id	sid	tid	token	lemma	pos
app01-6680	1	1	acta	acta	PROPN
app01-6680	1	2	polytechnica	polytechnica	PROPN
app01-6680	1	3	doi:10.14311	doi:10.14311	PROPN
app01-6680	1	4	/	/	SYM
app01-6680	1	5	app.2020.27.0079	app.2020.27.0079	PROPN
app01-6680	1	6	acta	acta	PROPN
app01-6680	1	7	polytechnica	polytechnica	PROPN
app01-6680	1	8	27(0):79–83	27(0):79–83	NUM
app01-6680	1	9	,	,	PUNCT
app01-6680	1	10	2020	2020	NUM
app01-6680	1	11	©	©	PROPN
app01-6680	1	12	czech	czech	PROPN
app01-6680	1	13	technical	technical	PROPN
app01-6680	1	14	university	university	PROPN
app01-6680	1	15	in	in	ADP
app01-6680	1	16	prague	prague	PROPN
app01-6680	1	17	,	,	PUNCT
app01-6680	1	18	2020	2020	NUM
app01-6680	1	19	available	available	ADJ
app01-6680	1	20	online	online	ADV
app01-6680	1	21	at	at	ADP
app01-6680	1	22	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-6680	1	23	relation	relation	NOUN
app01-6680	1	24	between	between	ADP
app01-6680	1	25	hardness	hardness	NOUN
app01-6680	1	26	of	of	ADP
app01-6680	1	27	(	(	PUNCT
app01-6680	1	28	ti	ti	X
app01-6680	1	29	,	,	PUNCT
app01-6680	1	30	al)n	al)n	PROPN
app01-6680	1	31	based	base	VERB
app01-6680	1	32	multilayered	multilayere	VERB
app01-6680	1	33	coatings	coating	NOUN
app01-6680	1	34	and	and	CCONJ
app01-6680	1	35	periods	period	NOUN
app01-6680	1	36	of	of	ADP
app01-6680	1	37	their	their	PRON
app01-6680	1	38	stacking	stack	VERB
app01-6680	1	39	mehdi	mehdi	NOUN
app01-6680	1	40	zaouia	zaouia	NOUN
app01-6680	1	41	,	,	PUNCT
app01-6680	1	42	b	b	PROPN
app01-6680	1	43	,	,	PUNCT
app01-6680	1	44	alexandre	alexandre	PROPN
app01-6680	1	45	bourcereta	bourcereta	PROPN
app01-6680	1	46	,	,	PUNCT
app01-6680	1	47	yves	yve	NOUN
app01-6680	1	48	gaillarda	gaillarda	NOUN
app01-6680	1	49	,	,	PUNCT
app01-6680	1	50	sylvain	sylvain	PROPN
app01-6680	1	51	giljeanc,∗	giljeanc,∗	PROPN
app01-6680	1	52	,	,	PUNCT
app01-6680	1	53	christophe	christophe	PROPN
app01-6680	1	54	rousselota	rousselota	NOUN
app01-6680	1	55	,	,	PUNCT
app01-6680	1	56	marie	marie	PROPN
app01-6680	1	57	-	-	PUNCT
app01-6680	1	58	josé	josé	PROPN
app01-6680	1	59	pacc	pacc	PROPN
app01-6680	1	60	,	,	PUNCT
app01-6680	1	61	fabrice	fabrice	PROPN
app01-6680	1	62	richarda	richarda	VERB
app01-6680	1	63	a	a	DET
app01-6680	1	64	université	université	PROPN
app01-6680	1	65	bourgogne	bourgogne	NOUN
app01-6680	1	66	franche	franche	PROPN
app01-6680	1	67	-	-	PUNCT
app01-6680	1	68	comté	comté	PROPN
app01-6680	1	69	,	,	PUNCT
app01-6680	1	70	institut	institut	PROPN
app01-6680	1	71	femto	femto	PROPN
app01-6680	1	72	-	-	PUNCT
app01-6680	1	73	st	st	PROPN
app01-6680	1	74	,	,	PUNCT
app01-6680	1	75	cnrs	cnrs	NOUN
app01-6680	1	76	/	/	SYM
app01-6680	1	77	ufc	ufc	PROPN
app01-6680	1	78	/	/	SYM
app01-6680	1	79	ensmm	ensmm	PROPN
app01-6680	1	80	/	/	SYM
app01-6680	1	81	utbm	utbm	NOUN
app01-6680	1	82	,	,	PUNCT
app01-6680	1	83	32	32	NUM
app01-6680	1	84	avenue	avenue	NOUN
app01-6680	1	85	de	de	X
app01-6680	1	86	l’observatoire	l’observatoire	PROPN
app01-6680	1	87	,	,	PUNCT
app01-6680	1	88	25000	25000	NUM
app01-6680	1	89	besançon	besançon	NOUN
app01-6680	1	90	,	,	PUNCT
app01-6680	1	91	france	france	PROPN
app01-6680	1	92	b	b	PROPN
app01-6680	1	93	institut	institut	PROPN
app01-6680	1	94	de	de	PROPN
app01-6680	1	95	recherche	recherche	X
app01-6680	1	96	technologique	technologique	PROPN
app01-6680	1	97	,	,	PUNCT
app01-6680	1	98	matériaux	matériaux	PROPN
app01-6680	1	99	,	,	PUNCT
app01-6680	1	100	métallurgie	métallurgie	PROPN
app01-6680	1	101	,	,	PUNCT
app01-6680	1	102	procédés	procédés	PROPN
app01-6680	1	103	,	,	PUNCT
app01-6680	1	104	4	4	NUM
app01-6680	1	105	rue	rue	PROPN
app01-6680	1	106	augustin	augustin	PROPN
app01-6680	1	107	fresnel	fresnel	PROPN
app01-6680	1	108	,	,	PUNCT
app01-6680	1	109	57070	57070	NUM
app01-6680	1	110	metz	metz	PROPN
app01-6680	1	111	,	,	PUNCT
app01-6680	1	112	france	france	PROPN
app01-6680	1	113	c	c	PROPN
app01-6680	1	114	université	université	PROPN
app01-6680	1	115	de	de	PROPN
app01-6680	1	116	haute	haute	PROPN
app01-6680	1	117	alsace	alsace	PROPN
app01-6680	1	118	,	,	PUNCT
app01-6680	1	119	lpmt	lpmt	PROPN
app01-6680	1	120	,	,	PUNCT
app01-6680	1	121	2	2	NUM
app01-6680	1	122	rue	rue	X
app01-6680	1	123	des	des	X
app01-6680	1	124	frères	frère	NOUN
app01-6680	1	125	lumière	lumière	PROPN
app01-6680	1	126	,	,	PUNCT
app01-6680	1	127	68093	68093	NUM
app01-6680	1	128	mulhouse	mulhouse	NOUN
app01-6680	1	129	,	,	PUNCT
app01-6680	1	130	france	france	PROPN
app01-6680	1	131	∗	∗	NOUN
app01-6680	1	132	corresponding	correspond	VERB
app01-6680	1	133	author	author	NOUN
app01-6680	1	134	:	:	PUNCT
app01-6680	1	135	sylvain.giljean@uha.fr	sylvain.giljean@uha.fr	PROPN
app01-6680	1	136	abstract	abstract	NOUN
app01-6680	1	137	.	.	PUNCT
app01-6680	2	1	this	this	DET
app01-6680	2	2	study	study	NOUN
app01-6680	2	3	aims	aim	VERB
app01-6680	2	4	to	to	PART
app01-6680	2	5	model	model	VERB
app01-6680	2	6	,	,	PUNCT
app01-6680	2	7	by	by	ADP
app01-6680	2	8	using	use	VERB
app01-6680	2	9	a	a	DET
app01-6680	2	10	finite	finite	ADJ
app01-6680	2	11	element	element	NOUN
app01-6680	2	12	method	method	NOUN
app01-6680	2	13	,	,	PUNCT
app01-6680	2	14	the	the	DET
app01-6680	2	15	relationship	relationship	NOUN
app01-6680	2	16	between	between	ADP
app01-6680	2	17	the	the	DET
app01-6680	2	18	hardness	hardness	NOUN
app01-6680	2	19	and	and	CCONJ
app01-6680	2	20	the	the	DET
app01-6680	2	21	period	period	NOUN
app01-6680	2	22	λ	λ	PROPN
app01-6680	2	23	of	of	ADP
app01-6680	2	24	metal	metal	NOUN
app01-6680	2	25	/	/	SYM
app01-6680	2	26	nitride	nitride	ADJ
app01-6680	2	27	multilayer	multilayer	ADJ
app01-6680	2	28	coatings	coating	NOUN
app01-6680	2	29	(	(	PUNCT
app01-6680	2	30	ti0.54al0.46	ti0.54al0.46	NOUN
app01-6680	2	31	/	/	SYM
app01-6680	2	32	ti0.54al0.46n)n	ti0.54al0.46n)n	NOUN
app01-6680	2	33	in	in	ADP
app01-6680	2	34	order	order	NOUN
app01-6680	2	35	to	to	PART
app01-6680	2	36	understand	understand	VERB
app01-6680	2	37	the	the	DET
app01-6680	2	38	increase	increase	NOUN
app01-6680	2	39	of	of	ADP
app01-6680	2	40	the	the	DET
app01-6680	2	41	hardness	hardness	NOUN
app01-6680	2	42	at	at	ADP
app01-6680	2	43	the	the	DET
app01-6680	2	44	low	low	ADJ
app01-6680	2	45	periods	period	NOUN
app01-6680	2	46	[	[	X
app01-6680	2	47	1	1	NUM
app01-6680	2	48	]	]	PUNCT
app01-6680	2	49	and	and	CCONJ
app01-6680	2	50	then	then	ADV
app01-6680	2	51	optimise	optimise	VERB
app01-6680	2	52	the	the	DET
app01-6680	2	53	multilayer	multilayer	ADJ
app01-6680	2	54	coating	coating	NOUN
app01-6680	2	55	architecture	architecture	NOUN
app01-6680	2	56	to	to	PART
app01-6680	2	57	obtain	obtain	VERB
app01-6680	2	58	the	the	DET
app01-6680	2	59	best	good	ADJ
app01-6680	2	60	mechanical	mechanical	ADJ
app01-6680	2	61	properties	property	NOUN
app01-6680	2	62	.	.	PUNCT
app01-6680	3	1	a	a	DET
app01-6680	3	2	2d	2d	NUM
app01-6680	3	3	axisymmetric	axisymmetric	ADJ
app01-6680	3	4	finite	finite	PROPN
app01-6680	3	5	element	element	NOUN
app01-6680	3	6	model	model	NOUN
app01-6680	3	7	of	of	ADP
app01-6680	3	8	the	the	DET
app01-6680	3	9	berkovich	berkovich	PROPN
app01-6680	3	10	nanoindentation	nanoindentation	NOUN
app01-6680	3	11	test	test	NOUN
app01-6680	3	12	was	be	AUX
app01-6680	3	13	developed	develop	VERB
app01-6680	3	14	.	.	PUNCT
app01-6680	4	1	the	the	DET
app01-6680	4	2	coating	coating	NOUN
app01-6680	4	3	was	be	AUX
app01-6680	4	4	designed	design	VERB
app01-6680	4	5	as	as	ADP
app01-6680	4	6	a	a	DET
app01-6680	4	7	stacking	stacking	NOUN
app01-6680	4	8	of	of	ADP
app01-6680	4	9	ti0.54al0.46	ti0.54al0.46	NOUN
app01-6680	4	10	and	and	CCONJ
app01-6680	4	11	ti0.54al0.46n	ti0.54al0.46n	NUM
app01-6680	4	12	nanolayers	nanolayer	NOUN
app01-6680	4	13	with	with	ADP
app01-6680	4	14	,	,	PUNCT
app01-6680	4	15	in	in	ADP
app01-6680	4	16	the	the	DET
app01-6680	4	17	first	first	ADJ
app01-6680	4	18	hypothesis	hypothesis	NOUN
app01-6680	4	19	,	,	PUNCT
app01-6680	4	20	equal	equal	ADJ
app01-6680	4	21	thickness	thickness	NOUN
app01-6680	4	22	and	and	CCONJ
app01-6680	4	23	perfect	perfect	ADJ
app01-6680	4	24	interface	interface	NOUN
app01-6680	4	25	.	.	PUNCT
app01-6680	5	1	the	the	DET
app01-6680	5	2	elastoplastic	elastoplastic	ADJ
app01-6680	5	3	behaviours	behaviour	NOUN
app01-6680	5	4	of	of	ADP
app01-6680	5	5	the	the	DET
app01-6680	5	6	metal	metal	NOUN
app01-6680	5	7	and	and	CCONJ
app01-6680	5	8	nitride	nitride	ADJ
app01-6680	5	9	layers	layer	NOUN
app01-6680	5	10	were	be	AUX
app01-6680	5	11	identified	identify	VERB
app01-6680	5	12	by	by	ADP
app01-6680	5	13	berkovich	berkovich	NOUN
app01-6680	5	14	nanoindentation	nanoindentation	NOUN
app01-6680	5	15	experiments	experiment	NOUN
app01-6680	5	16	and	and	CCONJ
app01-6680	5	17	inverse	inverse	ADJ
app01-6680	5	18	analysis	analysis	NOUN
app01-6680	5	19	on	on	ADP
app01-6680	5	20	thick	thick	ADJ
app01-6680	5	21	monolayer	monolayer	NOUN
app01-6680	5	22	samples	sample	NOUN
app01-6680	5	23	.	.	PUNCT
app01-6680	6	1	the	the	DET
app01-6680	6	2	indentation	indentation	NOUN
app01-6680	6	3	curves	curve	NOUN
app01-6680	6	4	(	(	PUNCT
app01-6680	6	5	p	p	NOUN
app01-6680	6	6	-	-	PUNCT
app01-6680	6	7	h	h	NOUN
app01-6680	6	8	)	)	PUNCT
app01-6680	6	9	obtained	obtain	VERB
app01-6680	6	10	by	by	ADP
app01-6680	6	11	this	this	DET
app01-6680	6	12	model	model	NOUN
app01-6680	6	13	depend	depend	VERB
app01-6680	6	14	on	on	ADP
app01-6680	6	15	the	the	DET
app01-6680	6	16	period	period	NOUN
app01-6680	6	17	λ	λ	PROPN
app01-6680	6	18	of	of	ADP
app01-6680	6	19	the	the	DET
app01-6680	6	20	stacking	stacking	NOUN
app01-6680	6	21	.	.	PUNCT
app01-6680	7	1	simulated	simulate	VERB
app01-6680	7	2	(	(	PUNCT
app01-6680	7	3	p	p	NOUN
app01-6680	7	4	-	-	PUNCT
app01-6680	7	5	h	h	NOUN
app01-6680	7	6	)	)	PUNCT
app01-6680	7	7	curves	curve	NOUN
app01-6680	7	8	were	be	AUX
app01-6680	7	9	compared	compare	VERB
app01-6680	7	10	with	with	ADP
app01-6680	7	11	experimental	experimental	ADJ
app01-6680	7	12	data	datum	NOUN
app01-6680	7	13	on	on	ADP
app01-6680	7	14	2	2	NUM
app01-6680	7	15	µm	µm	ADP
app01-6680	7	16	thick	thick	ADJ
app01-6680	7	17	films	film	NOUN
app01-6680	7	18	with	with	ADP
app01-6680	7	19	different	different	ADJ
app01-6680	7	20	periods	period	NOUN
app01-6680	7	21	λ	λ	NOUN
app01-6680	7	22	ranging	range	VERB
app01-6680	7	23	from	from	ADP
app01-6680	7	24	10	10	NUM
app01-6680	7	25	to	to	PART
app01-6680	7	26	50	50	NUM
app01-6680	7	27	nm	nm	NOUN
app01-6680	7	28	deposited	deposit	VERB
app01-6680	7	29	by	by	ADP
app01-6680	7	30	rf	rf	NOUN
app01-6680	7	31	magnetron	magnetron	NOUN
app01-6680	7	32	sputtering	sputtering	NOUN
app01-6680	7	33	using	use	VERB
app01-6680	7	34	reactive	reactive	ADJ
app01-6680	7	35	gas	gas	NOUN
app01-6680	7	36	pulsing	pulsing	NOUN
app01-6680	7	37	process	process	NOUN
app01-6680	7	38	(	(	PUNCT
app01-6680	7	39	rgpp	rgpp	NOUN
app01-6680	7	40	)	)	PUNCT
app01-6680	7	41	.	.	PUNCT
app01-6680	8	1	the	the	DET
app01-6680	8	2	model	model	NOUN
app01-6680	8	3	forecasts	forecast	NOUN
app01-6680	8	4	are	be	AUX
app01-6680	8	5	very	very	ADV
app01-6680	8	6	consistent	consistent	ADJ
app01-6680	8	7	with	with	ADP
app01-6680	8	8	the	the	DET
app01-6680	8	9	experience	experience	NOUN
app01-6680	8	10	for	for	ADP
app01-6680	8	11	the	the	DET
app01-6680	8	12	largest	large	ADJ
app01-6680	8	13	period	period	NOUN
app01-6680	8	14	but	but	CCONJ
app01-6680	8	15	the	the	DET
app01-6680	8	16	model	model	NOUN
app01-6680	8	17	does	do	AUX
app01-6680	8	18	not	not	PART
app01-6680	8	19	reproduce	reproduce	VERB
app01-6680	8	20	the	the	DET
app01-6680	8	21	hardness	hardness	ADJ
app01-6680	8	22	increase	increase	NOUN
app01-6680	8	23	at	at	ADP
app01-6680	8	24	the	the	DET
app01-6680	8	25	lowest	low	ADJ
app01-6680	8	26	periods	period	NOUN
app01-6680	8	27	.	.	PUNCT
app01-6680	9	1	the	the	DET
app01-6680	9	2	λ	λ	PROPN
app01-6680	9	3	=	=	SYM
app01-6680	9	4	10	10	NUM
app01-6680	9	5	nm	nm	NOUN
app01-6680	9	6	coating	coating	NOUN
app01-6680	9	7	was	be	AUX
app01-6680	9	8	analysed	analyse	VERB
app01-6680	9	9	by	by	ADP
app01-6680	9	10	electron	electron	NOUN
app01-6680	9	11	energy	energy	NOUN
app01-6680	9	12	loss	loss	NOUN
app01-6680	9	13	spectroscopy	spectroscopy	NOUN
app01-6680	9	14	(	(	PUNCT
app01-6680	9	15	eels	eel	NOUN
app01-6680	9	16	)	)	PUNCT
app01-6680	9	17	on	on	ADP
app01-6680	9	18	a	a	DET
app01-6680	9	19	transmission	transmission	NOUN
app01-6680	9	20	electron	electron	NOUN
app01-6680	9	21	microscope	microscope	NOUN
app01-6680	9	22	.	.	PUNCT
app01-6680	10	1	results	result	NOUN
app01-6680	10	2	show	show	VERB
app01-6680	10	3	intermixing	intermixing	NOUN
app01-6680	10	4	of	of	ADP
app01-6680	10	5	the	the	DET
app01-6680	10	6	layers	layer	NOUN
app01-6680	10	7	with	with	ADP
app01-6680	10	8	the	the	DET
app01-6680	10	9	presence	presence	NOUN
app01-6680	10	10	of	of	ADP
app01-6680	10	11	nitrogen	nitrogen	NOUN
app01-6680	10	12	atoms	atom	NOUN
app01-6680	10	13	in	in	ADP
app01-6680	10	14	the	the	DET
app01-6680	10	15	metal	metal	NOUN
app01-6680	10	16	layer	layer	NOUN
app01-6680	10	17	over	over	ADP
app01-6680	10	18	a	a	DET
app01-6680	10	19	few	few	ADJ
app01-6680	10	20	nanometers	nanometer	NOUN
app01-6680	10	21	[	[	X
app01-6680	10	22	1	1	NUM
app01-6680	10	23	]	]	PUNCT
app01-6680	10	24	.	.	PUNCT
app01-6680	11	1	it	it	PRON
app01-6680	11	2	was	be	AUX
app01-6680	11	3	concluded	conclude	VERB
app01-6680	11	4	that	that	SCONJ
app01-6680	11	5	the	the	DET
app01-6680	11	6	metal	metal	NOUN
app01-6680	11	7	/	/	SYM
app01-6680	11	8	ceramic	ceramic	ADJ
app01-6680	11	9	interface	interface	NOUN
app01-6680	11	10	plays	play	VERB
app01-6680	11	11	an	an	DET
app01-6680	11	12	important	important	ADJ
app01-6680	11	13	role	role	NOUN
app01-6680	11	14	at	at	ADP
app01-6680	11	15	low	low	ADJ
app01-6680	11	16	periods	period	NOUN
app01-6680	11	17	.	.	PUNCT
app01-6680	12	1	the	the	DET
app01-6680	12	2	addition	addition	NOUN
app01-6680	12	3	in	in	ADP
app01-6680	12	4	the	the	DET
app01-6680	12	5	model	model	NOUN
app01-6680	12	6	of	of	ADP
app01-6680	12	7	a	a	DET
app01-6680	12	8	transition	transition	NOUN
app01-6680	12	9	layer	layer	NOUN
app01-6680	12	10	in	in	ADP
app01-6680	12	11	the	the	DET
app01-6680	12	12	metal	metal	NOUN
app01-6680	12	13	/	/	SYM
app01-6680	12	14	nitride	nitride	NOUN
app01-6680	12	15	stacking	stacking	NOUN
app01-6680	12	16	,	,	PUNCT
app01-6680	12	17	with	with	ADP
app01-6680	12	18	an	an	DET
app01-6680	12	19	elastoplastic	elastoplastic	ADJ
app01-6680	12	20	metal	metal	NOUN
app01-6680	12	21	/	/	SYM
app01-6680	12	22	ceramic	ceramic	ADJ
app01-6680	12	23	medium	medium	NOUN
app01-6680	12	24	behaviour	behaviour	NOUN
app01-6680	12	25	,	,	PUNCT
app01-6680	12	26	allows	allow	VERB
app01-6680	12	27	to	to	PART
app01-6680	12	28	reproduce	reproduce	VERB
app01-6680	12	29	the	the	DET
app01-6680	12	30	nanoindentation	nanoindentation	NOUN
app01-6680	12	31	experimental	experimental	ADJ
app01-6680	12	32	curves	curve	NOUN
app01-6680	12	33	.	.	PUNCT
app01-6680	13	1	the	the	DET
app01-6680	13	2	thickness	thickness	NOUN
app01-6680	13	3	of	of	ADP
app01-6680	13	4	this	this	DET
app01-6680	13	5	transition	transition	NOUN
app01-6680	13	6	layer	layer	NOUN
app01-6680	13	7	deduced	deduce	VERB
app01-6680	13	8	from	from	ADP
app01-6680	13	9	model	model	NOUN
app01-6680	13	10	updating	updating	NOUN
app01-6680	13	11	method	method	NOUN
app01-6680	13	12	is	be	AUX
app01-6680	13	13	in	in	ADP
app01-6680	13	14	very	very	ADV
app01-6680	13	15	good	good	ADJ
app01-6680	13	16	agreement	agreement	NOUN
app01-6680	13	17	with	with	ADP
app01-6680	13	18	eels	eel	NOUN
app01-6680	13	19	observations	observation	NOUN
app01-6680	13	20	.	.	PUNCT
app01-6680	14	1	keywords	keyword	NOUN
app01-6680	14	2	:	:	PUNCT
app01-6680	14	3	finite	finite	PROPN
app01-6680	14	4	element	element	NOUN
app01-6680	14	5	method	method	NOUN
app01-6680	14	6	,	,	PUNCT
app01-6680	14	7	hardness	hardness	INTJ
app01-6680	14	8	,	,	PUNCT
app01-6680	14	9	indentation	indentation	NOUN
app01-6680	14	10	modulus	modulus	NOUN
app01-6680	14	11	,	,	PUNCT
app01-6680	14	12	nanoindentation	nanoindentation	NOUN
app01-6680	14	13	,	,	PUNCT
app01-6680	14	14	tial	tial	ADJ
app01-6680	14	15	/	/	SYM
app01-6680	14	16	tialn	tialn	NOUN
app01-6680	14	17	multilayer	multilayer	NOUN
app01-6680	14	18	films	film	NOUN
app01-6680	14	19	.	.	PUNCT
app01-6680	15	1	1	1	X
app01-6680	15	2	.	.	X
app01-6680	15	3	introduction	introduction	NOUN
app01-6680	15	4	titanium	titanium	NOUN
app01-6680	15	5	and	and	CCONJ
app01-6680	15	6	aluminium	aluminium	NOUN
app01-6680	15	7	nitrides	nitride	NOUN
app01-6680	15	8	(	(	PUNCT
app01-6680	15	9	tial)n	tial)n	ADP
app01-6680	15	10	coatings	coating	NOUN
app01-6680	15	11	are	be	AUX
app01-6680	15	12	extensively	extensively	ADV
app01-6680	15	13	used	use	VERB
app01-6680	15	14	in	in	ADP
app01-6680	15	15	the	the	DET
app01-6680	15	16	industry	industry	NOUN
app01-6680	15	17	since	since	SCONJ
app01-6680	15	18	many	many	ADJ
app01-6680	15	19	years	year	NOUN
app01-6680	15	20	for	for	ADP
app01-6680	15	21	their	their	PRON
app01-6680	15	22	hardness	hardness	NOUN
app01-6680	15	23	,	,	PUNCT
app01-6680	15	24	toughness	toughness	NOUN
app01-6680	15	25	and	and	CCONJ
app01-6680	15	26	wear	wear	VERB
app01-6680	15	27	and	and	CCONJ
app01-6680	15	28	oxidation	oxidation	NOUN
app01-6680	15	29	resistances	resistance	NOUN
app01-6680	15	30	[	[	X
app01-6680	15	31	2	2	NUM
app01-6680	15	32	,	,	PUNCT
app01-6680	15	33	3	3	NUM
app01-6680	15	34	]	]	PUNCT
app01-6680	15	35	.	.	PUNCT
app01-6680	16	1	it	it	PRON
app01-6680	16	2	has	have	AUX
app01-6680	16	3	been	be	AUX
app01-6680	16	4	shown	show	VERB
app01-6680	16	5	that	that	SCONJ
app01-6680	16	6	the	the	DET
app01-6680	16	7	indentation	indentation	NOUN
app01-6680	16	8	modulus	modulus	NOUN
app01-6680	16	9	and	and	CCONJ
app01-6680	16	10	the	the	DET
app01-6680	16	11	hardness	hardness	NOUN
app01-6680	16	12	of	of	ADP
app01-6680	16	13	ti1	ti1	PROPN
app01-6680	16	14	-	-	PUNCT
app01-6680	16	15	xalxn	xalxn	PROPN
app01-6680	16	16	coatings	coating	NOUN
app01-6680	16	17	depend	depend	VERB
app01-6680	16	18	on	on	ADP
app01-6680	16	19	the	the	DET
app01-6680	16	20	aluminium	aluminium	NOUN
app01-6680	16	21	content	content	NOUN
app01-6680	16	22	and	and	CCONJ
app01-6680	16	23	that	that	SCONJ
app01-6680	16	24	the	the	DET
app01-6680	16	25	optimal	optimal	ADJ
app01-6680	16	26	properties	property	NOUN
app01-6680	16	27	are	be	AUX
app01-6680	16	28	obtained	obtain	VERB
app01-6680	16	29	when	when	SCONJ
app01-6680	16	30	the	the	DET
app01-6680	16	31	maximum	maximum	PROPN
app01-6680	16	32	al	al	PROPN
app01-6680	16	33	content	content	NOUN
app01-6680	16	34	is	be	AUX
app01-6680	16	35	substituted	substitute	VERB
app01-6680	16	36	for	for	ADP
app01-6680	16	37	ti	ti	PROPN
app01-6680	16	38	in	in	ADP
app01-6680	16	39	face	face	NOUN
app01-6680	16	40	centred	centre	VERB
app01-6680	16	41	cubic	cubic	ADJ
app01-6680	16	42	structure	structure	NOUN
app01-6680	16	43	close	close	ADV
app01-6680	16	44	to	to	ADP
app01-6680	16	45	x	x	PUNCT
app01-6680	16	46	=	=	PUNCT
app01-6680	16	47	0.46	0.46	NUM
app01-6680	17	1	[	[	X
app01-6680	17	2	1	1	NUM
app01-6680	17	3	,	,	PUNCT
app01-6680	17	4	4	4	NUM
app01-6680	17	5	]	]	PUNCT
app01-6680	17	6	.	.	PUNCT
app01-6680	18	1	one	one	NUM
app01-6680	18	2	way	way	NOUN
app01-6680	18	3	to	to	PART
app01-6680	18	4	improve	improve	VERB
app01-6680	18	5	the	the	DET
app01-6680	18	6	hardness	hardness	NOUN
app01-6680	18	7	of	of	ADP
app01-6680	18	8	that	that	DET
app01-6680	18	9	kind	kind	NOUN
app01-6680	18	10	of	of	ADP
app01-6680	18	11	coatings	coating	NOUN
app01-6680	18	12	consists	consist	VERB
app01-6680	18	13	in	in	ADP
app01-6680	18	14	depositing	deposit	VERB
app01-6680	18	15	multilayer	multilayer	ADJ
app01-6680	18	16	films	film	NOUN
app01-6680	18	17	.	.	PUNCT
app01-6680	19	1	in	in	ADP
app01-6680	19	2	this	this	DET
app01-6680	19	3	study	study	NOUN
app01-6680	19	4	,	,	PUNCT
app01-6680	19	5	multilayer	multilayer	ADJ
app01-6680	19	6	coatings	coating	NOUN
app01-6680	19	7	are	be	AUX
app01-6680	19	8	studied	study	VERB
app01-6680	19	9	and	and	CCONJ
app01-6680	19	10	consist	consist	VERB
app01-6680	19	11	in	in	ADP
app01-6680	19	12	metal	metal	NOUN
app01-6680	19	13	/	/	SYM
app01-6680	19	14	ceramic	ceramic	ADJ
app01-6680	19	15	stacking	stacking	NOUN
app01-6680	19	16	with	with	ADP
app01-6680	19	17	alternate	alternate	ADJ
app01-6680	19	18	deposition	deposition	NOUN
app01-6680	19	19	of	of	ADP
app01-6680	19	20	ti0.54al0.46	ti0.54al0.46	NOUN
app01-6680	19	21	and	and	CCONJ
app01-6680	19	22	ti0.54al0.46n	ti0.54al0.46n	NUM
app01-6680	19	23	nanolayers	nanolayer	NOUN
app01-6680	19	24	with	with	ADP
app01-6680	19	25	three	three	NUM
app01-6680	19	26	different	different	ADJ
app01-6680	19	27	periods	period	NOUN
app01-6680	19	28	of	of	ADP
app01-6680	19	29	the	the	DET
app01-6680	19	30	bilayer	bilayer	NOUN
app01-6680	19	31	metal	metal	NOUN
app01-6680	19	32	/	/	SYM
app01-6680	19	33	ceramic	ceramic	ADJ
app01-6680	19	34	λ	λ	NOUN
app01-6680	19	35	=	=	NOUN
app01-6680	19	36	50	50	NUM
app01-6680	19	37	,	,	PUNCT
app01-6680	19	38	16	16	NUM
app01-6680	19	39	,	,	PUNCT
app01-6680	19	40	10	10	NUM
app01-6680	19	41	nm	nm	NOUN
app01-6680	19	42	.	.	PUNCT
app01-6680	20	1	in	in	ADP
app01-6680	20	2	order	order	NOUN
app01-6680	20	3	to	to	PART
app01-6680	20	4	facilitate	facilitate	VERB
app01-6680	20	5	the	the	DET
app01-6680	20	6	reading	reading	NOUN
app01-6680	20	7	of	of	ADP
app01-6680	20	8	the	the	DET
app01-6680	20	9	paper	paper	NOUN
app01-6680	20	10	,	,	PUNCT
app01-6680	20	11	ti0.54al0.46	ti0.54al0.46	NOUN
app01-6680	20	12	and	and	CCONJ
app01-6680	20	13	ti0.54al0.46n	ti0.54al0.46n	PROPN
app01-6680	20	14	are	be	AUX
app01-6680	20	15	respectively	respectively	ADV
app01-6680	20	16	written	write	VERB
app01-6680	20	17	as	as	ADP
app01-6680	20	18	tial	tial	NOUN
app01-6680	20	19	and	and	CCONJ
app01-6680	20	20	tialn	tialn	NOUN
app01-6680	20	21	.	.	PUNCT
app01-6680	21	1	the	the	DET
app01-6680	21	2	main	main	ADJ
app01-6680	21	3	objective	objective	NOUN
app01-6680	21	4	of	of	ADP
app01-6680	21	5	the	the	DET
app01-6680	21	6	paper	paper	NOUN
app01-6680	21	7	is	be	AUX
app01-6680	21	8	to	to	PART
app01-6680	21	9	study	study	VERB
app01-6680	21	10	the	the	DET
app01-6680	21	11	relationship	relationship	NOUN
app01-6680	21	12	between	between	ADP
app01-6680	21	13	hardness	hardness	NOUN
app01-6680	21	14	of	of	ADP
app01-6680	21	15	as	as	ADP
app01-6680	21	16	-	-	PUNCT
app01-6680	21	17	design	design	NOUN
app01-6680	21	18	multilayer	multilayer	ADJ
app01-6680	21	19	films	film	NOUN
app01-6680	21	20	and	and	CCONJ
app01-6680	21	21	periods	period	NOUN
app01-6680	21	22	of	of	ADP
app01-6680	21	23	their	their	PRON
app01-6680	21	24	stacking	stacking	NOUN
app01-6680	21	25	to	to	PART
app01-6680	21	26	understand	understand	VERB
app01-6680	21	27	the	the	DET
app01-6680	21	28	elastoplastic	elastoplastic	ADJ
app01-6680	21	29	phenomena	phenomenon	NOUN
app01-6680	21	30	that	that	PRON
app01-6680	21	31	are	be	AUX
app01-6680	21	32	involved	involve	VERB
app01-6680	21	33	in	in	ADP
app01-6680	21	34	the	the	DET
app01-6680	21	35	hardness	hardness	NOUN
app01-6680	21	36	increase	increase	NOUN
app01-6680	21	37	experimentally	experimentally	ADV
app01-6680	21	38	observed	observe	VERB
app01-6680	21	39	at	at	ADP
app01-6680	21	40	the	the	DET
app01-6680	21	41	lowest	low	ADJ
app01-6680	21	42	periods	period	NOUN
app01-6680	21	43	[	[	X
app01-6680	21	44	1	1	NUM
app01-6680	21	45	]	]	PUNCT
app01-6680	21	46	.	.	PUNCT
app01-6680	22	1	a	a	DET
app01-6680	22	2	2d	2d	NUM
app01-6680	22	3	axisymmetric	axisymmetric	ADJ
app01-6680	22	4	model	model	NOUN
app01-6680	22	5	of	of	ADP
app01-6680	22	6	the	the	DET
app01-6680	22	7	berkovich	berkovich	NOUN
app01-6680	22	8	nanoindentation	nanoindentation	NOUN
app01-6680	22	9	is	be	AUX
app01-6680	22	10	developed	develop	VERB
app01-6680	22	11	.	.	PUNCT
app01-6680	23	1	then	then	ADV
app01-6680	23	2	a	a	DET
app01-6680	23	3	method	method	NOUN
app01-6680	23	4	to	to	PART
app01-6680	23	5	identify	identify	VERB
app01-6680	23	6	the	the	DET
app01-6680	23	7	elastoplastic	elastoplastic	ADJ
app01-6680	23	8	mechanical	mechanical	ADJ
app01-6680	23	9	properties	property	NOUN
app01-6680	23	10	of	of	ADP
app01-6680	23	11	the	the	DET
app01-6680	23	12	monolayer	monolayer	NOUN
app01-6680	23	13	tial	tial	NOUN
app01-6680	23	14	and	and	CCONJ
app01-6680	23	15	tialn	tialn	NOUN
app01-6680	23	16	is	be	AUX
app01-6680	23	17	proposed	propose	VERB
app01-6680	23	18	.	.	PUNCT
app01-6680	24	1	the	the	DET
app01-6680	24	2	results	result	NOUN
app01-6680	24	3	are	be	AUX
app01-6680	24	4	introduced	introduce	VERB
app01-6680	24	5	in	in	ADP
app01-6680	24	6	a	a	DET
app01-6680	24	7	multilayer	multilayer	ADJ
app01-6680	24	8	stacking	stacking	NOUN
app01-6680	24	9	model	model	NOUN
app01-6680	24	10	that	that	PRON
app01-6680	24	11	allows	allow	VERB
app01-6680	24	12	to	to	PART
app01-6680	24	13	obtain	obtain	VERB
app01-6680	24	14	the	the	DET
app01-6680	24	15	indentation	indentation	NOUN
app01-6680	24	16	curves	curve	NOUN
app01-6680	24	17	(	(	PUNCT
app01-6680	24	18	p	p	NOUN
app01-6680	24	19	-	-	PUNCT
app01-6680	24	20	h	h	NOUN
app01-6680	24	21	)	)	PUNCT
app01-6680	24	22	as	as	ADP
app01-6680	24	23	a	a	DET
app01-6680	24	24	function	function	NOUN
app01-6680	24	25	of	of	ADP
app01-6680	24	26	the	the	DET
app01-6680	24	27	period	period	NOUN
app01-6680	24	28	λ	λ	NOUN
app01-6680	24	29	.	.	PUNCT
app01-6680	25	1	as	as	ADP
app01-6680	25	2	a	a	DET
app01-6680	25	3	first	first	ADJ
app01-6680	25	4	hypothesis	hypothesis	NOUN
app01-6680	25	5	the	the	DET
app01-6680	25	6	interface	interface	NOUN
app01-6680	25	7	between	between	ADP
app01-6680	25	8	tial	tial	ADJ
app01-6680	25	9	and	and	CCONJ
app01-6680	25	10	tialn	tialn	NOUN
app01-6680	25	11	layers	layer	NOUN
app01-6680	25	12	is	be	AUX
app01-6680	25	13	considered	consider	VERB
app01-6680	25	14	as	as	ADP
app01-6680	25	15	perfect	perfect	ADJ
app01-6680	25	16	without	without	ADP
app01-6680	25	17	thickness	thickness	NOUN
app01-6680	25	18	.	.	PUNCT
app01-6680	26	1	then	then	ADV
app01-6680	26	2	a	a	DET
app01-6680	26	3	transition	transition	NOUN
app01-6680	26	4	layer	layer	NOUN
app01-6680	26	5	is	be	AUX
app01-6680	26	6	added	add	VERB
app01-6680	26	7	and	and	CCONJ
app01-6680	26	8	allows	allow	VERB
app01-6680	26	9	to	to	PART
app01-6680	26	10	reproduce	reproduce	VERB
app01-6680	26	11	the	the	DET
app01-6680	26	12	experimental	experimental	ADJ
app01-6680	26	13	indentation	indentation	NOUN
app01-6680	26	14	curves	curve	NOUN
app01-6680	26	15	.	.	PUNCT
app01-6680	27	1	79	79	NUM
app01-6680	27	2	http://dx.doi.org/10.14311/app.2020.27.0079	http://dx.doi.org/10.14311/app.2020.27.0079	PROPN
app01-6680	27	3	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	PROPN
app01-6680	27	4	m.	m.	PROPN
app01-6680	27	5	zaoui	zaoui	PROPN
app01-6680	27	6	,	,	PUNCT
app01-6680	27	7	a.	a.	NOUN
app01-6680	27	8	bourceret	bourceret	NOUN
app01-6680	27	9	,	,	PUNCT
app01-6680	27	10	y.	y.	PROPN
app01-6680	27	11	gaillard	gaillard	PROPN
app01-6680	27	12	et	et	PROPN
app01-6680	27	13	al	al	PROPN
app01-6680	27	14	.	.	PROPN
app01-6680	28	1	acta	acta	PROPN
app01-6680	28	2	polytechnica	polytechnica	PROPN
app01-6680	28	3	2	2	NUM
app01-6680	28	4	.	.	PUNCT
app01-6680	29	1	materials	material	NOUN
app01-6680	29	2	and	and	CCONJ
app01-6680	29	3	methods	method	NOUN
app01-6680	29	4	tial	tial	NOUN
app01-6680	29	5	and	and	CCONJ
app01-6680	29	6	tialn	tialn	NOUN
app01-6680	29	7	monolayer	monolayer	NOUN
app01-6680	29	8	thin	thin	ADJ
app01-6680	29	9	films	film	NOUN
app01-6680	29	10	were	be	AUX
app01-6680	29	11	deposited	deposit	VERB
app01-6680	29	12	onto	onto	ADP
app01-6680	29	13	si	si	X
app01-6680	29	14	(	(	PUNCT
app01-6680	29	15	100	100	NUM
app01-6680	29	16	)	)	PUNCT
app01-6680	29	17	wafer	wafer	NOUN
app01-6680	29	18	by	by	ADP
app01-6680	29	19	rf	rf	ADJ
app01-6680	29	20	magnetron	magnetron	NOUN
app01-6680	29	21	sputtering	sputtering	NOUN
app01-6680	29	22	using	use	VERB
app01-6680	29	23	one	one	NUM
app01-6680	29	24	sintered	sinter	VERB
app01-6680	29	25	titanium	titanium	NOUN
app01-6680	29	26	/	/	SYM
app01-6680	29	27	aluminium	aluminium	NOUN
app01-6680	29	28	66/33	66/33	NUM
app01-6680	29	29	at.%	at.%	ADJ
app01-6680	29	30	alloy	alloy	NOUN
app01-6680	29	31	target	target	NOUN
app01-6680	29	32	as	as	SCONJ
app01-6680	29	33	described	describe	VERB
app01-6680	29	34	elsewhere	elsewhere	ADV
app01-6680	29	35	[	[	X
app01-6680	29	36	4	4	NUM
app01-6680	29	37	]	]	PUNCT
app01-6680	29	38	.	.	PUNCT
app01-6680	30	1	same	same	ADJ
app01-6680	30	2	experimental	experimental	ADJ
app01-6680	30	3	conditions	condition	NOUN
app01-6680	30	4	were	be	AUX
app01-6680	30	5	used	use	VERB
app01-6680	30	6	to	to	PART
app01-6680	30	7	deposit	deposit	VERB
app01-6680	30	8	(	(	PUNCT
app01-6680	30	9	tial	tial	ADJ
app01-6680	30	10	/	/	SYM
app01-6680	30	11	tialn)n	tialn)n	NOUN
app01-6680	30	12	multilayer	multilayer	ADJ
app01-6680	30	13	films	film	NOUN
app01-6680	30	14	with	with	ADP
app01-6680	30	15	different	different	ADJ
app01-6680	30	16	periods	period	NOUN
app01-6680	30	17	using	use	VERB
app01-6680	30	18	reactive	reactive	ADJ
app01-6680	30	19	gas	gas	NOUN
app01-6680	30	20	pulsing	pulsing	NOUN
app01-6680	30	21	process	process	NOUN
app01-6680	30	22	(	(	PUNCT
app01-6680	30	23	rgpp	rgpp	NOUN
app01-6680	30	24	)	)	PUNCT
app01-6680	31	1	[	[	X
app01-6680	31	2	5	5	NUM
app01-6680	31	3	]	]	PUNCT
app01-6680	31	4	with	with	ADP
app01-6680	31	5	a	a	DET
app01-6680	31	6	controlled	control	VERB
app01-6680	31	7	pulsing	pulse	VERB
app01-6680	31	8	flow	flow	NOUN
app01-6680	31	9	rate	rate	NOUN
app01-6680	31	10	of	of	ADP
app01-6680	31	11	the	the	DET
app01-6680	31	12	nitrogen	nitrogen	NOUN
app01-6680	31	13	reactive	reactive	ADJ
app01-6680	31	14	gas	gas	NOUN
app01-6680	31	15	as	as	SCONJ
app01-6680	31	16	described	describe	VERB
app01-6680	31	17	elsewhere	elsewhere	ADV
app01-6680	31	18	[	[	X
app01-6680	31	19	1	1	NUM
app01-6680	31	20	]	]	PUNCT
app01-6680	31	21	.	.	PUNCT
app01-6680	32	1	finally	finally	ADV
app01-6680	32	2	,	,	PUNCT
app01-6680	32	3	the	the	DET
app01-6680	32	4	samples	sample	NOUN
app01-6680	32	5	considered	consider	VERB
app01-6680	32	6	in	in	ADP
app01-6680	32	7	this	this	DET
app01-6680	32	8	paper	paper	NOUN
app01-6680	32	9	are	be	AUX
app01-6680	32	10	summarised	summarise	VERB
app01-6680	32	11	in	in	ADP
app01-6680	32	12	table	table	NOUN
app01-6680	32	13	1	1	NUM
app01-6680	32	14	.	.	PUNCT
app01-6680	32	15	sample	sample	NOUN
app01-6680	32	16	period	period	NOUN
app01-6680	32	17	thickness	thickness	NOUN
app01-6680	32	18	λ	λ	PROPN
app01-6680	32	19	(	(	PUNCT
app01-6680	32	20	nm	nm	PROPN
app01-6680	32	21	)	)	PUNCT
app01-6680	32	22	ep	ep	PROPN
app01-6680	32	23	(	(	PUNCT
app01-6680	32	24	µm	µm	NOUN
app01-6680	32	25	)	)	PUNCT
app01-6680	32	26	tial	tial	NOUN
app01-6680	32	27	/	/	SYM
app01-6680	32	28	3.0	3.0	NUM
app01-6680	32	29	tialn	tialn	NOUN
app01-6680	32	30	/	/	PUNCT
app01-6680	32	31	3.0	3.0	NUM
app01-6680	32	32	50	50	NUM
app01-6680	32	33	2.0	2.0	NUM
app01-6680	32	34	(	(	PUNCT
app01-6680	32	35	tial	tial	PROPN
app01-6680	32	36	/	/	SYM
app01-6680	32	37	tialn)n	tialn)n	NOUN
app01-6680	32	38	16	16	NUM
app01-6680	32	39	2.0	2.0	NUM
app01-6680	32	40	10	10	NUM
app01-6680	32	41	1.8	1.8	NUM
app01-6680	32	42	table	table	NOUN
app01-6680	32	43	1	1	NUM
app01-6680	32	44	.	.	PUNCT
app01-6680	32	45	sample	sample	NOUN
app01-6680	32	46	characteristics	characteristic	NOUN
app01-6680	32	47	.	.	PUNCT
app01-6680	33	1	nano	nano	NOUN
app01-6680	33	2	-	-	PUNCT
app01-6680	33	3	indentation	indentation	NOUN
app01-6680	33	4	tests	test	NOUN
app01-6680	33	5	were	be	AUX
app01-6680	33	6	performed	perform	VERB
app01-6680	33	7	using	use	VERB
app01-6680	33	8	an	an	DET
app01-6680	33	9	ultra	ultra	ADJ
app01-6680	33	10	nano	nano	NOUN
app01-6680	33	11	-	-	PUNCT
app01-6680	33	12	indentation	indentation	NOUN
app01-6680	33	13	hardness	hardness	NOUN
app01-6680	33	14	tester	tester	NOUN
app01-6680	33	15	provided	provide	VERB
app01-6680	33	16	by	by	ADP
app01-6680	33	17	anton	anton	NOUN
app01-6680	33	18	paar	paar	NOUN
app01-6680	33	19	.	.	PUNCT
app01-6680	34	1	experiments	experiment	NOUN
app01-6680	34	2	were	be	AUX
app01-6680	34	3	conducted	conduct	VERB
app01-6680	34	4	using	use	VERB
app01-6680	34	5	a	a	DET
app01-6680	34	6	berkovich	berkovich	NOUN
app01-6680	34	7	tip	tip	NOUN
app01-6680	34	8	and	and	CCONJ
app01-6680	34	9	the	the	DET
app01-6680	34	10	multicycle	multicycle	NOUN
app01-6680	34	11	procedure	procedure	NOUN
app01-6680	34	12	in	in	ADP
app01-6680	34	13	load	load	NOUN
app01-6680	34	14	control	control	NOUN
app01-6680	34	15	up	up	ADP
app01-6680	34	16	to	to	PART
app01-6680	34	17	8	8	NUM
app01-6680	34	18	mn	mn	NOUN
app01-6680	35	1	[	[	X
app01-6680	35	2	1	1	NUM
app01-6680	35	3	,	,	PUNCT
app01-6680	35	4	4	4	NUM
app01-6680	35	5	]	]	PUNCT
app01-6680	35	6	.	.	PUNCT
app01-6680	36	1	a	a	DET
app01-6680	36	2	2d	2d	NUM
app01-6680	36	3	axisymmetric	axisymmetric	ADJ
app01-6680	36	4	finite	finite	PROPN
app01-6680	36	5	element	element	NOUN
app01-6680	36	6	model	model	NOUN
app01-6680	36	7	of	of	ADP
app01-6680	36	8	the	the	DET
app01-6680	36	9	berkovich	berkovich	PROPN
app01-6680	36	10	nanoindentation	nanoindentation	NOUN
app01-6680	36	11	test	test	NOUN
app01-6680	36	12	was	be	AUX
app01-6680	36	13	developed	develop	VERB
app01-6680	36	14	with	with	ADP
app01-6680	36	15	the	the	DET
app01-6680	36	16	ansys	ansys	PROPN
app01-6680	36	17	finite	finite	PROPN
app01-6680	36	18	element	element	PROPN
app01-6680	36	19	software	software	NOUN
app01-6680	36	20	as	as	SCONJ
app01-6680	36	21	described	describe	VERB
app01-6680	36	22	on	on	ADP
app01-6680	36	23	figure	figure	NOUN
app01-6680	36	24	1	1	NUM
app01-6680	36	25	.	.	PUNCT
app01-6680	37	1	an	an	DET
app01-6680	37	2	implicit	implicit	ADJ
app01-6680	37	3	method	method	NOUN
app01-6680	37	4	with	with	ADP
app01-6680	37	5	non	non	ADJ
app01-6680	37	6	-	-	ADJ
app01-6680	37	7	linear	linear	ADJ
app01-6680	37	8	geometric	geometric	ADJ
app01-6680	37	9	formulation	formulation	NOUN
app01-6680	37	10	has	have	AUX
app01-6680	37	11	been	be	AUX
app01-6680	37	12	used	use	VERB
app01-6680	37	13	with	with	ADP
app01-6680	37	14	higher	high	ADJ
app01-6680	37	15	order	order	NOUN
app01-6680	37	16	2d	2d	NUM
app01-6680	37	17	elements	element	NOUN
app01-6680	37	18	.	.	PUNCT
app01-6680	38	1	a	a	DET
app01-6680	38	2	deformable	deformable	ADJ
app01-6680	38	3	indenter	indenter	NOUN
app01-6680	38	4	,	,	PUNCT
app01-6680	38	5	with	with	ADP
app01-6680	38	6	isotropic	isotropic	ADJ
app01-6680	38	7	linear	linear	ADJ
app01-6680	38	8	elastic	elastic	ADJ
app01-6680	38	9	law	law	NOUN
app01-6680	38	10	,	,	PUNCT
app01-6680	38	11	was	be	AUX
app01-6680	38	12	modelled	model	VERB
app01-6680	38	13	with	with	ADP
app01-6680	38	14	a	a	DET
app01-6680	38	15	half	half	ADJ
app01-6680	38	16	contact	contact	NOUN
app01-6680	38	17	angle	angle	NOUN
app01-6680	38	18	of	of	ADP
app01-6680	38	19	70.3	70.3	NUM
app01-6680	38	20	°	°	NOUN
app01-6680	38	21	and	and	CCONJ
app01-6680	38	22	a	a	DET
app01-6680	38	23	tip	tip	NOUN
app01-6680	38	24	radius	radius	NOUN
app01-6680	38	25	to	to	PART
app01-6680	38	26	fit	fit	VERB
app01-6680	38	27	the	the	DET
app01-6680	38	28	experimental	experimental	ADJ
app01-6680	38	29	tip	tip	NOUN
app01-6680	38	30	defects	defect	NOUN
app01-6680	38	31	.	.	PUNCT
app01-6680	39	1	a	a	DET
app01-6680	39	2	friction	friction	NOUN
app01-6680	39	3	coefficient	coefficient	NOUN
app01-6680	39	4	of	of	ADP
app01-6680	39	5	0.1	0.1	NUM
app01-6680	39	6	was	be	AUX
app01-6680	39	7	imposed	impose	VERB
app01-6680	39	8	at	at	ADP
app01-6680	39	9	the	the	DET
app01-6680	39	10	contact	contact	NOUN
app01-6680	39	11	between	between	ADP
app01-6680	39	12	the	the	DET
app01-6680	39	13	indenter	indenter	NOUN
app01-6680	39	14	and	and	CCONJ
app01-6680	39	15	the	the	DET
app01-6680	39	16	film	film	NOUN
app01-6680	39	17	.	.	PUNCT
app01-6680	40	1	the	the	DET
app01-6680	40	2	mesh	mesh	NOUN
app01-6680	40	3	density	density	NOUN
app01-6680	40	4	has	have	AUX
app01-6680	40	5	been	be	AUX
app01-6680	40	6	refined	refine	VERB
app01-6680	40	7	so	so	SCONJ
app01-6680	40	8	that	that	SCONJ
app01-6680	40	9	the	the	DET
app01-6680	40	10	smallest	small	ADJ
app01-6680	40	11	elements	element	NOUN
app01-6680	40	12	are	be	AUX
app01-6680	40	13	localised	localise	VERB
app01-6680	40	14	in	in	ADP
app01-6680	40	15	the	the	DET
app01-6680	40	16	contact	contact	NOUN
app01-6680	40	17	region	region	NOUN
app01-6680	40	18	.	.	PUNCT
app01-6680	41	1	the	the	DET
app01-6680	41	2	film	film	NOUN
app01-6680	41	3	can	can	AUX
app01-6680	41	4	be	be	AUX
app01-6680	41	5	either	either	PRON
app01-6680	41	6	monolayer	monolayer	NOUN
app01-6680	41	7	tial	tial	NOUN
app01-6680	41	8	or	or	CCONJ
app01-6680	41	9	tialn	tialn	NOUN
app01-6680	41	10	or	or	CCONJ
app01-6680	41	11	multilayer	multilayer	NOUN
app01-6680	41	12	(	(	PUNCT
app01-6680	41	13	tial	tial	PROPN
app01-6680	41	14	/	/	SYM
app01-6680	41	15	tialn)n	tialn)n	PROPN
app01-6680	41	16	.	.	PUNCT
app01-6680	42	1	for	for	ADP
app01-6680	42	2	the	the	DET
app01-6680	42	3	monolayer	monolayer	NOUN
app01-6680	42	4	tial	tial	NOUN
app01-6680	42	5	and	and	CCONJ
app01-6680	42	6	tialn	tialn	NOUN
app01-6680	42	7	,	,	PUNCT
app01-6680	42	8	isotropic	isotropic	ADJ
app01-6680	42	9	elastoplastic	elastoplastic	ADJ
app01-6680	42	10	behaviour	behaviour	NOUN
app01-6680	42	11	laws	law	NOUN
app01-6680	42	12	were	be	AUX
app01-6680	42	13	considered	consider	VERB
app01-6680	42	14	with	with	ADP
app01-6680	42	15	linear	linear	ADJ
app01-6680	42	16	hardening	hardening	NOUN
app01-6680	42	17	.	.	PUNCT
app01-6680	43	1	elastic	elastic	ADJ
app01-6680	43	2	properties	property	NOUN
app01-6680	43	3	were	be	AUX
app01-6680	43	4	obtained	obtain	VERB
app01-6680	43	5	from	from	ADP
app01-6680	43	6	experimental	experimental	ADJ
app01-6680	43	7	nanoindentation	nanoindentation	NOUN
app01-6680	43	8	and	and	CCONJ
app01-6680	43	9	plastic	plastic	NOUN
app01-6680	43	10	properties	property	NOUN
app01-6680	43	11	were	be	AUX
app01-6680	43	12	estimated	estimate	VERB
app01-6680	43	13	using	use	VERB
app01-6680	43	14	finite	finite	PROPN
app01-6680	43	15	element	element	PROPN
app01-6680	43	16	model	model	NOUN
app01-6680	43	17	updating	updating	NOUN
app01-6680	43	18	.	.	PUNCT
app01-6680	44	1	the	the	DET
app01-6680	44	2	approach	approach	NOUN
app01-6680	44	3	used	use	VERB
app01-6680	44	4	to	to	PART
app01-6680	44	5	extract	extract	VERB
app01-6680	44	6	the	the	DET
app01-6680	44	7	constitutive	constitutive	ADJ
app01-6680	44	8	parameters	parameter	NOUN
app01-6680	44	9	of	of	ADP
app01-6680	44	10	plastic	plastic	ADJ
app01-6680	44	11	law	law	NOUN
app01-6680	44	12	of	of	ADP
app01-6680	44	13	tial	tial	NOUN
app01-6680	44	14	and	and	CCONJ
app01-6680	44	15	tialn	tialn	NOUN
app01-6680	44	16	consists	consist	VERB
app01-6680	44	17	in	in	ADP
app01-6680	44	18	an	an	DET
app01-6680	44	19	optimisation	optimisation	NOUN
app01-6680	44	20	problem	problem	NOUN
app01-6680	44	21	;	;	PUNCT
app01-6680	44	22	the	the	DET
app01-6680	44	23	objective	objective	NOUN
app01-6680	44	24	of	of	ADP
app01-6680	44	25	which	which	PRON
app01-6680	44	26	is	be	AUX
app01-6680	44	27	to	to	PART
app01-6680	44	28	minimise	minimise	VERB
app01-6680	44	29	a	a	DET
app01-6680	44	30	cost	cost	NOUN
app01-6680	44	31	function	function	NOUN
app01-6680	44	32	ω	ω	NOUN
app01-6680	44	33	by	by	ADP
app01-6680	44	34	using	use	VERB
app01-6680	44	35	an	an	DET
app01-6680	44	36	algorithm	algorithm	NOUN
app01-6680	44	37	based	base	VERB
app01-6680	44	38	on	on	ADP
app01-6680	44	39	the	the	DET
app01-6680	44	40	levenberg	levenberg	PROPN
app01-6680	44	41	-	-	PUNCT
app01-6680	44	42	marquardt	marquardt	PROPN
app01-6680	45	1	[	[	X
app01-6680	45	2	6	6	NUM
app01-6680	45	3	,	,	PUNCT
app01-6680	45	4	7	7	NUM
app01-6680	45	5	]	]	X
app01-6680	45	6	method	method	NOUN
app01-6680	45	7	using	use	VERB
app01-6680	45	8	the	the	DET
app01-6680	45	9	mic2	mic2	PROPN
app01-6680	45	10	m	m	PROPN
app01-6680	45	11	software	software	NOUN
app01-6680	45	12	[	[	X
app01-6680	45	13	8	8	NUM
app01-6680	45	14	]	]	PUNCT
app01-6680	45	15	:	:	PUNCT
app01-6680	45	16	θ̂	θ̂	NUM
app01-6680	45	17	=	=	SYM
app01-6680	45	18	argmin	argmin	NOUN
app01-6680	45	19	θ	θ	PROPN
app01-6680	45	20	ω	ω	PROPN
app01-6680	45	21	(	(	PUNCT
app01-6680	45	22	p	p	X
app01-6680	45	23	(	(	PUNCT
app01-6680	45	24	t	t	PROPN
app01-6680	45	25	;	;	PUNCT
app01-6680	45	26	θ	θ	X
app01-6680	45	27	)	)	PUNCT
app01-6680	45	28	,	,	PUNCT
app01-6680	45	29	p	p	NOUN
app01-6680	45	30	exp	exp	PROPN
app01-6680	45	31	(	(	PUNCT
app01-6680	45	32	t	t	PROPN
app01-6680	45	33	)	)	PUNCT
app01-6680	45	34	)	)	PUNCT
app01-6680	45	35	(	(	PUNCT
app01-6680	45	36	1	1	X
app01-6680	45	37	)	)	PUNCT
app01-6680	45	38	where	where	SCONJ
app01-6680	45	39	θ̂	θ̂	PROPN
app01-6680	45	40	is	be	AUX
app01-6680	45	41	the	the	DET
app01-6680	45	42	vector	vector	NOUN
app01-6680	45	43	of	of	ADP
app01-6680	45	44	the	the	DET
app01-6680	45	45	unknown	unknown	ADJ
app01-6680	45	46	parameters	parameter	NOUN
app01-6680	45	47	and	and	CCONJ
app01-6680	45	48	ω	ω	NUM
app01-6680	45	49	the	the	DET
app01-6680	45	50	cost	cost	NOUN
app01-6680	45	51	function	function	NOUN
app01-6680	45	52	i.e.	i.e.	ADV
app01-6680	45	53	,	,	PUNCT
app01-6680	45	54	the	the	DET
app01-6680	45	55	gap	gap	NOUN
app01-6680	45	56	between	between	ADP
app01-6680	45	57	p	p	NOUN
app01-6680	45	58	exp	exp	NOUN
app01-6680	45	59	(	(	PUNCT
app01-6680	45	60	t	t	PROPN
app01-6680	45	61	)	)	PUNCT
app01-6680	45	62	the	the	DET
app01-6680	45	63	figure	figure	NOUN
app01-6680	45	64	1	1	NUM
app01-6680	45	65	.	.	PUNCT
app01-6680	45	66	description	description	NOUN
app01-6680	45	67	of	of	ADP
app01-6680	45	68	the	the	DET
app01-6680	45	69	2d	2d	NUM
app01-6680	45	70	axisymmetric	axisymmetric	ADJ
app01-6680	45	71	finite	finite	PROPN
app01-6680	45	72	element	element	NOUN
app01-6680	45	73	indentation	indentation	NOUN
app01-6680	45	74	model	model	NOUN
app01-6680	45	75	.	.	PUNCT
app01-6680	46	1	experimental	experimental	ADJ
app01-6680	46	2	data	datum	NOUN
app01-6680	46	3	and	and	CCONJ
app01-6680	46	4	p	p	PROPN
app01-6680	46	5	(	(	PUNCT
app01-6680	46	6	t	t	PROPN
app01-6680	46	7	;	;	PUNCT
app01-6680	46	8	θ	θ	X
app01-6680	46	9	)	)	PUNCT
app01-6680	46	10	the	the	DET
app01-6680	46	11	numerical	numerical	ADJ
app01-6680	46	12	results	result	NOUN
app01-6680	46	13	.	.	PUNCT
app01-6680	47	1	then	then	ADV
app01-6680	47	2	the	the	DET
app01-6680	47	3	cost	cost	NOUN
app01-6680	47	4	function	function	NOUN
app01-6680	47	5	can	can	AUX
app01-6680	47	6	be	be	AUX
app01-6680	47	7	defined	define	VERB
app01-6680	47	8	as	as	ADP
app01-6680	47	9	:	:	PUNCT
app01-6680	47	10	ω(θ	ω(θ	NUM
app01-6680	47	11	)	)	PUNCT
app01-6680	47	12	=	=	SYM
app01-6680	47	13	1	1	NUM
app01-6680	47	14	2	2	NUM
app01-6680	47	15	t	t	NOUN
app01-6680	47	16	t∑	t∑	X
app01-6680	47	17	k=1	k=1	PROPN
app01-6680	48	1	(	(	PUNCT
app01-6680	48	2	pk(θ)−	pk(θ)−	PROPN
app01-6680	48	3	p	p	X
app01-6680	48	4	expk	expk	PROPN
app01-6680	48	5	p	p	PROPN
app01-6680	48	6	expmax	expmax	PROPN
app01-6680	48	7	)	)	PUNCT
app01-6680	48	8	2	2	NUM
app01-6680	48	9	(	(	PUNCT
app01-6680	48	10	2	2	NUM
app01-6680	48	11	)	)	PUNCT
app01-6680	48	12	where	where	SCONJ
app01-6680	48	13	t	t	PROPN
app01-6680	48	14	is	be	AUX
app01-6680	48	15	the	the	DET
app01-6680	48	16	number	number	NOUN
app01-6680	48	17	of	of	ADP
app01-6680	48	18	acquisition	acquisition	NOUN
app01-6680	48	19	times	time	NOUN
app01-6680	48	20	of	of	ADP
app01-6680	48	21	the	the	DET
app01-6680	48	22	load	load	NOUN
app01-6680	48	23	pk(θ	pk(θ	NOUN
app01-6680	48	24	)	)	PUNCT
app01-6680	49	1	=	=	SYM
app01-6680	49	2	p	p	X
app01-6680	49	3	(	(	PUNCT
app01-6680	49	4	tk	tk	PROPN
app01-6680	49	5	;	;	PUNCT
app01-6680	49	6	θ	θ	X
app01-6680	49	7	)	)	PUNCT
app01-6680	49	8	and	and	CCONJ
app01-6680	49	9	p	p	NOUN
app01-6680	49	10	expmax	expmax	VERB
app01-6680	49	11	the	the	DET
app01-6680	49	12	maximum	maximum	ADJ
app01-6680	49	13	value	value	NOUN
app01-6680	49	14	of	of	ADP
app01-6680	49	15	the	the	DET
app01-6680	49	16	experimental	experimental	ADJ
app01-6680	49	17	indentation	indentation	NOUN
app01-6680	49	18	load	load	NOUN
app01-6680	49	19	.	.	PUNCT
app01-6680	50	1	3	3	X
app01-6680	50	2	.	.	NOUN
app01-6680	50	3	results	result	NOUN
app01-6680	50	4	and	and	CCONJ
app01-6680	50	5	discussion	discussion	NOUN
app01-6680	50	6	3.1	3.1	NUM
app01-6680	50	7	.	.	PUNCT
app01-6680	51	1	mechanical	mechanical	ADJ
app01-6680	51	2	properties	property	NOUN
app01-6680	51	3	of	of	ADP
app01-6680	51	4	tial	tial	ADJ
app01-6680	51	5	and	and	CCONJ
app01-6680	51	6	tialn	tialn	NOUN
app01-6680	51	7	monolayers	monolayer	NOUN
app01-6680	51	8	all	all	DET
app01-6680	51	9	the	the	DET
app01-6680	51	10	experimental	experimental	ADJ
app01-6680	51	11	data	datum	NOUN
app01-6680	51	12	of	of	ADP
app01-6680	51	13	the	the	DET
app01-6680	51	14	indentation	indentation	NOUN
app01-6680	51	15	tests	test	NOUN
app01-6680	51	16	performed	perform	VERB
app01-6680	51	17	on	on	ADP
app01-6680	51	18	the	the	DET
app01-6680	51	19	tial	tial	ADJ
app01-6680	51	20	and	and	CCONJ
app01-6680	51	21	tialn	tialn	NOUN
app01-6680	51	22	monolayer	monolayer	NOUN
app01-6680	51	23	films	film	NOUN
app01-6680	51	24	have	have	AUX
app01-6680	51	25	already	already	ADV
app01-6680	51	26	been	be	AUX
app01-6680	51	27	published	publish	VERB
app01-6680	51	28	elsewhere	elsewhere	ADV
app01-6680	51	29	[	[	X
app01-6680	51	30	1	1	NUM
app01-6680	51	31	,	,	PUNCT
app01-6680	51	32	4	4	NUM
app01-6680	51	33	]	]	PUNCT
app01-6680	51	34	.	.	PUNCT
app01-6680	52	1	hardness	hardness	NOUN
app01-6680	52	2	and	and	CCONJ
app01-6680	52	3	indentation	indentation	NOUN
app01-6680	52	4	modulus	modulus	ADJ
app01-6680	52	5	values	value	NOUN
app01-6680	52	6	of	of	ADP
app01-6680	52	7	the	the	DET
app01-6680	52	8	metal	metal	NOUN
app01-6680	52	9	tial	tial	NOUN
app01-6680	52	10	are	be	AUX
app01-6680	52	11	significantly	significantly	ADV
app01-6680	52	12	lower	low	ADJ
app01-6680	52	13	than	than	ADP
app01-6680	52	14	the	the	DET
app01-6680	52	15	ones	one	NOUN
app01-6680	52	16	of	of	ADP
app01-6680	52	17	nitride	nitride	ADJ
app01-6680	52	18	tialn	tialn	NOUN
app01-6680	52	19	.	.	PUNCT
app01-6680	53	1	by	by	ADP
app01-6680	53	2	postulating	postulate	VERB
app01-6680	53	3	the	the	DET
app01-6680	53	4	poisson	poisson	NOUN
app01-6680	53	5	’s	’s	PART
app01-6680	53	6	ratio	ratio	NOUN
app01-6680	53	7	as	as	SCONJ
app01-6680	53	8	known	know	VERB
app01-6680	53	9	,	,	PUNCT
app01-6680	53	10	the	the	DET
app01-6680	53	11	elastic	elastic	ADJ
app01-6680	53	12	properties	property	NOUN
app01-6680	53	13	of	of	ADP
app01-6680	53	14	the	the	DET
app01-6680	53	15	monolayer	monolayer	NOUN
app01-6680	53	16	films	film	NOUN
app01-6680	53	17	can	can	AUX
app01-6680	53	18	be	be	AUX
app01-6680	53	19	deduced	deduce	VERB
app01-6680	53	20	from	from	ADP
app01-6680	53	21	the	the	DET
app01-6680	53	22	experimental	experimental	ADJ
app01-6680	53	23	data	datum	NOUN
app01-6680	53	24	.	.	PUNCT
app01-6680	54	1	then	then	ADV
app01-6680	54	2	,	,	PUNCT
app01-6680	54	3	plastic	plastic	ADJ
app01-6680	54	4	parameters	parameter	NOUN
app01-6680	54	5	were	be	AUX
app01-6680	54	6	numerically	numerically	ADV
app01-6680	54	7	deduced	deduce	VERB
app01-6680	54	8	from	from	ADP
app01-6680	54	9	the	the	DET
app01-6680	54	10	optimisation	optimisation	NOUN
app01-6680	54	11	approach	approach	NOUN
app01-6680	54	12	described	describe	VERB
app01-6680	54	13	in	in	ADP
app01-6680	54	14	method	method	NOUN
app01-6680	54	15	section	section	NOUN
app01-6680	54	16	.	.	PUNCT
app01-6680	55	1	results	result	NOUN
app01-6680	55	2	are	be	AUX
app01-6680	55	3	presented	present	VERB
app01-6680	55	4	in	in	ADP
app01-6680	55	5	table	table	NOUN
app01-6680	55	6	2	2	NUM
app01-6680	55	7	.	.	PUNCT
app01-6680	56	1	the	the	DET
app01-6680	56	2	comparison	comparison	NOUN
app01-6680	56	3	of	of	ADP
app01-6680	56	4	the	the	DET
app01-6680	56	5	experimental	experimental	ADJ
app01-6680	56	6	and	and	CCONJ
app01-6680	56	7	model	model	NOUN
app01-6680	56	8	indentation	indentation	NOUN
app01-6680	56	9	load	load	NOUN
app01-6680	56	10	curves	curve	NOUN
app01-6680	56	11	are	be	AUX
app01-6680	56	12	plotted	plot	VERB
app01-6680	56	13	in	in	ADP
app01-6680	56	14	figure	figure	NOUN
app01-6680	56	15	2	2	NUM
app01-6680	56	16	and	and	CCONJ
app01-6680	56	17	show	show	VERB
app01-6680	56	18	a	a	DET
app01-6680	56	19	good	good	ADJ
app01-6680	56	20	agreement	agreement	NOUN
app01-6680	56	21	.	.	PUNCT
app01-6680	57	1	3.2	3.2	NUM
app01-6680	57	2	.	.	PUNCT
app01-6680	57	3	simulation	simulation	NOUN
app01-6680	57	4	of	of	ADP
app01-6680	57	5	(	(	PUNCT
app01-6680	57	6	tial	tial	ADJ
app01-6680	57	7	/	/	SYM
app01-6680	57	8	tialn)n	tialn)n	NOUN
app01-6680	57	9	multilayer	multilayer	ADJ
app01-6680	57	10	films	film	NOUN
app01-6680	57	11	with	with	ADP
app01-6680	57	12	perfect	perfect	ADJ
app01-6680	57	13	interfaces	interface	NOUN
app01-6680	57	14	all	all	DET
app01-6680	57	15	the	the	DET
app01-6680	57	16	experimental	experimental	ADJ
app01-6680	57	17	data	datum	NOUN
app01-6680	57	18	of	of	ADP
app01-6680	57	19	the	the	DET
app01-6680	57	20	indentation	indentation	NOUN
app01-6680	57	21	tests	test	NOUN
app01-6680	57	22	performed	perform	VERB
app01-6680	57	23	on	on	ADP
app01-6680	57	24	the	the	DET
app01-6680	57	25	multilayer	multilayer	NOUN
app01-6680	57	26	(	(	PUNCT
app01-6680	57	27	tial	tial	ADJ
app01-6680	57	28	/	/	SYM
app01-6680	57	29	tialn)n	tialn)n	NOUN
app01-6680	57	30	films	film	NOUN
app01-6680	57	31	have	have	AUX
app01-6680	57	32	already	already	ADV
app01-6680	57	33	been	be	AUX
app01-6680	57	34	published	publish	VERB
app01-6680	57	35	elsewhere	elsewhere	ADV
app01-6680	57	36	[	[	X
app01-6680	57	37	1	1	NUM
app01-6680	57	38	]	]	PUNCT
app01-6680	57	39	.	.	PUNCT
app01-6680	58	1	interesting	interesting	ADJ
app01-6680	58	2	observation	observation	NOUN
app01-6680	58	3	is	be	AUX
app01-6680	58	4	that	that	SCONJ
app01-6680	58	5	both	both	CCONJ
app01-6680	58	6	the	the	DET
app01-6680	58	7	hardness	hardness	NOUN
app01-6680	58	8	and	and	CCONJ
app01-6680	58	9	the	the	DET
app01-6680	58	10	elastic	elastic	ADJ
app01-6680	58	11	modulus	modulus	NOUN
app01-6680	58	12	of	of	ADP
app01-6680	58	13	the	the	DET
app01-6680	58	14	multilayer	multilayer	ADJ
app01-6680	58	15	films	film	NOUN
app01-6680	58	16	follow	follow	VERB
app01-6680	58	17	a	a	DET
app01-6680	58	18	hall	hall	NOUN
app01-6680	58	19	and	and	CCONJ
app01-6680	58	20	petch	petch	PROPN
app01-6680	58	21	law	law	PROPN
app01-6680	58	22	as	as	SCONJ
app01-6680	58	23	the	the	DET
app01-6680	58	24	values	value	NOUN
app01-6680	58	25	linearly	linearly	ADV
app01-6680	58	26	increase	increase	VERB
app01-6680	58	27	as	as	ADP
app01-6680	58	28	a	a	DET
app01-6680	58	29	function	function	NOUN
app01-6680	58	30	of	of	ADP
app01-6680	58	31	1/	1/	NUM
app01-6680	58	32	√	√	PROPN
app01-6680	58	33	λ	λ	PROPN
app01-6680	58	34	.	.	PUNCT
app01-6680	59	1	in	in	ADP
app01-6680	59	2	a	a	DET
app01-6680	59	3	first	first	ADJ
app01-6680	59	4	approach	approach	NOUN
app01-6680	59	5	,	,	PUNCT
app01-6680	59	6	the	the	DET
app01-6680	59	7	multilayer	multilayer	ADJ
app01-6680	59	8	film	film	NOUN
app01-6680	59	9	was	be	AUX
app01-6680	59	10	modelled	model	VERB
app01-6680	59	11	as	as	ADP
app01-6680	59	12	a	a	DET
app01-6680	59	13	stacking	stacking	NOUN
app01-6680	59	14	of	of	ADP
app01-6680	59	15	nanolayers	nanolayer	NOUN
app01-6680	59	16	of	of	ADP
app01-6680	59	17	tial	tial	NOUN
app01-6680	59	18	and	and	CCONJ
app01-6680	59	19	tialn	tialn	NOUN
app01-6680	59	20	with	with	ADP
app01-6680	59	21	a	a	DET
app01-6680	59	22	perfect	perfect	ADJ
app01-6680	59	23	interface	interface	NOUN
app01-6680	59	24	without	without	ADP
app01-6680	59	25	thickness	thickness	NOUN
app01-6680	59	26	as	as	SCONJ
app01-6680	59	27	showed	show	VERB
app01-6680	59	28	in	in	ADP
app01-6680	59	29	figure	figure	NOUN
app01-6680	59	30	3.a	3.a	NUM
app01-6680	59	31	.	.	PUNCT
app01-6680	60	1	the	the	DET
app01-6680	60	2	model	model	NOUN
app01-6680	60	3	was	be	AUX
app01-6680	60	4	set	set	VERB
app01-6680	60	5	for	for	ADP
app01-6680	60	6	each	each	DET
app01-6680	60	7	80	80	NUM
app01-6680	60	8	vol	vol	NOUN
app01-6680	60	9	.	.	PUNCT
app01-6680	61	1	27/2020	27/2020	NUM
app01-6680	61	2	young	young	ADJ
app01-6680	61	3	modulus	modulus	ADJ
app01-6680	61	4	poisson	poisson	NOUN
app01-6680	61	5	ratio	ratio	NOUN
app01-6680	61	6	yield	yield	VERB
app01-6680	61	7	stress	stress	NOUN
app01-6680	61	8	linear	linear	ADJ
app01-6680	61	9	hardening	harden	VERB
app01-6680	61	10	(	(	PUNCT
app01-6680	61	11	gpa	gpa	PROPN
app01-6680	61	12	)	)	PUNCT
app01-6680	61	13	(	(	PUNCT
app01-6680	61	14	gpa	gpa	PROPN
app01-6680	61	15	)	)	PUNCT
app01-6680	61	16	(	(	PUNCT
app01-6680	61	17	gpa	gpa	PROPN
app01-6680	61	18	)	)	PUNCT
app01-6680	61	19	tial	tial	NOUN
app01-6680	61	20	199	199	NUM
app01-6680	61	21	0.25	0.25	NUM
app01-6680	61	22	0.88	0.88	NUM
app01-6680	61	23	56.6	56.6	NUM
app01-6680	61	24	tialn	tialn	NOUN
app01-6680	61	25	417	417	NUM
app01-6680	61	26	0.21	0.21	NUM
app01-6680	61	27	5.70	5.70	NUM
app01-6680	61	28	405.0	405.0	NUM
app01-6680	61	29	table	table	NOUN
app01-6680	61	30	2	2	NUM
app01-6680	61	31	.	.	PUNCT
app01-6680	61	32	elastoplastic	elastoplastic	ADJ
app01-6680	61	33	parameters	parameter	NOUN
app01-6680	61	34	of	of	ADP
app01-6680	61	35	the	the	DET
app01-6680	61	36	metal	metal	NOUN
app01-6680	61	37	tial	tial	NOUN
app01-6680	61	38	and	and	CCONJ
app01-6680	61	39	the	the	DET
app01-6680	61	40	nitride	nitride	ADJ
app01-6680	61	41	tialn	tialn	NOUN
app01-6680	61	42	.	.	PUNCT
app01-6680	62	1	figure	figure	NOUN
app01-6680	62	2	2	2	NUM
app01-6680	62	3	.	.	PUNCT
app01-6680	63	1	loading	loading	NOUN
app01-6680	63	2	indentation	indentation	NOUN
app01-6680	63	3	curves	curve	NOUN
app01-6680	63	4	(	(	PUNCT
app01-6680	63	5	p	p	NOUN
app01-6680	63	6	-	-	PUNCT
app01-6680	63	7	h	h	NOUN
app01-6680	63	8	)	)	PUNCT
app01-6680	63	9	of	of	ADP
app01-6680	63	10	(	(	PUNCT
app01-6680	63	11	a	a	PRON
app01-6680	63	12	)	)	PUNCT
app01-6680	63	13	tial	tial	NOUN
app01-6680	63	14	and	and	CCONJ
app01-6680	63	15	(	(	PUNCT
app01-6680	63	16	b	b	NOUN
app01-6680	63	17	)	)	PUNCT
app01-6680	63	18	tialn	tialn	NOUN
app01-6680	63	19	monolayers	monolayer	NOUN
app01-6680	63	20	.	.	PUNCT
app01-6680	64	1	figure	figure	VERB
app01-6680	64	2	3	3	NUM
app01-6680	64	3	.	.	PUNCT
app01-6680	64	4	modelling	modelling	NOUN
app01-6680	64	5	of	of	ADP
app01-6680	64	6	multilayer	multilayer	ADJ
app01-6680	64	7	films	film	NOUN
app01-6680	64	8	,	,	PUNCT
app01-6680	64	9	(	(	PUNCT
app01-6680	64	10	a	a	X
app01-6680	64	11	)	)	PUNCT
app01-6680	64	12	with	with	ADP
app01-6680	64	13	perfect	perfect	ADJ
app01-6680	64	14	interfaces	interface	NOUN
app01-6680	64	15	(	(	PUNCT
app01-6680	64	16	b	b	NOUN
app01-6680	64	17	)	)	PUNCT
app01-6680	64	18	with	with	ADP
app01-6680	64	19	a	a	DET
app01-6680	64	20	transition	transition	NOUN
app01-6680	64	21	layer	layer	NOUN
app01-6680	64	22	.	.	PUNCT
app01-6680	65	1	figure	figure	VERB
app01-6680	65	2	4	4	NUM
app01-6680	65	3	.	.	NOUN
app01-6680	66	1	comparison	comparison	NOUN
app01-6680	66	2	of	of	ADP
app01-6680	66	3	the	the	DET
app01-6680	66	4	(	(	PUNCT
app01-6680	66	5	p	p	NOUN
app01-6680	66	6	-	-	PUNCT
app01-6680	66	7	h	h	NOUN
app01-6680	66	8	)	)	PUNCT
app01-6680	66	9	experimental	experimental	ADJ
app01-6680	66	10	and	and	CCONJ
app01-6680	66	11	simulated	simulated	ADJ
app01-6680	66	12	curves	curve	NOUN
app01-6680	66	13	for	for	ADP
app01-6680	66	14	λ	λ	NOUN
app01-6680	66	15	=	=	SYM
app01-6680	66	16	10	10	NUM
app01-6680	66	17	,	,	PUNCT
app01-6680	66	18	16	16	NUM
app01-6680	66	19	and	and	CCONJ
app01-6680	66	20	50	50	NUM
app01-6680	66	21	nm	nm	NOUN
app01-6680	66	22	with	with	ADP
app01-6680	66	23	a	a	DET
app01-6680	66	24	perfect	perfect	ADJ
app01-6680	66	25	interface	interface	NOUN
app01-6680	66	26	between	between	ADP
app01-6680	66	27	tial	tial	ADJ
app01-6680	66	28	and	and	CCONJ
app01-6680	66	29	tialn	tialn	NOUN
app01-6680	66	30	nanolayers	nanolayer	NOUN
app01-6680	66	31	.	.	PUNCT
app01-6680	67	1	stacking	stack	VERB
app01-6680	67	2	period	period	NOUN
app01-6680	67	3	λ	λ	X
app01-6680	67	4	=	=	NOUN
app01-6680	67	5	10	10	NUM
app01-6680	67	6	,	,	PUNCT
app01-6680	67	7	16	16	NUM
app01-6680	67	8	and	and	CCONJ
app01-6680	67	9	50	50	NUM
app01-6680	67	10	nm	nm	NOUN
app01-6680	67	11	.	.	PUNCT
app01-6680	68	1	a	a	DET
app01-6680	68	2	convergence	convergence	NOUN
app01-6680	68	3	study	study	NOUN
app01-6680	68	4	was	be	AUX
app01-6680	68	5	carried	carry	VERB
app01-6680	68	6	out	out	ADP
app01-6680	68	7	with	with	ADP
app01-6680	68	8	1	1	NUM
app01-6680	68	9	,	,	PUNCT
app01-6680	68	10	2	2	NUM
app01-6680	68	11	or	or	CCONJ
app01-6680	68	12	3	3	NUM
app01-6680	68	13	elements	element	NOUN
app01-6680	68	14	in	in	ADP
app01-6680	68	15	the	the	DET
app01-6680	68	16	thickness	thickness	NOUN
app01-6680	68	17	of	of	ADP
app01-6680	68	18	the	the	DET
app01-6680	68	19	nanolayers	nanolayer	NOUN
app01-6680	68	20	.	.	PUNCT
app01-6680	69	1	since	since	SCONJ
app01-6680	69	2	the	the	DET
app01-6680	69	3	relative	relative	ADJ
app01-6680	69	4	variation	variation	NOUN
app01-6680	69	5	of	of	ADP
app01-6680	69	6	the	the	DET
app01-6680	69	7	load	load	NOUN
app01-6680	69	8	is	be	AUX
app01-6680	69	9	less	less	ADJ
app01-6680	69	10	than	than	ADP
app01-6680	69	11	0.5	0.5	NUM
app01-6680	69	12	%	%	NOUN
app01-6680	69	13	,	,	PUNCT
app01-6680	69	14	only	only	ADV
app01-6680	69	15	one	one	NUM
app01-6680	69	16	element	element	NOUN
app01-6680	69	17	,	,	PUNCT
app01-6680	69	18	with	with	ADP
app01-6680	69	19	a	a	DET
app01-6680	69	20	λ/2	λ/2	NUM
app01-6680	69	21	size	size	NOUN
app01-6680	69	22	,	,	PUNCT
app01-6680	69	23	was	be	AUX
app01-6680	69	24	finally	finally	ADV
app01-6680	69	25	used	use	VERB
app01-6680	69	26	in	in	ADP
app01-6680	69	27	the	the	DET
app01-6680	69	28	thickness	thickness	NOUN
app01-6680	69	29	(	(	PUNCT
app01-6680	69	30	figure	figure	NOUN
app01-6680	69	31	3.a	3.a	NUM
app01-6680	69	32	)	)	PUNCT
app01-6680	69	33	,	,	PUNCT
app01-6680	69	34	in	in	ADP
app01-6680	69	35	order	order	NOUN
app01-6680	69	36	to	to	PART
app01-6680	69	37	minimise	minimise	VERB
app01-6680	69	38	the	the	DET
app01-6680	69	39	calculation	calculation	NOUN
app01-6680	69	40	time	time	NOUN
app01-6680	69	41	.	.	PUNCT
app01-6680	70	1	results	result	NOUN
app01-6680	70	2	of	of	ADP
app01-6680	70	3	the	the	PRON
app01-6680	70	4	as	as	ADV
app01-6680	70	5	simulated	simulate	VERB
app01-6680	70	6	(	(	PUNCT
app01-6680	70	7	p	p	NOUN
app01-6680	70	8	-	-	PUNCT
app01-6680	70	9	h	h	NOUN
app01-6680	70	10	)	)	PUNCT
app01-6680	70	11	curves	curve	NOUN
app01-6680	70	12	are	be	AUX
app01-6680	70	13	plotted	plot	VERB
app01-6680	70	14	on	on	ADP
app01-6680	70	15	figure	figure	NOUN
app01-6680	70	16	4	4	NUM
app01-6680	70	17	.	.	PUNCT
app01-6680	70	18	for	for	ADP
app01-6680	70	19	the	the	DET
app01-6680	70	20	largest	large	ADJ
app01-6680	70	21	period	period	NOUN
app01-6680	70	22	λ	λ	NOUN
app01-6680	70	23	=	=	NOUN
app01-6680	70	24	50	50	NUM
app01-6680	70	25	nm	nm	NOUN
app01-6680	70	26	,	,	PUNCT
app01-6680	70	27	the	the	DET
app01-6680	70	28	model	model	NOUN
app01-6680	70	29	is	be	AUX
app01-6680	70	30	in	in	ADP
app01-6680	70	31	good	good	ADJ
app01-6680	70	32	agreement	agreement	NOUN
app01-6680	70	33	with	with	ADP
app01-6680	70	34	the	the	DET
app01-6680	70	35	experience	experience	NOUN
app01-6680	70	36	.	.	PUNCT
app01-6680	71	1	furthermore	furthermore	ADV
app01-6680	71	2	,	,	PUNCT
app01-6680	71	3	the	the	DET
app01-6680	71	4	gap	gap	NOUN
app01-6680	71	5	between	between	ADP
app01-6680	71	6	the	the	DET
app01-6680	71	7	experimental	experimental	ADJ
app01-6680	71	8	curves	curve	NOUN
app01-6680	71	9	and	and	CCONJ
app01-6680	71	10	the	the	DET
app01-6680	71	11	simulated	simulate	VERB
app01-6680	71	12	ones	one	NOUN
app01-6680	71	13	increases	increase	VERB
app01-6680	71	14	when	when	SCONJ
app01-6680	71	15	the	the	DET
app01-6680	71	16	period	period	NOUN
app01-6680	71	17	decreases	decrease	VERB
app01-6680	71	18	to	to	PART
app01-6680	71	19	become	become	VERB
app01-6680	71	20	important	important	ADJ
app01-6680	71	21	for	for	ADP
app01-6680	71	22	the	the	DET
app01-6680	71	23	smallest	small	ADJ
app01-6680	71	24	period	period	NOUN
app01-6680	71	25	.	.	PUNCT
app01-6680	72	1	therefore	therefore	ADV
app01-6680	72	2	,	,	PUNCT
app01-6680	72	3	the	the	DET
app01-6680	72	4	phenomenon	phenomenon	NOUN
app01-6680	72	5	that	that	PRON
app01-6680	72	6	generates	generate	VERB
app01-6680	72	7	an	an	DET
app01-6680	72	8	increase	increase	NOUN
app01-6680	72	9	in	in	ADP
app01-6680	72	10	hardness	hardness	NOUN
app01-6680	72	11	when	when	SCONJ
app01-6680	72	12	period	period	NOUN
app01-6680	72	13	decreases	decrease	NOUN
app01-6680	72	14	is	be	AUX
app01-6680	72	15	not	not	PART
app01-6680	72	16	taken	take	VERB
app01-6680	72	17	into	into	ADP
app01-6680	72	18	81	81	NUM
app01-6680	72	19	m.	m.	NOUN
app01-6680	72	20	zaoui	zaoui	PROPN
app01-6680	72	21	,	,	PUNCT
app01-6680	72	22	a.	a.	NOUN
app01-6680	72	23	bourceret	bourceret	NOUN
app01-6680	72	24	,	,	PUNCT
app01-6680	72	25	y.	y.	PROPN
app01-6680	72	26	gaillard	gaillard	PROPN
app01-6680	72	27	et	et	PROPN
app01-6680	73	1	al	al	PROPN
app01-6680	73	2	.	.	PROPN
app01-6680	73	3	acta	acta	PROPN
app01-6680	73	4	polytechnica	polytechnica	PROPN
app01-6680	73	5	figure	figure	NOUN
app01-6680	73	6	5	5	NUM
app01-6680	73	7	.	.	PUNCT
app01-6680	74	1	for	for	ADP
app01-6680	74	2	λ	λ	PROPN
app01-6680	74	3	=	=	SYM
app01-6680	74	4	10	10	NUM
app01-6680	74	5	nm	nm	PROPN
app01-6680	74	6	,	,	PUNCT
app01-6680	74	7	(	(	PUNCT
app01-6680	74	8	a	a	X
app01-6680	74	9	)	)	PUNCT
app01-6680	74	10	comparison	comparison	NOUN
app01-6680	74	11	of	of	ADP
app01-6680	74	12	the	the	DET
app01-6680	74	13	(	(	PUNCT
app01-6680	74	14	p	p	NOUN
app01-6680	74	15	-	-	PUNCT
app01-6680	74	16	h	h	NOUN
app01-6680	74	17	)	)	PUNCT
app01-6680	74	18	experimental	experimental	ADJ
app01-6680	74	19	and	and	CCONJ
app01-6680	74	20	simulated	simulated	ADJ
app01-6680	74	21	curves	curve	NOUN
app01-6680	74	22	with	with	ADP
app01-6680	74	23	a	a	DET
app01-6680	74	24	transition	transition	NOUN
app01-6680	74	25	layer	layer	NOUN
app01-6680	74	26	,	,	PUNCT
app01-6680	74	27	(	(	PUNCT
app01-6680	74	28	b	b	X
app01-6680	74	29	)	)	PUNCT
app01-6680	74	30	eels	eel	NOUN
app01-6680	74	31	results	result	NOUN
app01-6680	74	32	.	.	PUNCT
app01-6680	75	1	account	account	NOUN
app01-6680	75	2	in	in	ADP
app01-6680	75	3	the	the	DET
app01-6680	75	4	coating	coating	NOUN
app01-6680	75	5	model	model	NOUN
app01-6680	75	6	without	without	ADP
app01-6680	75	7	interfaces	interface	NOUN
app01-6680	75	8	.	.	PUNCT
app01-6680	76	1	3.3	3.3	NUM
app01-6680	76	2	.	.	PUNCT
app01-6680	76	3	simulation	simulation	NOUN
app01-6680	76	4	of	of	ADP
app01-6680	76	5	(	(	PUNCT
app01-6680	76	6	tial	tial	ADJ
app01-6680	76	7	/	/	SYM
app01-6680	76	8	tialn)n	tialn)n	NOUN
app01-6680	76	9	multilayer	multilayer	ADJ
app01-6680	76	10	films	film	NOUN
app01-6680	76	11	with	with	ADP
app01-6680	76	12	a	a	DET
app01-6680	76	13	transition	transition	NOUN
app01-6680	76	14	layer	layer	NOUN
app01-6680	76	15	in	in	ADP
app01-6680	76	16	the	the	DET
app01-6680	76	17	stacking	stacking	NOUN
app01-6680	76	18	,	,	PUNCT
app01-6680	76	19	between	between	ADP
app01-6680	76	20	each	each	DET
app01-6680	76	21	nanolayer	nanolayer	NOUN
app01-6680	76	22	of	of	ADP
app01-6680	76	23	tial	tial	ADJ
app01-6680	76	24	and	and	CCONJ
app01-6680	76	25	tialn	tialn	NOUN
app01-6680	76	26	,	,	PUNCT
app01-6680	76	27	a	a	DET
app01-6680	76	28	transition	transition	NOUN
app01-6680	76	29	layer	layer	NOUN
app01-6680	76	30	was	be	AUX
app01-6680	76	31	added	add	VERB
app01-6680	76	32	(	(	PUNCT
app01-6680	76	33	figure	figure	NOUN
app01-6680	76	34	3.b	3.b	NUM
app01-6680	76	35	.	.	PUNCT
app01-6680	76	36	)	)	PUNCT
app01-6680	76	37	.	.	PUNCT
app01-6680	77	1	for	for	ADP
app01-6680	77	2	this	this	DET
app01-6680	77	3	transition	transition	NOUN
app01-6680	77	4	layer	layer	NOUN
app01-6680	77	5	,	,	PUNCT
app01-6680	77	6	an	an	DET
app01-6680	77	7	elastoplastic	elastoplastic	ADJ
app01-6680	77	8	metal	metal	NOUN
app01-6680	77	9	/	/	SYM
app01-6680	77	10	ceramic	ceramic	ADJ
app01-6680	77	11	medium	medium	NOUN
app01-6680	77	12	behaviour	behaviour	NOUN
app01-6680	77	13	was	be	AUX
app01-6680	77	14	considered	consider	VERB
app01-6680	77	15	.	.	PUNCT
app01-6680	78	1	each	each	DET
app01-6680	78	2	elastoplastic	elastoplastic	ADJ
app01-6680	78	3	parameter	parameter	NOUN
app01-6680	78	4	of	of	ADP
app01-6680	78	5	the	the	DET
app01-6680	78	6	transition	transition	NOUN
app01-6680	78	7	layer	layer	NOUN
app01-6680	78	8	was	be	AUX
app01-6680	78	9	assumed	assume	VERB
app01-6680	78	10	to	to	PART
app01-6680	78	11	be	be	AUX
app01-6680	78	12	an	an	DET
app01-6680	78	13	average	average	ADJ
app01-6680	78	14	(	(	PUNCT
app01-6680	78	15	mixture	mixture	NOUN
app01-6680	78	16	law	law	NOUN
app01-6680	78	17	50/50	50/50	NUM
app01-6680	78	18	)	)	PUNCT
app01-6680	78	19	of	of	ADP
app01-6680	78	20	the	the	DET
app01-6680	78	21	parameters	parameter	NOUN
app01-6680	78	22	of	of	ADP
app01-6680	78	23	the	the	DET
app01-6680	78	24	tial	tial	ADJ
app01-6680	78	25	and	and	CCONJ
app01-6680	78	26	tialn	tialn	NOUN
app01-6680	78	27	nanolayers	nanolayer	NOUN
app01-6680	78	28	.	.	PUNCT
app01-6680	79	1	the	the	DET
app01-6680	79	2	thickness	thickness	NOUN
app01-6680	79	3	of	of	ADP
app01-6680	79	4	this	this	DET
app01-6680	79	5	transition	transition	NOUN
app01-6680	79	6	layer	layer	NOUN
app01-6680	79	7	was	be	AUX
app01-6680	79	8	optimised	optimise	VERB
app01-6680	79	9	by	by	ADP
app01-6680	79	10	minimising	minimise	VERB
app01-6680	79	11	the	the	DET
app01-6680	79	12	gap	gap	NOUN
app01-6680	79	13	between	between	ADP
app01-6680	79	14	experimental	experimental	ADJ
app01-6680	79	15	and	and	CCONJ
app01-6680	79	16	simulated	simulated	ADJ
app01-6680	79	17	data	datum	NOUN
app01-6680	79	18	as	as	SCONJ
app01-6680	79	19	previously	previously	ADV
app01-6680	79	20	described	describe	VERB
app01-6680	79	21	.	.	PUNCT
app01-6680	80	1	result	result	NOUN
app01-6680	80	2	of	of	ADP
app01-6680	80	3	the	the	DET
app01-6680	80	4	simulated	simulate	VERB
app01-6680	80	5	(	(	PUNCT
app01-6680	80	6	p	p	NOUN
app01-6680	80	7	-	-	PUNCT
app01-6680	80	8	h	h	NOUN
app01-6680	80	9	)	)	PUNCT
app01-6680	80	10	curve	curve	NOUN
app01-6680	80	11	with	with	ADP
app01-6680	80	12	a	a	DET
app01-6680	80	13	transition	transition	NOUN
app01-6680	80	14	layer	layer	NOUN
app01-6680	80	15	is	be	AUX
app01-6680	80	16	plotted	plot	VERB
app01-6680	80	17	on	on	ADP
app01-6680	80	18	figure	figure	NOUN
app01-6680	80	19	5.a	5.a	NUM
app01-6680	80	20	and	and	CCONJ
app01-6680	80	21	show	show	VERB
app01-6680	80	22	a	a	DET
app01-6680	80	23	good	good	ADJ
app01-6680	80	24	agreement	agreement	NOUN
app01-6680	80	25	between	between	ADP
app01-6680	80	26	experimental	experimental	ADJ
app01-6680	80	27	and	and	CCONJ
app01-6680	80	28	simulated	simulated	ADJ
app01-6680	80	29	curves	curve	NOUN
app01-6680	80	30	for	for	ADP
app01-6680	80	31	the	the	DET
app01-6680	80	32	lowest	low	ADJ
app01-6680	80	33	period	period	NOUN
app01-6680	80	34	.	.	PUNCT
app01-6680	81	1	for	for	ADP
app01-6680	81	2	λ	λ	PROPN
app01-6680	81	3	=	=	SYM
app01-6680	81	4	10	10	NUM
app01-6680	81	5	nm	nm	PROPN
app01-6680	81	6	,	,	PUNCT
app01-6680	81	7	the	the	DET
app01-6680	81	8	simulated	simulate	VERB
app01-6680	81	9	thickness	thickness	NOUN
app01-6680	81	10	of	of	ADP
app01-6680	81	11	the	the	DET
app01-6680	81	12	transition	transition	NOUN
app01-6680	81	13	layer	layer	NOUN
app01-6680	81	14	,	,	PUNCT
app01-6680	81	15	eptr	eptr	NOUN
app01-6680	81	16	=	=	PROPN
app01-6680	81	17	2.12	2.12	NUM
app01-6680	81	18	nm	nm	NOUN
app01-6680	81	19	,	,	PUNCT
app01-6680	81	20	is	be	AUX
app01-6680	81	21	close	close	ADJ
app01-6680	81	22	to	to	ADP
app01-6680	81	23	the	the	DET
app01-6680	81	24	one	one	NUM
app01-6680	81	25	of	of	ADP
app01-6680	81	26	tial	tial	ADJ
app01-6680	81	27	and	and	CCONJ
app01-6680	81	28	tialn	tialn	NOUN
app01-6680	81	29	layers	layer	NOUN
app01-6680	81	30	.	.	PUNCT
app01-6680	82	1	this	this	DET
app01-6680	82	2	result	result	NOUN
app01-6680	82	3	is	be	AUX
app01-6680	82	4	in	in	ADP
app01-6680	82	5	very	very	ADV
app01-6680	82	6	good	good	ADJ
app01-6680	82	7	agreement	agreement	NOUN
app01-6680	82	8	with	with	ADP
app01-6680	82	9	the	the	DET
app01-6680	82	10	thickness	thickness	NOUN
app01-6680	82	11	of	of	ADP
app01-6680	82	12	interfaces	interface	NOUN
app01-6680	82	13	observed	observe	VERB
app01-6680	82	14	between	between	ADP
app01-6680	82	15	tial	tial	ADJ
app01-6680	82	16	and	and	CCONJ
app01-6680	82	17	tialn	tialn	NOUN
app01-6680	82	18	layers	layer	NOUN
app01-6680	82	19	evaluated	evaluate	VERB
app01-6680	82	20	by	by	ADP
app01-6680	82	21	electron	electron	NOUN
app01-6680	82	22	energy	energy	NOUN
app01-6680	82	23	-	-	PUNCT
app01-6680	82	24	loss	loss	NOUN
app01-6680	82	25	spectroscopy	spectroscopy	NOUN
app01-6680	82	26	(	(	PUNCT
app01-6680	82	27	figure	figure	NOUN
app01-6680	82	28	5.b	5.b	NUM
app01-6680	82	29	)	)	PUNCT
app01-6680	82	30	.	.	PUNCT
app01-6680	83	1	4	4	X
app01-6680	83	2	.	.	X
app01-6680	83	3	conclusion	conclusion	VERB
app01-6680	83	4	the	the	DET
app01-6680	83	5	elastoplastic	elastoplastic	ADJ
app01-6680	83	6	properties	property	NOUN
app01-6680	83	7	of	of	ADP
app01-6680	83	8	ti0.54al0.46	ti0.54al0.46	NOUN
app01-6680	83	9	metal	metal	NOUN
app01-6680	83	10	and	and	CCONJ
app01-6680	83	11	ti0.54al0.46n	ti0.54al0.46n	VERB
app01-6680	83	12	ceramic	ceramic	ADJ
app01-6680	83	13	monolayers	monolayer	NOUN
app01-6680	83	14	were	be	AUX
app01-6680	83	15	identified	identify	VERB
app01-6680	83	16	by	by	ADP
app01-6680	83	17	comparison	comparison	NOUN
app01-6680	83	18	of	of	ADP
app01-6680	83	19	berkovich	berkovich	NOUN
app01-6680	83	20	nanoindentation	nanoindentation	NOUN
app01-6680	83	21	experimental	experimental	ADJ
app01-6680	83	22	data	datum	NOUN
app01-6680	83	23	and	and	CCONJ
app01-6680	83	24	2d	2d	NOUN
app01-6680	83	25	axisymmetric	axisymmetric	ADJ
app01-6680	83	26	finite	finite	PROPN
app01-6680	83	27	element	element	NOUN
app01-6680	83	28	simulations	simulation	NOUN
app01-6680	83	29	.	.	PUNCT
app01-6680	84	1	the	the	DET
app01-6680	84	2	mechanical	mechanical	ADJ
app01-6680	84	3	properties	property	NOUN
app01-6680	84	4	of	of	ADP
app01-6680	84	5	the	the	DET
app01-6680	84	6	monolayers	monolayer	NOUN
app01-6680	84	7	were	be	AUX
app01-6680	84	8	used	use	VERB
app01-6680	84	9	in	in	ADP
app01-6680	84	10	a	a	DET
app01-6680	84	11	multilayer	multilayer	ADJ
app01-6680	84	12	model	model	NOUN
app01-6680	84	13	to	to	PART
app01-6680	84	14	forecast	forecast	VERB
app01-6680	84	15	the	the	DET
app01-6680	84	16	mechanical	mechanical	ADJ
app01-6680	84	17	properties	property	NOUN
app01-6680	84	18	of	of	ADP
app01-6680	84	19	(	(	PUNCT
app01-6680	84	20	ti0.54al0.46	ti0.54al0.46	NOUN
app01-6680	84	21	/	/	SYM
app01-6680	84	22	ti0.54al0.46n)n	ti0.54al0.46n)n	NOUN
app01-6680	84	23	multilayer	multilayer	ADJ
app01-6680	84	24	coatings	coating	NOUN
app01-6680	84	25	,	,	PUNCT
app01-6680	84	26	with	with	ADP
app01-6680	84	27	various	various	ADJ
app01-6680	84	28	periods	period	NOUN
app01-6680	84	29	,	,	PUNCT
app01-6680	84	30	designed	design	VERB
app01-6680	84	31	by	by	ADP
app01-6680	84	32	rf	rf	VERB
app01-6680	84	33	magnetron	magnetron	NOUN
app01-6680	84	34	sputtering	sputtering	NOUN
app01-6680	84	35	using	use	VERB
app01-6680	84	36	rgpp	rgpp	NOUN
app01-6680	84	37	technique	technique	NOUN
app01-6680	84	38	.	.	PUNCT
app01-6680	85	1	the	the	DET
app01-6680	85	2	multilayer	multilayer	ADJ
app01-6680	85	3	model	model	NOUN
app01-6680	85	4	was	be	AUX
app01-6680	85	5	considered	consider	VERB
app01-6680	85	6	,	,	PUNCT
app01-6680	85	7	in	in	ADP
app01-6680	85	8	first	first	ADJ
app01-6680	85	9	hypothesis	hypothesis	NOUN
app01-6680	85	10	,	,	PUNCT
app01-6680	85	11	as	as	ADP
app01-6680	85	12	a	a	DET
app01-6680	85	13	stacking	stacking	NOUN
app01-6680	85	14	of	of	ADP
app01-6680	85	15	tialn	tialn	NOUN
app01-6680	85	16	and	and	CCONJ
app01-6680	85	17	tial	tial	ADJ
app01-6680	85	18	nanolayers	nanolayer	NOUN
app01-6680	85	19	with	with	ADP
app01-6680	85	20	equal	equal	ADJ
app01-6680	85	21	thickness	thickness	NOUN
app01-6680	85	22	and	and	CCONJ
app01-6680	85	23	perfect	perfect	ADJ
app01-6680	85	24	interface	interface	NOUN
app01-6680	85	25	.	.	PUNCT
app01-6680	86	1	that	that	DET
app01-6680	86	2	model	model	NOUN
app01-6680	86	3	allows	allow	VERB
app01-6680	86	4	to	to	PART
app01-6680	86	5	reproduce	reproduce	VERB
app01-6680	86	6	the	the	DET
app01-6680	86	7	indentation	indentation	NOUN
app01-6680	86	8	curves	curve	NOUN
app01-6680	86	9	of	of	ADP
app01-6680	86	10	the	the	DET
app01-6680	86	11	highest	high	ADJ
app01-6680	86	12	50	50	NUM
app01-6680	86	13	nm	nm	ADJ
app01-6680	86	14	period	period	NOUN
app01-6680	86	15	films	film	NOUN
app01-6680	86	16	.	.	PUNCT
app01-6680	87	1	to	to	PART
app01-6680	87	2	fit	fit	VERB
app01-6680	87	3	the	the	DET
app01-6680	87	4	experimental	experimental	ADJ
app01-6680	87	5	indentation	indentation	NOUN
app01-6680	87	6	curve	curve	NOUN
app01-6680	87	7	at	at	ADP
app01-6680	87	8	the	the	DET
app01-6680	87	9	lowest	low	ADJ
app01-6680	87	10	periods	period	NOUN
app01-6680	87	11	,	,	PUNCT
app01-6680	87	12	a	a	DET
app01-6680	87	13	transition	transition	NOUN
app01-6680	87	14	layer	layer	NOUN
app01-6680	87	15	was	be	AUX
app01-6680	87	16	introduced	introduce	VERB
app01-6680	87	17	in	in	ADP
app01-6680	87	18	the	the	DET
app01-6680	87	19	model	model	NOUN
app01-6680	87	20	between	between	ADP
app01-6680	87	21	each	each	DET
app01-6680	87	22	metal	metal	NOUN
app01-6680	87	23	/	/	SYM
app01-6680	87	24	ceramic	ceramic	ADJ
app01-6680	87	25	interface	interface	NOUN
app01-6680	87	26	.	.	PUNCT
app01-6680	88	1	using	use	VERB
app01-6680	88	2	an	an	DET
app01-6680	88	3	optimisation	optimisation	NOUN
app01-6680	88	4	process	process	NOUN
app01-6680	88	5	of	of	ADP
app01-6680	88	6	the	the	DET
app01-6680	88	7	model	model	NOUN
app01-6680	88	8	,	,	PUNCT
app01-6680	88	9	this	this	DET
app01-6680	88	10	transition	transition	NOUN
app01-6680	88	11	layer	layer	NOUN
app01-6680	88	12	was	be	AUX
app01-6680	88	13	found	find	VERB
app01-6680	88	14	to	to	PART
app01-6680	88	15	be	be	AUX
app01-6680	88	16	2.12	2.12	NUM
app01-6680	88	17	nm	nm	ADV
app01-6680	88	18	thick	thick	ADJ
app01-6680	88	19	for	for	ADP
app01-6680	88	20	the	the	DET
app01-6680	88	21	lowest	low	ADJ
app01-6680	88	22	period	period	NOUN
app01-6680	88	23	λ	λ	X
app01-6680	88	24	=	=	SYM
app01-6680	88	25	10	10	NUM
app01-6680	88	26	nm	nm	NOUN
app01-6680	88	27	,	,	PUNCT
app01-6680	88	28	which	which	PRON
app01-6680	88	29	is	be	AUX
app01-6680	88	30	in	in	ADP
app01-6680	88	31	good	good	ADJ
app01-6680	88	32	agreement	agreement	NOUN
app01-6680	88	33	with	with	ADP
app01-6680	88	34	the	the	DET
app01-6680	88	35	results	result	NOUN
app01-6680	88	36	of	of	ADP
app01-6680	88	37	electron	electron	NOUN
app01-6680	88	38	energy	energy	NOUN
app01-6680	88	39	-	-	PUNCT
app01-6680	88	40	loss	loss	NOUN
app01-6680	88	41	spectroscopy	spectroscopy	NOUN
app01-6680	88	42	experiments	experiment	NOUN
app01-6680	88	43	.	.	PUNCT
app01-6680	89	1	acknowledgements	acknowledgement	NOUN
app01-6680	89	2	this	this	DET
app01-6680	89	3	work	work	NOUN
app01-6680	89	4	was	be	AUX
app01-6680	89	5	performed	perform	VERB
app01-6680	89	6	in	in	ADP
app01-6680	89	7	the	the	DET
app01-6680	89	8	frame	frame	NOUN
app01-6680	89	9	of	of	ADP
app01-6680	89	10	the	the	DET
app01-6680	89	11	research	research	NOUN
app01-6680	89	12	project	project	NOUN
app01-6680	89	13	resem	resem	NOUN
app01-6680	89	14	2019	2019	NUM
app01-6680	89	15	,	,	PUNCT
app01-6680	89	16	managed	manage	VERB
app01-6680	89	17	by	by	ADP
app01-6680	89	18	the	the	DET
app01-6680	89	19	institut	institut	PROPN
app01-6680	89	20	de	de	PROPN
app01-6680	89	21	recherche	recherche	X
app01-6680	89	22	technologique	technologique	PROPN
app01-6680	89	23	matériaux	matériaux	PROPN
app01-6680	89	24	métallurgie	métallurgie	PROPN
app01-6680	89	25	procédés	procédés	PROPN
app01-6680	89	26	(	(	PUNCT
app01-6680	89	27	irt	irt	PROPN
app01-6680	89	28	m2p	m2p	PROPN
app01-6680	89	29	)	)	PUNCT
app01-6680	89	30	and	and	CCONJ
app01-6680	89	31	financially	financially	ADV
app01-6680	89	32	supported	support	VERB
app01-6680	89	33	by	by	ADP
app01-6680	89	34	the	the	DET
app01-6680	89	35	french	french	ADJ
app01-6680	89	36	program	program	NOUN
app01-6680	89	37	plan	plan	NOUN
app01-6680	89	38	d’investissement	d’investissement	PROPN
app01-6680	89	39	d’avenir	d’avenir	PROPN
app01-6680	89	40	(	(	PUNCT
app01-6680	89	41	pia	pia	PROPN
app01-6680	89	42	)	)	PUNCT
app01-6680	89	43	.	.	PUNCT
app01-6680	90	1	references	reference	NOUN
app01-6680	90	2	[	[	X
app01-6680	90	3	1	1	NUM
app01-6680	90	4	]	]	PUNCT
app01-6680	90	5	m.-j	m.-j	PROPN
app01-6680	90	6	.	.	PUNCT
app01-6680	91	1	pac	pac	PROPN
app01-6680	91	2	,	,	PUNCT
app01-6680	91	3	y.	y.	PROPN
app01-6680	91	4	pinot	pinot	PROPN
app01-6680	91	5	,	,	PUNCT
app01-6680	91	6	s.	s.	PROPN
app01-6680	91	7	giljean	giljean	PROPN
app01-6680	91	8	,	,	PUNCT
app01-6680	91	9	et	et	PROPN
app01-6680	91	10	al	al	PROPN
app01-6680	91	11	.	.	PROPN
app01-6680	92	1	investigation	investigation	NOUN
app01-6680	92	2	of	of	ADP
app01-6680	92	3	ti0.54al0.46	ti0.54al0.46	PROPN
app01-6680	92	4	/	/	SYM
app01-6680	92	5	ti0.54al0.46n	ti0.54al0.46n	VERB
app01-6680	92	6	multilayer	multilayer	ADJ
app01-6680	92	7	films	film	NOUN
app01-6680	92	8	deposited	deposit	VERB
app01-6680	92	9	by	by	ADP
app01-6680	92	10	reactive	reactive	ADJ
app01-6680	92	11	gas	gas	NOUN
app01-6680	92	12	pulsing	pulsing	NOUN
app01-6680	92	13	process	process	NOUN
app01-6680	92	14	by	by	ADP
app01-6680	92	15	nano	nano	NOUN
app01-6680	92	16	-	-	PUNCT
app01-6680	92	17	indentation	indentation	NOUN
app01-6680	92	18	and	and	CCONJ
app01-6680	92	19	electron	electron	NOUN
app01-6680	92	20	energy	energy	NOUN
app01-6680	92	21	-	-	PUNCT
app01-6680	92	22	loss	loss	NOUN
app01-6680	92	23	spectroscopy	spectroscopy	NOUN
app01-6680	92	24	.	.	PUNCT
app01-6680	93	1	thin	thin	ADJ
app01-6680	93	2	solid	solid	ADJ
app01-6680	93	3	films	film	NOUN
app01-6680	93	4	634:96	634:96	NUM
app01-6680	93	5	–	–	PUNCT
app01-6680	93	6	106	106	NUM
app01-6680	93	7	,	,	PUNCT
app01-6680	93	8	2017	2017	NUM
app01-6680	93	9	.	.	PUNCT
app01-6680	94	1	doi:10.1016	doi:10.1016	PROPN
app01-6680	94	2	/	/	SYM
app01-6680	94	3	j.tsf.2017.05.015	j.tsf.2017.05.015	PROPN
app01-6680	94	4	.	.	PUNCT
app01-6680	95	1	[	[	X
app01-6680	95	2	2	2	X
app01-6680	95	3	]	]	PUNCT
app01-6680	95	4	w.	w.	PROPN
app01-6680	95	5	münz	münz	PROPN
app01-6680	95	6	.	.	PUNCT
app01-6680	96	1	titanium	titanium	NOUN
app01-6680	96	2	aluminium	aluminium	NOUN
app01-6680	96	3	nitride	nitride	ADJ
app01-6680	96	4	films	film	NOUN
app01-6680	96	5	:	:	PUNCT
app01-6680	96	6	a	a	DET
app01-6680	96	7	new	new	ADJ
app01-6680	96	8	alternative	alternative	NOUN
app01-6680	96	9	to	to	ADP
app01-6680	96	10	tin	tin	NOUN
app01-6680	96	11	coatings	coating	NOUN
app01-6680	96	12	.	.	PUNCT
app01-6680	97	1	journal	journal	PROPN
app01-6680	97	2	of	of	ADP
app01-6680	97	3	vacuum	vacuum	PROPN
app01-6680	97	4	science	science	PROPN
app01-6680	97	5	&	&	CCONJ
app01-6680	97	6	technology	technology	PROPN
app01-6680	97	7	a	a	DET
app01-6680	97	8	4:2717–2725	4:2717–2725	NUM
app01-6680	97	9	,	,	PUNCT
app01-6680	97	10	1986	1986	NUM
app01-6680	97	11	.	.	PUNCT
app01-6680	98	1	doi:10.1116/1.573713	doi:10.1116/1.573713	NOUN
app01-6680	98	2	.	.	PUNCT
app01-6680	99	1	[	[	X
app01-6680	99	2	3	3	X
app01-6680	99	3	]	]	PUNCT
app01-6680	99	4	s.	s.	PROPN
app01-6680	99	5	paldey	paldey	PROPN
app01-6680	99	6	,	,	PUNCT
app01-6680	99	7	s.	s.	PROPN
app01-6680	99	8	deevi	deevi	PROPN
app01-6680	99	9	.	.	PUNCT
app01-6680	100	1	single	single	ADJ
app01-6680	100	2	layer	layer	NOUN
app01-6680	100	3	and	and	CCONJ
app01-6680	100	4	multilayer	multilayer	NOUN
app01-6680	100	5	wear	wear	VERB
app01-6680	100	6	resistant	resistant	ADJ
app01-6680	100	7	coatings	coating	NOUN
app01-6680	100	8	of	of	ADP
app01-6680	100	9	(	(	PUNCT
app01-6680	100	10	ti	ti	X
app01-6680	100	11	,	,	PUNCT
app01-6680	100	12	al)n	al)n	PROPN
app01-6680	100	13	:	:	PUNCT
app01-6680	100	14	a	a	DET
app01-6680	100	15	review	review	NOUN
app01-6680	100	16	.	.	PUNCT
app01-6680	101	1	materials	material	NOUN
app01-6680	101	2	science	science	NOUN
app01-6680	101	3	and	and	CCONJ
app01-6680	101	4	engineering	engineering	NOUN
app01-6680	101	5	:	:	PUNCT
app01-6680	101	6	a	a	DET
app01-6680	101	7	342(1):58	342(1):58	PROPN
app01-6680	101	8	–	–	PUNCT
app01-6680	101	9	79	79	NUM
app01-6680	101	10	,	,	PUNCT
app01-6680	101	11	2003	2003	NUM
app01-6680	101	12	.	.	PUNCT
app01-6680	102	1	doi:10.1016	doi:10.1016	PROPN
app01-6680	102	2	/	/	SYM
app01-6680	102	3	s0921	s0921	PROPN
app01-6680	102	4	-	-	PROPN
app01-6680	102	5	5093(02)00259	5093(02)00259	NUM
app01-6680	102	6	-	-	SYM
app01-6680	102	7	9	9	NUM
app01-6680	102	8	.	.	PUNCT
app01-6680	103	1	[	[	X
app01-6680	103	2	4	4	NUM
app01-6680	103	3	]	]	PUNCT
app01-6680	103	4	m.-j	m.-j	PROPN
app01-6680	103	5	.	.	PUNCT
app01-6680	104	1	pac	pac	PROPN
app01-6680	104	2	,	,	PUNCT
app01-6680	104	3	s.	s.	PROPN
app01-6680	104	4	giljean	giljean	PROPN
app01-6680	104	5	,	,	PUNCT
app01-6680	104	6	c.	c.	PROPN
app01-6680	104	7	rousselot	rousselot	NOUN
app01-6680	104	8	,	,	PUNCT
app01-6680	104	9	et	et	PROPN
app01-6680	104	10	al	al	PROPN
app01-6680	104	11	.	.	PROPN
app01-6680	104	12	microstructural	microstructural	PROPN
app01-6680	104	13	and	and	CCONJ
app01-6680	104	14	elasto	elasto	NOUN
app01-6680	104	15	-	-	PUNCT
app01-6680	104	16	plastic	plastic	NOUN
app01-6680	104	17	material	material	NOUN
app01-6680	104	18	parameters	parameter	NOUN
app01-6680	104	19	identification	identification	NOUN
app01-6680	104	20	by	by	ADP
app01-6680	104	21	inverse	inverse	NOUN
app01-6680	104	22	finite	finite	NOUN
app01-6680	104	23	elements	element	NOUN
app01-6680	104	24	method	method	NOUN
app01-6680	104	25	of	of	ADP
app01-6680	104	26	ti(1	ti(1	PROPN
app01-6680	104	27	-	-	NOUN
app01-6680	104	28	x)alxn	x)alxn	PROPN
app01-6680	104	29	(	(	PUNCT
app01-6680	104	30	0	0	NUM
app01-6680	104	31	<	<	NOUN
app01-6680	104	32	x<1	x<1	X
app01-6680	104	33	)	)	PUNCT
app01-6680	104	34	sputtered	sputter	VERB
app01-6680	104	35	thin	thin	ADJ
app01-6680	104	36	films	film	NOUN
app01-6680	104	37	from	from	ADP
app01-6680	104	38	berkovich	berkovich	NOUN
app01-6680	104	39	nano	nano	NOUN
app01-6680	104	40	-	-	PUNCT
app01-6680	104	41	indentation	indentation	NOUN
app01-6680	104	42	experiments	experiment	NOUN
app01-6680	104	43	.	.	PUNCT
app01-6680	105	1	thin	thin	ADJ
app01-6680	105	2	solid	solid	ADJ
app01-6680	105	3	films	film	NOUN
app01-6680	105	4	569:81	569:81	NUM
app01-6680	105	5	–	–	PUNCT
app01-6680	105	6	92	92	NUM
app01-6680	105	7	,	,	PUNCT
app01-6680	105	8	2014	2014	NUM
app01-6680	105	9	.	.	PUNCT
app01-6680	106	1	doi:10.1016	doi:10.1016	PROPN
app01-6680	106	2	/	/	SYM
app01-6680	106	3	j.tsf.2014.07.037	j.tsf.2014.07.037	PROPN
app01-6680	106	4	.	.	PUNCT
app01-6680	107	1	[	[	X
app01-6680	107	2	5	5	NUM
app01-6680	107	3	]	]	X
app01-6680	107	4	n.	n.	PROPN
app01-6680	107	5	martin	martin	PROPN
app01-6680	107	6	,	,	PUNCT
app01-6680	107	7	j.	j.	PROPN
app01-6680	107	8	lintymer	lintymer	PROPN
app01-6680	107	9	,	,	PUNCT
app01-6680	107	10	f.	f.	PROPN
app01-6680	107	11	sthal	sthal	PROPN
app01-6680	107	12	,	,	PUNCT
app01-6680	107	13	et	et	PROPN
app01-6680	107	14	al	al	PROPN
app01-6680	107	15	.	.	PROPN
app01-6680	107	16	procédé	procédé	PROPN
app01-6680	107	17	de	de	PROPN
app01-6680	107	18	pulvérisation	pulvérisation	PROPN
app01-6680	107	19	réactive	réactive	ADJ
app01-6680	107	20	à	à	X
app01-6680	107	21	signal	signal	X
app01-6680	107	22	de	de	X
app01-6680	107	23	commande	commande	PROPN
app01-6680	107	24	cyclique	cyclique	NOUN
app01-6680	107	25	et	et	PROPN
app01-6680	107	26	dispositif	dispositif	PROPN
app01-6680	107	27	correspondant	correspondant	X
app01-6680	107	28	2008	2008	NUM
app01-6680	107	29	.	.	PUNCT
app01-6680	108	1	[	[	X
app01-6680	108	2	6	6	NUM
app01-6680	108	3	]	]	PUNCT
app01-6680	108	4	k.	k.	PROPN
app01-6680	108	5	levenberg	levenberg	PROPN
app01-6680	108	6	.	.	PUNCT
app01-6680	109	1	a	a	DET
app01-6680	109	2	method	method	NOUN
app01-6680	109	3	for	for	ADP
app01-6680	109	4	the	the	DET
app01-6680	109	5	solution	solution	NOUN
app01-6680	109	6	of	of	ADP
app01-6680	109	7	certain	certain	ADJ
app01-6680	109	8	non	non	ADJ
app01-6680	109	9	-	-	ADJ
app01-6680	109	10	linear	linear	ADJ
app01-6680	109	11	problems	problem	NOUN
app01-6680	109	12	in	in	ADP
app01-6680	109	13	least	least	ADJ
app01-6680	109	14	squares	square	NOUN
app01-6680	109	15	.	.	PUNCT
app01-6680	110	1	quarterly	quarterly	ADV
app01-6680	110	2	of	of	ADP
app01-6680	110	3	applied	apply	VERB
app01-6680	110	4	mathematics	mathematic	NOUN
app01-6680	110	5	2(2):164–168	2(2):164–168	NOUN
app01-6680	110	6	,	,	PUNCT
app01-6680	110	7	1944	1944	NUM
app01-6680	110	8	.	.	PUNCT
app01-6680	111	1	82	82	NUM
app01-6680	111	2	https://doi.org/10.1016/j.tsf.2017.05.015	https://doi.org/10.1016/j.tsf.2017.05.015	PROPN
app01-6680	111	3	https://doi.org/10.1116/1.573713	https://doi.org/10.1116/1.573713	PROPN
app01-6680	111	4	https://doi.org/10.1016/s0921-5093(02)00259-9	https://doi.org/10.1016/s0921-5093(02)00259-9	PROPN
app01-6680	111	5	https://doi.org/10.1016/j.tsf.2014.07.037	https://doi.org/10.1016/j.tsf.2014.07.037	PRON
app01-6680	111	6	vol	vol	NOUN
app01-6680	111	7	.	.	PUNCT
app01-6680	112	1	27/2020	27/2020	NUM
app01-6680	113	1	[	[	X
app01-6680	113	2	7	7	NUM
app01-6680	113	3	]	]	X
app01-6680	113	4	d.	d.	PROPN
app01-6680	113	5	w.	w.	PROPN
app01-6680	113	6	marquardt	marquardt	PROPN
app01-6680	113	7	.	.	PUNCT
app01-6680	114	1	an	an	DET
app01-6680	114	2	algorithm	algorithm	NOUN
app01-6680	114	3	for	for	ADP
app01-6680	114	4	least	least	ADJ
app01-6680	114	5	-	-	PUNCT
app01-6680	114	6	squares	square	NOUN
app01-6680	114	7	estimation	estimation	NOUN
app01-6680	114	8	of	of	ADP
app01-6680	114	9	nonlinear	nonlinear	ADJ
app01-6680	114	10	parameters	parameter	NOUN
app01-6680	114	11	.	.	PUNCT
app01-6680	115	1	journal	journal	NOUN
app01-6680	115	2	of	of	ADP
app01-6680	115	3	the	the	DET
app01-6680	115	4	society	society	NOUN
app01-6680	115	5	for	for	ADP
app01-6680	115	6	industrial	industrial	ADJ
app01-6680	115	7	and	and	CCONJ
app01-6680	115	8	applied	apply	VERB
app01-6680	115	9	mathematics	mathematic	NOUN
app01-6680	115	10	11(2):431–441	11(2):431–441	NUM
app01-6680	115	11	,	,	PUNCT
app01-6680	115	12	1963	1963	NUM
app01-6680	115	13	.	.	PUNCT
app01-6680	116	1	doi:10.1137/0111030	doi:10.1137/0111030	PROPN
app01-6680	116	2	.	.	PUNCT
app01-6680	117	1	[	[	X
app01-6680	117	2	8	8	NUM
app01-6680	117	3	]	]	X
app01-6680	117	4	f.	f.	PROPN
app01-6680	117	5	richard	richard	PROPN
app01-6680	117	6	.	.	PUNCT
app01-6680	118	1	mic2	mic2	PROPN
app01-6680	118	2	m	m	PROPN
app01-6680	118	3	software	software	NOUN
app01-6680	118	4	:	:	PUNCT
app01-6680	118	5	modeling	modeling	NOUN
app01-6680	118	6	and	and	CCONJ
app01-6680	118	7	identification	identification	NOUN
app01-6680	118	8	of	of	ADP
app01-6680	118	9	the	the	DET
app01-6680	118	10	mechanical	mechanical	ADJ
app01-6680	118	11	behavior	behavior	NOUN
app01-6680	118	12	of	of	ADP
app01-6680	118	13	materials	material	NOUN
app01-6680	118	14	,	,	PUNCT
app01-6680	118	15	2000	2000	NUM
app01-6680	118	16	.	.	PUNCT
app01-6680	119	1	83	83	NUM
app01-6680	119	2	https://doi.org/10.1137/0111030	https://doi.org/10.1137/0111030	NUM
app01-6680	119	3	acta	acta	PROPN
app01-6680	119	4	polytechnica	polytechnica	PROPN
app01-6680	119	5	27(0):79–83	27(0):79–83	NUM
app01-6680	119	6	,	,	PUNCT
app01-6680	119	7	2020	2020	NUM
app01-6680	119	8	1	1	NUM
app01-6680	119	9	introduction	introduction	NOUN
app01-6680	119	10	2	2	NUM
app01-6680	119	11	materials	material	NOUN
app01-6680	119	12	and	and	CCONJ
app01-6680	119	13	methods	method	NOUN
app01-6680	119	14	3	3	NUM
app01-6680	119	15	results	result	NOUN
app01-6680	119	16	and	and	CCONJ
app01-6680	119	17	discussion	discussion	NOUN
app01-6680	119	18	3.1	3.1	NUM
app01-6680	119	19	mechanical	mechanical	ADJ
app01-6680	119	20	properties	property	NOUN
app01-6680	119	21	of	of	ADP
app01-6680	119	22	tial	tial	ADJ
app01-6680	119	23	and	and	CCONJ
app01-6680	119	24	tialn	tialn	ADJ
app01-6680	119	25	monolayers	monolayer	NOUN
app01-6680	119	26	3.2	3.2	NUM
app01-6680	119	27	simulation	simulation	NOUN
app01-6680	119	28	of	of	ADP
app01-6680	119	29	(	(	PUNCT
app01-6680	119	30	tial	tial	ADJ
app01-6680	119	31	/	/	SYM
app01-6680	119	32	tialn)n	tialn)n	NOUN
app01-6680	119	33	multilayer	multilayer	ADJ
app01-6680	119	34	films	film	NOUN
app01-6680	119	35	with	with	ADP
app01-6680	119	36	perfect	perfect	ADJ
app01-6680	119	37	interfaces	interface	NOUN
app01-6680	119	38	3.3	3.3	NUM
app01-6680	119	39	simulation	simulation	NOUN
app01-6680	119	40	of	of	ADP
app01-6680	119	41	(	(	PUNCT
app01-6680	119	42	tial	tial	ADJ
app01-6680	119	43	/	/	SYM
app01-6680	119	44	tialn)n	tialn)n	NOUN
app01-6680	119	45	multilayer	multilayer	ADJ
app01-6680	119	46	films	film	NOUN
app01-6680	119	47	with	with	ADP
app01-6680	119	48	a	a	DET
app01-6680	119	49	transition	transition	NOUN
app01-6680	119	50	layer	layer	NOUN
app01-6680	119	51	4	4	NUM
app01-6680	119	52	conclusion	conclusion	NOUN
app01-6680	119	53	acknowledgements	acknowledgement	NOUN
app01-6680	119	54	references	reference	NOUN