id	sid	tid	token	lemma	pos
app01-4966	1	1	acta	acta	PROPN
app01-4966	1	2	polytechnica	polytechnica	PROPN
app01-4966	1	3	ctu	ctu	PROPN
app01-4966	1	4	proceedings	proceeding	NOUN
app01-4966	1	5	doi:10.14311	doi:10.14311	NOUN
app01-4966	1	6	/	/	SYM
app01-4966	1	7	app.2018.17.0024	app.2018.17.0024	PROPN
app01-4966	1	8	acta	acta	PROPN
app01-4966	1	9	polytechnica	polytechnica	PROPN
app01-4966	1	10	ctu	ctu	NOUN
app01-4966	1	11	proceedings	proceeding	NOUN
app01-4966	1	12	17:24–29	17:24–29	NUM
app01-4966	1	13	,	,	PUNCT
app01-4966	1	14	2018	2018	NUM
app01-4966	1	15	©	©	PROPN
app01-4966	1	16	czech	czech	PROPN
app01-4966	1	17	technical	technical	PROPN
app01-4966	1	18	university	university	PROPN
app01-4966	1	19	in	in	ADP
app01-4966	1	20	prague	prague	PROPN
app01-4966	1	21	,	,	PUNCT
app01-4966	1	22	2018	2018	NUM
app01-4966	1	23	available	available	ADJ
app01-4966	1	24	online	online	ADV
app01-4966	1	25	at	at	ADP
app01-4966	1	26	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-4966	2	1	thin	thin	ADJ
app01-4966	2	2	nitride	nitride	ADJ
app01-4966	2	3	layers	layer	NOUN
app01-4966	2	4	as	as	ADP
app01-4966	2	5	permeation	permeation	NOUN
app01-4966	2	6	barriers	barrier	NOUN
app01-4966	2	7	jakub	jakub	PROPN
app01-4966	2	8	veverkaa	veverkaa	PROPN
app01-4966	2	9	,	,	PUNCT
app01-4966	2	10	b,∗	b,∗	PROPN
app01-4966	2	11	,	,	PUNCT
app01-4966	2	12	jiri	jiri	PROPN
app01-4966	2	13	matejicekb	matejicekb	PROPN
app01-4966	2	14	,	,	PUNCT
app01-4966	2	15	frantisek	frantisek	NOUN
app01-4966	2	16	lukacb	lukacb	NOUN
app01-4966	2	17	,	,	PUNCT
app01-4966	2	18	david	david	PROPN
app01-4966	2	19	pospisilc	pospisilc	PROPN
app01-4966	2	20	,	,	PUNCT
app01-4966	2	21	ladislav	ladislav	VERB
app01-4966	2	22	cvrcekd	cvrcekd	ADV
app01-4966	2	23	,	,	PUNCT
app01-4966	2	24	vincenc	vincenc	PROPN
app01-4966	2	25	nemanice	nemanice	VERB
app01-4966	2	26	a	a	DET
app01-4966	2	27	faculty	faculty	NOUN
app01-4966	2	28	of	of	ADP
app01-4966	2	29	nuclear	nuclear	ADJ
app01-4966	2	30	sciences	science	NOUN
app01-4966	2	31	and	and	CCONJ
app01-4966	2	32	physical	physical	ADJ
app01-4966	2	33	engineering	engineering	NOUN
app01-4966	2	34	,	,	PUNCT
app01-4966	2	35	brehova	brehova	X
app01-4966	2	36	7	7	NUM
app01-4966	2	37	,	,	PUNCT
app01-4966	2	38	praha	praha	PROPN
app01-4966	2	39	1	1	NUM
app01-4966	2	40	,	,	PUNCT
app01-4966	2	41	czech	czech	PROPN
app01-4966	2	42	republic	republic	PROPN
app01-4966	2	43	b	b	PROPN
app01-4966	2	44	institute	institute	PROPN
app01-4966	2	45	of	of	ADP
app01-4966	2	46	plasma	plasma	NOUN
app01-4966	2	47	physics	physics	NOUN
app01-4966	2	48	of	of	ADP
app01-4966	2	49	the	the	DET
app01-4966	2	50	czech	czech	PROPN
app01-4966	2	51	academy	academy	PROPN
app01-4966	2	52	of	of	ADP
app01-4966	2	53	sciences	sciences	PROPN
app01-4966	2	54	,	,	PUNCT
app01-4966	2	55	za	za	PROPN
app01-4966	2	56	slovankou	slovankou	NOUN
app01-4966	2	57	3	3	NUM
app01-4966	2	58	,	,	PUNCT
app01-4966	2	59	praha	praha	PROPN
app01-4966	2	60	8	8	NUM
app01-4966	2	61	,	,	PUNCT
app01-4966	2	62	czech	czech	PROPN
app01-4966	2	63	republic	republic	NOUN
app01-4966	2	64	c	c	PROPN
app01-4966	2	65	technical	technical	PROPN
app01-4966	2	66	university	university	PROPN
app01-4966	2	67	of	of	ADP
app01-4966	2	68	liberec	liberec	PROPN
app01-4966	2	69	,	,	PUNCT
app01-4966	2	70	studentska	studentska	PROPN
app01-4966	2	71	1402/2	1402/2	NUM
app01-4966	2	72	,	,	PUNCT
app01-4966	2	73	liberec	liberec	PROPN
app01-4966	2	74	i	i	PRON
app01-4966	2	75	,	,	PUNCT
app01-4966	2	76	czech	czech	PROPN
app01-4966	2	77	republic	republic	PROPN
app01-4966	2	78	d	d	PROPN
app01-4966	2	79	department	department	PROPN
app01-4966	2	80	of	of	ADP
app01-4966	2	81	materials	material	NOUN
app01-4966	2	82	engineering	engineering	NOUN
app01-4966	2	83	,	,	PUNCT
app01-4966	2	84	faculty	faculty	NOUN
app01-4966	2	85	of	of	ADP
app01-4966	2	86	mechanical	mechanical	ADJ
app01-4966	2	87	engineering	engineering	NOUN
app01-4966	2	88	,	,	PUNCT
app01-4966	2	89	czech	czech	PROPN
app01-4966	2	90	technical	technical	PROPN
app01-4966	2	91	university	university	PROPN
app01-4966	2	92	in	in	ADP
app01-4966	2	93	prague	prague	PROPN
app01-4966	2	94	,	,	PUNCT
app01-4966	2	95	karlovo	karlovo	PROPN
app01-4966	2	96	namesti	namesti	PROPN
app01-4966	2	97	13	13	NUM
app01-4966	2	98	,	,	PUNCT
app01-4966	2	99	praha	praha	PROPN
app01-4966	2	100	2	2	NUM
app01-4966	2	101	,	,	PUNCT
app01-4966	2	102	czech	czech	PROPN
app01-4966	2	103	republic	republic	NOUN
app01-4966	2	104	e	e	PROPN
app01-4966	2	105	jozef	jozef	PROPN
app01-4966	2	106	stefan	stefan	PROPN
app01-4966	2	107	institute	institute	PROPN
app01-4966	2	108	,	,	PUNCT
app01-4966	2	109	jamova	jamova	PROPN
app01-4966	2	110	39	39	NUM
app01-4966	2	111	,	,	PUNCT
app01-4966	2	112	ljubljana	ljubljana	PROPN
app01-4966	2	113	,	,	PUNCT
app01-4966	2	114	slovenia	slovenia	PROPN
app01-4966	2	115	∗	∗	PROPN
app01-4966	2	116	corresponding	correspond	VERB
app01-4966	2	117	author	author	NOUN
app01-4966	2	118	:	:	PUNCT
app01-4966	2	119	veverka@ipp.cas.cz	veverka@ipp.cas.cz	NOUN
app01-4966	2	120	abstract	abstract	NOUN
app01-4966	2	121	.	.	PUNCT
app01-4966	3	1	permeation	permeation	NOUN
app01-4966	3	2	barriers	barrier	NOUN
app01-4966	3	3	represent	represent	VERB
app01-4966	3	4	one	one	NUM
app01-4966	3	5	of	of	ADP
app01-4966	3	6	the	the	DET
app01-4966	3	7	crucial	crucial	ADJ
app01-4966	3	8	fields	field	NOUN
app01-4966	3	9	in	in	ADP
app01-4966	3	10	materials	material	NOUN
app01-4966	3	11	development	development	NOUN
app01-4966	3	12	for	for	ADP
app01-4966	3	13	thermonuclear	thermonuclear	NOUN
app01-4966	3	14	fusion	fusion	NOUN
app01-4966	3	15	.	.	PUNCT
app01-4966	4	1	primary	primary	ADJ
app01-4966	4	2	objective	objective	NOUN
app01-4966	4	3	of	of	ADP
app01-4966	4	4	the	the	DET
app01-4966	4	5	barriers	barrier	NOUN
app01-4966	4	6	is	be	AUX
app01-4966	4	7	to	to	PART
app01-4966	4	8	suppress	suppress	VERB
app01-4966	4	9	the	the	DET
app01-4966	4	10	permeation	permeation	NOUN
app01-4966	4	11	of	of	ADP
app01-4966	4	12	hydrogen	hydrogen	NOUN
app01-4966	4	13	isotopes	isotope	NOUN
app01-4966	4	14	(	(	PUNCT
app01-4966	4	15	mainly	mainly	ADV
app01-4966	4	16	tritium	tritium	NOUN
app01-4966	4	17	)	)	PUNCT
app01-4966	4	18	from	from	ADP
app01-4966	4	19	future	future	ADJ
app01-4966	4	20	thermonuclear	thermonuclear	NOUN
app01-4966	4	21	fusion	fusion	NOUN
app01-4966	4	22	facilities	facility	NOUN
app01-4966	4	23	.	.	PUNCT
app01-4966	5	1	secondary	secondary	ADJ
app01-4966	5	2	objective	objective	NOUN
app01-4966	5	3	is	be	AUX
app01-4966	5	4	to	to	PART
app01-4966	5	5	reduce	reduce	VERB
app01-4966	5	6	hydrogen	hydrogen	NOUN
app01-4966	5	7	retention	retention	NOUN
app01-4966	5	8	in	in	ADP
app01-4966	5	9	structural	structural	ADJ
app01-4966	5	10	materials	material	NOUN
app01-4966	5	11	,	,	PUNCT
app01-4966	5	12	potentially	potentially	ADV
app01-4966	5	13	also	also	ADV
app01-4966	5	14	improving	improve	VERB
app01-4966	5	15	their	their	PRON
app01-4966	5	16	corrosion	corrosion	NOUN
app01-4966	5	17	resistance	resistance	NOUN
app01-4966	5	18	.	.	PUNCT
app01-4966	6	1	expected	expect	VERB
app01-4966	6	2	reactor	reactor	NOUN
app01-4966	6	3	conditions	condition	NOUN
app01-4966	6	4	put	put	VERB
app01-4966	6	5	high	high	ADJ
app01-4966	6	6	demands	demand	NOUN
app01-4966	6	7	on	on	ADP
app01-4966	6	8	the	the	DET
app01-4966	6	9	material	material	NOUN
app01-4966	6	10	,	,	PUNCT
app01-4966	6	11	as	as	ADV
app01-4966	6	12	well	well	ADV
app01-4966	6	13	as	as	ADP
app01-4966	6	14	on	on	ADP
app01-4966	6	15	the	the	DET
app01-4966	6	16	final	final	ADJ
app01-4966	6	17	barrier	barrier	NOUN
app01-4966	6	18	quality	quality	NOUN
app01-4966	6	19	.	.	PUNCT
app01-4966	7	1	key	key	ADJ
app01-4966	7	2	properties	property	NOUN
app01-4966	7	3	are	be	AUX
app01-4966	7	4	tritium	tritium	NOUN
app01-4966	7	5	permeation	permeation	NOUN
app01-4966	7	6	reduction	reduction	NOUN
app01-4966	7	7	,	,	PUNCT
app01-4966	7	8	absence	absence	NOUN
app01-4966	7	9	of	of	ADP
app01-4966	7	10	defects	defect	NOUN
app01-4966	7	11	(	(	PUNCT
app01-4966	7	12	especially	especially	ADV
app01-4966	7	13	cracks	crack	NOUN
app01-4966	7	14	)	)	PUNCT
app01-4966	7	15	,	,	PUNCT
app01-4966	7	16	high	high	ADJ
app01-4966	7	17	-	-	PUNCT
app01-4966	7	18	temperature	temperature	NOUN
app01-4966	7	19	stability	stability	NOUN
app01-4966	7	20	and	and	CCONJ
app01-4966	7	21	corrosion	corrosion	NOUN
app01-4966	7	22	resistance	resistance	NOUN
app01-4966	7	23	,	,	PUNCT
app01-4966	7	24	and	and	CCONJ
app01-4966	7	25	compatibility	compatibility	NOUN
app01-4966	7	26	with	with	ADP
app01-4966	7	27	structural	structural	ADJ
app01-4966	7	28	materials	material	NOUN
app01-4966	7	29	(	(	PUNCT
app01-4966	7	30	mostly	mostly	ADV
app01-4966	7	31	ferritic	ferritic	ADJ
app01-4966	7	32	-	-	PUNCT
app01-4966	7	33	martensitic	martensitic	NOUN
app01-4966	7	34	steels	steel	NOUN
app01-4966	7	35	)	)	PUNCT
app01-4966	7	36	.	.	PUNCT
app01-4966	8	1	regarding	regard	VERB
app01-4966	8	2	industrial	industrial	ADJ
app01-4966	8	3	scale	scale	NOUN
app01-4966	8	4	production	production	NOUN
app01-4966	8	5	,	,	PUNCT
app01-4966	8	6	ability	ability	NOUN
app01-4966	8	7	of	of	ADP
app01-4966	8	8	the	the	DET
app01-4966	8	9	deposition	deposition	NOUN
app01-4966	8	10	method	method	NOUN
app01-4966	8	11	to	to	PART
app01-4966	8	12	coat	coat	VERB
app01-4966	8	13	large	large	ADJ
app01-4966	8	14	complex	complex	ADJ
app01-4966	8	15	surfaces	surface	NOUN
app01-4966	8	16	is	be	AUX
app01-4966	8	17	desirable	desirable	ADJ
app01-4966	8	18	.	.	PUNCT
app01-4966	9	1	thin	thin	ADJ
app01-4966	9	2	nitride	nitride	ADJ
app01-4966	9	3	layers	layer	NOUN
app01-4966	9	4	,	,	PUNCT
app01-4966	9	5	identified	identify	VERB
app01-4966	9	6	as	as	ADP
app01-4966	9	7	promising	promise	VERB
app01-4966	9	8	permeation	permeation	NOUN
app01-4966	9	9	barriers	barrier	NOUN
app01-4966	9	10	,	,	PUNCT
app01-4966	9	11	were	be	AUX
app01-4966	9	12	prepared	prepare	VERB
app01-4966	9	13	by	by	ADP
app01-4966	9	14	diffusion	diffusion	NOUN
app01-4966	9	15	-	-	PUNCT
app01-4966	9	16	based	base	VERB
app01-4966	9	17	nitridation	nitridation	NOUN
app01-4966	9	18	and	and	CCONJ
app01-4966	9	19	physical	physical	ADJ
app01-4966	9	20	vapour	vapour	NOUN
app01-4966	9	21	deposition	deposition	NOUN
app01-4966	9	22	(	(	PUNCT
app01-4966	9	23	pvd	pvd	PROPN
app01-4966	9	24	)	)	PUNCT
app01-4966	9	25	and	and	CCONJ
app01-4966	9	26	characterized	characterize	VERB
app01-4966	9	27	.	.	PUNCT
app01-4966	10	1	keywords	keyword	NOUN
app01-4966	10	2	:	:	PUNCT
app01-4966	10	3	permeation	permeation	NOUN
app01-4966	10	4	barriers	barrier	NOUN
app01-4966	10	5	,	,	PUNCT
app01-4966	10	6	nitride	nitride	ADJ
app01-4966	10	7	layers	layer	NOUN
app01-4966	10	8	,	,	PUNCT
app01-4966	10	9	pvd	pvd	PROPN
app01-4966	10	10	coating	coating	NOUN
app01-4966	10	11	,	,	PUNCT
app01-4966	10	12	permeation	permeation	NOUN
app01-4966	10	13	measurement	measurement	NOUN
app01-4966	10	14	.	.	PUNCT
app01-4966	11	1	1	1	X
app01-4966	11	2	.	.	X
app01-4966	11	3	introduction	introduction	NOUN
app01-4966	11	4	nuclear	nuclear	ADJ
app01-4966	11	5	fusion	fusion	NOUN
app01-4966	11	6	is	be	AUX
app01-4966	11	7	an	an	DET
app01-4966	11	8	appealing	appealing	ADJ
app01-4966	11	9	means	mean	NOUN
app01-4966	11	10	of	of	ADP
app01-4966	11	11	energy	energy	NOUN
app01-4966	11	12	production	production	NOUN
app01-4966	11	13	that	that	PRON
app01-4966	11	14	can	can	AUX
app01-4966	11	15	resolve	resolve	VERB
app01-4966	11	16	growing	grow	VERB
app01-4966	11	17	energy	energy	NOUN
app01-4966	11	18	demands	demand	NOUN
app01-4966	11	19	of	of	ADP
app01-4966	11	20	the	the	DET
app01-4966	11	21	mankind	mankind	NOUN
app01-4966	11	22	.	.	PUNCT
app01-4966	12	1	facing	face	VERB
app01-4966	12	2	inevitable	inevitable	ADJ
app01-4966	12	3	exhaustion	exhaustion	NOUN
app01-4966	12	4	of	of	ADP
app01-4966	12	5	fossil	fossil	ADJ
app01-4966	12	6	fuels	fuel	NOUN
app01-4966	12	7	and	and	CCONJ
app01-4966	12	8	growing	grow	VERB
app01-4966	12	9	awareness	awareness	NOUN
app01-4966	12	10	of	of	ADP
app01-4966	12	11	climate	climate	NOUN
app01-4966	12	12	changes	change	NOUN
app01-4966	12	13	caused	cause	VERB
app01-4966	12	14	by	by	ADP
app01-4966	12	15	greenhouse	greenhouse	NOUN
app01-4966	12	16	gases	gas	NOUN
app01-4966	12	17	emissions	emission	NOUN
app01-4966	12	18	,	,	PUNCT
app01-4966	12	19	it	it	PRON
app01-4966	12	20	is	be	AUX
app01-4966	12	21	obvious	obvious	ADJ
app01-4966	12	22	that	that	SCONJ
app01-4966	12	23	current	current	ADJ
app01-4966	12	24	means	mean	NOUN
app01-4966	12	25	of	of	ADP
app01-4966	12	26	energy	energy	NOUN
app01-4966	12	27	production	production	NOUN
app01-4966	12	28	need	need	VERB
app01-4966	12	29	to	to	PART
app01-4966	12	30	be	be	AUX
app01-4966	12	31	replaced	replace	VERB
app01-4966	12	32	.	.	PUNCT
app01-4966	13	1	renewable	renewable	ADJ
app01-4966	13	2	sources	source	NOUN
app01-4966	13	3	(	(	PUNCT
app01-4966	13	4	e.g.	e.g.	ADV
app01-4966	13	5	solar	solar	ADJ
app01-4966	13	6	,	,	PUNCT
app01-4966	13	7	hydro	hydro	NOUN
app01-4966	13	8	,	,	PUNCT
app01-4966	13	9	wind	wind	NOUN
app01-4966	13	10	or	or	CCONJ
app01-4966	13	11	geothermal	geothermal	ADJ
app01-4966	13	12	power	power	NOUN
app01-4966	13	13	)	)	PUNCT
app01-4966	13	14	are	be	AUX
app01-4966	13	15	not	not	PART
app01-4966	13	16	expected	expect	VERB
app01-4966	13	17	to	to	PART
app01-4966	13	18	be	be	AUX
app01-4966	13	19	capable	capable	ADJ
app01-4966	13	20	of	of	ADP
app01-4966	13	21	supplying	supply	VERB
app01-4966	13	22	global	global	ADJ
app01-4966	13	23	energy	energy	NOUN
app01-4966	13	24	needs	need	NOUN
app01-4966	13	25	.	.	PUNCT
app01-4966	14	1	therefore	therefore	ADV
app01-4966	14	2	,	,	PUNCT
app01-4966	14	3	entirely	entirely	ADV
app01-4966	14	4	new	new	ADJ
app01-4966	14	5	source	source	NOUN
app01-4966	14	6	of	of	ADP
app01-4966	14	7	energy	energy	NOUN
app01-4966	14	8	is	be	AUX
app01-4966	14	9	required	require	VERB
app01-4966	14	10	,	,	PUNCT
app01-4966	14	11	in	in	ADP
app01-4966	14	12	an	an	DET
app01-4966	14	13	ideal	ideal	ADJ
app01-4966	14	14	case	case	NOUN
app01-4966	14	15	fulfilling	fulfil	VERB
app01-4966	14	16	the	the	DET
app01-4966	14	17	following	follow	VERB
app01-4966	14	18	criteria	criterion	NOUN
app01-4966	14	19	•	•	ADP
app01-4966	14	20	sufficient	sufficient	ADJ
app01-4966	14	21	fuel	fuel	NOUN
app01-4966	14	22	supplies	supply	NOUN
app01-4966	14	23	•	•	NOUN
app01-4966	14	24	no	no	DET
app01-4966	14	25	harmful	harmful	ADJ
app01-4966	14	26	emissions	emission	NOUN
app01-4966	14	27	•	•	NOUN
app01-4966	14	28	no	no	DET
app01-4966	14	29	major	major	ADJ
app01-4966	14	30	operational	operational	ADJ
app01-4966	14	31	hazards	hazard	NOUN
app01-4966	14	32	thermonuclear	thermonuclear	NOUN
app01-4966	14	33	fusion	fusion	NOUN
app01-4966	14	34	expected	expect	VERB
app01-4966	14	35	to	to	PART
app01-4966	14	36	be	be	AUX
app01-4966	14	37	harnessed	harness	VERB
app01-4966	14	38	in	in	ADP
app01-4966	14	39	the	the	DET
app01-4966	14	40	first	first	ADJ
app01-4966	14	41	generation	generation	NOUN
app01-4966	14	42	of	of	ADP
app01-4966	14	43	power	power	NOUN
app01-4966	14	44	plants	plant	NOUN
app01-4966	14	45	exhibits	exhibit	VERB
app01-4966	14	46	promising	promising	ADJ
app01-4966	14	47	results	result	NOUN
app01-4966	14	48	regarding	regard	VERB
app01-4966	14	49	all	all	DET
app01-4966	14	50	the	the	DET
app01-4966	14	51	criteria	criterion	NOUN
app01-4966	14	52	.	.	PUNCT
app01-4966	15	1	energy	energy	NOUN
app01-4966	15	2	production	production	NOUN
app01-4966	15	3	will	will	AUX
app01-4966	15	4	be	be	AUX
app01-4966	15	5	based	base	VERB
app01-4966	15	6	on	on	ADP
app01-4966	15	7	the	the	DET
app01-4966	15	8	following	follow	VERB
app01-4966	15	9	equations	equation	NOUN
app01-4966	15	10	2	2	NUM
app01-4966	15	11	1d	1d	NUM
app01-4966	15	12	+3	+3	PROPN
app01-4966	15	13	1	1	NUM
app01-4966	15	14	t	t	NOUN
app01-4966	15	15	−→4	−→4	NUM
app01-4966	15	16	2	2	NUM
app01-4966	16	1	he	he	PRON
app01-4966	16	2	+1	+1	VERB
app01-4966	16	3	0	0	PUNCT
app01-4966	17	1	n	n	PROPN
app01-4966	17	2	+	+	CCONJ
app01-4966	18	1	17.6mev	17.6mev	NUM
app01-4966	18	2	6	6	NUM
app01-4966	18	3	3li	3li	ADJ
app01-4966	18	4	+1	+1	ADJ
app01-4966	18	5	0	0	PUNCT
app01-4966	18	6	n	n	CCONJ
app01-4966	18	7	−→3	−→3	NOUN
app01-4966	18	8	1	1	NUM
app01-4966	18	9	t	t	NOUN
app01-4966	18	10	+4	+4	PROPN
app01-4966	18	11	2	2	NUM
app01-4966	18	12	he	he	PRON
app01-4966	18	13	.	.	PUNCT
app01-4966	19	1	(	(	PUNCT
app01-4966	19	2	1	1	X
app01-4966	19	3	)	)	PUNCT
app01-4966	19	4	abundance	abundance	NOUN
app01-4966	19	5	of	of	ADP
app01-4966	19	6	deuterium	deuterium	NOUN
app01-4966	19	7	and	and	CCONJ
app01-4966	19	8	lithium	lithium	NOUN
app01-4966	19	9	is	be	AUX
app01-4966	19	10	sufficient	sufficient	ADJ
app01-4966	19	11	for	for	ADP
app01-4966	19	12	thousands	thousand	NOUN
app01-4966	19	13	of	of	ADP
app01-4966	19	14	years	year	NOUN
app01-4966	19	15	,	,	PUNCT
app01-4966	19	16	tritium	tritium	NOUN
app01-4966	19	17	will	will	AUX
app01-4966	19	18	be	be	AUX
app01-4966	19	19	produced	produce	VERB
app01-4966	19	20	in	in	ADP
app01-4966	19	21	-	-	PUNCT
app01-4966	19	22	situ	situ	NOUN
app01-4966	19	23	.	.	PUNCT
app01-4966	20	1	emissions	emission	NOUN
app01-4966	20	2	consist	consist	VERB
app01-4966	20	3	only	only	ADV
app01-4966	20	4	of	of	ADP
app01-4966	20	5	harmless	harmless	ADJ
app01-4966	20	6	helium	helium	NOUN
app01-4966	20	7	,	,	PUNCT
app01-4966	20	8	operational	operational	ADJ
app01-4966	20	9	hazards	hazard	NOUN
app01-4966	20	10	do	do	AUX
app01-4966	20	11	not	not	PART
app01-4966	20	12	involve	involve	VERB
app01-4966	20	13	risk	risk	NOUN
app01-4966	20	14	of	of	ADP
app01-4966	20	15	uncontrolled	uncontrolled	ADJ
app01-4966	20	16	chain	chain	NOUN
app01-4966	20	17	reaction	reaction	NOUN
app01-4966	20	18	or	or	CCONJ
app01-4966	20	19	major	major	ADJ
app01-4966	20	20	radiation	radiation	NOUN
app01-4966	20	21	leaks	leak	NOUN
app01-4966	20	22	.	.	PUNCT
app01-4966	21	1	however	however	ADV
app01-4966	21	2	,	,	PUNCT
app01-4966	21	3	enormous	enormous	ADJ
app01-4966	21	4	complexity	complexity	NOUN
app01-4966	21	5	and	and	CCONJ
app01-4966	21	6	demands	demand	NOUN
app01-4966	21	7	(	(	PUNCT
app01-4966	21	8	technological	technological	ADJ
app01-4966	21	9	,	,	PUNCT
app01-4966	21	10	as	as	ADV
app01-4966	21	11	well	well	ADV
app01-4966	21	12	as	as	ADP
app01-4966	21	13	economical	economical	ADJ
app01-4966	21	14	)	)	PUNCT
app01-4966	21	15	on	on	ADP
app01-4966	21	16	the	the	DET
app01-4966	21	17	fusion	fusion	NOUN
app01-4966	21	18	facilities	facility	NOUN
app01-4966	21	19	have	have	AUX
app01-4966	21	20	delayed	delay	VERB
app01-4966	21	21	the	the	DET
app01-4966	21	22	harnessing	harnessing	NOUN
app01-4966	21	23	of	of	ADP
app01-4966	21	24	thermonuclear	thermonuclear	NOUN
app01-4966	21	25	fusion	fusion	NOUN
app01-4966	21	26	.	.	PUNCT
app01-4966	22	1	joint	joint	ADJ
app01-4966	22	2	international	international	ADJ
app01-4966	22	3	effort	effort	NOUN
app01-4966	22	4	resulted	result	VERB
app01-4966	22	5	in	in	ADP
app01-4966	22	6	the	the	DET
app01-4966	22	7	construction	construction	NOUN
app01-4966	22	8	of	of	ADP
app01-4966	22	9	international	international	ADJ
app01-4966	22	10	thermonuclear	thermonuclear	ADJ
app01-4966	22	11	experimental	experimental	ADJ
app01-4966	22	12	reactor	reactor	NOUN
app01-4966	22	13	(	(	PUNCT
app01-4966	22	14	iter	iter	NOUN
app01-4966	22	15	)	)	PUNCT
app01-4966	22	16	that	that	PRON
app01-4966	22	17	should	should	AUX
app01-4966	22	18	demonstrate	demonstrate	VERB
app01-4966	22	19	the	the	DET
app01-4966	22	20	feasibility	feasibility	NOUN
app01-4966	22	21	of	of	ADP
app01-4966	22	22	fusion	fusion	NOUN
app01-4966	22	23	and	and	CCONJ
app01-4966	22	24	test	test	VERB
app01-4966	22	25	the	the	DET
app01-4966	22	26	neccessary	neccessary	ADJ
app01-4966	22	27	systems	system	NOUN
app01-4966	22	28	for	for	ADP
app01-4966	22	29	future	future	ADJ
app01-4966	22	30	fusion	fusion	NOUN
app01-4966	22	31	power	power	NOUN
app01-4966	22	32	plants	plant	NOUN
app01-4966	22	33	.	.	PUNCT
app01-4966	23	1	permeation	permeation	NOUN
app01-4966	23	2	barriers	barrier	NOUN
app01-4966	23	3	are	be	AUX
app01-4966	23	4	one	one	NUM
app01-4966	23	5	of	of	ADP
app01-4966	23	6	the	the	DET
app01-4966	23	7	most	most	ADV
app01-4966	23	8	important	important	ADJ
app01-4966	23	9	parts	part	NOUN
app01-4966	23	10	of	of	ADP
app01-4966	23	11	fusion	fusion	NOUN
app01-4966	23	12	facility	facility	NOUN
app01-4966	23	13	concerning	concern	VERB
app01-4966	23	14	radiological	radiological	ADJ
app01-4966	23	15	safety	safety	NOUN
app01-4966	23	16	and	and	CCONJ
app01-4966	23	17	economical	economical	ADJ
app01-4966	23	18	issues	issue	NOUN
app01-4966	23	19	.	.	PUNCT
app01-4966	24	1	these	these	PRON
app01-4966	24	2	are	be	AUX
app01-4966	24	3	typically	typically	ADV
app01-4966	24	4	thin	thin	ADJ
app01-4966	24	5	coatings	coating	NOUN
app01-4966	24	6	that	that	PRON
app01-4966	24	7	lower	lower	VERB
app01-4966	24	8	the	the	DET
app01-4966	24	9	permeation	permeation	NOUN
app01-4966	24	10	and	and	CCONJ
app01-4966	24	11	retention	retention	NOUN
app01-4966	24	12	of	of	ADP
app01-4966	24	13	hydrogen	hydrogen	NOUN
app01-4966	24	14	isotopes	isotope	NOUN
app01-4966	24	15	(	(	PUNCT
app01-4966	24	16	mainly	mainly	ADV
app01-4966	24	17	tritium	tritium	NOUN
app01-4966	24	18	)	)	PUNCT
app01-4966	24	19	in	in	ADP
app01-4966	24	20	the	the	DET
app01-4966	24	21	reactor	reactor	NOUN
app01-4966	24	22	structures	structure	NOUN
app01-4966	24	23	.	.	PUNCT
app01-4966	25	1	selected	select	VERB
app01-4966	25	2	materials	material	NOUN
app01-4966	25	3	have	have	VERB
app01-4966	25	4	to	to	PART
app01-4966	25	5	withstand	withstand	VERB
app01-4966	25	6	harsh	harsh	ADJ
app01-4966	25	7	reactor	reactor	NOUN
app01-4966	25	8	conditions	condition	NOUN
app01-4966	25	9	,	,	PUNCT
app01-4966	25	10	including	include	VERB
app01-4966	25	11	•	•	NUM
app01-4966	25	12	strong	strong	ADJ
app01-4966	25	13	thermal	thermal	ADJ
app01-4966	25	14	gradients	gradient	NOUN
app01-4966	25	15	and	and	CCONJ
app01-4966	25	16	elevated	elevated	ADJ
app01-4966	25	17	temperatures	temperature	NOUN
app01-4966	26	1	•	•	NOUN
app01-4966	26	2	presence	presence	NOUN
app01-4966	26	3	of	of	ADP
app01-4966	26	4	significant	significant	ADJ
app01-4966	26	5	neutron	neutron	NOUN
app01-4966	26	6	and	and	CCONJ
app01-4966	26	7	secondary	secondary	ADJ
app01-4966	26	8	charged	charge	VERB
app01-4966	26	9	particle	particle	NOUN
app01-4966	26	10	irradiation	irradiation	NOUN
app01-4966	26	11	•	•	NOUN
app01-4966	26	12	potential	potential	ADJ
app01-4966	26	13	contact	contact	NOUN
app01-4966	26	14	with	with	ADP
app01-4966	26	15	high	high	ADJ
app01-4966	26	16	temperature	temperature	NOUN
app01-4966	26	17	pbli	pbli	NOUN
app01-4966	26	18	(	(	PUNCT
app01-4966	26	19	corrosion	corrosion	NOUN
app01-4966	26	20	issues	issue	NOUN
app01-4966	26	21	)	)	PUNCT
app01-4966	26	22	depending	depend	VERB
app01-4966	26	23	on	on	ADP
app01-4966	26	24	the	the	DET
app01-4966	26	25	reactor	reactor	NOUN
app01-4966	26	26	design	design	NOUN
app01-4966	26	27	(	(	PUNCT
app01-4966	26	28	further	further	ADJ
app01-4966	26	29	information	information	NOUN
app01-4966	26	30	to	to	PART
app01-4966	26	31	be	be	AUX
app01-4966	26	32	found	find	VERB
app01-4966	26	33	in	in	ADP
app01-4966	26	34	[	[	X
app01-4966	26	35	1	1	NUM
app01-4966	26	36	]	]	PUNCT
app01-4966	26	37	)	)	PUNCT
app01-4966	26	38	excessive	excessive	ADJ
app01-4966	26	39	tritium	tritium	NOUN
app01-4966	26	40	permeation	permeation	NOUN
app01-4966	26	41	could	could	AUX
app01-4966	26	42	result	result	VERB
app01-4966	26	43	in	in	ADP
app01-4966	26	44	•	•	ADJ
app01-4966	26	45	degradation	degradation	NOUN
app01-4966	26	46	of	of	ADP
app01-4966	26	47	the	the	DET
app01-4966	26	48	reactor	reactor	NOUN
app01-4966	26	49	material	material	NOUN
app01-4966	26	50	properties	property	NOUN
app01-4966	26	51	•	•	ADP
app01-4966	26	52	radiological	radiological	ADJ
app01-4966	26	53	hazard	hazard	NOUN
app01-4966	26	54	during	during	ADP
app01-4966	26	55	operation	operation	NOUN
app01-4966	26	56	and	and	CCONJ
app01-4966	26	57	decommisioning	decommisione	VERB
app01-4966	26	58	•	•	NOUN
app01-4966	26	59	lowering	lowering	NOUN
app01-4966	26	60	of	of	ADP
app01-4966	26	61	the	the	DET
app01-4966	26	62	reaction	reaction	NOUN
app01-4966	26	63	probability	probability	NOUN
app01-4966	26	64	and	and	CCONJ
app01-4966	26	65	economical	economical	ADJ
app01-4966	26	66	losses	loss	NOUN
app01-4966	26	67	therefore	therefore	ADV
app01-4966	26	68	,	,	PUNCT
app01-4966	26	69	the	the	DET
app01-4966	26	70	presence	presence	NOUN
app01-4966	26	71	of	of	ADP
app01-4966	26	72	a	a	DET
app01-4966	26	73	permeation	permeation	NOUN
app01-4966	26	74	barrier	barrier	NOUN
app01-4966	26	75	is	be	AUX
app01-4966	26	76	envisaged	envisage	VERB
app01-4966	26	77	by	by	ADP
app01-4966	26	78	numerous	numerous	ADJ
app01-4966	26	79	studies	study	NOUN
app01-4966	26	80	[	[	X
app01-4966	26	81	2–4	2–4	X
app01-4966	26	82	]	]	X
app01-4966	26	83	to	to	PART
app01-4966	26	84	meet	meet	VERB
app01-4966	26	85	the	the	DET
app01-4966	26	86	safety	safety	NOUN
app01-4966	26	87	24	24	NUM
app01-4966	26	88	http://dx.doi.org/10.14311/app.2018.17.0024	http://dx.doi.org/10.14311/app.2018.17.0024	NOUN
app01-4966	26	89	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-4966	26	90	vol	vol	NOUN
app01-4966	26	91	.	.	PUNCT
app01-4966	27	1	17/2018	17/2018	NUM
app01-4966	27	2	thin	thin	ADJ
app01-4966	27	3	nitride	nitride	ADJ
app01-4966	27	4	layers	layer	NOUN
app01-4966	27	5	as	as	ADP
app01-4966	27	6	permeation	permeation	NOUN
app01-4966	27	7	barriers	barrier	NOUN
app01-4966	27	8	requirements	requirement	NOUN
app01-4966	27	9	of	of	ADP
app01-4966	27	10	maximum	maximum	ADJ
app01-4966	27	11	allowable	allowable	ADJ
app01-4966	27	12	tritium	tritium	NOUN
app01-4966	27	13	losses	loss	NOUN
app01-4966	27	14	(	(	PUNCT
app01-4966	27	15	1	1	NUM
app01-4966	27	16	g	g	NOUN
app01-4966	27	17	per	per	ADP
app01-4966	27	18	year	year	NOUN
app01-4966	27	19	)	)	PUNCT
app01-4966	27	20	and	and	CCONJ
app01-4966	27	21	maximum	maximum	ADJ
app01-4966	27	22	tritium	tritium	NOUN
app01-4966	27	23	inventory	inventory	NOUN
app01-4966	27	24	(	(	PUNCT
app01-4966	27	25	200	200	NUM
app01-4966	27	26	g	g	NOUN
app01-4966	27	27	)	)	PUNCT
app01-4966	28	1	[	[	X
app01-4966	28	2	1	1	NUM
app01-4966	28	3	]	]	PUNCT
app01-4966	28	4	.	.	PUNCT
app01-4966	29	1	permeation	permeation	NOUN
app01-4966	29	2	barriers	barrier	NOUN
app01-4966	29	3	are	be	AUX
app01-4966	29	4	also	also	ADV
app01-4966	29	5	essential	essential	ADJ
app01-4966	29	6	for	for	ADP
app01-4966	29	7	early	early	ADJ
app01-4966	29	8	and	and	CCONJ
app01-4966	29	9	safe	safe	ADJ
app01-4966	29	10	decommissioning	decommissioning	NOUN
app01-4966	29	11	of	of	ADP
app01-4966	29	12	fusion	fusion	NOUN
app01-4966	29	13	facilities	facility	NOUN
app01-4966	29	14	after	after	ADP
app01-4966	29	15	their	their	PRON
app01-4966	29	16	shutdown	shutdown	NOUN
app01-4966	29	17	.	.	PUNCT
app01-4966	30	1	besides	besides	SCONJ
app01-4966	30	2	reducing	reduce	VERB
app01-4966	30	3	the	the	DET
app01-4966	30	4	permeation	permeation	NOUN
app01-4966	30	5	through	through	ADP
app01-4966	30	6	metallic	metallic	ADJ
app01-4966	30	7	structures	structure	NOUN
app01-4966	30	8	,	,	PUNCT
app01-4966	30	9	typically	typically	ADV
app01-4966	30	10	easily	easily	ADV
app01-4966	30	11	permeable	permeable	ADJ
app01-4966	30	12	by	by	ADP
app01-4966	30	13	hydrogen	hydrogen	NOUN
app01-4966	30	14	isotopes	isotope	NOUN
app01-4966	30	15	,	,	PUNCT
app01-4966	30	16	other	other	ADJ
app01-4966	30	17	material	material	NOUN
app01-4966	30	18	and	and	CCONJ
app01-4966	30	19	deposition	deposition	NOUN
app01-4966	30	20	properties	property	NOUN
app01-4966	30	21	of	of	ADP
app01-4966	30	22	the	the	DET
app01-4966	30	23	permeation	permeation	NOUN
app01-4966	30	24	barriers	barrier	NOUN
app01-4966	30	25	have	have	VERB
app01-4966	30	26	to	to	PART
app01-4966	30	27	be	be	AUX
app01-4966	30	28	taken	take	VERB
app01-4966	30	29	into	into	ADP
app01-4966	30	30	account	account	NOUN
app01-4966	30	31	:	:	PUNCT
app01-4966	30	32	•	•	ADP
app01-4966	30	33	stability	stability	NOUN
app01-4966	30	34	and	and	CCONJ
app01-4966	30	35	reliability	reliability	NOUN
app01-4966	30	36	of	of	ADP
app01-4966	30	37	the	the	DET
app01-4966	30	38	coating	coating	NOUN
app01-4966	30	39	(	(	PUNCT
app01-4966	30	40	regarding	regard	VERB
app01-4966	30	41	the	the	DET
app01-4966	30	42	abovementioned	abovementioned	ADJ
app01-4966	30	43	conditions	condition	NOUN
app01-4966	30	44	)	)	PUNCT
app01-4966	30	45	•	•	ADP
app01-4966	30	46	compatibility	compatibility	NOUN
app01-4966	30	47	with	with	ADP
app01-4966	30	48	the	the	DET
app01-4966	30	49	substrate	substrate	NOUN
app01-4966	30	50	material	material	NOUN
app01-4966	30	51	•	•	NOUN
app01-4966	30	52	capability	capability	NOUN
app01-4966	30	53	to	to	PART
app01-4966	30	54	form	form	VERB
app01-4966	30	55	dense	dense	ADJ
app01-4966	30	56	and	and	CCONJ
app01-4966	30	57	defect	defect	NOUN
app01-4966	30	58	-	-	PUNCT
app01-4966	30	59	free	free	ADJ
app01-4966	30	60	layers	layer	NOUN
app01-4966	30	61	on	on	ADP
app01-4966	30	62	complex	complex	ADJ
app01-4966	30	63	surfaces	surface	NOUN
app01-4966	30	64	regarding	regard	VERB
app01-4966	30	65	the	the	DET
app01-4966	30	66	coating	coat	VERB
app01-4966	30	67	stability	stability	NOUN
app01-4966	30	68	in	in	ADP
app01-4966	30	69	corrosive	corrosive	ADJ
app01-4966	30	70	environment	environment	NOUN
app01-4966	30	71	,	,	PUNCT
app01-4966	30	72	some	some	DET
app01-4966	30	73	studies	study	NOUN
app01-4966	30	74	show	show	VERB
app01-4966	30	75	that	that	SCONJ
app01-4966	30	76	,	,	PUNCT
app01-4966	30	77	depending	depend	VERB
app01-4966	30	78	on	on	ADP
app01-4966	30	79	the	the	DET
app01-4966	30	80	coolant	coolant	NOUN
app01-4966	30	81	and	and	CCONJ
app01-4966	30	82	tritium	tritium	NOUN
app01-4966	30	83	breeder	breeder	NOUN
app01-4966	30	84	choice	choice	NOUN
app01-4966	30	85	,	,	PUNCT
app01-4966	30	86	fusion	fusion	NOUN
app01-4966	30	87	facility	facility	NOUN
app01-4966	30	88	components	component	NOUN
app01-4966	30	89	can	can	AUX
app01-4966	30	90	be	be	AUX
app01-4966	30	91	subjected	subject	VERB
app01-4966	30	92	to	to	ADP
app01-4966	30	93	corrosion	corrosion	NOUN
app01-4966	30	94	attack	attack	NOUN
app01-4966	30	95	up	up	ADP
app01-4966	30	96	to	to	ADP
app01-4966	30	97	700	700	NUM
app01-4966	30	98	µm	µm	NOUN
app01-4966	30	99	per	per	ADP
app01-4966	30	100	year	year	NOUN
app01-4966	30	101	,	,	PUNCT
app01-4966	30	102	equal	equal	ADJ
app01-4966	30	103	to	to	ADP
app01-4966	30	104	4	4	NUM
app01-4966	30	105	kg	kg	NOUN
app01-4966	30	106	of	of	ADP
app01-4966	30	107	dissolved	dissolve	VERB
app01-4966	30	108	material	material	NOUN
app01-4966	30	109	per	per	ADP
app01-4966	30	110	year	year	NOUN
app01-4966	30	111	and	and	CCONJ
app01-4966	30	112	square	square	ADJ
app01-4966	30	113	meter	meter	NOUN
app01-4966	31	1	[	[	X
app01-4966	31	2	5–7	5–7	X
app01-4966	31	3	]	]	X
app01-4966	31	4	.	.	PUNCT
app01-4966	32	1	that	that	PRON
app01-4966	32	2	would	would	AUX
app01-4966	32	3	pose	pose	VERB
app01-4966	32	4	a	a	DET
app01-4966	32	5	significant	significant	ADJ
app01-4966	32	6	risk	risk	NOUN
app01-4966	32	7	to	to	ADP
app01-4966	32	8	the	the	DET
app01-4966	32	9	structural	structural	ADJ
app01-4966	32	10	integrity	integrity	NOUN
app01-4966	32	11	and	and	CCONJ
app01-4966	32	12	operational	operational	ADJ
app01-4966	32	13	reliability	reliability	NOUN
app01-4966	32	14	of	of	ADP
app01-4966	32	15	the	the	DET
app01-4966	32	16	facility	facility	NOUN
app01-4966	32	17	.	.	PUNCT
app01-4966	33	1	parts	part	NOUN
app01-4966	33	2	subjected	subject	VERB
app01-4966	33	3	to	to	ADP
app01-4966	33	4	the	the	DET
app01-4966	33	5	corrosion	corrosion	NOUN
app01-4966	33	6	attack	attack	NOUN
app01-4966	33	7	are	be	AUX
app01-4966	33	8	in	in	ADP
app01-4966	33	9	most	most	ADJ
app01-4966	33	10	cases	case	NOUN
app01-4966	33	11	also	also	ADV
app01-4966	33	12	threatened	threaten	VERB
app01-4966	33	13	by	by	ADP
app01-4966	33	14	tritium	tritium	NOUN
app01-4966	33	15	permeation	permeation	NOUN
app01-4966	33	16	,	,	PUNCT
app01-4966	33	17	therefore	therefore	ADV
app01-4966	33	18	the	the	DET
app01-4966	33	19	prospective	prospective	ADJ
app01-4966	33	20	coating	coating	NOUN
app01-4966	33	21	ought	ought	AUX
app01-4966	33	22	to	to	PART
app01-4966	33	23	suppress	suppress	VERB
app01-4966	33	24	both	both	DET
app01-4966	33	25	phenomena	phenomenon	NOUN
app01-4966	33	26	to	to	ADP
app01-4966	33	27	a	a	DET
app01-4966	33	28	high	high	ADJ
app01-4966	33	29	extent	extent	NOUN
app01-4966	33	30	.	.	PUNCT
app01-4966	34	1	as	as	SCONJ
app01-4966	34	2	candidate	candidate	NOUN
app01-4966	34	3	materials	material	NOUN
app01-4966	34	4	for	for	ADP
app01-4966	34	5	the	the	DET
app01-4966	34	6	permeation	permeation	NOUN
app01-4966	34	7	barriers	barrier	NOUN
app01-4966	34	8	,	,	PUNCT
app01-4966	34	9	commonly	commonly	ADV
app01-4966	34	10	oxidic	oxidic	ADJ
app01-4966	34	11	ceramics	ceramic	NOUN
app01-4966	34	12	[	[	X
app01-4966	34	13	2	2	NUM
app01-4966	34	14	,	,	PUNCT
app01-4966	34	15	8	8	NUM
app01-4966	34	16	]	]	PUNCT
app01-4966	34	17	or	or	CCONJ
app01-4966	34	18	nitrides	nitride	NOUN
app01-4966	34	19	[	[	X
app01-4966	34	20	9	9	NUM
app01-4966	34	21	,	,	PUNCT
app01-4966	34	22	10	10	NUM
app01-4966	34	23	]	]	PUNCT
app01-4966	34	24	are	be	AUX
app01-4966	34	25	being	be	AUX
app01-4966	34	26	studied	study	VERB
app01-4966	34	27	.	.	PUNCT
app01-4966	35	1	this	this	DET
app01-4966	35	2	study	study	NOUN
app01-4966	35	3	is	be	AUX
app01-4966	35	4	focused	focus	VERB
app01-4966	35	5	on	on	ADP
app01-4966	35	6	diffusion	diffusion	NOUN
app01-4966	35	7	-	-	PUNCT
app01-4966	35	8	based	base	VERB
app01-4966	35	9	nitride	nitride	ADJ
app01-4966	35	10	layers	layer	NOUN
app01-4966	35	11	,	,	PUNCT
app01-4966	35	12	whose	whose	DET
app01-4966	35	13	advantage	advantage	NOUN
app01-4966	35	14	lies	lie	VERB
app01-4966	35	15	in	in	ADP
app01-4966	35	16	the	the	DET
app01-4966	35	17	applicability	applicability	NOUN
app01-4966	35	18	on	on	ADP
app01-4966	35	19	large	large	ADJ
app01-4966	35	20	complex	complex	ADJ
app01-4966	35	21	surfaces	surface	NOUN
app01-4966	35	22	,	,	PUNCT
app01-4966	35	23	including	include	VERB
app01-4966	35	24	for	for	ADP
app01-4966	35	25	example	example	NOUN
app01-4966	35	26	the	the	DET
app01-4966	35	27	inside	inside	NOUN
app01-4966	35	28	of	of	ADP
app01-4966	35	29	coolant	coolant	NOUN
app01-4966	35	30	tubes	tube	NOUN
app01-4966	35	31	[	[	X
app01-4966	35	32	11	11	NUM
app01-4966	35	33	,	,	PUNCT
app01-4966	35	34	12	12	NUM
app01-4966	35	35	]	]	PUNCT
app01-4966	35	36	.	.	PUNCT
app01-4966	36	1	such	such	ADJ
app01-4966	36	2	nitride	nitride	ADJ
app01-4966	36	3	layers	layer	NOUN
app01-4966	36	4	are	be	AUX
app01-4966	36	5	qualitatively	qualitatively	ADV
app01-4966	36	6	compared	compare	VERB
app01-4966	36	7	to	to	ADP
app01-4966	36	8	thin	thin	ADJ
app01-4966	36	9	coatings	coating	NOUN
app01-4966	36	10	prepared	prepare	VERB
app01-4966	36	11	by	by	ADP
app01-4966	36	12	physical	physical	ADJ
app01-4966	36	13	vapour	vapour	NOUN
app01-4966	36	14	deposition	deposition	NOUN
app01-4966	36	15	(	(	PUNCT
app01-4966	36	16	pvd	pvd	PROPN
app01-4966	36	17	)	)	PUNCT
app01-4966	36	18	,	,	PUNCT
app01-4966	36	19	which	which	PRON
app01-4966	36	20	is	be	AUX
app01-4966	36	21	an	an	DET
app01-4966	36	22	established	establish	VERB
app01-4966	36	23	technology	technology	NOUN
app01-4966	36	24	for	for	ADP
app01-4966	36	25	the	the	DET
app01-4966	36	26	production	production	NOUN
app01-4966	36	27	of	of	ADP
app01-4966	36	28	thin	thin	ADJ
app01-4966	36	29	and	and	CCONJ
app01-4966	36	30	dense	dense	ADJ
app01-4966	36	31	coatings	coating	NOUN
app01-4966	36	32	.	.	PUNCT
app01-4966	37	1	on	on	ADP
app01-4966	37	2	an	an	DET
app01-4966	37	3	industrial	industrial	ADJ
app01-4966	37	4	scale	scale	NOUN
app01-4966	37	5	,	,	PUNCT
app01-4966	37	6	large	large	ADJ
app01-4966	37	7	surface	surface	NOUN
app01-4966	37	8	areas	area	NOUN
app01-4966	37	9	can	can	AUX
app01-4966	37	10	be	be	AUX
app01-4966	37	11	coated	coat	VERB
app01-4966	37	12	,	,	PUNCT
app01-4966	37	13	including	include	VERB
app01-4966	37	14	curved	curved	ADJ
app01-4966	37	15	surfaces	surface	NOUN
app01-4966	37	16	,	,	PUNCT
app01-4966	37	17	but	but	CCONJ
app01-4966	37	18	still	still	ADV
app01-4966	37	19	it	it	PRON
app01-4966	37	20	is	be	AUX
app01-4966	37	21	primarily	primarily	ADV
app01-4966	37	22	a	a	DET
app01-4966	37	23	line	line	NOUN
app01-4966	37	24	-	-	PUNCT
app01-4966	37	25	of	of	ADP
app01-4966	37	26	-	-	PUNCT
app01-4966	37	27	sight	sight	NOUN
app01-4966	37	28	coating	coating	NOUN
app01-4966	37	29	technology	technology	NOUN
app01-4966	37	30	.	.	PUNCT
app01-4966	38	1	nitriding	nitride	VERB
app01-4966	38	2	is	be	AUX
app01-4966	38	3	a	a	DET
app01-4966	38	4	thermochemical	thermochemical	ADJ
app01-4966	38	5	treatment	treatment	NOUN
app01-4966	38	6	that	that	PRON
app01-4966	38	7	consists	consist	VERB
app01-4966	38	8	of	of	ADP
app01-4966	38	9	the	the	DET
app01-4966	38	10	introduction	introduction	NOUN
app01-4966	38	11	of	of	ADP
app01-4966	38	12	nitrogen	nitrogen	NOUN
app01-4966	38	13	into	into	ADP
app01-4966	38	14	metallic	metallic	ADJ
app01-4966	38	15	material	material	NOUN
app01-4966	38	16	.	.	PUNCT
app01-4966	39	1	according	accord	VERB
app01-4966	39	2	to	to	ADP
app01-4966	39	3	the	the	DET
app01-4966	39	4	method	method	NOUN
app01-4966	39	5	of	of	ADP
app01-4966	39	6	nitrogen	nitrogen	NOUN
app01-4966	39	7	introduction	introduction	NOUN
app01-4966	39	8	,	,	PUNCT
app01-4966	39	9	several	several	ADJ
app01-4966	39	10	nitriding	nitride	VERB
app01-4966	39	11	techniques	technique	NOUN
app01-4966	39	12	are	be	AUX
app01-4966	39	13	being	be	AUX
app01-4966	39	14	distinguished	distinguish	VERB
app01-4966	39	15	:	:	PUNCT
app01-4966	39	16	•	•	PUNCT
app01-4966	39	17	gas	gas	NOUN
app01-4966	39	18	nitriding	nitride	VERB
app01-4966	39	19	•	•	NUM
app01-4966	39	20	plasma	plasma	NOUN
app01-4966	39	21	/	/	SYM
app01-4966	39	22	ion	ion	NOUN
app01-4966	39	23	nitriding	nitride	VERB
app01-4966	39	24	•	•	ADP
app01-4966	39	25	solid	solid	ADJ
app01-4966	39	26	/	/	SYM
app01-4966	39	27	liquid	liquid	ADJ
app01-4966	39	28	nitriding	nitride	VERB
app01-4966	39	29	gas	gas	NOUN
app01-4966	39	30	nitriding	nitride	VERB
app01-4966	39	31	[	[	PUNCT
app01-4966	39	32	13	13	NUM
app01-4966	39	33	]	]	PUNCT
app01-4966	39	34	is	be	AUX
app01-4966	39	35	conducted	conduct	VERB
app01-4966	39	36	at	at	ADP
app01-4966	39	37	elevated	elevated	ADJ
app01-4966	39	38	temperature	temperature	NOUN
app01-4966	39	39	,	,	PUNCT
app01-4966	39	40	submitting	submit	VERB
app01-4966	39	41	the	the	DET
app01-4966	39	42	samples	sample	NOUN
app01-4966	39	43	to	to	ADP
app01-4966	39	44	nitrogen	nitrogen	NOUN
app01-4966	39	45	-	-	PUNCT
app01-4966	39	46	containing	contain	VERB
app01-4966	39	47	atmosphere	atmosphere	NOUN
app01-4966	39	48	,	,	PUNCT
app01-4966	39	49	commonly	commonly	ADV
app01-4966	39	50	ammonia	ammonia	NOUN
app01-4966	39	51	or	or	CCONJ
app01-4966	39	52	various	various	ADJ
app01-4966	39	53	nitrogen	nitrogen	NOUN
app01-4966	39	54	mixtures	mixture	NOUN
app01-4966	39	55	,	,	PUNCT
app01-4966	39	56	e.g.	e.g.	ADV
app01-4966	39	57	h2	h2	NOUN
app01-4966	39	58	and	and	CCONJ
app01-4966	39	59	n2	n2	NOUN
app01-4966	39	60	;	;	PUNCT
app01-4966	39	61	n2	n2	ADJ
app01-4966	39	62	,	,	PUNCT
app01-4966	39	63	nh3	nh3	NOUN
app01-4966	39	64	and	and	CCONJ
app01-4966	39	65	co2	co2	NOUN
app01-4966	39	66	etc	etc	X
app01-4966	39	67	.	.	X
app01-4966	39	68	ion	ion	NOUN
app01-4966	39	69	/	/	SYM
app01-4966	39	70	plasma	plasma	NOUN
app01-4966	40	1	[	[	X
app01-4966	40	2	14	14	NUM
app01-4966	40	3	]	]	X
app01-4966	40	4	nitriding	nitriding	NOUN
app01-4966	40	5	uses	use	VERB
app01-4966	40	6	a	a	DET
app01-4966	40	7	glow	glow	ADJ
app01-4966	40	8	discharge	discharge	NOUN
app01-4966	40	9	to	to	PART
app01-4966	40	10	introduce	introduce	VERB
app01-4966	40	11	nitrogen	nitrogen	NOUN
app01-4966	40	12	into	into	ADP
app01-4966	40	13	the	the	DET
app01-4966	40	14	material	material	NOUN
app01-4966	40	15	;	;	PUNCT
app01-4966	40	16	nitrogen	nitrogen	NOUN
app01-4966	40	17	ions	ion	NOUN
app01-4966	40	18	are	be	AUX
app01-4966	40	19	accelerated	accelerate	VERB
app01-4966	40	20	and	and	CCONJ
app01-4966	40	21	impinge	impinge	VERB
app01-4966	40	22	the	the	DET
app01-4966	40	23	surface	surface	NOUN
app01-4966	40	24	.	.	PUNCT
app01-4966	41	1	during	during	ADP
app01-4966	41	2	solid	solid	ADJ
app01-4966	41	3	nitriding	nitriding	ADJ
app01-4966	41	4	[	[	X
app01-4966	41	5	15	15	NUM
app01-4966	41	6	]	]	PUNCT
app01-4966	41	7	,	,	PUNCT
app01-4966	41	8	granulate	granulate	VERB
app01-4966	41	9	containing	contain	VERB
app01-4966	41	10	nitrogen	nitrogen	NOUN
app01-4966	41	11	compound	compound	NOUN
app01-4966	41	12	is	be	AUX
app01-4966	41	13	used	use	VERB
app01-4966	41	14	e.g.	e.g.	ADV
app01-4966	41	15	fe4kcn	fe4kcn	PROPN
app01-4966	41	16	.	.	PUNCT
app01-4966	42	1	the	the	DET
app01-4966	42	2	samples	sample	NOUN
app01-4966	42	3	are	be	AUX
app01-4966	42	4	surrounded	surround	VERB
app01-4966	42	5	by	by	ADP
app01-4966	42	6	granulate	granulate	NOUN
app01-4966	42	7	and	and	CCONJ
app01-4966	42	8	placed	place	VERB
app01-4966	42	9	into	into	ADP
app01-4966	42	10	heating	heating	NOUN
app01-4966	42	11	oven	oven	NOUN
app01-4966	42	12	for	for	ADP
app01-4966	42	13	enhancing	enhance	VERB
app01-4966	42	14	the	the	DET
app01-4966	42	15	diffusion	diffusion	NOUN
app01-4966	42	16	.	.	PUNCT
app01-4966	43	1	gas	gas	NOUN
app01-4966	43	2	and	and	CCONJ
app01-4966	43	3	plasma	plasma	NOUN
app01-4966	43	4	nitriding	nitride	VERB
app01-4966	43	5	are	be	AUX
app01-4966	43	6	well	well	ADV
app01-4966	43	7	established	establish	VERB
app01-4966	43	8	and	and	CCONJ
app01-4966	43	9	widely	widely	ADV
app01-4966	43	10	used	use	VERB
app01-4966	43	11	and	and	CCONJ
app01-4966	43	12	researched	research	VERB
app01-4966	43	13	techniques	technique	NOUN
app01-4966	43	14	,	,	PUNCT
app01-4966	43	15	however	however	ADV
app01-4966	43	16	the	the	DET
app01-4966	43	17	required	require	VERB
app01-4966	43	18	facility	facility	NOUN
app01-4966	43	19	is	be	AUX
app01-4966	43	20	complicated	complicate	VERB
app01-4966	43	21	.	.	PUNCT
app01-4966	44	1	during	during	ADP
app01-4966	44	2	gas	gas	NOUN
app01-4966	44	3	nitriding	nitriding	NOUN
app01-4966	44	4	,	,	PUNCT
app01-4966	44	5	the	the	DET
app01-4966	44	6	process	process	NOUN
app01-4966	44	7	temperature	temperature	NOUN
app01-4966	44	8	may	may	AUX
app01-4966	44	9	affect	affect	VERB
app01-4966	44	10	the	the	DET
app01-4966	44	11	hardness	hardness	NOUN
app01-4966	44	12	of	of	ADP
app01-4966	44	13	the	the	DET
app01-4966	44	14	nitrided	nitride	VERB
app01-4966	44	15	material	material	NOUN
app01-4966	44	16	.	.	PUNCT
app01-4966	45	1	plasma	plasma	NOUN
app01-4966	45	2	nitriding	nitride	VERB
app01-4966	45	3	is	be	AUX
app01-4966	45	4	faster	fast	ADJ
app01-4966	45	5	than	than	ADP
app01-4966	45	6	conventional	conventional	ADJ
app01-4966	45	7	gas	gas	NOUN
app01-4966	45	8	nitriding	nitride	VERB
app01-4966	45	9	and	and	CCONJ
app01-4966	45	10	provides	provide	VERB
app01-4966	45	11	for	for	ADP
app01-4966	45	12	a	a	DET
app01-4966	45	13	better	well	ADJ
app01-4966	45	14	control	control	NOUN
app01-4966	45	15	of	of	ADP
app01-4966	45	16	the	the	DET
app01-4966	45	17	treatment	treatment	NOUN
app01-4966	45	18	parameters	parameter	NOUN
app01-4966	45	19	.	.	PUNCT
app01-4966	46	1	this	this	PRON
app01-4966	46	2	allows	allow	VERB
app01-4966	46	3	the	the	DET
app01-4966	46	4	control	control	NOUN
app01-4966	46	5	of	of	ADP
app01-4966	46	6	the	the	DET
app01-4966	46	7	nitrided	nitride	VERB
app01-4966	46	8	layer	layer	NOUN
app01-4966	46	9	microstructure	microstructure	NOUN
app01-4966	46	10	and	and	CCONJ
app01-4966	46	11	also	also	ADV
app01-4966	46	12	enables	enable	VERB
app01-4966	46	13	higher	high	ADJ
app01-4966	46	14	reproducibility	reproducibility	NOUN
app01-4966	46	15	of	of	ADP
app01-4966	46	16	the	the	DET
app01-4966	46	17	results	result	NOUN
app01-4966	46	18	.	.	PUNCT
app01-4966	47	1	solid	solid	ADJ
app01-4966	47	2	nitriding	nitride	VERB
app01-4966	47	3	is	be	AUX
app01-4966	47	4	a	a	DET
app01-4966	47	5	low	low	ADJ
app01-4966	47	6	-	-	PUNCT
app01-4966	47	7	cost	cost	NOUN
app01-4966	47	8	process	process	NOUN
app01-4966	47	9	in	in	ADP
app01-4966	47	10	comparison	comparison	NOUN
app01-4966	47	11	to	to	ADP
app01-4966	47	12	gas	gas	NOUN
app01-4966	47	13	and	and	CCONJ
app01-4966	47	14	plasma	plasma	NOUN
app01-4966	47	15	nitriding	nitride	VERB
app01-4966	47	16	,	,	PUNCT
app01-4966	47	17	when	when	SCONJ
app01-4966	47	18	the	the	DET
app01-4966	47	19	only	only	ADJ
app01-4966	47	20	required	require	VERB
app01-4966	47	21	facility	facility	NOUN
app01-4966	47	22	is	be	AUX
app01-4966	47	23	the	the	DET
app01-4966	47	24	furnace	furnace	NOUN
app01-4966	47	25	providing	provide	VERB
app01-4966	47	26	the	the	DET
app01-4966	47	27	heating	heating	NOUN
app01-4966	47	28	.	.	PUNCT
app01-4966	48	1	the	the	DET
app01-4966	48	2	heating	heating	NOUN
app01-4966	48	3	generates	generate	VERB
app01-4966	48	4	atomic	atomic	ADJ
app01-4966	48	5	nitrogen	nitrogen	NOUN
app01-4966	48	6	that	that	PRON
app01-4966	48	7	is	be	AUX
app01-4966	48	8	able	able	ADJ
app01-4966	48	9	to	to	PART
app01-4966	48	10	diffuse	diffuse	VERB
app01-4966	48	11	into	into	ADP
app01-4966	48	12	the	the	DET
app01-4966	48	13	material	material	NOUN
app01-4966	48	14	.	.	PUNCT
app01-4966	49	1	nitriding	nitride	VERB
app01-4966	49	2	promotes	promote	VERB
app01-4966	49	3	higher	high	ADJ
app01-4966	49	4	hardness	hardness	NOUN
app01-4966	49	5	of	of	ADP
app01-4966	49	6	the	the	DET
app01-4966	49	7	specimen	speciman	NOUN
app01-4966	49	8	,	,	PUNCT
app01-4966	49	9	increases	increase	NOUN
app01-4966	49	10	wear	wear	VERB
app01-4966	49	11	resistance	resistance	NOUN
app01-4966	49	12	,	,	PUNCT
app01-4966	49	13	fatigue	fatigue	NOUN
app01-4966	49	14	resistance	resistance	NOUN
app01-4966	49	15	,	,	PUNCT
app01-4966	49	16	corrosion	corrosion	NOUN
app01-4966	49	17	resistance	resistance	NOUN
app01-4966	49	18	and	and	CCONJ
app01-4966	49	19	,	,	PUNCT
app01-4966	49	20	as	as	SCONJ
app01-4966	49	21	it	it	PRON
app01-4966	49	22	was	be	AUX
app01-4966	49	23	observed	observe	VERB
app01-4966	49	24	,	,	PUNCT
app01-4966	49	25	some	some	DET
app01-4966	49	26	nitrided	nitride	VERB
app01-4966	49	27	materials	material	NOUN
app01-4966	49	28	have	have	VERB
app01-4966	49	29	favourable	favourable	ADJ
app01-4966	49	30	permeation	permeation	NOUN
app01-4966	49	31	properties	property	NOUN
app01-4966	49	32	.	.	PUNCT
app01-4966	50	1	regardless	regardless	ADV
app01-4966	50	2	of	of	ADP
app01-4966	50	3	the	the	DET
app01-4966	50	4	used	use	VERB
app01-4966	50	5	technique	technique	NOUN
app01-4966	50	6	,	,	PUNCT
app01-4966	50	7	surface	surface	NOUN
app01-4966	50	8	cleaning	cleaning	NOUN
app01-4966	50	9	of	of	ADP
app01-4966	50	10	the	the	DET
app01-4966	50	11	samples	sample	NOUN
app01-4966	50	12	is	be	AUX
app01-4966	50	13	vital	vital	ADJ
app01-4966	50	14	,	,	PUNCT
app01-4966	50	15	because	because	SCONJ
app01-4966	50	16	the	the	DET
app01-4966	50	17	contaminants	contaminant	NOUN
app01-4966	50	18	can	can	AUX
app01-4966	50	19	form	form	VERB
app01-4966	50	20	a	a	DET
app01-4966	50	21	barrier	barrier	NOUN
app01-4966	50	22	preventing	prevent	VERB
app01-4966	50	23	nitrogen	nitrogen	NOUN
app01-4966	50	24	from	from	ADP
app01-4966	50	25	diffusing	diffuse	VERB
app01-4966	50	26	into	into	ADP
app01-4966	50	27	the	the	DET
app01-4966	50	28	material	material	NOUN
app01-4966	50	29	.	.	PUNCT
app01-4966	51	1	during	during	ADP
app01-4966	51	2	the	the	DET
app01-4966	51	3	deposition	deposition	NOUN
app01-4966	51	4	,	,	PUNCT
app01-4966	51	5	different	different	ADJ
app01-4966	51	6	layers	layer	NOUN
app01-4966	51	7	are	be	AUX
app01-4966	51	8	produced	produce	VERB
app01-4966	51	9	diffusion	diffusion	NOUN
app01-4966	51	10	and	and	CCONJ
app01-4966	51	11	compound	compound	NOUN
app01-4966	51	12	layer	layer	NOUN
app01-4966	51	13	.	.	PUNCT
app01-4966	52	1	diffusion	diffusion	NOUN
app01-4966	52	2	zone	zone	NOUN
app01-4966	52	3	is	be	AUX
app01-4966	52	4	a	a	DET
app01-4966	52	5	region	region	NOUN
app01-4966	52	6	characterized	characterize	VERB
app01-4966	52	7	by	by	ADP
app01-4966	52	8	solid	solid	ADJ
app01-4966	52	9	solution	solution	NOUN
app01-4966	52	10	in	in	ADP
app01-4966	52	11	the	the	DET
app01-4966	52	12	original	original	ADJ
app01-4966	52	13	core	core	NOUN
app01-4966	52	14	microstructure	microstructure	NOUN
app01-4966	52	15	with	with	ADP
app01-4966	52	16	hardening	harden	VERB
app01-4966	52	17	precipitations	precipitation	NOUN
app01-4966	52	18	.	.	PUNCT
app01-4966	53	1	compound	compound	NOUN
app01-4966	53	2	layer	layer	NOUN
app01-4966	53	3	typically	typically	ADV
app01-4966	53	4	consists	consist	VERB
app01-4966	53	5	of	of	ADP
app01-4966	53	6	mixture	mixture	NOUN
app01-4966	53	7	of	of	ADP
app01-4966	53	8	iron	iron	NOUN
app01-4966	53	9	nitrides	nitride	NOUN
app01-4966	53	10	,	,	PUNCT
app01-4966	53	11	in	in	ADP
app01-4966	53	12	case	case	NOUN
app01-4966	53	13	of	of	ADP
app01-4966	53	14	steel	steel	NOUN
app01-4966	53	15	nitriding	nitride	VERB
app01-4966	53	16	.	.	PUNCT
app01-4966	54	1	with	with	ADP
app01-4966	54	2	plasma	plasma	NOUN
app01-4966	54	3	nitriding	nitride	VERB
app01-4966	54	4	,	,	PUNCT
app01-4966	54	5	by	by	ADP
app01-4966	54	6	controlling	control	VERB
app01-4966	54	7	the	the	DET
app01-4966	54	8	process	process	NOUN
app01-4966	54	9	parameters	parameter	NOUN
app01-4966	54	10	,	,	PUNCT
app01-4966	54	11	it	it	PRON
app01-4966	54	12	is	be	AUX
app01-4966	54	13	possible	possible	ADJ
app01-4966	54	14	to	to	PART
app01-4966	54	15	determine	determine	VERB
app01-4966	54	16	the	the	DET
app01-4966	54	17	composition	composition	NOUN
app01-4966	54	18	or	or	CCONJ
app01-4966	54	19	even	even	ADV
app01-4966	54	20	avoid	avoid	VERB
app01-4966	54	21	the	the	DET
app01-4966	54	22	formation	formation	NOUN
app01-4966	54	23	of	of	ADP
app01-4966	54	24	the	the	DET
app01-4966	54	25	compound	compound	NOUN
app01-4966	54	26	layer	layer	NOUN
app01-4966	55	1	[	[	X
app01-4966	55	2	16	16	NUM
app01-4966	55	3	]	]	PUNCT
app01-4966	55	4	.	.	PUNCT
app01-4966	56	1	in	in	ADP
app01-4966	56	2	this	this	DET
app01-4966	56	3	study	study	NOUN
app01-4966	56	4	,	,	PUNCT
app01-4966	56	5	three	three	NUM
app01-4966	56	6	types	type	NOUN
app01-4966	56	7	of	of	ADP
app01-4966	56	8	diffusion	diffusion	NOUN
app01-4966	56	9	-	-	PUNCT
app01-4966	56	10	nitrided	nitride	VERB
app01-4966	56	11	layers	layer	NOUN
app01-4966	56	12	were	be	AUX
app01-4966	56	13	prepared	prepare	VERB
app01-4966	56	14	and	and	CCONJ
app01-4966	56	15	characterized	characterize	VERB
app01-4966	56	16	for	for	ADP
app01-4966	56	17	their	their	PRON
app01-4966	56	18	morphology	morphology	NOUN
app01-4966	56	19	,	,	PUNCT
app01-4966	56	20	phase	phase	NOUN
app01-4966	56	21	and	and	CCONJ
app01-4966	56	22	elemental	elemental	ADJ
app01-4966	56	23	composition	composition	NOUN
app01-4966	56	24	and	and	CCONJ
app01-4966	56	25	thermal	thermal	ADJ
app01-4966	56	26	stability	stability	NOUN
app01-4966	56	27	.	.	PUNCT
app01-4966	57	1	a	a	DET
app01-4966	57	2	brief	brief	ADJ
app01-4966	57	3	comparison	comparison	NOUN
app01-4966	57	4	with	with	ADP
app01-4966	57	5	several	several	ADJ
app01-4966	57	6	nitride	nitride	ADJ
app01-4966	57	7	coatings	coating	NOUN
app01-4966	57	8	prepared	prepare	VERB
app01-4966	57	9	by	by	ADP
app01-4966	57	10	the	the	DET
app01-4966	57	11	pvd	pvd	PROPN
app01-4966	57	12	technique	technique	NOUN
app01-4966	57	13	is	be	AUX
app01-4966	57	14	made	make	VERB
app01-4966	57	15	.	.	PUNCT
app01-4966	58	1	2	2	X
app01-4966	58	2	.	.	X
app01-4966	58	3	experiment	experiment	NOUN
app01-4966	58	4	as	as	ADP
app01-4966	58	5	a	a	DET
app01-4966	58	6	substrate	substrate	NOUN
app01-4966	58	7	,	,	PUNCT
app01-4966	58	8	ferritic	ferritic	ADJ
app01-4966	58	9	-	-	PUNCT
app01-4966	58	10	martensitic	martensitic	NOUN
app01-4966	58	11	steel	steel	NOUN
app01-4966	58	12	p92	p92	NOUN
app01-4966	58	13	was	be	AUX
app01-4966	58	14	used	use	VERB
app01-4966	58	15	,	,	PUNCT
app01-4966	58	16	whose	whose	DET
app01-4966	58	17	characteristic	characteristic	ADJ
app01-4966	58	18	composition	composition	NOUN
app01-4966	58	19	is	be	AUX
app01-4966	58	20	provided	provide	VERB
app01-4966	58	21	in	in	ADP
app01-4966	58	22	[	[	X
app01-4966	58	23	17	17	NUM
app01-4966	58	24	]	]	PUNCT
app01-4966	58	25	.	.	PUNCT
app01-4966	59	1	it	it	PRON
app01-4966	59	2	is	be	AUX
app01-4966	59	3	very	very	ADV
app01-4966	59	4	similar	similar	ADJ
app01-4966	59	5	to	to	ADP
app01-4966	59	6	eurofer97	eurofer97	VERB
app01-4966	59	7	steel	steel	NOUN
app01-4966	59	8	,	,	PUNCT
app01-4966	59	9	developed	develop	VERB
app01-4966	59	10	as	as	ADP
app01-4966	59	11	a	a	DET
app01-4966	59	12	reference	reference	NOUN
app01-4966	59	13	structural	structural	ADJ
app01-4966	59	14	material	material	NOUN
app01-4966	59	15	for	for	ADP
app01-4966	59	16	the	the	DET
app01-4966	59	17	demo	demo	NOUN
app01-4966	59	18	tokamak	tokamak	PROPN
app01-4966	60	1	[	[	X
app01-4966	60	2	18	18	NUM
app01-4966	60	3	]	]	PUNCT
app01-4966	60	4	.	.	PUNCT
app01-4966	61	1	such	such	ADJ
app01-4966	61	2	material	material	NOUN
app01-4966	61	3	is	be	AUX
app01-4966	61	4	also	also	ADV
app01-4966	61	5	commonly	commonly	ADV
app01-4966	61	6	used	use	VERB
app01-4966	61	7	in	in	ADP
app01-4966	61	8	permeation	permeation	NOUN
app01-4966	61	9	measurements	measurement	NOUN
app01-4966	61	10	[	[	X
app01-4966	61	11	19	19	NUM
app01-4966	61	12	]	]	PUNCT
app01-4966	61	13	,	,	PUNCT
app01-4966	61	14	so	so	CCONJ
app01-4966	61	15	a	a	DET
app01-4966	61	16	direct	direct	ADJ
app01-4966	61	17	comparison	comparison	NOUN
app01-4966	61	18	with	with	ADP
app01-4966	61	19	untreated	untreated	ADJ
app01-4966	61	20	substrate	substrate	NOUN
app01-4966	61	21	could	could	AUX
app01-4966	61	22	be	be	AUX
app01-4966	61	23	made	make	VERB
app01-4966	61	24	.	.	PUNCT
app01-4966	62	1	the	the	DET
app01-4966	62	2	substrates	substrate	NOUN
app01-4966	62	3	were	be	AUX
app01-4966	62	4	prepared	prepare	VERB
app01-4966	62	5	in	in	ADP
app01-4966	62	6	a	a	DET
app01-4966	62	7	disk	disk	NOUN
app01-4966	62	8	shape	shape	NOUN
app01-4966	62	9	with	with	ADP
app01-4966	62	10	0.5	0.5	NUM
app01-4966	62	11	mm	mm	NOUN
app01-4966	62	12	thickness	thickness	NOUN
app01-4966	62	13	and	and	CCONJ
app01-4966	62	14	25	25	NUM
app01-4966	62	15	mm	mm	PROPN
app01-4966	62	16	diameter	diameter	NOUN
app01-4966	62	17	,	,	PUNCT
app01-4966	62	18	by	by	ADP
app01-4966	62	19	electrical	electrical	ADJ
app01-4966	62	20	discharge	discharge	NOUN
app01-4966	62	21	machining	machining	NOUN
app01-4966	62	22	[	[	X
app01-4966	62	23	20	20	NUM
app01-4966	62	24	]	]	PUNCT
app01-4966	62	25	,	,	PUNCT
app01-4966	62	26	grinding	grind	VERB
app01-4966	62	27	with	with	ADP
app01-4966	62	28	sand	sand	NOUN
app01-4966	62	29	paper	paper	NOUN
app01-4966	62	30	and	and	CCONJ
app01-4966	62	31	metallographic	metallographic	ADJ
app01-4966	62	32	polishing	polishing	NOUN
app01-4966	62	33	.	.	PUNCT
app01-4966	63	1	the	the	DET
app01-4966	63	2	following	follow	VERB
app01-4966	63	3	types	type	NOUN
app01-4966	63	4	of	of	ADP
app01-4966	63	5	diffusionbased	diffusionbase	VERB
app01-4966	63	6	nitride	nitride	ADJ
app01-4966	63	7	layers	layer	NOUN
app01-4966	63	8	were	be	AUX
app01-4966	63	9	prepared	prepare	VERB
app01-4966	63	10	:	:	PUNCT
app01-4966	63	11	•	•	NUM
app01-4966	63	12	plasma	plasma	NOUN
app01-4966	63	13	nitridation	nitridation	NOUN
app01-4966	63	14	(	(	PUNCT
app01-4966	63	15	430	430	NUM
app01-4966	63	16	°	°	NOUN
app01-4966	63	17	c	c	NOUN
app01-4966	63	18	,	,	PUNCT
app01-4966	63	19	24h	24h	NOUN
app01-4966	63	20	)	)	PUNCT
app01-4966	63	21	,	,	PUNCT
app01-4966	63	22	at	at	ADP
app01-4966	63	23	technical	technical	ADJ
app01-4966	63	24	university	university	PROPN
app01-4966	63	25	of	of	ADP
app01-4966	63	26	liberec	liberec	PROPN
app01-4966	63	27	•	•	NUM
app01-4966	63	28	carbonitridation	carbonitridation	NOUN
app01-4966	63	29	(	(	PUNCT
app01-4966	63	30	560	560	NUM
app01-4966	63	31	°	°	NOUN
app01-4966	63	32	c	c	NOUN
app01-4966	63	33	,	,	PUNCT
app01-4966	63	34	10h	10h	NUM
app01-4966	63	35	)	)	PUNCT
app01-4966	63	36	at	at	ADP
app01-4966	63	37	bodycote	bodycote	NOUN
app01-4966	63	38	ht	ht	PROPN
app01-4966	63	39	,	,	PUNCT
app01-4966	63	40	s.r.o	s.r.o	PROPN
app01-4966	63	41	.	.	PROPN
app01-4966	63	42	•	•	NUM
app01-4966	63	43	salt	salt	NOUN
app01-4966	63	44	nitridation	nitridation	NOUN
app01-4966	63	45	(	(	PUNCT
app01-4966	63	46	530	530	NUM
app01-4966	63	47	°	°	NOUN
app01-4966	63	48	c	c	NOUN
app01-4966	63	49	)	)	PUNCT
app01-4966	63	50	at	at	ADP
app01-4966	63	51	katring	katre	VERB
app01-4966	63	52	plus	plus	CCONJ
app01-4966	63	53	s.r.o	s.r.o	PROPN
app01-4966	63	54	.	.	PUNCT
app01-4966	64	1	presence	presence	NOUN
app01-4966	64	2	of	of	ADP
app01-4966	64	3	the	the	DET
app01-4966	64	4	nitride	nitride	ADJ
app01-4966	64	5	layer	layer	NOUN
app01-4966	64	6	and	and	CCONJ
app01-4966	64	7	its	its	PRON
app01-4966	64	8	elemental	elemental	ADJ
app01-4966	64	9	composition	composition	NOUN
app01-4966	64	10	was	be	AUX
app01-4966	64	11	investigated	investigate	VERB
app01-4966	64	12	by	by	ADP
app01-4966	64	13	energy	energy	NOUN
app01-4966	64	14	-	-	PUNCT
app01-4966	64	15	dispersive	dispersive	NOUN
app01-4966	64	16	x	x	NOUN
app01-4966	64	17	-	-	NOUN
app01-4966	64	18	ray	ray	NOUN
app01-4966	64	19	spectroscopy	spectroscopy	NOUN
app01-4966	64	20	(	(	PUNCT
app01-4966	64	21	eds	ed	NOUN
app01-4966	64	22	)	)	PUNCT
app01-4966	64	23	in	in	ADP
app01-4966	64	24	an	an	DET
app01-4966	64	25	evo	evo	NOUN
app01-4966	64	26	ma15	ma15	PROPN
app01-4966	64	27	scanning	scanning	NOUN
app01-4966	64	28	electron	electron	NOUN
app01-4966	64	29	25	25	NUM
app01-4966	64	30	j.	j.	PROPN
app01-4966	64	31	veverka	veverka	PROPN
app01-4966	64	32	,	,	PUNCT
app01-4966	64	33	j.	j.	PROPN
app01-4966	64	34	matejicek	matejicek	PROPN
app01-4966	64	35	,	,	PUNCT
app01-4966	64	36	f.	f.	PROPN
app01-4966	64	37	lukac	lukac	PROPN
app01-4966	64	38	et	et	PROPN
app01-4966	64	39	al	al	PROPN
app01-4966	64	40	.	.	PROPN
app01-4966	64	41	acta	acta	PROPN
app01-4966	64	42	polytechnica	polytechnica	PROPN
app01-4966	64	43	ctu	ctu	PROPN
app01-4966	64	44	proceedings	proceeding	NOUN
app01-4966	64	45	microscope	microscope	NOUN
app01-4966	64	46	(	(	PUNCT
app01-4966	64	47	carl	carl	PROPN
app01-4966	64	48	zeiss	zeiss	PROPN
app01-4966	64	49	sma	sma	PROPN
app01-4966	64	50	,	,	PUNCT
app01-4966	64	51	germany	germany	PROPN
app01-4966	64	52	)	)	PUNCT
app01-4966	64	53	equipped	equip	VERB
app01-4966	64	54	with	with	ADP
app01-4966	64	55	a	a	DET
app01-4966	64	56	quantax	quantax	NOUN
app01-4966	64	57	system	system	NOUN
app01-4966	64	58	and	and	CCONJ
app01-4966	64	59	x	x	NOUN
app01-4966	64	60	-	-	NOUN
app01-4966	64	61	flash	flash	VERB
app01-4966	64	62	5010	5010	NUM
app01-4966	64	63	detector	detector	NOUN
app01-4966	64	64	(	(	PUNCT
app01-4966	64	65	bruker	bruker	PROPN
app01-4966	64	66	,	,	PUNCT
app01-4966	64	67	germany	germany	PROPN
app01-4966	64	68	)	)	PUNCT
app01-4966	64	69	.	.	PUNCT
app01-4966	65	1	phase	phase	NOUN
app01-4966	65	2	composition	composition	NOUN
app01-4966	65	3	was	be	AUX
app01-4966	65	4	analyzed	analyze	VERB
app01-4966	65	5	by	by	ADP
app01-4966	65	6	x	x	NOUN
app01-4966	65	7	-	-	NOUN
app01-4966	65	8	ray	ray	NOUN
app01-4966	65	9	diffraction	diffraction	NOUN
app01-4966	65	10	(	(	PUNCT
app01-4966	65	11	xrd	xrd	NOUN
app01-4966	65	12	)	)	PUNCT
app01-4966	65	13	using	use	VERB
app01-4966	65	14	a	a	DET
app01-4966	65	15	d8	d8	NOUN
app01-4966	65	16	discover	discover	NOUN
app01-4966	65	17	diffractometer	diffractometer	NOUN
app01-4966	65	18	(	(	PUNCT
app01-4966	65	19	bruker	bruker	PROPN
app01-4966	65	20	,	,	PUNCT
app01-4966	65	21	germany	germany	PROPN
app01-4966	65	22	)	)	PUNCT
app01-4966	65	23	.	.	PUNCT
app01-4966	66	1	for	for	ADP
app01-4966	66	2	the	the	DET
app01-4966	66	3	xrd	xrd	PROPN
app01-4966	66	4	measurements	measurement	NOUN
app01-4966	66	5	,	,	PUNCT
app01-4966	66	6	rietveld	rietveld	PROPN
app01-4966	66	7	method	method	NOUN
app01-4966	66	8	was	be	AUX
app01-4966	66	9	used	use	VERB
app01-4966	66	10	to	to	PART
app01-4966	66	11	determine	determine	VERB
app01-4966	66	12	the	the	DET
app01-4966	66	13	composition	composition	NOUN
app01-4966	66	14	.	.	PUNCT
app01-4966	67	1	to	to	PART
app01-4966	67	2	assess	assess	VERB
app01-4966	67	3	thermal	thermal	ADJ
app01-4966	67	4	stability	stability	NOUN
app01-4966	67	5	of	of	ADP
app01-4966	67	6	the	the	DET
app01-4966	67	7	coatings	coating	NOUN
app01-4966	67	8	,	,	PUNCT
app01-4966	67	9	the	the	DET
app01-4966	67	10	samples	sample	NOUN
app01-4966	67	11	were	be	AUX
app01-4966	67	12	annealed	anneal	VERB
app01-4966	67	13	in	in	ADP
app01-4966	67	14	a	a	DET
app01-4966	67	15	vacuum	vacuum	NOUN
app01-4966	67	16	furnace	furnace	NOUN
app01-4966	67	17	for	for	ADP
app01-4966	67	18	1	1	NUM
app01-4966	67	19	hour	hour	NOUN
app01-4966	67	20	at	at	ADP
app01-4966	67	21	550	550	NUM
app01-4966	67	22	°	°	NOUN
app01-4966	67	23	c	c	NOUN
app01-4966	67	24	,	,	PUNCT
app01-4966	67	25	which	which	PRON
app01-4966	67	26	is	be	AUX
app01-4966	67	27	the	the	DET
app01-4966	67	28	foreseen	foreseen	ADJ
app01-4966	67	29	temperature	temperature	NOUN
app01-4966	67	30	in	in	ADP
app01-4966	67	31	the	the	DET
app01-4966	67	32	future	future	ADJ
app01-4966	67	33	reactor	reactor	NOUN
app01-4966	67	34	application	application	NOUN
app01-4966	67	35	,	,	PUNCT
app01-4966	67	36	also	also	ADV
app01-4966	67	37	used	use	VERB
app01-4966	67	38	in	in	ADP
app01-4966	67	39	the	the	DET
app01-4966	67	40	permeation	permeation	NOUN
app01-4966	67	41	measurements	measurement	NOUN
app01-4966	67	42	.	.	PUNCT
app01-4966	68	1	after	after	ADP
app01-4966	68	2	the	the	DET
app01-4966	68	3	annealing	annealing	NOUN
app01-4966	68	4	,	,	PUNCT
app01-4966	68	5	the	the	DET
app01-4966	68	6	layer	layer	NOUN
app01-4966	68	7	composition	composition	NOUN
app01-4966	68	8	was	be	AUX
app01-4966	68	9	verified	verify	VERB
app01-4966	68	10	again	again	ADV
app01-4966	68	11	.	.	PUNCT
app01-4966	69	1	additionally	additionally	ADV
app01-4966	69	2	,	,	PUNCT
app01-4966	69	3	six	six	NUM
app01-4966	69	4	types	type	NOUN
app01-4966	69	5	of	of	ADP
app01-4966	69	6	nitrides	nitride	NOUN
app01-4966	69	7	were	be	AUX
app01-4966	69	8	deposited	deposit	VERB
app01-4966	69	9	by	by	ADP
app01-4966	69	10	pvd	pvd	PROPN
app01-4966	69	11	:	:	PUNCT
app01-4966	69	12	wn	wn	PROPN
app01-4966	69	13	,	,	PUNCT
app01-4966	69	14	crn	crn	NOUN
app01-4966	69	15	and	and	CCONJ
app01-4966	69	16	cr2n	cr2n	PROPN
app01-4966	69	17	by	by	ADP
app01-4966	69	18	magnetron	magnetron	NOUN
app01-4966	69	19	sputtering	sputtering	NOUN
app01-4966	69	20	at	at	ADP
app01-4966	69	21	the	the	DET
app01-4966	69	22	department	department	NOUN
app01-4966	69	23	of	of	ADP
app01-4966	69	24	materials	material	NOUN
app01-4966	69	25	engineering	engineering	NOUN
app01-4966	69	26	(	(	PUNCT
app01-4966	69	27	faculty	faculty	NOUN
app01-4966	69	28	of	of	ADP
app01-4966	69	29	mechanical	mechanical	ADJ
app01-4966	69	30	engineering	engineering	NOUN
app01-4966	69	31	,	,	PUNCT
app01-4966	69	32	czech	czech	PROPN
app01-4966	69	33	technical	technical	PROPN
app01-4966	69	34	university	university	PROPN
app01-4966	69	35	in	in	ADP
app01-4966	69	36	prague	prague	PROPN
app01-4966	69	37	)	)	PUNCT
app01-4966	69	38	and	and	CCONJ
app01-4966	69	39	crwn	crwn	NOUN
app01-4966	69	40	,	,	PUNCT
app01-4966	69	41	craln	craln	NOUN
app01-4966	69	42	and	and	CCONJ
app01-4966	69	43	zrn	zrn	NUM
app01-4966	69	44	by	by	ADP
app01-4966	69	45	cathodic	cathodic	NOUN
app01-4966	69	46	arc	arc	NOUN
app01-4966	69	47	plasma	plasma	NOUN
app01-4966	69	48	deposition	deposition	NOUN
app01-4966	69	49	at	at	ADP
app01-4966	69	50	ionbond	ionbond	NOUN
app01-4966	69	51	czechia	czechia	PROPN
app01-4966	69	52	s.r.o	s.r.o	PROPN
app01-4966	69	53	.	.	PROPN
app01-4966	69	54	similar	similar	ADJ
app01-4966	69	55	,	,	PUNCT
app01-4966	69	56	but	but	CCONJ
app01-4966	69	57	more	more	ADV
app01-4966	69	58	comprehensive	comprehensive	ADJ
app01-4966	69	59	characterization	characterization	NOUN
app01-4966	69	60	was	be	AUX
app01-4966	69	61	performed	perform	VERB
app01-4966	69	62	,	,	PUNCT
app01-4966	69	63	including	include	VERB
app01-4966	69	64	the	the	DET
app01-4966	69	65	permeation	permeation	NOUN
app01-4966	69	66	measurements	measurement	NOUN
app01-4966	69	67	at	at	ADP
app01-4966	69	68	the	the	DET
app01-4966	69	69	facility	facility	NOUN
app01-4966	69	70	of	of	ADP
app01-4966	69	71	jozef	jozef	PROPN
app01-4966	69	72	stefan	stefan	PROPN
app01-4966	69	73	institute	institute	PROPN
app01-4966	69	74	in	in	ADP
app01-4966	69	75	ljubljana	ljubljana	PROPN
app01-4966	69	76	,	,	PUNCT
app01-4966	69	77	slovenia	slovenia	PROPN
app01-4966	70	1	[	[	X
app01-4966	70	2	21	21	NUM
app01-4966	70	3	,	,	PUNCT
app01-4966	70	4	22	22	NUM
app01-4966	70	5	]	]	PUNCT
app01-4966	70	6	.	.	PUNCT
app01-4966	71	1	the	the	DET
app01-4966	71	2	details	detail	NOUN
app01-4966	71	3	of	of	ADP
app01-4966	71	4	the	the	DET
app01-4966	71	5	pvd	pvd	PROPN
app01-4966	71	6	coating	coat	VERB
app01-4966	71	7	preparation	preparation	NOUN
app01-4966	71	8	and	and	CCONJ
app01-4966	71	9	characterization	characterization	NOUN
app01-4966	71	10	will	will	AUX
app01-4966	71	11	be	be	AUX
app01-4966	71	12	provided	provide	VERB
app01-4966	71	13	in	in	ADP
app01-4966	71	14	a	a	DET
app01-4966	71	15	dedicated	dedicated	ADJ
app01-4966	71	16	paper	paper	NOUN
app01-4966	71	17	[	[	X
app01-4966	71	18	23	23	NUM
app01-4966	71	19	]	]	PUNCT
app01-4966	71	20	.	.	PUNCT
app01-4966	72	1	3	3	X
app01-4966	72	2	.	.	NOUN
app01-4966	72	3	results	result	VERB
app01-4966	72	4	3.1	3.1	NUM
app01-4966	72	5	.	.	PUNCT
app01-4966	72	6	diffusion	diffusion	NOUN
app01-4966	72	7	-	-	PUNCT
app01-4966	72	8	nitrided	nitride	VERB
app01-4966	72	9	layers	layer	NOUN
app01-4966	72	10	surface	surface	NOUN
app01-4966	72	11	morphology	morphology	NOUN
app01-4966	72	12	of	of	ADP
app01-4966	72	13	the	the	DET
app01-4966	72	14	three	three	NUM
app01-4966	72	15	layers	layer	NOUN
app01-4966	72	16	is	be	AUX
app01-4966	72	17	shown	show	VERB
app01-4966	72	18	in	in	ADP
app01-4966	72	19	figure	figure	NOUN
app01-4966	72	20	1	1	NUM
app01-4966	72	21	.	.	PUNCT
app01-4966	73	1	a	a	DET
app01-4966	73	2	semi	semi	ADJ
app01-4966	73	3	-	-	ADJ
app01-4966	73	4	granular	granular	ADJ
app01-4966	73	5	structure	structure	NOUN
app01-4966	73	6	consisting	consist	VERB
app01-4966	73	7	of	of	ADP
app01-4966	73	8	very	very	ADV
app01-4966	73	9	fine	fine	ADJ
app01-4966	73	10	grains	grain	NOUN
app01-4966	73	11	can	can	AUX
app01-4966	73	12	be	be	AUX
app01-4966	73	13	observed	observe	VERB
app01-4966	73	14	;	;	PUNCT
app01-4966	73	15	in	in	ADP
app01-4966	73	16	case	case	NOUN
app01-4966	73	17	of	of	ADP
app01-4966	73	18	ion	ion	NOUN
app01-4966	73	19	nitridation	nitridation	NOUN
app01-4966	73	20	,	,	PUNCT
app01-4966	73	21	these	these	PRON
app01-4966	73	22	seem	seem	VERB
app01-4966	73	23	to	to	PART
app01-4966	73	24	be	be	AUX
app01-4966	73	25	more	more	ADV
app01-4966	73	26	concentrated	concentrated	ADJ
app01-4966	73	27	along	along	ADP
app01-4966	73	28	substrate	substrate	NOUN
app01-4966	73	29	grain	grain	NOUN
app01-4966	73	30	boundaries	boundary	NOUN
app01-4966	73	31	.	.	PUNCT
app01-4966	74	1	this	this	DET
app01-4966	74	2	appearance	appearance	NOUN
app01-4966	74	3	is	be	AUX
app01-4966	74	4	typical	typical	ADJ
app01-4966	74	5	and	and	CCONJ
app01-4966	74	6	has	have	AUX
app01-4966	74	7	been	be	AUX
app01-4966	74	8	observed	observe	VERB
app01-4966	74	9	in	in	ADP
app01-4966	74	10	previous	previous	ADJ
app01-4966	74	11	studies	study	NOUN
app01-4966	74	12	[	[	X
app01-4966	74	13	13	13	NUM
app01-4966	74	14	,	,	PUNCT
app01-4966	74	15	24	24	NUM
app01-4966	74	16	]	]	PUNCT
app01-4966	74	17	.	.	PUNCT
app01-4966	75	1	no	no	DET
app01-4966	75	2	cracks	crack	NOUN
app01-4966	75	3	were	be	AUX
app01-4966	75	4	observed	observe	VERB
app01-4966	75	5	,	,	PUNCT
app01-4966	75	6	which	which	PRON
app01-4966	75	7	would	would	AUX
app01-4966	75	8	be	be	AUX
app01-4966	75	9	detrimental	detrimental	ADJ
app01-4966	75	10	for	for	ADP
app01-4966	75	11	the	the	DET
app01-4966	75	12	permeation	permeation	NOUN
app01-4966	75	13	barrier	barrier	NOUN
app01-4966	75	14	performance	performance	NOUN
app01-4966	75	15	.	.	PUNCT
app01-4966	76	1	thickness	thickness	NOUN
app01-4966	76	2	of	of	ADP
app01-4966	76	3	the	the	DET
app01-4966	76	4	diffusion	diffusion	NOUN
app01-4966	76	5	nitrided	nitride	VERB
app01-4966	76	6	coatings	coating	NOUN
app01-4966	76	7	,	,	PUNCT
app01-4966	76	8	provided	provide	VERB
app01-4966	76	9	by	by	ADP
app01-4966	76	10	the	the	DET
app01-4966	76	11	manufacturer	manufacturer	NOUN
app01-4966	76	12	,	,	PUNCT
app01-4966	76	13	reached	reach	VERB
app01-4966	76	14	approximately	approximately	ADV
app01-4966	76	15	100	100	NUM
app01-4966	76	16	nm	nm	NOUN
app01-4966	76	17	.	.	PUNCT
app01-4966	77	1	eds	ed	NOUN
app01-4966	77	2	and	and	CCONJ
app01-4966	77	3	xrd	xrd	NOUN
app01-4966	77	4	measurements	measurement	NOUN
app01-4966	77	5	confirmed	confirm	VERB
app01-4966	77	6	presence	presence	NOUN
app01-4966	77	7	of	of	ADP
app01-4966	77	8	the	the	DET
app01-4966	77	9	nitride	nitride	ADJ
app01-4966	77	10	layer	layer	NOUN
app01-4966	77	11	.	.	PUNCT
app01-4966	78	1	elemental	elemental	ADJ
app01-4966	78	2	composition	composition	NOUN
app01-4966	78	3	,	,	PUNCT
app01-4966	78	4	as	as	SCONJ
app01-4966	78	5	determined	determine	VERB
app01-4966	78	6	by	by	ADP
app01-4966	78	7	eds	ed	NOUN
app01-4966	78	8	,	,	PUNCT
app01-4966	78	9	is	be	AUX
app01-4966	78	10	shown	show	VERB
app01-4966	78	11	in	in	ADP
app01-4966	78	12	table	table	NOUN
app01-4966	78	13	1	1	NUM
app01-4966	78	14	.	.	NOUN
app01-4966	78	15	phase	phase	NOUN
app01-4966	78	16	composition	composition	NOUN
app01-4966	78	17	,	,	PUNCT
app01-4966	78	18	as	as	SCONJ
app01-4966	78	19	determined	determine	VERB
app01-4966	78	20	by	by	ADP
app01-4966	78	21	xrd	xrd	NOUN
app01-4966	78	22	,	,	PUNCT
app01-4966	78	23	is	be	AUX
app01-4966	78	24	shown	show	VERB
app01-4966	78	25	in	in	ADP
app01-4966	78	26	table	table	NOUN
app01-4966	78	27	2	2	NUM
app01-4966	78	28	.	.	PUNCT
app01-4966	79	1	due	due	ADP
app01-4966	79	2	to	to	ADP
app01-4966	79	3	the	the	DET
app01-4966	79	4	low	low	ADJ
app01-4966	79	5	thickness	thickness	NOUN
app01-4966	79	6	of	of	ADP
app01-4966	79	7	the	the	DET
app01-4966	79	8	nitride	nitride	ADJ
app01-4966	79	9	layer	layer	NOUN
app01-4966	79	10	,	,	PUNCT
app01-4966	79	11	the	the	DET
app01-4966	79	12	substrate	substrate	NOUN
app01-4966	79	13	is	be	AUX
app01-4966	79	14	detected	detect	VERB
app01-4966	79	15	by	by	ADP
app01-4966	79	16	both	both	DET
app01-4966	79	17	methods	method	NOUN
app01-4966	79	18	.	.	PUNCT
app01-4966	80	1	before	before	ADP
app01-4966	80	2	additional	additional	ADJ
app01-4966	80	3	characterizations	characterization	NOUN
app01-4966	80	4	,	,	PUNCT
app01-4966	80	5	the	the	DET
app01-4966	80	6	samples	sample	NOUN
app01-4966	80	7	were	be	AUX
app01-4966	80	8	annealed	anneal	VERB
app01-4966	80	9	to	to	PART
app01-4966	80	10	assess	assess	VERB
app01-4966	80	11	their	their	PRON
app01-4966	80	12	thermal	thermal	ADJ
app01-4966	80	13	stability	stability	NOUN
app01-4966	80	14	.	.	PUNCT
app01-4966	81	1	however	however	ADV
app01-4966	81	2	,	,	PUNCT
app01-4966	81	3	xrd	xrd	PROPN
app01-4966	81	4	measurements	measurement	NOUN
app01-4966	81	5	after	after	SCONJ
app01-4966	81	6	the	the	DET
app01-4966	81	7	annealing	annealing	NOUN
app01-4966	81	8	showed	show	VERB
app01-4966	81	9	that	that	SCONJ
app01-4966	81	10	the	the	DET
app01-4966	81	11	nitride	nitride	ADJ
app01-4966	81	12	layer	layer	NOUN
app01-4966	81	13	was	be	AUX
app01-4966	81	14	significantly	significantly	ADV
app01-4966	81	15	decomposed	decompose	VERB
app01-4966	81	16	.	.	PUNCT
app01-4966	82	1	this	this	PRON
app01-4966	82	2	can	can	AUX
app01-4966	82	3	be	be	AUX
app01-4966	82	4	seen	see	VERB
app01-4966	82	5	in	in	ADP
app01-4966	82	6	figures	figure	NOUN
app01-4966	82	7	2	2	NUM
app01-4966	82	8	and	and	CCONJ
app01-4966	82	9	3	3	NUM
app01-4966	82	10	for	for	ADP
app01-4966	82	11	the	the	DET
app01-4966	82	12	plasma	plasma	NOUN
app01-4966	82	13	-	-	PUNCT
app01-4966	82	14	nitrided	nitride	VERB
app01-4966	82	15	samples	sample	NOUN
app01-4966	82	16	.	.	PUNCT
app01-4966	83	1	similar	similar	ADJ
app01-4966	83	2	situation	situation	NOUN
app01-4966	83	3	was	be	AUX
app01-4966	83	4	observed	observe	VERB
app01-4966	83	5	for	for	ADP
app01-4966	83	6	the	the	DET
app01-4966	83	7	carbonitrided	carbonitride	VERB
app01-4966	83	8	and	and	CCONJ
app01-4966	83	9	salt	salt	NOUN
app01-4966	83	10	-	-	PUNCT
app01-4966	83	11	nitrided	nitride	VERB
app01-4966	83	12	samples	sample	NOUN
app01-4966	83	13	.	.	PUNCT
app01-4966	84	1	therefore	therefore	ADV
app01-4966	84	2	,	,	PUNCT
app01-4966	84	3	permeation	permeation	NOUN
app01-4966	84	4	measurements	measurement	NOUN
app01-4966	84	5	of	of	ADP
app01-4966	84	6	these	these	DET
app01-4966	84	7	coatings	coating	NOUN
app01-4966	84	8	were	be	AUX
app01-4966	84	9	not	not	PART
app01-4966	84	10	performed	perform	VERB
app01-4966	84	11	.	.	PUNCT
app01-4966	85	1	in	in	ADP
app01-4966	85	2	the	the	DET
app01-4966	85	3	plasma	plasma	NOUN
app01-4966	85	4	nitrided	nitride	VERB
app01-4966	85	5	sample	sample	NOUN
app01-4966	85	6	,	,	PUNCT
app01-4966	85	7	a	a	DET
app01-4966	85	8	change	change	NOUN
app01-4966	85	9	in	in	ADP
app01-4966	85	10	surface	surface	NOUN
app01-4966	85	11	morphology	morphology	NOUN
app01-4966	85	12	was	be	AUX
app01-4966	85	13	observed	observe	VERB
app01-4966	85	14	as	as	ADV
app01-4966	85	15	well	well	ADV
app01-4966	85	16	,	,	PUNCT
app01-4966	85	17	including	include	VERB
app01-4966	85	18	the	the	DET
app01-4966	85	19	formation	formation	NOUN
app01-4966	85	20	of	of	ADP
app01-4966	85	21	occassional	occassional	ADJ
app01-4966	85	22	cracks	crack	NOUN
app01-4966	85	23	.	.	PUNCT
app01-4966	86	1	this	this	PRON
app01-4966	86	2	can	can	AUX
app01-4966	86	3	be	be	AUX
app01-4966	86	4	seen	see	VERB
app01-4966	86	5	in	in	ADP
app01-4966	86	6	figure	figure	NOUN
app01-4966	86	7	4	4	NUM
app01-4966	86	8	.	.	PUNCT
app01-4966	87	1	for	for	ADP
app01-4966	87	2	the	the	DET
app01-4966	87	3	carbonitrided	carbonitride	VERB
app01-4966	87	4	and	and	CCONJ
app01-4966	87	5	salt	salt	NOUN
app01-4966	87	6	-	-	PUNCT
app01-4966	87	7	nirided	niride	VERB
app01-4966	87	8	samples	sample	NOUN
app01-4966	87	9	,	,	PUNCT
app01-4966	87	10	the	the	DET
app01-4966	87	11	morphology	morphology	NOUN
app01-4966	87	12	remained	remain	VERB
app01-4966	87	13	very	very	ADV
app01-4966	87	14	similar	similar	ADJ
app01-4966	87	15	.	.	PUNCT
app01-4966	88	1	figure	figure	NOUN
app01-4966	88	2	1	1	NUM
app01-4966	88	3	.	.	PUNCT
app01-4966	89	1	surface	surface	NOUN
app01-4966	89	2	morphologies	morphology	NOUN
app01-4966	89	3	of	of	ADP
app01-4966	89	4	nitrided	nitrided	ADJ
app01-4966	89	5	layers	layer	NOUN
app01-4966	89	6	:	:	PUNCT
app01-4966	89	7	plasma	plasma	NOUN
app01-4966	89	8	nitridation	nitridation	NOUN
app01-4966	89	9	(	(	PUNCT
app01-4966	89	10	top	top	NOUN
app01-4966	89	11	)	)	PUNCT
app01-4966	89	12	,	,	PUNCT
app01-4966	89	13	carbonitridation	carbonitridation	NOUN
app01-4966	89	14	(	(	PUNCT
app01-4966	89	15	middle	middle	NOUN
app01-4966	89	16	)	)	PUNCT
app01-4966	89	17	,	,	PUNCT
app01-4966	89	18	salt	salt	NOUN
app01-4966	89	19	nitridation	nitridation	NOUN
app01-4966	89	20	(	(	PUNCT
app01-4966	89	21	bottom	bottom	NOUN
app01-4966	89	22	)	)	PUNCT
app01-4966	89	23	.	.	PUNCT
app01-4966	90	1	3.2	3.2	NUM
app01-4966	90	2	.	.	PUNCT
app01-4966	91	1	pvd	pvd	PROPN
app01-4966	91	2	coatings	coating	NOUN
app01-4966	91	3	successful	successful	ADJ
app01-4966	91	4	deposition	deposition	NOUN
app01-4966	91	5	of	of	ADP
app01-4966	91	6	the	the	DET
app01-4966	91	7	pvd	pvd	PROPN
app01-4966	91	8	coatings	coating	NOUN
app01-4966	91	9	was	be	AUX
app01-4966	91	10	confirmed	confirm	VERB
app01-4966	91	11	by	by	ADP
app01-4966	91	12	eds	ed	NOUN
app01-4966	91	13	and	and	CCONJ
app01-4966	91	14	xrd	xrd	NOUN
app01-4966	91	15	measurements	measurement	NOUN
app01-4966	91	16	.	.	PUNCT
app01-4966	92	1	smooth	smooth	ADJ
app01-4966	92	2	and	and	CCONJ
app01-4966	92	3	crack	crack	NOUN
app01-4966	92	4	-	-	PUNCT
app01-4966	92	5	free	free	ADJ
app01-4966	92	6	coatings	coating	NOUN
app01-4966	92	7	were	be	AUX
app01-4966	92	8	obtained	obtain	VERB
app01-4966	92	9	,	,	PUNCT
app01-4966	92	10	with	with	ADP
app01-4966	92	11	thicknesses	thickness	NOUN
app01-4966	92	12	between	between	ADP
app01-4966	92	13	1.5	1.5	NUM
app01-4966	92	14	and	and	CCONJ
app01-4966	92	15	4.5	4.5	NUM
app01-4966	92	16	µm	µm	NOUN
app01-4966	92	17	.	.	PROPN
app01-4966	92	18	representative	representative	PROPN
app01-4966	92	19	surface	surface	NOUN
app01-4966	92	20	morphologies	morphology	NOUN
app01-4966	92	21	are	be	AUX
app01-4966	92	22	shown	show	VERB
app01-4966	92	23	in	in	ADP
app01-4966	92	24	figures	figure	NOUN
app01-4966	92	25	5	5	NUM
app01-4966	92	26	and	and	CCONJ
app01-4966	92	27	6	6	NUM
app01-4966	92	28	.	.	X
app01-4966	93	1	scratch	scratch	NOUN
app01-4966	93	2	test	test	NOUN
app01-4966	93	3	showed	show	VERB
app01-4966	93	4	good	good	ADJ
app01-4966	93	5	adhesion	adhesion	NOUN
app01-4966	93	6	of	of	ADP
app01-4966	93	7	the	the	DET
app01-4966	93	8	coatings	coating	NOUN
app01-4966	93	9	.	.	PUNCT
app01-4966	94	1	xrd	xrd	PROPN
app01-4966	94	2	measurements	measurement	NOUN
app01-4966	94	3	indicated	indicate	VERB
app01-4966	94	4	all	all	DET
app01-4966	94	5	the	the	DET
app01-4966	94	6	pvd	pvd	PROPN
app01-4966	94	7	coatings	coating	NOUN
app01-4966	94	8	to	to	PART
app01-4966	94	9	contain	contain	VERB
app01-4966	94	10	compressive	compressive	ADJ
app01-4966	94	11	stress	stress	NOUN
app01-4966	94	12	,	,	PUNCT
app01-4966	94	13	which	which	PRON
app01-4966	94	14	is	be	AUX
app01-4966	94	15	favorable	favorable	ADJ
app01-4966	94	16	as	as	SCONJ
app01-4966	94	17	it	it	PRON
app01-4966	94	18	suppresses	suppress	VERB
app01-4966	94	19	26	26	NUM
app01-4966	94	20	vol	vol	NOUN
app01-4966	94	21	.	.	PUNCT
app01-4966	95	1	17/2018	17/2018	NUM
app01-4966	95	2	thin	thin	ADJ
app01-4966	95	3	nitride	nitride	ADJ
app01-4966	95	4	layers	layer	NOUN
app01-4966	95	5	as	as	ADP
app01-4966	95	6	permeation	permeation	NOUN
app01-4966	95	7	barriers	barrier	NOUN
app01-4966	95	8	fabrication	fabrication	NOUN
app01-4966	95	9	method	method	NOUN
app01-4966	95	10	n	n	X
app01-4966	95	11	o	o	INTJ
app01-4966	95	12	na	na	INTJ
app01-4966	95	13	mg	mg	PROPN
app01-4966	95	14	al	al	PROPN
app01-4966	95	15	cr	cr	PROPN
app01-4966	95	16	fe	fe	PROPN
app01-4966	96	1	w	w	PROPN
app01-4966	96	2	c	c	PROPN
app01-4966	96	3	si	si	PROPN
app01-4966	96	4	plasma	plasma	NOUN
app01-4966	96	5	nitridation	nitridation	NOUN
app01-4966	96	6	6.3	6.3	NUM
app01-4966	96	7	0.9	0.9	NUM
app01-4966	96	8	9.6	9.6	NUM
app01-4966	96	9	81.9	81.9	NUM
app01-4966	96	10	1.3	1.3	NUM
app01-4966	96	11	carbonitridation	carbonitridation	NOUN
app01-4966	96	12	0.9	0.9	NUM
app01-4966	96	13	3.6	3.6	NUM
app01-4966	96	14	0.6	0.6	NUM
app01-4966	96	15	8.6	8.6	NUM
app01-4966	96	16	83.4	83.4	NUM
app01-4966	96	17	0.1	0.1	NUM
app01-4966	96	18	2.5	2.5	NUM
app01-4966	96	19	0.3	0.3	NUM
app01-4966	96	20	salt	salt	NOUN
app01-4966	96	21	nitridation	nitridation	NOUN
app01-4966	96	22	0.1	0.1	NUM
app01-4966	96	23	21.2	21.2	NUM
app01-4966	96	24	1.0	1.0	NUM
app01-4966	96	25	0.2	0.2	NUM
app01-4966	96	26	0.8	0.8	NUM
app01-4966	96	27	6.2	6.2	NUM
app01-4966	96	28	70.1	70.1	NUM
app01-4966	96	29	0.4	0.4	NUM
app01-4966	96	30	table	table	NOUN
app01-4966	96	31	1	1	NUM
app01-4966	96	32	.	.	PUNCT
app01-4966	96	33	composition	composition	NOUN
app01-4966	96	34	of	of	ADP
app01-4966	96	35	the	the	DET
app01-4966	96	36	nitride	nitride	ADJ
app01-4966	96	37	layers	layer	NOUN
app01-4966	96	38	measured	measure	VERB
app01-4966	96	39	by	by	ADP
app01-4966	96	40	eds	ed	NOUN
app01-4966	96	41	,	,	PUNCT
app01-4966	96	42	wt	wt	NOUN
app01-4966	96	43	.	.	NOUN
app01-4966	96	44	%	%	NOUN
app01-4966	96	45	.	.	PUNCT
app01-4966	97	1	fabrication	fabrication	NOUN
app01-4966	97	2	method	method	NOUN
app01-4966	97	3	fe2n	fe2n	PROPN
app01-4966	97	4	fe3n	fe3n	PROPN
app01-4966	97	5	fe4n	fe4n	NOUN
app01-4966	97	6	magnetite	magnetite	NOUN
app01-4966	97	7	plasma	plasma	NOUN
app01-4966	97	8	nitridation	nitridation	NOUN
app01-4966	97	9	14.96	14.96	NUM
app01-4966	97	10	18.27	18.27	NUM
app01-4966	97	11	4.88	4.88	NUM
app01-4966	97	12	0.00	0.00	NUM
app01-4966	97	13	carbonitridation	carbonitridation	NOUN
app01-4966	97	14	16.95	16.95	NUM
app01-4966	97	15	0.00	0.00	NUM
app01-4966	97	16	0.00	0.00	NUM
app01-4966	97	17	0.56	0.56	NUM
app01-4966	97	18	salt	salt	NOUN
app01-4966	97	19	nitridation	nitridation	NOUN
app01-4966	97	20	27.20	27.20	NUM
app01-4966	97	21	4.09	4.09	NUM
app01-4966	97	22	0.00	0.00	NUM
app01-4966	97	23	17.79	17.79	NUM
app01-4966	97	24	table	table	NOUN
app01-4966	97	25	2	2	NUM
app01-4966	97	26	.	.	NOUN
app01-4966	97	27	phase	phase	NOUN
app01-4966	97	28	composition	composition	NOUN
app01-4966	97	29	of	of	ADP
app01-4966	97	30	the	the	DET
app01-4966	97	31	nitride	nitride	ADJ
app01-4966	97	32	layers	layer	NOUN
app01-4966	97	33	measured	measure	VERB
app01-4966	97	34	by	by	ADP
app01-4966	97	35	xrd	xrd	PROPN
app01-4966	97	36	,	,	PUNCT
app01-4966	97	37	wt	wt	PROPN
app01-4966	97	38	.	.	NOUN
app01-4966	97	39	%	%	NOUN
app01-4966	97	40	balance	balance	NOUN
app01-4966	97	41	α	α	NOUN
app01-4966	97	42	-	-	PUNCT
app01-4966	97	43	fe	fe	NOUN
app01-4966	97	44	.	.	PROPN
app01-4966	97	45	figure	figure	NOUN
app01-4966	97	46	2	2	NUM
app01-4966	97	47	.	.	PUNCT
app01-4966	97	48	xrd	xrd	PROPN
app01-4966	97	49	spectrum	spectrum	PROPN
app01-4966	97	50	of	of	ADP
app01-4966	97	51	the	the	DET
app01-4966	97	52	plasma	plasma	NOUN
app01-4966	97	53	nitrided	nitride	VERB
app01-4966	97	54	sample	sample	NOUN
app01-4966	97	55	.	.	PUNCT
app01-4966	98	1	figure	figure	NOUN
app01-4966	98	2	3	3	NUM
app01-4966	98	3	.	.	PUNCT
app01-4966	98	4	xrd	xrd	PROPN
app01-4966	98	5	spectrum	spectrum	PROPN
app01-4966	98	6	of	of	ADP
app01-4966	98	7	the	the	DET
app01-4966	98	8	plasma	plasma	NOUN
app01-4966	98	9	nitrided	nitride	VERB
app01-4966	98	10	sample	sample	NOUN
app01-4966	98	11	after	after	ADP
app01-4966	98	12	thermal	thermal	ADJ
app01-4966	98	13	annealing	annealing	NOUN
app01-4966	98	14	.	.	PUNCT
app01-4966	99	1	crack	crack	VERB
app01-4966	99	2	propagation	propagation	NOUN
app01-4966	99	3	.	.	PUNCT
app01-4966	100	1	all	all	DET
app01-4966	100	2	the	the	DET
app01-4966	100	3	pvd	pvd	PROPN
app01-4966	100	4	coatings	coating	NOUN
app01-4966	100	5	showed	show	VERB
app01-4966	100	6	potential	potential	ADJ
app01-4966	100	7	for	for	ADP
app01-4966	100	8	permeation	permeation	NOUN
app01-4966	100	9	barriers	barrier	NOUN
app01-4966	100	10	with	with	ADP
app01-4966	100	11	permeation	permeation	NOUN
app01-4966	100	12	reduction	reduction	NOUN
app01-4966	100	13	factor	factor	NOUN
app01-4966	100	14	(	(	PUNCT
app01-4966	100	15	prf	prf	PROPN
app01-4966	100	16	)	)	PUNCT
app01-4966	100	17	>	>	X
app01-4966	101	1	100	100	NUM
app01-4966	101	2	,	,	PUNCT
app01-4966	101	3	in	in	ADP
app01-4966	101	4	case	case	NOUN
app01-4966	101	5	of	of	ADP
app01-4966	101	6	zrn	zrn	PROPN
app01-4966	101	7	even	even	ADV
app01-4966	101	8	>	>	X
app01-4966	101	9	10000	10000	NUM
app01-4966	101	10	.	.	PUNCT
app01-4966	102	1	phase	phase	NOUN
app01-4966	102	2	stability	stability	NOUN
app01-4966	102	3	after	after	SCONJ
app01-4966	102	4	the	the	DET
app01-4966	102	5	permeation	permeation	NOUN
app01-4966	102	6	test	test	NOUN
app01-4966	102	7	was	be	AUX
app01-4966	102	8	verified	verify	VERB
app01-4966	102	9	again	again	ADV
app01-4966	102	10	by	by	ADP
app01-4966	102	11	xrd	xrd	PROPN
app01-4966	102	12	.	.	PROPN
app01-4966	103	1	4	4	X
app01-4966	103	2	.	.	PUNCT
app01-4966	103	3	conclusions	conclusion	NOUN
app01-4966	103	4	thin	thin	ADJ
app01-4966	103	5	nitride	nitride	ADJ
app01-4966	103	6	layers	layer	NOUN
app01-4966	103	7	on	on	ADP
app01-4966	103	8	p92	p92	ADJ
app01-4966	103	9	ferritic	ferritic	ADJ
app01-4966	103	10	-	-	PUNCT
app01-4966	103	11	martensitic	martensitic	NOUN
app01-4966	103	12	steel	steel	NOUN
app01-4966	103	13	were	be	AUX
app01-4966	103	14	prepared	prepare	VERB
app01-4966	103	15	by	by	ADP
app01-4966	103	16	plasma	plasma	NOUN
app01-4966	103	17	nitridation	nitridation	NOUN
app01-4966	103	18	,	,	PUNCT
app01-4966	103	19	carbonitridation	carbonitridation	NOUN
app01-4966	103	20	and	and	CCONJ
app01-4966	103	21	salt	salt	NOUN
app01-4966	103	22	nitridation	nitridation	NOUN
app01-4966	103	23	.	.	PUNCT
app01-4966	104	1	formation	formation	NOUN
app01-4966	104	2	of	of	ADP
app01-4966	104	3	the	the	DET
app01-4966	104	4	nitride	nitride	ADJ
app01-4966	104	5	layer	layer	NOUN
app01-4966	104	6	and	and	CCONJ
app01-4966	104	7	its	its	PRON
app01-4966	104	8	composition	composition	NOUN
app01-4966	104	9	was	be	AUX
app01-4966	104	10	determined	determine	VERB
app01-4966	104	11	by	by	ADP
app01-4966	104	12	quantitative	quantitative	ADJ
app01-4966	104	13	rietveld	rietveld	NOUN
app01-4966	104	14	analysis	analysis	NOUN
app01-4966	104	15	of	of	ADP
app01-4966	104	16	diffraction	diffraction	NOUN
app01-4966	104	17	patterns	pattern	NOUN
app01-4966	104	18	.	.	PUNCT
app01-4966	105	1	sem	sem	NOUN
app01-4966	105	2	observations	observation	NOUN
app01-4966	105	3	indicated	indicate	VERB
app01-4966	105	4	the	the	DET
app01-4966	105	5	absence	absence	NOUN
app01-4966	105	6	of	of	ADP
app01-4966	105	7	surface	surface	NOUN
app01-4966	105	8	cracking	cracking	NOUN
app01-4966	105	9	.	.	PUNCT
app01-4966	106	1	however	however	ADV
app01-4966	106	2	,	,	PUNCT
app01-4966	106	3	after	after	ADP
app01-4966	106	4	annealing	anneal	VERB
app01-4966	106	5	at	at	ADP
app01-4966	106	6	550	550	NUM
app01-4966	106	7	°	°	NOUN
app01-4966	106	8	c	c	NOUN
app01-4966	106	9	,	,	PUNCT
app01-4966	106	10	the	the	DET
app01-4966	106	11	layers	layer	NOUN
app01-4966	106	12	were	be	AUX
app01-4966	106	13	significantly	significantly	ADV
app01-4966	106	14	decomposed	decompose	VERB
app01-4966	106	15	.	.	PUNCT
app01-4966	107	1	therefore	therefore	ADV
app01-4966	107	2	,	,	PUNCT
app01-4966	107	3	hydrogen	hydrogen	NOUN
app01-4966	107	4	permeation	permeation	NOUN
app01-4966	107	5	was	be	AUX
app01-4966	107	6	not	not	PART
app01-4966	107	7	measured	measure	VERB
app01-4966	107	8	.	.	PUNCT
app01-4966	108	1	pvd	pvd	PROPN
app01-4966	108	2	coatings	coating	NOUN
app01-4966	108	3	of	of	ADP
app01-4966	108	4	selected	select	VERB
app01-4966	108	5	nitrides	nitride	NOUN
app01-4966	108	6	were	be	AUX
app01-4966	108	7	also	also	ADV
app01-4966	108	8	deposited	deposit	VERB
app01-4966	108	9	on	on	ADP
app01-4966	108	10	eurofer97	eurofer97	NOUN
app01-4966	108	11	ferriticmartensitic	ferriticmartensitic	PROPN
app01-4966	108	12	steel	steel	PROPN
app01-4966	108	13	,	,	PUNCT
app01-4966	108	14	a	a	DET
app01-4966	108	15	reference	reference	NOUN
app01-4966	108	16	material	material	NOUN
app01-4966	108	17	for	for	ADP
app01-4966	108	18	demo	demo	NOUN
app01-4966	108	19	construction	construction	NOUN
app01-4966	108	20	.	.	PUNCT
app01-4966	109	1	the	the	DET
app01-4966	109	2	composition	composition	NOUN
app01-4966	109	3	,	,	PUNCT
app01-4966	109	4	thickness	thickness	NOUN
app01-4966	109	5	and	and	CCONJ
app01-4966	109	6	adhesion	adhesion	NOUN
app01-4966	109	7	of	of	ADP
app01-4966	109	8	the	the	DET
app01-4966	109	9	coatings	coating	NOUN
app01-4966	109	10	were	be	AUX
app01-4966	109	11	measured	measure	VERB
app01-4966	109	12	and	and	CCONJ
app01-4966	109	13	permeation	permeation	NOUN
app01-4966	109	14	measurefigure	measurefigure	NOUN
app01-4966	109	15	4	4	NUM
app01-4966	109	16	.	.	PUNCT
app01-4966	109	17	surface	surface	NOUN
app01-4966	109	18	morphology	morphology	NOUN
app01-4966	109	19	of	of	ADP
app01-4966	109	20	plasma	plasma	NOUN
app01-4966	109	21	nitrided	nitride	VERB
app01-4966	109	22	layer	layer	NOUN
app01-4966	109	23	after	after	ADP
app01-4966	109	24	thermal	thermal	ADJ
app01-4966	109	25	annealing	annealing	NOUN
app01-4966	109	26	.	.	PUNCT
app01-4966	110	1	figure	figure	NOUN
app01-4966	110	2	5	5	NUM
app01-4966	110	3	.	.	PUNCT
app01-4966	110	4	surface	surface	NOUN
app01-4966	110	5	morphology	morphology	NOUN
app01-4966	110	6	of	of	ADP
app01-4966	110	7	magnetron	magnetron	PROPN
app01-4966	110	8	sputtered	sputter	VERB
app01-4966	110	9	crn	crn	NOUN
app01-4966	110	10	coating	coating	NOUN
app01-4966	110	11	.	.	PUNCT
app01-4966	111	1	ments	ment	NOUN
app01-4966	111	2	were	be	AUX
app01-4966	111	3	performed	perform	VERB
app01-4966	111	4	.	.	PUNCT
app01-4966	112	1	thickness	thickness	NOUN
app01-4966	112	2	of	of	ADP
app01-4966	112	3	the	the	DET
app01-4966	112	4	coatings	coating	NOUN
app01-4966	112	5	was	be	AUX
app01-4966	112	6	several	several	ADJ
app01-4966	112	7	µm	µm	NOUN
app01-4966	112	8	,	,	PUNCT
app01-4966	112	9	all	all	DET
app01-4966	112	10	coatings	coating	NOUN
app01-4966	112	11	showed	show	VERB
app01-4966	112	12	the	the	DET
app01-4966	112	13	desired	desire	VERB
app01-4966	112	14	composition	composition	NOUN
app01-4966	112	15	and	and	CCONJ
app01-4966	112	16	good	good	ADJ
app01-4966	112	17	adhesion	adhesion	NOUN
app01-4966	112	18	.	.	PUNCT
app01-4966	113	1	permeation	permeation	NOUN
app01-4966	113	2	measurements	measurement	NOUN
app01-4966	113	3	confirmed	confirm	VERB
app01-4966	113	4	suitability	suitability	NOUN
app01-4966	113	5	of	of	ADP
app01-4966	113	6	selected	select	VERB
app01-4966	113	7	nitrides	nitride	NOUN
app01-4966	113	8	as	as	ADP
app01-4966	113	9	permeation	permeation	NOUN
app01-4966	113	10	barriers	barrier	NOUN
app01-4966	113	11	.	.	PUNCT
app01-4966	114	1	best	good	ADJ
app01-4966	114	2	result	result	NOUN
app01-4966	114	3	was	be	AUX
app01-4966	114	4	achieved	achieve	VERB
app01-4966	114	5	by	by	ADP
app01-4966	114	6	zrn	zrn	NOUN
app01-4966	114	7	permeation	permeation	NOUN
app01-4966	114	8	reduction	reduction	NOUN
app01-4966	114	9	by	by	ADP
app01-4966	114	10	three	three	NUM
app01-4966	114	11	orders	order	NOUN
app01-4966	114	12	of	of	ADP
app01-4966	114	13	magnitude	magnitude	NOUN
app01-4966	114	14	.	.	PUNCT
app01-4966	115	1	these	these	DET
app01-4966	115	2	coatings	coating	NOUN
app01-4966	115	3	also	also	ADV
app01-4966	115	4	demonstrated	demonstrate	VERB
app01-4966	115	5	thermal	thermal	ADJ
app01-4966	115	6	stability	stability	NOUN
app01-4966	115	7	at	at	ADP
app01-4966	115	8	the	the	DET
app01-4966	115	9	test	test	NOUN
app01-4966	115	10	temperature	temperature	NOUN
app01-4966	115	11	.	.	PUNCT
app01-4966	116	1	from	from	ADP
app01-4966	116	2	these	these	DET
app01-4966	116	3	results	result	NOUN
app01-4966	116	4	,	,	PUNCT
app01-4966	116	5	it	it	PRON
app01-4966	116	6	can	can	AUX
app01-4966	116	7	27	27	NUM
app01-4966	116	8	j.	j.	PROPN
app01-4966	116	9	veverka	veverka	PROPN
app01-4966	116	10	,	,	PUNCT
app01-4966	116	11	j.	j.	PROPN
app01-4966	116	12	matejicek	matejicek	PROPN
app01-4966	116	13	,	,	PUNCT
app01-4966	116	14	f.	f.	PROPN
app01-4966	116	15	lukac	lukac	PROPN
app01-4966	116	16	et	et	PROPN
app01-4966	116	17	al	al	PROPN
app01-4966	116	18	.	.	PROPN
app01-4966	116	19	acta	acta	PROPN
app01-4966	116	20	polytechnica	polytechnica	PROPN
app01-4966	116	21	ctu	ctu	PROPN
app01-4966	116	22	proceedings	proceeding	NOUN
app01-4966	116	23	figure	figure	VERB
app01-4966	116	24	6	6	NUM
app01-4966	116	25	.	.	PUNCT
app01-4966	116	26	surface	surface	NOUN
app01-4966	116	27	morphology	morphology	NOUN
app01-4966	116	28	of	of	ADP
app01-4966	116	29	cathodic	cathodic	NOUN
app01-4966	116	30	arc	arc	NOUN
app01-4966	116	31	plasma	plasma	NOUN
app01-4966	116	32	deposited	deposit	VERB
app01-4966	116	33	craln	craln	NOUN
app01-4966	116	34	coating	coat	VERB
app01-4966	116	35	.	.	PUNCT
app01-4966	117	1	be	be	AUX
app01-4966	117	2	concluded	conclude	VERB
app01-4966	117	3	that	that	SCONJ
app01-4966	117	4	the	the	DET
app01-4966	117	5	investigated	investigate	VERB
app01-4966	117	6	diffusion	diffusion	NOUN
app01-4966	117	7	-	-	PUNCT
app01-4966	117	8	based	base	VERB
app01-4966	117	9	nitride	nitride	ADJ
app01-4966	117	10	layers	layer	NOUN
app01-4966	117	11	are	be	AUX
app01-4966	117	12	not	not	PART
app01-4966	117	13	suitable	suitable	ADJ
app01-4966	117	14	for	for	ADP
app01-4966	117	15	the	the	DET
app01-4966	117	16	application	application	NOUN
app01-4966	117	17	as	as	ADP
app01-4966	117	18	permeation	permeation	NOUN
app01-4966	117	19	barriers	barrier	NOUN
app01-4966	117	20	at	at	ADP
app01-4966	117	21	elevated	elevated	ADJ
app01-4966	117	22	temperature	temperature	NOUN
app01-4966	117	23	,	,	PUNCT
app01-4966	117	24	due	due	ADP
app01-4966	117	25	to	to	ADP
app01-4966	117	26	the	the	DET
app01-4966	117	27	lack	lack	NOUN
app01-4966	117	28	of	of	ADP
app01-4966	117	29	thermal	thermal	ADJ
app01-4966	117	30	stability	stability	NOUN
app01-4966	117	31	.	.	PUNCT
app01-4966	118	1	from	from	ADP
app01-4966	118	2	this	this	DET
app01-4966	118	3	point	point	NOUN
app01-4966	118	4	of	of	ADP
app01-4966	118	5	view	view	NOUN
app01-4966	118	6	,	,	PUNCT
app01-4966	118	7	as	as	ADV
app01-4966	118	8	well	well	ADV
app01-4966	118	9	as	as	ADP
app01-4966	118	10	promising	promise	VERB
app01-4966	118	11	prf	prf	NOUN
app01-4966	118	12	values	value	NOUN
app01-4966	118	13	,	,	PUNCT
app01-4966	118	14	pvd	pvd	PROPN
app01-4966	118	15	coatings	coating	NOUN
app01-4966	118	16	seem	seem	VERB
app01-4966	118	17	more	more	ADV
app01-4966	118	18	suitable	suitable	ADJ
app01-4966	118	19	.	.	PUNCT
app01-4966	119	1	however	however	ADV
app01-4966	119	2	,	,	PUNCT
app01-4966	119	3	it	it	PRON
app01-4966	119	4	should	should	AUX
app01-4966	119	5	be	be	AUX
app01-4966	119	6	noted	note	VERB
app01-4966	119	7	that	that	SCONJ
app01-4966	119	8	only	only	ADV
app01-4966	119	9	a	a	DET
app01-4966	119	10	limited	limited	ADJ
app01-4966	119	11	number	number	NOUN
app01-4966	119	12	of	of	ADP
app01-4966	119	13	materials	material	NOUN
app01-4966	119	14	and	and	CCONJ
app01-4966	119	15	techniques	technique	NOUN
app01-4966	119	16	were	be	AUX
app01-4966	119	17	examined	examine	VERB
app01-4966	119	18	and	and	CCONJ
app01-4966	119	19	various	various	ADJ
app01-4966	119	20	other	other	ADJ
app01-4966	119	21	modifications	modification	NOUN
app01-4966	119	22	exist	exist	VERB
app01-4966	119	23	,	,	PUNCT
app01-4966	119	24	including	include	VERB
app01-4966	119	25	technological	technological	ADJ
app01-4966	119	26	parameter	parameter	NOUN
app01-4966	119	27	variations	variation	NOUN
app01-4966	119	28	as	as	ADV
app01-4966	119	29	well	well	ADV
app01-4966	119	30	as	as	ADP
app01-4966	119	31	different	different	ADJ
app01-4966	119	32	layer	layer	NOUN
app01-4966	119	33	compositions	composition	NOUN
app01-4966	119	34	.	.	PUNCT
app01-4966	120	1	acknowledgements	acknowledgement	NOUN
app01-4966	120	2	this	this	DET
app01-4966	120	3	work	work	NOUN
app01-4966	120	4	has	have	AUX
app01-4966	120	5	been	be	AUX
app01-4966	120	6	carried	carry	VERB
app01-4966	120	7	out	out	ADP
app01-4966	120	8	within	within	ADP
app01-4966	120	9	the	the	DET
app01-4966	120	10	framework	framework	NOUN
app01-4966	120	11	of	of	ADP
app01-4966	120	12	the	the	DET
app01-4966	120	13	eurofusion	eurofusion	NOUN
app01-4966	120	14	consortium	consortium	NOUN
app01-4966	120	15	and	and	CCONJ
app01-4966	120	16	has	have	AUX
app01-4966	120	17	received	receive	VERB
app01-4966	120	18	funding	funding	NOUN
app01-4966	120	19	from	from	ADP
app01-4966	120	20	the	the	DET
app01-4966	120	21	euratom	euratom	NOUN
app01-4966	120	22	research	research	NOUN
app01-4966	120	23	and	and	CCONJ
app01-4966	120	24	training	training	NOUN
app01-4966	120	25	programme	programme	NOUN
app01-4966	120	26	20142018	20142018	NUM
app01-4966	120	27	under	under	ADP
app01-4966	120	28	grant	grant	NOUN
app01-4966	120	29	agreement	agreement	NOUN
app01-4966	120	30	no	no	DET
app01-4966	120	31	633053	633053	NUM
app01-4966	120	32	.	.	PUNCT
app01-4966	121	1	the	the	DET
app01-4966	121	2	views	view	NOUN
app01-4966	121	3	and	and	CCONJ
app01-4966	121	4	opinions	opinion	NOUN
app01-4966	121	5	expressed	express	VERB
app01-4966	121	6	herein	herein	NOUN
app01-4966	121	7	do	do	AUX
app01-4966	121	8	not	not	PART
app01-4966	121	9	necessarily	necessarily	ADV
app01-4966	121	10	reflect	reflect	VERB
app01-4966	121	11	those	those	PRON
app01-4966	121	12	of	of	ADP
app01-4966	121	13	the	the	DET
app01-4966	121	14	european	european	PROPN
app01-4966	121	15	commission	commission	PROPN
app01-4966	121	16	.	.	PUNCT
app01-4966	122	1	financial	financial	ADJ
app01-4966	122	2	support	support	NOUN
app01-4966	122	3	from	from	ADP
app01-4966	122	4	czech	czech	PROPN
app01-4966	122	5	science	science	NOUN
app01-4966	122	6	foundation	foundation	NOUN
app01-4966	122	7	(	(	PUNCT
app01-4966	122	8	grant	grant	VERB
app01-4966	122	9	no	no	INTJ
app01-4966	122	10	.	.	NOUN
app01-4966	122	11	14	14	NUM
app01-4966	122	12	-	-	SYM
app01-4966	122	13	12837	12837	NUM
app01-4966	122	14	)	)	PUNCT
app01-4966	122	15	,	,	PUNCT
app01-4966	122	16	czech	czech	PROPN
app01-4966	122	17	academy	academy	PROPN
app01-4966	122	18	of	of	ADP
app01-4966	122	19	sciences	sciences	PROPN
app01-4966	122	20	(	(	PUNCT
app01-4966	122	21	project	project	NOUN
app01-4966	122	22	strategy	strategy	NOUN
app01-4966	122	23	av21	av21	PROPN
app01-4966	122	24	)	)	PUNCT
app01-4966	122	25	,	,	PUNCT
app01-4966	122	26	grant	grant	NOUN
app01-4966	122	27	agency	agency	NOUN
app01-4966	122	28	of	of	ADP
app01-4966	122	29	the	the	DET
app01-4966	122	30	czech	czech	PROPN
app01-4966	122	31	technical	technical	PROPN
app01-4966	122	32	university	university	PROPN
app01-4966	122	33	in	in	ADP
app01-4966	122	34	prague	prague	PROPN
app01-4966	122	35	(	(	PUNCT
app01-4966	122	36	grant	grant	VERB
app01-4966	122	37	no	no	INTJ
app01-4966	122	38	.	.	PUNCT
app01-4966	122	39	sgs17/138	sgs17/138	PROPN
app01-4966	122	40	/	/	SYM
app01-4966	122	41	ohk4/2t/14	ohk4/2t/14	PROPN
app01-4966	122	42	)	)	PUNCT
app01-4966	122	43	and	and	CCONJ
app01-4966	122	44	ministry	ministry	PROPN
app01-4966	122	45	of	of	ADP
app01-4966	122	46	education	education	PROPN
app01-4966	122	47	,	,	PUNCT
app01-4966	122	48	youth	youth	NOUN
app01-4966	122	49	and	and	CCONJ
app01-4966	122	50	sport	sport	NOUN
app01-4966	122	51	of	of	ADP
app01-4966	122	52	the	the	DET
app01-4966	122	53	czech	czech	PROPN
app01-4966	122	54	republic	republic	NOUN
app01-4966	122	55	(	(	PUNCT
app01-4966	122	56	program	program	NOUN
app01-4966	122	57	npu1	npu1	NOUN
app01-4966	122	58	,	,	PUNCT
app01-4966	122	59	project	project	NOUN
app01-4966	122	60	no	no	INTJ
app01-4966	122	61	.	.	PUNCT
app01-4966	123	1	lo1207	lo1207	PROPN
app01-4966	123	2	)	)	PUNCT
app01-4966	123	3	is	be	AUX
app01-4966	123	4	acknowledged	acknowledge	VERB
app01-4966	123	5	.	.	PUNCT
app01-4966	124	1	references	reference	NOUN
app01-4966	124	2	[	[	X
app01-4966	124	3	1	1	NUM
app01-4966	124	4	]	]	PUNCT
app01-4966	124	5	l.	l.	PROPN
app01-4966	124	6	giancarli	giancarli	PROPN
app01-4966	124	7	et	et	PROPN
app01-4966	124	8	al	al	PROPN
app01-4966	124	9	.	.	PROPN
app01-4966	124	10	overview	overview	NOUN
app01-4966	124	11	of	of	ADP
app01-4966	124	12	the	the	DET
app01-4966	124	13	iter	iter	NOUN
app01-4966	124	14	tbm	tbm	NOUN
app01-4966	124	15	program	program	NOUN
app01-4966	124	16	.	.	PUNCT
app01-4966	125	1	fusion	fusion	NOUN
app01-4966	125	2	engineering	engineering	NOUN
app01-4966	125	3	and	and	CCONJ
app01-4966	125	4	design	design	NOUN
app01-4966	125	5	87:395–402	87:395–402	NUM
app01-4966	125	6	,	,	PUNCT
app01-4966	125	7	2012	2012	NUM
app01-4966	125	8	.	.	PUNCT
app01-4966	126	1	[	[	X
app01-4966	126	2	2	2	NUM
app01-4966	126	3	]	]	PUNCT
app01-4966	126	4	r.	r.	PROPN
app01-4966	126	5	causey	causey	PROPN
app01-4966	126	6	et	et	PROPN
app01-4966	126	7	al	al	PROPN
app01-4966	126	8	.	.	PUNCT
app01-4966	126	9	tritium	tritium	NOUN
app01-4966	126	10	barriers	barrier	NOUN
app01-4966	126	11	and	and	CCONJ
app01-4966	126	12	tritium	tritium	NOUN
app01-4966	126	13	diffusion	diffusion	NOUN
app01-4966	126	14	in	in	ADP
app01-4966	126	15	fusion	fusion	NOUN
app01-4966	126	16	reactors	reactor	NOUN
app01-4966	126	17	.	.	PUNCT
app01-4966	127	1	sandia	sandia	PROPN
app01-4966	127	2	national	national	ADJ
app01-4966	127	3	laboratories	laboratory	NOUN
app01-4966	127	4	2009	2009	NUM
app01-4966	127	5	.	.	PUNCT
app01-4966	128	1	[	[	X
app01-4966	128	2	3	3	X
app01-4966	128	3	]	]	PUNCT
app01-4966	128	4	m.	m.	NOUN
app01-4966	128	5	abdou	abdou	PROPN
app01-4966	128	6	et	et	PROPN
app01-4966	128	7	al	al	PROPN
app01-4966	128	8	.	.	PROPN
app01-4966	128	9	blanket	blanket	PROPN
app01-4966	128	10	/	/	SYM
app01-4966	128	11	first	first	ADJ
app01-4966	128	12	wall	wall	NOUN
app01-4966	128	13	challenges	challenge	NOUN
app01-4966	128	14	and	and	CCONJ
app01-4966	128	15	required	require	VERB
app01-4966	128	16	rd	rd	NOUN
app01-4966	128	17	on	on	ADP
app01-4966	128	18	the	the	DET
app01-4966	128	19	pathway	pathway	NOUN
app01-4966	128	20	to	to	ADP
app01-4966	128	21	demo	demo	NOUN
app01-4966	128	22	.	.	PUNCT
app01-4966	129	1	fusion	fusion	NOUN
app01-4966	129	2	engineering	engineering	NOUN
app01-4966	129	3	and	and	CCONJ
app01-4966	129	4	design	design	NOUN
app01-4966	129	5	100:2–43	100:2–43	NUM
app01-4966	129	6	,	,	PUNCT
app01-4966	129	7	2015	2015	NUM
app01-4966	129	8	.	.	PUNCT
app01-4966	130	1	[	[	X
app01-4966	130	2	4	4	X
app01-4966	130	3	]	]	X
app01-4966	130	4	d.	d.	PROPN
app01-4966	130	5	demange	demange	PROPN
app01-4966	130	6	et	et	PROPN
app01-4966	130	7	al	al	PROPN
app01-4966	130	8	.	.	PROPN
app01-4966	130	9	tritium	tritium	NOUN
app01-4966	130	10	management	management	NOUN
app01-4966	130	11	and	and	CCONJ
app01-4966	130	12	anti	anti	ADJ
app01-4966	130	13	-	-	ADJ
app01-4966	130	14	permeation	permeation	ADJ
app01-4966	130	15	strategies	strategy	NOUN
app01-4966	130	16	for	for	ADP
app01-4966	130	17	three	three	NUM
app01-4966	130	18	different	different	ADJ
app01-4966	130	19	breeding	breeding	NOUN
app01-4966	130	20	blanket	blanket	NOUN
app01-4966	130	21	options	option	NOUN
app01-4966	130	22	foreseen	foresee	VERB
app01-4966	130	23	for	for	ADP
app01-4966	130	24	the	the	DET
app01-4966	130	25	european	european	PROPN
app01-4966	130	26	power	power	PROPN
app01-4966	130	27	plant	plant	NOUN
app01-4966	130	28	physics	physics	NOUN
app01-4966	130	29	and	and	CCONJ
app01-4966	130	30	technology	technology	NOUN
app01-4966	130	31	demonstration	demonstration	NOUN
app01-4966	130	32	reactor	reactor	NOUN
app01-4966	130	33	study	study	NOUN
app01-4966	130	34	.	.	PUNCT
app01-4966	131	1	fusion	fusion	NOUN
app01-4966	131	2	engineering	engineering	NOUN
app01-4966	131	3	and	and	CCONJ
app01-4966	131	4	design	design	NOUN
app01-4966	131	5	89:1219–1222	89:1219–1222	NUM
app01-4966	131	6	,	,	PUNCT
app01-4966	131	7	2014	2014	NUM
app01-4966	131	8	.	.	PUNCT
app01-4966	132	1	[	[	X
app01-4966	132	2	5	5	X
app01-4966	132	3	]	]	PUNCT
app01-4966	132	4	w.	w.	PROPN
app01-4966	132	5	krauss	krauss	PROPN
app01-4966	132	6	et	et	PROPN
app01-4966	132	7	al	al	PROPN
app01-4966	132	8	.	.	PUNCT
app01-4966	133	1	al	al	PROPN
app01-4966	133	2	-	-	PUNCT
app01-4966	133	3	based	base	VERB
app01-4966	133	4	anti	anti	ADJ
app01-4966	133	5	-	-	ADJ
app01-4966	133	6	corrosion	corrosion	ADJ
app01-4966	133	7	and	and	CCONJ
app01-4966	133	8	t	t	NOUN
app01-4966	133	9	-	-	PUNCT
app01-4966	133	10	permeation	permeation	NOUN
app01-4966	133	11	barrier	barrier	NOUN
app01-4966	133	12	development	development	NOUN
app01-4966	133	13	for	for	ADP
app01-4966	133	14	future	future	ADJ
app01-4966	133	15	demo	demo	NOUN
app01-4966	133	16	blankets	blanket	NOUN
app01-4966	133	17	.	.	PUNCT
app01-4966	134	1	journal	journal	NOUN
app01-4966	134	2	of	of	ADP
app01-4966	134	3	nuclear	nuclear	ADJ
app01-4966	134	4	materials	material	NOUN
app01-4966	134	5	417:1233–1236	417:1233–1236	NUM
app01-4966	134	6	,	,	PUNCT
app01-4966	134	7	2011	2011	NUM
app01-4966	134	8	.	.	PUNCT
app01-4966	135	1	[	[	X
app01-4966	135	2	6	6	NUM
app01-4966	135	3	]	]	PUNCT
app01-4966	135	4	j.	j.	PROPN
app01-4966	135	5	konys	konys	PROPN
app01-4966	135	6	et	et	PROPN
app01-4966	135	7	al	al	PROPN
app01-4966	135	8	.	.	PUNCT
app01-4966	135	9	corrosion	corrosion	NOUN
app01-4966	135	10	behaviour	behaviour	NOUN
app01-4966	135	11	of	of	ADP
app01-4966	135	12	eurofer	eurofer	PROPN
app01-4966	135	13	steel	steel	NOUN
app01-4966	135	14	in	in	ADP
app01-4966	135	15	flowing	flow	VERB
app01-4966	135	16	eutectic	eutectic	ADJ
app01-4966	135	17	pb-17li	pb-17li	ADJ
app01-4966	135	18	alloy	alloy	NOUN
app01-4966	135	19	.	.	PUNCT
app01-4966	136	1	journal	journal	NOUN
app01-4966	136	2	of	of	ADP
app01-4966	136	3	nuclear	nuclear	ADJ
app01-4966	136	4	materials	material	NOUN
app01-4966	136	5	329	329	NUM
app01-4966	136	6	-	-	SYM
app01-4966	136	7	333:1379–1383	333:1379–1383	NUM
app01-4966	136	8	,	,	PUNCT
app01-4966	136	9	2004	2004	NUM
app01-4966	136	10	.	.	PUNCT
app01-4966	137	1	[	[	X
app01-4966	137	2	7	7	X
app01-4966	137	3	]	]	X
app01-4966	137	4	j.	j.	PROPN
app01-4966	137	5	konys	konys	PROPN
app01-4966	137	6	et	et	PROPN
app01-4966	138	1	al	al	PROPN
app01-4966	138	2	.	.	PROPN
app01-4966	138	3	compatibility	compatibility	NOUN
app01-4966	138	4	behaviour	behaviour	NOUN
app01-4966	138	5	of	of	ADP
app01-4966	138	6	eurofer	eurofer	PROPN
app01-4966	138	7	steel	steel	NOUN
app01-4966	138	8	in	in	ADP
app01-4966	138	9	flowing	flow	VERB
app01-4966	138	10	pb-17li	pb-17li	PROPN
app01-4966	138	11	.	.	PROPN
app01-4966	139	1	journal	journal	PROPN
app01-4966	139	2	of	of	ADP
app01-4966	139	3	nuclear	nuclear	ADJ
app01-4966	139	4	materials	material	NOUN
app01-4966	139	5	386	386	NUM
app01-4966	139	6	-	-	SYM
app01-4966	139	7	388:678–681	388:678–681	NUM
app01-4966	139	8	,	,	PUNCT
app01-4966	139	9	2009	2009	NUM
app01-4966	139	10	.	.	PUNCT
app01-4966	140	1	[	[	X
app01-4966	140	2	8	8	NUM
app01-4966	140	3	]	]	X
app01-4966	140	4	h.	h.	PROPN
app01-4966	140	5	glasbrenner	glasbrenner	PROPN
app01-4966	140	6	et	et	PROPN
app01-4966	140	7	al	al	PROPN
app01-4966	140	8	.	.	PUNCT
app01-4966	140	9	hydrogen	hydrogen	PROPN
app01-4966	140	10	permeation	permeation	NOUN
app01-4966	140	11	behaviour	behaviour	NOUN
app01-4966	140	12	of	of	ADP
app01-4966	140	13	hot	hot	ADJ
app01-4966	140	14	-	-	PUNCT
app01-4966	140	15	dip	dip	NOUN
app01-4966	140	16	aluminized	aluminize	VERB
app01-4966	140	17	manet	manet	NOUN
app01-4966	140	18	steel	steel	NOUN
app01-4966	140	19	.	.	PUNCT
app01-4966	140	20	fusion	fusion	NOUN
app01-4966	140	21	technology	technology	NOUN
app01-4966	140	22	28:1159–1164	28:1159–1164	NOUN
app01-4966	140	23	,	,	PUNCT
app01-4966	140	24	1995	1995	NUM
app01-4966	140	25	.	.	PUNCT
app01-4966	141	1	[	[	X
app01-4966	141	2	9	9	NUM
app01-4966	141	3	]	]	PUNCT
app01-4966	141	4	k.	k.	NOUN
app01-4966	141	5	forcey	forcey	PROPN
app01-4966	141	6	et	et	PROPN
app01-4966	141	7	al	al	PROPN
app01-4966	141	8	.	.	PUNCT
app01-4966	142	1	the	the	DET
app01-4966	142	2	formation	formation	NOUN
app01-4966	142	3	of	of	ADP
app01-4966	142	4	tritium	tritium	NOUN
app01-4966	142	5	permeation	permeation	NOUN
app01-4966	142	6	barriers	barrier	NOUN
app01-4966	142	7	by	by	ADP
app01-4966	142	8	cvd	cvd	PROPN
app01-4966	142	9	.	.	PUNCT
app01-4966	143	1	journal	journal	PROPN
app01-4966	143	2	of	of	ADP
app01-4966	143	3	nuclear	nuclear	ADJ
app01-4966	143	4	materials	material	NOUN
app01-4966	143	5	200:417–420	200:417–420	NUM
app01-4966	143	6	,	,	PUNCT
app01-4966	143	7	1993	1993	NUM
app01-4966	143	8	.	.	PUNCT
app01-4966	144	1	[	[	X
app01-4966	144	2	10	10	NUM
app01-4966	144	3	]	]	X
app01-4966	144	4	i.	i.	NOUN
app01-4966	144	5	tazhibaeva	tazhibaeva	PROPN
app01-4966	144	6	et	et	PROPN
app01-4966	144	7	al	al	PROPN
app01-4966	144	8	.	.	PUNCT
app01-4966	145	1	hydrogen	hydrogen	PROPN
app01-4966	145	2	permeation	permeation	NOUN
app01-4966	145	3	through	through	ADP
app01-4966	145	4	steels	steel	NOUN
app01-4966	145	5	and	and	CCONJ
app01-4966	145	6	alloys	alloy	NOUN
app01-4966	145	7	with	with	ADP
app01-4966	145	8	different	different	ADJ
app01-4966	145	9	protective	protective	ADJ
app01-4966	145	10	coatings	coating	NOUN
app01-4966	145	11	.	.	PUNCT
app01-4966	146	1	fusion	fusion	NOUN
app01-4966	146	2	engineering	engineering	NOUN
app01-4966	146	3	and	and	CCONJ
app01-4966	146	4	design	design	NOUN
app01-4966	146	5	51	51	NUM
app01-4966	146	6	-	-	SYM
app01-4966	146	7	52:199–205	52:199–205	NUM
app01-4966	146	8	,	,	PUNCT
app01-4966	146	9	2000	2000	NUM
app01-4966	146	10	.	.	PUNCT
app01-4966	147	1	[	[	X
app01-4966	147	2	11	11	NUM
app01-4966	147	3	]	]	PUNCT
app01-4966	147	4	x.	x.	NOUN
app01-4966	147	5	xiang	xiang	PROPN
app01-4966	147	6	et	et	PROPN
app01-4966	147	7	al	al	PROPN
app01-4966	147	8	.	.	PUNCT
app01-4966	147	9	preparation	preparation	NOUN
app01-4966	147	10	technique	technique	NOUN
app01-4966	147	11	and	and	CCONJ
app01-4966	147	12	alloying	alloy	VERB
app01-4966	147	13	effect	effect	NOUN
app01-4966	147	14	of	of	ADP
app01-4966	147	15	aluminide	aluminide	NOUN
app01-4966	147	16	coatings	coating	NOUN
app01-4966	147	17	as	as	ADP
app01-4966	147	18	tritium	tritium	NOUN
app01-4966	147	19	permeation	permeation	NOUN
app01-4966	147	20	barriers	barrier	NOUN
app01-4966	147	21	:	:	PUNCT
app01-4966	147	22	a	a	DET
app01-4966	147	23	review	review	NOUN
app01-4966	147	24	.	.	PUNCT
app01-4966	148	1	international	international	ADJ
app01-4966	148	2	journal	journal	PROPN
app01-4966	148	3	of	of	ADP
app01-4966	148	4	hydrogen	hydrogen	PROPN
app01-4966	148	5	energy	energy	PROPN
app01-4966	148	6	40:3697–3707	40:3697–3707	NOUN
app01-4966	148	7	,	,	PUNCT
app01-4966	148	8	2015	2015	NUM
app01-4966	148	9	.	.	PUNCT
app01-4966	149	1	[	[	X
app01-4966	149	2	12	12	NUM
app01-4966	149	3	]	]	PUNCT
app01-4966	149	4	t.	t.	NOUN
app01-4966	149	5	sample	sample	NOUN
app01-4966	149	6	et	et	PROPN
app01-4966	149	7	al	al	PROPN
app01-4966	149	8	.	.	PUNCT
app01-4966	150	1	the	the	DET
app01-4966	150	2	hydrogen	hydrogen	PROPN
app01-4966	150	3	permeation	permeation	NOUN
app01-4966	150	4	behaviour	behaviour	NOUN
app01-4966	150	5	of	of	ADP
app01-4966	150	6	aluminised	aluminise	VERB
app01-4966	150	7	coated	coat	VERB
app01-4966	150	8	martensitic	martensitic	ADJ
app01-4966	150	9	steels	steel	NOUN
app01-4966	150	10	under	under	ADP
app01-4966	150	11	gaseous	gaseous	ADJ
app01-4966	150	12	hydrogen	hydrogen	NOUN
app01-4966	150	13	,	,	PUNCT
app01-4966	150	14	liquid	liquid	ADJ
app01-4966	150	15	pb-17li	pb-17li	NOUN
app01-4966	150	16	/	/	SYM
app01-4966	150	17	hydrogen	hydrogen	NOUN
app01-4966	150	18	and	and	CCONJ
app01-4966	150	19	cyclic	cyclic	ADJ
app01-4966	150	20	thermal	thermal	ADJ
app01-4966	150	21	loads	load	NOUN
app01-4966	150	22	.	.	PUNCT
app01-4966	151	1	journal	journal	NOUN
app01-4966	151	2	of	of	ADP
app01-4966	151	3	nuclear	nuclear	ADJ
app01-4966	151	4	materials	material	NOUN
app01-4966	151	5	283	283	NUM
app01-4966	151	6	-	-	SYM
app01-4966	151	7	287:1272–1276	287:1272–1276	NOUN
app01-4966	151	8	,	,	PUNCT
app01-4966	151	9	2000	2000	NUM
app01-4966	151	10	.	.	PUNCT
app01-4966	152	1	[	[	X
app01-4966	152	2	13	13	NUM
app01-4966	152	3	]	]	PUNCT
app01-4966	152	4	m.	m.	NOUN
app01-4966	152	5	kondo	kondo	PROPN
app01-4966	152	6	et	et	PROPN
app01-4966	152	7	al	al	PROPN
app01-4966	152	8	.	.	PUNCT
app01-4966	152	9	nitriding	nitride	VERB
app01-4966	152	10	treatment	treatment	NOUN
app01-4966	152	11	of	of	ADP
app01-4966	152	12	reduced	reduced	ADJ
app01-4966	152	13	activation	activation	NOUN
app01-4966	152	14	ferritic	ferritic	ADJ
app01-4966	152	15	steel	steel	NOUN
app01-4966	152	16	as	as	ADP
app01-4966	152	17	functional	functional	ADJ
app01-4966	152	18	layer	layer	NOUN
app01-4966	152	19	for	for	ADP
app01-4966	152	20	liquid	liquid	ADJ
app01-4966	152	21	breeder	breeder	NOUN
app01-4966	152	22	blanket	blanket	NOUN
app01-4966	152	23	.	.	PUNCT
app01-4966	153	1	plasma	plasma	NOUN
app01-4966	153	2	and	and	CCONJ
app01-4966	153	3	fusion	fusion	NOUN
app01-4966	153	4	research	research	NOUN
app01-4966	153	5	6:2405117	6:2405117	NUM
app01-4966	153	6	,	,	PUNCT
app01-4966	153	7	2011	2011	NUM
app01-4966	153	8	.	.	PUNCT
app01-4966	154	1	[	[	X
app01-4966	154	2	14	14	NUM
app01-4966	154	3	]	]	X
app01-4966	154	4	active	active	ADJ
app01-4966	154	5	screen	screen	NOUN
app01-4966	154	6	plasma	plasma	NOUN
app01-4966	154	7	nitriding	nitride	VERB
app01-4966	154	8	.	.	PUNCT
app01-4966	155	1	[	[	X
app01-4966	155	2	online	online	X
app01-4966	155	3	]	]	X
app01-4966	155	4	,	,	PUNCT
app01-4966	155	5	http://web.ald-vt.de/cms/vakuumtechnologie/technologien/vacuum-heattreatment/aspn-active-screen-plasma-nitriding/	http://web.ald-vt.de/cms/vakuumtechnologie/technologien/vacuum-heattreatment/aspn-active-screen-plasma-nitriding/	PROPN
app01-4966	155	6	,	,	PUNCT
app01-4966	155	7	242017	242017	NUM
app01-4966	155	8	.	.	PUNCT
app01-4966	156	1	[	[	X
app01-4966	156	2	15	15	NUM
app01-4966	156	3	]	]	X
app01-4966	156	4	m.	m.	NOUN
app01-4966	156	5	lee	lee	PROPN
app01-4966	156	6	et	et	PROPN
app01-4966	156	7	al	al	PROPN
app01-4966	156	8	.	.	PUNCT
app01-4966	157	1	a	a	DET
app01-4966	157	2	basic	basic	ADJ
app01-4966	157	3	study	study	NOUN
app01-4966	157	4	on	on	ADP
app01-4966	157	5	the	the	DET
app01-4966	157	6	solid	solid	ADJ
app01-4966	157	7	-	-	PUNCT
app01-4966	157	8	state	state	NOUN
app01-4966	157	9	nitriding	nitriding	NOUN
app01-4966	157	10	of	of	ADP
app01-4966	157	11	aluminum	aluminum	NOUN
app01-4966	157	12	by	by	ADP
app01-4966	157	13	mechanical	mechanical	ADJ
app01-4966	157	14	alloying	alloying	NOUN
app01-4966	157	15	using	use	VERB
app01-4966	157	16	a	a	DET
app01-4966	157	17	planetary	planetary	ADJ
app01-4966	157	18	ball	ball	NOUN
app01-4966	157	19	mill	mill	NOUN
app01-4966	157	20	.	.	PUNCT
app01-4966	158	1	advanced	advanced	ADJ
app01-4966	158	2	powder	powder	NOUN
app01-4966	158	3	technology	technology	NOUN
app01-4966	158	4	8:291–299	8:291–299	NUM
app01-4966	158	5	,	,	PUNCT
app01-4966	158	6	1997	1997	NUM
app01-4966	158	7	.	.	PUNCT
app01-4966	159	1	[	[	X
app01-4966	159	2	16	16	NUM
app01-4966	159	3	]	]	X
app01-4966	159	4	c.	c.	PROPN
app01-4966	159	5	costa	costa	PROPN
app01-4966	159	6	et	et	PROPN
app01-4966	159	7	al	al	PROPN
app01-4966	159	8	.	.	PROPN
app01-4966	159	9	study	study	NOUN
app01-4966	159	10	of	of	ADP
app01-4966	159	11	the	the	DET
app01-4966	159	12	nitrided	nitride	VERB
app01-4966	159	13	layer	layer	NOUN
app01-4966	159	14	obtained	obtain	VERB
app01-4966	159	15	by	by	ADP
app01-4966	159	16	different	different	ADJ
app01-4966	159	17	nitriding	nitride	VERB
app01-4966	159	18	methods	method	NOUN
app01-4966	159	19	.	.	PUNCT
app01-4966	160	1	revista	revista	PROPN
app01-4966	160	2	matãľria	matãľria	PROPN
app01-4966	161	1	20:460–465	20:460–465	NUM
app01-4966	161	2	,	,	PUNCT
app01-4966	161	3	2015	2015	NUM
app01-4966	161	4	.	.	PUNCT
app01-4966	162	1	[	[	X
app01-4966	162	2	17	17	NUM
app01-4966	162	3	]	]	X
app01-4966	162	4	p.	p.	NOUN
app01-4966	162	5	giroux	giroux	NOUN
app01-4966	162	6	et	et	PROPN
app01-4966	163	1	al	al	PROPN
app01-4966	163	2	.	.	PROPN
app01-4966	163	3	mechanical	mechanical	ADJ
app01-4966	163	4	and	and	CCONJ
app01-4966	163	5	microtructural	microtructural	ADJ
app01-4966	163	6	stability	stability	NOUN
app01-4966	163	7	of	of	ADP
app01-4966	163	8	p92	p92	ADJ
app01-4966	163	9	steel	steel	NOUN
app01-4966	163	10	under	under	ADP
app01-4966	163	11	unaxial	unaxial	ADJ
app01-4966	163	12	tension	tension	NOUN
app01-4966	163	13	at	at	ADP
app01-4966	163	14	high	high	ADJ
app01-4966	163	15	temperature	temperature	NOUN
app01-4966	163	16	.	.	PUNCT
app01-4966	164	1	materials	material	NOUN
app01-4966	164	2	science	science	NOUN
app01-4966	164	3	and	and	CCONJ
app01-4966	164	4	engineering	engineer	VERB
app01-4966	164	5	a	a	DET
app01-4966	164	6	527:3984–3993	527:3984–3993	NUM
app01-4966	164	7	,	,	PUNCT
app01-4966	164	8	2010	2010	NUM
app01-4966	164	9	.	.	PUNCT
app01-4966	165	1	[	[	X
app01-4966	165	2	18	18	NUM
app01-4966	165	3	]	]	PUNCT
app01-4966	165	4	eurofer-97	eurofer-97	PROPN
app01-4966	165	5	technical	technical	ADJ
app01-4966	165	6	specification	specification	NOUN
app01-4966	165	7	.	.	PUNCT
app01-4966	166	1	[	[	X
app01-4966	166	2	online	online	X
app01-4966	166	3	]	]	X
app01-4966	166	4	,	,	PUNCT
app01-4966	166	5	www.uni-lj.si/mma/1-f4e-2008-grt010.%20technical%20specification/2013070115554947/	www.uni-lj.si/mma/1-f4e-2008-grt010.%20technical%20specification/2013070115554947/	PROPN
app01-4966	166	6	,	,	PUNCT
app01-4966	166	7	1122017	1122017	NUM
app01-4966	166	8	.	.	PUNCT
app01-4966	167	1	[	[	X
app01-4966	167	2	19	19	NUM
app01-4966	167	3	]	]	PUNCT
app01-4966	167	4	j.	j.	PROPN
app01-4966	167	5	engels	engels	PROPN
app01-4966	167	6	et	et	PROPN
app01-4966	167	7	al	al	PROPN
app01-4966	167	8	.	.	PUNCT
app01-4966	167	9	hydrogen	hydrogen	NOUN
app01-4966	167	10	saturation	saturation	NOUN
app01-4966	167	11	and	and	CCONJ
app01-4966	167	12	permeation	permeation	NOUN
app01-4966	167	13	barrier	barrier	NOUN
app01-4966	167	14	performance	performance	NOUN
app01-4966	167	15	of	of	ADP
app01-4966	167	16	yttrium	yttrium	NOUN
app01-4966	167	17	oxide	oxide	NOUN
app01-4966	167	18	coatings	coating	NOUN
app01-4966	167	19	.	.	PUNCT
app01-4966	168	1	fusion	fusion	NOUN
app01-4966	168	2	engineering	engineering	NOUN
app01-4966	168	3	and	and	CCONJ
app01-4966	168	4	design	design	NOUN
app01-4966	168	5	124:1140–1143	124:1140–1143	NUM
app01-4966	168	6	,	,	PUNCT
app01-4966	168	7	2017	2017	NUM
app01-4966	168	8	.	.	PUNCT
app01-4966	169	1	[	[	X
app01-4966	169	2	20	20	NUM
app01-4966	169	3	]	]	PUNCT
app01-4966	169	4	sodick	sodick	NOUN
app01-4966	169	5	wire	wire	NOUN
app01-4966	169	6	edm	edm	PROPN
app01-4966	169	7	technology	technology	NOUN
app01-4966	169	8	.	.	PUNCT
app01-4966	170	1	[	[	X
app01-4966	170	2	online	online	X
app01-4966	170	3	]	]	X
app01-4966	170	4	,	,	PUNCT
app01-4966	170	5	http://www.sodick.com/technology/wireedmtech	http://www.sodick.com/technology/wireedmtech	PROPN
app01-4966	170	6	,	,	PUNCT
app01-4966	170	7	1632017	1632017	NUM
app01-4966	170	8	.	.	PUNCT
app01-4966	171	1	[	[	X
app01-4966	171	2	21	21	NUM
app01-4966	171	3	]	]	X
app01-4966	171	4	v.	v.	ADP
app01-4966	171	5	nemanic	nemanic	PROPN
app01-4966	171	6	et	et	PROPN
app01-4966	171	7	al	al	PROPN
app01-4966	171	8	.	.	PROPN
app01-4966	171	9	sensitivity	sensitivity	NOUN
app01-4966	171	10	enhancement	enhancement	NOUN
app01-4966	171	11	in	in	ADP
app01-4966	171	12	hydrogen	hydrogen	NOUN
app01-4966	171	13	permeation	permeation	NOUN
app01-4966	171	14	measurements	measurement	NOUN
app01-4966	171	15	.	.	PUNCT
app01-4966	172	1	journal	journal	NOUN
app01-4966	172	2	of	of	ADP
app01-4966	172	3	vacuum	vacuum	PROPN
app01-4966	172	4	science	science	NOUN
app01-4966	172	5	and	and	CCONJ
app01-4966	172	6	technology	technology	NOUN
app01-4966	172	7	a	a	DET
app01-4966	172	8	28	28	NUM
app01-4966	172	9	(	(	PUNCT
app01-4966	172	10	4):578–582	4):578–582	NOUN
app01-4966	172	11	,	,	PUNCT
app01-4966	172	12	2010	2010	NUM
app01-4966	172	13	.	.	PUNCT
app01-4966	173	1	28	28	NUM
app01-4966	173	2	vol	vol	NOUN
app01-4966	173	3	.	.	PUNCT
app01-4966	174	1	17/2018	17/2018	NUM
app01-4966	174	2	thin	thin	ADJ
app01-4966	174	3	nitride	nitride	ADJ
app01-4966	174	4	layers	layer	NOUN
app01-4966	174	5	as	as	ADP
app01-4966	174	6	permeation	permeation	NOUN
app01-4966	174	7	barriers	barrier	NOUN
app01-4966	174	8	[	[	X
app01-4966	174	9	22	22	NUM
app01-4966	174	10	]	]	PUNCT
app01-4966	174	11	v.	v.	ADP
app01-4966	174	12	nemanic	nemanic	PROPN
app01-4966	174	13	et	et	PROPN
app01-4966	174	14	al	al	PROPN
app01-4966	174	15	.	.	PUNCT
app01-4966	175	1	hydrogen	hydrogen	PROPN
app01-4966	175	2	permeation	permeation	NOUN
app01-4966	175	3	through	through	ADP
app01-4966	175	4	silicon	silicon	NOUN
app01-4966	175	5	nitride	nitride	ADJ
app01-4966	175	6	films	film	NOUN
app01-4966	175	7	.	.	PUNCT
app01-4966	176	1	journal	journal	NOUN
app01-4966	176	2	of	of	ADP
app01-4966	176	3	alloys	alloy	NOUN
app01-4966	176	4	and	and	CCONJ
app01-4966	176	5	compounds	compound	NOUN
app01-4966	176	6	539:184–189	539:184–189	NUM
app01-4966	176	7	,	,	PUNCT
app01-4966	176	8	2012	2012	NUM
app01-4966	176	9	.	.	PUNCT
app01-4966	177	1	[	[	X
app01-4966	177	2	23	23	NUM
app01-4966	177	3	]	]	X
app01-4966	177	4	j.	j.	PROPN
app01-4966	177	5	matejicek	matejicek	PROPN
app01-4966	177	6	et	et	PROPN
app01-4966	177	7	al	al	PROPN
app01-4966	177	8	.	.	PUNCT
app01-4966	177	9	characterization	characterization	NOUN
app01-4966	177	10	of	of	ADP
app01-4966	177	11	some	some	DET
app01-4966	177	12	less	less	ADV
app01-4966	177	13	-	-	PUNCT
app01-4966	177	14	common	common	ADJ
app01-4966	177	15	nitrides	nitride	NOUN
app01-4966	177	16	as	as	ADP
app01-4966	177	17	permeation	permeation	NOUN
app01-4966	177	18	barriers	barrier	NOUN
app01-4966	177	19	,	,	PUNCT
app01-4966	177	20	paper	paper	NOUN
app01-4966	177	21	in	in	ADP
app01-4966	177	22	preparation	preparation	NOUN
app01-4966	177	23	.	.	PUNCT
app01-4966	178	1	[	[	X
app01-4966	178	2	24	24	NUM
app01-4966	178	3	]	]	X
app01-4966	178	4	b.	b.	PROPN
app01-4966	178	5	miao	miao	PROPN
app01-4966	178	6	et	et	PROPN
app01-4966	178	7	al	al	PROPN
app01-4966	178	8	.	.	PUNCT
app01-4966	179	1	the	the	DET
app01-4966	179	2	effect	effect	NOUN
app01-4966	179	3	of	of	ADP
app01-4966	179	4	sand	sand	NOUN
app01-4966	179	5	blasting	blast	VERB
app01-4966	179	6	pretreatment	pretreatment	NOUN
app01-4966	179	7	on	on	ADP
app01-4966	179	8	plasma	plasma	NOUN
app01-4966	179	9	nitriding	nitride	VERB
app01-4966	179	10	.	.	PUNCT
app01-4966	180	1	vacuum	vacuum	PROPN
app01-4966	180	2	136:46–50	136:46–50	PROPN
app01-4966	180	3	,	,	PUNCT
app01-4966	180	4	2017	2017	NUM
app01-4966	180	5	.	.	PUNCT
app01-4966	181	1	29	29	NUM
app01-4966	181	2	acta	acta	PROPN
app01-4966	181	3	polytechnica	polytechnica	PROPN
app01-4966	181	4	ctu	ctu	NOUN
app01-4966	181	5	proceedings	proceeding	NOUN
app01-4966	181	6	17:24–29	17:24–29	NUM
app01-4966	181	7	,	,	PUNCT
app01-4966	181	8	2018	2018	NUM
app01-4966	181	9	1	1	NUM
app01-4966	181	10	introduction	introduction	NOUN
app01-4966	181	11	2	2	NUM
app01-4966	181	12	experiment	experiment	NOUN
app01-4966	181	13	3	3	NUM
app01-4966	181	14	results	result	VERB
app01-4966	181	15	3.1	3.1	NUM
app01-4966	181	16	diffusion	diffusion	NOUN
app01-4966	181	17	-	-	PUNCT
app01-4966	181	18	nitrided	nitride	VERB
app01-4966	181	19	layers	layer	NOUN
app01-4966	181	20	3.2	3.2	NUM
app01-4966	181	21	pvd	pvd	PROPN
app01-4966	181	22	coatings	coating	NOUN
app01-4966	181	23	4	4	NUM
app01-4966	181	24	conclusions	conclusion	NOUN
app01-4966	181	25	acknowledgements	acknowledgement	NOUN
app01-4966	181	26	references	reference	NOUN