id	sid	tid	token	lemma	pos
app01-6033	1	1	acta	acta	PROPN
app01-6033	1	2	polytechnica	polytechnica	PROPN
app01-6033	1	3	ctu	ctu	PROPN
app01-6033	1	4	proceedings	proceeding	NOUN
app01-6033	1	5	doi:10.14311	doi:10.14311	PROPN
app01-6033	1	6	/	/	SYM
app01-6033	1	7	app.2019.25.0083	app.2019.25.0083	PROPN
app01-6033	1	8	acta	acta	PROPN
app01-6033	1	9	polytechnica	polytechnica	PROPN
app01-6033	1	10	ctu	ctu	NOUN
app01-6033	1	11	proceedings	proceeding	NOUN
app01-6033	1	12	25:83–88	25:83–88	NUM
app01-6033	1	13	,	,	PUNCT
app01-6033	1	14	2019	2019	NUM
app01-6033	1	15	©	©	PROPN
app01-6033	1	16	czech	czech	PROPN
app01-6033	1	17	technical	technical	PROPN
app01-6033	1	18	university	university	PROPN
app01-6033	1	19	in	in	ADP
app01-6033	1	20	prague	prague	PROPN
app01-6033	1	21	,	,	PUNCT
app01-6033	1	22	2019	2019	NUM
app01-6033	1	23	available	available	ADJ
app01-6033	1	24	online	online	ADV
app01-6033	1	25	at	at	ADP
app01-6033	1	26	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-6033	1	27	feasibility	feasibility	NOUN
app01-6033	1	28	study	study	NOUN
app01-6033	1	29	of	of	ADP
app01-6033	1	30	micro	micro	ADJ
app01-6033	1	31	-	-	ADJ
app01-6033	1	32	lattice	lattice	ADJ
app01-6033	1	33	structures	structure	NOUN
app01-6033	1	34	by	by	ADP
app01-6033	1	35	multiphoton	multiphoton	NOUN
app01-6033	1	36	lithography	lithography	NOUN
app01-6033	1	37	markus	markus	NOUN
app01-6033	1	38	wimmer∗	wimmer∗	PROPN
app01-6033	1	39	,	,	PUNCT
app01-6033	1	40	zoltan	zoltan	PROPN
app01-6033	1	41	major	major	ADJ
app01-6033	1	42	johannes	johannes	PROPN
app01-6033	1	43	kepler	kepler	PROPN
app01-6033	1	44	university	university	PROPN
app01-6033	1	45	linz	linz	PROPN
app01-6033	1	46	,	,	PUNCT
app01-6033	1	47	institute	institute	NOUN
app01-6033	1	48	of	of	ADP
app01-6033	1	49	polymer	polymer	NOUN
app01-6033	1	50	product	product	NOUN
app01-6033	1	51	engineering	engineering	NOUN
app01-6033	1	52	,	,	PUNCT
app01-6033	1	53	altenberger	altenberger	NOUN
app01-6033	1	54	strasse	strasse	PROPN
app01-6033	1	55	69	69	NUM
app01-6033	1	56	,	,	PUNCT
app01-6033	1	57	4040	4040	NUM
app01-6033	1	58	linz	linz	NOUN
app01-6033	1	59	,	,	PUNCT
app01-6033	1	60	austria	austria	PROPN
app01-6033	1	61	∗	∗	NOUN
app01-6033	1	62	corresponding	correspond	VERB
app01-6033	1	63	author	author	NOUN
app01-6033	1	64	:	:	PUNCT
app01-6033	1	65	markus.wimmer@outlook.at	markus.wimmer@outlook.at	PROPN
app01-6033	1	66	abstract	abstract	NOUN
app01-6033	1	67	.	.	PUNCT
app01-6033	2	1	the	the	DET
app01-6033	2	2	paper	paper	NOUN
app01-6033	2	3	describes	describe	VERB
app01-6033	2	4	the	the	DET
app01-6033	2	5	possibilities	possibility	NOUN
app01-6033	2	6	of	of	ADP
app01-6033	2	7	additive	additive	ADJ
app01-6033	2	8	manufacturing	manufacturing	NOUN
app01-6033	2	9	with	with	ADP
app01-6033	2	10	multiphoton	multiphoton	NOUN
app01-6033	2	11	lithography	lithography	NOUN
app01-6033	2	12	.	.	PUNCT
app01-6033	3	1	the	the	DET
app01-6033	3	2	basis	basis	NOUN
app01-6033	3	3	of	of	ADP
app01-6033	3	4	this	this	DET
app01-6033	3	5	technology	technology	NOUN
app01-6033	3	6	is	be	AUX
app01-6033	3	7	that	that	SCONJ
app01-6033	3	8	a	a	DET
app01-6033	3	9	laser	laser	NOUN
app01-6033	3	10	beam	beam	NOUN
app01-6033	3	11	(	(	PUNCT
app01-6033	3	12	with	with	ADP
app01-6033	3	13	a	a	DET
app01-6033	3	14	certain	certain	ADJ
app01-6033	3	15	wavelength	wavelength	NOUN
app01-6033	3	16	)	)	PUNCT
app01-6033	3	17	is	be	AUX
app01-6033	3	18	fired	fire	VERB
app01-6033	3	19	into	into	ADP
app01-6033	3	20	the	the	DET
app01-6033	3	21	mixture	mixture	NOUN
app01-6033	3	22	of	of	ADP
app01-6033	3	23	a	a	DET
app01-6033	3	24	monomer	monomer	NOUN
app01-6033	3	25	and	and	CCONJ
app01-6033	3	26	a	a	DET
app01-6033	3	27	photo	photo	NOUN
app01-6033	3	28	-	-	PUNCT
app01-6033	3	29	initiator	initiator	NOUN
app01-6033	3	30	.	.	PUNCT
app01-6033	4	1	when	when	SCONJ
app01-6033	4	2	the	the	DET
app01-6033	4	3	energy	energy	NOUN
app01-6033	4	4	of	of	ADP
app01-6033	4	5	the	the	DET
app01-6033	4	6	laser	laser	NOUN
app01-6033	4	7	is	be	AUX
app01-6033	4	8	high	high	ADJ
app01-6033	4	9	enough	enough	ADV
app01-6033	4	10	,	,	PUNCT
app01-6033	4	11	the	the	DET
app01-6033	4	12	latter	latter	ADJ
app01-6033	4	13	acts	act	VERB
app01-6033	4	14	as	as	ADP
app01-6033	4	15	a	a	DET
app01-6033	4	16	catalyser	catalyser	NOUN
app01-6033	4	17	for	for	ADP
app01-6033	4	18	the	the	DET
app01-6033	4	19	polymerization	polymerization	NOUN
app01-6033	4	20	of	of	ADP
app01-6033	4	21	the	the	DET
app01-6033	4	22	monomer	monomer	NOUN
app01-6033	4	23	compound	compound	NOUN
app01-6033	4	24	.	.	PUNCT
app01-6033	5	1	this	this	DET
app01-6033	5	2	study	study	NOUN
app01-6033	5	3	focuses	focus	VERB
app01-6033	5	4	on	on	ADP
app01-6033	5	5	the	the	DET
app01-6033	5	6	influences	influence	NOUN
app01-6033	5	7	of	of	ADP
app01-6033	5	8	certain	certain	ADJ
app01-6033	5	9	parameters	parameter	NOUN
app01-6033	5	10	of	of	ADP
app01-6033	5	11	the	the	DET
app01-6033	5	12	multiphoton	multiphoton	NOUN
app01-6033	5	13	lithography	lithography	NOUN
app01-6033	5	14	process	process	NOUN
app01-6033	5	15	.	.	PUNCT
app01-6033	6	1	one	one	NUM
app01-6033	6	2	of	of	ADP
app01-6033	6	3	the	the	DET
app01-6033	6	4	important	important	ADJ
app01-6033	6	5	aspects	aspect	NOUN
app01-6033	6	6	is	be	AUX
app01-6033	6	7	the	the	DET
app01-6033	6	8	choice	choice	NOUN
app01-6033	6	9	of	of	ADP
app01-6033	6	10	the	the	DET
app01-6033	6	11	solvent	solvent	NOUN
app01-6033	6	12	for	for	ADP
app01-6033	6	13	the	the	DET
app01-6033	6	14	post	post	NOUN
app01-6033	6	15	processing	processing	NOUN
app01-6033	6	16	.	.	PUNCT
app01-6033	7	1	in	in	ADP
app01-6033	7	2	sequence	sequence	NOUN
app01-6033	7	3	to	to	ADP
app01-6033	7	4	the	the	DET
app01-6033	7	5	solvent	solvent	NOUN
app01-6033	7	6	problem	problem	NOUN
app01-6033	7	7	,	,	PUNCT
app01-6033	7	8	the	the	DET
app01-6033	7	9	influence	influence	NOUN
app01-6033	7	10	of	of	ADP
app01-6033	7	11	the	the	DET
app01-6033	7	12	layer	layer	NOUN
app01-6033	7	13	height	height	NOUN
app01-6033	7	14	is	be	AUX
app01-6033	7	15	examined	examine	VERB
app01-6033	7	16	.	.	PUNCT
app01-6033	8	1	furthermore	furthermore	ADV
app01-6033	8	2	the	the	DET
app01-6033	8	3	limits	limit	NOUN
app01-6033	8	4	and	and	CCONJ
app01-6033	8	5	possibilities	possibility	NOUN
app01-6033	8	6	of	of	ADP
app01-6033	8	7	the	the	DET
app01-6033	8	8	setup	setup	NOUN
app01-6033	8	9	in	in	ADP
app01-6033	8	10	use	use	NOUN
app01-6033	8	11	are	be	AUX
app01-6033	8	12	investigated	investigate	VERB
app01-6033	8	13	.	.	PUNCT
app01-6033	9	1	as	as	ADP
app01-6033	9	2	an	an	DET
app01-6033	9	3	example	example	NOUN
app01-6033	9	4	the	the	DET
app01-6033	9	5	differences	difference	NOUN
app01-6033	9	6	in	in	ADP
app01-6033	9	7	fabrication	fabrication	NOUN
app01-6033	9	8	with	with	ADP
app01-6033	9	9	the	the	DET
app01-6033	9	10	laser	laser	NOUN
app01-6033	9	11	firing	fire	VERB
app01-6033	9	12	with	with	ADP
app01-6033	9	13	"	"	PUNCT
app01-6033	9	14	constant	constant	ADJ
app01-6033	9	15	frequency	frequency	NOUN
app01-6033	9	16	"	"	PUNCT
app01-6033	9	17	and	and	CCONJ
app01-6033	9	18	"	"	PUNCT
app01-6033	9	19	constant	constant	ADJ
app01-6033	9	20	density	density	NOUN
app01-6033	9	21	"	"	PUNCT
app01-6033	9	22	were	be	AUX
app01-6033	9	23	subject	subject	ADJ
app01-6033	9	24	of	of	ADP
app01-6033	9	25	this	this	DET
app01-6033	9	26	investigation	investigation	NOUN
app01-6033	9	27	.	.	PUNCT
app01-6033	10	1	the	the	DET
app01-6033	10	2	second	second	ADJ
app01-6033	10	3	goal	goal	NOUN
app01-6033	10	4	of	of	ADP
app01-6033	10	5	the	the	DET
app01-6033	10	6	study	study	NOUN
app01-6033	10	7	was	be	AUX
app01-6033	10	8	to	to	PART
app01-6033	10	9	compare	compare	VERB
app01-6033	10	10	three	three	NUM
app01-6033	10	11	different	different	ADJ
app01-6033	10	12	structures	structure	NOUN
app01-6033	10	13	consisting	consist	VERB
app01-6033	10	14	of	of	ADP
app01-6033	10	15	periodically	periodically	ADV
app01-6033	10	16	repeating	repeat	VERB
app01-6033	10	17	elements	element	NOUN
app01-6033	10	18	,	,	PUNCT
app01-6033	10	19	scaled	scale	VERB
app01-6033	10	20	in	in	ADP
app01-6033	10	21	size	size	NOUN
app01-6033	10	22	and	and	CCONJ
app01-6033	10	23	number	number	NOUN
app01-6033	10	24	of	of	ADP
app01-6033	10	25	elements	element	NOUN
app01-6033	10	26	per	per	ADP
app01-6033	10	27	side	side	NOUN
app01-6033	10	28	.	.	PUNCT
app01-6033	11	1	keywords	keyword	NOUN
app01-6033	11	2	:	:	PUNCT
app01-6033	11	3	multiphoton	multiphoton	NOUN
app01-6033	11	4	lithography	lithography	NOUN
app01-6033	11	5	,	,	PUNCT
app01-6033	11	6	lattice	lattice	NOUN
app01-6033	11	7	structures	structure	NOUN
app01-6033	11	8	.	.	PUNCT
app01-6033	12	1	1	1	X
app01-6033	12	2	.	.	X
app01-6033	12	3	introduction	introduction	NOUN
app01-6033	12	4	the	the	DET
app01-6033	12	5	technology	technology	NOUN
app01-6033	12	6	used	use	VERB
app01-6033	12	7	for	for	ADP
app01-6033	12	8	this	this	DET
app01-6033	12	9	research	research	NOUN
app01-6033	12	10	is	be	AUX
app01-6033	12	11	"	"	PUNCT
app01-6033	12	12	femtosecond	femtosecond	VERB
app01-6033	12	13	laser	laser	NOUN
app01-6033	12	14	multiphoton	multiphoton	NOUN
app01-6033	12	15	polymerization	polymerization	NOUN
app01-6033	12	16	"	"	PUNCT
app01-6033	12	17	.	.	PUNCT
app01-6033	13	1	it	it	PRON
app01-6033	13	2	is	be	AUX
app01-6033	13	3	an	an	DET
app01-6033	13	4	auspicious	auspicious	ADJ
app01-6033	13	5	technology	technology	NOUN
app01-6033	13	6	that	that	PRON
app01-6033	13	7	can	can	AUX
app01-6033	13	8	be	be	AUX
app01-6033	13	9	used	use	VERB
app01-6033	13	10	for	for	ADP
app01-6033	13	11	the	the	DET
app01-6033	13	12	fabrication	fabrication	NOUN
app01-6033	13	13	of	of	ADP
app01-6033	13	14	micro	micro	ADJ
app01-6033	13	15	structures	structure	NOUN
app01-6033	13	16	in	in	ADP
app01-6033	13	17	fields	field	NOUN
app01-6033	13	18	like	like	ADP
app01-6033	13	19	bio	bio	PROPN
app01-6033	13	20	medicine	medicine	NOUN
app01-6033	13	21	(	(	PUNCT
app01-6033	13	22	cellgrowing	cellgrowing	NOUN
app01-6033	13	23	)	)	PUNCT
app01-6033	13	24	,	,	PUNCT
app01-6033	13	25	or	or	CCONJ
app01-6033	13	26	photonics	photonic	NOUN
app01-6033	13	27	(	(	PUNCT
app01-6033	13	28	photonics	photonics	NOUN
app01-6033	13	29	crystals	crystal	NOUN
app01-6033	13	30	)	)	PUNCT
app01-6033	14	1	[	[	X
app01-6033	14	2	1	1	NUM
app01-6033	14	3	]	]	PUNCT
app01-6033	14	4	.	.	PUNCT
app01-6033	15	1	to	to	PART
app01-6033	15	2	generate	generate	VERB
app01-6033	15	3	a	a	DET
app01-6033	15	4	3d	3d	ADJ
app01-6033	15	5	nano	nano	NOUN
app01-6033	15	6	structure	structure	NOUN
app01-6033	15	7	with	with	ADP
app01-6033	15	8	this	this	DET
app01-6033	15	9	system	system	NOUN
app01-6033	15	10	,	,	PUNCT
app01-6033	15	11	a	a	DET
app01-6033	15	12	mixture	mixture	NOUN
app01-6033	15	13	of	of	ADP
app01-6033	15	14	a	a	DET
app01-6033	15	15	photo	photo	NOUN
app01-6033	15	16	initiator	initiator	NOUN
app01-6033	15	17	and	and	CCONJ
app01-6033	15	18	a	a	DET
app01-6033	15	19	monomer	monomer	NOUN
app01-6033	15	20	is	be	AUX
app01-6033	15	21	required	require	VERB
app01-6033	15	22	.	.	PUNCT
app01-6033	16	1	a	a	DET
app01-6033	16	2	laser	laser	NOUN
app01-6033	16	3	with	with	ADP
app01-6033	16	4	a	a	DET
app01-6033	16	5	certain	certain	ADJ
app01-6033	16	6	wavelength	wavelength	NOUN
app01-6033	16	7	(	(	PUNCT
app01-6033	16	8	in	in	ADP
app01-6033	16	9	this	this	DET
app01-6033	16	10	case	case	NOUN
app01-6033	16	11	1028	1028	NUM
app01-6033	16	12	nm	nm	NOUN
app01-6033	16	13	)	)	PUNCT
app01-6033	16	14	is	be	AUX
app01-6033	16	15	firing	fire	VERB
app01-6033	16	16	in	in	ADP
app01-6033	16	17	this	this	DET
app01-6033	16	18	mixture	mixture	NOUN
app01-6033	16	19	and	and	CCONJ
app01-6033	16	20	the	the	DET
app01-6033	16	21	energy	energy	NOUN
app01-6033	16	22	inserted	insert	VERB
app01-6033	16	23	cracks	crack	NOUN
app01-6033	16	24	open	open	VERB
app01-6033	16	25	the	the	DET
app01-6033	16	26	photo	photo	NOUN
app01-6033	16	27	initiator	initiator	NOUN
app01-6033	16	28	chains	chain	NOUN
app01-6033	16	29	.	.	PUNCT
app01-6033	17	1	the	the	DET
app01-6033	17	2	so	so	ADV
app01-6033	17	3	formed	form	VERB
app01-6033	17	4	radicals	radical	NOUN
app01-6033	17	5	start	start	VERB
app01-6033	17	6	the	the	DET
app01-6033	17	7	process	process	NOUN
app01-6033	17	8	of	of	ADP
app01-6033	17	9	polymerization	polymerization	NOUN
app01-6033	17	10	by	by	ADP
app01-6033	17	11	cross	cross	NOUN
app01-6033	17	12	linking	link	VERB
app01-6033	17	13	the	the	DET
app01-6033	17	14	surrounding	surround	VERB
app01-6033	17	15	monomer	monomer	NOUN
app01-6033	17	16	.	.	PUNCT
app01-6033	18	1	this	this	DET
app01-6033	18	2	effect	effect	NOUN
app01-6033	18	3	occurs	occur	VERB
app01-6033	18	4	locally	locally	ADV
app01-6033	18	5	around	around	ADP
app01-6033	18	6	the	the	DET
app01-6033	18	7	focus	focus	NOUN
app01-6033	18	8	point	point	NOUN
app01-6033	18	9	of	of	ADP
app01-6033	18	10	the	the	DET
app01-6033	18	11	laser	laser	NOUN
app01-6033	18	12	.	.	PUNCT
app01-6033	19	1	figure	figure	NOUN
app01-6033	19	2	1	1	NUM
app01-6033	19	3	.	.	PUNCT
app01-6033	20	1	schematic	schematic	ADJ
app01-6033	20	2	:	:	PUNCT
app01-6033	20	3	multiphoton	multiphoton	NOUN
app01-6033	20	4	lithography	lithography	NOUN
app01-6033	20	5	[	[	X
app01-6033	20	6	2	2	X
app01-6033	20	7	]	]	PUNCT
app01-6033	20	8	to	to	PART
app01-6033	20	9	move	move	VERB
app01-6033	20	10	from	from	ADP
app01-6033	20	11	a	a	DET
app01-6033	20	12	dot	dot	NOUN
app01-6033	20	13	to	to	ADP
app01-6033	20	14	a	a	DET
app01-6033	20	15	defined	define	VERB
app01-6033	20	16	3d	3d	NUM
app01-6033	20	17	structure	structure	NOUN
app01-6033	20	18	,	,	PUNCT
app01-6033	20	19	the	the	DET
app01-6033	20	20	desired	desire	VERB
app01-6033	20	21	geometry	geometry	NOUN
app01-6033	20	22	has	have	VERB
app01-6033	20	23	to	to	PART
app01-6033	20	24	be	be	AUX
app01-6033	20	25	prepared	prepare	VERB
app01-6033	20	26	by	by	ADP
app01-6033	20	27	a	a	DET
app01-6033	20	28	slicer	slicer	NOUN
app01-6033	20	29	.	.	PUNCT
app01-6033	21	1	the	the	DET
app01-6033	21	2	slicer	slicer	NOUN
app01-6033	21	3	disassembles	disassemble	VERB
app01-6033	21	4	the	the	DET
app01-6033	21	5	model	model	NOUN
app01-6033	21	6	into	into	ADP
app01-6033	21	7	a	a	DET
app01-6033	21	8	number	number	NOUN
app01-6033	21	9	of	of	ADP
app01-6033	21	10	slices	slice	NOUN
app01-6033	21	11	with	with	ADP
app01-6033	21	12	constant	constant	ADJ
app01-6033	21	13	height	height	NOUN
app01-6033	21	14	.	.	PUNCT
app01-6033	22	1	a	a	DET
app01-6033	22	2	smaller	small	ADJ
app01-6033	22	3	height	height	NOUN
app01-6033	22	4	results	result	NOUN
app01-6033	22	5	in	in	ADP
app01-6033	22	6	a	a	DET
app01-6033	22	7	better	well	ADJ
app01-6033	22	8	resolution	resolution	NOUN
app01-6033	22	9	.	.	PUNCT
app01-6033	23	1	the	the	DET
app01-6033	23	2	downside	downside	NOUN
app01-6033	23	3	of	of	ADP
app01-6033	23	4	small	small	ADJ
app01-6033	23	5	layer	layer	NOUN
app01-6033	23	6	heights	height	NOUN
app01-6033	23	7	is	be	AUX
app01-6033	23	8	,	,	PUNCT
app01-6033	23	9	that	that	SCONJ
app01-6033	23	10	the	the	DET
app01-6033	23	11	production	production	NOUN
app01-6033	23	12	time	time	NOUN
app01-6033	23	13	is	be	AUX
app01-6033	23	14	proportional	proportional	ADJ
app01-6033	23	15	to	to	ADP
app01-6033	23	16	the	the	DET
app01-6033	23	17	height	height	NOUN
app01-6033	23	18	.	.	PUNCT
app01-6033	24	1	half	half	DET
app01-6033	24	2	the	the	DET
app01-6033	24	3	layer	layer	NOUN
app01-6033	24	4	-	-	PUNCT
app01-6033	24	5	thickness	thickness	NOUN
app01-6033	24	6	results	result	NOUN
app01-6033	24	7	in	in	ADP
app01-6033	24	8	a	a	DET
app01-6033	24	9	twice	twice	ADV
app01-6033	24	10	as	as	ADP
app01-6033	24	11	long	long	ADJ
app01-6033	24	12	production	production	NOUN
app01-6033	24	13	time	time	NOUN
app01-6033	24	14	.	.	PUNCT
app01-6033	25	1	another	another	DET
app01-6033	25	2	problem	problem	NOUN
app01-6033	25	3	could	could	AUX
app01-6033	25	4	be	be	AUX
app01-6033	25	5	that	that	SCONJ
app01-6033	25	6	the	the	DET
app01-6033	25	7	contact	contact	NOUN
app01-6033	25	8	area	area	NOUN
app01-6033	25	9	between	between	ADP
app01-6033	25	10	the	the	DET
app01-6033	25	11	layers	layer	NOUN
app01-6033	25	12	might	might	AUX
app01-6033	25	13	be	be	AUX
app01-6033	25	14	too	too	ADV
app01-6033	25	15	small	small	ADJ
app01-6033	25	16	which	which	PRON
app01-6033	25	17	figure	figure	NOUN
app01-6033	25	18	2	2	NUM
app01-6033	25	19	.	.	PUNCT
app01-6033	25	20	common	common	ADJ
app01-6033	25	21	monomers	monomer	NOUN
app01-6033	25	22	[	[	X
app01-6033	25	23	3	3	NUM
app01-6033	25	24	]	]	PUNCT
app01-6033	25	25	causes	cause	VERB
app01-6033	25	26	the	the	DET
app01-6033	25	27	mechanical	mechanical	ADJ
app01-6033	25	28	properties	property	NOUN
app01-6033	25	29	to	to	PART
app01-6033	25	30	suffer	suffer	VERB
app01-6033	25	31	,	,	PUNCT
app01-6033	25	32	or	or	CCONJ
app01-6033	25	33	in	in	ADP
app01-6033	25	34	the	the	DET
app01-6033	25	35	worst	bad	ADJ
app01-6033	25	36	case	case	NOUN
app01-6033	25	37	,	,	PUNCT
app01-6033	25	38	the	the	DET
app01-6033	25	39	structure	structure	NOUN
app01-6033	25	40	collapses	collapse	VERB
app01-6033	25	41	.	.	PUNCT
app01-6033	26	1	the	the	DET
app01-6033	26	2	sliced	slice	VERB
app01-6033	26	3	model	model	NOUN
app01-6033	26	4	is	be	AUX
app01-6033	26	5	than	than	SCONJ
app01-6033	26	6	written	write	VERB
app01-6033	26	7	by	by	ADP
app01-6033	26	8	the	the	DET
app01-6033	26	9	laser	laser	NOUN
app01-6033	26	10	.	.	PUNCT
app01-6033	27	1	therefore	therefore	ADV
app01-6033	27	2	it	it	PRON
app01-6033	27	3	moves	move	VERB
app01-6033	27	4	along	along	ADP
app01-6033	27	5	the	the	DET
app01-6033	27	6	area	area	NOUN
app01-6033	27	7	of	of	ADP
app01-6033	27	8	each	each	DET
app01-6033	27	9	slice	slice	NOUN
app01-6033	27	10	and	and	CCONJ
app01-6033	27	11	polymerizes	polymerize	VERB
app01-6033	27	12	the	the	DET
app01-6033	27	13	material	material	NOUN
app01-6033	27	14	around	around	ADV
app01-6033	27	15	.	.	PUNCT
app01-6033	28	1	this	this	PRON
app01-6033	28	2	continues	continue	VERB
app01-6033	28	3	for	for	SCONJ
app01-6033	28	4	each	each	PRON
app01-6033	28	5	from	from	ADP
app01-6033	28	6	the	the	DET
app01-6033	28	7	slicer	slicer	NOUN
app01-6033	28	8	prepared	prepare	VERB
app01-6033	28	9	layers	layer	NOUN
app01-6033	28	10	.	.	PUNCT
app01-6033	29	1	all	all	DET
app01-6033	29	2	the	the	DET
app01-6033	29	3	layers	layer	NOUN
app01-6033	29	4	combined	combine	VERB
app01-6033	29	5	give	give	VERB
app01-6033	29	6	the	the	DET
app01-6033	29	7	part	part	NOUN
app01-6033	29	8	its	its	PRON
app01-6033	29	9	shape	shape	NOUN
app01-6033	29	10	(	(	PUNCT
app01-6033	29	11	figure	figure	NOUN
app01-6033	29	12	1	1	NUM
app01-6033	29	13	(	(	PUNCT
app01-6033	29	14	a	a	NOUN
app01-6033	29	15	)	)	PUNCT
app01-6033	29	16	)	)	PUNCT
app01-6033	29	17	.	.	PUNCT
app01-6033	30	1	the	the	DET
app01-6033	30	2	so	so	ADV
app01-6033	30	3	created	create	VERB
app01-6033	30	4	model	model	NOUN
app01-6033	30	5	is	be	AUX
app01-6033	30	6	still	still	ADV
app01-6033	30	7	covered	cover	VERB
app01-6033	30	8	in	in	ADP
app01-6033	30	9	unpolymerized	unpolymerized	ADJ
app01-6033	30	10	monomer(figure	monomer(figure	PROPN
app01-6033	30	11	1	1	NUM
app01-6033	30	12	(	(	PUNCT
app01-6033	30	13	b	b	NOUN
app01-6033	30	14	)	)	PUNCT
app01-6033	30	15	)	)	PUNCT
app01-6033	30	16	.	.	PUNCT
app01-6033	31	1	to	to	PART
app01-6033	31	2	get	get	AUX
app01-6033	31	3	rid	rid	VERB
app01-6033	31	4	of	of	ADP
app01-6033	31	5	the	the	DET
app01-6033	31	6	monomer	monomer	NOUN
app01-6033	31	7	drop	drop	NOUN
app01-6033	31	8	around	around	ADP
app01-6033	31	9	it	it	PRON
app01-6033	31	10	,	,	PUNCT
app01-6033	31	11	the	the	DET
app01-6033	31	12	probe	probe	NOUN
app01-6033	31	13	has	have	VERB
app01-6033	31	14	to	to	PART
app01-6033	31	15	get	get	AUX
app01-6033	31	16	developed	develop	VERB
app01-6033	31	17	.	.	PUNCT
app01-6033	32	1	this	this	PRON
app01-6033	32	2	means	mean	VERB
app01-6033	32	3	,	,	PUNCT
app01-6033	32	4	that	that	SCONJ
app01-6033	32	5	the	the	DET
app01-6033	32	6	sample	sample	NOUN
app01-6033	32	7	slide	slide	NOUN
app01-6033	32	8	gets	get	AUX
app01-6033	32	9	washed	wash	VERB
app01-6033	32	10	with	with	ADP
app01-6033	32	11	ethanol	ethanol	NOUN
app01-6033	32	12	or	or	CCONJ
app01-6033	32	13	acetone	acetone	NOUN
app01-6033	32	14	.	.	PUNCT
app01-6033	33	1	due	due	ADP
app01-6033	33	2	to	to	ADP
app01-6033	33	3	this	this	PRON
app01-6033	33	4	,	,	PUNCT
app01-6033	33	5	the	the	DET
app01-6033	33	6	unused	unused	ADJ
app01-6033	33	7	monomer	monomer	NOUN
app01-6033	33	8	gets	get	AUX
app01-6033	33	9	washed	wash	VERB
app01-6033	33	10	away	away	ADV
app01-6033	33	11	from	from	ADP
app01-6033	33	12	the	the	DET
app01-6033	33	13	polymerized	polymerized	ADJ
app01-6033	33	14	structure	structure	NOUN
app01-6033	33	15	and	and	CCONJ
app01-6033	33	16	the	the	DET
app01-6033	33	17	written	write	VERB
app01-6033	33	18	part	part	NOUN
app01-6033	33	19	stays	stay	VERB
app01-6033	33	20	on	on	ADP
app01-6033	33	21	the	the	DET
app01-6033	33	22	sample	sample	NOUN
app01-6033	33	23	-	-	PUNCT
app01-6033	33	24	slide	slide	NOUN
app01-6033	33	25	(	(	PUNCT
app01-6033	33	26	figure	figure	NOUN
app01-6033	33	27	1(c	1(c	NUM
app01-6033	33	28	)	)	PUNCT
app01-6033	33	29	)	)	PUNCT
app01-6033	33	30	.	.	PUNCT
app01-6033	34	1	there	there	PRON
app01-6033	34	2	is	be	VERB
app01-6033	34	3	a	a	DET
app01-6033	34	4	variety	variety	NOUN
app01-6033	34	5	of	of	ADP
app01-6033	34	6	resins	resin	NOUN
app01-6033	34	7	available	available	ADJ
app01-6033	34	8	to	to	PART
app01-6033	34	9	use	use	VERB
app01-6033	34	10	for	for	ADP
app01-6033	34	11	this	this	DET
app01-6033	34	12	process	process	NOUN
app01-6033	34	13	.	.	PUNCT
app01-6033	35	1	there	there	PRON
app01-6033	35	2	is	be	VERB
app01-6033	35	3	a	a	DET
app01-6033	35	4	variety	variety	NOUN
app01-6033	35	5	of	of	ADP
app01-6033	35	6	resins	resin	NOUN
app01-6033	35	7	(	(	PUNCT
app01-6033	35	8	consisting	consist	VERB
app01-6033	35	9	of	of	ADP
app01-6033	35	10	a	a	DET
app01-6033	35	11	photoinitiator	photoinitiator	NOUN
app01-6033	35	12	and	and	CCONJ
app01-6033	35	13	a	a	DET
app01-6033	35	14	monomer	monomer	NOUN
app01-6033	35	15	)	)	PUNCT
app01-6033	35	16	available	available	ADJ
app01-6033	35	17	to	to	PART
app01-6033	35	18	use	use	VERB
app01-6033	35	19	for	for	ADP
app01-6033	35	20	this	this	DET
app01-6033	35	21	process	process	NOUN
app01-6033	35	22	.	.	PUNCT
app01-6033	36	1	some	some	DET
app01-6033	36	2	examples	example	NOUN
app01-6033	36	3	are	be	AUX
app01-6033	36	4	shown	show	VERB
app01-6033	36	5	in	in	ADP
app01-6033	36	6	figure	figure	NOUN
app01-6033	36	7	2	2	NUM
app01-6033	36	8	.	.	PUNCT
app01-6033	37	1	the	the	DET
app01-6033	37	2	monomer	monomer	NOUN
app01-6033	37	3	in	in	ADP
app01-6033	37	4	use	use	NOUN
app01-6033	37	5	for	for	ADP
app01-6033	37	6	this	this	DET
app01-6033	37	7	investigation	investigation	NOUN
app01-6033	37	8	is	be	AUX
app01-6033	37	9	peta	peta	ADJ
app01-6033	37	10	.	.	PUNCT
app01-6033	38	1	83	83	NUM
app01-6033	38	2	http://dx.doi.org/10.14311/app.2019.25.0083	http://dx.doi.org/10.14311/app.2019.25.0083	PROPN
app01-6033	38	3	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-6033	38	4	markus	markus	PROPN
app01-6033	38	5	wimmer	wimmer	PROPN
app01-6033	38	6	,	,	PUNCT
app01-6033	38	7	zoltan	zoltan	PROPN
app01-6033	38	8	major	major	PROPN
app01-6033	38	9	acta	acta	PROPN
app01-6033	38	10	polytechnica	polytechnica	PROPN
app01-6033	38	11	ctu	ctu	NOUN
app01-6033	38	12	proceedings	proceeding	NOUN
app01-6033	38	13	2	2	NUM
app01-6033	38	14	.	.	PUNCT
app01-6033	38	15	examined	examine	VERB
app01-6033	38	16	influences	influence	NOUN
app01-6033	38	17	the	the	DET
app01-6033	38	18	following	following	ADJ
app01-6033	38	19	images	image	NOUN
app01-6033	38	20	were	be	AUX
app01-6033	38	21	taken	take	VERB
app01-6033	38	22	on	on	ADP
app01-6033	38	23	the	the	DET
app01-6033	38	24	scanning	scanning	NOUN
app01-6033	38	25	electron	electron	NOUN
app01-6033	38	26	microscope	microscope	NOUN
app01-6033	38	27	"	"	PUNCT
app01-6033	38	28	philips	philips	PROPN
app01-6033	38	29	sem-525	sem-525	NOUN
app01-6033	38	30	m	m	NOUN
app01-6033	38	31	"	"	PUNCT
app01-6033	38	32	.	.	PUNCT
app01-6033	39	1	the	the	DET
app01-6033	39	2	samples	sample	NOUN
app01-6033	39	3	are	be	AUX
app01-6033	39	4	prepared	prepare	VERB
app01-6033	39	5	by	by	ADP
app01-6033	39	6	sputtering	sputter	VERB
app01-6033	39	7	(	(	PUNCT
app01-6033	39	8	applying	apply	VERB
app01-6033	39	9	a	a	DET
app01-6033	39	10	thin	thin	ADJ
app01-6033	39	11	layer	layer	NOUN
app01-6033	39	12	of	of	ADP
app01-6033	39	13	gold	gold	ADJ
app01-6033	39	14	dust	dust	NOUN
app01-6033	39	15	to	to	ADP
app01-6033	39	16	the	the	DET
app01-6033	39	17	structures	structure	NOUN
app01-6033	39	18	to	to	PART
app01-6033	39	19	ensure	ensure	VERB
app01-6033	39	20	a	a	DET
app01-6033	39	21	conductive	conductive	ADJ
app01-6033	39	22	connection	connection	NOUN
app01-6033	39	23	between	between	ADP
app01-6033	39	24	probe	probe	NOUN
app01-6033	39	25	and	and	CCONJ
app01-6033	39	26	stage	stage	NOUN
app01-6033	39	27	of	of	ADP
app01-6033	39	28	the	the	DET
app01-6033	39	29	microscope	microscope	NOUN
app01-6033	39	30	)	)	PUNCT
app01-6033	39	31	.	.	PUNCT
app01-6033	40	1	the	the	DET
app01-6033	40	2	sputter	sputter	NOUN
app01-6033	40	3	coater	coater	NOUN
app01-6033	40	4	in	in	ADP
app01-6033	40	5	use	use	NOUN
app01-6033	40	6	is	be	AUX
app01-6033	40	7	the	the	DET
app01-6033	40	8	model	model	NOUN
app01-6033	40	9	"	"	PUNCT
app01-6033	40	10	scd	scd	PROPN
app01-6033	40	11	005	005	NUM
app01-6033	40	12	cool	cool	ADJ
app01-6033	40	13	sputter	sputter	NOUN
app01-6033	40	14	coater	coater	NOUN
app01-6033	40	15	"	"	PUNCT
app01-6033	40	16	from	from	ADP
app01-6033	40	17	bal	bal	ADJ
app01-6033	40	18	-	-	ADJ
app01-6033	40	19	tec	tec	ADJ
app01-6033	40	20	.	.	PUNCT
app01-6033	41	1	2.1	2.1	NUM
app01-6033	41	2	.	.	PUNCT
app01-6033	41	3	solvents	solvent	NOUN
app01-6033	41	4	the	the	DET
app01-6033	41	5	first	first	ADJ
app01-6033	41	6	aspect	aspect	NOUN
app01-6033	41	7	to	to	PART
app01-6033	41	8	analyze	analyze	VERB
app01-6033	41	9	is	be	AUX
app01-6033	41	10	the	the	DET
app01-6033	41	11	influence	influence	NOUN
app01-6033	41	12	of	of	ADP
app01-6033	41	13	the	the	DET
app01-6033	41	14	solvent	solvent	NOUN
app01-6033	41	15	used	use	VERB
app01-6033	41	16	for	for	ADP
app01-6033	41	17	the	the	DET
app01-6033	41	18	development	development	NOUN
app01-6033	41	19	process	process	NOUN
app01-6033	41	20	.	.	PUNCT
app01-6033	42	1	ethanol	ethanol	NOUN
app01-6033	42	2	and	and	CCONJ
app01-6033	42	3	acetone	acetone	NOUN
app01-6033	42	4	are	be	AUX
app01-6033	42	5	the	the	DET
app01-6033	42	6	two	two	NUM
app01-6033	42	7	options	option	NOUN
app01-6033	42	8	.	.	PUNCT
app01-6033	43	1	the	the	DET
app01-6033	43	2	structures	structure	NOUN
app01-6033	43	3	designed	design	VERB
app01-6033	43	4	consisted	consist	VERB
app01-6033	43	5	of	of	ADP
app01-6033	43	6	4	4	NUM
app01-6033	43	7	separate	separate	ADJ
app01-6033	43	8	clusters	cluster	NOUN
app01-6033	43	9	with	with	ADP
app01-6033	43	10	5	5	NUM
app01-6033	43	11	micro	micro	ADJ
app01-6033	43	12	cells	cell	NOUN
app01-6033	43	13	in	in	ADP
app01-6033	43	14	each	each	DET
app01-6033	43	15	direction	direction	NOUN
app01-6033	43	16	in	in	ADP
app01-6033	43	17	plane	plane	NOUN
app01-6033	43	18	and	and	CCONJ
app01-6033	43	19	one	one	NUM
app01-6033	43	20	micro	micro	ADJ
app01-6033	43	21	cell	cell	NOUN
app01-6033	43	22	in	in	ADP
app01-6033	43	23	height	height	NOUN
app01-6033	43	24	(	(	PUNCT
app01-6033	43	25	structures	structure	NOUN
app01-6033	43	26	were	be	AUX
app01-6033	43	27	designed	design	VERB
app01-6033	43	28	by	by	ADP
app01-6033	43	29	kerstin	kerstin	PROPN
app01-6033	43	30	lehner(jku	lehner(jku	PROPN
app01-6033	43	31	)	)	PUNCT
app01-6033	43	32	in	in	ADP
app01-6033	43	33	her	her	PRON
app01-6033	43	34	master	master	NOUN
app01-6033	43	35	thesis	thesis	NOUN
app01-6033	43	36	)	)	PUNCT
app01-6033	43	37	.	.	PUNCT
app01-6033	44	1	four	four	NUM
app01-6033	44	2	of	of	ADP
app01-6033	44	3	those	those	DET
app01-6033	44	4	clusters	cluster	NOUN
app01-6033	44	5	are	be	AUX
app01-6033	44	6	stitched	stitch	VERB
app01-6033	44	7	together	together	ADV
app01-6033	44	8	to	to	PART
app01-6033	44	9	generate	generate	VERB
app01-6033	44	10	the	the	DET
app01-6033	44	11	structure	structure	NOUN
app01-6033	44	12	shown	show	VERB
app01-6033	44	13	here	here	ADV
app01-6033	44	14	.	.	PUNCT
app01-6033	45	1	as	as	SCONJ
app01-6033	45	2	can	can	AUX
app01-6033	45	3	be	be	AUX
app01-6033	45	4	seen	see	VERB
app01-6033	45	5	in	in	ADP
app01-6033	45	6	figure	figure	NOUN
app01-6033	45	7	3	3	NUM
app01-6033	45	8	,	,	PUNCT
app01-6033	45	9	the	the	DET
app01-6033	45	10	structure	structure	NOUN
app01-6033	45	11	developed	develop	VERB
app01-6033	45	12	with	with	ADP
app01-6033	45	13	ethanol	ethanol	NOUN
app01-6033	45	14	suffered	suffer	VERB
app01-6033	45	15	heavy	heavy	ADJ
app01-6033	45	16	damage	damage	NOUN
app01-6033	45	17	during	during	ADP
app01-6033	45	18	the	the	DET
app01-6033	45	19	developing	develop	VERB
app01-6033	45	20	process	process	NOUN
app01-6033	45	21	.	.	PUNCT
app01-6033	46	1	therefore	therefore	ADV
app01-6033	46	2	the	the	DET
app01-6033	46	3	following	follow	VERB
app01-6033	46	4	samples	sample	NOUN
app01-6033	46	5	were	be	AUX
app01-6033	46	6	all	all	PRON
app01-6033	46	7	developed	develop	VERB
app01-6033	46	8	with	with	ADP
app01-6033	46	9	acetone	acetone	NOUN
app01-6033	46	10	.	.	PUNCT
app01-6033	47	1	figure	figure	NOUN
app01-6033	47	2	3	3	NUM
app01-6033	47	3	.	.	PUNCT
app01-6033	47	4	structure	structure	NOUN
app01-6033	47	5	developed	develop	VERB
app01-6033	47	6	with	with	ADP
app01-6033	47	7	ethanol	ethanol	NOUN
app01-6033	47	8	figure	figure	NOUN
app01-6033	47	9	4	4	NUM
app01-6033	47	10	.	.	PUNCT
app01-6033	47	11	structure	structure	NOUN
app01-6033	47	12	developed	develop	VERB
app01-6033	47	13	with	with	ADP
app01-6033	47	14	acetone	acetone	NOUN
app01-6033	47	15	2.2	2.2	NUM
app01-6033	47	16	.	.	PUNCT
app01-6033	48	1	layer	layer	NOUN
app01-6033	48	2	height	height	NOUN
app01-6033	48	3	as	as	ADP
app01-6033	48	4	in	in	ADP
app01-6033	48	5	most	most	ADJ
app01-6033	48	6	additive	additive	ADJ
app01-6033	48	7	manufacturing	manufacturing	NOUN
app01-6033	48	8	processes	process	NOUN
app01-6033	48	9	,	,	PUNCT
app01-6033	48	10	the	the	DET
app01-6033	48	11	layer	layer	NOUN
app01-6033	48	12	height	height	NOUN
app01-6033	48	13	is	be	AUX
app01-6033	48	14	expected	expect	VERB
app01-6033	48	15	to	to	PART
app01-6033	48	16	have	have	VERB
app01-6033	48	17	a	a	DET
app01-6033	48	18	major	major	ADJ
app01-6033	48	19	influence	influence	NOUN
app01-6033	48	20	on	on	ADP
app01-6033	48	21	the	the	DET
app01-6033	48	22	results	result	NOUN
app01-6033	48	23	of	of	ADP
app01-6033	48	24	the	the	DET
app01-6033	48	25	samples	sample	NOUN
app01-6033	48	26	as	as	ADV
app01-6033	48	27	well	well	ADV
app01-6033	48	28	as	as	ADP
app01-6033	48	29	on	on	ADP
app01-6033	48	30	the	the	DET
app01-6033	48	31	fabrication	fabrication	NOUN
app01-6033	48	32	time	time	NOUN
app01-6033	48	33	.	.	PUNCT
app01-6033	49	1	a	a	DET
app01-6033	49	2	small	small	ADJ
app01-6033	49	3	layer	layer	NOUN
app01-6033	49	4	height	height	NOUN
app01-6033	49	5	leads	lead	VERB
app01-6033	49	6	to	to	ADP
app01-6033	49	7	a	a	DET
app01-6033	49	8	more	more	ADV
app01-6033	49	9	defined	define	VERB
app01-6033	49	10	structure	structure	NOUN
app01-6033	49	11	normal	normal	ADJ
app01-6033	49	12	to	to	ADP
app01-6033	49	13	the	the	DET
app01-6033	49	14	sample	sample	NOUN
app01-6033	49	15	slide	slide	NOUN
app01-6033	49	16	(	(	PUNCT
app01-6033	49	17	z	z	NOUN
app01-6033	49	18	direction	direction	NOUN
app01-6033	49	19	)	)	PUNCT
app01-6033	49	20	.	.	PUNCT
app01-6033	50	1	the	the	DET
app01-6033	50	2	fabrication	fabrication	NOUN
app01-6033	50	3	time	time	NOUN
app01-6033	50	4	is	be	AUX
app01-6033	50	5	directly	directly	ADV
app01-6033	50	6	influenced	influence	VERB
app01-6033	50	7	by	by	ADP
app01-6033	50	8	the	the	DET
app01-6033	50	9	layer	layer	NOUN
app01-6033	50	10	height	height	NOUN
app01-6033	50	11	.	.	PUNCT
app01-6033	51	1	therefore	therefore	ADV
app01-6033	51	2	a	a	DET
app01-6033	51	3	twice	twice	ADV
app01-6033	51	4	as	as	ADV
app01-6033	51	5	large	large	ADJ
app01-6033	51	6	layer	layer	NOUN
app01-6033	51	7	height	height	NOUN
app01-6033	51	8	results	result	NOUN
app01-6033	51	9	in	in	ADP
app01-6033	51	10	half	half	DET
app01-6033	51	11	the	the	DET
app01-6033	51	12	time	time	NOUN
app01-6033	51	13	needed	need	VERB
app01-6033	51	14	for	for	ADP
app01-6033	51	15	the	the	DET
app01-6033	51	16	production	production	NOUN
app01-6033	51	17	.	.	PUNCT
app01-6033	52	1	the	the	DET
app01-6033	52	2	samples	sample	NOUN
app01-6033	52	3	displayed	display	VERB
app01-6033	52	4	in	in	ADP
app01-6033	52	5	figures	figure	NOUN
app01-6033	52	6	5	5	NUM
app01-6033	52	7	&	&	CCONJ
app01-6033	52	8	6	6	NUM
app01-6033	52	9	show	show	VERB
app01-6033	52	10	the	the	DET
app01-6033	52	11	expected	expect	VERB
app01-6033	52	12	impact	impact	NOUN
app01-6033	52	13	of	of	ADP
app01-6033	52	14	an	an	DET
app01-6033	52	15	increased	increase	VERB
app01-6033	52	16	layer	layer	NOUN
app01-6033	52	17	height	height	NOUN
app01-6033	52	18	.	.	PUNCT
app01-6033	53	1	the	the	DET
app01-6033	53	2	structure	structure	NOUN
app01-6033	53	3	gets	get	VERB
app01-6033	53	4	bulkier	bulky	ADJ
app01-6033	53	5	and	and	CCONJ
app01-6033	53	6	has	have	VERB
app01-6033	53	7	a	a	DET
app01-6033	53	8	reduced	reduced	ADJ
app01-6033	53	9	grade	grade	NOUN
app01-6033	53	10	of	of	ADP
app01-6033	53	11	details	detail	NOUN
app01-6033	53	12	.	.	PUNCT
app01-6033	54	1	figure	figure	NOUN
app01-6033	54	2	5	5	NUM
app01-6033	54	3	.	.	PUNCT
app01-6033	54	4	structure	structure	NOUN
app01-6033	54	5	with	with	ADP
app01-6033	54	6	90	90	NUM
app01-6033	54	7	nm	nm	NOUN
app01-6033	54	8	layer	layer	NOUN
app01-6033	54	9	height	height	NOUN
app01-6033	54	10	figure	figure	NOUN
app01-6033	54	11	6	6	NUM
app01-6033	54	12	.	.	PUNCT
app01-6033	54	13	structure	structure	NOUN
app01-6033	54	14	with	with	ADP
app01-6033	54	15	200	200	NUM
app01-6033	54	16	nm	nm	ADJ
app01-6033	54	17	layer	layer	NOUN
app01-6033	54	18	height	height	NOUN
app01-6033	54	19	2.3	2.3	NUM
app01-6033	54	20	.	.	PUNCT
app01-6033	55	1	constant	constant	ADJ
app01-6033	55	2	density	density	NOUN
app01-6033	55	3	the	the	DET
app01-6033	55	4	following	follow	VERB
app01-6033	55	5	samples	sample	NOUN
app01-6033	55	6	are	be	AUX
app01-6033	55	7	not	not	PART
app01-6033	55	8	written	write	VERB
app01-6033	55	9	with	with	ADP
app01-6033	55	10	the	the	DET
app01-6033	55	11	standard	standard	ADJ
app01-6033	55	12	"	"	PUNCT
app01-6033	55	13	constant	constant	ADJ
app01-6033	55	14	frequency	frequency	NOUN
app01-6033	55	15	"	"	PUNCT
app01-6033	55	16	mode	mode	NOUN
app01-6033	55	17	but	but	CCONJ
app01-6033	55	18	instead	instead	ADV
app01-6033	55	19	with	with	ADP
app01-6033	55	20	"	"	PUNCT
app01-6033	55	21	constant	constant	ADJ
app01-6033	55	22	density	density	NOUN
app01-6033	55	23	"	"	PUNCT
app01-6033	55	24	.	.	PUNCT
app01-6033	56	1	the	the	DET
app01-6033	56	2	theory	theory	NOUN
app01-6033	56	3	behind	behind	ADP
app01-6033	56	4	this	this	PRON
app01-6033	56	5	is	be	AUX
app01-6033	56	6	,	,	PUNCT
app01-6033	56	7	that	that	SCONJ
app01-6033	56	8	with	with	ADP
app01-6033	56	9	a	a	DET
app01-6033	56	10	constant	constant	ADJ
app01-6033	56	11	frequency	frequency	NOUN
app01-6033	56	12	,	,	PUNCT
app01-6033	56	13	the	the	DET
app01-6033	56	14	pulse	pulse	NOUN
app01-6033	56	15	of	of	ADP
app01-6033	56	16	the	the	DET
app01-6033	56	17	laser	laser	NOUN
app01-6033	56	18	is	be	AUX
app01-6033	56	19	a	a	DET
app01-6033	56	20	sole	sole	ADJ
app01-6033	56	21	function	function	NOUN
app01-6033	56	22	of	of	ADP
app01-6033	56	23	the	the	DET
app01-6033	56	24	time	time	NOUN
app01-6033	56	25	,	,	PUNCT
app01-6033	56	26	not	not	PART
app01-6033	56	27	considering	consider	VERB
app01-6033	56	28	the	the	DET
app01-6033	56	29	acceleration	acceleration	NOUN
app01-6033	56	30	84	84	NUM
app01-6033	56	31	vol	vol	NOUN
app01-6033	56	32	.	.	PUNCT
app01-6033	57	1	25/2019	25/2019	NUM
app01-6033	57	2	micro	micro	ADJ
app01-6033	57	3	-	-	ADJ
app01-6033	57	4	lattice	lattice	ADJ
app01-6033	57	5	structures	structure	NOUN
app01-6033	57	6	by	by	ADP
app01-6033	57	7	multiphoton	multiphoton	NOUN
app01-6033	57	8	lithography	lithography	NOUN
app01-6033	57	9	of	of	ADP
app01-6033	57	10	the	the	DET
app01-6033	57	11	stage	stage	NOUN
app01-6033	57	12	or	or	CCONJ
app01-6033	57	13	galvoscanner	galvoscanner	NOUN
app01-6033	57	14	.	.	PUNCT
app01-6033	58	1	therefore	therefore	ADV
app01-6033	58	2	the	the	DET
app01-6033	58	3	distance	distance	NOUN
app01-6033	58	4	between	between	ADP
app01-6033	58	5	the	the	DET
app01-6033	58	6	impacts	impact	NOUN
app01-6033	58	7	of	of	ADP
app01-6033	58	8	the	the	DET
app01-6033	58	9	photons	photon	NOUN
app01-6033	58	10	varies	vary	VERB
app01-6033	58	11	depending	depend	VERB
app01-6033	58	12	on	on	ADP
app01-6033	58	13	the	the	DET
app01-6033	58	14	speed	speed	NOUN
app01-6033	58	15	of	of	ADP
app01-6033	58	16	the	the	DET
app01-6033	58	17	galvoscanner	galvoscanner	NOUN
app01-6033	58	18	and	and	CCONJ
app01-6033	58	19	the	the	DET
app01-6033	58	20	stage	stage	NOUN
app01-6033	58	21	.	.	PUNCT
app01-6033	59	1	the	the	DET
app01-6033	59	2	galvoscanner	galvoscanner	NOUN
app01-6033	59	3	(	(	PUNCT
app01-6033	59	4	figure	figure	NOUN
app01-6033	59	5	7	7	NUM
app01-6033	59	6	)	)	PUNCT
app01-6033	59	7	is	be	AUX
app01-6033	59	8	basically	basically	ADV
app01-6033	59	9	a	a	DET
app01-6033	59	10	fast	fast	ADV
app01-6033	59	11	moving	move	VERB
app01-6033	59	12	mirror	mirror	NOUN
app01-6033	59	13	that	that	PRON
app01-6033	59	14	directs	direct	VERB
app01-6033	59	15	the	the	DET
app01-6033	59	16	laser	laser	NOUN
app01-6033	59	17	with	with	ADP
app01-6033	59	18	a	a	DET
app01-6033	59	19	multiple	multiple	NOUN
app01-6033	59	20	of	of	ADP
app01-6033	59	21	the	the	DET
app01-6033	59	22	stages	stage	NOUN
app01-6033	59	23	velocity	velocity	NOUN
app01-6033	59	24	and	and	CCONJ
app01-6033	59	25	acceleration	acceleration	NOUN
app01-6033	59	26	but	but	CCONJ
app01-6033	59	27	with	with	ADP
app01-6033	59	28	a	a	DET
app01-6033	59	29	limited	limited	ADJ
app01-6033	59	30	field	field	NOUN
app01-6033	59	31	of	of	ADP
app01-6033	59	32	view	view	NOUN
app01-6033	59	33	(	(	PUNCT
app01-6033	59	34	operating	operating	NOUN
app01-6033	59	35	area	area	NOUN
app01-6033	59	36	)	)	PUNCT
app01-6033	59	37	.	.	PUNCT
app01-6033	60	1	figure	figure	VERB
app01-6033	60	2	7	7	NUM
app01-6033	60	3	.	.	PUNCT
app01-6033	60	4	galvoscanner	galvoscanner	NOUN
app01-6033	61	1	[	[	X
app01-6033	61	2	4	4	X
app01-6033	61	3	]	]	PUNCT
app01-6033	61	4	in	in	ADP
app01-6033	61	5	the	the	DET
app01-6033	61	6	"	"	PUNCT
app01-6033	61	7	constant	constant	ADJ
app01-6033	61	8	density	density	NOUN
app01-6033	61	9	"	"	PUNCT
app01-6033	61	10	mode	mode	NOUN
app01-6033	61	11	or	or	CCONJ
app01-6033	61	12	pso	pso	NOUN
app01-6033	61	13	(	(	PUNCT
app01-6033	61	14	position	position	NOUN
app01-6033	61	15	synchronized	synchronize	VERB
app01-6033	61	16	output	output	NOUN
app01-6033	61	17	)	)	PUNCT
app01-6033	61	18	the	the	DET
app01-6033	61	19	pulse	pulse	NOUN
app01-6033	61	20	is	be	AUX
app01-6033	61	21	not	not	PART
app01-6033	61	22	dependent	dependent	ADJ
app01-6033	61	23	on	on	ADP
app01-6033	61	24	the	the	DET
app01-6033	61	25	time	time	NOUN
app01-6033	61	26	,	,	PUNCT
app01-6033	61	27	but	but	CCONJ
app01-6033	61	28	on	on	ADP
app01-6033	61	29	the	the	DET
app01-6033	61	30	position	position	NOUN
app01-6033	61	31	of	of	ADP
app01-6033	61	32	the	the	DET
app01-6033	61	33	laser	laser	NOUN
app01-6033	61	34	.	.	PUNCT
app01-6033	62	1	therefore	therefore	ADV
app01-6033	62	2	the	the	DET
app01-6033	62	3	frequency	frequency	NOUN
app01-6033	62	4	increases	increase	VERB
app01-6033	62	5	with	with	ADP
app01-6033	62	6	the	the	DET
app01-6033	62	7	speed	speed	NOUN
app01-6033	62	8	of	of	ADP
app01-6033	62	9	the	the	DET
app01-6033	62	10	stage	stage	NOUN
app01-6033	62	11	or	or	CCONJ
app01-6033	62	12	galvoscanner	galvoscanner	NOUN
app01-6033	62	13	and	and	CCONJ
app01-6033	62	14	guarantees	guarantee	VERB
app01-6033	62	15	a	a	DET
app01-6033	62	16	constant	constant	ADJ
app01-6033	62	17	distance	distance	NOUN
app01-6033	62	18	between	between	ADP
app01-6033	62	19	the	the	DET
app01-6033	62	20	pulses	pulse	NOUN
app01-6033	62	21	,	,	PUNCT
app01-6033	62	22	even	even	ADV
app01-6033	62	23	in	in	ADP
app01-6033	62	24	time	time	NOUN
app01-6033	62	25	of	of	ADP
app01-6033	62	26	acceleration	acceleration	NOUN
app01-6033	62	27	.	.	PUNCT
app01-6033	63	1	to	to	PART
app01-6033	63	2	improve	improve	VERB
app01-6033	63	3	the	the	DET
app01-6033	63	4	stability	stability	NOUN
app01-6033	63	5	of	of	ADP
app01-6033	63	6	the	the	DET
app01-6033	63	7	structure	structure	NOUN
app01-6033	63	8	,	,	PUNCT
app01-6033	63	9	there	there	PRON
app01-6033	63	10	is	be	VERB
app01-6033	63	11	also	also	ADV
app01-6033	63	12	the	the	DET
app01-6033	63	13	option	option	NOUN
app01-6033	63	14	to	to	PART
app01-6033	63	15	use	use	VERB
app01-6033	63	16	a	a	DET
app01-6033	63	17	"	"	PUNCT
app01-6033	63	18	pulse	pulse	NOUN
app01-6033	63	19	burst	burst	NOUN
app01-6033	63	20	"	"	PUNCT
app01-6033	63	21	.	.	PUNCT
app01-6033	64	1	that	that	PRON
app01-6033	64	2	means	mean	VERB
app01-6033	64	3	that	that	SCONJ
app01-6033	64	4	every	every	DET
app01-6033	64	5	time	time	NOUN
app01-6033	64	6	the	the	DET
app01-6033	64	7	laser	laser	NOUN
app01-6033	64	8	gets	get	AUX
app01-6033	64	9	triggered	trigger	VERB
app01-6033	64	10	,	,	PUNCT
app01-6033	64	11	multiple	multiple	ADJ
app01-6033	64	12	pulses	pulse	NOUN
app01-6033	64	13	are	be	AUX
app01-6033	64	14	fired	fire	VERB
app01-6033	64	15	.	.	PUNCT
app01-6033	65	1	those	those	PRON
app01-6033	65	2	are	be	AUX
app01-6033	65	3	still	still	ADV
app01-6033	65	4	dependent	dependent	ADJ
app01-6033	65	5	on	on	ADP
app01-6033	65	6	the	the	DET
app01-6033	65	7	position	position	NOUN
app01-6033	65	8	.	.	PUNCT
app01-6033	66	1	this	this	PRON
app01-6033	66	2	should	should	AUX
app01-6033	66	3	prevent	prevent	VERB
app01-6033	66	4	an	an	DET
app01-6033	66	5	overlapping	overlapping	NOUN
app01-6033	66	6	of	of	ADP
app01-6033	66	7	pulses	pulse	NOUN
app01-6033	66	8	during	during	ADP
app01-6033	66	9	low	low	ADJ
app01-6033	66	10	speeds	speed	NOUN
app01-6033	66	11	.	.	PUNCT
app01-6033	67	1	overlapping	overlap	VERB
app01-6033	67	2	can	can	AUX
app01-6033	67	3	lead	lead	VERB
app01-6033	67	4	to	to	ADP
app01-6033	67	5	so	so	ADV
app01-6033	67	6	called	call	VERB
app01-6033	67	7	"	"	PUNCT
app01-6033	67	8	micro	micro	ADJ
app01-6033	67	9	explosions	explosion	NOUN
app01-6033	67	10	"	"	PUNCT
app01-6033	67	11	which	which	PRON
app01-6033	67	12	can	can	AUX
app01-6033	67	13	damage	damage	VERB
app01-6033	67	14	the	the	DET
app01-6033	67	15	surrounding	surround	VERB
app01-6033	67	16	structures.[5	structures.[5	ADJ
app01-6033	67	17	]	]	PUNCT
app01-6033	67	18	with	with	ADP
app01-6033	67	19	the	the	DET
app01-6033	67	20	increase	increase	NOUN
app01-6033	67	21	of	of	ADP
app01-6033	67	22	the	the	DET
app01-6033	67	23	stageor	stageor	NOUN
app01-6033	67	24	galvospeed	galvospeed	NOUN
app01-6033	67	25	,	,	PUNCT
app01-6033	67	26	the	the	DET
app01-6033	67	27	pulse	pulse	NOUN
app01-6033	67	28	density	density	NOUN
app01-6033	67	29	has	have	VERB
app01-6033	67	30	to	to	PART
app01-6033	67	31	be	be	AUX
app01-6033	67	32	reduced	reduce	VERB
app01-6033	67	33	in	in	ADP
app01-6033	67	34	order	order	NOUN
app01-6033	67	35	to	to	PART
app01-6033	67	36	stay	stay	VERB
app01-6033	67	37	beneath	beneath	ADP
app01-6033	67	38	the	the	DET
app01-6033	67	39	maximum	maximum	ADJ
app01-6033	67	40	possible	possible	ADJ
app01-6033	67	41	frequency	frequency	NOUN
app01-6033	67	42	of	of	ADP
app01-6033	67	43	920	920	NUM
app01-6033	67	44	khz	khz	NOUN
app01-6033	67	45	which	which	PRON
app01-6033	67	46	is	be	AUX
app01-6033	67	47	the	the	DET
app01-6033	67	48	maximum	maximum	NOUN
app01-6033	67	49	the	the	DET
app01-6033	67	50	machine	machine	NOUN
app01-6033	67	51	is	be	AUX
app01-6033	67	52	capable	capable	ADJ
app01-6033	67	53	of	of	ADP
app01-6033	67	54	.	.	PUNCT
app01-6033	68	1	the	the	DET
app01-6033	68	2	results	result	NOUN
app01-6033	68	3	of	of	ADP
app01-6033	68	4	the	the	DET
app01-6033	68	5	sample	sample	NOUN
app01-6033	68	6	look	look	VERB
app01-6033	68	7	very	very	ADV
app01-6033	68	8	disappointing	disappointing	ADJ
app01-6033	68	9	.	.	PUNCT
app01-6033	69	1	instead	instead	ADV
app01-6033	69	2	of	of	ADP
app01-6033	69	3	an	an	DET
app01-6033	69	4	improvement	improvement	NOUN
app01-6033	69	5	due	due	ADP
app01-6033	69	6	to	to	ADP
app01-6033	69	7	the	the	DET
app01-6033	69	8	constant	constant	ADJ
app01-6033	69	9	allocation	allocation	NOUN
app01-6033	69	10	of	of	ADP
app01-6033	69	11	the	the	DET
app01-6033	69	12	pulses	pulse	NOUN
app01-6033	69	13	,	,	PUNCT
app01-6033	69	14	the	the	DET
app01-6033	69	15	structure	structure	NOUN
app01-6033	69	16	seems	seem	VERB
app01-6033	69	17	to	to	PART
app01-6033	69	18	be	be	AUX
app01-6033	69	19	consisting	consist	VERB
app01-6033	69	20	of	of	ADP
app01-6033	69	21	horizontal	horizontal	ADJ
app01-6033	69	22	rods	rod	NOUN
app01-6033	69	23	with	with	ADP
app01-6033	69	24	barely	barely	ADV
app01-6033	69	25	any	any	PRON
app01-6033	69	26	cohesion	cohesion	NOUN
app01-6033	69	27	at	at	ADV
app01-6033	69	28	all	all	ADV
app01-6033	69	29	.	.	PUNCT
app01-6033	70	1	the	the	DET
app01-6033	70	2	unusual	unusual	ADJ
app01-6033	70	3	shape	shape	NOUN
app01-6033	70	4	of	of	ADP
app01-6033	70	5	the	the	DET
app01-6033	70	6	layers	layer	NOUN
app01-6033	70	7	might	might	AUX
app01-6033	70	8	be	be	AUX
app01-6033	70	9	connected	connect	VERB
app01-6033	70	10	to	to	ADP
app01-6033	70	11	the	the	DET
app01-6033	70	12	pulse	pulse	NOUN
app01-6033	70	13	burst	burst	NOUN
app01-6033	70	14	in	in	ADP
app01-6033	70	15	use	use	NOUN
app01-6033	70	16	.	.	PUNCT
app01-6033	71	1	those	those	DET
app01-6033	71	2	two	two	NUM
app01-6033	71	3	in	in	ADP
app01-6033	71	4	rapid	rapid	ADJ
app01-6033	71	5	frequency	frequency	NOUN
app01-6033	71	6	fired	fire	VERB
app01-6033	71	7	pulses	pulse	NOUN
app01-6033	71	8	might	might	AUX
app01-6033	71	9	result	result	VERB
app01-6033	71	10	in	in	ADP
app01-6033	71	11	those	those	DET
app01-6033	71	12	patterns	pattern	NOUN
app01-6033	71	13	.	.	PUNCT
app01-6033	72	1	the	the	DET
app01-6033	72	2	fact	fact	NOUN
app01-6033	72	3	that	that	SCONJ
app01-6033	72	4	they	they	PRON
app01-6033	72	5	are	be	AUX
app01-6033	72	6	all	all	ADV
app01-6033	72	7	oriented	orient	VERB
app01-6033	72	8	in	in	ADP
app01-6033	72	9	the	the	DET
app01-6033	72	10	same	same	ADJ
app01-6033	72	11	direction	direction	NOUN
app01-6033	72	12	supports	support	VERB
app01-6033	72	13	this	this	DET
app01-6033	72	14	theory	theory	NOUN
app01-6033	72	15	.	.	PUNCT
app01-6033	73	1	2.4	2.4	NUM
app01-6033	73	2	.	.	PUNCT
app01-6033	73	3	maximising	maximise	VERB
app01-6033	73	4	structure	structure	NOUN
app01-6033	73	5	size	size	NOUN
app01-6033	73	6	another	another	DET
app01-6033	73	7	point	point	NOUN
app01-6033	73	8	of	of	ADP
app01-6033	73	9	interest	interest	NOUN
app01-6033	73	10	was	be	AUX
app01-6033	73	11	to	to	PART
app01-6033	73	12	figure	figure	VERB
app01-6033	73	13	out	out	ADP
app01-6033	73	14	which	which	DET
app01-6033	73	15	fabrication	fabrication	NOUN
app01-6033	73	16	size	size	NOUN
app01-6033	73	17	is	be	AUX
app01-6033	73	18	possible	possible	ADJ
app01-6033	73	19	in	in	ADP
app01-6033	73	20	a	a	DET
app01-6033	73	21	reasonable	reasonable	ADJ
app01-6033	73	22	time	time	NOUN
app01-6033	73	23	.	.	PUNCT
app01-6033	74	1	due	due	ADP
app01-6033	74	2	to	to	ADP
app01-6033	74	3	extrapolating	extrapolate	VERB
app01-6033	74	4	of	of	ADP
app01-6033	74	5	the	the	DET
app01-6033	74	6	writing	writing	NOUN
app01-6033	74	7	time	time	NOUN
app01-6033	74	8	of	of	ADP
app01-6033	74	9	smaller	small	ADJ
app01-6033	74	10	parts	part	NOUN
app01-6033	74	11	,	,	PUNCT
app01-6033	74	12	a	a	DET
app01-6033	74	13	35x35x35	35x35x35	NUM
app01-6033	74	14	micro	micro	PROPN
app01-6033	74	15	cell	cell	NOUN
app01-6033	74	16	large	large	ADJ
app01-6033	74	17	cube	cube	NOUN
app01-6033	74	18	is	be	AUX
app01-6033	74	19	the	the	DET
app01-6033	74	20	maximum	maximum	NOUN
app01-6033	74	21	that	that	PRON
app01-6033	74	22	is	be	AUX
app01-6033	74	23	possible	possible	ADJ
app01-6033	74	24	in	in	ADP
app01-6033	74	25	a	a	DET
app01-6033	74	26	time	time	NOUN
app01-6033	74	27	frame	frame	NOUN
app01-6033	74	28	of	of	ADP
app01-6033	74	29	12	12	NUM
app01-6033	74	30	hours	hour	NOUN
app01-6033	74	31	.	.	PUNCT
app01-6033	75	1	this	this	PRON
app01-6033	75	2	represents	represent	VERB
app01-6033	75	3	a	a	DET
app01-6033	75	4	side	side	NOUN
app01-6033	75	5	length	length	NOUN
app01-6033	75	6	of	of	ADP
app01-6033	75	7	0.28	0.28	NUM
app01-6033	75	8	mm	mm	NOUN
app01-6033	75	9	,	,	PUNCT
app01-6033	75	10	therefore	therefore	ADV
app01-6033	75	11	,	,	PUNCT
app01-6033	75	12	the	the	DET
app01-6033	75	13	layer	layer	NOUN
app01-6033	75	14	height	height	NOUN
app01-6033	75	15	is	be	AUX
app01-6033	75	16	increased	increase	VERB
app01-6033	75	17	to	to	ADP
app01-6033	75	18	the	the	DET
app01-6033	75	19	maximum	maximum	NOUN
app01-6033	75	20	that	that	PRON
app01-6033	75	21	was	be	AUX
app01-6033	75	22	tested	test	VERB
app01-6033	75	23	so	so	ADV
app01-6033	75	24	far	far	ADV
app01-6033	75	25	(	(	PUNCT
app01-6033	75	26	800	800	NUM
app01-6033	75	27	nm	nm	NOUN
app01-6033	75	28	)	)	PUNCT
app01-6033	75	29	.	.	PUNCT
app01-6033	76	1	figure	figure	VERB
app01-6033	76	2	8	8	NUM
app01-6033	76	3	.	.	PUNCT
app01-6033	76	4	density	density	NOUN
app01-6033	76	5	and	and	CCONJ
app01-6033	76	6	frequency	frequency	NOUN
app01-6033	76	7	graph	graph	NOUN
app01-6033	76	8	(	(	PUNCT
app01-6033	76	9	a.u	a.u	PROPN
app01-6033	76	10	.	.	PROPN
app01-6033	76	11	stands	stand	VERB
app01-6033	76	12	for	for	ADP
app01-6033	76	13	arbitrary	arbitrary	ADJ
app01-6033	76	14	unit)[5	unit)[5	NUM
app01-6033	76	15	]	]	PUNCT
app01-6033	76	16	figure	figure	NOUN
app01-6033	76	17	9	9	NUM
app01-6033	76	18	.	.	PUNCT
app01-6033	76	19	constant	constant	ADJ
app01-6033	76	20	density	density	NOUN
app01-6033	76	21	the	the	DET
app01-6033	76	22	galvoscanner	galvoscanner	NOUN
app01-6033	76	23	is	be	AUX
app01-6033	76	24	used	use	VERB
app01-6033	76	25	in	in	ADP
app01-6033	76	26	the	the	DET
app01-6033	76	27	way	way	NOUN
app01-6033	76	28	that	that	PRON
app01-6033	76	29	the	the	DET
app01-6033	76	30	stage	stage	NOUN
app01-6033	76	31	positioned	position	VERB
app01-6033	76	32	in	in	ADP
app01-6033	76	33	the	the	DET
app01-6033	76	34	center	center	NOUN
app01-6033	76	35	of	of	ADP
app01-6033	76	36	a	a	DET
app01-6033	76	37	5x5	5x5	NUM
app01-6033	76	38	cluster	cluster	NOUN
app01-6033	76	39	and	and	CCONJ
app01-6033	76	40	the	the	DET
app01-6033	76	41	galvoscanner	galvoscanner	NOUN
app01-6033	76	42	writes	write	VERB
app01-6033	76	43	the	the	DET
app01-6033	76	44	micro	micro	ADJ
app01-6033	76	45	cells	cell	NOUN
app01-6033	76	46	.	.	PUNCT
app01-6033	77	1	as	as	ADP
app01-6033	77	2	a	a	DET
app01-6033	77	3	result	result	NOUN
app01-6033	77	4	of	of	ADP
app01-6033	77	5	the	the	DET
app01-6033	77	6	faster	fast	ADJ
app01-6033	77	7	acceleration	acceleration	NOUN
app01-6033	77	8	and	and	CCONJ
app01-6033	77	9	velocity	velocity	NOUN
app01-6033	77	10	limit	limit	NOUN
app01-6033	77	11	of	of	ADP
app01-6033	77	12	the	the	DET
app01-6033	77	13	galvoscanner	galvoscanner	NOUN
app01-6033	77	14	,	,	PUNCT
app01-6033	77	15	this	this	PRON
app01-6033	77	16	reduces	reduce	VERB
app01-6033	77	17	the	the	DET
app01-6033	77	18	production	production	NOUN
app01-6033	77	19	time	time	NOUN
app01-6033	77	20	per	per	ADP
app01-6033	77	21	cluster	cluster	NOUN
app01-6033	77	22	to	to	ADP
app01-6033	77	23	1/15	1/15	NUM
app01-6033	77	24	in	in	ADP
app01-6033	77	25	comparison	comparison	NOUN
app01-6033	77	26	to	to	ADP
app01-6033	77	27	stage	stage	NOUN
app01-6033	77	28	-	-	PUNCT
app01-6033	77	29	only	only	ADV
app01-6033	77	30	writing	writing	NOUN
app01-6033	77	31	.	.	PUNCT
app01-6033	78	1	due	due	ADP
app01-6033	78	2	to	to	ADP
app01-6033	78	3	the	the	DET
app01-6033	78	4	limited	limited	ADJ
app01-6033	78	5	operating	operating	NOUN
app01-6033	78	6	radius	radius	NOUN
app01-6033	78	7	of	of	ADP
app01-6033	78	8	the	the	DET
app01-6033	78	9	galvoscanner	galvoscanner	NOUN
app01-6033	78	10	,	,	PUNCT
app01-6033	78	11	the	the	DET
app01-6033	78	12	stage	stage	NOUN
app01-6033	78	13	has	have	VERB
app01-6033	78	14	to	to	PART
app01-6033	78	15	re	re	VERB
app01-6033	78	16	-	-	VERB
app01-6033	78	17	position	position	NOUN
app01-6033	78	18	after	after	ADP
app01-6033	78	19	each	each	DET
app01-6033	78	20	cluster	cluster	NOUN
app01-6033	78	21	to	to	ADP
app01-6033	78	22	the	the	DET
app01-6033	78	23	center	center	NOUN
app01-6033	78	24	of	of	ADP
app01-6033	78	25	the	the	DET
app01-6033	78	26	next	next	ADJ
app01-6033	78	27	one	one	NUM
app01-6033	78	28	.	.	PUNCT
app01-6033	79	1	the	the	DET
app01-6033	79	2	structure	structure	NOUN
app01-6033	79	3	,	,	PUNCT
app01-6033	79	4	as	as	SCONJ
app01-6033	79	5	seen	see	VERB
app01-6033	79	6	in	in	ADP
app01-6033	79	7	figures	figure	NOUN
app01-6033	79	8	10	10	NUM
app01-6033	79	9	to	to	PART
app01-6033	79	10	13	13	NUM
app01-6033	79	11	,	,	PUNCT
app01-6033	79	12	got	get	VERB
app01-6033	79	13	only	only	ADV
app01-6033	79	14	slight	slight	ADJ
app01-6033	79	15	geometric	geometric	ADJ
app01-6033	79	16	shortcomings	shortcoming	NOUN
app01-6033	79	17	.	.	PUNCT
app01-6033	80	1	as	as	SCONJ
app01-6033	80	2	seen	see	VERB
app01-6033	80	3	in	in	ADP
app01-6033	80	4	figure	figure	NOUN
app01-6033	80	5	12	12	NUM
app01-6033	80	6	,	,	PUNCT
app01-6033	80	7	there	there	PRON
app01-6033	80	8	is	be	VERB
app01-6033	80	9	a	a	DET
app01-6033	80	10	stitching	stitching	NOUN
app01-6033	80	11	error	error	NOUN
app01-6033	80	12	between	between	ADP
app01-6033	80	13	the	the	DET
app01-6033	80	14	5x5	5x5	NUM
app01-6033	80	15	clusters	cluster	NOUN
app01-6033	80	16	.	.	PUNCT
app01-6033	81	1	another	another	DET
app01-6033	81	2	anomaly	anomaly	NOUN
app01-6033	81	3	are	be	AUX
app01-6033	81	4	the	the	DET
app01-6033	81	5	shining	shine	VERB
app01-6033	81	6	white	white	ADJ
app01-6033	81	7	spots	spot	NOUN
app01-6033	81	8	between	between	ADP
app01-6033	81	9	some	some	PRON
app01-6033	81	10	of	of	ADP
app01-6033	81	11	the	the	DET
app01-6033	81	12	micro	micro	ADJ
app01-6033	81	13	cells	cell	NOUN
app01-6033	81	14	.	.	PUNCT
app01-6033	82	1	a	a	DET
app01-6033	82	2	possible	possible	ADJ
app01-6033	82	3	explanation	explanation	NOUN
app01-6033	82	4	for	for	ADP
app01-6033	82	5	the	the	DET
app01-6033	82	6	existence	existence	NOUN
app01-6033	82	7	of	of	ADP
app01-6033	82	8	these	these	DET
app01-6033	82	9	spots	spot	NOUN
app01-6033	82	10	is	be	AUX
app01-6033	82	11	that	that	SCONJ
app01-6033	82	12	there	there	PRON
app01-6033	82	13	is	be	VERB
app01-6033	82	14	unpolymerized	unpolymerized	ADJ
app01-6033	82	15	peta	peta	NOUN
app01-6033	82	16	stuck	stick	VERB
app01-6033	82	17	in	in	ADP
app01-6033	82	18	the	the	DET
app01-6033	82	19	holes	hole	NOUN
app01-6033	82	20	between	between	ADP
app01-6033	82	21	the	the	DET
app01-6033	82	22	structures	structure	NOUN
app01-6033	82	23	.	.	PUNCT
app01-6033	83	1	the	the	DET
app01-6033	83	2	radiation	radiation	NOUN
app01-6033	83	3	from	from	ADP
app01-6033	83	4	the	the	DET
app01-6033	83	5	electron	electron	NOUN
app01-6033	83	6	microscope	microscope	NOUN
app01-6033	83	7	might	might	AUX
app01-6033	83	8	have	have	AUX
app01-6033	83	9	stimulated	stimulate	VERB
app01-6033	83	10	it	it	PRON
app01-6033	83	11	and	and	CCONJ
app01-6033	83	12	that	that	PRON
app01-6033	83	13	is	be	AUX
app01-6033	83	14	the	the	DET
app01-6033	83	15	reason	reason	NOUN
app01-6033	83	16	for	for	ADP
app01-6033	83	17	the	the	DET
app01-6033	83	18	glowing	glowing	NOUN
app01-6033	83	19	.	.	PUNCT
app01-6033	84	1	in	in	ADP
app01-6033	84	2	figure	figure	NOUN
app01-6033	84	3	13	13	NUM
app01-6033	84	4	there	there	PRON
app01-6033	84	5	is	be	VERB
app01-6033	84	6	also	also	ADV
app01-6033	84	7	a	a	DET
app01-6033	84	8	piece	piece	NOUN
app01-6033	84	9	of	of	ADP
app01-6033	84	10	dust	dust	NOUN
app01-6033	84	11	that	that	PRON
app01-6033	84	12	got	get	VERB
app01-6033	84	13	into	into	ADP
app01-6033	84	14	the	the	DET
app01-6033	84	15	sample	sample	NOUN
app01-6033	84	16	and	and	CCONJ
app01-6033	84	17	now	now	ADV
app01-6033	84	18	sticks	stick	VERB
app01-6033	84	19	on	on	ADP
app01-6033	84	20	the	the	DET
app01-6033	84	21	side	side	NOUN
app01-6033	84	22	.	.	PUNCT
app01-6033	85	1	85	85	NUM
app01-6033	85	2	markus	markus	PROPN
app01-6033	85	3	wimmer	wimmer	PROPN
app01-6033	85	4	,	,	PUNCT
app01-6033	85	5	zoltan	zoltan	PROPN
app01-6033	85	6	major	major	PROPN
app01-6033	85	7	acta	acta	PROPN
app01-6033	85	8	polytechnica	polytechnica	PROPN
app01-6033	85	9	ctu	ctu	PROPN
app01-6033	85	10	proceedings	proceeding	NOUN
app01-6033	85	11	figure	figure	VERB
app01-6033	85	12	10	10	NUM
app01-6033	85	13	.	.	PUNCT
app01-6033	86	1	structure	structure	NOUN
app01-6033	86	2	with	with	ADP
app01-6033	86	3	35x35x35	35x35x35	PROPN
app01-6033	86	4	microcells	microcell	NOUN
app01-6033	86	5	overview	overview	NOUN
app01-6033	86	6	(	(	PUNCT
app01-6033	86	7	0.28	0.28	NUM
app01-6033	86	8	mm	mm	PROPN
app01-6033	86	9	side	side	NOUN
app01-6033	86	10	length	length	NOUN
app01-6033	86	11	)	)	PUNCT
app01-6033	86	12	figure	figure	NOUN
app01-6033	86	13	11	11	NUM
app01-6033	86	14	.	.	PUNCT
app01-6033	87	1	structure	structure	NOUN
app01-6033	87	2	with	with	ADP
app01-6033	87	3	35x35x35	35x35x35	PROPN
app01-6033	87	4	microcells	microcell	NOUN
app01-6033	87	5	closeup	closeup	VERB
app01-6033	87	6	(	(	PUNCT
app01-6033	87	7	0.28	0.28	NUM
app01-6033	87	8	mm	mm	PROPN
app01-6033	87	9	side	side	NOUN
app01-6033	87	10	length	length	NOUN
app01-6033	87	11	)	)	PUNCT
app01-6033	87	12	2.5	2.5	NUM
app01-6033	87	13	.	.	PUNCT
app01-6033	88	1	variation	variation	NOUN
app01-6033	88	2	of	of	ADP
app01-6033	88	3	micro	micro	ADJ
app01-6033	88	4	cell	cell	NOUN
app01-6033	88	5	structures	structure	NOUN
app01-6033	88	6	in	in	ADP
app01-6033	88	7	this	this	DET
app01-6033	88	8	part	part	NOUN
app01-6033	88	9	of	of	ADP
app01-6033	88	10	the	the	DET
app01-6033	88	11	research	research	NOUN
app01-6033	88	12	,	,	PUNCT
app01-6033	88	13	three	three	NUM
app01-6033	88	14	different	different	ADJ
app01-6033	88	15	micro	micro	NOUN
app01-6033	88	16	-	-	NOUN
app01-6033	88	17	cells	cell	NOUN
app01-6033	88	18	(	(	PUNCT
app01-6033	88	19	figure	figure	NOUN
app01-6033	88	20	14	14	NUM
app01-6033	88	21	)	)	PUNCT
app01-6033	88	22	are	be	AUX
app01-6033	88	23	compared	compare	VERB
app01-6033	88	24	in	in	ADP
app01-6033	88	25	two	two	NUM
app01-6033	88	26	different	different	ADJ
app01-6033	88	27	ways	way	NOUN
app01-6033	88	28	.	.	PUNCT
app01-6033	89	1	2.5.1	2.5.1	NUM
app01-6033	89	2	.	.	PUNCT
app01-6033	90	1	quantity	quantity	NOUN
app01-6033	90	2	scaling	scale	VERB
app01-6033	90	3	at	at	ADP
app01-6033	90	4	first	first	ADV
app01-6033	90	5	the	the	DET
app01-6033	90	6	elements	element	NOUN
app01-6033	90	7	got	get	AUX
app01-6033	90	8	scaled	scale	VERB
app01-6033	90	9	in	in	ADP
app01-6033	90	10	number	number	NOUN
app01-6033	90	11	with	with	ADP
app01-6033	90	12	a	a	DET
app01-6033	90	13	ratio	ratio	NOUN
app01-6033	90	14	of	of	ADP
app01-6033	90	15	1:2:4	1:2:4	NUM
app01-6033	90	16	.	.	PUNCT
app01-6033	91	1	this	this	DET
app01-6033	91	2	ratio	ratio	NOUN
app01-6033	91	3	results	result	VERB
app01-6033	91	4	5	5	NUM
app01-6033	91	5	,	,	PUNCT
app01-6033	91	6	10	10	NUM
app01-6033	91	7	and	and	CCONJ
app01-6033	91	8	20	20	NUM
app01-6033	91	9	micro	micro	ADJ
app01-6033	91	10	cells	cell	NOUN
app01-6033	91	11	per	per	ADP
app01-6033	91	12	side	side	NOUN
app01-6033	91	13	.	.	PUNCT
app01-6033	92	1	the	the	DET
app01-6033	92	2	inspection	inspection	NOUN
app01-6033	92	3	of	of	ADP
app01-6033	92	4	the	the	DET
app01-6033	92	5	results	result	NOUN
app01-6033	92	6	shows	show	VERB
app01-6033	92	7	the	the	DET
app01-6033	92	8	already	already	ADV
app01-6033	92	9	known	know	VERB
app01-6033	92	10	stitching	stitching	NOUN
app01-6033	92	11	problem	problem	NOUN
app01-6033	92	12	.	.	PUNCT
app01-6033	93	1	the	the	DET
app01-6033	93	2	most	most	ADV
app01-6033	93	3	plausible	plausible	ADJ
app01-6033	93	4	reason	reason	NOUN
app01-6033	93	5	behind	behind	ADP
app01-6033	93	6	this	this	PRON
app01-6033	93	7	is	be	AUX
app01-6033	93	8	a	a	DET
app01-6033	93	9	slight	slight	ADJ
app01-6033	93	10	inaccuracy	inaccuracy	NOUN
app01-6033	93	11	in	in	ADP
app01-6033	93	12	the	the	DET
app01-6033	93	13	stage	stage	NOUN
app01-6033	93	14	and/or	and/or	CCONJ
app01-6033	93	15	galvoscanner	galvoscanner	NOUN
app01-6033	93	16	movement	movement	NOUN
app01-6033	93	17	.	.	PUNCT
app01-6033	94	1	that	that	PRON
app01-6033	94	2	means	mean	VERB
app01-6033	94	3	that	that	SCONJ
app01-6033	94	4	in	in	ADP
app01-6033	94	5	the	the	DET
app01-6033	94	6	medium	medium	ADJ
app01-6033	94	7	and	and	CCONJ
app01-6033	94	8	large	large	ADJ
app01-6033	94	9	construct	construct	NOUN
app01-6033	94	10	,	,	PUNCT
app01-6033	94	11	every	every	DET
app01-6033	94	12	five	five	NUM
app01-6033	94	13	micro	micro	ADJ
app01-6033	94	14	cells	cell	NOUN
app01-6033	94	15	there	there	PRON
app01-6033	94	16	is	be	VERB
app01-6033	94	17	less	less	ADJ
app01-6033	94	18	distance	distance	NOUN
app01-6033	94	19	to	to	ADP
app01-6033	94	20	the	the	DET
app01-6033	94	21	next	next	ADJ
app01-6033	94	22	micro	micro	ADJ
app01-6033	94	23	cell	cell	NOUN
app01-6033	94	24	than	than	SCONJ
app01-6033	94	25	there	there	PRON
app01-6033	94	26	should	should	AUX
app01-6033	94	27	be	be	AUX
app01-6033	94	28	.	.	PUNCT
app01-6033	95	1	next	next	ADJ
app01-6033	95	2	in	in	ADP
app01-6033	95	3	line	line	NOUN
app01-6033	95	4	is	be	AUX
app01-6033	95	5	the	the	DET
app01-6033	95	6	octet	octet	NOUN
app01-6033	95	7	structure	structure	NOUN
app01-6033	95	8	.	.	PUNCT
app01-6033	96	1	while	while	SCONJ
app01-6033	96	2	the	the	DET
app01-6033	96	3	external	external	ADJ
app01-6033	96	4	dimensions	dimension	NOUN
app01-6033	96	5	still	still	ADV
app01-6033	96	6	remain	remain	VERB
app01-6033	96	7	a	a	DET
app01-6033	96	8	cube	cube	NOUN
app01-6033	96	9	,	,	PUNCT
app01-6033	96	10	the	the	DET
app01-6033	96	11	interior	interior	ADJ
app01-6033	96	12	increases	increase	VERB
app01-6033	96	13	in	in	ADP
app01-6033	96	14	complexity	complexity	NOUN
app01-6033	96	15	.	.	PUNCT
app01-6033	97	1	the	the	DET
app01-6033	97	2	standard	standard	ADJ
app01-6033	97	3	size	size	NOUN
app01-6033	97	4	of	of	ADP
app01-6033	97	5	a	a	DET
app01-6033	97	6	micro	micro	ADJ
app01-6033	97	7	cell	cell	NOUN
app01-6033	97	8	of	of	ADP
app01-6033	97	9	this	this	DET
app01-6033	97	10	type	type	NOUN
app01-6033	97	11	is	be	AUX
app01-6033	97	12	10	10	NUM
app01-6033	97	13	microns	micron	NOUN
app01-6033	97	14	and	and	CCONJ
app01-6033	97	15	a	a	DET
app01-6033	97	16	cluster	cluster	NOUN
app01-6033	97	17	consists	consist	VERB
app01-6033	97	18	of	of	ADP
app01-6033	97	19	3x3	3x3	NUM
app01-6033	97	20	micro	micro	ADJ
app01-6033	97	21	cells	cell	NOUN
app01-6033	97	22	.	.	PUNCT
app01-6033	98	1	therefore	therefore	ADV
app01-6033	98	2	,	,	PUNCT
app01-6033	98	3	the	the	DET
app01-6033	98	4	side	side	NOUN
app01-6033	98	5	lengths	length	NOUN
app01-6033	98	6	vary	vary	VERB
app01-6033	98	7	from	from	ADP
app01-6033	98	8	30	30	NUM
app01-6033	98	9	microns	micron	NOUN
app01-6033	98	10	to	to	ADP
app01-6033	98	11	120	120	NUM
app01-6033	98	12	microns	micron	NOUN
app01-6033	98	13	which	which	PRON
app01-6033	98	14	represents	represent	VERB
app01-6033	98	15	three	three	NUM
app01-6033	98	16	,	,	PUNCT
app01-6033	98	17	six	six	NUM
app01-6033	98	18	and	and	CCONJ
app01-6033	98	19	twelve	twelve	NUM
app01-6033	98	20	microns	micron	NOUN
app01-6033	98	21	cells	cell	NOUN
app01-6033	98	22	per	per	ADP
app01-6033	98	23	side	side	NOUN
app01-6033	98	24	.	.	PUNCT
app01-6033	99	1	as	as	SCONJ
app01-6033	99	2	there	there	PRON
app01-6033	99	3	can	can	AUX
app01-6033	99	4	be	be	AUX
app01-6033	99	5	seen	see	VERB
app01-6033	99	6	in	in	ADP
app01-6033	99	7	figure	figure	NOUN
app01-6033	99	8	15	15	NUM
app01-6033	99	9	,	,	PUNCT
app01-6033	99	10	the	the	DET
app01-6033	99	11	base	base	NOUN
app01-6033	99	12	structure	structure	NOUN
app01-6033	99	13	is	be	AUX
app01-6033	99	14	not	not	PART
app01-6033	99	15	even	even	ADV
app01-6033	99	16	remotely	remotely	ADV
app01-6033	99	17	preserved	preserve	VERB
app01-6033	99	18	.	.	PUNCT
app01-6033	100	1	the	the	DET
app01-6033	100	2	structures	structure	NOUN
app01-6033	100	3	with	with	ADP
app01-6033	100	4	more	more	ADJ
app01-6033	100	5	elements	element	NOUN
app01-6033	100	6	show	show	VERB
app01-6033	100	7	the	the	DET
app01-6033	100	8	same	same	ADJ
app01-6033	100	9	results	result	NOUN
app01-6033	100	10	.	.	PUNCT
app01-6033	101	1	figure	figure	VERB
app01-6033	101	2	12	12	NUM
app01-6033	101	3	.	.	PUNCT
app01-6033	102	1	structure	structure	NOUN
app01-6033	102	2	with	with	ADP
app01-6033	102	3	35x35x35	35x35x35	PROPN
app01-6033	102	4	micro	micro	PROPN
app01-6033	102	5	cells	cell	NOUN
app01-6033	102	6	,	,	PUNCT
app01-6033	102	7	detail	detail	NOUN
app01-6033	102	8	1	1	NUM
app01-6033	102	9	figure	figure	NOUN
app01-6033	102	10	13	13	NUM
app01-6033	102	11	.	.	PUNCT
app01-6033	103	1	structure	structure	NOUN
app01-6033	103	2	with	with	ADP
app01-6033	103	3	35x35x35	35x35x35	PROPN
app01-6033	103	4	micro	micro	PROPN
app01-6033	103	5	cells	cell	NOUN
app01-6033	103	6	,	,	PUNCT
app01-6033	103	7	detail	detail	NOUN
app01-6033	103	8	2	2	NUM
app01-6033	103	9	the	the	DET
app01-6033	103	10	last	last	ADJ
app01-6033	103	11	structure	structure	NOUN
app01-6033	103	12	in	in	ADP
app01-6033	103	13	comparison	comparison	NOUN
app01-6033	103	14	is	be	AUX
app01-6033	103	15	the	the	DET
app01-6033	103	16	hex	hex	PROPN
app01-6033	103	17	structure	structure	NOUN
app01-6033	103	18	(	(	PUNCT
app01-6033	103	19	figure	figure	NOUN
app01-6033	103	20	16	16	NUM
app01-6033	103	21	)	)	PUNCT
app01-6033	103	22	.	.	PUNCT
app01-6033	104	1	the	the	DET
app01-6033	104	2	characteristic	characteristic	NOUN
app01-6033	104	3	of	of	ADP
app01-6033	104	4	this	this	DET
app01-6033	104	5	one	one	NOUN
app01-6033	104	6	is	be	AUX
app01-6033	104	7	,	,	PUNCT
app01-6033	104	8	that	that	SCONJ
app01-6033	104	9	it	it	PRON
app01-6033	104	10	got	get	VERB
app01-6033	104	11	different	different	ADJ
app01-6033	104	12	dimensions	dimension	NOUN
app01-6033	104	13	in	in	ADP
app01-6033	104	14	length	length	NOUN
app01-6033	104	15	and	and	CCONJ
app01-6033	104	16	width	width	NOUN
app01-6033	104	17	.	.	PUNCT
app01-6033	105	1	therefore	therefore	ADV
app01-6033	105	2	,	,	PUNCT
app01-6033	105	3	the	the	DET
app01-6033	105	4	base	base	ADJ
app01-6033	105	5	area	area	NOUN
app01-6033	105	6	of	of	ADP
app01-6033	105	7	the	the	DET
app01-6033	105	8	result	result	NOUN
app01-6033	105	9	this	this	DET
app01-6033	105	10	time	time	NOUN
app01-6033	105	11	is	be	AUX
app01-6033	105	12	not	not	PART
app01-6033	105	13	a	a	DET
app01-6033	105	14	square	square	NOUN
app01-6033	105	15	.	.	PUNCT
app01-6033	106	1	in	in	ADP
app01-6033	106	2	this	this	DET
app01-6033	106	3	iteration	iteration	NOUN
app01-6033	106	4	the	the	DET
app01-6033	106	5	dimensions	dimension	NOUN
app01-6033	106	6	of	of	ADP
app01-6033	106	7	one	one	NUM
app01-6033	106	8	micro	micro	ADJ
app01-6033	106	9	cell	cell	NOUN
app01-6033	106	10	are	be	AUX
app01-6033	106	11	15	15	NUM
app01-6033	106	12	microns	micron	NOUN
app01-6033	106	13	x	x	NOUN
app01-6033	106	14	17.32	17.32	NUM
app01-6033	106	15	microns	micron	NOUN
app01-6033	106	16	.	.	PUNCT
app01-6033	107	1	a	a	DET
app01-6033	107	2	cluster	cluster	NOUN
app01-6033	107	3	consists	consist	VERB
app01-6033	107	4	of	of	ADP
app01-6033	107	5	three	three	NUM
app01-6033	107	6	of	of	ADP
app01-6033	107	7	those	those	DET
app01-6033	107	8	micro	micro	ADJ
app01-6033	107	9	cells	cell	NOUN
app01-6033	107	10	in	in	ADP
app01-6033	107	11	each	each	DET
app01-6033	107	12	direction	direction	NOUN
app01-6033	107	13	.	.	PUNCT
app01-6033	108	1	the	the	DET
app01-6033	108	2	overview	overview	NOUN
app01-6033	108	3	figure	figure	NOUN
app01-6033	108	4	16	16	NUM
app01-6033	108	5	show	show	VERB
app01-6033	108	6	a	a	DET
app01-6033	108	7	decent	decent	ADJ
app01-6033	108	8	quality	quality	NOUN
app01-6033	108	9	regarding	regard	VERB
app01-6033	108	10	the	the	DET
app01-6033	108	11	shape	shape	NOUN
app01-6033	108	12	and	and	CCONJ
app01-6033	108	13	contour	contour	NOUN
app01-6033	108	14	.	.	PUNCT
app01-6033	109	1	the	the	DET
app01-6033	109	2	closeup	closeup	NOUN
app01-6033	109	3	on	on	ADP
app01-6033	109	4	the	the	DET
app01-6033	109	5	medium	medium	ADJ
app01-6033	109	6	structure	structure	NOUN
app01-6033	109	7	in	in	ADP
app01-6033	109	8	figure	figure	NOUN
app01-6033	109	9	17	17	NUM
app01-6033	109	10	visualizes	visualize	VERB
app01-6033	109	11	that	that	SCONJ
app01-6033	109	12	there	there	PRON
app01-6033	109	13	is	be	VERB
app01-6033	109	14	a	a	DET
app01-6033	109	15	problem	problem	NOUN
app01-6033	109	16	with	with	ADP
app01-6033	109	17	the	the	DET
app01-6033	109	18	connections	connection	NOUN
app01-6033	109	19	within	within	ADP
app01-6033	109	20	the	the	DET
app01-6033	109	21	structure	structure	NOUN
app01-6033	109	22	.	.	PUNCT
app01-6033	110	1	this	this	DET
app01-6033	110	2	error	error	NOUN
app01-6033	110	3	is	be	AUX
app01-6033	110	4	reproducible	reproducible	ADJ
app01-6033	110	5	and	and	CCONJ
app01-6033	110	6	seems	seem	VERB
app01-6033	110	7	to	to	PART
app01-6033	110	8	be	be	AUX
app01-6033	110	9	limited	limit	VERB
app01-6033	110	10	to	to	ADP
app01-6033	110	11	big	big	ADJ
app01-6033	110	12	structures	structure	NOUN
app01-6033	110	13	.	.	PUNCT
app01-6033	111	1	therefore	therefore	ADV
app01-6033	111	2	it	it	PRON
app01-6033	111	3	is	be	AUX
app01-6033	111	4	evident	evident	ADJ
app01-6033	111	5	that	that	SCONJ
app01-6033	111	6	this	this	PRON
app01-6033	111	7	is	be	AUX
app01-6033	111	8	in	in	ADP
app01-6033	111	9	connection	connection	NOUN
app01-6033	111	10	to	to	ADP
app01-6033	111	11	a	a	DET
app01-6033	111	12	software	software	NOUN
app01-6033	111	13	issue	issue	NOUN
app01-6033	111	14	.	.	PUNCT
app01-6033	112	1	2.5.2	2.5.2	NUM
app01-6033	112	2	.	.	PUNCT
app01-6033	112	3	dimension	dimension	NOUN
app01-6033	112	4	scaling	scale	VERB
app01-6033	112	5	in	in	ADP
app01-6033	112	6	the	the	DET
app01-6033	112	7	second	second	ADJ
app01-6033	112	8	part	part	NOUN
app01-6033	112	9	of	of	ADP
app01-6033	112	10	the	the	DET
app01-6033	112	11	scaling	scale	VERB
app01-6033	112	12	process	process	NOUN
app01-6033	112	13	,	,	PUNCT
app01-6033	112	14	the	the	DET
app01-6033	112	15	side	side	NOUN
app01-6033	112	16	lengths	length	NOUN
app01-6033	112	17	of	of	ADP
app01-6033	112	18	the	the	DET
app01-6033	112	19	micro	micro	PROPN
app01-6033	112	20	cells	cell	NOUN
app01-6033	112	21	get	get	AUX
app01-6033	112	22	changed	change	VERB
app01-6033	112	23	.	.	PUNCT
app01-6033	113	1	the	the	DET
app01-6033	113	2	ratio	ratio	NOUN
app01-6033	113	3	remains	remain	VERB
app01-6033	113	4	the	the	DET
app01-6033	113	5	same	same	ADJ
app01-6033	113	6	with	with	ADP
app01-6033	113	7	1:2:4	1:2:4	NUM
app01-6033	113	8	.	.	PUNCT
app01-6033	114	1	the	the	DET
app01-6033	114	2	resulting	result	VERB
app01-6033	114	3	dimensions	dimension	NOUN
app01-6033	114	4	therefore	therefore	ADV
app01-6033	114	5	are	be	AUX
app01-6033	114	6	4	4	NUM
app01-6033	114	7	,	,	PUNCT
app01-6033	114	8	8	8	NUM
app01-6033	114	9	and	and	CCONJ
app01-6033	114	10	16	16	NUM
app01-6033	114	11	microns	micron	NOUN
app01-6033	114	12	per	per	ADP
app01-6033	114	13	side	side	NOUN
app01-6033	114	14	for	for	ADP
app01-6033	114	15	the	the	DET
app01-6033	114	16	hex	hex	PROPN
app01-6033	114	17	structure	structure	NOUN
app01-6033	114	18	.	.	PUNCT
app01-6033	115	1	for	for	ADP
app01-6033	115	2	the	the	DET
app01-6033	115	3	octet	octet	NOUN
app01-6033	115	4	structure	structure	VERB
app01-6033	115	5	the	the	DET
app01-6033	115	6	resulting	result	VERB
app01-6033	115	7	side	side	NOUN
app01-6033	115	8	length	length	NOUN
app01-6033	115	9	are	be	AUX
app01-6033	115	10	5	5	NUM
app01-6033	115	11	,	,	PUNCT
app01-6033	115	12	10	10	NUM
app01-6033	115	13	and	and	CCONJ
app01-6033	115	14	20	20	NUM
app01-6033	115	15	microns	micron	NOUN
app01-6033	115	16	.	.	PUNCT
app01-6033	116	1	the	the	DET
app01-6033	116	2	hex	hex	PROPN
app01-6033	116	3	structure	structure	NOUN
app01-6033	116	4	results	result	NOUN
app01-6033	116	5	in	in	ADP
app01-6033	116	6	micro	micro	ADJ
app01-6033	116	7	cell	cell	NOUN
app01-6033	116	8	dimensions	dimension	NOUN
app01-6033	116	9	of	of	ADP
app01-6033	116	10	7.5	7.5	NUM
app01-6033	116	11	microns	micron	NOUN
app01-6033	116	12	x	x	NOUN
app01-6033	116	13	8.66	8.66	NUM
app01-6033	116	14	microns	micron	NOUN
app01-6033	116	15	up	up	ADP
app01-6033	116	16	to	to	PART
app01-6033	116	17	30	30	NUM
app01-6033	116	18	microns	micron	NOUN
app01-6033	116	19	x	x	PUNCT
app01-6033	116	20	34.64	34.64	NUM
app01-6033	116	21	microns	micron	NOUN
app01-6033	116	22	.	.	PUNCT
app01-6033	117	1	the	the	DET
app01-6033	117	2	structure	structure	NOUN
app01-6033	117	3	in	in	ADP
app01-6033	117	4	figure	figure	NOUN
app01-6033	117	5	18	18	NUM
app01-6033	117	6	is	be	AUX
app01-6033	117	7	the	the	DET
app01-6033	117	8	smallest	small	ADJ
app01-6033	117	9	of	of	ADP
app01-6033	117	10	the	the	DET
app01-6033	117	11	three	three	NUM
app01-6033	117	12	.	.	PUNCT
app01-6033	118	1	even	even	ADV
app01-6033	118	2	86	86	NUM
app01-6033	118	3	vol	vol	NOUN
app01-6033	118	4	.	.	PUNCT
app01-6033	119	1	25/2019	25/2019	NUM
app01-6033	119	2	micro	micro	ADJ
app01-6033	119	3	-	-	ADJ
app01-6033	119	4	lattice	lattice	ADJ
app01-6033	119	5	structures	structure	NOUN
app01-6033	119	6	by	by	ADP
app01-6033	119	7	multiphoton	multiphoton	NOUN
app01-6033	119	8	lithography	lithography	NOUN
app01-6033	119	9	figure	figure	NOUN
app01-6033	119	10	14	14	NUM
app01-6033	119	11	.	.	PUNCT
app01-6033	120	1	lattice	lattice	PROPN
app01-6033	120	2	structure	structure	NOUN
app01-6033	120	3	base	base	NOUN
app01-6033	120	4	elements	element	NOUN
app01-6033	120	5	:	:	PUNCT
app01-6033	120	6	nonlinear	nonlinear	ADJ
app01-6033	120	7	thrust	thrust	NOUN
app01-6033	120	8	structure	structure	NOUN
app01-6033	120	9	,	,	PUNCT
app01-6033	120	10	octet	octet	NOUN
app01-6033	120	11	structuer	structuer	NOUN
app01-6033	120	12	,	,	PUNCT
app01-6033	120	13	hex	hex	PROPN
app01-6033	120	14	structure	structure	NOUN
app01-6033	120	15	(	(	PUNCT
app01-6033	120	16	left	leave	VERB
app01-6033	120	17	to	to	ADP
app01-6033	120	18	right	right	ADJ
app01-6033	120	19	)	)	PUNCT
app01-6033	120	20	figure	figure	NOUN
app01-6033	120	21	15	15	NUM
app01-6033	120	22	.	.	PUNCT
app01-6033	121	1	quantity	quantity	NOUN
app01-6033	121	2	scale	scale	NOUN
app01-6033	121	3	:	:	PUNCT
app01-6033	121	4	octet	octet	NOUN
app01-6033	121	5	structure	structure	NOUN
app01-6033	121	6	though	though	SCONJ
app01-6033	121	7	the	the	DET
app01-6033	121	8	details	detail	NOUN
app01-6033	121	9	are	be	AUX
app01-6033	121	10	noticeably	noticeably	ADV
app01-6033	121	11	worse	bad	ADJ
app01-6033	121	12	,	,	PUNCT
app01-6033	121	13	the	the	DET
app01-6033	121	14	result	result	NOUN
app01-6033	121	15	is	be	AUX
app01-6033	121	16	acceptable	acceptable	ADJ
app01-6033	121	17	in	in	ADP
app01-6033	121	18	respect	respect	NOUN
app01-6033	121	19	to	to	ADP
app01-6033	121	20	the	the	DET
app01-6033	121	21	dimensions	dimension	NOUN
app01-6033	121	22	.	.	PUNCT
app01-6033	122	1	reasons	reason	NOUN
app01-6033	122	2	for	for	ADP
app01-6033	122	3	this	this	PRON
app01-6033	122	4	might	might	AUX
app01-6033	122	5	be	be	AUX
app01-6033	122	6	that	that	SCONJ
app01-6033	122	7	the	the	DET
app01-6033	122	8	microscope	microscope	NOUN
app01-6033	122	9	can	can	AUX
app01-6033	122	10	not	not	PART
app01-6033	122	11	deliver	deliver	VERB
app01-6033	122	12	a	a	DET
app01-6033	122	13	better	well	ADJ
app01-6033	122	14	resolution	resolution	NOUN
app01-6033	122	15	in	in	ADP
app01-6033	122	16	this	this	DET
app01-6033	122	17	dimension	dimension	NOUN
app01-6033	122	18	or	or	CCONJ
app01-6033	122	19	the	the	DET
app01-6033	122	20	writing	writing	NOUN
app01-6033	122	21	accuracy	accuracy	NOUN
app01-6033	122	22	is	be	AUX
app01-6033	122	23	at	at	ADP
app01-6033	122	24	its	its	PRON
app01-6033	122	25	limit	limit	NOUN
app01-6033	122	26	.	.	PUNCT
app01-6033	123	1	but	but	CCONJ
app01-6033	123	2	even	even	ADV
app01-6033	123	3	through	through	ADP
app01-6033	123	4	the	the	DET
app01-6033	123	5	blur	blur	NOUN
app01-6033	123	6	the	the	DET
app01-6033	123	7	basic	basic	ADJ
app01-6033	123	8	shape	shape	NOUN
app01-6033	123	9	of	of	ADP
app01-6033	123	10	the	the	DET
app01-6033	123	11	micro	micro	ADJ
app01-6033	123	12	cell	cell	NOUN
app01-6033	123	13	seems	seem	VERB
app01-6033	123	14	to	to	PART
app01-6033	123	15	be	be	AUX
app01-6033	123	16	preserved	preserve	VERB
app01-6033	123	17	.	.	PUNCT
app01-6033	124	1	furthermore	furthermore	ADV
app01-6033	124	2	the	the	DET
app01-6033	124	3	structure	structure	NOUN
app01-6033	124	4	did	do	AUX
app01-6033	124	5	not	not	PART
app01-6033	124	6	collapse	collapse	VERB
app01-6033	124	7	and	and	CCONJ
app01-6033	124	8	still	still	ADV
app01-6033	124	9	shows	show	VERB
app01-6033	124	10	the	the	DET
app01-6033	124	11	significant	significant	ADJ
app01-6033	124	12	holes	hole	NOUN
app01-6033	124	13	.	.	PUNCT
app01-6033	125	1	the	the	DET
app01-6033	125	2	samples	sample	NOUN
app01-6033	125	3	of	of	ADP
app01-6033	125	4	the	the	DET
app01-6033	125	5	octet	octet	NOUN
app01-6033	125	6	structure	structure	NOUN
app01-6033	125	7	show	show	VERB
app01-6033	125	8	the	the	DET
app01-6033	125	9	same	same	ADJ
app01-6033	125	10	result	result	NOUN
app01-6033	125	11	as	as	ADP
app01-6033	125	12	the	the	DET
app01-6033	125	13	one	one	NOUN
app01-6033	125	14	with	with	ADP
app01-6033	125	15	the	the	DET
app01-6033	125	16	nonlinear	nonlinear	ADJ
app01-6033	125	17	thrust	thrust	NOUN
app01-6033	125	18	structure	structure	NOUN
app01-6033	125	19	.	.	PUNCT
app01-6033	126	1	the	the	DET
app01-6033	126	2	grade	grade	NOUN
app01-6033	126	3	of	of	ADP
app01-6033	126	4	detail	detail	NOUN
app01-6033	126	5	of	of	ADP
app01-6033	126	6	the	the	DET
app01-6033	126	7	small	small	ADJ
app01-6033	126	8	structure	structure	NOUN
app01-6033	126	9	makes	make	VERB
app01-6033	126	10	it	it	PRON
app01-6033	126	11	blurry	blurry	ADJ
app01-6033	126	12	and	and	CCONJ
app01-6033	126	13	unrecognisable	unrecognisable	ADJ
app01-6033	126	14	(	(	PUNCT
app01-6033	126	15	similar	similar	ADJ
app01-6033	126	16	to	to	PART
app01-6033	126	17	figure	figure	VERB
app01-6033	126	18	15	15	NUM
app01-6033	126	19	that	that	PRON
app01-6033	126	20	’s	’	VERB
app01-6033	126	21	twice	twice	DET
app01-6033	126	22	the	the	DET
app01-6033	126	23	size	size	NOUN
app01-6033	126	24	of	of	ADP
app01-6033	126	25	the	the	DET
app01-6033	126	26	structure	structure	NOUN
app01-6033	126	27	in	in	ADP
app01-6033	126	28	question	question	NOUN
app01-6033	126	29	)	)	PUNCT
app01-6033	126	30	.	.	PUNCT
app01-6033	127	1	scaled	scale	VERB
app01-6033	127	2	to	to	ADP
app01-6033	127	3	16	16	NUM
app01-6033	127	4	microns	micron	NOUN
app01-6033	127	5	per	per	ADP
app01-6033	127	6	element	element	NOUN
app01-6033	127	7	the	the	DET
app01-6033	127	8	details	detail	NOUN
app01-6033	127	9	of	of	ADP
app01-6033	127	10	the	the	DET
app01-6033	127	11	pattern	pattern	NOUN
app01-6033	127	12	increases	increase	VERB
app01-6033	127	13	drastically	drastically	ADV
app01-6033	127	14	(	(	PUNCT
app01-6033	127	15	figure	figure	NOUN
app01-6033	127	16	19	19	NUM
app01-6033	127	17	)	)	PUNCT
app01-6033	127	18	.	.	PUNCT
app01-6033	128	1	the	the	DET
app01-6033	128	2	glowing	glowing	NOUN
app01-6033	128	3	in	in	ADP
app01-6033	128	4	the	the	DET
app01-6033	128	5	middle	middle	ADJ
app01-6033	128	6	indicates	indicate	VERB
app01-6033	128	7	,	,	PUNCT
app01-6033	128	8	that	that	SCONJ
app01-6033	128	9	there	there	PRON
app01-6033	128	10	is	be	VERB
app01-6033	128	11	still	still	ADV
app01-6033	128	12	unpolymerized	unpolymerized	ADJ
app01-6033	128	13	monomer	monomer	NOUN
app01-6033	128	14	inside	inside	ADP
app01-6033	128	15	of	of	ADP
app01-6033	128	16	the	the	DET
app01-6033	128	17	structure	structure	NOUN
app01-6033	128	18	that	that	PRON
app01-6033	128	19	was	be	AUX
app01-6033	128	20	not	not	PART
app01-6033	128	21	removed	remove	VERB
app01-6033	128	22	during	during	ADP
app01-6033	128	23	the	the	DET
app01-6033	128	24	developing	develop	VERB
app01-6033	128	25	process	process	NOUN
app01-6033	128	26	.	.	PUNCT
app01-6033	129	1	the	the	DET
app01-6033	129	2	first	first	ADJ
app01-6033	129	3	impression	impression	NOUN
app01-6033	129	4	of	of	ADP
app01-6033	129	5	the	the	DET
app01-6033	129	6	hex	hex	PROPN
app01-6033	129	7	results	result	NOUN
app01-6033	129	8	is	be	AUX
app01-6033	129	9	quite	quite	ADV
app01-6033	129	10	satisfying	satisfying	ADJ
app01-6033	129	11	.	.	PUNCT
app01-6033	130	1	all	all	PRON
app01-6033	130	2	of	of	ADP
app01-6033	130	3	the	the	DET
app01-6033	130	4	structures	structure	NOUN
app01-6033	130	5	still	still	ADV
app01-6033	130	6	got	get	VERB
app01-6033	130	7	recognizable	recognizable	ADJ
app01-6033	130	8	micro	micro	ADJ
app01-6033	130	9	cell	cell	NOUN
app01-6033	130	10	shapes	shape	NOUN
app01-6033	130	11	and	and	CCONJ
app01-6033	130	12	none	none	NOUN
app01-6033	130	13	of	of	ADP
app01-6033	130	14	them	they	PRON
app01-6033	130	15	collapsed	collapse	VERB
app01-6033	130	16	.	.	PUNCT
app01-6033	131	1	the	the	DET
app01-6033	131	2	smallest	small	ADJ
app01-6033	131	3	one	one	NOUN
app01-6033	131	4	(	(	PUNCT
app01-6033	131	5	figure	figure	NOUN
app01-6033	131	6	20	20	NUM
app01-6033	131	7	)	)	PUNCT
app01-6033	131	8	shows	show	VERB
app01-6033	131	9	the	the	DET
app01-6033	131	10	already	already	ADV
app01-6033	131	11	known	know	VERB
app01-6033	131	12	resolution	resolution	NOUN
app01-6033	131	13	boundary	boundary	NOUN
app01-6033	131	14	of	of	ADP
app01-6033	131	15	the	the	DET
app01-6033	131	16	laser	laser	NOUN
app01-6033	131	17	with	with	ADP
app01-6033	131	18	the	the	DET
app01-6033	131	19	used	use	VERB
app01-6033	131	20	settings	setting	NOUN
app01-6033	131	21	and	and	CCONJ
app01-6033	131	22	in	in	ADP
app01-6033	131	23	consequence	consequence	NOUN
app01-6033	131	24	got	get	VERB
app01-6033	131	25	quite	quite	ADV
app01-6033	131	26	bulky	bulky	ADJ
app01-6033	131	27	.	.	PUNCT
app01-6033	132	1	while	while	SCONJ
app01-6033	132	2	the	the	DET
app01-6033	132	3	medium	medium	ADJ
app01-6033	132	4	sized	sized	ADJ
app01-6033	132	5	construct	construct	NOUN
app01-6033	132	6	does	do	AUX
app01-6033	132	7	not	not	PART
app01-6033	132	8	show	show	VERB
app01-6033	132	9	any	any	DET
app01-6033	132	10	anomalies	anomaly	NOUN
app01-6033	132	11	,	,	PUNCT
app01-6033	132	12	the	the	DET
app01-6033	132	13	big	big	ADJ
app01-6033	132	14	structure	structure	NOUN
app01-6033	132	15	with	with	ADP
app01-6033	132	16	30	30	NUM
app01-6033	132	17	microns	micron	NOUN
app01-6033	132	18	x	x	PUNCT
app01-6033	132	19	34.64	34.64	NUM
app01-6033	132	20	microns	micron	NOUN
app01-6033	132	21	element	element	NOUN
app01-6033	132	22	size	size	NOUN
app01-6033	132	23	shows	show	VERB
app01-6033	132	24	the	the	DET
app01-6033	132	25	already	already	ADV
app01-6033	132	26	known	know	VERB
app01-6033	132	27	stitching	stitching	NOUN
app01-6033	132	28	problem	problem	NOUN
app01-6033	132	29	.	.	PUNCT
app01-6033	133	1	a	a	DET
app01-6033	133	2	close	close	ADJ
app01-6033	133	3	look	look	NOUN
app01-6033	133	4	reveals	reveal	VERB
app01-6033	133	5	a	a	DET
app01-6033	133	6	line	line	NOUN
app01-6033	133	7	between	between	ADP
app01-6033	133	8	the	the	DET
app01-6033	133	9	three	three	NUM
app01-6033	133	10	clusters	cluster	NOUN
app01-6033	133	11	alongside	alongside	ADP
app01-6033	133	12	one	one	NUM
app01-6033	133	13	axis	axis	NOUN
app01-6033	133	14	(	(	PUNCT
app01-6033	133	15	bottom	bottom	NOUN
app01-6033	133	16	left	leave	VERB
app01-6033	133	17	to	to	ADP
app01-6033	133	18	top	top	VERB
app01-6033	133	19	right	right	NOUN
app01-6033	133	20	)	)	PUNCT
app01-6033	133	21	.	.	PUNCT
app01-6033	134	1	figure	figure	NOUN
app01-6033	134	2	16	16	NUM
app01-6033	134	3	.	.	PUNCT
app01-6033	135	1	quantity	quantity	NOUN
app01-6033	135	2	scale	scale	NOUN
app01-6033	135	3	:	:	PUNCT
app01-6033	135	4	hex	hex	PROPN
app01-6033	135	5	structure	structure	NOUN
app01-6033	135	6	figure	figure	NOUN
app01-6033	135	7	17	17	NUM
app01-6033	135	8	.	.	PUNCT
app01-6033	136	1	quantity	quantity	NOUN
app01-6033	136	2	scale	scale	NOUN
app01-6033	136	3	:	:	PUNCT
app01-6033	136	4	hex	hex	PROPN
app01-6033	136	5	structure	structure	NOUN
app01-6033	136	6	:	:	PUNCT
app01-6033	136	7	medium	medium	ADJ
app01-6033	136	8	detail	detail	NOUN
app01-6033	136	9	3	3	NUM
app01-6033	136	10	.	.	PUNCT
app01-6033	136	11	conclusion	conclusion	NOUN
app01-6033	136	12	this	this	DET
app01-6033	136	13	paper	paper	NOUN
app01-6033	136	14	investigates	investigate	VERB
app01-6033	136	15	the	the	DET
app01-6033	136	16	influences	influence	NOUN
app01-6033	136	17	of	of	ADP
app01-6033	136	18	manufacturing	manufacturing	NOUN
app01-6033	136	19	parameters	parameter	NOUN
app01-6033	136	20	on	on	ADP
app01-6033	136	21	multiphoton	multiphoton	NOUN
app01-6033	136	22	lithography	lithography	NOUN
app01-6033	136	23	.	.	PUNCT
app01-6033	137	1	the	the	DET
app01-6033	137	2	parameters	parameter	NOUN
app01-6033	137	3	in	in	ADP
app01-6033	137	4	focus	focus	NOUN
app01-6033	137	5	are	be	AUX
app01-6033	137	6	the	the	DET
app01-6033	137	7	solvent	solvent	NOUN
app01-6033	137	8	and	and	CCONJ
app01-6033	137	9	the	the	DET
app01-6033	137	10	height	height	NOUN
app01-6033	137	11	of	of	ADP
app01-6033	137	12	the	the	DET
app01-6033	137	13	layers	layer	NOUN
app01-6033	137	14	.	.	PUNCT
app01-6033	138	1	the	the	DET
app01-6033	138	2	effect	effect	NOUN
app01-6033	138	3	of	of	ADP
app01-6033	138	4	ethanol	ethanol	NOUN
app01-6033	138	5	(	(	PUNCT
app01-6033	138	6	figure	figure	NOUN
app01-6033	138	7	3	3	NUM
app01-6033	138	8	)	)	PUNCT
app01-6033	138	9	and	and	CCONJ
app01-6033	138	10	acetone	acetone	NOUN
app01-6033	138	11	(	(	PUNCT
app01-6033	138	12	figure	figure	NOUN
app01-6033	138	13	4	4	NUM
app01-6033	138	14	)	)	PUNCT
app01-6033	138	15	as	as	ADP
app01-6033	138	16	developing	develop	VERB
app01-6033	138	17	fluid	fluid	NOUN
app01-6033	138	18	demonstrates	demonstrate	VERB
app01-6033	138	19	that	that	SCONJ
app01-6033	138	20	acetone	acetone	NOUN
app01-6033	138	21	is	be	AUX
app01-6033	138	22	the	the	DET
app01-6033	138	23	superior	superior	ADJ
app01-6033	138	24	choice	choice	NOUN
app01-6033	138	25	for	for	ADP
app01-6033	138	26	this	this	DET
app01-6033	138	27	application	application	NOUN
app01-6033	138	28	.	.	PUNCT
app01-6033	139	1	the	the	DET
app01-6033	139	2	influence	influence	NOUN
app01-6033	139	3	of	of	ADP
app01-6033	139	4	the	the	DET
app01-6033	139	5	layer	layer	NOUN
app01-6033	139	6	height	height	NOUN
app01-6033	139	7	behaves	behave	VERB
app01-6033	139	8	similarly	similarly	ADV
app01-6033	139	9	like	like	INTJ
app01-6033	139	10	in	in	ADP
app01-6033	139	11	other	other	ADJ
app01-6033	139	12	additive	additive	ADJ
app01-6033	139	13	manufacturing	manufacturing	NOUN
app01-6033	139	14	methods	method	NOUN
app01-6033	139	15	.	.	PUNCT
app01-6033	140	1	small	small	ADJ
app01-6033	140	2	layer	layer	NOUN
app01-6033	140	3	heights	height	NOUN
app01-6033	140	4	result	result	VERB
app01-6033	140	5	in	in	ADP
app01-6033	140	6	a	a	DET
app01-6033	140	7	more	more	ADV
app01-6033	140	8	detailed	detailed	ADJ
app01-6033	140	9	geometry	geometry	NOUN
app01-6033	140	10	with	with	ADP
app01-6033	140	11	the	the	DET
app01-6033	140	12	drawback	drawback	NOUN
app01-6033	140	13	of	of	ADP
app01-6033	140	14	long	long	ADJ
app01-6033	140	15	fabrication	fabrication	NOUN
app01-6033	140	16	times	time	NOUN
app01-6033	140	17	(	(	PUNCT
app01-6033	140	18	figure	figure	NOUN
app01-6033	140	19	5	5	NUM
app01-6033	140	20	)	)	PUNCT
app01-6033	140	21	.	.	PUNCT
app01-6033	141	1	high	high	ADJ
app01-6033	141	2	layers	layer	NOUN
app01-6033	141	3	on	on	ADP
app01-6033	141	4	the	the	DET
app01-6033	141	5	other	other	ADJ
app01-6033	141	6	hand	hand	NOUN
app01-6033	141	7	decrease	decrease	NOUN
app01-6033	141	8	the	the	DET
app01-6033	141	9	time	time	NOUN
app01-6033	141	10	needed	need	VERB
app01-6033	141	11	for	for	ADP
app01-6033	141	12	production	production	NOUN
app01-6033	141	13	but	but	CCONJ
app01-6033	141	14	the	the	DET
app01-6033	141	15	structure	structure	NOUN
app01-6033	141	16	gets	get	VERB
app01-6033	141	17	more	more	ADV
app01-6033	141	18	bulky	bulky	ADJ
app01-6033	141	19	(	(	PUNCT
app01-6033	141	20	figure	figure	NOUN
app01-6033	141	21	6	6	NUM
app01-6033	141	22	)	)	PUNCT
app01-6033	141	23	.	.	PUNCT
app01-6033	142	1	in	in	ADP
app01-6033	142	2	order	order	NOUN
app01-6033	142	3	to	to	PART
app01-6033	142	4	produce	produce	VERB
app01-6033	142	5	reasonably	reasonably	ADV
app01-6033	142	6	fast	fast	ADJ
app01-6033	142	7	and	and	CCONJ
app01-6033	142	8	big	big	ADJ
app01-6033	142	9	structures	structure	NOUN
app01-6033	142	10	,	,	PUNCT
app01-6033	142	11	layer	layer	NOUN
app01-6033	142	12	heights	height	NOUN
app01-6033	142	13	in	in	ADP
app01-6033	142	14	the	the	DET
app01-6033	142	15	scale	scale	NOUN
app01-6033	142	16	of	of	ADP
app01-6033	142	17	800	800	NUM
app01-6033	142	18	nm	nm	PRON
app01-6033	142	19	turned	turn	VERB
app01-6033	142	20	out	out	ADP
app01-6033	142	21	to	to	PART
app01-6033	142	22	be	be	AUX
app01-6033	142	23	ideal	ideal	ADJ
app01-6033	142	24	.	.	PUNCT
app01-6033	143	1	for	for	ADP
app01-6033	143	2	more	more	ADJ
app01-6033	143	3	complex	complex	ADJ
app01-6033	143	4	structures	structure	NOUN
app01-6033	143	5	a	a	DET
app01-6033	143	6	lower	low	ADJ
app01-6033	143	7	layer	layer	NOUN
app01-6033	143	8	height	height	NOUN
app01-6033	143	9	is	be	AUX
app01-6033	143	10	appropriate	appropriate	ADJ
app01-6033	143	11	.	.	PUNCT
app01-6033	144	1	the	the	DET
app01-6033	144	2	tests	test	NOUN
app01-6033	144	3	with	with	ADP
app01-6033	144	4	the	the	DET
app01-6033	144	5	"	"	PUNCT
app01-6033	144	6	constant	constant	ADJ
app01-6033	144	7	density	density	NOUN
app01-6033	144	8	"	"	PUNCT
app01-6033	144	9	render	render	VERB
app01-6033	144	10	this	this	DET
app01-6033	144	11	option	option	NOUN
app01-6033	144	12	useless	useless	ADJ
app01-6033	144	13	.	.	PUNCT
app01-6033	145	1	but	but	CCONJ
app01-6033	145	2	the	the	DET
app01-6033	145	3	theory	theory	NOUN
app01-6033	145	4	behind	behind	ADP
app01-6033	145	5	this	this	DET
app01-6033	145	6	method	method	NOUN
app01-6033	145	7	is	be	AUX
app01-6033	145	8	promising	promise	VERB
app01-6033	145	9	and	and	CCONJ
app01-6033	145	10	might	might	AUX
app01-6033	145	11	turn	turn	VERB
app01-6033	145	12	out	out	ADP
app01-6033	145	13	important	important	ADJ
app01-6033	145	14	for	for	ADP
app01-6033	145	15	the	the	DET
app01-6033	145	16	future	future	NOUN
app01-6033	145	17	.	.	PUNCT
app01-6033	146	1	for	for	ADP
app01-6033	146	2	the	the	DET
app01-6033	146	3	future	future	NOUN
app01-6033	146	4	i	i	PRON
app01-6033	146	5	expect	expect	VERB
app01-6033	146	6	this	this	DET
app01-6033	146	7	technology	technology	NOUN
app01-6033	146	8	to	to	PART
app01-6033	146	9	get	get	VERB
app01-6033	146	10	essential	essential	ADJ
app01-6033	146	11	for	for	ADP
app01-6033	146	12	the	the	DET
app01-6033	146	13	field	field	NOUN
app01-6033	146	14	of	of	ADP
app01-6033	146	15	bio	bio	PROPN
app01-6033	146	16	medicine	medicine	NOUN
app01-6033	146	17	.	.	PUNCT
app01-6033	147	1	there	there	ADV
app01-6033	147	2	it	it	PRON
app01-6033	147	3	could	could	AUX
app01-6033	147	4	be	be	AUX
app01-6033	147	5	used	use	VERB
app01-6033	147	6	to	to	PART
app01-6033	147	7	generate	generate	VERB
app01-6033	147	8	the	the	DET
app01-6033	147	9	environment	environment	NOUN
app01-6033	147	10	for	for	ADP
app01-6033	147	11	cell	cell	NOUN
app01-6033	147	12	growing	grow	VERB
app01-6033	147	13	.	.	PUNCT
app01-6033	148	1	87	87	NUM
app01-6033	148	2	markus	markus	PROPN
app01-6033	148	3	wimmer	wimmer	PROPN
app01-6033	148	4	,	,	PUNCT
app01-6033	148	5	zoltan	zoltan	PROPN
app01-6033	148	6	major	major	PROPN
app01-6033	148	7	acta	acta	PROPN
app01-6033	148	8	polytechnica	polytechnica	PROPN
app01-6033	148	9	ctu	ctu	PROPN
app01-6033	148	10	proceedings	proceeding	NOUN
app01-6033	148	11	figure	figure	VERB
app01-6033	148	12	18	18	NUM
app01-6033	148	13	.	.	PUNCT
app01-6033	149	1	dimension	dimension	NOUN
app01-6033	149	2	scale	scale	NOUN
app01-6033	149	3	:	:	PUNCT
app01-6033	149	4	nonlinear	nonlinear	ADJ
app01-6033	149	5	thrust	thrust	NOUN
app01-6033	149	6	structure	structure	NOUN
app01-6033	149	7	(	(	PUNCT
app01-6033	149	8	4	4	NUM
app01-6033	149	9	microns	micron	NOUN
app01-6033	149	10	element	element	NOUN
app01-6033	149	11	size	size	NOUN
app01-6033	149	12	)	)	PUNCT
app01-6033	149	13	figure	figure	NOUN
app01-6033	149	14	19	19	NUM
app01-6033	149	15	.	.	PUNCT
app01-6033	150	1	dimension	dimension	NOUN
app01-6033	150	2	scale	scale	NOUN
app01-6033	150	3	:	:	PUNCT
app01-6033	150	4	octet	octet	NOUN
app01-6033	150	5	structure	structure	NOUN
app01-6033	150	6	(	(	PUNCT
app01-6033	150	7	16	16	NUM
app01-6033	150	8	microns	micron	NOUN
app01-6033	150	9	element	element	NOUN
app01-6033	150	10	size	size	NOUN
app01-6033	150	11	)	)	PUNCT
app01-6033	150	12	acknowledgements	acknowledgement	NOUN
app01-6033	150	13	this	this	DET
app01-6033	150	14	work	work	NOUN
app01-6033	150	15	was	be	AUX
app01-6033	150	16	supported	support	VERB
app01-6033	150	17	by	by	ADP
app01-6033	150	18	fh	fh	PROPN
app01-6033	150	19	-	-	PUNCT
app01-6033	150	20	prof	prof	NOUN
app01-6033	150	21	.	.	PROPN
app01-6033	150	22	di	di	PROPN
app01-6033	150	23	dr	dr	PROPN
app01-6033	150	24	.	.	PROPN
app01-6033	150	25	jaroslaw	jaroslaw	PROPN
app01-6033	150	26	jacak	jacak	PROPN
app01-6033	150	27	(	(	PUNCT
app01-6033	150	28	upper	upper	ADJ
app01-6033	150	29	austrian	austrian	ADJ
app01-6033	150	30	university	university	PROPN
app01-6033	150	31	of	of	ADP
app01-6033	150	32	applied	apply	VERB
app01-6033	150	33	sciences	science	NOUN
app01-6033	150	34	)	)	PUNCT
app01-6033	150	35	,	,	PUNCT
app01-6033	150	36	boris	boris	PROPN
app01-6033	150	37	buchroithner	buchroithner	PROPN
app01-6033	150	38	(	(	PUNCT
app01-6033	150	39	institute	institute	NOUN
app01-6033	150	40	of	of	ADP
app01-6033	150	41	applied	apply	VERB
app01-6033	150	42	physics	physics	NOUN
app01-6033	150	43	johannes	johannes	PROPN
app01-6033	150	44	kepler	kepler	PROPN
app01-6033	150	45	university	university	PROPN
app01-6033	150	46	)	)	PUNCT
app01-6033	150	47	and	and	CCONJ
app01-6033	150	48	valdemaras	valdemaras	PROPN
app01-6033	150	49	juzumas	juzumas	PROPN
app01-6033	150	50	(	(	PUNCT
app01-6033	150	51	workshop	workshop	NOUN
app01-6033	150	52	of	of	ADP
app01-6033	150	53	photonics	photonic	NOUN
app01-6033	150	54	)	)	PUNCT
app01-6033	150	55	.	.	PUNCT
app01-6033	151	1	a	a	DET
app01-6033	151	2	special	special	ADJ
app01-6033	151	3	thanks	thank	NOUN
app01-6033	151	4	to	to	ADP
app01-6033	151	5	univ.-prof	univ.-prof	PROPN
app01-6033	151	6	.	.	PUNCT
app01-6033	151	7	di	di	PROPN
app01-6033	151	8	dr	dr	PROPN
app01-6033	151	9	.	.	PROPN
app01-6033	151	10	werner	werner	PROPN
app01-6033	151	11	baumgartner	baumgartner	PROPN
app01-6033	151	12	from	from	ADP
app01-6033	151	13	the	the	DET
app01-6033	151	14	institute	institute	NOUN
app01-6033	151	15	of	of	ADP
app01-6033	151	16	biomedical	biomedical	ADJ
app01-6033	151	17	mechatronic	mechatronic	NOUN
app01-6033	151	18	on	on	ADP
app01-6033	151	19	the	the	DET
app01-6033	151	20	johannes	johannes	PROPN
app01-6033	151	21	kepler	kepler	PROPN
app01-6033	151	22	university	university	PROPN
app01-6033	151	23	for	for	ADP
app01-6033	151	24	providing	provide	VERB
app01-6033	151	25	the	the	DET
app01-6033	151	26	sem	sem	NOUN
app01-6033	151	27	.	.	PUNCT
app01-6033	152	1	references	reference	NOUN
app01-6033	152	2	[	[	X
app01-6033	152	3	1	1	X
app01-6033	152	4	]	]	PUNCT
app01-6033	152	5	e.	e.	PROPN
app01-6033	152	6	stankevičius	stankevičius	PROPN
app01-6033	152	7	,	,	PUNCT
app01-6033	152	8	m.	m.	NOUN
app01-6033	152	9	malinauskas	malinauskas	PROPN
app01-6033	152	10	,	,	PUNCT
app01-6033	152	11	m.	m.	NOUN
app01-6033	152	12	gedvilas	gedvilas	PROPN
app01-6033	152	13	,	,	PUNCT
app01-6033	152	14	et	et	PROPN
app01-6033	152	15	al	al	PROPN
app01-6033	152	16	.	.	PROPN
app01-6033	152	17	fabrication	fabrication	NOUN
app01-6033	152	18	of	of	ADP
app01-6033	152	19	periodic	periodic	ADJ
app01-6033	152	20	micro	micro	NOUN
app01-6033	152	21	-	-	NOUN
app01-6033	152	22	structures	structure	NOUN
app01-6033	152	23	by	by	ADP
app01-6033	152	24	multi	multi	ADJ
app01-6033	152	25	-	-	ADJ
app01-6033	152	26	photon	photon	ADJ
app01-6033	152	27	polymerization	polymerization	NOUN
app01-6033	152	28	using	use	VERB
app01-6033	152	29	femtosecond	femtosecond	NOUN
app01-6033	152	30	laser	laser	NOUN
app01-6033	152	31	and	and	CCONJ
app01-6033	152	32	four	four	NUM
app01-6033	152	33	-	-	PUNCT
app01-6033	152	34	beam	beam	NOUN
app01-6033	152	35	interference	interference	NOUN
app01-6033	152	36	.	.	PUNCT
app01-6033	153	1	materials	material	NOUN
app01-6033	153	2	science	science	NOUN
app01-6033	153	3	17	17	NUM
app01-6033	153	4	,	,	PUNCT
app01-6033	153	5	2011	2011	NUM
app01-6033	153	6	.	.	PUNCT
app01-6033	154	1	doi:10.5755	doi:10.5755	ADJ
app01-6033	154	2	/	/	SYM
app01-6033	154	3	j01.ms.17.3.587	j01.ms.17.3.587	PROPN
app01-6033	154	4	.	.	PUNCT
app01-6033	155	1	figure	figure	NOUN
app01-6033	155	2	20	20	NUM
app01-6033	155	3	.	.	PUNCT
app01-6033	156	1	dimension	dimension	NOUN
app01-6033	156	2	scale	scale	NOUN
app01-6033	156	3	:	:	PUNCT
app01-6033	156	4	hex	hex	PROPN
app01-6033	156	5	structure	structure	NOUN
app01-6033	156	6	(	(	PUNCT
app01-6033	156	7	7.5	7.5	NUM
app01-6033	156	8	microns	micron	NOUN
app01-6033	156	9	x	x	NOUN
app01-6033	156	10	8.66	8.66	NUM
app01-6033	156	11	microns	micron	NOUN
app01-6033	156	12	side	side	NOUN
app01-6033	156	13	length	length	NOUN
app01-6033	156	14	per	per	ADP
app01-6033	156	15	element	element	NOUN
app01-6033	156	16	)	)	PUNCT
app01-6033	156	17	figure	figure	NOUN
app01-6033	156	18	21	21	NUM
app01-6033	156	19	.	.	PUNCT
app01-6033	157	1	dimension	dimension	NOUN
app01-6033	157	2	scale	scale	NOUN
app01-6033	157	3	:	:	PUNCT
app01-6033	157	4	hex	hex	PROPN
app01-6033	157	5	structure	structure	NOUN
app01-6033	157	6	(	(	PUNCT
app01-6033	157	7	30	30	NUM
app01-6033	157	8	microns	micron	NOUN
app01-6033	157	9	x	x	SYM
app01-6033	157	10	34.64	34.64	NUM
app01-6033	157	11	microns	micron	NOUN
app01-6033	157	12	side	side	NOUN
app01-6033	157	13	length	length	NOUN
app01-6033	157	14	per	per	ADP
app01-6033	157	15	element	element	NOUN
app01-6033	157	16	)	)	PUNCT
app01-6033	158	1	[	[	X
app01-6033	158	2	2	2	NUM
app01-6033	158	3	]	]	X
app01-6033	158	4	workshop	workshop	NOUN
app01-6033	158	5	of	of	ADP
app01-6033	158	6	photonics	photonic	NOUN
app01-6033	158	7	.	.	PUNCT
app01-6033	159	1	mpp	mpp	PROPN
app01-6033	159	2	brosiura	brosiura	PROPN
app01-6033	159	3	,	,	PUNCT
app01-6033	159	4	2018	2018	NUM
app01-6033	159	5	.	.	PUNCT
app01-6033	160	1	https://wophotonics.com/wp-content/uploads/	https://wophotonics.com/wp-content/uploads/	NOUN
app01-6033	160	2	2015/11	2015/11	NUM
app01-6033	160	3	/	/	SYM
app01-6033	160	4	mpp	mpp	PROPN
app01-6033	160	5	-	-	PUNCT
app01-6033	160	6	brosiura.pdf	brosiura.pdf	X
app01-6033	160	7	.	.	PUNCT
app01-6033	161	1	[	[	X
app01-6033	161	2	3	3	NUM
app01-6033	161	3	]	]	SYM
app01-6033	161	4	a.ovsianikov	a.ovsianikov	NOUN
app01-6033	161	5	,	,	PUNCT
app01-6033	161	6	j.stampfl	j.stampfl	NOUN
app01-6033	161	7	,	,	PUNCT
app01-6033	161	8	r.liska	r.liska	NOUN
app01-6033	161	9	.	.	PUNCT
app01-6033	162	1	multiphoton	multiphoton	NOUN
app01-6033	162	2	lithography	lithography	NOUN
app01-6033	162	3	techniques	technique	NOUN
app01-6033	162	4	,	,	PUNCT
app01-6033	162	5	materials	material	NOUN
app01-6033	162	6	and	and	CCONJ
app01-6033	162	7	applications	application	NOUN
app01-6033	162	8	.	.	PUNCT
app01-6033	163	1	wiley	wiley	PROPN
app01-6033	163	2	-	-	PUNCT
app01-6033	163	3	vch	vch	PROPN
app01-6033	163	4	,	,	PUNCT
app01-6033	163	5	2017	2017	NUM
app01-6033	163	6	.	.	PUNCT
app01-6033	164	1	doi:10.1002/9783527682676	doi:10.1002/9783527682676	X
app01-6033	164	2	.	.	PUNCT
app01-6033	165	1	[	[	X
app01-6033	165	2	4	4	NUM
app01-6033	165	3	]	]	PUNCT
app01-6033	165	4	nutfield	nutfield	ADJ
app01-6033	165	5	technology	technology	NOUN
app01-6033	165	6	.	.	PUNCT
app01-6033	165	7	nutfield	nutfield	ADJ
app01-6033	165	8	-	-	PUNCT
app01-6033	165	9	tech	tech	NOUN
app01-6033	165	10	-	-	PUNCT
app01-6033	165	11	sp-30	sp-30	NOUN
app01-6033	165	12	-	-	PUNCT
app01-6033	165	13	galvanometer	galvanometer	NOUN
app01-6033	165	14	,	,	PUNCT
app01-6033	165	15	2018	2018	NUM
app01-6033	165	16	.	.	PUNCT
app01-6033	166	1	http://nutfieldtech.com/wp-content/uploads/	http://nutfieldtech.com/wp-content/uploads/	X
app01-6033	166	2	2016/07	2016/07	NUM
app01-6033	166	3	/	/	SYM
app01-6033	166	4	nutfield	nutfield	ADJ
app01-6033	166	5	-	-	PUNCT
app01-6033	166	6	tech	tech	NOUN
app01-6033	166	7	-	-	PUNCT
app01-6033	166	8	sp-30	sp-30	NOUN
app01-6033	166	9	-	-	PUNCT
app01-6033	166	10	galvanometer.jpg	galvanometer.jpg	NOUN
app01-6033	166	11	.	.	PUNCT
app01-6033	167	1	[	[	X
app01-6033	167	2	5	5	NUM
app01-6033	167	3	]	]	X
app01-6033	167	4	workshop	workshop	NOUN
app01-6033	167	5	of	of	ADP
app01-6033	167	6	photonics	photonic	NOUN
app01-6033	167	7	.	.	PUNCT
app01-6033	168	1	sca	sca	PROPN
app01-6033	168	2	manual	manual	NOUN
app01-6033	168	3	,	,	PUNCT
app01-6033	168	4	2018	2018	NUM
app01-6033	168	5	.	.	PUNCT
app01-6033	169	1	88	88	NUM
app01-6033	169	2	https://doi.org/10.5755/j01.ms.17.3.587	https://doi.org/10.5755/j01.ms.17.3.587	PROPN
app01-6033	169	3	https://wophotonics.com/wp-content/uploads/2015/11/mpp-brosiura.pdf	https://wophotonics.com/wp-content/uploads/2015/11/mpp-brosiura.pdf	PROPN
app01-6033	169	4	https://wophotonics.com/wp-content/uploads/2015/11/mpp-brosiura.pdf	https://wophotonics.com/wp-content/uploads/2015/11/mpp-brosiura.pdf	NUM
app01-6033	169	5	https://doi.org/10.1002/9783527682676	https://doi.org/10.1002/9783527682676	NOUN
app01-6033	169	6	http://nutfieldtech.com/wp-content/uploads/2016/07/nutfield-tech-sp-30-galvanometer.jpg	http://nutfieldtech.com/wp-content/uploads/2016/07/nutfield-tech-sp-30-galvanometer.jpg	PROPN
app01-6033	169	7	http://nutfieldtech.com/wp-content/uploads/2016/07/nutfield-tech-sp-30-galvanometer.jpg	http://nutfieldtech.com/wp-content/uploads/2016/07/nutfield-tech-sp-30-galvanometer.jpg	PROPN
app01-6033	169	8	acta	acta	PROPN
app01-6033	169	9	polytechnica	polytechnica	PROPN
app01-6033	169	10	ctu	ctu	NOUN
app01-6033	169	11	proceedings	proceeding	NOUN
app01-6033	169	12	25:83–88	25:83–88	NUM
app01-6033	169	13	,	,	PUNCT
app01-6033	169	14	2019	2019	NUM
app01-6033	169	15	1	1	NUM
app01-6033	169	16	introduction	introduction	NOUN
app01-6033	169	17	2	2	NUM
app01-6033	169	18	examined	examine	VERB
app01-6033	169	19	influences	influence	NOUN
app01-6033	169	20	2.1	2.1	NUM
app01-6033	169	21	solvents	solvent	NOUN
app01-6033	169	22	2.2	2.2	NUM
app01-6033	169	23	layer	layer	NOUN
app01-6033	169	24	height	height	NOUN
app01-6033	169	25	2.3	2.3	NUM
app01-6033	169	26	constant	constant	ADJ
app01-6033	169	27	density	density	NOUN
app01-6033	169	28	2.4	2.4	NUM
app01-6033	169	29	maximising	maximise	VERB
app01-6033	169	30	structure	structure	NOUN
app01-6033	169	31	size	size	NOUN
app01-6033	169	32	2.5	2.5	NUM
app01-6033	169	33	variation	variation	NOUN
app01-6033	169	34	of	of	ADP
app01-6033	169	35	micro	micro	ADJ
app01-6033	169	36	cell	cell	NOUN
app01-6033	169	37	structures	structure	VERB
app01-6033	169	38	2.5.1	2.5.1	NUM
app01-6033	169	39	quantity	quantity	NOUN
app01-6033	169	40	scaling	scale	VERB
app01-6033	169	41	2.5.2	2.5.2	NUM
app01-6033	169	42	dimension	dimension	NOUN
app01-6033	169	43	scaling	scale	VERB
app01-6033	169	44	3	3	NUM
app01-6033	169	45	conclusion	conclusion	NOUN
app01-6033	169	46	acknowledgements	acknowledgement	NOUN
app01-6033	169	47	references	reference	NOUN