id	sid	tid	token	lemma	pos
app01-10358	1	1	acta	acta	PROPN
app01-10358	1	2	polytechnica	polytechnica	PROPN
app01-10358	1	3	ctu	ctu	PROPN
app01-10358	1	4	proceedings	proceeding	NOUN
app01-10358	1	5	https://doi.org/10.14311/app.2024.50.0036	https://doi.org/10.14311/app.2024.50.0036	PROPN
app01-10358	1	6	acta	acta	PROPN
app01-10358	1	7	polytechnica	polytechnica	PROPN
app01-10358	1	8	ctu	ctu	NOUN
app01-10358	1	9	proceedings	proceeding	NOUN
app01-10358	1	10	50:36–43	50:36–43	NUM
app01-10358	1	11	,	,	PUNCT
app01-10358	1	12	2024	2024	NUM
app01-10358	1	13	©	©	ADP
app01-10358	1	14	2024	2024	NUM
app01-10358	1	15	the	the	DET
app01-10358	1	16	author(s	author(s	NOUN
app01-10358	1	17	)	)	PUNCT
app01-10358	1	18	.	.	PUNCT
app01-10358	2	1	licensed	license	VERB
app01-10358	2	2	under	under	ADP
app01-10358	2	3	a	a	DET
app01-10358	2	4	cc	cc	NOUN
app01-10358	2	5	-	-	PUNCT
app01-10358	2	6	by	by	ADP
app01-10358	2	7	4.0	4.0	NUM
app01-10358	2	8	licence	licence	NOUN
app01-10358	2	9	published	publish	VERB
app01-10358	2	10	by	by	ADP
app01-10358	2	11	the	the	DET
app01-10358	2	12	czech	czech	PROPN
app01-10358	2	13	technical	technical	PROPN
app01-10358	2	14	university	university	PROPN
app01-10358	2	15	in	in	ADP
app01-10358	2	16	prague	prague	NOUN
app01-10358	2	17	substrate	substrate	NOUN
app01-10358	2	18	effect	effect	NOUN
app01-10358	2	19	in	in	ADP
app01-10358	2	20	the	the	DET
app01-10358	2	21	evaluation	evaluation	NOUN
app01-10358	2	22	of	of	ADP
app01-10358	2	23	elastic	elastic	ADJ
app01-10358	2	24	modulus	modulus	NOUN
app01-10358	2	25	of	of	ADP
app01-10358	2	26	thin	thin	ADJ
app01-10358	2	27	pvd	pvd	PROPN
app01-10358	2	28	coatings	coating	NOUN
app01-10358	2	29	from	from	ADP
app01-10358	2	30	nanoindentation	nanoindentation	NOUN
app01-10358	2	31	františek	františek	NOUN
app01-10358	2	32	lofaj	lofaj	ADJ
app01-10358	2	33	slovak	slovak	PROPN
app01-10358	2	34	academy	academy	PROPN
app01-10358	2	35	of	of	ADP
app01-10358	2	36	sciences	sciences	PROPN
app01-10358	2	37	,	,	PUNCT
app01-10358	2	38	institute	institute	NOUN
app01-10358	2	39	of	of	ADP
app01-10358	2	40	materials	material	NOUN
app01-10358	2	41	research	research	NOUN
app01-10358	2	42	,	,	PUNCT
app01-10358	2	43	watsonova	watsonova	VERB
app01-10358	2	44	47	47	NUM
app01-10358	2	45	,	,	PUNCT
app01-10358	2	46	040	040	NUM
app01-10358	2	47	01	01	NUM
app01-10358	2	48	košice	košice	NOUN
app01-10358	2	49	,	,	PUNCT
app01-10358	2	50	slovakia	slovakia	PROPN
app01-10358	2	51	correspondence	correspondence	NOUN
app01-10358	2	52	:	:	PUNCT
app01-10358	2	53	flofaj@saske.sk	flofaj@saske.sk	PROPN
app01-10358	2	54	abstract	abstract	ADJ
app01-10358	2	55	.	.	PUNCT
app01-10358	3	1	the	the	DET
app01-10358	3	2	comparison	comparison	NOUN
app01-10358	3	3	of	of	ADP
app01-10358	3	4	nanoindentation	nanoindentation	NOUN
app01-10358	3	5	results	result	NOUN
app01-10358	3	6	on	on	ADP
app01-10358	3	7	reactive	reactive	ADJ
app01-10358	3	8	hitus	hitus	NOUN
app01-10358	3	9	tizrhf+me	tizrhf+me	NOUN
app01-10358	3	10	-	-	PUNCT
app01-10358	3	11	ny	ny	PROPN
app01-10358	3	12	(	(	PUNCT
app01-10358	3	13	me	i	PRON
app01-10358	3	14	=	=	SYM
app01-10358	3	15	nb	nb	PROPN
app01-10358	3	16	,	,	PUNCT
app01-10358	3	17	v	v	NOUN
app01-10358	3	18	,	,	PUNCT
app01-10358	3	19	ta	ta	X
app01-10358	3	20	and	and	CCONJ
app01-10358	3	21	vnbta	vnbta	PROPN
app01-10358	3	22	)	)	PUNCT
app01-10358	3	23	and	and	CCONJ
app01-10358	3	24	reactive	reactive	ADJ
app01-10358	3	25	dcms	dcms	NOUN
app01-10358	3	26	nbmotaw	nbmotaw	NOUN
app01-10358	3	27	coatings	coating	NOUN
app01-10358	3	28	showed	show	VERB
app01-10358	3	29	that	that	SCONJ
app01-10358	3	30	the	the	DET
app01-10358	3	31	influence	influence	NOUN
app01-10358	3	32	of	of	ADP
app01-10358	3	33	substrate	substrate	NOUN
app01-10358	3	34	stiffness	stiffness	NOUN
app01-10358	3	35	is	be	AUX
app01-10358	3	36	still	still	ADV
app01-10358	3	37	not	not	PART
app01-10358	3	38	fully	fully	ADV
app01-10358	3	39	eliminated	eliminate	VERB
app01-10358	3	40	in	in	ADP
app01-10358	3	41	the	the	DET
app01-10358	3	42	evaluation	evaluation	NOUN
app01-10358	3	43	of	of	ADP
app01-10358	3	44	indentation	indentation	NOUN
app01-10358	3	45	modulus	modulus	NOUN
app01-10358	3	46	.	.	PUNCT
app01-10358	4	1	to	to	PART
app01-10358	4	2	obtain	obtain	VERB
app01-10358	4	3	comparable	comparable	ADJ
app01-10358	4	4	results	result	NOUN
app01-10358	4	5	by	by	ADP
app01-10358	4	6	keeping	keep	VERB
app01-10358	4	7	the	the	DET
app01-10358	4	8	systematic	systematic	ADJ
app01-10358	4	9	error	error	NOUN
app01-10358	4	10	resulting	result	VERB
app01-10358	4	11	from	from	ADP
app01-10358	4	12	the	the	DET
app01-10358	4	13	existing	exist	VERB
app01-10358	4	14	evaluation	evaluation	NOUN
app01-10358	4	15	procedures	procedure	NOUN
app01-10358	4	16	the	the	DET
app01-10358	4	17	same	same	ADJ
app01-10358	4	18	,	,	PUNCT
app01-10358	4	19	nanoindentation	nanoindentation	NOUN
app01-10358	4	20	should	should	AUX
app01-10358	4	21	be	be	AUX
app01-10358	4	22	performed	perform	VERB
app01-10358	4	23	using	use	VERB
app01-10358	4	24	the	the	DET
app01-10358	4	25	same	same	ADJ
app01-10358	4	26	test	test	NOUN
app01-10358	4	27	parameters	parameter	NOUN
app01-10358	4	28	,	,	PUNCT
app01-10358	4	29	a	a	DET
app01-10358	4	30	method	method	NOUN
app01-10358	4	31	for	for	ADP
app01-10358	4	32	depth	depth	NOUN
app01-10358	4	33	profile	profile	NOUN
app01-10358	4	34	acquisition	acquisition	NOUN
app01-10358	4	35	,	,	PUNCT
app01-10358	4	36	a	a	DET
app01-10358	4	37	data	data	NOUN
app01-10358	4	38	evaluation	evaluation	NOUN
app01-10358	4	39	procedure	procedure	NOUN
app01-10358	4	40	,	,	PUNCT
app01-10358	4	41	and	and	CCONJ
app01-10358	4	42	coatings	coating	NOUN
app01-10358	4	43	with	with	ADP
app01-10358	4	44	similar	similar	ADJ
app01-10358	4	45	thicknesses	thickness	NOUN
app01-10358	4	46	on	on	ADP
app01-10358	4	47	the	the	DET
app01-10358	4	48	same	same	ADJ
app01-10358	4	49	type	type	NOUN
app01-10358	4	50	of	of	ADP
app01-10358	4	51	substrate	substrate	NOUN
app01-10358	4	52	.	.	PUNCT
app01-10358	5	1	applying	apply	VERB
app01-10358	5	2	these	these	DET
app01-10358	5	3	rules	rule	NOUN
app01-10358	5	4	to	to	ADP
app01-10358	5	5	nanoindentation	nanoindentation	NOUN
app01-10358	5	6	on	on	ADP
app01-10358	5	7	tizrhf+me	tizrhf+me	ADJ
app01-10358	5	8	-	-	PUNCT
app01-10358	5	9	ny	ny	NOUN
app01-10358	5	10	coatings	coating	NOUN
app01-10358	5	11	showed	show	VERB
app01-10358	5	12	that	that	SCONJ
app01-10358	5	13	the	the	DET
app01-10358	5	14	addition	addition	NOUN
app01-10358	5	15	of	of	ADP
app01-10358	5	16	me	i	PRON
app01-10358	5	17	=	=	SYM
app01-10358	5	18	nb	nb	PROPN
app01-10358	5	19	,	,	PUNCT
app01-10358	5	20	v	v	PROPN
app01-10358	5	21	,	,	PUNCT
app01-10358	5	22	ta	ta	PROPN
app01-10358	5	23	,	,	PUNCT
app01-10358	5	24	and	and	CCONJ
app01-10358	5	25	vnbta	vnbta	NOUN
app01-10358	5	26	caused	cause	VERB
app01-10358	5	27	some	some	DET
app01-10358	5	28	degradation	degradation	NOUN
app01-10358	5	29	of	of	ADP
app01-10358	5	30	mechanical	mechanical	ADJ
app01-10358	5	31	properties	property	NOUN
app01-10358	5	32	indicating	indicate	VERB
app01-10358	5	33	negligible	negligible	ADJ
app01-10358	5	34	or	or	CCONJ
app01-10358	5	35	even	even	ADV
app01-10358	5	36	negative	negative	ADJ
app01-10358	5	37	“	"	PUNCT
app01-10358	5	38	cocktail	cocktail	NOUN
app01-10358	5	39	effect	effect	NOUN
app01-10358	5	40	”	"	PUNCT
app01-10358	5	41	.	.	PUNCT
app01-10358	6	1	keywords	keyword	NOUN
app01-10358	6	2	:	:	PUNCT
app01-10358	6	3	thin	thin	PROPN
app01-10358	6	4	pvd	pvd	PROPN
app01-10358	6	5	films	film	NOUN
app01-10358	6	6	,	,	PUNCT
app01-10358	6	7	nanoindentation	nanoindentation	NOUN
app01-10358	6	8	,	,	PUNCT
app01-10358	6	9	substrate	substrate	NOUN
app01-10358	6	10	effect	effect	NOUN
app01-10358	6	11	elimination	elimination	NOUN
app01-10358	6	12	,	,	PUNCT
app01-10358	6	13	multi	multi	ADJ
app01-10358	6	14	-	-	ADJ
app01-10358	6	15	element	element	ADJ
app01-10358	6	16	nitride	nitride	ADJ
app01-10358	6	17	coatings	coating	NOUN
app01-10358	6	18	.	.	PUNCT
app01-10358	7	1	1	1	X
app01-10358	7	2	.	.	X
app01-10358	7	3	introduction	introduction	NOUN
app01-10358	7	4	the	the	DET
app01-10358	7	5	nanoindentation	nanoindentation	NOUN
app01-10358	7	6	testing	testing	NOUN
app01-10358	7	7	on	on	ADP
app01-10358	7	8	thin	thin	ADJ
app01-10358	7	9	hard	hard	ADJ
app01-10358	7	10	coating	coating	NOUN
app01-10358	7	11	/	/	SYM
app01-10358	7	12	softer	soft	ADJ
app01-10358	7	13	substrate	substrate	NOUN
app01-10358	7	14	(	(	PUNCT
app01-10358	7	15	and	and	CCONJ
app01-10358	7	16	vice	vice	ADV
app01-10358	7	17	versa	versa	ADV
app01-10358	7	18	)	)	PUNCT
app01-10358	7	19	systems	system	NOUN
app01-10358	7	20	always	always	ADV
app01-10358	7	21	generates	generate	VERB
app01-10358	7	22	“	"	PUNCT
app01-10358	7	23	composite	composite	ADJ
app01-10358	7	24	”	"	PUNCT
app01-10358	7	25	values	value	NOUN
app01-10358	7	26	due	due	ADJ
app01-10358	7	27	to	to	ADP
app01-10358	7	28	simultaneous	simultaneous	ADJ
app01-10358	7	29	loading	loading	NOUN
app01-10358	7	30	and	and	CCONJ
app01-10358	7	31	response	response	NOUN
app01-10358	7	32	from	from	ADP
app01-10358	7	33	the	the	DET
app01-10358	7	34	coating	coating	NOUN
app01-10358	7	35	and	and	CCONJ
app01-10358	7	36	substrate	substrate	NOUN
app01-10358	7	37	.	.	PUNCT
app01-10358	8	1	the	the	DET
app01-10358	8	2	problem	problem	NOUN
app01-10358	8	3	can	can	AUX
app01-10358	8	4	be	be	AUX
app01-10358	8	5	solved	solve	VERB
app01-10358	8	6	using	use	VERB
app01-10358	8	7	several	several	ADJ
app01-10358	8	8	different	different	ADJ
app01-10358	8	9	approaches	approach	NOUN
app01-10358	8	10	.	.	PUNCT
app01-10358	9	1	possibly	possibly	ADV
app01-10358	9	2	the	the	DET
app01-10358	9	3	first	first	ADJ
app01-10358	9	4	way	way	NOUN
app01-10358	9	5	to	to	PART
app01-10358	9	6	extract	extract	VERB
app01-10358	9	7	coating	coat	VERB
app01-10358	9	8	hardness	hardness	ADV
app01-10358	9	9	from	from	ADP
app01-10358	9	10	the	the	DET
app01-10358	9	11	composite	composite	ADJ
app01-10358	9	12	values	value	NOUN
app01-10358	9	13	and	and	CCONJ
app01-10358	9	14	known	know	VERB
app01-10358	9	15	as	as	ADP
app01-10358	9	16	“	"	PUNCT
app01-10358	9	17	10	10	NUM
app01-10358	9	18	%	%	NOUN
app01-10358	9	19	(	(	PUNCT
app01-10358	9	20	relative	relative	ADJ
app01-10358	9	21	depth	depth	NOUN
app01-10358	9	22	)	)	PUNCT
app01-10358	9	23	rule	rule	NOUN
app01-10358	9	24	”	"	PUNCT
app01-10358	9	25	,	,	PUNCT
app01-10358	9	26	was	be	AUX
app01-10358	9	27	proposed	propose	VERB
app01-10358	9	28	by	by	ADP
app01-10358	9	29	h.	h.	PROPN
app01-10358	9	30	bückle	bückle	PROPN
app01-10358	9	31	in	in	ADP
app01-10358	9	32	1959	1959	NUM
app01-10358	9	33	[	[	X
app01-10358	9	34	1	1	NUM
app01-10358	9	35	]	]	PUNCT
app01-10358	9	36	.	.	PUNCT
app01-10358	10	1	it	it	PRON
app01-10358	10	2	was	be	AUX
app01-10358	10	3	suggested	suggest	VERB
app01-10358	10	4	that	that	SCONJ
app01-10358	10	5	the	the	DET
app01-10358	10	6	hardness	hardness	ADJ
app01-10358	10	7	values	value	NOUN
app01-10358	10	8	obtained	obtain	VERB
app01-10358	10	9	from	from	ADP
app01-10358	10	10	the	the	DET
app01-10358	10	11	relative	relative	ADJ
app01-10358	10	12	depths	depth	NOUN
app01-10358	10	13	below	below	ADP
app01-10358	10	14	10	10	NUM
app01-10358	10	15	%	%	NOUN
app01-10358	10	16	of	of	ADP
app01-10358	10	17	the	the	DET
app01-10358	10	18	coating	coat	VERB
app01-10358	10	19	thickness	thickness	NOUN
app01-10358	10	20	should	should	AUX
app01-10358	10	21	be	be	AUX
app01-10358	10	22	used	use	VERB
app01-10358	10	23	because	because	SCONJ
app01-10358	10	24	the	the	DET
app01-10358	10	25	contribution	contribution	NOUN
app01-10358	10	26	from	from	ADP
app01-10358	10	27	the	the	DET
app01-10358	10	28	substrate	substrate	NOUN
app01-10358	10	29	would	would	AUX
app01-10358	10	30	still	still	ADV
app01-10358	10	31	be	be	AUX
app01-10358	10	32	very	very	ADV
app01-10358	10	33	limited	limited	ADJ
app01-10358	10	34	.	.	PUNCT
app01-10358	11	1	unfortunately	unfortunately	ADV
app01-10358	11	2	,	,	PUNCT
app01-10358	11	3	this	this	DET
app01-10358	11	4	rule	rule	NOUN
app01-10358	11	5	fully	fully	ADV
app01-10358	11	6	corresponds	correspond	VERB
app01-10358	11	7	to	to	ADP
app01-10358	11	8	the	the	DET
app01-10358	11	9	h.	h.	PROPN
app01-10358	11	10	l.	l.	PROPN
app01-10358	11	11	mencken	mencken	PROPN
app01-10358	11	12	quote	quote	INTJ
app01-10358	11	13	:	:	PUNCT
app01-10358	11	14	“	"	PUNCT
app01-10358	11	15	for	for	ADP
app01-10358	11	16	every	every	DET
app01-10358	11	17	complex	complex	ADJ
app01-10358	11	18	problem	problem	NOUN
app01-10358	11	19	there	there	PRON
app01-10358	11	20	is	be	VERB
app01-10358	11	21	an	an	DET
app01-10358	11	22	answer	answer	NOUN
app01-10358	11	23	which	which	PRON
app01-10358	11	24	is	be	AUX
app01-10358	11	25	clear	clear	ADJ
app01-10358	11	26	,	,	PUNCT
app01-10358	11	27	simple	simple	ADJ
app01-10358	11	28	and	and	CCONJ
app01-10358	11	29	wrong	wrong	ADJ
app01-10358	11	30	”	"	PUNCT
app01-10358	12	1	[	[	X
app01-10358	12	2	2	2	NUM
app01-10358	12	3	]	]	PUNCT
app01-10358	12	4	.	.	PUNCT
app01-10358	13	1	it	it	PRON
app01-10358	13	2	is	be	AUX
app01-10358	13	3	only	only	ADV
app01-10358	13	4	a	a	DET
app01-10358	13	5	rule	rule	NOUN
app01-10358	13	6	of	of	ADP
app01-10358	13	7	thumb	thumb	NOUN
app01-10358	13	8	with	with	ADP
app01-10358	13	9	limited	limited	ADJ
app01-10358	13	10	applicability	applicability	NOUN
app01-10358	13	11	to	to	ADP
app01-10358	13	12	hardness	hardness	ADJ
app01-10358	13	13	measurements	measurement	NOUN
app01-10358	13	14	and	and	CCONJ
app01-10358	13	15	its	its	PRON
app01-10358	13	16	use	use	NOUN
app01-10358	13	17	for	for	ADP
app01-10358	13	18	the	the	DET
app01-10358	13	19	determination	determination	NOUN
app01-10358	13	20	of	of	ADP
app01-10358	13	21	an	an	DET
app01-10358	13	22	indentation	indentation	NOUN
app01-10358	13	23	modulus	modulus	NOUN
app01-10358	13	24	is	be	AUX
app01-10358	13	25	principally	principally	ADV
app01-10358	13	26	not	not	PART
app01-10358	13	27	correct	correct	ADJ
app01-10358	13	28	[	[	X
app01-10358	13	29	3	3	NUM
app01-10358	13	30	,	,	PUNCT
app01-10358	13	31	4	4	NUM
app01-10358	13	32	]	]	PUNCT
app01-10358	13	33	.	.	PUNCT
app01-10358	14	1	the	the	DET
app01-10358	14	2	reason	reason	NOUN
app01-10358	14	3	is	be	AUX
app01-10358	14	4	that	that	SCONJ
app01-10358	14	5	the	the	DET
app01-10358	14	6	size	size	NOUN
app01-10358	14	7	of	of	ADP
app01-10358	14	8	the	the	DET
app01-10358	14	9	plastic	plastic	ADJ
app01-10358	14	10	field	field	NOUN
app01-10358	14	11	under	under	ADP
app01-10358	14	12	the	the	DET
app01-10358	14	13	indenter	indenter	NOUN
app01-10358	14	14	defined	define	VERB
app01-10358	14	15	by	by	ADP
app01-10358	14	16	the	the	DET
app01-10358	14	17	yield	yield	NOUN
app01-10358	14	18	stress	stress	NOUN
app01-10358	14	19	can	can	AUX
app01-10358	14	20	be	be	AUX
app01-10358	14	21	confined	confine	VERB
app01-10358	14	22	only	only	ADV
app01-10358	14	23	to	to	ADP
app01-10358	14	24	the	the	DET
app01-10358	14	25	coating	coating	NOUN
app01-10358	14	26	within	within	ADP
app01-10358	14	27	the	the	DET
app01-10358	14	28	limited	limited	ADJ
app01-10358	14	29	penetration	penetration	NOUN
app01-10358	14	30	depth	depth	NOUN
app01-10358	14	31	range	range	NOUN
app01-10358	14	32	whereas	whereas	SCONJ
app01-10358	14	33	the	the	DET
app01-10358	14	34	elastic	elastic	ADJ
app01-10358	14	35	field	field	NOUN
app01-10358	14	36	would	would	AUX
app01-10358	14	37	extend	extend	VERB
app01-10358	14	38	into	into	ADP
app01-10358	14	39	the	the	DET
app01-10358	14	40	substrate	substrate	NOUN
app01-10358	14	41	without	without	ADP
app01-10358	14	42	any	any	DET
app01-10358	14	43	limit	limit	NOUN
app01-10358	14	44	.	.	PUNCT
app01-10358	15	1	moreover	moreover	ADV
app01-10358	15	2	,	,	PUNCT
app01-10358	15	3	the	the	DET
app01-10358	15	4	stress	stress	NOUN
app01-10358	15	5	field	field	NOUN
app01-10358	15	6	is	be	AUX
app01-10358	15	7	affected	affect	VERB
app01-10358	15	8	by	by	ADP
app01-10358	15	9	the	the	DET
app01-10358	15	10	ratio	ratio	NOUN
app01-10358	15	11	between	between	ADP
app01-10358	15	12	elastic	elastic	ADJ
app01-10358	15	13	moduli	modulus	NOUN
app01-10358	15	14	of	of	ADP
app01-10358	15	15	the	the	DET
app01-10358	15	16	coating	coating	NOUN
app01-10358	15	17	and	and	CCONJ
app01-10358	15	18	substrate	substrate	NOUN
app01-10358	15	19	and	and	CCONJ
app01-10358	15	20	even	even	ADV
app01-10358	15	21	by	by	ADP
app01-10358	15	22	their	their	PRON
app01-10358	15	23	interactions	interaction	NOUN
app01-10358	15	24	[	[	X
app01-10358	15	25	5	5	NUM
app01-10358	15	26	,	,	PUNCT
app01-10358	15	27	6	6	NUM
app01-10358	15	28	]	]	PUNCT
app01-10358	15	29	.	.	PUNCT
app01-10358	16	1	since	since	SCONJ
app01-10358	16	2	the	the	DET
app01-10358	16	3	“	"	PUNCT
app01-10358	16	4	10	10	NUM
app01-10358	16	5	%	%	NOUN
app01-10358	16	6	rule	rule	NOUN
app01-10358	16	7	”	"	PUNCT
app01-10358	16	8	is	be	AUX
app01-10358	16	9	not	not	PART
app01-10358	16	10	able	able	ADJ
app01-10358	16	11	to	to	PART
app01-10358	16	12	reflect	reflect	VERB
app01-10358	16	13	all	all	DET
app01-10358	16	14	these	these	DET
app01-10358	16	15	interactions	interaction	NOUN
app01-10358	16	16	,	,	PUNCT
app01-10358	16	17	significant	significant	ADJ
app01-10358	16	18	efforts	effort	NOUN
app01-10358	16	19	were	be	AUX
app01-10358	16	20	devoted	devote	VERB
app01-10358	16	21	to	to	ADP
app01-10358	16	22	the	the	DET
app01-10358	16	23	refinement	refinement	NOUN
app01-10358	16	24	of	of	ADP
app01-10358	16	25	the	the	DET
app01-10358	16	26	analysis	analysis	NOUN
app01-10358	16	27	of	of	ADP
app01-10358	16	28	nanoindentation	nanoindentation	NOUN
app01-10358	16	29	data	datum	NOUN
app01-10358	16	30	from	from	ADP
app01-10358	16	31	thin	thin	ADJ
app01-10358	16	32	coatings	coating	NOUN
app01-10358	16	33	.	.	PUNCT
app01-10358	17	1	starting	start	VERB
app01-10358	17	2	from	from	ADP
app01-10358	17	3	the	the	DET
app01-10358	17	4	early	early	ADJ
app01-10358	17	5	1990s	1990	NOUN
app01-10358	17	6	,	,	PUNCT
app01-10358	17	7	various	various	ADJ
app01-10358	17	8	theoretical	theoretical	ADJ
app01-10358	17	9	models	model	NOUN
app01-10358	17	10	have	have	AUX
app01-10358	17	11	been	be	AUX
app01-10358	17	12	developed	develop	VERB
app01-10358	17	13	to	to	PART
app01-10358	17	14	solve	solve	VERB
app01-10358	17	15	the	the	DET
app01-10358	17	16	problem	problem	NOUN
app01-10358	17	17	of	of	ADP
app01-10358	17	18	substrate	substrate	NOUN
app01-10358	17	19	effect	effect	NOUN
app01-10358	17	20	analytically	analytically	ADV
app01-10358	17	21	.	.	PUNCT
app01-10358	18	1	the	the	DET
app01-10358	18	2	common	common	ADJ
app01-10358	18	3	features	feature	NOUN
app01-10358	18	4	of	of	ADP
app01-10358	18	5	these	these	DET
app01-10358	18	6	solutions	solution	NOUN
app01-10358	18	7	were	be	AUX
app01-10358	18	8	that	that	SCONJ
app01-10358	18	9	they	they	PRON
app01-10358	18	10	considered	consider	VERB
app01-10358	18	11	indentation	indentation	NOUN
app01-10358	18	12	as	as	ADP
app01-10358	18	13	a	a	DET
app01-10358	18	14	deformation	deformation	NOUN
app01-10358	18	15	of	of	ADP
app01-10358	18	16	coating	coating	NOUN
app01-10358	18	17	and	and	CCONJ
app01-10358	18	18	substrate	substrate	NOUN
app01-10358	18	19	in	in	ADP
app01-10358	18	20	series	series	NOUN
app01-10358	18	21	and	and	CCONJ
app01-10358	18	22	that	that	SCONJ
app01-10358	18	23	they	they	PRON
app01-10358	18	24	were	be	AUX
app01-10358	18	25	fitted	fit	VERB
app01-10358	18	26	to	to	PART
app01-10358	18	27	experimentally	experimentally	ADV
app01-10358	18	28	obtain	obtain	VERB
app01-10358	18	29	hardness	hardness	NOUN
app01-10358	18	30	and	and	CCONJ
app01-10358	18	31	indentation	indentation	NOUN
app01-10358	18	32	modulus	modulus	NOUN
app01-10358	18	33	(	(	PUNCT
app01-10358	18	34	relative	relative	ADJ
app01-10358	18	35	)	)	PUNCT
app01-10358	18	36	depth	depth	NOUN
app01-10358	18	37	profiles	profile	NOUN
app01-10358	18	38	.	.	PUNCT
app01-10358	19	1	depending	depend	VERB
app01-10358	19	2	on	on	ADP
app01-10358	19	3	the	the	DET
app01-10358	19	4	physical	physical	ADJ
app01-10358	19	5	processes	process	NOUN
app01-10358	19	6	obtained	obtain	VERB
app01-10358	19	7	in	in	ADP
app01-10358	19	8	the	the	DET
app01-10358	19	9	solutions	solution	NOUN
app01-10358	19	10	,	,	PUNCT
app01-10358	19	11	three	three	NUM
app01-10358	19	12	groups	group	NOUN
app01-10358	19	13	of	of	ADP
app01-10358	19	14	the	the	DET
app01-10358	19	15	models	model	NOUN
app01-10358	19	16	can	can	AUX
app01-10358	19	17	be	be	AUX
app01-10358	19	18	distinguished	distinguish	VERB
app01-10358	19	19	:	:	PUNCT
app01-10358	19	20	(	(	PUNCT
app01-10358	19	21	1	1	NUM
app01-10358	19	22	.	.	PUNCT
app01-10358	19	23	)	)	PUNCT
app01-10358	20	1	linear	linear	ADJ
app01-10358	20	2	transition	transition	NOUN
app01-10358	20	3	models	model	NOUN
app01-10358	20	4	involving	involve	VERB
app01-10358	20	5	the	the	DET
app01-10358	20	6	works	work	NOUN
app01-10358	20	7	of	of	ADP
app01-10358	20	8	jönsson&hogmark	jönsson&hogmark	PROPN
app01-10358	21	1	[	[	X
app01-10358	21	2	7	7	NUM
app01-10358	21	3	]	]	PUNCT
app01-10358	21	4	,	,	PUNCT
app01-10358	21	5	burnett&rickerby	burnett&rickerby	ADP
app01-10358	21	6	[	[	X
app01-10358	21	7	8	8	NUM
app01-10358	21	8	]	]	PUNCT
app01-10358	21	9	,	,	PUNCT
app01-10358	21	10	doerner&nix	doerner&nix	X
app01-10358	22	1	[	[	X
app01-10358	22	2	9	9	NUM
app01-10358	22	3	]	]	PUNCT
app01-10358	22	4	,	,	PUNCT
app01-10358	22	5	he&li	he&li	X
app01-10358	22	6	[	[	X
app01-10358	22	7	10	10	NUM
app01-10358	22	8	]	]	PUNCT
app01-10358	22	9	,	,	PUNCT
app01-10358	22	10	chicot&lesage	chicot&lesage	PROPN
app01-10358	23	1	[	[	X
app01-10358	23	2	11	11	NUM
app01-10358	23	3	]	]	PUNCT
app01-10358	23	4	,	,	PUNCT
app01-10358	23	5	puchi	puchi	NOUN
app01-10358	23	6	-	-	PUNCT
app01-10358	23	7	cabrera	cabrera	NOUN
app01-10358	24	1	[	[	X
app01-10358	24	2	12	12	NUM
app01-10358	24	3	]	]	PUNCT
app01-10358	24	4	,	,	PUNCT
app01-10358	24	5	etc	etc	X
app01-10358	24	6	.	.	X
app01-10358	24	7	;	;	PUNCT
app01-10358	24	8	(	(	PUNCT
app01-10358	24	9	2	2	NUM
app01-10358	24	10	.	.	PUNCT
app01-10358	24	11	)	)	PUNCT
app01-10358	24	12	energy	energy	NOUN
app01-10358	24	13	models	model	NOUN
app01-10358	24	14	including	include	VERB
app01-10358	24	15	works	work	NOUN
app01-10358	24	16	of	of	ADP
app01-10358	24	17	korsunsky&bull	korsunsky&bull	PROPN
app01-10358	25	1	[	[	X
app01-10358	25	2	13	13	NUM
app01-10358	25	3	,	,	PUNCT
app01-10358	25	4	14	14	NUM
app01-10358	25	5	]	]	PUNCT
app01-10358	25	6	,	,	PUNCT
app01-10358	25	7	(	(	PUNCT
app01-10358	25	8	3	3	NUM
app01-10358	25	9	.	.	PUNCT
app01-10358	25	10	)	)	PUNCT
app01-10358	26	1	gao	gao	PROPN
app01-10358	26	2	’s	’s	PART
app01-10358	26	3	model	model	NOUN
app01-10358	26	4	&	&	CCONJ
app01-10358	26	5	its	its	PRON
app01-10358	26	6	modifications	modification	NOUN
app01-10358	26	7	including	include	VERB
app01-10358	26	8	studies	study	NOUN
app01-10358	26	9	of	of	ADP
app01-10358	26	10	gao&chiu	gao&chiu	PROPN
app01-10358	26	11	[	[	X
app01-10358	26	12	15	15	NUM
app01-10358	26	13	]	]	PUNCT
app01-10358	26	14	,	,	PUNCT
app01-10358	26	15	menčík	menčík	VERB
app01-10358	26	16	[	[	X
app01-10358	26	17	16	16	NUM
app01-10358	26	18	]	]	PUNCT
app01-10358	26	19	,	,	PUNCT
app01-10358	26	20	song&pharr	song&pharr	PROPN
app01-10358	27	1	[	[	X
app01-10358	27	2	17	17	NUM
app01-10358	27	3	]	]	PUNCT
app01-10358	27	4	,	,	PUNCT
app01-10358	27	5	hay&crawford	hay&crawford	PROPN
app01-10358	27	6	[	[	X
app01-10358	27	7	5	5	NUM
app01-10358	27	8	]	]	PUNCT
app01-10358	27	9	etc	etc	X
app01-10358	27	10	.	.	X
app01-10358	28	1	most	most	ADJ
app01-10358	28	2	of	of	ADP
app01-10358	28	3	these	these	DET
app01-10358	28	4	models	model	NOUN
app01-10358	28	5	,	,	PUNCT
app01-10358	28	6	were	be	AUX
app01-10358	28	7	applicable	applicable	ADJ
app01-10358	28	8	only	only	ADV
app01-10358	28	9	to	to	ADP
app01-10358	28	10	the	the	DET
app01-10358	28	11	coating	coating	NOUN
app01-10358	28	12	/	/	SYM
app01-10358	28	13	substrate	substrate	NOUN
app01-10358	28	14	systems	system	NOUN
app01-10358	28	15	in	in	ADP
app01-10358	28	16	which	which	PRON
app01-10358	28	17	the	the	DET
app01-10358	28	18	elastic	elastic	ADJ
app01-10358	28	19	modulus	modulus	NOUN
app01-10358	28	20	of	of	ADP
app01-10358	28	21	the	the	DET
app01-10358	28	22	coating	coating	NOUN
app01-10358	28	23	was	be	AUX
app01-10358	28	24	less	less	ADJ
app01-10358	28	25	than	than	ADP
app01-10358	28	26	twice	twice	DET
app01-10358	28	27	that	that	DET
app01-10358	28	28	of	of	ADP
app01-10358	28	29	the	the	DET
app01-10358	28	30	substrate	substrate	NOUN
app01-10358	28	31	[	[	X
app01-10358	28	32	5	5	NUM
app01-10358	28	33	]	]	PUNCT
app01-10358	28	34	.	.	PUNCT
app01-10358	29	1	however	however	ADV
app01-10358	29	2	,	,	PUNCT
app01-10358	29	3	very	very	ADV
app01-10358	29	4	stiff	stiff	ADJ
app01-10358	29	5	coatings	coating	NOUN
app01-10358	29	6	can	can	AUX
app01-10358	29	7	provide	provide	VERB
app01-10358	29	8	additional	additional	ADJ
app01-10358	29	9	support	support	NOUN
app01-10358	29	10	against	against	ADP
app01-10358	29	11	the	the	DET
app01-10358	29	12	deformation	deformation	NOUN
app01-10358	29	13	of	of	ADP
app01-10358	29	14	the	the	DET
app01-10358	29	15	substrate	substrate	NOUN
app01-10358	29	16	.	.	PUNCT
app01-10358	30	1	the	the	DET
app01-10358	30	2	additional	additional	ADJ
app01-10358	30	3	and	and	CCONJ
app01-10358	30	4	parallel	parallel	ADJ
app01-10358	30	5	influence	influence	NOUN
app01-10358	30	6	of	of	ADP
app01-10358	30	7	the	the	DET
app01-10358	30	8	coating	coating	NOUN
app01-10358	30	9	on	on	ADP
app01-10358	30	10	the	the	DET
app01-10358	30	11	substrate	substrate	NOUN
app01-10358	30	12	was	be	AUX
app01-10358	30	13	introduced	introduce	VERB
app01-10358	30	14	into	into	ADP
app01-10358	30	15	the	the	DET
app01-10358	30	16	song&pharr	song&pharr	NOUN
app01-10358	30	17	’s	’s	PART
app01-10358	30	18	model	model	NOUN
app01-10358	30	19	[	[	X
app01-10358	30	20	17	17	NUM
app01-10358	30	21	]	]	PUNCT
app01-10358	30	22	by	by	ADP
app01-10358	30	23	hay&crawford	hay&crawford	PROPN
app01-10358	30	24	(	(	PUNCT
app01-10358	30	25	h&c	h&c	PROPN
app01-10358	30	26	)	)	PUNCT
app01-10358	31	1	[	[	X
app01-10358	31	2	5	5	NUM
app01-10358	31	3	]	]	PUNCT
app01-10358	31	4	.	.	PUNCT
app01-10358	32	1	h&c	h&c	PROPN
app01-10358	32	2	model	model	NOUN
app01-10358	32	3	applies	apply	VERB
app01-10358	32	4	to	to	ADP
app01-10358	32	5	the	the	DET
app01-10358	32	6	systems	system	NOUN
app01-10358	32	7	with	with	ADP
app01-10358	32	8	≤	≤	NUM
app01-10358	32	9	10	10	NUM
app01-10358	32	10	-	-	ADJ
app01-10358	32	11	fold	fold	ADJ
app01-10358	32	12	ratio	ratio	NOUN
app01-10358	32	13	between	between	ADP
app01-10358	32	14	the	the	DET
app01-10358	32	15	elastic	elastic	ADJ
app01-10358	32	16	moduli	modulus	NOUN
app01-10358	32	17	of	of	ADP
app01-10358	32	18	coating	coating	NOUN
app01-10358	32	19	and	and	CCONJ
app01-10358	32	20	substrate	substrate	NOUN
app01-10358	32	21	and	and	CCONJ
app01-10358	32	22	the	the	DET
app01-10358	32	23	range	range	NOUN
app01-10358	32	24	of	of	ADP
app01-10358	32	25	relative	relative	ADJ
app01-10358	32	26	indentation	indentation	NOUN
app01-10358	32	27	depths	depth	NOUN
app01-10358	32	28	(	(	PUNCT
app01-10358	32	29	plateau	plateau	NOUN
app01-10358	32	30	width	width	NOUN
app01-10358	32	31	)	)	PUNCT
app01-10358	32	32	available	available	ADJ
app01-10358	32	33	for	for	ADP
app01-10358	32	34	the	the	DET
app01-10358	32	35	extrapolation	extrapolation	NOUN
app01-10358	32	36	to	to	ADP
app01-10358	32	37	zero	zero	NUM
app01-10358	32	38	depth	depth	NOUN
app01-10358	32	39	was	be	AUX
app01-10358	32	40	expanded	expand	VERB
app01-10358	32	41	well	well	ADV
app01-10358	32	42	above	above	ADP
app01-10358	32	43	10	10	NUM
app01-10358	32	44	%	%	NOUN
app01-10358	32	45	relative	relative	ADJ
app01-10358	32	46	depth	depth	NOUN
app01-10358	32	47	.	.	PUNCT
app01-10358	33	1	the	the	DET
app01-10358	33	2	disadvantage	disadvantage	NOUN
app01-10358	33	3	is	be	AUX
app01-10358	33	4	that	that	SCONJ
app01-10358	33	5	the	the	DET
app01-10358	33	6	obtained	obtain	VERB
app01-10358	33	7	indentation	indentation	NOUN
app01-10358	33	8	moduli	modulus	NOUN
app01-10358	33	9	are	be	AUX
app01-10358	33	10	highly	highly	ADV
app01-10358	33	11	sensitive	sensitive	ADJ
app01-10358	33	12	to	to	ADP
app01-10358	33	13	the	the	DET
app01-10358	33	14	accuracy	accuracy	NOUN
app01-10358	33	15	of	of	ADP
app01-10358	33	16	the	the	DET
app01-10358	33	17	additional	additional	ADJ
app01-10358	33	18	input	input	NOUN
app01-10358	33	19	parameters	parameter	NOUN
app01-10358	33	20	,	,	PUNCT
app01-10358	33	21	especially	especially	ADV
app01-10358	33	22	young	young	ADJ
app01-10358	33	23	’s	’s	PART
app01-10358	33	24	modulus	modulus	NOUN
app01-10358	33	25	of	of	ADP
app01-10358	33	26	the	the	DET
app01-10358	33	27	substrate	substrate	NOUN
app01-10358	33	28	and	and	CCONJ
app01-10358	33	29	coating	coating	NOUN
app01-10358	33	30	thickness	thickness	NOUN
app01-10358	33	31	.	.	PUNCT
app01-10358	34	1	the	the	DET
app01-10358	34	2	results	result	NOUN
app01-10358	34	3	of	of	ADP
app01-10358	34	4	theoretical	theoretical	ADJ
app01-10358	34	5	works	work	NOUN
app01-10358	34	6	on	on	ADP
app01-10358	34	7	nanoindentation	nanoindentation	NOUN
app01-10358	34	8	in	in	ADP
app01-10358	34	9	coating	coating	NOUN
app01-10358	34	10	/	/	SYM
app01-10358	34	11	substrate	substrate	NOUN
app01-10358	34	12	systems	system	NOUN
app01-10358	34	13	were	be	AUX
app01-10358	34	14	reflected	reflect	VERB
app01-10358	34	15	in	in	ADP
app01-10358	34	16	the	the	DET
app01-10358	34	17	standardization	standardization	NOUN
app01-10358	34	18	efforts	effort	NOUN
app01-10358	34	19	which	which	PRON
app01-10358	34	20	were	be	AUX
app01-10358	34	21	summarized	summarize	VERB
app01-10358	34	22	in	in	ADP
app01-10358	34	23	iso	iso	PROPN
app01-10358	34	24	14577	14577	NUM
app01-10358	34	25	-	-	SYM
app01-10358	34	26	4:2016	4:2016	NUM
app01-10358	34	27	standard	standard	NOUN
app01-10358	34	28	[	[	X
app01-10358	34	29	18	18	NUM
app01-10358	34	30	]	]	PUNCT
app01-10358	34	31	.	.	PUNCT
app01-10358	35	1	it	it	PRON
app01-10358	35	2	prescribes	prescribe	VERB
app01-10358	35	3	that	that	SCONJ
app01-10358	35	4	the	the	DET
app01-10358	35	5	true	true	ADJ
app01-10358	35	6	hardness	hardness	NOUN
app01-10358	35	7	and	and	CCONJ
app01-10358	35	8	modulus	modulus	NOUN
app01-10358	35	9	of	of	ADP
app01-10358	35	10	hard	hard	ADJ
app01-10358	35	11	coatings	coating	NOUN
app01-10358	35	12	on	on	ADP
app01-10358	35	13	softer	soft	ADJ
app01-10358	35	14	36	36	NUM
app01-10358	35	15	https://doi.org/10.14311/app.2024.50.0036	https://doi.org/10.14311/app.2024.50.0036	NOUN
app01-10358	35	16	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
app01-10358	35	17	https://www.cvut.cz/en	https://www.cvut.cz/en	PROPN
app01-10358	35	18	vol	vol	NOUN
app01-10358	35	19	.	.	PUNCT
app01-10358	36	1	50/2024	50/2024	NUM
app01-10358	36	2	substrate	substrate	NOUN
app01-10358	36	3	effect	effect	NOUN
app01-10358	36	4	in	in	ADP
app01-10358	36	5	the	the	DET
app01-10358	36	6	evaluation	evaluation	NOUN
app01-10358	36	7	of	of	ADP
app01-10358	36	8	elastic	elastic	ADJ
app01-10358	36	9	modulus	modulus	NOUN
app01-10358	36	10	.	.	PUNCT
app01-10358	36	11	.	.	PUNCT
app01-10358	37	1	.	.	PUNCT
app01-10358	38	1	substrate	substrate	NOUN
app01-10358	38	2	young	young	ADJ
app01-10358	38	3	’s	’s	PART
app01-10358	38	4	modulus	modulus	ADJ
app01-10358	38	5	poisson	poisson	NOUN
app01-10358	38	6	’s	’s	PART
app01-10358	38	7	ratio	ratio	NOUN
app01-10358	38	8	hit	hit	VERB
app01-10358	38	9	#	#	NOUN
app01-10358	39	1	eit	eit	NOUN
app01-10358	39	2	#	#	NOUN
app01-10358	39	3	e	e	NOUN
app01-10358	39	4	[	[	X
app01-10358	39	5	gpa	gpa	X
app01-10358	39	6	]	]	PUNCT
app01-10358	39	7	ν	ν	X
app01-10358	39	8	[	[	X
app01-10358	39	9	–	–	PUNCT
app01-10358	39	10	]	]	X
app01-10358	39	11	[	[	X
app01-10358	39	12	gpa	gpa	X
app01-10358	39	13	]	]	X
app01-10358	39	14	[	[	X
app01-10358	39	15	gpa	gpa	X
app01-10358	39	16	]	]	X
app01-10358	39	17	(	(	PUNCT
app01-10358	39	18	0001	0001	NUM
app01-10358	39	19	)	)	PUNCT
app01-10358	39	20	sapphire	sapphire	NOUN
app01-10358	39	21	435	435	NUM
app01-10358	40	1	[	[	X
app01-10358	40	2	25	25	NUM
app01-10358	40	3	]	]	PUNCT
app01-10358	40	4	0.29	0.29	NUM
app01-10358	41	1	[	[	X
app01-10358	41	2	25	25	NUM
app01-10358	41	3	]	]	PUNCT
app01-10358	41	4	27.57	27.57	NUM
app01-10358	41	5	±	±	NUM
app01-10358	41	6	0.27	0.27	NUM
app01-10358	41	7	458.7	458.7	NUM
app01-10358	41	8	±	±	NUM
app01-10358	41	9	3.3	3.3	NUM
app01-10358	41	10	tempered	temper	VERB
app01-10358	41	11	100cr6	100cr6	NUM
app01-10358	41	12	steel	steel	NOUN
app01-10358	41	13	210	210	NUM
app01-10358	41	14	(	(	PUNCT
app01-10358	41	15	190–210	190–210	NUM
app01-10358	41	16	)	)	PUNCT
app01-10358	42	1	[	[	X
app01-10358	42	2	26	26	NUM
app01-10358	42	3	,	,	PUNCT
app01-10358	42	4	27	27	NUM
app01-10358	42	5	]	]	PUNCT
app01-10358	42	6	0.285	0.285	NUM
app01-10358	42	7	(	(	PUNCT
app01-10358	42	8	0.27–.30	0.27–.30	PROPN
app01-10358	42	9	)	)	PUNCT
app01-10358	43	1	[	[	X
app01-10358	43	2	27	27	NUM
app01-10358	43	3	]	]	SYM
app01-10358	43	4	9.25	9.25	NUM
app01-10358	43	5	±	±	NUM
app01-10358	43	6	1.0	1.0	NUM
app01-10358	43	7	250.0	250.0	NUM
app01-10358	43	8	±	±	NUM
app01-10358	43	9	9.5	9.5	NUM
app01-10358	43	10	(	(	PUNCT
app01-10358	43	11	111	111	NUM
app01-10358	43	12	)	)	PUNCT
app01-10358	43	13	si	si	NOUN
app01-10358	43	14	wafer	wafer	NOUN
app01-10358	43	15	187	187	NUM
app01-10358	43	16	(	(	PUNCT
app01-10358	43	17	186.5	186.5	NUM
app01-10358	43	18	)	)	PUNCT
app01-10358	44	1	[	[	X
app01-10358	44	2	28	28	NUM
app01-10358	44	3	]	]	PUNCT
app01-10358	44	4	0.223	0.223	NUM
app01-10358	44	5	(	(	PUNCT
app01-10358	44	6	0.22–0.28	0.22–0.28	NUM
app01-10358	44	7	)	)	PUNCT
app01-10358	45	1	[	[	X
app01-10358	45	2	28	28	NUM
app01-10358	45	3	]	]	SYM
app01-10358	45	4	13.07	13.07	NUM
app01-10358	45	5	±	±	NUM
app01-10358	45	6	0.13	0.13	NUM
app01-10358	45	7	193.6	193.6	NUM
app01-10358	45	8	±	±	NUM
app01-10358	45	9	1.2	1.2	NUM
app01-10358	45	10	ti6al4v	ti6al4v	PART
app01-10358	45	11	alloy	alloy	NOUN
app01-10358	45	12	114	114	NUM
app01-10358	45	13	[	[	X
app01-10358	45	14	29	29	NUM
app01-10358	45	15	]	]	PUNCT
app01-10358	45	16	0.342	0.342	NUM
app01-10358	45	17	[	[	X
app01-10358	45	18	29	29	NUM
app01-10358	45	19	]	]	SYM
app01-10358	45	20	5.20	5.20	NUM
app01-10358	45	21	±	±	NUM
app01-10358	45	22	0.16	0.16	NUM
app01-10358	45	23	133.2	133.2	NUM
app01-10358	45	24	±	±	NUM
app01-10358	45	25	2.2	2.2	NUM
app01-10358	45	26	table	table	NOUN
app01-10358	45	27	1	1	NUM
app01-10358	45	28	.	.	PUNCT
app01-10358	45	29	mechanical	mechanical	ADJ
app01-10358	45	30	properties	property	NOUN
app01-10358	45	31	of	of	ADP
app01-10358	45	32	the	the	DET
app01-10358	45	33	substrates	substrate	NOUN
app01-10358	45	34	used	use	VERB
app01-10358	45	35	in	in	ADP
app01-10358	45	36	the	the	DET
app01-10358	45	37	calculations	calculation	NOUN
app01-10358	45	38	(	(	PUNCT
app01-10358	45	39	e	e	NOUN
app01-10358	45	40	and	and	CCONJ
app01-10358	45	41	ν	ν	NOUN
app01-10358	45	42	,	,	PUNCT
app01-10358	45	43	and	and	CCONJ
app01-10358	45	44	measured	measure	VERB
app01-10358	45	45	by	by	ADP
app01-10358	45	46	nanoindentation	nanoindentation	NOUN
app01-10358	45	47	in	in	ADP
app01-10358	45	48	csm	csm	PROPN
app01-10358	45	49	mode	mode	PROPN
app01-10358	45	50	(	(	PUNCT
app01-10358	45	51	hit	hit	VERB
app01-10358	45	52	and	and	CCONJ
app01-10358	45	53	eit	eit	NOUN
app01-10358	45	54	)	)	PUNCT
app01-10358	45	55	.	.	PUNCT
app01-10358	46	1	substrates	substrate	NOUN
app01-10358	46	2	can	can	AUX
app01-10358	46	3	be	be	AUX
app01-10358	46	4	determined	determine	VERB
app01-10358	46	5	by	by	ADP
app01-10358	46	6	the	the	DET
app01-10358	46	7	extrapolation	extrapolation	NOUN
app01-10358	46	8	of	of	ADP
app01-10358	46	9	the	the	DET
app01-10358	46	10	values	value	NOUN
app01-10358	46	11	from	from	ADP
app01-10358	46	12	the	the	DET
app01-10358	46	13	plateau	plateau	NOUN
app01-10358	46	14	at	at	ADP
app01-10358	46	15	the	the	DET
app01-10358	46	16	maximum	maximum	NOUN
app01-10358	46	17	of	of	ADP
app01-10358	46	18	the	the	DET
app01-10358	46	19	corresponding	correspond	VERB
app01-10358	46	20	profile	profile	NOUN
app01-10358	46	21	to	to	ADP
app01-10358	46	22	zero	zero	NUM
app01-10358	46	23	penetration	penetration	NOUN
app01-10358	46	24	depth	depth	NOUN
app01-10358	46	25	(	(	PUNCT
app01-10358	46	26	load	load	NOUN
app01-10358	46	27	)	)	PUNCT
app01-10358	46	28	.	.	PUNCT
app01-10358	47	1	it	it	PRON
app01-10358	47	2	should	should	AUX
app01-10358	47	3	be	be	AUX
app01-10358	47	4	noted	note	VERB
app01-10358	47	5	that	that	SCONJ
app01-10358	47	6	such	such	DET
app01-10358	47	7	a	a	DET
app01-10358	47	8	procedure	procedure	NOUN
app01-10358	47	9	does	do	AUX
app01-10358	47	10	not	not	PART
app01-10358	47	11	explicitly	explicitly	ADV
app01-10358	47	12	involve	involve	VERB
app01-10358	47	13	any	any	DET
app01-10358	47	14	analytical	analytical	ADJ
app01-10358	47	15	solution	solution	NOUN
app01-10358	47	16	and	and	CCONJ
app01-10358	47	17	the	the	DET
app01-10358	47	18	way	way	NOUN
app01-10358	47	19	the	the	DET
app01-10358	47	20	corresponding	corresponding	ADJ
app01-10358	47	21	depth	depth	NOUN
app01-10358	47	22	profile	profile	NOUN
app01-10358	47	23	was	be	AUX
app01-10358	47	24	obtained	obtain	VERB
app01-10358	47	25	.	.	PUNCT
app01-10358	48	1	the	the	DET
app01-10358	48	2	simplest	simple	ADJ
app01-10358	48	3	way	way	NOUN
app01-10358	48	4	to	to	PART
app01-10358	48	5	generate	generate	VERB
app01-10358	48	6	statistically	statistically	ADV
app01-10358	48	7	reliable	reliable	ADJ
app01-10358	48	8	hardness	hardness	NOUN
app01-10358	48	9	and	and	CCONJ
app01-10358	48	10	modulus	modulus	ADJ
app01-10358	48	11	depth	depth	NOUN
app01-10358	48	12	profiles	profile	NOUN
app01-10358	48	13	is	be	AUX
app01-10358	48	14	to	to	PART
app01-10358	48	15	perform	perform	VERB
app01-10358	48	16	a	a	DET
app01-10358	48	17	sufficiently	sufficiently	ADV
app01-10358	48	18	large	large	ADJ
app01-10358	48	19	number	number	NOUN
app01-10358	48	20	of	of	ADP
app01-10358	48	21	individual	individual	ADJ
app01-10358	48	22	loading	loading	NOUN
app01-10358	48	23	/	/	SYM
app01-10358	48	24	unloading	unloading	NOUN
app01-10358	48	25	tests	test	NOUN
app01-10358	48	26	until	until	ADP
app01-10358	48	27	predefined	predefine	VERB
app01-10358	48	28	depths	depth	NOUN
app01-10358	48	29	in	in	ADP
app01-10358	48	30	the	the	DET
app01-10358	48	31	range	range	NOUN
app01-10358	48	32	from	from	ADP
app01-10358	48	33	less	less	ADJ
app01-10358	48	34	than	than	ADP
app01-10358	48	35	100	100	NUM
app01-10358	48	36	nm	nm	ADV
app01-10358	48	37	up	up	ADP
app01-10358	48	38	to	to	ADP
app01-10358	48	39	the	the	DET
app01-10358	48	40	depths	depth	NOUN
app01-10358	48	41	approaching	approach	VERB
app01-10358	48	42	the	the	DET
app01-10358	48	43	coating	coating	NOUN
app01-10358	48	44	thickness	thickness	NOUN
app01-10358	48	45	.	.	PUNCT
app01-10358	49	1	analogous	analogous	ADJ
app01-10358	49	2	depth	depth	NOUN
app01-10358	49	3	profiles	profile	NOUN
app01-10358	49	4	from	from	ADP
app01-10358	49	5	the	the	DET
app01-10358	49	6	reduced	reduce	VERB
app01-10358	49	7	number	number	NOUN
app01-10358	49	8	of	of	ADP
app01-10358	49	9	indents	indent	NOUN
app01-10358	49	10	can	can	AUX
app01-10358	49	11	be	be	AUX
app01-10358	49	12	obtained	obtain	VERB
app01-10358	49	13	when	when	SCONJ
app01-10358	49	14	several	several	ADJ
app01-10358	49	15	partial	partial	ADJ
app01-10358	49	16	unloading	unloading	NOUN
app01-10358	49	17	/	/	SYM
app01-10358	49	18	re	re	NOUN
app01-10358	49	19	-	-	NOUN
app01-10358	49	20	loadings	loading	NOUN
app01-10358	49	21	are	be	AUX
app01-10358	49	22	applied	apply	VERB
app01-10358	49	23	during	during	ADP
app01-10358	49	24	the	the	DET
app01-10358	49	25	loading	loading	NOUN
app01-10358	49	26	part	part	NOUN
app01-10358	49	27	of	of	ADP
app01-10358	49	28	the	the	DET
app01-10358	49	29	loading	loading	NOUN
app01-10358	49	30	/	/	SYM
app01-10358	49	31	unloading	unloading	NOUN
app01-10358	49	32	tests	test	NOUN
app01-10358	49	33	.	.	PUNCT
app01-10358	50	1	this	this	DET
app01-10358	50	2	mode	mode	NOUN
app01-10358	50	3	is	be	AUX
app01-10358	50	4	usually	usually	ADV
app01-10358	50	5	called	call	VERB
app01-10358	50	6	“	"	PUNCT
app01-10358	50	7	continuous	continuous	ADJ
app01-10358	50	8	multicycle	multicycle	NOUN
app01-10358	50	9	”	"	PUNCT
app01-10358	50	10	(	(	PUNCT
app01-10358	50	11	cmc	cmc	PROPN
app01-10358	50	12	)	)	PUNCT
app01-10358	50	13	.	.	PUNCT
app01-10358	51	1	further	further	ADJ
app01-10358	51	2	advancement	advancement	NOUN
app01-10358	51	3	of	of	ADP
app01-10358	51	4	cmc	cmc	NOUN
app01-10358	51	5	led	lead	VERB
app01-10358	51	6	to	to	ADP
app01-10358	51	7	the	the	DET
app01-10358	51	8	“	"	PUNCT
app01-10358	51	9	sinusoidal	sinusoidal	ADJ
app01-10358	51	10	loading	loading	NOUN
app01-10358	51	11	”	"	PUNCT
app01-10358	51	12	or	or	CCONJ
app01-10358	51	13	“	"	PUNCT
app01-10358	51	14	continuous	continuous	ADJ
app01-10358	51	15	stiffness	stiffness	NOUN
app01-10358	51	16	measurements	measurement	NOUN
app01-10358	51	17	”	"	PUNCT
app01-10358	51	18	(	(	PUNCT
app01-10358	51	19	csm	csm	X
app01-10358	51	20	)	)	PUNCT
app01-10358	52	1	[	[	X
app01-10358	52	2	19–22	19–22	NUM
app01-10358	52	3	]	]	X
app01-10358	52	4	mode	mode	NOUN
app01-10358	52	5	which	which	PRON
app01-10358	52	6	involves	involve	VERB
app01-10358	52	7	an	an	DET
app01-10358	52	8	overlap	overlap	NOUN
app01-10358	52	9	of	of	ADP
app01-10358	52	10	continuous	continuous	ADJ
app01-10358	52	11	sinusoidal	sinusoidal	NOUN
app01-10358	52	12	load	load	NOUN
app01-10358	52	13	with	with	ADP
app01-10358	52	14	small	small	ADJ
app01-10358	52	15	(	(	PUNCT
app01-10358	52	16	constant	constant	ADJ
app01-10358	52	17	absolute	absolute	ADJ
app01-10358	52	18	or	or	CCONJ
app01-10358	52	19	constant	constant	ADJ
app01-10358	52	20	relative	relative	NOUN
app01-10358	52	21	)	)	PUNCT
app01-10358	52	22	amplitude	amplitude	NOUN
app01-10358	52	23	and	and	CCONJ
app01-10358	52	24	conventional	conventional	ADJ
app01-10358	52	25	continuous	continuous	ADJ
app01-10358	52	26	loading	loading	NOUN
app01-10358	52	27	.	.	PUNCT
app01-10358	53	1	the	the	DET
app01-10358	53	2	advantage	advantage	NOUN
app01-10358	53	3	of	of	ADP
app01-10358	53	4	csm	csm	NOUN
app01-10358	53	5	mode	mode	NOUN
app01-10358	53	6	is	be	AUX
app01-10358	53	7	a	a	DET
app01-10358	53	8	much	much	ADV
app01-10358	53	9	higher	high	ADJ
app01-10358	53	10	speed	speed	NOUN
app01-10358	53	11	of	of	ADP
app01-10358	53	12	the	the	DET
app01-10358	53	13	generation	generation	NOUN
app01-10358	53	14	of	of	ADP
app01-10358	53	15	the	the	DET
app01-10358	53	16	corresponding	corresponding	ADJ
app01-10358	53	17	depth	depth	NOUN
app01-10358	53	18	profiles	profile	NOUN
app01-10358	53	19	with	with	ADP
app01-10358	53	20	better	well	ADJ
app01-10358	53	21	accuracy	accuracy	NOUN
app01-10358	53	22	from	from	ADP
app01-10358	53	23	a	a	DET
app01-10358	53	24	smaller	small	ADJ
app01-10358	53	25	number	number	NOUN
app01-10358	53	26	of	of	ADP
app01-10358	53	27	indents	indent	NOUN
app01-10358	53	28	.	.	PUNCT
app01-10358	54	1	statistical	statistical	ADJ
app01-10358	54	2	reliability	reliability	NOUN
app01-10358	54	3	of	of	ADP
app01-10358	54	4	csm	csm	NOUN
app01-10358	54	5	tests	test	NOUN
app01-10358	54	6	is	be	AUX
app01-10358	54	7	further	far	ADV
app01-10358	54	8	improved	improve	VERB
app01-10358	54	9	due	due	ADP
app01-10358	54	10	to	to	ADP
app01-10358	54	11	the	the	DET
app01-10358	54	12	reduction	reduction	NOUN
app01-10358	54	13	of	of	ADP
app01-10358	54	14	thermal	thermal	ADJ
app01-10358	54	15	drift	drift	NOUN
app01-10358	54	16	and	and	CCONJ
app01-10358	54	17	low	low	ADJ
app01-10358	54	18	-	-	PUNCT
app01-10358	54	19	frequency	frequency	NOUN
app01-10358	54	20	noise	noise	NOUN
app01-10358	54	21	effects	effect	NOUN
app01-10358	54	22	[	[	X
app01-10358	54	23	21	21	NUM
app01-10358	54	24	]	]	PUNCT
app01-10358	54	25	.	.	PUNCT
app01-10358	55	1	the	the	DET
app01-10358	55	2	disadvantage	disadvantage	NOUN
app01-10358	55	3	of	of	ADP
app01-10358	55	4	csm	csm	NOUN
app01-10358	55	5	mode	mode	NOUN
app01-10358	55	6	is	be	AUX
app01-10358	55	7	the	the	DET
app01-10358	55	8	contribution	contribution	NOUN
app01-10358	55	9	of	of	ADP
app01-10358	55	10	“	"	PUNCT
app01-10358	55	11	plasticity	plasticity	NOUN
app01-10358	55	12	error	error	NOUN
app01-10358	55	13	”	"	PUNCT
app01-10358	55	14	causing	cause	VERB
app01-10358	55	15	deviations	deviation	NOUN
app01-10358	55	16	at	at	ADP
app01-10358	55	17	lower	low	ADJ
app01-10358	55	18	frequencies	frequency	NOUN
app01-10358	55	19	,	,	PUNCT
app01-10358	55	20	especially	especially	ADV
app01-10358	55	21	in	in	ADP
app01-10358	55	22	the	the	DET
app01-10358	55	23	materials	material	NOUN
app01-10358	55	24	with	with	ADP
app01-10358	55	25	high	high	ADJ
app01-10358	55	26	e	e	NOUN
app01-10358	55	27	/	/	SYM
app01-10358	55	28	h	h	NOUN
app01-10358	55	29	ratio	ratio	NOUN
app01-10358	55	30	[	[	X
app01-10358	55	31	22	22	NUM
app01-10358	55	32	]	]	PUNCT
app01-10358	55	33	.	.	PUNCT
app01-10358	56	1	it	it	PRON
app01-10358	56	2	is	be	AUX
app01-10358	56	3	related	relate	VERB
app01-10358	56	4	to	to	ADP
app01-10358	56	5	small	small	ADJ
app01-10358	56	6	plastic	plastic	NOUN
app01-10358	56	7	deformation	deformation	NOUN
app01-10358	56	8	added	add	VERB
app01-10358	56	9	to	to	ADP
app01-10358	56	10	the	the	DET
app01-10358	56	11	elastic	elastic	ADJ
app01-10358	56	12	deformation	deformation	NOUN
app01-10358	56	13	due	due	ADP
app01-10358	56	14	to	to	ADP
app01-10358	56	15	a	a	DET
app01-10358	56	16	higher	high	ADJ
app01-10358	56	17	total	total	ADJ
app01-10358	56	18	load	load	NOUN
app01-10358	56	19	at	at	ADP
app01-10358	56	20	the	the	DET
app01-10358	56	21	end	end	NOUN
app01-10358	56	22	of	of	ADP
app01-10358	56	23	the	the	DET
app01-10358	56	24	cycle	cycle	NOUN
app01-10358	56	25	than	than	ADP
app01-10358	56	26	at	at	ADP
app01-10358	56	27	its	its	PRON
app01-10358	56	28	beginning	beginning	NOUN
app01-10358	56	29	.	.	PUNCT
app01-10358	57	1	however	however	ADV
app01-10358	57	2	,	,	PUNCT
app01-10358	57	3	plasticity	plasticity	NOUN
app01-10358	57	4	error	error	NOUN
app01-10358	57	5	can	can	AUX
app01-10358	57	6	be	be	AUX
app01-10358	57	7	corrected	correct	VERB
app01-10358	57	8	[	[	X
app01-10358	57	9	21	21	NUM
app01-10358	57	10	]	]	PUNCT
app01-10358	57	11	or	or	CCONJ
app01-10358	57	12	significantly	significantly	ADV
app01-10358	57	13	reduced	reduce	VERB
app01-10358	57	14	using	use	VERB
app01-10358	57	15	an	an	DET
app01-10358	57	16	appropriate	appropriate	ADJ
app01-10358	57	17	combination	combination	NOUN
app01-10358	57	18	of	of	ADP
app01-10358	57	19	amplitude	amplitude	NOUN
app01-10358	57	20	,	,	PUNCT
app01-10358	57	21	frequency	frequency	NOUN
app01-10358	57	22	and	and	CCONJ
app01-10358	57	23	loading	loading	NOUN
app01-10358	57	24	rate	rate	NOUN
app01-10358	57	25	[	[	X
app01-10358	57	26	22	22	NUM
app01-10358	57	27	]	]	PUNCT
app01-10358	57	28	.	.	PUNCT
app01-10358	58	1	it	it	PRON
app01-10358	58	2	can	can	AUX
app01-10358	58	3	be	be	AUX
app01-10358	58	4	also	also	ADV
app01-10358	58	5	eliminated	eliminate	VERB
app01-10358	58	6	when	when	SCONJ
app01-10358	58	7	using	use	VERB
app01-10358	58	8	the	the	DET
app01-10358	58	9	so	so	ADV
app01-10358	58	10	-	-	PUNCT
app01-10358	58	11	called	call	VERB
app01-10358	58	12	quasicsm	quasicsm	NOUN
app01-10358	58	13	(	(	PUNCT
app01-10358	58	14	qcsm	qcsm	NOUN
app01-10358	58	15	)	)	PUNCT
app01-10358	58	16	mode	mode	NOUN
app01-10358	58	17	when	when	SCONJ
app01-10358	58	18	sinusoidal	sinusoidal	ADJ
app01-10358	58	19	oscillations	oscillation	NOUN
app01-10358	58	20	are	be	AUX
app01-10358	58	21	applied	apply	VERB
app01-10358	58	22	only	only	ADV
app01-10358	58	23	to	to	AUX
app01-10358	58	24	repeated	repeat	VERB
app01-10358	58	25	,	,	PUNCT
app01-10358	58	26	short	short	ADJ
app01-10358	58	27	dwell	dwell	NOUN
app01-10358	58	28	-	-	PUNCT
app01-10358	58	29	time	time	NOUN
app01-10358	58	30	periods	period	NOUN
app01-10358	58	31	during	during	ADP
app01-10358	58	32	a	a	DET
app01-10358	58	33	continuous	continuous	ADJ
app01-10358	58	34	loading	loading	NOUN
app01-10358	58	35	cycle	cycle	NOUN
app01-10358	58	36	[	[	X
app01-10358	58	37	23	23	NUM
app01-10358	58	38	]	]	PUNCT
app01-10358	58	39	.	.	PUNCT
app01-10358	59	1	regardless	regardless	ADV
app01-10358	59	2	of	of	ADP
app01-10358	59	3	the	the	DET
app01-10358	59	4	method	method	ADJ
app01-10358	59	5	depth	depth	NOUN
app01-10358	59	6	profiles	profile	NOUN
app01-10358	59	7	were	be	AUX
app01-10358	59	8	obtained	obtain	VERB
app01-10358	59	9	,	,	PUNCT
app01-10358	59	10	iso	iso	PROPN
app01-10358	59	11	standard	standard	ADJ
app01-10358	59	12	procedure	procedure	NOUN
app01-10358	59	13	should	should	AUX
app01-10358	59	14	be	be	AUX
app01-10358	59	15	used	use	VERB
app01-10358	59	16	to	to	PART
app01-10358	59	17	deduce	deduce	VERB
app01-10358	59	18	the	the	DET
app01-10358	59	19	corresponding	corresponding	ADJ
app01-10358	59	20	coating	coat	VERB
app01-10358	59	21	properties	property	NOUN
app01-10358	59	22	without	without	ADP
app01-10358	59	23	the	the	DET
app01-10358	59	24	influence	influence	NOUN
app01-10358	59	25	of	of	ADP
app01-10358	59	26	the	the	DET
app01-10358	59	27	substrate	substrate	NOUN
app01-10358	59	28	.	.	PUNCT
app01-10358	60	1	sinusoidal	sinusoidal	PROPN
app01-10358	60	2	modes	mode	NOUN
app01-10358	60	3	(	(	PUNCT
app01-10358	60	4	csm	csm	NOUN
app01-10358	60	5	and	and	CCONJ
app01-10358	60	6	csmtf	csmtf	NOUN
app01-10358	60	7	)	)	PUNCT
app01-10358	60	8	seem	seem	VERB
app01-10358	60	9	to	to	PART
app01-10358	60	10	be	be	AUX
app01-10358	60	11	easier	easy	ADJ
app01-10358	60	12	,	,	PUNCT
app01-10358	60	13	faster	fast	ADJ
app01-10358	60	14	and	and	CCONJ
app01-10358	60	15	more	more	ADV
app01-10358	60	16	precise	precise	ADJ
app01-10358	60	17	than	than	ADP
app01-10358	60	18	cmc	cmc	NOUN
app01-10358	60	19	and	and	CCONJ
app01-10358	60	20	loading	loading	NOUN
app01-10358	60	21	/	/	SYM
app01-10358	60	22	unloading	unloading	NOUN
app01-10358	60	23	tests	test	NOUN
app01-10358	60	24	.	.	PUNCT
app01-10358	61	1	moreover	moreover	ADV
app01-10358	61	2	,	,	PUNCT
app01-10358	61	3	the	the	DET
app01-10358	61	4	iso	iso	NOUN
app01-10358	61	5	procedure	procedure	NOUN
app01-10358	61	6	is	be	AUX
app01-10358	61	7	already	already	ADV
app01-10358	61	8	built	build	VERB
app01-10358	61	9	in	in	ADP
app01-10358	61	10	the	the	DET
app01-10358	61	11	evaluation	evaluation	NOUN
app01-10358	61	12	software	software	NOUN
app01-10358	61	13	of	of	ADP
app01-10358	61	14	sinusoidal	sinusoidal	NOUN
app01-10358	61	15	modes	mode	NOUN
app01-10358	61	16	including	include	VERB
app01-10358	61	17	that	that	PRON
app01-10358	61	18	on	on	ADP
app01-10358	61	19	the	the	DET
app01-10358	61	20	h&c	h&c	PROPN
app01-10358	61	21	model	model	NOUN
app01-10358	61	22	and	and	CCONJ
app01-10358	61	23	known	know	VERB
app01-10358	61	24	as	as	ADP
app01-10358	61	25	“	"	PUNCT
app01-10358	61	26	csm	csm	NOUN
app01-10358	61	27	for	for	ADP
app01-10358	61	28	thin	thin	ADJ
app01-10358	61	29	films	film	NOUN
app01-10358	61	30	”	"	PUNCT
app01-10358	61	31	(	(	PUNCT
app01-10358	61	32	csmtf	csmtf	NOUN
app01-10358	61	33	)	)	PUNCT
app01-10358	61	34	mode	mode	NOUN
app01-10358	61	35	.	.	PUNCT
app01-10358	62	1	however	however	ADV
app01-10358	62	2	,	,	PUNCT
app01-10358	62	3	a	a	DET
app01-10358	62	4	comprehensive	comprehensive	ADJ
app01-10358	62	5	comparison	comparison	NOUN
app01-10358	62	6	of	of	ADP
app01-10358	62	7	the	the	DET
app01-10358	62	8	evaluation	evaluation	NOUN
app01-10358	62	9	of	of	ADP
app01-10358	62	10	nanoindentation	nanoindentation	NOUN
app01-10358	62	11	results	result	NOUN
app01-10358	62	12	considering	consider	VERB
app01-10358	62	13	different	different	ADJ
app01-10358	62	14	methods	method	NOUN
app01-10358	62	15	for	for	ADP
app01-10358	62	16	depth	depth	NOUN
app01-10358	62	17	profile	profile	NOUN
app01-10358	62	18	generation	generation	NOUN
app01-10358	62	19	,	,	PUNCT
app01-10358	62	20	differences	difference	NOUN
app01-10358	62	21	between	between	ADP
app01-10358	62	22	conventional	conventional	ADJ
app01-10358	62	23	csm	csm	NOUN
app01-10358	62	24	and	and	CCONJ
app01-10358	62	25	csm	csm	NOUN
app01-10358	62	26	treated	treat	VERB
app01-10358	62	27	based	base	VERB
app01-10358	62	28	on	on	ADP
app01-10358	62	29	the	the	DET
app01-10358	62	30	h&c	h&c	PROPN
app01-10358	62	31	model	model	NOUN
app01-10358	62	32	with	with	ADP
app01-10358	62	33	the	the	DET
app01-10358	62	34	effect	effect	NOUN
app01-10358	62	35	of	of	ADP
app01-10358	62	36	substrate	substrate	NOUN
app01-10358	62	37	properties	property	NOUN
app01-10358	62	38	are	be	AUX
app01-10358	62	39	still	still	ADV
app01-10358	62	40	missing	miss	VERB
app01-10358	62	41	.	.	PUNCT
app01-10358	63	1	therefore	therefore	ADV
app01-10358	63	2	,	,	PUNCT
app01-10358	63	3	the	the	DET
app01-10358	63	4	current	current	ADJ
app01-10358	63	5	work	work	NOUN
app01-10358	63	6	aimed	aim	VERB
app01-10358	63	7	to	to	PART
app01-10358	63	8	quantify	quantify	VERB
app01-10358	63	9	the	the	DET
app01-10358	63	10	differences	difference	NOUN
app01-10358	63	11	in	in	ADP
app01-10358	63	12	the	the	DET
app01-10358	63	13	obtained	obtain	VERB
app01-10358	63	14	hardness	hardness	NOUN
app01-10358	63	15	and	and	CCONJ
app01-10358	63	16	moduli	modulus	NOUN
app01-10358	63	17	from	from	ADP
app01-10358	63	18	the	the	DET
app01-10358	63	19	depth	depth	NOUN
app01-10358	63	20	profiles	profile	NOUN
app01-10358	63	21	obtained	obtain	VERB
app01-10358	63	22	using	use	VERB
app01-10358	63	23	different	different	ADJ
app01-10358	63	24	modes	mode	NOUN
app01-10358	63	25	and	and	CCONJ
app01-10358	63	26	on	on	ADP
app01-10358	63	27	the	the	DET
app01-10358	63	28	coating	coating	NOUN
app01-10358	63	29	/	/	SYM
app01-10358	63	30	substrate	substrate	NOUN
app01-10358	63	31	systems	system	NOUN
app01-10358	63	32	with	with	ADP
app01-10358	63	33	different	different	ADJ
app01-10358	63	34	substrate	substrate	NOUN
app01-10358	63	35	’s	’s	PART
app01-10358	63	36	young	young	ADJ
app01-10358	63	37	’s	’s	PART
app01-10358	63	38	moduli	modulus	NOUN
app01-10358	63	39	on	on	ADP
app01-10358	63	40	the	the	DET
app01-10358	63	41	statistically	statistically	ADV
app01-10358	63	42	sufficient	sufficient	ADJ
app01-10358	63	43	set	set	NOUN
app01-10358	63	44	of	of	ADP
app01-10358	63	45	coatings	coating	NOUN
app01-10358	63	46	.	.	PUNCT
app01-10358	64	1	the	the	DET
app01-10358	64	2	work	work	NOUN
app01-10358	64	3	is	be	AUX
app01-10358	64	4	the	the	DET
app01-10358	64	5	extension	extension	NOUN
app01-10358	64	6	of	of	ADP
app01-10358	64	7	our	our	PRON
app01-10358	64	8	previous	previous	ADJ
app01-10358	64	9	on	on	ADP
app01-10358	64	10	4	4	NUM
app01-10358	64	11	different	different	ADJ
app01-10358	64	12	substrates	substrate	NOUN
app01-10358	64	13	[	[	X
app01-10358	64	14	24	24	NUM
app01-10358	64	15	]	]	PUNCT
app01-10358	64	16	from	from	ADP
app01-10358	64	17	one	one	NUM
app01-10358	64	18	up	up	ADP
app01-10358	64	19	to	to	PART
app01-10358	64	20	six	six	NUM
app01-10358	64	21	types	type	NOUN
app01-10358	64	22	of	of	ADP
app01-10358	64	23	multi	multi	ADJ
app01-10358	64	24	-	-	ADJ
app01-10358	64	25	transition	transition	ADJ
app01-10358	64	26	metal	metal	NOUN
app01-10358	64	27	-	-	PUNCT
app01-10358	64	28	nitride	nitride	NOUN
app01-10358	64	29	(	(	PUNCT
app01-10358	64	30	(	(	PUNCT
app01-10358	64	31	tizrhf+me)ny	tizrhf+me)ny	PROPN
app01-10358	64	32	,	,	PUNCT
app01-10358	64	33	where	where	SCONJ
app01-10358	64	34	me	i	PRON
app01-10358	64	35	=	=	SYM
app01-10358	64	36	v	v	PROPN
app01-10358	64	37	,	,	PUNCT
app01-10358	64	38	nb	nb	INTJ
app01-10358	64	39	,	,	PUNCT
app01-10358	64	40	ta	ta	PROPN
app01-10358	64	41	and	and	CCONJ
app01-10358	64	42	nbmotaw	nbmotaw	PROPN
app01-10358	64	43	-	-	PUNCT
app01-10358	64	44	ny	ny	NOUN
app01-10358	64	45	)	)	PUNCT
app01-10358	64	46	coatings	coating	NOUN
app01-10358	64	47	with	with	ADP
app01-10358	64	48	different	different	ADJ
app01-10358	64	49	stoichiometry	stoichiometry	NOUN
app01-10358	64	50	spanning	span	VERB
app01-10358	64	51	from	from	ADP
app01-10358	64	52	pure	pure	ADJ
app01-10358	64	53	metallic	metallic	ADJ
app01-10358	64	54	high	high	ADJ
app01-10358	64	55	entropy	entropy	NOUN
app01-10358	64	56	stabilized	stabilize	VERB
app01-10358	64	57	alloys	alloy	NOUN
app01-10358	64	58	(	(	PUNCT
app01-10358	64	59	y	y	NOUN
app01-10358	64	60	=	=	SYM
app01-10358	64	61	0	0	NUM
app01-10358	64	62	)	)	PUNCT
app01-10358	64	63	up	up	ADP
app01-10358	64	64	to	to	ADP
app01-10358	64	65	stoichiometric	stoichiometric	ADJ
app01-10358	64	66	nitrides	nitride	NOUN
app01-10358	64	67	(	(	PUNCT
app01-10358	64	68	y	y	NOUN
app01-10358	64	69	=	=	SYM
app01-10358	64	70	1	1	NUM
app01-10358	64	71	)	)	PUNCT
app01-10358	64	72	.	.	PUNCT
app01-10358	65	1	2	2	X
app01-10358	65	2	.	.	X
app01-10358	65	3	materials	material	NOUN
app01-10358	65	4	and	and	CCONJ
app01-10358	65	5	methods	method	NOUN
app01-10358	65	6	2.1	2.1	NUM
app01-10358	65	7	.	.	PUNCT
app01-10358	66	1	coating	coat	VERB
app01-10358	66	2	deposition	deposition	NOUN
app01-10358	66	3	the	the	DET
app01-10358	66	4	studied	study	VERB
app01-10358	66	5	coatings	coating	NOUN
app01-10358	66	6	were	be	AUX
app01-10358	66	7	deposited	deposit	VERB
app01-10358	66	8	by	by	ADP
app01-10358	66	9	sputtering	sputter	VERB
app01-10358	66	10	on	on	ADP
app01-10358	66	11	four	four	NUM
app01-10358	66	12	different	different	ADJ
app01-10358	66	13	substrates	substrate	NOUN
app01-10358	66	14	from	from	ADP
app01-10358	66	15	six	six	NUM
app01-10358	66	16	different	different	ADJ
app01-10358	66	17	composite	composite	ADJ
app01-10358	66	18	targets	target	NOUN
app01-10358	66	19	.	.	PUNCT
app01-10358	67	1	the	the	DET
app01-10358	67	2	substrates	substrate	NOUN
app01-10358	67	3	involved	involve	VERB
app01-10358	67	4	polished	polished	ADJ
app01-10358	67	5	single	single	ADJ
app01-10358	67	6	crystalline	crystalline	NOUN
app01-10358	67	7	(	(	PUNCT
app01-10358	67	8	111	111	NUM
app01-10358	67	9	)	)	PUNCT
app01-10358	67	10	si	si	NOUN
app01-10358	67	11	and	and	CCONJ
app01-10358	67	12	(	(	PUNCT
app01-10358	67	13	0001	0001	NUM
app01-10358	67	14	)	)	PUNCT
app01-10358	67	15	sapphire	sapphire	NOUN
app01-10358	67	16	wafers	wafer	NOUN
app01-10358	67	17	,	,	PUNCT
app01-10358	67	18	the	the	DET
app01-10358	67	19	polished	polished	ADJ
app01-10358	67	20	discs	disc	NOUN
app01-10358	67	21	of	of	ADP
app01-10358	67	22	polycrystalline	polycrystalline	NOUN
app01-10358	67	23	tempered	temper	VERB
app01-10358	67	24	100cr6	100cr6	NUM
app01-10358	67	25	steel	steel	NOUN
app01-10358	67	26	and	and	CCONJ
app01-10358	67	27	ti6al4v	ti6al4v	ADP
app01-10358	67	28	alloy	alloy	NOUN
app01-10358	67	29	with	with	ADP
app01-10358	67	30	different	different	ADJ
app01-10358	67	31	elastic	elastic	ADJ
app01-10358	67	32	moduli	modulus	NOUN
app01-10358	67	33	(	(	PUNCT
app01-10358	67	34	see	see	VERB
app01-10358	67	35	table	table	NOUN
app01-10358	67	36	1	1	NUM
app01-10358	67	37	)	)	PUNCT
app01-10358	67	38	.	.	PUNCT
app01-10358	68	1	the	the	DET
app01-10358	68	2	targets	target	NOUN
app01-10358	68	3	included	include	VERB
app01-10358	68	4	tizrhf	tizrhf	PROPN
app01-10358	68	5	,	,	PUNCT
app01-10358	68	6	tizrhfv	tizrhfv	PROPN
app01-10358	68	7	,	,	PUNCT
app01-10358	68	8	tizrhfnb	tizrhfnb	NOUN
app01-10358	68	9	,	,	PUNCT
app01-10358	68	10	tizrhfta	tizrhfta	ADV
app01-10358	68	11	,	,	PUNCT
app01-10358	68	12	tinbvtazrhf	tinbvtazrhf	NOUN
app01-10358	68	13	and	and	CCONJ
app01-10358	68	14	nbmotaw	nbmotaw	NOUN
app01-10358	68	15	discs	disc	NOUN
app01-10358	68	16	with	with	ADP
app01-10358	68	17	the	the	DET
app01-10358	68	18	diameters	diameter	NOUN
app01-10358	68	19	76.2	76.2	NUM
app01-10358	68	20	mm	mm	NOUN
app01-10358	68	21	and	and	CCONJ
app01-10358	68	22	thicknesses	thickness	NOUN
app01-10358	68	23	of	of	ADP
app01-10358	68	24	around	around	ADP
app01-10358	68	25	6.35	6.35	NUM
app01-10358	68	26	mm	mm	NOUN
app01-10358	68	27	(	(	PUNCT
app01-10358	68	28	table	table	NOUN
app01-10358	68	29	2	2	NUM
app01-10358	68	30	)	)	PUNCT
app01-10358	68	31	.	.	PUNCT
app01-10358	69	1	the	the	DET
app01-10358	69	2	tizrhf	tizrhf	PROPN
app01-10358	69	3	-	-	PUNCT
app01-10358	69	4	based	base	VERB
app01-10358	69	5	nitride	nitride	ADJ
app01-10358	69	6	coatings	coating	NOUN
app01-10358	69	7	were	be	AUX
app01-10358	69	8	produced	produce	VERB
app01-10358	69	9	by	by	ADP
app01-10358	69	10	reactive	reactive	ADJ
app01-10358	69	11	high	high	ADJ
app01-10358	69	12	target	target	NOUN
app01-10358	69	13	utilization	utilization	NOUN
app01-10358	69	14	sputtering	sputtering	NOUN
app01-10358	69	15	(	(	PUNCT
app01-10358	69	16	model	model	NOUN
app01-10358	69	17	s500	s500	PROPN
app01-10358	69	18	,	,	PUNCT
app01-10358	69	19	plasma	plasma	PROPN
app01-10358	69	20	quest	quest	PROPN
app01-10358	69	21	ltd	ltd	PROPN
app01-10358	69	22	.	.	PROPN
app01-10358	69	23	,	,	PUNCT
app01-10358	69	24	uk	uk	PROPN
app01-10358	69	25	)	)	PUNCT
app01-10358	69	26	from	from	ADP
app01-10358	69	27	the	the	DET
app01-10358	69	28	above	above	ADJ
app01-10358	69	29	targets	target	NOUN
app01-10358	69	30	under	under	ADP
app01-10358	69	31	the	the	DET
app01-10358	69	32	sputtering	sputtering	ADJ
app01-10358	69	33	conditions	condition	NOUN
app01-10358	69	34	optimized	optimize	VERB
app01-10358	69	35	earlier	early	ADV
app01-10358	69	36	[	[	X
app01-10358	69	37	30	30	NUM
app01-10358	69	38	]	]	PUNCT
app01-10358	69	39	and	and	CCONJ
app01-10358	69	40	applying	apply	VERB
app01-10358	69	41	different	different	ADJ
app01-10358	69	42	flows	flow	NOUN
app01-10358	69	43	of	of	ADP
app01-10358	69	44	nitrogen	nitrogen	NOUN
app01-10358	69	45	,	,	PUNCT
app01-10358	69	46	x	x	X
app01-10358	69	47	(	(	PUNCT
app01-10358	69	48	in	in	ADP
app01-10358	69	49	standard	standard	ADJ
app01-10358	69	50	cubic	cubic	ADJ
app01-10358	69	51	centimeters	centimeter	NOUN
app01-10358	69	52	per	per	ADP
app01-10358	69	53	minute	minute	NOUN
app01-10358	69	54	,	,	PUNCT
app01-10358	69	55	sccm	sccm	NOUN
app01-10358	69	56	)	)	PUNCT
app01-10358	69	57	,	,	PUNCT
app01-10358	69	58	into	into	ADP
app01-10358	69	59	the	the	DET
app01-10358	69	60	sputtering	sputtering	ADJ
app01-10358	69	61	ar	ar	NOUN
app01-10358	69	62	atmosphere	atmosphere	NOUN
app01-10358	69	63	(	(	PUNCT
app01-10358	69	64	120	120	NUM
app01-10358	69	65	sccm	sccm	NOUN
app01-10358	69	66	)	)	PUNCT
app01-10358	69	67	.	.	PUNCT
app01-10358	70	1	the	the	DET
app01-10358	70	2	values	value	NOUN
app01-10358	70	3	of	of	ADP
app01-10358	70	4	x	x	PRON
app01-10358	70	5	were	be	AUX
app01-10358	70	6	usually	usually	ADV
app01-10358	70	7	in	in	ADP
app01-10358	70	8	the	the	DET
app01-10358	70	9	range	range	NOUN
app01-10358	70	10	0–10	0–10	NOUN
app01-10358	70	11	sccm	sccm	NOUN
app01-10358	70	12	when	when	SCONJ
app01-10358	70	13	stoichiometric	stoichiometric	ADJ
app01-10358	70	14	composition	composition	NOUN
app01-10358	70	15	was	be	AUX
app01-10358	70	16	achieved	achieve	VERB
app01-10358	70	17	.	.	PUNCT
app01-10358	71	1	the	the	DET
app01-10358	71	2	structure	structure	NOUN
app01-10358	71	3	and	and	CCONJ
app01-10358	71	4	composition	composition	NOUN
app01-10358	71	5	of	of	ADP
app01-10358	71	6	these	these	DET
app01-10358	71	7	coatings	coating	NOUN
app01-10358	71	8	were	be	AUX
app01-10358	71	9	described	describe	VERB
app01-10358	71	10	earlier	early	ADV
app01-10358	71	11	[	[	X
app01-10358	71	12	30	30	NUM
app01-10358	71	13	]	]	PUNCT
app01-10358	71	14	.	.	PUNCT
app01-10358	72	1	the	the	DET
app01-10358	72	2	metallic	metallic	ADJ
app01-10358	72	3	nbmotaw	nbmotaw	NOUN
app01-10358	72	4	coating	coating	NOUN
app01-10358	72	5	was	be	AUX
app01-10358	72	6	deposited	deposit	VERB
app01-10358	72	7	using	use	VERB
app01-10358	72	8	balanced	balanced	ADJ
app01-10358	72	9	dc	dc	PROPN
app01-10358	72	10	magnetron	magnetron	NOUN
app01-10358	72	11	sputtering	sputtering	NOUN
app01-10358	72	12	at	at	ADP
app01-10358	72	13	300w	300w	NOUN
app01-10358	72	14	on	on	ADP
app01-10358	72	15	a	a	DET
app01-10358	72	16	sapphire	sapphire	NOUN
app01-10358	72	17	substrate	substrate	NOUN
app01-10358	72	18	heated	heat	VERB
app01-10358	72	19	to	to	ADP
app01-10358	72	20	500	500	NUM
app01-10358	72	21	°	°	NOUN
app01-10358	72	22	c	c	NOUN
app01-10358	72	23	at	at	ADP
app01-10358	72	24	a	a	DET
app01-10358	72	25	floating	float	VERB
app01-10358	72	26	bias	bias	NOUN
app01-10358	72	27	.	.	PUNCT
app01-10358	73	1	37	37	NUM
app01-10358	73	2	františek	františek	NOUN
app01-10358	73	3	lofaj	lofaj	ADJ
app01-10358	73	4	acta	acta	PROPN
app01-10358	73	5	polytechnica	polytechnica	PROPN
app01-10358	73	6	ctu	ctu	PROPN
app01-10358	73	7	proceedings	proceeding	NOUN
app01-10358	73	8	target	target	VERB
app01-10358	73	9	ti	ti	X
app01-10358	73	10	zr	zr	PROPN
app01-10358	73	11	hf	hf	PROPN
app01-10358	73	12	nb	nb	PROPN
app01-10358	73	13	v	v	X
app01-10358	73	14	ta	ta	PROPN
app01-10358	73	15	mo	mo	PROPN
app01-10358	73	16	w	w	PROPN
app01-10358	74	1	[	[	X
app01-10358	74	2	%	%	X
app01-10358	74	3	]	]	X
app01-10358	75	1	[	[	X
app01-10358	75	2	%	%	X
app01-10358	75	3	]	]	X
app01-10358	76	1	[	[	X
app01-10358	76	2	%	%	X
app01-10358	76	3	]	]	X
app01-10358	77	1	[	[	X
app01-10358	77	2	%	%	X
app01-10358	77	3	]	]	X
app01-10358	78	1	[	[	X
app01-10358	78	2	%	%	X
app01-10358	78	3	]	]	X
app01-10358	79	1	[	[	X
app01-10358	79	2	%	%	X
app01-10358	79	3	]	]	X
app01-10358	80	1	[	[	X
app01-10358	80	2	%	%	X
app01-10358	80	3	]	]	X
app01-10358	81	1	[	[	X
app01-10358	81	2	%	%	X
app01-10358	81	3	]	]	X
app01-10358	81	4	tizrhf	tizrhf	PROPN
app01-10358	81	5	(	(	PUNCT
app01-10358	81	6	99.6	99.6	NUM
app01-10358	81	7	%	%	NOUN
app01-10358	81	8	)	)	PUNCT
app01-10358	81	9	#	#	NOUN
app01-10358	81	10	33	33	NUM
app01-10358	81	11	33	33	NUM
app01-10358	81	12	34	34	NUM
app01-10358	81	13	–	–	PUNCT
app01-10358	81	14	–	–	PUNCT
app01-10358	81	15	–	–	PUNCT
app01-10358	81	16	–	–	PUNCT
app01-10358	81	17	–	–	PUNCT
app01-10358	81	18	tizrhfv	tizrhfv	NOUN
app01-10358	81	19	(	(	PUNCT
app01-10358	81	20	>	>	PROPN
app01-10358	81	21	99.5	99.5	NUM
app01-10358	81	22	%	%	NOUN
app01-10358	81	23	)	)	PUNCT
app01-10358	81	24	*	*	PUNCT
app01-10358	81	25	32	32	NUM
app01-10358	81	26	18	18	NUM
app01-10358	81	27	18	18	NUM
app01-10358	81	28	–	–	PUNCT
app01-10358	81	29	32	32	NUM
app01-10358	81	30	–	–	PUNCT
app01-10358	81	31	–	–	PUNCT
app01-10358	81	32	–	–	PUNCT
app01-10358	81	33	tizrhfnb	tizrhfnb	NOUN
app01-10358	81	34	(	(	PUNCT
app01-10358	81	35	>	>	SYM
app01-10358	81	36	99.5	99.5	NUM
app01-10358	81	37	%	%	NOUN
app01-10358	81	38	)	)	PUNCT
app01-10358	81	39	*	*	PUNCT
app01-10358	81	40	33	33	NUM
app01-10358	81	41	19	19	NUM
app01-10358	81	42	19	19	NUM
app01-10358	81	43	29	29	NUM
app01-10358	81	44	tizrhfta	tizrhfta	NOUN
app01-10358	81	45	(	(	PUNCT
app01-10358	81	46	>	>	SYM
app01-10358	81	47	99.5	99.5	NUM
app01-10358	81	48	%	%	NOUN
app01-10358	81	49	)	)	PUNCT
app01-10358	81	50	*	*	PUNCT
app01-10358	81	51	33	33	NUM
app01-10358	81	52	19	19	NUM
app01-10358	81	53	19	19	NUM
app01-10358	81	54	–	–	PUNCT
app01-10358	81	55	–	–	PUNCT
app01-10358	81	56	29	29	NUM
app01-10358	81	57	–	–	PUNCT
app01-10358	81	58	–	–	PUNCT
app01-10358	81	59	tinbvtazrhf	tinbvtazrhf	NOUN
app01-10358	81	60	(	(	PUNCT
app01-10358	81	61	>	>	SYM
app01-10358	81	62	99.5	99.5	NUM
app01-10358	81	63	%	%	NOUN
app01-10358	81	64	)	)	PUNCT
app01-10358	81	65	*	*	PUNCT
app01-10358	81	66	20	20	NUM
app01-10358	81	67	12	12	NUM
app01-10358	81	68	12	12	NUM
app01-10358	81	69	18	18	NUM
app01-10358	81	70	20	20	NUM
app01-10358	81	71	18	18	NUM
app01-10358	81	72	–	–	PUNCT
app01-10358	81	73	–	–	PUNCT
app01-10358	81	74	nbmotav	nbmotav	X
app01-10358	81	75	(	(	PUNCT
app01-10358	81	76	>	>	NOUN
app01-10358	81	77	99.9	99.9	NUM
app01-10358	81	78	%	%	NOUN
app01-10358	81	79	)	)	PUNCT
app01-10358	81	80	*	*	PUNCT
app01-10358	81	81	–	–	PUNCT
app01-10358	81	82	–	–	PUNCT
app01-10358	81	83	–	–	PUNCT
app01-10358	81	84	25	25	NUM
app01-10358	81	85	–	–	PUNCT
app01-10358	81	86	25	25	NUM
app01-10358	81	87	25	25	NUM
app01-10358	81	88	25	25	NUM
app01-10358	81	89	*	*	PUNCT
app01-10358	81	90	testbourne	testbourne	PROPN
app01-10358	81	91	,	,	PUNCT
app01-10358	81	92	ltd	ltd	PROPN
app01-10358	81	93	.	.	PROPN
app01-10358	81	94	;	;	PUNCT
app01-10358	81	95	#	#	NOUN
app01-10358	81	96	porexi	porexi	NOUN
app01-10358	81	97	table	table	NOUN
app01-10358	81	98	2	2	NUM
app01-10358	81	99	.	.	PUNCT
app01-10358	82	1	the	the	DET
app01-10358	82	2	list	list	NOUN
app01-10358	82	3	of	of	ADP
app01-10358	82	4	the	the	DET
app01-10358	82	5	targets	target	NOUN
app01-10358	82	6	and	and	CCONJ
app01-10358	82	7	their	their	PRON
app01-10358	82	8	nominal	nominal	ADJ
app01-10358	82	9	compositions	composition	NOUN
app01-10358	82	10	used	use	VERB
app01-10358	82	11	for	for	ADP
app01-10358	82	12	the	the	DET
app01-10358	82	13	deposition	deposition	NOUN
app01-10358	82	14	of	of	ADP
app01-10358	82	15	the	the	DET
app01-10358	82	16	studied	studied	ADJ
app01-10358	82	17	nitride	nitride	ADJ
app01-10358	82	18	coatings	coating	NOUN
app01-10358	82	19	.	.	PUNCT
app01-10358	83	1	2.2	2.2	NUM
app01-10358	83	2	.	.	PUNCT
app01-10358	84	1	nanoindentation	nanoindentation	NOUN
app01-10358	84	2	nanoindentation	nanoindentation	NOUN
app01-10358	84	3	tests	test	NOUN
app01-10358	84	4	were	be	AUX
app01-10358	84	5	performed	perform	VERB
app01-10358	84	6	with	with	ADP
app01-10358	84	7	freshly	freshly	ADV
app01-10358	84	8	calibrated	calibrate	VERB
app01-10358	84	9	berkovich	berkovich	NOUN
app01-10358	84	10	diamond	diamond	NOUN
app01-10358	84	11	tip	tip	NOUN
app01-10358	84	12	in	in	ADP
app01-10358	84	13	g	g	PROPN
app01-10358	84	14	200	200	NUM
app01-10358	84	15	(	(	PUNCT
app01-10358	84	16	agilent	agilent	PROPN
app01-10358	84	17	/	/	SYM
app01-10358	84	18	kla	kla	PROPN
app01-10358	84	19	,	,	PUNCT
app01-10358	84	20	usa	usa	PROPN
app01-10358	84	21	)	)	PUNCT
app01-10358	84	22	nanoindenter	nanoindenter	NOUN
app01-10358	84	23	under	under	ADP
app01-10358	84	24	load	load	NOUN
app01-10358	84	25	control	control	NOUN
app01-10358	84	26	with	with	ADP
app01-10358	84	27	the	the	DET
app01-10358	84	28	constant	constant	ADJ
app01-10358	84	29	strain	strain	NOUN
app01-10358	84	30	rate	rate	NOUN
app01-10358	84	31	of	of	ADP
app01-10358	84	32	0.05	0.05	NUM
app01-10358	84	33	s−1	s−1	PROPN
app01-10358	84	34	using	use	VERB
app01-10358	84	35	four	four	NUM
app01-10358	84	36	techniques	technique	NOUN
app01-10358	84	37	–	–	PUNCT
app01-10358	84	38	loading	loading	NOUN
app01-10358	84	39	/	/	SYM
app01-10358	84	40	unloading	unloading	NOUN
app01-10358	84	41	,	,	PUNCT
app01-10358	84	42	cmc	cmc	PROPN
app01-10358	84	43	,	,	PUNCT
app01-10358	84	44	csm	csm	NOUN
app01-10358	84	45	and	and	CCONJ
app01-10358	84	46	csmtf	csmtf	NOUN
app01-10358	84	47	.	.	PUNCT
app01-10358	85	1	in	in	ADP
app01-10358	85	2	both	both	DET
app01-10358	85	3	csm	csm	NOUN
app01-10358	85	4	cases	case	NOUN
app01-10358	85	5	,	,	PUNCT
app01-10358	85	6	the	the	DET
app01-10358	85	7	frequency	frequency	NOUN
app01-10358	85	8	of	of	ADP
app01-10358	85	9	45hz	45hz	NOUN
app01-10358	85	10	and	and	CCONJ
app01-10358	85	11	the	the	DET
app01-10358	85	12	amplitude	amplitude	NOUN
app01-10358	85	13	of	of	ADP
app01-10358	85	14	2	2	NUM
app01-10358	85	15	nm	nm	NOUN
app01-10358	85	16	were	be	AUX
app01-10358	85	17	applied	apply	VERB
app01-10358	85	18	to	to	PART
app01-10358	85	19	reduce	reduce	VERB
app01-10358	85	20	the	the	DET
app01-10358	85	21	contribution	contribution	NOUN
app01-10358	85	22	of	of	ADP
app01-10358	85	23	plastic	plastic	ADJ
app01-10358	85	24	deformation	deformation	NOUN
app01-10358	85	25	during	during	ADP
app01-10358	85	26	sinusoidal	sinusoidal	NOUN
app01-10358	85	27	loading	loading	NOUN
app01-10358	85	28	[	[	X
app01-10358	85	29	22	22	NUM
app01-10358	85	30	]	]	PUNCT
app01-10358	85	31	.	.	PUNCT
app01-10358	86	1	on	on	ADP
app01-10358	86	2	each	each	DET
app01-10358	86	3	coating	coating	NOUN
app01-10358	86	4	,	,	PUNCT
app01-10358	86	5	two	two	NUM
app01-10358	86	6	sets	set	NOUN
app01-10358	86	7	of	of	ADP
app01-10358	86	8	16	16	NUM
app01-10358	86	9	indents	indent	NOUN
app01-10358	86	10	up	up	ADP
app01-10358	86	11	to	to	ADP
app01-10358	86	12	600	600	NUM
app01-10358	86	13	(	(	PUNCT
app01-10358	86	14	or	or	CCONJ
app01-10358	86	15	800	800	NUM
app01-10358	86	16	)	)	PUNCT
app01-10358	86	17	nm	nm	PRON
app01-10358	86	18	depth	depth	NOUN
app01-10358	86	19	were	be	AUX
app01-10358	86	20	carried	carry	VERB
app01-10358	86	21	out	out	ADP
app01-10358	86	22	.	.	PUNCT
app01-10358	87	1	the	the	DET
app01-10358	87	2	depth	depth	NOUN
app01-10358	87	3	profiles	profile	NOUN
app01-10358	87	4	were	be	AUX
app01-10358	87	5	treated	treat	VERB
app01-10358	87	6	according	accord	VERB
app01-10358	87	7	to	to	ADP
app01-10358	87	8	iso	iso	PROPN
app01-10358	87	9	14577	14577	NUM
app01-10358	87	10	-	-	SYM
app01-10358	87	11	4	4	NUM
app01-10358	87	12	with	with	ADP
app01-10358	87	13	the	the	DET
app01-10358	87	14	lower	low	ADJ
app01-10358	87	15	limit	limit	NOUN
app01-10358	87	16	of	of	ADP
app01-10358	87	17	the	the	DET
app01-10358	87	18	plateau	plateau	NOUN
app01-10358	87	19	range	range	NOUN
app01-10358	87	20	of	of	ADP
app01-10358	87	21	>	>	SYM
app01-10358	87	22	80	80	NUM
app01-10358	87	23	nm	nm	NOUN
app01-10358	87	24	determined	determine	VERB
app01-10358	87	25	by	by	ADP
app01-10358	87	26	tip	tip	PROPN
app01-10358	87	27	area	area	NOUN
app01-10358	87	28	calibration	calibration	NOUN
app01-10358	87	29	.	.	PUNCT
app01-10358	88	1	the	the	DET
app01-10358	88	2	upper	upper	ADJ
app01-10358	88	3	limit	limit	NOUN
app01-10358	88	4	depended	depend	VERB
app01-10358	88	5	on	on	ADP
app01-10358	88	6	the	the	DET
app01-10358	88	7	shape	shape	NOUN
app01-10358	88	8	of	of	ADP
app01-10358	88	9	the	the	DET
app01-10358	88	10	average	average	ADJ
app01-10358	88	11	depth	depth	NOUN
app01-10358	88	12	profile	profile	NOUN
app01-10358	88	13	and	and	CCONJ
app01-10358	88	14	measurement	measurement	NOUN
app01-10358	88	15	mode	mode	NOUN
app01-10358	88	16	:	:	PUNCT
app01-10358	88	17	in	in	ADP
app01-10358	88	18	the	the	DET
app01-10358	88	19	csm	csm	NOUN
app01-10358	88	20	case	case	NOUN
app01-10358	88	21	,	,	PUNCT
app01-10358	88	22	the	the	DET
app01-10358	88	23	upper	upper	ADJ
app01-10358	88	24	depth	depth	NOUN
app01-10358	88	25	limit	limit	NOUN
app01-10358	88	26	was	be	AUX
app01-10358	88	27	often	often	ADV
app01-10358	88	28	within	within	ADP
app01-10358	88	29	10	10	NUM
app01-10358	88	30	%	%	NOUN
app01-10358	88	31	of	of	ADP
app01-10358	88	32	the	the	DET
app01-10358	88	33	relative	relative	ADJ
app01-10358	88	34	coating	coat	VERB
app01-10358	88	35	thickness	thickness	NOUN
app01-10358	88	36	whereas	whereas	SCONJ
app01-10358	88	37	when	when	SCONJ
app01-10358	88	38	hay&crawford	hay&crawford	PROPN
app01-10358	88	39	correction	correction	NOUN
app01-10358	88	40	[	[	X
app01-10358	88	41	5	5	NUM
app01-10358	88	42	]	]	PUNCT
app01-10358	88	43	was	be	AUX
app01-10358	88	44	considered	consider	VERB
app01-10358	88	45	,	,	PUNCT
app01-10358	88	46	it	it	PRON
app01-10358	88	47	may	may	AUX
app01-10358	88	48	exceed	exceed	VERB
app01-10358	88	49	that	that	DET
app01-10358	88	50	depth	depth	NOUN
app01-10358	88	51	due	due	ADJ
app01-10358	88	52	to	to	ADP
app01-10358	88	53	improved	improve	VERB
app01-10358	88	54	consideration	consideration	NOUN
app01-10358	88	55	of	of	ADP
app01-10358	88	56	substrate	substrate	NOUN
app01-10358	88	57	effect	effect	NOUN
app01-10358	88	58	.	.	PUNCT
app01-10358	89	1	the	the	DET
app01-10358	89	2	thicknesses	thickness	NOUN
app01-10358	89	3	of	of	ADP
app01-10358	89	4	the	the	DET
app01-10358	89	5	coatings	coating	NOUN
app01-10358	89	6	were	be	AUX
app01-10358	89	7	measured	measure	VERB
app01-10358	89	8	using	use	VERB
app01-10358	89	9	scanning	scan	VERB
app01-10358	89	10	electron	electron	NOUN
app01-10358	89	11	microscopy	microscopy	NOUN
app01-10358	89	12	(	(	PUNCT
app01-10358	89	13	sem	sem	NOUN
app01-10358	89	14	,	,	PUNCT
app01-10358	89	15	models	model	VERB
app01-10358	89	16	auriga	auriga	ADJ
app01-10358	89	17	compact	compact	PROPN
app01-10358	89	18	,	,	PUNCT
app01-10358	89	19	zeiss	zeiss	PROPN
app01-10358	89	20	,	,	PUNCT
app01-10358	89	21	germany	germany	PROPN
app01-10358	89	22	)	)	PUNCT
app01-10358	89	23	on	on	ADP
app01-10358	89	24	the	the	DET
app01-10358	89	25	fractured	fractured	PROPN
app01-10358	89	26	cross	cross	NOUN
app01-10358	89	27	sections	section	NOUN
app01-10358	89	28	of	of	ADP
app01-10358	89	29	the	the	DET
app01-10358	89	30	coatings	coating	NOUN
app01-10358	89	31	deposited	deposit	VERB
app01-10358	89	32	on	on	ADP
app01-10358	89	33	si	si	NOUN
app01-10358	89	34	wafers	wafer	NOUN
app01-10358	89	35	.	.	PUNCT
app01-10358	90	1	3	3	X
app01-10358	90	2	.	.	NOUN
app01-10358	90	3	results	result	NOUN
app01-10358	90	4	and	and	CCONJ
app01-10358	90	5	discussion	discussion	NOUN
app01-10358	90	6	3.1	3.1	NUM
app01-10358	90	7	.	.	PUNCT
app01-10358	91	1	depth	depth	NOUN
app01-10358	91	2	profiles	profile	NOUN
app01-10358	91	3	by	by	ADP
app01-10358	91	4	different	different	ADJ
app01-10358	91	5	methods	method	NOUN
app01-10358	91	6	to	to	PART
app01-10358	91	7	compare	compare	VERB
app01-10358	91	8	the	the	DET
app01-10358	91	9	depth	depth	NOUN
app01-10358	91	10	profiles	profile	NOUN
app01-10358	91	11	generated	generate	VERB
app01-10358	91	12	using	use	VERB
app01-10358	91	13	four	four	NUM
app01-10358	91	14	different	different	ADJ
app01-10358	91	15	methods	method	NOUN
app01-10358	91	16	,	,	PUNCT
app01-10358	91	17	only	only	ADV
app01-10358	91	18	one	one	NUM
app01-10358	91	19	tizrhfvnbta	tizrhfvnbta	NOUN
app01-10358	91	20	-	-	PUNCT
app01-10358	91	21	xn	xn	NOUN
app01-10358	91	22	coating	coating	NOUN
app01-10358	91	23	(	(	PUNCT
app01-10358	91	24	x	x	SYM
app01-10358	91	25	=	=	SYM
app01-10358	91	26	6	6	NUM
app01-10358	91	27	sccm	sccm	NOUN
app01-10358	91	28	n2	n2	PROPN
app01-10358	91	29	)	)	PUNCT
app01-10358	91	30	with	with	SCONJ
app01-10358	91	31	stoichiometric	stoichiometric	NOUN
app01-10358	91	32	(	(	PUNCT
app01-10358	91	33	y	y	NOUN
app01-10358	91	34	=	=	SYM
app01-10358	91	35	1	1	NUM
app01-10358	91	36	)	)	PUNCT
app01-10358	91	37	composition	composition	NOUN
app01-10358	91	38	and	and	CCONJ
app01-10358	91	39	thickness	thickness	NOUN
app01-10358	91	40	of	of	ADP
app01-10358	91	41	1700	1700	NUM
app01-10358	91	42	nm	nm	NOUN
app01-10358	91	43	on	on	ADP
app01-10358	91	44	the	the	DET
app01-10358	91	45	silicon	silicon	NOUN
app01-10358	91	46	wafer	wafer	NOUN
app01-10358	91	47	was	be	AUX
app01-10358	91	48	used	use	VERB
app01-10358	91	49	.	.	PUNCT
app01-10358	92	1	figure	figure	NOUN
app01-10358	92	2	1a	1a	PROPN
app01-10358	92	3	shows	show	VERB
app01-10358	92	4	the	the	DET
app01-10358	92	5	depth	depth	NOUN
app01-10358	92	6	profile	profile	NOUN
app01-10358	92	7	of	of	ADP
app01-10358	92	8	the	the	DET
app01-10358	92	9	indentation	indentation	NOUN
app01-10358	92	10	modulus	modulus	NOUN
app01-10358	92	11	obtained	obtain	VERB
app01-10358	92	12	using	use	VERB
app01-10358	92	13	simple	simple	ADJ
app01-10358	92	14	loading	loading	NOUN
app01-10358	92	15	/	/	SYM
app01-10358	92	16	unloading	unloading	NOUN
app01-10358	92	17	tests	test	NOUN
app01-10358	92	18	.	.	PUNCT
app01-10358	93	1	each	each	DET
app01-10358	93	2	value	value	NOUN
app01-10358	93	3	calculated	calculate	VERB
app01-10358	93	4	using	use	VERB
app01-10358	93	5	oliver&pharr	oliver&pharr	NOUN
app01-10358	93	6	(	(	PUNCT
app01-10358	93	7	o&p	o&p	ADJ
app01-10358	93	8	)	)	PUNCT
app01-10358	93	9	method	method	NOUN
app01-10358	93	10	corresponds	correspond	VERB
app01-10358	93	11	to	to	ADP
app01-10358	93	12	the	the	DET
app01-10358	93	13	average	average	NOUN
app01-10358	93	14	from	from	ADP
app01-10358	93	15	10	10	NUM
app01-10358	93	16	indents	indent	NOUN
app01-10358	93	17	and	and	CCONJ
app01-10358	93	18	9	9	NUM
app01-10358	93	19	different	different	ADJ
app01-10358	93	20	depths	depth	NOUN
app01-10358	93	21	were	be	AUX
app01-10358	93	22	employed	employ	VERB
app01-10358	93	23	to	to	PART
app01-10358	93	24	obtain	obtain	VERB
app01-10358	93	25	the	the	DET
app01-10358	93	26	profile	profile	NOUN
app01-10358	93	27	.	.	PUNCT
app01-10358	94	1	the	the	DET
app01-10358	94	2	data	datum	NOUN
app01-10358	94	3	were	be	AUX
app01-10358	94	4	valid	valid	ADJ
app01-10358	94	5	in	in	ADP
app01-10358	94	6	the	the	DET
app01-10358	94	7	range	range	NOUN
app01-10358	94	8	above	above	ADP
app01-10358	94	9	80	80	NUM
app01-10358	94	10	nm	nm	NOUN
app01-10358	94	11	.	.	PUNCT
app01-10358	95	1	the	the	DET
app01-10358	95	2	extrapolation	extrapolation	NOUN
app01-10358	95	3	procedure	procedure	NOUN
app01-10358	95	4	from	from	ADP
app01-10358	95	5	the	the	DET
app01-10358	95	6	plateau	plateau	NOUN
app01-10358	95	7	-	-	PUNCT
app01-10358	95	8	like	like	ADJ
app01-10358	95	9	region	region	NOUN
app01-10358	95	10	from	from	ADP
app01-10358	95	11	80	80	NUM
app01-10358	95	12	nm	nm	NOUN
app01-10358	95	13	up	up	ADP
app01-10358	95	14	to	to	ADP
app01-10358	95	15	200	200	NUM
app01-10358	95	16	nm	nm	NOUN
app01-10358	95	17	resulted	result	VERB
app01-10358	95	18	in	in	ADP
app01-10358	95	19	the	the	DET
app01-10358	95	20	indentation	indentation	NOUN
app01-10358	95	21	modulus	modulus	NOUN
app01-10358	95	22	,	,	PUNCT
app01-10358	95	23	eit	eit	NOUN
app01-10358	95	24	=	=	NOUN
app01-10358	95	25	295	295	NUM
app01-10358	95	26	±	±	NOUN
app01-10358	95	27	35gpa	35gpa	NOUN
app01-10358	95	28	whereas	whereas	SCONJ
app01-10358	95	29	the	the	DET
app01-10358	95	30	“	"	PUNCT
app01-10358	95	31	10	10	NUM
app01-10358	95	32	%	%	NOUN
app01-10358	95	33	rule	rule	NOUN
app01-10358	95	34	”	"	PUNCT
app01-10358	95	35	approach	approach	NOUN
app01-10358	95	36	gave	give	VERB
app01-10358	95	37	around	around	ADP
app01-10358	95	38	284gpa	284gpa	NUM
app01-10358	95	39	.	.	PUNCT
app01-10358	96	1	the	the	DET
app01-10358	96	2	hardness	hardness	ADJ
app01-10358	96	3	values	value	NOUN
app01-10358	96	4	,	,	PUNCT
app01-10358	96	5	hit	hit	VERB
app01-10358	96	6	=	=	SYM
app01-10358	96	7	29.5	29.5	NUM
app01-10358	96	8	±	±	NUM
app01-10358	96	9	2gpa	2gpa	NOUN
app01-10358	96	10	were	be	AUX
app01-10358	96	11	identical	identical	ADJ
app01-10358	96	12	in	in	ADP
app01-10358	96	13	both	both	DET
app01-10358	96	14	cases	case	NOUN
app01-10358	96	15	.	.	PUNCT
app01-10358	97	1	(	(	PUNCT
app01-10358	97	2	a	a	NOUN
app01-10358	97	3	)	)	PUNCT
app01-10358	97	4	.	.	PUNCT
app01-10358	98	1	(	(	PUNCT
app01-10358	98	2	b	b	NOUN
app01-10358	98	3	)	)	PUNCT
app01-10358	98	4	.	.	PUNCT
app01-10358	99	1	figure	figure	NOUN
app01-10358	99	2	1	1	NUM
app01-10358	99	3	.	.	PUNCT
app01-10358	100	1	indentation	indentation	NOUN
app01-10358	100	2	modulus	modulus	NOUN
app01-10358	100	3	depth	depth	NOUN
app01-10358	100	4	profiles	profile	NOUN
app01-10358	100	5	obtained	obtain	VERB
app01-10358	100	6	on	on	ADP
app01-10358	100	7	tizrhfvnbta	tizrhfvnbta	NOUN
app01-10358	100	8	-	-	PUNCT
app01-10358	100	9	xn	xn	NUM
app01-10358	100	10	coating	coating	NOUN
app01-10358	100	11	(	(	PUNCT
app01-10358	100	12	x	x	SYM
app01-10358	100	13	=	=	SYM
app01-10358	100	14	6	6	NUM
app01-10358	100	15	sccm	sccm	NOUN
app01-10358	100	16	n2	n2	NOUN
app01-10358	100	17	)	)	PUNCT
app01-10358	100	18	on	on	ADP
app01-10358	100	19	(	(	PUNCT
app01-10358	100	20	111	111	NUM
app01-10358	100	21	)	)	PUNCT
app01-10358	100	22	silicon	silicon	NOUN
app01-10358	100	23	substrate	substrate	NOUN
app01-10358	100	24	using	use	VERB
app01-10358	100	25	(	(	PUNCT
app01-10358	100	26	a	a	NOUN
app01-10358	100	27	)	)	PUNCT
app01-10358	100	28	–	–	PUNCT
app01-10358	100	29	90	90	NUM
app01-10358	100	30	simple	simple	ADJ
app01-10358	100	31	loading	loading	NOUN
app01-10358	100	32	/	/	SYM
app01-10358	100	33	unloading	unloading	NOUN
app01-10358	100	34	tests	test	NOUN
app01-10358	100	35	;	;	PUNCT
app01-10358	100	36	(	(	PUNCT
app01-10358	100	37	b	b	X
app01-10358	100	38	)	)	PUNCT
app01-10358	100	39	–	–	PUNCT
app01-10358	100	40	30	30	NUM
app01-10358	100	41	tests	test	NOUN
app01-10358	100	42	with	with	ADP
app01-10358	100	43	6	6	NUM
app01-10358	100	44	partial	partial	ADJ
app01-10358	100	45	unloadings	unloading	NOUN
app01-10358	100	46	in	in	ADP
app01-10358	100	47	each	each	DET
app01-10358	100	48	test	test	NOUN
app01-10358	100	49	.	.	PUNCT
app01-10358	101	1	the	the	DET
app01-10358	101	2	zone	zone	NOUN
app01-10358	101	3	below	below	ADP
app01-10358	101	4	80	80	NUM
app01-10358	101	5	nm	nm	NOUN
app01-10358	101	6	should	should	AUX
app01-10358	101	7	not	not	PART
app01-10358	101	8	be	be	AUX
app01-10358	101	9	considered	consider	VERB
app01-10358	101	10	due	due	ADJ
app01-10358	101	11	to	to	ADP
app01-10358	101	12	indenter	indenter	PROPN
app01-10358	101	13	tip	tip	PROPN
app01-10358	101	14	surface	surface	PROPN
app01-10358	101	15	area	area	PROPN
app01-10358	101	16	calibration	calibration	NOUN
app01-10358	101	17	effects	effect	NOUN
app01-10358	101	18	.	.	PUNCT
app01-10358	102	1	38	38	NUM
app01-10358	102	2	vol	vol	NOUN
app01-10358	102	3	.	.	PUNCT
app01-10358	103	1	50/2024	50/2024	NUM
app01-10358	103	2	substrate	substrate	NOUN
app01-10358	103	3	effect	effect	NOUN
app01-10358	103	4	in	in	ADP
app01-10358	103	5	the	the	DET
app01-10358	103	6	evaluation	evaluation	NOUN
app01-10358	103	7	of	of	ADP
app01-10358	103	8	elastic	elastic	ADJ
app01-10358	103	9	modulus	modulus	NOUN
app01-10358	103	10	.	.	PUNCT
app01-10358	103	11	.	.	PUNCT
app01-10358	103	12	.	.	PUNCT
app01-10358	104	1	method	method	VERB
app01-10358	104	2	eit	eit	PROPN
app01-10358	105	1	[	[	X
app01-10358	105	2	gpa	gpa	X
app01-10358	105	3	]	]	X
app01-10358	105	4	eit	eit	NOUN
app01-10358	106	1	[	[	X
app01-10358	106	2	gpa	gpa	PROPN
app01-10358	106	3	]	]	X
app01-10358	106	4	hit	hit	NOUN
app01-10358	106	5	[	[	X
app01-10358	106	6	gpa	gpa	PROPN
app01-10358	106	7	]	]	X
app01-10358	106	8	hit	hit	NOUN
app01-10358	106	9	[	[	X
app01-10358	106	10	gpa	gpa	PROPN
app01-10358	106	11	]	]	SYM
app01-10358	106	12	iso	iso	NOUN
app01-10358	106	13	10	10	NUM
app01-10358	106	14	%	%	NOUN
app01-10358	106	15	rule	rule	NOUN
app01-10358	106	16	iso	iso	NOUN
app01-10358	106	17	10	10	NUM
app01-10358	106	18	%	%	NOUN
app01-10358	106	19	rule	rule	NOUN
app01-10358	106	20	loading	loading	NOUN
app01-10358	106	21	/	/	SYM
app01-10358	106	22	unloading	unload	VERB
app01-10358	106	23	295	295	NUM
app01-10358	106	24	±	±	NUM
app01-10358	106	25	35	35	NUM
app01-10358	106	26	∼285	∼285	NUM
app01-10358	106	27	29.5	29.5	NUM
app01-10358	106	28	±	±	NUM
app01-10358	106	29	2.0	2.0	NUM
app01-10358	106	30	29.5	29.5	NUM
app01-10358	106	31	cmc	cmc	NOUN
app01-10358	106	32	∼300	∼300	NUM
app01-10358	106	33	(	(	PUNCT
app01-10358	106	34	∼300	∼300	PUNCT
app01-10358	106	35	)	)	PUNCT
app01-10358	106	36	∼28	∼28	PROPN
app01-10358	106	37	∼28	∼28	NOUN
app01-10358	106	38	csm	csm	VERB
app01-10358	106	39	290	290	NUM
app01-10358	106	40	±	±	NUM
app01-10358	106	41	15	15	NUM
app01-10358	106	42	∼270–275	∼270–275	PROPN
app01-10358	106	43	27.2	27.2	NUM
app01-10358	106	44	±	±	NUM
app01-10358	106	45	2.6	2.6	NUM
app01-10358	106	46	27.2	27.2	NUM
app01-10358	106	47	csm+h&c	csm+h&c	PROPN
app01-10358	106	48	(	(	PUNCT
app01-10358	106	49	csmtf	csmtf	NOUN
app01-10358	106	50	)	)	PUNCT
app01-10358	106	51	275	275	NUM
app01-10358	106	52	±	±	NUM
app01-10358	106	53	15	15	NUM
app01-10358	106	54	∼250	∼250	NOUN
app01-10358	106	55	28.2	28.2	NUM
app01-10358	106	56	±	±	NUM
app01-10358	106	57	2.7	2.7	NUM
app01-10358	106	58	28.2	28.2	NUM
app01-10358	106	59	table	table	NOUN
app01-10358	106	60	3	3	NUM
app01-10358	106	61	.	.	PUNCT
app01-10358	107	1	summary	summary	NOUN
app01-10358	107	2	of	of	ADP
app01-10358	107	3	the	the	DET
app01-10358	107	4	indentation	indentation	NOUN
app01-10358	107	5	modulus	modulus	NOUN
app01-10358	107	6	and	and	CCONJ
app01-10358	107	7	hardness	hardness	NOUN
app01-10358	107	8	values	value	NOUN
app01-10358	107	9	calculated	calculate	VERB
app01-10358	107	10	using	use	VERB
app01-10358	107	11	iso	iso	NOUN
app01-10358	107	12	and	and	CCONJ
app01-10358	107	13	the	the	DET
app01-10358	107	14	“	"	PUNCT
app01-10358	107	15	10	10	NUM
app01-10358	107	16	%	%	NOUN
app01-10358	107	17	rule	rule	NOUN
app01-10358	107	18	”	"	PUNCT
app01-10358	107	19	procedures	procedure	NOUN
app01-10358	107	20	from	from	ADP
app01-10358	107	21	the	the	DET
app01-10358	107	22	depth	depth	NOUN
app01-10358	107	23	profiles	profile	NOUN
app01-10358	107	24	by	by	ADP
app01-10358	107	25	four	four	NUM
app01-10358	107	26	different	different	ADJ
app01-10358	107	27	methods	method	NOUN
app01-10358	107	28	on	on	ADP
app01-10358	107	29	1700	1700	NUM
app01-10358	107	30	nm	nm	PRON
app01-10358	107	31	thick	thick	ADJ
app01-10358	107	32	tizrhfvnbta	tizrhfvnbta	NOUN
app01-10358	107	33	-	-	PUNCT
app01-10358	107	34	xn	xn	NOUN
app01-10358	107	35	coating	coating	NOUN
app01-10358	107	36	(	(	PUNCT
app01-10358	107	37	x	x	SYM
app01-10358	107	38	=	=	SYM
app01-10358	107	39	6	6	NUM
app01-10358	107	40	sccm	sccm	NOUN
app01-10358	107	41	n2	n2	NOUN
app01-10358	107	42	)	)	PUNCT
app01-10358	107	43	deposited	deposit	VERB
app01-10358	107	44	on	on	ADP
app01-10358	107	45	(	(	PUNCT
app01-10358	107	46	111	111	NUM
app01-10358	107	47	)	)	PUNCT
app01-10358	107	48	silicon	silicon	NOUN
app01-10358	107	49	substrate	substrate	NOUN
app01-10358	107	50	by	by	ADP
app01-10358	107	51	reactive	reactive	ADJ
app01-10358	107	52	hitus	hitus	NOUN
app01-10358	107	53	.	.	PUNCT
app01-10358	108	1	in	in	ADP
app01-10358	108	2	the	the	DET
app01-10358	108	3	case	case	NOUN
app01-10358	108	4	of	of	ADP
app01-10358	108	5	cmc	cmc	NOUN
app01-10358	108	6	tests	test	NOUN
app01-10358	108	7	(	(	PUNCT
app01-10358	108	8	figure	figure	NOUN
app01-10358	108	9	1b	1b	NUM
app01-10358	108	10	)	)	PUNCT
app01-10358	108	11	,	,	PUNCT
app01-10358	108	12	10	10	NUM
app01-10358	108	13	indents	indent	NOUN
app01-10358	108	14	up	up	ADP
app01-10358	108	15	to	to	ADP
app01-10358	108	16	100mn	100mn	NOUN
app01-10358	108	17	,	,	PUNCT
app01-10358	108	18	200mn	200mn	ADJ
app01-10358	108	19	and	and	CCONJ
app01-10358	108	20	250mn	250mn	PROPN
app01-10358	108	21	loads	load	VERB
app01-10358	108	22	with	with	ADP
app01-10358	108	23	6	6	NUM
app01-10358	108	24	partial	partial	ADJ
app01-10358	108	25	unloading	unloading	NOUN
app01-10358	108	26	in	in	ADP
app01-10358	108	27	each	each	DET
app01-10358	108	28	test	test	NOUN
app01-10358	108	29	were	be	AUX
app01-10358	108	30	performed	perform	VERB
app01-10358	108	31	.	.	PUNCT
app01-10358	109	1	each	each	DET
app01-10358	109	2	unloading	unloading	NOUN
app01-10358	109	3	was	be	AUX
app01-10358	109	4	evaluated	evaluate	VERB
app01-10358	109	5	according	accord	VERB
app01-10358	109	6	to	to	ADP
app01-10358	109	7	o&p	o&p	ADJ
app01-10358	109	8	method	method	NOUN
app01-10358	109	9	but	but	CCONJ
app01-10358	109	10	the	the	DET
app01-10358	109	11	averaging	averaging	NOUN
app01-10358	109	12	was	be	AUX
app01-10358	109	13	not	not	PART
app01-10358	109	14	performed	perform	VERB
app01-10358	109	15	due	due	ADP
app01-10358	109	16	to	to	ADP
app01-10358	109	17	variations	variation	NOUN
app01-10358	109	18	in	in	ADP
app01-10358	109	19	the	the	DET
app01-10358	109	20	depths	depth	NOUN
app01-10358	109	21	during	during	ADP
app01-10358	109	22	unloadings	unloading	NOUN
app01-10358	109	23	within	within	ADP
app01-10358	109	24	each	each	DET
app01-10358	109	25	test	test	NOUN
app01-10358	109	26	.	.	PUNCT
app01-10358	110	1	it	it	PRON
app01-10358	110	2	resulted	result	VERB
app01-10358	110	3	in	in	ADP
app01-10358	110	4	relatively	relatively	ADV
app01-10358	110	5	large	large	ADJ
app01-10358	110	6	scatter	scatter	NOUN
app01-10358	110	7	of	of	ADP
app01-10358	110	8	the	the	DET
app01-10358	110	9	data	datum	NOUN
app01-10358	110	10	and	and	CCONJ
app01-10358	110	11	only	only	ADV
app01-10358	110	12	rough	rough	ADJ
app01-10358	110	13	estimate	estimate	NOUN
app01-10358	110	14	of	of	ADP
app01-10358	110	15	the	the	DET
app01-10358	110	16	coating	coating	NOUN
app01-10358	110	17	properties	property	NOUN
app01-10358	110	18	.	.	PUNCT
app01-10358	111	1	the	the	DET
app01-10358	111	2	approximate	approximate	ADJ
app01-10358	111	3	indentation	indentation	NOUN
app01-10358	111	4	modulus	modulus	NOUN
app01-10358	111	5	was	be	AUX
app01-10358	111	6	around	around	ADV
app01-10358	111	7	300gpa	300gpa	NUM
app01-10358	111	8	and	and	CCONJ
app01-10358	111	9	hardness	hardness	NOUN
app01-10358	111	10	was	be	AUX
app01-10358	111	11	28gpa	28gpa	NOUN
app01-10358	111	12	.	.	PUNCT
app01-10358	112	1	possible	possible	ADJ
app01-10358	112	2	differences	difference	NOUN
app01-10358	112	3	between	between	ADP
app01-10358	112	4	extrapolation	extrapolation	NOUN
app01-10358	112	5	according	accord	VERB
app01-10358	112	6	to	to	ADP
app01-10358	112	7	iso	iso	PROPN
app01-10358	112	8	standard	standard	NOUN
app01-10358	112	9	and	and	CCONJ
app01-10358	112	10	the	the	DET
app01-10358	112	11	“	"	PUNCT
app01-10358	112	12	10	10	NUM
app01-10358	112	13	%	%	NOUN
app01-10358	112	14	rule	rule	NOUN
app01-10358	112	15	”	"	PUNCT
app01-10358	112	16	were	be	AUX
app01-10358	112	17	not	not	PART
app01-10358	112	18	observed	observe	VERB
app01-10358	112	19	due	due	ADJ
app01-10358	112	20	to	to	ADP
app01-10358	112	21	excessive	excessive	ADJ
app01-10358	112	22	scatter	scatter	NOUN
app01-10358	112	23	of	of	ADP
app01-10358	112	24	the	the	DET
app01-10358	112	25	data	datum	NOUN
app01-10358	112	26	.	.	PUNCT
app01-10358	113	1	in	in	ADP
app01-10358	113	2	the	the	DET
app01-10358	113	3	case	case	NOUN
app01-10358	113	4	of	of	ADP
app01-10358	113	5	csm	csm	PROPN
app01-10358	113	6	tests	test	NOUN
app01-10358	113	7	(	(	PUNCT
app01-10358	113	8	figure	figure	NOUN
app01-10358	113	9	2a	2a	NUM
app01-10358	113	10	)	)	PUNCT
app01-10358	113	11	,	,	PUNCT
app01-10358	113	12	the	the	DET
app01-10358	113	13	average	average	ADJ
app01-10358	113	14	depth	depth	NOUN
app01-10358	113	15	profile	profile	NOUN
app01-10358	113	16	curve	curve	NOUN
app01-10358	113	17	was	be	AUX
app01-10358	113	18	smooth	smooth	ADJ
app01-10358	113	19	and	and	CCONJ
app01-10358	113	20	large	large	ADJ
app01-10358	113	21	scatter	scatter	NOUN
app01-10358	113	22	was	be	AUX
app01-10358	113	23	present	present	ADJ
app01-10358	113	24	only	only	ADV
app01-10358	113	25	below	below	ADP
app01-10358	113	26	100	100	NUM
app01-10358	113	27	nm	nm	NOUN
app01-10358	113	28	depths	depth	NOUN
app01-10358	113	29	.	.	PUNCT
app01-10358	114	1	the	the	DET
app01-10358	114	2	maximum	maximum	NOUN
app01-10358	114	3	at	at	ADP
app01-10358	114	4	100	100	NUM
app01-10358	114	5	nm	nm	NOUN
app01-10358	114	6	was	be	AUX
app01-10358	114	7	followed	follow	VERB
app01-10358	114	8	by	by	ADP
app01-10358	114	9	a	a	DET
app01-10358	114	10	smooth	smooth	ADJ
app01-10358	114	11	decrease	decrease	NOUN
app01-10358	114	12	without	without	ADP
app01-10358	114	13	a	a	DET
app01-10358	114	14	clear	clear	ADJ
app01-10358	114	15	plateau	plateau	NOUN
app01-10358	114	16	.	.	PUNCT
app01-10358	115	1	the	the	DET
app01-10358	115	2	calculation	calculation	NOUN
app01-10358	115	3	of	of	ADP
app01-10358	115	4	the	the	DET
app01-10358	115	5	corresponding	corresponding	ADJ
app01-10358	115	6	eit	eit	PROPN
app01-10358	115	7	depends	depend	VERB
app01-10358	115	8	on	on	ADP
app01-10358	115	9	subjectively	subjectively	ADV
app01-10358	115	10	selected	select	VERB
app01-10358	115	11	depth	depth	NOUN
app01-10358	115	12	range	range	NOUN
app01-10358	115	13	limits	limit	NOUN
app01-10358	115	14	.	.	PUNCT
app01-10358	116	1	in	in	ADP
app01-10358	116	2	the	the	DET
app01-10358	116	3	range	range	NOUN
app01-10358	116	4	from	from	ADP
app01-10358	116	5	100	100	NUM
app01-10358	116	6	nm	nm	NOUN
app01-10358	116	7	to	to	ADP
app01-10358	116	8	150	150	NUM
app01-10358	116	9	nm	nm	NOUN
app01-10358	116	10	,	,	PUNCT
app01-10358	116	11	eit	eit	NOUN
app01-10358	116	12	=	=	NOUN
app01-10358	116	13	290	290	NUM
app01-10358	116	14	±	±	NUM
app01-10358	116	15	15gpa	15gpa	NOUN
app01-10358	116	16	whereas	whereas	SCONJ
app01-10358	116	17	only	only	ADV
app01-10358	116	18	around	around	ADP
app01-10358	116	19	275gpa	275gpa	NUM
app01-10358	116	20	were	be	AUX
app01-10358	116	21	obtained	obtain	VERB
app01-10358	116	22	using	use	VERB
app01-10358	116	23	the	the	DET
app01-10358	116	24	“	"	PUNCT
app01-10358	116	25	10	10	NUM
app01-10358	116	26	%	%	NOUN
app01-10358	116	27	rule	rule	NOUN
app01-10358	116	28	”	"	PUNCT
app01-10358	116	29	approach	approach	NOUN
app01-10358	116	30	.	.	PUNCT
app01-10358	117	1	the	the	DET
app01-10358	117	2	hardness	hardness	PROPN
app01-10358	117	3	profile	profile	NOUN
app01-10358	117	4	exhibited	exhibit	VERB
app01-10358	117	5	a	a	DET
app01-10358	117	6	well	well	ADV
app01-10358	117	7	-	-	PUNCT
app01-10358	117	8	defined	define	VERB
app01-10358	117	9	plateau	plateau	NOUN
app01-10358	117	10	up	up	ADP
app01-10358	117	11	to	to	ADP
app01-10358	117	12	250	250	NUM
app01-10358	117	13	nm	nm	ADJ
app01-10358	117	14	depth	depth	NOUN
app01-10358	117	15	.	.	PUNCT
app01-10358	118	1	therefore	therefore	ADV
app01-10358	118	2	,	,	PUNCT
app01-10358	118	3	the	the	DET
app01-10358	118	4	same	same	ADJ
app01-10358	118	5	values	value	NOUN
app01-10358	118	6	of	of	ADP
app01-10358	118	7	hit	hit	NOUN
app01-10358	118	8	of	of	ADP
app01-10358	118	9	27.2	27.2	NUM
app01-10358	118	10	±	±	NUM
app01-10358	118	11	2.6gpa	2.6gpa	NUM
app01-10358	118	12	were	be	AUX
app01-10358	118	13	obtained	obtain	VERB
app01-10358	118	14	when	when	SCONJ
app01-10358	118	15	applying	apply	VERB
app01-10358	118	16	iso	iso	NOUN
app01-10358	118	17	and	and	CCONJ
app01-10358	118	18	the	the	DET
app01-10358	118	19	“	"	PUNCT
app01-10358	118	20	10	10	NUM
app01-10358	118	21	%	%	NOUN
app01-10358	118	22	rule	rule	NOUN
app01-10358	118	23	”	"	PUNCT
app01-10358	118	24	procedure	procedure	NOUN
app01-10358	118	25	.	.	PUNCT
app01-10358	119	1	figure	figure	NOUN
app01-10358	119	2	2b	2b	PROPN
app01-10358	119	3	illustrates	illustrate	VERB
app01-10358	119	4	the	the	DET
app01-10358	119	5	effect	effect	NOUN
app01-10358	119	6	of	of	ADP
app01-10358	119	7	the	the	DET
app01-10358	119	8	correction	correction	NOUN
app01-10358	119	9	on	on	ADP
app01-10358	119	10	substrate	substrate	NOUN
app01-10358	119	11	modulus	modulus	NOUN
app01-10358	119	12	and	and	CCONJ
app01-10358	119	13	coating	coat	VERB
app01-10358	119	14	thickness	thickness	NOUN
app01-10358	119	15	included	include	VERB
app01-10358	119	16	in	in	ADP
app01-10358	119	17	h&c	h&c	PROPN
app01-10358	119	18	correction	correction	NOUN
app01-10358	119	19	(	(	PUNCT
app01-10358	119	20	csmtf	csmtf	NOUN
app01-10358	119	21	)	)	PUNCT
app01-10358	119	22	on	on	ADP
app01-10358	119	23	the	the	DET
app01-10358	119	24	modulus	modulus	ADJ
app01-10358	119	25	depth	depth	NOUN
app01-10358	119	26	profile	profile	NOUN
app01-10358	119	27	compared	compare	VERB
app01-10358	119	28	to	to	ADP
app01-10358	119	29	the	the	DET
app01-10358	119	30	standard	standard	NOUN
app01-10358	119	31	csm	csm	NOUN
app01-10358	119	32	profile	profile	ADV
app01-10358	119	33	.	.	PUNCT
app01-10358	120	1	the	the	DET
app01-10358	120	2	differences	difference	NOUN
app01-10358	120	3	are	be	AUX
app01-10358	120	4	visible	visible	ADJ
app01-10358	120	5	already	already	ADV
app01-10358	120	6	in	in	ADP
app01-10358	120	7	the	the	DET
app01-10358	120	8	100–150	100–150	NUM
app01-10358	120	9	nm	nm	NOUN
app01-10358	120	10	(	(	PUNCT
app01-10358	120	11	“	"	PUNCT
app01-10358	120	12	plateau	plateau	NOUN
app01-10358	120	13	”	"	PUNCT
app01-10358	120	14	)	)	PUNCT
app01-10358	120	15	depth	depth	NOUN
app01-10358	120	16	region	region	NOUN
app01-10358	120	17	and	and	CCONJ
app01-10358	120	18	increase	increase	VERB
app01-10358	120	19	with	with	ADP
app01-10358	120	20	the	the	DET
app01-10358	120	21	increase	increase	NOUN
app01-10358	120	22	of	of	ADP
app01-10358	120	23	penetration	penetration	NOUN
app01-10358	120	24	depth	depth	NOUN
app01-10358	120	25	.	.	PUNCT
app01-10358	121	1	subsequently	subsequently	ADV
app01-10358	121	2	,	,	PUNCT
app01-10358	121	3	different	different	ADJ
app01-10358	121	4	indentation	indentation	NOUN
app01-10358	121	5	moduli	modulus	NOUN
app01-10358	121	6	(	(	PUNCT
app01-10358	121	7	full	full	ADJ
app01-10358	121	8	arrows	arrow	NOUN
app01-10358	121	9	)	)	PUNCT
app01-10358	121	10	were	be	AUX
app01-10358	121	11	obtained	obtain	VERB
app01-10358	121	12	from	from	ADP
app01-10358	121	13	these	these	DET
app01-10358	121	14	regions	region	NOUN
app01-10358	121	15	in	in	ADP
app01-10358	121	16	csm	csm	NOUN
app01-10358	121	17	(	(	PUNCT
app01-10358	121	18	∼275gpa	∼275gpa	PROPN
app01-10358	121	19	)	)	PUNCT
app01-10358	121	20	and	and	CCONJ
app01-10358	121	21	csmtf	csmtf	NOUN
app01-10358	121	22	(	(	PUNCT
app01-10358	121	23	∼263gpa	∼263gpa	NOUN
app01-10358	121	24	)	)	PUNCT
app01-10358	121	25	.	.	PUNCT
app01-10358	122	1	the	the	DET
app01-10358	122	2	average	average	ADJ
app01-10358	122	3	values	value	NOUN
app01-10358	122	4	from	from	ADP
app01-10358	122	5	9	9	NUM
app01-10358	122	6	indents	indent	NOUN
app01-10358	122	7	(	(	PUNCT
app01-10358	122	8	after	after	ADP
app01-10358	122	9	removal	removal	NOUN
app01-10358	122	10	of	of	ADP
app01-10358	122	11	the	the	DET
app01-10358	122	12	outcasts	outcast	NOUN
app01-10358	122	13	)	)	PUNCT
app01-10358	122	14	based	base	VERB
app01-10358	122	15	on	on	ADP
app01-10358	122	16	iso	iso	NOUN
app01-10358	122	17	procedure	procedure	NOUN
app01-10358	122	18	resulted	result	VERB
app01-10358	122	19	in	in	ADP
app01-10358	122	20	the	the	DET
app01-10358	122	21	average	average	ADJ
app01-10358	122	22	eit	eit	NOUN
app01-10358	122	23	=	=	SYM
app01-10358	122	24	275	275	NUM
app01-10358	122	25	±	±	NUM
app01-10358	122	26	15gpa	15gpa	NOUN
app01-10358	122	27	.	.	PUNCT
app01-10358	123	1	at	at	ADP
app01-10358	123	2	10	10	NUM
app01-10358	123	3	%	%	NOUN
app01-10358	123	4	relative	relative	ADJ
app01-10358	123	5	depth	depth	NOUN
app01-10358	123	6	,	,	PUNCT
app01-10358	123	7	the	the	DET
app01-10358	123	8	values	value	NOUN
app01-10358	123	9	were	be	AUX
app01-10358	123	10	∼270gpa	∼270gpa	NOUN
app01-10358	123	11	and	and	CCONJ
app01-10358	123	12	∼250gpa	∼250gpa	NOUN
app01-10358	123	13	,	,	PUNCT
app01-10358	123	14	respectively	respectively	ADV
app01-10358	123	15	.	.	PUNCT
app01-10358	124	1	the	the	DET
app01-10358	124	2	hardness	hardness	NOUN
app01-10358	124	3	profile	profile	NOUN
app01-10358	124	4	is	be	AUX
app01-10358	124	5	not	not	PART
app01-10358	124	6	affected	affect	VERB
app01-10358	124	7	by	by	ADP
app01-10358	124	8	the	the	DET
app01-10358	124	9	correction	correction	NOUN
app01-10358	124	10	and	and	CCONJ
app01-10358	124	11	it	it	PRON
app01-10358	124	12	was	be	AUX
app01-10358	124	13	hit	hit	VERB
app01-10358	124	14	=	=	PUNCT
app01-10358	124	15	28.2	28.2	NUM
app01-10358	124	16	±	±	NUM
app01-10358	124	17	2.7gpa	2.7gpa	NOUN
app01-10358	124	18	.	.	PUNCT
app01-10358	125	1	table	table	NOUN
app01-10358	125	2	3	3	NUM
app01-10358	125	3	compares	compare	VERB
app01-10358	125	4	the	the	DET
app01-10358	125	5	results	result	NOUN
app01-10358	125	6	of	of	ADP
app01-10358	125	7	nanoindentation	nanoindentation	NOUN
app01-10358	125	8	tests	test	NOUN
app01-10358	125	9	using	use	VERB
app01-10358	125	10	four	four	NUM
app01-10358	125	11	different	different	ADJ
app01-10358	125	12	methods	method	NOUN
app01-10358	125	13	for	for	ADP
app01-10358	125	14	depth	depth	NOUN
app01-10358	125	15	profiles	profile	NOUN
app01-10358	125	16	and	and	CCONJ
app01-10358	125	17	evaluated	evaluate	VERB
app01-10358	125	18	using	use	VERB
app01-10358	125	19	iso	iso	NOUN
app01-10358	125	20	and	and	CCONJ
app01-10358	125	21	the	the	DET
app01-10358	125	22	“	"	PUNCT
app01-10358	125	23	10	10	NUM
app01-10358	125	24	%	%	NOUN
app01-10358	125	25	rule	rule	NOUN
app01-10358	125	26	”	"	PUNCT
app01-10358	125	27	procedure	procedure	NOUN
app01-10358	125	28	.	.	PUNCT
app01-10358	126	1	it	it	PRON
app01-10358	126	2	should	should	AUX
app01-10358	126	3	be	be	AUX
app01-10358	126	4	emphasized	emphasize	VERB
app01-10358	126	5	that	that	SCONJ
app01-10358	126	6	the	the	DET
app01-10358	126	7	results	result	NOUN
app01-10358	126	8	were	be	AUX
app01-10358	126	9	obtained	obtain	VERB
app01-10358	126	10	on	on	ADP
app01-10358	126	11	the	the	DET
app01-10358	126	12	same	same	ADJ
app01-10358	126	13	and	and	CCONJ
app01-10358	126	14	relatively	relatively	ADV
app01-10358	126	15	thick	thick	ADJ
app01-10358	126	16	(	(	PUNCT
app01-10358	126	17	1700	1700	NUM
app01-10358	126	18	nm	nm	NOUN
app01-10358	126	19	)	)	PUNCT
app01-10358	126	20	coating	coat	VERB
app01-10358	126	21	on	on	ADP
app01-10358	126	22	silicon	silicon	NOUN
app01-10358	126	23	substrate	substrate	NOUN
app01-10358	126	24	,	,	PUNCT
app01-10358	126	25	which	which	PRON
app01-10358	126	26	eliminated	eliminate	VERB
app01-10358	126	27	possible	possible	ADJ
app01-10358	126	28	effects	effect	NOUN
app01-10358	126	29	of	of	ADP
app01-10358	126	30	variations	variation	NOUN
app01-10358	126	31	between	between	ADP
app01-10358	126	32	coatings	coating	NOUN
app01-10358	126	33	,	,	PUNCT
app01-10358	126	34	substrates	substrate	NOUN
app01-10358	126	35	and	and	CCONJ
app01-10358	126	36	(	(	PUNCT
app01-10358	126	37	a	a	NOUN
app01-10358	126	38	)	)	PUNCT
app01-10358	126	39	.	.	PUNCT
app01-10358	127	1	(	(	PUNCT
app01-10358	127	2	b	b	NOUN
app01-10358	127	3	)	)	PUNCT
app01-10358	127	4	.	.	PUNCT
app01-10358	128	1	figure	figure	NOUN
app01-10358	128	2	2	2	NUM
app01-10358	128	3	.	.	PUNCT
app01-10358	129	1	an	an	DET
app01-10358	129	2	average	average	NOUN
app01-10358	129	3	(	(	PUNCT
app01-10358	129	4	from	from	ADP
app01-10358	129	5	≤16	≤16	PROPN
app01-10358	129	6	indents	indent	NOUN
app01-10358	129	7	)	)	PUNCT
app01-10358	129	8	indentation	indentation	NOUN
app01-10358	129	9	modulus	modulus	ADJ
app01-10358	129	10	depth	depth	NOUN
app01-10358	129	11	profiles	profile	NOUN
app01-10358	129	12	on	on	ADP
app01-10358	129	13	tizrhfvnbta	tizrhfvnbta	NOUN
app01-10358	129	14	-	-	PUNCT
app01-10358	129	15	xn	xn	NOUN
app01-10358	129	16	coating	coating	NOUN
app01-10358	129	17	(	(	PUNCT
app01-10358	129	18	x	x	SYM
app01-10358	129	19	=	=	SYM
app01-10358	129	20	6	6	NUM
app01-10358	129	21	sccm	sccm	NOUN
app01-10358	129	22	n2	n2	NOUN
app01-10358	129	23	)	)	PUNCT
app01-10358	129	24	on	on	ADP
app01-10358	129	25	(	(	PUNCT
app01-10358	129	26	111	111	NUM
app01-10358	129	27	)	)	PUNCT
app01-10358	129	28	silicon	silicon	NOUN
app01-10358	129	29	substrate	substrate	NOUN
app01-10358	129	30	using	use	VERB
app01-10358	129	31	(	(	PUNCT
app01-10358	129	32	a	a	NOUN
app01-10358	129	33	)	)	PUNCT
app01-10358	129	34	–	–	PUNCT
app01-10358	129	35	continuous	continuous	ADJ
app01-10358	129	36	stiffness	stiffness	ADJ
app01-10358	129	37	measurements	measurement	NOUN
app01-10358	129	38	(	(	PUNCT
app01-10358	129	39	csm	csm	NOUN
app01-10358	129	40	)	)	PUNCT
app01-10358	129	41	tests	test	NOUN
app01-10358	129	42	;	;	PUNCT
app01-10358	129	43	(	(	PUNCT
app01-10358	129	44	b	b	X
app01-10358	129	45	)	)	PUNCT
app01-10358	129	46	–	–	PUNCT
app01-10358	129	47	the	the	DET
app01-10358	129	48	comparison	comparison	NOUN
app01-10358	129	49	of	of	ADP
app01-10358	129	50	eit	eit	NOUN
app01-10358	129	51	)	)	PUNCT
app01-10358	129	52	depth	depth	NOUN
app01-10358	129	53	profiles	profile	NOUN
app01-10358	129	54	from	from	ADP
app01-10358	129	55	1	1	NUM
app01-10358	129	56	indentation	indentation	NOUN
app01-10358	129	57	test	test	NOUN
app01-10358	129	58	using	use	VERB
app01-10358	129	59	csm	csm	NOUN
app01-10358	129	60	and	and	CCONJ
app01-10358	129	61	csm	csm	NOUN
app01-10358	129	62	with	with	ADP
app01-10358	129	63	the	the	DET
app01-10358	129	64	correction	correction	NOUN
app01-10358	129	65	on	on	ADP
app01-10358	129	66	substrate	substrate	NOUN
app01-10358	129	67	properties	property	NOUN
app01-10358	129	68	based	base	VERB
app01-10358	129	69	on	on	ADP
app01-10358	129	70	hay&crawford	hay&crawford	PROPN
app01-10358	129	71	model	model	NOUN
app01-10358	129	72	(	(	PUNCT
app01-10358	129	73	csmtf	csmtf	PROPN
app01-10358	129	74	)	)	PUNCT
app01-10358	129	75	.	.	PUNCT
app01-10358	130	1	39	39	NUM
app01-10358	130	2	františek	františek	NOUN
app01-10358	130	3	lofaj	lofaj	ADJ
app01-10358	130	4	acta	acta	PROPN
app01-10358	130	5	polytechnica	polytechnica	PROPN
app01-10358	130	6	ctu	ctu	NOUN
app01-10358	130	7	proceedings	proceeding	NOUN
app01-10358	130	8	small	small	ADJ
app01-10358	130	9	thickness	thickness	NOUN
app01-10358	130	10	.	.	PUNCT
app01-10358	131	1	the	the	DET
app01-10358	131	2	values	value	NOUN
app01-10358	131	3	of	of	ADP
app01-10358	131	4	eit	eit	PROPN
app01-10358	131	5	(	(	PUNCT
app01-10358	131	6	and	and	CCONJ
app01-10358	131	7	hit	hit	VERB
app01-10358	131	8	)	)	PUNCT
app01-10358	131	9	calculated	calculate	VERB
app01-10358	131	10	according	accord	VERB
app01-10358	131	11	to	to	ADP
app01-10358	131	12	iso	iso	PROPN
app01-10358	131	13	standard	standard	NOUN
app01-10358	131	14	from	from	ADP
app01-10358	131	15	the	the	DET
app01-10358	131	16	profiles	profile	NOUN
app01-10358	131	17	obtained	obtain	VERB
app01-10358	131	18	by	by	ADP
app01-10358	131	19	different	different	ADJ
app01-10358	131	20	methods	method	NOUN
app01-10358	131	21	varied	varied	ADJ
app01-10358	131	22	from	from	ADP
app01-10358	131	23	275gpa	275gpa	NUM
app01-10358	131	24	to	to	ADP
app01-10358	131	25	300gpa	300gpa	NUM
app01-10358	131	26	(	(	PUNCT
app01-10358	131	27	and	and	CCONJ
app01-10358	131	28	27.2gpa	27.2gpa	PROPN
app01-10358	131	29	to	to	ADP
app01-10358	131	30	29.5gpa	29.5gpa	NUM
app01-10358	131	31	)	)	PUNCT
app01-10358	131	32	,	,	PUNCT
app01-10358	131	33	which	which	PRON
app01-10358	131	34	was	be	AUX
app01-10358	131	35	within	within	ADP
app01-10358	131	36	the	the	DET
app01-10358	131	37	scatter	scatter	NOUN
app01-10358	131	38	of	of	ADP
app01-10358	131	39	each	each	DET
app01-10358	131	40	measurement	measurement	NOUN
app01-10358	131	41	.	.	PUNCT
app01-10358	132	1	thus	thus	ADV
app01-10358	132	2	,	,	PUNCT
app01-10358	132	3	all	all	DET
app01-10358	132	4	four	four	NUM
app01-10358	132	5	methods	method	NOUN
app01-10358	132	6	are	be	AUX
app01-10358	132	7	suitable	suitable	ADJ
app01-10358	132	8	for	for	ADP
app01-10358	132	9	the	the	DET
app01-10358	132	10	determination	determination	NOUN
app01-10358	132	11	of	of	ADP
app01-10358	132	12	hardness	hardness	NOUN
app01-10358	132	13	and	and	CCONJ
app01-10358	132	14	modulus	modulus	ADJ
app01-10358	132	15	profiles	profile	NOUN
app01-10358	132	16	in	in	ADP
app01-10358	132	17	coating	coating	NOUN
app01-10358	132	18	/	/	SYM
app01-10358	132	19	substrate	substrate	NOUN
app01-10358	132	20	systems	system	NOUN
app01-10358	132	21	.	.	PUNCT
app01-10358	133	1	however	however	ADV
app01-10358	133	2	,	,	PUNCT
app01-10358	133	3	csm	csm	NOUN
app01-10358	133	4	-	-	PUNCT
app01-10358	133	5	based	base	VERB
app01-10358	133	6	methods	method	NOUN
app01-10358	133	7	are	be	AUX
app01-10358	133	8	experimentally	experimentally	ADV
app01-10358	133	9	easier	easy	ADJ
app01-10358	133	10	,	,	PUNCT
app01-10358	133	11	faster	fast	ADJ
app01-10358	133	12	,	,	PUNCT
app01-10358	133	13	more	more	ADV
app01-10358	133	14	effective	effective	ADJ
app01-10358	133	15	and	and	CCONJ
app01-10358	133	16	conservative	conservative	ADJ
app01-10358	133	17	,	,	PUNCT
app01-10358	133	18	especially	especially	ADV
app01-10358	133	19	with	with	ADP
app01-10358	133	20	the	the	DET
app01-10358	133	21	correction	correction	NOUN
app01-10358	133	22	on	on	ADP
app01-10358	133	23	substrate	substrate	NOUN
app01-10358	133	24	properties	property	NOUN
app01-10358	133	25	.	.	PUNCT
app01-10358	134	1	the	the	DET
app01-10358	134	2	differences	difference	NOUN
app01-10358	134	3	between	between	ADP
app01-10358	134	4	eit	eit	PROPN
app01-10358	134	5	values	value	NOUN
app01-10358	134	6	calculated	calculate	VERB
app01-10358	134	7	according	accord	VERB
app01-10358	134	8	to	to	ADP
app01-10358	134	9	iso	iso	NOUN
app01-10358	134	10	and	and	CCONJ
app01-10358	134	11	the	the	DET
app01-10358	134	12	“	"	PUNCT
app01-10358	134	13	10	10	NUM
app01-10358	134	14	%	%	NOUN
app01-10358	134	15	rule	rule	NOUN
app01-10358	134	16	”	"	PUNCT
app01-10358	134	17	procedures	procedure	NOUN
app01-10358	134	18	were	be	AUX
app01-10358	134	19	also	also	ADV
app01-10358	134	20	not	not	PART
app01-10358	134	21	very	very	ADV
app01-10358	134	22	large	large	ADJ
app01-10358	134	23	and	and	CCONJ
app01-10358	134	24	fully	fully	ADV
app01-10358	134	25	overlapped	overlapped	ADJ
app01-10358	134	26	in	in	ADP
app01-10358	134	27	hit	hit	NOUN
app01-10358	134	28	.	.	PUNCT
app01-10358	135	1	however	however	ADV
app01-10358	135	2	,	,	PUNCT
app01-10358	135	3	it	it	PRON
app01-10358	135	4	does	do	AUX
app01-10358	135	5	not	not	PART
app01-10358	135	6	rehabilitate	rehabilitate	VERB
app01-10358	135	7	the	the	DET
app01-10358	135	8	“	"	PUNCT
app01-10358	135	9	10	10	NUM
app01-10358	135	10	%	%	NOUN
app01-10358	135	11	rule	rule	NOUN
app01-10358	135	12	”	"	PUNCT
app01-10358	135	13	approach	approach	NOUN
app01-10358	135	14	because	because	SCONJ
app01-10358	135	15	the	the	DET
app01-10358	135	16	coating	coating	NOUN
app01-10358	135	17	was	be	AUX
app01-10358	135	18	relatively	relatively	ADV
app01-10358	135	19	thick	thick	ADJ
app01-10358	135	20	which	which	PRON
app01-10358	135	21	could	could	AUX
app01-10358	135	22	shield	shield	VERB
app01-10358	135	23	the	the	DET
app01-10358	135	24	substrate	substrate	NOUN
app01-10358	135	25	and	and	CCONJ
app01-10358	135	26	prevent	prevent	VERB
app01-10358	135	27	the	the	DET
app01-10358	135	28	collision	collision	NOUN
app01-10358	135	29	of	of	ADP
app01-10358	135	30	the	the	DET
app01-10358	135	31	calculation	calculation	NOUN
app01-10358	135	32	range	range	VERB
app01-10358	135	33	with	with	ADP
app01-10358	135	34	the	the	DET
app01-10358	135	35	lower	low	ADJ
app01-10358	135	36	limit	limit	NOUN
app01-10358	135	37	of	of	ADP
app01-10358	135	38	validity	validity	NOUN
app01-10358	135	39	range	range	NOUN
app01-10358	135	40	.	.	PUNCT
app01-10358	136	1	therefore	therefore	ADV
app01-10358	136	2	,	,	PUNCT
app01-10358	136	3	additional	additional	ADJ
app01-10358	136	4	measurements	measurement	NOUN
app01-10358	136	5	on	on	ADP
app01-10358	136	6	thinner	thin	ADJ
app01-10358	136	7	coatings	coating	NOUN
app01-10358	136	8	were	be	AUX
app01-10358	136	9	performed	perform	VERB
app01-10358	136	10	.	.	PUNCT
app01-10358	137	1	3.2	3.2	NUM
app01-10358	137	2	.	.	PUNCT
app01-10358	137	3	coating	coat	VERB
app01-10358	137	4	thickness	thickness	NOUN
app01-10358	137	5	effect	effect	NOUN
app01-10358	137	6	analogous	analogous	ADJ
app01-10358	137	7	nanoindentation	nanoindentation	NOUN
app01-10358	137	8	tests	test	NOUN
app01-10358	137	9	using	use	VERB
app01-10358	137	10	csm	csm	NOUN
app01-10358	137	11	only	only	ADV
app01-10358	137	12	were	be	AUX
app01-10358	137	13	performed	perform	VERB
app01-10358	137	14	on	on	ADP
app01-10358	137	15	the	the	DET
app01-10358	137	16	nbmotaw	nbmotaw	NOUN
app01-10358	137	17	coating	coating	NOUN
app01-10358	137	18	with	with	ADP
app01-10358	137	19	a	a	DET
app01-10358	137	20	thickness	thickness	NOUN
app01-10358	137	21	of	of	ADP
app01-10358	137	22	610	610	NUM
app01-10358	137	23	nm	nm	NOUN
app01-10358	137	24	deposited	deposit	VERB
app01-10358	137	25	using	use	VERB
app01-10358	137	26	dc	dc	PROPN
app01-10358	137	27	magnetron	magnetron	NOUN
app01-10358	137	28	sputtering	sputtering	NOUN
app01-10358	137	29	on	on	ADP
app01-10358	137	30	(	(	PUNCT
app01-10358	137	31	0001	0001	NUM
app01-10358	137	32	)	)	PUNCT
app01-10358	137	33	sapphire	sapphire	NOUN
app01-10358	137	34	substrate	substrate	NOUN
app01-10358	137	35	.	.	PUNCT
app01-10358	138	1	figure	figure	NOUN
app01-10358	138	2	3	3	NUM
app01-10358	138	3	compares	compare	VERB
app01-10358	138	4	the	the	DET
app01-10358	138	5	indentation	indentation	NOUN
app01-10358	138	6	modulus	modulus	NOUN
app01-10358	138	7	and	and	CCONJ
app01-10358	138	8	hardness	hardness	ADJ
app01-10358	138	9	depth	depth	NOUN
app01-10358	138	10	profiles	profile	NOUN
app01-10358	138	11	in	in	ADP
app01-10358	138	12	csm	csm	NOUN
app01-10358	138	13	and	and	CCONJ
app01-10358	138	14	corrected	correct	VERB
app01-10358	138	15	csm	csm	NOUN
app01-10358	138	16	(	(	PUNCT
app01-10358	138	17	csmtf	csmtf	NOUN
app01-10358	138	18	)	)	PUNCT
app01-10358	138	19	.	.	PUNCT
app01-10358	139	1	the	the	DET
app01-10358	139	2	h&c	h&c	PROPN
app01-10358	139	3	correction	correction	NOUN
app01-10358	139	4	introduced	introduce	VERB
app01-10358	139	5	a	a	DET
app01-10358	139	6	reduction	reduction	NOUN
app01-10358	139	7	of	of	ADP
app01-10358	139	8	the	the	DET
app01-10358	139	9	indentation	indentation	NOUN
app01-10358	139	10	modulus	modulus	NOUN
app01-10358	139	11	profile	profile	NOUN
app01-10358	139	12	and	and	CCONJ
app01-10358	139	13	plateau	plateau	NOUN
app01-10358	139	14	became	become	VERB
app01-10358	139	15	more	more	ADV
app01-10358	139	16	pronounced	pronounced	ADJ
app01-10358	139	17	than	than	ADP
app01-10358	139	18	in	in	ADP
app01-10358	139	19	the	the	DET
app01-10358	139	20	case	case	NOUN
app01-10358	139	21	of	of	ADP
app01-10358	139	22	csm	csm	NOUN
app01-10358	139	23	.	.	PUNCT
app01-10358	140	1	it	it	PRON
app01-10358	140	2	caused	cause	VERB
app01-10358	140	3	that	that	SCONJ
app01-10358	140	4	the	the	DET
app01-10358	140	5	modulus	modulus	NOUN
app01-10358	140	6	could	could	AUX
app01-10358	140	7	be	be	AUX
app01-10358	140	8	calculated	calculate	VERB
app01-10358	140	9	from	from	ADP
app01-10358	140	10	the	the	DET
app01-10358	140	11	relative	relative	ADJ
app01-10358	140	12	depth	depth	NOUN
app01-10358	140	13	range	range	NOUN
app01-10358	140	14	from	from	ADP
app01-10358	140	15	16	16	NUM
app01-10358	140	16	%	%	NOUN
app01-10358	140	17	to	to	ADP
app01-10358	140	18	almost	almost	ADV
app01-10358	140	19	30	30	NUM
app01-10358	140	20	%	%	NOUN
app01-10358	140	21	which	which	PRON
app01-10358	140	22	is	be	AUX
app01-10358	140	23	well	well	ADV
app01-10358	140	24	above	above	ADP
app01-10358	140	25	10	10	NUM
app01-10358	140	26	%	%	NOUN
app01-10358	140	27	of	of	ADP
app01-10358	140	28	the	the	DET
app01-10358	140	29	relative	relative	ADJ
app01-10358	140	30	depth	depth	NOUN
app01-10358	140	31	.	.	PUNCT
app01-10358	141	1	the	the	DET
app01-10358	141	2	resulting	result	VERB
app01-10358	141	3	value	value	NOUN
app01-10358	141	4	from	from	ADP
app01-10358	141	5	csm	csm	PROPN
app01-10358	141	6	was	be	AUX
app01-10358	141	7	higher	high	ADJ
app01-10358	141	8	by	by	ADP
app01-10358	141	9	35gpa	35gpa	NOUN
app01-10358	141	10	than	than	ADP
app01-10358	141	11	that	that	PRON
app01-10358	141	12	(	(	PUNCT
app01-10358	141	13	354	354	NUM
app01-10358	141	14	±	±	NUM
app01-10358	141	15	11gpa	11gpa	NOUN
app01-10358	141	16	)	)	PUNCT
app01-10358	141	17	obtained	obtain	VERB
app01-10358	141	18	from	from	ADP
app01-10358	141	19	the	the	DET
app01-10358	141	20	corrected	correct	VERB
app01-10358	141	21	csm	csm	NOUN
app01-10358	141	22	profile	profile	ADV
app01-10358	141	23	.	.	PUNCT
app01-10358	142	1	the	the	DET
app01-10358	142	2	calculation	calculation	NOUN
app01-10358	142	3	employing	employ	VERB
app01-10358	142	4	the	the	DET
app01-10358	142	5	“	"	PUNCT
app01-10358	142	6	10	10	NUM
app01-10358	142	7	%	%	NOUN
app01-10358	142	8	rule	rule	NOUN
app01-10358	142	9	”	"	PUNCT
app01-10358	142	10	completely	completely	ADV
app01-10358	142	11	failed	fail	VERB
app01-10358	142	12	:	:	PUNCT
app01-10358	142	13	the	the	DET
app01-10358	142	14	depth	depth	NOUN
app01-10358	142	15	of	of	ADP
app01-10358	142	16	61	61	NUM
app01-10358	142	17	nm	nm	NOUN
app01-10358	142	18	falls	fall	VERB
app01-10358	142	19	into	into	ADP
app01-10358	142	20	the	the	DET
app01-10358	142	21	range	range	NOUN
app01-10358	142	22	where	where	SCONJ
app01-10358	142	23	the	the	DET
app01-10358	142	24	tip	tip	NOUN
app01-10358	142	25	-	-	PUNCT
app01-10358	142	26	blunting	blunt	VERB
app01-10358	142	27	effects	effect	NOUN
app01-10358	142	28	are	be	AUX
app01-10358	142	29	dominant	dominant	ADJ
app01-10358	142	30	and	and	CCONJ
app01-10358	142	31	the	the	DET
app01-10358	142	32	data	datum	NOUN
app01-10358	142	33	are	be	AUX
app01-10358	142	34	invalid	invalid	ADJ
app01-10358	142	35	.	.	PUNCT
app01-10358	143	1	the	the	DET
app01-10358	143	2	hardness	hardness	NOUN
app01-10358	143	3	profile	profile	NOUN
app01-10358	143	4	from	from	ADP
app01-10358	143	5	csm	csm	PROPN
app01-10358	143	6	(	(	PUNCT
app01-10358	143	7	figure	figure	NOUN
app01-10358	143	8	3b	3b	NUM
app01-10358	143	9	)	)	PUNCT
app01-10358	143	10	was	be	AUX
app01-10358	143	11	not	not	PART
app01-10358	143	12	affected	affect	VERB
app01-10358	143	13	by	by	ADP
app01-10358	143	14	the	the	DET
app01-10358	143	15	correction	correction	NOUN
app01-10358	143	16	and	and	CCONJ
app01-10358	143	17	it	it	PRON
app01-10358	143	18	was	be	AUX
app01-10358	143	19	hit	hit	VERB
app01-10358	143	20	=	=	PUNCT
app01-10358	143	21	30.7	30.7	NUM
app01-10358	143	22	±	±	NUM
app01-10358	143	23	1.0gpa	1.0gpa	NOUN
app01-10358	143	24	.	.	PUNCT
app01-10358	144	1	applying	apply	VERB
app01-10358	144	2	the	the	DET
app01-10358	144	3	“	"	PUNCT
app01-10358	144	4	10	10	NUM
app01-10358	144	5	%	%	NOUN
app01-10358	144	6	rule	rule	NOUN
app01-10358	144	7	”	"	PUNCT
app01-10358	144	8	to	to	ADP
app01-10358	144	9	hardness	hardness	NOUN
app01-10358	144	10	also	also	ADV
app01-10358	144	11	failed	fail	VERB
app01-10358	144	12	because	because	SCONJ
app01-10358	144	13	of	of	ADP
app01-10358	144	14	the	the	DET
app01-10358	144	15	same	same	ADJ
app01-10358	144	16	reason	reason	NOUN
app01-10358	144	17	.	.	PUNCT
app01-10358	145	1	thus	thus	ADV
app01-10358	145	2	,	,	PUNCT
app01-10358	145	3	figure	figure	VERB
app01-10358	145	4	3	3	NUM
app01-10358	145	5	even	even	ADV
app01-10358	145	6	more	more	ADV
app01-10358	145	7	clearly	clearly	ADV
app01-10358	145	8	than	than	ADP
app01-10358	145	9	the	the	DET
app01-10358	145	10	data	datum	NOUN
app01-10358	145	11	in	in	ADP
app01-10358	145	12	table	table	NOUN
app01-10358	145	13	3	3	NUM
app01-10358	145	14	demonstrates	demonstrate	VERB
app01-10358	145	15	why	why	SCONJ
app01-10358	145	16	the	the	DET
app01-10358	145	17	“	"	PUNCT
app01-10358	145	18	10	10	NUM
app01-10358	145	19	%	%	NOUN
app01-10358	145	20	rule	rule	NOUN
app01-10358	145	21	”	"	PUNCT
app01-10358	145	22	approach	approach	NOUN
app01-10358	145	23	should	should	AUX
app01-10358	145	24	be	be	AUX
app01-10358	145	25	avoided	avoid	VERB
app01-10358	145	26	in	in	ADP
app01-10358	145	27	the	the	DET
app01-10358	145	28	determination	determination	NOUN
app01-10358	145	29	of	of	ADP
app01-10358	145	30	the	the	DET
app01-10358	145	31	mechanical	mechanical	ADJ
app01-10358	145	32	properties	property	NOUN
app01-10358	145	33	of	of	ADP
app01-10358	145	34	thin	thin	ADJ
app01-10358	145	35	coatings	coating	NOUN
app01-10358	145	36	from	from	ADP
app01-10358	145	37	nanoindentation	nanoindentation	NOUN
app01-10358	145	38	.	.	PUNCT
app01-10358	146	1	3.3	3.3	NUM
app01-10358	146	2	.	.	PUNCT
app01-10358	147	1	the	the	DET
app01-10358	147	2	effect	effect	NOUN
app01-10358	147	3	of	of	ADP
app01-10358	147	4	substrate	substrate	NOUN
app01-10358	147	5	modulus	modulus	NOUN
app01-10358	147	6	this	this	DET
app01-10358	147	7	study	study	NOUN
app01-10358	147	8	involved	involve	VERB
app01-10358	147	9	one	one	NUM
app01-10358	147	10	stoichiometric	stoichiometric	NOUN
app01-10358	147	11	tizrhfvnbtaxn	tizrhfvnbtaxn	NOUN
app01-10358	147	12	coating	coat	VERB
app01-10358	147	13	approximately	approximately	ADV
app01-10358	147	14	1325	1325	NUM
app01-10358	147	15	nm	nm	ADV
app01-10358	147	16	thick	thick	ADJ
app01-10358	147	17	deposited	deposit	VERB
app01-10358	147	18	by	by	ADP
app01-10358	147	19	reactive	reactive	ADJ
app01-10358	147	20	hitus	hitus	NOUN
app01-10358	147	21	at	at	ADP
app01-10358	147	22	x	x	X
app01-10358	147	23	=	=	SYM
app01-10358	147	24	6	6	NUM
app01-10358	147	25	sccm	sccm	NOUN
app01-10358	147	26	n2	n2	NOUN
app01-10358	147	27	flow	flow	NOUN
app01-10358	147	28	simultaneously	simultaneously	ADV
app01-10358	147	29	on	on	ADP
app01-10358	147	30	four	four	NUM
app01-10358	147	31	different	different	ADJ
app01-10358	147	32	substrates	substrate	NOUN
app01-10358	147	33	listed	list	VERB
app01-10358	147	34	in	in	ADP
app01-10358	147	35	table	table	NOUN
app01-10358	147	36	1	1	NUM
app01-10358	147	37	.	.	PUNCT
app01-10358	148	1	two	two	NUM
app01-10358	148	2	measurements	measurement	NOUN
app01-10358	148	3	were	be	AUX
app01-10358	148	4	performed	perform	VERB
app01-10358	148	5	using	use	VERB
app01-10358	148	6	independently	independently	ADV
app01-10358	148	7	csm	csm	NOUN
app01-10358	148	8	and	and	CCONJ
app01-10358	148	9	corrected	correct	VERB
app01-10358	148	10	csm	csm	NOUN
app01-10358	148	11	(	(	PUNCT
app01-10358	148	12	csmtf	csmtf	NOUN
app01-10358	148	13	)	)	PUNCT
app01-10358	148	14	methods	method	NOUN
app01-10358	148	15	on	on	ADP
app01-10358	148	16	each	each	DET
app01-10358	148	17	substrate	substrate	NOUN
app01-10358	148	18	.	.	PUNCT
app01-10358	149	1	the	the	DET
app01-10358	149	2	results	result	NOUN
app01-10358	149	3	summarized	summarize	VERB
app01-10358	149	4	in	in	ADP
app01-10358	149	5	figure	figure	NOUN
app01-10358	149	6	4a	4a	NOUN
app01-10358	149	7	indicate	indicate	VERB
app01-10358	149	8	that	that	SCONJ
app01-10358	149	9	eit	eit	PROPN
app01-10358	149	10	and	and	CCONJ
app01-10358	149	11	hit	hit	VERB
app01-10358	149	12	values	value	NOUN
app01-10358	149	13	from	from	ADP
app01-10358	149	14	both	both	DET
app01-10358	149	15	measurements	measurement	NOUN
app01-10358	149	16	were	be	AUX
app01-10358	149	17	within	within	ADP
app01-10358	149	18	the	the	DET
app01-10358	149	19	scatter	scatter	NOUN
app01-10358	149	20	and	and	CCONJ
app01-10358	149	21	they	they	PRON
app01-10358	149	22	are	be	AUX
app01-10358	149	23	reproducible	reproducible	ADJ
app01-10358	149	24	.	.	PUNCT
app01-10358	150	1	besides	besides	SCONJ
app01-10358	150	2	that	that	PRON
app01-10358	150	3	,	,	PUNCT
app01-10358	150	4	systematic	systematic	ADJ
app01-10358	150	5	and	and	CCONJ
app01-10358	150	6	substantial	substantial	ADJ
app01-10358	150	7	differences	difference	NOUN
app01-10358	150	8	in	in	ADP
app01-10358	150	9	the	the	DET
app01-10358	150	10	20–50gpa	20–50gpa	NUM
app01-10358	150	11	range	range	NOUN
app01-10358	150	12	between	between	ADP
app01-10358	150	13	apparent	apparent	ADJ
app01-10358	150	14	eit	eit	NOUN
app01-10358	150	15	values	value	NOUN
app01-10358	150	16	(	(	PUNCT
app01-10358	150	17	a	a	NOUN
app01-10358	150	18	)	)	PUNCT
app01-10358	150	19	.	.	PUNCT
app01-10358	151	1	(	(	PUNCT
app01-10358	151	2	b	b	X
app01-10358	151	3	)	)	PUNCT
app01-10358	151	4	.	.	PUNCT
app01-10358	152	1	figure	figure	VERB
app01-10358	152	2	3	3	NUM
app01-10358	152	3	.	.	PUNCT
app01-10358	152	4	depth	depth	NOUN
app01-10358	152	5	profiles	profile	NOUN
app01-10358	152	6	of	of	ADP
app01-10358	152	7	(	(	PUNCT
app01-10358	152	8	a	a	NOUN
app01-10358	152	9	)	)	PUNCT
app01-10358	152	10	–	–	PUNCT
app01-10358	152	11	indentation	indentation	NOUN
app01-10358	152	12	modulus	modulus	NOUN
app01-10358	152	13	,	,	PUNCT
app01-10358	152	14	(	(	PUNCT
app01-10358	152	15	b	b	NOUN
app01-10358	152	16	)	)	PUNCT
app01-10358	152	17	–	–	PUNCT
app01-10358	152	18	hardness	hardness	NOUN
app01-10358	152	19	,	,	PUNCT
app01-10358	152	20	obtained	obtain	VERB
app01-10358	152	21	using	use	VERB
app01-10358	152	22	csm	csm	NOUN
app01-10358	152	23	method	method	NOUN
app01-10358	152	24	during	during	ADP
app01-10358	152	25	nanoindentation	nanoindentation	NOUN
app01-10358	152	26	of	of	ADP
app01-10358	152	27	610	610	NUM
app01-10358	152	28	nm	nm	ADV
app01-10358	152	29	thin	thin	ADJ
app01-10358	152	30	r	r	NOUN
app01-10358	152	31	-	-	PUNCT
app01-10358	152	32	dcms	dcms	NOUN
app01-10358	152	33	nbmotaw	nbmotaw	NOUN
app01-10358	152	34	coating	coating	NOUN
app01-10358	152	35	.	.	PUNCT
app01-10358	153	1	from	from	ADP
app01-10358	153	2	csm	csm	NOUN
app01-10358	153	3	and	and	CCONJ
app01-10358	153	4	corrected	correct	VERB
app01-10358	153	5	csm	csm	NOUN
app01-10358	153	6	(	(	PUNCT
app01-10358	153	7	csmtf	csmtf	NOUN
app01-10358	153	8	)	)	PUNCT
app01-10358	153	9	and	and	CCONJ
app01-10358	153	10	in	in	ADP
app01-10358	153	11	the	the	DET
app01-10358	153	12	65–150gpa	65–150gpa	NUM
app01-10358	153	13	range	range	NOUN
app01-10358	153	14	the	the	DET
app01-10358	153	15	increase	increase	NOUN
app01-10358	153	16	of	of	ADP
app01-10358	153	17	the	the	DET
app01-10358	153	18	substrate	substrate	NOUN
app01-10358	153	19	modulus	modulus	NOUN
app01-10358	153	20	from	from	ADP
app01-10358	153	21	ti	ti	NOUN
app01-10358	153	22	-	-	NOUN
app01-10358	153	23	alloy	alloy	NOUN
app01-10358	153	24	to	to	ADP
app01-10358	153	25	sapphire	sapphire	NOUN
app01-10358	153	26	.	.	PUNCT
app01-10358	154	1	thus	thus	ADV
app01-10358	154	2	,	,	PUNCT
app01-10358	154	3	the	the	DET
app01-10358	154	4	influence	influence	NOUN
app01-10358	154	5	of	of	ADP
app01-10358	154	6	the	the	DET
app01-10358	154	7	substrate	substrate	NOUN
app01-10358	154	8	elastic	elastic	ADJ
app01-10358	154	9	modulus	modulus	NOUN
app01-10358	154	10	on	on	ADP
app01-10358	154	11	the	the	DET
app01-10358	154	12	coating	coating	NOUN
app01-10358	154	13	modulus	modulus	NOUN
app01-10358	154	14	evaluation	evaluation	NOUN
app01-10358	154	15	was	be	AUX
app01-10358	154	16	not	not	PART
app01-10358	154	17	fully	fully	ADV
app01-10358	154	18	eliminated	eliminate	VERB
app01-10358	154	19	both	both	PRON
app01-10358	154	20	in	in	ADP
app01-10358	154	21	csm	csm	NOUN
app01-10358	154	22	and	and	CCONJ
app01-10358	154	23	in	in	ADP
app01-10358	154	24	the	the	DET
app01-10358	154	25	h&c	h&c	PROPN
app01-10358	154	26	-	-	PUNCT
app01-10358	154	27	modified	modify	VERB
app01-10358	154	28	csm	csm	NOUN
app01-10358	154	29	and	and	CCONJ
app01-10358	154	30	its	its	PRON
app01-10358	154	31	further	further	ADJ
app01-10358	154	32	refinement	refinement	NOUN
app01-10358	154	33	is	be	AUX
app01-10358	154	34	necessary	necessary	ADJ
app01-10358	154	35	.	.	PUNCT
app01-10358	155	1	on	on	ADP
app01-10358	155	2	the	the	DET
app01-10358	155	3	contrary	contrary	NOUN
app01-10358	155	4	,	,	PUNCT
app01-10358	155	5	hardness	hardness	INTJ
app01-10358	155	6	(	(	PUNCT
app01-10358	155	7	figure	figure	NOUN
app01-10358	155	8	4b	4b	X
app01-10358	155	9	)	)	PUNCT
app01-10358	155	10	varied	varied	ADJ
app01-10358	155	11	only	only	ADV
app01-10358	155	12	from	from	ADP
app01-10358	155	13	27gpa	27gpa	NOUN
app01-10358	155	14	to	to	ADP
app01-10358	155	15	36gpa	36gpa	NOUN
app01-10358	155	16	with	with	ADP
app01-10358	155	17	an	an	DET
app01-10358	155	18	average	average	ADJ
app01-10358	155	19	value	value	NOUN
app01-10358	155	20	of	of	ADP
app01-10358	155	21	around	around	ADP
app01-10358	155	22	31.5gpa	31.5gpa	NUM
app01-10358	155	23	and	and	CCONJ
app01-10358	155	24	the	the	DET
app01-10358	155	25	differences	difference	NOUN
app01-10358	155	26	were	be	AUX
app01-10358	155	27	mostly	mostly	ADV
app01-10358	155	28	within	within	ADP
app01-10358	155	29	the	the	DET
app01-10358	155	30	scatter	scatter	NOUN
app01-10358	155	31	of	of	ADP
app01-10358	155	32	individual	individual	ADJ
app01-10358	155	33	measurements	measurement	NOUN
app01-10358	155	34	.	.	PUNCT
app01-10358	156	1	3.4	3.4	NUM
app01-10358	156	2	.	.	PUNCT
app01-10358	157	1	best	good	ADJ
app01-10358	157	2	practice	practice	NOUN
app01-10358	157	3	recommendations	recommendation	NOUN
app01-10358	157	4	the	the	DET
app01-10358	157	5	above	above	ADJ
app01-10358	157	6	results	result	NOUN
app01-10358	157	7	suggest	suggest	VERB
app01-10358	157	8	that	that	SCONJ
app01-10358	157	9	substrate	substrate	NOUN
app01-10358	157	10	influence	influence	NOUN
app01-10358	157	11	in	in	ADP
app01-10358	157	12	the	the	DET
app01-10358	157	13	evaluation	evaluation	NOUN
app01-10358	157	14	of	of	ADP
app01-10358	157	15	indentation	indentation	NOUN
app01-10358	157	16	modulus	modulus	NOUN
app01-10358	157	17	is	be	AUX
app01-10358	157	18	still	still	ADV
app01-10358	157	19	not	not	PART
app01-10358	157	20	fully	fully	ADV
app01-10358	157	21	eliminated	eliminate	VERB
app01-10358	157	22	and	and	CCONJ
app01-10358	157	23	the	the	DET
app01-10358	157	24	current	current	ADJ
app01-10358	157	25	solutions	solution	NOUN
app01-10358	157	26	,	,	PUNCT
app01-10358	157	27	despite	despite	SCONJ
app01-10358	157	28	the	the	DET
app01-10358	157	29	incorporation	incorporation	NOUN
app01-10358	157	30	of	of	ADP
app01-10358	157	31	iso	iso	NOUN
app01-10358	157	32	14577	14577	NUM
app01-10358	157	33	-	-	SYM
app01-10358	157	34	4	4	NUM
app01-10358	157	35	procedure	procedure	NOUN
app01-10358	157	36	,	,	PUNCT
app01-10358	157	37	generate	generate	VERB
app01-10358	157	38	systematic	systematic	ADJ
app01-10358	157	39	differences	difference	NOUN
app01-10358	157	40	exceeding	exceed	VERB
app01-10358	157	41	measurement	measurement	NOUN
app01-10358	157	42	scatter	scatter	NOUN
app01-10358	157	43	.	.	PUNCT
app01-10358	158	1	in	in	ADP
app01-10358	158	2	the	the	DET
app01-10358	158	3	case	case	NOUN
app01-10358	158	4	of	of	ADP
app01-10358	158	5	the	the	DET
app01-10358	158	6	presence	presence	NOUN
app01-10358	158	7	of	of	ADP
app01-10358	158	8	systematic	systematic	ADJ
app01-10358	158	9	errors	error	NOUN
app01-10358	158	10	,	,	PUNCT
app01-10358	158	11	the	the	DET
app01-10358	158	12	following	follow	VERB
app01-10358	158	13	rules	rule	NOUN
app01-10358	158	14	can	can	AUX
app01-10358	158	15	be	be	AUX
app01-10358	158	16	recommended	recommend	VERB
app01-10358	158	17	to	to	PART
app01-10358	158	18	produce	produce	VERB
app01-10358	158	19	40	40	NUM
app01-10358	158	20	vol	vol	NOUN
app01-10358	158	21	.	.	PUNCT
app01-10358	159	1	50/2024	50/2024	NUM
app01-10358	159	2	substrate	substrate	NOUN
app01-10358	159	3	effect	effect	NOUN
app01-10358	159	4	in	in	ADP
app01-10358	159	5	the	the	DET
app01-10358	159	6	evaluation	evaluation	NOUN
app01-10358	159	7	of	of	ADP
app01-10358	159	8	elastic	elastic	ADJ
app01-10358	159	9	modulus	modulus	NOUN
app01-10358	159	10	.	.	PUNCT
app01-10358	159	11	.	.	PUNCT
app01-10358	159	12	.	.	PUNCT
app01-10358	160	1	(	(	PUNCT
app01-10358	160	2	a	a	X
app01-10358	160	3	)	)	PUNCT
app01-10358	160	4	.	.	PUNCT
app01-10358	161	1	(	(	PUNCT
app01-10358	161	2	b	b	X
app01-10358	161	3	)	)	PUNCT
app01-10358	161	4	.	.	PUNCT
app01-10358	162	1	figure	figure	VERB
app01-10358	162	2	4	4	NUM
app01-10358	162	3	.	.	PUNCT
app01-10358	163	1	the	the	DET
app01-10358	163	2	effect	effect	NOUN
app01-10358	163	3	of	of	ADP
app01-10358	163	4	substrate	substrate	NOUN
app01-10358	163	5	modulus	modulus	NOUN
app01-10358	163	6	on	on	ADP
app01-10358	163	7	the	the	DET
app01-10358	163	8	calculated	calculate	VERB
app01-10358	163	9	values	value	NOUN
app01-10358	163	10	of	of	ADP
app01-10358	163	11	indentation	indentation	NOUN
app01-10358	163	12	modulus	modulus	NOUN
app01-10358	163	13	–	–	PUNCT
app01-10358	163	14	(	(	PUNCT
app01-10358	163	15	a	a	NOUN
app01-10358	163	16	)	)	PUNCT
app01-10358	163	17	,	,	PUNCT
app01-10358	163	18	and	and	CCONJ
app01-10358	163	19	hardness	hardness	INTJ
app01-10358	163	20	–	–	PUNCT
app01-10358	163	21	(	(	PUNCT
app01-10358	163	22	b	b	NOUN
app01-10358	163	23	)	)	PUNCT
app01-10358	163	24	,	,	PUNCT
app01-10358	163	25	in	in	ADP
app01-10358	163	26	csm	csm	NOUN
app01-10358	163	27	and	and	CCONJ
app01-10358	163	28	independent	independent	ADJ
app01-10358	163	29	corrected	correct	VERB
app01-10358	163	30	csm	csm	NOUN
app01-10358	163	31	(	(	PUNCT
app01-10358	163	32	csmtf	csmtf	NOUN
app01-10358	163	33	)	)	PUNCT
app01-10358	163	34	models	model	NOUN
app01-10358	163	35	.	.	PUNCT
app01-10358	164	1	the	the	DET
app01-10358	164	2	data	datum	NOUN
app01-10358	164	3	from	from	ADP
app01-10358	164	4	csmtf	csmtf	NOUN
app01-10358	164	5	were	be	AUX
app01-10358	164	6	intentionally	intentionally	ADV
app01-10358	164	7	offset	offset	VERB
app01-10358	164	8	for	for	ADP
app01-10358	164	9	better	well	ADJ
app01-10358	164	10	visibility	visibility	NOUN
app01-10358	164	11	[	[	X
app01-10358	164	12	24	24	NUM
app01-10358	164	13	]	]	PUNCT
app01-10358	164	14	.	.	PUNCT
app01-10358	165	1	comparable	comparable	ADJ
app01-10358	165	2	values	value	NOUN
app01-10358	165	3	of	of	ADP
app01-10358	165	4	indentation	indentation	NOUN
app01-10358	165	5	modulus	modulus	NOUN
app01-10358	165	6	in	in	ADP
app01-10358	165	7	thin	thin	ADJ
app01-10358	165	8	coating	coating	NOUN
app01-10358	165	9	/	/	SYM
app01-10358	165	10	substrate	substrate	NOUN
app01-10358	165	11	systems	system	NOUN
app01-10358	165	12	:	:	PUNCT
app01-10358	165	13	•	•	NUM
app01-10358	165	14	strictly	strictly	ADV
app01-10358	165	15	follow	follow	VERB
app01-10358	165	16	iso	iso	NOUN
app01-10358	165	17	24577	24577	NUM
app01-10358	165	18	-	-	SYM
app01-10358	165	19	4	4	NUM
app01-10358	165	20	and	and	CCONJ
app01-10358	165	21	principally	principally	ADV
app01-10358	165	22	avoid	avoid	VERB
app01-10358	165	23	the	the	DET
app01-10358	165	24	“	"	PUNCT
app01-10358	165	25	10	10	NUM
app01-10358	165	26	%	%	NOUN
app01-10358	165	27	rule	rule	NOUN
app01-10358	165	28	”	"	PUNCT
app01-10358	165	29	despite	despite	SCONJ
app01-10358	165	30	its	its	PRON
app01-10358	165	31	simplicity	simplicity	NOUN
app01-10358	165	32	and	and	CCONJ
app01-10358	165	33	small	small	ADJ
app01-10358	165	34	bias	bias	NOUN
app01-10358	165	35	in	in	ADP
app01-10358	165	36	hardness	hardness	ADJ
app01-10358	165	37	determination	determination	NOUN
app01-10358	165	38	in	in	ADP
app01-10358	165	39	sufficiently	sufficiently	ADV
app01-10358	165	40	thick	thick	ADJ
app01-10358	165	41	coatings	coating	NOUN
app01-10358	165	42	;	;	PUNCT
app01-10358	165	43	•	•	X
app01-10358	165	44	use	use	VERB
app01-10358	165	45	sharp	sharp	ADJ
app01-10358	165	46	tip	tip	NOUN
app01-10358	165	47	and	and	CCONJ
app01-10358	165	48	frequent	frequent	ADJ
app01-10358	165	49	tip	tip	NOUN
app01-10358	165	50	area	area	NOUN
app01-10358	165	51	calibration	calibration	NOUN
app01-10358	165	52	to	to	PART
app01-10358	165	53	minimize	minimize	VERB
app01-10358	165	54	the	the	DET
app01-10358	165	55	depth	depth	NOUN
app01-10358	165	56	range	range	NOUN
app01-10358	165	57	in	in	ADP
app01-10358	165	58	which	which	PRON
app01-10358	165	59	the	the	DET
app01-10358	165	60	results	result	NOUN
app01-10358	165	61	are	be	AUX
app01-10358	165	62	dominated	dominate	VERB
app01-10358	165	63	by	by	ADP
app01-10358	165	64	tip	tip	NOUN
app01-10358	165	65	bluntness	bluntness	NOUN
app01-10358	165	66	[	[	X
app01-10358	165	67	31	31	NUM
app01-10358	165	68	]	]	PUNCT
app01-10358	165	69	;	;	PUNCT
app01-10358	165	70	•	•	ADP
app01-10358	165	71	the	the	DET
app01-10358	165	72	coatings	coating	NOUN
app01-10358	165	73	with	with	ADP
app01-10358	165	74	a	a	DET
app01-10358	165	75	thickness	thickness	NOUN
app01-10358	165	76	>	>	ADP
app01-10358	165	77	1	1	NUM
app01-10358	165	78	µm	µm	NUM
app01-10358	165	79	are	be	AUX
app01-10358	165	80	preferred	prefer	VERB
app01-10358	165	81	;	;	PUNCT
app01-10358	165	82	reliable	reliable	ADJ
app01-10358	165	83	results	result	NOUN
app01-10358	165	84	from	from	ADP
app01-10358	165	85	thinner	thin	ADJ
app01-10358	165	86	coatings	coating	NOUN
app01-10358	165	87	require	require	VERB
app01-10358	165	88	very	very	ADV
app01-10358	165	89	sharp	sharp	ADJ
app01-10358	165	90	tips	tip	NOUN
app01-10358	165	91	and	and	CCONJ
app01-10358	165	92	better	well	ADJ
app01-10358	165	93	consideration	consideration	NOUN
app01-10358	165	94	of	of	ADP
app01-10358	165	95	substrate	substrate	NOUN
app01-10358	165	96	effects	effect	NOUN
app01-10358	165	97	;	;	PUNCT
app01-10358	165	98	•	•	X
app01-10358	165	99	use	use	VERB
app01-10358	165	100	the	the	DET
app01-10358	165	101	same	same	ADJ
app01-10358	165	102	method	method	NOUN
app01-10358	165	103	for	for	ADP
app01-10358	165	104	obtaining	obtain	VERB
app01-10358	165	105	corresponding	corresponding	ADJ
app01-10358	165	106	depth	depth	NOUN
app01-10358	165	107	profiles	profile	NOUN
app01-10358	165	108	(	(	PUNCT
app01-10358	165	109	the	the	DET
app01-10358	165	110	csm	csm	NOUN
app01-10358	165	111	method	method	NOUN
app01-10358	165	112	with	with	ADP
app01-10358	165	113	the	the	DET
app01-10358	165	114	optimized	optimize	VERB
app01-10358	165	115	parameters	parameter	NOUN
app01-10358	165	116	seems	seem	VERB
app01-10358	165	117	to	to	PART
app01-10358	165	118	be	be	AUX
app01-10358	165	119	suitable	suitable	ADJ
app01-10358	165	120	)	)	PUNCT
app01-10358	165	121	;	;	PUNCT
app01-10358	165	122	•	•	X
app01-10358	165	123	use	use	VERB
app01-10358	165	124	the	the	DET
app01-10358	165	125	same	same	ADJ
app01-10358	165	126	evaluation	evaluation	NOUN
app01-10358	165	127	method	method	NOUN
app01-10358	165	128	(	(	PUNCT
app01-10358	165	129	hay&crawford	hay&crawford	PROPN
app01-10358	165	130	correction	correction	NOUN
app01-10358	165	131	brings	bring	VERB
app01-10358	165	132	some	some	DET
app01-10358	165	133	benefits	benefit	NOUN
app01-10358	165	134	but	but	CCONJ
app01-10358	165	135	it	it	PRON
app01-10358	165	136	is	be	AUX
app01-10358	165	137	sensitive	sensitive	ADJ
app01-10358	165	138	to	to	ADP
app01-10358	165	139	substrate	substrate	NOUN
app01-10358	165	140	modulus	modulus	NOUN
app01-10358	165	141	and	and	CCONJ
app01-10358	165	142	coating	coat	VERB
app01-10358	165	143	thickness	thickness	NOUN
app01-10358	165	144	.	.	PUNCT
app01-10358	166	1	moreover	moreover	ADV
app01-10358	166	2	,	,	PUNCT
app01-10358	166	3	(	(	PUNCT
app01-10358	166	4	a	a	NOUN
app01-10358	166	5	)	)	PUNCT
app01-10358	166	6	.	.	PUNCT
app01-10358	167	1	(	(	PUNCT
app01-10358	167	2	b	b	X
app01-10358	167	3	)	)	PUNCT
app01-10358	167	4	.	.	PUNCT
app01-10358	168	1	figure	figure	NOUN
app01-10358	168	2	5	5	NUM
app01-10358	168	3	.	.	PUNCT
app01-10358	169	1	the	the	DET
app01-10358	169	2	dependences	dependence	NOUN
app01-10358	169	3	indentation	indentation	NOUN
app01-10358	169	4	modulus	modulus	NOUN
app01-10358	169	5	–	–	PUNCT
app01-10358	169	6	(	(	PUNCT
app01-10358	169	7	a	a	NOUN
app01-10358	169	8	)	)	PUNCT
app01-10358	169	9	,	,	PUNCT
app01-10358	169	10	and	and	CCONJ
app01-10358	169	11	hardness	hardness	INTJ
app01-10358	169	12	–	–	PUNCT
app01-10358	169	13	(	(	PUNCT
app01-10358	169	14	b	b	NOUN
app01-10358	169	15	)	)	PUNCT
app01-10358	169	16	,	,	PUNCT
app01-10358	169	17	in	in	ADP
app01-10358	169	18	tizrhf+me	tizrhf+me	NOUN
app01-10358	169	19	-	-	PUNCT
app01-10358	169	20	ny	ny	NOUN
app01-10358	169	21	(	(	PUNCT
app01-10358	169	22	me	i	PRON
app01-10358	169	23	=	=	SYM
app01-10358	169	24	v	v	PROPN
app01-10358	169	25	,	,	PUNCT
app01-10358	169	26	nb	nb	INTJ
app01-10358	169	27	,	,	PUNCT
app01-10358	169	28	ta	ta	PROPN
app01-10358	169	29	)	)	PUNCT
app01-10358	169	30	on	on	ADP
app01-10358	169	31	the	the	DET
app01-10358	169	32	flow	flow	NOUN
app01-10358	169	33	of	of	ADP
app01-10358	169	34	nitrogen	nitrogen	NOUN
app01-10358	169	35	added	add	VERB
app01-10358	169	36	in	in	ADP
app01-10358	169	37	the	the	DET
app01-10358	169	38	sputtering	sputtering	ADJ
app01-10358	169	39	ar	ar	NOUN
app01-10358	169	40	atmosphere	atmosphere	NOUN
app01-10358	169	41	(	(	PUNCT
app01-10358	169	42	and	and	CCONJ
app01-10358	169	43	subsequently	subsequently	ADV
app01-10358	169	44	,	,	PUNCT
app01-10358	169	45	stoichiometry	stoichiometry	PROPN
app01-10358	169	46	,	,	PUNCT
app01-10358	169	47	y	y	NOUN
app01-10358	169	48	)	)	PUNCT
app01-10358	169	49	during	during	ADP
app01-10358	169	50	reactive	reactive	ADJ
app01-10358	169	51	hitus	hitus	NOUN
app01-10358	169	52	deposition	deposition	NOUN
app01-10358	169	53	.	.	PUNCT
app01-10358	170	1	the	the	DET
app01-10358	170	2	results	result	NOUN
app01-10358	170	3	may	may	AUX
app01-10358	170	4	not	not	PART
app01-10358	170	5	be	be	AUX
app01-10358	170	6	directly	directly	ADV
app01-10358	170	7	comparable	comparable	ADJ
app01-10358	170	8	with	with	ADP
app01-10358	170	9	the	the	DET
app01-10358	170	10	earlier	early	ADJ
app01-10358	170	11	data	datum	NOUN
app01-10358	170	12	)	)	PUNCT
app01-10358	170	13	;	;	PUNCT
app01-10358	170	14	•	•	X
app01-10358	170	15	use	use	VERB
app01-10358	170	16	the	the	DET
app01-10358	170	17	same	same	ADJ
app01-10358	170	18	substrates	substrate	NOUN
app01-10358	170	19	with	with	ADP
app01-10358	170	20	the	the	DET
app01-10358	170	21	well	well	ADV
app01-10358	170	22	-	-	PUNCT
app01-10358	170	23	defined	define	VERB
app01-10358	170	24	elastic	elastic	ADJ
app01-10358	170	25	modulus	modulus	NOUN
app01-10358	170	26	;	;	PUNCT
app01-10358	170	27	•	•	X
app01-10358	170	28	at	at	ADV
app01-10358	170	29	least	least	ADV
app01-10358	170	30	two	two	NUM
app01-10358	170	31	independent	independent	ADJ
app01-10358	170	32	nanoindentation	nanoindentation	NOUN
app01-10358	170	33	measurements	measurement	NOUN
app01-10358	170	34	should	should	AUX
app01-10358	170	35	be	be	AUX
app01-10358	170	36	performed	perform	VERB
app01-10358	170	37	on	on	ADP
app01-10358	170	38	each	each	DET
app01-10358	170	39	coating	coating	NOUN
app01-10358	170	40	to	to	PART
app01-10358	170	41	take	take	VERB
app01-10358	170	42	into	into	ADP
app01-10358	170	43	consideration	consideration	NOUN
app01-10358	170	44	coating	coating	NOUN
app01-10358	170	45	uniformity	uniformity	NOUN
app01-10358	170	46	as	as	ADV
app01-10358	170	47	well	well	ADV
app01-10358	170	48	as	as	ADP
app01-10358	170	49	measurement	measurement	NOUN
app01-10358	170	50	accuracy	accuracy	NOUN
app01-10358	170	51	and	and	CCONJ
app01-10358	170	52	repeatability	repeatability	NOUN
app01-10358	170	53	.	.	PUNCT
app01-10358	171	1	3.5	3.5	NUM
app01-10358	171	2	.	.	PUNCT
app01-10358	171	3	application	application	NOUN
app01-10358	171	4	to	to	ADP
app01-10358	171	5	measurement	measurement	NOUN
app01-10358	171	6	in	in	ADP
app01-10358	171	7	tizrhfvnbta	tizrhfvnbta	NOUN
app01-10358	171	8	-	-	PUNCT
app01-10358	171	9	xn	xn	NUM
app01-10358	171	10	coatings	coating	NOUN
app01-10358	171	11	the	the	DET
app01-10358	171	12	recommendations	recommendation	NOUN
app01-10358	171	13	from	from	ADP
app01-10358	171	14	section	section	NOUN
app01-10358	171	15	3.4	3.4	NUM
app01-10358	171	16	were	be	AUX
app01-10358	171	17	applied	apply	VERB
app01-10358	171	18	in	in	ADP
app01-10358	171	19	the	the	DET
app01-10358	171	20	measurements	measurement	NOUN
app01-10358	171	21	and	and	CCONJ
app01-10358	171	22	evaluation	evaluation	NOUN
app01-10358	171	23	of	of	ADP
app01-10358	171	24	the	the	DET
app01-10358	171	25	effect	effect	NOUN
app01-10358	171	26	of	of	ADP
app01-10358	171	27	v	v	NOUN
app01-10358	171	28	,	,	PUNCT
app01-10358	171	29	nb	nb	INTJ
app01-10358	171	30	,	,	PUNCT
app01-10358	171	31	ta	ta	PROPN
app01-10358	171	32	and	and	CCONJ
app01-10358	171	33	nitrogen	nitrogen	NOUN
app01-10358	171	34	additions	addition	NOUN
app01-10358	171	35	on	on	ADP
app01-10358	171	36	mechanical	mechanical	ADJ
app01-10358	171	37	properties	property	NOUN
app01-10358	171	38	of	of	ADP
app01-10358	171	39	tizrhf	tizrhf	PROPN
app01-10358	171	40	-	-	PUNCT
app01-10358	171	41	me	i	PRON
app01-10358	171	42	-	-	PUNCT
app01-10358	171	43	ny	ny	NOUN
app01-10358	171	44	coatings	coating	NOUN
app01-10358	171	45	.	.	PUNCT
app01-10358	172	1	it	it	PRON
app01-10358	172	2	should	should	AUX
app01-10358	172	3	be	be	AUX
app01-10358	172	4	emphasized	emphasize	VERB
app01-10358	172	5	that	that	SCONJ
app01-10358	172	6	although	although	SCONJ
app01-10358	172	7	only	only	ADV
app01-10358	172	8	the	the	DET
app01-10358	172	9	sapphire	sapphire	NOUN
app01-10358	172	10	substrates	substrate	NOUN
app01-10358	172	11	and	and	CCONJ
app01-10358	172	12	csmtf	csmtf	NOUN
app01-10358	172	13	method	method	NOUN
app01-10358	172	14	were	be	AUX
app01-10358	172	15	employed	employ	VERB
app01-10358	172	16	to	to	PART
app01-10358	172	17	keep	keep	VERB
app01-10358	172	18	possible	possible	ADJ
app01-10358	172	19	systematic	systematic	ADJ
app01-10358	172	20	errors	error	NOUN
app01-10358	172	21	the	the	DET
app01-10358	172	22	same	same	ADJ
app01-10358	172	23	,	,	PUNCT
app01-10358	172	24	the	the	DET
app01-10358	172	25	resulting	result	VERB
app01-10358	172	26	values	value	NOUN
app01-10358	172	27	are	be	AUX
app01-10358	172	28	only	only	ADV
app01-10358	172	29	relative	relative	ADJ
app01-10358	172	30	and	and	CCONJ
app01-10358	172	31	should	should	AUX
app01-10358	172	32	be	be	AUX
app01-10358	172	33	used	use	VERB
app01-10358	172	34	only	only	ADV
app01-10358	172	35	for	for	ADP
app01-10358	172	36	comparison	comparison	NOUN
app01-10358	172	37	.	.	PUNCT
app01-10358	173	1	the	the	DET
app01-10358	173	2	full	full	ADJ
app01-10358	173	3	lines	line	NOUN
app01-10358	173	4	in	in	ADP
app01-10358	173	5	figures	figure	NOUN
app01-10358	173	6	5a	5a	NUM
app01-10358	173	7	and	and	CCONJ
app01-10358	173	8	5b	5b	NOUN
app01-10358	173	9	indicate	indicate	VERB
app01-10358	173	10	the	the	DET
app01-10358	173	11	de41	de41	PROPN
app01-10358	173	12	františek	františek	NOUN
app01-10358	173	13	lofaj	lofaj	ADJ
app01-10358	173	14	acta	acta	PROPN
app01-10358	173	15	polytechnica	polytechnica	PROPN
app01-10358	173	16	ctu	ctu	NOUN
app01-10358	173	17	proceedings	proceeding	NOUN
app01-10358	173	18	pendences	pendence	NOUN
app01-10358	173	19	in	in	ADP
app01-10358	173	20	the	the	DET
app01-10358	173	21	reference	reference	NOUN
app01-10358	173	22	tizrhf	tizrhf	PROPN
app01-10358	173	23	-	-	PUNCT
app01-10358	173	24	ny	ny	PROPN
app01-10358	173	25	(	(	PUNCT
app01-10358	173	26	me	i	PRON
app01-10358	173	27	=	=	SYM
app01-10358	173	28	0	0	NUM
app01-10358	173	29	)	)	PUNCT
app01-10358	173	30	and	and	CCONJ
app01-10358	173	31	tizrhfvnbta	tizrhfvnbta	NOUN
app01-10358	173	32	-	-	PUNCT
app01-10358	173	33	ny	ny	INTJ
app01-10358	173	34	(	(	PUNCT
app01-10358	173	35	me	i	PRON
app01-10358	173	36	=	=	PUNCT
app01-10358	173	37	vnbta	vnbta	PROPN
app01-10358	173	38	)	)	PUNCT
app01-10358	173	39	coatings	coating	NOUN
app01-10358	173	40	,	,	PUNCT
app01-10358	173	41	respectively	respectively	ADV
app01-10358	173	42	,	,	PUNCT
app01-10358	173	43	as	as	ADP
app01-10358	173	44	a	a	DET
app01-10358	173	45	function	function	NOUN
app01-10358	173	46	of	of	ADP
app01-10358	173	47	nitrogen	nitrogen	NOUN
app01-10358	173	48	flow	flow	NOUN
app01-10358	173	49	.	.	PUNCT
app01-10358	174	1	the	the	DET
app01-10358	174	2	broken	broken	ADJ
app01-10358	174	3	lines	line	NOUN
app01-10358	174	4	correspond	correspond	VERB
app01-10358	174	5	to	to	ADP
app01-10358	174	6	tizrhf+me	tizrhf+me	NOUN
app01-10358	174	7	-	-	PUNCT
app01-10358	174	8	ny	ny	NOUN
app01-10358	174	9	.	.	PUNCT
app01-10358	175	1	the	the	DET
app01-10358	175	2	highest	high	ADJ
app01-10358	175	3	values	value	NOUN
app01-10358	175	4	in	in	ADP
app01-10358	175	5	all	all	DET
app01-10358	175	6	systems	system	NOUN
app01-10358	175	7	were	be	AUX
app01-10358	175	8	above	above	ADP
app01-10358	175	9	certain	certain	ADJ
app01-10358	175	10	critical	critical	ADJ
app01-10358	175	11	flow	flow	NOUN
app01-10358	175	12	of	of	ADP
app01-10358	175	13	nitrogen	nitrogen	NOUN
app01-10358	175	14	which	which	PRON
app01-10358	175	15	was	be	AUX
app01-10358	175	16	around	around	ADV
app01-10358	175	17	6	6	NUM
app01-10358	175	18	sccm	sccm	NOUN
app01-10358	175	19	n2	n2	PROPN
app01-10358	175	20	when	when	SCONJ
app01-10358	175	21	stoichiometry	stoichiometry	PROPN
app01-10358	175	22	was	be	AUX
app01-10358	175	23	achieved	achieve	VERB
app01-10358	175	24	[	[	PUNCT
app01-10358	175	25	30	30	NUM
app01-10358	175	26	]	]	PUNCT
app01-10358	175	27	.	.	PUNCT
app01-10358	176	1	the	the	DET
app01-10358	176	2	curves	curve	NOUN
app01-10358	176	3	in	in	ADP
app01-10358	176	4	tizrhf	tizrhf	PROPN
app01-10358	176	5	-	-	PUNCT
app01-10358	176	6	ny	ny	NOUN
app01-10358	176	7	coatings	coating	NOUN
app01-10358	176	8	were	be	AUX
app01-10358	176	9	above	above	ADP
app01-10358	176	10	all	all	DET
app01-10358	176	11	other	other	ADJ
app01-10358	176	12	curves	curve	NOUN
app01-10358	176	13	and	and	CCONJ
app01-10358	176	14	also	also	ADV
app01-10358	176	15	the	the	DET
app01-10358	176	16	maximum	maximum	ADJ
app01-10358	176	17	eit	eit	NOUN
app01-10358	177	1	=	=	NOUN
app01-10358	178	1	490gpa	490gpa	NUM
app01-10358	179	1	and	and	CCONJ
app01-10358	179	2	hit	hit	VERB
app01-10358	179	3	=	=	SYM
app01-10358	179	4	39gpa	39gpa	NOUN
app01-10358	179	5	were	be	AUX
app01-10358	179	6	obtained	obtain	VERB
app01-10358	179	7	in	in	ADP
app01-10358	179	8	this	this	DET
app01-10358	179	9	system	system	NOUN
app01-10358	179	10	.	.	PUNCT
app01-10358	180	1	despite	despite	SCONJ
app01-10358	180	2	limited	limited	ADJ
app01-10358	180	3	reliability	reliability	NOUN
app01-10358	180	4	of	of	ADP
app01-10358	180	5	the	the	DET
app01-10358	180	6	absolute	absolute	ADJ
app01-10358	180	7	values	value	NOUN
app01-10358	180	8	,	,	PUNCT
app01-10358	180	9	good	good	ADJ
app01-10358	180	10	agreement	agreement	NOUN
app01-10358	180	11	with	with	ADP
app01-10358	180	12	the	the	DET
app01-10358	180	13	properties	property	NOUN
app01-10358	180	14	reported	report	VERB
app01-10358	180	15	for	for	ADP
app01-10358	180	16	similar	similar	ADJ
app01-10358	180	17	multi	multi	ADJ
app01-10358	180	18	-	-	ADJ
app01-10358	180	19	transition	transition	ADJ
app01-10358	180	20	metal	metal	NOUN
app01-10358	180	21	nitrides	nitride	NOUN
app01-10358	180	22	produced	produce	VERB
app01-10358	180	23	by	by	ADP
app01-10358	180	24	reactive	reactive	ADJ
app01-10358	180	25	dc	dc	PROPN
app01-10358	180	26	magnetron	magnetron	PROPN
app01-10358	180	27	sputtering	sputtering	NOUN
app01-10358	180	28	[	[	X
app01-10358	180	29	32	32	NUM
app01-10358	180	30	]	]	PUNCT
app01-10358	180	31	was	be	AUX
app01-10358	180	32	obtained	obtain	VERB
app01-10358	180	33	.	.	PUNCT
app01-10358	181	1	the	the	DET
app01-10358	181	2	relative	relative	ADJ
app01-10358	181	3	comparison	comparison	NOUN
app01-10358	181	4	indicates	indicate	VERB
app01-10358	181	5	that	that	SCONJ
app01-10358	181	6	the	the	DET
app01-10358	181	7	additions	addition	NOUN
app01-10358	181	8	of	of	ADP
app01-10358	181	9	me	i	PRON
app01-10358	181	10	=	=	SYM
app01-10358	181	11	v	v	PROPN
app01-10358	181	12	,	,	PUNCT
app01-10358	181	13	nb	nb	INTJ
app01-10358	181	14	,	,	PUNCT
app01-10358	181	15	ta	ta	PROPN
app01-10358	181	16	and	and	CCONJ
app01-10358	181	17	vnbta	vnbta	PROPN
app01-10358	181	18	caused	cause	VERB
app01-10358	181	19	small	small	ADJ
app01-10358	181	20	degradation	degradation	NOUN
app01-10358	181	21	of	of	ADP
app01-10358	181	22	hit	hit	NOUN
app01-10358	181	23	and	and	CCONJ
app01-10358	181	24	eit	eit	NOUN
app01-10358	181	25	which	which	PRON
app01-10358	181	26	became	become	VERB
app01-10358	181	27	more	more	ADV
app01-10358	181	28	visible	visible	ADJ
app01-10358	181	29	at	at	ADP
app01-10358	181	30	higher	high	ADJ
app01-10358	181	31	nitrogen	nitrogen	NOUN
app01-10358	181	32	flows	flow	NOUN
app01-10358	181	33	.	.	PUNCT
app01-10358	182	1	the	the	DET
app01-10358	182	2	smallest	small	ADJ
app01-10358	182	3	degradation	degradation	NOUN
app01-10358	182	4	seems	seem	VERB
app01-10358	182	5	to	to	PART
app01-10358	182	6	be	be	AUX
app01-10358	182	7	in	in	ADP
app01-10358	182	8	the	the	DET
app01-10358	182	9	coatings	coating	NOUN
app01-10358	182	10	with	with	ADP
app01-10358	182	11	me	i	PRON
app01-10358	183	1	=	=	SYM
app01-10358	183	2	nb	nb	INTJ
app01-10358	183	3	whereas	whereas	SCONJ
app01-10358	183	4	it	it	PRON
app01-10358	183	5	is	be	AUX
app01-10358	183	6	the	the	DET
app01-10358	183	7	most	most	ADV
app01-10358	183	8	pronounced	pronounce	VERB
app01-10358	183	9	in	in	ADP
app01-10358	183	10	tizrhfvnbta	tizrhfvnbta	NOUN
app01-10358	183	11	-	-	PUNCT
app01-10358	183	12	n	n	PRON
app01-10358	183	13	system	system	NOUN
app01-10358	183	14	.	.	PUNCT
app01-10358	184	1	thus	thus	ADV
app01-10358	184	2	,	,	PUNCT
app01-10358	184	3	the	the	DET
app01-10358	184	4	“	"	PUNCT
app01-10358	184	5	cocktail	cocktail	NOUN
app01-10358	184	6	effect	effect	NOUN
app01-10358	184	7	”	"	PUNCT
app01-10358	184	8	resulting	result	VERB
app01-10358	184	9	from	from	ADP
app01-10358	184	10	the	the	DET
app01-10358	184	11	additions	addition	NOUN
app01-10358	184	12	of	of	ADP
app01-10358	184	13	additional	additional	ADJ
app01-10358	184	14	elements	element	NOUN
app01-10358	184	15	considered	consider	VERB
app01-10358	184	16	in	in	ADP
app01-10358	184	17	the	the	DET
app01-10358	184	18	high	high	ADJ
app01-10358	184	19	entropy	entropy	NOUN
app01-10358	184	20	alloys	alloy	NOUN
app01-10358	184	21	,	,	PUNCT
app01-10358	184	22	seems	seem	VERB
app01-10358	184	23	to	to	PART
app01-10358	184	24	be	be	AUX
app01-10358	184	25	negligible	negligible	ADJ
app01-10358	184	26	or	or	CCONJ
app01-10358	184	27	might	might	AUX
app01-10358	184	28	be	be	AUX
app01-10358	184	29	even	even	ADV
app01-10358	184	30	negative	negative	ADJ
app01-10358	184	31	in	in	ADP
app01-10358	184	32	tizrhf	tizrhf	PROPN
app01-10358	184	33	-	-	PUNCT
app01-10358	184	34	me	i	PRON
app01-10358	184	35	-	-	PUNCT
app01-10358	184	36	ny	ny	NOUN
app01-10358	184	37	coatings	coating	NOUN
app01-10358	184	38	.	.	PUNCT
app01-10358	185	1	4	4	X
app01-10358	185	2	.	.	X
app01-10358	185	3	conclusions	conclusion	NOUN
app01-10358	185	4	the	the	DET
app01-10358	185	5	results	result	NOUN
app01-10358	185	6	of	of	ADP
app01-10358	185	7	the	the	DET
app01-10358	185	8	current	current	ADJ
app01-10358	185	9	study	study	NOUN
app01-10358	185	10	suggest	suggest	VERB
app01-10358	185	11	that	that	SCONJ
app01-10358	185	12	the	the	DET
app01-10358	185	13	influence	influence	NOUN
app01-10358	185	14	of	of	ADP
app01-10358	185	15	substrate	substrate	NOUN
app01-10358	185	16	stiffness	stiffness	NOUN
app01-10358	185	17	is	be	AUX
app01-10358	185	18	still	still	ADV
app01-10358	185	19	not	not	PART
app01-10358	185	20	fully	fully	ADV
app01-10358	185	21	eliminated	eliminate	VERB
app01-10358	185	22	in	in	ADP
app01-10358	185	23	the	the	DET
app01-10358	185	24	evaluation	evaluation	NOUN
app01-10358	185	25	of	of	ADP
app01-10358	185	26	indentation	indentation	NOUN
app01-10358	185	27	modulus	modulus	NOUN
app01-10358	185	28	which	which	PRON
app01-10358	185	29	causes	cause	VERB
app01-10358	185	30	systematic	systematic	ADJ
app01-10358	185	31	differences	difference	NOUN
app01-10358	185	32	exceeding	exceed	VERB
app01-10358	185	33	measurement	measurement	NOUN
app01-10358	185	34	scatter	scatter	NOUN
app01-10358	185	35	between	between	ADP
app01-10358	185	36	coatings	coating	NOUN
app01-10358	185	37	deposited	deposit	VERB
app01-10358	185	38	on	on	ADP
app01-10358	185	39	sufficiently	sufficiently	ADV
app01-10358	185	40	different	different	ADJ
app01-10358	185	41	substrates	substrate	NOUN
app01-10358	185	42	(	(	PUNCT
app01-10358	185	43	without	without	ADP
app01-10358	185	44	consideration	consideration	NOUN
app01-10358	185	45	of	of	ADP
app01-10358	185	46	substrate	substrate	NOUN
app01-10358	185	47	influence	influence	NOUN
app01-10358	185	48	on	on	ADP
app01-10358	185	49	coating	coat	VERB
app01-10358	185	50	growth	growth	NOUN
app01-10358	185	51	and	and	CCONJ
app01-10358	185	52	structure	structure	NOUN
app01-10358	185	53	)	)	PUNCT
app01-10358	185	54	.	.	PUNCT
app01-10358	186	1	to	to	PART
app01-10358	186	2	keep	keep	VERB
app01-10358	186	3	the	the	DET
app01-10358	186	4	systematic	systematic	ADJ
app01-10358	186	5	error	error	NOUN
app01-10358	186	6	the	the	DET
app01-10358	186	7	same	same	ADJ
app01-10358	186	8	and	and	CCONJ
app01-10358	186	9	to	to	PART
app01-10358	186	10	obtain	obtain	VERB
app01-10358	186	11	comparable	comparable	ADJ
app01-10358	186	12	relative	relative	ADJ
app01-10358	186	13	results	result	NOUN
app01-10358	186	14	,	,	PUNCT
app01-10358	186	15	nanoindentation	nanoindentation	NOUN
app01-10358	186	16	should	should	AUX
app01-10358	186	17	be	be	AUX
app01-10358	186	18	performed	perform	VERB
app01-10358	186	19	using	use	VERB
app01-10358	186	20	the	the	DET
app01-10358	186	21	same	same	ADJ
app01-10358	186	22	test	test	NOUN
app01-10358	186	23	parameters	parameter	NOUN
app01-10358	186	24	,	,	PUNCT
app01-10358	186	25	method	method	NOUN
app01-10358	186	26	for	for	ADP
app01-10358	186	27	depth	depth	NOUN
app01-10358	186	28	profile	profile	NOUN
app01-10358	186	29	acquisition	acquisition	NOUN
app01-10358	186	30	,	,	PUNCT
app01-10358	186	31	data	datum	NOUN
app01-10358	186	32	evaluation	evaluation	NOUN
app01-10358	186	33	procedure	procedure	NOUN
app01-10358	186	34	and	and	CCONJ
app01-10358	186	35	coatings	coating	NOUN
app01-10358	186	36	with	with	ADP
app01-10358	186	37	similar	similar	ADJ
app01-10358	186	38	thicknesses	thickness	NOUN
app01-10358	186	39	on	on	ADP
app01-10358	186	40	the	the	DET
app01-10358	186	41	same	same	ADJ
app01-10358	186	42	type	type	NOUN
app01-10358	186	43	of	of	ADP
app01-10358	186	44	substrate	substrate	NOUN
app01-10358	186	45	.	.	PUNCT
app01-10358	187	1	the	the	DET
app01-10358	187	2	application	application	NOUN
app01-10358	187	3	of	of	ADP
app01-10358	187	4	these	these	DET
app01-10358	187	5	rules	rule	NOUN
app01-10358	187	6	to	to	ADP
app01-10358	187	7	nanoindentation	nanoindentation	NOUN
app01-10358	187	8	on	on	ADP
app01-10358	187	9	tizrhf+me	tizrhf+me	ADJ
app01-10358	187	10	-	-	PUNCT
app01-10358	187	11	ny	ny	NOUN
app01-10358	187	12	coatings	coating	NOUN
app01-10358	187	13	deposited	deposit	VERB
app01-10358	187	14	by	by	ADP
app01-10358	187	15	reactive	reactive	ADJ
app01-10358	187	16	hitus	hitus	NOUN
app01-10358	187	17	showed	show	VERB
app01-10358	187	18	that	that	SCONJ
app01-10358	187	19	the	the	DET
app01-10358	187	20	addition	addition	NOUN
app01-10358	187	21	of	of	ADP
app01-10358	187	22	me	i	PRON
app01-10358	187	23	=	=	SYM
app01-10358	187	24	v	v	PROPN
app01-10358	187	25	,	,	PUNCT
app01-10358	187	26	nb	nb	INTJ
app01-10358	187	27	,	,	PUNCT
app01-10358	187	28	ta	ta	PROPN
app01-10358	187	29	and	and	CCONJ
app01-10358	187	30	vnbta	vnbta	PROPN
app01-10358	187	31	caused	cause	VERB
app01-10358	187	32	some	some	DET
app01-10358	187	33	degradation	degradation	NOUN
app01-10358	187	34	of	of	ADP
app01-10358	187	35	mechanical	mechanical	ADJ
app01-10358	187	36	properties	property	NOUN
app01-10358	187	37	indicating	indicate	VERB
app01-10358	187	38	negligible	negligible	ADJ
app01-10358	187	39	or	or	CCONJ
app01-10358	187	40	even	even	ADV
app01-10358	187	41	negative	negative	ADJ
app01-10358	187	42	“	"	PUNCT
app01-10358	187	43	cocktail	cocktail	NOUN
app01-10358	187	44	effect	effect	NOUN
app01-10358	187	45	”	"	PUNCT
app01-10358	187	46	.	.	PUNCT
app01-10358	188	1	acknowledgements	acknowledgement	NOUN
app01-10358	188	2	this	this	DET
app01-10358	188	3	work	work	NOUN
app01-10358	188	4	was	be	AUX
app01-10358	188	5	supported	support	VERB
app01-10358	188	6	by	by	ADP
app01-10358	188	7	the	the	DET
app01-10358	188	8	slovak	slovak	PROPN
app01-10358	188	9	academy	academy	PROPN
app01-10358	188	10	of	of	ADP
app01-10358	188	11	sciences	sciences	PROPN
app01-10358	188	12	via	via	ADP
app01-10358	188	13	the	the	DET
app01-10358	188	14	international	international	PROPN
app01-10358	188	15	visegrad	visegrad	PROPN
app01-10358	188	16	fund	fund	PROPN
app01-10358	188	17	(	(	PUNCT
app01-10358	188	18	project	project	NOUN
app01-10358	188	19	jp39421	jp39421	PROPN
app01-10358	188	20	of	of	ADP
app01-10358	188	21	v4	v4	PROPN
app01-10358	188	22	-	-	PUNCT
app01-10358	188	23	japan	japan	PROPN
app01-10358	188	24	joint	joint	PROPN
app01-10358	188	25	research	research	NOUN
app01-10358	188	26	program	program	NOUN
app01-10358	188	27	)	)	PUNCT
app01-10358	188	28	and	and	CCONJ
app01-10358	188	29	slovak	slovak	ADJ
app01-10358	188	30	research	research	NOUN
app01-10358	188	31	and	and	CCONJ
app01-10358	188	32	development	development	NOUN
app01-10358	188	33	agency	agency	PROPN
app01-10358	188	34	(	(	PUNCT
app01-10358	188	35	project	project	NOUN
app01-10358	188	36	apvv	apvv	X
app01-10358	188	37	21	21	NUM
app01-10358	188	38	-	-	PUNCT
app01-10358	188	39	0042	0042	NUM
app01-10358	188	40	)	)	PUNCT
app01-10358	188	41	.	.	PUNCT
app01-10358	189	1	references	reference	NOUN
app01-10358	189	2	[	[	X
app01-10358	189	3	1	1	NUM
app01-10358	189	4	]	]	PUNCT
app01-10358	189	5	h.	h.	PROPN
app01-10358	189	6	bückle	bückle	PROPN
app01-10358	189	7	.	.	PUNCT
app01-10358	190	1	progress	progress	NOUN
app01-10358	190	2	in	in	ADP
app01-10358	190	3	micro	micro	NOUN
app01-10358	190	4	-	-	NOUN
app01-10358	190	5	indentation	indentation	NOUN
app01-10358	190	6	hardness	hardness	NOUN
app01-10358	190	7	testing	testing	NOUN
app01-10358	190	8	.	.	PUNCT
app01-10358	191	1	metallurgical	metallurgical	ADJ
app01-10358	191	2	reviews	review	NOUN
app01-10358	191	3	4(1):49–100	4(1):49–100	NUM
app01-10358	191	4	,	,	PUNCT
app01-10358	191	5	1959	1959	NUM
app01-10358	191	6	.	.	PUNCT
app01-10358	192	1	https://doi.org/10.1179/095066059790421746	https://doi.org/10.1179/095066059790421746	PRON
app01-10358	192	2	[	[	X
app01-10358	192	3	2	2	X
app01-10358	192	4	]	]	PUNCT
app01-10358	192	5	h.	h.	PROPN
app01-10358	192	6	l.	l.	PROPN
app01-10358	192	7	mencken	mencken	PROPN
app01-10358	192	8	quotes	quote	VERB
app01-10358	192	9	.	.	PUNCT
app01-10358	193	1	[	[	X
app01-10358	193	2	2024	2024	NUM
app01-10358	193	3	-	-	SYM
app01-10358	193	4	08	08	NUM
app01-10358	193	5	-	-	SYM
app01-10358	193	6	28	28	NUM
app01-10358	193	7	]	]	PUNCT
app01-10358	193	8	.	.	PUNCT
app01-10358	194	1	https://www	https://www	PROPN
app01-10358	194	2	.	.	PUNCT
app01-10358	195	1	brainyquote.com/authors/h-l-mencken-quotes	brainyquote.com/authors/h-l-mencken-quote	NOUN
app01-10358	195	2	[	[	X
app01-10358	195	3	3	3	NUM
app01-10358	195	4	]	]	PUNCT
app01-10358	195	5	a.	a.	NOUN
app01-10358	195	6	c.	c.	PROPN
app01-10358	195	7	fischer	fischer	PROPN
app01-10358	195	8	-	-	PUNCT
app01-10358	195	9	cripps	cripps	PROPN
app01-10358	195	10	.	.	PUNCT
app01-10358	196	1	nanoindentation	nanoindentation	NOUN
app01-10358	196	2	.	.	PUNCT
app01-10358	197	1	springer	springer	NOUN
app01-10358	197	2	,	,	PUNCT
app01-10358	197	3	new	new	PROPN
app01-10358	197	4	york	york	PROPN
app01-10358	197	5	,	,	PUNCT
app01-10358	197	6	2004	2004	NUM
app01-10358	197	7	.	.	PUNCT
app01-10358	198	1	second	second	ADJ
app01-10358	198	2	printing	printing	NOUN
app01-10358	198	3	.	.	PUNCT
app01-10358	199	1	[	[	X
app01-10358	199	2	4	4	X
app01-10358	199	3	]	]	PUNCT
app01-10358	199	4	s.	s.	PROPN
app01-10358	199	5	zak	zak	PROPN
app01-10358	199	6	,	,	PUNCT
app01-10358	199	7	c.	c.	PROPN
app01-10358	199	8	o.	o.	PROPN
app01-10358	199	9	w.	w.	PROPN
app01-10358	199	10	trost	trost	PROPN
app01-10358	199	11	,	,	PUNCT
app01-10358	199	12	p.	p.	NOUN
app01-10358	199	13	kreiml	kreiml	NOUN
app01-10358	199	14	,	,	PUNCT
app01-10358	199	15	m.	m.	NOUN
app01-10358	199	16	j.	j.	PROPN
app01-10358	199	17	cordill	cordill	PROPN
app01-10358	199	18	.	.	PUNCT
app01-10358	200	1	accurate	accurate	ADJ
app01-10358	200	2	measurement	measurement	NOUN
app01-10358	200	3	of	of	ADP
app01-10358	200	4	thin	thin	ADJ
app01-10358	200	5	film	film	NOUN
app01-10358	200	6	mechanical	mechanical	ADJ
app01-10358	200	7	properties	property	NOUN
app01-10358	200	8	using	use	VERB
app01-10358	200	9	nanoindentation	nanoindentation	NOUN
app01-10358	200	10	.	.	PUNCT
app01-10358	201	1	journal	journal	NOUN
app01-10358	201	2	of	of	ADP
app01-10358	201	3	materials	material	NOUN
app01-10358	201	4	research	research	NOUN
app01-10358	201	5	37(7):1373–1389	37(7):1373–1389	NUM
app01-10358	201	6	,	,	PUNCT
app01-10358	201	7	2022	2022	NUM
app01-10358	201	8	.	.	PUNCT
app01-10358	202	1	https://doi.org/10.1557/s43578-022-00541-1	https://doi.org/10.1557/s43578-022-00541-1	NUM
app01-10358	203	1	[	[	X
app01-10358	203	2	5	5	X
app01-10358	203	3	]	]	PUNCT
app01-10358	203	4	j.	j.	PROPN
app01-10358	203	5	hay	hay	PROPN
app01-10358	203	6	,	,	PUNCT
app01-10358	203	7	b.	b.	PROPN
app01-10358	203	8	crawford	crawford	PROPN
app01-10358	203	9	.	.	PUNCT
app01-10358	203	10	measuring	measure	VERB
app01-10358	203	11	substrate	substrate	NOUN
app01-10358	203	12	-	-	PUNCT
app01-10358	203	13	independent	independent	ADJ
app01-10358	203	14	modulus	modulus	NOUN
app01-10358	203	15	of	of	ADP
app01-10358	203	16	thin	thin	ADJ
app01-10358	203	17	films	film	NOUN
app01-10358	203	18	.	.	PUNCT
app01-10358	204	1	journal	journal	NOUN
app01-10358	204	2	of	of	ADP
app01-10358	204	3	materials	material	NOUN
app01-10358	204	4	research	research	NOUN
app01-10358	204	5	26:727–738	26:727–738	NUM
app01-10358	204	6	,	,	PUNCT
app01-10358	204	7	2011	2011	NUM
app01-10358	204	8	.	.	PUNCT
app01-10358	205	1	https://doi.org/10.1557/jmr.2011.8	https://doi.org/10.1557/jmr.2011.8	PROPN
app01-10358	206	1	[	[	X
app01-10358	206	2	6	6	NUM
app01-10358	206	3	]	]	PUNCT
app01-10358	206	4	a.	a.	NOUN
app01-10358	206	5	lassnig	lassnig	PROPN
app01-10358	206	6	,	,	PUNCT
app01-10358	206	7	s.	s.	PROPN
app01-10358	206	8	zak	zak	PROPN
app01-10358	206	9	.	.	PUNCT
app01-10358	207	1	precise	precise	ADJ
app01-10358	207	2	determination	determination	NOUN
app01-10358	207	3	of	of	ADP
app01-10358	207	4	young	young	ADJ
app01-10358	207	5	’s	’s	PART
app01-10358	207	6	modulus	modulus	NOUN
app01-10358	207	7	of	of	ADP
app01-10358	207	8	amorphous	amorphous	ADJ
app01-10358	207	9	cuzr	cuzr	PROPN
app01-10358	207	10	/	/	SYM
app01-10358	207	11	nanocrystalline	nanocrystalline	PROPN
app01-10358	207	12	cu	cu	PROPN
app01-10358	207	13	multilayer	multilayer	NOUN
app01-10358	207	14	via	via	ADP
app01-10358	207	15	nanoindentation	nanoindentation	NOUN
app01-10358	207	16	.	.	PUNCT
app01-10358	208	1	journal	journal	PROPN
app01-10358	208	2	of	of	ADP
app01-10358	208	3	materials	material	NOUN
app01-10358	208	4	research	research	NOUN
app01-10358	208	5	38:3324–3335	38:3324–3335	NUM
app01-10358	208	6	,	,	PUNCT
app01-10358	208	7	2023	2023	NUM
app01-10358	208	8	.	.	PUNCT
app01-10358	209	1	https://doi.org/10.1557/s43578-023-01057-y	https://doi.org/10.1557/s43578-023-01057-y	PROPN
app01-10358	209	2	[	[	X
app01-10358	209	3	7	7	NUM
app01-10358	209	4	]	]	X
app01-10358	209	5	b.	b.	PROPN
app01-10358	209	6	jönsson	jönsson	PROPN
app01-10358	209	7	,	,	PUNCT
app01-10358	209	8	s.	s.	PROPN
app01-10358	209	9	hogmark	hogmark	PROPN
app01-10358	209	10	.	.	PUNCT
app01-10358	210	1	hardness	hardness	ADJ
app01-10358	210	2	measurements	measurement	NOUN
app01-10358	210	3	of	of	ADP
app01-10358	210	4	thin	thin	ADJ
app01-10358	210	5	films	film	NOUN
app01-10358	210	6	.	.	PUNCT
app01-10358	211	1	thin	thin	ADJ
app01-10358	211	2	solid	solid	ADJ
app01-10358	211	3	films	film	NOUN
app01-10358	211	4	114(3):257–269	114(3):257–269	NUM
app01-10358	211	5	,	,	PUNCT
app01-10358	211	6	1984	1984	NUM
app01-10358	211	7	.	.	PUNCT
app01-10358	212	1	https://doi.org/10.1016/0040-6090(84)90123-8	https://doi.org/10.1016/0040-6090(84)90123-8	ADV
app01-10358	212	2	[	[	X
app01-10358	212	3	8	8	NUM
app01-10358	212	4	]	]	PUNCT
app01-10358	212	5	p.	p.	NOUN
app01-10358	212	6	j.	j.	PROPN
app01-10358	212	7	burnett	burnett	PROPN
app01-10358	212	8	,	,	PUNCT
app01-10358	212	9	d.	d.	PROPN
app01-10358	212	10	s.	s.	PROPN
app01-10358	212	11	rickerby	rickerby	PROPN
app01-10358	212	12	.	.	PUNCT
app01-10358	213	1	the	the	DET
app01-10358	213	2	mechanical	mechanical	ADJ
app01-10358	213	3	properties	property	NOUN
app01-10358	213	4	of	of	ADP
app01-10358	213	5	wear	wear	NOUN
app01-10358	213	6	-	-	PUNCT
app01-10358	213	7	resistant	resistant	ADJ
app01-10358	213	8	coatings	coating	NOUN
app01-10358	213	9	:	:	PUNCT
app01-10358	213	10	i	i	PRON
app01-10358	213	11	:	:	PUNCT
app01-10358	213	12	modelling	modelling	NOUN
app01-10358	213	13	of	of	ADP
app01-10358	213	14	hardness	hardness	ADJ
app01-10358	213	15	behaviour	behaviour	NOUN
app01-10358	213	16	.	.	PUNCT
app01-10358	214	1	thin	thin	ADJ
app01-10358	214	2	solid	solid	ADJ
app01-10358	214	3	films	film	NOUN
app01-10358	214	4	148(1):41–50	148(1):41–50	NUM
app01-10358	214	5	,	,	PUNCT
app01-10358	214	6	1987	1987	NUM
app01-10358	214	7	.	.	PUNCT
app01-10358	215	1	https://doi.org/10.1016/0040-6090(87)90119-2	https://doi.org/10.1016/0040-6090(87)90119-2	X
app01-10358	215	2	[	[	X
app01-10358	215	3	9	9	NUM
app01-10358	215	4	]	]	PUNCT
app01-10358	215	5	m.	m.	NOUN
app01-10358	215	6	f.	f.	PROPN
app01-10358	215	7	doerner	doerner	PROPN
app01-10358	215	8	,	,	PUNCT
app01-10358	215	9	w.	w.	PROPN
app01-10358	215	10	d.	d.	PROPN
app01-10358	215	11	nix	nix	PROPN
app01-10358	215	12	.	.	PUNCT
app01-10358	216	1	a	a	DET
app01-10358	216	2	method	method	NOUN
app01-10358	216	3	for	for	ADP
app01-10358	216	4	interpreting	interpret	VERB
app01-10358	216	5	the	the	DET
app01-10358	216	6	data	datum	NOUN
app01-10358	216	7	from	from	ADP
app01-10358	216	8	depth	depth	NOUN
app01-10358	216	9	-	-	PUNCT
app01-10358	216	10	sensing	sense	VERB
app01-10358	216	11	indentation	indentation	NOUN
app01-10358	216	12	instruments	instrument	NOUN
app01-10358	216	13	.	.	PUNCT
app01-10358	217	1	journal	journal	NOUN
app01-10358	217	2	of	of	ADP
app01-10358	217	3	materials	material	NOUN
app01-10358	217	4	research	research	NOUN
app01-10358	217	5	1(4):601–609	1(4):601–609	NOUN
app01-10358	217	6	,	,	PUNCT
app01-10358	217	7	1986	1986	NUM
app01-10358	217	8	.	.	PUNCT
app01-10358	218	1	https://doi.org/10.1557/jmr.1986.0601	https://doi.org/10.1557/jmr.1986.0601	NOUN
app01-10358	219	1	[	[	X
app01-10358	219	2	10	10	NUM
app01-10358	219	3	]	]	PUNCT
app01-10358	219	4	j.	j.	PROPN
app01-10358	219	5	l.	l.	PROPN
app01-10358	219	6	he	he	PRON
app01-10358	219	7	,	,	PUNCT
app01-10358	219	8	w.	w.	PROPN
app01-10358	219	9	z.	z.	PROPN
app01-10358	219	10	li	li	PROPN
app01-10358	219	11	,	,	PUNCT
app01-10358	219	12	h.	h.	PROPN
app01-10358	219	13	d.	d.	PROPN
app01-10358	219	14	li	li	PROPN
app01-10358	219	15	.	.	PROPN
app01-10358	219	16	hardness	hardness	PROPN
app01-10358	219	17	measurement	measurement	NOUN
app01-10358	219	18	of	of	ADP
app01-10358	219	19	thin	thin	ADJ
app01-10358	219	20	films	film	NOUN
app01-10358	219	21	:	:	PUNCT
app01-10358	219	22	separation	separation	NOUN
app01-10358	219	23	from	from	ADP
app01-10358	219	24	composite	composite	ADJ
app01-10358	219	25	hardness	hardness	NOUN
app01-10358	219	26	.	.	PUNCT
app01-10358	220	1	applied	apply	VERB
app01-10358	220	2	physics	physics	NOUN
app01-10358	220	3	letters	letter	NOUN
app01-10358	220	4	69(10):1402–1404	69(10):1402–1404	PROPN
app01-10358	220	5	,	,	PUNCT
app01-10358	220	6	1996	1996	NUM
app01-10358	220	7	.	.	PUNCT
app01-10358	221	1	https://doi.org/10.1063/1.117595	https://doi.org/10.1063/1.117595	PROPN
app01-10358	222	1	[	[	X
app01-10358	222	2	11	11	NUM
app01-10358	222	3	]	]	X
app01-10358	222	4	d.	d.	PROPN
app01-10358	222	5	chicot	chicot	PROPN
app01-10358	222	6	,	,	PUNCT
app01-10358	222	7	j.	j.	PROPN
app01-10358	222	8	lesage	lesage	PROPN
app01-10358	222	9	.	.	PUNCT
app01-10358	223	1	absolute	absolute	ADJ
app01-10358	223	2	hardness	hardness	NOUN
app01-10358	223	3	of	of	ADP
app01-10358	223	4	films	film	NOUN
app01-10358	223	5	and	and	CCONJ
app01-10358	223	6	coatings	coating	NOUN
app01-10358	223	7	.	.	PUNCT
app01-10358	224	1	thin	thin	ADJ
app01-10358	224	2	solid	solid	ADJ
app01-10358	224	3	films	film	NOUN
app01-10358	224	4	254(1	254(1	NUM
app01-10358	224	5	-	-	SYM
app01-10358	224	6	2):123–130	2):123–130	NUM
app01-10358	224	7	,	,	PUNCT
app01-10358	224	8	1995	1995	NUM
app01-10358	224	9	.	.	PUNCT
app01-10358	225	1	https://doi.org/10.1016/0040-6090(94)06239-h	https://doi.org/10.1016/0040-6090(94)06239-h	PROPN
app01-10358	226	1	[	[	X
app01-10358	226	2	12	12	NUM
app01-10358	226	3	]	]	PUNCT
app01-10358	226	4	e.	e.	PROPN
app01-10358	226	5	s.	s.	PROPN
app01-10358	226	6	puchi	puchi	PROPN
app01-10358	226	7	-	-	PUNCT
app01-10358	226	8	cabrera	cabrera	PROPN
app01-10358	226	9	.	.	PUNCT
app01-10358	227	1	a	a	DET
app01-10358	227	2	new	new	ADJ
app01-10358	227	3	model	model	NOUN
app01-10358	227	4	for	for	ADP
app01-10358	227	5	the	the	DET
app01-10358	227	6	computation	computation	NOUN
app01-10358	227	7	of	of	ADP
app01-10358	227	8	the	the	DET
app01-10358	227	9	composite	composite	ADJ
app01-10358	227	10	hardness	hardness	NOUN
app01-10358	227	11	of	of	ADP
app01-10358	227	12	coated	coated	ADJ
app01-10358	227	13	systems	system	NOUN
app01-10358	227	14	.	.	PUNCT
app01-10358	228	1	surface	surface	NOUN
app01-10358	228	2	and	and	CCONJ
app01-10358	228	3	coatings	coating	NOUN
app01-10358	228	4	technology	technology	NOUN
app01-10358	228	5	160(2):177–186	160(2):177–186	NOUN
app01-10358	228	6	,	,	PUNCT
app01-10358	228	7	2002	2002	NUM
app01-10358	228	8	.	.	PUNCT
app01-10358	229	1	https://doi.org/10.1016/s0257-8972(02)00394-8	https://doi.org/10.1016/s0257-8972(02)00394-8	VERB
app01-10358	230	1	[	[	X
app01-10358	230	2	13	13	NUM
app01-10358	230	3	]	]	PUNCT
app01-10358	230	4	s.	s.	PROPN
app01-10358	230	5	j.	j.	PROPN
app01-10358	230	6	bull	bull	PROPN
app01-10358	230	7	.	.	PUNCT
app01-10358	231	1	a	a	DET
app01-10358	231	2	simple	simple	ADJ
app01-10358	231	3	method	method	NOUN
app01-10358	231	4	for	for	ADP
app01-10358	231	5	the	the	DET
app01-10358	231	6	assessment	assessment	NOUN
app01-10358	231	7	of	of	ADP
app01-10358	231	8	the	the	DET
app01-10358	231	9	contact	contact	NOUN
app01-10358	231	10	modulus	modulus	NOUN
app01-10358	231	11	for	for	ADP
app01-10358	231	12	coated	coated	ADJ
app01-10358	231	13	systems	system	NOUN
app01-10358	231	14	.	.	PUNCT
app01-10358	232	1	philosophical	philosophical	ADJ
app01-10358	232	2	magazine	magazine	NOUN
app01-10358	232	3	95(16	95(16	PROPN
app01-10358	232	4	-	-	PUNCT
app01-10358	232	5	18):1907–1927	18):1907–1927	PROPN
app01-10358	232	6	,	,	PUNCT
app01-10358	232	7	2015	2015	NUM
app01-10358	232	8	.	.	PUNCT
app01-10358	233	1	https://doi.org/10.1080/14786435.2014.909612	https://doi.org/10.1080/14786435.2014.909612	PUNCT
app01-10358	234	1	[	[	X
app01-10358	234	2	14	14	NUM
app01-10358	234	3	]	]	PUNCT
app01-10358	234	4	a.	a.	NOUN
app01-10358	234	5	m.	m.	PROPN
app01-10358	234	6	korsunsky	korsunsky	PROPN
app01-10358	234	7	,	,	PUNCT
app01-10358	234	8	m.	m.	PROPN
app01-10358	234	9	r.	r.	PROPN
app01-10358	234	10	mcgurk	mcgurk	PROPN
app01-10358	234	11	,	,	PUNCT
app01-10358	234	12	s.	s.	PROPN
app01-10358	234	13	j.	j.	PROPN
app01-10358	234	14	bull	bull	PROPN
app01-10358	234	15	,	,	PUNCT
app01-10358	234	16	t.	t.	PROPN
app01-10358	234	17	f.	f.	PROPN
app01-10358	234	18	page	page	PROPN
app01-10358	234	19	.	.	PUNCT
app01-10358	235	1	on	on	ADP
app01-10358	235	2	the	the	DET
app01-10358	235	3	hardness	hardness	NOUN
app01-10358	235	4	of	of	ADP
app01-10358	235	5	coated	coated	ADJ
app01-10358	235	6	systems	system	NOUN
app01-10358	235	7	.	.	PUNCT
app01-10358	236	1	surface	surface	NOUN
app01-10358	236	2	and	and	CCONJ
app01-10358	236	3	coatings	coating	NOUN
app01-10358	236	4	technology	technology	NOUN
app01-10358	236	5	99(1):171–183	99(1):171–183	NUM
app01-10358	236	6	,	,	PUNCT
app01-10358	236	7	1998	1998	NUM
app01-10358	236	8	.	.	PUNCT
app01-10358	237	1	https://doi.org/10.1016/s0257-8972(97)00522-7	https://doi.org/10.1016/s0257-8972(97)00522-7	PROPN
app01-10358	238	1	[	[	X
app01-10358	238	2	15	15	NUM
app01-10358	238	3	]	]	X
app01-10358	238	4	g.	g.	PROPN
app01-10358	238	5	huajian	huajian	PROPN
app01-10358	238	6	,	,	PUNCT
app01-10358	238	7	c.	c.	PROPN
app01-10358	238	8	cheng	cheng	PROPN
app01-10358	238	9	-	-	PUNCT
app01-10358	238	10	hsin	hsin	PROPN
app01-10358	238	11	,	,	PUNCT
app01-10358	238	12	l.	l.	PROPN
app01-10358	238	13	jin	jin	PROPN
app01-10358	238	14	.	.	PUNCT
app01-10358	239	1	elastic	elastic	ADJ
app01-10358	239	2	contact	contact	NOUN
app01-10358	239	3	versus	versus	ADP
app01-10358	239	4	indentation	indentation	NOUN
app01-10358	239	5	modeling	modeling	NOUN
app01-10358	239	6	of	of	ADP
app01-10358	239	7	multi	multi	ADJ
app01-10358	239	8	-	-	ADJ
app01-10358	239	9	layered	layered	ADJ
app01-10358	239	10	materials	material	NOUN
app01-10358	239	11	.	.	PUNCT
app01-10358	240	1	international	international	ADJ
app01-10358	240	2	journal	journal	PROPN
app01-10358	240	3	of	of	ADP
app01-10358	240	4	solids	solid	NOUN
app01-10358	240	5	and	and	CCONJ
app01-10358	240	6	structures	structure	NOUN
app01-10358	240	7	29(20):2471–2492	29(20):2471–2492	NUM
app01-10358	240	8	,	,	PUNCT
app01-10358	240	9	1992	1992	NUM
app01-10358	240	10	.	.	PUNCT
app01-10358	241	1	https://doi.org/10.1016/0020-7683(92)90004-d	https://doi.org/10.1016/0020-7683(92)90004-d	PROPN
app01-10358	242	1	[	[	X
app01-10358	242	2	16	16	NUM
app01-10358	242	3	]	]	PUNCT
app01-10358	242	4	j.	j.	PROPN
app01-10358	242	5	menčík	menčík	PROPN
app01-10358	242	6	,	,	PUNCT
app01-10358	242	7	d.	d.	PROPN
app01-10358	242	8	munz	munz	PROPN
app01-10358	242	9	,	,	PUNCT
app01-10358	242	10	e.	e.	PROPN
app01-10358	242	11	quandt	quandt	PROPN
app01-10358	242	12	,	,	PUNCT
app01-10358	242	13	et	et	PROPN
app01-10358	242	14	al	al	PROPN
app01-10358	242	15	.	.	PUNCT
app01-10358	243	1	determination	determination	NOUN
app01-10358	243	2	of	of	ADP
app01-10358	243	3	elastic	elastic	ADJ
app01-10358	243	4	modulus	modulus	NOUN
app01-10358	243	5	of	of	ADP
app01-10358	243	6	thin	thin	ADJ
app01-10358	243	7	layers	layer	NOUN
app01-10358	243	8	using	use	VERB
app01-10358	243	9	nanoindentation	nanoindentation	NOUN
app01-10358	243	10	.	.	PUNCT
app01-10358	244	1	journal	journal	NOUN
app01-10358	244	2	of	of	ADP
app01-10358	244	3	materials	material	NOUN
app01-10358	244	4	research	research	NOUN
app01-10358	244	5	12(9):2475–2484	12(9):2475–2484	NUM
app01-10358	244	6	,	,	PUNCT
app01-10358	244	7	1997	1997	NUM
app01-10358	244	8	.	.	PUNCT
app01-10358	245	1	https://doi.org/10.1557/jmr.1997.0327	https://doi.org/10.1557/jmr.1997.0327	NOUN
app01-10358	246	1	[	[	X
app01-10358	246	2	17	17	NUM
app01-10358	246	3	]	]	PUNCT
app01-10358	246	4	a.	a.	NOUN
app01-10358	246	5	rar	rar	PROPN
app01-10358	246	6	,	,	PUNCT
app01-10358	246	7	h.	h.	PROPN
app01-10358	246	8	song	song	PROPN
app01-10358	246	9	,	,	PUNCT
app01-10358	246	10	g.	g.	PROPN
app01-10358	246	11	m.	m.	PROPN
app01-10358	246	12	pharr	pharr	PROPN
app01-10358	246	13	.	.	PROPN
app01-10358	246	14	assessment	assessment	NOUN
app01-10358	246	15	of	of	ADP
app01-10358	246	16	new	new	ADJ
app01-10358	246	17	relation	relation	NOUN
app01-10358	246	18	for	for	ADP
app01-10358	246	19	the	the	DET
app01-10358	246	20	elastic	elastic	ADJ
app01-10358	246	21	compliance	compliance	NOUN
app01-10358	246	22	of	of	ADP
app01-10358	246	23	a	a	DET
app01-10358	246	24	film	film	NOUN
app01-10358	246	25	-	-	PUNCT
app01-10358	246	26	substrate	substrate	NOUN
app01-10358	246	27	system	system	NOUN
app01-10358	246	28	.	.	PUNCT
app01-10358	247	1	mrs	mrs	PROPN
app01-10358	247	2	online	online	PROPN
app01-10358	247	3	proceedings	proceeding	NOUN
app01-10358	247	4	library	library	VERB
app01-10358	247	5	695:10101	695:10101	NUM
app01-10358	247	6	,	,	PUNCT
app01-10358	247	7	2001	2001	NUM
app01-10358	247	8	.	.	PUNCT
app01-10358	248	1	https://doi.org/10.1557/proc-695-l10.10.1	https://doi.org/10.1557/proc-695-l10.10.1	NOUN
app01-10358	248	2	42	42	NUM
app01-10358	248	3	https://doi.org/10.1179/095066059790421746	https://doi.org/10.1179/095066059790421746	NOUN
app01-10358	248	4	https://www.brainyquote.com/authors/h-l-mencken-quotes	https://www.brainyquote.com/authors/h-l-mencken-quote	VERB
app01-10358	248	5	https://www.brainyquote.com/authors/h-l-mencken-quotes	https://www.brainyquote.com/authors/h-l-mencken-quote	VERB
app01-10358	248	6	https://doi.org/10.1557/s43578-022-00541-1	https://doi.org/10.1557/s43578-022-00541-1	NUM
app01-10358	248	7	https://doi.org/10.1557/jmr.2011.8	https://doi.org/10.1557/jmr.2011.8	ADJ
app01-10358	248	8	https://doi.org/10.1557/s43578-023-01057-y	https://doi.org/10.1557/s43578-023-01057-y	PROPN
app01-10358	248	9	https://doi.org/10.1016/0040-6090(84)90123-8	https://doi.org/10.1016/0040-6090(84)90123-8	PROPN
app01-10358	248	10	https://doi.org/10.1016/0040-6090(87)90119-2	https://doi.org/10.1016/0040-6090(87)90119-2	PROPN
app01-10358	248	11	https://doi.org/10.1557/jmr.1986.0601	https://doi.org/10.1557/jmr.1986.0601	NOUN
app01-10358	248	12	https://doi.org/10.1063/1.117595	https://doi.org/10.1063/1.117595	PROPN
app01-10358	248	13	https://doi.org/10.1016/0040-6090(94)06239-h	https://doi.org/10.1016/0040-6090(94)06239-h	PROPN
app01-10358	249	1	https://doi.org/10.1016/s0257-8972(02)00394-8	https://doi.org/10.1016/s0257-8972(02)00394-8	VERB
app01-10358	249	2	https://doi.org/10.1080/14786435.2014.909612	https://doi.org/10.1080/14786435.2014.909612	NOUN
app01-10358	250	1	https://doi.org/10.1016/s0257-8972(97)00522-7	https://doi.org/10.1016/s0257-8972(97)00522-7	PROPN
app01-10358	250	2	https://doi.org/10.1016/0020-7683(92)90004-d	https://doi.org/10.1016/0020-7683(92)90004-d	INTJ
app01-10358	250	3	https://doi.org/10.1557/jmr.1997.0327	https://doi.org/10.1557/jmr.1997.0327	ADJ
app01-10358	250	4	https://doi.org/10.1557/proc-695-l10.10.1	https://doi.org/10.1557/proc-695-l10.10.1	PROPN
app01-10358	250	5	vol	vol	NOUN
app01-10358	250	6	.	.	PUNCT
app01-10358	251	1	50/2024	50/2024	NUM
app01-10358	251	2	substrate	substrate	NOUN
app01-10358	251	3	effect	effect	NOUN
app01-10358	251	4	in	in	ADP
app01-10358	251	5	the	the	DET
app01-10358	251	6	evaluation	evaluation	NOUN
app01-10358	251	7	of	of	ADP
app01-10358	251	8	elastic	elastic	ADJ
app01-10358	251	9	modulus	modulus	NOUN
app01-10358	251	10	.	.	PUNCT
app01-10358	251	11	.	.	PUNCT
app01-10358	251	12	.	.	PUNCT
app01-10358	252	1	[	[	X
app01-10358	252	2	18	18	NUM
app01-10358	252	3	]	]	X
app01-10358	252	4	iso	iso	NOUN
app01-10358	252	5	14577	14577	NUM
app01-10358	252	6	-	-	SYM
app01-10358	252	7	4:2016	4:2016	NUM
app01-10358	252	8	metallic	metallic	ADJ
app01-10358	252	9	materials	material	NOUN
app01-10358	252	10	:	:	PUNCT
app01-10358	252	11	instrumented	instrumented	ADJ
app01-10358	252	12	indentation	indentation	NOUN
app01-10358	252	13	test	test	NOUN
app01-10358	252	14	for	for	ADP
app01-10358	252	15	hardness	hardness	NOUN
app01-10358	252	16	and	and	CCONJ
app01-10358	252	17	material	material	NOUN
app01-10358	252	18	parameters	parameter	NOUN
app01-10358	252	19	–	–	PUNCT
app01-10358	252	20	part	part	NOUN
app01-10358	252	21	4	4	NUM
app01-10358	252	22	:	:	PUNCT
app01-10358	252	23	test	test	NOUN
app01-10358	252	24	method	method	NOUN
app01-10358	252	25	for	for	ADP
app01-10358	252	26	metallic	metallic	ADJ
app01-10358	252	27	and	and	CCONJ
app01-10358	252	28	non	non	ADJ
app01-10358	252	29	-	-	ADJ
app01-10358	252	30	metallic	metallic	ADJ
app01-10358	252	31	coatings	coating	NOUN
app01-10358	252	32	,	,	PUNCT
app01-10358	252	33	2016	2016	NUM
app01-10358	252	34	.	.	PUNCT
app01-10358	253	1	[	[	X
app01-10358	253	2	19	19	NUM
app01-10358	253	3	]	]	X
app01-10358	253	4	w.	w.	PROPN
app01-10358	253	5	c.	c.	PROPN
app01-10358	253	6	oliver	oliver	PROPN
app01-10358	253	7	,	,	PUNCT
app01-10358	253	8	j.	j.	PROPN
app01-10358	253	9	b.	b.	PROPN
app01-10358	253	10	pethica	pethica	PROPN
app01-10358	253	11	.	.	PUNCT
app01-10358	254	1	method	method	NOUN
app01-10358	254	2	for	for	ADP
app01-10358	254	3	continuous	continuous	ADJ
app01-10358	254	4	determination	determination	NOUN
app01-10358	254	5	of	of	ADP
app01-10358	254	6	the	the	DET
app01-10358	254	7	elastic	elastic	ADJ
app01-10358	254	8	stiffness	stiffness	NOUN
app01-10358	254	9	of	of	ADP
app01-10358	254	10	contact	contact	NOUN
app01-10358	254	11	between	between	ADP
app01-10358	254	12	two	two	NUM
app01-10358	254	13	bodies	body	NOUN
app01-10358	254	14	.	.	PUNCT
app01-10358	255	1	u.s	u.s	PROPN
app01-10358	255	2	.	.	PROPN
app01-10358	255	3	patent	patent	NOUN
app01-10358	255	4	4	4	NUM
app01-10358	255	5	848	848	NUM
app01-10358	255	6	141	141	NUM
app01-10358	255	7	,	,	PUNCT
app01-10358	255	8	18	18	NUM
app01-10358	255	9	july	july	PROPN
app01-10358	255	10	1989	1989	NUM
app01-10358	255	11	.	.	PUNCT
app01-10358	256	1	[	[	X
app01-10358	256	2	20	20	NUM
app01-10358	256	3	]	]	PUNCT
app01-10358	256	4	j.	j.	PROPN
app01-10358	256	5	hay	hay	PROPN
app01-10358	256	6	,	,	PUNCT
app01-10358	256	7	p.	p.	PROPN
app01-10358	256	8	agee	agee	PROPN
app01-10358	256	9	,	,	PUNCT
app01-10358	256	10	e.	e.	PROPN
app01-10358	256	11	herbert	herbert	PROPN
app01-10358	256	12	.	.	PUNCT
app01-10358	257	1	continuous	continuous	ADJ
app01-10358	257	2	stiffness	stiffness	NOUN
app01-10358	257	3	measurement	measurement	NOUN
app01-10358	257	4	during	during	ADP
app01-10358	257	5	instrumented	instrumented	ADJ
app01-10358	257	6	indentation	indentation	NOUN
app01-10358	257	7	testing	testing	NOUN
app01-10358	257	8	.	.	PUNCT
app01-10358	258	1	experimental	experimental	ADJ
app01-10358	258	2	techniques	technique	NOUN
app01-10358	258	3	34:86–94	34:86–94	NUM
app01-10358	258	4	,	,	PUNCT
app01-10358	258	5	2010	2010	NUM
app01-10358	258	6	.	.	PUNCT
app01-10358	259	1	https	https	NOUN
app01-10358	259	2	:	:	PUNCT
app01-10358	260	1	//doi.org/10.1111	//doi.org/10.1111	PROPN
app01-10358	260	2	/	/	SYM
app01-10358	260	3	j.1747	j.1747	PROPN
app01-10358	260	4	-	-	PUNCT
app01-10358	260	5	1567.2010.00618.x	1567.2010.00618.x	PROPN
app01-10358	260	6	[	[	X
app01-10358	261	1	21	21	NUM
app01-10358	261	2	]	]	X
app01-10358	261	3	p.	p.	NOUN
app01-10358	261	4	s.	s.	PROPN
app01-10358	261	5	phani	phani	PROPN
app01-10358	261	6	,	,	PUNCT
app01-10358	261	7	w.	w.	PROPN
app01-10358	261	8	c.	c.	PROPN
app01-10358	261	9	oliver	oliver	PROPN
app01-10358	261	10	,	,	PUNCT
app01-10358	261	11	g.	g.	PROPN
app01-10358	261	12	m.	m.	PROPN
app01-10358	261	13	pharr	pharr	PROPN
app01-10358	261	14	.	.	PUNCT
app01-10358	261	15	measurement	measurement	NOUN
app01-10358	261	16	of	of	ADP
app01-10358	261	17	hardness	hardness	NOUN
app01-10358	261	18	and	and	CCONJ
app01-10358	261	19	elastic	elastic	ADJ
app01-10358	261	20	modulus	modulus	NOUN
app01-10358	261	21	by	by	ADP
app01-10358	261	22	load	load	NOUN
app01-10358	261	23	and	and	CCONJ
app01-10358	261	24	depth	depth	NOUN
app01-10358	261	25	sensing	sense	VERB
app01-10358	261	26	indentation	indentation	NOUN
app01-10358	261	27	:	:	PUNCT
app01-10358	261	28	improvements	improvement	NOUN
app01-10358	261	29	to	to	ADP
app01-10358	261	30	the	the	DET
app01-10358	261	31	technique	technique	NOUN
app01-10358	261	32	based	base	VERB
app01-10358	261	33	on	on	ADP
app01-10358	261	34	continuous	continuous	ADJ
app01-10358	261	35	stiffness	stiffness	NOUN
app01-10358	261	36	measurement	measurement	NOUN
app01-10358	261	37	.	.	PUNCT
app01-10358	262	1	journal	journal	NOUN
app01-10358	262	2	of	of	ADP
app01-10358	262	3	materials	material	NOUN
app01-10358	262	4	research	research	NOUN
app01-10358	262	5	36(11):2137–2153	36(11):2137–2153	NUM
app01-10358	262	6	,	,	PUNCT
app01-10358	262	7	2021	2021	NUM
app01-10358	262	8	.	.	PUNCT
app01-10358	263	1	https://doi.org/10.1557/s43578-021-00131-7	https://doi.org/10.1557/s43578-021-00131-7	NUM
app01-10358	263	2	[	[	X
app01-10358	263	3	22	22	NUM
app01-10358	263	4	]	]	X
app01-10358	263	5	b.	b.	PROPN
app01-10358	263	6	merle	merle	PROPN
app01-10358	263	7	,	,	PUNCT
app01-10358	263	8	v.	v.	ADP
app01-10358	263	9	maier	maier	NOUN
app01-10358	263	10	-	-	PUNCT
app01-10358	263	11	kiener	kiener	NOUN
app01-10358	263	12	,	,	PUNCT
app01-10358	263	13	g.	g.	PROPN
app01-10358	263	14	m.	m.	PROPN
app01-10358	263	15	pharr	pharr	PROPN
app01-10358	263	16	.	.	PUNCT
app01-10358	264	1	influence	influence	NOUN
app01-10358	264	2	of	of	ADP
app01-10358	264	3	modulus	modulus	NOUN
app01-10358	264	4	-	-	PUNCT
app01-10358	264	5	to	to	ADP
app01-10358	264	6	-	-	PUNCT
app01-10358	264	7	hardness	hardness	NOUN
app01-10358	264	8	ratio	ratio	NOUN
app01-10358	264	9	and	and	CCONJ
app01-10358	264	10	harmonic	harmonic	ADJ
app01-10358	264	11	parameters	parameter	NOUN
app01-10358	264	12	on	on	ADP
app01-10358	264	13	continuous	continuous	ADJ
app01-10358	264	14	stiffness	stiffness	NOUN
app01-10358	264	15	measurement	measurement	NOUN
app01-10358	264	16	during	during	ADP
app01-10358	264	17	nanoindentation	nanoindentation	NOUN
app01-10358	264	18	.	.	PUNCT
app01-10358	265	1	acta	acta	PROPN
app01-10358	265	2	materialia	materialia	PROPN
app01-10358	265	3	134:167–176	134:167–176	NUM
app01-10358	265	4	,	,	PUNCT
app01-10358	265	5	2017	2017	NUM
app01-10358	265	6	.	.	PUNCT
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app01-10358	267	1	[	[	X
app01-10358	267	2	23	23	NUM
app01-10358	267	3	]	]	PUNCT
app01-10358	267	4	l.	l.	PROPN
app01-10358	267	5	lorenz	lorenz	PROPN
app01-10358	267	6	,	,	PUNCT
app01-10358	267	7	t.	t.	PROPN
app01-10358	267	8	chudoba	chudoba	PROPN
app01-10358	267	9	,	,	PUNCT
app01-10358	267	10	s.	s.	PROPN
app01-10358	267	11	makowski	makowski	PROPN
app01-10358	267	12	,	,	PUNCT
app01-10358	267	13	et	et	PROPN
app01-10358	267	14	al	al	PROPN
app01-10358	267	15	.	.	PUNCT
app01-10358	268	1	indentation	indentation	NOUN
app01-10358	268	2	modulus	modulus	ADJ
app01-10358	268	3	extrapolation	extrapolation	NOUN
app01-10358	268	4	and	and	CCONJ
app01-10358	268	5	thickness	thickness	NOUN
app01-10358	268	6	estimation	estimation	NOUN
app01-10358	268	7	of	of	ADP
app01-10358	268	8	ta	ta	PROPN
app01-10358	268	9	-	-	PUNCT
app01-10358	268	10	c	c	NOUN
app01-10358	268	11	coatings	coating	NOUN
app01-10358	268	12	from	from	ADP
app01-10358	268	13	nanoindentation	nanoindentation	NOUN
app01-10358	268	14	.	.	PUNCT
app01-10358	269	1	journal	journal	PROPN
app01-10358	269	2	of	of	ADP
app01-10358	269	3	materials	material	NOUN
app01-10358	269	4	science	science	NOUN
app01-10358	269	5	56:18740–18748	56:18740–18748	NUM
app01-10358	269	6	,	,	PUNCT
app01-10358	269	7	2021	2021	NUM
app01-10358	269	8	.	.	PUNCT
app01-10358	270	1	https://doi.org/10.1007/s10853-021-06448-2	https://doi.org/10.1007/s10853-021-06448-2	NUM
app01-10358	270	2	[	[	X
app01-10358	270	3	24	24	NUM
app01-10358	270	4	]	]	PUNCT
app01-10358	270	5	f.	f.	PROPN
app01-10358	270	6	lofaj	lofaj	PROPN
app01-10358	270	7	,	,	PUNCT
app01-10358	270	8	t.	t.	PROPN
app01-10358	270	9	csanádi	csanádi	PROPN
app01-10358	270	10	,	,	PUNCT
app01-10358	270	11	l.	l.	PROPN
app01-10358	270	12	kvetková	kvetková	PROPN
app01-10358	270	13	,	,	PUNCT
app01-10358	270	14	et	et	PROPN
app01-10358	270	15	al	al	PROPN
app01-10358	270	16	.	.	PROPN
app01-10358	270	17	micromechanical	micromechanical	ADJ
app01-10358	270	18	properties	property	NOUN
app01-10358	270	19	of	of	ADP
app01-10358	270	20	reactive	reactive	ADJ
app01-10358	270	21	hitus	hitus	NOUN
app01-10358	270	22	tinbvtazrhf	tinbvtazrhf	NOUN
app01-10358	270	23	–	–	PUNCT
app01-10358	270	24	n	n	ADP
app01-10358	270	25	coatings	coating	NOUN
app01-10358	270	26	on	on	ADP
app01-10358	270	27	different	different	ADJ
app01-10358	270	28	substrates	substrate	NOUN
app01-10358	270	29	.	.	PUNCT
app01-10358	271	1	powder	powder	NOUN
app01-10358	271	2	metallurgy	metallurgy	NOUN
app01-10358	271	3	progress	progress	NOUN
app01-10358	271	4	22(1):31–42	22(1):31–42	NUM
app01-10358	271	5	,	,	PUNCT
app01-10358	271	6	2022	2022	NUM
app01-10358	271	7	.	.	PUNCT
app01-10358	272	1	https://doi.org/10.2478/pmp-2022-0005	https://doi.org/10.2478/pmp-2022-0005	PROPN
app01-10358	273	1	[	[	X
app01-10358	273	2	25	25	NUM
app01-10358	273	3	]	]	X
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