id	sid	tid	token	lemma	pos
ap-6855	1	1	acta	acta	PROPN
ap-6855	1	2	polytechnica	polytechnica	PROPN
ap-6855	1	3	https://doi.org/10.14311/ap.2021.61.0684	https://doi.org/10.14311/ap.2021.61.0684	PROPN
ap-6855	1	4	acta	acta	PROPN
ap-6855	1	5	polytechnica	polytechnica	PROPN
ap-6855	1	6	61(6):684–688	61(6):684–688	PROPN
ap-6855	1	7	,	,	PUNCT
ap-6855	1	8	2021	2021	NUM
ap-6855	1	9	©	©	ADP
ap-6855	1	10	2021	2021	NUM
ap-6855	1	11	the	the	DET
ap-6855	1	12	author(s	author(s	NOUN
ap-6855	1	13	)	)	PUNCT
ap-6855	1	14	.	.	PUNCT
ap-6855	2	1	licensed	license	VERB
ap-6855	2	2	under	under	ADP
ap-6855	2	3	a	a	DET
ap-6855	2	4	cc	cc	NOUN
ap-6855	2	5	-	-	PUNCT
ap-6855	2	6	by	by	ADP
ap-6855	2	7	4.0	4.0	NUM
ap-6855	2	8	licence	licence	NOUN
ap-6855	2	9	published	publish	VERB
ap-6855	2	10	by	by	ADP
ap-6855	2	11	the	the	DET
ap-6855	2	12	czech	czech	PROPN
ap-6855	2	13	technical	technical	PROPN
ap-6855	2	14	university	university	PROPN
ap-6855	2	15	in	in	ADP
ap-6855	2	16	prague	prague	PROPN
ap-6855	2	17	delamination	delamination	NOUN
ap-6855	2	18	of	of	ADP
ap-6855	2	19	polyimide	polyimide	NOUN
ap-6855	2	20	in	in	ADP
ap-6855	2	21	hydrofluoric	hydrofluoric	ADJ
ap-6855	2	22	acid	acid	NOUN
ap-6855	2	23	asaad	asaad	PROPN
ap-6855	2	24	k.	k.	PROPN
ap-6855	2	25	edaan	edaan	PROPN
ap-6855	3	1	al	al	PROPN
ap-6855	3	2	-	-	PUNCT
ap-6855	3	3	mashaala,∗	mashaala,∗	PROPN
ap-6855	3	4	,	,	PUNCT
ap-6855	3	5	rebecca	rebecca	NOUN
ap-6855	3	6	cheungb	cheungb	VERB
ap-6855	3	7	a	a	DET
ap-6855	3	8	university	university	NOUN
ap-6855	3	9	of	of	ADP
ap-6855	3	10	basrah	basrah	PROPN
ap-6855	3	11	,	,	PUNCT
ap-6855	3	12	polymer	polymer	NOUN
ap-6855	3	13	research	research	NOUN
ap-6855	3	14	centre	centre	NOUN
ap-6855	3	15	,	,	PUNCT
ap-6855	3	16	material	material	NOUN
ap-6855	3	17	science	science	PROPN
ap-6855	3	18	department	department	PROPN
ap-6855	3	19	,	,	PUNCT
ap-6855	3	20	basrah	basrah	PROPN
ap-6855	3	21	,	,	PUNCT
ap-6855	3	22	61004	61004	NUM
ap-6855	3	23	,	,	PUNCT
ap-6855	3	24	iraq	iraq	PROPN
ap-6855	3	25	b	b	PROPN
ap-6855	3	26	the	the	DET
ap-6855	3	27	university	university	PROPN
ap-6855	3	28	of	of	ADP
ap-6855	3	29	edinburgh	edinburgh	PROPN
ap-6855	3	30	,	,	PUNCT
ap-6855	3	31	scottish	scottish	ADJ
ap-6855	3	32	microelectronics	microelectronic	NOUN
ap-6855	3	33	centre	centre	NOUN
ap-6855	3	34	,	,	PUNCT
ap-6855	3	35	school	school	NOUN
ap-6855	3	36	of	of	ADP
ap-6855	3	37	engineering	engineering	PROPN
ap-6855	3	38	,	,	PUNCT
ap-6855	3	39	edinburgh	edinburgh	PROPN
ap-6855	3	40	eh9	eh9	PROPN
ap-6855	3	41	3ff	3ff	PROPN
ap-6855	3	42	,	,	PUNCT
ap-6855	3	43	uk	uk	PROPN
ap-6855	3	44	∗	∗	NOUN
ap-6855	3	45	corresponding	correspond	VERB
ap-6855	3	46	author	author	NOUN
ap-6855	3	47	:	:	PUNCT
ap-6855	3	48	asaad.edaan@uobasrah.edu.iq	asaad.edaan@uobasrah.edu.iq	ADJ
ap-6855	3	49	abstract	abstract	NOUN
ap-6855	3	50	.	.	PUNCT
ap-6855	4	1	wet	wet	ADJ
ap-6855	4	2	etching	etch	VERB
ap-6855	4	3	is	be	AUX
ap-6855	4	4	a	a	DET
ap-6855	4	5	critical	critical	ADJ
ap-6855	4	6	fabrication	fabrication	NOUN
ap-6855	4	7	step	step	NOUN
ap-6855	4	8	for	for	ADP
ap-6855	4	9	the	the	DET
ap-6855	4	10	mass	mass	ADJ
ap-6855	4	11	production	production	NOUN
ap-6855	4	12	of	of	ADP
ap-6855	4	13	micro	micro	ADJ
ap-6855	4	14	and	and	CCONJ
ap-6855	4	15	nanoelectronic	nanoelectronic	PROPN
ap-6855	4	16	devices	device	NOUN
ap-6855	4	17	.	.	PUNCT
ap-6855	5	1	however	however	ADV
ap-6855	5	2	,	,	PUNCT
ap-6855	5	3	when	when	SCONJ
ap-6855	5	4	an	an	DET
ap-6855	5	5	extremely	extremely	ADV
ap-6855	5	6	corrosive	corrosive	ADJ
ap-6855	5	7	acid	acid	NOUN
ap-6855	5	8	such	such	ADJ
ap-6855	5	9	as	as	ADP
ap-6855	5	10	hydrofluoric	hydrofluoric	ADJ
ap-6855	5	11	(	(	PUNCT
ap-6855	5	12	hf	hf	NOUN
ap-6855	5	13	)	)	PUNCT
ap-6855	5	14	acid	acid	NOUN
ap-6855	5	15	are	be	AUX
ap-6855	5	16	used	use	VERB
ap-6855	5	17	during	during	ADP
ap-6855	5	18	etching	etch	VERB
ap-6855	5	19	,	,	PUNCT
ap-6855	5	20	an	an	DET
ap-6855	5	21	undesirable	undesirable	ADJ
ap-6855	5	22	damage	damage	NOUN
ap-6855	5	23	might	might	AUX
ap-6855	5	24	occur	occur	VERB
ap-6855	5	25	if	if	SCONJ
ap-6855	5	26	the	the	DET
ap-6855	5	27	device	device	NOUN
ap-6855	5	28	includes	include	VERB
ap-6855	5	29	a	a	DET
ap-6855	5	30	material	material	NOUN
ap-6855	5	31	that	that	PRON
ap-6855	5	32	is	be	AUX
ap-6855	5	33	not	not	PART
ap-6855	5	34	compatible	compatible	ADJ
ap-6855	5	35	with	with	ADP
ap-6855	5	36	the	the	DET
ap-6855	5	37	acid	acid	NOUN
ap-6855	5	38	.	.	PUNCT
ap-6855	6	1	polyimide	polyimide	ADJ
ap-6855	6	2	thin	thin	ADJ
ap-6855	6	3	films	film	NOUN
ap-6855	6	4	can	can	AUX
ap-6855	6	5	serve	serve	VERB
ap-6855	6	6	as	as	ADP
ap-6855	6	7	sacrificial	sacrificial	ADJ
ap-6855	6	8	/	/	SYM
ap-6855	6	9	structural	structural	ADJ
ap-6855	6	10	layers	layer	NOUN
ap-6855	6	11	to	to	PART
ap-6855	6	12	fabricate	fabricate	VERB
ap-6855	6	13	freestanding	freestanding	NOUN
ap-6855	6	14	or	or	CCONJ
ap-6855	6	15	flexible	flexible	ADJ
ap-6855	6	16	devices	device	NOUN
ap-6855	6	17	.	.	PUNCT
ap-6855	7	1	the	the	DET
ap-6855	7	2	importance	importance	NOUN
ap-6855	7	3	of	of	ADP
ap-6855	7	4	polyimide	polyimide	NOUN
ap-6855	7	5	in	in	ADP
ap-6855	7	6	microelectronics	microelectronic	NOUN
ap-6855	7	7	is	be	AUX
ap-6855	7	8	due	due	ADJ
ap-6855	7	9	to	to	ADP
ap-6855	7	10	its	its	PRON
ap-6855	7	11	relatively	relatively	ADV
ap-6855	7	12	low	low	ADJ
ap-6855	7	13	stress	stress	NOUN
ap-6855	7	14	and	and	CCONJ
ap-6855	7	15	compatibility	compatibility	NOUN
ap-6855	7	16	with	with	ADP
ap-6855	7	17	standard	standard	ADJ
ap-6855	7	18	micromachining	micromachine	VERB
ap-6855	7	19	processes	process	NOUN
ap-6855	7	20	.	.	PUNCT
ap-6855	8	1	in	in	ADP
ap-6855	8	2	this	this	DET
ap-6855	8	3	work	work	NOUN
ap-6855	8	4	,	,	PUNCT
ap-6855	8	5	a	a	DET
ap-6855	8	6	fast	fast	ADJ
ap-6855	8	7	delamination	delamination	NOUN
ap-6855	8	8	process	process	NOUN
ap-6855	8	9	of	of	ADP
ap-6855	8	10	a	a	DET
ap-6855	8	11	4-µm	4-µm	NOUN
ap-6855	8	12	-	-	PUNCT
ap-6855	8	13	thin	thin	ADJ
ap-6855	8	14	film	film	NOUN
ap-6855	8	15	of	of	ADP
ap-6855	8	16	polyimide	polyimide	NOUN
ap-6855	8	17	from	from	ADP
ap-6855	8	18	a	a	DET
ap-6855	8	19	silicon	silicon	NOUN
ap-6855	8	20	substrate	substrate	NOUN
ap-6855	8	21	has	have	AUX
ap-6855	8	22	been	be	AUX
ap-6855	8	23	demonstrated	demonstrate	VERB
ap-6855	8	24	.	.	PUNCT
ap-6855	9	1	the	the	DET
ap-6855	9	2	films	film	NOUN
ap-6855	9	3	’	’	PART
ap-6855	9	4	detachment	detachment	NOUN
ap-6855	9	5	has	have	AUX
ap-6855	9	6	been	be	AUX
ap-6855	9	7	performed	perform	VERB
ap-6855	9	8	using	use	VERB
ap-6855	9	9	a	a	DET
ap-6855	9	10	wet	wet	NOUN
ap-6855	9	11	-	-	PUNCT
ap-6855	9	12	based	base	VERB
ap-6855	9	13	etchant	etchant	NOUN
ap-6855	9	14	of	of	ADP
ap-6855	9	15	hf	hf	PROPN
ap-6855	9	16	acid	acid	NOUN
ap-6855	9	17	.	.	PUNCT
ap-6855	10	1	specifically	specifically	ADV
ap-6855	10	2	,	,	PUNCT
ap-6855	10	3	the	the	DET
ap-6855	10	4	effect	effect	NOUN
ap-6855	10	5	of	of	ADP
ap-6855	10	6	hf	hf	ADJ
ap-6855	10	7	concentration	concentration	NOUN
ap-6855	10	8	on	on	ADP
ap-6855	10	9	the	the	DET
ap-6855	10	10	delamination	delamination	NOUN
ap-6855	10	11	time	time	NOUN
ap-6855	10	12	required	require	VERB
ap-6855	10	13	to	to	PART
ap-6855	10	14	detach	detach	VERB
ap-6855	10	15	the	the	DET
ap-6855	10	16	polyimide	polyimide	ADJ
ap-6855	10	17	film	film	NOUN
ap-6855	10	18	from	from	ADP
ap-6855	10	19	the	the	DET
ap-6855	10	20	substrate	substrate	NOUN
ap-6855	10	21	has	have	AUX
ap-6855	10	22	been	be	AUX
ap-6855	10	23	investigated	investigate	VERB
ap-6855	10	24	.	.	PUNCT
ap-6855	11	1	this	this	DET
ap-6855	11	2	study	study	NOUN
ap-6855	11	3	is	be	AUX
ap-6855	11	4	intended	intend	VERB
ap-6855	11	5	to	to	PART
ap-6855	11	6	provide	provide	VERB
ap-6855	11	7	the	the	DET
ap-6855	11	8	information	information	NOUN
ap-6855	11	9	on	on	ADP
ap-6855	11	10	the	the	DET
ap-6855	11	11	compatibility	compatibility	NOUN
ap-6855	11	12	of	of	ADP
ap-6855	11	13	using	use	VERB
ap-6855	11	14	polyimide	polyimide	ADJ
ap-6855	11	15	films	film	NOUN
ap-6855	11	16	with	with	ADP
ap-6855	11	17	hf	hf	PROPN
ap-6855	11	18	,	,	PUNCT
ap-6855	11	19	which	which	PRON
ap-6855	11	20	can	can	AUX
ap-6855	11	21	help	help	VERB
ap-6855	11	22	in	in	ADP
ap-6855	11	23	the	the	DET
ap-6855	11	24	design	design	NOUN
ap-6855	11	25	and	and	CCONJ
ap-6855	11	26	fabrication	fabrication	NOUN
ap-6855	11	27	of	of	ADP
ap-6855	11	28	polyimide	polyimide	NOUN
ap-6855	11	29	-	-	PUNCT
ap-6855	11	30	based	base	VERB
ap-6855	11	31	devices	device	NOUN
ap-6855	11	32	.	.	PUNCT
ap-6855	12	1	keywords	keyword	NOUN
ap-6855	12	2	:	:	PUNCT
ap-6855	12	3	polyimide	polyimide	ADJ
ap-6855	12	4	,	,	PUNCT
ap-6855	12	5	delamination	delamination	NOUN
ap-6855	12	6	,	,	PUNCT
ap-6855	12	7	wet	wet	ADJ
ap-6855	12	8	etching	etch	VERB
ap-6855	12	9	,	,	PUNCT
ap-6855	12	10	hydrofluoric	hydrofluoric	ADJ
ap-6855	12	11	acid	acid	NOUN
ap-6855	12	12	.	.	PUNCT
ap-6855	13	1	1	1	X
ap-6855	13	2	.	.	X
ap-6855	13	3	introduction	introduction	NOUN
ap-6855	13	4	the	the	DET
ap-6855	13	5	fabrication	fabrication	NOUN
ap-6855	13	6	of	of	ADP
ap-6855	13	7	microelectronic	microelectronic	ADJ
ap-6855	13	8	devices	device	NOUN
ap-6855	13	9	and	and	CCONJ
ap-6855	13	10	their	their	PRON
ap-6855	13	11	subsets	subset	NOUN
ap-6855	13	12	involves	involve	VERB
ap-6855	13	13	the	the	DET
ap-6855	13	14	use	use	NOUN
ap-6855	13	15	of	of	ADP
ap-6855	13	16	a	a	DET
ap-6855	13	17	range	range	NOUN
ap-6855	13	18	of	of	ADP
ap-6855	13	19	acids	acid	NOUN
ap-6855	13	20	,	,	PUNCT
ap-6855	13	21	organic	organic	ADJ
ap-6855	13	22	/	/	SYM
ap-6855	13	23	inorganic	inorganic	ADJ
ap-6855	13	24	polymers	polymer	NOUN
ap-6855	13	25	,	,	PUNCT
ap-6855	13	26	metals	metal	NOUN
ap-6855	13	27	,	,	PUNCT
ap-6855	13	28	and	and	CCONJ
ap-6855	13	29	semiconductor	semiconductor	NOUN
ap-6855	13	30	materials	material	NOUN
ap-6855	13	31	.	.	PUNCT
ap-6855	14	1	the	the	DET
ap-6855	14	2	fabrication	fabrication	NOUN
ap-6855	14	3	process	process	NOUN
ap-6855	14	4	includes	include	VERB
ap-6855	14	5	several	several	ADJ
ap-6855	14	6	steps	step	NOUN
ap-6855	14	7	,	,	PUNCT
ap-6855	14	8	such	such	ADJ
ap-6855	14	9	as	as	ADP
ap-6855	14	10	deposition	deposition	NOUN
ap-6855	14	11	,	,	PUNCT
ap-6855	14	12	photolithography	photolithography	NOUN
ap-6855	14	13	,	,	PUNCT
ap-6855	14	14	and	and	CCONJ
ap-6855	14	15	etching	etch	VERB
ap-6855	14	16	.	.	PUNCT
ap-6855	15	1	for	for	ADP
ap-6855	15	2	example	example	NOUN
ap-6855	15	3	,	,	PUNCT
ap-6855	15	4	it	it	PRON
ap-6855	15	5	is	be	AUX
ap-6855	15	6	common	common	ADJ
ap-6855	15	7	in	in	ADP
ap-6855	15	8	the	the	DET
ap-6855	15	9	fabrication	fabrication	NOUN
ap-6855	15	10	of	of	ADP
ap-6855	15	11	microelectromechanical	microelectromechanical	ADJ
ap-6855	15	12	systems	system	NOUN
ap-6855	15	13	(	(	PUNCT
ap-6855	15	14	mems	mem	NOUN
ap-6855	15	15	)	)	PUNCT
ap-6855	15	16	that	that	SCONJ
ap-6855	15	17	a	a	DET
ap-6855	15	18	sacrificial	sacrificial	ADJ
ap-6855	15	19	layer	layer	NOUN
ap-6855	15	20	of	of	ADP
ap-6855	15	21	a	a	DET
ap-6855	15	22	material	material	NOUN
ap-6855	15	23	of	of	ADP
ap-6855	15	24	interest	interest	NOUN
ap-6855	15	25	is	be	AUX
ap-6855	15	26	deposited	deposit	VERB
ap-6855	15	27	on	on	ADP
ap-6855	15	28	a	a	DET
ap-6855	15	29	substrate	substrate	NOUN
ap-6855	15	30	before	before	SCONJ
ap-6855	15	31	it	it	PRON
ap-6855	15	32	is	be	AUX
ap-6855	15	33	subsequently	subsequently	ADV
ap-6855	15	34	removed	remove	VERB
ap-6855	15	35	by	by	ADP
ap-6855	15	36	a	a	DET
ap-6855	15	37	specific	specific	ADJ
ap-6855	15	38	type	type	NOUN
ap-6855	15	39	of	of	ADP
ap-6855	15	40	etchants	etchant	NOUN
ap-6855	15	41	.	.	PUNCT
ap-6855	16	1	however	however	ADV
ap-6855	16	2	,	,	PUNCT
ap-6855	16	3	there	there	PRON
ap-6855	16	4	might	might	AUX
ap-6855	16	5	be	be	AUX
ap-6855	16	6	a	a	DET
ap-6855	16	7	considerable	considerable	ADJ
ap-6855	16	8	reliability	reliability	NOUN
ap-6855	16	9	concern	concern	NOUN
ap-6855	16	10	when	when	SCONJ
ap-6855	16	11	the	the	DET
ap-6855	16	12	materials	material	NOUN
ap-6855	16	13	/	/	SYM
ap-6855	16	14	processes	process	NOUN
ap-6855	16	15	used	use	VERB
ap-6855	16	16	in	in	ADP
ap-6855	16	17	the	the	DET
ap-6855	16	18	fabrication	fabrication	NOUN
ap-6855	16	19	are	be	AUX
ap-6855	16	20	not	not	PART
ap-6855	16	21	compatible	compatible	ADJ
ap-6855	16	22	with	with	ADP
ap-6855	16	23	each	each	DET
ap-6855	16	24	other	other	ADJ
ap-6855	16	25	[	[	X
ap-6855	16	26	1	1	NUM
ap-6855	16	27	]	]	PUNCT
ap-6855	16	28	.	.	PUNCT
ap-6855	17	1	the	the	DET
ap-6855	17	2	incompatibility	incompatibility	NOUN
ap-6855	17	3	could	could	AUX
ap-6855	17	4	result	result	VERB
ap-6855	17	5	from	from	ADP
ap-6855	17	6	fabrication	fabrication	NOUN
ap-6855	17	7	processes	process	NOUN
ap-6855	17	8	that	that	PRON
ap-6855	17	9	require	require	VERB
ap-6855	17	10	the	the	DET
ap-6855	17	11	use	use	NOUN
ap-6855	17	12	of	of	ADP
ap-6855	17	13	chemicals	chemical	NOUN
ap-6855	17	14	and	and	CCONJ
ap-6855	17	15	materials	material	NOUN
ap-6855	17	16	with	with	ADP
ap-6855	17	17	different	different	ADJ
ap-6855	17	18	properties	property	NOUN
ap-6855	17	19	[	[	X
ap-6855	17	20	2	2	NUM
ap-6855	17	21	]	]	PUNCT
ap-6855	17	22	.	.	PUNCT
ap-6855	18	1	in	in	ADP
ap-6855	18	2	this	this	DET
ap-6855	18	3	work	work	NOUN
ap-6855	18	4	,	,	PUNCT
ap-6855	18	5	we	we	PRON
ap-6855	18	6	focus	focus	VERB
ap-6855	18	7	on	on	ADP
ap-6855	18	8	determining	determine	VERB
ap-6855	18	9	whether	whether	SCONJ
ap-6855	18	10	the	the	DET
ap-6855	18	11	application	application	NOUN
ap-6855	18	12	of	of	ADP
ap-6855	18	13	a	a	DET
ap-6855	18	14	layer	layer	NOUN
ap-6855	18	15	of	of	ADP
ap-6855	18	16	polyimide	polyimide	NOUN
ap-6855	18	17	is	be	AUX
ap-6855	18	18	fully	fully	ADV
ap-6855	18	19	compatible	compatible	ADJ
ap-6855	18	20	with	with	ADP
ap-6855	18	21	the	the	DET
ap-6855	18	22	etching	etch	VERB
ap-6855	18	23	process	process	NOUN
ap-6855	18	24	when	when	SCONJ
ap-6855	18	25	a	a	DET
ap-6855	18	26	wet	wet	NOUN
ap-6855	18	27	-	-	PUNCT
ap-6855	18	28	based	base	VERB
ap-6855	18	29	etchant	etchant	NOUN
ap-6855	18	30	of	of	ADP
ap-6855	18	31	hydrofluoric	hydrofluoric	ADJ
ap-6855	18	32	(	(	PUNCT
ap-6855	18	33	hf	hf	NOUN
ap-6855	18	34	)	)	PUNCT
ap-6855	18	35	acid	acid	NOUN
ap-6855	18	36	is	be	AUX
ap-6855	18	37	used	use	VERB
ap-6855	18	38	during	during	ADP
ap-6855	18	39	the	the	DET
ap-6855	18	40	fabrication	fabrication	NOUN
ap-6855	18	41	process	process	NOUN
ap-6855	18	42	.	.	PUNCT
ap-6855	19	1	polymers	polymer	NOUN
ap-6855	19	2	play	play	VERB
ap-6855	19	3	a	a	DET
ap-6855	19	4	crucial	crucial	ADJ
ap-6855	19	5	role	role	NOUN
ap-6855	19	6	as	as	ADP
ap-6855	19	7	essential	essential	ADJ
ap-6855	19	8	functional	functional	ADJ
ap-6855	19	9	and	and	CCONJ
ap-6855	19	10	structural	structural	ADJ
ap-6855	19	11	materials	material	NOUN
ap-6855	19	12	in	in	ADP
ap-6855	19	13	modern	modern	ADJ
ap-6855	19	14	micromachining	micromachining	NOUN
ap-6855	19	15	technologies	technology	NOUN
ap-6855	19	16	[	[	X
ap-6855	19	17	3	3	NUM
ap-6855	19	18	]	]	PUNCT
ap-6855	19	19	.	.	PUNCT
ap-6855	20	1	one	one	NUM
ap-6855	20	2	of	of	ADP
ap-6855	20	3	the	the	DET
ap-6855	20	4	polymeric	polymeric	ADJ
ap-6855	20	5	materials	material	NOUN
ap-6855	20	6	that	that	PRON
ap-6855	20	7	have	have	AUX
ap-6855	20	8	found	find	VERB
ap-6855	20	9	their	their	PRON
ap-6855	20	10	way	way	NOUN
ap-6855	20	11	to	to	ADP
ap-6855	20	12	several	several	ADJ
ap-6855	20	13	applications	application	NOUN
ap-6855	20	14	,	,	PUNCT
ap-6855	20	15	especially	especially	ADV
ap-6855	20	16	in	in	ADP
ap-6855	20	17	microelectronics	microelectronic	NOUN
ap-6855	20	18	and	and	CCONJ
ap-6855	20	19	mems	mem	NOUN
ap-6855	20	20	devices	device	NOUN
ap-6855	20	21	,	,	PUNCT
ap-6855	20	22	is	be	AUX
ap-6855	20	23	polyimide	polyimide	ADJ
ap-6855	20	24	.	.	PUNCT
ap-6855	21	1	the	the	DET
ap-6855	21	2	importance	importance	NOUN
ap-6855	21	3	of	of	ADP
ap-6855	21	4	polyimide	polyimide	NOUN
ap-6855	21	5	films	film	NOUN
ap-6855	21	6	is	be	AUX
ap-6855	21	7	due	due	ADJ
ap-6855	21	8	to	to	ADP
ap-6855	21	9	their	their	PRON
ap-6855	21	10	outstanding	outstanding	ADJ
ap-6855	21	11	thermal	thermal	NOUN
ap-6855	21	12	,	,	PUNCT
ap-6855	21	13	mechanical	mechanical	ADJ
ap-6855	21	14	,	,	PUNCT
ap-6855	21	15	and	and	CCONJ
ap-6855	21	16	chemical	chemical	NOUN
ap-6855	21	17	properties	property	NOUN
ap-6855	21	18	.	.	PUNCT
ap-6855	22	1	for	for	ADP
ap-6855	22	2	example	example	NOUN
ap-6855	22	3	,	,	PUNCT
ap-6855	22	4	the	the	DET
ap-6855	22	5	low	low	ADJ
ap-6855	22	6	modulus	modulus	NOUN
ap-6855	22	7	,	,	PUNCT
ap-6855	22	8	high	high	ADJ
ap-6855	22	9	mechanical	mechanical	ADJ
ap-6855	22	10	strength	strength	NOUN
ap-6855	22	11	and	and	CCONJ
ap-6855	22	12	high	high	ADJ
ap-6855	22	13	thermal	thermal	ADJ
ap-6855	22	14	stability	stability	NOUN
ap-6855	22	15	have	have	AUX
ap-6855	22	16	enabled	enable	VERB
ap-6855	22	17	the	the	DET
ap-6855	22	18	polyimide	polyimide	ADJ
ap-6855	22	19	films	film	NOUN
ap-6855	22	20	to	to	PART
ap-6855	22	21	be	be	AUX
ap-6855	22	22	used	use	VERB
ap-6855	22	23	as	as	ADP
ap-6855	22	24	sacrificial	sacrificial	ADJ
ap-6855	22	25	layers	layer	NOUN
ap-6855	22	26	in	in	ADP
ap-6855	22	27	suspended	suspend	VERB
ap-6855	22	28	mems	mem	NOUN
ap-6855	22	29	-	-	PUNCT
ap-6855	22	30	based	base	VERB
ap-6855	22	31	structures	structure	NOUN
ap-6855	22	32	[	[	X
ap-6855	22	33	4	4	NUM
ap-6855	22	34	,	,	PUNCT
ap-6855	22	35	5	5	NUM
ap-6855	22	36	]	]	PUNCT
ap-6855	22	37	.	.	PUNCT
ap-6855	23	1	another	another	DET
ap-6855	23	2	important	important	ADJ
ap-6855	23	3	application	application	NOUN
ap-6855	23	4	of	of	ADP
ap-6855	23	5	polyimide	polyimide	NOUN
ap-6855	23	6	-	-	PUNCT
ap-6855	23	7	based	base	VERB
ap-6855	23	8	layers	layer	NOUN
ap-6855	23	9	is	be	AUX
ap-6855	23	10	their	their	PRON
ap-6855	23	11	use	use	NOUN
ap-6855	23	12	as	as	ADP
ap-6855	23	13	active	active	ADJ
ap-6855	23	14	structural	structural	ADJ
ap-6855	23	15	components	component	NOUN
ap-6855	23	16	in	in	ADP
ap-6855	23	17	mems	mems	ADJ
ap-6855	23	18	sensors	sensor	NOUN
ap-6855	23	19	and	and	CCONJ
ap-6855	23	20	resonators	resonator	NOUN
ap-6855	23	21	[	[	X
ap-6855	23	22	6–8	6–8	X
ap-6855	23	23	]	]	X
ap-6855	23	24	.	.	PUNCT
ap-6855	24	1	in	in	ADP
ap-6855	24	2	addition	addition	NOUN
ap-6855	24	3	to	to	ADP
ap-6855	24	4	their	their	PRON
ap-6855	24	5	main	main	ADJ
ap-6855	24	6	function	function	NOUN
ap-6855	24	7	as	as	ADP
ap-6855	24	8	dielectric	dielectric	NOUN
ap-6855	24	9	,	,	PUNCT
ap-6855	24	10	alignment	alignment	NOUN
ap-6855	24	11	,	,	PUNCT
ap-6855	24	12	passivation	passivation	NOUN
ap-6855	24	13	and	and	CCONJ
ap-6855	24	14	insulator	insulator	NOUN
ap-6855	24	15	layers	layer	NOUN
ap-6855	24	16	[	[	X
ap-6855	24	17	9	9	NUM
ap-6855	24	18	]	]	PUNCT
ap-6855	24	19	,	,	PUNCT
ap-6855	24	20	polyimides	polyimide	NOUN
ap-6855	24	21	have	have	VERB
ap-6855	24	22	other	other	ADJ
ap-6855	24	23	useful	useful	ADJ
ap-6855	24	24	applications	application	NOUN
ap-6855	24	25	such	such	ADJ
ap-6855	24	26	as	as	ADP
ap-6855	24	27	a	a	DET
ap-6855	24	28	flexible	flexible	ADJ
ap-6855	24	29	substrate	substrate	NOUN
ap-6855	24	30	for	for	ADP
ap-6855	24	31	different	different	ADJ
ap-6855	24	32	types	type	NOUN
ap-6855	24	33	of	of	ADP
ap-6855	24	34	soft	soft	ADJ
ap-6855	24	35	devices	device	NOUN
ap-6855	25	1	[	[	X
ap-6855	25	2	10–12	10–12	NUM
ap-6855	25	3	]	]	PUNCT
ap-6855	25	4	.	.	PUNCT
ap-6855	26	1	hydrofluoric	hydrofluoric	ADJ
ap-6855	26	2	acid	acid	NOUN
ap-6855	26	3	(	(	PUNCT
ap-6855	26	4	hf	hf	NOUN
ap-6855	26	5	)	)	PUNCT
ap-6855	26	6	is	be	AUX
ap-6855	26	7	one	one	NUM
ap-6855	26	8	of	of	ADP
ap-6855	26	9	the	the	DET
ap-6855	26	10	most	most	ADV
ap-6855	26	11	widely	widely	ADV
ap-6855	26	12	used	use	VERB
ap-6855	26	13	etchants	etchant	NOUN
ap-6855	26	14	in	in	ADP
ap-6855	26	15	manufacturing	manufacturing	NOUN
ap-6855	26	16	industries	industry	NOUN
ap-6855	26	17	.	.	PUNCT
ap-6855	27	1	despite	despite	SCONJ
ap-6855	27	2	the	the	DET
ap-6855	27	3	fact	fact	NOUN
ap-6855	27	4	that	that	SCONJ
ap-6855	27	5	etching	etch	VERB
ap-6855	27	6	in	in	ADP
ap-6855	27	7	hf	hf	PROPN
ap-6855	27	8	is	be	AUX
ap-6855	27	9	a	a	DET
ap-6855	27	10	wet	wet	ADJ
ap-6855	27	11	process	process	NOUN
ap-6855	27	12	,	,	PUNCT
ap-6855	27	13	which	which	PRON
ap-6855	27	14	may	may	AUX
ap-6855	27	15	have	have	VERB
ap-6855	27	16	a	a	DET
ap-6855	27	17	number	number	NOUN
ap-6855	27	18	of	of	ADP
ap-6855	27	19	drawbacks	drawback	NOUN
ap-6855	27	20	,	,	PUNCT
ap-6855	27	21	it	it	PRON
ap-6855	27	22	is	be	AUX
ap-6855	27	23	still	still	ADV
ap-6855	27	24	considered	consider	VERB
ap-6855	27	25	as	as	ADP
ap-6855	27	26	a	a	DET
ap-6855	27	27	highly	highly	ADV
ap-6855	27	28	preferred	preferred	ADJ
ap-6855	27	29	etching	etch	VERB
ap-6855	27	30	process	process	NOUN
ap-6855	27	31	because	because	SCONJ
ap-6855	27	32	of	of	ADP
ap-6855	27	33	the	the	DET
ap-6855	27	34	high	high	ADJ
ap-6855	27	35	etch	etch	NOUN
ap-6855	27	36	rate	rate	NOUN
ap-6855	27	37	and	and	CCONJ
ap-6855	27	38	compatibility	compatibility	NOUN
ap-6855	27	39	with	with	ADP
ap-6855	27	40	batch	batch	NOUN
ap-6855	27	41	fabrication	fabrication	NOUN
ap-6855	27	42	processes	process	NOUN
ap-6855	27	43	[	[	X
ap-6855	27	44	13	13	NUM
ap-6855	27	45	,	,	PUNCT
ap-6855	27	46	14	14	NUM
ap-6855	27	47	]	]	PUNCT
ap-6855	27	48	.	.	PUNCT
ap-6855	28	1	however	however	ADV
ap-6855	28	2	,	,	PUNCT
ap-6855	28	3	there	there	PRON
ap-6855	28	4	seems	seem	VERB
ap-6855	28	5	to	to	PART
ap-6855	28	6	be	be	AUX
ap-6855	28	7	a	a	DET
ap-6855	28	8	delamination	delamination	NOUN
ap-6855	28	9	issue	issue	NOUN
ap-6855	28	10	with	with	ADP
ap-6855	28	11	the	the	DET
ap-6855	28	12	use	use	NOUN
ap-6855	28	13	of	of	ADP
ap-6855	28	14	hf	hf	ADJ
ap-6855	28	15	solution	solution	NOUN
ap-6855	28	16	when	when	SCONJ
ap-6855	28	17	a	a	DET
ap-6855	28	18	layer	layer	NOUN
ap-6855	28	19	of	of	ADP
ap-6855	28	20	polyimide	polyimide	NOUN
ap-6855	28	21	is	be	AUX
ap-6855	28	22	attached	attach	VERB
ap-6855	28	23	to	to	ADP
ap-6855	28	24	a	a	DET
ap-6855	28	25	silicon	silicon	NOUN
ap-6855	28	26	substrate	substrate	NOUN
ap-6855	28	27	.	.	PUNCT
ap-6855	29	1	the	the	DET
ap-6855	29	2	delamination	delamination	NOUN
ap-6855	29	3	of	of	ADP
ap-6855	29	4	the	the	DET
ap-6855	29	5	polyimide	polyimide	ADJ
ap-6855	29	6	film	film	NOUN
ap-6855	29	7	occurs	occur	VERB
ap-6855	29	8	when	when	SCONJ
ap-6855	29	9	the	the	DET
ap-6855	29	10	reacting	react	VERB
ap-6855	29	11	ions	ion	NOUN
ap-6855	29	12	of	of	ADP
ap-6855	29	13	the	the	DET
ap-6855	29	14	hf	hf	ADJ
ap-6855	29	15	solution	solution	NOUN
ap-6855	29	16	are	be	AUX
ap-6855	29	17	diffused	diffuse	VERB
ap-6855	29	18	into	into	ADP
ap-6855	29	19	the	the	DET
ap-6855	29	20	interfacial	interfacial	ADJ
ap-6855	29	21	area	area	NOUN
ap-6855	29	22	between	between	ADP
ap-6855	29	23	the	the	DET
ap-6855	29	24	polyimide	polyimide	ADJ
ap-6855	29	25	film	film	NOUN
ap-6855	29	26	and	and	CCONJ
ap-6855	29	27	the	the	DET
ap-6855	29	28	substrate	substrate	NOUN
ap-6855	29	29	.	.	PUNCT
ap-6855	30	1	although	although	SCONJ
ap-6855	30	2	a	a	DET
ap-6855	30	3	number	number	NOUN
ap-6855	30	4	of	of	ADP
ap-6855	30	5	studies	study	NOUN
ap-6855	30	6	have	have	AUX
ap-6855	30	7	been	be	AUX
ap-6855	30	8	reported	report	VERB
ap-6855	30	9	on	on	ADP
ap-6855	30	10	both	both	CCONJ
ap-6855	30	11	wet	wet	ADJ
ap-6855	30	12	[	[	X
ap-6855	30	13	15	15	NUM
ap-6855	30	14	,	,	PUNCT
ap-6855	30	15	16	16	NUM
ap-6855	30	16	]	]	PUNCT
ap-6855	30	17	and	and	CCONJ
ap-6855	30	18	dry	dry	ADJ
ap-6855	30	19	[	[	X
ap-6855	30	20	17–19	17–19	NOUN
ap-6855	30	21	]	]	SYM
ap-6855	30	22	etching	etching	NOUN
ap-6855	30	23	of	of	ADP
ap-6855	30	24	polyimides	polyimide	NOUN
ap-6855	30	25	,	,	PUNCT
ap-6855	30	26	the	the	DET
ap-6855	30	27	delamination	delamination	NOUN
ap-6855	30	28	of	of	ADP
ap-6855	30	29	polyimide	polyimide	NOUN
ap-6855	30	30	films	film	NOUN
ap-6855	30	31	,	,	PUNCT
ap-6855	30	32	especially	especially	ADV
ap-6855	30	33	in	in	ADP
ap-6855	30	34	hf	hf	ADV
ap-6855	30	35	-	-	PUNCT
ap-6855	30	36	based	base	VERB
ap-6855	30	37	etchant	etchant	NOUN
ap-6855	30	38	solutions	solution	NOUN
ap-6855	30	39	,	,	PUNCT
ap-6855	30	40	has	have	AUX
ap-6855	30	41	not	not	PART
ap-6855	30	42	been	be	AUX
ap-6855	30	43	investigated	investigate	VERB
ap-6855	30	44	yet	yet	ADV
ap-6855	30	45	.	.	PUNCT
ap-6855	31	1	the	the	DET
ap-6855	31	2	purpose	purpose	NOUN
ap-6855	31	3	of	of	ADP
ap-6855	31	4	the	the	DET
ap-6855	31	5	current	current	ADJ
ap-6855	31	6	paper	paper	NOUN
ap-6855	31	7	is	be	AUX
ap-6855	31	8	to	to	PART
ap-6855	31	9	demonstrate	demonstrate	VERB
ap-6855	31	10	the	the	DET
ap-6855	31	11	detachment	detachment	NOUN
ap-6855	31	12	of	of	ADP
ap-6855	31	13	a	a	DET
ap-6855	31	14	thin	thin	ADJ
ap-6855	31	15	film	film	NOUN
ap-6855	31	16	of	of	ADP
ap-6855	31	17	polyimide	polyimide	NOUN
ap-6855	31	18	from	from	ADP
ap-6855	31	19	a	a	DET
ap-6855	31	20	rigid	rigid	ADJ
ap-6855	31	21	silicon	silicon	NOUN
ap-6855	31	22	substrate	substrate	NOUN
ap-6855	31	23	.	.	PUNCT
ap-6855	32	1	particularly	particularly	ADV
ap-6855	32	2	,	,	PUNCT
ap-6855	32	3	we	we	PRON
ap-6855	32	4	have	have	AUX
ap-6855	32	5	investigated	investigate	VERB
ap-6855	32	6	how	how	SCONJ
ap-6855	32	7	the	the	DET
ap-6855	32	8	concentration	concentration	NOUN
ap-6855	32	9	of	of	ADP
ap-6855	32	10	the	the	DET
ap-6855	32	11	hf	hf	PROPN
ap-6855	32	12	etchant	etchant	PROPN
ap-6855	32	13	affects	affect	VERB
ap-6855	32	14	the	the	DET
ap-6855	32	15	delamination	delamination	NOUN
ap-6855	32	16	time	time	NOUN
ap-6855	32	17	and	and	CCONJ
ap-6855	32	18	etching	etch	VERB
ap-6855	32	19	rate	rate	NOUN
ap-6855	32	20	of	of	ADP
ap-6855	32	21	polyimide	polyimide	NOUN
ap-6855	32	22	films	film	NOUN
ap-6855	32	23	.	.	PUNCT
ap-6855	33	1	the	the	DET
ap-6855	33	2	main	main	ADJ
ap-6855	33	3	motivation	motivation	NOUN
ap-6855	33	4	for	for	ADP
ap-6855	33	5	conducting	conduct	VERB
ap-6855	33	6	this	this	DET
ap-6855	33	7	work	work	NOUN
ap-6855	33	8	is	be	AUX
ap-6855	33	9	to	to	PART
ap-6855	33	10	explore	explore	VERB
ap-6855	33	11	the	the	DET
ap-6855	33	12	possibility	possibility	NOUN
ap-6855	33	13	of	of	ADP
ap-6855	33	14	developing	develop	VERB
ap-6855	33	15	a	a	DET
ap-6855	33	16	fast	fast	ADJ
ap-6855	33	17	release	release	NOUN
ap-6855	33	18	process	process	NOUN
ap-6855	33	19	that	that	PRON
ap-6855	33	20	can	can	AUX
ap-6855	33	21	be	be	AUX
ap-6855	33	22	utilised	utilise	VERB
ap-6855	33	23	to	to	PART
ap-6855	33	24	detach	detach	VERB
ap-6855	33	25	a	a	DET
ap-6855	33	26	layer	layer	NOUN
ap-6855	33	27	of	of	ADP
ap-6855	33	28	polyimide	polyimide	NOUN
ap-6855	33	29	from	from	ADP
ap-6855	33	30	a	a	DET
ap-6855	33	31	silicon	silicon	NOUN
ap-6855	33	32	substrate	substrate	NOUN
ap-6855	33	33	without	without	ADP
ap-6855	33	34	damaging	damage	VERB
ap-6855	33	35	the	the	DET
ap-6855	33	36	released	release	VERB
ap-6855	33	37	layer	layer	NOUN
ap-6855	33	38	or	or	CCONJ
ap-6855	33	39	the	the	DET
ap-6855	33	40	substrate	substrate	NOUN
ap-6855	33	41	underneath	underneath	NOUN
ap-6855	33	42	.	.	PUNCT
ap-6855	34	1	this	this	PRON
ap-6855	34	2	is	be	AUX
ap-6855	34	3	important	important	ADJ
ap-6855	34	4	as	as	SCONJ
ap-6855	34	5	it	it	PRON
ap-6855	34	6	can	can	AUX
ap-6855	34	7	help	help	VERB
ap-6855	34	8	in	in	ADP
ap-6855	34	9	realising	realise	VERB
ap-6855	34	10	polyimide	polyimide	NOUN
ap-6855	34	11	-	-	PUNCT
ap-6855	34	12	based	base	VERB
ap-6855	34	13	electronic	electronic	ADJ
ap-6855	34	14	devices	device	NOUN
ap-6855	34	15	.	.	PUNCT
ap-6855	35	1	it	it	PRON
ap-6855	35	2	is	be	AUX
ap-6855	35	3	worth	worth	ADJ
ap-6855	35	4	pointing	point	VERB
ap-6855	35	5	out	out	ADP
ap-6855	35	6	that	that	SCONJ
ap-6855	35	7	the	the	DET
ap-6855	35	8	delamination	delamination	NOUN
ap-6855	35	9	process	process	NOUN
ap-6855	35	10	was	be	AUX
ap-6855	35	11	conducted	conduct	VERB
ap-6855	35	12	in	in	ADP
ap-6855	35	13	a	a	DET
ap-6855	35	14	cleanroom	cleanroom	NOUN
ap-6855	35	15	environment	environment	NOUN
ap-6855	35	16	(	(	PUNCT
ap-6855	35	17	i.	i.	PROPN
ap-6855	35	18	e.	e.	PROPN
ap-6855	35	19	,	,	PUNCT
ap-6855	35	20	room	room	NOUN
ap-6855	35	21	temperature	temperature	NOUN
ap-6855	35	22	and	and	CCONJ
ap-6855	35	23	atmospheric	atmospheric	ADJ
ap-6855	35	24	pressure	pressure	NOUN
ap-6855	35	25	)	)	PUNCT
ap-6855	35	26	.	.	PUNCT
ap-6855	36	1	684	684	NUM
ap-6855	36	2	https://doi.org/10.14311/ap.2021.61.0684	https://doi.org/10.14311/ap.2021.61.0684	PROPN
ap-6855	36	3	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
ap-6855	36	4	https://www.cvut.cz/en	https://www.cvut.cz/en	PROPN
ap-6855	36	5	vol	vol	NOUN
ap-6855	36	6	.	.	PROPN
ap-6855	36	7	61	61	NUM
ap-6855	36	8	no	no	NOUN
ap-6855	36	9	.	.	PUNCT
ap-6855	37	1	6/2021	6/2021	NUM
ap-6855	37	2	delamination	delamination	NOUN
ap-6855	37	3	of	of	ADP
ap-6855	37	4	polyimide	polyimide	NOUN
ap-6855	37	5	in	in	ADP
ap-6855	37	6	hydrofluoric	hydrofluoric	ADJ
ap-6855	37	7	acid	acid	NOUN
ap-6855	37	8	(	(	PUNCT
ap-6855	37	9	a	a	NOUN
ap-6855	37	10	)	)	PUNCT
ap-6855	37	11	.	.	PUNCT
ap-6855	38	1	(	(	PUNCT
ap-6855	38	2	b	b	NOUN
ap-6855	38	3	)	)	PUNCT
ap-6855	38	4	.	.	PUNCT
ap-6855	39	1	(	(	PUNCT
ap-6855	39	2	c	c	NOUN
ap-6855	39	3	)	)	PUNCT
ap-6855	39	4	.	.	PUNCT
ap-6855	40	1	(	(	PUNCT
ap-6855	40	2	d	d	NOUN
ap-6855	40	3	)	)	PUNCT
ap-6855	40	4	.	.	PUNCT
ap-6855	41	1	figure	figure	NOUN
ap-6855	41	2	1	1	NUM
ap-6855	41	3	.	.	PUNCT
ap-6855	41	4	fabrication	fabrication	NOUN
ap-6855	41	5	and	and	CCONJ
ap-6855	41	6	delamination	delamination	NOUN
ap-6855	41	7	processes	process	NOUN
ap-6855	41	8	for	for	ADP
ap-6855	41	9	polyimide	polyimide	ADJ
ap-6855	41	10	films	film	NOUN
ap-6855	41	11	.	.	PUNCT
ap-6855	42	1	(	(	PUNCT
ap-6855	42	2	a	a	X
ap-6855	42	3	)	)	PUNCT
ap-6855	42	4	silicon	silicon	NOUN
ap-6855	42	5	substrate	substrate	NOUN
ap-6855	42	6	cleaned	clean	VERB
ap-6855	42	7	and	and	CCONJ
ap-6855	42	8	primed	prime	VERB
ap-6855	42	9	with	with	ADP
ap-6855	42	10	a	a	DET
ap-6855	42	11	promoter	promoter	NOUN
ap-6855	42	12	of	of	ADP
ap-6855	42	13	vm-652	vm-652	PROPN
ap-6855	42	14	.	.	PUNCT
ap-6855	43	1	(	(	PUNCT
ap-6855	43	2	b	b	X
ap-6855	43	3	)	)	PUNCT
ap-6855	43	4	polyimide	polyimide	NOUN
ap-6855	43	5	spin	spin	NOUN
ap-6855	43	6	coated	coat	VERB
ap-6855	43	7	on	on	ADP
ap-6855	43	8	silicon	silicon	NOUN
ap-6855	43	9	substrate	substrate	NOUN
ap-6855	43	10	and	and	CCONJ
ap-6855	43	11	fully	fully	ADV
ap-6855	43	12	cured	cure	VERB
ap-6855	43	13	.	.	PUNCT
ap-6855	44	1	(	(	PUNCT
ap-6855	44	2	c	c	X
ap-6855	44	3	)	)	PUNCT
ap-6855	44	4	substrate	substrate	NOUN
ap-6855	44	5	with	with	ADP
ap-6855	44	6	polyimide	polyimide	NOUN
ap-6855	44	7	on	on	ADP
ap-6855	44	8	top	top	NOUN
ap-6855	44	9	immersed	immerse	VERB
ap-6855	44	10	in	in	ADP
ap-6855	44	11	hf	hf	ADV
ap-6855	44	12	-	-	PUNCT
ap-6855	44	13	based	base	VERB
ap-6855	44	14	acid	acid	NOUN
ap-6855	44	15	.	.	PUNCT
ap-6855	45	1	(	(	PUNCT
ap-6855	45	2	d	d	X
ap-6855	45	3	)	)	PUNCT
ap-6855	45	4	polyimide	polyimide	ADJ
ap-6855	45	5	film	film	NOUN
ap-6855	45	6	delaminated	delaminate	VERB
ap-6855	45	7	from	from	ADP
ap-6855	45	8	the	the	DET
ap-6855	45	9	substrate	substrate	NOUN
ap-6855	45	10	.	.	PUNCT
ap-6855	46	1	the	the	DET
ap-6855	46	2	chemical	chemical	NOUN
ap-6855	46	3	identity	identity	NOUN
ap-6855	46	4	/	/	SYM
ap-6855	46	5	composition	composition	NOUN
ap-6855	46	6	of	of	ADP
ap-6855	46	7	polyimide	polyimide	NOUN
ap-6855	46	8	(	(	PUNCT
ap-6855	46	9	pi	pi	NOUN
ap-6855	46	10	2611	2611	NUM
ap-6855	46	11	-	-	PUNCT
ap-6855	46	12	hdmicrosystems	hdmicrosystem	NOUN
ap-6855	46	13	)	)	PUNCT
ap-6855	46	14	used	use	VERB
ap-6855	46	15	in	in	ADP
ap-6855	46	16	the	the	DET
ap-6855	46	17	present	present	ADJ
ap-6855	46	18	study	study	NOUN
ap-6855	46	19	is	be	AUX
ap-6855	46	20	n	n	ADV
ap-6855	46	21	-	-	PUNCT
ap-6855	46	22	methyl-2	methyl-2	NOUN
ap-6855	46	23	-	-	NOUN
ap-6855	46	24	pyrrolidone	pyrrolidone	NOUN
ap-6855	46	25	(	(	PUNCT
ap-6855	46	26	85–95	85–95	NUM
ap-6855	46	27	%	%	NOUN
ap-6855	46	28	)	)	PUNCT
ap-6855	46	29	and	and	CCONJ
ap-6855	46	30	polyimide	polyimide	NOUN
ap-6855	46	31	(	(	PUNCT
ap-6855	46	32	10	10	NUM
ap-6855	46	33	–	–	SYM
ap-6855	46	34	20	20	NUM
ap-6855	46	35	%	%	NOUN
ap-6855	46	36	)	)	PUNCT
ap-6855	46	37	.	.	PUNCT
ap-6855	47	1	2	2	X
ap-6855	47	2	.	.	X
ap-6855	47	3	experimental	experimental	ADJ
ap-6855	47	4	a	a	DET
ap-6855	47	5	schematic	schematic	ADJ
ap-6855	47	6	diagram	diagram	NOUN
ap-6855	47	7	of	of	ADP
ap-6855	47	8	the	the	DET
ap-6855	47	9	deposition	deposition	NOUN
ap-6855	47	10	and	and	CCONJ
ap-6855	47	11	delamination	delamination	NOUN
ap-6855	47	12	processes	process	NOUN
ap-6855	47	13	of	of	ADP
ap-6855	47	14	polyimide	polyimide	NOUN
ap-6855	47	15	films	film	NOUN
ap-6855	47	16	is	be	AUX
ap-6855	47	17	shown	show	VERB
ap-6855	47	18	in	in	ADP
ap-6855	47	19	figure	figure	NOUN
ap-6855	47	20	1	1	NUM
ap-6855	47	21	.	.	PUNCT
ap-6855	48	1	firstly	firstly	ADV
ap-6855	48	2	,	,	PUNCT
ap-6855	48	3	a	a	DET
ap-6855	48	4	substrate	substrate	NOUN
ap-6855	48	5	of	of	ADP
ap-6855	48	6	a	a	DET
ap-6855	48	7	p	p	ADJ
ap-6855	48	8	-	-	PUNCT
ap-6855	48	9	type	type	NOUN
ap-6855	48	10	silicon	silicon	NOUN
ap-6855	48	11	wafer	wafer	NOUN
ap-6855	48	12	has	have	AUX
ap-6855	48	13	been	be	AUX
ap-6855	48	14	cleaned	clean	VERB
ap-6855	48	15	in	in	ADP
ap-6855	48	16	acetone	acetone	NOUN
ap-6855	48	17	and	and	CCONJ
ap-6855	48	18	isopropyl	isopropyl	NOUN
ap-6855	48	19	alcohol	alcohol	PROPN
ap-6855	48	20	(	(	PUNCT
ap-6855	48	21	ipa	ipa	PROPN
ap-6855	48	22	)	)	PUNCT
ap-6855	48	23	solvents	solvent	NOUN
ap-6855	48	24	and	and	CCONJ
ap-6855	48	25	treated	treat	VERB
ap-6855	48	26	with	with	ADP
ap-6855	48	27	oxygen	oxygen	NOUN
ap-6855	48	28	plasma	plasma	NOUN
ap-6855	48	29	(	(	PUNCT
ap-6855	48	30	barrel	barrel	NOUN
ap-6855	48	31	asher	asher	PROPN
ap-6855	48	32	)	)	PUNCT
ap-6855	48	33	before	before	ADP
ap-6855	48	34	being	be	AUX
ap-6855	48	35	coated	coat	VERB
ap-6855	48	36	with	with	ADP
ap-6855	48	37	a	a	DET
ap-6855	48	38	promoter	promoter	NOUN
ap-6855	48	39	of	of	ADP
ap-6855	48	40	vm-652	vm-652	PROPN
ap-6855	48	41	(	(	PUNCT
ap-6855	48	42	hdmicrosystems	hdmicrosystem	NOUN
ap-6855	48	43	)	)	PUNCT
ap-6855	48	44	(	(	PUNCT
ap-6855	48	45	figure	figure	NOUN
ap-6855	48	46	1a	1a	NOUN
ap-6855	48	47	)	)	PUNCT
ap-6855	48	48	.	.	PUNCT
ap-6855	49	1	the	the	DET
ap-6855	49	2	purpose	purpose	NOUN
ap-6855	49	3	of	of	ADP
ap-6855	49	4	adding	add	VERB
ap-6855	49	5	the	the	DET
ap-6855	49	6	promoter	promoter	NOUN
ap-6855	49	7	is	be	AUX
ap-6855	49	8	to	to	PART
ap-6855	49	9	provide	provide	VERB
ap-6855	49	10	adhesion	adhesion	NOUN
ap-6855	49	11	between	between	ADP
ap-6855	49	12	the	the	DET
ap-6855	49	13	polymeric	polymeric	ADJ
ap-6855	49	14	film	film	NOUN
ap-6855	49	15	to	to	PART
ap-6855	49	16	be	be	AUX
ap-6855	49	17	applied	apply	VERB
ap-6855	49	18	and	and	CCONJ
ap-6855	49	19	the	the	DET
ap-6855	49	20	silicon	silicon	NOUN
ap-6855	49	21	substrate	substrate	NOUN
ap-6855	49	22	.	.	PUNCT
ap-6855	50	1	then	then	ADV
ap-6855	50	2	,	,	PUNCT
ap-6855	50	3	a	a	DET
ap-6855	50	4	thin	thin	ADJ
ap-6855	50	5	layer	layer	NOUN
ap-6855	50	6	of	of	ADP
ap-6855	50	7	polyimide	polyimide	NOUN
ap-6855	50	8	(	(	PUNCT
ap-6855	50	9	pi	pi	NOUN
ap-6855	50	10	2611	2611	NUM
ap-6855	50	11	-	-	PUNCT
ap-6855	50	12	hdmicrosystems	hdmicrosystem	NOUN
ap-6855	50	13	)	)	PUNCT
ap-6855	50	14	has	have	AUX
ap-6855	50	15	been	be	AUX
ap-6855	50	16	spin	spin	NOUN
ap-6855	50	17	-	-	PUNCT
ap-6855	50	18	coated	coat	VERB
ap-6855	50	19	at	at	ADP
ap-6855	50	20	4000	4000	NUM
ap-6855	50	21	rpm	rpm	NOUN
ap-6855	50	22	for	for	ADP
ap-6855	50	23	45	45	NUM
ap-6855	50	24	seconds	second	NOUN
ap-6855	50	25	(	(	PUNCT
ap-6855	50	26	figure	figure	NOUN
ap-6855	50	27	1b	1b	NUM
ap-6855	50	28	)	)	PUNCT
ap-6855	50	29	.	.	PUNCT
ap-6855	51	1	an	an	DET
ap-6855	51	2	initial	initial	ADJ
ap-6855	51	3	bake	bake	NOUN
ap-6855	51	4	at	at	ADP
ap-6855	51	5	110	110	NUM
ap-6855	51	6	°	°	NOUN
ap-6855	51	7	c	c	NOUN
ap-6855	51	8	for	for	ADP
ap-6855	51	9	90	90	NUM
ap-6855	51	10	seconds	second	NOUN
ap-6855	51	11	has	have	AUX
ap-6855	51	12	been	be	AUX
ap-6855	51	13	performed	perform	VERB
ap-6855	51	14	.	.	PUNCT
ap-6855	52	1	in	in	ADP
ap-6855	52	2	order	order	NOUN
ap-6855	52	3	to	to	PART
ap-6855	52	4	cure	cure	VERB
ap-6855	52	5	the	the	DET
ap-6855	52	6	polyimide	polyimide	ADJ
ap-6855	52	7	film	film	NOUN
ap-6855	52	8	completely	completely	ADV
ap-6855	52	9	,	,	PUNCT
ap-6855	52	10	the	the	DET
ap-6855	52	11	sample	sample	NOUN
ap-6855	52	12	has	have	AUX
ap-6855	52	13	been	be	AUX
ap-6855	52	14	held	hold	VERB
ap-6855	52	15	in	in	ADP
ap-6855	52	16	an	an	DET
ap-6855	52	17	oven	oven	NOUN
ap-6855	52	18	at	at	ADP
ap-6855	52	19	200	200	NUM
ap-6855	52	20	°	°	NOUN
ap-6855	52	21	c	c	NOUN
ap-6855	52	22	for	for	ADP
ap-6855	52	23	60	60	NUM
ap-6855	52	24	minutes	minute	NOUN
ap-6855	52	25	.	.	PUNCT
ap-6855	53	1	the	the	DET
ap-6855	53	2	thickness	thickness	NOUN
ap-6855	53	3	of	of	ADP
ap-6855	53	4	the	the	DET
ap-6855	53	5	applied	apply	VERB
ap-6855	53	6	polyimide	polyimide	NOUN
ap-6855	53	7	film	film	NOUN
ap-6855	53	8	has	have	AUX
ap-6855	53	9	been	be	AUX
ap-6855	53	10	measured	measure	VERB
ap-6855	53	11	to	to	PART
ap-6855	53	12	be	be	AUX
ap-6855	53	13	∼	∼	NOUN
ap-6855	53	14	4	4	NUM
ap-6855	53	15	µm	µm	NOUN
ap-6855	53	16	.	.	PUNCT
ap-6855	54	1	after	after	ADP
ap-6855	54	2	being	be	AUX
ap-6855	54	3	immersed	immerse	VERB
ap-6855	54	4	in	in	ADP
ap-6855	54	5	the	the	DET
ap-6855	54	6	hf	hf	NOUN
ap-6855	54	7	-	-	PUNCT
ap-6855	54	8	based	base	VERB
ap-6855	54	9	solution	solution	NOUN
ap-6855	54	10	(	(	PUNCT
ap-6855	54	11	figure	figure	NOUN
ap-6855	54	12	1c	1c	NOUN
ap-6855	54	13	)	)	PUNCT
ap-6855	54	14	,	,	PUNCT
ap-6855	54	15	the	the	DET
ap-6855	54	16	polyimide	polyimide	ADJ
ap-6855	54	17	film	film	NOUN
ap-6855	54	18	has	have	AUX
ap-6855	54	19	been	be	AUX
ap-6855	54	20	detached	detach	VERB
ap-6855	54	21	from	from	ADP
ap-6855	54	22	the	the	DET
ap-6855	54	23	substrate	substrate	NOUN
ap-6855	54	24	(	(	PUNCT
ap-6855	54	25	figure	figure	NOUN
ap-6855	54	26	1d	1d	NUM
ap-6855	54	27	)	)	PUNCT
ap-6855	54	28	.	.	PUNCT
ap-6855	55	1	it	it	PRON
ap-6855	55	2	should	should	AUX
ap-6855	55	3	be	be	AUX
ap-6855	55	4	noted	note	VERB
ap-6855	55	5	that	that	SCONJ
ap-6855	55	6	due	due	ADP
ap-6855	55	7	to	to	ADP
ap-6855	55	8	the	the	DET
ap-6855	55	9	corrosive	corrosive	ADJ
ap-6855	55	10	nature	nature	NOUN
ap-6855	55	11	of	of	ADP
ap-6855	55	12	hf	hf	NOUN
ap-6855	55	13	,	,	PUNCT
ap-6855	55	14	it	it	PRON
ap-6855	55	15	must	must	AUX
ap-6855	55	16	be	be	AUX
ap-6855	55	17	handled	handle	VERB
ap-6855	55	18	with	with	ADP
ap-6855	55	19	extreme	extreme	ADJ
ap-6855	55	20	caution	caution	NOUN
ap-6855	55	21	.	.	PUNCT
ap-6855	56	1	3	3	X
ap-6855	56	2	.	.	X
ap-6855	56	3	results	result	NOUN
ap-6855	56	4	and	and	CCONJ
ap-6855	56	5	discussion	discussion	VERB
ap-6855	56	6	the	the	DET
ap-6855	56	7	delamination	delamination	NOUN
ap-6855	56	8	process	process	NOUN
ap-6855	56	9	of	of	ADP
ap-6855	56	10	polyimide	polyimide	NOUN
ap-6855	56	11	films	film	NOUN
ap-6855	56	12	has	have	AUX
ap-6855	56	13	been	be	AUX
ap-6855	56	14	performed	perform	VERB
ap-6855	56	15	under	under	ADP
ap-6855	56	16	the	the	DET
ap-6855	56	17	use	use	NOUN
ap-6855	56	18	of	of	ADP
ap-6855	56	19	hf	hf	NOUN
ap-6855	56	20	as	as	ADP
ap-6855	56	21	the	the	DET
ap-6855	56	22	main	main	ADJ
ap-6855	56	23	etchant	etchant	NOUN
ap-6855	56	24	material	material	NOUN
ap-6855	56	25	.	.	PUNCT
ap-6855	57	1	the	the	DET
ap-6855	57	2	three	three	NUM
ap-6855	57	3	etchants	etchant	NOUN
ap-6855	57	4	include	include	VERB
ap-6855	57	5	hf	hf	X
ap-6855	57	6	(	(	PUNCT
ap-6855	57	7	49	49	NUM
ap-6855	57	8	%	%	NOUN
ap-6855	57	9	)	)	PUNCT
ap-6855	57	10	,	,	PUNCT
ap-6855	57	11	7:1	7:1	NUM
ap-6855	57	12	buffered	buffer	VERB
ap-6855	57	13	hydrofluoric	hydrofluoric	ADJ
ap-6855	57	14	acid	acid	NOUN
ap-6855	57	15	(	(	PUNCT
ap-6855	57	16	bhf	bhf	PROPN
ap-6855	57	17	)	)	PUNCT
ap-6855	57	18	and	and	CCONJ
ap-6855	57	19	hf	hf	X
ap-6855	57	20	(	(	PUNCT
ap-6855	57	21	49	49	NUM
ap-6855	57	22	%	%	NOUN
ap-6855	57	23	):	):	PUNCT
ap-6855	57	24	deionised	deionise	VERB
ap-6855	57	25	water	water	NOUN
ap-6855	57	26	(	(	PUNCT
ap-6855	57	27	di	di	NOUN
ap-6855	57	28	)	)	PUNCT
ap-6855	57	29	with	with	ADP
ap-6855	57	30	a	a	DET
ap-6855	57	31	ratio	ratio	NOUN
ap-6855	57	32	of	of	ADP
ap-6855	57	33	1:1	1:1	NUM
ap-6855	57	34	.	.	PUNCT
ap-6855	58	1	these	these	DET
ap-6855	58	2	proportions	proportion	NOUN
ap-6855	58	3	have	have	AUX
ap-6855	58	4	been	be	AUX
ap-6855	58	5	chosen	choose	VERB
ap-6855	58	6	as	as	SCONJ
ap-6855	58	7	they	they	PRON
ap-6855	58	8	are	be	AUX
ap-6855	58	9	the	the	DET
ap-6855	58	10	most	most	ADV
ap-6855	58	11	common	common	ADJ
ap-6855	58	12	in	in	ADP
ap-6855	58	13	hf	hf	ADV
ap-6855	58	14	-	-	PUNCT
ap-6855	58	15	based	base	VERB
ap-6855	58	16	etching	etching	NOUN
ap-6855	58	17	.	.	PUNCT
ap-6855	59	1	the	the	DET
ap-6855	59	2	delamination	delamination	NOUN
ap-6855	59	3	procedure	procedure	NOUN
ap-6855	59	4	involves	involve	VERB
ap-6855	59	5	the	the	DET
ap-6855	59	6	immersion	immersion	NOUN
ap-6855	59	7	of	of	ADP
ap-6855	59	8	the	the	DET
ap-6855	59	9	silicon	silicon	NOUN
ap-6855	59	10	/	/	SYM
ap-6855	59	11	film	film	NOUN
ap-6855	59	12	stack	stack	NOUN
ap-6855	59	13	in	in	ADP
ap-6855	59	14	the	the	DET
ap-6855	59	15	prepared	prepare	VERB
ap-6855	59	16	etchants	etchant	NOUN
ap-6855	59	17	until	until	SCONJ
ap-6855	59	18	the	the	DET
ap-6855	59	19	entire	entire	ADJ
ap-6855	59	20	polyimide	polyimide	NOUN
ap-6855	59	21	film	film	NOUN
ap-6855	59	22	is	be	AUX
ap-6855	59	23	delaminated	delaminate	VERB
ap-6855	59	24	.	.	PUNCT
ap-6855	60	1	after	after	ADP
ap-6855	60	2	submerging	submerge	VERB
ap-6855	60	3	the	the	DET
ap-6855	60	4	silicon	silicon	NOUN
ap-6855	60	5	wafer	wafer	NOUN
ap-6855	60	6	that	that	PRON
ap-6855	60	7	bears	bear	VERB
ap-6855	60	8	the	the	DET
ap-6855	60	9	polyimide	polyimide	ADJ
ap-6855	60	10	film	film	NOUN
ap-6855	60	11	in	in	ADP
ap-6855	60	12	the	the	DET
ap-6855	60	13	prepared	prepared	ADJ
ap-6855	60	14	solution	solution	NOUN
ap-6855	60	15	,	,	PUNCT
ap-6855	60	16	the	the	DET
ap-6855	60	17	film	film	NOUN
ap-6855	60	18	delamination	delamination	NOUN
ap-6855	60	19	has	have	AUX
ap-6855	60	20	been	be	AUX
ap-6855	60	21	inspected	inspect	VERB
ap-6855	60	22	visually	visually	ADV
ap-6855	60	23	using	use	VERB
ap-6855	60	24	a	a	DET
ap-6855	60	25	conventional	conventional	ADJ
ap-6855	60	26	camera	camera	NOUN
ap-6855	60	27	.	.	PUNCT
ap-6855	61	1	in	in	ADP
ap-6855	61	2	such	such	DET
ap-6855	61	3	an	an	DET
ap-6855	61	4	inspection	inspection	NOUN
ap-6855	61	5	process	process	NOUN
ap-6855	61	6	,	,	PUNCT
ap-6855	61	7	we	we	PRON
ap-6855	61	8	have	have	AUX
ap-6855	61	9	monitored	monitor	VERB
ap-6855	61	10	how	how	SCONJ
ap-6855	61	11	the	the	DET
ap-6855	61	12	film	film	NOUN
ap-6855	61	13	starts	start	VERB
ap-6855	61	14	to	to	PART
ap-6855	61	15	delaminate	delaminate	VERB
ap-6855	61	16	at	at	ADP
ap-6855	61	17	the	the	DET
ap-6855	61	18	edge	edge	NOUN
ap-6855	61	19	and	and	CCONJ
ap-6855	61	20	ultimately	ultimately	ADV
ap-6855	61	21	how	how	SCONJ
ap-6855	61	22	the	the	DET
ap-6855	61	23	entire	entire	ADJ
ap-6855	61	24	film	film	NOUN
ap-6855	61	25	is	be	AUX
ap-6855	61	26	detached	detach	VERB
ap-6855	61	27	completely	completely	ADV
ap-6855	61	28	from	from	ADP
ap-6855	61	29	the	the	DET
ap-6855	61	30	substrate	substrate	NOUN
ap-6855	61	31	.	.	PUNCT
ap-6855	62	1	both	both	CCONJ
ap-6855	62	2	the	the	DET
ap-6855	62	3	edge	edge	NOUN
ap-6855	62	4	and	and	CCONJ
ap-6855	62	5	the	the	DET
ap-6855	62	6	full	full	ADJ
ap-6855	62	7	delamination	delamination	NOUN
ap-6855	62	8	time	time	NOUN
ap-6855	62	9	of	of	ADP
ap-6855	62	10	polyimide	polyimide	NOUN
ap-6855	62	11	films	film	NOUN
ap-6855	62	12	has	have	AUX
ap-6855	62	13	been	be	AUX
ap-6855	62	14	calculated	calculate	VERB
ap-6855	62	15	and	and	CCONJ
ap-6855	62	16	presented	present	VERB
ap-6855	62	17	in	in	ADP
ap-6855	62	18	figure	figure	NOUN
ap-6855	62	19	2	2	NUM
ap-6855	62	20	.	.	PUNCT
ap-6855	63	1	particularly	particularly	ADV
ap-6855	63	2	,	,	PUNCT
ap-6855	63	3	the	the	DET
ap-6855	63	4	approximate	approximate	ADJ
ap-6855	63	5	time	time	NOUN
ap-6855	63	6	required	require	VERB
ap-6855	63	7	to	to	PART
ap-6855	63	8	delaminate	delaminate	VERB
ap-6855	63	9	the	the	DET
ap-6855	63	10	polyimide	polyimide	ADJ
ap-6855	63	11	film	film	NOUN
ap-6855	63	12	from	from	ADP
ap-6855	63	13	the	the	DET
ap-6855	63	14	substrate	substrate	NOUN
ap-6855	63	15	from	from	ADP
ap-6855	63	16	the	the	DET
ap-6855	63	17	moment	moment	NOUN
ap-6855	63	18	the	the	DET
ap-6855	63	19	entire	entire	ADJ
ap-6855	63	20	silicon	silicon	NOUN
ap-6855	63	21	/	/	SYM
ap-6855	63	22	film	film	NOUN
ap-6855	63	23	system	system	NOUN
ap-6855	63	24	was	be	AUX
ap-6855	63	25	immersed	immerse	VERB
ap-6855	63	26	in	in	ADP
ap-6855	63	27	the	the	DET
ap-6855	63	28	etchant	etchant	NOUN
ap-6855	63	29	solution	solution	NOUN
ap-6855	63	30	has	have	AUX
ap-6855	63	31	been	be	AUX
ap-6855	63	32	determined	determine	VERB
ap-6855	63	33	.	.	PUNCT
ap-6855	64	1	in	in	ADP
ap-6855	64	2	general	general	ADJ
ap-6855	64	3	,	,	PUNCT
ap-6855	64	4	the	the	DET
ap-6855	64	5	reason	reason	NOUN
ap-6855	64	6	that	that	SCONJ
ap-6855	64	7	the	the	DET
ap-6855	64	8	delamination	delamination	NOUN
ap-6855	64	9	start	start	VERB
ap-6855	64	10	from	from	ADP
ap-6855	64	11	the	the	DET
ap-6855	64	12	film	film	NOUN
ap-6855	64	13	’s	’s	PART
ap-6855	64	14	edge	edge	NOUN
ap-6855	64	15	region	region	NOUN
ap-6855	64	16	is	be	AUX
ap-6855	64	17	possibly	possibly	ADV
ap-6855	64	18	associated	associate	VERB
ap-6855	64	19	with	with	ADP
ap-6855	64	20	the	the	DET
ap-6855	64	21	shear	shear	NOUN
ap-6855	64	22	stresses	stress	NOUN
ap-6855	64	23	that	that	PRON
ap-6855	64	24	are	be	AUX
ap-6855	64	25	concentrated	concentrate	VERB
ap-6855	64	26	near	near	ADP
ap-6855	64	27	the	the	DET
ap-6855	64	28	edges	edge	NOUN
ap-6855	64	29	and	and	CCONJ
ap-6855	64	30	film	film	NOUN
ap-6855	64	31	-	-	PUNCT
ap-6855	64	32	substrate	substrate	NOUN
ap-6855	64	33	interfaces	interface	NOUN
ap-6855	64	34	[	[	X
ap-6855	64	35	20	20	NUM
ap-6855	64	36	]	]	PUNCT
ap-6855	64	37	.	.	PUNCT
ap-6855	65	1	figure	figure	NOUN
ap-6855	65	2	2a	2a	PROPN
ap-6855	65	3	shows	show	VERB
ap-6855	65	4	a	a	DET
ap-6855	65	5	prepared	prepared	ADJ
ap-6855	65	6	sample	sample	NOUN
ap-6855	65	7	being	be	AUX
ap-6855	65	8	submerged	submerge	VERB
ap-6855	65	9	in	in	ADP
ap-6855	65	10	the	the	DET
ap-6855	65	11	hf	hf	NOUN
ap-6855	65	12	solution	solution	NOUN
ap-6855	65	13	.	.	PUNCT
ap-6855	66	1	as	as	SCONJ
ap-6855	66	2	hf	hf	PROPN
ap-6855	66	3	molecules	molecule	NOUN
ap-6855	66	4	penetrate	penetrate	VERB
ap-6855	66	5	the	the	DET
ap-6855	66	6	interfacial	interfacial	ADJ
ap-6855	66	7	area	area	NOUN
ap-6855	66	8	at	at	ADP
ap-6855	66	9	the	the	DET
ap-6855	66	10	685	685	NUM
ap-6855	66	11	asaad	asaad	NOUN
ap-6855	66	12	k.	k.	PROPN
ap-6855	66	13	edaan	edaan	PROPN
ap-6855	66	14	al	al	PROPN
ap-6855	66	15	-	-	PUNCT
ap-6855	66	16	mashaal	mashaal	NOUN
ap-6855	66	17	,	,	PUNCT
ap-6855	66	18	rebecca	rebecca	PROPN
ap-6855	66	19	cheung	cheung	PROPN
ap-6855	66	20	acta	acta	PROPN
ap-6855	66	21	polytechnica	polytechnica	PROPN
ap-6855	66	22	(	(	PUNCT
ap-6855	66	23	a	a	NOUN
ap-6855	66	24	)	)	PUNCT
ap-6855	66	25	.	.	PUNCT
ap-6855	67	1	(	(	PUNCT
ap-6855	67	2	b	b	NOUN
ap-6855	67	3	)	)	PUNCT
ap-6855	67	4	.	.	PUNCT
ap-6855	68	1	(	(	PUNCT
ap-6855	68	2	c	c	NOUN
ap-6855	68	3	)	)	PUNCT
ap-6855	68	4	.	.	PUNCT
ap-6855	69	1	(	(	PUNCT
ap-6855	69	2	d	d	NOUN
ap-6855	69	3	)	)	PUNCT
ap-6855	69	4	.	.	PUNCT
ap-6855	70	1	figure	figure	NOUN
ap-6855	70	2	2	2	NUM
ap-6855	70	3	.	.	PUNCT
ap-6855	70	4	delamination	delamination	NOUN
ap-6855	70	5	process	process	NOUN
ap-6855	70	6	of	of	ADP
ap-6855	70	7	polyimide	polyimide	NOUN
ap-6855	70	8	films	film	NOUN
ap-6855	70	9	in	in	ADP
ap-6855	70	10	hf	hf	ADV
ap-6855	70	11	-	-	PUNCT
ap-6855	70	12	based	base	VERB
ap-6855	70	13	etchants	etchant	NOUN
ap-6855	70	14	.	.	PUNCT
ap-6855	71	1	(	(	PUNCT
ap-6855	71	2	a	a	X
ap-6855	71	3	)	)	PUNCT
ap-6855	71	4	silicon	silicon	NOUN
ap-6855	71	5	substrate	substrate	NOUN
ap-6855	71	6	with	with	ADP
ap-6855	71	7	the	the	DET
ap-6855	71	8	film	film	NOUN
ap-6855	71	9	on	on	ADP
ap-6855	71	10	top	top	NOUN
ap-6855	71	11	is	be	AUX
ap-6855	71	12	dipped	dip	VERB
ap-6855	71	13	in	in	ADP
ap-6855	71	14	hf	hf	PROPN
ap-6855	71	15	.	.	PUNCT
ap-6855	72	1	(	(	PUNCT
ap-6855	72	2	b	b	X
ap-6855	72	3	)	)	PUNCT
ap-6855	72	4	the	the	DET
ap-6855	72	5	film	film	NOUN
ap-6855	72	6	being	be	AUX
ap-6855	72	7	delaminated	delaminate	VERB
ap-6855	72	8	around	around	ADP
ap-6855	72	9	the	the	DET
ap-6855	72	10	edge	edge	NOUN
ap-6855	72	11	of	of	ADP
ap-6855	72	12	the	the	DET
ap-6855	72	13	substrate	substrate	NOUN
ap-6855	72	14	with	with	ADP
ap-6855	72	15	the	the	DET
ap-6855	72	16	inset	inset	NOUN
ap-6855	72	17	shows	show	VERB
ap-6855	72	18	the	the	DET
ap-6855	72	19	film	film	NOUN
ap-6855	72	20	peeled	peel	VERB
ap-6855	72	21	off	off	ADP
ap-6855	72	22	(	(	PUNCT
ap-6855	72	23	c	c	X
ap-6855	72	24	)	)	PUNCT
ap-6855	72	25	a	a	DET
ap-6855	72	26	full	full	ADJ
ap-6855	72	27	detachment	detachment	NOUN
ap-6855	72	28	of	of	ADP
ap-6855	72	29	the	the	DET
ap-6855	72	30	film	film	NOUN
ap-6855	72	31	from	from	ADP
ap-6855	72	32	the	the	DET
ap-6855	72	33	substrate	substrate	NOUN
ap-6855	72	34	.	.	PUNCT
ap-6855	73	1	(	(	PUNCT
ap-6855	73	2	d	d	X
ap-6855	73	3	)	)	PUNCT
ap-6855	73	4	a	a	DET
ap-6855	73	5	delaminated	delaminate	VERB
ap-6855	73	6	polyimide	polyimide	ADJ
ap-6855	73	7	film	film	NOUN
ap-6855	73	8	floating	float	VERB
ap-6855	73	9	on	on	ADP
ap-6855	73	10	deionised	deionise	VERB
ap-6855	73	11	water	water	NOUN
ap-6855	73	12	subsequent	subsequent	ADJ
ap-6855	73	13	to	to	ADP
ap-6855	73	14	4	4	NUM
ap-6855	73	15	minutes	minute	NOUN
ap-6855	73	16	of	of	ADP
ap-6855	73	17	immersion	immersion	NOUN
ap-6855	73	18	in	in	ADP
ap-6855	73	19	hf	hf	PROPN
ap-6855	73	20	.	.	PUNCT
ap-6855	74	1	rim	rim	NOUN
ap-6855	74	2	of	of	ADP
ap-6855	74	3	the	the	DET
ap-6855	74	4	wafer	wafer	NOUN
ap-6855	74	5	,	,	PUNCT
ap-6855	74	6	the	the	DET
ap-6855	74	7	polyimide	polyimide	ADJ
ap-6855	74	8	film	film	NOUN
ap-6855	74	9	appears	appear	VERB
ap-6855	74	10	to	to	PART
ap-6855	74	11	lose	lose	VERB
ap-6855	74	12	its	its	PRON
ap-6855	74	13	adhesion	adhesion	NOUN
ap-6855	74	14	to	to	ADP
ap-6855	74	15	the	the	DET
ap-6855	74	16	silicon	silicon	NOUN
ap-6855	74	17	substrate	substrate	NOUN
ap-6855	74	18	at	at	ADP
ap-6855	74	19	these	these	DET
ap-6855	74	20	far	far	ADJ
ap-6855	74	21	edge	edge	NOUN
ap-6855	74	22	regions	region	NOUN
ap-6855	74	23	(	(	PUNCT
ap-6855	74	24	figure	figure	NOUN
ap-6855	74	25	2b	2b	NOUN
ap-6855	74	26	)	)	PUNCT
ap-6855	74	27	.	.	PUNCT
ap-6855	75	1	we	we	PRON
ap-6855	75	2	believe	believe	VERB
ap-6855	75	3	that	that	SCONJ
ap-6855	75	4	the	the	DET
ap-6855	75	5	promoter	promoter	NOUN
ap-6855	75	6	could	could	AUX
ap-6855	75	7	play	play	VERB
ap-6855	75	8	a	a	DET
ap-6855	75	9	role	role	NOUN
ap-6855	75	10	in	in	ADP
ap-6855	75	11	the	the	DET
ap-6855	75	12	delamination	delamination	NOUN
ap-6855	75	13	process	process	NOUN
ap-6855	75	14	since	since	SCONJ
ap-6855	75	15	it	it	PRON
ap-6855	75	16	can	can	AUX
ap-6855	75	17	be	be	AUX
ap-6855	75	18	attacked	attack	VERB
ap-6855	75	19	by	by	ADP
ap-6855	75	20	hf	hf	NOUN
ap-6855	75	21	.	.	PUNCT
ap-6855	76	1	it	it	PRON
ap-6855	76	2	has	have	AUX
ap-6855	76	3	been	be	AUX
ap-6855	76	4	found	find	VERB
ap-6855	76	5	that	that	SCONJ
ap-6855	76	6	the	the	DET
ap-6855	76	7	size	size	NOUN
ap-6855	76	8	of	of	ADP
ap-6855	76	9	delaminated	delaminate	VERB
ap-6855	76	10	regions	region	NOUN
ap-6855	76	11	is	be	AUX
ap-6855	76	12	much	much	ADV
ap-6855	76	13	smaller	small	ADJ
ap-6855	76	14	when	when	SCONJ
ap-6855	76	15	an	an	DET
ap-6855	76	16	adhesion	adhesion	NOUN
ap-6855	76	17	promoter	promoter	NOUN
ap-6855	76	18	is	be	AUX
ap-6855	76	19	applied	apply	VERB
ap-6855	76	20	[	[	PUNCT
ap-6855	76	21	21	21	NUM
ap-6855	76	22	]	]	PUNCT
ap-6855	76	23	.	.	PUNCT
ap-6855	77	1	the	the	DET
ap-6855	77	2	inset	inset	NOUN
ap-6855	77	3	in	in	ADP
ap-6855	77	4	figure	figure	NOUN
ap-6855	77	5	2b	2b	NOUN
ap-6855	77	6	shows	show	VERB
ap-6855	77	7	how	how	SCONJ
ap-6855	77	8	the	the	DET
ap-6855	77	9	edge	edge	NOUN
ap-6855	77	10	-	-	PUNCT
ap-6855	77	11	detached	detach	VERB
ap-6855	77	12	polyimide	polyimide	NOUN
ap-6855	77	13	film	film	NOUN
ap-6855	77	14	has	have	AUX
ap-6855	77	15	been	be	AUX
ap-6855	77	16	peeled	peel	VERB
ap-6855	77	17	off	off	ADP
ap-6855	77	18	from	from	ADP
ap-6855	77	19	the	the	DET
ap-6855	77	20	silicon	silicon	NOUN
ap-6855	77	21	substrate	substrate	NOUN
ap-6855	77	22	.	.	PUNCT
ap-6855	78	1	once	once	SCONJ
ap-6855	78	2	the	the	DET
ap-6855	78	3	etchant	etchant	NOUN
ap-6855	78	4	molecules	molecule	NOUN
ap-6855	78	5	penetrate	penetrate	VERB
ap-6855	78	6	deeply	deeply	ADV
ap-6855	78	7	into	into	ADP
ap-6855	78	8	the	the	DET
ap-6855	78	9	middle	middle	ADJ
ap-6855	78	10	area	area	NOUN
ap-6855	78	11	and	and	CCONJ
ap-6855	78	12	reach	reach	VERB
ap-6855	78	13	the	the	DET
ap-6855	78	14	entire	entire	ADJ
ap-6855	78	15	interfacial	interfacial	ADJ
ap-6855	78	16	region	region	NOUN
ap-6855	78	17	,	,	PUNCT
ap-6855	78	18	the	the	DET
ap-6855	78	19	film	film	NOUN
ap-6855	78	20	can	can	AUX
ap-6855	78	21	be	be	AUX
ap-6855	78	22	easily	easily	ADV
ap-6855	78	23	delaminated	delaminate	VERB
ap-6855	78	24	as	as	SCONJ
ap-6855	78	25	shown	show	VERB
ap-6855	78	26	in	in	ADP
ap-6855	78	27	figure	figure	NOUN
ap-6855	78	28	2c	2c	NOUN
ap-6855	78	29	.	.	PUNCT
ap-6855	79	1	the	the	DET
ap-6855	79	2	final	final	ADJ
ap-6855	79	3	delaminated	delaminate	VERB
ap-6855	79	4	film	film	NOUN
ap-6855	79	5	can	can	AUX
ap-6855	79	6	be	be	AUX
ap-6855	79	7	seen	see	VERB
ap-6855	79	8	floating	float	VERB
ap-6855	79	9	on	on	ADP
ap-6855	79	10	the	the	DET
ap-6855	79	11	di	di	NOUN
ap-6855	79	12	water	water	PROPN
ap-6855	79	13	surface	surface	NOUN
ap-6855	79	14	(	(	PUNCT
ap-6855	79	15	figure	figure	NOUN
ap-6855	79	16	2d	2d	NUM
ap-6855	79	17	)	)	PUNCT
ap-6855	79	18	.	.	PUNCT
ap-6855	80	1	figure	figure	NOUN
ap-6855	80	2	3	3	NUM
ap-6855	80	3	shows	show	VERB
ap-6855	80	4	the	the	DET
ap-6855	80	5	delamination	delamination	NOUN
ap-6855	80	6	time	time	NOUN
ap-6855	80	7	estimated	estimate	VERB
ap-6855	80	8	for	for	ADP
ap-6855	80	9	the	the	DET
ap-6855	80	10	polyimide	polyimide	ADJ
ap-6855	80	11	film	film	NOUN
ap-6855	80	12	with	with	ADP
ap-6855	80	13	respect	respect	NOUN
ap-6855	80	14	to	to	ADP
ap-6855	80	15	the	the	DET
ap-6855	80	16	three	three	NUM
ap-6855	80	17	different	different	ADJ
ap-6855	80	18	types	type	NOUN
ap-6855	80	19	of	of	ADP
ap-6855	80	20	hf	hf	ADV
ap-6855	80	21	-	-	PUNCT
ap-6855	80	22	based	base	VERB
ap-6855	80	23	etchants	etchant	NOUN
ap-6855	80	24	.	.	PUNCT
ap-6855	81	1	for	for	ADP
ap-6855	81	2	the	the	DET
ap-6855	81	3	first	first	ADJ
ap-6855	81	4	etchant	etchant	NOUN
ap-6855	81	5	solution	solution	NOUN
ap-6855	81	6	,	,	PUNCT
ap-6855	81	7	50	50	NUM
ap-6855	81	8	ml	ml	NOUN
ap-6855	81	9	of	of	ADP
ap-6855	81	10	hf	hf	NOUN
ap-6855	81	11	(	(	PUNCT
ap-6855	81	12	49	49	NUM
ap-6855	81	13	%	%	NOUN
ap-6855	81	14	)	)	PUNCT
ap-6855	81	15	has	have	AUX
ap-6855	81	16	been	be	AUX
ap-6855	81	17	prepared	prepare	VERB
ap-6855	81	18	.	.	PUNCT
ap-6855	82	1	the	the	DET
ap-6855	82	2	edge	edge	NOUN
ap-6855	82	3	delamination	delamination	NOUN
ap-6855	82	4	has	have	AUX
ap-6855	82	5	been	be	AUX
ap-6855	82	6	found	find	VERB
ap-6855	82	7	to	to	PART
ap-6855	82	8	occur	occur	VERB
ap-6855	82	9	after	after	ADP
ap-6855	82	10	∼	∼	NOUN
ap-6855	82	11	90	90	NUM
ap-6855	82	12	seconds	second	NOUN
ap-6855	82	13	of	of	ADP
ap-6855	82	14	immersion	immersion	NOUN
ap-6855	82	15	.	.	PUNCT
ap-6855	83	1	the	the	DET
ap-6855	83	2	time	time	NOUN
ap-6855	83	3	required	require	VERB
ap-6855	83	4	to	to	PART
ap-6855	83	5	attain	attain	VERB
ap-6855	83	6	a	a	DET
ap-6855	83	7	full	full	ADJ
ap-6855	83	8	delamination	delamination	NOUN
ap-6855	83	9	has	have	AUX
ap-6855	83	10	been	be	AUX
ap-6855	83	11	found	find	VERB
ap-6855	83	12	to	to	PART
ap-6855	83	13	be	be	AUX
ap-6855	83	14	approximately	approximately	ADV
ap-6855	83	15	4	4	NUM
ap-6855	83	16	minutes	minute	NOUN
ap-6855	83	17	.	.	PUNCT
ap-6855	84	1	in	in	ADP
ap-6855	84	2	the	the	DET
ap-6855	84	3	case	case	NOUN
ap-6855	84	4	of	of	ADP
ap-6855	84	5	the	the	DET
ap-6855	84	6	second	second	ADJ
ap-6855	84	7	etchant	etchant	NOUN
ap-6855	84	8	,	,	PUNCT
ap-6855	84	9	a	a	DET
ap-6855	84	10	mixture	mixture	NOUN
ap-6855	84	11	of	of	ADP
ap-6855	84	12	50	50	NUM
ap-6855	84	13	ml	ml	NOUN
ap-6855	84	14	of	of	ADP
ap-6855	84	15	49	49	NUM
ap-6855	84	16	%	%	NOUN
ap-6855	84	17	hf	hf	NOUN
ap-6855	84	18	and	and	CCONJ
ap-6855	84	19	50	50	NUM
ap-6855	84	20	ml	ml	NOUN
ap-6855	84	21	of	of	ADP
ap-6855	84	22	di	di	NOUN
ap-6855	84	23	water	water	NOUN
ap-6855	84	24	has	have	AUX
ap-6855	84	25	been	be	AUX
ap-6855	84	26	prepared	prepare	VERB
ap-6855	84	27	.	.	PUNCT
ap-6855	85	1	it	it	PRON
ap-6855	85	2	appears	appear	VERB
ap-6855	85	3	that	that	SCONJ
ap-6855	85	4	the	the	DET
ap-6855	85	5	edge	edge	NOUN
ap-6855	85	6	and	and	CCONJ
ap-6855	85	7	full	full	ADJ
ap-6855	85	8	delamination	delamination	NOUN
ap-6855	85	9	of	of	ADP
ap-6855	85	10	polyimide	polyimide	NOUN
ap-6855	85	11	films	film	NOUN
ap-6855	85	12	immersed	immerse	VERB
ap-6855	85	13	in	in	ADP
ap-6855	85	14	hf	hf	NOUN
ap-6855	85	15	:	:	PUNCT
ap-6855	85	16	di	di	NOUN
ap-6855	85	17	solution	solution	NOUN
ap-6855	85	18	occurs	occur	VERB
ap-6855	85	19	after	after	ADP
ap-6855	85	20	approximately	approximately	ADV
ap-6855	85	21	4	4	NUM
ap-6855	85	22	and	and	CCONJ
ap-6855	85	23	7	7	NUM
ap-6855	85	24	minutes	minute	NOUN
ap-6855	85	25	,	,	PUNCT
ap-6855	85	26	respectively	respectively	ADV
ap-6855	85	27	(	(	PUNCT
ap-6855	85	28	see	see	VERB
ap-6855	85	29	figure	figure	NOUN
ap-6855	85	30	3	3	NUM
ap-6855	85	31	)	)	PUNCT
ap-6855	85	32	.	.	PUNCT
ap-6855	86	1	compared	compare	VERB
ap-6855	86	2	to	to	ADP
ap-6855	86	3	the	the	DET
ap-6855	86	4	first	first	ADJ
ap-6855	86	5	etchant	etchant	NOUN
ap-6855	86	6	,	,	PUNCT
ap-6855	86	7	the	the	DET
ap-6855	86	8	polyimide	polyimide	ADJ
ap-6855	86	9	delamination	delamination	NOUN
ap-6855	86	10	time	time	NOUN
ap-6855	86	11	in	in	ADP
ap-6855	86	12	hf	hf	NOUN
ap-6855	86	13	:	:	PUNCT
ap-6855	86	14	di	di	NOUN
ap-6855	86	15	etchant	etchant	NOUN
ap-6855	86	16	has	have	AUX
ap-6855	86	17	been	be	AUX
ap-6855	86	18	observed	observe	VERB
ap-6855	86	19	to	to	PART
ap-6855	86	20	be	be	AUX
ap-6855	86	21	about	about	ADV
ap-6855	86	22	two	two	NUM
ap-6855	86	23	times	time	NOUN
ap-6855	86	24	longer	long	ADJ
ap-6855	86	25	.	.	PUNCT
ap-6855	87	1	to	to	PART
ap-6855	87	2	prepare	prepare	VERB
ap-6855	87	3	the	the	DET
ap-6855	87	4	third	third	ADJ
ap-6855	87	5	etchant	etchant	NOUN
ap-6855	87	6	of	of	ADP
ap-6855	87	7	buffered	buffer	VERB
ap-6855	87	8	hydrofluoric	hydrofluoric	ADJ
ap-6855	87	9	acid	acid	NOUN
ap-6855	87	10	(	(	PUNCT
ap-6855	87	11	bhf	bhf	NOUN
ap-6855	87	12	)	)	PUNCT
ap-6855	87	13	solution	solution	NOUN
ap-6855	87	14	,	,	PUNCT
ap-6855	87	15	7	7	NUM
ap-6855	87	16	parts	part	NOUN
ap-6855	87	17	of	of	ADP
ap-6855	87	18	a	a	DET
ap-6855	87	19	buffering	buffering	NOUN
ap-6855	87	20	agent	agent	NOUN
ap-6855	87	21	of	of	ADP
ap-6855	87	22	ammonium	ammonium	NOUN
ap-6855	87	23	fluoride	fluoride	NOUN
ap-6855	87	24	(	(	PUNCT
ap-6855	87	25	nh4f	nh4f	NOUN
ap-6855	87	26	)	)	PUNCT
ap-6855	87	27	have	have	AUX
ap-6855	87	28	been	be	AUX
ap-6855	87	29	mixed	mix	VERB
ap-6855	87	30	with	with	ADP
ap-6855	87	31	1	1	NUM
ap-6855	87	32	part	part	NOUN
ap-6855	87	33	of	of	ADP
ap-6855	87	34	hf	hf	NOUN
ap-6855	87	35	(	(	PUNCT
ap-6855	87	36	49	49	NUM
ap-6855	87	37	%	%	NOUN
ap-6855	87	38	)	)	PUNCT
ap-6855	87	39	.	.	PUNCT
ap-6855	88	1	as	as	SCONJ
ap-6855	88	2	shown	show	VERB
ap-6855	88	3	in	in	ADP
ap-6855	88	4	figure	figure	NOUN
ap-6855	88	5	3	3	NUM
ap-6855	88	6	,	,	PUNCT
ap-6855	88	7	the	the	DET
ap-6855	88	8	time	time	NOUN
ap-6855	88	9	required	require	VERB
ap-6855	88	10	for	for	ADP
ap-6855	88	11	the	the	DET
ap-6855	88	12	polyimide	polyimide	ADJ
ap-6855	88	13	film	film	NOUN
ap-6855	88	14	to	to	PART
ap-6855	88	15	detach	detach	VERB
ap-6855	88	16	from	from	ADP
ap-6855	88	17	the	the	DET
ap-6855	88	18	substrate	substrate	NOUN
ap-6855	88	19	has	have	AUX
ap-6855	88	20	been	be	AUX
ap-6855	88	21	calculated	calculate	VERB
ap-6855	88	22	to	to	PART
ap-6855	88	23	be	be	AUX
ap-6855	88	24	∼	∼	NOUN
ap-6855	88	25	15	15	NUM
ap-6855	88	26	minutes	minute	NOUN
ap-6855	88	27	in	in	ADP
ap-6855	88	28	the	the	DET
ap-6855	88	29	edge	edge	NOUN
ap-6855	88	30	region	region	NOUN
ap-6855	88	31	.	.	PUNCT
ap-6855	89	1	to	to	PART
ap-6855	89	2	achieve	achieve	VERB
ap-6855	89	3	a	a	DET
ap-6855	89	4	complete	complete	ADJ
ap-6855	89	5	detachment	detachment	NOUN
ap-6855	89	6	,	,	PUNCT
ap-6855	89	7	however	however	ADV
ap-6855	89	8	,	,	PUNCT
ap-6855	89	9	the	the	DET
ap-6855	89	10	film	film	NOUN
ap-6855	89	11	must	must	AUX
ap-6855	89	12	be	be	AUX
ap-6855	89	13	immersed	immerse	VERB
ap-6855	89	14	in	in	ADP
ap-6855	89	15	the	the	DET
ap-6855	89	16	solution	solution	NOUN
ap-6855	89	17	for	for	ADP
ap-6855	89	18	more	more	ADJ
ap-6855	89	19	than	than	ADP
ap-6855	89	20	20	20	NUM
ap-6855	89	21	minutes	minute	NOUN
ap-6855	89	22	.	.	PUNCT
ap-6855	90	1	it	it	PRON
ap-6855	90	2	is	be	AUX
ap-6855	90	3	clear	clear	ADJ
ap-6855	90	4	that	that	SCONJ
ap-6855	90	5	the	the	DET
ap-6855	90	6	delamination	delamination	NOUN
ap-6855	90	7	of	of	ADP
ap-6855	90	8	polyimide	polyimide	NOUN
ap-6855	90	9	films	film	NOUN
ap-6855	90	10	is	be	AUX
ap-6855	90	11	relatively	relatively	ADV
ap-6855	90	12	slower	slow	ADJ
ap-6855	90	13	in	in	ADP
ap-6855	90	14	the	the	DET
ap-6855	90	15	bhf	bhf	NOUN
ap-6855	90	16	than	than	ADP
ap-6855	90	17	that	that	PRON
ap-6855	90	18	in	in	ADP
ap-6855	90	19	the	the	DET
ap-6855	90	20	concentrated	concentrated	ADJ
ap-6855	90	21	hf	hf	NOUN
ap-6855	90	22	and	and	CCONJ
ap-6855	90	23	hf	hf	ADP
ap-6855	90	24	:	:	PUNCT
ap-6855	90	25	di	di	NOUN
ap-6855	90	26	.	.	PROPN
ap-6855	90	27	to	to	PART
ap-6855	90	28	inspect	inspect	VERB
ap-6855	90	29	the	the	DET
ap-6855	90	30	etch	etch	NOUN
ap-6855	90	31	rate	rate	NOUN
ap-6855	90	32	of	of	ADP
ap-6855	90	33	polyimide	polyimide	NOUN
ap-6855	90	34	,	,	PUNCT
ap-6855	90	35	the	the	DET
ap-6855	90	36	films	film	NOUN
ap-6855	90	37	’	'	PUNCT
ap-6855	90	38	thickness	thickness	NOUN
ap-6855	90	39	has	have	AUX
ap-6855	90	40	been	be	AUX
ap-6855	90	41	measured	measure	VERB
ap-6855	90	42	using	use	VERB
ap-6855	90	43	a	a	DET
ap-6855	90	44	reflectometer	reflectometer	NOUN
ap-6855	90	45	(	(	PUNCT
ap-6855	90	46	nanometrics	nanometric	NOUN
ap-6855	90	47	nanospec	nanospec	PROPN
ap-6855	90	48	)	)	PUNCT
ap-6855	90	49	before	before	ADP
ap-6855	90	50	and	and	CCONJ
ap-6855	90	51	after	after	ADP
ap-6855	90	52	the	the	DET
ap-6855	90	53	immersion	immersion	NOUN
ap-6855	90	54	in	in	ADP
ap-6855	90	55	the	the	DET
ap-6855	90	56	etchants	etchant	NOUN
ap-6855	90	57	.	.	PUNCT
ap-6855	91	1	it	it	PRON
ap-6855	91	2	has	have	AUX
ap-6855	91	3	been	be	AUX
ap-6855	91	4	found	find	VERB
ap-6855	91	5	that	that	SCONJ
ap-6855	91	6	the	the	DET
ap-6855	91	7	polyimide	polyimide	NOUN
ap-6855	91	8	in	in	ADP
ap-6855	91	9	the	the	DET
ap-6855	91	10	hf	hf	NOUN
ap-6855	91	11	is	be	AUX
ap-6855	91	12	around	around	ADV
ap-6855	91	13	15–25	15–25	NUM
ap-6855	91	14	nm	nm	NOUN
ap-6855	91	15	/	/	SYM
ap-6855	91	16	min	min	NOUN
ap-6855	91	17	.	.	PROPN
ap-6855	91	18	compared	compare	VERB
ap-6855	91	19	to	to	ADP
ap-6855	91	20	the	the	DET
ap-6855	91	21	total	total	ADJ
ap-6855	91	22	thickness	thickness	NOUN
ap-6855	91	23	of	of	ADP
ap-6855	91	24	the	the	DET
ap-6855	91	25	as	as	ADV
ap-6855	91	26	-	-	PUNCT
ap-6855	91	27	applied	apply	VERB
ap-6855	91	28	film	film	NOUN
ap-6855	91	29	(	(	PUNCT
ap-6855	91	30	e.	e.	PROPN
ap-6855	91	31	g.	g.	PROPN
ap-6855	91	32	,	,	PUNCT
ap-6855	91	33	4	4	NUM
ap-6855	91	34	µm	µm	NOUN
ap-6855	91	35	)	)	PUNCT
ap-6855	91	36	,	,	PUNCT
ap-6855	91	37	the	the	DET
ap-6855	91	38	proportion	proportion	NOUN
ap-6855	91	39	of	of	ADP
ap-6855	91	40	the	the	DET
ap-6855	91	41	layer	layer	NOUN
ap-6855	91	42	that	that	PRON
ap-6855	91	43	has	have	AUX
ap-6855	91	44	been	be	AUX
ap-6855	91	45	etched	etch	VERB
ap-6855	91	46	away	away	ADV
ap-6855	91	47	in	in	ADP
ap-6855	91	48	hf	hf	NOUN
ap-6855	91	49	during	during	ADP
ap-6855	91	50	the	the	DET
ap-6855	91	51	delamination	delamination	NOUN
ap-6855	91	52	does	do	AUX
ap-6855	91	53	not	not	PART
ap-6855	91	54	exceed	exceed	VERB
ap-6855	91	55	5	5	NUM
ap-6855	91	56	%	%	NOUN
ap-6855	91	57	.	.	PUNCT
ap-6855	92	1	no	no	DET
ap-6855	92	2	considerable	considerable	ADJ
ap-6855	92	3	difference	difference	NOUN
ap-6855	92	4	has	have	AUX
ap-6855	92	5	been	be	AUX
ap-6855	92	6	measured	measure	VERB
ap-6855	92	7	in	in	ADP
ap-6855	92	8	686	686	NUM
ap-6855	92	9	vol	vol	NOUN
ap-6855	92	10	.	.	PUNCT
ap-6855	93	1	61	61	NUM
ap-6855	93	2	no	no	NOUN
ap-6855	93	3	.	.	PUNCT
ap-6855	94	1	6/2021	6/2021	NUM
ap-6855	94	2	delamination	delamination	NOUN
ap-6855	94	3	of	of	ADP
ap-6855	94	4	polyimide	polyimide	NOUN
ap-6855	94	5	in	in	ADP
ap-6855	94	6	hydrofluoric	hydrofluoric	ADJ
ap-6855	94	7	acid	acid	NOUN
ap-6855	94	8	0	0	NUM
ap-6855	94	9	4	4	NUM
ap-6855	94	10	8	8	NUM
ap-6855	94	11	12	12	NUM
ap-6855	94	12	16	16	NUM
ap-6855	94	13	20	20	NUM
ap-6855	94	14	24	24	NUM
ap-6855	94	15	hf	hf	NOUN
ap-6855	94	16	hf	hf	PROPN
ap-6855	94	17	:	:	PUNCT
ap-6855	94	18	di	di	PROPN
ap-6855	94	19	bhf	bhf	PROPN
ap-6855	94	20	d	d	PROPN
ap-6855	94	21	el	el	PROPN
ap-6855	94	22	a	a	PROPN
ap-6855	94	23	m	m	VERB
ap-6855	94	24	in	in	ADP
ap-6855	94	25	a	a	DET
ap-6855	94	26	ti	ti	NOUN
ap-6855	94	27	o	o	NOUN
ap-6855	94	28	n	n	ADP
ap-6855	94	29	t	t	NOUN
ap-6855	95	1	i	i	PRON
ap-6855	95	2	m	m	VERB
ap-6855	95	3	e	e	X
ap-6855	95	4	(	(	PUNCT
ap-6855	95	5	m	m	NOUN
ap-6855	95	6	in	in	ADP
ap-6855	95	7	)	)	PUNCT
ap-6855	95	8	etchant	etchant	NOUN
ap-6855	95	9	full	full	ADJ
ap-6855	95	10	delamination	delamination	NOUN
ap-6855	95	11	edge	edge	NOUN
ap-6855	95	12	delamination	delamination	NOUN
ap-6855	95	13	figure	figure	NOUN
ap-6855	95	14	3	3	NUM
ap-6855	95	15	.	.	PUNCT
ap-6855	95	16	delamination	delamination	NOUN
ap-6855	95	17	time	time	NOUN
ap-6855	95	18	of	of	ADP
ap-6855	95	19	polyimide	polyimide	NOUN
ap-6855	95	20	films	film	NOUN
ap-6855	95	21	as	as	ADP
ap-6855	95	22	a	a	DET
ap-6855	95	23	function	function	NOUN
ap-6855	95	24	of	of	ADP
ap-6855	95	25	different	different	ADJ
ap-6855	95	26	types	type	NOUN
ap-6855	95	27	of	of	ADP
ap-6855	95	28	hf	hf	ADV
ap-6855	95	29	-	-	PUNCT
ap-6855	95	30	based	base	VERB
ap-6855	95	31	etchants	etchant	NOUN
ap-6855	95	32	.	.	PUNCT
ap-6855	96	1	the	the	DET
ap-6855	96	2	films	film	NOUN
ap-6855	96	3	’	’	PART
ap-6855	96	4	thickness	thickness	NOUN
ap-6855	96	5	after	after	ADP
ap-6855	96	6	submerging	submerge	VERB
ap-6855	96	7	the	the	DET
ap-6855	96	8	films	film	NOUN
ap-6855	96	9	in	in	ADP
ap-6855	96	10	the	the	DET
ap-6855	96	11	hd	hd	NOUN
ap-6855	96	12	:	:	PUNCT
ap-6855	96	13	di	di	NOUN
ap-6855	96	14	and	and	CCONJ
ap-6855	96	15	bhf	bhf	NOUN
ap-6855	96	16	etchants	etchant	NOUN
ap-6855	96	17	.	.	PUNCT
ap-6855	97	1	such	such	ADJ
ap-6855	97	2	etching	etch	VERB
ap-6855	97	3	rates	rate	NOUN
ap-6855	97	4	are	be	AUX
ap-6855	97	5	for	for	ADP
ap-6855	97	6	fully	fully	ADV
ap-6855	97	7	cured	cure	VERB
ap-6855	97	8	polyimide	polyimide	ADJ
ap-6855	97	9	films	film	NOUN
ap-6855	97	10	,	,	PUNCT
ap-6855	97	11	and	and	CCONJ
ap-6855	97	12	they	they	PRON
ap-6855	97	13	are	be	AUX
ap-6855	97	14	in	in	ADP
ap-6855	97	15	agreement	agreement	NOUN
ap-6855	97	16	with	with	ADP
ap-6855	97	17	other	other	ADJ
ap-6855	97	18	reported	report	VERB
ap-6855	97	19	findings	finding	NOUN
ap-6855	97	20	[	[	X
ap-6855	97	21	15	15	NUM
ap-6855	97	22	]	]	PUNCT
ap-6855	97	23	.	.	PUNCT
ap-6855	98	1	it	it	PRON
ap-6855	98	2	is	be	AUX
ap-6855	98	3	worth	worth	ADJ
ap-6855	98	4	pointing	point	VERB
ap-6855	98	5	out	out	ADP
ap-6855	98	6	that	that	SCONJ
ap-6855	98	7	the	the	DET
ap-6855	98	8	etching	etch	VERB
ap-6855	98	9	rate	rate	NOUN
ap-6855	98	10	of	of	ADP
ap-6855	98	11	deposited	deposit	VERB
ap-6855	98	12	or	or	CCONJ
ap-6855	98	13	spin	spin	NOUN
ap-6855	98	14	-	-	PUNCT
ap-6855	98	15	coated	coat	VERB
ap-6855	98	16	(	(	PUNCT
ap-6855	98	17	i.	i.	PROPN
ap-6855	98	18	e.	e.	PROPN
ap-6855	98	19	,	,	PUNCT
ap-6855	98	20	not	not	PART
ap-6855	98	21	cured	cure	VERB
ap-6855	98	22	)	)	PUNCT
ap-6855	98	23	polyimide	polyimide	NOUN
ap-6855	98	24	films	film	NOUN
ap-6855	98	25	is	be	AUX
ap-6855	98	26	higher	high	ADJ
ap-6855	98	27	than	than	ADP
ap-6855	98	28	that	that	PRON
ap-6855	98	29	of	of	ADP
ap-6855	98	30	the	the	DET
ap-6855	98	31	fully	fully	ADV
ap-6855	98	32	cured	cure	VERB
ap-6855	98	33	films	film	NOUN
ap-6855	98	34	.	.	PUNCT
ap-6855	99	1	the	the	DET
ap-6855	99	2	mechanism	mechanism	NOUN
ap-6855	99	3	behind	behind	ADP
ap-6855	99	4	the	the	DET
ap-6855	99	5	delamination	delamination	NOUN
ap-6855	99	6	of	of	ADP
ap-6855	99	7	thin	thin	ADJ
ap-6855	99	8	polymeric	polymeric	ADJ
ap-6855	99	9	films	film	NOUN
ap-6855	99	10	from	from	ADP
ap-6855	99	11	a	a	DET
ap-6855	99	12	solid	solid	ADJ
ap-6855	99	13	substrate	substrate	NOUN
ap-6855	99	14	is	be	AUX
ap-6855	99	15	related	relate	VERB
ap-6855	99	16	to	to	ADP
ap-6855	99	17	several	several	ADJ
ap-6855	99	18	possible	possible	ADJ
ap-6855	99	19	effects	effect	NOUN
ap-6855	99	20	.	.	PUNCT
ap-6855	100	1	for	for	ADP
ap-6855	100	2	example	example	NOUN
ap-6855	100	3	,	,	PUNCT
ap-6855	100	4	it	it	PRON
ap-6855	100	5	could	could	AUX
ap-6855	100	6	result	result	VERB
ap-6855	100	7	from	from	ADP
ap-6855	100	8	the	the	DET
ap-6855	100	9	interfacial	interfacial	ADJ
ap-6855	100	10	deformation	deformation	NOUN
ap-6855	100	11	process	process	NOUN
ap-6855	100	12	of	of	ADP
ap-6855	100	13	the	the	DET
ap-6855	100	14	applied	apply	VERB
ap-6855	100	15	film	film	NOUN
ap-6855	100	16	and	and	CCONJ
ap-6855	100	17	the	the	DET
ap-6855	100	18	molecular	molecular	ADJ
ap-6855	100	19	reaction	reaction	NOUN
ap-6855	100	20	of	of	ADP
ap-6855	100	21	the	the	DET
ap-6855	100	22	etchant	etchant	NOUN
ap-6855	100	23	solution	solution	NOUN
ap-6855	100	24	(	(	PUNCT
ap-6855	100	25	liquid	liquid	NOUN
ap-6855	100	26	)	)	PUNCT
ap-6855	100	27	and	and	CCONJ
ap-6855	100	28	the	the	DET
ap-6855	100	29	silicon	silicon	NOUN
ap-6855	100	30	substrate	substrate	NOUN
ap-6855	100	31	(	(	PUNCT
ap-6855	100	32	solid	solid	ADJ
ap-6855	100	33	)	)	PUNCT
ap-6855	101	1	[	[	X
ap-6855	101	2	22	22	NUM
ap-6855	101	3	]	]	PUNCT
ap-6855	101	4	.	.	PUNCT
ap-6855	102	1	an	an	DET
ap-6855	102	2	alternative	alternative	ADJ
ap-6855	102	3	possible	possible	ADJ
ap-6855	102	4	mechanism	mechanism	NOUN
ap-6855	102	5	is	be	AUX
ap-6855	102	6	that	that	SCONJ
ap-6855	102	7	the	the	DET
ap-6855	102	8	hf	hf	NOUN
ap-6855	102	9	attacks	attack	VERB
ap-6855	102	10	the	the	DET
ap-6855	102	11	interface	interface	NOUN
ap-6855	102	12	,	,	PUNCT
ap-6855	102	13	which	which	PRON
ap-6855	102	14	causes	cause	VERB
ap-6855	102	15	the	the	DET
ap-6855	102	16	edge	edge	NOUN
ap-6855	102	17	to	to	PART
ap-6855	102	18	peel	peel	VERB
ap-6855	102	19	up	up	ADP
ap-6855	102	20	and	and	CCONJ
ap-6855	102	21	delaminate	delaminate	VERB
ap-6855	102	22	.	.	PUNCT
ap-6855	103	1	the	the	DET
ap-6855	103	2	residual	residual	ADJ
ap-6855	103	3	induced	induce	VERB
ap-6855	103	4	stresses	stress	NOUN
ap-6855	103	5	will	will	AUX
ap-6855	103	6	cause	cause	VERB
ap-6855	103	7	the	the	DET
ap-6855	103	8	film	film	NOUN
ap-6855	103	9	to	to	PART
ap-6855	103	10	lift	lift	VERB
ap-6855	103	11	and	and	CCONJ
ap-6855	103	12	continuously	continuously	ADV
ap-6855	103	13	expose	expose	VERB
ap-6855	103	14	the	the	DET
ap-6855	103	15	whole	whole	ADJ
ap-6855	103	16	interface	interface	NOUN
ap-6855	103	17	to	to	ADP
ap-6855	103	18	the	the	DET
ap-6855	103	19	attack	attack	NOUN
ap-6855	103	20	of	of	ADP
ap-6855	103	21	the	the	DET
ap-6855	103	22	hf	hf	NOUN
ap-6855	103	23	.	.	PUNCT
ap-6855	104	1	under	under	ADP
ap-6855	104	2	such	such	DET
ap-6855	104	3	a	a	DET
ap-6855	104	4	cascading	cascade	VERB
ap-6855	104	5	effect	effect	NOUN
ap-6855	104	6	,	,	PUNCT
ap-6855	104	7	a	a	DET
ap-6855	104	8	full	full	ADJ
ap-6855	104	9	delamination	delamination	NOUN
ap-6855	104	10	of	of	ADP
ap-6855	104	11	the	the	DET
ap-6855	104	12	film	film	NOUN
ap-6855	104	13	can	can	AUX
ap-6855	104	14	be	be	AUX
ap-6855	104	15	achieved	achieve	VERB
ap-6855	104	16	.	.	PUNCT
ap-6855	105	1	the	the	DET
ap-6855	105	2	hf	hf	PROPN
ap-6855	105	3	has	have	VERB
ap-6855	105	4	the	the	DET
ap-6855	105	5	ability	ability	NOUN
ap-6855	105	6	to	to	PART
ap-6855	105	7	penetrate	penetrate	VERB
ap-6855	105	8	through	through	ADP
ap-6855	105	9	the	the	DET
ap-6855	105	10	polyimide	polyimide	ADJ
ap-6855	105	11	layer	layer	NOUN
ap-6855	105	12	and	and	CCONJ
ap-6855	105	13	attack	attack	VERB
ap-6855	105	14	the	the	DET
ap-6855	105	15	interface	interface	NOUN
ap-6855	105	16	.	.	PUNCT
ap-6855	106	1	since	since	SCONJ
ap-6855	106	2	our	our	PRON
ap-6855	106	3	delamination	delamination	NOUN
ap-6855	106	4	process	process	NOUN
ap-6855	106	5	is	be	AUX
ap-6855	106	6	hf	hf	ADV
ap-6855	106	7	dependent	dependent	ADJ
ap-6855	106	8	,	,	PUNCT
ap-6855	106	9	the	the	DET
ap-6855	106	10	hf	hf	ADJ
ap-6855	106	11	molecules	molecule	NOUN
ap-6855	106	12	are	be	AUX
ap-6855	106	13	absorbed	absorb	VERB
ap-6855	106	14	into	into	ADP
ap-6855	106	15	the	the	DET
ap-6855	106	16	polyimide	polyimide	ADJ
ap-6855	106	17	film	film	NOUN
ap-6855	106	18	and	and	CCONJ
ap-6855	106	19	cause	cause	VERB
ap-6855	106	20	it	it	PRON
ap-6855	106	21	to	to	PART
ap-6855	106	22	swell	swell	VERB
ap-6855	106	23	.	.	PUNCT
ap-6855	107	1	as	as	SCONJ
ap-6855	107	2	the	the	DET
ap-6855	107	3	hf	hf	NOUN
ap-6855	107	4	is	be	AUX
ap-6855	107	5	being	be	AUX
ap-6855	107	6	absorbed	absorb	VERB
ap-6855	107	7	,	,	PUNCT
ap-6855	107	8	it	it	PRON
ap-6855	107	9	is	be	AUX
ap-6855	107	10	going	go	VERB
ap-6855	107	11	to	to	PART
ap-6855	107	12	migrate	migrate	VERB
ap-6855	107	13	to	to	ADP
ap-6855	107	14	the	the	DET
ap-6855	107	15	polyimide	polyimide	ADJ
ap-6855	107	16	/	/	SYM
ap-6855	107	17	si	si	NOUN
ap-6855	107	18	interface	interface	NOUN
ap-6855	107	19	and	and	CCONJ
ap-6855	107	20	consequently	consequently	ADV
ap-6855	107	21	attack	attack	VERB
ap-6855	107	22	it	it	PRON
ap-6855	107	23	.	.	PUNCT
ap-6855	108	1	in	in	ADP
ap-6855	108	2	general	general	ADJ
ap-6855	108	3	,	,	PUNCT
ap-6855	108	4	we	we	PRON
ap-6855	108	5	believe	believe	VERB
ap-6855	108	6	that	that	SCONJ
ap-6855	108	7	both	both	DET
ap-6855	108	8	mechanisms	mechanism	NOUN
ap-6855	108	9	could	could	AUX
ap-6855	108	10	play	play	VERB
ap-6855	108	11	a	a	DET
ap-6855	108	12	role	role	NOUN
ap-6855	108	13	.	.	PUNCT
ap-6855	109	1	compared	compare	VERB
ap-6855	109	2	to	to	ADP
ap-6855	109	3	other	other	ADJ
ap-6855	109	4	reported	report	VERB
ap-6855	109	5	techniques	technique	NOUN
ap-6855	109	6	[	[	X
ap-6855	109	7	23–25	23–25	NUM
ap-6855	109	8	]	]	PUNCT
ap-6855	109	9	,	,	PUNCT
ap-6855	109	10	the	the	DET
ap-6855	109	11	delamination	delamination	NOUN
ap-6855	109	12	of	of	ADP
ap-6855	109	13	polyimide	polyimide	NOUN
ap-6855	109	14	films	film	NOUN
ap-6855	109	15	in	in	ADP
ap-6855	109	16	hf	hf	ADV
ap-6855	109	17	-	-	PUNCT
ap-6855	109	18	based	base	VERB
ap-6855	109	19	solutions	solution	NOUN
ap-6855	109	20	that	that	PRON
ap-6855	109	21	has	have	AUX
ap-6855	109	22	been	be	AUX
ap-6855	109	23	implemented	implement	VERB
ap-6855	109	24	in	in	ADP
ap-6855	109	25	this	this	DET
ap-6855	109	26	work	work	NOUN
ap-6855	109	27	can	can	AUX
ap-6855	109	28	be	be	AUX
ap-6855	109	29	considered	consider	VERB
ap-6855	109	30	fast	fast	ADJ
ap-6855	109	31	,	,	PUNCT
ap-6855	109	32	simple	simple	ADJ
ap-6855	109	33	and	and	CCONJ
ap-6855	109	34	effective	effective	ADJ
ap-6855	109	35	.	.	PUNCT
ap-6855	110	1	our	our	PRON
ap-6855	110	2	simple	simple	ADJ
ap-6855	110	3	method	method	NOUN
ap-6855	110	4	can	can	AUX
ap-6855	110	5	be	be	AUX
ap-6855	110	6	further	far	ADV
ap-6855	110	7	improved	improve	VERB
ap-6855	110	8	to	to	PART
ap-6855	110	9	pave	pave	VERB
ap-6855	110	10	the	the	DET
ap-6855	110	11	way	way	NOUN
ap-6855	110	12	for	for	ADP
ap-6855	110	13	a	a	DET
ap-6855	110	14	large	large	ADJ
ap-6855	110	15	-	-	PUNCT
ap-6855	110	16	scale	scale	NOUN
ap-6855	110	17	production	production	NOUN
ap-6855	110	18	of	of	ADP
ap-6855	110	19	polyimide	polyimide	ADJ
ap-6855	110	20	thin	thin	ADJ
ap-6855	110	21	films	film	NOUN
ap-6855	110	22	for	for	ADP
ap-6855	110	23	a	a	DET
ap-6855	110	24	wide	wide	ADJ
ap-6855	110	25	range	range	NOUN
ap-6855	110	26	of	of	ADP
ap-6855	110	27	flexible	flexible	ADJ
ap-6855	110	28	devices	device	NOUN
ap-6855	110	29	.	.	PUNCT
ap-6855	111	1	4	4	X
ap-6855	111	2	.	.	X
ap-6855	111	3	conclusion	conclusion	NOUN
ap-6855	111	4	we	we	PRON
ap-6855	111	5	have	have	AUX
ap-6855	111	6	demonstrated	demonstrate	VERB
ap-6855	111	7	the	the	DET
ap-6855	111	8	delamination	delamination	NOUN
ap-6855	111	9	of	of	ADP
ap-6855	111	10	thin	thin	ADJ
ap-6855	111	11	polyimide	polyimide	ADJ
ap-6855	111	12	films	film	NOUN
ap-6855	111	13	in	in	ADP
ap-6855	111	14	a	a	DET
ap-6855	111	15	wet	wet	NOUN
ap-6855	111	16	-	-	PUNCT
ap-6855	111	17	based	base	VERB
ap-6855	111	18	etchant	etchant	NOUN
ap-6855	111	19	.	.	PUNCT
ap-6855	112	1	polyimide	polyimide	NOUN
ap-6855	112	2	films	film	NOUN
ap-6855	112	3	of	of	ADP
ap-6855	112	4	a	a	DET
ap-6855	112	5	thickness	thickness	NOUN
ap-6855	112	6	of	of	ADP
ap-6855	112	7	around	around	ADV
ap-6855	112	8	4	4	NUM
ap-6855	112	9	µm	µm	NOUN
ap-6855	112	10	attached	attached	ADJ
ap-6855	112	11	(	(	PUNCT
ap-6855	112	12	spin	spin	NOUN
ap-6855	112	13	coated	coat	VERB
ap-6855	112	14	)	)	PUNCT
ap-6855	112	15	to	to	ADP
ap-6855	112	16	a	a	DET
ap-6855	112	17	silicon	silicon	NOUN
ap-6855	112	18	substrate	substrate	NOUN
ap-6855	112	19	have	have	AUX
ap-6855	112	20	been	be	AUX
ap-6855	112	21	immersed	immerse	VERB
ap-6855	112	22	in	in	ADP
ap-6855	112	23	hf	hf	ADV
ap-6855	112	24	-	-	PUNCT
ap-6855	112	25	based	base	VERB
ap-6855	112	26	etchant	etchant	NOUN
ap-6855	112	27	solutions	solution	NOUN
ap-6855	112	28	to	to	PART
ap-6855	112	29	investigate	investigate	VERB
ap-6855	112	30	how	how	SCONJ
ap-6855	112	31	the	the	DET
ap-6855	112	32	etchants	etchant	NOUN
ap-6855	112	33	can	can	AUX
ap-6855	112	34	affect	affect	VERB
ap-6855	112	35	the	the	DET
ap-6855	112	36	detachment	detachment	NOUN
ap-6855	112	37	of	of	ADP
ap-6855	112	38	the	the	DET
ap-6855	112	39	polymeric	polymeric	ADJ
ap-6855	112	40	films	film	NOUN
ap-6855	112	41	from	from	ADP
ap-6855	112	42	the	the	DET
ap-6855	112	43	substrate	substrate	NOUN
ap-6855	112	44	.	.	PUNCT
ap-6855	113	1	it	it	PRON
ap-6855	113	2	has	have	AUX
ap-6855	113	3	been	be	AUX
ap-6855	113	4	found	find	VERB
ap-6855	113	5	that	that	SCONJ
ap-6855	113	6	the	the	DET
ap-6855	113	7	purer	purer	NOUN
ap-6855	113	8	(	(	PUNCT
ap-6855	113	9	not	not	PART
ap-6855	113	10	fully	fully	ADV
ap-6855	113	11	diluted	dilute	VERB
ap-6855	113	12	)	)	PUNCT
ap-6855	113	13	the	the	DET
ap-6855	113	14	etchant	etchant	NOUN
ap-6855	113	15	solution	solution	NOUN
ap-6855	113	16	,	,	PUNCT
ap-6855	113	17	the	the	PRON
ap-6855	113	18	greater	great	ADJ
ap-6855	113	19	the	the	DET
ap-6855	113	20	delamination	delamination	NOUN
ap-6855	113	21	of	of	ADP
ap-6855	113	22	the	the	DET
ap-6855	113	23	film	film	NOUN
ap-6855	113	24	.	.	PUNCT
ap-6855	114	1	a	a	DET
ap-6855	114	2	full	full	ADJ
ap-6855	114	3	delamination	delamination	NOUN
ap-6855	114	4	of	of	ADP
ap-6855	114	5	the	the	DET
ap-6855	114	6	polyimide	polyimide	NOUN
ap-6855	114	7	films	film	NOUN
ap-6855	114	8	occurs	occur	VERB
ap-6855	114	9	after	after	ADP
ap-6855	114	10	∼	∼	NOUN
ap-6855	114	11	4	4	NUM
ap-6855	114	12	,	,	PUNCT
ap-6855	114	13	7	7	NUM
ap-6855	114	14	and	and	CCONJ
ap-6855	114	15	15	15	NUM
ap-6855	114	16	minutes	minute	NOUN
ap-6855	114	17	of	of	ADP
ap-6855	114	18	immersion	immersion	NOUN
ap-6855	114	19	in	in	ADP
ap-6855	114	20	hf	hf	PROPN
ap-6855	114	21	(	(	PUNCT
ap-6855	114	22	49	49	NUM
ap-6855	114	23	%	%	NOUN
ap-6855	114	24	)	)	PUNCT
ap-6855	114	25	,	,	PUNCT
ap-6855	114	26	hf	hf	ADP
ap-6855	114	27	:	:	PUNCT
ap-6855	114	28	di	di	NOUN
ap-6855	114	29	and	and	CCONJ
ap-6855	114	30	7:1	7:1	NUM
ap-6855	114	31	bhf	bhf	NOUN
ap-6855	114	32	,	,	PUNCT
ap-6855	114	33	respectively	respectively	ADV
ap-6855	114	34	.	.	PUNCT
ap-6855	115	1	the	the	DET
ap-6855	115	2	relatively	relatively	ADV
ap-6855	115	3	long	long	ADJ
ap-6855	115	4	delamination	delamination	NOUN
ap-6855	115	5	time	time	NOUN
ap-6855	115	6	can	can	AUX
ap-6855	115	7	be	be	AUX
ap-6855	115	8	compensated	compensate	VERB
ap-6855	115	9	by	by	ADP
ap-6855	115	10	taking	take	VERB
ap-6855	115	11	into	into	ADP
ap-6855	115	12	account	account	NOUN
ap-6855	115	13	the	the	DET
ap-6855	115	14	least	least	ADV
ap-6855	115	15	harmful	harmful	ADJ
ap-6855	115	16	etchant	etchant	NOUN
ap-6855	115	17	to	to	ADP
ap-6855	115	18	the	the	DET
ap-6855	115	19	deposited	deposit	VERB
ap-6855	115	20	film	film	NOUN
ap-6855	115	21	and	and	CCONJ
ap-6855	115	22	the	the	DET
ap-6855	115	23	substrate	substrate	NOUN
ap-6855	115	24	.	.	PUNCT
ap-6855	116	1	the	the	DET
ap-6855	116	2	results	result	NOUN
ap-6855	116	3	obtained	obtain	VERB
ap-6855	116	4	in	in	ADP
ap-6855	116	5	this	this	DET
ap-6855	116	6	work	work	NOUN
ap-6855	116	7	provide	provide	VERB
ap-6855	116	8	useful	useful	ADJ
ap-6855	116	9	information	information	NOUN
ap-6855	116	10	on	on	ADP
ap-6855	116	11	the	the	DET
ap-6855	116	12	compatibility	compatibility	NOUN
ap-6855	116	13	between	between	ADP
ap-6855	116	14	polyimide	polyimide	NOUN
ap-6855	116	15	films	film	NOUN
ap-6855	116	16	and	and	CCONJ
ap-6855	116	17	wet	wet	ADJ
ap-6855	116	18	etching	etch	VERB
ap-6855	116	19	processes	process	NOUN
ap-6855	116	20	when	when	SCONJ
ap-6855	116	21	hf	hf	NOUN
ap-6855	116	22	-	-	PUNCT
ap-6855	116	23	based	base	VERB
ap-6855	116	24	etchants	etchant	NOUN
ap-6855	116	25	are	be	AUX
ap-6855	116	26	involved	involve	VERB
ap-6855	116	27	.	.	PUNCT
ap-6855	117	1	references	reference	NOUN
ap-6855	117	2	[	[	X
ap-6855	117	3	1	1	X
ap-6855	117	4	]	]	PUNCT
ap-6855	117	5	j.	j.	PROPN
ap-6855	117	6	iannacci	iannacci	PROPN
ap-6855	117	7	.	.	PUNCT
ap-6855	118	1	reliability	reliability	NOUN
ap-6855	118	2	of	of	ADP
ap-6855	118	3	mems	mem	NOUN
ap-6855	118	4	:	:	PUNCT
ap-6855	118	5	a	a	DET
ap-6855	118	6	perspective	perspective	NOUN
ap-6855	118	7	on	on	ADP
ap-6855	118	8	failure	failure	NOUN
ap-6855	118	9	mechanisms	mechanism	NOUN
ap-6855	118	10	,	,	PUNCT
ap-6855	118	11	improvement	improvement	NOUN
ap-6855	118	12	solutions	solution	NOUN
ap-6855	118	13	and	and	CCONJ
ap-6855	118	14	best	good	ADJ
ap-6855	118	15	practices	practice	NOUN
ap-6855	118	16	at	at	ADP
ap-6855	118	17	development	development	NOUN
ap-6855	118	18	level	level	NOUN
ap-6855	118	19	.	.	PUNCT
ap-6855	119	1	displays	display	VERB
ap-6855	119	2	37:62–71	37:62–71	PROPN
ap-6855	119	3	,	,	PUNCT
ap-6855	119	4	2015	2015	NUM
ap-6855	119	5	.	.	PUNCT
ap-6855	120	1	https://doi.org/10.1016/j.displa.2014.08.003	https://doi.org/10.1016/j.displa.2014.08.003	PROPN
ap-6855	120	2	.	.	PUNCT
ap-6855	121	1	[	[	X
ap-6855	121	2	2	2	X
ap-6855	121	3	]	]	PUNCT
ap-6855	121	4	e.	e.	PROPN
ap-6855	121	5	h.	h.	PROPN
ap-6855	121	6	cook	cook	PROPN
ap-6855	121	7	,	,	PUNCT
ap-6855	121	8	d.	d.	PROPN
ap-6855	121	9	j.	j.	PROPN
ap-6855	121	10	d.	d.	PROPN
ap-6855	121	11	carter	carter	PROPN
ap-6855	121	12	.	.	PUNCT
ap-6855	122	1	mems	mems	PROPN
ap-6855	122	2	process	process	NOUN
ap-6855	122	3	compatibility	compatibility	NOUN
ap-6855	122	4	of	of	ADP
ap-6855	122	5	multiwall	multiwall	NOUN
ap-6855	122	6	carbon	carbon	NOUN
ap-6855	122	7	nanotubes	nanotube	NOUN
ap-6855	122	8	.	.	PUNCT
ap-6855	123	1	journal	journal	PROPN
ap-6855	123	2	of	of	ADP
ap-6855	123	3	vacuum	vacuum	PROPN
ap-6855	123	4	science	science	PROPN
ap-6855	123	5	&	&	CCONJ
ap-6855	123	6	technology	technology	PROPN
ap-6855	123	7	b	b	PROPN
ap-6855	123	8	29(6):06fe04	29(6):06fe04	NUM
ap-6855	123	9	,	,	PUNCT
ap-6855	123	10	2011	2011	NUM
ap-6855	123	11	.	.	PUNCT
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ap-6855	124	2	.	.	PUNCT
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ap-6855	125	2	3	3	X
ap-6855	125	3	]	]	X
ap-6855	125	4	b.	b.	PROPN
ap-6855	125	5	j.	j.	PROPN
ap-6855	125	6	kim	kim	PROPN
ap-6855	125	7	,	,	PUNCT
ap-6855	125	8	e.	e.	PROPN
ap-6855	125	9	meng	meng	PROPN
ap-6855	125	10	.	.	PUNCT
ap-6855	126	1	review	review	NOUN
ap-6855	126	2	of	of	ADP
ap-6855	126	3	polymer	polymer	NOUN
ap-6855	126	4	mems	mem	NOUN
ap-6855	126	5	micromachining	micromachining	NOUN
ap-6855	126	6	.	.	PUNCT
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ap-6855	127	2	of	of	ADP
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ap-6855	127	6	15(1):013001	15(1):013001	NUM
ap-6855	127	7	,	,	PUNCT
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ap-6855	127	9	.	.	PUNCT
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ap-6855	128	2	.	.	PUNCT
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ap-6855	129	2	4	4	NUM
ap-6855	129	3	]	]	PUNCT
ap-6855	129	4	a.	a.	PROPN
ap-6855	129	5	k.	k.	PROPN
ap-6855	129	6	al	al	PROPN
ap-6855	129	7	-	-	PUNCT
ap-6855	129	8	mashaal	mashaal	NOUN
ap-6855	129	9	,	,	PUNCT
ap-6855	129	10	g.	g.	PROPN
ap-6855	129	11	wood	wood	PROPN
ap-6855	129	12	,	,	PUNCT
ap-6855	129	13	e.	e.	PROPN
ap-6855	129	14	mastropaolo	mastropaolo	PROPN
ap-6855	129	15	,	,	PUNCT
ap-6855	129	16	r.	r.	PROPN
ap-6855	129	17	cheung	cheung	PROPN
ap-6855	129	18	.	.	PUNCT
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ap-6855	130	2	driven	drive	VERB
ap-6855	130	3	long	long	ADJ
ap-6855	130	4	-	-	PUNCT
ap-6855	130	5	microbeams	microbeam	NOUN
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ap-6855	130	7	low	low	ADJ
ap-6855	130	8	-	-	PUNCT
ap-6855	130	9	frequency	frequency	NOUN
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ap-6855	130	11	.	.	PUNCT
ap-6855	131	1	electronics	electronic	NOUN
ap-6855	131	2	letters	letter	NOUN
ap-6855	131	3	54(6):372	54(6):372	NUM
ap-6855	131	4	–	–	PUNCT
ap-6855	131	5	374	374	NUM
ap-6855	131	6	,	,	PUNCT
ap-6855	131	7	2018	2018	NUM
ap-6855	131	8	.	.	PUNCT
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ap-6855	132	2	.	.	PUNCT
ap-6855	133	1	687	687	NUM
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ap-6855	133	4	https://doi.org/10.1088/0960-1317/26/1/013001	https://doi.org/10.1088/0960-1317/26/1/013001	PROPN
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ap-6855	133	6	asaad	asaad	PROPN
ap-6855	133	7	k.	k.	PROPN
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ap-6855	134	2	-	-	PUNCT
ap-6855	134	3	mashaal	mashaal	NOUN
ap-6855	134	4	,	,	PUNCT
ap-6855	134	5	rebecca	rebecca	PROPN
ap-6855	134	6	cheung	cheung	PROPN
ap-6855	134	7	acta	acta	PROPN
ap-6855	134	8	polytechnica	polytechnica	PROPN
ap-6855	135	1	[	[	X
ap-6855	135	2	5	5	NUM
ap-6855	135	3	]	]	PUNCT
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ap-6855	135	5	al	al	PROPN
ap-6855	135	6	-	-	PUNCT
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ap-6855	135	8	,	,	PUNCT
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ap-6855	135	14	,	,	PUNCT
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ap-6855	135	17	.	.	PROPN
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ap-6855	135	26	.	.	PUNCT
ap-6855	136	1	journal	journal	PROPN
ap-6855	136	2	of	of	ADP
ap-6855	136	3	micromechanics	micromechanic	NOUN
ap-6855	136	4	and	and	CCONJ
ap-6855	136	5	microengineering	microengineering	NOUN
ap-6855	136	6	27(1):015020	27(1):015020	NUM
ap-6855	136	7	,	,	PUNCT
ap-6855	136	8	2017	2017	NUM
ap-6855	136	9	.	.	PUNCT
ap-6855	137	1	https://doi.org/10.1088/0960-1317/27/1/015020	https://doi.org/10.1088/0960-1317/27/1/015020	NOUN
ap-6855	137	2	.	.	PUNCT
ap-6855	138	1	[	[	X
ap-6855	138	2	6	6	NUM
ap-6855	138	3	]	]	PUNCT
ap-6855	138	4	j.	j.	PROPN
ap-6855	138	5	liu	liu	PROPN
ap-6855	138	6	,	,	PUNCT
ap-6855	138	7	z.	z.	PROPN
ap-6855	138	8	shu	shu	PROPN
ap-6855	138	9	,	,	PUNCT
ap-6855	138	10	c.	c.	PROPN
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ap-6855	138	12	,	,	PUNCT
ap-6855	138	13	et	et	PROPN
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ap-6855	138	15	.	.	PROPN
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ap-6855	138	17	of	of	ADP
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ap-6855	138	19	flexible	flexible	ADJ
ap-6855	138	20	polyimide	polyimide	NOUN
ap-6855	138	21	-	-	PUNCT
ap-6855	138	22	based	base	VERB
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ap-6855	138	24	actuated	actuate	VERB
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ap-6855	138	26	relay	relay	NOUN
ap-6855	138	27	.	.	PUNCT
ap-6855	139	1	journal	journal	NOUN
ap-6855	139	2	of	of	ADP
ap-6855	139	3	micromechanics	micromechanic	NOUN
ap-6855	139	4	and	and	CCONJ
ap-6855	139	5	microengineering	microengineere	VERB
ap-6855	139	6	28(10):105004	28(10):105004	NUM
ap-6855	139	7	,	,	PUNCT
ap-6855	139	8	2018	2018	NUM
ap-6855	139	9	.	.	PUNCT
ap-6855	140	1	https://doi.org/10.1088/1361-6439/aacd2b	https://doi.org/10.1088/1361-6439/aacd2b	ADJ
ap-6855	140	2	.	.	PUNCT
ap-6855	141	1	[	[	X
ap-6855	141	2	7	7	X
ap-6855	141	3	]	]	PUNCT
ap-6855	141	4	k.	k.	PROPN
ap-6855	141	5	s.	s.	PROPN
ap-6855	141	6	choi	choi	PROPN
ap-6855	141	7	,	,	PUNCT
ap-6855	141	8	d.	d.	PROPN
ap-6855	141	9	s.	s.	PROPN
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ap-6855	141	11	,	,	PUNCT
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ap-6855	141	16	et	et	PROPN
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ap-6855	141	18	.	.	PUNCT
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ap-6855	142	2	highly	highly	ADV
ap-6855	142	3	sensitive	sensitive	ADJ
ap-6855	142	4	humidity	humidity	NOUN
ap-6855	142	5	sensor	sensor	NOUN
ap-6855	142	6	with	with	ADP
ap-6855	142	7	a	a	DET
ap-6855	142	8	novel	novel	ADJ
ap-6855	142	9	hole	hole	NOUN
ap-6855	142	10	array	array	NOUN
ap-6855	142	11	structure	structure	NOUN
ap-6855	142	12	using	use	VERB
ap-6855	142	13	a	a	DET
ap-6855	142	14	polyimide	polyimide	ADJ
ap-6855	142	15	sensing	sense	VERB
ap-6855	142	16	layer	layer	NOUN
ap-6855	142	17	.	.	PUNCT
ap-6855	143	1	rsc	rsc	PROPN
ap-6855	143	2	advances	advance	VERB
ap-6855	143	3	4(61):32075–32080	4(61):32075–32080	NUM
ap-6855	143	4	,	,	PUNCT
ap-6855	143	5	2014	2014	NUM
ap-6855	143	6	.	.	PUNCT
ap-6855	144	1	https://doi.org/10.1039/c4ra02692f	https://doi.org/10.1039/c4ra02692f	PROPN
ap-6855	144	2	.	.	PUNCT
ap-6855	145	1	[	[	X
ap-6855	145	2	8	8	NUM
ap-6855	145	3	]	]	X
ap-6855	145	4	g.	g.	PROPN
ap-6855	145	5	zhang	zhang	PROPN
ap-6855	145	6	,	,	PUNCT
ap-6855	145	7	v.	v.	PROPN
ap-6855	145	8	chu	chu	PROPN
ap-6855	145	9	,	,	PUNCT
ap-6855	145	10	j.	j.	PROPN
ap-6855	145	11	p.	p.	PROPN
ap-6855	145	12	conde	conde	PROPN
ap-6855	145	13	.	.	PUNCT
ap-6855	146	1	electrostatically	electrostatically	ADV
ap-6855	146	2	actuated	actuate	VERB
ap-6855	146	3	bilayer	bilayer	NOUN
ap-6855	146	4	polyimide	polyimide	NOUN
ap-6855	146	5	-	-	PUNCT
ap-6855	146	6	based	base	VERB
ap-6855	146	7	microresonators	microresonator	NOUN
ap-6855	146	8	.	.	PUNCT
ap-6855	147	1	journal	journal	PROPN
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ap-6855	147	3	micromechanics	micromechanic	NOUN
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ap-6855	147	6	17(4):797–803	17(4):797–803	NOUN
ap-6855	147	7	,	,	PUNCT
ap-6855	147	8	2007	2007	NUM
ap-6855	147	9	.	.	PUNCT
ap-6855	148	1	https://doi.org/10.1088/0960-1317/17/4/017	https://doi.org/10.1088/0960-1317/17/4/017	NOUN
ap-6855	148	2	.	.	PUNCT
ap-6855	149	1	[	[	X
ap-6855	149	2	9	9	NUM
ap-6855	149	3	]	]	PUNCT
ap-6855	149	4	q.-h	q.-h	PROPN
ap-6855	149	5	.	.	PUNCT
ap-6855	150	1	lu	lu	PROPN
ap-6855	150	2	,	,	PUNCT
ap-6855	150	3	f.	f.	PROPN
ap-6855	150	4	zheng	zheng	PROPN
ap-6855	150	5	.	.	PUNCT
ap-6855	151	1	polyimides	polyimide	NOUN
ap-6855	151	2	for	for	ADP
ap-6855	151	3	electronic	electronic	ADJ
ap-6855	151	4	applications	application	NOUN
ap-6855	151	5	.	.	PUNCT
ap-6855	152	1	in	in	ADP
ap-6855	152	2	advanced	advanced	ADJ
ap-6855	152	3	polyimide	polyimide	ADJ
ap-6855	152	4	materials	material	NOUN
ap-6855	152	5	,	,	PUNCT
ap-6855	152	6	chap	chap	NOUN
ap-6855	152	7	.	.	PUNCT
ap-6855	153	1	5	5	NUM
ap-6855	153	2	,	,	PUNCT
ap-6855	153	3	pp	pp	ADJ
ap-6855	153	4	.	.	PUNCT
ap-6855	154	1	195–255	195–255	NUM
ap-6855	154	2	.	.	PUNCT
ap-6855	154	3	elsevier	elsevier	NOUN
ap-6855	154	4	,	,	PUNCT
ap-6855	154	5	2018	2018	NUM
ap-6855	154	6	.	.	PUNCT
ap-6855	155	1	https	https	NOUN
ap-6855	155	2	:	:	PUNCT
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ap-6855	156	3	b978	b978	NUM
ap-6855	156	4	-	-	PUNCT
ap-6855	156	5	0	0	NUM
ap-6855	156	6	-	-	PUNCT
ap-6855	156	7	12	12	NUM
ap-6855	156	8	-	-	PUNCT
ap-6855	156	9	812640	812640	NUM
ap-6855	156	10	-	-	PUNCT
ap-6855	156	11	0.00005	0.00005	NUM
ap-6855	156	12	-	-	PUNCT
ap-6855	156	13	6	6	NUM
ap-6855	156	14	.	.	PUNCT
ap-6855	157	1	[	[	X
ap-6855	157	2	10	10	NUM
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ap-6855	157	4	m.	m.	NOUN
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ap-6855	157	11	katiyar	katiyar	PROPN
ap-6855	157	12	.	.	PUNCT
ap-6855	158	1	review	review	NOUN
ap-6855	158	2	of	of	ADP
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ap-6855	158	4	characterization	characterization	NOUN
ap-6855	158	5	techniques	technique	NOUN
ap-6855	158	6	for	for	ADP
ap-6855	158	7	thin	thin	ADJ
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ap-6855	158	12	electronics	electronic	NOUN
ap-6855	158	13	.	.	PUNCT
ap-6855	159	1	critical	critical	ADJ
ap-6855	159	2	reviews	review	NOUN
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ap-6855	159	10	,	,	PUNCT
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ap-6855	159	12	.	.	PUNCT
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ap-6855	160	2	.	.	PUNCT
ap-6855	161	1	[	[	X
ap-6855	161	2	11	11	NUM
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ap-6855	161	5	y.	y.	PROPN
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ap-6855	161	7	,	,	PUNCT
ap-6855	161	8	l.	l.	PROPN
ap-6855	161	9	f.	f.	PROPN
ap-6855	161	10	che	che	PROPN
ap-6855	161	11	,	,	PUNCT
ap-6855	161	12	x.	x.	PROPN
ap-6855	161	13	x.	x.	PROPN
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ap-6855	161	16	y.	y.	PROPN
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ap-6855	162	4	process	process	NOUN
ap-6855	162	5	of	of	ADP
ap-6855	162	6	mems	mems	ADJ
ap-6855	162	7	devices	device	NOUN
ap-6855	162	8	on	on	ADP
ap-6855	162	9	polyimide	polyimide	ADJ
ap-6855	162	10	flexible	flexible	ADJ
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ap-6855	162	12	.	.	PUNCT
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ap-6855	163	4	,	,	PUNCT
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ap-6855	163	6	.	.	PUNCT
ap-6855	164	1	https://doi.org/10.1016/j.mee.2007.08.004	https://doi.org/10.1016/j.mee.2007.08.004	NOUN
ap-6855	164	2	.	.	PUNCT
ap-6855	165	1	[	[	X
ap-6855	165	2	12	12	NUM
ap-6855	165	3	]	]	X
ap-6855	165	4	c.	c.	PROPN
ap-6855	165	5	liu	liu	PROPN
ap-6855	165	6	.	.	PUNCT
ap-6855	166	1	recent	recent	ADJ
ap-6855	166	2	developments	development	NOUN
ap-6855	166	3	in	in	ADP
ap-6855	166	4	polymer	polymer	NOUN
ap-6855	166	5	mems	mem	NOUN
ap-6855	166	6	.	.	PUNCT
ap-6855	167	1	advanced	advanced	ADJ
ap-6855	167	2	materials	material	NOUN
ap-6855	167	3	19(22):3783–3790	19(22):3783–3790	NUM
ap-6855	167	4	,	,	PUNCT
ap-6855	167	5	2007	2007	NUM
ap-6855	167	6	.	.	PUNCT
ap-6855	168	1	https://doi.org/10.1002/adma.200701709	https://doi.org/10.1002/adma.200701709	NOUN
ap-6855	168	2	.	.	PUNCT
ap-6855	169	1	[	[	X
ap-6855	169	2	13	13	NUM
ap-6855	169	3	]	]	X
ap-6855	169	4	d.	d.	PROPN
ap-6855	169	5	zhuang	zhuang	PROPN
ap-6855	169	6	,	,	PUNCT
ap-6855	169	7	j.	j.	PROPN
ap-6855	169	8	h.	h.	PROPN
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ap-6855	169	10	.	.	PUNCT
ap-6855	170	1	wet	wet	ADJ
ap-6855	170	2	etching	etch	VERB
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ap-6855	170	5	,	,	PUNCT
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ap-6855	170	7	,	,	PUNCT
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ap-6855	170	10	:	:	PUNCT
ap-6855	170	11	a	a	DET
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ap-6855	170	13	.	.	PUNCT
ap-6855	171	1	materials	material	NOUN
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ap-6855	171	5	:	:	PUNCT
ap-6855	172	1	r	r	NOUN
ap-6855	172	2	:	:	PUNCT
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ap-6855	172	5	,	,	PUNCT
ap-6855	172	6	2005	2005	NUM
ap-6855	172	7	.	.	PUNCT
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ap-6855	174	14	in	in	ADP
ap-6855	174	15	hf	hf	ADV
ap-6855	174	16	-	-	PUNCT
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ap-6855	174	19	.	.	PUNCT
ap-6855	175	1	journal	journal	NOUN
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ap-6855	175	3	the	the	DET
ap-6855	175	4	american	american	PROPN
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ap-6855	175	8	,	,	PUNCT
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ap-6855	175	10	.	.	PUNCT
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ap-6855	176	2	.	.	PUNCT
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ap-6855	177	5	r.	r.	PROPN
ap-6855	177	6	williams	williams	PROPN
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ap-6855	177	9	gupta	gupta	PROPN
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ap-6855	177	12	wasilik	wasilik	PROPN
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ap-6855	178	6	–	–	PUNCT
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ap-6855	179	8	.	.	PUNCT
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ap-6855	181	14	k.	k.	PROPN
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ap-6855	182	9	.	.	PUNCT
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ap-6855	183	8	,	,	PUNCT
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ap-6855	183	10	.	.	PUNCT
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ap-6855	185	16	.	.	PUNCT
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ap-6855	186	10	.	.	PUNCT
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ap-6855	187	7	,	,	PUNCT
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ap-6855	187	9	.	.	PUNCT
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ap-6855	188	2	.	.	PUNCT
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ap-6855	190	5	of	of	ADP
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ap-6855	190	7	for	for	ADP
ap-6855	190	8	microfluidic	microfluidic	ADJ
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ap-6855	190	10	.	.	PUNCT
ap-6855	191	1	journal	journal	NOUN
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ap-6855	191	4	korean	korean	ADJ
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ap-6855	191	8	,	,	PUNCT
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ap-6855	191	10	.	.	PUNCT
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ap-6855	192	2	.	.	PUNCT
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ap-6855	193	12	e.	e.	PROPN
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ap-6855	194	9	.	.	PUNCT
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ap-6855	195	5	:	:	PUNCT
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ap-6855	195	8	,	,	PUNCT
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ap-6855	195	10	.	.	PUNCT
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ap-6855	196	2	.	.	PUNCT
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ap-6855	197	2	20	20	NUM
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ap-6855	197	5	l.	l.	PROPN
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ap-6855	197	9	.	.	PUNCT
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ap-6855	197	11	.	.	PUNCT
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ap-6855	198	7	.	.	PUNCT
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ap-6855	199	3	,	,	PUNCT
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ap-6855	199	5	.	.	PUNCT
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ap-6855	200	2	.	.	PUNCT
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ap-6855	201	9	t.	t.	PROPN
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ap-6855	201	15	.	.	PUNCT
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ap-6855	202	9	a	a	DET
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ap-6855	203	4	,	,	PUNCT
ap-6855	203	5	2002	2002	NUM
ap-6855	203	6	.	.	PUNCT
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ap-6855	204	2	.	.	PUNCT
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ap-6855	205	2	22	22	NUM
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ap-6855	205	5	s.	s.	PROPN
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ap-6855	205	35	.	.	PUNCT
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ap-6855	206	16	e7244	e7244	PROPN
ap-6855	206	17	,	,	PUNCT
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ap-6855	206	19	.	.	PUNCT
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ap-6855	210	7	,	,	PUNCT
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ap-6855	210	9	.	.	PUNCT
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ap-6855	215	5	,	,	PUNCT
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ap-6855	215	7	.	.	PUNCT
ap-6855	216	1	https://doi.org/10.1007/s00340-013-5478-2	https://doi.org/10.1007/s00340-013-5478-2	NUM
ap-6855	216	2	.	.	PUNCT
ap-6855	217	1	[	[	X
ap-6855	217	2	25	25	NUM
ap-6855	217	3	]	]	PUNCT
ap-6855	217	4	t.	t.	PROPN
ap-6855	217	5	walter	walter	PROPN
ap-6855	217	6	,	,	PUNCT
ap-6855	217	7	m.	m.	PROPN
ap-6855	217	8	lederer	lederer	PROPN
ap-6855	217	9	,	,	PUNCT
ap-6855	217	10	g.	g.	PROPN
ap-6855	217	11	khatibi	khatibi	PROPN
ap-6855	217	12	.	.	PUNCT
ap-6855	218	1	delamination	delamination	NOUN
ap-6855	218	2	of	of	ADP
ap-6855	218	3	polyimide	polyimide	ADJ
ap-6855	218	4	/	/	SYM
ap-6855	218	5	cu	cu	NOUN
ap-6855	218	6	films	film	NOUN
ap-6855	218	7	under	under	ADP
ap-6855	218	8	mixed	mixed	ADJ
ap-6855	218	9	mode	mode	NOUN
ap-6855	218	10	loading	loading	NOUN
ap-6855	218	11	.	.	PUNCT
ap-6855	219	1	microelectronics	microelectronic	NOUN
ap-6855	219	2	reliability	reliability	NOUN
ap-6855	219	3	64:281–286	64:281–286	NUM
ap-6855	219	4	,	,	PUNCT
ap-6855	219	5	2016	2016	NUM
ap-6855	219	6	.	.	PUNCT
ap-6855	220	1	https://doi.org/10.1016/j.microrel.2016.07.100	https://doi.org/10.1016/j.microrel.2016.07.100	PROPN
ap-6855	220	2	.	.	PUNCT
ap-6855	221	1	688	688	NUM
ap-6855	221	2	https://doi.org/10.1088/0960-1317/27/1/015020	https://doi.org/10.1088/0960-1317/27/1/015020	NOUN
ap-6855	221	3	https://doi.org/10.1088/1361-6439/aacd2b	https://doi.org/10.1088/1361-6439/aacd2b	ADJ
ap-6855	221	4	https://doi.org/10.1039/c4ra02692f	https://doi.org/10.1039/c4ra02692f	PROPN
ap-6855	221	5	https://doi.org/10.1088/0960-1317/17/4/017	https://doi.org/10.1088/0960-1317/17/4/017	NOUN
ap-6855	221	6	https://doi.org/10.1016/b978-0-12-812640-0.00005-6	https://doi.org/10.1016/b978-0-12-812640-0.00005-6	PROPN
ap-6855	221	7	https://doi.org/10.1016/b978-0-12-812640-0.00005-6	https://doi.org/10.1016/b978-0-12-812640-0.00005-6	PROPN
ap-6855	221	8	https://doi.org/10.1080/10408436.2016.1186006	https://doi.org/10.1080/10408436.2016.1186006	PROPN
ap-6855	221	9	https://doi.org/10.1016/j.mee.2007.08.004	https://doi.org/10.1016/j.mee.2007.08.004	NOUN
ap-6855	221	10	https://doi.org/10.1002/adma.200701709	https://doi.org/10.1002/adma.200701709	PROPN
ap-6855	221	11	https://doi.org/10.1016/j.mser.2004.11.002	https://doi.org/10.1016/j.mser.2004.11.002	NOUN
ap-6855	221	12	https://doi.org/10.1021/ja993803z	https://doi.org/10.1021/ja993803z	NOUN
ap-6855	221	13	https://doi.org/10.1109/jmems.2003.820936	https://doi.org/10.1109/jmems.2003.820936	PROPN
ap-6855	221	14	https://doi.org/10.1541/ieejsmas.125.27	https://doi.org/10.1541/ieejsmas.125.27	PROPN
ap-6855	221	15	https://doi.org/10.1088/0960-1317/25/3/035022	https://doi.org/10.1088/0960-1317/25/3/035022	PROPN
ap-6855	221	16	https://doi.org/10.3938/jkps.51.984	https://doi.org/10.3938/jkps.51.984	PROPN
ap-6855	221	17	https://doi.org/10.1016/j.sna.2006.04.048	https://doi.org/10.1016/j.sna.2006.04.048	NOUN
ap-6855	221	18	https://doi.org/10.1201/b12020	https://doi.org/10.1201/b12020	NUM
ap-6855	221	19	https://doi.org/10.1016/s1359-6454(01)00421-9	https://doi.org/10.1016/s1359-6454(01)00421-9	NOUN
ap-6855	221	20	https://doi.org/10.1073/pnas.1806640115	https://doi.org/10.1073/pnas.1806640115	NOUN
ap-6855	221	21	https://doi.org/10.1016/j.compositesb.2010.05.008	https://doi.org/10.1016/j.compositesb.2010.05.008	NOUN
ap-6855	221	22	https://doi.org/10.1016/j.compositesb.2010.05.008	https://doi.org/10.1016/j.compositesb.2010.05.008	NOUN
ap-6855	221	23	https://doi.org/10.1007/s00340-013-5478-2	https://doi.org/10.1007/s00340-013-5478-2	NUM
ap-6855	221	24	https://doi.org/10.1016/j.microrel.2016.07.100	https://doi.org/10.1016/j.microrel.2016.07.100	PROPN
ap-6855	221	25	acta	acta	PROPN
ap-6855	221	26	polytechnica	polytechnica	PROPN
ap-6855	221	27	61(6):684–688	61(6):684–688	PROPN
ap-6855	221	28	,	,	PUNCT
ap-6855	221	29	2021	2021	NUM
ap-6855	221	30	1	1	NUM
ap-6855	221	31	introduction	introduction	NOUN
ap-6855	221	32	2	2	NUM
ap-6855	221	33	experimental	experimental	ADJ
ap-6855	221	34	3	3	NUM
ap-6855	221	35	results	result	NOUN
ap-6855	221	36	and	and	CCONJ
ap-6855	221	37	discussion	discussion	NOUN
ap-6855	221	38	4	4	NUM
ap-6855	221	39	conclusion	conclusion	NOUN
ap-6855	221	40	references	reference	NOUN