id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
app01-6687	Lofaj, František; Kabátová, Margita	HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE	2020	5	.pdf	application/pdf	3324	170	53	The measurements were performed on HiPIMS (High Power Impulse Magnetron Sputter- ing) W-C and W-C:H coatings deposited using hybrid PVD-PECD (Physical Vapor Deposition – Plasma Enhanced Chemical Vapor Deposition) process with different acetylene and hydrogen additions on three different substrates. Load – indentation depth curves from the nanoindentation tests on the HiPIMS W-C:H coatings deposited with 2 sccm C2H2 on Si wafer, 100Cr6 bearing steel and Al 2024 alloy substrates – a) The depth profiles of hardness – b) and indentation modulus – c).	cache/app01-6687.pdf	txt/app01-6687.txt