id	sid	tid	token	lemma	pos
app01-10361	1	1	acta	acta	PROPN
app01-10361	1	2	polytechnica	polytechnica	PROPN
app01-10361	1	3	ctu	ctu	PROPN
app01-10361	1	4	proceedings	proceeding	NOUN
app01-10361	1	5	https://doi.org/10.14311/app.2024.50.0049	https://doi.org/10.14311/app.2024.50.0049	PROPN
app01-10361	1	6	acta	acta	PROPN
app01-10361	1	7	polytechnica	polytechnica	PROPN
app01-10361	1	8	ctu	ctu	NOUN
app01-10361	1	9	proceedings	proceeding	NOUN
app01-10361	1	10	50:49–54	50:49–54	NUM
app01-10361	1	11	,	,	PUNCT
app01-10361	1	12	2024	2024	NUM
app01-10361	1	13	©	©	ADP
app01-10361	1	14	2024	2024	NUM
app01-10361	1	15	the	the	DET
app01-10361	1	16	author(s	author(s	NOUN
app01-10361	1	17	)	)	PUNCT
app01-10361	1	18	.	.	PUNCT
app01-10361	2	1	licensed	license	VERB
app01-10361	2	2	under	under	ADP
app01-10361	2	3	a	a	DET
app01-10361	2	4	cc	cc	NOUN
app01-10361	2	5	-	-	PUNCT
app01-10361	2	6	by	by	ADP
app01-10361	2	7	4.0	4.0	NUM
app01-10361	2	8	licence	licence	NOUN
app01-10361	2	9	published	publish	VERB
app01-10361	2	10	by	by	ADP
app01-10361	2	11	the	the	DET
app01-10361	2	12	czech	czech	PROPN
app01-10361	2	13	technical	technical	PROPN
app01-10361	2	14	university	university	PROPN
app01-10361	2	15	in	in	ADP
app01-10361	2	16	prague	prague	PROPN
app01-10361	2	17	comparison	comparison	NOUN
app01-10361	2	18	of	of	ADP
app01-10361	2	19	berkovich	berkovich	NOUN
app01-10361	2	20	and	and	CCONJ
app01-10361	2	21	spherical	spherical	ADJ
app01-10361	2	22	tip	tip	NOUN
app01-10361	2	23	indentation	indentation	NOUN
app01-10361	2	24	for	for	ADP
app01-10361	2	25	determining	determine	VERB
app01-10361	2	26	the	the	DET
app01-10361	2	27	young	young	ADJ
app01-10361	2	28	’s	’s	PART
app01-10361	2	29	modulus	modulus	NOUN
app01-10361	2	30	of	of	ADP
app01-10361	2	31	polymer	polymer	NOUN
app01-10361	2	32	thin	thin	ADJ
app01-10361	2	33	films	film	NOUN
app01-10361	2	34	encapsulated	encapsulate	VERB
app01-10361	2	35	by	by	ADP
app01-10361	2	36	a	a	DET
app01-10361	2	37	dielectric	dielectric	ADJ
app01-10361	2	38	marina	marina	NOUN
app01-10361	2	39	melo	melo	PROPN
app01-10361	2	40	de	de	PROPN
app01-10361	2	41	limaa	limaa	PROPN
app01-10361	2	42	,	,	PUNCT
app01-10361	2	43	b,∗	b,∗	NOUN
app01-10361	2	44	,	,	PUNCT
app01-10361	2	45	vincent	vincent	PROPN
app01-10361	2	46	mandrillonb	mandrillonb	PROPN
app01-10361	2	47	,	,	PUNCT
app01-10361	2	48	jennifer	jennifer	PROPN
app01-10361	2	49	hayc	hayc	PROPN
app01-10361	2	50	,	,	PUNCT
app01-10361	2	51	laurent	laurent	NOUN
app01-10361	2	52	-	-	PUNCT
app01-10361	2	53	luc	luc	PROPN
app01-10361	2	54	chapelona	chapelona	PROPN
app01-10361	2	55	,	,	PUNCT
app01-10361	2	56	christophe	christophe	PROPN
app01-10361	2	57	poulainb	poulainb	VERB
app01-10361	2	58	,	,	PUNCT
app01-10361	2	59	olivier	olivier	PROPN
app01-10361	2	60	lebaigued	lebaigue	VERB
app01-10361	2	61	a	a	DET
app01-10361	2	62	stmicroelectronics	stmicroelectronic	NOUN
app01-10361	2	63	,	,	PUNCT
app01-10361	2	64	850	850	NUM
app01-10361	2	65	rue	rue	X
app01-10361	2	66	jean	jean	PROPN
app01-10361	2	67	monnet	monnet	PROPN
app01-10361	2	68	,	,	PUNCT
app01-10361	2	69	38920	38920	NUM
app01-10361	2	70	crolles	crolle	NOUN
app01-10361	2	71	,	,	PUNCT
app01-10361	2	72	france	france	PROPN
app01-10361	2	73	b	b	PROPN
app01-10361	2	74	university	university	PROPN
app01-10361	2	75	grenoble	grenoble	PROPN
app01-10361	2	76	alpes	alpes	PROPN
app01-10361	2	77	,	,	PUNCT
app01-10361	2	78	cea	cea	PROPN
app01-10361	2	79	-	-	PUNCT
app01-10361	2	80	grenoble	grenoble	PROPN
app01-10361	2	81	,	,	PUNCT
app01-10361	2	82	leti	leti	PROPN
app01-10361	2	83	,	,	PUNCT
app01-10361	2	84	17	17	NUM
app01-10361	2	85	avenue	avenue	PROPN
app01-10361	2	86	des	des	PROPN
app01-10361	2	87	martyrs	martyr	NOUN
app01-10361	2	88	,	,	PUNCT
app01-10361	2	89	38054	38054	NUM
app01-10361	2	90	grenoble	grenoble	ADJ
app01-10361	2	91	cedex	cedex	NOUN
app01-10361	2	92	9	9	NUM
app01-10361	2	93	,	,	PUNCT
app01-10361	2	94	france	france	PROPN
app01-10361	2	95	c	c	PROPN
app01-10361	2	96	kla	kla	NOUN
app01-10361	2	97	instruments	instrument	NOUN
app01-10361	2	98	,	,	PUNCT
app01-10361	2	99	105	105	NUM
app01-10361	2	100	meco	meco	NOUN
app01-10361	2	101	lane	lane	NOUN
app01-10361	2	102	,	,	PUNCT
app01-10361	2	103	oak	oak	PROPN
app01-10361	2	104	ridge	ridge	PROPN
app01-10361	2	105	,	,	PUNCT
app01-10361	2	106	tennessee	tennessee	PROPN
app01-10361	2	107	37830	37830	NUM
app01-10361	2	108	,	,	PUNCT
app01-10361	2	109	usa	usa	PROPN
app01-10361	2	110	d	d	PROPN
app01-10361	2	111	university	university	PROPN
app01-10361	2	112	grenoble	grenoble	PROPN
app01-10361	2	113	alpes	alpes	PROPN
app01-10361	2	114	,	,	PUNCT
app01-10361	2	115	cea	cea	PROPN
app01-10361	2	116	-	-	PUNCT
app01-10361	2	117	grenoble	grenoble	PROPN
app01-10361	2	118	,	,	PUNCT
app01-10361	2	119	liten	liten	VERB
app01-10361	2	120	,	,	PUNCT
app01-10361	2	121	17	17	NUM
app01-10361	2	122	avenue	avenue	PROPN
app01-10361	2	123	des	des	PROPN
app01-10361	2	124	martyrs	martyr	NOUN
app01-10361	2	125	,	,	PUNCT
app01-10361	2	126	38054	38054	NUM
app01-10361	2	127	grenoble	grenoble	ADJ
app01-10361	2	128	cedex	cedex	NOUN
app01-10361	2	129	9	9	NUM
app01-10361	2	130	,	,	PUNCT
app01-10361	2	131	france	france	PROPN
app01-10361	2	132	∗	∗	NOUN
app01-10361	2	133	corresponding	correspond	VERB
app01-10361	2	134	author	author	NOUN
app01-10361	2	135	:	:	PUNCT
app01-10361	2	136	marina.melodelima@st.com	marina.melodelima@st.com	X
app01-10361	2	137	abstract	abstract	PROPN
app01-10361	2	138	.	.	PUNCT
app01-10361	3	1	pixel	pixel	PROPN
app01-10361	3	2	integrated	integrate	VERB
app01-10361	3	3	micro	micro	NOUN
app01-10361	3	4	-	-	NOUN
app01-10361	3	5	lenses	lense	NOUN
app01-10361	3	6	for	for	ADP
app01-10361	3	7	cmos	cmos	ADJ
app01-10361	3	8	image	image	NOUN
app01-10361	3	9	sensors	sensor	NOUN
app01-10361	3	10	consist	consist	VERB
app01-10361	3	11	of	of	ADP
app01-10361	3	12	a	a	DET
app01-10361	3	13	stack	stack	NOUN
app01-10361	3	14	of	of	ADP
app01-10361	3	15	polymer	polymer	NOUN
app01-10361	3	16	acrylate	acrylate	NOUN
app01-10361	3	17	resin	resin	NOUN
app01-10361	3	18	films	film	NOUN
app01-10361	3	19	encapsulated	encapsulate	VERB
app01-10361	3	20	by	by	ADP
app01-10361	3	21	a	a	DET
app01-10361	3	22	dielectric	dielectric	ADJ
app01-10361	3	23	layer	layer	NOUN
app01-10361	3	24	.	.	PUNCT
app01-10361	4	1	due	due	ADP
app01-10361	4	2	to	to	ADP
app01-10361	4	3	the	the	DET
app01-10361	4	4	mismatch	mismatch	NOUN
app01-10361	4	5	of	of	ADP
app01-10361	4	6	thermomechanical	thermomechanical	ADJ
app01-10361	4	7	properties	property	NOUN
app01-10361	4	8	,	,	PUNCT
app01-10361	4	9	adhesive	adhesive	ADJ
app01-10361	4	10	or	or	CCONJ
app01-10361	4	11	cohesive	cohesive	ADJ
app01-10361	4	12	fractures	fracture	NOUN
app01-10361	4	13	can	can	AUX
app01-10361	4	14	occur	occur	VERB
app01-10361	4	15	.	.	PUNCT
app01-10361	5	1	this	this	PRON
app01-10361	5	2	can	can	AUX
app01-10361	5	3	lead	lead	VERB
app01-10361	5	4	to	to	ADP
app01-10361	5	5	reliability	reliability	NOUN
app01-10361	5	6	issues	issue	NOUN
app01-10361	5	7	requiring	require	VERB
app01-10361	5	8	the	the	DET
app01-10361	5	9	knowledge	knowledge	NOUN
app01-10361	5	10	of	of	ADP
app01-10361	5	11	the	the	DET
app01-10361	5	12	polymer	polymer	NOUN
app01-10361	5	13	thermomechanical	thermomechanical	ADJ
app01-10361	5	14	properties	property	NOUN
app01-10361	5	15	.	.	PUNCT
app01-10361	6	1	nanoindentation	nanoindentation	NOUN
app01-10361	6	2	is	be	AUX
app01-10361	6	3	a	a	DET
app01-10361	6	4	standard	standard	ADJ
app01-10361	6	5	method	method	NOUN
app01-10361	6	6	for	for	ADP
app01-10361	6	7	determining	determine	VERB
app01-10361	6	8	young	young	ADJ
app01-10361	6	9	’s	’s	PART
app01-10361	6	10	modulus	modulus	NOUN
app01-10361	6	11	of	of	ADP
app01-10361	6	12	thin	thin	ADJ
app01-10361	6	13	films	film	NOUN
app01-10361	6	14	.	.	PUNCT
app01-10361	7	1	however	however	ADV
app01-10361	7	2	,	,	PUNCT
app01-10361	7	3	when	when	SCONJ
app01-10361	7	4	performing	perform	VERB
app01-10361	7	5	temperature	temperature	NOUN
app01-10361	7	6	-	-	PUNCT
app01-10361	7	7	dependent	dependent	ADJ
app01-10361	7	8	nanoindentation	nanoindentation	NOUN
app01-10361	7	9	studies	study	NOUN
app01-10361	7	10	directly	directly	ADV
app01-10361	7	11	on	on	ADP
app01-10361	7	12	the	the	DET
app01-10361	7	13	polymer	polymer	NOUN
app01-10361	7	14	film	film	NOUN
app01-10361	7	15	,	,	PUNCT
app01-10361	7	16	contamination	contamination	NOUN
app01-10361	7	17	of	of	ADP
app01-10361	7	18	the	the	DET
app01-10361	7	19	tip	tip	NOUN
app01-10361	7	20	can	can	AUX
app01-10361	7	21	occur	occur	VERB
app01-10361	7	22	near	near	ADP
app01-10361	7	23	or	or	CCONJ
app01-10361	7	24	above	above	ADP
app01-10361	7	25	the	the	DET
app01-10361	7	26	glass	glass	NOUN
app01-10361	7	27	transition	transition	NOUN
app01-10361	7	28	temperature	temperature	NOUN
app01-10361	7	29	leading	lead	VERB
app01-10361	7	30	to	to	ADP
app01-10361	7	31	estimation	estimation	NOUN
app01-10361	7	32	errors	error	NOUN
app01-10361	7	33	.	.	PUNCT
app01-10361	8	1	therefore	therefore	ADV
app01-10361	8	2	,	,	PUNCT
app01-10361	8	3	the	the	DET
app01-10361	8	4	polymer	polymer	NOUN
app01-10361	8	5	films	film	NOUN
app01-10361	8	6	must	must	AUX
app01-10361	8	7	be	be	AUX
app01-10361	8	8	measured	measure	VERB
app01-10361	8	9	including	include	VERB
app01-10361	8	10	a	a	DET
app01-10361	8	11	protective	protective	ADJ
app01-10361	8	12	layer	layer	NOUN
app01-10361	8	13	,	,	PUNCT
app01-10361	8	14	and	and	CCONJ
app01-10361	8	15	a	a	DET
app01-10361	8	16	multilayer	multilayer	ADJ
app01-10361	8	17	model	model	NOUN
app01-10361	8	18	is	be	AUX
app01-10361	8	19	used	use	VERB
app01-10361	8	20	to	to	PART
app01-10361	8	21	extract	extract	VERB
app01-10361	8	22	the	the	DET
app01-10361	8	23	polymer	polymer	NOUN
app01-10361	8	24	’s	’s	PART
app01-10361	8	25	young	young	PROPN
app01-10361	8	26	’s	’s	PART
app01-10361	8	27	modulus	modulus	NOUN
app01-10361	8	28	.	.	PUNCT
app01-10361	9	1	finite	finite	ADJ
app01-10361	9	2	-	-	ADJ
app01-10361	9	3	element	element	ADJ
app01-10361	9	4	simulations	simulation	NOUN
app01-10361	9	5	of	of	ADP
app01-10361	9	6	berkovich	berkovich	NOUN
app01-10361	9	7	and	and	CCONJ
app01-10361	9	8	spherical	spherical	ADJ
app01-10361	9	9	indentations	indentation	NOUN
app01-10361	9	10	on	on	ADP
app01-10361	9	11	the	the	DET
app01-10361	9	12	complete	complete	ADJ
app01-10361	9	13	stack	stack	NOUN
app01-10361	9	14	were	be	AUX
app01-10361	9	15	performed	perform	VERB
app01-10361	9	16	,	,	PUNCT
app01-10361	9	17	enabling	enable	VERB
app01-10361	9	18	the	the	DET
app01-10361	9	19	identification	identification	NOUN
app01-10361	9	20	of	of	ADP
app01-10361	9	21	a	a	DET
app01-10361	9	22	contact	contact	NOUN
app01-10361	9	23	radius	radius	NOUN
app01-10361	9	24	range	range	NOUN
app01-10361	9	25	within	within	ADP
app01-10361	9	26	which	which	PRON
app01-10361	9	27	the	the	DET
app01-10361	9	28	relative	relative	ADJ
app01-10361	9	29	error	error	NOUN
app01-10361	9	30	resulting	result	VERB
app01-10361	9	31	from	from	ADP
app01-10361	9	32	using	use	VERB
app01-10361	9	33	the	the	DET
app01-10361	9	34	multilayer	multilayer	ADJ
app01-10361	9	35	model	model	NOUN
app01-10361	9	36	is	be	AUX
app01-10361	9	37	less	less	ADJ
app01-10361	9	38	than	than	ADP
app01-10361	9	39	10	10	NUM
app01-10361	9	40	%	%	NOUN
app01-10361	9	41	.	.	PUNCT
app01-10361	10	1	consequently	consequently	ADV
app01-10361	10	2	,	,	PUNCT
app01-10361	10	3	room	room	NOUN
app01-10361	10	4	temperature	temperature	NOUN
app01-10361	10	5	and	and	CCONJ
app01-10361	10	6	temperature	temperature	NOUN
app01-10361	10	7	-	-	PUNCT
app01-10361	10	8	dependent	dependent	ADJ
app01-10361	10	9	tests	test	NOUN
app01-10361	10	10	of	of	ADP
app01-10361	10	11	the	the	DET
app01-10361	10	12	complete	complete	ADJ
app01-10361	10	13	stack	stack	NOUN
app01-10361	10	14	were	be	AUX
app01-10361	10	15	performed	perform	VERB
app01-10361	10	16	,	,	PUNCT
app01-10361	10	17	enabling	enable	VERB
app01-10361	10	18	the	the	DET
app01-10361	10	19	determination	determination	NOUN
app01-10361	10	20	of	of	ADP
app01-10361	10	21	the	the	DET
app01-10361	10	22	polymer	polymer	NOUN
app01-10361	10	23	’s	’s	PART
app01-10361	10	24	young	young	PROPN
app01-10361	10	25	’s	’s	PART
app01-10361	10	26	modulus	modulus	NOUN
app01-10361	10	27	as	as	ADP
app01-10361	10	28	a	a	DET
app01-10361	10	29	function	function	NOUN
app01-10361	10	30	of	of	ADP
app01-10361	10	31	temperature	temperature	NOUN
app01-10361	10	32	without	without	ADP
app01-10361	10	33	tip	tip	NOUN
app01-10361	10	34	contamination	contamination	NOUN
app01-10361	10	35	.	.	PUNCT
app01-10361	11	1	keywords	keyword	NOUN
app01-10361	11	2	:	:	PUNCT
app01-10361	11	3	temperature	temperature	NOUN
app01-10361	11	4	-	-	PUNCT
app01-10361	11	5	dependent	dependent	ADJ
app01-10361	11	6	nanoindentation	nanoindentation	NOUN
app01-10361	11	7	,	,	PUNCT
app01-10361	11	8	berkovich	berkovich	PROPN
app01-10361	11	9	tip	tip	NOUN
app01-10361	11	10	,	,	PUNCT
app01-10361	11	11	spherical	spherical	ADJ
app01-10361	11	12	tip	tip	NOUN
app01-10361	11	13	,	,	PUNCT
app01-10361	11	14	thin	thin	ADJ
app01-10361	11	15	films	film	NOUN
app01-10361	11	16	,	,	PUNCT
app01-10361	11	17	polymer	polymer	NOUN
app01-10361	11	18	,	,	PUNCT
app01-10361	11	19	acrylate	acrylate	NOUN
app01-10361	11	20	resin	resin	NOUN
app01-10361	11	21	,	,	PUNCT
app01-10361	11	22	finite	finite	ADJ
app01-10361	11	23	-	-	ADJ
app01-10361	11	24	element	element	ADJ
app01-10361	11	25	modeling	modeling	NOUN
app01-10361	11	26	.	.	PUNCT
app01-10361	12	1	1	1	X
app01-10361	12	2	.	.	X
app01-10361	12	3	introduction	introduction	NOUN
app01-10361	12	4	in	in	ADP
app01-10361	12	5	microelectronics	microelectronic	NOUN
app01-10361	12	6	,	,	PUNCT
app01-10361	12	7	component	component	NOUN
app01-10361	12	8	manufacturing	manufacturing	NOUN
app01-10361	12	9	is	be	AUX
app01-10361	12	10	based	base	VERB
app01-10361	12	11	on	on	ADP
app01-10361	12	12	the	the	DET
app01-10361	12	13	triptych	triptych	PROPN
app01-10361	12	14	of	of	ADP
app01-10361	12	15	yield	yield	NOUN
app01-10361	12	16	,	,	PUNCT
app01-10361	12	17	reliability	reliability	NOUN
app01-10361	12	18	,	,	PUNCT
app01-10361	12	19	and	and	CCONJ
app01-10361	12	20	performance	performance	NOUN
app01-10361	12	21	.	.	PUNCT
app01-10361	13	1	this	this	DET
app01-10361	13	2	study	study	NOUN
app01-10361	13	3	focuses	focus	VERB
app01-10361	13	4	on	on	ADP
app01-10361	13	5	the	the	DET
app01-10361	13	6	reliability	reliability	NOUN
app01-10361	13	7	of	of	ADP
app01-10361	13	8	integrated	integrate	VERB
app01-10361	13	9	-	-	PUNCT
app01-10361	13	10	pixel	pixel	NOUN
app01-10361	13	11	micro	micro	NOUN
app01-10361	13	12	-	-	NOUN
app01-10361	13	13	lenses	lense	NOUN
app01-10361	13	14	for	for	ADP
app01-10361	13	15	cmos	cmos	ADJ
app01-10361	13	16	image	image	NOUN
app01-10361	13	17	sensors	sensor	NOUN
app01-10361	13	18	.	.	PUNCT
app01-10361	14	1	these	these	DET
app01-10361	14	2	micro	micro	NOUN
app01-10361	14	3	-	-	NOUN
app01-10361	14	4	lenses	lense	NOUN
app01-10361	14	5	are	be	AUX
app01-10361	14	6	composed	compose	VERB
app01-10361	14	7	of	of	ADP
app01-10361	14	8	a	a	DET
app01-10361	14	9	stack	stack	NOUN
app01-10361	14	10	of	of	ADP
app01-10361	14	11	polymer	polymer	NOUN
app01-10361	14	12	(	(	PUNCT
app01-10361	14	13	acrylate	acrylate	NOUN
app01-10361	14	14	)	)	PUNCT
app01-10361	14	15	resin	resin	NOUN
app01-10361	14	16	films	film	NOUN
app01-10361	14	17	encapsulated	encapsulate	VERB
app01-10361	14	18	by	by	ADP
app01-10361	14	19	an	an	DET
app01-10361	14	20	inorganic	inorganic	ADJ
app01-10361	14	21	and	and	CCONJ
app01-10361	14	22	transparent	transparent	ADJ
app01-10361	14	23	protective	protective	ADJ
app01-10361	14	24	layer	layer	NOUN
app01-10361	14	25	(	(	PUNCT
app01-10361	14	26	figure	figure	NOUN
app01-10361	14	27	1	1	NUM
app01-10361	14	28	)	)	PUNCT
app01-10361	14	29	.	.	PUNCT
app01-10361	15	1	the	the	DET
app01-10361	15	2	resins	resin	NOUN
app01-10361	15	3	that	that	PRON
app01-10361	15	4	constitute	constitute	VERB
app01-10361	15	5	the	the	DET
app01-10361	15	6	micro	micro	NOUN
app01-10361	15	7	-	-	NOUN
app01-10361	15	8	lenses	lense	NOUN
app01-10361	15	9	ensure	ensure	VERB
app01-10361	15	10	the	the	DET
app01-10361	15	11	convergence	convergence	NOUN
app01-10361	15	12	of	of	ADP
app01-10361	15	13	incoming	incoming	ADJ
app01-10361	15	14	photons	photon	NOUN
app01-10361	15	15	onto	onto	ADP
app01-10361	15	16	the	the	DET
app01-10361	15	17	underneath	underneath	NOUN
app01-10361	15	18	photodiodes	photodiode	NOUN
app01-10361	15	19	.	.	PUNCT
app01-10361	16	1	the	the	DET
app01-10361	16	2	protective	protective	ADJ
app01-10361	16	3	layer	layer	NOUN
app01-10361	16	4	is	be	AUX
app01-10361	16	5	a	a	DET
app01-10361	16	6	dielectric	dielectric	ADJ
app01-10361	16	7	film	film	NOUN
app01-10361	16	8	added	add	VERB
app01-10361	16	9	to	to	PART
app01-10361	16	10	protect	protect	VERB
app01-10361	16	11	the	the	DET
app01-10361	16	12	image	image	NOUN
app01-10361	16	13	sensor	sensor	NOUN
app01-10361	16	14	during	during	ADP
app01-10361	16	15	cleaning	cleaning	NOUN
app01-10361	16	16	,	,	PUNCT
app01-10361	16	17	packaging	packaging	NOUN
app01-10361	16	18	,	,	PUNCT
app01-10361	16	19	assembly	assembly	NOUN
app01-10361	16	20	,	,	PUNCT
app01-10361	16	21	and	and	CCONJ
app01-10361	16	22	from	from	ADP
app01-10361	16	23	humidity	humidity	NOUN
app01-10361	16	24	and	and	CCONJ
app01-10361	16	25	oxidation	oxidation	NOUN
app01-10361	16	26	throughout	throughout	ADP
app01-10361	16	27	the	the	DET
app01-10361	16	28	product	product	NOUN
app01-10361	16	29	’s	’s	PART
app01-10361	16	30	lifespan	lifespan	NOUN
app01-10361	16	31	.	.	PUNCT
app01-10361	17	1	one	one	NUM
app01-10361	17	2	possible	possible	ADJ
app01-10361	17	3	limitation	limitation	NOUN
app01-10361	17	4	of	of	ADP
app01-10361	17	5	this	this	DET
app01-10361	17	6	process	process	NOUN
app01-10361	17	7	is	be	AUX
app01-10361	17	8	the	the	DET
app01-10361	17	9	eventuality	eventuality	NOUN
app01-10361	17	10	of	of	ADP
app01-10361	17	11	adhesive	adhesive	ADJ
app01-10361	17	12	or	or	CCONJ
app01-10361	17	13	cohesive	cohesive	ADJ
app01-10361	17	14	failures	failure	NOUN
app01-10361	17	15	due	due	ADP
app01-10361	17	16	to	to	ADP
app01-10361	17	17	the	the	DET
app01-10361	17	18	mismatch	mismatch	NOUN
app01-10361	17	19	in	in	ADP
app01-10361	17	20	thermomechanical	thermomechanical	ADJ
app01-10361	17	21	properties	property	NOUN
app01-10361	17	22	between	between	ADP
app01-10361	17	23	the	the	DET
app01-10361	17	24	protective	protective	ADJ
app01-10361	17	25	layer	layer	NOUN
app01-10361	17	26	and	and	CCONJ
app01-10361	17	27	the	the	DET
app01-10361	17	28	polymers	polymer	NOUN
app01-10361	17	29	.	.	PUNCT
app01-10361	18	1	consequently	consequently	ADV
app01-10361	18	2	,	,	PUNCT
app01-10361	18	3	understanding	understand	VERB
app01-10361	18	4	the	the	DET
app01-10361	18	5	thermomechanical	thermomechanical	ADJ
app01-10361	18	6	properties	property	NOUN
app01-10361	18	7	of	of	ADP
app01-10361	18	8	the	the	DET
app01-10361	18	9	polymers	polymer	NOUN
app01-10361	18	10	is	be	AUX
app01-10361	18	11	crucial	crucial	ADJ
app01-10361	18	12	for	for	ADP
app01-10361	18	13	both	both	PRON
app01-10361	18	14	identifying	identify	VERB
app01-10361	18	15	the	the	DET
app01-10361	18	16	impact	impact	NOUN
app01-10361	18	17	of	of	ADP
app01-10361	18	18	process	process	NOUN
app01-10361	18	19	deposition	deposition	NOUN
app01-10361	18	20	parameters	parameter	NOUN
app01-10361	18	21	and	and	CCONJ
app01-10361	18	22	providing	provide	VERB
app01-10361	18	23	predictive	predictive	ADJ
app01-10361	18	24	failure	failure	NOUN
app01-10361	18	25	simulations	simulation	NOUN
app01-10361	18	26	of	of	ADP
app01-10361	18	27	the	the	DET
app01-10361	18	28	complete	complete	ADJ
app01-10361	18	29	lens	lens	NOUN
app01-10361	18	30	stack	stack	NOUN
app01-10361	18	31	.	.	PUNCT
app01-10361	19	1	in	in	ADP
app01-10361	19	2	this	this	DET
app01-10361	19	3	study	study	NOUN
app01-10361	19	4	,	,	PUNCT
app01-10361	19	5	a	a	DET
app01-10361	19	6	polymer	polymer	NOUN
app01-10361	19	7	provided	provide	VERB
app01-10361	19	8	by	by	ADP
app01-10361	19	9	stmicroelectronics	stmicroelectronic	NOUN
app01-10361	19	10	is	be	AUX
app01-10361	19	11	characterized	characterize	VERB
app01-10361	19	12	to	to	PART
app01-10361	19	13	evaluate	evaluate	VERB
app01-10361	19	14	the	the	DET
app01-10361	19	15	evolution	evolution	NOUN
app01-10361	19	16	of	of	ADP
app01-10361	19	17	its	its	PRON
app01-10361	19	18	young	young	ADJ
app01-10361	19	19	’s	’s	PART
app01-10361	19	20	modulus	modulus	NOUN
app01-10361	19	21	as	as	ADP
app01-10361	19	22	a	a	DET
app01-10361	19	23	function	function	NOUN
app01-10361	19	24	of	of	ADP
app01-10361	19	25	figure	figure	NOUN
app01-10361	19	26	1	1	NUM
app01-10361	19	27	.	.	PUNCT
app01-10361	19	28	sem	sem	ADJ
app01-10361	19	29	image	image	NOUN
app01-10361	19	30	and	and	CCONJ
app01-10361	19	31	schematic	schematic	ADJ
app01-10361	19	32	of	of	ADP
app01-10361	19	33	a	a	DET
app01-10361	19	34	micro	micro	NOUN
app01-10361	19	35	-	-	NOUN
app01-10361	19	36	lens	lens	ADJ
app01-10361	19	37	array	array	NOUN
app01-10361	19	38	(	(	PUNCT
app01-10361	19	39	not	not	PART
app01-10361	19	40	to	to	PART
app01-10361	19	41	scale	scale	VERB
app01-10361	19	42	)	)	PUNCT
app01-10361	19	43	.	.	PUNCT
app01-10361	20	1	temperature	temperature	NOUN
app01-10361	20	2	using	use	VERB
app01-10361	20	3	temperature	temperature	NOUN
app01-10361	20	4	-	-	PUNCT
app01-10361	20	5	dependent	dependent	ADJ
app01-10361	20	6	nanoindentation	nanoindentation	NOUN
app01-10361	20	7	tests	test	NOUN
app01-10361	20	8	.	.	PUNCT
app01-10361	21	1	first	first	ADV
app01-10361	21	2	,	,	PUNCT
app01-10361	21	3	the	the	DET
app01-10361	21	4	nanoindentation	nanoindentation	NOUN
app01-10361	21	5	protocol	protocol	NOUN
app01-10361	21	6	is	be	AUX
app01-10361	21	7	described	describe	VERB
app01-10361	21	8	along	along	ADP
app01-10361	21	9	with	with	ADP
app01-10361	21	10	the	the	DET
app01-10361	21	11	characterized	characterize	VERB
app01-10361	21	12	samples	sample	NOUN
app01-10361	21	13	.	.	PUNCT
app01-10361	22	1	this	this	PRON
app01-10361	22	2	is	be	AUX
app01-10361	22	3	followed	follow	VERB
app01-10361	22	4	by	by	ADP
app01-10361	22	5	the	the	DET
app01-10361	22	6	presentation	presentation	NOUN
app01-10361	22	7	of	of	ADP
app01-10361	22	8	the	the	DET
app01-10361	22	9	analytical	analytical	ADJ
app01-10361	22	10	multilayer	multilayer	NOUN
app01-10361	22	11	model	model	NOUN
app01-10361	22	12	used	use	VERB
app01-10361	22	13	to	to	PART
app01-10361	22	14	extract	extract	VERB
app01-10361	22	15	the	the	DET
app01-10361	22	16	elastic	elastic	ADJ
app01-10361	22	17	modulus	modulus	NOUN
app01-10361	22	18	from	from	ADP
app01-10361	22	19	the	the	DET
app01-10361	22	20	experimental	experimental	ADJ
app01-10361	22	21	data	datum	NOUN
app01-10361	22	22	.	.	PUNCT
app01-10361	23	1	then	then	ADV
app01-10361	23	2	,	,	PUNCT
app01-10361	23	3	finite	finite	ADJ
app01-10361	23	4	-	-	ADJ
app01-10361	23	5	element	element	ADJ
app01-10361	23	6	models	model	NOUN
app01-10361	23	7	of	of	ADP
app01-10361	23	8	the	the	DET
app01-10361	23	9	indentation	indentation	NOUN
app01-10361	23	10	are	be	AUX
app01-10361	23	11	presented	present	VERB
app01-10361	23	12	and	and	CCONJ
app01-10361	23	13	utilized	utilize	VERB
app01-10361	23	14	to	to	PART
app01-10361	23	15	define	define	VERB
app01-10361	23	16	49	49	NUM
app01-10361	23	17	https://doi.org/10.14311/app.2024.50.0049	https://doi.org/10.14311/app.2024.50.0049	NOUN
app01-10361	23	18	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
app01-10361	23	19	https://www.cvut.cz/en	https://www.cvut.cz/en	NOUN
app01-10361	23	20	m.	m.	NOUN
app01-10361	23	21	melo	melo	PROPN
app01-10361	23	22	de	de	PROPN
app01-10361	23	23	lima	lima	PROPN
app01-10361	23	24	,	,	PUNCT
app01-10361	23	25	v.	v.	ADP
app01-10361	23	26	mandrillon	mandrillon	PROPN
app01-10361	23	27	,	,	PUNCT
app01-10361	23	28	j.	j.	PROPN
app01-10361	23	29	hay	hay	PROPN
app01-10361	23	30	et	et	PROPN
app01-10361	23	31	al	al	PROPN
app01-10361	23	32	.	.	PROPN
app01-10361	24	1	acta	acta	PROPN
app01-10361	24	2	polytechnica	polytechnica	PROPN
app01-10361	24	3	ctu	ctu	NOUN
app01-10361	24	4	proceedings	proceeding	NOUN
app01-10361	24	5	the	the	DET
app01-10361	24	6	validity	validity	NOUN
app01-10361	24	7	range	range	NOUN
app01-10361	24	8	of	of	ADP
app01-10361	24	9	the	the	DET
app01-10361	24	10	aforementioned	aforementioned	ADJ
app01-10361	24	11	analytical	analytical	ADJ
app01-10361	24	12	model	model	NOUN
app01-10361	24	13	.	.	PUNCT
app01-10361	25	1	afterward	afterward	ADV
app01-10361	25	2	,	,	PUNCT
app01-10361	25	3	the	the	DET
app01-10361	25	4	resulting	result	VERB
app01-10361	25	5	elastic	elastic	ADJ
app01-10361	25	6	moduli	modulus	NOUN
app01-10361	25	7	from	from	ADP
app01-10361	25	8	room	room	NOUN
app01-10361	25	9	temperature	temperature	NOUN
app01-10361	25	10	indentations	indentation	NOUN
app01-10361	25	11	performed	perform	VERB
app01-10361	25	12	with	with	ADP
app01-10361	25	13	both	both	DET
app01-10361	25	14	berkovich	berkovich	NOUN
app01-10361	25	15	and	and	CCONJ
app01-10361	25	16	50	50	NUM
app01-10361	25	17	µm	µm	NOUN
app01-10361	25	18	radius	radius	ADJ
app01-10361	25	19	spherical	spherical	ADJ
app01-10361	25	20	tips	tip	NOUN
app01-10361	25	21	are	be	AUX
app01-10361	25	22	compared	compare	VERB
app01-10361	25	23	.	.	PUNCT
app01-10361	26	1	finally	finally	ADV
app01-10361	26	2	temperature	temperature	NOUN
app01-10361	26	3	-	-	PUNCT
app01-10361	26	4	dependent	dependent	ADJ
app01-10361	26	5	results	result	NOUN
app01-10361	26	6	ranging	range	VERB
app01-10361	26	7	from	from	ADP
app01-10361	26	8	20	20	NUM
app01-10361	26	9	to	to	PART
app01-10361	26	10	250	250	NUM
app01-10361	26	11	°	°	NOUN
app01-10361	26	12	c	c	NOUN
app01-10361	26	13	are	be	AUX
app01-10361	26	14	presented	present	VERB
app01-10361	26	15	.	.	PUNCT
app01-10361	27	1	this	this	DET
app01-10361	27	2	temperature	temperature	NOUN
app01-10361	27	3	range	range	NOUN
app01-10361	27	4	is	be	AUX
app01-10361	27	5	extended	extend	VERB
app01-10361	27	6	up	up	ADP
app01-10361	27	7	to	to	PART
app01-10361	27	8	250	250	NUM
app01-10361	27	9	°	°	ADP
app01-10361	27	10	c	c	NOUN
app01-10361	27	11	to	to	PART
app01-10361	27	12	identify	identify	VERB
app01-10361	27	13	the	the	DET
app01-10361	27	14	glass	glass	NOUN
app01-10361	27	15	transition	transition	NOUN
app01-10361	27	16	temperature	temperature	NOUN
app01-10361	27	17	.	.	PUNCT
app01-10361	28	1	2	2	X
app01-10361	28	2	.	.	X
app01-10361	28	3	materials	material	NOUN
app01-10361	28	4	and	and	CCONJ
app01-10361	28	5	methods	method	NOUN
app01-10361	28	6	2.1	2.1	NUM
app01-10361	28	7	.	.	PUNCT
app01-10361	29	1	experiments	experiment	NOUN
app01-10361	29	2	nanoindentation	nanoindentation	NOUN
app01-10361	29	3	using	use	VERB
app01-10361	29	4	a	a	DET
app01-10361	29	5	berkovich	berkovich	NOUN
app01-10361	29	6	tip	tip	NOUN
app01-10361	29	7	is	be	AUX
app01-10361	29	8	the	the	DET
app01-10361	29	9	reference	reference	NOUN
app01-10361	29	10	method	method	NOUN
app01-10361	29	11	for	for	ADP
app01-10361	29	12	determining	determine	VERB
app01-10361	29	13	the	the	DET
app01-10361	29	14	young	young	ADJ
app01-10361	29	15	’s	’s	PART
app01-10361	29	16	modulus	modulus	NOUN
app01-10361	29	17	of	of	ADP
app01-10361	29	18	thin	thin	ADJ
app01-10361	29	19	films	film	NOUN
app01-10361	29	20	.	.	PUNCT
app01-10361	30	1	however	however	ADV
app01-10361	30	2	,	,	PUNCT
app01-10361	30	3	when	when	SCONJ
app01-10361	30	4	performing	perform	VERB
app01-10361	30	5	temperaturedependent	temperaturedependent	ADJ
app01-10361	30	6	nanoindentation	nanoindentation	NOUN
app01-10361	30	7	studies	study	NOUN
app01-10361	30	8	directly	directly	ADV
app01-10361	30	9	on	on	ADP
app01-10361	30	10	a	a	DET
app01-10361	30	11	polymer	polymer	NOUN
app01-10361	30	12	film	film	NOUN
app01-10361	30	13	,	,	PUNCT
app01-10361	30	14	contamination	contamination	NOUN
app01-10361	30	15	of	of	ADP
app01-10361	30	16	the	the	DET
app01-10361	30	17	tip	tip	NOUN
app01-10361	30	18	can	can	AUX
app01-10361	30	19	occur	occur	VERB
app01-10361	30	20	near	near	ADP
app01-10361	30	21	or	or	CCONJ
app01-10361	30	22	above	above	ADP
app01-10361	30	23	the	the	DET
app01-10361	30	24	glass	glass	NOUN
app01-10361	30	25	transition	transition	NOUN
app01-10361	30	26	temperature	temperature	NOUN
app01-10361	30	27	leading	lead	VERB
app01-10361	30	28	to	to	ADP
app01-10361	30	29	estimation	estimation	NOUN
app01-10361	30	30	errors	error	NOUN
app01-10361	30	31	and	and	CCONJ
app01-10361	30	32	tip	tip	NOUN
app01-10361	30	33	degradation	degradation	NOUN
app01-10361	30	34	.	.	PUNCT
app01-10361	31	1	therefore	therefore	ADV
app01-10361	31	2	,	,	PUNCT
app01-10361	31	3	for	for	ADP
app01-10361	31	4	the	the	DET
app01-10361	31	5	purpose	purpose	NOUN
app01-10361	31	6	of	of	ADP
app01-10361	31	7	this	this	DET
app01-10361	31	8	study	study	NOUN
app01-10361	31	9	,	,	PUNCT
app01-10361	31	10	a	a	DET
app01-10361	31	11	dielectric	dielectric	ADJ
app01-10361	31	12	thin	thin	ADJ
app01-10361	31	13	film	film	NOUN
app01-10361	31	14	,	,	PUNCT
app01-10361	31	15	referred	refer	VERB
app01-10361	31	16	to	to	ADP
app01-10361	31	17	as	as	ADP
app01-10361	31	18	the	the	DET
app01-10361	31	19	top	top	ADJ
app01-10361	31	20	coat	coat	NOUN
app01-10361	31	21	,	,	PUNCT
app01-10361	31	22	is	be	AUX
app01-10361	31	23	added	add	VERB
app01-10361	31	24	atop	atop	ADP
app01-10361	31	25	the	the	DET
app01-10361	31	26	polymer	polymer	NOUN
app01-10361	31	27	to	to	PART
app01-10361	31	28	protect	protect	VERB
app01-10361	31	29	the	the	DET
app01-10361	31	30	tip	tip	NOUN
app01-10361	31	31	.	.	PUNCT
app01-10361	32	1	consequently	consequently	ADV
app01-10361	32	2	,	,	PUNCT
app01-10361	32	3	the	the	DET
app01-10361	32	4	characterized	characterize	VERB
app01-10361	32	5	samples	sample	NOUN
app01-10361	32	6	consist	consist	VERB
app01-10361	32	7	of	of	ADP
app01-10361	32	8	a	a	DET
app01-10361	32	9	3	3	NUM
app01-10361	32	10	µm	µm	NOUN
app01-10361	32	11	acrylate	acrylate	NOUN
app01-10361	32	12	polymer	polymer	NOUN
app01-10361	32	13	film	film	NOUN
app01-10361	32	14	deposited	deposit	VERB
app01-10361	32	15	on	on	ADP
app01-10361	32	16	a	a	DET
app01-10361	32	17	standard	standard	ADJ
app01-10361	32	18	silicon	silicon	NOUN
app01-10361	32	19	wafer	wafer	NOUN
app01-10361	32	20	with	with	ADP
app01-10361	32	21	[	[	X
app01-10361	32	22	100	100	NUM
app01-10361	32	23	]	]	PUNCT
app01-10361	32	24	orientation	orientation	NOUN
app01-10361	32	25	,	,	PUNCT
app01-10361	32	26	encapsulated	encapsulate	VERB
app01-10361	32	27	by	by	ADP
app01-10361	32	28	a	a	DET
app01-10361	32	29	dielectric	dielectric	ADJ
app01-10361	32	30	layer	layer	NOUN
app01-10361	32	31	,	,	PUNCT
app01-10361	32	32	either	either	CCONJ
app01-10361	32	33	200	200	NUM
app01-10361	32	34	nm	nm	NOUN
app01-10361	32	35	or	or	CCONJ
app01-10361	32	36	600	600	NUM
app01-10361	32	37	nm	nm	ADV
app01-10361	32	38	thick	thick	ADJ
app01-10361	32	39	(	(	PUNCT
app01-10361	32	40	figure	figure	NOUN
app01-10361	32	41	2	2	NUM
app01-10361	32	42	)	)	PUNCT
app01-10361	32	43	.	.	PUNCT
app01-10361	33	1	however	however	ADV
app01-10361	33	2	,	,	PUNCT
app01-10361	33	3	a	a	DET
app01-10361	33	4	potential	potential	ADJ
app01-10361	33	5	issue	issue	NOUN
app01-10361	33	6	is	be	AUX
app01-10361	33	7	the	the	DET
app01-10361	33	8	cracking	cracking	NOUN
app01-10361	33	9	of	of	ADP
app01-10361	33	10	the	the	DET
app01-10361	33	11	top	top	ADJ
app01-10361	33	12	coat	coat	NOUN
app01-10361	33	13	during	during	ADP
app01-10361	33	14	indentation	indentation	NOUN
app01-10361	33	15	,	,	PUNCT
app01-10361	33	16	which	which	PRON
app01-10361	33	17	could	could	AUX
app01-10361	33	18	lead	lead	VERB
app01-10361	33	19	to	to	ADP
app01-10361	33	20	tip	tip	NOUN
app01-10361	33	21	contamination	contamination	NOUN
app01-10361	33	22	since	since	SCONJ
app01-10361	33	23	it	it	PRON
app01-10361	33	24	has	have	AUX
app01-10361	33	25	been	be	AUX
app01-10361	33	26	demonstrated	demonstrate	VERB
app01-10361	33	27	that	that	SCONJ
app01-10361	33	28	room	room	NOUN
app01-10361	33	29	-	-	PUNCT
app01-10361	33	30	temperature	temperature	NOUN
app01-10361	33	31	berkovich	berkovich	NOUN
app01-10361	33	32	indentation	indentation	NOUN
app01-10361	33	33	induces	induce	VERB
app01-10361	33	34	such	such	ADJ
app01-10361	33	35	cracks	crack	NOUN
app01-10361	33	36	(	(	PUNCT
app01-10361	33	37	figure	figure	NOUN
app01-10361	33	38	2	2	NUM
app01-10361	33	39	)	)	PUNCT
app01-10361	33	40	.	.	PUNCT
app01-10361	34	1	therefore	therefore	ADV
app01-10361	34	2	,	,	PUNCT
app01-10361	34	3	this	this	DET
app01-10361	34	4	work	work	NOUN
app01-10361	34	5	focuses	focus	VERB
app01-10361	34	6	first	first	ADV
app01-10361	34	7	on	on	ADP
app01-10361	34	8	room	room	NOUN
app01-10361	34	9	-	-	PUNCT
app01-10361	34	10	temperature	temperature	NOUN
app01-10361	34	11	experiments	experiment	NOUN
app01-10361	34	12	to	to	PART
app01-10361	34	13	evaluate	evaluate	VERB
app01-10361	34	14	and	and	CCONJ
app01-10361	34	15	validate	validate	VERB
app01-10361	34	16	the	the	DET
app01-10361	34	17	use	use	NOUN
app01-10361	34	18	of	of	ADP
app01-10361	34	19	a	a	DET
app01-10361	34	20	spherical	spherical	ADJ
app01-10361	34	21	tip	tip	NOUN
app01-10361	34	22	,	,	PUNCT
app01-10361	34	23	which	which	PRON
app01-10361	34	24	is	be	AUX
app01-10361	34	25	less	less	ADV
app01-10361	34	26	likely	likely	ADJ
app01-10361	34	27	to	to	PART
app01-10361	34	28	create	create	VERB
app01-10361	34	29	cracks	crack	NOUN
app01-10361	34	30	thanks	thank	NOUN
app01-10361	34	31	to	to	ADP
app01-10361	34	32	its	its	PRON
app01-10361	34	33	round	round	ADJ
app01-10361	34	34	shape	shape	NOUN
app01-10361	34	35	.	.	PUNCT
app01-10361	35	1	this	this	PRON
app01-10361	35	2	is	be	AUX
app01-10361	35	3	achieved	achieve	VERB
app01-10361	35	4	by	by	ADP
app01-10361	35	5	comparing	compare	VERB
app01-10361	35	6	nanoindentation	nanoindentation	NOUN
app01-10361	35	7	tests	test	NOUN
app01-10361	35	8	conducted	conduct	VERB
app01-10361	35	9	using	use	VERB
app01-10361	35	10	both	both	CCONJ
app01-10361	35	11	berkovich	berkovich	NOUN
app01-10361	35	12	and	and	CCONJ
app01-10361	35	13	50	50	NUM
app01-10361	35	14	µm	µm	NOUN
app01-10361	35	15	radius	radius	ADJ
app01-10361	35	16	spherical	spherical	ADJ
app01-10361	35	17	diamond	diamond	NOUN
app01-10361	35	18	tips	tip	NOUN
app01-10361	35	19	.	.	PUNCT
app01-10361	36	1	the	the	DET
app01-10361	36	2	tested	test	VERB
app01-10361	36	3	samples	sample	NOUN
app01-10361	36	4	include	include	VERB
app01-10361	36	5	a	a	DET
app01-10361	36	6	3	3	NUM
app01-10361	36	7	µm	µm	NOUN
app01-10361	36	8	polymer	polymer	NOUN
app01-10361	36	9	layer	layer	NOUN
app01-10361	36	10	deposited	deposit	VERB
app01-10361	36	11	on	on	ADP
app01-10361	36	12	a	a	DET
app01-10361	36	13	silicon	silicon	NOUN
app01-10361	36	14	substrate	substrate	NOUN
app01-10361	36	15	and	and	CCONJ
app01-10361	36	16	two	two	NUM
app01-10361	36	17	additional	additional	ADJ
app01-10361	36	18	samples	sample	NOUN
app01-10361	36	19	where	where	SCONJ
app01-10361	36	20	the	the	DET
app01-10361	36	21	polymer	polymer	NOUN
app01-10361	36	22	is	be	AUX
app01-10361	36	23	coated	coat	VERB
app01-10361	36	24	with	with	ADP
app01-10361	36	25	top	top	ADJ
app01-10361	36	26	coat	coat	NOUN
app01-10361	36	27	layers	layer	NOUN
app01-10361	36	28	of	of	ADP
app01-10361	36	29	200	200	NUM
app01-10361	36	30	nm	nm	NOUN
app01-10361	36	31	and	and	CCONJ
app01-10361	36	32	600	600	NUM
app01-10361	36	33	nm	nm	NOUN
app01-10361	36	34	.	.	PUNCT
app01-10361	37	1	temperature	temperature	NOUN
app01-10361	37	2	-	-	PUNCT
app01-10361	37	3	dependent	dependent	ADJ
app01-10361	37	4	nanoindentation	nanoindentation	NOUN
app01-10361	37	5	tests	test	NOUN
app01-10361	37	6	,	,	PUNCT
app01-10361	37	7	ranging	range	VERB
app01-10361	37	8	from	from	ADP
app01-10361	37	9	20	20	NUM
app01-10361	37	10	to	to	PART
app01-10361	37	11	250	250	NUM
app01-10361	37	12	°	°	ADP
app01-10361	37	13	c	c	NOUN
app01-10361	37	14	,	,	PUNCT
app01-10361	37	15	are	be	AUX
app01-10361	37	16	then	then	ADV
app01-10361	37	17	conducted	conduct	VERB
app01-10361	37	18	on	on	ADP
app01-10361	37	19	the	the	DET
app01-10361	37	20	complete	complete	ADJ
app01-10361	37	21	stack	stack	NOUN
app01-10361	37	22	,	,	PUNCT
app01-10361	37	23	with	with	ADP
app01-10361	37	24	a	a	DET
app01-10361	37	25	200	200	NUM
app01-10361	37	26	nm	nm	ADV
app01-10361	37	27	thick	thick	ADJ
app01-10361	37	28	top	top	ADJ
app01-10361	37	29	coat	coat	NOUN
app01-10361	37	30	,	,	PUNCT
app01-10361	37	31	using	use	VERB
app01-10361	37	32	a	a	DET
app01-10361	37	33	50	50	NUM
app01-10361	37	34	µm	µm	ADP
app01-10361	37	35	radius	radius	NOUN
app01-10361	37	36	sapphire	sapphire	NOUN
app01-10361	37	37	spherical	spherical	ADJ
app01-10361	37	38	tip	tip	NOUN
app01-10361	37	39	.	.	PUNCT
app01-10361	38	1	after	after	ADP
app01-10361	38	2	conducting	conduct	VERB
app01-10361	38	3	the	the	DET
app01-10361	38	4	test	test	NOUN
app01-10361	38	5	at	at	ADP
app01-10361	38	6	250	250	NUM
app01-10361	38	7	°	°	NOUN
app01-10361	38	8	c	c	NOUN
app01-10361	38	9	,	,	PUNCT
app01-10361	38	10	a	a	DET
app01-10361	38	11	subsequent	subsequent	ADJ
app01-10361	38	12	test	test	NOUN
app01-10361	38	13	at	at	ADP
app01-10361	38	14	room	room	NOUN
app01-10361	38	15	temperature	temperature	NOUN
app01-10361	38	16	is	be	AUX
app01-10361	38	17	performed	perform	VERB
app01-10361	38	18	for	for	ADP
app01-10361	38	19	evaluating	evaluate	VERB
app01-10361	38	20	if	if	SCONJ
app01-10361	38	21	the	the	DET
app01-10361	38	22	young	young	ADJ
app01-10361	38	23	’s	’s	PART
app01-10361	38	24	modulus	modulus	NOUN
app01-10361	38	25	of	of	ADP
app01-10361	38	26	the	the	DET
app01-10361	38	27	polymer	polymer	NOUN
app01-10361	38	28	comes	come	VERB
app01-10361	38	29	back	back	ADV
app01-10361	38	30	to	to	ADP
app01-10361	38	31	its	its	PRON
app01-10361	38	32	initial	initial	ADJ
app01-10361	38	33	value	value	NOUN
app01-10361	38	34	.	.	PUNCT
app01-10361	39	1	the	the	DET
app01-10361	39	2	indentation	indentation	NOUN
app01-10361	39	3	tests	test	NOUN
app01-10361	39	4	are	be	AUX
app01-10361	39	5	performed	perform	VERB
app01-10361	39	6	using	use	VERB
app01-10361	39	7	a	a	DET
app01-10361	39	8	mts	mts	NOUN
app01-10361	39	9	xp	xp	PROPN
app01-10361	39	10	nanoindenter	nanoindenter	NOUN
app01-10361	39	11	in	in	ADP
app01-10361	39	12	continuous	continuous	ADJ
app01-10361	39	13	stiffness	stiffness	NOUN
app01-10361	39	14	measurement	measurement	NOUN
app01-10361	39	15	(	(	PUNCT
app01-10361	39	16	csm	csm	NOUN
app01-10361	39	17	)	)	PUNCT
app01-10361	39	18	mode	mode	NOUN
app01-10361	39	19	.	.	PUNCT
app01-10361	40	1	this	this	PRON
app01-10361	40	2	enables	enable	VERB
app01-10361	40	3	real	real	ADJ
app01-10361	40	4	-	-	PUNCT
app01-10361	40	5	time	time	NOUN
app01-10361	40	6	contact	contact	NOUN
app01-10361	40	7	stiffness	stiffness	NOUN
app01-10361	40	8	measurements	measurement	NOUN
app01-10361	40	9	and	and	CCONJ
app01-10361	40	10	subsequent	subsequent	ADJ
app01-10361	40	11	calculation	calculation	NOUN
app01-10361	40	12	of	of	ADP
app01-10361	40	13	the	the	DET
app01-10361	40	14	apparent	apparent	ADJ
app01-10361	40	15	reduced	reduce	VERB
app01-10361	40	16	modulus	modulus	NOUN
app01-10361	40	17	against	against	ADP
app01-10361	40	18	the	the	DET
app01-10361	40	19	contact	contact	NOUN
app01-10361	40	20	indentation	indentation	NOUN
app01-10361	40	21	depth	depth	NOUN
app01-10361	40	22	,	,	PUNCT
app01-10361	40	23	using	use	VERB
app01-10361	40	24	the	the	DET
app01-10361	40	25	oliver	oliver	ADJ
app01-10361	40	26	and	and	CCONJ
app01-10361	40	27	pharr	pharr	PROPN
app01-10361	40	28	method	method	NOUN
app01-10361	40	29	[	[	X
app01-10361	40	30	1	1	NUM
app01-10361	40	31	]	]	PUNCT
app01-10361	40	32	.	.	PUNCT
app01-10361	41	1	the	the	DET
app01-10361	41	2	reduced	reduce	VERB
app01-10361	41	3	modulus	modulus	ADJ
app01-10361	41	4	e∗	e∗	NOUN
app01-10361	41	5	depends	depend	VERB
app01-10361	41	6	on	on	ADP
app01-10361	41	7	the	the	DET
app01-10361	41	8	young	young	ADJ
app01-10361	41	9	’s	’s	PART
app01-10361	41	10	modulus	modulus	NOUN
app01-10361	41	11	e	e	NOUN
app01-10361	41	12	and	and	CCONJ
app01-10361	41	13	poisson	poisson	PROPN
app01-10361	41	14	ratio	ratio	NOUN
app01-10361	41	15	ν	ν	PROPN
app01-10361	41	16	(	(	PUNCT
app01-10361	41	17	eq	eq	NOUN
app01-10361	41	18	.	.	PROPN
app01-10361	41	19	1	1	NUM
app01-10361	41	20	)	)	PUNCT
app01-10361	41	21	.	.	PUNCT
app01-10361	42	1	e∗	e∗	PROPN
app01-10361	42	2	=	=	PUNCT
app01-10361	43	1	e	e	PROPN
app01-10361	43	2	1	1	NUM
app01-10361	43	3	−	−	NOUN
app01-10361	43	4	ν2	ν2	NOUN
app01-10361	43	5	(	(	PUNCT
app01-10361	43	6	1	1	NUM
app01-10361	43	7	)	)	PUNCT
app01-10361	43	8	for	for	ADP
app01-10361	43	9	the	the	DET
app01-10361	43	10	temperature	temperature	NOUN
app01-10361	43	11	-	-	PUNCT
app01-10361	43	12	dependent	dependent	ADJ
app01-10361	43	13	tests	test	NOUN
app01-10361	43	14	,	,	PUNCT
app01-10361	43	15	two	two	NUM
app01-10361	43	16	independent	independent	ADJ
app01-10361	43	17	lasers	laser	NOUN
app01-10361	43	18	are	be	AUX
app01-10361	43	19	used	use	VERB
app01-10361	43	20	to	to	PART
app01-10361	43	21	heat	heat	VERB
app01-10361	43	22	the	the	DET
app01-10361	43	23	tip	tip	NOUN
app01-10361	43	24	and	and	CCONJ
app01-10361	43	25	the	the	DET
app01-10361	43	26	backside	backside	NOUN
app01-10361	43	27	figure	figure	NOUN
app01-10361	43	28	2	2	NUM
app01-10361	43	29	.	.	PUNCT
app01-10361	43	30	illustration	illustration	NOUN
app01-10361	43	31	of	of	ADP
app01-10361	43	32	the	the	DET
app01-10361	43	33	stack	stack	NOUN
app01-10361	43	34	evaluated	evaluate	VERB
app01-10361	43	35	during	during	ADP
app01-10361	43	36	nanoindentation	nanoindentation	NOUN
app01-10361	43	37	tests	test	NOUN
app01-10361	43	38	(	(	PUNCT
app01-10361	43	39	left	leave	VERB
app01-10361	43	40	)	)	PUNCT
app01-10361	43	41	.	.	PUNCT
app01-10361	44	1	afm	afm	PROPN
app01-10361	44	2	image	image	NOUN
app01-10361	44	3	of	of	ADP
app01-10361	44	4	berkovich	berkovich	NOUN
app01-10361	44	5	indentation	indentation	NOUN
app01-10361	44	6	cracks	crack	NOUN
app01-10361	44	7	(	(	PUNCT
app01-10361	44	8	right	right	ADJ
app01-10361	44	9	)	)	PUNCT
app01-10361	44	10	.	.	PUNCT
app01-10361	45	1	of	of	ADP
app01-10361	45	2	the	the	DET
app01-10361	45	3	sample	sample	NOUN
app01-10361	45	4	via	via	ADP
app01-10361	45	5	optical	optical	ADJ
app01-10361	45	6	fibers	fiber	NOUN
app01-10361	45	7	.	.	PUNCT
app01-10361	46	1	the	the	DET
app01-10361	46	2	sample	sample	NOUN
app01-10361	46	3	is	be	AUX
app01-10361	46	4	fixed	fix	VERB
app01-10361	46	5	to	to	ADP
app01-10361	46	6	a	a	DET
app01-10361	46	7	specifically	specifically	ADV
app01-10361	46	8	-	-	PUNCT
app01-10361	46	9	designed	design	VERB
app01-10361	46	10	stage	stage	NOUN
app01-10361	46	11	with	with	ADP
app01-10361	46	12	a	a	DET
app01-10361	46	13	graphite	graphite	NOUN
app01-10361	46	14	glue	glue	NOUN
app01-10361	46	15	allowing	allow	VERB
app01-10361	46	16	heat	heat	NOUN
app01-10361	46	17	transfer	transfer	NOUN
app01-10361	46	18	.	.	PUNCT
app01-10361	47	1	the	the	DET
app01-10361	47	2	setup	setup	NOUN
app01-10361	47	3	also	also	ADV
app01-10361	47	4	includes	include	VERB
app01-10361	47	5	a	a	DET
app01-10361	47	6	water	water	NOUN
app01-10361	47	7	cooling	cool	VERB
app01-10361	47	8	circuit	circuit	NOUN
app01-10361	47	9	and	and	CCONJ
app01-10361	47	10	a	a	DET
app01-10361	47	11	copper	copper	NOUN
app01-10361	47	12	shield	shield	NOUN
app01-10361	47	13	to	to	PART
app01-10361	47	14	protect	protect	VERB
app01-10361	47	15	the	the	DET
app01-10361	47	16	indentation	indentation	NOUN
app01-10361	47	17	column	column	NOUN
app01-10361	47	18	from	from	ADP
app01-10361	47	19	heating	heat	VERB
app01-10361	47	20	during	during	ADP
app01-10361	47	21	experiments	experiment	NOUN
app01-10361	47	22	,	,	PUNCT
app01-10361	47	23	which	which	PRON
app01-10361	47	24	are	be	AUX
app01-10361	47	25	conducted	conduct	VERB
app01-10361	47	26	at	at	ADP
app01-10361	47	27	ambient	ambient	ADJ
app01-10361	47	28	air	air	NOUN
app01-10361	47	29	.	.	PUNCT
app01-10361	48	1	this	this	DET
app01-10361	48	2	system	system	NOUN
app01-10361	48	3	provides	provide	VERB
app01-10361	48	4	a	a	DET
app01-10361	48	5	ramping	ramp	VERB
app01-10361	48	6	rate	rate	NOUN
app01-10361	48	7	of	of	ADP
app01-10361	48	8	100	100	NUM
app01-10361	48	9	°	°	NOUN
app01-10361	48	10	cmin−1	cmin−1	PROPN
app01-10361	48	11	and	and	CCONJ
app01-10361	48	12	a	a	DET
app01-10361	48	13	precise	precise	ADJ
app01-10361	48	14	temperature	temperature	NOUN
app01-10361	48	15	control	control	NOUN
app01-10361	48	16	(	(	PUNCT
app01-10361	48	17	±	±	NOUN
app01-10361	48	18	0.1	0.1	NUM
app01-10361	48	19	°	°	NOUN
app01-10361	48	20	c	c	NOUN
app01-10361	48	21	)	)	PUNCT
app01-10361	48	22	,	,	PUNCT
app01-10361	48	23	ensuring	ensure	VERB
app01-10361	48	24	that	that	SCONJ
app01-10361	48	25	the	the	DET
app01-10361	48	26	tip	tip	NOUN
app01-10361	48	27	and	and	CCONJ
app01-10361	48	28	the	the	DET
app01-10361	48	29	sample	sample	NOUN
app01-10361	48	30	are	be	AUX
app01-10361	48	31	at	at	ADP
app01-10361	48	32	thermal	thermal	ADJ
app01-10361	48	33	equilibrium	equilibrium	NOUN
app01-10361	48	34	before	before	ADP
app01-10361	48	35	contact	contact	NOUN
app01-10361	48	36	.	.	PUNCT
app01-10361	49	1	thermal	thermal	ADJ
app01-10361	49	2	drift	drift	NOUN
app01-10361	49	3	correction	correction	NOUN
app01-10361	49	4	is	be	AUX
app01-10361	49	5	applied	apply	VERB
app01-10361	49	6	by	by	ADP
app01-10361	49	7	measuring	measure	VERB
app01-10361	49	8	it	it	PRON
app01-10361	49	9	at	at	ADP
app01-10361	49	10	90	90	NUM
app01-10361	49	11	%	%	NOUN
app01-10361	49	12	of	of	ADP
app01-10361	49	13	the	the	DET
app01-10361	49	14	unloading	unloading	NOUN
app01-10361	49	15	segment	segment	NOUN
app01-10361	49	16	and	and	CCONJ
app01-10361	49	17	assuming	assume	VERB
app01-10361	49	18	it	it	PRON
app01-10361	49	19	remains	remain	VERB
app01-10361	49	20	constant	constant	ADJ
app01-10361	49	21	throughout	throughout	ADP
app01-10361	49	22	the	the	DET
app01-10361	49	23	test	test	NOUN
app01-10361	49	24	.	.	PUNCT
app01-10361	50	1	standard	standard	ADJ
app01-10361	50	2	calibration	calibration	NOUN
app01-10361	50	3	using	use	VERB
app01-10361	50	4	a	a	DET
app01-10361	50	5	fused	fuse	VERB
app01-10361	50	6	silica	silica	NOUN
app01-10361	50	7	sample	sample	NOUN
app01-10361	50	8	is	be	AUX
app01-10361	50	9	performed	perform	VERB
app01-10361	50	10	before	before	ADP
app01-10361	50	11	the	the	DET
app01-10361	50	12	tests	test	NOUN
app01-10361	50	13	,	,	PUNCT
app01-10361	50	14	[	[	X
app01-10361	50	15	1	1	NUM
app01-10361	50	16	]	]	PUNCT
app01-10361	50	17	,	,	PUNCT
app01-10361	50	18	allowing	allow	VERB
app01-10361	50	19	the	the	DET
app01-10361	50	20	use	use	NOUN
app01-10361	50	21	of	of	ADP
app01-10361	50	22	the	the	DET
app01-10361	50	23	tip	tip	NOUN
app01-10361	50	24	’s	’s	PART
app01-10361	50	25	real	real	ADJ
app01-10361	50	26	shape	shape	NOUN
app01-10361	50	27	for	for	ADP
app01-10361	50	28	measurement	measurement	NOUN
app01-10361	50	29	analysis	analysis	NOUN
app01-10361	50	30	.	.	PUNCT
app01-10361	51	1	2.2	2.2	NUM
app01-10361	51	2	.	.	PUNCT
app01-10361	51	3	multilayer	multilayer	ADJ
app01-10361	51	4	model	model	NOUN
app01-10361	51	5	it	it	PRON
app01-10361	51	6	should	should	AUX
app01-10361	51	7	be	be	AUX
app01-10361	51	8	emphasized	emphasize	VERB
app01-10361	51	9	that	that	SCONJ
app01-10361	51	10	the	the	DET
app01-10361	51	11	measured	measure	VERB
app01-10361	51	12	reduced	reduce	VERB
app01-10361	51	13	elastic	elastic	ADJ
app01-10361	51	14	modulus	modulus	NOUN
app01-10361	51	15	is	be	AUX
app01-10361	51	16	the	the	DET
app01-10361	51	17	apparent	apparent	ADJ
app01-10361	51	18	one	one	NUM
app01-10361	51	19	of	of	ADP
app01-10361	51	20	a	a	DET
app01-10361	51	21	composite	composite	ADJ
app01-10361	51	22	dielectric	dielectric	NOUN
app01-10361	51	23	/	/	SYM
app01-10361	51	24	resin	resin	NOUN
app01-10361	51	25	/	/	SYM
app01-10361	51	26	substrate	substrate	NOUN
app01-10361	51	27	modulus	modulus	NOUN
app01-10361	51	28	.	.	PUNCT
app01-10361	52	1	in	in	ADP
app01-10361	52	2	order	order	NOUN
app01-10361	52	3	to	to	PART
app01-10361	52	4	isolate	isolate	VERB
app01-10361	52	5	the	the	DET
app01-10361	52	6	resin	resin	NOUN
app01-10361	52	7	’s	’s	PART
app01-10361	52	8	response	response	NOUN
app01-10361	52	9	,	,	PUNCT
app01-10361	52	10	an	an	DET
app01-10361	52	11	appropriate	appropriate	ADJ
app01-10361	52	12	bilayer	bilayer	NOUN
app01-10361	52	13	model	model	NOUN
app01-10361	52	14	must	must	AUX
app01-10361	52	15	be	be	AUX
app01-10361	52	16	used	use	VERB
app01-10361	52	17	.	.	PUNCT
app01-10361	53	1	here	here	ADV
app01-10361	53	2	,	,	PUNCT
app01-10361	53	3	the	the	DET
app01-10361	53	4	multilayer	multilayer	ADJ
app01-10361	53	5	model	model	NOUN
app01-10361	53	6	of	of	ADP
app01-10361	53	7	mercier	merci	ADJ
app01-10361	53	8	et	et	PROPN
app01-10361	53	9	al	al	PROPN
app01-10361	53	10	.	.	PUNCT
app01-10361	54	1	[	[	X
app01-10361	54	2	2	2	NUM
app01-10361	54	3	]	]	PUNCT
app01-10361	54	4	,	,	PUNCT
app01-10361	54	5	which	which	PRON
app01-10361	54	6	extends	extend	VERB
app01-10361	54	7	the	the	DET
app01-10361	54	8	monolayer	monolayer	NOUN
app01-10361	54	9	model	model	NOUN
app01-10361	54	10	of	of	ADP
app01-10361	54	11	bec	bec	PROPN
app01-10361	54	12	et	et	PROPN
app01-10361	54	13	al	al	PROPN
app01-10361	54	14	.	.	PUNCT
app01-10361	55	1	[	[	X
app01-10361	55	2	3	3	NUM
app01-10361	55	3	]	]	PUNCT
app01-10361	55	4	,	,	PUNCT
app01-10361	55	5	is	be	AUX
app01-10361	55	6	chosen	choose	VERB
app01-10361	55	7	.	.	PUNCT
app01-10361	56	1	the	the	DET
app01-10361	56	2	bec	bec	PROPN
app01-10361	56	3	model	model	NOUN
app01-10361	56	4	(	(	PUNCT
app01-10361	56	5	eq	eq	NOUN
app01-10361	56	6	.	.	NOUN
app01-10361	56	7	2	2	NUM
app01-10361	56	8	)	)	PUNCT
app01-10361	56	9	involves	involve	VERB
app01-10361	56	10	the	the	DET
app01-10361	56	11	reduced	reduce	VERB
app01-10361	56	12	modulus	modulus	NOUN
app01-10361	56	13	of	of	ADP
app01-10361	56	14	the	the	DET
app01-10361	56	15	film	film	NOUN
app01-10361	56	16	and	and	CCONJ
app01-10361	56	17	the	the	DET
app01-10361	56	18	substrate	substrate	NOUN
app01-10361	56	19	,	,	PUNCT
app01-10361	56	20	respectively	respectively	ADV
app01-10361	56	21	e∗	e∗	PROPN
app01-10361	56	22	f	f	PROPN
app01-10361	56	23	and	and	CCONJ
app01-10361	56	24	e∗	e∗	PROPN
app01-10361	56	25	s	s	PART
app01-10361	56	26	,	,	PUNCT
app01-10361	56	27	the	the	DET
app01-10361	56	28	film	film	NOUN
app01-10361	56	29	thickness	thickness	NOUN
app01-10361	56	30	t	t	PROPN
app01-10361	56	31	and	and	CCONJ
app01-10361	56	32	the	the	DET
app01-10361	56	33	contact	contact	NOUN
app01-10361	56	34	radius	radius	PROPN
app01-10361	56	35	rc	rc	PROPN
app01-10361	56	36	.	.	PUNCT
app01-10361	57	1	this	this	DET
app01-10361	57	2	monolayer	monolayer	NOUN
app01-10361	57	3	model	model	NOUN
app01-10361	57	4	relies	rely	VERB
app01-10361	57	5	on	on	ADP
app01-10361	57	6	several	several	ADJ
app01-10361	57	7	hypothesis	hypothesis	NOUN
app01-10361	57	8	.	.	PUNCT
app01-10361	58	1	first	first	ADV
app01-10361	58	2	that	that	SCONJ
app01-10361	58	3	the	the	DET
app01-10361	58	4	system	system	NOUN
app01-10361	58	5	’s	’s	PART
app01-10361	58	6	equivalent	equivalent	ADJ
app01-10361	58	7	stiffness	stiffness	NOUN
app01-10361	58	8	can	can	AUX
app01-10361	58	9	be	be	AUX
app01-10361	58	10	obtained	obtain	VERB
app01-10361	58	11	by	by	ADP
app01-10361	58	12	applying	apply	VERB
app01-10361	58	13	the	the	DET
app01-10361	58	14	reciprocal	reciprocal	ADJ
app01-10361	58	15	sum	sum	NOUN
app01-10361	58	16	of	of	ADP
app01-10361	58	17	the	the	DET
app01-10361	58	18	film	film	NOUN
app01-10361	58	19	and	and	CCONJ
app01-10361	58	20	substrate	substrate	NOUN
app01-10361	58	21	equivalent	equivalent	ADJ
app01-10361	58	22	stiffnesses	stiffness	NOUN
app01-10361	58	23	.	.	PUNCT
app01-10361	59	1	secondly	secondly	ADV
app01-10361	59	2	,	,	PUNCT
app01-10361	59	3	that	that	SCONJ
app01-10361	59	4	both	both	PRON
app01-10361	59	5	exhibit	exhibit	VERB
app01-10361	59	6	elastic	elastic	ADJ
app01-10361	59	7	behavior	behavior	NOUN
app01-10361	59	8	.	.	PUNCT
app01-10361	60	1	lastly	lastly	ADV
app01-10361	60	2	,	,	PUNCT
app01-10361	60	3	that	that	SCONJ
app01-10361	60	4	the	the	DET
app01-10361	60	5	pressure	pressure	NOUN
app01-10361	60	6	is	be	AUX
app01-10361	60	7	applied	apply	VERB
app01-10361	60	8	by	by	ADP
app01-10361	60	9	a	a	DET
app01-10361	60	10	flat	flat	ADJ
app01-10361	60	11	cylindrical	cylindrical	ADJ
app01-10361	60	12	punch	punch	NOUN
app01-10361	60	13	.	.	PUNCT
app01-10361	61	1	the	the	DET
app01-10361	61	2	relative	relative	ADJ
app01-10361	61	3	influences	influence	NOUN
app01-10361	61	4	of	of	ADP
app01-10361	61	5	the	the	DET
app01-10361	61	6	film	film	NOUN
app01-10361	61	7	and	and	CCONJ
app01-10361	61	8	substrate	substrate	NOUN
app01-10361	61	9	are	be	AUX
app01-10361	61	10	weighted	weight	VERB
app01-10361	61	11	by	by	ADP
app01-10361	61	12	a	a	DET
app01-10361	61	13	function	function	NOUN
app01-10361	61	14	derived	derive	VERB
app01-10361	61	15	from	from	ADP
app01-10361	61	16	finite	finite	ADJ
app01-10361	61	17	-	-	ADJ
app01-10361	61	18	element	element	ADJ
app01-10361	61	19	analysis	analysis	NOUN
app01-10361	61	20	.	.	PUNCT
app01-10361	62	1	kz	kz	PROPN
app01-10361	62	2	=	=	PRON
app01-10361	62	3	(	(	PUNCT
app01-10361	62	4	1	1	NUM
app01-10361	62	5	+	+	SYM
app01-10361	62	6	2	2	NUM
app01-10361	62	7	t	t	NOUN
app01-10361	62	8	πrc	πrc	X
app01-10361	62	9	)	)	PUNCT
app01-10361	62	10	(	(	PUNCT
app01-10361	62	11	t	t	PROPN
app01-10361	62	12	πr2	πr2	NOUN
app01-10361	62	13	ce	ce	PROPN
app01-10361	62	14	∗	∗	X
app01-10361	62	15	f	f	PROPN
app01-10361	63	1	+	+	CCONJ
app01-10361	63	2	1	1	NUM
app01-10361	63	3	2rce∗	2rce∗	NUM
app01-10361	63	4	s	s	NOUN
app01-10361	63	5	)	)	PUNCT
app01-10361	63	6	−1	−1	NOUN
app01-10361	63	7	(	(	PUNCT
app01-10361	63	8	2	2	NUM
app01-10361	63	9	)	)	PUNCT
app01-10361	63	10	the	the	DET
app01-10361	63	11	mercier	mercier	PROPN
app01-10361	63	12	’s	’s	PART
app01-10361	63	13	multilayer	multilayer	ADJ
app01-10361	63	14	model	model	NOUN
app01-10361	63	15	(	(	PUNCT
app01-10361	63	16	eq	eq	NOUN
app01-10361	63	17	.	.	NOUN
app01-10361	63	18	3	3	NUM
app01-10361	63	19	)	)	PUNCT
app01-10361	63	20	involves	involve	VERB
app01-10361	63	21	the	the	DET
app01-10361	63	22	reduced	reduce	VERB
app01-10361	63	23	young	young	ADJ
app01-10361	63	24	’s	’s	PART
app01-10361	63	25	modulus	modulus	NOUN
app01-10361	63	26	of	of	ADP
app01-10361	63	27	the	the	DET
app01-10361	63	28	layers	layer	NOUN
app01-10361	63	29	and	and	CCONJ
app01-10361	63	30	the	the	DET
app01-10361	63	31	substrate	substrate	NOUN
app01-10361	63	32	,	,	PUNCT
app01-10361	63	33	respectively	respectively	ADV
app01-10361	63	34	e∗	e∗	PROPN
app01-10361	63	35	i	i	PROPN
app01-10361	63	36	and	and	CCONJ
app01-10361	63	37	e∗	e∗	PROPN
app01-10361	63	38	s	s	PART
app01-10361	63	39	,	,	PUNCT
app01-10361	63	40	the	the	DET
app01-10361	63	41	films	film	NOUN
app01-10361	63	42	thicknesses	thicknesse	VERB
app01-10361	63	43	ti	ti	NOUN
app01-10361	63	44	,	,	PUNCT
app01-10361	63	45	and	and	CCONJ
app01-10361	63	46	the	the	DET
app01-10361	63	47	calculated	calculate	VERB
app01-10361	63	48	contact	contact	NOUN
app01-10361	63	49	radius	radius	NOUN
app01-10361	63	50	at	at	ADP
app01-10361	63	51	the	the	DET
app01-10361	63	52	layer	layer	NOUN
app01-10361	63	53	number	number	NOUN
app01-10361	63	54	i	i	PROPN
app01-10361	63	55	,	,	PUNCT
app01-10361	63	56	rci	rci	PROPN
app01-10361	63	57	(	(	PUNCT
app01-10361	63	58	eq	eq	NOUN
app01-10361	63	59	.	.	PROPN
app01-10361	63	60	4	4	NUM
app01-10361	63	61	)	)	PUNCT
app01-10361	63	62	.	.	PUNCT
app01-10361	64	1	50	50	NUM
app01-10361	64	2	vol	vol	NOUN
app01-10361	64	3	.	.	PUNCT
app01-10361	65	1	50/2024	50/2024	NUM
app01-10361	65	2	comparison	comparison	NOUN
app01-10361	65	3	of	of	ADP
app01-10361	65	4	berkovich	berkovich	NOUN
app01-10361	65	5	and	and	CCONJ
app01-10361	65	6	spherical	spherical	ADJ
app01-10361	65	7	tip	tip	NOUN
app01-10361	65	8	indentation	indentation	NOUN
app01-10361	65	9	.	.	PUNCT
app01-10361	65	10	.	.	PUNCT
app01-10361	66	1	.	.	PUNCT
app01-10361	67	1	properties	property	NOUN
app01-10361	67	2	top	top	VERB
app01-10361	67	3	coat	coat	NOUN
app01-10361	67	4	polymer	polymer	NOUN
app01-10361	67	5	silicon	silicon	NOUN
app01-10361	67	6	substrate	substrate	NOUN
app01-10361	67	7	thickness	thickness	NOUN
app01-10361	68	1	[	[	X
app01-10361	68	2	nm	nm	X
app01-10361	68	3	]	]	X
app01-10361	68	4	200	200	NUM
app01-10361	68	5	and	and	CCONJ
app01-10361	68	6	600	600	NUM
app01-10361	68	7	3	3	NUM
app01-10361	68	8	000	000	NUM
app01-10361	68	9	/	/	SYM
app01-10361	68	10	young	young	ADJ
app01-10361	68	11	’s	’s	PART
app01-10361	68	12	modulus	modulus	NOUN
app01-10361	68	13	[	[	X
app01-10361	68	14	gpa	gpa	X
app01-10361	68	15	]	]	X
app01-10361	68	16	42	42	NUM
app01-10361	68	17	and	and	CCONJ
app01-10361	68	18	35	35	NUM
app01-10361	68	19	[	[	NOUN
app01-10361	68	20	0.1–10	0.1–10	X
app01-10361	68	21	]	]	X
app01-10361	68	22	165	165	NUM
app01-10361	68	23	[	[	SYM
app01-10361	68	24	4	4	NUM
app01-10361	68	25	]	]	X
app01-10361	68	26	poisson	poisson	NOUN
app01-10361	68	27	ratio	ratio	NOUN
app01-10361	68	28	0.23	0.23	NUM
app01-10361	69	1	[	[	X
app01-10361	69	2	5	5	NUM
app01-10361	69	3	]	]	PUNCT
app01-10361	69	4	0.35	0.35	NUM
app01-10361	70	1	[	[	X
app01-10361	70	2	6	6	NUM
app01-10361	70	3	]	]	PUNCT
app01-10361	70	4	0.22	0.22	NUM
app01-10361	70	5	[	[	SYM
app01-10361	70	6	4	4	NUM
app01-10361	70	7	]	]	ADJ
app01-10361	70	8	table	table	NOUN
app01-10361	70	9	1	1	NUM
app01-10361	70	10	.	.	PUNCT
app01-10361	70	11	material	material	NOUN
app01-10361	70	12	properties	property	NOUN
app01-10361	70	13	used	use	VERB
app01-10361	70	14	in	in	ADP
app01-10361	70	15	finite	finite	ADJ
app01-10361	70	16	-	-	ADJ
app01-10361	70	17	element	element	ADJ
app01-10361	70	18	simulations	simulation	NOUN
app01-10361	70	19	.	.	PUNCT
app01-10361	71	1	thicknesses	thickness	NOUN
app01-10361	71	2	as	as	ADV
app01-10361	71	3	well	well	ADV
app01-10361	71	4	as	as	ADP
app01-10361	71	5	the	the	DET
app01-10361	71	6	young	young	ADJ
app01-10361	71	7	’s	’s	PART
app01-10361	71	8	modulus	modulus	NOUN
app01-10361	71	9	of	of	ADP
app01-10361	71	10	the	the	DET
app01-10361	71	11	films	film	NOUN
app01-10361	71	12	are	be	AUX
app01-10361	71	13	experimentally	experimentally	ADV
app01-10361	71	14	determined	determine	VERB
app01-10361	71	15	.	.	PUNCT
app01-10361	72	1	poisson	poisson	PROPN
app01-10361	72	2	ratios	ratio	NOUN
app01-10361	72	3	and	and	CCONJ
app01-10361	72	4	the	the	DET
app01-10361	72	5	young	young	ADJ
app01-10361	72	6	’s	’s	PART
app01-10361	72	7	modulus	modulus	NOUN
app01-10361	72	8	of	of	ADP
app01-10361	72	9	the	the	DET
app01-10361	72	10	substrate	substrate	NOUN
app01-10361	72	11	are	be	AUX
app01-10361	72	12	obtained	obtain	VERB
app01-10361	72	13	from	from	ADP
app01-10361	72	14	the	the	DET
app01-10361	72	15	literature	literature	NOUN
app01-10361	72	16	.	.	PUNCT
app01-10361	73	1	kz	kz	PROPN
app01-10361	73	2	=	=	PRON
app01-10361	74	1	(	(	PUNCT
app01-10361	74	2	n∑	n∑	INTJ
app01-10361	74	3	i=0	i=0	PROPN
app01-10361	74	4	ti	ti	X
app01-10361	74	5	(	(	PUNCT
app01-10361	74	6	πr2	πr2	NOUN
app01-10361	74	7	ci	ci	NOUN
app01-10361	75	1	+	+	CCONJ
app01-10361	76	1	2rciti)e∗	2rciti)e∗	NUM
app01-10361	76	2	i	i	NOUN
app01-10361	76	3	+	+	VERB
app01-10361	76	4	1	1	NUM
app01-10361	76	5	2(rcn	2(rcn	NUM
app01-10361	77	1	+	+	CCONJ
app01-10361	77	2	2tn	2tn	ADJ
app01-10361	77	3	π	π	NOUN
app01-10361	77	4	)	)	PUNCT
app01-10361	77	5	e∗	e∗	PROPN
app01-10361	77	6	s	s	PART
app01-10361	77	7	)	)	PUNCT
app01-10361	77	8	−1	−1	NOUN
app01-10361	77	9	(	(	PUNCT
app01-10361	77	10	3	3	NUM
app01-10361	77	11	)	)	PUNCT
app01-10361	77	12	with	with	ADP
app01-10361	77	13	rc(i+1	rc(i+1	NOUN
app01-10361	77	14	)	)	PUNCT
app01-10361	77	15	=	=	SYM
app01-10361	77	16	rci	rci	PROPN
app01-10361	78	1	+	+	CCONJ
app01-10361	78	2	2ti	2ti	ADJ
app01-10361	78	3	π	π	PROPN
app01-10361	78	4	(	(	PUNCT
app01-10361	78	5	4	4	NUM
app01-10361	78	6	)	)	PUNCT
app01-10361	78	7	here	here	ADV
app01-10361	78	8	,	,	PUNCT
app01-10361	78	9	this	this	DET
app01-10361	78	10	multilayer	multilayer	ADJ
app01-10361	78	11	model	model	NOUN
app01-10361	78	12	is	be	AUX
app01-10361	78	13	used	use	VERB
app01-10361	78	14	for	for	ADP
app01-10361	78	15	extracting	extract	VERB
app01-10361	78	16	the	the	DET
app01-10361	78	17	young	young	ADJ
app01-10361	78	18	’s	’s	PART
app01-10361	78	19	modulus	modulus	NOUN
app01-10361	78	20	of	of	ADP
app01-10361	78	21	the	the	DET
app01-10361	78	22	polymer	polymer	NOUN
app01-10361	78	23	when	when	SCONJ
app01-10361	78	24	encapsulated	encapsulate	VERB
app01-10361	78	25	by	by	ADP
app01-10361	78	26	a	a	DET
app01-10361	78	27	top	top	ADJ
app01-10361	78	28	coat	coat	NOUN
app01-10361	78	29	,	,	PUNCT
app01-10361	78	30	given	give	VERB
app01-10361	78	31	that	that	SCONJ
app01-10361	78	32	the	the	DET
app01-10361	78	33	young	young	PROPN
app01-10361	78	34	’s	’s	PART
app01-10361	78	35	modulus	modulus	NOUN
app01-10361	78	36	of	of	ADP
app01-10361	78	37	the	the	DET
app01-10361	78	38	top	top	ADJ
app01-10361	78	39	coat	coat	NOUN
app01-10361	78	40	is	be	AUX
app01-10361	78	41	already	already	ADV
app01-10361	78	42	known	know	VERB
app01-10361	78	43	.	.	PUNCT
app01-10361	79	1	3	3	X
app01-10361	79	2	.	.	X
app01-10361	79	3	finite	finite	ADJ
app01-10361	79	4	-	-	ADJ
app01-10361	79	5	element	element	ADJ
app01-10361	79	6	model	model	NOUN
app01-10361	79	7	the	the	DET
app01-10361	79	8	validity	validity	NOUN
app01-10361	79	9	of	of	ADP
app01-10361	79	10	the	the	DET
app01-10361	79	11	mercier	mercier	PROPN
app01-10361	79	12	’s	’s	PART
app01-10361	79	13	multilayer	multilayer	ADJ
app01-10361	79	14	model	model	NOUN
app01-10361	79	15	depends	depend	VERB
app01-10361	79	16	on	on	ADP
app01-10361	79	17	several	several	ADJ
app01-10361	79	18	parameters	parameter	NOUN
app01-10361	79	19	:	:	PUNCT
app01-10361	79	20	the	the	DET
app01-10361	79	21	mismatch	mismatch	NOUN
app01-10361	79	22	of	of	ADP
app01-10361	79	23	elastic	elastic	ADJ
app01-10361	79	24	properties	property	NOUN
app01-10361	79	25	between	between	ADP
app01-10361	79	26	the	the	DET
app01-10361	79	27	films	film	NOUN
app01-10361	79	28	(	(	PUNCT
app01-10361	79	29	etopcoat	etopcoat	NOUN
app01-10361	79	30	/	/	SYM
app01-10361	79	31	epolymer	epolymer	NOUN
app01-10361	79	32	)	)	PUNCT
app01-10361	79	33	and	and	CCONJ
app01-10361	79	34	between	between	ADP
app01-10361	79	35	the	the	DET
app01-10361	79	36	films	film	NOUN
app01-10361	79	37	and	and	CCONJ
app01-10361	79	38	the	the	DET
app01-10361	79	39	substrate	substrate	NOUN
app01-10361	79	40	(	(	PUNCT
app01-10361	79	41	etopcoat	etopcoat	VERB
app01-10361	79	42	/	/	SYM
app01-10361	79	43	esubstrate	esubstrate	ADJ
app01-10361	79	44	)	)	PUNCT
app01-10361	79	45	,	,	PUNCT
app01-10361	79	46	the	the	DET
app01-10361	79	47	contact	contact	NOUN
app01-10361	79	48	radius	radius	PROPN
app01-10361	79	49	rc	rc	PROPN
app01-10361	79	50	and	and	CCONJ
app01-10361	79	51	the	the	DET
app01-10361	79	52	ratio	ratio	NOUN
app01-10361	79	53	of	of	ADP
app01-10361	79	54	the	the	DET
app01-10361	79	55	thicknesses	thickness	NOUN
app01-10361	79	56	of	of	ADP
app01-10361	79	57	the	the	DET
app01-10361	79	58	films	film	NOUN
app01-10361	79	59	(	(	PUNCT
app01-10361	79	60	ttopcoat	ttopcoat	NOUN
app01-10361	79	61	/	/	SYM
app01-10361	79	62	tpolymer	tpolymer	NOUN
app01-10361	79	63	)	)	PUNCT
app01-10361	79	64	.	.	PUNCT
app01-10361	80	1	finite	finite	ADJ
app01-10361	80	2	-	-	ADJ
app01-10361	80	3	element	element	ADJ
app01-10361	80	4	simulations	simulation	NOUN
app01-10361	80	5	of	of	ADP
app01-10361	80	6	the	the	DET
app01-10361	80	7	complete	complete	ADJ
app01-10361	80	8	stack	stack	NOUN
app01-10361	80	9	are	be	AUX
app01-10361	80	10	conducted	conduct	VERB
app01-10361	80	11	to	to	PART
app01-10361	80	12	define	define	VERB
app01-10361	80	13	,	,	PUNCT
app01-10361	80	14	for	for	ADP
app01-10361	80	15	this	this	DET
app01-10361	80	16	specific	specific	ADJ
app01-10361	80	17	case	case	NOUN
app01-10361	80	18	,	,	PUNCT
app01-10361	80	19	the	the	DET
app01-10361	80	20	validity	validity	NOUN
app01-10361	80	21	domain	domain	NOUN
app01-10361	80	22	of	of	ADP
app01-10361	80	23	the	the	DET
app01-10361	80	24	model	model	NOUN
app01-10361	80	25	.	.	PUNCT
app01-10361	81	1	the	the	DET
app01-10361	81	2	layers	layer	NOUN
app01-10361	81	3	’	'	PUNCT
app01-10361	81	4	thicknesses	thickness	NOUN
app01-10361	81	5	,	,	PUNCT
app01-10361	81	6	their	their	PRON
app01-10361	81	7	young	young	ADJ
app01-10361	81	8	’s	’s	PART
app01-10361	81	9	moduli	modulus	NOUN
app01-10361	81	10	and	and	CCONJ
app01-10361	81	11	poisson	poisson	PROPN
app01-10361	81	12	’s	’s	PART
app01-10361	81	13	ratios	ratio	NOUN
app01-10361	81	14	used	use	VERB
app01-10361	81	15	in	in	ADP
app01-10361	81	16	the	the	DET
app01-10361	81	17	finite	finite	ADJ
app01-10361	81	18	-	-	ADJ
app01-10361	81	19	element	element	ADJ
app01-10361	81	20	simulations	simulation	NOUN
app01-10361	81	21	are	be	AUX
app01-10361	81	22	detailed	detail	VERB
app01-10361	81	23	in	in	ADP
app01-10361	81	24	table	table	NOUN
app01-10361	81	25	1	1	NUM
app01-10361	81	26	.	.	PUNCT
app01-10361	82	1	the	the	DET
app01-10361	82	2	poisson	poisson	NOUN
app01-10361	82	3	’s	’s	PART
app01-10361	82	4	ratio	ratio	NOUN
app01-10361	82	5	and	and	CCONJ
app01-10361	82	6	the	the	DET
app01-10361	82	7	young	young	ADJ
app01-10361	82	8	’s	’s	PART
app01-10361	82	9	modulus	modulus	NOUN
app01-10361	82	10	of	of	ADP
app01-10361	82	11	the	the	DET
app01-10361	82	12	substrate	substrate	NOUN
app01-10361	82	13	,	,	PUNCT
app01-10361	82	14	suitable	suitable	ADJ
app01-10361	82	15	to	to	ADP
app01-10361	82	16	nanoindentation	nanoindentation	NOUN
app01-10361	82	17	simulations	simulation	NOUN
app01-10361	82	18	,	,	PUNCT
app01-10361	82	19	are	be	AUX
app01-10361	82	20	obtained	obtain	VERB
app01-10361	82	21	from	from	ADP
app01-10361	82	22	the	the	DET
app01-10361	82	23	literature	literature	NOUN
app01-10361	82	24	.	.	PUNCT
app01-10361	83	1	the	the	DET
app01-10361	83	2	poisson	poisson	NOUN
app01-10361	83	3	’s	’s	PART
app01-10361	83	4	ratios	ratio	NOUN
app01-10361	83	5	of	of	ADP
app01-10361	83	6	the	the	DET
app01-10361	83	7	top	top	ADJ
app01-10361	83	8	coat	coat	NOUN
app01-10361	83	9	and	and	CCONJ
app01-10361	83	10	the	the	DET
app01-10361	83	11	polymer	polymer	NOUN
app01-10361	83	12	are	be	AUX
app01-10361	83	13	also	also	ADV
app01-10361	83	14	sourced	source	VERB
app01-10361	83	15	from	from	ADP
app01-10361	83	16	literature	literature	NOUN
app01-10361	83	17	.	.	PUNCT
app01-10361	84	1	the	the	DET
app01-10361	84	2	reduced	reduce	VERB
app01-10361	84	3	elastic	elastic	ADJ
app01-10361	84	4	modulus	modulus	NOUN
app01-10361	84	5	of	of	ADP
app01-10361	84	6	the	the	DET
app01-10361	84	7	200	200	NUM
app01-10361	84	8	nm	nm	NOUN
app01-10361	84	9	and	and	CCONJ
app01-10361	84	10	600	600	NUM
app01-10361	84	11	nm	nm	ADV
app01-10361	84	12	thick	thick	ADJ
app01-10361	84	13	top	top	ADJ
app01-10361	84	14	coat	coat	NOUN
app01-10361	84	15	are	be	AUX
app01-10361	84	16	experimentally	experimentally	ADV
app01-10361	84	17	determined	determine	VERB
app01-10361	84	18	to	to	PART
app01-10361	84	19	be	be	AUX
app01-10361	84	20	42gpa	42gpa	NUM
app01-10361	84	21	and	and	CCONJ
app01-10361	84	22	35gpa	35gpa	NOUN
app01-10361	84	23	respectively	respectively	ADV
app01-10361	84	24	through	through	ADP
app01-10361	84	25	nanoindentation	nanoindentation	NOUN
app01-10361	84	26	tests	test	NOUN
app01-10361	84	27	.	.	PUNCT
app01-10361	85	1	the	the	DET
app01-10361	85	2	tests	test	NOUN
app01-10361	85	3	are	be	AUX
app01-10361	85	4	performed	perform	VERB
app01-10361	85	5	at	at	ADP
app01-10361	85	6	room	room	NOUN
app01-10361	85	7	temperature	temperature	NOUN
app01-10361	85	8	on	on	ADP
app01-10361	85	9	a	a	DET
app01-10361	85	10	sample	sample	NOUN
app01-10361	85	11	consisting	consist	VERB
app01-10361	85	12	of	of	ADP
app01-10361	85	13	the	the	DET
app01-10361	85	14	top	top	ADJ
app01-10361	85	15	coat	coat	NOUN
app01-10361	85	16	layer	layer	NOUN
app01-10361	85	17	deposited	deposit	VERB
app01-10361	85	18	on	on	ADP
app01-10361	85	19	a	a	DET
app01-10361	85	20	silicon	silicon	NOUN
app01-10361	85	21	substrate	substrate	NOUN
app01-10361	85	22	.	.	PUNCT
app01-10361	86	1	indentation	indentation	NOUN
app01-10361	86	2	is	be	AUX
app01-10361	86	3	carried	carry	VERB
app01-10361	86	4	out	out	ADP
app01-10361	86	5	using	use	VERB
app01-10361	86	6	the	the	DET
app01-10361	86	7	csm	csm	NOUN
app01-10361	86	8	mode	mode	NOUN
app01-10361	86	9	and	and	CCONJ
app01-10361	86	10	a	a	DET
app01-10361	86	11	standard	standard	ADJ
app01-10361	86	12	berkovich	berkovich	NOUN
app01-10361	86	13	tip	tip	NOUN
app01-10361	86	14	.	.	PUNCT
app01-10361	87	1	the	the	DET
app01-10361	87	2	bec	bec	PROPN
app01-10361	87	3	model	model	NOUN
app01-10361	87	4	is	be	AUX
app01-10361	87	5	used	use	VERB
app01-10361	87	6	to	to	PART
app01-10361	87	7	extract	extract	VERB
app01-10361	87	8	the	the	DET
app01-10361	87	9	young	young	ADJ
app01-10361	87	10	’s	’s	PART
app01-10361	87	11	modulus	modulus	NOUN
app01-10361	87	12	.	.	PUNCT
app01-10361	88	1	to	to	PART
app01-10361	88	2	establish	establish	VERB
app01-10361	88	3	a	a	DET
app01-10361	88	4	reference	reference	NOUN
app01-10361	88	5	reduced	reduce	VERB
app01-10361	88	6	modulus	modulus	ADJ
app01-10361	88	7	value	value	NOUN
app01-10361	88	8	for	for	ADP
app01-10361	88	9	the	the	DET
app01-10361	88	10	polymer	polymer	NOUN
app01-10361	88	11	,	,	PUNCT
app01-10361	88	12	nanoindentation	nanoindentation	NOUN
app01-10361	88	13	tests	test	NOUN
app01-10361	88	14	with	with	ADP
app01-10361	88	15	both	both	DET
app01-10361	88	16	berkovich	berkovich	NOUN
app01-10361	88	17	and	and	CCONJ
app01-10361	88	18	50	50	NUM
app01-10361	88	19	µm	µm	ADP
app01-10361	88	20	spherical	spherical	ADJ
app01-10361	88	21	tip	tip	NOUN
app01-10361	88	22	are	be	AUX
app01-10361	88	23	performed	perform	VERB
app01-10361	88	24	on	on	ADP
app01-10361	88	25	a	a	DET
app01-10361	88	26	3	3	NUM
app01-10361	88	27	µm	µm	NOUN
app01-10361	88	28	thick	thick	ADJ
app01-10361	88	29	polymer	polymer	NOUN
app01-10361	88	30	film	film	NOUN
app01-10361	88	31	deposited	deposit	VERB
app01-10361	88	32	on	on	ADP
app01-10361	88	33	a	a	DET
app01-10361	88	34	silicon	silicon	NOUN
app01-10361	88	35	substrate	substrate	NOUN
app01-10361	88	36	.	.	PUNCT
app01-10361	89	1	the	the	DET
app01-10361	89	2	reduced	reduce	VERB
app01-10361	89	3	elastic	elastic	ADJ
app01-10361	89	4	moduli	modulus	NOUN
app01-10361	89	5	obtained	obtain	VERB
app01-10361	89	6	from	from	ADP
app01-10361	89	7	performing	perform	VERB
app01-10361	89	8	16	16	NUM
app01-10361	89	9	indentations	indentation	NOUN
app01-10361	89	10	on	on	ADP
app01-10361	89	11	each	each	DET
app01-10361	89	12	sample	sample	NOUN
app01-10361	89	13	are	be	AUX
app01-10361	89	14	(	(	PUNCT
app01-10361	89	15	4.8	4.8	NUM
app01-10361	89	16	±	±	NUM
app01-10361	89	17	0.3)gpa	0.3)gpa	NOUN
app01-10361	89	18	for	for	ADP
app01-10361	89	19	the	the	DET
app01-10361	89	20	berkovich	berkovich	NOUN
app01-10361	89	21	tip	tip	NOUN
app01-10361	89	22	indentation	indentation	NOUN
app01-10361	89	23	and	and	CCONJ
app01-10361	89	24	(	(	PUNCT
app01-10361	89	25	5.5	5.5	NUM
app01-10361	89	26	±	±	NUM
app01-10361	89	27	0.9)gpa	0.9)gpa	NOUN
app01-10361	89	28	for	for	ADP
app01-10361	89	29	the	the	DET
app01-10361	89	30	50	50	NUM
app01-10361	89	31	µm	µm	ADP
app01-10361	89	32	spherical	spherical	ADJ
app01-10361	89	33	tip	tip	NOUN
app01-10361	89	34	indentation	indentation	NOUN
app01-10361	89	35	.	.	PUNCT
app01-10361	90	1	here	here	ADV
app01-10361	90	2	,	,	PUNCT
app01-10361	90	3	berkovich	berkovich	NOUN
app01-10361	90	4	indentation	indentation	NOUN
app01-10361	90	5	simulations	simulation	NOUN
app01-10361	90	6	are	be	AUX
app01-10361	90	7	conducted	conduct	VERB
app01-10361	90	8	to	to	PART
app01-10361	90	9	study	study	VERB
app01-10361	90	10	the	the	DET
app01-10361	90	11	validity	validity	NOUN
app01-10361	90	12	domains	domain	NOUN
app01-10361	90	13	of	of	ADP
app01-10361	90	14	mercier	mercier	PROPN
app01-10361	90	15	’s	’s	PART
app01-10361	90	16	multilayer	multilayer	ADJ
app01-10361	90	17	model	model	NOUN
app01-10361	90	18	for	for	ADP
app01-10361	90	19	room	room	NOUN
app01-10361	90	20	temperature	temperature	NOUN
app01-10361	90	21	measurements	measurement	NOUN
app01-10361	90	22	.	.	PUNCT
app01-10361	91	1	therefore	therefore	ADV
app01-10361	91	2	,	,	PUNCT
app01-10361	91	3	berkovich	berkovich	PROPN
app01-10361	91	4	indentation	indentation	NOUN
app01-10361	91	5	simulations	simulation	NOUN
app01-10361	91	6	are	be	AUX
app01-10361	91	7	performed	perform	VERB
app01-10361	91	8	by	by	ADP
app01-10361	91	9	implementing	implement	VERB
app01-10361	91	10	a	a	DET
app01-10361	91	11	young	young	ADJ
app01-10361	91	12	’s	’s	PART
app01-10361	91	13	modulus	modulus	NOUN
app01-10361	91	14	of	of	ADP
app01-10361	91	15	4gpa	4gpa	NOUN
app01-10361	91	16	,	,	PUNCT
app01-10361	91	17	this	this	DET
app01-10361	91	18	value	value	NOUN
app01-10361	91	19	being	be	AUX
app01-10361	91	20	close	close	ADJ
app01-10361	91	21	to	to	ADP
app01-10361	91	22	the	the	DET
app01-10361	91	23	one	one	NUM
app01-10361	91	24	measured	measure	VERB
app01-10361	91	25	at	at	ADP
app01-10361	91	26	room	room	NOUN
app01-10361	91	27	temperature	temperature	NOUN
app01-10361	91	28	,	,	PUNCT
app01-10361	91	29	for	for	ADP
app01-10361	91	30	the	the	DET
app01-10361	91	31	polymer	polymer	NOUN
app01-10361	91	32	.	.	PUNCT
app01-10361	92	1	considering	consider	VERB
app01-10361	92	2	that	that	SCONJ
app01-10361	92	3	spherical	spherical	ADJ
app01-10361	92	4	indentation	indentation	NOUN
app01-10361	92	5	tests	test	NOUN
app01-10361	92	6	are	be	AUX
app01-10361	92	7	to	to	PART
app01-10361	92	8	be	be	AUX
app01-10361	92	9	performed	perform	VERB
app01-10361	92	10	at	at	ADP
app01-10361	92	11	elevated	elevated	ADJ
app01-10361	92	12	temperatures	temperature	NOUN
app01-10361	92	13	,	,	PUNCT
app01-10361	92	14	a	a	DET
app01-10361	92	15	consequent	consequent	ADJ
app01-10361	92	16	reduction	reduction	NOUN
app01-10361	92	17	in	in	ADP
app01-10361	92	18	the	the	DET
app01-10361	92	19	polymer	polymer	NOUN
app01-10361	92	20	’s	’s	PART
app01-10361	92	21	young	young	PROPN
app01-10361	92	22	’s	’s	PART
app01-10361	92	23	modulus	modulus	NOUN
app01-10361	92	24	is	be	AUX
app01-10361	92	25	anticipated	anticipate	VERB
app01-10361	92	26	.	.	PUNCT
app01-10361	93	1	consequently	consequently	ADV
app01-10361	93	2	,	,	PUNCT
app01-10361	93	3	50	50	NUM
app01-10361	93	4	µm	µm	ADP
app01-10361	93	5	spherical	spherical	ADJ
app01-10361	93	6	tip	tip	NOUN
app01-10361	93	7	indentation	indentation	NOUN
app01-10361	93	8	simulations	simulation	NOUN
app01-10361	93	9	are	be	AUX
app01-10361	93	10	executed	execute	VERB
app01-10361	93	11	across	across	ADP
app01-10361	93	12	a	a	DET
app01-10361	93	13	range	range	NOUN
app01-10361	93	14	of	of	ADP
app01-10361	93	15	young	young	ADJ
app01-10361	93	16	’s	’s	PART
app01-10361	93	17	modulus	modulus	ADJ
app01-10361	93	18	values	value	NOUN
app01-10361	93	19	for	for	ADP
app01-10361	93	20	the	the	DET
app01-10361	93	21	polymer	polymer	NOUN
app01-10361	93	22	layer	layer	NOUN
app01-10361	93	23	,	,	PUNCT
app01-10361	93	24	specifically	specifically	ADV
app01-10361	93	25	at	at	ADP
app01-10361	93	26	0.1	0.1	NUM
app01-10361	93	27	,	,	PUNCT
app01-10361	93	28	0.25	0.25	NUM
app01-10361	93	29	,	,	PUNCT
app01-10361	93	30	0.5	0.5	NUM
app01-10361	93	31	,	,	PUNCT
app01-10361	93	32	1	1	NUM
app01-10361	93	33	,	,	PUNCT
app01-10361	93	34	2.5	2.5	NUM
app01-10361	93	35	,	,	PUNCT
app01-10361	93	36	4	4	NUM
app01-10361	93	37	,	,	PUNCT
app01-10361	93	38	and	and	CCONJ
app01-10361	93	39	10gpa	10gpa	NOUN
app01-10361	93	40	.	.	PUNCT
app01-10361	94	1	since	since	SCONJ
app01-10361	94	2	the	the	DET
app01-10361	94	3	elastic	elastic	ADJ
app01-10361	94	4	properties	property	NOUN
app01-10361	94	5	of	of	ADP
app01-10361	94	6	the	the	DET
app01-10361	94	7	top	top	ADJ
app01-10361	94	8	coat	coat	NOUN
app01-10361	94	9	and	and	CCONJ
app01-10361	94	10	the	the	DET
app01-10361	94	11	substrate	substrate	NOUN
app01-10361	94	12	are	be	AUX
app01-10361	94	13	assumed	assume	VERB
app01-10361	94	14	to	to	PART
app01-10361	94	15	change	change	VERB
app01-10361	94	16	little	little	ADJ
app01-10361	94	17	with	with	ADP
app01-10361	94	18	temperature	temperature	NOUN
app01-10361	94	19	,	,	PUNCT
app01-10361	94	20	they	they	PRON
app01-10361	94	21	are	be	AUX
app01-10361	94	22	kept	keep	VERB
app01-10361	94	23	constant	constant	ADJ
app01-10361	94	24	and	and	CCONJ
app01-10361	94	25	identical	identical	ADJ
app01-10361	94	26	to	to	ADP
app01-10361	94	27	those	those	PRON
app01-10361	94	28	used	use	VERB
app01-10361	94	29	for	for	ADP
app01-10361	94	30	the	the	DET
app01-10361	94	31	berkovich	berkovich	NOUN
app01-10361	94	32	simulations	simulation	NOUN
app01-10361	94	33	.	.	PUNCT
app01-10361	95	1	3.1	3.1	NUM
app01-10361	95	2	.	.	PUNCT
app01-10361	95	3	berkovich	berkovich	PROPN
app01-10361	95	4	simulations	simulation	VERB
app01-10361	95	5	finite	finite	ADJ
app01-10361	95	6	-	-	ADJ
app01-10361	95	7	element	element	ADJ
app01-10361	95	8	simulations	simulation	NOUN
app01-10361	95	9	of	of	ADP
app01-10361	95	10	the	the	DET
app01-10361	95	11	indentation	indentation	NOUN
app01-10361	95	12	of	of	ADP
app01-10361	95	13	the	the	DET
app01-10361	95	14	complete	complete	ADJ
app01-10361	95	15	stack	stack	NOUN
app01-10361	95	16	are	be	AUX
app01-10361	95	17	performed	perform	VERB
app01-10361	95	18	with	with	ADP
app01-10361	95	19	a	a	DET
app01-10361	95	20	70	70	NUM
app01-10361	95	21	°	°	PROPN
app01-10361	95	22	conical	conical	ADJ
app01-10361	95	23	indenter	indenter	NOUN
app01-10361	96	1	[	[	X
app01-10361	96	2	4	4	NUM
app01-10361	96	3	]	]	PUNCT
app01-10361	96	4	,	,	PUNCT
app01-10361	96	5	and	and	CCONJ
app01-10361	96	6	a	a	DET
app01-10361	96	7	tip	tip	NOUN
app01-10361	96	8	radius	radius	NOUN
app01-10361	96	9	of	of	ADP
app01-10361	96	10	20	20	NUM
app01-10361	96	11	nm	nm	NOUN
app01-10361	96	12	,	,	PUNCT
app01-10361	96	13	by	by	ADP
app01-10361	96	14	assuming	assume	VERB
app01-10361	96	15	an	an	DET
app01-10361	96	16	elastic	elastic	ADJ
app01-10361	96	17	behavior	behavior	NOUN
app01-10361	96	18	.	.	PUNCT
app01-10361	97	1	these	these	DET
app01-10361	97	2	axisymmetric	axisymmetric	ADJ
app01-10361	97	3	,	,	PUNCT
app01-10361	97	4	non	non	ADJ
app01-10361	97	5	-	-	ADJ
app01-10361	97	6	linear	linear	ADJ
app01-10361	97	7	,	,	PUNCT
app01-10361	97	8	two	two	NUM
app01-10361	97	9	-	-	PUNCT
app01-10361	97	10	dimensional	dimensional	ADJ
app01-10361	97	11	simulations	simulation	NOUN
app01-10361	97	12	are	be	AUX
app01-10361	97	13	performed	perform	VERB
app01-10361	97	14	using	use	VERB
app01-10361	97	15	the	the	DET
app01-10361	97	16	cosmos	cosmos	ADJ
app01-10361	97	17	-	-	PUNCT
app01-10361	97	18	brand	brand	NOUN
app01-10361	97	19	finite	finite	ADJ
app01-10361	97	20	-	-	ADJ
app01-10361	97	21	element	element	ADJ
app01-10361	97	22	solver	solver	NOUN
app01-10361	97	23	(	(	PUNCT
app01-10361	97	24	no	no	ADV
app01-10361	97	25	longer	long	ADV
app01-10361	97	26	commercially	commercially	ADV
app01-10361	97	27	available	available	ADJ
app01-10361	97	28	)	)	PUNCT
app01-10361	97	29	.	.	PUNCT
app01-10361	98	1	both	both	CCONJ
app01-10361	98	2	the	the	DET
app01-10361	98	3	indenter	indenter	NOUN
app01-10361	98	4	and	and	CCONJ
app01-10361	98	5	the	the	DET
app01-10361	98	6	sample	sample	NOUN
app01-10361	98	7	are	be	AUX
app01-10361	98	8	modeled	model	VERB
app01-10361	98	9	with	with	ADP
app01-10361	98	10	four	four	NUM
app01-10361	98	11	-	-	PUNCT
app01-10361	98	12	node	node	NOUN
app01-10361	98	13	,	,	PUNCT
app01-10361	98	14	axisymmetric	axisymmetric	ADJ
app01-10361	98	15	,	,	PUNCT
app01-10361	98	16	plane	plane	NOUN
app01-10361	98	17	-	-	PUNCT
app01-10361	98	18	strain	strain	NOUN
app01-10361	98	19	elements	element	NOUN
app01-10361	98	20	(	(	PUNCT
app01-10361	98	21	figure	figure	NOUN
app01-10361	98	22	3	3	NUM
app01-10361	98	23	)	)	PUNCT
app01-10361	98	24	.	.	PUNCT
app01-10361	99	1	for	for	ADP
app01-10361	99	2	the	the	DET
app01-10361	99	3	sample	sample	NOUN
app01-10361	99	4	,	,	PUNCT
app01-10361	99	5	the	the	DET
app01-10361	99	6	extent	extent	NOUN
app01-10361	99	7	of	of	ADP
app01-10361	99	8	the	the	DET
app01-10361	99	9	mesh	mesh	NOUN
app01-10361	99	10	is	be	AUX
app01-10361	99	11	90rc	90rc	ADJ
app01-10361	99	12	in	in	ADP
app01-10361	99	13	both	both	CCONJ
app01-10361	99	14	the	the	DET
app01-10361	99	15	radial	radial	ADJ
app01-10361	99	16	and	and	CCONJ
app01-10361	99	17	axial	axial	ADJ
app01-10361	99	18	directions	direction	NOUN
app01-10361	99	19	,	,	PUNCT
app01-10361	99	20	where	where	SCONJ
app01-10361	99	21	rc	rc	PROPN
app01-10361	99	22	,	,	PUNCT
app01-10361	99	23	the	the	DET
app01-10361	99	24	anticipated	anticipated	ADJ
app01-10361	99	25	contact	contact	NOUN
app01-10361	99	26	radius	radius	NOUN
app01-10361	99	27	,	,	PUNCT
app01-10361	99	28	is	be	AUX
app01-10361	99	29	calculated	calculate	VERB
app01-10361	99	30	as	as	ADP
app01-10361	99	31	the	the	DET
app01-10361	99	32	radius	radius	NOUN
app01-10361	99	33	of	of	ADP
app01-10361	99	34	the	the	DET
app01-10361	99	35	indenter	indenter	NOUN
app01-10361	99	36	at	at	ADP
app01-10361	99	37	a	a	DET
app01-10361	99	38	distance	distance	NOUN
app01-10361	99	39	from	from	ADP
app01-10361	99	40	the	the	DET
app01-10361	99	41	apex	apex	NOUN
app01-10361	99	42	equal	equal	ADJ
app01-10361	99	43	to	to	ADP
app01-10361	99	44	the	the	DET
app01-10361	99	45	specified	specified	ADJ
app01-10361	99	46	indentation	indentation	NOUN
app01-10361	99	47	depth	depth	NOUN
app01-10361	99	48	.	.	PUNCT
app01-10361	100	1	the	the	DET
app01-10361	100	2	radial	radial	ADJ
app01-10361	100	3	extent	extent	NOUN
app01-10361	100	4	of	of	ADP
app01-10361	100	5	the	the	DET
app01-10361	100	6	fine	fine	ADJ
app01-10361	100	7	mesh	mesh	NOUN
app01-10361	100	8	of	of	ADP
app01-10361	100	9	the	the	DET
app01-10361	100	10	sample	sample	NOUN
app01-10361	100	11	is	be	AUX
app01-10361	100	12	1.2rc	1.2rc	PROPN
app01-10361	100	13	.	.	PUNCT
app01-10361	101	1	for	for	ADP
app01-10361	101	2	the	the	DET
app01-10361	101	3	indenter	indenter	NOUN
app01-10361	101	4	,	,	PUNCT
app01-10361	101	5	the	the	DET
app01-10361	101	6	radial	radial	ADJ
app01-10361	101	7	extent	extent	NOUN
app01-10361	101	8	of	of	ADP
app01-10361	101	9	the	the	DET
app01-10361	101	10	mesh	mesh	NOUN
app01-10361	101	11	is	be	AUX
app01-10361	101	12	45rc	45rc	ADJ
app01-10361	101	13	,	,	PUNCT
app01-10361	101	14	and	and	CCONJ
app01-10361	101	15	the	the	DET
app01-10361	101	16	axial	axial	ADJ
app01-10361	101	17	extent	extent	NOUN
app01-10361	101	18	is	be	AUX
app01-10361	101	19	90rc	90rc	ADJ
app01-10361	101	20	.	.	PUNCT
app01-10361	102	1	the	the	DET
app01-10361	102	2	boundary	boundary	ADJ
app01-10361	102	3	conditions	condition	NOUN
app01-10361	102	4	are	be	AUX
app01-10361	102	5	specified	specify	VERB
app01-10361	102	6	as	as	SCONJ
app01-10361	102	7	follows	follow	VERB
app01-10361	102	8	.	.	PUNCT
app01-10361	103	1	along	along	ADP
app01-10361	103	2	the	the	DET
app01-10361	103	3	right	right	ADJ
app01-10361	103	4	-	-	PUNCT
app01-10361	103	5	hand	hand	NOUN
app01-10361	103	6	side	side	NOUN
app01-10361	103	7	and	and	CCONJ
app01-10361	103	8	bottom	bottom	NOUN
app01-10361	103	9	of	of	ADP
app01-10361	103	10	the	the	DET
app01-10361	103	11	sample	sample	NOUN
app01-10361	103	12	,	,	PUNCT
app01-10361	103	13	all	all	DET
app01-10361	103	14	nodes	node	NOUN
app01-10361	103	15	are	be	AUX
app01-10361	103	16	rigidly	rigidly	ADV
app01-10361	103	17	fixed	fix	VERB
app01-10361	103	18	.	.	PUNCT
app01-10361	104	1	along	along	ADP
app01-10361	104	2	the	the	DET
app01-10361	104	3	axis	axis	NOUN
app01-10361	104	4	of	of	ADP
app01-10361	104	5	symmetry	symmetry	NOUN
app01-10361	104	6	,	,	PUNCT
app01-10361	104	7	nodes	node	NOUN
app01-10361	104	8	are	be	AUX
app01-10361	104	9	constrained	constrain	VERB
app01-10361	104	10	to	to	PART
app01-10361	104	11	move	move	VERB
app01-10361	104	12	along	along	ADP
app01-10361	104	13	the	the	DET
app01-10361	104	14	axis	axis	NOUN
app01-10361	104	15	of	of	ADP
app01-10361	104	16	symmetry	symmetry	NOUN
app01-10361	104	17	only	only	ADV
app01-10361	104	18	(	(	PUNCT
app01-10361	104	19	ux	ux	PROPN
app01-10361	104	20	=	=	SYM
app01-10361	104	21	0	0	NUM
app01-10361	104	22	)	)	PUNCT
app01-10361	104	23	.	.	PUNCT
app01-10361	105	1	nodes	node	NOUN
app01-10361	105	2	along	along	ADP
app01-10361	105	3	the	the	DET
app01-10361	105	4	top	top	NOUN
app01-10361	105	5	of	of	ADP
app01-10361	105	6	the	the	DET
app01-10361	105	7	indenter	indenter	NOUN
app01-10361	105	8	are	be	AUX
app01-10361	105	9	displaced	displace	VERB
app01-10361	105	10	downward	downward	ADV
app01-10361	105	11	by	by	ADP
app01-10361	105	12	the	the	DET
app01-10361	105	13	total	total	ADJ
app01-10361	105	14	displacement	displacement	NOUN
app01-10361	105	15	prescribed	prescribe	VERB
app01-10361	105	16	by	by	ADP
app01-10361	105	17	the	the	DET
app01-10361	105	18	user	user	NOUN
app01-10361	105	19	.	.	PUNCT
app01-10361	106	1	nodes	node	NOUN
app01-10361	106	2	along	along	ADP
app01-10361	106	3	the	the	DET
app01-10361	106	4	right	right	ADJ
app01-10361	106	5	-	-	PUNCT
app01-10361	106	6	hand	hand	NOUN
app01-10361	106	7	side	side	NOUN
app01-10361	106	8	of	of	ADP
app01-10361	106	9	the	the	DET
app01-10361	106	10	indenter	indenter	NOUN
app01-10361	106	11	(	(	PUNCT
app01-10361	106	12	far	far	ADV
app01-10361	106	13	from	from	ADP
app01-10361	106	14	the	the	DET
app01-10361	106	15	contact	contact	NOUN
app01-10361	106	16	)	)	PUNCT
app01-10361	106	17	are	be	AUX
app01-10361	106	18	unconstrained	unconstraine	VERB
app01-10361	106	19	.	.	PUNCT
app01-10361	107	1	the	the	DET
app01-10361	107	2	stiffness	stiffness	NOUN
app01-10361	107	3	of	of	ADP
app01-10361	107	4	the	the	DET
app01-10361	107	5	sample	sample	NOUN
app01-10361	107	6	is	be	AUX
app01-10361	107	7	calculated	calculate	VERB
app01-10361	107	8	from	from	ADP
app01-10361	107	9	the	the	DET
app01-10361	107	10	load	load	NOUN
app01-10361	107	11	versus	versus	ADP
app01-10361	107	12	displacement	displacement	ADJ
app01-10361	107	13	curve	curve	NOUN
app01-10361	107	14	by	by	ADP
app01-10361	107	15	fitting	fit	VERB
app01-10361	107	16	the	the	DET
app01-10361	107	17	unloading	unloading	NOUN
app01-10361	107	18	segment	segment	NOUN
app01-10361	107	19	up	up	ADP
app01-10361	107	20	to	to	PART
app01-10361	107	21	50	50	NUM
app01-10361	107	22	%	%	NOUN
app01-10361	107	23	of	of	ADP
app01-10361	107	24	the	the	DET
app01-10361	107	25	maximum	maximum	ADJ
app01-10361	107	26	load	load	NOUN
app01-10361	107	27	.	.	PUNCT
app01-10361	108	1	values	value	NOUN
app01-10361	108	2	of	of	ADP
app01-10361	108	3	young	young	ADJ
app01-10361	108	4	’s	’s	PART
app01-10361	108	5	modulus	modulus	NOUN
app01-10361	108	6	are	be	AUX
app01-10361	108	7	then	then	ADV
app01-10361	108	8	calculated	calculate	VERB
app01-10361	108	9	,	,	PUNCT
app01-10361	108	10	taking	take	VERB
app01-10361	108	11	into	into	ADP
app01-10361	108	12	account	account	NOUN
app01-10361	108	13	the	the	DET
app01-10361	108	14	indenter	indenter	NOUN
app01-10361	108	15	’s	’s	PART
app01-10361	108	16	influence	influence	NOUN
app01-10361	109	1	[	[	X
app01-10361	109	2	1	1	NUM
app01-10361	109	3	]	]	PUNCT
app01-10361	109	4	,	,	PUNCT
app01-10361	109	5	and	and	CCONJ
app01-10361	109	6	by	by	ADP
app01-10361	109	7	applying	apply	VERB
app01-10361	109	8	the	the	DET
app01-10361	109	9	sneddon	sneddon	PROPN
app01-10361	109	10	equation	equation	NOUN
app01-10361	109	11	[	[	X
app01-10361	109	12	7	7	NUM
app01-10361	109	13	]	]	PUNCT
app01-10361	109	14	.	.	PUNCT
app01-10361	110	1	subsequently	subsequently	ADV
app01-10361	110	2	,	,	PUNCT
app01-10361	110	3	the	the	DET
app01-10361	110	4	mercier	mercier	PROPN
app01-10361	110	5	’s	’s	PART
app01-10361	110	6	multilayer	multilayer	ADJ
app01-10361	110	7	model	model	NOUN
app01-10361	110	8	is	be	AUX
app01-10361	110	9	applied	apply	VERB
app01-10361	110	10	to	to	PART
app01-10361	110	11	obtain	obtain	VERB
app01-10361	110	12	the	the	DET
app01-10361	110	13	corrected	correct	VERB
app01-10361	110	14	young	young	ADJ
app01-10361	110	15	’s	’s	PART
app01-10361	110	16	modulus	modulus	ADJ
app01-10361	110	17	value	value	NOUN
app01-10361	110	18	for	for	ADP
app01-10361	110	19	the	the	DET
app01-10361	110	20	polymer	polymer	NOUN
app01-10361	110	21	.	.	PUNCT
app01-10361	111	1	51	51	NUM
app01-10361	111	2	m.	m.	NOUN
app01-10361	111	3	melo	melo	PROPN
app01-10361	111	4	de	de	PROPN
app01-10361	111	5	lima	lima	PROPN
app01-10361	111	6	,	,	PUNCT
app01-10361	111	7	v.	v.	ADP
app01-10361	111	8	mandrillon	mandrillon	PROPN
app01-10361	111	9	,	,	PUNCT
app01-10361	111	10	j.	j.	PROPN
app01-10361	111	11	hay	hay	PROPN
app01-10361	111	12	et	et	PROPN
app01-10361	111	13	al	al	PROPN
app01-10361	111	14	.	.	PROPN
app01-10361	111	15	acta	acta	PROPN
app01-10361	111	16	polytechnica	polytechnica	PROPN
app01-10361	111	17	ctu	ctu	PROPN
app01-10361	111	18	proceedings	proceeding	NOUN
app01-10361	111	19	figure	figure	VERB
app01-10361	111	20	3	3	NUM
app01-10361	111	21	.	.	PUNCT
app01-10361	112	1	finite	finite	PROPN
app01-10361	112	2	element	element	PROPN
app01-10361	112	3	meshes	mesh	NOUN
app01-10361	112	4	of	of	ADP
app01-10361	112	5	the	the	DET
app01-10361	112	6	tip	tip	NOUN
app01-10361	112	7	and	and	CCONJ
app01-10361	112	8	films	film	NOUN
app01-10361	112	9	system	system	NOUN
app01-10361	112	10	in	in	ADP
app01-10361	112	11	the	the	DET
app01-10361	112	12	case	case	NOUN
app01-10361	112	13	of	of	ADP
app01-10361	112	14	a	a	DET
app01-10361	112	15	berkovich	berkovich	NOUN
app01-10361	112	16	(	(	PUNCT
app01-10361	112	17	left	leave	VERB
app01-10361	112	18	)	)	PUNCT
app01-10361	112	19	and	and	CCONJ
app01-10361	112	20	50	50	NUM
app01-10361	112	21	µm	µm	NOUN
app01-10361	112	22	spherical	spherical	ADJ
app01-10361	112	23	(	(	PUNCT
app01-10361	112	24	right	right	ADJ
app01-10361	112	25	)	)	PUNCT
app01-10361	112	26	indentation	indentation	NOUN
app01-10361	112	27	.	.	PUNCT
app01-10361	113	1	in	in	ADP
app01-10361	113	2	this	this	DET
app01-10361	113	3	study	study	NOUN
app01-10361	113	4	,	,	PUNCT
app01-10361	113	5	simulations	simulation	NOUN
app01-10361	113	6	are	be	AUX
app01-10361	113	7	conducted	conduct	VERB
app01-10361	113	8	with	with	ADP
app01-10361	113	9	varying	vary	VERB
app01-10361	113	10	indentation	indentation	NOUN
app01-10361	113	11	depths	depth	NOUN
app01-10361	113	12	to	to	PART
app01-10361	113	13	examine	examine	VERB
app01-10361	113	14	the	the	DET
app01-10361	113	15	validity	validity	NOUN
app01-10361	113	16	of	of	ADP
app01-10361	113	17	the	the	DET
app01-10361	113	18	mercier	mercier	NOUN
app01-10361	113	19	’s	’s	PART
app01-10361	113	20	model	model	NOUN
app01-10361	113	21	depending	depend	VERB
app01-10361	113	22	on	on	ADP
app01-10361	113	23	the	the	DET
app01-10361	113	24	contact	contact	NOUN
app01-10361	113	25	radius	radius	NOUN
app01-10361	113	26	.	.	PUNCT
app01-10361	114	1	simulations	simulation	NOUN
app01-10361	114	2	are	be	AUX
app01-10361	114	3	conducted	conduct	VERB
app01-10361	114	4	for	for	ADP
app01-10361	114	5	top	top	ADJ
app01-10361	114	6	coat	coat	NOUN
app01-10361	114	7	thicknesses	thickness	NOUN
app01-10361	114	8	of	of	ADP
app01-10361	114	9	both	both	DET
app01-10361	114	10	200	200	NUM
app01-10361	114	11	and	and	CCONJ
app01-10361	114	12	600	600	NUM
app01-10361	114	13	nm	nm	NOUN
app01-10361	114	14	to	to	PART
app01-10361	114	15	enable	enable	VERB
app01-10361	114	16	comparison	comparison	NOUN
app01-10361	114	17	with	with	ADP
app01-10361	114	18	experimental	experimental	ADJ
app01-10361	114	19	results	result	NOUN
app01-10361	114	20	.	.	PUNCT
app01-10361	115	1	3.2	3.2	NUM
app01-10361	115	2	.	.	PUNCT
app01-10361	116	1	spherical	spherical	ADJ
app01-10361	116	2	simulations	simulation	NOUN
app01-10361	116	3	finite	finite	ADJ
app01-10361	116	4	-	-	ADJ
app01-10361	116	5	element	element	ADJ
app01-10361	116	6	simulations	simulation	NOUN
app01-10361	116	7	are	be	AUX
app01-10361	116	8	performed	perform	VERB
app01-10361	116	9	with	with	ADP
app01-10361	116	10	a	a	DET
app01-10361	116	11	50	50	NUM
app01-10361	116	12	µm	µm	ADP
app01-10361	116	13	radius	radius	ADJ
app01-10361	116	14	spherical	spherical	ADJ
app01-10361	116	15	tip	tip	NOUN
app01-10361	116	16	using	use	VERB
app01-10361	116	17	the	the	DET
app01-10361	116	18	comsol	comsol	NOUN
app01-10361	116	19	software	software	NOUN
app01-10361	116	20	.	.	PUNCT
app01-10361	117	1	the	the	DET
app01-10361	117	2	tip	tip	NOUN
app01-10361	117	3	,	,	PUNCT
app01-10361	117	4	the	the	DET
app01-10361	117	5	resin	resin	NOUN
app01-10361	117	6	thin	thin	ADJ
app01-10361	117	7	film	film	NOUN
app01-10361	117	8	and	and	CCONJ
app01-10361	117	9	the	the	DET
app01-10361	117	10	substrate	substrate	NOUN
app01-10361	117	11	are	be	AUX
app01-10361	117	12	modeled	model	VERB
app01-10361	117	13	with	with	ADP
app01-10361	117	14	triangular	triangular	NOUN
app01-10361	117	15	elements	element	NOUN
app01-10361	117	16	,	,	PUNCT
app01-10361	117	17	while	while	SCONJ
app01-10361	117	18	the	the	DET
app01-10361	117	19	top	top	ADJ
app01-10361	117	20	coat	coat	NOUN
app01-10361	117	21	is	be	AUX
app01-10361	117	22	modeled	model	VERB
app01-10361	117	23	with	with	ADP
app01-10361	117	24	four	four	NUM
app01-10361	117	25	-	-	PUNCT
app01-10361	117	26	node	node	ADJ
app01-10361	117	27	elements	element	NOUN
app01-10361	117	28	(	(	PUNCT
app01-10361	117	29	figure	figure	NOUN
app01-10361	117	30	3	3	NUM
app01-10361	117	31	)	)	PUNCT
app01-10361	117	32	.	.	PUNCT
app01-10361	118	1	the	the	DET
app01-10361	118	2	mesh	mesh	NOUN
app01-10361	118	3	for	for	ADP
app01-10361	118	4	the	the	DET
app01-10361	118	5	tip	tip	NOUN
app01-10361	118	6	and	and	CCONJ
app01-10361	118	7	the	the	DET
app01-10361	118	8	sample	sample	NOUN
app01-10361	118	9	is	be	AUX
app01-10361	118	10	refined	refine	VERB
app01-10361	118	11	in	in	ADP
app01-10361	118	12	the	the	DET
app01-10361	118	13	contact	contact	NOUN
app01-10361	118	14	area	area	NOUN
app01-10361	118	15	up	up	ADP
app01-10361	118	16	to	to	ADP
app01-10361	118	17	6rmax	6rmax	NUM
app01-10361	118	18	c	c	NOUN
app01-10361	118	19	in	in	ADP
app01-10361	118	20	both	both	CCONJ
app01-10361	118	21	radial	radial	ADJ
app01-10361	118	22	and	and	CCONJ
app01-10361	118	23	axial	axial	ADJ
app01-10361	118	24	directions	direction	NOUN
app01-10361	118	25	while	while	SCONJ
app01-10361	118	26	the	the	DET
app01-10361	118	27	mesh	mesh	NOUN
app01-10361	118	28	size	size	NOUN
app01-10361	118	29	gradually	gradually	ADV
app01-10361	118	30	increases	increase	VERB
app01-10361	118	31	away	away	ADV
app01-10361	118	32	from	from	ADP
app01-10361	118	33	the	the	DET
app01-10361	118	34	contact	contact	NOUN
app01-10361	118	35	region	region	NOUN
app01-10361	118	36	.	.	PUNCT
app01-10361	119	1	regarding	regard	VERB
app01-10361	119	2	boundary	boundary	ADJ
app01-10361	119	3	conditions	condition	NOUN
app01-10361	119	4	,	,	PUNCT
app01-10361	119	5	all	all	DET
app01-10361	119	6	the	the	DET
app01-10361	119	7	nodes	node	NOUN
app01-10361	119	8	are	be	AUX
app01-10361	119	9	rigidly	rigidly	ADV
app01-10361	119	10	fixed	fix	VERB
app01-10361	119	11	at	at	ADP
app01-10361	119	12	the	the	DET
app01-10361	119	13	bottom	bottom	NOUN
app01-10361	119	14	of	of	ADP
app01-10361	119	15	the	the	DET
app01-10361	119	16	sample	sample	NOUN
app01-10361	119	17	and	and	CCONJ
app01-10361	119	18	a	a	DET
app01-10361	119	19	downward	downward	ADJ
app01-10361	119	20	displacement	displacement	NOUN
app01-10361	119	21	,	,	PUNCT
app01-10361	119	22	prescribed	prescribe	VERB
app01-10361	119	23	by	by	ADP
app01-10361	119	24	the	the	DET
app01-10361	119	25	user	user	NOUN
app01-10361	119	26	,	,	PUNCT
app01-10361	119	27	is	be	AUX
app01-10361	119	28	applied	apply	VERB
app01-10361	119	29	to	to	ADP
app01-10361	119	30	the	the	DET
app01-10361	119	31	top	top	NOUN
app01-10361	119	32	of	of	ADP
app01-10361	119	33	the	the	DET
app01-10361	119	34	indenter	indenter	NOUN
app01-10361	119	35	.	.	PUNCT
app01-10361	120	1	a	a	DET
app01-10361	120	2	convergence	convergence	NOUN
app01-10361	120	3	study	study	NOUN
app01-10361	120	4	validated	validate	VERB
app01-10361	120	5	the	the	DET
app01-10361	120	6	built	build	VERB
app01-10361	120	7	mesh	mesh	NOUN
app01-10361	120	8	,	,	PUNCT
app01-10361	120	9	with	with	ADP
app01-10361	120	10	relative	relative	ADJ
app01-10361	120	11	errors	error	NOUN
app01-10361	120	12	in	in	ADP
app01-10361	120	13	the	the	DET
app01-10361	120	14	young	young	ADJ
app01-10361	120	15	’s	’s	PART
app01-10361	120	16	modulus	modulus	NOUN
app01-10361	120	17	of	of	ADP
app01-10361	120	18	less	less	ADJ
app01-10361	120	19	than	than	ADP
app01-10361	120	20	5	5	NUM
app01-10361	120	21	%	%	NOUN
app01-10361	120	22	for	for	ADP
app01-10361	120	23	indentation	indentation	NOUN
app01-10361	120	24	depths	depth	NOUN
app01-10361	120	25	ranging	range	VERB
app01-10361	120	26	from	from	ADP
app01-10361	120	27	2	2	NUM
app01-10361	120	28	to	to	ADP
app01-10361	120	29	200	200	NUM
app01-10361	120	30	nm	nm	NOUN
app01-10361	120	31	.	.	PUNCT
app01-10361	121	1	the	the	DET
app01-10361	121	2	stiffness	stiffness	NOUN
app01-10361	121	3	of	of	ADP
app01-10361	121	4	the	the	DET
app01-10361	121	5	sample	sample	NOUN
app01-10361	121	6	is	be	AUX
app01-10361	121	7	calculated	calculate	VERB
app01-10361	121	8	from	from	ADP
app01-10361	121	9	the	the	DET
app01-10361	121	10	load	load	NOUN
app01-10361	121	11	versus	versus	ADP
app01-10361	121	12	displacement	displacement	ADJ
app01-10361	121	13	curve	curve	NOUN
app01-10361	121	14	by	by	ADP
app01-10361	121	15	fitting	fit	VERB
app01-10361	121	16	the	the	DET
app01-10361	121	17	unloading	unloading	NOUN
app01-10361	121	18	segment	segment	NOUN
app01-10361	121	19	up	up	ADP
app01-10361	121	20	to	to	PART
app01-10361	121	21	50	50	NUM
app01-10361	121	22	%	%	NOUN
app01-10361	121	23	of	of	ADP
app01-10361	121	24	the	the	DET
app01-10361	121	25	maximum	maximum	ADJ
app01-10361	121	26	load	load	NOUN
app01-10361	121	27	.	.	PUNCT
app01-10361	122	1	subsequently	subsequently	ADV
app01-10361	122	2	,	,	PUNCT
app01-10361	122	3	values	value	NOUN
app01-10361	122	4	of	of	ADP
app01-10361	122	5	reduced	reduced	ADJ
app01-10361	122	6	young	young	ADJ
app01-10361	122	7	’s	’s	PART
app01-10361	122	8	modulus	modulus	NOUN
app01-10361	122	9	are	be	AUX
app01-10361	122	10	calculated	calculate	VERB
app01-10361	122	11	,	,	PUNCT
app01-10361	122	12	accounting	account	VERB
app01-10361	122	13	for	for	ADP
app01-10361	122	14	the	the	DET
app01-10361	122	15	indenter	indenter	NOUN
app01-10361	122	16	’s	’s	PART
app01-10361	122	17	influence	influence	NOUN
app01-10361	123	1	[	[	X
app01-10361	123	2	1	1	NUM
app01-10361	123	3	]	]	PUNCT
app01-10361	123	4	,	,	PUNCT
app01-10361	123	5	and	and	CCONJ
app01-10361	123	6	by	by	ADP
app01-10361	123	7	using	use	VERB
app01-10361	123	8	the	the	DET
app01-10361	123	9	sneddon	sneddon	PROPN
app01-10361	124	1	[	[	X
app01-10361	124	2	7	7	NUM
app01-10361	124	3	]	]	PUNCT
app01-10361	124	4	equation	equation	NOUN
app01-10361	124	5	.	.	PUNCT
app01-10361	125	1	subsequently	subsequently	ADV
app01-10361	125	2	,	,	PUNCT
app01-10361	125	3	the	the	DET
app01-10361	125	4	mercier	mercier	PROPN
app01-10361	125	5	’s	’s	PART
app01-10361	125	6	multilayer	multilayer	ADJ
app01-10361	125	7	model	model	NOUN
app01-10361	125	8	is	be	AUX
app01-10361	125	9	applied	apply	VERB
app01-10361	125	10	to	to	PART
app01-10361	125	11	obtain	obtain	VERB
app01-10361	125	12	the	the	DET
app01-10361	125	13	corrected	correct	VERB
app01-10361	125	14	young	young	ADJ
app01-10361	125	15	’s	’s	PART
app01-10361	125	16	modulus	modulus	ADJ
app01-10361	125	17	value	value	NOUN
app01-10361	125	18	for	for	ADP
app01-10361	125	19	the	the	DET
app01-10361	125	20	polymer	polymer	NOUN
app01-10361	125	21	.	.	PUNCT
app01-10361	126	1	4	4	X
app01-10361	126	2	.	.	NOUN
app01-10361	126	3	results	result	NOUN
app01-10361	126	4	and	and	CCONJ
app01-10361	126	5	discussion	discussion	NOUN
app01-10361	126	6	4.1	4.1	NUM
app01-10361	126	7	.	.	PUNCT
app01-10361	127	1	simulations	simulation	NOUN
app01-10361	127	2	results	result	VERB
app01-10361	127	3	berkovich	berkovich	NOUN
app01-10361	127	4	and	and	CCONJ
app01-10361	127	5	50	50	NUM
app01-10361	127	6	µm	µm	ADP
app01-10361	127	7	spherical	spherical	ADJ
app01-10361	127	8	indentation	indentation	NOUN
app01-10361	127	9	simulations	simulation	NOUN
app01-10361	127	10	,	,	PUNCT
app01-10361	127	11	performed	perform	VERB
app01-10361	127	12	with	with	ADP
app01-10361	127	13	a	a	DET
app01-10361	127	14	young	young	ADJ
app01-10361	127	15	’s	’s	PART
app01-10361	127	16	modulus	modulus	NOUN
app01-10361	127	17	of	of	ADP
app01-10361	127	18	4gpa	4gpa	NOUN
app01-10361	127	19	for	for	ADP
app01-10361	127	20	the	the	DET
app01-10361	127	21	polymer	polymer	NOUN
app01-10361	127	22	,	,	PUNCT
app01-10361	127	23	enables	enable	VERB
app01-10361	127	24	the	the	DET
app01-10361	127	25	identification	identification	NOUN
app01-10361	127	26	of	of	ADP
app01-10361	127	27	the	the	DET
app01-10361	127	28	contact	contact	NOUN
app01-10361	127	29	radius	radius	NOUN
app01-10361	127	30	range	range	NOUN
app01-10361	127	31	where	where	SCONJ
app01-10361	127	32	the	the	DET
app01-10361	127	33	mercier	mercier	PROPN
app01-10361	127	34	’s	’s	PART
app01-10361	127	35	multilayer	multilayer	ADJ
app01-10361	127	36	model	model	NOUN
app01-10361	127	37	is	be	AUX
app01-10361	127	38	valid	valid	ADJ
app01-10361	127	39	.	.	PUNCT
app01-10361	128	1	the	the	DET
app01-10361	128	2	model	model	NOUN
app01-10361	128	3	is	be	AUX
app01-10361	128	4	considered	consider	VERB
app01-10361	128	5	valid	valid	ADJ
app01-10361	128	6	when	when	SCONJ
app01-10361	128	7	the	the	DET
app01-10361	128	8	relative	relative	ADJ
app01-10361	128	9	error	error	NOUN
app01-10361	128	10	in	in	ADP
app01-10361	128	11	the	the	DET
app01-10361	128	12	polymer	polymer	NOUN
app01-10361	128	13	’s	’s	PART
app01-10361	128	14	young	young	PROPN
app01-10361	128	15	’s	’s	PART
app01-10361	128	16	modulus	modulus	NOUN
app01-10361	128	17	is	be	AUX
app01-10361	128	18	below	below	ADP
app01-10361	128	19	10	10	NUM
app01-10361	128	20	%	%	NOUN
app01-10361	128	21	.	.	PUNCT
app01-10361	129	1	this	this	DET
app01-10361	129	2	range	range	NOUN
app01-10361	129	3	is	be	AUX
app01-10361	129	4	used	use	VERB
app01-10361	129	5	to	to	PART
app01-10361	129	6	extract	extract	VERB
app01-10361	129	7	an	an	DET
app01-10361	129	8	average	average	ADJ
app01-10361	129	9	young	young	ADJ
app01-10361	129	10	’s	’s	PART
app01-10361	129	11	modulus	modulus	ADJ
app01-10361	129	12	value	value	NOUN
app01-10361	129	13	for	for	ADP
app01-10361	129	14	the	the	DET
app01-10361	129	15	polymer	polymer	NOUN
app01-10361	129	16	from	from	ADP
app01-10361	129	17	room	room	NOUN
app01-10361	129	18	-	-	PUNCT
app01-10361	129	19	temperature	temperature	NOUN
app01-10361	129	20	nanoindentation	nanoindentation	NOUN
app01-10361	129	21	tests	test	NOUN
app01-10361	129	22	on	on	ADP
app01-10361	129	23	the	the	DET
app01-10361	129	24	complete	complete	ADJ
app01-10361	129	25	stack	stack	NOUN
app01-10361	129	26	,	,	PUNCT
app01-10361	129	27	in	in	ADP
app01-10361	129	28	which	which	PRON
app01-10361	129	29	the	the	DET
app01-10361	129	30	polymer	polymer	NOUN
app01-10361	129	31	is	be	AUX
app01-10361	129	32	encapsulated	encapsulate	VERB
app01-10361	129	33	by	by	ADP
app01-10361	129	34	a	a	DET
app01-10361	129	35	top	top	ADJ
app01-10361	129	36	coat	coat	NOUN
app01-10361	129	37	.	.	PUNCT
app01-10361	130	1	simulations	simulation	NOUN
app01-10361	130	2	with	with	ADP
app01-10361	130	3	a	a	DET
app01-10361	130	4	berkovich	berkovich	NOUN
app01-10361	130	5	tip	tip	NOUN
app01-10361	130	6	show	show	VERB
app01-10361	130	7	that	that	SCONJ
app01-10361	130	8	the	the	DET
app01-10361	130	9	relative	relative	ADJ
app01-10361	130	10	error	error	NOUN
app01-10361	130	11	using	use	VERB
app01-10361	130	12	the	the	DET
app01-10361	130	13	mercier	merci	ADJ
app01-10361	130	14	model	model	NOUN
app01-10361	130	15	remains	remain	VERB
app01-10361	130	16	under	under	ADP
app01-10361	130	17	10	10	NUM
app01-10361	130	18	%	%	NOUN
app01-10361	130	19	for	for	ADP
app01-10361	130	20	a	a	DET
app01-10361	130	21	contact	contact	NOUN
app01-10361	130	22	radius	radius	NOUN
app01-10361	130	23	range	range	NOUN
app01-10361	130	24	comprised	comprise	VERB
app01-10361	130	25	between	between	ADP
app01-10361	130	26	300	300	NUM
app01-10361	130	27	and	and	CCONJ
app01-10361	130	28	1	1	NUM
app01-10361	130	29	400	400	NUM
app01-10361	130	30	nm	nm	NOUN
app01-10361	130	31	for	for	ADP
app01-10361	130	32	a	a	DET
app01-10361	130	33	capping	capping	NOUN
app01-10361	130	34	of	of	ADP
app01-10361	130	35	200	200	NUM
app01-10361	130	36	nm	nm	NOUN
app01-10361	130	37	,	,	PUNCT
app01-10361	130	38	and	and	CCONJ
app01-10361	130	39	between	between	ADP
app01-10361	130	40	600	600	NUM
app01-10361	130	41	and	and	CCONJ
app01-10361	130	42	1	1	NUM
app01-10361	130	43	800	800	NUM
app01-10361	130	44	nm	nm	NOUN
app01-10361	130	45	for	for	ADP
app01-10361	130	46	a	a	DET
app01-10361	130	47	capping	capping	NOUN
app01-10361	130	48	of	of	ADP
app01-10361	130	49	600	600	NUM
app01-10361	130	50	nm	nm	NOUN
app01-10361	130	51	(	(	PUNCT
app01-10361	130	52	figure	figure	NOUN
app01-10361	130	53	4	4	NUM
app01-10361	130	54	)	)	PUNCT
app01-10361	130	55	.	.	PUNCT
app01-10361	131	1	for	for	ADP
app01-10361	131	2	the	the	DET
app01-10361	131	3	50	50	NUM
app01-10361	131	4	µm	µm	ADP
app01-10361	131	5	spherical	spherical	ADJ
app01-10361	131	6	tip	tip	NOUN
app01-10361	131	7	simulations	simulation	NOUN
app01-10361	131	8	,	,	PUNCT
app01-10361	131	9	with	with	ADP
app01-10361	131	10	a	a	DET
app01-10361	131	11	200	200	NUM
app01-10361	131	12	nm	nm	PRON
app01-10361	131	13	capping	capping	NOUN
app01-10361	131	14	,	,	PUNCT
app01-10361	131	15	the	the	DET
app01-10361	131	16	relative	relative	ADJ
app01-10361	131	17	error	error	NOUN
app01-10361	131	18	stays	stay	VERB
app01-10361	131	19	below	below	ADP
app01-10361	131	20	10	10	NUM
app01-10361	131	21	%	%	NOUN
app01-10361	131	22	for	for	ADP
app01-10361	131	23	a	a	DET
app01-10361	131	24	contact	contact	NOUN
app01-10361	131	25	radius	radius	NOUN
app01-10361	131	26	ranging	range	VERB
app01-10361	131	27	from	from	ADP
app01-10361	131	28	300	300	NUM
app01-10361	131	29	to	to	PART
app01-10361	131	30	2	2	NUM
app01-10361	131	31	750	750	NUM
app01-10361	131	32	nm	nm	NOUN
app01-10361	131	33	.	.	PUNCT
app01-10361	132	1	with	with	ADP
app01-10361	132	2	a	a	DET
app01-10361	132	3	600	600	NUM
app01-10361	132	4	nm	nm	PRON
app01-10361	132	5	capping	capping	NOUN
app01-10361	132	6	,	,	PUNCT
app01-10361	132	7	the	the	DET
app01-10361	132	8	relative	relative	ADJ
app01-10361	132	9	error	error	NOUN
app01-10361	132	10	drops	drop	VERB
app01-10361	132	11	below	below	ADP
app01-10361	132	12	10	10	NUM
app01-10361	132	13	%	%	NOUN
app01-10361	132	14	at	at	ADP
app01-10361	132	15	a	a	DET
app01-10361	132	16	contact	contact	NOUN
app01-10361	132	17	radius	radius	NOUN
app01-10361	132	18	of	of	ADP
app01-10361	132	19	1	1	NUM
app01-10361	132	20	630	630	NUM
app01-10361	132	21	nm	nm	NOUN
app01-10361	132	22	and	and	CCONJ
app01-10361	132	23	stays	stay	VERB
app01-10361	132	24	below	below	ADP
app01-10361	132	25	10	10	NUM
app01-10361	132	26	%	%	NOUN
app01-10361	132	27	up	up	ADP
app01-10361	132	28	to	to	ADP
app01-10361	132	29	the	the	DET
app01-10361	132	30	maximum	maximum	ADJ
app01-10361	132	31	studied	study	VERB
app01-10361	132	32	value	value	NOUN
app01-10361	132	33	of	of	ADP
app01-10361	132	34	5	5	NUM
app01-10361	132	35	100	100	NUM
app01-10361	132	36	nm	nm	NOUN
app01-10361	132	37	.	.	PUNCT
app01-10361	133	1	these	these	DET
app01-10361	133	2	validity	validity	NOUN
app01-10361	133	3	ranges	range	NOUN
app01-10361	133	4	are	be	AUX
app01-10361	133	5	summarized	summarize	VERB
app01-10361	133	6	in	in	ADP
app01-10361	133	7	table	table	NOUN
app01-10361	133	8	2	2	NUM
app01-10361	133	9	and	and	CCONJ
app01-10361	133	10	are	be	AUX
app01-10361	133	11	used	use	VERB
app01-10361	133	12	to	to	PART
app01-10361	133	13	calculate	calculate	VERB
app01-10361	133	14	an	an	DET
app01-10361	133	15	average	average	ADJ
app01-10361	133	16	young	young	ADJ
app01-10361	133	17	’s	’s	PART
app01-10361	133	18	modulus	modulus	ADJ
app01-10361	133	19	value	value	NOUN
app01-10361	133	20	from	from	ADP
app01-10361	133	21	the	the	DET
app01-10361	133	22	experimental	experimental	ADJ
app01-10361	133	23	curves	curve	NOUN
app01-10361	133	24	,	,	PUNCT
app01-10361	133	25	corrected	correct	VERB
app01-10361	133	26	using	use	VERB
app01-10361	133	27	the	the	DET
app01-10361	133	28	mercier	mercier	NOUN
app01-10361	133	29	’s	’s	PART
app01-10361	133	30	model	model	NOUN
app01-10361	133	31	.	.	PUNCT
app01-10361	134	1	in	in	ADP
app01-10361	134	2	order	order	NOUN
app01-10361	134	3	to	to	PART
app01-10361	134	4	analyze	analyze	VERB
app01-10361	134	5	temperature	temperature	NOUN
app01-10361	134	6	-	-	PUNCT
app01-10361	134	7	dependent	dependent	ADJ
app01-10361	134	8	nanoindentation	nanoindentation	NOUN
app01-10361	134	9	tests	test	NOUN
app01-10361	134	10	,	,	PUNCT
app01-10361	134	11	a	a	DET
app01-10361	134	12	second	second	ADJ
app01-10361	134	13	set	set	NOUN
app01-10361	134	14	of	of	ADP
app01-10361	134	15	indentation	indentation	NOUN
app01-10361	134	16	simulations	simulation	NOUN
app01-10361	134	17	is	be	AUX
app01-10361	134	18	performed	perform	VERB
app01-10361	134	19	with	with	ADP
app01-10361	134	20	a	a	DET
app01-10361	134	21	50	50	NUM
app01-10361	134	22	µm	µm	ADP
app01-10361	134	23	spherical	spherical	ADJ
app01-10361	134	24	tip	tip	NOUN
app01-10361	134	25	and	and	CCONJ
app01-10361	134	26	a	a	DET
app01-10361	134	27	200	200	NUM
app01-10361	134	28	nm	nm	PRON
app01-10361	134	29	capping	capping	NOUN
app01-10361	134	30	,	,	PUNCT
app01-10361	134	31	using	use	VERB
app01-10361	134	32	varying	vary	VERB
app01-10361	134	33	young	young	ADJ
app01-10361	134	34	’s	’s	PART
app01-10361	134	35	moduli	modulus	NOUN
app01-10361	134	36	for	for	ADP
app01-10361	134	37	the	the	DET
app01-10361	134	38	polymer	polymer	NOUN
app01-10361	134	39	(	(	PUNCT
app01-10361	134	40	figure	figure	NOUN
app01-10361	134	41	4	4	NUM
app01-10361	134	42	)	)	PUNCT
app01-10361	134	43	.	.	PUNCT
app01-10361	135	1	the	the	DET
app01-10361	135	2	results	result	NOUN
app01-10361	135	3	show	show	VERB
app01-10361	135	4	that	that	SCONJ
app01-10361	135	5	the	the	DET
app01-10361	135	6	valid	valid	ADJ
app01-10361	135	7	contact	contact	NOUN
app01-10361	135	8	radius	radius	NOUN
app01-10361	135	9	range	range	NOUN
app01-10361	135	10	is	be	AUX
app01-10361	135	11	dependent	dependent	ADJ
app01-10361	135	12	on	on	ADP
app01-10361	135	13	the	the	DET
app01-10361	135	14	young	young	ADJ
app01-10361	135	15	’s	’s	PART
app01-10361	135	16	modulus	modulus	NOUN
app01-10361	135	17	of	of	ADP
app01-10361	135	18	the	the	DET
app01-10361	135	19	polymer	polymer	NOUN
app01-10361	135	20	.	.	PUNCT
app01-10361	136	1	therefore	therefore	ADV
app01-10361	136	2	,	,	PUNCT
app01-10361	136	3	to	to	PART
app01-10361	136	4	analyze	analyze	VERB
app01-10361	136	5	the	the	DET
app01-10361	136	6	temperaturedependent	temperaturedependent	NOUN
app01-10361	136	7	tests	test	NOUN
app01-10361	136	8	,	,	PUNCT
app01-10361	136	9	an	an	DET
app01-10361	136	10	average	average	ADJ
app01-10361	136	11	young	young	NOUN
app01-10361	136	12	’s	’s	PART
app01-10361	136	13	modulus	modulus	NOUN
app01-10361	136	14	is	be	AUX
app01-10361	136	15	calculated	calculate	VERB
app01-10361	136	16	using	use	VERB
app01-10361	136	17	a	a	DET
app01-10361	136	18	common	common	ADJ
app01-10361	136	19	contact	contact	NOUN
app01-10361	136	20	radius	radius	NOUN
app01-10361	136	21	range	range	NOUN
app01-10361	136	22	.	.	PUNCT
app01-10361	137	1	this	this	DET
app01-10361	137	2	range	range	NOUN
app01-10361	137	3	corresponds	correspond	VERB
app01-10361	137	4	to	to	ADP
app01-10361	137	5	1	1	NUM
app01-10361	137	6	600–2	600–2	NUM
app01-10361	137	7	500	500	NUM
app01-10361	137	8	nm	nm	NOUN
app01-10361	137	9	.	.	PUNCT
app01-10361	138	1	however	however	ADV
app01-10361	138	2	,	,	PUNCT
app01-10361	138	3	for	for	ADP
app01-10361	138	4	the	the	DET
app01-10361	138	5	specific	specific	ADJ
app01-10361	138	6	case	case	NOUN
app01-10361	138	7	of	of	ADP
app01-10361	138	8	a	a	DET
app01-10361	138	9	polymer	polymer	NOUN
app01-10361	138	10	with	with	ADP
app01-10361	138	11	a	a	DET
app01-10361	138	12	young	young	ADJ
app01-10361	138	13	’s	’s	PART
app01-10361	138	14	modulus	modulus	NOUN
app01-10361	138	15	of	of	ADP
app01-10361	138	16	0.1gpa	0.1gpa	NUM
app01-10361	138	17	,	,	PUNCT
app01-10361	138	18	the	the	DET
app01-10361	138	19	relative	relative	ADJ
app01-10361	138	20	error	error	NOUN
app01-10361	138	21	remains	remain	VERB
app01-10361	138	22	between	between	ADP
app01-10361	138	23	12	12	NUM
app01-10361	138	24	%	%	NOUN
app01-10361	138	25	and	and	CCONJ
app01-10361	138	26	16	16	NUM
app01-10361	138	27	%	%	NOUN
app01-10361	138	28	and	and	CCONJ
app01-10361	138	29	since	since	SCONJ
app01-10361	138	30	a	a	DET
app01-10361	138	31	young	young	ADJ
app01-10361	138	32	’s	’s	PART
app01-10361	138	33	modulus	modulus	ADJ
app01-10361	138	34	value	value	NOUN
app01-10361	138	35	of	of	ADP
app01-10361	138	36	0.1gpa	0.1gpa	NUM
app01-10361	138	37	is	be	AUX
app01-10361	138	38	expected	expect	VERB
app01-10361	138	39	only	only	ADV
app01-10361	138	40	above	above	ADP
app01-10361	138	41	the	the	DET
app01-10361	138	42	glass	glass	NOUN
app01-10361	138	43	transition	transition	NOUN
app01-10361	138	44	temperature	temperature	NOUN
app01-10361	138	45	,	,	PUNCT
app01-10361	138	46	this	this	DET
app01-10361	138	47	error	error	NOUN
app01-10361	138	48	margin	margin	NOUN
app01-10361	138	49	is	be	AUX
app01-10361	138	50	considered	consider	VERB
app01-10361	138	51	reasonable	reasonable	ADJ
app01-10361	138	52	.	.	PUNCT
app01-10361	139	1	therefore	therefore	ADV
app01-10361	139	2	an	an	DET
app01-10361	139	3	average	average	ADJ
app01-10361	139	4	young	young	NOUN
app01-10361	139	5	’s	’s	PART
app01-10361	139	6	modulus	modulus	NOUN
app01-10361	139	7	for	for	ADP
app01-10361	139	8	the	the	DET
app01-10361	139	9	polymer	polymer	NOUN
app01-10361	139	10	will	will	AUX
app01-10361	139	11	be	be	AUX
app01-10361	139	12	extracted	extract	VERB
app01-10361	139	13	within	within	ADP
app01-10361	139	14	this	this	DET
app01-10361	139	15	range	range	NOUN
app01-10361	139	16	for	for	ADP
app01-10361	139	17	all	all	DET
app01-10361	139	18	temperature	temperature	NOUN
app01-10361	139	19	studied	study	VERB
app01-10361	139	20	,	,	PUNCT
app01-10361	139	21	with	with	ADP
app01-10361	139	22	the	the	DET
app01-10361	139	23	understanding	understanding	NOUN
app01-10361	139	24	that	that	PRON
app01-10361	139	25	values	value	NOUN
app01-10361	139	26	obtained	obtain	VERB
app01-10361	139	27	above	above	ADP
app01-10361	139	28	the	the	DET
app01-10361	139	29	glass	glass	NOUN
app01-10361	139	30	transition	transition	NOUN
app01-10361	139	31	temperature	temperature	NOUN
app01-10361	139	32	may	may	AUX
app01-10361	139	33	be	be	AUX
app01-10361	139	34	less	less	ADV
app01-10361	139	35	confident	confident	ADJ
app01-10361	139	36	.	.	PUNCT
app01-10361	140	1	4.2	4.2	NUM
app01-10361	140	2	.	.	PUNCT
app01-10361	141	1	experimental	experimental	ADJ
app01-10361	141	2	results	result	NOUN
app01-10361	141	3	at	at	ADP
app01-10361	141	4	room	room	NOUN
app01-10361	141	5	temperature	temperature	NOUN
app01-10361	141	6	experimental	experimental	ADJ
app01-10361	141	7	curves	curve	NOUN
app01-10361	141	8	obtained	obtain	VERB
app01-10361	141	9	at	at	ADP
app01-10361	141	10	room	room	NOUN
app01-10361	141	11	temperature	temperature	NOUN
app01-10361	141	12	by	by	ADP
app01-10361	141	13	indenting	indent	VERB
app01-10361	141	14	the	the	DET
app01-10361	141	15	following	follow	VERB
app01-10361	141	16	stack	stack	NOUN
app01-10361	141	17	:	:	PUNCT
app01-10361	141	18	200	200	NUM
app01-10361	141	19	nm	nm	NOUN
app01-10361	141	20	top	top	ADJ
app01-10361	141	21	coat/3	coat/3	NOUN
app01-10361	141	22	µm	µm	NOUN
app01-10361	141	23	polymer	polymer	NOUN
app01-10361	141	24	/	/	SYM
app01-10361	141	25	silicon	silicon	NOUN
app01-10361	141	26	substrate	substrate	NOUN
app01-10361	141	27	,	,	PUNCT
app01-10361	141	28	are	be	AUX
app01-10361	141	29	shown	show	VERB
app01-10361	141	30	in	in	ADP
app01-10361	141	31	figure	figure	NOUN
app01-10361	141	32	5	5	NUM
app01-10361	141	33	.	.	PUNCT
app01-10361	142	1	the	the	DET
app01-10361	142	2	black	black	ADJ
app01-10361	142	3	and	and	CCONJ
app01-10361	142	4	gray	gray	ADJ
app01-10361	142	5	lines	line	NOUN
app01-10361	142	6	represent	represent	VERB
app01-10361	142	7	indentation	indentation	NOUN
app01-10361	142	8	performed	perform	VERB
app01-10361	142	9	with	with	ADP
app01-10361	142	10	a	a	DET
app01-10361	142	11	berkovich	berkovich	NOUN
app01-10361	142	12	tip	tip	NOUN
app01-10361	142	13	and	and	CCONJ
app01-10361	142	14	a	a	DET
app01-10361	142	15	50	50	NUM
app01-10361	142	16	µm	µm	ADP
app01-10361	142	17	spherical	spherical	ADJ
app01-10361	142	18	tip	tip	NOUN
app01-10361	142	19	,	,	PUNCT
app01-10361	142	20	respectively	respectively	ADV
app01-10361	142	21	.	.	PUNCT
app01-10361	143	1	the	the	DET
app01-10361	143	2	dashed	dash	VERB
app01-10361	143	3	lines	line	NOUN
app01-10361	143	4	indicate	indicate	VERB
app01-10361	143	5	the	the	DET
app01-10361	143	6	apparent	apparent	ADJ
app01-10361	143	7	young	young	ADJ
app01-10361	143	8	’s	’s	PART
app01-10361	143	9	modulus	modulus	NOUN
app01-10361	143	10	while	while	SCONJ
app01-10361	143	11	the	the	DET
app01-10361	143	12	solid	solid	ADJ
app01-10361	143	13	lines	line	NOUN
app01-10361	143	14	show	show	VERB
app01-10361	143	15	the	the	DET
app01-10361	143	16	corrected	correct	VERB
app01-10361	143	17	young	young	PROPN
app01-10361	143	18	’s	’s	PART
app01-10361	143	19	modulus	modulus	NOUN
app01-10361	143	20	using	use	VERB
app01-10361	143	21	the	the	DET
app01-10361	143	22	mercier	mercier	NOUN
app01-10361	143	23	’s	’s	PART
app01-10361	143	24	model	model	NOUN
app01-10361	143	25	.	.	PUNCT
app01-10361	144	1	an	an	DET
app01-10361	144	2	average	average	ADJ
app01-10361	144	3	young	young	ADJ
app01-10361	144	4	’s	’s	PART
app01-10361	144	5	modulus	modulus	ADJ
app01-10361	144	6	value	value	NOUN
app01-10361	144	7	is	be	AUX
app01-10361	144	8	calculated	calculate	VERB
app01-10361	144	9	within	within	ADP
app01-10361	144	10	the	the	DET
app01-10361	144	11	contact	contact	NOUN
app01-10361	144	12	radius	radius	NOUN
app01-10361	144	13	range	range	NOUN
app01-10361	144	14	determined	determine	VERB
app01-10361	144	15	from	from	ADP
app01-10361	144	16	the	the	DET
app01-10361	144	17	simu52	simu52	NOUN
app01-10361	144	18	vol	vol	NOUN
app01-10361	144	19	.	.	PUNCT
app01-10361	145	1	50/2024	50/2024	NUM
app01-10361	145	2	comparison	comparison	NOUN
app01-10361	145	3	of	of	ADP
app01-10361	145	4	berkovich	berkovich	NOUN
app01-10361	145	5	and	and	CCONJ
app01-10361	145	6	spherical	spherical	ADJ
app01-10361	145	7	tip	tip	NOUN
app01-10361	145	8	indentation	indentation	NOUN
app01-10361	145	9	.	.	PUNCT
app01-10361	145	10	.	.	PUNCT
app01-10361	146	1	.	.	PUNCT
app01-10361	147	1	figure	figure	VERB
app01-10361	147	2	4	4	NUM
app01-10361	147	3	.	.	NOUN
app01-10361	147	4	relative	relative	ADJ
app01-10361	147	5	error	error	NOUN
app01-10361	147	6	in	in	ADP
app01-10361	147	7	the	the	DET
app01-10361	147	8	young	young	ADJ
app01-10361	147	9	’s	’s	PART
app01-10361	147	10	modulus	modulus	NOUN
app01-10361	147	11	of	of	ADP
app01-10361	147	12	the	the	DET
app01-10361	147	13	polymer	polymer	NOUN
app01-10361	147	14	,	,	PUNCT
app01-10361	147	15	using	use	VERB
app01-10361	147	16	the	the	DET
app01-10361	147	17	mercier	mercier	NOUN
app01-10361	147	18	’s	’s	PART
app01-10361	147	19	model	model	NOUN
app01-10361	147	20	,	,	PUNCT
app01-10361	147	21	according	accord	VERB
app01-10361	147	22	to	to	ADP
app01-10361	147	23	finiteelement	finiteelement	NOUN
app01-10361	147	24	simulations	simulation	NOUN
app01-10361	147	25	indentations	indentation	NOUN
app01-10361	147	26	on	on	ADP
app01-10361	147	27	the	the	DET
app01-10361	147	28	stack	stack	NOUN
app01-10361	147	29	:	:	PUNCT
app01-10361	147	30	top	top	ADJ
app01-10361	147	31	coat	coat	NOUN
app01-10361	147	32	/	/	SYM
app01-10361	147	33	polymer	polymer	NOUN
app01-10361	147	34	/	/	SYM
app01-10361	147	35	silicon	silicon	NOUN
app01-10361	147	36	.	.	PUNCT
app01-10361	148	1	simulations	simulation	NOUN
app01-10361	148	2	were	be	AUX
app01-10361	148	3	conducted	conduct	VERB
app01-10361	148	4	for	for	ADP
app01-10361	148	5	varying	vary	VERB
app01-10361	148	6	top	top	ADJ
app01-10361	148	7	coat	coat	NOUN
app01-10361	148	8	thicknesses	thickness	NOUN
app01-10361	148	9	(	(	PUNCT
app01-10361	148	10	left	leave	VERB
app01-10361	148	11	graph	graph	NOUN
app01-10361	148	12	)	)	PUNCT
app01-10361	148	13	.	.	PUNCT
app01-10361	149	1	in	in	ADP
app01-10361	149	2	this	this	DET
app01-10361	149	3	graph	graph	NOUN
app01-10361	149	4	,	,	PUNCT
app01-10361	149	5	gray	gray	ADJ
app01-10361	149	6	indicates	indicate	VERB
app01-10361	149	7	berkovich	berkovich	NOUN
app01-10361	149	8	simulations	simulation	NOUN
app01-10361	149	9	,	,	PUNCT
app01-10361	149	10	while	while	SCONJ
app01-10361	149	11	black	black	ADJ
app01-10361	149	12	denotes	denote	NOUN
app01-10361	149	13	50	50	NUM
app01-10361	149	14	µm	µm	ADP
app01-10361	149	15	spherical	spherical	ADJ
app01-10361	149	16	indentations	indentation	NOUN
app01-10361	149	17	.	.	PUNCT
app01-10361	150	1	circles	circle	NOUN
app01-10361	150	2	and	and	CCONJ
app01-10361	150	3	triangles	triangle	NOUN
app01-10361	150	4	represent	represent	VERB
app01-10361	150	5	cases	case	NOUN
app01-10361	150	6	of	of	ADP
app01-10361	150	7	the	the	DET
app01-10361	150	8	polymer	polymer	NOUN
app01-10361	150	9	encapsulated	encapsulate	VERB
app01-10361	150	10	by	by	ADP
app01-10361	150	11	top	top	ADJ
app01-10361	150	12	coats	coat	NOUN
app01-10361	150	13	of	of	ADP
app01-10361	150	14	600	600	NUM
app01-10361	150	15	nm	nm	NOUN
app01-10361	150	16	and	and	CCONJ
app01-10361	150	17	200	200	NUM
app01-10361	150	18	nm	nm	ADJ
app01-10361	150	19	thickness	thickness	NOUN
app01-10361	150	20	,	,	PUNCT
app01-10361	150	21	respectively	respectively	ADV
app01-10361	150	22	.	.	PUNCT
app01-10361	151	1	the	the	DET
app01-10361	151	2	right	right	ADJ
app01-10361	151	3	graph	graph	NOUN
app01-10361	151	4	displays	display	NOUN
app01-10361	151	5	results	result	NOUN
app01-10361	151	6	from	from	ADP
app01-10361	151	7	50	50	NUM
app01-10361	151	8	µm	µm	ADP
app01-10361	151	9	spherical	spherical	ADJ
app01-10361	151	10	indentation	indentation	NOUN
app01-10361	151	11	simulations	simulation	NOUN
app01-10361	151	12	for	for	ADP
app01-10361	151	13	different	different	ADJ
app01-10361	151	14	young	young	ADJ
app01-10361	151	15	’s	’s	PART
app01-10361	151	16	moduli	moduli	NOUN
app01-10361	151	17	of	of	ADP
app01-10361	151	18	the	the	DET
app01-10361	151	19	polymer	polymer	NOUN
app01-10361	151	20	.	.	PUNCT
app01-10361	152	1	stack	stack	VERB
app01-10361	152	2	valid	valid	ADJ
app01-10361	152	3	rc	rc	PROPN
app01-10361	152	4	and	and	CCONJ
app01-10361	152	5	h	h	NOUN
app01-10361	152	6	ranges	range	VERB
app01-10361	152	7	[	[	X
app01-10361	152	8	nm	nm	X
app01-10361	152	9	]	]	X
app01-10361	152	10	berkovich	berkovich	NOUN
app01-10361	152	11	tip	tip	NOUN
app01-10361	152	12	50	50	NUM
app01-10361	152	13	µm	µm	ADP
app01-10361	152	14	spherical	spherical	ADJ
app01-10361	152	15	tip	tip	NOUN
app01-10361	152	16	top	top	ADJ
app01-10361	152	17	coat	coat	NOUN
app01-10361	152	18	(	(	PUNCT
app01-10361	152	19	42gpa	42gpa	PROPN
app01-10361	152	20	200	200	NUM
app01-10361	152	21	nm)/polymer	nm)/polymer	NOUN
app01-10361	152	22	(	(	PUNCT
app01-10361	152	23	4gpa	4gpa	NOUN
app01-10361	152	24	3µm)/silicon	3µm)/silicon	NUM
app01-10361	152	25	200	200	NUM
app01-10361	152	26	-	-	SYM
app01-10361	152	27	400/150	400/150	NUM
app01-10361	152	28	-	-	PUNCT
app01-10361	152	29	650	650	NUM
app01-10361	152	30	300	300	NUM
app01-10361	152	31	-	-	PUNCT
app01-10361	152	32	2750/2	2750/2	NUM
app01-10361	152	33	-	-	PUNCT
app01-10361	152	34	130	130	NUM
app01-10361	152	35	top	top	ADJ
app01-10361	152	36	coat	coat	NOUN
app01-10361	152	37	(	(	PUNCT
app01-10361	152	38	35gpa	35gpa	VERB
app01-10361	152	39	600	600	NUM
app01-10361	152	40	nm)/polymer	nm)/polymer	NOUN
app01-10361	152	41	(	(	PUNCT
app01-10361	152	42	4gpa	4gpa	NOUN
app01-10361	152	43	3µm)/silicon	3µm)/silicon	NUM
app01-10361	152	44	600	600	NUM
app01-10361	152	45	-	-	PUNCT
app01-10361	152	46	1800/350	1800/350	NUM
app01-10361	152	47	-	-	PUNCT
app01-10361	152	48	920	920	NUM
app01-10361	152	49	500	500	NUM
app01-10361	152	50	-	-	PUNCT
app01-10361	152	51	5100/7	5100/7	NUM
app01-10361	152	52	-	-	PUNCT
app01-10361	152	53	600	600	NUM
app01-10361	152	54	top	top	ADJ
app01-10361	152	55	coat	coat	NOUN
app01-10361	152	56	(	(	PUNCT
app01-10361	152	57	42gpa	42gpa	PROPN
app01-10361	152	58	200	200	NUM
app01-10361	152	59	nm)/polymer	nm)/polymer	NOUN
app01-10361	152	60	(	(	PUNCT
app01-10361	152	61	0.1	0.1	NUM
app01-10361	152	62	-	-	PUNCT
app01-10361	152	63	10gpa	10gpa	NOUN
app01-10361	152	64	3µm)/silicon	3µm)/silicon	NUM
app01-10361	152	65	/	/	SYM
app01-10361	152	66	1	1	NUM
app01-10361	152	67	600	600	NUM
app01-10361	152	68	-	-	SYM
app01-10361	152	69	2	2	NUM
app01-10361	152	70	500/50	500/50	NUM
app01-10361	152	71	-	-	SYM
app01-10361	152	72	110	110	NUM
app01-10361	152	73	table	table	NOUN
app01-10361	152	74	2	2	NUM
app01-10361	152	75	.	.	PUNCT
app01-10361	152	76	valid	valid	ADJ
app01-10361	152	77	contact	contact	NOUN
app01-10361	152	78	radius	radius	NOUN
app01-10361	152	79	(	(	PUNCT
app01-10361	152	80	rc	rc	PROPN
app01-10361	152	81	)	)	PUNCT
app01-10361	152	82	and	and	CCONJ
app01-10361	152	83	indenter	indenter	PROPN
app01-10361	152	84	displacement	displacement	NOUN
app01-10361	152	85	(	(	PUNCT
app01-10361	152	86	h	h	NOUN
app01-10361	152	87	)	)	PUNCT
app01-10361	152	88	ranges	range	NOUN
app01-10361	152	89	,	,	PUNCT
app01-10361	152	90	extracted	extract	VERB
app01-10361	152	91	from	from	ADP
app01-10361	152	92	the	the	DET
app01-10361	152	93	simulation	simulation	NOUN
app01-10361	152	94	results	result	NOUN
app01-10361	152	95	,	,	PUNCT
app01-10361	152	96	depending	depend	VERB
app01-10361	152	97	on	on	ADP
app01-10361	152	98	the	the	DET
app01-10361	152	99	stack	stack	NOUN
app01-10361	152	100	under	under	ADP
app01-10361	152	101	study	study	NOUN
app01-10361	152	102	and	and	CCONJ
app01-10361	152	103	the	the	DET
app01-10361	152	104	indentation	indentation	NOUN
app01-10361	152	105	tip	tip	NOUN
app01-10361	152	106	.	.	PUNCT
app01-10361	153	1	figure	figure	NOUN
app01-10361	153	2	5	5	NUM
app01-10361	153	3	.	.	PUNCT
app01-10361	154	1	evolution	evolution	NOUN
app01-10361	154	2	of	of	ADP
app01-10361	154	3	the	the	DET
app01-10361	154	4	young	young	PROPN
app01-10361	154	5	’s	’s	PART
app01-10361	154	6	modulus	modulus	NOUN
app01-10361	154	7	as	as	ADP
app01-10361	154	8	a	a	DET
app01-10361	154	9	function	function	NOUN
app01-10361	154	10	of	of	ADP
app01-10361	154	11	the	the	DET
app01-10361	154	12	contact	contact	NOUN
app01-10361	154	13	radius	radius	NOUN
app01-10361	154	14	(	(	PUNCT
app01-10361	154	15	derived	derive	VERB
app01-10361	154	16	from	from	ADP
app01-10361	154	17	calibration	calibration	NOUN
app01-10361	154	18	data	datum	NOUN
app01-10361	154	19	)	)	PUNCT
app01-10361	154	20	for	for	ADP
app01-10361	154	21	an	an	DET
app01-10361	154	22	indented	indented	ADJ
app01-10361	154	23	stack	stack	NOUN
app01-10361	154	24	consisting	consist	VERB
app01-10361	154	25	of	of	ADP
app01-10361	154	26	200	200	NUM
app01-10361	154	27	nm	nm	ADJ
app01-10361	154	28	top	top	NOUN
app01-10361	154	29	coat/3	coat/3	PROPN
app01-10361	154	30	µm	µm	ADP
app01-10361	154	31	polymer	polymer	NOUN
app01-10361	154	32	/	/	SYM
app01-10361	154	33	silicon	silicon	NOUN
app01-10361	154	34	substrate	substrate	NOUN
app01-10361	154	35	.	.	PUNCT
app01-10361	155	1	the	the	DET
app01-10361	155	2	dashed	dash	VERB
app01-10361	155	3	lines	line	NOUN
app01-10361	155	4	represent	represent	VERB
app01-10361	155	5	the	the	DET
app01-10361	155	6	apparent	apparent	ADJ
app01-10361	155	7	young	young	ADJ
app01-10361	155	8	’s	’s	PART
app01-10361	155	9	modulus	modulus	NOUN
app01-10361	155	10	and	and	CCONJ
app01-10361	155	11	the	the	DET
app01-10361	155	12	solid	solid	ADJ
app01-10361	155	13	lines	line	NOUN
app01-10361	155	14	the	the	DET
app01-10361	155	15	young	young	ADJ
app01-10361	155	16	’s	’s	PART
app01-10361	155	17	modulus	modulus	NOUN
app01-10361	155	18	corrected	correct	VERB
app01-10361	155	19	using	use	VERB
app01-10361	155	20	the	the	DET
app01-10361	155	21	mercier	mercier	NOUN
app01-10361	155	22	’s	’s	PART
app01-10361	155	23	model	model	NOUN
app01-10361	155	24	.	.	PUNCT
app01-10361	156	1	indentations	indentation	NOUN
app01-10361	156	2	were	be	AUX
app01-10361	156	3	performed	perform	VERB
app01-10361	156	4	with	with	ADP
app01-10361	156	5	berkovich	berkovich	NOUN
app01-10361	156	6	(	(	PUNCT
app01-10361	156	7	black	black	ADJ
app01-10361	156	8	curves	curve	NOUN
app01-10361	156	9	)	)	PUNCT
app01-10361	156	10	and	and	CCONJ
app01-10361	156	11	50	50	NUM
app01-10361	156	12	µm	µm	NOUN
app01-10361	156	13	spherical	spherical	ADJ
app01-10361	156	14	(	(	PUNCT
app01-10361	156	15	gray	gray	ADJ
app01-10361	156	16	curves	curve	NOUN
app01-10361	156	17	)	)	PUNCT
app01-10361	156	18	tips	tip	NOUN
app01-10361	156	19	.	.	PUNCT
app01-10361	157	1	the	the	DET
app01-10361	157	2	vertical	vertical	ADJ
app01-10361	157	3	lines	line	NOUN
app01-10361	157	4	show	show	VERB
app01-10361	157	5	the	the	DET
app01-10361	157	6	contact	contact	NOUN
app01-10361	157	7	radius	radius	NOUN
app01-10361	157	8	range	range	NOUN
app01-10361	157	9	used	use	VERB
app01-10361	157	10	for	for	ADP
app01-10361	157	11	extracting	extract	VERB
app01-10361	157	12	an	an	DET
app01-10361	157	13	average	average	ADJ
app01-10361	157	14	young	young	ADJ
app01-10361	157	15	’s	’s	PART
app01-10361	157	16	modulus	modulus	ADJ
app01-10361	157	17	value	value	NOUN
app01-10361	157	18	.	.	PUNCT
app01-10361	158	1	lations	lation	NOUN
app01-10361	158	2	and	and	CCONJ
app01-10361	158	3	using	use	VERB
app01-10361	158	4	the	the	DET
app01-10361	158	5	mercier	mercier	NOUN
app01-10361	158	6	-	-	PUNCT
app01-10361	158	7	corrected	correct	VERB
app01-10361	158	8	curve	curve	NOUN
app01-10361	158	9	.	.	PUNCT
app01-10361	159	1	this	this	DET
app01-10361	159	2	range	range	NOUN
app01-10361	159	3	is	be	AUX
app01-10361	159	4	delineated	delineate	VERB
app01-10361	159	5	by	by	ADP
app01-10361	159	6	the	the	DET
app01-10361	159	7	black	black	ADJ
app01-10361	159	8	and	and	CCONJ
app01-10361	159	9	gray	gray	ADJ
app01-10361	159	10	vertical	vertical	ADJ
app01-10361	159	11	lines	line	NOUN
app01-10361	159	12	for	for	ADP
app01-10361	159	13	the	the	DET
app01-10361	159	14	berkovich	berkovich	NOUN
app01-10361	159	15	and	and	CCONJ
app01-10361	159	16	50	50	NUM
app01-10361	159	17	µm	µm	ADP
app01-10361	159	18	spherical	spherical	ADJ
app01-10361	159	19	indentations	indentation	NOUN
app01-10361	159	20	,	,	PUNCT
app01-10361	159	21	respectively	respectively	ADV
app01-10361	159	22	.	.	PUNCT
app01-10361	160	1	these	these	DET
app01-10361	160	2	results	result	NOUN
app01-10361	160	3	enable	enable	VERB
app01-10361	160	4	the	the	DET
app01-10361	160	5	acquisition	acquisition	NOUN
app01-10361	160	6	of	of	ADP
app01-10361	160	7	the	the	DET
app01-10361	160	8	young	young	PROPN
app01-10361	160	9	’s	’s	PART
app01-10361	160	10	modulus	modulus	NOUN
app01-10361	160	11	of	of	ADP
app01-10361	160	12	the	the	DET
app01-10361	160	13	polymer	polymer	NOUN
app01-10361	160	14	encapsulated	encapsulate	VERB
app01-10361	160	15	with	with	ADP
app01-10361	160	16	a	a	DET
app01-10361	160	17	200	200	NUM
app01-10361	160	18	nm	nm	NOUN
app01-10361	160	19	capping	capping	NOUN
app01-10361	160	20	(	(	PUNCT
app01-10361	160	21	figure	figure	NOUN
app01-10361	160	22	6	6	NUM
app01-10361	160	23	)	)	PUNCT
app01-10361	160	24	.	.	PUNCT
app01-10361	161	1	the	the	DET
app01-10361	161	2	same	same	ADJ
app01-10361	161	3	protocol	protocol	NOUN
app01-10361	161	4	is	be	AUX
app01-10361	161	5	used	use	VERB
app01-10361	161	6	for	for	ADP
app01-10361	161	7	a	a	DET
app01-10361	161	8	capping	capping	NOUN
app01-10361	161	9	of	of	ADP
app01-10361	161	10	600	600	NUM
app01-10361	161	11	nm	nm	NOUN
app01-10361	161	12	.	.	PUNCT
app01-10361	162	1	coherent	coherent	ADJ
app01-10361	162	2	values	value	NOUN
app01-10361	162	3	for	for	ADP
app01-10361	162	4	the	the	DET
app01-10361	162	5	young	young	PROPN
app01-10361	162	6	’s	’s	PART
app01-10361	162	7	modulus	modulus	NOUN
app01-10361	162	8	of	of	ADP
app01-10361	162	9	the	the	DET
app01-10361	162	10	polymer	polymer	NOUN
app01-10361	162	11	(	(	PUNCT
app01-10361	162	12	figure	figure	NOUN
app01-10361	162	13	6	6	NUM
app01-10361	162	14	)	)	PUNCT
app01-10361	162	15	are	be	AUX
app01-10361	162	16	obtained	obtain	VERB
app01-10361	162	17	,	,	PUNCT
app01-10361	162	18	with	with	ADP
app01-10361	162	19	a	a	DET
app01-10361	162	20	minimum	minimum	NOUN
app01-10361	162	21	of	of	ADP
app01-10361	162	22	4.3gpa	4.3gpa	NUM
app01-10361	162	23	and	and	CCONJ
app01-10361	162	24	a	a	DET
app01-10361	162	25	maximum	maximum	NOUN
app01-10361	162	26	of	of	ADP
app01-10361	162	27	5.5gpa	5.5gpa	NUM
app01-10361	162	28	.	.	PUNCT
app01-10361	163	1	it	it	PRON
app01-10361	163	2	enables	enable	VERB
app01-10361	163	3	the	the	DET
app01-10361	163	4	validation	validation	NOUN
app01-10361	163	5	of	of	ADP
app01-10361	163	6	this	this	DET
app01-10361	163	7	protocol	protocol	NOUN
app01-10361	163	8	at	at	ADP
app01-10361	163	9	room	room	NOUN
app01-10361	163	10	temperature	temperature	NOUN
app01-10361	163	11	.	.	PUNCT
app01-10361	164	1	4.3	4.3	NUM
app01-10361	164	2	.	.	PUNCT
app01-10361	165	1	temperature	temperature	NOUN
app01-10361	165	2	dependent	dependent	ADJ
app01-10361	165	3	experimental	experimental	ADJ
app01-10361	165	4	results	result	NOUN
app01-10361	165	5	the	the	DET
app01-10361	165	6	obtained	obtain	VERB
app01-10361	165	7	reduced	reduced	ADJ
app01-10361	165	8	young	young	ADJ
app01-10361	165	9	’s	’s	PART
app01-10361	165	10	modulus	modulus	NOUN
app01-10361	165	11	of	of	ADP
app01-10361	165	12	the	the	DET
app01-10361	165	13	polymer	polymer	NOUN
app01-10361	165	14	on	on	ADP
app01-10361	165	15	a	a	DET
app01-10361	165	16	silicon	silicon	NOUN
app01-10361	165	17	substrate	substrate	NOUN
app01-10361	165	18	encapsulated	encapsulate	VERB
app01-10361	165	19	by	by	ADP
app01-10361	165	20	a	a	DET
app01-10361	165	21	200	200	NUM
app01-10361	165	22	nm	nm	ADJ
app01-10361	165	23	top	top	ADJ
app01-10361	165	24	coat	coat	NOUN
app01-10361	165	25	as	as	ADP
app01-10361	165	26	a	a	DET
app01-10361	165	27	function	function	NOUN
app01-10361	165	28	of	of	ADP
app01-10361	165	29	temperature	temperature	NOUN
app01-10361	165	30	is	be	AUX
app01-10361	165	31	shown	show	VERB
app01-10361	165	32	in	in	ADP
app01-10361	165	33	figure	figure	NOUN
app01-10361	165	34	6	6	NUM
app01-10361	165	35	.	.	PUNCT
app01-10361	166	1	here	here	ADV
app01-10361	166	2	,	,	PUNCT
app01-10361	166	3	the	the	DET
app01-10361	166	4	protocol	protocol	NOUN
app01-10361	166	5	used	use	VERB
app01-10361	166	6	allows	allow	VERB
app01-10361	166	7	obtaining	obtain	VERB
app01-10361	166	8	the	the	DET
app01-10361	166	9	value	value	NOUN
app01-10361	166	10	of	of	ADP
app01-10361	166	11	the	the	DET
app01-10361	166	12	reduced	reduce	VERB
app01-10361	166	13	young	young	ADJ
app01-10361	166	14	’s	’s	PART
app01-10361	166	15	modulus	modulus	NOUN
app01-10361	166	16	above	above	ADP
app01-10361	166	17	the	the	DET
app01-10361	166	18	glass	glass	NOUN
app01-10361	166	19	transition	transition	NOUN
app01-10361	166	20	temperature	temperature	NOUN
app01-10361	166	21	,	,	PUNCT
app01-10361	166	22	without	without	ADP
app01-10361	166	23	tip	tip	NOUN
app01-10361	166	24	contamination	contamination	NOUN
app01-10361	166	25	.	.	PUNCT
app01-10361	167	1	tests	test	NOUN
app01-10361	167	2	performed	perform	VERB
app01-10361	167	3	at	at	ADP
app01-10361	167	4	room	room	NOUN
app01-10361	167	5	temperature	temperature	NOUN
app01-10361	167	6	after	after	ADP
app01-10361	167	7	heating	heat	VERB
app01-10361	167	8	at	at	ADP
app01-10361	167	9	250	250	NUM
app01-10361	167	10	°	°	NOUN
app01-10361	167	11	c	c	NOUN
app01-10361	167	12	show	show	VERB
app01-10361	167	13	that	that	SCONJ
app01-10361	167	14	the	the	DET
app01-10361	167	15	polymer	polymer	NOUN
app01-10361	167	16	recovers	recover	VERB
app01-10361	167	17	its	its	PRON
app01-10361	167	18	initial	initial	ADJ
app01-10361	167	19	reduced	reduce	VERB
app01-10361	167	20	young	young	ADJ
app01-10361	167	21	’s	’s	PART
app01-10361	167	22	modulus	modulus	NOUN
app01-10361	167	23	.	.	PUNCT
app01-10361	168	1	this	this	PRON
app01-10361	168	2	demonstrates	demonstrate	VERB
app01-10361	168	3	that	that	SCONJ
app01-10361	168	4	the	the	DET
app01-10361	168	5	polymer	polymer	NOUN
app01-10361	168	6	was	be	AUX
app01-10361	168	7	sufficiently	sufficiently	ADV
app01-10361	168	8	stabilized	stabilize	VERB
app01-10361	168	9	through	through	ADP
app01-10361	168	10	thermal	thermal	ADJ
app01-10361	168	11	annealing	annealing	NOUN
app01-10361	168	12	before	before	ADP
app01-10361	168	13	conducting	conduct	VERB
app01-10361	168	14	the	the	DET
app01-10361	168	15	temperaturedependent	temperaturedependent	ADJ
app01-10361	168	16	nanoindentation	nanoindentation	NOUN
app01-10361	168	17	test	test	NOUN
app01-10361	168	18	.	.	PUNCT
app01-10361	169	1	the	the	DET
app01-10361	169	2	glass	glass	NOUN
app01-10361	169	3	transition	transition	NOUN
app01-10361	169	4	temperature	temperature	NOUN
app01-10361	169	5	is	be	AUX
app01-10361	169	6	determined	determine	VERB
app01-10361	169	7	to	to	PART
app01-10361	169	8	be	be	AUX
app01-10361	169	9	around	around	ADP
app01-10361	169	10	220	220	NUM
app01-10361	169	11	°	°	NOUN
app01-10361	169	12	c	c	NOUN
app01-10361	169	13	by	by	ADP
app01-10361	169	14	53	53	NUM
app01-10361	169	15	m.	m.	NOUN
app01-10361	169	16	melo	melo	PROPN
app01-10361	169	17	de	de	PROPN
app01-10361	169	18	lima	lima	PROPN
app01-10361	169	19	,	,	PUNCT
app01-10361	169	20	v.	v.	ADP
app01-10361	169	21	mandrillon	mandrillon	PROPN
app01-10361	169	22	,	,	PUNCT
app01-10361	170	1	j.	j.	PROPN
app01-10361	170	2	hay	hay	PROPN
app01-10361	170	3	et	et	PROPN
app01-10361	170	4	al	al	PROPN
app01-10361	170	5	.	.	PROPN
app01-10361	171	1	acta	acta	PROPN
app01-10361	171	2	polytechnica	polytechnica	PROPN
app01-10361	171	3	ctu	ctu	PROPN
app01-10361	171	4	proceedings	proceeding	NOUN
app01-10361	171	5	figure	figure	VERB
app01-10361	171	6	6	6	NUM
app01-10361	171	7	.	.	PUNCT
app01-10361	172	1	average	average	ADJ
app01-10361	172	2	young	young	PROPN
app01-10361	172	3	’s	’s	PART
app01-10361	172	4	modulus	modulus	ADJ
app01-10361	172	5	values	value	NOUN
app01-10361	172	6	determined	determine	VERB
app01-10361	172	7	for	for	ADP
app01-10361	172	8	different	different	ADJ
app01-10361	172	9	samples	sample	NOUN
app01-10361	172	10	,	,	PUNCT
app01-10361	172	11	at	at	ADP
app01-10361	172	12	room	room	NOUN
app01-10361	172	13	temperature	temperature	NOUN
app01-10361	172	14	,	,	PUNCT
app01-10361	172	15	using	use	VERB
app01-10361	172	16	berkovich	berkovich	NOUN
app01-10361	172	17	and	and	CCONJ
app01-10361	172	18	50	50	NUM
app01-10361	172	19	µm	µm	ADP
app01-10361	172	20	spherical	spherical	ADJ
app01-10361	172	21	tips	tip	NOUN
app01-10361	172	22	(	(	PUNCT
app01-10361	172	23	right	right	ADJ
app01-10361	172	24	graph	graph	NOUN
app01-10361	172	25	)	)	PUNCT
app01-10361	172	26	.	.	PUNCT
app01-10361	173	1	average	average	ADJ
app01-10361	173	2	young	young	PROPN
app01-10361	173	3	’s	’s	PART
app01-10361	173	4	modulus	modulus	NOUN
app01-10361	173	5	of	of	ADP
app01-10361	173	6	the	the	DET
app01-10361	173	7	polymer	polymer	NOUN
app01-10361	173	8	as	as	ADP
app01-10361	173	9	a	a	DET
app01-10361	173	10	function	function	NOUN
app01-10361	173	11	of	of	ADP
app01-10361	173	12	temperature	temperature	NOUN
app01-10361	173	13	(	(	PUNCT
app01-10361	173	14	left	leave	VERB
app01-10361	173	15	graph	graph	NOUN
app01-10361	173	16	)	)	PUNCT
app01-10361	173	17	.	.	PUNCT
app01-10361	174	1	the	the	DET
app01-10361	174	2	polymer	polymer	NOUN
app01-10361	174	3	film	film	NOUN
app01-10361	174	4	is	be	AUX
app01-10361	174	5	deposited	deposit	VERB
app01-10361	174	6	on	on	ADP
app01-10361	174	7	a	a	DET
app01-10361	174	8	silicon	silicon	NOUN
app01-10361	174	9	substrate	substrate	NOUN
app01-10361	174	10	and	and	CCONJ
app01-10361	174	11	encapsulated	encapsulate	VERB
app01-10361	174	12	by	by	ADP
app01-10361	174	13	a	a	DET
app01-10361	174	14	200	200	NUM
app01-10361	174	15	nm	nm	ADJ
app01-10361	174	16	top	top	ADJ
app01-10361	174	17	coat	coat	NOUN
app01-10361	174	18	.	.	PUNCT
app01-10361	175	1	tests	test	NOUN
app01-10361	175	2	were	be	AUX
app01-10361	175	3	performed	perform	VERB
app01-10361	175	4	with	with	ADP
app01-10361	175	5	a	a	DET
app01-10361	175	6	50	50	NUM
app01-10361	175	7	µm	µm	ADP
app01-10361	175	8	spherical	spherical	ADJ
app01-10361	175	9	tip	tip	NOUN
app01-10361	175	10	.	.	PUNCT
app01-10361	176	1	identifying	identify	VERB
app01-10361	176	2	the	the	DET
app01-10361	176	3	inflection	inflection	NOUN
app01-10361	176	4	point	point	NOUN
app01-10361	176	5	on	on	ADP
app01-10361	176	6	the	the	DET
app01-10361	176	7	curve	curve	NOUN
app01-10361	176	8	.	.	PUNCT
app01-10361	177	1	this	this	DET
app01-10361	177	2	value	value	NOUN
app01-10361	177	3	is	be	AUX
app01-10361	177	4	consistent	consistent	ADJ
app01-10361	177	5	with	with	ADP
app01-10361	177	6	previous	previous	ADJ
app01-10361	177	7	studies	study	NOUN
app01-10361	177	8	conducted	conduct	VERB
app01-10361	177	9	by	by	ADP
app01-10361	177	10	temperature	temperature	NOUN
app01-10361	177	11	-	-	PUNCT
app01-10361	177	12	dependent	dependent	ADJ
app01-10361	177	13	wafer	wafer	NOUN
app01-10361	177	14	curvature	curvature	NOUN
app01-10361	177	15	tests	test	NOUN
app01-10361	177	16	and	and	CCONJ
app01-10361	177	17	presented	present	VERB
app01-10361	177	18	as	as	ADP
app01-10361	177	19	the	the	DET
app01-10361	177	20	results	result	NOUN
app01-10361	177	21	for	for	ADP
app01-10361	177	22	’	'	PUNCT
app01-10361	177	23	resin	resin	NOUN
app01-10361	177	24	c	c	NOUN
app01-10361	177	25	’	'	PUNCT
app01-10361	177	26	in	in	ADP
app01-10361	177	27	[	[	X
app01-10361	177	28	8	8	NUM
app01-10361	177	29	]	]	SYM
app01-10361	177	30	.	.	PUNCT
app01-10361	178	1	5	5	X
app01-10361	178	2	.	.	X
app01-10361	178	3	conclusions	conclusion	NOUN
app01-10361	178	4	a	a	DET
app01-10361	178	5	protocol	protocol	NOUN
app01-10361	178	6	for	for	ADP
app01-10361	178	7	temperature	temperature	NOUN
app01-10361	178	8	-	-	PUNCT
app01-10361	178	9	dependent	dependent	ADJ
app01-10361	178	10	nanoindentation	nanoindentation	NOUN
app01-10361	178	11	of	of	ADP
app01-10361	178	12	polymer	polymer	NOUN
app01-10361	178	13	thin	thin	ADJ
app01-10361	178	14	films	film	NOUN
app01-10361	178	15	without	without	ADP
app01-10361	178	16	tip	tip	NOUN
app01-10361	178	17	contamination	contamination	NOUN
app01-10361	178	18	is	be	AUX
app01-10361	178	19	described	describe	VERB
app01-10361	178	20	and	and	CCONJ
app01-10361	178	21	validated	validate	VERB
app01-10361	178	22	.	.	PUNCT
app01-10361	179	1	it	it	PRON
app01-10361	179	2	involves	involve	VERB
app01-10361	179	3	adding	add	VERB
app01-10361	179	4	a	a	DET
app01-10361	179	5	top	top	ADJ
app01-10361	179	6	coat	coat	NOUN
app01-10361	179	7	,	,	PUNCT
app01-10361	179	8	here	here	ADV
app01-10361	179	9	a	a	DET
app01-10361	179	10	dielectric	dielectric	ADJ
app01-10361	179	11	capping	capping	NOUN
app01-10361	179	12	,	,	PUNCT
app01-10361	179	13	and	and	CCONJ
app01-10361	179	14	the	the	DET
app01-10361	179	15	use	use	NOUN
app01-10361	179	16	of	of	ADP
app01-10361	179	17	the	the	DET
app01-10361	179	18	mercier	mercier	PROPN
app01-10361	179	19	’s	’s	PART
app01-10361	179	20	multilayer	multilayer	ADJ
app01-10361	179	21	model	model	NOUN
app01-10361	179	22	to	to	PART
app01-10361	179	23	extract	extract	VERB
app01-10361	179	24	the	the	DET
app01-10361	179	25	young	young	ADJ
app01-10361	179	26	’s	’s	PART
app01-10361	179	27	modulus	modulus	NOUN
app01-10361	179	28	of	of	ADP
app01-10361	179	29	the	the	DET
app01-10361	179	30	polymer	polymer	NOUN
app01-10361	179	31	.	.	PUNCT
app01-10361	180	1	the	the	DET
app01-10361	180	2	applicability	applicability	NOUN
app01-10361	180	3	of	of	ADP
app01-10361	180	4	this	this	DET
app01-10361	180	5	model	model	NOUN
app01-10361	180	6	to	to	ADP
app01-10361	180	7	the	the	DET
app01-10361	180	8	stack	stack	NOUN
app01-10361	180	9	studied	study	VERB
app01-10361	180	10	here	here	ADV
app01-10361	180	11	is	be	AUX
app01-10361	180	12	verified	verify	VERB
app01-10361	180	13	by	by	ADP
app01-10361	180	14	finiteelement	finiteelement	NOUN
app01-10361	180	15	simulations	simulation	NOUN
app01-10361	180	16	of	of	ADP
app01-10361	180	17	berkovich	berkovich	NOUN
app01-10361	180	18	and	and	CCONJ
app01-10361	180	19	50	50	NUM
app01-10361	180	20	µm	µm	ADP
app01-10361	180	21	spherical	spherical	ADJ
app01-10361	180	22	tip	tip	NOUN
app01-10361	180	23	indentations	indentation	NOUN
app01-10361	180	24	.	.	PUNCT
app01-10361	181	1	this	this	PRON
app01-10361	181	2	enabled	enable	VERB
app01-10361	181	3	the	the	DET
app01-10361	181	4	identification	identification	NOUN
app01-10361	181	5	of	of	ADP
app01-10361	181	6	a	a	DET
app01-10361	181	7	contact	contact	NOUN
app01-10361	181	8	radius	radius	NOUN
app01-10361	181	9	range	range	NOUN
app01-10361	181	10	for	for	ADP
app01-10361	181	11	which	which	PRON
app01-10361	181	12	the	the	DET
app01-10361	181	13	relative	relative	ADJ
app01-10361	181	14	error	error	NOUN
app01-10361	181	15	in	in	ADP
app01-10361	181	16	young	young	PROPN
app01-10361	181	17	’s	’s	PART
app01-10361	181	18	modulus	modulus	NOUN
app01-10361	181	19	is	be	AUX
app01-10361	181	20	less	less	ADJ
app01-10361	181	21	than	than	ADP
app01-10361	181	22	10	10	NUM
app01-10361	181	23	%	%	NOUN
app01-10361	181	24	.	.	PUNCT
app01-10361	182	1	consequently	consequently	ADV
app01-10361	182	2	,	,	PUNCT
app01-10361	182	3	the	the	DET
app01-10361	182	4	evolution	evolution	NOUN
app01-10361	182	5	of	of	ADP
app01-10361	182	6	the	the	DET
app01-10361	182	7	young	young	PROPN
app01-10361	182	8	’s	’s	PART
app01-10361	182	9	modulus	modulus	NOUN
app01-10361	182	10	of	of	ADP
app01-10361	182	11	the	the	DET
app01-10361	182	12	polymer	polymer	NOUN
app01-10361	182	13	as	as	ADP
app01-10361	182	14	a	a	DET
app01-10361	182	15	function	function	NOUN
app01-10361	182	16	of	of	ADP
app01-10361	182	17	temperature	temperature	NOUN
app01-10361	182	18	is	be	AUX
app01-10361	182	19	determined	determine	VERB
app01-10361	182	20	while	while	SCONJ
app01-10361	182	21	preventing	prevent	VERB
app01-10361	182	22	tip	tip	NOUN
app01-10361	182	23	contamination	contamination	NOUN
app01-10361	182	24	.	.	PUNCT
app01-10361	183	1	acknowledgements	acknowledgement	NOUN
app01-10361	183	2	this	this	DET
app01-10361	183	3	work	work	NOUN
app01-10361	183	4	is	be	AUX
app01-10361	183	5	part	part	NOUN
app01-10361	183	6	of	of	ADP
app01-10361	183	7	the	the	DET
app01-10361	183	8	ipcei	ipcei	NOUN
app01-10361	183	9	microelectronics	microelectronic	NOUN
app01-10361	183	10	and	and	CCONJ
app01-10361	183	11	connectivity	connectivity	NOUN
app01-10361	183	12	and	and	CCONJ
app01-10361	183	13	was	be	AUX
app01-10361	183	14	supported	support	VERB
app01-10361	183	15	by	by	ADP
app01-10361	183	16	the	the	DET
app01-10361	183	17	french	french	ADJ
app01-10361	183	18	public	public	ADJ
app01-10361	183	19	authorities	authority	NOUN
app01-10361	183	20	with	with	ADP
app01-10361	183	21	the	the	DET
app01-10361	183	22	frame	frame	NOUN
app01-10361	183	23	of	of	ADP
app01-10361	183	24	“	"	PUNCT
app01-10361	183	25	france	france	PROPN
app01-10361	183	26	2030	2030	NUM
app01-10361	183	27	”	"	PUNCT
app01-10361	183	28	program	program	NOUN
app01-10361	183	29	.	.	PUNCT
app01-10361	184	1	references	reference	NOUN
app01-10361	184	2	[	[	X
app01-10361	184	3	1	1	NUM
app01-10361	184	4	]	]	PUNCT
app01-10361	184	5	w.	w.	PROPN
app01-10361	184	6	c.	c.	PROPN
app01-10361	184	7	oliver	oliver	PROPN
app01-10361	184	8	,	,	PUNCT
app01-10361	184	9	g.	g.	PROPN
app01-10361	184	10	m.	m.	PROPN
app01-10361	184	11	pharr	pharr	PROPN
app01-10361	184	12	.	.	PUNCT
app01-10361	185	1	an	an	DET
app01-10361	185	2	improved	improved	ADJ
app01-10361	185	3	technique	technique	NOUN
app01-10361	185	4	for	for	ADP
app01-10361	185	5	determining	determine	VERB
app01-10361	185	6	hardness	hardness	ADJ
app01-10361	185	7	and	and	CCONJ
app01-10361	185	8	elastic	elastic	ADJ
app01-10361	185	9	modulus	modulus	NOUN
app01-10361	185	10	using	use	VERB
app01-10361	185	11	load	load	NOUN
app01-10361	185	12	and	and	CCONJ
app01-10361	185	13	displacement	displacement	ADJ
app01-10361	185	14	sensing	sense	VERB
app01-10361	185	15	indentation	indentation	NOUN
app01-10361	185	16	experiments	experiment	NOUN
app01-10361	185	17	.	.	PUNCT
app01-10361	186	1	journal	journal	NOUN
app01-10361	186	2	of	of	ADP
app01-10361	186	3	materials	material	NOUN
app01-10361	186	4	research	research	NOUN
app01-10361	186	5	7(6):1564–1583	7(6):1564–1583	NOUN
app01-10361	186	6	,	,	PUNCT
app01-10361	186	7	1992	1992	NUM
app01-10361	186	8	.	.	PUNCT
app01-10361	187	1	https://doi.org/10.1557/jmr.1992.1564	https://doi.org/10.1557/jmr.1992.1564	PROPN
app01-10361	188	1	[	[	X
app01-10361	188	2	2	2	NUM
app01-10361	188	3	]	]	PUNCT
app01-10361	188	4	d.	d.	PROPN
app01-10361	188	5	mercier	mercier	PROPN
app01-10361	188	6	,	,	PUNCT
app01-10361	188	7	v.	v.	ADP
app01-10361	188	8	mandrillon	mandrillon	NOUN
app01-10361	188	9	,	,	PUNCT
app01-10361	188	10	m.	m.	NOUN
app01-10361	188	11	verdier	verdier	NOUN
app01-10361	188	12	,	,	PUNCT
app01-10361	188	13	y.	y.	PROPN
app01-10361	188	14	brechet	brechet	PROPN
app01-10361	188	15	.	.	PUNCT
app01-10361	189	1	mesure	mesure	PROPN
app01-10361	189	2	de	de	PROPN
app01-10361	189	3	module	module	NOUN
app01-10361	189	4	d’young	d’young	NOUN
app01-10361	189	5	d’un	d’un	NOUN
app01-10361	189	6	film	film	NOUN
app01-10361	189	7	mince	mince	NOUN
app01-10361	189	8	à	à	X
app01-10361	189	9	partir	partir	X
app01-10361	189	10	de	de	X
app01-10361	189	11	mesures	mesures	X
app01-10361	189	12	expérimentales	expérimentales	PROPN
app01-10361	189	13	de	de	ADP
app01-10361	189	14	nanoindentation	nanoindentation	PROPN
app01-10361	189	15	réalisées	réalisées	PROPN
app01-10361	189	16	sur	sur	PROPN
app01-10361	189	17	des	des	PROPN
app01-10361	189	18	systèmes	systèmes	PROPN
app01-10361	189	19	multicouches	multicouche	NOUN
app01-10361	189	20	.	.	PUNCT
app01-10361	190	1	matériaux	matériaux	PROPN
app01-10361	190	2	&	&	CCONJ
app01-10361	190	3	techniques	technique	NOUN
app01-10361	190	4	99(2):169–178	99(2):169–178	NUM
app01-10361	190	5	,	,	PUNCT
app01-10361	190	6	2011	2011	NUM
app01-10361	190	7	.	.	PUNCT
app01-10361	191	1	https://doi.org/10.1051/mattech/2011029	https://doi.org/10.1051/mattech/2011029	PROPN
app01-10361	192	1	[	[	X
app01-10361	192	2	3	3	X
app01-10361	192	3	]	]	PUNCT
app01-10361	192	4	s.	s.	PROPN
app01-10361	192	5	bec	bec	PROPN
app01-10361	192	6	,	,	PUNCT
app01-10361	192	7	a.	a.	NOUN
app01-10361	192	8	tonck	tonck	NOUN
app01-10361	192	9	,	,	PUNCT
app01-10361	192	10	j.	j.	PROPN
app01-10361	192	11	l.	l.	PROPN
app01-10361	192	12	loubet	loubet	PROPN
app01-10361	192	13	.	.	PUNCT
app01-10361	193	1	a	a	DET
app01-10361	193	2	simple	simple	ADJ
app01-10361	193	3	guide	guide	NOUN
app01-10361	193	4	to	to	PART
app01-10361	193	5	determine	determine	VERB
app01-10361	193	6	elastic	elastic	ADJ
app01-10361	193	7	properties	property	NOUN
app01-10361	193	8	of	of	ADP
app01-10361	193	9	films	film	NOUN
app01-10361	193	10	on	on	ADP
app01-10361	193	11	substrate	substrate	NOUN
app01-10361	193	12	from	from	ADP
app01-10361	193	13	nanoindentation	nanoindentation	NOUN
app01-10361	193	14	experiments	experiment	NOUN
app01-10361	193	15	.	.	PUNCT
app01-10361	194	1	philosophical	philosophical	ADJ
app01-10361	194	2	magazine	magazine	NOUN
app01-10361	194	3	86(33	86(33	PROPN
app01-10361	194	4	-	-	SYM
app01-10361	194	5	35):5347–5358	35):5347–5358	PROPN
app01-10361	194	6	,	,	PUNCT
app01-10361	194	7	2006	2006	NUM
app01-10361	194	8	.	.	PUNCT
app01-10361	195	1	https://doi.org/10.1080/14786430600660856	https://doi.org/10.1080/14786430600660856	VERB
app01-10361	196	1	[	[	X
app01-10361	196	2	4	4	NUM
app01-10361	196	3	]	]	PUNCT
app01-10361	196	4	m.	m.	NOUN
app01-10361	196	5	rusinowicz	rusinowicz	NOUN
app01-10361	196	6	.	.	PUNCT
app01-10361	197	1	mechanical	mechanical	ADJ
app01-10361	197	2	and	and	CCONJ
app01-10361	197	3	electrical	electrical	ADJ
app01-10361	197	4	properties	property	NOUN
app01-10361	197	5	of	of	ADP
app01-10361	197	6	dielectric	dielectric	ADJ
app01-10361	197	7	thin	thin	ADJ
app01-10361	197	8	films	film	NOUN
app01-10361	197	9	:	:	PUNCT
app01-10361	197	10	electrical	electrical	ADJ
app01-10361	197	11	-	-	PUNCT
app01-10361	197	12	nanoindentation	nanoindentation	NOUN
app01-10361	197	13	experiments	experiment	NOUN
app01-10361	197	14	and	and	CCONJ
app01-10361	197	15	numerical	numerical	ADJ
app01-10361	197	16	simulations	simulation	NOUN
app01-10361	197	17	.	.	PUNCT
app01-10361	198	1	ph.d	ph.d	PROPN
app01-10361	198	2	.	.	PUNCT
app01-10361	199	1	thesis	thesis	PROPN
app01-10361	199	2	,	,	PUNCT
app01-10361	199	3	université	université	PROPN
app01-10361	199	4	grenoble	grenoble	PROPN
app01-10361	199	5	alpes	alpes	PROPN
app01-10361	199	6	,	,	PUNCT
app01-10361	199	7	2023	2023	NUM
app01-10361	199	8	.	.	PUNCT
app01-10361	200	1	[	[	X
app01-10361	200	2	5	5	X
app01-10361	200	3	]	]	X
app01-10361	200	4	g.	g.	PROPN
app01-10361	200	5	carlotti	carlotti	PROPN
app01-10361	200	6	,	,	PUNCT
app01-10361	200	7	n.	n.	PROPN
app01-10361	200	8	chérault	chérault	NOUN
app01-10361	200	9	,	,	PUNCT
app01-10361	200	10	n.	n.	PROPN
app01-10361	200	11	casanova	casanova	PROPN
app01-10361	200	12	,	,	PUNCT
app01-10361	200	13	et	et	PROPN
app01-10361	200	14	al	al	PROPN
app01-10361	200	15	.	.	PUNCT
app01-10361	200	16	elastic	elastic	ADJ
app01-10361	200	17	constants	constant	NOUN
app01-10361	200	18	of	of	ADP
app01-10361	200	19	low	low	ADJ
app01-10361	200	20	-	-	PUNCT
app01-10361	200	21	k	k	NOUN
app01-10361	200	22	and	and	CCONJ
app01-10361	200	23	barrier	barrier	NOUN
app01-10361	200	24	dielectric	dielectric	NOUN
app01-10361	200	25	films	film	NOUN
app01-10361	200	26	measured	measure	VERB
app01-10361	200	27	by	by	ADP
app01-10361	200	28	brillouin	brillouin	PROPN
app01-10361	200	29	light	light	PROPN
app01-10361	200	30	scattering	scattering	NOUN
app01-10361	200	31	.	.	PUNCT
app01-10361	201	1	thin	thin	ADJ
app01-10361	201	2	solid	solid	ADJ
app01-10361	201	3	films	film	NOUN
app01-10361	201	4	493(1	493(1	NOUN
app01-10361	201	5	-	-	SYM
app01-10361	201	6	2):175–178	2):175–178	NUM
app01-10361	201	7	,	,	PUNCT
app01-10361	201	8	2005	2005	NUM
app01-10361	201	9	.	.	PUNCT
app01-10361	202	1	https://doi.org/10.1016/j.tsf.2005.06.019	https://doi.org/10.1016/j.tsf.2005.06.019	X
app01-10361	203	1	[	[	X
app01-10361	203	2	6	6	X
app01-10361	203	3	]	]	PUNCT
app01-10361	203	4	j.	j.	PROPN
app01-10361	203	5	richeton	richeton	PROPN
app01-10361	203	6	,	,	PUNCT
app01-10361	203	7	s.	s.	PROPN
app01-10361	203	8	ahzi	ahzi	PROPN
app01-10361	203	9	,	,	PUNCT
app01-10361	203	10	k.	k.	PROPN
app01-10361	203	11	vecchio	vecchio	PROPN
app01-10361	203	12	,	,	PUNCT
app01-10361	203	13	et	et	PROPN
app01-10361	203	14	al	al	PROPN
app01-10361	203	15	.	.	PROPN
app01-10361	203	16	modeling	modeling	NOUN
app01-10361	203	17	and	and	CCONJ
app01-10361	203	18	validation	validation	NOUN
app01-10361	203	19	of	of	ADP
app01-10361	203	20	the	the	DET
app01-10361	203	21	large	large	ADJ
app01-10361	203	22	deformation	deformation	NOUN
app01-10361	203	23	inelastic	inelastic	ADJ
app01-10361	203	24	response	response	NOUN
app01-10361	203	25	of	of	ADP
app01-10361	203	26	amorphous	amorphous	ADJ
app01-10361	203	27	polymers	polymer	NOUN
app01-10361	203	28	over	over	ADP
app01-10361	203	29	a	a	DET
app01-10361	203	30	wide	wide	ADJ
app01-10361	203	31	range	range	NOUN
app01-10361	203	32	of	of	ADP
app01-10361	203	33	temperatures	temperature	NOUN
app01-10361	203	34	and	and	CCONJ
app01-10361	203	35	strain	strain	NOUN
app01-10361	203	36	rates	rate	NOUN
app01-10361	203	37	.	.	PUNCT
app01-10361	204	1	international	international	ADJ
app01-10361	204	2	journal	journal	NOUN
app01-10361	204	3	of	of	ADP
app01-10361	204	4	solids	solid	NOUN
app01-10361	204	5	and	and	CCONJ
app01-10361	204	6	structures	structure	NOUN
app01-10361	204	7	44(24):7938–7954	44(24):7938–7954	NUM
app01-10361	204	8	,	,	PUNCT
app01-10361	204	9	2007	2007	NUM
app01-10361	204	10	.	.	PUNCT
app01-10361	205	1	https://doi.org/10.1016/j.ijsolstr.2007.05.018	https://doi.org/10.1016/j.ijsolstr.2007.05.018	NOUN
app01-10361	206	1	[	[	X
app01-10361	206	2	7	7	X
app01-10361	206	3	]	]	PUNCT
app01-10361	206	4	i.	i.	PROPN
app01-10361	206	5	n.	n.	PROPN
app01-10361	206	6	sneddon	sneddon	PROPN
app01-10361	206	7	.	.	PUNCT
app01-10361	207	1	the	the	DET
app01-10361	207	2	relation	relation	NOUN
app01-10361	207	3	between	between	ADP
app01-10361	207	4	load	load	NOUN
app01-10361	207	5	and	and	CCONJ
app01-10361	207	6	penetration	penetration	NOUN
app01-10361	207	7	in	in	ADP
app01-10361	207	8	the	the	DET
app01-10361	207	9	axisymmetric	axisymmetric	ADJ
app01-10361	207	10	boussinesq	boussinesq	ADJ
app01-10361	207	11	problem	problem	NOUN
app01-10361	207	12	for	for	ADP
app01-10361	207	13	a	a	DET
app01-10361	207	14	punch	punch	NOUN
app01-10361	207	15	of	of	ADP
app01-10361	207	16	arbitrary	arbitrary	ADJ
app01-10361	207	17	profile	profile	NOUN
app01-10361	207	18	.	.	PUNCT
app01-10361	208	1	international	international	ADJ
app01-10361	208	2	journal	journal	NOUN
app01-10361	208	3	of	of	ADP
app01-10361	208	4	engineering	engineering	NOUN
app01-10361	208	5	science	science	NOUN
app01-10361	208	6	3(1):47–57	3(1):47–57	NUM
app01-10361	208	7	,	,	PUNCT
app01-10361	208	8	1965	1965	NUM
app01-10361	208	9	.	.	PUNCT
app01-10361	209	1	https://doi.org/10.1016/0020-7225(65)90019-4	https://doi.org/10.1016/0020-7225(65)90019-4	X
app01-10361	209	2	[	[	X
app01-10361	209	3	8	8	X
app01-10361	209	4	]	]	PUNCT
app01-10361	209	5	b.	b.	PROPN
app01-10361	209	6	vavrille	vavrille	PROPN
app01-10361	209	7	.	.	PUNCT
app01-10361	210	1	développement	développement	PROPN
app01-10361	210	2	d’une	d’une	PROPN
app01-10361	210	3	méthode	méthode	PROPN
app01-10361	210	4	innovante	innovante	PROPN
app01-10361	210	5	de	de	X
app01-10361	210	6	mesures	mesures	X
app01-10361	210	7	des	des	PROPN
app01-10361	210	8	propriétés	propriétés	PROPN
app01-10361	210	9	thermomécaniques	thermomécanique	NOUN
app01-10361	210	10	de	de	X
app01-10361	210	11	films	film	NOUN
app01-10361	210	12	minces	mince	VERB
app01-10361	210	13	.	.	PUNCT
app01-10361	211	1	application	application	NOUN
app01-10361	211	2	à	à	X
app01-10361	211	3	un	un	PROPN
app01-10361	211	4	dispositif	dispositif	PROPN
app01-10361	211	5	imageur	imageur	PROPN
app01-10361	211	6	.	.	PUNCT
app01-10361	212	1	ph.d	ph.d	PROPN
app01-10361	212	2	.	.	PUNCT
app01-10361	213	1	thesis	thesis	PROPN
app01-10361	213	2	,	,	PUNCT
app01-10361	213	3	université	université	PROPN
app01-10361	213	4	grenoble	grenoble	PROPN
app01-10361	213	5	alpes	alpes	PROPN
app01-10361	213	6	,	,	PUNCT
app01-10361	213	7	2023	2023	NUM
app01-10361	213	8	.	.	PUNCT
app01-10361	214	1	54	54	NUM
app01-10361	214	2	https://doi.org/10.1557/jmr.1992.1564	https://doi.org/10.1557/jmr.1992.1564	NOUN
app01-10361	214	3	https://doi.org/10.1051/mattech/2011029	https://doi.org/10.1051/mattech/2011029	PROPN
app01-10361	214	4	https://doi.org/10.1080/14786430600660856	https://doi.org/10.1080/14786430600660856	PROPN
app01-10361	214	5	https://doi.org/10.1016/j.tsf.2005.06.019	https://doi.org/10.1016/j.tsf.2005.06.019	ADP
app01-10361	214	6	https://doi.org/10.1016/j.ijsolstr.2007.05.018	https://doi.org/10.1016/j.ijsolstr.2007.05.018	PROPN
app01-10361	214	7	https://doi.org/10.1016/0020-7225(65)90019-4	https://doi.org/10.1016/0020-7225(65)90019-4	PROPN
app01-10361	214	8	acta	acta	PROPN
app01-10361	214	9	polytechnica	polytechnica	PROPN
app01-10361	214	10	ctu	ctu	NOUN
app01-10361	214	11	proceedings	proceeding	NOUN
app01-10361	214	12	50:49–54	50:49–54	NUM
app01-10361	214	13	,	,	PUNCT
app01-10361	214	14	2024	2024	NUM
app01-10361	214	15	1	1	NUM
app01-10361	214	16	introduction	introduction	NOUN
app01-10361	214	17	2	2	NUM
app01-10361	214	18	materials	material	NOUN
app01-10361	214	19	and	and	CCONJ
app01-10361	214	20	methods	method	NOUN
app01-10361	214	21	2.1	2.1	NUM
app01-10361	214	22	experiments	experiment	NOUN
app01-10361	214	23	2.2	2.2	NUM
app01-10361	214	24	multilayer	multilayer	ADJ
app01-10361	214	25	model	model	NOUN
app01-10361	214	26	3	3	NUM
app01-10361	214	27	finite	finite	ADJ
app01-10361	214	28	-	-	ADJ
app01-10361	214	29	element	element	ADJ
app01-10361	214	30	model	model	NOUN
app01-10361	214	31	3.1	3.1	NUM
app01-10361	214	32	berkovich	berkovich	NOUN
app01-10361	214	33	simulations	simulation	VERB
app01-10361	214	34	3.2	3.2	NUM
app01-10361	214	35	spherical	spherical	ADJ
app01-10361	214	36	simulations	simulation	NOUN
app01-10361	214	37	4	4	NUM
app01-10361	214	38	results	result	NOUN
app01-10361	214	39	and	and	CCONJ
app01-10361	214	40	discussion	discussion	NOUN
app01-10361	214	41	4.1	4.1	NUM
app01-10361	214	42	simulations	simulation	NOUN
app01-10361	214	43	results	result	VERB
app01-10361	214	44	4.2	4.2	NUM
app01-10361	214	45	experimental	experimental	ADJ
app01-10361	214	46	results	result	NOUN
app01-10361	214	47	at	at	ADP
app01-10361	214	48	room	room	NOUN
app01-10361	214	49	temperature	temperature	NOUN
app01-10361	214	50	4.3	4.3	NUM
app01-10361	214	51	temperature	temperature	NOUN
app01-10361	214	52	dependent	dependent	ADJ
app01-10361	214	53	experimental	experimental	ADJ
app01-10361	214	54	results	result	NOUN
app01-10361	214	55	5	5	NUM
app01-10361	214	56	conclusions	conclusion	NOUN
app01-10361	214	57	acknowledgements	acknowledgement	NOUN
app01-10361	214	58	references	reference	NOUN