id	sid	eid	entity	type
app01-6686	1	1	acta polytechnica doi:10.14311/app.2020.27.0057 acta polytechnica	PERSON
app01-6686	1	2	27(0):57–61	CARDINAL
app01-6686	1	3	2020	DATE
app01-6686	1	4	czech technical university	ORG
app01-6686	1	5	prague	GPE
app01-6686	1	6	2020	DATE
app01-6686	1	7	radim kudělkaa	PERSON
app01-6686	1	8	lukáš václaveka	PERSON
app01-6686	1	9	jan tomáštíkb	GPE
app01-6686	1	10	sabina malecováa	PERSON
app01-6686	1	11	palacky university olomouc	ORG
app01-6686	1	12	17	CARDINAL
app01-6686	2	1	50a	DATE
app01-6686	2	2	772 07	DATE
app01-6686	2	3	olomouc	GPE
app01-6686	2	4	czech republic b institute of physics	ORG
app01-6686	2	5	the czech academy of sciences	ORG
app01-6686	2	6	palacky university and institute of physics	ORG
app01-6686	2	7	17	CARDINAL
app01-6686	3	1	12	CARDINAL
app01-6686	3	2	46	DATE
app01-6686	3	3	olomouc	GPE
app01-6686	3	4	czech	NORP
app01-6686	3	5	palacky university and institute of physics	ORG
app01-6686	3	6	the czech academy of sciences	ORG
app01-6686	3	7	palacky university	ORG
app01-6686	3	8	17	CARDINAL
app01-6686	4	1	12	CARDINAL
app01-6686	4	2	77146	DATE
app01-6686	4	3	czech	NORP
app01-6686	4	4	∗	CARDINAL
app01-6686	9	1	poisson	ORG
app01-6686	12	1	1	CARDINAL
app01-6686	15	1	1	CARDINAL
app01-6686	16	1	10 %	PERCENT
app01-6686	17	1	2–4	CARDINAL
app01-6686	18	1	two	CARDINAL
app01-6686	18	2	5	CARDINAL
app01-6686	19	1	50	CARDINAL
app01-6686	19	2	6	CARDINAL
app01-6686	21	1	one	CARDINAL
app01-6686	21	2	7	CARDINAL
app01-6686	21	3	8	CARDINAL
app01-6686	22	1	poisson	ORG
app01-6686	27	1	1.1	CARDINAL
app01-6686	28	1	hundreds	CARDINAL
app01-6686	30	1	1	CARDINAL
app01-6686	31	1	≈	CARDINAL
app01-6686	32	1	57	CARDINAL
app01-6686	32	2	http://dx.doi.org/10.14311/app.2020.27.0057	ORG
app01-6686	32	3	http://ojs.cvut.cz/ojs/index.php/app r. kudělka	PERSON
app01-6686	32	4	l. václavek	PERSON
app01-6686	32	5	j. tomáštík et	PERSON
app01-6686	32	6	acta polytechnica	PERSON
app01-6686	32	7	de pt h film substrate	ORG
app01-6686	32	8	1	CARDINAL
app01-6686	35	1	8	CARDINAL
app01-6686	36	1	0.87	CARDINAL
app01-6686	37	1	1	CARDINAL
app01-6686	37	2	ν	NORP
app01-6686	38	1	poisson	ORG
app01-6686	43	1	zero	CARDINAL
app01-6686	46	1	1	CARDINAL
app01-6686	49	1	2	CARDINAL
app01-6686	51	1	2πf	ORDINAL
app01-6686	51	2	2	CARDINAL
app01-6686	51	3	two	CARDINAL
app01-6686	52	1	2	CARDINAL
app01-6686	52	2	2	CARDINAL
app01-6686	53	1	1.2	CARDINAL
app01-6686	54	1	fraunhofer institute	ORG
app01-6686	54	2	dresden	GPE
app01-6686	54	3	germany	GPE
app01-6686	55	1	1	CARDINAL
app01-6686	55	2	250	CARDINAL
app01-6686	55	3	337	CARDINAL
app01-6686	55	4	0.5	CARDINAL
app01-6686	55	5	58	CARDINAL
app01-6686	56	1	27/2020	CARDINAL
app01-6686	56	2	35	CARDINAL
app01-6686	56	3	163	CARDINAL
app01-6686	56	4	34	CARDINAL
app01-6686	56	5	156	CARDINAL
app01-6686	56	6	50	CARDINAL
app01-6686	56	7	150	CARDINAL
app01-6686	56	8	60	CARDINAL
app01-6686	56	9	120 min	QUANTITY
app01-6686	56	10	180 min	QUANTITY
app01-6686	58	1	3	CARDINAL
app01-6686	59	1	400	CARDINAL
app01-6686	60	1	64	CARDINAL
app01-6686	60	2	5	CARDINAL
app01-6686	60	3	the 15 mm and 20 mm	QUANTITY
app01-6686	62	1	2	CARDINAL
app01-6686	62	2	2.1	CARDINAL
app01-6686	64	1	sio2	PERSON
app01-6686	65	1	sio2	ORG
app01-6686	66	1	1000	CARDINAL
app01-6686	66	2	1	CARDINAL
app01-6686	66	3	60	DATE
app01-6686	66	4	120	CARDINAL
app01-6686	66	5	180 minutes	TIME
app01-6686	66	6	20	CARDINAL
app01-6686	67	1	3	CARDINAL
app01-6686	70	1	4.6%	PERCENT
app01-6686	73	1	sio2	ORG
app01-6686	75	1	9	CARDINAL
app01-6686	75	2	2.1	CARDINAL
app01-6686	75	3	9	CARDINAL
app01-6686	76	1	10	CARDINAL
app01-6686	76	2	65 67	DATE
app01-6686	76	3	66	CARDINAL
app01-6686	76	4	120 34	CARDINAL
app01-6686	76	5	90	CARDINAL
app01-6686	76	6	136	CARDINAL
app01-6686	76	7	156	CARDINAL
app01-6686	77	1	4	CARDINAL
app01-6686	78	1	sio2	ORG
app01-6686	80	1	sio2	ORG
app01-6686	81	1	sio2	ORG
app01-6686	81	2	3.2 ± 0.5	MONEY
app01-6686	83	1	sio2	PERSON
app01-6686	83	2	11	CARDINAL
app01-6686	84	1	second	ORDINAL
app01-6686	84	2	sio2	ORG
app01-6686	86	1	2.2	CARDINAL
app01-6686	87	1	sio2	PERSON
app01-6686	88	1	sio2	PERSON
app01-6686	88	2	34	CARDINAL
app01-6686	88	3	156	CARDINAL
app01-6686	90	1	at least 15	CARDINAL
app01-6686	90	2	standard oliver-pharr	PERSON
app01-6686	91	1	sio2 poisson’s	PERSON
app01-6686	91	2	0.17	CARDINAL
app01-6686	91	3	poisson	ORG
app01-6686	91	4	0.07	CARDINAL
app01-6686	91	5	1141 gpa	PERCENT
app01-6686	92	1	12	CARDINAL
app01-6686	93	1	4	CARDINAL
app01-6686	93	2	4	CARDINAL
app01-6686	93	3	156	CARDINAL
app01-6686	93	4	136	CARDINAL
app01-6686	94	1	90	CARDINAL
app01-6686	94	2	up to 25 %	PERCENT
app01-6686	94	3	59	CARDINAL
app01-6686	94	4	r. kudělka	PERSON
app01-6686	94	5	l. václavek	PERSON
app01-6686	94	6	j. tomáštík et	PERSON
app01-6686	95	1	120 80 40	PERCENT
app01-6686	95	2	120	CARDINAL
app01-6686	95	3	200 160	CARDINAL
app01-6686	98	1	o	DATE
app01-6686	98	2	0.00	CARDINAL
app01-6686	98	3	5	CARDINAL
app01-6686	98	4	poisson	PERSON
app01-6686	100	1	34	CARDINAL
app01-6686	100	2	59 %	PERCENT
app01-6686	103	1	sio2	PRODUCT
app01-6686	104	1	4	CARDINAL
app01-6686	105	1	100	CARDINAL
app01-6686	109	1	three	CARDINAL
app01-6686	109	2	100	CARDINAL
app01-6686	110	1	13–17	CARDINAL
app01-6686	110	2	al	PERSON
app01-6686	111	1	1	CARDINAL
app01-6686	112	1	2.3	CARDINAL
app01-6686	113	1	18	CARDINAL
app01-6686	115	1	63.5	CARDINAL
app01-6686	115	2	69.6	CARDINAL
app01-6686	115	3	116.1 102	CARDINAL
app01-6686	115	4	204.4	CARDINAL
app01-6686	115	5	1	CARDINAL
app01-6686	115	6	three	CARDINAL
app01-6686	115	7	165.6–165.7	CARDINAL
app01-6686	115	8	63.9	CARDINAL
app01-6686	115	9	18	CARDINAL
app01-6686	115	10	19	CARDINAL
app01-6686	116	1	poisson	ORG
app01-6686	117	1	130.2	CARDINAL
app01-6686	117	2	168.9 gpa	MONEY
app01-6686	117	3	20	CARDINAL
app01-6686	117	4	100	CARDINAL
app01-6686	117	5	2	CARDINAL
app01-6686	117	6	c12 c12	ORG
app01-6686	118	1	3	CARDINAL
app01-6686	118	2	100	CARDINAL
app01-6686	119	1	165.4	CARDINAL
app01-6686	119	2	63.5	CARDINAL
app01-6686	120	1	poisson	ORG
app01-6686	121	1	5	CARDINAL
app01-6686	123	1	3	CARDINAL
app01-6686	123	2	poisson	ORG
app01-6686	123	3	60	CARDINAL
app01-6686	124	1	27/2020	CARDINAL
app01-6686	127	1	over 100	CARDINAL
app01-6686	127	2	10 %	PERCENT
app01-6686	127	3	the 10 %	PERCENT
app01-6686	128	1	palacky university	ORG
app01-6686	128	2	the czech republic	GPE
app01-6686	129	1	the ministry of education	ORG
app01-6686	129	2	the czech republic	GPE
app01-6686	130	1	1	CARDINAL
app01-6686	130	2	w. oliver	PERSON
app01-6686	130	3	g. pharr	PERSON
app01-6686	132	1	19(1):3–20, 2004	DATE
app01-6686	134	1	2	CARDINAL
app01-6686	134	2	a. korsunsky	PERSON
app01-6686	134	3	m. mcgurk	PERSON
app01-6686	134	4	s. bull	PERSON
app01-6686	136	1	99(1-2):171–183	QUANTITY
app01-6686	136	2	1998	DATE
app01-6686	137	1	doi:10.1016	PERSON
app01-6686	138	1	3	CARDINAL
app01-6686	138	2	a. bhattacharya	PERSON
app01-6686	138	3	w. nix.	PERSON
app01-6686	140	1	24(12):1287–1298, 1988	DATE
app01-6686	141	1	doi:10.1016/0020-7683(88)90091-1	ORG
app01-6686	142	1	4	CARDINAL
app01-6686	142	2	m. sakai	PERSON
app01-6686	143	1	24(3):831–843	CARDINAL
app01-6686	143	2	2009	DATE
app01-6686	145	1	5	CARDINAL
app01-6686	145	2	a. c. fischer-cripps	PERSON
app01-6686	147	1	new york	GPE
app01-6686	147	2	2004	DATE
app01-6686	149	1	6	CARDINAL
app01-6686	149	2	t. sawa	PERSON
app01-6686	149	3	y. akiyama	PERSON
app01-6686	149	4	a. shimamoto	PERSON
app01-6686	149	5	k. tanaka	PERSON
app01-6686	150	1	10	CARDINAL
app01-6686	151	1	14(6):2228–2232, 1999	DATE
app01-6686	153	1	7	CARDINAL
app01-6686	153	2	d. schneider	PERSON
app01-6686	154	1	153(23):252–260	CARDINAL
app01-6686	154	2	2002	DATE
app01-6686	155	1	doi:10.1016	PERSON
app01-6686	155	2	8972(01)01664	CARDINAL
app01-6686	156	1	8	CARDINAL
app01-6686	156	2	d. schneider	PERSON
app01-6686	156	3	t. schwarz	GPE
app01-6686	158	1	91(1-2):136–146	QUANTITY
app01-6686	159	1	doi:10.1016	PERSON
app01-6686	160	1	9	CARDINAL
app01-6686	160	2	w. sigmund	PERSON
app01-6686	162	1	silicon 8(3):339–343,	DATE
app01-6686	162	2	2015	DATE
app01-6686	164	1	10	CARDINAL
app01-6686	164	2	d. schneider	PERSON
app01-6686	164	3	m. herben	PERSON
app01-6686	166	1	84(2):340–354	CARDINAL
app01-6686	167	1	doi:10.1016/j.mee.2006.11.001	GPE
app01-6686	168	1	11	CARDINAL
app01-6686	168	2	m. d. ulrich	PERSON
app01-6686	168	3	j. e. rowe	PERSON
app01-6686	168	4	j. w. keister	PERSON
app01-6686	168	5	sio2/si(100	ORG
app01-6686	168	6	sio2/si(111	ORG
app01-6686	169	1	journal of vacuum science & technology	ORG
app01-6686	169	2	24(4):2132, 2006	DATE
app01-6686	170	1	doi:10.1116/1.2218865	PERSON
app01-6686	171	1	12	CARDINAL
app01-6686	174	1	13	CARDINAL
app01-6686	174	2	s. lee	PERSON
app01-6686	174	3	y. kim	PERSON
app01-6686	174	4	y. cho	PERSON
app01-6686	176	1	7(9):143	CARDINAL
app01-6686	176	2	2017	DATE
app01-6686	178	1	14	CARDINAL
app01-6686	178	2	m. chinmulgund	PERSON
app01-6686	178	3	r. inturi	PERSON
app01-6686	178	4	j. barnard	PERSON
app01-6686	179	1	al	PERSON
app01-6686	180	1	270(1-2):260–263, 1995	DATE
app01-6686	182	1	15	CARDINAL
app01-6686	182	2	m. hirata	PERSON
app01-6686	182	3	n. chiba	PERSON
app01-6686	184	1	484(1):245	CARDINAL
app01-6686	184	2	250, 2005	DATE
app01-6686	186	1	16	CARDINAL
app01-6686	186	2	v. kulikovsky	PERSON
app01-6686	186	3	t. rogul	GPE
app01-6686	186	4	r. ctvrtlik	PERSON
app01-6686	188	1	206(17):3580–3585	CARDINAL
app01-6686	188	2	2012	DATE
app01-6686	189	1	doi:10.1016/j.surfcoat.2012.02.039	ORG
app01-6686	190	1	17	CARDINAL
app01-6686	190	2	d. schneider	PERSON
app01-6686	190	3	m. tucker	PERSON
app01-6686	192	1	290291:305–311, 1996	DATE
app01-6686	193	1	doi:10.1016	PERSON
app01-6686	194	1	18	CARDINAL
app01-6686	194	2	l. zhang	PERSON
app01-6686	194	3	r. barrett	PERSON
app01-6686	195	1	21(3):507–517,	DATE
app01-6686	195	2	2014	DATE
app01-6686	196	1	doi:10.1107	PERSON
app01-6686	197	1	19	CARDINAL
app01-6686	197	2	j. kim	PERSON
app01-6686	197	3	d. il cho	PERSON
app01-6686	197	4	r. s. muller	PERSON
app01-6686	198	1	111	CARDINAL
app01-6686	199	1	01	CARDINAL
app01-6686	200	1	662–665	CARDINAL
app01-6686	200	2	springer berlin heidelberg	ORG
app01-6686	200	3	2001	DATE
app01-6686	202	1	20	CARDINAL
app01-6686	202	2	m. a. hopcroft	PERSON
app01-6686	202	3	w. d. nix	PERSON
app01-6686	202	4	w. kenny	PERSON
app01-6686	204	1	19(2):229–238, 2010	DATE
app01-6686	205	1	doi:10.1109/jmems.2009.2039697	ORG
app01-6686	206	1	61	CARDINAL
app01-6686	207	1	https://doi.org/10.1557/jmr.1999.0299 https://doi.org/10.1016/s0257-8972(01)01664-4 https://doi.org/10.1016/s0257-8972(96)03147-7	PERSON
app01-6686	208	1	27(0):57–61	CARDINAL
app01-6686	208	2	1	CARDINAL
app01-6686	208	3	1.1	CARDINAL
app01-6686	208	4	1.2	CARDINAL
app01-6686	208	5	2	CARDINAL
app01-6686	208	6	2.1	CARDINAL
app01-6686	208	7	2.2	CARDINAL
app01-6686	208	8	2.3	CARDINAL
app01-6686	208	9	3	CARDINAL