id	sid	tid	token	lemma	pos
app01-4398	1	1	acta	acta	PROPN
app01-4398	1	2	polytechnica	polytechnica	PROPN
app01-4398	1	3	ctu	ctu	PROPN
app01-4398	1	4	proceedings	proceeding	NOUN
app01-4398	1	5	doi:10.14311	doi:10.14311	NOUN
app01-4398	1	6	/	/	SYM
app01-4398	1	7	app.2017.9.0019	app.2017.9.0019	PROPN
app01-4398	1	8	acta	acta	PROPN
app01-4398	1	9	polytechnica	polytechnica	PROPN
app01-4398	1	10	ctu	ctu	NOUN
app01-4398	1	11	proceedings	proceeding	NOUN
app01-4398	1	12	9:19–25	9:19–25	NUM
app01-4398	1	13	,	,	PUNCT
app01-4398	1	14	2017	2017	NUM
app01-4398	1	15	©	©	PROPN
app01-4398	1	16	czech	czech	PROPN
app01-4398	1	17	technical	technical	PROPN
app01-4398	1	18	university	university	PROPN
app01-4398	1	19	in	in	ADP
app01-4398	1	20	prague	prague	PROPN
app01-4398	1	21	,	,	PUNCT
app01-4398	1	22	2017	2017	NUM
app01-4398	1	23	available	available	ADJ
app01-4398	1	24	online	online	ADV
app01-4398	1	25	at	at	ADP
app01-4398	1	26	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-4398	1	27	preparing	prepare	VERB
app01-4398	1	28	of	of	ADP
app01-4398	1	29	the	the	DET
app01-4398	1	30	chameleon	chameleon	NOUN
app01-4398	1	31	coating	coating	NOUN
app01-4398	1	32	by	by	ADP
app01-4398	1	33	the	the	DET
app01-4398	1	34	ion	ion	NOUN
app01-4398	1	35	jet	jet	NOUN
app01-4398	1	36	deposition	deposition	NOUN
app01-4398	1	37	method	method	NOUN
app01-4398	1	38	jakub	jakub	PROPN
app01-4398	1	39	skocdopolea,∗	skocdopolea,∗	PROPN
app01-4398	1	40	,	,	PUNCT
app01-4398	1	41	lucrezia	lucrezia	PROPN
app01-4398	1	42	aversab	aversab	VERB
app01-4398	1	43	,	,	PUNCT
app01-4398	1	44	martin	martin	PROPN
app01-4398	1	45	golanc	golanc	PROPN
app01-4398	1	46	,	,	PUNCT
app01-4398	1	47	antonin	antonin	PROPN
app01-4398	1	48	schenkd	schenkd	PROPN
app01-4398	1	49	,	,	PUNCT
app01-4398	1	50	giacomo	giacomo	NOUN
app01-4398	1	51	baldib	baldib	NOUN
app01-4398	1	52	,	,	PUNCT
app01-4398	1	53	irena	irena	PROPN
app01-4398	1	54	kratochvilovac	kratochvilovac	PROPN
app01-4398	1	55	,	,	PUNCT
app01-4398	1	56	ladislav	ladislav	PROPN
app01-4398	1	57	kalvodaa	kalvodaa	PROPN
app01-4398	1	58	,	,	PUNCT
app01-4398	1	59	petr	petr	PROPN
app01-4398	1	60	nozarb	nozarb	VERB
app01-4398	1	61	a	a	DET
app01-4398	1	62	department	department	NOUN
app01-4398	1	63	of	of	ADP
app01-4398	1	64	solid	solid	ADJ
app01-4398	1	65	state	state	NOUN
app01-4398	1	66	engineering	engineering	NOUN
app01-4398	1	67	,	,	PUNCT
app01-4398	1	68	faculty	faculty	NOUN
app01-4398	1	69	of	of	ADP
app01-4398	1	70	nuclear	nuclear	ADJ
app01-4398	1	71	sciences	science	NOUN
app01-4398	1	72	and	and	CCONJ
app01-4398	1	73	physical	physical	ADJ
app01-4398	1	74	engineering	engineering	NOUN
app01-4398	1	75	,	,	PUNCT
app01-4398	1	76	czech	czech	PROPN
app01-4398	1	77	technical	technical	PROPN
app01-4398	1	78	university	university	PROPN
app01-4398	1	79	in	in	ADP
app01-4398	1	80	prague	prague	PROPN
app01-4398	1	81	,	,	PUNCT
app01-4398	1	82	prague	prague	PROPN
app01-4398	1	83	,	,	PUNCT
app01-4398	1	84	czech	czech	PROPN
app01-4398	1	85	republic	republic	PROPN
app01-4398	1	86	b	b	PROPN
app01-4398	1	87	istituto	istituto	X
app01-4398	1	88	materiali	materiali	PROPN
app01-4398	1	89	per	per	ADP
app01-4398	1	90	elettronica	elettronica	PROPN
app01-4398	1	91	e	e	PROPN
app01-4398	1	92	magnetismo	magnetismo	NOUN
app01-4398	1	93	imem	imem	PROPN
app01-4398	1	94	-	-	PUNCT
app01-4398	1	95	cnr	cnr	PROPN
app01-4398	1	96	,	,	PUNCT
app01-4398	1	97	trento	trento	PROPN
app01-4398	1	98	,	,	PUNCT
app01-4398	1	99	italy	italy	PROPN
app01-4398	1	100	c	c	PROPN
app01-4398	1	101	institute	institute	PROPN
app01-4398	1	102	of	of	ADP
app01-4398	1	103	physics	physics	PROPN
app01-4398	1	104	,	,	PUNCT
app01-4398	1	105	cas	cas	PROPN
app01-4398	1	106	in	in	ADP
app01-4398	1	107	prague	prague	PROPN
app01-4398	1	108	d	d	PROPN
app01-4398	1	109	department	department	PROPN
app01-4398	1	110	of	of	ADP
app01-4398	1	111	physical	physical	ADJ
app01-4398	1	112	electronics	electronic	NOUN
app01-4398	1	113	,	,	PUNCT
app01-4398	1	114	faculty	faculty	NOUN
app01-4398	1	115	of	of	ADP
app01-4398	1	116	nuclear	nuclear	ADJ
app01-4398	1	117	sciences	science	NOUN
app01-4398	1	118	and	and	CCONJ
app01-4398	1	119	physical	physical	ADJ
app01-4398	1	120	engineering	engineering	NOUN
app01-4398	1	121	,	,	PUNCT
app01-4398	1	122	czech	czech	PROPN
app01-4398	1	123	technical	technical	PROPN
app01-4398	1	124	university	university	PROPN
app01-4398	1	125	in	in	ADP
app01-4398	1	126	prague	prague	PROPN
app01-4398	1	127	,	,	PUNCT
app01-4398	1	128	prague	prague	PROPN
app01-4398	1	129	,	,	PUNCT
app01-4398	1	130	czech	czech	PROPN
app01-4398	1	131	republic	republic	NOUN
app01-4398	1	132	∗	∗	NOUN
app01-4398	1	133	corresponding	correspond	VERB
app01-4398	1	134	author	author	NOUN
app01-4398	1	135	:	:	PUNCT
app01-4398	1	136	jakub.skoc@gmail.com	jakub.skoc@gmail.com	X
app01-4398	1	137	abstract	abstract	PROPN
app01-4398	1	138	.	.	PUNCT
app01-4398	2	1	preparation	preparation	NOUN
app01-4398	2	2	of	of	ADP
app01-4398	2	3	chameleon	chameleon	NOUN
app01-4398	2	4	coatings	coating	NOUN
app01-4398	2	5	using	use	VERB
app01-4398	2	6	an	an	DET
app01-4398	2	7	ionized	ionized	ADJ
app01-4398	2	8	jet	jet	NOUN
app01-4398	2	9	deposition	deposition	NOUN
app01-4398	2	10	(	(	PUNCT
app01-4398	2	11	ijd	ijd	NOUN
app01-4398	2	12	)	)	PUNCT
app01-4398	2	13	technique	technique	NOUN
app01-4398	2	14	is	be	AUX
app01-4398	2	15	reported	report	VERB
app01-4398	2	16	in	in	ADP
app01-4398	2	17	the	the	DET
app01-4398	2	18	present	present	ADJ
app01-4398	2	19	paper	paper	NOUN
app01-4398	2	20	.	.	PUNCT
app01-4398	3	1	ijd	ijd	PROPN
app01-4398	3	2	is	be	AUX
app01-4398	3	3	a	a	DET
app01-4398	3	4	new	new	ADJ
app01-4398	3	5	flexible	flexible	ADJ
app01-4398	3	6	method	method	NOUN
app01-4398	3	7	for	for	ADP
app01-4398	3	8	thin	thin	ADJ
app01-4398	3	9	film	film	NOUN
app01-4398	3	10	deposition	deposition	NOUN
app01-4398	3	11	developed	develop	VERB
app01-4398	3	12	by	by	ADP
app01-4398	3	13	noivion	noivion	NOUN
app01-4398	3	14	,	,	PUNCT
app01-4398	3	15	srl	srl	PROPN
app01-4398	3	16	.	.	PUNCT
app01-4398	4	1	the	the	DET
app01-4398	4	2	chameleon	chameleon	NOUN
app01-4398	4	3	coatings	coating	NOUN
app01-4398	4	4	are	be	AUX
app01-4398	4	5	thin	thin	ADJ
app01-4398	4	6	films	film	NOUN
app01-4398	4	7	characterised	characterise	VERB
app01-4398	4	8	by	by	ADP
app01-4398	4	9	a	a	DET
app01-4398	4	10	distinct	distinct	ADJ
app01-4398	4	11	change	change	NOUN
app01-4398	4	12	of	of	ADP
app01-4398	4	13	their	their	PRON
app01-4398	4	14	tribological	tribological	ADJ
app01-4398	4	15	properties	property	NOUN
app01-4398	4	16	according	accord	VERB
app01-4398	4	17	to	to	ADP
app01-4398	4	18	the	the	DET
app01-4398	4	19	external	external	ADJ
app01-4398	4	20	conditions	condition	NOUN
app01-4398	4	21	.	.	PUNCT
app01-4398	5	1	the	the	DET
app01-4398	5	2	deposited	deposit	VERB
app01-4398	5	3	films	film	NOUN
app01-4398	5	4	of	of	ADP
app01-4398	5	5	sic	sic	ADJ
app01-4398	5	6	and	and	CCONJ
app01-4398	5	7	tin	tin	NOUN
app01-4398	5	8	materials	material	NOUN
app01-4398	5	9	were	be	AUX
app01-4398	5	10	examined	examine	VERB
app01-4398	5	11	by	by	ADP
app01-4398	5	12	the	the	DET
app01-4398	5	13	raman	raman	NOUN
app01-4398	5	14	spectroscopy	spectroscopy	NOUN
app01-4398	5	15	,	,	PUNCT
app01-4398	5	16	sem	sem	NOUN
app01-4398	5	17	and	and	CCONJ
app01-4398	5	18	xps	xps	PROPN
app01-4398	5	19	.	.	PUNCT
app01-4398	6	1	the	the	DET
app01-4398	6	2	results	result	NOUN
app01-4398	6	3	of	of	ADP
app01-4398	6	4	the	the	DET
app01-4398	6	5	raman	raman	NOUN
app01-4398	6	6	spectroscopy	spectroscopy	NOUN
app01-4398	6	7	have	have	AUX
app01-4398	6	8	proved	prove	VERB
app01-4398	6	9	an	an	DET
app01-4398	6	10	amorphous	amorphous	ADJ
app01-4398	6	11	structure	structure	NOUN
app01-4398	6	12	of	of	ADP
app01-4398	6	13	sic	sic	ADJ
app01-4398	6	14	films	film	NOUN
app01-4398	6	15	.	.	PUNCT
app01-4398	7	1	the	the	DET
app01-4398	7	2	data	datum	NOUN
app01-4398	7	3	from	from	ADP
app01-4398	7	4	xps	xps	PROPN
app01-4398	7	5	on	on	ADP
app01-4398	7	6	tin	tin	NOUN
app01-4398	7	7	films	film	NOUN
app01-4398	7	8	have	have	AUX
app01-4398	7	9	shown	show	VERB
app01-4398	7	10	that	that	SCONJ
app01-4398	7	11	the	the	DET
app01-4398	7	12	films	film	NOUN
app01-4398	7	13	are	be	AUX
app01-4398	7	14	heavily	heavily	ADV
app01-4398	7	15	oxidized	oxidize	VERB
app01-4398	7	16	,	,	PUNCT
app01-4398	7	17	but	but	CCONJ
app01-4398	7	18	also	also	ADV
app01-4398	7	19	prove	prove	VERB
app01-4398	7	20	that	that	SCONJ
app01-4398	7	21	the	the	DET
app01-4398	7	22	films	film	NOUN
app01-4398	7	23	are	be	AUX
app01-4398	7	24	composed	compose	VERB
app01-4398	7	25	of	of	ADP
app01-4398	7	26	tin	tin	NOUN
app01-4398	7	27	and	and	CCONJ
app01-4398	7	28	pure	pure	ADJ
app01-4398	7	29	ti	ti	NOUN
app01-4398	7	30	.	.	PUNCT
app01-4398	8	1	the	the	DET
app01-4398	8	2	sem	sem	NOUN
app01-4398	8	3	provided	provide	VERB
app01-4398	8	4	information	information	NOUN
app01-4398	8	5	about	about	ADP
app01-4398	8	6	the	the	DET
app01-4398	8	7	size	size	NOUN
app01-4398	8	8	of	of	ADP
app01-4398	8	9	grains	grain	NOUN
app01-4398	8	10	and	and	CCONJ
app01-4398	8	11	particles	particle	NOUN
app01-4398	8	12	constituting	constitute	VERB
app01-4398	8	13	the	the	DET
app01-4398	8	14	deposited	deposit	VERB
app01-4398	8	15	films	film	NOUN
app01-4398	8	16	,	,	PUNCT
app01-4398	8	17	which	which	PRON
app01-4398	8	18	is	be	AUX
app01-4398	8	19	important	important	ADJ
app01-4398	8	20	for	for	ADP
app01-4398	8	21	tribological	tribological	ADJ
app01-4398	8	22	properties	property	NOUN
app01-4398	8	23	of	of	ADP
app01-4398	8	24	the	the	DET
app01-4398	8	25	films	film	NOUN
app01-4398	8	26	.	.	PUNCT
app01-4398	9	1	deposition	deposition	NOUN
app01-4398	9	2	of	of	ADP
app01-4398	9	3	the	the	DET
app01-4398	9	4	chameleon	chameleon	NOUN
app01-4398	9	5	coating	coating	NOUN
app01-4398	9	6	is	be	AUX
app01-4398	9	7	very	very	ADV
app01-4398	9	8	complex	complex	ADJ
app01-4398	9	9	problem	problem	NOUN
app01-4398	9	10	and	and	CCONJ
app01-4398	9	11	ijd	ijd	NOUN
app01-4398	9	12	could	could	AUX
app01-4398	9	13	be	be	AUX
app01-4398	9	14	ideal	ideal	ADJ
app01-4398	9	15	method	method	NOUN
app01-4398	9	16	for	for	ADP
app01-4398	9	17	preparation	preparation	NOUN
app01-4398	9	18	of	of	ADP
app01-4398	9	19	this	this	DET
app01-4398	9	20	coating	coating	NOUN
app01-4398	9	21	.	.	PUNCT
app01-4398	10	1	keywords	keyword	NOUN
app01-4398	10	2	:	:	PUNCT
app01-4398	10	3	ion	ion	NOUN
app01-4398	10	4	jet	jet	NOUN
app01-4398	10	5	deposition	deposition	NOUN
app01-4398	10	6	,	,	PUNCT
app01-4398	10	7	chameleon	chameleon	NOUN
app01-4398	10	8	coating	coating	NOUN
app01-4398	10	9	,	,	PUNCT
app01-4398	10	10	raman	raman	NOUN
app01-4398	10	11	spectroscopy	spectroscopy	NOUN
app01-4398	10	12	,	,	PUNCT
app01-4398	10	13	scanning	scan	VERB
app01-4398	10	14	electron	electron	NOUN
app01-4398	10	15	microscope	microscope	NOUN
app01-4398	10	16	,	,	PUNCT
app01-4398	10	17	x	x	ADJ
app01-4398	10	18	-	-	NOUN
app01-4398	10	19	ray	ray	NOUN
app01-4398	10	20	photoelectron	photoelectron	NOUN
app01-4398	10	21	spectroscopy	spectroscopy	NOUN
app01-4398	10	22	.	.	PUNCT
app01-4398	11	1	1	1	X
app01-4398	11	2	.	.	X
app01-4398	11	3	introduction	introduction	NOUN
app01-4398	11	4	chameleon	chameleon	NOUN
app01-4398	11	5	coating	coating	NOUN
app01-4398	11	6	is	be	AUX
app01-4398	11	7	a	a	DET
app01-4398	11	8	multilayer	multilayer	ADJ
app01-4398	11	9	film	film	NOUN
app01-4398	11	10	,	,	PUNCT
app01-4398	11	11	which	which	PRON
app01-4398	11	12	changes	change	VERB
app01-4398	11	13	its	its	PRON
app01-4398	11	14	tribological	tribological	ADJ
app01-4398	11	15	attributes	attribute	NOUN
app01-4398	11	16	according	accord	VERB
app01-4398	11	17	to	to	ADP
app01-4398	11	18	the	the	DET
app01-4398	11	19	external	external	ADJ
app01-4398	11	20	conditions	condition	NOUN
app01-4398	11	21	.	.	PUNCT
app01-4398	12	1	the	the	DET
app01-4398	12	2	main	main	ADJ
app01-4398	12	3	attributes	attribute	NOUN
app01-4398	12	4	interesting	interesting	ADJ
app01-4398	12	5	from	from	ADP
app01-4398	12	6	a	a	DET
app01-4398	12	7	point	point	NOUN
app01-4398	12	8	of	of	ADP
app01-4398	12	9	view	view	NOUN
app01-4398	12	10	of	of	ADP
app01-4398	12	11	possible	possible	ADJ
app01-4398	12	12	industrial	industrial	ADJ
app01-4398	12	13	applications	application	NOUN
app01-4398	12	14	are	be	AUX
app01-4398	12	15	the	the	DET
app01-4398	12	16	capability	capability	NOUN
app01-4398	12	17	of	of	ADP
app01-4398	12	18	the	the	DET
app01-4398	12	19	layer	layer	NOUN
app01-4398	12	20	to	to	PART
app01-4398	12	21	withstand	withstand	VERB
app01-4398	12	22	high	high	ADJ
app01-4398	12	23	mechanical	mechanical	ADJ
app01-4398	12	24	loads	load	NOUN
app01-4398	12	25	without	without	ADP
app01-4398	12	26	a	a	DET
app01-4398	12	27	fracture	fracture	NOUN
app01-4398	12	28	,	,	PUNCT
app01-4398	12	29	high	high	ADJ
app01-4398	12	30	wear	wear	VERB
app01-4398	12	31	resistance	resistance	NOUN
app01-4398	12	32	and	and	CCONJ
app01-4398	12	33	low	low	ADJ
app01-4398	12	34	friction	friction	NOUN
app01-4398	12	35	coefficient	coefficient	NOUN
app01-4398	12	36	of	of	ADP
app01-4398	12	37	the	the	DET
app01-4398	12	38	film	film	NOUN
app01-4398	12	39	.	.	PUNCT
app01-4398	13	1	ionized	ionized	ADJ
app01-4398	13	2	jet	jet	NOUN
app01-4398	13	3	deposition	deposition	NOUN
app01-4398	13	4	is	be	AUX
app01-4398	13	5	one	one	NUM
app01-4398	13	6	of	of	ADP
app01-4398	13	7	pvd	pvd	PROPN
app01-4398	13	8	(	(	PUNCT
app01-4398	13	9	physical	physical	ADJ
app01-4398	13	10	vapor	vapor	NOUN
app01-4398	13	11	deposition	deposition	NOUN
app01-4398	13	12	)	)	PUNCT
app01-4398	13	13	methods	method	NOUN
app01-4398	13	14	for	for	ADP
app01-4398	13	15	preparation	preparation	NOUN
app01-4398	13	16	and	and	CCONJ
app01-4398	13	17	growth	growth	NOUN
app01-4398	13	18	of	of	ADP
app01-4398	13	19	thin	thin	ADJ
app01-4398	13	20	films	film	NOUN
app01-4398	13	21	.	.	PUNCT
app01-4398	14	1	it	it	PRON
app01-4398	14	2	is	be	AUX
app01-4398	14	3	based	base	VERB
app01-4398	14	4	on	on	ADP
app01-4398	14	5	generation	generation	NOUN
app01-4398	14	6	and	and	CCONJ
app01-4398	14	7	application	application	NOUN
app01-4398	14	8	of	of	ADP
app01-4398	14	9	dense	dense	ADJ
app01-4398	14	10	pulsed	pulse	VERB
app01-4398	14	11	electron	electron	NOUN
app01-4398	14	12	beam	beam	NOUN
app01-4398	14	13	which	which	PRON
app01-4398	14	14	interacts	interact	VERB
app01-4398	14	15	with	with	ADP
app01-4398	14	16	selected	select	VERB
app01-4398	14	17	target	target	NOUN
app01-4398	14	18	material	material	NOUN
app01-4398	14	19	and	and	CCONJ
app01-4398	14	20	produces	produce	VERB
app01-4398	14	21	a	a	DET
app01-4398	14	22	plume	plume	NOUN
app01-4398	14	23	of	of	ADP
app01-4398	14	24	the	the	DET
app01-4398	14	25	target	target	NOUN
app01-4398	14	26	material	material	NOUN
app01-4398	14	27	.	.	PUNCT
app01-4398	15	1	the	the	DET
app01-4398	15	2	thin	thin	ADJ
app01-4398	15	3	layer	layer	NOUN
app01-4398	15	4	of	of	ADP
app01-4398	15	5	target	target	NOUN
app01-4398	15	6	material	material	NOUN
app01-4398	15	7	is	be	AUX
app01-4398	15	8	grown	grow	VERB
app01-4398	15	9	by	by	ADP
app01-4398	15	10	condensing	condense	VERB
app01-4398	15	11	the	the	DET
app01-4398	15	12	plasma	plasma	NOUN
app01-4398	15	13	plume	plume	NOUN
app01-4398	15	14	on	on	ADP
app01-4398	15	15	the	the	DET
app01-4398	15	16	appropriate	appropriate	ADJ
app01-4398	15	17	substrate	substrate	NOUN
app01-4398	15	18	.	.	PUNCT
app01-4398	16	1	the	the	DET
app01-4398	16	2	flexibility	flexibility	NOUN
app01-4398	16	3	of	of	ADP
app01-4398	16	4	the	the	DET
app01-4398	16	5	method	method	NOUN
app01-4398	16	6	stands	stand	VERB
app01-4398	16	7	in	in	ADP
app01-4398	16	8	the	the	DET
app01-4398	16	9	set	set	NOUN
app01-4398	16	10	of	of	ADP
app01-4398	16	11	independent	independent	ADJ
app01-4398	16	12	parameters	parameter	NOUN
app01-4398	16	13	,	,	PUNCT
app01-4398	16	14	variety	variety	NOUN
app01-4398	16	15	of	of	ADP
app01-4398	16	16	suitable	suitable	ADJ
app01-4398	16	17	materials	material	NOUN
app01-4398	16	18	for	for	ADP
app01-4398	16	19	the	the	DET
app01-4398	16	20	deposition	deposition	NOUN
app01-4398	16	21	and	and	CCONJ
app01-4398	16	22	in	in	ADP
app01-4398	16	23	the	the	DET
app01-4398	16	24	possibility	possibility	NOUN
app01-4398	16	25	to	to	PART
app01-4398	16	26	use	use	VERB
app01-4398	16	27	multiple	multiple	ADJ
app01-4398	16	28	ijd	ijd	NOUN
app01-4398	16	29	systems	system	NOUN
app01-4398	16	30	for	for	ADP
app01-4398	16	31	the	the	DET
app01-4398	16	32	deposition	deposition	NOUN
app01-4398	16	33	of	of	ADP
app01-4398	16	34	multilayers	multilayer	NOUN
app01-4398	16	35	films	film	NOUN
app01-4398	16	36	.	.	PUNCT
app01-4398	17	1	the	the	DET
app01-4398	17	2	independent	independent	ADJ
app01-4398	17	3	parameters	parameter	NOUN
app01-4398	17	4	are	be	AUX
app01-4398	17	5	distance	distance	NOUN
app01-4398	17	6	between	between	ADP
app01-4398	17	7	target	target	NOUN
app01-4398	17	8	and	and	CCONJ
app01-4398	17	9	substrate	substrate	NOUN
app01-4398	17	10	,	,	PUNCT
app01-4398	17	11	working	work	VERB
app01-4398	17	12	gas	gas	NOUN
app01-4398	17	13	,	,	PUNCT
app01-4398	17	14	pressure	pressure	NOUN
app01-4398	17	15	during	during	ADP
app01-4398	17	16	deposition	deposition	NOUN
app01-4398	17	17	,	,	PUNCT
app01-4398	17	18	frequency	frequency	NOUN
app01-4398	17	19	of	of	ADP
app01-4398	17	20	electron	electron	NOUN
app01-4398	17	21	beam	beam	NOUN
app01-4398	17	22	pulses	pulse	NOUN
app01-4398	17	23	and	and	CCONJ
app01-4398	17	24	trigger	trigger	NOUN
app01-4398	17	25	voltage	voltage	NOUN
app01-4398	17	26	.	.	PUNCT
app01-4398	18	1	all	all	DET
app01-4398	18	2	these	these	DET
app01-4398	18	3	parameters	parameter	NOUN
app01-4398	18	4	can	can	AUX
app01-4398	18	5	be	be	AUX
app01-4398	18	6	adjusted	adjust	VERB
app01-4398	18	7	according	accord	VERB
app01-4398	18	8	to	to	ADP
app01-4398	18	9	the	the	DET
app01-4398	18	10	desired	desire	VERB
app01-4398	18	11	deposition	deposition	NOUN
app01-4398	18	12	process	process	NOUN
app01-4398	18	13	outcome	outcome	NOUN
app01-4398	18	14	.	.	PUNCT
app01-4398	19	1	the	the	DET
app01-4398	19	2	ijd	ijd	PROPN
app01-4398	19	3	technique	technique	NOUN
app01-4398	19	4	permits	permit	NOUN
app01-4398	19	5	to	to	PART
app01-4398	19	6	deposit	deposit	VERB
app01-4398	19	7	both	both	CCONJ
app01-4398	19	8	inorganic	inorganic	ADJ
app01-4398	19	9	and	and	CCONJ
app01-4398	19	10	organic	organic	ADJ
app01-4398	19	11	materials	material	NOUN
app01-4398	19	12	on	on	ADP
app01-4398	19	13	substrates	substrate	NOUN
app01-4398	19	14	which	which	PRON
app01-4398	19	15	,	,	PUNCT
app01-4398	19	16	again	again	ADV
app01-4398	19	17	,	,	PUNCT
app01-4398	19	18	could	could	AUX
app01-4398	19	19	be	be	AUX
app01-4398	19	20	of	of	ADP
app01-4398	19	21	inorganic	inorganic	ADJ
app01-4398	19	22	or	or	CCONJ
app01-4398	19	23	organic	organic	ADJ
app01-4398	19	24	nature	nature	NOUN
app01-4398	19	25	because	because	SCONJ
app01-4398	19	26	of	of	ADP
app01-4398	19	27	low	low	ADJ
app01-4398	19	28	temperature	temperature	NOUN
app01-4398	19	29	of	of	ADP
app01-4398	19	30	deposition	deposition	NOUN
app01-4398	19	31	plasma	plasma	NOUN
app01-4398	19	32	.	.	PUNCT
app01-4398	20	1	it	it	PRON
app01-4398	20	2	is	be	AUX
app01-4398	20	3	also	also	ADV
app01-4398	20	4	possible	possible	ADJ
app01-4398	20	5	to	to	PART
app01-4398	20	6	deposit	deposit	VERB
app01-4398	20	7	conducting	conducting	NOUN
app01-4398	20	8	and	and	CCONJ
app01-4398	20	9	non	non	ADJ
app01-4398	20	10	-	-	ADJ
app01-4398	20	11	conducting	conducting	ADJ
app01-4398	20	12	/	/	SYM
app01-4398	20	13	isolating	isolate	VERB
app01-4398	20	14	materials	material	NOUN
app01-4398	20	15	and	and	CCONJ
app01-4398	20	16	optically	optically	ADV
app01-4398	20	17	transparent	transparent	ADJ
app01-4398	20	18	materials	material	NOUN
app01-4398	20	19	.	.	PUNCT
app01-4398	21	1	however	however	ADV
app01-4398	21	2	,	,	PUNCT
app01-4398	21	3	in	in	ADP
app01-4398	21	4	order	order	NOUN
app01-4398	21	5	to	to	PART
app01-4398	21	6	deposit	deposit	VERB
app01-4398	21	7	strongly	strongly	ADV
app01-4398	21	8	isolating	isolate	VERB
app01-4398	21	9	materials	material	NOUN
app01-4398	21	10	,	,	PUNCT
app01-4398	21	11	it	it	PRON
app01-4398	21	12	is	be	AUX
app01-4398	21	13	necessary	necessary	ADJ
app01-4398	21	14	to	to	PART
app01-4398	21	15	add	add	VERB
app01-4398	21	16	an	an	DET
app01-4398	21	17	auxiliary	auxiliary	ADJ
app01-4398	21	18	anode	anode	NOUN
app01-4398	21	19	between	between	ADP
app01-4398	21	20	ijd	ijd	PROPN
app01-4398	21	21	hollow	hollow	ADJ
app01-4398	21	22	cathode	cathode	NOUN
app01-4398	21	23	and	and	CCONJ
app01-4398	21	24	target	target	NOUN
app01-4398	21	25	of	of	ADP
app01-4398	21	26	the	the	DET
app01-4398	21	27	deposited	deposit	VERB
app01-4398	21	28	material	material	NOUN
app01-4398	21	29	to	to	PART
app01-4398	21	30	electrically	electrically	ADV
app01-4398	21	31	decouple	decouple	VERB
app01-4398	21	32	the	the	DET
app01-4398	21	33	ijd	ijd	NOUN
app01-4398	21	34	system	system	NOUN
app01-4398	21	35	from	from	ADP
app01-4398	21	36	the	the	DET
app01-4398	21	37	target	target	NOUN
app01-4398	21	38	.	.	PUNCT
app01-4398	22	1	from	from	ADP
app01-4398	22	2	these	these	DET
app01-4398	22	3	characteristics	characteristic	NOUN
app01-4398	22	4	it	it	PRON
app01-4398	22	5	seems	seem	VERB
app01-4398	22	6	to	to	PART
app01-4398	22	7	be	be	AUX
app01-4398	22	8	reasonable	reasonable	ADJ
app01-4398	22	9	to	to	PART
app01-4398	22	10	assume	assume	VERB
app01-4398	22	11	that	that	SCONJ
app01-4398	22	12	the	the	DET
app01-4398	22	13	ijd	ijd	PROPN
app01-4398	22	14	method	method	NOUN
app01-4398	22	15	could	could	AUX
app01-4398	22	16	be	be	AUX
app01-4398	22	17	ideal	ideal	ADJ
app01-4398	22	18	technique	technique	NOUN
app01-4398	22	19	for	for	ADP
app01-4398	22	20	the	the	DET
app01-4398	22	21	chameleon	chameleon	NOUN
app01-4398	22	22	coatings	coating	NOUN
app01-4398	22	23	preparation	preparation	NOUN
app01-4398	22	24	.	.	PUNCT
app01-4398	23	1	in	in	ADP
app01-4398	23	2	this	this	DET
app01-4398	23	3	article	article	NOUN
app01-4398	23	4	we	we	PRON
app01-4398	23	5	will	will	AUX
app01-4398	23	6	focus	focus	VERB
app01-4398	23	7	on	on	ADP
app01-4398	23	8	a	a	DET
app01-4398	23	9	part	part	NOUN
app01-4398	23	10	of	of	ADP
app01-4398	23	11	the	the	DET
app01-4398	23	12	chameleon	chameleon	NOUN
app01-4398	23	13	coatings	coating	NOUN
app01-4398	23	14	,	,	PUNCT
app01-4398	23	15	namely	namely	ADV
app01-4398	23	16	,	,	PUNCT
app01-4398	23	17	hard	hard	ADJ
app01-4398	23	18	metal	metal	NOUN
app01-4398	23	19	carbides	carbide	NOUN
app01-4398	23	20	and	and	CCONJ
app01-4398	23	21	nitrides	nitride	NOUN
app01-4398	23	22	.	.	PUNCT
app01-4398	24	1	such	such	ADJ
app01-4398	24	2	deposited	deposit	VERB
app01-4398	24	3	hard	hard	ADJ
app01-4398	24	4	films	film	NOUN
app01-4398	24	5	are	be	AUX
app01-4398	24	6	examined	examine	VERB
app01-4398	24	7	by	by	ADP
app01-4398	24	8	raman	raman	NOUN
app01-4398	24	9	spectroscopy	spectroscopy	NOUN
app01-4398	24	10	,	,	PUNCT
app01-4398	24	11	sem	sem	NOUN
app01-4398	24	12	and	and	CCONJ
app01-4398	24	13	xps	xps	PROPN
app01-4398	24	14	and	and	CCONJ
app01-4398	24	15	the	the	DET
app01-4398	24	16	results	result	NOUN
app01-4398	24	17	reported	report	VERB
app01-4398	24	18	and	and	CCONJ
app01-4398	24	19	discussed	discuss	VERB
app01-4398	24	20	.	.	PUNCT
app01-4398	25	1	2	2	X
app01-4398	25	2	.	.	X
app01-4398	25	3	theory	theory	NOUN
app01-4398	25	4	2.1	2.1	NUM
app01-4398	25	5	.	.	PUNCT
app01-4398	25	6	ionized	ionize	VERB
app01-4398	25	7	jet	jet	NOUN
app01-4398	25	8	deposition	deposition	NOUN
app01-4398	25	9	the	the	DET
app01-4398	25	10	ijd	ijd	NOUN
app01-4398	25	11	working	work	VERB
app01-4398	25	12	tool	tool	NOUN
app01-4398	25	13	a	a	DET
app01-4398	25	14	pulsed	pulse	VERB
app01-4398	25	15	energetic	energetic	ADJ
app01-4398	25	16	electron	electron	NOUN
app01-4398	25	17	beam	beam	NOUN
app01-4398	25	18	is	be	AUX
app01-4398	25	19	generated	generate	VERB
app01-4398	25	20	in	in	ADP
app01-4398	25	21	the	the	DET
app01-4398	25	22	ijd	ijd	PROPN
app01-4398	25	23	source	source	NOUN
app01-4398	25	24	.	.	PUNCT
app01-4398	26	1	the	the	DET
app01-4398	26	2	main	main	ADJ
app01-4398	26	3	part	part	NOUN
app01-4398	26	4	of	of	ADP
app01-4398	26	5	the	the	DET
app01-4398	26	6	ijd	ijd	PROPN
app01-4398	26	7	source	source	NOUN
app01-4398	26	8	is	be	AUX
app01-4398	26	9	a	a	DET
app01-4398	26	10	hollow	hollow	ADJ
app01-4398	26	11	flight	flight	NOUN
app01-4398	26	12	-	-	PUNCT
app01-4398	26	13	through	through	ADP
app01-4398	26	14	anode	anode	NOUN
app01-4398	26	15	/	/	SYM
app01-4398	26	16	cathode	cathode	NOUN
app01-4398	26	17	.	.	PUNCT
app01-4398	27	1	an	an	DET
app01-4398	27	2	electron	electron	NOUN
app01-4398	27	3	discharge	discharge	NOUN
app01-4398	27	4	trigger	trigger	NOUN
app01-4398	27	5	is	be	AUX
app01-4398	27	6	attached	attach	VERB
app01-4398	27	7	to	to	ADP
app01-4398	27	8	the	the	DET
app01-4398	27	9	anode	anode	NOUN
app01-4398	27	10	/	/	SYM
app01-4398	27	11	cathode	cathode	NOUN
app01-4398	27	12	and	and	CCONJ
app01-4398	27	13	serves	serve	VERB
app01-4398	27	14	for	for	ADP
app01-4398	27	15	the	the	DET
app01-4398	27	16	controlled	control	VERB
app01-4398	27	17	"	"	PUNCT
app01-4398	27	18	firing	firing	NOUN
app01-4398	27	19	"	"	PUNCT
app01-4398	27	20	of	of	ADP
app01-4398	27	21	the	the	DET
app01-4398	27	22	main	main	ADJ
app01-4398	27	23	discharge	discharge	NOUN
app01-4398	27	24	and	and	CCONJ
app01-4398	27	25	for	for	ADP
app01-4398	27	26	the	the	DET
app01-4398	27	27	generation	generation	NOUN
app01-4398	27	28	of	of	ADP
app01-4398	27	29	the	the	DET
app01-4398	27	30	dense	dense	ADJ
app01-4398	27	31	electron	electron	NOUN
app01-4398	27	32	pulse	pulse	NOUN
app01-4398	27	33	directed	direct	VERB
app01-4398	27	34	towards	towards	ADP
app01-4398	27	35	the	the	DET
app01-4398	27	36	tar19	tar19	NOUN
app01-4398	27	37	http://dx.doi.org/10.14311/app.2017.9.0019	http://dx.doi.org/10.14311/app.2017.9.0019	NUM
app01-4398	27	38	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-4398	27	39	jakub	jakub	PROPN
app01-4398	27	40	skocdopole	skocdopole	PROPN
app01-4398	27	41	,	,	PUNCT
app01-4398	27	42	lucrezia	lucrezia	PROPN
app01-4398	27	43	aversa	aversa	PROPN
app01-4398	27	44	,	,	PUNCT
app01-4398	27	45	martin	martin	PROPN
app01-4398	27	46	golan	golan	PROPN
app01-4398	27	47	et	et	PROPN
app01-4398	27	48	al	al	PROPN
app01-4398	27	49	.	.	PROPN
app01-4398	28	1	acta	acta	PROPN
app01-4398	28	2	polytechnica	polytechnica	PROPN
app01-4398	28	3	ctu	ctu	PROPN
app01-4398	28	4	proceedings	proceeding	NOUN
app01-4398	28	5	figure	figure	VERB
app01-4398	28	6	1	1	NUM
app01-4398	28	7	.	.	NOUN
app01-4398	28	8	example	example	NOUN
app01-4398	28	9	of	of	ADP
app01-4398	28	10	an	an	DET
app01-4398	28	11	ijd	ijd	NOUN
app01-4398	28	12	source	source	NOUN
app01-4398	28	13	[	[	X
app01-4398	28	14	8	8	NUM
app01-4398	28	15	]	]	PUNCT
app01-4398	28	16	.	.	PUNCT
app01-4398	29	1	get	get	VERB
app01-4398	29	2	.	.	PUNCT
app01-4398	30	1	usually	usually	ADV
app01-4398	30	2	(	(	PUNCT
app01-4398	30	3	but	but	CCONJ
app01-4398	30	4	not	not	PART
app01-4398	30	5	necessarily	necessarily	ADV
app01-4398	30	6	)	)	PUNCT
app01-4398	30	7	,	,	PUNCT
app01-4398	30	8	either	either	CCONJ
app01-4398	30	9	a	a	DET
app01-4398	30	10	small	small	ADJ
app01-4398	30	11	channel	channel	NOUN
app01-4398	30	12	spark	spark	NOUN
app01-4398	30	13	or	or	CCONJ
app01-4398	30	14	a	a	DET
app01-4398	30	15	pseudospark	pseudospark	NOUN
app01-4398	30	16	switch	switch	NOUN
app01-4398	30	17	,	,	PUNCT
app01-4398	30	18	or	or	CCONJ
app01-4398	30	19	an	an	DET
app01-4398	30	20	electron	electron	NOUN
app01-4398	30	21	and	and	CCONJ
app01-4398	30	22	plasma	plasma	NOUN
app01-4398	30	23	source	source	NOUN
app01-4398	30	24	is	be	AUX
app01-4398	30	25	connected	connect	VERB
app01-4398	30	26	to	to	ADP
app01-4398	30	27	the	the	DET
app01-4398	30	28	main	main	ADJ
app01-4398	30	29	anode	anode	NOUN
app01-4398	30	30	/	/	SYM
app01-4398	30	31	cathode	cathode	NOUN
app01-4398	30	32	and	and	CCONJ
app01-4398	30	33	used	use	VERB
app01-4398	30	34	as	as	ADP
app01-4398	30	35	the	the	DET
app01-4398	30	36	trigger	trigger	NOUN
app01-4398	30	37	(	(	PUNCT
app01-4398	30	38	see	see	VERB
app01-4398	30	39	figure	figure	NOUN
app01-4398	30	40	1	1	NUM
app01-4398	30	41	)	)	PUNCT
app01-4398	30	42	.	.	PUNCT
app01-4398	31	1	the	the	DET
app01-4398	31	2	main	main	ADJ
app01-4398	31	3	anode	anode	NOUN
app01-4398	31	4	/	/	SYM
app01-4398	31	5	cathode	cathode	NOUN
app01-4398	31	6	electrode	electrode	NOUN
app01-4398	31	7	has	have	VERB
app01-4398	31	8	the	the	DET
app01-4398	31	9	form	form	NOUN
app01-4398	31	10	of	of	ADP
app01-4398	31	11	a	a	DET
app01-4398	31	12	hollow	hollow	ADJ
app01-4398	31	13	cylinder	cylinder	NOUN
app01-4398	31	14	with	with	ADP
app01-4398	31	15	openings	opening	NOUN
app01-4398	31	16	in	in	ADP
app01-4398	31	17	both	both	DET
app01-4398	31	18	bases	basis	NOUN
app01-4398	31	19	and	and	CCONJ
app01-4398	31	20	oriented	orient	VERB
app01-4398	31	21	as	as	SCONJ
app01-4398	31	22	follows	follow	VERB
app01-4398	31	23	:	:	PUNCT
app01-4398	31	24	the	the	DET
app01-4398	31	25	base	base	NOUN
app01-4398	31	26	with	with	ADP
app01-4398	31	27	the	the	DET
app01-4398	31	28	smaller	small	ADJ
app01-4398	31	29	opening	opening	NOUN
app01-4398	31	30	towards	towards	ADP
app01-4398	31	31	the	the	DET
app01-4398	31	32	target	target	NOUN
app01-4398	31	33	and	and	CCONJ
app01-4398	31	34	the	the	DET
app01-4398	31	35	base	base	NOUN
app01-4398	31	36	with	with	ADP
app01-4398	31	37	the	the	DET
app01-4398	31	38	larger	large	ADJ
app01-4398	31	39	opening	opening	NOUN
app01-4398	31	40	towards	towards	ADP
app01-4398	31	41	the	the	DET
app01-4398	31	42	substrate	substrate	NOUN
app01-4398	31	43	.	.	PUNCT
app01-4398	32	1	the	the	DET
app01-4398	32	2	hollow	hollow	ADJ
app01-4398	32	3	cathode	cathode	NOUN
app01-4398	32	4	produces	produce	NOUN
app01-4398	32	5	,	,	PUNCT
app01-4398	32	6	owing	owe	VERB
app01-4398	32	7	to	to	ADP
app01-4398	32	8	a	a	DET
app01-4398	32	9	hollow	hollow	ADJ
app01-4398	32	10	cathode	cathode	NOUN
app01-4398	32	11	effect	effect	NOUN
app01-4398	32	12	,	,	PUNCT
app01-4398	32	13	a	a	DET
app01-4398	32	14	dense	dense	ADJ
app01-4398	32	15	bunch	bunch	NOUN
app01-4398	32	16	of	of	ADP
app01-4398	32	17	energetic	energetic	ADJ
app01-4398	32	18	electrons	electron	NOUN
app01-4398	32	19	[	[	X
app01-4398	32	20	7	7	NUM
app01-4398	32	21	]	]	PUNCT
app01-4398	32	22	,	,	PUNCT
app01-4398	32	23	that	that	PRON
app01-4398	32	24	leave	leave	VERB
app01-4398	32	25	the	the	DET
app01-4398	32	26	hollow	hollow	ADJ
app01-4398	32	27	cathode	cathode	NOUN
app01-4398	32	28	towards	towards	ADP
app01-4398	32	29	the	the	DET
app01-4398	32	30	target	target	NOUN
app01-4398	32	31	in	in	ADP
app01-4398	32	32	the	the	DET
app01-4398	32	33	final	final	ADJ
app01-4398	32	34	stage	stage	NOUN
app01-4398	32	35	of	of	ADP
app01-4398	32	36	the	the	DET
app01-4398	32	37	process	process	NOUN
app01-4398	32	38	.	.	PUNCT
app01-4398	33	1	the	the	DET
app01-4398	33	2	electrons	electron	NOUN
app01-4398	33	3	of	of	ADP
app01-4398	33	4	the	the	DET
app01-4398	33	5	bunch	bunch	NOUN
app01-4398	33	6	hitting	hit	VERB
app01-4398	33	7	the	the	DET
app01-4398	33	8	target	target	NOUN
app01-4398	33	9	surface	surface	NOUN
app01-4398	33	10	interact	interact	NOUN
app01-4398	33	11	with	with	ADP
app01-4398	33	12	the	the	DET
app01-4398	33	13	atoms	atom	NOUN
app01-4398	33	14	of	of	ADP
app01-4398	33	15	the	the	DET
app01-4398	33	16	target	target	NOUN
app01-4398	33	17	transferring	transfer	VERB
app01-4398	33	18	to	to	ADP
app01-4398	33	19	them	they	PRON
app01-4398	33	20	their	their	PRON
app01-4398	33	21	kinetic	kinetic	ADJ
app01-4398	33	22	energy	energy	NOUN
app01-4398	33	23	and	and	CCONJ
app01-4398	33	24	creating	create	VERB
app01-4398	33	25	a	a	DET
app01-4398	33	26	plume	plume	NOUN
app01-4398	33	27	of	of	ADP
app01-4398	33	28	energetic	energetic	ADJ
app01-4398	33	29	and	and	CCONJ
app01-4398	33	30	highly	highly	ADV
app01-4398	33	31	ionized	ionized	ADJ
app01-4398	33	32	target	target	NOUN
app01-4398	33	33	plasma	plasma	NOUN
app01-4398	33	34	.	.	PUNCT
app01-4398	34	1	the	the	DET
app01-4398	34	2	plasma	plasma	NOUN
app01-4398	34	3	plume	plume	NOUN
app01-4398	34	4	which	which	PRON
app01-4398	34	5	is	be	AUX
app01-4398	34	6	predominantly	predominantly	ADV
app01-4398	34	7	expanding	expand	VERB
app01-4398	34	8	in	in	ADP
app01-4398	34	9	the	the	DET
app01-4398	34	10	direction	direction	NOUN
app01-4398	34	11	perpendicular	perpendicular	NOUN
app01-4398	34	12	to	to	ADP
app01-4398	34	13	the	the	DET
app01-4398	34	14	target	target	NOUN
app01-4398	34	15	surface	surface	NOUN
app01-4398	34	16	faces	face	VERB
app01-4398	34	17	the	the	DET
app01-4398	34	18	hollow	hollow	ADJ
app01-4398	34	19	cathode	cathode	NOUN
app01-4398	34	20	,	,	PUNCT
app01-4398	34	21	enters	enter	VERB
app01-4398	34	22	the	the	DET
app01-4398	34	23	smaller	small	ADJ
app01-4398	34	24	opening	opening	NOUN
app01-4398	34	25	in	in	ADP
app01-4398	34	26	the	the	DET
app01-4398	34	27	cylinder	cylinder	NOUN
app01-4398	34	28	base	base	NOUN
app01-4398	34	29	facing	face	VERB
app01-4398	34	30	the	the	DET
app01-4398	34	31	target	target	NOUN
app01-4398	34	32	,	,	PUNCT
app01-4398	34	33	expands	expand	VERB
app01-4398	34	34	(	(	PUNCT
app01-4398	34	35	flies	fly	NOUN
app01-4398	34	36	)	)	PUNCT
app01-4398	34	37	through	through	ADP
app01-4398	34	38	the	the	DET
app01-4398	34	39	hollow	hollow	ADJ
app01-4398	34	40	cylinder	cylinder	NOUN
app01-4398	34	41	and	and	CCONJ
app01-4398	34	42	leaves	leave	VERB
app01-4398	34	43	the	the	DET
app01-4398	34	44	hollow	hollow	ADJ
app01-4398	34	45	cathode	cathode	NOUN
app01-4398	34	46	through	through	ADP
app01-4398	34	47	the	the	DET
app01-4398	34	48	larger	large	ADJ
app01-4398	34	49	opening	opening	NOUN
app01-4398	34	50	base	base	NOUN
app01-4398	34	51	towards	towards	ADP
app01-4398	34	52	the	the	DET
app01-4398	34	53	substrate	substrate	NOUN
app01-4398	34	54	(	(	PUNCT
app01-4398	34	55	therefore	therefore	ADV
app01-4398	34	56	"	"	PUNCT
app01-4398	34	57	flight	flight	NOUN
app01-4398	34	58	-	-	PUNCT
app01-4398	34	59	through	through	ADP
app01-4398	34	60	cathode	cathode	NOUN
app01-4398	34	61	"	"	PUNCT
app01-4398	34	62	)	)	PUNCT
app01-4398	34	63	.	.	PUNCT
app01-4398	35	1	2.2	2.2	NUM
app01-4398	35	2	.	.	PUNCT
app01-4398	36	1	chameleon	chameleon	NOUN
app01-4398	36	2	coating	coat	VERB
app01-4398	36	3	it	it	PRON
app01-4398	36	4	is	be	AUX
app01-4398	36	5	often	often	ADV
app01-4398	36	6	necessary	necessary	ADJ
app01-4398	36	7	to	to	PART
app01-4398	36	8	use	use	VERB
app01-4398	36	9	a	a	DET
app01-4398	36	10	combination	combination	NOUN
app01-4398	36	11	of	of	ADP
app01-4398	36	12	different	different	ADJ
app01-4398	36	13	materials	material	NOUN
app01-4398	36	14	within	within	ADP
app01-4398	36	15	one	one	NUM
app01-4398	36	16	thin	thin	ADJ
app01-4398	36	17	film	film	NOUN
app01-4398	36	18	layer	layer	NOUN
app01-4398	36	19	to	to	PART
app01-4398	36	20	optimize	optimize	VERB
app01-4398	36	21	its	its	PRON
app01-4398	36	22	selected	select	VERB
app01-4398	36	23	properties	property	NOUN
app01-4398	36	24	.	.	PUNCT
app01-4398	37	1	for	for	ADP
app01-4398	37	2	example	example	NOUN
app01-4398	37	3	,	,	PUNCT
app01-4398	37	4	it	it	PRON
app01-4398	37	5	is	be	AUX
app01-4398	37	6	possible	possible	ADJ
app01-4398	37	7	to	to	PART
app01-4398	37	8	combine	combine	VERB
app01-4398	37	9	an	an	DET
app01-4398	37	10	amorphous	amorphous	ADJ
app01-4398	37	11	matrix	matrix	NOUN
app01-4398	37	12	from	from	ADP
app01-4398	37	13	dlc	dlc	NOUN
app01-4398	37	14	(	(	PUNCT
app01-4398	37	15	diamond	diamond	NOUN
app01-4398	37	16	like	like	ADP
app01-4398	37	17	carbon	carbon	NOUN
app01-4398	37	18	)	)	PUNCT
app01-4398	37	19	with	with	ADP
app01-4398	37	20	small	small	ADJ
app01-4398	37	21	grains	grain	NOUN
app01-4398	37	22	of	of	ADP
app01-4398	37	23	hard	hard	ADJ
app01-4398	37	24	/	/	SYM
app01-4398	37	25	ultra	ultra	ADJ
app01-4398	37	26	-	-	ADJ
app01-4398	37	27	hard	hard	ADJ
app01-4398	37	28	material	material	NOUN
app01-4398	37	29	(	(	PUNCT
app01-4398	37	30	such	such	ADJ
app01-4398	37	31	as	as	ADP
app01-4398	37	32	tungsten	tungsten	ADJ
app01-4398	37	33	carbide	carbide	NOUN
app01-4398	37	34	)	)	PUNCT
app01-4398	37	35	within	within	ADP
app01-4398	37	36	it	it	PRON
app01-4398	37	37	.	.	PUNCT
app01-4398	38	1	the	the	DET
app01-4398	38	2	grains	grain	NOUN
app01-4398	38	3	should	should	AUX
app01-4398	38	4	have	have	VERB
app01-4398	38	5	the	the	DET
app01-4398	38	6	diameter	diameter	NOUN
app01-4398	38	7	in	in	ADP
app01-4398	38	8	tens	ten	NOUN
app01-4398	38	9	of	of	ADP
app01-4398	38	10	nm	nm	NOUN
app01-4398	38	11	and	and	CCONJ
app01-4398	38	12	distance	distance	NOUN
app01-4398	38	13	between	between	ADP
app01-4398	38	14	them	they	PRON
app01-4398	38	15	in	in	ADP
app01-4398	38	16	nm	nm	NOUN
app01-4398	38	17	for	for	ADP
app01-4398	38	18	the	the	DET
app01-4398	38	19	best	good	ADJ
app01-4398	38	20	mechanical	mechanical	ADJ
app01-4398	38	21	properties	property	NOUN
app01-4398	38	22	.	.	PUNCT
app01-4398	39	1	the	the	DET
app01-4398	39	2	diamond	diamond	NOUN
app01-4398	39	3	like	like	ADP
app01-4398	39	4	matrix	matrix	NOUN
app01-4398	39	5	provides	provide	VERB
app01-4398	39	6	the	the	DET
app01-4398	39	7	high	high	ADJ
app01-4398	39	8	hardness	hardness	NOUN
app01-4398	39	9	and	and	CCONJ
app01-4398	39	10	low	low	ADJ
app01-4398	39	11	friction	friction	NOUN
app01-4398	39	12	of	of	ADP
app01-4398	39	13	deposited	deposit	VERB
app01-4398	39	14	thin	thin	ADJ
app01-4398	39	15	film	film	NOUN
app01-4398	39	16	,	,	PUNCT
app01-4398	39	17	while	while	SCONJ
app01-4398	39	18	the	the	DET
app01-4398	39	19	grains	grain	NOUN
app01-4398	39	20	of	of	ADP
app01-4398	39	21	carbide	carbide	NOUN
app01-4398	39	22	prevent	prevent	VERB
app01-4398	39	23	the	the	DET
app01-4398	39	24	film	film	NOUN
app01-4398	39	25	from	from	ADP
app01-4398	39	26	brittle	brittle	ADJ
app01-4398	39	27	fracturing	fracturing	NOUN
app01-4398	39	28	and	and	CCONJ
app01-4398	39	29	,	,	PUNCT
app01-4398	39	30	if	if	SCONJ
app01-4398	39	31	required	require	VERB
app01-4398	39	32	,	,	PUNCT
app01-4398	39	33	ensure	ensure	VERB
app01-4398	39	34	the	the	DET
app01-4398	39	35	abrasive	abrasive	ADJ
app01-4398	39	36	properties	property	NOUN
app01-4398	39	37	of	of	ADP
app01-4398	39	38	the	the	DET
app01-4398	39	39	film	film	NOUN
app01-4398	39	40	as	as	ADP
app01-4398	39	41	e.g.	e.g.	ADV
app01-4398	39	42	in	in	ADP
app01-4398	39	43	the	the	DET
app01-4398	39	44	case	case	NOUN
app01-4398	39	45	of	of	ADP
app01-4398	39	46	cutting	cut	VERB
app01-4398	39	47	tools	tool	NOUN
app01-4398	39	48	.	.	PUNCT
app01-4398	40	1	unfortunately	unfortunately	ADV
app01-4398	40	2	,	,	PUNCT
app01-4398	40	3	the	the	DET
app01-4398	40	4	low	low	ADJ
app01-4398	40	5	friction	friction	NOUN
app01-4398	40	6	of	of	ADP
app01-4398	40	7	this	this	DET
app01-4398	40	8	film	film	NOUN
app01-4398	40	9	occurs	occur	VERB
app01-4398	40	10	only	only	ADV
app01-4398	40	11	in	in	ADP
app01-4398	40	12	humid	humid	ADJ
app01-4398	40	13	environment	environment	NOUN
app01-4398	40	14	,	,	PUNCT
app01-4398	40	15	because	because	SCONJ
app01-4398	40	16	the	the	DET
app01-4398	40	17	dlc	dlc	NOUN
app01-4398	40	18	under	under	ADP
app01-4398	40	19	the	the	DET
app01-4398	40	20	friction	friction	NOUN
app01-4398	40	21	converts	convert	NOUN
app01-4398	40	22	to	to	PART
app01-4398	40	23	graphite	graphite	VERB
app01-4398	40	24	.	.	PUNCT
app01-4398	41	1	the	the	DET
app01-4398	41	2	graphite	graphite	NOUN
app01-4398	41	3	does	do	AUX
app01-4398	41	4	not	not	PART
app01-4398	41	5	have	have	VERB
app01-4398	41	6	good	good	ADJ
app01-4398	41	7	wear	wear	NOUN
app01-4398	41	8	resistance	resistance	NOUN
app01-4398	41	9	however	however	ADV
app01-4398	41	10	it	it	PRON
app01-4398	41	11	could	could	AUX
app01-4398	41	12	be	be	AUX
app01-4398	41	13	compensated	compensate	VERB
app01-4398	41	14	by	by	ADP
app01-4398	41	15	the	the	DET
app01-4398	41	16	grains	grain	NOUN
app01-4398	41	17	of	of	ADP
app01-4398	41	18	hard	hard	ADJ
app01-4398	41	19	material	material	NOUN
app01-4398	41	20	.	.	PUNCT
app01-4398	42	1	graphite	graphite	NOUN
app01-4398	42	2	has	have	VERB
app01-4398	42	3	low	low	ADJ
app01-4398	42	4	frictions	friction	NOUN
app01-4398	42	5	coefficient	coefficient	NOUN
app01-4398	42	6	only	only	ADV
app01-4398	42	7	in	in	ADP
app01-4398	42	8	humid	humid	ADJ
app01-4398	42	9	environment	environment	NOUN
app01-4398	42	10	.	.	PUNCT
app01-4398	43	1	to	to	PART
app01-4398	43	2	provide	provide	VERB
app01-4398	43	3	low	low	ADJ
app01-4398	43	4	friction	friction	NOUN
app01-4398	43	5	of	of	ADP
app01-4398	43	6	the	the	DET
app01-4398	43	7	film	film	NOUN
app01-4398	43	8	in	in	ADP
app01-4398	43	9	dry	dry	ADJ
app01-4398	43	10	environment	environment	NOUN
app01-4398	43	11	or	or	CCONJ
app01-4398	43	12	in	in	ADP
app01-4398	43	13	vacuum	vacuum	NOUN
app01-4398	43	14	it	it	PRON
app01-4398	43	15	is	be	AUX
app01-4398	43	16	necessary	necessary	ADJ
app01-4398	43	17	to	to	PART
app01-4398	43	18	add	add	VERB
app01-4398	43	19	another	another	DET
app01-4398	43	20	material	material	NOUN
app01-4398	43	21	e.g.	e.g.	ADV
app01-4398	43	22	mos2	mos2	NOUN
app01-4398	43	23	which	which	PRON
app01-4398	43	24	has	have	VERB
app01-4398	43	25	a	a	DET
app01-4398	43	26	hexagonal	hexagonal	ADJ
app01-4398	43	27	structure	structure	NOUN
app01-4398	43	28	similar	similar	ADJ
app01-4398	43	29	to	to	ADP
app01-4398	43	30	the	the	DET
app01-4398	43	31	graphite	graphite	NOUN
app01-4398	43	32	but	but	CCONJ
app01-4398	43	33	is	be	AUX
app01-4398	43	34	excellent	excellent	ADJ
app01-4398	43	35	lubricant	lubricant	NOUN
app01-4398	43	36	for	for	ADP
app01-4398	43	37	dry	dry	ADJ
app01-4398	43	38	environment	environment	NOUN
app01-4398	43	39	or	or	CCONJ
app01-4398	43	40	vacuum	vacuum	NOUN
app01-4398	43	41	.	.	PUNCT
app01-4398	44	1	to	to	PART
app01-4398	44	2	provide	provide	VERB
app01-4398	44	3	the	the	DET
app01-4398	44	4	low	low	ADJ
app01-4398	44	5	friction	friction	NOUN
app01-4398	44	6	the	the	DET
app01-4398	44	7	mos2	mos2	PROPN
app01-4398	44	8	film	film	NOUN
app01-4398	44	9	has	have	VERB
app01-4398	44	10	to	to	PART
app01-4398	44	11	present	present	VERB
app01-4398	44	12	the	the	DET
app01-4398	44	13	hexagonal	hexagonal	ADJ
app01-4398	44	14	planes	plane	NOUN
app01-4398	44	15	parallel	parallel	NOUN
app01-4398	44	16	to	to	ADP
app01-4398	44	17	the	the	DET
app01-4398	44	18	friction	friction	NOUN
app01-4398	44	19	force	force	NOUN
app01-4398	44	20	.	.	PUNCT
app01-4398	45	1	fortunately	fortunately	ADV
app01-4398	45	2	,	,	PUNCT
app01-4398	45	3	the	the	DET
app01-4398	45	4	mos2	mos2	PROPN
app01-4398	45	5	material	material	NOUN
app01-4398	45	6	under	under	ADP
app01-4398	45	7	friction	friction	NOUN
app01-4398	45	8	has	have	VERB
app01-4398	45	9	the	the	DET
app01-4398	45	10	tendency	tendency	NOUN
app01-4398	45	11	to	to	PART
app01-4398	45	12	orient	orient	VERB
app01-4398	45	13	its	its	PRON
app01-4398	45	14	structure	structure	NOUN
app01-4398	45	15	in	in	ADP
app01-4398	45	16	such	such	DET
app01-4398	45	17	a	a	DET
app01-4398	45	18	way	way	NOUN
app01-4398	45	19	that	that	PRON
app01-4398	45	20	it	it	PRON
app01-4398	45	21	provides	provide	VERB
app01-4398	45	22	the	the	DET
app01-4398	45	23	lowest	low	ADJ
app01-4398	45	24	friction	friction	NOUN
app01-4398	45	25	coefficient	coefficient	NOUN
app01-4398	45	26	.	.	PUNCT
app01-4398	46	1	such	such	ADJ
app01-4398	46	2	ability	ability	NOUN
app01-4398	46	3	allows	allow	VERB
app01-4398	46	4	substantial	substantial	ADJ
app01-4398	46	5	reduction	reduction	NOUN
app01-4398	46	6	of	of	ADP
app01-4398	46	7	the	the	DET
app01-4398	46	8	system	system	NOUN
app01-4398	46	9	friction	friction	NOUN
app01-4398	46	10	coefficient	coefficient	NOUN
app01-4398	46	11	in	in	ADP
app01-4398	46	12	dry	dry	ADJ
app01-4398	46	13	environment	environment	NOUN
app01-4398	46	14	just	just	ADV
app01-4398	46	15	by	by	ADP
app01-4398	46	16	adding	add	VERB
app01-4398	46	17	the	the	DET
app01-4398	46	18	mos2	mos2	PROPN
app01-4398	46	19	material	material	NOUN
app01-4398	46	20	to	to	ADP
app01-4398	46	21	the	the	DET
app01-4398	46	22	dlc	dlc	NOUN
app01-4398	46	23	matrix	matrix	NOUN
app01-4398	46	24	with	with	ADP
app01-4398	46	25	carbide	carbide	NOUN
app01-4398	46	26	/	/	SYM
app01-4398	46	27	nitrite	nitrite	NOUN
app01-4398	46	28	particles	particle	NOUN
app01-4398	46	29	incorporated	incorporate	VERB
app01-4398	46	30	.	.	PUNCT
app01-4398	47	1	film	film	NOUN
app01-4398	47	2	composition	composition	NOUN
app01-4398	47	3	of	of	ADP
app01-4398	47	4	mos2	mos2	NOUN
app01-4398	47	5	/	/	SYM
app01-4398	47	6	dlc	dlc	PROPN
app01-4398	47	7	/	/	SYM
app01-4398	47	8	wc	wc	PROPN
app01-4398	47	9	could	could	AUX
app01-4398	47	10	be	be	AUX
app01-4398	47	11	called	call	VERB
app01-4398	47	12	chameleon	chameleon	NOUN
app01-4398	47	13	because	because	SCONJ
app01-4398	47	14	it	it	PRON
app01-4398	47	15	adjusts	adjust	VERB
app01-4398	47	16	its	its	PRON
app01-4398	47	17	mechanical	mechanical	ADJ
app01-4398	47	18	properties	property	NOUN
app01-4398	47	19	to	to	ADP
app01-4398	47	20	the	the	DET
app01-4398	47	21	environment	environment	NOUN
app01-4398	47	22	in	in	ADP
app01-4398	47	23	which	which	PRON
app01-4398	47	24	it	it	PRON
app01-4398	47	25	is	be	AUX
app01-4398	47	26	situated	situate	VERB
app01-4398	47	27	.	.	PUNCT
app01-4398	48	1	in	in	ADP
app01-4398	48	2	humid	humid	PROPN
app01-4398	48	3	environment	environment	NOUN
app01-4398	48	4	,	,	PUNCT
app01-4398	48	5	the	the	DET
app01-4398	48	6	amorphous	amorphous	ADJ
app01-4398	48	7	dlc	dlc	NOUN
app01-4398	48	8	provides	provide	VERB
app01-4398	48	9	low	low	ADJ
app01-4398	48	10	friction	friction	NOUN
app01-4398	48	11	,	,	PUNCT
app01-4398	48	12	the	the	DET
app01-4398	48	13	mos2	mos2	PROPN
app01-4398	48	14	and	and	CCONJ
app01-4398	48	15	wc	wc	PROPN
app01-4398	48	16	are	be	AUX
app01-4398	48	17	scratched	scratch	VERB
app01-4398	48	18	from	from	ADP
app01-4398	48	19	the	the	DET
app01-4398	48	20	film	film	NOUN
app01-4398	48	21	surface	surface	NOUN
app01-4398	48	22	in	in	ADP
app01-4398	48	23	form	form	NOUN
app01-4398	48	24	of	of	ADP
app01-4398	48	25	a	a	DET
app01-4398	48	26	debris	debris	NOUN
app01-4398	48	27	.	.	PUNCT
app01-4398	49	1	in	in	ADP
app01-4398	49	2	dry	dry	ADJ
app01-4398	49	3	environment	environment	NOUN
app01-4398	49	4	the	the	DET
app01-4398	49	5	low	low	ADJ
app01-4398	49	6	friction	friction	NOUN
app01-4398	49	7	is	be	AUX
app01-4398	49	8	provided	provide	VERB
app01-4398	49	9	by	by	ADP
app01-4398	49	10	mos2	mos2	NOUN
app01-4398	49	11	,	,	PUNCT
app01-4398	49	12	the	the	DET
app01-4398	49	13	graphitized	graphitize	VERB
app01-4398	49	14	dlc	dlc	NOUN
app01-4398	49	15	and	and	CCONJ
app01-4398	49	16	wc	wc	PROPN
app01-4398	49	17	are	be	AUX
app01-4398	49	18	scratched	scratch	VERB
app01-4398	49	19	from	from	ADP
app01-4398	49	20	the	the	DET
app01-4398	49	21	surface	surface	NOUN
app01-4398	50	1	[	[	X
app01-4398	50	2	1	1	NUM
app01-4398	50	3	]	]	PUNCT
app01-4398	50	4	(	(	PUNCT
app01-4398	50	5	figure	figure	NOUN
app01-4398	50	6	2	2	NUM
app01-4398	50	7	)	)	PUNCT
app01-4398	50	8	.	.	PUNCT
app01-4398	51	1	we	we	PRON
app01-4398	51	2	assume	assume	VERB
app01-4398	51	3	that	that	SCONJ
app01-4398	51	4	the	the	DET
app01-4398	51	5	ijd	ijd	NOUN
app01-4398	51	6	could	could	AUX
app01-4398	51	7	be	be	AUX
app01-4398	51	8	good	good	ADJ
app01-4398	51	9	choice	choice	NOUN
app01-4398	51	10	for	for	ADP
app01-4398	51	11	preparing	prepare	VERB
app01-4398	51	12	such	such	ADJ
app01-4398	51	13	film	film	NOUN
app01-4398	51	14	.	.	PUNCT
app01-4398	52	1	there	there	PRON
app01-4398	52	2	are	be	VERB
app01-4398	52	3	two	two	NUM
app01-4398	52	4	options	option	NOUN
app01-4398	52	5	how	how	SCONJ
app01-4398	52	6	the	the	DET
app01-4398	52	7	ijd	ijd	NOUN
app01-4398	52	8	could	could	AUX
app01-4398	52	9	be	be	AUX
app01-4398	52	10	used	use	VERB
app01-4398	52	11	.	.	PUNCT
app01-4398	53	1	first	first	ADJ
app01-4398	53	2	option	option	NOUN
app01-4398	53	3	uses	use	VERB
app01-4398	53	4	two	two	NUM
app01-4398	53	5	electron	electron	NOUN
app01-4398	53	6	guns	gun	NOUN
app01-4398	53	7	(	(	PUNCT
app01-4398	53	8	ijds	ijds	PROPN
app01-4398	53	9	)	)	PUNCT
app01-4398	53	10	with	with	ADP
app01-4398	53	11	two	two	NUM
app01-4398	53	12	seperated	seperated	ADJ
app01-4398	53	13	targets	target	NOUN
app01-4398	53	14	(	(	PUNCT
app01-4398	53	15	each	each	PRON
app01-4398	53	16	for	for	ADP
app01-4398	53	17	one	one	NUM
app01-4398	53	18	ijd	ijd	NOUN
app01-4398	53	19	)	)	PUNCT
app01-4398	53	20	.	.	PUNCT
app01-4398	54	1	then	then	ADV
app01-4398	54	2	the	the	DET
app01-4398	54	3	substrate	substrate	NOUN
app01-4398	54	4	must	must	AUX
app01-4398	54	5	be	be	AUX
app01-4398	54	6	placed	place	VERB
app01-4398	54	7	in	in	ADP
app01-4398	54	8	position	position	NOUN
app01-4398	54	9	where	where	SCONJ
app01-4398	54	10	both	both	DET
app01-4398	54	11	plasma	plasma	NOUN
app01-4398	54	12	plumes	plume	NOUN
app01-4398	54	13	overlap	overlap	VERB
app01-4398	54	14	.	.	PUNCT
app01-4398	55	1	the	the	DET
app01-4398	55	2	second	second	ADJ
app01-4398	55	3	option	option	NOUN
app01-4398	55	4	uses	use	VERB
app01-4398	55	5	only	only	ADV
app01-4398	55	6	one	one	NUM
app01-4398	55	7	electron	electron	NOUN
app01-4398	55	8	gun	gun	NOUN
app01-4398	55	9	but	but	CCONJ
app01-4398	55	10	needs	need	VERB
app01-4398	55	11	rotary	rotary	ADJ
app01-4398	55	12	target	target	NOUN
app01-4398	55	13	holder	holder	NOUN
app01-4398	55	14	.	.	PUNCT
app01-4398	56	1	the	the	DET
app01-4398	56	2	rotary	rotary	ADJ
app01-4398	56	3	target	target	NOUN
app01-4398	56	4	holder	holder	NOUN
app01-4398	56	5	provides	provide	VERB
app01-4398	56	6	opportunity	opportunity	NOUN
app01-4398	56	7	20	20	NUM
app01-4398	56	8	vol	vol	NOUN
app01-4398	56	9	.	.	PUNCT
app01-4398	57	1	9/2017	9/2017	NUM
app01-4398	57	2	preparing	prepare	VERB
app01-4398	57	3	of	of	ADP
app01-4398	57	4	the	the	DET
app01-4398	57	5	chameleon	chameleon	NOUN
app01-4398	57	6	coating	coating	NOUN
app01-4398	57	7	by	by	ADP
app01-4398	57	8	the	the	DET
app01-4398	57	9	ion	ion	NOUN
app01-4398	57	10	jet	jet	NOUN
app01-4398	57	11	deposition	deposition	NOUN
app01-4398	57	12	method	method	NOUN
app01-4398	57	13	figure	figure	NOUN
app01-4398	57	14	2	2	NUM
app01-4398	57	15	.	.	PUNCT
app01-4398	58	1	principle	principle	NOUN
app01-4398	58	2	of	of	ADP
app01-4398	58	3	chameleon	chameleon	NOUN
app01-4398	58	4	coating	coating	NOUN
app01-4398	58	5	function	function	NOUN
app01-4398	59	1	[	[	X
app01-4398	59	2	1	1	NUM
app01-4398	59	3	]	]	PUNCT
app01-4398	59	4	.	.	PUNCT
app01-4398	60	1	name	name	NOUN
app01-4398	60	2	substrate	substrate	NOUN
app01-4398	60	3	film	film	NOUN
app01-4398	60	4	time	time	NOUN
app01-4398	60	5	[	[	X
app01-4398	60	6	min	min	X
app01-4398	60	7	]	]	X
app01-4398	60	8	pressure	pressure	NOUN
app01-4398	60	9	[	[	X
app01-4398	60	10	mbar	mbar	X
app01-4398	60	11	]	]	X
app01-4398	60	12	distance	distance	NOUN
app01-4398	60	13	[	[	X
app01-4398	60	14	mm	mm	X
app01-4398	60	15	]	]	X
app01-4398	60	16	kuba7	kuba7	PROPN
app01-4398	60	17	silicon	silicon	PROPN
app01-4398	60	18	wafer	wafer	NOUN
app01-4398	60	19	tin	tin	NOUN
app01-4398	60	20	15	15	NUM
app01-4398	60	21	1.6	1.6	NUM
app01-4398	60	22	105	105	NUM
app01-4398	60	23	kuba9	kuba9	X
app01-4398	60	24	stainless	stainless	ADJ
app01-4398	60	25	-	-	PUNCT
app01-4398	60	26	steel	steel	NOUN
app01-4398	60	27	tin	tin	NOUN
app01-4398	60	28	14	14	NUM
app01-4398	60	29	1.4	1.4	NUM
app01-4398	60	30	105	105	NUM
app01-4398	60	31	k2	k2	ADJ
app01-4398	60	32	aluminium	aluminium	NOUN
app01-4398	60	33	alloy	alloy	NOUN
app01-4398	60	34	sic	sic	ADJ
app01-4398	60	35	30	30	NUM
app01-4398	60	36	0.6	0.6	NUM
app01-4398	60	37	180	180	NUM
app01-4398	60	38	table	table	NOUN
app01-4398	60	39	1	1	NUM
app01-4398	60	40	.	.	PUNCT
app01-4398	60	41	deposition	deposition	NOUN
app01-4398	60	42	parameters	parameter	NOUN
app01-4398	60	43	.	.	PUNCT
app01-4398	61	1	of	of	ADP
app01-4398	61	2	deposition	deposition	NOUN
app01-4398	61	3	from	from	ADP
app01-4398	61	4	multiple	multiple	ADJ
app01-4398	61	5	targets	target	NOUN
app01-4398	61	6	only	only	ADV
app01-4398	61	7	with	with	ADP
app01-4398	61	8	one	one	NUM
app01-4398	61	9	electron	electron	NOUN
app01-4398	61	10	gun	gun	NOUN
app01-4398	61	11	(	(	PUNCT
app01-4398	61	12	ijd	ijd	PROPN
app01-4398	61	13	)	)	PUNCT
app01-4398	61	14	.	.	PUNCT
app01-4398	62	1	3	3	X
app01-4398	62	2	.	.	X
app01-4398	62	3	experiment	experiment	NOUN
app01-4398	62	4	two	two	NUM
app01-4398	62	5	types	type	NOUN
app01-4398	62	6	of	of	ADP
app01-4398	62	7	hard	hard	ADJ
app01-4398	62	8	material	material	NOUN
app01-4398	62	9	have	have	AUX
app01-4398	62	10	been	be	AUX
app01-4398	62	11	prepared	prepare	VERB
app01-4398	62	12	trying	try	VERB
app01-4398	62	13	to	to	PART
app01-4398	62	14	enhance	enhance	VERB
app01-4398	62	15	the	the	DET
app01-4398	62	16	resistance	resistance	NOUN
app01-4398	62	17	of	of	ADP
app01-4398	62	18	the	the	DET
app01-4398	62	19	deposited	deposit	VERB
app01-4398	62	20	layer	layer	NOUN
app01-4398	62	21	against	against	ADP
app01-4398	62	22	fracturing	fracturing	NOUN
app01-4398	62	23	,	,	PUNCT
app01-4398	62	24	namely	namely	ADV
app01-4398	62	25	,	,	PUNCT
app01-4398	62	26	the	the	DET
app01-4398	62	27	sic	sic	NOUN
app01-4398	62	28	deposited	deposit	VERB
app01-4398	62	29	on	on	ADP
app01-4398	62	30	aluminium	aluminium	NOUN
app01-4398	62	31	alloy	alloy	NOUN
app01-4398	62	32	and	and	CCONJ
app01-4398	62	33	tin	tin	NOUN
app01-4398	62	34	deposited	deposit	VERB
app01-4398	62	35	on	on	ADP
app01-4398	62	36	stainless	stainless	ADJ
app01-4398	62	37	steel	steel	NOUN
app01-4398	62	38	and	and	CCONJ
app01-4398	62	39	single	single	ADJ
app01-4398	62	40	crystalline	crystalline	PROPN
app01-4398	62	41	silicon	silicon	NOUN
app01-4398	62	42	.	.	PUNCT
app01-4398	63	1	all	all	DET
app01-4398	63	2	deposition	deposition	NOUN
app01-4398	63	3	events	event	NOUN
app01-4398	63	4	have	have	AUX
app01-4398	63	5	been	be	AUX
app01-4398	63	6	performed	perform	VERB
app01-4398	63	7	in	in	ADP
app01-4398	63	8	ar	ar	NOUN
app01-4398	63	9	atmosphere	atmosphere	NOUN
app01-4398	63	10	.	.	PUNCT
app01-4398	64	1	the	the	DET
app01-4398	64	2	deposition	deposition	NOUN
app01-4398	64	3	time	time	NOUN
app01-4398	64	4	,	,	PUNCT
app01-4398	64	5	process	process	NOUN
app01-4398	64	6	gas	gas	NOUN
app01-4398	64	7	(	(	PUNCT
app01-4398	64	8	ar	ar	NOUN
app01-4398	64	9	)	)	PUNCT
app01-4398	64	10	pressure	pressure	NOUN
app01-4398	64	11	during	during	ADP
app01-4398	64	12	deposition	deposition	NOUN
app01-4398	64	13	and	and	CCONJ
app01-4398	64	14	distance	distance	NOUN
app01-4398	64	15	between	between	ADP
app01-4398	64	16	the	the	DET
app01-4398	64	17	target	target	NOUN
app01-4398	64	18	and	and	CCONJ
app01-4398	64	19	the	the	DET
app01-4398	64	20	substrate	substrate	NOUN
app01-4398	64	21	(	(	PUNCT
app01-4398	64	22	see	see	VERB
app01-4398	64	23	table	table	NOUN
app01-4398	64	24	1	1	NUM
app01-4398	64	25	)	)	PUNCT
app01-4398	64	26	have	have	AUX
app01-4398	64	27	been	be	AUX
app01-4398	64	28	chosen	choose	VERB
app01-4398	64	29	as	as	ADP
app01-4398	64	30	important	important	ADJ
app01-4398	64	31	process	process	NOUN
app01-4398	64	32	parameters	parameter	NOUN
app01-4398	64	33	to	to	PART
app01-4398	64	34	be	be	AUX
app01-4398	64	35	adjusted	adjust	VERB
app01-4398	64	36	for	for	ADP
app01-4398	64	37	different	different	ADJ
app01-4398	64	38	deposited	deposit	VERB
app01-4398	64	39	samples	sample	NOUN
app01-4398	64	40	.	.	PUNCT
app01-4398	65	1	the	the	DET
app01-4398	65	2	films	film	NOUN
app01-4398	65	3	have	have	AUX
app01-4398	65	4	been	be	AUX
app01-4398	65	5	analysed	analyse	VERB
app01-4398	65	6	by	by	ADP
app01-4398	65	7	raman	raman	NOUN
app01-4398	65	8	spectroscopy	spectroscopy	NOUN
app01-4398	65	9	,	,	PUNCT
app01-4398	65	10	sem	sem	NOUN
app01-4398	65	11	and	and	CCONJ
app01-4398	65	12	xps	xps	PROPN
app01-4398	65	13	.	.	PROPN
app01-4398	66	1	4	4	X
app01-4398	66	2	.	.	X
app01-4398	66	3	results	result	VERB
app01-4398	66	4	the	the	DET
app01-4398	66	5	thickness	thickness	NOUN
app01-4398	66	6	of	of	ADP
app01-4398	66	7	films	film	NOUN
app01-4398	66	8	was	be	AUX
app01-4398	66	9	not	not	PART
app01-4398	66	10	directly	directly	ADV
app01-4398	66	11	measured	measure	VERB
app01-4398	66	12	,	,	PUNCT
app01-4398	66	13	but	but	CCONJ
app01-4398	66	14	it	it	PRON
app01-4398	66	15	was	be	AUX
app01-4398	66	16	deduced	deduce	VERB
app01-4398	66	17	from	from	ADP
app01-4398	66	18	the	the	DET
app01-4398	66	19	xrd	xrd	NOUN
app01-4398	66	20	results	result	NOUN
app01-4398	66	21	and	and	CCONJ
app01-4398	66	22	from	from	ADP
app01-4398	66	23	the	the	DET
app01-4398	66	24	values	value	NOUN
app01-4398	66	25	obtaind	obtaind	NOUN
app01-4398	66	26	for	for	ADP
app01-4398	66	27	similar	similar	ADJ
app01-4398	66	28	films	film	NOUN
app01-4398	66	29	,	,	PUNCT
app01-4398	66	30	which	which	PRON
app01-4398	66	31	was	be	AUX
app01-4398	66	32	deposited	deposit	VERB
app01-4398	66	33	with	with	ADP
app01-4398	66	34	the	the	DET
app01-4398	66	35	same	same	ADJ
app01-4398	66	36	deposition	deposition	NOUN
app01-4398	66	37	parameters.the	parameters.the	DET
app01-4398	66	38	roughly	roughly	ADV
app01-4398	66	39	estimated	estimate	VERB
app01-4398	66	40	thickness	thickness	NOUN
app01-4398	66	41	value	value	NOUN
app01-4398	66	42	obtaind	obtaind	NOUN
app01-4398	66	43	in	in	ADP
app01-4398	66	44	such	such	ADJ
app01-4398	66	45	way	way	NOUN
app01-4398	66	46	amounted	amount	VERB
app01-4398	66	47	several	several	ADJ
app01-4398	66	48	microns	micron	NOUN
app01-4398	66	49	.	.	PUNCT
app01-4398	67	1	4.1	4.1	NUM
app01-4398	67	2	.	.	PUNCT
app01-4398	67	3	raman	raman	NOUN
app01-4398	67	4	spectroscopy	spectroscopy	VERB
app01-4398	67	5	the	the	DET
app01-4398	67	6	measurement	measurement	NOUN
app01-4398	67	7	was	be	AUX
app01-4398	67	8	performed	perform	VERB
app01-4398	67	9	at	at	ADP
app01-4398	67	10	room	room	NOUN
app01-4398	67	11	temperature	temperature	NOUN
app01-4398	67	12	using	use	VERB
app01-4398	67	13	an	an	DET
app01-4398	67	14	excitation	excitation	NOUN
app01-4398	67	15	laser	laser	NOUN
app01-4398	67	16	source	source	NOUN
app01-4398	67	17	with	with	ADP
app01-4398	67	18	the	the	DET
app01-4398	67	19	wavelength	wavelength	NOUN
app01-4398	67	20	of	of	ADP
app01-4398	67	21	488	488	NUM
app01-4398	67	22	nm	nm	NOUN
app01-4398	67	23	.	.	PUNCT
app01-4398	68	1	the	the	DET
app01-4398	68	2	exact	exact	ADJ
app01-4398	68	3	positions	position	NOUN
app01-4398	68	4	of	of	ADP
app01-4398	68	5	the	the	DET
app01-4398	68	6	peaks	peak	NOUN
app01-4398	68	7	(	(	PUNCT
app01-4398	68	8	bands	band	NOUN
app01-4398	68	9	)	)	PUNCT
app01-4398	68	10	in	in	ADP
app01-4398	68	11	the	the	DET
app01-4398	68	12	raman	raman	NOUN
app01-4398	68	13	spectrum	spectrum	NOUN
app01-4398	68	14	were	be	AUX
app01-4398	68	15	found	find	VERB
app01-4398	68	16	by	by	ADP
app01-4398	68	17	using	use	VERB
app01-4398	68	18	a	a	DET
app01-4398	68	19	function	function	NOUN
app01-4398	68	20	findpeaks	findpeak	NOUN
app01-4398	68	21	in	in	ADP
app01-4398	68	22	matlab	matlab	PROPN
app01-4398	68	23	r2008b	r2008b	PROPN
app01-4398	68	24	.	.	PUNCT
app01-4398	69	1	the	the	DET
app01-4398	69	2	raman	raman	NOUN
app01-4398	69	3	spectrum	spectrum	NOUN
app01-4398	69	4	of	of	ADP
app01-4398	69	5	the	the	DET
app01-4398	69	6	sample	sample	NOUN
app01-4398	69	7	k2	k2	PROPN
app01-4398	69	8	is	be	AUX
app01-4398	69	9	shown	show	VERB
app01-4398	69	10	in	in	ADP
app01-4398	69	11	the	the	DET
app01-4398	69	12	figure	figure	NOUN
app01-4398	69	13	3	3	NUM
app01-4398	69	14	:	:	PUNCT
app01-4398	69	15	figure	figure	NOUN
app01-4398	69	16	3	3	NUM
app01-4398	69	17	.	.	PUNCT
app01-4398	69	18	raman	raman	NOUN
app01-4398	69	19	spectrum	spectrum	NOUN
app01-4398	69	20	of	of	ADP
app01-4398	69	21	k2	k2	ADJ
app01-4398	69	22	sample	sample	NOUN
app01-4398	69	23	.	.	PUNCT
app01-4398	70	1	the	the	DET
app01-4398	70	2	measured	measure	VERB
app01-4398	70	3	raman	raman	NOUN
app01-4398	70	4	band	band	NOUN
app01-4398	70	5	at	at	ADP
app01-4398	70	6	478	478	NUM
app01-4398	70	7	cm−1	cm−1	NOUN
app01-4398	70	8	(	(	PUNCT
app01-4398	70	9	black	black	ADJ
app01-4398	70	10	arrow	arrow	NOUN
app01-4398	70	11	)	)	PUNCT
app01-4398	70	12	is	be	AUX
app01-4398	70	13	coresponding	coresponde	VERB
app01-4398	70	14	to	to	ADP
app01-4398	70	15	si	si	ADJ
app01-4398	70	16	-	-	PUNCT
app01-4398	70	17	si	si	ADJ
app01-4398	70	18	bond	bond	NOUN
app01-4398	70	19	in	in	ADP
app01-4398	70	20	amorphous	amorphous	ADJ
app01-4398	70	21	phase	phase	NOUN
app01-4398	70	22	and	and	CCONJ
app01-4398	70	23	1448	1448	NUM
app01-4398	70	24	cm−1	cm−1	NOUN
app01-4398	70	25	(	(	PUNCT
app01-4398	70	26	red	red	ADJ
app01-4398	70	27	arrow	arrow	NOUN
app01-4398	70	28	)	)	PUNCT
app01-4398	70	29	is	be	AUX
app01-4398	70	30	coresponding	coresponde	VERB
app01-4398	70	31	to	to	ADP
app01-4398	70	32	c	c	NOUN
app01-4398	70	33	-	-	PUNCT
app01-4398	70	34	c	c	NOUN
app01-4398	70	35	amourphous	amourphous	ADJ
app01-4398	70	36	bond	bond	NOUN
app01-4398	70	37	.	.	PUNCT
app01-4398	71	1	the	the	DET
app01-4398	71	2	raman	raman	NOUN
app01-4398	71	3	band	band	NOUN
app01-4398	71	4	at	at	ADP
app01-4398	71	5	829	829	NUM
app01-4398	71	6	cm−1	cm−1	NOUN
app01-4398	71	7	(	(	PUNCT
app01-4398	71	8	green	green	ADJ
app01-4398	71	9	arrow	arrow	NOUN
app01-4398	71	10	)	)	PUNCT
app01-4398	71	11	coresponds	corespond	VERB
app01-4398	71	12	to	to	ADP
app01-4398	71	13	si	si	ADJ
app01-4398	71	14	-	-	PUNCT
app01-4398	71	15	c	c	NOUN
app01-4398	71	16	bond	bond	NOUN
app01-4398	71	17	.	.	PUNCT
app01-4398	72	1	the	the	DET
app01-4398	72	2	low	low	ADJ
app01-4398	72	3	intesity	intesity	NOUN
app01-4398	72	4	of	of	ADP
app01-4398	72	5	si	si	PROPN
app01-4398	72	6	-	-	PUNCT
app01-4398	72	7	c	c	NOUN
app01-4398	72	8	peak	peak	NOUN
app01-4398	72	9	is	be	AUX
app01-4398	72	10	not	not	PART
app01-4398	72	11	due	due	ADJ
app01-4398	72	12	to	to	ADP
app01-4398	72	13	the	the	DET
app01-4398	72	14	number	number	NOUN
app01-4398	72	15	of	of	ADP
app01-4398	72	16	the	the	DET
app01-4398	72	17	bonds	bond	NOUN
app01-4398	72	18	,	,	PUNCT
app01-4398	72	19	but	but	CCONJ
app01-4398	72	20	it	it	PRON
app01-4398	72	21	follows	follow	VERB
app01-4398	72	22	from	from	ADP
app01-4398	72	23	the	the	DET
app01-4398	72	24	generally	generally	ADV
app01-4398	72	25	small	small	ADJ
app01-4398	72	26	raman	raman	NOUN
app01-4398	72	27	transition	transition	NOUN
app01-4398	72	28	probability	probability	NOUN
app01-4398	72	29	.	.	PUNCT
app01-4398	73	1	the	the	DET
app01-4398	73	2	bands	band	NOUN
app01-4398	73	3	at	at	ADP
app01-4398	73	4	1005	1005	NUM
app01-4398	73	5	cm−1	cm−1	NOUN
app01-4398	73	6	,	,	PUNCT
app01-4398	73	7	2283	2283	NUM
app01-4398	73	8	cm−1	cm−1	NOUN
app01-4398	73	9	and	and	CCONJ
app01-4398	73	10	2889	2889	NUM
app01-4398	73	11	cm−1	cm−1	NOUN
app01-4398	73	12	(	(	PUNCT
app01-4398	73	13	blue	blue	ADJ
app01-4398	73	14	arrows	arrow	NOUN
app01-4398	73	15	)	)	PUNCT
app01-4398	73	16	link	link	VERB
app01-4398	73	17	to	to	ADP
app01-4398	73	18	the	the	DET
app01-4398	73	19	signals	signal	NOUN
app01-4398	73	20	of	of	ADP
app01-4398	73	21	si	si	NOUN
app01-4398	73	22	-	-	ADJ
app01-4398	73	23	h	h	NOUN
app01-4398	73	24	and	and	CCONJ
app01-4398	73	25	c	c	NOUN
app01-4398	73	26	-	-	PUNCT
app01-4398	73	27	h	h	NOUN
app01-4398	73	28	bonds	bond	NOUN
app01-4398	73	29	[	[	X
app01-4398	73	30	2	2	NUM
app01-4398	73	31	]	]	PUNCT
app01-4398	73	32	.	.	PUNCT
app01-4398	74	1	the	the	DET
app01-4398	74	2	raman	raman	NOUN
app01-4398	74	3	spectrum	spectrum	NOUN
app01-4398	74	4	of	of	ADP
app01-4398	74	5	the	the	DET
app01-4398	74	6	sample	sample	NOUN
app01-4398	74	7	k7	k7	PROPN
app01-4398	74	8	and	and	CCONJ
app01-4398	74	9	k9	k9	PROPN
app01-4398	74	10	is	be	AUX
app01-4398	74	11	shown	show	VERB
app01-4398	74	12	in	in	ADP
app01-4398	74	13	figure	figure	NOUN
app01-4398	74	14	4	4	NUM
app01-4398	74	15	.	.	PUNCT
app01-4398	74	16	according	accord	VERB
app01-4398	74	17	to	to	ADP
app01-4398	74	18	[	[	X
app01-4398	74	19	3	3	NUM
app01-4398	74	20	]	]	PUNCT
app01-4398	74	21	,	,	PUNCT
app01-4398	74	22	the	the	DET
app01-4398	74	23	peaks	peak	NOUN
app01-4398	74	24	for	for	ADP
app01-4398	74	25	tin	tin	NOUN
app01-4398	74	26	are	be	AUX
app01-4398	74	27	found	find	VERB
app01-4398	74	28	at	at	ADP
app01-4398	74	29	250	250	NUM
app01-4398	74	30	;	;	PUNCT
app01-4398	74	31	330	330	NUM
app01-4398	74	32	-	-	SYM
app01-4398	74	33	360	360	NUM
app01-4398	74	34	and	and	CCONJ
app01-4398	74	35	560	560	NUM
app01-4398	74	36	cm−1	cm−1	NOUN
app01-4398	74	37	and	and	CCONJ
app01-4398	74	38	are	be	AUX
app01-4398	74	39	marked	mark	VERB
app01-4398	74	40	by	by	ADP
app01-4398	74	41	blue	blue	ADJ
app01-4398	74	42	arrows	arrow	NOUN
app01-4398	74	43	.	.	PUNCT
app01-4398	75	1	observed	observe	VERB
app01-4398	75	2	peaks	peak	NOUN
app01-4398	75	3	might	might	AUX
app01-4398	75	4	be	be	AUX
app01-4398	75	5	,	,	PUNCT
app01-4398	75	6	perhaps	perhaps	ADV
app01-4398	75	7	,	,	PUNCT
app01-4398	75	8	assigned	assign	VERB
app01-4398	75	9	to	to	ADP
app01-4398	75	10	the	the	DET
app01-4398	75	11	presence	presence	NOUN
app01-4398	75	12	of	of	ADP
app01-4398	75	13	tin	tin	NOUN
app01-4398	75	14	in	in	ADP
app01-4398	75	15	the	the	DET
app01-4398	75	16	deposited	deposit	VERB
app01-4398	75	17	layer	layer	NOUN
app01-4398	75	18	,	,	PUNCT
app01-4398	75	19	however	however	ADV
app01-4398	75	20	,	,	PUNCT
app01-4398	75	21	the	the	DET
app01-4398	75	22	intensity	intensity	NOUN
app01-4398	75	23	of	of	ADP
app01-4398	75	24	the	the	DET
app01-4398	75	25	peaks	peak	NOUN
app01-4398	75	26	is	be	AUX
app01-4398	75	27	too	too	ADV
app01-4398	75	28	weak	weak	ADJ
app01-4398	75	29	to	to	PART
app01-4398	75	30	provide	provide	VERB
app01-4398	75	31	a	a	DET
app01-4398	75	32	decisive	decisive	ADJ
app01-4398	75	33	prove	prove	NOUN
app01-4398	75	34	for	for	ADP
app01-4398	75	35	tin	tin	NOUN
app01-4398	75	36	compound	compound	NOUN
app01-4398	75	37	existence	existence	NOUN
app01-4398	75	38	.	.	PUNCT
app01-4398	76	1	the	the	DET
app01-4398	76	2	peaks	peak	NOUN
app01-4398	76	3	marked	mark	VERB
app01-4398	76	4	by	by	ADP
app01-4398	76	5	black	black	ADJ
app01-4398	76	6	arrows	arrow	NOUN
app01-4398	76	7	correspond	correspond	VERB
app01-4398	76	8	to	to	ADP
app01-4398	76	9	monocrystalline	monocrystalline	ADJ
app01-4398	76	10	silicon	silicon	NOUN
app01-4398	76	11	[	[	X
app01-4398	76	12	6	6	NUM
app01-4398	76	13	]	]	PUNCT
app01-4398	76	14	.	.	PUNCT
app01-4398	77	1	21	21	NUM
app01-4398	77	2	jakub	jakub	PROPN
app01-4398	77	3	skocdopole	skocdopole	PROPN
app01-4398	77	4	,	,	PUNCT
app01-4398	77	5	lucrezia	lucrezia	PROPN
app01-4398	77	6	aversa	aversa	PROPN
app01-4398	77	7	,	,	PUNCT
app01-4398	77	8	martin	martin	PROPN
app01-4398	77	9	golan	golan	PROPN
app01-4398	77	10	et	et	PROPN
app01-4398	77	11	al	al	PROPN
app01-4398	77	12	.	.	PROPN
app01-4398	78	1	acta	acta	PROPN
app01-4398	78	2	polytechnica	polytechnica	PROPN
app01-4398	78	3	ctu	ctu	PROPN
app01-4398	78	4	proceedings	proceeding	NOUN
app01-4398	78	5	figure	figure	VERB
app01-4398	78	6	4	4	NUM
app01-4398	78	7	.	.	PUNCT
app01-4398	78	8	raman	raman	ADJ
app01-4398	78	9	spectra	spectra	NOUN
app01-4398	78	10	of	of	ADP
app01-4398	78	11	samples	sample	NOUN
app01-4398	78	12	k7	k7	PROPN
app01-4398	78	13	and	and	CCONJ
app01-4398	78	14	k9	k9	PROPN
app01-4398	78	15	.	.	PUNCT
app01-4398	79	1	4.1.1	4.1.1	NUM
app01-4398	79	2	.	.	PUNCT
app01-4398	80	1	discussion	discussion	NOUN
app01-4398	80	2	the	the	DET
app01-4398	80	3	raman	raman	NOUN
app01-4398	80	4	bands	band	NOUN
app01-4398	80	5	,	,	PUNCT
app01-4398	80	6	for	for	ADP
app01-4398	80	7	all	all	DET
app01-4398	80	8	samples	sample	NOUN
app01-4398	80	9	,	,	PUNCT
app01-4398	80	10	exhibit	exhibit	VERB
app01-4398	80	11	some	some	DET
app01-4398	80	12	shifts	shift	NOUN
app01-4398	80	13	in	in	ADP
app01-4398	80	14	their	their	PRON
app01-4398	80	15	position	position	NOUN
app01-4398	80	16	,	,	PUNCT
app01-4398	80	17	when	when	SCONJ
app01-4398	80	18	compared	compare	VERB
app01-4398	80	19	with	with	ADP
app01-4398	80	20	literature	literature	NOUN
app01-4398	80	21	[	[	X
app01-4398	80	22	2	2	NUM
app01-4398	80	23	]	]	X
app01-4398	80	24	[	[	X
app01-4398	80	25	3	3	NUM
app01-4398	80	26	]	]	PUNCT
app01-4398	80	27	.	.	PUNCT
app01-4398	81	1	this	this	DET
app01-4398	81	2	fact	fact	NOUN
app01-4398	81	3	could	could	AUX
app01-4398	81	4	be	be	AUX
app01-4398	81	5	caused	cause	VERB
app01-4398	81	6	by	by	ADP
app01-4398	81	7	some	some	DET
app01-4398	81	8	small	small	ADJ
app01-4398	81	9	variations	variation	NOUN
app01-4398	81	10	of	of	ADP
app01-4398	81	11	the	the	DET
app01-4398	81	12	stoichiometry	stoichiometry	NOUN
app01-4398	81	13	of	of	ADP
app01-4398	81	14	deposited	deposit	VERB
app01-4398	81	15	films	film	NOUN
app01-4398	81	16	.	.	PUNCT
app01-4398	82	1	for	for	ADP
app01-4398	82	2	supposed	suppose	VERB
app01-4398	82	3	application	application	NOUN
app01-4398	82	4	it	it	PRON
app01-4398	82	5	is	be	AUX
app01-4398	82	6	necessary	necessary	ADJ
app01-4398	82	7	to	to	PART
app01-4398	82	8	obtain	obtain	VERB
app01-4398	82	9	well	well	ADV
app01-4398	82	10	-	-	PUNCT
app01-4398	82	11	defined	define	VERB
app01-4398	82	12	grains	grain	NOUN
app01-4398	82	13	of	of	ADP
app01-4398	82	14	sic	sic	ADJ
app01-4398	82	15	or	or	CCONJ
app01-4398	82	16	tin	tin	NOUN
app01-4398	82	17	.	.	PUNCT
app01-4398	83	1	unfortunately	unfortunately	ADV
app01-4398	83	2	for	for	ADP
app01-4398	83	3	this	this	DET
app01-4398	83	4	aim	aim	NOUN
app01-4398	83	5	the	the	DET
app01-4398	83	6	thin	thin	ADJ
app01-4398	83	7	films	film	NOUN
app01-4398	83	8	of	of	ADP
app01-4398	83	9	sic	sic	ADJ
app01-4398	83	10	are	be	AUX
app01-4398	83	11	amorphous	amorphous	ADJ
app01-4398	83	12	.	.	PUNCT
app01-4398	84	1	in	in	ADP
app01-4398	84	2	order	order	NOUN
app01-4398	84	3	to	to	PART
app01-4398	84	4	be	be	AUX
app01-4398	84	5	able	able	ADJ
app01-4398	84	6	to	to	PART
app01-4398	84	7	grow	grow	VERB
app01-4398	84	8	the	the	DET
app01-4398	84	9	polycrystalline	polycrystalline	ADJ
app01-4398	84	10	sic	sic	ADJ
app01-4398	84	11	layers	layer	NOUN
app01-4398	84	12	,	,	PUNCT
app01-4398	84	13	it	it	PRON
app01-4398	84	14	is	be	AUX
app01-4398	84	15	necessary	necessary	ADJ
app01-4398	84	16	to	to	PART
app01-4398	84	17	heat	heat	VERB
app01-4398	84	18	the	the	DET
app01-4398	84	19	substrate	substrate	NOUN
app01-4398	84	20	during	during	ADP
app01-4398	84	21	the	the	DET
app01-4398	84	22	deposition	deposition	NOUN
app01-4398	84	23	process	process	NOUN
app01-4398	84	24	,	,	PUNCT
app01-4398	84	25	the	the	DET
app01-4398	84	26	treatment	treatment	NOUN
app01-4398	84	27	that	that	PRON
app01-4398	84	28	was	be	AUX
app01-4398	84	29	not	not	PART
app01-4398	84	30	performed	perform	VERB
app01-4398	84	31	during	during	ADP
app01-4398	84	32	the	the	DET
app01-4398	84	33	present	present	ADJ
app01-4398	84	34	depositions	deposition	NOUN
app01-4398	84	35	.	.	PUNCT
app01-4398	85	1	it	it	PRON
app01-4398	85	2	is	be	AUX
app01-4398	85	3	not	not	PART
app01-4398	85	4	possible	possible	ADJ
app01-4398	85	5	to	to	PART
app01-4398	85	6	decide	decide	VERB
app01-4398	85	7	whether	whether	SCONJ
app01-4398	85	8	or	or	CCONJ
app01-4398	85	9	not	not	PART
app01-4398	85	10	the	the	DET
app01-4398	85	11	thin	thin	ADJ
app01-4398	85	12	films	film	NOUN
app01-4398	85	13	of	of	ADP
app01-4398	85	14	tin	tin	NOUN
app01-4398	85	15	are	be	AUX
app01-4398	85	16	really	really	ADV
app01-4398	85	17	composed	compose	VERB
app01-4398	85	18	of	of	ADP
app01-4398	85	19	pure	pure	ADJ
app01-4398	85	20	tin	tin	NOUN
app01-4398	85	21	only	only	ADV
app01-4398	85	22	.	.	PUNCT
app01-4398	86	1	or	or	CCONJ
app01-4398	86	2	consist	consist	VERB
app01-4398	86	3	of	of	ADP
app01-4398	86	4	some	some	DET
app01-4398	86	5	mixture	mixture	NOUN
app01-4398	86	6	of	of	ADP
app01-4398	86	7	metallic	metallic	ADJ
app01-4398	86	8	ti	ti	NOUN
app01-4398	86	9	,	,	PUNCT
app01-4398	86	10	tin	tin	NOUN
app01-4398	86	11	and	and	CCONJ
app01-4398	86	12	titanium	titanium	NOUN
app01-4398	86	13	oxide	oxide	NOUN
app01-4398	86	14	.	.	PUNCT
app01-4398	87	1	all	all	DET
app01-4398	87	2	these	these	DET
app01-4398	87	3	materials	material	NOUN
app01-4398	87	4	exhibit	exhibit	VERB
app01-4398	87	5	rather	rather	ADV
app01-4398	87	6	similar	similar	ADJ
app01-4398	87	7	raman	raman	ADJ
app01-4398	87	8	spectra	spectra	NOUN
app01-4398	87	9	[	[	X
app01-4398	87	10	4	4	NUM
app01-4398	87	11	]	]	PUNCT
app01-4398	87	12	and	and	CCONJ
app01-4398	87	13	,	,	PUNCT
app01-4398	87	14	taking	take	VERB
app01-4398	87	15	in	in	ADP
app01-4398	87	16	account	account	NOUN
app01-4398	87	17	the	the	DET
app01-4398	87	18	small	small	ADJ
app01-4398	87	19	intensity	intensity	NOUN
app01-4398	87	20	of	of	ADP
app01-4398	87	21	the	the	DET
app01-4398	87	22	spectra	spectra	NOUN
app01-4398	87	23	obtained	obtain	VERB
app01-4398	87	24	from	from	ADP
app01-4398	87	25	present	present	ADJ
app01-4398	87	26	measurements	measurement	NOUN
app01-4398	87	27	it	it	PRON
app01-4398	87	28	is	be	AUX
app01-4398	87	29	impossible	impossible	ADJ
app01-4398	87	30	to	to	PART
app01-4398	87	31	conclude	conclude	VERB
app01-4398	87	32	about	about	ADP
app01-4398	87	33	the	the	DET
app01-4398	87	34	nature	nature	NOUN
app01-4398	87	35	of	of	ADP
app01-4398	87	36	grown	grow	VERB
app01-4398	87	37	material	material	NOUN
app01-4398	87	38	.	.	PUNCT
app01-4398	88	1	4.2	4.2	NUM
app01-4398	88	2	.	.	PUNCT
app01-4398	88	3	xrd	xrd	VERB
app01-4398	88	4	the	the	DET
app01-4398	88	5	glancing	glance	VERB
app01-4398	88	6	angle	angle	NOUN
app01-4398	88	7	xrd	xrd	NOUN
app01-4398	88	8	analysis	analysis	NOUN
app01-4398	88	9	was	be	AUX
app01-4398	88	10	performed	perform	VERB
app01-4398	88	11	on	on	ADP
app01-4398	88	12	θ	θ	PROPN
app01-4398	88	13	/	/	SYM
app01-4398	88	14	θ	θ	PROPN
app01-4398	88	15	diffractometer	diffractometer	NOUN
app01-4398	88	16	x'pert	x'pert	PROPN
app01-4398	88	17	operating	operate	VERB
app01-4398	88	18	in	in	ADP
app01-4398	88	19	braggbrentano	braggbrentano	ADJ
app01-4398	88	20	geometry	geometry	NOUN
app01-4398	88	21	with	with	ADP
app01-4398	88	22	x	x	ADJ
app01-4398	88	23	-	-	NOUN
app01-4398	88	24	ray	ray	NOUN
app01-4398	88	25	source	source	NOUN
app01-4398	88	26	λ	λ	PROPN
app01-4398	88	27	(	(	PUNCT
app01-4398	88	28	cokα	cokα	PROPN
app01-4398	88	29	)	)	PUNCT
app01-4398	89	1	=	=	NOUN
app01-4398	89	2	0,179026	0,179026	PROPN
app01-4398	89	3	nm	nm	NOUN
app01-4398	89	4	.	.	PUNCT
app01-4398	90	1	the	the	DET
app01-4398	90	2	xrd	xrd	PROPN
app01-4398	90	3	patterns	pattern	NOUN
app01-4398	90	4	obtained	obtain	VERB
app01-4398	90	5	with	with	ADP
app01-4398	90	6	the	the	DET
app01-4398	90	7	sample	sample	NOUN
app01-4398	90	8	k7	k7	PROPN
app01-4398	90	9	(	(	PUNCT
app01-4398	90	10	figure	figure	NOUN
app01-4398	90	11	5	5	NUM
app01-4398	90	12	)	)	PUNCT
app01-4398	90	13	show	show	VERB
app01-4398	90	14	only	only	ADV
app01-4398	90	15	amorphous	amorphous	ADJ
app01-4398	90	16	halo	halo	NOUN
app01-4398	90	17	.	.	PUNCT
app01-4398	91	1	the	the	DET
app01-4398	91	2	amorphous	amorphous	ADJ
app01-4398	91	3	halo	halo	NOUN
app01-4398	91	4	is	be	AUX
app01-4398	91	5	indicative	indicative	ADJ
app01-4398	91	6	of	of	ADP
app01-4398	91	7	two	two	NUM
app01-4398	91	8	facts	fact	NOUN
app01-4398	91	9	,	,	PUNCT
app01-4398	91	10	firstly	firstly	ADV
app01-4398	91	11	that	that	SCONJ
app01-4398	91	12	the	the	DET
app01-4398	91	13	film	film	NOUN
app01-4398	91	14	is	be	AUX
app01-4398	91	15	thick	thick	ADJ
app01-4398	91	16	enough	enough	ADV
app01-4398	91	17	that	that	SCONJ
app01-4398	91	18	only	only	ADV
app01-4398	91	19	the	the	DET
app01-4398	91	20	diffraction	diffraction	NOUN
app01-4398	91	21	signal	signal	NOUN
app01-4398	91	22	coming	come	VERB
app01-4398	91	23	from	from	ADP
app01-4398	91	24	the	the	DET
app01-4398	91	25	film	film	NOUN
app01-4398	91	26	is	be	AUX
app01-4398	91	27	registered	register	VERB
app01-4398	91	28	,	,	PUNCT
app01-4398	91	29	and	and	CCONJ
app01-4398	91	30	secondly	secondly	ADV
app01-4398	91	31	that	that	SCONJ
app01-4398	91	32	the	the	DET
app01-4398	91	33	structure	structure	NOUN
app01-4398	91	34	of	of	ADP
app01-4398	91	35	the	the	DET
app01-4398	91	36	films	film	NOUN
app01-4398	91	37	is	be	AUX
app01-4398	91	38	amourphous	amourphous	ADJ
app01-4398	91	39	in	in	ADP
app01-4398	91	40	its	its	PRON
app01-4398	91	41	nature	nature	NOUN
app01-4398	91	42	.	.	PUNCT
app01-4398	92	1	the	the	DET
app01-4398	92	2	xrd	xrd	NOUN
app01-4398	92	3	patterns	pattern	NOUN
app01-4398	92	4	obtained	obtain	VERB
app01-4398	92	5	with	with	ADP
app01-4398	92	6	sample	sample	NOUN
app01-4398	92	7	k9	k9	NOUN
app01-4398	92	8	(	(	PUNCT
app01-4398	92	9	figure	figure	NOUN
app01-4398	92	10	6	6	NUM
app01-4398	92	11	)	)	PUNCT
app01-4398	92	12	show	show	VERB
app01-4398	92	13	only	only	ADJ
app01-4398	92	14	presence	presence	NOUN
app01-4398	92	15	of	of	ADP
app01-4398	92	16	austenitic	austenitic	ADJ
app01-4398	92	17	steel	steel	NOUN
app01-4398	92	18	.	.	PUNCT
app01-4398	93	1	the	the	DET
app01-4398	93	2	result	result	NOUN
app01-4398	93	3	indicates	indicate	VERB
app01-4398	93	4	that	that	SCONJ
app01-4398	93	5	the	the	DET
app01-4398	93	6	film	film	NOUN
app01-4398	93	7	is	be	AUX
app01-4398	93	8	not	not	PART
app01-4398	93	9	thick	thick	ADJ
app01-4398	93	10	enough	enough	ADV
app01-4398	93	11	to	to	PART
app01-4398	93	12	stop	stop	VERB
app01-4398	93	13	the	the	DET
app01-4398	93	14	diffraction	diffraction	NOUN
app01-4398	93	15	signal	signal	NOUN
app01-4398	93	16	from	from	ADP
app01-4398	93	17	the	the	DET
app01-4398	93	18	substrate	substrate	NOUN
app01-4398	93	19	and	and	CCONJ
app01-4398	93	20	that	that	SCONJ
app01-4398	93	21	the	the	DET
app01-4398	93	22	structure	structure	NOUN
app01-4398	93	23	of	of	ADP
app01-4398	93	24	film	film	NOUN
app01-4398	93	25	is	be	AUX
app01-4398	93	26	amorphous	amorphous	ADJ
app01-4398	93	27	.	.	PUNCT
app01-4398	94	1	4.3	4.3	NUM
app01-4398	94	2	.	.	PUNCT
app01-4398	94	3	sem	sem	PROPN
app01-4398	94	4	the	the	DET
app01-4398	94	5	sem	sem	PROPN
app01-4398	94	6	image	image	NOUN
app01-4398	94	7	of	of	ADP
app01-4398	94	8	sample	sample	NOUN
app01-4398	94	9	k2	k2	PROPN
app01-4398	94	10	(	(	PUNCT
app01-4398	94	11	figure	figure	NOUN
app01-4398	94	12	7	7	NUM
app01-4398	94	13	)	)	PUNCT
app01-4398	94	14	contains	contain	VERB
app01-4398	94	15	particles	particle	NOUN
app01-4398	94	16	with	with	ADP
app01-4398	94	17	size	size	NOUN
app01-4398	94	18	under	under	ADP
app01-4398	94	19	500	500	NUM
app01-4398	94	20	nm	nm	NOUN
app01-4398	94	21	.	.	PUNCT
app01-4398	95	1	the	the	DET
app01-4398	95	2	film	film	NOUN
app01-4398	95	3	background	background	NOUN
app01-4398	95	4	is	be	AUX
app01-4398	95	5	homogenous	homogenous	ADJ
app01-4398	95	6	despite	despite	SCONJ
app01-4398	95	7	of	of	ADP
app01-4398	95	8	fact	fact	NOUN
app01-4398	95	9	that	that	SCONJ
app01-4398	95	10	on	on	ADP
app01-4398	95	11	its	its	PRON
app01-4398	95	12	surface	surface	NOUN
app01-4398	95	13	are	be	AUX
app01-4398	95	14	particles	particle	NOUN
app01-4398	95	15	.	.	PUNCT
app01-4398	96	1	sic	sic	ADJ
app01-4398	96	2	is	be	AUX
app01-4398	96	3	very	very	ADV
app01-4398	96	4	hard	hard	ADJ
app01-4398	96	5	material	material	NOUN
app01-4398	96	6	and	and	CCONJ
app01-4398	96	7	was	be	AUX
app01-4398	96	8	expected	expect	VERB
app01-4398	96	9	to	to	PART
app01-4398	96	10	consist	consist	VERB
app01-4398	96	11	of	of	ADP
app01-4398	96	12	separated	separate	VERB
app01-4398	96	13	particles	particle	NOUN
app01-4398	96	14	figure	figure	VERB
app01-4398	96	15	5	5	NUM
app01-4398	96	16	.	.	PUNCT
app01-4398	97	1	xrd	xrd	PROPN
app01-4398	97	2	patterns	pattern	NOUN
app01-4398	97	3	obtained	obtain	VERB
app01-4398	97	4	with	with	ADP
app01-4398	97	5	sample	sample	NOUN
app01-4398	97	6	k7	k7	PROPN
app01-4398	97	7	figure	figure	VERB
app01-4398	97	8	6	6	NUM
app01-4398	97	9	.	.	PUNCT
app01-4398	98	1	xrd	xrd	PROPN
app01-4398	98	2	patterns	pattern	NOUN
app01-4398	98	3	obtained	obtain	VERB
app01-4398	98	4	with	with	ADP
app01-4398	98	5	sample	sample	NOUN
app01-4398	98	6	k9	k9	PROPN
app01-4398	98	7	figure	figure	NOUN
app01-4398	98	8	7	7	NUM
app01-4398	98	9	.	.	PUNCT
app01-4398	98	10	sem	sem	PROPN
app01-4398	98	11	micrograph	micrograph	NOUN
app01-4398	98	12	of	of	ADP
app01-4398	98	13	sample	sample	NOUN
app01-4398	98	14	k2	k2	NOUN
app01-4398	98	15	:	:	PUNCT
app01-4398	98	16	sic	sic	ADJ
app01-4398	98	17	layer	layer	NOUN
app01-4398	98	18	on	on	ADP
app01-4398	98	19	aluminium	aluminium	NOUN
app01-4398	98	20	alloy	alloy	NOUN
app01-4398	98	21	substrate	substrate	NOUN
app01-4398	98	22	.	.	PUNCT
app01-4398	99	1	the	the	DET
app01-4398	99	2	tin	tin	NOUN
app01-4398	99	3	was	be	AUX
app01-4398	99	4	deposited	deposit	VERB
app01-4398	99	5	on	on	ADP
app01-4398	99	6	the	the	DET
app01-4398	99	7	stainless	stainless	ADJ
app01-4398	99	8	steel	steel	NOUN
app01-4398	99	9	and	and	CCONJ
app01-4398	99	10	monocrystalline	monocrystalline	ADJ
app01-4398	99	11	silicon	silicon	NOUN
app01-4398	99	12	substrates	substrate	NOUN
app01-4398	99	13	.	.	PUNCT
app01-4398	100	1	in	in	ADP
app01-4398	100	2	sem	sem	ADJ
app01-4398	100	3	image	image	NOUN
app01-4398	100	4	of	of	ADP
app01-4398	100	5	sample	sample	NOUN
app01-4398	100	6	k7	k7	PROPN
app01-4398	100	7	(	(	PUNCT
app01-4398	100	8	figure	figure	NOUN
app01-4398	100	9	8)	8)	NUM
app01-4398	100	10	shows	show	VERB
app01-4398	100	11	particles	particle	NOUN
app01-4398	100	12	with	with	ADP
app01-4398	100	13	size	size	NOUN
app01-4398	100	14	under	under	ADP
app01-4398	100	15	150	150	NUM
app01-4398	100	16	nm	nm	NOUN
app01-4398	100	17	.	.	PUNCT
app01-4398	101	1	the	the	DET
app01-4398	101	2	film	film	NOUN
app01-4398	101	3	is	be	AUX
app01-4398	101	4	very	very	ADV
app01-4398	101	5	homogenous	homogenous	ADJ
app01-4398	101	6	,	,	PUNCT
app01-4398	101	7	in	in	ADP
app01-4398	101	8	agreement	agreement	NOUN
app01-4398	101	9	with	with	ADP
app01-4398	101	10	its	its	PRON
app01-4398	101	11	amorphous	amorphous	ADJ
app01-4398	101	12	nature	nature	NOUN
app01-4398	101	13	confirmed	confirm	VERB
app01-4398	101	14	by	by	ADP
app01-4398	101	15	xrd	xrd	PROPN
app01-4398	101	16	.	.	PUNCT
app01-4398	102	1	the	the	DET
app01-4398	102	2	sem	sem	PROPN
app01-4398	102	3	image	image	NOUN
app01-4398	102	4	of	of	ADP
app01-4398	102	5	sample	sample	NOUN
app01-4398	102	6	k9	k9	NOUN
app01-4398	102	7	(	(	PUNCT
app01-4398	102	8	figure	figure	NOUN
app01-4398	102	9	9	9	NUM
app01-4398	102	10	)	)	PUNCT
app01-4398	102	11	shows	show	VERB
app01-4398	102	12	particles	particle	NOUN
app01-4398	102	13	under	under	ADP
app01-4398	102	14	250	250	NUM
app01-4398	102	15	nm	nm	NOUN
app01-4398	102	16	.	.	PUNCT
app01-4398	103	1	the	the	DET
app01-4398	103	2	film	film	NOUN
app01-4398	103	3	is	be	AUX
app01-4398	103	4	amourphous	amourphous	ADJ
app01-4398	103	5	,	,	PUNCT
app01-4398	103	6	as	as	SCONJ
app01-4398	103	7	confirmed	confirm	VERB
app01-4398	103	8	by	by	ADP
app01-4398	103	9	xrd	xrd	PROPN
app01-4398	103	10	.	.	PUNCT
app01-4398	104	1	the	the	DET
app01-4398	104	2	red	red	ADJ
app01-4398	104	3	lines	line	NOUN
app01-4398	104	4	indicate	indicate	VERB
app01-4398	104	5	the	the	DET
app01-4398	104	6	differencies	differencie	NOUN
app01-4398	104	7	in	in	ADP
app01-4398	104	8	the	the	DET
app01-4398	104	9	film	film	NOUN
app01-4398	104	10	structure	structure	NOUN
app01-4398	104	11	due	due	ADP
app01-4398	104	12	to	to	ADP
app01-4398	104	13	existence	existence	NOUN
app01-4398	104	14	of	of	ADP
app01-4398	104	15	underlying	underlie	VERB
app01-4398	104	16	grain	grain	NOUN
app01-4398	104	17	boundaries	boundary	NOUN
app01-4398	104	18	present	present	ADJ
app01-4398	104	19	in	in	ADP
app01-4398	104	20	the	the	DET
app01-4398	104	21	polycrystalline	polycrystalline	ADJ
app01-4398	104	22	substrate	substrate	NOUN
app01-4398	104	23	.	.	PUNCT
app01-4398	105	1	22	22	NUM
app01-4398	105	2	vol	vol	NOUN
app01-4398	105	3	.	.	PUNCT
app01-4398	106	1	9/2017	9/2017	NUM
app01-4398	106	2	preparing	prepare	VERB
app01-4398	106	3	of	of	ADP
app01-4398	106	4	the	the	DET
app01-4398	106	5	chameleon	chameleon	NOUN
app01-4398	106	6	coating	coating	NOUN
app01-4398	106	7	by	by	ADP
app01-4398	106	8	the	the	DET
app01-4398	106	9	ion	ion	NOUN
app01-4398	106	10	jet	jet	NOUN
app01-4398	106	11	deposition	deposition	NOUN
app01-4398	106	12	method	method	NOUN
app01-4398	106	13	figure	figure	NOUN
app01-4398	106	14	8	8	NUM
app01-4398	106	15	.	.	PUNCT
app01-4398	107	1	sem	sem	PROPN
app01-4398	107	2	micrograph	micrograph	NOUN
app01-4398	107	3	of	of	ADP
app01-4398	107	4	sample	sample	NOUN
app01-4398	107	5	k7	k7	PROPN
app01-4398	107	6	:	:	PUNCT
app01-4398	107	7	tin	tin	NOUN
app01-4398	107	8	film	film	NOUN
app01-4398	107	9	on	on	ADP
app01-4398	107	10	si	si	PROPN
app01-4398	107	11	single	single	ADJ
app01-4398	107	12	crystal	crystal	NOUN
app01-4398	107	13	substrate	substrate	NOUN
app01-4398	107	14	.	.	PUNCT
app01-4398	108	1	figure	figure	NOUN
app01-4398	108	2	9	9	NUM
app01-4398	108	3	.	.	PUNCT
app01-4398	108	4	sem	sem	PROPN
app01-4398	108	5	micrograph	micrograph	NOUN
app01-4398	108	6	of	of	ADP
app01-4398	108	7	sample	sample	NOUN
app01-4398	108	8	k9	k9	NOUN
app01-4398	108	9	:	:	PUNCT
app01-4398	108	10	tin	tin	NOUN
app01-4398	108	11	layer	layer	NOUN
app01-4398	108	12	on	on	ADP
app01-4398	108	13	stainless	stainless	ADJ
app01-4398	108	14	steel	steel	NOUN
app01-4398	108	15	substrate	substrate	NOUN
app01-4398	108	16	.	.	PUNCT
app01-4398	109	1	4.3.1	4.3.1	X
app01-4398	109	2	.	.	PUNCT
app01-4398	110	1	discussion	discussion	NOUN
app01-4398	110	2	all	all	DET
app01-4398	110	3	samples	sample	NOUN
app01-4398	110	4	exhibit	exhibit	VERB
app01-4398	110	5	some	some	DET
app01-4398	110	6	type	type	NOUN
app01-4398	110	7	of	of	ADP
app01-4398	110	8	particles	particle	NOUN
app01-4398	110	9	on	on	ADP
app01-4398	110	10	their	their	PRON
app01-4398	110	11	surface	surface	NOUN
app01-4398	110	12	.	.	PUNCT
app01-4398	111	1	the	the	DET
app01-4398	111	2	particles	particle	NOUN
app01-4398	111	3	differ	differ	VERB
app01-4398	111	4	from	from	ADP
app01-4398	111	5	each	each	DET
app01-4398	111	6	other	other	ADJ
app01-4398	111	7	mostly	mostly	ADV
app01-4398	111	8	in	in	ADP
app01-4398	111	9	their	their	PRON
app01-4398	111	10	size	size	NOUN
app01-4398	111	11	.	.	PUNCT
app01-4398	112	1	the	the	DET
app01-4398	112	2	size	size	NOUN
app01-4398	112	3	of	of	ADP
app01-4398	112	4	particles	particle	NOUN
app01-4398	112	5	is	be	AUX
app01-4398	112	6	important	important	ADJ
app01-4398	112	7	for	for	ADP
app01-4398	112	8	improvement	improvement	NOUN
app01-4398	112	9	of	of	ADP
app01-4398	112	10	the	the	DET
app01-4398	112	11	mechanical	mechanical	ADJ
app01-4398	112	12	properties	property	NOUN
app01-4398	112	13	.	.	PUNCT
app01-4398	113	1	the	the	DET
app01-4398	113	2	particles	particle	NOUN
app01-4398	113	3	should	should	AUX
app01-4398	113	4	not	not	PART
app01-4398	113	5	be	be	AUX
app01-4398	113	6	too	too	ADV
app01-4398	113	7	large	large	ADJ
app01-4398	113	8	because	because	SCONJ
app01-4398	113	9	in	in	ADP
app01-4398	113	10	such	such	ADJ
app01-4398	113	11	case	case	NOUN
app01-4398	113	12	the	the	DET
app01-4398	113	13	cracks	crack	NOUN
app01-4398	113	14	through	through	ADP
app01-4398	113	15	the	the	DET
app01-4398	113	16	coating	coating	NOUN
app01-4398	113	17	could	could	AUX
app01-4398	113	18	propagate	propagate	VERB
app01-4398	113	19	also	also	ADV
app01-4398	113	20	through	through	ADP
app01-4398	113	21	the	the	DET
app01-4398	113	22	particle	particle	NOUN
app01-4398	113	23	and	and	CCONJ
app01-4398	113	24	even	even	ADV
app01-4398	113	25	not	not	PART
app01-4398	113	26	too	too	ADV
app01-4398	113	27	small	small	ADJ
app01-4398	113	28	because	because	SCONJ
app01-4398	113	29	the	the	DET
app01-4398	113	30	crack	crack	NOUN
app01-4398	113	31	of	of	ADP
app01-4398	113	32	the	the	DET
app01-4398	113	33	matrix	matrix	NOUN
app01-4398	113	34	may	may	AUX
app01-4398	113	35	avoid	avoid	VERB
app01-4398	113	36	the	the	DET
app01-4398	113	37	particle	particle	NOUN
app01-4398	113	38	just	just	ADV
app01-4398	113	39	by	by	ADP
app01-4398	113	40	circling	circle	VERB
app01-4398	113	41	around	around	ADP
app01-4398	113	42	it	it	PRON
app01-4398	113	43	.	.	PUNCT
app01-4398	114	1	the	the	DET
app01-4398	114	2	smallest	small	ADJ
app01-4398	114	3	particles	particle	NOUN
app01-4398	114	4	are	be	AUX
app01-4398	114	5	observed	observe	VERB
app01-4398	114	6	on	on	ADP
app01-4398	114	7	the	the	DET
app01-4398	114	8	tin	tin	NOUN
app01-4398	114	9	film	film	NOUN
app01-4398	114	10	deposited	deposit	VERB
app01-4398	114	11	on	on	ADP
app01-4398	114	12	single	single	ADJ
app01-4398	114	13	crystalline	crystalline	PROPN
app01-4398	114	14	silicon	silicon	NOUN
app01-4398	114	15	.	.	PUNCT
app01-4398	115	1	the	the	DET
app01-4398	115	2	ideal	ideal	ADJ
app01-4398	115	3	size	size	NOUN
app01-4398	115	4	of	of	ADP
app01-4398	115	5	the	the	DET
app01-4398	115	6	particles	particle	NOUN
app01-4398	115	7	is	be	AUX
app01-4398	115	8	found	find	VERB
app01-4398	115	9	to	to	PART
app01-4398	115	10	be	be	AUX
app01-4398	115	11	between	between	ADP
app01-4398	115	12	tens	ten	NOUN
app01-4398	115	13	and	and	CCONJ
app01-4398	115	14	hundreds	hundred	NOUN
app01-4398	115	15	of	of	ADP
app01-4398	115	16	nanometers	nanometer	NOUN
app01-4398	115	17	[	[	X
app01-4398	115	18	1	1	NUM
app01-4398	115	19	]	]	PUNCT
app01-4398	115	20	.	.	PUNCT
app01-4398	116	1	figure	figure	NOUN
app01-4398	116	2	10	10	NUM
app01-4398	116	3	.	.	PUNCT
app01-4398	117	1	xps	xps	PROPN
app01-4398	117	2	spectra	spectra	PROPN
app01-4398	117	3	recorded	record	VERB
app01-4398	117	4	with	with	ADP
app01-4398	117	5	samples	sample	NOUN
app01-4398	117	6	k7	k7	PROPN
app01-4398	117	7	and	and	CCONJ
app01-4398	117	8	k9	k9	PROPN
app01-4398	117	9	;	;	PUNCT
app01-4398	117	10	pe	pe	PROPN
app01-4398	117	11	=	=	NOUN
app01-4398	117	12	50	50	NUM
app01-4398	117	13	ev	ev	NOUN
app01-4398	117	14	.	.	PROPN
app01-4398	117	15	4.4	4.4	NUM
app01-4398	117	16	.	.	PUNCT
app01-4398	118	1	x	x	X
app01-4398	118	2	-	-	PUNCT
app01-4398	118	3	ray	ray	NOUN
app01-4398	118	4	photoelectron	photoelectron	NOUN
app01-4398	118	5	spectroscopy	spectroscopy	VERB
app01-4398	118	6	the	the	DET
app01-4398	118	7	xps	xps	PROPN
app01-4398	118	8	analysis	analysis	NOUN
app01-4398	118	9	was	be	AUX
app01-4398	118	10	performed	perform	VERB
app01-4398	118	11	using	use	VERB
app01-4398	118	12	the	the	DET
app01-4398	118	13	x	x	ADJ
app01-4398	118	14	-	-	NOUN
app01-4398	118	15	ray	ray	NOUN
app01-4398	118	16	source	source	NOUN
app01-4398	118	17	working	work	VERB
app01-4398	118	18	at	at	ADP
app01-4398	118	19	the	the	DET
app01-4398	118	20	mgkalpha	mgkalpha	ADJ
app01-4398	118	21	energy	energy	NOUN
app01-4398	118	22	1253.6	1253.6	NUM
app01-4398	118	23	ev	ev	NOUN
app01-4398	118	24	and	and	CCONJ
app01-4398	118	25	the	the	DET
app01-4398	118	26	wsw	wsw	ADJ
app01-4398	118	27	analyzer	analyzer	NOUN
app01-4398	118	28	that	that	PRON
app01-4398	118	29	can	can	AUX
app01-4398	118	30	be	be	AUX
app01-4398	118	31	operated	operate	VERB
app01-4398	118	32	at	at	ADP
app01-4398	118	33	different	different	ADJ
app01-4398	118	34	pass	pass	NOUN
app01-4398	118	35	energy	energy	NOUN
app01-4398	118	36	(	(	PUNCT
app01-4398	118	37	pe	pe	NOUN
app01-4398	118	38	)	)	PUNCT
app01-4398	118	39	,	,	PUNCT
app01-4398	118	40	in	in	ADP
app01-4398	118	41	order	order	NOUN
app01-4398	118	42	to	to	PART
app01-4398	118	43	collect	collect	VERB
app01-4398	118	44	spectra	spectra	NOUN
app01-4398	118	45	with	with	ADP
app01-4398	118	46	different	different	ADJ
app01-4398	118	47	resolutions	resolution	NOUN
app01-4398	118	48	.	.	PUNCT
app01-4398	119	1	in	in	ADP
app01-4398	119	2	particular	particular	ADJ
app01-4398	119	3	,	,	PUNCT
app01-4398	119	4	the	the	DET
app01-4398	119	5	following	follow	VERB
app01-4398	119	6	settings	setting	NOUN
app01-4398	119	7	were	be	AUX
app01-4398	119	8	used	use	VERB
app01-4398	119	9	:	:	PUNCT
app01-4398	119	10	1	1	NUM
app01-4398	119	11	.	.	PUNCT
app01-4398	119	12	)	)	PUNCT
app01-4398	120	1	pe	pe	PROPN
app01-4398	121	1	=	=	NOUN
app01-4398	121	2	50	50	NUM
app01-4398	121	3	ev	ev	INTJ
app01-4398	121	4	to	to	ADP
app01-4398	121	5	acquiring	acquire	VERB
app01-4398	121	6	the	the	DET
app01-4398	121	7	wide	wide	ADJ
app01-4398	121	8	range	range	NOUN
app01-4398	121	9	spectra	spectra	NOUN
app01-4398	121	10	used	use	VERB
app01-4398	121	11	in	in	ADP
app01-4398	121	12	identification	identification	NOUN
app01-4398	121	13	of	of	ADP
app01-4398	121	14	the	the	DET
app01-4398	121	15	main	main	ADJ
app01-4398	121	16	chemical	chemical	NOUN
app01-4398	121	17	species	specie	NOUN
app01-4398	121	18	on	on	ADP
app01-4398	121	19	the	the	DET
app01-4398	121	20	surface	surface	NOUN
app01-4398	121	21	2	2	NUM
app01-4398	121	22	.	.	PUNCT
app01-4398	121	23	)	)	PUNCT
app01-4398	122	1	pe	pe	PROPN
app01-4398	123	1	=	=	SYM
app01-4398	123	2	20	20	NUM
app01-4398	123	3	ev	ev	INTJ
app01-4398	123	4	to	to	PART
app01-4398	123	5	acquire	acquire	VERB
app01-4398	123	6	single	single	ADJ
app01-4398	123	7	peak	peak	NOUN
app01-4398	123	8	spectra	spectra	NOUN
app01-4398	123	9	with	with	ADP
app01-4398	123	10	an	an	DET
app01-4398	123	11	intermediate	intermediate	ADJ
app01-4398	123	12	resolution	resolution	NOUN
app01-4398	123	13	ideal	ideal	NOUN
app01-4398	123	14	to	to	PART
app01-4398	123	15	perform	perform	VERB
app01-4398	123	16	a	a	DET
app01-4398	123	17	quantitative	quantitative	ADJ
app01-4398	123	18	analysis	analysis	NOUN
app01-4398	123	19	and	and	CCONJ
app01-4398	123	20	3	3	NUM
app01-4398	123	21	.	.	PUNCT
app01-4398	123	22	)	)	PUNCT
app01-4398	124	1	pe	pe	PROPN
app01-4398	125	1	=	=	PUNCT
app01-4398	125	2	10	10	NUM
app01-4398	125	3	ev	ev	INTJ
app01-4398	125	4	to	to	PART
app01-4398	125	5	obtain	obtain	VERB
app01-4398	125	6	single	single	ADJ
app01-4398	125	7	peak	peak	NOUN
app01-4398	125	8	spectra	spectra	NOUN
app01-4398	125	9	at	at	ADP
app01-4398	125	10	high	high	ADJ
app01-4398	125	11	resolution	resolution	NOUN
app01-4398	125	12	.	.	PUNCT
app01-4398	126	1	the	the	DET
app01-4398	126	2	recorded	record	VERB
app01-4398	126	3	wide	wide	ADJ
app01-4398	126	4	range	range	NOUN
app01-4398	126	5	spectra	spectra	NOUN
app01-4398	126	6	are	be	AUX
app01-4398	126	7	shown	show	VERB
app01-4398	126	8	in	in	ADP
app01-4398	126	9	figure	figure	NOUN
app01-4398	126	10	10	10	NUM
app01-4398	126	11	.	.	PUNCT
app01-4398	127	1	in	in	ADP
app01-4398	127	2	the	the	DET
app01-4398	127	3	ti	ti	NOUN
app01-4398	127	4	-	-	PUNCT
app01-4398	127	5	n	n	PRON
app01-4398	127	6	samples	sample	NOUN
app01-4398	127	7	,	,	PUNCT
app01-4398	127	8	the	the	DET
app01-4398	127	9	main	main	ADJ
app01-4398	127	10	chemical	chemical	NOUN
app01-4398	127	11	species	specie	NOUN
app01-4398	127	12	on	on	ADP
app01-4398	127	13	the	the	DET
app01-4398	127	14	surfaces	surface	NOUN
app01-4398	127	15	are	be	AUX
app01-4398	127	16	those	those	PRON
app01-4398	127	17	attended	attend	VERB
app01-4398	127	18	,	,	PUNCT
app01-4398	127	19	i.e.	i.e.	X
app01-4398	127	20	titanium	titanium	NOUN
app01-4398	127	21	(	(	PUNCT
app01-4398	127	22	ti2p	ti2p	PROPN
app01-4398	127	23	)	)	PUNCT
app01-4398	127	24	,	,	PUNCT
app01-4398	127	25	nitrogen	nitrogen	NOUN
app01-4398	127	26	(	(	PUNCT
app01-4398	127	27	n1s	n1s	PROPN
app01-4398	127	28	)	)	PUNCT
app01-4398	127	29	,	,	PUNCT
app01-4398	127	30	oxygen	oxygen	NOUN
app01-4398	127	31	(	(	PUNCT
app01-4398	127	32	o1s	o1s	NUM
app01-4398	127	33	)	)	PUNCT
app01-4398	127	34	,	,	PUNCT
app01-4398	127	35	silicon	silicon	NOUN
app01-4398	127	36	(	(	PUNCT
app01-4398	127	37	si2p	si2p	PROPN
app01-4398	127	38	)	)	PUNCT
app01-4398	127	39	,	,	PUNCT
app01-4398	127	40	carbon	carbon	NOUN
app01-4398	127	41	(	(	PUNCT
app01-4398	127	42	c1s	c1s	PROPN
app01-4398	127	43	)	)	PUNCT
app01-4398	127	44	from	from	ADP
app01-4398	127	45	contaminants	contaminant	NOUN
app01-4398	127	46	and	and	CCONJ
app01-4398	127	47	boron	boron	NOUN
app01-4398	127	48	(	(	PUNCT
app01-4398	127	49	b1s	b1	NOUN
app01-4398	127	50	)	)	PUNCT
app01-4398	127	51	from	from	ADP
app01-4398	127	52	the	the	DET
app01-4398	127	53	pbn	pbn	PROPN
app01-4398	127	54	sample	sample	NOUN
app01-4398	127	55	holder	holder	NOUN
app01-4398	127	56	.	.	PUNCT
app01-4398	128	1	the	the	DET
app01-4398	128	2	corresponding	correspond	VERB
app01-4398	128	3	auger	auger	NOUN
app01-4398	128	4	electrons	electron	NOUN
app01-4398	128	5	lines	line	NOUN
app01-4398	128	6	,	,	PUNCT
app01-4398	128	7	that	that	PRON
app01-4398	128	8	are	be	AUX
app01-4398	128	9	always	always	ADV
app01-4398	128	10	present	present	ADJ
app01-4398	128	11	in	in	ADP
app01-4398	128	12	a	a	DET
app01-4398	128	13	typical	typical	ADJ
app01-4398	128	14	xps	xps	PROPN
app01-4398	128	15	spectrum	spectrum	PROPN
app01-4398	128	16	,	,	PUNCT
app01-4398	128	17	are	be	AUX
app01-4398	128	18	marked	mark	VERB
app01-4398	128	19	,	,	PUNCT
app01-4398	128	20	too	too	ADV
app01-4398	128	21	.	.	PUNCT
app01-4398	129	1	the	the	DET
app01-4398	129	2	o1s	o1s	PROPN
app01-4398	129	3	and	and	CCONJ
app01-4398	129	4	c1s	c1s	NOUN
app01-4398	129	5	peaks	peak	NOUN
app01-4398	129	6	appear	appear	VERB
app01-4398	129	7	quite	quite	ADV
app01-4398	129	8	intense	intense	ADJ
app01-4398	129	9	,	,	PUNCT
app01-4398	129	10	in	in	ADP
app01-4398	129	11	particular	particular	ADJ
app01-4398	129	12	compared	compare	VERB
app01-4398	129	13	to	to	ADP
app01-4398	129	14	the	the	DET
app01-4398	129	15	n1s	n1s	PROPN
app01-4398	129	16	peak	peak	NOUN
app01-4398	129	17	that	that	PRON
app01-4398	129	18	is	be	AUX
app01-4398	129	19	expected	expect	VERB
app01-4398	129	20	to	to	PART
app01-4398	129	21	be	be	AUX
app01-4398	129	22	stronger	strong	ADJ
app01-4398	129	23	,	,	PUNCT
app01-4398	129	24	even	even	ADV
app01-4398	129	25	taking	take	VERB
app01-4398	129	26	into	into	ADP
app01-4398	129	27	account	account	NOUN
app01-4398	129	28	its	its	PRON
app01-4398	129	29	low	low	ADJ
app01-4398	129	30	photoemission	photoemission	NOUN
app01-4398	129	31	cross	cross	NOUN
app01-4398	129	32	section	section	NOUN
app01-4398	129	33	:	:	PUNCT
app01-4398	129	34	this	this	PRON
app01-4398	129	35	suggests	suggest	VERB
app01-4398	129	36	that	that	SCONJ
app01-4398	129	37	the	the	DET
app01-4398	129	38	films	film	NOUN
app01-4398	129	39	could	could	AUX
app01-4398	129	40	be	be	AUX
app01-4398	129	41	strongly	strongly	ADV
app01-4398	129	42	oxidized	oxidize	VERB
app01-4398	129	43	.	.	PUNCT
app01-4398	130	1	spectra	spectra	PROPN
app01-4398	130	2	at	at	ADP
app01-4398	130	3	pe=20	pe=20	PROPN
app01-4398	130	4	ev	ev	INTJ
app01-4398	130	5	give	give	VERB
app01-4398	130	6	more	more	ADJ
app01-4398	130	7	indication	indication	NOUN
app01-4398	130	8	on	on	ADP
app01-4398	130	9	oxidation	oxidation	NOUN
app01-4398	130	10	processes	process	NOUN
app01-4398	130	11	together	together	ADV
app01-4398	130	12	with	with	ADP
app01-4398	130	13	the	the	DET
app01-4398	130	14	quantitative	quantitative	ADJ
app01-4398	130	15	evaluation	evaluation	NOUN
app01-4398	130	16	of	of	ADP
app01-4398	130	17	surface	surface	NOUN
app01-4398	130	18	atomic	atomic	ADJ
app01-4398	130	19	percentages	percentage	NOUN
app01-4398	130	20	,	,	PUNCT
app01-4398	130	21	that	that	PRON
app01-4398	130	22	are	be	AUX
app01-4398	130	23	collected	collect	VERB
app01-4398	130	24	in	in	ADP
app01-4398	130	25	table	table	NOUN
app01-4398	130	26	2	2	NUM
app01-4398	130	27	.	.	PUNCT
app01-4398	131	1	there	there	PRON
app01-4398	131	2	is	be	VERB
app01-4398	131	3	a	a	DET
app01-4398	131	4	significant	significant	ADJ
app01-4398	131	5	amount	amount	NOUN
app01-4398	131	6	of	of	ADP
app01-4398	131	7	carbon	carbon	NOUN
app01-4398	131	8	that	that	PRON
app01-4398	131	9	is	be	AUX
app01-4398	131	10	present	present	ADJ
app01-4398	131	11	in	in	ADP
app01-4398	131	12	k	k	PROPN
app01-4398	131	13	samples	sample	NOUN
app01-4398	131	14	:	:	PUNCT
app01-4398	131	15	the	the	DET
app01-4398	131	16	atomic	atomic	ADJ
app01-4398	131	17	percentages	percentage	NOUN
app01-4398	131	18	here	here	ADV
app01-4398	131	19	reported	report	VERB
app01-4398	131	20	take	take	VERB
app01-4398	131	21	into	into	ADP
app01-4398	131	22	account	account	NOUN
app01-4398	131	23	any	any	DET
app01-4398	131	24	contribution	contribution	NOUN
app01-4398	131	25	from	from	ADP
app01-4398	131	26	the	the	DET
app01-4398	131	27	sample	sample	NOUN
app01-4398	131	28	holder	holder	NOUN
app01-4398	131	29	that	that	PRON
app01-4398	131	30	has	have	AUX
app01-4398	131	31	been	be	AUX
app01-4398	131	32	properly	properly	ADV
app01-4398	131	33	subtracted	subtract	VERB
app01-4398	131	34	from	from	ADP
app01-4398	131	35	the	the	DET
app01-4398	131	36	c1s	c1s	PROPN
app01-4398	131	37	peak	peak	NOUN
app01-4398	131	38	,	,	PUNCT
app01-4398	131	39	thus	thus	ADV
app01-4398	131	40	the	the	DET
app01-4398	131	41	carbon	carbon	NOUN
app01-4398	131	42	percentage	percentage	NOUN
app01-4398	131	43	relies	rely	VERB
app01-4398	131	44	only	only	ADV
app01-4398	131	45	on	on	ADP
app01-4398	131	46	carbon	carbon	NOUN
app01-4398	131	47	inside	inside	ADV
app01-4398	131	48	or	or	CCONJ
app01-4398	131	49	over	over	ADP
app01-4398	131	50	the	the	DET
app01-4398	131	51	films	film	NOUN
app01-4398	131	52	.	.	PUNCT
app01-4398	132	1	the	the	DET
app01-4398	132	2	ti2p	ti2p	PROPN
app01-4398	132	3	peak	peak	NOUN
app01-4398	132	4	is	be	AUX
app01-4398	132	5	centered	center	VERB
app01-4398	132	6	at	at	ADP
app01-4398	132	7	a	a	DET
app01-4398	132	8	be	be	NOUN
app01-4398	132	9	of	of	ADP
app01-4398	132	10	459ev	459ev	NOUN
app01-4398	132	11	,	,	PUNCT
app01-4398	132	12	the	the	DET
app01-4398	132	13	value	value	NOUN
app01-4398	132	14	that	that	PRON
app01-4398	132	15	is	be	AUX
app01-4398	132	16	typical	typical	ADJ
app01-4398	132	17	of	of	ADP
app01-4398	132	18	titanium	titanium	NOUN
app01-4398	132	19	in	in	ADP
app01-4398	132	20	high	high	ADJ
app01-4398	132	21	oxidation	oxidation	NOUN
app01-4398	132	22	state	state	NOUN
app01-4398	132	23	bonded	bond	VERB
app01-4398	132	24	to	to	ADP
app01-4398	132	25	oxygen	oxygen	NOUN
app01-4398	132	26	,	,	PUNCT
app01-4398	132	27	and	and	CCONJ
app01-4398	132	28	shows	show	VERB
app01-4398	132	29	a	a	DET
app01-4398	132	30	long	long	ADJ
app01-4398	132	31	tail	tail	NOUN
app01-4398	132	32	at	at	ADP
app01-4398	132	33	lower	low	ADJ
app01-4398	132	34	bes	bes	NOUN
app01-4398	132	35	,	,	PUNCT
app01-4398	132	36	usually	usually	ADV
app01-4398	132	37	related	relate	VERB
app01-4398	132	38	to	to	ADP
app01-4398	132	39	lower	low	ADJ
app01-4398	132	40	valence	valence	NOUN
app01-4398	132	41	states	state	NOUN
app01-4398	132	42	.	.	PUNCT
app01-4398	133	1	the	the	DET
app01-4398	133	2	lineshape	lineshape	NOUN
app01-4398	133	3	analysis	analysis	NOUN
app01-4398	133	4	(	(	PUNCT
app01-4398	133	5	through	through	ADP
app01-4398	133	6	voigt	voigt	PROPN
app01-4398	133	7	functions	function	NOUN
app01-4398	133	8	,	,	PUNCT
app01-4398	133	9	considering	consider	VERB
app01-4398	133	10	a	a	DET
app01-4398	133	11	shirley	shirley	PROPN
app01-4398	133	12	background	background	NOUN
app01-4398	133	13	)	)	PUNCT
app01-4398	133	14	put	put	VERB
app01-4398	133	15	in	in	ADP
app01-4398	133	16	evidence	evidence	NOUN
app01-4398	133	17	up	up	ADP
app01-4398	133	18	to	to	PART
app01-4398	133	19	three	three	NUM
app01-4398	133	20	contributions	contribution	NOUN
app01-4398	133	21	to	to	ADP
app01-4398	133	22	the	the	DET
app01-4398	133	23	peak	peak	NOUN
app01-4398	133	24	:	:	PUNCT
app01-4398	133	25	the	the	DET
app01-4398	133	26	main	main	ADJ
app01-4398	133	27	one	one	NOUN
app01-4398	133	28	(	(	PUNCT
app01-4398	133	29	light	light	ADJ
app01-4398	133	30	blue	blue	ADJ
app01-4398	133	31	peak	peak	NOUN
app01-4398	133	32	)	)	PUNCT
app01-4398	133	33	is	be	AUX
app01-4398	133	34	at	at	ADP
app01-4398	133	35	higher	high	ADJ
app01-4398	133	36	be	be	AUX
app01-4398	133	37	and	and	CCONJ
app01-4398	133	38	can	can	AUX
app01-4398	133	39	be	be	AUX
app01-4398	133	40	correlated	correlate	VERB
app01-4398	133	41	to	to	ADP
app01-4398	133	42	tio2	tio2	NOUN
app01-4398	133	43	,	,	PUNCT
app01-4398	133	44	the	the	DET
app01-4398	133	45	second	second	ADJ
app01-4398	133	46	one	one	NUM
app01-4398	133	47	,	,	PUNCT
app01-4398	133	48	centered	center	VERB
app01-4398	133	49	at	at	ADP
app01-4398	133	50	457.5	457.5	NUM
app01-4398	133	51	ev	ev	NOUN
app01-4398	133	52	,	,	PUNCT
app01-4398	133	53	is	be	AUX
app01-4398	133	54	out	out	ADP
app01-4398	133	55	of	of	ADP
app01-4398	133	56	the	the	DET
app01-4398	133	57	typical	typical	ADJ
app01-4398	133	58	region	region	NOUN
app01-4398	133	59	of	of	ADP
app01-4398	133	60	tin	tin	NOUN
app01-4398	133	61	(	(	PUNCT
app01-4398	133	62	that	that	PRON
app01-4398	133	63	is	be	AUX
app01-4398	133	64	at	at	ADP
app01-4398	133	65	even	even	ADV
app01-4398	133	66	lower	lower	ADV
app01-4398	133	67	binding	binding	ADJ
app01-4398	133	68	23	23	NUM
app01-4398	133	69	jakub	jakub	PROPN
app01-4398	133	70	skocdopole	skocdopole	PROPN
app01-4398	133	71	,	,	PUNCT
app01-4398	133	72	lucrezia	lucrezia	PROPN
app01-4398	133	73	aversa	aversa	PROPN
app01-4398	133	74	,	,	PUNCT
app01-4398	133	75	martin	martin	PROPN
app01-4398	133	76	golan	golan	PROPN
app01-4398	133	77	et	et	PROPN
app01-4398	133	78	al	al	PROPN
app01-4398	133	79	.	.	PROPN
app01-4398	134	1	acta	acta	PROPN
app01-4398	134	2	polytechnica	polytechnica	PROPN
app01-4398	134	3	ctu	ctu	PROPN
app01-4398	134	4	proceedings	proceeding	NOUN
app01-4398	134	5	sample	sample	NOUN
app01-4398	135	1	%	%	INTJ
app01-4398	136	1	ti2p	ti2p	INTJ
app01-4398	136	2	%	%	INTJ
app01-4398	136	3	n1s	n1s	PROPN
app01-4398	136	4	%	%	NOUN
app01-4398	136	5	o1s	o1s	NUM
app01-4398	136	6	%	%	NOUN
app01-4398	137	1	c1s	c1s	NOUN
app01-4398	137	2	%	%	INTJ
app01-4398	138	1	si2p	si2p	PROPN
app01-4398	138	2	kuba7	kuba7	PROPN
app01-4398	138	3	13.2	13.2	NUM
app01-4398	138	4	3.3	3.3	NUM
app01-4398	138	5	38.5	38.5	NUM
app01-4398	138	6	38.2	38.2	NUM
app01-4398	138	7	6.8	6.8	NUM
app01-4398	138	8	kuba9	kuba9	NOUN
app01-4398	138	9	7.2	7.2	NUM
app01-4398	138	10	1.2	1.2	NUM
app01-4398	138	11	24.3	24.3	NUM
app01-4398	138	12	67.3	67.3	NUM
app01-4398	138	13	table	table	NOUN
app01-4398	138	14	2	2	NUM
app01-4398	138	15	.	.	PUNCT
app01-4398	139	1	chemical	chemical	NOUN
app01-4398	139	2	composition	composition	NOUN
app01-4398	139	3	obtained	obtain	VERB
app01-4398	139	4	from	from	ADP
app01-4398	139	5	xps	xps	ADJ
app01-4398	139	6	experiments	experiment	NOUN
app01-4398	139	7	for	for	ADP
app01-4398	139	8	the	the	DET
app01-4398	139	9	k7	k7	PROPN
app01-4398	139	10	and	and	CCONJ
app01-4398	139	11	k9	k9	PROPN
app01-4398	139	12	samples	sample	NOUN
app01-4398	139	13	.	.	PUNCT
app01-4398	140	1	figure	figure	VERB
app01-4398	140	2	11	11	NUM
app01-4398	140	3	.	.	PUNCT
app01-4398	141	1	xps	xps	PROPN
app01-4398	141	2	spectrum	spectrum	PROPN
app01-4398	141	3	close	close	ADV
app01-4398	141	4	to	to	ADP
app01-4398	141	5	ti	ti	NOUN
app01-4398	141	6	2p	2p	NUM
app01-4398	141	7	line	line	NOUN
app01-4398	141	8	for	for	ADP
app01-4398	141	9	k7	k7	PROPN
app01-4398	141	10	and	and	CCONJ
app01-4398	141	11	k9	k9	PROPN
app01-4398	141	12	samples	sample	NOUN
app01-4398	141	13	.	.	PUNCT
app01-4398	142	1	figure	figure	NOUN
app01-4398	142	2	12	12	NUM
app01-4398	142	3	.	.	PUNCT
app01-4398	143	1	xps	xps	PROPN
app01-4398	143	2	spectrum	spectrum	PROPN
app01-4398	143	3	courses	course	NOUN
app01-4398	143	4	close	close	ADJ
app01-4398	143	5	to	to	ADP
app01-4398	143	6	o1s	o1s	PROPN
app01-4398	143	7	line	line	NOUN
app01-4398	143	8	observed	observe	VERB
app01-4398	143	9	for	for	ADP
app01-4398	143	10	the	the	DET
app01-4398	143	11	k7	k7	PROPN
app01-4398	143	12	and	and	CCONJ
app01-4398	143	13	k9	k9	PROPN
app01-4398	143	14	samples	sample	NOUN
app01-4398	143	15	.	.	PUNCT
app01-4398	144	1	energy	energy	NOUN
app01-4398	144	2	)	)	PUNCT
app01-4398	144	3	and	and	CCONJ
app01-4398	144	4	could	could	AUX
app01-4398	144	5	be	be	AUX
app01-4398	144	6	assigned	assign	VERB
app01-4398	144	7	to	to	ADP
app01-4398	144	8	a	a	DET
app01-4398	144	9	mixed	mixed	ADJ
app01-4398	144	10	ti	ti	NOUN
app01-4398	144	11	-	-	ADJ
app01-4398	144	12	o	o	ADJ
app01-4398	144	13	-	-	ADJ
app01-4398	144	14	n	n	PRON
app01-4398	144	15	phase	phase	NOUN
app01-4398	144	16	(	(	PUNCT
app01-4398	144	17	oxynitrides	oxynitride	NOUN
app01-4398	144	18	)	)	PUNCT
app01-4398	144	19	,	,	PUNCT
app01-4398	144	20	while	while	SCONJ
app01-4398	144	21	the	the	DET
app01-4398	144	22	third	third	ADJ
app01-4398	144	23	one	one	NUM
app01-4398	144	24	at	at	ADP
app01-4398	144	25	455.4	455.4	NUM
app01-4398	144	26	ev	ev	NOUN
app01-4398	144	27	is	be	AUX
app01-4398	144	28	the	the	DET
app01-4398	144	29	tin	tin	NOUN
app01-4398	144	30	contribution	contribution	NOUN
app01-4398	144	31	.	.	PUNCT
app01-4398	145	1	its	its	PRON
app01-4398	145	2	intensity	intensity	NOUN
app01-4398	145	3	is	be	AUX
app01-4398	145	4	low	low	ADJ
app01-4398	145	5	compared	compare	VERB
app01-4398	145	6	to	to	ADP
app01-4398	145	7	the	the	DET
app01-4398	145	8	tio2	tio2	NOUN
app01-4398	145	9	phase	phase	NOUN
app01-4398	145	10	,	,	PUNCT
app01-4398	145	11	suggesting	suggest	VERB
app01-4398	145	12	that	that	SCONJ
app01-4398	145	13	the	the	DET
app01-4398	145	14	tin	tin	NOUN
app01-4398	145	15	layer	layer	NOUN
app01-4398	145	16	is	be	AUX
app01-4398	145	17	few	few	ADJ
app01-4398	145	18	nanometers	nanometer	NOUN
app01-4398	145	19	deeper	deeply	ADV
app01-4398	145	20	:	:	PUNCT
app01-4398	145	21	the	the	DET
app01-4398	145	22	ti2p	ti2p	PROPN
app01-4398	145	23	escape	escape	NOUN
app01-4398	145	24	length	length	NOUN
app01-4398	145	25	in	in	ADP
app01-4398	145	26	tio2	tio2	NOUN
app01-4398	145	27	is	be	AUX
app01-4398	145	28	2.12	2.12	NUM
app01-4398	145	29	nm	nm	NOUN
app01-4398	145	30	,	,	PUNCT
app01-4398	145	31	thus	thus	ADV
app01-4398	145	32	the	the	DET
app01-4398	145	33	signal	signal	NOUN
app01-4398	145	34	from	from	ADP
app01-4398	145	35	the	the	DET
app01-4398	145	36	nitride	nitride	ADJ
app01-4398	145	37	layer	layer	NOUN
app01-4398	145	38	comes	come	VERB
app01-4398	145	39	from	from	ADP
app01-4398	145	40	about	about	ADP
app01-4398	145	41	6	6	NUM
app01-4398	145	42	-	-	SYM
app01-4398	145	43	8	8	NUM
app01-4398	145	44	nm	nm	NOUN
app01-4398	145	45	below	below	ADP
app01-4398	145	46	the	the	DET
app01-4398	145	47	surface	surface	NOUN
app01-4398	145	48	.	.	PUNCT
app01-4398	146	1	the	the	DET
app01-4398	146	2	o1s	o1s	PROPN
app01-4398	146	3	spectra	spectra	NOUN
app01-4398	146	4	for	for	ADP
app01-4398	146	5	all	all	DET
app01-4398	146	6	samples	sample	NOUN
app01-4398	146	7	show	show	VERB
app01-4398	146	8	the	the	DET
app01-4398	146	9	presence	presence	NOUN
app01-4398	146	10	of	of	ADP
app01-4398	146	11	a	a	DET
app01-4398	146	12	main	main	ADJ
app01-4398	146	13	contribution	contribution	NOUN
app01-4398	146	14	at	at	ADP
app01-4398	146	15	about	about	ADV
app01-4398	146	16	530	530	NUM
app01-4398	146	17	-	-	SYM
app01-4398	146	18	530.5	530.5	NUM
app01-4398	146	19	ev	ev	NOUN
app01-4398	146	20	and	and	CCONJ
app01-4398	146	21	a	a	DET
app01-4398	146	22	less	less	ADV
app01-4398	146	23	intense	intense	ADJ
app01-4398	146	24	feature	feature	NOUN
app01-4398	146	25	at	at	ADP
app01-4398	146	26	higher	high	ADJ
app01-4398	146	27	binding	binding	ADJ
app01-4398	146	28	energy	energy	NOUN
app01-4398	146	29	.	.	PUNCT
app01-4398	147	1	the	the	DET
app01-4398	147	2	lineshape	lineshape	NOUN
app01-4398	147	3	analysis	analysis	NOUN
app01-4398	147	4	,	,	PUNCT
app01-4398	147	5	however	however	ADV
app01-4398	147	6	,	,	PUNCT
app01-4398	147	7	reveals	reveal	VERB
app01-4398	147	8	a	a	DET
app01-4398	147	9	third	third	ADJ
app01-4398	147	10	contribution	contribution	NOUN
app01-4398	147	11	at	at	ADP
app01-4398	147	12	around	around	ADP
app01-4398	147	13	532	532	NUM
app01-4398	147	14	ev	ev	NOUN
app01-4398	147	15	.	.	PUNCT
app01-4398	148	1	the	the	DET
app01-4398	148	2	most	most	ADV
app01-4398	148	3	intense	intense	ADJ
app01-4398	148	4	peak	peak	NOUN
app01-4398	148	5	at	at	ADP
app01-4398	148	6	low	low	ADJ
app01-4398	148	7	be	be	AUX
app01-4398	148	8	can	can	AUX
app01-4398	148	9	be	be	AUX
app01-4398	148	10	assigned	assign	VERB
app01-4398	148	11	to	to	ADP
app01-4398	148	12	metal	metal	NOUN
app01-4398	148	13	oxides	oxide	NOUN
app01-4398	148	14	,	,	PUNCT
app01-4398	148	15	i.e.	i.e.	X
app01-4398	148	16	titanium	titanium	NOUN
app01-4398	148	17	oxides	oxide	NOUN
app01-4398	148	18	,	,	PUNCT
app01-4398	148	19	while	while	SCONJ
app01-4398	148	20	the	the	DET
app01-4398	148	21	peak	peak	NOUN
app01-4398	148	22	at	at	ADP
app01-4398	148	23	higher	high	ADJ
app01-4398	148	24	be	be	AUX
app01-4398	148	25	is	be	AUX
app01-4398	148	26	typically	typically	ADV
app01-4398	148	27	assigned	assign	VERB
app01-4398	148	28	to	to	ADP
app01-4398	148	29	oh	oh	NUM
app01-4398	148	30	groups	group	NOUN
app01-4398	148	31	at	at	ADP
app01-4398	148	32	the	the	DET
app01-4398	148	33	surface	surface	NOUN
app01-4398	148	34	.	.	PUNCT
app01-4398	149	1	taking	take	VERB
app01-4398	149	2	into	into	ADP
app01-4398	149	3	account	account	NOUN
app01-4398	149	4	the	the	DET
app01-4398	149	5	indications	indication	NOUN
app01-4398	149	6	given	give	VERB
app01-4398	149	7	figure	figure	NOUN
app01-4398	149	8	13	13	NUM
app01-4398	149	9	.	.	PUNCT
app01-4398	150	1	xps	xps	PROPN
app01-4398	150	2	spectra	spectra	PROPN
app01-4398	150	3	close	close	ADV
app01-4398	150	4	to	to	ADP
app01-4398	150	5	n1s	n1s	PROPN
app01-4398	150	6	line	line	NOUN
app01-4398	150	7	observed	observe	VERB
app01-4398	150	8	for	for	ADP
app01-4398	150	9	the	the	DET
app01-4398	150	10	k7	k7	PROPN
app01-4398	150	11	and	and	CCONJ
app01-4398	150	12	k9	k9	PROPN
app01-4398	150	13	samples	sample	NOUN
app01-4398	150	14	;	;	PUNCT
app01-4398	150	15	experimental	experimental	ADJ
app01-4398	150	16	values	value	NOUN
app01-4398	150	17	(	(	PUNCT
app01-4398	150	18	the	the	DET
app01-4398	150	19	noisy	noisy	ADJ
app01-4398	150	20	courses	course	NOUN
app01-4398	150	21	)	)	PUNCT
app01-4398	150	22	and	and	CCONJ
app01-4398	150	23	the	the	DET
app01-4398	150	24	fit	fit	ADJ
app01-4398	150	25	curves	curve	NOUN
app01-4398	150	26	are	be	AUX
app01-4398	150	27	shown	show	VERB
app01-4398	150	28	.	.	PUNCT
app01-4398	151	1	for	for	SCONJ
app01-4398	151	2	more	more	ADJ
app01-4398	151	3	details	detail	NOUN
app01-4398	151	4	see	see	VERB
app01-4398	151	5	text	text	NOUN
app01-4398	151	6	.	.	PUNCT
app01-4398	152	1	by	by	ADP
app01-4398	152	2	ti2p	ti2p	PROPN
app01-4398	152	3	spectra	spectra	PROPN
app01-4398	152	4	,	,	PUNCT
app01-4398	152	5	we	we	PRON
app01-4398	152	6	can	can	AUX
app01-4398	152	7	assume	assume	VERB
app01-4398	152	8	that	that	SCONJ
app01-4398	152	9	this	this	DET
app01-4398	152	10	component	component	NOUN
app01-4398	152	11	together	together	ADV
app01-4398	152	12	with	with	ADP
app01-4398	152	13	the	the	DET
app01-4398	152	14	other	other	ADJ
app01-4398	152	15	o	o	NOUN
app01-4398	152	16	peak	peak	NOUN
app01-4398	152	17	can	can	AUX
app01-4398	152	18	be	be	AUX
app01-4398	152	19	related	relate	VERB
app01-4398	152	20	to	to	ADP
app01-4398	152	21	oxynitrides	oxynitride	NOUN
app01-4398	152	22	species	specie	NOUN
app01-4398	152	23	.	.	PUNCT
app01-4398	153	1	this	this	DET
app01-4398	153	2	assumption	assumption	NOUN
app01-4398	153	3	can	can	AUX
app01-4398	153	4	be	be	AUX
app01-4398	153	5	confirmed	confirm	VERB
app01-4398	153	6	by	by	ADP
app01-4398	153	7	looking	look	VERB
app01-4398	153	8	at	at	ADP
app01-4398	153	9	the	the	DET
app01-4398	153	10	n1s	n1s	PROPN
app01-4398	153	11	spectra	spectra	NOUN
app01-4398	153	12	(	(	PUNCT
app01-4398	153	13	figure	figure	NOUN
app01-4398	153	14	13	13	NUM
app01-4398	153	15	)	)	PUNCT
app01-4398	153	16	.	.	PUNCT
app01-4398	154	1	each	each	DET
app01-4398	154	2	nitrogen	nitrogen	NOUN
app01-4398	154	3	core	core	NOUN
app01-4398	154	4	level	level	NOUN
app01-4398	154	5	can	can	AUX
app01-4398	154	6	be	be	AUX
app01-4398	154	7	reproduced	reproduce	VERB
app01-4398	154	8	by	by	ADP
app01-4398	154	9	the	the	DET
app01-4398	154	10	peak	peak	NOUN
app01-4398	154	11	at	at	ADP
app01-4398	154	12	low	low	ADV
app01-4398	154	13	be	be	AUX
app01-4398	154	14	(	(	PUNCT
app01-4398	154	15	396	396	NUM
app01-4398	154	16	-	-	SYM
app01-4398	154	17	397	397	NUM
app01-4398	154	18	ev	ev	NOUN
app01-4398	154	19	,	,	PUNCT
app01-4398	154	20	in	in	ADP
app01-4398	154	21	blue	blue	ADJ
app01-4398	154	22	and	and	CCONJ
app01-4398	154	23	purple	purple	ADJ
app01-4398	154	24	)	)	PUNCT
app01-4398	154	25	that	that	PRON
app01-4398	154	26	is	be	AUX
app01-4398	154	27	assigned	assign	VERB
app01-4398	154	28	to	to	ADP
app01-4398	154	29	the	the	DET
app01-4398	154	30	nitride	nitride	ADJ
app01-4398	154	31	layer	layer	NOUN
app01-4398	154	32	,	,	PUNCT
app01-4398	154	33	plus	plus	CCONJ
app01-4398	154	34	one	one	NUM
app01-4398	154	35	or	or	CCONJ
app01-4398	154	36	two	two	NUM
app01-4398	154	37	components	component	NOUN
app01-4398	154	38	at	at	ADP
app01-4398	154	39	higher	high	ADJ
app01-4398	154	40	be	be	VERB
app01-4398	154	41	that	that	PRON
app01-4398	154	42	can	can	AUX
app01-4398	154	43	be	be	AUX
app01-4398	154	44	reasonably	reasonably	ADV
app01-4398	154	45	correlated	correlate	VERB
app01-4398	154	46	to	to	ADP
app01-4398	154	47	the	the	DET
app01-4398	154	48	oxynitrides	oxynitride	NOUN
app01-4398	154	49	already	already	ADV
app01-4398	154	50	found	find	VERB
app01-4398	154	51	in	in	ADP
app01-4398	154	52	the	the	DET
app01-4398	154	53	o1s	o1s	PROPN
app01-4398	154	54	lineshape	lineshape	NOUN
app01-4398	154	55	analysis	analysis	NOUN
app01-4398	154	56	.	.	PUNCT
app01-4398	155	1	4.4.1	4.4.1	X
app01-4398	155	2	.	.	PUNCT
app01-4398	156	1	discussion	discussion	NOUN
app01-4398	156	2	the	the	DET
app01-4398	156	3	measurement	measurement	NOUN
app01-4398	156	4	has	have	AUX
app01-4398	156	5	been	be	AUX
app01-4398	156	6	performed	perform	VERB
app01-4398	156	7	before	before	SCONJ
app01-4398	156	8	the	the	DET
app01-4398	156	9	sic	sic	ADJ
app01-4398	156	10	film	film	NOUN
app01-4398	156	11	has	have	AUX
app01-4398	156	12	been	be	AUX
app01-4398	156	13	prepared	prepare	VERB
app01-4398	156	14	.	.	PUNCT
app01-4398	157	1	thus	thus	ADV
app01-4398	157	2	only	only	ADV
app01-4398	157	3	tin	tin	NOUN
app01-4398	157	4	film	film	NOUN
app01-4398	157	5	is	be	AUX
app01-4398	157	6	analyzed	analyze	VERB
app01-4398	157	7	.	.	PUNCT
app01-4398	158	1	it	it	PRON
app01-4398	158	2	was	be	AUX
app01-4398	158	3	expected	expect	VERB
app01-4398	158	4	that	that	SCONJ
app01-4398	158	5	the	the	DET
app01-4398	158	6	measured	measured	ADJ
app01-4398	158	7	data	datum	NOUN
app01-4398	158	8	would	would	AUX
app01-4398	158	9	originate	originate	VERB
app01-4398	158	10	mostly	mostly	ADV
app01-4398	158	11	from	from	ADP
app01-4398	158	12	the	the	DET
app01-4398	158	13	oxidation	oxidation	NOUN
app01-4398	158	14	layer	layer	NOUN
app01-4398	158	15	on	on	ADP
app01-4398	158	16	the	the	DET
app01-4398	158	17	surface	surface	NOUN
app01-4398	158	18	of	of	ADP
app01-4398	158	19	the	the	DET
app01-4398	158	20	sample	sample	NOUN
app01-4398	158	21	.	.	PUNCT
app01-4398	159	1	this	this	DET
app01-4398	159	2	assumption	assumption	NOUN
app01-4398	159	3	was	be	AUX
app01-4398	159	4	confirmed	confirm	VERB
app01-4398	159	5	.	.	PUNCT
app01-4398	160	1	the	the	DET
app01-4398	160	2	xps	xps	PROPN
app01-4398	160	3	does	do	AUX
app01-4398	160	4	not	not	PART
app01-4398	160	5	prove	prove	VERB
app01-4398	160	6	unambiguously	unambiguously	ADV
app01-4398	160	7	that	that	SCONJ
app01-4398	160	8	the	the	DET
app01-4398	160	9	film	film	NOUN
app01-4398	160	10	is	be	AUX
app01-4398	160	11	composed	compose	VERB
app01-4398	160	12	of	of	ADP
app01-4398	160	13	tin	tin	NOUN
app01-4398	160	14	only	only	ADV
app01-4398	160	15	.	.	PUNCT
app01-4398	161	1	it	it	PRON
app01-4398	161	2	seem	seem	VERB
app01-4398	161	3	reasonable	reasonable	ADJ
app01-4398	161	4	to	to	ADP
app01-4398	161	5	state	state	NOUN
app01-4398	161	6	that	that	SCONJ
app01-4398	161	7	the	the	DET
app01-4398	161	8	xps	xps	PROPN
app01-4398	161	9	proves	prove	VERB
app01-4398	161	10	that	that	SCONJ
app01-4398	161	11	ti	ti	NOUN
app01-4398	161	12	and	and	CCONJ
app01-4398	161	13	n	n	PRON
app01-4398	161	14	species	specie	NOUN
app01-4398	161	15	are	be	AUX
app01-4398	161	16	present	present	ADJ
app01-4398	161	17	in	in	ADP
app01-4398	161	18	the	the	DET
app01-4398	161	19	film	film	NOUN
app01-4398	161	20	,	,	PUNCT
app01-4398	161	21	however	however	ADV
app01-4398	161	22	they	they	PRON
app01-4398	161	23	could	could	AUX
app01-4398	161	24	be	be	AUX
app01-4398	161	25	combined	combine	VERB
app01-4398	161	26	in	in	ADP
app01-4398	161	27	some	some	DET
app01-4398	161	28	mixture	mixture	NOUN
app01-4398	161	29	of	of	ADP
app01-4398	161	30	ti	ti	NOUN
app01-4398	161	31	,	,	PUNCT
app01-4398	161	32	tin	tin	NOUN
app01-4398	161	33	and	and	CCONJ
app01-4398	161	34	ti	ti	NOUN
app01-4398	161	35	-	-	ADJ
app01-4398	161	36	o	o	NOUN
app01-4398	161	37	-	-	PUNCT
app01-4398	161	38	n	n	CCONJ
app01-4398	161	39	(	(	PUNCT
app01-4398	161	40	oxynitrides	oxynitride	NOUN
app01-4398	161	41	)	)	PUNCT
app01-4398	161	42	phases	phase	NOUN
app01-4398	161	43	.	.	PUNCT
app01-4398	162	1	5	5	X
app01-4398	162	2	.	.	X
app01-4398	162	3	conclusions	conclusion	NOUN
app01-4398	162	4	both	both	DET
app01-4398	162	5	films	film	NOUN
app01-4398	162	6	are	be	AUX
app01-4398	162	7	composed	compose	VERB
app01-4398	162	8	of	of	ADP
app01-4398	162	9	particles	particle	NOUN
app01-4398	162	10	created	create	VERB
app01-4398	162	11	during	during	ADP
app01-4398	162	12	the	the	DET
app01-4398	162	13	deposition	deposition	NOUN
app01-4398	162	14	process	process	NOUN
app01-4398	162	15	,	,	PUNCT
app01-4398	162	16	the	the	DET
app01-4398	162	17	feature	feature	NOUN
app01-4398	162	18	which	which	PRON
app01-4398	162	19	is	be	AUX
app01-4398	162	20	necessary	necessary	ADJ
app01-4398	162	21	for	for	ADP
app01-4398	162	22	their	their	PRON
app01-4398	162	23	role	role	NOUN
app01-4398	162	24	in	in	ADP
app01-4398	162	25	the	the	DET
app01-4398	162	26	chameleon	chameleon	NOUN
app01-4398	162	27	coating	coating	NOUN
app01-4398	162	28	.	.	PUNCT
app01-4398	163	1	the	the	DET
app01-4398	163	2	deposition	deposition	NOUN
app01-4398	163	3	of	of	ADP
app01-4398	163	4	particles	particle	NOUN
app01-4398	163	5	from	from	ADP
app01-4398	163	6	these	these	DET
app01-4398	163	7	materials	material	NOUN
app01-4398	163	8	were	be	AUX
app01-4398	163	9	successful	successful	ADJ
app01-4398	163	10	,	,	PUNCT
app01-4398	163	11	however	however	ADV
app01-4398	163	12	further	further	ADJ
app01-4398	163	13	research	research	NOUN
app01-4398	163	14	should	should	AUX
app01-4398	163	15	be	be	AUX
app01-4398	163	16	performed	perform	VERB
app01-4398	163	17	to	to	PART
app01-4398	163	18	ensure	ensure	VERB
app01-4398	163	19	the	the	DET
app01-4398	163	20	reliable	reliable	ADJ
app01-4398	163	21	particle	particle	NOUN
app01-4398	163	22	size	size	NOUN
app01-4398	163	23	control	control	NOUN
app01-4398	163	24	.	.	PUNCT
app01-4398	164	1	the	the	DET
app01-4398	164	2	thickness	thickness	NOUN
app01-4398	164	3	of	of	ADP
app01-4398	164	4	films	film	NOUN
app01-4398	164	5	is	be	AUX
app01-4398	164	6	found	find	VERB
app01-4398	164	7	to	to	PART
app01-4398	164	8	be	be	AUX
app01-4398	164	9	in	in	ADP
app01-4398	164	10	units	unit	NOUN
app01-4398	164	11	of	of	ADP
app01-4398	164	12	micrometres	micrometre	NOUN
app01-4398	164	13	.	.	PUNCT
app01-4398	165	1	both	both	DET
app01-4398	165	2	24	24	NUM
app01-4398	165	3	vol	vol	NOUN
app01-4398	165	4	.	.	PUNCT
app01-4398	166	1	9/2017	9/2017	NUM
app01-4398	166	2	preparing	prepare	VERB
app01-4398	166	3	of	of	ADP
app01-4398	166	4	the	the	DET
app01-4398	166	5	chameleon	chameleon	NOUN
app01-4398	166	6	coating	coating	NOUN
app01-4398	166	7	by	by	ADP
app01-4398	166	8	the	the	DET
app01-4398	166	9	ion	ion	NOUN
app01-4398	166	10	jet	jet	NOUN
app01-4398	166	11	deposition	deposition	NOUN
app01-4398	166	12	method	method	NOUN
app01-4398	166	13	tin	tin	NOUN
app01-4398	166	14	and	and	CCONJ
app01-4398	166	15	sic	sic	ADJ
app01-4398	166	16	films	film	NOUN
app01-4398	166	17	are	be	AUX
app01-4398	166	18	amorphous	amorphous	ADJ
app01-4398	166	19	,	,	PUNCT
app01-4398	166	20	as	as	SCONJ
app01-4398	166	21	proven	prove	VERB
app01-4398	166	22	by	by	ADP
app01-4398	166	23	raman	raman	NOUN
app01-4398	166	24	spectroscopy	spectroscopy	NOUN
app01-4398	166	25	and	and	CCONJ
app01-4398	166	26	xrd	xrd	NOUN
app01-4398	166	27	.	.	PUNCT
app01-4398	167	1	further	further	ADJ
app01-4398	167	2	research	research	NOUN
app01-4398	167	3	steps	step	NOUN
app01-4398	167	4	towards	towards	ADP
app01-4398	167	5	the	the	DET
app01-4398	167	6	chameleon	chameleon	NOUN
app01-4398	167	7	layer	layer	NOUN
app01-4398	167	8	preparation	preparation	NOUN
app01-4398	167	9	should	should	AUX
app01-4398	167	10	be	be	AUX
app01-4398	167	11	the	the	DET
app01-4398	167	12	deposition	deposition	NOUN
app01-4398	167	13	of	of	ADP
app01-4398	167	14	mos2	mos2	PROPN
app01-4398	167	15	films	film	NOUN
app01-4398	167	16	and	and	CCONJ
app01-4398	167	17	the	the	DET
app01-4398	167	18	incorporation	incorporation	NOUN
app01-4398	167	19	of	of	ADP
app01-4398	167	20	the	the	DET
app01-4398	167	21	mos2	mos2	NOUN
app01-4398	167	22	into	into	ADP
app01-4398	167	23	dlc	dlc	NOUN
app01-4398	167	24	matrix	matrix	NOUN
app01-4398	167	25	and	and	CCONJ
app01-4398	167	26	their	their	PRON
app01-4398	167	27	characterisation	characterisation	NOUN
app01-4398	167	28	.	.	PUNCT
app01-4398	168	1	acknowledgements	acknowledgement	NOUN
app01-4398	168	2	the	the	DET
app01-4398	168	3	authors	author	NOUN
app01-4398	168	4	are	be	AUX
app01-4398	168	5	indebted	indebte	VERB
app01-4398	168	6	to	to	ADP
app01-4398	168	7	ing	ing	NOUN
app01-4398	168	8	.	.	PUNCT
app01-4398	169	1	gianpiero	gianpiero	PROPN
app01-4398	169	2	tedeschi	tedeschi	PROPN
app01-4398	169	3	,	,	PUNCT
app01-4398	169	4	ceo	ceo	NOUN
app01-4398	169	5	,	,	PUNCT
app01-4398	169	6	noivion	noivion	PROPN
app01-4398	169	7	srl	srl	PROPN
app01-4398	169	8	,	,	PUNCT
app01-4398	169	9	for	for	ADP
app01-4398	169	10	providing	provide	VERB
app01-4398	169	11	the	the	DET
app01-4398	169	12	deposition	deposition	NOUN
app01-4398	169	13	technology	technology	NOUN
app01-4398	169	14	for	for	ADP
app01-4398	169	15	samples	sample	NOUN
app01-4398	169	16	preparation	preparation	NOUN
app01-4398	169	17	and	and	CCONJ
app01-4398	169	18	to	to	ADP
app01-4398	169	19	the	the	DET
app01-4398	169	20	institute	institute	NOUN
app01-4398	169	21	of	of	ADP
app01-4398	169	22	materials	material	NOUN
app01-4398	169	23	for	for	ADP
app01-4398	169	24	electronics	electronic	NOUN
app01-4398	169	25	and	and	CCONJ
app01-4398	169	26	magnetism	magnetism	NOUN
app01-4398	169	27	,	,	PUNCT
app01-4398	169	28	cnr	cnr	PROPN
app01-4398	169	29	,	,	PUNCT
app01-4398	169	30	trento	trento	NOUN
app01-4398	169	31	for	for	ADP
app01-4398	169	32	its	its	PRON
app01-4398	169	33	hospitality	hospitality	NOUN
app01-4398	169	34	,	,	PUNCT
app01-4398	169	35	especially	especially	ADV
app01-4398	169	36	to	to	ADP
app01-4398	169	37	the	the	DET
app01-4398	169	38	institute	institute	PROPN
app01-4398	169	39	director	director	PROPN
app01-4398	169	40	dr	dr	PROPN
app01-4398	169	41	.	.	PROPN
app01-4398	169	42	salvatore	salvatore	PROPN
app01-4398	169	43	iannotta	iannotta	PROPN
app01-4398	169	44	,	,	PUNCT
app01-4398	169	45	and	and	CCONJ
app01-4398	169	46	to	to	ADP
app01-4398	169	47	the	the	DET
app01-4398	169	48	trento	trento	PROPN
app01-4398	169	49	unit	unit	PROPN
app01-4398	169	50	head	head	PROPN
app01-4398	169	51	dr	dr	PROPN
app01-4398	169	52	.	.	PROPN
app01-4398	169	53	roberto	roberto	PROPN
app01-4398	169	54	verucchi	verucchi	PROPN
app01-4398	169	55	.	.	PUNCT
app01-4398	170	1	this	this	DET
app01-4398	170	2	work	work	NOUN
app01-4398	170	3	was	be	AUX
app01-4398	170	4	supported	support	VERB
app01-4398	170	5	by	by	ADP
app01-4398	170	6	the	the	DET
app01-4398	170	7	grant	grant	PROPN
app01-4398	170	8	agency	agency	NOUN
app01-4398	170	9	of	of	ADP
app01-4398	170	10	the	the	DET
app01-4398	170	11	czech	czech	PROPN
app01-4398	170	12	technical	technical	PROPN
app01-4398	170	13	university	university	PROPN
app01-4398	170	14	in	in	ADP
app01-4398	170	15	prague	prague	PROPN
app01-4398	170	16	,	,	PUNCT
app01-4398	170	17	grant	grant	VERB
app01-4398	170	18	no	no	INTJ
app01-4398	170	19	.	.	PUNCT
app01-4398	171	1	sgs16/245	sgs16/245	NOUN
app01-4398	171	2	/	/	SYM
app01-4398	171	3	ohk4/3t/14	ohk4/3t/14	NOUN
app01-4398	171	4	.	.	PUNCT
app01-4398	172	1	references	reference	NOUN
app01-4398	172	2	[	[	X
app01-4398	172	3	1	1	NUM
app01-4398	172	4	]	]	PUNCT
app01-4398	172	5	a.	a.	NOUN
app01-4398	172	6	a.	a.	NOUN
app01-4398	172	7	voevodin	voevodin	PROPN
app01-4398	172	8	,	,	PUNCT
app01-4398	172	9	j.	j.	PROPN
app01-4398	172	10	s.	s.	PROPN
app01-4398	172	11	zabinski	zabinski	PROPN
app01-4398	172	12	.	.	PUNCT
app01-4398	173	1	supertough	supertough	VERB
app01-4398	173	2	wear	wear	NOUN
app01-4398	173	3	-	-	PUNCT
app01-4398	173	4	resistant	resistant	ADJ
app01-4398	173	5	coatings	coating	NOUN
app01-4398	173	6	with	with	ADP
app01-4398	173	7	‘	'	PUNCT
app01-4398	173	8	chameleon	chameleon	NOUN
app01-4398	173	9	’	'	PUNCT
app01-4398	173	10	surface	surface	NOUN
app01-4398	173	11	adaptation	adaptation	NOUN
app01-4398	173	12	.	.	PUNCT
app01-4398	174	1	thin	thin	ADJ
app01-4398	174	2	solid	solid	ADJ
app01-4398	174	3	films	film	NOUN
app01-4398	174	4	370	370	NUM
app01-4398	174	5	:	:	PUNCT
app01-4398	174	6	223	223	NUM
app01-4398	174	7	-	-	SYM
app01-4398	174	8	231	231	NUM
app01-4398	174	9	,	,	PUNCT
app01-4398	174	10	2000	2000	NUM
app01-4398	174	11	.	.	PUNCT
app01-4398	175	1	[	[	X
app01-4398	175	2	2	2	X
app01-4398	175	3	]	]	X
app01-4398	175	4	y.	y.	PROPN
app01-4398	175	5	inoue	inoue	PROPN
app01-4398	175	6	,	,	PUNCT
app01-4398	175	7	s.	s.	PROPN
app01-4398	175	8	nakashima	nakashima	PROPN
app01-4398	175	9	,	,	PUNCT
app01-4398	175	10	a.	a.	PROPN
app01-4398	175	11	mitsuishi	mitsuishi	PROPN
app01-4398	175	12	.	.	PUNCT
app01-4398	175	13	raman	raman	ADJ
app01-4398	175	14	spectra	spectra	NOUN
app01-4398	175	15	of	of	ADP
app01-4398	175	16	amorphous	amorphous	ADJ
app01-4398	175	17	sic	sic	ADJ
app01-4398	175	18	.	.	PUNCT
app01-4398	176	1	solide	solide	PROPN
app01-4398	176	2	state	state	NOUN
app01-4398	176	3	communations	communation	NOUN
app01-4398	176	4	48(12	48(12	NUM
app01-4398	176	5	):	):	PUNCT
app01-4398	176	6	1071	1071	NUM
app01-4398	176	7	-	-	SYM
app01-4398	176	8	1075	1075	NUM
app01-4398	176	9	,	,	PUNCT
app01-4398	176	10	1983	1983	NUM
app01-4398	176	11	.	.	PUNCT
app01-4398	177	1	[	[	X
app01-4398	177	2	3	3	X
app01-4398	177	3	]	]	PUNCT
app01-4398	177	4	w.	w.	PROPN
app01-4398	177	5	spengler	spengler	PROPN
app01-4398	177	6	,	,	PUNCT
app01-4398	177	7	r.	r.	PROPN
app01-4398	177	8	kaiser	kaiser	PROPN
app01-4398	177	9	.	.	PUNCT
app01-4398	177	10	raman	raman	NOUN
app01-4398	177	11	scattering	scattering	NOUN
app01-4398	177	12	,	,	PUNCT
app01-4398	177	13	superconductivity	superconductivity	NOUN
app01-4398	177	14	,	,	PUNCT
app01-4398	177	15	and	and	CCONJ
app01-4398	177	16	phonon	phonon	NOUN
app01-4398	177	17	density	density	NOUN
app01-4398	177	18	of	of	ADP
app01-4398	177	19	states	state	NOUN
app01-4398	177	20	of	of	ADP
app01-4398	177	21	stoichiometric	stoichiometric	NOUN
app01-4398	177	22	and	and	CCONJ
app01-4398	177	23	nonstoichimetric	nonstoichimetric	ADJ
app01-4398	177	24	tin	tin	NOUN
app01-4398	177	25	.	.	PUNCT
app01-4398	178	1	physical	physical	PROPN
app01-4398	178	2	review	review	PROPN
app01-4398	178	3	b	b	PROPN
app01-4398	178	4	17(3	17(3	NUM
app01-4398	178	5	):	):	PUNCT
app01-4398	178	6	1095	1095	NUM
app01-4398	178	7	-	-	SYM
app01-4398	178	8	1101	1101	NUM
app01-4398	178	9	,	,	PUNCT
app01-4398	178	10	1978	1978	NUM
app01-4398	178	11	.	.	PUNCT
app01-4398	179	1	[	[	X
app01-4398	179	2	4	4	X
app01-4398	179	3	]	]	PUNCT
app01-4398	179	4	r.	r.	PROPN
app01-4398	179	5	j.	j.	PROPN
app01-4398	179	6	nemanich	nemanich	PROPN
app01-4398	179	7	,	,	PUNCT
app01-4398	179	8	c.	c.	PROPN
app01-4398	179	9	c.	c.	PROPN
app01-4398	179	10	tsai	tsai	PROPN
app01-4398	179	11	,	,	PUNCT
app01-4398	179	12	g.	g.	PROPN
app01-4398	179	13	a.	a.	PROPN
app01-4398	179	14	n.	n.	PROPN
app01-4398	179	15	connell	connell	PROPN
app01-4398	179	16	.	.	PUNCT
app01-4398	180	1	interference	interference	NOUN
app01-4398	180	2	-	-	PUNCT
app01-4398	180	3	enhanced	enhance	VERB
app01-4398	180	4	raman	raman	NOUN
app01-4398	180	5	scattering	scattering	NOUN
app01-4398	180	6	of	of	ADP
app01-4398	180	7	very	very	ADV
app01-4398	180	8	thin	thin	ADJ
app01-4398	180	9	titanium	titanium	NOUN
app01-4398	180	10	and	and	CCONJ
app01-4398	180	11	titanium	titanium	NOUN
app01-4398	180	12	oxide	oxide	NOUN
app01-4398	180	13	films	film	NOUN
app01-4398	180	14	.	.	PUNCT
app01-4398	181	1	physical	physical	ADJ
app01-4398	181	2	review	review	NOUN
app01-4398	181	3	letters	letter	VERB
app01-4398	181	4	44(4	44(4	NOUN
app01-4398	181	5	):	):	PUNCT
app01-4398	181	6	273	273	NUM
app01-4398	181	7	-	-	SYM
app01-4398	181	8	276	276	NUM
app01-4398	181	9	,	,	PUNCT
app01-4398	181	10	1980	1980	NUM
app01-4398	181	11	.	.	PUNCT
app01-4398	182	1	[	[	X
app01-4398	182	2	5	5	NUM
app01-4398	182	3	]	]	PUNCT
app01-4398	182	4	j.skocdopole	j.skocdopole	NOUN
app01-4398	182	5	.	.	PUNCT
app01-4398	183	1	preparation	preparation	NOUN
app01-4398	183	2	of	of	ADP
app01-4398	183	3	thin	thin	ADJ
app01-4398	183	4	layers	layer	NOUN
app01-4398	183	5	by	by	ADP
app01-4398	183	6	ijd	ijd	PROPN
app01-4398	183	7	method	method	NOUN
app01-4398	183	8	and	and	CCONJ
app01-4398	183	9	characterization	characterization	NOUN
app01-4398	183	10	of	of	ADP
app01-4398	183	11	their	their	PRON
app01-4398	183	12	physical	physical	ADJ
app01-4398	183	13	-	-	PUNCT
app01-4398	183	14	chemical	chemical	NOUN
app01-4398	183	15	properties.prague	properties.prague	NOUN
app01-4398	183	16	.	.	PUNCT
app01-4398	184	1	bachelor	bachelor	NOUN
app01-4398	184	2	thesis	thesis	NOUN
app01-4398	184	3	.	.	PUNCT
app01-4398	185	1	czech	czech	PROPN
app01-4398	185	2	technical	technical	PROPN
app01-4398	185	3	university	university	PROPN
app01-4398	185	4	in	in	ADP
app01-4398	185	5	prague	prague	PROPN
app01-4398	185	6	,	,	PUNCT
app01-4398	185	7	faculty	faculty	NOUN
app01-4398	185	8	of	of	ADP
app01-4398	185	9	nuclear	nuclear	ADJ
app01-4398	185	10	sciences	science	NOUN
app01-4398	185	11	and	and	CCONJ
app01-4398	185	12	physical	physical	ADJ
app01-4398	185	13	engineering	engineering	NOUN
app01-4398	185	14	,	,	PUNCT
app01-4398	185	15	2015	2015	NUM
app01-4398	185	16	.	.	PUNCT
app01-4398	186	1	[	[	X
app01-4398	186	2	6	6	NUM
app01-4398	186	3	]	]	PUNCT
app01-4398	186	4	j.skocdopole	j.skocdopole	NOUN
app01-4398	186	5	.	.	PUNCT
app01-4398	186	6	construction	construction	NOUN
app01-4398	186	7	of	of	ADP
app01-4398	186	8	system	system	NOUN
app01-4398	186	9	for	for	ADP
app01-4398	186	10	deposition	deposition	NOUN
app01-4398	186	11	of	of	ADP
app01-4398	186	12	thin	thin	ADJ
app01-4398	186	13	films	film	NOUN
app01-4398	186	14	by	by	ADP
app01-4398	186	15	ijd	ijd	PROPN
app01-4398	186	16	method	method	NOUN
app01-4398	186	17	and	and	CCONJ
app01-4398	186	18	trial	trial	NOUN
app01-4398	186	19	deposition	deposition	NOUN
app01-4398	186	20	of	of	ADP
app01-4398	186	21	chosen	choose	VERB
app01-4398	186	22	materials	material	NOUN
app01-4398	186	23	..	..	PUNCT
app01-4398	186	24	prague	prague	PROPN
app01-4398	186	25	.	.	PUNCT
app01-4398	187	1	research	research	NOUN
app01-4398	187	2	thesis	thesis	NOUN
app01-4398	187	3	.	.	PUNCT
app01-4398	188	1	czech	czech	PROPN
app01-4398	188	2	technical	technical	PROPN
app01-4398	188	3	university	university	PROPN
app01-4398	188	4	in	in	ADP
app01-4398	188	5	prague	prague	PROPN
app01-4398	188	6	,	,	PUNCT
app01-4398	188	7	faculty	faculty	NOUN
app01-4398	188	8	of	of	ADP
app01-4398	188	9	nuclear	nuclear	ADJ
app01-4398	188	10	sciences	science	NOUN
app01-4398	188	11	and	and	CCONJ
app01-4398	188	12	physical	physical	ADJ
app01-4398	188	13	engineering	engineering	NOUN
app01-4398	188	14	,	,	PUNCT
app01-4398	188	15	2016	2016	NUM
app01-4398	188	16	.	.	PUNCT
app01-4398	189	1	[	[	X
app01-4398	189	2	7	7	X
app01-4398	189	3	]	]	X
app01-4398	189	4	s.o	s.o	PROPN
app01-4398	189	5	.	.	PROPN
app01-4398	189	6	leathem	leathem	PROPN
app01-4398	189	7	,	,	PUNCT
app01-4398	189	8	et	et	PROPN
app01-4398	189	9	al	al	PROPN
app01-4398	189	10	.	.	PUNCT
app01-4398	189	11	influence	influence	NOUN
app01-4398	189	12	of	of	ADP
app01-4398	189	13	the	the	DET
app01-4398	189	14	injection	injection	NOUN
app01-4398	189	15	speeds	speed	NOUN
app01-4398	189	16	on	on	ADP
app01-4398	189	17	the	the	DET
app01-4398	189	18	discharge	discharge	NOUN
app01-4398	189	19	characteristics	characteristic	NOUN
app01-4398	189	20	and	and	CCONJ
app01-4398	189	21	minimization	minimization	NOUN
app01-4398	189	22	of	of	ADP
app01-4398	189	23	delay	delay	NOUN
app01-4398	189	24	time	time	NOUN
app01-4398	189	25	in	in	ADP
app01-4398	189	26	a	a	DET
app01-4398	189	27	pseudospark	pseudospark	NOUN
app01-4398	189	28	discharge	discharge	NOUN
app01-4398	189	29	.	.	PUNCT
app01-4398	190	1	the	the	DET
app01-4398	190	2	open	open	ADJ
app01-4398	190	3	plasma	plasma	NOUN
app01-4398	190	4	physics	physics	NOUN
app01-4398	190	5	journal	journal	NOUN
app01-4398	190	6	3	3	NUM
app01-4398	190	7	:	:	SYM
app01-4398	190	8	20	20	NUM
app01-4398	190	9	-	-	SYM
app01-4398	190	10	27	27	NUM
app01-4398	190	11	,	,	PUNCT
app01-4398	190	12	2010	2010	NUM
app01-4398	190	13	.	.	PUNCT
app01-4398	191	1	[	[	X
app01-4398	191	2	8	8	NUM
app01-4398	191	3	]	]	X
app01-4398	191	4	p.	p.	NOUN
app01-4398	191	5	nozar	nozar	NOUN
app01-4398	191	6	.	.	PUNCT
app01-4398	192	1	ionized	ionized	ADJ
app01-4398	192	2	jet	jet	NOUN
app01-4398	192	3	deposition	deposition	NOUN
app01-4398	192	4	technique	technique	NOUN
app01-4398	192	5	,	,	PUNCT
app01-4398	192	6	a	a	DET
app01-4398	192	7	new	new	ADJ
app01-4398	192	8	class	class	NOUN
app01-4398	192	9	of	of	ADP
app01-4398	192	10	thin	thin	ADJ
app01-4398	192	11	film	film	NOUN
app01-4398	192	12	deposition	deposition	NOUN
app01-4398	192	13	equipment	equipment	NOUN
app01-4398	192	14	,	,	PUNCT
app01-4398	192	15	vacuum	vacuum	NOUN
app01-4398	192	16	symposium	symposium	NOUN
app01-4398	192	17	coventry	coventry	NOUN
app01-4398	192	18	,	,	PUNCT
app01-4398	192	19	16	16	NUM
app01-4398	192	20	october	october	NOUN
app01-4398	192	21	2014	2014	NUM
app01-4398	192	22	,	,	PUNCT
app01-4398	192	23	the	the	DET
app01-4398	192	24	united	united	ADJ
app01-4398	192	25	kingdom	kingdom	NOUN
app01-4398	193	1	[	[	X
app01-4398	193	2	9	9	NUM
app01-4398	193	3	]	]	X
app01-4398	193	4	s.tricot	s.tricot	X
app01-4398	193	5	,	,	PUNCT
app01-4398	193	6	et	et	PROPN
app01-4398	193	7	al	al	PROPN
app01-4398	193	8	.	.	PUNCT
app01-4398	193	9	dynamics	dynamic	NOUN
app01-4398	193	10	of	of	ADP
app01-4398	193	11	a	a	DET
app01-4398	193	12	pulsed	pulse	VERB
app01-4398	193	13	-	-	PUNCT
app01-4398	193	14	electron	electron	NOUN
app01-4398	193	15	beam	beam	NOUN
app01-4398	193	16	induced	induce	VERB
app01-4398	193	17	plasma	plasma	NOUN
app01-4398	193	18	:	:	PUNCT
app01-4398	193	19	application	application	NOUN
app01-4398	193	20	to	to	ADP
app01-4398	193	21	the	the	DET
app01-4398	193	22	growth	growth	NOUN
app01-4398	193	23	of	of	ADP
app01-4398	193	24	zinc	zinc	NOUN
app01-4398	193	25	oxide	oxide	NOUN
app01-4398	193	26	thin	thin	ADJ
app01-4398	193	27	ïňąlms	ïňąlm	NOUN
app01-4398	193	28	journal	journal	NOUN
app01-4398	193	29	of	of	ADP
app01-4398	193	30	physics	physics	PROPN
app01-4398	193	31	d	d	PROPN
app01-4398	193	32	41(17	41(17	PROPN
app01-4398	193	33	):	):	PUNCT
app01-4398	193	34	10pp	10pp	NOUN
app01-4398	193	35	.	.	PROPN
app01-4398	193	36	,	,	PUNCT
app01-4398	193	37	2008	2008	NUM
app01-4398	194	1	[	[	X
app01-4398	194	2	10	10	NUM
app01-4398	194	3	]	]	X
app01-4398	194	4	m.a	m.a	PROPN
app01-4398	194	5	.	.	PROPN
app01-4398	194	6	raadu	raadu	PROPN
app01-4398	194	7	,	,	PUNCT
app01-4398	194	8	j.j.rasmussen	j.j.rasmussen	NOUN
app01-4398	194	9	.	.	PUNCT
app01-4398	195	1	dynamical	dynamical	ADJ
app01-4398	195	2	aspects	aspect	NOUN
app01-4398	195	3	of	of	ADP
app01-4398	195	4	electrostatic	electrostatic	ADJ
app01-4398	195	5	double	double	ADJ
app01-4398	195	6	layers	layer	NOUN
app01-4398	195	7	astrophysics	astrophysic	NOUN
app01-4398	195	8	and	and	CCONJ
app01-4398	195	9	space	space	NOUN
app01-4398	195	10	science	science	NOUN
app01-4398	195	11	144	144	NUM
app01-4398	195	12	:	:	PUNCT
app01-4398	195	13	43	43	NUM
app01-4398	195	14	-	-	SYM
app01-4398	195	15	71	71	NUM
app01-4398	195	16	,	,	PUNCT
app01-4398	195	17	1988	1988	NUM
app01-4398	196	1	[	[	X
app01-4398	196	2	11	11	NUM
app01-4398	196	3	]	]	X
app01-4398	196	4	yu	yu	PROPN
app01-4398	196	5	.	.	PROPN
app01-4398	196	6	d.	d.	PROPN
app01-4398	196	7	korolev	korolev	PROPN
app01-4398	196	8	,	,	PUNCT
app01-4398	196	9	et	et	PROPN
app01-4398	196	10	al	al	PROPN
app01-4398	196	11	.	.	PROPN
app01-4398	196	12	electron	electron	PROPN
app01-4398	196	13	beams	beam	NOUN
app01-4398	196	14	generated	generate	VERB
app01-4398	196	15	at	at	ADP
app01-4398	196	16	different	different	ADJ
app01-4398	196	17	stages	stage	NOUN
app01-4398	196	18	of	of	ADP
app01-4398	196	19	the	the	DET
app01-4398	196	20	pseudospark	pseudospark	NOUN
app01-4398	196	21	discharge	discharge	NOUN
app01-4398	196	22	,	,	PUNCT
app01-4398	196	23	the	the	DET
app01-4398	196	24	27th	27th	ADJ
app01-4398	196	25	international	international	ADJ
app01-4398	196	26	conference	conference	NOUN
app01-4398	196	27	on	on	ADP
app01-4398	196	28	phenomena	phenomenon	NOUN
app01-4398	196	29	in	in	ADP
app01-4398	196	30	ionized	ionized	ADJ
app01-4398	196	31	gase	gase	NOUN
app01-4398	196	32	,	,	PUNCT
app01-4398	196	33	eindhoven	eindhoven	VERB
app01-4398	196	34	,	,	PUNCT
app01-4398	196	35	18	18	NUM
app01-4398	196	36	-	-	SYM
app01-4398	196	37	22	22	NUM
app01-4398	196	38	july	july	PROPN
app01-4398	196	39	2005	2005	NUM
app01-4398	196	40	,	,	PUNCT
app01-4398	196	41	the	the	DET
app01-4398	196	42	netherlands	netherlands	PROPN
app01-4398	196	43	25	25	NUM
app01-4398	196	44	acta	acta	PROPN
app01-4398	196	45	polytechnica	polytechnica	PROPN
app01-4398	196	46	ctu	ctu	NOUN
app01-4398	196	47	proceedings	proceeding	NOUN
app01-4398	196	48	9:1–7	9:1–7	NUM
app01-4398	196	49	,	,	PUNCT
app01-4398	196	50	2017	2017	NUM
app01-4398	196	51	1	1	NUM
app01-4398	196	52	introduction	introduction	NOUN
app01-4398	196	53	2	2	NUM
app01-4398	196	54	theory	theory	NOUN
app01-4398	196	55	2.1	2.1	NUM
app01-4398	196	56	ionized	ionize	VERB
app01-4398	196	57	jet	jet	NOUN
app01-4398	196	58	deposition	deposition	NOUN
app01-4398	196	59	2.2	2.2	NUM
app01-4398	196	60	chameleon	chameleon	NOUN
app01-4398	196	61	coating	coat	VERB
app01-4398	196	62	3	3	NUM
app01-4398	196	63	experiment	experiment	NOUN
app01-4398	196	64	4	4	NUM
app01-4398	196	65	results	result	VERB
app01-4398	196	66	4.1	4.1	NUM
app01-4398	196	67	raman	raman	NOUN
app01-4398	196	68	spectroscopy	spectroscopy	NOUN
app01-4398	196	69	4.1.1	4.1.1	NUM
app01-4398	196	70	discussion	discussion	NOUN
app01-4398	196	71	4.2	4.2	NUM
app01-4398	196	72	xrd	xrd	NOUN
app01-4398	196	73	4.3	4.3	NUM
app01-4398	196	74	sem	sem	NOUN
app01-4398	196	75	4.3.1	4.3.1	NUM
app01-4398	196	76	discussion	discussion	NOUN
app01-4398	196	77	4.4	4.4	NUM
app01-4398	196	78	x	x	NOUN
app01-4398	196	79	-	-	NOUN
app01-4398	196	80	ray	ray	NOUN
app01-4398	196	81	photoelectron	photoelectron	NOUN
app01-4398	196	82	spectroscopy	spectroscopy	VERB
app01-4398	196	83	4.4.1	4.4.1	NUM
app01-4398	196	84	discussion	discussion	NOUN
app01-4398	196	85	5	5	NUM
app01-4398	196	86	conclusions	conclusion	NOUN
app01-4398	196	87	acknowledgements	acknowledgement	NOUN
app01-4398	196	88	references	reference	NOUN