id	sid	tid	token	lemma	pos
app01-10348	1	1	acta	acta	PROPN
app01-10348	1	2	polytechnica	polytechnica	PROPN
app01-10348	1	3	ctu	ctu	PROPN
app01-10348	1	4	proceedings	proceeding	NOUN
app01-10348	1	5	https://doi.org/10.14311/app.2024.50.0074	https://doi.org/10.14311/app.2024.50.0074	PROPN
app01-10348	1	6	acta	acta	PROPN
app01-10348	1	7	polytechnica	polytechnica	PROPN
app01-10348	1	8	ctu	ctu	PROPN
app01-10348	1	9	proceedings	proceeding	NOUN
app01-10348	1	10	50:74–80	50:74–80	PROPN
app01-10348	1	11	,	,	PUNCT
app01-10348	1	12	2024	2024	NUM
app01-10348	1	13	©	©	ADP
app01-10348	1	14	2024	2024	NUM
app01-10348	1	15	the	the	DET
app01-10348	1	16	author(s	author(s	NOUN
app01-10348	1	17	)	)	PUNCT
app01-10348	1	18	.	.	PUNCT
app01-10348	2	1	licensed	license	VERB
app01-10348	2	2	under	under	ADP
app01-10348	2	3	a	a	DET
app01-10348	2	4	cc	cc	NOUN
app01-10348	2	5	-	-	PUNCT
app01-10348	2	6	by	by	ADP
app01-10348	2	7	4.0	4.0	NUM
app01-10348	2	8	licence	licence	NOUN
app01-10348	2	9	published	publish	VERB
app01-10348	2	10	by	by	ADP
app01-10348	2	11	the	the	DET
app01-10348	2	12	czech	czech	PROPN
app01-10348	2	13	technical	technical	PROPN
app01-10348	2	14	university	university	PROPN
app01-10348	2	15	in	in	ADP
app01-10348	2	16	prague	prague	PROPN
app01-10348	2	17	understanding	understand	VERB
app01-10348	2	18	intrinsic	intrinsic	ADJ
app01-10348	2	19	stress	stress	NOUN
app01-10348	2	20	effects	effect	NOUN
app01-10348	2	21	on	on	ADP
app01-10348	2	22	vibrational	vibrational	ADJ
app01-10348	2	23	response	response	NOUN
app01-10348	2	24	of	of	ADP
app01-10348	2	25	silicon	silicon	NOUN
app01-10348	2	26	nanowires	nanowire	NOUN
app01-10348	2	27	sina	sina	PROPN
app01-10348	2	28	zare	zare	PROPN
app01-10348	2	29	pakzada	pakzada	PROPN
app01-10348	2	30	,	,	PUNCT
app01-10348	2	31	b	b	PROPN
app01-10348	2	32	,	,	PUNCT
app01-10348	2	33	c	c	PROPN
app01-10348	2	34	,	,	PUNCT
app01-10348	2	35	muhammad	muhammad	PROPN
app01-10348	2	36	muzammild	muzammild	PROPN
app01-10348	2	37	,	,	PUNCT
app01-10348	2	38	mehdi	mehdi	PROPN
app01-10348	2	39	bostan	bostan	PROPN
app01-10348	2	40	shirina	shirina	PROPN
app01-10348	2	41	,	,	PUNCT
app01-10348	2	42	basit	basit	PROPN
app01-10348	2	43	alia	alia	PROPN
app01-10348	2	44	,	,	PUNCT
app01-10348	2	45	semih	semih	PROPN
app01-10348	2	46	berk	berk	PROPN
app01-10348	2	47	cobana	cobana	PROPN
app01-10348	2	48	,	,	PUNCT
app01-10348	2	49	ege	ege	PROPN
app01-10348	2	50	nacarkucuka	nacarkucuka	PROPN
app01-10348	2	51	,	,	PUNCT
app01-10348	2	52	umut	umut	PROPN
app01-10348	2	53	kerimzadea	kerimzadea	PROPN
app01-10348	2	54	,	,	PUNCT
app01-10348	2	55	e	e	NOUN
app01-10348	2	56	,	,	PUNCT
app01-10348	2	57	burhanettin	burhanettin	ADJ
app01-10348	2	58	erdem	erdem	NOUN
app01-10348	2	59	alacaa	alacaa	NOUN
app01-10348	2	60	,	,	PUNCT
app01-10348	2	61	e	e	NOUN
app01-10348	2	62	,	,	PUNCT
app01-10348	2	63	f,∗	f,∗	PROPN
app01-10348	2	64	a	a	DET
app01-10348	2	65	koç	koç	PROPN
app01-10348	2	66	university	university	PROPN
app01-10348	2	67	,	,	PUNCT
app01-10348	2	68	department	department	NOUN
app01-10348	2	69	of	of	ADP
app01-10348	2	70	mechanical	mechanical	ADJ
app01-10348	2	71	engineering	engineering	NOUN
app01-10348	2	72	,	,	PUNCT
app01-10348	2	73	34450	34450	NUM
app01-10348	2	74	istanbul	istanbul	PROPN
app01-10348	2	75	,	,	PUNCT
app01-10348	2	76	turkey	turkey	PROPN
app01-10348	2	77	b	b	PROPN
app01-10348	2	78	technische	technische	PROPN
app01-10348	2	79	universität	universität	PROPN
app01-10348	2	80	wien	wien	PROPN
app01-10348	2	81	,	,	PUNCT
app01-10348	2	82	institute	institute	NOUN
app01-10348	2	83	of	of	ADP
app01-10348	2	84	sensor	sensor	NOUN
app01-10348	2	85	and	and	CCONJ
app01-10348	2	86	actuator	actuator	NOUN
app01-10348	2	87	systems	system	NOUN
app01-10348	2	88	,	,	PUNCT
app01-10348	2	89	gusshausstrasse	gusshausstrasse	NOUN
app01-10348	2	90	27	27	NUM
app01-10348	2	91	-	-	SYM
app01-10348	2	92	29	29	NUM
app01-10348	2	93	,	,	PUNCT
app01-10348	2	94	1040	1040	NUM
app01-10348	2	95	vienna	vienna	NOUN
app01-10348	2	96	,	,	PUNCT
app01-10348	2	97	austria	austria	PROPN
app01-10348	2	98	c	c	PROPN
app01-10348	2	99	technische	technische	PROPN
app01-10348	2	100	universität	universität	PROPN
app01-10348	2	101	wien	wien	PROPN
app01-10348	2	102	,	,	PUNCT
app01-10348	2	103	institute	institute	NOUN
app01-10348	2	104	of	of	ADP
app01-10348	2	105	sensor	sensor	NOUN
app01-10348	2	106	and	and	CCONJ
app01-10348	2	107	actuator	actuator	NOUN
app01-10348	2	108	systems	system	NOUN
app01-10348	2	109	,	,	PUNCT
app01-10348	2	110	christian	christian	ADJ
app01-10348	2	111	doppler	doppler	NOUN
app01-10348	2	112	laboratory	laboratory	NOUN
app01-10348	2	113	for	for	ADP
app01-10348	2	114	piezoelectric	piezoelectric	ADJ
app01-10348	2	115	silicon	silicon	NOUN
app01-10348	2	116	mems	mem	NOUN
app01-10348	2	117	with	with	ADP
app01-10348	2	118	enhanced	enhanced	ADJ
app01-10348	2	119	sensitivity	sensitivity	NOUN
app01-10348	2	120	and	and	CCONJ
app01-10348	2	121	responsivity	responsivity	NOUN
app01-10348	2	122	,	,	PUNCT
app01-10348	2	123	a-1040	a-1040	PUNCT
app01-10348	2	124	vienna	vienna	NOUN
app01-10348	2	125	,	,	PUNCT
app01-10348	2	126	austria	austria	PROPN
app01-10348	2	127	d	d	PROPN
app01-10348	2	128	koç	koç	PROPN
app01-10348	2	129	university	university	NOUN
app01-10348	2	130	,	,	PUNCT
app01-10348	2	131	computational	computational	ADJ
app01-10348	2	132	sciences	science	NOUN
app01-10348	2	133	and	and	CCONJ
app01-10348	2	134	engineering	engineering	NOUN
app01-10348	2	135	program	program	NOUN
app01-10348	2	136	,	,	PUNCT
app01-10348	2	137	34450	34450	NUM
app01-10348	2	138	istanbul	istanbul	PROPN
app01-10348	2	139	,	,	PUNCT
app01-10348	2	140	turkey	turkey	PROPN
app01-10348	2	141	e	e	PROPN
app01-10348	2	142	koç	koç	PROPN
app01-10348	2	143	university	university	NOUN
app01-10348	2	144	,	,	PUNCT
app01-10348	2	145	n2star	n2star	ADJ
app01-10348	2	146	-	-	PUNCT
app01-10348	2	147	koç	koç	NOUN
app01-10348	2	148	university	university	PROPN
app01-10348	2	149	nanofabrication	nanofabrication	NOUN
app01-10348	2	150	and	and	CCONJ
app01-10348	2	151	nanocharacterization	nanocharacterization	NOUN
app01-10348	2	152	center	center	NOUN
app01-10348	2	153	for	for	ADP
app01-10348	2	154	scientific	scientific	ADJ
app01-10348	2	155	and	and	CCONJ
app01-10348	2	156	technological	technological	ADJ
app01-10348	2	157	advanced	advanced	ADJ
app01-10348	2	158	research	research	NOUN
app01-10348	2	159	,	,	PUNCT
app01-10348	2	160	34450	34450	NUM
app01-10348	2	161	istanbul	istanbul	PROPN
app01-10348	2	162	,	,	PUNCT
app01-10348	2	163	turkey	turkey	PROPN
app01-10348	2	164	f	f	PROPN
app01-10348	2	165	koç	koç	PROPN
app01-10348	2	166	university	university	PROPN
app01-10348	2	167	,	,	PUNCT
app01-10348	2	168	surface	surface	NOUN
app01-10348	2	169	technologies	technology	NOUN
app01-10348	2	170	research	research	NOUN
app01-10348	2	171	center	center	NOUN
app01-10348	2	172	(	(	PUNCT
app01-10348	2	173	kuytam	kuytam	NOUN
app01-10348	2	174	)	)	PUNCT
app01-10348	2	175	,	,	PUNCT
app01-10348	2	176	34450	34450	NUM
app01-10348	2	177	istanbul	istanbul	PROPN
app01-10348	2	178	,	,	PUNCT
app01-10348	2	179	turkey	turkey	NOUN
app01-10348	2	180	∗	∗	NOUN
app01-10348	2	181	corresponding	correspond	VERB
app01-10348	2	182	author	author	NOUN
app01-10348	2	183	:	:	PUNCT
app01-10348	2	184	ealaca@ku.edu.tr	ealaca@ku.edu.tr	PROPN
app01-10348	2	185	abstract	abstract	NOUN
app01-10348	2	186	.	.	PUNCT
app01-10348	3	1	silicon	silicon	NOUN
app01-10348	3	2	nanowires	nanowire	NOUN
app01-10348	3	3	have	have	AUX
app01-10348	3	4	become	become	VERB
app01-10348	3	5	integral	integral	ADJ
app01-10348	3	6	components	component	NOUN
app01-10348	3	7	in	in	ADP
app01-10348	3	8	nanoelectromechanical	nanoelectromechanical	ADJ
app01-10348	3	9	systems	system	NOUN
app01-10348	3	10	and	and	CCONJ
app01-10348	3	11	nanoelectronics	nanoelectronic	NOUN
app01-10348	3	12	.	.	PUNCT
app01-10348	4	1	this	this	DET
app01-10348	4	2	article	article	NOUN
app01-10348	4	3	explores	explore	VERB
app01-10348	4	4	the	the	DET
app01-10348	4	5	intricate	intricate	ADJ
app01-10348	4	6	relationship	relationship	NOUN
app01-10348	4	7	between	between	ADP
app01-10348	4	8	intrinsic	intrinsic	ADJ
app01-10348	4	9	stress	stress	NOUN
app01-10348	4	10	and	and	CCONJ
app01-10348	4	11	mechanical	mechanical	ADJ
app01-10348	4	12	behavior	behavior	NOUN
app01-10348	4	13	in	in	ADP
app01-10348	4	14	silicon	silicon	NOUN
app01-10348	4	15	nanowires	nanowire	NOUN
app01-10348	4	16	.	.	PUNCT
app01-10348	5	1	utilizing	utilize	VERB
app01-10348	5	2	a	a	DET
app01-10348	5	3	comprehensive	comprehensive	ADJ
app01-10348	5	4	approach	approach	NOUN
app01-10348	5	5	involving	involve	VERB
app01-10348	5	6	raman	raman	NOUN
app01-10348	5	7	characterization	characterization	NOUN
app01-10348	5	8	,	,	PUNCT
app01-10348	5	9	resonance	resonance	NOUN
app01-10348	5	10	testing	testing	NOUN
app01-10348	5	11	,	,	PUNCT
app01-10348	5	12	and	and	CCONJ
app01-10348	5	13	thermal	thermal	ADJ
app01-10348	5	14	processing	processing	NOUN
app01-10348	5	15	,	,	PUNCT
app01-10348	5	16	the	the	DET
app01-10348	5	17	study	study	NOUN
app01-10348	5	18	investigates	investigate	VERB
app01-10348	5	19	the	the	DET
app01-10348	5	20	induced	induced	ADJ
app01-10348	5	21	intrinsic	intrinsic	ADJ
app01-10348	5	22	stresses	stress	NOUN
app01-10348	5	23	within	within	ADP
app01-10348	5	24	silicon	silicon	NOUN
app01-10348	5	25	nanowires	nanowire	NOUN
app01-10348	5	26	.	.	PUNCT
app01-10348	6	1	the	the	DET
app01-10348	6	2	findings	finding	NOUN
app01-10348	6	3	reveal	reveal	VERB
app01-10348	6	4	the	the	DET
app01-10348	6	5	introduction	introduction	NOUN
app01-10348	6	6	of	of	ADP
app01-10348	6	7	1.4gpa	1.4gpa	NUM
app01-10348	6	8	of	of	ADP
app01-10348	6	9	intrinsic	intrinsic	ADJ
app01-10348	6	10	stress	stress	NOUN
app01-10348	6	11	and	and	CCONJ
app01-10348	6	12	a	a	DET
app01-10348	6	13	1.3mhz	1.3mhz	NUM
app01-10348	6	14	frequency	frequency	NOUN
app01-10348	6	15	shift	shift	NOUN
app01-10348	6	16	to	to	ADP
app01-10348	6	17	silicon	silicon	NOUN
app01-10348	6	18	nanowire	nanowire	NOUN
app01-10348	6	19	through	through	ADP
app01-10348	6	20	thermal	thermal	ADJ
app01-10348	6	21	processing	processing	NOUN
app01-10348	6	22	.	.	PUNCT
app01-10348	7	1	these	these	DET
app01-10348	7	2	results	result	NOUN
app01-10348	7	3	underscore	underscore	VERB
app01-10348	7	4	the	the	DET
app01-10348	7	5	importance	importance	NOUN
app01-10348	7	6	of	of	ADP
app01-10348	7	7	understanding	understanding	NOUN
app01-10348	7	8	and	and	CCONJ
app01-10348	7	9	utilizing	utilize	VERB
app01-10348	7	10	intrinsic	intrinsic	ADJ
app01-10348	7	11	stresses	stress	NOUN
app01-10348	7	12	in	in	ADP
app01-10348	7	13	silicon	silicon	NOUN
app01-10348	7	14	nanowires	nanowire	NOUN
app01-10348	7	15	for	for	ADP
app01-10348	7	16	the	the	DET
app01-10348	7	17	advancement	advancement	NOUN
app01-10348	7	18	of	of	ADP
app01-10348	7	19	nextgeneration	nextgeneration	NOUN
app01-10348	7	20	nanoelectromechanical	nanoelectromechanical	ADJ
app01-10348	7	21	systems	system	NOUN
app01-10348	7	22	.	.	PUNCT
app01-10348	8	1	overall	overall	ADV
app01-10348	8	2	,	,	PUNCT
app01-10348	8	3	this	this	DET
app01-10348	8	4	article	article	NOUN
app01-10348	8	5	contributes	contribute	VERB
app01-10348	8	6	to	to	ADP
app01-10348	8	7	the	the	DET
app01-10348	8	8	ongoing	ongoing	ADJ
app01-10348	8	9	efforts	effort	NOUN
app01-10348	8	10	aimed	aim	VERB
app01-10348	8	11	at	at	ADP
app01-10348	8	12	fully	fully	ADV
app01-10348	8	13	realizing	realize	VERB
app01-10348	8	14	the	the	DET
app01-10348	8	15	potential	potential	NOUN
app01-10348	8	16	of	of	ADP
app01-10348	8	17	silicon	silicon	NOUN
app01-10348	8	18	nanowires	nanowire	NOUN
app01-10348	8	19	in	in	ADP
app01-10348	8	20	various	various	ADJ
app01-10348	8	21	scientific	scientific	ADJ
app01-10348	8	22	and	and	CCONJ
app01-10348	8	23	technological	technological	ADJ
app01-10348	8	24	domains	domain	NOUN
app01-10348	8	25	.	.	PUNCT
app01-10348	9	1	keywords	keyword	NOUN
app01-10348	9	2	:	:	PUNCT
app01-10348	9	3	silicon	silicon	NOUN
app01-10348	9	4	,	,	PUNCT
app01-10348	9	5	nanowire	nanowire	NOUN
app01-10348	9	6	,	,	PUNCT
app01-10348	9	7	resonance	resonance	NOUN
app01-10348	9	8	testing	testing	NOUN
app01-10348	9	9	,	,	PUNCT
app01-10348	9	10	raman	raman	NOUN
app01-10348	9	11	characterization	characterization	NOUN
app01-10348	9	12	,	,	PUNCT
app01-10348	9	13	intrinsic	intrinsic	ADJ
app01-10348	9	14	stress	stress	NOUN
app01-10348	9	15	.	.	PUNCT
app01-10348	10	1	1	1	X
app01-10348	10	2	.	.	X
app01-10348	10	3	introduction	introduction	NOUN
app01-10348	10	4	silicon	silicon	NOUN
app01-10348	10	5	nanowires	nanowire	NOUN
app01-10348	10	6	(	(	PUNCT
app01-10348	10	7	si	si	X
app01-10348	10	8	nws	nws	PROPN
app01-10348	10	9	)	)	PUNCT
app01-10348	10	10	serve	serve	VERB
app01-10348	10	11	as	as	ADP
app01-10348	10	12	fundamental	fundamental	ADJ
app01-10348	10	13	components	component	NOUN
app01-10348	10	14	in	in	ADP
app01-10348	10	15	the	the	DET
app01-10348	10	16	integration	integration	NOUN
app01-10348	10	17	of	of	ADP
app01-10348	10	18	microelectromechanical	microelectromechanical	ADJ
app01-10348	10	19	systems	system	NOUN
app01-10348	10	20	(	(	PUNCT
app01-10348	10	21	mems	mem	NOUN
app01-10348	10	22	)	)	PUNCT
app01-10348	10	23	and	and	CCONJ
app01-10348	10	24	nanoelectromechanical	nanoelectromechanical	ADJ
app01-10348	10	25	systems	system	NOUN
app01-10348	10	26	(	(	PUNCT
app01-10348	10	27	nems	nem	NOUN
app01-10348	10	28	)	)	PUNCT
app01-10348	10	29	,	,	PUNCT
app01-10348	10	30	playing	play	VERB
app01-10348	10	31	a	a	DET
app01-10348	10	32	pivotal	pivotal	ADJ
app01-10348	10	33	role	role	NOUN
app01-10348	10	34	in	in	ADP
app01-10348	10	35	next	next	ADJ
app01-10348	10	36	-	-	PUNCT
app01-10348	10	37	generation	generation	NOUN
app01-10348	10	38	electronics	electronic	NOUN
app01-10348	10	39	,	,	PUNCT
app01-10348	10	40	energy	energy	NOUN
app01-10348	10	41	applications	application	NOUN
app01-10348	10	42	,	,	PUNCT
app01-10348	10	43	and	and	CCONJ
app01-10348	10	44	ultra	ultra	ADJ
app01-10348	10	45	-	-	ADJ
app01-10348	10	46	sensitive	sensitive	ADJ
app01-10348	10	47	sensors	sensor	NOUN
app01-10348	10	48	[	[	X
app01-10348	10	49	1–3	1–3	NOUN
app01-10348	10	50	]	]	X
app01-10348	10	51	.	.	PUNCT
app01-10348	11	1	with	with	ADP
app01-10348	11	2	their	their	PRON
app01-10348	11	3	unique	unique	ADJ
app01-10348	11	4	properties	property	NOUN
app01-10348	11	5	and	and	CCONJ
app01-10348	11	6	the	the	DET
app01-10348	11	7	inherent	inherent	ADJ
app01-10348	11	8	piezoresistivity	piezoresistivity	NOUN
app01-10348	11	9	,	,	PUNCT
app01-10348	11	10	si	si	PROPN
app01-10348	11	11	nws	nws	PROPN
app01-10348	11	12	exhibit	exhibit	VERB
app01-10348	11	13	remarkable	remarkable	ADJ
app01-10348	11	14	potential	potential	NOUN
app01-10348	11	15	across	across	ADP
app01-10348	11	16	various	various	ADJ
app01-10348	11	17	domains	domain	NOUN
app01-10348	11	18	,	,	PUNCT
app01-10348	11	19	bridging	bridge	VERB
app01-10348	11	20	fundamental	fundamental	ADJ
app01-10348	11	21	scientific	scientific	ADJ
app01-10348	11	22	exploration	exploration	NOUN
app01-10348	11	23	with	with	ADP
app01-10348	11	24	potential	potential	ADJ
app01-10348	11	25	industrial	industrial	ADJ
app01-10348	11	26	applications	application	NOUN
app01-10348	11	27	[	[	X
app01-10348	11	28	4	4	NUM
app01-10348	11	29	,	,	PUNCT
app01-10348	11	30	5	5	NUM
app01-10348	11	31	]	]	PUNCT
app01-10348	11	32	.	.	PUNCT
app01-10348	12	1	consequently	consequently	ADV
app01-10348	12	2	,	,	PUNCT
app01-10348	12	3	a	a	DET
app01-10348	12	4	thorough	thorough	ADJ
app01-10348	12	5	understanding	understanding	NOUN
app01-10348	12	6	of	of	ADP
app01-10348	12	7	the	the	DET
app01-10348	12	8	fundamentals	fundamental	NOUN
app01-10348	12	9	and	and	CCONJ
app01-10348	12	10	properties	property	NOUN
app01-10348	12	11	of	of	ADP
app01-10348	12	12	si	si	PROPN
app01-10348	12	13	nws	nws	PROPN
app01-10348	12	14	is	be	AUX
app01-10348	12	15	important	important	ADJ
app01-10348	12	16	[	[	X
app01-10348	12	17	6	6	NUM
app01-10348	12	18	,	,	PUNCT
app01-10348	12	19	7	7	NUM
app01-10348	12	20	]	]	PUNCT
app01-10348	12	21	.	.	PUNCT
app01-10348	13	1	the	the	DET
app01-10348	13	2	challenges	challenge	NOUN
app01-10348	13	3	associated	associate	VERB
app01-10348	13	4	with	with	ADP
app01-10348	13	5	comprehending	comprehend	VERB
app01-10348	13	6	the	the	DET
app01-10348	13	7	mechanical	mechanical	ADJ
app01-10348	13	8	behavior	behavior	NOUN
app01-10348	13	9	of	of	ADP
app01-10348	13	10	si	si	PROPN
app01-10348	13	11	nws	nws	PROPN
app01-10348	13	12	underscore	underscore	VERB
app01-10348	13	13	the	the	DET
app01-10348	13	14	need	need	NOUN
app01-10348	13	15	for	for	ADP
app01-10348	13	16	a	a	DET
app01-10348	13	17	reliable	reliable	ADJ
app01-10348	13	18	testing	testing	NOUN
app01-10348	13	19	method	method	NOUN
app01-10348	13	20	applicable	applicable	ADJ
app01-10348	13	21	to	to	ADP
app01-10348	13	22	si	si	PROPN
app01-10348	13	23	nws	nws	PROPN
app01-10348	13	24	,	,	PUNCT
app01-10348	13	25	considering	consider	VERB
app01-10348	13	26	the	the	DET
app01-10348	13	27	complexities	complexity	NOUN
app01-10348	13	28	involved	involve	VERB
app01-10348	13	29	in	in	ADP
app01-10348	13	30	their	their	PRON
app01-10348	13	31	fabrication	fabrication	NOUN
app01-10348	13	32	,	,	PUNCT
app01-10348	13	33	testing	testing	NOUN
app01-10348	13	34	,	,	PUNCT
app01-10348	13	35	and	and	CCONJ
app01-10348	13	36	characterization	characterization	NOUN
app01-10348	13	37	[	[	X
app01-10348	13	38	4	4	NUM
app01-10348	13	39	,	,	PUNCT
app01-10348	13	40	8–12	8–12	PROPN
app01-10348	13	41	]	]	PUNCT
app01-10348	13	42	.	.	PUNCT
app01-10348	14	1	resonance	resonance	NOUN
app01-10348	14	2	testing	testing	NOUN
app01-10348	14	3	,	,	PUNCT
app01-10348	14	4	owing	owe	VERB
app01-10348	14	5	to	to	ADP
app01-10348	14	6	its	its	PRON
app01-10348	14	7	simplicity	simplicity	NOUN
app01-10348	14	8	and	and	CCONJ
app01-10348	14	9	successful	successful	ADJ
app01-10348	14	10	outcomes	outcome	NOUN
app01-10348	14	11	,	,	PUNCT
app01-10348	14	12	is	be	AUX
app01-10348	14	13	commonly	commonly	ADV
app01-10348	14	14	employed	employ	VERB
app01-10348	14	15	to	to	PART
app01-10348	14	16	acquire	acquire	VERB
app01-10348	14	17	vibration	vibration	NOUN
app01-10348	14	18	modes	mode	NOUN
app01-10348	14	19	and	and	CCONJ
app01-10348	14	20	subsequently	subsequently	ADV
app01-10348	14	21	obtain	obtain	VERB
app01-10348	14	22	mechanical	mechanical	ADJ
app01-10348	14	23	properties	property	NOUN
app01-10348	14	24	[	[	X
app01-10348	14	25	8	8	NUM
app01-10348	14	26	,	,	PUNCT
app01-10348	14	27	13	13	NUM
app01-10348	14	28	]	]	PUNCT
app01-10348	14	29	.	.	PUNCT
app01-10348	15	1	from	from	ADP
app01-10348	15	2	a	a	DET
app01-10348	15	3	modeling	modeling	NOUN
app01-10348	15	4	perspective	perspective	NOUN
app01-10348	15	5	,	,	PUNCT
app01-10348	15	6	atomistic	atomistic	ADJ
app01-10348	15	7	simulations	simulation	NOUN
app01-10348	15	8	also	also	ADV
app01-10348	15	9	offer	offer	VERB
app01-10348	15	10	a	a	DET
app01-10348	15	11	reliable	reliable	ADJ
app01-10348	15	12	approach	approach	NOUN
app01-10348	15	13	for	for	ADP
app01-10348	15	14	validating	validate	VERB
app01-10348	15	15	or	or	CCONJ
app01-10348	15	16	examining	examine	VERB
app01-10348	15	17	the	the	DET
app01-10348	15	18	intrinsic	intrinsic	ADJ
app01-10348	15	19	effects	effect	NOUN
app01-10348	15	20	in	in	ADP
app01-10348	15	21	si	si	PROPN
app01-10348	15	22	nws	nws	PROPN
app01-10348	16	1	[	[	X
app01-10348	16	2	6	6	NUM
app01-10348	16	3	,	,	PUNCT
app01-10348	16	4	14	14	NUM
app01-10348	16	5	]	]	PUNCT
app01-10348	16	6	.	.	PUNCT
app01-10348	17	1	exploring	explore	VERB
app01-10348	17	2	the	the	DET
app01-10348	17	3	mechanics	mechanic	NOUN
app01-10348	17	4	of	of	ADP
app01-10348	17	5	si	si	PROPN
app01-10348	17	6	nws	nws	PROPN
app01-10348	17	7	offers	offer	VERB
app01-10348	17	8	an	an	DET
app01-10348	17	9	inclusive	inclusive	ADJ
app01-10348	17	10	approach	approach	NOUN
app01-10348	17	11	to	to	ADP
app01-10348	17	12	material	material	NOUN
app01-10348	17	13	testing	testing	NOUN
app01-10348	17	14	,	,	PUNCT
app01-10348	17	15	providing	provide	VERB
app01-10348	17	16	substantial	substantial	ADJ
app01-10348	17	17	advantages	advantage	NOUN
app01-10348	17	18	in	in	ADP
app01-10348	17	19	bridging	bridge	VERB
app01-10348	17	20	the	the	DET
app01-10348	17	21	gap	gap	NOUN
app01-10348	17	22	between	between	ADP
app01-10348	17	23	theoretical	theoretical	ADJ
app01-10348	17	24	methods	method	NOUN
app01-10348	17	25	and	and	CCONJ
app01-10348	17	26	property	property	NOUN
app01-10348	17	27	assessments	assessment	NOUN
app01-10348	17	28	[	[	X
app01-10348	17	29	6	6	NUM
app01-10348	17	30	,	,	PUNCT
app01-10348	17	31	7	7	NUM
app01-10348	17	32	,	,	PUNCT
app01-10348	17	33	15–17	15–17	NUM
app01-10348	17	34	]	]	PUNCT
app01-10348	17	35	.	.	PUNCT
app01-10348	18	1	additionally	additionally	ADV
app01-10348	18	2	,	,	PUNCT
app01-10348	18	3	by	by	ADP
app01-10348	18	4	reducing	reduce	VERB
app01-10348	18	5	the	the	DET
app01-10348	18	6	challenges	challenge	NOUN
app01-10348	18	7	associated	associate	VERB
app01-10348	18	8	with	with	ADP
app01-10348	18	9	full	full	ADJ
app01-10348	18	10	-	-	PUNCT
app01-10348	18	11	scale	scale	NOUN
app01-10348	18	12	processing	processing	NOUN
app01-10348	18	13	,	,	PUNCT
app01-10348	18	14	it	it	PRON
app01-10348	18	15	becomes	become	VERB
app01-10348	18	16	feasible	feasible	ADJ
app01-10348	18	17	to	to	PART
app01-10348	18	18	seamlessly	seamlessly	ADV
app01-10348	18	19	integrate	integrate	VERB
app01-10348	18	20	materials	material	NOUN
app01-10348	18	21	characterization	characterization	NOUN
app01-10348	18	22	and	and	CCONJ
app01-10348	18	23	property	property	NOUN
app01-10348	18	24	measurement	measurement	NOUN
app01-10348	19	1	[	[	X
app01-10348	19	2	11	11	NUM
app01-10348	19	3	]	]	PUNCT
app01-10348	19	4	.	.	PUNCT
app01-10348	20	1	in	in	ADP
app01-10348	20	2	this	this	DET
app01-10348	20	3	context	context	NOUN
app01-10348	20	4	,	,	PUNCT
app01-10348	20	5	the	the	DET
app01-10348	20	6	utilization	utilization	NOUN
app01-10348	20	7	of	of	ADP
app01-10348	20	8	high	high	ADJ
app01-10348	20	9	-	-	PUNCT
app01-10348	20	10	throughput	throughput	NOUN
app01-10348	20	11	and	and	CCONJ
app01-10348	20	12	automated	automate	VERB
app01-10348	20	13	[	[	X
app01-10348	20	14	7	7	NUM
app01-10348	20	15	,	,	PUNCT
app01-10348	20	16	18	18	NUM
app01-10348	20	17	,	,	PUNCT
app01-10348	20	18	19	19	NUM
app01-10348	20	19	]	]	PUNCT
app01-10348	20	20	testing	testing	NOUN
app01-10348	20	21	techniques	technique	NOUN
app01-10348	20	22	not	not	PART
app01-10348	20	23	only	only	ADV
app01-10348	20	24	facilitates	facilitate	VERB
app01-10348	20	25	comprehensive	comprehensive	ADJ
app01-10348	20	26	data	datum	NOUN
app01-10348	20	27	collection	collection	NOUN
app01-10348	20	28	but	but	CCONJ
app01-10348	20	29	also	also	ADV
app01-10348	20	30	reveals	reveal	VERB
app01-10348	20	31	deformation	deformation	NOUN
app01-10348	20	32	mechanisms	mechanism	NOUN
app01-10348	20	33	essential	essential	ADJ
app01-10348	20	34	for	for	ADP
app01-10348	20	35	understanding	understand	VERB
app01-10348	20	36	the	the	DET
app01-10348	20	37	overall	overall	ADJ
app01-10348	20	38	intrinsic	intrinsic	ADJ
app01-10348	20	39	properties	property	NOUN
app01-10348	20	40	of	of	ADP
app01-10348	20	41	si	si	PROPN
app01-10348	20	42	nws	nws	PROPN
app01-10348	21	1	[	[	X
app01-10348	21	2	11	11	NUM
app01-10348	21	3	]	]	PUNCT
app01-10348	21	4	.	.	PUNCT
app01-10348	22	1	although	although	SCONJ
app01-10348	22	2	conducting	conduct	VERB
app01-10348	22	3	bending	bending	NOUN
app01-10348	22	4	and	and	CCONJ
app01-10348	22	5	resonance	resonance	NOUN
app01-10348	22	6	tests	test	NOUN
app01-10348	22	7	presents	present	VERB
app01-10348	22	8	complex	complex	ADJ
app01-10348	22	9	experimental	experimental	ADJ
app01-10348	22	10	challenges	challenge	NOUN
app01-10348	22	11	[	[	X
app01-10348	22	12	6	6	NUM
app01-10348	22	13	,	,	PUNCT
app01-10348	22	14	15	15	NUM
app01-10348	22	15	,	,	PUNCT
app01-10348	22	16	20	20	NUM
app01-10348	22	17	]	]	PUNCT
app01-10348	22	18	,	,	PUNCT
app01-10348	22	19	the	the	DET
app01-10348	22	20	findings	finding	NOUN
app01-10348	22	21	hold	hold	VERB
app01-10348	22	22	the	the	DET
app01-10348	22	23	potential	potential	NOUN
app01-10348	22	24	to	to	PART
app01-10348	22	25	offer	offer	VERB
app01-10348	22	26	valuable	valuable	ADJ
app01-10348	22	27	insights	insight	NOUN
app01-10348	22	28	into	into	ADP
app01-10348	22	29	the	the	DET
app01-10348	22	30	intricacies	intricacy	NOUN
app01-10348	22	31	of	of	ADP
app01-10348	22	32	nanoand	nanoand	PROPN
app01-10348	22	33	micro	micro	ADJ
app01-10348	22	34	-	-	NOUN
app01-10348	22	35	scale	scale	ADJ
app01-10348	22	36	structures	structure	NOUN
app01-10348	22	37	,	,	PUNCT
app01-10348	22	38	highlighting	highlight	VERB
app01-10348	22	39	their	their	PRON
app01-10348	22	40	importance	importance	NOUN
app01-10348	22	41	as	as	ADP
app01-10348	22	42	subjects	subject	NOUN
app01-10348	22	43	of	of	ADP
app01-10348	22	44	study	study	NOUN
app01-10348	22	45	.	.	PUNCT
app01-10348	23	1	given	give	VERB
app01-10348	23	2	this	this	DET
app01-10348	23	3	perspective	perspective	NOUN
app01-10348	23	4	,	,	PUNCT
app01-10348	23	5	investigating	investigate	VERB
app01-10348	23	6	vibrational	vibrational	ADJ
app01-10348	23	7	testing	testing	NOUN
app01-10348	23	8	,	,	PUNCT
app01-10348	23	9	with	with	ADP
app01-10348	23	10	reference	reference	NOUN
app01-10348	23	11	to	to	ADP
app01-10348	23	12	successful	successful	ADJ
app01-10348	23	13	cases	case	NOUN
app01-10348	23	14	in	in	ADP
app01-10348	23	15	the	the	DET
app01-10348	23	16	literature	literature	NOUN
app01-10348	23	17	,	,	PUNCT
app01-10348	23	18	provides	provide	VERB
app01-10348	23	19	an	an	DET
app01-10348	23	20	opportunity	opportunity	NOUN
app01-10348	23	21	to	to	PART
app01-10348	23	22	analyze	analyze	VERB
app01-10348	23	23	fundamental	fundamental	ADJ
app01-10348	23	24	properties	property	NOUN
app01-10348	23	25	such	such	ADJ
app01-10348	23	26	as	as	ADP
app01-10348	23	27	modulus	modulus	NOUN
app01-10348	23	28	of	of	ADP
app01-10348	23	29	elasticity	elasticity	NOUN
app01-10348	23	30	of	of	ADP
app01-10348	23	31	si	si	PROPN
app01-10348	23	32	nws	nws	PROPN
app01-10348	23	33	[	[	X
app01-10348	23	34	4	4	NUM
app01-10348	23	35	,	,	PUNCT
app01-10348	23	36	16	16	NUM
app01-10348	23	37	,	,	PUNCT
app01-10348	23	38	17	17	NUM
app01-10348	23	39	,	,	PUNCT
app01-10348	23	40	21	21	NUM
app01-10348	23	41	,	,	PUNCT
app01-10348	23	42	22	22	NUM
app01-10348	23	43	]	]	PUNCT
app01-10348	23	44	.	.	PUNCT
app01-10348	24	1	it	it	PRON
app01-10348	24	2	also	also	ADV
app01-10348	24	3	facilitates	facilitate	VERB
app01-10348	24	4	comparisons	comparison	NOUN
app01-10348	24	5	of	of	ADP
app01-10348	24	6	external	external	ADJ
app01-10348	24	7	influences	influence	NOUN
app01-10348	24	8	,	,	PUNCT
app01-10348	24	9	such	such	ADJ
app01-10348	24	10	as	as	ADP
app01-10348	24	11	surface	surface	NOUN
app01-10348	24	12	treatments	treatment	NOUN
app01-10348	24	13	or	or	CCONJ
app01-10348	24	14	thermal	thermal	ADJ
app01-10348	24	15	processes	process	NOUN
app01-10348	24	16	,	,	PUNCT
app01-10348	24	17	involved	involve	VERB
app01-10348	24	18	in	in	ADP
app01-10348	24	19	the	the	DET
app01-10348	24	20	fabrication	fabrication	NOUN
app01-10348	24	21	or	or	CCONJ
app01-10348	24	22	assembly	assembly	NOUN
app01-10348	24	23	of	of	ADP
app01-10348	24	24	nano	nano	NOUN
app01-10348	24	25	-	-	PUNCT
app01-10348	24	26	scale	scale	NOUN
app01-10348	24	27	structures	structure	NOUN
app01-10348	24	28	,	,	PUNCT
app01-10348	24	29	particularly	particularly	ADV
app01-10348	24	30	si	si	PROPN
app01-10348	24	31	nws	nws	PROPN
app01-10348	24	32	within	within	ADP
app01-10348	24	33	the	the	DET
app01-10348	24	34	framework	framework	NOUN
app01-10348	24	35	of	of	ADP
app01-10348	24	36	this	this	DET
app01-10348	24	37	study	study	NOUN
app01-10348	24	38	[	[	X
app01-10348	24	39	23	23	NUM
app01-10348	24	40	]	]	PUNCT
app01-10348	24	41	.	.	PUNCT
app01-10348	25	1	74	74	NUM
app01-10348	25	2	https://doi.org/10.14311/app.2024.50.0074	https://doi.org/10.14311/app.2024.50.0074	PROPN
app01-10348	25	3	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
app01-10348	25	4	https://www.cvut.cz/en	https://www.cvut.cz/en	PROPN
app01-10348	25	5	vol	vol	NOUN
app01-10348	25	6	.	.	PUNCT
app01-10348	26	1	50/2024	50/2024	NUM
app01-10348	26	2	intrinsic	intrinsic	ADJ
app01-10348	26	3	stress	stress	NOUN
app01-10348	26	4	effects	effect	NOUN
app01-10348	26	5	on	on	ADP
app01-10348	26	6	vibrational	vibrational	ADJ
app01-10348	26	7	response	response	NOUN
app01-10348	26	8	of	of	ADP
app01-10348	26	9	si	si	PROPN
app01-10348	26	10	nws	nws	PROPN
app01-10348	26	11	understanding	understand	VERB
app01-10348	26	12	stress	stress	NOUN
app01-10348	26	13	generation	generation	NOUN
app01-10348	26	14	in	in	ADP
app01-10348	26	15	nanoand	nanoand	ADJ
app01-10348	26	16	microscale	microscale	ADJ
app01-10348	26	17	structures	structure	NOUN
app01-10348	26	18	is	be	AUX
app01-10348	26	19	crucial	crucial	ADJ
app01-10348	26	20	,	,	PUNCT
app01-10348	26	21	not	not	PART
app01-10348	26	22	just	just	ADV
app01-10348	26	23	from	from	ADP
app01-10348	26	24	a	a	DET
app01-10348	26	25	theoretical	theoretical	ADJ
app01-10348	26	26	standpoint	standpoint	NOUN
app01-10348	26	27	,	,	PUNCT
app01-10348	26	28	but	but	CCONJ
app01-10348	26	29	also	also	ADV
app01-10348	26	30	because	because	SCONJ
app01-10348	26	31	the	the	DET
app01-10348	26	32	functionality	functionality	NOUN
app01-10348	26	33	of	of	ADP
app01-10348	26	34	future	future	ADJ
app01-10348	26	35	mems	mem	NOUN
app01-10348	26	36	and	and	CCONJ
app01-10348	26	37	nems	nem	NOUN
app01-10348	26	38	relies	rely	VERB
app01-10348	26	39	on	on	ADP
app01-10348	26	40	comprehending	comprehend	VERB
app01-10348	26	41	the	the	DET
app01-10348	26	42	nature	nature	NOUN
app01-10348	26	43	and	and	CCONJ
app01-10348	26	44	intensity	intensity	NOUN
app01-10348	26	45	of	of	ADP
app01-10348	26	46	stresses	stress	NOUN
app01-10348	26	47	induced	induce	VERB
app01-10348	26	48	or	or	CCONJ
app01-10348	26	49	generated	generate	VERB
app01-10348	26	50	during	during	ADP
app01-10348	26	51	various	various	ADJ
app01-10348	26	52	fabrication	fabrication	NOUN
app01-10348	26	53	,	,	PUNCT
app01-10348	26	54	assembly	assembly	NOUN
app01-10348	26	55	,	,	PUNCT
app01-10348	26	56	testing	testing	NOUN
app01-10348	26	57	,	,	PUNCT
app01-10348	26	58	or	or	CCONJ
app01-10348	26	59	utilization	utilization	NOUN
app01-10348	26	60	stages	stage	NOUN
app01-10348	26	61	[	[	X
app01-10348	26	62	4	4	NUM
app01-10348	26	63	,	,	PUNCT
app01-10348	26	64	6	6	NUM
app01-10348	26	65	,	,	PUNCT
app01-10348	26	66	15	15	NUM
app01-10348	26	67	]	]	PUNCT
app01-10348	26	68	.	.	PUNCT
app01-10348	27	1	in	in	ADP
app01-10348	27	2	this	this	DET
app01-10348	27	3	context	context	NOUN
app01-10348	27	4	,	,	PUNCT
app01-10348	27	5	raman	raman	NOUN
app01-10348	27	6	spectroscopy	spectroscopy	NOUN
app01-10348	27	7	emerges	emerge	VERB
app01-10348	27	8	as	as	ADP
app01-10348	27	9	a	a	DET
app01-10348	27	10	widely	widely	ADV
app01-10348	27	11	employed	employ	VERB
app01-10348	27	12	technique	technique	NOUN
app01-10348	27	13	for	for	ADP
app01-10348	27	14	stress	stress	NOUN
app01-10348	27	15	measurement	measurement	NOUN
app01-10348	27	16	in	in	ADP
app01-10348	27	17	nws	nws	PROPN
app01-10348	27	18	,	,	PUNCT
app01-10348	27	19	particularly	particularly	ADV
app01-10348	27	20	in	in	ADP
app01-10348	27	21	studies	study	NOUN
app01-10348	27	22	focusing	focus	VERB
app01-10348	27	23	on	on	ADP
app01-10348	27	24	si	si	PROPN
app01-10348	27	25	[	[	X
app01-10348	27	26	24	24	NUM
app01-10348	27	27	]	]	PUNCT
app01-10348	27	28	.	.	PUNCT
app01-10348	28	1	raman	raman	NOUN
app01-10348	28	2	analyses	analysis	NOUN
app01-10348	28	3	have	have	AUX
app01-10348	28	4	shown	show	VERB
app01-10348	28	5	stresses	stress	NOUN
app01-10348	28	6	of	of	ADP
app01-10348	28	7	up	up	ADP
app01-10348	28	8	to	to	ADP
app01-10348	28	9	4gpa	4gpa	NOUN
app01-10348	28	10	and	and	CCONJ
app01-10348	28	11	1.2gpa	1.2gpa	NUM
app01-10348	28	12	for	for	ADP
app01-10348	28	13	highly	highly	ADV
app01-10348	28	14	strained	strained	ADJ
app01-10348	28	15	siliconon	siliconon	NOUN
app01-10348	28	16	-	-	PUNCT
app01-10348	28	17	insulator	insulator	NOUN
app01-10348	28	18	[	[	X
app01-10348	28	19	25	25	NUM
app01-10348	28	20	,	,	PUNCT
app01-10348	28	21	26	26	NUM
app01-10348	28	22	]	]	PUNCT
app01-10348	28	23	and	and	CCONJ
app01-10348	28	24	stress	stress	NOUN
app01-10348	28	25	-	-	PUNCT
app01-10348	28	26	free	free	ADJ
app01-10348	28	27	substrates	substrate	NOUN
app01-10348	28	28	[	[	X
app01-10348	28	29	6	6	NUM
app01-10348	28	30	,	,	PUNCT
app01-10348	28	31	14	14	NUM
app01-10348	28	32	,	,	PUNCT
app01-10348	28	33	15	15	NUM
app01-10348	28	34	]	]	PUNCT
app01-10348	28	35	,	,	PUNCT
app01-10348	28	36	respectively	respectively	ADV
app01-10348	28	37	.	.	PUNCT
app01-10348	29	1	this	this	PRON
app01-10348	29	2	emphasizes	emphasize	VERB
app01-10348	29	3	the	the	DET
app01-10348	29	4	necessity	necessity	NOUN
app01-10348	29	5	for	for	ADP
app01-10348	29	6	meticulous	meticulous	ADJ
app01-10348	29	7	examination	examination	NOUN
app01-10348	29	8	of	of	ADP
app01-10348	29	9	any	any	DET
app01-10348	29	10	external	external	ADJ
app01-10348	29	11	influences	influence	NOUN
app01-10348	29	12	,	,	PUNCT
app01-10348	29	13	whether	whether	SCONJ
app01-10348	29	14	preor	preor	NOUN
app01-10348	29	15	post	post	ADJ
app01-10348	29	16	-	-	ADJ
app01-10348	29	17	processing	processing	NOUN
app01-10348	29	18	,	,	PUNCT
app01-10348	29	19	given	give	VERB
app01-10348	29	20	the	the	DET
app01-10348	29	21	significant	significant	ADJ
app01-10348	29	22	impact	impact	NOUN
app01-10348	29	23	of	of	ADP
app01-10348	29	24	observed	observed	ADJ
app01-10348	29	25	stress	stress	NOUN
app01-10348	29	26	levels	level	NOUN
app01-10348	29	27	.	.	PUNCT
app01-10348	30	1	such	such	ADJ
app01-10348	30	2	scrutiny	scrutiny	NOUN
app01-10348	30	3	is	be	AUX
app01-10348	30	4	essential	essential	ADJ
app01-10348	30	5	,	,	PUNCT
app01-10348	30	6	as	as	SCONJ
app01-10348	30	7	these	these	DET
app01-10348	30	8	stresses	stress	NOUN
app01-10348	30	9	can	can	AUX
app01-10348	30	10	lead	lead	VERB
app01-10348	30	11	to	to	ADP
app01-10348	30	12	variations	variation	NOUN
app01-10348	30	13	of	of	ADP
app01-10348	30	14	up	up	ADP
app01-10348	30	15	to	to	ADP
app01-10348	30	16	85gpa	85gpa	NOUN
app01-10348	30	17	in	in	ADP
app01-10348	30	18	the	the	DET
app01-10348	30	19	elastic	elastic	ADJ
app01-10348	30	20	properties	property	NOUN
app01-10348	30	21	of	of	ADP
app01-10348	30	22	si	si	PROPN
app01-10348	30	23	nws	nws	PROPN
app01-10348	31	1	[	[	X
app01-10348	31	2	6	6	NUM
app01-10348	31	3	]	]	PUNCT
app01-10348	31	4	.	.	PUNCT
app01-10348	32	1	while	while	SCONJ
app01-10348	32	2	the	the	DET
app01-10348	32	3	resonance	resonance	NOUN
app01-10348	32	4	technique	technique	NOUN
app01-10348	32	5	facilitates	facilitate	VERB
app01-10348	32	6	controlled	control	VERB
app01-10348	32	7	testing	testing	NOUN
app01-10348	32	8	,	,	PUNCT
app01-10348	32	9	challenges	challenge	NOUN
app01-10348	32	10	arise	arise	VERB
app01-10348	32	11	in	in	ADP
app01-10348	32	12	the	the	DET
app01-10348	32	13	fabrication	fabrication	NOUN
app01-10348	32	14	of	of	ADP
app01-10348	32	15	samples	sample	NOUN
app01-10348	32	16	and	and	CCONJ
app01-10348	32	17	the	the	DET
app01-10348	32	18	operation	operation	NOUN
app01-10348	32	19	of	of	ADP
app01-10348	32	20	the	the	DET
app01-10348	32	21	devices	device	NOUN
app01-10348	32	22	under	under	ADP
app01-10348	32	23	test	test	NOUN
app01-10348	32	24	(	(	PUNCT
app01-10348	32	25	duts	dut	NOUN
app01-10348	32	26	)	)	PUNCT
app01-10348	32	27	,	,	PUNCT
app01-10348	32	28	leading	lead	VERB
app01-10348	32	29	to	to	ADP
app01-10348	32	30	a	a	DET
app01-10348	32	31	reduction	reduction	NOUN
app01-10348	32	32	in	in	ADP
app01-10348	32	33	overall	overall	ADJ
app01-10348	32	34	testing	testing	NOUN
app01-10348	32	35	throughput	throughput	NOUN
app01-10348	32	36	.	.	PUNCT
app01-10348	33	1	recent	recent	ADJ
app01-10348	33	2	studies	study	NOUN
app01-10348	33	3	suggest	suggest	VERB
app01-10348	33	4	the	the	DET
app01-10348	33	5	potential	potential	NOUN
app01-10348	33	6	for	for	ADP
app01-10348	33	7	integrating	integrate	VERB
app01-10348	33	8	fabrication	fabrication	NOUN
app01-10348	33	9	and	and	CCONJ
app01-10348	33	10	testing	testing	NOUN
app01-10348	33	11	methodologies	methodology	NOUN
app01-10348	33	12	meticulously	meticulously	ADV
app01-10348	33	13	,	,	PUNCT
app01-10348	33	14	allowing	allow	VERB
app01-10348	33	15	for	for	ADP
app01-10348	33	16	the	the	DET
app01-10348	33	17	acquisition	acquisition	NOUN
app01-10348	33	18	of	of	ADP
app01-10348	33	19	numerous	numerous	ADJ
app01-10348	33	20	testing	testing	NOUN
app01-10348	33	21	results	result	NOUN
app01-10348	33	22	for	for	ADP
app01-10348	33	23	si	si	PROPN
app01-10348	33	24	nws	nws	PROPN
app01-10348	33	25	fabricated	fabricate	VERB
app01-10348	33	26	within	within	ADP
app01-10348	33	27	a	a	DET
app01-10348	33	28	single	single	ADJ
app01-10348	33	29	substrate	substrate	NOUN
app01-10348	33	30	[	[	X
app01-10348	33	31	20	20	NUM
app01-10348	33	32	]	]	PUNCT
app01-10348	33	33	.	.	PUNCT
app01-10348	34	1	this	this	PRON
app01-10348	34	2	offers	offer	VERB
app01-10348	34	3	advantages	advantage	NOUN
app01-10348	34	4	for	for	ADP
app01-10348	34	5	statistical	statistical	ADJ
app01-10348	34	6	analysis	analysis	NOUN
app01-10348	34	7	and	and	CCONJ
app01-10348	34	8	the	the	DET
app01-10348	34	9	efficacy	efficacy	NOUN
app01-10348	34	10	of	of	ADP
app01-10348	34	11	the	the	DET
app01-10348	34	12	developed	develop	VERB
app01-10348	34	13	technique	technique	NOUN
app01-10348	34	14	[	[	X
app01-10348	34	15	20	20	NUM
app01-10348	34	16	]	]	PUNCT
app01-10348	34	17	.	.	PUNCT
app01-10348	35	1	nonetheless	nonetheless	ADV
app01-10348	35	2	,	,	PUNCT
app01-10348	35	3	further	further	ADJ
app01-10348	35	4	enhancements	enhancement	NOUN
app01-10348	35	5	to	to	ADP
app01-10348	35	6	testing	testing	NOUN
app01-10348	35	7	and	and	CCONJ
app01-10348	35	8	characterization	characterization	NOUN
app01-10348	35	9	methodologies	methodology	NOUN
app01-10348	35	10	necessitate	necessitate	ADJ
app01-10348	35	11	a	a	DET
app01-10348	35	12	more	more	ADV
app01-10348	35	13	systematic	systematic	ADJ
app01-10348	35	14	and	and	CCONJ
app01-10348	35	15	interconnected	interconnected	ADJ
app01-10348	35	16	approach	approach	NOUN
app01-10348	35	17	,	,	PUNCT
app01-10348	35	18	where	where	SCONJ
app01-10348	35	19	the	the	DET
app01-10348	35	20	introduction	introduction	NOUN
app01-10348	35	21	of	of	ADP
app01-10348	35	22	stresses	stress	NOUN
app01-10348	35	23	to	to	ADP
app01-10348	35	24	si	si	PROPN
app01-10348	35	25	nws	nws	PROPN
app01-10348	35	26	can	can	AUX
app01-10348	35	27	be	be	AUX
app01-10348	35	28	accurately	accurately	ADV
app01-10348	35	29	captured	capture	VERB
app01-10348	35	30	.	.	PUNCT
app01-10348	36	1	consequently	consequently	ADV
app01-10348	36	2	,	,	PUNCT
app01-10348	36	3	examining	examine	VERB
app01-10348	36	4	stresses	stress	NOUN
app01-10348	36	5	and	and	CCONJ
app01-10348	36	6	their	their	PRON
app01-10348	36	7	subsequent	subsequent	ADJ
app01-10348	36	8	effects	effect	NOUN
app01-10348	36	9	on	on	ADP
app01-10348	36	10	the	the	DET
app01-10348	36	11	mechanical	mechanical	ADJ
app01-10348	36	12	properties	property	NOUN
app01-10348	36	13	of	of	ADP
app01-10348	36	14	si	si	PROPN
app01-10348	36	15	nws	nws	PROPN
app01-10348	36	16	becomes	become	VERB
app01-10348	36	17	feasible	feasible	ADJ
app01-10348	36	18	from	from	ADP
app01-10348	36	19	both	both	CCONJ
app01-10348	36	20	theoretical	theoretical	ADJ
app01-10348	36	21	and	and	CCONJ
app01-10348	36	22	experimental	experimental	ADJ
app01-10348	36	23	perspectives	perspective	NOUN
app01-10348	36	24	.	.	PUNCT
app01-10348	37	1	the	the	DET
app01-10348	37	2	current	current	ADJ
app01-10348	37	3	investigation	investigation	NOUN
app01-10348	37	4	presents	present	VERB
app01-10348	37	5	a	a	DET
app01-10348	37	6	comprehensive	comprehensive	ADJ
app01-10348	37	7	methodology	methodology	NOUN
app01-10348	37	8	for	for	ADP
app01-10348	37	9	analyzing	analyze	VERB
app01-10348	37	10	stresses	stress	NOUN
app01-10348	37	11	induced	induce	VERB
app01-10348	37	12	in	in	ADP
app01-10348	37	13	si	si	PROPN
app01-10348	37	14	nws	nws	PROPN
app01-10348	37	15	through	through	ADP
app01-10348	37	16	a	a	DET
app01-10348	37	17	systematic	systematic	ADJ
app01-10348	37	18	,	,	PUNCT
app01-10348	37	19	interconnected	interconnected	ADJ
app01-10348	37	20	approach	approach	NOUN
app01-10348	37	21	involving	involve	VERB
app01-10348	37	22	thermal	thermal	ADJ
app01-10348	37	23	processes	process	NOUN
app01-10348	37	24	,	,	PUNCT
app01-10348	37	25	raman	raman	NOUN
app01-10348	37	26	characterization	characterization	NOUN
app01-10348	37	27	,	,	PUNCT
app01-10348	37	28	and	and	CCONJ
app01-10348	37	29	resonance	resonance	NOUN
app01-10348	37	30	testing	testing	NOUN
app01-10348	37	31	.	.	PUNCT
app01-10348	38	1	the	the	DET
app01-10348	38	2	main	main	ADJ
app01-10348	38	3	aim	aim	NOUN
app01-10348	38	4	is	be	AUX
app01-10348	38	5	to	to	PART
app01-10348	38	6	establish	establish	VERB
app01-10348	38	7	a	a	DET
app01-10348	38	8	linked	link	VERB
app01-10348	38	9	process	process	NOUN
app01-10348	38	10	for	for	ADP
app01-10348	38	11	testing	testing	NOUN
app01-10348	38	12	and	and	CCONJ
app01-10348	38	13	characterizing	characterize	VERB
app01-10348	38	14	si	si	PROPN
app01-10348	38	15	nws	nws	PROPN
app01-10348	38	16	fabricated	fabricate	VERB
app01-10348	38	17	on	on	ADP
app01-10348	38	18	stress	stress	NOUN
app01-10348	38	19	-	-	PUNCT
app01-10348	38	20	free	free	ADJ
app01-10348	38	21	substrates	substrate	NOUN
app01-10348	38	22	,	,	PUNCT
app01-10348	38	23	while	while	SCONJ
app01-10348	38	24	subjecting	subject	VERB
app01-10348	38	25	them	they	PRON
app01-10348	38	26	to	to	ADP
app01-10348	38	27	subsequent	subsequent	ADJ
app01-10348	38	28	thermal	thermal	ADJ
app01-10348	38	29	steps	step	NOUN
app01-10348	38	30	to	to	PART
app01-10348	38	31	systematically	systematically	ADV
app01-10348	38	32	introduce	introduce	VERB
app01-10348	38	33	intrinsic	intrinsic	ADJ
app01-10348	38	34	stresses	stress	NOUN
app01-10348	38	35	.	.	PUNCT
app01-10348	39	1	building	build	VERB
app01-10348	39	2	upon	upon	SCONJ
app01-10348	39	3	prior	prior	ADJ
app01-10348	39	4	successful	successful	ADJ
app01-10348	39	5	studies	study	NOUN
app01-10348	39	6	by	by	ADP
app01-10348	39	7	the	the	DET
app01-10348	39	8	authors	author	NOUN
app01-10348	39	9	,	,	PUNCT
app01-10348	39	10	which	which	PRON
app01-10348	39	11	focused	focus	VERB
app01-10348	39	12	on	on	ADP
app01-10348	39	13	cofabrication	cofabrication	NOUN
app01-10348	39	14	of	of	ADP
app01-10348	39	15	si	si	PROPN
app01-10348	39	16	nws	nws	PROPN
app01-10348	39	17	integrated	integrate	VERB
app01-10348	39	18	into	into	ADP
app01-10348	39	19	micro	micro	ADJ
app01-10348	39	20	-	-	NOUN
app01-10348	39	21	scale	scale	ADJ
app01-10348	39	22	support	support	NOUN
app01-10348	39	23	pillars	pillar	VERB
app01-10348	39	24	[	[	X
app01-10348	39	25	6	6	NUM
app01-10348	39	26	,	,	PUNCT
app01-10348	39	27	15	15	NUM
app01-10348	39	28	,	,	PUNCT
app01-10348	39	29	20	20	NUM
app01-10348	39	30	,	,	PUNCT
app01-10348	39	31	27	27	NUM
app01-10348	39	32	]	]	PUNCT
app01-10348	39	33	,	,	PUNCT
app01-10348	39	34	characterization	characterization	NOUN
app01-10348	39	35	of	of	ADP
app01-10348	39	36	surfaceor	surfaceor	PROPN
app01-10348	39	37	fabrication	fabrication	NOUN
app01-10348	39	38	-	-	PUNCT
app01-10348	39	39	induced	induce	VERB
app01-10348	39	40	residual	residual	ADJ
app01-10348	39	41	stresses	stress	NOUN
app01-10348	39	42	[	[	X
app01-10348	39	43	6	6	NUM
app01-10348	39	44	,	,	PUNCT
app01-10348	39	45	14	14	NUM
app01-10348	39	46	,	,	PUNCT
app01-10348	39	47	15	15	NUM
app01-10348	39	48	]	]	PUNCT
app01-10348	39	49	,	,	PUNCT
app01-10348	39	50	and	and	CCONJ
app01-10348	39	51	high	high	ADJ
app01-10348	39	52	-	-	PUNCT
app01-10348	39	53	throughput	throughput	NOUN
app01-10348	39	54	resonance	resonance	NOUN
app01-10348	39	55	testing	testing	NOUN
app01-10348	39	56	of	of	ADP
app01-10348	39	57	si	si	PROPN
app01-10348	39	58	nws	nws	PROPN
app01-10348	39	59	,	,	PUNCT
app01-10348	39	60	this	this	DET
app01-10348	39	61	research	research	NOUN
app01-10348	39	62	seeks	seek	VERB
app01-10348	39	63	to	to	PART
app01-10348	39	64	develop	develop	VERB
app01-10348	39	65	a	a	DET
app01-10348	39	66	methodology	methodology	NOUN
app01-10348	39	67	for	for	ADP
app01-10348	39	68	introducing	introduce	VERB
app01-10348	39	69	controlled	control	VERB
app01-10348	39	70	stress	stress	NOUN
app01-10348	39	71	and	and	CCONJ
app01-10348	39	72	subsequently	subsequently	ADV
app01-10348	39	73	capturing	capture	VERB
app01-10348	39	74	it	it	PRON
app01-10348	39	75	through	through	ADP
app01-10348	39	76	follow	follow	VERB
app01-10348	39	77	-	-	PUNCT
app01-10348	39	78	up	up	ADP
app01-10348	39	79	testing	testing	NOUN
app01-10348	39	80	and	and	CCONJ
app01-10348	39	81	measurement	measurement	NOUN
app01-10348	39	82	assessments	assessment	NOUN
app01-10348	39	83	.	.	PUNCT
app01-10348	40	1	this	this	PRON
app01-10348	40	2	facilitates	facilitate	VERB
app01-10348	40	3	the	the	DET
app01-10348	40	4	analysis	analysis	NOUN
app01-10348	40	5	of	of	ADP
app01-10348	40	6	vibrational	vibrational	ADJ
app01-10348	40	7	modes	mode	NOUN
app01-10348	40	8	and	and	CCONJ
app01-10348	40	9	intrinsic	intrinsic	ADJ
app01-10348	40	10	stresses	stress	NOUN
app01-10348	40	11	post	post	ADJ
app01-10348	40	12	-	-	NOUN
app01-10348	40	13	fabrication	fabrication	NOUN
app01-10348	40	14	and	and	CCONJ
app01-10348	40	15	after	after	ADP
app01-10348	40	16	the	the	DET
app01-10348	40	17	thermal	thermal	ADJ
app01-10348	40	18	process	process	NOUN
app01-10348	40	19	,	,	PUNCT
app01-10348	40	20	enabling	enable	VERB
app01-10348	40	21	precise	precise	ADJ
app01-10348	40	22	induction	induction	NOUN
app01-10348	40	23	and	and	CCONJ
app01-10348	40	24	subsequent	subsequent	ADJ
app01-10348	40	25	examination	examination	NOUN
app01-10348	40	26	of	of	ADP
app01-10348	40	27	thermal	thermal	ADJ
app01-10348	40	28	effects	effect	NOUN
app01-10348	40	29	on	on	ADP
app01-10348	40	30	si	si	PROPN
app01-10348	40	31	nws	nws	PROPN
app01-10348	40	32	.	.	PUNCT
app01-10348	41	1	notably	notably	ADV
app01-10348	41	2	,	,	PUNCT
app01-10348	41	3	the	the	DET
app01-10348	41	4	co	co	NOUN
app01-10348	41	5	-	-	NOUN
app01-10348	41	6	fabrication	fabrication	NOUN
app01-10348	41	7	process	process	NOUN
app01-10348	41	8	for	for	ADP
app01-10348	41	9	creating	create	VERB
app01-10348	41	10	double	double	ADV
app01-10348	41	11	-	-	PUNCT
app01-10348	41	12	clamped	clamp	VERB
app01-10348	41	13	si	si	X
app01-10348	41	14	nws	nws	PROPN
app01-10348	41	15	within	within	ADP
app01-10348	41	16	a	a	DET
app01-10348	41	17	single	single	ADJ
app01-10348	41	18	substrate	substrate	NOUN
app01-10348	41	19	reduces	reduce	VERB
app01-10348	41	20	sample	sample	NOUN
app01-10348	41	21	-	-	PUNCT
app01-10348	41	22	to	to	ADP
app01-10348	41	23	-	-	PUNCT
app01-10348	41	24	sample	sample	NOUN
app01-10348	41	25	variations	variation	NOUN
app01-10348	41	26	,	,	PUNCT
app01-10348	41	27	enhancing	enhance	VERB
app01-10348	41	28	the	the	DET
app01-10348	41	29	statistical	statistical	ADJ
app01-10348	41	30	robustness	robustness	NOUN
app01-10348	41	31	of	of	ADP
app01-10348	41	32	the	the	DET
app01-10348	41	33	findings	finding	NOUN
app01-10348	41	34	.	.	PUNCT
app01-10348	42	1	for	for	ADP
app01-10348	42	2	detailed	detailed	ADJ
app01-10348	42	3	insights	insight	NOUN
app01-10348	42	4	into	into	ADP
app01-10348	42	5	the	the	DET
app01-10348	42	6	fabrication	fabrication	NOUN
app01-10348	42	7	method	method	NOUN
app01-10348	42	8	,	,	PUNCT
app01-10348	42	9	testing	testing	NOUN
app01-10348	42	10	procedure	procedure	NOUN
app01-10348	42	11	,	,	PUNCT
app01-10348	42	12	raman	raman	NOUN
app01-10348	42	13	characterization	characterization	NOUN
app01-10348	42	14	,	,	PUNCT
app01-10348	42	15	and	and	CCONJ
app01-10348	42	16	thermal	thermal	ADJ
app01-10348	42	17	process	process	NOUN
app01-10348	42	18	,	,	PUNCT
app01-10348	42	19	refer	refer	VERB
app01-10348	42	20	to	to	ADP
app01-10348	42	21	section	section	NOUN
app01-10348	42	22	2	2	NUM
app01-10348	42	23	.	.	PUNCT
app01-10348	43	1	the	the	DET
app01-10348	43	2	outcomes	outcome	NOUN
app01-10348	43	3	of	of	ADP
app01-10348	43	4	resonance	resonance	NOUN
app01-10348	43	5	testing	testing	NOUN
app01-10348	43	6	and	and	CCONJ
app01-10348	43	7	raman	raman	NOUN
app01-10348	43	8	characterization	characterization	NOUN
app01-10348	43	9	are	be	AUX
app01-10348	43	10	presented	present	VERB
app01-10348	43	11	in	in	ADP
app01-10348	43	12	section	section	NOUN
app01-10348	43	13	3	3	NUM
app01-10348	43	14	.	.	NOUN
app01-10348	43	15	2	2	NUM
app01-10348	43	16	.	.	X
app01-10348	43	17	materials	material	NOUN
app01-10348	43	18	and	and	CCONJ
app01-10348	43	19	methods	method	NOUN
app01-10348	43	20	this	this	DET
app01-10348	43	21	section	section	NOUN
app01-10348	43	22	introduces	introduce	VERB
app01-10348	43	23	the	the	DET
app01-10348	43	24	integrated	integrate	VERB
app01-10348	43	25	methodology	methodology	NOUN
app01-10348	43	26	for	for	ADP
app01-10348	43	27	raman	raman	NOUN
app01-10348	43	28	characterization	characterization	NOUN
app01-10348	43	29	and	and	CCONJ
app01-10348	43	30	resonance	resonance	NOUN
app01-10348	43	31	testing	testing	NOUN
app01-10348	43	32	of	of	ADP
app01-10348	43	33	si	si	PROPN
app01-10348	43	34	nws	nws	PROPN
app01-10348	43	35	fabricated	fabricate	VERB
app01-10348	43	36	in	in	ADP
app01-10348	43	37	a	a	DET
app01-10348	43	38	double	double	ADJ
app01-10348	43	39	-	-	PUNCT
app01-10348	43	40	clamped	clamp	VERB
app01-10348	43	41	configuration	configuration	NOUN
app01-10348	43	42	.	.	PUNCT
app01-10348	44	1	section	section	NOUN
app01-10348	44	2	2.1	2.1	NUM
app01-10348	44	3	provides	provide	VERB
app01-10348	44	4	detailed	detailed	ADJ
app01-10348	44	5	information	information	NOUN
app01-10348	44	6	on	on	ADP
app01-10348	44	7	the	the	DET
app01-10348	44	8	specific	specific	ADJ
app01-10348	44	9	design	design	NOUN
app01-10348	44	10	and	and	CCONJ
app01-10348	44	11	fabrication	fabrication	NOUN
app01-10348	44	12	of	of	ADP
app01-10348	44	13	si	si	PROPN
app01-10348	44	14	nws	nws	PROPN
app01-10348	44	15	connected	connect	VERB
app01-10348	44	16	to	to	ADP
app01-10348	44	17	the	the	DET
app01-10348	44	18	support	support	NOUN
app01-10348	44	19	pillars	pillar	NOUN
app01-10348	44	20	.	.	PUNCT
app01-10348	45	1	additionally	additionally	ADV
app01-10348	45	2	,	,	PUNCT
app01-10348	45	3	section	section	NOUN
app01-10348	45	4	2.2	2.2	NUM
app01-10348	45	5	provides	provide	VERB
app01-10348	45	6	details	detail	NOUN
app01-10348	45	7	on	on	ADP
app01-10348	45	8	the	the	DET
app01-10348	45	9	resonance	resonance	NOUN
app01-10348	45	10	testing	testing	NOUN
app01-10348	45	11	method	method	NOUN
app01-10348	45	12	.	.	PUNCT
app01-10348	46	1	section	section	NOUN
app01-10348	46	2	2.3	2.3	NUM
app01-10348	46	3	discusses	discuss	VERB
app01-10348	46	4	raman	raman	ADJ
app01-10348	46	5	characterization	characterization	NOUN
app01-10348	46	6	for	for	ADP
app01-10348	46	7	quantifying	quantify	VERB
app01-10348	46	8	intrinsic	intrinsic	ADJ
app01-10348	46	9	stress	stress	NOUN
app01-10348	46	10	in	in	ADP
app01-10348	46	11	si	si	PROPN
app01-10348	46	12	nws	nws	PROPN
app01-10348	46	13	,	,	PUNCT
app01-10348	46	14	while	while	SCONJ
app01-10348	46	15	section	section	NOUN
app01-10348	46	16	2.4	2.4	NUM
app01-10348	46	17	outlines	outline	VERB
app01-10348	46	18	the	the	DET
app01-10348	46	19	thermal	thermal	ADJ
app01-10348	46	20	process	process	NOUN
app01-10348	46	21	details	detail	NOUN
app01-10348	46	22	,	,	PUNCT
app01-10348	46	23	presenting	present	VERB
app01-10348	46	24	the	the	DET
app01-10348	46	25	methodology	methodology	NOUN
app01-10348	46	26	for	for	ADP
app01-10348	46	27	inducing	induce	VERB
app01-10348	46	28	stress	stress	NOUN
app01-10348	46	29	into	into	ADP
app01-10348	46	30	si	si	PROPN
app01-10348	46	31	nws	nws	PROPN
app01-10348	46	32	.	.	PROPN
app01-10348	47	1	2.1	2.1	NUM
app01-10348	47	2	.	.	PUNCT
app01-10348	47	3	fabrication	fabrication	NOUN
app01-10348	47	4	the	the	DET
app01-10348	47	5	process	process	NOUN
app01-10348	47	6	of	of	ADP
app01-10348	47	7	fabricating	fabricate	VERB
app01-10348	47	8	si	si	PROPN
app01-10348	47	9	nws	nws	PROPN
app01-10348	47	10	begins	begin	VERB
app01-10348	47	11	with	with	ADP
app01-10348	47	12	a	a	DET
app01-10348	47	13	double	double	ADJ
app01-10348	47	14	-	-	PUNCT
app01-10348	47	15	side	side	NOUN
app01-10348	47	16	polished	polished	ADJ
app01-10348	47	17	<	<	X
app01-10348	47	18	100	100	NUM
app01-10348	47	19	>	>	PUNCT
app01-10348	47	20	si	si	ADJ
app01-10348	47	21	wafer	wafer	NOUN
app01-10348	47	22	,	,	PUNCT
app01-10348	47	23	measuring	measure	VERB
app01-10348	47	24	525	525	NUM
app01-10348	47	25	µm	µm	NOUN
app01-10348	47	26	in	in	ADP
app01-10348	47	27	thickness	thickness	NOUN
app01-10348	47	28	,	,	PUNCT
app01-10348	47	29	which	which	PRON
app01-10348	47	30	is	be	AUX
app01-10348	47	31	diced	dice	VERB
app01-10348	47	32	into	into	ADP
app01-10348	47	33	multiple	multiple	ADJ
app01-10348	47	34	fragments	fragment	NOUN
app01-10348	47	35	,	,	PUNCT
app01-10348	47	36	each	each	PRON
app01-10348	47	37	sized	sized	ADJ
app01-10348	47	38	at	at	ADP
app01-10348	47	39	12	12	NUM
app01-10348	47	40	mm	mm	NOUN
app01-10348	47	41	×	×	NOUN
app01-10348	47	42	12	12	NUM
app01-10348	47	43	mm	mm	NOUN
app01-10348	47	44	.	.	PUNCT
app01-10348	48	1	the	the	DET
app01-10348	48	2	method	method	NOUN
app01-10348	48	3	involves	involve	VERB
app01-10348	48	4	masking	mask	VERB
app01-10348	48	5	a	a	DET
app01-10348	48	6	specific	specific	ADJ
app01-10348	48	7	region	region	NOUN
app01-10348	48	8	of	of	ADP
app01-10348	48	9	these	these	DET
app01-10348	48	10	fragments	fragment	NOUN
app01-10348	48	11	using	use	VERB
app01-10348	48	12	a	a	DET
app01-10348	48	13	photoresist	photoresist	NOUN
app01-10348	48	14	(	(	PUNCT
app01-10348	48	15	pr	pr	NOUN
app01-10348	48	16	)	)	PUNCT
app01-10348	48	17	etch	etch	NOUN
app01-10348	48	18	mask	mask	NOUN
app01-10348	48	19	,	,	PUNCT
app01-10348	48	20	followed	follow	VERB
app01-10348	48	21	by	by	ADP
app01-10348	48	22	deep	deep	ADJ
app01-10348	48	23	si	si	NOUN
app01-10348	48	24	etching	etch	VERB
app01-10348	48	25	.	.	PUNCT
app01-10348	49	1	this	this	PRON
app01-10348	49	2	allows	allow	VERB
app01-10348	49	3	for	for	ADP
app01-10348	49	4	the	the	DET
app01-10348	49	5	creation	creation	NOUN
app01-10348	49	6	of	of	ADP
app01-10348	49	7	suspended	suspend	VERB
app01-10348	49	8	si	si	PROPN
app01-10348	49	9	nw	nw	PROPN
app01-10348	49	10	and	and	CCONJ
app01-10348	49	11	its	its	PRON
app01-10348	49	12	micro	micro	ADJ
app01-10348	49	13	-	-	NOUN
app01-10348	49	14	scale	scale	ADJ
app01-10348	49	15	accompanying	accompanying	ADJ
app01-10348	49	16	support	support	NOUN
app01-10348	49	17	structures	structure	NOUN
app01-10348	49	18	.	.	PUNCT
app01-10348	50	1	to	to	PART
app01-10348	50	2	initiate	initiate	VERB
app01-10348	50	3	the	the	DET
app01-10348	50	4	fabrication	fabrication	NOUN
app01-10348	50	5	,	,	PUNCT
app01-10348	50	6	the	the	DET
app01-10348	50	7	fragment	fragment	NOUN
app01-10348	50	8	undergoes	undergo	VERB
app01-10348	50	9	a	a	DET
app01-10348	50	10	standard	standard	ADJ
app01-10348	50	11	rca1	rca1	ADJ
app01-10348	50	12	cleaning	cleaning	NOUN
app01-10348	50	13	process	process	NOUN
app01-10348	50	14	,	,	PUNCT
app01-10348	50	15	after	after	ADP
app01-10348	50	16	which	which	PRON
app01-10348	50	17	a	a	DET
app01-10348	50	18	dielectric	dielectric	ADJ
app01-10348	50	19	etch	etch	NOUN
app01-10348	50	20	mask	mask	NOUN
app01-10348	50	21	is	be	AUX
app01-10348	50	22	applied	apply	VERB
app01-10348	50	23	via	via	ADP
app01-10348	50	24	plasma	plasma	NOUN
app01-10348	50	25	-	-	PUNCT
app01-10348	50	26	enhanced	enhance	VERB
app01-10348	50	27	chemical	chemical	NOUN
app01-10348	50	28	vapor	vapor	NOUN
app01-10348	50	29	deposition	deposition	NOUN
app01-10348	50	30	.	.	PUNCT
app01-10348	51	1	subsequently	subsequently	ADV
app01-10348	51	2	,	,	PUNCT
app01-10348	51	3	photolithography	photolithography	NOUN
app01-10348	51	4	is	be	AUX
app01-10348	51	5	employed	employ	VERB
app01-10348	51	6	to	to	PART
app01-10348	51	7	define	define	VERB
app01-10348	51	8	the	the	DET
app01-10348	51	9	desired	desire	VERB
app01-10348	51	10	feature	feature	NOUN
app01-10348	51	11	on	on	ADP
app01-10348	51	12	the	the	DET
app01-10348	51	13	pr	pr	NOUN
app01-10348	51	14	.	.	PUNCT
app01-10348	52	1	following	follow	VERB
app01-10348	52	2	the	the	DET
app01-10348	52	3	patterning	patterning	NOUN
app01-10348	52	4	of	of	ADP
app01-10348	52	5	the	the	DET
app01-10348	52	6	dielectric	dielectric	ADJ
app01-10348	52	7	etch	etch	NOUN
app01-10348	52	8	mask	mask	NOUN
app01-10348	52	9	,	,	PUNCT
app01-10348	52	10	deep	deep	ADJ
app01-10348	52	11	reactive	reactive	ADJ
app01-10348	52	12	ion	ion	NOUN
app01-10348	52	13	etching	etch	VERB
app01-10348	52	14	(	(	PUNCT
app01-10348	52	15	drie	drie	X
app01-10348	52	16	)	)	PUNCT
app01-10348	52	17	is	be	AUX
app01-10348	52	18	carried	carry	VERB
app01-10348	52	19	out	out	ADP
app01-10348	52	20	to	to	PART
app01-10348	52	21	remove	remove	VERB
app01-10348	52	22	the	the	DET
app01-10348	52	23	si	si	NOUN
app01-10348	52	24	beneath	beneath	ADP
app01-10348	52	25	the	the	DET
app01-10348	52	26	etch	etch	NOUN
app01-10348	52	27	mask	mask	NOUN
app01-10348	52	28	[	[	X
app01-10348	52	29	27	27	NUM
app01-10348	52	30	]	]	PUNCT
app01-10348	52	31	.	.	PUNCT
app01-10348	53	1	this	this	PRON
app01-10348	53	2	allows	allow	VERB
app01-10348	53	3	for	for	ADP
app01-10348	53	4	the	the	DET
app01-10348	53	5	release	release	NOUN
app01-10348	53	6	of	of	ADP
app01-10348	53	7	si	si	PROPN
app01-10348	53	8	nws	nws	PROPN
app01-10348	53	9	upon	upon	SCONJ
app01-10348	53	10	etching	etch	VERB
app01-10348	53	11	process	process	NOUN
app01-10348	53	12	.	.	PUNCT
app01-10348	54	1	following	follow	VERB
app01-10348	54	2	this	this	PRON
app01-10348	54	3	,	,	PUNCT
app01-10348	54	4	o2	o2	ADJ
app01-10348	54	5	ashing	ashing	NOUN
app01-10348	54	6	and	and	CCONJ
app01-10348	54	7	selective	selective	ADJ
app01-10348	54	8	vapor	vapor	NOUN
app01-10348	54	9	etching	etch	VERB
app01-10348	54	10	using	use	VERB
app01-10348	54	11	hydrofluoric	hydrofluoric	NOUN
app01-10348	54	12	(	(	PUNCT
app01-10348	54	13	hf	hf	NOUN
app01-10348	54	14	)	)	PUNCT
app01-10348	54	15	acid	acid	NOUN
app01-10348	54	16	are	be	AUX
app01-10348	54	17	performed	perform	VERB
app01-10348	54	18	to	to	PART
app01-10348	54	19	remove	remove	VERB
app01-10348	54	20	the	the	DET
app01-10348	54	21	protective	protective	ADJ
app01-10348	54	22	layers	layer	NOUN
app01-10348	54	23	,	,	PUNCT
app01-10348	54	24	enabling	enable	VERB
app01-10348	54	25	precise	precise	ADJ
app01-10348	54	26	definition	definition	NOUN
app01-10348	54	27	of	of	ADP
app01-10348	54	28	<	<	X
app01-10348	54	29	110	110	NUM
app01-10348	54	30	>	>	X
app01-10348	54	31	-oriented	-oriente	VERB
app01-10348	54	32	si	si	PROPN
app01-10348	54	33	nws	nws	PROPN
app01-10348	54	34	and	and	CCONJ
app01-10348	54	35	micro	micro	ADJ
app01-10348	54	36	-	-	NOUN
app01-10348	54	37	scale	scale	ADJ
app01-10348	54	38	triangular	triangular	NOUN
app01-10348	54	39	supports	support	VERB
app01-10348	54	40	within	within	ADP
app01-10348	54	41	the	the	DET
app01-10348	54	42	substrate	substrate	NOUN
app01-10348	54	43	.	.	PUNCT
app01-10348	55	1	2.2	2.2	NUM
app01-10348	55	2	.	.	PUNCT
app01-10348	55	3	resonance	resonance	NOUN
app01-10348	55	4	testing	test	VERB
app01-10348	55	5	the	the	DET
app01-10348	55	6	frequency	frequency	NOUN
app01-10348	55	7	response	response	NOUN
app01-10348	55	8	of	of	ADP
app01-10348	55	9	si	si	PROPN
app01-10348	55	10	nws	nws	PROPN
app01-10348	55	11	is	be	AUX
app01-10348	55	12	examined	examine	VERB
app01-10348	55	13	using	use	VERB
app01-10348	55	14	a	a	DET
app01-10348	55	15	laser	laser	NOUN
app01-10348	55	16	doppler	doppler	NOUN
app01-10348	55	17	vibrometer	vibrometer	NOUN
app01-10348	55	18	(	(	PUNCT
app01-10348	55	19	ldv	ldv	PROPN
app01-10348	55	20	msa-600	msa-600	PROPN
app01-10348	55	21	,	,	PUNCT
app01-10348	55	22	polytec	polytec	ADJ
app01-10348	55	23	gmbh	gmbh	NOUN
app01-10348	55	24	)	)	PUNCT
app01-10348	55	25	.	.	PUNCT
app01-10348	56	1	the	the	DET
app01-10348	56	2	experimental	experimental	ADJ
app01-10348	56	3	setup	setup	NOUN
app01-10348	56	4	entails	entail	VERB
app01-10348	56	5	placing	place	VERB
app01-10348	56	6	the	the	DET
app01-10348	56	7	dut	dut	NOUN
app01-10348	56	8	onto	onto	ADP
app01-10348	56	9	a	a	DET
app01-10348	56	10	piezoelectric	piezoelectric	ADJ
app01-10348	56	11	disk	disk	NOUN
app01-10348	56	12	,	,	PUNCT
app01-10348	56	13	secured	secure	VERB
app01-10348	56	14	with	with	ADP
app01-10348	56	15	adhesive	adhesive	ADJ
app01-10348	56	16	tape	tape	NOUN
app01-10348	56	17	for	for	ADP
app01-10348	56	18	actuation	actuation	NOUN
app01-10348	56	19	.	.	PUNCT
app01-10348	57	1	vibrational	vibrational	ADJ
app01-10348	57	2	spectra	spectra	NOUN
app01-10348	57	3	are	be	AUX
app01-10348	57	4	captured	capture	VERB
app01-10348	57	5	by	by	ADP
app01-10348	57	6	activating	activate	VERB
app01-10348	57	7	the	the	DET
app01-10348	57	8	piezoelectric	piezoelectric	ADJ
app01-10348	57	9	disk	disk	NOUN
app01-10348	57	10	with	with	ADP
app01-10348	57	11	a	a	DET
app01-10348	57	12	sinusoidal	sinusoidal	ADJ
app01-10348	57	13	chirp	chirp	NOUN
app01-10348	57	14	signal	signal	NOUN
app01-10348	57	15	generated	generate	VERB
app01-10348	57	16	by	by	ADP
app01-10348	57	17	the	the	DET
app01-10348	57	18	ldv	ldv	PROPN
app01-10348	57	19	system	system	NOUN
app01-10348	57	20	within	within	ADP
app01-10348	57	21	the	the	DET
app01-10348	57	22	specified	specified	ADJ
app01-10348	57	23	frequency	frequency	NOUN
app01-10348	57	24	range	range	NOUN
app01-10348	57	25	.	.	PUNCT
app01-10348	58	1	subsequently	subsequently	ADV
app01-10348	58	2	,	,	PUNCT
app01-10348	58	3	the	the	DET
app01-10348	58	4	device	device	NOUN
app01-10348	58	5	’s	’s	PART
app01-10348	58	6	response	response	NOUN
app01-10348	58	7	is	be	AUX
app01-10348	58	8	analyzed	analyze	VERB
app01-10348	58	9	using	use	VERB
app01-10348	58	10	fast	fast	ADJ
app01-10348	58	11	fourier	fourier	NOUN
app01-10348	58	12	transform	transform	NOUN
app01-10348	58	13	(	(	PUNCT
app01-10348	58	14	fft	fft	NOUN
app01-10348	58	15	)	)	PUNCT
app01-10348	58	16	techniques	technique	NOUN
app01-10348	58	17	.	.	PUNCT
app01-10348	59	1	the	the	DET
app01-10348	59	2	ldv	ldv	PROPN
app01-10348	59	3	is	be	AUX
app01-10348	59	4	capable	capable	ADJ
app01-10348	59	5	of	of	ADP
app01-10348	59	6	generating	generate	VERB
app01-10348	59	7	an	an	DET
app01-10348	59	8	excitation	excitation	NOUN
app01-10348	59	9	signal	signal	NOUN
app01-10348	59	10	ranging	range	VERB
app01-10348	59	11	from	from	ADP
app01-10348	59	12	0	0	NUM
app01-10348	59	13	to	to	ADP
app01-10348	59	14	25mhz	25mhz	NOUN
app01-10348	59	15	,	,	PUNCT
app01-10348	59	16	with	with	ADP
app01-10348	59	17	1.25	1.25	NUM
app01-10348	59	18	khz	khz	NOUN
app01-10348	59	19	increments	increment	NOUN
app01-10348	59	20	,	,	PUNCT
app01-10348	59	21	to	to	PART
app01-10348	59	22	drive	drive	VERB
app01-10348	59	23	the	the	DET
app01-10348	59	24	piezoelectric	piezoelectric	ADJ
app01-10348	59	25	disk	disk	NOUN
app01-10348	59	26	.	.	PUNCT
app01-10348	60	1	this	this	PRON
app01-10348	60	2	induces	induce	VERB
app01-10348	60	3	vibration	vibration	NOUN
app01-10348	60	4	in	in	ADP
app01-10348	60	5	the	the	DET
app01-10348	60	6	sample	sample	NOUN
app01-10348	60	7	positioned	position	VERB
app01-10348	60	8	on	on	ADP
app01-10348	60	9	top	top	NOUN
app01-10348	60	10	of	of	ADP
app01-10348	60	11	the	the	DET
app01-10348	60	12	piezoelectric	piezoelectric	NOUN
app01-10348	60	13	disk	disk	NOUN
app01-10348	60	14	.	.	PUNCT
app01-10348	61	1	a	a	DET
app01-10348	61	2	piezo	piezo	ADJ
app01-10348	61	3	-	-	ADJ
app01-10348	61	4	ceramic	ceramic	ADJ
app01-10348	61	5	actuator	actuator	NOUN
app01-10348	61	6	75	75	NUM
app01-10348	61	7	s.	s.	PROPN
app01-10348	61	8	z.	z.	PROPN
app01-10348	61	9	pakzad	pakzad	PROPN
app01-10348	61	10	,	,	PUNCT
app01-10348	61	11	m.	m.	NOUN
app01-10348	61	12	muzammil	muzammil	PROPN
app01-10348	61	13	,	,	PUNCT
app01-10348	61	14	m.	m.	PROPN
app01-10348	61	15	b.	b.	PROPN
app01-10348	61	16	shirin	shirin	PROPN
app01-10348	61	17	et	et	PROPN
app01-10348	61	18	al	al	PROPN
app01-10348	61	19	.	.	PROPN
app01-10348	61	20	acta	acta	PROPN
app01-10348	61	21	polytechnica	polytechnica	PROPN
app01-10348	61	22	ctu	ctu	PROPN
app01-10348	61	23	proceedings	proceeding	NOUN
app01-10348	61	24	figure	figure	VERB
app01-10348	61	25	1	1	NUM
app01-10348	61	26	.	.	PUNCT
app01-10348	62	1	the	the	DET
app01-10348	62	2	experimental	experimental	ADJ
app01-10348	62	3	setup	setup	NOUN
app01-10348	62	4	employs	employ	VERB
app01-10348	62	5	an	an	DET
app01-10348	62	6	ldv	ldv	NOUN
app01-10348	62	7	for	for	ADP
app01-10348	62	8	conducting	conduct	VERB
app01-10348	62	9	resonance	resonance	NOUN
app01-10348	62	10	tests	test	NOUN
app01-10348	62	11	on	on	ADP
app01-10348	62	12	si	si	PROPN
app01-10348	62	13	nws	nws	PROPN
app01-10348	62	14	.	.	PUNCT
app01-10348	63	1	dut	dut	PROPN
app01-10348	63	2	refers	refer	VERB
app01-10348	63	3	to	to	ADP
app01-10348	63	4	the	the	DET
app01-10348	63	5	si	si	PROPN
app01-10348	63	6	fragment	fragment	NOUN
app01-10348	63	7	hosting	host	VERB
app01-10348	63	8	si	si	PROPN
app01-10348	63	9	nws	nws	PROPN
app01-10348	63	10	and	and	CCONJ
app01-10348	63	11	accommodates	accommodate	VERB
app01-10348	63	12	specific	specific	ADJ
app01-10348	63	13	scanning	scanning	NOUN
app01-10348	63	14	points	point	NOUN
app01-10348	63	15	assigned	assign	VERB
app01-10348	63	16	to	to	ADP
app01-10348	63	17	both	both	CCONJ
app01-10348	63	18	the	the	DET
app01-10348	63	19	si	si	PROPN
app01-10348	63	20	nws	nws	PROPN
app01-10348	63	21	and	and	CCONJ
app01-10348	63	22	support	support	NOUN
app01-10348	63	23	pillars	pillar	NOUN
app01-10348	63	24	,	,	PUNCT
app01-10348	63	25	employing	employ	VERB
app01-10348	63	26	the	the	DET
app01-10348	63	27	msa	msa	PROPN
app01-10348	63	28	-	-	PUNCT
app01-10348	63	29	ldv	ldv	PROPN
app01-10348	63	30	setup	setup	NOUN
app01-10348	63	31	for	for	ADP
app01-10348	63	32	resonance	resonance	NOUN
app01-10348	63	33	testing	testing	NOUN
app01-10348	63	34	.	.	PUNCT
app01-10348	64	1	disk	disk	NOUN
app01-10348	64	2	is	be	AUX
app01-10348	64	3	utilized	utilize	VERB
app01-10348	64	4	to	to	PART
app01-10348	64	5	produce	produce	VERB
app01-10348	64	6	high	high	ADJ
app01-10348	64	7	-	-	PUNCT
app01-10348	64	8	frequency	frequency	NOUN
app01-10348	64	9	excitation	excitation	NOUN
app01-10348	64	10	via	via	ADP
app01-10348	64	11	a	a	DET
app01-10348	64	12	periodic	periodic	ADJ
app01-10348	64	13	chirped	chirp	VERB
app01-10348	64	14	signal	signal	NOUN
app01-10348	64	15	.	.	PUNCT
app01-10348	65	1	figure	figure	NOUN
app01-10348	65	2	1	1	NUM
app01-10348	65	3	illustrates	illustrate	VERB
app01-10348	65	4	the	the	DET
app01-10348	65	5	testing	testing	NOUN
app01-10348	65	6	setup	setup	NOUN
app01-10348	65	7	and	and	CCONJ
app01-10348	65	8	relevant	relevant	ADJ
app01-10348	65	9	details	detail	NOUN
app01-10348	65	10	for	for	ADP
app01-10348	65	11	conducting	conduct	VERB
app01-10348	65	12	resonance	resonance	NOUN
app01-10348	65	13	tests	test	NOUN
app01-10348	65	14	on	on	ADP
app01-10348	65	15	the	the	DET
app01-10348	65	16	dut	dut	PROPN
app01-10348	65	17	hosting	host	VERB
app01-10348	65	18	multiple	multiple	ADJ
app01-10348	65	19	si	si	PROPN
app01-10348	65	20	nws	nws	PROPN
app01-10348	65	21	.	.	PUNCT
app01-10348	66	1	the	the	DET
app01-10348	66	2	scan	scan	PROPN
app01-10348	66	3	points	point	NOUN
app01-10348	66	4	assigned	assign	VERB
app01-10348	66	5	using	use	VERB
app01-10348	66	6	the	the	DET
app01-10348	66	7	msa	msa	PROPN
app01-10348	66	8	-	-	PUNCT
app01-10348	66	9	ldv	ldv	PROPN
app01-10348	66	10	setup	setup	NOUN
app01-10348	66	11	undergo	undergo	VERB
app01-10348	66	12	resonance	resonance	NOUN
app01-10348	66	13	testing	testing	NOUN
app01-10348	66	14	for	for	ADP
app01-10348	66	15	comprehensive	comprehensive	ADJ
app01-10348	66	16	analysis	analysis	NOUN
app01-10348	66	17	[	[	X
app01-10348	66	18	23	23	NUM
app01-10348	66	19	]	]	PUNCT
app01-10348	66	20	.	.	PUNCT
app01-10348	67	1	2.3	2.3	NUM
app01-10348	67	2	.	.	PUNCT
app01-10348	67	3	raman	raman	NOUN
app01-10348	67	4	characterization	characterization	NOUN
app01-10348	67	5	after	after	ADP
app01-10348	67	6	conducting	conduct	VERB
app01-10348	67	7	dimensional	dimensional	ADJ
app01-10348	67	8	analysis	analysis	NOUN
app01-10348	67	9	of	of	ADP
app01-10348	67	10	si	si	PROPN
app01-10348	67	11	nws	nws	PROPN
app01-10348	67	12	using	use	VERB
app01-10348	67	13	sca	sca	PROPN
app01-10348	67	14	nning	nne	VERB
app01-10348	67	15	electron	electron	NOUN
app01-10348	67	16	microscope	microscope	NOUN
app01-10348	67	17	(	(	PUNCT
app01-10348	67	18	sem	sem	NOUN
app01-10348	67	19	)	)	PUNCT
app01-10348	67	20	,	,	PUNCT
app01-10348	67	21	raman	raman	NOUN
app01-10348	67	22	spectroscopy	spectroscopy	NOUN
app01-10348	67	23	is	be	AUX
app01-10348	67	24	employed	employ	VERB
app01-10348	67	25	to	to	PART
app01-10348	67	26	quantify	quantify	VERB
app01-10348	67	27	the	the	DET
app01-10348	67	28	intrinsic	intrinsic	ADJ
app01-10348	67	29	stress	stress	NOUN
app01-10348	67	30	,	,	PUNCT
app01-10348	67	31	denoted	denote	VERB
app01-10348	67	32	as	as	ADP
app01-10348	67	33	σ	σ	PROPN
app01-10348	67	34	,	,	PUNCT
app01-10348	67	35	using	use	VERB
app01-10348	67	36	equations	equation	NOUN
app01-10348	67	37	1	1	NUM
app01-10348	67	38	and	and	CCONJ
app01-10348	67	39	2	2	NUM
app01-10348	67	40	:	:	PUNCT
app01-10348	67	41	∆ω	∆ω	NOUN
app01-10348	67	42	=	=	SYM
app01-10348	67	43	1	1	NUM
app01-10348	67	44	2ω0	2ω0	NUM
app01-10348	67	45	[	[	PUNCT
app01-10348	67	46	[	[	X
app01-10348	67	47	ps12	ps12	PROPN
app01-10348	67	48	+	+	NUM
app01-10348	67	49	q(s11	q(s11	NOUN
app01-10348	67	50	+	+	CCONJ
app01-10348	67	51	s12	s12	PROPN
app01-10348	67	52	)	)	PUNCT
app01-10348	67	53	]	]	PUNCT
app01-10348	68	1	]	]	PUNCT
app01-10348	69	1	σ	σ	X
app01-10348	69	2	=	=	SYM
app01-10348	69	3	(	(	PUNCT
app01-10348	69	4	ssc)σ	ssc)σ	PROPN
app01-10348	69	5	,	,	PUNCT
app01-10348	69	6	(	(	PUNCT
app01-10348	69	7	1	1	X
app01-10348	69	8	)	)	PUNCT
app01-10348	69	9	∆ω	∆ω	NOUN
app01-10348	69	10	=	=	SYM
app01-10348	70	1	−1.93	−1.93	ADP
app01-10348	70	2	×	×	NOUN
app01-10348	70	3	10−9	10−9	NUM
app01-10348	70	4	×	×	NOUN
app01-10348	70	5	(	(	PUNCT
app01-10348	70	6	σ[pa	σ[pa	PROPN
app01-10348	70	7	]	]	X
app01-10348	70	8	)	)	PUNCT
app01-10348	70	9	,	,	PUNCT
app01-10348	70	10	(	(	PUNCT
app01-10348	70	11	2	2	X
app01-10348	70	12	)	)	PUNCT
app01-10348	70	13	where	where	SCONJ
app01-10348	70	14	s11	s11	NOUN
app01-10348	70	15	and	and	CCONJ
app01-10348	70	16	s12	s12	NOUN
app01-10348	70	17	are	be	AUX
app01-10348	70	18	the	the	DET
app01-10348	70	19	elastic	elastic	ADJ
app01-10348	70	20	constants	constant	NOUN
app01-10348	70	21	,	,	PUNCT
app01-10348	70	22	p	p	NOUN
app01-10348	70	23	and	and	CCONJ
app01-10348	70	24	q	q	NOUN
app01-10348	70	25	are	be	AUX
app01-10348	70	26	the	the	DET
app01-10348	70	27	phonon	phonon	NOUN
app01-10348	70	28	deformation	deformation	NOUN
app01-10348	70	29	profiles	profile	NOUN
app01-10348	70	30	.	.	PUNCT
app01-10348	71	1	the	the	DET
app01-10348	71	2	stress	stress	NOUN
app01-10348	71	3	shift	shift	NOUN
app01-10348	71	4	coefficient	coefficient	NOUN
app01-10348	71	5	(	(	PUNCT
app01-10348	71	6	ssc	ssc	NOUN
app01-10348	71	7	)	)	PUNCT
app01-10348	71	8	is	be	AUX
app01-10348	71	9	calculate	calculate	NOUN
app01-10348	71	10	using	use	VERB
app01-10348	71	11	s11	s11	NOUN
app01-10348	71	12	=	=	SYM
app01-10348	71	13	7.68×10−12	7.68×10−12	PROPN
app01-10348	71	14	pa−1	pa−1	NOUN
app01-10348	71	15	and	and	CCONJ
app01-10348	71	16	s12	s12	NOUN
app01-10348	71	17	=	=	SYM
app01-10348	72	1	−2.14	−2.14	ADP
app01-10348	72	2	×	×	PROPN
app01-10348	72	3	10−12	10−12	NOUN
app01-10348	72	4	pa−1	pa−1	NOUN
app01-10348	72	5	for	for	ADP
app01-10348	72	6	quantifying	quantify	VERB
app01-10348	72	7	the	the	DET
app01-10348	72	8	stress	stress	NOUN
app01-10348	72	9	via	via	ADP
app01-10348	72	10	raman	raman	NOUN
app01-10348	72	11	shift	shift	NOUN
app01-10348	72	12	given	give	VERB
app01-10348	72	13	as	as	ADP
app01-10348	72	14	∆ω	∆ω	PROPN
app01-10348	72	15	(	(	PUNCT
app01-10348	72	16	ω0	ω0	PROPN
app01-10348	72	17	represents	represent	VERB
app01-10348	72	18	unstrained	unstrained	ADJ
app01-10348	72	19	si	si	PROPN
app01-10348	72	20	peak	peak	NOUN
app01-10348	72	21	)	)	PUNCT
app01-10348	72	22	.	.	PUNCT
app01-10348	73	1	to	to	PART
app01-10348	73	2	accomplish	accomplish	VERB
app01-10348	73	3	this	this	PRON
app01-10348	73	4	,	,	PUNCT
app01-10348	73	5	line	line	NOUN
app01-10348	73	6	scans	scan	NOUN
app01-10348	73	7	are	be	AUX
app01-10348	73	8	performed	perform	VERB
app01-10348	73	9	along	along	ADP
app01-10348	73	10	both	both	CCONJ
app01-10348	73	11	the	the	DET
app01-10348	73	12	si	si	PROPN
app01-10348	73	13	nw	nw	PROPN
app01-10348	73	14	and	and	CCONJ
app01-10348	73	15	support	support	VERB
app01-10348	73	16	pillars	pillar	NOUN
app01-10348	73	17	,	,	PUNCT
app01-10348	73	18	with	with	ADP
app01-10348	73	19	the	the	DET
app01-10348	73	20	latter	latter	ADJ
app01-10348	73	21	serving	serve	VERB
app01-10348	73	22	as	as	ADP
app01-10348	73	23	a	a	DET
app01-10348	73	24	reference	reference	NOUN
app01-10348	73	25	for	for	ADP
app01-10348	73	26	bulk	bulk	ADJ
app01-10348	73	27	measurement	measurement	NOUN
app01-10348	73	28	.	.	PUNCT
app01-10348	74	1	the	the	DET
app01-10348	74	2	outcome	outcome	NOUN
app01-10348	74	3	of	of	ADP
app01-10348	74	4	line	line	NOUN
app01-10348	74	5	scans	scan	NOUN
app01-10348	74	6	for	for	ADP
app01-10348	74	7	the	the	DET
app01-10348	74	8	support	support	NOUN
app01-10348	74	9	pillars	pillar	NOUN
app01-10348	74	10	and	and	CCONJ
app01-10348	74	11	si	si	PROPN
app01-10348	74	12	nw	nw	PROPN
app01-10348	74	13	is	be	AUX
app01-10348	74	14	used	use	VERB
app01-10348	74	15	for	for	ADP
app01-10348	74	16	the	the	DET
app01-10348	74	17	calculation	calculation	NOUN
app01-10348	74	18	of	of	ADP
app01-10348	74	19	the	the	DET
app01-10348	74	20	raman	raman	NOUN
app01-10348	74	21	shift	shift	NOUN
app01-10348	74	22	.	.	PUNCT
app01-10348	75	1	a	a	DET
app01-10348	75	2	lorentz	lorentz	PROPN
app01-10348	75	3	model	model	NOUN
app01-10348	75	4	is	be	AUX
app01-10348	75	5	applied	apply	VERB
app01-10348	75	6	to	to	PART
app01-10348	75	7	fit	fit	VERB
app01-10348	75	8	the	the	DET
app01-10348	75	9	raman	raman	NOUN
app01-10348	75	10	peaks	peak	NOUN
app01-10348	75	11	of	of	ADP
app01-10348	75	12	nws	nws	PROPN
app01-10348	75	13	under	under	ADP
app01-10348	75	14	tension	tension	NOUN
app01-10348	75	15	.	.	PUNCT
app01-10348	76	1	further	further	ADJ
app01-10348	76	2	details	detail	NOUN
app01-10348	76	3	concerning	concern	VERB
app01-10348	76	4	the	the	DET
app01-10348	76	5	determination	determination	NOUN
app01-10348	76	6	of	of	ADP
app01-10348	76	7	stress	stress	NOUN
app01-10348	76	8	induced	induce	VERB
app01-10348	76	9	by	by	ADP
app01-10348	76	10	native	native	ADJ
app01-10348	76	11	oxide	oxide	NOUN
app01-10348	76	12	formation	formation	NOUN
app01-10348	76	13	and	and	CCONJ
app01-10348	76	14	comparative	comparative	ADJ
app01-10348	76	15	computational	computational	ADJ
app01-10348	76	16	investigations	investigation	NOUN
app01-10348	76	17	can	can	AUX
app01-10348	76	18	be	be	AUX
app01-10348	76	19	found	find	VERB
app01-10348	76	20	elsewhere	elsewhere	ADV
app01-10348	76	21	[	[	X
app01-10348	76	22	6	6	NUM
app01-10348	76	23	,	,	PUNCT
app01-10348	76	24	14	14	NUM
app01-10348	76	25	,	,	PUNCT
app01-10348	76	26	15	15	NUM
app01-10348	76	27	]	]	PUNCT
app01-10348	76	28	.	.	PUNCT
app01-10348	77	1	2.4	2.4	NUM
app01-10348	77	2	.	.	PUNCT
app01-10348	77	3	thermal	thermal	ADJ
app01-10348	77	4	process	process	NOUN
app01-10348	77	5	the	the	DET
app01-10348	77	6	thermal	thermal	ADJ
app01-10348	77	7	processing	processing	NOUN
app01-10348	77	8	is	be	AUX
app01-10348	77	9	conducted	conduct	VERB
app01-10348	77	10	utilizing	utilize	VERB
app01-10348	77	11	a	a	DET
app01-10348	77	12	solaris	solaris	ADJ
app01-10348	77	13	150	150	NUM
app01-10348	77	14	mm	mm	NOUN
app01-10348	77	15	rapid	rapid	ADJ
app01-10348	77	16	thermal	thermal	ADJ
app01-10348	77	17	process	process	NOUN
app01-10348	77	18	oven	oven	VERB
app01-10348	77	19	.	.	PUNCT
app01-10348	78	1	to	to	PART
app01-10348	78	2	guarantee	guarantee	VERB
app01-10348	78	3	figure	figure	NOUN
app01-10348	78	4	2	2	NUM
app01-10348	78	5	.	.	PUNCT
app01-10348	79	1	a	a	DET
app01-10348	79	2	array	array	NOUN
app01-10348	79	3	of	of	ADP
app01-10348	79	4	si	si	PROPN
app01-10348	79	5	nws	nws	PROPN
app01-10348	79	6	connected	connect	VERB
app01-10348	79	7	to	to	ADP
app01-10348	79	8	triangular	triangular	NOUN
app01-10348	79	9	supports	support	NOUN
app01-10348	79	10	with	with	ADP
app01-10348	79	11	an	an	DET
app01-10348	79	12	etch	etch	NOUN
app01-10348	79	13	depth	depth	NOUN
app01-10348	79	14	of	of	ADP
app01-10348	79	15	5	5	NUM
app01-10348	79	16	µm	µm	NOUN
app01-10348	79	17	(	(	PUNCT
app01-10348	79	18	achieved	achieve	VERB
app01-10348	79	19	through	through	ADP
app01-10348	79	20	the	the	DET
app01-10348	79	21	fabrication	fabrication	NOUN
app01-10348	79	22	procedure	procedure	NOUN
app01-10348	79	23	detailed	detail	VERB
app01-10348	79	24	in	in	ADP
app01-10348	79	25	section	section	NOUN
app01-10348	79	26	2.1	2.1	NUM
app01-10348	79	27	)	)	PUNCT
app01-10348	79	28	,	,	PUNCT
app01-10348	79	29	exhibiting	exhibit	VERB
app01-10348	79	30	consistent	consistent	ADJ
app01-10348	79	31	width	width	NOUN
app01-10348	79	32	,	,	PUNCT
app01-10348	79	33	thickness	thickness	NOUN
app01-10348	79	34	,	,	PUNCT
app01-10348	79	35	and	and	CCONJ
app01-10348	79	36	length	length	NOUN
app01-10348	79	37	.	.	PUNCT
app01-10348	80	1	the	the	DET
app01-10348	80	2	si	si	PROPN
app01-10348	80	3	nws	nws	PROPN
app01-10348	80	4	measure	measure	NOUN
app01-10348	80	5	500	500	NUM
app01-10348	80	6	nm	nm	NOUN
app01-10348	80	7	in	in	ADP
app01-10348	80	8	thickness	thickness	NOUN
app01-10348	80	9	,	,	PUNCT
app01-10348	80	10	1000	1000	NUM
app01-10348	80	11	nm	nm	NOUN
app01-10348	80	12	in	in	ADP
app01-10348	80	13	height	height	NOUN
app01-10348	80	14	,	,	PUNCT
app01-10348	80	15	and	and	CCONJ
app01-10348	80	16	15	15	NUM
app01-10348	80	17	µm	µm	NOUN
app01-10348	80	18	in	in	ADP
app01-10348	80	19	length	length	NOUN
app01-10348	80	20	.	.	PUNCT
app01-10348	81	1	temperature	temperature	NOUN
app01-10348	81	2	stability	stability	NOUN
app01-10348	81	3	,	,	PUNCT
app01-10348	81	4	preliminary	preliminary	ADJ
app01-10348	81	5	processes	process	NOUN
app01-10348	81	6	are	be	AUX
app01-10348	81	7	executed	execute	VERB
app01-10348	81	8	without	without	ADP
app01-10348	81	9	the	the	DET
app01-10348	81	10	sample	sample	NOUN
app01-10348	81	11	before	before	SCONJ
app01-10348	81	12	the	the	DET
app01-10348	81	13	actual	actual	ADJ
app01-10348	81	14	processing	processing	NOUN
app01-10348	81	15	begins	begin	VERB
app01-10348	81	16	.	.	PUNCT
app01-10348	82	1	nitrogen	nitrogen	NOUN
app01-10348	82	2	gas	gas	NOUN
app01-10348	82	3	is	be	AUX
app01-10348	82	4	continuously	continuously	ADV
app01-10348	82	5	introduced	introduce	VERB
app01-10348	82	6	into	into	ADP
app01-10348	82	7	the	the	DET
app01-10348	82	8	chamber	chamber	NOUN
app01-10348	82	9	throughout	throughout	ADP
app01-10348	82	10	the	the	DET
app01-10348	82	11	process	process	NOUN
app01-10348	82	12	at	at	ADP
app01-10348	82	13	a	a	DET
app01-10348	82	14	flow	flow	NOUN
app01-10348	82	15	rate	rate	NOUN
app01-10348	82	16	of	of	ADP
app01-10348	82	17	10	10	NUM
app01-10348	82	18	sccm	sccm	NOUN
app01-10348	82	19	.	.	PUNCT
app01-10348	83	1	the	the	DET
app01-10348	83	2	sample	sample	NOUN
app01-10348	83	3	is	be	AUX
app01-10348	83	4	subjected	subject	VERB
app01-10348	83	5	to	to	ADP
app01-10348	83	6	heating	heating	NOUN
app01-10348	83	7	at	at	ADP
app01-10348	83	8	400	400	NUM
app01-10348	83	9	°	°	ADP
app01-10348	83	10	c	c	NOUN
app01-10348	83	11	for	for	ADP
app01-10348	83	12	70	70	NUM
app01-10348	83	13	minutes	minute	NOUN
app01-10348	83	14	,	,	PUNCT
app01-10348	83	15	with	with	ADP
app01-10348	83	16	an	an	DET
app01-10348	83	17	initial	initial	ADJ
app01-10348	83	18	ramp	ramp	NOUN
app01-10348	83	19	rate	rate	NOUN
app01-10348	83	20	of	of	ADP
app01-10348	83	21	150	150	NUM
app01-10348	83	22	°	°	NOUN
app01-10348	83	23	c	c	ADP
app01-10348	83	24	sec−1	sec−1	PROPN
app01-10348	83	25	until	until	SCONJ
app01-10348	83	26	the	the	DET
app01-10348	83	27	desired	desire	VERB
app01-10348	83	28	temperature	temperature	NOUN
app01-10348	83	29	is	be	AUX
app01-10348	83	30	attained	attain	VERB
app01-10348	83	31	.	.	PUNCT
app01-10348	84	1	the	the	DET
app01-10348	84	2	stress	stress	NOUN
app01-10348	84	3	generated	generate	VERB
app01-10348	84	4	in	in	ADP
app01-10348	84	5	si	si	PROPN
app01-10348	84	6	nws	nws	PROPN
app01-10348	84	7	is	be	AUX
app01-10348	84	8	anticipated	anticipate	VERB
app01-10348	84	9	due	due	ADP
app01-10348	84	10	to	to	ADP
app01-10348	84	11	the	the	DET
app01-10348	84	12	confined	confine	VERB
app01-10348	84	13	size	size	NOUN
app01-10348	84	14	of	of	ADP
app01-10348	84	15	the	the	DET
app01-10348	84	16	nanostructures	nanostructure	NOUN
app01-10348	84	17	when	when	SCONJ
app01-10348	84	18	subjected	subject	VERB
app01-10348	84	19	to	to	ADP
app01-10348	84	20	heating	heating	NOUN
app01-10348	84	21	in	in	ADP
app01-10348	84	22	a	a	DET
app01-10348	84	23	double	double	ADJ
app01-10348	84	24	-	-	PUNCT
app01-10348	84	25	clamped	clamp	VERB
app01-10348	84	26	configuration	configuration	NOUN
app01-10348	84	27	[	[	X
app01-10348	84	28	6	6	NUM
app01-10348	84	29	,	,	PUNCT
app01-10348	84	30	14	14	NUM
app01-10348	84	31	]	]	PUNCT
app01-10348	84	32	.	.	PUNCT
app01-10348	85	1	its	its	PRON
app01-10348	85	2	existence	existence	NOUN
app01-10348	85	3	can	can	AUX
app01-10348	85	4	be	be	AUX
app01-10348	85	5	easily	easily	ADV
app01-10348	85	6	misinterpreted	misinterpret	VERB
app01-10348	85	7	as	as	ADP
app01-10348	85	8	an	an	DET
app01-10348	85	9	increase	increase	NOUN
app01-10348	85	10	or	or	CCONJ
app01-10348	85	11	reduction	reduction	NOUN
app01-10348	85	12	of	of	ADP
app01-10348	85	13	resonator	resonator	NOUN
app01-10348	85	14	modulus	modulus	NOUN
app01-10348	85	15	of	of	ADP
app01-10348	85	16	elasticity	elasticity	NOUN
app01-10348	85	17	in	in	ADP
app01-10348	85	18	the	the	DET
app01-10348	85	19	case	case	NOUN
app01-10348	85	20	of	of	ADP
app01-10348	85	21	tensile	tensile	NOUN
app01-10348	85	22	or	or	CCONJ
app01-10348	85	23	compressive	compressive	ADJ
app01-10348	85	24	stresses	stress	NOUN
app01-10348	85	25	,	,	PUNCT
app01-10348	85	26	respectively	respectively	ADV
app01-10348	85	27	.	.	PUNCT
app01-10348	86	1	3	3	X
app01-10348	86	2	.	.	NOUN
app01-10348	86	3	results	result	VERB
app01-10348	86	4	the	the	DET
app01-10348	86	5	results	result	NOUN
app01-10348	86	6	of	of	ADP
app01-10348	86	7	the	the	DET
app01-10348	86	8	si	si	PROPN
app01-10348	86	9	nws	nws	PROPN
app01-10348	86	10	fabrication	fabrication	NOUN
app01-10348	86	11	process	process	NOUN
app01-10348	86	12	are	be	AUX
app01-10348	86	13	detailed	detail	VERB
app01-10348	86	14	in	in	ADP
app01-10348	86	15	section	section	NOUN
app01-10348	86	16	3.1	3.1	NUM
app01-10348	86	17	.	.	PUNCT
app01-10348	87	1	furthermore	furthermore	ADV
app01-10348	87	2	,	,	PUNCT
app01-10348	87	3	section	section	NOUN
app01-10348	87	4	3.2	3.2	NUM
app01-10348	87	5	presents	present	VERB
app01-10348	87	6	discussions	discussion	NOUN
app01-10348	87	7	on	on	ADP
app01-10348	87	8	raman	raman	NOUN
app01-10348	87	9	characterization	characterization	NOUN
app01-10348	87	10	and	and	CCONJ
app01-10348	87	11	resonance	resonance	NOUN
app01-10348	87	12	testing	test	VERB
app01-10348	87	13	outcomes	outcome	NOUN
app01-10348	87	14	.	.	PUNCT
app01-10348	88	1	3.1	3.1	NUM
app01-10348	88	2	.	.	PUNCT
app01-10348	88	3	fabrication	fabrication	NOUN
app01-10348	88	4	of	of	ADP
app01-10348	88	5	si	si	PROPN
app01-10348	88	6	nws	nws	PROPN
app01-10348	88	7	the	the	DET
app01-10348	88	8	co	co	NOUN
app01-10348	88	9	-	-	NOUN
app01-10348	88	10	fabrication	fabrication	NOUN
app01-10348	88	11	method	method	NOUN
app01-10348	88	12	employed	employ	VERB
app01-10348	88	13	for	for	ADP
app01-10348	88	14	si	si	PROPN
app01-10348	88	15	nws	nws	PROPN
app01-10348	88	16	enables	enable	VERB
app01-10348	88	17	the	the	DET
app01-10348	88	18	creation	creation	NOUN
app01-10348	88	19	of	of	ADP
app01-10348	88	20	multiple	multiple	ADJ
app01-10348	88	21	samples	sample	NOUN
app01-10348	88	22	on	on	ADP
app01-10348	88	23	a	a	DET
app01-10348	88	24	single	single	ADJ
app01-10348	88	25	chip	chip	NOUN
app01-10348	88	26	,	,	PUNCT
app01-10348	88	27	allowing	allow	VERB
app01-10348	88	28	for	for	ADP
app01-10348	88	29	subsequent	subsequent	ADJ
app01-10348	88	30	resonance	resonance	NOUN
app01-10348	88	31	testing	testing	NOUN
app01-10348	88	32	following	follow	VERB
app01-10348	88	33	comprehensive	comprehensive	ADJ
app01-10348	88	34	structural	structural	ADJ
app01-10348	88	35	and	and	CCONJ
app01-10348	88	36	intrinsic	intrinsic	ADJ
app01-10348	88	37	stress	stress	NOUN
app01-10348	88	38	characterizations	characterization	NOUN
app01-10348	88	39	conducted	conduct	VERB
app01-10348	88	40	using	use	VERB
app01-10348	88	41	sem	sem	NOUN
app01-10348	88	42	and	and	CCONJ
app01-10348	88	43	raman	raman	ADJ
app01-10348	88	44	setups	setup	NOUN
app01-10348	88	45	.	.	PUNCT
app01-10348	89	1	this	this	DET
app01-10348	89	2	fabrication	fabrication	NOUN
app01-10348	89	3	approach	approach	NOUN
app01-10348	89	4	facilitates	facilitate	VERB
app01-10348	89	5	the	the	DET
app01-10348	89	6	production	production	NOUN
app01-10348	89	7	of	of	ADP
app01-10348	89	8	si	si	PROPN
app01-10348	89	9	nws	nws	PROPN
app01-10348	89	10	with	with	ADP
app01-10348	89	11	consistent	consistent	ADJ
app01-10348	89	12	geometric	geometric	ADJ
app01-10348	89	13	and	and	CCONJ
app01-10348	89	14	lithographic	lithographic	ADJ
app01-10348	89	15	configurations	configuration	NOUN
app01-10348	89	16	on	on	ADP
app01-10348	89	17	a	a	DET
app01-10348	89	18	single	single	ADJ
app01-10348	89	19	stress	stress	NOUN
app01-10348	89	20	-	-	PUNCT
app01-10348	89	21	free	free	ADJ
app01-10348	89	22	si	si	NOUN
app01-10348	89	23	substrate	substrate	NOUN
app01-10348	89	24	,	,	PUNCT
app01-10348	89	25	referred	refer	VERB
app01-10348	89	26	to	to	ADP
app01-10348	89	27	as	as	ADP
app01-10348	89	28	dut	dut	PROPN
app01-10348	89	29	,	,	PUNCT
app01-10348	89	30	which	which	PRON
app01-10348	89	31	in	in	ADP
app01-10348	89	32	turn	turn	NOUN
app01-10348	89	33	allows	allow	VERB
app01-10348	89	34	for	for	ADP
app01-10348	89	35	detailed	detailed	ADJ
app01-10348	89	36	testing	testing	NOUN
app01-10348	89	37	and	and	CCONJ
app01-10348	89	38	characterization	characterization	NOUN
app01-10348	89	39	.	.	PUNCT
app01-10348	90	1	as	as	SCONJ
app01-10348	90	2	illustrated	illustrate	VERB
app01-10348	90	3	in	in	ADP
app01-10348	90	4	figure	figure	NOUN
app01-10348	90	5	2	2	NUM
app01-10348	90	6	,	,	PUNCT
app01-10348	90	7	si	si	PROPN
app01-10348	90	8	nws	nws	PROPN
app01-10348	90	9	with	with	ADP
app01-10348	90	10	uniform	uniform	ADJ
app01-10348	90	11	fabrication	fabrication	NOUN
app01-10348	90	12	processes	process	NOUN
app01-10348	90	13	are	be	AUX
app01-10348	90	14	produced	produce	VERB
app01-10348	90	15	in	in	ADP
app01-10348	90	16	close	close	ADJ
app01-10348	90	17	proximity	proximity	NOUN
app01-10348	90	18	using	use	VERB
app01-10348	90	19	the	the	DET
app01-10348	90	20	methodology	methodology	NOUN
app01-10348	90	21	outlined	outline	VERB
app01-10348	90	22	in	in	ADP
app01-10348	90	23	section	section	NOUN
app01-10348	90	24	2.1	2.1	NUM
app01-10348	90	25	.	.	PUNCT
app01-10348	91	1	here	here	ADV
app01-10348	91	2	,	,	PUNCT
app01-10348	91	3	the	the	DET
app01-10348	91	4	use	use	NOUN
app01-10348	91	5	of	of	ADP
app01-10348	91	6	low	low	ADJ
app01-10348	91	7	-	-	PUNCT
app01-10348	91	8	temperature	temperature	NOUN
app01-10348	91	9	processes	process	NOUN
app01-10348	91	10	and	and	CCONJ
app01-10348	91	11	the	the	DET
app01-10348	91	12	ability	ability	NOUN
app01-10348	91	13	to	to	PART
app01-10348	91	14	achieve	achieve	VERB
app01-10348	91	15	multiple	multiple	ADJ
app01-10348	91	16	samples	sample	NOUN
app01-10348	91	17	within	within	ADP
app01-10348	91	18	a	a	DET
app01-10348	91	19	single	single	ADJ
app01-10348	91	20	fabrication	fabrication	NOUN
app01-10348	91	21	process	process	NOUN
app01-10348	91	22	,	,	PUNCT
app01-10348	91	23	incorporating	incorporate	VERB
app01-10348	91	24	mems	mem	NOUN
app01-10348	91	25	-	-	PUNCT
app01-10348	91	26	level	level	NOUN
app01-10348	91	27	structures	structure	NOUN
app01-10348	91	28	as	as	ADP
app01-10348	91	29	support	support	NOUN
app01-10348	91	30	pillars	pillar	NOUN
app01-10348	91	31	and	and	CCONJ
app01-10348	91	32	nemslevel	nemslevel	ADJ
app01-10348	91	33	features	feature	NOUN
app01-10348	91	34	as	as	ADP
app01-10348	91	35	si	si	PROPN
app01-10348	91	36	nws	nws	PROPN
app01-10348	91	37	,	,	PUNCT
app01-10348	91	38	are	be	AUX
app01-10348	91	39	critical	critical	ADJ
app01-10348	91	40	aspects	aspect	NOUN
app01-10348	91	41	of	of	ADP
app01-10348	91	42	this	this	DET
app01-10348	91	43	methodology	methodology	NOUN
app01-10348	91	44	.	.	PUNCT
app01-10348	92	1	figure	figure	NOUN
app01-10348	92	2	2	2	NUM
app01-10348	92	3	showcases	showcase	NOUN
app01-10348	92	4	an	an	DET
app01-10348	92	5	array	array	NOUN
app01-10348	92	6	of	of	ADP
app01-10348	92	7	si	si	PROPN
app01-10348	92	8	nws	nws	PROPN
app01-10348	92	9	76	76	NUM
app01-10348	92	10	vol	vol	NOUN
app01-10348	92	11	.	.	PUNCT
app01-10348	93	1	50/2024	50/2024	NUM
app01-10348	93	2	intrinsic	intrinsic	ADJ
app01-10348	93	3	stress	stress	NOUN
app01-10348	93	4	effects	effect	NOUN
app01-10348	93	5	on	on	ADP
app01-10348	93	6	vibrational	vibrational	ADJ
app01-10348	93	7	response	response	NOUN
app01-10348	93	8	of	of	ADP
app01-10348	93	9	si	si	PROPN
app01-10348	93	10	nws	nws	PROPN
app01-10348	93	11	with	with	ADP
app01-10348	93	12	dimensions	dimension	NOUN
app01-10348	93	13	of	of	ADP
app01-10348	93	14	500	500	NUM
app01-10348	93	15	nm	nm	NOUN
app01-10348	93	16	in	in	ADP
app01-10348	93	17	thickness	thickness	NOUN
app01-10348	93	18	,	,	PUNCT
app01-10348	93	19	1000	1000	NUM
app01-10348	93	20	nm	nm	NOUN
app01-10348	93	21	in	in	ADP
app01-10348	93	22	height	height	NOUN
app01-10348	93	23	,	,	PUNCT
app01-10348	93	24	and	and	CCONJ
app01-10348	93	25	15	15	NUM
app01-10348	93	26	µm	µm	NOUN
app01-10348	93	27	in	in	ADP
app01-10348	93	28	length	length	NOUN
app01-10348	93	29	.	.	PUNCT
app01-10348	94	1	these	these	DET
app01-10348	94	2	si	si	PROPN
app01-10348	94	3	nw	nw	PROPN
app01-10348	94	4	structures	structure	NOUN
app01-10348	94	5	are	be	AUX
app01-10348	94	6	co	co	VERB
app01-10348	94	7	-	-	VERB
app01-10348	94	8	fabricated	fabricate	VERB
app01-10348	94	9	with	with	ADP
app01-10348	94	10	an	an	DET
app01-10348	94	11	etch	etch	NOUN
app01-10348	94	12	depth	depth	NOUN
app01-10348	94	13	of	of	ADP
app01-10348	94	14	5	5	NUM
app01-10348	94	15	µm	µm	NOUN
app01-10348	94	16	,	,	PUNCT
app01-10348	94	17	allowing	allow	VERB
app01-10348	94	18	for	for	ADP
app01-10348	94	19	sufficient	sufficient	ADJ
app01-10348	94	20	space	space	NOUN
app01-10348	94	21	for	for	ADP
app01-10348	94	22	subsequent	subsequent	ADJ
app01-10348	94	23	testing	testing	NOUN
app01-10348	94	24	procedures	procedure	NOUN
app01-10348	94	25	.	.	PUNCT
app01-10348	95	1	the	the	DET
app01-10348	95	2	developed	develop	VERB
app01-10348	95	3	process	process	NOUN
app01-10348	95	4	flow	flow	NOUN
app01-10348	95	5	demonstrates	demonstrate	VERB
app01-10348	95	6	notable	notable	ADJ
app01-10348	95	7	repeatability	repeatability	NOUN
app01-10348	95	8	,	,	PUNCT
app01-10348	95	9	resulting	result	VERB
app01-10348	95	10	in	in	ADP
app01-10348	95	11	a	a	DET
app01-10348	95	12	high	high	ADJ
app01-10348	95	13	-	-	PUNCT
app01-10348	95	14	yield	yield	NOUN
app01-10348	95	15	process	process	NOUN
app01-10348	95	16	that	that	PRON
app01-10348	95	17	facilitates	facilitate	VERB
app01-10348	95	18	the	the	DET
app01-10348	95	19	evaluation	evaluation	NOUN
app01-10348	95	20	of	of	ADP
app01-10348	95	21	si	si	PROPN
app01-10348	95	22	nws	nws	PROPN
app01-10348	95	23	with	with	ADP
app01-10348	95	24	desired	desire	VERB
app01-10348	95	25	dimensions	dimension	NOUN
app01-10348	95	26	.	.	PUNCT
app01-10348	96	1	the	the	DET
app01-10348	96	2	fabrication	fabrication	NOUN
app01-10348	96	3	technique	technique	NOUN
app01-10348	96	4	eliminates	eliminate	VERB
app01-10348	96	5	the	the	DET
app01-10348	96	6	need	need	NOUN
app01-10348	96	7	for	for	ADP
app01-10348	96	8	additional	additional	ADJ
app01-10348	96	9	processes	process	NOUN
app01-10348	96	10	,	,	PUNCT
app01-10348	96	11	ensuring	ensure	VERB
app01-10348	96	12	that	that	SCONJ
app01-10348	96	13	si	si	PROPN
app01-10348	96	14	nws	nws	PROPN
app01-10348	96	15	can	can	AUX
app01-10348	96	16	undergo	undergo	VERB
app01-10348	96	17	deformations	deformation	NOUN
app01-10348	96	18	in	in	ADP
app01-10348	96	19	different	different	ADJ
app01-10348	96	20	directions	direction	NOUN
app01-10348	96	21	relative	relative	ADJ
app01-10348	96	22	to	to	ADP
app01-10348	96	23	the	the	DET
app01-10348	96	24	modal	modal	ADJ
app01-10348	96	25	resonance	resonance	NOUN
app01-10348	96	26	state	state	NOUN
app01-10348	96	27	.	.	PUNCT
app01-10348	97	1	furthermore	furthermore	ADV
app01-10348	97	2	,	,	PUNCT
app01-10348	97	3	each	each	DET
app01-10348	97	4	si	si	PROPN
app01-10348	97	5	nw	nw	PROPN
app01-10348	97	6	under	under	ADP
app01-10348	97	7	examination	examination	NOUN
app01-10348	97	8	undergoes	undergoe	NOUN
app01-10348	97	9	sem	sem	PROPN
app01-10348	97	10	,	,	PUNCT
app01-10348	97	11	resonance	resonance	NOUN
app01-10348	97	12	testing	testing	NOUN
app01-10348	97	13	,	,	PUNCT
app01-10348	97	14	and	and	CCONJ
app01-10348	97	15	raman	raman	VERB
app01-10348	97	16	analysis	analysis	NOUN
app01-10348	97	17	before	before	ADP
app01-10348	97	18	the	the	DET
app01-10348	97	19	thermal	thermal	ADJ
app01-10348	97	20	processing	processing	NOUN
app01-10348	97	21	step	step	NOUN
app01-10348	97	22	described	describe	VERB
app01-10348	97	23	in	in	ADP
app01-10348	97	24	section	section	NOUN
app01-10348	97	25	2.4	2.4	NUM
app01-10348	97	26	.	.	PUNCT
app01-10348	98	1	subsequently	subsequently	ADV
app01-10348	98	2	,	,	PUNCT
app01-10348	98	3	these	these	DET
app01-10348	98	4	analyses	analysis	NOUN
app01-10348	98	5	are	be	AUX
app01-10348	98	6	repeated	repeat	VERB
app01-10348	98	7	after	after	SCONJ
app01-10348	98	8	the	the	DET
app01-10348	98	9	thermal	thermal	ADJ
app01-10348	98	10	process	process	NOUN
app01-10348	98	11	is	be	AUX
app01-10348	98	12	conducted	conduct	VERB
app01-10348	98	13	to	to	PART
app01-10348	98	14	induce	induce	VERB
app01-10348	98	15	residual	residual	ADJ
app01-10348	98	16	stress	stress	NOUN
app01-10348	98	17	into	into	ADP
app01-10348	98	18	the	the	DET
app01-10348	98	19	si	si	PROPN
app01-10348	98	20	nws	nws	PROPN
app01-10348	98	21	,	,	PUNCT
app01-10348	98	22	allowing	allow	VERB
app01-10348	98	23	for	for	ADP
app01-10348	98	24	a	a	DET
app01-10348	98	25	thorough	thorough	ADJ
app01-10348	98	26	investigation	investigation	NOUN
app01-10348	98	27	of	of	ADP
app01-10348	98	28	changes	change	NOUN
app01-10348	98	29	in	in	ADP
app01-10348	98	30	raman	raman	NOUN
app01-10348	98	31	and	and	CCONJ
app01-10348	98	32	resonance	resonance	NOUN
app01-10348	98	33	frequency	frequency	NOUN
app01-10348	98	34	shifts	shift	NOUN
app01-10348	98	35	,	,	PUNCT
app01-10348	98	36	which	which	PRON
app01-10348	98	37	will	will	AUX
app01-10348	98	38	be	be	AUX
app01-10348	98	39	discussed	discuss	VERB
app01-10348	98	40	in	in	ADP
app01-10348	98	41	section	section	NOUN
app01-10348	98	42	3.2	3.2	NUM
app01-10348	98	43	.	.	PUNCT
app01-10348	99	1	further	further	ADJ
app01-10348	99	2	details	detail	NOUN
app01-10348	99	3	on	on	ADP
app01-10348	99	4	the	the	DET
app01-10348	99	5	fabrication	fabrication	NOUN
app01-10348	99	6	of	of	ADP
app01-10348	99	7	such	such	ADJ
app01-10348	99	8	si	si	PROPN
app01-10348	99	9	nws	nws	PROPN
app01-10348	99	10	can	can	AUX
app01-10348	99	11	be	be	AUX
app01-10348	99	12	found	find	VERB
app01-10348	99	13	elsewhere	elsewhere	ADV
app01-10348	99	14	[	[	X
app01-10348	99	15	27	27	NUM
app01-10348	99	16	]	]	SYM
app01-10348	99	17	.	.	PUNCT
app01-10348	100	1	3.2	3.2	NUM
app01-10348	100	2	.	.	PUNCT
app01-10348	100	3	characterization	characterization	NOUN
app01-10348	100	4	and	and	CCONJ
app01-10348	100	5	testing	testing	NOUN
app01-10348	100	6	of	of	ADP
app01-10348	100	7	si	si	PROPN
app01-10348	100	8	nws	nws	PROPN
app01-10348	100	9	following	follow	VERB
app01-10348	100	10	the	the	DET
app01-10348	100	11	dimensional	dimensional	ADJ
app01-10348	100	12	analysis	analysis	NOUN
app01-10348	100	13	of	of	ADP
app01-10348	100	14	si	si	PROPN
app01-10348	100	15	nws	nws	PROPN
app01-10348	100	16	,	,	PUNCT
app01-10348	100	17	raman	raman	NOUN
app01-10348	100	18	spectroscopy	spectroscopy	NOUN
app01-10348	100	19	is	be	AUX
app01-10348	100	20	employed	employ	VERB
app01-10348	100	21	to	to	PART
app01-10348	100	22	quantify	quantify	VERB
app01-10348	100	23	the	the	DET
app01-10348	100	24	intrinsic	intrinsic	ADJ
app01-10348	100	25	stress	stress	NOUN
app01-10348	100	26	,	,	PUNCT
app01-10348	100	27	denoted	denote	VERB
app01-10348	100	28	as	as	ADP
app01-10348	100	29	σ	σ	PROPN
app01-10348	100	30	,	,	PUNCT
app01-10348	100	31	utilizing	utilize	VERB
app01-10348	100	32	equation	equation	NOUN
app01-10348	100	33	1	1	NUM
app01-10348	100	34	and	and	CCONJ
app01-10348	100	35	equation	equation	NOUN
app01-10348	100	36	2	2	NUM
app01-10348	100	37	.	.	PUNCT
app01-10348	101	1	line	line	NOUN
app01-10348	101	2	scans	scan	NOUN
app01-10348	101	3	are	be	AUX
app01-10348	101	4	conducted	conduct	VERB
app01-10348	101	5	along	along	ADP
app01-10348	101	6	both	both	CCONJ
app01-10348	101	7	the	the	DET
app01-10348	101	8	si	si	PROPN
app01-10348	101	9	nw	nw	PROPN
app01-10348	101	10	and	and	CCONJ
app01-10348	101	11	support	support	VERB
app01-10348	101	12	pillars	pillar	NOUN
app01-10348	101	13	,	,	PUNCT
app01-10348	101	14	with	with	ADP
app01-10348	101	15	the	the	DET
app01-10348	101	16	latter	latter	ADJ
app01-10348	101	17	serving	serve	VERB
app01-10348	101	18	as	as	ADP
app01-10348	101	19	a	a	DET
app01-10348	101	20	reference	reference	NOUN
app01-10348	101	21	for	for	ADP
app01-10348	101	22	bulk	bulk	ADJ
app01-10348	101	23	measurement	measurement	NOUN
app01-10348	101	24	.	.	PUNCT
app01-10348	102	1	figure	figure	NOUN
app01-10348	102	2	3a	3a	PROPN
app01-10348	102	3	illustrates	illustrate	VERB
app01-10348	102	4	the	the	DET
app01-10348	102	5	results	result	NOUN
app01-10348	102	6	of	of	ADP
app01-10348	102	7	these	these	DET
app01-10348	102	8	line	line	NOUN
app01-10348	102	9	scans	scan	NOUN
app01-10348	102	10	,	,	PUNCT
app01-10348	102	11	indicating	indicate	VERB
app01-10348	102	12	raman	raman	ADJ
app01-10348	102	13	shifts	shift	NOUN
app01-10348	102	14	of	of	ADP
app01-10348	102	15	520.24	520.24	NUM
app01-10348	102	16	cm−1	cm−1	NOUN
app01-10348	102	17	and	and	CCONJ
app01-10348	102	18	519.61	519.61	NUM
app01-10348	102	19	cm−1	cm−1	NOUN
app01-10348	102	20	for	for	ADP
app01-10348	102	21	the	the	DET
app01-10348	102	22	support	support	NOUN
app01-10348	102	23	pillars	pillar	NOUN
app01-10348	102	24	and	and	CCONJ
app01-10348	102	25	si	si	PROPN
app01-10348	102	26	nw	nw	PROPN
app01-10348	102	27	before	before	ADP
app01-10348	102	28	the	the	DET
app01-10348	102	29	thermal	thermal	ADJ
app01-10348	102	30	process	process	NOUN
app01-10348	102	31	,	,	PUNCT
app01-10348	102	32	respectively	respectively	ADV
app01-10348	102	33	,	,	PUNCT
app01-10348	102	34	resulting	result	VERB
app01-10348	102	35	in	in	ADP
app01-10348	102	36	a	a	DET
app01-10348	102	37	downshift	downshift	NOUN
app01-10348	102	38	of	of	ADP
app01-10348	102	39	0.62	0.62	NUM
app01-10348	102	40	cm−1	cm−1	NOUN
app01-10348	102	41	.	.	PUNCT
app01-10348	103	1	the	the	DET
app01-10348	103	2	measurements	measurement	NOUN
app01-10348	103	3	are	be	AUX
app01-10348	103	4	repeated	repeat	VERB
app01-10348	103	5	on	on	ADP
app01-10348	103	6	si	si	PROPN
app01-10348	103	7	nws	nws	PROPN
app01-10348	103	8	once	once	SCONJ
app01-10348	103	9	the	the	DET
app01-10348	103	10	thermal	thermal	ADJ
app01-10348	103	11	process	process	NOUN
app01-10348	103	12	is	be	AUX
app01-10348	103	13	completed	complete	VERB
app01-10348	103	14	.	.	PUNCT
app01-10348	104	1	figure	figure	NOUN
app01-10348	104	2	3b	3b	NOUN
app01-10348	104	3	illustrates	illustrate	VERB
app01-10348	104	4	the	the	DET
app01-10348	104	5	results	result	NOUN
app01-10348	104	6	of	of	ADP
app01-10348	104	7	these	these	DET
app01-10348	104	8	line	line	NOUN
app01-10348	104	9	scans	scan	NOUN
app01-10348	104	10	,	,	PUNCT
app01-10348	104	11	indicating	indicate	VERB
app01-10348	104	12	raman	raman	ADJ
app01-10348	104	13	shifts	shift	NOUN
app01-10348	104	14	of	of	ADP
app01-10348	104	15	520.63	520.63	NUM
app01-10348	104	16	cm−1	cm−1	NOUN
app01-10348	104	17	and	and	CCONJ
app01-10348	104	18	517.14	517.14	NUM
app01-10348	104	19	cm−1	cm−1	NOUN
app01-10348	104	20	for	for	ADP
app01-10348	104	21	the	the	DET
app01-10348	104	22	support	support	NOUN
app01-10348	104	23	pillars	pillar	NOUN
app01-10348	104	24	and	and	CCONJ
app01-10348	104	25	si	si	PROPN
app01-10348	104	26	nw	nw	PROPN
app01-10348	104	27	after	after	ADP
app01-10348	104	28	the	the	DET
app01-10348	104	29	thermal	thermal	ADJ
app01-10348	104	30	process	process	NOUN
app01-10348	104	31	,	,	PUNCT
app01-10348	104	32	respectively	respectively	ADV
app01-10348	104	33	,	,	PUNCT
app01-10348	104	34	resulting	result	VERB
app01-10348	104	35	in	in	ADP
app01-10348	104	36	a	a	DET
app01-10348	104	37	downshift	downshift	NOUN
app01-10348	104	38	of	of	ADP
app01-10348	104	39	3.48	3.48	NUM
app01-10348	104	40	cm−1	cm−1	NOUN
app01-10348	104	41	.	.	PUNCT
app01-10348	105	1	given	give	VERB
app01-10348	105	2	the	the	DET
app01-10348	105	3	obtained	obtain	VERB
app01-10348	105	4	raman	raman	ADJ
app01-10348	105	5	shifts	shift	NOUN
app01-10348	105	6	for	for	ADP
app01-10348	105	7	the	the	DET
app01-10348	105	8	si	si	PROPN
app01-10348	105	9	nw	nw	PROPN
app01-10348	105	10	under	under	ADP
app01-10348	105	11	investigation	investigation	NOUN
app01-10348	105	12	before	before	ADP
app01-10348	105	13	and	and	CCONJ
app01-10348	105	14	after	after	ADP
app01-10348	105	15	thermal	thermal	ADJ
app01-10348	105	16	processing	processing	NOUN
app01-10348	105	17	,	,	PUNCT
app01-10348	105	18	figure	figure	NOUN
app01-10348	105	19	4a	4a	NOUN
app01-10348	105	20	and	and	CCONJ
app01-10348	105	21	figure	figure	VERB
app01-10348	105	22	4b	4b	PROPN
app01-10348	105	23	represent	represent	VERB
app01-10348	105	24	the	the	DET
app01-10348	105	25	shifts	shift	NOUN
app01-10348	105	26	obtained	obtain	VERB
app01-10348	105	27	along	along	ADP
app01-10348	105	28	the	the	DET
app01-10348	105	29	nw	nw	PROPN
app01-10348	105	30	longitudinal	longitudinal	ADJ
app01-10348	105	31	axis	axis	NOUN
app01-10348	105	32	,	,	PUNCT
app01-10348	105	33	depicting	depict	VERB
app01-10348	105	34	micropillar	micropillar	ADJ
app01-10348	105	35	supports	support	NOUN
app01-10348	105	36	and	and	CCONJ
app01-10348	105	37	si	si	PROPN
app01-10348	105	38	nws	nws	PROPN
app01-10348	105	39	,	,	PUNCT
app01-10348	105	40	before	before	ADP
app01-10348	105	41	and	and	CCONJ
app01-10348	105	42	after	after	ADP
app01-10348	105	43	the	the	DET
app01-10348	105	44	thermal	thermal	ADJ
app01-10348	105	45	process	process	NOUN
app01-10348	105	46	,	,	PUNCT
app01-10348	105	47	respectively	respectively	ADV
app01-10348	105	48	.	.	PUNCT
app01-10348	106	1	a	a	DET
app01-10348	106	2	lorentz	lorentz	PROPN
app01-10348	106	3	model	model	NOUN
app01-10348	106	4	is	be	AUX
app01-10348	106	5	employed	employ	VERB
app01-10348	106	6	to	to	PART
app01-10348	106	7	fit	fit	VERB
app01-10348	106	8	the	the	DET
app01-10348	106	9	raman	raman	NOUN
app01-10348	106	10	peaks	peak	NOUN
app01-10348	106	11	experiencing	experience	VERB
app01-10348	106	12	tensile	tensile	NOUN
app01-10348	106	13	stress	stress	NOUN
app01-10348	106	14	before	before	ADP
app01-10348	106	15	and	and	CCONJ
app01-10348	106	16	after	after	ADP
app01-10348	106	17	thermal	thermal	ADJ
app01-10348	106	18	processing	processing	NOUN
app01-10348	106	19	with	with	ADP
app01-10348	106	20	different	different	ADJ
app01-10348	106	21	magnitudes	magnitude	NOUN
app01-10348	106	22	.	.	PUNCT
app01-10348	107	1	the	the	DET
app01-10348	107	2	shift	shift	NOUN
app01-10348	107	3	towards	towards	ADP
app01-10348	107	4	lower	low	ADJ
app01-10348	107	5	wavenumbers	wavenumber	NOUN
app01-10348	107	6	indicates	indicate	VERB
app01-10348	107	7	a	a	DET
app01-10348	107	8	tensile	tensile	NOUN
app01-10348	107	9	intrinsic	intrinsic	ADJ
app01-10348	107	10	stress	stress	NOUN
app01-10348	107	11	along	along	ADP
app01-10348	107	12	the	the	DET
app01-10348	107	13	nw	nw	PROPN
app01-10348	107	14	axis	axis	NOUN
app01-10348	107	15	,	,	PUNCT
app01-10348	107	16	with	with	ADP
app01-10348	107	17	a	a	DET
app01-10348	107	18	tensile	tensile	NOUN
app01-10348	107	19	stress	stress	NOUN
app01-10348	107	20	of	of	ADP
app01-10348	107	21	325mpa	325mpa	NUM
app01-10348	107	22	and	and	CCONJ
app01-10348	107	23	1.8gpa	1.8gpa	NOUN
app01-10348	107	24	before	before	ADP
app01-10348	107	25	and	and	CCONJ
app01-10348	107	26	after	after	ADP
app01-10348	107	27	thermal	thermal	ADJ
app01-10348	107	28	processing	processing	NOUN
app01-10348	107	29	,	,	PUNCT
app01-10348	107	30	respectively	respectively	ADV
app01-10348	107	31	.	.	PUNCT
app01-10348	108	1	in	in	ADP
app01-10348	108	2	this	this	DET
app01-10348	108	3	respect	respect	NOUN
app01-10348	108	4	,	,	PUNCT
app01-10348	108	5	the	the	DET
app01-10348	108	6	standard	standard	ADJ
app01-10348	108	7	deviation	deviation	NOUN
app01-10348	108	8	in	in	ADP
app01-10348	108	9	stresses	stress	NOUN
app01-10348	108	10	characterized	characterize	VERB
app01-10348	108	11	before	before	ADP
app01-10348	108	12	and	and	CCONJ
app01-10348	108	13	after	after	ADP
app01-10348	108	14	thermal	thermal	ADJ
app01-10348	108	15	processing	processing	NOUN
app01-10348	108	16	are	be	AUX
app01-10348	108	17	obtained	obtain	VERB
app01-10348	108	18	for	for	ADP
app01-10348	108	19	three	three	NUM
app01-10348	108	20	si	si	PROPN
app01-10348	108	21	nws	nws	PROPN
app01-10348	108	22	,	,	PUNCT
app01-10348	108	23	resulting	result	VERB
app01-10348	108	24	in	in	ADP
app01-10348	108	25	90.7mpa	90.7mpa	PROPN
app01-10348	108	26	and	and	CCONJ
app01-10348	108	27	265.3mpa	265.3mpa	NUM
app01-10348	108	28	,	,	PUNCT
app01-10348	108	29	respectively	respectively	ADV
app01-10348	108	30	.	.	PUNCT
app01-10348	109	1	the	the	DET
app01-10348	109	2	resulting	result	VERB
app01-10348	109	3	stress	stress	NOUN
app01-10348	109	4	,	,	PUNCT
app01-10348	109	5	induced	induce	VERB
app01-10348	109	6	by	by	ADP
app01-10348	109	7	a	a	DET
app01-10348	109	8	thermal	thermal	ADJ
app01-10348	109	9	process	process	NOUN
app01-10348	109	10	and	and	CCONJ
app01-10348	109	11	measured	measure	VERB
app01-10348	109	12	at	at	ADP
app01-10348	109	13	1.4gpa	1.4gpa	NUM
app01-10348	109	14	,	,	PUNCT
app01-10348	109	15	along	along	ADP
app01-10348	109	16	with	with	ADP
app01-10348	109	17	noticeable	noticeable	ADJ
app01-10348	109	18	changes	change	NOUN
app01-10348	109	19	in	in	ADP
app01-10348	109	20	raman	raman	ADJ
app01-10348	109	21	shifts	shift	NOUN
app01-10348	109	22	as	as	SCONJ
app01-10348	109	23	shown	show	VERB
app01-10348	109	24	in	in	ADP
app01-10348	109	25	figure	figure	NOUN
app01-10348	109	26	3	3	NUM
app01-10348	109	27	and	and	CCONJ
app01-10348	109	28	figure	figure	VERB
app01-10348	109	29	4	4	NUM
app01-10348	109	30	,	,	PUNCT
app01-10348	109	31	confirms	confirm	VERB
app01-10348	109	32	the	the	DET
app01-10348	109	33	introduction	introduction	NOUN
app01-10348	109	34	of	of	ADP
app01-10348	109	35	thermal	thermal	ADJ
app01-10348	109	36	effects	effect	NOUN
app01-10348	109	37	into	into	ADP
app01-10348	109	38	the	the	DET
app01-10348	109	39	double	double	ADV
app01-10348	109	40	-	-	PUNCT
app01-10348	109	41	clamped	clamp	VERB
app01-10348	109	42	si	si	PROPN
app01-10348	109	43	nw	nw	PROPN
app01-10348	109	44	configuration	configuration	NOUN
app01-10348	109	45	.	.	PUNCT
app01-10348	110	1	this	this	PRON
app01-10348	110	2	also	also	ADV
app01-10348	110	3	(	(	PUNCT
app01-10348	110	4	a	a	NOUN
app01-10348	110	5	)	)	PUNCT
app01-10348	110	6	.	.	PUNCT
app01-10348	111	1	(	(	PUNCT
app01-10348	111	2	b	b	X
app01-10348	111	3	)	)	PUNCT
app01-10348	111	4	.	.	PUNCT
app01-10348	112	1	figure	figure	VERB
app01-10348	112	2	3	3	NUM
app01-10348	112	3	.	.	PUNCT
app01-10348	112	4	raman	raman	NOUN
app01-10348	112	5	spectra	spectra	PROPN
app01-10348	112	6	obtained	obtain	VERB
app01-10348	112	7	via	via	ADP
app01-10348	112	8	line	line	NOUN
app01-10348	112	9	scans	scan	NOUN
app01-10348	112	10	conducted	conduct	VERB
app01-10348	112	11	on	on	ADP
app01-10348	112	12	suspended	suspend	VERB
app01-10348	112	13	si	si	PROPN
app01-10348	112	14	nws	nws	PROPN
app01-10348	112	15	and	and	CCONJ
app01-10348	112	16	micro	micro	ADJ
app01-10348	112	17	-	-	NOUN
app01-10348	112	18	scale	scale	NOUN
app01-10348	112	19	supports	support	NOUN
app01-10348	112	20	(	(	PUNCT
app01-10348	112	21	a	a	NOUN
app01-10348	112	22	)	)	PUNCT
app01-10348	112	23	before	before	ADP
app01-10348	112	24	and	and	CCONJ
app01-10348	112	25	(	(	PUNCT
app01-10348	112	26	b	b	NOUN
app01-10348	112	27	)	)	PUNCT
app01-10348	112	28	after	after	ADP
app01-10348	112	29	thermal	thermal	ADJ
app01-10348	112	30	processing	processing	NOUN
app01-10348	112	31	.	.	PUNCT
app01-10348	113	1	the	the	DET
app01-10348	113	2	averages	average	NOUN
app01-10348	113	3	associated	associate	VERB
app01-10348	113	4	with	with	ADP
app01-10348	113	5	raman	raman	ADJ
app01-10348	113	6	shifts	shift	NOUN
app01-10348	113	7	for	for	ADP
app01-10348	113	8	si	si	PROPN
app01-10348	113	9	nw	nw	PROPN
app01-10348	113	10	and	and	CCONJ
app01-10348	113	11	supports	support	NOUN
app01-10348	113	12	are	be	AUX
app01-10348	113	13	given	give	VERB
app01-10348	113	14	in	in	ADP
app01-10348	113	15	dashed	dash	VERB
app01-10348	113	16	lines	line	NOUN
app01-10348	113	17	.	.	PUNCT
app01-10348	114	1	underscores	underscore	VERB
app01-10348	114	2	the	the	DET
app01-10348	114	3	accurate	accurate	ADJ
app01-10348	114	4	calibration	calibration	NOUN
app01-10348	114	5	of	of	ADP
app01-10348	114	6	the	the	DET
app01-10348	114	7	raman	raman	NOUN
app01-10348	114	8	analysis	analysis	NOUN
app01-10348	114	9	for	for	ADP
app01-10348	114	10	detecting	detect	VERB
app01-10348	114	11	stresses	stress	NOUN
app01-10348	114	12	present	present	ADJ
app01-10348	114	13	in	in	ADP
app01-10348	114	14	the	the	DET
app01-10348	114	15	sinws	sinws	NOUN
app01-10348	114	16	under	under	ADP
app01-10348	114	17	examination	examination	NOUN
app01-10348	114	18	within	within	ADP
app01-10348	114	19	this	this	DET
app01-10348	114	20	study	study	NOUN
app01-10348	114	21	.	.	PUNCT
app01-10348	115	1	furthermore	furthermore	ADV
app01-10348	115	2	,	,	PUNCT
app01-10348	115	3	resonance	resonance	NOUN
app01-10348	115	4	testing	testing	NOUN
app01-10348	115	5	will	will	AUX
app01-10348	115	6	serve	serve	VERB
app01-10348	115	7	as	as	ADP
app01-10348	115	8	the	the	DET
app01-10348	115	9	subsequent	subsequent	ADJ
app01-10348	115	10	characterization	characterization	NOUN
app01-10348	115	11	method	method	NOUN
app01-10348	115	12	for	for	ADP
app01-10348	115	13	a	a	DET
app01-10348	115	14	detailed	detailed	ADJ
app01-10348	115	15	investigation	investigation	NOUN
app01-10348	115	16	of	of	ADP
app01-10348	115	17	the	the	DET
app01-10348	115	18	residual	residual	ADJ
app01-10348	115	19	stress	stress	NOUN
app01-10348	115	20	introduced	introduce	VERB
app01-10348	115	21	into	into	ADP
app01-10348	115	22	si	si	PROPN
app01-10348	115	23	nws	nws	PROPN
app01-10348	115	24	through	through	ADP
app01-10348	115	25	thermal	thermal	ADJ
app01-10348	115	26	processes	process	NOUN
app01-10348	115	27	.	.	PUNCT
app01-10348	116	1	further	further	ADJ
app01-10348	116	2	details	detail	NOUN
app01-10348	116	3	regarding	regard	VERB
app01-10348	116	4	the	the	DET
app01-10348	116	5	determination	determination	NOUN
app01-10348	116	6	of	of	ADP
app01-10348	116	7	stress	stress	NOUN
app01-10348	116	8	induced	induce	VERB
app01-10348	116	9	by	by	ADP
app01-10348	116	10	native	native	ADJ
app01-10348	116	11	oxide	oxide	NOUN
app01-10348	116	12	formation	formation	NOUN
app01-10348	116	13	and	and	CCONJ
app01-10348	116	14	comparative	comparative	ADJ
app01-10348	116	15	computational	computational	ADJ
app01-10348	116	16	investigations	investigation	NOUN
app01-10348	116	17	involving	involve	VERB
app01-10348	116	18	intrinsic	intrinsic	ADJ
app01-10348	116	19	stresses	stress	NOUN
app01-10348	116	20	utilizing	utilize	VERB
app01-10348	116	21	atomistic	atomistic	ADJ
app01-10348	116	22	modeling	modeling	NOUN
app01-10348	116	23	can	can	AUX
app01-10348	116	24	be	be	AUX
app01-10348	116	25	found	find	VERB
app01-10348	116	26	elsewhere	elsewhere	ADV
app01-10348	116	27	[	[	X
app01-10348	116	28	6	6	NUM
app01-10348	116	29	,	,	PUNCT
app01-10348	116	30	14	14	NUM
app01-10348	116	31	,	,	PUNCT
app01-10348	116	32	15	15	NUM
app01-10348	116	33	]	]	PUNCT
app01-10348	116	34	.	.	PUNCT
app01-10348	117	1	the	the	DET
app01-10348	117	2	stress	stress	NOUN
app01-10348	117	3	observed	observe	VERB
app01-10348	117	4	in	in	ADP
app01-10348	117	5	this	this	DET
app01-10348	117	6	study	study	NOUN
app01-10348	117	7	is	be	AUX
app01-10348	117	8	consistent	consistent	ADJ
app01-10348	117	9	with	with	ADP
app01-10348	117	10	previously	previously	ADV
app01-10348	117	11	reported	report	VERB
app01-10348	117	12	values	value	NOUN
app01-10348	117	13	for	for	ADP
app01-10348	117	14	si	si	PROPN
app01-10348	117	15	nws	nws	PROPN
app01-10348	117	16	,	,	PUNCT
app01-10348	117	17	attributed	attribute	VERB
app01-10348	117	18	to	to	ADP
app01-10348	117	19	intrinsic	intrinsic	ADJ
app01-10348	117	20	or	or	CCONJ
app01-10348	117	21	thermal	thermal	ADJ
app01-10348	117	22	processes	process	NOUN
app01-10348	117	23	,	,	PUNCT
app01-10348	117	24	including	include	VERB
app01-10348	117	25	thermal	thermal	ADJ
app01-10348	117	26	expansion	expansion	NOUN
app01-10348	117	27	mismatch	mismatch	NOUN
app01-10348	117	28	between	between	ADP
app01-10348	117	29	the	the	DET
app01-10348	117	30	si	si	NOUN
app01-10348	117	31	and	and	CCONJ
app01-10348	117	32	surface	surface	NOUN
app01-10348	117	33	layer	layer	NOUN
app01-10348	118	1	[	[	X
app01-10348	118	2	6	6	NUM
app01-10348	118	3	,	,	PUNCT
app01-10348	118	4	14	14	NUM
app01-10348	118	5	]	]	PUNCT
app01-10348	118	6	.	.	PUNCT
app01-10348	119	1	the	the	DET
app01-10348	119	2	power	power	NOUN
app01-10348	119	3	calibration	calibration	NOUN
app01-10348	119	4	of	of	ADP
app01-10348	119	5	raman	raman	NOUN
app01-10348	119	6	spectroscopy	spectroscopy	NOUN
app01-10348	119	7	is	be	AUX
app01-10348	119	8	employed	employ	VERB
app01-10348	119	9	to	to	PART
app01-10348	119	10	confirm	confirm	VERB
app01-10348	119	11	that	that	SCONJ
app01-10348	119	12	the	the	DET
app01-10348	119	13	stress	stress	NOUN
app01-10348	119	14	values	value	NOUN
app01-10348	119	15	are	be	AUX
app01-10348	119	16	not	not	PART
app01-10348	119	17	influenced	influence	VERB
app01-10348	119	18	by	by	ADP
app01-10348	119	19	phase	phase	NOUN
app01-10348	119	20	transitions	transition	NOUN
app01-10348	119	21	or	or	CCONJ
app01-10348	119	22	measurement	measurement	NOUN
app01-10348	119	23	artifacts	artifact	NOUN
app01-10348	119	24	,	,	PUNCT
app01-10348	119	25	consistent	consistent	ADJ
app01-10348	119	26	with	with	ADP
app01-10348	119	27	prior	prior	ADJ
app01-10348	119	28	experimental	experimental	ADJ
app01-10348	119	29	findings	finding	NOUN
app01-10348	120	1	[	[	X
app01-10348	120	2	14	14	NUM
app01-10348	120	3	,	,	PUNCT
app01-10348	120	4	25	25	NUM
app01-10348	120	5	,	,	PUNCT
app01-10348	120	6	26	26	NUM
app01-10348	120	7	]	]	PUNCT
app01-10348	120	8	.	.	PUNCT
app01-10348	121	1	77	77	NUM
app01-10348	121	2	s.	s.	PROPN
app01-10348	121	3	z.	z.	PROPN
app01-10348	121	4	pakzad	pakzad	PROPN
app01-10348	121	5	,	,	PUNCT
app01-10348	121	6	m.	m.	NOUN
app01-10348	121	7	muzammil	muzammil	PROPN
app01-10348	121	8	,	,	PUNCT
app01-10348	121	9	m.	m.	PROPN
app01-10348	121	10	b.	b.	PROPN
app01-10348	121	11	shirin	shirin	PROPN
app01-10348	121	12	et	et	PROPN
app01-10348	121	13	al	al	PROPN
app01-10348	121	14	.	.	PROPN
app01-10348	121	15	acta	acta	PROPN
app01-10348	121	16	polytechnica	polytechnica	PROPN
app01-10348	121	17	ctu	ctu	NOUN
app01-10348	121	18	proceedings	proceeding	NOUN
app01-10348	121	19	(	(	PUNCT
app01-10348	121	20	a	a	X
app01-10348	121	21	)	)	PUNCT
app01-10348	121	22	.	.	PUNCT
app01-10348	122	1	(	(	PUNCT
app01-10348	122	2	b	b	X
app01-10348	122	3	)	)	PUNCT
app01-10348	122	4	.	.	PUNCT
app01-10348	123	1	figure	figure	VERB
app01-10348	123	2	4	4	NUM
app01-10348	123	3	.	.	PUNCT
app01-10348	123	4	raman	raman	ADJ
app01-10348	123	5	shifts	shift	NOUN
app01-10348	123	6	derived	derive	VERB
app01-10348	123	7	from	from	ADP
app01-10348	123	8	the	the	DET
app01-10348	123	9	data	datum	NOUN
app01-10348	123	10	in	in	ADP
app01-10348	123	11	figure	figure	NOUN
app01-10348	123	12	3	3	NUM
app01-10348	123	13	,	,	PUNCT
app01-10348	123	14	displayed	display	VERB
app01-10348	123	15	along	along	ADP
app01-10348	123	16	the	the	DET
app01-10348	123	17	si	si	PROPN
app01-10348	123	18	nw	nw	PROPN
app01-10348	123	19	(	(	PUNCT
app01-10348	123	20	a	a	NOUN
app01-10348	123	21	)	)	PUNCT
app01-10348	123	22	before	before	ADP
app01-10348	123	23	and	and	CCONJ
app01-10348	123	24	(	(	PUNCT
app01-10348	123	25	b	b	NOUN
app01-10348	123	26	)	)	PUNCT
app01-10348	123	27	after	after	ADP
app01-10348	123	28	thermal	thermal	ADJ
app01-10348	123	29	processing	processing	NOUN
app01-10348	123	30	.	.	PUNCT
app01-10348	124	1	the	the	DET
app01-10348	124	2	blue	blue	ADJ
app01-10348	124	3	and	and	CCONJ
app01-10348	124	4	violet	violet	ADJ
app01-10348	124	5	data	datum	NOUN
app01-10348	124	6	points	point	NOUN
app01-10348	124	7	correspond	correspond	VERB
app01-10348	124	8	to	to	PART
app01-10348	124	9	support	support	VERB
app01-10348	124	10	and	and	CCONJ
app01-10348	124	11	si	si	PROPN
app01-10348	124	12	nw	nw	PROPN
app01-10348	124	13	,	,	PUNCT
app01-10348	124	14	respectively	respectively	ADV
app01-10348	124	15	.	.	PUNCT
app01-10348	125	1	to	to	PART
app01-10348	125	2	perform	perform	VERB
app01-10348	125	3	resonance	resonance	NOUN
app01-10348	125	4	testing	testing	NOUN
app01-10348	125	5	,	,	PUNCT
app01-10348	125	6	the	the	DET
app01-10348	125	7	si	si	PROPN
app01-10348	125	8	nw	nw	PROPN
app01-10348	125	9	undergoes	undergoes	PROPN
app01-10348	125	10	vibrational	vibrational	ADJ
app01-10348	125	11	analysis	analysis	NOUN
app01-10348	125	12	following	follow	VERB
app01-10348	125	13	the	the	DET
app01-10348	125	14	methodology	methodology	NOUN
app01-10348	125	15	detailed	detail	VERB
app01-10348	125	16	in	in	ADP
app01-10348	125	17	section	section	NOUN
app01-10348	125	18	2.2	2.2	NUM
app01-10348	125	19	.	.	PUNCT
app01-10348	126	1	the	the	DET
app01-10348	126	2	results	result	NOUN
app01-10348	126	3	,	,	PUNCT
app01-10348	126	4	illustrating	illustrate	VERB
app01-10348	126	5	displacement	displacement	NOUN
app01-10348	126	6	versus	versus	ADP
app01-10348	126	7	frequency	frequency	NOUN
app01-10348	126	8	for	for	ADP
app01-10348	126	9	the	the	DET
app01-10348	126	10	si	si	PROPN
app01-10348	126	11	nw	nw	PROPN
app01-10348	126	12	before	before	ADP
app01-10348	126	13	and	and	CCONJ
app01-10348	126	14	after	after	ADP
app01-10348	126	15	thermal	thermal	ADJ
app01-10348	126	16	processing	processing	NOUN
app01-10348	126	17	,	,	PUNCT
app01-10348	126	18	are	be	AUX
app01-10348	126	19	presented	present	VERB
app01-10348	126	20	in	in	ADP
app01-10348	126	21	figure	figure	NOUN
app01-10348	126	22	5	5	NUM
app01-10348	126	23	.	.	PUNCT
app01-10348	126	24	lorentzian	lorentzian	ADJ
app01-10348	126	25	fits	fit	NOUN
app01-10348	126	26	are	be	AUX
app01-10348	126	27	applied	apply	VERB
app01-10348	126	28	to	to	PART
app01-10348	126	29	illustrate	illustrate	VERB
app01-10348	126	30	the	the	DET
app01-10348	126	31	peaks	peak	NOUN
app01-10348	126	32	observed	observe	VERB
app01-10348	126	33	in	in	ADP
app01-10348	126	34	the	the	DET
app01-10348	126	35	responses	response	NOUN
app01-10348	126	36	,	,	PUNCT
app01-10348	126	37	aiding	aid	VERB
app01-10348	126	38	in	in	ADP
app01-10348	126	39	the	the	DET
app01-10348	126	40	identification	identification	NOUN
app01-10348	126	41	of	of	ADP
app01-10348	126	42	the	the	DET
app01-10348	126	43	first	first	ADJ
app01-10348	126	44	mode	mode	NOUN
app01-10348	126	45	of	of	ADP
app01-10348	126	46	resonance	resonance	NOUN
app01-10348	126	47	for	for	ADP
app01-10348	126	48	si	si	PROPN
app01-10348	126	49	nw	nw	PROPN
app01-10348	126	50	.	.	PROPN
app01-10348	126	51	this	this	DET
app01-10348	126	52	approach	approach	NOUN
app01-10348	126	53	yields	yield	VERB
app01-10348	126	54	resonance	resonance	NOUN
app01-10348	126	55	frequencies	frequency	NOUN
app01-10348	126	56	of	of	ADP
app01-10348	126	57	14.27mhz	14.27mhz	NUM
app01-10348	126	58	and	and	CCONJ
app01-10348	126	59	15.57mhz	15.57mhz	NUM
app01-10348	126	60	for	for	ADP
app01-10348	126	61	the	the	DET
app01-10348	126	62	si	si	PROPN
app01-10348	126	63	nw	nw	PROPN
app01-10348	126	64	before	before	ADP
app01-10348	126	65	and	and	CCONJ
app01-10348	126	66	after	after	ADP
app01-10348	126	67	thermal	thermal	ADJ
app01-10348	126	68	processing	processing	NOUN
app01-10348	126	69	,	,	PUNCT
app01-10348	126	70	respectively	respectively	ADV
app01-10348	126	71	.	.	PUNCT
app01-10348	127	1	further	further	ADJ
app01-10348	127	2	calculations	calculation	NOUN
app01-10348	127	3	of	of	ADP
app01-10348	127	4	the	the	DET
app01-10348	127	5	quality	quality	NOUN
app01-10348	127	6	factor	factor	NOUN
app01-10348	127	7	(	(	PUNCT
app01-10348	127	8	q	q	NOUN
app01-10348	127	9	-	-	PUNCT
app01-10348	127	10	factor	factor	NOUN
app01-10348	127	11	)	)	PUNCT
app01-10348	128	1	[	[	X
app01-10348	128	2	28	28	NUM
app01-10348	128	3	]	]	PUNCT
app01-10348	128	4	for	for	SCONJ
app01-10348	128	5	si	si	PROPN
app01-10348	128	6	nw	nw	PROPN
app01-10348	128	7	reveal	reveal	VERB
app01-10348	128	8	an	an	DET
app01-10348	128	9	increase	increase	NOUN
app01-10348	128	10	from	from	ADP
app01-10348	128	11	37	37	NUM
app01-10348	128	12	to	to	ADP
app01-10348	128	13	117	117	NUM
app01-10348	128	14	for	for	ADP
app01-10348	128	15	the	the	DET
app01-10348	128	16	si	si	PROPN
app01-10348	128	17	nw	nw	PROPN
app01-10348	128	18	before	before	ADV
app01-10348	128	19	and	and	CCONJ
app01-10348	128	20	after	after	ADP
app01-10348	128	21	the	the	DET
app01-10348	128	22	thermal	thermal	ADJ
app01-10348	128	23	process	process	NOUN
app01-10348	128	24	,	,	PUNCT
app01-10348	128	25	respectively	respectively	ADV
app01-10348	128	26	.	.	PUNCT
app01-10348	129	1	the	the	DET
app01-10348	129	2	observed	observe	VERB
app01-10348	129	3	shift	shift	NOUN
app01-10348	129	4	in	in	ADP
app01-10348	129	5	frequency	frequency	NOUN
app01-10348	129	6	response	response	NOUN
app01-10348	129	7	and	and	CCONJ
app01-10348	129	8	q	q	NOUN
app01-10348	129	9	-	-	NOUN
app01-10348	129	10	factor	factor	NOUN
app01-10348	129	11	for	for	ADP
app01-10348	129	12	the	the	DET
app01-10348	129	13	si	si	PROPN
app01-10348	129	14	nw	nw	PROPN
app01-10348	129	15	under	under	ADP
app01-10348	129	16	examination	examination	NOUN
app01-10348	129	17	offers	offer	VERB
app01-10348	129	18	another	another	DET
app01-10348	129	19	independent	independent	ADJ
app01-10348	129	20	observation	observation	NOUN
app01-10348	129	21	of	of	ADP
app01-10348	129	22	the	the	DET
app01-10348	129	23	stresses	stress	NOUN
app01-10348	129	24	introduced	introduce	VERB
app01-10348	129	25	into	into	ADP
app01-10348	129	26	si	si	PROPN
app01-10348	129	27	nws	nws	PROPN
app01-10348	129	28	through	through	ADP
app01-10348	129	29	the	the	DET
app01-10348	129	30	process	process	NOUN
app01-10348	129	31	outlined	outline	VERB
app01-10348	129	32	in	in	ADP
app01-10348	129	33	section	section	NOUN
app01-10348	129	34	2.4	2.4	NUM
app01-10348	129	35	.	.	PUNCT
app01-10348	130	1	in	in	ADP
app01-10348	130	2	this	this	DET
app01-10348	130	3	context	context	NOUN
app01-10348	130	4	,	,	PUNCT
app01-10348	130	5	the	the	DET
app01-10348	130	6	introduction	introduction	NOUN
app01-10348	130	7	of	of	ADP
app01-10348	130	8	intrinsic	intrinsic	ADJ
app01-10348	130	9	stress	stress	NOUN
app01-10348	130	10	figure	figure	NOUN
app01-10348	130	11	5	5	NUM
app01-10348	130	12	.	.	PUNCT
app01-10348	131	1	displacement	displacement	NOUN
app01-10348	131	2	versus	versus	ADP
app01-10348	131	3	resonant	resonant	ADJ
app01-10348	131	4	frequency	frequency	NOUN
app01-10348	131	5	,	,	PUNCT
app01-10348	131	6	along	along	ADP
app01-10348	131	7	with	with	ADP
app01-10348	131	8	lorentzian	lorentzian	ADJ
app01-10348	131	9	fits	fit	NOUN
app01-10348	131	10	,	,	PUNCT
app01-10348	131	11	depicted	depict	VERB
app01-10348	131	12	for	for	ADP
app01-10348	131	13	si	si	PROPN
app01-10348	131	14	nw	nw	PROPN
app01-10348	131	15	before	before	ADP
app01-10348	131	16	and	and	CCONJ
app01-10348	131	17	after	after	ADP
app01-10348	131	18	thermal	thermal	ADJ
app01-10348	131	19	process	process	NOUN
app01-10348	131	20	.	.	PUNCT
app01-10348	132	1	resonance	resonance	NOUN
app01-10348	132	2	measurements	measurement	NOUN
app01-10348	132	3	indicate	indicate	VERB
app01-10348	132	4	the	the	DET
app01-10348	132	5	occurrence	occurrence	NOUN
app01-10348	132	6	of	of	ADP
app01-10348	132	7	the	the	DET
app01-10348	132	8	first	first	ADJ
app01-10348	132	9	mode	mode	NOUN
app01-10348	132	10	(	(	PUNCT
app01-10348	132	11	out	out	NOUN
app01-10348	132	12	-	-	PUNCT
app01-10348	132	13	of	of	ADP
app01-10348	132	14	-	-	PUNCT
app01-10348	132	15	plane	plane	NOUN
app01-10348	132	16	)	)	PUNCT
app01-10348	132	17	mechanical	mechanical	ADJ
app01-10348	132	18	resonance	resonance	NOUN
app01-10348	132	19	at	at	ADP
app01-10348	132	20	frequencies	frequency	NOUN
app01-10348	132	21	of	of	ADP
app01-10348	132	22	14.27mhz	14.27mhz	NUM
app01-10348	132	23	and	and	CCONJ
app01-10348	132	24	15.57mhz	15.57mhz	NUM
app01-10348	132	25	for	for	ADP
app01-10348	132	26	the	the	DET
app01-10348	132	27	si	si	PROPN
app01-10348	132	28	nw	nw	PROPN
app01-10348	132	29	before	before	ADP
app01-10348	132	30	and	and	CCONJ
app01-10348	132	31	after	after	ADP
app01-10348	132	32	thermal	thermal	ADJ
app01-10348	132	33	processing	processing	NOUN
app01-10348	132	34	.	.	PUNCT
app01-10348	133	1	into	into	ADP
app01-10348	133	2	the	the	DET
app01-10348	133	3	si	si	PROPN
app01-10348	133	4	nw	nw	PROPN
app01-10348	133	5	under	under	ADP
app01-10348	133	6	examination	examination	NOUN
app01-10348	133	7	through	through	ADP
app01-10348	133	8	thermal	thermal	ADJ
app01-10348	133	9	processing	processing	NOUN
app01-10348	133	10	is	be	AUX
app01-10348	133	11	investigated	investigate	VERB
app01-10348	133	12	via	via	ADP
app01-10348	133	13	raman	raman	NOUN
app01-10348	133	14	characterization	characterization	NOUN
app01-10348	133	15	and	and	CCONJ
app01-10348	133	16	resonance	resonance	NOUN
app01-10348	133	17	testing	testing	NOUN
app01-10348	133	18	.	.	PUNCT
app01-10348	134	1	both	both	DET
app01-10348	134	2	methodologies	methodology	NOUN
app01-10348	134	3	independently	independently	ADV
app01-10348	134	4	validate	validate	VERB
app01-10348	134	5	the	the	DET
app01-10348	134	6	shifts	shift	NOUN
app01-10348	134	7	observed	observe	VERB
app01-10348	134	8	in	in	ADP
app01-10348	134	9	raman	raman	NOUN
app01-10348	134	10	data	datum	NOUN
app01-10348	134	11	and	and	CCONJ
app01-10348	134	12	frequency	frequency	NOUN
app01-10348	134	13	responses	response	NOUN
app01-10348	134	14	.	.	PUNCT
app01-10348	135	1	the	the	DET
app01-10348	135	2	results	result	NOUN
app01-10348	135	3	obtained	obtain	VERB
app01-10348	135	4	herein	herein	NOUN
app01-10348	135	5	offer	offer	VERB
app01-10348	135	6	a	a	DET
app01-10348	135	7	dependable	dependable	ADJ
app01-10348	135	8	methodology	methodology	NOUN
app01-10348	135	9	for	for	ADP
app01-10348	135	10	extending	extend	VERB
app01-10348	135	11	the	the	DET
app01-10348	135	12	approach	approach	NOUN
app01-10348	135	13	developed	develop	VERB
app01-10348	135	14	for	for	ADP
app01-10348	135	15	examining	examine	VERB
app01-10348	135	16	multiple	multiple	ADJ
app01-10348	135	17	samples	sample	NOUN
app01-10348	135	18	,	,	PUNCT
app01-10348	135	19	facilitating	facilitate	VERB
app01-10348	135	20	detailed	detailed	ADJ
app01-10348	135	21	statistical	statistical	ADJ
app01-10348	135	22	analysis	analysis	NOUN
app01-10348	135	23	and	and	CCONJ
app01-10348	135	24	precise	precise	ADJ
app01-10348	135	25	investigation	investigation	NOUN
app01-10348	135	26	of	of	ADP
app01-10348	135	27	intrinsic	intrinsic	ADJ
app01-10348	135	28	stresses	stress	NOUN
app01-10348	135	29	and	and	CCONJ
app01-10348	135	30	their	their	PRON
app01-10348	135	31	subsequent	subsequent	ADJ
app01-10348	135	32	impact	impact	NOUN
app01-10348	135	33	on	on	ADP
app01-10348	135	34	the	the	DET
app01-10348	135	35	behavior	behavior	NOUN
app01-10348	135	36	of	of	ADP
app01-10348	135	37	si	si	PROPN
app01-10348	135	38	nws	nws	PROPN
app01-10348	135	39	.	.	PROPN
app01-10348	136	1	4	4	NUM
app01-10348	136	2	.	.	X
app01-10348	136	3	conclusions	conclusion	NOUN
app01-10348	136	4	in	in	ADP
app01-10348	136	5	conclusion	conclusion	NOUN
app01-10348	136	6	,	,	PUNCT
app01-10348	136	7	this	this	DET
app01-10348	136	8	paper	paper	NOUN
app01-10348	136	9	emphasizes	emphasize	VERB
app01-10348	136	10	the	the	DET
app01-10348	136	11	complex	complex	ADJ
app01-10348	136	12	interplay	interplay	NOUN
app01-10348	136	13	between	between	ADP
app01-10348	136	14	intrinsic	intrinsic	ADJ
app01-10348	136	15	stress	stress	NOUN
app01-10348	136	16	and	and	CCONJ
app01-10348	136	17	mechanical	mechanical	ADJ
app01-10348	136	18	behavior	behavior	NOUN
app01-10348	136	19	of	of	ADP
app01-10348	136	20	si	si	PROPN
app01-10348	136	21	nws	nws	PROPN
app01-10348	136	22	.	.	PUNCT
app01-10348	137	1	through	through	ADP
app01-10348	137	2	a	a	DET
app01-10348	137	3	comprehensive	comprehensive	ADJ
app01-10348	137	4	examination	examination	NOUN
app01-10348	137	5	utilizing	utilize	VERB
app01-10348	137	6	techniques	technique	NOUN
app01-10348	137	7	including	include	VERB
app01-10348	137	8	raman	raman	NOUN
app01-10348	137	9	characterization	characterization	NOUN
app01-10348	137	10	,	,	PUNCT
app01-10348	137	11	resonance	resonance	NOUN
app01-10348	137	12	testing	testing	NOUN
app01-10348	137	13	,	,	PUNCT
app01-10348	137	14	and	and	CCONJ
app01-10348	137	15	thermal	thermal	ADJ
app01-10348	137	16	processing	processing	NOUN
app01-10348	137	17	,	,	PUNCT
app01-10348	137	18	the	the	DET
app01-10348	137	19	intrinsic	intrinsic	ADJ
app01-10348	137	20	stresses	stress	NOUN
app01-10348	137	21	induced	induce	VERB
app01-10348	137	22	into	into	ADP
app01-10348	137	23	si	si	PROPN
app01-10348	137	24	nw	nw	PROPN
app01-10348	137	25	under	under	PROPN
app01-10348	137	26	investigation	investigation	NOUN
app01-10348	137	27	is	be	AUX
app01-10348	137	28	analyzed	analyze	VERB
app01-10348	137	29	.	.	PUNCT
app01-10348	138	1	the	the	DET
app01-10348	138	2	integration	integration	NOUN
app01-10348	138	3	of	of	ADP
app01-10348	138	4	these	these	DET
app01-10348	138	5	methodologies	methodology	NOUN
app01-10348	138	6	provides	provide	VERB
app01-10348	138	7	valuable	valuable	ADJ
app01-10348	138	8	insights	insight	NOUN
app01-10348	138	9	into	into	ADP
app01-10348	138	10	the	the	DET
app01-10348	138	11	mechanical	mechanical	ADJ
app01-10348	138	12	properties	property	NOUN
app01-10348	138	13	of	of	ADP
app01-10348	138	14	si	si	PROPN
app01-10348	138	15	nws	nws	PROPN
app01-10348	138	16	and	and	CCONJ
app01-10348	138	17	facilitates	facilitate	VERB
app01-10348	138	18	the	the	DET
app01-10348	138	19	development	development	NOUN
app01-10348	138	20	of	of	ADP
app01-10348	138	21	a	a	DET
app01-10348	138	22	reliable	reliable	ADJ
app01-10348	138	23	testing	testing	NOUN
app01-10348	138	24	methodology	methodology	NOUN
app01-10348	138	25	for	for	ADP
app01-10348	138	26	streamlining	streamline	VERB
app01-10348	138	27	the	the	DET
app01-10348	138	28	examination	examination	NOUN
app01-10348	138	29	of	of	ADP
app01-10348	138	30	multiple	multiple	ADJ
app01-10348	138	31	samples	sample	NOUN
app01-10348	138	32	.	.	PUNCT
app01-10348	139	1	these	these	DET
app01-10348	139	2	findings	finding	NOUN
app01-10348	139	3	underscore	underscore	VERB
app01-10348	139	4	the	the	DET
app01-10348	139	5	importance	importance	NOUN
app01-10348	139	6	of	of	ADP
app01-10348	139	7	understanding	understanding	NOUN
app01-10348	139	8	and	and	CCONJ
app01-10348	139	9	controlling	control	VERB
app01-10348	139	10	intrinsic	intrinsic	ADJ
app01-10348	139	11	stresses	stress	NOUN
app01-10348	139	12	in	in	ADP
app01-10348	139	13	si	si	PROPN
app01-10348	139	14	nws	nws	PROPN
app01-10348	139	15	for	for	ADP
app01-10348	139	16	the	the	DET
app01-10348	139	17	advancement	advancement	NOUN
app01-10348	139	18	of	of	ADP
app01-10348	139	19	next	next	ADJ
app01-10348	139	20	-	-	PUNCT
app01-10348	139	21	generation	generation	NOUN
app01-10348	139	22	electronics	electronic	NOUN
app01-10348	139	23	.	.	PUNCT
app01-10348	140	1	acknowledgements	acknowledgement	NOUN
app01-10348	140	2	s.z.p	s.z.p	VERB
app01-10348	140	3	.	.	PROPN
app01-10348	140	4	,	,	PUNCT
app01-10348	140	5	b.a	b.a	PROPN
app01-10348	140	6	.	.	PROPN
app01-10348	140	7	and	and	CCONJ
app01-10348	140	8	b.e.a	b.e.a	PROPN
app01-10348	140	9	.	.	PUNCT
app01-10348	141	1	gratefully	gratefully	ADV
app01-10348	141	2	acknowledge	acknowledge	VERB
app01-10348	141	3	the	the	DET
app01-10348	141	4	financial	financial	ADJ
app01-10348	141	5	support	support	NOUN
app01-10348	141	6	by	by	ADP
app01-10348	141	7	tubitak	tubitak	NOUN
app01-10348	141	8	under	under	ADP
app01-10348	141	9	grant	grant	NOUN
app01-10348	141	10	no	no	NOUN
app01-10348	141	11	.	.	PUNCT
app01-10348	142	1	120e347	120e347	ADJ
app01-10348	142	2	and	and	CCONJ
app01-10348	142	3	118c155	118c155	NUM
app01-10348	142	4	.	.	PUNCT
app01-10348	143	1	the	the	DET
app01-10348	143	2	authors	author	NOUN
app01-10348	143	3	acknowledge	acknowledge	VERB
app01-10348	143	4	the	the	DET
app01-10348	143	5	use	use	NOUN
app01-10348	143	6	of	of	ADP
app01-10348	143	7	the	the	DET
app01-10348	143	8	services	service	NOUN
app01-10348	143	9	and	and	CCONJ
app01-10348	143	10	facilities	facility	NOUN
app01-10348	143	11	of	of	ADP
app01-10348	143	12	n2star	n2star	ADJ
app01-10348	143	13	-	-	PUNCT
app01-10348	143	14	koç	koç	NOUN
app01-10348	143	15	university	university	NOUN
app01-10348	143	16	nanofabrication	nanofabrication	NOUN
app01-10348	143	17	and	and	CCONJ
app01-10348	143	18	nanocharacterization	nanocharacterization	NOUN
app01-10348	143	19	center	center	NOUN
app01-10348	143	20	for	for	ADP
app01-10348	143	21	scientific	scientific	ADJ
app01-10348	143	22	and	and	CCONJ
app01-10348	143	23	technological	technological	ADJ
app01-10348	143	24	advanced	advanced	ADJ
app01-10348	143	25	research	research	NOUN
app01-10348	143	26	for	for	ADP
app01-10348	143	27	the	the	DET
app01-10348	143	28	fabrication	fabrication	NOUN
app01-10348	143	29	processes	process	NOUN
app01-10348	143	30	of	of	ADP
app01-10348	143	31	this	this	DET
app01-10348	143	32	work	work	NOUN
app01-10348	143	33	.	.	PUNCT
app01-10348	144	1	the	the	DET
app01-10348	144	2	authors	author	NOUN
app01-10348	144	3	acknowledge	acknowledge	VERB
app01-10348	144	4	dr	dr	PROPN
app01-10348	144	5	.	.	PROPN
app01-10348	144	6	m	m	PROPN
app01-10348	144	7	baris	baris	PROPN
app01-10348	144	8	yagci	yagci	PROPN
app01-10348	144	9	and	and	CCONJ
app01-10348	144	10	dr	dr	PROPN
app01-10348	144	11	.	.	PROPN
app01-10348	144	12	gülsu	gülsu	PROPN
app01-10348	144	13	şimşek	şimşek	PROPN
app01-10348	144	14	franci	franci	ADV
app01-10348	144	15	from	from	ADP
app01-10348	144	16	koç	koç	PROPN
app01-10348	144	17	university	university	PROPN
app01-10348	144	18	surface	surface	NOUN
app01-10348	144	19	technologies	technologies	PROPN
app01-10348	144	20	research	research	NOUN
app01-10348	144	21	center	center	NOUN
app01-10348	144	22	(	(	PUNCT
app01-10348	144	23	kuytam	kuytam	NOUN
app01-10348	144	24	)	)	PUNCT
app01-10348	144	25	for	for	ADP
app01-10348	144	26	the	the	DET
app01-10348	144	27	characterization	characterization	NOUN
app01-10348	144	28	steps	step	NOUN
app01-10348	144	29	of	of	ADP
app01-10348	144	30	this	this	DET
app01-10348	144	31	work	work	NOUN
app01-10348	144	32	.	.	PUNCT
app01-10348	145	1	78	78	NUM
app01-10348	145	2	vol	vol	NOUN
app01-10348	145	3	.	.	PUNCT
app01-10348	146	1	50/2024	50/2024	NUM
app01-10348	146	2	intrinsic	intrinsic	ADJ
app01-10348	146	3	stress	stress	NOUN
app01-10348	146	4	effects	effect	NOUN
app01-10348	146	5	on	on	ADP
app01-10348	146	6	vibrational	vibrational	ADJ
app01-10348	146	7	response	response	NOUN
app01-10348	146	8	of	of	ADP
app01-10348	146	9	si	si	PROPN
app01-10348	146	10	nws	nws	PROPN
app01-10348	146	11	references	reference	NOUN
app01-10348	146	12	[	[	X
app01-10348	146	13	1	1	NUM
app01-10348	146	14	]	]	PUNCT
app01-10348	146	15	s.	s.	PROPN
app01-10348	146	16	raman	raman	PROPN
app01-10348	146	17	,	,	PUNCT
app01-10348	146	18	r.	r.	PROPN
app01-10348	146	19	sankar	sankar	PROPN
app01-10348	146	20	,	,	PUNCT
app01-10348	146	21	m.	m.	NOUN
app01-10348	146	22	sindhuja	sindhuja	PROPN
app01-10348	146	23	.	.	PUNCT
app01-10348	147	1	advances	advance	NOUN
app01-10348	147	2	in	in	ADP
app01-10348	147	3	silicon	silicon	NOUN
app01-10348	147	4	nanowire	nanowire	NOUN
app01-10348	147	5	applications	application	NOUN
app01-10348	147	6	in	in	ADP
app01-10348	147	7	energy	energy	NOUN
app01-10348	147	8	generation	generation	NOUN
app01-10348	147	9	,	,	PUNCT
app01-10348	147	10	storage	storage	NOUN
app01-10348	147	11	,	,	PUNCT
app01-10348	147	12	sensing	sensing	NOUN
app01-10348	147	13	,	,	PUNCT
app01-10348	147	14	and	and	CCONJ
app01-10348	147	15	electronics	electronic	NOUN
app01-10348	147	16	:	:	PUNCT
app01-10348	147	17	a	a	DET
app01-10348	147	18	review	review	NOUN
app01-10348	147	19	.	.	PUNCT
app01-10348	148	1	nanotechnology	nanotechnology	PROPN
app01-10348	148	2	34(18):182001	34(18):182001	NUM
app01-10348	148	3	,	,	PUNCT
app01-10348	148	4	2023	2023	NUM
app01-10348	148	5	.	.	PUNCT
app01-10348	149	1	https://doi.org/10.1088/1361-6528/acb320	https://doi.org/10.1088/1361-6528/acb320	NOUN
app01-10348	149	2	[	[	X
app01-10348	149	3	2	2	X
app01-10348	149	4	]	]	PUNCT
app01-10348	149	5	v.	v.	CCONJ
app01-10348	149	6	s.	s.	PROPN
app01-10348	149	7	vendamani	vendamani	PROPN
app01-10348	149	8	,	,	PUNCT
app01-10348	149	9	s.	s.	PROPN
app01-10348	149	10	v.	v.	PROPN
app01-10348	149	11	s.	s.	PROPN
app01-10348	149	12	nageswara	nageswara	PROPN
app01-10348	149	13	rao	rao	PROPN
app01-10348	149	14	,	,	PUNCT
app01-10348	149	15	a.	a.	PROPN
app01-10348	149	16	p.	p.	PROPN
app01-10348	149	17	pathak	pathak	PROPN
app01-10348	149	18	,	,	PUNCT
app01-10348	149	19	v.	v.	PROPN
app01-10348	149	20	r.	r.	PROPN
app01-10348	149	21	soma	soma	PROPN
app01-10348	149	22	.	.	PUNCT
app01-10348	150	1	silicon	silicon	PROPN
app01-10348	150	2	nanostructures	nanostructure	NOUN
app01-10348	150	3	for	for	ADP
app01-10348	150	4	molecular	molecular	ADJ
app01-10348	150	5	sensing	sensing	NOUN
app01-10348	150	6	:	:	PUNCT
app01-10348	150	7	a	a	DET
app01-10348	150	8	review	review	NOUN
app01-10348	150	9	.	.	PUNCT
app01-10348	151	1	acs	acs	PROPN
app01-10348	151	2	applied	apply	VERB
app01-10348	151	3	nano	nano	NOUN
app01-10348	151	4	materials	material	NOUN
app01-10348	151	5	5(4):4550–4582	5(4):4550–4582	NOUN
app01-10348	151	6	,	,	PUNCT
app01-10348	151	7	2022	2022	NUM
app01-10348	151	8	.	.	PUNCT
app01-10348	152	1	https://doi.org/10.1021/acsanm.1c04569	https://doi.org/10.1021/acsanm.1c04569	NOUN
app01-10348	153	1	[	[	X
app01-10348	153	2	3	3	X
app01-10348	153	3	]	]	PUNCT
app01-10348	153	4	s.	s.	PROPN
app01-10348	153	5	a.	a.	PROPN
app01-10348	153	6	ahad	ahad	PROPN
app01-10348	153	7	,	,	PUNCT
app01-10348	153	8	t.	t.	PROPN
app01-10348	153	9	kennedy	kennedy	PROPN
app01-10348	153	10	,	,	PUNCT
app01-10348	153	11	h.	h.	PROPN
app01-10348	153	12	geaney	geaney	PROPN
app01-10348	153	13	.	.	PUNCT
app01-10348	154	1	si	si	PROPN
app01-10348	154	2	nanowires	nanowire	NOUN
app01-10348	154	3	:	:	PUNCT
app01-10348	154	4	from	from	ADP
app01-10348	154	5	model	model	NOUN
app01-10348	154	6	system	system	NOUN
app01-10348	154	7	to	to	ADP
app01-10348	154	8	practical	practical	ADJ
app01-10348	154	9	li	li	NOUN
app01-10348	154	10	-	-	ADJ
app01-10348	154	11	ion	ion	NOUN
app01-10348	154	12	anode	anode	NOUN
app01-10348	154	13	material	material	NOUN
app01-10348	154	14	and	and	CCONJ
app01-10348	154	15	beyond	beyond	ADP
app01-10348	154	16	.	.	PUNCT
app01-10348	155	1	acs	acs	PROPN
app01-10348	155	2	energy	energy	NOUN
app01-10348	155	3	letters	letter	NOUN
app01-10348	155	4	9(4):1548–1561	9(4):1548–1561	ADV
app01-10348	155	5	,	,	PUNCT
app01-10348	155	6	2024	2024	NUM
app01-10348	155	7	.	.	PUNCT
app01-10348	156	1	https://doi.org/10.1021/acsenergylett.4c00262	https://doi.org/10.1021/acsenergylett.4c00262	NOUN
app01-10348	157	1	[	[	X
app01-10348	157	2	4	4	NUM
app01-10348	157	3	]	]	PUNCT
app01-10348	157	4	m.	m.	NOUN
app01-10348	157	5	nasr	nasr	PROPN
app01-10348	157	6	esfahani	esfahani	PROPN
app01-10348	157	7	,	,	PUNCT
app01-10348	157	8	b.	b.	PROPN
app01-10348	157	9	e.	e.	PROPN
app01-10348	157	10	alaca	alaca	PROPN
app01-10348	157	11	.	.	PUNCT
app01-10348	158	1	a	a	DET
app01-10348	158	2	review	review	NOUN
app01-10348	158	3	on	on	ADP
app01-10348	158	4	size	size	NOUN
app01-10348	158	5	-	-	PUNCT
app01-10348	158	6	dependent	dependent	ADJ
app01-10348	158	7	mechanical	mechanical	ADJ
app01-10348	158	8	properties	property	NOUN
app01-10348	158	9	of	of	ADP
app01-10348	158	10	nanowires	nanowire	NOUN
app01-10348	158	11	.	.	PUNCT
app01-10348	159	1	advanced	advanced	ADJ
app01-10348	159	2	engineering	engineering	NOUN
app01-10348	159	3	materials	material	NOUN
app01-10348	159	4	21(8):1900192	21(8):1900192	NUM
app01-10348	159	5	,	,	PUNCT
app01-10348	159	6	2019	2019	NUM
app01-10348	159	7	.	.	PUNCT
app01-10348	160	1	https://doi.org/10.1002/adem.201900192	https://doi.org/10.1002/adem.201900192	PRON
app01-10348	161	1	[	[	X
app01-10348	161	2	5	5	X
app01-10348	161	3	]	]	PUNCT
app01-10348	161	4	m.	m.	NOUN
app01-10348	161	5	a.	a.	PROPN
app01-10348	161	6	darwish	darwish	PROPN
app01-10348	161	7	,	,	PUNCT
app01-10348	161	8	w.	w.	PROPN
app01-10348	161	9	abd	abd	PROPN
app01-10348	161	10	-	-	PUNCT
app01-10348	161	11	elaziem	elaziem	PROPN
app01-10348	161	12	,	,	PUNCT
app01-10348	161	13	a.	a.	NOUN
app01-10348	161	14	elsheikh	elsheikh	PROPN
app01-10348	161	15	,	,	PUNCT
app01-10348	161	16	a.	a.	NOUN
app01-10348	161	17	a.	a.	NOUN
app01-10348	161	18	zayed	zayed	PROPN
app01-10348	161	19	.	.	PUNCT
app01-10348	162	1	advancements	advancement	NOUN
app01-10348	162	2	in	in	ADP
app01-10348	162	3	nanomaterials	nanomaterial	NOUN
app01-10348	162	4	for	for	ADP
app01-10348	162	5	nanosensors	nanosensor	NOUN
app01-10348	162	6	:	:	PUNCT
app01-10348	162	7	a	a	DET
app01-10348	162	8	comprehensive	comprehensive	ADJ
app01-10348	162	9	review	review	NOUN
app01-10348	162	10	.	.	PUNCT
app01-10348	163	1	nanoscale	nanoscale	NOUN
app01-10348	163	2	advances	advance	NOUN
app01-10348	163	3	6(16):4015	6(16):4015	PROPN
app01-10348	163	4	–	–	PUNCT
app01-10348	163	5	4046	4046	NUM
app01-10348	163	6	,	,	PUNCT
app01-10348	163	7	2024	2024	NUM
app01-10348	163	8	.	.	PUNCT
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app01-10348	164	2	[	[	X
app01-10348	164	3	6	6	X
app01-10348	164	4	]	]	PUNCT
app01-10348	164	5	s.	s.	PROPN
app01-10348	164	6	zare	zare	PROPN
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app01-10348	164	8	,	,	PUNCT
app01-10348	164	9	m.	m.	NOUN
app01-10348	164	10	nasr	nasr	PROPN
app01-10348	164	11	esfahani	esfahani	PROPN
app01-10348	164	12	,	,	PUNCT
app01-10348	164	13	z.	z.	PROPN
app01-10348	164	14	tasdemir	tasdemir	PROPN
app01-10348	164	15	,	,	PUNCT
app01-10348	164	16	et	et	PROPN
app01-10348	164	17	al	al	PROPN
app01-10348	164	18	.	.	PROPN
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app01-10348	164	20	modeling	modeling	NOUN
app01-10348	164	21	of	of	ADP
app01-10348	164	22	the	the	DET
app01-10348	164	23	bending	bend	VERB
app01-10348	164	24	response	response	NOUN
app01-10348	164	25	of	of	ADP
app01-10348	164	26	silicon	silicon	NOUN
app01-10348	164	27	nanowires	nanowire	NOUN
app01-10348	164	28	.	.	PUNCT
app01-10348	165	1	acs	acs	PROPN
app01-10348	165	2	applied	apply	VERB
app01-10348	165	3	nano	nano	NOUN
app01-10348	165	4	materials	material	NOUN
app01-10348	165	5	6(17):15465–15478	6(17):15465–15478	NUM
app01-10348	165	6	,	,	PUNCT
app01-10348	165	7	2023	2023	NUM
app01-10348	165	8	.	.	PUNCT
app01-10348	166	1	https://doi.org/10.1021/acsanm.3c02077	https://doi.org/10.1021/acsanm.3c02077	X
app01-10348	166	2	[	[	X
app01-10348	166	3	7	7	NUM
app01-10348	166	4	]	]	PUNCT
app01-10348	166	5	s.	s.	PROPN
app01-10348	166	6	z.	z.	PROPN
app01-10348	166	7	pakzad	pakzad	PROPN
app01-10348	166	8	,	,	PUNCT
app01-10348	166	9	m.	m.	NOUN
app01-10348	166	10	n.	n.	PROPN
app01-10348	166	11	esfahani	esfahani	PROPN
app01-10348	166	12	,	,	PUNCT
app01-10348	166	13	b.	b.	PROPN
app01-10348	166	14	e.	e.	PROPN
app01-10348	166	15	alaca	alaca	PROPN
app01-10348	166	16	.	.	PUNCT
app01-10348	167	1	investigation	investigation	NOUN
app01-10348	167	2	of	of	ADP
app01-10348	167	3	the	the	DET
app01-10348	167	4	bending	bend	VERB
app01-10348	167	5	behavior	behavior	NOUN
app01-10348	167	6	in	in	ADP
app01-10348	167	7	silicon	silicon	NOUN
app01-10348	167	8	nanowires	nanowire	NOUN
app01-10348	167	9	:	:	PUNCT
app01-10348	167	10	a	a	DET
app01-10348	167	11	nanomechanical	nanomechanical	ADJ
app01-10348	167	12	modeling	modeling	NOUN
app01-10348	167	13	perspective	perspective	NOUN
app01-10348	167	14	.	.	PUNCT
app01-10348	168	1	international	international	ADJ
app01-10348	168	2	journal	journal	PROPN
app01-10348	168	3	of	of	ADP
app01-10348	168	4	applied	apply	VERB
app01-10348	168	5	mechanics	mechanic	NOUN
app01-10348	168	6	16(07):2450073	16(07):2450073	NUM
app01-10348	168	7	,	,	PUNCT
app01-10348	168	8	2024	2024	NUM
app01-10348	168	9	.	.	PUNCT
app01-10348	169	1	https://doi.org/10.1142/s175882512450073x	https://doi.org/10.1142/s175882512450073x	NOUN
app01-10348	170	1	[	[	X
app01-10348	170	2	8	8	NUM
app01-10348	170	3	]	]	X
app01-10348	170	4	h.	h.	PROPN
app01-10348	170	5	d.	d.	PROPN
app01-10348	170	6	espinosa	espinosa	PROPN
app01-10348	170	7	,	,	PUNCT
app01-10348	170	8	r.	r.	PROPN
app01-10348	170	9	a.	a.	PROPN
app01-10348	170	10	bernal	bernal	PROPN
app01-10348	170	11	,	,	PUNCT
app01-10348	170	12	t.	t.	PROPN
app01-10348	170	13	filleter	filleter	PROPN
app01-10348	170	14	.	.	PUNCT
app01-10348	171	1	in	in	ADP
app01-10348	171	2	-	-	PUNCT
app01-10348	171	3	situ	situ	ADJ
app01-10348	171	4	tem	tem	NOUN
app01-10348	171	5	electromechanical	electromechanical	ADJ
app01-10348	171	6	testing	testing	NOUN
app01-10348	171	7	of	of	ADP
app01-10348	171	8	nanowires	nanowire	NOUN
app01-10348	171	9	and	and	CCONJ
app01-10348	171	10	nanotubes	nanotube	NOUN
app01-10348	171	11	.	.	PUNCT
app01-10348	172	1	in	in	ADP
app01-10348	172	2	nano	nano	NOUN
app01-10348	172	3	and	and	CCONJ
app01-10348	172	4	cell	cell	NOUN
app01-10348	172	5	mechanics	mechanic	NOUN
app01-10348	172	6	:	:	PUNCT
app01-10348	172	7	fundamentals	fundamental	NOUN
app01-10348	172	8	and	and	CCONJ
app01-10348	172	9	frontiers	frontier	NOUN
app01-10348	172	10	,	,	PUNCT
app01-10348	172	11	pp	pp	ADJ
app01-10348	172	12	.	.	PUNCT
app01-10348	173	1	191–226	191–226	NUM
app01-10348	173	2	.	.	PUNCT
app01-10348	174	1	wiley	wiley	PROPN
app01-10348	174	2	online	online	PROPN
app01-10348	174	3	library	library	PROPN
app01-10348	174	4	,	,	PUNCT
app01-10348	174	5	2013	2013	NUM
app01-10348	174	6	.	.	PUNCT
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app01-10348	175	2	[	[	PUNCT
app01-10348	175	3	9	9	NUM
app01-10348	175	4	]	]	PUNCT
app01-10348	175	5	c.	c.	PROPN
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app01-10348	175	7	,	,	PUNCT
app01-10348	175	8	e.	e.	PROPN
app01-10348	175	9	van	van	PROPN
app01-10348	175	10	der	der	PROPN
app01-10348	175	11	drift	drift	NOUN
app01-10348	175	12	,	,	PUNCT
app01-10348	175	13	p.	p.	NOUN
app01-10348	175	14	french	french	PROPN
app01-10348	175	15	.	.	PUNCT
app01-10348	176	1	review	review	NOUN
app01-10348	176	2	of	of	ADP
app01-10348	176	3	scaling	scale	VERB
app01-10348	176	4	effects	effect	NOUN
app01-10348	176	5	on	on	ADP
app01-10348	176	6	physical	physical	ADJ
app01-10348	176	7	properties	property	NOUN
app01-10348	176	8	and	and	CCONJ
app01-10348	176	9	practicalities	practicality	NOUN
app01-10348	176	10	of	of	ADP
app01-10348	176	11	cantilever	cantilever	NOUN
app01-10348	176	12	sensors	sensor	NOUN
app01-10348	176	13	.	.	PUNCT
app01-10348	177	1	journal	journal	NOUN
app01-10348	177	2	of	of	ADP
app01-10348	177	3	micromechanics	micromechanic	NOUN
app01-10348	177	4	and	and	CCONJ
app01-10348	177	5	microengineering	microengineering	NOUN
app01-10348	177	6	32(10):103002	32(10):103002	NUM
app01-10348	177	7	,	,	PUNCT
app01-10348	177	8	2022	2022	NUM
app01-10348	177	9	.	.	PUNCT
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app01-10348	179	1	[	[	X
app01-10348	179	2	10	10	NUM
app01-10348	179	3	]	]	X
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app01-10348	179	5	dehm	dehm	PROPN
app01-10348	179	6	,	,	PUNCT
app01-10348	179	7	b.	b.	PROPN
app01-10348	179	8	n.	n.	PROPN
app01-10348	179	9	jaya	jaya	PROPN
app01-10348	179	10	,	,	PUNCT
app01-10348	179	11	r.	r.	PROPN
app01-10348	179	12	raghavan	raghavan	PROPN
app01-10348	179	13	,	,	PUNCT
app01-10348	179	14	c.	c.	PROPN
app01-10348	179	15	kirchlechner	kirchlechner	PROPN
app01-10348	179	16	.	.	PUNCT
app01-10348	180	1	overview	overview	NOUN
app01-10348	180	2	on	on	ADP
app01-10348	180	3	microand	microand	PROPN
app01-10348	180	4	nanomechanical	nanomechanical	ADJ
app01-10348	180	5	testing	testing	NOUN
app01-10348	180	6	:	:	PUNCT
app01-10348	180	7	new	new	ADJ
app01-10348	180	8	insights	insight	NOUN
app01-10348	180	9	in	in	ADP
app01-10348	180	10	interface	interface	NOUN
app01-10348	180	11	plasticity	plasticity	NOUN
app01-10348	180	12	and	and	CCONJ
app01-10348	180	13	fracture	fracture	NOUN
app01-10348	180	14	at	at	ADP
app01-10348	180	15	small	small	ADJ
app01-10348	180	16	length	length	NOUN
app01-10348	180	17	scales	scale	NOUN
app01-10348	180	18	.	.	PUNCT
app01-10348	181	1	acta	acta	PROPN
app01-10348	181	2	materialia	materialia	PROPN
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app01-10348	181	4	,	,	PUNCT
app01-10348	181	5	2018	2018	NUM
app01-10348	181	6	.	.	PUNCT
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app01-10348	182	2	[	[	X
app01-10348	182	3	11	11	NUM
app01-10348	182	4	]	]	X
app01-10348	182	5	d.	d.	PROPN
app01-10348	182	6	s.	s.	PROPN
app01-10348	182	7	gianola	gianola	PROPN
app01-10348	182	8	,	,	PUNCT
app01-10348	182	9	n.	n.	PROPN
app01-10348	182	10	m.	m.	PROPN
app01-10348	182	11	della	della	PROPN
app01-10348	182	12	ventura	ventura	PROPN
app01-10348	182	13	,	,	PUNCT
app01-10348	182	14	g.	g.	PROPN
app01-10348	182	15	h.	h.	PROPN
app01-10348	182	16	balbus	balbus	PROPN
app01-10348	182	17	,	,	PUNCT
app01-10348	182	18	et	et	PROPN
app01-10348	182	19	al	al	PROPN
app01-10348	182	20	.	.	PROPN
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app01-10348	182	22	and	and	CCONJ
app01-10348	182	23	opportunities	opportunity	NOUN
app01-10348	182	24	in	in	ADP
app01-10348	182	25	high	high	ADJ
app01-10348	182	26	-	-	PUNCT
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app01-10348	182	28	small	small	ADJ
app01-10348	182	29	-	-	PUNCT
app01-10348	182	30	scale	scale	NOUN
app01-10348	182	31	mechanical	mechanical	ADJ
app01-10348	182	32	testing	testing	NOUN
app01-10348	182	33	.	.	PUNCT
app01-10348	183	1	current	current	ADJ
app01-10348	183	2	opinion	opinion	NOUN
app01-10348	183	3	in	in	ADP
app01-10348	183	4	solid	solid	ADJ
app01-10348	183	5	state	state	NOUN
app01-10348	183	6	and	and	CCONJ
app01-10348	183	7	materials	material	NOUN
app01-10348	183	8	science	science	NOUN
app01-10348	183	9	27(4):101090	27(4):101090	NUM
app01-10348	183	10	,	,	PUNCT
app01-10348	183	11	2023	2023	NUM
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app01-10348	186	15	-	-	PUNCT
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app01-10348	186	26	.	.	PUNCT
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app01-10348	190	9	-	-	PUNCT
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app01-10348	190	12	.	.	PUNCT
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app01-10348	192	6	,	,	PUNCT
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app01-10348	192	8	.	.	PUNCT
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app01-10348	194	20	native	native	ADJ
app01-10348	194	21	oxide	oxide	NOUN
app01-10348	194	22	on	on	ADP
app01-10348	194	23	stress	stress	NOUN
app01-10348	194	24	in	in	ADP
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app01-10348	194	27	:	:	PUNCT
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app01-10348	194	29	for	for	ADP
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app01-10348	194	31	systems	system	NOUN
app01-10348	194	32	.	.	PUNCT
app01-10348	195	1	acs	acs	PROPN
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app01-10348	195	3	nano	nano	NOUN
app01-10348	195	4	materials	material	NOUN
app01-10348	195	5	5(9):13276–13285	5(9):13276–13285	NUM
app01-10348	195	6	,	,	PUNCT
app01-10348	195	7	2022	2022	NUM
app01-10348	195	8	.	.	PUNCT
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app01-10348	197	14	,	,	PUNCT
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app01-10348	198	9	behavior	behavior	NOUN
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app01-10348	198	13	.	.	PUNCT
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app01-10348	199	4	,	,	PUNCT
app01-10348	199	5	2021	2021	NUM
app01-10348	199	6	.	.	PUNCT
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app01-10348	200	4	]	]	PUNCT
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app01-10348	200	8	,	,	PUNCT
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app01-10348	200	16	.	.	PUNCT
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app01-10348	201	2	role	role	NOUN
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app01-10348	201	4	native	native	ADJ
app01-10348	201	5	oxide	oxide	NOUN
app01-10348	201	6	on	on	ADP
app01-10348	201	7	the	the	DET
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app01-10348	201	9	behavior	behavior	NOUN
app01-10348	201	10	of	of	ADP
app01-10348	201	11	silicon	silicon	NOUN
app01-10348	201	12	nanowires	nanowire	NOUN
app01-10348	201	13	.	.	PUNCT
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app01-10348	202	4	34:105002	34:105002	NUM
app01-10348	202	5	,	,	PUNCT
app01-10348	202	6	2023	2023	NUM
app01-10348	202	7	.	.	PUNCT
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app01-10348	203	8	,	,	PUNCT
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app01-10348	203	10	n.	n.	PROPN
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app01-10348	203	14	e.	e.	PROPN
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app01-10348	203	16	.	.	PUNCT
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app01-10348	204	9	surface	surface	NOUN
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app01-10348	205	5	,	,	PUNCT
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app01-10348	209	10	s.	s.	PROPN
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app01-10348	210	9	-	-	PUNCT
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app01-10348	221	9	n.	n.	PROPN
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app01-10348	222	7	dependent	dependent	ADJ
app01-10348	222	8	tensile	tensile	NOUN
app01-10348	222	9	properties	property	NOUN
app01-10348	222	10	of	of	ADP
app01-10348	222	11	si	si	NOUN
app01-10348	222	12	nanowires	nanowire	NOUN
app01-10348	222	13	with	with	ADP
app01-10348	222	14	native	native	ADJ
app01-10348	222	15	oxide	oxide	NOUN
app01-10348	222	16	:	:	PUNCT
app01-10348	222	17	surface	surface	NOUN
app01-10348	222	18	stress	stress	NOUN
app01-10348	222	19	and	and	CCONJ
app01-10348	222	20	surface	surface	NOUN
app01-10348	222	21	energy	energy	NOUN
app01-10348	222	22	effects	effect	NOUN
app01-10348	222	23	.	.	PUNCT
app01-10348	223	1	in	in	ADP
app01-10348	223	2	2021	2021	NUM
app01-10348	223	3	ieee	ieee	NOUN
app01-10348	223	4	21st	21st	NOUN
app01-10348	223	5	international	international	ADJ
app01-10348	223	6	conference	conference	NOUN
app01-10348	223	7	on	on	ADP
app01-10348	223	8	nanotechnology	nanotechnology	NOUN
app01-10348	223	9	(	(	PUNCT
app01-10348	223	10	nano	nano	NOUN
app01-10348	223	11	)	)	PUNCT
app01-10348	223	12	,	,	PUNCT
app01-10348	223	13	pp	pp	ADP
app01-10348	223	14	.	.	PUNCT
app01-10348	224	1	370–373	370–373	NUM
app01-10348	224	2	.	.	PUNCT
app01-10348	224	3	ieee	ieee	NOUN
app01-10348	224	4	,	,	PUNCT
app01-10348	224	5	2021	2021	NUM
app01-10348	224	6	.	.	PUNCT
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app01-10348	226	1	[	[	X
app01-10348	226	2	23	23	NUM
app01-10348	226	3	]	]	PUNCT
app01-10348	226	4	s.	s.	PROPN
app01-10348	226	5	z.	z.	PROPN
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app01-10348	226	8	b.	b.	PROPN
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app01-10348	226	10	,	,	PUNCT
app01-10348	226	11	m.	m.	PROPN
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app01-10348	226	13	,	,	PUNCT
app01-10348	226	14	et	et	PROPN
app01-10348	226	15	al	al	PROPN
app01-10348	226	16	.	.	PROPN
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app01-10348	226	18	-	-	PUNCT
app01-10348	226	19	throughput	throughput	NOUN
app01-10348	226	20	vibrational	vibrational	ADJ
app01-10348	226	21	testing	testing	NOUN
app01-10348	226	22	of	of	ADP
app01-10348	226	23	silicon	silicon	NOUN
app01-10348	226	24	nanowires	nanowire	NOUN
app01-10348	226	25	.	.	PUNCT
app01-10348	227	1	in	in	ADP
app01-10348	227	2	2024	2024	NUM
app01-10348	227	3	international	international	ADJ
app01-10348	227	4	conference	conference	NOUN
app01-10348	227	5	on	on	ADP
app01-10348	227	6	manipulation	manipulation	NOUN
app01-10348	227	7	,	,	PUNCT
app01-10348	227	8	automation	automation	NOUN
app01-10348	227	9	and	and	CCONJ
app01-10348	227	10	robotics	robotic	NOUN
app01-10348	227	11	at	at	ADP
app01-10348	227	12	small	small	ADJ
app01-10348	227	13	scales	scale	NOUN
app01-10348	227	14	(	(	PUNCT
app01-10348	227	15	marss	marss	NOUN
app01-10348	227	16	)	)	PUNCT
app01-10348	227	17	,	,	PUNCT
app01-10348	227	18	pp	pp	ADP
app01-10348	227	19	.	.	PUNCT
app01-10348	228	1	1–6	1–6	NUM
app01-10348	228	2	.	.	X
app01-10348	229	1	ieee	ieee	NOUN
app01-10348	229	2	,	,	PUNCT
app01-10348	229	3	2024	2024	NUM
app01-10348	229	4	.	.	PUNCT
app01-10348	230	1	https	https	NOUN
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app01-10348	231	2	24	24	NUM
app01-10348	231	3	]	]	PUNCT
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app01-10348	231	5	j.	j.	PROPN
app01-10348	231	6	harris	harris	PROPN
app01-10348	231	7	,	,	PUNCT
app01-10348	231	8	a.	a.	PROPN
app01-10348	231	9	e.	e.	PROPN
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app01-10348	231	12	w.	w.	PROPN
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app01-10348	231	17	.	.	PROPN
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app01-10348	231	20	the	the	DET
app01-10348	231	21	state	state	NOUN
app01-10348	231	22	of	of	ADP
app01-10348	231	23	stress	stress	NOUN
app01-10348	231	24	in	in	ADP
app01-10348	231	25	silicon	silicon	NOUN
app01-10348	231	26	with	with	ADP
app01-10348	231	27	micro	micro	ADJ
app01-10348	231	28	-	-	NOUN
app01-10348	231	29	raman	raman	ADJ
app01-10348	231	30	spectroscopy	spectroscopy	NOUN
app01-10348	231	31	.	.	PUNCT
app01-10348	232	1	journal	journal	NOUN
app01-10348	232	2	of	of	ADP
app01-10348	232	3	applied	applied	ADJ
app01-10348	232	4	physics	physics	NOUN
app01-10348	232	5	96(12):7195–7201	96(12):7195–7201	NUM
app01-10348	232	6	,	,	PUNCT
app01-10348	232	7	2004	2004	NUM
app01-10348	232	8	.	.	PUNCT
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app01-10348	234	2	25	25	NUM
app01-10348	234	3	]	]	PUNCT
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app01-10348	234	5	b.	b.	PROPN
app01-10348	234	6	spejo	spejo	PROPN
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app01-10348	234	8	j.	j.	PROPN
app01-10348	234	9	l.	l.	PROPN
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app01-10348	234	11	-	-	PUNCT
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app01-10348	234	13	,	,	PUNCT
app01-10348	234	14	m.	m.	NOUN
app01-10348	234	15	puydinger	puydinger	NOUN
app01-10348	234	16	dos	do	VERB
app01-10348	234	17	santos	santos	PROPN
app01-10348	234	18	,	,	PUNCT
app01-10348	234	19	et	et	PROPN
app01-10348	234	20	al	al	PROPN
app01-10348	234	21	.	.	PUNCT
app01-10348	235	1	non	non	ADJ
app01-10348	235	2	-	-	ADJ
app01-10348	235	3	linear	linear	ADJ
app01-10348	235	4	raman	raman	NOUN
app01-10348	235	5	shift	shift	NOUN
app01-10348	235	6	-	-	PUNCT
app01-10348	235	7	stress	stress	NOUN
app01-10348	235	8	behavior	behavior	NOUN
app01-10348	235	9	in	in	ADP
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app01-10348	235	11	-	-	PUNCT
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app01-10348	235	13	fabricated	fabricate	VERB
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app01-10348	235	15	strained	strained	ADJ
app01-10348	235	16	silicon	silicon	NOUN
app01-10348	235	17	nanowires	nanowire	NOUN
app01-10348	235	18	.	.	PUNCT
app01-10348	236	1	journal	journal	NOUN
app01-10348	236	2	of	of	ADP
app01-10348	236	3	applied	applied	ADJ
app01-10348	236	4	physics	physics	NOUN
app01-10348	236	5	128(4):045704	128(4):045704	PROPN
app01-10348	236	6	,	,	PUNCT
app01-10348	236	7	2020	2020	NUM
app01-10348	236	8	.	.	PUNCT
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app01-10348	239	1	https://doi.org/10.1088/1361-6463/aa6e2b	https://doi.org/10.1088/1361-6463/aa6e2b	PROPN
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app01-10348	241	15	b.	b.	PROPN
app01-10348	241	16	shirin	shirin	PROPN
app01-10348	241	17	et	et	PROPN
app01-10348	241	18	al	al	PROPN
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app01-10348	241	20	acta	acta	PROPN
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app01-10348	241	22	ctu	ctu	NOUN
app01-10348	241	23	proceedings	proceeding	NOUN
app01-10348	241	24	[	[	X
app01-10348	241	25	26	26	NUM
app01-10348	241	26	]	]	X
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app01-10348	241	35	r.	r.	PROPN
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app01-10348	241	47	under	under	ADP
app01-10348	241	48	tensile	tensile	NOUN
app01-10348	241	49	elastic	elastic	ADJ
app01-10348	241	50	strain	strain	NOUN
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app01-10348	241	54	%	%	NOUN
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app01-10348	242	2	communications	communication	NOUN
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app01-10348	245	3	-	-	PUNCT
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app01-10348	251	9	proceedings	proceeding	NOUN
app01-10348	251	10	50:74–80	50:74–80	PROPN
app01-10348	251	11	,	,	PUNCT
app01-10348	251	12	2024	2024	NUM
app01-10348	251	13	1	1	NUM
app01-10348	251	14	introduction	introduction	NOUN
app01-10348	251	15	2	2	NUM
app01-10348	251	16	materials	material	NOUN
app01-10348	251	17	and	and	CCONJ
app01-10348	251	18	methods	method	NOUN
app01-10348	251	19	2.1	2.1	NUM
app01-10348	251	20	fabrication	fabrication	NOUN
app01-10348	251	21	2.2	2.2	NUM
app01-10348	251	22	resonance	resonance	NOUN
app01-10348	251	23	testing	test	VERB
app01-10348	251	24	2.3	2.3	NUM
app01-10348	251	25	raman	raman	NOUN
app01-10348	251	26	characterization	characterization	NOUN
app01-10348	251	27	2.4	2.4	NUM
app01-10348	251	28	thermal	thermal	ADJ
app01-10348	251	29	process	process	NOUN
app01-10348	251	30	3	3	NUM
app01-10348	251	31	results	result	VERB
app01-10348	251	32	3.1	3.1	NUM
app01-10348	251	33	fabrication	fabrication	NOUN
app01-10348	251	34	of	of	ADP
app01-10348	251	35	si	si	PROPN
app01-10348	251	36	nws	nws	PROPN
app01-10348	251	37	3.2	3.2	NUM
app01-10348	251	38	characterization	characterization	NOUN
app01-10348	251	39	and	and	CCONJ
app01-10348	251	40	testing	testing	NOUN
app01-10348	251	41	of	of	ADP
app01-10348	251	42	si	si	PROPN
app01-10348	251	43	nws	nws	PROPN
app01-10348	251	44	4	4	NUM
app01-10348	251	45	conclusions	conclusion	NOUN
app01-10348	251	46	acknowledgements	acknowledgement	NOUN
app01-10348	251	47	references	reference	NOUN