id	sid	eid	entity	type
app01-6032	1	1	acta polytechnica ctu proceedings	PERSON
app01-6032	1	2	doi:10.14311/app.2019.25.0079 acta polytechnica ctu	ORG
app01-6032	1	3	25:79–82	CARDINAL
app01-6032	1	4	2019	DATE
app01-6032	1	5	czech technical university	ORG
app01-6032	1	6	prague	GPE
app01-6032	1	7	2019	DATE
app01-6032	1	8	fabiana martinoa	PERSON
app01-6032	1	9	giancarlo fortea	ORG
app01-6032	1	10	jan šleichrtb	GPE
app01-6032	1	11	václav radab	PERSON
app01-6032	1	12	daniel kytýřb	PERSON
app01-6032	1	13	st.	GPE
app01-6032	1	14	anne	ORG
app01-6032	1	15	brno	GPE
app01-6032	1	16	53	CARDINAL
app01-6032	1	17	656 91	CARDINAL
app01-6032	1	18	brno	GPE
app01-6032	1	19	czech	NORP
app01-6032	1	20	czech academy of sciences	ORG
app01-6032	1	21	809/76	CARDINAL
app01-6032	1	22	190	CARDINAL
app01-6032	1	23	9	CARDINAL
app01-6032	1	24	czech	NORP
app01-6032	1	25	∗	CARDINAL
app01-6032	5	1	5	CARDINAL
app01-6032	5	2	100	CARDINAL
app01-6032	6	1	sub-micron	CARDINAL
app01-6032	8	1	40 %	PERCENT
app01-6032	11	1	1	CARDINAL
app01-6032	12	1	two	CARDINAL
app01-6032	14	1	pdms	ORG
app01-6032	16	1	one	CARDINAL
app01-6032	17	1	up to 20 %	PERCENT
app01-6032	19	1	two	CARDINAL
app01-6032	20	1	1	CARDINAL
app01-6032	21	1	2	CARDINAL
app01-6032	22	1	3	CARDINAL
app01-6032	24	1	2	CARDINAL
app01-6032	24	2	2.1	CARDINAL
app01-6032	25	1	4	CARDINAL
app01-6032	25	2	sylgard 184	PERSON
app01-6032	25	3	527	CARDINAL
app01-6032	25	4	5 kpa	QUANTITY
app01-6032	25	5	170 kpa	QUANTITY
app01-6032	26	1	sylgard 527	LAW
app01-6032	26	2	1.2	CARDINAL
app01-6032	27	1	65	CARDINAL
app01-6032	28	1	12.00 mm	QUANTITY
app01-6032	29	1	12.00 ± 0.05 mm	MONEY
app01-6032	29	2	79	CARDINAL
app01-6032	29	3	http://dx.doi.org/10.14311/app.2019.25.0079 http://ojs.cvut.cz/ojs/index.php/app v. vinarský	LOC
app01-6032	29	4	f. martino	PERSON
app01-6032	29	5	g. forte et al	PERSON
app01-6032	29	6	acta polytechnica ctu	PERSON
app01-6032	29	7	1	CARDINAL
app01-6032	29	8	1	CARDINAL
app01-6032	29	9	2	CARDINAL
app01-6032	29	10	3	CARDINAL
app01-6032	29	11	4	CARDINAL
app01-6032	29	12	5	CARDINAL
app01-6032	29	13	6	CARDINAL
app01-6032	29	14	7	CARDINAL
app01-6032	29	15	14	CARDINAL
app01-6032	30	1	16 mm	QUANTITY
app01-6032	31	1	±0.10 mm	PERSON
app01-6032	32	1	0.010 n	QUANTITY
app01-6032	32	2	1 n and 10 n	QUANTITY
app01-6032	33	1	50µm	CARDINAL
app01-6032	33	2	2.2	CARDINAL
app01-6032	35	1	4d	CARDINAL
app01-6032	35	2	5	CARDINAL
app01-6032	37	1	3 kn	QUANTITY
app01-6032	38	1	resolution 250	LAW
app01-6032	38	2	sub-micron	CARDINAL
app01-6032	39	1	futek inc.	ORG
app01-6032	39	2	10 n and 1 n	QUANTITY
app01-6032	41	1	1	CARDINAL
app01-6032	41	2	60 mm	QUANTITY
app01-6032	42	1	16 mm	QUANTITY
app01-6032	42	2	≈ 50 %	PERCENT
app01-6032	44	1	6	CARDINAL
app01-6032	45	1	mesa electronics	ORG
app01-6032	46	1	2.3	CARDINAL
app01-6032	46	2	4	CARDINAL
app01-6032	46	3	1 to 2	CARDINAL
app01-6032	46	4	184	CARDINAL
app01-6032	46	5	527	CARDINAL
app01-6032	47	1	60 %	PERCENT
app01-6032	47	2	70	CARDINAL
app01-6032	47	3	80 %	PERCENT
app01-6032	47	4	0.005	CARDINAL
app01-6032	47	5	0.05	CARDINAL
app01-6032	49	1	zero	CARDINAL
app01-6032	49	2	nearly to 10 %	PERCENT
app01-6032	50	1	one	CARDINAL
app01-6032	50	2	5	CARDINAL
app01-6032	50	3	20	CARDINAL
app01-6032	50	4	25	CARDINAL
app01-6032	50	5	one week	DATE
app01-6032	50	6	six weeks	DATE
app01-6032	53	1	three	CARDINAL
app01-6032	55	1	40 %	PERCENT
app01-6032	55	2	20	CARDINAL
app01-6032	56	1	≈ 0.015	CARDINAL
app01-6032	56	2	5	CARDINAL
app01-6032	57	1	10 %	PERCENT
app01-6032	58	1	two	CARDINAL
app01-6032	60	1	2.4	CARDINAL
app01-6032	61	1	mathworks inc.	ORG
app01-6032	62	1	80	CARDINAL
app01-6032	63	1	2	CARDINAL
app01-6032	63	2	184	CARDINAL
app01-6032	63	3	60 %	PERCENT
app01-6032	63	4	200	CARDINAL
app01-6032	65	1	ac	ORG
app01-6032	65	2	1	CARDINAL
app01-6032	65	3	ac	ORG
app01-6032	67	1	εeng	PERSON
app01-6032	67	2	εeng	PERSON
app01-6032	67	3	2	CARDINAL
app01-6032	68	1	0 %	PERCENT
app01-6032	68	2	10 %	PERCENT
app01-6032	68	3	30 %	PERCENT
app01-6032	69	1	600	CARDINAL
app01-6032	70	1	less than 0.5 %	PERCENT
app01-6032	71	1	three	CARDINAL
app01-6032	72	1	3	CARDINAL
app01-6032	72	2	twelve	CARDINAL
app01-6032	73	1	three	CARDINAL
app01-6032	74	1	six	CARDINAL
app01-6032	77	1	−0.1	ORG
app01-6032	78	1	1:2	CARDINAL
app01-6032	78	2	syl184	PERSON
app01-6032	78	3	17.0±0.2kpa	CARDINAL
app01-6032	78	4	27.9±0.2kpa	CARDINAL
app01-6032	78	5	3	CARDINAL
app01-6032	79	1	1 to 2	CARDINAL
app01-6032	79	2	184	CARDINAL
app01-6032	79	3	527	CARDINAL
app01-6032	79	4	−0.1	ORG
app01-6032	80	1	1:3	CARDINAL
app01-6032	80	2	syl184	PERSON
app01-6032	80	3	13.5±0.1kpa	ORDINAL
app01-6032	80	4	19.8±0.1kpa	CARDINAL
app01-6032	80	5	31.6±0.2kpa	CARDINAL
app01-6032	80	6	4	CARDINAL
app01-6032	81	1	1 to 3	CARDINAL
app01-6032	81	2	184	CARDINAL
app01-6032	81	3	527	CARDINAL
app01-6032	81	4	−0.1	ORG
app01-6032	82	1	1:9	DATE
app01-6032	82	2	syl184	PERSON
app01-6032	82	3	6.4±0.1kpa e0.1	TIME
app01-6032	82	4	8.3±0.2kpa	TIME
app01-6032	82	5	13.2±0.1kpa	CARDINAL
app01-6032	82	6	5	CARDINAL
app01-6032	83	1	1 to 9	CARDINAL
app01-6032	83	2	184	CARDINAL
app01-6032	83	3	527	CARDINAL
app01-6032	84	1	2 2.5	CARDINAL
app01-6032	84	2	−0.1	ORG
app01-6032	85	1	1:1	CARDINAL
app01-6032	85	2	3.8±0.1kpa e0.1	TIME
app01-6032	86	1	7.5±0.1kpa	CARDINAL
app01-6032	86	2	6	CARDINAL
app01-6032	87	1	1.0	CARDINAL
app01-6032	87	2	1.0	CARDINAL
app01-6032	87	3	527a	PRODUCT
app01-6032	87	4	81	CARDINAL
app01-6032	87	5	f. martino	PERSON
app01-6032	88	1	g. forte et al	PERSON
app01-6032	88	2	acta polytechnica ctu	PERSON
app01-6032	89	1	0.2 0.4 0.6 0.8 1 1.2	QUANTITY
app01-6032	89	2	−0.1	ORG
app01-6032	91	1	1.2:1	CARDINAL
app01-6032	92	1	1.0±0.1kpa	ORDINAL
app01-6032	92	2	2.0±0.1kpa	CARDINAL
app01-6032	93	1	3.6±0.1kpa	CARDINAL
app01-6032	93	2	7	CARDINAL
app01-6032	93	3	1.2	CARDINAL
app01-6032	93	4	1.0	CARDINAL
app01-6032	93	5	527a	PRODUCT
app01-6032	93	6	2 2.5	CARDINAL
app01-6032	93	7	−0.1	ORG
app01-6032	94	1	4.5±0.1kpa	CARDINAL
app01-6032	95	1	7.0±0.1kpa	CARDINAL
app01-6032	95	2	8	CARDINAL
app01-6032	97	1	sylgard 184	PERSON
app01-6032	97	2	527a	PRODUCT
app01-6032	97	3	527b	PRODUCT
app01-6032	98	1	soft pdms	ORG
app01-6032	100	1	ona	PERSON
app01-6032	101	1	up to 5	CARDINAL
app01-6032	102	1	the european regional development fund	ORG
app01-6032	102	2	kompetenzzentrum mechanobiologie	PERSON
app01-6032	102	3	austria	GPE
app01-6032	102	4	czech	NORP
app01-6032	103	1	1	CARDINAL
app01-6032	103	2	j. raczkowska	PERSON
app01-6032	103	3	s. prauzner-bechcicki	PERSON
app01-6032	103	4	j. lukes	PERSON
app01-6032	104	1	389:247–254	DATE
app01-6032	104	2	2016	DATE
app01-6032	105	1	doi:10.1016/j.apsusc.2016.07.009	ORG
app01-6032	106	1	2	CARDINAL
app01-6032	106	2	j. rihova	PERSON
app01-6032	106	3	l. vistejnova	PERSON
app01-6032	107	1	17th	ORDINAL
app01-6032	107	2	25	CARDINAL
app01-6032	107	3	2019	DATE
app01-6032	109	1	3	CARDINAL
app01-6032	109	2	d. kytyr	PERSON
app01-6032	109	3	p. koudelka	PERSON
app01-6032	110	1	2017	DATE
app01-6032	111	1	doi:10.1016/j.matdes.2017.08.036	ORG
app01-6032	112	1	4	CARDINAL
app01-6032	112	2	r. palchesko	PERSON
app01-6032	112	3	l. zhang	PERSON
app01-6032	112	4	a. feinberg	PERSON
app01-6032	114	1	plos	PERSON
app01-6032	114	2	one	CARDINAL
app01-6032	114	3	2012	DATE
app01-6032	117	1	5	CARDINAL
app01-6032	117	2	j. sleichrt	PERSON
app01-6032	117	3	d. kytyr	PERSON
app01-6032	118	1	4d	CARDINAL
app01-6032	119	1	journal of instrumentation	ORG
app01-6032	119	2	13(11	CARDINAL
app01-6032	119	3	2018	DATE
app01-6032	120	1	doi:10.1088/1748-0221/13/11	PERSON
app01-6032	121	1	6	CARDINAL
app01-6032	121	2	v. rada	PERSON
app01-6032	121	3	t. fila	PERSON
app01-6032	122	1	16th	ORDINAL
app01-6032	122	2	18	CARDINAL
app01-6032	122	3	acta polytechnica ctu proceedings	ORG
app01-6032	124	1	2018	DATE
app01-6032	126	1	7	CARDINAL
app01-6032	126	2	s. kratz	PERSON
app01-6032	126	3	c. eilenberger	PERSON
app01-6032	126	4	p. schuller	PERSON
app01-6032	126	5	four	CARDINAL
app01-6032	127	1	9(1	CARDINAL
app01-6032	127	2	2019	DATE
app01-6032	128	1	doi:10.1038	ORG
app01-6032	128	2	https://doi.org/10.1016/j.apsusc.2016.07.009	ORG
app01-6032	129	1	acta polytechnica ctu	PERSON
app01-6032	129	2	25:79–82	CARDINAL
app01-6032	129	3	2019 1	DATE
app01-6032	129	4	2	CARDINAL
app01-6032	129	5	2.1	CARDINAL
app01-6032	129	6	2.2	CARDINAL
app01-6032	129	7	2.3	CARDINAL
app01-6032	129	8	2.4	CARDINAL
app01-6032	129	9	3	CARDINAL
app01-6032	129	10	4	CARDINAL