id	sid	eid	entity	type
app01-6680	1	1	acta polytechnica doi:10.14311/app.2020.27.0079 acta polytechnica 27(0):79–83,	PERSON
app01-6680	1	2	2020	DATE
app01-6680	1	3	czech technical university	ORG
app01-6680	1	4	prague	GPE
app01-6680	1	5	2020	DATE
app01-6680	1	6	mehdi zaouia	PERSON
app01-6680	1	7	alexandre bourcereta	PERSON
app01-6680	1	8	yves gaillarda	PERSON
app01-6680	1	9	sylvain giljeanc,∗	PERSON
app01-6680	1	10	christophe rousselota	PERSON
app01-6680	1	11	marie-josé pacc	PERSON
app01-6680	1	12	fabrice	GPE
app01-6680	1	13	université bourgogne franche-comté	ORG
app01-6680	1	14	institut femto-st	PERSON
app01-6680	1	15	32	CARDINAL
app01-6680	1	16	25000	CARDINAL
app01-6680	1	17	france b institut de recherche technologique	ORG
app01-6680	1	18	matériaux	ORG
app01-6680	1	19	4 rue augustin	QUANTITY
app01-6680	1	20	57070	CARDINAL
app01-6680	1	21	metz	GPE
app01-6680	1	22	france	GPE
app01-6680	1	23	université de haute alsace	ORG
app01-6680	1	24	lpmt	GPE
app01-6680	1	25	2	CARDINAL
app01-6680	1	26	68093	DATE
app01-6680	1	27	mulhouse	GPE
app01-6680	1	28	france ∗	ORG
app01-6680	2	1	1	CARDINAL
app01-6680	3	1	2d	CARDINAL
app01-6680	4	1	first	ORDINAL
app01-6680	7	1	2 µm	DATE
app01-6680	7	2	10 to 50	CARDINAL
app01-6680	9	1	10	CARDINAL
app01-6680	10	1	1	CARDINAL
app01-6680	15	1	1	CARDINAL
app01-6680	15	2	many years	DATE
app01-6680	15	3	2	CARDINAL
app01-6680	15	4	3	CARDINAL
app01-6680	16	1	ti1	NORP
app01-6680	16	2	0.46	CARDINAL
app01-6680	17	1	1	CARDINAL
app01-6680	17	2	4	CARDINAL
app01-6680	18	1	one	CARDINAL
app01-6680	19	1	three	CARDINAL
app01-6680	19	2	50	CARDINAL
app01-6680	19	3	16	DATE
app01-6680	19	4	10	CARDINAL
app01-6680	21	1	1	CARDINAL
app01-6680	22	1	2d	DATE
app01-6680	25	1	first	ORDINAL
app01-6680	27	1	79	CARDINAL
app01-6680	27	2	http://dx.doi.org/10.14311/app.2020.27.0079	ORG
app01-6680	27	3	m. zaoui	PERSON
app01-6680	27	4	a. bourceret	PERSON
app01-6680	28	1	2	CARDINAL
app01-6680	29	1	100	CARDINAL
app01-6680	29	2	one	CARDINAL
app01-6680	29	3	66/33	CARDINAL
app01-6680	29	4	at.%	ORG
app01-6680	29	5	4	CARDINAL
app01-6680	31	1	5	CARDINAL
app01-6680	31	2	1	CARDINAL
app01-6680	32	1	1	CARDINAL
app01-6680	32	2	3.0	CARDINAL
app01-6680	32	3	3.0 50	CARDINAL
app01-6680	32	4	16	CARDINAL
app01-6680	32	5	10 1.8	CARDINAL
app01-6680	32	6	1	CARDINAL
app01-6680	33	1	anton paar	PERSON
app01-6680	34	1	8	CARDINAL
app01-6680	35	1	1	CARDINAL
app01-6680	35	2	4	CARDINAL
app01-6680	36	1	2d	CARDINAL
app01-6680	36	2	ansys	ORG
app01-6680	36	3	1	CARDINAL
app01-6680	37	1	non-linear	ORG
app01-6680	37	2	2d	DATE
app01-6680	38	1	linear	ORG
app01-6680	38	2	half	CARDINAL
app01-6680	38	3	70.3°	QUANTITY
app01-6680	39	1	0.1	CARDINAL
app01-6680	44	1	ω	ORG
app01-6680	44	2	the levenberg-marquardt	ORG
app01-6680	45	1	6	CARDINAL
app01-6680	45	2	8	CARDINAL
app01-6680	45	3	θ ω	ORG
app01-6680	45	4	1	CARDINAL
app01-6680	45	5	ω	ORG
app01-6680	45	6	1	CARDINAL
app01-6680	45	7	2d	DATE
app01-6680	47	1	ω(θ	CARDINAL
app01-6680	47	2	1 2	CARDINAL
app01-6680	48	1	2	CARDINAL
app01-6680	48	2	2	CARDINAL
app01-6680	50	1	3	CARDINAL
app01-6680	50	2	3.1	CARDINAL
app01-6680	51	1	1	CARDINAL
app01-6680	51	2	4	CARDINAL
app01-6680	55	1	2	CARDINAL
app01-6680	56	1	2	CARDINAL
app01-6680	57	1	3.2	CARDINAL
app01-6680	57	2	1	CARDINAL
app01-6680	58	1	1/	CARDINAL
app01-6680	59	1	first	ORDINAL
app01-6680	59	2	3.a	CARDINAL
app01-6680	60	1	80	CARDINAL
app01-6680	61	1	27/2020	CARDINAL
app01-6680	61	2	199	CARDINAL
app01-6680	61	3	0.25 0.88 56.6	QUANTITY
app01-6680	61	4	417 0.21 5.70	CARDINAL
app01-6680	61	5	2	CARDINAL
app01-6680	62	1	2	CARDINAL
app01-6680	64	1	3	CARDINAL
app01-6680	65	1	4	CARDINAL
app01-6680	66	1	the (p-h	ORG
app01-6680	66	2	10	CARDINAL
app01-6680	66	3	16	DATE
app01-6680	66	4	50	CARDINAL
app01-6680	67	1	10	CARDINAL
app01-6680	67	2	16	DATE
app01-6680	67	3	50	CARDINAL
app01-6680	68	1	1	CARDINAL
app01-6680	68	2	2	CARDINAL
app01-6680	68	3	3	CARDINAL
app01-6680	69	1	less than 0.5%	PERCENT
app01-6680	69	2	only one	CARDINAL
app01-6680	69	3	3.a	CARDINAL
app01-6680	70	1	4	CARDINAL
app01-6680	70	2	50	CARDINAL
app01-6680	72	1	81	CARDINAL
app01-6680	72	2	m. zaoui	PERSON
app01-6680	72	3	a. bourceret	PERSON
app01-6680	73	1	5	CARDINAL
app01-6680	74	1	10	CARDINAL
app01-6680	76	1	3.3	CARDINAL
app01-6680	76	2	3.b	CARDINAL
app01-6680	80	1	5.a	CARDINAL
app01-6680	81	1	10	CARDINAL
app01-6680	81	2	2.12	CARDINAL
app01-6680	82	1	5.b	CARDINAL
app01-6680	83	1	4.	CARDINAL
app01-6680	83	2	2d	CARDINAL
app01-6680	85	1	first	ORDINAL
app01-6680	86	1	50	CARDINAL
app01-6680	88	1	2.12	CARDINAL
app01-6680	88	2	10	CARDINAL
app01-6680	89	1	2019	DATE
app01-6680	89	2	the institut de recherche technologique	ORG
app01-6680	89	3	french	NORP
app01-6680	89	4	d’avenir	PERSON
app01-6680	89	5	pia	PERSON
app01-6680	90	1	1	CARDINAL
app01-6680	91	1	pac	PERSON
app01-6680	91	2	y. pinot	PERSON
app01-6680	91	3	s. giljean	PERSON
app01-6680	93	1	634:96	CARDINAL
app01-6680	93	2	106	DATE
app01-6680	93	3	2017	DATE
app01-6680	94	1	doi:10.1016/j.tsf.2017.05.015	ORG
app01-6680	95	1	2	CARDINAL
app01-6680	97	1	4:2717–2725, 1986	DATE
app01-6680	99	1	3	CARDINAL
app01-6680	99	2	s. paldey	PERSON
app01-6680	99	3	s. deevi	PERSON
app01-6680	101	1	342(1):58	CARDINAL
app01-6680	101	2	79, 2003	DATE
app01-6680	102	1	doi:10.1016	PERSON
app01-6680	102	2	5093(02)00259	CARDINAL
app01-6680	103	1	4	CARDINAL
app01-6680	104	1	s. giljean	PERSON
app01-6680	104	2	c. rousselot	PERSON
app01-6680	104	3	0	CARDINAL
app01-6680	105	1	569:81	DATE
app01-6680	105	2	92, 2014	DATE
app01-6680	106	1	doi:10.1016/j.tsf.2014.07.037	ORG
app01-6680	107	1	5	CARDINAL
app01-6680	107	2	n. martin	PERSON
app01-6680	107	3	j. lintymer	PERSON
app01-6680	107	4	f. sthal	PERSON
app01-6680	107	5	procédé de pulvérisation réactive à signal de commande cyclique et dispositif correspondant 2008	ORG
app01-6680	108	1	6	CARDINAL
app01-6680	108	2	k. levenberg	PERSON
app01-6680	110	1	quarterly	DATE
app01-6680	110	2	2(2):164–168	CARDINAL
app01-6680	110	3	1944	DATE
app01-6680	111	1	82	CARDINAL
app01-6680	111	2	https://doi.org/10.1116/1.573713 https://doi.org/10.1016/s0921-5093(02)00259-9	GPE
app01-6680	112	1	27/2020	CARDINAL
app01-6680	113	1	7	CARDINAL
app01-6680	113	2	d. w. marquardt	PERSON
app01-6680	115	1	1963	DATE
app01-6680	116	1	doi:10.1137/0111030	PERSON
app01-6680	117	1	8	CARDINAL
app01-6680	117	2	f. richard	PERSON
app01-6680	118	1	mic2	PERSON
app01-6680	118	2	2000	DATE
app01-6680	119	1	83	CARDINAL
app01-6680	119	2	https://doi.org/10.1137/0111030 acta polytechnica 27(0):79–83	ORG
app01-6680	119	3	1	CARDINAL
app01-6680	119	4	2	CARDINAL
app01-6680	119	5	3	CARDINAL
app01-6680	119	6	3.1	CARDINAL
app01-6680	119	7	3.2	CARDINAL
app01-6680	119	8	3.3	CARDINAL
app01-6680	119	9	4	CARDINAL