id	sid	eid	entity	type
app01-6709	1	1	acta polytechnica doi:10.14311	PERSON
app01-6709	1	2	27(0):141–144	CARDINAL
app01-6709	1	3	2020	DATE
app01-6709	1	4	czech technical university	ORG
app01-6709	1	5	prague	GPE
app01-6709	1	6	2020	DATE
app01-6709	1	7	jakub čížekb	PERSON
app01-6709	1	8	jaroslav čecha	PERSON
app01-6709	1	9	jiří zýkac	PERSON
app01-6709	1	10	hyoung seop kimd	PERSON
app01-6709	1	11	czech	NORP
app01-6709	1	12	prague	GPE
app01-6709	1	13	13	CARDINAL
app01-6709	1	14	120 00 praha	QUANTITY
app01-6709	1	15	czech	NORP
app01-6709	1	16	charles university	PERSON
app01-6709	1	17	prague	GPE
app01-6709	1	18	cz-18000	LANGUAGE
app01-6709	1	19	czech	NORP
app01-6709	3	1	nad kamínkou	PERSON
app01-6709	3	2	1345	DATE
app01-6709	3	3	156 00	DATE
app01-6709	3	4	czech	NORP
app01-6709	3	5	790-784	CARDINAL
app01-6709	3	6	south korea	GPE
app01-6709	10	1	1	CARDINAL
app01-6709	10	2	gibbs	PERSON
app01-6709	11	1	five	CARDINAL
app01-6709	11	2	1	CARDINAL
app01-6709	12	1	heas	GPE
app01-6709	12	2	2	CARDINAL
app01-6709	12	3	3	CARDINAL
app01-6709	15	1	hea cantor	PERSON
app01-6709	15	2	fcc	ORG
app01-6709	15	3	4	CARDINAL
app01-6709	16	1	bcc	ORG
app01-6709	17	1	bcc	ORG
app01-6709	17	2	5	CARDINAL
app01-6709	17	3	6	CARDINAL
app01-6709	18	1	bcc	ORG
app01-6709	20	1	5	CARDINAL
app01-6709	20	2	6	CARDINAL
app01-6709	20	3	nb	ORG
app01-6709	20	4	bcc	ORG
app01-6709	21	1	800 °	QUANTITY
app01-6709	21	2	bcc	ORG
app01-6709	21	3	two	CARDINAL
app01-6709	21	4	bcc1	GPE
app01-6709	21	5	0.3427	CARDINAL
app01-6709	21	6	0.3338	CARDINAL
app01-6709	21	7	7	CARDINAL
app01-6709	22	1	zr	GPE
app01-6709	22	2	second	ORDINAL
app01-6709	22	3	nb	ORG
app01-6709	24	1	6	CARDINAL
app01-6709	25	1	5	CARDINAL
app01-6709	27	1	141	CARDINAL
app01-6709	27	2	j. čížek	PERSON
app01-6709	27	3	j. čech et al	PERSON
app01-6709	27	4	acta polytechnica	PERSON
app01-6709	27	5	1/4	CARDINAL
app01-6709	27	6	1	CARDINAL
app01-6709	28	1	1	CARDINAL
app01-6709	28	2	0	CARDINAL
app01-6709	29	1	4049 4438	DATE
app01-6709	29	2	5717	DATE
app01-6709	29	3	5953	DATE
app01-6709	30	1	45.7 76.3	CARDINAL
app01-6709	30	2	33.5 29.3	CARDINAL
app01-6709	30	3	1	CARDINAL
app01-6709	30	4	h∗	ORG
app01-6709	33	1	2	CARDINAL
app01-6709	33	2	2.1	CARDINAL
app01-6709	33	3	nb	ORG
app01-6709	34	1	eight	CARDINAL
app01-6709	35	1	20 mm	QUANTITY
app01-6709	35	2	1 mm	QUANTITY
app01-6709	35	3	2.5	CARDINAL
app01-6709	36	1	1/4	CARDINAL
app01-6709	36	2	1	CARDINAL
app01-6709	36	3	15	CARDINAL
app01-6709	37	1	1	CARDINAL
app01-6709	38	1	5	CARDINAL
app01-6709	38	2	20	DATE
app01-6709	38	3	300	CARDINAL
app01-6709	38	4	1	CARDINAL
app01-6709	40	1	5	CARDINAL
app01-6709	41	1	one	CARDINAL
app01-6709	41	2	2 mins	TIME
app01-6709	41	3	1600 °	QUANTITY
app01-6709	42	1	1	CARDINAL
app01-6709	43	1	2.2	CARDINAL
app01-6709	43	2	0.04	CARDINAL
app01-6709	44	1	8	CARDINAL
app01-6709	45	1	1	CARDINAL
app01-6709	45	2	up to 500	CARDINAL
app01-6709	45	3	mn	ORG
app01-6709	47	1	10	CARDINAL
app01-6709	48	1	10	CARDINAL
app01-6709	48	2	5	CARDINAL
app01-6709	48	3	10	CARDINAL
app01-6709	49	1	iso 14577	ORG
app01-6709	50	1	half	CARDINAL
app01-6709	51	1	at least 20	CARDINAL
app01-6709	52	1	2000	CARDINAL
app01-6709	52	2	3000 4000 5000 6000 7000 8000	QUANTITY
app01-6709	52	3	15 1 1/4	CARDINAL
app01-6709	52	4	2	CARDINAL
app01-6709	52	5	1/4	CARDINAL
app01-6709	52	6	1	CARDINAL
app01-6709	52	7	15	CARDINAL
app01-6709	53	1	3	CARDINAL
app01-6709	53	2	1/4	CARDINAL
app01-6709	53	3	15	CARDINAL
app01-6709	54	1	2	CARDINAL
app01-6709	54	2	sub-micron	CARDINAL
app01-6709	55	1	12	CARDINAL
app01-6709	55	2	142	CARDINAL
app01-6709	56	1	27/2020	CARDINAL
app01-6709	56	2	1	CARDINAL
app01-6709	57	1	1	CARDINAL
app01-6709	58	1	3	CARDINAL
app01-6709	58	2	h∗	ORG
app01-6709	58	3	1	CARDINAL
app01-6709	59	1	0.006 0.007	CARDINAL
app01-6709	59	2	2	CARDINAL
app01-6709	59	3	nm-1	GPE
app01-6709	59	4	15	CARDINAL
app01-6709	59	5	1	CARDINAL
app01-6709	59	6	1/4	CARDINAL
app01-6709	59	7	3	CARDINAL
app01-6709	59	8	1/4	CARDINAL
app01-6709	59	9	15	CARDINAL
app01-6709	59	10	1.	CARDINAL
app01-6709	60	1	13	CARDINAL
app01-6709	61	1	h∗	ORG
app01-6709	62	1	h∗	ORG
app01-6709	63	1	12	CARDINAL
app01-6709	63	2	h∗	ORG
app01-6709	63	3	h∗	ORG
app01-6709	63	4	1	CARDINAL
app01-6709	63	5	2	CARDINAL
app01-6709	64	1	4	CARDINAL
app01-6709	64	2	h∗	ORG
app01-6709	64	3	2	CARDINAL
app01-6709	65	1	bcc	ORG
app01-6709	65	2	two	CARDINAL
app01-6709	65	3	bcc1	GPE
app01-6709	66	1	0.00 0.01 0.02	MONEY
app01-6709	66	2	1	CARDINAL
app01-6709	66	3	0 2	CARDINAL
app01-6709	67	1	1	CARDINAL
app01-6709	67	2	15	CARDINAL
app01-6709	67	3	4	CARDINAL
app01-6709	67	4	1/4	CARDINAL
app01-6709	67	5	15	CARDINAL
app01-6709	68	1	3000 4000 5000 6000 7000 8000	QUANTITY
app01-6709	68	2	2500	CARDINAL
app01-6709	69	1	5	CARDINAL
app01-6709	70	1	tens	CARDINAL
app01-6709	71	1	1600 °	QUANTITY
app01-6709	73	1	5	CARDINAL
app01-6709	73	2	1	CARDINAL
app01-6709	73	3	h∗	ORG
app01-6709	74	1	2	CARDINAL
app01-6709	74	2	4	CARDINAL
app01-6709	75	1	14	CARDINAL
app01-6709	76	1	143	CARDINAL
app01-6709	76	2	j. čížek	PERSON
app01-6709	76	3	j. čech et al	PERSON
app01-6709	78	1	5	CARDINAL
app01-6709	79	1	4	CARDINAL
app01-6709	79	2	•	CARDINAL
app01-6709	80	1	•	CARDINAL
app01-6709	83	1	•	CARDINAL
app01-6709	83	2	1600 °	QUANTITY
app01-6709	84	1	17-17016s	DATE
app01-6709	84	2	czech	NORP
app01-6709	85	1	1	CARDINAL
app01-6709	86	1	tsai	PERSON
app01-6709	86	2	j.-w	PERSON
app01-6709	87	1	yeh	PERSON
app01-6709	88	1	2(3):107–123, 2014	DATE
app01-6709	90	1	2	CARDINAL
app01-6709	90	2	o. senkov	PERSON
app01-6709	92	1	122:448	CARDINAL
app01-6709	92	2	511	CARDINAL
app01-6709	92	3	2017	DATE
app01-6709	93	1	doi:10.1016/j.actamat.2016.08.081	ORG
app01-6709	94	1	3	CARDINAL
app01-6709	94	2	j. chen	PERSON
app01-6709	94	3	x. zhou	PERSON
app01-6709	94	4	w. wang	PERSON
app01-6709	96	1	30, 2018	DATE
app01-6709	97	1	doi:10.1016/j.jallcom.2018.05.067	ORG
app01-6709	98	1	4	CARDINAL
app01-6709	98	2	a. heczel	PERSON
app01-6709	98	3	m. kawasaki	PERSON
app01-6709	98	4	j. lábár	PERSON
app01-6709	99	1	2017	DATE
app01-6709	100	1	doi:10.1016/j.jallcom.2017.03.352	ORG
app01-6709	101	1	5	CARDINAL
app01-6709	101	2	j. čížek	PERSON
app01-6709	101	3	p. haušild	PERSON
app01-6709	101	4	m. cieslar	PERSON
app01-6709	102	1	2018	DATE
app01-6709	103	1	doi:10.1016/j.jallcom.2018.07.319	ORG
app01-6709	104	1	6	CARDINAL
app01-6709	104	2	j. todt	PERSON
app01-6709	106	1	142:201–212	DATE
app01-6709	106	2	2018	DATE
app01-6709	107	1	doi:10.1016	PERSON
app01-6709	108	1	7	CARDINAL
app01-6709	108	2	s. l. semiatin	PERSON
app01-6709	110	1	2015	DATE
app01-6709	111	1	doi:10.1016	GPE
app01-6709	112	1	8	CARDINAL
app01-6709	112	2	w. oliver	PERSON
app01-6709	112	3	g. pharr	PERSON
app01-6709	114	1	j mater	PERSON
app01-6709	114	2	7(6):1564–1583, 1992	DATE
app01-6709	116	1	9	CARDINAL
app01-6709	116	2	w. oliver	PERSON
app01-6709	116	3	g. pharr	PERSON
app01-6709	117	1	j mater	PERSON
app01-6709	117	2	19(1):3–20, 2004	DATE
app01-6709	119	1	10	CARDINAL
app01-6709	119	2	a. materna	PERSON
app01-6709	119	3	l. kocmanová	PERSON
app01-6709	119	4	j. matějíček	PERSON
app01-6709	121	1	j mater res	PERSON
app01-6709	121	2	31(22):3538–3548	DATE
app01-6709	121	3	2016	DATE
app01-6709	123	1	11	CARDINAL
app01-6709	123	2	j. čech	PERSON
app01-6709	123	3	a. materna	PERSON
app01-6709	123	4	j. matějíček	PERSON
app01-6709	125	1	129:99	CARDINAL
app01-6709	125	2	103	CARDINAL
app01-6709	125	3	2019	DATE
app01-6709	126	1	doi:10.1016	PERSON
app01-6709	127	1	12	CARDINAL
app01-6709	127	2	w. nix, h. gao	PERSON
app01-6709	129	1	46(3):411–425	CARDINAL
app01-6709	129	2	1998	DATE
app01-6709	130	1	doi:10.1016	GPE
app01-6709	131	1	13	CARDINAL
app01-6709	132	1	a. p. zhilyaev	PERSON
app01-6709	132	2	t. g. langdon	PERSON
app01-6709	134	1	sci 53(6):893	ORG
app01-6709	134	2	979	CARDINAL
app01-6709	135	1	doi:10.1016	GPE
app01-6709	136	1	14	CARDINAL
app01-6709	136	2	o. senkov	PERSON
app01-6709	137	1	1516	CARDINAL
app01-6709	137	2	1998	DATE
app01-6709	138	1	6462(98)00073-6	CARDINAL
app01-6709	138	2	144	CARDINAL
app01-6709	138	3	27(0):141–144	CARDINAL
app01-6709	138	4	1	CARDINAL
app01-6709	138	5	2	CARDINAL
app01-6709	138	6	2.1	CARDINAL
app01-6709	138	7	2.2	CARDINAL
app01-6709	138	8	4	CARDINAL