id	sid	eid	entity	type
app01-4097	1	1	acta polytechnica ctu proceedings	PERSON
app01-4097	1	2	8:20–23	CARDINAL
app01-4097	1	3	2017	DATE
app01-4097	1	4	czech technical university	ORG
app01-4097	1	5	prague	GPE
app01-4097	1	6	2017	CARDINAL
app01-4097	1	7	b,∗	PERSON
app01-4097	1	8	miroslav jelíneka	PERSON
app01-4097	1	9	jan remsaa	GPE
app01-4097	1	10	czech technical university	ORG
app01-4097	1	11	prague	GPE
app01-4097	1	12	3105	DATE
app01-4097	1	13	272 01	DATE
app01-4097	1	14	kladno	GPE
app01-4097	1	15	czech republic b institute of physics	ORG
app01-4097	1	16	czech	NORP
app01-4097	1	17	2	CARDINAL
app01-4097	1	18	182 21	CARDINAL
app01-4097	1	19	8	DATE
app01-4097	1	20	czech republic c department	ORG
app01-4097	1	21	czech technical university	ORG
app01-4097	1	22	prague	GPE
app01-4097	1	23	karlovo namesti 13	PERSON
app01-4097	1	24	121	CARDINAL
app01-4097	1	25	35	CARDINAL
app01-4097	1	26	2	CARDINAL
app01-4097	1	27	czech	NORP
app01-4097	1	28	∗	CARDINAL
app01-4097	1	29	petr.pisarik@fbmi.cvut.cz	PRODUCT
app01-4097	6	1	0	CARDINAL
app01-4097	6	2	1	CARDINAL
app01-4097	6	3	2	DATE
app01-4097	6	4	4	CARDINAL
app01-4097	6	5	15 17	CARDINAL
app01-4097	6	6	at.%	ORG
app01-4097	8	1	about 0.2-0.7	CARDINAL
app01-4097	8	2	about 1-6	CARDINAL
app01-4097	11	1	15.0 gpa	PERCENT
app01-4097	11	2	31.2 gpa	PERCENT
app01-4097	11	3	172.7	CARDINAL
app01-4097	11	4	271.5 gpa	PERCENT
app01-4097	12	1	19 n	QUANTITY
app01-4097	14	1	1	CARDINAL
app01-4097	14	2	1–3	CARDINAL
app01-4097	15	1	1	CARDINAL
app01-4097	16	1	10	CARDINAL
app01-4097	17	1	1	CARDINAL
app01-4097	17	2	≈ 0.01	CARDINAL
app01-4097	17	3	0.7	CARDINAL
app01-4097	17	4	1	CARDINAL
app01-4097	19	1	13	CARDINAL
app01-4097	19	2	14	CARDINAL
app01-4097	20	1	1	CARDINAL
app01-4097	20	2	13	CARDINAL
app01-4097	23	1	2	CARDINAL
app01-4097	23	2	2.1	CARDINAL
app01-4097	26	1	1	CARDINAL
app01-4097	27	1	2	CARDINAL
app01-4097	28	1	silicon	PERSON
app01-4097	28	2	100	CARDINAL
app01-4097	29	1	7.7 ± 1.2	QUANTITY
app01-4097	30	1	2.2	CARDINAL
app01-4097	30	2	wds jeol 840	ORG
app01-4097	31	1	12	CARDINAL
app01-4097	32	1	csm co.	ORG
app01-4097	32	2	15	CARDINAL
app01-4097	33	1	2	CARDINAL
app01-4097	35	1	20	CARDINAL
app01-4097	36	1	1	CARDINAL
app01-4097	36	2	13	CARDINAL
app01-4097	37	1	2	CARDINAL
app01-4097	38	1	1	CARDINAL
app01-4097	38	2	2	CARDINAL
app01-4097	38	3	3	CARDINAL
app01-4097	38	4	4	CARDINAL
app01-4097	38	5	5	CARDINAL
app01-4097	38	6	6	CARDINAL
app01-4097	38	7	7	CARDINAL
app01-4097	38	8	8	CARDINAL
app01-4097	38	9	9 tbm	QUANTITY
app01-4097	38	10	10	CARDINAL
app01-4097	43	1	20 8	DATE
app01-4097	43	2	31.2 ±	QUANTITY
app01-4097	43	3	271.5 ± 16.8 cr	MONEY
app01-4097	43	4	40	CARDINAL
app01-4097	43	5	11.4 cr	MONEY
app01-4097	43	6	20 8	DATE
app01-4097	43	7	10 8 40	DATE
app01-4097	43	8	17.5 ±	QUANTITY
app01-4097	43	9	17 15.0 ± 0.6 172.7 ± 3.4	QUANTITY
app01-4097	43	10	1	CARDINAL
app01-4097	44	1	rockwell	ORG
app01-4097	44	2	200	CARDINAL
app01-4097	44	3	1 n	QUANTITY
app01-4097	44	4	30	CARDINAL
app01-4097	44	5	8 mm	QUANTITY
app01-4097	44	6	10	CARDINAL
app01-4097	44	7	2	CARDINAL
app01-4097	45	1	21	CARDINAL
app01-4097	45	2	p. písařík	PERSON
app01-4097	45	3	miroslav jelínek	PERSON
app01-4097	45	4	j. remsa	GPE
app01-4097	45	5	z. tolde acta polytechnica ctu	PERSON
app01-4097	45	6	3	CARDINAL
app01-4097	45	7	afm	PERSON
app01-4097	46	1	15-17	CARDINAL
app01-4097	48	1	4	CARDINAL
app01-4097	50	1	10 %	PERCENT
app01-4097	50	2	about 60	CARDINAL
app01-4097	51	1	20	CARDINAL
app01-4097	52	1	16	CARDINAL
app01-4097	53	1	3	CARDINAL
app01-4097	54	1	1	CARDINAL
app01-4097	55	1	17	CARDINAL
app01-4097	56	1	800 ± 100	QUANTITY
app01-4097	56	2	100 ± 30	CARDINAL
app01-4097	57	1	afm	PERSON
app01-4097	57	2	3	CARDINAL
app01-4097	57	3	10×10 µm area	DATE
app01-4097	57	4	nova	LOC
app01-4097	58	1	15	CARDINAL
app01-4097	59	1	about 0.2-0.7	CARDINAL
app01-4097	59	2	about 1-6	CARDINAL
app01-4097	60	1	1	CARDINAL
app01-4097	62	1	17	CARDINAL
app01-4097	62	2	about 3.5	CARDINAL
app01-4097	62	3	two	CARDINAL
app01-4097	62	4	ccd	PRODUCT
app01-4097	65	1	first	ORDINAL
app01-4097	66	1	15.3 n	MONEY
app01-4097	68	1	19 n	QUANTITY
app01-4097	68	2	15-17	DATE
app01-4097	70	1	15	CARDINAL
app01-4097	72	1	60	CARDINAL
app01-4097	74	1	ma22	PRODUCT
app01-4097	76	1	31.2	CARDINAL
app01-4097	76	2	271.5	CARDINAL
app01-4097	76	3	1	CARDINAL
app01-4097	76	4	4	CARDINAL
app01-4097	77	1	24.8 gpa	MONEY
app01-4097	77	2	1	CARDINAL
app01-4097	79	1	15.0 gpa	MONEY
app01-4097	79	2	15-17	DATE
app01-4097	80	1	236.3 gpa	MONEY
app01-4097	80	2	1	CARDINAL
app01-4097	82	1	172.7 gpa	MONEY
app01-4097	82	2	15-17	DATE
app01-4097	83	1	1	CARDINAL
app01-4097	83	2	4	CARDINAL
app01-4097	83	3	4	CARDINAL
app01-4097	85	1	1	CARDINAL
app01-4097	86	1	17	CARDINAL
app01-4097	88	1	afm	PERSON
app01-4097	89	1	31.2 gpa	PERCENT
app01-4097	89	2	15.0 gpa	PERCENT
app01-4097	89	3	271.5 gpa	PERCENT
app01-4097	89	4	172.7 gpa	PERCENT
app01-4097	90	1	19	CARDINAL
app01-4097	91	1	the czech technical university	ORG
app01-4097	91	2	prague	GPE
app01-4097	92	1	the czech republic	GPE
app01-4097	93	1	the ministry of education	ORG
app01-4097	93	2	the czech republic	GPE
app01-4097	95	1	1	CARDINAL
app01-4097	95	2	r. j. narayan	PERSON
app01-4097	97	1	ph.d	ORG
app01-4097	98	1	north carolina	GPE
app01-4097	98	2	2002	DATE
app01-4097	99	1	2	CARDINAL
app01-4097	99	2	m. jelínek	PERSON
app01-4097	99	3	k. smetana	PERSON
app01-4097	99	4	t. kocourek	PERSON
app01-4097	100	1	169(1-3):89–93	CARDINAL
app01-4097	100	2	2010	DATE
app01-4097	101	1	doi:10.1016	PERSON
app01-4097	102	1	3	CARDINAL
app01-4097	102	2	m. jelínek	PERSON
app01-4097	102	3	t. kocourek	PERSON
app01-4097	102	4	j. remsa	GPE
app01-4097	102	5	101(4):579–583, 2010	DATE
app01-4097	103	1	010	CARDINAL
app01-4097	104	1	4	CARDINAL
app01-4097	104	2	t. hasebe	PERSON
app01-4097	104	3	h. kodama	PERSON
app01-4097	105	1	15(1):129	CARDINAL
app01-4097	105	2	132, 2006	DATE
app01-4097	106	1	doi:10.1016/j.diamond.2005.08.025	EVENT
app01-4097	107	1	5	CARDINAL
app01-4097	107	2	e. t. uzumaki	PERSON
app01-4097	107	3	c. s. lambert	PERSON
app01-4097	107	4	w. d. belangero	PERSON
app01-4097	108	1	15:982–988, 2006	DATE
app01-4097	109	1	doi:10.1016/j.diamond.2005.12.006	GPE
app01-4097	110	1	6	CARDINAL
app01-4097	110	2	l. zhang	PERSON
app01-4097	110	3	p. lv	PERSON
app01-4097	110	4	z. y. huang	PERSON
app01-4097	111	1	17:1922–1926, 2008	DATE
app01-4097	112	1	doi:10.1016/j.diamond.2008.04.011	ORG
app01-4097	113	1	7	CARDINAL
app01-4097	113	2	t. hasebe	PERSON
app01-4097	113	3	t. ishimaru	GPE
app01-4097	113	4	a. kamijo	PERSON
app01-4097	114	1	16(4	CARDINAL
app01-4097	115	1	2007	DATE
app01-4097	116	1	doi:10.1016	GPE
app01-4097	117	1	8	CARDINAL
app01-4097	117	2	g. dearnaley	PERSON
app01-4097	117	3	j. h. arps	ORG
app01-4097	119	1	200(7):2518	CARDINAL
app01-4097	119	2	2524, 2005	DATE
app01-4097	120	1	doi:10.1016/j.surfcoat.2005.07.077	ORG
app01-4097	121	1	9	CARDINAL
app01-4097	121	2	m. jelínek	PERSON
app01-4097	121	3	k. smetana	PERSON
app01-4097	122	1	112(1):143–148, 2013	DATE
app01-4097	123	1	012-7216	CARDINAL
app01-4097	124	1	10	CARDINAL
app01-4097	124	2	r. hauert	PERSON
app01-4097	126	1	177	CARDINAL
app01-4097	126	2	2003	DATE
app01-4097	127	1	4th	ORDINAL
app01-4097	127	2	doi:10.1016	GPE
app01-4097	127	3	9635(03)00019	CARDINAL
app01-4097	128	1	11	CARDINAL
app01-4097	128	2	j. robertson	PERSON
app01-4097	130	1	37(46):129	CARDINAL
app01-4097	130	2	281	CARDINAL
app01-4097	130	3	2002	DATE
app01-4097	131	1	doi:10.1016	PERSON
app01-4097	131	2	796x(02)00005	CARDINAL
app01-4097	132	1	12	CARDINAL
app01-4097	132	2	p. gupta	PERSON
app01-4097	134	1	louisiana state university	ORG
app01-4097	134	2	2003	DATE
app01-4097	135	1	13	CARDINAL
app01-4097	135	2	j. c. sánchez-lópez	PERSON
app01-4097	135	3	a. fernández	PERSON
app01-4097	137	1	311–338	CARDINAL
app01-4097	138	1	us	GPE
app01-4097	138	2	boston	GPE
app01-4097	138	3	ma	GPE
app01-4097	138	4	2008	DATE
app01-4097	140	1	14	CARDINAL
app01-4097	140	2	m. jelínek	PERSON
app01-4097	140	3	t. kocourek	PERSON
app01-4097	141	1	117(1):83–88, 2014	DATE
app01-4097	143	1	15	CARDINAL
app01-4097	143	2	m. jelinek	PERSON
app01-4097	143	3	t. kocourek	PERSON
app01-4097	143	4	j. zemek	GPE
app01-4097	144	1	386	CARDINAL
app01-4097	144	2	2015	DATE
app01-4097	145	1	doi:10.1016/j.msec.2014.10.035	ORG
app01-4097	146	1	16	CARDINAL
app01-4097	146	2	w. oliver	PERSON
app01-4097	146	3	g. pharr	PERSON
app01-4097	148	1	7(6):1564–1583, 1992	DATE
app01-4097	150	1	17	CARDINAL
app01-4097	150	2	s. baragetti	PERSON
app01-4097	150	3	l. lusvarghi	PERSON
app01-4097	150	4	g. bolelli	PERSON
app01-4097	150	5	f. tordini	PERSON
app01-4097	151	1	2011	DATE
app01-4097	151	2	pe-cvd	PERSON
app01-4097	152	1	203(20-21):3078	CARDINAL
app01-4097	152	2	3087	CARDINAL
app01-4097	152	3	2009	DATE
app01-4097	153	1	doi:10.1016	GPE
app01-4097	154	1	23	CARDINAL
app01-4097	154	2	http://dx.doi.org/10.1007/s00339-012-7216-8	GPE
app01-4097	154	3	http://dx.doi.org/10.1016/s0925-9635(03)00019-0	GPE
app01-4097	154	4	8:20–23	CARDINAL
app01-4097	154	5	2017 1	DATE
app01-4097	154	6	2	CARDINAL
app01-4097	154	7	2.1	CARDINAL
app01-4097	154	8	2.2	CARDINAL
app01-4097	154	9	3	CARDINAL
app01-4097	154	10	4	CARDINAL