id	sid	tid	token	lemma	pos
app01-6664	1	1	acta	acta	PROPN
app01-6664	1	2	polytechnica	polytechnica	PROPN
app01-6664	1	3	doi:10.14311	doi:10.14311	PROPN
app01-6664	1	4	/	/	SYM
app01-6664	1	5	app.2020.27.0018	app.2020.27.0018	PROPN
app01-6664	1	6	acta	acta	PROPN
app01-6664	1	7	polytechnica	polytechnica	PROPN
app01-6664	1	8	27(0):18–21	27(0):18–21	NUM
app01-6664	1	9	,	,	PUNCT
app01-6664	1	10	2020	2020	NUM
app01-6664	1	11	©	©	PROPN
app01-6664	1	12	czech	czech	PROPN
app01-6664	1	13	technical	technical	PROPN
app01-6664	1	14	university	university	PROPN
app01-6664	1	15	in	in	ADP
app01-6664	1	16	prague	prague	PROPN
app01-6664	1	17	,	,	PUNCT
app01-6664	1	18	2020	2020	NUM
app01-6664	1	19	available	available	ADJ
app01-6664	1	20	online	online	ADV
app01-6664	1	21	at	at	ADP
app01-6664	1	22	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-6664	1	23	mathematical	mathematical	ADJ
app01-6664	1	24	modeling	modeling	NOUN
app01-6664	1	25	of	of	ADP
app01-6664	1	26	experiment	experiment	NOUN
app01-6664	1	27	on	on	ADP
app01-6664	1	28	berkovich	berkovich	PROPN
app01-6664	1	29	nanoindentation	nanoindentation	NOUN
app01-6664	1	30	of	of	ADP
app01-6664	1	31	zrn	zrn	PROPN
app01-6664	1	32	coating	coat	VERB
app01-6664	1	33	on	on	ADP
app01-6664	1	34	steel	steel	NOUN
app01-6664	1	35	substrate	substrate	NOUN
app01-6664	1	36	evgeniy	evgeniy	ADJ
app01-6664	1	37	sadyrin∗	sadyrin∗	NOUN
app01-6664	1	38	,	,	PUNCT
app01-6664	1	39	andrey	andrey	PROPN
app01-6664	1	40	vasiliev	vasiliev	NOUN
app01-6664	1	41	,	,	PUNCT
app01-6664	1	42	sergei	sergei	PROPN
app01-6664	1	43	volkov	volkov	PROPN
app01-6664	1	44	don	don	PROPN
app01-6664	1	45	state	state	PROPN
app01-6664	1	46	technical	technical	PROPN
app01-6664	1	47	university	university	PROPN
app01-6664	1	48	,	,	PUNCT
app01-6664	1	49	research	research	NOUN
app01-6664	1	50	and	and	CCONJ
app01-6664	1	51	educational	educational	ADJ
app01-6664	1	52	center	center	NOUN
app01-6664	1	53	“	"	PUNCT
app01-6664	1	54	materials	material	NOUN
app01-6664	1	55	”	"	PUNCT
app01-6664	1	56	,	,	PUNCT
app01-6664	1	57	1	1	NUM
app01-6664	1	58	gagarin	gagarin	NOUN
app01-6664	1	59	square	square	NOUN
app01-6664	1	60	,	,	PUNCT
app01-6664	1	61	rostov	rostov	PROPN
app01-6664	1	62	-	-	PUNCT
app01-6664	1	63	on	on	ADP
app01-6664	1	64	-	-	PUNCT
app01-6664	1	65	don	don	NOUN
app01-6664	1	66	,	,	PUNCT
app01-6664	1	67	344000	344000	NUM
app01-6664	1	68	,	,	PUNCT
app01-6664	1	69	russia	russia	PROPN
app01-6664	1	70	∗	∗	NOUN
app01-6664	1	71	corresponding	correspond	VERB
app01-6664	1	72	author	author	NOUN
app01-6664	1	73	:	:	PUNCT
app01-6664	1	74	ghostwoode@gmail.com	ghostwoode@gmail.com	X
app01-6664	1	75	abstract	abstract	ADJ
app01-6664	1	76	.	.	PUNCT
app01-6664	2	1	in	in	ADP
app01-6664	2	2	the	the	DET
app01-6664	2	3	present	present	ADJ
app01-6664	2	4	paper	paper	NOUN
app01-6664	2	5	the	the	DET
app01-6664	2	6	experiment	experiment	NOUN
app01-6664	2	7	on	on	ADP
app01-6664	2	8	berkovich	berkovich	PROPN
app01-6664	2	9	nanoindentation	nanoindentation	NOUN
app01-6664	2	10	of	of	ADP
app01-6664	2	11	zrn	zrn	PROPN
app01-6664	2	12	coating	coat	VERB
app01-6664	2	13	on	on	ADP
app01-6664	2	14	steel	steel	NOUN
app01-6664	2	15	substrate	substrate	NOUN
app01-6664	2	16	is	be	AUX
app01-6664	2	17	modelled	model	VERB
app01-6664	2	18	using	use	VERB
app01-6664	2	19	the	the	DET
app01-6664	2	20	proposed	propose	VERB
app01-6664	2	21	effective	effective	ADJ
app01-6664	2	22	mathematical	mathematical	ADJ
app01-6664	2	23	model	model	NOUN
app01-6664	2	24	.	.	PUNCT
app01-6664	3	1	the	the	DET
app01-6664	3	2	model	model	NOUN
app01-6664	3	3	is	be	AUX
app01-6664	3	4	intended	intend	VERB
app01-6664	3	5	for	for	ADP
app01-6664	3	6	describing	describe	VERB
app01-6664	3	7	the	the	DET
app01-6664	3	8	experiments	experiment	NOUN
app01-6664	3	9	on	on	ADP
app01-6664	3	10	indentation	indentation	NOUN
app01-6664	3	11	of	of	ADP
app01-6664	3	12	samples	sample	NOUN
app01-6664	3	13	with	with	ADP
app01-6664	3	14	coatings	coating	NOUN
app01-6664	3	15	(	(	PUNCT
app01-6664	3	16	layered	layered	ADJ
app01-6664	3	17	or	or	CCONJ
app01-6664	3	18	functionally	functionally	ADV
app01-6664	3	19	graded	grade	VERB
app01-6664	3	20	)	)	PUNCT
app01-6664	3	21	.	.	PUNCT
app01-6664	4	1	the	the	DET
app01-6664	4	2	model	model	NOUN
app01-6664	4	3	is	be	AUX
app01-6664	4	4	based	base	VERB
app01-6664	4	5	on	on	ADP
app01-6664	4	6	approximated	approximate	VERB
app01-6664	4	7	analytical	analytical	ADJ
app01-6664	4	8	solution	solution	NOUN
app01-6664	4	9	of	of	ADP
app01-6664	4	10	the	the	DET
app01-6664	4	11	contact	contact	NOUN
app01-6664	4	12	problem	problem	NOUN
app01-6664	4	13	on	on	ADP
app01-6664	4	14	indentation	indentation	NOUN
app01-6664	4	15	of	of	ADP
app01-6664	4	16	an	an	DET
app01-6664	4	17	elastic	elastic	ADJ
app01-6664	4	18	half	half	ADJ
app01-6664	4	19	-	-	PUNCT
app01-6664	4	20	space	space	NOUN
app01-6664	4	21	with	with	ADP
app01-6664	4	22	a	a	DET
app01-6664	4	23	coating	coating	NOUN
app01-6664	4	24	by	by	ADP
app01-6664	4	25	a	a	DET
app01-6664	4	26	punch	punch	NOUN
app01-6664	4	27	.	.	PUNCT
app01-6664	5	1	it	it	PRON
app01-6664	5	2	is	be	AUX
app01-6664	5	3	shown	show	VERB
app01-6664	5	4	that	that	SCONJ
app01-6664	5	5	the	the	DET
app01-6664	5	6	results	result	NOUN
app01-6664	5	7	of	of	ADP
app01-6664	5	8	the	the	DET
app01-6664	5	9	model	model	NOUN
app01-6664	5	10	and	and	CCONJ
app01-6664	5	11	the	the	DET
app01-6664	5	12	experiment	experiment	NOUN
app01-6664	5	13	are	be	AUX
app01-6664	5	14	in	in	ADP
app01-6664	5	15	good	good	ADJ
app01-6664	5	16	agreement	agreement	NOUN
app01-6664	5	17	.	.	PUNCT
app01-6664	6	1	keywords	keyword	NOUN
app01-6664	6	2	:	:	PUNCT
app01-6664	6	3	coating	coating	NOUN
app01-6664	6	4	,	,	PUNCT
app01-6664	6	5	contact	contact	NOUN
app01-6664	6	6	mechanics	mechanic	NOUN
app01-6664	6	7	,	,	PUNCT
app01-6664	6	8	layered	layered	ADJ
app01-6664	6	9	composite	composite	ADJ
app01-6664	6	10	,	,	PUNCT
app01-6664	6	11	mathematical	mathematical	ADJ
app01-6664	6	12	modeling	modeling	NOUN
app01-6664	6	13	,	,	PUNCT
app01-6664	6	14	nanoindentation	nanoindentation	NOUN
app01-6664	6	15	,	,	PUNCT
app01-6664	6	16	scanning	scan	VERB
app01-6664	6	17	electron	electron	NOUN
app01-6664	6	18	microscopy	microscopy	NOUN
app01-6664	6	19	.	.	PUNCT
app01-6664	7	1	1	1	X
app01-6664	7	2	.	.	X
app01-6664	7	3	introduction	introduction	NOUN
app01-6664	7	4	nanoindentation	nanoindentation	NOUN
app01-6664	7	5	is	be	AUX
app01-6664	7	6	a	a	DET
app01-6664	7	7	widespread	widespread	ADJ
app01-6664	7	8	technique	technique	NOUN
app01-6664	7	9	aimed	aim	VERB
app01-6664	7	10	at	at	ADP
app01-6664	7	11	researching	research	VERB
app01-6664	7	12	of	of	ADP
app01-6664	7	13	the	the	DET
app01-6664	7	14	physical	physical	ADJ
app01-6664	7	15	and	and	CCONJ
app01-6664	7	16	mechanical	mechanical	ADJ
app01-6664	7	17	properties	property	NOUN
app01-6664	7	18	of	of	ADP
app01-6664	7	19	materials	material	NOUN
app01-6664	7	20	[	[	X
app01-6664	7	21	1	1	NUM
app01-6664	7	22	]	]	PUNCT
app01-6664	7	23	.	.	PUNCT
app01-6664	8	1	during	during	ADP
app01-6664	8	2	experiment	experiment	NOUN
app01-6664	8	3	the	the	DET
app01-6664	8	4	dependence	dependence	NOUN
app01-6664	8	5	of	of	ADP
app01-6664	8	6	the	the	DET
app01-6664	8	7	penetration	penetration	NOUN
app01-6664	8	8	depth	depth	NOUN
app01-6664	8	9	of	of	ADP
app01-6664	8	10	the	the	DET
app01-6664	8	11	special	special	ADJ
app01-6664	8	12	probe	probe	NOUN
app01-6664	8	13	–	–	PUNCT
app01-6664	8	14	indenter	indenter	NOUN
app01-6664	8	15	–	–	PUNCT
app01-6664	8	16	into	into	ADP
app01-6664	8	17	the	the	DET
app01-6664	8	18	sample	sample	NOUN
app01-6664	8	19	on	on	ADP
app01-6664	8	20	the	the	DET
app01-6664	8	21	applied	apply	VERB
app01-6664	8	22	load	load	NOUN
app01-6664	8	23	is	be	AUX
app01-6664	8	24	acquired	acquire	VERB
app01-6664	8	25	(	(	PUNCT
app01-6664	8	26	loaddisplacement	loaddisplacement	NOUN
app01-6664	8	27	curve	curve	NOUN
app01-6664	8	28	)	)	PUNCT
app01-6664	8	29	.	.	PUNCT
app01-6664	9	1	for	for	ADP
app01-6664	9	2	different	different	ADJ
app01-6664	9	3	purposes	purpose	NOUN
app01-6664	9	4	indenters	indenter	NOUN
app01-6664	9	5	with	with	ADP
app01-6664	9	6	different	different	ADJ
app01-6664	9	7	tip	tip	NOUN
app01-6664	9	8	shapes	shape	NOUN
app01-6664	9	9	are	be	AUX
app01-6664	9	10	required	require	VERB
app01-6664	9	11	.	.	PUNCT
app01-6664	10	1	a	a	DET
app01-6664	10	2	pyramid	pyramid	NOUN
app01-6664	10	3	with	with	ADP
app01-6664	10	4	a	a	DET
app01-6664	10	5	triangular	triangular	NOUN
app01-6664	10	6	cross	cross	NOUN
app01-6664	10	7	-	-	NOUN
app01-6664	10	8	section	section	NOUN
app01-6664	10	9	and	and	CCONJ
app01-6664	10	10	a	a	DET
app01-6664	10	11	spherical	spherical	ADJ
app01-6664	10	12	blunting	blunting	NOUN
app01-6664	10	13	of	of	ADP
app01-6664	10	14	the	the	DET
app01-6664	10	15	tip	tip	NOUN
app01-6664	10	16	(	(	PUNCT
app01-6664	10	17	berkovich	berkovich	PROPN
app01-6664	10	18	indenter	indenter	PROPN
app01-6664	10	19	)	)	PUNCT
app01-6664	10	20	is	be	AUX
app01-6664	10	21	one	one	NUM
app01-6664	10	22	of	of	ADP
app01-6664	10	23	the	the	DET
app01-6664	10	24	most	most	ADV
app01-6664	10	25	popular	popular	ADJ
app01-6664	10	26	shapes	shape	NOUN
app01-6664	10	27	.	.	PUNCT
app01-6664	11	1	since	since	SCONJ
app01-6664	11	2	it	it	PRON
app01-6664	11	3	is	be	AUX
app01-6664	11	4	difficult	difficult	ADJ
app01-6664	11	5	to	to	PART
app01-6664	11	6	avoid	avoid	VERB
app01-6664	11	7	plastic	plastic	ADJ
app01-6664	11	8	deformation	deformation	NOUN
app01-6664	11	9	in	in	ADP
app01-6664	11	10	such	such	DET
app01-6664	11	11	an	an	DET
app01-6664	11	12	experiment	experiment	NOUN
app01-6664	11	13	even	even	ADV
app01-6664	11	14	with	with	ADP
app01-6664	11	15	a	a	DET
app01-6664	11	16	small	small	ADJ
app01-6664	11	17	load	load	NOUN
app01-6664	11	18	,	,	PUNCT
app01-6664	11	19	oliver	oliver	PROPN
app01-6664	11	20	and	and	CCONJ
app01-6664	11	21	pharr	pharr	PROPN
app01-6664	11	22	proposed	propose	VERB
app01-6664	11	23	to	to	PART
app01-6664	11	24	analyze	analyze	VERB
app01-6664	11	25	the	the	DET
app01-6664	11	26	unloading	unloading	NOUN
app01-6664	11	27	part	part	NOUN
app01-6664	11	28	of	of	ADP
app01-6664	11	29	the	the	DET
app01-6664	11	30	load	load	NOUN
app01-6664	11	31	-	-	PUNCT
app01-6664	11	32	displacement	displacement	NOUN
app01-6664	11	33	curve	curve	NOUN
app01-6664	11	34	to	to	PART
app01-6664	11	35	determine	determine	VERB
app01-6664	11	36	the	the	DET
app01-6664	11	37	elastic	elastic	ADJ
app01-6664	11	38	properties	property	NOUN
app01-6664	11	39	of	of	ADP
app01-6664	11	40	the	the	DET
app01-6664	11	41	sample	sample	NOUN
app01-6664	11	42	[	[	X
app01-6664	11	43	2	2	NUM
app01-6664	11	44	]	]	PUNCT
app01-6664	11	45	.	.	PUNCT
app01-6664	12	1	they	they	PRON
app01-6664	12	2	described	describe	VERB
app01-6664	12	3	the	the	DET
app01-6664	12	4	method	method	NOUN
app01-6664	12	5	for	for	ADP
app01-6664	12	6	evaluation	evaluation	NOUN
app01-6664	12	7	of	of	ADP
app01-6664	12	8	the	the	DET
app01-6664	12	9	young	young	PROPN
app01-6664	12	10	’s	’s	PART
app01-6664	12	11	modulus	modulus	NOUN
app01-6664	12	12	of	of	ADP
app01-6664	12	13	the	the	DET
app01-6664	12	14	sample	sample	NOUN
app01-6664	12	15	based	base	VERB
app01-6664	12	16	on	on	ADP
app01-6664	12	17	the	the	DET
app01-6664	12	18	analysis	analysis	NOUN
app01-6664	12	19	of	of	ADP
app01-6664	12	20	the	the	DET
app01-6664	12	21	indentation	indentation	NOUN
app01-6664	12	22	stiffness	stiffness	NOUN
app01-6664	12	23	–	–	PUNCT
app01-6664	12	24	the	the	DET
app01-6664	12	25	derivative	derivative	NOUN
app01-6664	12	26	of	of	ADP
app01-6664	12	27	the	the	DET
app01-6664	12	28	force	force	NOUN
app01-6664	12	29	with	with	ADP
app01-6664	12	30	respect	respect	NOUN
app01-6664	12	31	to	to	ADP
app01-6664	12	32	the	the	DET
app01-6664	12	33	indentation	indentation	NOUN
app01-6664	12	34	depth	depth	NOUN
app01-6664	12	35	–	–	PUNCT
app01-6664	12	36	at	at	ADP
app01-6664	12	37	the	the	DET
app01-6664	12	38	maximum	maximum	ADJ
app01-6664	12	39	indentation	indentation	NOUN
app01-6664	12	40	depth	depth	NOUN
app01-6664	12	41	.	.	PUNCT
app01-6664	13	1	in	in	ADP
app01-6664	13	2	such	such	DET
app01-6664	13	3	a	a	DET
app01-6664	13	4	case	case	NOUN
app01-6664	13	5	,	,	PUNCT
app01-6664	13	6	the	the	DET
app01-6664	13	7	contact	contact	NOUN
app01-6664	13	8	area	area	NOUN
app01-6664	13	9	must	must	AUX
app01-6664	13	10	be	be	AUX
app01-6664	13	11	determined	determine	VERB
app01-6664	13	12	.	.	PUNCT
app01-6664	14	1	for	for	ADP
app01-6664	14	2	homogeneous	homogeneous	ADJ
app01-6664	14	3	materials	material	NOUN
app01-6664	14	4	,	,	PUNCT
app01-6664	14	5	contact	contact	NOUN
app01-6664	14	6	area	area	NOUN
app01-6664	14	7	can	can	AUX
app01-6664	14	8	be	be	AUX
app01-6664	14	9	found	find	VERB
app01-6664	14	10	from	from	ADP
app01-6664	14	11	calibration	calibration	NOUN
app01-6664	14	12	experiments	experiment	NOUN
app01-6664	14	13	on	on	ADP
app01-6664	14	14	samples	sample	NOUN
app01-6664	14	15	with	with	ADP
app01-6664	14	16	previously	previously	ADV
app01-6664	14	17	studied	study	VERB
app01-6664	14	18	properties	property	NOUN
app01-6664	14	19	[	[	X
app01-6664	14	20	3	3	NUM
app01-6664	14	21	]	]	PUNCT
app01-6664	14	22	.	.	PUNCT
app01-6664	15	1	however	however	ADV
app01-6664	15	2	,	,	PUNCT
app01-6664	15	3	it	it	PRON
app01-6664	15	4	was	be	AUX
app01-6664	15	5	shown	show	VERB
app01-6664	15	6	[	[	PUNCT
app01-6664	15	7	4	4	NUM
app01-6664	15	8	,	,	PUNCT
app01-6664	15	9	5	5	NUM
app01-6664	15	10	]	]	PUNCT
app01-6664	15	11	that	that	SCONJ
app01-6664	15	12	the	the	DET
app01-6664	15	13	presence	presence	NOUN
app01-6664	15	14	of	of	ADP
app01-6664	15	15	an	an	DET
app01-6664	15	16	inhomogeneous	inhomogeneous	ADJ
app01-6664	15	17	or	or	CCONJ
app01-6664	15	18	layered	layered	ADJ
app01-6664	15	19	coating	coating	NOUN
app01-6664	15	20	on	on	ADP
app01-6664	15	21	the	the	DET
app01-6664	15	22	material	material	NOUN
app01-6664	15	23	significantly	significantly	ADV
app01-6664	15	24	influences	influence	VERB
app01-6664	15	25	the	the	DET
app01-6664	15	26	size	size	NOUN
app01-6664	15	27	of	of	ADP
app01-6664	15	28	the	the	DET
app01-6664	15	29	contact	contact	NOUN
app01-6664	15	30	area	area	NOUN
app01-6664	15	31	.	.	PUNCT
app01-6664	16	1	one	one	PRON
app01-6664	16	2	can	can	AUX
app01-6664	16	3	determine	determine	VERB
app01-6664	16	4	elastic	elastic	ADJ
app01-6664	16	5	moduli	modulus	NOUN
app01-6664	16	6	of	of	ADP
app01-6664	16	7	an	an	DET
app01-6664	16	8	isotropic	isotropic	ADJ
app01-6664	16	9	elastic	elastic	ADJ
app01-6664	16	10	material	material	NOUN
app01-6664	16	11	by	by	ADP
app01-6664	16	12	establishing	establish	VERB
app01-6664	16	13	the	the	DET
app01-6664	16	14	real	real	ADJ
app01-6664	16	15	indentation	indentation	NOUN
app01-6664	16	16	contact	contact	NOUN
app01-6664	16	17	area	area	NOUN
app01-6664	17	1	[	[	X
app01-6664	17	2	6	6	NUM
app01-6664	17	3	]	]	PUNCT
app01-6664	17	4	but	but	CCONJ
app01-6664	17	5	it	it	PRON
app01-6664	17	6	is	be	AUX
app01-6664	17	7	nearly	nearly	ADV
app01-6664	17	8	impossible	impossible	ADJ
app01-6664	17	9	for	for	ADP
app01-6664	17	10	submicron	submicron	NOUN
app01-6664	17	11	indentation	indentation	NOUN
app01-6664	17	12	depth	depth	NOUN
app01-6664	17	13	.	.	PUNCT
app01-6664	18	1	in	in	ADP
app01-6664	18	2	the	the	DET
app01-6664	18	3	present	present	ADJ
app01-6664	18	4	study	study	NOUN
app01-6664	18	5	,	,	PUNCT
app01-6664	18	6	an	an	DET
app01-6664	18	7	effective	effective	ADJ
app01-6664	18	8	mathematical	mathematical	ADJ
app01-6664	18	9	model	model	NOUN
app01-6664	18	10	,	,	PUNCT
app01-6664	18	11	taking	take	VERB
app01-6664	18	12	into	into	ADP
app01-6664	18	13	account	account	NOUN
app01-6664	18	14	the	the	DET
app01-6664	18	15	layered	layered	ADJ
app01-6664	18	16	or	or	CCONJ
app01-6664	18	17	continuously	continuously	ADV
app01-6664	18	18	inhomogeneous	inhomogeneous	ADJ
app01-6664	18	19	structure	structure	NOUN
app01-6664	18	20	of	of	ADP
app01-6664	18	21	the	the	DET
app01-6664	18	22	sample	sample	NOUN
app01-6664	18	23	,	,	PUNCT
app01-6664	18	24	is	be	AUX
app01-6664	18	25	proposed	propose	VERB
app01-6664	18	26	for	for	ADP
app01-6664	18	27	the	the	DET
app01-6664	18	28	description	description	NOUN
app01-6664	18	29	of	of	ADP
app01-6664	18	30	nanoindentation	nanoindentation	NOUN
app01-6664	18	31	experiment	experiment	NOUN
app01-6664	18	32	of	of	ADP
app01-6664	18	33	the	the	DET
app01-6664	18	34	zrn	zrn	NOUN
app01-6664	18	35	coating	coat	VERB
app01-6664	18	36	on	on	ADP
app01-6664	18	37	the	the	DET
app01-6664	18	38	steel	steel	NOUN
app01-6664	18	39	substrate	substrate	NOUN
app01-6664	18	40	.	.	PUNCT
app01-6664	19	1	zrn	zrn	NOUN
app01-6664	19	2	coatings	coating	NOUN
app01-6664	19	3	are	be	AUX
app01-6664	19	4	used	use	VERB
app01-6664	19	5	in	in	ADP
app01-6664	19	6	practice	practice	NOUN
app01-6664	19	7	to	to	PART
app01-6664	19	8	improve	improve	VERB
app01-6664	19	9	the	the	DET
app01-6664	19	10	ability	ability	NOUN
app01-6664	19	11	of	of	ADP
app01-6664	19	12	various	various	ADJ
app01-6664	19	13	tools	tool	NOUN
app01-6664	19	14	for	for	ADP
app01-6664	19	15	drilling	drilling	NOUN
app01-6664	19	16	and	and	CCONJ
app01-6664	19	17	milling	mill	VERB
app01-6664	19	18	aluminum	aluminum	NOUN
app01-6664	19	19	and	and	CCONJ
app01-6664	19	20	titanium	titanium	NOUN
app01-6664	19	21	alloys	alloy	NOUN
app01-6664	19	22	[	[	X
app01-6664	19	23	7	7	NUM
app01-6664	19	24	,	,	PUNCT
app01-6664	19	25	8	8	NUM
app01-6664	19	26	]	]	PUNCT
app01-6664	19	27	,	,	PUNCT
app01-6664	19	28	for	for	ADP
app01-6664	19	29	increasing	increase	VERB
app01-6664	19	30	hardness	hardness	NOUN
app01-6664	19	31	and	and	CCONJ
app01-6664	19	32	abrasive	abrasive	ADJ
app01-6664	19	33	resistance	resistance	NOUN
app01-6664	19	34	of	of	ADP
app01-6664	19	35	surgical	surgical	ADJ
app01-6664	19	36	tools	tool	NOUN
app01-6664	19	37	[	[	X
app01-6664	19	38	9	9	NUM
app01-6664	19	39	]	]	PUNCT
app01-6664	19	40	,	,	PUNCT
app01-6664	19	41	decorative	decorative	ADJ
app01-6664	19	42	purposes	purpose	NOUN
app01-6664	20	1	[	[	X
app01-6664	20	2	10	10	NUM
app01-6664	20	3	]	]	PUNCT
app01-6664	20	4	etc	etc	X
app01-6664	20	5	.	.	X
app01-6664	21	1	the	the	DET
app01-6664	21	2	results	result	NOUN
app01-6664	21	3	of	of	ADP
app01-6664	21	4	the	the	DET
app01-6664	21	5	mathematical	mathematical	ADJ
app01-6664	21	6	modeling	modeling	NOUN
app01-6664	21	7	are	be	AUX
app01-6664	21	8	compared	compare	VERB
app01-6664	21	9	to	to	ADP
app01-6664	21	10	the	the	DET
app01-6664	21	11	results	result	NOUN
app01-6664	21	12	of	of	ADP
app01-6664	21	13	nanoindentation	nanoindentation	NOUN
app01-6664	21	14	experiment	experiment	NOUN
app01-6664	21	15	.	.	PUNCT
app01-6664	22	1	2	2	X
app01-6664	22	2	.	.	X
app01-6664	22	3	materials	material	NOUN
app01-6664	22	4	prior	prior	ADV
app01-6664	22	5	to	to	ADP
app01-6664	22	6	coating	coat	VERB
app01-6664	22	7	deposition	deposition	NOUN
app01-6664	22	8	,	,	PUNCT
app01-6664	22	9	the	the	DET
app01-6664	22	10	preparation	preparation	NOUN
app01-6664	22	11	of	of	ADP
app01-6664	22	12	steel	steel	PROPN
app01-6664	22	13	3cr3mo3v	3cr3mo3v	PROPN
app01-6664	22	14	(	(	PUNCT
app01-6664	22	15	analogue	analogue	NOUN
app01-6664	22	16	to	to	ADP
app01-6664	22	17	h10	h10	PROPN
app01-6664	22	18	[	[	X
app01-6664	22	19	11	11	NUM
app01-6664	22	20	]	]	SYM
app01-6664	22	21	)	)	PUNCT
app01-6664	22	22	substrate	substrate	NOUN
app01-6664	22	23	was	be	AUX
app01-6664	22	24	carried	carry	VERB
app01-6664	22	25	out	out	ADP
app01-6664	22	26	by	by	ADP
app01-6664	22	27	a	a	DET
app01-6664	22	28	standard	standard	ADJ
app01-6664	22	29	metallographical	metallographical	ADJ
app01-6664	22	30	method	method	NOUN
app01-6664	22	31	using	use	VERB
app01-6664	22	32	linear	linear	PROPN
app01-6664	22	33	precision	precision	NOUN
app01-6664	22	34	saw	see	VERB
app01-6664	22	35	isomet	isomet	VERB
app01-6664	22	36	4000	4000	NUM
app01-6664	22	37	(	(	PUNCT
app01-6664	22	38	buehler	buehler	PROPN
app01-6664	22	39	,	,	PUNCT
app01-6664	22	40	usa	usa	PROPN
app01-6664	22	41	)	)	PUNCT
app01-6664	22	42	and	and	CCONJ
app01-6664	22	43	grinding	grind	VERB
app01-6664	22	44	-	-	PUNCT
app01-6664	22	45	polishing	polish	VERB
app01-6664	22	46	machine	machine	NOUN
app01-6664	22	47	metaserv	metaserv	NOUN
app01-6664	22	48	250	250	NUM
app01-6664	22	49	(	(	PUNCT
app01-6664	22	50	buehler	buehler	NOUN
app01-6664	22	51	,	,	PUNCT
app01-6664	22	52	prc	prc	PROPN
app01-6664	22	53	)	)	PUNCT
app01-6664	22	54	.	.	PUNCT
app01-6664	23	1	the	the	DET
app01-6664	23	2	substrate	substrate	NOUN
app01-6664	23	3	was	be	AUX
app01-6664	23	4	mirror	mirror	NOUN
app01-6664	23	5	polished	polish	VERB
app01-6664	23	6	in	in	ADP
app01-6664	23	7	several	several	ADJ
app01-6664	23	8	steps	step	NOUN
app01-6664	23	9	with	with	ADP
app01-6664	23	10	the	the	DET
app01-6664	23	11	abrasive	abrasive	ADJ
app01-6664	23	12	particles	particle	NOUN
app01-6664	23	13	of	of	ADP
app01-6664	23	14	various	various	ADJ
app01-6664	23	15	diameters	diameter	NOUN
app01-6664	23	16	(	(	PUNCT
app01-6664	23	17	down	down	ADP
app01-6664	23	18	to	to	ADP
app01-6664	23	19	0.05	0.05	NUM
app01-6664	23	20	µm	µm	NOUN
app01-6664	23	21	)	)	PUNCT
app01-6664	23	22	.	.	PUNCT
app01-6664	24	1	the	the	DET
app01-6664	24	2	zrn	zrn	NOUN
app01-6664	24	3	coating	coating	NOUN
app01-6664	24	4	was	be	AUX
app01-6664	24	5	deposited	deposit	VERB
app01-6664	24	6	on	on	ADP
app01-6664	24	7	the	the	DET
app01-6664	24	8	ion	ion	NOUN
app01-6664	24	9	-	-	PUNCT
app01-6664	24	10	plasma	plasma	NOUN
app01-6664	24	11	sputtering	sputter	VERB
app01-6664	24	12	unit	unit	NOUN
app01-6664	24	13	bulat	bulat	NOUN
app01-6664	24	14	6	6	NUM
app01-6664	24	15	.	.	PUNCT
app01-6664	25	1	the	the	DET
app01-6664	25	2	substrate	substrate	NOUN
app01-6664	25	3	was	be	AUX
app01-6664	25	4	heated	heat	VERB
app01-6664	25	5	to	to	ADP
app01-6664	25	6	550	550	NUM
app01-6664	25	7	-	-	SYM
app01-6664	25	8	600	600	NUM
app01-6664	25	9	◦	◦	NOUN
app01-6664	25	10	c	c	NOUN
app01-6664	25	11	,	,	PUNCT
app01-6664	25	12	ionic	ionic	ADJ
app01-6664	25	13	surface	surface	NOUN
app01-6664	25	14	cleaning	cleaning	NOUN
app01-6664	25	15	was	be	AUX
app01-6664	25	16	conducted	conduct	VERB
app01-6664	25	17	,	,	PUNCT
app01-6664	25	18	then	then	ADV
app01-6664	25	19	deposition	deposition	NOUN
app01-6664	25	20	was	be	AUX
app01-6664	25	21	carried	carry	VERB
app01-6664	25	22	out	out	ADP
app01-6664	25	23	at	at	ADP
app01-6664	25	24	60	60	NUM
app01-6664	25	25	-	-	SYM
app01-6664	25	26	65	65	NUM
app01-6664	25	27	v	v	NUM
app01-6664	25	28	supply	supply	NOUN
app01-6664	25	29	voltage	voltage	NOUN
app01-6664	25	30	of	of	ADP
app01-6664	25	31	the	the	DET
app01-6664	25	32	substrate	substrate	NOUN
app01-6664	25	33	and	and	CCONJ
app01-6664	25	34	130	130	NUM
app01-6664	25	35	-	-	SYM
app01-6664	25	36	140	140	NUM
app01-6664	25	37	a	a	DET
app01-6664	25	38	current	current	NOUN
app01-6664	25	39	.	.	PUNCT
app01-6664	26	1	the	the	DET
app01-6664	26	2	microgeometrical	microgeometrical	PROPN
app01-6664	26	3	characteristics	characteristic	NOUN
app01-6664	26	4	of	of	ADP
app01-6664	26	5	the	the	DET
app01-6664	26	6	sample	sample	NOUN
app01-6664	26	7	were	be	AUX
app01-6664	26	8	studied	study	VERB
app01-6664	26	9	for	for	ADP
app01-6664	26	10	using	use	VERB
app01-6664	26	11	contour	contour	NOUN
app01-6664	26	12	elite	elite	ADJ
app01-6664	26	13	3d	3d	PROPN
app01-6664	26	14	optical	optical	ADJ
app01-6664	26	15	microscope	microscope	NOUN
app01-6664	26	16	(	(	PUNCT
app01-6664	26	17	bruker	bruker	PROPN
app01-6664	26	18	,	,	PUNCT
app01-6664	26	19	belgium	belgium	PROPN
app01-6664	26	20	)	)	PUNCT
app01-6664	26	21	.	.	PUNCT
app01-6664	27	1	figure	figure	NOUN
app01-6664	27	2	1	1	NUM
app01-6664	27	3	shows	show	VERB
app01-6664	27	4	surface	surface	NOUN
app01-6664	27	5	profiles	profile	NOUN
app01-6664	27	6	constructed	construct	VERB
app01-6664	27	7	in	in	ADP
app01-6664	27	8	the	the	DET
app01-6664	27	9	software	software	NOUN
app01-6664	27	10	vision64	vision64	NOUN
app01-6664	27	11	(	(	PUNCT
app01-6664	27	12	bruker	bruker	PROPN
app01-6664	27	13	,	,	PUNCT
app01-6664	27	14	belgium	belgium	NOUN
app01-6664	27	15	)	)	PUNCT
app01-6664	27	16	in	in	ADP
app01-6664	27	17	horizontal	horizontal	ADJ
app01-6664	27	18	and	and	CCONJ
app01-6664	27	19	vertical	vertical	ADJ
app01-6664	27	20	directions	direction	NOUN
app01-6664	27	21	(	(	PUNCT
app01-6664	27	22	filter	filter	NOUN
app01-6664	27	23	type	type	NOUN
app01-6664	27	24	:	:	PUNCT
app01-6664	27	25	gaussian	gaussian	ADJ
app01-6664	27	26	regression	regression	NOUN
app01-6664	27	27	,	,	PUNCT
app01-6664	27	28	long	long	ADJ
app01-6664	27	29	cutoff	cutoff	NOUN
app01-6664	27	30	250	250	NUM
app01-6664	27	31	µm	µm	NOUN
app01-6664	27	32	)	)	PUNCT
app01-6664	27	33	.	.	PUNCT
app01-6664	28	1	the	the	DET
app01-6664	28	2	values	value	NOUN
app01-6664	28	3	for	for	ADP
app01-6664	28	4	the	the	DET
app01-6664	28	5	average	average	ADJ
app01-6664	28	6	roughness	roughness	NOUN
app01-6664	28	7	ra	ra	PROPN
app01-6664	28	8	and	and	CCONJ
app01-6664	28	9	the	the	DET
app01-6664	28	10	maximum	maximum	ADJ
app01-6664	28	11	roughness	roughness	NOUN
app01-6664	28	12	height	height	NOUN
app01-6664	28	13	rt	rt	PROPN
app01-6664	28	14	were	be	AUX
app01-6664	28	15	calculated	calculate	VERB
app01-6664	28	16	according	accord	VERB
app01-6664	28	17	iso	iso	NOUN
app01-6664	28	18	4287	4287	NUM
app01-6664	28	19	[	[	X
app01-6664	28	20	12	12	NUM
app01-6664	28	21	]	]	X
app01-6664	28	22	standard	standard	NOUN
app01-6664	28	23	and	and	CCONJ
app01-6664	28	24	are	be	AUX
app01-6664	28	25	summarized	summarize	VERB
app01-6664	28	26	in	in	ADP
app01-6664	28	27	the	the	DET
app01-6664	28	28	table	table	NOUN
app01-6664	28	29	1	1	NUM
app01-6664	28	30	.	.	PUNCT
app01-6664	29	1	these	these	DET
app01-6664	29	2	values	value	NOUN
app01-6664	29	3	were	be	AUX
app01-6664	29	4	used	use	VERB
app01-6664	29	5	for	for	ADP
app01-6664	29	6	choosing	choose	VERB
app01-6664	29	7	optimal	optimal	ADJ
app01-6664	29	8	parameters	parameter	NOUN
app01-6664	29	9	for	for	ADP
app01-6664	29	10	the	the	DET
app01-6664	29	11	nanoindentation	nanoindentation	NOUN
app01-6664	29	12	experiment	experiment	NOUN
app01-6664	29	13	.	.	PUNCT
app01-6664	30	1	the	the	DET
app01-6664	30	2	extremely	extremely	ADV
app01-6664	30	3	high	high	ADJ
app01-6664	30	4	rt	rt	PROPN
app01-6664	30	5	values	value	NOUN
app01-6664	30	6	can	can	AUX
app01-6664	30	7	be	be	AUX
app01-6664	30	8	explained	explain	VERB
app01-6664	30	9	by	by	ADP
app01-6664	30	10	the	the	DET
app01-6664	30	11	presence	presence	NOUN
app01-6664	30	12	of	of	ADP
app01-6664	30	13	the	the	DET
app01-6664	30	14	artefacts	artefact	NOUN
app01-6664	30	15	of	of	ADP
app01-6664	30	16	deposition	deposition	NOUN
app01-6664	30	17	on	on	ADP
app01-6664	30	18	the	the	DET
app01-6664	30	19	surface	surface	NOUN
app01-6664	30	20	of	of	ADP
app01-6664	30	21	the	the	DET
app01-6664	30	22	coating	coating	NOUN
app01-6664	30	23	:	:	PUNCT
app01-6664	30	24	caverns	cavern	NOUN
app01-6664	30	25	and	and	CCONJ
app01-6664	30	26	crystallized	crystallize	VERB
app01-6664	30	27	droplets	droplet	NOUN
app01-6664	30	28	(	(	PUNCT
app01-6664	30	29	figure	figure	NOUN
app01-6664	30	30	2a	2a	NUM
app01-6664	30	31	)	)	PUNCT
app01-6664	30	32	.	.	PUNCT
app01-6664	31	1	one	one	NUM
app01-6664	31	2	of	of	ADP
app01-6664	31	3	the	the	DET
app01-6664	31	4	crucial	crucial	ADJ
app01-6664	31	5	characteristics	characteristic	NOUN
app01-6664	31	6	for	for	ADP
app01-6664	31	7	the	the	DET
app01-6664	31	8	mathematical	mathematical	ADJ
app01-6664	31	9	modelling	modelling	NOUN
app01-6664	31	10	,	,	PUNCT
app01-6664	31	11	the	the	DET
app01-6664	31	12	coating	coating	NOUN
app01-6664	31	13	thickness	thickness	NOUN
app01-6664	31	14	,	,	PUNCT
app01-6664	31	15	was	be	AUX
app01-6664	31	16	determined	determine	VERB
app01-6664	31	17	using	use	VERB
app01-6664	31	18	ion	ion	NOUN
app01-6664	31	19	beam	beam	NOUN
app01-6664	31	20	etching	etch	VERB
app01-6664	31	21	on	on	ADP
app01-6664	31	22	the	the	DET
app01-6664	31	23	scanning	scanning	NOUN
app01-6664	31	24	electron	electron	NOUN
app01-6664	31	25	microscope	microscope	NOUN
app01-6664	31	26	(	(	PUNCT
app01-6664	31	27	sem	sem	NOUN
app01-6664	31	28	)	)	PUNCT
app01-6664	31	29	.	.	PUNCT
app01-6664	32	1	its	its	PRON
app01-6664	32	2	value	value	NOUN
app01-6664	32	3	reached	reach	VERB
app01-6664	32	4	2.7	2.7	NUM
app01-6664	32	5	µm	µm	NOUN
app01-6664	32	6	after	after	ADP
app01-6664	32	7	ap18	ap18	PROPN
app01-6664	32	8	http://dx.doi.org/10.14311/app.2020.27.0018	http://dx.doi.org/10.14311/app.2020.27.0018	PROPN
app01-6664	32	9	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	X
app01-6664	32	10	vol	vol	NOUN
app01-6664	32	11	.	.	PUNCT
app01-6664	33	1	27/2020	27/2020	NUM
app01-6664	33	2	mathematical	mathematical	ADJ
app01-6664	33	3	modeling	modeling	NOUN
app01-6664	33	4	zrn	zrn	NOUN
app01-6664	33	5	coating	coat	VERB
app01-6664	33	6	figure	figure	NOUN
app01-6664	33	7	1	1	NUM
app01-6664	33	8	.	.	PUNCT
app01-6664	33	9	surface	surface	NOUN
app01-6664	33	10	profile	profile	NOUN
app01-6664	33	11	of	of	ADP
app01-6664	33	12	zrn	zrn	NOUN
app01-6664	33	13	coating	coat	VERB
app01-6664	33	14	across	across	ADP
app01-6664	33	15	directions	direction	NOUN
app01-6664	33	16	:	:	PUNCT
app01-6664	33	17	a	a	X
app01-6664	33	18	)	)	PUNCT
app01-6664	33	19	horizontal	horizontal	ADJ
app01-6664	33	20	;	;	PUNCT
app01-6664	33	21	b	b	X
app01-6664	33	22	)	)	PUNCT
app01-6664	33	23	vertical	vertical	ADJ
app01-6664	33	24	.	.	PUNCT
app01-6664	34	1	characteristic	characteristic	ADJ
app01-6664	34	2	horizontal	horizontal	ADJ
app01-6664	34	3	direction	direction	NOUN
app01-6664	34	4	,	,	PUNCT
app01-6664	34	5	[	[	X
app01-6664	34	6	m	m	X
app01-6664	34	7	]	]	X
app01-6664	34	8	vertical	vertical	ADJ
app01-6664	34	9	direction	direction	NOUN
app01-6664	34	10	,	,	PUNCT
app01-6664	34	11	[	[	X
app01-6664	34	12	µm	µm	X
app01-6664	34	13	]	]	X
app01-6664	34	14	ra	ra	NOUN
app01-6664	35	1	0.073	0.073	NUM
app01-6664	35	2	0.052	0.052	NUM
app01-6664	35	3	rt	rt	PROPN
app01-6664	35	4	0.984	0.984	NUM
app01-6664	35	5	0.73	0.73	NUM
app01-6664	35	6	table	table	NOUN
app01-6664	35	7	1	1	NUM
app01-6664	35	8	.	.	X
app01-6664	36	1	zrn	zrn	NOUN
app01-6664	36	2	coating	coat	VERB
app01-6664	36	3	microgeometrical	microgeometrical	ADJ
app01-6664	36	4	characteristics	characteristic	NOUN
app01-6664	36	5	.	.	PUNCT
app01-6664	37	1	a	a	DET
app01-6664	37	2	)	)	PUNCT
app01-6664	37	3	b	b	NOUN
app01-6664	37	4	)	)	PUNCT
app01-6664	37	5	figure	figure	NOUN
app01-6664	37	6	2	2	NUM
app01-6664	37	7	.	.	X
app01-6664	37	8	zrn	zrn	NOUN
app01-6664	37	9	coating	coat	VERB
app01-6664	37	10	research	research	NOUN
app01-6664	37	11	using	use	VERB
app01-6664	37	12	sem	sem	NOUN
app01-6664	37	13	:	:	PUNCT
app01-6664	37	14	a	a	X
app01-6664	37	15	)	)	PUNCT
app01-6664	37	16	artefacts	artefact	NOUN
app01-6664	37	17	of	of	ADP
app01-6664	37	18	deposition	deposition	NOUN
app01-6664	37	19	;	;	PUNCT
app01-6664	37	20	b	b	X
app01-6664	37	21	)	)	PUNCT
app01-6664	37	22	coating	coat	VERB
app01-6664	37	23	thickness	thickness	NOUN
app01-6664	37	24	.	.	PUNCT
app01-6664	38	1	propriate	propriate	ADJ
app01-6664	38	2	tilt	tilt	NOUN
app01-6664	38	3	correction	correction	NOUN
app01-6664	38	4	in	in	ADP
app01-6664	38	5	the	the	DET
app01-6664	38	6	software	software	NOUN
app01-6664	38	7	of	of	ADP
app01-6664	38	8	the	the	DET
app01-6664	38	9	device	device	NOUN
app01-6664	38	10	(	(	PUNCT
app01-6664	38	11	figure	figure	NOUN
app01-6664	38	12	2b	2b	NOUN
app01-6664	38	13	)	)	PUNCT
app01-6664	38	14	.	.	PUNCT
app01-6664	39	1	3	3	X
app01-6664	39	2	.	.	X
app01-6664	39	3	methods	method	NOUN
app01-6664	39	4	nanoindentation	nanoindentation	NOUN
app01-6664	39	5	research	research	NOUN
app01-6664	39	6	was	be	AUX
app01-6664	39	7	conducted	conduct	VERB
app01-6664	39	8	on	on	ADP
app01-6664	39	9	the	the	DET
app01-6664	39	10	nanotest	nanot	ADJ
app01-6664	39	11	600	600	NUM
app01-6664	39	12	platform	platform	NOUN
app01-6664	39	13	3	3	NUM
app01-6664	39	14	(	(	PUNCT
app01-6664	39	15	micro	micro	ADJ
app01-6664	39	16	materials	material	NOUN
app01-6664	39	17	,	,	PUNCT
app01-6664	39	18	uk	uk	NOUN
app01-6664	39	19	)	)	PUNCT
app01-6664	39	20	device	device	NOUN
app01-6664	39	21	.	.	PUNCT
app01-6664	40	1	all	all	DET
app01-6664	40	2	the	the	DET
app01-6664	40	3	experiments	experiment	NOUN
app01-6664	40	4	were	be	AUX
app01-6664	40	5	made	make	VERB
app01-6664	40	6	in	in	ADP
app01-6664	40	7	the	the	DET
app01-6664	40	8	closed	closed	ADJ
app01-6664	40	9	chamber	chamber	NOUN
app01-6664	40	10	at	at	ADP
app01-6664	40	11	a	a	DET
app01-6664	40	12	constant	constant	ADJ
app01-6664	40	13	temperature	temperature	NOUN
app01-6664	40	14	of	of	ADP
app01-6664	40	15	27.0	27.0	NUM
app01-6664	40	16	±	±	NUM
app01-6664	40	17	0.1	0.1	NUM
app01-6664	40	18	◦	◦	NOUN
app01-6664	40	19	c	c	NOUN
app01-6664	40	20	,	,	PUNCT
app01-6664	40	21	the	the	DET
app01-6664	40	22	berkovich	berkovich	NOUN
app01-6664	40	23	indenter	indenter	NOUN
app01-6664	40	24	with	with	ADP
app01-6664	40	25	a	a	DET
app01-6664	40	26	diamond	diamond	NOUN
app01-6664	40	27	tip	tip	NOUN
app01-6664	40	28	was	be	AUX
app01-6664	40	29	used	use	VERB
app01-6664	40	30	.	.	PUNCT
app01-6664	41	1	the	the	DET
app01-6664	41	2	following	follow	VERB
app01-6664	41	3	load	load	NOUN
app01-6664	41	4	profile	profile	NOUN
app01-6664	41	5	was	be	AUX
app01-6664	41	6	applied	apply	VERB
app01-6664	41	7	:	:	PUNCT
app01-6664	41	8	the	the	DET
app01-6664	41	9	load	load	NOUN
app01-6664	41	10	linearly	linearly	ADV
app01-6664	41	11	increased	increase	VERB
app01-6664	41	12	for	for	ADP
app01-6664	41	13	30	30	NUM
app01-6664	41	14	seconds	second	NOUN
app01-6664	41	15	,	,	PUNCT
app01-6664	41	16	held	hold	VERB
app01-6664	41	17	constant	constant	ADJ
app01-6664	41	18	for	for	ADP
app01-6664	41	19	30	30	NUM
app01-6664	41	20	seconds	second	NOUN
app01-6664	41	21	,	,	PUNCT
app01-6664	41	22	then	then	ADV
app01-6664	41	23	linearly	linearly	ADV
app01-6664	41	24	decreased	decrease	VERB
app01-6664	41	25	for	for	ADP
app01-6664	41	26	30	30	NUM
app01-6664	41	27	seconds	second	NOUN
app01-6664	41	28	.	.	PUNCT
app01-6664	42	1	before	before	ADP
app01-6664	42	2	the	the	DET
app01-6664	42	3	coating	coating	NOUN
app01-6664	42	4	investigation	investigation	NOUN
app01-6664	42	5	the	the	DET
app01-6664	42	6	value	value	NOUN
app01-6664	42	7	for	for	ADP
app01-6664	42	8	the	the	DET
app01-6664	42	9	young	young	PROPN
app01-6664	42	10	’s	’s	PART
app01-6664	42	11	modulus	modulus	ADJ
app01-6664	42	12	e	e	NOUN
app01-6664	42	13	of	of	ADP
app01-6664	42	14	the	the	DET
app01-6664	42	15	substrate	substrate	NOUN
app01-6664	42	16	was	be	AUX
app01-6664	42	17	obtained	obtain	VERB
app01-6664	42	18	for	for	ADP
app01-6664	42	19	the	the	DET
app01-6664	42	20	needs	need	NOUN
app01-6664	42	21	of	of	ADP
app01-6664	42	22	mathematical	mathematical	ADJ
app01-6664	42	23	modelling	modelling	NOUN
app01-6664	42	24	,	,	PUNCT
app01-6664	42	25	it	it	PRON
app01-6664	42	26	reached	reach	VERB
app01-6664	42	27	267.11	267.11	NUM
app01-6664	42	28	±	±	NOUN
app01-6664	42	29	10.65	10.65	NUM
app01-6664	42	30	gpa	gpa	PROPN
app01-6664	42	31	.	.	PUNCT
app01-6664	43	1	the	the	DET
app01-6664	43	2	value	value	NOUN
app01-6664	43	3	of	of	ADP
app01-6664	43	4	poisson	poisson	PROPN
app01-6664	43	5	’s	’s	PART
app01-6664	43	6	ratio	ratio	NOUN
app01-6664	43	7	of	of	ADP
app01-6664	43	8	the	the	DET
app01-6664	43	9	steel	steel	NOUN
app01-6664	43	10	substrate	substrate	NOUN
app01-6664	43	11	was	be	AUX
app01-6664	43	12	taken	take	VERB
app01-6664	43	13	ν	ν	NOUN
app01-6664	43	14	=	=	PUNCT
app01-6664	43	15	0.3	0.3	NUM
app01-6664	44	1	[	[	X
app01-6664	44	2	13	13	NUM
app01-6664	44	3	]	]	PUNCT
app01-6664	44	4	.	.	PUNCT
app01-6664	45	1	the	the	DET
app01-6664	45	2	series	series	NOUN
app01-6664	45	3	of	of	ADP
app01-6664	45	4	nanoindentation	nanoindentation	NOUN
app01-6664	45	5	experiments	experiment	NOUN
app01-6664	45	6	was	be	AUX
app01-6664	45	7	conducted	conduct	VERB
app01-6664	45	8	for	for	ADP
app01-6664	45	9	different	different	ADJ
app01-6664	45	10	maximum	maximum	ADJ
app01-6664	45	11	loads	load	NOUN
app01-6664	45	12	pmax	pmax	ADJ
app01-6664	45	13	:	:	PUNCT
app01-6664	45	14	load	load	NOUN
app01-6664	45	15	varied	varied	ADJ
app01-6664	45	16	within	within	ADP
app01-6664	45	17	5	5	NUM
app01-6664	45	18	mn	mn	PROPN
app01-6664	45	19	≤	≤	PROPN
app01-6664	45	20	pmax	pmax	ADJ
app01-6664	45	21	≤	≤	PROPN
app01-6664	45	22	280	280	NUM
app01-6664	45	23	mn	mn	PROPN
app01-6664	45	24	.	.	PUNCT
app01-6664	46	1	the	the	DET
app01-6664	46	2	corresponding	corresponding	ADJ
app01-6664	46	3	maximum	maximum	ADJ
app01-6664	46	4	indentation	indentation	NOUN
app01-6664	46	5	depth	depth	NOUN
app01-6664	46	6	hmax	hmax	NOUN
app01-6664	46	7	was	be	AUX
app01-6664	46	8	as	as	SCONJ
app01-6664	46	9	follows	follow	VERB
app01-6664	46	10	:	:	PUNCT
app01-6664	46	11	65	65	NUM
app01-6664	46	12	nm	nm	NOUN
app01-6664	46	13	≤	≤	NUM
app01-6664	46	14	hmax	hmax	VERB
app01-6664	46	15	≤	≤	NOUN
app01-6664	46	16	1414	1414	NUM
app01-6664	46	17	nm	nm	NOUN
app01-6664	46	18	.	.	PUNCT
app01-6664	47	1	for	for	ADP
app01-6664	47	2	each	each	DET
app01-6664	47	3	pmax	pmax	NOUN
app01-6664	47	4	,	,	PUNCT
app01-6664	47	5	8	8	NUM
app01-6664	47	6	to	to	PART
app01-6664	47	7	12	12	NUM
app01-6664	47	8	identical	identical	ADJ
app01-6664	47	9	indentations	indentation	NOUN
app01-6664	47	10	were	be	AUX
app01-6664	47	11	carried	carry	VERB
app01-6664	47	12	at	at	ADP
app01-6664	47	13	different	different	ADJ
app01-6664	47	14	locations	location	NOUN
app01-6664	47	15	,	,	PUNCT
app01-6664	47	16	the	the	DET
app01-6664	47	17	results	result	NOUN
app01-6664	47	18	were	be	AUX
app01-6664	47	19	averaged	average	VERB
app01-6664	47	20	.	.	PUNCT
app01-6664	48	1	4	4	X
app01-6664	48	2	.	.	NOUN
app01-6664	48	3	results	result	NOUN
app01-6664	48	4	and	and	CCONJ
app01-6664	48	5	discussion	discussion	NOUN
app01-6664	48	6	the	the	DET
app01-6664	48	7	experimentally	experimentally	ADV
app01-6664	48	8	collected	collect	VERB
app01-6664	48	9	characteristics	characteristic	NOUN
app01-6664	48	10	allowed	allow	VERB
app01-6664	48	11	us	we	PRON
app01-6664	48	12	to	to	PART
app01-6664	48	13	perform	perform	VERB
app01-6664	48	14	the	the	DET
app01-6664	48	15	mathematical	mathematical	ADJ
app01-6664	48	16	modelling	modelling	NOUN
app01-6664	48	17	of	of	ADP
app01-6664	48	18	the	the	DET
app01-6664	48	19	indentation	indentation	NOUN
app01-6664	48	20	process	process	NOUN
app01-6664	48	21	.	.	PUNCT
app01-6664	49	1	the	the	DET
app01-6664	49	2	berkovich	berkovich	PROPN
app01-6664	49	3	indenter	indenter	PROPN
app01-6664	49	4	was	be	AUX
app01-6664	49	5	modeled	model	VERB
app01-6664	49	6	by	by	ADP
app01-6664	49	7	an	an	DET
app01-6664	49	8	elastic	elastic	ADJ
app01-6664	49	9	body	body	NOUN
app01-6664	49	10	of	of	ADP
app01-6664	49	11	conical	conical	ADJ
app01-6664	49	12	shape	shape	NOUN
app01-6664	49	13	with	with	ADP
app01-6664	49	14	the	the	DET
app01-6664	49	15	elastic	elastic	ADJ
app01-6664	49	16	moduli	modulus	NOUN
app01-6664	49	17	epunch	epunch	NOUN
app01-6664	49	18	=	=	SYM
app01-6664	49	19	1131	1131	NUM
app01-6664	49	20	gpa	gpa	NOUN
app01-6664	49	21	and	and	CCONJ
app01-6664	49	22	νpunch	νpunch	ADJ
app01-6664	49	23	=	=	NOUN
app01-6664	49	24	0.07	0.07	NUM
app01-6664	49	25	.	.	PUNCT
app01-6664	50	1	the	the	DET
app01-6664	50	2	zrn	zrn	PROPN
app01-6664	50	3	on	on	ADP
app01-6664	50	4	the	the	DET
app01-6664	50	5	steel	steel	NOUN
app01-6664	50	6	substrate	substrate	NOUN
app01-6664	50	7	system	system	NOUN
app01-6664	50	8	was	be	AUX
app01-6664	50	9	modeled	model	VERB
app01-6664	50	10	by	by	ADP
app01-6664	50	11	a	a	DET
app01-6664	50	12	half	half	ADJ
app01-6664	50	13	-	-	PUNCT
app01-6664	50	14	space	space	NOUN
app01-6664	50	15	with	with	ADP
app01-6664	50	16	a	a	DET
app01-6664	50	17	coating	coating	NOUN
app01-6664	50	18	since	since	SCONJ
app01-6664	50	19	the	the	DET
app01-6664	50	20	contact	contact	NOUN
app01-6664	50	21	area	area	NOUN
app01-6664	50	22	between	between	ADP
app01-6664	50	23	indenter	indenter	NOUN
app01-6664	50	24	and	and	CCONJ
app01-6664	50	25	the	the	DET
app01-6664	50	26	sample	sample	NOUN
app01-6664	50	27	is	be	AUX
app01-6664	50	28	much	much	ADV
app01-6664	50	29	smaller	small	ADJ
app01-6664	50	30	than	than	ADP
app01-6664	50	31	the	the	DET
app01-6664	50	32	sample	sample	NOUN
app01-6664	50	33	size	size	NOUN
app01-6664	50	34	.	.	PUNCT
app01-6664	51	1	the	the	DET
app01-6664	51	2	contact	contact	NOUN
app01-6664	51	3	problem	problem	NOUN
app01-6664	51	4	was	be	AUX
app01-6664	51	5	reduced	reduce	VERB
app01-6664	51	6	to	to	ADP
app01-6664	51	7	the	the	DET
app01-6664	51	8	solution	solution	NOUN
app01-6664	51	9	of	of	ADP
app01-6664	51	10	the	the	DET
app01-6664	51	11	dual	dual	ADJ
app01-6664	51	12	integral	integral	ADJ
app01-6664	51	13	equation	equation	NOUN
app01-6664	51	14	,	,	PUNCT
app01-6664	51	15	the	the	DET
app01-6664	51	16	solution	solution	NOUN
app01-6664	51	17	of	of	ADP
app01-6664	51	18	which	which	PRON
app01-6664	51	19	was	be	AUX
app01-6664	51	20	constructed	construct	VERB
app01-6664	51	21	by	by	ADP
app01-6664	51	22	the	the	DET
app01-6664	51	23	authors	author	NOUN
app01-6664	51	24	earlier	early	ADV
app01-6664	51	25	[	[	X
app01-6664	51	26	14	14	NUM
app01-6664	51	27	]	]	PUNCT
app01-6664	51	28	.	.	PUNCT
app01-6664	52	1	using	use	VERB
app01-6664	52	2	the	the	DET
app01-6664	52	3	bilateral	bilateral	ADJ
app01-6664	52	4	asymptotic	asymptotic	ADJ
app01-6664	52	5	method	method	NOUN
app01-6664	52	6	,	,	PUNCT
app01-6664	52	7	the	the	DET
app01-6664	52	8	approximated	approximate	VERB
app01-6664	52	9	analytical	analytical	ADJ
app01-6664	52	10	expressions	expression	NOUN
app01-6664	52	11	for	for	ADP
app01-6664	52	12	the	the	DET
app01-6664	52	13	indentation	indentation	NOUN
app01-6664	52	14	stiffness	stiffness	NOUN
app01-6664	52	15	,	,	PUNCT
app01-6664	52	16	force	force	NOUN
app01-6664	52	17	and	and	CCONJ
app01-6664	52	18	indentation	indentation	NOUN
app01-6664	52	19	depth	depth	NOUN
app01-6664	52	20	were	be	AUX
app01-6664	52	21	obtained	obtain	VERB
app01-6664	52	22	(	(	PUNCT
app01-6664	52	23	1)−	1)−	PROPN
app01-6664	52	24	(	(	PUNCT
app01-6664	52	25	3	3	NUM
app01-6664	52	26	)	)	PUNCT
app01-6664	52	27	.	.	PUNCT
app01-6664	53	1	in	in	ADP
app01-6664	53	2	the	the	DET
app01-6664	53	3	formulas	formula	NOUN
app01-6664	53	4	above	above	ADP
app01-6664	53	5	a−	a−	PROPN
app01-6664	53	6	the	the	DET
app01-6664	53	7	radius	radius	NOUN
app01-6664	53	8	of	of	ADP
app01-6664	53	9	the	the	DET
app01-6664	53	10	contact	contact	NOUN
app01-6664	53	11	area	area	NOUN
app01-6664	53	12	(	(	PUNCT
app01-6664	53	13	m);α−	m);α−	ADP
app01-6664	53	14	the	the	DET
app01-6664	53	15	half	half	NOUN
app01-6664	53	16	of	of	ADP
app01-6664	53	17	the	the	DET
app01-6664	53	18	angle	angle	NOUN
app01-6664	53	19	of	of	ADP
app01-6664	53	20	the	the	DET
app01-6664	53	21	conical	conical	NOUN
app01-6664	53	22	punch	punch	NOUN
app01-6664	53	23	opening	opening	NOUN
app01-6664	53	24	;	;	PUNCT
app01-6664	53	25	λ	λ	X
app01-6664	53	26	=	=	SYM
app01-6664	53	27	h	h	PROPN
app01-6664	53	28	/	/	SYM
app01-6664	53	29	a−	a−	NOUN
app01-6664	53	30	the	the	DET
app01-6664	53	31	dimensionless	dimensionless	NOUN
app01-6664	53	32	thickness	thickness	NOUN
app01-6664	53	33	of	of	ADP
app01-6664	53	34	the	the	DET
app01-6664	53	35	coating	coating	NOUN
app01-6664	53	36	;	;	PUNCT
app01-6664	53	37	h−	h−	VERB
app01-6664	53	38	the	the	DET
app01-6664	53	39	coating	coat	VERB
app01-6664	53	40	thickness	thickness	NOUN
app01-6664	53	41	(	(	PUNCT
app01-6664	53	42	m	m	NOUN
app01-6664	53	43	)	)	PUNCT
app01-6664	53	44	;	;	PUNCT
app01-6664	54	1	e	e	X
app01-6664	54	2	(	(	PUNCT
app01-6664	54	3	s	s	X
app01-6664	54	4	)	)	PUNCT
app01-6664	54	5	ef	ef	PROPN
app01-6664	54	6	=	=	PUNCT
app01-6664	54	7	e/	e/	PROPN
app01-6664	54	8	(	(	PUNCT
app01-6664	54	9	1−	1−	NUM
app01-6664	54	10	v2)−	v2)−	VERB
app01-6664	54	11	the	the	DET
app01-6664	54	12	effective	effective	ADJ
app01-6664	54	13	elastic	elastic	ADJ
app01-6664	54	14	modulus	modulus	NOUN
app01-6664	54	15	of	of	ADP
app01-6664	54	16	the	the	DET
app01-6664	54	17	substrate	substrate	NOUN
app01-6664	54	18	(	(	PUNCT
app01-6664	54	19	pa	pa	PROPN
app01-6664	54	20	)	)	PUNCT
app01-6664	54	21	;	;	PUNCT
app01-6664	54	22	ai	ai	VERB
app01-6664	54	23	,	,	PUNCT
app01-6664	54	24	ci	ci	NOUN
app01-6664	54	25	,	,	PUNCT
app01-6664	54	26	di−	di−	VERB
app01-6664	54	27	the	the	DET
app01-6664	54	28	constants	constant	NOUN
app01-6664	54	29	depending	depend	VERB
app01-6664	54	30	on	on	ADP
app01-6664	54	31	the	the	DET
app01-6664	54	32	elastic	elastic	ADJ
app01-6664	54	33	properties	property	NOUN
app01-6664	54	34	of	of	ADP
app01-6664	54	35	the	the	DET
app01-6664	54	36	coating	coating	NOUN
app01-6664	54	37	and	and	CCONJ
app01-6664	54	38	the	the	DET
app01-6664	54	39	substrate	substrate	NOUN
app01-6664	54	40	[	[	X
app01-6664	54	41	14	14	NUM
app01-6664	54	42	]	]	PUNCT
app01-6664	54	43	.	.	PUNCT
app01-6664	55	1	expressions	expression	NOUN
app01-6664	55	2	(	(	PUNCT
app01-6664	55	3	1)-(3	1)-(3	NOUN
app01-6664	55	4	)	)	PUNCT
app01-6664	55	5	are	be	AUX
app01-6664	55	6	asymptotically	asymptotically	ADV
app01-6664	55	7	exact	exact	ADJ
app01-6664	55	8	for	for	ADP
app01-6664	55	9	λ	λ	PROPN
app01-6664	55	10	→	→	SYM
app01-6664	55	11	0	0	NUM
app01-6664	55	12	and	and	CCONJ
app01-6664	55	13	λ	λ	PROPN
app01-6664	55	14	→	→	SYM
app01-6664	55	15	∞.	∞.	PROPN
app01-6664	55	16	the	the	DET
app01-6664	55	17	functions	function	NOUN
app01-6664	55	18	p0(λ	p0(λ	X
app01-6664	55	19	)	)	PUNCT
app01-6664	55	20	,	,	PUNCT
app01-6664	55	21	δ0(λ	δ0(λ	X
app01-6664	55	22	)	)	PUNCT
app01-6664	55	23	describe	describe	VERB
app01-6664	55	24	the	the	DET
app01-6664	55	25	influence	influence	NOUN
app01-6664	55	26	of	of	ADP
app01-6664	55	27	the	the	DET
app01-6664	55	28	coating	coating	NOUN
app01-6664	55	29	on	on	ADP
app01-6664	55	30	the	the	DET
app01-6664	55	31	characteristics	characteristic	NOUN
app01-6664	55	32	of	of	ADP
app01-6664	55	33	the	the	DET
app01-6664	55	34	contact	contact	NOUN
app01-6664	55	35	.	.	PUNCT
app01-6664	56	1	it	it	PRON
app01-6664	56	2	is	be	AUX
app01-6664	56	3	clear	clear	ADJ
app01-6664	56	4	that	that	SCONJ
app01-6664	56	5	if	if	SCONJ
app01-6664	56	6	the	the	DET
app01-6664	56	7	coating	coating	NOUN
app01-6664	56	8	thickness	thickness	NOUN
app01-6664	56	9	tends	tend	VERB
app01-6664	56	10	to	to	ADP
app01-6664	56	11	zero	zero	NUM
app01-6664	56	12	(	(	PUNCT
app01-6664	56	13	λ	λ	X
app01-6664	56	14	⇒	⇒	NOUN
app01-6664	56	15	0	0	NUM
app01-6664	56	16	)	)	PUNCT
app01-6664	56	17	,	,	PUNCT
app01-6664	56	18	then	then	ADV
app01-6664	56	19	p0(λ)→	p0(λ)→	PROPN
app01-6664	56	20	1	1	NUM
app01-6664	56	21	,	,	PUNCT
app01-6664	56	22	δ0(λ)→	δ0(λ)→	PROPN
app01-6664	56	23	1	1	NUM
app01-6664	56	24	,	,	PUNCT
app01-6664	56	25	the	the	DET
app01-6664	56	26	formulas	formula	NOUN
app01-6664	56	27	(	(	PUNCT
app01-6664	56	28	1	1	NUM
app01-6664	56	29	)	)	PUNCT
app01-6664	56	30	coincide	coincide	NOUN
app01-6664	56	31	with	with	ADP
app01-6664	56	32	the	the	DET
app01-6664	56	33	formulas	formula	NOUN
app01-6664	56	34	for	for	ADP
app01-6664	56	35	the	the	DET
app01-6664	56	36	homogeneous	homogeneous	ADJ
app01-6664	56	37	half	half	ADJ
app01-6664	56	38	-	-	PUNCT
app01-6664	56	39	space	space	NOUN
app01-6664	56	40	without	without	ADP
app01-6664	56	41	coating	coat	VERB
app01-6664	56	42	[	[	X
app01-6664	56	43	15	15	NUM
app01-6664	56	44	]	]	PUNCT
app01-6664	56	45	.	.	PUNCT
app01-6664	57	1	the	the	DET
app01-6664	57	2	conical	conical	PROPN
app01-6664	57	3	punch	punch	NOUN
app01-6664	57	4	opening	opening	NOUN
app01-6664	57	5	angle	angle	NOUN
app01-6664	57	6	was	be	AUX
app01-6664	57	7	chosen	choose	VERB
app01-6664	57	8	similarly	similarly	ADV
app01-6664	57	9	to	to	ADP
app01-6664	57	10	[	[	X
app01-6664	57	11	3	3	X
app01-6664	57	12	]	]	PUNCT
app01-6664	57	13	on	on	ADP
app01-6664	57	14	the	the	DET
app01-6664	57	15	basis	basis	NOUN
app01-6664	57	16	of	of	ADP
app01-6664	57	17	the	the	DET
app01-6664	57	18	following	follow	VERB
app01-6664	57	19	considerations	consideration	NOUN
app01-6664	57	20	.	.	PUNCT
app01-6664	58	1	let	let	VERB
app01-6664	58	2	abeek	abeek	NOUN
app01-6664	58	3	c	c	NOUN
app01-6664	58	4	−	−	PROPN
app01-6664	58	5	the	the	DET
app01-6664	58	6	contact	contact	NOUN
app01-6664	58	7	area	area	NOUN
app01-6664	58	8	during	during	ADP
app01-6664	58	9	the	the	DET
app01-6664	58	10	berkovich	berkovich	NOUN
app01-6664	58	11	indentation	indentation	NOUN
app01-6664	58	12	,	,	PUNCT
app01-6664	58	13	obtained	obtain	VERB
app01-6664	58	14	from	from	ADP
app01-6664	58	15	the	the	DET
app01-6664	58	16	calibrations	calibration	NOUN
app01-6664	58	17	of	of	ADP
app01-6664	58	18	the	the	DET
app01-6664	58	19	device	device	NOUN
app01-6664	58	20	:	:	PUNCT
app01-6664	58	21	aperk	aperk	PROPN
app01-6664	58	22	c	c	PROPN
app01-6664	58	23	=	=	SYM
app01-6664	58	24	23	23	NUM
app01-6664	58	25	,	,	PUNCT
app01-6664	58	26	33χ2	33χ2	NUM
app01-6664	58	27	+	+	SYM
app01-6664	58	28	3213	3213	NUM
app01-6664	58	29	,	,	PUNCT
app01-6664	58	30	76χ	76χ	NOUN
app01-6664	58	31	,	,	PUNCT
app01-6664	58	32	and	and	CCONJ
app01-6664	58	33	acon	acon	PROPN
app01-6664	58	34	c	c	PROPN
app01-6664	58	35	−	−	PROPN
app01-6664	58	36	the	the	DET
app01-6664	58	37	contact	contact	NOUN
app01-6664	58	38	area	area	NOUN
app01-6664	58	39	during	during	ADP
app01-6664	58	40	the	the	DET
app01-6664	58	41	conical	conical	ADJ
app01-6664	58	42	punch	punch	NOUN
app01-6664	58	43	indentation	indentation	NOUN
app01-6664	58	44	.	.	PUNCT
app01-6664	59	1	from	from	ADP
app01-6664	59	2	geometric	geometric	ADJ
app01-6664	59	3	considerations	consideration	NOUN
app01-6664	59	4	acon	acon	PROPN
app01-6664	59	5	c	c	PROPN
app01-6664	59	6	=	=	SYM
app01-6664	59	7	19	19	NUM
app01-6664	59	8	e.	e.	PROPN
app01-6664	59	9	sadyrin	sadyrin	PROPN
app01-6664	59	10	,	,	PUNCT
app01-6664	59	11	a.	a.	PROPN
app01-6664	59	12	vasiliev	vasiliev	PROPN
app01-6664	59	13	,	,	PUNCT
app01-6664	59	14	s.	s.	PROPN
app01-6664	59	15	volkov	volkov	PROPN
app01-6664	59	16	acta	acta	PROPN
app01-6664	59	17	polytechnica	polytechnica	PROPN
app01-6664	59	18	s	s	PART
app01-6664	59	19	=	=	SYM
app01-6664	59	20	2ae(s	2ae(s	NUM
app01-6664	59	21	)	)	PUNCT
app01-6664	59	22	ef	ef	PROPN
app01-6664	59	23	p0(λ	p0(λ	NOUN
app01-6664	59	24	)	)	PUNCT
app01-6664	59	25	δ0(λ	δ0(λ	NOUN
app01-6664	59	26	)	)	PUNCT
app01-6664	59	27	,	,	PUNCT
app01-6664	59	28	p	p	NOUN
app01-6664	59	29	=	=	SYM
app01-6664	59	30	e	e	X
app01-6664	59	31	(	(	PUNCT
app01-6664	59	32	s	s	NOUN
app01-6664	59	33	)	)	PUNCT
app01-6664	59	34	ef	ef	VERB
app01-6664	59	35	aχ	aχ	PRON
app01-6664	59	36	2	2	NUM
app01-6664	59	37	p0(λ	p0(λ	NOUN
app01-6664	59	38	)	)	PUNCT
app01-6664	59	39	,	,	PUNCT
app01-6664	59	40	δ	δ	PROPN
app01-6664	59	41	=	=	PUNCT
app01-6664	59	42	πχ	πχ	ADP
app01-6664	59	43	2	2	NUM
app01-6664	59	44	δ0(λ	δ0(λ	NOUN
app01-6664	59	45	)	)	PUNCT
app01-6664	59	46	,	,	PUNCT
app01-6664	59	47	χ	χ	X
app01-6664	59	48	=	=	PUNCT
app01-6664	60	1	a	a	DET
app01-6664	60	2	ctgα	ctgα	ADJ
app01-6664	60	3	(	(	PUNCT
app01-6664	60	4	1	1	NUM
app01-6664	60	5	)	)	PUNCT
app01-6664	60	6	p0(λ	p0(λ	NOUN
app01-6664	60	7	)	)	PUNCT
app01-6664	60	8	=	=	SYM
app01-6664	60	9	1	1	NUM
app01-6664	60	10	+	+	NUM
app01-6664	60	11	2λ	2λ	NUM
app01-6664	60	12	n∑	n∑	NOUN
app01-6664	60	13	i=1	i=1	PROPN
app01-6664	60	14	(	(	PUNCT
app01-6664	60	15	ci	ci	NOUN
app01-6664	60	16	ai	ai	PROPN
app01-6664	60	17	[	[	PUNCT
app01-6664	60	18	ch	ch	NOUN
app01-6664	60	19	(	(	PUNCT
app01-6664	60	20	ai	ai	INTJ
app01-6664	60	21	λ	λ	PROPN
app01-6664	60	22	)	)	PUNCT
app01-6664	60	23	−	−	PROPN
app01-6664	61	1	λ	λ	INTJ
app01-6664	61	2	ai	ai	VERB
app01-6664	61	3	sh	sh	INTJ
app01-6664	61	4	(	(	PUNCT
app01-6664	61	5	ai	ai	INTJ
app01-6664	61	6	λ	λ	PROPN
app01-6664	61	7	)	)	PUNCT
app01-6664	61	8	]	]	PUNCT
app01-6664	62	1	+	+	CCONJ
app01-6664	62	2	di	di	INTJ
app01-6664	62	3	ai	ai	NOUN
app01-6664	62	4	[	[	PUNCT
app01-6664	62	5	λ	λ	X
app01-6664	62	6	ai	ai	VERB
app01-6664	62	7	−	−	PROPN
app01-6664	62	8	λ	λ	PROPN
app01-6664	62	9	ai	ai	VERB
app01-6664	62	10	ch	ch	NOUN
app01-6664	62	11	(	(	PUNCT
app01-6664	62	12	ai	ai	INTJ
app01-6664	62	13	λ	λ	PROPN
app01-6664	62	14	)	)	PUNCT
app01-6664	63	1	+	+	CCONJ
app01-6664	63	2	sh	sh	INTJ
app01-6664	63	3	(	(	PUNCT
app01-6664	63	4	ai	ai	INTJ
app01-6664	63	5	λ	λ	PROPN
app01-6664	63	6	)	)	PUNCT
app01-6664	63	7	]	]	PUNCT
app01-6664	63	8	)	)	PUNCT
app01-6664	63	9	(	(	PUNCT
app01-6664	63	10	2	2	X
app01-6664	63	11	)	)	PUNCT
app01-6664	63	12	δ0(λ	δ0(λ	NOUN
app01-6664	63	13	)	)	PUNCT
app01-6664	63	14	=	=	SYM
app01-6664	63	15	1	1	NUM
app01-6664	64	1	+	+	NUM
app01-6664	64	2	n∑	n∑	ADJ
app01-6664	64	3	i=1	i=1	PROPN
app01-6664	65	1	λa−1	λa−1	PROPN
app01-6664	65	2	i	i	PRON
app01-6664	65	3	(	(	PUNCT
app01-6664	65	4	ci	ci	PROPN
app01-6664	65	5	ch	ch	PROPN
app01-6664	65	6	(	(	PUNCT
app01-6664	65	7	aiλ	aiλ	NOUN
app01-6664	65	8	−1)+di	−1)+di	PROPN
app01-6664	65	9	sh	sh	PROPN
app01-6664	66	1	(	(	PUNCT
app01-6664	66	2	aiλ	aiλ	NOUN
app01-6664	66	3	−1	−1	NOUN
app01-6664	66	4	)	)	PUNCT
app01-6664	66	5	)	)	PUNCT
app01-6664	67	1	(	(	PUNCT
app01-6664	67	2	3	3	X
app01-6664	67	3	)	)	PUNCT
app01-6664	67	4	πa2	πa2	NOUN
app01-6664	67	5	=	=	SYM
app01-6664	68	1	πχ2/	πχ2/	PROPN
app01-6664	68	2	cot2	cot2	PROPN
app01-6664	68	3	α	α	X
app01-6664	68	4	.	.	PUNCT
app01-6664	69	1	equating	equate	VERB
app01-6664	69	2	aberk	aberk	PROPN
app01-6664	69	3	c	c	PROPN
app01-6664	69	4	=	=	SYM
app01-6664	69	5	acon	acon	PROPN
app01-6664	69	6	c	c	PROPN
app01-6664	69	7	,	,	PUNCT
app01-6664	69	8	we	we	PRON
app01-6664	69	9	obtained	obtain	VERB
app01-6664	69	10	:	:	PUNCT
app01-6664	69	11	α	α	NOUN
app01-6664	69	12	=	=	SYM
app01-6664	69	13	180	180	NUM
app01-6664	69	14	π	π	NOUN
app01-6664	69	15	arccot	arccot	ADV
app01-6664	69	16	(	(	PUNCT
app01-6664	69	17	17	17	NUM
app01-6664	69	18	,	,	PUNCT
app01-6664	69	19	725√χ	725√χ	NUM
app01-6664	69	20	√	√	NOUN
app01-6664	69	21	2333χ+	2333χ+	NUM
app01-6664	69	22	321300	321300	NUM
app01-6664	69	23	)	)	PUNCT
app01-6664	69	24	(	(	PUNCT
app01-6664	69	25	4	4	X
app01-6664	69	26	)	)	PUNCT
app01-6664	69	27	figure	figure	NOUN
app01-6664	69	28	3	3	NUM
app01-6664	69	29	shows	show	VERB
app01-6664	69	30	the	the	DET
app01-6664	69	31	graphs	graph	NOUN
app01-6664	69	32	of	of	ADP
app01-6664	69	33	the	the	DET
app01-6664	69	34	indentation	indentation	NOUN
app01-6664	69	35	stiffness	stiffness	NOUN
app01-6664	69	36	as	as	ADP
app01-6664	69	37	the	the	DET
app01-6664	69	38	function	function	NOUN
app01-6664	69	39	of	of	ADP
app01-6664	69	40	the	the	DET
app01-6664	69	41	maximum	maximum	ADJ
app01-6664	69	42	indentation	indentation	NOUN
app01-6664	69	43	depth	depth	NOUN
app01-6664	69	44	hmax	hmax	NOUN
app01-6664	69	45	.	.	PUNCT
app01-6664	70	1	it	it	PRON
app01-6664	70	2	is	be	AUX
app01-6664	70	3	clearly	clearly	ADV
app01-6664	70	4	seen	see	VERB
app01-6664	70	5	,	,	PUNCT
app01-6664	70	6	that	that	SCONJ
app01-6664	70	7	the	the	DET
app01-6664	70	8	experiment	experiment	NOUN
app01-6664	70	9	and	and	CCONJ
app01-6664	70	10	the	the	DET
app01-6664	70	11	theory	theory	NOUN
app01-6664	70	12	agree	agree	VERB
app01-6664	70	13	well	well	ADV
app01-6664	70	14	on	on	ADP
app01-6664	70	15	the	the	DET
app01-6664	70	16	entire	entire	ADJ
app01-6664	70	17	investigated	investigate	VERB
app01-6664	70	18	range	range	NOUN
app01-6664	70	19	(	(	PUNCT
app01-6664	70	20	even	even	ADV
app01-6664	70	21	despite	despite	SCONJ
app01-6664	70	22	the	the	DET
app01-6664	70	23	steps	step	NOUN
app01-6664	70	24	associated	associate	VERB
app01-6664	70	25	with	with	ADP
app01-6664	70	26	the	the	DET
app01-6664	70	27	destruction	destruction	NOUN
app01-6664	70	28	of	of	ADP
app01-6664	70	29	the	the	DET
app01-6664	70	30	sample	sample	NOUN
app01-6664	70	31	were	be	AUX
app01-6664	70	32	observed	observe	VERB
app01-6664	70	33	on	on	ADP
app01-6664	70	34	the	the	DET
app01-6664	70	35	loading	loading	NOUN
app01-6664	70	36	curves	curve	NOUN
app01-6664	70	37	at	at	ADP
app01-6664	70	38	∼500	∼500	NUM
app01-6664	70	39	nm	nm	NOUN
app01-6664	70	40	and	and	CCONJ
app01-6664	70	41	∼800	∼800	NOUN
app01-6664	70	42	nm	nm	DET
app01-6664	70	43	indentation	indentation	NOUN
app01-6664	70	44	depths	depth	NOUN
app01-6664	70	45	)	)	PUNCT
app01-6664	70	46	.	.	PUNCT
app01-6664	71	1	figure	figure	VERB
app01-6664	71	2	3	3	NUM
app01-6664	71	3	.	.	PUNCT
app01-6664	72	1	dependence	dependence	NOUN
app01-6664	72	2	of	of	ADP
app01-6664	72	3	the	the	DET
app01-6664	72	4	indentation	indentation	NOUN
app01-6664	72	5	stiffness	stiffness	NOUN
app01-6664	72	6	s	s	VERB
app01-6664	72	7	on	on	ADP
app01-6664	72	8	the	the	DET
app01-6664	72	9	maximum	maximum	ADJ
app01-6664	72	10	indentation	indentation	NOUN
app01-6664	72	11	depth	depth	NOUN
app01-6664	72	12	for	for	SCONJ
app01-6664	72	13	the	the	DET
app01-6664	72	14	zrn	zrn	NOUN
app01-6664	72	15	coating	coat	VERB
app01-6664	72	16	on	on	ADP
app01-6664	72	17	the	the	DET
app01-6664	72	18	steel	steel	NOUN
app01-6664	72	19	substrate	substrate	NOUN
app01-6664	72	20	according	accord	VERB
app01-6664	72	21	to	to	ADP
app01-6664	72	22	mathematical	mathematical	ADJ
app01-6664	72	23	modelling	modelling	NOUN
app01-6664	72	24	and	and	CCONJ
app01-6664	72	25	nanoindentation	nanoindentation	NOUN
app01-6664	72	26	tests	test	NOUN
app01-6664	72	27	5	5	NUM
app01-6664	72	28	.	.	PUNCT
app01-6664	73	1	conclusions	conclusion	NOUN
app01-6664	73	2	the	the	DET
app01-6664	73	3	paper	paper	NOUN
app01-6664	73	4	presents	present	VERB
app01-6664	73	5	the	the	DET
app01-6664	73	6	second	second	ADJ
app01-6664	73	7	step	step	NOUN
app01-6664	73	8	in	in	ADP
app01-6664	73	9	testing	testing	NOUN
app01-6664	73	10	of	of	ADP
app01-6664	73	11	the	the	DET
app01-6664	73	12	mathematical	mathematical	ADJ
app01-6664	73	13	modelling	modelling	NOUN
app01-6664	73	14	for	for	ADP
app01-6664	73	15	describing	describe	VERB
app01-6664	73	16	the	the	DET
app01-6664	73	17	results	result	NOUN
app01-6664	73	18	of	of	ADP
app01-6664	73	19	the	the	DET
app01-6664	73	20	nanoindentation	nanoindentation	NOUN
app01-6664	73	21	experiments	experiment	NOUN
app01-6664	73	22	on	on	ADP
app01-6664	73	23	zrn	zrn	NOUN
app01-6664	73	24	coatings	coating	NOUN
app01-6664	74	1	[	[	X
app01-6664	74	2	16	16	NUM
app01-6664	74	3	]	]	PUNCT
app01-6664	74	4	.	.	PUNCT
app01-6664	75	1	the	the	DET
app01-6664	75	2	results	result	NOUN
app01-6664	75	3	obtained	obtain	VERB
app01-6664	75	4	show	show	NOUN
app01-6664	75	5	that	that	SCONJ
app01-6664	75	6	the	the	DET
app01-6664	75	7	chosen	choose	VERB
app01-6664	75	8	mathematical	mathematical	ADJ
app01-6664	75	9	model	model	NOUN
app01-6664	75	10	gives	give	VERB
app01-6664	75	11	possibility	possibility	NOUN
app01-6664	75	12	to	to	PART
app01-6664	75	13	effectively	effectively	ADV
app01-6664	75	14	describe	describe	VERB
app01-6664	75	15	the	the	DET
app01-6664	75	16	nanoindentation	nanoindentation	NOUN
app01-6664	75	17	experiments	experiment	NOUN
app01-6664	75	18	with	with	ADP
app01-6664	75	19	zrn	zrn	NOUN
app01-6664	75	20	coatings	coating	NOUN
app01-6664	75	21	deposited	deposit	VERB
app01-6664	75	22	on	on	ADP
app01-6664	75	23	steel	steel	NOUN
app01-6664	75	24	substrates	substrate	NOUN
app01-6664	75	25	.	.	PUNCT
app01-6664	76	1	as	as	ADP
app01-6664	76	2	a	a	DET
app01-6664	76	3	consequence	consequence	NOUN
app01-6664	76	4	,	,	PUNCT
app01-6664	76	5	the	the	DET
app01-6664	76	6	proposed	propose	VERB
app01-6664	76	7	mathematical	mathematical	ADJ
app01-6664	76	8	model	model	NOUN
app01-6664	76	9	may	may	AUX
app01-6664	76	10	be	be	AUX
app01-6664	76	11	used	use	VERB
app01-6664	76	12	to	to	PART
app01-6664	76	13	reconstruct	reconstruct	VERB
app01-6664	76	14	young	young	ADJ
app01-6664	76	15	’s	’s	PART
app01-6664	76	16	modulus	modulus	NOUN
app01-6664	76	17	of	of	ADP
app01-6664	76	18	such	such	ADJ
app01-6664	76	19	coatings	coating	NOUN
app01-6664	76	20	for	for	ADP
app01-6664	76	21	improving	improve	VERB
app01-6664	76	22	the	the	DET
app01-6664	76	23	technology	technology	NOUN
app01-6664	76	24	of	of	ADP
app01-6664	76	25	zrn	zrn	NOUN
app01-6664	76	26	coating	coat	VERB
app01-6664	76	27	deposition	deposition	NOUN
app01-6664	76	28	.	.	PUNCT
app01-6664	77	1	in	in	ADP
app01-6664	77	2	this	this	DET
app01-6664	77	3	regard	regard	NOUN
app01-6664	77	4	,	,	PUNCT
app01-6664	77	5	the	the	DET
app01-6664	77	6	further	further	ADJ
app01-6664	77	7	research	research	NOUN
app01-6664	77	8	concerning	concern	VERB
app01-6664	77	9	simplification	simplification	NOUN
app01-6664	77	10	of	of	ADP
app01-6664	77	11	the	the	DET
app01-6664	77	12	model	model	NOUN
app01-6664	77	13	proposed	propose	VERB
app01-6664	77	14	(	(	PUNCT
app01-6664	77	15	so	so	ADV
app01-6664	77	16	the	the	DET
app01-6664	77	17	kernel	kernel	PROPN
app01-6664	77	18	transform	transform	VERB
app01-6664	77	19	to	to	PART
app01-6664	77	20	be	be	AUX
app01-6664	77	21	approximated	approximate	VERB
app01-6664	77	22	by	by	ADP
app01-6664	77	23	a	a	DET
app01-6664	77	24	ratio	ratio	NOUN
app01-6664	77	25	of	of	ADP
app01-6664	77	26	two	two	NUM
app01-6664	77	27	quadratic	quadratic	ADJ
app01-6664	77	28	functions	function	NOUN
app01-6664	77	29	containing	contain	VERB
app01-6664	77	30	only	only	ADV
app01-6664	77	31	one	one	NUM
app01-6664	77	32	parameter	parameter	NOUN
app01-6664	77	33	)	)	PUNCT
app01-6664	77	34	for	for	ADP
app01-6664	77	35	the	the	DET
app01-6664	77	36	engineering	engineering	NOUN
app01-6664	77	37	applications	application	NOUN
app01-6664	77	38	[	[	X
app01-6664	77	39	17	17	NUM
app01-6664	77	40	]	]	PUNCT
app01-6664	77	41	is	be	AUX
app01-6664	77	42	of	of	ADP
app01-6664	77	43	significant	significant	ADJ
app01-6664	77	44	interest	interest	NOUN
app01-6664	77	45	.	.	PUNCT
app01-6664	78	1	acknowledgements	acknowledgement	NOUN
app01-6664	78	2	this	this	DET
app01-6664	78	3	work	work	NOUN
app01-6664	78	4	was	be	AUX
app01-6664	78	5	supported	support	VERB
app01-6664	78	6	by	by	ADP
app01-6664	78	7	the	the	DET
app01-6664	78	8	russian	russian	PROPN
app01-6664	78	9	science	science	PROPN
app01-6664	78	10	foundation	foundation	PROPN
app01-6664	78	11	(	(	PUNCT
app01-6664	78	12	rsf	rsf	PROPN
app01-6664	78	13	)	)	PUNCT
app01-6664	78	14	through	through	ADP
app01-6664	78	15	grant	grant	PROPN
app01-6664	78	16	no	no	PROPN
app01-6664	78	17	.	.	NOUN
app01-6664	78	18	19	19	NUM
app01-6664	78	19	-	-	SYM
app01-6664	78	20	19	19	NUM
app01-6664	78	21	-	-	PUNCT
app01-6664	78	22	00444	00444	NUM
app01-6664	78	23	.	.	PUNCT
app01-6664	79	1	e.v	e.v	PROPN
app01-6664	79	2	.	.	PROPN
app01-6664	79	3	sadyrin	sadyrin	PROPN
app01-6664	79	4	was	be	AUX
app01-6664	79	5	supported	support	VERB
app01-6664	79	6	by	by	ADP
app01-6664	79	7	the	the	DET
app01-6664	79	8	scholarship	scholarship	NOUN
app01-6664	79	9	of	of	ADP
app01-6664	79	10	the	the	DET
app01-6664	79	11	president	president	NOUN
app01-6664	79	12	of	of	ADP
app01-6664	79	13	the	the	DET
app01-6664	79	14	russian	russian	PROPN
app01-6664	79	15	federation	federation	PROPN
app01-6664	79	16	no	no	INTJ
app01-6664	79	17	.	.	PUNCT
app01-6664	79	18	sp-3672.2018.1	sp-3672.2018.1	PROPN
app01-6664	79	19	.	.	PUNCT
app01-6664	80	1	experiments	experiment	NOUN
app01-6664	80	2	on	on	ADP
app01-6664	80	3	nanoindentation	nanoindentation	NOUN
app01-6664	80	4	were	be	AUX
app01-6664	80	5	made	make	VERB
app01-6664	80	6	in	in	ADP
app01-6664	80	7	nanocenter	nanocenter	NOUN
app01-6664	80	8	of	of	ADP
app01-6664	80	9	research	research	NOUN
app01-6664	80	10	and	and	CCONJ
app01-6664	80	11	education	education	NOUN
app01-6664	80	12	center	center	NOUN
app01-6664	80	13	"	"	PUNCT
app01-6664	80	14	materials	material	NOUN
app01-6664	80	15	"	"	PUNCT
app01-6664	80	16	,	,	PUNCT
app01-6664	80	17	don	don	PROPN
app01-6664	80	18	state	state	PROPN
app01-6664	80	19	technical	technical	PROPN
app01-6664	80	20	university	university	PROPN
app01-6664	80	21	(	(	PUNCT
app01-6664	80	22	http://nano.donstu.ru	http://nano.donstu.ru	PROPN
app01-6664	80	23	)	)	PUNCT
app01-6664	80	24	.	.	PUNCT
app01-6664	81	1	references	reference	NOUN
app01-6664	81	2	[	[	X
app01-6664	81	3	1	1	NUM
app01-6664	81	4	]	]	PUNCT
app01-6664	81	5	a.	a.	NOUN
app01-6664	81	6	c.	c.	PROPN
app01-6664	81	7	fischer	fischer	PROPN
app01-6664	81	8	-	-	PUNCT
app01-6664	81	9	cripps	cripps	PROPN
app01-6664	81	10	.	.	PUNCT
app01-6664	82	1	nanoindentation	nanoindentation	NOUN
app01-6664	82	2	testing	testing	NOUN
app01-6664	82	3	.	.	PUNCT
app01-6664	83	1	in	in	ADP
app01-6664	83	2	nanoindentation	nanoindentation	NOUN
app01-6664	83	3	,	,	PUNCT
app01-6664	83	4	pp	pp	ADJ
app01-6664	83	5	.	.	PUNCT
app01-6664	83	6	20–35	20–35	NUM
app01-6664	83	7	.	.	PUNCT
app01-6664	83	8	springer	springer	PROPN
app01-6664	83	9	new	new	PROPN
app01-6664	83	10	york	york	PROPN
app01-6664	83	11	,	,	PUNCT
app01-6664	83	12	2002	2002	NUM
app01-6664	83	13	.	.	PUNCT
app01-6664	84	1	doi:10.1007/978	doi:10.1007/978	X
app01-6664	84	2	-	-	PUNCT
app01-6664	84	3	0	0	NUM
app01-6664	84	4	-	-	PUNCT
app01-6664	84	5	387	387	NUM
app01-6664	84	6	-	-	PUNCT
app01-6664	84	7	22462	22462	NUM
app01-6664	84	8	-	-	PUNCT
app01-6664	84	9	6_2	6_2	NUM
app01-6664	84	10	.	.	PUNCT
app01-6664	85	1	[	[	X
app01-6664	85	2	2	2	X
app01-6664	85	3	]	]	PUNCT
app01-6664	85	4	w.	w.	PROPN
app01-6664	85	5	oliver	oliver	PROPN
app01-6664	85	6	,	,	PUNCT
app01-6664	85	7	g.	g.	PROPN
app01-6664	85	8	pharr	pharr	PROPN
app01-6664	85	9	.	.	PUNCT
app01-6664	86	1	an	an	DET
app01-6664	86	2	improved	improved	ADJ
app01-6664	86	3	technique	technique	NOUN
app01-6664	86	4	for	for	ADP
app01-6664	86	5	determining	determine	VERB
app01-6664	86	6	hardness	hardness	ADJ
app01-6664	86	7	and	and	CCONJ
app01-6664	86	8	elastic	elastic	ADJ
app01-6664	86	9	modulus	modulus	NOUN
app01-6664	86	10	using	use	VERB
app01-6664	86	11	load	load	NOUN
app01-6664	86	12	and	and	CCONJ
app01-6664	86	13	displacement	displacement	ADJ
app01-6664	86	14	sensing	sense	VERB
app01-6664	86	15	indentation	indentation	NOUN
app01-6664	86	16	experiments	experiment	NOUN
app01-6664	86	17	.	.	PUNCT
app01-6664	87	1	journal	journal	NOUN
app01-6664	87	2	of	of	ADP
app01-6664	87	3	materials	material	NOUN
app01-6664	87	4	research	research	NOUN
app01-6664	87	5	7(6):1564–1583	7(6):1564–1583	NOUN
app01-6664	87	6	,	,	PUNCT
app01-6664	87	7	1992	1992	NUM
app01-6664	87	8	.	.	PUNCT
app01-6664	88	1	doi:10.1557	doi:10.1557	PROPN
app01-6664	88	2	/	/	SYM
app01-6664	88	3	jmr.1992.1564	jmr.1992.1564	PROPN
app01-6664	88	4	.	.	PUNCT
app01-6664	89	1	[	[	X
app01-6664	89	2	3	3	X
app01-6664	89	3	]	]	X
app01-6664	89	4	y.	y.	PROPN
app01-6664	89	5	i.	i.	PROPN
app01-6664	89	6	golovin	golovin	PROPN
app01-6664	89	7	.	.	PUNCT
app01-6664	90	1	nanoindentation	nanoindentation	NOUN
app01-6664	90	2	and	and	CCONJ
app01-6664	90	3	its	its	PRON
app01-6664	90	4	capabilities	capability	NOUN
app01-6664	90	5	.	.	PUNCT
app01-6664	91	1	mashinostroyeniye	mashinostroyeniye	NOUN
app01-6664	91	2	2009	2009	NUM
app01-6664	91	3	.	.	PUNCT
app01-6664	92	1	[	[	X
app01-6664	92	2	4	4	NUM
app01-6664	92	3	]	]	PUNCT
app01-6664	92	4	a.	a.	NOUN
app01-6664	92	5	vasiliev	vasiliev	PROPN
app01-6664	92	6	,	,	PUNCT
app01-6664	92	7	s.	s.	PROPN
app01-6664	92	8	volkov	volkov	PROPN
app01-6664	92	9	,	,	PUNCT
app01-6664	92	10	a.	a.	NOUN
app01-6664	92	11	belov	belov	PROPN
app01-6664	92	12	,	,	PUNCT
app01-6664	92	13	et	et	PROPN
app01-6664	92	14	al	al	PROPN
app01-6664	92	15	.	.	PUNCT
app01-6664	93	1	indentation	indentation	NOUN
app01-6664	93	2	of	of	ADP
app01-6664	93	3	a	a	DET
app01-6664	93	4	hard	hard	ADJ
app01-6664	93	5	transversely	transversely	ADJ
app01-6664	93	6	isotropic	isotropic	NOUN
app01-6664	93	7	functionally	functionally	ADV
app01-6664	93	8	graded	grade	VERB
app01-6664	93	9	coating	coating	NOUN
app01-6664	93	10	by	by	ADP
app01-6664	93	11	a	a	DET
app01-6664	93	12	conical	conical	ADJ
app01-6664	93	13	indenter	indenter	NOUN
app01-6664	93	14	.	.	PUNCT
app01-6664	94	1	international	international	ADJ
app01-6664	94	2	journal	journal	PROPN
app01-6664	94	3	of	of	ADP
app01-6664	94	4	engineering	engineering	NOUN
app01-6664	94	5	science	science	NOUN
app01-6664	94	6	112:63–75	112:63–75	NUM
app01-6664	94	7	,	,	PUNCT
app01-6664	94	8	2017	2017	NUM
app01-6664	94	9	.	.	PUNCT
app01-6664	95	1	doi:10.1016	doi:10.1016	PROPN
app01-6664	95	2	/	/	SYM
app01-6664	95	3	j.ijengsci.2016.12.002	j.ijengsci.2016.12.002	NOUN
app01-6664	95	4	.	.	PUNCT
app01-6664	96	1	[	[	X
app01-6664	96	2	5	5	X
app01-6664	96	3	]	]	PUNCT
app01-6664	96	4	e.	e.	PROPN
app01-6664	96	5	v.	v.	PROPN
app01-6664	96	6	sadyrin	sadyrin	PROPN
app01-6664	96	7	,	,	PUNCT
app01-6664	96	8	b.	b.	PROPN
app01-6664	96	9	i.	i.	PROPN
app01-6664	96	10	mitrin	mitrin	PROPN
app01-6664	96	11	,	,	PUNCT
app01-6664	96	12	l.	l.	PROPN
app01-6664	96	13	i.	i.	PROPN
app01-6664	96	14	krenev	krenev	PROPN
app01-6664	96	15	,	,	PUNCT
app01-6664	96	16	et	et	PROPN
app01-6664	96	17	al	al	PROPN
app01-6664	96	18	.	.	PUNCT
app01-6664	96	19	evaluation	evaluation	NOUN
app01-6664	96	20	of	of	ADP
app01-6664	96	21	mechanical	mechanical	ADJ
app01-6664	96	22	properties	property	NOUN
app01-6664	96	23	of	of	ADP
app01-6664	96	24	the	the	DET
app01-6664	96	25	two	two	NUM
app01-6664	96	26	-	-	PUNCT
app01-6664	96	27	layer	layer	NOUN
app01-6664	96	28	coating	coating	NOUN
app01-6664	96	29	using	use	VERB
app01-6664	96	30	nanoindentation	nanoindentation	NOUN
app01-6664	96	31	and	and	CCONJ
app01-6664	96	32	mathematical	mathematical	ADJ
app01-6664	96	33	modeling	modeling	NOUN
app01-6664	96	34	.	.	PUNCT
app01-6664	97	1	in	in	ADP
app01-6664	97	2	springer	springer	NOUN
app01-6664	97	3	proceedings	proceeding	NOUN
app01-6664	97	4	in	in	ADP
app01-6664	97	5	physics	physics	PROPN
app01-6664	97	6	,	,	PUNCT
app01-6664	97	7	pp	pp	ADP
app01-6664	97	8	.	.	PUNCT
app01-6664	98	1	495–502	495–502	NUM
app01-6664	98	2	.	.	PUNCT
app01-6664	99	1	springer	springer	NOUN
app01-6664	99	2	international	international	ADJ
app01-6664	99	3	publishing	publishing	NOUN
app01-6664	99	4	,	,	PUNCT
app01-6664	99	5	2018	2018	NUM
app01-6664	99	6	.	.	PUNCT
app01-6664	100	1	doi:10.1007/978	doi:10.1007/978	NOUN
app01-6664	100	2	-	-	PUNCT
app01-6664	100	3	3	3	NUM
app01-6664	100	4	-	-	NUM
app01-6664	100	5	319	319	NUM
app01-6664	100	6	-	-	PUNCT
app01-6664	100	7	78919	78919	NUM
app01-6664	100	8	-	-	SYM
app01-6664	100	9	4_39	4_39	NUM
app01-6664	100	10	.	.	PUNCT
app01-6664	101	1	[	[	X
app01-6664	101	2	6	6	NUM
app01-6664	101	3	]	]	PUNCT
app01-6664	101	4	v.	v.	PROPN
app01-6664	101	5	b.	b.	PROPN
app01-6664	101	6	zelentsov	zelentsov	PROPN
app01-6664	101	7	,	,	PUNCT
app01-6664	101	8	e.	e.	PROPN
app01-6664	101	9	v.	v.	PROPN
app01-6664	101	10	sadyrin	sadyrin	PROPN
app01-6664	101	11	,	,	PUNCT
app01-6664	101	12	a.	a.	PROPN
app01-6664	101	13	g.	g.	PROPN
app01-6664	101	14	sukiyazov	sukiyazov	PROPN
app01-6664	101	15	,	,	PUNCT
app01-6664	101	16	n.	n.	PROPN
app01-6664	101	17	y.	y.	PROPN
app01-6664	101	18	shubchinskaya	shubchinskaya	PROPN
app01-6664	101	19	.	.	PUNCT
app01-6664	102	1	on	on	ADP
app01-6664	102	2	a	a	DET
app01-6664	102	3	method	method	NOUN
app01-6664	102	4	for	for	ADP
app01-6664	102	5	determination	determination	NOUN
app01-6664	102	6	of	of	ADP
app01-6664	102	7	poisson	poisson	NOUN
app01-6664	102	8	’s	’s	PART
app01-6664	102	9	ratio	ratio	NOUN
app01-6664	102	10	and	and	CCONJ
app01-6664	102	11	young	young	ADJ
app01-6664	102	12	modulus	modulus	NOUN
app01-6664	102	13	of	of	ADP
app01-6664	102	14	a	a	DET
app01-6664	102	15	material	material	NOUN
app01-6664	102	16	.	.	PUNCT
app01-6664	103	1	matec	matec	ADJ
app01-6664	103	2	web	web	NOUN
app01-6664	103	3	of	of	ADP
app01-6664	103	4	conferences	conference	NOUN
app01-6664	103	5	226:03027	226:03027	NUM
app01-6664	103	6	,	,	PUNCT
app01-6664	103	7	2018	2018	NUM
app01-6664	103	8	.	.	PUNCT
app01-6664	104	1	doi:10.1051	doi:10.1051	NOUN
app01-6664	104	2	/	/	SYM
app01-6664	104	3	matecconf/201822603027	matecconf/201822603027	ADJ
app01-6664	104	4	.	.	PUNCT
app01-6664	105	1	[	[	X
app01-6664	105	2	7	7	X
app01-6664	105	3	]	]	X
app01-6664	105	4	j.	j.	PROPN
app01-6664	105	5	vetter	vetter	PROPN
app01-6664	105	6	.	.	PUNCT
app01-6664	106	1	vacuum	vacuum	NOUN
app01-6664	106	2	arc	arc	NOUN
app01-6664	106	3	coatings	coating	NOUN
app01-6664	106	4	for	for	ADP
app01-6664	106	5	tools	tool	NOUN
app01-6664	106	6	:	:	PUNCT
app01-6664	106	7	potential	potential	NOUN
app01-6664	106	8	and	and	CCONJ
app01-6664	106	9	application	application	NOUN
app01-6664	106	10	.	.	PUNCT
app01-6664	107	1	surface	surface	NOUN
app01-6664	107	2	and	and	CCONJ
app01-6664	107	3	coatings	coating	NOUN
app01-6664	107	4	technology	technology	NOUN
app01-6664	107	5	7677:719–724	7677:719–724	NOUN
app01-6664	107	6	,	,	PUNCT
app01-6664	107	7	1995	1995	NUM
app01-6664	107	8	.	.	PUNCT
app01-6664	108	1	doi:10.1016/0257	doi:10.1016/0257	NOUN
app01-6664	108	2	-	-	PUNCT
app01-6664	108	3	8972(95)02499	8972(95)02499	NUM
app01-6664	108	4	-	-	SYM
app01-6664	108	5	9	9	NUM
app01-6664	108	6	.	.	NOUN
app01-6664	108	7	20	20	NUM
app01-6664	108	8	https://doi.org/10.1007/978-0-387-22462-6_2	https://doi.org/10.1007/978-0-387-22462-6_2	PRON
app01-6664	108	9	https://doi.org/10.1557/jmr.1992.1564	https://doi.org/10.1557/jmr.1992.1564	PROPN
app01-6664	109	1	https://doi.org/10.1016/j.ijengsci.2016.12.002	https://doi.org/10.1016/j.ijengsci.2016.12.002	NOUN
app01-6664	109	2	https://doi.org/10.1007/978-3-319-78919-4_39	https://doi.org/10.1007/978-3-319-78919-4_39	NOUN
app01-6664	109	3	https://doi.org/10.1051/matecconf/201822603027	https://doi.org/10.1051/matecconf/201822603027	NOUN
app01-6664	109	4	https://doi.org/10.1016/0257-8972(95)02499-9	https://doi.org/10.1016/0257-8972(95)02499-9	ADJ
app01-6664	109	5	vol	vol	NOUN
app01-6664	109	6	.	.	PUNCT
app01-6664	110	1	27/2020	27/2020	NUM
app01-6664	110	2	mathematical	mathematical	ADJ
app01-6664	110	3	modeling	modeling	NOUN
app01-6664	110	4	zrn	zrn	NOUN
app01-6664	110	5	coating	coat	VERB
app01-6664	110	6	[	[	X
app01-6664	110	7	8	8	NUM
app01-6664	110	8	]	]	PUNCT
app01-6664	110	9	h.	h.	NOUN
app01-6664	110	10	randhawa	randhawa	PROPN
app01-6664	110	11	,	,	PUNCT
app01-6664	110	12	p.	p.	PROPN
app01-6664	110	13	johnson	johnson	PROPN
app01-6664	110	14	.	.	PUNCT
app01-6664	111	1	technical	technical	ADJ
app01-6664	111	2	note	note	NOUN
app01-6664	111	3	:	:	PUNCT
app01-6664	111	4	a	a	DET
app01-6664	111	5	review	review	NOUN
app01-6664	111	6	of	of	ADP
app01-6664	111	7	cathodic	cathodic	NOUN
app01-6664	111	8	arc	arc	NOUN
app01-6664	111	9	plasma	plasma	NOUN
app01-6664	111	10	deposition	deposition	NOUN
app01-6664	111	11	processes	process	NOUN
app01-6664	111	12	and	and	CCONJ
app01-6664	111	13	their	their	PRON
app01-6664	111	14	applications	application	NOUN
app01-6664	111	15	.	.	PUNCT
app01-6664	112	1	surface	surface	NOUN
app01-6664	112	2	and	and	CCONJ
app01-6664	112	3	coatings	coating	NOUN
app01-6664	112	4	technology	technology	NOUN
app01-6664	112	5	31(4):303–318	31(4):303–318	PROPN
app01-6664	112	6	,	,	PUNCT
app01-6664	112	7	1987	1987	NUM
app01-6664	112	8	.	.	PUNCT
app01-6664	113	1	doi:10.1016/0257	doi:10.1016/0257	NOUN
app01-6664	113	2	-	-	PUNCT
app01-6664	113	3	8972(87)90157	8972(87)90157	NUM
app01-6664	113	4	-	-	SYM
app01-6664	113	5	5	5	NUM
app01-6664	113	6	.	.	PUNCT
app01-6664	114	1	[	[	X
app01-6664	114	2	9	9	NUM
app01-6664	114	3	]	]	X
app01-6664	114	4	j.	j.	PROPN
app01-6664	114	5	kadlec	kadlec	PROPN
app01-6664	114	6	,	,	PUNCT
app01-6664	114	7	z.	z.	PROPN
app01-6664	114	8	joska	joska	PROPN
app01-6664	114	9	,	,	PUNCT
app01-6664	114	10	j.	j.	PROPN
app01-6664	114	11	kadlec	kadlec	PROPN
app01-6664	114	12	.	.	PUNCT
app01-6664	114	13	study	study	NOUN
app01-6664	114	14	of	of	ADP
app01-6664	114	15	biocompatible	biocompatible	ADJ
app01-6664	114	16	zrn	zrn	PROPN
app01-6664	114	17	and	and	CCONJ
app01-6664	114	18	zrn	zrn	PROPN
app01-6664	114	19	/	/	SYM
app01-6664	114	20	dlc	dlc	NOUN
app01-6664	114	21	coating	coating	NOUN
app01-6664	114	22	deposited	deposit	VERB
app01-6664	114	23	on	on	ADP
app01-6664	114	24	medical	medical	ADJ
app01-6664	114	25	tools	tool	NOUN
app01-6664	114	26	.	.	PUNCT
app01-6664	115	1	ecs	ecs	PROPN
app01-6664	115	2	transactions	transaction	NOUN
app01-6664	115	3	48(1):315–318	48(1):315–318	PROPN
app01-6664	115	4	,	,	PUNCT
app01-6664	115	5	2014	2014	NUM
app01-6664	115	6	.	.	PUNCT
app01-6664	116	1	doi:10.1149/04801.0315ecst	doi:10.1149/04801.0315ecst	NOUN
app01-6664	116	2	.	.	PUNCT
app01-6664	117	1	[	[	X
app01-6664	117	2	10	10	NUM
app01-6664	117	3	]	]	PUNCT
app01-6664	117	4	m.	m.	NOUN
app01-6664	117	5	nose	nose	PROPN
app01-6664	117	6	,	,	PUNCT
app01-6664	117	7	m.	m.	NOUN
app01-6664	117	8	zhou	zhou	PROPN
app01-6664	117	9	,	,	PUNCT
app01-6664	117	10	e.	e.	PROPN
app01-6664	117	11	honbo	honbo	PROPN
app01-6664	117	12	,	,	PUNCT
app01-6664	117	13	et	et	PROPN
app01-6664	117	14	al	al	PROPN
app01-6664	117	15	.	.	PUNCT
app01-6664	117	16	colorimetric	colorimetric	ADJ
app01-6664	117	17	properties	property	NOUN
app01-6664	117	18	of	of	ADP
app01-6664	117	19	zrn	zrn	NOUN
app01-6664	117	20	and	and	CCONJ
app01-6664	117	21	tin	tin	NOUN
app01-6664	117	22	coatings	coating	NOUN
app01-6664	117	23	prepared	prepare	VERB
app01-6664	117	24	by	by	ADP
app01-6664	117	25	dc	dc	PROPN
app01-6664	117	26	reactive	reactive	ADJ
app01-6664	117	27	sputtering	sputtering	NOUN
app01-6664	117	28	.	.	PUNCT
app01-6664	118	1	surface	surface	NOUN
app01-6664	118	2	and	and	CCONJ
app01-6664	118	3	coatings	coating	NOUN
app01-6664	118	4	technology	technology	NOUN
app01-6664	118	5	142	142	NUM
app01-6664	118	6	-	-	SYM
app01-6664	118	7	144:211–217	144:211–217	NUM
app01-6664	118	8	,	,	PUNCT
app01-6664	118	9	2001	2001	NUM
app01-6664	118	10	.	.	PUNCT
app01-6664	119	1	doi:10.1016	doi:10.1016	PROPN
app01-6664	119	2	/	/	SYM
app01-6664	119	3	s0257	s0257	PROPN
app01-6664	119	4	-	-	PUNCT
app01-6664	119	5	8972(01)01196	8972(01)01196	NUM
app01-6664	119	6	-	-	SYM
app01-6664	119	7	3	3	NUM
app01-6664	119	8	.	.	PUNCT
app01-6664	120	1	[	[	X
app01-6664	120	2	11	11	NUM
app01-6664	120	3	]	]	PUNCT
app01-6664	120	4	t.	t.	PROPN
app01-6664	120	5	okuno	okuno	PROPN
app01-6664	120	6	.	.	PUNCT
app01-6664	121	1	effect	effect	NOUN
app01-6664	121	2	of	of	ADP
app01-6664	121	3	microstructure	microstructure	NOUN
app01-6664	121	4	on	on	ADP
app01-6664	121	5	the	the	DET
app01-6664	121	6	toughness	toughness	NOUN
app01-6664	121	7	of	of	ADP
app01-6664	121	8	hot	hot	ADJ
app01-6664	121	9	work	work	NOUN
app01-6664	121	10	tool	tool	NOUN
app01-6664	121	11	steels	steel	NOUN
app01-6664	121	12	,	,	PUNCT
app01-6664	121	13	aisi	aisi	PROPN
app01-6664	121	14	h13	h13	PROPN
app01-6664	121	15	,	,	PUNCT
app01-6664	121	16	h10	h10	NOUN
app01-6664	121	17	,	,	PUNCT
app01-6664	121	18	and	and	CCONJ
app01-6664	121	19	h19	h19	PROPN
app01-6664	121	20	.	.	PROPN
app01-6664	121	21	transactions	transaction	NOUN
app01-6664	121	22	of	of	ADP
app01-6664	121	23	the	the	DET
app01-6664	121	24	iron	iron	NOUN
app01-6664	121	25	and	and	CCONJ
app01-6664	121	26	steel	steel	NOUN
app01-6664	121	27	institute	institute	PROPN
app01-6664	121	28	of	of	ADP
app01-6664	121	29	japan	japan	PROPN
app01-6664	121	30	27(1):51–59	27(1):51–59	NUM
app01-6664	121	31	,	,	PUNCT
app01-6664	121	32	1987	1987	NUM
app01-6664	121	33	.	.	PUNCT
app01-6664	122	1	doi:10.2355	doi:10.2355	PROPN
app01-6664	122	2	/	/	SYM
app01-6664	122	3	isijinternational1966.27.51	isijinternational1966.27.51	PROPN
app01-6664	122	4	.	.	PUNCT
app01-6664	123	1	[	[	X
app01-6664	123	2	12	12	NUM
app01-6664	123	3	]	]	X
app01-6664	123	4	geometrical	geometrical	ADJ
app01-6664	123	5	product	product	NOUN
app01-6664	123	6	specifications	specification	NOUN
app01-6664	123	7	(	(	PUNCT
app01-6664	123	8	gps	gps	PROPN
app01-6664	123	9	)	)	PUNCT
app01-6664	123	10	–	–	PUNCT
app01-6664	123	11	surface	surface	NOUN
app01-6664	123	12	texture	texture	NOUN
app01-6664	123	13	:	:	PUNCT
app01-6664	123	14	profile	profile	NOUN
app01-6664	123	15	method	method	NOUN
app01-6664	123	16	–	–	PUNCT
app01-6664	123	17	terms	term	NOUN
app01-6664	123	18	,	,	PUNCT
app01-6664	123	19	definitions	definition	NOUN
app01-6664	123	20	and	and	CCONJ
app01-6664	123	21	surface	surface	NOUN
app01-6664	123	22	texture	texture	NOUN
app01-6664	123	23	parameters	parameter	NOUN
app01-6664	123	24	.	.	PUNCT
app01-6664	124	1	standard	standard	PROPN
app01-6664	124	2	,	,	PUNCT
app01-6664	124	3	international	international	ADJ
app01-6664	124	4	organization	organization	NOUN
app01-6664	124	5	for	for	ADP
app01-6664	124	6	standardization	standardization	NOUN
app01-6664	124	7	,	,	PUNCT
app01-6664	124	8	geneva	geneva	PROPN
app01-6664	124	9	,	,	PUNCT
app01-6664	124	10	ch	ch	NOUN
app01-6664	124	11	,	,	PUNCT
app01-6664	124	12	1997	1997	NUM
app01-6664	124	13	.	.	PUNCT
app01-6664	125	1	[	[	X
app01-6664	125	2	13	13	NUM
app01-6664	125	3	]	]	X
app01-6664	125	4	v.	v.	X
app01-6664	125	5	bhandari	bhandari	PROPN
app01-6664	125	6	.	.	PUNCT
app01-6664	125	7	machine	machine	NOUN
app01-6664	125	8	design	design	PROPN
app01-6664	125	9	data	datum	NOUN
app01-6664	125	10	book	book	NOUN
app01-6664	125	11	.	.	PUNCT
app01-6664	126	1	mcgraw	mcgraw	PROPN
app01-6664	126	2	-	-	PUNCT
app01-6664	126	3	hill	hill	NOUN
app01-6664	126	4	education	education	NOUN
app01-6664	126	5	,	,	PUNCT
app01-6664	126	6	2014	2014	NUM
app01-6664	126	7	.	.	PUNCT
app01-6664	127	1	[	[	X
app01-6664	127	2	14	14	NUM
app01-6664	127	3	]	]	X
app01-6664	127	4	s.	s.	PROPN
app01-6664	127	5	aizikovich	aizikovich	PROPN
app01-6664	127	6	,	,	PUNCT
app01-6664	127	7	a.	a.	PROPN
app01-6664	127	8	vasil’ev	vasil’ev	PROPN
app01-6664	127	9	,	,	PUNCT
app01-6664	127	10	s.	s.	PROPN
app01-6664	127	11	volkov	volkov	PROPN
app01-6664	127	12	.	.	PUNCT
app01-6664	128	1	the	the	DET
app01-6664	128	2	axisymmetric	axisymmetric	ADJ
app01-6664	128	3	contact	contact	NOUN
app01-6664	128	4	problem	problem	NOUN
app01-6664	128	5	of	of	ADP
app01-6664	128	6	the	the	DET
app01-6664	128	7	indentation	indentation	NOUN
app01-6664	128	8	of	of	ADP
app01-6664	128	9	a	a	DET
app01-6664	128	10	conical	conical	NOUN
app01-6664	128	11	punch	punch	NOUN
app01-6664	128	12	into	into	ADP
app01-6664	128	13	a	a	DET
app01-6664	128	14	half	half	ADJ
app01-6664	128	15	-	-	PUNCT
app01-6664	128	16	space	space	NOUN
app01-6664	128	17	with	with	ADP
app01-6664	128	18	a	a	DET
app01-6664	128	19	coating	coating	NOUN
app01-6664	128	20	inhomogeneous	inhomogeneous	ADJ
app01-6664	128	21	in	in	ADP
app01-6664	128	22	depth	depth	NOUN
app01-6664	128	23	.	.	PUNCT
app01-6664	129	1	journal	journal	NOUN
app01-6664	129	2	of	of	ADP
app01-6664	129	3	applied	apply	VERB
app01-6664	129	4	mathematics	mathematic	NOUN
app01-6664	129	5	and	and	CCONJ
app01-6664	129	6	mechanics	mechanic	NOUN
app01-6664	129	7	79(5):500–505	79(5):500–505	PROPN
app01-6664	129	8	,	,	PUNCT
app01-6664	129	9	2015	2015	NUM
app01-6664	129	10	.	.	PUNCT
app01-6664	130	1	doi:10.1016	doi:10.1016	PROPN
app01-6664	130	2	/	/	SYM
app01-6664	130	3	j.jappmathmech.2016.03.011	j.jappmathmech.2016.03.011	PROPN
app01-6664	130	4	.	.	PUNCT
app01-6664	131	1	[	[	X
app01-6664	131	2	15	15	NUM
app01-6664	131	3	]	]	X
app01-6664	131	4	i.	i.	PROPN
app01-6664	131	5	n.	n.	PROPN
app01-6664	131	6	sneddon	sneddon	PROPN
app01-6664	131	7	.	.	PUNCT
app01-6664	132	1	fourier	fourier	PROPN
app01-6664	132	2	transforms	transform	VERB
app01-6664	132	3	mcgraw	mcgraw	PROPN
app01-6664	132	4	-	-	PUNCT
app01-6664	132	5	hill	hill	NOUN
app01-6664	132	6	.	.	PUNCT
app01-6664	133	1	new	new	PROPN
app01-6664	133	2	york	york	PROPN
app01-6664	133	3	pp	pp	PROPN
app01-6664	133	4	.	.	PUNCT
app01-6664	134	1	445–49	445–49	NOUN
app01-6664	134	2	,	,	PUNCT
app01-6664	134	3	1951	1951	NUM
app01-6664	134	4	.	.	PUNCT
app01-6664	135	1	[	[	X
app01-6664	135	2	16	16	NUM
app01-6664	135	3	]	]	PUNCT
app01-6664	135	4	a.	a.	NOUN
app01-6664	135	5	s.	s.	PROPN
app01-6664	135	6	vasiliev	vasiliev	PROPN
app01-6664	135	7	,	,	PUNCT
app01-6664	135	8	e.	e.	PROPN
app01-6664	135	9	v.	v.	PROPN
app01-6664	135	10	sadyrin	sadyrin	PROPN
app01-6664	135	11	,	,	PUNCT
app01-6664	135	12	b.	b.	PROPN
app01-6664	135	13	i.	i.	PROPN
app01-6664	135	14	mitrin	mitrin	PROPN
app01-6664	135	15	,	,	PUNCT
app01-6664	135	16	et	et	PROPN
app01-6664	135	17	al	al	PROPN
app01-6664	135	18	.	.	PUNCT
app01-6664	135	19	nanoindentation	nanoindentation	NOUN
app01-6664	135	20	of	of	ADP
app01-6664	135	21	zrn	zrn	PROPN
app01-6664	135	22	coatings	coating	VERB
app01-6664	135	23	on	on	ADP
app01-6664	135	24	silicon	silicon	NOUN
app01-6664	135	25	and	and	CCONJ
app01-6664	135	26	copper	copper	NOUN
app01-6664	135	27	substrates	substrate	NOUN
app01-6664	135	28	.	.	PUNCT
app01-6664	136	1	russian	russian	ADJ
app01-6664	136	2	engineering	engineering	NOUN
app01-6664	136	3	research	research	NOUN
app01-6664	136	4	38(9):735–737	38(9):735–737	PROPN
app01-6664	136	5	,	,	PUNCT
app01-6664	136	6	2018	2018	NUM
app01-6664	136	7	.	.	PUNCT
app01-6664	137	1	doi:10.3103	doi:10.3103	NOUN
app01-6664	137	2	/	/	SYM
app01-6664	137	3	s1068798x18090289	s1068798x18090289	VERB
app01-6664	137	4	.	.	PUNCT
app01-6664	138	1	[	[	X
app01-6664	138	2	17	17	NUM
app01-6664	138	3	]	]	X
app01-6664	138	4	e.	e.	PROPN
app01-6664	138	5	v.	v.	PROPN
app01-6664	138	6	sadyrin	sadyrin	PROPN
app01-6664	138	7	,	,	PUNCT
app01-6664	138	8	a.	a.	PROPN
app01-6664	138	9	s.	s.	PROPN
app01-6664	138	10	vasiliev	vasiliev	PROPN
app01-6664	138	11	,	,	PUNCT
app01-6664	138	12	s.	s.	PROPN
app01-6664	138	13	s.	s.	PROPN
app01-6664	138	14	volkov	volkov	PROPN
app01-6664	138	15	,	,	PUNCT
app01-6664	138	16	et	et	PROPN
app01-6664	138	17	al	al	PROPN
app01-6664	138	18	.	.	PROPN
app01-6664	138	19	simplified	simplify	VERB
app01-6664	138	20	analytical	analytical	ADJ
app01-6664	138	21	solution	solution	NOUN
app01-6664	138	22	of	of	ADP
app01-6664	138	23	the	the	DET
app01-6664	138	24	contact	contact	NOUN
app01-6664	138	25	problem	problem	NOUN
app01-6664	138	26	on	on	ADP
app01-6664	138	27	indentation	indentation	NOUN
app01-6664	138	28	of	of	ADP
app01-6664	138	29	a	a	DET
app01-6664	138	30	coated	coated	ADJ
app01-6664	138	31	half	half	ADJ
app01-6664	138	32	-	-	PUNCT
app01-6664	138	33	space	space	NOUN
app01-6664	138	34	by	by	ADP
app01-6664	138	35	a	a	DET
app01-6664	138	36	spherical	spherical	ADJ
app01-6664	138	37	punch	punch	NOUN
app01-6664	138	38	.	.	PUNCT
app01-6664	139	1	in	in	ADP
app01-6664	139	2	boundary	boundary	ADJ
app01-6664	139	3	elements	element	NOUN
app01-6664	139	4	and	and	CCONJ
app01-6664	139	5	other	other	ADJ
app01-6664	139	6	mesh	mesh	NOUN
app01-6664	139	7	reduction	reduction	NOUN
app01-6664	139	8	methods	method	NOUN
app01-6664	139	9	xli	xli	PROPN
app01-6664	139	10	.	.	PUNCT
app01-6664	140	1	wit	wit	ADJ
app01-6664	140	2	press	press	PROPN
app01-6664	140	3	,	,	PUNCT
app01-6664	140	4	2018	2018	NUM
app01-6664	140	5	.	.	PUNCT
app01-6664	141	1	doi:10.2495	doi:10.2495	PROPN
app01-6664	141	2	/	/	SYM
app01-6664	141	3	be410191	be410191	PROPN
app01-6664	141	4	.	.	PUNCT
app01-6664	142	1	21	21	NUM
app01-6664	142	2	https://doi.org/10.1016/0257-8972(87)90157-5	https://doi.org/10.1016/0257-8972(87)90157-5	PROPN
app01-6664	142	3	https://doi.org/10.1149/04801.0315ecst	https://doi.org/10.1149/04801.0315ecst	PROPN
app01-6664	142	4	https://doi.org/10.1016/s0257-8972(01)01196-3	https://doi.org/10.1016/s0257-8972(01)01196-3	NOUN
app01-6664	142	5	https://doi.org/10.2355/isijinternational1966.27.51	https://doi.org/10.2355/isijinternational1966.27.51	NOUN
app01-6664	142	6	https://doi.org/10.1016/j.jappmathmech.2016.03.011	https://doi.org/10.1016/j.jappmathmech.2016.03.011	NOUN
app01-6664	142	7	https://doi.org/10.3103/s1068798x18090289	https://doi.org/10.3103/s1068798x18090289	NUM
app01-6664	142	8	https://doi.org/10.2495/be410191	https://doi.org/10.2495/be410191	PROPN
app01-6664	142	9	acta	acta	PROPN
app01-6664	142	10	polytechnica	polytechnica	PROPN
app01-6664	142	11	27(0):18–21	27(0):18–21	NUM
app01-6664	142	12	,	,	PUNCT
app01-6664	142	13	2020	2020	NUM
app01-6664	142	14	1	1	NUM
app01-6664	142	15	introduction	introduction	NOUN
app01-6664	142	16	2	2	NUM
app01-6664	142	17	materials	material	NOUN
app01-6664	142	18	3	3	NUM
app01-6664	142	19	methods	method	NOUN
app01-6664	142	20	4	4	NUM
app01-6664	142	21	results	result	NOUN
app01-6664	142	22	and	and	CCONJ
app01-6664	142	23	discussion	discussion	NOUN
app01-6664	142	24	5	5	NUM
app01-6664	142	25	conclusions	conclusion	NOUN
app01-6664	142	26	acknowledgements	acknowledgement	NOUN
app01-6664	142	27	references	reference	NOUN