id	sid	tid	token	lemma	pos
ap-943	1	1	ap08_1.vp	ap08_1.vp	NOUN
ap-943	1	2	1	1	NUM
ap-943	1	3	introduction	introduction	NOUN
ap-943	1	4	carbon	carbon	NOUN
ap-943	1	5	thin	thin	ADJ
ap-943	1	6	films	film	NOUN
ap-943	1	7	have	have	AUX
ap-943	1	8	attracted	attract	VERB
ap-943	1	9	the	the	DET
ap-943	1	10	attention	attention	NOUN
ap-943	1	11	of	of	ADP
ap-943	1	12	various	various	ADJ
ap-943	1	13	investigators	investigator	NOUN
ap-943	1	14	due	due	ADP
ap-943	1	15	to	to	ADP
ap-943	1	16	their	their	PRON
ap-943	1	17	unique	unique	ADJ
ap-943	1	18	optical	optical	ADJ
ap-943	1	19	,	,	PUNCT
ap-943	1	20	electrical	electrical	ADJ
ap-943	1	21	and	and	CCONJ
ap-943	1	22	mechanical	mechanical	ADJ
ap-943	1	23	properties	property	NOUN
ap-943	1	24	[	[	X
ap-943	1	25	1	1	NUM
ap-943	1	26	]	]	PUNCT
ap-943	1	27	.	.	PUNCT
ap-943	2	1	various	various	ADJ
ap-943	2	2	deposition	deposition	NOUN
ap-943	2	3	techniques	technique	NOUN
ap-943	2	4	and	and	CCONJ
ap-943	2	5	processes	process	NOUN
ap-943	2	6	such	such	ADJ
ap-943	2	7	as	as	ADP
ap-943	2	8	plasma	plasma	NOUN
ap-943	2	9	enhanced	enhance	VERB
ap-943	2	10	chemical	chemical	NOUN
ap-943	2	11	vapor	vapor	NOUN
ap-943	2	12	deposition	deposition	NOUN
ap-943	2	13	(	(	PUNCT
ap-943	2	14	pecvd	pecvd	NOUN
ap-943	2	15	)	)	PUNCT
ap-943	2	16	,	,	PUNCT
ap-943	2	17	sputter	sputter	VERB
ap-943	2	18	deposition	deposition	NOUN
ap-943	2	19	etc	etc	X
ap-943	2	20	.	.	X
ap-943	2	21	,	,	PUNCT
ap-943	2	22	have	have	AUX
ap-943	2	23	been	be	AUX
ap-943	2	24	employed	employ	VERB
ap-943	2	25	to	to	PART
ap-943	2	26	deposit	deposit	VERB
ap-943	2	27	carbon	carbon	NOUN
ap-943	2	28	films	film	NOUN
ap-943	2	29	[	[	X
ap-943	2	30	2	2	NUM
ap-943	2	31	,	,	PUNCT
ap-943	2	32	3	3	NUM
ap-943	2	33	]	]	PUNCT
ap-943	2	34	.	.	PUNCT
ap-943	3	1	research	research	NOUN
ap-943	3	2	on	on	ADP
ap-943	3	3	the	the	DET
ap-943	3	4	deposition	deposition	NOUN
ap-943	3	5	of	of	ADP
ap-943	3	6	carbon	carbon	NOUN
ap-943	3	7	layers	layer	NOUN
ap-943	3	8	is	be	AUX
ap-943	3	9	mainly	mainly	ADV
ap-943	3	10	focused	focus	VERB
ap-943	3	11	on	on	ADP
ap-943	3	12	the	the	DET
ap-943	3	13	fabrication	fabrication	NOUN
ap-943	3	14	of	of	ADP
ap-943	3	15	diamond	diamond	NOUN
ap-943	3	16	-	-	PUNCT
ap-943	3	17	like	like	ADJ
ap-943	3	18	carbon	carbon	NOUN
ap-943	3	19	(	(	PUNCT
ap-943	3	20	dlc	dlc	NOUN
ap-943	3	21	)	)	PUNCT
ap-943	3	22	or	or	CCONJ
ap-943	3	23	carbon	carbon	NOUN
ap-943	3	24	nanotubes	nanotube	NOUN
ap-943	3	25	.	.	PUNCT
ap-943	4	1	our	our	PRON
ap-943	4	2	study	study	NOUN
ap-943	4	3	deals	deal	VERB
ap-943	4	4	with	with	ADP
ap-943	4	5	the	the	DET
ap-943	4	6	development	development	NOUN
ap-943	4	7	of	of	ADP
ap-943	4	8	carbon	carbon	NOUN
ap-943	4	9	layers	layer	NOUN
ap-943	4	10	,	,	PUNCT
ap-943	4	11	which	which	PRON
ap-943	4	12	should	should	AUX
ap-943	4	13	have	have	VERB
ap-943	4	14	good	good	ADJ
ap-943	4	15	optical	optical	ADJ
ap-943	4	16	properties	property	NOUN
ap-943	4	17	(	(	PUNCT
ap-943	4	18	low	low	ADJ
ap-943	4	19	optical	optical	ADJ
ap-943	4	20	losses	loss	NOUN
ap-943	4	21	,	,	PUNCT
ap-943	4	22	suitable	suitable	ADJ
ap-943	4	23	refractive	refractive	ADJ
ap-943	4	24	indices	index	NOUN
ap-943	4	25	,	,	PUNCT
ap-943	4	26	high	high	ADJ
ap-943	4	27	photoluminescence	photoluminescence	NOUN
ap-943	4	28	efficiency	efficiency	NOUN
ap-943	4	29	)	)	PUNCT
ap-943	4	30	for	for	ADP
ap-943	4	31	potential	potential	ADJ
ap-943	4	32	application	application	NOUN
ap-943	4	33	in	in	ADP
ap-943	4	34	integrated	integrated	ADJ
ap-943	4	35	optics	optic	NOUN
ap-943	4	36	.	.	PUNCT
ap-943	5	1	[	[	X
ap-943	5	2	4	4	X
ap-943	5	3	]	]	PUNCT
ap-943	5	4	and	and	CCONJ
ap-943	5	5	[	[	X
ap-943	5	6	5	5	NUM
ap-943	5	7	]	]	PUNCT
ap-943	5	8	have	have	AUX
ap-943	5	9	shown	show	VERB
ap-943	5	10	that	that	SCONJ
ap-943	5	11	it	it	PRON
ap-943	5	12	is	be	AUX
ap-943	5	13	possible	possible	ADJ
ap-943	5	14	to	to	PART
ap-943	5	15	prepare	prepare	VERB
ap-943	5	16	carbon	carbon	NOUN
ap-943	5	17	planar	planar	ADJ
ap-943	5	18	waveguides	waveguide	VERB
ap-943	5	19	with	with	ADP
ap-943	5	20	attenuation	attenuation	NOUN
ap-943	5	21	lower	low	ADJ
ap-943	5	22	than	than	ADP
ap-943	5	23	1	1	NUM
ap-943	5	24	db	db	PROPN
ap-943	5	25	�	�	PROPN
ap-943	5	26	cm	cm	NOUN
ap-943	5	27	�	�	PROPN
ap-943	5	28	1	1	NUM
ap-943	5	29	.	.	PUNCT
ap-943	5	30	low	low	ADJ
ap-943	5	31	optical	optical	ADJ
ap-943	5	32	losses	loss	NOUN
ap-943	5	33	of	of	ADP
ap-943	5	34	the	the	DET
ap-943	5	35	optical	optical	ADJ
ap-943	5	36	materials	material	NOUN
ap-943	5	37	are	be	AUX
ap-943	5	38	one	one	NUM
ap-943	5	39	of	of	ADP
ap-943	5	40	the	the	DET
ap-943	5	41	most	most	ADV
ap-943	5	42	important	important	ADJ
ap-943	5	43	preconditions	precondition	NOUN
ap-943	5	44	for	for	ADP
ap-943	5	45	using	use	VERB
ap-943	5	46	this	this	DET
ap-943	5	47	material	material	NOUN
ap-943	5	48	in	in	ADP
ap-943	5	49	integrated	integrate	VERB
ap-943	5	50	optics	optic	NOUN
ap-943	5	51	and	and	CCONJ
ap-943	5	52	for	for	ADP
ap-943	5	53	doping	dope	VERB
ap-943	5	54	it	it	PRON
ap-943	5	55	with	with	ADP
ap-943	5	56	active	active	ADJ
ap-943	5	57	ions	ion	NOUN
ap-943	5	58	such	such	ADJ
ap-943	5	59	as	as	ADP
ap-943	5	60	erbium	erbium	NOUN
ap-943	5	61	.	.	PUNCT
ap-943	6	1	er3	er3	PROPN
ap-943	6	2	�	�	PROPN
ap-943	6	3	-doped	-dope	VERB
ap-943	6	4	optical	optical	ADJ
ap-943	6	5	materials	material	NOUN
ap-943	6	6	are	be	AUX
ap-943	6	7	candidates	candidate	NOUN
ap-943	6	8	for	for	ADP
ap-943	6	9	fabricating	fabricate	VERB
ap-943	6	10	optical	optical	ADJ
ap-943	6	11	amplifiers	amplifier	NOUN
ap-943	6	12	or	or	CCONJ
ap-943	6	13	lasers	laser	NOUN
ap-943	6	14	operating	operate	VERB
ap-943	6	15	at	at	ADP
ap-943	6	16	1530	1530	NUM
ap-943	6	17	nm	nm	NOUN
ap-943	6	18	[	[	X
ap-943	6	19	6	6	NUM
ap-943	6	20	,	,	PUNCT
ap-943	6	21	7	7	NUM
ap-943	6	22	,	,	PUNCT
ap-943	6	23	8	8	NUM
ap-943	6	24	]	]	PUNCT
ap-943	6	25	,	,	PUNCT
ap-943	6	26	due	due	ADP
ap-943	6	27	to	to	ADP
ap-943	6	28	er3	er3	PROPN
ap-943	6	29	�	�	PROPN
ap-943	6	30	intra-4f	intra-4f	ADJ
ap-943	6	31	emission	emission	NOUN
ap-943	6	32	,	,	PUNCT
ap-943	6	33	which	which	PRON
ap-943	6	34	corresponds	correspond	VERB
ap-943	6	35	to	to	ADP
ap-943	6	36	4i13/2	4i13/2	PROPN
ap-943	6	37	�	�	PROPN
ap-943	6	38	4i15/2	4i15/2	PROPN
ap-943	6	39	transition	transition	NOUN
ap-943	6	40	.	.	PUNCT
ap-943	7	1	this	this	DET
ap-943	7	2	wavelength	wavelength	NOUN
ap-943	7	3	is	be	AUX
ap-943	7	4	commonly	commonly	ADV
ap-943	7	5	used	use	VERB
ap-943	7	6	in	in	ADP
ap-943	7	7	telecommunication	telecommunication	NOUN
ap-943	7	8	system	system	NOUN
ap-943	7	9	,	,	PUNCT
ap-943	7	10	due	due	ADP
ap-943	7	11	to	to	ADP
ap-943	7	12	the	the	DET
ap-943	7	13	fact	fact	NOUN
ap-943	7	14	that	that	SCONJ
ap-943	7	15	it	it	PRON
ap-943	7	16	corresponds	correspond	VERB
ap-943	7	17	to	to	ADP
ap-943	7	18	the	the	DET
ap-943	7	19	low	low	ADJ
ap-943	7	20	loss	loss	NOUN
ap-943	7	21	window	window	NOUN
ap-943	7	22	of	of	ADP
ap-943	7	23	silica	silica	NOUN
ap-943	7	24	-	-	PUNCT
ap-943	7	25	based	base	VERB
ap-943	7	26	optical	optical	ADJ
ap-943	7	27	fibers	fiber	NOUN
ap-943	7	28	.	.	PUNCT
ap-943	8	1	the	the	DET
ap-943	8	2	only	only	ADJ
ap-943	8	3	papers	paper	NOUN
ap-943	8	4	analyzing	analyze	VERB
ap-943	8	5	carbon	carbon	NOUN
ap-943	8	6	layers	layer	NOUN
ap-943	8	7	containing	contain	VERB
ap-943	8	8	erbium	erbium	NOUN
ap-943	8	9	ions	ion	NOUN
ap-943	8	10	are	be	AUX
ap-943	8	11	by	by	ADP
ap-943	8	12	hüttel	hüttel	NOUN
ap-943	8	13	et	et	PROPN
ap-943	8	14	al	al	PROPN
ap-943	8	15	.	.	PUNCT
ap-943	9	1	[	[	X
ap-943	9	2	9	9	NUM
ap-943	9	3	,	,	PUNCT
ap-943	9	4	10	10	NUM
ap-943	9	5	,	,	PUNCT
ap-943	9	6	11	11	NUM
ap-943	9	7	]	]	PUNCT
ap-943	9	8	,	,	PUNCT
ap-943	9	9	by	by	ADP
ap-943	9	10	baranov	baranov	NOUN
ap-943	9	11	[	[	X
ap-943	9	12	12	12	NUM
ap-943	9	13	]	]	PUNCT
ap-943	9	14	and	and	CCONJ
ap-943	9	15	by	by	ADP
ap-943	9	16	speranza	speranza	PROPN
ap-943	9	17	[	[	X
ap-943	9	18	13	13	NUM
ap-943	9	19	]	]	PUNCT
ap-943	9	20	.	.	PUNCT
ap-943	10	1	the	the	DET
ap-943	10	2	articles	article	NOUN
ap-943	10	3	report	report	VERB
ap-943	10	4	on	on	ADP
ap-943	10	5	fabricating	fabricate	VERB
ap-943	10	6	erbium	erbium	NOUN
ap-943	10	7	doped	dope	VERB
ap-943	10	8	carbon	carbon	NOUN
ap-943	10	9	layers	layer	NOUN
ap-943	10	10	by	by	ADP
ap-943	10	11	using	use	VERB
ap-943	10	12	magnetron	magnetron	NOUN
ap-943	10	13	sputtering	sputtering	NOUN
ap-943	10	14	on	on	ADP
ap-943	10	15	a	a	DET
ap-943	10	16	silicon	silicon	NOUN
ap-943	10	17	substrate	substrate	NOUN
ap-943	10	18	.	.	PUNCT
ap-943	11	1	baranov	baranov	NOUN
ap-943	11	2	and	and	CCONJ
ap-943	11	3	speranza	speranza	PROPN
ap-943	11	4	used	use	VERB
ap-943	11	5	a	a	DET
ap-943	11	6	graphite	graphite	NOUN
ap-943	11	7	target	target	NOUN
ap-943	11	8	partially	partially	ADV
ap-943	11	9	covered	cover	VERB
ap-943	11	10	with	with	ADP
ap-943	11	11	pieces	piece	NOUN
ap-943	11	12	of	of	ADP
ap-943	11	13	metallic	metallic	ADJ
ap-943	11	14	erbium	erbium	NOUN
ap-943	11	15	,	,	PUNCT
ap-943	11	16	and	and	CCONJ
ap-943	11	17	deposition	deposition	NOUN
ap-943	11	18	was	be	AUX
ap-943	11	19	performed	perform	VERB
ap-943	11	20	in	in	ADP
ap-943	11	21	a	a	DET
ap-943	11	22	gas	gas	NOUN
ap-943	11	23	mixture	mixture	NOUN
ap-943	11	24	of	of	ADP
ap-943	11	25	argon	argon	NOUN
ap-943	11	26	and	and	CCONJ
ap-943	11	27	c6h12	c6h12	X
ap-943	11	28	at	at	ADP
ap-943	11	29	a	a	DET
ap-943	11	30	pressure	pressure	NOUN
ap-943	11	31	of	of	ADP
ap-943	11	32	about	about	ADV
ap-943	11	33	10	10	NUM
ap-943	11	34	�	�	SYM
ap-943	11	35	3	3	NUM
ap-943	11	36	pa	pa	PROPN
ap-943	11	37	.	.	PUNCT
ap-943	12	1	the	the	DET
ap-943	12	2	carbon	carbon	NOUN
ap-943	12	3	layers	layer	NOUN
ap-943	12	4	had	have	VERB
ap-943	12	5	an	an	DET
ap-943	12	6	amorphous	amorphous	ADJ
ap-943	12	7	structure	structure	NOUN
ap-943	12	8	with	with	ADP
ap-943	12	9	sp2	sp2	NOUN
ap-943	12	10	arrangement	arrangement	NOUN
ap-943	12	11	in	in	ADP
ap-943	12	12	which	which	PRON
ap-943	12	13	the	the	DET
ap-943	12	14	er	er	INTJ
ap-943	12	15	concentration	concentration	NOUN
ap-943	12	16	varied	varied	ADJ
ap-943	12	17	from	from	ADP
ap-943	12	18	0.15	0.15	NUM
ap-943	12	19	%	%	NOUN
ap-943	12	20	to	to	ADP
ap-943	12	21	0.8	0.8	NUM
ap-943	12	22	%	%	NOUN
ap-943	12	23	.	.	PUNCT
ap-943	13	1	they	they	PRON
ap-943	13	2	observed	observe	VERB
ap-943	13	3	photoluminescence	photoluminescence	NOUN
ap-943	13	4	due	due	ADP
ap-943	13	5	to	to	ADP
ap-943	13	6	the	the	DET
ap-943	13	7	er3	er3	PROPN
ap-943	13	8	�	�	PROPN
ap-943	13	9	transition	transition	NOUN
ap-943	13	10	2h11/2	2h11/2	PROPN
ap-943	13	11	�	�	PROPN
ap-943	13	12	4i15/2	4i15/2	PROPN
ap-943	13	13	only	only	ADV
ap-943	13	14	in	in	ADP
ap-943	13	15	the	the	DET
ap-943	13	16	sample	sample	NOUN
ap-943	13	17	with	with	ADP
ap-943	13	18	the	the	DET
ap-943	13	19	highest	high	ADJ
ap-943	13	20	amount	amount	NOUN
ap-943	13	21	of	of	ADP
ap-943	13	22	erbium	erbium	NOUN
ap-943	13	23	.	.	PUNCT
ap-943	14	1	in	in	ADP
ap-943	14	2	this	this	DET
ap-943	14	3	paper	paper	NOUN
ap-943	14	4	we	we	PRON
ap-943	14	5	will	will	AUX
ap-943	14	6	report	report	VERB
ap-943	14	7	on	on	ADP
ap-943	14	8	our	our	PRON
ap-943	14	9	attempts	attempt	NOUN
ap-943	14	10	to	to	PART
ap-943	14	11	fabricate	fabricate	VERB
ap-943	14	12	carbon	carbon	NOUN
ap-943	14	13	layers	layer	NOUN
ap-943	14	14	with	with	ADP
ap-943	14	15	erbium	erbium	NOUN
ap-943	14	16	content	content	NOUN
ap-943	14	17	higher	high	ADJ
ap-943	14	18	than	than	ADP
ap-943	14	19	those	those	PRON
ap-943	14	20	in	in	ADP
ap-943	14	21	the	the	DET
ap-943	14	22	papers	paper	NOUN
ap-943	14	23	mentioned	mention	VERB
ap-943	14	24	above	above	ADV
ap-943	14	25	.	.	PUNCT
ap-943	15	1	2	2	NUM
ap-943	15	2	measurements	measurement	NOUN
ap-943	15	3	the	the	DET
ap-943	15	4	structure	structure	NOUN
ap-943	15	5	of	of	ADP
ap-943	15	6	the	the	DET
ap-943	15	7	deposited	deposit	VERB
ap-943	15	8	carbon	carbon	NOUN
ap-943	15	9	layers	layer	NOUN
ap-943	15	10	was	be	AUX
ap-943	15	11	studied	study	VERB
ap-943	15	12	by	by	ADP
ap-943	15	13	xrd	xrd	NOUN
ap-943	15	14	(	(	PUNCT
ap-943	15	15	x	x	NOUN
ap-943	15	16	-	-	NOUN
ap-943	15	17	ray	ray	NOUN
ap-943	15	18	diffraction	diffraction	NOUN
ap-943	15	19	)	)	PUNCT
ap-943	15	20	.	.	PUNCT
ap-943	16	1	the	the	DET
ap-943	16	2	compositions	composition	NOUN
ap-943	16	3	of	of	ADP
ap-943	16	4	the	the	DET
ap-943	16	5	fabricated	fabricate	VERB
ap-943	16	6	samples	sample	NOUN
ap-943	16	7	were	be	AUX
ap-943	16	8	determined	determine	VERB
ap-943	16	9	using	use	VERB
ap-943	16	10	nuclear	nuclear	ADJ
ap-943	16	11	chemical	chemical	NOUN
ap-943	16	12	analyses	analysis	NOUN
ap-943	16	13	such	such	ADJ
ap-943	16	14	as	as	ADP
ap-943	16	15	rutherford	rutherford	PROPN
ap-943	16	16	backscattering	backscattering	NOUN
ap-943	16	17	spectroscopy	spectroscopy	NOUN
ap-943	16	18	(	(	PUNCT
ap-943	16	19	rbs	rbs	PROPN
ap-943	16	20	)	)	PUNCT
ap-943	16	21	and	and	CCONJ
ap-943	16	22	elastic	elastic	ADJ
ap-943	16	23	recoil	recoil	NOUN
ap-943	16	24	detection	detection	NOUN
ap-943	16	25	analysis	analysis	NOUN
ap-943	16	26	(	(	PUNCT
ap-943	16	27	erda	erda	NOUN
ap-943	16	28	)	)	PUNCT
ap-943	16	29	.	.	PUNCT
ap-943	17	1	the	the	DET
ap-943	17	2	amounts	amount	NOUN
ap-943	17	3	of	of	ADP
ap-943	17	4	erbium	erbium	NOUN
ap-943	17	5	ions	ion	NOUN
ap-943	17	6	were	be	AUX
ap-943	17	7	checked	check	VERB
ap-943	17	8	by	by	ADP
ap-943	17	9	rbs	rbs	NOUN
ap-943	17	10	using	use	VERB
ap-943	17	11	both	both	DET
ap-943	17	12	2.4	2.4	NUM
ap-943	17	13	mev	mev	PROPN
ap-943	17	14	protons	proton	NOUN
ap-943	17	15	and	and	CCONJ
ap-943	17	16	2.2	2.2	NUM
ap-943	17	17	mev	mev	PROPN
ap-943	17	18	alpha	alpha	NOUN
ap-943	17	19	particles	particle	NOUN
ap-943	17	20	.	.	PUNCT
ap-943	18	1	the	the	DET
ap-943	18	2	rbs	rbs	PROPN
ap-943	18	3	and	and	CCONJ
ap-943	18	4	erda	erda	PROPN
ap-943	18	5	spectra	spectra	NOUN
ap-943	18	6	were	be	AUX
ap-943	18	7	evaluated	evaluate	VERB
ap-943	18	8	by	by	ADP
ap-943	18	9	gisa3	gisa3	NOUN
ap-943	19	1	[	[	X
ap-943	19	2	18	18	NUM
ap-943	19	3	]	]	PUNCT
ap-943	19	4	and	and	CCONJ
ap-943	19	5	simnra	simnra	VERB
ap-943	19	6	[	[	X
ap-943	19	7	19	19	NUM
ap-943	19	8	]	]	X
ap-943	19	9	code	code	NOUN
ap-943	19	10	,	,	PUNCT
ap-943	19	11	respectively	respectively	ADV
ap-943	19	12	.	.	PUNCT
ap-943	20	1	the	the	DET
ap-943	20	2	absorbance	absorbance	NOUN
ap-943	20	3	spectra	spectra	NOUN
ap-943	20	4	of	of	ADP
ap-943	20	5	the	the	DET
ap-943	20	6	samples	sample	NOUN
ap-943	20	7	were	be	AUX
ap-943	20	8	taken	take	VERB
ap-943	20	9	in	in	ADP
ap-943	20	10	the	the	DET
ap-943	20	11	spectral	spectral	ADJ
ap-943	20	12	region	region	NOUN
ap-943	20	13	from	from	ADP
ap-943	20	14	400	400	NUM
ap-943	20	15	nm	nm	NOUN
ap-943	20	16	to	to	ADP
ap-943	20	17	600	600	NUM
ap-943	20	18	nm	nm	NOUN
ap-943	20	19	at	at	ADP
ap-943	20	20	room	room	NOUN
ap-943	20	21	temperature	temperature	NOUN
ap-943	20	22	.	.	PUNCT
ap-943	21	1	a	a	DET
ap-943	21	2	tungsten	tungsten	ADJ
ap-943	21	3	lamp	lamp	NOUN
ap-943	21	4	and	and	CCONJ
ap-943	21	5	mdr	mdr	PROPN
ap-943	21	6	23	23	NUM
ap-943	21	7	monochromator	monochromator	NOUN
ap-943	21	8	were	be	AUX
ap-943	21	9	used	use	VERB
ap-943	21	10	as	as	ADP
ap-943	21	11	a	a	DET
ap-943	21	12	light	light	ADJ
ap-943	21	13	source	source	NOUN
ap-943	21	14	,	,	PUNCT
ap-943	21	15	and	and	CCONJ
ap-943	21	16	the	the	DET
ap-943	21	17	light	light	NOUN
ap-943	21	18	transmitted	transmit	VERB
ap-943	21	19	through	through	ADP
ap-943	21	20	the	the	DET
ap-943	21	21	samples	sample	NOUN
ap-943	21	22	was	be	AUX
ap-943	21	23	detected	detect	VERB
ap-943	21	24	by	by	ADP
ap-943	21	25	the	the	DET
ap-943	21	26	pyro	pyro	NOUN
ap-943	21	27	-	-	PUNCT
ap-943	21	28	detector	detector	NOUN
ap-943	21	29	.	.	PUNCT
ap-943	22	1	the	the	DET
ap-943	22	2	photoluminescence	photoluminescence	NOUN
ap-943	22	3	measurement	measurement	NOUN
ap-943	22	4	was	be	AUX
ap-943	22	5	carried	carry	VERB
ap-943	22	6	out	out	ADP
ap-943	22	7	at	at	ADP
ap-943	22	8	three	three	NUM
ap-943	22	9	excitation	excitation	NOUN
ap-943	22	10	wavelengths	wavelength	NOUN
ap-943	22	11	:	:	PUNCT
ap-943	22	12	�	�	PROPN
ap-943	22	13	an	an	DET
ap-943	22	14	ila-120	ila-120	PROPN
ap-943	22	15	ar	ar	NOUN
ap-943	22	16	laser	laser	NOUN
ap-943	22	17	operating	operate	VERB
ap-943	22	18	at	at	ADP
ap-943	22	19	�	�	PROPN
ap-943	22	20	ex	ex	X
ap-943	22	21	�	�	PROPN
ap-943	22	22	488	488	NUM
ap-943	22	23	nm	nm	PROPN
ap-943	22	24	,	,	PUNCT
ap-943	22	25	eex	eex	PROPN
ap-943	22	26	�	�	PROPN
ap-943	22	27	100	100	NUM
ap-943	22	28	mw	mw	PROPN
ap-943	22	29	,	,	PUNCT
ap-943	22	30	(	(	PUNCT
ap-943	22	31	300	300	NUM
ap-943	22	32	k	k	NOUN
ap-943	22	33	)	)	PUNCT
ap-943	22	34	.	.	PUNCT
ap-943	23	1	�	�	PROPN
ap-943	23	2	ar	ar	PROPN
ap-943	23	3	lasers	laser	NOUN
ap-943	23	4	operating	operate	VERB
ap-943	23	5	at	at	ADP
ap-943	23	6	�	�	PROPN
ap-943	23	7	ex	ex	X
ap-943	23	8	�	�	PROPN
ap-943	23	9	514.5	514.5	NUM
ap-943	23	10	nm	nm	PROPN
ap-943	23	11	,	,	PUNCT
ap-943	23	12	eex	eex	PROPN
ap-943	23	13	�	�	PROPN
ap-943	23	14	300	300	NUM
ap-943	23	15	mw	mw	NOUN
ap-943	23	16	,	,	PUNCT
ap-943	23	17	(	(	PUNCT
ap-943	23	18	4	4	NUM
ap-943	23	19	k	k	NOUN
ap-943	23	20	)	)	PUNCT
ap-943	23	21	.	.	PUNCT
ap-943	24	1	�	�	PROPN
ap-943	24	2	a	a	DET
ap-943	24	3	semiconductor	semiconductor	NOUN
ap-943	24	4	laser	laser	NOUN
ap-943	24	5	p4300	p4300	NUM
ap-943	24	6	operating	operate	VERB
ap-943	24	7	at	at	ADP
ap-943	24	8	�	�	PROPN
ap-943	24	9	ex	ex	X
ap-943	24	10	�	�	PROPN
ap-943	24	11	980	980	NUM
ap-943	24	12	nm	nm	NOUN
ap-943	24	13	,	,	PUNCT
ap-943	24	14	e	e	PROPN
ap-943	24	15	ex	ex	X
ap-943	24	16	�	�	PROPN
ap-943	24	17	500	500	NUM
ap-943	24	18	mw	mw	NOUN
ap-943	24	19	,	,	PUNCT
ap-943	24	20	(	(	PUNCT
ap-943	24	21	300	300	NUM
ap-943	24	22	k	k	NOUN
ap-943	24	23	)	)	PUNCT
ap-943	24	24	.	.	PUNCT
ap-943	25	1	the	the	DET
ap-943	25	2	feu62	feu62	PROPN
ap-943	25	3	photocell	photocell	NOUN
ap-943	25	4	was	be	AUX
ap-943	25	5	used	use	VERB
ap-943	25	6	for	for	ADP
ap-943	25	7	detecting	detect	VERB
ap-943	25	8	the	the	DET
ap-943	25	9	wavelength	wavelength	NOUN
ap-943	25	10	from	from	ADP
ap-943	25	11	500	500	NUM
ap-943	25	12	to	to	PART
ap-943	25	13	1000	1000	NUM
ap-943	25	14	nm	nm	NOUN
ap-943	25	15	,	,	PUNCT
ap-943	25	16	while	while	SCONJ
ap-943	25	17	a	a	DET
ap-943	25	18	ge	ge	PROPN
ap-943	25	19	detector	detector	NOUN
ap-943	25	20	was	be	AUX
ap-943	25	21	used	use	VERB
ap-943	25	22	for	for	ADP
ap-943	25	23	the	the	DET
ap-943	25	24	wavelength	wavelength	NOUN
ap-943	25	25	from	from	ADP
ap-943	25	26	1000	1000	NUM
ap-943	25	27	nm	nm	NOUN
ap-943	25	28	to	to	ADP
ap-943	25	29	1600	1600	NUM
ap-943	25	30	nm	nm	NOUN
ap-943	25	31	.	.	PROPN
ap-943	25	32	3	3	NUM
ap-943	25	33	sample	sample	NOUN
ap-943	25	34	fabrication	fabrication	NOUN
ap-943	25	35	and	and	CCONJ
ap-943	25	36	results	result	VERB
ap-943	25	37	erbium	erbium	NOUN
ap-943	25	38	containing	contain	VERB
ap-943	25	39	carbon	carbon	NOUN
ap-943	25	40	thin	thin	ADJ
ap-943	25	41	films	film	NOUN
ap-943	25	42	were	be	AUX
ap-943	25	43	deposited	deposit	VERB
ap-943	25	44	using	use	VERB
ap-943	25	45	three	three	NUM
ap-943	25	46	different	different	ADJ
ap-943	25	47	procedures	procedure	NOUN
ap-943	25	48	:	:	PUNCT
ap-943	25	49	�	�	NOUN
ap-943	25	50	sputtering	sputtering	NOUN
ap-943	25	51	from	from	ADP
ap-943	25	52	carbon	carbon	NOUN
ap-943	25	53	targets	target	NOUN
ap-943	25	54	with	with	ADP
ap-943	25	55	built	build	VERB
ap-943	25	56	-	-	PUNCT
ap-943	25	57	in	in	ADP
ap-943	25	58	metallic	metallic	ADJ
ap-943	25	59	erbium	erbium	NOUN
ap-943	25	60	,	,	PUNCT
ap-943	25	61	36	36	NUM
ap-943	25	62	©	©	PROPN
ap-943	25	63	czech	czech	PROPN
ap-943	25	64	technical	technical	PROPN
ap-943	25	65	university	university	PROPN
ap-943	25	66	publishing	publishing	NOUN
ap-943	25	67	house	house	NOUN
ap-943	25	68	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-943	25	69	acta	acta	PROPN
ap-943	25	70	polytechnica	polytechnica	PROPN
ap-943	25	71	vol	vol	NOUN
ap-943	25	72	.	.	PUNCT
ap-943	26	1	48	48	NUM
ap-943	26	2	no	no	NOUN
ap-943	26	3	.	.	PUNCT
ap-943	27	1	1/2008	1/2008	NUM
ap-943	27	2	properties	property	NOUN
ap-943	27	3	of	of	ADP
ap-943	27	4	erbium	erbium	NOUN
ap-943	27	5	doped	dope	VERB
ap-943	27	6	hydrogenated	hydrogenate	VERB
ap-943	27	7	amorphous	amorphous	ADJ
ap-943	27	8	carbon	carbon	NOUN
ap-943	27	9	layers	layer	NOUN
ap-943	27	10	fabricated	fabricate	VERB
ap-943	27	11	by	by	ADP
ap-943	27	12	sputtering	sputter	VERB
ap-943	27	13	and	and	CCONJ
ap-943	27	14	plasma	plasma	NOUN
ap-943	27	15	assisted	assist	VERB
ap-943	27	16	chemical	chemical	ADJ
ap-943	27	17	vapor	vapor	NOUN
ap-943	27	18	deposition	deposition	NOUN
ap-943	27	19	v.	v.	ADP
ap-943	27	20	prajzler	prajzler	NOUN
ap-943	27	21	,	,	PUNCT
ap-943	27	22	z.	z.	PROPN
ap-943	27	23	burian	burian	PROPN
ap-943	27	24	,	,	PUNCT
ap-943	27	25	v.	v.	PROPN
ap-943	27	26	jeřábek	jeřábek	PROPN
ap-943	27	27	,	,	PUNCT
ap-943	27	28	i.	i.	PROPN
ap-943	27	29	hüttel	hüttel	PROPN
ap-943	27	30	,	,	PUNCT
ap-943	27	31	j.	j.	PROPN
ap-943	27	32	špirková	špirková	PROPN
ap-943	27	33	,	,	PUNCT
ap-943	27	34	j.	j.	PROPN
ap-943	27	35	gurovič	gurovič	PROPN
ap-943	27	36	,	,	PUNCT
ap-943	27	37	j.	j.	PROPN
ap-943	27	38	oswald	oswald	PROPN
ap-943	27	39	,	,	PUNCT
ap-943	27	40	j.	j.	PROPN
ap-943	27	41	zavadil	zavadil	PROPN
ap-943	27	42	,	,	PUNCT
ap-943	27	43	v.	v.	ADP
ap-943	27	44	peřina	peřina	NOUN
ap-943	28	1	we	we	PRON
ap-943	28	2	report	report	VERB
ap-943	28	3	about	about	ADP
ap-943	28	4	properties	property	NOUN
ap-943	28	5	of	of	ADP
ap-943	28	6	carbon	carbon	NOUN
ap-943	28	7	layers	layer	NOUN
ap-943	28	8	doped	dope	VERB
ap-943	28	9	with	with	ADP
ap-943	28	10	er3	er3	PROPN
ap-943	28	11	�	�	PROPN
ap-943	28	12	ions	ion	NOUN
ap-943	28	13	fabricated	fabricate	VERB
ap-943	28	14	by	by	ADP
ap-943	28	15	plasma	plasma	NOUN
ap-943	28	16	assisted	assist	VERB
ap-943	28	17	chemical	chemical	ADJ
ap-943	28	18	vapor	vapor	NOUN
ap-943	28	19	deposition	deposition	NOUN
ap-943	28	20	(	(	PUNCT
ap-943	28	21	pacvd	pacvd	NOUN
ap-943	28	22	)	)	PUNCT
ap-943	28	23	and	and	CCONJ
ap-943	28	24	by	by	ADP
ap-943	28	25	sputtering	sputter	VERB
ap-943	28	26	on	on	ADP
ap-943	28	27	silicon	silicon	NOUN
ap-943	28	28	or	or	CCONJ
ap-943	28	29	glass	glass	NOUN
ap-943	28	30	substrates	substrate	NOUN
ap-943	28	31	.	.	PUNCT
ap-943	29	1	the	the	DET
ap-943	29	2	structure	structure	NOUN
ap-943	29	3	of	of	ADP
ap-943	29	4	the	the	DET
ap-943	29	5	samples	sample	NOUN
ap-943	29	6	was	be	AUX
ap-943	29	7	characterized	characterize	VERB
ap-943	29	8	by	by	ADP
ap-943	29	9	x	x	ADJ
ap-943	29	10	-	-	NOUN
ap-943	29	11	ray	ray	NOUN
ap-943	29	12	diffraction	diffraction	NOUN
ap-943	29	13	and	and	CCONJ
ap-943	29	14	their	their	PRON
ap-943	29	15	composition	composition	NOUN
ap-943	29	16	was	be	AUX
ap-943	29	17	determined	determine	VERB
ap-943	29	18	by	by	ADP
ap-943	29	19	rutherford	rutherford	PROPN
ap-943	29	20	backscattering	backscattering	NOUN
ap-943	29	21	spectroscopy	spectroscopy	NOUN
ap-943	29	22	and	and	CCONJ
ap-943	29	23	elastic	elastic	ADJ
ap-943	29	24	recoil	recoil	NOUN
ap-943	29	25	detection	detection	NOUN
ap-943	29	26	analysis	analysis	NOUN
ap-943	29	27	.	.	PUNCT
ap-943	30	1	the	the	DET
ap-943	30	2	absorbance	absorbance	NOUN
ap-943	30	3	spectrum	spectrum	NOUN
ap-943	30	4	was	be	AUX
ap-943	30	5	taken	take	VERB
ap-943	30	6	in	in	ADP
ap-943	30	7	the	the	DET
ap-943	30	8	spectral	spectral	ADJ
ap-943	30	9	range	range	NOUN
ap-943	30	10	from	from	ADP
ap-943	30	11	400	400	NUM
ap-943	30	12	nm	nm	NOUN
ap-943	30	13	to	to	ADP
ap-943	30	14	600	600	NUM
ap-943	30	15	nm	nm	NOUN
ap-943	30	16	.	.	PUNCT
ap-943	31	1	photoluminescence	photoluminescence	NOUN
ap-943	31	2	spectra	spectra	NOUN
ap-943	31	3	were	be	AUX
ap-943	31	4	obtained	obtain	VERB
ap-943	31	5	using	use	VERB
ap-943	31	6	two	two	NUM
ap-943	31	7	types	type	NOUN
ap-943	31	8	of	of	ADP
ap-943	31	9	ar	ar	NOUN
ap-943	31	10	laser	laser	NOUN
ap-943	31	11	(	(	PUNCT
ap-943	31	12	�	�	PROPN
ap-943	31	13	ex	ex	X
ap-943	31	14	�	�	PROPN
ap-943	31	15	514.5	514.5	NUM
ap-943	31	16	nm	nm	PROPN
ap-943	31	17	,	,	PUNCT
ap-943	31	18	�	�	PROPN
ap-943	31	19	ex	ex	X
ap-943	31	20	�	�	PROPN
ap-943	31	21	488	488	NUM
ap-943	31	22	nm	nm	NOUN
ap-943	31	23	)	)	PUNCT
ap-943	31	24	and	and	CCONJ
ap-943	31	25	also	also	ADV
ap-943	31	26	using	use	VERB
ap-943	31	27	a	a	DET
ap-943	31	28	semiconductor	semiconductor	NOUN
ap-943	31	29	laser	laser	NOUN
ap-943	31	30	(	(	PUNCT
ap-943	31	31	�	�	PROPN
ap-943	31	32	ex	ex	X
ap-943	31	33	�	�	PROPN
ap-943	31	34	980	980	NUM
ap-943	31	35	nm	nm	NOUN
ap-943	31	36	)	)	PUNCT
ap-943	31	37	.	.	PUNCT
ap-943	32	1	samples	sample	NOUN
ap-943	32	2	fabricated	fabricate	VERB
ap-943	32	3	by	by	ADP
ap-943	32	4	magnetron	magnetron	NOUN
ap-943	32	5	sputtering	sputtering	NOUN
ap-943	32	6	exhibited	exhibit	VERB
ap-943	32	7	typical	typical	ADJ
ap-943	32	8	emission	emission	NOUN
ap-943	32	9	at	at	ADP
ap-943	32	10	1530	1530	NUM
ap-943	32	11	nm	nm	NOUN
ap-943	32	12	when	when	SCONJ
ap-943	32	13	pumped	pump	VERB
ap-943	32	14	at	at	ADP
ap-943	32	15	514.5	514.5	NUM
ap-943	32	16	nm	nm	NOUN
ap-943	32	17	.	.	PUNCT
ap-943	33	1	keywords	keyword	NOUN
ap-943	33	2	:	:	PUNCT
ap-943	33	3	carbon	carbon	NOUN
ap-943	33	4	layers	layer	NOUN
ap-943	33	5	,	,	PUNCT
ap-943	33	6	erbium	erbium	NOUN
ap-943	33	7	,	,	PUNCT
ap-943	33	8	pacvd	pacvd	NOUN
ap-943	33	9	,	,	PUNCT
ap-943	33	10	sputtering	sputtering	NOUN
ap-943	33	11	,	,	PUNCT
ap-943	33	12	photoluminescence	photoluminescence	NOUN
ap-943	33	13	�	�	PROPN
ap-943	33	14	pacvd	pacvd	NOUN
ap-943	33	15	growth	growth	NOUN
ap-943	33	16	of	of	ADP
ap-943	33	17	carbon	carbon	NOUN
ap-943	33	18	thin	thin	ADJ
ap-943	33	19	films	film	NOUN
ap-943	33	20	from	from	ADP
ap-943	33	21	a	a	DET
ap-943	33	22	gas	gas	NOUN
ap-943	33	23	mixture	mixture	NOUN
ap-943	33	24	(	(	PUNCT
ap-943	33	25	h2	h2	PROPN
ap-943	33	26	�	�	PROPN
ap-943	33	27	ar	ar	PROPN
ap-943	33	28	�	�	PROPN
ap-943	33	29	erbium	erbium	NOUN
ap-943	33	30	isopropoxide	isopropoxide	NOUN
ap-943	33	31	or	or	CCONJ
ap-943	33	32	ch4	ch4	NOUN
ap-943	33	33	�	�	NOUN
ap-943	33	34	erbium	erbium	NOUN
ap-943	33	35	tris	tris	NOUN
ap-943	33	36	)	)	PUNCT
ap-943	33	37	,	,	PUNCT
ap-943	33	38	�	�	PROPN
ap-943	33	39	magnetron	magnetron	NOUN
ap-943	33	40	sputtering	sputtering	NOUN
ap-943	33	41	placing	place	VERB
ap-943	33	42	metallic	metallic	ADJ
ap-943	33	43	erbium	erbium	NOUN
ap-943	33	44	on	on	ADP
ap-943	33	45	the	the	DET
ap-943	33	46	carbon	carbon	NOUN
ap-943	33	47	target	target	NOUN
ap-943	33	48	.	.	PUNCT
ap-943	34	1	the	the	DET
ap-943	34	2	structures	structure	NOUN
ap-943	34	3	of	of	ADP
ap-943	34	4	the	the	DET
ap-943	34	5	deposited	deposit	VERB
ap-943	34	6	carbon	carbon	NOUN
ap-943	34	7	layers	layer	NOUN
ap-943	34	8	were	be	AUX
ap-943	34	9	then	then	ADV
ap-943	34	10	investigated	investigate	VERB
ap-943	34	11	by	by	ADP
ap-943	34	12	xrd	xrd	NOUN
ap-943	34	13	(	(	PUNCT
ap-943	34	14	x	x	NOUN
ap-943	34	15	-	-	NOUN
ap-943	34	16	ray	ray	NOUN
ap-943	34	17	diffraction	diffraction	NOUN
ap-943	34	18	)	)	PUNCT
ap-943	34	19	and	and	CCONJ
ap-943	34	20	it	it	PRON
ap-943	34	21	was	be	AUX
ap-943	34	22	found	find	VERB
ap-943	34	23	that	that	SCONJ
ap-943	34	24	all	all	PRON
ap-943	34	25	of	of	ADP
ap-943	34	26	them	they	PRON
ap-943	34	27	were	be	AUX
ap-943	34	28	amorphous	amorphous	ADJ
ap-943	34	29	.	.	PUNCT
ap-943	35	1	3.1	3.1	NUM
ap-943	35	2	growth	growth	NOUN
ap-943	35	3	of	of	ADP
ap-943	35	4	erbium	erbium	NOUN
ap-943	35	5	doped	dope	VERB
ap-943	35	6	carbon	carbon	NOUN
ap-943	35	7	thin	thin	ADJ
ap-943	35	8	films	film	NOUN
ap-943	35	9	using	use	VERB
ap-943	35	10	sputtering	sputter	VERB
ap-943	35	11	the	the	DET
ap-943	35	12	first	first	ADJ
ap-943	35	13	procedure	procedure	NOUN
ap-943	35	14	for	for	ADP
ap-943	35	15	depositing	deposit	VERB
ap-943	35	16	erbium	erbium	NOUN
ap-943	35	17	doped	dope	VERB
ap-943	35	18	carbon	carbon	NOUN
ap-943	35	19	thin	thin	ADJ
ap-943	35	20	films	film	NOUN
ap-943	35	21	was	be	AUX
ap-943	35	22	sputtering	sputter	VERB
ap-943	35	23	using	use	VERB
ap-943	35	24	a	a	DET
ap-943	35	25	carbon	carbon	NOUN
ap-943	35	26	(	(	PUNCT
ap-943	35	27	99.8	99.8	NUM
ap-943	35	28	%	%	NOUN
ap-943	35	29	)	)	PUNCT
ap-943	35	30	target	target	NOUN
ap-943	35	31	that	that	PRON
ap-943	35	32	contained	contain	VERB
ap-943	35	33	pieces	piece	NOUN
ap-943	35	34	of	of	ADP
ap-943	35	35	metallic	metallic	ADJ
ap-943	35	36	erbium	erbium	NOUN
ap-943	35	37	.	.	PUNCT
ap-943	36	1	the	the	DET
ap-943	36	2	target	target	NOUN
ap-943	36	3	was	be	AUX
ap-943	36	4	made	make	VERB
ap-943	36	5	by	by	ADP
ap-943	36	6	pressing	press	VERB
ap-943	36	7	milled	mill	VERB
ap-943	36	8	graphite	graphite	NOUN
ap-943	36	9	and	and	CCONJ
ap-943	36	10	erbium	erbium	NOUN
ap-943	36	11	metal	metal	NOUN
ap-943	36	12	(	(	PUNCT
ap-943	36	13	7	7	NUM
ap-943	36	14	g	g	PROPN
ap-943	36	15	c	c	PROPN
ap-943	36	16	�	�	PROPN
ap-943	36	17	0.8	0.8	NUM
ap-943	36	18	g	g	NOUN
ap-943	36	19	er	er	INTJ
ap-943	36	20	)	)	PUNCT
ap-943	36	21	applying	apply	VERB
ap-943	36	22	different	different	ADJ
ap-943	36	23	pressures	pressure	NOUN
ap-943	36	24	(	(	PUNCT
ap-943	36	25	100	100	NUM
ap-943	36	26	mpa	mpa	PROPN
ap-943	36	27	�	�	PROPN
ap-943	36	28	cm	cm	NOUN
ap-943	36	29	�	�	PROPN
ap-943	36	30	2	2	NUM
ap-943	36	31	and	and	CCONJ
ap-943	36	32	200	200	NUM
ap-943	36	33	mpa	mpa	PROPN
ap-943	36	34	�	�	PROPN
ap-943	36	35	cm	cm	NOUN
ap-943	36	36	�	�	PROPN
ap-943	36	37	2	2	NUM
ap-943	36	38	)	)	PUNCT
ap-943	36	39	.	.	PUNCT
ap-943	37	1	the	the	DET
ap-943	37	2	final	final	ADJ
ap-943	37	3	targets	target	NOUN
ap-943	37	4	were	be	AUX
ap-943	37	5	5	5	NUM
ap-943	37	6	cm	cm	NOUN
ap-943	37	7	in	in	ADP
ap-943	37	8	diameter	diameter	NOUN
ap-943	37	9	.	.	PUNCT
ap-943	38	1	deposition	deposition	NOUN
ap-943	38	2	was	be	AUX
ap-943	38	3	performed	perform	VERB
ap-943	38	4	in	in	ADP
ap-943	38	5	an	an	DET
ap-943	38	6	ar	ar	NOUN
ap-943	38	7	atmosphere	atmosphere	NOUN
ap-943	38	8	at	at	ADP
ap-943	38	9	a	a	DET
ap-943	38	10	pressure	pressure	NOUN
ap-943	38	11	of	of	ADP
ap-943	38	12	12	12	NUM
ap-943	38	13	pa	pa	NOUN
ap-943	38	14	for	for	ADP
ap-943	38	15	20	20	NUM
ap-943	38	16	min	min	NOUN
ap-943	38	17	.	.	PROPN
ap-943	38	18	voltage	voltage	NOUN
ap-943	38	19	on	on	ADP
ap-943	38	20	the	the	DET
ap-943	38	21	grounded	ground	VERB
ap-943	38	22	electrodes	electrode	NOUN
ap-943	38	23	was	be	AUX
ap-943	38	24	�	�	NOUN
ap-943	38	25	75	75	NUM
ap-943	38	26	v	v	NOUN
ap-943	38	27	and	and	CCONJ
ap-943	38	28	the	the	DET
ap-943	38	29	distance	distance	NOUN
ap-943	38	30	of	of	ADP
ap-943	38	31	the	the	DET
ap-943	38	32	electrodes	electrode	NOUN
ap-943	38	33	was	be	AUX
ap-943	38	34	3	3	NUM
ap-943	38	35	cm	cm	NOUN
ap-943	38	36	.	.	PUNCT
ap-943	39	1	a	a	DET
ap-943	39	2	schema	schema	NOUN
ap-943	39	3	of	of	ADP
ap-943	39	4	the	the	DET
ap-943	39	5	experimental	experimental	ADJ
ap-943	39	6	set	set	NOUN
ap-943	39	7	-	-	PUNCT
ap-943	39	8	up	up	NOUN
ap-943	39	9	is	be	AUX
ap-943	39	10	shown	show	VERB
ap-943	39	11	in	in	ADP
ap-943	39	12	fig	fig	NOUN
ap-943	39	13	.	.	PUNCT
ap-943	40	1	1	1	X
ap-943	40	2	.	.	X
ap-943	40	3	the	the	DET
ap-943	40	4	composition	composition	NOUN
ap-943	40	5	of	of	ADP
ap-943	40	6	the	the	DET
ap-943	40	7	carbon	carbon	NOUN
ap-943	40	8	layers	layer	NOUN
ap-943	40	9	determined	determine	VERB
ap-943	40	10	by	by	ADP
ap-943	40	11	a	a	DET
ap-943	40	12	nuclear	nuclear	ADJ
ap-943	40	13	chemical	chemical	NOUN
ap-943	40	14	analysis	analysis	NOUN
ap-943	40	15	as	as	SCONJ
ap-943	40	16	rbs	rbs	PROPN
ap-943	40	17	and	and	CCONJ
ap-943	40	18	erda	erda	PROPN
ap-943	40	19	is	be	AUX
ap-943	40	20	given	give	VERB
ap-943	40	21	in	in	ADP
ap-943	40	22	table	table	NOUN
ap-943	40	23	1	1	NUM
ap-943	40	24	.	.	PUNCT
ap-943	41	1	the	the	DET
ap-943	41	2	actual	actual	ADJ
ap-943	41	3	content	content	NOUN
ap-943	41	4	of	of	ADP
ap-943	41	5	erbium	erbium	NOUN
ap-943	41	6	ions	ion	NOUN
ap-943	41	7	depends	depend	VERB
ap-943	41	8	on	on	ADP
ap-943	41	9	the	the	DET
ap-943	41	10	fabrication	fabrication	NOUN
ap-943	41	11	parameters	parameter	NOUN
ap-943	41	12	,	,	PUNCT
ap-943	41	13	and	and	CCONJ
ap-943	41	14	the	the	DET
ap-943	41	15	maximum	maximum	ADJ
ap-943	41	16	amount	amount	NOUN
ap-943	41	17	obtained	obtain	VERB
ap-943	41	18	after	after	ADP
ap-943	41	19	optimization	optimization	NOUN
ap-943	41	20	was	be	AUX
ap-943	41	21	0.02	0.02	NUM
ap-943	41	22	at	at	ADP
ap-943	41	23	%	%	NOUN
ap-943	41	24	.	.	PUNCT
ap-943	42	1	however	however	ADV
ap-943	42	2	,	,	PUNCT
ap-943	42	3	this	this	DET
ap-943	42	4	content	content	NOUN
ap-943	42	5	was	be	AUX
ap-943	42	6	still	still	ADV
ap-943	42	7	too	too	ADV
ap-943	42	8	low	low	ADJ
ap-943	42	9	for	for	ADP
ap-943	42	10	photoluminescence	photoluminescence	NOUN
ap-943	42	11	at	at	ADP
ap-943	42	12	1530	1530	NUM
ap-943	42	13	nm	nm	NOUN
ap-943	42	14	.	.	PROPN
ap-943	42	15	3.2	3.2	NUM
ap-943	42	16	growth	growth	NOUN
ap-943	42	17	of	of	ADP
ap-943	42	18	erbium	erbium	NOUN
ap-943	42	19	doped	dope	VERB
ap-943	42	20	carbon	carbon	NOUN
ap-943	42	21	thin	thin	ADJ
ap-943	42	22	films	film	NOUN
ap-943	42	23	using	use	VERB
ap-943	42	24	pacvd	pacvd	NOUN
ap-943	42	25	here	here	ADV
ap-943	42	26	“	"	PUNCT
ap-943	42	27	erbium	erbium	NOUN
ap-943	42	28	isopropoxide	isopropoxide	NOUN
ap-943	42	29	”	"	PUNCT
ap-943	42	30	(	(	PUNCT
ap-943	42	31	c9h21ero3	c9h21ero3	NOUN
ap-943	42	32	)	)	PUNCT
ap-943	42	33	was	be	AUX
ap-943	42	34	used	use	VERB
ap-943	42	35	for	for	ADP
ap-943	42	36	the	the	DET
ap-943	42	37	first	first	ADJ
ap-943	42	38	time	time	NOUN
ap-943	42	39	as	as	ADP
ap-943	42	40	the	the	DET
ap-943	42	41	erbium	erbium	NOUN
ap-943	42	42	source	source	NOUN
ap-943	42	43	.	.	PUNCT
ap-943	43	1	the	the	DET
ap-943	43	2	fabrication	fabrication	NOUN
ap-943	43	3	process	process	NOUN
ap-943	43	4	was	be	AUX
ap-943	43	5	based	base	VERB
ap-943	43	6	on	on	ADP
ap-943	43	7	modifying	modify	VERB
ap-943	43	8	the	the	DET
ap-943	43	9	reactor	reactor	NOUN
ap-943	43	10	,	,	PUNCT
ap-943	43	11	as	as	SCONJ
ap-943	43	12	shown	show	VERB
ap-943	43	13	in	in	ADP
ap-943	43	14	fig	fig	NOUN
ap-943	43	15	.	.	PUNCT
ap-943	44	1	2	2	NUM
ap-943	44	2	(	(	PUNCT
ap-943	44	3	compare	compare	VERB
ap-943	44	4	with	with	ADP
ap-943	44	5	fig	fig	NOUN
ap-943	44	6	.	.	PUNCT
ap-943	45	1	1	1	NUM
ap-943	45	2	)	)	PUNCT
ap-943	45	3	.	.	PUNCT
ap-943	46	1	the	the	DET
ap-943	46	2	deposition	deposition	NOUN
ap-943	46	3	of	of	ADP
ap-943	46	4	erbium	erbium	NOUN
ap-943	46	5	doped	dope	VERB
ap-943	46	6	carbon	carbon	NOUN
ap-943	46	7	layers	layer	NOUN
ap-943	46	8	was	be	AUX
ap-943	46	9	carried	carry	VERB
ap-943	46	10	out	out	ADP
ap-943	46	11	using	use	VERB
ap-943	46	12	methane	methane	NOUN
ap-943	46	13	(	(	PUNCT
ap-943	46	14	flow	flow	NOUN
ap-943	46	15	of	of	ADP
ap-943	46	16	50	50	NUM
ap-943	46	17	cm3	cm3	NUM
ap-943	46	18	�	�	PROPN
ap-943	46	19	min	min	NOUN
ap-943	46	20	�	�	PROPN
ap-943	46	21	1	1	NUM
ap-943	46	22	)	)	PUNCT
ap-943	46	23	and	and	CCONJ
ap-943	46	24	argon	argon	NOUN
ap-943	46	25	(	(	PUNCT
ap-943	46	26	flow	flow	NOUN
ap-943	46	27	of	of	ADP
ap-943	46	28	30	30	NUM
ap-943	46	29	cm3	cm3	NUM
ap-943	46	30	�	�	PROPN
ap-943	46	31	min	min	NOUN
ap-943	46	32	�	�	PROPN
ap-943	46	33	1	1	NUM
ap-943	46	34	)	)	PUNCT
ap-943	46	35	.	.	PUNCT
ap-943	47	1	the	the	DET
ap-943	47	2	erbium	erbium	NOUN
ap-943	47	3	isopropoxide	isopropoxide	NOUN
ap-943	47	4	(	(	PUNCT
ap-943	47	5	sigma	sigma	PROPN
ap-943	47	6	-	-	PUNCT
ap-943	47	7	aldrich	aldrich	NOUN
ap-943	47	8	)	)	PUNCT
ap-943	47	9	vapor	vapor	NOUN
ap-943	47	10	was	be	AUX
ap-943	47	11	added	add	VERB
ap-943	47	12	into	into	ADP
ap-943	47	13	this	this	DET
ap-943	47	14	gas	gas	NOUN
ap-943	47	15	mixture	mixture	NOUN
ap-943	47	16	at	at	ADP
ap-943	47	17	a	a	DET
ap-943	47	18	temperature	temperature	NOUN
ap-943	47	19	from	from	ADP
ap-943	47	20	240	240	NUM
ap-943	47	21	°	°	NOUN
ap-943	47	22	c	c	NOUN
ap-943	47	23	to	to	ADP
ap-943	47	24	260	260	NUM
ap-943	47	25	°	°	NOUN
ap-943	47	26	c	c	NOUN
ap-943	47	27	and	and	CCONJ
ap-943	47	28	injected	inject	VERB
ap-943	47	29	into	into	ADP
ap-943	47	30	the	the	DET
ap-943	47	31	reactor	reactor	NOUN
ap-943	47	32	by	by	ADP
ap-943	47	33	flow	flow	NOUN
ap-943	47	34	of	of	ADP
ap-943	47	35	methane	methane	NOUN
ap-943	47	36	and	and	CCONJ
ap-943	47	37	argon	argon	NOUN
ap-943	47	38	.	.	PUNCT
ap-943	48	1	the	the	DET
ap-943	48	2	bias	bias	NOUN
ap-943	48	3	applied	apply	VERB
ap-943	48	4	at	at	ADP
ap-943	48	5	one	one	NUM
ap-943	48	6	of	of	ADP
ap-943	48	7	the	the	DET
ap-943	48	8	electrodes	electrode	NOUN
ap-943	48	9	was	be	AUX
ap-943	48	10	�	�	NOUN
ap-943	48	11	100	100	NUM
ap-943	48	12	v	v	NOUN
ap-943	48	13	and	and	CCONJ
ap-943	48	14	the	the	DET
ap-943	48	15	power	power	NOUN
ap-943	48	16	density	density	NOUN
ap-943	48	17	was	be	AUX
ap-943	48	18	from	from	ADP
ap-943	48	19	0.31	0.31	NUM
ap-943	48	20	w	w	PROPN
ap-943	48	21	�	�	PROPN
ap-943	48	22	cm	cm	NOUN
ap-943	48	23	�	�	PROPN
ap-943	48	24	2	2	NUM
ap-943	48	25	to	to	ADP
ap-943	48	26	0.35	0.35	NUM
ap-943	48	27	w	w	PROPN
ap-943	48	28	�	�	PROPN
ap-943	48	29	cm	cm	NOUN
ap-943	48	30	�	�	PROPN
ap-943	48	31	2	2	NUM
ap-943	48	32	.	.	PUNCT
ap-943	49	1	the	the	DET
ap-943	49	2	deposition	deposition	NOUN
ap-943	49	3	rate	rate	NOUN
ap-943	49	4	was	be	AUX
ap-943	49	5	in	in	ADP
ap-943	49	6	the	the	DET
ap-943	49	7	©	©	PROPN
ap-943	49	8	czech	czech	PROPN
ap-943	49	9	technical	technical	PROPN
ap-943	49	10	university	university	PROPN
ap-943	49	11	publishing	publishing	NOUN
ap-943	49	12	house	house	NOUN
ap-943	49	13	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-943	49	14	37	37	NUM
ap-943	49	15	acta	acta	PROPN
ap-943	49	16	polytechnica	polytechnica	PROPN
ap-943	49	17	vol	vol	NOUN
ap-943	49	18	.	.	PUNCT
ap-943	50	1	48	48	NUM
ap-943	50	2	no	no	NOUN
ap-943	50	3	.	.	PUNCT
ap-943	51	1	1/2008	1/2008	NUM
ap-943	51	2	vacuum	vacuum	NOUN
ap-943	51	3	gauge	gauge	NOUN
ap-943	51	4	substrate	substrate	NOUN
ap-943	51	5	pump	pump	NOUN
ap-943	51	6	arcarbon	arcarbon	NOUN
ap-943	51	7	target	target	NOUN
ap-943	51	8	vacuum	vacuum	PROPN
ap-943	51	9	chamber	chamber	PROPN
ap-943	51	10	matching	matching	PROPN
ap-943	51	11	unit	unit	NOUN
ap-943	51	12	rf	rf	NOUN
ap-943	51	13	power	power	NOUN
ap-943	51	14	13.56	13.56	NUM
ap-943	51	15	mhz	mhz	NOUN
ap-943	51	16	(	(	PUNCT
ap-943	51	17	7	7	NUM
ap-943	51	18	g	g	NOUN
ap-943	51	19	c	c	NOUN
ap-943	51	20	+	+	CCONJ
ap-943	51	21	0.8	0.8	NUM
ap-943	51	22	g	g	PROPN
ap-943	51	23	er	er	INTJ
ap-943	51	24	)	)	PUNCT
ap-943	51	25	fig	fig	NOUN
ap-943	51	26	.	.	PUNCT
ap-943	52	1	1	1	NUM
ap-943	52	2	:	:	PUNCT
ap-943	52	3	schema	schema	NOUN
ap-943	52	4	of	of	ADP
ap-943	52	5	the	the	DET
ap-943	52	6	sputtering	sputtering	ADJ
ap-943	52	7	set	set	NOUN
ap-943	52	8	-	-	PUNCT
ap-943	52	9	up	up	NOUN
ap-943	52	10	(	(	PUNCT
ap-943	52	11	see	see	VERB
ap-943	52	12	above	above	ADV
ap-943	52	13	)	)	PUNCT
ap-943	52	14	methods	method	NOUN
ap-943	52	15	used	use	VERB
ap-943	52	16	for	for	ADP
ap-943	52	17	fabrication	fabrication	NOUN
ap-943	52	18	of	of	ADP
ap-943	52	19	carbon	carbon	NOUN
ap-943	52	20	layers	layer	NOUN
ap-943	53	1	c	c	NOUN
ap-943	53	2	h	h	NOUN
ap-943	54	1	o	o	INTJ
ap-943	54	2	er	er	INTJ
ap-943	54	3	(	(	PUNCT
ap-943	54	4	at	at	ADP
ap-943	54	5	%	%	NOUN
ap-943	54	6	)	)	PUNCT
ap-943	54	7	(	(	PUNCT
ap-943	54	8	at	at	ADP
ap-943	54	9	%	%	NOUN
ap-943	54	10	)	)	PUNCT
ap-943	54	11	(	(	PUNCT
ap-943	54	12	at	at	ADP
ap-943	54	13	%	%	NOUN
ap-943	54	14	)	)	PUNCT
ap-943	54	15	(	(	PUNCT
ap-943	54	16	at	at	ADP
ap-943	54	17	%	%	NOUN
ap-943	54	18	)	)	PUNCT
ap-943	54	19	growth	growth	NOUN
ap-943	54	20	of	of	ADP
ap-943	54	21	erbium	erbium	NOUN
ap-943	54	22	doped	dope	VERB
ap-943	54	23	carbon	carbon	NOUN
ap-943	54	24	thin	thin	ADJ
ap-943	54	25	films	film	NOUN
ap-943	54	26	using	use	VERB
ap-943	54	27	sputtering	sputter	VERB
ap-943	54	28	(	(	PUNCT
ap-943	54	29	7	7	NUM
ap-943	54	30	g	g	NOUN
ap-943	54	31	c	c	PROPN
ap-943	54	32	�	�	PROPN
ap-943	54	33	0.8	0.8	NUM
ap-943	54	34	g	g	NOUN
ap-943	54	35	er	er	INTJ
ap-943	54	36	)	)	PUNCT
ap-943	54	37	52	52	NUM
ap-943	54	38	45	45	NUM
ap-943	54	39	3	3	NUM
ap-943	54	40	0.02	0.02	NUM
ap-943	54	41	growth	growth	NOUN
ap-943	54	42	of	of	ADP
ap-943	54	43	erbium	erbium	NOUN
ap-943	54	44	doped	dope	VERB
ap-943	54	45	carbon	carbon	NOUN
ap-943	54	46	thin	thin	ADJ
ap-943	54	47	films	film	NOUN
ap-943	54	48	using	use	VERB
ap-943	54	49	pacvd	pacvd	NOUN
ap-943	54	50	(	(	PUNCT
ap-943	54	51	ch4	ch4	PROPN
ap-943	54	52	�	�	PROPN
ap-943	54	53	ar	ar	PROPN
ap-943	54	54	�	�	PROPN
ap-943	54	55	“erbium	“erbium	NOUN
ap-943	54	56	isopropoxide	isopropoxide	NOUN
ap-943	54	57	”	"	PUNCT
ap-943	54	58	)	)	PUNCT
ap-943	54	59	65	65	NUM
ap-943	54	60	32	32	NUM
ap-943	54	61	3	3	NUM
ap-943	54	62	0	0	NUM
ap-943	54	63	growth	growth	NOUN
ap-943	54	64	of	of	ADP
ap-943	54	65	erbium	erbium	NOUN
ap-943	54	66	doped	dope	VERB
ap-943	54	67	carbon	carbon	NOUN
ap-943	54	68	thin	thin	ADJ
ap-943	54	69	films	film	NOUN
ap-943	54	70	using	use	VERB
ap-943	54	71	pacvd	pacvd	NOUN
ap-943	54	72	(	(	PUNCT
ap-943	54	73	ch4	ch4	PROPN
ap-943	54	74	�	�	PROPN
ap-943	54	75	“erbium	“erbium	NOUN
ap-943	54	76	tris	tris	NOUN
ap-943	54	77	”	"	PUNCT
ap-943	54	78	)	)	PUNCT
ap-943	54	79	–	–	PUNCT
ap-943	54	80	position	position	NOUN
ap-943	54	81	1	1	NUM
ap-943	54	82	*	*	SYM
ap-943	54	83	51	51	NUM
ap-943	54	84	27	27	NUM
ap-943	54	85	15	15	NUM
ap-943	54	86	8.7	8.7	NUM
ap-943	54	87	growth	growth	NOUN
ap-943	54	88	of	of	ADP
ap-943	54	89	erbium	erbium	NOUN
ap-943	54	90	doped	dope	VERB
ap-943	54	91	carbon	carbon	NOUN
ap-943	54	92	thin	thin	ADJ
ap-943	54	93	films	film	NOUN
ap-943	54	94	using	use	VERB
ap-943	54	95	pacvd	pacvd	NOUN
ap-943	54	96	(	(	PUNCT
ap-943	54	97	ch4	ch4	PROPN
ap-943	54	98	�	�	PROPN
ap-943	54	99	“erbium	“erbium	NOUN
ap-943	54	100	tris	tris	NOUN
ap-943	54	101	”	"	PUNCT
ap-943	54	102	)	)	PUNCT
ap-943	54	103	position	position	NOUN
ap-943	54	104	2	2	NUM
ap-943	54	105	*	*	SYM
ap-943	54	106	61	61	NUM
ap-943	54	107	40	40	NUM
ap-943	54	108	5	5	NUM
ap-943	54	109	0.012	0.012	NUM
ap-943	54	110	growth	growth	NOUN
ap-943	54	111	of	of	ADP
ap-943	54	112	erbium	erbium	NOUN
ap-943	54	113	and	and	CCONJ
ap-943	54	114	ytterbium	ytterbium	NOUN
ap-943	54	115	doped	dope	VERB
ap-943	54	116	carbon	carbon	NOUN
ap-943	54	117	thin	thin	ADJ
ap-943	54	118	films	film	NOUN
ap-943	54	119	using	use	VERB
ap-943	54	120	magnetron	magnetron	NOUN
ap-943	54	121	sputtering	sputter	VERB
ap-943	54	122	73	73	NUM
ap-943	54	123	23	23	NUM
ap-943	54	124	4	4	NUM
ap-943	54	125	0.2–20	0.2–20	NOUN
ap-943	54	126	*	*	PUNCT
ap-943	54	127	*	*	PUNCT
ap-943	54	128	*	*	PUNCT
ap-943	54	129	for	for	ADP
ap-943	54	130	more	more	ADJ
ap-943	54	131	details	detail	NOUN
ap-943	54	132	see	see	VERB
ap-943	54	133	fig	fig	NOUN
ap-943	54	134	.	.	PUNCT
ap-943	55	1	3	3	NUM
ap-943	55	2	*	*	PUNCT
ap-943	55	3	*	*	AUX
ap-943	55	4	depending	depend	VERB
ap-943	55	5	on	on	ADP
ap-943	55	6	er	er	INTJ
ap-943	55	7	or	or	CCONJ
ap-943	55	8	er	er	INTJ
ap-943	55	9	�	�	NOUN
ap-943	55	10	yb	yb	PROPN
ap-943	55	11	powder	powder	NOUN
ap-943	55	12	laid	lay	VERB
ap-943	55	13	onto	onto	ADP
ap-943	55	14	the	the	DET
ap-943	55	15	top	top	NOUN
ap-943	55	16	of	of	ADP
ap-943	55	17	the	the	DET
ap-943	55	18	carbon	carbon	NOUN
ap-943	55	19	target	target	NOUN
ap-943	55	20	(	(	PUNCT
ap-943	55	21	see	see	VERB
ap-943	55	22	table	table	NOUN
ap-943	55	23	2	2	NUM
ap-943	55	24	)	)	PUNCT
ap-943	55	25	table	table	NOUN
ap-943	55	26	1	1	NUM
ap-943	55	27	:	:	PUNCT
ap-943	55	28	composition	composition	NOUN
ap-943	55	29	of	of	ADP
ap-943	55	30	erbium	erbium	NOUN
ap-943	55	31	-	-	PUNCT
ap-943	55	32	doped	dope	VERB
ap-943	55	33	carbon	carbon	NOUN
ap-943	55	34	samples	sample	NOUN
ap-943	55	35	as	as	SCONJ
ap-943	55	36	determined	determine	VERB
ap-943	55	37	by	by	ADP
ap-943	55	38	rutherford	rutherford	PROPN
ap-943	55	39	backscattering	backscatter	VERB
ap-943	55	40	analysis	analysis	NOUN
ap-943	55	41	and	and	CCONJ
ap-943	55	42	elastic	elastic	ADJ
ap-943	55	43	recoil	recoil	NOUN
ap-943	55	44	detection	detection	NOUN
ap-943	55	45	analysis	analysis	NOUN
ap-943	55	46	range	range	VERB
ap-943	55	47	from	from	ADP
ap-943	55	48	20	20	NUM
ap-943	55	49	nm	nm	PROPN
ap-943	55	50	�	�	PROPN
ap-943	55	51	min	min	NOUN
ap-943	55	52	�	�	PROPN
ap-943	55	53	1	1	NUM
ap-943	55	54	to	to	ADP
ap-943	55	55	22	22	NUM
ap-943	55	56	nm	nm	PROPN
ap-943	55	57	�	�	PROPN
ap-943	55	58	min	min	NOUN
ap-943	55	59	�	�	PROPN
ap-943	55	60	1	1	NUM
ap-943	55	61	.	.	PUNCT
ap-943	56	1	the	the	DET
ap-943	56	2	temperature	temperature	NOUN
ap-943	56	3	of	of	ADP
ap-943	56	4	the	the	DET
ap-943	56	5	silicon	silicon	NOUN
ap-943	56	6	substrates	substrate	NOUN
ap-943	56	7	varied	varied	ADJ
ap-943	56	8	from	from	ADP
ap-943	56	9	50	50	NUM
ap-943	56	10	°	°	NOUN
ap-943	56	11	c	c	NOUN
ap-943	56	12	to	to	ADP
ap-943	56	13	100	100	NUM
ap-943	56	14	°	°	NOUN
ap-943	56	15	c	c	NOUN
ap-943	56	16	.	.	PUNCT
ap-943	57	1	because	because	SCONJ
ap-943	57	2	the	the	DET
ap-943	57	3	deposited	deposit	VERB
ap-943	57	4	samples	sample	NOUN
ap-943	57	5	did	do	AUX
ap-943	57	6	not	not	PART
ap-943	57	7	contain	contain	VERB
ap-943	57	8	erbium	erbium	NOUN
ap-943	57	9	even	even	ADV
ap-943	57	10	after	after	ADP
ap-943	57	11	optimization	optimization	NOUN
ap-943	57	12	(	(	PUNCT
ap-943	57	13	for	for	ADP
ap-943	57	14	more	more	ADJ
ap-943	57	15	details	detail	NOUN
ap-943	57	16	see	see	VERB
ap-943	57	17	table	table	NOUN
ap-943	57	18	1	1	NUM
ap-943	57	19	)	)	PUNCT
ap-943	57	20	,	,	PUNCT
ap-943	57	21	another	another	DET
ap-943	57	22	erbium	erbium	NOUN
ap-943	57	23	source	source	NOUN
ap-943	57	24	had	have	VERB
ap-943	57	25	to	to	PART
ap-943	57	26	be	be	AUX
ap-943	57	27	searched	search	VERB
ap-943	57	28	for	for	ADP
ap-943	57	29	.	.	PUNCT
ap-943	58	1	chryssou	chryssou	PROPN
ap-943	59	1	and	and	CCONJ
ap-943	59	2	pitt	pitt	VERB
ap-943	60	1	[	[	X
ap-943	60	2	16	16	NUM
ap-943	60	3	]	]	PUNCT
ap-943	60	4	reported	report	VERB
ap-943	60	5	the	the	DET
ap-943	60	6	fabrication	fabrication	NOUN
ap-943	60	7	of	of	ADP
ap-943	60	8	erbium	erbium	NOUN
ap-943	60	9	doped	dope	VERB
ap-943	60	10	al2o3	al2o3	PROPN
ap-943	60	11	layers	layer	NOUN
ap-943	60	12	using	use	VERB
ap-943	60	13	pacvd	pacvd	NOUN
ap-943	60	14	.	.	PUNCT
ap-943	61	1	they	they	PRON
ap-943	61	2	used	use	VERB
ap-943	61	3	“	"	PUNCT
ap-943	61	4	erbium	erbium	NOUN
ap-943	61	5	tris	tris	NOUN
ap-943	61	6	”	"	PUNCT
ap-943	61	7	(	(	PUNCT
ap-943	61	8	er(thd)3	er(thd)3	ADV
ap-943	61	9	)	)	PUNCT
ap-943	61	10	as	as	ADP
ap-943	61	11	an	an	DET
ap-943	61	12	erbium	erbium	NOUN
ap-943	61	13	source	source	NOUN
ap-943	61	14	and	and	CCONJ
ap-943	61	15	the	the	DET
ap-943	61	16	fabricated	fabricate	VERB
ap-943	61	17	samples	sample	NOUN
ap-943	61	18	had	have	VERB
ap-943	61	19	photoluminescence	photoluminescence	NOUN
ap-943	61	20	at	at	ADP
ap-943	61	21	1530	1530	NUM
ap-943	61	22	nm	nm	NOUN
ap-943	61	23	even	even	ADV
ap-943	61	24	at	at	ADP
ap-943	61	25	room	room	NOUN
ap-943	61	26	temperature	temperature	NOUN
ap-943	61	27	.	.	PUNCT
ap-943	62	1	therefore	therefore	ADV
ap-943	62	2	it	it	PRON
ap-943	62	3	was	be	AUX
ap-943	62	4	decided	decide	VERB
ap-943	62	5	to	to	PART
ap-943	62	6	fabricate	fabricate	VERB
ap-943	62	7	carbon	carbon	NOUN
ap-943	62	8	layers	layer	NOUN
ap-943	62	9	doped	dope	VERB
ap-943	62	10	with	with	ADP
ap-943	62	11	erbium	erbium	NOUN
ap-943	62	12	using	use	VERB
ap-943	62	13	“	"	PUNCT
ap-943	62	14	erbium	erbium	NOUN
ap-943	62	15	tris	tris	NOUN
ap-943	62	16	”	"	PUNCT
ap-943	62	17	(	(	PUNCT
ap-943	62	18	[	[	X
ap-943	62	19	tris	tris	NOUN
ap-943	62	20	(	(	PUNCT
ap-943	62	21	2,2,6,6	2,2,6,6	NUM
ap-943	62	22	-	-	PUNCT
ap-943	62	23	tetramethyl-3,5	tetramethyl-3,5	NOUN
ap-943	62	24	-	-	PUNCT
ap-943	62	25	heptanedionate	heptanedionate	NOUN
ap-943	62	26	)	)	PUNCT
ap-943	62	27	]	]	PUNCT
ap-943	62	28	er(+iii	er(+iii	NOUN
ap-943	62	29	)	)	PUNCT
ap-943	62	30	)	)	PUNCT
ap-943	62	31	,	,	PUNCT
ap-943	62	32	(	(	PUNCT
ap-943	62	33	sigma	sigma	PROPN
ap-943	62	34	-	-	PUNCT
ap-943	62	35	aldrich	aldrich	NOUN
ap-943	62	36	)	)	PUNCT
ap-943	62	37	as	as	ADP
ap-943	62	38	a	a	DET
ap-943	62	39	source	source	NOUN
ap-943	62	40	.	.	PUNCT
ap-943	63	1	deposition	deposition	NOUN
ap-943	63	2	was	be	AUX
ap-943	63	3	carried	carry	VERB
ap-943	63	4	out	out	ADP
ap-943	63	5	using	use	VERB
ap-943	63	6	methane	methane	NOUN
ap-943	63	7	(	(	PUNCT
ap-943	63	8	flow	flow	NOUN
ap-943	63	9	of	of	ADP
ap-943	63	10	50	50	NUM
ap-943	63	11	cm3	cm3	NUM
ap-943	63	12	�	�	PROPN
ap-943	63	13	min	min	NOUN
ap-943	63	14	�	�	PROPN
ap-943	63	15	1	1	NUM
ap-943	63	16	)	)	PUNCT
ap-943	63	17	.	.	PUNCT
ap-943	64	1	“	"	PUNCT
ap-943	64	2	erbium	erbium	NOUN
ap-943	64	3	tris	tris	NOUN
ap-943	64	4	”	"	PUNCT
ap-943	64	5	vapor	vapor	NOUN
ap-943	64	6	was	be	AUX
ap-943	64	7	produced	produce	VERB
ap-943	64	8	at	at	ADP
ap-943	64	9	temperatures	temperature	NOUN
ap-943	64	10	from	from	ADP
ap-943	64	11	130	130	NUM
ap-943	64	12	°	°	NOUN
ap-943	64	13	c	c	NOUN
ap-943	64	14	to	to	ADP
ap-943	64	15	160	160	NUM
ap-943	64	16	°	°	NOUN
ap-943	64	17	c	c	NOUN
ap-943	64	18	,	,	PUNCT
ap-943	64	19	and	and	CCONJ
ap-943	64	20	it	it	PRON
ap-943	64	21	was	be	AUX
ap-943	64	22	always	always	ADV
ap-943	64	23	mixed	mix	VERB
ap-943	64	24	with	with	ADP
ap-943	64	25	methane	methane	NOUN
ap-943	64	26	.	.	PUNCT
ap-943	65	1	there	there	PRON
ap-943	65	2	were	be	VERB
ap-943	65	3	two	two	NUM
ap-943	65	4	ways	way	NOUN
ap-943	65	5	to	to	PART
ap-943	65	6	insert	insert	VERB
ap-943	65	7	the	the	DET
ap-943	65	8	“	"	PUNCT
ap-943	65	9	erbium	erbium	NOUN
ap-943	65	10	tris	tris	NOUN
ap-943	65	11	”	"	PUNCT
ap-943	65	12	into	into	ADP
ap-943	65	13	the	the	DET
ap-943	65	14	vacuum	vacuum	PROPN
ap-943	65	15	chamber	chamber	PROPN
ap-943	65	16	(	(	PUNCT
ap-943	65	17	fig	fig	NOUN
ap-943	65	18	.	.	PUNCT
ap-943	66	1	3	3	NUM
ap-943	66	2	)	)	PUNCT
ap-943	66	3	.	.	PUNCT
ap-943	67	1	when	when	SCONJ
ap-943	67	2	the	the	DET
ap-943	67	3	“	"	PUNCT
ap-943	67	4	erbium	erbium	NOUN
ap-943	67	5	tris	tris	NOUN
ap-943	67	6	”	"	PUNCT
ap-943	67	7	was	be	AUX
ap-943	67	8	in	in	ADP
ap-943	67	9	position	position	NOUN
ap-943	67	10	(	(	PUNCT
ap-943	67	11	1	1	X
ap-943	67	12	)	)	PUNCT
ap-943	67	13	the	the	DET
ap-943	67	14	concentration	concentration	NOUN
ap-943	67	15	of	of	ADP
ap-943	67	16	erbium	erbium	NOUN
ap-943	67	17	ions	ion	NOUN
ap-943	67	18	in	in	ADP
ap-943	67	19	the	the	DET
ap-943	67	20	deposited	deposit	VERB
ap-943	67	21	carbon	carbon	NOUN
ap-943	67	22	layers	layer	NOUN
ap-943	67	23	was	be	AUX
ap-943	67	24	as	as	ADV
ap-943	67	25	high	high	ADJ
ap-943	67	26	as	as	ADP
ap-943	67	27	9	9	NUM
ap-943	67	28	at	at	ADP
ap-943	67	29	%	%	NOUN
ap-943	67	30	.	.	PUNCT
ap-943	68	1	when	when	SCONJ
ap-943	68	2	the	the	DET
ap-943	68	3	“	"	PUNCT
ap-943	68	4	erbium	erbium	NOUN
ap-943	68	5	tris	tris	NOUN
ap-943	68	6	”	"	PUNCT
ap-943	68	7	was	be	AUX
ap-943	68	8	in	in	ADP
ap-943	68	9	position	position	NOUN
ap-943	68	10	(	(	PUNCT
ap-943	68	11	2	2	NUM
ap-943	68	12	)	)	PUNCT
ap-943	68	13	the	the	DET
ap-943	68	14	erbium	erbium	NOUN
ap-943	68	15	concentration	concentration	NOUN
ap-943	68	16	was	be	AUX
ap-943	68	17	always	always	ADV
ap-943	68	18	lower	low	ADJ
ap-943	68	19	,	,	PUNCT
ap-943	68	20	reaching	reach	VERB
ap-943	68	21	a	a	DET
ap-943	68	22	maximum	maximum	NOUN
ap-943	68	23	of	of	ADP
ap-943	68	24	0.012	0.012	NUM
ap-943	68	25	at	at	ADP
ap-943	68	26	%	%	NOUN
ap-943	68	27	(	(	PUNCT
ap-943	68	28	see	see	VERB
ap-943	68	29	table	table	NOUN
ap-943	68	30	1	1	NUM
ap-943	68	31	)	)	PUNCT
ap-943	68	32	.	.	PUNCT
ap-943	69	1	fig	fig	NOUN
ap-943	69	2	.	.	PUNCT
ap-943	70	1	4	4	NUM
ap-943	70	2	shows	show	VERB
ap-943	70	3	the	the	DET
ap-943	70	4	photoluminescence	photoluminescence	NOUN
ap-943	70	5	spectrum	spectrum	NOUN
ap-943	70	6	of	of	ADP
ap-943	70	7	the	the	DET
ap-943	70	8	carbon	carbon	NOUN
ap-943	70	9	layer	layer	NOUN
ap-943	70	10	fabricated	fabricate	VERB
ap-943	70	11	by	by	ADP
ap-943	70	12	pacvd	pacvd	NOUN
ap-943	70	13	.	.	PUNCT
ap-943	71	1	the	the	DET
ap-943	71	2	bands	band	NOUN
ap-943	71	3	at	at	ADP
ap-943	71	4	wavelength	wavelength	NOUN
ap-943	71	5	582	582	NUM
ap-943	71	6	nm	nm	NOUN
ap-943	71	7	and	and	CCONJ
ap-943	71	8	645	645	NUM
ap-943	71	9	nm	nm	NOUN
ap-943	71	10	come	come	VERB
ap-943	71	11	from	from	ADP
ap-943	71	12	the	the	DET
ap-943	71	13	carbon	carbon	NOUN
ap-943	71	14	layers	layer	NOUN
ap-943	71	15	themselves	themselves	PRON
ap-943	71	16	38	38	NUM
ap-943	71	17	©	©	PROPN
ap-943	71	18	czech	czech	PROPN
ap-943	71	19	technical	technical	PROPN
ap-943	71	20	university	university	PROPN
ap-943	71	21	publishing	publishing	NOUN
ap-943	71	22	house	house	NOUN
ap-943	71	23	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-943	71	24	acta	acta	PROPN
ap-943	71	25	polytechnica	polytechnica	PROPN
ap-943	71	26	vol	vol	NOUN
ap-943	71	27	.	.	PUNCT
ap-943	72	1	48	48	NUM
ap-943	72	2	no	no	NOUN
ap-943	72	3	.	.	PUNCT
ap-943	73	1	1/2008	1/2008	NUM
ap-943	73	2	vacuum	vacuum	NOUN
ap-943	73	3	gauge	gauge	NOUN
ap-943	73	4	substrate	substrate	NOUN
ap-943	73	5	pump	pump	NOUN
ap-943	73	6	ar	ar	PROPN
ap-943	73	7	vacuum	vacuum	PROPN
ap-943	73	8	chamber	chamber	PROPN
ap-943	73	9	matching	matching	PROPN
ap-943	73	10	unit	unit	NOUN
ap-943	73	11	rf	rf	PROPN
ap-943	73	12	power	power	NOUN
ap-943	73	13	13.56	13.56	NUM
ap-943	73	14	mhz	mhz	NOUN
ap-943	73	15	erbium	erbium	NOUN
ap-943	73	16	isopropoxide	isopropoxide	NOUN
ap-943	73	17	heating	heating	PROPN
ap-943	73	18	ch4	ch4	PROPN
ap-943	73	19	fig	fig	NOUN
ap-943	73	20	.	.	PUNCT
ap-943	74	1	2	2	NUM
ap-943	74	2	:	:	PUNCT
ap-943	74	3	schema	schema	NOUN
ap-943	74	4	of	of	ADP
ap-943	74	5	the	the	DET
ap-943	74	6	pacvd	pacvd	NOUN
ap-943	74	7	set	set	NOUN
ap-943	74	8	-	-	PUNCT
ap-943	74	9	up	up	NOUN
ap-943	74	10	used	use	VERB
ap-943	74	11	for	for	ADP
ap-943	74	12	depositing	deposit	VERB
ap-943	74	13	of	of	ADP
ap-943	74	14	carbon	carbon	NOUN
ap-943	74	15	layers	layer	NOUN
ap-943	74	16	from	from	ADP
ap-943	74	17	methane	methane	NOUN
ap-943	74	18	and	and	CCONJ
ap-943	74	19	“	"	PUNCT
ap-943	74	20	erbium	erbium	NOUN
ap-943	74	21	isopropoxide	isopropoxide	NOUN
ap-943	74	22	”	"	PUNCT
ap-943	74	23	vacuum	vacuum	NOUN
ap-943	74	24	gauge	gauge	NOUN
ap-943	74	25	substrate	substrate	NOUN
ap-943	74	26	pump	pump	NOUN
ap-943	74	27	vacuum	vacuum	PROPN
ap-943	74	28	chamber	chamber	PROPN
ap-943	74	29	matching	matching	PROPN
ap-943	74	30	unit	unit	NOUN
ap-943	74	31	rf	rf	NOUN
ap-943	74	32	power	power	NOUN
ap-943	74	33	13.56	13.56	NUM
ap-943	74	34	mhz	mhz	NOUN
ap-943	74	35	1	1	NUM
ap-943	74	36	.	.	PUNCT
ap-943	75	1	erbium	erbium	NOUN
ap-943	75	2	tris	tris	NOUN
ap-943	75	3	heating	heating	NOUN
ap-943	75	4	ar	ar	PROPN
ap-943	75	5	ch4	ch4	PROPN
ap-943	75	6	2	2	NUM
ap-943	75	7	.	.	PUNCT
ap-943	75	8	erbium	erbium	NOUN
ap-943	75	9	tris	tris	NOUN
ap-943	75	10	heating	heating	NOUN
ap-943	75	11	ar	ar	PROPN
ap-943	75	12	fig	fig	NOUN
ap-943	75	13	.	.	PUNCT
ap-943	76	1	3	3	NUM
ap-943	76	2	:	:	PUNCT
ap-943	76	3	schema	schema	NOUN
ap-943	76	4	of	of	ADP
ap-943	76	5	the	the	DET
ap-943	76	6	pacvd	pacvd	NOUN
ap-943	76	7	set	set	NOUN
ap-943	76	8	-	-	PUNCT
ap-943	76	9	up	up	NOUN
ap-943	76	10	used	use	VERB
ap-943	76	11	for	for	ADP
ap-943	76	12	deposition	deposition	NOUN
ap-943	76	13	of	of	ADP
ap-943	76	14	carbon	carbon	NOUN
ap-943	76	15	layers	layer	NOUN
ap-943	76	16	from	from	ADP
ap-943	76	17	methane	methane	NOUN
ap-943	76	18	and	and	CCONJ
ap-943	76	19	“	"	PUNCT
ap-943	76	20	erbium	erbium	NOUN
ap-943	76	21	tris	tris	NOUN
ap-943	76	22	”	"	PUNCT
ap-943	76	23	.	.	PUNCT
ap-943	77	1	for	for	ADP
ap-943	77	2	the	the	DET
ap-943	77	3	erbium	erbium	NOUN
ap-943	77	4	precursor	precursor	NOUN
ap-943	77	5	two	two	NUM
ap-943	77	6	positions	position	NOUN
ap-943	77	7	(	(	PUNCT
ap-943	77	8	1	1	X
ap-943	77	9	.	.	PUNCT
ap-943	77	10	and	and	CCONJ
ap-943	77	11	2	2	NUM
ap-943	77	12	.	.	PUNCT
ap-943	77	13	)	)	PUNCT
ap-943	77	14	were	be	AUX
ap-943	77	15	experimentally	experimentally	ADV
ap-943	77	16	evaluated	evaluate	VERB
ap-943	77	17	.	.	PUNCT
ap-943	78	1	(	(	PUNCT
ap-943	78	2	similar	similar	ADJ
ap-943	78	3	photoluminescence	photoluminescence	NOUN
ap-943	78	4	had	have	AUX
ap-943	78	5	already	already	ADV
ap-943	78	6	been	be	AUX
ap-943	78	7	reported	report	VERB
ap-943	78	8	in	in	ADP
ap-943	78	9	[	[	X
ap-943	78	10	17	17	NUM
ap-943	78	11	]	]	NUM
ap-943	78	12	)	)	PUNCT
ap-943	78	13	.	.	PUNCT
ap-943	79	1	obviously	obviously	ADV
ap-943	79	2	,	,	PUNCT
ap-943	79	3	photoluminescence	photoluminescence	NOUN
ap-943	79	4	at	at	ADP
ap-943	79	5	1530	1530	NUM
ap-943	79	6	nm	nm	NOUN
ap-943	79	7	(	(	PUNCT
ap-943	79	8	pl	pl	NOUN
ap-943	79	9	band	band	NOUN
ap-943	79	10	4i15/2	4i15/2	PROPN
ap-943	79	11	�	�	PROPN
ap-943	79	12	4i11/2	4i11/2	PROPN
ap-943	79	13	)	)	PUNCT
ap-943	79	14	did	do	AUX
ap-943	79	15	not	not	PART
ap-943	79	16	occur	occur	VERB
ap-943	79	17	.	.	PUNCT
ap-943	80	1	the	the	DET
ap-943	80	2	probable	probable	ADJ
ap-943	80	3	reason	reason	NOUN
ap-943	80	4	is	be	AUX
ap-943	80	5	that	that	SCONJ
ap-943	80	6	the	the	DET
ap-943	80	7	samples	sample	NOUN
ap-943	80	8	contained	contain	VERB
ap-943	80	9	oh	oh	NUM
ap-943	80	10	groups	group	NOUN
ap-943	80	11	(	(	PUNCT
ap-943	80	12	see	see	VERB
ap-943	80	13	table	table	NOUN
ap-943	80	14	1	1	NUM
ap-943	80	15	)	)	PUNCT
ap-943	80	16	due	due	ADP
ap-943	80	17	to	to	ADP
ap-943	80	18	the	the	DET
ap-943	80	19	gas	gas	NOUN
ap-943	80	20	source	source	NOUN
ap-943	80	21	applied	apply	VERB
ap-943	80	22	for	for	ADP
ap-943	80	23	the	the	DET
ap-943	80	24	growing	grow	VERB
ap-943	80	25	process	process	NOUN
ap-943	80	26	(	(	PUNCT
ap-943	80	27	methane	methane	NOUN
ap-943	80	28	as	as	ADP
ap-943	80	29	the	the	DET
ap-943	80	30	hydrogen	hydrogen	NOUN
ap-943	80	31	source	source	NOUN
ap-943	80	32	,	,	PUNCT
ap-943	80	33	oxygen	oxygen	NOUN
ap-943	80	34	residual	residual	ADJ
ap-943	80	35	contamination	contamination	NOUN
ap-943	80	36	)	)	PUNCT
ap-943	80	37	.	.	PUNCT
ap-943	81	1	oh	oh	INTJ
ap-943	81	2	impurities	impurity	NOUN
ap-943	81	3	are	be	AUX
ap-943	81	4	known	know	VERB
ap-943	81	5	to	to	PART
ap-943	81	6	quench	quench	VERB
ap-943	81	7	er	er	INTJ
ap-943	81	8	luminescence	luminescence	NOUN
ap-943	81	9	.	.	PUNCT
ap-943	82	1	3.3	3.3	NUM
ap-943	82	2	growth	growth	NOUN
ap-943	82	3	of	of	ADP
ap-943	82	4	erbium	erbium	NOUN
ap-943	82	5	doped	dope	VERB
ap-943	82	6	carbon	carbon	NOUN
ap-943	82	7	thin	thin	ADJ
ap-943	82	8	films	film	NOUN
ap-943	82	9	using	use	VERB
ap-943	82	10	magnetron	magnetron	NOUN
ap-943	82	11	sputtering	sputter	VERB
ap-943	82	12	the	the	DET
ap-943	82	13	carbon	carbon	NOUN
ap-943	82	14	layers	layer	NOUN
ap-943	82	15	were	be	AUX
ap-943	82	16	deposited	deposit	VERB
ap-943	82	17	by	by	ADP
ap-943	82	18	rf	rf	NOUN
ap-943	82	19	magnetron	magnetron	NOUN
ap-943	82	20	sputtering	sputtering	NOUN
ap-943	82	21	(	(	PUNCT
ap-943	82	22	balzers	balzer	NOUN
ap-943	82	23	pfeiffer	pfeiffer	VERB
ap-943	82	24	pls	pls	PROPN
ap-943	82	25	160	160	NUM
ap-943	82	26	)	)	PUNCT
ap-943	82	27	using	use	VERB
ap-943	82	28	a	a	DET
ap-943	82	29	carbon	carbon	NOUN
ap-943	82	30	target	target	NOUN
ap-943	82	31	of	of	ADP
ap-943	82	32	99.9999	99.9999	NUM
ap-943	82	33	%	%	NOUN
ap-943	82	34	purity	purity	NOUN
ap-943	82	35	.	.	PUNCT
ap-943	83	1	the	the	DET
ap-943	83	2	rf	rf	ADJ
ap-943	83	3	magnetron	magnetron	NOUN
ap-943	83	4	sputtering	sputter	VERB
ap-943	83	5	set	set	NOUN
ap-943	83	6	-	-	PUNCT
ap-943	83	7	up	up	NOUN
ap-943	83	8	is	be	AUX
ap-943	83	9	depicted	depict	VERB
ap-943	83	10	in	in	ADP
ap-943	83	11	fig	fig	NOUN
ap-943	83	12	.	.	PUNCT
ap-943	84	1	5	5	X
ap-943	84	2	.	.	PUNCT
ap-943	84	3	the	the	DET
ap-943	84	4	typical	typical	ADJ
ap-943	84	5	growth	growth	NOUN
ap-943	84	6	parameters	parameter	NOUN
ap-943	84	7	were	be	AUX
ap-943	84	8	:	:	PUNCT
ap-943	84	9	deposition	deposition	NOUN
ap-943	84	10	temperature	temperature	NOUN
ap-943	84	11	300	300	NUM
ap-943	84	12	k	k	NOUN
ap-943	84	13	,	,	PUNCT
ap-943	84	14	ar	ar	PROPN
ap-943	84	15	or	or	CCONJ
ap-943	84	16	ar	ar	PROPN
ap-943	84	17	�	�	PROPN
ap-943	84	18	ch4	ch4	PROPN
ap-943	84	19	gas	gas	NOUN
ap-943	84	20	mixture	mixture	NOUN
ap-943	84	21	,	,	PUNCT
ap-943	84	22	total	total	ADJ
ap-943	84	23	gas	gas	NOUN
ap-943	84	24	pressure	pressure	NOUN
ap-943	84	25	from	from	ADP
ap-943	84	26	1	1	NUM
ap-943	84	27	pa	pa	PROPN
ap-943	84	28	to	to	ADP
ap-943	84	29	4	4	NUM
ap-943	84	30	pa	pa	PROPN
ap-943	84	31	,	,	PUNCT
ap-943	84	32	and	and	CCONJ
ap-943	84	33	the	the	DET
ap-943	84	34	growing	grow	VERB
ap-943	84	35	time	time	NOUN
ap-943	84	36	ranged	range	VERB
ap-943	84	37	from	from	ADP
ap-943	84	38	30	30	NUM
ap-943	84	39	min	min	NOUN
ap-943	84	40	to	to	ADP
ap-943	84	41	4	4	NUM
ap-943	84	42	hrs	hrs	NOUN
ap-943	84	43	,	,	PUNCT
ap-943	84	44	with	with	ADP
ap-943	84	45	power	power	NOUN
ap-943	84	46	from	from	ADP
ap-943	84	47	50	50	NUM
ap-943	84	48	w	w	NOUN
ap-943	84	49	to	to	ADP
ap-943	84	50	150	150	NUM
ap-943	84	51	w	w	NOUN
ap-943	84	52	(	(	PUNCT
ap-943	84	53	13.56	13.56	NUM
ap-943	84	54	mhz	mhz	NOUN
ap-943	84	55	)	)	PUNCT
ap-943	84	56	.	.	PUNCT
ap-943	85	1	for	for	SCONJ
ap-943	85	2	er3	er3	PROPN
ap-943	85	3	�	�	PROPN
ap-943	85	4	doping	doping	NOUN
ap-943	85	5	into	into	ADP
ap-943	85	6	the	the	DET
ap-943	85	7	carbon	carbon	NOUN
ap-943	85	8	samples	sample	NOUN
ap-943	85	9	,	,	PUNCT
ap-943	85	10	powder	powder	NOUN
ap-943	85	11	of	of	ADP
ap-943	85	12	er	er	INTJ
ap-943	85	13	(	(	PUNCT
ap-943	85	14	99.9	99.9	NUM
ap-943	85	15	%	%	NOUN
ap-943	85	16	purity	purity	NOUN
ap-943	85	17	)	)	PUNCT
ap-943	85	18	was	be	AUX
ap-943	85	19	placed	place	VERB
ap-943	85	20	on	on	ADP
ap-943	85	21	top	top	NOUN
ap-943	85	22	of	of	ADP
ap-943	85	23	the	the	DET
ap-943	85	24	carbon	carbon	NOUN
ap-943	85	25	target	target	NOUN
ap-943	85	26	.	.	PUNCT
ap-943	86	1	the	the	DET
ap-943	86	2	rbs	rbs	NOUN
ap-943	86	3	analyses	analyse	VERB
ap-943	86	4	and	and	CCONJ
ap-943	86	5	also	also	ADV
ap-943	86	6	the	the	DET
ap-943	86	7	erda	erda	ADJ
ap-943	86	8	analyses	analysis	NOUN
ap-943	86	9	of	of	ADP
ap-943	86	10	the	the	DET
ap-943	86	11	deposited	deposit	VERB
ap-943	86	12	layers	layer	NOUN
ap-943	86	13	proved	prove	VERB
ap-943	86	14	that	that	SCONJ
ap-943	86	15	the	the	DET
ap-943	86	16	samples	sample	NOUN
ap-943	86	17	contained	contain	VERB
ap-943	86	18	carbon	carbon	NOUN
ap-943	86	19	,	,	PUNCT
ap-943	86	20	argon	argon	NOUN
ap-943	86	21	,	,	PUNCT
ap-943	86	22	oxygen	oxygen	NOUN
ap-943	86	23	,	,	PUNCT
ap-943	86	24	hydrogen	hydrogen	NOUN
ap-943	86	25	and	and	CCONJ
ap-943	86	26	erbium	erbium	NOUN
ap-943	86	27	(	(	PUNCT
ap-943	86	28	see	see	VERB
ap-943	86	29	tab	tab	NOUN
ap-943	86	30	.	.	PUNCT
ap-943	86	31	1	1	NUM
ap-943	86	32	)	)	PUNCT
ap-943	86	33	.	.	PUNCT
ap-943	87	1	the	the	DET
ap-943	87	2	list	list	NOUN
ap-943	87	3	of	of	ADP
ap-943	87	4	carbon	carbon	NOUN
ap-943	87	5	samples	sample	NOUN
ap-943	87	6	and	and	CCONJ
ap-943	87	7	the	the	DET
ap-943	87	8	relevant	relevant	ADJ
ap-943	87	9	content	content	NOUN
ap-943	87	10	of	of	ADP
ap-943	87	11	erbium	erbium	NOUN
ap-943	87	12	or	or	CCONJ
ap-943	87	13	erbium	erbium	NOUN
ap-943	87	14	ions	ion	NOUN
ap-943	87	15	is	be	AUX
ap-943	87	16	given	give	VERB
ap-943	87	17	in	in	ADP
ap-943	87	18	table	table	NOUN
ap-943	87	19	2	2	NUM
ap-943	87	20	.	.	PUNCT
ap-943	88	1	the	the	DET
ap-943	88	2	amount	amount	NOUN
ap-943	88	3	of	of	ADP
ap-943	88	4	incorporated	incorporated	ADJ
ap-943	88	5	erbium	erbium	NOUN
ap-943	88	6	ions	ion	NOUN
ap-943	88	7	differed	differ	VERB
ap-943	88	8	depending	depend	VERB
ap-943	88	9	on	on	ADP
ap-943	88	10	the	the	DET
ap-943	88	11	area	area	NOUN
ap-943	88	12	of	of	ADP
ap-943	88	13	the	the	DET
ap-943	88	14	target	target	NOUN
ap-943	88	15	covered	cover	VERB
ap-943	88	16	by	by	ADP
ap-943	88	17	erbium	erbium	NOUN
ap-943	88	18	powder	powder	NOUN
ap-943	88	19	placed	place	VERB
ap-943	88	20	on	on	ADP
ap-943	88	21	the	the	DET
ap-943	88	22	target	target	NOUN
ap-943	88	23	,	,	PUNCT
ap-943	88	24	and	and	CCONJ
ap-943	88	25	also	also	ADV
ap-943	88	26	depending	depend	VERB
ap-943	88	27	on	on	ADP
ap-943	88	28	the	the	DET
ap-943	88	29	erosion	erosion	NOUN
ap-943	88	30	area	area	NOUN
ap-943	88	31	represented	represent	VERB
ap-943	88	32	by	by	ADP
ap-943	88	33	the	the	DET
ap-943	88	34	part	part	NOUN
ap-943	88	35	of	of	ADP
ap-943	88	36	the	the	DET
ap-943	88	37	surface	surface	NOUN
ap-943	88	38	covered	cover	VERB
ap-943	88	39	by	by	ADP
ap-943	88	40	the	the	DET
ap-943	88	41	erbium	erbium	NOUN
ap-943	88	42	ions	ion	NOUN
ap-943	88	43	.	.	PUNCT
ap-943	89	1	the	the	DET
ap-943	89	2	samples	sample	NOUN
ap-943	89	3	had	have	VERB
ap-943	89	4	a	a	DET
ap-943	89	5	total	total	ADJ
ap-943	89	6	erbium	erbium	NOUN
ap-943	89	7	content	content	NOUN
ap-943	89	8	ranging	range	VERB
ap-943	89	9	from	from	ADP
ap-943	89	10	1	1	NUM
ap-943	89	11	at	at	ADP
ap-943	89	12	%	%	NOUN
ap-943	89	13	to	to	ADP
ap-943	89	14	17.1	17.1	NUM
ap-943	89	15	at	at	ADP
ap-943	89	16	%	%	NOUN
ap-943	89	17	.	.	PUNCT
ap-943	90	1	the	the	DET
ap-943	90	2	highest	high	ADJ
ap-943	90	3	concentration	concentration	NOUN
ap-943	90	4	(	(	PUNCT
ap-943	90	5	17.1	17.1	NUM
ap-943	90	6	at	at	ADP
ap-943	90	7	%	%	NOUN
ap-943	90	8	)	)	PUNCT
ap-943	90	9	of	of	ADP
ap-943	90	10	erbium	erbium	NOUN
ap-943	90	11	was	be	AUX
ap-943	90	12	found	find	VERB
ap-943	90	13	in	in	ADP
ap-943	90	14	the	the	DET
ap-943	90	15	sample	sample	NOUN
ap-943	90	16	doped	dope	VERB
ap-943	90	17	using	use	VERB
ap-943	90	18	1.0004	1.0004	NUM
ap-943	90	19	g	g	NOUN
ap-943	90	20	of	of	ADP
ap-943	90	21	erbium	erbium	NOUN
ap-943	90	22	powder	powder	NOUN
ap-943	90	23	.	.	PUNCT
ap-943	91	1	©	©	PROPN
ap-943	91	2	czech	czech	PROPN
ap-943	91	3	technical	technical	PROPN
ap-943	91	4	university	university	PROPN
ap-943	91	5	publishing	publishing	NOUN
ap-943	91	6	house	house	NOUN
ap-943	91	7	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-943	91	8	39	39	NUM
ap-943	91	9	acta	acta	PROPN
ap-943	91	10	polytechnica	polytechnica	PROPN
ap-943	91	11	vol	vol	NOUN
ap-943	91	12	.	.	PUNCT
ap-943	92	1	48	48	NUM
ap-943	92	2	no	no	NOUN
ap-943	92	3	.	.	PUNCT
ap-943	93	1	1/2008	1/2008	NUM
ap-943	93	2	500	500	NUM
ap-943	93	3	550	550	NUM
ap-943	93	4	600	600	NUM
ap-943	93	5	650	650	NUM
ap-943	93	6	700	700	NUM
ap-943	93	7	750	750	NUM
ap-943	93	8	800	800	NUM
ap-943	93	9	0	0	NUM
ap-943	93	10	200	200	NUM
ap-943	93	11	400	400	NUM
ap-943	93	12	600	600	NUM
ap-943	93	13	800	800	NUM
ap-943	93	14	1000	1000	NUM
ap-943	93	15	1200	1200	NUM
ap-943	93	16	1400	1400	NUM
ap-943	93	17	1600	1600	NUM
ap-943	93	18	582	582	NUM
ap-943	93	19	nm	nm	NOUN
ap-943	93	20	p	p	NOUN
ap-943	93	21	l	l	NOUN
ap-943	93	22	in	in	ADP
ap-943	93	23	te	te	PROPN
ap-943	93	24	n	n	ADV
ap-943	93	25	si	si	INTJ
ap-943	93	26	ty	ty	INTJ
ap-943	93	27	(	(	PUNCT
ap-943	93	28	a	a	DET
ap-943	93	29	.u	.u	NOUN
ap-943	93	30	.	.	PUNCT
ap-943	93	31	)	)	PUNCT
ap-943	94	1	wavelength	wavelength	NOUN
ap-943	94	2	(	(	PUNCT
ap-943	94	3	nm	nm	NOUN
ap-943	94	4	)	)	PUNCT
ap-943	94	5	645	645	NUM
ap-943	94	6	nm	nm	DET
ap-943	94	7	�	�	NOUN
ap-943	94	8	ex	ex	X
ap-943	94	9	=	=	SYM
ap-943	94	10	488	488	NUM
ap-943	94	11	nm	nm	ADV
ap-943	94	12	t=	t=	VERB
ap-943	94	13	300	300	NUM
ap-943	94	14	k	k	NOUN
ap-943	94	15	fig	fig	NOUN
ap-943	94	16	.	.	PUNCT
ap-943	95	1	4	4	NUM
ap-943	95	2	:	:	PUNCT
ap-943	95	3	photoluminescence	photoluminescence	NOUN
ap-943	95	4	spectrum	spectrum	NOUN
ap-943	95	5	of	of	ADP
ap-943	95	6	a	a	DET
ap-943	95	7	carbon	carbon	NOUN
ap-943	95	8	layer	layer	NOUN
ap-943	95	9	fabricated	fabricate	VERB
ap-943	95	10	by	by	ADP
ap-943	95	11	pacvd	pacvd	NOUN
ap-943	95	12	window	window	NOUN
ap-943	95	13	substrate	substrate	NOUN
ap-943	95	14	pump	pump	NOUN
ap-943	95	15	ar	ar	NOUN
ap-943	95	16	cooling	cool	VERB
ap-943	95	17	water	water	NOUN
ap-943	95	18	ss	ss	NOUN
ap-943	95	19	n	n	CCONJ
ap-943	95	20	c	c	NOUN
ap-943	95	21	-	-	PUNCT
ap-943	95	22	target	target	NOUN
ap-943	95	23	vacuum	vacuum	NOUN
ap-943	95	24	gauge	gauge	NOUN
ap-943	95	25	vacuum	vacuum	PROPN
ap-943	95	26	chamber	chamber	PROPN
ap-943	95	27	er	er	INTJ
ap-943	95	28	powder	powder	NOUN
ap-943	95	29	fig	fig	NOUN
ap-943	95	30	.	.	PUNCT
ap-943	96	1	5	5	NUM
ap-943	96	2	:	:	PUNCT
ap-943	96	3	the	the	DET
ap-943	96	4	schema	schema	NOUN
ap-943	96	5	of	of	ADP
ap-943	96	6	magnetron	magnetron	NOUN
ap-943	96	7	sputtering	sputter	VERB
ap-943	96	8	set	set	NOUN
ap-943	96	9	-	-	PUNCT
ap-943	96	10	up	up	ADP
ap-943	96	11	the	the	DET
ap-943	96	12	absorbance	absorbance	NOUN
ap-943	96	13	spectrum	spectrum	NOUN
ap-943	96	14	of	of	ADP
ap-943	96	15	erbium	erbium	NOUN
ap-943	96	16	doped	dope	VERB
ap-943	96	17	carbon	carbon	NOUN
ap-943	96	18	layers	layer	NOUN
ap-943	96	19	fabricated	fabricate	VERB
ap-943	96	20	by	by	ADP
ap-943	96	21	magnetron	magnetron	NOUN
ap-943	96	22	sputtering	sputtering	NOUN
ap-943	96	23	is	be	AUX
ap-943	96	24	given	give	VERB
ap-943	96	25	in	in	ADP
ap-943	96	26	fig	fig	NOUN
ap-943	96	27	.	.	PUNCT
ap-943	97	1	6	6	NUM
ap-943	97	2	.	.	PUNCT
ap-943	97	3	this	this	DET
ap-943	97	4	figure	figure	NOUN
ap-943	97	5	shows	show	VERB
ap-943	97	6	typical	typical	ADJ
ap-943	97	7	strong	strong	ADJ
ap-943	97	8	2h11/2	2h11/2	NOUN
ap-943	97	9	(	(	PUNCT
ap-943	97	10	523	523	NUM
ap-943	97	11	nm	nm	NOUN
ap-943	97	12	)	)	PUNCT
ap-943	97	13	transitions	transition	NOUN
ap-943	97	14	,	,	PUNCT
ap-943	97	15	which	which	PRON
ap-943	97	16	correspond	correspond	VERB
ap-943	97	17	to	to	ADP
ap-943	97	18	optical	optical	ADJ
ap-943	97	19	materials	material	NOUN
ap-943	97	20	doped	dope	VERB
ap-943	97	21	with	with	ADP
ap-943	97	22	erbium	erbium	NOUN
ap-943	97	23	ions	ion	NOUN
ap-943	97	24	.	.	PUNCT
ap-943	98	1	other	other	ADJ
ap-943	98	2	er3	er3	PROPN
ap-943	98	3	�	�	PROPN
ap-943	98	4	transitions	transition	NOUN
ap-943	98	5	4f11/2	4f11/2	NOUN
ap-943	98	6	(	(	PUNCT
ap-943	98	7	451	451	NUM
ap-943	98	8	nm	nm	NOUN
ap-943	98	9	)	)	PUNCT
ap-943	98	10	and	and	CCONJ
ap-943	98	11	4f7/2	4f7/2	PROPN
ap-943	98	12	(	(	PUNCT
ap-943	98	13	490	490	NUM
ap-943	98	14	nm	nm	NOUN
ap-943	98	15	)	)	PUNCT
ap-943	98	16	are	be	AUX
ap-943	98	17	not	not	PART
ap-943	98	18	so	so	ADV
ap-943	98	19	strong	strong	ADJ
ap-943	98	20	,	,	PUNCT
ap-943	98	21	and	and	CCONJ
ap-943	98	22	transitions	transition	NOUN
ap-943	98	23	2h9/2	2h9/2	NUM
ap-943	98	24	(	(	PUNCT
ap-943	98	25	405	405	NUM
ap-943	98	26	nm	nm	NOUN
ap-943	98	27	)	)	PUNCT
ap-943	98	28	,	,	PUNCT
ap-943	98	29	4f3/2	4f3/2	PROPN
ap-943	98	30	(	(	PUNCT
ap-943	98	31	441	441	NUM
ap-943	98	32	nm	nm	NOUN
ap-943	98	33	)	)	PUNCT
ap-943	98	34	and	and	CCONJ
ap-943	98	35	4s3/2	4s3/2	NUM
ap-943	98	36	(	(	PUNCT
ap-943	98	37	539	539	NUM
ap-943	98	38	nm	nm	NOUN
ap-943	98	39	)	)	PUNCT
ap-943	98	40	are	be	AUX
ap-943	98	41	almost	almost	ADV
ap-943	98	42	hidden	hide	VERB
ap-943	98	43	in	in	ADP
ap-943	98	44	the	the	DET
ap-943	98	45	background	background	NOUN
ap-943	98	46	.	.	PUNCT
ap-943	99	1	photoluminescence	photoluminescence	NOUN
ap-943	99	2	spectra	spectra	NOUN
ap-943	99	3	of	of	ADP
ap-943	99	4	erbium	erbium	NOUN
ap-943	99	5	doped	dope	VERB
ap-943	99	6	carbon	carbon	NOUN
ap-943	99	7	layers	layer	NOUN
ap-943	99	8	fabricated	fabricate	VERB
ap-943	99	9	by	by	ADP
ap-943	99	10	magnetron	magnetron	NOUN
ap-943	99	11	sputtering	sputtering	NOUN
ap-943	99	12	are	be	AUX
ap-943	99	13	shown	show	VERB
ap-943	99	14	in	in	ADP
ap-943	99	15	fig	fig	NOUN
ap-943	99	16	.	.	PUNCT
ap-943	100	1	7	7	NUM
ap-943	100	2	and	and	CCONJ
ap-943	100	3	fig	fig	NOUN
ap-943	100	4	.	.	PUNCT
ap-943	101	1	8	8	X
ap-943	101	2	.	.	PUNCT
ap-943	102	1	the	the	DET
ap-943	102	2	spectrum	spectrum	NOUN
ap-943	102	3	excited	excite	VERB
ap-943	102	4	by	by	ADP
ap-943	102	5	an	an	DET
ap-943	102	6	ar	ar	NOUN
ap-943	102	7	laser	laser	NOUN
ap-943	102	8	at	at	ADP
ap-943	102	9	very	very	ADV
ap-943	102	10	low	low	ADJ
ap-943	102	11	temperature	temperature	NOUN
ap-943	102	12	(	(	PUNCT
ap-943	102	13	�	�	PROPN
ap-943	102	14	ex	ex	X
ap-943	102	15	�	�	PROPN
ap-943	102	16	514.5	514.5	NUM
ap-943	102	17	nm	nm	PROPN
ap-943	102	18	,	,	PUNCT
ap-943	102	19	temperature	temperature	NOUN
ap-943	102	20	4	4	NUM
ap-943	102	21	k	k	NOUN
ap-943	102	22	)	)	PUNCT
ap-943	102	23	is	be	AUX
ap-943	102	24	given	give	VERB
ap-943	102	25	in	in	ADP
ap-943	102	26	fig	fig	NOUN
ap-943	102	27	.	.	PUNCT
ap-943	102	28	7	7	NUM
ap-943	102	29	and	and	CCONJ
ap-943	102	30	shows	show	VERB
ap-943	102	31	quite	quite	ADV
ap-943	102	32	well	well	ADV
ap-943	102	33	the	the	DET
ap-943	102	34	typical	typical	ADJ
ap-943	102	35	photoluminescence	photoluminescence	NOUN
ap-943	102	36	bands	band	NOUN
ap-943	102	37	attributed	attribute	VERB
ap-943	102	38	to	to	ADP
ap-943	102	39	the	the	DET
ap-943	102	40	erbium	erbium	NOUN
ap-943	102	41	transition	transition	NOUN
ap-943	102	42	4i13/2	4i13/2	PROPN
ap-943	102	43	�	�	PROPN
ap-943	102	44	4i15/2	4i15/2	PROPN
ap-943	102	45	.	.	PUNCT
ap-943	103	1	fig	fig	NOUN
ap-943	103	2	.	.	PUNCT
ap-943	104	1	8	8	NUM
ap-943	104	2	shows	show	VERB
ap-943	104	3	the	the	DET
ap-943	104	4	spectrum	spectrum	NOUN
ap-943	104	5	obtained	obtain	VERB
ap-943	104	6	by	by	ADP
ap-943	104	7	optical	optical	ADJ
ap-943	104	8	pumping	pumping	NOUN
ap-943	104	9	at	at	ADP
ap-943	104	10	980	980	NUM
ap-943	104	11	nm	nm	NOUN
ap-943	104	12	at	at	ADP
ap-943	104	13	room	room	NOUN
ap-943	104	14	temperature	temperature	NOUN
ap-943	104	15	.	.	PUNCT
ap-943	105	1	obviously	obviously	ADV
ap-943	105	2	,	,	PUNCT
ap-943	105	3	the	the	DET
ap-943	105	4	peak	peak	NOUN
ap-943	105	5	coming	come	VERB
ap-943	105	6	from	from	ADP
ap-943	105	7	the	the	DET
ap-943	105	8	erbium	erbium	NOUN
ap-943	105	9	4i13/2	4i13/2	PROPN
ap-943	105	10	�	�	PROPN
ap-943	105	11	4i15/2	4i15/2	PROPN
ap-943	105	12	transition	transition	NOUN
ap-943	105	13	is	be	AUX
ap-943	105	14	very	very	ADV
ap-943	105	15	weak	weak	ADJ
ap-943	105	16	but	but	CCONJ
ap-943	105	17	it	it	PRON
ap-943	105	18	is	be	AUX
ap-943	105	19	still	still	ADV
ap-943	105	20	there	there	ADV
ap-943	105	21	,	,	PUNCT
ap-943	105	22	as	as	SCONJ
ap-943	105	23	can	can	AUX
ap-943	105	24	be	be	AUX
ap-943	105	25	seen	see	VERB
ap-943	105	26	from	from	ADP
ap-943	105	27	the	the	DET
ap-943	105	28	comparison	comparison	NOUN
ap-943	105	29	with	with	ADP
ap-943	105	30	the	the	DET
ap-943	105	31	pl	pl	PROPN
ap-943	105	32	spectrum	spectrum	NOUN
ap-943	105	33	of	of	ADP
ap-943	105	34	the	the	DET
ap-943	105	35	reference	reference	NOUN
ap-943	105	36	sample	sample	NOUN
ap-943	105	37	given	give	VERB
ap-943	105	38	in	in	ADP
ap-943	105	39	the	the	DET
ap-943	105	40	same	same	ADJ
ap-943	105	41	figure	figure	NOUN
ap-943	105	42	.	.	PUNCT
ap-943	106	1	the	the	DET
ap-943	106	2	intensities	intensity	NOUN
ap-943	106	3	of	of	ADP
ap-943	106	4	the	the	DET
ap-943	106	5	emission	emission	NOUN
ap-943	106	6	bands	band	NOUN
ap-943	106	7	in	in	ADP
ap-943	106	8	the	the	DET
ap-943	106	9	1530	1530	NUM
ap-943	106	10	nm	nm	NOUN
ap-943	106	11	region	region	NOUN
ap-943	106	12	did	do	AUX
ap-943	106	13	not	not	PART
ap-943	106	14	show	show	VERB
ap-943	106	15	any	any	DET
ap-943	106	16	evidence	evidence	NOUN
ap-943	106	17	of	of	ADP
ap-943	106	18	being	be	AUX
ap-943	106	19	connected	connect	VERB
ap-943	106	20	with	with	ADP
ap-943	106	21	the	the	DET
ap-943	106	22	actual	actual	ADJ
ap-943	106	23	concentration	concentration	NOUN
ap-943	106	24	of	of	ADP
ap-943	106	25	er3	er3	PROPN
ap-943	106	26	�	�	PROPN
ap-943	106	27	in	in	ADP
ap-943	106	28	the	the	DET
ap-943	106	29	samples	sample	NOUN
ap-943	106	30	(	(	PUNCT
ap-943	106	31	see	see	VERB
ap-943	106	32	table	table	NOUN
ap-943	106	33	2	2	NUM
ap-943	106	34	)	)	PUNCT
ap-943	106	35	.	.	PUNCT
ap-943	107	1	the	the	DET
ap-943	107	2	intensities	intensity	NOUN
ap-943	107	3	are	be	AUX
ap-943	107	4	very	very	ADV
ap-943	107	5	low	low	ADJ
ap-943	107	6	,	,	PUNCT
ap-943	107	7	so	so	CCONJ
ap-943	107	8	a	a	DET
ap-943	107	9	small	small	ADJ
ap-943	107	10	increase	increase	NOUN
ap-943	107	11	would	would	AUX
ap-943	107	12	be	be	AUX
ap-943	107	13	difficult	difficult	ADJ
ap-943	107	14	to	to	PART
ap-943	107	15	recognize	recognize	VERB
ap-943	107	16	.	.	PUNCT
ap-943	108	1	however	however	ADV
ap-943	108	2	,	,	PUNCT
ap-943	108	3	our	our	PRON
ap-943	108	4	opinion	opinion	NOUN
ap-943	108	5	is	be	AUX
ap-943	108	6	that	that	SCONJ
ap-943	108	7	the	the	DET
ap-943	108	8	higher	high	ADJ
ap-943	108	9	concentration	concentration	NOUN
ap-943	108	10	of	of	ADP
ap-943	108	11	er3	er3	PROPN
ap-943	108	12	�	�	PROPN
ap-943	108	13	resulted	result	VERB
ap-943	108	14	in	in	ADP
ap-943	108	15	the	the	DET
ap-943	108	16	formation	formation	NOUN
ap-943	108	17	of	of	ADP
ap-943	108	18	clusters	cluster	NOUN
ap-943	108	19	that	that	PRON
ap-943	108	20	,	,	PUNCT
ap-943	108	21	due	due	ADP
ap-943	108	22	to	to	PART
ap-943	108	23	pair	pair	VERB
ap-943	108	24	interactions	interaction	NOUN
ap-943	108	25	,	,	PUNCT
ap-943	108	26	would	would	AUX
ap-943	108	27	in	in	ADP
ap-943	108	28	fact	fact	NOUN
ap-943	108	29	have	have	VERB
ap-943	108	30	a	a	DET
ap-943	108	31	counterproductive	counterproductive	ADJ
ap-943	108	32	concentration	concentration	NOUN
ap-943	108	33	quenching	quenching	NOUN
ap-943	108	34	effect	effect	NOUN
ap-943	108	35	.	.	PUNCT
ap-943	109	1	4	4	NUM
ap-943	109	2	conclusion	conclusion	NOUN
ap-943	109	3	we	we	PRON
ap-943	109	4	report	report	VERB
ap-943	109	5	on	on	ADP
ap-943	109	6	carbon	carbon	NOUN
ap-943	109	7	layers	layer	NOUN
ap-943	109	8	doped	dope	VERB
ap-943	109	9	with	with	ADP
ap-943	109	10	erbium	erbium	NOUN
ap-943	109	11	ions	ion	NOUN
ap-943	109	12	deposited	deposit	VERB
ap-943	109	13	by	by	ADP
ap-943	109	14	sputtering	sputter	VERB
ap-943	109	15	,	,	PUNCT
ap-943	109	16	by	by	ADP
ap-943	109	17	pacvd	pacvd	NOUN
ap-943	109	18	and	and	CCONJ
ap-943	109	19	by	by	ADP
ap-943	109	20	magnetron	magnetron	NOUN
ap-943	109	21	sputtering	sputter	VERB
ap-943	109	22	onto	onto	ADP
ap-943	109	23	a	a	DET
ap-943	109	24	silicon	silicon	NOUN
ap-943	109	25	or	or	CCONJ
ap-943	109	26	glass	glass	NOUN
ap-943	109	27	substrate	substrate	NOUN
ap-943	109	28	.	.	PUNCT
ap-943	110	1	the	the	DET
ap-943	110	2	fabricated	fabricate	VERB
ap-943	110	3	samples	sample	NOUN
ap-943	110	4	had	have	VERB
ap-943	110	5	an	an	DET
ap-943	110	6	amorphous	amorphous	ADJ
ap-943	110	7	structure	structure	NOUN
ap-943	110	8	.	.	PUNCT
ap-943	111	1	when	when	SCONJ
ap-943	111	2	the	the	DET
ap-943	111	3	carbon	carbon	NOUN
ap-943	111	4	samples	sample	NOUN
ap-943	111	5	were	be	AUX
ap-943	111	6	fabricated	fabricate	VERB
ap-943	111	7	by	by	ADP
ap-943	111	8	sputtering	sputter	VERB
ap-943	111	9	the	the	DET
ap-943	111	10	content	content	NOUN
ap-943	111	11	of	of	ADP
ap-943	111	12	erbium	erbium	NOUN
ap-943	111	13	ions	ion	NOUN
ap-943	111	14	was	be	AUX
ap-943	111	15	too	too	ADV
ap-943	111	16	low	low	ADJ
ap-943	111	17	to	to	PART
ap-943	111	18	reveal	reveal	VERB
ap-943	111	19	the	the	DET
ap-943	111	20	photoluminescence	photoluminescence	NOUN
ap-943	111	21	at	at	ADP
ap-943	111	22	1	1	NUM
ap-943	111	23	530	530	NUM
ap-943	111	24	nm	nm	NOUN
ap-943	111	25	.	.	PUNCT
ap-943	112	1	carbon	carbon	NOUN
ap-943	112	2	layers	layer	NOUN
ap-943	112	3	fabricated	fabricate	VERB
ap-943	112	4	by	by	ADP
ap-943	112	5	pacvd	pacvd	NOUN
ap-943	112	6	using	use	VERB
ap-943	112	7	a	a	DET
ap-943	112	8	ch4	ch4	PROPN
ap-943	112	9	�	�	PROPN
ap-943	112	10	ar	ar	PROPN
ap-943	112	11	�	�	PROPN
ap-943	112	12	“erbium	“erbium	NOUN
ap-943	112	13	isopropoxide	isopropoxide	NOUN
ap-943	112	14	”	"	PUNCT
ap-943	112	15	gas	gas	NOUN
ap-943	112	16	mixture	mixture	NOUN
ap-943	112	17	did	do	AUX
ap-943	112	18	not	not	PART
ap-943	112	19	even	even	ADV
ap-943	112	20	contain	contain	VERB
ap-943	112	21	erbium	erbium	NOUN
ap-943	112	22	.	.	PUNCT
ap-943	113	1	erbium	erbium	NOUN
ap-943	113	2	doped	dope	VERB
ap-943	113	3	carbon	carbon	NOUN
ap-943	113	4	samples	sample	NOUN
ap-943	113	5	fabricated	fabricate	VERB
ap-943	113	6	by	by	ADP
ap-943	113	7	pacvd	pacvd	NOUN
ap-943	113	8	using	use	VERB
ap-943	113	9	“	"	PUNCT
ap-943	113	10	erbium	erbium	NOUN
ap-943	113	11	tris	tris	NOUN
ap-943	113	12	”	"	PUNCT
ap-943	113	13	as	as	SCONJ
ap-943	113	14	erbium	erbium	NOUN
ap-943	113	15	source	source	NOUN
ap-943	113	16	contained	contain	VERB
ap-943	113	17	erbium	erbium	NOUN
ap-943	113	18	ions	ion	NOUN
ap-943	113	19	but	but	CCONJ
ap-943	113	20	no	no	DET
ap-943	113	21	photoluminescence	photoluminescence	NOUN
ap-943	113	22	at	at	ADP
ap-943	113	23	1530	1530	NUM
ap-943	113	24	nm	nm	NOUN
ap-943	113	25	was	be	AUX
ap-943	113	26	observed	observe	VERB
ap-943	113	27	.	.	PUNCT
ap-943	114	1	the	the	DET
ap-943	114	2	main	main	ADJ
ap-943	114	3	reason	reason	NOUN
ap-943	114	4	could	could	AUX
ap-943	114	5	be	be	AUX
ap-943	114	6	that	that	SCONJ
ap-943	114	7	the	the	DET
ap-943	114	8	carbon	carbon	NOUN
ap-943	114	9	samples	sample	NOUN
ap-943	114	10	contained	contain	VERB
ap-943	114	11	oxygen	oxygen	NOUN
ap-943	114	12	and	and	CCONJ
ap-943	114	13	hydrogen	hydrogen	NOUN
ap-943	114	14	.	.	PUNCT
ap-943	115	1	oh	oh	INTJ
ap-943	115	2	impurities	impurity	NOUN
ap-943	115	3	are	be	AUX
ap-943	115	4	known	know	VERB
ap-943	115	5	to	to	PART
ap-943	115	6	be	be	AUX
ap-943	115	7	a	a	DET
ap-943	115	8	strong	strong	ADJ
ap-943	115	9	quencher	quencher	NOUN
ap-943	115	10	of	of	ADP
ap-943	115	11	er	er	INTJ
ap-943	115	12	luminescence	luminescence	NOUN
ap-943	115	13	.	.	PUNCT
ap-943	116	1	the	the	DET
ap-943	116	2	most	most	ADV
ap-943	116	3	successful	successful	ADJ
ap-943	116	4	method	method	NOUN
ap-943	116	5	for	for	ADP
ap-943	116	6	fabricating	fabricate	VERB
ap-943	116	7	erbium	erbium	NOUN
ap-943	116	8	doped	dope	VERB
ap-943	116	9	carbon	carbon	NOUN
ap-943	116	10	layers	layer	NOUN
ap-943	116	11	was	be	AUX
ap-943	116	12	magnetron	magnetron	NOUN
ap-943	116	13	sputtering	sputtering	NOUN
ap-943	116	14	.	.	PUNCT
ap-943	117	1	the	the	DET
ap-943	117	2	content	content	NOUN
ap-943	117	3	of	of	ADP
ap-943	117	4	erbium	erbium	NOUN
ap-943	117	5	ions	ion	NOUN
ap-943	117	6	in	in	ADP
ap-943	117	7	the	the	DET
ap-943	117	8	carbon	carbon	NOUN
ap-943	117	9	samples	sample	NOUN
ap-943	117	10	was	be	AUX
ap-943	117	11	controlled	control	VERB
ap-943	117	12	by	by	ADP
ap-943	117	13	the	the	DET
ap-943	117	14	amount	amount	NOUN
ap-943	117	15	of	of	ADP
ap-943	117	16	erbium	erbium	NOUN
ap-943	117	17	powder	powder	NOUN
ap-943	117	18	placed	place	VERB
ap-943	117	19	on	on	ADP
ap-943	117	20	the	the	DET
ap-943	117	21	carbon	carbon	NOUN
ap-943	117	22	target	target	NOUN
ap-943	117	23	.	.	PUNCT
ap-943	118	1	under	under	ADP
ap-943	118	2	optical	optical	ADJ
ap-943	118	3	pumping	pumping	NOUN
ap-943	118	4	at	at	ADP
ap-943	118	5	514.5	514.5	NUM
ap-943	118	6	nm	nm	NOUN
ap-943	118	7	(	(	PUNCT
ap-943	118	8	4	4	NUM
ap-943	118	9	k	k	NOUN
ap-943	118	10	)	)	PUNCT
ap-943	118	11	the	the	DET
ap-943	118	12	typical	typical	ADJ
ap-943	118	13	photoluminescence	photoluminescence	NOUN
ap-943	118	14	emission	emission	NOUN
ap-943	118	15	due	due	ADP
ap-943	118	16	to	to	ADP
ap-943	118	17	the	the	DET
ap-943	118	18	transition	transition	NOUN
ap-943	118	19	of	of	ADP
ap-943	118	20	4i13/2	4i13/2	PROPN
ap-943	118	21	�	�	PROPN
ap-943	118	22	4i15/2	4i15/2	PROPN
ap-943	118	23	was	be	AUX
ap-943	118	24	observed	observe	VERB
ap-943	118	25	.	.	PUNCT
ap-943	119	1	this	this	DET
ap-943	119	2	emission	emission	NOUN
ap-943	119	3	,	,	PUNCT
ap-943	119	4	though	though	SCONJ
ap-943	119	5	rather	rather	ADV
ap-943	119	6	weak	weak	ADJ
ap-943	119	7	,	,	PUNCT
ap-943	119	8	was	be	AUX
ap-943	119	9	observed	observe	VERB
ap-943	119	10	even	even	ADV
ap-943	119	11	at	at	ADP
ap-943	119	12	room	room	NOUN
ap-943	119	13	temperature	temperature	NOUN
ap-943	119	14	when	when	SCONJ
ap-943	119	15	generated	generate	VERB
ap-943	119	16	by	by	ADP
ap-943	119	17	optical	optical	ADJ
ap-943	119	18	pumping	pumping	NOUN
ap-943	119	19	at	at	ADP
ap-943	119	20	980	980	NUM
ap-943	119	21	nm	nm	NOUN
ap-943	119	22	.	.	PUNCT
ap-943	120	1	40	40	NUM
ap-943	121	1	©	©	PROPN
ap-943	121	2	czech	czech	PROPN
ap-943	121	3	technical	technical	PROPN
ap-943	121	4	university	university	PROPN
ap-943	121	5	publishing	publishing	NOUN
ap-943	121	6	house	house	NOUN
ap-943	121	7	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-943	121	8	acta	acta	PROPN
ap-943	121	9	polytechnica	polytechnica	PROPN
ap-943	121	10	vol	vol	NOUN
ap-943	121	11	.	.	PUNCT
ap-943	122	1	48	48	NUM
ap-943	122	2	no	no	NOUN
ap-943	122	3	.	.	PUNCT
ap-943	123	1	1/2008	1/2008	NUM
ap-943	123	2	samples	sample	NOUN
ap-943	123	3	doping	dope	VERB
ap-943	123	4	er	er	INTJ
ap-943	123	5	(	(	PUNCT
ap-943	123	6	at	at	ADP
ap-943	123	7	%	%	NOUN
ap-943	123	8	)	)	PUNCT
ap-943	123	9	#	#	SYM
ap-943	123	10	1	1	NUM
ap-943	123	11	reference	reference	NOUN
ap-943	123	12	sample	sample	NOUN
ap-943	123	13	*	*	PUNCT
ap-943	123	14	…	…	PUNCT
ap-943	123	15	#	#	SYM
ap-943	123	16	2	2	NUM
ap-943	123	17	er	er	INTJ
ap-943	123	18	mer	mer	X
ap-943	123	19	�	�	PROPN
ap-943	123	20	0.0011	0.0011	NUM
ap-943	123	21	g	g	NOUN
ap-943	123	22	*	*	PROPN
ap-943	123	23	*	*	PROPN
ap-943	123	24	1.2	1.2	NUM
ap-943	123	25	#	#	SYM
ap-943	123	26	3	3	NUM
ap-943	123	27	er	er	INTJ
ap-943	123	28	mer	mer	X
ap-943	123	29	�	�	PROPN
ap-943	123	30	0.0012	0.0012	NUM
ap-943	123	31	g	g	PROPN
ap-943	123	32	*	*	PROPN
ap-943	123	33	*	*	PROPN
ap-943	123	34	1.7	1.7	NUM
ap-943	123	35	#	#	SYM
ap-943	123	36	4	4	NUM
ap-943	123	37	er	er	INTJ
ap-943	123	38	mer	mer	X
ap-943	123	39	�	�	PROPN
ap-943	123	40	0.0106	0.0106	NUM
ap-943	123	41	g	g	PROPN
ap-943	123	42	*	*	PROPN
ap-943	123	43	*	*	PROPN
ap-943	123	44	4.8	4.8	NUM
ap-943	123	45	#	#	SYM
ap-943	123	46	5	5	NUM
ap-943	123	47	er	er	INTJ
ap-943	123	48	mer	mer	X
ap-943	123	49	�	�	PROPN
ap-943	123	50	0.0104	0.0104	NUM
ap-943	123	51	g	g	PROPN
ap-943	123	52	*	*	PROPN
ap-943	123	53	*	*	PROPN
ap-943	123	54	6.0	6.0	NUM
ap-943	123	55	#	#	SYM
ap-943	123	56	6	6	NUM
ap-943	123	57	er	er	INTJ
ap-943	123	58	mer	mer	X
ap-943	123	59	�	�	PROPN
ap-943	123	60	0.5004	0.5004	NUM
ap-943	123	61	g	g	PROPN
ap-943	123	62	*	*	PROPN
ap-943	123	63	*	*	NOUN
ap-943	123	64	8.4	8.4	NUM
ap-943	123	65	#	#	SYM
ap-943	123	66	7	7	NUM
ap-943	123	67	er	er	INTJ
ap-943	123	68	mer	mer	X
ap-943	123	69	�	�	PROPN
ap-943	123	70	0.5004	0.5004	NUM
ap-943	123	71	g	g	PROPN
ap-943	123	72	*	*	PROPN
ap-943	123	73	*	*	PROPN
ap-943	123	74	9.0	9.0	NUM
ap-943	123	75	#	#	SYM
ap-943	123	76	8	8	NUM
ap-943	123	77	er	er	INTJ
ap-943	123	78	mer	mer	X
ap-943	123	79	�	�	PROPN
ap-943	123	80	0.5004	0.5004	NUM
ap-943	123	81	g	g	PROPN
ap-943	123	82	*	*	PROPN
ap-943	123	83	*	*	PROPN
ap-943	123	84	12.5	12.5	NUM
ap-943	123	85	#	#	SYM
ap-943	123	86	9	9	NUM
ap-943	123	87	er	er	INTJ
ap-943	123	88	mer	mer	X
ap-943	123	89	�	�	PROPN
ap-943	123	90	1.0004	1.0004	NUM
ap-943	123	91	g	g	NOUN
ap-943	123	92	*	*	PROPN
ap-943	123	93	*	*	PROPN
ap-943	123	94	15.7	15.7	NUM
ap-943	123	95	#	#	SYM
ap-943	123	96	10	10	NUM
ap-943	123	97	er	er	INTJ
ap-943	123	98	mer	mer	X
ap-943	123	99	�	�	PROPN
ap-943	123	100	1.0004	1.0004	NUM
ap-943	123	101	g	g	NOUN
ap-943	123	102	*	*	PROPN
ap-943	123	103	*	*	PROPN
ap-943	123	104	17.1	17.1	NUM
ap-943	123	105	*	*	PUNCT
ap-943	123	106	sample	sample	NOUN
ap-943	123	107	without	without	ADP
ap-943	123	108	er	er	INTJ
ap-943	123	109	doping	dope	VERB
ap-943	123	110	*	*	PUNCT
ap-943	123	111	*	*	PUNCT
ap-943	123	112	weight	weight	NOUN
ap-943	123	113	of	of	ADP
ap-943	123	114	er	er	INTJ
ap-943	123	115	powder	powder	NOUN
ap-943	123	116	placed	place	VERB
ap-943	123	117	on	on	ADP
ap-943	123	118	top	top	NOUN
ap-943	123	119	of	of	ADP
ap-943	123	120	the	the	DET
ap-943	123	121	carbon	carbon	NOUN
ap-943	123	122	target	target	NOUN
ap-943	123	123	table	table	NOUN
ap-943	123	124	2	2	NUM
ap-943	123	125	:	:	PUNCT
ap-943	123	126	composition	composition	NOUN
ap-943	123	127	of	of	ADP
ap-943	123	128	erbium	erbium	NOUN
ap-943	123	129	-	-	PUNCT
ap-943	123	130	doped	dope	VERB
ap-943	123	131	carbon	carbon	NOUN
ap-943	123	132	samples	sample	NOUN
ap-943	123	133	fabricated	fabricate	VERB
ap-943	123	134	by	by	ADP
ap-943	123	135	magnetron	magnetron	NOUN
ap-943	123	136	sputtering	sputtering	NOUN
ap-943	123	137	,	,	PUNCT
ap-943	123	138	showing	show	VERB
ap-943	123	139	the	the	DET
ap-943	123	140	relations	relation	NOUN
ap-943	123	141	between	between	ADP
ap-943	123	142	the	the	DET
ap-943	123	143	amounts	amount	NOUN
ap-943	123	144	of	of	ADP
ap-943	123	145	erbium	erbium	NOUN
ap-943	123	146	used	use	VERB
ap-943	123	147	for	for	ADP
ap-943	123	148	doping	doping	NOUN
ap-943	123	149	and	and	CCONJ
ap-943	123	150	the	the	DET
ap-943	123	151	actual	actual	ADJ
ap-943	123	152	concentrations	concentration	NOUN
ap-943	123	153	of	of	ADP
ap-943	123	154	erbium	erbium	NOUN
ap-943	123	155	found	find	VERB
ap-943	123	156	in	in	ADP
ap-943	123	157	the	the	DET
ap-943	123	158	doped	dope	VERB
ap-943	123	159	samples	sample	NOUN
ap-943	123	160	fig	fig	NOUN
ap-943	123	161	.	.	PUNCT
ap-943	124	1	6	6	NUM
ap-943	124	2	:	:	PUNCT
ap-943	124	3	absorbance	absorbance	NOUN
ap-943	124	4	spectra	spectra	NOUN
ap-943	124	5	of	of	ADP
ap-943	124	6	er3	er3	PROPN
ap-943	124	7	�	�	PROPN
ap-943	124	8	doped	dope	VERB
ap-943	124	9	carbon	carbon	NOUN
ap-943	124	10	layers	layer	NOUN
ap-943	124	11	acknowledgments	acknowledgment	NOUN
ap-943	124	12	our	our	PRON
ap-943	124	13	research	research	NOUN
ap-943	124	14	is	be	AUX
ap-943	124	15	supported	support	VERB
ap-943	124	16	by	by	ADP
ap-943	124	17	the	the	DET
ap-943	124	18	grant	grant	PROPN
ap-943	124	19	agency	agency	NOUN
ap-943	124	20	of	of	ADP
ap-943	124	21	the	the	DET
ap-943	124	22	czech	czech	PROPN
ap-943	124	23	republic	republic	NOUN
ap-943	124	24	under	under	ADP
ap-943	124	25	grant	grant	NOUN
ap-943	124	26	number	number	NOUN
ap-943	124	27	102/06/0424	102/06/0424	NUM
ap-943	124	28	and	and	CCONJ
ap-943	124	29	by	by	ADP
ap-943	124	30	research	research	NOUN
ap-943	124	31	program	program	NOUN
ap-943	124	32	msm6840770014	msm6840770014	NOUN
ap-943	124	33	of	of	ADP
ap-943	124	34	the	the	DET
ap-943	124	35	czech	czech	PROPN
ap-943	124	36	technical	technical	PROPN
ap-943	124	37	university	university	PROPN
ap-943	124	38	in	in	ADP
ap-943	124	39	prague	prague	PROPN
ap-943	124	40	.	.	PUNCT
ap-943	125	1	references	reference	NOUN
ap-943	125	2	[	[	X
ap-943	125	3	1	1	NUM
ap-943	125	4	]	]	PUNCT
ap-943	125	5	mandel	mandel	PROPN
ap-943	125	6	,	,	PUNCT
ap-943	125	7	t.	t.	PROPN
ap-943	125	8	,	,	PUNCT
ap-943	125	9	frischholz	frischholz	NOUN
ap-943	125	10	,	,	PUNCT
ap-943	125	11	m.	m.	NOUN
ap-943	125	12	,	,	PUNCT
ap-943	125	13	helbig	helbig	PROPN
ap-943	125	14	,	,	PUNCT
ap-943	125	15	r.	r.	PROPN
ap-943	125	16	,	,	PUNCT
ap-943	125	17	birkle	birkle	NOUN
ap-943	125	18	,	,	PUNCT
ap-943	125	19	s.	s.	PROPN
ap-943	125	20	,	,	PUNCT
ap-943	125	21	hammerschmidt	hammerschmidt	PROPN
ap-943	125	22	,	,	PUNCT
ap-943	125	23	a.	a.	NOUN
ap-943	125	24	:	:	PUNCT
ap-943	125	25	electrical	electrical	ADJ
ap-943	125	26	and	and	CCONJ
ap-943	125	27	opticalproperties	opticalpropertie	NOUN
ap-943	125	28	of	of	ADP
ap-943	125	29	heterostructures	heterostructure	NOUN
ap-943	125	30	made	make	VERB
ap-943	125	31	from	from	ADP
ap-943	125	32	diamond	diamond	NOUN
ap-943	125	33	-	-	PUNCT
ap-943	125	34	like	like	ADJ
ap-943	125	35	carbon	carbon	NOUN
ap-943	125	36	layers	layer	NOUN
ap-943	125	37	on	on	ADP
ap-943	125	38	crystalline	crystalline	ADJ
ap-943	125	39	silicon	silicon	NOUN
ap-943	125	40	.	.	PUNCT
ap-943	126	1	applied	apply	VERB
ap-943	126	2	surface	surface	NOUN
ap-943	126	3	science	science	NOUN
ap-943	126	4	,	,	PUNCT
ap-943	126	5	vol	vol	NOUN
ap-943	126	6	.	.	PROPN
ap-943	126	7	65	65	NUM
ap-943	126	8	(	(	PUNCT
ap-943	126	9	1993	1993	NUM
ap-943	126	10	)	)	PUNCT
ap-943	126	11	,	,	PUNCT
ap-943	126	12	no	no	INTJ
ap-943	126	13	.	.	NOUN
ap-943	126	14	6	6	NUM
ap-943	126	15	,	,	PUNCT
ap-943	126	16	p.	p.	NOUN
ap-943	126	17	795–799	795–799	NUM
ap-943	126	18	.	.	PUNCT
ap-943	127	1	[	[	X
ap-943	127	2	2	2	NUM
ap-943	127	3	]	]	SYM
ap-943	127	4	smith	smith	PROPN
ap-943	127	5	,	,	PUNCT
ap-943	127	6	s.	s.	PROPN
ap-943	127	7	m.	m.	PROPN
ap-943	127	8	,	,	PUNCT
ap-943	127	9	voight	voight	PROPN
ap-943	127	10	,	,	PUNCT
ap-943	127	11	s.	s.	PROPN
ap-943	127	12	a.	a.	PROPN
ap-943	127	13	,	,	PUNCT
ap-943	127	14	tompkins	tompkins	PROPN
ap-943	127	15	,	,	PUNCT
ap-943	127	16	h.	h.	PROPN
ap-943	127	17	,	,	PUNCT
ap-943	127	18	hooper	hooper	PROPN
ap-943	127	19	,	,	PUNCT
ap-943	127	20	a.	a.	PROPN
ap-943	127	21	,	,	PUNCT
ap-943	127	22	talin	talin	NOUN
ap-943	127	23	,	,	PUNCT
ap-943	127	24	a.	a.	NOUN
ap-943	127	25	a.	a.	PROPN
ap-943	127	26	,	,	PUNCT
ap-943	127	27	vella	vella	PROPN
ap-943	127	28	,	,	PUNCT
ap-943	127	29	j.	j.	PROPN
ap-943	127	30	:	:	PUNCT
ap-943	127	31	nitrogen	nitrogen	NOUN
ap-943	127	32	-	-	PUNCT
ap-943	127	33	doped	dope	VERB
ap-943	127	34	plasma	plasma	NOUN
ap-943	127	35	enhanced	enhance	VERB
ap-943	127	36	chemical	chemical	NOUN
ap-943	127	37	vapor	vapor	NOUN
ap-943	127	38	deposited	deposit	VERB
ap-943	127	39	(	(	PUNCT
ap-943	127	40	pecvd	pecvd	NOUN
ap-943	127	41	)	)	PUNCT
ap-943	127	42	amorphous	amorphous	ADJ
ap-943	127	43	carbon	carbon	NOUN
ap-943	127	44	:	:	PUNCT
ap-943	127	45	processes	process	NOUN
ap-943	127	46	and	and	CCONJ
ap-943	127	47	properties	property	NOUN
ap-943	127	48	.	.	PUNCT
ap-943	128	1	thin	thin	ADJ
ap-943	128	2	solid	solid	ADJ
ap-943	128	3	films	film	NOUN
ap-943	128	4	,	,	PUNCT
ap-943	128	5	vol	vol	NOUN
ap-943	128	6	.	.	PROPN
ap-943	128	7	398	398	NUM
ap-943	128	8	(	(	PUNCT
ap-943	128	9	2001	2001	NUM
ap-943	128	10	)	)	PUNCT
ap-943	128	11	,	,	PUNCT
ap-943	128	12	p.	p.	NOUN
ap-943	128	13	163–169	163–169	NUM
ap-943	128	14	.	.	PUNCT
ap-943	129	1	[	[	X
ap-943	129	2	3	3	NUM
ap-943	129	3	]	]	X
ap-943	129	4	kusano	kusano	PROPN
ap-943	129	5	,	,	PUNCT
ap-943	129	6	y.	y.	PROPN
ap-943	129	7	,	,	PUNCT
ap-943	129	8	evetts	evetts	PROPN
ap-943	129	9	,	,	PUNCT
ap-943	129	10	j.	j.	PROPN
ap-943	129	11	e.	e.	PROPN
ap-943	129	12	,	,	PUNCT
ap-943	129	13	somekh	somekh	PROPN
ap-943	129	14	,	,	PUNCT
ap-943	129	15	r.	r.	PROPN
ap-943	129	16	e.	e.	PROPN
ap-943	129	17	,	,	PUNCT
ap-943	129	18	hutchings	hutchings	PROPN
ap-943	129	19	i.	i.	PROPN
ap-943	129	20	m.	m.	PROPN
ap-943	129	21	:	:	PUNCT
ap-943	129	22	properties	property	NOUN
ap-943	129	23	of	of	ADP
ap-943	129	24	carbon	carbon	NOUN
ap-943	129	25	nitride	nitride	NOUN
ap-943	129	26	films	film	NOUN
ap-943	129	27	deposited	deposit	VERB
ap-943	129	28	by	by	ADP
ap-943	129	29	magnetron	magnetron	NOUN
ap-943	129	30	sputtering	sputtering	NOUN
ap-943	129	31	.	.	PUNCT
ap-943	130	1	thin	thin	ADJ
ap-943	130	2	solid	solid	ADJ
ap-943	130	3	films	film	NOUN
ap-943	130	4	,	,	PUNCT
ap-943	130	5	vol	vol	NOUN
ap-943	130	6	.	.	PUNCT
ap-943	131	1	332	332	NUM
ap-943	131	2	(	(	PUNCT
ap-943	131	3	1998	1998	NUM
ap-943	131	4	)	)	PUNCT
ap-943	131	5	,	,	PUNCT
ap-943	131	6	no	no	INTJ
ap-943	131	7	.	.	PUNCT
ap-943	132	1	1–2	1–2	NUM
ap-943	132	2	,	,	PUNCT
ap-943	132	3	p.	p.	NOUN
ap-943	132	4	56–61	56–61	NUM
ap-943	132	5	.	.	PUNCT
ap-943	133	1	[	[	X
ap-943	133	2	4	4	NUM
ap-943	133	3	]	]	X
ap-943	133	4	hüttel	hüttel	NOUN
ap-943	133	5	,	,	PUNCT
ap-943	133	6	i.	i.	PROPN
ap-943	133	7	,	,	PUNCT
ap-943	133	8	gurovič	gurovič	PROPN
ap-943	133	9	,	,	PUNCT
ap-943	133	10	j.	j.	PROPN
ap-943	133	11	,	,	PUNCT
ap-943	133	12	černý	černý	PROPN
ap-943	133	13	,	,	PUNCT
ap-943	133	14	f.	f.	PROPN
ap-943	133	15	,	,	PUNCT
ap-943	133	16	pospíšil	pospíšil	PROPN
ap-943	133	17	,	,	PUNCT
ap-943	133	18	j.	j.	PROPN
ap-943	133	19	:	:	PUNCT
ap-943	133	20	carbon	carbon	NOUN
ap-943	133	21	and	and	CCONJ
ap-943	133	22	carbon	carbon	NOUN
ap-943	133	23	nitride	nitride	NOUN
ap-943	133	24	planar	planar	ADJ
ap-943	133	25	waveguides	waveguide	VERB
ap-943	133	26	on	on	ADP
ap-943	133	27	silicon	silicon	NOUN
ap-943	133	28	substrates	substrate	NOUN
ap-943	133	29	.	.	PUNCT
ap-943	134	1	diamond	diamond	NOUN
ap-943	134	2	and	and	CCONJ
ap-943	134	3	related	related	ADJ
ap-943	134	4	materials	material	NOUN
ap-943	134	5	,	,	PUNCT
ap-943	134	6	vol	vol	NOUN
ap-943	134	7	.	.	NOUN
ap-943	134	8	8	8	NUM
ap-943	134	9	(	(	PUNCT
ap-943	134	10	1999	1999	NUM
ap-943	134	11	)	)	PUNCT
ap-943	134	12	,	,	PUNCT
ap-943	134	13	no	no	INTJ
ap-943	134	14	.	.	PUNCT
ap-943	135	1	2–5	2–5	NOUN
ap-943	135	2	,	,	PUNCT
ap-943	135	3	p.	p.	NOUN
ap-943	135	4	628–630	628–630	NUM
ap-943	135	5	.	.	PUNCT
ap-943	136	1	[	[	X
ap-943	136	2	5	5	NUM
ap-943	136	3	]	]	SYM
ap-943	136	4	hüttel	hüttel	NOUN
ap-943	136	5	,	,	PUNCT
ap-943	136	6	i.	i.	PROPN
ap-943	136	7	,	,	PUNCT
ap-943	136	8	černý	černý	PROPN
ap-943	136	9	,	,	PUNCT
ap-943	136	10	f.	f.	PROPN
ap-943	136	11	,	,	PUNCT
ap-943	136	12	gurovič	gurovič	PROPN
ap-943	136	13	,	,	PUNCT
ap-943	136	14	j.	j.	PROPN
ap-943	136	15	,	,	PUNCT
ap-943	136	16	chomát	chomát	NOUN
ap-943	136	17	,	,	PUNCT
ap-943	136	18	m.	m.	NOUN
ap-943	136	19	,	,	PUNCT
ap-943	136	20	matějec	matějec	NOUN
ap-943	136	21	,	,	PUNCT
ap-943	136	22	v.	v.	ADP
ap-943	136	23	:	:	PUNCT
ap-943	136	24	thin	thin	ADJ
ap-943	136	25	carbon	carbon	NOUN
ap-943	136	26	nitride	nitride	NOUN
ap-943	136	27	films	film	NOUN
ap-943	136	28	for	for	ADP
ap-943	136	29	integrated	integrated	ADJ
ap-943	136	30	optical	optical	ADJ
ap-943	136	31	chemical	chemical	NOUN
ap-943	136	32	sensors	sensor	NOUN
ap-943	136	33	.	.	PUNCT
ap-943	137	1	spie	spie	ADJ
ap-943	137	2	vol	vol	NOUN
ap-943	137	3	.	.	PUNCT
ap-943	137	4	3858	3858	NUM
ap-943	137	5	(	(	PUNCT
ap-943	137	6	1999	1999	NUM
ap-943	137	7	)	)	PUNCT
ap-943	137	8	,	,	PUNCT
ap-943	138	1	p.	p.	NOUN
ap-943	138	2	210–217	210–217	NUM
ap-943	138	3	.	.	PUNCT
ap-943	139	1	[	[	X
ap-943	139	2	6	6	NUM
ap-943	139	3	]	]	PUNCT
ap-943	139	4	polman	polman	NOUN
ap-943	139	5	,	,	PUNCT
ap-943	139	6	a.	a.	NOUN
ap-943	139	7	:	:	PUNCT
ap-943	139	8	erbium	erbium	NOUN
ap-943	139	9	implanted	implant	VERB
ap-943	139	10	thin	thin	ADJ
ap-943	139	11	film	film	NOUN
ap-943	139	12	photonic	photonic	NOUN
ap-943	139	13	materials	material	NOUN
ap-943	139	14	.	.	PUNCT
ap-943	140	1	journal	journal	NOUN
ap-943	140	2	of	of	ADP
ap-943	140	3	applied	applied	ADJ
ap-943	140	4	physics	physics	NOUN
ap-943	140	5	,	,	PUNCT
ap-943	140	6	vol	vol	NOUN
ap-943	140	7	.	.	PUNCT
ap-943	141	1	82	82	NUM
ap-943	141	2	(	(	PUNCT
ap-943	141	3	1997	1997	NUM
ap-943	141	4	)	)	PUNCT
ap-943	141	5	,	,	PUNCT
ap-943	141	6	p.	p.	PROPN
ap-943	141	7	1–39	1–39	PROPN
ap-943	141	8	.	.	PUNCT
ap-943	142	1	[	[	X
ap-943	142	2	7	7	NUM
ap-943	142	3	]	]	X
ap-943	142	4	kenyon	kenyon	PROPN
ap-943	142	5	,	,	PUNCT
ap-943	142	6	a.	a.	PROPN
ap-943	142	7	j.	j.	PROPN
ap-943	142	8	:	:	PUNCT
ap-943	142	9	recent	recent	ADJ
ap-943	142	10	developments	development	NOUN
ap-943	142	11	in	in	ADP
ap-943	142	12	rare	rare	ADJ
ap-943	142	13	-	-	PUNCT
ap-943	142	14	earth	earth	NOUN
ap-943	142	15	doped	dope	VERB
ap-943	142	16	materials	material	NOUN
ap-943	142	17	for	for	ADP
ap-943	142	18	optoelectronics	optoelectronic	NOUN
ap-943	142	19	.	.	PUNCT
ap-943	143	1	progress	progress	NOUN
ap-943	143	2	in	in	ADP
ap-943	143	3	quantum	quantum	ADJ
ap-943	143	4	electronics	electronic	NOUN
ap-943	143	5	,	,	PUNCT
ap-943	143	6	vol	vol	NOUN
ap-943	143	7	.	.	PROPN
ap-943	143	8	26	26	NUM
ap-943	143	9	(	(	PUNCT
ap-943	143	10	2002	2002	NUM
ap-943	143	11	)	)	PUNCT
ap-943	143	12	,	,	PUNCT
ap-943	143	13	no	no	INTJ
ap-943	143	14	.	.	PUNCT
ap-943	144	1	4–5	4–5	NUM
ap-943	144	2	,	,	PUNCT
ap-943	144	3	p.	p.	NOUN
ap-943	144	4	225–284	225–284	NUM
ap-943	144	5	.	.	PUNCT
ap-943	145	1	©	©	PROPN
ap-943	145	2	czech	czech	PROPN
ap-943	145	3	technical	technical	PROPN
ap-943	145	4	university	university	PROPN
ap-943	145	5	publishing	publishing	NOUN
ap-943	145	6	house	house	NOUN
ap-943	145	7	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-943	145	8	41	41	NUM
ap-943	145	9	acta	acta	PROPN
ap-943	145	10	polytechnica	polytechnica	PROPN
ap-943	145	11	vol	vol	NOUN
ap-943	145	12	.	.	PUNCT
ap-943	146	1	48	48	NUM
ap-943	146	2	no	no	NOUN
ap-943	146	3	.	.	PUNCT
ap-943	147	1	1/2008	1/2008	NUM
ap-943	147	2	1500	1500	NUM
ap-943	147	3	1520	1520	NUM
ap-943	147	4	1540	1540	NUM
ap-943	147	5	1560	1560	NUM
ap-943	147	6	1580	1580	NUM
ap-943	147	7	1600	1600	NUM
ap-943	147	8	20	20	NUM
ap-943	147	9	30	30	NUM
ap-943	147	10	40	40	NUM
ap-943	147	11	50	50	NUM
ap-943	147	12	60	60	NUM
ap-943	147	13	70	70	NUM
ap-943	147	14	�	�	NOUN
ap-943	147	15	ex	ex	X
ap-943	148	1	=	=	NOUN
ap-943	148	2	514.5	514.5	NUM
ap-943	148	3	nm	nm	NOUN
ap-943	148	4	t=	t=	VERB
ap-943	148	5	4	4	NUM
ap-943	148	6	k	k	NOUN
ap-943	148	7	p	p	X
ap-943	148	8	l	l	NOUN
ap-943	148	9	in	in	ADP
ap-943	148	10	te	te	PROPN
ap-943	148	11	n	n	ADV
ap-943	148	12	si	si	INTJ
ap-943	148	13	ty	ty	INTJ
ap-943	148	14	(	(	PUNCT
ap-943	148	15	a	a	DET
ap-943	148	16	.u	.u	NOUN
ap-943	148	17	.	.	PUNCT
ap-943	148	18	)	)	PUNCT
ap-943	149	1	wavelength	wavelength	NOUN
ap-943	149	2	(	(	PUNCT
ap-943	149	3	nm	nm	NOUN
ap-943	149	4	)	)	PUNCT
ap-943	149	5	1	1	NUM
ap-943	149	6	530	530	NUM
ap-943	149	7	nm	nm	ADJ
ap-943	149	8	fig	fig	NOUN
ap-943	149	9	.	.	PUNCT
ap-943	150	1	7	7	NUM
ap-943	150	2	:	:	PUNCT
ap-943	150	3	photoluminescence	photoluminescence	NOUN
ap-943	150	4	spectra	spectra	NOUN
ap-943	150	5	of	of	ADP
ap-943	150	6	erbium	erbium	NOUN
ap-943	150	7	doped	dope	VERB
ap-943	150	8	carbon	carbon	NOUN
ap-943	150	9	layers	layer	NOUN
ap-943	150	10	fig	fig	NOUN
ap-943	150	11	.	.	PUNCT
ap-943	151	1	8	8	NUM
ap-943	151	2	:	:	PUNCT
ap-943	151	3	photoluminescence	photoluminescence	NOUN
ap-943	151	4	spectra	spectra	NOUN
ap-943	151	5	of	of	ADP
ap-943	151	6	erbium	erbium	NOUN
ap-943	151	7	doped	dope	VERB
ap-943	151	8	carbon	carbon	NOUN
ap-943	151	9	layers	layer	NOUN
ap-943	151	10	[	[	X
ap-943	151	11	8	8	NUM
ap-943	151	12	]	]	X
ap-943	151	13	van	van	PROPN
ap-943	151	14	den	den	PROPN
ap-943	151	15	hoven	hoven	PROPN
ap-943	151	16	,	,	PUNCT
ap-943	151	17	g.	g.	PROPN
ap-943	151	18	n.	n.	PROPN
ap-943	151	19	,	,	PUNCT
ap-943	151	20	snoeks	snoeks	PROPN
ap-943	151	21	,	,	PUNCT
ap-943	151	22	e.	e.	PROPN
ap-943	151	23	,	,	PUNCT
ap-943	151	24	polman	polman	NOUN
ap-943	151	25	,	,	PUNCT
ap-943	151	26	a.	a.	NOUN
ap-943	151	27	,	,	PUNCT
ap-943	151	28	vanuffelen	vanuffelen	VERB
ap-943	151	29	,	,	PUNCT
ap-943	151	30	j.	j.	PROPN
ap-943	151	31	w.	w.	PROPN
ap-943	151	32	m.	m.	PROPN
ap-943	151	33	,	,	PUNCT
ap-943	151	34	oei	oei	PROPN
ap-943	151	35	,	,	PUNCT
ap-943	151	36	y.	y.	PROPN
ap-943	151	37	s.	s.	PROPN
ap-943	151	38	,	,	PUNCT
ap-943	151	39	smit	smit	PROPN
ap-943	151	40	,	,	PUNCT
ap-943	151	41	m.	m.	PROPN
ap-943	151	42	k.	k.	PROPN
ap-943	151	43	:	:	PUNCT
ap-943	152	1	photoluminesce	photoluminesce	VERB
ap-943	152	2	characterization	characterization	NOUN
ap-943	152	3	of	of	ADP
ap-943	152	4	er	er	ADV
ap-943	152	5	-	-	PUNCT
ap-943	152	6	implanted	implant	VERB
ap-943	152	7	al2o3	al2o3	PROPN
ap-943	152	8	films	film	NOUN
ap-943	152	9	.	.	PUNCT
ap-943	153	1	applied	apply	VERB
ap-943	153	2	physics	physics	NOUN
ap-943	153	3	letters	letter	NOUN
ap-943	153	4	,	,	PUNCT
ap-943	153	5	vol	vol	NOUN
ap-943	153	6	.	.	PROPN
ap-943	154	1	62	62	NUM
ap-943	154	2	(	(	PUNCT
ap-943	154	3	1993	1993	NUM
ap-943	154	4	)	)	PUNCT
ap-943	154	5	,	,	PUNCT
ap-943	154	6	no	no	INTJ
ap-943	154	7	.	.	NOUN
ap-943	154	8	24	24	NUM
ap-943	154	9	,	,	PUNCT
ap-943	154	10	p.	p.	NOUN
ap-943	154	11	3065–3067	3065–3067	NUM
ap-943	154	12	.	.	PUNCT
ap-943	155	1	[	[	X
ap-943	155	2	9	9	NUM
ap-943	155	3	]	]	PUNCT
ap-943	155	4	prajzler	prajzler	NOUN
ap-943	155	5	,	,	PUNCT
ap-943	155	6	v.	v.	ADV
ap-943	155	7	,	,	PUNCT
ap-943	155	8	hüttel	hüttel	NOUN
ap-943	155	9	,	,	PUNCT
ap-943	155	10	i.	i.	PROPN
ap-943	155	11	,	,	PUNCT
ap-943	155	12	nekvindová	nekvindová	PROPN
ap-943	155	13	,	,	PUNCT
ap-943	155	14	p.	p.	PROPN
ap-943	155	15	,	,	PUNCT
ap-943	155	16	schröfel	schröfel	PROPN
ap-943	155	17	,	,	PUNCT
ap-943	155	18	j.	j.	PROPN
ap-943	155	19	,	,	PUNCT
ap-943	155	20	macková	macková	PROPN
ap-943	155	21	,	,	PUNCT
ap-943	155	22	a.	a.	PROPN
ap-943	155	23	,	,	PUNCT
ap-943	155	24	gurovič	gurovič	PROPN
ap-943	155	25	,	,	PUNCT
ap-943	155	26	j.	j.	PROPN
ap-943	155	27	:	:	PUNCT
ap-943	155	28	erbium	erbium	NOUN
ap-943	155	29	doping	doping	NOUN
ap-943	155	30	into	into	ADP
ap-943	155	31	thin	thin	ADJ
ap-943	155	32	carbon	carbon	NOUN
ap-943	155	33	optical	optical	ADJ
ap-943	155	34	layers	layer	NOUN
ap-943	155	35	.	.	PUNCT
ap-943	156	1	thin	thin	ADJ
ap-943	156	2	solid	solid	ADJ
ap-943	156	3	films	film	NOUN
ap-943	156	4	,	,	PUNCT
ap-943	156	5	vol	vol	NOUN
ap-943	156	6	.	.	PROPN
ap-943	156	7	433	433	NUM
ap-943	156	8	(	(	PUNCT
ap-943	156	9	2003	2003	NUM
ap-943	156	10	)	)	PUNCT
ap-943	156	11	,	,	PUNCT
ap-943	156	12	no	no	INTJ
ap-943	156	13	.	.	PUNCT
ap-943	157	1	1–2	1–2	NUM
ap-943	157	2	,	,	PUNCT
ap-943	157	3	p.	p.	NOUN
ap-943	157	4	363–366	363–366	NUM
ap-943	157	5	.	.	PUNCT
ap-943	158	1	[	[	X
ap-943	158	2	10	10	NUM
ap-943	158	3	]	]	PUNCT
ap-943	158	4	prajzler	prajzler	NOUN
ap-943	158	5	,	,	PUNCT
ap-943	158	6	v.	v.	ADV
ap-943	158	7	,	,	PUNCT
ap-943	158	8	hüttel	hüttel	PROPN
ap-943	158	9	,	,	PUNCT
ap-943	158	10	i.	i.	PROPN
ap-943	158	11	,	,	PUNCT
ap-943	158	12	schröfel	schröfel	PROPN
ap-943	158	13	,	,	PUNCT
ap-943	158	14	j.	j.	PROPN
ap-943	158	15	,	,	PUNCT
ap-943	158	16	nekvindová	nekvindová	PROPN
ap-943	158	17	,	,	PUNCT
ap-943	158	18	p.	p.	PROPN
ap-943	158	19	,	,	PUNCT
ap-943	158	20	gurovič	gurovič	PROPN
ap-943	158	21	,	,	PUNCT
ap-943	158	22	j.	j.	PROPN
ap-943	158	23	,	,	PUNCT
ap-943	158	24	macková	macková	PROPN
ap-943	158	25	,	,	PUNCT
ap-943	158	26	a.	a.	NOUN
ap-943	158	27	:	:	PUNCT
ap-943	158	28	carbon	carbon	NOUN
ap-943	158	29	layers	layer	NOUN
ap-943	158	30	for	for	ADP
ap-943	158	31	integrated	integrated	ADJ
ap-943	158	32	optics	optic	NOUN
ap-943	158	33	.	.	PUNCT
ap-943	159	1	photonics	photonic	NOUN
ap-943	159	2	,	,	PUNCT
ap-943	159	3	devices	device	NOUN
ap-943	159	4	,	,	PUNCT
ap-943	159	5	and	and	CCONJ
ap-943	159	6	systems	systems	PROPN
ap-943	159	7	ii	ii	PROPN
ap-943	159	8	,	,	PUNCT
ap-943	159	9	spie	spie	NOUN
ap-943	159	10	(	(	PUNCT
ap-943	159	11	2002	2002	NUM
ap-943	159	12	)	)	PUNCT
ap-943	159	13	,	,	PUNCT
ap-943	159	14	p.	p.	NOUN
ap-943	159	15	342–347	342–347	NUM
ap-943	159	16	.	.	PUNCT
ap-943	160	1	[	[	X
ap-943	160	2	11	11	NUM
ap-943	160	3	]	]	PUNCT
ap-943	160	4	prajzler	prajzler	NOUN
ap-943	160	5	,	,	PUNCT
ap-943	160	6	v.	v.	ADV
ap-943	160	7	,	,	PUNCT
ap-943	160	8	hüttel	hüttel	NOUN
ap-943	160	9	,	,	PUNCT
ap-943	160	10	i.	i.	PROPN
ap-943	160	11	,	,	PUNCT
ap-943	160	12	špirková	špirková	PROPN
ap-943	160	13	,	,	PUNCT
ap-943	160	14	j.	j.	PROPN
ap-943	160	15	,	,	PUNCT
ap-943	160	16	oswald	oswald	PROPN
ap-943	160	17	,	,	PUNCT
ap-943	160	18	j.	j.	PROPN
ap-943	160	19	,	,	PUNCT
ap-943	160	20	peřina	peřina	PROPN
ap-943	160	21	,	,	PUNCT
ap-943	160	22	v.	v.	PROPN
ap-943	160	23	,	,	PUNCT
ap-943	160	24	machovič	machovič	NOUN
ap-943	160	25	,	,	PUNCT
ap-943	160	26	v.	v.	PROPN
ap-943	160	27	,	,	PUNCT
ap-943	160	28	jeřábek	jeřábek	PROPN
ap-943	160	29	,	,	PUNCT
ap-943	160	30	v.	v.	ADP
ap-943	160	31	:	:	PUNCT
ap-943	160	32	properties	property	NOUN
ap-943	160	33	of	of	ADP
ap-943	160	34	sputtered	sputtered	ADJ
ap-943	160	35	carbon	carbon	NOUN
ap-943	160	36	layers	layer	NOUN
ap-943	160	37	containing	contain	VERB
ap-943	160	38	erbium	erbium	NOUN
ap-943	160	39	and	and	CCONJ
ap-943	160	40	ytterbium	ytterbium	NOUN
ap-943	160	41	ions	ion	NOUN
ap-943	160	42	.	.	PUNCT
ap-943	161	1	electronic	electronic	ADJ
ap-943	161	2	devices	device	NOUN
ap-943	161	3	and	and	CCONJ
ap-943	161	4	systems	system	NOUN
ap-943	161	5	eds2006	eds2006	NOUN
ap-943	161	6	,	,	PUNCT
ap-943	161	7	imaps	imaps	PROPN
ap-943	161	8	cs	c	NOUN
ap-943	161	9	,	,	PUNCT
ap-943	161	10	(	(	PUNCT
ap-943	161	11	2006	2006	NUM
ap-943	161	12	)	)	PUNCT
ap-943	161	13	,	,	PUNCT
ap-943	161	14	p.	p.	NOUN
ap-943	161	15	403	403	NUM
ap-943	161	16	-	-	SYM
ap-943	161	17	408	408	NUM
ap-943	161	18	.	.	PUNCT
ap-943	162	1	[	[	X
ap-943	162	2	12	12	NUM
ap-943	162	3	]	]	PUNCT
ap-943	162	4	baranov	baranov	NOUN
ap-943	162	5	,	,	PUNCT
ap-943	162	6	a.	a.	NOUN
ap-943	162	7	m.	m.	NOUN
ap-943	162	8	,	,	PUNCT
ap-943	162	9	sleptsov	sleptsov	NOUN
ap-943	162	10	,	,	PUNCT
ap-943	162	11	v.	v.	PROPN
ap-943	162	12	v.	v.	ADP
ap-943	162	13	,	,	PUNCT
ap-943	162	14	nefedov	nefedov	PROPN
ap-943	162	15	,	,	PUNCT
ap-943	162	16	a.	a.	NOUN
ap-943	162	17	a.	a.	PROPN
ap-943	162	18	,	,	PUNCT
ap-943	162	19	varfolomeev	varfolomeev	PROPN
ap-943	162	20	,	,	PUNCT
ap-943	162	21	a.	a.	PROPN
ap-943	162	22	e.	e.	PROPN
ap-943	162	23	,	,	PUNCT
ap-943	162	24	fanchenko	fanchenko	PROPN
ap-943	162	25	,	,	PUNCT
ap-943	162	26	s.	s.	PROPN
ap-943	162	27	s.	s.	PROPN
ap-943	162	28	,	,	PUNCT
ap-943	162	29	calliari	calliari	PROPN
ap-943	162	30	,	,	PUNCT
ap-943	162	31	l.	l.	PROPN
ap-943	162	32	speranza	speranza	PROPN
ap-943	162	33	,	,	PUNCT
ap-943	162	34	g.	g.	PROPN
ap-943	162	35	,	,	PUNCT
ap-943	162	36	ferrari	ferrari	PROPN
ap-943	162	37	,	,	PUNCT
ap-943	162	38	m.	m.	NOUN
ap-943	162	39	,	,	PUNCT
ap-943	162	40	chiasera	chiasera	NOUN
ap-943	162	41	,	,	PUNCT
ap-943	162	42	a.	a.	NOUN
ap-943	162	43	:	:	PUNCT
ap-943	162	44	erbium	erbium	NOUN
ap-943	162	45	photoluminescence	photoluminescence	NOUN
ap-943	162	46	in	in	ADP
ap-943	162	47	hydrogenated	hydrogenate	VERB
ap-943	162	48	amorphous	amorphous	ADJ
ap-943	162	49	carbon	carbon	NOUN
ap-943	162	50	.	.	PUNCT
ap-943	163	1	physics	physics	NOUN
ap-943	163	2	status	status	NOUN
ap-943	163	3	solidy	solidy	PROPN
ap-943	163	4	b	b	PROPN
ap-943	163	5	,	,	PUNCT
ap-943	163	6	vol	vol	NOUN
ap-943	163	7	.	.	PROPN
ap-943	164	1	234	234	NUM
ap-943	164	2	(	(	PUNCT
ap-943	164	3	2002	2002	NUM
ap-943	164	4	)	)	PUNCT
ap-943	164	5	,	,	PUNCT
ap-943	164	6	no	no	INTJ
ap-943	164	7	.	.	NOUN
ap-943	164	8	2	2	NUM
ap-943	164	9	,	,	PUNCT
ap-943	164	10	p.	p.	PROPN
ap-943	164	11	r1	r1	PROPN
ap-943	164	12	–	–	PUNCT
ap-943	164	13	r3	r3	NOUN
ap-943	164	14	.	.	PUNCT
ap-943	165	1	[	[	X
ap-943	165	2	13	13	NUM
ap-943	165	3	]	]	SYM
ap-943	165	4	speranza	speranza	PROPN
ap-943	165	5	,	,	PUNCT
ap-943	165	6	g.	g.	PROPN
ap-943	165	7	,	,	PUNCT
ap-943	165	8	calliari	calliari	PROPN
ap-943	165	9	,	,	PUNCT
ap-943	165	10	l.	l.	PROPN
ap-943	165	11	,	,	PUNCT
ap-943	165	12	ferrari	ferrari	PROPN
ap-943	165	13	,	,	PUNCT
ap-943	165	14	m.	m.	NOUN
ap-943	165	15	,	,	PUNCT
ap-943	165	16	chiasera	chiasera	PROPN
ap-943	165	17	,	,	PUNCT
ap-943	165	18	a.	a.	PROPN
ap-943	165	19	,	,	PUNCT
ap-943	165	20	ngoc	ngoc	PROPN
ap-943	165	21	,	,	PUNCT
ap-943	165	22	k.	k.	PROPN
ap-943	165	23	t.	t.	PROPN
ap-943	165	24	,	,	PUNCT
ap-943	165	25	baranov	baranov	NOUN
ap-943	165	26	,	,	PUNCT
ap-943	165	27	a.	a.	NOUN
ap-943	165	28	m.	m.	NOUN
ap-943	165	29	,	,	PUNCT
ap-943	165	30	sleptsov	sleptsov	NOUN
ap-943	165	31	,	,	PUNCT
ap-943	165	32	v.	v.	PROPN
ap-943	165	33	v.	v.	ADP
ap-943	165	34	,	,	PUNCT
ap-943	165	35	nefedov	nefedov	PROPN
ap-943	165	36	,	,	PUNCT
ap-943	165	37	a.	a.	NOUN
ap-943	165	38	a.	a.	PROPN
ap-943	165	39	,	,	PUNCT
ap-943	165	40	varfolomeev	varfolomeev	PROPN
ap-943	165	41	,	,	PUNCT
ap-943	165	42	a.	a.	NOUN
ap-943	165	43	e	e	PROPN
ap-943	165	44	..	..	PUNCT
ap-943	165	45	fanchenko	fanchenko	PROPN
ap-943	165	46	,	,	PUNCT
ap-943	165	47	s.	s.	PROPN
ap-943	165	48	s.	s.	PROPN
ap-943	165	49	:	:	PUNCT
ap-943	165	50	erbium	erbium	NOUN
ap-943	165	51	doped	dope	VERB
ap-943	165	52	thin	thin	ADJ
ap-943	165	53	amorphous	amorphous	ADJ
ap-943	165	54	carbon	carbon	NOUN
ap-943	165	55	films	film	NOUN
ap-943	165	56	prepared	prepare	VERB
ap-943	165	57	by	by	ADP
ap-943	165	58	mixed	mixed	ADJ
ap-943	165	59	cvd	cvd	PROPN
ap-943	165	60	sputtering	sputtering	NOUN
ap-943	165	61	.	.	PUNCT
ap-943	166	1	applied	apply	VERB
ap-943	166	2	surface	surface	NOUN
ap-943	166	3	science	science	NOUN
ap-943	166	4	,	,	PUNCT
ap-943	166	5	vol	vol	NOUN
ap-943	166	6	.	.	PUNCT
ap-943	167	1	238	238	NUM
ap-943	167	2	(	(	PUNCT
ap-943	167	3	2004	2004	NUM
ap-943	167	4	)	)	PUNCT
ap-943	167	5	,	,	PUNCT
ap-943	167	6	p.	p.	NOUN
ap-943	167	7	117–120	117–120	NUM
ap-943	167	8	.	.	PUNCT
ap-943	168	1	[	[	X
ap-943	168	2	14	14	NUM
ap-943	168	3	]	]	PUNCT
ap-943	168	4	saarilahti	saarilahti	NOUN
ap-943	168	5	,	,	PUNCT
ap-943	168	6	j.	j.	PROPN
ap-943	168	7	,	,	PUNCT
ap-943	168	8	rauhala	rauhala	PROPN
ap-943	168	9	,	,	PUNCT
ap-943	168	10	e.	e.	PROPN
ap-943	168	11	:	:	PUNCT
ap-943	168	12	interactive	interactive	ADJ
ap-943	168	13	personal	personal	ADJ
ap-943	168	14	-	-	PUNCT
ap-943	168	15	computer	computer	NOUN
ap-943	168	16	data	datum	NOUN
ap-943	168	17	-	-	PUNCT
ap-943	168	18	analysis	analysis	NOUN
ap-943	168	19	of	of	ADP
ap-943	168	20	ion	ion	NOUN
ap-943	168	21	backscattering	backscatter	VERB
ap-943	168	22	spectra	spectra	NOUN
ap-943	168	23	.	.	PUNCT
ap-943	169	1	nuclear	nuclear	ADJ
ap-943	169	2	instruments	instrument	NOUN
ap-943	169	3	&	&	CCONJ
ap-943	169	4	methods	method	NOUN
ap-943	169	5	in	in	ADP
ap-943	169	6	physics	physics	NOUN
ap-943	169	7	research	research	PROPN
ap-943	169	8	section	section	NOUN
ap-943	169	9	b	b	X
ap-943	169	10	-	-	PUNCT
ap-943	169	11	beam	beam	NOUN
ap-943	169	12	interactions	interaction	NOUN
ap-943	169	13	with	with	ADP
ap-943	169	14	materials	material	NOUN
ap-943	169	15	and	and	CCONJ
ap-943	169	16	atoms	atom	NOUN
ap-943	169	17	,	,	PUNCT
ap-943	169	18	vol	vol	NOUN
ap-943	169	19	.	.	PROPN
ap-943	169	20	64	64	NUM
ap-943	169	21	(	(	PUNCT
ap-943	169	22	1992	1992	NUM
ap-943	169	23	)	)	PUNCT
ap-943	169	24	,	,	PUNCT
ap-943	169	25	no	no	INTJ
ap-943	169	26	.	.	PUNCT
ap-943	170	1	1–4	1–4	NUM
ap-943	170	2	,	,	PUNCT
ap-943	170	3	p.	p.	NOUN
ap-943	171	1	734–738	734–738	NUM
ap-943	171	2	.	.	PUNCT
ap-943	172	1	[	[	X
ap-943	172	2	15	15	NUM
ap-943	172	3	]	]	X
ap-943	172	4	mayer	mayer	PROPN
ap-943	172	5	,	,	PUNCT
ap-943	172	6	m.	m.	NOUN
ap-943	172	7	:	:	PUNCT
ap-943	172	8	simnra	simnra	NOUN
ap-943	172	9	users	user	NOUN
ap-943	172	10	guide	guide	VERB
ap-943	172	11	,	,	PUNCT
ap-943	172	12	institut	institut	PROPN
ap-943	172	13	für	für	PROPN
ap-943	172	14	plasmaphysik	plasmaphysik	PROPN
ap-943	172	15	,	,	PUNCT
ap-943	172	16	1998	1998	NUM
ap-943	172	17	.	.	PUNCT
ap-943	173	1	[	[	X
ap-943	173	2	16	16	NUM
ap-943	173	3	]	]	X
ap-943	173	4	chryssou	chryssou	PROPN
ap-943	173	5	,	,	PUNCT
ap-943	173	6	c.	c.	PROPN
ap-943	173	7	e.	e.	PROPN
ap-943	173	8	,	,	PUNCT
ap-943	173	9	pitt	pitt	PROPN
ap-943	173	10	,	,	PUNCT
ap-943	173	11	c.	c.	PROPN
ap-943	173	12	w.	w.	PROPN
ap-943	173	13	:	:	PUNCT
ap-943	173	14	er(3+)-doped	er(3+)-dope	VERB
ap-943	173	15	al2o3	al2o3	PROPN
ap-943	173	16	thin	thin	ADJ
ap-943	173	17	films	film	NOUN
ap-943	173	18	by	by	ADP
ap-943	173	19	plasma	plasma	NOUN
ap-943	173	20	-	-	PUNCT
ap-943	173	21	enhanced	enhance	VERB
ap-943	173	22	chemical	chemical	NOUN
ap-943	173	23	vapor	vapor	NOUN
ap-943	173	24	deposition	deposition	NOUN
ap-943	173	25	(	(	PUNCT
ap-943	173	26	pecvd	pecvd	NOUN
ap-943	173	27	)	)	PUNCT
ap-943	173	28	exhibiting	exhibit	VERB
ap-943	173	29	a	a	DET
ap-943	173	30	55	55	NUM
ap-943	173	31	nm	nm	ADJ
ap-943	173	32	optical	optical	ADJ
ap-943	173	33	bandwidth	bandwidth	NOUN
ap-943	173	34	.	.	PUNCT
ap-943	174	1	ieee	ieee	PROPN
ap-943	174	2	journal	journal	PROPN
ap-943	174	3	of	of	ADP
ap-943	174	4	quantum	quantum	ADJ
ap-943	174	5	electronics	electronic	NOUN
ap-943	174	6	,	,	PUNCT
ap-943	174	7	vol	vol	NOUN
ap-943	174	8	.	.	PUNCT
ap-943	175	1	34	34	NUM
ap-943	175	2	(	(	PUNCT
ap-943	175	3	1998	1998	NUM
ap-943	175	4	)	)	PUNCT
ap-943	175	5	,	,	PUNCT
ap-943	175	6	no	no	INTJ
ap-943	175	7	.	.	NOUN
ap-943	175	8	2	2	NUM
ap-943	175	9	,	,	PUNCT
ap-943	175	10	p.	p.	NOUN
ap-943	175	11	282–285	282–285	NUM
ap-943	175	12	.	.	PUNCT
ap-943	176	1	[	[	X
ap-943	176	2	17	17	NUM
ap-943	176	3	]	]	X
ap-943	176	4	rusli	rusli	NOUN
ap-943	176	5	,	,	PUNCT
ap-943	176	6	amaratunga	amaratunga	PROPN
ap-943	176	7	g.	g.	PROPN
ap-943	176	8	a.	a.	PROPN
ap-943	176	9	j.	j.	PROPN
ap-943	176	10	,	,	PUNCT
ap-943	176	11	silva	silva	PROPN
ap-943	176	12	,	,	PUNCT
ap-943	176	13	s.	s.	PROPN
ap-943	176	14	r.	r.	PROPN
ap-943	176	15	p.	p.	PROPN
ap-943	176	16	:	:	PUNCT
ap-943	176	17	photoluminescence	photoluminescence	NOUN
ap-943	176	18	in	in	ADP
ap-943	176	19	amorphous	amorphous	ADJ
ap-943	176	20	carbon	carbon	NOUN
ap-943	176	21	thin	thin	ADJ
ap-943	176	22	films	film	NOUN
ap-943	176	23	and	and	CCONJ
ap-943	176	24	its	its	PRON
ap-943	176	25	relation	relation	NOUN
ap-943	176	26	to	to	ADP
ap-943	176	27	the	the	DET
ap-943	176	28	microscopic	microscopic	ADJ
ap-943	176	29	properties	property	NOUN
ap-943	176	30	.	.	PUNCT
ap-943	177	1	thin	thin	ADJ
ap-943	177	2	solid	solid	ADJ
ap-943	177	3	films	film	NOUN
ap-943	177	4	,	,	PUNCT
ap-943	177	5	vol	vol	NOUN
ap-943	177	6	.	.	PROPN
ap-943	177	7	270	270	NUM
ap-943	177	8	(	(	PUNCT
ap-943	177	9	1995	1995	NUM
ap-943	177	10	)	)	PUNCT
ap-943	177	11	,	,	PUNCT
ap-943	177	12	no	no	INTJ
ap-943	177	13	.	.	PUNCT
ap-943	178	1	1–2	1–2	NUM
ap-943	178	2	,	,	PUNCT
ap-943	178	3	p.	p.	NOUN
ap-943	178	4	160–164	160–164	NUM
ap-943	178	5	.	.	PUNCT
ap-943	179	1	ing	ing	ADJ
ap-943	179	2	.	.	PUNCT
ap-943	179	3	václav	václav	ADJ
ap-943	179	4	prajzler	prajzler	NOUN
ap-943	179	5	,	,	PUNCT
ap-943	179	6	ph.d	ph.d	PROPN
ap-943	179	7	.	.	PUNCT
ap-943	180	1	e	e	X
ap-943	180	2	-	-	NOUN
ap-943	180	3	mail	mail	NOUN
ap-943	180	4	:	:	PUNCT
ap-943	180	5	xprajzlv@feld.cvut.cz	xprajzlv@feld.cvut.cz	PROPN
ap-943	180	6	doc	doc	PROPN
ap-943	180	7	.	.	PROPN
ap-943	180	8	ing	ing	PROPN
ap-943	180	9	.	.	PUNCT
ap-943	180	10	zdeněk	zdeněk	PROPN
ap-943	180	11	burian	burian	PROPN
ap-943	180	12	,	,	PUNCT
ap-943	180	13	csc	csc	PROPN
ap-943	180	14	.	.	PROPN
ap-943	181	1	e	e	X
ap-943	181	2	-	-	NOUN
ap-943	181	3	mail	mail	NOUN
ap-943	181	4	:	:	PUNCT
ap-943	181	5	burian@fel.cvut.cz	burian@fel.cvut.cz	PROPN
ap-943	181	6	ing	ing	PROPN
ap-943	181	7	.	.	PROPN
ap-943	181	8	vitězslav	vitězslav	PROPN
ap-943	181	9	jeřábek	jeřábek	PROPN
ap-943	181	10	,	,	PUNCT
ap-943	181	11	csc	csc	PROPN
ap-943	181	12	.	.	PUNCT
ap-943	182	1	e	e	X
ap-943	182	2	-	-	NOUN
ap-943	182	3	mail	mail	NOUN
ap-943	182	4	:	:	PUNCT
ap-943	182	5	jerabek@fel.cvut.cz	jerabek@fel.cvut.cz	PROPN
ap-943	182	6	department	department	PROPN
ap-943	182	7	of	of	ADP
ap-943	182	8	microelectronics	microelectronics	PROPN
ap-943	182	9	czech	czech	PROPN
ap-943	182	10	technical	technical	PROPN
ap-943	182	11	university	university	PROPN
ap-943	182	12	in	in	ADP
ap-943	182	13	prague	prague	PROPN
ap-943	182	14	faculty	faculty	NOUN
ap-943	182	15	of	of	ADP
ap-943	182	16	electrical	electrical	ADJ
ap-943	182	17	engineering	engineering	NOUN
ap-943	182	18	technická	technická	NOUN
ap-943	182	19	2	2	NUM
ap-943	182	20	166	166	NUM
ap-943	182	21	27	27	NUM
ap-943	182	22	prague	prague	NOUN
ap-943	182	23	,	,	PUNCT
ap-943	182	24	czech	czech	PROPN
ap-943	182	25	republic	republic	PROPN
ap-943	182	26	doc	doc	PROPN
ap-943	182	27	.	.	PROPN
ap-943	183	1	ing	ing	PROPN
ap-943	183	2	.	.	PUNCT
ap-943	184	1	ivan	ivan	PROPN
ap-943	184	2	hüttel	hüttel	PROPN
ap-943	184	3	,	,	PUNCT
ap-943	184	4	drsc	drsc	PROPN
ap-943	184	5	.	.	PUNCT
ap-943	185	1	e	e	X
ap-943	185	2	-	-	NOUN
ap-943	185	3	mail	mail	NOUN
ap-943	185	4	:	:	PUNCT
ap-943	185	5	ivan.huttel@vscht.cz	ivan.huttel@vscht.cz	NOUN
ap-943	185	6	rndr	rndr	PROPN
ap-943	185	7	.	.	PUNCT
ap-943	186	1	jarmila	jarmila	PROPN
ap-943	187	1	špirková	špirková	X
ap-943	187	2	,	,	PUNCT
ap-943	187	3	csc	csc	PROPN
ap-943	187	4	.	.	PROPN
ap-943	188	1	e	e	X
ap-943	188	2	-	-	NOUN
ap-943	188	3	mail	mail	NOUN
ap-943	188	4	:	:	PUNCT
ap-943	188	5	jarmila.spirkova@vscht.cz	jarmila.spirkova@vscht.cz	PROPN
ap-943	188	6	institute	institute	PROPN
ap-943	188	7	of	of	ADP
ap-943	188	8	chemical	chemical	PROPN
ap-943	188	9	technology	technology	NOUN
ap-943	188	10	technická	technická	NOUN
ap-943	188	11	5	5	NUM
ap-943	188	12	166	166	NUM
ap-943	188	13	27	27	NUM
ap-943	188	14	prague	prague	NOUN
ap-943	188	15	,	,	PUNCT
ap-943	188	16	czech	czech	PROPN
ap-943	188	17	republic	republic	PROPN
ap-943	188	18	ing	ing	PROPN
ap-943	188	19	.	.	PUNCT
ap-943	189	1	ján	ján	PROPN
ap-943	189	2	gurovič	gurovič	PROPN
ap-943	189	3	e	e	NOUN
ap-943	189	4	-	-	NOUN
ap-943	189	5	mail	mail	NOUN
ap-943	189	6	:	:	PUNCT
ap-943	189	7	jan.gurovic@fs.cvut.cz	jan.gurovic@fs.cvut.cz	PROPN
ap-943	189	8	department	department	PROPN
ap-943	189	9	of	of	ADP
ap-943	189	10	physics	physics	PROPN
ap-943	189	11	czech	czech	PROPN
ap-943	189	12	technical	technical	PROPN
ap-943	189	13	university	university	PROPN
ap-943	189	14	in	in	ADP
ap-943	189	15	prague	prague	PROPN
ap-943	189	16	faculty	faculty	NOUN
ap-943	189	17	of	of	ADP
ap-943	189	18	mechanical	mechanical	ADJ
ap-943	189	19	engineering	engineering	NOUN
ap-943	189	20	technická	technická	NOUN
ap-943	189	21	4	4	NUM
ap-943	189	22	166	166	NUM
ap-943	189	23	07	07	NUM
ap-943	189	24	prague	prague	NOUN
ap-943	189	25	,	,	PUNCT
ap-943	189	26	czech	czech	PROPN
ap-943	189	27	republic	republic	PROPN
ap-943	189	28	ing	ing	PROPN
ap-943	189	29	.	.	PUNCT
ap-943	190	1	jiří	jiří	PROPN
ap-943	190	2	oswald	oswald	PROPN
ap-943	190	3	,	,	PUNCT
ap-943	190	4	csc	csc	PROPN
ap-943	190	5	.	.	PROPN
ap-943	190	6	e	e	X
ap-943	190	7	-	-	NOUN
ap-943	190	8	mail	mail	NOUN
ap-943	190	9	:	:	PUNCT
ap-943	190	10	oswald@fzu.cz	oswald@fzu.cz	PROPN
ap-943	190	11	institute	institute	PROPN
ap-943	190	12	of	of	ADP
ap-943	190	13	physics	physics	PROPN
ap-943	190	14	czech	czech	PROPN
ap-943	190	15	academy	academy	PROPN
ap-943	190	16	of	of	ADP
ap-943	190	17	sciences	sciences	PROPN
ap-943	190	18	cukrovarnická	cukrovarnická	VERB
ap-943	190	19	10	10	NUM
ap-943	190	20	162	162	NUM
ap-943	190	21	53	53	NUM
ap-943	190	22	prague	prague	NOUN
ap-943	190	23	,	,	PUNCT
ap-943	190	24	czech	czech	PROPN
ap-943	190	25	republic	republic	NOUN
ap-943	190	26	rndr	rndr	PROPN
ap-943	190	27	.	.	PUNCT
ap-943	191	1	jiří	jiří	NOUN
ap-943	191	2	zavadil	zavadil	PROPN
ap-943	191	3	,	,	PUNCT
ap-943	191	4	csc	csc	PROPN
ap-943	191	5	.	.	PUNCT
ap-943	192	1	e	e	X
ap-943	192	2	-	-	NOUN
ap-943	192	3	mail	mail	NOUN
ap-943	192	4	:	:	PUNCT
ap-943	192	5	zavadil@ure.cas.cz	zavadil@ure.cas.cz	PROPN
ap-943	192	6	institute	institute	PROPN
ap-943	192	7	of	of	ADP
ap-943	192	8	radio	radio	NOUN
ap-943	192	9	engineering	engineering	NOUN
ap-943	192	10	and	and	CCONJ
ap-943	192	11	electronics	electronics	PROPN
ap-943	192	12	academy	academy	PROPN
ap-943	192	13	of	of	ADP
ap-943	192	14	sciences	sciences	PROPN
ap-943	192	15	chaberská	chaberská	NOUN
ap-943	192	16	57	57	NUM
ap-943	192	17	182	182	NUM
ap-943	192	18	51	51	NUM
ap-943	192	19	prague	prague	NOUN
ap-943	192	20	,	,	PUNCT
ap-943	192	21	czech	czech	PROPN
ap-943	192	22	republic	republic	PROPN
ap-943	192	23	vratislav	vratislav	PROPN
ap-943	192	24	peřina	peřina	PROPN
ap-943	192	25	e	e	NOUN
ap-943	192	26	-	-	NOUN
ap-943	192	27	mail	mail	NOUN
ap-943	192	28	:	:	PUNCT
ap-943	192	29	perina@ujf.cas.cz	perina@ujf.cas.cz	PROPN
ap-943	192	30	institute	institute	PROPN
ap-943	192	31	of	of	ADP
ap-943	192	32	nuclear	nuclear	ADJ
ap-943	192	33	physics	physics	PROPN
ap-943	192	34	czech	czech	PROPN
ap-943	192	35	academy	academy	PROPN
ap-943	192	36	of	of	ADP
ap-943	192	37	sciences	sciences	PROPN
ap-943	192	38	250	250	NUM
ap-943	192	39	68	68	NUM
ap-943	192	40	řež	řež	NOUN
ap-943	192	41	near	near	ADP
ap-943	192	42	prague	prague	PROPN
ap-943	192	43	,	,	PUNCT
ap-943	192	44	czech	czech	PROPN
ap-943	192	45	republic	republic	NOUN
ap-943	192	46	42	42	NUM
ap-943	192	47	©	©	PROPN
ap-943	192	48	czech	czech	PROPN
ap-943	192	49	technical	technical	PROPN
ap-943	192	50	university	university	PROPN
ap-943	192	51	publishing	publishing	NOUN
ap-943	192	52	house	house	NOUN
ap-943	192	53	http://ctn.cvut.cz/ap/	http://ctn.cvut.cz/ap/	PROPN
ap-943	192	54	acta	acta	PROPN
ap-943	192	55	polytechnica	polytechnica	PROPN
ap-943	192	56	vol	vol	NOUN
ap-943	192	57	.	.	PUNCT
ap-943	193	1	48	48	NUM
ap-943	193	2	no	no	NOUN
ap-943	193	3	.	.	PROPN
ap-943	194	1	1/2008	1/2008	NUM