id	sid	eid	entity	type
app01-10348	1	1	acta polytechnica ctu	PERSON
app01-10348	1	2	acta polytechnica ctu proceedings	PERSON
app01-10348	1	3	50:74–80	CARDINAL
app01-10348	1	4	2024	CARDINAL
app01-10348	1	5	2024	DATE
app01-10348	2	1	4.0	CARDINAL
app01-10348	2	2	the czech technical university	ORG
app01-10348	2	3	prague	GPE
app01-10348	2	4	sina zare pakzada	PERSON
app01-10348	2	5	muhammad muzammild	PERSON
app01-10348	2	6	mehdi bostan shirina	PERSON
app01-10348	2	7	basit alia	PERSON
app01-10348	2	8	semih berk cobana	PERSON
app01-10348	2	9	ege	LOC
app01-10348	2	10	umut kerimzadea	PERSON
app01-10348	2	11	burhanettin erdem	GPE
app01-10348	2	12	alacaa	NORP
app01-10348	2	13	f,∗	GPE
app01-10348	2	14	koç university, department of mechanical engineering	ORG
app01-10348	2	15	34450	DATE
app01-10348	2	16	istanbul	GPE
app01-10348	2	17	turkey	GPE
app01-10348	2	18	technische universität wien	ORG
app01-10348	2	19	27-29	DATE
app01-10348	2	20	vienna	GPE
app01-10348	2	21	austria	GPE
app01-10348	2	22	technische universität wien	ORG
app01-10348	2	23	christian	NORP
app01-10348	2	24	vienna	GPE
app01-10348	2	25	austria	GPE
app01-10348	2	26	34450	DATE
app01-10348	2	27	istanbul	GPE
app01-10348	2	28	turkey e koç university	ORG
app01-10348	2	29	34450	DATE
app01-10348	2	30	istanbul	GPE
app01-10348	2	31	turkey	GPE
app01-10348	2	32	34450	DATE
app01-10348	2	33	istanbul	GPE
app01-10348	2	34	ealaca@ku.edu.tr	GPE
app01-10348	6	1	1.4gpa	CARDINAL
app01-10348	6	2	1.3mhz	CARDINAL
app01-10348	10	1	1	CARDINAL
app01-10348	10	2	si nws	PERSON
app01-10348	10	3	1–3	CARDINAL
app01-10348	11	1	si nws	PERSON
app01-10348	11	2	4	CARDINAL
app01-10348	11	3	5	CARDINAL
app01-10348	12	1	si nws	FAC
app01-10348	12	2	6	CARDINAL
app01-10348	13	1	si nws	ORG
app01-10348	13	2	si nws	PERSON
app01-10348	13	3	4	CARDINAL
app01-10348	14	1	8	CARDINAL
app01-10348	14	2	13	CARDINAL
app01-10348	15	1	si nws	FAC
app01-10348	16	1	6	CARDINAL
app01-10348	16	2	14	CARDINAL
app01-10348	17	1	si nws	ORG
app01-10348	17	2	6	CARDINAL
app01-10348	17	3	7	DATE
app01-10348	17	4	15–17	CARDINAL
app01-10348	19	1	11	CARDINAL
app01-10348	20	1	7	CARDINAL
app01-10348	20	2	18	DATE
app01-10348	20	3	19	CARDINAL
app01-10348	20	4	si nws	FAC
app01-10348	21	1	11	CARDINAL
app01-10348	22	1	6	CARDINAL
app01-10348	22	2	15	DATE
app01-10348	22	3	20	CARDINAL
app01-10348	23	1	si nws	FAC
app01-10348	23	2	4	CARDINAL
app01-10348	23	3	16	DATE
app01-10348	23	4	17	DATE
app01-10348	23	5	21	DATE
app01-10348	23	6	22	CARDINAL
app01-10348	24	1	si nws	PERSON
app01-10348	24	2	23	CARDINAL
app01-10348	25	1	74 https://doi.org/10.14311/app.2024.50.0074 https://creativecommons.org/licenses/by/4.0/ https://www.cvut.cz/en	TIME
app01-10348	26	1	50/2024	CARDINAL
app01-10348	26	2	si nws	PERSON
app01-10348	26	3	4	CARDINAL
app01-10348	26	4	6	DATE
app01-10348	26	5	15	CARDINAL
app01-10348	27	1	nws	GPE
app01-10348	27	2	24	CARDINAL
app01-10348	28	1	up to 4gpa	CARDINAL
app01-10348	28	2	1.2gpa	CARDINAL
app01-10348	28	3	25	CARDINAL
app01-10348	28	4	26	CARDINAL
app01-10348	28	5	6	CARDINAL
app01-10348	28	6	14	DATE
app01-10348	28	7	15	CARDINAL
app01-10348	30	1	up to 85gpa	CARDINAL
app01-10348	30	2	si nws	FAC
app01-10348	31	1	6	CARDINAL
app01-10348	33	1	si nws	ORG
app01-10348	33	2	20	CARDINAL
app01-10348	34	1	20	CARDINAL
app01-10348	35	1	si nws	PERSON
app01-10348	36	1	si nws	FAC
app01-10348	38	1	si nws	ORG
app01-10348	39	1	si nws	FAC
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app01-10348	39	4	20	DATE
app01-10348	39	5	27	CARDINAL
app01-10348	39	6	6	CARDINAL
app01-10348	39	7	14	DATE
app01-10348	39	8	15	CARDINAL
app01-10348	39	9	si nws	PERSON
app01-10348	40	1	si nws.	PERSON
app01-10348	41	1	si nws	PERSON
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app01-10348	43	2	si nws	FAC
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app01-10348	44	2	si nws	ORG
app01-10348	45	1	section 2.2	LAW
app01-10348	46	1	section 2.3	LAW
app01-10348	46	2	si nws	FAC
app01-10348	46	3	section 2.4	LAW
app01-10348	47	1	2.1	CARDINAL
app01-10348	47	2	si nws	PERSON
app01-10348	47	3	100	CARDINAL
app01-10348	47	4	525	CARDINAL
app01-10348	47	5	12mm	QUANTITY
app01-10348	47	6	12mm	QUANTITY
app01-10348	52	1	27	CARDINAL
app01-10348	53	1	si nws	PERSON
app01-10348	54	1	110	CARDINAL
app01-10348	54	2	si nws	PERSON
app01-10348	55	1	2.2	CARDINAL
app01-10348	55	2	si nws	PERSON
app01-10348	55	3	ldv msa-600	ORG
app01-10348	55	4	polytec gmbh	PERSON
app01-10348	57	1	ldv	ORG
app01-10348	59	1	ldv	ORG
app01-10348	59	2	0	CARDINAL
app01-10348	59	3	25mhz	CARDINAL
app01-10348	59	4	1.25	CARDINAL
app01-10348	61	1	75 s. z. pakzad	PERSON
app01-10348	61	2	m. muzammil	PERSON
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app01-10348	61	4	acta polytechnica ctu	PERSON
app01-10348	61	5	1	CARDINAL
app01-10348	62	1	si nws	PERSON
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app01-10348	63	2	si nws	PERSON
app01-10348	63	3	the msa-ldv	ORG
app01-10348	65	1	1	CARDINAL
app01-10348	65	2	dut hosting multiple	ORG
app01-10348	65	3	si nws	PERSON
app01-10348	66	1	the msa-ldv	ORG
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app01-10348	67	1	2.3	CARDINAL
app01-10348	67	2	si nws	ORG
app01-10348	67	3	σ	ORG
app01-10348	67	4	1	CARDINAL
app01-10348	67	5	2	CARDINAL
app01-10348	67	6	1 2ω0	CARDINAL
app01-10348	69	1	1	CARDINAL
app01-10348	70	1	2	CARDINAL
app01-10348	71	1	7.68×10−12	DATE
app01-10348	71	2	s12 =	ORG
app01-10348	74	1	si nw	PERSON
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app01-10348	76	3	15	CARDINAL
app01-10348	77	1	2.4	CARDINAL
app01-10348	77	2	150mm	QUANTITY
app01-10348	78	1	2	CARDINAL
app01-10348	79	1	si nws	FAC
app01-10348	79	2	5µm	CARDINAL
app01-10348	79	3	section 2.1	LAW
app01-10348	80	1	si nws	ORG
app01-10348	80	2	500	CARDINAL
app01-10348	80	3	1000	CARDINAL
app01-10348	80	4	15	CARDINAL
app01-10348	82	1	10 sccm	QUANTITY
app01-10348	83	1	400 °	QUANTITY
app01-10348	83	2	70 minutes	TIME
app01-10348	83	3	150 °	QUANTITY
app01-10348	84	1	si nws	PERSON
app01-10348	84	2	6	CARDINAL
app01-10348	84	3	14	CARDINAL
app01-10348	86	1	3	CARDINAL
app01-10348	86	2	si nws	ORG
app01-10348	86	3	section 3.1	LAW
app01-10348	87	1	3.2	CARDINAL
app01-10348	88	1	3.1	CARDINAL
app01-10348	88	2	si nws	ORG
app01-10348	88	3	si nws	PERSON
app01-10348	90	1	2	CARDINAL
app01-10348	90	2	si nws	PERSON
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app01-10348	91	1	si nws	PERSON
app01-10348	92	1	2	CARDINAL
app01-10348	93	1	50/2024	CARDINAL
app01-10348	93	2	si nws	PERSON
app01-10348	93	3	500	CARDINAL
app01-10348	93	4	1000	CARDINAL
app01-10348	93	5	15	CARDINAL
app01-10348	94	1	5µm	DATE
app01-10348	95	1	si nws	PERSON
app01-10348	96	1	si nws	PERSON
app01-10348	97	1	section 2.4	LAW
app01-10348	98	1	section 3.2	LAW
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app01-10348	100	1	3.2	CARDINAL
app01-10348	100	2	si nws	PERSON
app01-10348	100	3	si nws	ORG
app01-10348	100	4	σ	ORG
app01-10348	100	5	1	CARDINAL
app01-10348	100	6	2	CARDINAL
app01-10348	102	1	3a	CARDINAL
app01-10348	102	2	520.24	CARDINAL
app01-10348	102	3	519.61	CARDINAL
app01-10348	102	4	si nw	PERSON
app01-10348	102	5	0.62	CARDINAL
app01-10348	103	1	si nws	FAC
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app01-10348	104	3	517.14	CARDINAL
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app01-10348	105	1	4a	CARDINAL
app01-10348	105	2	4b	CARDINAL
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app01-10348	108	1	three	CARDINAL
app01-10348	108	2	90.7mpa	CARDINAL
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app01-10348	109	2	3	CARDINAL
app01-10348	109	3	4	CARDINAL
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app01-10348	112	2	si nws	PERSON
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app01-10348	120	3	26	CARDINAL
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app01-10348	124	1	si nw	PERSON
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app01-10348	128	3	117	CARDINAL
app01-10348	129	1	section 2.4	LAW
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app01-10348	181	1	materialia 142:248–282, 2018	DATE
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app01-10348	229	2	2024	DATE
app01-10348	231	1	24	CARDINAL
app01-10348	231	2	s. j. harris	PERSON
app01-10348	231	3	a. e. o’neill	PERSON
app01-10348	231	4	w. yang	PERSON
app01-10348	232	1	96(12):7195–7201, 2004	DATE
app01-10348	233	1	https://doi.org/10.1063/1.1808244	ORG
app01-10348	234	1	25	CARDINAL
app01-10348	234	2	l. b. spejo	PERSON
app01-10348	234	3	j. l. arrieta-concha	PERSON
app01-10348	234	4	m. puydinger dos santos	PERSON
app01-10348	236	1	128(4):045704, 2020	DATE
app01-10348	237	1	79	CARDINAL
app01-10348	241	1	https://doi.org/10.1109/marss61851.2024.10612744 https://doi.org/10.1109/marss61851.2024.10612744	WORK_OF_ART
app01-10348	241	2	https://doi.org/10.1063/1.1808244	ORG
app01-10348	241	3	https://doi.org/10.1063/5.0013284 s. z. pakzad	PERSON
app01-10348	241	4	m. muzammil	PERSON
app01-10348	241	5	m. b. shirin et al	PERSON
app01-10348	241	6	acta polytechnica ctu	PERSON
app01-10348	241	7	26	CARDINAL
app01-10348	241	8	r. a. minamisawa	PERSON
app01-10348	241	9	m. j. süess	PERSON
app01-10348	241	10	r. spolenak	PERSON
app01-10348	241	11	up to 4.5%	PERCENT
app01-10348	242	1	3(1):1096	DATE
app01-10348	242	2	2012	DATE
app01-10348	244	1	27	CARDINAL
app01-10348	244	2	s. zare pakzad	PERSON
app01-10348	244	3	s. akinci	PERSON
app01-10348	244	4	m. karimzadehkhouei	PERSON
app01-10348	244	5	b. e. alaca	PERSON
app01-10348	245	1	sub-micron	QUANTITY
app01-10348	246	1	38(12):125005	CARDINAL
app01-10348	246	2	2023	CARDINAL
app01-10348	248	1	28	CARDINAL
app01-10348	248	2	d. a. smith	PERSON
app01-10348	248	3	v. c. holmberg	PERSON
app01-10348	248	4	d. c. lee	PERSON
app01-10348	248	5	b. a. korgel	PERSON
app01-10348	250	1	112(29):10725–10729, 2008	DATE
app01-10348	251	1	80	DATE
app01-10348	251	2	polytechnica ctu proceedings	ORG
app01-10348	251	3	50:74–80	CARDINAL
app01-10348	251	4	2024 1	DATE
app01-10348	251	5	2	CARDINAL
app01-10348	251	6	2.1	CARDINAL
app01-10348	251	7	2.2	CARDINAL
app01-10348	251	8	2.3	CARDINAL
app01-10348	251	9	2.4	CARDINAL
app01-10348	251	10	3	CARDINAL
app01-10348	251	11	3.1	CARDINAL
app01-10348	251	12	si nws 3.2	ORG
app01-10348	251	13	si nws 4	ORG