id	sid	eid	entity	type
app01-10361	1	1	acta polytechnica ctu	PERSON
app01-10361	1	2	50:49–54	CARDINAL
app01-10361	1	3	2024	CARDINAL
app01-10361	1	4	2024	DATE
app01-10361	2	1	4.0	CARDINAL
app01-10361	2	2	the czech technical university	ORG
app01-10361	2	3	prague	GPE
app01-10361	2	4	melo de limaa	PERSON
app01-10361	2	5	b,∗	PERSON
app01-10361	2	6	vincent mandrillonb	PERSON
app01-10361	2	7	jennifer hayc	PERSON
app01-10361	2	8	laurent-luc	PERSON
app01-10361	2	9	christophe poulainb	PERSON
app01-10361	2	10	olivier lebaigued	PERSON
app01-10361	2	11	850	CARDINAL
app01-10361	2	12	rue jean monnet	ORG
app01-10361	2	13	38920	CARDINAL
app01-10361	2	14	france b university	ORG
app01-10361	2	15	grenoble alpes	ORG
app01-10361	2	16	cea-grenoble	ORG
app01-10361	2	17	leti	PERSON
app01-10361	2	18	17	CARDINAL
app01-10361	2	19	avenue des martyrs	ORG
app01-10361	2	20	38054	CARDINAL
app01-10361	2	21	grenoble cedex 9	LAW
app01-10361	2	22	france	GPE
app01-10361	2	23	105	CARDINAL
app01-10361	2	24	meco	PERSON
app01-10361	2	25	oak ridge	GPE
app01-10361	2	26	tennessee	GPE
app01-10361	2	27	37830	DATE
app01-10361	2	28	usa d university grenoble alpes	ORG
app01-10361	2	29	cea-grenoble	ORG
app01-10361	2	30	liten	ORG
app01-10361	2	31	17	CARDINAL
app01-10361	2	32	avenue des martyrs	ORG
app01-10361	2	33	38054	CARDINAL
app01-10361	2	34	grenoble cedex 9	LAW
app01-10361	2	35	france ∗	ORG
app01-10361	2	36	marina.melodelima@st.com	ORG
app01-10361	9	1	less than 10%	PERCENT
app01-10361	12	1	1	CARDINAL
app01-10361	14	1	1	CARDINAL
app01-10361	17	1	one	CARDINAL
app01-10361	19	1	1	CARDINAL
app01-10361	21	1	first	ORDINAL
app01-10361	23	1	49	CARDINAL
app01-10361	23	2	m. melo de lima	PERSON
app01-10361	23	3	v. mandrillon	PERSON
app01-10361	23	4	j. hay et al	PERSON
app01-10361	24	1	acta polytechnica ctu	PERSON
app01-10361	25	1	50	CARDINAL
app01-10361	26	1	20 to 250	TIME
app01-10361	27	1	250 °	QUANTITY
app01-10361	28	1	2	CARDINAL
app01-10361	28	2	2.1	CARDINAL
app01-10361	32	1	3	CARDINAL
app01-10361	32	2	100	CARDINAL
app01-10361	32	3	200	CARDINAL
app01-10361	32	4	600	CARDINAL
app01-10361	32	5	2	CARDINAL
app01-10361	33	1	2	CARDINAL
app01-10361	34	1	first	ORDINAL
app01-10361	35	1	50	CARDINAL
app01-10361	36	1	3	CARDINAL
app01-10361	36	2	two	CARDINAL
app01-10361	36	3	200	CARDINAL
app01-10361	36	4	600	CARDINAL
app01-10361	37	1	20 to 250 °	TIME
app01-10361	37	2	200	CARDINAL
app01-10361	37	3	50	CARDINAL
app01-10361	38	1	250 °	QUANTITY
app01-10361	40	1	1	CARDINAL
app01-10361	41	1	e∗	ORG
app01-10361	41	2	1	CARDINAL
app01-10361	42	1	e∗	ORG
app01-10361	43	1	1	CARDINAL
app01-10361	43	2	1	CARDINAL
app01-10361	43	3	two	CARDINAL
app01-10361	43	4	2	CARDINAL
app01-10361	44	1	afm	PERSON
app01-10361	48	1	100 °	CARDINAL
app01-10361	48	2	± 0.1 °	QUANTITY
app01-10361	49	1	90%	PERCENT
app01-10361	50	1	1	CARDINAL
app01-10361	51	1	2.2	CARDINAL
app01-10361	54	1	2	CARDINAL
app01-10361	55	1	3	CARDINAL
app01-10361	56	1	2	CARDINAL
app01-10361	56	2	e∗	ORG
app01-10361	56	3	e∗ s	ORG
app01-10361	58	1	first	ORDINAL
app01-10361	59	1	secondly	ORDINAL
app01-10361	62	1	1 + 2	CARDINAL
app01-10361	63	1	2	CARDINAL
app01-10361	63	2	3	CARDINAL
app01-10361	63	3	e∗	ORG
app01-10361	63	4	e∗ s	ORG
app01-10361	63	5	4	CARDINAL
app01-10361	64	1	50	CARDINAL
app01-10361	65	1	50/2024	CARDINAL
app01-10361	68	1	200	CARDINAL
app01-10361	68	2	42	CARDINAL
app01-10361	68	3	35	CARDINAL
app01-10361	68	4	165	CARDINAL
app01-10361	68	5	4	CARDINAL
app01-10361	68	6	0.23	CARDINAL
app01-10361	69	1	5	CARDINAL
app01-10361	69	2	0.35	CARDINAL
app01-10361	70	1	6	CARDINAL
app01-10361	70	2	0.22	CARDINAL
app01-10361	70	3	4	CARDINAL
app01-10361	70	4	1	CARDINAL
app01-10361	74	1	n∑ i=0	PERSON
app01-10361	77	1	e∗ s	ORG
app01-10361	77	2	−1	DATE
app01-10361	77	3	3	CARDINAL
app01-10361	78	1	4	CARDINAL
app01-10361	79	1	3.	CARDINAL
app01-10361	81	1	poisson	ORG
app01-10361	81	2	1	CARDINAL
app01-10361	82	1	poisson	PERSON
app01-10361	83	1	poisson	ORG
app01-10361	84	1	200	CARDINAL
app01-10361	84	2	600	CARDINAL
app01-10361	84	3	42gpa	CARDINAL
app01-10361	84	4	35gpa	CARDINAL
app01-10361	88	1	50	CARDINAL
app01-10361	88	2	3µm	QUANTITY
app01-10361	89	1	16	CARDINAL
app01-10361	89	2	4.8 ± 0.3)gpa	MONEY
app01-10361	89	3	5.5 ±	CARDINAL
app01-10361	89	4	0.9)gpa	DATE
app01-10361	89	5	50	CARDINAL
app01-10361	91	1	4gpa	CARDINAL
app01-10361	93	1	50	CARDINAL
app01-10361	93	2	0.1	CARDINAL
app01-10361	93	3	0.25	CARDINAL
app01-10361	93	4	0.5	CARDINAL
app01-10361	93	5	1	CARDINAL
app01-10361	93	6	2.5	CARDINAL
app01-10361	93	7	4	DATE
app01-10361	93	8	10gpa	CARDINAL
app01-10361	95	1	3.1	CARDINAL
app01-10361	95	2	70°	QUANTITY
app01-10361	96	1	4	CARDINAL
app01-10361	96	2	20	CARDINAL
app01-10361	97	1	non-linear	ORG
app01-10361	97	2	two	CARDINAL
app01-10361	98	1	four	CARDINAL
app01-10361	98	2	3	CARDINAL
app01-10361	100	1	1.2rc	DATE
app01-10361	107	1	up to 50%	PERCENT
app01-10361	109	1	1	CARDINAL
app01-10361	109	2	7	CARDINAL
app01-10361	111	1	51	CARDINAL
app01-10361	111	2	m. melo de lima	PERSON
app01-10361	111	3	v. mandrillon	PERSON
app01-10361	111	4	j. hay et al	PERSON
app01-10361	111	5	acta polytechnica ctu	PERSON
app01-10361	111	6	3	CARDINAL
app01-10361	112	1	50	CARDINAL
app01-10361	114	1	200	CARDINAL
app01-10361	114	2	600	CARDINAL
app01-10361	115	1	3.2	CARDINAL
app01-10361	116	1	50	CARDINAL
app01-10361	117	1	four	CARDINAL
app01-10361	117	2	3	CARDINAL
app01-10361	118	1	up to 6rmax	CARDINAL
app01-10361	120	1	less than 5%	PERCENT
app01-10361	120	2	2	CARDINAL
app01-10361	120	3	200	CARDINAL
app01-10361	121	1	up to 50%	PERCENT
app01-10361	123	1	1	CARDINAL
app01-10361	124	1	7	CARDINAL
app01-10361	126	1	4	CARDINAL
app01-10361	126	2	4.1	CARDINAL
app01-10361	127	1	50	CARDINAL
app01-10361	127	2	4gpa	CARDINAL
app01-10361	128	1	10%	PERCENT
app01-10361	130	1	10%	PERCENT
app01-10361	130	2	between 300 and 1 400	CARDINAL
app01-10361	130	3	200	CARDINAL
app01-10361	130	4	between 600 and 1 800	CARDINAL
app01-10361	130	5	600	CARDINAL
app01-10361	130	6	4	CARDINAL
app01-10361	131	1	50	CARDINAL
app01-10361	131	2	200	CARDINAL
app01-10361	131	3	10%	PERCENT
app01-10361	131	4	300	CARDINAL
app01-10361	131	5	2 750	CARDINAL
app01-10361	132	1	600	CARDINAL
app01-10361	132	2	below 10%	PERCENT
app01-10361	132	3	1 630	CARDINAL
app01-10361	132	4	10%	PERCENT
app01-10361	132	5	5 100	CARDINAL
app01-10361	133	1	2	CARDINAL
app01-10361	134	1	second	ORDINAL
app01-10361	134	2	50	CARDINAL
app01-10361	134	3	200	CARDINAL
app01-10361	134	4	4	CARDINAL
app01-10361	137	1	1 600–2 500	CARDINAL
app01-10361	138	1	0.1gpa	CARDINAL
app01-10361	138	2	between 12% and 16%	PERCENT
app01-10361	138	3	0.1gpa	CARDINAL
app01-10361	140	1	4.2	CARDINAL
app01-10361	141	1	200	CARDINAL
app01-10361	141	2	5	CARDINAL
app01-10361	142	1	50	CARDINAL
app01-10361	145	1	50/2024	CARDINAL
app01-10361	147	1	4	CARDINAL
app01-10361	149	1	50	CARDINAL
app01-10361	150	1	600	CARDINAL
app01-10361	150	2	200	CARDINAL
app01-10361	151	1	50	CARDINAL
app01-10361	152	1	50	CARDINAL
app01-10361	152	2	42gpa	CARDINAL
app01-10361	152	3	4gpa	CARDINAL
app01-10361	152	4	35gpa 600	CARDINAL
app01-10361	152	5	4gpa 3µm)/silicon	DATE
app01-10361	152	6	600-1800/350-920	CARDINAL
app01-10361	152	7	42gpa	CARDINAL
app01-10361	152	8	0.1-10gpa	DATE
app01-10361	152	9	1 600	CARDINAL
app01-10361	152	10	2	CARDINAL
app01-10361	153	1	5	CARDINAL
app01-10361	154	1	200	CARDINAL
app01-10361	156	1	50	CARDINAL
app01-10361	159	1	50	CARDINAL
app01-10361	160	1	200	CARDINAL
app01-10361	160	2	6	CARDINAL
app01-10361	161	1	600	CARDINAL
app01-10361	162	1	6	CARDINAL
app01-10361	162	2	4.3gpa	CARDINAL
app01-10361	162	3	5.5gpa	CARDINAL
app01-10361	164	1	4.3	CARDINAL
app01-10361	165	1	200	CARDINAL
app01-10361	165	2	6	CARDINAL
app01-10361	167	1	250 °	QUANTITY
app01-10361	169	1	53	CARDINAL
app01-10361	169	2	m. melo de lima	PERSON
app01-10361	169	3	v. mandrillon	PERSON
app01-10361	170	1	j. hay et al	PERSON
app01-10361	171	1	acta polytechnica ctu	PERSON
app01-10361	171	2	6	CARDINAL
app01-10361	172	1	50	CARDINAL
app01-10361	174	1	200	CARDINAL
app01-10361	175	1	50	CARDINAL
app01-10361	177	1	8	CARDINAL
app01-10361	178	1	5	CARDINAL
app01-10361	180	1	50	CARDINAL
app01-10361	181	1	less than 10%	PERCENT
app01-10361	183	1	french	NORP
app01-10361	184	1	1	CARDINAL
app01-10361	184	2	w. c. oliver	PERSON
app01-10361	184	3	g. m. pharr	PERSON
app01-10361	186	1	7(6):1564–1583, 1992	DATE
app01-10361	188	1	2	CARDINAL
app01-10361	188	2	v. mandrillon	PERSON
app01-10361	188	3	m. verdier	PERSON
app01-10361	189	1	mesure de module d’young	ORG
app01-10361	190	1	matériaux &	ORG
app01-10361	190	2	99(2):169–178, 2011	DATE
app01-10361	192	1	3	CARDINAL
app01-10361	192	2	s. bec	PERSON
app01-10361	192	3	a. tonck	PERSON
app01-10361	192	4	j. l. loubet	PERSON
app01-10361	194	1	86(33-35):5347–5358	CARDINAL
app01-10361	194	2	2006	DATE
app01-10361	196	1	4	CARDINAL
app01-10361	196	2	m. rusinowicz	PERSON
app01-10361	198	1	ph.d	ORG
app01-10361	199	1	université grenoble alpes	PERSON
app01-10361	199	2	2023	CARDINAL
app01-10361	200	1	5	CARDINAL
app01-10361	200	2	n. chérault	PERSON
app01-10361	200	3	n. casanova	PERSON
app01-10361	201	1	493(1	CARDINAL
app01-10361	202	1	https://doi.org/10.1016/j.tsf.2005.06.019	DATE
app01-10361	203	1	6	CARDINAL
app01-10361	203	2	j. richeton	PERSON
app01-10361	203	3	s. ahzi	PERSON
app01-10361	203	4	k. vecchio	PERSON
app01-10361	204	1	44(24):7938–7954, 2007	DATE
app01-10361	206	1	7	CARDINAL
app01-10361	206	2	i. n. sneddon	PERSON
app01-10361	208	1	3(1):47–57, 1965	DATE
app01-10361	209	1	8	CARDINAL
app01-10361	210	1	développement	ORG
app01-10361	210	2	de mesures des propriétés thermomécaniques de films minces	ORG
app01-10361	211	1	à un dispositif imageur	ORG
app01-10361	212	1	ph.d	ORG
app01-10361	213	1	université grenoble alpes	PERSON
app01-10361	213	2	2023	CARDINAL
app01-10361	214	1	54	CARDINAL
app01-10361	214	2	https://doi.org/10.1051/mattech/2011029 https://doi.org/10.1080/14786430600660856	ORG
app01-10361	214	3	polytechnica ctu	ORG
app01-10361	214	4	50:49–54	CARDINAL
app01-10361	214	5	2024 1	DATE
app01-10361	214	6	2	CARDINAL
app01-10361	214	7	2.1	CARDINAL
app01-10361	214	8	2.2	CARDINAL
app01-10361	214	9	3	CARDINAL
app01-10361	214	10	3.1	CARDINAL
app01-10361	214	11	3.2	CARDINAL
app01-10361	214	12	4	CARDINAL
app01-10361	214	13	4.1	CARDINAL
app01-10361	214	14	4.2	CARDINAL
app01-10361	214	15	4.3	CARDINAL
app01-10361	214	16	5	CARDINAL