id	sid	tid	token	lemma	pos
app01-10367	1	1	acta	acta	PROPN
app01-10367	1	2	polytechnica	polytechnica	PROPN
app01-10367	1	3	ctu	ctu	NOUN
app01-10367	1	4	proceedings	proceeding	NOUN
app01-10367	1	5	https://doi.org/10.14311/app.2024.50.0088	https://doi.org/10.14311/app.2024.50.0088	PROPN
app01-10367	1	6	acta	acta	PROPN
app01-10367	1	7	polytechnica	polytechnica	PROPN
app01-10367	1	8	ctu	ctu	PROPN
app01-10367	1	9	proceedings	proceeding	NOUN
app01-10367	1	10	50:88–93	50:88–93	NUM
app01-10367	1	11	,	,	PUNCT
app01-10367	1	12	2024	2024	NUM
app01-10367	1	13	©	©	ADP
app01-10367	1	14	2024	2024	NUM
app01-10367	1	15	the	the	DET
app01-10367	1	16	author(s	author(s	NOUN
app01-10367	1	17	)	)	PUNCT
app01-10367	1	18	.	.	PUNCT
app01-10367	2	1	licensed	license	VERB
app01-10367	2	2	under	under	ADP
app01-10367	2	3	a	a	DET
app01-10367	2	4	cc	cc	NOUN
app01-10367	2	5	-	-	PUNCT
app01-10367	2	6	by	by	ADP
app01-10367	2	7	4.0	4.0	NUM
app01-10367	2	8	licence	licence	NOUN
app01-10367	2	9	published	publish	VERB
app01-10367	2	10	by	by	ADP
app01-10367	2	11	the	the	DET
app01-10367	2	12	czech	czech	PROPN
app01-10367	2	13	technical	technical	PROPN
app01-10367	2	14	university	university	PROPN
app01-10367	2	15	in	in	ADP
app01-10367	2	16	prague	prague	PROPN
app01-10367	2	17	optimization	optimization	NOUN
app01-10367	2	18	of	of	ADP
app01-10367	2	19	fib	fib	ADJ
app01-10367	2	20	milling	milling	NOUN
app01-10367	2	21	procedure	procedure	NOUN
app01-10367	2	22	for	for	ADP
app01-10367	2	23	micromechanical	micromechanical	ADJ
app01-10367	2	24	testing	testing	NOUN
app01-10367	2	25	of	of	ADP
app01-10367	2	26	cement	cement	NOUN
app01-10367	2	27	pastes	paste	NOUN
app01-10367	2	28	jan	jan	PROPN
app01-10367	2	29	procházkaa,∗	procházkaa,∗	NOUN
app01-10367	2	30	,	,	PUNCT
app01-10367	2	31	jiří	jiří	NOUN
app01-10367	2	32	němeček	němeček	VERB
app01-10367	2	33	1,b	1,b	NOUN
app01-10367	2	34	,	,	PUNCT
app01-10367	2	35	patricie	patricie	ADJ
app01-10367	2	36	halodováa	halodováa	PROPN
app01-10367	2	37	,	,	PUNCT
app01-10367	2	38	jiří	jiří	NOUN
app01-10367	2	39	němeček	němeček	VERB
app01-10367	2	40	2,b	2,b	NUM
app01-10367	2	41	a	a	DET
app01-10367	2	42	research	research	NOUN
app01-10367	2	43	centre	centre	NOUN
app01-10367	2	44	řež	řež	PROPN
app01-10367	2	45	,	,	PUNCT
app01-10367	2	46	hlavní	hlavní	VERB
app01-10367	2	47	130	130	NUM
app01-10367	2	48	,	,	PUNCT
app01-10367	2	49	řež	řež	PROPN
app01-10367	2	50	,	,	PUNCT
app01-10367	2	51	250	250	NUM
app01-10367	2	52	68	68	NUM
app01-10367	2	53	husinec	husinec	NOUN
app01-10367	2	54	,	,	PUNCT
app01-10367	2	55	czech	czech	PROPN
app01-10367	2	56	republic	republic	PROPN
app01-10367	2	57	b	b	PROPN
app01-10367	2	58	czech	czech	PROPN
app01-10367	2	59	technical	technical	PROPN
app01-10367	2	60	university	university	PROPN
app01-10367	2	61	in	in	ADP
app01-10367	2	62	prague	prague	PROPN
app01-10367	2	63	,	,	PUNCT
app01-10367	2	64	faculty	faculty	NOUN
app01-10367	2	65	of	of	ADP
app01-10367	2	66	civil	civil	ADJ
app01-10367	2	67	engineering	engineering	NOUN
app01-10367	2	68	,	,	PUNCT
app01-10367	2	69	thákurova	thákurova	X
app01-10367	2	70	7	7	NUM
app01-10367	2	71	,	,	PUNCT
app01-10367	2	72	166	166	NUM
app01-10367	2	73	29	29	NUM
app01-10367	2	74	prague	prague	NOUN
app01-10367	2	75	6	6	NUM
app01-10367	2	76	–	–	PUNCT
app01-10367	2	77	dejvice	dejvice	NOUN
app01-10367	2	78	,	,	PUNCT
app01-10367	2	79	czech	czech	PROPN
app01-10367	2	80	republic	republic	NOUN
app01-10367	2	81	∗	∗	NOUN
app01-10367	2	82	corresponding	correspond	VERB
app01-10367	2	83	author	author	NOUN
app01-10367	2	84	:	:	PUNCT
app01-10367	2	85	jan.prochazka@cvrez.cz	jan.prochazka@cvrez.cz	X
app01-10367	2	86	abstract	abstract	ADJ
app01-10367	2	87	.	.	PUNCT
app01-10367	3	1	this	this	DET
app01-10367	3	2	study	study	NOUN
app01-10367	3	3	focuses	focus	VERB
app01-10367	3	4	on	on	ADP
app01-10367	3	5	optimizing	optimize	VERB
app01-10367	3	6	the	the	DET
app01-10367	3	7	focused	focus	VERB
app01-10367	3	8	ion	ion	NOUN
app01-10367	3	9	beam	beam	NOUN
app01-10367	3	10	(	(	PUNCT
app01-10367	3	11	fib	fib	ADJ
app01-10367	3	12	)	)	PUNCT
app01-10367	3	13	preparation	preparation	NOUN
app01-10367	3	14	process	process	NOUN
app01-10367	3	15	for	for	ADP
app01-10367	3	16	micro	micro	NOUN
app01-10367	3	17	-	-	NOUN
app01-10367	3	18	beams	beam	NOUN
app01-10367	3	19	made	make	VERB
app01-10367	3	20	from	from	ADP
app01-10367	3	21	cement	cement	NOUN
app01-10367	3	22	paste	paste	NOUN
app01-10367	3	23	prepared	prepare	VERB
app01-10367	3	24	from	from	ADP
app01-10367	3	25	portland	portland	PROPN
app01-10367	3	26	cement	cement	NOUN
app01-10367	3	27	cem	cem	NOUN
app01-10367	3	28	i-42.5r	i-42.5r	VERB
app01-10367	3	29	,	,	PUNCT
app01-10367	3	30	which	which	PRON
app01-10367	3	31	includes	include	VERB
app01-10367	3	32	four	four	NUM
app01-10367	3	33	phases	phase	NOUN
app01-10367	3	34	:	:	PUNCT
app01-10367	3	35	inner	inner	ADJ
app01-10367	3	36	and	and	CCONJ
app01-10367	3	37	outer	outer	ADJ
app01-10367	3	38	products	product	NOUN
app01-10367	3	39	,	,	PUNCT
app01-10367	3	40	portlandite	portlandite	ADJ
app01-10367	3	41	,	,	PUNCT
app01-10367	3	42	and	and	CCONJ
app01-10367	3	43	residual	residual	ADJ
app01-10367	3	44	clinker	clinker	NOUN
app01-10367	3	45	.	.	PUNCT
app01-10367	4	1	the	the	DET
app01-10367	4	2	effects	effect	NOUN
app01-10367	4	3	of	of	ADP
app01-10367	4	4	the	the	DET
app01-10367	4	5	primary	primary	ADJ
app01-10367	4	6	electron	electron	NOUN
app01-10367	4	7	beam	beam	NOUN
app01-10367	4	8	,	,	PUNCT
app01-10367	4	9	focused	focus	VERB
app01-10367	4	10	ion	ion	NOUN
app01-10367	4	11	beam	beam	NOUN
app01-10367	4	12	,	,	PUNCT
app01-10367	4	13	image	image	NOUN
app01-10367	4	14	drift	drift	NOUN
app01-10367	4	15	,	,	PUNCT
app01-10367	4	16	imaging	imaging	NOUN
app01-10367	4	17	issues	issue	NOUN
app01-10367	4	18	,	,	PUNCT
app01-10367	4	19	and	and	CCONJ
app01-10367	4	20	sample	sample	NOUN
app01-10367	4	21	moisture	moisture	NOUN
app01-10367	4	22	cycling	cycling	NOUN
app01-10367	4	23	were	be	AUX
app01-10367	4	24	investigated	investigate	VERB
app01-10367	4	25	.	.	PUNCT
app01-10367	5	1	recommendations	recommendation	NOUN
app01-10367	5	2	on	on	ADP
app01-10367	5	3	specific	specific	ADJ
app01-10367	5	4	fabrication	fabrication	NOUN
app01-10367	5	5	procedures	procedure	NOUN
app01-10367	5	6	and	and	CCONJ
app01-10367	5	7	fib	fib	ADJ
app01-10367	5	8	milling	milling	NOUN
app01-10367	5	9	parameters	parameter	NOUN
app01-10367	5	10	,	,	PUNCT
app01-10367	5	11	such	such	ADJ
app01-10367	5	12	as	as	ADP
app01-10367	5	13	accelerating	accelerate	VERB
app01-10367	5	14	voltage	voltage	NOUN
app01-10367	5	15	,	,	PUNCT
app01-10367	5	16	probe	probe	NOUN
app01-10367	5	17	current	current	ADJ
app01-10367	5	18	,	,	PUNCT
app01-10367	5	19	and	and	CCONJ
app01-10367	5	20	time	time	NOUN
app01-10367	5	21	,	,	PUNCT
app01-10367	5	22	were	be	AUX
app01-10367	5	23	provided	provide	VERB
app01-10367	5	24	.	.	PUNCT
app01-10367	6	1	keywords	keyword	NOUN
app01-10367	6	2	:	:	PUNCT
app01-10367	6	3	cement	cement	NOUN
app01-10367	6	4	paste	paste	NOUN
app01-10367	6	5	,	,	PUNCT
app01-10367	6	6	focused	focus	VERB
app01-10367	6	7	ion	ion	NOUN
app01-10367	6	8	beam	beam	NOUN
app01-10367	6	9	,	,	PUNCT
app01-10367	6	10	nanoindentation	nanoindentation	NOUN
app01-10367	6	11	,	,	PUNCT
app01-10367	6	12	micro	micro	NOUN
app01-10367	6	13	-	-	NOUN
app01-10367	6	14	beam	beam	ADJ
app01-10367	6	15	,	,	PUNCT
app01-10367	6	16	c	c	X
app01-10367	6	17	–	–	PUNCT
app01-10367	6	18	s	s	X
app01-10367	6	19	–	–	PUNCT
app01-10367	6	20	h	h	NOUN
app01-10367	6	21	gel	gel	NOUN
app01-10367	6	22	,	,	PUNCT
app01-10367	6	23	scanning	scan	VERB
app01-10367	6	24	electron	electron	NOUN
app01-10367	6	25	microscopy	microscopy	NOUN
app01-10367	6	26	.	.	PUNCT
app01-10367	7	1	1	1	X
app01-10367	7	2	.	.	X
app01-10367	7	3	introduction	introduction	NOUN
app01-10367	7	4	ordinary	ordinary	ADJ
app01-10367	7	5	cement	cement	NOUN
app01-10367	7	6	paste	paste	NOUN
app01-10367	7	7	is	be	AUX
app01-10367	7	8	a	a	DET
app01-10367	7	9	heterogeneous	heterogeneous	ADJ
app01-10367	7	10	material	material	NOUN
app01-10367	7	11	,	,	PUNCT
app01-10367	7	12	primarily	primarily	ADV
app01-10367	7	13	composed	compose	VERB
app01-10367	7	14	of	of	ADP
app01-10367	7	15	calcium	calcium	NOUN
app01-10367	7	16	-	-	PUNCT
app01-10367	7	17	silica	silica	NOUN
app01-10367	7	18	-	-	PUNCT
app01-10367	7	19	hydrate	hydrate	NOUN
app01-10367	7	20	(	(	PUNCT
app01-10367	7	21	c	c	NOUN
app01-10367	7	22	–	–	PUNCT
app01-10367	7	23	s	s	NOUN
app01-10367	7	24	–	–	PUNCT
app01-10367	7	25	h	h	NOUN
app01-10367	7	26	)	)	PUNCT
app01-10367	7	27	gel	gel	NOUN
app01-10367	7	28	,	,	PUNCT
app01-10367	7	29	portlandite	portlandite	NOUN
app01-10367	7	30	(	(	PUNCT
app01-10367	7	31	ch	ch	NOUN
app01-10367	7	32	)	)	PUNCT
app01-10367	7	33	,	,	PUNCT
app01-10367	7	34	residual	residual	ADJ
app01-10367	7	35	clinker	clinker	NOUN
app01-10367	7	36	(	(	PUNCT
app01-10367	7	37	c	c	NOUN
app01-10367	7	38	)	)	PUNCT
app01-10367	7	39	,	,	PUNCT
app01-10367	7	40	porosity	porosity	NOUN
app01-10367	7	41	,	,	PUNCT
app01-10367	7	42	and	and	CCONJ
app01-10367	7	43	other	other	ADJ
app01-10367	7	44	minor	minor	ADJ
app01-10367	7	45	phases	phase	NOUN
app01-10367	7	46	.	.	PUNCT
app01-10367	8	1	the	the	DET
app01-10367	8	2	c	c	PROPN
app01-10367	8	3	–	–	PUNCT
app01-10367	8	4	s	s	X
app01-10367	8	5	–	–	PUNCT
app01-10367	8	6	h	h	NOUN
app01-10367	8	7	gel	gel	NOUN
app01-10367	8	8	exists	exist	VERB
app01-10367	8	9	in	in	ADP
app01-10367	8	10	two	two	NUM
app01-10367	8	11	variants	variant	NOUN
app01-10367	8	12	with	with	ADP
app01-10367	8	13	different	different	ADJ
app01-10367	8	14	densities	density	NOUN
app01-10367	8	15	.	.	PUNCT
app01-10367	9	1	low	low	ADJ
app01-10367	9	2	-	-	PUNCT
app01-10367	9	3	density	density	NOUN
app01-10367	9	4	c	c	NOUN
app01-10367	9	5	–	–	PUNCT
app01-10367	9	6	s	s	X
app01-10367	9	7	–	–	PUNCT
app01-10367	9	8	h	h	NOUN
app01-10367	9	9	gel	gel	NOUN
app01-10367	9	10	,	,	PUNCT
app01-10367	9	11	along	along	ADP
app01-10367	9	12	with	with	ADP
app01-10367	9	13	other	other	ADJ
app01-10367	9	14	minor	minor	ADJ
app01-10367	9	15	phases	phase	NOUN
app01-10367	9	16	,	,	PUNCT
app01-10367	9	17	forms	form	VERB
app01-10367	9	18	the	the	DET
app01-10367	9	19	outer	outer	ADJ
app01-10367	9	20	product	product	NOUN
app01-10367	9	21	(	(	PUNCT
app01-10367	9	22	op	op	NOUN
app01-10367	9	23	)	)	PUNCT
app01-10367	9	24	,	,	PUNCT
app01-10367	9	25	while	while	SCONJ
app01-10367	9	26	high	high	ADJ
app01-10367	9	27	-	-	PUNCT
app01-10367	9	28	density	density	NOUN
app01-10367	9	29	c	c	NOUN
app01-10367	9	30	–	–	PUNCT
app01-10367	9	31	s	s	X
app01-10367	9	32	–	–	PUNCT
app01-10367	9	33	h	h	NOUN
app01-10367	9	34	gel	gel	NOUN
app01-10367	9	35	,	,	PUNCT
app01-10367	9	36	also	also	ADV
app01-10367	9	37	with	with	ADP
app01-10367	9	38	other	other	ADJ
app01-10367	9	39	minor	minor	ADJ
app01-10367	9	40	phases	phase	NOUN
app01-10367	9	41	,	,	PUNCT
app01-10367	9	42	forms	form	VERB
app01-10367	9	43	the	the	DET
app01-10367	9	44	inner	inner	ADJ
app01-10367	9	45	product	product	NOUN
app01-10367	9	46	(	(	PUNCT
app01-10367	9	47	ip	ip	NOUN
app01-10367	9	48	)	)	PUNCT
app01-10367	10	1	[	[	X
app01-10367	10	2	1	1	NUM
app01-10367	10	3	,	,	PUNCT
app01-10367	10	4	2	2	NUM
app01-10367	10	5	]	]	PUNCT
app01-10367	10	6	.	.	PUNCT
app01-10367	11	1	these	these	DET
app01-10367	11	2	phases	phase	NOUN
app01-10367	11	3	exhibit	exhibit	VERB
app01-10367	11	4	variable	variable	ADJ
app01-10367	11	5	chemical	chemical	NOUN
app01-10367	11	6	compositions	composition	NOUN
app01-10367	11	7	and	and	CCONJ
app01-10367	11	8	different	different	ADJ
app01-10367	11	9	mechanical	mechanical	ADJ
app01-10367	11	10	properties	property	NOUN
app01-10367	11	11	.	.	PUNCT
app01-10367	12	1	nanoindentation	nanoindentation	NOUN
app01-10367	12	2	can	can	AUX
app01-10367	12	3	be	be	AUX
app01-10367	12	4	used	use	VERB
app01-10367	12	5	to	to	PART
app01-10367	12	6	assess	assess	VERB
app01-10367	12	7	the	the	DET
app01-10367	12	8	mechanical	mechanical	ADJ
app01-10367	12	9	properties	property	NOUN
app01-10367	12	10	,	,	PUNCT
app01-10367	12	11	such	such	ADJ
app01-10367	12	12	as	as	ADP
app01-10367	12	13	the	the	DET
app01-10367	12	14	young	young	ADJ
app01-10367	12	15	’s	’s	PART
app01-10367	12	16	modulus	modulus	NOUN
app01-10367	12	17	or	or	CCONJ
app01-10367	12	18	hardness	hardness	NOUN
app01-10367	12	19	of	of	ADP
app01-10367	12	20	these	these	DET
app01-10367	12	21	micrometer	micrometer	NOUN
app01-10367	12	22	-	-	PUNCT
app01-10367	12	23	sized	sized	ADJ
app01-10367	12	24	phases	phase	NOUN
app01-10367	13	1	[	[	X
app01-10367	13	2	3–5	3–5	NOUN
app01-10367	13	3	]	]	PUNCT
app01-10367	13	4	.	.	PUNCT
app01-10367	14	1	however	however	ADV
app01-10367	14	2	,	,	PUNCT
app01-10367	14	3	nanoindentation	nanoindentation	NOUN
app01-10367	14	4	can	can	AUX
app01-10367	14	5	not	not	PART
app01-10367	14	6	directly	directly	ADV
app01-10367	14	7	measure	measure	VERB
app01-10367	14	8	the	the	DET
app01-10367	14	9	compressive	compressive	ADJ
app01-10367	14	10	and	and	CCONJ
app01-10367	14	11	tensile	tensile	NOUN
app01-10367	14	12	strengths	strength	NOUN
app01-10367	14	13	or	or	CCONJ
app01-10367	14	14	fracture	fracture	NOUN
app01-10367	14	15	energy	energy	NOUN
app01-10367	14	16	of	of	ADP
app01-10367	14	17	these	these	DET
app01-10367	14	18	phases	phase	NOUN
app01-10367	14	19	.	.	PUNCT
app01-10367	15	1	these	these	DET
app01-10367	15	2	properties	property	NOUN
app01-10367	15	3	can	can	AUX
app01-10367	15	4	be	be	AUX
app01-10367	15	5	determined	determine	VERB
app01-10367	15	6	by	by	ADP
app01-10367	15	7	fabricating	fabricate	VERB
app01-10367	15	8	micro	micro	NOUN
app01-10367	15	9	-	-	NOUN
app01-10367	15	10	pillars	pillar	NOUN
app01-10367	15	11	or	or	CCONJ
app01-10367	15	12	micro	micro	NOUN
app01-10367	15	13	-	-	NOUN
app01-10367	15	14	beams	beam	NOUN
app01-10367	15	15	using	use	VERB
app01-10367	15	16	focused	focused	ADJ
app01-10367	15	17	ion	ion	NOUN
app01-10367	15	18	beam	beam	NOUN
app01-10367	15	19	(	(	PUNCT
app01-10367	15	20	fib	fib	ADJ
app01-10367	15	21	)	)	PUNCT
app01-10367	15	22	techniques	technique	NOUN
app01-10367	15	23	.	.	PUNCT
app01-10367	16	1	subsequently	subsequently	ADV
app01-10367	16	2	,	,	PUNCT
app01-10367	16	3	compressing	compress	VERB
app01-10367	16	4	the	the	DET
app01-10367	16	5	micro	micro	NOUN
app01-10367	16	6	-	-	NOUN
app01-10367	16	7	pillars	pillars	ADJ
app01-10367	16	8	[	[	X
app01-10367	16	9	6	6	NUM
app01-10367	16	10	,	,	PUNCT
app01-10367	16	11	7	7	NUM
app01-10367	16	12	]	]	PUNCT
app01-10367	16	13	or	or	CCONJ
app01-10367	16	14	bending	bend	VERB
app01-10367	16	15	the	the	DET
app01-10367	16	16	micro	micro	NOUN
app01-10367	16	17	-	-	NOUN
app01-10367	16	18	beams	beam	NOUN
app01-10367	16	19	[	[	X
app01-10367	16	20	8	8	NUM
app01-10367	16	21	,	,	PUNCT
app01-10367	16	22	9	9	NUM
app01-10367	16	23	]	]	PUNCT
app01-10367	16	24	with	with	ADP
app01-10367	16	25	a	a	DET
app01-10367	16	26	nanoindenter	nanoindenter	NOUN
app01-10367	16	27	can	can	AUX
app01-10367	16	28	be	be	AUX
app01-10367	16	29	used	use	VERB
app01-10367	16	30	to	to	PART
app01-10367	16	31	derive	derive	VERB
app01-10367	16	32	the	the	DET
app01-10367	16	33	elastic	elastic	ADJ
app01-10367	16	34	and	and	CCONJ
app01-10367	16	35	fracture	fracture	NOUN
app01-10367	16	36	properties	property	NOUN
app01-10367	16	37	of	of	ADP
app01-10367	16	38	the	the	DET
app01-10367	16	39	individual	individual	ADJ
app01-10367	16	40	phases	phase	NOUN
app01-10367	16	41	.	.	PUNCT
app01-10367	17	1	despite	despite	SCONJ
app01-10367	17	2	the	the	DET
app01-10367	17	3	indisputable	indisputable	ADJ
app01-10367	17	4	advantages	advantage	NOUN
app01-10367	17	5	of	of	ADP
app01-10367	17	6	the	the	DET
app01-10367	17	7	fib	fib	ADJ
app01-10367	17	8	milling	milling	NOUN
app01-10367	17	9	technique	technique	NOUN
app01-10367	17	10	,	,	PUNCT
app01-10367	17	11	several	several	ADJ
app01-10367	17	12	potential	potential	ADJ
app01-10367	17	13	undesirable	undesirable	ADJ
app01-10367	17	14	effects	effect	NOUN
app01-10367	17	15	associated	associate	VERB
app01-10367	17	16	with	with	ADP
app01-10367	17	17	ion	ion	NOUN
app01-10367	17	18	beam	beam	NOUN
app01-10367	17	19	nanofabrication	nanofabrication	NOUN
app01-10367	17	20	,	,	PUNCT
app01-10367	17	21	such	such	ADJ
app01-10367	17	22	as	as	ADP
app01-10367	17	23	temperature	temperature	NOUN
app01-10367	17	24	-	-	PUNCT
app01-10367	17	25	induced	induce	VERB
app01-10367	17	26	phase	phase	NOUN
app01-10367	17	27	transformations	transformation	NOUN
app01-10367	17	28	,	,	PUNCT
app01-10367	17	29	gallium	gallium	NOUN
app01-10367	17	30	implantation	implantation	NOUN
app01-10367	17	31	,	,	PUNCT
app01-10367	17	32	and	and	CCONJ
app01-10367	17	33	unintended	unintended	ADJ
app01-10367	17	34	material	material	NOUN
app01-10367	17	35	redeposition	redeposition	NOUN
app01-10367	17	36	,	,	PUNCT
app01-10367	17	37	can	can	AUX
app01-10367	17	38	significantly	significantly	ADV
app01-10367	17	39	influence	influence	VERB
app01-10367	17	40	the	the	DET
app01-10367	17	41	measurement	measurement	NOUN
app01-10367	17	42	results	result	VERB
app01-10367	18	1	[	[	X
app01-10367	18	2	9	9	NUM
app01-10367	18	3	]	]	PUNCT
app01-10367	18	4	.	.	PUNCT
app01-10367	19	1	therefore	therefore	ADV
app01-10367	19	2	,	,	PUNCT
app01-10367	19	3	when	when	SCONJ
app01-10367	19	4	using	use	VERB
app01-10367	19	5	an	an	DET
app01-10367	19	6	ion	ion	NOUN
app01-10367	19	7	beam	beam	NOUN
app01-10367	19	8	for	for	ADP
app01-10367	19	9	micro	micro	ADJ
app01-10367	19	10	-	-	ADJ
app01-10367	19	11	beam	beam	ADJ
app01-10367	19	12	fabrication	fabrication	NOUN
app01-10367	19	13	,	,	PUNCT
app01-10367	19	14	it	it	PRON
app01-10367	19	15	is	be	AUX
app01-10367	19	16	essential	essential	ADJ
app01-10367	19	17	to	to	PART
app01-10367	19	18	select	select	VERB
app01-10367	19	19	appropriate	appropriate	ADJ
app01-10367	19	20	sputter1postdoctoral	sputter1postdoctoral	ADJ
app01-10367	19	21	researcher	researcher	NOUN
app01-10367	19	22	at	at	ADP
app01-10367	19	23	czech	czech	PROPN
app01-10367	19	24	technical	technical	PROPN
app01-10367	19	25	university	university	PROPN
app01-10367	19	26	in	in	ADP
app01-10367	19	27	prague	prague	PROPN
app01-10367	19	28	,	,	PUNCT
app01-10367	19	29	orcid	orcid	PROPN
app01-10367	19	30	:	:	PUNCT
app01-10367	19	31	0000	0000	NUM
app01-10367	19	32	-	-	PUNCT
app01-10367	19	33	0002	0002	NUM
app01-10367	19	34	-	-	PUNCT
app01-10367	19	35	5635	5635	NUM
app01-10367	19	36	-	-	PUNCT
app01-10367	19	37	695x	695x	NOUN
app01-10367	19	38	.	.	PUNCT
app01-10367	20	1	2professor	2professor	NUM
app01-10367	20	2	at	at	ADP
app01-10367	20	3	czech	czech	PROPN
app01-10367	20	4	technical	technical	PROPN
app01-10367	20	5	university	university	PROPN
app01-10367	20	6	in	in	ADP
app01-10367	20	7	prague	prague	PROPN
app01-10367	20	8	,	,	PUNCT
app01-10367	20	9	orcid	orcid	PROPN
app01-10367	20	10	:	:	PUNCT
app01-10367	20	11	0000	0000	NUM
app01-10367	20	12	-	-	PUNCT
app01-10367	20	13	0002	0002	NUM
app01-10367	20	14	-	-	PUNCT
app01-10367	20	15	3565	3565	NUM
app01-10367	20	16	-	-	PUNCT
app01-10367	20	17	8182	8182	NUM
app01-10367	20	18	.	.	PUNCT
app01-10367	21	1	ing	ing	ADJ
app01-10367	21	2	parameters	parameter	NOUN
app01-10367	21	3	to	to	PART
app01-10367	21	4	minimize	minimize	VERB
app01-10367	21	5	the	the	DET
app01-10367	21	6	impact	impact	NOUN
app01-10367	21	7	of	of	ADP
app01-10367	21	8	nanofabrication	nanofabrication	NOUN
app01-10367	21	9	on	on	ADP
app01-10367	21	10	the	the	DET
app01-10367	21	11	mechanical	mechanical	ADJ
app01-10367	21	12	testing	testing	NOUN
app01-10367	21	13	results	result	NOUN
app01-10367	21	14	.	.	PUNCT
app01-10367	22	1	this	this	DET
app01-10367	22	2	study	study	NOUN
app01-10367	22	3	elucidates	elucidate	VERB
app01-10367	22	4	the	the	DET
app01-10367	22	5	crucial	crucial	ADJ
app01-10367	22	6	steps	step	NOUN
app01-10367	22	7	involved	involve	VERB
app01-10367	22	8	in	in	ADP
app01-10367	22	9	preparing	prepare	VERB
app01-10367	22	10	microbeams	microbeam	NOUN
app01-10367	22	11	using	use	VERB
app01-10367	22	12	fib	fib	ADJ
app01-10367	22	13	techniques	technique	NOUN
app01-10367	22	14	and	and	CCONJ
app01-10367	22	15	discusses	discuss	VERB
app01-10367	22	16	the	the	DET
app01-10367	22	17	utilization	utilization	NOUN
app01-10367	22	18	of	of	ADP
app01-10367	22	19	optimized	optimize	VERB
app01-10367	22	20	parameters	parameter	NOUN
app01-10367	22	21	to	to	PART
app01-10367	22	22	ensure	ensure	VERB
app01-10367	22	23	the	the	DET
app01-10367	22	24	efficacy	efficacy	NOUN
app01-10367	22	25	and	and	CCONJ
app01-10367	22	26	accuracy	accuracy	NOUN
app01-10367	22	27	of	of	ADP
app01-10367	22	28	both	both	CCONJ
app01-10367	22	29	the	the	DET
app01-10367	22	30	manufacturing	manufacturing	NOUN
app01-10367	22	31	process	process	NOUN
app01-10367	22	32	and	and	CCONJ
app01-10367	22	33	subsequent	subsequent	ADJ
app01-10367	22	34	nanomechanical	nanomechanical	ADJ
app01-10367	22	35	testing	testing	NOUN
app01-10367	22	36	.	.	PUNCT
app01-10367	23	1	2	2	X
app01-10367	23	2	.	.	X
app01-10367	23	3	materials	material	NOUN
app01-10367	23	4	and	and	CCONJ
app01-10367	23	5	methods	method	NOUN
app01-10367	23	6	2.1	2.1	NUM
app01-10367	23	7	.	.	PUNCT
app01-10367	24	1	material	material	VERB
app01-10367	24	2	the	the	DET
app01-10367	24	3	cement	cement	NOUN
app01-10367	24	4	paste	paste	NOUN
app01-10367	24	5	samples	sample	NOUN
app01-10367	24	6	were	be	AUX
app01-10367	24	7	mixed	mix	VERB
app01-10367	24	8	from	from	ADP
app01-10367	24	9	portland	portland	PROPN
app01-10367	24	10	cement	cement	NOUN
app01-10367	24	11	cem	cem	NOUN
app01-10367	24	12	i-42.r	i-42.r	PUNCT
app01-10367	24	13	(	(	PUNCT
app01-10367	24	14	českomoravský	českomoravský	ADJ
app01-10367	24	15	cement	cement	NOUN
app01-10367	24	16	,	,	PUNCT
app01-10367	24	17	czech	czech	PROPN
app01-10367	24	18	republic	republic	NOUN
app01-10367	24	19	)	)	PUNCT
app01-10367	24	20	of	of	ADP
app01-10367	24	21	the	the	DET
app01-10367	24	22	chemical	chemical	NOUN
app01-10367	24	23	composition	composition	NOUN
app01-10367	24	24	shown	show	VERB
app01-10367	24	25	in	in	ADP
app01-10367	24	26	table	table	NOUN
app01-10367	24	27	1	1	NUM
app01-10367	24	28	without	without	ADP
app01-10367	24	29	chemical	chemical	NOUN
app01-10367	24	30	admixtures	admixture	NOUN
app01-10367	24	31	and	and	CCONJ
app01-10367	24	32	the	the	DET
app01-10367	24	33	water	water	NOUN
app01-10367	24	34	-	-	PUNCT
app01-10367	24	35	tocement	tocement	NOUN
app01-10367	24	36	ratio	ratio	NOUN
app01-10367	24	37	of	of	ADP
app01-10367	24	38	0.4	0.4	NUM
app01-10367	24	39	.	.	PUNCT
app01-10367	25	1	a	a	DET
app01-10367	25	2	fresh	fresh	ADJ
app01-10367	25	3	paste	paste	NOUN
app01-10367	25	4	was	be	AUX
app01-10367	25	5	cast	cast	VERB
app01-10367	25	6	in	in	ADP
app01-10367	25	7	cylindrical	cylindrical	ADJ
app01-10367	25	8	molds	mold	NOUN
app01-10367	25	9	(	(	PUNCT
app01-10367	25	10	27	27	NUM
app01-10367	25	11	mm	mm	NOUN
app01-10367	25	12	in	in	ADP
app01-10367	25	13	diameter	diameter	NOUN
app01-10367	25	14	,	,	PUNCT
app01-10367	25	15	70	70	NUM
app01-10367	25	16	mm	mm	NOUN
app01-10367	25	17	in	in	ADP
app01-10367	25	18	height	height	NOUN
app01-10367	25	19	)	)	PUNCT
app01-10367	25	20	and	and	CCONJ
app01-10367	25	21	vibrated	vibrate	VERB
app01-10367	25	22	to	to	PART
app01-10367	25	23	avoid	avoid	VERB
app01-10367	25	24	excessive	excessive	ADJ
app01-10367	25	25	air	air	NOUN
app01-10367	25	26	voids	voids	NOUN
app01-10367	25	27	in	in	ADP
app01-10367	25	28	the	the	DET
app01-10367	25	29	structure	structure	NOUN
app01-10367	25	30	.	.	PUNCT
app01-10367	26	1	then	then	ADV
app01-10367	26	2	,	,	PUNCT
app01-10367	26	3	the	the	DET
app01-10367	26	4	samples	sample	NOUN
app01-10367	26	5	were	be	AUX
app01-10367	26	6	stored	store	VERB
app01-10367	26	7	in	in	ADP
app01-10367	26	8	lime	lime	NOUN
app01-10367	26	9	water	water	NOUN
app01-10367	26	10	for	for	ADP
app01-10367	26	11	20	20	NUM
app01-10367	26	12	months	month	NOUN
app01-10367	26	13	.	.	PUNCT
app01-10367	27	1	detailed	detailed	ADJ
app01-10367	27	2	procedure	procedure	NOUN
app01-10367	27	3	and	and	CCONJ
app01-10367	27	4	sample	sample	NOUN
app01-10367	27	5	labeling	labeling	NOUN
app01-10367	27	6	are	be	AUX
app01-10367	27	7	described	describe	VERB
app01-10367	27	8	in	in	ADP
app01-10367	27	9	[	[	X
app01-10367	27	10	10	10	NUM
app01-10367	27	11	]	]	PUNCT
app01-10367	27	12	.	.	PUNCT
app01-10367	28	1	2.2	2.2	NUM
app01-10367	28	2	.	.	PUNCT
app01-10367	29	1	sample	sample	NOUN
app01-10367	29	2	preparation	preparation	NOUN
app01-10367	29	3	after	after	ADP
app01-10367	29	4	the	the	DET
app01-10367	29	5	curing	cure	VERB
app01-10367	29	6	period	period	NOUN
app01-10367	29	7	in	in	ADP
app01-10367	29	8	lime	lime	NOUN
app01-10367	29	9	water	water	NOUN
app01-10367	29	10	,	,	PUNCT
app01-10367	29	11	the	the	DET
app01-10367	29	12	samples	sample	NOUN
app01-10367	29	13	were	be	AUX
app01-10367	29	14	dried	dry	VERB
app01-10367	29	15	at	at	ADP
app01-10367	29	16	50	50	NUM
app01-10367	29	17	°	°	NOUN
app01-10367	29	18	c	c	NOUN
app01-10367	29	19	for	for	ADP
app01-10367	29	20	3	3	NUM
app01-10367	29	21	days	day	NOUN
app01-10367	29	22	.	.	PUNCT
app01-10367	30	1	then	then	ADV
app01-10367	30	2	,	,	PUNCT
app01-10367	30	3	the	the	DET
app01-10367	30	4	samples	sample	NOUN
app01-10367	30	5	were	be	AUX
app01-10367	30	6	ground	grind	VERB
app01-10367	30	7	for	for	ADP
app01-10367	30	8	1	1	NUM
app01-10367	30	9	min	min	NOUN
app01-10367	30	10	on	on	ADP
app01-10367	30	11	sic	sic	ADJ
app01-10367	30	12	paper	paper	NOUN
app01-10367	30	13	grit	grit	NOUN
app01-10367	30	14	2	2	NUM
app01-10367	30	15	000	000	NUM
app01-10367	30	16	and	and	CCONJ
app01-10367	30	17	for	for	ADP
app01-10367	30	18	2.5	2.5	NUM
app01-10367	30	19	min	min	NOUN
app01-10367	30	20	on	on	ADP
app01-10367	30	21	sic	sic	ADJ
app01-10367	30	22	paper	paper	NOUN
app01-10367	30	23	grit	grit	NOUN
app01-10367	30	24	4	4	NUM
app01-10367	30	25	000	000	NUM
app01-10367	30	26	with	with	ADP
app01-10367	30	27	no	no	DET
app01-10367	30	28	lubrication	lubrication	NOUN
app01-10367	30	29	.	.	PUNCT
app01-10367	31	1	the	the	DET
app01-10367	31	2	debris	debris	NOUN
app01-10367	31	3	was	be	AUX
app01-10367	31	4	continuously	continuously	ADV
app01-10367	31	5	swept	sweep	VERB
app01-10367	31	6	away	away	ADV
app01-10367	31	7	from	from	ADP
app01-10367	31	8	the	the	DET
app01-10367	31	9	papers	paper	NOUN
app01-10367	31	10	throughout	throughout	ADP
app01-10367	31	11	the	the	DET
app01-10367	31	12	grinding	grind	VERB
app01-10367	31	13	procedure	procedure	NOUN
app01-10367	31	14	.	.	PUNCT
app01-10367	32	1	final	final	ADJ
app01-10367	32	2	polishing	polishing	NOUN
app01-10367	32	3	took	take	VERB
app01-10367	32	4	place	place	NOUN
app01-10367	32	5	on	on	ADP
app01-10367	32	6	a	a	DET
app01-10367	32	7	soft	soft	ADJ
app01-10367	32	8	cloth	cloth	NOUN
app01-10367	32	9	with	with	ADP
app01-10367	32	10	alcohol	alcohol	NOUN
app01-10367	32	11	-	-	PUNCT
app01-10367	32	12	based	base	VERB
app01-10367	32	13	diamond	diamond	NOUN
app01-10367	32	14	suspensions	suspension	NOUN
app01-10367	32	15	for	for	ADP
app01-10367	32	16	15	15	NUM
app01-10367	32	17	seconds	second	NOUN
app01-10367	32	18	with	with	ADP
app01-10367	32	19	0.25	0.25	NUM
app01-10367	32	20	µm	µm	NOUN
app01-10367	32	21	grains	grain	NOUN
app01-10367	32	22	.	.	PUNCT
app01-10367	33	1	the	the	DET
app01-10367	33	2	samples	sample	NOUN
app01-10367	33	3	were	be	AUX
app01-10367	33	4	ultrasonically	ultrasonically	ADV
app01-10367	33	5	cleaned	clean	VERB
app01-10367	33	6	in	in	ADP
app01-10367	33	7	an	an	DET
app01-10367	33	8	alcohol	alcohol	NOUN
app01-10367	33	9	bath	bath	NOUN
app01-10367	33	10	for	for	ADP
app01-10367	33	11	1	1	NUM
app01-10367	33	12	min	min	NOUN
app01-10367	33	13	after	after	ADP
app01-10367	33	14	each	each	PRON
app01-10367	33	15	polishing	polish	VERB
app01-10367	33	16	step	step	NOUN
app01-10367	33	17	[	[	X
app01-10367	33	18	2	2	NUM
app01-10367	33	19	]	]	PUNCT
app01-10367	33	20	.	.	PUNCT
app01-10367	34	1	after	after	ADP
app01-10367	34	2	the	the	DET
app01-10367	34	3	polishing	polishing	NOUN
app01-10367	34	4	,	,	PUNCT
app01-10367	34	5	three	three	NUM
app01-10367	34	6	coarse	coarse	ADJ
app01-10367	34	7	base	base	NOUN
app01-10367	34	8	-	-	PUNCT
app01-10367	34	9	defining	define	VERB
app01-10367	34	10	marks	mark	NOUN
app01-10367	34	11	were	be	AUX
app01-10367	34	12	engraved	engrave	VERB
app01-10367	34	13	in	in	ADP
app01-10367	34	14	the	the	DET
app01-10367	34	15	corners	corner	NOUN
app01-10367	34	16	of	of	ADP
app01-10367	34	17	the	the	DET
app01-10367	34	18	analyzed	analyze	VERB
app01-10367	34	19	fragment	fragment	NOUN
app01-10367	34	20	using	use	VERB
app01-10367	34	21	a	a	DET
app01-10367	34	22	diamond	diamond	NOUN
app01-10367	34	23	tip	tip	NOUN
app01-10367	34	24	.	.	PUNCT
app01-10367	35	1	88	88	NUM
app01-10367	35	2	https://doi.org/10.14311/app.2024.50.0088	https://doi.org/10.14311/app.2024.50.0088	PROPN
app01-10367	35	3	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
app01-10367	35	4	https://www.cvut.cz/en	https://www.cvut.cz/en	NOUN
app01-10367	35	5	vol	vol	NOUN
app01-10367	35	6	.	.	PUNCT
app01-10367	36	1	50/2024	50/2024	NUM
app01-10367	36	2	fib	fib	ADJ
app01-10367	36	3	procedure	procedure	NOUN
app01-10367	36	4	optimization	optimization	NOUN
app01-10367	36	5	for	for	ADP
app01-10367	36	6	cement	cement	NOUN
app01-10367	36	7	pastes	paste	NOUN
app01-10367	36	8	component	component	NOUN
app01-10367	36	9	cao	cao	PROPN
app01-10367	36	10	sio2	sio2	PROPN
app01-10367	36	11	al2o3	al2o3	PROPN
app01-10367	36	12	fe2o3	fe2o3	PROPN
app01-10367	36	13	mgo	mgo	NOUN
app01-10367	36	14	na2o	na2o	SCONJ
app01-10367	36	15	k2o	k2o	PROPN
app01-10367	36	16	so3	so3	PROPN
app01-10367	36	17	mno	mno	PROPN
app01-10367	36	18	cem	cem	PROPN
app01-10367	36	19	i	i	PRON
app01-10367	36	20	(	(	PUNCT
app01-10367	36	21	wt	wt	PROPN
app01-10367	36	22	.	.	NOUN
app01-10367	37	1	%	%	NOUN
app01-10367	37	2	)	)	PUNCT
app01-10367	38	1	63.77	63.77	NUM
app01-10367	38	2	20.51	20.51	NUM
app01-10367	38	3	4.74	4.74	NUM
app01-10367	38	4	3.30	3.30	NUM
app01-10367	38	5	1.05	1.05	NUM
app01-10367	38	6	0.15	0.15	NUM
app01-10367	38	7	0.95	0.95	NUM
app01-10367	38	8	3.07	3.07	NUM
app01-10367	38	9	0.09	0.09	NUM
app01-10367	38	10	table	table	NOUN
app01-10367	38	11	1	1	NUM
app01-10367	38	12	.	.	PUNCT
app01-10367	38	13	chemical	chemical	ADJ
app01-10367	38	14	composition	composition	NOUN
app01-10367	38	15	of	of	ADP
app01-10367	38	16	the	the	DET
app01-10367	38	17	used	used	ADJ
app01-10367	38	18	portland	portland	PROPN
app01-10367	38	19	cement	cement	NOUN
app01-10367	38	20	(	(	PUNCT
app01-10367	38	21	xrf	xrf	PROPN
app01-10367	38	22	data	datum	NOUN
app01-10367	38	23	supplied	supply	VERB
app01-10367	38	24	by	by	ADP
app01-10367	38	25	the	the	DET
app01-10367	38	26	manufacturer	manufacturer	NOUN
app01-10367	38	27	)	)	PUNCT
app01-10367	38	28	.	.	PUNCT
app01-10367	39	1	process	process	NOUN
app01-10367	39	2	step	step	NOUN
app01-10367	39	3	label	label	NOUN
app01-10367	39	4	deposition	deposition	NOUN
app01-10367	39	5	trench	trench	NOUN
app01-10367	39	6	milling	mill	VERB
app01-10367	39	7	rough	rough	ADJ
app01-10367	39	8	undercut	undercut	ADJ
app01-10367	39	9	fine	fine	ADJ
app01-10367	39	10	polishing	polish	VERB
app01-10367	39	11	shortening	shortening	NOUN
app01-10367	39	12	pattern	pattern	NOUN
app01-10367	39	13	lines	line	NOUN
app01-10367	39	14	text	text	NOUN
app01-10367	39	15	stairs	stair	NOUN
app01-10367	39	16	rectangles	rectangle	VERB
app01-10367	39	17	polishing	polish	VERB
app01-10367	39	18	rectangle	rectangle	NOUN
app01-10367	39	19	polishing	polish	VERB
app01-10367	39	20	rectangles	rectangle	NOUN
app01-10367	39	21	polishing	polish	VERB
app01-10367	39	22	rectangle	rectangle	NOUN
app01-10367	39	23	dimensions	dimension	NOUN
app01-10367	39	24	(	(	PUNCT
app01-10367	39	25	µm	µm	NOUN
app01-10367	39	26	)	)	PUNCT
app01-10367	39	27	175	175	NUM
app01-10367	39	28	×	×	NOUN
app01-10367	39	29	45	45	NUM
app01-10367	39	30	×	×	NOUN
app01-10367	39	31	0.1	0.1	NUM
app01-10367	39	32	25	25	NUM
app01-10367	39	33	×	×	NOUN
app01-10367	39	34	15	15	NUM
app01-10367	39	35	×	×	NOUN
app01-10367	39	36	15	15	NUM
app01-10367	39	37	24	24	NUM
app01-10367	39	38	×	×	NOUN
app01-10367	39	39	15	15	NUM
app01-10367	39	40	×	×	NOUN
app01-10367	39	41	15	15	NUM
app01-10367	39	42	20	20	NUM
app01-10367	39	43	×	×	NOUN
app01-10367	39	44	3	3	NUM
app01-10367	39	45	×	×	NOUN
app01-10367	39	46	10	10	NUM
app01-10367	39	47	3	3	NUM
app01-10367	39	48	×	×	NOUN
app01-10367	39	49	2	2	NUM
app01-10367	39	50	×	×	NOUN
app01-10367	39	51	10	10	NUM
app01-10367	39	52	8	8	NUM
app01-10367	39	53	×	×	NOUN
app01-10367	39	54	5	5	NUM
app01-10367	39	55	×	×	NOUN
app01-10367	39	56	10	10	NUM
app01-10367	39	57	ib	ib	NOUN
app01-10367	39	58	(	(	PUNCT
app01-10367	39	59	pa	pa	PROPN
app01-10367	39	60	)	)	PUNCT
app01-10367	39	61	∼	∼	NOUN
app01-10367	39	62	200	200	NUM
app01-10367	39	63	∼	∼	NOUN
app01-10367	39	64	1	1	NUM
app01-10367	39	65	000	000	NUM
app01-10367	39	66	∼	∼	NOUN
app01-10367	39	67	1	1	NUM
app01-10367	39	68	000	000	NUM
app01-10367	39	69	∼	∼	NOUN
app01-10367	39	70	600	600	NUM
app01-10367	39	71	∼	∼	NOUN
app01-10367	39	72	600	600	NUM
app01-10367	39	73	ts	ts	X
app01-10367	39	74	(	(	PUNCT
app01-10367	39	75	min	min	NOUN
app01-10367	39	76	)	)	PUNCT
app01-10367	39	77	∼	∼	NOUN
app01-10367	39	78	240	240	NUM
app01-10367	39	79	2×	2×	NUM
app01-10367	39	80	∼	∼	NOUN
app01-10367	39	81	120	120	NUM
app01-10367	39	82	2×	2×	NUM
app01-10367	39	83	∼	∼	NOUN
app01-10367	39	84	90	90	NUM
app01-10367	39	85	∼	∼	NOUN
app01-10367	39	86	10	10	NUM
app01-10367	39	87	θe	θe	PART
app01-10367	39	88	(	(	PUNCT
app01-10367	39	89	°	°	NOUN
app01-10367	39	90	)	)	PUNCT
app01-10367	39	91	55	55	NUM
app01-10367	39	92	55	55	NUM
app01-10367	39	93	23	23	NUM
app01-10367	39	94	23	23	NUM
app01-10367	39	95	55	55	NUM
app01-10367	39	96	/	/	SYM
app01-10367	39	97	23	23	NUM
app01-10367	39	98	θb	θb	NOUN
app01-10367	39	99	(	(	PUNCT
app01-10367	39	100	°	°	PROPN
app01-10367	39	101	)	)	PUNCT
app01-10367	39	102	0	0	NUM
app01-10367	39	103	0	0	NUM
app01-10367	39	104	32	32	NUM
app01-10367	39	105	32	32	NUM
app01-10367	39	106	0	0	NUM
app01-10367	39	107	/	/	SYM
app01-10367	39	108	32	32	NUM
app01-10367	39	109	table	table	NOUN
app01-10367	39	110	2	2	NUM
app01-10367	39	111	.	.	PUNCT
app01-10367	40	1	recommended	recommend	VERB
app01-10367	40	2	fib	fib	ADJ
app01-10367	40	3	parameters	parameter	NOUN
app01-10367	40	4	and	and	CCONJ
app01-10367	40	5	estimated	estimated	ADJ
app01-10367	40	6	process	process	NOUN
app01-10367	40	7	times	time	NOUN
app01-10367	40	8	for	for	ADP
app01-10367	40	9	different	different	ADJ
app01-10367	40	10	steps	step	NOUN
app01-10367	40	11	in	in	ADP
app01-10367	40	12	micro	micro	ADJ
app01-10367	40	13	-	-	ADJ
app01-10367	40	14	beam	beam	ADJ
app01-10367	40	15	preparation	preparation	NOUN
app01-10367	40	16	routine	routine	NOUN
app01-10367	40	17	.	.	PUNCT
app01-10367	41	1	2.3	2.3	NUM
app01-10367	41	2	.	.	PUNCT
app01-10367	41	3	imagining	imagine	VERB
app01-10367	41	4	and	and	CCONJ
app01-10367	41	5	ion	ion	NOUN
app01-10367	41	6	machining	machining	NOUN
app01-10367	41	7	polished	polished	ADJ
app01-10367	41	8	samples	sample	NOUN
app01-10367	41	9	were	be	AUX
app01-10367	41	10	glued	glue	VERB
app01-10367	41	11	to	to	ADP
app01-10367	41	12	the	the	DET
app01-10367	41	13	sem	sem	NOUN
app01-10367	41	14	stub	stub	PROPN
app01-10367	41	15	using	use	VERB
app01-10367	41	16	colloidal	colloidal	NOUN
app01-10367	41	17	silver	silver	NOUN
app01-10367	41	18	lacquer	lacquer	NOUN
app01-10367	41	19	(	(	PUNCT
app01-10367	41	20	agar	agar	NOUN
app01-10367	41	21	scientific	scientific	ADJ
app01-10367	41	22	)	)	PUNCT
app01-10367	41	23	,	,	PUNCT
app01-10367	41	24	and	and	CCONJ
app01-10367	41	25	the	the	DET
app01-10367	41	26	same	same	ADJ
app01-10367	41	27	lacquer	lacquer	NOUN
app01-10367	41	28	was	be	AUX
app01-10367	41	29	applied	apply	VERB
app01-10367	41	30	to	to	ADP
app01-10367	41	31	the	the	DET
app01-10367	41	32	sides	side	NOUN
app01-10367	41	33	of	of	ADP
app01-10367	41	34	the	the	DET
app01-10367	41	35	samples	sample	NOUN
app01-10367	41	36	to	to	PART
app01-10367	41	37	reduce	reduce	VERB
app01-10367	41	38	charging	charge	VERB
app01-10367	41	39	.	.	PUNCT
app01-10367	42	1	the	the	DET
app01-10367	42	2	location	location	NOUN
app01-10367	42	3	of	of	ADP
app01-10367	42	4	the	the	DET
app01-10367	42	5	four	four	NUM
app01-10367	42	6	main	main	ADJ
app01-10367	42	7	hydration	hydration	NOUN
app01-10367	42	8	phases	phase	NOUN
app01-10367	42	9	(	(	PUNCT
app01-10367	42	10	op	op	NOUN
app01-10367	42	11	,	,	PUNCT
app01-10367	42	12	ip	ip	PROPN
app01-10367	42	13	,	,	PUNCT
app01-10367	42	14	ch	ch	NOUN
app01-10367	42	15	,	,	PUNCT
app01-10367	42	16	and	and	CCONJ
app01-10367	42	17	c	c	X
app01-10367	42	18	)	)	PUNCT
app01-10367	42	19	with	with	ADP
app01-10367	42	20	large	large	ADJ
app01-10367	42	21	enough	enough	ADJ
app01-10367	42	22	dimensions	dimension	NOUN
app01-10367	42	23	suitable	suitable	ADJ
app01-10367	42	24	for	for	ADP
app01-10367	42	25	micro	micro	ADJ
app01-10367	42	26	-	-	ADJ
app01-10367	42	27	beam	beam	ADJ
app01-10367	42	28	fabrication	fabrication	NOUN
app01-10367	42	29	were	be	AUX
app01-10367	42	30	identified	identify	VERB
app01-10367	42	31	using	use	VERB
app01-10367	42	32	a	a	DET
app01-10367	42	33	scanning	scanning	NOUN
app01-10367	42	34	electron	electron	NOUN
app01-10367	42	35	microscope	microscope	NOUN
app01-10367	42	36	(	(	PUNCT
app01-10367	42	37	sem	sem	NOUN
app01-10367	42	38	)	)	PUNCT
app01-10367	42	39	phenom	phenom	NOUN
app01-10367	42	40	xl	xl	PROPN
app01-10367	42	41	desktop	desktop	NOUN
app01-10367	42	42	sem	sem	PROPN
app01-10367	42	43	and	and	CCONJ
app01-10367	42	44	back	back	ADJ
app01-10367	42	45	-	-	PUNCT
app01-10367	42	46	scatter	scatter	NOUN
app01-10367	42	47	electron	electron	NOUN
app01-10367	42	48	(	(	PUNCT
app01-10367	42	49	bse	bse	NOUN
app01-10367	42	50	)	)	PUNCT
app01-10367	42	51	detector	detector	NOUN
app01-10367	42	52	.	.	PUNCT
app01-10367	43	1	also	also	ADV
app01-10367	43	2	,	,	PUNCT
app01-10367	43	3	the	the	DET
app01-10367	43	4	coordinates	coordinate	NOUN
app01-10367	43	5	of	of	ADP
app01-10367	43	6	locations	location	NOUN
app01-10367	43	7	and	and	CCONJ
app01-10367	43	8	basedefining	basedefining	NOUN
app01-10367	43	9	marks	mark	NOUN
app01-10367	43	10	were	be	AUX
app01-10367	43	11	recorded	record	VERB
app01-10367	43	12	for	for	ADP
app01-10367	43	13	further	further	ADJ
app01-10367	43	14	aid	aid	NOUN
app01-10367	43	15	.	.	PUNCT
app01-10367	44	1	the	the	DET
app01-10367	44	2	micro	micro	NOUN
app01-10367	44	3	-	-	NOUN
app01-10367	44	4	beams	beam	NOUN
app01-10367	44	5	and	and	CCONJ
app01-10367	44	6	labels	label	NOUN
app01-10367	44	7	for	for	ADP
app01-10367	44	8	nanoindentation	nanoindentation	NOUN
app01-10367	44	9	tests	test	NOUN
app01-10367	44	10	were	be	AUX
app01-10367	44	11	prepared	prepare	VERB
app01-10367	44	12	using	use	VERB
app01-10367	44	13	a	a	DET
app01-10367	44	14	dual	dual	ADJ
app01-10367	44	15	-	-	PUNCT
app01-10367	44	16	beam	beam	NOUN
app01-10367	44	17	fib	fib	ADJ
app01-10367	44	18	-	-	PUNCT
app01-10367	44	19	sem	sem	NOUN
app01-10367	44	20	tescan	tescan	PROPN
app01-10367	44	21	lyra3	lyra3	PROPN
app01-10367	44	22	gmu	gmu	PROPN
app01-10367	44	23	,	,	PUNCT
app01-10367	44	24	equipped	equip	VERB
app01-10367	44	25	with	with	ADP
app01-10367	44	26	ga+	ga+	ADJ
app01-10367	44	27	cobra	cobra	PROPN
app01-10367	44	28	fib	fib	NOUN
app01-10367	44	29	column	column	NOUN
app01-10367	44	30	tilted	tilt	VERB
app01-10367	44	31	55	55	NUM
app01-10367	44	32	°	°	NOUN
app01-10367	44	33	to	to	ADP
app01-10367	44	34	the	the	DET
app01-10367	44	35	electron	electron	NOUN
app01-10367	44	36	column	column	NOUN
app01-10367	44	37	and	and	CCONJ
app01-10367	44	38	gas	gas	NOUN
app01-10367	44	39	injection	injection	NOUN
app01-10367	44	40	system	system	NOUN
app01-10367	44	41	with	with	ADP
app01-10367	44	42	platinum	platinum	NOUN
app01-10367	44	43	,	,	PUNCT
app01-10367	44	44	tungsten	tungsten	NOUN
app01-10367	44	45	,	,	PUNCT
app01-10367	44	46	and	and	CCONJ
app01-10367	44	47	carbon	carbon	NOUN
app01-10367	44	48	precursors	precursor	NOUN
app01-10367	44	49	for	for	ADP
app01-10367	44	50	ion	ion	NOUN
app01-10367	44	51	-	-	PUNCT
app01-10367	44	52	beam	beam	NOUN
app01-10367	44	53	assisted	assist	VERB
app01-10367	44	54	deposition	deposition	NOUN
app01-10367	44	55	(	(	PUNCT
app01-10367	44	56	ibad	ibad	PROPN
app01-10367	44	57	)	)	PUNCT
app01-10367	44	58	.	.	PUNCT
app01-10367	45	1	the	the	DET
app01-10367	45	2	microscope	microscope	NOUN
app01-10367	45	3	is	be	AUX
app01-10367	45	4	equipped	equip	VERB
app01-10367	45	5	with	with	ADP
app01-10367	45	6	external	external	ADJ
app01-10367	45	7	and	and	CCONJ
app01-10367	45	8	in	in	ADP
app01-10367	45	9	-	-	PUNCT
app01-10367	45	10	beam	beam	NOUN
app01-10367	45	11	detectors	detector	NOUN
app01-10367	45	12	for	for	ADP
app01-10367	45	13	both	both	DET
app01-10367	45	14	bse	bse	NOUN
app01-10367	45	15	and	and	CCONJ
app01-10367	45	16	secondary	secondary	ADJ
app01-10367	45	17	electrons	electron	NOUN
app01-10367	45	18	(	(	PUNCT
app01-10367	45	19	se	se	ADJ
app01-10367	45	20	)	)	PUNCT
app01-10367	45	21	.	.	PUNCT
app01-10367	46	1	5	5	NUM
app01-10367	46	2	-	-	PUNCT
app01-10367	46	3	degree	degree	NOUN
app01-10367	46	4	-	-	PUNCT
app01-10367	46	5	of	of	ADP
app01-10367	46	6	-	-	PUNCT
app01-10367	46	7	freedom	freedom	NOUN
app01-10367	46	8	stage	stage	NOUN
app01-10367	46	9	allows	allow	VERB
app01-10367	46	10	sample	sample	NOUN
app01-10367	46	11	positioning	positioning	NOUN
app01-10367	46	12	with	with	ADP
app01-10367	46	13	adjustable	adjustable	ADJ
app01-10367	46	14	tilt	tilt	NOUN
app01-10367	46	15	around	around	ADP
app01-10367	46	16	axis	axis	NOUN
app01-10367	46	17	perpendicullar	perpendicullar	ADJ
app01-10367	46	18	to	to	ADP
app01-10367	46	19	both	both	CCONJ
app01-10367	46	20	electon	electon	PROPN
app01-10367	46	21	and	and	CCONJ
app01-10367	46	22	ion	ion	NOUN
app01-10367	46	23	beams	beam	NOUN
app01-10367	46	24	and	and	CCONJ
app01-10367	46	25	(	(	PUNCT
app01-10367	46	26	actual	actual	ADJ
app01-10367	46	27	)	)	PUNCT
app01-10367	46	28	rotation	rotation	NOUN
app01-10367	46	29	around	around	ADP
app01-10367	46	30	axis	axis	NOUN
app01-10367	46	31	perpendicullar	perpendicullar	ADJ
app01-10367	46	32	to	to	ADP
app01-10367	46	33	the	the	DET
app01-10367	46	34	sample	sample	NOUN
app01-10367	46	35	surface	surface	NOUN
app01-10367	46	36	.	.	PUNCT
app01-10367	47	1	the	the	DET
app01-10367	47	2	controlling	control	VERB
app01-10367	47	3	system	system	NOUN
app01-10367	47	4	allows	allow	VERB
app01-10367	47	5	software	software	NOUN
app01-10367	47	6	adjustments	adjustment	NOUN
app01-10367	47	7	of	of	ADP
app01-10367	47	8	image	image	NOUN
app01-10367	47	9	shift	shift	NOUN
app01-10367	47	10	and	and	CCONJ
app01-10367	47	11	(	(	PUNCT
app01-10367	47	12	apparent	apparent	ADJ
app01-10367	47	13	)	)	PUNCT
app01-10367	47	14	rotation	rotation	NOUN
app01-10367	47	15	.	.	PUNCT
app01-10367	48	1	the	the	DET
app01-10367	48	2	image	image	NOUN
app01-10367	48	3	is	be	AUX
app01-10367	48	4	not	not	PART
app01-10367	48	5	deformed	deform	VERB
app01-10367	48	6	by	by	ADP
app01-10367	48	7	apparent	apparent	ADJ
app01-10367	48	8	rotation	rotation	NOUN
app01-10367	48	9	only	only	ADV
app01-10367	48	10	if	if	SCONJ
app01-10367	48	11	the	the	DET
app01-10367	48	12	sample	sample	NOUN
app01-10367	48	13	is	be	AUX
app01-10367	48	14	perpedicullar	perpedicullar	VERB
app01-10367	48	15	to	to	ADP
app01-10367	48	16	the	the	DET
app01-10367	48	17	beam	beam	NOUN
app01-10367	48	18	used	use	VERB
app01-10367	48	19	.	.	PUNCT
app01-10367	49	1	at	at	ADP
app01-10367	49	2	first	first	ADV
app01-10367	49	3	,	,	PUNCT
app01-10367	49	4	the	the	DET
app01-10367	49	5	coarse	coarse	ADJ
app01-10367	49	6	base	base	NOUN
app01-10367	49	7	-	-	PUNCT
app01-10367	49	8	defining	define	VERB
app01-10367	49	9	marks	mark	NOUN
app01-10367	49	10	were	be	AUX
app01-10367	49	11	made	make	VERB
app01-10367	49	12	with	with	ADP
app01-10367	49	13	two	two	NUM
app01-10367	49	14	platinum	platinum	NOUN
app01-10367	49	15	alignment	alignment	NOUN
app01-10367	49	16	tags	tag	NOUN
app01-10367	49	17	:	:	PUNCT
app01-10367	49	18	one	one	NUM
app01-10367	49	19	located	locate	VERB
app01-10367	49	20	inside	inside	ADP
app01-10367	49	21	the	the	DET
app01-10367	49	22	scratch	scratch	NOUN
app01-10367	49	23	mark	mark	NOUN
app01-10367	49	24	,	,	PUNCT
app01-10367	49	25	labeled	label	VERB
app01-10367	49	26	as	as	ADP
app01-10367	49	27	coarse	coarse	ADJ
app01-10367	49	28	,	,	PUNCT
app01-10367	49	29	and	and	CCONJ
app01-10367	49	30	one	one	NUM
app01-10367	49	31	on	on	ADP
app01-10367	49	32	the	the	DET
app01-10367	49	33	polished	polished	ADJ
app01-10367	49	34	surface	surface	NOUN
app01-10367	49	35	,	,	PUNCT
app01-10367	49	36	labeled	label	VERB
app01-10367	49	37	as	as	ADP
app01-10367	49	38	fine	fine	ADJ
app01-10367	49	39	.	.	PUNCT
app01-10367	50	1	this	this	DET
app01-10367	50	2	set	set	NOUN
app01-10367	50	3	of	of	ADP
app01-10367	50	4	three	three	NUM
app01-10367	50	5	base	base	NOUN
app01-10367	50	6	-	-	PUNCT
app01-10367	50	7	defining	define	VERB
app01-10367	50	8	marks	mark	NOUN
app01-10367	50	9	allows	allow	VERB
app01-10367	50	10	easier	easy	ADJ
app01-10367	50	11	beam	beam	NOUN
app01-10367	50	12	positioning	positioning	NOUN
app01-10367	50	13	using	use	VERB
app01-10367	50	14	microscopes	microscope	NOUN
app01-10367	50	15	ranging	range	VERB
app01-10367	50	16	from	from	ADP
app01-10367	50	17	optical	optical	ADJ
app01-10367	50	18	microscopes	microscope	NOUN
app01-10367	50	19	to	to	ADP
app01-10367	50	20	sems	sem	NOUN
app01-10367	50	21	.	.	PUNCT
app01-10367	51	1	(	(	PUNCT
app01-10367	51	2	a	a	X
app01-10367	51	3	)	)	PUNCT
app01-10367	51	4	se	se	X
app01-10367	51	5	(	(	PUNCT
app01-10367	51	6	b	b	X
app01-10367	51	7	)	)	PUNCT
app01-10367	51	8	bse	bse	NOUN
app01-10367	51	9	figure	figure	NOUN
app01-10367	51	10	1	1	NUM
app01-10367	51	11	.	.	PUNCT
app01-10367	51	12	sem	sem	ADJ
app01-10367	51	13	images	image	NOUN
app01-10367	51	14	of	of	ADP
app01-10367	51	15	the	the	DET
app01-10367	51	16	label	label	NOUN
app01-10367	51	17	,	,	PUNCT
app01-10367	51	18	alignment	alignment	NOUN
app01-10367	51	19	tags	tag	NOUN
app01-10367	51	20	,	,	PUNCT
app01-10367	51	21	and	and	CCONJ
app01-10367	51	22	outline	outline	VERB
app01-10367	51	23	for	for	ADP
app01-10367	51	24	the	the	DET
app01-10367	51	25	beam	beam	NOUN
app01-10367	51	26	in	in	ADP
app01-10367	51	27	residual	residual	ADJ
app01-10367	51	28	clinker	clinker	NOUN
app01-10367	51	29	using	use	VERB
app01-10367	51	30	(	(	PUNCT
app01-10367	51	31	a	a	PRON
app01-10367	51	32	)	)	PUNCT
app01-10367	51	33	se	se	X
app01-10367	52	1	and	and	CCONJ
app01-10367	52	2	(	(	PUNCT
app01-10367	52	3	b	b	NOUN
app01-10367	52	4	)	)	PUNCT
app01-10367	52	5	bse	bse	NOUN
app01-10367	52	6	detectors	detector	NOUN
app01-10367	52	7	.	.	PUNCT
app01-10367	53	1	2.4	2.4	NUM
app01-10367	53	2	.	.	PUNCT
app01-10367	53	3	micro	micro	NOUN
app01-10367	53	4	-	-	NOUN
app01-10367	53	5	beams	beam	NOUN
app01-10367	53	6	after	after	ADP
app01-10367	53	7	the	the	DET
app01-10367	53	8	marking	marking	NOUN
app01-10367	53	9	,	,	PUNCT
app01-10367	53	10	the	the	DET
app01-10367	53	11	regions	region	NOUN
app01-10367	53	12	of	of	ADP
app01-10367	53	13	interest	interest	NOUN
app01-10367	53	14	were	be	AUX
app01-10367	53	15	identified	identify	VERB
app01-10367	53	16	and	and	CCONJ
app01-10367	53	17	labeled	label	VERB
app01-10367	53	18	using	use	VERB
app01-10367	53	19	platinum	platinum	NOUN
app01-10367	53	20	ibad	ibad	PROPN
app01-10367	53	21	.	.	PUNCT
app01-10367	54	1	additional	additional	ADJ
app01-10367	54	2	beam	beam	NOUN
app01-10367	54	3	outlines	outline	NOUN
app01-10367	54	4	and	and	CCONJ
app01-10367	54	5	alignment	alignment	ADJ
app01-10367	54	6	tags	tag	NOUN
app01-10367	54	7	were	be	AUX
app01-10367	54	8	added	add	VERB
app01-10367	54	9	for	for	ADP
app01-10367	54	10	easier	easy	ADJ
app01-10367	54	11	and	and	CCONJ
app01-10367	54	12	more	more	ADV
app01-10367	54	13	precise	precise	ADJ
app01-10367	54	14	ion	ion	NOUN
app01-10367	54	15	milling	milling	NOUN
app01-10367	54	16	routines	routine	NOUN
app01-10367	54	17	,	,	PUNCT
app01-10367	54	18	see	see	VERB
app01-10367	54	19	figure	figure	NOUN
app01-10367	54	20	1	1	NUM
app01-10367	54	21	.	.	PUNCT
app01-10367	55	1	the	the	DET
app01-10367	55	2	positioning	positioning	NOUN
app01-10367	55	3	and	and	CCONJ
app01-10367	55	4	orientation	orientation	NOUN
app01-10367	55	5	of	of	ADP
app01-10367	55	6	a	a	DET
app01-10367	55	7	cantilever	cantilever	NOUN
app01-10367	55	8	must	must	AUX
app01-10367	55	9	allow	allow	VERB
app01-10367	55	10	enough	enough	ADJ
app01-10367	55	11	room	room	NOUN
app01-10367	55	12	for	for	ADP
app01-10367	55	13	nanoindentation	nanoindentation	NOUN
app01-10367	55	14	measurement	measurement	NOUN
app01-10367	55	15	of	of	ADP
app01-10367	55	16	the	the	DET
app01-10367	55	17	selected	select	VERB
app01-10367	55	18	phase	phase	NOUN
app01-10367	55	19	in	in	ADP
app01-10367	55	20	the	the	DET
app01-10367	55	21	proximity	proximity	NOUN
app01-10367	55	22	of	of	ADP
app01-10367	55	23	the	the	DET
app01-10367	55	24	cantilever	cantilever	NOUN
app01-10367	55	25	root	root	NOUN
app01-10367	55	26	.	.	PUNCT
app01-10367	56	1	the	the	DET
app01-10367	56	2	root	root	NOUN
app01-10367	56	3	shall	shall	AUX
app01-10367	56	4	be	be	AUX
app01-10367	56	5	as	as	ADV
app01-10367	56	6	far	far	ADV
app01-10367	56	7	as	as	ADP
app01-10367	56	8	possible	possible	ADJ
app01-10367	56	9	from	from	ADP
app01-10367	56	10	phase	phase	NOUN
app01-10367	56	11	interfaces	interface	NOUN
app01-10367	56	12	too	too	ADV
app01-10367	56	13	.	.	PUNCT
app01-10367	57	1	the	the	DET
app01-10367	57	2	desired	desire	VERB
app01-10367	57	3	dimensions	dimension	NOUN
app01-10367	57	4	of	of	ADP
app01-10367	57	5	the	the	DET
app01-10367	57	6	final	final	ADJ
app01-10367	57	7	equilateral	equilateral	ADJ
app01-10367	57	8	triangular	triangular	NOUN
app01-10367	57	9	cantilever	cantilever	NOUN
app01-10367	57	10	for	for	ADP
app01-10367	57	11	testing	testing	NOUN
app01-10367	57	12	are	be	AUX
app01-10367	57	13	20	20	NUM
app01-10367	57	14	×	×	NOUN
app01-10367	57	15	8	8	NUM
app01-10367	57	16	µm	µm	NOUN
app01-10367	57	17	.	.	PUNCT
app01-10367	58	1	the	the	DET
app01-10367	58	2	process	process	NOUN
app01-10367	58	3	of	of	ADP
app01-10367	58	4	cantilever	cantilever	NOUN
app01-10367	58	5	preparation	preparation	NOUN
app01-10367	58	6	is	be	AUX
app01-10367	58	7	divided	divide	VERB
app01-10367	58	8	in	in	ADP
app01-10367	58	9	four	four	NUM
app01-10367	58	10	steps	step	NOUN
app01-10367	58	11	:	:	PUNCT
app01-10367	58	12	high	high	ADJ
app01-10367	58	13	-	-	PUNCT
app01-10367	58	14	current	current	ADJ
app01-10367	58	15	trench	trench	NOUN
app01-10367	58	16	milling	milling	NOUN
app01-10367	58	17	,	,	PUNCT
app01-10367	58	18	high	high	ADJ
app01-10367	58	19	-	-	PUNCT
app01-10367	58	20	current	current	ADJ
app01-10367	58	21	rough	rough	ADJ
app01-10367	58	22	cantilever	cantilever	NOUN
app01-10367	58	23	undercut	undercut	ADJ
app01-10367	58	24	,	,	PUNCT
app01-10367	58	25	low	low	ADJ
app01-10367	58	26	-	-	PUNCT
app01-10367	58	27	current	current	ADJ
app01-10367	58	28	cantilever	cantilever	NOUN
app01-10367	58	29	sidewall	sidewall	NOUN
app01-10367	58	30	and	and	CCONJ
app01-10367	58	31	cantilever	cantilever	VERB
app01-10367	58	32	base	base	NOUN
app01-10367	58	33	polishing	polishing	NOUN
app01-10367	58	34	,	,	PUNCT
app01-10367	58	35	and	and	CCONJ
app01-10367	58	36	low	low	ADJ
app01-10367	58	37	-	-	PUNCT
app01-10367	58	38	current	current	ADJ
app01-10367	58	39	cantilever	cantilever	NOUN
app01-10367	58	40	shortening	shortening	NOUN
app01-10367	58	41	.	.	PUNCT
app01-10367	59	1	recommended	recommend	VERB
app01-10367	59	2	parameters	parameter	NOUN
app01-10367	59	3	and	and	CCONJ
app01-10367	59	4	estimated	estimate	VERB
app01-10367	59	5	process	process	NOUN
app01-10367	59	6	times	time	NOUN
app01-10367	59	7	are	be	AUX
app01-10367	59	8	listed	list	VERB
app01-10367	59	9	in	in	ADP
app01-10367	59	10	table	table	NOUN
app01-10367	59	11	2	2	NUM
app01-10367	59	12	.	.	SYM
app01-10367	59	13	89	89	NUM
app01-10367	59	14	j.	j.	PROPN
app01-10367	59	15	procházka	procházka	PROPN
app01-10367	59	16	,	,	PUNCT
app01-10367	59	17	j.	j.	PROPN
app01-10367	59	18	němeček	němeček	PROPN
app01-10367	59	19	,	,	PUNCT
app01-10367	59	20	p.	p.	PROPN
app01-10367	59	21	halodová	halodová	PROPN
app01-10367	59	22	,	,	PUNCT
app01-10367	59	23	j.	j.	PROPN
app01-10367	59	24	němeček	němeček	PROPN
app01-10367	59	25	acta	acta	PROPN
app01-10367	59	26	polytechnica	polytechnica	PROPN
app01-10367	59	27	ctu	ctu	NOUN
app01-10367	59	28	proceedings	proceeding	NOUN
app01-10367	59	29	(	(	PUNCT
app01-10367	59	30	a	a	X
app01-10367	59	31	)	)	PUNCT
app01-10367	59	32	se	se	ADJ
app01-10367	59	33	,	,	PUNCT
app01-10367	59	34	perpendicular	perpendicular	ADJ
app01-10367	59	35	to	to	ADP
app01-10367	59	36	the	the	DET
app01-10367	59	37	electron	electron	NOUN
app01-10367	59	38	beam	beam	NOUN
app01-10367	59	39	.	.	PUNCT
app01-10367	60	1	(	(	PUNCT
app01-10367	60	2	b	b	X
app01-10367	60	3	)	)	PUNCT
app01-10367	60	4	bse	bse	NOUN
app01-10367	60	5	,	,	PUNCT
app01-10367	60	6	perpendicular	perpendicular	NOUN
app01-10367	60	7	to	to	ADP
app01-10367	60	8	the	the	DET
app01-10367	60	9	electron	electron	NOUN
app01-10367	60	10	beam	beam	NOUN
app01-10367	60	11	.	.	PUNCT
app01-10367	61	1	(	(	PUNCT
app01-10367	61	2	c	c	X
app01-10367	61	3	)	)	PUNCT
app01-10367	61	4	in	in	ADP
app01-10367	61	5	-	-	PUNCT
app01-10367	61	6	beam	beam	NOUN
app01-10367	61	7	bse	bse	NOUN
app01-10367	61	8	,	,	PUNCT
app01-10367	61	9	perpendicullar	perpendicullar	ADJ
app01-10367	61	10	to	to	ADP
app01-10367	61	11	the	the	DET
app01-10367	61	12	electron	electron	NOUN
app01-10367	61	13	beam	beam	NOUN
app01-10367	61	14	.	.	PUNCT
app01-10367	62	1	(	(	PUNCT
app01-10367	62	2	d	d	X
app01-10367	62	3	)	)	PUNCT
app01-10367	62	4	se	se	ADJ
app01-10367	62	5	,	,	PUNCT
app01-10367	62	6	perpendicular	perpendicular	ADJ
app01-10367	62	7	to	to	ADP
app01-10367	62	8	the	the	DET
app01-10367	62	9	ion	ion	NOUN
app01-10367	62	10	beam	beam	NOUN
app01-10367	62	11	.	.	PUNCT
app01-10367	63	1	(	(	PUNCT
app01-10367	63	2	e	e	NOUN
app01-10367	63	3	)	)	PUNCT
app01-10367	63	4	in	in	ADP
app01-10367	63	5	-	-	PUNCT
app01-10367	63	6	beam	beam	NOUN
app01-10367	63	7	bse	bse	NOUN
app01-10367	63	8	,	,	PUNCT
app01-10367	63	9	perpendicular	perpendicular	ADJ
app01-10367	63	10	to	to	ADP
app01-10367	63	11	the	the	DET
app01-10367	63	12	ion	ion	NOUN
app01-10367	63	13	beam	beam	NOUN
app01-10367	63	14	.	.	PUNCT
app01-10367	64	1	figure	figure	NOUN
app01-10367	64	2	2	2	NUM
app01-10367	64	3	.	.	PUNCT
app01-10367	64	4	comparison	comparison	NOUN
app01-10367	64	5	of	of	ADP
app01-10367	64	6	sem	sem	NOUN
app01-10367	64	7	images	image	NOUN
app01-10367	64	8	of	of	ADP
app01-10367	64	9	residual	residual	ADJ
app01-10367	64	10	clinker	clinker	NOUN
app01-10367	64	11	grain	grain	NOUN
app01-10367	64	12	with	with	ADP
app01-10367	64	13	the	the	DET
app01-10367	64	14	sample	sample	NOUN
app01-10367	64	15	surface	surface	NOUN
app01-10367	64	16	(	(	PUNCT
app01-10367	64	17	a	a	DET
app01-10367	64	18	–	–	PUNCT
app01-10367	64	19	c	c	NOUN
app01-10367	64	20	)	)	PUNCT
app01-10367	64	21	perpendicular	perpendicular	NOUN
app01-10367	64	22	to	to	ADP
app01-10367	64	23	electon	electon	PROPN
app01-10367	64	24	beam	beam	PROPN
app01-10367	64	25	and	and	CCONJ
app01-10367	64	26	tilted	tilt	VERB
app01-10367	64	27	to	to	ADP
app01-10367	64	28	the	the	DET
app01-10367	64	29	ion	ion	NOUN
app01-10367	64	30	beam	beam	NOUN
app01-10367	64	31	,	,	PUNCT
app01-10367	64	32	and	and	CCONJ
app01-10367	64	33	(	(	PUNCT
app01-10367	64	34	d	d	NOUN
app01-10367	64	35	–	–	PUNCT
app01-10367	64	36	e	e	NOUN
app01-10367	64	37	)	)	PUNCT
app01-10367	64	38	tilted	tilt	VERB
app01-10367	64	39	to	to	ADP
app01-10367	64	40	the	the	DET
app01-10367	64	41	electron	electron	NOUN
app01-10367	64	42	beam	beam	NOUN
app01-10367	64	43	and	and	CCONJ
app01-10367	64	44	perpendicular	perpendicular	ADJ
app01-10367	64	45	to	to	ADP
app01-10367	64	46	the	the	DET
app01-10367	64	47	ion	ion	NOUN
app01-10367	64	48	beam	beam	NOUN
app01-10367	64	49	,	,	PUNCT
app01-10367	64	50	using	use	VERB
app01-10367	64	51	different	different	ADJ
app01-10367	64	52	detectors	detector	NOUN
app01-10367	64	53	(	(	PUNCT
app01-10367	64	54	a	a	X
app01-10367	64	55	)	)	PUNCT
app01-10367	64	56	se	se	X
app01-10367	64	57	,	,	PUNCT
app01-10367	64	58	(	(	PUNCT
app01-10367	64	59	b	b	NOUN
app01-10367	64	60	)	)	PUNCT
app01-10367	64	61	in	in	ADP
app01-10367	64	62	-	-	PUNCT
app01-10367	64	63	beam	beam	NOUN
app01-10367	64	64	bse	bse	NOUN
app01-10367	64	65	.	.	PUNCT
app01-10367	65	1	3	3	X
app01-10367	65	2	.	.	NOUN
app01-10367	65	3	results	result	NOUN
app01-10367	65	4	and	and	CCONJ
app01-10367	65	5	discussion	discussion	NOUN
app01-10367	65	6	3.1	3.1	NUM
app01-10367	65	7	.	.	PUNCT
app01-10367	66	1	imaging	imaging	NOUN
app01-10367	66	2	issues	issue	NOUN
app01-10367	66	3	as	as	SCONJ
app01-10367	66	4	the	the	DET
app01-10367	66	5	cement	cement	NOUN
app01-10367	66	6	paste	paste	NOUN
app01-10367	66	7	is	be	AUX
app01-10367	66	8	poorly	poorly	ADV
app01-10367	66	9	conductive	conductive	ADJ
app01-10367	66	10	in	in	ADP
app01-10367	66	11	a	a	DET
app01-10367	66	12	vacuum	vacuum	NOUN
app01-10367	66	13	chamber	chamber	NOUN
app01-10367	66	14	,	,	PUNCT
app01-10367	66	15	surface	surface	NOUN
app01-10367	66	16	charging	charging	NOUN
app01-10367	66	17	is	be	AUX
app01-10367	66	18	an	an	DET
app01-10367	66	19	issue	issue	NOUN
app01-10367	66	20	for	for	ADP
app01-10367	66	21	sem	sem	ADJ
app01-10367	66	22	imaging	imaging	NOUN
app01-10367	66	23	using	use	VERB
app01-10367	66	24	se	se	PROPN
app01-10367	66	25	because	because	SCONJ
app01-10367	66	26	the	the	DET
app01-10367	66	27	charged	charge	VERB
app01-10367	66	28	surface	surface	NOUN
app01-10367	66	29	has	have	VERB
app01-10367	66	30	a	a	DET
app01-10367	66	31	higher	high	ADJ
app01-10367	66	32	secondary	secondary	ADJ
app01-10367	66	33	electron	electron	NOUN
app01-10367	66	34	emission	emission	NOUN
app01-10367	66	35	rate	rate	NOUN
app01-10367	66	36	as	as	SCONJ
app01-10367	66	37	shown	show	VERB
app01-10367	66	38	in	in	ADP
app01-10367	66	39	figures	figure	NOUN
app01-10367	66	40	2(a	2(a	NUM
app01-10367	66	41	)	)	PUNCT
app01-10367	66	42	and	and	CCONJ
app01-10367	66	43	2(d	2(d	NUM
app01-10367	66	44	)	)	PUNCT
app01-10367	66	45	due	due	ADP
app01-10367	66	46	to	to	ADP
app01-10367	66	47	the	the	DET
app01-10367	66	48	negative	negative	ADJ
app01-10367	66	49	charge	charge	NOUN
app01-10367	66	50	build	build	NOUN
app01-10367	66	51	-	-	PUNCT
app01-10367	66	52	up	up	NOUN
app01-10367	66	53	on	on	ADP
app01-10367	66	54	the	the	DET
app01-10367	66	55	scanned	scan	VERB
app01-10367	66	56	surface	surface	NOUN
app01-10367	66	57	.	.	PUNCT
app01-10367	67	1	bse	bse	PROPN
app01-10367	67	2	imaging	imaging	NOUN
app01-10367	67	3	is	be	AUX
app01-10367	67	4	less	less	ADV
app01-10367	67	5	affected	affect	VERB
app01-10367	67	6	by	by	ADP
app01-10367	67	7	immediate	immediate	ADJ
app01-10367	67	8	surface	surface	NOUN
app01-10367	67	9	charge	charge	NOUN
app01-10367	67	10	,	,	PUNCT
app01-10367	67	11	see	see	VERB
app01-10367	67	12	figure	figure	NOUN
app01-10367	67	13	2(b	2(b	NUM
app01-10367	67	14	)	)	PUNCT
app01-10367	67	15	,	,	PUNCT
app01-10367	67	16	because	because	SCONJ
app01-10367	67	17	the	the	DET
app01-10367	67	18	detector	detector	NOUN
app01-10367	67	19	collects	collect	VERB
app01-10367	67	20	the	the	DET
app01-10367	67	21	signal	signal	NOUN
app01-10367	67	22	from	from	ADP
app01-10367	67	23	electrons	electron	NOUN
app01-10367	67	24	interacting	interact	VERB
app01-10367	67	25	elastically	elastically	ADV
app01-10367	67	26	with	with	ADP
app01-10367	67	27	the	the	DET
app01-10367	67	28	sample	sample	NOUN
app01-10367	67	29	surface	surface	NOUN
app01-10367	67	30	.	.	PUNCT
app01-10367	68	1	due	due	ADP
app01-10367	68	2	to	to	ADP
app01-10367	68	3	their	their	PRON
app01-10367	68	4	higher	high	ADJ
app01-10367	68	5	energy	energy	NOUN
app01-10367	68	6	,	,	PUNCT
app01-10367	68	7	bses	bse	NOUN
app01-10367	68	8	are	be	AUX
app01-10367	68	9	less	less	ADV
app01-10367	68	10	susceptible	susceptible	ADJ
app01-10367	68	11	to	to	ADP
app01-10367	68	12	deflection	deflection	NOUN
app01-10367	68	13	by	by	ADP
app01-10367	68	14	the	the	DET
app01-10367	68	15	electric	electric	ADJ
app01-10367	68	16	fields	field	NOUN
app01-10367	68	17	caused	cause	VERB
app01-10367	68	18	by	by	ADP
app01-10367	68	19	surface	surface	NOUN
app01-10367	68	20	charging	charging	NOUN
app01-10367	68	21	.	.	PUNCT
app01-10367	69	1	in	in	ADP
app01-10367	69	2	-	-	PUNCT
app01-10367	69	3	chamber	chamber	NOUN
app01-10367	69	4	bse	bse	NOUN
app01-10367	69	5	detectors	detector	NOUN
app01-10367	69	6	have	have	VERB
app01-10367	69	7	better	well	ADJ
app01-10367	69	8	signal	signal	VERB
app01-10367	69	9	than	than	ADP
app01-10367	69	10	their	their	PRON
app01-10367	69	11	in	in	ADP
app01-10367	69	12	-	-	PUNCT
app01-10367	69	13	beam	beam	NOUN
app01-10367	69	14	(	(	PUNCT
app01-10367	69	15	ib	ib	NOUN
app01-10367	69	16	)	)	PUNCT
app01-10367	69	17	counterparts	counterpart	NOUN
app01-10367	69	18	that	that	PRON
app01-10367	69	19	are	be	AUX
app01-10367	69	20	located	locate	VERB
app01-10367	69	21	inside	inside	ADP
app01-10367	69	22	the	the	DET
app01-10367	69	23	sem	sem	PROPN
app01-10367	69	24	column	column	NOUN
app01-10367	69	25	,	,	PUNCT
app01-10367	69	26	see	see	VERB
app01-10367	69	27	figures	figure	NOUN
app01-10367	69	28	2(b	2(b	NUM
app01-10367	69	29	)	)	PUNCT
app01-10367	69	30	and	and	CCONJ
app01-10367	69	31	2(c	2(c	NUM
app01-10367	69	32	)	)	PUNCT
app01-10367	69	33	.	.	PUNCT
app01-10367	70	1	on	on	ADP
app01-10367	70	2	the	the	DET
app01-10367	70	3	other	other	ADJ
app01-10367	70	4	hand	hand	NOUN
app01-10367	70	5	,	,	PUNCT
app01-10367	70	6	in	in	ADP
app01-10367	70	7	-	-	PUNCT
app01-10367	70	8	chamber	chamber	NOUN
app01-10367	70	9	detectors	detector	NOUN
app01-10367	70	10	are	be	AUX
app01-10367	70	11	prone	prone	ADJ
app01-10367	70	12	to	to	ADP
app01-10367	70	13	mechanical	mechanical	ADJ
app01-10367	70	14	damage	damage	NOUN
app01-10367	70	15	and	and	CCONJ
app01-10367	70	16	can	can	AUX
app01-10367	70	17	not	not	PART
app01-10367	70	18	be	be	AUX
app01-10367	70	19	used	use	VERB
app01-10367	70	20	with	with	ADP
app01-10367	70	21	tilted	tilt	VERB
app01-10367	70	22	specimens	specimen	NOUN
app01-10367	70	23	during	during	ADP
app01-10367	70	24	ion	ion	NOUN
app01-10367	70	25	fabrication	fabrication	NOUN
app01-10367	70	26	.	.	PUNCT
app01-10367	71	1	in	in	ADP
app01-10367	71	2	cases	case	NOUN
app01-10367	71	3	where	where	SCONJ
app01-10367	71	4	the	the	DET
app01-10367	71	5	sample	sample	NOUN
app01-10367	71	6	was	be	AUX
app01-10367	71	7	tilted	tilt	VERB
app01-10367	71	8	for	for	ADP
app01-10367	71	9	fib	fib	NOUN
app01-10367	71	10	processes	process	NOUN
app01-10367	71	11	or	or	CCONJ
app01-10367	71	12	cross	cross	ADJ
app01-10367	71	13	-	-	ADJ
app01-10367	71	14	section	section	ADJ
app01-10367	71	15	documentation	documentation	NOUN
app01-10367	71	16	,	,	PUNCT
app01-10367	71	17	a	a	DET
app01-10367	71	18	combination	combination	NOUN
app01-10367	71	19	of	of	ADP
app01-10367	71	20	the	the	DET
app01-10367	71	21	se	se	PROPN
app01-10367	71	22	detector	detector	NOUN
app01-10367	71	23	,	,	PUNCT
app01-10367	71	24	primarily	primarily	ADV
app01-10367	71	25	for	for	ADP
app01-10367	71	26	focusing	focus	VERB
app01-10367	71	27	,	,	PUNCT
app01-10367	71	28	and	and	CCONJ
app01-10367	71	29	the	the	DET
app01-10367	71	30	in	in	ADP
app01-10367	71	31	-	-	PUNCT
app01-10367	71	32	beam	beam	NOUN
app01-10367	71	33	bse	bse	NOUN
app01-10367	71	34	detector	detector	NOUN
app01-10367	71	35	,	,	PUNCT
app01-10367	71	36	providing	provide	VERB
app01-10367	71	37	phase	phase	NOUN
app01-10367	71	38	and	and	CCONJ
app01-10367	71	39	chemical	chemical	NOUN
app01-10367	71	40	contrast	contrast	NOUN
app01-10367	71	41	,	,	PUNCT
app01-10367	71	42	was	be	AUX
app01-10367	71	43	used	use	VERB
app01-10367	71	44	.	.	PUNCT
app01-10367	72	1	otherwise	otherwise	ADV
app01-10367	72	2	,	,	PUNCT
app01-10367	72	3	the	the	DET
app01-10367	72	4	in	in	ADP
app01-10367	72	5	-	-	PUNCT
app01-10367	72	6	chamber	chamber	NOUN
app01-10367	72	7	bse	bse	NOUN
app01-10367	72	8	detector	detector	NOUN
app01-10367	72	9	was	be	AUX
app01-10367	72	10	used	use	VERB
app01-10367	72	11	.	.	PUNCT
app01-10367	73	1	3.2	3.2	NUM
app01-10367	73	2	.	.	PUNCT
app01-10367	73	3	effect	effect	NOUN
app01-10367	73	4	of	of	ADP
app01-10367	73	5	primary	primary	ADJ
app01-10367	73	6	electron	electron	NOUN
app01-10367	73	7	beam	beam	NOUN
app01-10367	73	8	continual	continual	ADJ
app01-10367	73	9	sem	sem	NOUN
app01-10367	73	10	scanning	scanning	NOUN
app01-10367	73	11	loads	load	VERB
app01-10367	73	12	the	the	DET
app01-10367	73	13	entire	entire	ADJ
app01-10367	73	14	surface	surface	NOUN
app01-10367	73	15	of	of	ADP
app01-10367	73	16	the	the	DET
app01-10367	73	17	sample	sample	NOUN
app01-10367	73	18	in	in	ADP
app01-10367	73	19	the	the	DET
app01-10367	73	20	view	view	NOUN
app01-10367	73	21	field	field	NOUN
app01-10367	73	22	.	.	PUNCT
app01-10367	74	1	in	in	ADP
app01-10367	74	2	the	the	DET
app01-10367	74	3	case	case	NOUN
app01-10367	74	4	of	of	ADP
app01-10367	74	5	a	a	DET
app01-10367	74	6	cementitious	cementitious	ADJ
app01-10367	74	7	sample	sample	NOUN
app01-10367	74	8	,	,	PUNCT
app01-10367	74	9	the	the	DET
app01-10367	74	10	energy	energy	NOUN
app01-10367	74	11	deposited	deposit	VERB
app01-10367	74	12	by	by	ADP
app01-10367	74	13	the	the	DET
app01-10367	74	14	incident	incident	NOUN
app01-10367	74	15	electron	electron	NOUN
app01-10367	74	16	beam	beam	NOUN
app01-10367	74	17	on	on	ADP
app01-10367	74	18	the	the	DET
app01-10367	74	19	surface	surface	NOUN
app01-10367	74	20	can	can	AUX
app01-10367	74	21	not	not	PART
app01-10367	74	22	dissipate	dissipate	VERB
app01-10367	74	23	through	through	ADP
app01-10367	74	24	the	the	DET
app01-10367	74	25	material	material	NOUN
app01-10367	74	26	,	,	PUNCT
app01-10367	74	27	leading	lead	VERB
app01-10367	74	28	to	to	ADP
app01-10367	74	29	energy	energy	NOUN
app01-10367	74	30	absorption	absorption	NOUN
app01-10367	74	31	and	and	CCONJ
app01-10367	74	32	subsequent	subsequent	ADJ
app01-10367	74	33	thermal	thermal	ADJ
app01-10367	74	34	effects	effect	NOUN
app01-10367	74	35	,	,	PUNCT
app01-10367	74	36	such	such	ADJ
app01-10367	74	37	as	as	ADP
app01-10367	74	38	localized	localized	ADJ
app01-10367	74	39	heat	heat	NOUN
app01-10367	74	40	damage	damage	NOUN
app01-10367	74	41	of	of	ADP
app01-10367	74	42	the	the	DET
app01-10367	74	43	surface	surface	NOUN
app01-10367	74	44	.	.	PUNCT
app01-10367	75	1	the	the	DET
app01-10367	75	2	amount	amount	NOUN
app01-10367	75	3	of	of	ADP
app01-10367	75	4	heat	heat	NOUN
app01-10367	75	5	generated	generate	VERB
app01-10367	75	6	depends	depend	VERB
app01-10367	75	7	on	on	ADP
app01-10367	75	8	the	the	DET
app01-10367	75	9	current	current	NOUN
app01-10367	75	10	of	of	ADP
app01-10367	75	11	the	the	DET
app01-10367	75	12	electron	electron	NOUN
app01-10367	75	13	beam	beam	NOUN
app01-10367	75	14	,	,	PUNCT
app01-10367	75	15	and	and	CCONJ
app01-10367	75	16	the	the	DET
app01-10367	75	17	actual	actual	ADJ
app01-10367	75	18	bi	bi	NOUN
app01-10367	75	19	de	de	PROPN
app01-10367	75	20	,	,	PUNCT
app01-10367	75	21	r	r	NOUN
app01-10367	75	22	(	(	PUNCT
app01-10367	75	23	nm	nm	NOUN
app01-10367	75	24	)	)	PUNCT
app01-10367	75	25	de	de	PROPN
app01-10367	75	26	,	,	PUNCT
app01-10367	75	27	d	d	X
app01-10367	75	28	(	(	PUNCT
app01-10367	75	29	nm	nm	NOUN
app01-10367	75	30	)	)	PUNCT
app01-10367	75	31	ie	ie	X
app01-10367	75	32	(	(	PUNCT
app01-10367	75	33	pa	pa	PROPN
app01-10367	75	34	)	)	PUNCT
app01-10367	75	35	1	1	NUM
app01-10367	75	36	7.8	7.8	NUM
app01-10367	75	37	13	13	NUM
app01-10367	75	38	∼	∼	NOUN
app01-10367	75	39	9	9	NUM
app01-10367	75	40	2	2	NUM
app01-10367	75	41	7.4	7.4	NUM
app01-10367	75	42	12	12	NUM
app01-10367	75	43	∼	∼	NOUN
app01-10367	75	44	11	11	NUM
app01-10367	75	45	3	3	NUM
app01-10367	75	46	6.6	6.6	NUM
app01-10367	75	47	11	11	NUM
app01-10367	75	48	∼	∼	NOUN
app01-10367	75	49	20	20	NUM
app01-10367	75	50	4	4	NUM
app01-10367	75	51	6.3	6.3	NUM
app01-10367	75	52	11	11	NUM
app01-10367	75	53	∼	∼	NOUN
app01-10367	75	54	24	24	NUM
app01-10367	75	55	5	5	NUM
app01-10367	75	56	5.9	5.9	NUM
app01-10367	75	57	10	10	NUM
app01-10367	75	58	∼	∼	NOUN
app01-10367	75	59	35	35	NUM
app01-10367	75	60	6	6	NUM
app01-10367	75	61	5.4	5.4	NUM
app01-10367	75	62	9.3	9.3	NUM
app01-10367	75	63	∼	∼	NOUN
app01-10367	75	64	50	50	NUM
app01-10367	75	65	7	7	NUM
app01-10367	75	66	5.0	5.0	NUM
app01-10367	75	67	8.5	8.5	NUM
app01-10367	75	68	∼	∼	NOUN
app01-10367	75	69	67	67	NUM
app01-10367	75	70	8	8	NUM
app01-10367	75	71	4.6	4.6	NUM
app01-10367	75	72	7.8	7.8	NUM
app01-10367	75	73	∼	∼	NOUN
app01-10367	75	74	95	95	NUM
app01-10367	75	75	9	9	NUM
app01-10367	75	76	4.5	4.5	NUM
app01-10367	75	77	7.2	7.2	NUM
app01-10367	75	78	∼	∼	NOUN
app01-10367	75	79	130	130	NUM
app01-10367	75	80	10	10	NUM
app01-10367	75	81	4.6	4.6	NUM
app01-10367	75	82	6.6	6.6	NUM
app01-10367	75	83	∼	∼	NOUN
app01-10367	75	84	190	190	NUM
app01-10367	75	85	11	11	NUM
app01-10367	75	86	5.3	5.3	NUM
app01-10367	75	87	6.1	6.1	NUM
app01-10367	75	88	∼	∼	NOUN
app01-10367	75	89	270	270	NUM
app01-10367	75	90	12	12	NUM
app01-10367	75	91	6.9	6.9	NUM
app01-10367	75	92	5.7	5.7	NUM
app01-10367	75	93	∼	∼	NOUN
app01-10367	75	94	330	330	NUM
app01-10367	75	95	13	13	NUM
app01-10367	75	96	10	10	NUM
app01-10367	75	97	5.5	5.5	NUM
app01-10367	75	98	∼	∼	NOUN
app01-10367	75	99	450	450	NUM
app01-10367	75	100	14	14	NUM
app01-10367	75	101	15	15	NUM
app01-10367	75	102	5.6	5.6	NUM
app01-10367	75	103	∼	∼	NOUN
app01-10367	75	104	550	550	NUM
app01-10367	75	105	15	15	NUM
app01-10367	75	106	24	24	NUM
app01-10367	75	107	6.1	6.1	NUM
app01-10367	75	108	∼	∼	NOUN
app01-10367	75	109	750	750	NUM
app01-10367	75	110	16	16	NUM
app01-10367	75	111	37	37	NUM
app01-10367	75	112	7.4	7.4	NUM
app01-10367	75	113	∼	∼	NOUN
app01-10367	75	114	880	880	NUM
app01-10367	75	115	17	17	NUM
app01-10367	75	116	62	62	NUM
app01-10367	75	117	11	11	NUM
app01-10367	75	118	∼	∼	NOUN
app01-10367	75	119	1	1	NUM
app01-10367	75	120	000	000	NUM
app01-10367	75	121	table	table	NOUN
app01-10367	75	122	3	3	NUM
app01-10367	75	123	.	.	PUNCT
app01-10367	75	124	electron	electron	PROPN
app01-10367	75	125	beam	beam	PROPN
app01-10367	75	126	current	current	ADJ
app01-10367	75	127	ib	ib	PROPN
app01-10367	75	128	and	and	CCONJ
app01-10367	75	129	spot	spot	NOUN
app01-10367	75	130	sizes	size	NOUN
app01-10367	75	131	db	db	VERB
app01-10367	75	132	for	for	ADP
app01-10367	75	133	resolution	resolution	NOUN
app01-10367	75	134	-	-	PUNCT
app01-10367	75	135	optimised	optimise	VERB
app01-10367	75	136	(	(	PUNCT
app01-10367	75	137	-r	-r	NOUN
app01-10367	75	138	)	)	PUNCT
app01-10367	75	139	and	and	CCONJ
app01-10367	75	140	focal	focal	ADV
app01-10367	75	141	-	-	PUNCT
app01-10367	75	142	depthoptimised	depthoptimise	VERB
app01-10367	75	143	(	(	PUNCT
app01-10367	75	144	-d	-d	NOUN
app01-10367	75	145	)	)	PUNCT
app01-10367	75	146	scanning	scanning	NOUN
app01-10367	75	147	modes	mode	NOUN
app01-10367	75	148	,	,	PUNCT
app01-10367	75	149	respectively	respectively	ADV
app01-10367	75	150	,	,	PUNCT
app01-10367	75	151	with	with	ADP
app01-10367	75	152	acceleration	acceleration	NOUN
app01-10367	75	153	voltage	voltage	NOUN
app01-10367	75	154	of	of	ADP
app01-10367	75	155	15	15	NUM
app01-10367	75	156	kev	kev	NOUN
app01-10367	75	157	.	.	PUNCT
app01-10367	76	1	temperature	temperature	NOUN
app01-10367	76	2	rise	rise	NOUN
app01-10367	76	3	depends	depend	VERB
app01-10367	76	4	on	on	ADP
app01-10367	76	5	several	several	ADJ
app01-10367	76	6	factors	factor	NOUN
app01-10367	76	7	,	,	PUNCT
app01-10367	76	8	including	include	VERB
app01-10367	76	9	exposure	exposure	NOUN
app01-10367	76	10	time	time	NOUN
app01-10367	76	11	,	,	PUNCT
app01-10367	76	12	thermal	thermal	ADJ
app01-10367	76	13	conductivity	conductivity	NOUN
app01-10367	76	14	,	,	PUNCT
app01-10367	76	15	heat	heat	NOUN
app01-10367	76	16	capacity	capacity	NOUN
app01-10367	76	17	,	,	PUNCT
app01-10367	76	18	and	and	CCONJ
app01-10367	76	19	the	the	DET
app01-10367	76	20	geometry	geometry	NOUN
app01-10367	76	21	of	of	ADP
app01-10367	76	22	the	the	DET
app01-10367	76	23	sample	sample	NOUN
app01-10367	76	24	[	[	X
app01-10367	76	25	11	11	NUM
app01-10367	76	26	]	]	PUNCT
app01-10367	76	27	.	.	PUNCT
app01-10367	77	1	the	the	DET
app01-10367	77	2	microscope	microscope	NOUN
app01-10367	77	3	used	use	VERB
app01-10367	77	4	in	in	ADP
app01-10367	77	5	the	the	DET
app01-10367	77	6	study	study	NOUN
app01-10367	77	7	offers	offer	VERB
app01-10367	77	8	two	two	NUM
app01-10367	77	9	beamfocusing	beamfocusing	NOUN
app01-10367	77	10	setups	setup	NOUN
app01-10367	77	11	optimized	optimize	VERB
app01-10367	77	12	for	for	ADP
app01-10367	77	13	improved	improved	ADJ
app01-10367	77	14	resolution	resolution	NOUN
app01-10367	77	15	or	or	CCONJ
app01-10367	77	16	enhanced	enhance	VERB
app01-10367	77	17	depth	depth	NOUN
app01-10367	77	18	of	of	ADP
app01-10367	77	19	focus	focus	NOUN
app01-10367	77	20	.	.	PUNCT
app01-10367	78	1	differences	difference	NOUN
app01-10367	78	2	between	between	ADP
app01-10367	78	3	estimated	estimate	VERB
app01-10367	78	4	spot	spot	NOUN
app01-10367	78	5	sizes	size	NOUN
app01-10367	78	6	de	de	X
app01-10367	78	7	of	of	ADP
app01-10367	78	8	both	both	DET
app01-10367	78	9	modes	mode	NOUN
app01-10367	78	10	and	and	CCONJ
app01-10367	78	11	beam	beam	NOUN
app01-10367	78	12	current	current	NOUN
app01-10367	78	13	ie	ie	ADV
app01-10367	78	14	for	for	ADP
app01-10367	78	15	beam	beam	NOUN
app01-10367	78	16	intensity	intensity	NOUN
app01-10367	78	17	(	(	PUNCT
app01-10367	78	18	bi	bi	NOUN
app01-10367	78	19	)	)	PUNCT
app01-10367	78	20	indices	index	NOUN
app01-10367	78	21	are	be	AUX
app01-10367	78	22	listed	list	VERB
app01-10367	78	23	in	in	ADP
app01-10367	78	24	table	table	NOUN
app01-10367	78	25	3	3	NUM
app01-10367	78	26	.	.	PUNCT
app01-10367	78	27	figure	figure	NOUN
app01-10367	78	28	3(a	3(a	NUM
app01-10367	78	29	)	)	PUNCT
app01-10367	78	30	shows	show	VERB
app01-10367	78	31	the	the	DET
app01-10367	78	32	micro	micro	NOUN
app01-10367	78	33	-	-	NOUN
app01-10367	78	34	beam	beam	NOUN
app01-10367	78	35	prepared	prepare	VERB
app01-10367	78	36	under	under	ADP
app01-10367	78	37	continuous	continuous	ADJ
app01-10367	78	38	electron	electron	NOUN
app01-10367	78	39	imaging	imaging	NOUN
app01-10367	78	40	with	with	ADP
app01-10367	78	41	electron	electron	NOUN
app01-10367	78	42	beam	beam	NOUN
app01-10367	78	43	intensity	intensity	NOUN
app01-10367	78	44	bi	bi	PROPN
app01-10367	78	45	17	17	NUM
app01-10367	78	46	overheating	overheat	VERB
app01-10367	78	47	the	the	DET
app01-10367	78	48	sample	sample	NOUN
app01-10367	78	49	surface	surface	NOUN
app01-10367	78	50	.	.	PUNCT
app01-10367	79	1	electron	electron	PROPN
app01-10367	79	2	90	90	NUM
app01-10367	79	3	vol	vol	NOUN
app01-10367	79	4	.	.	PUNCT
app01-10367	80	1	50/2024	50/2024	NUM
app01-10367	80	2	fib	fib	ADJ
app01-10367	80	3	procedure	procedure	NOUN
app01-10367	80	4	optimization	optimization	NOUN
app01-10367	80	5	for	for	ADP
app01-10367	80	6	cement	cement	NOUN
app01-10367	80	7	pastes	paste	NOUN
app01-10367	80	8	(	(	PUNCT
app01-10367	80	9	a	a	X
app01-10367	80	10	)	)	PUNCT
app01-10367	80	11	damaged	damage	VERB
app01-10367	80	12	micro	micro	NOUN
app01-10367	80	13	-	-	ADJ
app01-10367	80	14	beam	beam	NOUN
app01-10367	80	15	prepared	prepare	VERB
app01-10367	80	16	in	in	ADP
app01-10367	80	17	ip	ip	NOUN
app01-10367	80	18	under	under	ADP
app01-10367	80	19	continuous	continuous	ADJ
app01-10367	80	20	electron	electron	NOUN
app01-10367	80	21	imaging	imaging	NOUN
app01-10367	80	22	.	.	PUNCT
app01-10367	81	1	(	(	PUNCT
app01-10367	81	2	b	b	X
app01-10367	81	3	)	)	PUNCT
app01-10367	81	4	micro	micro	NOUN
app01-10367	81	5	-	-	NOUN
app01-10367	81	6	beam	beam	NOUN
app01-10367	81	7	prepared	prepare	VERB
app01-10367	81	8	in	in	ADP
app01-10367	81	9	ip	ip	NOUN
app01-10367	81	10	with	with	ADP
app01-10367	81	11	electron	electron	NOUN
app01-10367	81	12	imaging	imaging	NOUN
app01-10367	81	13	deactivated	deactivate	VERB
app01-10367	81	14	.	.	PUNCT
app01-10367	82	1	figure	figure	VERB
app01-10367	82	2	3	3	NUM
app01-10367	82	3	.	.	NOUN
app01-10367	82	4	comparison	comparison	NOUN
app01-10367	82	5	of	of	ADP
app01-10367	82	6	micro	micro	NOUN
app01-10367	82	7	-	-	NOUN
app01-10367	82	8	beams	beam	NOUN
app01-10367	82	9	damaged	damage	VERB
app01-10367	82	10	and	and	CCONJ
app01-10367	82	11	undamaged	undamaged	ADJ
app01-10367	82	12	by	by	ADP
app01-10367	82	13	extensive	extensive	ADJ
app01-10367	82	14	electron	electron	NOUN
app01-10367	82	15	beam	beam	NOUN
app01-10367	82	16	heating	heating	NOUN
app01-10367	82	17	.	.	PUNCT
app01-10367	83	1	imaging	imaging	NOUN
app01-10367	83	2	using	use	VERB
app01-10367	83	3	bi	bi	NOUN
app01-10367	83	4	7	7	NUM
app01-10367	83	5	and	and	CCONJ
app01-10367	83	6	deactivating	deactivate	VERB
app01-10367	83	7	the	the	DET
app01-10367	83	8	continuous	continuous	ADJ
app01-10367	83	9	acquisition	acquisition	NOUN
app01-10367	83	10	during	during	ADP
app01-10367	83	11	the	the	DET
app01-10367	83	12	fib	fib	NOUN
app01-10367	83	13	process	process	NOUN
app01-10367	83	14	minimizes	minimize	VERB
app01-10367	83	15	the	the	DET
app01-10367	83	16	surface	surface	NOUN
app01-10367	83	17	degradation	degradation	NOUN
app01-10367	83	18	,	,	PUNCT
app01-10367	83	19	see	see	VERB
app01-10367	83	20	figure	figure	NOUN
app01-10367	83	21	3(b	3(b	NUM
app01-10367	83	22	)	)	PUNCT
app01-10367	83	23	.	.	PUNCT
app01-10367	84	1	bi	bi	NOUN
app01-10367	84	2	7	7	NUM
app01-10367	84	3	with	with	ADP
app01-10367	84	4	pixel	pixel	PROPN
app01-10367	84	5	dwell	dwell	PROPN
app01-10367	84	6	time	time	NOUN
app01-10367	84	7	of	of	ADP
app01-10367	84	8	3.2µs	3.2µs	NUM
app01-10367	84	9	and	and	CCONJ
app01-10367	84	10	resolution	resolution	NOUN
app01-10367	84	11	of	of	ADP
app01-10367	84	12	512	512	NUM
app01-10367	84	13	×	×	NOUN
app01-10367	84	14	512	512	NUM
app01-10367	84	15	px	px	PROPN
app01-10367	84	16	offers	offer	VERB
app01-10367	84	17	an	an	DET
app01-10367	84	18	acceptable	acceptable	ADJ
app01-10367	84	19	compromise	compromise	NOUN
app01-10367	84	20	between	between	ADP
app01-10367	84	21	low	low	ADJ
app01-10367	84	22	sample	sample	NOUN
app01-10367	84	23	heat	heat	NOUN
app01-10367	84	24	loading	loading	NOUN
app01-10367	84	25	and	and	CCONJ
app01-10367	84	26	reasonable	reasonable	ADJ
app01-10367	84	27	preview	preview	NOUN
app01-10367	84	28	image	image	NOUN
app01-10367	84	29	quality	quality	NOUN
app01-10367	84	30	.	.	PUNCT
app01-10367	85	1	to	to	PART
app01-10367	85	2	suppress	suppress	VERB
app01-10367	85	3	the	the	DET
app01-10367	85	4	surface	surface	NOUN
app01-10367	85	5	heat	heat	NOUN
app01-10367	85	6	loading	loading	NOUN
app01-10367	85	7	even	even	ADV
app01-10367	85	8	further	far	ADV
app01-10367	85	9	,	,	PUNCT
app01-10367	85	10	the	the	DET
app01-10367	85	11	continuous	continuous	ADJ
app01-10367	85	12	image	image	NOUN
app01-10367	85	13	acquisition	acquisition	NOUN
app01-10367	85	14	should	should	AUX
app01-10367	85	15	be	be	AUX
app01-10367	85	16	turned	turn	VERB
app01-10367	85	17	off	off	ADP
app01-10367	85	18	during	during	ADP
app01-10367	85	19	fib	fib	ADJ
app01-10367	85	20	processes	process	NOUN
app01-10367	85	21	.	.	PUNCT
app01-10367	86	1	3.3	3.3	NUM
app01-10367	86	2	.	.	PUNCT
app01-10367	87	1	effect	effect	NOUN
app01-10367	87	2	of	of	ADP
app01-10367	87	3	ion	ion	NOUN
app01-10367	87	4	beam	beam	NOUN
app01-10367	87	5	the	the	DET
app01-10367	87	6	fib	fib	NOUN
app01-10367	87	7	,	,	PUNCT
app01-10367	87	8	as	as	ADV
app01-10367	87	9	well	well	ADV
app01-10367	87	10	as	as	ADP
app01-10367	87	11	the	the	DET
app01-10367	87	12	electron	electron	NOUN
app01-10367	87	13	beam	beam	NOUN
app01-10367	87	14	or	or	CCONJ
app01-10367	87	15	laser	laser	NOUN
app01-10367	87	16	beam	beam	NOUN
app01-10367	87	17	,	,	PUNCT
app01-10367	87	18	is	be	AUX
app01-10367	87	19	assumed	assume	VERB
app01-10367	87	20	to	to	PART
app01-10367	87	21	be	be	AUX
app01-10367	87	22	elliptical	elliptical	ADJ
app01-10367	87	23	in	in	ADP
app01-10367	87	24	the	the	DET
app01-10367	87	25	plane	plane	NOUN
app01-10367	87	26	perpendicular	perpendicular	NOUN
app01-10367	87	27	to	to	ADP
app01-10367	87	28	the	the	DET
app01-10367	87	29	beam	beam	NOUN
app01-10367	87	30	with	with	ADP
app01-10367	87	31	a	a	DET
app01-10367	87	32	gaussian	gaussian	ADJ
app01-10367	87	33	-	-	PUNCT
app01-10367	87	34	type	type	NOUN
app01-10367	87	35	power	power	NOUN
app01-10367	87	36	profile	profile	NOUN
app01-10367	87	37	.	.	PUNCT
app01-10367	88	1	as	as	SCONJ
app01-10367	88	2	the	the	DET
app01-10367	88	3	beam	beam	NOUN
app01-10367	88	4	current	current	NOUN
app01-10367	88	5	is	be	AUX
app01-10367	88	6	defined	define	VERB
app01-10367	88	7	by	by	ADP
app01-10367	88	8	masking	mask	VERB
app01-10367	88	9	the	the	DET
app01-10367	88	10	defocused	defocused	ADJ
app01-10367	88	11	beam	beam	NOUN
app01-10367	88	12	in	in	ADP
app01-10367	88	13	the	the	DET
app01-10367	88	14	column	column	NOUN
app01-10367	88	15	,	,	PUNCT
app01-10367	88	16	the	the	DET
app01-10367	88	17	different	different	ADJ
app01-10367	88	18	current	current	ADJ
app01-10367	88	19	settings	setting	NOUN
app01-10367	88	20	lead	lead	VERB
app01-10367	88	21	to	to	ADP
app01-10367	88	22	different	different	ADJ
app01-10367	88	23	standard	standard	ADJ
app01-10367	88	24	deviations	deviation	NOUN
app01-10367	88	25	of	of	ADP
app01-10367	88	26	the	the	DET
app01-10367	88	27	power	power	NOUN
app01-10367	88	28	profile	profile	NOUN
app01-10367	88	29	.	.	PUNCT
app01-10367	89	1	a	a	DET
app01-10367	89	2	higher	high	ADJ
app01-10367	89	3	standard	standard	ADJ
app01-10367	89	4	deviation	deviation	NOUN
app01-10367	89	5	results	result	NOUN
app01-10367	89	6	in	in	ADP
app01-10367	89	7	blunter	blunt	ADJ
app01-10367	89	8	edges	edge	NOUN
app01-10367	89	9	for	for	ADP
app01-10367	89	10	higher	high	ADJ
app01-10367	89	11	current	current	ADJ
app01-10367	89	12	ratings	rating	NOUN
app01-10367	89	13	.	.	PUNCT
app01-10367	90	1	figure	figure	VERB
app01-10367	90	2	4	4	NUM
app01-10367	90	3	shows	show	VERB
app01-10367	90	4	four	four	NUM
app01-10367	90	5	identical	identical	ADJ
app01-10367	90	6	ion	ion	NOUN
app01-10367	90	7	beam	beam	NOUN
app01-10367	90	8	etching	etch	VERB
app01-10367	90	9	routines	routine	NOUN
app01-10367	90	10	of	of	ADP
app01-10367	90	11	rectangular	rectangular	ADJ
app01-10367	90	12	object	object	NOUN
app01-10367	90	13	,	,	PUNCT
app01-10367	90	14	1	1	NUM
app01-10367	90	15	µm	µm	ADP
app01-10367	90	16	wide	wide	ADV
app01-10367	90	17	,	,	PUNCT
app01-10367	90	18	8	8	NUM
app01-10367	90	19	µm	µm	ADP
app01-10367	90	20	long	long	ADV
app01-10367	90	21	and	and	CCONJ
app01-10367	90	22	deep	deep	ADJ
app01-10367	90	23	,	,	PUNCT
app01-10367	90	24	in	in	ADP
app01-10367	90	25	portlandite	portlandite	NOUN
app01-10367	90	26	using	use	VERB
app01-10367	90	27	four	four	NUM
app01-10367	90	28	different	different	ADJ
app01-10367	90	29	fib	fib	ADJ
app01-10367	90	30	presets	preset	NOUN
app01-10367	90	31	defined	define	VERB
app01-10367	90	32	in	in	ADP
app01-10367	90	33	table	table	NOUN
app01-10367	90	34	4	4	NUM
app01-10367	90	35	.	.	PUNCT
app01-10367	91	1	it	it	PRON
app01-10367	91	2	is	be	AUX
app01-10367	91	3	clearly	clearly	ADV
app01-10367	91	4	seen	see	VERB
app01-10367	91	5	that	that	SCONJ
app01-10367	91	6	with	with	ADP
app01-10367	91	7	higher	high	ADJ
app01-10367	91	8	beam	beam	NOUN
app01-10367	91	9	currents	current	NOUN
app01-10367	91	10	,	,	PUNCT
app01-10367	91	11	the	the	DET
app01-10367	91	12	edges	edge	NOUN
app01-10367	91	13	of	of	ADP
app01-10367	91	14	the	the	DET
app01-10367	91	15	etched	etch	VERB
app01-10367	91	16	objects	object	NOUN
app01-10367	91	17	are	be	AUX
app01-10367	91	18	less	less	ADV
app01-10367	91	19	defined	define	VERB
app01-10367	91	20	and	and	CCONJ
app01-10367	91	21	blunter	blunter	ADJ
app01-10367	91	22	compared	compare	VERB
app01-10367	91	23	to	to	ADP
app01-10367	91	24	those	those	PRON
app01-10367	91	25	prepared	prepare	VERB
app01-10367	91	26	using	use	VERB
app01-10367	91	27	lower	low	ADJ
app01-10367	91	28	beam	beam	NOUN
app01-10367	91	29	currents	current	NOUN
app01-10367	91	30	.	.	PUNCT
app01-10367	92	1	as	as	SCONJ
app01-10367	92	2	described	describe	VERB
app01-10367	92	3	in	in	ADP
app01-10367	92	4	[	[	X
app01-10367	92	5	12	12	NUM
app01-10367	92	6	]	]	X
app01-10367	92	7	,	,	PUNCT
app01-10367	92	8	higher	high	ADJ
app01-10367	92	9	current	current	ADJ
app01-10367	92	10	ratings	rating	NOUN
app01-10367	92	11	lead	lead	VERB
app01-10367	92	12	to	to	ADP
app01-10367	92	13	higher	high	ADJ
app01-10367	92	14	temperature	temperature	NOUN
app01-10367	92	15	rises	rise	NOUN
app01-10367	92	16	and	and	CCONJ
app01-10367	92	17	broader	broad	ADJ
app01-10367	92	18	heated	heated	ADJ
app01-10367	92	19	volumes	volume	NOUN
app01-10367	92	20	.	.	PUNCT
app01-10367	93	1	figure	figure	VERB
app01-10367	93	2	4	4	NUM
app01-10367	93	3	.	.	NOUN
app01-10367	93	4	comparison	comparison	NOUN
app01-10367	93	5	of	of	ADP
app01-10367	93	6	fib	fib	ADJ
app01-10367	93	7	etching	etch	VERB
app01-10367	93	8	routines	routine	NOUN
app01-10367	93	9	performed	perform	VERB
app01-10367	93	10	with	with	ADP
app01-10367	93	11	different	different	ADJ
app01-10367	93	12	ion	ion	NOUN
app01-10367	93	13	beam	beam	NOUN
app01-10367	93	14	presets	preset	NOUN
app01-10367	93	15	.	.	PUNCT
app01-10367	94	1	preset	preset	ADJ
app01-10367	94	2	da	da	NOUN
app01-10367	94	3	(	(	PUNCT
app01-10367	94	4	µm	µm	NOUN
app01-10367	94	5	)	)	PUNCT
app01-10367	94	6	db	db	PROPN
app01-10367	94	7	(	(	PUNCT
app01-10367	94	8	nm	nm	NOUN
app01-10367	94	9	)	)	PUNCT
app01-10367	94	10	ib	ib	NOUN
app01-10367	94	11	(	(	PUNCT
app01-10367	94	12	pa	pa	PROPN
app01-10367	94	13	)	)	PUNCT
app01-10367	94	14	ts	ts	X
app01-10367	94	15	(	(	PUNCT
app01-10367	94	16	min	min	NOUN
app01-10367	94	17	)	)	PUNCT
app01-10367	94	18	1	1	NUM
app01-10367	94	19	500	500	NUM
app01-10367	94	20	130.1	130.1	NUM
app01-10367	94	21	∼	∼	NOUN
app01-10367	94	22	7	7	NUM
app01-10367	94	23	000	000	NUM
app01-10367	94	24	0:20	0:20	NUM
app01-10367	94	25	2	2	NUM
app01-10367	94	26	200	200	NUM
app01-10367	94	27	109.6	109.6	NUM
app01-10367	94	28	∼	∼	NOUN
app01-10367	94	29	1	1	NUM
app01-10367	94	30	000	000	NUM
app01-10367	94	31	2:13	2:13	NUM
app01-10367	94	32	3	3	NUM
app01-10367	94	33	150	150	NUM
app01-10367	94	34	118.2	118.2	NUM
app01-10367	94	35	∼	∼	NOUN
app01-10367	94	36	600	600	NUM
app01-10367	94	37	4:09	4:09	NUM
app01-10367	94	38	4	4	NUM
app01-10367	94	39	90	90	NUM
app01-10367	94	40	121.9	121.9	NUM
app01-10367	94	41	∼	∼	NOUN
app01-10367	94	42	200	200	NUM
app01-10367	94	43	13:33	13:33	NUM
app01-10367	94	44	table	table	NOUN
app01-10367	94	45	4	4	NUM
app01-10367	94	46	.	.	PUNCT
app01-10367	94	47	fib	fib	ADJ
app01-10367	94	48	preset	preset	ADJ
app01-10367	94	49	parameters	parameter	NOUN
app01-10367	94	50	for	for	ADP
app01-10367	94	51	ion	ion	NOUN
app01-10367	94	52	acceleration	acceleration	NOUN
app01-10367	94	53	voltage	voltage	NOUN
app01-10367	94	54	of	of	ADP
app01-10367	94	55	30	30	NUM
app01-10367	94	56	kev	kev	NOUN
app01-10367	94	57	and	and	CCONJ
app01-10367	94	58	time	time	NOUN
app01-10367	94	59	needed	need	VERB
app01-10367	94	60	for	for	ADP
app01-10367	94	61	etching	etch	VERB
app01-10367	94	62	1	1	NUM
app01-10367	94	63	µm	µm	NOUN
app01-10367	94	64	wide	wide	ADV
app01-10367	94	65	,	,	PUNCT
app01-10367	94	66	8	8	NUM
app01-10367	94	67	µm	µm	ADP
app01-10367	94	68	long	long	ADJ
app01-10367	94	69	and	and	CCONJ
app01-10367	94	70	deep	deep	ADJ
app01-10367	94	71	rectangular	rectangular	ADJ
app01-10367	94	72	trench	trench	NOUN
app01-10367	94	73	in	in	ADP
app01-10367	94	74	portlandite	portlandite	ADJ
app01-10367	94	75	.	.	PUNCT
app01-10367	95	1	in	in	ADP
app01-10367	95	2	the	the	DET
app01-10367	95	3	case	case	NOUN
app01-10367	95	4	of	of	ADP
app01-10367	95	5	micro	micro	NOUN
app01-10367	95	6	-	-	NOUN
app01-10367	95	7	beams	beam	NOUN
app01-10367	95	8	prepared	prepare	VERB
app01-10367	95	9	in	in	ADP
app01-10367	95	10	cement	cement	NOUN
app01-10367	95	11	paste	paste	NOUN
app01-10367	95	12	phases	phase	NOUN
app01-10367	95	13	,	,	PUNCT
app01-10367	95	14	both	both	DET
app01-10367	95	15	effects	effect	NOUN
app01-10367	95	16	contribute	contribute	VERB
app01-10367	95	17	to	to	ADP
app01-10367	95	18	artifacts	artifact	NOUN
app01-10367	95	19	created	create	VERB
app01-10367	95	20	on	on	ADP
app01-10367	95	21	the	the	DET
app01-10367	95	22	sides	side	NOUN
app01-10367	95	23	of	of	ADP
app01-10367	95	24	the	the	DET
app01-10367	95	25	micro	micro	NOUN
app01-10367	95	26	-	-	NOUN
app01-10367	95	27	beam	beam	NOUN
app01-10367	95	28	and	and	CCONJ
app01-10367	95	29	the	the	DET
app01-10367	95	30	base	base	NOUN
app01-10367	95	31	.	.	PUNCT
app01-10367	96	1	the	the	DET
app01-10367	96	2	gaussian	gaussian	ADJ
app01-10367	96	3	beam	beam	NOUN
app01-10367	96	4	broadening	broaden	VERB
app01-10367	96	5	primarily	primarily	ADV
app01-10367	96	6	causes	cause	VERB
app01-10367	96	7	blunt	blunt	ADJ
app01-10367	96	8	edges	edge	NOUN
app01-10367	96	9	,	,	PUNCT
app01-10367	96	10	while	while	SCONJ
app01-10367	96	11	beam	beam	NOUN
app01-10367	96	12	-	-	PUNCT
app01-10367	96	13	induced	induced	ADJ
app01-10367	96	14	heating	heating	NOUN
app01-10367	96	15	can	can	AUX
app01-10367	96	16	lead	lead	VERB
app01-10367	96	17	to	to	ADP
app01-10367	96	18	geometrical	geometrical	ADJ
app01-10367	96	19	changes	change	NOUN
app01-10367	96	20	in	in	ADP
app01-10367	96	21	the	the	DET
app01-10367	96	22	micro	micro	NOUN
app01-10367	96	23	-	-	NOUN
app01-10367	96	24	beam	beam	ADJ
app01-10367	96	25	due	due	ADP
app01-10367	96	26	to	to	ADP
app01-10367	96	27	possible	possible	ADJ
app01-10367	96	28	phase	phase	NOUN
app01-10367	96	29	transformations	transformation	NOUN
app01-10367	96	30	,	,	PUNCT
app01-10367	96	31	decomposition	decomposition	NOUN
app01-10367	96	32	,	,	PUNCT
app01-10367	96	33	or	or	CCONJ
app01-10367	96	34	the	the	DET
app01-10367	96	35	release	release	NOUN
app01-10367	96	36	of	of	ADP
app01-10367	96	37	adsorbed	adsorb	VERB
app01-10367	96	38	gel	gel	NOUN
app01-10367	96	39	water	water	NOUN
app01-10367	96	40	in	in	ADP
app01-10367	96	41	c	c	PROPN
app01-10367	96	42	-	-	PUNCT
app01-10367	96	43	s	s	NOUN
app01-10367	96	44	-	-	PUNCT
app01-10367	96	45	h	h	NOUN
app01-10367	96	46	products	product	NOUN
app01-10367	96	47	,	,	PUNCT
app01-10367	96	48	resulting	result	VERB
app01-10367	96	49	in	in	ADP
app01-10367	96	50	shrinkage	shrinkage	NOUN
app01-10367	96	51	and	and	CCONJ
app01-10367	96	52	microcracking	microcracke	VERB
app01-10367	96	53	[	[	X
app01-10367	96	54	9	9	NUM
app01-10367	96	55	]	]	PUNCT
app01-10367	96	56	.	.	PUNCT
app01-10367	97	1	figure	figure	NOUN
app01-10367	97	2	5(a	5(a	NUM
app01-10367	97	3	)	)	PUNCT
app01-10367	97	4	shows	show	VERB
app01-10367	97	5	preparation	preparation	NOUN
app01-10367	97	6	of	of	ADP
app01-10367	97	7	a	a	DET
app01-10367	97	8	micro	micro	NOUN
app01-10367	97	9	-	-	NOUN
app01-10367	97	10	beam	beam	ADJ
app01-10367	97	11	in	in	ADP
app01-10367	97	12	portlandite	portlandite	NOUN
app01-10367	97	13	interrupted	interrupt	VERB
app01-10367	97	14	after	after	ADP
app01-10367	97	15	the	the	DET
app01-10367	97	16	second	second	ADJ
app01-10367	97	17	stage	stage	NOUN
app01-10367	97	18	of	of	ADP
app01-10367	97	19	rough	rough	ADJ
app01-10367	97	20	undercut	undercut	ADJ
app01-10367	97	21	using	use	VERB
app01-10367	97	22	the	the	DET
app01-10367	97	23	ib	ib	NOUN
app01-10367	97	24	∼	∼	VERB
app01-10367	97	25	7	7	NUM
app01-10367	97	26	na	na	NOUN
app01-10367	97	27	because	because	SCONJ
app01-10367	97	28	of	of	ADP
app01-10367	97	29	excessive	excessive	ADJ
app01-10367	97	30	heat	heat	NOUN
app01-10367	97	31	loading	loading	NOUN
app01-10367	97	32	induced	induce	VERB
app01-10367	97	33	by	by	ADP
app01-10367	97	34	the	the	DET
app01-10367	97	35	fib	fib	NOUN
app01-10367	97	36	.	.	PUNCT
app01-10367	98	1	reducing	reduce	VERB
app01-10367	98	2	the	the	DET
app01-10367	98	3	beam	beam	NOUN
app01-10367	98	4	current	current	NOUN
app01-10367	98	5	to	to	ADP
app01-10367	98	6	ib	ib	VERB
app01-10367	98	7	∼	∼	NOUN
app01-10367	98	8	1	1	NUM
app01-10367	98	9	na	na	AUX
app01-10367	98	10	eliminated	eliminate	VERB
app01-10367	98	11	the	the	DET
app01-10367	98	12	excessive	excessive	ADJ
app01-10367	98	13	heat	heat	NOUN
app01-10367	98	14	loading	loading	NOUN
app01-10367	98	15	,	,	PUNCT
app01-10367	98	16	see	see	VERB
app01-10367	98	17	figure	figure	NOUN
app01-10367	98	18	5(b	5(b	NUM
app01-10367	98	19	)	)	PUNCT
app01-10367	98	20	.	.	PUNCT
app01-10367	99	1	3.4	3.4	NUM
app01-10367	99	2	.	.	PUNCT
app01-10367	99	3	effect	effect	NOUN
app01-10367	99	4	of	of	ADP
app01-10367	99	5	image	image	NOUN
app01-10367	99	6	drift	drift	NOUN
app01-10367	99	7	because	because	SCONJ
app01-10367	99	8	of	of	ADP
app01-10367	99	9	the	the	DET
app01-10367	99	10	low	low	ADJ
app01-10367	99	11	conductivity	conductivity	NOUN
app01-10367	99	12	of	of	ADP
app01-10367	99	13	cement	cement	NOUN
app01-10367	99	14	paste	paste	NOUN
app01-10367	99	15	in	in	ADP
app01-10367	99	16	the	the	DET
app01-10367	99	17	vacuum	vacuum	PROPN
app01-10367	99	18	chamber	chamber	PROPN
app01-10367	99	19	,	,	PUNCT
app01-10367	99	20	the	the	DET
app01-10367	99	21	accumulation	accumulation	NOUN
app01-10367	99	22	of	of	ADP
app01-10367	99	23	positive	positive	ADJ
app01-10367	99	24	charge	charge	NOUN
app01-10367	99	25	due	due	ADP
app01-10367	99	26	to	to	ADP
app01-10367	99	27	ga+	ga+	ADJ
app01-10367	99	28	ion	ion	NOUN
app01-10367	99	29	implantation	implantation	NOUN
app01-10367	99	30	and	and	CCONJ
app01-10367	99	31	secondary	secondary	ADJ
app01-10367	99	32	electron	electron	NOUN
app01-10367	99	33	emission	emission	NOUN
app01-10367	99	34	during	during	ADP
app01-10367	99	35	the	the	DET
app01-10367	99	36	ga+	ga+	ADJ
app01-10367	99	37	ion	ion	NOUN
app01-10367	99	38	beam	beam	NOUN
app01-10367	99	39	fabrication	fabrication	NOUN
app01-10367	99	40	can	can	AUX
app01-10367	99	41	lead	lead	VERB
app01-10367	99	42	to	to	ADP
app01-10367	99	43	significant	significant	ADJ
app01-10367	99	44	charging	charging	NOUN
app01-10367	99	45	effects	effect	NOUN
app01-10367	99	46	,	,	PUNCT
app01-10367	99	47	causing	cause	VERB
app01-10367	99	48	apparent	apparent	ADJ
app01-10367	99	49	image	image	NOUN
app01-10367	99	50	movement	movement	NOUN
app01-10367	99	51	called	call	VERB
app01-10367	99	52	image	image	NOUN
app01-10367	99	53	drift	drift	NOUN
app01-10367	99	54	.	.	PUNCT
app01-10367	100	1	this	this	DET
app01-10367	100	2	effect	effect	NOUN
app01-10367	100	3	can	can	AUX
app01-10367	100	4	be	be	AUX
app01-10367	100	5	mitigated	mitigate	VERB
app01-10367	100	6	by	by	ADP
app01-10367	100	7	drift	drift	NOUN
app01-10367	100	8	correction	correction	NOUN
app01-10367	100	9	,	,	PUNCT
app01-10367	100	10	where	where	SCONJ
app01-10367	100	11	the	the	DET
app01-10367	100	12	milling	milling	NOUN
app01-10367	100	13	/	/	SYM
app01-10367	100	14	polishing	polish	VERB
app01-10367	100	15	routine	routine	NOUN
app01-10367	100	16	is	be	AUX
app01-10367	100	17	automatically	automatically	ADV
app01-10367	100	18	paused	pause	VERB
app01-10367	100	19	and	and	CCONJ
app01-10367	100	20	the	the	DET
app01-10367	100	21	reference	reference	NOUN
app01-10367	100	22	area	area	NOUN
app01-10367	100	23	is	be	AUX
app01-10367	100	24	scanned	scan	VERB
app01-10367	100	25	to	to	PART
app01-10367	100	26	estimate	estimate	VERB
app01-10367	100	27	corrections	correction	NOUN
app01-10367	100	28	.	.	PUNCT
app01-10367	101	1	the	the	DET
app01-10367	101	2	fib	fib	ADJ
app01-10367	101	3	/	/	SYM
app01-10367	101	4	sem	sem	NOUN
app01-10367	101	5	used	use	VERB
app01-10367	101	6	in	in	ADP
app01-10367	101	7	this	this	DET
app01-10367	101	8	study	study	NOUN
app01-10367	101	9	allows	allow	VERB
app01-10367	101	10	for	for	ADP
app01-10367	101	11	either	either	CCONJ
app01-10367	101	12	finer	fine	ADJ
app01-10367	101	13	pattern	pattern	NOUN
app01-10367	101	14	correction	correction	NOUN
app01-10367	101	15	,	,	PUNCT
app01-10367	101	16	where	where	SCONJ
app01-10367	101	17	the	the	DET
app01-10367	101	18	fib	fib	ADJ
app01-10367	101	19	schedule	schedule	NOUN
app01-10367	101	20	pattern	pattern	NOUN
app01-10367	101	21	coordinates	coordinate	NOUN
app01-10367	101	22	are	be	AUX
app01-10367	101	23	altered	alter	VERB
app01-10367	101	24	for	for	ADP
app01-10367	101	25	the	the	DET
app01-10367	101	26	compensation	compensation	NOUN
app01-10367	101	27	,	,	PUNCT
app01-10367	101	28	or	or	CCONJ
app01-10367	101	29	coarser	coarse	ADJ
app01-10367	101	30	but	but	CCONJ
app01-10367	101	31	wider	wide	ADJ
app01-10367	101	32	-	-	PUNCT
app01-10367	101	33	range	range	NOUN
app01-10367	101	34	image	image	NOUN
app01-10367	101	35	shift	shift	NOUN
app01-10367	101	36	correction	correction	NOUN
app01-10367	101	37	,	,	PUNCT
app01-10367	101	38	where	where	SCONJ
app01-10367	101	39	the	the	DET
app01-10367	101	40	fib	fib	ADJ
app01-10367	101	41	image	image	NOUN
app01-10367	101	42	shift	shift	NOUN
app01-10367	101	43	is	be	AUX
app01-10367	101	44	adjusted	adjust	VERB
app01-10367	101	45	for	for	ADP
app01-10367	101	46	compensation	compensation	NOUN
app01-10367	101	47	.	.	PUNCT
app01-10367	102	1	in	in	ADP
app01-10367	102	2	the	the	DET
app01-10367	102	3	case	case	NOUN
app01-10367	102	4	of	of	ADP
app01-10367	102	5	cement	cement	NOUN
app01-10367	102	6	pastes	paste	NOUN
app01-10367	102	7	,	,	PUNCT
app01-10367	102	8	the	the	DET
app01-10367	102	9	period	period	NOUN
app01-10367	102	10	between	between	ADP
app01-10367	102	11	correction	correction	NOUN
app01-10367	102	12	scans	scan	NOUN
app01-10367	102	13	had	have	VERB
app01-10367	102	14	to	to	PART
app01-10367	102	15	be	be	AUX
app01-10367	102	16	reduced	reduce	VERB
app01-10367	102	17	to	to	ADP
app01-10367	102	18	30–60	30–60	NUM
app01-10367	102	19	seconds	second	NOUN
app01-10367	102	20	.	.	PUNCT
app01-10367	103	1	even	even	ADV
app01-10367	103	2	though	though	SCONJ
app01-10367	103	3	the	the	DET
app01-10367	103	4	wider	wide	ADJ
app01-10367	103	5	-	-	PUNCT
app01-10367	103	6	range	range	NOUN
app01-10367	103	7	correction	correction	NOUN
app01-10367	103	8	method	method	NOUN
app01-10367	103	9	of	of	ADP
app01-10367	103	10	91	91	NUM
app01-10367	103	11	j.	j.	PROPN
app01-10367	103	12	procházka	procházka	PROPN
app01-10367	103	13	,	,	PUNCT
app01-10367	103	14	j.	j.	PROPN
app01-10367	103	15	němeček	němeček	PROPN
app01-10367	103	16	,	,	PUNCT
app01-10367	103	17	p.	p.	PROPN
app01-10367	103	18	halodová	halodová	PROPN
app01-10367	103	19	,	,	PUNCT
app01-10367	103	20	j.	j.	PROPN
app01-10367	103	21	němeček	němeček	PROPN
app01-10367	103	22	acta	acta	PROPN
app01-10367	103	23	polytechnica	polytechnica	PROPN
app01-10367	103	24	ctu	ctu	NOUN
app01-10367	103	25	proceedings	proceeding	NOUN
app01-10367	103	26	(	(	PUNCT
app01-10367	103	27	a	a	X
app01-10367	103	28	)	)	PUNCT
app01-10367	103	29	micro	micro	ADJ
app01-10367	103	30	-	-	ADJ
app01-10367	103	31	beam	beam	ADJ
app01-10367	103	32	undercut	undercut	ADJ
app01-10367	103	33	performed	perform	VERB
app01-10367	103	34	using	use	VERB
app01-10367	103	35	ib	ib	NOUN
app01-10367	103	36	∼	∼	NOUN
app01-10367	103	37	7	7	NUM
app01-10367	103	38	na	na	PART
app01-10367	103	39	(	(	PUNCT
app01-10367	103	40	b	b	NOUN
app01-10367	103	41	)	)	PUNCT
app01-10367	103	42	micro	micro	ADJ
app01-10367	103	43	-	-	ADJ
app01-10367	103	44	beam	beam	ADJ
app01-10367	103	45	undercut	undercut	ADJ
app01-10367	103	46	performed	perform	VERB
app01-10367	103	47	using	use	VERB
app01-10367	103	48	ib	ib	NOUN
app01-10367	103	49	∼	∼	NOUN
app01-10367	103	50	1	1	NUM
app01-10367	103	51	na	na	PART
app01-10367	103	52	figure	figure	VERB
app01-10367	103	53	5	5	NUM
app01-10367	103	54	.	.	PUNCT
app01-10367	103	55	comparison	comparison	NOUN
app01-10367	103	56	of	of	ADP
app01-10367	103	57	micro	micro	NOUN
app01-10367	103	58	-	-	NOUN
app01-10367	103	59	beams	beam	NOUN
app01-10367	103	60	undercut	undercut	ADJ
app01-10367	103	61	prepared	prepared	ADJ
app01-10367	103	62	in	in	ADP
app01-10367	103	63	portlandite	portlandite	ADJ
app01-10367	103	64	using	use	VERB
app01-10367	103	65	ion	ion	NOUN
app01-10367	103	66	beam	beam	NOUN
app01-10367	103	67	current	current	NOUN
app01-10367	103	68	of	of	ADP
app01-10367	103	69	(	(	PUNCT
app01-10367	103	70	a	a	X
app01-10367	103	71	)	)	PUNCT
app01-10367	103	72	7	7	NUM
app01-10367	103	73	na	na	NOUN
app01-10367	103	74	and	and	CCONJ
app01-10367	103	75	(	(	PUNCT
app01-10367	103	76	b	b	NOUN
app01-10367	103	77	)	)	PUNCT
app01-10367	103	78	1	1	NUM
app01-10367	103	79	na	na	NOUN
app01-10367	103	80	.	.	PUNCT
app01-10367	103	81	image	image	NOUN
app01-10367	103	82	shift	shift	NOUN
app01-10367	103	83	was	be	AUX
app01-10367	103	84	used	use	VERB
app01-10367	103	85	,	,	PUNCT
app01-10367	103	86	it	it	PRON
app01-10367	103	87	could	could	AUX
app01-10367	103	88	not	not	PART
app01-10367	103	89	always	always	ADV
app01-10367	103	90	compensate	compensate	VERB
app01-10367	103	91	for	for	ADP
app01-10367	103	92	the	the	DET
app01-10367	103	93	drift	drift	NOUN
app01-10367	103	94	.	.	PUNCT
app01-10367	104	1	in	in	ADP
app01-10367	104	2	such	such	ADJ
app01-10367	104	3	cases	case	NOUN
app01-10367	104	4	,	,	PUNCT
app01-10367	104	5	additional	additional	ADJ
app01-10367	104	6	polishing	polishing	NOUN
app01-10367	104	7	steps	step	NOUN
app01-10367	104	8	were	be	AUX
app01-10367	104	9	added	add	VERB
app01-10367	104	10	to	to	PART
app01-10367	104	11	achieve	achieve	VERB
app01-10367	104	12	the	the	DET
app01-10367	104	13	desired	desire	VERB
app01-10367	104	14	micro	micro	ADJ
app01-10367	104	15	-	-	ADJ
app01-10367	104	16	beam	beam	ADJ
app01-10367	104	17	geometry	geometry	NOUN
app01-10367	104	18	.	.	PUNCT
app01-10367	105	1	see	see	VERB
app01-10367	105	2	figure	figure	NOUN
app01-10367	105	3	6(a	6(a	NUM
app01-10367	105	4	)	)	PUNCT
app01-10367	105	5	.	.	PUNCT
app01-10367	106	1	3.5	3.5	NUM
app01-10367	106	2	.	.	PUNCT
app01-10367	106	3	effect	effect	NOUN
app01-10367	106	4	of	of	ADP
app01-10367	106	5	moisture	moisture	NOUN
app01-10367	106	6	cycling	cycling	NOUN
app01-10367	106	7	hydration	hydration	NOUN
app01-10367	106	8	and	and	CCONJ
app01-10367	106	9	dehydration	dehydration	NOUN
app01-10367	106	10	processes	process	NOUN
app01-10367	106	11	in	in	ADP
app01-10367	106	12	c	c	NOUN
app01-10367	106	13	–	–	PUNCT
app01-10367	106	14	s	s	X
app01-10367	106	15	–	–	PUNCT
app01-10367	106	16	h	h	NOUN
app01-10367	106	17	gel	gel	NOUN
app01-10367	106	18	are	be	AUX
app01-10367	106	19	associated	associate	VERB
app01-10367	106	20	with	with	ADP
app01-10367	106	21	volumetric	volumetric	NOUN
app01-10367	106	22	and	and	CCONJ
app01-10367	106	23	mechanical	mechanical	ADJ
app01-10367	106	24	changes	change	NOUN
app01-10367	106	25	in	in	ADP
app01-10367	106	26	the	the	DET
app01-10367	106	27	gel	gel	NOUN
app01-10367	106	28	[	[	X
app01-10367	106	29	13	13	NUM
app01-10367	106	30	]	]	PUNCT
app01-10367	106	31	.	.	PUNCT
app01-10367	107	1	the	the	DET
app01-10367	107	2	changes	change	NOUN
app01-10367	107	3	of	of	ADP
app01-10367	107	4	water	water	NOUN
app01-10367	107	5	partial	partial	ADJ
app01-10367	107	6	pressure	pressure	NOUN
app01-10367	107	7	in	in	ADP
app01-10367	107	8	the	the	DET
app01-10367	107	9	sample	sample	NOUN
app01-10367	107	10	between	between	ADP
app01-10367	107	11	the	the	DET
app01-10367	107	12	storage	storage	NOUN
app01-10367	107	13	in	in	ADP
app01-10367	107	14	the	the	DET
app01-10367	107	15	given	give	VERB
app01-10367	107	16	atmosphere	atmosphere	NOUN
app01-10367	107	17	and	and	CCONJ
app01-10367	107	18	micro	micro	ADJ
app01-10367	107	19	-	-	ADJ
app01-10367	107	20	beam	beam	ADJ
app01-10367	107	21	preparation	preparation	NOUN
app01-10367	107	22	in	in	ADP
app01-10367	107	23	the	the	DET
app01-10367	107	24	sem	sem	NOUN
app01-10367	107	25	evacuated	evacuate	VERB
app01-10367	107	26	chamber	chamber	NOUN
app01-10367	107	27	induce	induce	VERB
app01-10367	107	28	high	high	ADJ
app01-10367	107	29	artificial	artificial	ADJ
app01-10367	107	30	stress	stress	NOUN
app01-10367	107	31	in	in	ADP
app01-10367	107	32	the	the	DET
app01-10367	107	33	samples	sample	NOUN
app01-10367	107	34	,	,	PUNCT
app01-10367	107	35	see	see	VERB
app01-10367	107	36	figure	figure	NOUN
app01-10367	107	37	7	7	NUM
app01-10367	107	38	.	.	PUNCT
app01-10367	108	1	it	it	PRON
app01-10367	108	2	was	be	AUX
app01-10367	108	3	found	find	VERB
app01-10367	108	4	that	that	SCONJ
app01-10367	108	5	week	week	NOUN
app01-10367	108	6	-	-	PUNCT
app01-10367	108	7	long	long	ADJ
app01-10367	108	8	storage	storage	NOUN
app01-10367	108	9	of	of	ADP
app01-10367	108	10	the	the	DET
app01-10367	108	11	samples	sample	NOUN
app01-10367	108	12	in	in	ADP
app01-10367	108	13	the	the	DET
app01-10367	108	14	vacuum	vacuum	NOUN
app01-10367	108	15	of	of	ADP
app01-10367	108	16	sem	sem	NOUN
app01-10367	108	17	(	(	PUNCT
app01-10367	108	18	p	p	NOUN
app01-10367	108	19	∼	∼	NOUN
app01-10367	108	20	10−6	10−6	NUM
app01-10367	108	21	pa	pa	NOUN
app01-10367	108	22	)	)	PUNCT
app01-10367	108	23	causes	cause	VERB
app01-10367	108	24	significantly	significantly	ADV
app01-10367	108	25	fewer	few	ADJ
app01-10367	108	26	cracks	crack	NOUN
app01-10367	108	27	in	in	ADP
app01-10367	108	28	the	the	DET
app01-10367	108	29	samples	sample	NOUN
app01-10367	108	30	than	than	ADP
app01-10367	108	31	atmospheric	atmospheric	ADJ
app01-10367	108	32	storage	storage	NOUN
app01-10367	108	33	overnight	overnight	ADV
app01-10367	108	34	between	between	ADP
app01-10367	108	35	fib	fib	ADJ
app01-10367	108	36	procedures	procedure	NOUN
app01-10367	108	37	.	.	PUNCT
app01-10367	109	1	attention	attention	NOUN
app01-10367	109	2	must	must	AUX
app01-10367	109	3	be	be	AUX
app01-10367	109	4	given	give	VERB
app01-10367	109	5	to	to	ADP
app01-10367	109	6	this	this	DET
app01-10367	109	7	effect	effect	NOUN
app01-10367	109	8	when	when	SCONJ
app01-10367	109	9	transporting	transport	VERB
app01-10367	109	10	ready	ready	ADJ
app01-10367	109	11	-	-	PUNCT
app01-10367	109	12	made	make	VERB
app01-10367	109	13	micro	micro	NOUN
app01-10367	109	14	-	-	NOUN
app01-10367	109	15	beams	beam	NOUN
app01-10367	109	16	for	for	ADP
app01-10367	109	17	nanoindentation	nanoindentation	NOUN
app01-10367	109	18	testing	testing	NOUN
app01-10367	109	19	to	to	ADP
app01-10367	109	20	another	another	DET
app01-10367	109	21	laboratory	laboratory	NOUN
app01-10367	109	22	.	.	PUNCT
app01-10367	110	1	we	we	PRON
app01-10367	110	2	recommend	recommend	VERB
app01-10367	110	3	transporting	transport	VERB
app01-10367	110	4	and	and	CCONJ
app01-10367	110	5	storing	store	VERB
app01-10367	110	6	samples	sample	NOUN
app01-10367	110	7	in	in	ADP
app01-10367	110	8	a	a	DET
app01-10367	110	9	vacuum	vacuum	NOUN
app01-10367	110	10	to	to	PART
app01-10367	110	11	mitigate	mitigate	VERB
app01-10367	110	12	potential	potential	ADJ
app01-10367	110	13	issues	issue	NOUN
app01-10367	110	14	.	.	PUNCT
app01-10367	111	1	4	4	X
app01-10367	111	2	.	.	X
app01-10367	111	3	conclusions	conclusion	NOUN
app01-10367	111	4	the	the	DET
app01-10367	111	5	preparation	preparation	NOUN
app01-10367	111	6	of	of	ADP
app01-10367	111	7	micro	micro	NOUN
app01-10367	111	8	-	-	NOUN
app01-10367	111	9	beams	beam	NOUN
app01-10367	111	10	in	in	ADP
app01-10367	111	11	cement	cement	NOUN
app01-10367	111	12	paste	paste	NOUN
app01-10367	111	13	is	be	AUX
app01-10367	111	14	a	a	DET
app01-10367	111	15	time	time	NOUN
app01-10367	111	16	-	-	PUNCT
app01-10367	111	17	consuming	consume	VERB
app01-10367	111	18	process	process	NOUN
app01-10367	111	19	with	with	ADP
app01-10367	111	20	a	a	DET
app01-10367	111	21	significant	significant	ADJ
app01-10367	111	22	failure	failure	NOUN
app01-10367	111	23	rate	rate	NOUN
app01-10367	111	24	.	.	PUNCT
app01-10367	112	1	during	during	ADP
app01-10367	112	2	the	the	DET
app01-10367	112	3	preparation	preparation	NOUN
app01-10367	112	4	of	of	ADP
app01-10367	112	5	beams	beam	NOUN
app01-10367	112	6	for	for	ADP
app01-10367	112	7	nanoindentation	nanoindentation	NOUN
app01-10367	112	8	testing	testing	NOUN
app01-10367	112	9	using	use	VERB
app01-10367	112	10	fib	fib	ADJ
app01-10367	112	11	techniques	technique	NOUN
app01-10367	112	12	,	,	PUNCT
app01-10367	112	13	several	several	ADJ
app01-10367	112	14	critical	critical	ADJ
app01-10367	112	15	parameters	parameter	NOUN
app01-10367	112	16	require	require	VERB
app01-10367	112	17	careful	careful	ADJ
app01-10367	112	18	assessment	assessment	NOUN
app01-10367	112	19	to	to	PART
app01-10367	112	20	ensure	ensure	VERB
app01-10367	112	21	the	the	DET
app01-10367	112	22	(	(	PUNCT
app01-10367	112	23	a	a	NOUN
app01-10367	112	24	)	)	PUNCT
app01-10367	112	25	micro	micro	NOUN
app01-10367	112	26	-	-	NOUN
app01-10367	112	27	beam	beam	NOUN
app01-10367	112	28	in	in	ADP
app01-10367	112	29	op	op	NOUN
app01-10367	112	30	phase	phase	NOUN
app01-10367	112	31	recovered	recover	VERB
app01-10367	112	32	by	by	ADP
app01-10367	112	33	additional	additional	ADJ
app01-10367	112	34	polishing	polishing	NOUN
app01-10367	112	35	.	.	PUNCT
app01-10367	113	1	(	(	PUNCT
app01-10367	113	2	b	b	X
app01-10367	113	3	)	)	PUNCT
app01-10367	113	4	micro	micro	NOUN
app01-10367	113	5	-	-	NOUN
app01-10367	113	6	beam	beam	NOUN
app01-10367	113	7	prepared	prepare	VERB
app01-10367	113	8	in	in	ADP
app01-10367	113	9	ip	ip	DET
app01-10367	113	10	phase	phase	NOUN
app01-10367	113	11	.	.	PUNCT
app01-10367	114	1	figure	figure	NOUN
app01-10367	114	2	6	6	NUM
app01-10367	114	3	.	.	PUNCT
app01-10367	114	4	comparison	comparison	NOUN
app01-10367	114	5	of	of	ADP
app01-10367	114	6	micro	micro	NOUN
app01-10367	114	7	-	-	NOUN
app01-10367	114	8	beams	beam	NOUN
app01-10367	114	9	(	(	PUNCT
app01-10367	114	10	a	a	PRON
app01-10367	114	11	)	)	PUNCT
app01-10367	114	12	affected	affected	ADJ
app01-10367	114	13	and	and	CCONJ
app01-10367	114	14	(	(	PUNCT
app01-10367	114	15	b	b	NOUN
app01-10367	114	16	)	)	PUNCT
app01-10367	114	17	not	not	PART
app01-10367	114	18	affected	affect	VERB
app01-10367	114	19	by	by	ADP
app01-10367	114	20	excessive	excessive	ADJ
app01-10367	114	21	sample	sample	NOUN
app01-10367	114	22	drift	drift	NOUN
app01-10367	114	23	.	.	PUNCT
app01-10367	115	1	figure	figure	NOUN
app01-10367	115	2	7	7	NUM
app01-10367	115	3	.	.	PUNCT
app01-10367	116	1	sample	sample	NOUN
app01-10367	116	2	surface	surface	NOUN
app01-10367	116	3	damaged	damage	VERB
app01-10367	116	4	by	by	ADP
app01-10367	116	5	moisture	moisture	NOUN
app01-10367	116	6	cycling	cycling	NOUN
app01-10367	116	7	.	.	PUNCT
app01-10367	117	1	procedure	procedure	NOUN
app01-10367	117	2	’s	’s	PART
app01-10367	117	3	success	success	NOUN
app01-10367	117	4	.	.	PUNCT
app01-10367	118	1	the	the	DET
app01-10367	118	2	general	general	ADJ
app01-10367	118	3	recommendations	recommendation	NOUN
app01-10367	118	4	are	be	AUX
app01-10367	118	5	given	give	VERB
app01-10367	118	6	as	as	ADP
app01-10367	118	7	:	:	PUNCT
app01-10367	118	8	•	•	NUM
app01-10367	118	9	parameters	parameter	NOUN
app01-10367	118	10	bi	bi	NOUN
app01-10367	118	11	7	7	NUM
app01-10367	118	12	of	of	ADP
app01-10367	118	13	the	the	DET
app01-10367	118	14	electron	electron	NOUN
app01-10367	118	15	beam	beam	NOUN
app01-10367	118	16	equal	equal	ADJ
app01-10367	118	17	to	to	PART
app01-10367	118	18	electron	electron	VERB
app01-10367	118	19	current	current	ADJ
app01-10367	118	20	ie	ie	X
app01-10367	118	21	∼	∼	X
app01-10367	118	22	70	70	NUM
app01-10367	118	23	pa	pa	NOUN
app01-10367	118	24	combined	combine	VERB
app01-10367	118	25	with	with	ADP
app01-10367	118	26	highergain	highergain	NOUN
app01-10367	118	27	se	se	X
app01-10367	118	28	and	and	CCONJ
app01-10367	118	29	in	in	ADP
app01-10367	118	30	-	-	PUNCT
app01-10367	118	31	beam	beam	NOUN
app01-10367	118	32	bse	bse	NOUN
app01-10367	118	33	detectors	detector	NOUN
app01-10367	118	34	are	be	AUX
app01-10367	118	35	suitable	suitable	ADJ
app01-10367	118	36	to	to	PART
app01-10367	118	37	use	use	VERB
app01-10367	118	38	to	to	PART
app01-10367	118	39	avoid	avoid	VERB
app01-10367	118	40	surface	surface	NOUN
app01-10367	118	41	overheating	overheat	VERB
app01-10367	118	42	and	and	CCONJ
app01-10367	118	43	to	to	PART
app01-10367	118	44	ensure	ensure	VERB
app01-10367	118	45	reasonable	reasonable	ADJ
app01-10367	118	46	image	image	NOUN
app01-10367	118	47	quality	quality	NOUN
app01-10367	118	48	.	.	PUNCT
app01-10367	119	1	additionally	additionally	ADV
app01-10367	119	2	,	,	PUNCT
app01-10367	119	3	continuous	continuous	ADJ
app01-10367	119	4	image	image	NOUN
app01-10367	119	5	acquisition	acquisition	NOUN
app01-10367	119	6	should	should	AUX
app01-10367	119	7	be	be	AUX
app01-10367	119	8	turned	turn	VERB
app01-10367	119	9	off	off	ADP
app01-10367	119	10	during	during	ADP
app01-10367	119	11	the	the	DET
app01-10367	119	12	fib	fib	NOUN
app01-10367	119	13	milling	milling	NOUN
app01-10367	119	14	for	for	ADP
app01-10367	119	15	the	the	DET
app01-10367	119	16	same	same	ADJ
app01-10367	119	17	reason	reason	NOUN
app01-10367	119	18	.	.	PUNCT
app01-10367	120	1	•	•	NUM
app01-10367	120	2	high	high	ADJ
app01-10367	120	3	currents	current	NOUN
app01-10367	120	4	used	use	VERB
app01-10367	120	5	during	during	ADP
app01-10367	120	6	fib	fib	ADJ
app01-10367	120	7	milling	milling	NOUN
app01-10367	120	8	can	can	AUX
app01-10367	120	9	lead	lead	VERB
app01-10367	120	10	to	to	ADP
app01-10367	120	11	excessive	excessive	ADJ
app01-10367	120	12	heat	heat	NOUN
app01-10367	120	13	loading	loading	NOUN
app01-10367	120	14	of	of	ADP
app01-10367	120	15	the	the	DET
app01-10367	120	16	sample	sample	NOUN
app01-10367	120	17	,	,	PUNCT
app01-10367	120	18	resulting	result	VERB
app01-10367	120	19	in	in	ADP
app01-10367	120	20	phase	phase	NOUN
app01-10367	120	21	transformation	transformation	NOUN
app01-10367	120	22	,	,	PUNCT
app01-10367	120	23	visible	visible	ADJ
app01-10367	120	24	bubbles	bubble	NOUN
app01-10367	120	25	or	or	CCONJ
app01-10367	120	26	cracks	crack	NOUN
app01-10367	120	27	on	on	ADP
app01-10367	120	28	the	the	DET
app01-10367	120	29	micro	micro	NOUN
app01-10367	120	30	-	-	NOUN
app01-10367	120	31	beam	beam	ADJ
app01-10367	120	32	,	,	PUNCT
app01-10367	120	33	or	or	CCONJ
app01-10367	120	34	even	even	ADV
app01-10367	120	35	geometry	geometry	NOUN
app01-10367	120	36	changes	change	NOUN
app01-10367	120	37	.	.	PUNCT
app01-10367	121	1	safe	safe	ADJ
app01-10367	121	2	current	current	ADJ
app01-10367	121	3	values	value	NOUN
app01-10367	121	4	for	for	ADP
app01-10367	121	5	different	different	ADJ
app01-10367	121	6	milling	milling	NOUN
app01-10367	121	7	steps	step	NOUN
app01-10367	121	8	of	of	ADP
app01-10367	121	9	portlandite	portlandite	NOUN
app01-10367	121	10	are	be	AUX
app01-10367	121	11	provided	provide	VERB
app01-10367	121	12	in	in	ADP
app01-10367	121	13	table	table	NOUN
app01-10367	121	14	2	2	NUM
app01-10367	121	15	.	.	NOUN
app01-10367	121	16	•	•	NOUN
app01-10367	121	17	to	to	PART
app01-10367	121	18	avoid	avoid	VERB
app01-10367	121	19	image	image	NOUN
app01-10367	121	20	drift	drift	NOUN
app01-10367	121	21	caused	cause	VERB
app01-10367	121	22	by	by	ADP
app01-10367	121	23	charging	charge	VERB
app01-10367	121	24	due	due	ADP
app01-10367	121	25	to	to	ADP
app01-10367	121	26	the	the	DET
app01-10367	121	27	accumulation	accumulation	NOUN
app01-10367	121	28	of	of	ADP
app01-10367	121	29	ga+	ga+	ADJ
app01-10367	121	30	ions	ion	NOUN
app01-10367	121	31	during	during	ADP
app01-10367	121	32	fib	fib	ADJ
app01-10367	121	33	fabrication	fabrication	NOUN
app01-10367	121	34	,	,	PUNCT
app01-10367	121	35	92	92	NUM
app01-10367	121	36	vol	vol	NOUN
app01-10367	121	37	.	.	PUNCT
app01-10367	122	1	50/2024	50/2024	NUM
app01-10367	122	2	fib	fib	ADJ
app01-10367	122	3	procedure	procedure	NOUN
app01-10367	122	4	optimization	optimization	NOUN
app01-10367	122	5	for	for	ADP
app01-10367	122	6	cement	cement	NOUN
app01-10367	122	7	pastes	paste	NOUN
app01-10367	122	8	it	it	PRON
app01-10367	122	9	is	be	AUX
app01-10367	122	10	recommended	recommend	VERB
app01-10367	122	11	to	to	PART
app01-10367	122	12	perform	perform	VERB
app01-10367	122	13	drift	drift	NOUN
app01-10367	122	14	correction	correction	NOUN
app01-10367	122	15	by	by	ADP
app01-10367	122	16	rescanning	rescanne	VERB
app01-10367	122	17	the	the	DET
app01-10367	122	18	measured	measured	ADJ
app01-10367	122	19	area	area	NOUN
app01-10367	122	20	at	at	ADP
app01-10367	122	21	intervals	interval	NOUN
app01-10367	122	22	of	of	ADP
app01-10367	122	23	30	30	NUM
app01-10367	122	24	to	to	PART
app01-10367	122	25	60	60	NUM
app01-10367	122	26	seconds	second	NOUN
app01-10367	122	27	.	.	PUNCT
app01-10367	123	1	•	•	NUM
app01-10367	123	2	cyclic	cyclic	NOUN
app01-10367	123	3	water	water	NOUN
app01-10367	123	4	resaturation	resaturation	NOUN
app01-10367	123	5	of	of	ADP
app01-10367	123	6	the	the	DET
app01-10367	123	7	cement	cement	NOUN
app01-10367	123	8	paste	paste	NOUN
app01-10367	123	9	can	can	AUX
app01-10367	123	10	lead	lead	VERB
app01-10367	123	11	to	to	ADP
app01-10367	123	12	the	the	DET
app01-10367	123	13	creation	creation	NOUN
app01-10367	123	14	of	of	ADP
app01-10367	123	15	a	a	DET
app01-10367	123	16	significant	significant	ADJ
app01-10367	123	17	number	number	NOUN
app01-10367	123	18	of	of	ADP
app01-10367	123	19	microcracks	microcrack	NOUN
app01-10367	123	20	,	,	PUNCT
app01-10367	123	21	potentially	potentially	ADV
app01-10367	123	22	damaging	damage	VERB
app01-10367	123	23	already	already	ADV
app01-10367	123	24	fabricated	fabricate	VERB
app01-10367	123	25	micro	micro	NOUN
app01-10367	123	26	-	-	NOUN
app01-10367	123	27	beams	beam	NOUN
app01-10367	123	28	.	.	PUNCT
app01-10367	124	1	therefore	therefore	ADV
app01-10367	124	2	,	,	PUNCT
app01-10367	124	3	it	it	PRON
app01-10367	124	4	is	be	AUX
app01-10367	124	5	advisable	advisable	ADJ
app01-10367	124	6	to	to	PART
app01-10367	124	7	maintain	maintain	VERB
app01-10367	124	8	the	the	DET
app01-10367	124	9	sample	sample	NOUN
app01-10367	124	10	under	under	ADP
app01-10367	124	11	vacuum	vacuum	NOUN
app01-10367	124	12	conditions	condition	NOUN
app01-10367	124	13	throughout	throughout	ADP
app01-10367	124	14	the	the	DET
app01-10367	124	15	preparation	preparation	NOUN
app01-10367	124	16	and	and	CCONJ
app01-10367	124	17	testing	test	VERB
app01-10367	124	18	phases	phase	NOUN
app01-10367	124	19	to	to	PART
app01-10367	124	20	effectively	effectively	ADV
app01-10367	124	21	mitigate	mitigate	VERB
app01-10367	124	22	these	these	DET
app01-10367	124	23	effects	effect	NOUN
app01-10367	124	24	.	.	PUNCT
app01-10367	125	1	list	list	NOUN
app01-10367	125	2	of	of	ADP
app01-10367	125	3	symbols	symbol	NOUN
app01-10367	125	4	bi	bi	PROPN
app01-10367	125	5	beam	beam	PROPN
app01-10367	125	6	intensity	intensity	PROPN
app01-10367	125	7	index	index	PROPN
app01-10367	125	8	bse	bse	NOUN
app01-10367	125	9	back	back	ADP
app01-10367	125	10	scattered	scatter	VERB
app01-10367	125	11	electron	electron	NOUN
app01-10367	125	12	(	(	PUNCT
app01-10367	125	13	detector	detector	NOUN
app01-10367	125	14	)	)	PUNCT
app01-10367	125	15	db	db	PROPN
app01-10367	125	16	ion	ion	NOUN
app01-10367	125	17	beam	beam	NOUN
app01-10367	125	18	estimated	estimate	VERB
app01-10367	125	19	spot	spot	NOUN
app01-10367	125	20	size	size	NOUN
app01-10367	125	21	[	[	X
app01-10367	125	22	nm	nm	X
app01-10367	125	23	]	]	X
app01-10367	125	24	de	de	X
app01-10367	125	25	electron	electron	NOUN
app01-10367	125	26	beam	beam	NOUN
app01-10367	125	27	estimated	estimate	VERB
app01-10367	125	28	spot	spot	NOUN
app01-10367	125	29	size	size	NOUN
app01-10367	125	30	[	[	X
app01-10367	125	31	nm	nm	X
app01-10367	125	32	]	]	X
app01-10367	125	33	fib	fib	ADJ
app01-10367	125	34	focused	focused	ADJ
app01-10367	125	35	ion	ion	NOUN
app01-10367	125	36	beam	beam	NOUN
app01-10367	125	37	ib	ib	PROPN
app01-10367	125	38	ion	ion	NOUN
app01-10367	125	39	beam	beam	NOUN
app01-10367	125	40	current	current	ADJ
app01-10367	126	1	[	[	X
app01-10367	126	2	a	a	X
app01-10367	126	3	]	]	X
app01-10367	126	4	ie	ie	X
app01-10367	126	5	electron	electron	NOUN
app01-10367	126	6	beam	beam	NOUN
app01-10367	126	7	current	current	ADJ
app01-10367	126	8	[	[	X
app01-10367	126	9	a	a	X
app01-10367	126	10	]	]	X
app01-10367	126	11	ibad	ibad	PROPN
app01-10367	126	12	ion	ion	NOUN
app01-10367	126	13	beam	beam	NOUN
app01-10367	126	14	assisted	assist	VERB
app01-10367	126	15	chemical	chemical	NOUN
app01-10367	126	16	vapour	vapour	NOUN
app01-10367	126	17	deposition	deposition	NOUN
app01-10367	126	18	se	se	ADP
app01-10367	126	19	secondary	secondary	ADJ
app01-10367	126	20	electron	electron	NOUN
app01-10367	126	21	(	(	PUNCT
app01-10367	126	22	detector	detector	NOUN
app01-10367	126	23	)	)	PUNCT
app01-10367	126	24	sem	sem	NOUN
app01-10367	126	25	scanning	scanning	NOUN
app01-10367	126	26	electron	electron	NOUN
app01-10367	126	27	microscope	microscope	NOUN
app01-10367	126	28	ts	ts	ADP
app01-10367	126	29	estimated	estimate	VERB
app01-10367	126	30	process	process	NOUN
app01-10367	126	31	time	time	NOUN
app01-10367	126	32	for	for	SCONJ
app01-10367	126	33	given	give	VERB
app01-10367	126	34	beam	beam	NOUN
app01-10367	126	35	preparation	preparation	NOUN
app01-10367	126	36	step	step	NOUN
app01-10367	127	1	[	[	X
app01-10367	127	2	min	min	X
app01-10367	127	3	]	]	X
app01-10367	127	4	θe	θe	ADP
app01-10367	127	5	sample	sample	NOUN
app01-10367	127	6	tilt	tilt	NOUN
app01-10367	127	7	angle	angle	NOUN
app01-10367	127	8	respective	respective	ADJ
app01-10367	127	9	to	to	ADP
app01-10367	127	10	the	the	DET
app01-10367	127	11	electron	electron	NOUN
app01-10367	127	12	beam	beam	NOUN
app01-10367	127	13	[	[	X
app01-10367	127	14	°	°	X
app01-10367	127	15	]	]	X
app01-10367	127	16	θb	θb	ADP
app01-10367	127	17	sample	sample	PROPN
app01-10367	127	18	tilt	tilt	NOUN
app01-10367	127	19	angle	angle	NOUN
app01-10367	127	20	respective	respective	ADJ
app01-10367	127	21	to	to	ADP
app01-10367	127	22	the	the	DET
app01-10367	127	23	ion	ion	NOUN
app01-10367	127	24	beam	beam	NOUN
app01-10367	128	1	[	[	X
app01-10367	128	2	°	°	X
app01-10367	128	3	]	]	X
app01-10367	128	4	c	c	NOUN
app01-10367	128	5	residual	residual	ADJ
app01-10367	128	6	clinker	clinker	NOUN
app01-10367	128	7	c	c	NOUN
app01-10367	128	8	–	–	PUNCT
app01-10367	128	9	s	s	X
app01-10367	128	10	–	–	PUNCT
app01-10367	128	11	h	h	NOUN
app01-10367	128	12	calcium	calcium	NOUN
app01-10367	128	13	–	–	PUNCT
app01-10367	128	14	silicate	silicate	NOUN
app01-10367	128	15	–	–	PUNCT
app01-10367	128	16	hydrates	hydrate	NOUN
app01-10367	128	17	ch	ch	NOUN
app01-10367	128	18	portlandite	portlandite	VERB
app01-10367	128	19	ip	ip	VERB
app01-10367	128	20	inner	inner	ADJ
app01-10367	128	21	product	product	NOUN
app01-10367	128	22	op	op	NOUN
app01-10367	128	23	outer	outer	ADJ
app01-10367	128	24	product	product	NOUN
app01-10367	128	25	acknowledgements	acknowledgement	NOUN
app01-10367	128	26	this	this	DET
app01-10367	128	27	work	work	NOUN
app01-10367	128	28	was	be	AUX
app01-10367	128	29	financially	financially	ADV
app01-10367	128	30	supported	support	VERB
app01-10367	128	31	by	by	ADP
app01-10367	128	32	the	the	DET
app01-10367	128	33	project	project	NOUN
app01-10367	128	34	of	of	ADP
app01-10367	128	35	the	the	DET
app01-10367	128	36	czech	czech	PROPN
app01-10367	128	37	science	science	NOUN
app01-10367	128	38	foundation	foundation	PROPN
app01-10367	128	39	grant	grant	NOUN
app01-10367	128	40	number	number	NOUN
app01-10367	128	41	23	23	NUM
app01-10367	128	42	-	-	PUNCT
app01-10367	128	43	05435s	05435s	NUM
app01-10367	128	44	.	.	PUNCT
app01-10367	129	1	the	the	DET
app01-10367	129	2	presented	present	VERB
app01-10367	129	3	results	result	NOUN
app01-10367	129	4	were	be	AUX
app01-10367	129	5	obtained	obtain	VERB
app01-10367	129	6	using	use	VERB
app01-10367	129	7	the	the	DET
app01-10367	129	8	cicrr	cicrr	NOUN
app01-10367	129	9	infrastructure	infrastructure	NOUN
app01-10367	129	10	,	,	PUNCT
app01-10367	129	11	which	which	PRON
app01-10367	129	12	is	be	AUX
app01-10367	129	13	financially	financially	ADV
app01-10367	129	14	supported	support	VERB
app01-10367	129	15	by	by	ADP
app01-10367	129	16	the	the	DET
app01-10367	129	17	ministry	ministry	PROPN
app01-10367	129	18	of	of	ADP
app01-10367	129	19	education	education	PROPN
app01-10367	129	20	and	and	CCONJ
app01-10367	129	21	culture	culture	NOUN
app01-10367	129	22	–	–	PUNCT
app01-10367	129	23	project	project	NOUN
app01-10367	129	24	lm2023041	lm2023041	NOUN
app01-10367	129	25	.	.	PUNCT
app01-10367	130	1	references	reference	NOUN
app01-10367	130	2	[	[	X
app01-10367	130	3	1	1	NUM
app01-10367	130	4	]	]	PUNCT
app01-10367	130	5	k.	k.	PROPN
app01-10367	130	6	l.	l.	PROPN
app01-10367	130	7	scrivener	scrivener	PROPN
app01-10367	130	8	.	.	PUNCT
app01-10367	131	1	backscattered	backscatter	VERB
app01-10367	131	2	electron	electron	PROPN
app01-10367	131	3	imaging	imaging	NOUN
app01-10367	131	4	of	of	ADP
app01-10367	131	5	cementitious	cementitious	ADJ
app01-10367	131	6	microstructures	microstructure	NOUN
app01-10367	131	7	:	:	PUNCT
app01-10367	131	8	understanding	understanding	NOUN
app01-10367	131	9	and	and	CCONJ
app01-10367	131	10	quantification	quantification	NOUN
app01-10367	131	11	.	.	PUNCT
app01-10367	132	1	cement	cement	NOUN
app01-10367	132	2	and	and	CCONJ
app01-10367	132	3	concrete	concrete	ADJ
app01-10367	132	4	composites	composite	NOUN
app01-10367	132	5	26(8):935–945	26(8):935–945	NUM
app01-10367	132	6	,	,	PUNCT
app01-10367	132	7	2004	2004	NUM
app01-10367	132	8	.	.	PUNCT
app01-10367	133	1	https	https	NOUN
app01-10367	133	2	:	:	PUNCT
app01-10367	134	1	//doi.org/10.1016	//doi.org/10.1016	PROPN
app01-10367	134	2	/	/	SYM
app01-10367	134	3	j.cemconcomp.2004.02.029	j.cemconcomp.2004.02.029	PROPN
app01-10367	135	1	[	[	X
app01-10367	135	2	2	2	X
app01-10367	135	3	]	]	PUNCT
app01-10367	135	4	j.	j.	PROPN
app01-10367	135	5	němeček	němeček	PROPN
app01-10367	135	6	,	,	PUNCT
app01-10367	135	7	j.	j.	PROPN
app01-10367	135	8	lukeš	lukeš	PROPN
app01-10367	135	9	,	,	PUNCT
app01-10367	135	10	j.	j.	PROPN
app01-10367	135	11	němeček	němeček	PROPN
app01-10367	135	12	.	.	PUNCT
app01-10367	136	1	high	high	ADJ
app01-10367	136	2	-	-	PUNCT
app01-10367	136	3	speed	speed	NOUN
app01-10367	136	4	mechanical	mechanical	ADJ
app01-10367	136	5	mapping	mapping	NOUN
app01-10367	136	6	of	of	ADP
app01-10367	136	7	blended	blend	VERB
app01-10367	136	8	cement	cement	NOUN
app01-10367	136	9	pastes	paste	NOUN
app01-10367	136	10	and	and	CCONJ
app01-10367	136	11	its	its	PRON
app01-10367	136	12	comparison	comparison	NOUN
app01-10367	136	13	with	with	ADP
app01-10367	136	14	standard	standard	ADJ
app01-10367	136	15	modes	mode	NOUN
app01-10367	136	16	of	of	ADP
app01-10367	136	17	nanoindentation	nanoindentation	NOUN
app01-10367	136	18	.	.	PUNCT
app01-10367	137	1	materials	material	NOUN
app01-10367	137	2	today	today	NOUN
app01-10367	137	3	communications	communication	NOUN
app01-10367	137	4	23:100806	23:100806	NOUN
app01-10367	137	5	,	,	PUNCT
app01-10367	137	6	2020	2020	NUM
app01-10367	137	7	.	.	PUNCT
app01-10367	138	1	https://doi.org/10.1016/j.mtcomm.2019.100806	https://doi.org/10.1016/j.mtcomm.2019.100806	NOUN
app01-10367	138	2	[	[	X
app01-10367	138	3	3	3	X
app01-10367	138	4	]	]	X
app01-10367	138	5	w.	w.	PROPN
app01-10367	138	6	c.	c.	PROPN
app01-10367	138	7	oliver	oliver	PROPN
app01-10367	138	8	,	,	PUNCT
app01-10367	138	9	g.	g.	PROPN
app01-10367	138	10	m.	m.	PROPN
app01-10367	138	11	pharr	pharr	PROPN
app01-10367	138	12	.	.	PUNCT
app01-10367	139	1	an	an	DET
app01-10367	139	2	improved	improved	ADJ
app01-10367	139	3	technique	technique	NOUN
app01-10367	139	4	for	for	ADP
app01-10367	139	5	determining	determine	VERB
app01-10367	139	6	hardness	hardness	ADJ
app01-10367	139	7	and	and	CCONJ
app01-10367	139	8	elastic	elastic	ADJ
app01-10367	139	9	modulus	modulus	NOUN
app01-10367	139	10	using	use	VERB
app01-10367	139	11	load	load	NOUN
app01-10367	139	12	and	and	CCONJ
app01-10367	139	13	displacement	displacement	ADJ
app01-10367	139	14	sensing	sense	VERB
app01-10367	139	15	indentation	indentation	NOUN
app01-10367	139	16	experiments	experiment	NOUN
app01-10367	139	17	.	.	PUNCT
app01-10367	140	1	journal	journal	NOUN
app01-10367	140	2	of	of	ADP
app01-10367	140	3	materials	material	NOUN
app01-10367	140	4	research	research	NOUN
app01-10367	140	5	7(6):1564–1583	7(6):1564–1583	NOUN
app01-10367	140	6	,	,	PUNCT
app01-10367	140	7	1992	1992	NUM
app01-10367	140	8	.	.	PUNCT
app01-10367	141	1	https://doi.org/10.1557/jmr.1992.1564	https://doi.org/10.1557/jmr.1992.1564	PROPN
app01-10367	142	1	[	[	X
app01-10367	142	2	4	4	NUM
app01-10367	142	3	]	]	X
app01-10367	142	4	c.	c.	PROPN
app01-10367	142	5	hu	hu	PROPN
app01-10367	142	6	,	,	PUNCT
app01-10367	142	7	z.	z.	PROPN
app01-10367	142	8	li	li	PROPN
app01-10367	142	9	.	.	PUNCT
app01-10367	143	1	a	a	DET
app01-10367	143	2	review	review	NOUN
app01-10367	143	3	on	on	ADP
app01-10367	143	4	the	the	DET
app01-10367	143	5	mechanical	mechanical	ADJ
app01-10367	143	6	properties	property	NOUN
app01-10367	143	7	of	of	ADP
app01-10367	143	8	cement	cement	NOUN
app01-10367	143	9	-	-	PUNCT
app01-10367	143	10	based	base	VERB
app01-10367	143	11	materials	material	NOUN
app01-10367	143	12	measured	measure	VERB
app01-10367	143	13	by	by	ADP
app01-10367	143	14	nanoindentation	nanoindentation	NOUN
app01-10367	143	15	.	.	PUNCT
app01-10367	144	1	construction	construction	NOUN
app01-10367	144	2	and	and	CCONJ
app01-10367	144	3	building	building	NOUN
app01-10367	144	4	materials	material	NOUN
app01-10367	144	5	90:80–90	90:80–90	NUM
app01-10367	144	6	,	,	PUNCT
app01-10367	144	7	2015	2015	NUM
app01-10367	144	8	.	.	PUNCT
app01-10367	145	1	https	https	NOUN
app01-10367	145	2	:	:	PUNCT
app01-10367	145	3	//doi.org/10.1016	//doi.org/10.1016	PROPN
app01-10367	145	4	/	/	SYM
app01-10367	145	5	j.conbuildmat.2015.05.008	j.conbuildmat.2015.05.008	NOUN
app01-10367	145	6	[	[	X
app01-10367	145	7	5	5	NUM
app01-10367	145	8	]	]	PUNCT
app01-10367	145	9	z.	z.	PROPN
app01-10367	145	10	luo	luo	PROPN
app01-10367	145	11	,	,	PUNCT
app01-10367	145	12	w.	w.	PROPN
app01-10367	145	13	li	li	PROPN
app01-10367	145	14	,	,	PUNCT
app01-10367	145	15	k.	k.	PROPN
app01-10367	145	16	wang	wang	PROPN
app01-10367	145	17	,	,	PUNCT
app01-10367	145	18	s.	s.	PROPN
app01-10367	145	19	p.	p.	PROPN
app01-10367	145	20	shah	shah	PROPN
app01-10367	145	21	.	.	PUNCT
app01-10367	146	1	research	research	NOUN
app01-10367	146	2	progress	progress	NOUN
app01-10367	146	3	in	in	ADP
app01-10367	146	4	advanced	advanced	ADJ
app01-10367	146	5	nanomechanical	nanomechanical	ADJ
app01-10367	146	6	characterization	characterization	NOUN
app01-10367	146	7	of	of	ADP
app01-10367	146	8	cement	cement	NOUN
app01-10367	146	9	-	-	PUNCT
app01-10367	146	10	based	base	VERB
app01-10367	146	11	materials	material	NOUN
app01-10367	146	12	.	.	PUNCT
app01-10367	147	1	cement	cement	NOUN
app01-10367	147	2	and	and	CCONJ
app01-10367	147	3	concrete	concrete	ADJ
app01-10367	147	4	composites	composite	NOUN
app01-10367	147	5	94:277–295	94:277–295	NUM
app01-10367	147	6	,	,	PUNCT
app01-10367	147	7	2018	2018	NUM
app01-10367	147	8	.	.	PUNCT
app01-10367	148	1	https	https	NOUN
app01-10367	148	2	:	:	PUNCT
app01-10367	149	1	//doi.org/10.1016	//doi.org/10.1016	PROPN
app01-10367	149	2	/	/	SYM
app01-10367	149	3	j.cemconcomp.2018.09.016	j.cemconcomp.2018.09.016	PROPN
app01-10367	150	1	[	[	X
app01-10367	150	2	6	6	NUM
app01-10367	150	3	]	]	PUNCT
app01-10367	150	4	r.	r.	PROPN
app01-10367	150	5	shahrin	shahrin	PROPN
app01-10367	150	6	,	,	PUNCT
app01-10367	150	7	c.	c.	PROPN
app01-10367	150	8	p.	p.	PROPN
app01-10367	150	9	bobko	bobko	NOUN
app01-10367	150	10	.	.	PUNCT
app01-10367	151	1	micropillar	micropillar	ADJ
app01-10367	151	2	compression	compression	NOUN
app01-10367	151	3	investigation	investigation	NOUN
app01-10367	151	4	of	of	ADP
app01-10367	151	5	size	size	NOUN
app01-10367	151	6	effect	effect	NOUN
app01-10367	151	7	on	on	ADP
app01-10367	151	8	microscale	microscale	ADJ
app01-10367	151	9	strength	strength	NOUN
app01-10367	151	10	and	and	CCONJ
app01-10367	151	11	failure	failure	NOUN
app01-10367	151	12	mechanism	mechanism	NOUN
app01-10367	151	13	of	of	ADP
app01-10367	151	14	calcium	calcium	NOUN
app01-10367	151	15	-	-	PUNCT
app01-10367	151	16	silicate	silicate	NOUN
app01-10367	151	17	-	-	PUNCT
app01-10367	151	18	hydrates	hydrate	NOUN
app01-10367	151	19	(	(	PUNCT
app01-10367	151	20	c	c	X
app01-10367	151	21	-	-	PUNCT
app01-10367	151	22	s	s	NOUN
app01-10367	151	23	-	-	NOUN
app01-10367	151	24	h	h	NOUN
app01-10367	151	25	)	)	PUNCT
app01-10367	151	26	in	in	ADP
app01-10367	151	27	cement	cement	NOUN
app01-10367	151	28	paste	paste	NOUN
app01-10367	151	29	.	.	PUNCT
app01-10367	152	1	cement	cement	NOUN
app01-10367	152	2	and	and	CCONJ
app01-10367	152	3	concrete	concrete	ADJ
app01-10367	152	4	research	research	NOUN
app01-10367	152	5	125:105863	125:105863	NUM
app01-10367	152	6	,	,	PUNCT
app01-10367	152	7	2019	2019	NUM
app01-10367	152	8	.	.	PUNCT
app01-10367	153	1	https://doi.org/10.1016/j.cemconres.2019.105863	https://doi.org/10.1016/j.cemconres.2019.105863	ADJ
app01-10367	153	2	[	[	X
app01-10367	153	3	7	7	NUM
app01-10367	153	4	]	]	X
app01-10367	153	5	c.	c.	NOUN
app01-10367	153	6	puttbach	puttbach	NOUN
app01-10367	153	7	,	,	PUNCT
app01-10367	153	8	g.	g.	PROPN
app01-10367	153	9	s.	s.	PROPN
app01-10367	153	10	prinz	prinz	PROPN
app01-10367	153	11	,	,	PUNCT
app01-10367	153	12	c.	c.	PROPN
app01-10367	153	13	d.	d.	PROPN
app01-10367	153	14	murray	murray	PROPN
app01-10367	153	15	.	.	PUNCT
app01-10367	154	1	strength	strength	NOUN
app01-10367	154	2	and	and	CCONJ
app01-10367	154	3	stiffness	stiffness	ADJ
app01-10367	154	4	characterization	characterization	NOUN
app01-10367	154	5	of	of	ADP
app01-10367	154	6	ultra	ultra	ADJ
app01-10367	154	7	-	-	ADJ
app01-10367	154	8	high	high	ADJ
app01-10367	154	9	performance	performance	NOUN
app01-10367	154	10	concrete	concrete	NOUN
app01-10367	154	11	(	(	PUNCT
app01-10367	154	12	uhpc	uhpc	NOUN
app01-10367	154	13	)	)	PUNCT
app01-10367	154	14	cement	cement	NOUN
app01-10367	154	15	paste	paste	NOUN
app01-10367	154	16	phases	phase	NOUN
app01-10367	154	17	through	through	ADP
app01-10367	154	18	in	in	ADP
app01-10367	154	19	-	-	PUNCT
app01-10367	154	20	situ	situ	NOUN
app01-10367	154	21	micro	micro	ADJ
app01-10367	154	22	-	-	ADJ
app01-10367	154	23	mechanical	mechanical	ADJ
app01-10367	154	24	testing	testing	NOUN
app01-10367	154	25	.	.	PUNCT
app01-10367	155	1	cement	cement	NOUN
app01-10367	155	2	and	and	CCONJ
app01-10367	155	3	concrete	concrete	ADJ
app01-10367	155	4	composites	composite	NOUN
app01-10367	155	5	149:105520	149:105520	NUM
app01-10367	155	6	,	,	PUNCT
app01-10367	155	7	2024	2024	NUM
app01-10367	155	8	.	.	PUNCT
app01-10367	156	1	https	https	NOUN
app01-10367	156	2	:	:	PUNCT
app01-10367	156	3	//doi.org/10.1016	//doi.org/10.1016	PROPN
app01-10367	156	4	/	/	SYM
app01-10367	156	5	j.cemconcomp.2024.105520	j.cemconcomp.2024.105520	NOUN
app01-10367	157	1	[	[	X
app01-10367	157	2	8	8	NUM
app01-10367	157	3	]	]	PUNCT
app01-10367	157	4	j.	j.	PROPN
app01-10367	157	5	němeček	němeček	PROPN
app01-10367	157	6	,	,	PUNCT
app01-10367	157	7	v.	v.	ADP
app01-10367	157	8	králík	králík	PROPN
app01-10367	157	9	,	,	PUNCT
app01-10367	157	10	v.	v.	PROPN
app01-10367	157	11	šmilauer	šmilauer	PROPN
app01-10367	157	12	,	,	PUNCT
app01-10367	157	13	et	et	PROPN
app01-10367	157	14	al	al	PROPN
app01-10367	157	15	.	.	PROPN
app01-10367	157	16	tensile	tensile	NOUN
app01-10367	157	17	strength	strength	NOUN
app01-10367	157	18	of	of	ADP
app01-10367	157	19	hydrated	hydrated	ADJ
app01-10367	157	20	cement	cement	NOUN
app01-10367	157	21	paste	paste	NOUN
app01-10367	157	22	phases	phase	NOUN
app01-10367	157	23	assessed	assess	VERB
app01-10367	157	24	by	by	ADP
app01-10367	157	25	micro	micro	ADJ
app01-10367	157	26	-	-	ADJ
app01-10367	157	27	bending	bend	VERB
app01-10367	157	28	tests	test	NOUN
app01-10367	157	29	and	and	CCONJ
app01-10367	157	30	nanoindentation	nanoindentation	NOUN
app01-10367	157	31	.	.	PUNCT
app01-10367	158	1	cement	cement	NOUN
app01-10367	158	2	and	and	CCONJ
app01-10367	158	3	concrete	concrete	ADJ
app01-10367	158	4	composites	composite	NOUN
app01-10367	158	5	73:164–173	73:164–173	NUM
app01-10367	158	6	,	,	PUNCT
app01-10367	158	7	2016	2016	NUM
app01-10367	158	8	.	.	PUNCT
app01-10367	159	1	https	https	NOUN
app01-10367	159	2	:	:	PUNCT
app01-10367	160	1	//doi.org/10.1016	//doi.org/10.1016	PROPN
app01-10367	160	2	/	/	SYM
app01-10367	160	3	j.cemconcomp.2016.07.010	j.cemconcomp.2016.07.010	NOUN
app01-10367	161	1	[	[	X
app01-10367	161	2	9	9	X
app01-10367	161	3	]	]	PUNCT
app01-10367	161	4	j.	j.	PROPN
app01-10367	161	5	němeček	němeček	PROPN
app01-10367	161	6	,	,	PUNCT
app01-10367	161	7	j.	j.	PROPN
app01-10367	161	8	maňák	maňák	PROPN
app01-10367	161	9	,	,	PUNCT
app01-10367	161	10	j.	j.	PROPN
app01-10367	161	11	němeček	němeček	PROPN
app01-10367	161	12	,	,	PUNCT
app01-10367	161	13	t.	t.	PROPN
app01-10367	161	14	krejčí	krejčí	PROPN
app01-10367	161	15	.	.	PUNCT
app01-10367	162	1	effect	effect	NOUN
app01-10367	162	2	of	of	ADP
app01-10367	162	3	vacuum	vacuum	NOUN
app01-10367	162	4	and	and	CCONJ
app01-10367	162	5	focused	focused	ADJ
app01-10367	162	6	ion	ion	NOUN
app01-10367	162	7	beam	beam	NOUN
app01-10367	162	8	generated	generate	VERB
app01-10367	162	9	heat	heat	NOUN
app01-10367	162	10	on	on	ADP
app01-10367	162	11	fracture	fracture	NOUN
app01-10367	162	12	properties	property	NOUN
app01-10367	162	13	of	of	ADP
app01-10367	162	14	hydrated	hydrated	ADJ
app01-10367	162	15	cement	cement	NOUN
app01-10367	162	16	paste	paste	NOUN
app01-10367	162	17	.	.	PUNCT
app01-10367	163	1	cement	cement	NOUN
app01-10367	163	2	and	and	CCONJ
app01-10367	163	3	concrete	concrete	ADJ
app01-10367	163	4	composites	composite	NOUN
app01-10367	163	5	100:139–149	100:139–149	NUM
app01-10367	163	6	,	,	PUNCT
app01-10367	163	7	2019	2019	NUM
app01-10367	163	8	.	.	PUNCT
app01-10367	164	1	https	https	NOUN
app01-10367	164	2	:	:	PUNCT
app01-10367	165	1	//doi.org/10.1016	//doi.org/10.1016	PROPN
app01-10367	165	2	/	/	SYM
app01-10367	165	3	j.cemconcomp.2019.03.027	j.cemconcomp.2019.03.027	PRON
app01-10367	165	4	[	[	X
app01-10367	165	5	10	10	NUM
app01-10367	165	6	]	]	PUNCT
app01-10367	165	7	j.	j.	PROPN
app01-10367	165	8	němeček	němeček	PROPN
app01-10367	165	9	,	,	PUNCT
app01-10367	165	10	p.	p.	PROPN
app01-10367	165	11	trávníček	trávníček	PROPN
app01-10367	165	12	,	,	PUNCT
app01-10367	165	13	m.	m.	NOUN
app01-10367	165	14	keppert	keppert	PROPN
app01-10367	165	15	,	,	PUNCT
app01-10367	165	16	et	et	PROPN
app01-10367	165	17	al	al	PROPN
app01-10367	165	18	.	.	PROPN
app01-10367	166	1	nanomechanical	nanomechanical	ADJ
app01-10367	166	2	analysis	analysis	NOUN
app01-10367	166	3	of	of	ADP
app01-10367	166	4	gamma	gamma	NOUN
app01-10367	166	5	-	-	PUNCT
app01-10367	166	6	irradiated	irradiate	VERB
app01-10367	166	7	cement	cement	NOUN
app01-10367	166	8	paste	paste	NOUN
app01-10367	166	9	exposed	expose	VERB
app01-10367	166	10	to	to	ADP
app01-10367	166	11	different	different	ADJ
app01-10367	166	12	humidities	humidity	NOUN
app01-10367	166	13	.	.	PUNCT
app01-10367	167	1	construction	construction	NOUN
app01-10367	167	2	and	and	CCONJ
app01-10367	167	3	building	building	NOUN
app01-10367	167	4	materials	material	NOUN
app01-10367	167	5	393:131969	393:131969	NUM
app01-10367	167	6	,	,	PUNCT
app01-10367	167	7	2023	2023	NUM
app01-10367	167	8	.	.	PUNCT
app01-10367	168	1	https	https	NOUN
app01-10367	168	2	:	:	PUNCT
app01-10367	168	3	//doi.org/10.1016	//doi.org/10.1016	PROPN
app01-10367	168	4	/	/	SYM
app01-10367	168	5	j.conbuildmat.2023.131969	j.conbuildmat.2023.131969	NOUN
app01-10367	169	1	[	[	X
app01-10367	169	2	11	11	NUM
app01-10367	169	3	]	]	PUNCT
app01-10367	169	4	j.	j.	PROPN
app01-10367	169	5	goldstein	goldstein	PROPN
app01-10367	169	6	.	.	PUNCT
app01-10367	170	1	scanning	scan	VERB
app01-10367	170	2	electron	electron	NOUN
app01-10367	170	3	microscopy	microscopy	NOUN
app01-10367	170	4	and	and	CCONJ
app01-10367	170	5	x	x	NOUN
app01-10367	170	6	-	-	NOUN
app01-10367	170	7	ray	ray	NOUN
app01-10367	170	8	microanalysis	microanalysis	NOUN
app01-10367	170	9	:	:	PUNCT
app01-10367	170	10	a	a	DET
app01-10367	170	11	text	text	NOUN
app01-10367	170	12	for	for	ADP
app01-10367	170	13	biologists	biologist	NOUN
app01-10367	170	14	,	,	PUNCT
app01-10367	170	15	materials	material	NOUN
app01-10367	170	16	scientists	scientist	NOUN
app01-10367	170	17	,	,	PUNCT
app01-10367	170	18	and	and	CCONJ
app01-10367	170	19	geologists	geologist	NOUN
app01-10367	170	20	.	.	PUNCT
app01-10367	171	1	springer	springer	PROPN
app01-10367	171	2	us	we	PRON
app01-10367	171	3	,	,	PUNCT
app01-10367	171	4	1981	1981	NUM
app01-10367	171	5	.	.	PUNCT
app01-10367	172	1	[	[	X
app01-10367	172	2	12	12	NUM
app01-10367	172	3	]	]	PUNCT
app01-10367	172	4	t.	t.	NOUN
app01-10367	172	5	ishitani	ishitani	PROPN
app01-10367	172	6	,	,	PUNCT
app01-10367	172	7	h.	h.	PROPN
app01-10367	172	8	kaga	kaga	PROPN
app01-10367	172	9	.	.	PUNCT
app01-10367	173	1	calculation	calculation	NOUN
app01-10367	173	2	of	of	ADP
app01-10367	173	3	local	local	ADJ
app01-10367	173	4	temperature	temperature	NOUN
app01-10367	173	5	rise	rise	NOUN
app01-10367	173	6	in	in	ADP
app01-10367	173	7	focused	focused	ADJ
app01-10367	173	8	-	-	PUNCT
app01-10367	173	9	ion	ion	NOUN
app01-10367	173	10	-	-	PUNCT
app01-10367	173	11	beam	beam	NOUN
app01-10367	173	12	sample	sample	NOUN
app01-10367	173	13	preparation	preparation	NOUN
app01-10367	173	14	.	.	PUNCT
app01-10367	174	1	journal	journal	PROPN
app01-10367	174	2	of	of	ADP
app01-10367	174	3	electron	electron	NOUN
app01-10367	174	4	microscopy	microscopy	NOUN
app01-10367	174	5	44(5):331–336	44(5):331–336	NOUN
app01-10367	174	6	,	,	PUNCT
app01-10367	174	7	1995	1995	NUM
app01-10367	174	8	.	.	PUNCT
app01-10367	175	1	https	https	NOUN
app01-10367	175	2	:	:	PUNCT
app01-10367	176	1	//doi.org/10.1093	//doi.org/10.1093	X
app01-10367	176	2	/	/	SYM
app01-10367	176	3	oxfordjournals.jmicro.a051185	oxfordjournals.jmicro.a051185	ADJ
app01-10367	176	4	[	[	X
app01-10367	176	5	13	13	NUM
app01-10367	176	6	]	]	PUNCT
app01-10367	176	7	m.	m.	PROPN
app01-10367	176	8	b.	b.	PROPN
app01-10367	176	9	pinson	pinson	PROPN
app01-10367	176	10	,	,	PUNCT
app01-10367	176	11	e.	e.	PROPN
app01-10367	176	12	masoero	masoero	PROPN
app01-10367	176	13	,	,	PUNCT
app01-10367	176	14	p.	p.	NOUN
app01-10367	176	15	a.	a.	NOUN
app01-10367	176	16	bonnaud	bonnaud	NOUN
app01-10367	176	17	,	,	PUNCT
app01-10367	177	1	et	et	PROPN
app01-10367	177	2	al	al	PROPN
app01-10367	177	3	.	.	PUNCT
app01-10367	177	4	hysteresis	hysteresis	NOUN
app01-10367	177	5	from	from	ADP
app01-10367	177	6	multiscale	multiscale	ADJ
app01-10367	177	7	porosity	porosity	NOUN
app01-10367	177	8	:	:	PUNCT
app01-10367	177	9	modeling	model	VERB
app01-10367	177	10	water	water	NOUN
app01-10367	177	11	sorption	sorption	NOUN
app01-10367	177	12	and	and	CCONJ
app01-10367	177	13	shrinkage	shrinkage	NOUN
app01-10367	177	14	in	in	ADP
app01-10367	177	15	cement	cement	NOUN
app01-10367	177	16	paste	paste	NOUN
app01-10367	177	17	.	.	PUNCT
app01-10367	178	1	physical	physical	ADJ
app01-10367	178	2	review	review	NOUN
app01-10367	178	3	applied	apply	VERB
app01-10367	178	4	3(6):064009	3(6):064009	NUM
app01-10367	178	5	,	,	PUNCT
app01-10367	178	6	2015	2015	NUM
app01-10367	178	7	.	.	PUNCT
app01-10367	179	1	https://doi.org/10.1103/physrevapplied.3.064009	https://doi.org/10.1103/physrevapplied.3.064009	PROPN
app01-10367	179	2	93	93	NUM
app01-10367	179	3	https://doi.org/10.1016/j.cemconcomp.2004.02.029	https://doi.org/10.1016/j.cemconcomp.2004.02.029	PROPN
app01-10367	179	4	https://doi.org/10.1016/j.cemconcomp.2004.02.029	https://doi.org/10.1016/j.cemconcomp.2004.02.029	NOUN
app01-10367	179	5	https://doi.org/10.1016/j.mtcomm.2019.100806	https://doi.org/10.1016/j.mtcomm.2019.100806	NOUN
app01-10367	179	6	https://doi.org/10.1557/jmr.1992.1564	https://doi.org/10.1557/jmr.1992.1564	NOUN
app01-10367	179	7	https://doi.org/10.1016/j.conbuildmat.2015.05.008	https://doi.org/10.1016/j.conbuildmat.2015.05.008	PROPN
app01-10367	179	8	https://doi.org/10.1016/j.conbuildmat.2015.05.008	https://doi.org/10.1016/j.conbuildmat.2015.05.008	PROPN
app01-10367	179	9	https://doi.org/10.1016/j.cemconcomp.2018.09.016	https://doi.org/10.1016/j.cemconcomp.2018.09.016	PROPN
app01-10367	179	10	https://doi.org/10.1016/j.cemconcomp.2018.09.016	https://doi.org/10.1016/j.cemconcomp.2018.09.016	PROPN
app01-10367	179	11	https://doi.org/10.1016/j.cemconres.2019.105863	https://doi.org/10.1016/j.cemconres.2019.105863	ADJ
app01-10367	179	12	https://doi.org/10.1016/j.cemconcomp.2024.105520	https://doi.org/10.1016/j.cemconcomp.2024.105520	PROPN
app01-10367	179	13	https://doi.org/10.1016/j.cemconcomp.2024.105520	https://doi.org/10.1016/j.cemconcomp.2024.105520	PROPN
app01-10367	179	14	https://doi.org/10.1016/j.cemconcomp.2016.07.010	https://doi.org/10.1016/j.cemconcomp.2016.07.010	ADJ
app01-10367	179	15	https://doi.org/10.1016/j.cemconcomp.2016.07.010	https://doi.org/10.1016/j.cemconcomp.2016.07.010	NOUN
app01-10367	179	16	https://doi.org/10.1016/j.cemconcomp.2019.03.027	https://doi.org/10.1016/j.cemconcomp.2019.03.027	PROPN
app01-10367	179	17	https://doi.org/10.1016/j.cemconcomp.2019.03.027	https://doi.org/10.1016/j.cemconcomp.2019.03.027	PROPN
app01-10367	179	18	https://doi.org/10.1016/j.conbuildmat.2023.131969	https://doi.org/10.1016/j.conbuildmat.2023.131969	PROPN
app01-10367	179	19	https://doi.org/10.1016/j.conbuildmat.2023.131969	https://doi.org/10.1016/j.conbuildmat.2023.131969	PROPN
app01-10367	179	20	https://doi.org/10.1093/oxfordjournals.jmicro.a051185	https://doi.org/10.1093/oxfordjournals.jmicro.a051185	ADP
app01-10367	179	21	https://doi.org/10.1093/oxfordjournals.jmicro.a051185	https://doi.org/10.1093/oxfordjournals.jmicro.a051185	DET
app01-10367	179	22	https://doi.org/10.1103/physrevapplied.3.064009	https://doi.org/10.1103/physrevapplied.3.064009	PROPN
app01-10367	179	23	acta	acta	PROPN
app01-10367	179	24	polytechnica	polytechnica	PROPN
app01-10367	179	25	ctu	ctu	PROPN
app01-10367	179	26	proceedings	proceeding	NOUN
app01-10367	179	27	50:88–93	50:88–93	NUM
app01-10367	179	28	,	,	PUNCT
app01-10367	179	29	2024	2024	NUM
app01-10367	179	30	1	1	NUM
app01-10367	179	31	introduction	introduction	NOUN
app01-10367	179	32	2	2	NUM
app01-10367	179	33	materials	material	NOUN
app01-10367	179	34	and	and	CCONJ
app01-10367	179	35	methods	method	NOUN
app01-10367	179	36	2.1	2.1	NUM
app01-10367	179	37	material	material	NOUN
app01-10367	179	38	2.2	2.2	NUM
app01-10367	179	39	sample	sample	NOUN
app01-10367	179	40	preparation	preparation	NOUN
app01-10367	179	41	2.3	2.3	NUM
app01-10367	179	42	imagining	imagining	NOUN
app01-10367	179	43	and	and	CCONJ
app01-10367	179	44	ion	ion	NOUN
app01-10367	179	45	machining	machine	VERB
app01-10367	179	46	2.4	2.4	NUM
app01-10367	179	47	micro	micro	NOUN
app01-10367	179	48	-	-	NOUN
app01-10367	179	49	beams	beam	NOUN
app01-10367	179	50	3	3	NUM
app01-10367	179	51	results	result	NOUN
app01-10367	179	52	and	and	CCONJ
app01-10367	179	53	discussion	discussion	NOUN
app01-10367	179	54	3.1	3.1	NUM
app01-10367	179	55	imaging	imaging	NOUN
app01-10367	179	56	issues	issue	NOUN
app01-10367	179	57	3.2	3.2	NUM
app01-10367	179	58	effect	effect	NOUN
app01-10367	179	59	of	of	ADP
app01-10367	179	60	primary	primary	ADJ
app01-10367	179	61	electron	electron	NOUN
app01-10367	179	62	beam	beam	NOUN
app01-10367	179	63	3.3	3.3	NUM
app01-10367	179	64	effect	effect	NOUN
app01-10367	179	65	of	of	ADP
app01-10367	179	66	ion	ion	NOUN
app01-10367	179	67	beam	beam	NOUN
app01-10367	179	68	3.4	3.4	NUM
app01-10367	179	69	effect	effect	NOUN
app01-10367	179	70	of	of	ADP
app01-10367	179	71	image	image	NOUN
app01-10367	179	72	drift	drift	NOUN
app01-10367	179	73	3.5	3.5	NUM
app01-10367	179	74	effect	effect	NOUN
app01-10367	179	75	of	of	ADP
app01-10367	179	76	moisture	moisture	NOUN
app01-10367	179	77	cycling	cycling	NOUN
app01-10367	179	78	4	4	NUM
app01-10367	179	79	conclusions	conclusion	NOUN
app01-10367	179	80	list	list	NOUN
app01-10367	179	81	of	of	ADP
app01-10367	179	82	symbols	symbol	NOUN
app01-10367	179	83	acknowledgements	acknowledgement	NOUN
app01-10367	179	84	references	reference	NOUN