id	sid	tid	token	lemma	pos
ap-900	1	1	ap06_6.vp	ap06_6.vp	ADJ
ap-900	1	2	1	1	NUM
ap-900	1	3	introduction	introduction	NOUN
ap-900	1	4	gallium	gallium	NOUN
ap-900	1	5	nitride	nitride	NOUN
ap-900	1	6	(	(	PUNCT
ap-900	1	7	gan	gan	PROPN
ap-900	1	8	)	)	PUNCT
ap-900	1	9	has	have	AUX
ap-900	1	10	become	become	VERB
ap-900	1	11	one	one	NUM
ap-900	1	12	of	of	ADP
ap-900	1	13	the	the	DET
ap-900	1	14	most	most	ADV
ap-900	1	15	promising	promising	ADJ
ap-900	1	16	wide	wide	ADJ
ap-900	1	17	band	band	NOUN
ap-900	1	18	gap	gap	NOUN
ap-900	1	19	(	(	PUNCT
ap-900	1	20	3.4	3.4	NUM
ap-900	1	21	ev	ev	NOUN
ap-900	1	22	)	)	PUNCT
ap-900	1	23	direct	direct	ADJ
ap-900	1	24	semiconductor	semiconductor	NOUN
ap-900	1	25	materials	material	NOUN
ap-900	1	26	for	for	ADP
ap-900	1	27	utilization	utilization	NOUN
ap-900	1	28	in	in	ADP
ap-900	1	29	high	high	ADJ
ap-900	1	30	power	power	NOUN
ap-900	1	31	and	and	CCONJ
ap-900	1	32	high	high	ADJ
ap-900	1	33	frequency	frequency	NOUN
ap-900	1	34	transistors	transistor	NOUN
ap-900	1	35	,	,	PUNCT
ap-900	1	36	solid	solid	ADJ
ap-900	1	37	state	state	NOUN
ap-900	1	38	photo	photo	NOUN
ap-900	1	39	detectors	detector	NOUN
ap-900	1	40	and	and	CCONJ
ap-900	1	41	high	high	ADJ
ap-900	1	42	brightness	brightness	NOUN
ap-900	1	43	blue	blue	ADJ
ap-900	1	44	light	light	ADJ
ap-900	1	45	emitting	emit	VERB
ap-900	1	46	diodes	diode	NOUN
ap-900	1	47	(	(	PUNCT
ap-900	1	48	leds	led	NOUN
ap-900	1	49	)	)	PUNCT
ap-900	1	50	,	,	PUNCT
ap-900	1	51	laser	laser	NOUN
ap-900	1	52	diodes	diode	NOUN
ap-900	1	53	(	(	PUNCT
ap-900	1	54	lds	ld	NOUN
ap-900	1	55	)	)	PUNCT
ap-900	1	56	and	and	CCONJ
ap-900	1	57	full	full	ADJ
ap-900	1	58	colour	colour	NOUN
ap-900	1	59	flat	flat	ADJ
ap-900	1	60	panel	panel	NOUN
ap-900	1	61	displays	display	VERB
ap-900	1	62	[	[	X
ap-900	1	63	1	1	NUM
ap-900	1	64	]	]	PUNCT
ap-900	1	65	,	,	PUNCT
ap-900	1	66	[	[	X
ap-900	1	67	2	2	NUM
ap-900	1	68	]	]	PUNCT
ap-900	1	69	.	.	PUNCT
ap-900	2	1	er3	er3	PROPN
ap-900	2	2	+	+	ADJ
ap-900	2	3	-doped	-doped	ADJ
ap-900	2	4	optical	optical	ADJ
ap-900	2	5	materials	material	NOUN
ap-900	2	6	are	be	AUX
ap-900	2	7	candidates	candidate	NOUN
ap-900	2	8	for	for	ADP
ap-900	2	9	fabrication	fabrication	NOUN
ap-900	2	10	of	of	ADP
ap-900	2	11	optical	optical	ADJ
ap-900	2	12	amplifiers	amplifier	NOUN
ap-900	2	13	and	and	CCONJ
ap-900	2	14	lasers	laser	NOUN
ap-900	2	15	operating	operate	VERB
ap-900	2	16	at	at	ADP
ap-900	2	17	1	1	NUM
ap-900	2	18	550	550	NUM
ap-900	2	19	nm	nm	NOUN
ap-900	2	20	[	[	X
ap-900	2	21	3	3	NUM
ap-900	2	22	]	]	PUNCT
ap-900	2	23	due	due	ADP
ap-900	2	24	to	to	ADP
ap-900	2	25	the	the	DET
ap-900	2	26	er3	er3	NOUN
ap-900	2	27	+	+	SYM
ap-900	2	28	intra-4f	intra-4f	NOUN
ap-900	2	29	emission	emission	NOUN
ap-900	2	30	,	,	PUNCT
ap-900	2	31	which	which	PRON
ap-900	2	32	corresponds	correspond	VERB
ap-900	2	33	to	to	ADP
ap-900	2	34	the	the	DET
ap-900	2	35	4i13/2	4i13/2	ADJ
ap-900	2	36	�	�	PROPN
ap-900	2	37	4i15/2	4i15/2	PROPN
ap-900	2	38	transition	transition	NOUN
ap-900	2	39	.	.	PUNCT
ap-900	3	1	this	this	DET
ap-900	3	2	wavelength	wavelength	NOUN
ap-900	3	3	is	be	AUX
ap-900	3	4	commonly	commonly	ADV
ap-900	3	5	used	use	VERB
ap-900	3	6	in	in	ADP
ap-900	3	7	telecommunication	telecommunication	NOUN
ap-900	3	8	systems	system	NOUN
ap-900	3	9	due	due	ADP
ap-900	3	10	to	to	ADP
ap-900	3	11	the	the	DET
ap-900	3	12	fact	fact	NOUN
ap-900	3	13	that	that	SCONJ
ap-900	3	14	it	it	PRON
ap-900	3	15	corresponds	correspond	VERB
ap-900	3	16	to	to	ADP
ap-900	3	17	a	a	DET
ap-900	3	18	low	low	ADJ
ap-900	3	19	loss	loss	NOUN
ap-900	3	20	window	window	NOUN
ap-900	3	21	of	of	ADP
ap-900	3	22	silica	silica	NOUN
ap-900	3	23	based	base	VERB
ap-900	3	24	optical	optical	ADJ
ap-900	3	25	fibers	fiber	NOUN
ap-900	3	26	.	.	PUNCT
ap-900	4	1	erbium	erbium	NOUN
ap-900	4	2	doped	dope	VERB
ap-900	4	3	amplifiers	amplifier	NOUN
ap-900	4	4	are	be	AUX
ap-900	4	5	usually	usually	ADV
ap-900	4	6	optically	optically	ADV
ap-900	4	7	pumped	pump	VERB
ap-900	4	8	by	by	ADP
ap-900	4	9	a	a	DET
ap-900	4	10	source	source	NOUN
ap-900	4	11	operating	operate	VERB
ap-900	4	12	at	at	ADP
ap-900	4	13	1	1	NUM
ap-900	4	14	480	480	NUM
ap-900	4	15	nm	nm	NOUN
ap-900	4	16	or	or	CCONJ
ap-900	4	17	980	980	NUM
ap-900	4	18	nm	nm	NOUN
ap-900	4	19	.	.	PUNCT
ap-900	5	1	when	when	SCONJ
ap-900	5	2	only	only	ADV
ap-900	5	3	er3	er3	PROPN
ap-900	5	4	+	+	SYM
ap-900	5	5	ions	ion	NOUN
ap-900	5	6	are	be	AUX
ap-900	5	7	present	present	ADJ
ap-900	5	8	in	in	ADP
ap-900	5	9	short	short	ADJ
ap-900	5	10	waveguides	waveguide	NOUN
ap-900	5	11	,	,	PUNCT
ap-900	5	12	optical	optical	ADJ
ap-900	5	13	pumping	pumping	NOUN
ap-900	5	14	at	at	ADP
ap-900	5	15	980	980	NUM
ap-900	5	16	nm	nm	NOUN
ap-900	5	17	is	be	AUX
ap-900	5	18	not	not	PART
ap-900	5	19	sufficiently	sufficiently	ADV
ap-900	5	20	efficient	efficient	ADJ
ap-900	5	21	,	,	PUNCT
ap-900	5	22	because	because	SCONJ
ap-900	5	23	the	the	DET
ap-900	5	24	er3	er3	PROPN
ap-900	5	25	+	+	SYM
ap-900	5	26	absorption	absorption	NOUN
ap-900	5	27	cross	cross	NOUN
ap-900	5	28	-	-	NOUN
ap-900	5	29	section	section	NOUN
ap-900	5	30	at	at	ADP
ap-900	5	31	this	this	DET
ap-900	5	32	wavelength	wavelength	NOUN
ap-900	5	33	is	be	AUX
ap-900	5	34	not	not	PART
ap-900	5	35	very	very	ADV
ap-900	5	36	good	good	ADJ
ap-900	5	37	.	.	PUNCT
ap-900	6	1	this	this	DET
ap-900	6	2	problem	problem	NOUN
ap-900	6	3	can	can	AUX
ap-900	6	4	be	be	AUX
ap-900	6	5	overcome	overcome	VERB
ap-900	6	6	by	by	ADP
ap-900	6	7	adding	add	VERB
ap-900	6	8	yb3	yb3	ADP
ap-900	6	9	+	+	PROPN
ap-900	6	10	,	,	PUNCT
ap-900	6	11	as	as	SCONJ
ap-900	6	12	its	its	PRON
ap-900	6	13	2f5/2	2f5/2	NUM
ap-900	6	14	�	�	PROPN
ap-900	6	15	2f7/2	2f7/2	NUM
ap-900	6	16	transition	transition	NOUN
ap-900	6	17	is	be	AUX
ap-900	6	18	approximately	approximately	ADV
ap-900	6	19	ten	ten	NUM
ap-900	6	20	times	time	NOUN
ap-900	6	21	stronger	strong	ADJ
ap-900	6	22	than	than	ADP
ap-900	6	23	that	that	PRON
ap-900	6	24	of	of	ADP
ap-900	6	25	4i13/2	4i13/2	ADJ
ap-900	6	26	�	�	PROPN
ap-900	6	27	4i15/2	4i15/2	NOUN
ap-900	7	1	[	[	X
ap-900	7	2	4	4	NUM
ap-900	7	3	]	]	PUNCT
ap-900	7	4	,	,	PUNCT
ap-900	8	1	[	[	X
ap-900	8	2	5	5	NUM
ap-900	8	3	]	]	PUNCT
ap-900	8	4	.	.	PUNCT
ap-900	9	1	the	the	DET
ap-900	9	2	basic	basic	ADJ
ap-900	9	3	schematic	schematic	ADJ
ap-900	9	4	energy	energy	NOUN
ap-900	9	5	levels	level	NOUN
ap-900	9	6	and	and	CCONJ
ap-900	9	7	laser	laser	NOUN
ap-900	9	8	transitions	transition	NOUN
ap-900	9	9	of	of	ADP
ap-900	9	10	er3	er3	NOUN
ap-900	9	11	+	+	NUM
ap-900	9	12	and	and	CCONJ
ap-900	9	13	yb3	yb3	NOUN
ap-900	9	14	+	+	NUM
ap-900	9	15	are	be	AUX
ap-900	9	16	shown	show	VERB
ap-900	9	17	in	in	ADP
ap-900	9	18	fig	fig	NOUN
ap-900	9	19	.	.	PUNCT
ap-900	10	1	1	1	X
ap-900	10	2	.	.	X
ap-900	11	1	©	©	PROPN
ap-900	11	2	czech	czech	PROPN
ap-900	11	3	technical	technical	PROPN
ap-900	11	4	university	university	PROPN
ap-900	11	5	publishing	publishing	NOUN
ap-900	11	6	house	house	NOUN
ap-900	11	7	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-900	11	8	49	49	NUM
ap-900	11	9	acta	acta	PROPN
ap-900	11	10	polytechnica	polytechnica	PROPN
ap-900	11	11	vol	vol	NOUN
ap-900	11	12	.	.	PUNCT
ap-900	12	1	46	46	NUM
ap-900	12	2	no	no	INTJ
ap-900	12	3	.	.	PUNCT
ap-900	13	1	6/2006	6/2006	NUM
ap-900	13	2	properties	property	NOUN
ap-900	13	3	of	of	ADP
ap-900	13	4	erbium	erbium	NOUN
ap-900	13	5	and	and	CCONJ
ap-900	13	6	ytterbium	ytterbium	NOUN
ap-900	13	7	doped	dope	VERB
ap-900	13	8	gallium	gallium	NOUN
ap-900	13	9	nitride	nitride	ADJ
ap-900	13	10	layers	layer	NOUN
ap-900	13	11	fabricated	fabricate	VERB
ap-900	13	12	by	by	ADP
ap-900	13	13	magnetron	magnetron	NOUN
ap-900	13	14	sputtering	sputtering	NOUN
ap-900	13	15	v.	v.	ADP
ap-900	13	16	prajzler	prajzler	NOUN
ap-900	13	17	,	,	PUNCT
ap-900	13	18	z.	z.	PROPN
ap-900	13	19	burian	burian	PROPN
ap-900	13	20	,	,	PUNCT
ap-900	13	21	i.	i.	PROPN
ap-900	13	22	hüttel	hüttel	PROPN
ap-900	13	23	,	,	PUNCT
ap-900	13	24	j.	j.	PROPN
ap-900	13	25	špirková	špirková	PROPN
ap-900	13	26	,	,	PUNCT
ap-900	13	27	j.	j.	PROPN
ap-900	13	28	hamáček	hamáček	PROPN
ap-900	13	29	,	,	PUNCT
ap-900	13	30	j.	j.	PROPN
ap-900	13	31	oswald	oswald	PROPN
ap-900	13	32	,	,	PUNCT
ap-900	13	33	j.	j.	PROPN
ap-900	13	34	zavadil	zavadil	PROPN
ap-900	13	35	,	,	PUNCT
ap-900	13	36	v.	v.	ADP
ap-900	13	37	peřina	peřina	NOUN
ap-900	13	38	we	we	PRON
ap-900	13	39	report	report	VERB
ap-900	13	40	about	about	ADP
ap-900	13	41	some	some	DET
ap-900	13	42	properties	property	NOUN
ap-900	13	43	of	of	ADP
ap-900	13	44	erbium	erbium	NOUN
ap-900	13	45	and	and	CCONJ
ap-900	13	46	erbium	erbium	NOUN
ap-900	13	47	/	/	SYM
ap-900	13	48	ytterbium	ytterbium	NOUN
ap-900	13	49	doped	dope	VERB
ap-900	13	50	gallium	gallium	NOUN
ap-900	13	51	nitride	nitride	NOUN
ap-900	13	52	(	(	PUNCT
ap-900	13	53	gan	gan	PROPN
ap-900	13	54	)	)	PUNCT
ap-900	13	55	layers	layer	NOUN
ap-900	13	56	fabricated	fabricate	VERB
ap-900	13	57	by	by	ADP
ap-900	13	58	magnetron	magnetron	NOUN
ap-900	13	59	sputtering	sputtering	NOUN
ap-900	13	60	on	on	ADP
ap-900	13	61	silicon	silicon	NOUN
ap-900	13	62	,	,	PUNCT
ap-900	13	63	quartz	quartz	NOUN
ap-900	13	64	and	and	CCONJ
ap-900	13	65	corning	corning	NOUN
ap-900	13	66	glass	glass	NOUN
ap-900	13	67	substrates	substrate	NOUN
ap-900	13	68	.	.	PUNCT
ap-900	14	1	for	for	ADP
ap-900	14	2	fabricating	fabricate	VERB
ap-900	14	3	gan	gan	PROPN
ap-900	14	4	layers	layer	NOUN
ap-900	14	5	two	two	NUM
ap-900	14	6	types	type	NOUN
ap-900	14	7	of	of	ADP
ap-900	14	8	targets	target	NOUN
ap-900	14	9	were	be	AUX
ap-900	14	10	used	use	VERB
ap-900	14	11	gallium	gallium	NOUN
ap-900	14	12	in	in	ADP
ap-900	14	13	a	a	DET
ap-900	14	14	stainless	stainless	ADJ
ap-900	14	15	steel	steel	NOUN
ap-900	14	16	cup	cup	NOUN
ap-900	14	17	and	and	CCONJ
ap-900	14	18	a	a	DET
ap-900	14	19	ga2o3	ga2o3	PROPN
ap-900	14	20	target	target	NOUN
ap-900	14	21	.	.	PUNCT
ap-900	15	1	deposition	deposition	NOUN
ap-900	15	2	was	be	AUX
ap-900	15	3	carried	carry	VERB
ap-900	15	4	out	out	ADP
ap-900	15	5	in	in	ADP
ap-900	15	6	the	the	DET
ap-900	15	7	ar	ar	PROPN
ap-900	15	8	+	+	CCONJ
ap-900	15	9	n2	n2	ADJ
ap-900	15	10	gas	gas	NOUN
ap-900	15	11	mixture	mixture	NOUN
ap-900	15	12	.	.	PUNCT
ap-900	16	1	for	for	ADP
ap-900	16	2	erbium	erbium	NOUN
ap-900	16	3	and	and	CCONJ
ap-900	16	4	ytterbium	ytterbium	NOUN
ap-900	16	5	doping	doping	NOUN
ap-900	16	6	into	into	ADP
ap-900	16	7	gan	gan	ADJ
ap-900	16	8	layers	layer	NOUN
ap-900	16	9	,	,	PUNCT
ap-900	16	10	erbium	erbium	NOUN
ap-900	16	11	metallic	metallic	ADJ
ap-900	16	12	powder	powder	NOUN
ap-900	16	13	and	and	CCONJ
ap-900	16	14	ytterbium	ytterbium	NOUN
ap-900	16	15	powder	powder	NOUN
ap-900	16	16	or	or	CCONJ
ap-900	16	17	er2o3	er2o3	PROPN
ap-900	16	18	and	and	CCONJ
ap-900	16	19	yb2o3	yb2o3	PROPN
ap-900	16	20	pellets	pellet	NOUN
ap-900	16	21	were	be	AUX
ap-900	16	22	laid	lay	VERB
ap-900	16	23	on	on	ADP
ap-900	16	24	the	the	DET
ap-900	16	25	top	top	NOUN
ap-900	16	26	of	of	ADP
ap-900	16	27	the	the	DET
ap-900	16	28	target	target	NOUN
ap-900	16	29	.	.	PUNCT
ap-900	17	1	the	the	DET
ap-900	17	2	samples	sample	NOUN
ap-900	17	3	were	be	AUX
ap-900	17	4	characterized	characterize	VERB
ap-900	17	5	by	by	ADP
ap-900	17	6	x	x	ADJ
ap-900	17	7	-	-	NOUN
ap-900	17	8	ray	ray	NOUN
ap-900	17	9	diffraction	diffraction	NOUN
ap-900	17	10	(	(	PUNCT
ap-900	17	11	xrd	xrd	NOUN
ap-900	17	12	)	)	PUNCT
ap-900	17	13	,	,	PUNCT
ap-900	17	14	photoluminescence	photoluminescence	NOUN
ap-900	17	15	spectra	spectra	NOUN
ap-900	17	16	and	and	CCONJ
ap-900	17	17	nuclear	nuclear	ADJ
ap-900	17	18	analytical	analytical	ADJ
ap-900	17	19	methods	method	NOUN
ap-900	17	20	.	.	PUNCT
ap-900	18	1	while	while	SCONJ
ap-900	18	2	the	the	DET
ap-900	18	3	use	use	NOUN
ap-900	18	4	of	of	ADP
ap-900	18	5	a	a	DET
ap-900	18	6	metallic	metallic	ADJ
ap-900	18	7	gallium	gallium	NOUN
ap-900	18	8	target	target	NOUN
ap-900	18	9	ensured	ensure	VERB
ap-900	18	10	the	the	DET
ap-900	18	11	deposition	deposition	NOUN
ap-900	18	12	of	of	ADP
ap-900	18	13	well	well	ADV
ap-900	18	14	-	-	PUNCT
ap-900	18	15	developed	develop	VERB
ap-900	18	16	polycrystalline	polycrystalline	ADJ
ap-900	18	17	layers	layer	NOUN
ap-900	18	18	,	,	PUNCT
ap-900	18	19	the	the	DET
ap-900	18	20	use	use	NOUN
ap-900	18	21	of	of	ADP
ap-900	18	22	gallium	gallium	NOUN
ap-900	18	23	oxide	oxide	NOUN
ap-900	18	24	target	target	NOUN
ap-900	18	25	provided	provide	VERB
ap-900	18	26	gan	gan	PROPN
ap-900	18	27	films	film	NOUN
ap-900	18	28	with	with	ADP
ap-900	18	29	poorly	poorly	ADV
ap-900	18	30	developed	develop	VERB
ap-900	18	31	crystals	crystal	NOUN
ap-900	18	32	.	.	PUNCT
ap-900	19	1	both	both	DET
ap-900	19	2	approaches	approach	NOUN
ap-900	19	3	enabled	enable	VERB
ap-900	19	4	doping	dope	VERB
ap-900	19	5	with	with	ADP
ap-900	19	6	erbium	erbium	NOUN
ap-900	19	7	and	and	CCONJ
ap-900	19	8	ytterbium	ytterbium	NOUN
ap-900	19	9	ions	ion	NOUN
ap-900	19	10	during	during	ADP
ap-900	19	11	deposition	deposition	NOUN
ap-900	19	12	,	,	PUNCT
ap-900	19	13	and	and	CCONJ
ap-900	19	14	typical	typical	ADJ
ap-900	19	15	emission	emission	NOUN
ap-900	19	16	at	at	ADP
ap-900	19	17	1	1	NUM
ap-900	19	18	530	530	NUM
ap-900	19	19	nm	nm	NOUN
ap-900	19	20	due	due	ADP
ap-900	19	21	to	to	ADP
ap-900	19	22	the	the	DET
ap-900	19	23	er3	er3	NOUN
ap-900	19	24	+	+	CCONJ
ap-900	19	25	intra-4f	intra-4f	ADJ
ap-900	19	26	4i13/2	4i13/2	ADJ
ap-900	19	27	�	�	PROPN
ap-900	19	28	4i15/2	4i15/2	PROPN
ap-900	19	29	transition	transition	NOUN
ap-900	19	30	was	be	AUX
ap-900	19	31	observed	observe	VERB
ap-900	19	32	.	.	PUNCT
ap-900	20	1	keywords	keyword	NOUN
ap-900	20	2	:	:	PUNCT
ap-900	20	3	gallium	gallium	NOUN
ap-900	20	4	nitride	nitride	NOUN
ap-900	20	5	,	,	PUNCT
ap-900	20	6	erbium	erbium	NOUN
ap-900	20	7	,	,	PUNCT
ap-900	20	8	ytterbium	ytterbium	NOUN
ap-900	20	9	,	,	PUNCT
ap-900	20	10	magnetron	magnetron	NOUN
ap-900	20	11	sputtering	sputtering	NOUN
ap-900	20	12	,	,	PUNCT
ap-900	20	13	photoluminescence	photoluminescence	NOUN
ap-900	20	14	.	.	PUNCT
ap-900	21	1	fig	fig	NOUN
ap-900	21	2	.	.	PUNCT
ap-900	22	1	1	1	NUM
ap-900	22	2	:	:	PUNCT
ap-900	22	3	schematic	schematic	ADJ
ap-900	22	4	energy	energy	NOUN
ap-900	22	5	levels	level	NOUN
ap-900	22	6	and	and	CCONJ
ap-900	22	7	laser	laser	NOUN
ap-900	22	8	transitions	transition	NOUN
ap-900	22	9	of	of	ADP
ap-900	22	10	er3	er3	NOUN
ap-900	22	11	+	+	NUM
ap-900	22	12	and	and	CCONJ
ap-900	22	13	yb3	yb3	NOUN
ap-900	22	14	+	+	SYM
ap-900	22	15	ions	ion	NOUN
ap-900	22	16	it	it	PRON
ap-900	22	17	was	be	AUX
ap-900	22	18	previously	previously	ADV
ap-900	22	19	shown	show	VERB
ap-900	22	20	in	in	ADP
ap-900	22	21	[	[	X
ap-900	22	22	6	6	NUM
ap-900	22	23	]	]	PUNCT
ap-900	22	24	that	that	SCONJ
ap-900	22	25	thermal	thermal	ADJ
ap-900	22	26	quenching	quenching	NOUN
ap-900	22	27	in	in	ADP
ap-900	22	28	er3	er3	PROPN
ap-900	22	29	+	+	SYM
ap-900	22	30	-doped	-doped	ADJ
ap-900	22	31	semiconductors	semiconductor	NOUN
ap-900	22	32	decreases	decrease	VERB
ap-900	22	33	with	with	ADP
ap-900	22	34	increasing	increase	VERB
ap-900	22	35	band	band	NOUN
ap-900	22	36	gap	gap	NOUN
ap-900	22	37	.	.	PUNCT
ap-900	23	1	therefore	therefore	ADV
ap-900	23	2	,	,	PUNCT
ap-900	23	3	wide	wide	ADJ
ap-900	23	4	-	-	PUNCT
ap-900	23	5	band	band	NOUN
ap-900	23	6	gap	gap	NOUN
ap-900	23	7	semiconductors	semiconductor	NOUN
ap-900	23	8	such	such	ADJ
ap-900	23	9	as	as	ADP
ap-900	23	10	gan	gan	PROPN
ap-900	23	11	are	be	AUX
ap-900	23	12	attractive	attractive	ADJ
ap-900	23	13	hosts	host	NOUN
ap-900	23	14	for	for	ADP
ap-900	23	15	er3	er3	PROPN
ap-900	23	16	+	+	NUM
ap-900	23	17	and	and	CCONJ
ap-900	23	18	yb3	yb3	NOUN
ap-900	23	19	+	+	NOUN
ap-900	23	20	ions	ion	NOUN
ap-900	23	21	(	(	PUNCT
ap-900	23	22	re	re	NOUN
ap-900	23	23	ions	ion	NOUN
ap-900	23	24	)	)	PUNCT
ap-900	23	25	.	.	PUNCT
ap-900	24	1	gan	gan	PROPN
ap-900	24	2	layers	layer	NOUN
ap-900	24	3	are	be	AUX
ap-900	24	4	usually	usually	ADV
ap-900	24	5	grown	grow	VERB
ap-900	24	6	by	by	ADP
ap-900	24	7	epitaxy	epitaxy	NOUN
ap-900	24	8	methods	method	NOUN
ap-900	24	9	such	such	ADJ
ap-900	24	10	as	as	ADP
ap-900	24	11	metal	metal	NOUN
ap-900	24	12	organic	organic	ADJ
ap-900	24	13	chemical	chemical	NOUN
ap-900	24	14	vapor	vapor	NOUN
ap-900	24	15	deposition	deposition	NOUN
ap-900	24	16	(	(	PUNCT
ap-900	24	17	mocvd	mocvd	NOUN
ap-900	24	18	)	)	PUNCT
ap-900	24	19	and	and	CCONJ
ap-900	24	20	molecular	molecular	ADJ
ap-900	24	21	beam	beam	NOUN
ap-900	24	22	epitaxy	epitaxy	NOUN
ap-900	24	23	(	(	PUNCT
ap-900	24	24	mbe	mbe	PROPN
ap-900	24	25	)	)	PUNCT
ap-900	25	1	[	[	X
ap-900	25	2	7	7	NUM
ap-900	25	3	]	]	PUNCT
ap-900	25	4	,	,	PUNCT
ap-900	25	5	[	[	X
ap-900	25	6	8	8	NUM
ap-900	25	7	]	]	PUNCT
ap-900	25	8	.	.	PUNCT
ap-900	26	1	epitaxy	epitaxy	PROPN
ap-900	26	2	methods	method	NOUN
ap-900	26	3	such	such	ADJ
ap-900	26	4	as	as	ADP
ap-900	26	5	hydride	hydride	NOUN
ap-900	26	6	vapor	vapor	NOUN
ap-900	26	7	phase	phase	NOUN
ap-900	26	8	epitaxy	epitaxy	NOUN
ap-900	26	9	(	(	PUNCT
ap-900	26	10	hvpe	hvpe	PROPN
ap-900	26	11	)	)	PUNCT
ap-900	26	12	and	and	CCONJ
ap-900	26	13	liquid	liquid	ADJ
ap-900	26	14	phase	phase	NOUN
ap-900	26	15	epitaxy	epitaxy	NOUN
ap-900	26	16	(	(	PUNCT
ap-900	26	17	lpe	lpe	NOUN
ap-900	26	18	)	)	PUNCT
ap-900	27	1	[	[	X
ap-900	27	2	9	9	NUM
ap-900	27	3	]	]	PUNCT
ap-900	27	4	,	,	PUNCT
ap-900	27	5	[	[	X
ap-900	27	6	10	10	NUM
ap-900	27	7	]	]	PUNCT
ap-900	27	8	are	be	AUX
ap-900	27	9	used	use	VERB
ap-900	27	10	for	for	ADP
ap-900	27	11	fabricating	fabricating	NOUN
ap-900	27	12	of	of	ADP
ap-900	27	13	free	free	ADJ
ap-900	27	14	standing	standing	NOUN
ap-900	27	15	gan	gan	PROPN
ap-900	27	16	substrates	substrate	NOUN
ap-900	27	17	.	.	PUNCT
ap-900	28	1	to	to	PART
ap-900	28	2	obtain	obtain	VERB
ap-900	28	3	gan	gan	ADJ
ap-900	28	4	layers	layer	NOUN
ap-900	28	5	doped	dope	VERB
ap-900	28	6	with	with	ADP
ap-900	28	7	erbium	erbium	NOUN
ap-900	28	8	and	and	CCONJ
ap-900	28	9	ytterbium	ytterbium	NOUN
ap-900	28	10	ions	ion	NOUN
ap-900	28	11	,	,	PUNCT
ap-900	28	12	two	two	NUM
ap-900	28	13	procedures	procedure	NOUN
ap-900	28	14	are	be	AUX
ap-900	28	15	basically	basically	ADV
ap-900	28	16	available	available	ADJ
ap-900	28	17	.	.	PUNCT
ap-900	29	1	the	the	DET
ap-900	29	2	first	first	ADJ
ap-900	29	3	procedure	procedure	NOUN
ap-900	29	4	involves	involve	VERB
ap-900	29	5	fabricating	fabricate	VERB
ap-900	29	6	gan	gan	ADJ
ap-900	29	7	layers	layer	NOUN
ap-900	29	8	and	and	CCONJ
ap-900	29	9	then	then	ADV
ap-900	29	10	doping	dope	VERB
ap-900	29	11	them	they	PRON
ap-900	29	12	by	by	ADP
ap-900	29	13	ion	ion	NOUN
ap-900	29	14	implantation	implantation	NOUN
ap-900	29	15	[	[	X
ap-900	29	16	11	11	NUM
ap-900	29	17	]	]	PUNCT
ap-900	29	18	,	,	PUNCT
ap-900	29	19	[	[	X
ap-900	29	20	12	12	NUM
ap-900	29	21	]	]	PUNCT
ap-900	29	22	.	.	PUNCT
ap-900	30	1	the	the	DET
ap-900	30	2	second	second	ADJ
ap-900	30	3	way	way	NOUN
ap-900	30	4	involves	involve	VERB
ap-900	30	5	doping	dope	VERB
ap-900	30	6	the	the	DET
ap-900	30	7	gan	gan	PROPN
ap-900	30	8	layers	layer	NOUN
ap-900	30	9	by	by	ADP
ap-900	30	10	erbium	erbium	NOUN
ap-900	30	11	and	and	CCONJ
ap-900	30	12	ytterbium	ytterbium	NOUN
ap-900	30	13	ions	ion	NOUN
ap-900	30	14	during	during	ADP
ap-900	30	15	the	the	DET
ap-900	30	16	deposition	deposition	NOUN
ap-900	30	17	process	process	NOUN
ap-900	30	18	[	[	X
ap-900	30	19	13	13	NUM
ap-900	30	20	]	]	PUNCT
ap-900	30	21	,	,	PUNCT
ap-900	30	22	[	[	X
ap-900	30	23	14	14	NUM
ap-900	30	24	]	]	PUNCT
ap-900	30	25	.	.	PUNCT
ap-900	31	1	re	re	VERB
ap-900	31	2	-	-	VERB
ap-900	31	3	doped	doped	ADJ
ap-900	31	4	gan	gan	PROPN
ap-900	31	5	layers	layer	NOUN
ap-900	31	6	fabricated	fabricate	VERB
ap-900	31	7	by	by	ADP
ap-900	31	8	the	the	DET
ap-900	31	9	epitaxy	epitaxy	PROPN
ap-900	31	10	method	method	NOUN
ap-900	31	11	are	be	AUX
ap-900	31	12	of	of	ADP
ap-900	31	13	high	high	ADJ
ap-900	31	14	quality	quality	NOUN
ap-900	31	15	;	;	PUNCT
ap-900	31	16	however	however	ADV
ap-900	31	17	,	,	PUNCT
ap-900	31	18	the	the	DET
ap-900	31	19	deposition	deposition	NOUN
ap-900	31	20	process	process	NOUN
ap-900	31	21	is	be	AUX
ap-900	31	22	rather	rather	ADV
ap-900	31	23	complicated	complicated	ADJ
ap-900	31	24	(	(	PUNCT
ap-900	31	25	for	for	ADP
ap-900	31	26	gan	gan	NOUN
ap-900	31	27	fabricated	fabricate	VERB
ap-900	31	28	by	by	ADP
ap-900	31	29	mocvd	mocvd	PROPN
ap-900	31	30	a	a	DET
ap-900	31	31	toxic	toxic	ADJ
ap-900	31	32	precursor	precursor	NOUN
ap-900	31	33	is	be	AUX
ap-900	31	34	needed	need	VERB
ap-900	31	35	,	,	PUNCT
ap-900	31	36	and	and	CCONJ
ap-900	31	37	for	for	ADP
ap-900	31	38	gan	gan	NOUN
ap-900	31	39	fabricated	fabricate	VERB
ap-900	31	40	by	by	ADP
ap-900	31	41	mbe	mbe	PROPN
ap-900	31	42	an	an	DET
ap-900	31	43	ultrahigh	ultrahigh	ADJ
ap-900	31	44	-	-	PUNCT
ap-900	31	45	vacuum	vacuum	NOUN
ap-900	31	46	chamber	chamber	NOUN
ap-900	31	47	must	must	AUX
ap-900	31	48	be	be	AUX
ap-900	31	49	applied	apply	VERB
ap-900	31	50	)	)	PUNCT
ap-900	31	51	.	.	PUNCT
ap-900	32	1	instead	instead	ADV
ap-900	32	2	of	of	ADP
ap-900	32	3	these	these	DET
ap-900	32	4	rather	rather	ADV
ap-900	32	5	complicated	complicated	ADJ
ap-900	32	6	methods	method	NOUN
ap-900	32	7	an	an	DET
ap-900	32	8	easier	easy	ADJ
ap-900	32	9	approach	approach	NOUN
ap-900	32	10	to	to	ADP
ap-900	32	11	gan	gan	VERB
ap-900	32	12	fabrication	fabrication	NOUN
ap-900	32	13	is	be	AUX
ap-900	32	14	now	now	ADV
ap-900	32	15	being	be	AUX
ap-900	32	16	investigated	investigate	VERB
ap-900	32	17	.	.	PUNCT
ap-900	33	1	yang	yang	PROPN
ap-900	33	2	et	et	PROPN
ap-900	33	3	al	al	PROPN
ap-900	33	4	.	.	PROPN
ap-900	34	1	in	in	ADP
ap-900	34	2	2003	2003	NUM
ap-900	34	3	already	already	ADV
ap-900	34	4	managed	manage	VERB
ap-900	34	5	to	to	PART
ap-900	34	6	fabricate	fabricate	VERB
ap-900	34	7	high	high	ADJ
ap-900	34	8	quality	quality	NOUN
ap-900	34	9	gan	gan	NOUN
ap-900	34	10	layers	layer	NOUN
ap-900	34	11	[	[	X
ap-900	34	12	15	15	NUM
ap-900	34	13	]	]	PUNCT
ap-900	34	14	by	by	ADP
ap-900	34	15	using	use	VERB
ap-900	34	16	magnetron	magnetron	NOUN
ap-900	34	17	sputtering	sputtering	NOUN
ap-900	34	18	.	.	PUNCT
ap-900	35	1	their	their	PRON
ap-900	35	2	gan	gan	PROPN
ap-900	35	3	samples	sample	NOUN
ap-900	35	4	exhibited	exhibit	VERB
ap-900	35	5	luminescence	luminescence	NOUN
ap-900	35	6	at	at	ADP
ap-900	35	7	354	354	NUM
ap-900	35	8	nm	nm	ADJ
ap-900	35	9	wavelength	wavelength	NOUN
ap-900	35	10	at	at	ADP
ap-900	35	11	room	room	NOUN
ap-900	35	12	temperature	temperature	NOUN
ap-900	35	13	.	.	PUNCT
ap-900	36	1	erbium	erbium	NOUN
ap-900	36	2	and	and	CCONJ
ap-900	36	3	ytterbium	ytterbium	NOUN
ap-900	36	4	can	can	AUX
ap-900	36	5	easily	easily	ADV
ap-900	36	6	be	be	AUX
ap-900	36	7	doped	dope	VERB
ap-900	36	8	into	into	ADP
ap-900	36	9	the	the	DET
ap-900	36	10	deposited	deposit	VERB
ap-900	36	11	gan	gan	NOUN
ap-900	36	12	layers	layer	NOUN
ap-900	36	13	in	in	ADP
ap-900	36	14	the	the	DET
ap-900	36	15	course	course	NOUN
ap-900	36	16	of	of	ADP
ap-900	36	17	the	the	DET
ap-900	36	18	sputtering	sputtering	ADJ
ap-900	36	19	process	process	NOUN
ap-900	36	20	[	[	X
ap-900	36	21	16	16	NUM
ap-900	36	22	]	]	PUNCT
ap-900	36	23	.	.	PUNCT
ap-900	37	1	moreover	moreover	ADV
ap-900	37	2	,	,	PUNCT
ap-900	37	3	sputter	sputter	VERB
ap-900	37	4	deposition	deposition	NOUN
ap-900	37	5	is	be	AUX
ap-900	37	6	relatively	relatively	ADV
ap-900	37	7	inexpensive	inexpensive	ADJ
ap-900	37	8	and	and	CCONJ
ap-900	37	9	it	it	PRON
ap-900	37	10	is	be	AUX
ap-900	37	11	ideal	ideal	ADJ
ap-900	37	12	for	for	ADP
ap-900	37	13	covering	cover	VERB
ap-900	37	14	a	a	DET
ap-900	37	15	large	large	ADJ
ap-900	37	16	area	area	NOUN
ap-900	37	17	.	.	PUNCT
ap-900	38	1	2	2	NUM
ap-900	38	2	experiment	experiment	NOUN
ap-900	38	3	2.1	2.1	NUM
ap-900	38	4	fabrication	fabrication	NOUN
ap-900	38	5	of	of	ADP
ap-900	38	6	the	the	DET
ap-900	38	7	samples	sample	NOUN
ap-900	38	8	the	the	DET
ap-900	38	9	gan	gan	PROPN
ap-900	38	10	samples	sample	NOUN
ap-900	38	11	were	be	AUX
ap-900	38	12	fabricated	fabricate	VERB
ap-900	38	13	by	by	ADP
ap-900	38	14	radio	radio	NOUN
ap-900	38	15	frequency	frequency	NOUN
ap-900	38	16	(	(	PUNCT
ap-900	38	17	rf	rf	NOUN
ap-900	38	18	)	)	PUNCT
ap-900	38	19	magnetron	magnetron	NOUN
ap-900	38	20	sputtering	sputtering	NOUN
ap-900	38	21	(	(	PUNCT
ap-900	38	22	balzers	balzer	NOUN
ap-900	38	23	pfeiffer	pfeiffer	VERB
ap-900	38	24	pls	pls	PROPN
ap-900	38	25	160	160	NUM
ap-900	38	26	)	)	PUNCT
ap-900	38	27	on	on	ADP
ap-900	38	28	silicon	silicon	NOUN
ap-900	38	29	,	,	PUNCT
ap-900	38	30	quartz	quartz	NOUN
ap-900	38	31	or	or	CCONJ
ap-900	38	32	corning	corning	NOUN
ap-900	38	33	glass	glass	NOUN
ap-900	38	34	.	.	PUNCT
ap-900	39	1	before	before	ADP
ap-900	39	2	deposition	deposition	NOUN
ap-900	39	3	,	,	PUNCT
ap-900	39	4	the	the	DET
ap-900	39	5	substrates	substrate	NOUN
ap-900	39	6	were	be	AUX
ap-900	39	7	cleaned	clean	VERB
ap-900	39	8	by	by	ADP
ap-900	39	9	a	a	DET
ap-900	39	10	standard	standard	ADJ
ap-900	39	11	cleaning	cleaning	NOUN
ap-900	39	12	procedure	procedure	NOUN
ap-900	39	13	.	.	PUNCT
ap-900	40	1	the	the	DET
ap-900	40	2	sputtering	sputtering	ADJ
ap-900	40	3	experimental	experimental	ADJ
ap-900	40	4	set	set	NOUN
ap-900	40	5	-	-	PUNCT
ap-900	40	6	up	up	NOUN
ap-900	40	7	is	be	AUX
ap-900	40	8	shown	show	VERB
ap-900	40	9	in	in	ADP
ap-900	40	10	fig	fig	NOUN
ap-900	40	11	.	.	PUNCT
ap-900	41	1	2	2	X
ap-900	41	2	.	.	X
ap-900	41	3	we	we	PRON
ap-900	41	4	used	use	VERB
ap-900	41	5	two	two	NUM
ap-900	41	6	types	type	NOUN
ap-900	41	7	of	of	ADP
ap-900	41	8	target	target	NOUN
ap-900	41	9	:	:	PUNCT
ap-900	41	10	ga	ga	NOUN
ap-900	41	11	target	target	NOUN
ap-900	41	12	and	and	CCONJ
ap-900	41	13	ga2o3	ga2o3	PROPN
ap-900	41	14	target	target	NOUN
ap-900	41	15	.	.	PUNCT
ap-900	42	1	because	because	SCONJ
ap-900	42	2	of	of	ADP
ap-900	42	3	its	its	PRON
ap-900	42	4	very	very	ADV
ap-900	42	5	low	low	ADJ
ap-900	42	6	melting	melting	NOUN
ap-900	42	7	point	point	NOUN
ap-900	42	8	(	(	PUNCT
ap-900	42	9	29.78	29.78	NUM
ap-900	42	10	°	°	NOUN
ap-900	42	11	c	c	NOUN
ap-900	42	12	)	)	PUNCT
ap-900	42	13	,	,	PUNCT
ap-900	42	14	gallium	gallium	NOUN
ap-900	42	15	can	can	AUX
ap-900	42	16	not	not	PART
ap-900	42	17	be	be	AUX
ap-900	42	18	used	use	VERB
ap-900	42	19	directly	directly	ADV
ap-900	42	20	as	as	ADP
ap-900	42	21	a	a	DET
ap-900	42	22	target	target	NOUN
ap-900	42	23	,	,	PUNCT
ap-900	42	24	so	so	SCONJ
ap-900	42	25	we	we	PRON
ap-900	42	26	had	have	VERB
ap-900	42	27	to	to	PART
ap-900	42	28	pour	pour	VERB
ap-900	42	29	it	it	PRON
ap-900	42	30	into	into	ADP
ap-900	42	31	a	a	DET
ap-900	42	32	stainless	stainless	ADJ
ap-900	42	33	steel	steel	NOUN
ap-900	42	34	crucible	crucible	NOUN
ap-900	42	35	.	.	PUNCT
ap-900	43	1	another	another	DET
ap-900	43	2	way	way	NOUN
ap-900	43	3	is	be	AUX
ap-900	43	4	to	to	PART
ap-900	43	5	use	use	VERB
ap-900	43	6	ga2o3	ga2o3	PROPN
ap-900	43	7	target	target	NOUN
ap-900	43	8	,	,	PUNCT
ap-900	43	9	as	as	SCONJ
ap-900	43	10	already	already	ADV
ap-900	43	11	reported	report	VERB
ap-900	43	12	in	in	ADP
ap-900	43	13	[	[	X
ap-900	43	14	17	17	NUM
ap-900	43	15	]	]	PUNCT
ap-900	43	16	.	.	PUNCT
ap-900	44	1	this	this	PRON
ap-900	44	2	would	would	AUX
ap-900	44	3	satisfactorily	satisfactorily	ADV
ap-900	44	4	solve	solve	VERB
ap-900	44	5	the	the	DET
ap-900	44	6	problem	problem	NOUN
ap-900	44	7	arising	arise	VERB
ap-900	44	8	from	from	ADP
ap-900	44	9	the	the	DET
ap-900	44	10	low	low	ADJ
ap-900	44	11	melting	melting	NOUN
ap-900	44	12	point	point	NOUN
ap-900	44	13	of	of	ADP
ap-900	44	14	gallium	gallium	NOUN
ap-900	44	15	,	,	PUNCT
ap-900	44	16	as	as	ADP
ap-900	44	17	ga2o3	ga2o3	PROPN
ap-900	44	18	melts	melt	NOUN
ap-900	44	19	at	at	ADP
ap-900	44	20	about	about	ADV
ap-900	44	21	1600	1600	NUM
ap-900	44	22	°	°	SYM
ap-900	44	23	c	c	NOUN
ap-900	44	24	.	.	PUNCT
ap-900	45	1	in	in	ADP
ap-900	45	2	our	our	PRON
ap-900	45	3	experiments	experiment	NOUN
ap-900	45	4	we	we	PRON
ap-900	45	5	sintered	sinter	VERB
ap-900	45	6	ga2o3	ga2o3	PROPN
ap-900	45	7	powder	powder	NOUN
ap-900	45	8	(	(	PUNCT
ap-900	45	9	sigma	sigma	PROPN
ap-900	45	10	-	-	PUNCT
ap-900	45	11	aldrich	aldrich	NOUN
ap-900	45	12	)	)	PUNCT
ap-900	45	13	to	to	PART
ap-900	45	14	form	form	VERB
ap-900	45	15	a	a	DET
ap-900	45	16	target	target	NOUN
ap-900	45	17	5	5	NUM
ap-900	45	18	cm	cm	NOUN
ap-900	45	19	diameter	diameter	NOUN
ap-900	45	20	.	.	PUNCT
ap-900	46	1	typical	typical	ADJ
ap-900	46	2	deposition	deposition	NOUN
ap-900	46	3	parameters	parameter	NOUN
ap-900	46	4	were	be	AUX
ap-900	46	5	:	:	PUNCT
ap-900	46	6	temperature	temperature	NOUN
ap-900	46	7	300	300	NUM
ap-900	46	8	k	k	NOUN
ap-900	46	9	,	,	PUNCT
ap-900	46	10	time	time	NOUN
ap-900	46	11	60	60	NUM
ap-900	46	12	min	min	NOUN
ap-900	46	13	,	,	PUNCT
ap-900	46	14	nitrogen	nitrogen	NOUN
ap-900	46	15	-	-	PUNCT
ap-900	46	16	argon	argon	NOUN
ap-900	46	17	ratio	ratio	NOUN
ap-900	46	18	3:7	3:7	NUM
ap-900	46	19	,	,	PUNCT
ap-900	46	20	power	power	NOUN
ap-900	46	21	50	50	NUM
ap-900	46	22	w.	w.	NOUN
ap-900	46	23	the	the	DET
ap-900	46	24	apparatus	apparatus	NOUN
ap-900	46	25	was	be	AUX
ap-900	46	26	evacuated	evacuate	VERB
ap-900	46	27	before	before	ADP
ap-900	46	28	each	each	DET
ap-900	46	29	experiment	experiment	NOUN
ap-900	46	30	below	below	ADP
ap-900	46	31	0.01	0.01	NUM
ap-900	46	32	pa	pa	PROPN
ap-900	46	33	,	,	PUNCT
ap-900	46	34	and	and	CCONJ
ap-900	46	35	deposition	deposition	NOUN
ap-900	46	36	was	be	AUX
ap-900	46	37	done	do	VERB
ap-900	46	38	at	at	ADP
ap-900	46	39	total	total	ADJ
ap-900	46	40	gas	gas	NOUN
ap-900	46	41	pressure	pressure	NOUN
ap-900	46	42	3.4	3.4	NUM
ap-900	46	43	pa	pa	PROPN
ap-900	46	44	.	.	PUNCT
ap-900	47	1	the	the	DET
ap-900	47	2	further	further	ADJ
ap-900	47	3	details	detail	NOUN
ap-900	47	4	of	of	ADP
ap-900	47	5	the	the	DET
ap-900	47	6	fabrication	fabrication	NOUN
ap-900	47	7	process	process	NOUN
ap-900	47	8	are	be	AUX
ap-900	47	9	given	give	VERB
ap-900	47	10	in	in	ADP
ap-900	47	11	table	table	NOUN
ap-900	47	12	1	1	NUM
ap-900	47	13	.	.	PUNCT
ap-900	47	14	typical	typical	ADJ
ap-900	47	15	thickness	thickness	NOUN
ap-900	47	16	of	of	ADP
ap-900	47	17	the	the	DET
ap-900	47	18	deposited	deposit	VERB
ap-900	47	19	layers	layer	NOUN
ap-900	47	20	was	be	AUX
ap-900	47	21	0.5	0.5	NUM
ap-900	47	22	to	to	PART
ap-900	47	23	3.2	3.2	NUM
ap-900	47	24	�	�	NOUN
ap-900	47	25	m	m	PRON
ap-900	47	26	,	,	PUNCT
ap-900	47	27	depending	depend	VERB
ap-900	47	28	on	on	ADP
ap-900	47	29	the	the	DET
ap-900	47	30	time	time	NOUN
ap-900	47	31	of	of	ADP
ap-900	47	32	deposition	deposition	NOUN
ap-900	47	33	.	.	PUNCT
ap-900	48	1	for	for	ADP
ap-900	48	2	erbium	erbium	NOUN
ap-900	48	3	doping	doping	NOUN
ap-900	48	4	into	into	ADP
ap-900	48	5	gallium	gallium	NOUN
ap-900	48	6	nitride	nitride	ADJ
ap-900	48	7	layers	layer	NOUN
ap-900	48	8	,	,	PUNCT
ap-900	48	9	the	the	DET
ap-900	48	10	er	er	INTJ
ap-900	48	11	metallic	metallic	ADJ
ap-900	48	12	powder	powder	NOUN
ap-900	48	13	and	and	CCONJ
ap-900	48	14	yb	yb	PROPN
ap-900	48	15	powder	powder	NOUN
ap-900	48	16	were	be	AUX
ap-900	48	17	laid	lay	VERB
ap-900	48	18	on	on	ADP
ap-900	48	19	the	the	DET
ap-900	48	20	top	top	NOUN
ap-900	48	21	of	of	ADP
ap-900	48	22	gallium	gallium	NOUN
ap-900	48	23	targets	target	NOUN
ap-900	48	24	,	,	PUNCT
ap-900	48	25	or	or	CCONJ
ap-900	48	26	,	,	PUNCT
ap-900	48	27	er	er	INTJ
ap-900	48	28	metallic	metallic	ADJ
ap-900	48	29	powder	powder	NOUN
ap-900	48	30	and	and	CCONJ
ap-900	48	31	yb	yb	NOUN
ap-900	48	32	powder	powder	NOUN
ap-900	48	33	or	or	CCONJ
ap-900	48	34	er2o3	er2o3	PROPN
ap-900	48	35	and	and	CCONJ
ap-900	48	36	yb2o3	yb2o3	PROPN
ap-900	48	37	pellets	pellet	NOUN
ap-900	48	38	5	5	NUM
ap-900	48	39	or	or	CCONJ
ap-900	48	40	10	10	NUM
ap-900	48	41	mm	mm	NOUN
ap-900	48	42	in	in	ADP
ap-900	48	43	diameter	diameter	NOUN
ap-900	48	44	were	be	AUX
ap-900	48	45	put	put	VERB
ap-900	48	46	on	on	ADP
ap-900	48	47	top	top	NOUN
ap-900	48	48	of	of	ADP
ap-900	48	49	the	the	DET
ap-900	48	50	ga2o3	ga2o3	PROPN
ap-900	48	51	targets	target	NOUN
ap-900	48	52	.	.	PUNCT
ap-900	49	1	the	the	DET
ap-900	49	2	er2o3	er2o3	PROPN
ap-900	49	3	and	and	CCONJ
ap-900	49	4	yb2o3	yb2o3	PROPN
ap-900	49	5	pellets	pellet	NOUN
ap-900	49	6	were	be	AUX
ap-900	49	7	fabricated	fabricate	VERB
ap-900	49	8	by	by	ADP
ap-900	49	9	pressing	press	VERB
ap-900	49	10	er2o3	er2o3	PROPN
ap-900	49	11	and	and	CCONJ
ap-900	49	12	yb2o3	yb2o3	PROPN
ap-900	49	13	powder	powder	NOUN
ap-900	49	14	(	(	PUNCT
ap-900	49	15	sigma	sigma	NOUN
ap-900	49	16	-	-	PUNCT
ap-900	49	17	aldrich	aldrich	NOUN
ap-900	49	18	)	)	PUNCT
ap-900	49	19	.	.	PUNCT
ap-900	50	1	2.2	2.2	NUM
ap-900	50	2	measurement	measurement	NOUN
ap-900	50	3	the	the	DET
ap-900	50	4	structure	structure	NOUN
ap-900	50	5	of	of	ADP
ap-900	50	6	the	the	DET
ap-900	50	7	deposited	deposit	VERB
ap-900	50	8	gan	gan	NOUN
ap-900	50	9	layers	layer	NOUN
ap-900	50	10	was	be	AUX
ap-900	50	11	studied	study	VERB
ap-900	50	12	by	by	ADP
ap-900	50	13	xrd	xrd	NOUN
ap-900	50	14	(	(	PUNCT
ap-900	50	15	x	x	NOUN
ap-900	50	16	-	-	NOUN
ap-900	50	17	ray	ray	NOUN
ap-900	50	18	diffraction	diffraction	NOUN
ap-900	50	19	)	)	PUNCT
ap-900	50	20	.	.	PUNCT
ap-900	51	1	the	the	DET
ap-900	51	2	compositions	composition	NOUN
ap-900	51	3	of	of	ADP
ap-900	51	4	the	the	DET
ap-900	51	5	samples	sample	NOUN
ap-900	51	6	were	be	AUX
ap-900	51	7	determined	determine	VERB
ap-900	51	8	with	with	ADP
ap-900	51	9	the	the	DET
ap-900	51	10	use	use	NOUN
ap-900	51	11	of	of	ADP
ap-900	51	12	nuclear	nuclear	ADJ
ap-900	51	13	chemical	chemical	NOUN
ap-900	51	14	analysis	analysis	NOUN
ap-900	51	15	(	(	PUNCT
ap-900	51	16	rutherford	rutherford	NOUN
ap-900	51	17	backscattering	backscattering	NOUN
ap-900	51	18	spectroscopy	spectroscopy	NOUN
ap-900	51	19	(	(	PUNCT
ap-900	51	20	rbs	rbs	PROPN
ap-900	51	21	)	)	PUNCT
ap-900	51	22	and	and	CCONJ
ap-900	51	23	elastic	elastic	ADJ
ap-900	51	24	recoil	recoil	NOUN
ap-900	51	25	detection	detection	NOUN
ap-900	51	26	analysis	analysis	NOUN
ap-900	51	27	(	(	PUNCT
ap-900	51	28	erda	erda	NOUN
ap-900	51	29	)	)	PUNCT
ap-900	51	30	)	)	PUNCT
ap-900	51	31	.	.	PUNCT
ap-900	52	1	the	the	DET
ap-900	52	2	gan	gan	PROPN
ap-900	52	3	stoichiometry	stoichiometry	NOUN
ap-900	52	4	and	and	CCONJ
ap-900	52	5	the	the	DET
ap-900	52	6	o	o	NOUN
ap-900	52	7	admixture	admixture	NOUN
ap-900	52	8	amount	amount	NOUN
ap-900	52	9	was	be	AUX
ap-900	52	10	checked	check	VERB
ap-900	52	11	by	by	ADP
ap-900	52	12	rbs	rbs	NOUN
ap-900	52	13	using	use	VERB
ap-900	52	14	2.4	2.4	NUM
ap-900	52	15	mev	mev	PROPN
ap-900	52	16	protons	proton	NOUN
ap-900	52	17	.	.	PUNCT
ap-900	53	1	for	for	ADP
ap-900	53	2	this	this	DET
ap-900	53	3	energy	energy	NOUN
ap-900	53	4	the	the	DET
ap-900	53	5	non	non	ADJ
ap-900	53	6	-	-	PROPN
ap-900	53	7	rutherford	rutherford	ADJ
ap-900	53	8	cross	cross	NOUN
ap-900	53	9	-	-	NOUN
ap-900	53	10	section	section	NOUN
ap-900	53	11	for	for	ADP
ap-900	53	12	n	n	PROPN
ap-900	53	13	and	and	CCONJ
ap-900	53	14	o	o	NOUN
ap-900	53	15	is	be	AUX
ap-900	53	16	sufficiently	sufficiently	ADV
ap-900	53	17	enhanced	enhance	VERB
ap-900	53	18	to	to	PART
ap-900	53	19	obtain	obtain	VERB
ap-900	53	20	satisfactory	satisfactory	ADJ
ap-900	53	21	sensitivity	sensitivity	NOUN
ap-900	53	22	.	.	PUNCT
ap-900	54	1	the	the	DET
ap-900	54	2	amounts	amount	NOUN
ap-900	54	3	of	of	ADP
ap-900	54	4	the	the	DET
ap-900	54	5	erbium	erbium	NOUN
ap-900	54	6	and	and	CCONJ
ap-900	54	7	ytterbium	ytterbium	NOUN
ap-900	54	8	dopants	dopant	NOUN
ap-900	54	9	were	be	AUX
ap-900	54	10	checked	check	VERB
ap-900	54	11	by	by	ADP
ap-900	54	12	rbs	rbs	PROPN
ap-900	54	13	with	with	ADP
ap-900	54	14	both	both	DET
ap-900	54	15	2.4	2.4	NUM
ap-900	54	16	mev	mev	PROPN
ap-900	54	17	protons	proton	NOUN
ap-900	54	18	and	and	CCONJ
ap-900	54	19	2.2	2.2	NUM
ap-900	54	20	mev	mev	PROPN
ap-900	54	21	alpha	alpha	NOUN
ap-900	54	22	particles	particle	NOUN
ap-900	54	23	.	.	PUNCT
ap-900	55	1	the	the	DET
ap-900	55	2	areas	area	NOUN
ap-900	55	3	in	in	ADP
ap-900	55	4	the	the	DET
ap-900	55	5	spectra	spectra	NOUN
ap-900	55	6	above	above	ADP
ap-900	55	7	the	the	DET
ap-900	55	8	surface	surface	NOUN
ap-900	55	9	of	of	ADP
ap-900	55	10	the	the	DET
ap-900	55	11	ga	ga	PROPN
ap-900	55	12	energy	energy	NOUN
ap-900	55	13	edge	edge	NOUN
ap-900	55	14	enabled	enable	VERB
ap-900	55	15	us	we	PRON
ap-900	55	16	to	to	PART
ap-900	55	17	determine	determine	VERB
ap-900	55	18	the	the	DET
ap-900	55	19	re	re	NOUN
ap-900	55	20	concentrations	concentration	NOUN
ap-900	55	21	up	up	ADP
ap-900	55	22	to	to	ADP
ap-900	55	23	a	a	DET
ap-900	55	24	depth	depth	NOUN
ap-900	55	25	of	of	ADP
ap-900	55	26	600	600	NUM
ap-900	55	27	and	and	CCONJ
ap-900	55	28	240	240	NUM
ap-900	55	29	nm	nm	NOUN
ap-900	55	30	from	from	ADP
ap-900	55	31	the	the	DET
ap-900	55	32	gan	gan	PROPN
ap-900	55	33	surface	surface	NOUN
ap-900	55	34	for	for	ADP
ap-900	55	35	2.4	2.4	NUM
ap-900	55	36	mev	mev	PROPN
ap-900	55	37	protons	proton	NOUN
ap-900	55	38	and	and	CCONJ
ap-900	55	39	2.2	2.2	NUM
ap-900	55	40	mev	mev	PROPN
ap-900	55	41	alpha	alpha	NOUN
ap-900	55	42	particles	particle	NOUN
ap-900	55	43	,	,	PUNCT
ap-900	55	44	respectively	respectively	ADV
ap-900	55	45	.	.	PUNCT
ap-900	56	1	the	the	DET
ap-900	56	2	h	h	NOUN
ap-900	56	3	impurity	impurity	NOUN
ap-900	56	4	was	be	AUX
ap-900	56	5	checked	check	VERB
ap-900	56	6	by	by	ADP
ap-900	56	7	erda	erda	PROPN
ap-900	56	8	with	with	ADP
ap-900	56	9	the	the	DET
ap-900	56	10	2.7	2.7	NUM
ap-900	56	11	mev	mev	PROPN
ap-900	56	12	alpha	alpha	NOUN
ap-900	56	13	particles	particle	NOUN
ap-900	56	14	.	.	PUNCT
ap-900	57	1	the	the	DET
ap-900	57	2	evaluations	evaluation	NOUN
ap-900	57	3	of	of	ADP
ap-900	57	4	the	the	DET
ap-900	57	5	rbs	rbs	PROPN
ap-900	57	6	and	and	CCONJ
ap-900	57	7	erda	erda	PROPN
ap-900	57	8	spectra	spectra	NOUN
ap-900	57	9	were	be	AUX
ap-900	57	10	done	do	VERB
ap-900	57	11	by	by	ADP
ap-900	57	12	gisa3	gisa3	NOUN
ap-900	58	1	[	[	X
ap-900	58	2	18	18	NUM
ap-900	58	3	]	]	PUNCT
ap-900	58	4	and	and	CCONJ
ap-900	58	5	simnra	simnra	VERB
ap-900	58	6	[	[	X
ap-900	58	7	19	19	NUM
ap-900	58	8	]	]	X
ap-900	58	9	code	code	NOUN
ap-900	58	10	,	,	PUNCT
ap-900	58	11	respectively	respectively	ADV
ap-900	58	12	.	.	PUNCT
ap-900	59	1	the	the	DET
ap-900	59	2	transmission	transmission	NOUN
ap-900	59	3	spectra	spectra	NOUN
ap-900	59	4	of	of	ADP
ap-900	59	5	the	the	DET
ap-900	59	6	samples	sample	NOUN
ap-900	59	7	in	in	ADP
ap-900	59	8	the	the	DET
ap-900	59	9	spectral	spectral	ADJ
ap-900	59	10	region	region	NOUN
ap-900	59	11	from	from	ADP
ap-900	59	12	400	400	NUM
ap-900	59	13	nm	nm	NOUN
ap-900	59	14	to	to	ADP
ap-900	59	15	1	1	NUM
ap-900	59	16	000	000	NUM
ap-900	59	17	nm	nm	NOUN
ap-900	59	18	at	at	ADP
ap-900	59	19	room	room	NOUN
ap-900	59	20	temperature	temperature	NOUN
ap-900	59	21	were	be	AUX
ap-900	59	22	also	also	ADV
ap-900	59	23	taken	take	VERB
ap-900	59	24	.	.	PUNCT
ap-900	60	1	for	for	ADP
ap-900	60	2	this	this	DET
ap-900	60	3	purpose	purpose	NOUN
ap-900	60	4	,	,	PUNCT
ap-900	60	5	a	a	DET
ap-900	60	6	tungsten	tungsten	ADJ
ap-900	60	7	lamp	lamp	NOUN
ap-900	60	8	and	and	CCONJ
ap-900	60	9	mdr	mdr	PROPN
ap-900	60	10	23	23	NUM
ap-900	60	11	50	50	NUM
ap-900	60	12	©	©	PROPN
ap-900	60	13	czech	czech	PROPN
ap-900	60	14	technical	technical	PROPN
ap-900	60	15	university	university	PROPN
ap-900	60	16	publishing	publishing	NOUN
ap-900	60	17	house	house	NOUN
ap-900	60	18	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-900	60	19	acta	acta	PROPN
ap-900	60	20	polytechnica	polytechnica	PROPN
ap-900	60	21	vol	vol	NOUN
ap-900	60	22	.	.	PUNCT
ap-900	61	1	46	46	NUM
ap-900	61	2	no	no	INTJ
ap-900	61	3	.	.	PUNCT
ap-900	62	1	6/2006	6/2006	NUM
ap-900	62	2	fig	fig	NOUN
ap-900	62	3	.	.	PUNCT
ap-900	63	1	2	2	NUM
ap-900	63	2	:	:	PUNCT
ap-900	63	3	schema	schema	NOUN
ap-900	63	4	of	of	ADP
ap-900	63	5	the	the	DET
ap-900	63	6	planar	planar	ADJ
ap-900	63	7	magnetron	magnetron	NOUN
ap-900	63	8	-	-	ADJ
ap-900	63	9	sputtering	sputtering	ADJ
ap-900	63	10	set	set	NOUN
ap-900	63	11	-	-	PUNCT
ap-900	63	12	up	up	NOUN
ap-900	63	13	used	use	VERB
ap-900	63	14	for	for	ADP
ap-900	63	15	deposition	deposition	NOUN
ap-900	63	16	of	of	ADP
ap-900	63	17	gan	gan	PROPN
ap-900	63	18	layers	layer	NOUN
ap-900	63	19	target	target	PROPN
ap-900	63	20	ga	ga	PROPN
ap-900	63	21	,	,	PUNCT
ap-900	63	22	ga2o3	ga2o3	PROPN
ap-900	63	23	power	power	NOUN
ap-900	63	24	(	(	PUNCT
ap-900	63	25	13.56	13.56	NUM
ap-900	63	26	mhz	mhz	NOUN
ap-900	63	27	)	)	PUNCT
ap-900	63	28	50	50	NUM
ap-900	63	29	w	w	NOUN
ap-900	63	30	gas	gas	NOUN
ap-900	63	31	precursor	precursor	NOUN
ap-900	63	32	(	(	PUNCT
ap-900	63	33	purity	purity	NOUN
ap-900	63	34	99.999	99.999	NUM
ap-900	63	35	%	%	NOUN
ap-900	63	36	)	)	PUNCT
ap-900	63	37	mixture	mixture	NOUN
ap-900	63	38	n2	n2	NOUN
ap-900	63	39	/	/	SYM
ap-900	63	40	ar	ar	PROPN
ap-900	63	41	(	(	PUNCT
ap-900	63	42	3:7	3:7	NUM
ap-900	63	43	)	)	PUNCT
ap-900	63	44	total	total	ADJ
ap-900	63	45	gas	gas	NOUN
ap-900	63	46	pressure	pressure	NOUN
ap-900	63	47	3.4	3.4	NUM
ap-900	63	48	pa	pa	PROPN
ap-900	63	49	target	target	NOUN
ap-900	63	50	substrate	substrate	NOUN
ap-900	63	51	distance	distance	NOUN
ap-900	63	52	3.7	3.7	NUM
ap-900	63	53	cm	cm	NOUN
ap-900	63	54	deposition	deposition	NOUN
ap-900	63	55	time	time	NOUN
ap-900	63	56	1	1	NUM
ap-900	63	57	�	�	SYM
ap-900	63	58	4	4	NUM
ap-900	63	59	hr	hr	NOUN
ap-900	63	60	deposition	deposition	NOUN
ap-900	63	61	temperature	temperature	NOUN
ap-900	63	62	300	300	NUM
ap-900	63	63	k	k	NOUN
ap-900	63	64	re	re	ADP
ap-900	63	65	doping	dope	VERB
ap-900	63	66	using	use	VERB
ap-900	63	67	pellets	pellet	NOUN
ap-900	63	68	er2o3	er2o3	PROPN
ap-900	63	69	,	,	PUNCT
ap-900	63	70	yb2o3	yb2o3	PROPN
ap-900	63	71	using	use	VERB
ap-900	63	72	powder	powder	NOUN
ap-900	63	73	er	er	INTJ
ap-900	63	74	metallic	metallic	ADJ
ap-900	63	75	powder	powder	NOUN
ap-900	63	76	,	,	PUNCT
ap-900	63	77	yb	yb	PROPN
ap-900	63	78	powder	powder	NOUN
ap-900	63	79	table	table	NOUN
ap-900	63	80	1	1	NUM
ap-900	63	81	:	:	PUNCT
ap-900	63	82	deposition	deposition	NOUN
ap-900	63	83	parameters	parameter	NOUN
ap-900	63	84	for	for	ADP
ap-900	63	85	er	er	INTJ
ap-900	63	86	/	/	SYM
ap-900	63	87	yb	yb	PROPN
ap-900	63	88	:	:	PUNCT
ap-900	63	89	gan	gan	NOUN
ap-900	63	90	fabrication	fabrication	NOUN
ap-900	63	91	monochromator	monochromator	NOUN
ap-900	63	92	were	be	AUX
ap-900	63	93	used	use	VERB
ap-900	63	94	as	as	ADP
ap-900	63	95	light	light	ADJ
ap-900	63	96	sources	source	NOUN
ap-900	63	97	,	,	PUNCT
ap-900	63	98	and	and	CCONJ
ap-900	63	99	the	the	DET
ap-900	63	100	light	light	NOUN
ap-900	63	101	transmitted	transmit	VERB
ap-900	63	102	through	through	ADP
ap-900	63	103	the	the	DET
ap-900	63	104	samples	sample	NOUN
ap-900	63	105	was	be	AUX
ap-900	63	106	detected	detect	VERB
ap-900	63	107	by	by	ADP
ap-900	63	108	a	a	DET
ap-900	63	109	pyrodetector	pyrodetector	NOUN
ap-900	63	110	.	.	PUNCT
ap-900	64	1	the	the	DET
ap-900	64	2	photoluminescence	photoluminescence	NOUN
ap-900	64	3	measurement	measurement	NOUN
ap-900	64	4	was	be	AUX
ap-900	64	5	carried	carry	VERB
ap-900	64	6	out	out	ADP
ap-900	64	7	at	at	ADP
ap-900	64	8	three	three	NUM
ap-900	64	9	excitation	excitation	NOUN
ap-900	64	10	wavelengths	wavelength	NOUN
ap-900	64	11	:	:	PUNCT
ap-900	64	12	�	�	PROPN
ap-900	64	13	ar	ar	PROPN
ap-900	64	14	laser	laser	NOUN
ap-900	64	15	ila-120	ila-120	ADJ
ap-900	64	16	operating	operating	NOUN
ap-900	64	17	at	at	ADP
ap-900	64	18	�	�	PROPN
ap-900	64	19	ex	ex	X
ap-900	64	20	�	�	PROPN
ap-900	64	21	488	488	NUM
ap-900	64	22	nm	nm	PROPN
ap-900	64	23	,	,	PUNCT
ap-900	64	24	eex	eex	PROPN
ap-900	64	25	�	�	PROPN
ap-900	64	26	100	100	NUM
ap-900	64	27	mw	mw	PROPN
ap-900	64	28	,	,	PUNCT
ap-900	64	29	�	�	PROPN
ap-900	64	30	ar	ar	NOUN
ap-900	64	31	lasers	laser	NOUN
ap-900	64	32	operating	operate	VERB
ap-900	64	33	at	at	ADP
ap-900	64	34	�	�	PROPN
ap-900	64	35	ex	ex	X
ap-900	64	36	�	�	PROPN
ap-900	64	37	514.5	514.5	NUM
ap-900	64	38	nm	nm	PROPN
ap-900	64	39	,	,	PUNCT
ap-900	64	40	eex	eex	PROPN
ap-900	64	41	�	�	PROPN
ap-900	64	42	300	300	NUM
ap-900	64	43	mw	mw	PROPN
ap-900	64	44	,	,	PUNCT
ap-900	64	45	�	�	PROPN
ap-900	64	46	semiconductor	semiconductor	NOUN
ap-900	64	47	laser	laser	NOUN
ap-900	64	48	p4300	p4300	NUM
ap-900	64	49	operating	operate	VERB
ap-900	64	50	at	at	ADP
ap-900	64	51	�	�	PROPN
ap-900	64	52	ex	ex	X
ap-900	64	53	�	�	PROPN
ap-900	64	54	980	980	NUM
ap-900	64	55	nm	nm	NOUN
ap-900	64	56	,	,	PUNCT
ap-900	64	57	eex	eex	PROPN
ap-900	64	58	�	�	PROPN
ap-900	64	59	500	500	NUM
ap-900	64	60	mw	mw	PROPN
ap-900	64	61	.	.	PUNCT
ap-900	65	1	an	an	DET
ap-900	65	2	feu62	feu62	ADJ
ap-900	65	3	photocell	photocell	NOUN
ap-900	65	4	was	be	AUX
ap-900	65	5	used	use	VERB
ap-900	65	6	to	to	PART
ap-900	65	7	detect	detect	VERB
ap-900	65	8	the	the	DET
ap-900	65	9	wavelength	wavelength	NOUN
ap-900	65	10	from	from	ADP
ap-900	65	11	500	500	NUM
ap-900	65	12	to	to	PART
ap-900	65	13	1	1	NUM
ap-900	65	14	000	000	NUM
ap-900	65	15	nm	nm	NOUN
ap-900	65	16	,	,	PUNCT
ap-900	65	17	while	while	SCONJ
ap-900	65	18	a	a	DET
ap-900	65	19	ge	ge	PROPN
ap-900	65	20	detector	detector	NOUN
ap-900	65	21	was	be	AUX
ap-900	65	22	used	use	VERB
ap-900	65	23	for	for	ADP
ap-900	65	24	the	the	DET
ap-900	65	25	wavelengths	wavelength	NOUN
ap-900	65	26	from	from	ADP
ap-900	65	27	1	1	NUM
ap-900	65	28	000	000	NUM
ap-900	65	29	nm	nm	PUNCT
ap-900	65	30	to	to	ADP
ap-900	65	31	1	1	NUM
ap-900	65	32	600	600	NUM
ap-900	65	33	nm	nm	NOUN
ap-900	65	34	.	.	PUNCT
ap-900	66	1	the	the	DET
ap-900	66	2	reference	reference	NOUN
ap-900	66	3	chopper	chopper	PROPN
ap-900	66	4	frequency	frequency	NOUN
ap-900	66	5	was	be	AUX
ap-900	66	6	75	75	NUM
ap-900	66	7	hz	hz	NOUN
ap-900	66	8	.	.	PUNCT
ap-900	67	1	all	all	DET
ap-900	67	2	the	the	DET
ap-900	67	3	luminescence	luminescence	NOUN
ap-900	67	4	measurements	measurement	NOUN
ap-900	67	5	were	be	AUX
ap-900	67	6	performed	perform	VERB
ap-900	67	7	at	at	ADP
ap-900	67	8	room	room	NOUN
ap-900	67	9	temperature	temperature	NOUN
ap-900	67	10	.	.	PUNCT
ap-900	68	1	3	3	NUM
ap-900	68	2	result	result	NOUN
ap-900	68	3	and	and	CCONJ
ap-900	68	4	discussion	discussion	VERB
ap-900	68	5	the	the	DET
ap-900	68	6	structure	structure	NOUN
ap-900	68	7	of	of	ADP
ap-900	68	8	the	the	DET
ap-900	68	9	deposited	deposit	VERB
ap-900	68	10	gan	gan	ADJ
ap-900	68	11	thin	thin	ADJ
ap-900	68	12	films	film	NOUN
ap-900	68	13	was	be	AUX
ap-900	68	14	studied	study	VERB
ap-900	68	15	by	by	ADP
ap-900	68	16	xrd	xrd	NOUN
ap-900	68	17	(	(	PUNCT
ap-900	68	18	x	x	NOUN
ap-900	68	19	-	-	NOUN
ap-900	68	20	ray	ray	NOUN
ap-900	68	21	diffraction	diffraction	NOUN
ap-900	68	22	)	)	PUNCT
ap-900	68	23	,	,	PUNCT
ap-900	68	24	and	and	CCONJ
ap-900	68	25	the	the	DET
ap-900	68	26	results	result	NOUN
ap-900	68	27	have	have	AUX
ap-900	68	28	already	already	ADV
ap-900	68	29	been	be	AUX
ap-900	68	30	given	give	VERB
ap-900	68	31	in	in	ADP
ap-900	68	32	[	[	X
ap-900	68	33	20	20	NUM
ap-900	68	34	]	]	PUNCT
ap-900	68	35	.	.	PUNCT
ap-900	69	1	it	it	PRON
ap-900	69	2	was	be	AUX
ap-900	69	3	shown	show	VERB
ap-900	69	4	that	that	SCONJ
ap-900	69	5	the	the	DET
ap-900	69	6	gan	gan	PROPN
ap-900	69	7	structures	structure	NOUN
ap-900	69	8	depended	depend	VERB
ap-900	69	9	on	on	ADP
ap-900	69	10	the	the	DET
ap-900	69	11	type	type	NOUN
ap-900	69	12	of	of	ADP
ap-900	69	13	the	the	DET
ap-900	69	14	target	target	NOUN
ap-900	69	15	and	and	CCONJ
ap-900	69	16	temperature	temperature	NOUN
ap-900	69	17	used	use	VERB
ap-900	69	18	for	for	ADP
ap-900	69	19	the	the	DET
ap-900	69	20	deposition	deposition	NOUN
ap-900	69	21	.	.	PUNCT
ap-900	70	1	gan	gan	PROPN
ap-900	70	2	films	film	NOUN
ap-900	70	3	grown	grow	VERB
ap-900	70	4	using	use	VERB
ap-900	70	5	the	the	DET
ap-900	70	6	ga2o3	ga2o3	PROPN
ap-900	70	7	target	target	NOUN
ap-900	70	8	at	at	ADP
ap-900	70	9	room	room	NOUN
ap-900	70	10	temperature	temperature	NOUN
ap-900	70	11	had	have	VERB
ap-900	70	12	an	an	DET
ap-900	70	13	amorphous	amorphous	ADJ
ap-900	70	14	structure	structure	NOUN
ap-900	70	15	,	,	PUNCT
ap-900	70	16	while	while	SCONJ
ap-900	70	17	gan	gan	PROPN
ap-900	70	18	films	film	NOUN
ap-900	70	19	fabricated	fabricate	VERB
ap-900	70	20	using	use	VERB
ap-900	70	21	the	the	DET
ap-900	70	22	ga	ga	PROPN
ap-900	70	23	target	target	NOUN
ap-900	70	24	at	at	ADP
ap-900	70	25	room	room	NOUN
ap-900	70	26	temperature	temperature	NOUN
ap-900	70	27	had	have	VERB
ap-900	70	28	polycrystalline	polycrystalline	ADJ
ap-900	70	29	structure	structure	NOUN
ap-900	70	30	(	(	PUNCT
ap-900	70	31	according	accord	VERB
ap-900	70	32	to	to	ADP
ap-900	70	33	the	the	DET
ap-900	70	34	literature	literature	NOUN
ap-900	70	35	,	,	PUNCT
ap-900	70	36	gan	gan	PROPN
ap-900	70	37	layers	layer	NOUN
ap-900	70	38	fabricated	fabricate	VERB
ap-900	70	39	at	at	ADP
ap-900	70	40	an	an	DET
ap-900	70	41	elevated	elevated	ADJ
ap-900	70	42	temperature	temperature	NOUN
ap-900	70	43	(	(	PUNCT
ap-900	70	44	above	above	ADP
ap-900	70	45	800	800	NUM
ap-900	70	46	°	°	NOUN
ap-900	70	47	c	c	NOUN
ap-900	70	48	)	)	PUNCT
ap-900	70	49	can	can	AUX
ap-900	70	50	have	have	VERB
ap-900	70	51	a	a	DET
ap-900	70	52	single	single	ADJ
ap-900	70	53	crystalline	crystalline	NOUN
ap-900	70	54	structure	structure	NOUN
ap-900	71	1	[	[	X
ap-900	71	2	21	21	NUM
ap-900	71	3	]	]	PUNCT
ap-900	71	4	)	)	PUNCT
ap-900	71	5	.	.	PUNCT
ap-900	72	1	the	the	DET
ap-900	72	2	exact	exact	ADJ
ap-900	72	3	composition	composition	NOUN
ap-900	72	4	of	of	ADP
ap-900	72	5	the	the	DET
ap-900	72	6	deposited	deposit	VERB
ap-900	72	7	gan	gan	NOUN
ap-900	72	8	layers	layer	NOUN
ap-900	72	9	was	be	AUX
ap-900	72	10	determined	determine	VERB
ap-900	72	11	by	by	ADP
ap-900	72	12	nuclear	nuclear	ADJ
ap-900	72	13	analytical	analytical	ADJ
ap-900	72	14	methods	method	NOUN
ap-900	72	15	(	(	PUNCT
ap-900	72	16	rbs	rbs	PROPN
ap-900	72	17	,	,	PUNCT
ap-900	72	18	erda	erda	PROPN
ap-900	72	19	)	)	PUNCT
ap-900	72	20	.	.	PUNCT
ap-900	73	1	the	the	DET
ap-900	73	2	typical	typical	ADJ
ap-900	73	3	rbs	rbs	PROPN
ap-900	73	4	spectrum	spectrum	NOUN
ap-900	73	5	of	of	ADP
ap-900	73	6	an	an	DET
ap-900	73	7	erbium	erbium	NOUN
ap-900	73	8	doped	dope	VERB
ap-900	73	9	gan	gan	NOUN
ap-900	73	10	layer	layer	NOUN
ap-900	73	11	is	be	AUX
ap-900	73	12	shown	show	VERB
ap-900	73	13	in	in	ADP
ap-900	73	14	fig	fig	NOUN
ap-900	73	15	.	.	PUNCT
ap-900	74	1	3	3	X
ap-900	74	2	.	.	PUNCT
ap-900	75	1	the	the	DET
ap-900	75	2	analyses	analysis	NOUN
ap-900	75	3	proved	prove	VERB
ap-900	75	4	that	that	SCONJ
ap-900	75	5	the	the	DET
ap-900	75	6	samples	sample	NOUN
ap-900	75	7	contained	contain	VERB
ap-900	75	8	gallium	gallium	NOUN
ap-900	75	9	,	,	PUNCT
ap-900	75	10	nitrogen	nitrogen	NOUN
ap-900	75	11	,	,	PUNCT
ap-900	75	12	oxygen	oxygen	NOUN
ap-900	75	13	,	,	PUNCT
ap-900	75	14	argon	argon	NOUN
ap-900	75	15	,	,	PUNCT
ap-900	75	16	hydrogen	hydrogen	NOUN
ap-900	75	17	and	and	CCONJ
ap-900	75	18	erbium	erbium	NOUN
ap-900	75	19	and/or	and/or	CCONJ
ap-900	75	20	ytterbium	ytterbium	NOUN
ap-900	75	21	ions	ion	NOUN
ap-900	75	22	(	(	PUNCT
ap-900	75	23	see	see	VERB
ap-900	75	24	table	table	NOUN
ap-900	75	25	2	2	NUM
ap-900	75	26	)	)	PUNCT
ap-900	75	27	.	.	PUNCT
ap-900	76	1	the	the	DET
ap-900	76	2	amount	amount	NOUN
ap-900	76	3	of	of	ADP
ap-900	76	4	incorporated	incorporated	ADJ
ap-900	76	5	er3	er3	NOUN
ap-900	76	6	+	+	NUM
ap-900	76	7	and	and	CCONJ
ap-900	76	8	yb3	yb3	ADJ
ap-900	76	9	+	+	SYM
ap-900	76	10	ions	ion	NOUN
ap-900	76	11	differed	differ	VERB
ap-900	76	12	depending	depend	VERB
ap-900	76	13	on	on	ADP
ap-900	76	14	the	the	DET
ap-900	76	15	area	area	NOUN
ap-900	76	16	of	of	ADP
ap-900	76	17	the	the	DET
ap-900	76	18	target	target	NOUN
ap-900	76	19	covered	cover	VERB
ap-900	76	20	by	by	ADP
ap-900	76	21	the	the	DET
ap-900	76	22	erbium	erbium	NOUN
ap-900	76	23	and	and	CCONJ
ap-900	76	24	ytterbium	ytterbium	NOUN
ap-900	76	25	co	co	NOUN
ap-900	76	26	-	-	NOUN
ap-900	76	27	dopant	dopant	ADJ
ap-900	76	28	,	,	PUNCT
ap-900	76	29	and	and	CCONJ
ap-900	76	30	also	also	ADV
ap-900	76	31	on	on	ADP
ap-900	76	32	the	the	DET
ap-900	76	33	erosion	erosion	NOUN
ap-900	76	34	area	area	NOUN
ap-900	76	35	represented	represent	VERB
ap-900	76	36	by	by	ADP
ap-900	76	37	the	the	DET
ap-900	76	38	part	part	NOUN
ap-900	76	39	of	of	ADP
ap-900	76	40	the	the	DET
ap-900	76	41	surface	surface	NOUN
ap-900	76	42	target	target	NOUN
ap-900	76	43	©	©	PROPN
ap-900	76	44	czech	czech	PROPN
ap-900	76	45	technical	technical	PROPN
ap-900	76	46	university	university	PROPN
ap-900	76	47	publishing	publishing	NOUN
ap-900	76	48	house	house	NOUN
ap-900	76	49	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-900	76	50	51	51	NUM
ap-900	76	51	acta	acta	PROPN
ap-900	76	52	polytechnica	polytechnica	PROPN
ap-900	76	53	vol	vol	NOUN
ap-900	76	54	.	.	PUNCT
ap-900	77	1	46	46	NUM
ap-900	77	2	no	no	INTJ
ap-900	77	3	.	.	PUNCT
ap-900	78	1	6/2006	6/2006	NUM
ap-900	78	2	fig	fig	NOUN
ap-900	78	3	.	.	PUNCT
ap-900	79	1	3	3	NUM
ap-900	79	2	:	:	PUNCT
ap-900	79	3	rbs	rbs	PROPN
ap-900	79	4	spectrum	spectrum	NOUN
ap-900	79	5	of	of	ADP
ap-900	79	6	er	er	ADV
ap-900	79	7	-	-	PUNCT
ap-900	79	8	doped	dope	VERB
ap-900	79	9	gan	gan	NOUN
ap-900	79	10	containing	contain	VERB
ap-900	79	11	1.3	1.3	NUM
ap-900	79	12	at	at	ADP
ap-900	79	13	%	%	INTJ
ap-900	79	14	er	er	INTJ
ap-900	79	15	samples	sample	NOUN
ap-900	79	16	composition	composition	NOUN
ap-900	79	17	(	(	PUNCT
ap-900	79	18	at	at	ADP
ap-900	79	19	%	%	INTJ
ap-900	79	20	)	)	PUNCT
ap-900	79	21	ga	ga	PROPN
ap-900	80	1	n	n	CCONJ
ap-900	80	2	o	o	NOUN
ap-900	80	3	h	h	NOUN
ap-900	80	4	er	er	INTJ
ap-900	80	5	�	�	NOUN
ap-900	80	6	yb	yb	PROPN
ap-900	80	7	#	#	SYM
ap-900	80	8	160	160	NUM
ap-900	80	9	reference	reference	NOUN
ap-900	80	10	sample	sample	NOUN
ap-900	80	11	*	*	PUNCT
ap-900	81	1	39.2	39.2	NUM
ap-900	81	2	14.1	14.1	NUM
ap-900	81	3	41.5	41.5	NUM
ap-900	81	4	5.2	5.2	NUM
ap-900	81	5	0	0	NUM
ap-900	81	6	#	#	SYM
ap-900	81	7	110	110	NUM
ap-900	81	8	er	er	INTJ
ap-900	81	9	1	1	NUM
ap-900	81	10	×	×	NOUN
ap-900	81	11	er2o3	er2o3	PROPN
ap-900	81	12	*	*	PUNCT
ap-900	81	13	*	*	PUNCT
ap-900	81	14	33	33	NUM
ap-900	81	15	26.9	26.9	NUM
ap-900	81	16	32	32	NUM
ap-900	81	17	8	8	NUM
ap-900	81	18	0.1	0.1	NUM
ap-900	81	19	#	#	SYM
ap-900	81	20	111	111	NUM
ap-900	81	21	er	er	INTJ
ap-900	81	22	3	3	NUM
ap-900	81	23	×	×	NOUN
ap-900	81	24	er2o3	er2o3	PROPN
ap-900	81	25	*	*	PUNCT
ap-900	81	26	*	*	PUNCT
ap-900	81	27	35.3	35.3	NUM
ap-900	81	28	25.4	25.4	NUM
ap-900	81	29	30.5	30.5	NUM
ap-900	81	30	8.6	8.6	NUM
ap-900	81	31	0.2	0.2	NUM
ap-900	81	32	#	#	SYM
ap-900	81	33	112	112	NUM
ap-900	81	34	er	er	INTJ
ap-900	81	35	5	5	NUM
ap-900	81	36	×	×	NOUN
ap-900	81	37	er2o3	er2o3	PROPN
ap-900	81	38	*	*	PUNCT
ap-900	82	1	*	*	PUNCT
ap-900	82	2	32.6	32.6	NUM
ap-900	82	3	16.1	16.1	NUM
ap-900	82	4	42.3	42.3	NUM
ap-900	82	5	8.5	8.5	NUM
ap-900	82	6	0.5	0.5	NUM
ap-900	82	7	#	#	SYM
ap-900	82	8	161	161	NUM
ap-900	82	9	er	er	INTJ
ap-900	82	10	mer	mer	X
ap-900	82	11	�	�	PROPN
ap-900	82	12	0.05	0.05	NUM
ap-900	82	13	g	g	PROPN
ap-900	82	14	*	*	PROPN
ap-900	82	15	*	*	PUNCT
ap-900	82	16	*	*	PUNCT
ap-900	82	17	36.8	36.8	NUM
ap-900	82	18	21.4	21.4	NUM
ap-900	82	19	34.6	34.6	NUM
ap-900	82	20	6	6	NUM
ap-900	82	21	1.2	1.2	NUM
ap-900	82	22	#	#	SYM
ap-900	82	23	162	162	NUM
ap-900	82	24	er	er	INTJ
ap-900	82	25	/	/	SYM
ap-900	82	26	yb	yb	PROPN
ap-900	82	27	mer	mer	PROPN
ap-900	82	28	�	�	PROPN
ap-900	82	29	0.05	0.05	NUM
ap-900	82	30	g	g	PROPN
ap-900	82	31	*	*	PROPN
ap-900	82	32	*	*	PUNCT
ap-900	82	33	*	*	PUNCT
ap-900	82	34	myb	myb	PROPN
ap-900	82	35	�	�	PROPN
ap-900	82	36	0.0997	0.0997	NUM
ap-900	82	37	g	g	PROPN
ap-900	82	38	33.8	33.8	NUM
ap-900	82	39	15.5	15.5	NUM
ap-900	82	40	41.9	41.9	NUM
ap-900	82	41	6	6	NUM
ap-900	82	42	2.8	2.8	NUM
ap-900	82	43	#	#	SYM
ap-900	82	44	165	165	NUM
ap-900	82	45	er	er	INTJ
ap-900	82	46	/	/	SYM
ap-900	82	47	yb	yb	PROPN
ap-900	82	48	mer	mer	PROPN
ap-900	82	49	�	�	PROPN
ap-900	82	50	0.05	0.05	NUM
ap-900	82	51	g	g	PROPN
ap-900	82	52	*	*	PROPN
ap-900	82	53	*	*	PUNCT
ap-900	82	54	*	*	PUNCT
ap-900	82	55	myb	myb	PROPN
ap-900	82	56	�	�	PROPN
ap-900	82	57	0.4996	0.4996	NUM
ap-900	82	58	g	g	ADP
ap-900	82	59	37.7	37.7	NUM
ap-900	82	60	11.3	11.3	NUM
ap-900	82	61	35.6	35.6	NUM
ap-900	82	62	8.9	8.9	NUM
ap-900	82	63	6.5	6.5	NUM
ap-900	82	64	#	#	SYM
ap-900	82	65	163	163	NUM
ap-900	82	66	er	er	INTJ
ap-900	82	67	/	/	SYM
ap-900	82	68	yb	yb	PROPN
ap-900	82	69	mer	mer	PROPN
ap-900	82	70	�	�	PROPN
ap-900	82	71	0.05	0.05	NUM
ap-900	82	72	g	g	PROPN
ap-900	82	73	*	*	PROPN
ap-900	82	74	*	*	PUNCT
ap-900	82	75	*	*	PUNCT
ap-900	82	76	myb	myb	PROPN
ap-900	82	77	�	�	PROPN
ap-900	82	78	1.0008	1.0008	NUM
ap-900	82	79	g	g	PROPN
ap-900	82	80	19.4	19.4	NUM
ap-900	82	81	12.6	12.6	NUM
ap-900	82	82	48.3	48.3	NUM
ap-900	82	83	4.7	4.7	NUM
ap-900	82	84	15	15	NUM
ap-900	82	85	*	*	NOUN
ap-900	82	86	sample	sample	NOUN
ap-900	82	87	without	without	ADP
ap-900	82	88	er	er	INTJ
ap-900	82	89	+	+	NOUN
ap-900	82	90	yb	yb	ADJ
ap-900	82	91	doping	doping	NOUN
ap-900	82	92	,	,	PUNCT
ap-900	82	93	*	*	PUNCT
ap-900	82	94	*	*	PUNCT
ap-900	82	95	number	number	NOUN
ap-900	82	96	of	of	ADP
ap-900	82	97	er2o3	er2o3	PROPN
ap-900	82	98	pellets	pellet	NOUN
ap-900	82	99	(	(	PUNCT
ap-900	82	100	5	5	NUM
ap-900	82	101	mm	mm	PROPN
ap-900	82	102	diameter	diameter	NOUN
ap-900	82	103	)	)	PUNCT
ap-900	82	104	put	put	VERB
ap-900	82	105	on	on	ADP
ap-900	82	106	top	top	NOUN
ap-900	82	107	of	of	ADP
ap-900	82	108	the	the	DET
ap-900	82	109	ga2o3	ga2o3	PROPN
ap-900	82	110	target	target	NOUN
ap-900	82	111	,	,	PUNCT
ap-900	82	112	*	*	PUNCT
ap-900	82	113	*	*	PUNCT
ap-900	82	114	*	*	VERB
ap-900	82	115	weight	weight	NOUN
ap-900	82	116	of	of	ADP
ap-900	82	117	er	er	INTJ
ap-900	82	118	or	or	CCONJ
ap-900	82	119	yb	yb	PROPN
ap-900	82	120	powder	powder	NOUN
ap-900	82	121	put	put	VERB
ap-900	82	122	on	on	ADP
ap-900	82	123	top	top	NOUN
ap-900	82	124	of	of	ADP
ap-900	82	125	the	the	DET
ap-900	82	126	ga2o3	ga2o3	PROPN
ap-900	82	127	target	target	NOUN
ap-900	82	128	table	table	NOUN
ap-900	82	129	2	2	NUM
ap-900	82	130	:	:	PUNCT
ap-900	82	131	composition	composition	NOUN
ap-900	82	132	of	of	ADP
ap-900	82	133	re	re	ADJ
ap-900	82	134	-	-	ADJ
ap-900	82	135	doped	doped	ADJ
ap-900	82	136	gan	gan	NOUN
ap-900	82	137	samples	sample	NOUN
ap-900	82	138	as	as	SCONJ
ap-900	82	139	determined	determine	VERB
ap-900	82	140	by	by	ADP
ap-900	82	141	rutherford	rutherford	PROPN
ap-900	82	142	backscattering	backscatter	VERB
ap-900	82	143	analysis	analysis	NOUN
ap-900	82	144	and	and	CCONJ
ap-900	82	145	elastic	elastic	ADJ
ap-900	82	146	recoil	recoil	NOUN
ap-900	82	147	detection	detection	NOUN
ap-900	82	148	analysis	analysis	NOUN
ap-900	82	149	covered	cover	VERB
ap-900	82	150	by	by	ADP
ap-900	82	151	erbium	erbium	NOUN
ap-900	82	152	and	and	CCONJ
ap-900	82	153	ytterbium	ytterbium	NOUN
ap-900	82	154	.	.	PUNCT
ap-900	83	1	as	as	SCONJ
ap-900	83	2	er	er	INTJ
ap-900	83	3	and	and	CCONJ
ap-900	83	4	yb	yb	PROPN
ap-900	83	5	have	have	VERB
ap-900	83	6	very	very	ADV
ap-900	83	7	close	close	ADJ
ap-900	83	8	,	,	PUNCT
ap-900	83	9	atomic	atomic	ADJ
ap-900	83	10	weight	weight	NOUN
ap-900	83	11	values	value	NOUN
ap-900	83	12	these	these	DET
ap-900	83	13	two	two	NUM
ap-900	83	14	elements	element	NOUN
ap-900	83	15	can	can	AUX
ap-900	83	16	not	not	PART
ap-900	83	17	be	be	AUX
ap-900	83	18	distinguished	distinguish	VERB
ap-900	83	19	in	in	ADP
ap-900	83	20	the	the	DET
ap-900	83	21	rbs	rbs	NOUN
ap-900	83	22	spectra	spectra	NOUN
ap-900	83	23	,	,	PUNCT
ap-900	83	24	so	so	SCONJ
ap-900	83	25	that	that	SCONJ
ap-900	83	26	only	only	ADV
ap-900	83	27	the	the	DET
ap-900	83	28	sum	sum	NOUN
ap-900	83	29	of	of	ADP
ap-900	83	30	the	the	DET
ap-900	83	31	two	two	NUM
ap-900	83	32	elements	element	NOUN
ap-900	83	33	can	can	AUX
ap-900	83	34	be	be	AUX
ap-900	83	35	obtained	obtain	VERB
ap-900	83	36	.	.	PUNCT
ap-900	84	1	according	accord	VERB
ap-900	84	2	to	to	ADP
ap-900	84	3	table	table	NOUN
ap-900	84	4	2	2	NUM
ap-900	84	5	,	,	PUNCT
ap-900	84	6	a	a	DET
ap-900	84	7	significant	significant	ADJ
ap-900	84	8	amount	amount	NOUN
ap-900	84	9	of	of	ADP
ap-900	84	10	hydrogen	hydrogen	NOUN
ap-900	84	11	is	be	AUX
ap-900	84	12	found	find	VERB
ap-900	84	13	in	in	ADP
ap-900	84	14	gan	gan	PROPN
ap-900	84	15	films	film	NOUN
ap-900	84	16	,	,	PUNCT
ap-900	84	17	with	with	ADP
ap-900	84	18	the	the	DET
ap-900	84	19	relative	relative	ADJ
ap-900	84	20	concentrations	concentration	NOUN
ap-900	84	21	ranging	range	VERB
ap-900	84	22	between	between	ADP
ap-900	84	23	4	4	NUM
ap-900	84	24	and	and	CCONJ
ap-900	84	25	9	9	NUM
ap-900	84	26	at	at	ADP
ap-900	84	27	%	%	NOUN
ap-900	84	28	.	.	PUNCT
ap-900	85	1	this	this	DET
ap-900	85	2	unintended	unintended	ADJ
ap-900	85	3	presence	presence	NOUN
ap-900	85	4	of	of	ADP
ap-900	85	5	hydrogen	hydrogen	NOUN
ap-900	85	6	in	in	ADP
ap-900	85	7	the	the	DET
ap-900	85	8	samples	sample	NOUN
ap-900	85	9	is	be	AUX
ap-900	85	10	probably	probably	ADV
ap-900	85	11	a	a	DET
ap-900	85	12	consequence	consequence	NOUN
ap-900	85	13	of	of	ADP
ap-900	85	14	the	the	DET
ap-900	85	15	residual	residual	ADJ
ap-900	85	16	contamination	contamination	NOUN
ap-900	85	17	of	of	ADP
ap-900	85	18	the	the	DET
ap-900	85	19	ar	ar	NOUN
ap-900	85	20	and/or	and/or	CCONJ
ap-900	85	21	52	52	NUM
ap-900	85	22	©	©	PROPN
ap-900	85	23	czech	czech	PROPN
ap-900	85	24	technical	technical	PROPN
ap-900	85	25	university	university	PROPN
ap-900	85	26	publishing	publishing	NOUN
ap-900	85	27	house	house	NOUN
ap-900	85	28	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-900	85	29	acta	acta	PROPN
ap-900	85	30	polytechnica	polytechnica	PROPN
ap-900	85	31	vol	vol	NOUN
ap-900	85	32	.	.	PUNCT
ap-900	86	1	46	46	NUM
ap-900	86	2	no	no	INTJ
ap-900	86	3	.	.	PUNCT
ap-900	87	1	6/2006	6/2006	NUM
ap-900	87	2	fig	fig	NOUN
ap-900	87	3	.	.	PUNCT
ap-900	88	1	4	4	NUM
ap-900	88	2	:	:	PUNCT
ap-900	88	3	transmission	transmission	NOUN
ap-900	88	4	spectra	spectra	NOUN
ap-900	88	5	of	of	ADP
ap-900	88	6	the	the	DET
ap-900	88	7	er	er	INTJ
ap-900	88	8	:	:	PUNCT
ap-900	88	9	gan	gan	PROPN
ap-900	88	10	sample	sample	NOUN
ap-900	88	11	fig	fig	NOUN
ap-900	88	12	.	.	PUNCT
ap-900	89	1	5	5	NUM
ap-900	89	2	:	:	PUNCT
ap-900	89	3	pl	pl	X
ap-900	89	4	spectra	spectra	NOUN
ap-900	89	5	of	of	ADP
ap-900	89	6	the	the	DET
ap-900	89	7	er	er	ADV
ap-900	89	8	-	-	PUNCT
ap-900	89	9	doped	dope	VERB
ap-900	89	10	gan	gan	PROPN
ap-900	89	11	layers	layer	NOUN
ap-900	89	12	fabricated	fabricate	VERB
ap-900	89	13	by	by	ADP
ap-900	89	14	magnetron	magnetron	NOUN
ap-900	89	15	sputtering	sputtering	NOUN
ap-900	89	16	using	use	VERB
ap-900	89	17	a	a	DET
ap-900	89	18	ga	ga	NOUN
ap-900	89	19	target	target	NOUN
ap-900	89	20	and	and	CCONJ
ap-900	89	21	erbium	erbium	NOUN
ap-900	89	22	metallic	metallic	ADJ
ap-900	89	23	powder	powder	NOUN
ap-900	89	24	laid	lay	VERB
ap-900	89	25	on	on	ADP
ap-900	89	26	top	top	NOUN
ap-900	89	27	of	of	ADP
ap-900	89	28	the	the	DET
ap-900	89	29	target	target	NOUN
ap-900	89	30	fig	fig	NOUN
ap-900	89	31	.	.	PUNCT
ap-900	90	1	6	6	NUM
ap-900	90	2	:	:	PUNCT
ap-900	90	3	pl	pl	X
ap-900	90	4	spectra	spectra	NOUN
ap-900	90	5	of	of	ADP
ap-900	90	6	an	an	DET
ap-900	90	7	er	er	ADV
ap-900	90	8	-	-	PUNCT
ap-900	90	9	doped	dope	VERB
ap-900	90	10	gan	gan	NOUN
ap-900	90	11	layer	layer	NOUN
ap-900	90	12	fabricated	fabricate	VERB
ap-900	90	13	by	by	ADP
ap-900	90	14	magnetron	magnetron	NOUN
ap-900	90	15	sputtering	sputtering	NOUN
ap-900	90	16	using	use	VERB
ap-900	90	17	the	the	DET
ap-900	90	18	gallium	gallium	NOUN
ap-900	90	19	oxide	oxide	NOUN
ap-900	90	20	target	target	NOUN
ap-900	90	21	and	and	CCONJ
ap-900	90	22	two	two	NUM
ap-900	90	23	pellets	pellet	NOUN
ap-900	90	24	(	(	PUNCT
ap-900	90	25	5	5	NUM
ap-900	90	26	mm	mm	PROPN
ap-900	90	27	diameter	diameter	NOUN
ap-900	90	28	)	)	PUNCT
ap-900	90	29	of	of	ADP
ap-900	90	30	erbium	erbium	NOUN
ap-900	90	31	oxide	oxide	NOUN
ap-900	90	32	laid	lay	VERB
ap-900	90	33	on	on	ADP
ap-900	90	34	the	the	DET
ap-900	90	35	top	top	NOUN
ap-900	90	36	of	of	ADP
ap-900	90	37	the	the	DET
ap-900	90	38	target	target	NOUN
ap-900	90	39	n2	n2	ADJ
ap-900	90	40	gases	gas	NOUN
ap-900	90	41	that	that	PRON
ap-900	90	42	are	be	AUX
ap-900	90	43	employed	employ	VERB
ap-900	90	44	.	.	PUNCT
ap-900	91	1	they	they	PRON
ap-900	91	2	contained	contain	VERB
ap-900	91	3	approximately	approximately	ADV
ap-900	91	4	5	5	NUM
ap-900	91	5	ppm	ppm	NOUN
ap-900	91	6	of	of	ADP
ap-900	91	7	hydrogen	hydrogen	NOUN
ap-900	91	8	[	[	X
ap-900	91	9	22	22	NUM
ap-900	91	10	]	]	PUNCT
ap-900	91	11	.	.	PUNCT
ap-900	92	1	the	the	DET
ap-900	92	2	gan	gan	PROPN
ap-900	92	3	samples	sample	NOUN
ap-900	92	4	also	also	ADV
ap-900	92	5	contained	contain	VERB
ap-900	92	6	a	a	DET
ap-900	92	7	small	small	ADJ
ap-900	92	8	amount	amount	NOUN
ap-900	92	9	of	of	ADP
ap-900	92	10	argon	argon	NOUN
ap-900	92	11	(	(	PUNCT
ap-900	92	12	around	around	ADP
ap-900	92	13	the	the	DET
ap-900	92	14	detection	detection	NOUN
ap-900	92	15	limit	limit	NOUN
ap-900	92	16	1	1	NUM
ap-900	92	17	at	at	ADP
ap-900	92	18	%	%	NOUN
ap-900	92	19	)	)	PUNCT
ap-900	92	20	,	,	PUNCT
ap-900	92	21	due	due	ADP
ap-900	92	22	to	to	ADP
ap-900	92	23	the	the	DET
ap-900	92	24	argon	argon	NOUN
ap-900	92	25	atmosphere	atmosphere	NOUN
ap-900	92	26	used	use	VERB
ap-900	92	27	during	during	ADP
ap-900	92	28	deposition	deposition	NOUN
ap-900	92	29	.	.	PUNCT
ap-900	93	1	fig	fig	NOUN
ap-900	93	2	.	.	PUNCT
ap-900	94	1	4	4	NUM
ap-900	94	2	compares	compare	VERB
ap-900	94	3	the	the	DET
ap-900	94	4	transmission	transmission	NOUN
ap-900	94	5	spectra	spectra	NOUN
ap-900	94	6	of	of	ADP
ap-900	94	7	the	the	DET
ap-900	94	8	sputtered	sputter	VERB
ap-900	94	9	gan	gan	NOUN
ap-900	94	10	doped	dope	VERB
ap-900	94	11	with	with	ADP
ap-900	94	12	1.2	1.2	NUM
ap-900	94	13	at	at	ADP
ap-900	94	14	.	.	PUNCT
ap-900	95	1	%	%	NOUN
ap-900	95	2	of	of	ADP
ap-900	95	3	erbium	erbium	NOUN
ap-900	95	4	with	with	ADP
ap-900	95	5	the	the	DET
ap-900	95	6	un	un	ADJ
ap-900	95	7	-	-	ADJ
ap-900	95	8	doped	doped	ADJ
ap-900	95	9	gan	gan	PROPN
ap-900	95	10	sample	sample	NOUN
ap-900	95	11	.	.	PUNCT
ap-900	96	1	the	the	DET
ap-900	96	2	arrows	arrow	NOUN
ap-900	96	3	in	in	ADP
ap-900	96	4	the	the	DET
ap-900	96	5	figure	figure	NOUN
ap-900	96	6	mark	mark	VERB
ap-900	96	7	the	the	DET
ap-900	96	8	strongest	strong	ADJ
ap-900	96	9	transitions	transition	NOUN
ap-900	96	10	of	of	ADP
ap-900	96	11	the	the	DET
ap-900	96	12	er3	er3	PROPN
ap-900	96	13	+	+	PROPN
ap-900	96	14	ions	ion	NOUN
ap-900	96	15	(	(	PUNCT
ap-900	96	16	2h11/2	2h11/2	NOUN
ap-900	96	17	)	)	PUNCT
ap-900	96	18	.	.	PUNCT
ap-900	97	1	however	however	ADV
ap-900	97	2	,	,	PUNCT
ap-900	97	3	we	we	PRON
ap-900	97	4	observed	observe	VERB
ap-900	97	5	only	only	ADV
ap-900	97	6	a	a	DET
ap-900	97	7	weak	weak	ADJ
ap-900	97	8	peak	peak	NOUN
ap-900	97	9	attributed	attribute	VERB
ap-900	97	10	to	to	ADP
ap-900	97	11	the	the	DET
ap-900	97	12	er3	er3	PROPN
ap-900	97	13	+	+	PROPN
ap-900	97	14	transition	transition	NOUN
ap-900	97	15	.	.	PUNCT
ap-900	98	1	we	we	PRON
ap-900	98	2	did	do	AUX
ap-900	98	3	not	not	PART
ap-900	98	4	observe	observe	VERB
ap-900	98	5	any	any	DET
ap-900	98	6	transition	transition	NOUN
ap-900	98	7	of	of	ADP
ap-900	98	8	the	the	DET
ap-900	98	9	yb3	yb3	NOUN
ap-900	98	10	+	+	SYM
ap-900	98	11	ions	ion	NOUN
ap-900	98	12	at	at	ADP
ap-900	98	13	980	980	NUM
ap-900	98	14	nm	nm	NOUN
ap-900	98	15	(	(	PUNCT
ap-900	98	16	2f5/2	2f5/2	PROPN
ap-900	98	17	)	)	PUNCT
ap-900	98	18	with	with	ADP
ap-900	98	19	the	the	DET
ap-900	98	20	erbium	erbium	NOUN
ap-900	98	21	doped	dope	VERB
ap-900	98	22	gan	gan	PROPN
ap-900	98	23	layers	layer	NOUN
ap-900	98	24	co	co	VERB
ap-900	98	25	-	-	VERB
ap-900	98	26	doped	dope	VERB
ap-900	98	27	by	by	ADP
ap-900	98	28	yb3	yb3	NOUN
ap-900	98	29	+	+	NUM
ap-900	98	30	ions	ion	NOUN
ap-900	98	31	,	,	PUNCT
ap-900	98	32	probably	probably	ADV
ap-900	98	33	because	because	SCONJ
ap-900	98	34	the	the	DET
ap-900	98	35	absorption	absorption	NOUN
ap-900	98	36	coefficients	coefficient	VERB
ap-900	98	37	for	for	ADP
ap-900	98	38	ytterbium	ytterbium	NOUN
ap-900	98	39	ions	ion	NOUN
ap-900	98	40	are	be	AUX
ap-900	98	41	very	very	ADV
ap-900	98	42	low	low	ADJ
ap-900	98	43	and/or	and/or	CCONJ
ap-900	98	44	the	the	DET
ap-900	98	45	deposited	deposited	ADJ
ap-900	98	46	layers	layer	NOUN
ap-900	98	47	are	be	AUX
ap-900	98	48	rather	rather	ADV
ap-900	98	49	thin	thin	ADJ
ap-900	98	50	.	.	PUNCT
ap-900	99	1	the	the	DET
ap-900	99	2	photoluminescence	photoluminescence	NOUN
ap-900	99	3	spectrum	spectrum	NOUN
ap-900	99	4	of	of	ADP
ap-900	99	5	the	the	DET
ap-900	99	6	er3	er3	PROPN
ap-900	99	7	+	+	CCONJ
ap-900	99	8	doped	dope	VERB
ap-900	99	9	gan	gan	PROPN
ap-900	99	10	layers	layer	NOUN
ap-900	99	11	fabricated	fabricate	VERB
ap-900	99	12	using	use	VERB
ap-900	99	13	a	a	DET
ap-900	99	14	ga	ga	NOUN
ap-900	99	15	target	target	NOUN
ap-900	99	16	excited	excite	VERB
ap-900	99	17	at	at	ADP
ap-900	99	18	�	�	PROPN
ap-900	99	19	ex	ex	X
ap-900	99	20	�	�	PROPN
ap-900	99	21	514.5	514.5	NUM
ap-900	99	22	nm	nm	NOUN
ap-900	99	23	at	at	ADP
ap-900	99	24	a	a	DET
ap-900	99	25	temperature	temperature	NOUN
ap-900	99	26	of	of	ADP
ap-900	99	27	4	4	NUM
ap-900	99	28	k	k	NOUN
ap-900	99	29	is	be	AUX
ap-900	99	30	given	give	VERB
ap-900	99	31	in	in	ADP
ap-900	99	32	fig	fig	NOUN
ap-900	99	33	.	.	PUNCT
ap-900	100	1	5	5	X
ap-900	100	2	.	.	PUNCT
ap-900	100	3	the	the	DET
ap-900	100	4	figure	figure	NOUN
ap-900	100	5	shows	show	VERB
ap-900	100	6	typical	typical	ADJ
ap-900	100	7	photoluminescence	photoluminescence	NOUN
ap-900	100	8	bands	band	NOUN
ap-900	100	9	attributed	attribute	VERB
ap-900	100	10	to	to	ADP
ap-900	100	11	the	the	DET
ap-900	100	12	erbium	erbium	NOUN
ap-900	100	13	transition	transition	NOUN
ap-900	100	14	4i13/2	4i13/2	PROPN
ap-900	100	15	�	�	PROPN
ap-900	100	16	4i15/2	4i15/2	PROPN
ap-900	100	17	.	.	PUNCT
ap-900	101	1	we	we	PRON
ap-900	101	2	obtained	obtain	VERB
ap-900	101	3	the	the	DET
ap-900	101	4	best	good	ADJ
ap-900	101	5	result	result	NOUN
ap-900	101	6	for	for	ADP
ap-900	101	7	the	the	DET
ap-900	101	8	gan	gan	PROPN
ap-900	101	9	sample	sample	NOUN
ap-900	101	10	containing	contain	VERB
ap-900	101	11	about	about	ADV
ap-900	101	12	2.83	2.83	NUM
ap-900	101	13	at	at	ADP
ap-900	101	14	%	%	NOUN
ap-900	101	15	of	of	ADP
ap-900	101	16	erbium	erbium	NOUN
ap-900	101	17	.	.	PUNCT
ap-900	102	1	fig	fig	NOUN
ap-900	102	2	.	.	PUNCT
ap-900	103	1	6	6	NUM
ap-900	103	2	shows	show	VERB
ap-900	103	3	the	the	DET
ap-900	103	4	photoluminescence	photoluminescence	NOUN
ap-900	103	5	spectra	spectra	NOUN
ap-900	103	6	of	of	ADP
ap-900	103	7	a	a	DET
ap-900	103	8	gan	gan	ADJ
ap-900	103	9	layer	layer	NOUN
ap-900	103	10	doped	dope	VERB
ap-900	103	11	by	by	ADP
ap-900	103	12	er3	er3	PROPN
ap-900	103	13	+	+	CCONJ
ap-900	103	14	fabricated	fabricate	VERB
ap-900	103	15	using	use	VERB
ap-900	103	16	the	the	DET
ap-900	103	17	ga2o3	ga2o3	PROPN
ap-900	103	18	target	target	NOUN
ap-900	103	19	and	and	CCONJ
ap-900	103	20	er2o3	er2o3	PROPN
ap-900	103	21	pellets	pellet	NOUN
ap-900	103	22	laid	lay	VERB
ap-900	103	23	on	on	ADP
ap-900	103	24	top	top	NOUN
ap-900	103	25	of	of	ADP
ap-900	103	26	the	the	DET
ap-900	103	27	target	target	NOUN
ap-900	103	28	,	,	PUNCT
ap-900	103	29	obtained	obtain	VERB
ap-900	103	30	by	by	ADP
ap-900	103	31	using	use	VERB
ap-900	103	32	optical	optical	ADJ
ap-900	103	33	pumping	pumping	NOUN
ap-900	103	34	at	at	ADP
ap-900	103	35	980	980	NUM
ap-900	103	36	nm	nm	NOUN
ap-900	103	37	at	at	ADP
ap-900	103	38	room	room	NOUN
ap-900	103	39	temperature	temperature	NOUN
ap-900	103	40	.	.	PUNCT
ap-900	104	1	fig.7	fig.7	ADJ
ap-900	104	2	shows	show	VERB
ap-900	104	3	the	the	DET
ap-900	104	4	1530	1530	NUM
ap-900	104	5	nm	nm	NOUN
ap-900	104	6	region	region	NOUN
ap-900	104	7	of	of	ADP
ap-900	104	8	the	the	DET
ap-900	104	9	photoluminescence	photoluminescence	NOUN
ap-900	104	10	spectra	spectra	NOUN
ap-900	104	11	of	of	ADP
ap-900	104	12	the	the	DET
ap-900	104	13	er3+/yb3	er3+/yb3	NOUN
ap-900	104	14	+	+	CCONJ
ap-900	104	15	containing	contain	VERB
ap-900	104	16	gan	gan	ADJ
ap-900	104	17	samples	sample	NOUN
ap-900	104	18	fabricated	fabricate	VERB
ap-900	104	19	by	by	ADP
ap-900	104	20	doping	dope	VERB
ap-900	104	21	from	from	ADP
ap-900	104	22	erbium	erbium	NOUN
ap-900	104	23	-	-	PUNCT
ap-900	104	24	ytterbium	ytterbium	NOUN
ap-900	104	25	powder	powder	NOUN
ap-900	104	26	put	put	VERB
ap-900	104	27	onto	onto	ADP
ap-900	104	28	a	a	DET
ap-900	104	29	ga2o3	ga2o3	PROPN
ap-900	104	30	target	target	NOUN
ap-900	104	31	,	,	PUNCT
ap-900	104	32	excited	excite	VERB
ap-900	104	33	by	by	ADP
ap-900	104	34	an	an	DET
ap-900	104	35	ar	ar	NOUN
ap-900	104	36	laser	laser	NOUN
ap-900	104	37	(	(	PUNCT
ap-900	104	38	�	�	PROPN
ap-900	104	39	ex	ex	X
ap-900	104	40	�	�	PROPN
ap-900	104	41	514.5	514.5	NUM
ap-900	104	42	nm	nm	PROPN
ap-900	104	43	,	,	PUNCT
ap-900	104	44	temperature	temperature	NOUN
ap-900	104	45	4	4	NUM
ap-900	104	46	k	k	NOUN
ap-900	104	47	)	)	PUNCT
ap-900	104	48	.	.	PUNCT
ap-900	105	1	the	the	DET
ap-900	105	2	typical	typical	ADJ
ap-900	105	3	photoluminescence	photoluminescence	NOUN
ap-900	105	4	bands	band	NOUN
ap-900	105	5	attributed	attribute	VERB
ap-900	105	6	to	to	ADP
ap-900	105	7	erbium	erbium	NOUN
ap-900	105	8	4i13/2	4i13/2	ADJ
ap-900	105	9	�	�	PROPN
ap-900	105	10	4i15/2	4i15/2	PROPN
ap-900	105	11	increased	increase	VERB
ap-900	105	12	in	in	ADP
ap-900	105	13	intensity	intensity	NOUN
ap-900	105	14	with	with	ADP
ap-900	105	15	increasing	increase	VERB
ap-900	105	16	ytterbium	ytterbium	NOUN
ap-900	105	17	content	content	NOUN
ap-900	105	18	(	(	PUNCT
ap-900	105	19	for	for	ADP
ap-900	105	20	details	detail	NOUN
ap-900	105	21	,	,	PUNCT
ap-900	105	22	see	see	VERB
ap-900	105	23	table	table	NOUN
ap-900	105	24	2	2	NUM
ap-900	105	25	)	)	PUNCT
ap-900	105	26	.	.	PUNCT
ap-900	106	1	the	the	DET
ap-900	106	2	best	good	ADJ
ap-900	106	3	results	result	NOUN
ap-900	106	4	were	be	AUX
ap-900	106	5	obtained	obtain	VERB
ap-900	106	6	when	when	SCONJ
ap-900	106	7	we	we	PRON
ap-900	106	8	laid	lay	VERB
ap-900	106	9	0.05	0.05	NUM
ap-900	106	10	g	g	NOUN
ap-900	106	11	of	of	ADP
ap-900	106	12	erbium	erbium	NOUN
ap-900	106	13	metallic	metallic	ADJ
ap-900	106	14	powder	powder	NOUN
ap-900	106	15	and	and	CCONJ
ap-900	106	16	1	1	NUM
ap-900	106	17	g	g	NOUN
ap-900	106	18	ytterbium	ytterbium	NOUN
ap-900	106	19	powder	powder	NOUN
ap-900	106	20	onto	onto	ADP
ap-900	106	21	the	the	DET
ap-900	106	22	target	target	NOUN
ap-900	106	23	.	.	PUNCT
ap-900	107	1	fig	fig	NOUN
ap-900	107	2	.	.	PUNCT
ap-900	108	1	8	8	NUM
ap-900	108	2	shows	show	VERB
ap-900	108	3	the	the	DET
ap-900	108	4	same	same	ADJ
ap-900	108	5	photoluminescence	photoluminescence	NOUN
ap-900	108	6	spectra	spectra	NOUN
ap-900	108	7	as	as	ADP
ap-900	108	8	fig	fig	NOUN
ap-900	108	9	.	.	PUNCT
ap-900	109	1	7	7	NUM
ap-900	109	2	,	,	PUNCT
ap-900	109	3	but	but	CCONJ
ap-900	109	4	now	now	ADV
ap-900	109	5	obtained	obtain	VERB
ap-900	109	6	by	by	ADP
ap-900	109	7	optical	optical	ADJ
ap-900	109	8	pumping	pumping	NOUN
ap-900	109	9	at	at	ADP
ap-900	109	10	980	980	NUM
ap-900	109	11	nm	nm	NOUN
ap-900	109	12	at	at	ADP
ap-900	109	13	room	room	NOUN
ap-900	109	14	temperature	temperature	NOUN
ap-900	109	15	,	,	PUNCT
ap-900	109	16	which	which	PRON
ap-900	109	17	indicates	indicate	VERB
ap-900	109	18	better	well	ADJ
ap-900	109	19	quality	quality	NOUN
ap-900	109	20	of	of	ADP
ap-900	109	21	the	the	DET
ap-900	109	22	samples	sample	NOUN
ap-900	109	23	.	.	PUNCT
ap-900	110	1	4	4	NUM
ap-900	110	2	conclusion	conclusion	NOUN
ap-900	110	3	two	two	NUM
ap-900	110	4	basic	basic	ADJ
ap-900	110	5	approaches	approach	NOUN
ap-900	110	6	for	for	ADP
ap-900	110	7	rf	rf	NOUN
ap-900	110	8	magnetron	magnetron	NOUN
ap-900	110	9	sputtering	sputtering	NOUN
ap-900	110	10	of	of	ADP
ap-900	110	11	gan	gan	PROPN
ap-900	110	12	thin	thin	ADJ
ap-900	110	13	films	film	NOUN
ap-900	110	14	have	have	AUX
ap-900	110	15	been	be	AUX
ap-900	110	16	presented	present	VERB
ap-900	110	17	.	.	PUNCT
ap-900	111	1	the	the	DET
ap-900	111	2	first	first	ADJ
ap-900	111	3	one	one	NUM
ap-900	111	4	,	,	PUNCT
ap-900	111	5	utilizing	utilize	VERB
ap-900	111	6	a	a	DET
ap-900	111	7	metallic	metallic	ADJ
ap-900	111	8	gallium	gallium	NOUN
ap-900	111	9	target	target	NOUN
ap-900	111	10	,	,	PUNCT
ap-900	111	11	provides	provide	VERB
ap-900	111	12	deposition	deposition	NOUN
ap-900	111	13	of	of	ADP
ap-900	111	14	well	well	ADV
ap-900	111	15	-	-	PUNCT
ap-900	111	16	developed	develop	VERB
ap-900	111	17	©	©	PROPN
ap-900	111	18	czech	czech	PROPN
ap-900	111	19	technical	technical	PROPN
ap-900	111	20	university	university	PROPN
ap-900	111	21	publishing	publishing	NOUN
ap-900	111	22	house	house	NOUN
ap-900	111	23	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-900	111	24	53	53	NUM
ap-900	111	25	acta	acta	PROPN
ap-900	111	26	polytechnica	polytechnica	PROPN
ap-900	111	27	vol	vol	NOUN
ap-900	111	28	.	.	PUNCT
ap-900	112	1	46	46	NUM
ap-900	112	2	no	no	INTJ
ap-900	112	3	.	.	PUNCT
ap-900	113	1	6/2006	6/2006	NUM
ap-900	113	2	fig	fig	NOUN
ap-900	113	3	.	.	PUNCT
ap-900	114	1	7	7	NUM
ap-900	114	2	:	:	PUNCT
ap-900	114	3	pl	pl	X
ap-900	114	4	spectra	spectra	NOUN
ap-900	114	5	of	of	ADP
ap-900	114	6	er	er	INTJ
ap-900	114	7	/	/	SYM
ap-900	114	8	yb	yb	NOUN
ap-900	114	9	-	-	PUNCT
ap-900	114	10	doped	dope	VERB
ap-900	114	11	gan	gan	PROPN
ap-900	114	12	layers	layer	NOUN
ap-900	114	13	fabricated	fabricate	VERB
ap-900	114	14	by	by	ADP
ap-900	114	15	magnetron	magnetron	NOUN
ap-900	114	16	sputtering	sputtering	NOUN
ap-900	114	17	using	use	VERB
ap-900	114	18	erbium	erbium	NOUN
ap-900	114	19	and	and	CCONJ
ap-900	114	20	ytterbium	ytterbium	NOUN
ap-900	114	21	powder	powder	NOUN
ap-900	114	22	laid	lay	VERB
ap-900	114	23	onto	onto	ADP
ap-900	114	24	a	a	DET
ap-900	114	25	ga2o3	ga2o3	PROPN
ap-900	114	26	target	target	NOUN
ap-900	114	27	fig	fig	NOUN
ap-900	114	28	.	.	PUNCT
ap-900	115	1	8	8	NUM
ap-900	115	2	:	:	PUNCT
ap-900	115	3	pl	pl	X
ap-900	115	4	spectra	spectra	NOUN
ap-900	115	5	of	of	ADP
ap-900	115	6	er	er	INTJ
ap-900	115	7	/	/	SYM
ap-900	115	8	yb	yb	NOUN
ap-900	115	9	-	-	PUNCT
ap-900	115	10	doped	dope	VERB
ap-900	115	11	gan	gan	PROPN
ap-900	115	12	layers	layer	NOUN
ap-900	115	13	fabricated	fabricate	VERB
ap-900	115	14	by	by	ADP
ap-900	115	15	magnetron	magnetron	NOUN
ap-900	115	16	sputtering	sputtering	NOUN
ap-900	115	17	using	use	VERB
ap-900	115	18	erbium	erbium	NOUN
ap-900	115	19	and	and	CCONJ
ap-900	115	20	ytterbium	ytterbium	NOUN
ap-900	115	21	powder	powder	NOUN
ap-900	115	22	laid	lay	VERB
ap-900	115	23	onto	onto	ADP
ap-900	115	24	a	a	DET
ap-900	115	25	ga2o3	ga2o3	PROPN
ap-900	115	26	target	target	NOUN
ap-900	115	27	polycrystalline	polycrystalline	NOUN
ap-900	115	28	layers	layer	NOUN
ap-900	115	29	.	.	PUNCT
ap-900	116	1	the	the	DET
ap-900	116	2	second	second	ADJ
ap-900	116	3	,	,	PUNCT
ap-900	116	4	using	use	VERB
ap-900	116	5	a	a	DET
ap-900	116	6	gallium	gallium	NOUN
ap-900	116	7	oxide	oxide	NOUN
ap-900	116	8	target	target	NOUN
ap-900	116	9	,	,	PUNCT
ap-900	116	10	resulted	result	VERB
ap-900	116	11	in	in	ADP
ap-900	116	12	almost	almost	ADV
ap-900	116	13	amorphous	amorphous	ADJ
ap-900	116	14	gan	gan	ADJ
ap-900	116	15	films	film	NOUN
ap-900	116	16	with	with	ADP
ap-900	116	17	poorly	poorly	ADV
ap-900	116	18	developed	develop	VERB
ap-900	116	19	crystals	crystal	NOUN
ap-900	116	20	.	.	PUNCT
ap-900	117	1	the	the	DET
ap-900	117	2	er	er	INTJ
ap-900	117	3	/	/	SYM
ap-900	117	4	yb	yb	PROPN
ap-900	117	5	doped	dope	VERB
ap-900	117	6	gan	gan	PROPN
ap-900	117	7	samples	sample	NOUN
ap-900	117	8	exhibited	exhibit	VERB
ap-900	117	9	the	the	DET
ap-900	117	10	typical	typical	ADJ
ap-900	117	11	emission	emission	NOUN
ap-900	117	12	at	at	ADP
ap-900	117	13	1	1	NUM
ap-900	117	14	530	530	NUM
ap-900	117	15	nm	nm	NOUN
ap-900	117	16	due	due	ADP
ap-900	117	17	to	to	ADP
ap-900	117	18	the	the	DET
ap-900	117	19	er3	er3	NOUN
ap-900	117	20	+	+	CCONJ
ap-900	117	21	intra-4f	intra-4f	X
ap-900	117	22	4i13/2	4i13/2	ADJ
ap-900	117	23	�	�	PROPN
ap-900	117	24	4i15/2	4i15/2	PROPN
ap-900	117	25	transition	transition	NOUN
ap-900	117	26	even	even	ADV
ap-900	117	27	pumped	pump	VERB
ap-900	117	28	at	at	ADP
ap-900	117	29	980	980	NUM
ap-900	117	30	nm	nm	NOUN
ap-900	117	31	at	at	ADP
ap-900	117	32	room	room	NOUN
ap-900	117	33	temperature	temperature	NOUN
ap-900	117	34	.	.	PUNCT
ap-900	118	1	the	the	DET
ap-900	118	2	layers	layer	NOUN
ap-900	118	3	co	co	VERB
ap-900	118	4	-	-	VERB
ap-900	118	5	doped	dope	VERB
ap-900	118	6	with	with	ADP
ap-900	118	7	yb	yb	PROPN
ap-900	118	8	ions	ion	NOUN
ap-900	118	9	revealed	reveal	VERB
ap-900	118	10	increased	increase	VERB
ap-900	118	11	intensity	intensity	NOUN
ap-900	118	12	of	of	ADP
ap-900	118	13	luminescence	luminescence	NOUN
ap-900	118	14	.	.	PUNCT
ap-900	119	1	thus	thus	ADV
ap-900	119	2	the	the	DET
ap-900	119	3	possibility	possibility	NOUN
ap-900	119	4	of	of	ADP
ap-900	119	5	fabrication	fabrication	NOUN
ap-900	119	6	of	of	ADP
ap-900	119	7	erbium	erbium	NOUN
ap-900	119	8	and	and	CCONJ
ap-900	119	9	ytterbium	ytterbium	NOUN
ap-900	119	10	ions	ion	NOUN
ap-900	119	11	containing	contain	VERB
ap-900	119	12	gan	gan	NOUN
ap-900	119	13	films	film	NOUN
ap-900	119	14	by	by	ADP
ap-900	119	15	magnetron	magnetron	NOUN
ap-900	119	16	sputtering	sputtering	NOUN
ap-900	119	17	was	be	AUX
ap-900	119	18	demonstrated	demonstrate	VERB
ap-900	119	19	.	.	PUNCT
ap-900	120	1	acknowledgments	acknowledgment	NOUN
ap-900	120	2	our	our	PRON
ap-900	120	3	research	research	NOUN
ap-900	120	4	has	have	AUX
ap-900	120	5	been	be	AUX
ap-900	120	6	supported	support	VERB
ap-900	120	7	by	by	ADP
ap-900	120	8	the	the	DET
ap-900	120	9	grant	grant	PROPN
ap-900	120	10	agency	agency	NOUN
ap-900	120	11	of	of	ADP
ap-900	120	12	the	the	DET
ap-900	120	13	czech	czech	PROPN
ap-900	120	14	republic	republic	NOUN
ap-900	120	15	(	(	PUNCT
ap-900	120	16	grant	grant	VERB
ap-900	120	17	no	no	INTJ
ap-900	120	18	.	.	PROPN
ap-900	121	1	102/06/0424	102/06/0424	NUM
ap-900	121	2	)	)	PUNCT
ap-900	121	3	,	,	PUNCT
ap-900	121	4	by	by	ADP
ap-900	121	5	research	research	NOUN
ap-900	121	6	program	program	NOUN
ap-900	121	7	msm6840770014	msm6840770014	NOUN
ap-900	121	8	of	of	ADP
ap-900	121	9	the	the	DET
ap-900	121	10	czech	czech	PROPN
ap-900	121	11	technical	technical	PROPN
ap-900	121	12	university	university	PROPN
ap-900	121	13	in	in	ADP
ap-900	121	14	prague	prague	PROPN
ap-900	121	15	and	and	CCONJ
ap-900	121	16	by	by	ADP
ap-900	121	17	ministry	ministry	PROPN
ap-900	121	18	of	of	ADP
ap-900	121	19	education	education	PROPN
ap-900	121	20	,	,	PUNCT
ap-900	121	21	youth	youth	NOUN
ap-900	121	22	and	and	CCONJ
ap-900	121	23	sports	sport	NOUN
ap-900	121	24	of	of	ADP
ap-900	121	25	the	the	DET
ap-900	121	26	czech	czech	PROPN
ap-900	121	27	republic	republic	NOUN
ap-900	121	28	(	(	PUNCT
ap-900	121	29	grant	grant	VERB
ap-900	121	30	no	no	INTJ
ap-900	121	31	.	.	PUNCT
ap-900	122	1	lc6041	lc6041	PROPN
ap-900	122	2	)	)	PUNCT
ap-900	122	3	.	.	PUNCT
ap-900	123	1	we	we	PRON
ap-900	123	2	specially	specially	ADV
ap-900	123	3	thank	thank	VERB
ap-900	123	4	petr	petr	PROPN
ap-900	123	5	bak	bak	PROPN
ap-900	123	6	for	for	ADP
ap-900	123	7	technical	technical	ADJ
ap-900	123	8	support	support	NOUN
ap-900	123	9	and	and	CCONJ
ap-900	123	10	bohumír	bohumír	VERB
ap-900	123	11	dvořák	dvořák	NOUN
ap-900	123	12	for	for	ADP
ap-900	123	13	providing	provide	VERB
ap-900	123	14	the	the	DET
ap-900	123	15	er2o3	er2o3	PROPN
ap-900	123	16	and	and	CCONJ
ap-900	123	17	yb2o3	yb2o3	PROPN
ap-900	123	18	pellets	pellet	NOUN
ap-900	123	19	.	.	PUNCT
ap-900	124	1	references	reference	NOUN
ap-900	124	2	[	[	X
ap-900	124	3	1	1	NUM
ap-900	124	4	]	]	X
ap-900	124	5	morkoc	morkoc	VERB
ap-900	124	6	,	,	PUNCT
ap-900	124	7	h.	h.	PROPN
ap-900	124	8	,	,	PUNCT
ap-900	124	9	strite	strite	ADJ
ap-900	124	10	,	,	PUNCT
ap-900	124	11	s.	s.	PROPN
ap-900	124	12	,	,	PUNCT
ap-900	124	13	gao	gao	PROPN
ap-900	124	14	,	,	PUNCT
ap-900	124	15	g.	g.	PROPN
ap-900	124	16	b.	b.	PROPN
ap-900	124	17	,	,	PUNCT
ap-900	124	18	lin	lin	PROPN
ap-900	124	19	,	,	PUNCT
ap-900	124	20	m.	m.	PROPN
ap-900	124	21	e.	e.	PROPN
ap-900	124	22	,	,	PUNCT
ap-900	124	23	sverdlov	sverdlov	PROPN
ap-900	124	24	,	,	PUNCT
ap-900	124	25	b.	b.	PROPN
ap-900	124	26	,	,	PUNCT
ap-900	124	27	burns	burn	NOUN
ap-900	124	28	,	,	PUNCT
ap-900	124	29	m.	m.	NOUN
ap-900	124	30	:	:	PUNCT
ap-900	124	31	“	"	PUNCT
ap-900	124	32	large	large	ADJ
ap-900	124	33	-	-	PUNCT
ap-900	124	34	band	band	NOUN
ap-900	124	35	-	-	PUNCT
ap-900	124	36	gap	gap	NOUN
ap-900	124	37	sic	sic	ADJ
ap-900	124	38	,	,	PUNCT
ap-900	124	39	iii	iii	NOUN
ap-900	124	40	-	-	PUNCT
ap-900	124	41	v	v	NOUN
ap-900	124	42	nitride	nitride	NOUN
ap-900	124	43	,	,	PUNCT
ap-900	124	44	and	and	CCONJ
ap-900	124	45	ii	ii	PROPN
ap-900	124	46	-	-	PUNCT
ap-900	124	47	vi	vi	NOUN
ap-900	124	48	znse	znse	NOUN
ap-900	124	49	-	-	PUNCT
ap-900	124	50	based	base	VERB
ap-900	124	51	semiconductor	semiconductor	NOUN
ap-900	124	52	-	-	PUNCT
ap-900	124	53	device	device	NOUN
ap-900	124	54	technologies	technology	NOUN
ap-900	124	55	.	.	PUNCT
ap-900	124	56	”	"	PUNCT
ap-900	125	1	journal	journal	NOUN
ap-900	125	2	of	of	ADP
ap-900	125	3	applied	applied	ADJ
ap-900	125	4	physics	physics	NOUN
ap-900	125	5	,	,	PUNCT
ap-900	125	6	vol	vol	NOUN
ap-900	125	7	.	.	PROPN
ap-900	126	1	76	76	NUM
ap-900	126	2	(	(	PUNCT
ap-900	126	3	1994	1994	NUM
ap-900	126	4	)	)	PUNCT
ap-900	126	5	,	,	PUNCT
ap-900	127	1	no	no	INTJ
ap-900	127	2	.	.	NOUN
ap-900	127	3	3	3	NUM
ap-900	127	4	,	,	PUNCT
ap-900	127	5	p.	p.	NOUN
ap-900	127	6	1363–1398	1363–1398	NUM
ap-900	127	7	.	.	PUNCT
ap-900	128	1	[	[	X
ap-900	128	2	2	2	NUM
ap-900	128	3	]	]	PUNCT
ap-900	128	4	steckl	steckl	NOUN
ap-900	128	5	,	,	PUNCT
ap-900	128	6	a.	a.	PROPN
ap-900	128	7	j.	j.	PROPN
ap-900	128	8	,	,	PUNCT
ap-900	128	9	heikenfeld	heikenfeld	PROPN
ap-900	128	10	,	,	PUNCT
ap-900	128	11	j.	j.	PROPN
ap-900	128	12	c.	c.	PROPN
ap-900	128	13	,	,	PUNCT
ap-900	128	14	lee	lee	PROPN
ap-900	128	15	,	,	PUNCT
ap-900	128	16	d.	d.	PROPN
ap-900	128	17	s.	s.	PROPN
ap-900	128	18	,	,	PUNCT
ap-900	128	19	garter	garter	NOUN
ap-900	128	20	,	,	PUNCT
ap-900	128	21	m.	m.	NOUN
ap-900	128	22	j.	j.	PROPN
ap-900	128	23	,	,	PUNCT
ap-900	128	24	baker	baker	PROPN
ap-900	128	25	,	,	PUNCT
ap-900	128	26	c.	c.	PROPN
ap-900	128	27	c.	c.	PROPN
ap-900	128	28	,	,	PUNCT
ap-900	128	29	wang	wang	PROPN
ap-900	128	30	,	,	PUNCT
ap-900	128	31	y.	y.	PROPN
ap-900	128	32	q.	q.	PROPN
ap-900	128	33	,	,	PUNCT
ap-900	128	34	jones	jones	PROPN
ap-900	128	35	,	,	PUNCT
ap-900	128	36	r.	r.	PROPN
ap-900	128	37	:	:	PUNCT
ap-900	128	38	“	"	PUNCT
ap-900	128	39	rare	rare	ADJ
ap-900	128	40	-	-	PUNCT
ap-900	128	41	earth	earth	NOUN
ap-900	128	42	-	-	PUNCT
ap-900	128	43	doped	dope	VERB
ap-900	128	44	gan	gan	NOUN
ap-900	128	45	:	:	PUNCT
ap-900	128	46	growth	growth	NOUN
ap-900	128	47	,	,	PUNCT
ap-900	128	48	properties	property	NOUN
ap-900	128	49	,	,	PUNCT
ap-900	128	50	and	and	CCONJ
ap-900	128	51	fabrication	fabrication	NOUN
ap-900	128	52	of	of	ADP
ap-900	128	53	electroluminescent	electroluminescent	ADJ
ap-900	128	54	devices	device	NOUN
ap-900	128	55	.	.	PUNCT
ap-900	128	56	”	"	PUNCT
ap-900	128	57	ieee	ieee	PROPN
ap-900	128	58	journal	journal	NOUN
ap-900	128	59	of	of	ADP
ap-900	128	60	selected	select	VERB
ap-900	128	61	topics	topic	NOUN
ap-900	128	62	in	in	ADP
ap-900	128	63	quantum	quantum	ADJ
ap-900	128	64	electronics	electronic	NOUN
ap-900	128	65	,	,	PUNCT
ap-900	128	66	vol	vol	NOUN
ap-900	128	67	.	.	NOUN
ap-900	128	68	8	8	NUM
ap-900	128	69	(	(	PUNCT
ap-900	128	70	2002	2002	NUM
ap-900	128	71	)	)	PUNCT
ap-900	128	72	,	,	PUNCT
ap-900	128	73	no	no	INTJ
ap-900	128	74	.	.	NOUN
ap-900	128	75	4	4	NUM
ap-900	128	76	,	,	PUNCT
ap-900	128	77	p.	p.	NOUN
ap-900	128	78	749–766	749–766	NUM
ap-900	128	79	.	.	PUNCT
ap-900	129	1	[	[	X
ap-900	129	2	3	3	NUM
ap-900	129	3	]	]	X
ap-900	129	4	kik	kik	PROPN
ap-900	129	5	,	,	PUNCT
ap-900	129	6	p.	p.	NOUN
ap-900	129	7	g.	g.	PROPN
ap-900	129	8	,	,	PUNCT
ap-900	129	9	polman	polman	NOUN
ap-900	129	10	,	,	PUNCT
ap-900	129	11	a.	a.	NOUN
ap-900	129	12	:	:	PUNCT
ap-900	129	13	“	"	PUNCT
ap-900	129	14	erbium	erbium	NOUN
ap-900	129	15	doped	dope	VERB
ap-900	129	16	optical	optical	ADJ
ap-900	129	17	-	-	PUNCT
ap-900	129	18	waveguide	waveguide	NOUN
ap-900	129	19	amplifiers	amplifier	NOUN
ap-900	129	20	on	on	ADP
ap-900	129	21	silicon	silicon	NOUN
ap-900	129	22	.	.	PUNCT
ap-900	129	23	”	"	PUNCT
ap-900	130	1	mrs	mrs	PROPN
ap-900	130	2	bulletin	bulletin	PROPN
ap-900	130	3	,	,	PUNCT
ap-900	130	4	vol	vol	NOUN
ap-900	130	5	.	.	PROPN
ap-900	130	6	23	23	NUM
ap-900	130	7	(	(	PUNCT
ap-900	130	8	1998	1998	NUM
ap-900	130	9	)	)	PUNCT
ap-900	130	10	,	,	PUNCT
ap-900	130	11	no	no	INTJ
ap-900	130	12	.	.	NOUN
ap-900	130	13	4	4	NUM
ap-900	130	14	,	,	PUNCT
ap-900	130	15	p.	p.	NOUN
ap-900	130	16	48–54	48–54	NUM
ap-900	130	17	.	.	PUNCT
ap-900	131	1	[	[	X
ap-900	131	2	4	4	NUM
ap-900	131	3	]	]	X
ap-900	131	4	chryssou	chryssou	NOUN
ap-900	131	5	,	,	PUNCT
ap-900	131	6	c.e	c.e	PROPN
ap-900	131	7	.	.	PROPN
ap-900	131	8	–	–	PUNCT
ap-900	131	9	di	di	X
ap-900	131	10	pasquale	pasquale	PROPN
ap-900	131	11	,	,	PUNCT
ap-900	131	12	f.	f.	PROPN
ap-900	131	13	–	–	PUNCT
ap-900	131	14	pitt	pitt	PROPN
ap-900	131	15	,	,	PUNCT
ap-900	131	16	c.w	c.w	PROPN
ap-900	131	17	.	.	PROPN
ap-900	131	18	:	:	PUNCT
ap-900	131	19	“	"	PUNCT
ap-900	131	20	improved	improved	ADJ
ap-900	131	21	gain	gain	NOUN
ap-900	131	22	performance	performance	NOUN
ap-900	131	23	in	in	ADP
ap-900	131	24	yb3	yb3	ADJ
ap-900	131	25	+	+	VERB
ap-900	131	26	-sensitized	-sensitized	ADJ
ap-900	131	27	er3	er3	ADJ
ap-900	131	28	+	+	ADJ
ap-900	131	29	-doped	-doped	ADJ
ap-900	131	30	alumina	alumina	NOUN
ap-900	131	31	(	(	PUNCT
ap-900	131	32	al2o3	al2o3	NOUN
ap-900	131	33	)	)	PUNCT
ap-900	131	34	channel	channel	NOUN
ap-900	131	35	optical	optical	ADJ
ap-900	131	36	waveguide	waveguide	NOUN
ap-900	131	37	amplifiers	amplifier	NOUN
ap-900	131	38	.	.	PUNCT
ap-900	131	39	”	"	PUNCT
ap-900	132	1	journal	journal	NOUN
ap-900	132	2	of	of	ADP
ap-900	132	3	lightwave	lightwave	PROPN
ap-900	132	4	technology	technology	PROPN
ap-900	132	5	,	,	PUNCT
ap-900	132	6	vol	vol	NOUN
ap-900	132	7	.	.	PROPN
ap-900	132	8	19	19	NUM
ap-900	132	9	(	(	PUNCT
ap-900	132	10	2001	2001	NUM
ap-900	132	11	)	)	PUNCT
ap-900	132	12	,	,	PUNCT
ap-900	132	13	no	no	INTJ
ap-900	132	14	.	.	NOUN
ap-900	132	15	3	3	NUM
ap-900	132	16	,	,	PUNCT
ap-900	132	17	p.	p.	NOUN
ap-900	132	18	345–349	345–349	NUM
ap-900	132	19	.	.	PUNCT
ap-900	133	1	[	[	X
ap-900	133	2	5	5	NUM
ap-900	133	3	]	]	X
ap-900	133	4	hubner	hubner	NOUN
ap-900	133	5	,	,	PUNCT
ap-900	133	6	j.	j.	PROPN
ap-900	133	7	,	,	PUNCT
ap-900	133	8	guldberg	guldberg	PROPN
ap-900	133	9	-	-	PUNCT
ap-900	133	10	kjaer	kjaer	PROPN
ap-900	133	11	,	,	PUNCT
ap-900	133	12	s.	s.	PROPN
ap-900	133	13	,	,	PUNCT
ap-900	133	14	dyngaard	dyngaard	NOUN
ap-900	133	15	,	,	PUNCT
ap-900	133	16	m.	m.	NOUN
ap-900	133	17	,	,	PUNCT
ap-900	133	18	shen	shen	PROPN
ap-900	133	19	,	,	PUNCT
ap-900	133	20	y.	y.	PROPN
ap-900	133	21	,	,	PUNCT
ap-900	133	22	thomsen	thomsen	PROPN
ap-900	133	23	,	,	PUNCT
ap-900	133	24	c.	c.	PROPN
ap-900	133	25	l.	l.	PROPN
ap-900	133	26	,	,	PUNCT
ap-900	133	27	balslev	balslev	PROPN
ap-900	133	28	,	,	PUNCT
ap-900	133	29	s.	s.	PROPN
ap-900	133	30	,	,	PUNCT
ap-900	133	31	jensen	jensen	PROPN
ap-900	133	32	,	,	PUNCT
ap-900	133	33	c.	c.	PROPN
ap-900	133	34	,	,	PUNCT
ap-900	133	35	zauner	zauner	NOUN
ap-900	133	36	,	,	PUNCT
ap-900	133	37	d.	d.	PROPN
ap-900	133	38	,	,	PUNCT
ap-900	133	39	feuchter	feuchter	NOUN
ap-900	133	40	,	,	PUNCT
ap-900	133	41	t.	t.	PROPN
ap-900	133	42	:	:	PUNCT
ap-900	133	43	“	"	PUNCT
ap-900	133	44	planar	planar	VERB
ap-900	133	45	erand	erand	NOUN
ap-900	133	46	yb	yb	ADJ
ap-900	133	47	-	-	PUNCT
ap-900	133	48	doped	dope	VERB
ap-900	133	49	amplifiers	amplifier	NOUN
ap-900	133	50	and	and	CCONJ
ap-900	133	51	lasers	laser	NOUN
ap-900	133	52	.	.	PUNCT
ap-900	133	53	”	"	PUNCT
ap-900	133	54	applied	apply	VERB
ap-900	133	55	physics	physics	PROPN
ap-900	133	56	b	b	PROPN
ap-900	133	57	-	-	PUNCT
ap-900	133	58	lasers	laser	NOUN
ap-900	133	59	and	and	CCONJ
ap-900	133	60	optics	optic	NOUN
ap-900	133	61	,	,	PUNCT
ap-900	133	62	vol	vol	NOUN
ap-900	133	63	.	.	PUNCT
ap-900	134	1	73	73	NUM
ap-900	134	2	(	(	PUNCT
ap-900	134	3	2001	2001	NUM
ap-900	134	4	)	)	PUNCT
ap-900	134	5	,	,	PUNCT
ap-900	134	6	no	no	INTJ
ap-900	134	7	.	.	PUNCT
ap-900	135	1	5–6	5–6	NUM
ap-900	135	2	,	,	PUNCT
ap-900	135	3	p.	p.	NOUN
ap-900	136	1	435–438	435–438	NUM
ap-900	136	2	.	.	PUNCT
ap-900	137	1	[	[	X
ap-900	137	2	6	6	NUM
ap-900	137	3	]	]	X
ap-900	137	4	favennec	favennec	PROPN
ap-900	137	5	,	,	PUNCT
ap-900	137	6	p.	p.	NOUN
ap-900	137	7	n.	n.	NOUN
ap-900	137	8	,	,	PUNCT
ap-900	137	9	lharidon	lharidon	PROPN
ap-900	137	10	,	,	PUNCT
ap-900	137	11	h.	h.	PROPN
ap-900	137	12	,	,	PUNCT
ap-900	137	13	salvi	salvi	PROPN
ap-900	137	14	,	,	PUNCT
ap-900	137	15	m.	m.	NOUN
ap-900	137	16	,	,	PUNCT
ap-900	137	17	moutonnet	moutonnet	PROPN
ap-900	137	18	,	,	PUNCT
ap-900	137	19	d.	d.	PROPN
ap-900	137	20	,	,	PUNCT
ap-900	137	21	leguillou	leguillou	PROPN
ap-900	137	22	,	,	PUNCT
ap-900	137	23	y.	y.	PROPN
ap-900	137	24	:	:	PUNCT
ap-900	137	25	“	"	PUNCT
ap-900	137	26	luminescence	luminescence	NOUN
ap-900	137	27	of	of	ADP
ap-900	137	28	erbium	erbium	NOUN
ap-900	137	29	implanted	implant	VERB
ap-900	137	30	in	in	ADP
ap-900	137	31	various	various	ADJ
ap-900	137	32	semiconductors	semiconductor	NOUN
ap-900	137	33	–	–	PUNCT
ap-900	137	34	iv	iv	NOUN
ap-900	137	35	-	-	PUNCT
ap-900	137	36	materials	material	NOUN
ap-900	137	37	,	,	PUNCT
ap-900	137	38	iii	iii	NOUN
ap-900	137	39	-	-	PUNCT
ap-900	137	40	v	v	NOUN
ap-900	137	41	-	-	PUNCT
ap-900	137	42	materials	material	NOUN
ap-900	137	43	and	and	CCONJ
ap-900	137	44	ii	ii	NOUN
ap-900	137	45	-	-	PUNCT
ap-900	137	46	vi	vi	NOUN
ap-900	137	47	materials	material	NOUN
ap-900	137	48	.	.	PUNCT
ap-900	137	49	”	"	PUNCT
ap-900	137	50	electronics	electronic	NOUN
ap-900	137	51	letters	letter	NOUN
ap-900	137	52	,	,	PUNCT
ap-900	137	53	vol	vol	NOUN
ap-900	137	54	.	.	PROPN
ap-900	137	55	25	25	NUM
ap-900	137	56	(	(	PUNCT
ap-900	137	57	1989	1989	NUM
ap-900	137	58	)	)	PUNCT
ap-900	137	59	,	,	PUNCT
ap-900	137	60	no	no	INTJ
ap-900	137	61	.	.	NOUN
ap-900	137	62	11	11	NUM
ap-900	137	63	,	,	PUNCT
ap-900	137	64	p.	p.	NOUN
ap-900	137	65	718–719	718–719	NUM
ap-900	137	66	.	.	PUNCT
ap-900	138	1	[	[	X
ap-900	138	2	7	7	NUM
ap-900	138	3	]	]	X
ap-900	138	4	amano	amano	PROPN
ap-900	138	5	,	,	PUNCT
ap-900	138	6	h.	h.	PROPN
ap-900	138	7	,	,	PUNCT
ap-900	138	8	sawaki	sawaki	PROPN
ap-900	138	9	,	,	PUNCT
ap-900	138	10	n.	n.	NOUN
ap-900	138	11	,	,	PUNCT
ap-900	138	12	akasai	akasai	PROPN
ap-900	138	13	,	,	PUNCT
ap-900	138	14	i.	i.	PROPN
ap-900	138	15	,	,	PUNCT
ap-900	138	16	toyoda	toyoda	PROPN
ap-900	138	17	,	,	PUNCT
ap-900	138	18	y.	y.	PROPN
ap-900	138	19	:	:	PUNCT
ap-900	138	20	“	"	PUNCT
ap-900	138	21	metalorganic	metalorganic	ADJ
ap-900	138	22	vapor	vapor	NOUN
ap-900	138	23	-	-	PUNCT
ap-900	138	24	phase	phase	NOUN
ap-900	138	25	epitaxial	epitaxial	NOUN
ap-900	138	26	-	-	PUNCT
ap-900	138	27	growth	growth	NOUN
ap-900	138	28	of	of	ADP
ap-900	138	29	high	high	ADJ
ap-900	138	30	-	-	PUNCT
ap-900	138	31	quality	quality	NOUN
ap-900	138	32	gan	gan	NOUN
ap-900	138	33	film	film	NOUN
ap-900	138	34	using	use	VERB
ap-900	138	35	an	an	DET
ap-900	138	36	aln	aln	NOUN
ap-900	138	37	buffer	buffer	NOUN
ap-900	138	38	layer	layer	NOUN
ap-900	138	39	.	.	PUNCT
ap-900	138	40	”	"	PUNCT
ap-900	138	41	applied	apply	VERB
ap-900	138	42	physics	physics	NOUN
ap-900	138	43	letters	letter	NOUN
ap-900	138	44	,	,	PUNCT
ap-900	138	45	vol	vol	NOUN
ap-900	138	46	.	.	PUNCT
ap-900	138	47	48	48	NUM
ap-900	138	48	(	(	PUNCT
ap-900	138	49	1986	1986	NUM
ap-900	138	50	)	)	PUNCT
ap-900	138	51	,	,	PUNCT
ap-900	138	52	no	no	INTJ
ap-900	138	53	.	.	NOUN
ap-900	138	54	5	5	NUM
ap-900	138	55	,	,	PUNCT
ap-900	138	56	p.	p.	NOUN
ap-900	138	57	353–355	353–355	NUM
ap-900	138	58	.	.	PUNCT
ap-900	139	1	[	[	X
ap-900	139	2	8	8	NUM
ap-900	139	3	]	]	X
ap-900	139	4	doppalapudi	doppalapudi	PROPN
ap-900	139	5	,	,	PUNCT
ap-900	139	6	d.	d.	PROPN
ap-900	139	7	,	,	PUNCT
ap-900	139	8	iliopoulos	iliopoulos	PROPN
ap-900	139	9	,	,	PUNCT
ap-900	139	10	e.	e.	PROPN
ap-900	139	11	,	,	PUNCT
ap-900	139	12	basu	basu	PROPN
ap-900	139	13	,	,	PUNCT
ap-900	139	14	s.	s.	PROPN
ap-900	139	15	n.	n.	PROPN
ap-900	139	16	,	,	PUNCT
ap-900	139	17	moustakas	moustakas	PROPN
ap-900	139	18	t.	t.	PROPN
ap-900	139	19	d.	d.	PROPN
ap-900	139	20	:	:	PUNCT
ap-900	139	21	“	"	PUNCT
ap-900	139	22	epitaxial	epitaxial	ADJ
ap-900	139	23	growth	growth	NOUN
ap-900	139	24	of	of	ADP
ap-900	139	25	gallium	gallium	NOUN
ap-900	139	26	nitride	nitride	ADJ
ap-900	139	27	thin	thin	ADJ
ap-900	139	28	films	film	NOUN
ap-900	139	29	on	on	ADP
ap-900	139	30	a	a	DET
ap-900	139	31	-	-	PUNCT
ap-900	139	32	plane	plane	NOUN
ap-900	139	33	sapphire	sapphire	NOUN
ap-900	139	34	by	by	ADP
ap-900	139	35	molecular	molecular	ADJ
ap-900	139	36	beam	beam	NOUN
ap-900	139	37	epitaxy	epitaxy	PROPN
ap-900	139	38	.	.	PUNCT
ap-900	139	39	”	"	PUNCT
ap-900	139	40	journal	journal	NOUN
ap-900	139	41	of	of	ADP
ap-900	139	42	applied	applied	ADJ
ap-900	139	43	physics	physics	NOUN
ap-900	139	44	,	,	PUNCT
ap-900	139	45	vol	vol	NOUN
ap-900	139	46	.	.	PROPN
ap-900	139	47	85	85	NUM
ap-900	139	48	(	(	PUNCT
ap-900	139	49	1999	1999	NUM
ap-900	139	50	)	)	PUNCT
ap-900	139	51	,	,	PUNCT
ap-900	139	52	no	no	INTJ
ap-900	139	53	.	.	NOUN
ap-900	139	54	7	7	NUM
ap-900	139	55	,	,	PUNCT
ap-900	139	56	p.	p.	NOUN
ap-900	139	57	3582–3589	3582–3589	NUM
ap-900	139	58	.	.	PUNCT
ap-900	140	1	[	[	X
ap-900	140	2	9	9	NUM
ap-900	140	3	]	]	SYM
ap-900	140	4	molnar	molnar	PROPN
ap-900	140	5	,	,	PUNCT
ap-900	140	6	r.	r.	PROPN
ap-900	140	7	j.	j.	PROPN
ap-900	140	8	,	,	PUNCT
ap-900	140	9	gotz	gotz	PROPN
ap-900	140	10	,	,	PUNCT
ap-900	140	11	w.	w.	PROPN
ap-900	140	12	,	,	PUNCT
ap-900	140	13	romano	romano	NOUN
ap-900	140	14	,	,	PUNCT
ap-900	140	15	l.	l.	PROPN
ap-900	140	16	t.	t.	PROPN
ap-900	140	17	,	,	PUNCT
ap-900	140	18	johnson	johnson	PROPN
ap-900	140	19	,	,	PUNCT
ap-900	140	20	m.	m.	NOUN
ap-900	140	21	n.	n.	PROPN
ap-900	140	22	:	:	PUNCT
ap-900	140	23	“	"	PUNCT
ap-900	140	24	growth	growth	NOUN
ap-900	140	25	of	of	ADP
ap-900	140	26	gallium	gallium	NOUN
ap-900	140	27	nitride	nitride	NOUN
ap-900	140	28	by	by	ADP
ap-900	140	29	hydride	hydride	NOUN
ap-900	140	30	vapor	vapor	NOUN
ap-900	140	31	-	-	PUNCT
ap-900	140	32	phase	phase	NOUN
ap-900	140	33	epitaxy	epitaxy	NOUN
ap-900	140	34	.	.	PUNCT
ap-900	140	35	”	"	PUNCT
ap-900	140	36	journal	journal	PROPN
ap-900	140	37	of	of	ADP
ap-900	140	38	crystal	crystal	NOUN
ap-900	140	39	growth	growth	NOUN
ap-900	140	40	,	,	PUNCT
ap-900	140	41	vol	vol	NOUN
ap-900	140	42	.	.	PROPN
ap-900	140	43	178	178	NUM
ap-900	140	44	(	(	PUNCT
ap-900	140	45	1997	1997	NUM
ap-900	140	46	)	)	PUNCT
ap-900	140	47	,	,	PUNCT
ap-900	140	48	no	no	INTJ
ap-900	140	49	.	.	PUNCT
ap-900	141	1	1–2	1–2	NUM
ap-900	141	2	,	,	PUNCT
ap-900	141	3	p.	p.	NOUN
ap-900	141	4	147–156	147–156	NUM
ap-900	141	5	.	.	PUNCT
ap-900	142	1	[	[	X
ap-900	142	2	10	10	NUM
ap-900	142	3	]	]	X
ap-900	142	4	klemenz	klemenz	PROPN
ap-900	142	5	,	,	PUNCT
ap-900	142	6	c.	c.	PROPN
ap-900	142	7	,	,	PUNCT
ap-900	142	8	scheel	scheel	PROPN
ap-900	142	9	,	,	PUNCT
ap-900	142	10	h.	h.	PROPN
ap-900	142	11	j.	j.	PROPN
ap-900	142	12	:	:	PUNCT
ap-900	142	13	“	"	PUNCT
ap-900	142	14	crystal	crystal	NOUN
ap-900	142	15	growth	growth	NOUN
ap-900	142	16	and	and	CCONJ
ap-900	142	17	liquid	liquid	ADJ
ap-900	142	18	-	-	PUNCT
ap-900	142	19	phase	phase	NOUN
ap-900	142	20	epitaxy	epitaxy	NOUN
ap-900	142	21	of	of	ADP
ap-900	142	22	gallium	gallium	NOUN
ap-900	142	23	nitride	nitride	NOUN
ap-900	142	24	.	.	PUNCT
ap-900	142	25	”	"	PUNCT
ap-900	142	26	journal	journal	NOUN
ap-900	142	27	of	of	ADP
ap-900	142	28	crystal	crystal	NOUN
ap-900	142	29	growth	growth	NOUN
ap-900	142	30	,	,	PUNCT
ap-900	142	31	vol	vol	NOUN
ap-900	142	32	.	.	PROPN
ap-900	142	33	211	211	NUM
ap-900	142	34	(	(	PUNCT
ap-900	142	35	2000	2000	NUM
ap-900	142	36	)	)	PUNCT
ap-900	142	37	,	,	PUNCT
ap-900	142	38	no	no	INTJ
ap-900	142	39	.	.	PUNCT
ap-900	143	1	1–4	1–4	NUM
ap-900	143	2	,	,	PUNCT
ap-900	143	3	p.	p.	PROPN
ap-900	143	4	62–67	62–67	NUM
ap-900	143	5	.	.	PUNCT
ap-900	144	1	[	[	X
ap-900	144	2	11	11	NUM
ap-900	144	3	]	]	PUNCT
ap-900	144	4	song	song	NOUN
ap-900	144	5	,	,	PUNCT
ap-900	144	6	s.	s.	PROPN
ap-900	144	7	f.	f.	PROPN
ap-900	144	8	,	,	PUNCT
ap-900	144	9	chen	chen	PROPN
ap-900	144	10	,	,	PUNCT
ap-900	144	11	w.	w.	PROPN
ap-900	144	12	d.	d.	PROPN
ap-900	144	13	,	,	PUNCT
ap-900	144	14	zhu	zhu	PROPN
ap-900	144	15	,	,	PUNCT
ap-900	144	16	j.	j.	PROPN
ap-900	144	17	j.	j.	PROPN
ap-900	144	18	,	,	PUNCT
ap-900	144	19	hsu	hsu	PROPN
ap-900	144	20	,	,	PUNCT
ap-900	144	21	c.	c.	PROPN
ap-900	144	22	c.	c.	PROPN
ap-900	144	23	:	:	PUNCT
ap-900	144	24	“	"	PUNCT
ap-900	144	25	dependence	dependence	NOUN
ap-900	144	26	of	of	ADP
ap-900	144	27	implantation	implantation	NOUN
ap-900	144	28	-	-	PUNCT
ap-900	144	29	induced	induce	VERB
ap-900	144	30	damage	damage	NOUN
ap-900	144	31	with	with	ADP
ap-900	144	32	photoluminescence	photoluminescence	NOUN
ap-900	144	33	intensity	intensity	NOUN
ap-900	144	34	in	in	ADP
ap-900	144	35	gan	gan	PROPN
ap-900	144	36	:	:	PUNCT
ap-900	144	37	er	er	INTJ
ap-900	144	38	.	.	PUNCT
ap-900	144	39	”	"	PUNCT
ap-900	144	40	journal	journal	PROPN
ap-900	144	41	of	of	ADP
ap-900	144	42	crystal	crystal	NOUN
ap-900	144	43	growth	growth	NOUN
ap-900	144	44	,	,	PUNCT
ap-900	144	45	vol	vol	NOUN
ap-900	144	46	.	.	PROPN
ap-900	144	47	265	265	NUM
ap-900	144	48	(	(	PUNCT
ap-900	144	49	2004	2004	NUM
ap-900	144	50	)	)	PUNCT
ap-900	144	51	,	,	PUNCT
ap-900	144	52	no	no	INTJ
ap-900	144	53	.	.	PUNCT
ap-900	145	1	1–2	1–2	NUM
ap-900	145	2	,	,	PUNCT
ap-900	145	3	p.	p.	NOUN
ap-900	145	4	78–82	78–82	NUM
ap-900	145	5	.	.	PUNCT
ap-900	146	1	[	[	X
ap-900	146	2	12	12	NUM
ap-900	146	3	]	]	X
ap-900	146	4	chen	chen	PROPN
ap-900	146	5	,	,	PUNCT
ap-900	146	6	w.	w.	PROPN
ap-900	146	7	d.	d.	PROPN
ap-900	146	8	,	,	PUNCT
ap-900	146	9	song	song	PROPN
ap-900	146	10	,	,	PUNCT
ap-900	146	11	s.	s.	PROPN
ap-900	146	12	f.	f.	PROPN
ap-900	146	13	,	,	PUNCT
ap-900	146	14	zhu	zhu	PROPN
ap-900	146	15	,	,	PUNCT
ap-900	146	16	j.	j.	PROPN
ap-900	146	17	j.	j.	PROPN
ap-900	146	18	,	,	PUNCT
ap-900	146	19	wang	wang	PROPN
ap-900	146	20	,	,	PUNCT
ap-900	146	21	x.	x.	PROPN
ap-900	146	22	l.	l.	PROPN
ap-900	146	23	,	,	PUNCT
ap-900	146	24	chen	chen	PROPN
ap-900	146	25	,	,	PUNCT
ap-900	146	26	c.	c.	PROPN
ap-900	146	27	y.	y.	PROPN
ap-900	146	28	,	,	PUNCT
ap-900	146	29	hsu	hsu	PROPN
ap-900	146	30	c.	c.	PROPN
ap-900	146	31	c.	c.	PROPN
ap-900	146	32	:	:	PUNCT
ap-900	146	33	“	"	PUNCT
ap-900	146	34	study	study	NOUN
ap-900	146	35	of	of	ADP
ap-900	146	36	infrared	infrared	ADJ
ap-900	146	37	luminescence	luminescence	NOUN
ap-900	146	38	from	from	ADP
ap-900	146	39	er	er	ADV
ap-900	146	40	-	-	PUNCT
ap-900	146	41	implanted	implant	VERB
ap-900	146	42	gan	gan	PROPN
ap-900	146	43	films	film	NOUN
ap-900	146	44	.	.	PUNCT
ap-900	146	45	”	"	PUNCT
ap-900	146	46	journal	journal	NOUN
ap-900	146	47	of	of	ADP
ap-900	146	48	crystal	crystal	NOUN
ap-900	146	49	growth	growth	NOUN
ap-900	146	50	,	,	PUNCT
ap-900	146	51	vol	vol	NOUN
ap-900	146	52	.	.	PROPN
ap-900	146	53	268	268	NUM
ap-900	146	54	(	(	PUNCT
ap-900	146	55	2004	2004	NUM
ap-900	146	56	)	)	PUNCT
ap-900	146	57	,	,	PUNCT
ap-900	146	58	no	no	INTJ
ap-900	146	59	.	.	PUNCT
ap-900	147	1	3–4	3–4	NUM
ap-900	147	2	,	,	PUNCT
ap-900	147	3	p.	p.	NOUN
ap-900	147	4	466–469	466–469	NUM
ap-900	147	5	.	.	PUNCT
ap-900	148	1	[	[	X
ap-900	148	2	13	13	NUM
ap-900	148	3	]	]	X
ap-900	148	4	hommerich	hommerich	NOUN
ap-900	148	5	,	,	PUNCT
ap-900	148	6	u.	u.	PROPN
ap-900	148	7	,	,	PUNCT
ap-900	148	8	nyein	nyein	PROPN
ap-900	148	9	,	,	PUNCT
ap-900	148	10	e.	e.	PROPN
ap-900	148	11	e.	e.	PROPN
ap-900	148	12	,	,	PUNCT
ap-900	148	13	lee	lee	PROPN
ap-900	148	14	,	,	PUNCT
ap-900	148	15	d.	d.	PROPN
ap-900	148	16	s.	s.	PROPN
ap-900	148	17	,	,	PUNCT
ap-900	148	18	heikenfeld	heikenfeld	PROPN
ap-900	148	19	,	,	PUNCT
ap-900	148	20	j.	j.	PROPN
ap-900	148	21	,	,	PUNCT
ap-900	148	22	steckl	steckl	NOUN
ap-900	148	23	,	,	PUNCT
ap-900	148	24	a.	a.	PROPN
ap-900	148	25	j.	j.	PROPN
ap-900	148	26	,	,	PUNCT
ap-900	148	27	zavada	zavada	PROPN
ap-900	148	28	,	,	PUNCT
ap-900	148	29	j.	j.	PROPN
ap-900	148	30	m.	m.	PROPN
ap-900	148	31	:	:	PUNCT
ap-900	148	32	“	"	PUNCT
ap-900	148	33	photoluminescence	photoluminescence	NOUN
ap-900	148	34	studies	study	NOUN
ap-900	148	35	of	of	ADP
ap-900	148	36	rare	rare	ADJ
ap-900	148	37	earth	earth	NOUN
ap-900	148	38	(	(	PUNCT
ap-900	148	39	er	er	INTJ
ap-900	148	40	,	,	PUNCT
ap-900	148	41	eu	eu	PROPN
ap-900	148	42	,	,	PUNCT
ap-900	148	43	tm	tm	NOUN
ap-900	148	44	)	)	PUNCT
ap-900	148	45	in	in	ADP
ap-900	148	46	situ	situ	ADJ
ap-900	148	47	doped	dope	VERB
ap-900	148	48	gan	gan	NOUN
ap-900	148	49	.	.	PUNCT
ap-900	148	50	”	"	PUNCT
ap-900	148	51	materials	material	NOUN
ap-900	148	52	science	science	NOUN
ap-900	148	53	and	and	CCONJ
ap-900	148	54	engineering	engineering	NOUN
ap-900	148	55	b	b	PROPN
ap-900	148	56	-	-	PUNCT
ap-900	148	57	solid	solid	ADJ
ap-900	148	58	state	state	NOUN
ap-900	148	59	materials	material	NOUN
ap-900	148	60	for	for	ADP
ap-900	148	61	advanced	advanced	ADJ
ap-900	148	62	technology	technology	NOUN
ap-900	148	63	,	,	PUNCT
ap-900	148	64	vol	vol	NOUN
ap-900	148	65	.	.	PROPN
ap-900	148	66	105	105	NUM
ap-900	148	67	(	(	PUNCT
ap-900	148	68	2003	2003	NUM
ap-900	148	69	)	)	PUNCT
ap-900	148	70	,	,	PUNCT
ap-900	148	71	no	no	INTJ
ap-900	148	72	.	.	PUNCT
ap-900	149	1	1–3	1–3	NUM
ap-900	149	2	,	,	PUNCT
ap-900	149	3	p.	p.	NOUN
ap-900	149	4	91–96	91–96	NUM
ap-900	149	5	.	.	PUNCT
ap-900	150	1	[	[	X
ap-900	150	2	14	14	NUM
ap-900	150	3	]	]	X
ap-900	150	4	hansen	hansen	PROPN
ap-900	150	5	,	,	PUNCT
ap-900	150	6	d.	d.	PROPN
ap-900	150	7	m.	m.	PROPN
ap-900	150	8	,	,	PUNCT
ap-900	150	9	zhang	zhang	PROPN
ap-900	150	10	,	,	PUNCT
ap-900	150	11	r.	r.	PROPN
ap-900	150	12	,	,	PUNCT
ap-900	150	13	perkins	perkins	PROPN
ap-900	150	14	,	,	PUNCT
ap-900	150	15	n.	n.	PROPN
ap-900	150	16	r.	r.	PROPN
ap-900	150	17	,	,	PUNCT
ap-900	150	18	safvi	safvi	PROPN
ap-900	150	19	,	,	PUNCT
ap-900	150	20	s.	s.	PROPN
ap-900	150	21	,	,	PUNCT
ap-900	150	22	zhang	zhang	PROPN
ap-900	150	23	,	,	PUNCT
ap-900	150	24	l.	l.	PROPN
ap-900	150	25	,	,	PUNCT
ap-900	150	26	bray	bray	PROPN
ap-900	150	27	,	,	PUNCT
ap-900	150	28	k.	k.	PROPN
ap-900	150	29	l.	l.	PROPN
ap-900	150	30	,	,	PUNCT
ap-900	150	31	kuech	kuech	PROPN
ap-900	150	32	,	,	PUNCT
ap-900	150	33	t.	t.	PROPN
ap-900	150	34	f.	f.	PROPN
ap-900	150	35	:	:	PUNCT
ap-900	150	36	“	"	PUNCT
ap-900	150	37	photoluminescence	photoluminescence	NOUN
ap-900	150	38	of	of	ADP
ap-900	150	39	erbium	erbium	NOUN
ap-900	150	40	-	-	PUNCT
ap-900	150	41	implanted	implant	VERB
ap-900	150	42	gan	gan	NOUN
ap-900	150	43	and	and	CCONJ
ap-900	150	44	in	in	ADP
ap-900	150	45	situ	situ	NOUN
ap-900	150	46	-	-	PUNCT
ap-900	150	47	doped	dope	VERB
ap-900	150	48	gan	gan	NOUN
ap-900	150	49	:	:	PUNCT
ap-900	150	50	er	er	INTJ
ap-900	150	51	.	.	PUNCT
ap-900	150	52	”	"	PUNCT
ap-900	150	53	applied	apply	VERB
ap-900	150	54	physics	physics	NOUN
ap-900	150	55	letters	letter	NOUN
ap-900	150	56	,	,	PUNCT
ap-900	150	57	vol	vol	NOUN
ap-900	150	58	.	.	PROPN
ap-900	150	59	72	72	NUM
ap-900	150	60	(	(	PUNCT
ap-900	150	61	1998	1998	NUM
ap-900	150	62	)	)	PUNCT
ap-900	150	63	,	,	PUNCT
ap-900	150	64	no	no	INTJ
ap-900	150	65	.	.	NOUN
ap-900	150	66	10	10	NUM
ap-900	150	67	,	,	PUNCT
ap-900	150	68	p.	p.	NOUN
ap-900	150	69	1244–1246	1244–1246	NUM
ap-900	150	70	.	.	PUNCT
ap-900	151	1	[	[	X
ap-900	151	2	15	15	NUM
ap-900	151	3	]	]	X
ap-900	151	4	yang	yang	PROPN
ap-900	151	5	,	,	PUNCT
ap-900	151	6	y.	y.	PROPN
ap-900	151	7	g.	g.	PROPN
ap-900	151	8	,	,	PUNCT
ap-900	151	9	ma	ma	PROPN
ap-900	151	10	,	,	PUNCT
ap-900	151	11	h.	h.	PROPN
ap-900	151	12	l.	l.	PROPN
ap-900	151	13	,	,	PUNCT
ap-900	151	14	xue	xue	PROPN
ap-900	151	15	,	,	PUNCT
ap-900	151	16	c.	c.	PROPN
ap-900	151	17	s.	s.	PROPN
ap-900	151	18	,	,	PUNCT
ap-900	151	19	hao	hao	PROPN
ap-900	151	20	,	,	PUNCT
ap-900	151	21	x.	x.	PROPN
ap-900	151	22	t.	t.	PROPN
ap-900	151	23	,	,	PUNCT
ap-900	151	24	zhuang	zhuang	PROPN
ap-900	151	25	,	,	PUNCT
ap-900	151	26	h.	h.	PROPN
ap-900	151	27	z.	z.	PROPN
ap-900	151	28	,	,	PUNCT
ap-900	151	29	ma	ma	PROPN
ap-900	151	30	,	,	PUNCT
ap-900	151	31	j.	j.	PROPN
ap-900	151	32	:	:	PUNCT
ap-900	151	33	“	"	PUNCT
ap-900	151	34	characterization	characterization	NOUN
ap-900	151	35	of	of	ADP
ap-900	151	36	gan	gan	PROPN
ap-900	151	37	films	film	NOUN
ap-900	151	38	grown	grow	VERB
ap-900	151	39	on	on	ADP
ap-900	151	40	silicon	silicon	NOUN
ap-900	151	41	(	(	PUNCT
ap-900	151	42	111	111	NUM
ap-900	151	43	)	)	PUNCT
ap-900	151	44	substrates	substrate	NOUN
ap-900	151	45	.	.	PUNCT
ap-900	151	46	”	"	PUNCT
ap-900	152	1	physica	physica	PROPN
ap-900	152	2	b	b	X
ap-900	152	3	-	-	PUNCT
ap-900	152	4	condensed	condense	VERB
ap-900	152	5	materials	material	NOUN
ap-900	152	6	,	,	PUNCT
ap-900	152	7	vol	vol	NOUN
ap-900	152	8	.	.	PUNCT
ap-900	153	1	325	325	NUM
ap-900	153	2	(	(	PUNCT
ap-900	153	3	2003	2003	NUM
ap-900	153	4	)	)	PUNCT
ap-900	153	5	,	,	PUNCT
ap-900	153	6	no	no	INTJ
ap-900	153	7	.	.	PUNCT
ap-900	154	1	1–4	1–4	NUM
ap-900	154	2	,	,	PUNCT
ap-900	154	3	p.	p.	NOUN
ap-900	154	4	230–234	230–234	NUM
ap-900	154	5	.	.	PUNCT
ap-900	155	1	[	[	X
ap-900	155	2	16	16	NUM
ap-900	155	3	]	]	X
ap-900	155	4	kim	kim	PROPN
ap-900	155	5	,	,	PUNCT
ap-900	155	6	j.	j.	PROPN
ap-900	155	7	h.	h.	PROPN
ap-900	155	8	,	,	PUNCT
ap-900	155	9	shepard	shepard	NOUN
ap-900	155	10	,	,	PUNCT
ap-900	155	11	n.	n.	NOUN
ap-900	155	12	,	,	PUNCT
ap-900	155	13	davidson	davidson	PROPN
ap-900	155	14	,	,	PUNCT
ap-900	155	15	m.	m.	PROPN
ap-900	155	16	r.	r.	PROPN
ap-900	155	17	,	,	PUNCT
ap-900	155	18	holloway	holloway	PROPN
ap-900	155	19	,	,	PUNCT
ap-900	155	20	p.	p.	PROPN
ap-900	155	21	h.	h.	PROPN
ap-900	155	22	:	:	PUNCT
ap-900	155	23	“	"	PUNCT
ap-900	155	24	visible	visible	ADJ
ap-900	155	25	and	and	CCONJ
ap-900	155	26	near	near	ADP
ap-900	155	27	infrared	infrared	ADJ
ap-900	155	28	alternating	alternate	VERB
ap-900	155	29	current	current	ADJ
ap-900	155	30	electroluminescence	electroluminescence	NOUN
ap-900	155	31	from	from	ADP
ap-900	155	32	sputter	sputter	NOUN
ap-900	155	33	grown	grow	VERB
ap-900	155	34	gan	gan	PROPN
ap-900	155	35	thin	thin	ADJ
ap-900	155	36	films	film	NOUN
ap-900	155	37	doped	dope	VERB
ap-900	155	38	with	with	ADP
ap-900	155	39	er	er	INTJ
ap-900	155	40	.	.	PUNCT
ap-900	155	41	”	"	PUNCT
ap-900	155	42	applied	apply	VERB
ap-900	155	43	physics	physics	NOUN
ap-900	155	44	letters	letter	NOUN
ap-900	155	45	,	,	PUNCT
ap-900	155	46	vol	vol	NOUN
ap-900	155	47	.	.	PROPN
ap-900	155	48	83	83	NUM
ap-900	155	49	(	(	PUNCT
ap-900	155	50	2003	2003	NUM
ap-900	155	51	)	)	PUNCT
ap-900	155	52	,	,	PUNCT
ap-900	155	53	no	no	INTJ
ap-900	155	54	.	.	NOUN
ap-900	155	55	21	21	NUM
ap-900	155	56	,	,	PUNCT
ap-900	155	57	p.	p.	NOUN
ap-900	155	58	4279–4281	4279–4281	NUM
ap-900	155	59	.	.	PUNCT
ap-900	156	1	[	[	X
ap-900	156	2	17	17	NUM
ap-900	156	3	]	]	X
ap-900	156	4	yang	yang	PROPN
ap-900	156	5	,	,	PUNCT
ap-900	156	6	y.	y.	PROPN
ap-900	156	7	g.	g.	PROPN
ap-900	156	8	,	,	PUNCT
ap-900	156	9	ma	ma	PROPN
ap-900	156	10	,	,	PUNCT
ap-900	156	11	h.	h.	PROPN
ap-900	156	12	l.	l.	PROPN
ap-900	156	13	,	,	PUNCT
ap-900	156	14	xue	xue	PROPN
ap-900	156	15	,	,	PUNCT
ap-900	156	16	c.	c.	PROPN
ap-900	156	17	s.	s.	PROPN
ap-900	156	18	,	,	PUNCT
ap-900	156	19	zhuang	zhuang	PROPN
ap-900	156	20	,	,	PUNCT
ap-900	156	21	h.	h.	PROPN
ap-900	156	22	z.	z.	PROPN
ap-900	156	23	,	,	PUNCT
ap-900	156	24	hao	hao	PROPN
ap-900	156	25	,	,	PUNCT
ap-900	156	26	x.	x.	PROPN
ap-900	156	27	t.	t.	PROPN
ap-900	156	28	,	,	PUNCT
ap-900	156	29	ma	ma	PROPN
ap-900	156	30	,	,	PUNCT
ap-900	156	31	j.	j.	PROPN
ap-900	156	32	,	,	PUNCT
ap-900	156	33	teng	teng	PROPN
ap-900	156	34	,	,	PUNCT
ap-900	156	35	s.	s.	PROPN
ap-900	156	36	y.	y.	PROPN
ap-900	156	37	:	:	PUNCT
ap-900	156	38	“	"	PUNCT
ap-900	156	39	preparation	preparation	NOUN
ap-900	156	40	and	and	CCONJ
ap-900	156	41	structural	structural	ADJ
ap-900	156	42	properties	property	NOUN
ap-900	156	43	for	for	ADP
ap-900	156	44	gan	gan	PROPN
ap-900	156	45	films	film	NOUN
ap-900	156	46	grown	grow	VERB
ap-900	156	47	on	on	ADP
ap-900	156	48	si	si	X
ap-900	156	49	(	(	PUNCT
ap-900	156	50	111	111	NUM
ap-900	156	51	)	)	PUNCT
ap-900	156	52	by	by	ADP
ap-900	156	53	annealing	anneal	VERB
ap-900	156	54	.	.	PUNCT
ap-900	156	55	”	"	PUNCT
ap-900	156	56	applied	apply	VERB
ap-900	156	57	surface	surface	NOUN
ap-900	156	58	science	science	NOUN
ap-900	156	59	,	,	PUNCT
ap-900	156	60	vol	vol	NOUN
ap-900	156	61	.	.	PROPN
ap-900	156	62	193	193	NUM
ap-900	156	63	(	(	PUNCT
ap-900	156	64	2002	2002	NUM
ap-900	156	65	)	)	PUNCT
ap-900	156	66	,	,	PUNCT
ap-900	156	67	no	no	INTJ
ap-900	156	68	.	.	PUNCT
ap-900	157	1	1–4	1–4	NUM
ap-900	157	2	,	,	PUNCT
ap-900	157	3	p.	p.	NOUN
ap-900	157	4	254–260	254–260	NUM
ap-900	157	5	.	.	PUNCT
ap-900	158	1	[	[	X
ap-900	158	2	18	18	NUM
ap-900	158	3	]	]	PUNCT
ap-900	158	4	saarilahti	saarilahti	NOUN
ap-900	158	5	,	,	PUNCT
ap-900	158	6	j.	j.	PROPN
ap-900	158	7	,	,	PUNCT
ap-900	158	8	rauhala	rauhala	PROPN
ap-900	158	9	,	,	PUNCT
ap-900	158	10	e.	e.	PROPN
ap-900	158	11	:	:	PUNCT
ap-900	158	12	“	"	PUNCT
ap-900	158	13	interactive	interactive	ADJ
ap-900	158	14	personal	personal	ADJ
ap-900	158	15	-	-	PUNCT
ap-900	158	16	computer	computer	NOUN
ap-900	158	17	data	datum	NOUN
ap-900	158	18	-	-	PUNCT
ap-900	158	19	analysis	analysis	NOUN
ap-900	158	20	of	of	ADP
ap-900	158	21	ion	ion	NOUN
ap-900	158	22	backscattering	backscatter	VERB
ap-900	158	23	spectra	spectra	NOUN
ap-900	158	24	.	.	PUNCT
ap-900	158	25	”	"	PUNCT
ap-900	158	26	nuclear	nuclear	ADJ
ap-900	158	27	instruments	instrument	NOUN
ap-900	158	28	&	&	CCONJ
ap-900	158	29	methods	method	NOUN
ap-900	158	30	in	in	ADP
ap-900	158	31	physics	physics	NOUN
ap-900	158	32	research	research	PROPN
ap-900	158	33	section	section	NOUN
ap-900	158	34	b	b	X
ap-900	158	35	-	-	PUNCT
ap-900	158	36	beam	beam	NOUN
ap-900	158	37	interactions	interaction	NOUN
ap-900	158	38	with	with	ADP
ap-900	158	39	materials	material	NOUN
ap-900	158	40	and	and	CCONJ
ap-900	158	41	atoms	atom	NOUN
ap-900	158	42	,	,	PUNCT
ap-900	158	43	vol	vol	NOUN
ap-900	158	44	.	.	PROPN
ap-900	158	45	64	64	NUM
ap-900	158	46	(	(	PUNCT
ap-900	158	47	1992	1992	NUM
ap-900	158	48	)	)	PUNCT
ap-900	158	49	,	,	PUNCT
ap-900	158	50	no	no	INTJ
ap-900	158	51	.	.	PUNCT
ap-900	159	1	1–4	1–4	NUM
ap-900	159	2	,	,	PUNCT
ap-900	159	3	p.	p.	NOUN
ap-900	160	1	734–738	734–738	NUM
ap-900	160	2	.	.	PUNCT
ap-900	161	1	[	[	X
ap-900	161	2	19	19	NUM
ap-900	161	3	]	]	X
ap-900	161	4	mayer	mayer	PROPN
ap-900	161	5	,	,	PUNCT
ap-900	161	6	m.	m.	NOUN
ap-900	161	7	:	:	PUNCT
ap-900	161	8	simnra	simnra	NOUN
ap-900	161	9	users	user	NOUN
ap-900	161	10	guide	guide	VERB
ap-900	161	11	,	,	PUNCT
ap-900	161	12	institute	institute	NOUN
ap-900	161	13	für	für	PROPN
ap-900	161	14	plasmaphysik	plasmaphysik	PROPN
ap-900	161	15	,	,	PUNCT
ap-900	161	16	1998	1998	NUM
ap-900	161	17	.	.	PUNCT
ap-900	162	1	[	[	X
ap-900	162	2	20	20	NUM
ap-900	162	3	]	]	PUNCT
ap-900	162	4	prajzler	prajzler	NOUN
ap-900	162	5	,	,	PUNCT
ap-900	162	6	v.	v.	PROPN
ap-900	162	7	,	,	PUNCT
ap-900	162	8	schröfel	schröfel	PROPN
ap-900	162	9	,	,	PUNCT
ap-900	162	10	j.	j.	PROPN
ap-900	162	11	,	,	PUNCT
ap-900	162	12	hüttel	hüttel	PROPN
ap-900	162	13	,	,	PUNCT
ap-900	162	14	i.	i.	PROPN
ap-900	162	15	,	,	PUNCT
ap-900	162	16	špirková	špirková	PROPN
ap-900	162	17	,	,	PUNCT
ap-900	162	18	j.	j.	PROPN
ap-900	162	19	,	,	PUNCT
ap-900	162	20	hamáček	hamáček	PROPN
ap-900	162	21	,	,	PUNCT
ap-900	162	22	j.	j.	PROPN
ap-900	162	23	,	,	PUNCT
ap-900	162	24	machovič	machovič	PROPN
ap-900	162	25	,	,	PUNCT
ap-900	162	26	v.	v.	ADV
ap-900	162	27	,	,	PUNCT
ap-900	162	28	peřina	peřina	NOUN
ap-900	162	29	v.	v.	NOUN
ap-900	162	30	:	:	PUNCT
ap-900	162	31	er	er	INTJ
ap-900	162	32	:	:	PUNCT
ap-900	162	33	gan	gin	VERB
ap-900	162	34	thin	thin	ADJ
ap-900	162	35	films	film	NOUN
ap-900	162	36	fabricated	fabricate	VERB
ap-900	162	37	by	by	ADP
ap-900	162	38	magnetron	magnetron	NOUN
ap-900	162	39	sputtering	sputtering	NOUN
ap-900	162	40	,	,	PUNCT
ap-900	162	41	in	in	ADP
ap-900	162	42	:	:	PUNCT
ap-900	162	43	thin	thin	ADJ
ap-900	162	44	films	film	NOUN
ap-900	162	45	2004	2004	NUM
ap-900	162	46	&	&	CCONJ
ap-900	162	47	nanotech	nanotech	PROPN
ap-900	162	48	2004	2004	NUM
ap-900	162	49	(	(	PUNCT
ap-900	162	50	editors	editor	NOUN
ap-900	162	51	:	:	PUNCT
ap-900	162	52	sam	sam	PROPN
ap-900	162	53	zhang	zhang	PROPN
ap-900	162	54	,	,	PUNCT
ap-900	162	55	xianting	xianting	PROPN
ap-900	162	56	zeng	zeng	PROPN
ap-900	162	57	)	)	PUNCT
ap-900	162	58	.	.	PUNCT
ap-900	163	1	singapore	singapore	PROPN
ap-900	163	2	,	,	PUNCT
ap-900	163	3	nanyang	nanyang	PROPN
ap-900	163	4	technological	technological	ADJ
ap-900	163	5	university	university	NOUN
ap-900	163	6	,	,	PUNCT
ap-900	163	7	2004	2004	NUM
ap-900	163	8	,	,	PUNCT
ap-900	163	9	34	34	NUM
ap-900	163	10	-	-	PUNCT
ap-900	163	11	otf	otf	NOUN
ap-900	163	12	-	-	PUNCT
ap-900	163	13	a315	a315	PROPN
ap-900	163	14	.	.	PUNCT
ap-900	164	1	[	[	X
ap-900	164	2	21	21	NUM
ap-900	164	3	]	]	PUNCT
ap-900	164	4	ross	ross	PROPN
ap-900	164	5	,	,	PUNCT
ap-900	164	6	j.	j.	PROPN
ap-900	164	7	,	,	PUNCT
ap-900	164	8	rubin	rubin	PROPN
ap-900	164	9	,	,	PUNCT
ap-900	164	10	m.	m.	NOUN
ap-900	164	11	:	:	PUNCT
ap-900	164	12	“	"	PUNCT
ap-900	164	13	high	high	ADJ
ap-900	164	14	-	-	PUNCT
ap-900	164	15	quality	quality	NOUN
ap-900	164	16	gan	gan	NOUN
ap-900	164	17	grown	grow	VERB
ap-900	164	18	by	by	ADP
ap-900	164	19	reactive	reactive	ADJ
ap-900	164	20	sputtering	sputtering	NOUN
ap-900	164	21	.	.	PUNCT
ap-900	164	22	”	"	PUNCT
ap-900	164	23	materials	material	NOUN
ap-900	164	24	letters	letter	NOUN
ap-900	164	25	,	,	PUNCT
ap-900	164	26	vol	vol	NOUN
ap-900	164	27	.	.	PROPN
ap-900	164	28	12	12	NUM
ap-900	164	29	(	(	PUNCT
ap-900	164	30	1991	1991	NUM
ap-900	164	31	)	)	PUNCT
ap-900	164	32	,	,	PUNCT
ap-900	164	33	no	no	INTJ
ap-900	164	34	.	.	NOUN
ap-900	164	35	4	4	NUM
ap-900	164	36	,	,	PUNCT
ap-900	164	37	p.	p.	NOUN
ap-900	164	38	215–218	215–218	NUM
ap-900	164	39	.	.	PUNCT
ap-900	165	1	[	[	X
ap-900	165	2	22	22	NUM
ap-900	165	3	]	]	PUNCT
ap-900	165	4	zanatta	zanatta	PROPN
ap-900	165	5	,	,	PUNCT
ap-900	165	6	a.	a.	PROPN
ap-900	165	7	r.	r.	PROPN
ap-900	165	8	,	,	PUNCT
ap-900	165	9	ribeiro	ribeiro	PROPN
ap-900	165	10	,	,	PUNCT
ap-900	165	11	c.	c.	PROPN
ap-900	165	12	t.	t.	PROPN
ap-900	165	13	,	,	PUNCT
ap-900	165	14	freire	freire	PROPN
ap-900	165	15	,	,	PUNCT
ap-900	165	16	f.	f.	PROPN
ap-900	165	17	l.	l.	PROPN
ap-900	165	18	:	:	PUNCT
ap-900	165	19	“	"	PUNCT
ap-900	165	20	optoelectronic	optoelectronic	ADJ
ap-900	165	21	and	and	CCONJ
ap-900	165	22	structural	structural	ADJ
ap-900	165	23	properties	property	NOUN
ap-900	165	24	of	of	ADP
ap-900	165	25	er	er	ADV
ap-900	165	26	-	-	PUNCT
ap-900	165	27	doped	dope	VERB
ap-900	165	28	sputter	sputter	NOUN
ap-900	165	29	-	-	PUNCT
ap-900	165	30	deposited	deposit	VERB
ap-900	165	31	gallium	gallium	NOUN
ap-900	165	32	-	-	PUNCT
ap-900	165	33	arsenic	arsenic	ADJ
ap-900	165	34	-	-	PUNCT
ap-900	165	35	nitrogen	nitrogen	NOUN
ap-900	165	36	films	film	NOUN
ap-900	165	37	.	.	PUNCT
ap-900	165	38	”	"	PUNCT
ap-900	166	1	journal	journal	NOUN
ap-900	166	2	of	of	ADP
ap-900	166	3	applied	applied	ADJ
ap-900	166	4	physics	physics	NOUN
ap-900	166	5	,	,	PUNCT
ap-900	166	6	vol	vol	NOUN
ap-900	166	7	.	.	PROPN
ap-900	167	1	90	90	NUM
ap-900	167	2	(	(	PUNCT
ap-900	167	3	2001	2001	NUM
ap-900	167	4	)	)	PUNCT
ap-900	167	5	,	,	PUNCT
ap-900	167	6	no	no	INTJ
ap-900	167	7	.	.	NOUN
ap-900	167	8	5	5	NUM
ap-900	167	9	,	,	PUNCT
ap-900	167	10	p.	p.	NOUN
ap-900	167	11	2321–2328	2321–2328	NUM
ap-900	167	12	.	.	PUNCT
ap-900	168	1	54	54	NUM
ap-900	168	2	©	©	PROPN
ap-900	168	3	czech	czech	PROPN
ap-900	168	4	technical	technical	PROPN
ap-900	168	5	university	university	PROPN
ap-900	168	6	publishing	publishing	NOUN
ap-900	168	7	house	house	NOUN
ap-900	168	8	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-900	168	9	acta	acta	PROPN
ap-900	168	10	polytechnica	polytechnica	PROPN
ap-900	168	11	vol	vol	NOUN
ap-900	168	12	.	.	PUNCT
ap-900	169	1	46	46	NUM
ap-900	169	2	no	no	INTJ
ap-900	169	3	.	.	PUNCT
ap-900	170	1	6/2006	6/2006	NUM
ap-900	170	2	ing	ing	NOUN
ap-900	170	3	.	.	PUNCT
ap-900	170	4	václav	václav	ADJ
ap-900	170	5	prajzler	prajzler	NOUN
ap-900	170	6	e	e	NOUN
ap-900	170	7	-	-	NOUN
ap-900	170	8	mail	mail	NOUN
ap-900	170	9	:	:	PUNCT
ap-900	170	10	xprajzlv@feld.cvut.cz	xprajzlv@feld.cvut.cz	PROPN
ap-900	170	11	doc	doc	PROPN
ap-900	170	12	.	.	PROPN
ap-900	170	13	ing	ing	PROPN
ap-900	170	14	.	.	PUNCT
ap-900	170	15	zdeněk	zdeněk	PROPN
ap-900	170	16	burian	burian	PROPN
ap-900	170	17	,	,	PUNCT
ap-900	170	18	csc	csc	PROPN
ap-900	170	19	.	.	PROPN
ap-900	171	1	e	e	X
ap-900	171	2	-	-	NOUN
ap-900	171	3	mail	mail	NOUN
ap-900	171	4	:	:	PUNCT
ap-900	171	5	burian@fel.cvut.cz	burian@fel.cvut.cz	PROPN
ap-900	171	6	department	department	PROPN
ap-900	171	7	of	of	ADP
ap-900	171	8	microelectronics	microelectronics	PROPN
ap-900	171	9	czech	czech	PROPN
ap-900	171	10	technical	technical	PROPN
ap-900	171	11	university	university	PROPN
ap-900	171	12	faculty	faculty	NOUN
ap-900	171	13	of	of	ADP
ap-900	171	14	electrical	electrical	ADJ
ap-900	171	15	engineering	engineering	NOUN
ap-900	171	16	technická	technická	NOUN
ap-900	171	17	2	2	NUM
ap-900	171	18	166	166	NUM
ap-900	171	19	27	27	NUM
ap-900	171	20	prague	prague	NOUN
ap-900	171	21	,	,	PUNCT
ap-900	171	22	czech	czech	PROPN
ap-900	171	23	republic	republic	PROPN
ap-900	171	24	doc	doc	PROPN
ap-900	171	25	.	.	PROPN
ap-900	172	1	ing	ing	PROPN
ap-900	172	2	.	.	PUNCT
ap-900	173	1	ivan	ivan	PROPN
ap-900	173	2	hüttel	hüttel	PROPN
ap-900	173	3	e	e	NOUN
ap-900	173	4	-	-	NOUN
ap-900	173	5	mail	mail	NOUN
ap-900	173	6	:	:	PUNCT
ap-900	173	7	ivan.huttel@vscht.cz	ivan.huttel@vscht.cz	NOUN
ap-900	173	8	rndr	rndr	PROPN
ap-900	173	9	.	.	PUNCT
ap-900	174	1	jarmila	jarmila	PROPN
ap-900	175	1	špirková	špirková	X
ap-900	175	2	,	,	PUNCT
ap-900	175	3	csc	csc	PROPN
ap-900	175	4	.	.	PROPN
ap-900	176	1	e	e	X
ap-900	176	2	-	-	NOUN
ap-900	176	3	mail	mail	NOUN
ap-900	176	4	:	:	PUNCT
ap-900	176	5	jarmila.spirkova@vscht.cz	jarmila.spirkova@vscht.cz	PROPN
ap-900	176	6	ing	ing	PROPN
ap-900	176	7	.	.	PROPN
ap-900	177	1	jiří	jiří	PROPN
ap-900	177	2	hamáček	hamáček	PROPN
ap-900	177	3	e	e	PROPN
ap-900	177	4	-	-	NOUN
ap-900	177	5	mail	mail	NOUN
ap-900	177	6	:	:	PUNCT
ap-900	177	7	jiri.hamacek@vscht.cz	jiri.hamacek@vscht.cz	PROPN
ap-900	177	8	institute	institute	PROPN
ap-900	177	9	of	of	ADP
ap-900	177	10	chemical	chemical	PROPN
ap-900	177	11	technology	technology	NOUN
ap-900	177	12	technická	technická	NOUN
ap-900	177	13	5	5	NUM
ap-900	177	14	166	166	NUM
ap-900	177	15	27	27	NUM
ap-900	177	16	prague	prague	NOUN
ap-900	177	17	,	,	PUNCT
ap-900	177	18	czech	czech	PROPN
ap-900	177	19	republic	republic	PROPN
ap-900	177	20	ing	ing	PROPN
ap-900	177	21	.	.	PUNCT
ap-900	178	1	jiří	jiří	PROPN
ap-900	178	2	oswald	oswald	PROPN
ap-900	178	3	,	,	PUNCT
ap-900	178	4	csc	csc	PROPN
ap-900	178	5	.	.	PROPN
ap-900	178	6	e	e	X
ap-900	178	7	-	-	NOUN
ap-900	178	8	mail	mail	NOUN
ap-900	178	9	:	:	PUNCT
ap-900	178	10	oswald@fzu.cz	oswald@fzu.cz	PROPN
ap-900	178	11	institute	institute	PROPN
ap-900	178	12	of	of	ADP
ap-900	178	13	physics	physics	PROPN
ap-900	178	14	,	,	PUNCT
ap-900	178	15	czech	czech	PROPN
ap-900	178	16	academy	academy	PROPN
ap-900	178	17	of	of	ADP
ap-900	178	18	sciences	sciences	PROPN
ap-900	178	19	cukrovarnická	cukrovarnická	VERB
ap-900	178	20	10	10	NUM
ap-900	178	21	162	162	NUM
ap-900	178	22	53	53	NUM
ap-900	178	23	prague	prague	NOUN
ap-900	178	24	,	,	PUNCT
ap-900	178	25	czech	czech	PROPN
ap-900	178	26	republic	republic	NOUN
ap-900	178	27	rndr	rndr	PROPN
ap-900	178	28	.	.	PUNCT
ap-900	179	1	jiří	jiří	NOUN
ap-900	179	2	zavadil	zavadil	PROPN
ap-900	179	3	,	,	PUNCT
ap-900	179	4	csc	csc	PROPN
ap-900	179	5	.	.	PUNCT
ap-900	180	1	e	e	X
ap-900	180	2	-	-	NOUN
ap-900	180	3	mail	mail	NOUN
ap-900	180	4	:	:	PUNCT
ap-900	180	5	zavadil@ure.cas.cz	zavadil@ure.cas.cz	PROPN
ap-900	180	6	institute	institute	PROPN
ap-900	180	7	of	of	ADP
ap-900	180	8	radio	radio	NOUN
ap-900	180	9	engineering	engineering	NOUN
ap-900	180	10	and	and	CCONJ
ap-900	180	11	electronics	electronic	NOUN
ap-900	180	12	czech	czech	PROPN
ap-900	180	13	academy	academy	PROPN
ap-900	180	14	of	of	ADP
ap-900	180	15	sciences	sciences	PROPN
ap-900	180	16	chaberská	chaberská	NOUN
ap-900	180	17	57	57	NUM
ap-900	180	18	182	182	NUM
ap-900	180	19	51	51	NUM
ap-900	180	20	prague	prague	NOUN
ap-900	180	21	,	,	PUNCT
ap-900	180	22	czech	czech	PROPN
ap-900	180	23	republic	republic	NOUN
ap-900	180	24	rndr	rndr	PROPN
ap-900	180	25	.	.	PUNCT
ap-900	181	1	vratislav	vratislav	PROPN
ap-900	181	2	peřina	peřina	PROPN
ap-900	181	3	,	,	PUNCT
ap-900	181	4	csc	csc	PROPN
ap-900	181	5	.	.	PROPN
ap-900	182	1	e	e	X
ap-900	182	2	-	-	NOUN
ap-900	182	3	mail	mail	NOUN
ap-900	182	4	:	:	PUNCT
ap-900	182	5	perina@ujf.cas.cz	perina@ujf.cas.cz	PROPN
ap-900	182	6	institute	institute	PROPN
ap-900	182	7	of	of	ADP
ap-900	182	8	nuclear	nuclear	ADJ
ap-900	182	9	physics	physics	PROPN
ap-900	182	10	czech	czech	PROPN
ap-900	182	11	academy	academy	PROPN
ap-900	182	12	of	of	ADP
ap-900	182	13	sciences	sciences	PROPN
ap-900	182	14	250	250	NUM
ap-900	182	15	68	68	NUM
ap-900	182	16	řež	řež	NOUN
ap-900	182	17	near	near	ADP
ap-900	182	18	prague	prague	PROPN
ap-900	182	19	,	,	PUNCT
ap-900	182	20	czech	czech	PROPN
ap-900	182	21	republic	republic	NOUN
ap-900	182	22	©	©	PROPN
ap-900	182	23	czech	czech	PROPN
ap-900	182	24	technical	technical	PROPN
ap-900	182	25	university	university	PROPN
ap-900	182	26	publishing	publishing	NOUN
ap-900	182	27	house	house	NOUN
ap-900	182	28	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-900	182	29	55	55	NUM
ap-900	182	30	acta	acta	PROPN
ap-900	182	31	polytechnica	polytechnica	PROPN
ap-900	182	32	vol	vol	NOUN
ap-900	182	33	.	.	PUNCT
ap-900	183	1	46	46	NUM
ap-900	183	2	no	no	INTJ
ap-900	183	3	.	.	PUNCT
ap-900	184	1	6/2006	6/2006	NUM
ap-900	184	2	table	table	NOUN
ap-900	184	3	of	of	ADP
ap-900	184	4	contents	content	NOUN
ap-900	184	5	optimal	optimal	ADJ
ap-900	184	6	(	(	PUNCT
ap-900	184	7	comfortable	comfortable	ADJ
ap-900	184	8	)	)	PUNCT
ap-900	184	9	operative	operative	ADJ
ap-900	184	10	temperature	temperature	NOUN
ap-900	184	11	estimation	estimation	NOUN
ap-900	184	12	based	base	VERB
ap-900	184	13	on	on	ADP
ap-900	184	14	physiological	physiological	ADJ
ap-900	184	15	responses	response	NOUN
ap-900	184	16	of	of	ADP
ap-900	184	17	the	the	DET
ap-900	184	18	human	human	ADJ
ap-900	184	19	organism	organism	NOUN
ap-900	184	20	3	3	NUM
ap-900	184	21	m.	m.	NOUN
ap-900	184	22	v.	v.	ADP
ap-900	184	23	jokl	jokl	PROPN
ap-900	184	24	,	,	PUNCT
ap-900	184	25	k.	k.	PROPN
ap-900	184	26	kabele	kabele	PROPN
ap-900	184	27	extraction	extraction	NOUN
ap-900	184	28	of	of	ADP
ap-900	184	29	alkali	alkali	ADJ
ap-900	184	30	ions	ion	NOUN
ap-900	184	31	investigated	investigate	VERB
ap-900	184	32	by	by	ADP
ap-900	184	33	conductometric	conductometric	ADJ
ap-900	184	34	and	and	CCONJ
ap-900	184	35	ph	ph	ADJ
ap-900	184	36	measurements	measurement	NOUN
ap-900	184	37	14	14	NUM
ap-900	184	38	l.	l.	PROPN
ap-900	184	39	kalvoda	kalvoda	PROPN
ap-900	184	40	,	,	PUNCT
ap-900	184	41	r.	r.	PROPN
ap-900	184	42	klepáèek	klepáèek	PROPN
ap-900	184	43	response	response	NOUN
ap-900	184	44	analysis	analysis	NOUN
ap-900	184	45	of	of	ADP
ap-900	184	46	an	an	DET
ap-900	184	47	rc	rc	NOUN
ap-900	184	48	cooling	cool	VERB
ap-900	184	49	tower	tower	NOUN
ap-900	184	50	under	under	ADP
ap-900	184	51	seismic	seismic	ADJ
ap-900	184	52	and	and	CCONJ
ap-900	184	53	windstorm	windstorm	NOUN
ap-900	184	54	effects	effect	NOUN
ap-900	184	55	17	17	NUM
ap-900	184	56	d.	d.	PROPN
ap-900	184	57	makovièka	makovièka	PROPN
ap-900	184	58	determination	determination	NOUN
ap-900	184	59	of	of	ADP
ap-900	184	60	rheological	rheological	ADJ
ap-900	184	61	parameters	parameter	NOUN
ap-900	184	62	from	from	ADP
ap-900	184	63	measurements	measurement	NOUN
ap-900	184	64	on	on	ADP
ap-900	184	65	a	a	DET
ap-900	184	66	viscometer	viscometer	NOUN
ap-900	184	67	with	with	ADP
ap-900	184	68	coaxial	coaxial	ADJ
ap-900	184	69	cylinders	cylinder	NOUN
ap-900	184	70	–	–	PUNCT
ap-900	184	71	choice	choice	NOUN
ap-900	184	72	of	of	ADP
ap-900	184	73	the	the	DET
ap-900	184	74	reference	reference	NOUN
ap-900	184	75	radius	radius	NOUN
ap-900	184	76	22	22	NUM
ap-900	184	77	f.	f.	PROPN
ap-900	184	78	rieger	rieger	PROPN
ap-900	184	79	embedded	embed	VERB
ap-900	184	80	coding	code	VERB
ap-900	184	81	of	of	ADP
ap-900	184	82	astronomical	astronomical	ADJ
ap-900	184	83	images	image	NOUN
ap-900	184	84	25	25	NUM
ap-900	184	85	f.	f.	PROPN
ap-900	184	86	i.	i.	PROPN
ap-900	184	87	y.	y.	PROPN
ap-900	184	88	elnagahy	elnagahy	PROPN
ap-900	184	89	,	,	PUNCT
ap-900	184	90	a.	a.	NOUN
ap-900	184	91	a.	a.	PROPN
ap-900	184	92	haroon	haroon	PROPN
ap-900	184	93	,	,	PUNCT
ap-900	184	94	y.	y.	PROPN
ap-900	184	95	a.	a.	PROPN
ap-900	184	96	azzam	azzam	PROPN
ap-900	184	97	,	,	PUNCT
ap-900	184	98	a.	a.	PROPN
ap-900	184	99	el	el	PROPN
ap-900	184	100	-	-	PROPN
ap-900	184	101	bassuny	bassuny	PROPN
ap-900	184	102	alawy	alawy	PROPN
ap-900	184	103	,	,	PUNCT
ap-900	184	104	h.	h.	PROPN
ap-900	184	105	k.	k.	PROPN
ap-900	184	106	elminir	elminir	PROPN
ap-900	184	107	,	,	PUNCT
ap-900	184	108	b.	b.	PROPN
ap-900	184	109	šimák	šimák	PROPN
ap-900	184	110	influence	influence	NOUN
ap-900	184	111	of	of	ADP
ap-900	184	112	different	different	ADJ
ap-900	184	113	speech	speech	NOUN
ap-900	184	114	representations	representation	NOUN
ap-900	184	115	and	and	CCONJ
ap-900	184	116	hmm	hmm	NOUN
ap-900	184	117	training	training	NOUN
ap-900	184	118	strategies	strategy	NOUN
ap-900	184	119	on	on	ADP
ap-900	184	120	asr	asr	PROPN
ap-900	184	121	performance	performance	NOUN
ap-900	184	122	32	32	NUM
ap-900	184	123	h.	h.	PROPN
ap-900	184	124	boøil	boøil	NOUN
ap-900	184	125	,	,	PUNCT
ap-900	184	126	p.	p.	NOUN
ap-900	184	127	fousek	fousek	NOUN
ap-900	184	128	fuzzy	fuzzy	ADJ
ap-900	184	129	algorithm	algorithm	NOUN
ap-900	184	130	for	for	ADP
ap-900	184	131	supervisory	supervisory	ADJ
ap-900	184	132	voltage	voltage	NOUN
ap-900	184	133	/	/	SYM
ap-900	184	134	frequency	frequency	NOUN
ap-900	184	135	control	control	NOUN
ap-900	184	136	of	of	ADP
ap-900	184	137	a	a	DET
ap-900	184	138	self	self	NOUN
ap-900	184	139	excited	excite	VERB
ap-900	184	140	induction	induction	NOUN
ap-900	184	141	generator	generator	NOUN
ap-900	184	142	36	36	NUM
ap-900	184	143	hussein	hussein	PROPN
ap-900	184	144	f.	f.	PROPN
ap-900	184	145	soliman	soliman	PROPN
ap-900	184	146	,	,	PUNCT
ap-900	184	147	abdel	abdel	PROPN
ap-900	184	148	-	-	PUNCT
ap-900	184	149	fattah	fattah	PROPN
ap-900	184	150	attia	attia	PROPN
ap-900	184	151	,	,	PUNCT
ap-900	184	152	s.	s.	PROPN
ap-900	184	153	m.	m.	PROPN
ap-900	184	154	mokhymar	mokhymar	PROPN
ap-900	184	155	,	,	PUNCT
ap-900	184	156	m.	m.	PROPN
ap-900	184	157	a.	a.	PROPN
ap-900	184	158	l.	l.	PROPN
ap-900	184	159	badr	badr	PROPN
ap-900	184	160	properties	property	NOUN
ap-900	184	161	of	of	ADP
ap-900	184	162	erbium	erbium	NOUN
ap-900	184	163	and	and	CCONJ
ap-900	184	164	ytterbium	ytterbium	NOUN
ap-900	184	165	doped	dope	VERB
ap-900	184	166	gallium	gallium	NOUN
ap-900	184	167	nitride	nitride	ADJ
ap-900	184	168	layers	layer	NOUN
ap-900	184	169	fabricated	fabricate	VERB
ap-900	184	170	by	by	ADP
ap-900	184	171	magnetron	magnetron	NOUN
ap-900	184	172	sputtering	sputter	VERB
ap-900	184	173	49	49	NUM
ap-900	184	174	v.	v.	ADP
ap-900	184	175	prajzler	prajzler	NOUN
ap-900	184	176	,	,	PUNCT
ap-900	184	177	z.	z.	PROPN
ap-900	184	178	burian	burian	PROPN
ap-900	184	179	,	,	PUNCT
ap-900	184	180	i.	i.	PROPN
ap-900	184	181	hüttel	hüttel	PROPN
ap-900	184	182	,	,	PUNCT
ap-900	184	183	j.	j.	PROPN
ap-900	184	184	špirková	špirková	PROPN
ap-900	184	185	,	,	PUNCT
ap-900	184	186	j.	j.	PROPN
ap-900	184	187	hamáèek	hamáèek	PROPN
ap-900	184	188	,	,	PUNCT
ap-900	184	189	j.	j.	PROPN
ap-900	184	190	oswald	oswald	PROPN
ap-900	184	191	,	,	PUNCT
ap-900	184	192	j.	j.	PROPN
ap-900	184	193	zavadil	zavadil	PROPN
ap-900	184	194	,	,	PUNCT
ap-900	184	195	v.	v.	ADP
ap-900	184	196	peøina	peøina	NOUN