-	ADJ
ap-5383	51	9	vision	vision	ADJ
ap-5383	51	10	rigaku	rigaku	NOUN
ap-5383	51	11	,	,	PUNCT
ap-5383	51	12	512×512	512×512	NUM
ap-5383	51	13	square	square	ADJ
ap-5383	51	14	pixels	pixel	NOUN
ap-5383	51	15	(	(	PUNCT
ap-5383	51	16	24	24	NUM
ap-5383	51	17	µm	µm	NOUN
ap-5383	51	18	)	)	PUNCT
ap-5383	51	19	,	,	PUNCT
ap-5383	51	20	cooled	cool	VERB
ap-5383	51	21	by	by	ADP
ap-5383	51	22	the	the	DET
ap-5383	51	23	peltier	peltier	NOUN
ap-5383	51	24	element	element	NOUN
ap-5383	51	25	.	.	PUNCT
ap-5383	52	1	the	the	DET
ap-5383	52	2	method	method	NOUN
ap-5383	52	3	was	be	AUX
ap-5383	52	4	described	describe	VERB
ap-5383	52	5	in	in	ADP
ap-5383	52	6	[	[	X
ap-5383	52	7	13	13	NUM
ap-5383	52	8	]	]	SYM
ap-5383	52	9	.	.	PUNCT
ap-5383	53	1	5	5	X
ap-5383	53	2	.	.	X
ap-5383	53	3	results	result	NOUN
ap-5383	53	4	of	of	ADP
ap-5383	53	5	experiments	experiment	NOUN
ap-5383	53	6	5.1	5.1	NUM
ap-5383	53	7	.	.	PUNCT
ap-5383	54	1	results	result	NOUN
ap-5383	54	2	obtained	obtain	VERB
ap-5383	54	3	with	with	ADP
ap-5383	54	4	nitrogen	nitrogen	NOUN
ap-5383	54	5	the	the	DET
ap-5383	54	6	spatial	spatial	ADJ
ap-5383	54	7	distribution	distribution	NOUN
ap-5383	54	8	of	of	ADP
ap-5383	54	9	the	the	DET
ap-5383	54	10	energy	energy	NOUN
ap-5383	54	11	of	of	ADP
ap-5383	54	12	monochromatic	monochromatic	ADJ
ap-5383	54	13	radiation	radiation	NOUN
ap-5383	54	14	transmitted	transmit	VERB
ap-5383	54	15	through	through	ADP
ap-5383	54	16	our	our	PRON
ap-5383	54	17	nitrogen	nitrogen	NOUN
ap-5383	54	18	gaspuff	gaspuff	NOUN
ap-5383	54	19	target	target	NOUN
ap-5383	54	20	in	in	ADP
ap-5383	54	21	the	the	DET
ap-5383	54	22	proximity	proximity	NOUN
ap-5383	54	23	exposure	exposure	NOUN
ap-5383	54	24	is	be	AUX
ap-5383	54	25	shown	show	VERB
ap-5383	54	26	in	in	ADP
ap-5383	54	27	fig	fig	NOUN
ap-5383	54	28	.	.	PUNCT
ap-5383	55	1	3	3	X
ap-5383	55	2	.	.	X
ap-5383	55	3	this	this	DET
ap-5383	55	4	radiography	radiography	NOUN
ap-5383	55	5	was	be	AUX
ap-5383	55	6	taken	take	VERB
ap-5383	55	7	at	at	ADP
ap-5383	55	8	a	a	DET
ap-5383	55	9	time	time	NOUN
ap-5383	55	10	delay	delay	NOUN
ap-5383	55	11	∆t	∆t	PROPN
ap-5383	55	12	,	,	PUNCT
ap-5383	55	13	which	which	PRON
ap-5383	55	14	corresponds	correspond	VERB
ap-5383	55	15	to	to	ADP
ap-5383	55	16	the	the	DET
ap-5383	55	17	time	time	NOUN
ap-5383	55	18	difference	difference	NOUN
ap-5383	55	19	between	between	ADP
ap-5383	55	20	opening	open	VERB
ap-5383	55	21	the	the	DET
ap-5383	55	22	valve	valve	NOUN
ap-5383	55	23	(	(	PUNCT
ap-5383	55	24	the	the	DET
ap-5383	55	25	moment	moment	NOUN
ap-5383	55	26	of	of	ADP
ap-5383	55	27	filling	fill	VERB
ap-5383	55	28	the	the	DET
ap-5383	55	29	reservoir	reservoir	NOUN
ap-5383	55	30	)	)	PUNCT
ap-5383	55	31	and	and	CCONJ
ap-5383	55	32	the	the	DET
ap-5383	55	33	time	time	NOUN
ap-5383	55	34	of	of	ADP
ap-5383	55	35	exposure	exposure	NOUN
ap-5383	55	36	,	,	PUNCT
ap-5383	55	37	which	which	PRON
ap-5383	55	38	coincides	coincide	VERB
ap-5383	55	39	with	with	ADP
ap-5383	55	40	the	the	DET
ap-5383	55	41	time	time	NOUN
ap-5383	55	42	of	of	ADP
ap-5383	55	43	plasma	plasma	NOUN
ap-5383	55	44	source	source	NOUN
ap-5383	55	45	emission	emission	NOUN
ap-5383	55	46	,	,	PUNCT
ap-5383	55	47	given	give	VERB
ap-5383	55	48	by	by	ADP
ap-5383	55	49	nd	nd	PRON
ap-5383	55	50	:	:	PUNCT
ap-5383	55	51	yag	yag	NOUN
ap-5383	55	52	laser	laser	NOUN
ap-5383	55	53	shot	shoot	VERB
ap-5383	55	54	.	.	PUNCT
ap-5383	56	1	the	the	DET
ap-5383	56	2	gas	gas	NOUN
ap-5383	56	3	-	-	PUNCT
ap-5383	56	4	puff	puff	NOUN
ap-5383	56	5	targets	target	NOUN
ap-5383	56	6	were	be	AUX
ap-5383	56	7	backlit	backlit	VERB
ap-5383	56	8	with	with	ADP
ap-5383	56	9	euv	euv	PRON
ap-5383	56	10	radiation	radiation	NOUN
ap-5383	56	11	.	.	PUNCT
ap-5383	57	1	we	we	PRON
ap-5383	57	2	get	get	VERB
ap-5383	57	3	the	the	DET
ap-5383	57	4	shadowgraph	shadowgraph	NOUN
ap-5383	57	5	that	that	PRON
ap-5383	57	6	was	be	AUX
ap-5383	57	7	discoloured	discolour	VERB
ap-5383	57	8	for	for	ADP
ap-5383	57	9	better	well	ADJ
ap-5383	57	10	viewing	viewing	NOUN
ap-5383	57	11	.	.	PUNCT
ap-5383	58	1	the	the	DET
ap-5383	58	2	logarithm	logarithm	NOUN
ap-5383	58	3	of	of	ADP
ap-5383	58	4	the	the	DET
ap-5383	58	5	object	object	NOUN
ap-5383	58	6	transmittance	transmittance	NOUN
ap-5383	58	7	t	t	NOUN
ap-5383	58	8	at	at	ADP
ap-5383	58	9	the	the	DET
ap-5383	58	10	distance	distance	NOUN
ap-5383	58	11	∆z	∆z	NOUN
ap-5383	58	12	=	=	SYM
ap-5383	58	13	0.5	0.5	NUM
ap-5383	58	14	mm	mm	NOUN
ap-5383	58	15	from	from	ADP
ap-5383	58	16	the	the	DET
ap-5383	58	17	nozzle	nozzle	NOUN
ap-5383	58	18	aperture	aperture	NOUN
ap-5383	58	19	,	,	PUNCT
ap-5383	58	20	evaluated	evaluate	VERB
ap-5383	58	21	from	from	ADP
ap-5383	58	22	the	the	DET
ap-5383	58	23	digital	digital	ADJ
ap-5383	58	24	record	record	NOUN
ap-5383	58	25	of	of	ADP
ap-5383	58	26	the	the	DET
ap-5383	58	27	radiograph	radiograph	NOUN
ap-5383	58	28	along	along	ADP
ap-5383	58	29	the	the	DET
ap-5383	58	30	coordinate	coordinate	NOUN
ap-5383	58	31	x	x	PUNCT
ap-5383	58	32	is	be	AUX
ap-5383	58	33	shown	show	VERB
ap-5383	58	34	in	in	ADP
ap-5383	58	35	fig	fig	NOUN
ap-5383	58	36	.	.	PUNCT
ap-5383	59	1	3b	3b	NUM
ap-5383	59	2	.	.	PUNCT
ap-5383	60	1	the	the	DET
ap-5383	60	2	measured	measured	ADJ
ap-5383	60	3	values	value	NOUN
ap-5383	60	4	were	be	AUX
ap-5383	60	5	taken	take	VERB
ap-5383	60	6	as	as	ADP
ap-5383	60	7	the	the	DET
ap-5383	60	8	average	average	NOUN
ap-5383	60	9	of	of	ADP
ap-5383	60	10	the	the	DET
ap-5383	60	11	results	result	NOUN
ap-5383	60	12	of	of	ADP
ap-5383	60	13	5	5	NUM
ap-5383	60	14	rows	row	NOUN
ap-5383	60	15	and	and	CCONJ
ap-5383	60	16	5	5	NUM
ap-5383	60	17	shots	shot	NOUN
ap-5383	60	18	.	.	PUNCT
ap-5383	61	1	the	the	DET
ap-5383	61	2	recorded	record	VERB
ap-5383	61	3	curve	curve	NOUN
ap-5383	61	4	may	may	AUX
ap-5383	61	5	be	be	AUX
ap-5383	61	6	well	well	ADV
ap-5383	61	7	fitted	fit	VERB
ap-5383	61	8	by	by	ADP
ap-5383	61	9	the	the	DET
ap-5383	61	10	gaussian	gaussian	ADJ
ap-5383	61	11	curve	curve	NOUN
ap-5383	61	12	and	and	CCONJ
ap-5383	61	13	allows	allow	VERB
ap-5383	61	14	us	we	PRON
ap-5383	61	15	to	to	PART
ap-5383	61	16	state	state	VERB
ap-5383	61	17	the	the	DET
ap-5383	61	18	standard	standard	ADJ
ap-5383	61	19	deviation	deviation	NOUN
ap-5383	61	20	of	of	ADP
ap-5383	61	21	gaussian	gaussian	ADJ
ap-5383	61	22	distribution	distribution	NOUN
ap-5383	61	23	σ	σ	NOUN
ap-5383	61	24	=	=	SYM
ap-5383	61	25	436	436	NUM
ap-5383	61	26	µm	µm	NOUN
ap-5383	61	27	.	.	PUNCT
ap-5383	62	1	if	if	SCONJ
ap-5383	62	2	we	we	PRON
ap-5383	62	3	also	also	ADV
ap-5383	62	4	take	take	VERB
ap-5383	62	5	into	into	ADP
ap-5383	62	6	account	account	NOUN
ap-5383	62	7	the	the	DET
ap-5383	62	8	photo	photo	NOUN
ap-5383	62	9	-	-	PUNCT
ap-5383	62	10	absorption	absorption	NOUN
ap-5383	62	11	coefficient	coefficient	NOUN
ap-5383	62	12	µ	µ	X
ap-5383	62	13	=	=	SYM
ap-5383	62	14	5.3176	5.3176	NUM
ap-5383	62	15	·	·	PUNCT
ap-5383	62	16	104	104	NUM
ap-5383	62	17	cm2	cm2	NOUN
ap-5383	62	18	/	/	SYM
ap-5383	62	19	g	g	NOUN
ap-5383	62	20	for	for	ADP
ap-5383	62	21	the	the	DET
ap-5383	62	22	wavelength	wavelength	NOUN
ap-5383	62	23	13.4	13.4	NUM
ap-5383	62	24	nm	nm	NOUN
ap-5383	62	25	[	[	X
ap-5383	62	26	14	14	NUM
ap-5383	62	27	]	]	PUNCT
ap-5383	62	28	we	we	PRON
ap-5383	62	29	can	can	AUX
ap-5383	62	30	evaluate	evaluate	VERB
ap-5383	62	31	the	the	DET
ap-5383	62	32	gas	gas	NOUN
ap-5383	62	33	density	density	NOUN
ap-5383	62	34	on	on	ADP
ap-5383	62	35	the	the	DET
ap-5383	62	36	axis	axis	NOUN
ap-5383	62	37	as	as	ADP
ap-5383	62	38	ρ0(∆z	ρ0(∆z	ADJ
ap-5383	62	39	)	)	PUNCT
ap-5383	62	40	=	=	SYM
ap-5383	62	41	4.49	4.49	NUM
ap-5383	62	42	·	·	SYM
ap-5383	62	43	10−4	10−4	NUM
ap-5383	62	44	g·cm−3	g·cm−3	NOUN
ap-5383	62	45	.	.	PUNCT
ap-5383	63	1	5.2	5.2	NUM
ap-5383	63	2	.	.	PUNCT
ap-5383	63	3	results	result	NOUN
ap-5383	63	4	obtained	obtain	VERB
ap-5383	63	5	with	with	ADP
ap-5383	63	6	argon	argon	NOUN
ap-5383	63	7	and	and	CCONJ
ap-5383	63	8	krypton	krypton	PROPN
ap-5383	63	9	the	the	DET
ap-5383	63	10	method	method	NOUN
ap-5383	63	11	can	can	AUX
ap-5383	63	12	be	be	AUX
ap-5383	63	13	used	use	VERB
ap-5383	63	14	to	to	PART
ap-5383	63	15	experimentally	experimentally	ADV
ap-5383	63	16	determine	determine	VERB
ap-5383	63	17	the	the	DET
ap-5383	63	18	mass	mass	ADJ
ap-5383	63	19	density	density	NOUN
ap-5383	63	20	space	space	NOUN
ap-5383	63	21	distribution	distribution	NOUN
ap-5383	63	22	of	of	ADP
ap-5383	63	23	any	any	DET
ap-5383	63	24	gas	gas	NOUN
ap-5383	63	25	emerging	emerge	VERB
ap-5383	63	26	from	from	ADP
ap-5383	63	27	the	the	DET
ap-5383	63	28	nozzle	nozzle	NOUN
ap-5383	63	29	.	.	PUNCT
ap-5383	64	1	we	we	PRON
ap-5383	64	2	have	have	AUX
ap-5383	64	3	performed	perform	VERB
ap-5383	64	4	the	the	DET
ap-5383	64	5	measurements	measurement	NOUN
ap-5383	64	6	with	with	ADP
ap-5383	64	7	argon	argon	NOUN
ap-5383	64	8	and	and	CCONJ
ap-5383	64	9	krypton	krypton	PROPN
ap-5383	64	10	passing	pass	VERB
ap-5383	64	11	through	through	ADP
ap-5383	64	12	the	the	DET
ap-5383	64	13	same	same	ADJ
ap-5383	64	14	nozzle	nozzle	NOUN
ap-5383	64	15	as	as	SCONJ
ap-5383	64	16	shown	show	VERB
ap-5383	64	17	in	in	ADP
ap-5383	64	18	fig	fig	NOUN
ap-5383	64	19	.	.	PUNCT
ap-5383	65	1	4	4	X
ap-5383	65	2	.	.	X
ap-5383	65	3	a	a	DET
ap-5383	65	4	comparison	comparison	NOUN
ap-5383	65	5	of	of	ADP
ap-5383	65	6	basic	basic	ADJ
ap-5383	65	7	target	target	NOUN
ap-5383	65	8	parameters	parameter	NOUN
ap-5383	65	9	and	and	CCONJ
ap-5383	65	10	their	their	PRON
ap-5383	65	11	comparison	comparison	NOUN
ap-5383	65	12	with	with	ADP
ap-5383	65	13	nitrogen	nitrogen	NOUN
ap-5383	65	14	-	-	PUNCT
ap-5383	65	15	target	target	NOUN
ap-5383	65	16	ones	one	NOUN
ap-5383	65	17	can	can	AUX
ap-5383	65	18	be	be	AUX
ap-5383	65	19	seen	see	VERB
ap-5383	65	20	in	in	ADP
ap-5383	65	21	table	table	NOUN
ap-5383	65	22	1	1	NUM
ap-5383	65	23	.	.	NOUN
ap-5383	65	24	588	588	NUM
ap-5383	65	25	vol	vol	NOUN
ap-5383	65	26	.	.	PUNCT
ap-5383	66	1	59	59	NUM
ap-5383	66	2	no	no	NOUN
ap-5383	66	3	.	.	PUNCT
ap-5383	67	1	6/2019	6/2019	NUM
ap-5383	67	2	gas	gas	NOUN
ap-5383	67	3	-	-	PUNCT
ap-5383	67	4	puff	puff	NOUN
ap-5383	67	5	target	target	NOUN
ap-5383	67	6	for	for	ADP
ap-5383	67	7	laser	laser	NOUN
ap-5383	67	8	-	-	PUNCT
ap-5383	67	9	producing	produce	VERB
ap-5383	67	10	plasma	plasma	NOUN
ap-5383	67	11	sxr	sxr	PROPN
ap-5383	67	12	source	source	NOUN
ap-5383	67	13	(	(	PUNCT
ap-5383	67	14	a	a	NOUN
ap-5383	67	15	)	)	PUNCT
ap-5383	67	16	.	.	PUNCT
ap-5383	68	1	(	(	PUNCT
ap-5383	68	2	b	b	X
ap-5383	68	3	)	)	PUNCT
ap-5383	68	4	.	.	PUNCT
ap-5383	69	1	figure	figure	VERB
ap-5383	69	2	3	3	NUM
ap-5383	69	3	.	.	PUNCT
ap-5383	70	1	(	(	PUNCT
ap-5383	70	2	a	a	X
ap-5383	70	3	)	)	PUNCT
ap-5383	70	4	radiograph	radiograph	NOUN
ap-5383	70	5	for	for	ADP
ap-5383	70	6	nitrogen	nitrogen	NOUN
ap-5383	70	7	target	target	NOUN
ap-5383	70	8	;	;	PUNCT
ap-5383	70	9	reservoir	reservoir	NOUN
ap-5383	70	10	pressure	pressure	NOUN
ap-5383	70	11	p0	p0	NOUN
ap-5383	70	12	=	=	SYM
ap-5383	70	13	10	10	NUM
ap-5383	70	14	bar	bar	NOUN
ap-5383	70	15	,	,	PUNCT
ap-5383	70	16	exposure	exposure	NOUN
ap-5383	70	17	time	time	NOUN
ap-5383	70	18	delay	delay	NOUN
ap-5383	70	19	∆t	∆t	PROPN
ap-5383	70	20	=	=	SYM
ap-5383	70	21	900µs	900µs	PROPN
ap-5383	70	22	.	.	PUNCT
ap-5383	71	1	(	(	PUNCT
ap-5383	71	2	b	b	X
ap-5383	71	3	)	)	PUNCT
ap-5383	71	4	logarithm	logarithm	NOUN
ap-5383	71	5	of	of	ADP
ap-5383	71	6	nitrogen	nitrogen	NOUN
ap-5383	71	7	target	target	NOUN
ap-5383	71	8	transmittance	transmittance	NOUN
ap-5383	71	9	at	at	ADP
ap-5383	71	10	the	the	DET
ap-5383	71	11	distance	distance	NOUN
ap-5383	71	12	∆z	∆z	NOUN
ap-5383	71	13	=	=	SYM
ap-5383	71	14	0.5	0.5	NUM
ap-5383	71	15	mm	mm	NOUN
ap-5383	71	16	from	from	ADP
ap-5383	71	17	the	the	DET
ap-5383	71	18	nozzle	nozzle	NOUN
ap-5383	71	19	;	;	PUNCT
ap-5383	71	20	the	the	DET
ap-5383	71	21	red	red	ADJ
ap-5383	71	22	line	line	NOUN
ap-5383	71	23	is	be	AUX
ap-5383	71	24	the	the	DET
ap-5383	71	25	gaussian	gaussian	ADJ
ap-5383	71	26	fit	fit	NOUN
ap-5383	71	27	.	.	PUNCT
ap-5383	72	1	(	(	PUNCT
ap-5383	72	2	a	a	NOUN
ap-5383	72	3	)	)	PUNCT
ap-5383	72	4	.	.	PUNCT
ap-5383	73	1	(	(	PUNCT
ap-5383	73	2	b	b	X
ap-5383	73	3	)	)	PUNCT
ap-5383	73	4	.	.	PUNCT
ap-5383	74	1	figure	figure	VERB
ap-5383	74	2	4	4	NUM
ap-5383	74	3	.	.	PUNCT
ap-5383	75	1	the	the	DET
ap-5383	75	2	profiles	profile	NOUN
ap-5383	75	3	of	of	ADP
ap-5383	75	4	logarithm	logarithm	NOUN
ap-5383	75	5	of	of	ADP
ap-5383	75	6	transmission	transmission	NOUN
ap-5383	75	7	for	for	ADP
ap-5383	75	8	argon	argon	NOUN
ap-5383	75	9	(	(	PUNCT
ap-5383	75	10	a	a	NOUN
ap-5383	75	11	)	)	PUNCT
ap-5383	75	12	and	and	CCONJ
ap-5383	75	13	krypton	krypton	PROPN
ap-5383	75	14	(	(	PUNCT
ap-5383	75	15	b	b	NOUN
ap-5383	75	16	)	)	PUNCT
ap-5383	75	17	at	at	ADP
ap-5383	75	18	distance	distance	NOUN
ap-5383	75	19	∆z	∆z	NOUN
ap-5383	75	20	=	=	SYM
ap-5383	75	21	0.5	0.5	NUM
ap-5383	75	22	mm	mm	NOUN
ap-5383	75	23	,	,	PUNCT
ap-5383	75	24	p	p	NOUN
ap-5383	75	25	=	=	SYM
ap-5383	75	26	10	10	NUM
ap-5383	75	27	bar	bar	NOUN
ap-5383	75	28	and	and	CCONJ
ap-5383	75	29	exposure	exposure	NOUN
ap-5383	75	30	time	time	NOUN
ap-5383	75	31	delay	delay	NOUN
ap-5383	75	32	∆t	∆t	PROPN
ap-5383	75	33	=	=	SYM
ap-5383	75	34	900µs	900µs	NOUN
ap-5383	75	35	.	.	PUNCT
ap-5383	76	1	gas	gas	NOUN
ap-5383	76	2	atomic	atomic	ADJ
ap-5383	76	3	number	number	NOUN
ap-5383	76	4	absorption	absorption	NOUN
ap-5383	76	5	coefficient	coefficient	NOUN
ap-5383	76	6	mass	mass	ADJ
ap-5383	76	7	density	density	NOUN
ap-5383	76	8	radial	radial	ADJ
ap-5383	76	9	dimension	dimension	NOUN
ap-5383	76	10	µ	µ	X
ap-5383	76	11	[	[	PUNCT
ap-5383	76	12	cm2	cm2	NOUN
ap-5383	76	13	/	/	SYM
ap-5383	76	14	g	g	NOUN
ap-5383	76	15	]	]	PUNCT
ap-5383	76	16	ρ	ρ	NOUN
ap-5383	77	1	[	[	X
ap-5383	77	2	g	g	X
ap-5383	77	3	/	/	SYM
ap-5383	77	4	cm3	cm3	NOUN
ap-5383	77	5	]	]	PUNCT
ap-5383	77	6	σ	σ	NOUN
ap-5383	78	1	[	[	X
ap-5383	78	2	µm	µm	X
ap-5383	78	3	]	]	X
ap-5383	78	4	nitrogen	nitrogen	NOUN
ap-5383	78	5	7	7	NUM
ap-5383	78	6	5.3176×104	5.3176×104	PROPN
ap-5383	78	7	4.49×10−4	4.49×10−4	NUM
ap-5383	78	8	436	436	NUM
ap-5383	78	9	argon	argon	NOUN
ap-5383	78	10	18	18	NUM
ap-5383	78	11	2.0823×104	2.0823×104	NOUN
ap-5383	78	12	6.14×10−4	6.14×10−4	NUM
ap-5383	78	13	398	398	NUM
ap-5383	78	14	krypton	krypton	NOUN
ap-5383	78	15	36	36	NUM
ap-5383	78	16	4.7344×104	4.7344×104	NOUN
ap-5383	79	1	7.96×10−4	7.96×10−4	NUM
ap-5383	79	2	427	427	NUM
ap-5383	79	3	table	table	NOUN
ap-5383	79	4	1	1	NUM
ap-5383	79	5	.	.	PUNCT
ap-5383	79	6	gas	gas	NOUN
ap-5383	79	7	-	-	PUNCT
ap-5383	79	8	puff	puff	NOUN
ap-5383	79	9	target	target	NOUN
ap-5383	79	10	parameters	parameter	NOUN
ap-5383	79	11	.	.	PUNCT
ap-5383	80	1	589	589	NUM
ap-5383	80	2	š	š	NOUN
ap-5383	80	3	.	.	PUNCT
ap-5383	81	1	salačová	salačová	PROPN
ap-5383	81	2	,	,	PUNCT
ap-5383	81	3	p.	p.	NOUN
ap-5383	81	4	wachulak	wachulak	NOUN
ap-5383	81	5	,	,	PUNCT
ap-5383	81	6	m.	m.	NOUN
ap-5383	81	7	tatíček	tatíček	PROPN
ap-5383	81	8	,	,	PUNCT
ap-5383	81	9	m.	m.	NOUN
ap-5383	81	10	vrbová	vrbová	PROPN
ap-5383	81	11	acta	acta	PROPN
ap-5383	81	12	polytechnica	polytechnica	PROPN
ap-5383	81	13	(	(	PUNCT
ap-5383	81	14	a	a	NOUN
ap-5383	81	15	)	)	PUNCT
ap-5383	81	16	.	.	PUNCT
ap-5383	82	1	(	(	PUNCT
ap-5383	82	2	b	b	X
ap-5383	82	3	)	)	PUNCT
ap-5383	82	4	.	.	PUNCT
ap-5383	83	1	figure	figure	NOUN
ap-5383	83	2	5	5	NUM
ap-5383	83	3	.	.	PUNCT
ap-5383	84	1	(	(	PUNCT
ap-5383	84	2	a	a	X
ap-5383	84	3	)	)	PUNCT
ap-5383	84	4	shadowgraph	shadowgraph	NOUN
ap-5383	84	5	for	for	ADP
ap-5383	84	6	our	our	PRON
ap-5383	84	7	“	"	PUNCT
ap-5383	84	8	worn	wear	VERB
ap-5383	84	9	-	-	PUNCT
ap-5383	84	10	out	out	ADP
ap-5383	84	11	”	"	PUNCT
ap-5383	84	12	nozzle	nozzle	NOUN
ap-5383	84	13	;	;	PUNCT
ap-5383	84	14	reservoir	reservoir	NOUN
ap-5383	84	15	nitrogen	nitrogen	NOUN
ap-5383	84	16	pressure	pressure	NOUN
ap-5383	84	17	p0	p0	NOUN
ap-5383	84	18	=	=	PUNCT
ap-5383	84	19	10bar	10bar	NOUN
ap-5383	84	20	,	,	PUNCT
ap-5383	84	21	∆t	∆t	PROPN
ap-5383	84	22	=	=	SYM
ap-5383	84	23	900µs	900µ	NOUN
ap-5383	84	24	,	,	PUNCT
ap-5383	84	25	(	(	PUNCT
ap-5383	84	26	b	b	X
ap-5383	84	27	)	)	PUNCT
ap-5383	84	28	logarithm	logarithm	NOUN
ap-5383	84	29	of	of	ADP
ap-5383	84	30	nitrogen	nitrogen	NOUN
ap-5383	84	31	transmittance	transmittance	NOUN
ap-5383	84	32	at	at	ADP
ap-5383	84	33	the	the	DET
ap-5383	84	34	distance	distance	NOUN
ap-5383	84	35	∆z	∆z	NOUN
ap-5383	84	36	=	=	SYM
ap-5383	84	37	0.5	0.5	NUM
ap-5383	84	38	mm	mm	NOUN
ap-5383	84	39	the	the	DET
ap-5383	84	40	red	red	ADJ
ap-5383	84	41	line	line	NOUN
ap-5383	84	42	is	be	AUX
ap-5383	84	43	the	the	DET
ap-5383	84	44	best	good	ADJ
ap-5383	84	45	gaussian	gaussian	ADJ
ap-5383	84	46	fit	fit	NOUN
ap-5383	84	47	.	.	PUNCT
ap-5383	85	1	5.3	5.3	NUM
ap-5383	85	2	.	.	PUNCT
ap-5383	85	3	nozzle	nozzle	NOUN
ap-5383	85	4	ageing	ageing	NOUN
ap-5383	85	5	if	if	SCONJ
ap-5383	85	6	the	the	DET
ap-5383	85	7	nozzle	nozzle	NOUN
ap-5383	85	8	is	be	AUX
ap-5383	85	9	used	use	VERB
ap-5383	85	10	for	for	ADP
ap-5383	85	11	the	the	DET
ap-5383	85	12	sxr	sxr	PROPN
ap-5383	85	13	plasma	plasma	NOUN
ap-5383	85	14	generation	generation	NOUN
ap-5383	85	15	,	,	PUNCT
ap-5383	85	16	it	it	PRON
ap-5383	85	17	is	be	AUX
ap-5383	85	18	slightly	slightly	ADV
ap-5383	85	19	ablated	ablate	VERB
ap-5383	85	20	by	by	ADP
ap-5383	85	21	the	the	DET
ap-5383	85	22	plasma	plasma	NOUN
ap-5383	85	23	created	create	VERB
ap-5383	85	24	in	in	ADP
ap-5383	85	25	its	its	PRON
ap-5383	85	26	proximity	proximity	NOUN
ap-5383	85	27	during	during	ADP
ap-5383	85	28	every	every	DET
ap-5383	85	29	laser	laser	NOUN
ap-5383	85	30	shot	shot	NOUN
ap-5383	85	31	.	.	PUNCT
ap-5383	86	1	the	the	DET
ap-5383	86	2	profile	profile	NOUN
ap-5383	86	3	of	of	ADP
ap-5383	86	4	the	the	DET
ap-5383	86	5	nozzle	nozzle	NOUN
ap-5383	86	6	is	be	AUX
ap-5383	86	7	gradually	gradually	ADV
ap-5383	86	8	changed	change	VERB
ap-5383	86	9	and	and	CCONJ
ap-5383	86	10	spatial	spatial	ADJ
ap-5383	86	11	mass	mass	ADJ
ap-5383	86	12	density	density	NOUN
ap-5383	86	13	distribution	distribution	NOUN
ap-5383	86	14	of	of	ADP
ap-5383	86	15	the	the	DET
ap-5383	86	16	gas	gas	NOUN
ap-5383	86	17	target	target	NOUN
ap-5383	86	18	is	be	AUX
ap-5383	86	19	also	also	ADV
ap-5383	86	20	changed	change	VERB
ap-5383	86	21	.	.	PUNCT
ap-5383	87	1	we	we	PRON
ap-5383	87	2	have	have	AUX
ap-5383	87	3	aimed	aim	VERB
ap-5383	87	4	to	to	PART
ap-5383	87	5	compare	compare	VERB
ap-5383	87	6	the	the	DET
ap-5383	87	7	mass	mass	ADJ
ap-5383	87	8	density	density	NOUN
ap-5383	87	9	for	for	ADP
ap-5383	87	10	a	a	DET
ap-5383	87	11	new	new	ADJ
ap-5383	87	12	nozzle	nozzle	NOUN
ap-5383	87	13	and	and	CCONJ
ap-5383	87	14	“	"	PUNCT
ap-5383	87	15	worn	wear	VERB
ap-5383	87	16	-	-	PUNCT
ap-5383	87	17	out	out	ADP
ap-5383	87	18	”	"	PUNCT
ap-5383	87	19	nozzle	nozzle	NOUN
ap-5383	87	20	.	.	PUNCT
ap-5383	88	1	the	the	DET
ap-5383	88	2	shadowgraph	shadowgraph	NOUN
ap-5383	88	3	,	,	PUNCT
ap-5383	88	4	shown	show	VERB
ap-5383	88	5	as	as	ADP
ap-5383	88	6	fig	fig	NOUN
ap-5383	88	7	.	.	PUNCT
ap-5383	89	1	5a	5a	NUM
ap-5383	89	2	,	,	PUNCT
ap-5383	89	3	was	be	AUX
ap-5383	89	4	recorded	record	VERB
ap-5383	89	5	with	with	ADP
ap-5383	89	6	our	our	PRON
ap-5383	89	7	“	"	PUNCT
ap-5383	89	8	worn	wear	VERB
ap-5383	89	9	-	-	PUNCT
ap-5383	89	10	out	out	ADP
ap-5383	89	11	”	"	PUNCT
ap-5383	89	12	nozzle	nozzle	NOUN
ap-5383	89	13	,	,	PUNCT
ap-5383	89	14	which	which	PRON
ap-5383	89	15	was	be	AUX
ap-5383	89	16	previously	previously	ADV
ap-5383	89	17	used	use	VERB
ap-5383	89	18	in	in	ADP
ap-5383	89	19	the	the	DET
ap-5383	89	20	sxr	sxr	PROPN
ap-5383	89	21	source	source	NOUN
ap-5383	89	22	system	system	NOUN
ap-5383	89	23	for	for	ADP
ap-5383	89	24	several	several	ADJ
ap-5383	89	25	thousand	thousand	NUM
ap-5383	89	26	shots	shot	NOUN
ap-5383	89	27	.	.	PUNCT
ap-5383	90	1	the	the	DET
ap-5383	90	2	fig	fig	NOUN
ap-5383	90	3	.	.	PUNCT
ap-5383	91	1	5b	5b	PROPN
ap-5383	91	2	shows	show	VERB
ap-5383	91	3	the	the	DET
ap-5383	91	4	corresponding	corresponding	ADJ
ap-5383	91	5	spatial	spatial	ADJ
ap-5383	91	6	dependence	dependence	NOUN
ap-5383	91	7	of	of	ADP
ap-5383	91	8	transmittance	transmittance	NOUN
ap-5383	91	9	of	of	ADP
ap-5383	91	10	the	the	DET
ap-5383	91	11	gas	gas	NOUN
ap-5383	91	12	-	-	PUNCT
ap-5383	91	13	puff	puff	NOUN
ap-5383	91	14	target	target	NOUN
ap-5383	91	15	at	at	ADP
ap-5383	91	16	the	the	DET
ap-5383	91	17	distance	distance	NOUN
ap-5383	91	18	∆z	∆z	NOUN
ap-5383	91	19	=	=	SYM
ap-5383	91	20	0.5	0.5	NUM
ap-5383	91	21	mm	mm	NOUN
ap-5383	91	22	from	from	ADP
ap-5383	91	23	this	this	DET
ap-5383	91	24	nozzle	nozzle	NOUN
ap-5383	91	25	.	.	PUNCT
ap-5383	92	1	the	the	DET
ap-5383	92	2	estimated	estimate	VERB
ap-5383	92	3	gas	gas	NOUN
ap-5383	92	4	density	density	NOUN
ap-5383	92	5	on	on	ADP
ap-5383	92	6	the	the	DET
ap-5383	92	7	axis	axis	NOUN
ap-5383	92	8	ρ0(∆z	ρ0(∆z	ADJ
ap-5383	92	9	)	)	PUNCT
ap-5383	93	1	=	=	NOUN
ap-5383	93	2	0.76×	0.76×	NUM
ap-5383	93	3	10−4	10−4	NUM
ap-5383	93	4	g·cm−3	g·cm−3	NOUN
ap-5383	93	5	is	be	AUX
ap-5383	93	6	5	5	NUM
ap-5383	93	7	times	time	NOUN
ap-5383	93	8	lower	low	ADJ
ap-5383	93	9	and	and	CCONJ
ap-5383	93	10	the	the	DET
ap-5383	93	11	gas	gas	NOUN
ap-5383	93	12	jet	jet	NOUN
ap-5383	93	13	is	be	AUX
ap-5383	93	14	significantly	significantly	ADV
ap-5383	93	15	wider	wide	ADJ
ap-5383	93	16	than	than	ADP
ap-5383	93	17	that	that	PRON
ap-5383	93	18	observed	observe	VERB
ap-5383	93	19	with	with	ADP
ap-5383	93	20	our	our	PRON
ap-5383	93	21	new	new	ADJ
ap-5383	93	22	nozzle	nozzle	NOUN
ap-5383	93	23	.	.	PUNCT
ap-5383	94	1	5.4	5.4	NUM
ap-5383	94	2	.	.	PUNCT
ap-5383	94	3	pressure	pressure	NOUN
ap-5383	94	4	dependence	dependence	NOUN
ap-5383	94	5	of	of	ADP
ap-5383	94	6	mass	mass	ADJ
ap-5383	94	7	density	density	NOUN
ap-5383	94	8	the	the	DET
ap-5383	94	9	spatial	spatial	ADJ
ap-5383	94	10	distribution	distribution	NOUN
ap-5383	94	11	of	of	ADP
ap-5383	94	12	the	the	DET
ap-5383	94	13	gas	gas	NOUN
ap-5383	94	14	target	target	NOUN
ap-5383	94	15	mass	mass	NOUN
ap-5383	94	16	density	density	NOUN
ap-5383	94	17	depends	depend	VERB
ap-5383	94	18	also	also	ADV
ap-5383	94	19	on	on	ADP
ap-5383	94	20	the	the	DET
ap-5383	94	21	gas	gas	NOUN
ap-5383	94	22	reservoir	reservoir	NOUN
ap-5383	94	23	pressure	pressure	NOUN
ap-5383	94	24	.	.	PUNCT
ap-5383	95	1	we	we	PRON
ap-5383	95	2	have	have	AUX
ap-5383	95	3	repeated	repeat	VERB
ap-5383	95	4	the	the	DET
ap-5383	95	5	experiments	experiment	NOUN
ap-5383	95	6	with	with	ADP
ap-5383	95	7	nitrogen	nitrogen	NOUN
ap-5383	95	8	for	for	ADP
ap-5383	95	9	various	various	ADJ
ap-5383	95	10	pressures	pressure	NOUN
ap-5383	95	11	p0	p0	NOUN
ap-5383	95	12	and	and	CCONJ
ap-5383	95	13	for	for	ADP
ap-5383	95	14	both	both	CCONJ
ap-5383	95	15	new	new	ADJ
ap-5383	95	16	and	and	CCONJ
ap-5383	95	17	“	"	PUNCT
ap-5383	95	18	worn	wear	VERB
ap-5383	95	19	-	-	PUNCT
ap-5383	95	20	out	out	ADP
ap-5383	95	21	”	"	PUNCT
ap-5383	95	22	nozzles	nozzle	NOUN
ap-5383	95	23	.	.	PUNCT
ap-5383	96	1	the	the	DET
ap-5383	96	2	results	result	NOUN
ap-5383	96	3	can	can	AUX
ap-5383	96	4	be	be	AUX
ap-5383	96	5	seen	see	VERB
ap-5383	96	6	in	in	ADP
ap-5383	96	7	fig	fig	NOUN
ap-5383	96	8	.	.	PUNCT
ap-5383	97	1	6	6	NUM
ap-5383	97	2	.	.	X
ap-5383	97	3	the	the	DET
ap-5383	97	4	“	"	PUNCT
ap-5383	97	5	worn	wear	VERB
ap-5383	97	6	-	-	PUNCT
ap-5383	97	7	out	out	ADP
ap-5383	97	8	”	"	PUNCT
ap-5383	97	9	nozzle	nozzle	NOUN
ap-5383	97	10	provides	provide	VERB
ap-5383	97	11	a	a	DET
ap-5383	97	12	reasonably	reasonably	ADV
ap-5383	97	13	lower	low	ADJ
ap-5383	97	14	peak	peak	NOUN
ap-5383	97	15	value	value	NOUN
ap-5383	97	16	of	of	ADP
ap-5383	97	17	the	the	DET
ap-5383	97	18	nitrogen	nitrogen	NOUN
ap-5383	97	19	density	density	NOUN
ap-5383	97	20	at	at	ADP
ap-5383	97	21	the	the	DET
ap-5383	97	22	same	same	ADJ
ap-5383	97	23	place	place	NOUN
ap-5383	97	24	of	of	ADP
ap-5383	97	25	the	the	DET
ap-5383	97	26	stream	stream	NOUN
ap-5383	97	27	.	.	PUNCT
ap-5383	98	1	for	for	ADP
ap-5383	98	2	a	a	DET
ap-5383	98	3	given	give	VERB
ap-5383	98	4	nozzle	nozzle	NOUN
ap-5383	98	5	profile	profile	NOUN
ap-5383	98	6	,	,	PUNCT
ap-5383	98	7	the	the	DET
ap-5383	98	8	gas	gas	NOUN
ap-5383	98	9	density	density	NOUN
ap-5383	98	10	increases	increase	VERB
ap-5383	98	11	with	with	ADP
ap-5383	98	12	increasing	increase	VERB
ap-5383	98	13	initial	initial	ADJ
ap-5383	98	14	(	(	PUNCT
ap-5383	98	15	reservoir	reservoir	NOUN
ap-5383	98	16	)	)	PUNCT
ap-5383	98	17	pressure	pressure	NOUN
ap-5383	98	18	,	,	PUNCT
ap-5383	98	19	but	but	CCONJ
ap-5383	98	20	saturation	saturation	NOUN
ap-5383	98	21	effect	effect	NOUN
ap-5383	98	22	is	be	AUX
ap-5383	98	23	verified	verify	VERB
ap-5383	98	24	above	above	ADP
ap-5383	98	25	a	a	DET
ap-5383	98	26	certain	certain	ADJ
ap-5383	98	27	pressure	pressure	NOUN
ap-5383	98	28	level	level	NOUN
ap-5383	98	29	.	.	PUNCT
ap-5383	99	1	the	the	DET
ap-5383	99	2	value	value	NOUN
ap-5383	99	3	of	of	ADP
ap-5383	99	4	the	the	DET
ap-5383	99	5	pressure	pressure	NOUN
ap-5383	99	6	saturation	saturation	NOUN
ap-5383	99	7	threshold	threshold	NOUN
ap-5383	99	8	is	be	AUX
ap-5383	99	9	affected	affect	VERB
ap-5383	99	10	by	by	ADP
ap-5383	99	11	the	the	DET
ap-5383	99	12	nozzle	nozzle	NOUN
ap-5383	99	13	geometry	geometry	NOUN
ap-5383	99	14	.	.	PUNCT
ap-5383	100	1	6	6	NUM
ap-5383	100	2	.	.	X
ap-5383	100	3	conclusions	conclusion	NOUN
ap-5383	100	4	the	the	DET
ap-5383	100	5	gas	gas	NOUN
ap-5383	100	6	-	-	PUNCT
ap-5383	100	7	puff	puff	NOUN
ap-5383	100	8	target	target	NOUN
ap-5383	100	9	for	for	ADP
ap-5383	100	10	the	the	DET
ap-5383	100	11	laser	laser	NOUN
ap-5383	100	12	-	-	PUNCT
ap-5383	100	13	producing	produce	VERB
ap-5383	100	14	plasma	plasma	NOUN
ap-5383	100	15	sxr	sxr	PROPN
ap-5383	100	16	source	source	NOUN
ap-5383	100	17	was	be	AUX
ap-5383	100	18	investigated	investigate	VERB
ap-5383	100	19	by	by	ADP
ap-5383	100	20	the	the	DET
ap-5383	100	21	euv	euv	PROPN
ap-5383	100	22	radiography	radiography	NOUN
ap-5383	100	23	.	.	PUNCT
ap-5383	101	1	we	we	PRON
ap-5383	101	2	were	be	AUX
ap-5383	101	3	studying	study	VERB
ap-5383	101	4	the	the	DET
ap-5383	101	5	spatial	spatial	ADJ
ap-5383	101	6	distribution	distribution	NOUN
ap-5383	101	7	of	of	ADP
ap-5383	101	8	the	the	DET
ap-5383	101	9	mass	mass	ADJ
ap-5383	101	10	density	density	NOUN
ap-5383	101	11	in	in	ADP
ap-5383	101	12	the	the	DET
ap-5383	101	13	gas	gas	NOUN
ap-5383	101	14	-	-	PUNCT
ap-5383	101	15	puff	puff	NOUN
ap-5383	101	16	target	target	NOUN
ap-5383	101	17	for	for	ADP
ap-5383	101	18	three	three	NUM
ap-5383	101	19	different	different	ADJ
ap-5383	101	20	gasses	gas	NOUN
ap-5383	101	21	and	and	CCONJ
ap-5383	101	22	also	also	ADV
ap-5383	101	23	the	the	DET
ap-5383	101	24	development	development	NOUN
ap-5383	101	25	of	of	ADP
ap-5383	101	26	the	the	DET
ap-5383	101	27	gas	gas	NOUN
ap-5383	101	28	-	-	PUNCT
ap-5383	101	29	puff	puff	NOUN
ap-5383	101	30	target	target	NOUN
ap-5383	101	31	in	in	ADP
ap-5383	101	32	time	time	NOUN
ap-5383	101	33	.	.	PUNCT
ap-5383	102	1	as	as	ADP
ap-5383	102	2	working	working	NOUN
ap-5383	102	3	gasses	gas	NOUN
ap-5383	102	4	,	,	PUNCT
ap-5383	102	5	we	we	PRON
ap-5383	102	6	used	use	VERB
ap-5383	102	7	argon	argon	NOUN
ap-5383	102	8	,	,	PUNCT
ap-5383	102	9	krypton	krypton	PROPN
ap-5383	102	10	and	and	CCONJ
ap-5383	102	11	nitrogen	nitrogen	NOUN
ap-5383	102	12	for	for	SCONJ
ap-5383	102	13	their	their	PRON
ap-5383	102	14	property	property	NOUN
ap-5383	102	15	to	to	PART
ap-5383	102	16	radiate	radiate	VERB
ap-5383	102	17	in	in	ADP
ap-5383	102	18	the	the	DET
ap-5383	102	19	water	water	NOUN
ap-5383	102	20	window	window	NOUN
ap-5383	102	21	.	.	PUNCT
ap-5383	103	1	the	the	DET
ap-5383	103	2	mass	mass	ADJ
ap-5383	103	3	density	density	NOUN
ap-5383	103	4	for	for	ADP
ap-5383	103	5	each	each	DET
ap-5383	103	6	gas	gas	NOUN
ap-5383	103	7	at	at	ADP
ap-5383	103	8	pressure	pressure	NOUN
ap-5383	103	9	p	p	X
ap-5383	104	1	=	=	PUNCT
ap-5383	104	2	10bar	10bar	NOUN
ap-5383	104	3	(	(	PUNCT
ap-5383	104	4	table	table	NOUN
ap-5383	104	5	1	1	NUM
ap-5383	104	6	)	)	PUNCT
ap-5383	104	7	shows	show	VERB
ap-5383	104	8	that	that	SCONJ
ap-5383	104	9	the	the	DET
ap-5383	104	10	density	density	NOUN
ap-5383	104	11	of	of	ADP
ap-5383	104	12	krypton	krypton	PROPN
ap-5383	104	13	is	be	AUX
ap-5383	104	14	almost	almost	ADV
ap-5383	104	15	twice	twice	DET
ap-5383	104	16	that	that	DET
ap-5383	104	17	of	of	ADP
ap-5383	104	18	nitrogen	nitrogen	NOUN
ap-5383	104	19	.	.	PUNCT
ap-5383	105	1	it	it	PRON
ap-5383	105	2	is	be	AUX
ap-5383	105	3	also	also	ADV
ap-5383	105	4	possible	possible	ADJ
ap-5383	105	5	to	to	PART
ap-5383	105	6	observe	observe	VERB
ap-5383	105	7	that	that	SCONJ
ap-5383	105	8	the	the	DET
ap-5383	105	9	geometry	geometry	NOUN
ap-5383	105	10	of	of	ADP
ap-5383	105	11	the	the	DET
ap-5383	105	12	gas	gas	NOUN
ap-5383	105	13	-	-	PUNCT
ap-5383	105	14	puff	puff	NOUN
ap-5383	105	15	target	target	NOUN
ap-5383	105	16	is	be	AUX
ap-5383	105	17	very	very	ADV
ap-5383	105	18	similar	similar	ADJ
ap-5383	105	19	for	for	ADP
ap-5383	105	20	all	all	DET
ap-5383	105	21	gasses	gas	NOUN
ap-5383	105	22	and	and	CCONJ
ap-5383	105	23	it	it	PRON
ap-5383	105	24	mostly	mostly	ADV
ap-5383	105	25	depends	depend	VERB
ap-5383	105	26	on	on	ADP
ap-5383	105	27	the	the	DET
ap-5383	105	28	nozzle	nozzle	NOUN
ap-5383	105	29	geometry	geometry	NOUN
ap-5383	105	30	.	.	PUNCT
ap-5383	106	1	in	in	ADP
ap-5383	106	2	our	our	PRON
ap-5383	106	3	case	case	NOUN
ap-5383	106	4	,	,	PUNCT
ap-5383	106	5	it	it	PRON
ap-5383	106	6	was	be	AUX
ap-5383	106	7	a	a	DET
ap-5383	106	8	conical	conical	ADJ
ap-5383	106	9	nozzle	nozzle	NOUN
ap-5383	106	10	with	with	ADP
ap-5383	106	11	an	an	DET
ap-5383	106	12	output	output	NOUN
ap-5383	106	13	diameter	diameter	NOUN
ap-5383	106	14	of	of	ADP
ap-5383	106	15	0.54	0.54	NUM
ap-5383	106	16	mm	mm	NOUN
ap-5383	106	17	.	.	PUNCT
ap-5383	107	1	the	the	DET
ap-5383	107	2	radial	radial	ADJ
ap-5383	107	3	dimension	dimension	NOUN
ap-5383	107	4	σ	σ	NOUN
ap-5383	107	5	in	in	ADP
ap-5383	107	6	the	the	DET
ap-5383	107	7	investigated	investigate	VERB
ap-5383	107	8	gas	gas	NOUN
ap-5383	107	9	-	-	PUNCT
ap-5383	107	10	puff	puff	NOUN
ap-5383	107	11	target	target	NOUN
ap-5383	107	12	at	at	ADP
ap-5383	107	13	a	a	DET
ap-5383	107	14	distance	distance	NOUN
ap-5383	107	15	of	of	ADP
ap-5383	107	16	∆z	∆z	NOUN
ap-5383	107	17	=	=	SYM
ap-5383	107	18	0.5	0.5	NUM
ap-5383	107	19	mm	mm	NOUN
ap-5383	107	20	was	be	AUX
ap-5383	107	21	around	around	ADV
ap-5383	107	22	0.4	0.4	NUM
ap-5383	107	23	mm	mm	NOUN
ap-5383	107	24	.	.	PUNCT
ap-5383	108	1	we	we	PRON
ap-5383	108	2	will	will	AUX
ap-5383	108	3	use	use	VERB
ap-5383	108	4	all	all	DET
ap-5383	108	5	these	these	DET
ap-5383	108	6	results	result	NOUN
ap-5383	108	7	as	as	SCONJ
ap-5383	108	8	the	the	DET
ap-5383	108	9	input	input	NOUN
ap-5383	108	10	data	datum	NOUN
ap-5383	108	11	for	for	ADP
ap-5383	108	12	the	the	DET
ap-5383	108	13	plasma	plasma	NOUN
ap-5383	108	14	simulation	simulation	NOUN
ap-5383	108	15	to	to	PART
ap-5383	108	16	find	find	VERB
ap-5383	108	17	the	the	DET
ap-5383	108	18	optimal	optimal	ADJ
ap-5383	108	19	setup	setup	NOUN
ap-5383	108	20	for	for	ADP
ap-5383	108	21	our	our	PRON
ap-5383	108	22	sxr	sxr	PROPN
ap-5383	108	23	source	source	NOUN
ap-5383	108	24	.	.	PUNCT
ap-5383	109	1	we	we	PRON
ap-5383	109	2	can	can	AUX
ap-5383	109	3	also	also	ADV
ap-5383	109	4	compare	compare	VERB
ap-5383	109	5	them	they	PRON
ap-5383	109	6	with	with	ADP
ap-5383	109	7	other	other	ADJ
ap-5383	109	8	nozzle	nozzle	NOUN
ap-5383	109	9	types	type	NOUN
ap-5383	109	10	to	to	PART
ap-5383	109	11	find	find	VERB
ap-5383	109	12	the	the	DET
ap-5383	109	13	optimal	optimal	ADJ
ap-5383	109	14	shape	shape	NOUN
ap-5383	109	15	(	(	PUNCT
ap-5383	109	16	e.g.	e.g.	ADV
ap-5383	109	17	,	,	PUNCT
ap-5383	109	18	with	with	ADP
ap-5383	109	19	the	the	DET
ap-5383	109	20	double	double	ADJ
ap-5383	109	21	stream	stream	NOUN
ap-5383	109	22	nozzle	nozzle	NOUN
ap-5383	109	23	which	which	PRON
ap-5383	109	24	is	be	AUX
ap-5383	109	25	used	use	VERB
ap-5383	109	26	in	in	ADP
ap-5383	109	27	the	the	DET
ap-5383	109	28	laboratory	laboratory	NOUN
ap-5383	109	29	of	of	ADP
ap-5383	109	30	laser	laser	NOUN
ap-5383	109	31	-	-	PUNCT
ap-5383	109	32	matter	matter	NOUN
ap-5383	109	33	interaction	interaction	NOUN
ap-5383	109	34	group	group	NOUN
ap-5383	109	35	,	,	PUNCT
ap-5383	109	36	institute	institute	NOUN
ap-5383	109	37	of	of	ADP
ap-5383	109	38	optoelectronics	optoelectronic	NOUN
ap-5383	109	39	,	,	PUNCT
ap-5383	109	40	military	military	ADJ
ap-5383	109	41	university	university	NOUN
ap-5383	109	42	of	of	ADP
ap-5383	109	43	technology	technology	NOUN
ap-5383	109	44	in	in	ADP
ap-5383	109	45	warsaw	warsaw	PROPN
ap-5383	109	46	[	[	X
ap-5383	109	47	15	15	NUM
ap-5383	109	48	]	]	PUNCT
ap-5383	109	49	)	)	PUNCT
ap-5383	109	50	.	.	PUNCT
ap-5383	110	1	in	in	ADP
ap-5383	110	2	chapter	chapter	NOUN
ap-5383	110	3	5.3	5.3	NUM
ap-5383	110	4	we	we	PRON
ap-5383	110	5	have	have	AUX
ap-5383	110	6	shown	show	VERB
ap-5383	110	7	the	the	DET
ap-5383	110	8	problem	problem	NOUN
ap-5383	110	9	of	of	ADP
ap-5383	110	10	nozzle	nozzle	NOUN
ap-5383	110	11	ageing	ageing	NOUN
ap-5383	110	12	.	.	PUNCT
ap-5383	111	1	thanks	thank	NOUN
ap-5383	111	2	to	to	ADP
ap-5383	111	3	the	the	DET
ap-5383	111	4	formation	formation	NOUN
ap-5383	111	5	of	of	ADP
ap-5383	111	6	plasma	plasma	NOUN
ap-5383	111	7	,	,	PUNCT
ap-5383	111	8	the	the	DET
ap-5383	111	9	nozzle	nozzle	NOUN
ap-5383	111	10	is	be	AUX
ap-5383	111	11	being	be	AUX
ap-5383	111	12	damaged	damage	VERB
ap-5383	111	13	and	and	CCONJ
ap-5383	111	14	the	the	DET
ap-5383	111	15	gas	gas	NOUN
ap-5383	111	16	-	-	PUNCT
ap-5383	111	17	puff	puff	NOUN
ap-5383	111	18	target	target	NOUN
ap-5383	111	19	is	be	AUX
ap-5383	111	20	changing	change	VERB
ap-5383	111	21	.	.	PUNCT
ap-5383	112	1	the	the	DET
ap-5383	112	2	mass	mass	ADJ
ap-5383	112	3	density	density	NOUN
ap-5383	112	4	decreases	decrease	VERB
ap-5383	112	5	at	at	ADP
ap-5383	112	6	a	a	DET
ap-5383	112	7	defined	define	VERB
ap-5383	112	8	distance	distance	NOUN
ap-5383	112	9	∆z	∆z	NOUN
ap-5383	112	10	that	that	PRON
ap-5383	112	11	also	also	ADV
ap-5383	112	12	leads	lead	VERB
ap-5383	112	13	to	to	ADP
ap-5383	112	14	changes	change	NOUN
ap-5383	112	15	in	in	ADP
ap-5383	112	16	the	the	DET
ap-5383	112	17	formation	formation	NOUN
ap-5383	112	18	of	of	ADP
ap-5383	112	19	plasma	plasma	NOUN
ap-5383	112	20	.	.	PUNCT
ap-5383	113	1	the	the	DET
ap-5383	113	2	differences	difference	NOUN
ap-5383	113	3	between	between	ADP
ap-5383	113	4	mass	mass	ADJ
ap-5383	113	5	density	density	NOUN
ap-5383	113	6	for	for	ADP
ap-5383	113	7	new	new	ADJ
ap-5383	113	8	and	and	CCONJ
ap-5383	113	9	old	old	ADJ
ap-5383	113	10	nozzles	nozzle	NOUN
ap-5383	113	11	are	be	AUX
ap-5383	113	12	shown	show	VERB
ap-5383	113	13	in	in	ADP
ap-5383	113	14	figure	figure	NOUN
ap-5383	113	15	6	6	NUM
ap-5383	113	16	.	.	PUNCT
ap-5383	114	1	thanks	thank	NOUN
ap-5383	114	2	to	to	ADP
ap-5383	114	3	these	these	DET
ap-5383	114	4	results	result	NOUN
ap-5383	114	5	,	,	PUNCT
ap-5383	114	6	we	we	PRON
ap-5383	114	7	have	have	AUX
ap-5383	114	8	understood	understand	VERB
ap-5383	114	9	how	how	SCONJ
ap-5383	114	10	the	the	DET
ap-5383	114	11	spatial	spatial	ADJ
ap-5383	114	12	target	target	NOUN
ap-5383	114	13	parameters	parameter	NOUN
ap-5383	114	14	are	be	AUX
ap-5383	114	15	changed	change	VERB
ap-5383	114	16	during	during	ADP
ap-5383	114	17	a	a	DET
ap-5383	114	18	long	long	ADJ
ap-5383	114	19	-	-	PUNCT
ap-5383	114	20	term	term	NOUN
ap-5383	114	21	use	use	NOUN
ap-5383	114	22	.	.	PUNCT
ap-5383	115	1	we	we	PRON
ap-5383	115	2	also	also	ADV
ap-5383	115	3	compared	compare	VERB
ap-5383	115	4	how	how	SCONJ
ap-5383	115	5	the	the	DET
ap-5383	115	6	mass	mass	ADJ
ap-5383	115	7	density	density	NOUN
ap-5383	115	8	depends	depend	VERB
ap-5383	115	9	on	on	ADP
ap-5383	115	10	the	the	DET
ap-5383	115	11	input	input	NOUN
ap-5383	115	12	pressure	pressure	NOUN
ap-5383	115	13	.	.	PUNCT
ap-5383	116	1	in	in	ADP
ap-5383	116	2	figure	figure	NOUN
ap-5383	116	3	6	6	NUM
ap-5383	116	4	,	,	PUNCT
ap-5383	116	5	we	we	PRON
ap-5383	116	6	can	can	AUX
ap-5383	116	7	see	see	VERB
ap-5383	116	8	that	that	SCONJ
ap-5383	116	9	if	if	SCONJ
ap-5383	116	10	the	the	DET
ap-5383	116	11	pressure	pressure	NOUN
ap-5383	116	12	equals	equal	VERB
ap-5383	116	13	or	or	CCONJ
ap-5383	116	14	is	be	AUX
ap-5383	116	15	higher	high	ADJ
ap-5383	116	16	than	than	ADP
ap-5383	116	17	p	p	NOUN
ap-5383	116	18	=	=	NOUN
ap-5383	116	19	10bar	10bar	NOUN
ap-5383	116	20	,	,	PUNCT
ap-5383	116	21	the	the	DET
ap-5383	116	22	mass	mass	ADJ
ap-5383	116	23	density	density	NOUN
ap-5383	116	24	is	be	AUX
ap-5383	116	25	stable	stable	ADJ
ap-5383	116	26	for	for	ADP
ap-5383	116	27	the	the	DET
ap-5383	116	28	new	new	ADJ
ap-5383	116	29	nozzle	nozzle	NOUN
ap-5383	116	30	and	and	CCONJ
ap-5383	116	31	an	an	DET
ap-5383	116	32	increase	increase	NOUN
ap-5383	116	33	in	in	ADP
ap-5383	116	34	gas	gas	NOUN
ap-5383	116	35	pressure	pressure	NOUN
ap-5383	116	36	will	will	AUX
ap-5383	116	37	not	not	PART
ap-5383	116	38	result	result	VERB
ap-5383	116	39	in	in	ADP
ap-5383	116	40	an	an	DET
ap-5383	116	41	increase	increase	NOUN
ap-5383	116	42	in	in	ADP
ap-5383	116	43	mass	mass	ADJ
ap-5383	116	44	density	density	NOUN
ap-5383	116	45	.	.	PUNCT
ap-5383	117	1	if	if	SCONJ
ap-5383	117	2	the	the	DET
ap-5383	117	3	target	target	NOUN
ap-5383	117	4	density	density	NOUN
ap-5383	117	5	is	be	AUX
ap-5383	117	6	known	know	VERB
ap-5383	117	7	,	,	PUNCT
ap-5383	117	8	we	we	PRON
ap-5383	117	9	may	may	AUX
ap-5383	117	10	proceed	proceed	VERB
ap-5383	117	11	with	with	ADP
ap-5383	117	12	the	the	DET
ap-5383	117	13	computer	computer	NOUN
ap-5383	117	14	optimization	optimization	NOUN
ap-5383	117	15	of	of	ADP
ap-5383	117	16	our	our	PRON
ap-5383	117	17	system	system	NOUN
ap-5383	117	18	via	via	ADP
ap-5383	117	19	laser	laser	NOUN
ap-5383	117	20	parameter	parameter	NOUN
ap-5383	117	21	variation	variation	NOUN
ap-5383	117	22	.	.	PUNCT
ap-5383	118	1	moreover	moreover	ADV
ap-5383	118	2	,	,	PUNCT
ap-5383	118	3	further	further	ADJ
ap-5383	118	4	nozzle	nozzle	NOUN
ap-5383	118	5	opti590	opti590	NUM
ap-5383	118	6	vol	vol	NOUN
ap-5383	118	7	.	.	PUNCT
ap-5383	119	1	59	59	NUM
ap-5383	119	2	no	no	NOUN
ap-5383	119	3	.	.	PUNCT
ap-5383	120	1	6/2019	6/2019	NUM
ap-5383	120	2	gas	gas	NOUN
ap-5383	120	3	-	-	PUNCT
ap-5383	120	4	puff	puff	NOUN
ap-5383	120	5	target	target	NOUN
ap-5383	120	6	for	for	ADP
ap-5383	120	7	laser	laser	NOUN
ap-5383	120	8	-	-	PUNCT
ap-5383	120	9	producing	produce	VERB
ap-5383	120	10	plasma	plasma	NOUN
ap-5383	120	11	sxr	sxr	PROPN
ap-5383	120	12	source	source	NOUN
ap-5383	120	13	figure	figure	NOUN
ap-5383	120	14	6	6	NUM
ap-5383	120	15	.	.	PUNCT
ap-5383	121	1	nitrogen	nitrogen	NOUN
ap-5383	121	2	mass	mass	PROPN
ap-5383	121	3	densities	density	NOUN
ap-5383	121	4	at	at	ADP
ap-5383	121	5	the	the	DET
ap-5383	121	6	nozzle	nozzle	NOUN
ap-5383	121	7	axis	axis	NOUN
ap-5383	121	8	versus	versus	ADP
ap-5383	121	9	reservoir	reservoir	NOUN
ap-5383	121	10	pressure	pressure	NOUN
ap-5383	121	11	at	at	ADP
ap-5383	121	12	∆t	∆t	PROPN
ap-5383	121	13	=	=	SYM
ap-5383	121	14	900µs	900µs	NOUN
ap-5383	121	15	and	and	CCONJ
ap-5383	121	16	∆z	∆z	NOUN
ap-5383	121	17	=	=	SYM
ap-5383	121	18	0.5	0.5	NUM
ap-5383	121	19	mm	mm	NOUN
ap-5383	121	20	for	for	ADP
ap-5383	121	21	new	new	ADJ
ap-5383	121	22	nozzle	nozzle	NOUN
ap-5383	121	23	1	1	NUM
ap-5383	121	24	and	and	CCONJ
ap-5383	121	25	“	"	PUNCT
ap-5383	121	26	worn	wear	VERB
ap-5383	121	27	-	-	PUNCT
ap-5383	121	28	out	out	ADP
ap-5383	121	29	”	"	PUNCT
ap-5383	121	30	nozzle	nozzle	NOUN
ap-5383	121	31	2	2	NUM
ap-5383	121	32	.	.	PUNCT
ap-5383	122	1	p	p	PROPN
ap-5383	122	2	is	be	AUX
ap-5383	122	3	nitrogen	nitrogen	NOUN
ap-5383	122	4	reservoir	reservoir	NOUN
ap-5383	122	5	pressure	pressure	NOUN
ap-5383	122	6	,	,	PUNCT
ap-5383	122	7	ρ0is	ρ0is	X
ap-5383	122	8	mass	mass	NOUN
ap-5383	122	9	density	density	NOUN
ap-5383	122	10	in	in	ADP
ap-5383	122	11	the	the	DET
ap-5383	122	12	gas	gas	NOUN
ap-5383	122	13	stream	stream	NOUN
ap-5383	122	14	.	.	PUNCT
ap-5383	123	1	blue	blue	ADJ
ap-5383	123	2	spots	spot	NOUN
ap-5383	123	3	correspond	correspond	VERB
ap-5383	123	4	with	with	ADP
ap-5383	123	5	values	value	NOUN
ap-5383	123	6	for	for	ADP
ap-5383	123	7	new	new	ADJ
ap-5383	123	8	(	(	PUNCT
ap-5383	123	9	first	first	ADJ
ap-5383	123	10	time	time	NOUN
ap-5383	123	11	used	use	VERB
ap-5383	123	12	)	)	PUNCT
ap-5383	123	13	nozzle	nozzle	NOUN
ap-5383	123	14	,	,	PUNCT
ap-5383	123	15	the	the	DET
ap-5383	123	16	red	red	ADJ
ap-5383	123	17	spots	spot	NOUN
ap-5383	123	18	correspond	correspond	VERB
ap-5383	123	19	with	with	ADP
ap-5383	123	20	values	value	NOUN
ap-5383	123	21	for	for	ADP
ap-5383	123	22	the	the	DET
ap-5383	123	23	old	old	ADJ
ap-5383	123	24	nozzle	nozzle	NOUN
ap-5383	123	25	(	(	PUNCT
ap-5383	123	26	after	after	ADP
ap-5383	123	27	1000	1000	NUM
ap-5383	123	28	use	use	NOUN
ap-5383	123	29	)	)	PUNCT
ap-5383	123	30	.	.	PUNCT
ap-5383	124	1	mization	mization	NOUN
ap-5383	124	2	may	may	AUX
ap-5383	124	3	also	also	ADV
ap-5383	124	4	be	be	AUX
ap-5383	124	5	performed	perform	VERB
ap-5383	124	6	via	via	ADP
ap-5383	124	7	target	target	NOUN
ap-5383	124	8	computer	computer	NOUN
ap-5383	124	9	modelling	modelling	NOUN
ap-5383	124	10	when	when	SCONJ
ap-5383	124	11	these	these	DET
ap-5383	124	12	experimental	experimental	ADJ
ap-5383	124	13	results	result	NOUN
ap-5383	124	14	are	be	AUX
ap-5383	124	15	used	use	VERB
ap-5383	124	16	to	to	PART
ap-5383	124	17	validate	validate	VERB
ap-5383	124	18	the	the	DET
ap-5383	124	19	computer	computer	NOUN
ap-5383	124	20	model	model	NOUN
ap-5383	124	21	.	.	PUNCT
ap-5383	125	1	acknowledgements	acknowledgement	NOUN
ap-5383	125	2	this	this	DET
ap-5383	125	3	work	work	NOUN
ap-5383	125	4	was	be	AUX
ap-5383	125	5	supported	support	VERB
ap-5383	125	6	by	by	ADP
ap-5383	125	7	grants	grant	NOUN
ap-5383	125	8	on	on	ADP
ap-5383	125	9	the	the	DET
ap-5383	125	10	projects	project	NOUN
ap-5383	125	11	of	of	ADP
ap-5383	125	12	meys	mey	NOUN
ap-5383	125	13	cr	cr	PROPN
ap-5383	125	14	in	in	ADP
ap-5383	125	15	the	the	DET
ap-5383	125	16	frame	frame	NOUN
ap-5383	125	17	of	of	ADP
ap-5383	125	18	the	the	DET
ap-5383	125	19	program	program	NOUN
ap-5383	125	20	inter	inter	PROPN
ap-5383	125	21	excellence	excellence	PROPN
ap-5383	125	22	on	on	ADP
ap-5383	125	23	the	the	DET
ap-5383	125	24	project	project	NOUN
ap-5383	125	25	ltt17015	ltt17015	NOUN
ap-5383	125	26	and	and	CCONJ
ap-5383	125	27	sgs13/094	sgs13/094	PROPN
ap-5383	125	28	/	/	SYM
ap-5383	125	29	ohk4/1t/17	ohk4/1t/17	X
ap-5383	125	30	optimization	optimization	NOUN
ap-5383	125	31	of	of	ADP
ap-5383	125	32	xuv	xuv	NOUN
ap-5383	125	33	radiation	radiation	NOUN
ap-5383	125	34	sources	source	NOUN
ap-5383	125	35	for	for	ADP
ap-5383	125	36	biological	biological	ADJ
ap-5383	125	37	imaging	imaging	NOUN
ap-5383	125	38	.	.	PUNCT
ap-5383	126	1	references	reference	NOUN
ap-5383	126	2	[	[	X
ap-5383	126	3	1	1	X
ap-5383	126	4	]	]	PUNCT
ap-5383	126	5	d.	d.	PROPN
ap-5383	126	6	attwood	attwood	PROPN
ap-5383	126	7	.	.	PUNCT
ap-5383	126	8	soft	soft	ADJ
ap-5383	126	9	x	x	NOUN
ap-5383	126	10	-	-	NOUN
ap-5383	126	11	rays	ray	NOUN
ap-5383	126	12	and	and	CCONJ
ap-5383	126	13	extreme	extreme	ADJ
ap-5383	126	14	ultraviolet	ultraviolet	ADJ
ap-5383	126	15	radiation	radiation	NOUN
ap-5383	126	16	:	:	PUNCT
ap-5383	126	17	principles	principle	NOUN
ap-5383	126	18	and	and	CCONJ
ap-5383	126	19	applications	application	NOUN
ap-5383	126	20	.	.	PUNCT
ap-5383	127	1	cambridge	cambridge	PROPN
ap-5383	127	2	university	university	PROPN
ap-5383	127	3	press	press	PROPN
ap-5383	127	4	,	,	PUNCT
ap-5383	127	5	cambridge	cambridge	PROPN
ap-5383	127	6	,	,	PUNCT
ap-5383	127	7	1999	1999	NUM
ap-5383	127	8	.	.	PUNCT
ap-5383	128	1	doi:10.1017	doi:10.1017	NOUN
ap-5383	128	2	/	/	SYM
ap-5383	128	3	cbo9781139164429	cbo9781139164429	ADJ
ap-5383	128	4	.	.	PUNCT
ap-5383	129	1	[	[	X
ap-5383	129	2	2	2	NUM
ap-5383	129	3	]	]	PUNCT
ap-5383	129	4	a.	a.	NOUN
ap-5383	129	5	bayer	bayer	PROPN
ap-5383	129	6	,	,	PUNCT
ap-5383	129	7	f.	f.	PROPN
ap-5383	129	8	barkusky	barkusky	PROPN
ap-5383	129	9	,	,	PUNCT
ap-5383	129	10	s.	s.	PROPN
ap-5383	129	11	döring	döring	PROPN
ap-5383	129	12	,	,	PUNCT
ap-5383	129	13	et	et	PROPN
ap-5383	129	14	al	al	PROPN
ap-5383	129	15	.	.	PUNCT
ap-5383	129	16	applications	application	NOUN
ap-5383	129	17	of	of	ADP
ap-5383	129	18	compact	compact	ADJ
ap-5383	129	19	laser	laser	NOUN
ap-5383	129	20	-	-	PUNCT
ap-5383	129	21	driven	drive	VERB
ap-5383	129	22	euv	euv	PROPN
ap-5383	129	23	/	/	SYM
ap-5383	129	24	xuv	xuv	NOUN
ap-5383	129	25	plasma	plasma	NOUN
ap-5383	129	26	sources	source	NOUN
ap-5383	129	27	.	.	PUNCT
ap-5383	130	1	x	x	X
ap-5383	130	2	-	-	PUNCT
ap-5383	130	3	ray	ray	NOUN
ap-5383	130	4	optics	optic	NOUN
ap-5383	130	5	and	and	CCONJ
ap-5383	130	6	instrumentation	instrumentation	NOUN
ap-5383	130	7	2010	2010	NUM
ap-5383	130	8	,	,	PUNCT
ap-5383	130	9	2009	2009	NUM
ap-5383	130	10	.	.	PUNCT
ap-5383	131	1	doi:10.1155/2010/687496	doi:10.1155/2010/687496	NOUN
ap-5383	131	2	.	.	PUNCT
ap-5383	132	1	[	[	X
ap-5383	132	2	3	3	X
ap-5383	132	3	]	]	X
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ap-5383	132	5	w.	w.	PROPN
ap-5383	132	6	wachulak	wachulak	PROPN
ap-5383	132	7	,	,	PUNCT
ap-5383	132	8	a.	a.	NOUN
ap-5383	132	9	bartnik	bartnik	PROPN
ap-5383	132	10	,	,	PUNCT
ap-5383	132	11	m.	m.	NOUN
ap-5383	132	12	skorupka	skorupka	NOUN
ap-5383	132	13	,	,	PUNCT
ap-5383	132	14	et	et	PROPN
ap-5383	132	15	al	al	PROPN
ap-5383	132	16	.	.	PUNCT
ap-5383	132	17	water	water	NOUN
ap-5383	132	18	-	-	PUNCT
ap-5383	132	19	window	window	NOUN
ap-5383	132	20	microscopy	microscopy	NOUN
ap-5383	132	21	using	use	VERB
ap-5383	132	22	a	a	DET
ap-5383	132	23	compact	compact	ADJ
ap-5383	132	24	,	,	PUNCT
ap-5383	132	25	laser	laser	NOUN
ap-5383	132	26	-	-	PUNCT
ap-5383	132	27	plasma	plasma	NOUN
ap-5383	132	28	sxr	sxr	PROPN
ap-5383	132	29	source	source	NOUN
ap-5383	132	30	based	base	VERB
ap-5383	132	31	on	on	ADP
ap-5383	132	32	a	a	DET
ap-5383	132	33	double	double	ADJ
ap-5383	132	34	-	-	PUNCT
ap-5383	132	35	stream	stream	NOUN
ap-5383	132	36	gas	gas	NOUN
ap-5383	132	37	-	-	PUNCT
ap-5383	132	38	puff	puff	NOUN
ap-5383	132	39	target	target	NOUN
ap-5383	132	40	.	.	PUNCT
ap-5383	133	1	applied	apply	VERB
ap-5383	133	2	physics	physics	PROPN
ap-5383	133	3	b	b	PROPN
ap-5383	133	4	111(2):239–247	111(2):239–247	PROPN
ap-5383	133	5	,	,	PUNCT
ap-5383	133	6	2013	2013	NUM
ap-5383	133	7	.	.	PUNCT
ap-5383	134	1	doi:10.1007	doi:10.1007	VERB
ap-5383	134	2	/	/	SYM
ap-5383	134	3	s00340	s00340	NUM
ap-5383	134	4	-	-	PUNCT
ap-5383	134	5	012	012	NUM
ap-5383	134	6	-	-	PUNCT
ap-5383	134	7	5324	5324	NUM
ap-5383	134	8	-	-	PUNCT
ap-5383	134	9	y.	y.	NOUN
ap-5383	135	1	[	[	X
ap-5383	135	2	4	4	X
ap-5383	135	3	]	]	X
ap-5383	135	4	h.	h.	PROPN
ap-5383	135	5	m.	m.	PROPN
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ap-5383	135	10	,	,	PUNCT
ap-5383	135	11	g.	g.	PROPN
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ap-5383	135	14	,	,	PUNCT
ap-5383	135	15	et	et	PROPN
ap-5383	135	16	al	al	PROPN
ap-5383	135	17	.	.	PUNCT
ap-5383	136	1	compact	compact	ADJ
ap-5383	136	2	water	water	NOUN
ap-5383	136	3	-	-	PUNCT
ap-5383	136	4	window	window	NOUN
ap-5383	136	5	x	x	NOUN
ap-5383	136	6	-	-	NOUN
ap-5383	136	7	ray	ray	NOUN
ap-5383	136	8	microscopy	microscopy	NOUN
ap-5383	136	9	with	with	ADP
ap-5383	136	10	a	a	DET
ap-5383	136	11	droplet	droplet	ADJ
ap-5383	136	12	laser	laser	NOUN
ap-5383	136	13	-	-	PUNCT
ap-5383	136	14	plasma	plasma	NOUN
ap-5383	136	15	source	source	NOUN
ap-5383	136	16	.	.	PUNCT
ap-5383	137	1	aip	aip	PROPN
ap-5383	137	2	conference	conference	NOUN
ap-5383	137	3	proceedings	proceeding	NOUN
ap-5383	137	4	507(1):721–725	507(1):721–725	NUM
ap-5383	137	5	,	,	PUNCT
ap-5383	137	6	2000	2000	NUM
ap-5383	137	7	.	.	PUNCT
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ap-5383	138	2	.	.	PUNCT
ap-5383	139	1	[	[	X
ap-5383	139	2	5	5	NUM
ap-5383	139	3	]	]	PUNCT
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ap-5383	139	5	torrisi	torrisi	NOUN
ap-5383	139	6	,	,	PUNCT
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ap-5383	139	14	al	al	PROPN
ap-5383	139	15	.	.	PUNCT
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ap-5383	139	17	of	of	ADP
ap-5383	139	18	a	a	DET
ap-5383	139	19	compact	compact	ADJ
ap-5383	139	20	“	"	PUNCT
ap-5383	139	21	water	water	NOUN
ap-5383	139	22	window	window	NOUN
ap-5383	139	23	”	"	PUNCT
ap-5383	139	24	source	source	NOUN
ap-5383	139	25	for	for	ADP
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ap-5383	139	28	nanostructures	nanostructure	NOUN
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ap-5383	139	30	sxr	sxr	PROPN
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ap-5383	139	32	.	.	PUNCT
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ap-5383	140	2	physica	physica	PROPN
ap-5383	140	3	polonica	polonica	PROPN
ap-5383	140	4	a	a	DET
ap-5383	140	5	129:169–171	129:169–171	NUM
ap-5383	140	6	,	,	PUNCT
ap-5383	140	7	2016	2016	NUM
ap-5383	140	8	.	.	PUNCT
ap-5383	141	1	doi:10.12693	doi:10.12693	PROPN
ap-5383	141	2	/	/	SYM
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ap-5383	141	4	.	.	PUNCT
ap-5383	142	1	[	[	X
ap-5383	142	2	6	6	NUM
ap-5383	142	3	]	]	PUNCT
ap-5383	142	4	j.	j.	PROPN
ap-5383	142	5	kirz	kirz	PROPN
ap-5383	142	6	,	,	PUNCT
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ap-5383	142	10	m.	m.	PROPN
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ap-5383	142	12	.	.	PUNCT
ap-5383	142	13	soft	soft	ADJ
ap-5383	142	14	x	x	ADJ
ap-5383	142	15	-	-	NOUN
ap-5383	142	16	ray	ray	NOUN
ap-5383	142	17	microscopes	microscope	NOUN
ap-5383	142	18	and	and	CCONJ
ap-5383	142	19	their	their	PRON
ap-5383	142	20	biological	biological	ADJ
ap-5383	142	21	applications	application	NOUN
ap-5383	142	22	.	.	PUNCT
ap-5383	143	1	quarterly	quarterly	ADJ
ap-5383	143	2	reviews	review	NOUN
ap-5383	143	3	of	of	ADP
ap-5383	143	4	biophysics	biophysic	NOUN
ap-5383	143	5	28(1):33–130	28(1):33–130	NUM
ap-5383	143	6	,	,	PUNCT
ap-5383	143	7	1995	1995	NUM
ap-5383	143	8	.	.	PUNCT
ap-5383	144	1	doi:10.1017	doi:10.1017	NOUN
ap-5383	144	2	/	/	SYM
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ap-5383	144	4	.	.	PUNCT
ap-5383	145	1	[	[	X
ap-5383	145	2	7	7	X
ap-5383	145	3	]	]	X
ap-5383	145	4	p.	p.	NOUN
ap-5383	145	5	wachulak	wachulak	ADJ
ap-5383	145	6	,	,	PUNCT
ap-5383	145	7	a.	a.	NOUN
ap-5383	145	8	bartnik	bartnik	PROPN
ap-5383	145	9	,	,	PUNCT
ap-5383	145	10	h.	h.	PROPN
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ap-5383	145	12	.	.	PUNCT
ap-5383	146	1	nanoimaging	nanoimage	VERB
ap-5383	146	2	using	use	VERB
ap-5383	146	3	a	a	DET
ap-5383	146	4	compact	compact	ADJ
ap-5383	146	5	laser	laser	NOUN
ap-5383	146	6	plasma	plasma	NOUN
ap-5383	146	7	soft	soft	ADJ
ap-5383	146	8	x	x	ADJ
ap-5383	146	9	-	-	NOUN
ap-5383	146	10	ray	ray	NOUN
ap-5383	146	11	source	source	NOUN
ap-5383	146	12	based	base	VERB
ap-5383	146	13	on	on	ADP
ap-5383	146	14	a	a	DET
ap-5383	146	15	gas	gas	NOUN
ap-5383	146	16	puff	puff	NOUN
ap-5383	146	17	target	target	NOUN
ap-5383	146	18	.	.	PUNCT
ap-5383	147	1	in	in	ADP
ap-5383	147	2	b.	b.	PROPN
ap-5383	147	3	lai	lai	PROPN
ap-5383	147	4	,	,	PUNCT
ap-5383	147	5	a.	a.	NOUN
ap-5383	147	6	somogyi	somogyi	PROPN
ap-5383	147	7	(	(	PUNCT
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ap-5383	147	9	.	.	PUNCT
ap-5383	147	10	)	)	PUNCT
ap-5383	147	11	,	,	PUNCT
ap-5383	147	12	x	x	X
ap-5383	147	13	-	-	NOUN
ap-5383	147	14	ray	ray	NOUN
ap-5383	147	15	nanoimaging	nanoimaging	NOUN
ap-5383	147	16	:	:	PUNCT
ap-5383	147	17	instruments	instrument	NOUN
ap-5383	147	18	and	and	CCONJ
ap-5383	147	19	methods	method	NOUN
ap-5383	147	20	iv	iv	NUM
ap-5383	147	21	,	,	PUNCT
ap-5383	147	22	vol	vol	NOUN
ap-5383	147	23	.	.	PROPN
ap-5383	147	24	11112	11112	NUM
ap-5383	147	25	,	,	PUNCT
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ap-5383	147	27	.	.	PUNCT
ap-5383	148	1	117	117	NUM
ap-5383	148	2	–	–	SYM
ap-5383	148	3	123	123	NUM
ap-5383	148	4	.	.	PUNCT
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ap-5383	149	2	society	society	NOUN
ap-5383	149	3	for	for	ADP
ap-5383	149	4	optics	optic	NOUN
ap-5383	149	5	and	and	CCONJ
ap-5383	149	6	photonics	photonic	NOUN
ap-5383	149	7	,	,	PUNCT
ap-5383	149	8	spie	spie	NOUN
ap-5383	149	9	,	,	PUNCT
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ap-5383	149	11	.	.	PUNCT
ap-5383	150	1	doi:10.1117/12.2529468	doi:10.1117/12.2529468	NOUN
ap-5383	150	2	.	.	PUNCT
ap-5383	151	1	[	[	X
ap-5383	151	2	8	8	NUM
ap-5383	151	3	]	]	PUNCT
ap-5383	151	4	p.	p.	NOUN
ap-5383	151	5	vrba	vrba	NOUN
ap-5383	151	6	,	,	PUNCT
ap-5383	151	7	m.	m.	NOUN
ap-5383	151	8	vrbová	vrbová	PROPN
ap-5383	151	9	,	,	PUNCT
ap-5383	151	10	p.	p.	NOUN
ap-5383	151	11	brůža	brůža	NOUN
ap-5383	151	12	,	,	PUNCT
ap-5383	151	13	et	et	PROPN
ap-5383	151	14	al	al	PROPN
ap-5383	151	15	.	.	PUNCT
ap-5383	152	1	xuv	xuv	PROPN
ap-5383	152	2	radiation	radiation	NOUN
ap-5383	152	3	from	from	ADP
ap-5383	152	4	gaseous	gaseous	ADJ
ap-5383	152	5	nitrogen	nitrogen	NOUN
ap-5383	152	6	and	and	CCONJ
ap-5383	152	7	argon	argon	NOUN
ap-5383	152	8	target	target	NOUN
ap-5383	152	9	laser	laser	NOUN
ap-5383	152	10	plasmas	plasma	NOUN
ap-5383	152	11	.	.	PUNCT
ap-5383	153	1	journal	journal	PROPN
ap-5383	153	2	of	of	ADP
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ap-5383	153	4	:	:	PUNCT
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ap-5383	153	6	series	series	NOUN
ap-5383	153	7	370:357	370:357	PROPN
ap-5383	153	8	–	–	PUNCT
ap-5383	153	9	364	364	NUM
ap-5383	153	10	,	,	PUNCT
ap-5383	153	11	2012	2012	NUM
ap-5383	153	12	.	.	PUNCT
ap-5383	154	1	doi:10.1088/1742	doi:10.1088/1742	NOUN
ap-5383	154	2	-	-	PUNCT
ap-5383	154	3	6596/370/1/012049	6596/370/1/012049	NUM
ap-5383	154	4	.	.	PUNCT
ap-5383	155	1	[	[	X
ap-5383	155	2	9	9	NUM
ap-5383	155	3	]	]	PUNCT
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ap-5383	155	14	v.	v.	CCONJ
ap-5383	155	15	s.	s.	PROPN
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ap-5383	156	7	-	-	PUNCT
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ap-5383	156	11	-	-	NOUN
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ap-5383	156	19	.	.	PUNCT
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ap-5383	157	5	,	,	PUNCT
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ap-5383	157	7	.	.	PUNCT
ap-5383	158	1	doi:10.1063/1.4887295	doi:10.1063/1.4887295	PROPN
ap-5383	158	2	.	.	PUNCT
ap-5383	159	1	[	[	X
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ap-5383	159	7	.	.	PUNCT
ap-5383	160	1	www.ioe.wat.edu.pl/	www.ioe.wat.edu.pl/	NOUN
ap-5383	160	2	,	,	PUNCT
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ap-5383	160	4	.	.	PUNCT
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ap-5383	160	6	:	:	PUNCT
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ap-5383	160	9	2019	2019	NUM
ap-5383	160	10	.	.	PUNCT
ap-5383	161	1	[	[	X
ap-5383	161	2	11	11	NUM
ap-5383	161	3	]	]	PUNCT
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ap-5383	161	7	k.	k.	PROPN
ap-5383	161	8	mann	mann	PROPN
ap-5383	161	9	.	.	PUNCT
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ap-5383	161	12	of	of	ADP
ap-5383	161	13	euv	euv	PRON
ap-5383	161	14	radiation	radiation	NOUN
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ap-5383	161	16	from	from	ADP
ap-5383	161	17	a	a	DET
ap-5383	161	18	laser	laser	NOUN
ap-5383	161	19	-	-	PUNCT
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ap-5383	161	24	.	.	PUNCT
ap-5383	162	1	optics	optic	NOUN
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ap-5383	162	4	–	–	PUNCT
ap-5383	162	5	230	230	NUM
ap-5383	162	6	,	,	PUNCT
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ap-5383	162	8	.	.	PUNCT
ap-5383	163	1	doi:10.1016	doi:10.1016	PROPN
ap-5383	163	2	/	/	SYM
ap-5383	163	3	s0030	s0030	PROPN
ap-5383	163	4	-	-	PUNCT
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ap-5383	163	6	-	-	PUNCT
ap-5383	163	7	x.	x.	NOUN
ap-5383	164	1	[	[	X
ap-5383	164	2	12	12	NUM
ap-5383	164	3	]	]	PUNCT
ap-5383	164	4	s.	s.	PROPN
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ap-5383	164	6	,	,	PUNCT
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ap-5383	164	9	,	,	PUNCT
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ap-5383	164	12	,	,	PUNCT
ap-5383	164	13	et	et	PROPN
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ap-5383	164	15	.	.	PUNCT
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ap-5383	165	7	target	target	NOUN
ap-5383	165	8	laser	laser	NOUN
ap-5383	165	9	plasma	plasma	NOUN
ap-5383	165	10	radiation	radiation	NOUN
ap-5383	165	11	source	source	NOUN
ap-5383	165	12	.	.	PUNCT
ap-5383	166	1	in	in	ADP
ap-5383	166	2	2012	2012	NUM
ap-5383	166	3	international	international	ADJ
ap-5383	166	4	workshop	workshop	NOUN
ap-5383	166	5	on	on	ADP
ap-5383	166	6	euv	euv	NOUN
ap-5383	166	7	and	and	CCONJ
ap-5383	166	8	soft	soft	ADJ
ap-5383	166	9	x	x	NOUN
ap-5383	166	10	-	-	NOUN
ap-5383	166	11	ray	ray	NOUN
ap-5383	166	12	sources	source	NOUN
ap-5383	166	13	,	,	PUNCT
ap-5383	166	14	p.	p.	NOUN
ap-5383	166	15	11	11	NUM
ap-5383	166	16	.	.	PUNCT
ap-5383	167	1	euv	euv	PROPN
ap-5383	167	2	litho	litho	PROPN
ap-5383	167	3	inc	inc	PROPN
ap-5383	167	4	,	,	PUNCT
ap-5383	167	5	austin	austin	PROPN
ap-5383	167	6	,	,	PUNCT
ap-5383	167	7	2012	2012	NUM
ap-5383	167	8	.	.	PUNCT
ap-5383	168	1	[	[	X
ap-5383	168	2	13	13	NUM
ap-5383	168	3	]	]	PUNCT
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ap-5383	168	5	rakowski	rakowski	PROPN
ap-5383	168	6	,	,	PUNCT
ap-5383	168	7	a.	a.	PROPN
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ap-5383	168	9	,	,	PUNCT
ap-5383	168	10	h.	h.	PROPN
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ap-5383	168	12	,	,	PUNCT
ap-5383	168	13	et	et	PROPN
ap-5383	168	14	al	al	PROPN
ap-5383	168	15	.	.	PROPN
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ap-5383	168	17	x	x	NOUN
ap-5383	168	18	-	-	NOUN
ap-5383	168	19	ray	ray	NOUN
ap-5383	168	20	radiography	radiography	NOUN
ap-5383	168	21	of	of	ADP
ap-5383	168	22	a	a	DET
ap-5383	168	23	gas	gas	NOUN
ap-5383	168	24	jet	jet	NOUN
ap-5383	168	25	target	target	NOUN
ap-5383	168	26	for	for	ADP
ap-5383	168	27	laser	laser	NOUN
ap-5383	168	28	–	–	PUNCT
ap-5383	168	29	matter	matter	NOUN
ap-5383	168	30	interaction	interaction	NOUN
ap-5383	168	31	experiments	experiment	NOUN
ap-5383	168	32	with	with	ADP
ap-5383	168	33	the	the	DET
ap-5383	168	34	use	use	NOUN
ap-5383	168	35	of	of	ADP
ap-5383	168	36	a	a	DET
ap-5383	168	37	ccd	ccd	NOUN
ap-5383	168	38	detector	detector	NOUN
ap-5383	168	39	.	.	PUNCT
ap-5383	169	1	nuclear	nuclear	ADJ
ap-5383	169	2	instruments	instrument	NOUN
ap-5383	169	3	and	and	CCONJ
ap-5383	169	4	methods	method	NOUN
ap-5383	169	5	in	in	ADP
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ap-5383	169	7	research	research	PROPN
ap-5383	169	8	section	section	PROPN
ap-5383	169	9	a	a	PRON
ap-5383	169	10	,	,	PUNCT
ap-5383	169	11	accelerators	accelerator	NOUN
ap-5383	169	12	,	,	PUNCT
ap-5383	169	13	spectrometers	spectrometer	NOUN
ap-5383	169	14	,	,	PUNCT
ap-5383	169	15	detectors	detector	NOUN
ap-5383	169	16	and	and	CCONJ
ap-5383	169	17	associated	associated	ADJ
ap-5383	169	18	equipment	equipment	NOUN
ap-5383	169	19	551:139	551:139	PROPN
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ap-5383	169	21	144	144	NUM
ap-5383	169	22	,	,	PUNCT
ap-5383	169	23	2005	2005	NUM
ap-5383	169	24	.	.	PUNCT
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ap-5383	170	4	.	.	PUNCT
ap-5383	171	1	591	591	NUM
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ap-5383	171	15	.	.	PUNCT
ap-5383	172	1	salačová	salačová	PROPN
ap-5383	172	2	,	,	PUNCT
ap-5383	172	3	p.	p.	NOUN
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ap-5383	172	5	,	,	PUNCT
ap-5383	172	6	m.	m.	NOUN
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ap-5383	172	9	m.	m.	NOUN
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ap-5383	172	11	acta	acta	PROPN
ap-5383	172	12	polytechnica	polytechnica	PROPN
ap-5383	173	1	[	[	X
ap-5383	173	2	14	14	NUM
ap-5383	173	3	]	]	SYM
ap-5383	173	4	x	x	ADJ
ap-5383	173	5	-	-	NOUN
ap-5383	173	6	ray	ray	NOUN
ap-5383	173	7	properties	property	NOUN
ap-5383	173	8	of	of	ADP
ap-5383	173	9	the	the	DET
ap-5383	173	10	elements	element	NOUN
ap-5383	173	11	.	.	PUNCT
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ap-5383	174	2	.	.	PUNCT
ap-5383	175	1	gov	gov	PROPN
ap-5383	175	2	/	/	SYM
ap-5383	175	3	optical_constants	optical_constant	NOUN
ap-5383	175	4	/	/	SYM
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ap-5383	175	6	,	,	PUNCT
ap-5383	175	7	1997	1997	NUM
ap-5383	175	8	.	.	PUNCT
ap-5383	175	9	accessed	access	VERB
ap-5383	175	10	:	:	PUNCT
ap-5383	175	11	14	14	NUM
ap-5383	175	12	june	june	PROPN
ap-5383	175	13	2019	2019	NUM
ap-5383	175	14	.	.	PUNCT
ap-5383	176	1	[	[	X
ap-5383	176	2	15	15	NUM
ap-5383	176	3	]	]	X
ap-5383	176	4	p.	p.	NOUN
ap-5383	176	5	w.	w.	PROPN
ap-5383	176	6	wachulak	wachulak	PROPN
ap-5383	176	7	,	,	PUNCT
ap-5383	176	8	a.	a.	NOUN
ap-5383	176	9	torrisi	torrisi	NOUN
ap-5383	176	10	,	,	PUNCT
ap-5383	176	11	a.	a.	PROPN
ap-5383	176	12	bartnik	bartnik	PROPN
ap-5383	176	13	,	,	PUNCT
ap-5383	176	14	et	et	PROPN
ap-5383	176	15	al	al	PROPN
ap-5383	176	16	.	.	PROPN
ap-5383	176	17	desktop	desktop	PROPN
ap-5383	176	18	water	water	PROPN
ap-5383	176	19	window	window	NOUN
ap-5383	176	20	microscope	microscope	NOUN
ap-5383	176	21	using	use	VERB
ap-5383	176	22	a	a	DET
ap-5383	176	23	double	double	ADJ
ap-5383	176	24	-	-	PUNCT
ap-5383	176	25	stream	stream	NOUN
ap-5383	176	26	gas	gas	NOUN
ap-5383	176	27	puff	puff	NOUN
ap-5383	176	28	target	target	NOUN
ap-5383	176	29	source	source	NOUN
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ap-5383	177	2	physics	physics	PROPN
ap-5383	177	3	b	b	PROPN
ap-5383	177	4	118(4):573–578	118(4):573–578	PROPN
ap-5383	177	5	,	,	PUNCT
ap-5383	177	6	2015	2015	NUM
ap-5383	177	7	.	.	PUNCT
ap-5383	178	1	doi:10.1007	doi:10.1007	VERB
ap-5383	178	2	/	/	SYM
ap-5383	178	3	s00340	s00340	NUM
ap-5383	178	4	-	-	PUNCT
ap-5383	178	5	015	015	NUM
ap-5383	178	6	-	-	PUNCT
ap-5383	178	7	6044	6044	NUM
ap-5383	178	8	-	-	PUNCT
ap-5383	178	9	x.	x.	NOUN
ap-5383	178	10	592	592	NUM
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ap-5383	178	12	http://henke.lbl.gov/optical_constants/pert_form.html	http://henke.lbl.gov/optical_constants/pert_form.html	PROPN
ap-5383	178	13	http://dx.doi.org/10.1007/s00340-015-6044-x	http://dx.doi.org/10.1007/s00340-015-6044-x	PROPN
ap-5383	178	14	acta	acta	PROPN
ap-5383	178	15	polytechnica	polytechnica	PROPN
ap-5383	178	16	59(6):587–592	59(6):587–592	PROPN
ap-5383	178	17	,	,	PUNCT
ap-5383	178	18	2019	2019	NUM
ap-5383	178	19	1	1	NUM
ap-5383	178	20	introduction	introduction	NOUN
ap-5383	178	21	2	2	NUM
ap-5383	178	22	gas	gas	NOUN
ap-5383	178	23	-	-	PUNCT
ap-5383	178	24	puff	puff	NOUN
ap-5383	178	25	target	target	NOUN
ap-5383	178	26	description	description	NOUN
ap-5383	178	27	3	3	NUM
ap-5383	178	28	description	description	NOUN
ap-5383	178	29	of	of	ADP
ap-5383	178	30	gas	gas	NOUN
ap-5383	178	31	stream	stream	NOUN
ap-5383	178	32	radiography	radiography	NOUN
ap-5383	178	33	4	4	NUM
ap-5383	178	34	experimental	experimental	ADJ
ap-5383	178	35	arrangement	arrangement	NOUN
ap-5383	178	36	5	5	NUM
ap-5383	178	37	results	result	NOUN
ap-5383	178	38	of	of	ADP
ap-5383	178	39	experiments	experiment	NOUN
ap-5383	178	40	5.1	5.1	NUM
ap-5383	178	41	results	result	NOUN
ap-5383	178	42	obtained	obtain	VERB
ap-5383	178	43	with	with	ADP
ap-5383	178	44	nitrogen	nitrogen	NOUN
ap-5383	178	45	5.2	5.2	NUM
ap-5383	178	46	results	result	NOUN
ap-5383	178	47	obtained	obtain	VERB
ap-5383	178	48	with	with	ADP
ap-5383	178	49	argon	argon	NOUN
ap-5383	178	50	and	and	CCONJ
ap-5383	178	51	krypton	krypton	PROPN
ap-5383	178	52	5.3	5.3	NUM
ap-5383	178	53	nozzle	nozzle	NOUN
ap-5383	178	54	ageing	age	VERB
ap-5383	178	55	5.4	5.4	NUM
ap-5383	178	56	pressure	pressure	NOUN
ap-5383	178	57	dependence	dependence	NOUN
ap-5383	178	58	of	of	ADP
ap-5383	178	59	mass	mass	ADJ
ap-5383	178	60	density	density	NOUN
ap-5383	178	61	6	6	NUM
ap-5383	178	62	conclusions	conclusion	NOUN
ap-5383	178	63	acknowledgements	acknowledgement	NOUN
ap-5383	178	64	references	reference	NOUN
