id	sid	tid	token	lemma	pos
ap-8360	1	1	acta	acta	PROPN
ap-8360	1	2	polytechnica	polytechnica	PROPN
ap-8360	1	3	https://doi.org/10.14311/ap.2023.63.0036	https://doi.org/10.14311/ap.2023.63.0036	PROPN
ap-8360	1	4	acta	acta	PROPN
ap-8360	1	5	polytechnica	polytechnica	PROPN
ap-8360	1	6	63(1):36–49	63(1):36–49	NUM
ap-8360	1	7	,	,	PUNCT
ap-8360	1	8	2023	2023	NUM
ap-8360	1	9	©	©	ADP
ap-8360	1	10	2023	2023	NUM
ap-8360	1	11	the	the	DET
ap-8360	1	12	author(s	author(s	NOUN
ap-8360	1	13	)	)	PUNCT
ap-8360	1	14	.	.	PUNCT
ap-8360	2	1	licensed	license	VERB
ap-8360	2	2	under	under	ADP
ap-8360	2	3	a	a	DET
ap-8360	2	4	cc	cc	NOUN
ap-8360	2	5	-	-	PUNCT
ap-8360	2	6	by	by	ADP
ap-8360	2	7	4.0	4.0	NUM
ap-8360	2	8	licence	licence	NOUN
ap-8360	2	9	published	publish	VERB
ap-8360	2	10	by	by	ADP
ap-8360	2	11	the	the	DET
ap-8360	2	12	czech	czech	PROPN
ap-8360	2	13	technical	technical	PROPN
ap-8360	2	14	university	university	PROPN
ap-8360	2	15	in	in	ADP
ap-8360	2	16	prague	prague	NOUN
ap-8360	2	17	femtosecond	femtosecond	NOUN
ap-8360	2	18	laser	laser	NOUN
ap-8360	2	19	processing	processing	NOUN
ap-8360	2	20	of	of	ADP
ap-8360	2	21	advanced	advanced	ADJ
ap-8360	2	22	technical	technical	ADJ
ap-8360	2	23	materials	material	NOUN
ap-8360	2	24	tomáš	tomáš	ADP
ap-8360	2	25	primusa	primusa	NOUN
ap-8360	2	26	,	,	PUNCT
ap-8360	2	27	b,∗	b,∗	NOUN
ap-8360	2	28	,	,	PUNCT
ap-8360	2	29	martin	martin	PROPN
ap-8360	2	30	nováka	nováka	PROPN
ap-8360	2	31	,	,	PUNCT
ap-8360	2	32	pavel	pavel	PROPN
ap-8360	2	33	zemana	zemana	PROPN
ap-8360	2	34	,	,	PUNCT
ap-8360	2	35	františek	františek	NOUN
ap-8360	2	36	holešovskýb	holešovskýb	VERB
ap-8360	2	37	a	a	DET
ap-8360	2	38	czech	czech	PROPN
ap-8360	2	39	technical	technical	PROPN
ap-8360	2	40	university	university	PROPN
ap-8360	2	41	in	in	ADP
ap-8360	2	42	prague	prague	PROPN
ap-8360	2	43	,	,	PUNCT
ap-8360	2	44	faculty	faculty	NOUN
ap-8360	2	45	of	of	ADP
ap-8360	2	46	mechanical	mechanical	ADJ
ap-8360	2	47	engineering	engineering	NOUN
ap-8360	2	48	,	,	PUNCT
ap-8360	2	49	department	department	NOUN
ap-8360	2	50	of	of	ADP
ap-8360	2	51	production	production	NOUN
ap-8360	2	52	machines	machine	NOUN
ap-8360	2	53	and	and	CCONJ
ap-8360	2	54	equipment	equipment	NOUN
ap-8360	2	55	,	,	PUNCT
ap-8360	2	56	horská	horská	NOUN
ap-8360	2	57	3	3	NUM
ap-8360	2	58	,	,	PUNCT
ap-8360	2	59	128	128	NUM
ap-8360	2	60	00	00	NUM
ap-8360	2	61	–	–	PUNCT
ap-8360	2	62	prague	prague	NOUN
ap-8360	2	63	2	2	NUM
ap-8360	2	64	,	,	PUNCT
ap-8360	2	65	czech	czech	PROPN
ap-8360	2	66	republic	republic	PROPN
ap-8360	2	67	b	b	PROPN
ap-8360	2	68	czech	czech	PROPN
ap-8360	2	69	technical	technical	PROPN
ap-8360	2	70	university	university	PROPN
ap-8360	2	71	in	in	ADP
ap-8360	2	72	prague	prague	PROPN
ap-8360	2	73	,	,	PUNCT
ap-8360	2	74	faculty	faculty	NOUN
ap-8360	2	75	of	of	ADP
ap-8360	2	76	mechanical	mechanical	ADJ
ap-8360	2	77	engineering	engineering	NOUN
ap-8360	2	78	,	,	PUNCT
ap-8360	2	79	department	department	NOUN
ap-8360	2	80	of	of	ADP
ap-8360	2	81	machining	machining	NOUN
ap-8360	2	82	,	,	PUNCT
ap-8360	2	83	process	process	NOUN
ap-8360	2	84	planning	planning	NOUN
ap-8360	2	85	and	and	CCONJ
ap-8360	2	86	metrology	metrology	NOUN
ap-8360	2	87	,	,	PUNCT
ap-8360	2	88	technická	technická	NOUN
ap-8360	2	89	4	4	NUM
ap-8360	2	90	,	,	PUNCT
ap-8360	2	91	160	160	NUM
ap-8360	2	92	00	00	NUM
ap-8360	2	93	–	–	PUNCT
ap-8360	2	94	prague	prague	NOUN
ap-8360	2	95	6	6	NUM
ap-8360	2	96	,	,	PUNCT
ap-8360	2	97	czech	czech	PROPN
ap-8360	2	98	republic	republic	NOUN
ap-8360	2	99	∗	∗	NOUN
ap-8360	2	100	corresponding	correspond	VERB
ap-8360	2	101	author	author	NOUN
ap-8360	2	102	:	:	PUNCT
ap-8360	2	103	t.primus@rcmt.cvut.cz	t.primus@rcmt.cvut.cz	VERB
ap-8360	2	104	abstract	abstract	ADJ
ap-8360	2	105	.	.	PUNCT
ap-8360	3	1	ultra	ultra	ADJ
ap-8360	3	2	-	-	ADJ
ap-8360	3	3	short	short	ADJ
ap-8360	3	4	pulsed	pulse	VERB
ap-8360	3	5	laser	laser	NOUN
ap-8360	3	6	ablation	ablation	NOUN
ap-8360	3	7	may	may	AUX
ap-8360	3	8	be	be	AUX
ap-8360	3	9	used	use	VERB
ap-8360	3	10	for	for	ADP
ap-8360	3	11	high	high	ADJ
ap-8360	3	12	-	-	PUNCT
ap-8360	3	13	precision	precision	NOUN
ap-8360	3	14	machining	machining	NOUN
ap-8360	3	15	with	with	ADP
ap-8360	3	16	very	very	ADV
ap-8360	3	17	low	low	ADJ
ap-8360	3	18	thermal	thermal	ADJ
ap-8360	3	19	influence	influence	NOUN
ap-8360	3	20	on	on	ADP
ap-8360	3	21	the	the	DET
ap-8360	3	22	processed	process	VERB
ap-8360	3	23	materials	material	NOUN
ap-8360	3	24	.	.	PUNCT
ap-8360	4	1	due	due	ADP
ap-8360	4	2	to	to	ADP
ap-8360	4	3	this	this	DET
ap-8360	4	4	reason	reason	NOUN
ap-8360	4	5	,	,	PUNCT
ap-8360	4	6	lasers	laser	NOUN
ap-8360	4	7	are	be	AUX
ap-8360	4	8	increasingly	increasingly	ADV
ap-8360	4	9	used	use	VERB
ap-8360	4	10	for	for	ADP
ap-8360	4	11	processing	processing	NOUN
ap-8360	4	12	of	of	ADP
ap-8360	4	13	advanced	advanced	ADJ
ap-8360	4	14	materials	material	NOUN
ap-8360	4	15	,	,	PUNCT
ap-8360	4	16	such	such	ADJ
ap-8360	4	17	as	as	ADP
ap-8360	4	18	titanium	titanium	NOUN
ap-8360	4	19	alloys	alloy	NOUN
ap-8360	4	20	,	,	PUNCT
ap-8360	4	21	nickel	nickel	NOUN
ap-8360	4	22	-	-	PUNCT
ap-8360	4	23	based	base	VERB
ap-8360	4	24	alloys	alloy	NOUN
ap-8360	4	25	or	or	CCONJ
ap-8360	4	26	steel	steel	NOUN
ap-8360	4	27	,	,	PUNCT
ap-8360	4	28	every	every	DET
ap-8360	4	29	year	year	NOUN
ap-8360	4	30	.	.	PUNCT
ap-8360	5	1	in	in	ADP
ap-8360	5	2	this	this	DET
ap-8360	5	3	study	study	NOUN
ap-8360	5	4	,	,	PUNCT
ap-8360	5	5	four	four	NUM
ap-8360	5	6	advanced	advanced	ADJ
ap-8360	5	7	technical	technical	ADJ
ap-8360	5	8	materials	material	NOUN
ap-8360	5	9	were	be	AUX
ap-8360	5	10	analysed	analyse	VERB
ap-8360	5	11	and	and	CCONJ
ap-8360	5	12	compared	compare	VERB
ap-8360	5	13	under	under	ADP
ap-8360	5	14	femtosecond	femtosecond	NOUN
ap-8360	5	15	laser	laser	NOUN
ap-8360	5	16	irradiation	irradiation	NOUN
ap-8360	5	17	with	with	ADP
ap-8360	5	18	three	three	NUM
ap-8360	5	19	different	different	ADJ
ap-8360	5	20	wavelengths	wavelength	NOUN
ap-8360	5	21	.	.	PUNCT
ap-8360	6	1	the	the	DET
ap-8360	6	2	main	main	ADJ
ap-8360	6	3	laser	laser	NOUN
ap-8360	6	4	-	-	PUNCT
ap-8360	6	5	material	material	NOUN
ap-8360	6	6	interaction	interaction	NOUN
ap-8360	6	7	parameters	parameter	NOUN
ap-8360	6	8	were	be	AUX
ap-8360	6	9	identified	identify	VERB
ap-8360	6	10	,	,	PUNCT
ap-8360	6	11	namely	namely	ADV
ap-8360	6	12	the	the	DET
ap-8360	6	13	ablation	ablation	NOUN
ap-8360	6	14	threshold	threshold	NOUN
ap-8360	6	15	and	and	CCONJ
ap-8360	6	16	removal	removal	NOUN
ap-8360	6	17	efficiency	efficiency	NOUN
ap-8360	6	18	parameters	parameter	NOUN
ap-8360	6	19	.	.	PUNCT
ap-8360	7	1	higher	high	ADJ
ap-8360	7	2	removal	removal	NOUN
ap-8360	7	3	rates	rate	NOUN
ap-8360	7	4	were	be	AUX
ap-8360	7	5	found	find	VERB
ap-8360	7	6	for	for	ADP
ap-8360	7	7	ti6al4v	ti6al4v	PUNCT
ap-8360	7	8	alloy	alloy	NOUN
ap-8360	7	9	with	with	ADP
ap-8360	7	10	all	all	DET
ap-8360	7	11	three	three	NUM
ap-8360	7	12	harmonic	harmonic	ADJ
ap-8360	7	13	wavelengths	wavelength	NOUN
ap-8360	7	14	.	.	PUNCT
ap-8360	8	1	to	to	PART
ap-8360	8	2	increase	increase	VERB
ap-8360	8	3	process	process	NOUN
ap-8360	8	4	productivity	productivity	NOUN
ap-8360	8	5	,	,	PUNCT
ap-8360	8	6	a	a	DET
ap-8360	8	7	method	method	NOUN
ap-8360	8	8	of	of	ADP
ap-8360	8	9	increasing	increase	VERB
ap-8360	8	10	the	the	DET
ap-8360	8	11	repetition	repetition	NOUN
ap-8360	8	12	rate	rate	NOUN
ap-8360	8	13	and	and	CCONJ
ap-8360	8	14	scanning	scan	VERB
ap-8360	8	15	speed	speed	NOUN
ap-8360	8	16	was	be	AUX
ap-8360	8	17	presented	present	VERB
ap-8360	8	18	.	.	PUNCT
ap-8360	9	1	with	with	ADP
ap-8360	9	2	the	the	DET
ap-8360	9	3	maximum	maximum	ADJ
ap-8360	9	4	repetition	repetition	NOUN
ap-8360	9	5	rate	rate	NOUN
ap-8360	9	6	,	,	PUNCT
ap-8360	9	7	the	the	DET
ap-8360	9	8	productivity	productivity	NOUN
ap-8360	9	9	increased	increase	VERB
ap-8360	9	10	five	five	NUM
ap-8360	9	11	-	-	NOUN
ap-8360	9	12	fold	fold	ADJ
ap-8360	9	13	with	with	ADP
ap-8360	9	14	a	a	DET
ap-8360	9	15	similar	similar	ADJ
ap-8360	9	16	removed	removed	ADJ
ap-8360	9	17	depth	depth	NOUN
ap-8360	9	18	and	and	CCONJ
ap-8360	9	19	surface	surface	NOUN
ap-8360	9	20	quality	quality	NOUN
ap-8360	9	21	.	.	PUNCT
ap-8360	10	1	finally	finally	ADV
ap-8360	10	2	,	,	PUNCT
ap-8360	10	3	the	the	DET
ap-8360	10	4	suitability	suitability	NOUN
ap-8360	10	5	of	of	ADP
ap-8360	10	6	the	the	DET
ap-8360	10	7	identified	identify	VERB
ap-8360	10	8	parameters	parameter	NOUN
ap-8360	10	9	with	with	ADP
ap-8360	10	10	regard	regard	NOUN
ap-8360	10	11	to	to	ADP
ap-8360	10	12	quality	quality	NOUN
ap-8360	10	13	and	and	CCONJ
ap-8360	10	14	productivity	productivity	NOUN
ap-8360	10	15	was	be	AUX
ap-8360	10	16	demonstrated	demonstrate	VERB
ap-8360	10	17	for	for	ADP
ap-8360	10	18	fabrication	fabrication	NOUN
ap-8360	10	19	of	of	ADP
ap-8360	10	20	two	two	NUM
ap-8360	10	21	complex	complex	ADJ
ap-8360	10	22	structures	structure	NOUN
ap-8360	10	23	–	–	PUNCT
ap-8360	10	24	honeycomb	honeycomb	VERB
ap-8360	10	25	and	and	CCONJ
ap-8360	10	26	dot	dot	NOUN
ap-8360	10	27	–	–	PUNCT
ap-8360	10	28	which	which	PRON
ap-8360	10	29	has	have	VERB
ap-8360	10	30	the	the	DET
ap-8360	10	31	potential	potential	NOUN
ap-8360	10	32	to	to	PART
ap-8360	10	33	improve	improve	VERB
ap-8360	10	34	friction	friction	NOUN
ap-8360	10	35	properties	property	NOUN
ap-8360	10	36	of	of	ADP
ap-8360	10	37	advanced	advanced	ADJ
ap-8360	10	38	materials	material	NOUN
ap-8360	10	39	.	.	PUNCT
ap-8360	11	1	keywords	keyword	NOUN
ap-8360	11	2	:	:	PUNCT
ap-8360	11	3	femtosecond	femtosecond	VERB
ap-8360	11	4	laser	laser	NOUN
ap-8360	11	5	ablation	ablation	NOUN
ap-8360	11	6	,	,	PUNCT
ap-8360	11	7	ti6al4v	ti6al4v	X
ap-8360	11	8	,	,	PUNCT
ap-8360	11	9	inconel	inconel	NOUN
ap-8360	11	10	718	718	NUM
ap-8360	11	11	,	,	PUNCT
ap-8360	11	12	aisi	aisi	PROPN
ap-8360	11	13	316l	316l	PROPN
ap-8360	11	14	,	,	PUNCT
ap-8360	11	15	tool	tool	NOUN
ap-8360	11	16	steel	steel	NOUN
ap-8360	11	17	,	,	PUNCT
ap-8360	11	18	surface	surface	NOUN
ap-8360	11	19	texture	texture	NOUN
ap-8360	11	20	.	.	PUNCT
ap-8360	12	1	1	1	X
ap-8360	12	2	.	.	X
ap-8360	12	3	introduction	introduction	NOUN
ap-8360	12	4	ultra	ultra	ADJ
ap-8360	12	5	-	-	ADJ
ap-8360	12	6	fast	fast	ADJ
ap-8360	12	7	lasers	laser	NOUN
ap-8360	12	8	operating	operate	VERB
ap-8360	12	9	with	with	ADP
ap-8360	12	10	femtosecond	femtosecond	NOUN
ap-8360	12	11	or	or	CCONJ
ap-8360	12	12	picosecond	picosecond	NOUN
ap-8360	12	13	pulses	pulse	NOUN
ap-8360	12	14	have	have	AUX
ap-8360	12	15	seen	see	VERB
ap-8360	12	16	a	a	DET
ap-8360	12	17	significant	significant	ADJ
ap-8360	12	18	development	development	NOUN
ap-8360	12	19	in	in	ADP
ap-8360	12	20	the	the	DET
ap-8360	12	21	last	last	ADJ
ap-8360	12	22	few	few	ADJ
ap-8360	12	23	years	year	NOUN
ap-8360	13	1	[	[	X
ap-8360	13	2	1	1	NUM
ap-8360	13	3	]	]	PUNCT
ap-8360	13	4	.	.	PUNCT
ap-8360	14	1	they	they	PRON
ap-8360	14	2	have	have	AUX
ap-8360	14	3	become	become	VERB
ap-8360	14	4	irreplaceable	irreplaceable	ADJ
ap-8360	14	5	in	in	ADP
ap-8360	14	6	many	many	ADJ
ap-8360	14	7	industrial	industrial	ADJ
ap-8360	14	8	sectors	sector	NOUN
ap-8360	14	9	,	,	PUNCT
ap-8360	14	10	such	such	ADJ
ap-8360	14	11	as	as	ADP
ap-8360	14	12	electronics	electronic	NOUN
ap-8360	14	13	[	[	X
ap-8360	14	14	2	2	NUM
ap-8360	14	15	]	]	PUNCT
ap-8360	14	16	,	,	PUNCT
ap-8360	14	17	material	material	NOUN
ap-8360	14	18	processing	processing	NOUN
ap-8360	14	19	[	[	X
ap-8360	14	20	3	3	NUM
ap-8360	14	21	]	]	PUNCT
ap-8360	14	22	or	or	CCONJ
ap-8360	14	23	surface	surface	NOUN
ap-8360	14	24	structuring	structuring	NOUN
ap-8360	14	25	and	and	CCONJ
ap-8360	14	26	functionalization	functionalization	NOUN
ap-8360	14	27	[	[	X
ap-8360	14	28	3	3	NUM
ap-8360	14	29	,	,	PUNCT
ap-8360	14	30	4	4	NUM
ap-8360	14	31	]	]	PUNCT
ap-8360	14	32	.	.	PUNCT
ap-8360	15	1	the	the	DET
ap-8360	15	2	benefits	benefit	NOUN
ap-8360	15	3	of	of	ADP
ap-8360	15	4	ultra	ultra	ADJ
ap-8360	15	5	-	-	ADJ
ap-8360	15	6	fast	fast	ADJ
ap-8360	15	7	laser	laser	NOUN
ap-8360	15	8	processing	processing	NOUN
ap-8360	15	9	include	include	VERB
ap-8360	15	10	very	very	ADV
ap-8360	15	11	precise	precise	ADJ
ap-8360	15	12	material	material	NOUN
ap-8360	15	13	processing	processing	NOUN
ap-8360	15	14	without	without	ADP
ap-8360	15	15	heat	heat	NOUN
ap-8360	15	16	affection	affection	NOUN
ap-8360	15	17	and	and	CCONJ
ap-8360	15	18	high	high	ADJ
ap-8360	15	19	process	process	NOUN
ap-8360	15	20	control	control	NOUN
ap-8360	15	21	[	[	X
ap-8360	15	22	5	5	NUM
ap-8360	15	23	]	]	PUNCT
ap-8360	15	24	.	.	PUNCT
ap-8360	16	1	however	however	ADV
ap-8360	16	2	,	,	PUNCT
ap-8360	16	3	the	the	DET
ap-8360	16	4	knowledge	knowledge	NOUN
ap-8360	16	5	of	of	ADP
ap-8360	16	6	ablation	ablation	NOUN
ap-8360	16	7	behaviour	behaviour	NOUN
ap-8360	16	8	and	and	CCONJ
ap-8360	16	9	laser	laser	NOUN
ap-8360	16	10	-	-	PUNCT
ap-8360	16	11	matter	matter	NOUN
ap-8360	16	12	interaction	interaction	NOUN
ap-8360	16	13	is	be	AUX
ap-8360	16	14	crucial	crucial	ADJ
ap-8360	16	15	before	before	ADP
ap-8360	16	16	commencing	commence	VERB
ap-8360	16	17	material	material	NOUN
ap-8360	16	18	processing	processing	NOUN
ap-8360	16	19	.	.	PUNCT
ap-8360	17	1	basic	basic	ADJ
ap-8360	17	2	ablation	ablation	NOUN
ap-8360	17	3	characteristics	characteristic	NOUN
ap-8360	17	4	include	include	VERB
ap-8360	17	5	an	an	DET
ap-8360	17	6	ablation	ablation	NOUN
ap-8360	17	7	threshold	threshold	NOUN
ap-8360	17	8	and	and	CCONJ
ap-8360	17	9	removal	removal	NOUN
ap-8360	17	10	efficiency	efficiency	NOUN
ap-8360	17	11	[	[	X
ap-8360	17	12	6	6	NUM
ap-8360	17	13	,	,	PUNCT
ap-8360	17	14	7	7	NUM
ap-8360	17	15	]	]	PUNCT
ap-8360	17	16	.	.	PUNCT
ap-8360	18	1	the	the	DET
ap-8360	18	2	ablation	ablation	NOUN
ap-8360	18	3	threshold	threshold	NOUN
ap-8360	18	4	indicates	indicate	VERB
ap-8360	18	5	the	the	DET
ap-8360	18	6	minimum	minimum	ADJ
ap-8360	18	7	fluence	fluence	NOUN
ap-8360	18	8	needed	need	VERB
ap-8360	18	9	to	to	PART
ap-8360	18	10	start	start	VERB
ap-8360	18	11	the	the	DET
ap-8360	18	12	material	material	NOUN
ap-8360	18	13	ablation	ablation	NOUN
ap-8360	18	14	[	[	X
ap-8360	18	15	5	5	NUM
ap-8360	18	16	,	,	PUNCT
ap-8360	18	17	8	8	NUM
ap-8360	18	18	,	,	PUNCT
ap-8360	18	19	9	9	NUM
ap-8360	18	20	]	]	PUNCT
ap-8360	18	21	.	.	PUNCT
ap-8360	19	1	removal	removal	NOUN
ap-8360	19	2	efficiency	efficiency	NOUN
ap-8360	19	3	can	can	AUX
ap-8360	19	4	be	be	AUX
ap-8360	19	5	defined	define	VERB
ap-8360	19	6	as	as	ADP
ap-8360	19	7	the	the	DET
ap-8360	19	8	amount	amount	NOUN
ap-8360	19	9	of	of	ADP
ap-8360	19	10	material	material	NOUN
ap-8360	19	11	removed	remove	VERB
ap-8360	19	12	per	per	ADP
ap-8360	19	13	time	time	NOUN
ap-8360	19	14	and	and	CCONJ
ap-8360	19	15	per	per	ADP
ap-8360	19	16	energy	energy	NOUN
ap-8360	19	17	input	input	NOUN
ap-8360	19	18	[	[	X
ap-8360	19	19	5	5	NUM
ap-8360	19	20	]	]	PUNCT
ap-8360	19	21	.	.	PUNCT
ap-8360	20	1	it	it	PRON
ap-8360	20	2	has	have	AUX
ap-8360	20	3	been	be	AUX
ap-8360	20	4	determined	determine	VERB
ap-8360	20	5	that	that	SCONJ
ap-8360	20	6	the	the	DET
ap-8360	20	7	maximum	maximum	ADJ
ap-8360	20	8	removal	removal	NOUN
ap-8360	20	9	efficiency	efficiency	NOUN
ap-8360	20	10	can	can	AUX
ap-8360	20	11	be	be	AUX
ap-8360	20	12	found	find	VERB
ap-8360	20	13	for	for	ADP
ap-8360	20	14	e2	e2	NOUN
ap-8360	20	15	multiple	multiple	NOUN
ap-8360	20	16	of	of	ADP
ap-8360	20	17	the	the	DET
ap-8360	20	18	threshold	threshold	NOUN
ap-8360	20	19	fluence	fluence	NOUN
ap-8360	21	1	[	[	X
ap-8360	21	2	6	6	NUM
ap-8360	21	3	]	]	PUNCT
ap-8360	21	4	.	.	PUNCT
ap-8360	22	1	however	however	ADV
ap-8360	22	2	,	,	PUNCT
ap-8360	22	3	a	a	DET
ap-8360	22	4	low	low	ADJ
ap-8360	22	5	process	process	NOUN
ap-8360	22	6	productivity	productivity	NOUN
ap-8360	22	7	,	,	PUNCT
ap-8360	22	8	coupled	couple	VERB
ap-8360	22	9	with	with	ADP
ap-8360	22	10	the	the	DET
ap-8360	22	11	high	high	ADJ
ap-8360	22	12	cost	cost	NOUN
ap-8360	22	13	of	of	ADP
ap-8360	22	14	devices	device	NOUN
ap-8360	22	15	,	,	PUNCT
ap-8360	22	16	remains	remain	VERB
ap-8360	22	17	a	a	DET
ap-8360	22	18	significant	significant	ADJ
ap-8360	22	19	limit	limit	NOUN
ap-8360	22	20	.	.	PUNCT
ap-8360	23	1	there	there	PRON
ap-8360	23	2	are	be	VERB
ap-8360	23	3	several	several	ADJ
ap-8360	23	4	approaches	approach	NOUN
ap-8360	23	5	to	to	ADP
ap-8360	23	6	increasing	increase	VERB
ap-8360	23	7	productivity	productivity	NOUN
ap-8360	23	8	,	,	PUNCT
ap-8360	23	9	including	include	VERB
ap-8360	23	10	both	both	CCONJ
ap-8360	23	11	newly	newly	ADV
ap-8360	23	12	developed	develop	VERB
ap-8360	23	13	methods	method	NOUN
ap-8360	23	14	,	,	PUNCT
ap-8360	23	15	such	such	ADJ
ap-8360	23	16	as	as	ADP
ap-8360	23	17	burst	burst	ADJ
ap-8360	23	18	mode	mode	NOUN
ap-8360	23	19	[	[	X
ap-8360	23	20	10	10	NUM
ap-8360	23	21	,	,	PUNCT
ap-8360	23	22	11	11	NUM
ap-8360	23	23	]	]	PUNCT
ap-8360	23	24	or	or	CCONJ
ap-8360	23	25	multi	multi	ADJ
ap-8360	23	26	-	-	ADJ
ap-8360	23	27	beam	beam	ADJ
ap-8360	23	28	technique	technique	NOUN
ap-8360	23	29	,	,	PUNCT
ap-8360	23	30	[	[	X
ap-8360	23	31	12	12	NUM
ap-8360	23	32	]	]	PUNCT
ap-8360	23	33	and	and	CCONJ
ap-8360	23	34	more	more	ADJ
ap-8360	23	35	conventional	conventional	ADJ
ap-8360	23	36	methods	method	NOUN
ap-8360	23	37	,	,	PUNCT
ap-8360	23	38	such	such	ADJ
ap-8360	23	39	as	as	ADP
ap-8360	23	40	optimization	optimization	NOUN
ap-8360	23	41	of	of	ADP
ap-8360	23	42	wavelength	wavelength	NOUN
ap-8360	23	43	[	[	X
ap-8360	23	44	2	2	NUM
ap-8360	23	45	]	]	PUNCT
ap-8360	23	46	,	,	PUNCT
ap-8360	23	47	in	in	ADP
ap-8360	23	48	-	-	PUNCT
ap-8360	23	49	creased	creased	ADJ
ap-8360	23	50	repetition	repetition	NOUN
ap-8360	23	51	rate	rate	NOUN
ap-8360	23	52	[	[	X
ap-8360	23	53	2	2	NUM
ap-8360	23	54	,	,	PUNCT
ap-8360	23	55	13	13	NUM
ap-8360	23	56	,	,	PUNCT
ap-8360	23	57	14	14	NUM
ap-8360	23	58	]	]	PUNCT
ap-8360	23	59	or	or	CCONJ
ap-8360	23	60	changes	change	NOUN
ap-8360	23	61	in	in	ADP
ap-8360	23	62	the	the	DET
ap-8360	23	63	pulse	pulse	NOUN
ap-8360	23	64	duration	duration	NOUN
ap-8360	23	65	[	[	X
ap-8360	23	66	15	15	NUM
ap-8360	23	67	]	]	PUNCT
ap-8360	23	68	.	.	PUNCT
ap-8360	24	1	there	there	PRON
ap-8360	24	2	are	be	VERB
ap-8360	24	3	fewer	few	ADJ
ap-8360	24	4	studies	study	NOUN
ap-8360	24	5	of	of	ADP
ap-8360	24	6	conventional	conventional	ADJ
ap-8360	24	7	methods	method	NOUN
ap-8360	24	8	,	,	PUNCT
ap-8360	24	9	even	even	ADV
ap-8360	24	10	though	though	SCONJ
ap-8360	24	11	optimisation	optimisation	NOUN
ap-8360	24	12	of	of	ADP
ap-8360	24	13	the	the	DET
ap-8360	24	14	repetition	repetition	NOUN
ap-8360	24	15	rate	rate	NOUN
ap-8360	24	16	,	,	PUNCT
ap-8360	24	17	energy	energy	NOUN
ap-8360	24	18	and	and	CCONJ
ap-8360	24	19	wavelength	wavelength	NOUN
ap-8360	24	20	can	can	AUX
ap-8360	24	21	increase	increase	VERB
ap-8360	24	22	the	the	DET
ap-8360	24	23	productivity	productivity	NOUN
ap-8360	24	24	of	of	ADP
ap-8360	24	25	the	the	DET
ap-8360	24	26	ablation	ablation	NOUN
ap-8360	24	27	process	process	NOUN
ap-8360	24	28	several	several	ADJ
ap-8360	24	29	-	-	PUNCT
ap-8360	24	30	fold	fold	VERB
ap-8360	24	31	on	on	ADP
ap-8360	24	32	an	an	DET
ap-8360	24	33	existing	exist	VERB
ap-8360	24	34	laser	laser	NOUN
ap-8360	24	35	equipment	equipment	NOUN
ap-8360	24	36	.	.	PUNCT
ap-8360	25	1	in	in	ADP
ap-8360	25	2	addition	addition	NOUN
ap-8360	25	3	,	,	PUNCT
ap-8360	25	4	published	publish	VERB
ap-8360	25	5	studies	study	NOUN
ap-8360	25	6	related	relate	VERB
ap-8360	25	7	to	to	PART
ap-8360	25	8	laser	laser	VERB
ap-8360	25	9	matter	matter	NOUN
ap-8360	25	10	-	-	PUNCT
ap-8360	25	11	interaction	interaction	NOUN
ap-8360	25	12	basics	basic	NOUN
ap-8360	25	13	(	(	PUNCT
ap-8360	25	14	e.g.	e.g.	ADV
ap-8360	25	15	[	[	X
ap-8360	25	16	9	9	NUM
ap-8360	25	17	,	,	PUNCT
ap-8360	25	18	15	15	NUM
ap-8360	25	19	,	,	PUNCT
ap-8360	25	20	16	16	NUM
ap-8360	25	21	]	]	PUNCT
ap-8360	25	22	)	)	PUNCT
ap-8360	25	23	deal	deal	NOUN
ap-8360	25	24	with	with	ADP
ap-8360	25	25	removal	removal	NOUN
ap-8360	25	26	rates	rate	NOUN
ap-8360	25	27	in	in	ADP
ap-8360	25	28	nm	nm	NOUN
ap-8360	25	29	/	/	SYM
ap-8360	25	30	pulse	pulse	NOUN
ap-8360	25	31	or	or	CCONJ
ap-8360	25	32	µm	µm	NOUN
ap-8360	25	33	/	/	SYM
ap-8360	25	34	pulse	pulse	NOUN
ap-8360	25	35	,	,	PUNCT
ap-8360	25	36	which	which	PRON
ap-8360	25	37	can	can	AUX
ap-8360	25	38	be	be	AUX
ap-8360	25	39	difficult	difficult	ADJ
ap-8360	25	40	to	to	PART
ap-8360	25	41	use	use	VERB
ap-8360	25	42	in	in	ADP
ap-8360	25	43	practical	practical	ADJ
ap-8360	25	44	applications	application	NOUN
ap-8360	25	45	.	.	PUNCT
ap-8360	26	1	moreover	moreover	ADV
ap-8360	26	2	,	,	PUNCT
ap-8360	26	3	a	a	DET
ap-8360	26	4	complex	complex	ADJ
ap-8360	26	5	comparison	comparison	NOUN
ap-8360	26	6	of	of	ADP
ap-8360	26	7	the	the	DET
ap-8360	26	8	ablation	ablation	NOUN
ap-8360	26	9	characteristics	characteristic	NOUN
ap-8360	26	10	for	for	ADP
ap-8360	26	11	the	the	DET
ap-8360	26	12	same	same	ADJ
ap-8360	26	13	laser	laser	NOUN
ap-8360	26	14	set	set	NOUN
ap-8360	26	15	-	-	PUNCT
ap-8360	26	16	up	up	NOUN
ap-8360	26	17	among	among	ADP
ap-8360	26	18	advanced	advanced	ADJ
ap-8360	26	19	materials	material	NOUN
ap-8360	26	20	,	,	PUNCT
ap-8360	26	21	such	such	ADJ
ap-8360	26	22	as	as	ADP
ap-8360	26	23	steel	steel	NOUN
ap-8360	26	24	,	,	PUNCT
ap-8360	26	25	titanium	titanium	NOUN
ap-8360	26	26	alloy	alloy	NOUN
ap-8360	26	27	and	and	CCONJ
ap-8360	26	28	nickel	nickel	NOUN
ap-8360	26	29	-	-	PUNCT
ap-8360	26	30	based	base	VERB
ap-8360	26	31	alloy	alloy	NOUN
ap-8360	26	32	is	be	AUX
ap-8360	26	33	absent	absent	ADJ
ap-8360	26	34	from	from	ADP
ap-8360	26	35	the	the	DET
ap-8360	26	36	open	open	ADJ
ap-8360	26	37	literature	literature	NOUN
ap-8360	26	38	.	.	PUNCT
ap-8360	27	1	these	these	DET
ap-8360	27	2	selected	select	VERB
ap-8360	27	3	materials	material	NOUN
ap-8360	27	4	are	be	AUX
ap-8360	27	5	used	use	VERB
ap-8360	27	6	in	in	ADP
ap-8360	27	7	a	a	DET
ap-8360	27	8	wide	wide	ADJ
ap-8360	27	9	range	range	NOUN
ap-8360	27	10	of	of	ADP
ap-8360	27	11	applications	application	NOUN
ap-8360	27	12	ranging	range	VERB
ap-8360	27	13	from	from	ADP
ap-8360	27	14	automotive	automotive	ADJ
ap-8360	27	15	,	,	PUNCT
ap-8360	27	16	medicine	medicine	NOUN
ap-8360	27	17	,	,	PUNCT
ap-8360	27	18	oil	oil	NOUN
ap-8360	27	19	,	,	PUNCT
ap-8360	27	20	and	and	CCONJ
ap-8360	27	21	chemical	chemical	NOUN
ap-8360	27	22	industries	industry	NOUN
ap-8360	27	23	to	to	PART
ap-8360	27	24	aerospace	aerospace	NOUN
ap-8360	27	25	industry	industry	NOUN
ap-8360	28	1	[	[	X
ap-8360	28	2	17–19	17–19	NUM
ap-8360	28	3	]	]	PUNCT
ap-8360	28	4	.	.	PUNCT
ap-8360	29	1	a	a	DET
ap-8360	29	2	thorough	thorough	ADJ
ap-8360	29	3	description	description	NOUN
ap-8360	29	4	of	of	ADP
ap-8360	29	5	an	an	DET
ap-8360	29	6	optimisation	optimisation	NOUN
ap-8360	29	7	of	of	ADP
ap-8360	29	8	wavelength	wavelength	NOUN
ap-8360	29	9	,	,	PUNCT
ap-8360	29	10	laser	laser	NOUN
ap-8360	29	11	power	power	NOUN
ap-8360	29	12	and	and	CCONJ
ap-8360	29	13	repetition	repetition	NOUN
ap-8360	29	14	rate	rate	NOUN
ap-8360	29	15	for	for	ADP
ap-8360	29	16	maximizing	maximize	VERB
ap-8360	29	17	productivity	productivity	NOUN
ap-8360	29	18	in	in	ADP
ap-8360	29	19	the	the	DET
ap-8360	29	20	available	available	ADJ
ap-8360	29	21	laser	laser	NOUN
ap-8360	29	22	system	system	NOUN
ap-8360	29	23	is	be	AUX
ap-8360	29	24	likewise	likewise	ADV
ap-8360	29	25	lacking	lack	VERB
ap-8360	29	26	,	,	PUNCT
ap-8360	29	27	despite	despite	SCONJ
ap-8360	29	28	the	the	DET
ap-8360	29	29	fact	fact	NOUN
ap-8360	29	30	that	that	SCONJ
ap-8360	29	31	this	this	DET
ap-8360	29	32	knowledge	knowledge	NOUN
ap-8360	29	33	is	be	AUX
ap-8360	29	34	necessary	necessary	ADJ
ap-8360	29	35	for	for	ADP
ap-8360	29	36	a	a	DET
ap-8360	29	37	wider	wide	ADJ
ap-8360	29	38	industrial	industrial	ADJ
ap-8360	29	39	use	use	NOUN
ap-8360	29	40	of	of	ADP
ap-8360	29	41	ultra	ultra	ADJ
ap-8360	29	42	-	-	ADJ
ap-8360	29	43	fast	fast	ADJ
ap-8360	29	44	lasers	laser	NOUN
ap-8360	29	45	.	.	PUNCT
ap-8360	30	1	this	this	DET
ap-8360	30	2	paper	paper	NOUN
ap-8360	30	3	presents	present	VERB
ap-8360	30	4	a	a	DET
ap-8360	30	5	complex	complex	ADJ
ap-8360	30	6	comparison	comparison	NOUN
ap-8360	30	7	of	of	ADP
ap-8360	30	8	ablation	ablation	NOUN
ap-8360	30	9	behaviour	behaviour	NOUN
ap-8360	30	10	with	with	ADP
ap-8360	30	11	respect	respect	NOUN
ap-8360	30	12	to	to	ADP
ap-8360	30	13	the	the	DET
ap-8360	30	14	surface	surface	NOUN
ap-8360	30	15	quality	quality	NOUN
ap-8360	30	16	of	of	ADP
ap-8360	30	17	advanced	advanced	ADJ
ap-8360	30	18	highly	highly	ADV
ap-8360	30	19	-	-	PUNCT
ap-8360	30	20	used	use	VERB
ap-8360	30	21	industrial	industrial	ADJ
ap-8360	30	22	materials	material	NOUN
ap-8360	30	23	(	(	PUNCT
ap-8360	30	24	ti6al4v	ti6al4v	NOUN
ap-8360	30	25	,	,	PUNCT
ap-8360	30	26	inconel	inconel	NOUN
ap-8360	30	27	718	718	NUM
ap-8360	30	28	,	,	PUNCT
ap-8360	30	29	tool	tool	NOUN
ap-8360	30	30	steel	steel	NOUN
ap-8360	30	31	and	and	CCONJ
ap-8360	30	32	stainless	stainless	ADJ
ap-8360	30	33	steel	steel	NOUN
ap-8360	30	34	)	)	PUNCT
ap-8360	30	35	under	under	ADP
ap-8360	30	36	femtosecond	femtosecond	NOUN
ap-8360	30	37	laser	laser	NOUN
ap-8360	30	38	irradiation	irradiation	NOUN
ap-8360	30	39	by	by	ADP
ap-8360	30	40	using	use	VERB
ap-8360	30	41	three	three	NUM
ap-8360	30	42	different	different	ADJ
ap-8360	30	43	wavelengths	wavelength	NOUN
ap-8360	30	44	.	.	PUNCT
ap-8360	31	1	the	the	DET
ap-8360	31	2	ideal	ideal	ADJ
ap-8360	31	3	ablation	ablation	NOUN
ap-8360	31	4	parameters	parameter	NOUN
ap-8360	31	5	were	be	AUX
ap-8360	31	6	studied	study	VERB
ap-8360	31	7	in	in	ADP
ap-8360	31	8	depth	depth	NOUN
ap-8360	31	9	through	through	ADP
ap-8360	31	10	an	an	DET
ap-8360	31	11	increasing	increase	VERB
ap-8360	31	12	repetition	repetition	NOUN
ap-8360	31	13	rate	rate	NOUN
ap-8360	31	14	experiment	experiment	NOUN
ap-8360	31	15	resulting	result	VERB
ap-8360	31	16	in	in	ADP
ap-8360	31	17	an	an	DET
ap-8360	31	18	increased	increase	VERB
ap-8360	31	19	process	process	NOUN
ap-8360	31	20	productivity	productivity	NOUN
ap-8360	31	21	.	.	PUNCT
ap-8360	32	1	finally	finally	ADV
ap-8360	32	2	,	,	PUNCT
ap-8360	32	3	the	the	DET
ap-8360	32	4	experimentally	experimentally	ADV
ap-8360	32	5	obtained	obtain	VERB
ap-8360	32	6	results	result	NOUN
ap-8360	32	7	were	be	AUX
ap-8360	32	8	demonstrated	demonstrate	VERB
ap-8360	32	9	in	in	ADP
ap-8360	32	10	a	a	DET
ap-8360	32	11	complex	complex	ADJ
ap-8360	32	12	structure	structure	NOUN
ap-8360	32	13	production	production	NOUN
ap-8360	32	14	for	for	ADP
ap-8360	32	15	a	a	DET
ap-8360	32	16	possible	possible	ADJ
ap-8360	32	17	tribology	tribology	NOUN
ap-8360	32	18	application	application	NOUN
ap-8360	32	19	.	.	PUNCT
ap-8360	33	1	36	36	NUM
ap-8360	33	2	https://doi.org/10.14311/ap.2023.63.0036	https://doi.org/10.14311/ap.2023.63.0036	PROPN
ap-8360	33	3	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
ap-8360	33	4	https://www.cvut.cz/en	https://www.cvut.cz/en	PROPN
ap-8360	33	5	vol	vol	NOUN
ap-8360	33	6	.	.	PROPN
ap-8360	34	1	63	63	NUM
ap-8360	34	2	no	no	NOUN
ap-8360	34	3	.	.	PUNCT
ap-8360	35	1	1/2023	1/2023	NUM
ap-8360	35	2	femtosecond	femtosecond	NOUN
ap-8360	35	3	laser	laser	NOUN
ap-8360	35	4	processing	processing	NOUN
ap-8360	35	5	of	of	ADP
ap-8360	35	6	advanced	advanced	ADJ
ap-8360	35	7	technical	technical	ADJ
ap-8360	35	8	materials	material	NOUN
ap-8360	35	9	2	2	NUM
ap-8360	35	10	.	.	PUNCT
ap-8360	35	11	materials	material	NOUN
ap-8360	35	12	and	and	CCONJ
ap-8360	35	13	methods	method	NOUN
ap-8360	35	14	2.1	2.1	NUM
ap-8360	35	15	.	.	PUNCT
ap-8360	36	1	laser	laser	NOUN
ap-8360	36	2	set	set	NOUN
ap-8360	36	3	-	-	PUNCT
ap-8360	36	4	up	up	ADP
ap-8360	36	5	a	a	DET
ap-8360	36	6	femtosecond	femtosecond	NOUN
ap-8360	36	7	laser	laser	NOUN
ap-8360	36	8	source	source	NOUN
ap-8360	36	9	(	(	PUNCT
ap-8360	36	10	ligtcon	ligtcon	ADV
ap-8360	36	11	carbide	carbide	PROPN
ap-8360	36	12	cb340w	cb340w	PROPN
ap-8360	36	13	)	)	PUNCT
ap-8360	36	14	was	be	AUX
ap-8360	36	15	used	use	VERB
ap-8360	36	16	for	for	ADP
ap-8360	36	17	the	the	DET
ap-8360	36	18	experiments	experiment	NOUN
ap-8360	36	19	.	.	PUNCT
ap-8360	37	1	this	this	DET
ap-8360	37	2	source	source	NOUN
ap-8360	37	3	was	be	AUX
ap-8360	37	4	integrated	integrate	VERB
ap-8360	37	5	into	into	ADP
ap-8360	37	6	a	a	DET
ap-8360	37	7	master	master	NOUN
ap-8360	37	8	1	1	NUM
ap-8360	37	9	laser	laser	NOUN
ap-8360	37	10	micro	micro	NOUN
ap-8360	37	11	-	-	ADJ
ap-8360	37	12	machining	machining	ADJ
ap-8360	37	13	station	station	NOUN
ap-8360	37	14	with	with	ADP
ap-8360	37	15	optical	optical	ADJ
ap-8360	37	16	paths	path	NOUN
ap-8360	37	17	for	for	ADP
ap-8360	37	18	three	three	NUM
ap-8360	37	19	harmonic	harmonic	ADJ
ap-8360	37	20	wavelengths	wavelength	NOUN
ap-8360	37	21	λ	λ	NOUN
ap-8360	37	22	=	=	SYM
ap-8360	37	23	1030	1030	NUM
ap-8360	37	24	nm	nm	NOUN
ap-8360	37	25	,	,	PUNCT
ap-8360	37	26	515	515	NUM
ap-8360	37	27	nm	nm	NOUN
ap-8360	37	28	,	,	PUNCT
ap-8360	37	29	343	343	NUM
ap-8360	37	30	nm	nm	NOUN
ap-8360	37	31	.	.	PUNCT
ap-8360	38	1	the	the	DET
ap-8360	38	2	laser	laser	NOUN
ap-8360	38	3	beam	beam	NOUN
ap-8360	38	4	was	be	AUX
ap-8360	38	5	delivered	deliver	VERB
ap-8360	38	6	through	through	ADP
ap-8360	38	7	galvo	galvo	NOUN
ap-8360	38	8	-	-	PUNCT
ap-8360	38	9	scanners	scanner	NOUN
ap-8360	38	10	(	(	PUNCT
ap-8360	38	11	inteliscan14	inteliscan14	PROPN
ap-8360	38	12	)	)	PUNCT
ap-8360	38	13	and	and	CCONJ
ap-8360	38	14	focused	focus	VERB
ap-8360	38	15	with	with	ADP
ap-8360	38	16	a	a	DET
ap-8360	38	17	f	f	NOUN
ap-8360	38	18	-	-	PUNCT
ap-8360	38	19	theta	theta	ADJ
ap-8360	38	20	lens	lens	NOUN
ap-8360	38	21	on	on	ADP
ap-8360	38	22	the	the	DET
ap-8360	38	23	working	work	VERB
ap-8360	38	24	plane	plane	NOUN
ap-8360	38	25	.	.	PUNCT
ap-8360	39	1	the	the	DET
ap-8360	39	2	main	main	ADJ
ap-8360	39	3	characteristics	characteristic	NOUN
ap-8360	39	4	of	of	ADP
ap-8360	39	5	the	the	DET
ap-8360	39	6	laser	laser	NOUN
ap-8360	39	7	set	set	NOUN
ap-8360	39	8	-	-	PUNCT
ap-8360	39	9	up	up	NOUN
ap-8360	39	10	and	and	CCONJ
ap-8360	39	11	laser	laser	NOUN
ap-8360	39	12	source	source	NOUN
ap-8360	39	13	are	be	AUX
ap-8360	39	14	listed	list	VERB
ap-8360	39	15	in	in	ADP
ap-8360	39	16	table	table	NOUN
ap-8360	39	17	1	1	NUM
ap-8360	39	18	.	.	PUNCT
ap-8360	39	19	laser	laser	NOUN
ap-8360	39	20	source	source	NOUN
ap-8360	39	21	lightcon	lightcon	PROPN
ap-8360	39	22	carbide	carbide	PROPN
ap-8360	39	23	cb3	cb3	PROPN
ap-8360	39	24	-	-	PUNCT
ap-8360	39	25	40w	40w	NOUN
ap-8360	39	26	wavelength	wavelength	NOUN
ap-8360	39	27	1030	1030	NUM
ap-8360	39	28	(	(	PUNCT
ap-8360	39	29	ih	ih	NOUN
ap-8360	39	30	)	)	PUNCT
ap-8360	39	31	,	,	PUNCT
ap-8360	39	32	515	515	NUM
ap-8360	39	33	(	(	PUNCT
ap-8360	39	34	iih	iih	PROPN
ap-8360	39	35	)	)	PUNCT
ap-8360	39	36	,	,	PUNCT
ap-8360	39	37	343	343	NUM
ap-8360	39	38	(	(	PUNCT
ap-8360	39	39	iiih	iiih	NOUN
ap-8360	39	40	)	)	PUNCT
ap-8360	39	41	λ	λ	PROPN
ap-8360	40	1	[	[	X
ap-8360	40	2	nm	nm	X
ap-8360	40	3	]	]	X
ap-8360	40	4	power	power	NOUN
ap-8360	40	5	40	40	NUM
ap-8360	40	6	(	(	PUNCT
ap-8360	40	7	ih	ih	NOUN
ap-8360	40	8	)	)	PUNCT
ap-8360	40	9	,	,	PUNCT
ap-8360	40	10	20	20	NUM
ap-8360	40	11	(	(	PUNCT
ap-8360	40	12	iih	iih	PROPN
ap-8360	40	13	)	)	PUNCT
ap-8360	40	14	,	,	PUNCT
ap-8360	40	15	11	11	NUM
ap-8360	40	16	(	(	PUNCT
ap-8360	40	17	iiih	iiih	NOUN
ap-8360	40	18	)	)	PUNCT
ap-8360	40	19	pavg	pavg	NOUN
ap-8360	40	20	[	[	X
ap-8360	40	21	w	w	X
ap-8360	40	22	]	]	X
ap-8360	40	23	repetition	repetition	NOUN
ap-8360	40	24	rate	rate	NOUN
ap-8360	41	1	200–1000	200–1000	NUM
ap-8360	41	2	f	f	NOUN
ap-8360	42	1	[	[	X
ap-8360	42	2	khz	khz	X
ap-8360	42	3	]	]	X
ap-8360	42	4	pulse	pulse	NOUN
ap-8360	42	5	duration	duration	NOUN
ap-8360	42	6	260	260	NUM
ap-8360	42	7	fs	f	NOUN
ap-8360	42	8	–	–	PUNCT
ap-8360	42	9	10	10	NUM
ap-8360	42	10	ps	ps	NOUN
ap-8360	42	11	τp	τp	PROPN
ap-8360	42	12	beam	beam	NOUN
ap-8360	42	13	quality	quality	NOUN
ap-8360	42	14	<	<	X
ap-8360	42	15	1.2	1.2	NUM
ap-8360	42	16	(	(	PUNCT
ap-8360	42	17	ih)tem00	ih)tem00	NOUN
ap-8360	42	18	;	;	PUNCT
ap-8360	42	19	m2	m2	PROPN
ap-8360	42	20	table	table	NOUN
ap-8360	42	21	1	1	NUM
ap-8360	42	22	.	.	PUNCT
ap-8360	43	1	laser	laser	NOUN
ap-8360	43	2	source	source	NOUN
ap-8360	43	3	type	type	NOUN
ap-8360	43	4	used	use	VERB
ap-8360	43	5	with	with	ADP
ap-8360	43	6	main	main	ADJ
ap-8360	43	7	parameters	parameter	NOUN
ap-8360	43	8	.	.	PUNCT
ap-8360	44	1	2.2	2.2	NUM
ap-8360	44	2	.	.	PUNCT
ap-8360	44	3	materials	material	NOUN
ap-8360	44	4	four	four	NUM
ap-8360	44	5	technical	technical	ADJ
ap-8360	44	6	materials	material	NOUN
ap-8360	44	7	,	,	PUNCT
ap-8360	44	8	namely	namely	ADV
ap-8360	44	9	two	two	NUM
ap-8360	44	10	types	type	NOUN
ap-8360	44	11	of	of	ADP
ap-8360	44	12	steel	steel	NOUN
ap-8360	44	13	,	,	PUNCT
ap-8360	44	14	inconel	inconel	NOUN
ap-8360	44	15	718	718	NUM
ap-8360	44	16	nickel	nickel	NOUN
ap-8360	44	17	-	-	PUNCT
ap-8360	44	18	based	base	VERB
ap-8360	44	19	alloy	alloy	NOUN
ap-8360	44	20	and	and	CCONJ
ap-8360	44	21	ti6al4v	ti6al4v	ADP
ap-8360	44	22	titanium	titanium	NOUN
ap-8360	44	23	grade	grade	NOUN
ap-8360	44	24	5	5	NUM
ap-8360	44	25	alloy	alloy	NOUN
ap-8360	44	26	,	,	PUNCT
ap-8360	44	27	were	be	AUX
ap-8360	44	28	chosen	choose	VERB
ap-8360	44	29	for	for	ADP
ap-8360	44	30	this	this	DET
ap-8360	44	31	study	study	NOUN
ap-8360	44	32	.	.	PUNCT
ap-8360	45	1	a	a	DET
ap-8360	45	2	total	total	NOUN
ap-8360	45	3	of	of	ADP
ap-8360	45	4	one	one	NUM
ap-8360	45	5	round	round	ADJ
ap-8360	45	6	shape	shape	NOUN
ap-8360	45	7	sample	sample	NOUN
ap-8360	45	8	with	with	ADP
ap-8360	45	9	a	a	DET
ap-8360	45	10	diameter	diameter	NOUN
ap-8360	45	11	of	of	ADP
ap-8360	45	12	80	80	NUM
ap-8360	45	13	mm	mm	NOUN
ap-8360	45	14	and	and	CCONJ
ap-8360	45	15	thickness	thickness	NOUN
ap-8360	45	16	of	of	ADP
ap-8360	45	17	15	15	NUM
ap-8360	45	18	mm	mm	NOUN
ap-8360	45	19	from	from	ADP
ap-8360	45	20	each	each	DET
ap-8360	45	21	material	material	NOUN
ap-8360	45	22	was	be	AUX
ap-8360	45	23	prepared	prepare	VERB
ap-8360	45	24	for	for	ADP
ap-8360	45	25	the	the	DET
ap-8360	45	26	experiments	experiment	NOUN
ap-8360	45	27	.	.	PUNCT
ap-8360	46	1	the	the	DET
ap-8360	46	2	surface	surface	NOUN
ap-8360	46	3	of	of	ADP
ap-8360	46	4	the	the	DET
ap-8360	46	5	samples	sample	NOUN
ap-8360	46	6	was	be	AUX
ap-8360	46	7	finished	finish	VERB
ap-8360	46	8	by	by	ADP
ap-8360	46	9	grinding	grind	VERB
ap-8360	46	10	and	and	CCONJ
ap-8360	46	11	the	the	DET
ap-8360	46	12	initial	initial	ADJ
ap-8360	46	13	surface	surface	NOUN
ap-8360	46	14	roughness	roughness	NOUN
ap-8360	46	15	was	be	AUX
ap-8360	46	16	measured	measure	VERB
ap-8360	46	17	using	use	VERB
ap-8360	46	18	an	an	DET
ap-8360	46	19	infinitefocus	infinitefocus	NOUN
ap-8360	46	20	g5	g5	NOUN
ap-8360	46	21	optical	optical	ADJ
ap-8360	46	22	microscope	microscope	NOUN
ap-8360	46	23	.	.	PUNCT
ap-8360	47	1	the	the	DET
ap-8360	47	2	results	result	NOUN
ap-8360	47	3	of	of	ADP
ap-8360	47	4	the	the	DET
ap-8360	47	5	initial	initial	ADJ
ap-8360	47	6	surface	surface	NOUN
ap-8360	47	7	roughness	roughness	NOUN
ap-8360	47	8	measurements	measurement	NOUN
ap-8360	47	9	are	be	AUX
ap-8360	47	10	listed	list	VERB
ap-8360	47	11	in	in	ADP
ap-8360	47	12	table	table	NOUN
ap-8360	47	13	2	2	NUM
ap-8360	47	14	.	.	PUNCT
ap-8360	48	1	the	the	DET
ap-8360	48	2	detailed	detailed	ADJ
ap-8360	48	3	chemical	chemical	NOUN
ap-8360	48	4	composition	composition	NOUN
ap-8360	48	5	of	of	ADP
ap-8360	48	6	these	these	DET
ap-8360	48	7	materials	material	NOUN
ap-8360	48	8	is	be	AUX
ap-8360	48	9	listed	list	VERB
ap-8360	48	10	in	in	ADP
ap-8360	48	11	table	table	NOUN
ap-8360	48	12	3	3	NUM
ap-8360	48	13	and	and	CCONJ
ap-8360	48	14	their	their	PRON
ap-8360	48	15	physical	physical	ADJ
ap-8360	48	16	properties	property	NOUN
ap-8360	48	17	are	be	AUX
ap-8360	48	18	listed	list	VERB
ap-8360	48	19	in	in	ADP
ap-8360	48	20	table	table	NOUN
ap-8360	49	1	4	4	NUM
ap-8360	49	2	.	.	PUNCT
ap-8360	49	3	material	material	PROPN
ap-8360	49	4	ra	ra	PROPN
ap-8360	50	1	[	[	X
ap-8360	50	2	µm	µm	X
ap-8360	50	3	]	]	X
ap-8360	50	4	rz	rz	NOUN
ap-8360	50	5	[	[	X
ap-8360	50	6	µm	µm	X
ap-8360	50	7	]	]	X
ap-8360	50	8	tool	tool	NOUN
ap-8360	50	9	steel	steel	NOUN
ap-8360	50	10	0.36	0.36	NUM
ap-8360	50	11	3.04	3.04	NUM
ap-8360	50	12	inconel	inconel	NOUN
ap-8360	50	13	718	718	NUM
ap-8360	50	14	0.26	0.26	NUM
ap-8360	50	15	2.25	2.25	NUM
ap-8360	50	16	ti6al4v	ti6al4v	SYM
ap-8360	50	17	0.40	0.40	NUM
ap-8360	50	18	2.87	2.87	NUM
ap-8360	50	19	stainless	stainless	ADJ
ap-8360	50	20	steel	steel	NOUN
ap-8360	50	21	0.40	0.40	NUM
ap-8360	50	22	3.03	3.03	NUM
ap-8360	50	23	table	table	NOUN
ap-8360	50	24	2	2	NUM
ap-8360	50	25	.	.	PUNCT
ap-8360	50	26	initial	initial	ADJ
ap-8360	50	27	surface	surface	NOUN
ap-8360	50	28	roughness	roughness	NOUN
ap-8360	50	29	of	of	ADP
ap-8360	50	30	the	the	DET
ap-8360	50	31	samples	sample	NOUN
ap-8360	50	32	measured	measure	VERB
ap-8360	50	33	by	by	ADP
ap-8360	50	34	an	an	DET
ap-8360	50	35	optical	optical	ADJ
ap-8360	50	36	method	method	NOUN
ap-8360	50	37	according	accord	VERB
ap-8360	50	38	to	to	ADP
ap-8360	50	39	iso	iso	PROPN
ap-8360	50	40	25178	25178	NUM
ap-8360	50	41	standard	standard	NOUN
ap-8360	50	42	explained	explain	VERB
ap-8360	50	43	by	by	ADP
ap-8360	50	44	the	the	DET
ap-8360	50	45	parameter	parameter	PROPN
ap-8360	50	46	sa	sa	PROPN
ap-8360	50	47	(	(	PUNCT
ap-8360	50	48	arithmetical	arithmetical	ADJ
ap-8360	50	49	mean	mean	VERB
ap-8360	50	50	height	height	NOUN
ap-8360	50	51	of	of	ADP
ap-8360	50	52	the	the	DET
ap-8360	50	53	area	area	NOUN
ap-8360	50	54	)	)	PUNCT
ap-8360	50	55	and	and	CCONJ
ap-8360	50	56	sz	sz	PROPN
ap-8360	50	57	(	(	PUNCT
ap-8360	50	58	maximum	maximum	ADJ
ap-8360	50	59	height	height	NOUN
ap-8360	50	60	of	of	ADP
ap-8360	50	61	the	the	DET
ap-8360	50	62	area	area	NOUN
ap-8360	50	63	)	)	PUNCT
ap-8360	50	64	.	.	PUNCT
ap-8360	51	1	3	3	X
ap-8360	51	2	.	.	X
ap-8360	51	3	methods	method	NOUN
ap-8360	51	4	in	in	ADP
ap-8360	51	5	this	this	DET
ap-8360	51	6	paper	paper	NOUN
ap-8360	51	7	,	,	PUNCT
ap-8360	51	8	the	the	DET
ap-8360	51	9	full	full	ADJ
ap-8360	51	10	process	process	NOUN
ap-8360	51	11	chain	chain	NOUN
ap-8360	51	12	of	of	ADP
ap-8360	51	13	laser	laser	NOUN
ap-8360	51	14	surface	surface	NOUN
ap-8360	51	15	structuring	structuring	NOUN
ap-8360	51	16	is	be	AUX
ap-8360	51	17	described	describe	VERB
ap-8360	51	18	for	for	ADP
ap-8360	51	19	four	four	NUM
ap-8360	51	20	advanced	advanced	ADJ
ap-8360	51	21	materials	material	NOUN
ap-8360	51	22	(	(	PUNCT
ap-8360	51	23	tool	tool	NOUN
ap-8360	51	24	steel	steel	NOUN
ap-8360	51	25	,	,	PUNCT
ap-8360	51	26	stainless	stainless	ADJ
ap-8360	51	27	steel	steel	NOUN
ap-8360	51	28	,	,	PUNCT
ap-8360	51	29	ti6al4v	ti6al4v	PUNCT
ap-8360	51	30	and	and	CCONJ
ap-8360	51	31	inconel	inconel	NOUN
ap-8360	51	32	718	718	NUM
ap-8360	51	33	)	)	PUNCT
ap-8360	51	34	.	.	PUNCT
ap-8360	52	1	firstly	firstly	ADV
ap-8360	52	2	,	,	PUNCT
ap-8360	52	3	the	the	DET
ap-8360	52	4	ablation	ablation	NOUN
ap-8360	52	5	threshold	threshold	NOUN
ap-8360	52	6	of	of	ADP
ap-8360	52	7	all	all	DET
ap-8360	52	8	four	four	NUM
ap-8360	52	9	materials	material	NOUN
ap-8360	52	10	under	under	ADP
ap-8360	52	11	femtosecond	femtosecond	NOUN
ap-8360	52	12	laser	laser	NOUN
ap-8360	52	13	irradiation	irradiation	NOUN
ap-8360	52	14	with	with	ADP
ap-8360	52	15	three	three	NUM
ap-8360	52	16	different	different	ADJ
ap-8360	52	17	wavelengths	wavelength	NOUN
ap-8360	52	18	was	be	AUX
ap-8360	52	19	studied	study	VERB
ap-8360	52	20	.	.	PUNCT
ap-8360	53	1	then	then	ADV
ap-8360	53	2	,	,	PUNCT
ap-8360	53	3	the	the	DET
ap-8360	53	4	ablation	ablation	NOUN
ap-8360	53	5	behaviour	behaviour	NOUN
ap-8360	53	6	by	by	ADP
ap-8360	53	7	removal	removal	NOUN
ap-8360	53	8	rates	rate	NOUN
ap-8360	53	9	and	and	CCONJ
ap-8360	53	10	volume	volume	NOUN
ap-8360	53	11	ablation	ablation	NOUN
ap-8360	53	12	rate	rate	NOUN
ap-8360	53	13	with	with	ADP
ap-8360	53	14	surface	surface	NOUN
ap-8360	53	15	roughness	roughness	NOUN
ap-8360	53	16	was	be	AUX
ap-8360	53	17	demonstrated	demonstrate	VERB
ap-8360	53	18	for	for	ADP
ap-8360	53	19	three	three	NUM
ap-8360	53	20	harmonics	harmonic	NOUN
ap-8360	53	21	.	.	PUNCT
ap-8360	54	1	in	in	ADP
ap-8360	54	2	the	the	DET
ap-8360	54	3	interest	interest	NOUN
ap-8360	54	4	of	of	ADP
ap-8360	54	5	increasing	increase	VERB
ap-8360	54	6	surface	surface	NOUN
ap-8360	54	7	structuring	structuring	NOUN
ap-8360	54	8	productivity	productivity	NOUN
ap-8360	54	9	,	,	PUNCT
ap-8360	54	10	the	the	DET
ap-8360	54	11	use	use	NOUN
ap-8360	54	12	of	of	ADP
ap-8360	54	13	a	a	DET
ap-8360	54	14	higher	high	ADJ
ap-8360	54	15	repetition	repetition	NOUN
ap-8360	54	16	rate	rate	NOUN
ap-8360	54	17	and	and	CCONJ
ap-8360	54	18	scan	scan	ADJ
ap-8360	54	19	speed	speed	NOUN
ap-8360	54	20	was	be	AUX
ap-8360	54	21	demonstrated	demonstrate	VERB
ap-8360	54	22	and	and	CCONJ
ap-8360	54	23	evaluated	evaluate	VERB
ap-8360	54	24	.	.	PUNCT
ap-8360	55	1	finally	finally	ADV
ap-8360	55	2	,	,	PUNCT
ap-8360	55	3	the	the	DET
ap-8360	55	4	suitability	suitability	NOUN
ap-8360	55	5	of	of	ADP
ap-8360	55	6	the	the	DET
ap-8360	55	7	obtained	obtain	VERB
ap-8360	55	8	parameters	parameter	NOUN
ap-8360	55	9	was	be	AUX
ap-8360	55	10	demonstrated	demonstrate	VERB
ap-8360	55	11	on	on	ADP
ap-8360	55	12	surface	surface	NOUN
ap-8360	55	13	structuring	structuring	NOUN
ap-8360	55	14	of	of	ADP
ap-8360	55	15	two	two	NUM
ap-8360	55	16	designed	design	VERB
ap-8360	55	17	structures	structure	NOUN
ap-8360	55	18	(	(	PUNCT
ap-8360	55	19	dot	dot	NOUN
ap-8360	55	20	and	and	CCONJ
ap-8360	55	21	honeycomb	honeycomb	NOUN
ap-8360	55	22	)	)	PUNCT
ap-8360	55	23	.	.	PUNCT
ap-8360	56	1	the	the	DET
ap-8360	56	2	aim	aim	NOUN
ap-8360	56	3	of	of	ADP
ap-8360	56	4	this	this	DET
ap-8360	56	5	study	study	NOUN
ap-8360	56	6	is	be	AUX
ap-8360	56	7	to	to	PART
ap-8360	56	8	directly	directly	ADV
ap-8360	56	9	compare	compare	VERB
ap-8360	56	10	the	the	DET
ap-8360	56	11	ablation	ablation	NOUN
ap-8360	56	12	behaviour	behaviour	NOUN
ap-8360	56	13	of	of	ADP
ap-8360	56	14	four	four	NUM
ap-8360	56	15	advanced	advanced	ADJ
ap-8360	56	16	technical	technical	ADJ
ap-8360	56	17	materials	material	NOUN
ap-8360	56	18	under	under	ADP
ap-8360	56	19	laser	laser	NOUN
ap-8360	56	20	irradiation	irradiation	NOUN
ap-8360	56	21	from	from	ADP
ap-8360	56	22	three	three	NUM
ap-8360	56	23	different	different	ADJ
ap-8360	56	24	wavelengths	wavelength	NOUN
ap-8360	56	25	and	and	CCONJ
ap-8360	56	26	femtosecond	femtosecond	NOUN
ap-8360	56	27	pulses	pulse	NOUN
ap-8360	56	28	.	.	PUNCT
ap-8360	57	1	moreover	moreover	ADV
ap-8360	57	2	,	,	PUNCT
ap-8360	57	3	the	the	DET
ap-8360	57	4	obtained	obtain	VERB
ap-8360	57	5	parameters	parameter	NOUN
ap-8360	57	6	were	be	AUX
ap-8360	57	7	used	use	VERB
ap-8360	57	8	to	to	PART
ap-8360	57	9	increase	increase	VERB
ap-8360	57	10	structuring	structure	VERB
ap-8360	57	11	productivity	productivity	NOUN
ap-8360	57	12	and	and	CCONJ
ap-8360	57	13	complex	complex	ADJ
ap-8360	57	14	surface	surface	NOUN
ap-8360	57	15	structure	structure	NOUN
ap-8360	57	16	preparation	preparation	NOUN
ap-8360	57	17	.	.	PUNCT
ap-8360	58	1	3.1	3.1	NUM
ap-8360	58	2	.	.	PUNCT
ap-8360	59	1	pre	pre	ADJ
ap-8360	59	2	-	-	NOUN
ap-8360	59	3	experiment	experiment	NOUN
ap-8360	59	4	of	of	ADP
ap-8360	59	5	hatching	hatch	VERB
ap-8360	59	6	angle	angle	NOUN
ap-8360	59	7	evaluation	evaluation	NOUN
ap-8360	59	8	firstly	firstly	ADV
ap-8360	59	9	,	,	PUNCT
ap-8360	59	10	the	the	DET
ap-8360	59	11	effect	effect	NOUN
ap-8360	59	12	of	of	ADP
ap-8360	59	13	the	the	DET
ap-8360	59	14	hatching	hatch	VERB
ap-8360	59	15	angle	angle	NOUN
ap-8360	59	16	on	on	ADP
ap-8360	59	17	surface	surface	NOUN
ap-8360	59	18	roughness	roughness	NOUN
ap-8360	59	19	was	be	AUX
ap-8360	59	20	studied	study	VERB
ap-8360	59	21	to	to	PART
ap-8360	59	22	eliminate	eliminate	VERB
ap-8360	59	23	the	the	DET
ap-8360	59	24	effect	effect	NOUN
ap-8360	59	25	of	of	ADP
ap-8360	59	26	the	the	DET
ap-8360	59	27	scanning	scan	VERB
ap-8360	59	28	parameters	parameter	NOUN
ap-8360	59	29	on	on	ADP
ap-8360	59	30	material	material	NOUN
ap-8360	59	31	behaviour	behaviour	NOUN
ap-8360	59	32	after	after	ADP
ap-8360	59	33	the	the	DET
ap-8360	59	34	laser	laser	NOUN
ap-8360	59	35	ablation	ablation	NOUN
ap-8360	59	36	process	process	NOUN
ap-8360	59	37	.	.	PUNCT
ap-8360	60	1	hatching	hatch	VERB
ap-8360	60	2	angle	angle	NOUN
ap-8360	60	3	(	(	PUNCT
ap-8360	60	4	φ	φ	NOUN
ap-8360	60	5	°	°	NUM
ap-8360	60	6	)	)	PUNCT
ap-8360	60	7	can	can	AUX
ap-8360	60	8	be	be	AUX
ap-8360	60	9	defined	define	VERB
ap-8360	60	10	as	as	ADP
ap-8360	60	11	an	an	DET
ap-8360	60	12	angle	angle	NOUN
ap-8360	60	13	of	of	ADP
ap-8360	60	14	rotation	rotation	NOUN
ap-8360	60	15	between	between	ADP
ap-8360	60	16	each	each	DET
ap-8360	60	17	laser	laser	NOUN
ap-8360	60	18	scanning	scanning	NOUN
ap-8360	60	19	passes	pass	NOUN
ap-8360	60	20	,	,	PUNCT
ap-8360	60	21	see	see	VERB
ap-8360	60	22	figure	figure	NOUN
ap-8360	60	23	1	1	NUM
ap-8360	60	24	.	.	PUNCT
ap-8360	61	1	for	for	ADP
ap-8360	61	2	this	this	DET
ap-8360	61	3	experiment	experiment	NOUN
ap-8360	61	4	,	,	PUNCT
ap-8360	61	5	9	9	NUM
ap-8360	61	6	different	different	ADJ
ap-8360	61	7	hatching	hatching	NOUN
ap-8360	61	8	angles	angle	NOUN
ap-8360	61	9	were	be	AUX
ap-8360	61	10	set	set	VERB
ap-8360	61	11	according	accord	VERB
ap-8360	61	12	to	to	ADP
ap-8360	61	13	previous	previous	ADJ
ap-8360	61	14	knowledge	knowledge	NOUN
ap-8360	61	15	and	and	CCONJ
ap-8360	61	16	results	result	NOUN
ap-8360	61	17	from	from	ADP
ap-8360	61	18	[	[	X
ap-8360	61	19	25	25	NUM
ap-8360	61	20	]	]	PUNCT
ap-8360	61	21	.	.	PUNCT
ap-8360	62	1	the	the	DET
ap-8360	62	2	main	main	ADJ
ap-8360	62	3	idea	idea	NOUN
ap-8360	62	4	for	for	ADP
ap-8360	62	5	choosing	choose	VERB
ap-8360	62	6	hatching	hatch	VERB
ap-8360	62	7	angles	angle	NOUN
ap-8360	62	8	was	be	AUX
ap-8360	62	9	an	an	DET
ap-8360	62	10	appropriate	appropriate	ADJ
ap-8360	62	11	combination	combination	NOUN
ap-8360	62	12	of	of	ADP
ap-8360	62	13	even	even	ADV
ap-8360	62	14	and	and	CCONJ
ap-8360	62	15	odd	odd	ADJ
ap-8360	62	16	numbers	number	NOUN
ap-8360	62	17	,	,	PUNCT
ap-8360	62	18	prime	prime	ADJ
ap-8360	62	19	numbers	number	NOUN
ap-8360	62	20	,	,	PUNCT
ap-8360	62	21	and	and	CCONJ
ap-8360	62	22	including	include	VERB
ap-8360	62	23	angles	angle	NOUN
ap-8360	62	24	from	from	ADP
ap-8360	62	25	15	15	NUM
ap-8360	62	26	to	to	PART
ap-8360	62	27	90	90	NUM
ap-8360	62	28	degrees	degree	NOUN
ap-8360	62	29	.	.	PUNCT
ap-8360	63	1	other	other	ADJ
ap-8360	63	2	laser	laser	NOUN
ap-8360	63	3	and	and	CCONJ
ap-8360	63	4	scanning	scan	VERB
ap-8360	63	5	parameters	parameter	NOUN
ap-8360	63	6	were	be	AUX
ap-8360	63	7	kept	keep	VERB
ap-8360	63	8	constant	constant	ADJ
ap-8360	63	9	,	,	PUNCT
ap-8360	63	10	based	base	VERB
ap-8360	63	11	on	on	ADP
ap-8360	63	12	previous	previous	ADJ
ap-8360	63	13	knowledge	knowledge	NOUN
ap-8360	63	14	and	and	CCONJ
ap-8360	63	15	consequence	consequence	NOUN
ap-8360	63	16	to	to	ADP
ap-8360	63	17	upcoming	upcoming	ADJ
ap-8360	63	18	experiments	experiment	NOUN
ap-8360	63	19	and	and	CCONJ
ap-8360	63	20	can	can	AUX
ap-8360	63	21	be	be	AUX
ap-8360	63	22	found	find	VERB
ap-8360	63	23	in	in	ADP
ap-8360	63	24	table	table	NOUN
ap-8360	63	25	5	5	NUM
ap-8360	63	26	.	.	PUNCT
ap-8360	64	1	this	this	DET
ap-8360	64	2	experiment	experiment	NOUN
ap-8360	64	3	was	be	AUX
ap-8360	64	4	done	do	VERB
ap-8360	64	5	on	on	ADP
ap-8360	64	6	the	the	DET
ap-8360	64	7	tool	tool	NOUN
ap-8360	64	8	steel	steel	NOUN
ap-8360	64	9	material	material	NOUN
ap-8360	64	10	,	,	PUNCT
ap-8360	64	11	where	where	SCONJ
ap-8360	64	12	squares	square	NOUN
ap-8360	64	13	of	of	ADP
ap-8360	64	14	5×5	5×5	NUM
ap-8360	64	15	mm	mm	NOUN
ap-8360	64	16	were	be	AUX
ap-8360	64	17	fabricated	fabricate	VERB
ap-8360	64	18	by	by	ADP
ap-8360	64	19	120	120	NUM
ap-8360	64	20	laser	laser	NOUN
ap-8360	64	21	passes	pass	NOUN
ap-8360	64	22	.	.	PUNCT
ap-8360	65	1	after	after	ADP
ap-8360	65	2	each	each	DET
ap-8360	65	3	pass	pass	NOUN
ap-8360	65	4	,	,	PUNCT
ap-8360	65	5	the	the	DET
ap-8360	65	6	hatching	hatch	VERB
ap-8360	65	7	angle	angle	NOUN
ap-8360	65	8	was	be	AUX
ap-8360	65	9	rotated	rotate	VERB
ap-8360	65	10	by	by	ADP
ap-8360	65	11	φ	φ	PROPN
ap-8360	65	12	.	.	PUNCT
ap-8360	65	13	figure	figure	NOUN
ap-8360	65	14	1	1	NUM
ap-8360	65	15	.	.	PUNCT
ap-8360	66	1	the	the	DET
ap-8360	66	2	effect	effect	NOUN
ap-8360	66	3	of	of	ADP
ap-8360	66	4	the	the	DET
ap-8360	66	5	hatching	hatch	VERB
ap-8360	66	6	angle	angle	NOUN
ap-8360	66	7	on	on	ADP
ap-8360	66	8	surface	surface	NOUN
ap-8360	66	9	roughness	roughness	NOUN
ap-8360	66	10	expressed	express	VERB
ap-8360	66	11	by	by	ADP
ap-8360	66	12	sa	sa	PROPN
ap-8360	66	13	[	[	X
ap-8360	66	14	µm	µm	X
ap-8360	66	15	]	]	PUNCT
ap-8360	66	16	.	.	PUNCT
ap-8360	67	1	one	one	NUM
ap-8360	67	2	of	of	ADP
ap-8360	67	3	the	the	DET
ap-8360	67	4	constant	constant	ADJ
ap-8360	67	5	scanning	scanning	NOUN
ap-8360	67	6	parameters	parameter	NOUN
ap-8360	67	7	was	be	AUX
ap-8360	67	8	pulse	pulse	ADJ
ap-8360	67	9	overlap	overlap	NOUN
ap-8360	67	10	(	(	PUNCT
ap-8360	67	11	sx	sx	PROPN
ap-8360	67	12	)	)	PUNCT
ap-8360	67	13	,	,	PUNCT
ap-8360	67	14	defined	define	VERB
ap-8360	67	15	as	as	ADP
ap-8360	67	16	the	the	DET
ap-8360	67	17	percentage	percentage	NOUN
ap-8360	67	18	overlapping	overlapping	NOUN
ap-8360	67	19	of	of	ADP
ap-8360	67	20	pulses	pulse	NOUN
ap-8360	67	21	in	in	ADP
ap-8360	67	22	the	the	DET
ap-8360	67	23	beam	beam	NOUN
ap-8360	67	24	moving	move	VERB
ap-8360	67	25	direction	direction	NOUN
ap-8360	67	26	.	.	PUNCT
ap-8360	68	1	overlap	overlap	NOUN
ap-8360	68	2	sx	sx	PROPN
ap-8360	68	3	can	can	AUX
ap-8360	68	4	be	be	AUX
ap-8360	68	5	expressed	express	VERB
ap-8360	68	6	by	by	ADP
ap-8360	68	7	equation	equation	NOUN
ap-8360	68	8	(	(	PUNCT
ap-8360	68	9	1	1	NUM
ap-8360	68	10	)	)	PUNCT
ap-8360	68	11	as	as	ADP
ap-8360	68	12	the	the	DET
ap-8360	68	13	function	function	NOUN
ap-8360	68	14	of	of	ADP
ap-8360	68	15	the	the	DET
ap-8360	68	16	scanning	scanning	NOUN
ap-8360	68	17	speed	speed	NOUN
ap-8360	68	18	v	v	ADP
ap-8360	68	19	[	[	X
ap-8360	68	20	mm	mm	X
ap-8360	68	21	/	/	SYM
ap-8360	68	22	s	s	PROPN
ap-8360	68	23	]	]	PUNCT
ap-8360	68	24	,	,	PUNCT
ap-8360	68	25	repetition	repetition	NOUN
ap-8360	68	26	rate	rate	NOUN
ap-8360	68	27	f	f	PROPN
ap-8360	69	1	[	[	X
ap-8360	69	2	hz	hz	X
ap-8360	69	3	]	]	X
ap-8360	69	4	and	and	CCONJ
ap-8360	69	5	beam	beam	NOUN
ap-8360	69	6	diameter	diameter	NOUN
ap-8360	69	7	2ω	2ω	PROPN
ap-8360	70	1	[	[	X
ap-8360	70	2	mm	mm	X
ap-8360	70	3	]	]	X
ap-8360	70	4	.	.	PUNCT
ap-8360	71	1	37	37	NUM
ap-8360	71	2	t.	t.	PROPN
ap-8360	71	3	primus	primus	PROPN
ap-8360	71	4	,	,	PUNCT
ap-8360	71	5	m.	m.	NOUN
ap-8360	71	6	novák	novák	PROPN
ap-8360	71	7	,	,	PUNCT
ap-8360	71	8	p.	p.	PROPN
ap-8360	71	9	zeman	zeman	PROPN
ap-8360	71	10	,	,	PUNCT
ap-8360	71	11	f.	f.	PROPN
ap-8360	71	12	holešovský	holešovský	PROPN
ap-8360	71	13	acta	acta	PROPN
ap-8360	71	14	polytechnica	polytechnica	PROPN
ap-8360	71	15	material	material	PROPN
ap-8360	71	16	designation	designation	NOUN
ap-8360	71	17	chemical	chemical	NOUN
ap-8360	71	18	composition	composition	NOUN
ap-8360	71	19	(	(	PUNCT
ap-8360	71	20	wt	wt	ADP
ap-8360	71	21	[	[	X
ap-8360	71	22	%	%	NOUN
ap-8360	71	23	]	]	X
ap-8360	71	24	)	)	PUNCT
ap-8360	71	25	tool	tool	NOUN
ap-8360	71	26	steel	steel	NOUN
ap-8360	71	27	1.2379	1.2379	NUM
ap-8360	71	28	c	c	PROPN
ap-8360	71	29	cr	cr	PROPN
ap-8360	71	30	mo	mo	PROPN
ap-8360	71	31	v	v	PROPN
ap-8360	71	32	mn	mn	PROPN
ap-8360	71	33	si	si	PROPN
ap-8360	71	34	1.4	1.4	NUM
ap-8360	71	35	-	-	SYM
ap-8360	71	36	1.6	1.6	NUM
ap-8360	71	37	11	11	NUM
ap-8360	71	38	-	-	SYM
ap-8360	71	39	12.5	12.5	NUM
ap-8360	71	40	0.6	0.6	NUM
ap-8360	71	41	-	-	SYM
ap-8360	71	42	0.9	0.9	NUM
ap-8360	71	43	1.2	1.2	NUM
ap-8360	71	44	0.2	0.2	NUM
ap-8360	71	45	-	-	PUNCT
ap-8360	71	46	0.4	0.4	NUM
ap-8360	71	47	0.2	0.2	NUM
ap-8360	71	48	-	-	PUNCT
ap-8360	71	49	0.5	0.5	NUM
ap-8360	71	50	inconel	inconel	NOUN
ap-8360	71	51	718	718	NUM
ap-8360	71	52	2.4668	2.4668	NUM
ap-8360	71	53	ni+co	ni+co	NUM
ap-8360	71	54	cr	cr	X
ap-8360	71	55	mo	mo	PROPN
ap-8360	71	56	ti	ti	PROPN
ap-8360	71	57	al	al	PROPN
ap-8360	71	58	nb+ta	nb+ta	PROPN
ap-8360	71	59	50	50	NUM
ap-8360	71	60	-	-	SYM
ap-8360	71	61	55	55	NUM
ap-8360	71	62	17	17	NUM
ap-8360	71	63	-	-	SYM
ap-8360	71	64	21	21	NUM
ap-8360	72	1	2.8	2.8	NUM
ap-8360	72	2	-	-	SYM
ap-8360	72	3	3.3	3.3	NUM
ap-8360	72	4	0.65	0.65	NUM
ap-8360	72	5	-	-	SYM
ap-8360	72	6	1.15	1.15	NUM
ap-8360	72	7	0.2	0.2	NUM
ap-8360	72	8	-	-	PUNCT
ap-8360	72	9	0.8	0.8	NUM
ap-8360	72	10	4.75	4.75	NUM
ap-8360	72	11	-	-	SYM
ap-8360	72	12	5.5	5.5	NUM
ap-8360	72	13	ti6al4v	ti6al4v	SYM
ap-8360	72	14	3.7164	3.7164	NUM
ap-8360	72	15	al	al	PROPN
ap-8360	72	16	v	v	NUM
ap-8360	72	17	fe	fe	X
ap-8360	72	18	c	c	PROPN
ap-8360	72	19	(	(	PUNCT
ap-8360	72	20	grade	grade	NOUN
ap-8360	72	21	5	5	NUM
ap-8360	72	22	)	)	PUNCT
ap-8360	72	23	5.5	5.5	NUM
ap-8360	72	24	-	-	SYM
ap-8360	72	25	6.7	6.7	NUM
ap-8360	72	26	3.5	3.5	NUM
ap-8360	72	27	-	-	SYM
ap-8360	72	28	4.5	4.5	NUM
ap-8360	72	29	0	0	NUM
ap-8360	72	30	-	-	SYM
ap-8360	72	31	0.4	0.4	NUM
ap-8360	72	32	<	<	SYM
ap-8360	72	33	0.08	0.08	NUM
ap-8360	72	34	stainless	stainless	ADJ
ap-8360	72	35	steel	steel	NOUN
ap-8360	72	36	1.4404	1.4404	NUM
ap-8360	72	37	cr	cr	PROPN
ap-8360	72	38	ni	ni	PROPN
ap-8360	72	39	mo	mo	PROPN
ap-8360	72	40	c	c	PROPN
ap-8360	72	41	(	(	PUNCT
ap-8360	72	42	aisi	aisi	PROPN
ap-8360	72	43	316l	316l	PROPN
ap-8360	72	44	)	)	PUNCT
ap-8360	72	45	16.5	16.5	NUM
ap-8360	72	46	-	-	SYM
ap-8360	72	47	18	18	NUM
ap-8360	72	48	10	10	NUM
ap-8360	72	49	2	2	NUM
ap-8360	72	50	-	-	SYM
ap-8360	72	51	2.5	2.5	NUM
ap-8360	72	52	<	<	NOUN
ap-8360	72	53	0.03	0.03	NUM
ap-8360	72	54	table	table	NOUN
ap-8360	72	55	3	3	NUM
ap-8360	72	56	.	.	PUNCT
ap-8360	72	57	chemical	chemical	ADJ
ap-8360	72	58	composition	composition	NOUN
ap-8360	72	59	of	of	ADP
ap-8360	72	60	the	the	DET
ap-8360	72	61	samples	sample	NOUN
ap-8360	72	62	in	in	ADP
ap-8360	72	63	wt	wt	PROPN
ap-8360	73	1	[	[	X
ap-8360	73	2	%	%	X
ap-8360	73	3	]	]	PUNCT
ap-8360	73	4	and	and	CCONJ
ap-8360	73	5	their	their	PRON
ap-8360	73	6	designation	designation	NOUN
ap-8360	73	7	according	accord	VERB
ap-8360	73	8	to	to	ADP
ap-8360	73	9	din	din	VERB
ap-8360	73	10	norm	norm	NOUN
ap-8360	73	11	.	.	PUNCT
ap-8360	74	1	chemical	chemical	NOUN
ap-8360	74	2	composition	composition	NOUN
ap-8360	74	3	data	datum	NOUN
ap-8360	74	4	were	be	AUX
ap-8360	74	5	received	receive	VERB
ap-8360	74	6	from	from	ADP
ap-8360	74	7	the	the	DET
ap-8360	74	8	material	material	NOUN
ap-8360	74	9	supplier	supplier	NOUN
ap-8360	74	10	.	.	PUNCT
ap-8360	75	1	material	material	NOUN
ap-8360	75	2	melting	melting	NOUN
ap-8360	75	3	point	point	NOUN
ap-8360	75	4	density	density	NOUN
ap-8360	75	5	thermal	thermal	ADJ
ap-8360	75	6	conductivity	conductivity	NOUN
ap-8360	75	7	thermal	thermal	ADJ
ap-8360	75	8	expansion	expansion	NOUN
ap-8360	75	9	ref	ref	NOUN
ap-8360	75	10	.	.	PUNCT
ap-8360	76	1	[	[	X
ap-8360	76	2	°	°	NOUN
ap-8360	76	3	c	c	X
ap-8360	76	4	]	]	X
ap-8360	77	1	[	[	X
ap-8360	77	2	g	g	NOUN
ap-8360	77	3	/	/	SYM
ap-8360	77	4	cm3	cm3	NOUN
ap-8360	77	5	]	]	PUNCT
ap-8360	78	1	[	[	X
ap-8360	78	2	w	w	X
ap-8360	78	3	/	/	SYM
ap-8360	78	4	m	m	PROPN
ap-8360	78	5	k−1	k−1	PROPN
ap-8360	78	6	]	]	PUNCT
ap-8360	78	7	coefficient	coefficient	NOUN
ap-8360	78	8	[	[	X
ap-8360	78	9	x10−6	x10−6	X
ap-8360	78	10	k	k	X
ap-8360	78	11	]	]	X
ap-8360	78	12	tool	tool	NOUN
ap-8360	78	13	steel	steel	NOUN
ap-8360	78	14	1560	1560	NUM
ap-8360	78	15	7.6	7.6	NUM
ap-8360	78	16	18.5–20	18.5–20	NUM
ap-8360	78	17	9.8–12.9	9.8–12.9	NUM
ap-8360	79	1	[	[	X
ap-8360	79	2	20	20	NUM
ap-8360	79	3	]	]	PUNCT
ap-8360	79	4	inconel	inconel	NOUN
ap-8360	79	5	718	718	NUM
ap-8360	79	6	1321–1393	1321–1393	NUM
ap-8360	79	7	8.1	8.1	NUM
ap-8360	79	8	9.3–11.5	9.3–11.5	NUM
ap-8360	79	9	8–12	8–12	NUM
ap-8360	80	1	[	[	X
ap-8360	80	2	21	21	NUM
ap-8360	80	3	,	,	PUNCT
ap-8360	80	4	22	22	NUM
ap-8360	80	5	]	]	PUNCT
ap-8360	81	1	ti6al4v	ti6al4v	ADP
ap-8360	81	2	1660	1660	NUM
ap-8360	81	3	4.5	4.5	NUM
ap-8360	81	4	6.7–7.3	6.7–7.3	NOUN
ap-8360	81	5	8.7–9.1	8.7–9.1	X
ap-8360	82	1	[	[	X
ap-8360	82	2	23	23	NUM
ap-8360	82	3	]	]	X
ap-8360	82	4	stainless	stainless	ADJ
ap-8360	82	5	steel	steel	NOUN
ap-8360	82	6	1375–1400	1375–1400	NUM
ap-8360	82	7	7.99	7.99	NUM
ap-8360	82	8	13–17	13–17	NUM
ap-8360	82	9	15–18	15–18	NUM
ap-8360	82	10	[	[	X
ap-8360	82	11	24	24	NUM
ap-8360	82	12	]	]	ADJ
ap-8360	82	13	table	table	NOUN
ap-8360	82	14	4	4	NUM
ap-8360	82	15	.	.	PUNCT
ap-8360	83	1	the	the	DET
ap-8360	83	2	physical	physical	ADJ
ap-8360	83	3	properties	property	NOUN
ap-8360	83	4	of	of	ADP
ap-8360	83	5	tested	test	VERB
ap-8360	83	6	materials	material	NOUN
ap-8360	83	7	.	.	PUNCT
ap-8360	84	1	wavelength	wavelength	NOUN
ap-8360	84	2	(	(	PUNCT
ap-8360	84	3	λ	λ	NOUN
ap-8360	84	4	)	)	PUNCT
ap-8360	84	5	1030	1030	NUM
ap-8360	84	6	nm	nm	PRON
ap-8360	84	7	pulse	pulse	NOUN
ap-8360	84	8	overlap	overlap	NOUN
ap-8360	84	9	(	(	PUNCT
ap-8360	84	10	sx	sx	NOUN
ap-8360	84	11	)	)	PUNCT
ap-8360	84	12	90	90	NUM
ap-8360	84	13	%	%	NOUN
ap-8360	84	14	fluence	fluence	NOUN
ap-8360	84	15	(	(	PUNCT
ap-8360	84	16	f	f	NOUN
ap-8360	84	17	)	)	PUNCT
ap-8360	84	18	3.5	3.5	NUM
ap-8360	84	19	j	j	PROPN
ap-8360	84	20	/	/	SYM
ap-8360	84	21	cm2	cm2	PROPN
ap-8360	84	22	repetition	repetition	NOUN
ap-8360	84	23	rate	rate	NOUN
ap-8360	84	24	(	(	PUNCT
ap-8360	84	25	f	f	X
ap-8360	84	26	)	)	PUNCT
ap-8360	84	27	200	200	NUM
ap-8360	84	28	khz	khz	NOUN
ap-8360	84	29	square	square	ADJ
ap-8360	84	30	size	size	NOUN
ap-8360	84	31	5	5	NUM
ap-8360	84	32	×	×	NOUN
ap-8360	84	33	5	5	NUM
ap-8360	84	34	mm	mm	NOUN
ap-8360	84	35	number	number	NOUN
ap-8360	84	36	of	of	ADP
ap-8360	84	37	passes	pass	VERB
ap-8360	84	38	120	120	NUM
ap-8360	84	39	hatching	hatch	VERB
ap-8360	84	40	angle	angle	NOUN
ap-8360	84	41	(	(	PUNCT
ap-8360	84	42	φ	φ	NOUN
ap-8360	84	43	)	)	PUNCT
ap-8360	84	44	15	15	NUM
ap-8360	84	45	°	°	NUM
ap-8360	84	46	,	,	PUNCT
ap-8360	84	47	17	17	NUM
ap-8360	84	48	°	°	NUM
ap-8360	84	49	,	,	PUNCT
ap-8360	84	50	30	30	NUM
ap-8360	84	51	°	°	NUM
ap-8360	84	52	,	,	PUNCT
ap-8360	84	53	45	45	NUM
ap-8360	84	54	°	°	NOUN
ap-8360	84	55	,	,	PUNCT
ap-8360	84	56	53	53	NUM
ap-8360	84	57	°	°	NOUN
ap-8360	84	58	,	,	PUNCT
ap-8360	84	59	60	60	NUM
ap-8360	84	60	°	°	NUM
ap-8360	84	61	,	,	PUNCT
ap-8360	84	62	75	75	NUM
ap-8360	84	63	°	°	NUM
ap-8360	84	64	,	,	PUNCT
ap-8360	84	65	83	83	NUM
ap-8360	84	66	°	°	NUM
ap-8360	84	67	,	,	PUNCT
ap-8360	84	68	90	90	NUM
ap-8360	84	69	°	°	NUM
ap-8360	84	70	table	table	NOUN
ap-8360	84	71	5	5	NUM
ap-8360	84	72	.	.	PUNCT
ap-8360	84	73	process	process	NOUN
ap-8360	84	74	and	and	CCONJ
ap-8360	84	75	scanning	scan	VERB
ap-8360	84	76	parameters	parameter	NOUN
ap-8360	84	77	used	use	VERB
ap-8360	84	78	to	to	PART
ap-8360	84	79	determine	determine	VERB
ap-8360	84	80	the	the	DET
ap-8360	84	81	hatching	hatch	VERB
ap-8360	84	82	angle	angle	NOUN
ap-8360	84	83	effect	effect	NOUN
ap-8360	84	84	on	on	ADP
ap-8360	84	85	surface	surface	NOUN
ap-8360	84	86	roughness	roughness	NOUN
ap-8360	84	87	.	.	PUNCT
ap-8360	85	1	sx	sx	PROPN
ap-8360	85	2	=	=	NOUN
ap-8360	86	1	1	1	NUM
ap-8360	86	2	−	−	NUM
ap-8360	86	3	v	v	NOUN
ap-8360	86	4	2ω0f	2ω0f	NOUN
ap-8360	86	5	(	(	PUNCT
ap-8360	86	6	1	1	X
ap-8360	86	7	)	)	PUNCT
ap-8360	86	8	the	the	DET
ap-8360	86	9	hatching	hatch	VERB
ap-8360	86	10	overlap	overlap	NOUN
ap-8360	86	11	(	(	PUNCT
ap-8360	86	12	hy	hy	NOUN
ap-8360	86	13	)	)	PUNCT
ap-8360	87	1	[	[	X
ap-8360	87	2	%	%	X
ap-8360	87	3	]	]	X
ap-8360	87	4	is	be	AUX
ap-8360	87	5	the	the	DET
ap-8360	87	6	percentage	percentage	NOUN
ap-8360	87	7	overlapping	overlapping	NOUN
ap-8360	87	8	of	of	ADP
ap-8360	87	9	the	the	DET
ap-8360	87	10	hatching	hatch	VERB
ap-8360	87	11	lines	line	NOUN
ap-8360	87	12	with	with	ADP
ap-8360	87	13	a	a	DET
ap-8360	87	14	defined	define	VERB
ap-8360	87	15	hatch	hatch	NOUN
ap-8360	87	16	distance	distance	NOUN
ap-8360	87	17	(	(	PUNCT
ap-8360	87	18	hd	hd	NOUN
ap-8360	87	19	)	)	PUNCT
ap-8360	87	20	and	and	CCONJ
ap-8360	87	21	known	know	VERB
ap-8360	87	22	beam	beam	NOUN
ap-8360	87	23	diameter	diameter	NOUN
ap-8360	87	24	,	,	PUNCT
ap-8360	87	25	according	accord	VERB
ap-8360	87	26	to	to	ADP
ap-8360	87	27	equation	equation	NOUN
ap-8360	87	28	(	(	PUNCT
ap-8360	87	29	2	2	NUM
ap-8360	87	30	)	)	PUNCT
ap-8360	87	31	.	.	PUNCT
ap-8360	88	1	in	in	ADP
ap-8360	88	2	this	this	DET
ap-8360	88	3	study	study	NOUN
ap-8360	88	4	,	,	PUNCT
ap-8360	88	5	the	the	DET
ap-8360	88	6	same	same	ADJ
ap-8360	88	7	sx	sx	NOUN
ap-8360	88	8	and	and	CCONJ
ap-8360	88	9	hy	hy	NOUN
ap-8360	88	10	values	value	NOUN
ap-8360	88	11	were	be	AUX
ap-8360	88	12	set	set	VERB
ap-8360	88	13	for	for	ADP
ap-8360	88	14	all	all	DET
ap-8360	88	15	the	the	DET
ap-8360	88	16	experiments	experiment	NOUN
ap-8360	88	17	.	.	PUNCT
ap-8360	89	1	hy	hy	NOUN
ap-8360	90	1	=	=	SYM
ap-8360	90	2	d	d	NOUN
ap-8360	90	3	−	−	PROPN
ap-8360	90	4	hd	hd	PROPN
ap-8360	90	5	d	d	X
ap-8360	90	6	·	·	PUNCT
ap-8360	90	7	100	100	NUM
ap-8360	90	8	(	(	PUNCT
ap-8360	90	9	2	2	X
ap-8360	90	10	)	)	PUNCT
ap-8360	90	11	the	the	DET
ap-8360	90	12	surface	surface	NOUN
ap-8360	90	13	roughness	roughness	NOUN
ap-8360	90	14	of	of	ADP
ap-8360	90	15	the	the	DET
ap-8360	90	16	ablated	ablated	ADJ
ap-8360	90	17	craters	crater	NOUN
ap-8360	90	18	was	be	AUX
ap-8360	90	19	evaluated	evaluate	VERB
ap-8360	90	20	by	by	ADP
ap-8360	90	21	the	the	DET
ap-8360	90	22	same	same	ADJ
ap-8360	90	23	optical	optical	ADJ
ap-8360	90	24	method	method	NOUN
ap-8360	90	25	as	as	ADP
ap-8360	90	26	the	the	DET
ap-8360	90	27	reference	reference	NOUN
ap-8360	90	28	state	state	NOUN
ap-8360	90	29	.	.	PUNCT
ap-8360	91	1	parameter	parameter	PROPN
ap-8360	91	2	sa	sa	PROPN
ap-8360	92	1	[	[	X
ap-8360	92	2	µm	µm	X
ap-8360	92	3	]	]	PUNCT
ap-8360	92	4	is	be	AUX
ap-8360	92	5	the	the	DET
ap-8360	92	6	arithmetical	arithmetical	ADJ
ap-8360	92	7	mean	mean	NOUN
ap-8360	92	8	height	height	NOUN
ap-8360	92	9	of	of	ADP
ap-8360	92	10	the	the	DET
ap-8360	92	11	area	area	NOUN
ap-8360	92	12	,	,	PUNCT
ap-8360	92	13	an	an	DET
ap-8360	92	14	extension	extension	NOUN
ap-8360	92	15	parameter	parameter	NOUN
ap-8360	92	16	of	of	ADP
ap-8360	92	17	ra	ra	PROPN
ap-8360	93	1	[	[	X
ap-8360	93	2	µm	µm	X
ap-8360	93	3	]	]	PUNCT
ap-8360	93	4	.	.	PUNCT
ap-8360	94	1	sa	sa	PROPN
ap-8360	94	2	values	value	NOUN
ap-8360	94	3	were	be	AUX
ap-8360	94	4	obtained	obtain	VERB
ap-8360	94	5	from	from	ADP
ap-8360	94	6	measurements	measurement	NOUN
ap-8360	94	7	of	of	ADP
ap-8360	94	8	the	the	DET
ap-8360	94	9	whole	whole	ADJ
ap-8360	94	10	area	area	NOUN
ap-8360	94	11	(	(	PUNCT
ap-8360	94	12	5×5	5×5	NUM
ap-8360	94	13	mm	mm	NOUN
ap-8360	94	14	)	)	PUNCT
ap-8360	94	15	using	use	VERB
ap-8360	94	16	the	the	DET
ap-8360	94	17	gaussian	gaussian	ADJ
ap-8360	94	18	robust	robust	ADJ
ap-8360	94	19	filter	filter	NOUN
ap-8360	94	20	according	accord	VERB
ap-8360	94	21	to	to	ADP
ap-8360	94	22	iso	iso	NOUN
ap-8360	94	23	25178	25178	NUM
ap-8360	95	1	[	[	X
ap-8360	95	2	26	26	NUM
ap-8360	95	3	]	]	PUNCT
ap-8360	95	4	.	.	PUNCT
ap-8360	96	1	3.2	3.2	NUM
ap-8360	96	2	.	.	PUNCT
ap-8360	96	3	ablation	ablation	NOUN
ap-8360	96	4	thresholds	threshold	VERB
ap-8360	96	5	different	different	ADJ
ap-8360	96	6	numbers	number	NOUN
ap-8360	96	7	of	of	ADP
ap-8360	96	8	pulses	pulse	NOUN
ap-8360	96	9	for	for	ADP
ap-8360	96	10	ablation	ablation	NOUN
ap-8360	96	11	threshold	threshold	NOUN
ap-8360	96	12	determination	determination	NOUN
ap-8360	96	13	,	,	PUNCT
ap-8360	96	14	varying	vary	VERB
ap-8360	96	15	from	from	ADP
ap-8360	96	16	1	1	NUM
ap-8360	96	17	to	to	ADP
ap-8360	96	18	1000	1000	NUM
ap-8360	96	19	,	,	PUNCT
ap-8360	96	20	can	can	AUX
ap-8360	96	21	be	be	AUX
ap-8360	96	22	found	find	VERB
ap-8360	96	23	in	in	ADP
ap-8360	96	24	the	the	DET
ap-8360	96	25	literature	literature	NOUN
ap-8360	97	1	[	[	X
ap-8360	97	2	5	5	NUM
ap-8360	97	3	,	,	PUNCT
ap-8360	97	4	6	6	NUM
ap-8360	97	5	,	,	PUNCT
ap-8360	97	6	9	9	NUM
ap-8360	97	7	]	]	PUNCT
ap-8360	97	8	.	.	PUNCT
ap-8360	98	1	for	for	ADP
ap-8360	98	2	this	this	DET
ap-8360	98	3	experiment	experiment	NOUN
ap-8360	98	4	,	,	PUNCT
ap-8360	98	5	10	10	NUM
ap-8360	98	6	pulses	pulse	NOUN
ap-8360	98	7	in	in	ADP
ap-8360	98	8	one	one	NUM
ap-8360	98	9	place	place	NOUN
ap-8360	98	10	were	be	AUX
ap-8360	98	11	selected	select	VERB
ap-8360	98	12	due	due	ADP
ap-8360	98	13	to	to	ADP
ap-8360	98	14	the	the	DET
ap-8360	98	15	continuity	continuity	NOUN
ap-8360	98	16	with	with	ADP
ap-8360	98	17	laser	laser	NOUN
ap-8360	98	18	machining	machining	NOUN
ap-8360	98	19	with	with	ADP
ap-8360	98	20	an	an	DET
ap-8360	98	21	overlap	overlap	NOUN
ap-8360	98	22	of	of	ADP
ap-8360	98	23	90	90	NUM
ap-8360	98	24	%	%	NOUN
ap-8360	98	25	.	.	PUNCT
ap-8360	99	1	the	the	DET
ap-8360	99	2	ablation	ablation	NOUN
ap-8360	99	3	threshold	threshold	NOUN
ap-8360	99	4	evaluation	evaluation	NOUN
ap-8360	99	5	method	method	NOUN
ap-8360	99	6	used	use	VERB
ap-8360	99	7	in	in	ADP
ap-8360	99	8	this	this	DET
ap-8360	99	9	study	study	NOUN
ap-8360	99	10	,	,	PUNCT
ap-8360	99	11	presented	present	VERB
ap-8360	99	12	,	,	PUNCT
ap-8360	99	13	for	for	ADP
ap-8360	99	14	example	example	NOUN
ap-8360	99	15	,	,	PUNCT
ap-8360	99	16	by	by	ADP
ap-8360	99	17	[	[	PUNCT
ap-8360	99	18	6	6	NUM
ap-8360	99	19	]	]	PUNCT
ap-8360	99	20	,	,	PUNCT
ap-8360	99	21	is	be	AUX
ap-8360	99	22	based	base	VERB
ap-8360	99	23	on	on	ADP
ap-8360	99	24	measuring	measure	VERB
ap-8360	99	25	the	the	DET
ap-8360	99	26	crater	crater	NOUN
ap-8360	99	27	(	(	PUNCT
ap-8360	99	28	spot	spot	NOUN
ap-8360	99	29	)	)	PUNCT
ap-8360	99	30	diameter	diameter	NOUN
ap-8360	99	31	.	.	PUNCT
ap-8360	100	1	as	as	ADP
ap-8360	100	2	energy	energy	NOUN
ap-8360	100	3	increases	increase	NOUN
ap-8360	100	4	,	,	PUNCT
ap-8360	100	5	the	the	DET
ap-8360	100	6	crater	crater	ADJ
ap-8360	100	7	diameter	diameter	NOUN
ap-8360	100	8	increases	increase	NOUN
ap-8360	100	9	,	,	PUNCT
ap-8360	100	10	especially	especially	ADV
ap-8360	100	11	for	for	ADP
ap-8360	100	12	metals	metal	NOUN
ap-8360	100	13	.	.	PUNCT
ap-8360	101	1	then	then	ADV
ap-8360	101	2	,	,	PUNCT
ap-8360	101	3	the	the	DET
ap-8360	101	4	threshold	threshold	NOUN
ap-8360	101	5	fluence	fluence	NOUN
ap-8360	101	6	(	(	PUNCT
ap-8360	101	7	fth	fth	NOUN
ap-8360	101	8	=	=	SYM
ap-8360	101	9	j	j	PROPN
ap-8360	101	10	/	/	SYM
ap-8360	101	11	cm2	cm2	NOUN
ap-8360	101	12	)	)	PUNCT
ap-8360	101	13	and	and	CCONJ
ap-8360	101	14	exact	exact	ADJ
ap-8360	101	15	spot	spot	NOUN
ap-8360	101	16	diameter	diameter	NOUN
ap-8360	101	17	(	(	PUNCT
ap-8360	101	18	2ω0	2ω0	NUM
ap-8360	101	19	)	)	PUNCT
ap-8360	101	20	can	can	AUX
ap-8360	101	21	be	be	AUX
ap-8360	101	22	evaluated	evaluate	VERB
ap-8360	101	23	using	use	VERB
ap-8360	101	24	the	the	DET
ap-8360	101	25	approximation	approximation	NOUN
ap-8360	101	26	computation	computation	NOUN
ap-8360	101	27	by	by	ADP
ap-8360	101	28	equation	equation	NOUN
ap-8360	101	29	(	(	PUNCT
ap-8360	101	30	3	3	X
ap-8360	101	31	)	)	PUNCT
ap-8360	102	1	[	[	X
ap-8360	102	2	6	6	NUM
ap-8360	102	3	]	]	PUNCT
ap-8360	102	4	:	:	PUNCT
ap-8360	102	5	ln	ln	PROPN
ap-8360	102	6	2ep	2ep	NOUN
ap-8360	102	7	=	=	SYM
ap-8360	102	8	d2	d2	PROPN
ap-8360	102	9	2ω2	2ω2	NOUN
ap-8360	102	10	0	0	NUM
ap-8360	102	11	+	+	CCONJ
ap-8360	102	12	ln	ln	ADJ
ap-8360	102	13	fth	fth	NOUN
ap-8360	102	14	+	+	X
ap-8360	102	15	ln	ln	ADJ
ap-8360	102	16	πω2	πω2	NOUN
ap-8360	102	17	0	0	NUM
ap-8360	102	18	,	,	PUNCT
ap-8360	102	19	(	(	PUNCT
ap-8360	102	20	3	3	X
ap-8360	102	21	)	)	PUNCT
ap-8360	102	22	where	where	SCONJ
ap-8360	102	23	d2	d2	PROPN
ap-8360	102	24	is	be	AUX
ap-8360	102	25	the	the	DET
ap-8360	102	26	crater	crater	ADJ
ap-8360	102	27	diameter	diameter	NOUN
ap-8360	102	28	for	for	ADP
ap-8360	102	29	pulse	pulse	NOUN
ap-8360	102	30	energy	energy	NOUN
ap-8360	102	31	ep	ep	PROPN
ap-8360	102	32	.	.	PUNCT
ap-8360	103	1	in	in	ADP
ap-8360	103	2	our	our	PRON
ap-8360	103	3	case	case	NOUN
ap-8360	103	4	,	,	PUNCT
ap-8360	103	5	each	each	DET
ap-8360	103	6	selected	select	VERB
ap-8360	103	7	ep	ep	PROPN
ap-8360	103	8	was	be	AUX
ap-8360	103	9	repeated	repeat	VERB
ap-8360	103	10	ten	ten	NUM
ap-8360	103	11	times	time	NOUN
ap-8360	103	12	in	in	ADP
ap-8360	103	13	a	a	DET
ap-8360	103	14	row	row	NOUN
ap-8360	103	15	and	and	CCONJ
ap-8360	103	16	then	then	ADV
ap-8360	103	17	the	the	DET
ap-8360	103	18	crater	crater	NOUN
ap-8360	103	19	diameters	diameter	NOUN
ap-8360	103	20	were	be	AUX
ap-8360	103	21	measured	measure	VERB
ap-8360	103	22	and	and	CCONJ
ap-8360	103	23	averaged	average	VERB
ap-8360	103	24	to	to	PART
ap-8360	103	25	increase	increase	VERB
ap-8360	103	26	the	the	DET
ap-8360	103	27	measurement	measurement	NOUN
ap-8360	103	28	accuracy	accuracy	NOUN
ap-8360	103	29	.	.	PUNCT
ap-8360	104	1	for	for	ADP
ap-8360	104	2	a	a	DET
ap-8360	104	3	direct	direct	ADJ
ap-8360	104	4	comparison	comparison	NOUN
ap-8360	104	5	of	of	ADP
ap-8360	104	6	the	the	DET
ap-8360	104	7	ablation	ablation	NOUN
ap-8360	104	8	behaviour	behaviour	NOUN
ap-8360	104	9	of	of	ADP
ap-8360	104	10	the	the	DET
ap-8360	104	11	selected	select	VERB
ap-8360	104	12	materials	material	NOUN
ap-8360	104	13	,	,	PUNCT
ap-8360	104	14	all	all	DET
ap-8360	104	15	three	three	NUM
ap-8360	104	16	available	available	ADJ
ap-8360	104	17	wavelengths	wavelength	NOUN
ap-8360	104	18	were	be	AUX
ap-8360	104	19	used	use	VERB
ap-8360	104	20	.	.	PUNCT
ap-8360	105	1	3.3	3.3	NUM
ap-8360	105	2	.	.	PUNCT
ap-8360	106	1	removal	removal	NOUN
ap-8360	106	2	efficiency	efficiency	NOUN
ap-8360	106	3	the	the	DET
ap-8360	106	4	removal	removal	NOUN
ap-8360	106	5	efficiency	efficiency	NOUN
ap-8360	106	6	experiment	experiment	NOUN
ap-8360	106	7	was	be	AUX
ap-8360	106	8	designed	design	VERB
ap-8360	106	9	using	use	VERB
ap-8360	106	10	the	the	DET
ap-8360	106	11	known	know	VERB
ap-8360	106	12	ablation	ablation	NOUN
ap-8360	106	13	threshold	threshold	NOUN
ap-8360	106	14	values	value	NOUN
ap-8360	106	15	and	and	CCONJ
ap-8360	106	16	optimal	optimal	ADJ
ap-8360	106	17	hatching	hatching	NOUN
ap-8360	106	18	angle	angle	NOUN
ap-8360	106	19	.	.	PUNCT
ap-8360	107	1	the	the	DET
ap-8360	107	2	main	main	ADJ
ap-8360	107	3	idea	idea	NOUN
ap-8360	107	4	of	of	ADP
ap-8360	107	5	these	these	DET
ap-8360	107	6	experiments	experiment	NOUN
ap-8360	107	7	was	be	AUX
ap-8360	107	8	to	to	PART
ap-8360	107	9	determine	determine	VERB
ap-8360	107	10	the	the	DET
ap-8360	107	11	ablation	ablation	NOUN
ap-8360	107	12	behaviour	behaviour	NOUN
ap-8360	107	13	of	of	ADP
ap-8360	107	14	the	the	DET
ap-8360	107	15	chosen	choose	VERB
ap-8360	107	16	materials	material	NOUN
ap-8360	107	17	,	,	PUNCT
ap-8360	107	18	especially	especially	ADV
ap-8360	107	19	the	the	DET
ap-8360	107	20	removed	removed	ADJ
ap-8360	107	21	volume	volume	NOUN
ap-8360	107	22	of	of	ADP
ap-8360	107	23	material	material	NOUN
ap-8360	107	24	per	per	ADP
ap-8360	107	25	time	time	NOUN
ap-8360	107	26	.	.	PUNCT
ap-8360	108	1	two	two	NUM
ap-8360	108	2	different	different	ADJ
ap-8360	108	3	expressions	expression	NOUN
ap-8360	108	4	were	be	AUX
ap-8360	108	5	used	use	VERB
ap-8360	108	6	for	for	ADP
ap-8360	108	7	the	the	DET
ap-8360	108	8	determination	determination	NOUN
ap-8360	108	9	of	of	ADP
ap-8360	108	10	the	the	DET
ap-8360	108	11	ablation	ablation	NOUN
ap-8360	108	12	efficiency	efficiency	NOUN
ap-8360	108	13	:	:	PUNCT
ap-8360	108	14	removal	removal	NOUN
ap-8360	108	15	rates	rate	NOUN
ap-8360	108	16	∆v	∆v	PROPN
ap-8360	108	17	/	/	SYM
ap-8360	108	18	pavg	pavg	NOUN
ap-8360	108	19	[	[	X
ap-8360	108	20	mm3	mm3	PROPN
ap-8360	108	21	/	/	SYM
ap-8360	108	22	min	min	NOUN
ap-8360	108	23	/	/	SYM
ap-8360	108	24	w	w	NOUN
ap-8360	108	25	]	]	PUNCT
ap-8360	108	26	and	and	CCONJ
ap-8360	108	27	volume	volume	NOUN
ap-8360	108	28	ablation	ablation	NOUN
ap-8360	108	29	rates	rate	NOUN
ap-8360	108	30	38	38	NUM
ap-8360	108	31	vol	vol	NOUN
ap-8360	108	32	.	.	PUNCT
ap-8360	109	1	63	63	NUM
ap-8360	109	2	no	no	NOUN
ap-8360	109	3	.	.	PUNCT
ap-8360	110	1	1/2023	1/2023	NUM
ap-8360	110	2	femtosecond	femtosecond	NOUN
ap-8360	110	3	laser	laser	NOUN
ap-8360	110	4	processing	processing	NOUN
ap-8360	110	5	of	of	ADP
ap-8360	110	6	advanced	advanced	ADJ
ap-8360	110	7	technical	technical	ADJ
ap-8360	110	8	materials	material	NOUN
ap-8360	110	9	∆v	∆v	PROPN
ap-8360	111	1	[	[	X
ap-8360	111	2	mm3	mm3	NOUN
ap-8360	111	3	/	/	SYM
ap-8360	111	4	min	min	NOUN
ap-8360	111	5	]	]	X
ap-8360	111	6	with	with	ADP
ap-8360	111	7	respect	respect	NOUN
ap-8360	111	8	to	to	ADP
ap-8360	111	9	the	the	DET
ap-8360	111	10	surface	surface	NOUN
ap-8360	111	11	quality	quality	NOUN
ap-8360	111	12	,	,	PUNCT
ap-8360	111	13	expressed	express	VERB
ap-8360	111	14	by	by	ADP
ap-8360	111	15	the	the	DET
ap-8360	111	16	parameter	parameter	NOUN
ap-8360	111	17	sa	sa	PROPN
ap-8360	112	1	[	[	X
ap-8360	112	2	µm	µm	X
ap-8360	112	3	]	]	X
ap-8360	112	4	the	the	DET
ap-8360	112	5	arithmetical	arithmetical	ADJ
ap-8360	112	6	mean	mean	NOUN
ap-8360	112	7	height	height	NOUN
ap-8360	112	8	of	of	ADP
ap-8360	112	9	the	the	DET
ap-8360	112	10	area	area	NOUN
ap-8360	112	11	.	.	PUNCT
ap-8360	113	1	removal	removal	NOUN
ap-8360	113	2	rates	rate	NOUN
ap-8360	113	3	can	can	AUX
ap-8360	113	4	be	be	AUX
ap-8360	113	5	also	also	ADV
ap-8360	113	6	expressed	express	VERB
ap-8360	113	7	as	as	ADP
ap-8360	113	8	a	a	DET
ap-8360	113	9	function	function	NOUN
ap-8360	113	10	of	of	ADP
ap-8360	113	11	fluence	fluence	NOUN
ap-8360	113	12	threshold	threshold	NOUN
ap-8360	113	13	(	(	PUNCT
ap-8360	113	14	fth	fth	NOUN
ap-8360	113	15	)	)	PUNCT
ap-8360	113	16	and	and	CCONJ
ap-8360	113	17	optical	optical	ADJ
ap-8360	113	18	penetration	penetration	NOUN
ap-8360	113	19	depth	depth	NOUN
ap-8360	113	20	δ	δ	NOUN
ap-8360	113	21	.	.	PUNCT
ap-8360	114	1	finally	finally	ADV
ap-8360	114	2	,	,	PUNCT
ap-8360	114	3	the	the	DET
ap-8360	114	4	best	good	ADJ
ap-8360	114	5	values	value	NOUN
ap-8360	114	6	of	of	ADP
ap-8360	114	7	fluence	fluence	NOUN
ap-8360	114	8	efficiency	efficiency	NOUN
ap-8360	114	9	were	be	AUX
ap-8360	114	10	used	use	VERB
ap-8360	114	11	for	for	ADP
ap-8360	114	12	the	the	DET
ap-8360	114	13	experiment	experiment	NOUN
ap-8360	114	14	with	with	ADP
ap-8360	114	15	increasing	increase	VERB
ap-8360	114	16	scanning	scan	VERB
ap-8360	114	17	speed	speed	NOUN
ap-8360	114	18	and	and	CCONJ
ap-8360	114	19	constant	constant	ADJ
ap-8360	114	20	overlap	overlap	NOUN
ap-8360	114	21	.	.	PUNCT
ap-8360	115	1	∆v	∆v	NOUN
ap-8360	115	2	pavg	pavg	NOUN
ap-8360	115	3	=	=	NOUN
ap-8360	115	4	1	1	NUM
ap-8360	115	5	4	4	NUM
ap-8360	115	6	·	·	PUNCT
ap-8360	115	7	δ	δ	PROPN
ap-8360	115	8	fth	fth	NOUN
ap-8360	115	9	·	·	PUNCT
ap-8360	115	10	ln2(2	ln2(2	X
ap-8360	115	11	·	·	PUNCT
ap-8360	115	12	f	f	PROPN
ap-8360	115	13	fth	fth	PROPN
ap-8360	115	14	)	)	PUNCT
ap-8360	115	15	(	(	PUNCT
ap-8360	115	16	4	4	X
ap-8360	115	17	)	)	PUNCT
ap-8360	115	18	for	for	ADP
ap-8360	115	19	the	the	DET
ap-8360	115	20	removal	removal	NOUN
ap-8360	115	21	rate	rate	NOUN
ap-8360	115	22	estimations	estimation	NOUN
ap-8360	115	23	,	,	PUNCT
ap-8360	115	24	the	the	DET
ap-8360	115	25	squares	square	NOUN
ap-8360	115	26	of	of	ADP
ap-8360	115	27	5	5	NUM
ap-8360	115	28	×	×	NOUN
ap-8360	115	29	5	5	NUM
ap-8360	115	30	mm	mm	NOUN
ap-8360	115	31	were	be	AUX
ap-8360	115	32	ablated	ablate	VERB
ap-8360	115	33	with	with	ADP
ap-8360	115	34	120	120	NUM
ap-8360	115	35	laser	laser	NOUN
ap-8360	115	36	passes	pass	NOUN
ap-8360	115	37	and	and	CCONJ
ap-8360	115	38	hatch	hatch	VERB
ap-8360	115	39	rotation	rotation	NOUN
ap-8360	115	40	by	by	ADP
ap-8360	115	41	a	a	DET
ap-8360	115	42	defined	define	VERB
ap-8360	115	43	angle	angle	NOUN
ap-8360	115	44	after	after	ADP
ap-8360	115	45	each	each	DET
ap-8360	115	46	pass	pass	NOUN
ap-8360	115	47	.	.	PUNCT
ap-8360	116	1	the	the	DET
ap-8360	116	2	proper	proper	ADJ
ap-8360	116	3	hatching	hatching	NOUN
ap-8360	116	4	angle	angle	NOUN
ap-8360	116	5	was	be	AUX
ap-8360	116	6	set	set	VERB
ap-8360	116	7	according	accord	VERB
ap-8360	116	8	to	to	ADP
ap-8360	116	9	the	the	DET
ap-8360	116	10	preexperimental	preexperimental	ADJ
ap-8360	116	11	results	result	NOUN
ap-8360	116	12	.	.	PUNCT
ap-8360	117	1	the	the	DET
ap-8360	117	2	experiment	experiment	NOUN
ap-8360	117	3	was	be	AUX
ap-8360	117	4	performed	perform	VERB
ap-8360	117	5	with	with	ADP
ap-8360	117	6	a	a	DET
ap-8360	117	7	repetition	repetition	NOUN
ap-8360	117	8	rate	rate	NOUN
ap-8360	117	9	of	of	ADP
ap-8360	117	10	200	200	NUM
ap-8360	117	11	khz	khz	NOUN
ap-8360	117	12	and	and	CCONJ
ap-8360	117	13	pulse	pulse	NOUN
ap-8360	117	14	duration	duration	NOUN
ap-8360	117	15	around	around	ADP
ap-8360	117	16	τ	τ	PROPN
ap-8360	117	17	≈	≈	PROPN
ap-8360	117	18	267	267	NUM
ap-8360	117	19	femtoseconds	femtosecond	NOUN
ap-8360	117	20	.	.	PUNCT
ap-8360	118	1	all	all	PRON
ap-8360	118	2	of	of	ADP
ap-8360	118	3	the	the	DET
ap-8360	118	4	parameters	parameter	NOUN
ap-8360	118	5	used	use	VERB
ap-8360	118	6	in	in	ADP
ap-8360	118	7	the	the	DET
ap-8360	118	8	experiment	experiment	NOUN
ap-8360	118	9	are	be	AUX
ap-8360	118	10	presented	present	VERB
ap-8360	118	11	in	in	ADP
ap-8360	118	12	table	table	NOUN
ap-8360	118	13	6	6	NUM
ap-8360	118	14	.	.	PUNCT
ap-8360	119	1	λ	λ	X
ap-8360	120	1	[	[	X
ap-8360	120	2	nm	nm	X
ap-8360	120	3	]	]	X
ap-8360	120	4	2ω	2ω	NUM
ap-8360	120	5	[	[	X
ap-8360	120	6	µm	µm	X
ap-8360	120	7	]	]	X
ap-8360	120	8	sx	sx	PROPN
ap-8360	120	9	,	,	PUNCT
ap-8360	120	10	hy	hy	NOUN
ap-8360	121	1	[	[	X
ap-8360	121	2	%	%	X
ap-8360	121	3	]	]	X
ap-8360	121	4	f	f	X
ap-8360	122	1	[	[	X
ap-8360	122	2	khz	khz	X
ap-8360	122	3	]	]	PUNCT
ap-8360	122	4	τ	τ	PROPN
ap-8360	123	1	[	[	X
ap-8360	123	2	fs	fs	X
ap-8360	123	3	]	]	X
ap-8360	123	4	1030	1030	NUM
ap-8360	123	5	(	(	PUNCT
ap-8360	123	6	ih	ih	NOUN
ap-8360	123	7	)	)	PUNCT
ap-8360	123	8	33	33	NUM
ap-8360	123	9	90	90	NUM
ap-8360	123	10	200	200	NUM
ap-8360	123	11	267	267	NUM
ap-8360	123	12	515	515	NUM
ap-8360	123	13	(	(	PUNCT
ap-8360	123	14	iih	iih	PROPN
ap-8360	123	15	)	)	PUNCT
ap-8360	123	16	31	31	NUM
ap-8360	123	17	90	90	NUM
ap-8360	123	18	200	200	NUM
ap-8360	123	19	267	267	NUM
ap-8360	123	20	343	343	NUM
ap-8360	123	21	(	(	PUNCT
ap-8360	123	22	iiih	iiih	NOUN
ap-8360	123	23	)	)	PUNCT
ap-8360	123	24	22	22	NUM
ap-8360	123	25	90	90	NUM
ap-8360	123	26	200	200	NUM
ap-8360	123	27	267	267	NUM
ap-8360	123	28	table	table	NOUN
ap-8360	123	29	6	6	NUM
ap-8360	123	30	.	.	PUNCT
ap-8360	124	1	laser	laser	NOUN
ap-8360	124	2	and	and	CCONJ
ap-8360	124	3	scanning	scan	VERB
ap-8360	124	4	parameters	parameter	NOUN
ap-8360	124	5	for	for	ADP
ap-8360	124	6	the	the	DET
ap-8360	124	7	removal	removal	NOUN
ap-8360	124	8	efficiency	efficiency	NOUN
ap-8360	124	9	experiment	experiment	NOUN
ap-8360	124	10	.	.	PUNCT
ap-8360	125	1	after	after	ADP
ap-8360	125	2	laser	laser	NOUN
ap-8360	125	3	processing	processing	NOUN
ap-8360	125	4	,	,	PUNCT
ap-8360	125	5	the	the	DET
ap-8360	125	6	samples	sample	NOUN
ap-8360	125	7	were	be	AUX
ap-8360	125	8	cleaned	clean	VERB
ap-8360	125	9	for	for	ADP
ap-8360	125	10	15	15	NUM
ap-8360	125	11	minutes	minute	NOUN
ap-8360	125	12	with	with	ADP
ap-8360	125	13	ethanol	ethanol	NOUN
ap-8360	125	14	in	in	ADP
ap-8360	125	15	an	an	DET
ap-8360	125	16	ultrasonic	ultrasonic	ADJ
ap-8360	125	17	bath	bath	NOUN
ap-8360	125	18	.	.	PUNCT
ap-8360	126	1	the	the	DET
ap-8360	126	2	depth	depth	NOUN
ap-8360	126	3	and	and	CCONJ
ap-8360	126	4	surface	surface	NOUN
ap-8360	126	5	roughness	roughness	NOUN
ap-8360	126	6	of	of	ADP
ap-8360	126	7	the	the	DET
ap-8360	126	8	ablated	ablated	ADJ
ap-8360	126	9	craters	crater	NOUN
ap-8360	126	10	were	be	AUX
ap-8360	126	11	evaluated	evaluate	VERB
ap-8360	126	12	with	with	ADP
ap-8360	126	13	an	an	DET
ap-8360	126	14	infinitefocus	infinitefocus	NOUN
ap-8360	126	15	g5	g5	NOUN
ap-8360	126	16	optical	optical	ADJ
ap-8360	126	17	microscope	microscope	NOUN
ap-8360	126	18	(	(	PUNCT
ap-8360	126	19	bruker	bruker	PROPN
ap-8360	126	20	alicona	alicona	PROPN
ap-8360	126	21	,	,	PUNCT
ap-8360	126	22	austria	austria	PROPN
ap-8360	126	23	)	)	PUNCT
ap-8360	126	24	.	.	PUNCT
ap-8360	127	1	for	for	ADP
ap-8360	127	2	detailed	detailed	ADJ
ap-8360	127	3	observations	observation	NOUN
ap-8360	127	4	,	,	PUNCT
ap-8360	127	5	a	a	DET
ap-8360	127	6	laser	laser	NOUN
ap-8360	127	7	confocal	confocal	ADJ
ap-8360	127	8	microscope	microscope	NOUN
ap-8360	127	9	vkx-1000	vkx-1000	NOUN
ap-8360	127	10	from	from	ADP
ap-8360	127	11	keyence	keyence	NOUN
ap-8360	127	12	was	be	AUX
ap-8360	127	13	employed	employ	VERB
ap-8360	127	14	.	.	PUNCT
ap-8360	128	1	3.4	3.4	NUM
ap-8360	128	2	.	.	PUNCT
ap-8360	128	3	increasing	increase	VERB
ap-8360	128	4	scanning	scan	VERB
ap-8360	128	5	speed	speed	NOUN
ap-8360	128	6	and	and	CCONJ
ap-8360	128	7	repetition	repetition	NOUN
ap-8360	128	8	rates	rate	NOUN
ap-8360	128	9	the	the	DET
ap-8360	128	10	experimental	experimental	ADJ
ap-8360	128	11	design	design	NOUN
ap-8360	128	12	that	that	PRON
ap-8360	128	13	was	be	AUX
ap-8360	128	14	used	use	VERB
ap-8360	128	15	for	for	ADP
ap-8360	128	16	the	the	DET
ap-8360	128	17	removal	removal	NOUN
ap-8360	128	18	rates	rate	NOUN
ap-8360	128	19	was	be	AUX
ap-8360	128	20	also	also	ADV
ap-8360	128	21	used	use	VERB
ap-8360	128	22	for	for	ADP
ap-8360	128	23	the	the	DET
ap-8360	128	24	increasing	increase	VERB
ap-8360	128	25	productivity	productivity	NOUN
ap-8360	128	26	experiment	experiment	NOUN
ap-8360	128	27	by	by	ADP
ap-8360	128	28	increasing	increase	VERB
ap-8360	128	29	the	the	DET
ap-8360	128	30	repetition	repetition	NOUN
ap-8360	128	31	rate	rate	NOUN
ap-8360	128	32	with	with	ADP
ap-8360	128	33	a	a	DET
ap-8360	128	34	constant	constant	ADJ
ap-8360	128	35	overlap	overlap	NOUN
ap-8360	128	36	.	.	PUNCT
ap-8360	129	1	this	this	DET
ap-8360	129	2	experiment	experiment	NOUN
ap-8360	129	3	was	be	AUX
ap-8360	129	4	performed	perform	VERB
ap-8360	129	5	for	for	ADP
ap-8360	129	6	all	all	DET
ap-8360	129	7	the	the	DET
ap-8360	129	8	materials	material	NOUN
ap-8360	129	9	and	and	CCONJ
ap-8360	129	10	for	for	ADP
ap-8360	129	11	one	one	NUM
ap-8360	129	12	laser	laser	NOUN
ap-8360	129	13	wavelength	wavelength	NOUN
ap-8360	129	14	(	(	PUNCT
ap-8360	129	15	1030	1030	NUM
ap-8360	129	16	nm	nm	NOUN
ap-8360	129	17	)	)	PUNCT
ap-8360	129	18	.	.	PUNCT
ap-8360	130	1	the	the	DET
ap-8360	130	2	constant	constant	ADJ
ap-8360	130	3	parameter	parameter	NOUN
ap-8360	130	4	of	of	ADP
ap-8360	130	5	laser	laser	NOUN
ap-8360	130	6	fluences	fluence	NOUN
ap-8360	130	7	found	find	VERB
ap-8360	130	8	to	to	PART
ap-8360	130	9	be	be	AUX
ap-8360	130	10	the	the	DET
ap-8360	130	11	most	most	ADV
ap-8360	130	12	effective	effective	ADJ
ap-8360	130	13	in	in	ADP
ap-8360	130	14	terms	term	NOUN
ap-8360	130	15	of	of	ADP
ap-8360	130	16	removal	removal	NOUN
ap-8360	130	17	rates	rate	NOUN
ap-8360	130	18	was	be	AUX
ap-8360	130	19	used	use	VERB
ap-8360	130	20	.	.	PUNCT
ap-8360	131	1	then	then	ADV
ap-8360	131	2	,	,	PUNCT
ap-8360	131	3	the	the	DET
ap-8360	131	4	repetition	repetition	NOUN
ap-8360	131	5	rate	rate	NOUN
ap-8360	131	6	was	be	AUX
ap-8360	131	7	increased	increase	VERB
ap-8360	131	8	from	from	ADP
ap-8360	131	9	100	100	NUM
ap-8360	131	10	khz	khz	NOUN
ap-8360	131	11	to	to	ADP
ap-8360	131	12	1	1	NUM
ap-8360	131	13	mhz	mhz	NOUN
ap-8360	131	14	,	,	PUNCT
ap-8360	131	15	with	with	ADP
ap-8360	131	16	a	a	DET
ap-8360	131	17	constant	constant	ADJ
ap-8360	131	18	overlap	overlap	NOUN
ap-8360	131	19	of	of	ADP
ap-8360	131	20	90	90	NUM
ap-8360	131	21	%	%	NOUN
ap-8360	131	22	,	,	PUNCT
ap-8360	131	23	which	which	PRON
ap-8360	131	24	also	also	ADV
ap-8360	131	25	resulted	result	VERB
ap-8360	131	26	in	in	ADP
ap-8360	131	27	an	an	DET
ap-8360	131	28	increase	increase	NOUN
ap-8360	131	29	of	of	ADP
ap-8360	131	30	the	the	DET
ap-8360	131	31	scanning	scanning	NOUN
ap-8360	131	32	speed	speed	NOUN
ap-8360	131	33	from	from	ADP
ap-8360	131	34	660	660	NUM
ap-8360	131	35	to	to	ADP
ap-8360	131	36	6600	6600	NUM
ap-8360	131	37	mm	mm	PROPN
ap-8360	131	38	/	/	SYM
ap-8360	131	39	s.	s.	PROPN
ap-8360	131	40	the	the	DET
ap-8360	131	41	main	main	ADJ
ap-8360	131	42	idea	idea	NOUN
ap-8360	131	43	of	of	ADP
ap-8360	131	44	this	this	DET
ap-8360	131	45	experiment	experiment	NOUN
ap-8360	131	46	was	be	AUX
ap-8360	131	47	to	to	PART
ap-8360	131	48	determine	determine	VERB
ap-8360	131	49	the	the	DET
ap-8360	131	50	highest	high	ADJ
ap-8360	131	51	achievable	achievable	ADJ
ap-8360	131	52	laser	laser	NOUN
ap-8360	131	53	ablation	ablation	NOUN
ap-8360	131	54	productivity	productivity	NOUN
ap-8360	131	55	with	with	ADP
ap-8360	131	56	our	our	PRON
ap-8360	131	57	laser	laser	NOUN
ap-8360	131	58	source	source	NOUN
ap-8360	131	59	.	.	PUNCT
ap-8360	132	1	3.5	3.5	NUM
ap-8360	132	2	.	.	PUNCT
ap-8360	132	3	surface	surface	NOUN
ap-8360	132	4	structuring	structure	VERB
ap-8360	132	5	two	two	NUM
ap-8360	132	6	structures	structure	NOUN
ap-8360	132	7	,	,	PUNCT
ap-8360	132	8	namely	namely	ADV
ap-8360	132	9	dot	dot	NOUN
ap-8360	132	10	and	and	CCONJ
ap-8360	132	11	honeycomb	honeycomb	NOUN
ap-8360	132	12	,	,	PUNCT
ap-8360	132	13	were	be	AUX
ap-8360	132	14	designed	design	VERB
ap-8360	132	15	(	(	PUNCT
ap-8360	132	16	figure	figure	NOUN
ap-8360	132	17	2	2	NUM
ap-8360	132	18	)	)	PUNCT
ap-8360	132	19	to	to	PART
ap-8360	132	20	demonstrate	demonstrate	VERB
ap-8360	132	21	the	the	DET
ap-8360	132	22	suitability	suitability	NOUN
ap-8360	132	23	of	of	ADP
ap-8360	132	24	the	the	DET
ap-8360	132	25	identified	identify	VERB
ap-8360	132	26	parameters	parameter	NOUN
ap-8360	132	27	.	.	PUNCT
ap-8360	133	1	the	the	DET
ap-8360	133	2	dimensions	dimension	NOUN
ap-8360	133	3	of	of	ADP
ap-8360	133	4	each	each	DET
ap-8360	133	5	structure	structure	NOUN
ap-8360	133	6	are	be	AUX
ap-8360	133	7	listed	list	VERB
ap-8360	133	8	in	in	ADP
ap-8360	133	9	table	table	NOUN
ap-8360	133	10	7	7	NUM
ap-8360	133	11	.	.	PUNCT
ap-8360	134	1	for	for	ADP
ap-8360	134	2	the	the	DET
ap-8360	134	3	dot	dot	NOUN
ap-8360	134	4	structure	structure	NOUN
ap-8360	134	5	,	,	PUNCT
ap-8360	134	6	the	the	DET
ap-8360	134	7	basic	basic	ADJ
ap-8360	134	8	dimensions	dimension	NOUN
ap-8360	134	9	are	be	AUX
ap-8360	134	10	the	the	DET
ap-8360	134	11	depth	depth	NOUN
ap-8360	134	12	(	(	PUNCT
ap-8360	134	13	h	h	NOUN
ap-8360	134	14	)	)	PUNCT
ap-8360	134	15	and	and	CCONJ
ap-8360	134	16	diameter	diameter	NOUN
ap-8360	134	17	determined	determine	VERB
ap-8360	134	18	by	by	ADP
ap-8360	134	19	the	the	DET
ap-8360	134	20	spot	spot	NOUN
ap-8360	134	21	diameter	diameter	NOUN
ap-8360	134	22	(	(	PUNCT
ap-8360	134	23	d	d	NOUN
ap-8360	134	24	)	)	PUNCT
ap-8360	134	25	and	and	CCONJ
ap-8360	134	26	pitch	pitch	NOUN
ap-8360	134	27	(	(	PUNCT
ap-8360	134	28	r	r	NOUN
ap-8360	134	29	)	)	PUNCT
ap-8360	134	30	.	.	PUNCT
ap-8360	135	1	figure	figure	NOUN
ap-8360	135	2	2	2	NUM
ap-8360	135	3	.	.	NOUN
ap-8360	135	4	schema	schema	NOUN
ap-8360	135	5	of	of	ADP
ap-8360	135	6	designed	design	VERB
ap-8360	135	7	surface	surface	NOUN
ap-8360	135	8	structures	structure	NOUN
ap-8360	135	9	with	with	ADP
ap-8360	135	10	basic	basic	ADJ
ap-8360	135	11	dimension	dimension	NOUN
ap-8360	135	12	:	:	PUNCT
ap-8360	135	13	a	a	X
ap-8360	135	14	)	)	PUNCT
ap-8360	135	15	dot	dot	NOUN
ap-8360	135	16	structure	structure	NOUN
ap-8360	135	17	–	–	PUNCT
ap-8360	135	18	view	view	NOUN
ap-8360	135	19	from	from	ADP
ap-8360	135	20	top	top	ADJ
ap-8360	135	21	;	;	PUNCT
ap-8360	135	22	b	b	X
ap-8360	135	23	)	)	PUNCT
ap-8360	135	24	dot	dot	NOUN
ap-8360	135	25	structure	structure	NOUN
ap-8360	135	26	–	–	PUNCT
ap-8360	135	27	cros	cros	PROPN
ap-8360	135	28	-	-	PUNCT
ap-8360	135	29	section	section	NOUN
ap-8360	135	30	profile	profile	NOUN
ap-8360	135	31	;	;	PUNCT
ap-8360	135	32	c	c	X
ap-8360	135	33	)	)	PUNCT
ap-8360	135	34	honeycomb	honeycomb	NOUN
ap-8360	135	35	structure	structure	NOUN
ap-8360	135	36	–	–	PUNCT
ap-8360	135	37	view	view	NOUN
ap-8360	135	38	from	from	ADP
ap-8360	135	39	top	top	ADJ
ap-8360	135	40	;	;	PUNCT
ap-8360	135	41	d	d	X
ap-8360	135	42	)	)	PUNCT
ap-8360	135	43	honeycomb	honeycomb	NOUN
ap-8360	135	44	structure	structure	NOUN
ap-8360	135	45	–	–	PUNCT
ap-8360	135	46	cros	cros	PROPN
ap-8360	135	47	-	-	PUNCT
ap-8360	135	48	section	section	NOUN
ap-8360	135	49	profile	profile	NOUN
ap-8360	135	50	.	.	PUNCT
ap-8360	136	1	structure	structure	NOUN
ap-8360	136	2	type	type	NOUN
ap-8360	136	3	h	h	NOUN
ap-8360	137	1	[	[	X
ap-8360	137	2	µm	µm	X
ap-8360	137	3	]	]	X
ap-8360	137	4	d	d	X
ap-8360	137	5	[	[	X
ap-8360	137	6	µm	µm	X
ap-8360	137	7	]	]	X
ap-8360	137	8	r	r	NOUN
ap-8360	137	9	,	,	PUNCT
ap-8360	137	10	rx	rx	VERB
ap-8360	137	11	,	,	PUNCT
ap-8360	137	12	ry	ry	NOUN
ap-8360	138	1	[	[	X
ap-8360	138	2	µm	µm	X
ap-8360	138	3	]	]	X
ap-8360	138	4	dot	dot	NOUN
ap-8360	138	5	10	10	NUM
ap-8360	138	6	35	35	NUM
ap-8360	138	7	100	100	NUM
ap-8360	138	8	honeycomb	honeycomb	NOUN
ap-8360	138	9	10	10	NUM
ap-8360	138	10	150	150	NUM
ap-8360	138	11	35	35	NUM
ap-8360	138	12	table	table	NOUN
ap-8360	138	13	7	7	NUM
ap-8360	138	14	.	.	PUNCT
ap-8360	138	15	structure	structure	NOUN
ap-8360	138	16	dimensions	dimension	NOUN
ap-8360	138	17	,	,	PUNCT
ap-8360	138	18	depth	depth	NOUN
ap-8360	138	19	(	(	PUNCT
ap-8360	138	20	h	h	NOUN
ap-8360	138	21	)	)	PUNCT
ap-8360	138	22	,	,	PUNCT
ap-8360	138	23	diameter	diameter	NOUN
ap-8360	138	24	(	(	PUNCT
ap-8360	138	25	d	d	NOUN
ap-8360	138	26	)	)	PUNCT
ap-8360	138	27	,	,	PUNCT
ap-8360	138	28	dot	dot	NOUN
ap-8360	138	29	pitch	pitch	NOUN
ap-8360	138	30	(	(	PUNCT
ap-8360	138	31	rx	rx	VERB
ap-8360	138	32	,	,	PUNCT
ap-8360	138	33	ry	ry	ADJ
ap-8360	138	34	)	)	PUNCT
ap-8360	138	35	and	and	CCONJ
ap-8360	138	36	line	line	NOUN
ap-8360	138	37	width	width	NOUN
ap-8360	138	38	of	of	ADP
ap-8360	138	39	honeycomb	honeycomb	NOUN
ap-8360	138	40	structure	structure	NOUN
ap-8360	138	41	(	(	PUNCT
ap-8360	138	42	r	r	NOUN
ap-8360	138	43	)	)	PUNCT
ap-8360	138	44	.	.	PUNCT
ap-8360	139	1	all	all	DET
ap-8360	139	2	values	value	NOUN
ap-8360	139	3	are	be	AUX
ap-8360	139	4	given	give	VERB
ap-8360	139	5	in	in	ADP
ap-8360	139	6	micrometre	micrometre	NOUN
ap-8360	139	7	.	.	PUNCT
ap-8360	140	1	this	this	PRON
ap-8360	140	2	is	be	AUX
ap-8360	140	3	the	the	DET
ap-8360	140	4	same	same	ADJ
ap-8360	140	5	for	for	ADP
ap-8360	140	6	the	the	DET
ap-8360	140	7	honeycomb	honeycomb	NOUN
ap-8360	140	8	structure	structure	NOUN
ap-8360	140	9	,	,	PUNCT
ap-8360	140	10	where	where	SCONJ
ap-8360	140	11	parameter	parameter	PROPN
ap-8360	140	12	d	d	PROPN
ap-8360	140	13	is	be	AUX
ap-8360	140	14	defined	define	VERB
ap-8360	140	15	as	as	ADP
ap-8360	140	16	the	the	DET
ap-8360	140	17	circumscribed	circumscribed	ADJ
ap-8360	140	18	circle	circle	NOUN
ap-8360	140	19	of	of	ADP
ap-8360	140	20	one	one	NUM
ap-8360	140	21	of	of	ADP
ap-8360	140	22	the	the	DET
ap-8360	140	23	hexagons	hexagon	NOUN
ap-8360	140	24	.	.	PUNCT
ap-8360	141	1	pitch	pitch	NOUN
ap-8360	141	2	(	(	PUNCT
ap-8360	141	3	r	r	NOUN
ap-8360	141	4	)	)	PUNCT
ap-8360	141	5	for	for	ADP
ap-8360	141	6	the	the	DET
ap-8360	141	7	honeycomb	honeycomb	NOUN
ap-8360	141	8	is	be	AUX
ap-8360	141	9	given	give	VERB
ap-8360	141	10	by	by	ADP
ap-8360	141	11	the	the	DET
ap-8360	141	12	spot	spot	NOUN
ap-8360	141	13	diameter	diameter	NOUN
ap-8360	141	14	.	.	PUNCT
ap-8360	142	1	4	4	X
ap-8360	142	2	.	.	NOUN
ap-8360	142	3	results	result	NOUN
ap-8360	142	4	and	and	CCONJ
ap-8360	142	5	discussions	discussion	NOUN
ap-8360	142	6	4.1	4.1	NUM
ap-8360	142	7	.	.	PUNCT
ap-8360	143	1	effect	effect	NOUN
ap-8360	143	2	of	of	ADP
ap-8360	143	3	hatching	hatch	VERB
ap-8360	143	4	angle	angle	NOUN
ap-8360	143	5	on	on	ADP
ap-8360	143	6	surface	surface	NOUN
ap-8360	143	7	roughness	roughness	NOUN
ap-8360	143	8	before	before	ADP
ap-8360	143	9	the	the	DET
ap-8360	143	10	main	main	ADJ
ap-8360	143	11	experiments	experiment	NOUN
ap-8360	143	12	,	,	PUNCT
ap-8360	143	13	the	the	DET
ap-8360	143	14	effect	effect	NOUN
ap-8360	143	15	of	of	ADP
ap-8360	143	16	the	the	DET
ap-8360	143	17	hatching	hatch	VERB
ap-8360	143	18	angle	angle	NOUN
ap-8360	143	19	on	on	ADP
ap-8360	143	20	surface	surface	NOUN
ap-8360	143	21	roughness	roughness	NOUN
ap-8360	143	22	was	be	AUX
ap-8360	143	23	estimated	estimate	VERB
ap-8360	143	24	.	.	PUNCT
ap-8360	144	1	stainless	stainless	ADJ
ap-8360	144	2	steel	steel	NOUN
ap-8360	144	3	was	be	AUX
ap-8360	144	4	only	only	ADV
ap-8360	144	5	one	one	NUM
ap-8360	144	6	material	material	NOUN
ap-8360	144	7	used	use	VERB
ap-8360	144	8	for	for	ADP
ap-8360	144	9	this	this	DET
ap-8360	144	10	experiment	experiment	NOUN
ap-8360	144	11	.	.	PUNCT
ap-8360	145	1	the	the	DET
ap-8360	145	2	results	result	NOUN
ap-8360	145	3	of	of	ADP
ap-8360	145	4	the	the	DET
ap-8360	145	5	surface	surface	NOUN
ap-8360	145	6	roughness	roughness	NOUN
ap-8360	145	7	measurements	measurement	NOUN
ap-8360	145	8	for	for	ADP
ap-8360	145	9	different	different	ADJ
ap-8360	145	10	hatching	hatching	NOUN
ap-8360	145	11	angles	angle	NOUN
ap-8360	145	12	φ	φ	PROPN
ap-8360	145	13	obtained	obtain	VERB
ap-8360	145	14	from	from	ADP
ap-8360	145	15	the	the	DET
ap-8360	145	16	preexperiment	preexperiment	NOUN
ap-8360	145	17	can	can	AUX
ap-8360	145	18	be	be	AUX
ap-8360	145	19	found	find	VERB
ap-8360	145	20	in	in	ADP
ap-8360	145	21	figure	figure	NOUN
ap-8360	145	22	3	3	NUM
ap-8360	145	23	.	.	PUNCT
ap-8360	146	1	the	the	DET
ap-8360	146	2	hatching	hatch	VERB
ap-8360	146	3	angle	angle	NOUN
ap-8360	146	4	φ	φ	PROPN
ap-8360	146	5	=	=	SYM
ap-8360	146	6	17	17	NUM
ap-8360	146	7	°	°	PRON
ap-8360	146	8	had	have	VERB
ap-8360	146	9	the	the	DET
ap-8360	146	10	lowest	low	ADJ
ap-8360	146	11	impact	impact	NOUN
ap-8360	146	12	on	on	ADP
ap-8360	146	13	surface	surface	NOUN
ap-8360	146	14	roughness	roughness	NOUN
ap-8360	146	15	and	and	CCONJ
ap-8360	146	16	was	be	AUX
ap-8360	146	17	,	,	PUNCT
ap-8360	146	18	therefore	therefore	ADV
ap-8360	146	19	,	,	PUNCT
ap-8360	146	20	chosen	choose	VERB
ap-8360	146	21	for	for	ADP
ap-8360	146	22	the	the	DET
ap-8360	146	23	subsequent	subsequent	ADJ
ap-8360	146	24	experiments	experiment	NOUN
ap-8360	146	25	.	.	PUNCT
ap-8360	147	1	the	the	DET
ap-8360	147	2	highest	high	ADJ
ap-8360	147	3	surface	surface	NOUN
ap-8360	147	4	roughness	roughness	NOUN
ap-8360	147	5	of	of	ADP
ap-8360	147	6	sa	sa	PROPN
ap-8360	147	7	=	=	PROPN
ap-8360	147	8	1.06	1.06	NUM
ap-8360	147	9	µm	µm	NOUN
ap-8360	147	10	was	be	AUX
ap-8360	147	11	measured	measure	VERB
ap-8360	147	12	for	for	ADP
ap-8360	147	13	a	a	DET
ap-8360	147	14	hatching	hatch	VERB
ap-8360	147	15	angle	angle	NOUN
ap-8360	147	16	of	of	ADP
ap-8360	147	17	45	45	NUM
ap-8360	147	18	°	°	NUM
ap-8360	147	19	;	;	PUNCT
ap-8360	147	20	it	it	PRON
ap-8360	147	21	is	be	AUX
ap-8360	147	22	1.5	1.5	NUM
ap-8360	147	23	times	time	NOUN
ap-8360	147	24	higher	high	ADJ
ap-8360	147	25	than	than	ADP
ap-8360	147	26	for	for	ADP
ap-8360	147	27	an	an	DET
ap-8360	147	28	angle	angle	NOUN
ap-8360	147	29	of	of	ADP
ap-8360	147	30	17	17	NUM
ap-8360	147	31	°	°	NOUN
ap-8360	147	32	.	.	PUNCT
ap-8360	147	33	4.2	4.2	NUM
ap-8360	147	34	.	.	PUNCT
ap-8360	148	1	ablation	ablation	NOUN
ap-8360	148	2	threshold	threshold	VERB
ap-8360	148	3	the	the	DET
ap-8360	148	4	ablation	ablation	NOUN
ap-8360	148	5	threshold	threshold	NOUN
ap-8360	148	6	measurement	measurement	PROPN
ap-8360	148	7	was	be	AUX
ap-8360	148	8	done	do	VERB
ap-8360	148	9	for	for	ADP
ap-8360	148	10	10	10	NUM
ap-8360	148	11	pulses	pulse	NOUN
ap-8360	148	12	in	in	ADP
ap-8360	148	13	one	one	NUM
ap-8360	148	14	place	place	NOUN
ap-8360	148	15	due	due	ADP
ap-8360	148	16	to	to	ADP
ap-8360	148	17	the	the	DET
ap-8360	148	18	correlation	correlation	NOUN
ap-8360	148	19	with	with	ADP
ap-8360	148	20	the	the	DET
ap-8360	148	21	following	follow	VERB
ap-8360	148	22	experiments	experiment	NOUN
ap-8360	148	23	,	,	PUNCT
ap-8360	148	24	where	where	SCONJ
ap-8360	148	25	an	an	DET
ap-8360	148	26	overlap	overlap	NOUN
ap-8360	148	27	of	of	ADP
ap-8360	148	28	90	90	NUM
ap-8360	148	29	%	%	NOUN
ap-8360	148	30	was	be	AUX
ap-8360	148	31	used	use	VERB
ap-8360	148	32	.	.	PUNCT
ap-8360	149	1	found	find	VERB
ap-8360	149	2	values	value	NOUN
ap-8360	149	3	are	be	AUX
ap-8360	149	4	displayed	display	VERB
ap-8360	149	5	in	in	ADP
ap-8360	149	6	figure	figure	NOUN
ap-8360	149	7	4	4	NUM
ap-8360	149	8	.	.	PUNCT
ap-8360	150	1	the	the	DET
ap-8360	150	2	lowest	low	ADJ
ap-8360	150	3	ablation	ablation	NOUN
ap-8360	150	4	thresholds	threshold	NOUN
ap-8360	150	5	were	be	AUX
ap-8360	150	6	generally	generally	ADV
ap-8360	150	7	found	find	VERB
ap-8360	150	8	for	for	SCONJ
ap-8360	150	9	the	the	DET
ap-8360	150	10	third	third	ADJ
ap-8360	150	11	harmonics	harmonic	NOUN
ap-8360	150	12	used	use	VERB
ap-8360	150	13	.	.	PUNCT
ap-8360	151	1	this	this	DET
ap-8360	151	2	result	result	NOUN
ap-8360	151	3	supports	support	VERB
ap-8360	151	4	the	the	DET
ap-8360	151	5	fact	fact	NOUN
ap-8360	151	6	that	that	SCONJ
ap-8360	151	7	with	with	ADP
ap-8360	151	8	decreasing	decrease	VERB
ap-8360	151	9	wavelength	wavelength	NOUN
ap-8360	151	10	,	,	PUNCT
ap-8360	151	11	photon	photon	VERB
ap-8360	151	12	energy	energy	NOUN
ap-8360	151	13	increases	increase	NOUN
ap-8360	151	14	[	[	X
ap-8360	151	15	27	27	NUM
ap-8360	151	16	]	]	PUNCT
ap-8360	151	17	.	.	PUNCT
ap-8360	152	1	the	the	DET
ap-8360	152	2	threshold	threshold	NOUN
ap-8360	152	3	fluences	fluence	NOUN
ap-8360	152	4	were	be	AUX
ap-8360	152	5	found	find	VERB
ap-8360	152	6	to	to	PART
ap-8360	152	7	be	be	AUX
ap-8360	152	8	39	39	NUM
ap-8360	152	9	t.	t.	NOUN
ap-8360	152	10	primus	primus	PROPN
ap-8360	152	11	,	,	PUNCT
ap-8360	152	12	m.	m.	NOUN
ap-8360	152	13	novák	novák	PROPN
ap-8360	152	14	,	,	PUNCT
ap-8360	152	15	p.	p.	PROPN
ap-8360	152	16	zeman	zeman	PROPN
ap-8360	152	17	,	,	PUNCT
ap-8360	152	18	f.	f.	PROPN
ap-8360	152	19	holešovský	holešovský	PROPN
ap-8360	152	20	acta	acta	PROPN
ap-8360	152	21	polytechnica	polytechnica	PROPN
ap-8360	152	22	0.82	0.82	NUM
ap-8360	152	23	0.62	0.62	NUM
ap-8360	152	24	0.85	0.85	NUM
ap-8360	152	25	1.06	1.06	NUM
ap-8360	152	26	0.74	0.74	NUM
ap-8360	152	27	0.93	0.93	NUM
ap-8360	152	28	0.90	0.90	NUM
ap-8360	152	29	0.91	0.91	NUM
ap-8360	152	30	0.95	0.95	NUM
ap-8360	152	31	0.00	0.00	NUM
ap-8360	152	32	0.20	0.20	NUM
ap-8360	152	33	0.40	0.40	NUM
ap-8360	152	34	0.60	0.60	NUM
ap-8360	152	35	0.80	0.80	NUM
ap-8360	152	36	1.00	1.00	NUM
ap-8360	152	37	1.20	1.20	NUM
ap-8360	152	38	1.40	1.40	NUM
ap-8360	152	39	0	0	NUM
ap-8360	152	40	20	20	NUM
ap-8360	152	41	40	40	NUM
ap-8360	152	42	60	60	NUM
ap-8360	152	43	80	80	NUM
ap-8360	152	44	100	100	NUM
ap-8360	152	45	s	s	NOUN
ap-8360	152	46	a	a	DET
ap-8360	152	47	(	(	PUNCT
ap-8360	152	48	µ	µ	X
ap-8360	152	49	m	m	NOUN
ap-8360	152	50	)	)	PUNCT
ap-8360	152	51	hatching	hatch	VERB
ap-8360	152	52	angle	angle	NOUN
ap-8360	152	53	ϕ	ϕ	PROPN
ap-8360	152	54	(	(	PUNCT
ap-8360	152	55	°	°	PRON
ap-8360	152	56	)	)	PUNCT
ap-8360	152	57	figure	figure	NOUN
ap-8360	152	58	3	3	NUM
ap-8360	152	59	.	.	PUNCT
ap-8360	153	1	the	the	DET
ap-8360	153	2	effect	effect	NOUN
ap-8360	153	3	of	of	ADP
ap-8360	153	4	the	the	DET
ap-8360	153	5	hatching	hatch	VERB
ap-8360	153	6	angle	angle	NOUN
ap-8360	153	7	on	on	ADP
ap-8360	153	8	surface	surface	NOUN
ap-8360	153	9	roughness	roughness	NOUN
ap-8360	153	10	expressed	express	VERB
ap-8360	153	11	by	by	ADP
ap-8360	153	12	sa	sa	PROPN
ap-8360	153	13	[	[	X
ap-8360	153	14	µm	µm	ADP
ap-8360	153	15	]	]	PUNCT
ap-8360	153	16	.	.	PUNCT
ap-8360	154	1	figure	figure	NOUN
ap-8360	154	2	4	4	NUM
ap-8360	154	3	.	.	PUNCT
ap-8360	155	1	the	the	DET
ap-8360	155	2	values	value	NOUN
ap-8360	155	3	of	of	ADP
ap-8360	155	4	ablation	ablation	NOUN
ap-8360	155	5	threshold	threshold	NOUN
ap-8360	155	6	for	for	ADP
ap-8360	155	7	tested	test	VERB
ap-8360	155	8	materials	material	NOUN
ap-8360	155	9	and	and	CCONJ
ap-8360	155	10	wavelengths	wavelength	NOUN
ap-8360	155	11	.	.	PUNCT
ap-8360	156	1	similar	similar	ADJ
ap-8360	156	2	for	for	ADP
ap-8360	156	3	all	all	DET
ap-8360	156	4	the	the	DET
ap-8360	156	5	materials	material	NOUN
ap-8360	156	6	except	except	SCONJ
ap-8360	156	7	for	for	ADP
ap-8360	156	8	ti6al4v	ti6al4v	PRON
ap-8360	156	9	with	with	ADP
ap-8360	156	10	the	the	DET
ap-8360	156	11	first	first	ADJ
ap-8360	156	12	harmonic	harmonic	NOUN
ap-8360	156	13	,	,	PUNCT
ap-8360	156	14	where	where	SCONJ
ap-8360	156	15	the	the	DET
ap-8360	156	16	highest	high	ADJ
ap-8360	156	17	threshold	threshold	NOUN
ap-8360	156	18	value	value	NOUN
ap-8360	156	19	of	of	ADP
ap-8360	156	20	all	all	DET
ap-8360	156	21	the	the	DET
ap-8360	156	22	materials	material	NOUN
ap-8360	156	23	was	be	AUX
ap-8360	156	24	measured	measure	VERB
ap-8360	156	25	.	.	PUNCT
ap-8360	157	1	obtained	obtain	VERB
ap-8360	157	2	values	value	NOUN
ap-8360	157	3	were	be	AUX
ap-8360	157	4	compared	compare	VERB
ap-8360	157	5	with	with	ADP
ap-8360	157	6	the	the	DET
ap-8360	157	7	values	value	NOUN
ap-8360	157	8	found	find	VERB
ap-8360	157	9	in	in	ADP
ap-8360	157	10	the	the	DET
ap-8360	157	11	literature	literature	NOUN
ap-8360	157	12	;	;	PUNCT
ap-8360	157	13	see	see	VERB
ap-8360	157	14	table	table	NOUN
ap-8360	157	15	8	8	NUM
ap-8360	157	16	.	.	PUNCT
ap-8360	158	1	mostly	mostly	ADV
ap-8360	158	2	the	the	DET
ap-8360	158	3	fth	fth	NOUN
ap-8360	158	4	for	for	ADP
ap-8360	158	5	n=1	n=1	PUNCT
ap-8360	158	6	or	or	CCONJ
ap-8360	158	7	n=100	n=100	NUM
ap-8360	158	8	pulses	pulse	NOUN
ap-8360	158	9	can	can	AUX
ap-8360	158	10	be	be	AUX
ap-8360	158	11	found	find	VERB
ap-8360	158	12	.	.	PUNCT
ap-8360	159	1	similarities	similarity	NOUN
ap-8360	159	2	between	between	ADP
ap-8360	159	3	measured	measured	ADJ
ap-8360	159	4	and	and	CCONJ
ap-8360	159	5	literature	literature	NOUN
ap-8360	159	6	values	value	NOUN
ap-8360	159	7	can	can	AUX
ap-8360	159	8	be	be	AUX
ap-8360	159	9	seen	see	VERB
ap-8360	159	10	for	for	ADP
ap-8360	159	11	fth	fth	NOUN
ap-8360	159	12	(	(	PUNCT
ap-8360	159	13	100	100	NUM
ap-8360	159	14	)	)	PUNCT
ap-8360	159	15	.	.	PUNCT
ap-8360	160	1	the	the	DET
ap-8360	160	2	threshold	threshold	NOUN
ap-8360	160	3	for	for	ADP
ap-8360	160	4	one	one	NUM
ap-8360	160	5	pulse	pulse	NOUN
ap-8360	160	6	ablation	ablation	NOUN
ap-8360	160	7	is	be	AUX
ap-8360	160	8	usually	usually	ADV
ap-8360	160	9	much	much	ADV
ap-8360	160	10	higher	high	ADJ
ap-8360	160	11	than	than	ADP
ap-8360	160	12	for	for	ADP
ap-8360	160	13	higher	high	ADJ
ap-8360	160	14	pulse	pulse	NOUN
ap-8360	160	15	counts	count	NOUN
ap-8360	160	16	.	.	PUNCT
ap-8360	161	1	the	the	DET
ap-8360	161	2	literature	literature	PROPN
ap-8360	161	3	review	review	PROPN
ap-8360	161	4	also	also	ADV
ap-8360	161	5	confirmed	confirm	VERB
ap-8360	161	6	that	that	SCONJ
ap-8360	161	7	,	,	PUNCT
ap-8360	161	8	for	for	ADP
ap-8360	161	9	the	the	DET
ap-8360	161	10	first	first	ADJ
ap-8360	161	11	harmonic	harmonic	NOUN
ap-8360	161	12	used	use	VERB
ap-8360	161	13	,	,	PUNCT
ap-8360	161	14	titanium	titanium	NOUN
ap-8360	161	15	alloy	alloy	NOUN
ap-8360	161	16	should	should	AUX
ap-8360	161	17	have	have	VERB
ap-8360	161	18	the	the	DET
ap-8360	161	19	highest	high	ADJ
ap-8360	161	20	fth	fth	NOUN
ap-8360	161	21	of	of	ADP
ap-8360	161	22	the	the	DET
ap-8360	161	23	studied	study	VERB
ap-8360	161	24	materials	material	NOUN
ap-8360	161	25	.	.	PUNCT
ap-8360	162	1	4.3	4.3	NUM
ap-8360	162	2	.	.	PUNCT
ap-8360	163	1	removal	removal	NOUN
ap-8360	163	2	efficiency	efficiency	NOUN
ap-8360	163	3	using	use	VERB
ap-8360	163	4	the	the	DET
ap-8360	163	5	ablation	ablation	NOUN
ap-8360	163	6	threshold	threshold	NOUN
ap-8360	163	7	values	value	NOUN
ap-8360	163	8	,	,	PUNCT
ap-8360	163	9	the	the	DET
ap-8360	163	10	removal	removal	NOUN
ap-8360	163	11	rate	rate	NOUN
ap-8360	163	12	dependences	dependence	NOUN
ap-8360	163	13	were	be	AUX
ap-8360	163	14	plotted	plot	VERB
ap-8360	163	15	(	(	PUNCT
ap-8360	163	16	figure	figure	NOUN
ap-8360	163	17	5	5	NUM
ap-8360	163	18	)	)	PUNCT
ap-8360	163	19	.	.	PUNCT
ap-8360	164	1	a	a	DET
ap-8360	164	2	logarithmic	logarithmic	ADJ
ap-8360	164	3	x	x	NOUN
ap-8360	164	4	-	-	NOUN
ap-8360	164	5	axis	axis	NOUN
ap-8360	164	6	with	with	ADP
ap-8360	164	7	f	f	PROPN
ap-8360	164	8	/	/	SYM
ap-8360	164	9	fth	fth	NOUN
ap-8360	164	10	ratio	ratio	NOUN
ap-8360	164	11	was	be	AUX
ap-8360	164	12	used	use	VERB
ap-8360	164	13	for	for	ADP
ap-8360	164	14	a	a	DET
ap-8360	164	15	better	well	ADJ
ap-8360	164	16	data	datum	NOUN
ap-8360	164	17	reproduction	reproduction	NOUN
ap-8360	164	18	.	.	PUNCT
ap-8360	165	1	all	all	DET
ap-8360	165	2	plot	plot	NOUN
ap-8360	165	3	dependences	dependence	NOUN
ap-8360	165	4	had	have	VERB
ap-8360	165	5	similar	similar	ADJ
ap-8360	165	6	behaviour	behaviour	NOUN
ap-8360	165	7	,	,	PUNCT
ap-8360	165	8	reported	report	VERB
ap-8360	165	9	by	by	ADP
ap-8360	165	10	[	[	X
ap-8360	165	11	6	6	NUM
ap-8360	165	12	]	]	PUNCT
ap-8360	165	13	,	,	PUNCT
ap-8360	165	14	reaching	reach	VERB
ap-8360	165	15	a	a	DET
ap-8360	165	16	maximum	maximum	NOUN
ap-8360	165	17	for	for	ADP
ap-8360	165	18	e2	e2	PROPN
ap-8360	165	19	×	×	PROPN
ap-8360	165	20	fth	fth	NOUN
ap-8360	165	21	,	,	PUNCT
ap-8360	165	22	then	then	ADV
ap-8360	165	23	decreasing	decrease	VERB
ap-8360	165	24	and	and	CCONJ
ap-8360	165	25	staying	stay	VERB
ap-8360	165	26	constant	constant	ADJ
ap-8360	165	27	for	for	ADP
ap-8360	165	28	a	a	DET
ap-8360	165	29	higher	high	ADJ
ap-8360	165	30	f	f	NOUN
ap-8360	165	31	/	/	SYM
ap-8360	165	32	fth	fth	NOUN
ap-8360	165	33	ratio	ratio	NOUN
ap-8360	165	34	.	.	PUNCT
ap-8360	166	1	the	the	DET
ap-8360	166	2	highest	high	ADJ
ap-8360	166	3	removal	removal	NOUN
ap-8360	166	4	rates	rate	NOUN
ap-8360	166	5	were	be	AUX
ap-8360	166	6	found	find	VERB
ap-8360	166	7	for	for	ADP
ap-8360	166	8	ti6al4v	ti6al4v	X
ap-8360	166	9	titanium	titanium	NOUN
ap-8360	166	10	alloy	alloy	NOUN
ap-8360	166	11	for	for	ADP
ap-8360	166	12	all	all	DET
ap-8360	166	13	three	three	NUM
ap-8360	166	14	harmonics	harmonic	NOUN
ap-8360	166	15	,	,	PUNCT
ap-8360	166	16	especially	especially	ADV
ap-8360	166	17	for	for	ADP
ap-8360	166	18	ih	ih	PROPN
ap-8360	166	19	(	(	PUNCT
ap-8360	166	20	figure	figure	NOUN
ap-8360	166	21	5a	5a	NUM
ap-8360	166	22	)	)	PUNCT
ap-8360	166	23	where	where	SCONJ
ap-8360	166	24	the	the	DET
ap-8360	166	25	removal	removal	NOUN
ap-8360	166	26	rates	rate	NOUN
ap-8360	166	27	reached	reach	VERB
ap-8360	166	28	δv	δv	PROPN
ap-8360	166	29	/	/	SYM
ap-8360	166	30	pavg	pavg	NOUN
ap-8360	166	31	=	=	NOUN
ap-8360	166	32	0.3	0.3	NUM
ap-8360	166	33	mm3	mm3	PROPN
ap-8360	166	34	/	/	SYM
ap-8360	166	35	min	min	PROPN
ap-8360	166	36	/	/	SYM
ap-8360	166	37	w.	w.	PROPN
ap-8360	166	38	a	a	DET
ap-8360	166	39	possible	possible	ADJ
ap-8360	166	40	explanation	explanation	NOUN
ap-8360	166	41	of	of	ADP
ap-8360	166	42	this	this	DET
ap-8360	166	43	fact	fact	NOUN
ap-8360	166	44	may	may	AUX
ap-8360	166	45	be	be	AUX
ap-8360	166	46	related	relate	VERB
ap-8360	166	47	to	to	ADP
ap-8360	166	48	the	the	DET
ap-8360	166	49	material	material	NOUN
ap-8360	166	50	’s	’s	PART
ap-8360	166	51	thermal	thermal	ADJ
ap-8360	166	52	properties	property	NOUN
ap-8360	166	53	.	.	PUNCT
ap-8360	167	1	ti6al4v	ti6al4v	ADP
ap-8360	167	2	titanium	titanium	NOUN
ap-8360	167	3	alloy	alloy	NOUN
ap-8360	167	4	had	have	VERB
ap-8360	167	5	the	the	DET
ap-8360	167	6	lowest	low	ADJ
ap-8360	167	7	thermal	thermal	ADJ
ap-8360	167	8	(	(	PUNCT
ap-8360	167	9	a	a	NOUN
ap-8360	167	10	)	)	PUNCT
ap-8360	167	11	.	.	PUNCT
ap-8360	168	1	ih	ih	PROPN
ap-8360	168	2	(	(	PUNCT
ap-8360	168	3	1030	1030	NUM
ap-8360	168	4	nm	nm	NOUN
ap-8360	168	5	)	)	PUNCT
ap-8360	168	6	(	(	PUNCT
ap-8360	168	7	b	b	NOUN
ap-8360	168	8	)	)	PUNCT
ap-8360	168	9	.	.	PUNCT
ap-8360	169	1	iih	iih	PROPN
ap-8360	169	2	(	(	PUNCT
ap-8360	169	3	515	515	NUM
ap-8360	169	4	nm	nm	NOUN
ap-8360	169	5	)	)	PUNCT
ap-8360	169	6	(	(	PUNCT
ap-8360	169	7	c	c	NOUN
ap-8360	169	8	)	)	PUNCT
ap-8360	169	9	.	.	PUNCT
ap-8360	170	1	iiih	iiih	NOUN
ap-8360	170	2	(	(	PUNCT
ap-8360	170	3	343	343	NUM
ap-8360	170	4	nm	nm	NOUN
ap-8360	170	5	)	)	PUNCT
ap-8360	170	6	figure	figure	NOUN
ap-8360	170	7	5	5	NUM
ap-8360	170	8	.	.	PUNCT
ap-8360	171	1	the	the	DET
ap-8360	171	2	removal	removal	NOUN
ap-8360	171	3	rates	rate	NOUN
ap-8360	171	4	for	for	ADP
ap-8360	171	5	tested	test	VERB
ap-8360	171	6	materials	material	NOUN
ap-8360	171	7	and	and	CCONJ
ap-8360	171	8	three	three	NUM
ap-8360	171	9	harmonic	harmonic	ADJ
ap-8360	171	10	wavelengths	wavelength	NOUN
ap-8360	171	11	.	.	PUNCT
ap-8360	172	1	conductivity	conductivity	NOUN
ap-8360	172	2	(	(	PUNCT
ap-8360	172	3	6.7–7.3	6.7–7.3	NOUN
ap-8360	172	4	w	w	X
ap-8360	172	5	/	/	SYM
ap-8360	172	6	m	m	PROPN
ap-8360	172	7	k−1	k−1	PROPN
ap-8360	172	8	)	)	PUNCT
ap-8360	172	9	of	of	ADP
ap-8360	172	10	the	the	DET
ap-8360	172	11	tested	test	VERB
ap-8360	172	12	materials	material	NOUN
ap-8360	172	13	.	.	PUNCT
ap-8360	173	1	the	the	DET
ap-8360	173	2	thermal	thermal	ADJ
ap-8360	173	3	conductivity	conductivity	NOUN
ap-8360	173	4	coefficient	coefficient	NOUN
ap-8360	173	5	describes	describe	VERB
ap-8360	173	6	the	the	DET
ap-8360	173	7	ability	ability	NOUN
ap-8360	173	8	of	of	ADP
ap-8360	173	9	a	a	DET
ap-8360	173	10	material	material	NOUN
ap-8360	173	11	to	to	PART
ap-8360	173	12	transfer	transfer	VERB
ap-8360	173	13	or	or	CCONJ
ap-8360	173	14	conduct	conduct	VERB
ap-8360	173	15	heat	heat	NOUN
ap-8360	173	16	[	[	X
ap-8360	173	17	32	32	NUM
ap-8360	173	18	]	]	PUNCT
ap-8360	173	19	.	.	PUNCT
ap-8360	174	1	while	while	SCONJ
ap-8360	174	2	,	,	PUNCT
ap-8360	174	3	the	the	DET
ap-8360	174	4	lowest	low	ADJ
ap-8360	174	5	removal	removal	NOUN
ap-8360	174	6	rates	rate	NOUN
ap-8360	174	7	were	be	AUX
ap-8360	174	8	found	find	VERB
ap-8360	174	9	for	for	ADP
ap-8360	174	10	tool	tool	NOUN
ap-8360	174	11	steel	steel	NOUN
ap-8360	174	12	,	,	PUNCT
ap-8360	174	13	especially	especially	ADV
ap-8360	174	14	for	for	ADP
ap-8360	174	15	the	the	DET
ap-8360	174	16	optimal	optimal	ADJ
ap-8360	174	17	f	f	PROPN
ap-8360	174	18	/	/	SYM
ap-8360	174	19	fth	fth	NOUN
ap-8360	174	20	ratio	ratio	NOUN
ap-8360	174	21	.	.	PUNCT
ap-8360	175	1	the	the	DET
ap-8360	175	2	thermal	thermal	ADJ
ap-8360	175	3	conductivity	conductivity	NOUN
ap-8360	175	4	of	of	ADP
ap-8360	175	5	tool	tool	NOUN
ap-8360	175	6	steel	steel	NOUN
ap-8360	175	7	is	be	AUX
ap-8360	175	8	the	the	DET
ap-8360	175	9	highest	high	ADJ
ap-8360	175	10	of	of	ADP
ap-8360	175	11	all	all	DET
ap-8360	175	12	the	the	DET
ap-8360	175	13	tested	test	VERB
ap-8360	175	14	materials	material	NOUN
ap-8360	175	15	.	.	PUNCT
ap-8360	176	1	the	the	DET
ap-8360	176	2	relationship	relationship	NOUN
ap-8360	176	3	between	between	ADP
ap-8360	176	4	thermal	thermal	ADJ
ap-8360	176	5	conductivity	conductivity	NOUN
ap-8360	176	6	and	and	CCONJ
ap-8360	176	7	the	the	DET
ap-8360	176	8	removal	removal	NOUN
ap-8360	176	9	rates	rate	NOUN
ap-8360	176	10	is	be	AUX
ap-8360	176	11	obvious	obvious	ADJ
ap-8360	176	12	.	.	PUNCT
ap-8360	177	1	even	even	ADV
ap-8360	177	2	though	though	SCONJ
ap-8360	177	3	femtosecond	femtosecond	NOUN
ap-8360	177	4	laser	laser	NOUN
ap-8360	177	5	irradiation	irradiation	NOUN
ap-8360	177	6	is	be	AUX
ap-8360	177	7	a	a	DET
ap-8360	177	8	cold	cold	ADJ
ap-8360	177	9	ablation	ablation	NOUN
ap-8360	177	10	process	process	NOUN
ap-8360	177	11	,	,	PUNCT
ap-8360	177	12	some	some	DET
ap-8360	177	13	heat	heat	NOUN
ap-8360	177	14	is	be	AUX
ap-8360	177	15	produced	produce	VERB
ap-8360	177	16	,	,	PUNCT
ap-8360	177	17	especially	especially	ADV
ap-8360	177	18	for	for	ADP
ap-8360	177	19	fluences	fluence	NOUN
ap-8360	177	20	higher	high	ADJ
ap-8360	177	21	than	than	ADP
ap-8360	177	22	the	the	DET
ap-8360	177	23	ablation	ablation	NOUN
ap-8360	177	24	threshold	threshold	NOUN
ap-8360	177	25	.	.	PUNCT
ap-8360	178	1	the	the	DET
ap-8360	178	2	produced	produce	VERB
ap-8360	178	3	heat	heat	NOUN
ap-8360	178	4	is	be	AUX
ap-8360	178	5	transferred	transfer	VERB
ap-8360	178	6	to	to	ADP
ap-8360	178	7	the	the	DET
ap-8360	178	8	lattice	lattice	NOUN
ap-8360	178	9	.	.	PUNCT
ap-8360	179	1	therefore	therefore	ADV
ap-8360	179	2	,	,	PUNCT
ap-8360	179	3	for	for	ADP
ap-8360	179	4	the	the	DET
ap-8360	179	5	high	high	ADJ
ap-8360	179	6	thermal	thermal	ADJ
ap-8360	179	7	conductivity	conductivity	NOUN
ap-8360	179	8	coefficient	coefficient	NOUN
ap-8360	179	9	,	,	PUNCT
ap-8360	179	10	a	a	DET
ap-8360	179	11	large	large	ADJ
ap-8360	179	12	amount	amount	NOUN
ap-8360	179	13	of	of	ADP
ap-8360	179	14	heat	heat	NOUN
ap-8360	179	15	is	be	AUX
ap-8360	179	16	transferred	transfer	VERB
ap-8360	179	17	to	to	ADP
ap-8360	179	18	the	the	DET
ap-8360	179	19	lattice	lattice	NOUN
ap-8360	179	20	,	,	PUNCT
ap-8360	179	21	meaning	mean	VERB
ap-8360	179	22	40	40	NUM
ap-8360	179	23	vol	vol	NOUN
ap-8360	179	24	.	.	PUNCT
ap-8360	180	1	63	63	NUM
ap-8360	181	1	no	no	NOUN
ap-8360	181	2	.	.	PUNCT
ap-8360	182	1	1/2023	1/2023	NUM
ap-8360	182	2	femtosecond	femtosecond	NOUN
ap-8360	182	3	laser	laser	NOUN
ap-8360	182	4	processing	processing	NOUN
ap-8360	182	5	of	of	ADP
ap-8360	182	6	advanced	advanced	ADJ
ap-8360	182	7	technical	technical	ADJ
ap-8360	182	8	materials	material	NOUN
ap-8360	182	9	material	material	NOUN
ap-8360	182	10	laser	laser	NOUN
ap-8360	182	11	wavelength	wavelength	NOUN
ap-8360	182	12	fth	fth	NOUN
ap-8360	182	13	(	(	PUNCT
ap-8360	182	14	1	1	NUM
ap-8360	182	15	)	)	PUNCT
ap-8360	182	16	fth	fth	NOUN
ap-8360	182	17	(	(	PUNCT
ap-8360	182	18	100	100	NUM
ap-8360	182	19	)	)	PUNCT
ap-8360	182	20	ref	ref	NOUN
ap-8360	182	21	.	.	PUNCT
ap-8360	183	1	pulse	pulse	NOUN
ap-8360	183	2	duration	duration	NOUN
ap-8360	183	3	[	[	X
ap-8360	183	4	j	j	X
ap-8360	183	5	/	/	SYM
ap-8360	183	6	cm2	cm2	NOUN
ap-8360	183	7	]	]	X
ap-8360	184	1	[	[	X
ap-8360	184	2	j	j	X
ap-8360	184	3	/	/	SYM
ap-8360	184	4	cm2	cm2	PROPN
ap-8360	184	5	]	]	PUNCT
ap-8360	184	6	ti6al4v	ti6al4v	ADP
ap-8360	184	7	800	800	NUM
ap-8360	184	8	nm	nm	NOUN
ap-8360	184	9	,	,	PUNCT
ap-8360	184	10	30	30	NUM
ap-8360	184	11	fs	fs	ADP
ap-8360	184	12	0.29	0.29	NUM
ap-8360	184	13	[	[	X
ap-8360	184	14	9	9	NUM
ap-8360	184	15	]	]	PUNCT
ap-8360	184	16	ti6al4v	ti6al4v	PUNCT
ap-8360	184	17	790	790	NUM
ap-8360	184	18	nm	nm	NOUN
ap-8360	184	19	,	,	PUNCT
ap-8360	184	20	130	130	NUM
ap-8360	184	21	fs	fs	ADP
ap-8360	184	22	0.272	0.272	NUM
ap-8360	184	23	0.142	0.142	NUM
ap-8360	184	24	[	[	X
ap-8360	184	25	28	28	NUM
ap-8360	184	26	]	]	X
ap-8360	184	27	pure	pure	ADJ
ap-8360	184	28	ti	ti	PROPN
ap-8360	184	29	775	775	NUM
ap-8360	184	30	nm	nm	NOUN
ap-8360	184	31	,	,	PUNCT
ap-8360	184	32	150	150	NUM
ap-8360	184	33	fs	fs	ADP
ap-8360	184	34	0.28	0.28	NUM
ap-8360	184	35	0.08/1.41	0.08/1.41	NUM
ap-8360	185	1	[	[	X
ap-8360	185	2	8	8	NUM
ap-8360	185	3	]	]	X
ap-8360	185	4	aisi	aisi	PROPN
ap-8360	185	5	316l	316l	PROPN
ap-8360	185	6	800	800	NUM
ap-8360	185	7	nm	nm	NOUN
ap-8360	185	8	,	,	PUNCT
ap-8360	185	9	260	260	NUM
ap-8360	185	10	fs	fs	ADP
ap-8360	185	11	0.21	0.21	NUM
ap-8360	185	12	[	[	X
ap-8360	185	13	9	9	NUM
ap-8360	185	14	]	]	X
ap-8360	185	15	aisi	aisi	PROPN
ap-8360	185	16	304	304	NUM
ap-8360	185	17	800	800	NUM
ap-8360	185	18	nm	nm	NOUN
ap-8360	185	19	,	,	PUNCT
ap-8360	185	20	260	260	NUM
ap-8360	185	21	fs	fs	ADP
ap-8360	185	22	0.24	0.24	NUM
ap-8360	185	23	[	[	X
ap-8360	185	24	15	15	NUM
ap-8360	185	25	]	]	X
ap-8360	185	26	aisi	aisi	PROPN
ap-8360	185	27	316	316	NUM
ap-8360	185	28	775	775	NUM
ap-8360	185	29	nm	nm	NOUN
ap-8360	185	30	,	,	PUNCT
ap-8360	185	31	150	150	NUM
ap-8360	185	32	fs	fs	ADP
ap-8360	185	33	0.21	0.21	NUM
ap-8360	185	34	0.13	0.13	NUM
ap-8360	185	35	[	[	X
ap-8360	185	36	8	8	NUM
ap-8360	185	37	]	]	PUNCT
ap-8360	185	38	aisi	aisi	PROPN
ap-8360	185	39	304	304	NUM
ap-8360	185	40	1064	1064	NUM
ap-8360	185	41	nm	nm	PROPN
ap-8360	185	42	,	,	PUNCT
ap-8360	185	43	10	10	NUM
ap-8360	185	44	ps	ps	NOUN
ap-8360	185	45	0.5	0.5	NUM
ap-8360	185	46	0.1	0.1	NUM
ap-8360	185	47	[	[	X
ap-8360	185	48	29	29	NUM
ap-8360	185	49	]	]	X
ap-8360	185	50	aisi	aisi	PROPN
ap-8360	185	51	316	316	NUM
ap-8360	185	52	1030	1030	NUM
ap-8360	185	53	nm	nm	ADV
ap-8360	185	54	170	170	NUM
ap-8360	185	55	fs	fs	ADP
ap-8360	185	56	0.15	0.15	NUM
ap-8360	185	57	0.135	0.135	NUM
ap-8360	185	58	(	(	PUNCT
ap-8360	185	59	50	50	NUM
ap-8360	185	60	p	p	NOUN
ap-8360	185	61	)	)	PUNCT
ap-8360	186	1	[	[	X
ap-8360	186	2	14	14	NUM
ap-8360	186	3	]	]	X
ap-8360	186	4	aisi	aisi	PROPN
ap-8360	186	5	316	316	NUM
ap-8360	186	6	1030	1030	NUM
ap-8360	186	7	nm	nm	NOUN
ap-8360	186	8	,	,	PUNCT
ap-8360	186	9	515	515	NUM
ap-8360	186	10	nm	nm	NOUN
ap-8360	186	11	,	,	PUNCT
ap-8360	186	12	10	10	NUM
ap-8360	186	13	ps	ps	NOUN
ap-8360	186	14	0.26	0.26	NUM
ap-8360	186	15	(	(	PUNCT
ap-8360	186	16	1030	1030	NUM
ap-8360	186	17	)	)	PUNCT
ap-8360	186	18	,	,	PUNCT
ap-8360	186	19	0.15	0.15	NUM
ap-8360	186	20	(	(	PUNCT
ap-8360	186	21	515	515	NUM
ap-8360	186	22	nm	nm	NOUN
ap-8360	186	23	)	)	PUNCT
ap-8360	187	1	[	[	X
ap-8360	187	2	5	5	NUM
ap-8360	187	3	]	]	X
ap-8360	187	4	aisi	aisi	PROPN
ap-8360	187	5	304l	304l	PROPN
ap-8360	187	6	800	800	NUM
ap-8360	187	7	nm	nm	NOUN
ap-8360	187	8	,	,	PUNCT
ap-8360	187	9	100	100	NUM
ap-8360	187	10	fs-4,5	fs-4,5	NOUN
ap-8360	187	11	ps	ps	VERB
ap-8360	187	12	0.02	0.02	NUM
ap-8360	187	13	-	-	NUM
ap-8360	187	14	0.05	0.05	NUM
ap-8360	187	15	[	[	NOUN
ap-8360	187	16	30	30	NUM
ap-8360	187	17	]	]	X
ap-8360	187	18	aisi	aisi	PROPN
ap-8360	187	19	304	304	NUM
ap-8360	187	20	775	775	NUM
ap-8360	187	21	nm	nm	NOUN
ap-8360	187	22	,	,	PUNCT
ap-8360	187	23	150	150	NUM
ap-8360	187	24	fs	fs	ADP
ap-8360	187	25	0.16	0.16	NUM
ap-8360	187	26	[	[	X
ap-8360	187	27	19	19	NUM
ap-8360	187	28	]	]	PUNCT
ap-8360	187	29	hr4	hr4	PROPN
ap-8360	187	30	nickel	nickel	NOUN
ap-8360	187	31	alloy	alloy	NOUN
ap-8360	187	32	,	,	PUNCT
ap-8360	187	33	alloy	alloy	VERB
ap-8360	187	34	115	115	NUM
ap-8360	187	35	800	800	NUM
ap-8360	187	36	nm	nm	NOUN
ap-8360	187	37	,	,	PUNCT
ap-8360	187	38	100	100	NUM
ap-8360	187	39	s	s	VERB
ap-8360	187	40	0.377	0.377	NUM
ap-8360	187	41	0.152	0.152	NUM
ap-8360	187	42	[	[	X
ap-8360	187	43	31	31	NUM
ap-8360	187	44	]	]	PUNCT
ap-8360	187	45	table	table	NOUN
ap-8360	187	46	8	8	NUM
ap-8360	187	47	.	.	PUNCT
ap-8360	188	1	literature	literature	NOUN
ap-8360	188	2	review	review	NOUN
ap-8360	188	3	of	of	ADP
ap-8360	188	4	the	the	DET
ap-8360	188	5	fluence	fluence	NOUN
ap-8360	188	6	threshold	threshold	NOUN
ap-8360	188	7	values	value	NOUN
ap-8360	188	8	fth(1	fth(1	VERB
ap-8360	188	9	)	)	PUNCT
ap-8360	188	10	and	and	CCONJ
ap-8360	188	11	fth(100	fth(100	PROPN
ap-8360	188	12	)	)	PUNCT
ap-8360	188	13	.	.	PUNCT
ap-8360	189	1	(	(	PUNCT
ap-8360	189	2	a	a	NOUN
ap-8360	189	3	)	)	PUNCT
ap-8360	189	4	.	.	PUNCT
ap-8360	190	1	(	(	PUNCT
ap-8360	190	2	b	b	NOUN
ap-8360	190	3	)	)	PUNCT
ap-8360	190	4	.	.	PUNCT
ap-8360	191	1	(	(	PUNCT
ap-8360	191	2	c	c	NOUN
ap-8360	191	3	)	)	PUNCT
ap-8360	191	4	.	.	PUNCT
ap-8360	192	1	(	(	PUNCT
ap-8360	192	2	d	d	NOUN
ap-8360	192	3	)	)	PUNCT
ap-8360	192	4	.	.	PUNCT
ap-8360	193	1	figure	figure	VERB
ap-8360	193	2	6	6	NUM
ap-8360	193	3	.	.	PUNCT
ap-8360	193	4	volume	volume	NOUN
ap-8360	193	5	ablation	ablation	NOUN
ap-8360	193	6	rate	rate	NOUN
ap-8360	193	7	and	and	CCONJ
ap-8360	193	8	surface	surface	NOUN
ap-8360	193	9	roughness	roughness	NOUN
ap-8360	193	10	(	(	PUNCT
ap-8360	193	11	sa	sa	NOUN
ap-8360	193	12	)	)	PUNCT
ap-8360	193	13	dependency	dependency	NOUN
ap-8360	193	14	on	on	ADP
ap-8360	193	15	the	the	DET
ap-8360	193	16	laser	laser	NOUN
ap-8360	193	17	fluence	fluence	NOUN
ap-8360	193	18	.	.	PUNCT
ap-8360	194	1	a	a	DET
ap-8360	194	2	low	low	ADJ
ap-8360	194	3	amount	amount	NOUN
ap-8360	194	4	of	of	ADP
ap-8360	194	5	heat	heat	NOUN
ap-8360	194	6	to	to	PART
ap-8360	194	7	melt	melt	VERB
ap-8360	194	8	and	and	CCONJ
ap-8360	194	9	ablate	ablate	VERB
ap-8360	194	10	the	the	DET
ap-8360	194	11	material	material	NOUN
ap-8360	194	12	.	.	PUNCT
ap-8360	195	1	as	as	ADP
ap-8360	195	2	a	a	DET
ap-8360	195	3	result	result	NOUN
ap-8360	195	4	,	,	PUNCT
ap-8360	195	5	materials	material	NOUN
ap-8360	195	6	with	with	ADP
ap-8360	195	7	high	high	ADJ
ap-8360	195	8	thermal	thermal	ADJ
ap-8360	195	9	conductivity	conductivity	NOUN
ap-8360	195	10	are	be	AUX
ap-8360	195	11	more	more	ADV
ap-8360	195	12	difficult	difficult	ADJ
ap-8360	195	13	to	to	PART
ap-8360	195	14	ablate	ablate	VERB
ap-8360	195	15	by	by	ADP
ap-8360	195	16	laser	laser	NOUN
ap-8360	195	17	.	.	PUNCT
ap-8360	196	1	however	however	ADV
ap-8360	196	2	,	,	PUNCT
ap-8360	196	3	very	very	ADV
ap-8360	196	4	minor	minor	ADJ
ap-8360	196	5	differences	difference	NOUN
ap-8360	196	6	in	in	ADP
ap-8360	196	7	removal	removal	NOUN
ap-8360	196	8	rates	rate	NOUN
ap-8360	196	9	were	be	AUX
ap-8360	196	10	found	find	VERB
ap-8360	196	11	for	for	ADP
ap-8360	196	12	iiih	iiih	NOUN
ap-8360	196	13	(	(	PUNCT
ap-8360	196	14	figure	figure	NOUN
ap-8360	196	15	5c	5c	NUM
ap-8360	196	16	)	)	PUNCT
ap-8360	196	17	.	.	PUNCT
ap-8360	197	1	as	as	SCONJ
ap-8360	197	2	reported	report	VERB
ap-8360	197	3	by	by	ADP
ap-8360	197	4	[	[	X
ap-8360	197	5	18	18	NUM
ap-8360	197	6	]	]	PUNCT
ap-8360	197	7	,	,	PUNCT
ap-8360	197	8	material	material	NOUN
ap-8360	197	9	absorptivity	absorptivity	NOUN
ap-8360	197	10	,	,	PUNCT
ap-8360	197	11	especially	especially	ADV
ap-8360	197	12	for	for	ADP
ap-8360	197	13	metals	metal	NOUN
ap-8360	197	14	,	,	PUNCT
ap-8360	197	15	increases	increase	NOUN
ap-8360	197	16	with	with	ADP
ap-8360	197	17	shorter	short	ADJ
ap-8360	197	18	wavelengths	wavelength	NOUN
ap-8360	197	19	.	.	PUNCT
ap-8360	198	1	in	in	ADP
ap-8360	198	2	addition	addition	NOUN
ap-8360	198	3	,	,	PUNCT
ap-8360	198	4	at	at	ADP
ap-8360	198	5	shorter	short	ADJ
ap-8360	198	6	wavelengths	wavelength	NOUN
ap-8360	198	7	,	,	PUNCT
ap-8360	198	8	the	the	DET
ap-8360	198	9	laser	laser	NOUN
ap-8360	198	10	energy	energy	NOUN
ap-8360	198	11	is	be	AUX
ap-8360	198	12	absorbed	absorb	VERB
ap-8360	198	13	in	in	ADP
ap-8360	198	14	a	a	DET
ap-8360	198	15	smaller	small	ADJ
ap-8360	198	16	volume	volume	NOUN
ap-8360	198	17	of	of	ADP
ap-8360	198	18	material	material	NOUN
ap-8360	198	19	,	,	PUNCT
ap-8360	198	20	which	which	PRON
ap-8360	198	21	localises	localise	VERB
ap-8360	198	22	the	the	DET
ap-8360	198	23	heated	heated	ADJ
ap-8360	198	24	interaction	interaction	NOUN
ap-8360	198	25	region	region	NOUN
ap-8360	198	26	.	.	PUNCT
ap-8360	199	1	thus	thus	ADV
ap-8360	199	2	,	,	PUNCT
ap-8360	199	3	the	the	DET
ap-8360	199	4	possibility	possibility	NOUN
ap-8360	199	5	of	of	ADP
ap-8360	199	6	thermal	thermal	ADJ
ap-8360	199	7	conduction	conduction	NOUN
ap-8360	199	8	is	be	AUX
ap-8360	199	9	reduced	reduce	VERB
ap-8360	199	10	.	.	PUNCT
ap-8360	200	1	a	a	DET
ap-8360	200	2	limit	limit	NOUN
ap-8360	200	3	of	of	ADP
ap-8360	200	4	the	the	DET
ap-8360	200	5	removal	removal	NOUN
ap-8360	200	6	rate	rate	NOUN
ap-8360	200	7	parameter	parameter	NOUN
ap-8360	200	8	is	be	AUX
ap-8360	200	9	its	its	PRON
ap-8360	200	10	focus	focus	NOUN
ap-8360	200	11	on	on	ADP
ap-8360	200	12	process	process	NOUN
ap-8360	200	13	effectivity	effectivity	NOUN
ap-8360	200	14	.	.	PUNCT
ap-8360	201	1	in	in	ADP
ap-8360	201	2	spite	spite	NOUN
ap-8360	201	3	of	of	ADP
ap-8360	201	4	this	this	DET
ap-8360	201	5	fact	fact	NOUN
ap-8360	201	6	,	,	PUNCT
ap-8360	201	7	the	the	DET
ap-8360	201	8	volume	volume	NOUN
ap-8360	201	9	ablation	ablation	NOUN
ap-8360	201	10	rate	rate	NOUN
ap-8360	201	11	parameter	parameter	NOUN
ap-8360	201	12	could	could	AUX
ap-8360	201	13	be	be	AUX
ap-8360	201	14	useful	useful	ADJ
ap-8360	201	15	for	for	ADP
ap-8360	201	16	describing	describe	VERB
ap-8360	201	17	processes	process	NOUN
ap-8360	201	18	that	that	PRON
ap-8360	201	19	need	need	VERB
ap-8360	201	20	higher	high	ADJ
ap-8360	201	21	material	material	NOUN
ap-8360	201	22	ablation	ablation	NOUN
ap-8360	201	23	without	without	ADP
ap-8360	201	24	regard	regard	NOUN
ap-8360	201	25	to	to	ADP
ap-8360	201	26	energy	energy	NOUN
ap-8360	201	27	consumption	consumption	NOUN
ap-8360	201	28	.	.	PUNCT
ap-8360	202	1	however	however	ADV
ap-8360	202	2	,	,	PUNCT
ap-8360	202	3	negative	negative	ADJ
ap-8360	202	4	effects	effect	NOUN
ap-8360	202	5	can	can	AUX
ap-8360	202	6	occur	occur	VERB
ap-8360	202	7	,	,	PUNCT
ap-8360	202	8	e.g.	e.g.	ADV
ap-8360	202	9	heat	heat	NOUN
ap-8360	202	10	affection	affection	NOUN
ap-8360	202	11	and	and	CCONJ
ap-8360	202	12	increased	increase	VERB
ap-8360	202	13	surface	surface	NOUN
ap-8360	202	14	roughness	roughness	NOUN
ap-8360	202	15	.	.	PUNCT
ap-8360	203	1	therefore	therefore	ADV
ap-8360	203	2	,	,	PUNCT
ap-8360	203	3	a	a	DET
ap-8360	203	4	compromise	compromise	NOUN
ap-8360	203	5	between	between	ADP
ap-8360	203	6	the	the	DET
ap-8360	203	7	ablation	ablation	NOUN
ap-8360	203	8	rate	rate	NOUN
ap-8360	203	9	and	and	CCONJ
ap-8360	203	10	surface	surface	NOUN
ap-8360	203	11	roughness	roughness	NOUN
ap-8360	203	12	needs	need	VERB
ap-8360	203	13	to	to	PART
ap-8360	203	14	be	be	AUX
ap-8360	203	15	found	find	VERB
ap-8360	203	16	.	.	PUNCT
ap-8360	204	1	an	an	DET
ap-8360	204	2	ideal	ideal	ADJ
ap-8360	204	3	example	example	NOUN
ap-8360	204	4	can	can	AUX
ap-8360	204	5	be	be	AUX
ap-8360	204	6	seen	see	VERB
ap-8360	204	7	in	in	ADP
ap-8360	204	8	figure	figure	NOUN
ap-8360	204	9	6a	6a	NOUN
ap-8360	204	10	for	for	ADP
ap-8360	204	11	tool	tool	NOUN
ap-8360	204	12	steel	steel	NOUN
ap-8360	204	13	.	.	PUNCT
ap-8360	205	1	for	for	ADP
ap-8360	205	2	the	the	DET
ap-8360	205	3	achieved	achieve	VERB
ap-8360	205	4	∆v	∆v	PROPN
ap-8360	205	5	=	=	NOUN
ap-8360	205	6	1	1	NUM
ap-8360	205	7	mm3	mm3	PROPN
ap-8360	205	8	/	/	SYM
ap-8360	205	9	min	min	NOUN
ap-8360	205	10	,	,	PUNCT
ap-8360	205	11	an	an	DET
ap-8360	205	12	ideal	ideal	ADJ
ap-8360	205	13	solution	solution	NOUN
ap-8360	205	14	is	be	AUX
ap-8360	205	15	to	to	PART
ap-8360	205	16	use	use	VERB
ap-8360	205	17	iiih	iiih	NOUN
ap-8360	205	18	,	,	PUNCT
ap-8360	205	19	which	which	PRON
ap-8360	205	20	demonstrated	demonstrate	VERB
ap-8360	205	21	the	the	DET
ap-8360	205	22	lowest	low	ADJ
ap-8360	205	23	surface	surface	NOUN
ap-8360	205	24	roughness	roughness	NOUN
ap-8360	205	25	(	(	PUNCT
ap-8360	205	26	sa	sa	NOUN
ap-8360	205	27	=	=	NOUN
ap-8360	205	28	1.1	1.1	NUM
ap-8360	205	29	µm	µm	NUM
ap-8360	205	30	)	)	PUNCT
ap-8360	205	31	,	,	PUNCT
ap-8360	205	32	much	much	ADV
ap-8360	205	33	lower	low	ADJ
ap-8360	205	34	than	than	ADP
ap-8360	205	35	for	for	ADP
ap-8360	205	36	ih	ih	PROPN
ap-8360	205	37	(	(	PUNCT
ap-8360	205	38	sa	sa	PROPN
ap-8360	205	39	=	=	SYM
ap-8360	205	40	4.5	4.5	NUM
ap-8360	205	41	µm	µm	NOUN
ap-8360	205	42	)	)	PUNCT
ap-8360	205	43	and	and	CCONJ
ap-8360	205	44	iih	iih	PROPN
ap-8360	205	45	(	(	PUNCT
ap-8360	205	46	sa	sa	PROPN
ap-8360	205	47	=	=	NUM
ap-8360	205	48	3.1	3.1	NUM
ap-8360	205	49	µm	µm	NOUN
ap-8360	205	50	)	)	PUNCT
ap-8360	205	51	for	for	ADP
ap-8360	205	52	the	the	DET
ap-8360	205	53	same	same	ADJ
ap-8360	205	54	volume	volume	NOUN
ap-8360	205	55	ablation	ablation	NOUN
ap-8360	205	56	rate	rate	NOUN
ap-8360	205	57	.	.	PUNCT
ap-8360	206	1	similar	similar	ADJ
ap-8360	206	2	behaviour	behaviour	NOUN
ap-8360	206	3	was	be	AUX
ap-8360	206	4	also	also	ADV
ap-8360	206	5	observed	observe	VERB
ap-8360	206	6	for	for	ADP
ap-8360	206	7	tool	tool	NOUN
ap-8360	206	8	steel	steel	NOUN
ap-8360	206	9	(	(	PUNCT
ap-8360	206	10	figure	figure	VERB
ap-8360	206	11	6a	6a	NOUN
ap-8360	206	12	)	)	PUNCT
ap-8360	206	13	using	use	VERB
ap-8360	206	14	iiih	iiih	NOUN
ap-8360	206	15	,	,	PUNCT
ap-8360	206	16	where	where	SCONJ
ap-8360	206	17	sa	sa	PROPN
ap-8360	206	18	remains	remain	VERB
ap-8360	206	19	constant	constant	ADJ
ap-8360	206	20	even	even	ADV
ap-8360	206	21	for	for	ADP
ap-8360	206	22	higher	high	ADJ
ap-8360	206	23	fluences	fluence	NOUN
ap-8360	206	24	.	.	PUNCT
ap-8360	207	1	for	for	ADP
ap-8360	207	2	stainless	stainless	ADJ
ap-8360	207	3	steel	steel	NOUN
ap-8360	207	4	(	(	PUNCT
ap-8360	207	5	figure	figure	NOUN
ap-8360	207	6	6d	6d	NUM
ap-8360	207	7	)	)	PUNCT
ap-8360	207	8	,	,	PUNCT
ap-8360	207	9	the	the	DET
ap-8360	207	10	sa	sa	PROPN
ap-8360	207	11	values	value	NOUN
ap-8360	207	12	achieved	achieve	VERB
ap-8360	207	13	for	for	ADP
ap-8360	207	14	iih	iih	PROPN
ap-8360	207	15	were	be	AUX
ap-8360	207	16	lower	low	ADJ
ap-8360	207	17	than	than	ADP
ap-8360	207	18	for	for	ADP
ap-8360	207	19	iiih	iiih	NOUN
ap-8360	207	20	and	and	CCONJ
ap-8360	207	21	much	much	ADV
ap-8360	207	22	lower	low	ADJ
ap-8360	207	23	than	than	ADP
ap-8360	207	24	for	for	ADP
ap-8360	207	25	ih	ih	PRON
ap-8360	207	26	.	.	PUNCT
ap-8360	208	1	a	a	DET
ap-8360	208	2	very	very	ADV
ap-8360	208	3	specific	specific	ADJ
ap-8360	208	4	behaviour	behaviour	NOUN
ap-8360	208	5	in	in	ADP
ap-8360	208	6	comparison	comparison	NOUN
ap-8360	208	7	with	with	ADP
ap-8360	208	8	the	the	DET
ap-8360	208	9	other	other	ADJ
ap-8360	208	10	materials	material	NOUN
ap-8360	208	11	was	be	AUX
ap-8360	208	12	found	find	VERB
ap-8360	208	13	for	for	ADP
ap-8360	208	14	ti6al4v	ti6al4v	PRON
ap-8360	208	15	(	(	PUNCT
ap-8360	208	16	figure	figure	NOUN
ap-8360	208	17	6c	6c	PROPN
ap-8360	208	18	)	)	PUNCT
ap-8360	208	19	.	.	PUNCT
ap-8360	209	1	the	the	DET
ap-8360	209	2	lowest	low	ADJ
ap-8360	209	3	sa	sa	NOUN
ap-8360	209	4	was	be	AUX
ap-8360	209	5	measured	measure	VERB
ap-8360	209	6	for	for	ADP
ap-8360	209	7	iih	iih	PROPN
ap-8360	209	8	,	,	PUNCT
ap-8360	209	9	much	much	ADV
ap-8360	209	10	lower	low	ADJ
ap-8360	209	11	41	41	NUM
ap-8360	209	12	t.	t.	NOUN
ap-8360	209	13	primus	primus	PROPN
ap-8360	209	14	,	,	PUNCT
ap-8360	209	15	m.	m.	NOUN
ap-8360	209	16	novák	novák	PROPN
ap-8360	209	17	,	,	PUNCT
ap-8360	209	18	p.	p.	PROPN
ap-8360	209	19	zeman	zeman	PROPN
ap-8360	209	20	,	,	PUNCT
ap-8360	209	21	f.	f.	PROPN
ap-8360	209	22	holešovský	holešovský	PROPN
ap-8360	209	23	acta	acta	PROPN
ap-8360	209	24	polytechnica	polytechnica	PROPN
ap-8360	209	25	figure	figure	NOUN
ap-8360	209	26	7	7	NUM
ap-8360	209	27	.	.	PUNCT
ap-8360	209	28	a	a	PRON
ap-8360	209	29	)	)	PUNCT
ap-8360	209	30	2d	2d	NOUN
ap-8360	209	31	image	image	NOUN
ap-8360	209	32	of	of	ADP
ap-8360	209	33	cone	cone	NOUN
ap-8360	209	34	-	-	PUNCT
ap-8360	209	35	like	like	ADJ
ap-8360	209	36	features	feature	NOUN
ap-8360	209	37	formed	form	VERB
ap-8360	209	38	on	on	ADP
ap-8360	209	39	lasered	lasere	VERB
ap-8360	209	40	ti6al4v	ti6al4v	PUNCT
ap-8360	209	41	surface	surface	NOUN
ap-8360	209	42	,	,	PUNCT
ap-8360	209	43	b	b	NOUN
ap-8360	209	44	)	)	PUNCT
ap-8360	209	45	3d	3d	NUM
ap-8360	209	46	image	image	NOUN
ap-8360	209	47	of	of	ADP
ap-8360	209	48	cone	cone	NOUN
ap-8360	209	49	-	-	PUNCT
ap-8360	209	50	like	like	ADJ
ap-8360	209	51	features	feature	NOUN
ap-8360	209	52	.	.	PUNCT
ap-8360	210	1	than	than	ADP
ap-8360	210	2	for	for	ADP
ap-8360	210	3	ih	ih	PRON
ap-8360	210	4	and	and	CCONJ
ap-8360	210	5	also	also	ADV
ap-8360	210	6	for	for	ADP
ap-8360	210	7	iiih	iiih	NOUN
ap-8360	210	8	.	.	PUNCT
ap-8360	211	1	moreover	moreover	ADV
ap-8360	211	2	,	,	PUNCT
ap-8360	211	3	for	for	ADP
ap-8360	211	4	iiih	iiih	NOUN
ap-8360	211	5	,	,	PUNCT
ap-8360	211	6	the	the	DET
ap-8360	211	7	maximum	maximum	ADJ
ap-8360	211	8	volume	volume	NOUN
ap-8360	211	9	ablation	ablation	NOUN
ap-8360	211	10	rate	rate	NOUN
ap-8360	211	11	was	be	AUX
ap-8360	211	12	the	the	DET
ap-8360	211	13	lowest	low	ADJ
ap-8360	211	14	of	of	ADP
ap-8360	211	15	all	all	DET
ap-8360	211	16	the	the	DET
ap-8360	211	17	tested	test	VERB
ap-8360	211	18	materials	material	NOUN
ap-8360	211	19	.	.	PUNCT
ap-8360	212	1	however	however	ADV
ap-8360	212	2	,	,	PUNCT
ap-8360	212	3	for	for	ADP
ap-8360	212	4	ih	ih	PRON
ap-8360	212	5	,	,	PUNCT
ap-8360	212	6	the	the	DET
ap-8360	212	7	maximum	maximum	ADJ
ap-8360	212	8	(	(	PUNCT
ap-8360	212	9	∆v	∆v	NOUN
ap-8360	212	10	=	=	SYM
ap-8360	212	11	2.06	2.06	NUM
ap-8360	212	12	mm3	mm3	PROPN
ap-8360	212	13	/	/	SYM
ap-8360	212	14	min	min	NOUN
ap-8360	212	15	)	)	PUNCT
ap-8360	212	16	was	be	AUX
ap-8360	212	17	achieved	achieve	VERB
ap-8360	212	18	in	in	ADP
ap-8360	212	19	comparison	comparison	NOUN
ap-8360	212	20	with	with	ADP
ap-8360	212	21	the	the	DET
ap-8360	212	22	other	other	ADJ
ap-8360	212	23	materials	material	NOUN
ap-8360	212	24	,	,	PUNCT
ap-8360	212	25	with	with	ADP
ap-8360	212	26	a	a	DET
ap-8360	212	27	very	very	ADV
ap-8360	212	28	high	high	ADJ
ap-8360	212	29	sa	sa	NOUN
ap-8360	212	30	of	of	ADP
ap-8360	212	31	8	8	NUM
ap-8360	212	32	µm	µm	NOUN
ap-8360	212	33	due	due	ADP
ap-8360	212	34	to	to	ADP
ap-8360	212	35	significant	significant	ADJ
ap-8360	212	36	thermal	thermal	ADJ
ap-8360	212	37	effects	effect	NOUN
ap-8360	212	38	.	.	PUNCT
ap-8360	213	1	high	high	ADJ
ap-8360	213	2	surface	surface	NOUN
ap-8360	213	3	melting	melting	NOUN
ap-8360	213	4	was	be	AUX
ap-8360	213	5	observed	observe	VERB
ap-8360	213	6	for	for	ADP
ap-8360	213	7	all	all	DET
ap-8360	213	8	the	the	DET
ap-8360	213	9	materials	material	NOUN
ap-8360	213	10	for	for	ADP
ap-8360	213	11	higher	high	ADJ
ap-8360	213	12	fluences	fluence	NOUN
ap-8360	213	13	.	.	PUNCT
ap-8360	214	1	the	the	DET
ap-8360	214	2	highest	high	ADJ
ap-8360	214	3	sa	sa	NOUN
ap-8360	214	4	was	be	AUX
ap-8360	214	5	measured	measure	VERB
ap-8360	214	6	for	for	ADP
ap-8360	214	7	inconel	inconel	NOUN
ap-8360	214	8	718	718	NUM
ap-8360	214	9	,	,	PUNCT
ap-8360	214	10	reaching	reach	VERB
ap-8360	214	11	sa	sa	PROPN
ap-8360	215	1	≈	≈	PROPN
ap-8360	215	2	12	12	NUM
ap-8360	215	3	µm	µm	NOUN
ap-8360	215	4	.	.	PUNCT
ap-8360	216	1	for	for	ADP
ap-8360	216	2	ti6al4v	ti6al4v	PRON
ap-8360	216	3	(	(	PUNCT
ap-8360	216	4	figure	figure	NOUN
ap-8360	216	5	6c	6c	PROPN
ap-8360	216	6	)	)	PUNCT
ap-8360	216	7	,	,	PUNCT
ap-8360	216	8	an	an	DET
ap-8360	216	9	increase	increase	NOUN
ap-8360	216	10	in	in	ADP
ap-8360	216	11	surface	surface	NOUN
ap-8360	216	12	roughness	roughness	NOUN
ap-8360	216	13	was	be	AUX
ap-8360	216	14	observed	observe	VERB
ap-8360	216	15	for	for	ADP
ap-8360	216	16	low	low	ADJ
ap-8360	216	17	fluences	fluence	NOUN
ap-8360	216	18	,	,	PUNCT
ap-8360	216	19	especially	especially	ADV
ap-8360	216	20	for	for	ADP
ap-8360	216	21	ih	ih	PROPN
ap-8360	216	22	and	and	CCONJ
ap-8360	216	23	iih	iih	PROPN
ap-8360	216	24	.	.	PUNCT
ap-8360	217	1	optical	optical	ADJ
ap-8360	217	2	inspection	inspection	NOUN
ap-8360	217	3	of	of	ADP
ap-8360	217	4	ablated	ablated	ADJ
ap-8360	217	5	areas	area	NOUN
ap-8360	217	6	was	be	AUX
ap-8360	217	7	done	do	VERB
ap-8360	217	8	by	by	ADP
ap-8360	217	9	optical	optical	ADJ
ap-8360	217	10	and	and	CCONJ
ap-8360	217	11	confocal	confocal	ADJ
ap-8360	217	12	microscopes	microscope	NOUN
ap-8360	217	13	.	.	PUNCT
ap-8360	218	1	examples	example	NOUN
ap-8360	218	2	of	of	ADP
ap-8360	218	3	different	different	ADJ
ap-8360	218	4	ablated	ablated	ADJ
ap-8360	218	5	materials	material	NOUN
ap-8360	218	6	with	with	ADP
ap-8360	218	7	same	same	ADJ
ap-8360	218	8	used	use	VERB
ap-8360	218	9	wavelength	wavelength	NOUN
ap-8360	218	10	and	and	CCONJ
ap-8360	218	11	fluence	fluence	NOUN
ap-8360	218	12	can	can	AUX
ap-8360	218	13	be	be	AUX
ap-8360	218	14	seen	see	VERB
ap-8360	218	15	in	in	ADP
ap-8360	218	16	appendix	appendix	NOUN
ap-8360	218	17	a	a	DET
ap-8360	218	18	figure	figure	NOUN
ap-8360	218	19	11	11	NUM
ap-8360	218	20	detailed	detailed	ADJ
ap-8360	218	21	inspection	inspection	NOUN
ap-8360	218	22	of	of	ADP
ap-8360	218	23	the	the	DET
ap-8360	218	24	ti6al4v	ti6al4v	PROPN
ap-8360	218	25	surface	surface	NOUN
ap-8360	218	26	,	,	PUNCT
ap-8360	218	27	for	for	ADP
ap-8360	218	28	f=0.5	f=0.5	PROPN
ap-8360	218	29	j	j	PROPN
ap-8360	218	30	/	/	SYM
ap-8360	218	31	cm2	cm2	PROPN
ap-8360	218	32	and	and	CCONJ
ap-8360	218	33	iih	iih	PROPN
ap-8360	218	34	used	use	VERB
ap-8360	218	35	,	,	PUNCT
ap-8360	218	36	revealed	reveal	VERB
ap-8360	218	37	some	some	DET
ap-8360	218	38	debris	debris	NOUN
ap-8360	218	39	,	,	PUNCT
ap-8360	218	40	see	see	VERB
ap-8360	218	41	figure	figure	NOUN
ap-8360	218	42	7	7	NUM
ap-8360	218	43	.	.	PUNCT
ap-8360	219	1	these	these	DET
ap-8360	219	2	elements	element	NOUN
ap-8360	219	3	covered	cover	VERB
ap-8360	219	4	the	the	DET
ap-8360	219	5	whole	whole	ADJ
ap-8360	219	6	lasered	lasere	VERB
ap-8360	219	7	surface	surface	NOUN
ap-8360	219	8	at	at	ADP
ap-8360	219	9	a	a	DET
ap-8360	219	10	height	height	NOUN
ap-8360	219	11	of	of	ADP
ap-8360	219	12	about	about	ADV
ap-8360	219	13	25	25	NUM
ap-8360	219	14	µm	µm	NOUN
ap-8360	219	15	.	.	PUNCT
ap-8360	220	1	as	as	SCONJ
ap-8360	220	2	published	publish	VERB
ap-8360	220	3	by	by	ADP
ap-8360	220	4	[	[	X
ap-8360	220	5	33	33	NUM
ap-8360	220	6	]	]	PUNCT
ap-8360	220	7	,	,	PUNCT
ap-8360	220	8	cone	cone	NOUN
ap-8360	220	9	-	-	PUNCT
ap-8360	220	10	like	like	ADJ
ap-8360	220	11	features	feature	NOUN
ap-8360	220	12	form	form	VERB
ap-8360	220	13	due	due	ADJ
ap-8360	220	14	to	to	ADP
ap-8360	220	15	material	material	NOUN
ap-8360	220	16	redeposition	redeposition	NOUN
ap-8360	220	17	and	and	CCONJ
ap-8360	220	18	the	the	DET
ap-8360	220	19	thermal	thermal	ADJ
ap-8360	220	20	effects	effect	NOUN
ap-8360	220	21	of	of	ADP
ap-8360	220	22	fluences	fluence	NOUN
ap-8360	220	23	ranging	range	VERB
ap-8360	220	24	from	from	ADP
ap-8360	220	25	f	f	PROPN
ap-8360	220	26	=	=	SYM
ap-8360	220	27	0.49–0.86	0.49–0.86	PROPN
ap-8360	220	28	j	j	PROPN
ap-8360	220	29	/	/	SYM
ap-8360	220	30	cm2	cm2	PROPN
ap-8360	220	31	.	.	PROPN
ap-8360	220	32	for	for	ADP
ap-8360	220	33	higher	high	ADJ
ap-8360	220	34	fluences	fluence	NOUN
ap-8360	220	35	,	,	PUNCT
ap-8360	220	36	some	some	DET
ap-8360	220	37	micro	micro	NOUN
ap-8360	220	38	-	-	NOUN
ap-8360	220	39	cracks	crack	NOUN
ap-8360	220	40	start	start	VERB
ap-8360	220	41	to	to	PART
ap-8360	220	42	form	form	VERB
ap-8360	220	43	.	.	PUNCT
ap-8360	221	1	the	the	DET
ap-8360	221	2	same	same	ADJ
ap-8360	221	3	results	result	NOUN
ap-8360	221	4	were	be	AUX
ap-8360	221	5	found	find	VERB
ap-8360	221	6	in	in	ADP
ap-8360	221	7	our	our	PRON
ap-8360	221	8	study	study	NOUN
ap-8360	221	9	.	.	PUNCT
ap-8360	222	1	formation	formation	NOUN
ap-8360	222	2	of	of	ADP
ap-8360	222	3	cone	cone	NOUN
ap-8360	222	4	-	-	PUNCT
ap-8360	222	5	like	like	ADJ
ap-8360	222	6	features	feature	NOUN
ap-8360	222	7	can	can	AUX
ap-8360	222	8	be	be	AUX
ap-8360	222	9	limited	limit	VERB
ap-8360	222	10	by	by	ADP
ap-8360	222	11	using	use	VERB
ap-8360	222	12	iiih	iiih	NOUN
ap-8360	222	13	,	,	PUNCT
ap-8360	222	14	probably	probably	ADV
ap-8360	222	15	due	due	ADP
ap-8360	222	16	to	to	ADP
ap-8360	222	17	the	the	DET
ap-8360	222	18	higher	high	ADJ
ap-8360	222	19	energy	energy	NOUN
ap-8360	222	20	of	of	ADP
ap-8360	222	21	incoming	incoming	ADJ
ap-8360	222	22	photons	photon	NOUN
ap-8360	222	23	along	along	ADP
ap-8360	222	24	with	with	ADP
ap-8360	222	25	a	a	DET
ap-8360	222	26	higher	high	ADJ
ap-8360	222	27	material	material	NOUN
ap-8360	222	28	absorption	absorption	NOUN
ap-8360	222	29	.	.	PUNCT
ap-8360	223	1	4.4	4.4	NUM
ap-8360	223	2	.	.	PUNCT
ap-8360	224	1	increasing	increase	VERB
ap-8360	224	2	scanning	scan	VERB
ap-8360	224	3	speed	speed	NOUN
ap-8360	224	4	and	and	CCONJ
ap-8360	224	5	repetition	repetition	NOUN
ap-8360	224	6	rates	rate	NOUN
ap-8360	224	7	in	in	ADP
ap-8360	224	8	this	this	DET
ap-8360	224	9	paper	paper	NOUN
ap-8360	224	10	,	,	PUNCT
ap-8360	224	11	the	the	DET
ap-8360	224	12	method	method	NOUN
ap-8360	224	13	of	of	ADP
ap-8360	224	14	increasing	increase	VERB
ap-8360	224	15	the	the	DET
ap-8360	224	16	repetition	repetition	NOUN
ap-8360	224	17	rate	rate	NOUN
ap-8360	224	18	for	for	ADP
ap-8360	224	19	increasing	increase	VERB
ap-8360	224	20	process	process	NOUN
ap-8360	224	21	productivity	productivity	NOUN
ap-8360	224	22	was	be	AUX
ap-8360	224	23	chosen	choose	VERB
ap-8360	224	24	.	.	PUNCT
ap-8360	225	1	the	the	DET
ap-8360	225	2	laser	laser	NOUN
ap-8360	225	3	system	system	NOUN
ap-8360	225	4	used	use	VERB
ap-8360	225	5	allows	allow	VERB
ap-8360	225	6	us	we	PRON
ap-8360	225	7	to	to	PART
ap-8360	225	8	use	use	VERB
ap-8360	225	9	a	a	DET
ap-8360	225	10	1	1	NUM
ap-8360	225	11	mhz	mhz	NOUN
ap-8360	225	12	repetition	repetition	NOUN
ap-8360	225	13	rate	rate	NOUN
ap-8360	225	14	with	with	ADP
ap-8360	225	15	a	a	DET
ap-8360	225	16	maximum	maximum	ADJ
ap-8360	225	17	output	output	NOUN
ap-8360	225	18	power	power	NOUN
ap-8360	225	19	of	of	ADP
ap-8360	225	20	40	40	NUM
ap-8360	225	21	w	w	NOUN
ap-8360	225	22	with	with	ADP
ap-8360	225	23	a	a	DET
ap-8360	225	24	scanning	scanning	NOUN
ap-8360	225	25	speed	speed	NOUN
ap-8360	225	26	of	of	ADP
ap-8360	225	27	more	more	ADJ
ap-8360	225	28	than	than	ADP
ap-8360	225	29	5	5	NUM
ap-8360	225	30	m	m	NOUN
ap-8360	225	31	/	/	SYM
ap-8360	225	32	s.	s.	PROPN
ap-8360	225	33	for	for	ADP
ap-8360	225	34	this	this	DET
ap-8360	225	35	reason	reason	NOUN
ap-8360	225	36	,	,	PUNCT
ap-8360	225	37	the	the	DET
ap-8360	225	38	repetition	repetition	NOUN
ap-8360	225	39	rate	rate	NOUN
ap-8360	225	40	was	be	AUX
ap-8360	225	41	tested	test	VERB
ap-8360	225	42	across	across	ADP
ap-8360	225	43	the	the	DET
ap-8360	225	44	entire	entire	ADJ
ap-8360	225	45	adjustable	adjustable	ADJ
ap-8360	225	46	spectrum	spectrum	NOUN
ap-8360	225	47	from	from	ADP
ap-8360	225	48	100	100	NUM
ap-8360	225	49	khz	khz	NOUN
ap-8360	225	50	to	to	ADP
ap-8360	225	51	1	1	NUM
ap-8360	225	52	mhz	mhz	NOUN
ap-8360	225	53	.	.	PUNCT
ap-8360	226	1	the	the	DET
ap-8360	226	2	same	same	ADJ
ap-8360	226	3	fluence	fluence	NOUN
ap-8360	226	4	,	,	PUNCT
ap-8360	226	5	which	which	PRON
ap-8360	226	6	was	be	AUX
ap-8360	226	7	found	find	VERB
ap-8360	226	8	to	to	PART
ap-8360	226	9	be	be	AUX
ap-8360	226	10	optimal	optimal	ADJ
ap-8360	226	11	in	in	ADP
ap-8360	226	12	the	the	DET
ap-8360	226	13	previous	previous	ADJ
ap-8360	226	14	experiments	experiment	NOUN
ap-8360	226	15	,	,	PUNCT
ap-8360	226	16	was	be	AUX
ap-8360	226	17	used	use	VERB
ap-8360	226	18	,	,	PUNCT
ap-8360	226	19	recalculated	recalculate	VERB
ap-8360	226	20	to	to	ADP
ap-8360	226	21	the	the	DET
ap-8360	226	22	applied	apply	VERB
ap-8360	226	23	repetition	repetition	NOUN
ap-8360	226	24	rate	rate	NOUN
ap-8360	226	25	.	.	PUNCT
ap-8360	227	1	the	the	DET
ap-8360	227	2	optimal	optimal	ADJ
ap-8360	227	3	fluence	fluence	NOUN
ap-8360	227	4	values	value	NOUN
ap-8360	227	5	are	be	AUX
ap-8360	227	6	shown	show	VERB
ap-8360	227	7	in	in	ADP
ap-8360	227	8	table	table	NOUN
ap-8360	227	9	9	9	NUM
ap-8360	227	10	.	.	PUNCT
ap-8360	227	11	material	material	NOUN
ap-8360	227	12	fopt	fopt	NOUN
ap-8360	228	1	[	[	X
ap-8360	228	2	j	j	X
ap-8360	228	3	/	/	SYM
ap-8360	228	4	cm2	cm2	NOUN
ap-8360	228	5	]	]	X
ap-8360	228	6	stainless	stainless	ADJ
ap-8360	228	7	steel	steel	NOUN
ap-8360	228	8	0.57	0.57	NUM
ap-8360	228	9	tool	tool	NOUN
ap-8360	228	10	steel	steel	NOUN
ap-8360	228	11	0.57	0.57	NUM
ap-8360	228	12	inconel	inconel	NOUN
ap-8360	228	13	718	718	NUM
ap-8360	228	14	0.57	0.57	NUM
ap-8360	228	15	ti6al4v	ti6al4v	SYM
ap-8360	228	16	0.45	0.45	NUM
ap-8360	228	17	table	table	NOUN
ap-8360	228	18	9	9	NUM
ap-8360	228	19	.	.	PUNCT
ap-8360	229	1	optimal	optimal	ADJ
ap-8360	229	2	fluences	fluence	NOUN
ap-8360	229	3	obtained	obtain	VERB
ap-8360	229	4	from	from	ADP
ap-8360	229	5	removal	removal	NOUN
ap-8360	229	6	efficiency	efficiency	NOUN
ap-8360	229	7	experiment	experiment	NOUN
ap-8360	229	8	for	for	ADP
ap-8360	229	9	200	200	NUM
ap-8360	229	10	khz	khz	NOUN
ap-8360	229	11	used	use	VERB
ap-8360	229	12	for	for	ADP
ap-8360	229	13	increasing	increase	VERB
ap-8360	229	14	scanning	scan	VERB
ap-8360	229	15	speed	speed	NOUN
ap-8360	229	16	experiment	experiment	NOUN
ap-8360	229	17	.	.	PUNCT
ap-8360	230	1	in	in	ADP
ap-8360	230	2	figure	figure	NOUN
ap-8360	230	3	8c	8c	NOUN
ap-8360	230	4	,	,	PUNCT
ap-8360	230	5	the	the	DET
ap-8360	230	6	volume	volume	NOUN
ap-8360	230	7	ablation	ablation	NOUN
ap-8360	230	8	rates	rate	NOUN
ap-8360	230	9	in	in	ADP
ap-8360	230	10	relation	relation	NOUN
ap-8360	230	11	to	to	ADP
ap-8360	230	12	the	the	DET
ap-8360	230	13	repetition	repetition	NOUN
ap-8360	230	14	rate	rate	NOUN
ap-8360	230	15	are	be	AUX
ap-8360	230	16	displayed	display	VERB
ap-8360	230	17	.	.	PUNCT
ap-8360	231	1	as	as	SCONJ
ap-8360	231	2	expected	expect	VERB
ap-8360	231	3	,	,	PUNCT
ap-8360	231	4	the	the	DET
ap-8360	231	5	productivity	productivity	NOUN
ap-8360	231	6	of	of	ADP
ap-8360	231	7	the	the	DET
ap-8360	231	8	process	process	NOUN
ap-8360	231	9	increases	increase	VERB
ap-8360	231	10	by	by	ADP
ap-8360	231	11	increasing	increase	VERB
ap-8360	231	12	the	the	DET
ap-8360	231	13	repetition	repetition	NOUN
ap-8360	231	14	rate	rate	NOUN
ap-8360	231	15	or	or	CCONJ
ap-8360	231	16	scanning	scan	VERB
ap-8360	231	17	speed	speed	NOUN
ap-8360	231	18	.	.	PUNCT
ap-8360	232	1	to	to	PART
ap-8360	232	2	demonstrate	demonstrate	VERB
ap-8360	232	3	the	the	DET
ap-8360	232	4	inclination	inclination	NOUN
ap-8360	232	5	of	of	ADP
ap-8360	232	6	increase	increase	NOUN
ap-8360	232	7	,	,	PUNCT
ap-8360	232	8	trendlines	trendline	NOUN
ap-8360	232	9	were	be	AUX
ap-8360	232	10	used	use	VERB
ap-8360	232	11	.	.	PUNCT
ap-8360	233	1	the	the	DET
ap-8360	233	2	highest	high	ADJ
ap-8360	233	3	angle	angle	NOUN
ap-8360	233	4	of	of	ADP
ap-8360	233	5	inclination	inclination	NOUN
ap-8360	233	6	can	can	AUX
ap-8360	233	7	be	be	AUX
ap-8360	233	8	seen	see	VERB
ap-8360	233	9	for	for	ADP
ap-8360	233	10	ti6al4v	ti6al4v	PRON
ap-8360	233	11	.	.	PUNCT
ap-8360	234	1	it	it	PRON
ap-8360	234	2	shows	show	VERB
ap-8360	234	3	the	the	DET
ap-8360	234	4	highest	high	ADJ
ap-8360	234	5	productivity	productivity	NOUN
ap-8360	234	6	gains	gain	NOUN
ap-8360	234	7	.	.	PUNCT
ap-8360	235	1	the	the	DET
ap-8360	235	2	volume	volume	NOUN
ap-8360	235	3	ablation	ablation	NOUN
ap-8360	235	4	rates	rate	NOUN
ap-8360	235	5	increase	increase	VERB
ap-8360	235	6	more	more	ADJ
ap-8360	235	7	than	than	ADP
ap-8360	235	8	five	five	NUM
ap-8360	235	9	-	-	NOUN
ap-8360	235	10	fold	fold	ADJ
ap-8360	235	11	when	when	SCONJ
ap-8360	235	12	the	the	DET
ap-8360	235	13	repetition	repetition	NOUN
ap-8360	235	14	rate	rate	NOUN
ap-8360	235	15	is	be	AUX
ap-8360	235	16	changed	change	VERB
ap-8360	235	17	from	from	ADP
ap-8360	235	18	200	200	NUM
ap-8360	235	19	khz	khz	NOUN
ap-8360	235	20	to	to	ADP
ap-8360	235	21	1	1	NUM
ap-8360	235	22	mhz	mhz	NOUN
ap-8360	235	23	.	.	PUNCT
ap-8360	236	1	however	however	ADV
ap-8360	236	2	,	,	PUNCT
ap-8360	236	3	surface	surface	NOUN
ap-8360	236	4	roughness	roughness	NOUN
ap-8360	236	5	increases	increase	VERB
ap-8360	236	6	slightly	slightly	ADV
ap-8360	236	7	for	for	ADP
ap-8360	236	8	scanning	scan	VERB
ap-8360	236	9	speeds	speed	NOUN
ap-8360	236	10	higher	high	ADJ
ap-8360	236	11	than	than	ADP
ap-8360	236	12	4000	4000	NUM
ap-8360	236	13	mm	mm	NOUN
ap-8360	236	14	/	/	SYM
ap-8360	236	15	s	s	PROPN
ap-8360	236	16	(	(	PUNCT
ap-8360	236	17	in	in	ADP
ap-8360	236	18	figure	figure	NOUN
ap-8360	236	19	8a	8a	NUM
ap-8360	236	20	)	)	PUNCT
ap-8360	236	21	.	.	PUNCT
ap-8360	237	1	this	this	PRON
ap-8360	237	2	is	be	AUX
ap-8360	237	3	due	due	ADJ
ap-8360	237	4	to	to	ADP
ap-8360	237	5	high	high	ADJ
ap-8360	237	6	acceleration	acceleration	NOUN
ap-8360	237	7	and	and	CCONJ
ap-8360	237	8	deceleration	deceleration	NOUN
ap-8360	237	9	angles	angle	NOUN
ap-8360	237	10	on	on	ADP
ap-8360	237	11	the	the	DET
ap-8360	237	12	short	short	ADJ
ap-8360	237	13	track	track	NOUN
ap-8360	237	14	in	in	ADP
ap-8360	237	15	combination	combination	NOUN
ap-8360	237	16	with	with	ADP
ap-8360	237	17	the	the	DET
ap-8360	237	18	limits	limit	NOUN
ap-8360	237	19	of	of	ADP
ap-8360	237	20	the	the	DET
ap-8360	237	21	scanning	scan	VERB
ap-8360	237	22	head	head	NOUN
ap-8360	237	23	that	that	PRON
ap-8360	237	24	was	be	AUX
ap-8360	237	25	used	use	VERB
ap-8360	237	26	.	.	PUNCT
ap-8360	238	1	as	as	SCONJ
ap-8360	238	2	can	can	AUX
ap-8360	238	3	be	be	AUX
ap-8360	238	4	seen	see	VERB
ap-8360	238	5	from	from	ADP
ap-8360	238	6	figure	figure	NOUN
ap-8360	238	7	8b	8b	NUM
ap-8360	238	8	,	,	PUNCT
ap-8360	238	9	the	the	DET
ap-8360	238	10	removed	remove	VERB
ap-8360	238	11	depth	depth	NOUN
ap-8360	238	12	remains	remain	VERB
ap-8360	238	13	constant	constant	ADJ
ap-8360	238	14	as	as	ADP
ap-8360	238	15	the	the	DET
ap-8360	238	16	repetition	repetition	NOUN
ap-8360	238	17	rate	rate	NOUN
ap-8360	238	18	and	and	CCONJ
ap-8360	238	19	scanning	scan	VERB
ap-8360	238	20	speed	speed	NOUN
ap-8360	238	21	increase	increase	NOUN
ap-8360	238	22	,	,	PUNCT
ap-8360	238	23	respectively	respectively	ADV
ap-8360	238	24	.	.	PUNCT
ap-8360	239	1	this	this	DET
ap-8360	239	2	experiment	experiment	NOUN
ap-8360	239	3	proved	prove	VERB
ap-8360	239	4	that	that	SCONJ
ap-8360	239	5	using	use	VERB
ap-8360	239	6	a	a	DET
ap-8360	239	7	higher	high	ADJ
ap-8360	239	8	repetition	repetition	NOUN
ap-8360	239	9	rate	rate	NOUN
ap-8360	239	10	is	be	AUX
ap-8360	239	11	beneficial	beneficial	ADJ
ap-8360	239	12	for	for	ADP
ap-8360	239	13	process	process	NOUN
ap-8360	239	14	productivity	productivity	NOUN
ap-8360	239	15	.	.	PUNCT
ap-8360	240	1	the	the	DET
ap-8360	240	2	plots	plot	NOUN
ap-8360	240	3	in	in	ADP
ap-8360	240	4	figure	figure	NOUN
ap-8360	240	5	8	8	NUM
ap-8360	240	6	also	also	ADV
ap-8360	240	7	demonstrate	demonstrate	VERB
ap-8360	240	8	the	the	DET
ap-8360	240	9	ability	ability	NOUN
ap-8360	240	10	of	of	ADP
ap-8360	240	11	the	the	DET
ap-8360	240	12	materials	material	NOUN
ap-8360	240	13	to	to	PART
ap-8360	240	14	be	be	AUX
ap-8360	240	15	ablated	ablate	VERB
ap-8360	240	16	by	by	ADP
ap-8360	240	17	laser	laser	NOUN
ap-8360	240	18	.	.	PUNCT
ap-8360	241	1	the	the	DET
ap-8360	241	2	highest	high	ADJ
ap-8360	241	3	removed	removed	ADJ
ap-8360	241	4	depth	depth	NOUN
ap-8360	241	5	was	be	AUX
ap-8360	241	6	measured	measure	VERB
ap-8360	241	7	for	for	ADP
ap-8360	241	8	ti6al4v	ti6al4v	X
ap-8360	241	9	along	along	ADP
ap-8360	241	10	with	with	ADP
ap-8360	241	11	the	the	DET
ap-8360	241	12	greatest	great	ADJ
ap-8360	241	13	surface	surface	NOUN
ap-8360	241	14	roughness	roughness	NOUN
ap-8360	241	15	caused	cause	VERB
ap-8360	241	16	by	by	ADP
ap-8360	241	17	significant	significant	ADJ
ap-8360	241	18	melting	melting	NOUN
ap-8360	241	19	and	and	CCONJ
ap-8360	241	20	redeposition	redeposition	NOUN
ap-8360	241	21	of	of	ADP
ap-8360	241	22	debris	debris	NOUN
ap-8360	241	23	as	as	SCONJ
ap-8360	241	24	presented	present	VERB
ap-8360	241	25	for	for	ADP
ap-8360	241	26	200	200	NUM
ap-8360	241	27	khz	khz	NOUN
ap-8360	241	28	.	.	PUNCT
ap-8360	242	1	the	the	DET
ap-8360	242	2	steel	steel	NOUN
ap-8360	242	3	materials	material	NOUN
ap-8360	242	4	show	show	VERB
ap-8360	242	5	the	the	DET
ap-8360	242	6	lowest	low	ADJ
ap-8360	242	7	removed	removed	ADJ
ap-8360	242	8	depth	depth	NOUN
ap-8360	242	9	with	with	ADP
ap-8360	242	10	low	low	ADJ
ap-8360	242	11	surface	surface	NOUN
ap-8360	242	12	roughness	roughness	NOUN
ap-8360	242	13	,	,	PUNCT
ap-8360	242	14	comparable	comparable	ADJ
ap-8360	242	15	to	to	ADP
ap-8360	242	16	inconel	inconel	NOUN
ap-8360	242	17	718	718	NUM
ap-8360	242	18	.	.	PUNCT
ap-8360	243	1	while	while	SCONJ
ap-8360	243	2	,	,	PUNCT
ap-8360	243	3	the	the	DET
ap-8360	243	4	removed	remove	VERB
ap-8360	243	5	depth	depth	NOUN
ap-8360	243	6	was	be	AUX
ap-8360	243	7	significantly	significantly	ADV
ap-8360	243	8	higher	high	ADJ
ap-8360	243	9	for	for	ADP
ap-8360	243	10	inconel	inconel	NOUN
ap-8360	243	11	718	718	NUM
ap-8360	243	12	than	than	ADP
ap-8360	243	13	for	for	ADP
ap-8360	243	14	both	both	PRON
ap-8360	243	15	of	of	ADP
ap-8360	243	16	the	the	DET
ap-8360	243	17	steel	steel	NOUN
ap-8360	243	18	materials	material	NOUN
ap-8360	243	19	.	.	PUNCT
ap-8360	244	1	42	42	NUM
ap-8360	244	2	vol	vol	NOUN
ap-8360	244	3	.	.	PUNCT
ap-8360	244	4	63	63	NUM
ap-8360	244	5	no	no	NOUN
ap-8360	244	6	.	.	PUNCT
ap-8360	245	1	1/2023	1/2023	NUM
ap-8360	245	2	femtosecond	femtosecond	NOUN
ap-8360	245	3	laser	laser	NOUN
ap-8360	245	4	processing	processing	NOUN
ap-8360	245	5	of	of	ADP
ap-8360	245	6	advanced	advanced	ADJ
ap-8360	245	7	technical	technical	ADJ
ap-8360	245	8	materials	material	NOUN
ap-8360	245	9	(	(	PUNCT
ap-8360	245	10	a	a	NOUN
ap-8360	245	11	)	)	PUNCT
ap-8360	245	12	.	.	PUNCT
ap-8360	246	1	surface	surface	NOUN
ap-8360	246	2	roughness	roughness	NOUN
ap-8360	246	3	.	.	PUNCT
ap-8360	247	1	(	(	PUNCT
ap-8360	247	2	b	b	NOUN
ap-8360	247	3	)	)	PUNCT
ap-8360	247	4	.	.	PUNCT
ap-8360	248	1	removed	remove	VERB
ap-8360	248	2	depth	depth	NOUN
ap-8360	248	3	.	.	PUNCT
ap-8360	249	1	(	(	PUNCT
ap-8360	249	2	c	c	NOUN
ap-8360	249	3	)	)	PUNCT
ap-8360	249	4	.	.	PUNCT
ap-8360	250	1	volume	volume	NOUN
ap-8360	250	2	removal	removal	NOUN
ap-8360	250	3	rates	rate	NOUN
ap-8360	250	4	.	.	PUNCT
ap-8360	251	1	figure	figure	NOUN
ap-8360	251	2	8	8	NUM
ap-8360	251	3	.	.	PUNCT
ap-8360	252	1	increasing	increase	VERB
ap-8360	252	2	scanning	scan	VERB
ap-8360	252	3	speed	speed	NOUN
ap-8360	252	4	results	result	NOUN
ap-8360	252	5	.	.	PUNCT
ap-8360	253	1	4.5	4.5	NUM
ap-8360	253	2	.	.	PUNCT
ap-8360	254	1	surface	surface	NOUN
ap-8360	254	2	structuring	structuring	NOUN
ap-8360	254	3	using	use	VERB
ap-8360	254	4	the	the	DET
ap-8360	254	5	maximal	maximal	ADJ
ap-8360	254	6	repetition	repetition	NOUN
ap-8360	254	7	rate	rate	NOUN
ap-8360	254	8	and	and	CCONJ
ap-8360	254	9	scanning	scan	VERB
ap-8360	254	10	speed	speed	NOUN
ap-8360	254	11	is	be	AUX
ap-8360	254	12	useful	useful	ADJ
ap-8360	254	13	in	in	ADP
ap-8360	254	14	regard	regard	NOUN
ap-8360	254	15	to	to	ADP
ap-8360	254	16	high	high	ADJ
ap-8360	254	17	process	process	NOUN
ap-8360	254	18	productivity	productivity	NOUN
ap-8360	254	19	.	.	PUNCT
ap-8360	255	1	some	some	DET
ap-8360	255	2	scanning	scan	VERB
ap-8360	255	3	problems	problem	NOUN
ap-8360	255	4	can	can	AUX
ap-8360	255	5	appear	appear	VERB
ap-8360	255	6	during	during	ADP
ap-8360	255	7	high	high	ADJ
ap-8360	255	8	scanning	scanning	NOUN
ap-8360	255	9	speeds	speed	NOUN
ap-8360	255	10	,	,	PUNCT
ap-8360	255	11	such	such	ADJ
ap-8360	255	12	as	as	ADP
ap-8360	255	13	acceleration	acceleration	NOUN
ap-8360	255	14	and	and	CCONJ
ap-8360	255	15	deceleration	deceleration	NOUN
ap-8360	255	16	for	for	ADP
ap-8360	255	17	short	short	ADJ
ap-8360	255	18	tracks	track	NOUN
ap-8360	255	19	.	.	PUNCT
ap-8360	256	1	even	even	ADV
ap-8360	256	2	when	when	SCONJ
ap-8360	256	3	the	the	DET
ap-8360	256	4	sky	sky	NOUN
ap-8360	256	5	-	-	PUNCT
ap-8360	256	6	writing	write	VERB
ap-8360	256	7	function	function	NOUN
ap-8360	256	8	developed	develop	VERB
ap-8360	256	9	by	by	ADP
ap-8360	256	10	galvo	galvo	NOUN
ap-8360	256	11	-	-	PUNCT
ap-8360	256	12	scanner	scanner	NOUN
ap-8360	256	13	provider	provider	NOUN
ap-8360	256	14	scanlab	scanlab	NOUN
ap-8360	256	15	gmbh	gmbh	PROPN
ap-8360	256	16	company	company	NOUN
ap-8360	256	17	is	be	AUX
ap-8360	256	18	used	use	VERB
ap-8360	256	19	,	,	PUNCT
ap-8360	256	20	it	it	PRON
ap-8360	256	21	is	be	AUX
ap-8360	256	22	best	good	ADJ
ap-8360	256	23	to	to	PART
ap-8360	256	24	use	use	VERB
ap-8360	256	25	a	a	DET
ap-8360	256	26	scanning	scanning	NOUN
ap-8360	256	27	speed	speed	NOUN
ap-8360	256	28	below	below	ADP
ap-8360	256	29	4	4	NUM
ap-8360	256	30	m	m	NOUN
ap-8360	256	31	/	/	SYM
ap-8360	256	32	s	s	PROPN
ap-8360	256	33	,	,	PUNCT
ap-8360	256	34	especially	especially	ADV
ap-8360	256	35	for	for	ADP
ap-8360	256	36	geometrically	geometrically	ADV
ap-8360	256	37	complex	complex	ADJ
ap-8360	256	38	structures	structure	NOUN
ap-8360	256	39	.	.	PUNCT
ap-8360	257	1	the	the	DET
ap-8360	257	2	sky	sky	NOUN
ap-8360	257	3	-	-	PUNCT
ap-8360	257	4	writting	writting	NOUN
ap-8360	257	5	function	function	NOUN
ap-8360	257	6	uses	use	VERB
ap-8360	257	7	predictive	predictive	ADJ
ap-8360	257	8	algorithms	algorithm	NOUN
ap-8360	257	9	for	for	ADP
ap-8360	257	10	eliminating	eliminate	VERB
ap-8360	257	11	acceleration	acceleration	NOUN
ap-8360	257	12	and	and	CCONJ
ap-8360	257	13	deceleration	deceleration	NOUN
ap-8360	257	14	of	of	ADP
ap-8360	257	15	the	the	DET
ap-8360	257	16	galvoscanner	galvoscanner	NOUN
ap-8360	257	17	mirrors	mirror	NOUN
ap-8360	257	18	.	.	PUNCT
ap-8360	258	1	two	two	NUM
ap-8360	258	2	different	different	ADJ
ap-8360	258	3	structures	structure	NOUN
ap-8360	258	4	were	be	AUX
ap-8360	258	5	chosen	choose	VERB
ap-8360	258	6	for	for	ADP
ap-8360	258	7	the	the	DET
ap-8360	258	8	demonstration	demonstration	NOUN
ap-8360	258	9	of	of	ADP
ap-8360	258	10	the	the	DET
ap-8360	258	11	developed	develop	VERB
ap-8360	258	12	processing	processing	NOUN
ap-8360	258	13	parameters	parameter	NOUN
ap-8360	258	14	,	,	PUNCT
ap-8360	258	15	namely	namely	ADV
ap-8360	258	16	dot	dot	NOUN
ap-8360	258	17	and	and	CCONJ
ap-8360	258	18	honeycomb	honeycomb	NOUN
ap-8360	258	19	structures	structure	NOUN
ap-8360	258	20	.	.	PUNCT
ap-8360	259	1	the	the	DET
ap-8360	259	2	dot	dot	NOUN
ap-8360	259	3	structure	structure	NOUN
ap-8360	259	4	was	be	AUX
ap-8360	259	5	fabricated	fabricate	VERB
ap-8360	259	6	using	use	VERB
ap-8360	259	7	a	a	DET
ap-8360	259	8	different	different	ADJ
ap-8360	259	9	number	number	NOUN
ap-8360	259	10	of	of	ADP
ap-8360	259	11	pulses	pulse	NOUN
ap-8360	259	12	in	in	ADP
ap-8360	259	13	one	one	NUM
ap-8360	259	14	place	place	NOUN
ap-8360	259	15	with	with	ADP
ap-8360	259	16	a	a	DET
ap-8360	259	17	defined	define	VERB
ap-8360	259	18	fluence	fluence	NOUN
ap-8360	259	19	.	.	PUNCT
ap-8360	260	1	the	the	DET
ap-8360	260	2	honeycomb	honeycomb	NOUN
ap-8360	260	3	structure	structure	NOUN
ap-8360	260	4	was	be	AUX
ap-8360	260	5	based	base	VERB
ap-8360	260	6	on	on	ADP
ap-8360	260	7	a	a	DET
ap-8360	260	8	cad	cad	NOUN
ap-8360	260	9	model	model	NOUN
ap-8360	260	10	.	.	PUNCT
ap-8360	261	1	the	the	DET
ap-8360	261	2	laser	laser	NOUN
ap-8360	261	3	beam	beam	NOUN
ap-8360	261	4	moved	move	VERB
ap-8360	261	5	through	through	ADP
ap-8360	261	6	the	the	DET
ap-8360	261	7	lines	line	NOUN
ap-8360	261	8	defined	define	VERB
ap-8360	261	9	by	by	ADP
ap-8360	261	10	the	the	DET
ap-8360	261	11	model	model	NOUN
ap-8360	261	12	.	.	PUNCT
ap-8360	262	1	both	both	DET
ap-8360	262	2	structures	structure	NOUN
ap-8360	262	3	had	have	VERB
ap-8360	262	4	a	a	DET
ap-8360	262	5	similar	similar	ADJ
ap-8360	262	6	depth	depth	NOUN
ap-8360	262	7	of	of	ADP
ap-8360	262	8	h	h	NOUN
ap-8360	262	9	=	=	NOUN
ap-8360	262	10	10	10	NUM
ap-8360	262	11	µm	µm	NOUN
ap-8360	262	12	.	.	PUNCT
ap-8360	263	1	the	the	DET
ap-8360	263	2	results	result	NOUN
ap-8360	263	3	of	of	ADP
ap-8360	263	4	the	the	DET
ap-8360	263	5	dot	dot	NOUN
ap-8360	263	6	structure	structure	NOUN
ap-8360	263	7	measurement	measurement	NOUN
ap-8360	263	8	are	be	AUX
ap-8360	263	9	presented	present	VERB
ap-8360	263	10	in	in	ADP
ap-8360	263	11	the	the	DET
ap-8360	263	12	table	table	NOUN
ap-8360	263	13	10	10	NUM
ap-8360	263	14	.	.	PUNCT
ap-8360	264	1	structure	structure	NOUN
ap-8360	264	2	depth	depth	NOUN
ap-8360	264	3	,	,	PUNCT
ap-8360	264	4	diameter	diameter	NOUN
ap-8360	264	5	and	and	CCONJ
ap-8360	264	6	line	line	NOUN
ap-8360	264	7	width	width	NOUN
ap-8360	264	8	were	be	AUX
ap-8360	264	9	measured	measure	VERB
ap-8360	264	10	from	from	ADP
ap-8360	264	11	10	10	NUM
ap-8360	264	12	profile	profile	NOUN
ap-8360	264	13	lines	line	NOUN
ap-8360	264	14	across	across	ADP
ap-8360	264	15	the	the	DET
ap-8360	264	16	sample	sample	NOUN
ap-8360	264	17	.	.	PUNCT
ap-8360	265	1	the	the	DET
ap-8360	265	2	shape	shape	NOUN
ap-8360	265	3	of	of	ADP
ap-8360	265	4	the	the	DET
ap-8360	265	5	fabricated	fabricate	VERB
ap-8360	265	6	dots	dot	NOUN
ap-8360	265	7	was	be	AUX
ap-8360	265	8	good	good	ADJ
ap-8360	265	9	without	without	ADP
ap-8360	265	10	material	material	NOUN
ap-8360	265	11	ejection	ejection	NOUN
ap-8360	265	12	over	over	ADP
ap-8360	265	13	the	the	DET
ap-8360	265	14	edge	edge	NOUN
ap-8360	265	15	of	of	ADP
ap-8360	265	16	the	the	DET
ap-8360	265	17	crater	crater	NOUN
ap-8360	265	18	.	.	PUNCT
ap-8360	266	1	all	all	DET
ap-8360	266	2	the	the	DET
ap-8360	266	3	dots	dot	NOUN
ap-8360	266	4	also	also	ADV
ap-8360	266	5	had	have	VERB
ap-8360	266	6	a	a	DET
ap-8360	266	7	very	very	ADV
ap-8360	266	8	good	good	ADJ
ap-8360	266	9	circularity	circularity	NOUN
ap-8360	266	10	and	and	CCONJ
ap-8360	266	11	the	the	DET
ap-8360	266	12	proposed	propose	VERB
ap-8360	266	13	depth	depth	NOUN
ap-8360	266	14	was	be	AUX
ap-8360	266	15	achieved	achieve	VERB
ap-8360	266	16	.	.	PUNCT
ap-8360	267	1	the	the	DET
ap-8360	267	2	honeycomb	honeycomb	NOUN
ap-8360	267	3	structure	structure	NOUN
ap-8360	267	4	also	also	ADV
ap-8360	267	5	achieved	achieve	VERB
ap-8360	267	6	good	good	ADJ
ap-8360	267	7	compliance	compliance	NOUN
ap-8360	267	8	with	with	ADP
ap-8360	267	9	the	the	DET
ap-8360	267	10	proposed	propose	VERB
ap-8360	267	11	dimensions	dimension	NOUN
ap-8360	267	12	;	;	PUNCT
ap-8360	267	13	see	see	VERB
ap-8360	267	14	table	table	NOUN
ap-8360	267	15	11	11	NUM
ap-8360	267	16	.	.	PUNCT
ap-8360	268	1	a	a	DET
ap-8360	268	2	repetition	repetition	NOUN
ap-8360	268	3	rate	rate	NOUN
ap-8360	268	4	of	of	ADP
ap-8360	268	5	600	600	NUM
ap-8360	268	6	khz	khz	NOUN
ap-8360	268	7	and	and	CCONJ
ap-8360	268	8	scanning	scan	VERB
ap-8360	268	9	speed	speed	NOUN
ap-8360	268	10	of	of	ADP
ap-8360	268	11	3.9	3.9	NUM
ap-8360	268	12	m	m	NOUN
ap-8360	268	13	/	/	SYM
ap-8360	268	14	s	s	PART
ap-8360	268	15	were	be	AUX
ap-8360	268	16	used	use	VERB
ap-8360	268	17	for	for	ADP
ap-8360	268	18	structuring	structure	VERB
ap-8360	268	19	with	with	ADP
ap-8360	268	20	fluences	fluence	NOUN
ap-8360	268	21	ranging	range	VERB
ap-8360	268	22	from	from	ADP
ap-8360	268	23	f	f	PROPN
ap-8360	268	24	=	=	PROPN
ap-8360	268	25	1.27	1.27	NUM
ap-8360	268	26	to	to	PART
ap-8360	268	27	1.84	1.84	NUM
ap-8360	268	28	j	j	PROPN
ap-8360	268	29	/	/	SYM
ap-8360	268	30	cm2	cm2	PROPN
ap-8360	268	31	according	accord	VERB
ap-8360	268	32	to	to	ADP
ap-8360	268	33	the	the	DET
ap-8360	268	34	fabricated	fabricate	VERB
ap-8360	268	35	material	material	NOUN
ap-8360	268	36	.	.	PUNCT
ap-8360	269	1	the	the	DET
ap-8360	269	2	proposed	propose	VERB
ap-8360	269	3	depth	depth	NOUN
ap-8360	269	4	was	be	AUX
ap-8360	269	5	achieved	achieve	VERB
ap-8360	269	6	by	by	ADP
ap-8360	269	7	a	a	DET
ap-8360	269	8	defined	define	VERB
ap-8360	269	9	number	number	NOUN
ap-8360	269	10	of	of	ADP
ap-8360	269	11	repetitions	repetition	NOUN
ap-8360	269	12	ranging	range	VERB
ap-8360	269	13	from	from	ADP
ap-8360	269	14	24	24	NUM
ap-8360	269	15	to	to	ADP
ap-8360	269	16	28	28	NUM
ap-8360	269	17	.	.	PUNCT
ap-8360	270	1	a	a	DET
ap-8360	270	2	very	very	ADV
ap-8360	270	3	precise	precise	ADJ
ap-8360	270	4	structure	structure	NOUN
ap-8360	270	5	depth	depth	NOUN
ap-8360	270	6	can	can	AUX
ap-8360	270	7	be	be	AUX
ap-8360	270	8	obtained	obtain	VERB
ap-8360	270	9	with	with	ADP
ap-8360	270	10	this	this	DET
ap-8360	270	11	strategy	strategy	NOUN
ap-8360	270	12	,	,	PUNCT
ap-8360	270	13	with	with	ADP
ap-8360	270	14	a	a	DET
ap-8360	270	15	deviation	deviation	NOUN
ap-8360	270	16	of	of	ADP
ap-8360	270	17	only	only	ADV
ap-8360	270	18	a	a	DET
ap-8360	270	19	few	few	ADJ
ap-8360	270	20	tens	ten	NOUN
ap-8360	270	21	of	of	ADP
ap-8360	270	22	micrometre	micrometre	NOUN
ap-8360	270	23	.	.	PUNCT
ap-8360	271	1	an	an	DET
ap-8360	271	2	example	example	NOUN
ap-8360	271	3	of	of	ADP
ap-8360	271	4	a	a	DET
ap-8360	271	5	2d	2d	NUM
ap-8360	271	6	view	view	NOUN
ap-8360	271	7	and	and	CCONJ
ap-8360	271	8	depth	depth	NOUN
ap-8360	271	9	profile	profile	NOUN
ap-8360	271	10	of	of	ADP
ap-8360	271	11	the	the	DET
ap-8360	271	12	dot	dot	NOUN
ap-8360	271	13	structure	structure	NOUN
ap-8360	271	14	for	for	ADP
ap-8360	271	15	each	each	DET
ap-8360	271	16	material	material	NOUN
ap-8360	271	17	can	can	AUX
ap-8360	271	18	be	be	AUX
ap-8360	271	19	seen	see	VERB
ap-8360	271	20	in	in	ADP
ap-8360	271	21	appendix	appendix	NOUN
ap-8360	271	22	a	a	DET
ap-8360	271	23	figure	figure	NOUN
ap-8360	271	24	10	10	NUM
ap-8360	271	25	and	and	CCONJ
ap-8360	271	26	for	for	ADP
ap-8360	271	27	the	the	DET
ap-8360	271	28	honeycomb	honeycomb	NOUN
ap-8360	271	29	structure	structure	NOUN
ap-8360	271	30	in	in	ADP
ap-8360	271	31	appendix	appendix	NOUN
ap-8360	271	32	a	a	DET
ap-8360	271	33	figure	figure	NOUN
ap-8360	271	34	11	11	NUM
ap-8360	271	35	.	.	PUNCT
ap-8360	272	1	the	the	DET
ap-8360	272	2	designed	design	VERB
ap-8360	272	3	and	and	CCONJ
ap-8360	272	4	fabricated	fabricate	VERB
ap-8360	272	5	structures	structure	NOUN
ap-8360	272	6	have	have	VERB
ap-8360	272	7	the	the	DET
ap-8360	272	8	potential	potential	NOUN
ap-8360	272	9	to	to	PART
ap-8360	272	10	improve	improve	VERB
ap-8360	272	11	friction	friction	NOUN
ap-8360	272	12	properties	property	NOUN
ap-8360	272	13	of	of	ADP
ap-8360	272	14	materials	material	NOUN
ap-8360	272	15	by	by	ADP
ap-8360	272	16	decreasing	decrease	VERB
ap-8360	272	17	the	the	DET
ap-8360	272	18	coefficient	coefficient	NOUN
ap-8360	272	19	of	of	ADP
ap-8360	272	20	friction	friction	NOUN
ap-8360	272	21	as	as	SCONJ
ap-8360	272	22	reported	report	VERB
ap-8360	272	23	by	by	ADP
ap-8360	272	24	[	[	PUNCT
ap-8360	272	25	34	34	NUM
ap-8360	272	26	]	]	PUNCT
ap-8360	272	27	.	.	PUNCT
ap-8360	273	1	structured	structured	ADJ
ap-8360	273	2	surfaces	surface	NOUN
ap-8360	273	3	can	can	AUX
ap-8360	273	4	be	be	AUX
ap-8360	273	5	beneficial	beneficial	ADJ
ap-8360	273	6	in	in	ADP
ap-8360	273	7	moving	move	VERB
ap-8360	273	8	mechanical	mechanical	ADJ
ap-8360	273	9	components	component	NOUN
ap-8360	273	10	made	make	VERB
ap-8360	273	11	from	from	ADP
ap-8360	273	12	advanced	advanced	ADJ
ap-8360	273	13	materials	material	NOUN
ap-8360	273	14	such	such	ADJ
ap-8360	273	15	as	as	ADP
ap-8360	273	16	mechanical	mechanical	ADJ
ap-8360	273	17	seals	seal	NOUN
ap-8360	273	18	,	,	PUNCT
ap-8360	273	19	piston	piston	NOUN
ap-8360	273	20	rings	ring	NOUN
ap-8360	273	21	or	or	CCONJ
ap-8360	273	22	thrust	thrust	VERB
ap-8360	273	23	bearings	bearing	NOUN
ap-8360	273	24	.	.	PUNCT
ap-8360	274	1	5	5	X
ap-8360	274	2	.	.	X
ap-8360	274	3	conclusions	conclusion	NOUN
ap-8360	274	4	based	base	VERB
ap-8360	274	5	on	on	ADP
ap-8360	274	6	the	the	DET
ap-8360	274	7	observations	observation	NOUN
ap-8360	274	8	of	of	ADP
ap-8360	274	9	the	the	DET
ap-8360	274	10	current	current	ADJ
ap-8360	274	11	study	study	NOUN
ap-8360	274	12	,	,	PUNCT
ap-8360	274	13	the	the	DET
ap-8360	274	14	following	follow	VERB
ap-8360	274	15	conclusions	conclusion	NOUN
ap-8360	274	16	can	can	AUX
ap-8360	274	17	be	be	AUX
ap-8360	274	18	drawn	draw	VERB
ap-8360	274	19	:	:	PUNCT
ap-8360	274	20	•	•	ADP
ap-8360	274	21	the	the	DET
ap-8360	274	22	ideal	ideal	ADJ
ap-8360	274	23	hatching	hatch	VERB
ap-8360	274	24	angle	angle	NOUN
ap-8360	274	25	was	be	AUX
ap-8360	274	26	found	find	VERB
ap-8360	274	27	in	in	ADP
ap-8360	274	28	the	the	DET
ap-8360	274	29	preexperiment	preexperiment	NOUN
ap-8360	274	30	.	.	PUNCT
ap-8360	275	1	a	a	DET
ap-8360	275	2	hatching	hatch	VERB
ap-8360	275	3	angle	angle	NOUN
ap-8360	275	4	of	of	ADP
ap-8360	275	5	17	17	NUM
ap-8360	275	6	°	°	PROPN
ap-8360	275	7	had	have	VERB
ap-8360	275	8	the	the	DET
ap-8360	275	9	lowest	low	ADJ
ap-8360	275	10	impact	impact	NOUN
ap-8360	275	11	on	on	ADP
ap-8360	275	12	surface	surface	NOUN
ap-8360	275	13	roughness	roughness	NOUN
ap-8360	275	14	.	.	PUNCT
ap-8360	276	1	using	use	VERB
ap-8360	276	2	odd	odd	ADJ
ap-8360	276	3	hatching	hatch	VERB
ap-8360	276	4	angles	angle	NOUN
ap-8360	276	5	has	have	VERB
ap-8360	276	6	the	the	DET
ap-8360	276	7	advantage	advantage	NOUN
ap-8360	276	8	that	that	SCONJ
ap-8360	276	9	the	the	DET
ap-8360	276	10	laser	laser	NOUN
ap-8360	276	11	beam	beam	NOUN
ap-8360	276	12	never	never	ADV
ap-8360	276	13	scans	scan	VERB
ap-8360	276	14	twice	twice	ADV
ap-8360	276	15	in	in	ADP
ap-8360	276	16	the	the	DET
ap-8360	276	17	same	same	ADJ
ap-8360	276	18	path	path	NOUN
ap-8360	276	19	.	.	PUNCT
ap-8360	277	1	•	•	NOUN
ap-8360	277	2	the	the	DET
ap-8360	277	3	ablation	ablation	NOUN
ap-8360	277	4	threshold	threshold	NOUN
ap-8360	277	5	was	be	AUX
ap-8360	277	6	measured	measure	VERB
ap-8360	277	7	for	for	ADP
ap-8360	277	8	all	all	DET
ap-8360	277	9	the	the	DET
ap-8360	277	10	materials	material	NOUN
ap-8360	277	11	using	use	VERB
ap-8360	277	12	three	three	NUM
ap-8360	277	13	harmonic	harmonic	ADJ
ap-8360	277	14	wavelengths	wavelength	NOUN
ap-8360	277	15	.	.	PUNCT
ap-8360	278	1	the	the	DET
ap-8360	278	2	highest	high	ADJ
ap-8360	278	3	fluence	fluence	NOUN
ap-8360	278	4	threshold	threshold	NOUN
ap-8360	278	5	value	value	NOUN
ap-8360	278	6	was	be	AUX
ap-8360	278	7	found	find	VERB
ap-8360	278	8	for	for	ADP
ap-8360	278	9	ti6al4v	ti6al4v	X
ap-8360	278	10	titanium	titanium	NOUN
ap-8360	278	11	alloy	alloy	NOUN
ap-8360	278	12	when	when	SCONJ
ap-8360	278	13	using	use	VERB
ap-8360	278	14	the	the	DET
ap-8360	278	15	first	first	ADJ
ap-8360	278	16	harmonic	harmonic	NOUN
ap-8360	278	17	(	(	PUNCT
ap-8360	278	18	1030	1030	NUM
ap-8360	278	19	nm	nm	NOUN
ap-8360	278	20	)	)	PUNCT
ap-8360	278	21	.	.	PUNCT
ap-8360	279	1	conversely	conversely	ADV
ap-8360	279	2	,	,	PUNCT
ap-8360	279	3	using	use	VERB
ap-8360	279	4	the	the	DET
ap-8360	279	5	third	third	ADJ
ap-8360	279	6	harmonic	harmonic	NOUN
ap-8360	279	7	(	(	PUNCT
ap-8360	279	8	343	343	NUM
ap-8360	279	9	nm	nm	NOUN
ap-8360	279	10	)	)	PUNCT
ap-8360	279	11	led	lead	VERB
ap-8360	279	12	to	to	ADP
ap-8360	279	13	the	the	DET
ap-8360	279	14	lowest	low	ADJ
ap-8360	279	15	ablation	ablation	NOUN
ap-8360	279	16	thresholds	threshold	NOUN
ap-8360	279	17	due	due	ADJ
ap-8360	279	18	to	to	ADP
ap-8360	279	19	the	the	DET
ap-8360	279	20	high	high	ADJ
ap-8360	279	21	energy	energy	NOUN
ap-8360	279	22	of	of	ADP
ap-8360	279	23	the	the	DET
ap-8360	279	24	incoming	incoming	ADJ
ap-8360	279	25	photons	photon	NOUN
ap-8360	279	26	.	.	PUNCT
ap-8360	280	1	•	•	NUM
ap-8360	280	2	the	the	DET
ap-8360	280	3	highest	high	ADJ
ap-8360	280	4	ablation	ablation	NOUN
ap-8360	280	5	rates	rate	NOUN
ap-8360	280	6	were	be	AUX
ap-8360	280	7	obtained	obtain	VERB
ap-8360	280	8	for	for	ADP
ap-8360	280	9	ti6al4v	ti6al4v	PROPN
ap-8360	280	10	,	,	PUNCT
ap-8360	280	11	especially	especially	ADV
ap-8360	280	12	for	for	ADP
ap-8360	280	13	ih	ih	PROPN
ap-8360	280	14	and	and	CCONJ
ap-8360	280	15	iih	iih	PROPN
ap-8360	280	16	,	,	PUNCT
ap-8360	280	17	because	because	SCONJ
ap-8360	280	18	ti6al4v	ti6al4v	PRON
ap-8360	280	19	had	have	VERB
ap-8360	280	20	the	the	DET
ap-8360	280	21	lowest	low	ADJ
ap-8360	280	22	thermal	thermal	ADJ
ap-8360	280	23	conductivity	conductivity	NOUN
ap-8360	280	24	of	of	ADP
ap-8360	280	25	all	all	DET
ap-8360	280	26	the	the	DET
ap-8360	280	27	tested	test	VERB
ap-8360	280	28	materials	material	NOUN
ap-8360	280	29	.	.	PUNCT
ap-8360	281	1	for	for	ADP
ap-8360	281	2	higher	high	ADJ
ap-8360	281	3	f	f	NOUN
ap-8360	281	4	/	/	SYM
ap-8360	281	5	fth	fth	NOUN
ap-8360	281	6	ratio	ratio	NOUN
ap-8360	281	7	,	,	PUNCT
ap-8360	281	8	the	the	DET
ap-8360	281	9	differences	difference	NOUN
ap-8360	281	10	become	become	VERB
ap-8360	281	11	smaller	small	ADJ
ap-8360	281	12	.	.	PUNCT
ap-8360	282	1	however	however	ADV
ap-8360	282	2	,	,	PUNCT
ap-8360	282	3	the	the	DET
ap-8360	282	4	surface	surface	NOUN
ap-8360	282	5	roughness	roughness	NOUN
ap-8360	282	6	expressed	express	VERB
ap-8360	282	7	by	by	ADP
ap-8360	282	8	sa	sa	PROPN
ap-8360	283	1	[	[	X
ap-8360	283	2	µm	µm	X
ap-8360	283	3	]	]	PUNCT
ap-8360	283	4	was	be	AUX
ap-8360	283	5	the	the	DET
ap-8360	283	6	highest	high	ADJ
ap-8360	283	7	of	of	ADP
ap-8360	283	8	all	all	DET
ap-8360	283	9	the	the	DET
ap-8360	283	10	materials	material	NOUN
ap-8360	283	11	.	.	PUNCT
ap-8360	284	1	also	also	ADV
ap-8360	284	2	,	,	PUNCT
ap-8360	284	3	some	some	DET
ap-8360	284	4	cone	cone	NOUN
ap-8360	284	5	-	-	PUNCT
ap-8360	284	6	like	like	ADJ
ap-8360	284	7	structures	structure	NOUN
ap-8360	284	8	43	43	NUM
ap-8360	284	9	t.	t.	PROPN
ap-8360	284	10	primus	primus	PROPN
ap-8360	284	11	,	,	PUNCT
ap-8360	284	12	m.	m.	NOUN
ap-8360	284	13	novák	novák	PROPN
ap-8360	284	14	,	,	PUNCT
ap-8360	284	15	p.	p.	PROPN
ap-8360	284	16	zeman	zeman	PROPN
ap-8360	284	17	,	,	PUNCT
ap-8360	284	18	f.	f.	PROPN
ap-8360	284	19	holešovský	holešovský	PROPN
ap-8360	284	20	acta	acta	PROPN
ap-8360	284	21	polytechnica	polytechnica	PROPN
ap-8360	284	22	material	material	NOUN
ap-8360	284	23	f	f	PROPN
ap-8360	285	1	[	[	X
ap-8360	285	2	j	j	PROPN
ap-8360	285	3	/	/	SYM
ap-8360	285	4	cm2	cm2	NOUN
ap-8360	285	5	]	]	X
ap-8360	285	6	number	number	NOUN
ap-8360	285	7	of	of	ADP
ap-8360	285	8	pulses	pulse	NOUN
ap-8360	285	9	[	[	PUNCT
ap-8360	285	10	]	]	X
ap-8360	285	11	h	h	NOUN
ap-8360	286	1	[	[	X
ap-8360	286	2	µm	µm	X
ap-8360	286	3	]	]	X
ap-8360	286	4	d	d	X
ap-8360	286	5	[	[	X
ap-8360	286	6	µm	µm	X
ap-8360	286	7	]	]	X
ap-8360	286	8	tool	tool	NOUN
ap-8360	286	9	steel	steel	NOUN
ap-8360	286	10	0.573	0.573	NUM
ap-8360	286	11	250	250	NUM
ap-8360	286	12	10.37	10.37	NUM
ap-8360	286	13	±	±	NUM
ap-8360	286	14	0.31	0.31	NUM
ap-8360	286	15	28.5	28.5	NUM
ap-8360	286	16	±	±	NUM
ap-8360	286	17	0.77	0.77	NUM
ap-8360	286	18	inconel	inconel	NOUN
ap-8360	286	19	718	718	NUM
ap-8360	286	20	0.573	0.573	NUM
ap-8360	286	21	210	210	NUM
ap-8360	286	22	10.17	10.17	NUM
ap-8360	286	23	±	±	NUM
ap-8360	286	24	0.23	0.23	NUM
ap-8360	286	25	29	29	NUM
ap-8360	286	26	±	±	NUM
ap-8360	286	27	0.73	0.73	NUM
ap-8360	286	28	ti6al4v	ti6al4v	SYM
ap-8360	286	29	0.456	0.456	NUM
ap-8360	286	30	180	180	NUM
ap-8360	286	31	9.77	9.77	NUM
ap-8360	286	32	±	±	NUM
ap-8360	286	33	0.19	0.19	NUM
ap-8360	286	34	28	28	NUM
ap-8360	286	35	±	±	NOUN
ap-8360	286	36	0.65	0.65	NUM
ap-8360	286	37	stainless	stainless	ADJ
ap-8360	286	38	steel	steel	NOUN
ap-8360	286	39	0.573	0.573	NUM
ap-8360	286	40	260	260	NUM
ap-8360	286	41	10.18	10.18	NUM
ap-8360	286	42	±	±	NUM
ap-8360	286	43	0.28	0.28	NUM
ap-8360	286	44	28.4	28.4	NUM
ap-8360	286	45	±	±	NUM
ap-8360	286	46	0.82	0.82	NUM
ap-8360	286	47	table	table	NOUN
ap-8360	286	48	10	10	NUM
ap-8360	286	49	.	.	PUNCT
ap-8360	287	1	laser	laser	NOUN
ap-8360	287	2	parameters	parameter	NOUN
ap-8360	287	3	used	use	VERB
ap-8360	287	4	for	for	ADP
ap-8360	287	5	dot	dot	NOUN
ap-8360	287	6	structure	structure	NOUN
ap-8360	287	7	fabrication	fabrication	NOUN
ap-8360	287	8	with	with	ADP
ap-8360	287	9	measured	measure	VERB
ap-8360	287	10	results	result	NOUN
ap-8360	287	11	of	of	ADP
ap-8360	287	12	hole	hole	NOUN
ap-8360	287	13	depth	depth	NOUN
ap-8360	287	14	(	(	PUNCT
ap-8360	287	15	h	h	NOUN
ap-8360	287	16	)	)	PUNCT
ap-8360	287	17	and	and	CCONJ
ap-8360	287	18	diameter	diameter	NOUN
ap-8360	287	19	(	(	PUNCT
ap-8360	287	20	d	d	NOUN
ap-8360	287	21	)	)	PUNCT
ap-8360	287	22	.	.	PUNCT
ap-8360	288	1	material	material	NOUN
ap-8360	288	2	f	f	PROPN
ap-8360	289	1	[	[	X
ap-8360	289	2	j	j	PROPN
ap-8360	289	3	/	/	SYM
ap-8360	289	4	cm2	cm2	NOUN
ap-8360	289	5	]	]	X
ap-8360	289	6	number	number	NOUN
ap-8360	289	7	sx	sx	PROPN
ap-8360	289	8	,	,	PUNCT
ap-8360	289	9	hy	hy	NOUN
ap-8360	289	10	h	h	NOUN
ap-8360	290	1	[	[	X
ap-8360	290	2	µm	µm	X
ap-8360	290	3	]	]	X
ap-8360	290	4	r	r	NOUN
ap-8360	290	5	[	[	X
ap-8360	290	6	µm	µm	X
ap-8360	290	7	]	]	PUNCT
ap-8360	290	8	of	of	ADP
ap-8360	290	9	pulses	pulse	NOUN
ap-8360	290	10	[	[	X
ap-8360	290	11	-	-	X
ap-8360	290	12	]	]	X
ap-8360	291	1	[	[	X
ap-8360	291	2	%	%	X
ap-8360	291	3	]	]	X
ap-8360	291	4	tool	tool	NOUN
ap-8360	291	5	steel	steel	NOUN
ap-8360	291	6	1.56	1.56	NUM
ap-8360	291	7	26	26	NUM
ap-8360	291	8	90	90	NUM
ap-8360	291	9	9.56	9.56	NUM
ap-8360	291	10	±	±	NUM
ap-8360	291	11	0.22	0.22	NUM
ap-8360	291	12	33.5	33.5	NUM
ap-8360	291	13	±	±	NUM
ap-8360	291	14	0.52	0.52	NUM
ap-8360	291	15	inconel	inconel	NOUN
ap-8360	291	16	718	718	NUM
ap-8360	291	17	1.56	1.56	NUM
ap-8360	291	18	24	24	NUM
ap-8360	291	19	90	90	NUM
ap-8360	291	20	9.57	9.57	NUM
ap-8360	291	21	±	±	NUM
ap-8360	291	22	0.25	0.25	NUM
ap-8360	291	23	36	36	NUM
ap-8360	291	24	±	±	NUM
ap-8360	291	25	0.65	0.65	NUM
ap-8360	291	26	ti6al4v	ti6al4v	SYM
ap-8360	291	27	1.27	1.27	NUM
ap-8360	291	28	24	24	NUM
ap-8360	291	29	90	90	NUM
ap-8360	291	30	10.14	10.14	NUM
ap-8360	291	31	±	±	NUM
ap-8360	291	32	0.34	0.34	NUM
ap-8360	291	33	31.3	31.3	NUM
ap-8360	291	34	±	±	NUM
ap-8360	291	35	0.47	0.47	NUM
ap-8360	291	36	stainless	stainless	ADJ
ap-8360	291	37	steel	steel	NOUN
ap-8360	291	38	1.84	1.84	NUM
ap-8360	291	39	28	28	NUM
ap-8360	291	40	90	90	NUM
ap-8360	291	41	10.2	10.2	NUM
ap-8360	291	42	±	±	NUM
ap-8360	291	43	0.18	0.18	NUM
ap-8360	291	44	37.1	37.1	NUM
ap-8360	291	45	±	±	NUM
ap-8360	291	46	0.84	0.84	NUM
ap-8360	291	47	table	table	NOUN
ap-8360	291	48	11	11	NUM
ap-8360	291	49	.	.	PUNCT
ap-8360	292	1	laser	laser	NOUN
ap-8360	292	2	and	and	CCONJ
ap-8360	292	3	scanning	scan	VERB
ap-8360	292	4	parameters	parameter	NOUN
ap-8360	292	5	used	use	VERB
ap-8360	292	6	for	for	ADP
ap-8360	292	7	honeycomb	honeycomb	NOUN
ap-8360	292	8	structure	structure	NOUN
ap-8360	292	9	fabrication	fabrication	NOUN
ap-8360	292	10	with	with	ADP
ap-8360	292	11	measured	measure	VERB
ap-8360	292	12	results	result	NOUN
ap-8360	292	13	of	of	ADP
ap-8360	292	14	structure	structure	NOUN
ap-8360	292	15	depth	depth	NOUN
ap-8360	292	16	(	(	PUNCT
ap-8360	292	17	h	h	NOUN
ap-8360	292	18	)	)	PUNCT
ap-8360	292	19	and	and	CCONJ
ap-8360	292	20	line	line	NOUN
ap-8360	292	21	width	width	NOUN
ap-8360	292	22	(	(	PUNCT
ap-8360	292	23	r	r	NOUN
ap-8360	292	24	)	)	PUNCT
ap-8360	292	25	.	.	PUNCT
ap-8360	293	1	formed	form	VERB
ap-8360	293	2	on	on	ADP
ap-8360	293	3	the	the	DET
ap-8360	293	4	lasered	lasere	VERB
ap-8360	293	5	surfaces	surface	NOUN
ap-8360	293	6	for	for	ADP
ap-8360	293	7	lower	low	ADJ
ap-8360	293	8	fluences	fluence	NOUN
ap-8360	293	9	.	.	PUNCT
ap-8360	294	1	these	these	DET
ap-8360	294	2	effects	effect	NOUN
ap-8360	294	3	can	can	AUX
ap-8360	294	4	be	be	AUX
ap-8360	294	5	eliminated	eliminate	VERB
ap-8360	294	6	by	by	ADP
ap-8360	294	7	using	use	VERB
ap-8360	294	8	iiih	iiih	NOUN
ap-8360	294	9	.	.	PUNCT
ap-8360	295	1	•	•	ADP
ap-8360	295	2	for	for	ADP
ap-8360	295	3	iiih	iiih	NOUN
ap-8360	295	4	,	,	PUNCT
ap-8360	295	5	the	the	DET
ap-8360	295	6	differences	difference	NOUN
ap-8360	295	7	between	between	ADP
ap-8360	295	8	the	the	DET
ap-8360	295	9	ablation	ablation	NOUN
ap-8360	295	10	behaviour	behaviour	NOUN
ap-8360	295	11	of	of	ADP
ap-8360	295	12	all	all	DET
ap-8360	295	13	the	the	DET
ap-8360	295	14	materials	material	NOUN
ap-8360	295	15	were	be	AUX
ap-8360	295	16	negligible	negligible	ADJ
ap-8360	295	17	.	.	PUNCT
ap-8360	296	1	for	for	ADP
ap-8360	296	2	shorter	short	ADJ
ap-8360	296	3	wavelengths	wavelength	NOUN
ap-8360	296	4	,	,	PUNCT
ap-8360	296	5	the	the	DET
ap-8360	296	6	absorptivity	absorptivity	NOUN
ap-8360	296	7	of	of	ADP
ap-8360	296	8	metals	metal	NOUN
ap-8360	296	9	increases	increase	NOUN
ap-8360	296	10	and	and	CCONJ
ap-8360	296	11	at	at	ADP
ap-8360	296	12	the	the	DET
ap-8360	296	13	same	same	ADJ
ap-8360	296	14	time	time	NOUN
ap-8360	296	15	,	,	PUNCT
ap-8360	296	16	the	the	DET
ap-8360	296	17	effect	effect	NOUN
ap-8360	296	18	of	of	ADP
ap-8360	296	19	thermal	thermal	ADJ
ap-8360	296	20	conductivity	conductivity	NOUN
ap-8360	296	21	decreases	decrease	NOUN
ap-8360	296	22	.	.	PUNCT
ap-8360	297	1	•	•	NUM
ap-8360	297	2	the	the	DET
ap-8360	297	3	experiment	experiment	NOUN
ap-8360	297	4	for	for	ADP
ap-8360	297	5	increasing	increase	VERB
ap-8360	297	6	productivity	productivity	NOUN
ap-8360	297	7	was	be	AUX
ap-8360	297	8	successful	successful	ADJ
ap-8360	297	9	.	.	PUNCT
ap-8360	298	1	it	it	PRON
ap-8360	298	2	was	be	AUX
ap-8360	298	3	proved	prove	VERB
ap-8360	298	4	that	that	SCONJ
ap-8360	298	5	the	the	DET
ap-8360	298	6	productivity	productivity	NOUN
ap-8360	298	7	can	can	AUX
ap-8360	298	8	be	be	AUX
ap-8360	298	9	increased	increase	VERB
ap-8360	298	10	more	more	ADJ
ap-8360	298	11	than	than	ADP
ap-8360	298	12	five	five	NUM
ap-8360	298	13	-	-	NOUN
ap-8360	298	14	fold	fold	ADJ
ap-8360	298	15	.	.	PUNCT
ap-8360	299	1	at	at	ADP
ap-8360	299	2	the	the	DET
ap-8360	299	3	same	same	ADJ
ap-8360	299	4	time	time	NOUN
ap-8360	299	5	,	,	PUNCT
ap-8360	299	6	a	a	DET
ap-8360	299	7	higher	high	ADJ
ap-8360	299	8	scanning	scanning	NOUN
ap-8360	299	9	speed	speed	NOUN
ap-8360	299	10	did	do	AUX
ap-8360	299	11	not	not	PART
ap-8360	299	12	have	have	VERB
ap-8360	299	13	a	a	DET
ap-8360	299	14	negative	negative	ADJ
ap-8360	299	15	effect	effect	NOUN
ap-8360	299	16	on	on	ADP
ap-8360	299	17	the	the	DET
ap-8360	299	18	surface	surface	NOUN
ap-8360	299	19	roughness	roughness	NOUN
ap-8360	299	20	or	or	CCONJ
ap-8360	299	21	removed	removed	ADJ
ap-8360	299	22	depth	depth	NOUN
ap-8360	299	23	.	.	PUNCT
ap-8360	300	1	•	•	NUM
ap-8360	300	2	a	a	DET
ap-8360	300	3	demonstration	demonstration	NOUN
ap-8360	300	4	of	of	ADP
ap-8360	300	5	the	the	DET
ap-8360	300	6	identified	identify	VERB
ap-8360	300	7	parameters	parameter	NOUN
ap-8360	300	8	was	be	AUX
ap-8360	300	9	presented	present	VERB
ap-8360	300	10	in	in	ADP
ap-8360	300	11	fabrication	fabrication	NOUN
ap-8360	300	12	of	of	ADP
ap-8360	300	13	two	two	NUM
ap-8360	300	14	different	different	ADJ
ap-8360	300	15	complex	complex	ADJ
ap-8360	300	16	structures	structure	NOUN
ap-8360	300	17	.	.	PUNCT
ap-8360	301	1	good	good	ADJ
ap-8360	301	2	shape	shape	NOUN
ap-8360	301	3	and	and	CCONJ
ap-8360	301	4	circularity	circularity	NOUN
ap-8360	301	5	were	be	AUX
ap-8360	301	6	obtained	obtain	VERB
ap-8360	301	7	for	for	ADP
ap-8360	301	8	the	the	DET
ap-8360	301	9	dot	dot	NOUN
ap-8360	301	10	structure	structure	NOUN
ap-8360	301	11	,	,	PUNCT
ap-8360	301	12	along	along	ADP
ap-8360	301	13	with	with	ADP
ap-8360	301	14	compliance	compliance	NOUN
ap-8360	301	15	with	with	ADP
ap-8360	301	16	the	the	DET
ap-8360	301	17	proposed	propose	VERB
ap-8360	301	18	depth	depth	NOUN
ap-8360	301	19	of	of	ADP
ap-8360	301	20	the	the	DET
ap-8360	301	21	structure	structure	NOUN
ap-8360	301	22	.	.	PUNCT
ap-8360	302	1	simultaneously	simultaneously	ADV
ap-8360	302	2	,	,	PUNCT
ap-8360	302	3	the	the	DET
ap-8360	302	4	honeycomb	honeycomb	NOUN
ap-8360	302	5	structure	structure	NOUN
ap-8360	302	6	was	be	AUX
ap-8360	302	7	fabricated	fabricate	VERB
ap-8360	302	8	according	accord	VERB
ap-8360	302	9	to	to	ADP
ap-8360	302	10	the	the	DET
ap-8360	302	11	proposal	proposal	NOUN
ap-8360	302	12	with	with	ADP
ap-8360	302	13	a	a	DET
ap-8360	302	14	good	good	ADJ
ap-8360	302	15	optical	optical	ADJ
ap-8360	302	16	quality	quality	NOUN
ap-8360	302	17	.	.	PUNCT
ap-8360	303	1	both	both	DET
ap-8360	303	2	structures	structure	NOUN
ap-8360	303	3	had	have	VERB
ap-8360	303	4	the	the	DET
ap-8360	303	5	potential	potential	NOUN
ap-8360	303	6	to	to	PART
ap-8360	303	7	improve	improve	VERB
ap-8360	303	8	friction	friction	NOUN
ap-8360	303	9	properties	property	NOUN
ap-8360	303	10	of	of	ADP
ap-8360	303	11	advanced	advanced	ADJ
ap-8360	303	12	materials	material	NOUN
ap-8360	303	13	.	.	PUNCT
ap-8360	304	1	the	the	DET
ap-8360	304	2	presented	present	VERB
ap-8360	304	3	study	study	NOUN
ap-8360	304	4	summarises	summarise	NOUN
ap-8360	304	5	and	and	CCONJ
ap-8360	304	6	compares	compare	VERB
ap-8360	304	7	the	the	DET
ap-8360	304	8	ablation	ablation	NOUN
ap-8360	304	9	behaviour	behaviour	NOUN
ap-8360	304	10	of	of	ADP
ap-8360	304	11	four	four	NUM
ap-8360	304	12	advanced	advanced	ADJ
ap-8360	304	13	materials	material	NOUN
ap-8360	304	14	and	and	CCONJ
ap-8360	304	15	gives	give	VERB
ap-8360	304	16	a	a	DET
ap-8360	304	17	complete	complete	ADJ
ap-8360	304	18	overview	overview	NOUN
ap-8360	304	19	of	of	ADP
ap-8360	304	20	the	the	DET
ap-8360	304	21	findings	finding	NOUN
ap-8360	304	22	of	of	ADP
ap-8360	304	23	basic	basic	ADJ
ap-8360	304	24	ablation	ablation	NOUN
ap-8360	304	25	parameters	parameter	NOUN
ap-8360	304	26	for	for	ADP
ap-8360	304	27	a	a	DET
ap-8360	304	28	complex	complex	ADJ
ap-8360	304	29	shape	shape	NOUN
ap-8360	304	30	structure	structure	NOUN
ap-8360	304	31	production	production	NOUN
ap-8360	304	32	by	by	ADP
ap-8360	304	33	femtosecond	femtosecond	NOUN
ap-8360	304	34	laser	laser	NOUN
ap-8360	304	35	.	.	PUNCT
ap-8360	305	1	list	list	NOUN
ap-8360	305	2	of	of	ADP
ap-8360	305	3	symbols	symbol	NOUN
ap-8360	305	4	λ	λ	PROPN
ap-8360	305	5	wavelength	wavelength	VERB
ap-8360	305	6	[	[	X
ap-8360	305	7	nm	nm	NOUN
ap-8360	305	8	]	]	X
ap-8360	305	9	f	f	X
ap-8360	305	10	fluence	fluence	NOUN
ap-8360	305	11	[	[	X
ap-8360	305	12	j	j	X
ap-8360	305	13	/	/	SYM
ap-8360	305	14	cm2	cm2	NOUN
ap-8360	305	15	]	]	X
ap-8360	305	16	fth	fth	NOUN
ap-8360	305	17	threshold	threshold	NOUN
ap-8360	305	18	fluence	fluence	NOUN
ap-8360	306	1	[	[	X
ap-8360	306	2	j	j	X
ap-8360	306	3	/	/	SYM
ap-8360	306	4	cm2	cm2	PROPN
ap-8360	306	5	]	]	X
ap-8360	306	6	ep	ep	PROPN
ap-8360	306	7	pulse	pulse	NOUN
ap-8360	306	8	energy	energy	NOUN
ap-8360	306	9	[	[	X
ap-8360	306	10	j	j	X
ap-8360	306	11	]	]	X
ap-8360	306	12	τ	τ	PROPN
ap-8360	306	13	pulse	pulse	NOUN
ap-8360	306	14	duration	duration	NOUN
ap-8360	306	15	[	[	X
ap-8360	306	16	ps	ps	X
ap-8360	306	17	,	,	PUNCT
ap-8360	306	18	fs	fs	PROPN
ap-8360	306	19	]	]	X
ap-8360	306	20	f	f	PROPN
ap-8360	306	21	repetition	repetition	NOUN
ap-8360	306	22	rate	rate	NOUN
ap-8360	306	23	[	[	X
ap-8360	306	24	khz	khz	X
ap-8360	306	25	]	]	PUNCT
ap-8360	306	26	m2	m2	PROPN
ap-8360	306	27	laser	laser	NOUN
ap-8360	306	28	beam	beam	NOUN
ap-8360	306	29	quality	quality	NOUN
ap-8360	306	30	[	[	X
ap-8360	306	31	–	–	PUNCT
ap-8360	306	32	]	]	PUNCT
ap-8360	306	33	sx	sx	PROPN
ap-8360	306	34	pulse	pulse	NOUN
ap-8360	306	35	overlap	overlap	NOUN
ap-8360	306	36	in	in	ADP
ap-8360	306	37	scanning	scan	VERB
ap-8360	306	38	direction	direction	NOUN
ap-8360	307	1	[	[	X
ap-8360	307	2	%	%	X
ap-8360	307	3	]	]	X
ap-8360	307	4	hy	hy	NOUN
ap-8360	307	5	pulse	pulse	NOUN
ap-8360	307	6	overlap	overlap	NOUN
ap-8360	307	7	in	in	ADP
ap-8360	307	8	traverse	traverse	ADJ
ap-8360	307	9	direction	direction	NOUN
ap-8360	308	1	[	[	X
ap-8360	308	2	%	%	X
ap-8360	308	3	]	]	X
ap-8360	308	4	φ	φ	PROPN
ap-8360	308	5	hatching	hatch	VERB
ap-8360	308	6	angle	angle	NOUN
ap-8360	308	7	[	[	X
ap-8360	308	8	°	°	X
ap-8360	308	9	]	]	X
ap-8360	308	10	δ	δ	PROPN
ap-8360	308	11	optical	optical	ADJ
ap-8360	308	12	penetration	penetration	NOUN
ap-8360	308	13	depth	depth	NOUN
ap-8360	308	14	[	[	X
ap-8360	308	15	nm	nm	X
ap-8360	308	16	]	]	X
ap-8360	308	17	acknowledgements	acknowledgement	NOUN
ap-8360	308	18	this	this	DET
ap-8360	308	19	work	work	NOUN
ap-8360	308	20	was	be	AUX
ap-8360	308	21	supported	support	VERB
ap-8360	308	22	by	by	ADP
ap-8360	308	23	the	the	DET
ap-8360	308	24	grant	grant	PROPN
ap-8360	308	25	agency	agency	NOUN
ap-8360	308	26	of	of	ADP
ap-8360	308	27	the	the	DET
ap-8360	308	28	czech	czech	PROPN
ap-8360	308	29	technical	technical	PROPN
ap-8360	308	30	university	university	PROPN
ap-8360	308	31	in	in	ADP
ap-8360	308	32	prague	prague	PROPN
ap-8360	308	33	,	,	PUNCT
ap-8360	308	34	grant	grant	VERB
ap-8360	308	35	no	no	NOUN
ap-8360	308	36	.	.	PUNCT
ap-8360	309	1	sgs22/159	sgs22/159	NOUN
ap-8360	309	2	/	/	SYM
ap-8360	309	3	ohk2/3t/12	ohk2/3t/12	PROPN
ap-8360	309	4	and	and	CCONJ
ap-8360	309	5	no	no	INTJ
ap-8360	309	6	.	.	PUNCT
ap-8360	310	1	sgs22/158	sgs22/158	VERB
ap-8360	310	2	/	/	SYM
ap-8360	310	3	ohk2/	ohk2/	PROPN
ap-8360	310	4	3t/12	3t/12	PROPN
ap-8360	310	5	.	.	PUNCT
ap-8360	311	1	references	reference	NOUN
ap-8360	311	2	[	[	X
ap-8360	311	3	1	1	NUM
ap-8360	311	4	]	]	PUNCT
ap-8360	311	5	k.	k.	PROPN
ap-8360	311	6	sugioka	sugioka	PROPN
ap-8360	311	7	.	.	PUNCT
ap-8360	312	1	progress	progress	NOUN
ap-8360	312	2	in	in	ADP
ap-8360	312	3	ultrafast	ultrafast	ADJ
ap-8360	312	4	laser	laser	NOUN
ap-8360	312	5	processing	processing	NOUN
ap-8360	312	6	and	and	CCONJ
ap-8360	312	7	future	future	ADJ
ap-8360	312	8	prospects	prospect	NOUN
ap-8360	312	9	.	.	PUNCT
ap-8360	313	1	nanophotonics	nanophotonic	NOUN
ap-8360	313	2	6(2):393–413	6(2):393–413	NUM
ap-8360	313	3	,	,	PUNCT
ap-8360	313	4	2017	2017	NUM
ap-8360	313	5	.	.	PUNCT
ap-8360	314	1	https://doi.org/10.1515/nanoph-2016-0004	https://doi.org/10.1515/nanoph-2016-0004	PROPN
ap-8360	314	2	.	.	PUNCT
ap-8360	315	1	[	[	X
ap-8360	315	2	2	2	NUM
ap-8360	315	3	]	]	X
ap-8360	315	4	n.	n.	PROPN
ap-8360	315	5	hodgson	hodgson	PROPN
ap-8360	315	6	,	,	PUNCT
ap-8360	315	7	a.	a.	NOUN
ap-8360	315	8	steinkopff	steinkopff	PROPN
ap-8360	315	9	,	,	PUNCT
ap-8360	315	10	s.	s.	PROPN
ap-8360	315	11	heming	heming	PROPN
ap-8360	315	12	,	,	PUNCT
ap-8360	315	13	et	et	PROPN
ap-8360	315	14	al	al	PROPN
ap-8360	315	15	.	.	PROPN
ap-8360	315	16	ultrafast	ultrafast	PROPN
ap-8360	315	17	laser	laser	NOUN
ap-8360	315	18	machining	machining	NOUN
ap-8360	315	19	:	:	PUNCT
ap-8360	315	20	process	process	NOUN
ap-8360	315	21	optimization	optimization	NOUN
ap-8360	315	22	and	and	CCONJ
ap-8360	315	23	applications	application	NOUN
ap-8360	315	24	.	.	PUNCT
ap-8360	316	1	laser	laser	NOUN
ap-8360	316	2	applications	application	NOUN
ap-8360	316	3	in	in	ADP
ap-8360	316	4	microelectronic	microelectronic	ADJ
ap-8360	316	5	and	and	CCONJ
ap-8360	316	6	optoelectronic	optoelectronic	ADJ
ap-8360	316	7	manufacturing	manufacturing	NOUN
ap-8360	316	8	(	(	PUNCT
ap-8360	316	9	lamom	lamom	NOUN
ap-8360	316	10	)	)	PUNCT
ap-8360	316	11	xxvi	xxvi	PROPN
ap-8360	316	12	11673:1167308	11673:1167308	NUM
ap-8360	316	13	,	,	PUNCT
ap-8360	316	14	2021	2021	NUM
ap-8360	316	15	.	.	PUNCT
ap-8360	317	1	https://doi.org/10.1117/12.2584178	https://doi.org/10.1117/12.2584178	X
ap-8360	317	2	.	.	PUNCT
ap-8360	318	1	[	[	X
ap-8360	318	2	3	3	X
ap-8360	318	3	]	]	PUNCT
ap-8360	318	4	k.	k.	PROPN
ap-8360	318	5	ahmmed	ahmmed	PROPN
ap-8360	318	6	,	,	PUNCT
ap-8360	318	7	c.	c.	PROPN
ap-8360	318	8	grambow	grambow	PROPN
ap-8360	318	9	,	,	PUNCT
ap-8360	318	10	a.-m	a.-m	PROPN
ap-8360	318	11	.	.	PUNCT
ap-8360	319	1	kietzig	kietzig	PROPN
ap-8360	319	2	.	.	PUNCT
ap-8360	320	1	fabrication	fabrication	NOUN
ap-8360	320	2	of	of	ADP
ap-8360	320	3	micro	micro	ADJ
ap-8360	320	4	/	/	SYM
ap-8360	320	5	nano	nano	NOUN
ap-8360	320	6	structures	structure	NOUN
ap-8360	320	7	on	on	ADP
ap-8360	320	8	metals	metal	NOUN
ap-8360	320	9	by	by	ADP
ap-8360	320	10	femtosecond	femtosecond	NOUN
ap-8360	320	11	laser	laser	NOUN
ap-8360	320	12	micromachining	micromachining	NOUN
ap-8360	320	13	.	.	PUNCT
ap-8360	321	1	micromachines	micromachines	PROPN
ap-8360	321	2	5(4):1219–1253	5(4):1219–1253	PROPN
ap-8360	321	3	,	,	PUNCT
ap-8360	321	4	2014	2014	NUM
ap-8360	321	5	.	.	PUNCT
ap-8360	322	1	https://doi.org/10.3390/mi5041219	https://doi.org/10.3390/mi5041219	NOUN
ap-8360	322	2	.	.	PUNCT
ap-8360	323	1	[	[	X
ap-8360	323	2	4	4	X
ap-8360	323	3	]	]	X
ap-8360	323	4	j.	j.	PROPN
ap-8360	323	5	bonse	bonse	PROPN
ap-8360	323	6	,	,	PUNCT
ap-8360	323	7	s.	s.	PROPN
ap-8360	323	8	kirner	kirner	PROPN
ap-8360	323	9	,	,	PUNCT
ap-8360	323	10	m.	m.	NOUN
ap-8360	323	11	griepentrog	griepentrog	PROPN
ap-8360	323	12	,	,	PUNCT
ap-8360	323	13	et	et	PROPN
ap-8360	324	1	al	al	PROPN
ap-8360	324	2	.	.	PROPN
ap-8360	324	3	femtosecond	femtosecond	NOUN
ap-8360	324	4	laser	laser	NOUN
ap-8360	324	5	texturing	texturing	NOUN
ap-8360	324	6	of	of	ADP
ap-8360	324	7	surfaces	surface	NOUN
ap-8360	324	8	for	for	ADP
ap-8360	324	9	tribological	tribological	ADJ
ap-8360	324	10	applications	application	NOUN
ap-8360	324	11	.	.	PUNCT
ap-8360	325	1	materials	material	NOUN
ap-8360	325	2	11(5):801	11(5):801	NOUN
ap-8360	325	3	,	,	PUNCT
ap-8360	325	4	2018	2018	NUM
ap-8360	325	5	.	.	PUNCT
ap-8360	326	1	https://doi.org/10.3390/ma11050801	https://doi.org/10.3390/ma11050801	X
ap-8360	326	2	.	.	PUNCT
ap-8360	327	1	[	[	X
ap-8360	327	2	5	5	NUM
ap-8360	327	3	]	]	PUNCT
ap-8360	327	4	p.	p.	NOUN
ap-8360	327	5	lickschat	lickschat	PROPN
ap-8360	327	6	,	,	PUNCT
ap-8360	327	7	d.	d.	PROPN
ap-8360	327	8	metzner	metzner	PROPN
ap-8360	327	9	,	,	PUNCT
ap-8360	327	10	s.	s.	PROPN
ap-8360	327	11	weißmantel	weißmantel	PROPN
ap-8360	327	12	.	.	PUNCT
ap-8360	328	1	fundamental	fundamental	ADJ
ap-8360	328	2	investigations	investigation	NOUN
ap-8360	328	3	of	of	ADP
ap-8360	328	4	ultrashort	ultrashort	NOUN
ap-8360	328	5	pulsed	pulse	VERB
ap-8360	328	6	laser	laser	NOUN
ap-8360	328	7	ablation	ablation	NOUN
ap-8360	328	8	on	on	ADP
ap-8360	328	9	stainless	stainless	ADJ
ap-8360	328	10	steel	steel	NOUN
ap-8360	328	11	and	and	CCONJ
ap-8360	328	12	cemented	cement	VERB
ap-8360	328	13	tungsten	tungsten	ADJ
ap-8360	328	14	carbide	carbide	NOUN
ap-8360	328	15	.	.	PUNCT
ap-8360	329	1	the	the	DET
ap-8360	329	2	international	international	ADJ
ap-8360	329	3	journal	journal	NOUN
ap-8360	329	4	of	of	ADP
ap-8360	329	5	advanced	advanced	ADJ
ap-8360	329	6	manufacturing	manufacturing	NOUN
ap-8360	329	7	technology	technology	NOUN
ap-8360	329	8	109(3	109(3	NUM
ap-8360	329	9	-	-	SYM
ap-8360	329	10	4):1167–1175	4):1167–1175	NOUN
ap-8360	329	11	,	,	PUNCT
ap-8360	329	12	2020	2020	NUM
ap-8360	329	13	.	.	PUNCT
ap-8360	330	1	https://doi.org/10.1007/s00170-020-05502-8	https://doi.org/10.1007/s00170-020-05502-8	NUM
ap-8360	330	2	.	.	PUNCT
ap-8360	331	1	[	[	X
ap-8360	331	2	6	6	NUM
ap-8360	331	3	]	]	PUNCT
ap-8360	331	4	b.	b.	PROPN
ap-8360	331	5	jaeggi	jaeggi	PROPN
ap-8360	331	6	,	,	PUNCT
ap-8360	331	7	b.	b.	PROPN
ap-8360	331	8	neuenschwander	neuenschwander	PROPN
ap-8360	331	9	,	,	PUNCT
ap-8360	331	10	m.	m.	PROPN
ap-8360	331	11	schmid	schmid	PROPN
ap-8360	331	12	,	,	PUNCT
ap-8360	331	13	et	et	PROPN
ap-8360	331	14	al	al	PROPN
ap-8360	331	15	.	.	PUNCT
ap-8360	331	16	influence	influence	NOUN
ap-8360	331	17	of	of	ADP
ap-8360	331	18	the	the	DET
ap-8360	331	19	pulse	pulse	NOUN
ap-8360	331	20	duration	duration	NOUN
ap-8360	331	21	in	in	ADP
ap-8360	331	22	the	the	DET
ap-8360	331	23	ps	ps	NOUN
ap-8360	331	24	-	-	NOUN
ap-8360	331	25	regime	regime	NOUN
ap-8360	331	26	on	on	ADP
ap-8360	331	27	the	the	DET
ap-8360	331	28	ablation	ablation	NOUN
ap-8360	331	29	efficiency	efficiency	NOUN
ap-8360	331	30	of	of	ADP
ap-8360	331	31	metals	metal	NOUN
ap-8360	331	32	.	.	PUNCT
ap-8360	332	1	physics	physics	NOUN
ap-8360	332	2	procedia	procedia	PROPN
ap-8360	332	3	12:164–171	12:164–171	PROPN
ap-8360	332	4	,	,	PUNCT
ap-8360	332	5	2011	2011	NUM
ap-8360	332	6	.	.	PUNCT
ap-8360	333	1	https://doi.org/10.1016/j.phpro.2011.03.118	https://doi.org/10.1016/j.phpro.2011.03.118	X
ap-8360	333	2	.	.	PUNCT
ap-8360	334	1	44	44	NUM
ap-8360	334	2	https://doi.org/10.1515/nanoph-2016-0004	https://doi.org/10.1515/nanoph-2016-0004	PROPN
ap-8360	334	3	https://doi.org/10.1117/12.2584178	https://doi.org/10.1117/12.2584178	ADV
ap-8360	334	4	https://doi.org/10.3390/mi5041219	https://doi.org/10.3390/mi5041219	PROPN
ap-8360	334	5	https://doi.org/10.3390/ma11050801	https://doi.org/10.3390/ma11050801	ADV
ap-8360	334	6	https://doi.org/10.1007/s00170-020-05502-8	https://doi.org/10.1007/s00170-020-05502-8	NUM
ap-8360	334	7	https://doi.org/10.1016/j.phpro.2011.03.118	https://doi.org/10.1016/j.phpro.2011.03.118	NUM
ap-8360	334	8	vol	vol	NOUN
ap-8360	334	9	.	.	PROPN
ap-8360	335	1	63	63	NUM
ap-8360	335	2	no	no	NOUN
ap-8360	335	3	.	.	PUNCT
ap-8360	336	1	1/2023	1/2023	NUM
ap-8360	336	2	femtosecond	femtosecond	NOUN
ap-8360	336	3	laser	laser	NOUN
ap-8360	336	4	processing	processing	NOUN
ap-8360	336	5	of	of	ADP
ap-8360	336	6	advanced	advanced	ADJ
ap-8360	336	7	technical	technical	ADJ
ap-8360	336	8	materials	material	NOUN
ap-8360	336	9	[	[	X
ap-8360	336	10	7	7	X
ap-8360	336	11	]	]	X
ap-8360	336	12	v.	v.	CCONJ
ap-8360	336	13	stankevič	stankevič	PROPN
ap-8360	336	14	,	,	PUNCT
ap-8360	336	15	a.	a.	NOUN
ap-8360	336	16	čermák	čermák	PROPN
ap-8360	336	17	,	,	PUNCT
ap-8360	336	18	s.	s.	PROPN
ap-8360	336	19	mikalauskas	mikalauskas	PROPN
ap-8360	336	20	,	,	PUNCT
ap-8360	336	21	et	et	PROPN
ap-8360	336	22	al	al	PROPN
ap-8360	336	23	.	.	PUNCT
ap-8360	337	1	processing	processing	NOUN
ap-8360	337	2	of	of	ADP
ap-8360	337	3	ultra	ultra	ADJ
ap-8360	337	4	-	-	ADJ
ap-8360	337	5	hard	hard	ADJ
ap-8360	337	6	materials	material	NOUN
ap-8360	337	7	with	with	ADP
ap-8360	337	8	picosecond	picosecond	NOUN
ap-8360	337	9	pulses	pulse	NOUN
ap-8360	337	10	:	:	PUNCT
ap-8360	337	11	from	from	ADP
ap-8360	337	12	research	research	NOUN
ap-8360	337	13	work	work	NOUN
ap-8360	337	14	to	to	ADP
ap-8360	337	15	industrial	industrial	ADJ
ap-8360	337	16	applications	application	NOUN
ap-8360	337	17	.	.	PUNCT
ap-8360	338	1	journal	journal	PROPN
ap-8360	338	2	of	of	ADP
ap-8360	338	3	laser	laser	NOUN
ap-8360	338	4	applications	application	NOUN
ap-8360	338	5	30(3):032202	30(3):032202	NUM
ap-8360	338	6	,	,	PUNCT
ap-8360	338	7	2018	2018	NUM
ap-8360	338	8	.	.	PUNCT
ap-8360	339	1	https://doi.org/10.2351/1.5040633	https://doi.org/10.2351/1.5040633	X
ap-8360	339	2	.	.	PUNCT
ap-8360	340	1	[	[	X
ap-8360	340	2	8	8	X
ap-8360	340	3	]	]	PUNCT
ap-8360	340	4	p.	p.	PROPN
ap-8360	340	5	mannion	mannion	PROPN
ap-8360	340	6	,	,	PUNCT
ap-8360	340	7	j.	j.	PROPN
ap-8360	340	8	magee	magee	PROPN
ap-8360	340	9	,	,	PUNCT
ap-8360	340	10	e.	e.	PROPN
ap-8360	340	11	coyne	coyne	PROPN
ap-8360	340	12	,	,	PUNCT
ap-8360	340	13	et	et	PROPN
ap-8360	340	14	al	al	PROPN
ap-8360	340	15	.	.	PUNCT
ap-8360	341	1	the	the	DET
ap-8360	341	2	effect	effect	NOUN
ap-8360	341	3	of	of	ADP
ap-8360	341	4	damage	damage	NOUN
ap-8360	341	5	accumulation	accumulation	NOUN
ap-8360	341	6	behaviour	behaviour	NOUN
ap-8360	341	7	on	on	ADP
ap-8360	341	8	ablation	ablation	NOUN
ap-8360	341	9	thresholds	threshold	NOUN
ap-8360	341	10	and	and	CCONJ
ap-8360	341	11	damage	damage	NOUN
ap-8360	341	12	morphology	morphology	NOUN
ap-8360	341	13	in	in	ADP
ap-8360	341	14	ultrafast	ultrafast	ADJ
ap-8360	341	15	laser	laser	NOUN
ap-8360	341	16	micro	micro	NOUN
ap-8360	341	17	-	-	NOUN
ap-8360	341	18	machining	machining	NOUN
ap-8360	341	19	of	of	ADP
ap-8360	341	20	common	common	ADJ
ap-8360	341	21	metals	metal	NOUN
ap-8360	341	22	in	in	ADP
ap-8360	341	23	air	air	NOUN
ap-8360	341	24	.	.	PUNCT
ap-8360	342	1	applied	apply	VERB
ap-8360	342	2	surface	surface	NOUN
ap-8360	342	3	science	science	NOUN
ap-8360	342	4	233(1	233(1	NUM
ap-8360	342	5	-	-	SYM
ap-8360	342	6	4):275–287	4):275–287	NUM
ap-8360	342	7	,	,	PUNCT
ap-8360	342	8	2004	2004	NUM
ap-8360	342	9	.	.	PUNCT
ap-8360	343	1	https://doi.org/10.1016/j.apsusc.2004.03.229	https://doi.org/10.1016/j.apsusc.2004.03.229	X
ap-8360	343	2	.	.	PUNCT
ap-8360	344	1	[	[	X
ap-8360	344	2	9	9	NUM
ap-8360	344	3	]	]	PUNCT
ap-8360	344	4	s.	s.	PROPN
ap-8360	344	5	xu	xu	PROPN
ap-8360	344	6	,	,	PUNCT
ap-8360	344	7	y.	y.	PROPN
ap-8360	344	8	chen	chen	PROPN
ap-8360	344	9	,	,	PUNCT
ap-8360	344	10	h.	h.	PROPN
ap-8360	344	11	liu	liu	PROPN
ap-8360	344	12	,	,	PUNCT
ap-8360	344	13	et	et	PROPN
ap-8360	344	14	al	al	PROPN
ap-8360	344	15	.	.	PROPN
ap-8360	344	16	femtosecond	femtosecond	NOUN
ap-8360	344	17	laser	laser	NOUN
ap-8360	344	18	ablation	ablation	NOUN
ap-8360	344	19	of	of	ADP
ap-8360	344	20	ti	ti	NOUN
ap-8360	344	21	alloy	alloy	NOUN
ap-8360	344	22	and	and	CCONJ
ap-8360	344	23	al	al	PROPN
ap-8360	344	24	alloy	alloy	NOUN
ap-8360	344	25	.	.	PUNCT
ap-8360	345	1	optik	optik	PROPN
ap-8360	345	2	212:164628	212:164628	NUM
ap-8360	345	3	,	,	PUNCT
ap-8360	345	4	2020	2020	NUM
ap-8360	345	5	.	.	PUNCT
ap-8360	346	1	https://doi.org/10.1016/j.ijleo.2020.164628	https://doi.org/10.1016/j.ijleo.2020.164628	NOUN
ap-8360	346	2	.	.	PUNCT
ap-8360	347	1	[	[	X
ap-8360	347	2	10	10	NUM
ap-8360	347	3	]	]	X
ap-8360	347	4	p.	p.	NOUN
ap-8360	347	5	lickschat	lickschat	PROPN
ap-8360	347	6	,	,	PUNCT
ap-8360	347	7	a.	a.	NOUN
ap-8360	347	8	demba	demba	PROPN
ap-8360	347	9	,	,	PUNCT
ap-8360	347	10	s.	s.	PROPN
ap-8360	347	11	weissmantel	weissmantel	PROPN
ap-8360	347	12	.	.	PUNCT
ap-8360	348	1	ablation	ablation	NOUN
ap-8360	348	2	of	of	ADP
ap-8360	348	3	steel	steel	NOUN
ap-8360	348	4	using	use	VERB
ap-8360	348	5	picosecond	picosecond	NOUN
ap-8360	348	6	laser	laser	NOUN
ap-8360	348	7	pulses	pulse	NOUN
ap-8360	348	8	in	in	ADP
ap-8360	348	9	burst	burst	ADJ
ap-8360	348	10	mode	mode	NOUN
ap-8360	348	11	.	.	PUNCT
ap-8360	349	1	applied	apply	VERB
ap-8360	349	2	physics	physics	PROPN
ap-8360	349	3	a	a	DET
ap-8360	349	4	123(2):123–137	123(2):123–137	NUM
ap-8360	349	5	,	,	PUNCT
ap-8360	349	6	2017	2017	NUM
ap-8360	349	7	.	.	PUNCT
ap-8360	350	1	https://doi.org/10.1007/s00339-016-0743-y	https://doi.org/10.1007/s00339-016-0743-y	PROPN
ap-8360	350	2	.	.	PUNCT
ap-8360	351	1	[	[	X
ap-8360	351	2	11	11	NUM
ap-8360	351	3	]	]	PUNCT
ap-8360	351	4	m.	m.	NOUN
ap-8360	351	5	domke	domke	PROPN
ap-8360	351	6	,	,	PUNCT
ap-8360	351	7	v.	v.	ADP
ap-8360	351	8	matylitsky	matylitsky	PROPN
ap-8360	351	9	,	,	PUNCT
ap-8360	351	10	s.	s.	PROPN
ap-8360	351	11	stroj	stroj	VERB
ap-8360	351	12	.	.	PUNCT
ap-8360	352	1	surface	surface	NOUN
ap-8360	352	2	ablation	ablation	NOUN
ap-8360	352	3	efficiency	efficiency	NOUN
ap-8360	352	4	and	and	CCONJ
ap-8360	352	5	quality	quality	NOUN
ap-8360	352	6	of	of	ADP
ap-8360	352	7	fs	fs	ADP
ap-8360	352	8	lasers	laser	NOUN
ap-8360	352	9	in	in	ADP
ap-8360	352	10	single	single	ADJ
ap-8360	352	11	-	-	PUNCT
ap-8360	352	12	pulse	pulse	NOUN
ap-8360	352	13	mode	mode	NOUN
ap-8360	352	14	,	,	PUNCT
ap-8360	352	15	fs	fs	ADP
ap-8360	352	16	lasers	laser	NOUN
ap-8360	352	17	in	in	ADP
ap-8360	352	18	burst	burst	ADJ
ap-8360	352	19	mode	mode	NOUN
ap-8360	352	20	,	,	PUNCT
ap-8360	352	21	and	and	CCONJ
ap-8360	352	22	ns	ns	NUM
ap-8360	352	23	lasers	laser	NOUN
ap-8360	352	24	.	.	PUNCT
ap-8360	353	1	applied	apply	VERB
ap-8360	353	2	surface	surface	NOUN
ap-8360	353	3	science	science	NOUN
ap-8360	353	4	505:144594	505:144594	NUM
ap-8360	353	5	,	,	PUNCT
ap-8360	353	6	2020	2020	NUM
ap-8360	353	7	.	.	PUNCT
ap-8360	354	1	https://doi.org/10.1016/j.apsusc.2019.144594	https://doi.org/10.1016/j.apsusc.2019.144594	NOUN
ap-8360	354	2	.	.	PUNCT
ap-8360	355	1	[	[	X
ap-8360	355	2	12	12	NUM
ap-8360	355	3	]	]	PUNCT
ap-8360	355	4	p.	p.	NOUN
ap-8360	355	5	hauschwitz	hauschwitz	PROPN
ap-8360	355	6	,	,	PUNCT
ap-8360	355	7	r.	r.	PROPN
ap-8360	355	8	bičštová	bičštová	PROPN
ap-8360	355	9	,	,	PUNCT
ap-8360	355	10	a.	a.	PROPN
ap-8360	355	11	brodsky	brodsky	PROPN
ap-8360	355	12	,	,	PUNCT
ap-8360	355	13	et	et	PROPN
ap-8360	355	14	al	al	PROPN
ap-8360	355	15	.	.	PROPN
ap-8360	355	16	towards	towards	ADP
ap-8360	355	17	rapid	rapid	ADJ
ap-8360	355	18	fabrication	fabrication	NOUN
ap-8360	355	19	of	of	ADP
ap-8360	355	20	superhydrophobic	superhydrophobic	ADJ
ap-8360	355	21	surfaces	surface	NOUN
ap-8360	355	22	by	by	ADP
ap-8360	355	23	multibeam	multibeam	NOUN
ap-8360	355	24	nanostructuring	nanostructure	VERB
ap-8360	355	25	with	with	ADP
ap-8360	355	26	40,401	40,401	NUM
ap-8360	355	27	beams	beam	NOUN
ap-8360	355	28	.	.	PUNCT
ap-8360	356	1	nanomaterials	nanomaterial	NOUN
ap-8360	356	2	11(8	11(8	PROPN
ap-8360	356	3	)	)	PUNCT
ap-8360	356	4	,	,	PUNCT
ap-8360	356	5	2021	2021	NUM
ap-8360	356	6	.	.	PUNCT
ap-8360	357	1	https://doi.org/10.3390/nano11081987	https://doi.org/10.3390/nano11081987	NOUN
ap-8360	357	2	.	.	PUNCT
ap-8360	358	1	[	[	X
ap-8360	358	2	13	13	NUM
ap-8360	358	3	]	]	PUNCT
ap-8360	358	4	j.	j.	PROPN
ap-8360	358	5	finger	finger	PROPN
ap-8360	358	6	,	,	PUNCT
ap-8360	358	7	c.	c.	PROPN
ap-8360	358	8	kalupka	kalupka	PROPN
ap-8360	358	9	,	,	PUNCT
ap-8360	358	10	m.	m.	NOUN
ap-8360	358	11	reininghaus	reininghaus	PROPN
ap-8360	358	12	.	.	PUNCT
ap-8360	359	1	high	high	ADJ
ap-8360	359	2	power	power	NOUN
ap-8360	359	3	ultra	ultra	ADJ
ap-8360	359	4	-	-	ADJ
ap-8360	359	5	short	short	ADJ
ap-8360	359	6	pulse	pulse	NOUN
ap-8360	359	7	laser	laser	NOUN
ap-8360	359	8	ablation	ablation	NOUN
ap-8360	359	9	of	of	ADP
ap-8360	359	10	in718	in718	PROPN
ap-8360	359	11	using	use	VERB
ap-8360	359	12	high	high	ADJ
ap-8360	359	13	repetition	repetition	NOUN
ap-8360	359	14	rates	rate	NOUN
ap-8360	359	15	.	.	PUNCT
ap-8360	360	1	journal	journal	NOUN
ap-8360	360	2	of	of	ADP
ap-8360	360	3	materials	material	NOUN
ap-8360	360	4	processing	processing	NOUN
ap-8360	360	5	technology	technology	NOUN
ap-8360	360	6	226:221–227	226:221–227	NUM
ap-8360	360	7	,	,	PUNCT
ap-8360	360	8	2015	2015	NUM
ap-8360	360	9	.	.	PUNCT
ap-8360	361	1	https://doi.org/10.1016/j.jmatprotec.2015.07.014	https://doi.org/10.1016/j.jmatprotec.2015.07.014	NOUN
ap-8360	361	2	.	.	PUNCT
ap-8360	362	1	[	[	X
ap-8360	362	2	14	14	NUM
ap-8360	362	3	]	]	X
ap-8360	362	4	j.	j.	PROPN
ap-8360	362	5	schille	schille	PROPN
ap-8360	362	6	,	,	PUNCT
ap-8360	362	7	a.	a.	PROPN
ap-8360	362	8	heisterkamp	heisterkamp	PROPN
ap-8360	362	9	,	,	PUNCT
ap-8360	362	10	j.	j.	PROPN
ap-8360	362	11	neev	neev	PROPN
ap-8360	362	12	,	,	PUNCT
ap-8360	362	13	et	et	PROPN
ap-8360	362	14	al	al	PROPN
ap-8360	362	15	.	.	PROPN
ap-8360	362	16	high	high	ADJ
ap-8360	362	17	repetition	repetition	NOUN
ap-8360	362	18	rate	rate	NOUN
ap-8360	362	19	femtosecond	femtosecond	NOUN
ap-8360	362	20	laser	laser	NOUN
ap-8360	362	21	processing	processing	NOUN
ap-8360	362	22	of	of	ADP
ap-8360	362	23	metals	metal	NOUN
ap-8360	362	24	.	.	PUNCT
ap-8360	363	1	proceedings	proceeding	NOUN
ap-8360	363	2	spie	spie	NOUN
ap-8360	363	3	:	:	PUNCT
ap-8360	363	4	ultrafast	ultrafast	ADJ
ap-8360	363	5	optics	optic	NOUN
ap-8360	363	6	:	:	PUNCT
ap-8360	363	7	biomedical	biomedical	ADJ
ap-8360	363	8	,	,	PUNCT
ap-8360	363	9	scientific	scientific	ADJ
ap-8360	363	10	,	,	PUNCT
ap-8360	363	11	and	and	CCONJ
ap-8360	363	12	industrial	industrial	ADJ
ap-8360	363	13	applications	application	NOUN
ap-8360	363	14	x	x	SYM
ap-8360	363	15	7589:758915	7589:758915	NUM
ap-8360	363	16	,	,	PUNCT
ap-8360	363	17	2010	2010	NUM
ap-8360	363	18	.	.	PUNCT
ap-8360	364	1	https://doi.org/10.1117/12.842600	https://doi.org/10.1117/12.842600	PROPN
ap-8360	364	2	.	.	PUNCT
ap-8360	365	1	[	[	X
ap-8360	365	2	15	15	NUM
ap-8360	365	3	]	]	X
ap-8360	365	4	s.	s.	PROPN
ap-8360	365	5	xu	xu	PROPN
ap-8360	365	6	,	,	PUNCT
ap-8360	365	7	r.	r.	PROPN
ap-8360	365	8	ding	ding	PROPN
ap-8360	365	9	,	,	PUNCT
ap-8360	365	10	c.	c.	PROPN
ap-8360	365	11	yao	yao	PROPN
ap-8360	365	12	,	,	PUNCT
ap-8360	365	13	et	et	PROPN
ap-8360	365	14	al	al	PROPN
ap-8360	365	15	.	.	PUNCT
ap-8360	365	16	effects	effect	NOUN
ap-8360	365	17	of	of	ADP
ap-8360	365	18	pulse	pulse	NOUN
ap-8360	365	19	durations	duration	NOUN
ap-8360	365	20	and	and	CCONJ
ap-8360	365	21	environments	environment	NOUN
ap-8360	365	22	on	on	ADP
ap-8360	365	23	femtosecond	femtosecond	NOUN
ap-8360	365	24	laser	laser	NOUN
ap-8360	365	25	ablation	ablation	NOUN
ap-8360	365	26	of	of	ADP
ap-8360	365	27	stainless	stainless	ADJ
ap-8360	365	28	steel	steel	NOUN
ap-8360	365	29	.	.	PUNCT
ap-8360	366	1	applied	apply	VERB
ap-8360	366	2	physics	physics	PROPN
ap-8360	366	3	a	a	DET
ap-8360	366	4	124:310	124:310	NUM
ap-8360	366	5	,	,	PUNCT
ap-8360	366	6	2018	2018	NUM
ap-8360	366	7	.	.	PUNCT
ap-8360	367	1	https://doi.org/10.1007/s00339-018-1714-2	https://doi.org/10.1007/s00339-018-1714-2	NUM
ap-8360	367	2	.	.	PUNCT
ap-8360	368	1	[	[	X
ap-8360	368	2	16	16	NUM
ap-8360	368	3	]	]	PUNCT
ap-8360	368	4	x.	x.	NOUN
ap-8360	368	5	sedao	sedao	PROPN
ap-8360	368	6	,	,	PUNCT
ap-8360	368	7	m.	m.	NOUN
ap-8360	368	8	lenci	lenci	PROPN
ap-8360	368	9	,	,	PUNCT
ap-8360	368	10	a.	a.	NOUN
ap-8360	368	11	rudenko	rudenko	PROPN
ap-8360	368	12	,	,	PUNCT
ap-8360	368	13	et	et	PROPN
ap-8360	368	14	al	al	PROPN
ap-8360	368	15	.	.	PUNCT
ap-8360	368	16	influence	influence	NOUN
ap-8360	368	17	of	of	ADP
ap-8360	368	18	pulse	pulse	NOUN
ap-8360	368	19	repetition	repetition	NOUN
ap-8360	368	20	rate	rate	NOUN
ap-8360	368	21	on	on	ADP
ap-8360	368	22	morphology	morphology	NOUN
ap-8360	368	23	and	and	CCONJ
ap-8360	368	24	material	material	NOUN
ap-8360	368	25	removal	removal	NOUN
ap-8360	368	26	rate	rate	NOUN
ap-8360	368	27	of	of	ADP
ap-8360	368	28	ultrafast	ultrafast	ADJ
ap-8360	368	29	laser	laser	NOUN
ap-8360	368	30	ablated	ablate	VERB
ap-8360	368	31	metallic	metallic	ADJ
ap-8360	368	32	surfaces	surface	NOUN
ap-8360	368	33	.	.	PUNCT
ap-8360	369	1	optics	optic	NOUN
ap-8360	369	2	and	and	CCONJ
ap-8360	369	3	lasers	laser	NOUN
ap-8360	369	4	in	in	ADP
ap-8360	369	5	engineering	engineering	NOUN
ap-8360	369	6	116:68–74	116:68–74	NUM
ap-8360	369	7	,	,	PUNCT
ap-8360	369	8	2019	2019	NUM
ap-8360	369	9	.	.	PUNCT
ap-8360	370	1	https://doi.org/10.1016/j.optlaseng.2018.12.009	https://doi.org/10.1016/j.optlaseng.2018.12.009	X
ap-8360	370	2	.	.	PUNCT
ap-8360	371	1	[	[	X
ap-8360	371	2	17	17	NUM
ap-8360	371	3	]	]	X
ap-8360	371	4	g.	g.	PROPN
ap-8360	371	5	çam	çam	PROPN
ap-8360	371	6	,	,	PUNCT
ap-8360	371	7	g.	g.	PROPN
ap-8360	371	8	i̇pekoğlu	i̇pekoğlu	PROPN
ap-8360	371	9	,	,	PUNCT
ap-8360	371	10	k.-h	k.-h	PROPN
ap-8360	371	11	.	.	PUNCT
ap-8360	372	1	bohm	bohm	PROPN
ap-8360	372	2	,	,	PUNCT
ap-8360	372	3	m.	m.	NOUN
ap-8360	372	4	koçak	koçak	NOUN
ap-8360	372	5	.	.	PUNCT
ap-8360	373	1	investigation	investigation	NOUN
ap-8360	373	2	into	into	ADP
ap-8360	373	3	the	the	DET
ap-8360	373	4	microstructure	microstructure	ADJ
ap-8360	373	5	and	and	CCONJ
ap-8360	373	6	mechanical	mechanical	ADJ
ap-8360	373	7	properties	property	NOUN
ap-8360	373	8	of	of	ADP
ap-8360	373	9	diffusion	diffusion	NOUN
ap-8360	373	10	bonded	bond	VERB
ap-8360	373	11	tial	tial	ADJ
ap-8360	373	12	alloys	alloy	NOUN
ap-8360	373	13	.	.	PUNCT
ap-8360	374	1	journal	journal	NOUN
ap-8360	374	2	of	of	ADP
ap-8360	374	3	materials	material	NOUN
ap-8360	374	4	science	science	NOUN
ap-8360	374	5	41(16):5273–5282	41(16):5273–5282	PROPN
ap-8360	374	6	,	,	PUNCT
ap-8360	374	7	2006	2006	NUM
ap-8360	374	8	.	.	PUNCT
ap-8360	375	1	https://doi.org/10.1007/s10853-006-0292-4	https://doi.org/10.1007/s10853-006-0292-4	NUM
ap-8360	375	2	.	.	PUNCT
ap-8360	376	1	[	[	X
ap-8360	376	2	18	18	NUM
ap-8360	376	3	]	]	PUNCT
ap-8360	376	4	m.	m.	NOUN
ap-8360	376	5	henry	henry	PROPN
ap-8360	376	6	,	,	PUNCT
ap-8360	376	7	p.	p.	PROPN
ap-8360	376	8	m.	m.	PROPN
ap-8360	376	9	harrison	harrison	PROPN
ap-8360	376	10	,	,	PUNCT
ap-8360	376	11	i.	i.	PROPN
ap-8360	376	12	henderson	henderson	PROPN
ap-8360	376	13	,	,	PUNCT
ap-8360	376	14	et	et	PROPN
ap-8360	376	15	al	al	PROPN
ap-8360	376	16	.	.	PROPN
ap-8360	376	17	laser	laser	PROPN
ap-8360	376	18	milling	milling	NOUN
ap-8360	376	19	:	:	PUNCT
ap-8360	376	20	a	a	DET
ap-8360	376	21	practical	practical	ADJ
ap-8360	376	22	industrial	industrial	ADJ
ap-8360	376	23	solution	solution	NOUN
ap-8360	376	24	for	for	ADP
ap-8360	376	25	machining	machine	VERB
ap-8360	376	26	a	a	DET
ap-8360	376	27	wide	wide	ADJ
ap-8360	376	28	variety	variety	NOUN
ap-8360	376	29	of	of	ADP
ap-8360	376	30	materials	material	NOUN
ap-8360	376	31	.	.	PUNCT
ap-8360	377	1	proceedings	proceeding	NOUN
ap-8360	377	2	of	of	ADP
ap-8360	377	3	the	the	DET
ap-8360	377	4	spie	spie	PROPN
ap-8360	377	5	5662:627–632	5662:627–632	PROPN
ap-8360	377	6	,	,	PUNCT
ap-8360	377	7	2004	2004	NUM
ap-8360	377	8	.	.	PUNCT
ap-8360	378	1	https://doi.org/10.1117/12.596743	https://doi.org/10.1117/12.596743	NOUN
ap-8360	378	2	.	.	PUNCT
ap-8360	379	1	[	[	X
ap-8360	379	2	19	19	NUM
ap-8360	379	3	]	]	PUNCT
ap-8360	379	4	p.	p.	PROPN
ap-8360	379	5	mannion	mannion	PROPN
ap-8360	379	6	,	,	PUNCT
ap-8360	379	7	t.	t.	PROPN
ap-8360	379	8	j.	j.	PROPN
ap-8360	379	9	glynn	glynn	PROPN
ap-8360	379	10	,	,	PUNCT
ap-8360	379	11	j.	j.	PROPN
ap-8360	379	12	magee	magee	PROPN
ap-8360	379	13	,	,	PUNCT
ap-8360	379	14	et	et	PROPN
ap-8360	379	15	al	al	PROPN
ap-8360	379	16	.	.	PUNCT
ap-8360	379	17	ablation	ablation	NOUN
ap-8360	379	18	thresholds	threshold	NOUN
ap-8360	379	19	in	in	ADP
ap-8360	379	20	ultrafast	ultrafast	ADJ
ap-8360	379	21	laser	laser	NOUN
ap-8360	379	22	micromachining	micromachining	NOUN
ap-8360	379	23	of	of	ADP
ap-8360	379	24	common	common	ADJ
ap-8360	379	25	metals	metal	NOUN
ap-8360	379	26	in	in	ADP
ap-8360	379	27	air	air	NOUN
ap-8360	379	28	.	.	PUNCT
ap-8360	380	1	proceedings	proceeding	NOUN
ap-8360	380	2	spie	spie	NOUN
ap-8360	380	3	:	:	PUNCT
ap-8360	380	4	opto	opto	PROPN
ap-8360	380	5	-	-	PUNCT
ap-8360	380	6	ireland	ireland	NOUN
ap-8360	380	7	2002	2002	NUM
ap-8360	380	8	:	:	PUNCT
ap-8360	380	9	optics	optic	NOUN
ap-8360	380	10	and	and	CCONJ
ap-8360	380	11	photonics	photonic	NOUN
ap-8360	380	12	technologies	technology	NOUN
ap-8360	380	13	and	and	CCONJ
ap-8360	380	14	applications	application	NOUN
ap-8360	380	15	4876:470–478	4876:470–478	PROPN
ap-8360	380	16	,	,	PUNCT
ap-8360	380	17	2003	2003	NUM
ap-8360	380	18	.	.	PUNCT
ap-8360	381	1	https://doi.org/10.1117/12.463744	https://doi.org/10.1117/12.463744	X
ap-8360	381	2	.	.	PUNCT
ap-8360	382	1	[	[	X
ap-8360	382	2	20	20	NUM
ap-8360	382	3	]	]	PUNCT
ap-8360	382	4	hasco	hasco	PROPN
ap-8360	382	5	company	company	PROPN
ap-8360	382	6	.	.	PUNCT
ap-8360	383	1	material	material	NOUN
ap-8360	383	2	characteristics	characteristic	NOUN
ap-8360	383	3	–	–	PUNCT
ap-8360	383	4	1.2379	1.2379	NUM
ap-8360	383	5	.	.	PUNCT
ap-8360	384	1	[	[	X
ap-8360	384	2	2022	2022	NUM
ap-8360	384	3	-	-	SYM
ap-8360	384	4	08	08	NUM
ap-8360	384	5	-	-	PUNCT
ap-8360	384	6	04	04	NUM
ap-8360	384	7	]	]	PUNCT
ap-8360	384	8	,	,	PUNCT
ap-8360	384	9	https	https	NOUN
ap-8360	384	10	:	:	PUNCT
ap-8360	384	11	//www.hasco.com	//www.hasco.com	PUNCT
ap-8360	384	12	/	/	SYM
ap-8360	384	13	en	en	X
ap-8360	384	14	/	/	SYM
ap-8360	384	15	werkstoffdatenblatt_1.2379	werkstoffdatenblatt_1.2379	NOUN
ap-8360	384	16	.	.	PUNCT
ap-8360	385	1	[	[	X
ap-8360	385	2	21	21	NUM
ap-8360	385	3	]	]	PUNCT
ap-8360	385	4	a.	a.	PROPN
ap-8360	385	5	s.	s.	PROPN
ap-8360	385	6	hakeem	hakeem	PROPN
ap-8360	385	7	,	,	PUNCT
ap-8360	385	8	f.	f.	PROPN
ap-8360	385	9	patel	patel	PROPN
ap-8360	385	10	,	,	PUNCT
ap-8360	385	11	n.	n.	PROPN
ap-8360	385	12	minhas	minhas	PROPN
ap-8360	385	13	,	,	PUNCT
ap-8360	385	14	et	et	PROPN
ap-8360	385	15	al	al	PROPN
ap-8360	385	16	.	.	PROPN
ap-8360	385	17	comparative	comparative	ADJ
ap-8360	385	18	evaluation	evaluation	NOUN
ap-8360	385	19	of	of	ADP
ap-8360	385	20	thermal	thermal	ADJ
ap-8360	385	21	and	and	CCONJ
ap-8360	385	22	mechanical	mechanical	ADJ
ap-8360	385	23	properties	property	NOUN
ap-8360	385	24	of	of	ADP
ap-8360	385	25	nickel	nickel	NOUN
ap-8360	385	26	alloy	alloy	NOUN
ap-8360	385	27	718	718	NUM
ap-8360	385	28	prepared	prepare	VERB
ap-8360	385	29	using	use	VERB
ap-8360	385	30	selective	selective	ADJ
ap-8360	385	31	laser	laser	NOUN
ap-8360	385	32	melting	melting	NOUN
ap-8360	385	33	,	,	PUNCT
ap-8360	385	34	spark	spark	NOUN
ap-8360	385	35	plasma	plasma	NOUN
ap-8360	385	36	sintering	sinter	VERB
ap-8360	385	37	,	,	PUNCT
ap-8360	385	38	and	and	CCONJ
ap-8360	385	39	casting	cast	VERB
ap-8360	385	40	methods	method	NOUN
ap-8360	385	41	.	.	PUNCT
ap-8360	386	1	journal	journal	NOUN
ap-8360	386	2	of	of	ADP
ap-8360	386	3	materials	material	NOUN
ap-8360	386	4	research	research	NOUN
ap-8360	386	5	and	and	CCONJ
ap-8360	386	6	technology	technology	NOUN
ap-8360	386	7	12:870–881	12:870–881	NUM
ap-8360	386	8	,	,	PUNCT
ap-8360	386	9	2021	2021	NUM
ap-8360	386	10	.	.	PUNCT
ap-8360	387	1	https://doi.org/10.1016/j.jmrt.2021.03.043	https://doi.org/10.1016/j.jmrt.2021.03.043	NOUN
ap-8360	387	2	.	.	PUNCT
ap-8360	388	1	[	[	X
ap-8360	388	2	22	22	NUM
ap-8360	388	3	]	]	PUNCT
ap-8360	388	4	neonickel	neonickel	NOUN
ap-8360	388	5	.	.	PUNCT
ap-8360	389	1	(	(	PUNCT
ap-8360	389	2	2021	2021	NUM
ap-8360	389	3	)	)	PUNCT
ap-8360	389	4	data	datum	NOUN
ap-8360	389	5	sheet	sheet	NOUN
ap-8360	389	6	–	–	PUNCT
ap-8360	389	7	alloy	alloy	NOUN
ap-8360	389	8	718	718	NUM
ap-8360	389	9	.	.	PUNCT
ap-8360	390	1	[	[	X
ap-8360	390	2	2022	2022	NUM
ap-8360	390	3	-	-	SYM
ap-8360	390	4	08	08	NUM
ap-8360	390	5	-	-	PUNCT
ap-8360	390	6	04	04	NUM
ap-8360	390	7	]	]	PUNCT
ap-8360	390	8	,	,	PUNCT
ap-8360	390	9	https://www.neonickel.com/alloys/	https://www.neonickel.com/alloys/	X
ap-8360	390	10	nickel	nickel	NOUN
ap-8360	390	11	-	-	PUNCT
ap-8360	390	12	alloys	alloy	NOUN
ap-8360	390	13	/	/	SYM
ap-8360	390	14	alloy-718/.	alloy-718/.	NOUN
ap-8360	390	15	[	[	X
ap-8360	390	16	23	23	NUM
ap-8360	390	17	]	]	SYM
ap-8360	390	18	material-properties.org	material-properties.org	X
ap-8360	390	19	.	.	PUNCT
ap-8360	390	20	(	(	PUNCT
ap-8360	390	21	2022	2022	NUM
ap-8360	390	22	)	)	PUNCT
ap-8360	390	23	about	about	ADP
ap-8360	390	24	grade	grade	NOUN
ap-8360	390	25	5	5	NUM
ap-8360	390	26	titanium	titanium	NOUN
ap-8360	390	27	alloy	alloy	NOUN
ap-8360	390	28	–	–	PUNCT
ap-8360	390	29	ti-6al-4v	ti-6al-4v	NOUN
ap-8360	390	30	.	.	PUNCT
ap-8360	391	1	[	[	X
ap-8360	391	2	2022	2022	NUM
ap-8360	391	3	-	-	SYM
ap-8360	391	4	08	08	NUM
ap-8360	391	5	-	-	PUNCT
ap-8360	391	6	04	04	NUM
ap-8360	391	7	]	]	PUNCT
ap-8360	391	8	,	,	PUNCT
ap-8360	391	9	https://material-properties.org/	https://material-properties.org/	PROPN
ap-8360	391	10	ti-6al-4v	ti-6al-4v	NOUN
ap-8360	391	11	-	-	PUNCT
ap-8360	391	12	density	density	NOUN
ap-8360	391	13	-	-	PUNCT
ap-8360	391	14	strength	strength	NOUN
ap-8360	391	15	-	-	PUNCT
ap-8360	391	16	hardness	hardness	NOUN
ap-8360	391	17	-	-	PUNCT
ap-8360	391	18	melting	melting	NOUN
ap-8360	391	19	-	-	PUNCT
ap-8360	391	20	point/.	point/.	NOUN
ap-8360	391	21	[	[	NOUN
ap-8360	391	22	24	24	NUM
ap-8360	391	23	]	]	PUNCT
ap-8360	391	24	azonetwork	azonetwork	NOUN
ap-8360	391	25	.	.	PUNCT
ap-8360	392	1	(	(	PUNCT
ap-8360	392	2	2001	2001	NUM
ap-8360	392	3	)	)	PUNCT
ap-8360	392	4	azo	azo	NOUN
ap-8360	392	5	materials	material	NOUN
ap-8360	392	6	,	,	PUNCT
ap-8360	392	7	stainless	stainless	ADJ
ap-8360	392	8	steel	steel	NOUN
ap-8360	392	9	–	–	PUNCT
ap-8360	392	10	grade	grade	NOUN
ap-8360	392	11	316	316	NUM
ap-8360	392	12	(	(	PUNCT
ap-8360	392	13	uns	uns	NOUN
ap-8360	392	14	s31600	s31600	PROPN
ap-8360	392	15	)	)	PUNCT
ap-8360	392	16	,	,	PUNCT
ap-8360	392	17	datasheet	datasheet	PROPN
ap-8360	392	18	.	.	PUNCT
ap-8360	393	1	[	[	X
ap-8360	393	2	2022	2022	NUM
ap-8360	393	3	-	-	SYM
ap-8360	393	4	08	08	NUM
ap-8360	393	5	-	-	PUNCT
ap-8360	393	6	04	04	NUM
ap-8360	393	7	]	]	PUNCT
ap-8360	393	8	,	,	PUNCT
ap-8360	393	9	https	https	NOUN
ap-8360	393	10	:	:	PUNCT
ap-8360	393	11	//www.azom.com	//www.azom.com	PUNCT
ap-8360	393	12	/	/	SYM
ap-8360	394	1	properties.aspx?articleid=863	properties.aspx?articleid=863	NOUN
ap-8360	394	2	.	.	PUNCT
ap-8360	395	1	[	[	X
ap-8360	395	2	25	25	NUM
ap-8360	395	3	]	]	X
ap-8360	395	4	c.	c.	PROPN
ap-8360	395	5	daniel	daniel	PROPN
ap-8360	395	6	,	,	PUNCT
ap-8360	395	7	j.	j.	PROPN
ap-8360	395	8	manderla	manderla	PROPN
ap-8360	395	9	,	,	PUNCT
ap-8360	395	10	s.	s.	PROPN
ap-8360	395	11	hallmann	hallmann	PROPN
ap-8360	395	12	,	,	PUNCT
ap-8360	395	13	c.	c.	PROPN
ap-8360	395	14	emmelmann	emmelmann	PROPN
ap-8360	395	15	.	.	PUNCT
ap-8360	396	1	influence	influence	NOUN
ap-8360	396	2	of	of	ADP
ap-8360	396	3	an	an	DET
ap-8360	396	4	angular	angular	ADJ
ap-8360	396	5	hatching	hatch	VERB
ap-8360	396	6	exposure	exposure	NOUN
ap-8360	396	7	strategy	strategy	NOUN
ap-8360	396	8	on	on	ADP
ap-8360	396	9	the	the	DET
ap-8360	396	10	surface	surface	NOUN
ap-8360	396	11	roughness	roughness	NOUN
ap-8360	396	12	during	during	ADP
ap-8360	396	13	picosecond	picosecond	NOUN
ap-8360	396	14	laser	laser	NOUN
ap-8360	396	15	ablation	ablation	NOUN
ap-8360	396	16	of	of	ADP
ap-8360	396	17	hard	hard	ADJ
ap-8360	396	18	materials	material	NOUN
ap-8360	396	19	.	.	PUNCT
ap-8360	397	1	physics	physics	NOUN
ap-8360	397	2	procedia	procedia	PROPN
ap-8360	397	3	83:135–146	83:135–146	PROPN
ap-8360	397	4	,	,	PUNCT
ap-8360	397	5	2016	2016	NUM
ap-8360	397	6	.	.	PUNCT
ap-8360	398	1	https://doi.org/10.1016/j.phpro.2016.08.026	https://doi.org/10.1016/j.phpro.2016.08.026	PROPN
ap-8360	398	2	.	.	PUNCT
ap-8360	399	1	[	[	X
ap-8360	399	2	26	26	NUM
ap-8360	399	3	]	]	X
ap-8360	399	4	international	international	ADJ
ap-8360	399	5	organization	organization	NOUN
ap-8360	399	6	for	for	ADP
ap-8360	399	7	standardization	standardization	NOUN
ap-8360	399	8	.	.	PUNCT
ap-8360	400	1	iso	iso	NOUN
ap-8360	400	2	25178	25178	NUM
ap-8360	400	3	-	-	SYM
ap-8360	400	4	2:2021	2:2021	NUM
ap-8360	400	5	,	,	PUNCT
ap-8360	400	6	geometrical	geometrical	ADJ
ap-8360	400	7	product	product	NOUN
ap-8360	400	8	specifications	specification	NOUN
ap-8360	400	9	(	(	PUNCT
ap-8360	400	10	gps	gps	PROPN
ap-8360	400	11	)	)	PUNCT
ap-8360	400	12	–	–	PUNCT
ap-8360	400	13	surface	surface	NOUN
ap-8360	400	14	texture	texture	NOUN
ap-8360	400	15	:	:	PUNCT
ap-8360	400	16	areal	areal	VERB
ap-8360	400	17	–	–	PUNCT
ap-8360	400	18	part	part	NOUN
ap-8360	400	19	2	2	NUM
ap-8360	400	20	:	:	PUNCT
ap-8360	400	21	terms	term	NOUN
ap-8360	400	22	,	,	PUNCT
ap-8360	400	23	definitions	definition	NOUN
ap-8360	400	24	and	and	CCONJ
ap-8360	400	25	surface	surface	NOUN
ap-8360	400	26	texture	texture	NOUN
ap-8360	400	27	parameters	parameter	NOUN
ap-8360	400	28	,	,	PUNCT
ap-8360	400	29	second	second	ADJ
ap-8360	400	30	edition	edition	NOUN
ap-8360	400	31	,	,	PUNCT
ap-8360	400	32	2021	2021	NUM
ap-8360	400	33	.	.	PUNCT
ap-8360	401	1	[	[	X
ap-8360	401	2	27	27	NUM
ap-8360	401	3	]	]	PUNCT
ap-8360	401	4	m.	m.	NOUN
ap-8360	401	5	d.	d.	PROPN
ap-8360	401	6	shirk	shirk	PROPN
ap-8360	401	7	,	,	PUNCT
ap-8360	401	8	p.	p.	NOUN
ap-8360	401	9	a.	a.	PROPN
ap-8360	401	10	molian	molian	PROPN
ap-8360	401	11	.	.	PUNCT
ap-8360	402	1	a	a	DET
ap-8360	402	2	review	review	NOUN
ap-8360	402	3	of	of	ADP
ap-8360	402	4	ultrashort	ultrashort	NOUN
ap-8360	402	5	pulsed	pulse	VERB
ap-8360	402	6	laser	laser	NOUN
ap-8360	402	7	ablation	ablation	NOUN
ap-8360	402	8	of	of	ADP
ap-8360	402	9	materials	material	NOUN
ap-8360	402	10	.	.	PUNCT
ap-8360	403	1	journal	journal	PROPN
ap-8360	403	2	of	of	ADP
ap-8360	403	3	laser	laser	NOUN
ap-8360	403	4	applications	application	NOUN
ap-8360	403	5	10(1):18–28	10(1):18–28	NUM
ap-8360	403	6	,	,	PUNCT
ap-8360	403	7	1998	1998	NUM
ap-8360	403	8	.	.	PUNCT
ap-8360	404	1	https://doi.org/10.2351/1.521827	https://doi.org/10.2351/1.521827	PROPN
ap-8360	404	2	.	.	PUNCT
ap-8360	405	1	[	[	X
ap-8360	405	2	28	28	NUM
ap-8360	405	3	]	]	X
ap-8360	405	4	n.	n.	NOUN
ap-8360	405	5	maharjan	maharjan	PROPN
ap-8360	405	6	,	,	PUNCT
ap-8360	405	7	w.	w.	PROPN
ap-8360	405	8	zhou	zhou	PROPN
ap-8360	405	9	,	,	PUNCT
ap-8360	405	10	y.	y.	PROPN
ap-8360	405	11	zhou	zhou	PROPN
ap-8360	405	12	,	,	PUNCT
ap-8360	405	13	y.	y.	PROPN
ap-8360	405	14	guan	guan	PROPN
ap-8360	405	15	.	.	PUNCT
ap-8360	406	1	ablation	ablation	NOUN
ap-8360	406	2	morphology	morphology	NOUN
ap-8360	406	3	and	and	CCONJ
ap-8360	406	4	ablation	ablation	NOUN
ap-8360	406	5	threshold	threshold	NOUN
ap-8360	406	6	of	of	ADP
ap-8360	406	7	ti-6al-4v	ti-6al-4v	NOUN
ap-8360	406	8	alloy	alloy	NOUN
ap-8360	406	9	during	during	ADP
ap-8360	406	10	femtosecond	femtosecond	NOUN
ap-8360	406	11	laser	laser	NOUN
ap-8360	406	12	processing	processing	NOUN
ap-8360	406	13	.	.	PUNCT
ap-8360	407	1	applied	apply	VERB
ap-8360	407	2	physics	physics	PROPN
ap-8360	407	3	a	a	DET
ap-8360	407	4	124(8):519	124(8):519	NUM
ap-8360	407	5	,	,	PUNCT
ap-8360	407	6	2018	2018	NUM
ap-8360	407	7	.	.	PUNCT
ap-8360	408	1	https://doi.org/10.1007/s00339-018-1928-3	https://doi.org/10.1007/s00339-018-1928-3	NUM
ap-8360	408	2	.	.	PUNCT
ap-8360	409	1	[	[	X
ap-8360	409	2	29	29	NUM
ap-8360	409	3	]	]	X
ap-8360	409	4	g.	g.	NOUN
ap-8360	409	5	raciukaitis	raciukaitis	PROPN
ap-8360	409	6	,	,	PUNCT
ap-8360	409	7	c.	c.	PROPN
ap-8360	409	8	r.	r.	PROPN
ap-8360	409	9	phipps	phipps	PROPN
ap-8360	409	10	,	,	PUNCT
ap-8360	409	11	m.	m.	NOUN
ap-8360	409	12	brikas	brikas	PROPN
ap-8360	409	13	,	,	PUNCT
ap-8360	410	1	et	et	PROPN
ap-8360	410	2	al	al	PROPN
ap-8360	410	3	.	.	PUNCT
ap-8360	410	4	accumulation	accumulation	NOUN
ap-8360	410	5	effects	effect	NOUN
ap-8360	410	6	in	in	ADP
ap-8360	410	7	laser	laser	NOUN
ap-8360	410	8	ablation	ablation	NOUN
ap-8360	410	9	of	of	ADP
ap-8360	410	10	metals	metal	NOUN
ap-8360	410	11	with	with	ADP
ap-8360	410	12	high	high	ADJ
ap-8360	410	13	-	-	PUNCT
ap-8360	410	14	repetition	repetition	NOUN
ap-8360	410	15	-	-	PUNCT
ap-8360	410	16	rate	rate	NOUN
ap-8360	410	17	lasers	laser	NOUN
ap-8360	410	18	.	.	PUNCT
ap-8360	411	1	proceedings	proceeding	NOUN
ap-8360	411	2	spie	spie	NOUN
ap-8360	411	3	:	:	PUNCT
ap-8360	411	4	high	high	ADJ
ap-8360	411	5	-	-	PUNCT
ap-8360	411	6	power	power	NOUN
ap-8360	411	7	laser	laser	NOUN
ap-8360	411	8	ablation	ablation	NOUN
ap-8360	411	9	vii	vii	PROPN
ap-8360	411	10	7005:70052l	7005:70052l	NUM
ap-8360	411	11	,	,	PUNCT
ap-8360	411	12	2008	2008	NUM
ap-8360	411	13	.	.	PUNCT
ap-8360	412	1	https://doi.org/10.1117/12.782937	https://doi.org/10.1117/12.782937	PROPN
ap-8360	412	2	.	.	PUNCT
ap-8360	413	1	[	[	X
ap-8360	413	2	30	30	NUM
ap-8360	413	3	]	]	X
ap-8360	413	4	r.	r.	PROPN
ap-8360	413	5	le	le	PROPN
ap-8360	413	6	harzic	harzic	PROPN
ap-8360	413	7	,	,	PUNCT
ap-8360	413	8	d.	d.	PROPN
ap-8360	413	9	breitling	breitling	PROPN
ap-8360	413	10	,	,	PUNCT
ap-8360	413	11	m.	m.	NOUN
ap-8360	413	12	weikert	weikert	NOUN
ap-8360	413	13	,	,	PUNCT
ap-8360	413	14	et	et	PROPN
ap-8360	413	15	al	al	PROPN
ap-8360	413	16	.	.	PROPN
ap-8360	413	17	pulse	pulse	PROPN
ap-8360	413	18	width	width	NOUN
ap-8360	413	19	and	and	CCONJ
ap-8360	413	20	energy	energy	NOUN
ap-8360	413	21	influence	influence	NOUN
ap-8360	413	22	on	on	ADP
ap-8360	413	23	laser	laser	NOUN
ap-8360	413	24	micromachining	micromachining	NOUN
ap-8360	413	25	of	of	ADP
ap-8360	413	26	metals	metal	NOUN
ap-8360	413	27	in	in	ADP
ap-8360	413	28	a	a	DET
ap-8360	413	29	range	range	NOUN
ap-8360	413	30	of	of	ADP
ap-8360	413	31	100fs	100fs	NOUN
ap-8360	413	32	to	to	ADP
ap-8360	413	33	5ps	5ps	NOUN
ap-8360	413	34	.	.	PUNCT
ap-8360	414	1	applied	apply	VERB
ap-8360	414	2	surface	surface	NOUN
ap-8360	414	3	science	science	NOUN
ap-8360	414	4	249(1	249(1	NUM
ap-8360	414	5	-	-	SYM
ap-8360	414	6	4):322–331	4):322–331	NUM
ap-8360	414	7	,	,	PUNCT
ap-8360	414	8	2005	2005	NUM
ap-8360	414	9	.	.	PUNCT
ap-8360	415	1	https://doi.org/10.1016/j.apsusc.2004.12.027	https://doi.org/10.1016/j.apsusc.2004.12.027	NOUN
ap-8360	415	2	.	.	PUNCT
ap-8360	416	1	[	[	X
ap-8360	416	2	31	31	NUM
ap-8360	416	3	]	]	PUNCT
ap-8360	416	4	t.	t.	PROPN
ap-8360	416	5	l.	l.	PROPN
ap-8360	416	6	see	see	PROPN
ap-8360	416	7	,	,	PUNCT
ap-8360	416	8	z.	z.	PROPN
ap-8360	416	9	liu	liu	PROPN
ap-8360	416	10	,	,	PUNCT
ap-8360	416	11	h.	h.	PROPN
ap-8360	416	12	liu	liu	PROPN
ap-8360	416	13	,	,	PUNCT
ap-8360	416	14	et	et	PROPN
ap-8360	416	15	al	al	PROPN
ap-8360	416	16	.	.	PROPN
ap-8360	416	17	effect	effect	NOUN
ap-8360	416	18	of	of	ADP
ap-8360	416	19	geometry	geometry	NOUN
ap-8360	416	20	measurements	measurement	NOUN
ap-8360	416	21	on	on	ADP
ap-8360	416	22	characteristics	characteristic	NOUN
ap-8360	416	23	of	of	ADP
ap-8360	416	24	femtosecond	femtosecond	NOUN
ap-8360	416	25	laser	laser	NOUN
ap-8360	416	26	ablation	ablation	NOUN
ap-8360	416	27	of	of	ADP
ap-8360	416	28	hr4	hr4	PROPN
ap-8360	416	29	nickel	nickel	NOUN
ap-8360	416	30	alloy	alloy	NOUN
ap-8360	416	31	.	.	PUNCT
ap-8360	417	1	optics	optic	NOUN
ap-8360	417	2	and	and	CCONJ
ap-8360	417	3	lasers	laser	NOUN
ap-8360	417	4	in	in	ADP
ap-8360	417	5	engineering	engineer	VERB
ap-8360	417	6	64:71–78	64:71–78	PROPN
ap-8360	417	7	,	,	PUNCT
ap-8360	417	8	2015	2015	NUM
ap-8360	417	9	.	.	PUNCT
ap-8360	418	1	https://doi.org/10.1016/j.optlaseng.2014.07.011	https://doi.org/10.1016/j.optlaseng.2014.07.011	PROPN
ap-8360	418	2	.	.	PUNCT
ap-8360	419	1	[	[	X
ap-8360	419	2	32	32	NUM
ap-8360	419	3	]	]	PUNCT
ap-8360	419	4	z.	z.	PROPN
ap-8360	419	5	pluta	pluta	PROPN
ap-8360	419	6	,	,	PUNCT
ap-8360	419	7	t.	t.	PROPN
ap-8360	419	8	hryniewicz	hryniewicz	NOUN
ap-8360	419	9	.	.	PUNCT
ap-8360	420	1	thermal	thermal	ADJ
ap-8360	420	2	expansion	expansion	NOUN
ap-8360	420	3	of	of	ADP
ap-8360	420	4	solids	solid	NOUN
ap-8360	420	5	.	.	PUNCT
ap-8360	421	1	journal	journal	PROPN
ap-8360	421	2	of	of	ADP
ap-8360	421	3	modern	modern	ADJ
ap-8360	421	4	physics	physic	NOUN
ap-8360	421	5	3(8):793–802	3(8):793–802	NUM
ap-8360	421	6	,	,	PUNCT
ap-8360	421	7	2012	2012	NUM
ap-8360	421	8	.	.	PUNCT
ap-8360	422	1	https://doi.org/10.4236/jmp.2012.38104	https://doi.org/10.4236/jmp.2012.38104	PROPN
ap-8360	422	2	.	.	PUNCT
ap-8360	423	1	45	45	NUM
ap-8360	423	2	https://doi.org/10.2351/1.5040633	https://doi.org/10.2351/1.5040633	NOUN
ap-8360	423	3	https://doi.org/10.1016/j.apsusc.2004.03.229	https://doi.org/10.1016/j.apsusc.2004.03.229	NUM
ap-8360	423	4	https://doi.org/10.1016/j.ijleo.2020.164628	https://doi.org/10.1016/j.ijleo.2020.164628	NOUN
ap-8360	423	5	https://doi.org/10.1007/s00339-016-0743-y	https://doi.org/10.1007/s00339-016-0743-y	PROPN
ap-8360	423	6	https://doi.org/10.1016/j.apsusc.2019.144594	https://doi.org/10.1016/j.apsusc.2019.144594	PROPN
ap-8360	423	7	https://doi.org/10.3390/nano11081987	https://doi.org/10.3390/nano11081987	PROPN
ap-8360	423	8	https://doi.org/10.1016/j.jmatprotec.2015.07.014	https://doi.org/10.1016/j.jmatprotec.2015.07.014	PROPN
ap-8360	423	9	https://doi.org/10.1117/12.842600	https://doi.org/10.1117/12.842600	PROPN
ap-8360	423	10	https://doi.org/10.1007/s00339-018-1714-2	https://doi.org/10.1007/s00339-018-1714-2	NUM
ap-8360	423	11	https://doi.org/10.1016/j.optlaseng.2018.12.009	https://doi.org/10.1016/j.optlaseng.2018.12.009	NOUN
ap-8360	423	12	https://doi.org/10.1007/s10853-006-0292-4	https://doi.org/10.1007/s10853-006-0292-4	NUM
ap-8360	423	13	https://doi.org/10.1117/12.596743	https://doi.org/10.1117/12.596743	NOUN
ap-8360	424	1	https://doi.org/10.1117/12.463744	https://doi.org/10.1117/12.463744	PUNCT
ap-8360	424	2	https://www.hasco.com/en/werkstoffdatenblatt_1.2379	https://www.hasco.com/en/werkstoffdatenblatt_1.2379	PROPN
ap-8360	424	3	https://www.hasco.com/en/werkstoffdatenblatt_1.2379	https://www.hasco.com/en/werkstoffdatenblatt_1.2379	PROPN
ap-8360	424	4	https://doi.org/10.1016/j.jmrt.2021.03.043	https://doi.org/10.1016/j.jmrt.2021.03.043	PROPN
ap-8360	424	5	https://www.neonickel.com/alloys/nickel-alloys/alloy-718/	https://www.neonickel.com/alloys/nickel-alloys/alloy-718/	PROPN
ap-8360	424	6	https://www.neonickel.com/alloys/nickel-alloys/alloy-718/	https://www.neonickel.com/alloys/nickel-alloys/alloy-718/	PROPN
ap-8360	424	7	https://material-properties.org/ti-6al-4v-density-strength-hardness-melting-point/	https://material-properties.org/ti-6al-4v-density-strength-hardness-melting-point/	PROPN
ap-8360	424	8	https://material-properties.org/ti-6al-4v-density-strength-hardness-melting-point/	https://material-properties.org/ti-6al-4v-density-strength-hardness-melting-point/	PROPN
ap-8360	424	9	https://www.azom.com/properties.aspx?articleid=863	https://www.azom.com/properties.aspx?articleid=863	PROPN
ap-8360	424	10	https://www.azom.com/properties.aspx?articleid=863	https://www.azom.com/properties.aspx?articleid=863	PROPN
ap-8360	424	11	https://doi.org/10.1016/j.phpro.2016.08.026	https://doi.org/10.1016/j.phpro.2016.08.026	PROPN
ap-8360	424	12	https://doi.org/10.2351/1.521827	https://doi.org/10.2351/1.521827	PROPN
ap-8360	424	13	https://doi.org/10.1007/s00339-018-1928-3	https://doi.org/10.1007/s00339-018-1928-3	NUM
ap-8360	424	14	https://doi.org/10.1117/12.782937	https://doi.org/10.1117/12.782937	PROPN
ap-8360	425	1	https://doi.org/10.1016/j.apsusc.2004.12.027	https://doi.org/10.1016/j.apsusc.2004.12.027	VERB
ap-8360	425	2	https://doi.org/10.1016/j.optlaseng.2014.07.011	https://doi.org/10.1016/j.optlaseng.2014.07.011	PROPN
ap-8360	425	3	https://doi.org/10.4236/jmp.2012.38104	https://doi.org/10.4236/jmp.2012.38104	NOUN
ap-8360	425	4	t.	t.	PROPN
ap-8360	425	5	primus	primus	PROPN
ap-8360	425	6	,	,	PUNCT
ap-8360	425	7	m.	m.	NOUN
ap-8360	425	8	novák	novák	PROPN
ap-8360	425	9	,	,	PUNCT
ap-8360	425	10	p.	p.	PROPN
ap-8360	425	11	zeman	zeman	PROPN
ap-8360	425	12	,	,	PUNCT
ap-8360	425	13	f.	f.	PROPN
ap-8360	425	14	holešovský	holešovský	PROPN
ap-8360	425	15	acta	acta	PROPN
ap-8360	425	16	polytechnica	polytechnica	PROPN
ap-8360	426	1	[	[	X
ap-8360	426	2	33	33	NUM
ap-8360	426	3	]	]	PUNCT
ap-8360	426	4	g.	g.	PROPN
ap-8360	426	5	schnell	schnell	PROPN
ap-8360	426	6	,	,	PUNCT
ap-8360	426	7	h.	h.	PROPN
ap-8360	426	8	lund	lund	PROPN
ap-8360	426	9	,	,	PUNCT
ap-8360	426	10	s.	s.	PROPN
ap-8360	426	11	bartling	bartling	PROPN
ap-8360	426	12	,	,	PUNCT
ap-8360	426	13	et	et	PROPN
ap-8360	426	14	al	al	PROPN
ap-8360	426	15	.	.	PROPN
ap-8360	426	16	heat	heat	PROPN
ap-8360	426	17	accumulation	accumulation	NOUN
ap-8360	426	18	during	during	ADP
ap-8360	426	19	femtosecond	femtosecond	NOUN
ap-8360	426	20	laser	laser	NOUN
ap-8360	426	21	treatment	treatment	NOUN
ap-8360	426	22	at	at	ADP
ap-8360	426	23	high	high	ADJ
ap-8360	426	24	repetition	repetition	NOUN
ap-8360	426	25	rate	rate	NOUN
ap-8360	426	26	–	–	PUNCT
ap-8360	426	27	a	a	DET
ap-8360	426	28	morphological	morphological	ADJ
ap-8360	426	29	,	,	PUNCT
ap-8360	426	30	chemical	chemical	ADJ
ap-8360	426	31	and	and	CCONJ
ap-8360	426	32	crystallographic	crystallographic	ADJ
ap-8360	426	33	characterization	characterization	NOUN
ap-8360	426	34	of	of	ADP
ap-8360	426	35	self	self	NOUN
ap-8360	426	36	-	-	PUNCT
ap-8360	426	37	organized	organize	VERB
ap-8360	426	38	structures	structure	NOUN
ap-8360	426	39	on	on	ADP
ap-8360	426	40	ti6al4v	ti6al4v	PROPN
ap-8360	426	41	.	.	PUNCT
ap-8360	427	1	applied	apply	VERB
ap-8360	427	2	surface	surface	NOUN
ap-8360	427	3	science	science	NOUN
ap-8360	427	4	570:151115	570:151115	NUM
ap-8360	427	5	,	,	PUNCT
ap-8360	427	6	2021	2021	NUM
ap-8360	427	7	.	.	PUNCT
ap-8360	428	1	https://doi.org/10.1016/j.apsusc.2021.151115	https://doi.org/10.1016/j.apsusc.2021.151115	PROPN
ap-8360	428	2	.	.	PUNCT
ap-8360	429	1	[	[	X
ap-8360	429	2	34	34	NUM
ap-8360	429	3	]	]	X
ap-8360	429	4	m.	m.	NOUN
ap-8360	429	5	bieda	bieda	PROPN
ap-8360	429	6	,	,	PUNCT
ap-8360	429	7	c.	c.	PROPN
ap-8360	429	8	schmädicke	schmädicke	PROPN
ap-8360	429	9	,	,	PUNCT
ap-8360	429	10	t.	t.	PROPN
ap-8360	429	11	roch	roch	PROPN
ap-8360	429	12	,	,	PUNCT
ap-8360	429	13	a.	a.	NOUN
ap-8360	429	14	lasagni	lasagni	NOUN
ap-8360	429	15	.	.	PUNCT
ap-8360	430	1	ultra	ultra	ADJ
ap-8360	430	2	-	-	ADJ
ap-8360	430	3	low	low	ADJ
ap-8360	430	4	friction	friction	NOUN
ap-8360	430	5	on	on	ADP
ap-8360	430	6	100cr6	100cr6	NUM
ap-8360	430	7	-	-	PUNCT
ap-8360	430	8	steel	steel	NOUN
ap-8360	430	9	surfaces	surface	NOUN
ap-8360	430	10	after	after	ADP
ap-8360	430	11	direct	direct	ADJ
ap-8360	430	12	laser	laser	NOUN
ap-8360	430	13	interference	interference	NOUN
ap-8360	430	14	patterning	pattern	VERB
ap-8360	430	15	.	.	PUNCT
ap-8360	431	1	advanced	advanced	ADJ
ap-8360	431	2	engineering	engineering	NOUN
ap-8360	431	3	materials	material	NOUN
ap-8360	431	4	17(1):102–108	17(1):102–108	NUM
ap-8360	431	5	,	,	PUNCT
ap-8360	431	6	2015	2015	NUM
ap-8360	431	7	.	.	PUNCT
ap-8360	432	1	https://doi.org/10.1002/adem.201400007	https://doi.org/10.1002/adem.201400007	ADJ
ap-8360	432	2	.	.	PUNCT
ap-8360	433	1	46	46	NUM
ap-8360	433	2	https://doi.org/10.1016/j.apsusc.2021.151115	https://doi.org/10.1016/j.apsusc.2021.151115	PROPN
ap-8360	433	3	https://doi.org/10.1002/adem.201400007	https://doi.org/10.1002/adem.201400007	ADJ
ap-8360	433	4	vol	vol	NOUN
ap-8360	433	5	.	.	PUNCT
ap-8360	434	1	63	63	NUM
ap-8360	434	2	no	no	NOUN
ap-8360	434	3	.	.	PUNCT
ap-8360	435	1	1/2023	1/2023	NUM
ap-8360	435	2	femtosecond	femtosecond	NOUN
ap-8360	435	3	laser	laser	NOUN
ap-8360	435	4	processing	processing	NOUN
ap-8360	435	5	of	of	ADP
ap-8360	435	6	advanced	advanced	ADJ
ap-8360	435	7	technical	technical	ADJ
ap-8360	435	8	materials	material	NOUN
ap-8360	435	9	a.	a.	NOUN
ap-8360	435	10	appendices	appendix	NOUN
ap-8360	435	11	figure	figure	VERB
ap-8360	435	12	9	9	NUM
ap-8360	435	13	.	.	PUNCT
ap-8360	436	1	3d	3d	NUM
ap-8360	436	2	images	image	NOUN
ap-8360	436	3	of	of	ADP
ap-8360	436	4	ablated	ablated	ADJ
ap-8360	436	5	materials	material	NOUN
ap-8360	436	6	a	a	PRON
ap-8360	436	7	)	)	PUNCT
ap-8360	436	8	tool	tool	NOUN
ap-8360	436	9	steel	steel	NOUN
ap-8360	436	10	;	;	PUNCT
ap-8360	436	11	b	b	X
ap-8360	436	12	)	)	PUNCT
ap-8360	436	13	stainless	stainless	ADJ
ap-8360	436	14	steel	steel	NOUN
ap-8360	436	15	;	;	PUNCT
ap-8360	436	16	c	c	X
ap-8360	436	17	)	)	PUNCT
ap-8360	436	18	inconel	inconel	NOUN
ap-8360	436	19	718	718	NUM
ap-8360	436	20	;	;	PUNCT
ap-8360	436	21	d	d	X
ap-8360	436	22	)	)	PUNCT
ap-8360	436	23	ti6al4v	ti6al4v	NOUN
ap-8360	436	24	,	,	PUNCT
ap-8360	436	25	using	use	VERB
ap-8360	436	26	iih	iih	PROPN
ap-8360	436	27	and	and	CCONJ
ap-8360	436	28	f	f	PROPN
ap-8360	436	29	=	=	PROPN
ap-8360	436	30	0.52	0.52	NUM
ap-8360	436	31	j	j	PROPN
ap-8360	436	32	/	/	SYM
ap-8360	436	33	cm2	cm2	PROPN
ap-8360	436	34	.	.	PROPN
ap-8360	436	35	47	47	NUM
ap-8360	436	36	t.	t.	PROPN
ap-8360	436	37	primus	primus	PROPN
ap-8360	436	38	,	,	PUNCT
ap-8360	436	39	m.	m.	NOUN
ap-8360	436	40	novák	novák	PROPN
ap-8360	436	41	,	,	PUNCT
ap-8360	436	42	p.	p.	PROPN
ap-8360	436	43	zeman	zeman	PROPN
ap-8360	436	44	,	,	PUNCT
ap-8360	436	45	f.	f.	PROPN
ap-8360	436	46	holešovský	holešovský	PROPN
ap-8360	436	47	acta	acta	PROPN
ap-8360	436	48	polytechnica	polytechnica	PROPN
ap-8360	436	49	a	a	PRON
ap-8360	436	50	)	)	PUNCT
ap-8360	436	51	b	b	NOUN
ap-8360	436	52	)	)	PUNCT
ap-8360	436	53	c	c	NOUN
ap-8360	436	54	)	)	PUNCT
ap-8360	436	55	d	d	NOUN
ap-8360	436	56	)	)	PUNCT
ap-8360	436	57	figure	figure	NOUN
ap-8360	436	58	10	10	NUM
ap-8360	436	59	.	.	PUNCT
ap-8360	437	1	examples	example	NOUN
ap-8360	437	2	of	of	ADP
ap-8360	437	3	the	the	DET
ap-8360	437	4	dot	dot	NOUN
ap-8360	437	5	structure	structure	NOUN
ap-8360	437	6	fabricated	fabricate	VERB
ap-8360	437	7	in	in	ADP
ap-8360	437	8	the	the	DET
ap-8360	437	9	tested	test	VERB
ap-8360	437	10	materials	material	NOUN
ap-8360	437	11	:	:	PUNCT
ap-8360	437	12	left	leave	VERB
ap-8360	437	13	–	–	PUNCT
ap-8360	437	14	2d	2d	NUM
ap-8360	437	15	image	image	NOUN
ap-8360	437	16	,	,	PUNCT
ap-8360	437	17	right	right	ADJ
ap-8360	437	18	–	–	PUNCT
ap-8360	437	19	depth	depth	NOUN
ap-8360	437	20	profile	profile	NOUN
ap-8360	437	21	,	,	PUNCT
ap-8360	437	22	a	a	DET
ap-8360	437	23	)	)	PUNCT
ap-8360	437	24	tool	tool	NOUN
ap-8360	437	25	steel	steel	NOUN
ap-8360	437	26	;	;	PUNCT
ap-8360	437	27	b	b	X
ap-8360	437	28	)	)	PUNCT
ap-8360	437	29	inconel	inconel	NOUN
ap-8360	437	30	718	718	NUM
ap-8360	437	31	;	;	PUNCT
ap-8360	437	32	c	c	X
ap-8360	437	33	)	)	PUNCT
ap-8360	437	34	ti6al4v	ti6al4v	ADP
ap-8360	437	35	;	;	PUNCT
ap-8360	437	36	d	d	X
ap-8360	437	37	)	)	PUNCT
ap-8360	437	38	stainless	stainless	ADJ
ap-8360	437	39	steel	steel	NOUN
ap-8360	437	40	.	.	PUNCT
ap-8360	438	1	48	48	NUM
ap-8360	438	2	vol	vol	NOUN
ap-8360	438	3	.	.	PUNCT
ap-8360	439	1	63	63	NUM
ap-8360	439	2	no	no	NOUN
ap-8360	439	3	.	.	PUNCT
ap-8360	440	1	1/2023	1/2023	NUM
ap-8360	440	2	femtosecond	femtosecond	NOUN
ap-8360	440	3	laser	laser	NOUN
ap-8360	440	4	processing	processing	NOUN
ap-8360	440	5	of	of	ADP
ap-8360	440	6	advanced	advanced	ADJ
ap-8360	440	7	technical	technical	ADJ
ap-8360	440	8	materials	material	NOUN
ap-8360	440	9	(	(	PUNCT
ap-8360	440	10	a	a	NOUN
ap-8360	440	11	)	)	PUNCT
ap-8360	440	12	(	(	PUNCT
ap-8360	440	13	b	b	X
ap-8360	440	14	)	)	PUNCT
ap-8360	440	15	(	(	PUNCT
ap-8360	440	16	c	c	X
ap-8360	440	17	)	)	PUNCT
ap-8360	440	18	(	(	PUNCT
ap-8360	440	19	d	d	X
ap-8360	440	20	)	)	PUNCT
ap-8360	440	21	figure	figure	NOUN
ap-8360	440	22	11	11	NUM
ap-8360	440	23	.	.	PUNCT
ap-8360	441	1	examples	example	NOUN
ap-8360	441	2	of	of	ADP
ap-8360	441	3	the	the	DET
ap-8360	441	4	honeycomb	honeycomb	NOUN
ap-8360	441	5	structure	structure	NOUN
ap-8360	441	6	fabricated	fabricate	VERB
ap-8360	441	7	in	in	ADP
ap-8360	441	8	the	the	DET
ap-8360	441	9	tested	test	VERB
ap-8360	441	10	materials	material	NOUN
ap-8360	441	11	:	:	PUNCT
ap-8360	441	12	left	leave	VERB
ap-8360	441	13	–	–	PUNCT
ap-8360	441	14	3d	3d	NUM
ap-8360	441	15	image	image	NOUN
ap-8360	441	16	,	,	PUNCT
ap-8360	441	17	right	right	ADJ
ap-8360	441	18	–	–	PUNCT
ap-8360	441	19	depth	depth	NOUN
ap-8360	441	20	profile	profile	NOUN
ap-8360	441	21	,	,	PUNCT
ap-8360	441	22	a	a	DET
ap-8360	441	23	)	)	PUNCT
ap-8360	441	24	tool	tool	NOUN
ap-8360	441	25	steel	steel	NOUN
ap-8360	441	26	;	;	PUNCT
ap-8360	441	27	b	b	X
ap-8360	441	28	)	)	PUNCT
ap-8360	441	29	inconel	inconel	NOUN
ap-8360	441	30	718	718	NUM
ap-8360	441	31	;	;	PUNCT
ap-8360	441	32	c	c	X
ap-8360	441	33	)	)	PUNCT
ap-8360	442	1	ti6al4v	ti6al4v	ADP
ap-8360	442	2	;	;	PUNCT
ap-8360	442	3	d	d	X
ap-8360	442	4	)	)	PUNCT
ap-8360	442	5	stainless	stainless	ADJ
ap-8360	442	6	steel	steel	NOUN
ap-8360	442	7	.	.	PUNCT
ap-8360	443	1	49	49	NUM
ap-8360	443	2	acta	acta	PROPN
ap-8360	443	3	polytechnica	polytechnica	PROPN
ap-8360	443	4	63(1):36–49	63(1):36–49	NUM
ap-8360	443	5	,	,	PUNCT
ap-8360	443	6	2023	2023	NUM
ap-8360	443	7	1	1	NUM
ap-8360	443	8	introduction	introduction	NOUN
ap-8360	443	9	2	2	NUM
ap-8360	443	10	materials	material	NOUN
ap-8360	443	11	and	and	CCONJ
ap-8360	443	12	methods	method	NOUN
ap-8360	443	13	2.1	2.1	NUM
ap-8360	443	14	laser	laser	NOUN
ap-8360	443	15	set	set	NOUN
ap-8360	443	16	-	-	PUNCT
ap-8360	443	17	up	up	ADP
ap-8360	443	18	2.2	2.2	NUM
ap-8360	443	19	materials	material	NOUN
ap-8360	443	20	3	3	NUM
ap-8360	443	21	methods	method	NOUN
ap-8360	443	22	3.1	3.1	NUM
ap-8360	443	23	pre	pre	NOUN
ap-8360	443	24	-	-	NOUN
ap-8360	443	25	experiment	experiment	NOUN
ap-8360	443	26	of	of	ADP
ap-8360	443	27	hatching	hatch	VERB
ap-8360	443	28	angle	angle	NOUN
ap-8360	443	29	evaluation	evaluation	NOUN
ap-8360	443	30	3.2	3.2	NUM
ap-8360	443	31	ablation	ablation	NOUN
ap-8360	443	32	thresholds	threshold	VERB
ap-8360	443	33	3.3	3.3	NUM
ap-8360	443	34	removal	removal	NOUN
ap-8360	443	35	efficiency	efficiency	NOUN
ap-8360	443	36	3.4	3.4	NUM
ap-8360	443	37	increasing	increase	VERB
ap-8360	443	38	scanning	scan	VERB
ap-8360	443	39	speed	speed	NOUN
ap-8360	443	40	and	and	CCONJ
ap-8360	443	41	repetition	repetition	NOUN
ap-8360	443	42	rates	rate	NOUN
ap-8360	443	43	3.5	3.5	NUM
ap-8360	443	44	surface	surface	NOUN
ap-8360	443	45	structuring	structure	VERB
ap-8360	443	46	4	4	NUM
ap-8360	443	47	results	result	NOUN
ap-8360	443	48	and	and	CCONJ
ap-8360	443	49	discussions	discussion	NOUN
ap-8360	443	50	4.1	4.1	NUM
ap-8360	443	51	effect	effect	NOUN
ap-8360	443	52	of	of	ADP
ap-8360	443	53	hatching	hatch	VERB
ap-8360	443	54	angle	angle	NOUN
ap-8360	443	55	on	on	ADP
ap-8360	443	56	surface	surface	NOUN
ap-8360	443	57	roughness	roughness	NOUN
ap-8360	443	58	4.2	4.2	NUM
ap-8360	443	59	ablation	ablation	NOUN
ap-8360	443	60	threshold	threshold	VERB
ap-8360	443	61	4.3	4.3	NUM
ap-8360	443	62	removal	removal	NOUN
ap-8360	443	63	efficiency	efficiency	NOUN
ap-8360	443	64	4.4	4.4	NUM
ap-8360	443	65	increasing	increase	VERB
ap-8360	443	66	scanning	scan	VERB
ap-8360	443	67	speed	speed	NOUN
ap-8360	443	68	and	and	CCONJ
ap-8360	443	69	repetition	repetition	NOUN
ap-8360	443	70	rates	rate	NOUN
ap-8360	443	71	4.5	4.5	NUM
ap-8360	443	72	surface	surface	NOUN
ap-8360	443	73	structuring	structure	VERB
ap-8360	443	74	5	5	NUM
ap-8360	443	75	conclusions	conclusion	NOUN
ap-8360	443	76	list	list	NOUN
ap-8360	443	77	of	of	ADP
ap-8360	443	78	symbols	symbol	NOUN
ap-8360	443	79	acknowledgements	acknowledgement	NOUN
ap-8360	443	80	references	reference	NOUN
ap-8360	443	81	a	a	DET
ap-8360	443	82	appendices	appendix	NOUN