id	sid	tid	token	lemma	pos
app01-6686	1	1	acta	acta	PROPN
app01-6686	1	2	polytechnica	polytechnica	PROPN
app01-6686	1	3	doi:10.14311	doi:10.14311	PROPN
app01-6686	1	4	/	/	SYM
app01-6686	1	5	app.2020.27.0057	app.2020.27.0057	AUX
app01-6686	1	6	acta	acta	PROPN
app01-6686	1	7	polytechnica	polytechnica	NOUN
app01-6686	1	8	27(0):57–61	27(0):57–61	NOUN
app01-6686	1	9	,	,	PUNCT
app01-6686	1	10	2020	2020	NUM
app01-6686	1	11	©	©	PROPN
app01-6686	1	12	czech	czech	PROPN
app01-6686	1	13	technical	technical	PROPN
app01-6686	1	14	university	university	PROPN
app01-6686	1	15	in	in	ADP
app01-6686	1	16	prague	prague	PROPN
app01-6686	1	17	,	,	PUNCT
app01-6686	1	18	2020	2020	NUM
app01-6686	1	19	available	available	ADJ
app01-6686	1	20	online	online	ADV
app01-6686	1	21	at	at	ADP
app01-6686	1	22	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-6686	1	23	laser	laser	NOUN
app01-6686	1	24	-	-	PUNCT
app01-6686	1	25	induced	induce	VERB
app01-6686	1	26	surface	surface	NOUN
app01-6686	1	27	acoustic	acoustic	ADJ
app01-6686	1	28	waves	wave	NOUN
app01-6686	1	29	for	for	ADP
app01-6686	1	30	thin	thin	ADJ
app01-6686	1	31	film	film	NOUN
app01-6686	1	32	characterization	characterization	NOUN
app01-6686	1	33	radim	radim	PROPN
app01-6686	1	34	kudělkaa	kudělkaa	PROPN
app01-6686	1	35	,	,	PUNCT
app01-6686	1	36	lukáš	lukáš	ADJ
app01-6686	1	37	václaveka	václaveka	NOUN
app01-6686	1	38	,	,	PUNCT
app01-6686	1	39	jan	jan	PROPN
app01-6686	1	40	tomáštíkb	tomáštíkb	NOUN
app01-6686	1	41	,	,	PUNCT
app01-6686	1	42	sabina	sabina	PROPN
app01-6686	1	43	malecováa	malecováa	PROPN
app01-6686	1	44	,	,	PUNCT
app01-6686	1	45	radim	radim	PROPN
app01-6686	1	46	čtvrtlíkc,∗	čtvrtlíkc,∗	PROPN
app01-6686	1	47	a	a	DET
app01-6686	1	48	joint	joint	ADJ
app01-6686	1	49	laboratory	laboratory	NOUN
app01-6686	1	50	of	of	ADP
app01-6686	1	51	optics	optic	NOUN
app01-6686	1	52	,	,	PUNCT
app01-6686	1	53	palacky	palacky	ADJ
app01-6686	1	54	university	university	NOUN
app01-6686	1	55	olomouc	olomouc	PROPN
app01-6686	1	56	,	,	PUNCT
app01-6686	1	57	17	17	NUM
app01-6686	1	58	.	.	PUNCT
app01-6686	2	1	listopadu	listopadu	ADJ
app01-6686	2	2	50a	50a	NOUN
app01-6686	2	3	,	,	PUNCT
app01-6686	2	4	772	772	NUM
app01-6686	2	5	07	07	NUM
app01-6686	2	6	,	,	PUNCT
app01-6686	2	7	olomouc	olomouc	PROPN
app01-6686	2	8	,	,	PUNCT
app01-6686	2	9	czech	czech	PROPN
app01-6686	2	10	republic	republic	PROPN
app01-6686	2	11	b	b	PROPN
app01-6686	2	12	institute	institute	PROPN
app01-6686	2	13	of	of	ADP
app01-6686	2	14	physics	physics	PROPN
app01-6686	2	15	of	of	ADP
app01-6686	2	16	the	the	DET
app01-6686	2	17	czech	czech	PROPN
app01-6686	2	18	academy	academy	PROPN
app01-6686	2	19	of	of	ADP
app01-6686	2	20	sciences	sciences	PROPN
app01-6686	2	21	,	,	PUNCT
app01-6686	2	22	joint	joint	ADJ
app01-6686	2	23	laboratory	laboratory	NOUN
app01-6686	2	24	of	of	ADP
app01-6686	2	25	optics	optic	NOUN
app01-6686	2	26	of	of	ADP
app01-6686	2	27	palacky	palacky	ADJ
app01-6686	2	28	university	university	PROPN
app01-6686	2	29	and	and	CCONJ
app01-6686	2	30	institute	institute	PROPN
app01-6686	2	31	of	of	ADP
app01-6686	2	32	physics	physics	PROPN
app01-6686	2	33	as	as	ADP
app01-6686	2	34	cr	cr	PROPN
app01-6686	2	35	,	,	PUNCT
app01-6686	2	36	17	17	NUM
app01-6686	2	37	.	.	PUNCT
app01-6686	3	1	listopadu	listopadu	ADJ
app01-6686	3	2	12	12	NUM
app01-6686	3	3	,	,	PUNCT
app01-6686	3	4	cz-771	cz-771	ADJ
app01-6686	3	5	46	46	NUM
app01-6686	3	6	,	,	PUNCT
app01-6686	3	7	olomouc	olomouc	PROPN
app01-6686	3	8	,	,	PUNCT
app01-6686	3	9	czech	czech	PROPN
app01-6686	3	10	republic	republic	NOUN
app01-6686	3	11	c	c	PROPN
app01-6686	3	12	regional	regional	ADJ
app01-6686	3	13	centre	centre	NOUN
app01-6686	3	14	of	of	ADP
app01-6686	3	15	advanced	advanced	ADJ
app01-6686	3	16	technologies	technology	NOUN
app01-6686	3	17	and	and	CCONJ
app01-6686	3	18	materials	material	NOUN
app01-6686	3	19	,	,	PUNCT
app01-6686	3	20	joint	joint	ADJ
app01-6686	3	21	laboratory	laboratory	NOUN
app01-6686	3	22	of	of	ADP
app01-6686	3	23	optics	optic	NOUN
app01-6686	3	24	of	of	ADP
app01-6686	3	25	palacky	palacky	ADJ
app01-6686	3	26	university	university	PROPN
app01-6686	3	27	and	and	CCONJ
app01-6686	3	28	institute	institute	PROPN
app01-6686	3	29	of	of	ADP
app01-6686	3	30	physics	physics	PROPN
app01-6686	3	31	of	of	ADP
app01-6686	3	32	the	the	DET
app01-6686	3	33	czech	czech	PROPN
app01-6686	3	34	academy	academy	PROPN
app01-6686	3	35	of	of	ADP
app01-6686	3	36	sciences	sciences	PROPN
app01-6686	3	37	,	,	PUNCT
app01-6686	3	38	faculty	faculty	NOUN
app01-6686	3	39	of	of	ADP
app01-6686	3	40	science	science	NOUN
app01-6686	3	41	,	,	PUNCT
app01-6686	3	42	palacky	palacky	ADJ
app01-6686	3	43	university	university	NOUN
app01-6686	3	44	,	,	PUNCT
app01-6686	3	45	17	17	NUM
app01-6686	3	46	.	.	PUNCT
app01-6686	4	1	listopadu	listopadu	ADJ
app01-6686	4	2	12	12	NUM
app01-6686	4	3	,	,	PUNCT
app01-6686	4	4	77146	77146	NUM
app01-6686	4	5	olomouc	olomouc	PROPN
app01-6686	4	6	,	,	PUNCT
app01-6686	4	7	czech	czech	PROPN
app01-6686	4	8	republic	republic	NOUN
app01-6686	4	9	∗	∗	NOUN
app01-6686	4	10	corresponding	correspond	VERB
app01-6686	4	11	author	author	NOUN
app01-6686	4	12	:	:	PUNCT
app01-6686	4	13	radim.ctvrtlik@upol.cz	radim.ctvrtlik@upol.cz	NOUN
app01-6686	4	14	abstract	abstract	NOUN
app01-6686	4	15	.	.	PUNCT
app01-6686	5	1	knowledge	knowledge	NOUN
app01-6686	5	2	of	of	ADP
app01-6686	5	3	mechanical	mechanical	ADJ
app01-6686	5	4	properties	property	NOUN
app01-6686	5	5	of	of	ADP
app01-6686	5	6	thin	thin	ADJ
app01-6686	5	7	films	film	NOUN
app01-6686	5	8	is	be	AUX
app01-6686	5	9	essential	essential	ADJ
app01-6686	5	10	for	for	ADP
app01-6686	5	11	most	most	ADJ
app01-6686	5	12	of	of	ADP
app01-6686	5	13	their	their	PRON
app01-6686	5	14	applications	application	NOUN
app01-6686	5	15	.	.	PUNCT
app01-6686	6	1	however	however	ADV
app01-6686	6	2	,	,	PUNCT
app01-6686	6	3	their	their	PRON
app01-6686	6	4	determination	determination	NOUN
app01-6686	6	5	can	can	AUX
app01-6686	6	6	be	be	AUX
app01-6686	6	7	problematic	problematic	ADJ
app01-6686	6	8	for	for	ADP
app01-6686	6	9	very	very	ADV
app01-6686	6	10	thin	thin	ADJ
app01-6686	6	11	films	film	NOUN
app01-6686	6	12	.	.	PUNCT
app01-6686	7	1	law	law	NOUN
app01-6686	7	2	(	(	PUNCT
app01-6686	7	3	laser	laser	NOUN
app01-6686	7	4	-	-	PUNCT
app01-6686	7	5	induced	induce	VERB
app01-6686	7	6	acoustic	acoustic	ADJ
app01-6686	7	7	waves	wave	NOUN
app01-6686	7	8	)	)	PUNCT
app01-6686	7	9	is	be	AUX
app01-6686	7	10	a	a	DET
app01-6686	7	11	combined	combine	VERB
app01-6686	7	12	acousto	acousto	ADJ
app01-6686	7	13	-	-	PUNCT
app01-6686	7	14	optic	optic	ADJ
app01-6686	7	15	method	method	NOUN
app01-6686	7	16	capable	capable	ADJ
app01-6686	7	17	of	of	ADP
app01-6686	7	18	measuring	measure	VERB
app01-6686	7	19	films	film	NOUN
app01-6686	7	20	with	with	ADP
app01-6686	7	21	thickness	thickness	NOUN
app01-6686	7	22	from	from	ADP
app01-6686	7	23	few	few	ADJ
app01-6686	7	24	nanometers	nanometer	NOUN
app01-6686	7	25	.	.	PUNCT
app01-6686	8	1	it	it	PRON
app01-6686	8	2	utilizes	utilize	VERB
app01-6686	8	3	ultrasound	ultrasound	NOUN
app01-6686	8	4	surface	surface	NOUN
app01-6686	8	5	waves	wave	NOUN
app01-6686	8	6	which	which	PRON
app01-6686	8	7	are	be	AUX
app01-6686	8	8	excited	excited	ADJ
app01-6686	8	9	via	via	ADP
app01-6686	8	10	short	short	ADJ
app01-6686	8	11	laser	laser	NOUN
app01-6686	8	12	pulses	pulse	NOUN
app01-6686	8	13	and	and	CCONJ
app01-6686	8	14	detected	detect	VERB
app01-6686	8	15	by	by	ADP
app01-6686	8	16	a	a	DET
app01-6686	8	17	pvdf	pvdf	PROPN
app01-6686	8	18	foil	foil	NOUN
app01-6686	8	19	.	.	PUNCT
app01-6686	9	1	properties	property	NOUN
app01-6686	9	2	such	such	ADJ
app01-6686	9	3	as	as	ADP
app01-6686	9	4	young	young	ADJ
app01-6686	9	5	’s	’s	PART
app01-6686	9	6	modulus	modulus	NOUN
app01-6686	9	7	,	,	PUNCT
app01-6686	9	8	poisson	poisson	PROPN
app01-6686	9	9	’s	’s	PART
app01-6686	9	10	ratio	ratio	NOUN
app01-6686	9	11	and	and	CCONJ
app01-6686	9	12	density	density	NOUN
app01-6686	9	13	of	of	ADP
app01-6686	9	14	both	both	CCONJ
app01-6686	9	15	the	the	DET
app01-6686	9	16	film	film	NOUN
app01-6686	9	17	and	and	CCONJ
app01-6686	9	18	the	the	DET
app01-6686	9	19	substrate	substrate	NOUN
app01-6686	9	20	as	as	ADV
app01-6686	9	21	well	well	ADV
app01-6686	9	22	as	as	ADP
app01-6686	9	23	film	film	NOUN
app01-6686	9	24	thickness	thickness	NOUN
app01-6686	9	25	can	can	AUX
app01-6686	9	26	be	be	AUX
app01-6686	9	27	explored.results	explored.result	NOUN
app01-6686	9	28	from	from	ADP
app01-6686	9	29	the	the	DET
app01-6686	9	30	law	law	NOUN
app01-6686	9	31	method	method	NOUN
app01-6686	9	32	are	be	AUX
app01-6686	9	33	successfully	successfully	ADV
app01-6686	9	34	compared	compare	VERB
app01-6686	9	35	with	with	ADP
app01-6686	9	36	nanoindentation	nanoindentation	NOUN
app01-6686	9	37	for	for	ADP
app01-6686	9	38	young	young	ADJ
app01-6686	9	39	’s	’s	PART
app01-6686	9	40	modulus	modulus	ADJ
app01-6686	9	41	evaluation	evaluation	NOUN
app01-6686	9	42	and	and	CCONJ
app01-6686	9	43	with	with	ADP
app01-6686	9	44	optical	optical	ADJ
app01-6686	9	45	method	method	NOUN
app01-6686	9	46	for	for	ADP
app01-6686	9	47	film	film	NOUN
app01-6686	9	48	thickness	thickness	NOUN
app01-6686	9	49	evaluation	evaluation	NOUN
app01-6686	9	50	and	and	CCONJ
app01-6686	9	51	also	also	ADV
app01-6686	9	52	with	with	ADP
app01-6686	9	53	literature	literature	NOUN
app01-6686	9	54	data	data	PROPN
app01-6686	9	55	.	.	PUNCT
app01-6686	10	1	application	application	NOUN
app01-6686	10	2	of	of	ADP
app01-6686	10	3	law	law	NOUN
app01-6686	10	4	for	for	ADP
app01-6686	10	5	anisotropy	anisotropy	NOUN
app01-6686	10	6	mapping	mapping	NOUN
app01-6686	10	7	of	of	ADP
app01-6686	10	8	materials	material	NOUN
app01-6686	10	9	with	with	ADP
app01-6686	10	10	cubic	cubic	ADJ
app01-6686	10	11	crystallographic	crystallographic	ADJ
app01-6686	10	12	lattice	lattice	PROPN
app01-6686	10	13	is	be	AUX
app01-6686	10	14	also	also	ADV
app01-6686	10	15	demonstrated	demonstrate	VERB
app01-6686	10	16	.	.	PUNCT
app01-6686	11	1	keywords	keyword	NOUN
app01-6686	11	2	:	:	PUNCT
app01-6686	11	3	anisotropy	anisotropy	VERB
app01-6686	11	4	,	,	PUNCT
app01-6686	11	5	laser	laser	NOUN
app01-6686	11	6	-	-	PUNCT
app01-6686	11	7	induced	induce	VERB
app01-6686	11	8	surface	surface	NOUN
app01-6686	11	9	acoustic	acoustic	ADJ
app01-6686	11	10	waves	wave	NOUN
app01-6686	11	11	,	,	PUNCT
app01-6686	11	12	nanoindentation	nanoindentation	NOUN
app01-6686	11	13	,	,	PUNCT
app01-6686	11	14	thin	thin	ADJ
app01-6686	11	15	films	film	NOUN
app01-6686	11	16	,	,	PUNCT
app01-6686	11	17	young	young	ADJ
app01-6686	11	18	’s	’s	PART
app01-6686	11	19	modulus	modulus	NOUN
app01-6686	11	20	.	.	PUNCT
app01-6686	12	1	1	1	X
app01-6686	12	2	.	.	X
app01-6686	12	3	introduction	introduction	NOUN
app01-6686	12	4	thin	thin	ADJ
app01-6686	12	5	films	film	NOUN
app01-6686	12	6	and	and	CCONJ
app01-6686	12	7	coatings	coating	NOUN
app01-6686	12	8	have	have	AUX
app01-6686	12	9	become	become	VERB
app01-6686	12	10	an	an	DET
app01-6686	12	11	essential	essential	ADJ
app01-6686	12	12	part	part	NOUN
app01-6686	12	13	of	of	ADP
app01-6686	12	14	our	our	PRON
app01-6686	12	15	everyday	everyday	ADJ
app01-6686	12	16	lives	life	NOUN
app01-6686	12	17	and	and	CCONJ
app01-6686	12	18	knowledge	knowledge	NOUN
app01-6686	12	19	of	of	ADP
app01-6686	12	20	their	their	PRON
app01-6686	12	21	mechanical	mechanical	ADJ
app01-6686	12	22	properties	property	NOUN
app01-6686	12	23	and	and	CCONJ
app01-6686	12	24	durability	durability	NOUN
app01-6686	12	25	directly	directly	ADV
app01-6686	12	26	affects	affect	VERB
app01-6686	12	27	their	their	PRON
app01-6686	12	28	lifetime	lifetime	NOUN
app01-6686	12	29	regardless	regardless	ADV
app01-6686	12	30	of	of	ADP
app01-6686	12	31	their	their	PRON
app01-6686	12	32	primary	primary	ADJ
app01-6686	12	33	role	role	NOUN
app01-6686	12	34	.	.	PUNCT
app01-6686	13	1	thin	thin	ADJ
app01-6686	13	2	films	film	NOUN
app01-6686	13	3	are	be	AUX
app01-6686	13	4	often	often	ADV
app01-6686	13	5	exposed	expose	VERB
app01-6686	13	6	to	to	ADP
app01-6686	13	7	external	external	ADJ
app01-6686	13	8	stresses	stress	NOUN
app01-6686	13	9	during	during	ADP
app01-6686	13	10	their	their	PRON
app01-6686	13	11	fabrication	fabrication	NOUN
app01-6686	13	12	or	or	CCONJ
app01-6686	13	13	service	service	NOUN
app01-6686	13	14	life	life	NOUN
app01-6686	13	15	.	.	PUNCT
app01-6686	14	1	therefore	therefore	ADV
app01-6686	14	2	,	,	PUNCT
app01-6686	14	3	their	their	PRON
app01-6686	14	4	reliable	reliable	ADJ
app01-6686	14	5	testing	testing	NOUN
app01-6686	14	6	is	be	AUX
app01-6686	14	7	essential	essential	ADJ
app01-6686	14	8	for	for	ADP
app01-6686	14	9	both	both	CCONJ
app01-6686	14	10	their	their	PRON
app01-6686	14	11	research	research	NOUN
app01-6686	14	12	and	and	CCONJ
app01-6686	14	13	development	development	NOUN
app01-6686	14	14	as	as	ADV
app01-6686	14	15	well	well	ADV
app01-6686	14	16	as	as	ADP
app01-6686	14	17	industrial	industrial	ADJ
app01-6686	14	18	production	production	NOUN
app01-6686	14	19	.	.	PUNCT
app01-6686	15	1	nanoindentation	nanoindentation	NOUN
app01-6686	15	2	has	have	AUX
app01-6686	15	3	become	become	VERB
app01-6686	15	4	the	the	DET
app01-6686	15	5	standard	standard	ADJ
app01-6686	15	6	method	method	NOUN
app01-6686	15	7	for	for	ADP
app01-6686	15	8	determination	determination	NOUN
app01-6686	15	9	of	of	ADP
app01-6686	15	10	local	local	ADJ
app01-6686	15	11	mechanical	mechanical	ADJ
app01-6686	15	12	properties	property	NOUN
app01-6686	15	13	,	,	PUNCT
app01-6686	15	14	but	but	CCONJ
app01-6686	15	15	it	it	PRON
app01-6686	15	16	has	have	VERB
app01-6686	15	17	its	its	PRON
app01-6686	15	18	inherent	inherent	ADJ
app01-6686	15	19	limitations	limitation	NOUN
app01-6686	15	20	[	[	X
app01-6686	15	21	1	1	NUM
app01-6686	15	22	]	]	PUNCT
app01-6686	15	23	.	.	PUNCT
app01-6686	16	1	mostly	mostly	ADV
app01-6686	16	2	the	the	DET
app01-6686	16	3	thickness	thickness	NOUN
app01-6686	16	4	of	of	ADP
app01-6686	16	5	the	the	DET
app01-6686	16	6	film	film	NOUN
app01-6686	16	7	is	be	AUX
app01-6686	16	8	the	the	DET
app01-6686	16	9	main	main	ADJ
app01-6686	16	10	limiting	limiting	NOUN
app01-6686	16	11	factor	factor	NOUN
app01-6686	16	12	,	,	PUNCT
app01-6686	16	13	because	because	SCONJ
app01-6686	16	14	if	if	SCONJ
app01-6686	16	15	the	the	DET
app01-6686	16	16	indenter	indenter	NOUN
app01-6686	16	17	penetrates	penetrate	VERB
app01-6686	16	18	to	to	ADP
app01-6686	16	19	a	a	DET
app01-6686	16	20	greater	great	ADJ
app01-6686	16	21	depth	depth	NOUN
app01-6686	16	22	than	than	ADP
app01-6686	16	23	10	10	NUM
app01-6686	16	24	%	%	NOUN
app01-6686	16	25	of	of	ADP
app01-6686	16	26	the	the	DET
app01-6686	16	27	film	film	NOUN
app01-6686	16	28	(	(	PUNCT
app01-6686	16	29	commonly	commonly	ADV
app01-6686	16	30	used	use	VERB
app01-6686	16	31	rule	rule	NOUN
app01-6686	16	32	of	of	ADP
app01-6686	16	33	thumb	thumb	NOUN
app01-6686	16	34	)	)	PUNCT
app01-6686	16	35	,	,	PUNCT
app01-6686	16	36	then	then	ADV
app01-6686	16	37	substrate	substrate	NOUN
app01-6686	16	38	may	may	AUX
app01-6686	16	39	affect	affect	VERB
app01-6686	16	40	the	the	DET
app01-6686	16	41	hardness	hardness	ADJ
app01-6686	16	42	values	value	NOUN
app01-6686	16	43	considerably	considerably	ADV
app01-6686	17	1	[	[	X
app01-6686	17	2	2–4	2–4	NUM
app01-6686	17	3	]	]	PUNCT
app01-6686	17	4	.	.	PUNCT
app01-6686	18	1	determining	determine	VERB
app01-6686	18	2	the	the	DET
app01-6686	18	3	elastic	elastic	ADJ
app01-6686	18	4	modulus	modulus	NOUN
app01-6686	18	5	of	of	ADP
app01-6686	18	6	very	very	ADV
app01-6686	18	7	thin	thin	ADJ
app01-6686	18	8	films	film	NOUN
app01-6686	18	9	is	be	AUX
app01-6686	18	10	even	even	ADV
app01-6686	18	11	more	more	ADV
app01-6686	18	12	problematic	problematic	ADJ
app01-6686	18	13	because	because	SCONJ
app01-6686	18	14	the	the	DET
app01-6686	18	15	substrate	substrate	NOUN
app01-6686	18	16	and	and	CCONJ
app01-6686	18	17	the	the	DET
app01-6686	18	18	film	film	NOUN
app01-6686	18	19	behave	behave	VERB
app01-6686	18	20	like	like	ADP
app01-6686	18	21	two	two	NUM
app01-6686	18	22	springs	spring	NOUN
app01-6686	18	23	in	in	ADP
app01-6686	18	24	series	series	NOUN
app01-6686	18	25	hence	hence	ADV
app01-6686	18	26	the	the	DET
app01-6686	18	27	elastic	elastic	ADJ
app01-6686	18	28	modulus	modulus	NOUN
app01-6686	18	29	of	of	ADP
app01-6686	18	30	the	the	DET
app01-6686	18	31	film	film	NOUN
app01-6686	18	32	is	be	AUX
app01-6686	18	33	always	always	ADV
app01-6686	18	34	affected	affect	VERB
app01-6686	18	35	by	by	ADP
app01-6686	18	36	the	the	DET
app01-6686	18	37	substrate	substrate	NOUN
app01-6686	18	38	[	[	X
app01-6686	18	39	5	5	NUM
app01-6686	18	40	]	]	PUNCT
app01-6686	18	41	.	.	PUNCT
app01-6686	19	1	this	this	PRON
app01-6686	19	2	means	mean	VERB
app01-6686	19	3	that	that	SCONJ
app01-6686	19	4	the	the	DET
app01-6686	19	5	indentation	indentation	NOUN
app01-6686	19	6	of	of	ADP
app01-6686	19	7	films	film	NOUN
app01-6686	19	8	with	with	ADP
app01-6686	19	9	thickness	thickness	NOUN
app01-6686	19	10	under	under	ADP
app01-6686	19	11	50	50	NUM
app01-6686	19	12	nm	nm	NOUN
app01-6686	19	13	is	be	AUX
app01-6686	19	14	very	very	ADV
app01-6686	19	15	challenging	challenging	ADJ
app01-6686	19	16	[	[	X
app01-6686	19	17	6	6	NUM
app01-6686	19	18	]	]	PUNCT
app01-6686	19	19	.	.	PUNCT
app01-6686	20	1	however	however	ADV
app01-6686	20	2	,	,	PUNCT
app01-6686	20	3	mechanical	mechanical	ADJ
app01-6686	20	4	properties	property	NOUN
app01-6686	20	5	of	of	ADP
app01-6686	20	6	very	very	ADV
app01-6686	20	7	thin	thin	ADJ
app01-6686	20	8	films	film	NOUN
app01-6686	20	9	can	can	AUX
app01-6686	20	10	still	still	ADV
app01-6686	20	11	be	be	AUX
app01-6686	20	12	explored	explore	VERB
app01-6686	20	13	using	use	VERB
app01-6686	20	14	the	the	DET
app01-6686	20	15	methods	method	NOUN
app01-6686	20	16	based	base	VERB
app01-6686	20	17	on	on	ADP
app01-6686	20	18	analysis	analysis	NOUN
app01-6686	20	19	of	of	ADP
app01-6686	20	20	the	the	DET
app01-6686	20	21	dispersion	dispersion	NOUN
app01-6686	20	22	curves	curve	NOUN
app01-6686	20	23	of	of	ADP
app01-6686	20	24	rayleigh	rayleigh	PROPN
app01-6686	20	25	surface	surface	PROPN
app01-6686	20	26	acoustic	acoustic	ADJ
app01-6686	20	27	waves	wave	NOUN
app01-6686	20	28	.	.	PUNCT
app01-6686	21	1	one	one	NUM
app01-6686	21	2	of	of	ADP
app01-6686	21	3	such	such	ADJ
app01-6686	21	4	methods	method	NOUN
app01-6686	21	5	is	be	AUX
app01-6686	21	6	the	the	DET
app01-6686	21	7	law	law	NOUN
app01-6686	21	8	(	(	PUNCT
app01-6686	21	9	laser	laser	NOUN
app01-6686	21	10	-	-	PUNCT
app01-6686	21	11	induced	induce	VERB
app01-6686	21	12	acoustic	acoustic	ADJ
app01-6686	21	13	wave	wave	NOUN
app01-6686	21	14	)	)	PUNCT
app01-6686	21	15	technique	technique	NOUN
app01-6686	21	16	[	[	X
app01-6686	21	17	7	7	NUM
app01-6686	21	18	,	,	PUNCT
app01-6686	21	19	8	8	NUM
app01-6686	21	20	]	]	PUNCT
app01-6686	21	21	.	.	PUNCT
app01-6686	22	1	it	it	PRON
app01-6686	22	2	is	be	AUX
app01-6686	22	3	a	a	DET
app01-6686	22	4	combined	combine	VERB
app01-6686	22	5	acousto	acousto	ADJ
app01-6686	22	6	-	-	PUNCT
app01-6686	22	7	optic	optic	ADJ
app01-6686	22	8	method	method	NOUN
app01-6686	22	9	developed	develop	VERB
app01-6686	22	10	for	for	ADP
app01-6686	22	11	the	the	DET
app01-6686	22	12	assessment	assessment	NOUN
app01-6686	22	13	of	of	ADP
app01-6686	22	14	material	material	ADJ
app01-6686	22	15	characteristics	characteristic	NOUN
app01-6686	22	16	of	of	ADP
app01-6686	22	17	surfaces	surface	NOUN
app01-6686	22	18	(	(	PUNCT
app01-6686	22	19	young	young	ADJ
app01-6686	22	20	’s	’s	PART
app01-6686	22	21	modulus	modulus	NOUN
app01-6686	22	22	,	,	PUNCT
app01-6686	22	23	poisson	poisson	PROPN
app01-6686	22	24	’s	’s	PART
app01-6686	22	25	ratio	ratio	NOUN
app01-6686	22	26	,	,	PUNCT
app01-6686	22	27	density	density	NOUN
app01-6686	22	28	,	,	PUNCT
app01-6686	22	29	film	film	NOUN
app01-6686	22	30	thickness	thickness	NOUN
app01-6686	22	31	)	)	PUNCT
app01-6686	22	32	based	base	VERB
app01-6686	22	33	on	on	ADP
app01-6686	22	34	the	the	DET
app01-6686	22	35	generation	generation	NOUN
app01-6686	22	36	of	of	ADP
app01-6686	22	37	surface	surface	NOUN
app01-6686	22	38	acoustic	acoustic	ADJ
app01-6686	22	39	waves	wave	NOUN
app01-6686	22	40	and	and	CCONJ
app01-6686	22	41	their	their	PRON
app01-6686	22	42	detection	detection	NOUN
app01-6686	22	43	.	.	PUNCT
app01-6686	23	1	the	the	DET
app01-6686	23	2	propagation	propagation	NOUN
app01-6686	23	3	of	of	ADP
app01-6686	23	4	these	these	DET
app01-6686	23	5	waves	wave	NOUN
app01-6686	23	6	in	in	ADP
app01-6686	23	7	the	the	DET
app01-6686	23	8	material	material	NOUN
app01-6686	23	9	depends	depend	VERB
app01-6686	23	10	on	on	ADP
app01-6686	23	11	the	the	DET
app01-6686	23	12	elastic	elastic	ADJ
app01-6686	23	13	properties	property	NOUN
app01-6686	23	14	of	of	ADP
app01-6686	23	15	both	both	CCONJ
app01-6686	23	16	the	the	DET
app01-6686	23	17	thin	thin	ADJ
app01-6686	23	18	film	film	NOUN
app01-6686	23	19	and	and	CCONJ
app01-6686	23	20	the	the	DET
app01-6686	23	21	substrate	substrate	NOUN
app01-6686	23	22	.	.	PUNCT
app01-6686	24	1	in	in	ADP
app01-6686	24	2	order	order	NOUN
app01-6686	24	3	to	to	PART
app01-6686	24	4	demonstrate	demonstrate	VERB
app01-6686	24	5	the	the	DET
app01-6686	24	6	possibilities	possibility	NOUN
app01-6686	24	7	and	and	CCONJ
app01-6686	24	8	strengths	strength	NOUN
app01-6686	24	9	of	of	ADP
app01-6686	24	10	the	the	DET
app01-6686	24	11	law	law	NOUN
app01-6686	24	12	,	,	PUNCT
app01-6686	24	13	the	the	DET
app01-6686	24	14	representative	representative	ADJ
app01-6686	24	15	results	result	NOUN
app01-6686	24	16	from	from	ADP
app01-6686	24	17	thin	thin	ADJ
app01-6686	24	18	films	film	NOUN
app01-6686	24	19	and	and	CCONJ
app01-6686	24	20	single	single	ADJ
app01-6686	24	21	crystals	crystal	NOUN
app01-6686	24	22	are	be	AUX
app01-6686	24	23	presented	present	VERB
app01-6686	24	24	.	.	PUNCT
app01-6686	25	1	in	in	ADP
app01-6686	25	2	case	case	NOUN
app01-6686	25	3	of	of	ADP
app01-6686	25	4	thin	thin	ADJ
app01-6686	25	5	films	film	NOUN
app01-6686	25	6	the	the	DET
app01-6686	25	7	results	result	NOUN
app01-6686	25	8	are	be	AUX
app01-6686	25	9	compared	compare	VERB
app01-6686	25	10	with	with	ADP
app01-6686	25	11	the	the	DET
app01-6686	25	12	results	result	NOUN
app01-6686	25	13	from	from	ADP
app01-6686	25	14	other	other	ADJ
app01-6686	25	15	methods	method	NOUN
app01-6686	25	16	such	such	ADJ
app01-6686	25	17	as	as	ADP
app01-6686	25	18	nanoindentation	nanoindentation	NOUN
app01-6686	25	19	for	for	ADP
app01-6686	25	20	young	young	ADJ
app01-6686	25	21	’s	’s	PART
app01-6686	25	22	modulus	modulus	ADJ
app01-6686	25	23	evaluation	evaluation	NOUN
app01-6686	25	24	or	or	CCONJ
app01-6686	25	25	optical	optical	ADJ
app01-6686	25	26	methods	method	NOUN
app01-6686	25	27	for	for	ADP
app01-6686	25	28	film	film	NOUN
app01-6686	25	29	thickness	thickness	NOUN
app01-6686	25	30	characterization	characterization	NOUN
app01-6686	25	31	.	.	PUNCT
app01-6686	26	1	besides	besides	SCONJ
app01-6686	26	2	,	,	PUNCT
app01-6686	26	3	the	the	DET
app01-6686	26	4	limit	limit	NOUN
app01-6686	26	5	of	of	ADP
app01-6686	26	6	the	the	DET
app01-6686	26	7	film	film	NOUN
app01-6686	26	8	thickness	thickness	NOUN
app01-6686	26	9	is	be	AUX
app01-6686	26	10	explored	explore	VERB
app01-6686	26	11	,	,	PUNCT
app01-6686	26	12	as	as	SCONJ
app01-6686	26	13	the	the	DET
app01-6686	26	14	ability	ability	NOUN
app01-6686	26	15	to	to	PART
app01-6686	26	16	characterize	characterize	VERB
app01-6686	26	17	very	very	ADV
app01-6686	26	18	thin	thin	ADJ
app01-6686	26	19	films	film	NOUN
app01-6686	26	20	is	be	AUX
app01-6686	26	21	one	one	NUM
app01-6686	26	22	of	of	ADP
app01-6686	26	23	the	the	DET
app01-6686	26	24	main	main	ADJ
app01-6686	26	25	advantages	advantage	NOUN
app01-6686	26	26	of	of	ADP
app01-6686	26	27	law	law	NOUN
app01-6686	26	28	over	over	ADP
app01-6686	26	29	other	other	ADJ
app01-6686	26	30	methods	method	NOUN
app01-6686	26	31	.	.	PUNCT
app01-6686	27	1	1.1	1.1	NUM
app01-6686	27	2	.	.	PUNCT
app01-6686	28	1	principle	principle	NOUN
app01-6686	28	2	of	of	ADP
app01-6686	28	3	law	law	NOUN
app01-6686	28	4	short	short	ADJ
app01-6686	28	5	laser	laser	NOUN
app01-6686	28	6	pulses	pulse	NOUN
app01-6686	28	7	from	from	ADP
app01-6686	28	8	nitrogen	nitrogen	NOUN
app01-6686	28	9	laser	laser	NOUN
app01-6686	28	10	are	be	AUX
app01-6686	28	11	absorbed	absorb	VERB
app01-6686	28	12	by	by	ADP
app01-6686	28	13	the	the	DET
app01-6686	28	14	material	material	NOUN
app01-6686	28	15	and	and	CCONJ
app01-6686	28	16	cause	cause	VERB
app01-6686	28	17	generation	generation	NOUN
app01-6686	28	18	of	of	ADP
app01-6686	28	19	a	a	DET
app01-6686	28	20	wide	wide	ADJ
app01-6686	28	21	frequency	frequency	NOUN
app01-6686	28	22	spectrum	spectrum	NOUN
app01-6686	28	23	(	(	PUNCT
app01-6686	28	24	typically	typically	ADV
app01-6686	28	25	in	in	ADP
app01-6686	28	26	the	the	DET
app01-6686	28	27	range	range	NOUN
app01-6686	28	28	from	from	ADP
app01-6686	28	29	units	unit	NOUN
app01-6686	28	30	to	to	ADP
app01-6686	28	31	hundreds	hundred	NOUN
app01-6686	28	32	of	of	ADP
app01-6686	28	33	mhz	mhz	NOUN
app01-6686	28	34	)	)	PUNCT
app01-6686	28	35	of	of	ADP
app01-6686	28	36	thermally	thermally	ADV
app01-6686	28	37	activated	activate	VERB
app01-6686	28	38	surface	surface	NOUN
app01-6686	28	39	acoustic	acoustic	ADJ
app01-6686	28	40	waves	wave	NOUN
app01-6686	28	41	(	(	PUNCT
app01-6686	28	42	saw	saw	NOUN
app01-6686	28	43	)	)	PUNCT
app01-6686	28	44	.	.	PUNCT
app01-6686	29	1	those	those	DET
app01-6686	29	2	waves	wave	NOUN
app01-6686	29	3	are	be	AUX
app01-6686	29	4	propagating	propagate	VERB
app01-6686	29	5	from	from	ADP
app01-6686	29	6	the	the	DET
app01-6686	29	7	point	point	NOUN
app01-6686	29	8	of	of	ADP
app01-6686	29	9	incidence	incidence	NOUN
app01-6686	29	10	and	and	CCONJ
app01-6686	29	11	mostly	mostly	ADV
app01-6686	29	12	in	in	ADP
app01-6686	29	13	the	the	DET
app01-6686	29	14	surface	surface	NOUN
app01-6686	29	15	layers	layer	NOUN
app01-6686	29	16	of	of	ADP
app01-6686	29	17	the	the	DET
app01-6686	29	18	sample	sample	NOUN
app01-6686	29	19	as	as	SCONJ
app01-6686	29	20	their	their	PRON
app01-6686	29	21	amplitude	amplitude	NOUN
app01-6686	29	22	decays	decay	VERB
app01-6686	29	23	exponentially	exponentially	ADV
app01-6686	29	24	with	with	ADP
app01-6686	29	25	the	the	DET
app01-6686	29	26	increase	increase	NOUN
app01-6686	29	27	of	of	ADP
app01-6686	29	28	the	the	DET
app01-6686	29	29	distance	distance	NOUN
app01-6686	29	30	from	from	ADP
app01-6686	29	31	the	the	DET
app01-6686	29	32	surface	surface	NOUN
app01-6686	30	1	[	[	X
app01-6686	30	2	7	7	NUM
app01-6686	30	3	]	]	PUNCT
app01-6686	30	4	as	as	SCONJ
app01-6686	30	5	shown	show	VERB
app01-6686	30	6	in	in	ADP
app01-6686	30	7	the	the	DET
app01-6686	30	8	figure	figure	NOUN
app01-6686	30	9	1	1	NUM
app01-6686	30	10	.	.	PUNCT
app01-6686	31	1	the	the	DET
app01-6686	31	2	penetration	penetration	NOUN
app01-6686	31	3	depth	depth	NOUN
app01-6686	31	4	hpen	hpen	NOUN
app01-6686	31	5	of	of	ADP
app01-6686	31	6	the	the	DET
app01-6686	31	7	saw	saw	NOUN
app01-6686	31	8	can	can	AUX
app01-6686	31	9	be	be	AUX
app01-6686	31	10	estimated	estimate	VERB
app01-6686	31	11	by	by	ADP
app01-6686	31	12	their	their	PRON
app01-6686	31	13	wavelength	wavelength	NOUN
app01-6686	31	14	(	(	PUNCT
app01-6686	31	15	hpen	hpen	NOUN
app01-6686	31	16	≈	≈	PROPN
app01-6686	31	17	λ	λ	PROPN
app01-6686	31	18	)	)	PUNCT
app01-6686	31	19	.	.	PUNCT
app01-6686	32	1	this	this	DET
app01-6686	32	2	57	57	NUM
app01-6686	32	3	http://dx.doi.org/10.14311/app.2020.27.0057	http://dx.doi.org/10.14311/app.2020.27.0057	PROPN
app01-6686	32	4	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	PROPN
app01-6686	32	5	r.	r.	PROPN
app01-6686	32	6	kudělka	kudělka	PROPN
app01-6686	32	7	,	,	PUNCT
app01-6686	32	8	l.	l.	PROPN
app01-6686	32	9	václavek	václavek	PROPN
app01-6686	32	10	,	,	PUNCT
app01-6686	32	11	j.	j.	PROPN
app01-6686	32	12	tomáštík	tomáštík	VERB
app01-6686	32	13	et	et	PROPN
app01-6686	32	14	al	al	PROPN
app01-6686	32	15	.	.	PROPN
app01-6686	32	16	acta	acta	PROPN
app01-6686	32	17	polytechnica	polytechnica	PROPN
app01-6686	32	18	amplitude	amplitude	NOUN
app01-6686	32	19	de	de	PROPN
app01-6686	32	20	pt	pt	PROPN
app01-6686	32	21	h	h	NOUN
app01-6686	32	22	film	film	NOUN
app01-6686	32	23	substrate	substrate	NOUN
app01-6686	32	24	low	low	ADJ
app01-6686	32	25	frequency	frequency	NOUN
app01-6686	32	26	,	,	PUNCT
app01-6686	32	27	high	high	ADJ
app01-6686	32	28	wavelength	wavelength	NOUN
app01-6686	32	29	(	(	PUNCT
app01-6686	32	30	a	a	PRON
app01-6686	32	31	)	)	PUNCT
app01-6686	32	32	low	low	ADJ
app01-6686	32	33	frequency	frequency	NOUN
app01-6686	32	34	,	,	PUNCT
app01-6686	32	35	high	high	ADJ
app01-6686	32	36	wavelength	wavelength	NOUN
app01-6686	32	37	figure	figure	NOUN
app01-6686	32	38	1	1	NUM
app01-6686	32	39	.	.	PUNCT
app01-6686	32	40	propagation	propagation	NOUN
app01-6686	32	41	and	and	CCONJ
app01-6686	32	42	amplitude	amplitude	NOUN
app01-6686	32	43	-	-	PUNCT
app01-6686	32	44	decay	decay	NOUN
app01-6686	32	45	of	of	ADP
app01-6686	32	46	saw	saw	NOUN
app01-6686	32	47	with	with	ADP
app01-6686	32	48	a	a	DET
app01-6686	32	49	)	)	PUNCT
app01-6686	32	50	low	low	ADJ
app01-6686	32	51	frequency	frequency	NOUN
app01-6686	32	52	and	and	CCONJ
app01-6686	32	53	b	b	NOUN
app01-6686	32	54	)	)	PUNCT
app01-6686	32	55	high	high	ADJ
app01-6686	32	56	frequency	frequency	NOUN
app01-6686	32	57	means	mean	VERB
app01-6686	32	58	that	that	SCONJ
app01-6686	32	59	the	the	DET
app01-6686	32	60	penetration	penetration	NOUN
app01-6686	32	61	depth	depth	NOUN
app01-6686	32	62	depends	depend	VERB
app01-6686	32	63	on	on	ADP
app01-6686	32	64	the	the	DET
app01-6686	32	65	frequency	frequency	NOUN
app01-6686	32	66	f(λ	f(λ	NOUN
app01-6686	32	67	=	=	SYM
app01-6686	32	68	v	v	PROPN
app01-6686	32	69	/	/	SYM
app01-6686	32	70	f	f	PROPN
app01-6686	32	71	)	)	PUNCT
app01-6686	32	72	.	.	PUNCT
app01-6686	33	1	the	the	DET
app01-6686	33	2	greater	great	ADJ
app01-6686	33	3	the	the	DET
app01-6686	33	4	frequency	frequency	NOUN
app01-6686	33	5	the	the	PRON
app01-6686	33	6	lower	low	ADJ
app01-6686	33	7	the	the	DET
app01-6686	33	8	penetration	penetration	NOUN
app01-6686	33	9	depth	depth	NOUN
app01-6686	33	10	.	.	PUNCT
app01-6686	34	1	because	because	SCONJ
app01-6686	34	2	most	most	ADJ
app01-6686	34	3	of	of	ADP
app01-6686	34	4	the	the	DET
app01-6686	34	5	wave	wave	NOUN
app01-6686	34	6	energy	energy	NOUN
app01-6686	34	7	is	be	AUX
app01-6686	34	8	concentrated	concentrate	VERB
app01-6686	34	9	on	on	ADP
app01-6686	34	10	the	the	DET
app01-6686	34	11	surface	surface	NOUN
app01-6686	34	12	,	,	PUNCT
app01-6686	34	13	saw	see	VERB
app01-6686	34	14	are	be	AUX
app01-6686	34	15	very	very	ADV
app01-6686	34	16	sensitive	sensitive	ADJ
app01-6686	34	17	to	to	ADP
app01-6686	34	18	very	very	ADV
app01-6686	34	19	thin	thin	ADJ
app01-6686	34	20	films	film	NOUN
app01-6686	34	21	with	with	ADP
app01-6686	34	22	thicknesses	thickness	NOUN
app01-6686	34	23	from	from	ADP
app01-6686	34	24	few	few	ADJ
app01-6686	34	25	nanometers	nanometer	NOUN
app01-6686	34	26	(	(	PUNCT
app01-6686	34	27	even	even	ADV
app01-6686	34	28	when	when	SCONJ
app01-6686	34	29	they	they	PRON
app01-6686	34	30	are	be	AUX
app01-6686	34	31	much	much	ADV
app01-6686	34	32	thinner	thin	ADJ
app01-6686	34	33	than	than	ADP
app01-6686	34	34	the	the	DET
app01-6686	34	35	penetration	penetration	NOUN
app01-6686	34	36	depth	depth	NOUN
app01-6686	34	37	of	of	ADP
app01-6686	34	38	saw	saw	NOUN
app01-6686	34	39	)	)	PUNCT
app01-6686	35	1	[	[	X
app01-6686	35	2	8	8	NUM
app01-6686	35	3	]	]	PUNCT
app01-6686	35	4	.	.	PUNCT
app01-6686	36	1	the	the	DET
app01-6686	36	2	phase	phase	NOUN
app01-6686	36	3	velocity	velocity	NOUN
app01-6686	36	4	v	v	NOUN
app01-6686	36	5	of	of	ADP
app01-6686	36	6	saw	saw	NOUN
app01-6686	36	7	in	in	ADP
app01-6686	36	8	a	a	DET
app01-6686	36	9	non	non	ADJ
app01-6686	36	10	-	-	ADJ
app01-6686	36	11	coated	coated	ADJ
app01-6686	36	12	homogeneous	homogeneous	ADJ
app01-6686	36	13	and	and	CCONJ
app01-6686	36	14	isotropic	isotropic	ADJ
app01-6686	36	15	material	material	NOUN
app01-6686	36	16	is	be	AUX
app01-6686	36	17	independent	independent	ADJ
app01-6686	36	18	on	on	ADP
app01-6686	36	19	frequency	frequency	NOUN
app01-6686	36	20	and	and	CCONJ
app01-6686	36	21	can	can	AUX
app01-6686	36	22	be	be	AUX
app01-6686	36	23	described	describe	VERB
app01-6686	36	24	as	as	ADP
app01-6686	36	25	:	:	PUNCT
app01-6686	36	26	ν	ν	X
app01-6686	36	27	=	=	PUNCT
app01-6686	36	28	0.87	0.87	NUM
app01-6686	37	1	+	+	CCONJ
app01-6686	37	2	1.12ν	1.12ν	CCONJ
app01-6686	37	3	1	1	NUM
app01-6686	37	4	+	+	CCONJ
app01-6686	37	5	ν	ν	NOUN
app01-6686	37	6	√	√	NUM
app01-6686	37	7	e	e	NOUN
app01-6686	37	8	2ρ(1	2ρ(1	NUM
app01-6686	37	9	+	+	CCONJ
app01-6686	37	10	ν	ν	NOUN
app01-6686	37	11	)	)	PUNCT
app01-6686	37	12	,	,	PUNCT
app01-6686	37	13	(	(	PUNCT
app01-6686	37	14	1	1	X
app01-6686	37	15	)	)	PUNCT
app01-6686	37	16	where	where	SCONJ
app01-6686	37	17	ν	ν	NOUN
app01-6686	37	18	is	be	AUX
app01-6686	37	19	poisson	poisson	NOUN
app01-6686	37	20	’s	’s	PART
app01-6686	37	21	ratio	ratio	NOUN
app01-6686	37	22	,	,	PUNCT
app01-6686	37	23	ρ	ρ	PROPN
app01-6686	37	24	is	be	AUX
app01-6686	37	25	material	material	NOUN
app01-6686	37	26	density	density	NOUN
app01-6686	37	27	and	and	CCONJ
app01-6686	37	28	e	e	NOUN
app01-6686	37	29	is	be	AUX
app01-6686	37	30	young	young	ADJ
app01-6686	37	31	’s	’s	PART
app01-6686	37	32	modulus	modulus	NOUN
app01-6686	37	33	.	.	PUNCT
app01-6686	38	1	this	this	PRON
app01-6686	38	2	means	mean	VERB
app01-6686	38	3	that	that	SCONJ
app01-6686	38	4	phase	phase	NOUN
app01-6686	38	5	velocity	velocity	NOUN
app01-6686	38	6	is	be	AUX
app01-6686	38	7	directly	directly	ADV
app01-6686	38	8	linked	link	VERB
app01-6686	38	9	to	to	ADP
app01-6686	38	10	the	the	DET
app01-6686	38	11	elastic	elastic	ADJ
app01-6686	38	12	modulus	modulus	NOUN
app01-6686	38	13	,	,	PUNCT
app01-6686	38	14	poisson	poisson	NOUN
app01-6686	38	15	’s	’s	PART
app01-6686	38	16	ratio	ratio	NOUN
app01-6686	38	17	and	and	CCONJ
app01-6686	38	18	density	density	NOUN
app01-6686	38	19	of	of	ADP
app01-6686	38	20	the	the	DET
app01-6686	38	21	material	material	NOUN
app01-6686	38	22	.	.	PUNCT
app01-6686	39	1	however	however	ADV
app01-6686	39	2	,	,	PUNCT
app01-6686	39	3	situation	situation	NOUN
app01-6686	39	4	is	be	AUX
app01-6686	39	5	different	different	ADJ
app01-6686	39	6	in	in	ADP
app01-6686	39	7	coated	coated	ADJ
app01-6686	39	8	materials	material	NOUN
app01-6686	39	9	,	,	PUNCT
app01-6686	39	10	where	where	SCONJ
app01-6686	39	11	the	the	DET
app01-6686	39	12	penetration	penetration	NOUN
app01-6686	39	13	depth	depth	NOUN
app01-6686	39	14	depends	depend	VERB
app01-6686	39	15	on	on	ADP
app01-6686	39	16	frequency	frequency	NOUN
app01-6686	39	17	so	so	SCONJ
app01-6686	39	18	the	the	DET
app01-6686	39	19	phase	phase	NOUN
app01-6686	39	20	velocity	velocity	NOUN
app01-6686	39	21	of	of	ADP
app01-6686	39	22	the	the	DET
app01-6686	39	23	saw	saw	NOUN
app01-6686	39	24	must	must	AUX
app01-6686	39	25	as	as	ADV
app01-6686	39	26	well	well	ADV
app01-6686	39	27	.	.	PUNCT
app01-6686	40	1	this	this	DET
app01-6686	40	2	phenomenon	phenomenon	NOUN
app01-6686	40	3	is	be	AUX
app01-6686	40	4	called	call	VERB
app01-6686	40	5	the	the	DET
app01-6686	40	6	dispersion	dispersion	NOUN
app01-6686	40	7	.	.	PUNCT
app01-6686	41	1	in	in	ADP
app01-6686	41	2	case	case	NOUN
app01-6686	41	3	of	of	ADP
app01-6686	41	4	a	a	DET
app01-6686	41	5	substrate	substrate	NOUN
app01-6686	41	6	with	with	ADP
app01-6686	41	7	low	low	ADJ
app01-6686	41	8	phase	phase	NOUN
app01-6686	41	9	velocity	velocity	NOUN
app01-6686	41	10	coated	coat	VERB
app01-6686	41	11	with	with	ADP
app01-6686	41	12	a	a	DET
app01-6686	41	13	thin	thin	ADJ
app01-6686	41	14	film	film	NOUN
app01-6686	41	15	with	with	ADP
app01-6686	41	16	a	a	DET
app01-6686	41	17	high	high	ADJ
app01-6686	41	18	phase	phase	NOUN
app01-6686	41	19	velocity	velocity	NOUN
app01-6686	41	20	,	,	PUNCT
app01-6686	41	21	then	then	ADV
app01-6686	41	22	the	the	DET
app01-6686	41	23	phase	phase	NOUN
app01-6686	41	24	velocity	velocity	NOUN
app01-6686	41	25	for	for	ADP
app01-6686	41	26	the	the	DET
app01-6686	41	27	film	film	NOUN
app01-6686	41	28	/	/	SYM
app01-6686	41	29	substrate	substrate	NOUN
app01-6686	41	30	system	system	NOUN
app01-6686	41	31	increases	increase	VERB
app01-6686	41	32	with	with	ADP
app01-6686	41	33	frequency	frequency	NOUN
app01-6686	41	34	.	.	PUNCT
app01-6686	42	1	for	for	ADP
app01-6686	42	2	explanation	explanation	NOUN
app01-6686	42	3	let	let	VERB
app01-6686	42	4	’s	’s	PRON
app01-6686	42	5	assume	assume	VERB
app01-6686	42	6	infinite	infinite	ADJ
app01-6686	42	7	substrate	substrate	NOUN
app01-6686	42	8	and	and	CCONJ
app01-6686	42	9	saw	see	VERB
app01-6686	42	10	propagating	propagate	VERB
app01-6686	42	11	across	across	ADP
app01-6686	42	12	the	the	DET
app01-6686	42	13	surface	surface	NOUN
app01-6686	42	14	.	.	PUNCT
app01-6686	43	1	theoretically	theoretically	ADV
app01-6686	43	2	for	for	ADP
app01-6686	43	3	the	the	DET
app01-6686	43	4	wave	wave	NOUN
app01-6686	43	5	with	with	ADP
app01-6686	43	6	frequency	frequency	NOUN
app01-6686	43	7	approaching	approach	VERB
app01-6686	43	8	zero	zero	NUM
app01-6686	43	9	,	,	PUNCT
app01-6686	43	10	the	the	DET
app01-6686	43	11	penetration	penetration	NOUN
app01-6686	43	12	depth	depth	NOUN
app01-6686	43	13	would	would	AUX
app01-6686	43	14	be	be	AUX
app01-6686	43	15	approaching	approach	VERB
app01-6686	43	16	infinity	infinity	NOUN
app01-6686	43	17	.	.	PUNCT
app01-6686	44	1	that	that	SCONJ
app01-6686	44	2	in	in	ADP
app01-6686	44	3	turn	turn	NOUN
app01-6686	44	4	means	mean	VERB
app01-6686	44	5	that	that	SCONJ
app01-6686	44	6	the	the	DET
app01-6686	44	7	contribution	contribution	NOUN
app01-6686	44	8	from	from	ADP
app01-6686	44	9	the	the	DET
app01-6686	44	10	thin	thin	ADJ
app01-6686	44	11	film	film	NOUN
app01-6686	44	12	would	would	AUX
app01-6686	44	13	be	be	AUX
app01-6686	44	14	negligible	negligible	ADJ
app01-6686	44	15	.	.	PUNCT
app01-6686	45	1	on	on	ADP
app01-6686	45	2	the	the	DET
app01-6686	45	3	contrary	contrary	NOUN
app01-6686	45	4	,	,	PUNCT
app01-6686	45	5	if	if	SCONJ
app01-6686	45	6	the	the	DET
app01-6686	45	7	saw	saw	NOUN
app01-6686	45	8	would	would	AUX
app01-6686	45	9	have	have	VERB
app01-6686	45	10	infinitively	infinitively	ADV
app01-6686	45	11	high	high	ADJ
app01-6686	45	12	frequency	frequency	NOUN
app01-6686	45	13	,	,	PUNCT
app01-6686	45	14	then	then	ADV
app01-6686	45	15	the	the	DET
app01-6686	45	16	wave	wave	NOUN
app01-6686	45	17	would	would	AUX
app01-6686	45	18	be	be	AUX
app01-6686	45	19	restricted	restrict	VERB
app01-6686	45	20	only	only	ADV
app01-6686	45	21	to	to	ADP
app01-6686	45	22	the	the	DET
app01-6686	45	23	very	very	ADJ
app01-6686	45	24	top	top	NOUN
app01-6686	45	25	of	of	ADP
app01-6686	45	26	the	the	DET
app01-6686	45	27	sample	sample	NOUN
app01-6686	45	28	,	,	PUNCT
app01-6686	45	29	in	in	ADP
app01-6686	45	30	other	other	ADJ
app01-6686	45	31	words	word	NOUN
app01-6686	45	32	the	the	DET
app01-6686	45	33	wave	wave	NOUN
app01-6686	45	34	would	would	AUX
app01-6686	45	35	propagate	propagate	VERB
app01-6686	45	36	only	only	ADV
app01-6686	45	37	in	in	ADP
app01-6686	45	38	the	the	DET
app01-6686	45	39	film	film	NOUN
app01-6686	45	40	according	accord	VERB
app01-6686	45	41	to	to	ADP
app01-6686	45	42	the	the	DET
app01-6686	45	43	eq	eq	NOUN
app01-6686	45	44	.	.	PUNCT
app01-6686	46	1	(	(	PUNCT
app01-6686	46	2	1	1	NUM
app01-6686	46	3	)	)	PUNCT
app01-6686	46	4	.	.	PUNCT
app01-6686	47	1	the	the	DET
app01-6686	47	2	precise	precise	ADJ
app01-6686	47	3	relation	relation	NOUN
app01-6686	47	4	between	between	ADP
app01-6686	47	5	the	the	DET
app01-6686	47	6	frequency	frequency	NOUN
app01-6686	47	7	f	f	NOUN
app01-6686	47	8	and	and	CCONJ
app01-6686	47	9	phase	phase	NOUN
app01-6686	47	10	velocity	velocity	NOUN
app01-6686	47	11	v	v	NOUN
app01-6686	47	12	of	of	ADP
app01-6686	47	13	the	the	DET
app01-6686	47	14	saw	saw	NOUN
app01-6686	47	15	on	on	ADP
app01-6686	47	16	coated	coated	ADJ
app01-6686	47	17	materials	material	NOUN
app01-6686	47	18	depends	depend	VERB
app01-6686	47	19	on	on	ADP
app01-6686	47	20	elastic	elastic	ADJ
app01-6686	47	21	properties	property	NOUN
app01-6686	47	22	and	and	CCONJ
app01-6686	47	23	densities	density	NOUN
app01-6686	47	24	of	of	ADP
app01-6686	47	25	both	both	CCONJ
app01-6686	47	26	the	the	DET
app01-6686	47	27	substrate	substrate	NOUN
app01-6686	47	28	and	and	CCONJ
app01-6686	47	29	the	the	DET
app01-6686	47	30	thin	thin	ADJ
app01-6686	47	31	film	film	NOUN
app01-6686	47	32	as	as	ADV
app01-6686	47	33	well	well	ADV
app01-6686	47	34	as	as	ADP
app01-6686	47	35	on	on	ADP
app01-6686	47	36	the	the	DET
app01-6686	47	37	thickness	thickness	NOUN
app01-6686	47	38	of	of	ADP
app01-6686	47	39	the	the	DET
app01-6686	47	40	film	film	NOUN
app01-6686	47	41	.	.	PUNCT
app01-6686	48	1	this	this	PRON
app01-6686	48	2	means	mean	VERB
app01-6686	48	3	that	that	SCONJ
app01-6686	48	4	if	if	SCONJ
app01-6686	48	5	the	the	DET
app01-6686	48	6	dispersion	dispersion	NOUN
app01-6686	48	7	curve	curve	NOUN
app01-6686	48	8	and	and	CCONJ
app01-6686	48	9	some	some	PRON
app01-6686	48	10	of	of	ADP
app01-6686	48	11	the	the	DET
app01-6686	48	12	variables	variable	NOUN
app01-6686	48	13	are	be	AUX
app01-6686	48	14	known	know	VERB
app01-6686	48	15	,	,	PUNCT
app01-6686	48	16	the	the	DET
app01-6686	48	17	rest	rest	NOUN
app01-6686	48	18	of	of	ADP
app01-6686	48	19	them	they	PRON
app01-6686	48	20	can	can	AUX
app01-6686	48	21	be	be	AUX
app01-6686	48	22	calculated	calculate	VERB
app01-6686	48	23	.	.	PUNCT
app01-6686	49	1	in	in	ADP
app01-6686	49	2	order	order	NOUN
app01-6686	49	3	to	to	PART
app01-6686	49	4	get	get	VERB
app01-6686	49	5	the	the	DET
app01-6686	49	6	dispersion	dispersion	NOUN
app01-6686	49	7	curve	curve	VERB
app01-6686	49	8	the	the	DET
app01-6686	49	9	saw	saw	NOUN
app01-6686	49	10	must	must	AUX
app01-6686	49	11	be	be	AUX
app01-6686	49	12	detected	detect	VERB
app01-6686	49	13	in	in	ADP
app01-6686	49	14	various	various	ADJ
app01-6686	49	15	known	know	VERB
app01-6686	49	16	distances	distance	NOUN
app01-6686	49	17	from	from	ADP
app01-6686	49	18	the	the	DET
app01-6686	49	19	point	point	NOUN
app01-6686	49	20	of	of	ADP
app01-6686	49	21	incidence	incidence	NOUN
app01-6686	49	22	using	use	VERB
app01-6686	49	23	a	a	DET
app01-6686	49	24	pvdf	pvdf	NOUN
app01-6686	49	25	foil	foil	NOUN
app01-6686	49	26	which	which	PRON
app01-6686	49	27	transforms	transform	VERB
app01-6686	49	28	the	the	DET
app01-6686	49	29	mechanical	mechanical	ADJ
app01-6686	49	30	vibrations	vibration	NOUN
app01-6686	49	31	into	into	ADP
app01-6686	49	32	electric	electric	ADJ
app01-6686	49	33	signal	signal	NOUN
app01-6686	49	34	,	,	PUNCT
app01-6686	49	35	see	see	VERB
app01-6686	49	36	principal	principal	ADJ
app01-6686	49	37	scheme	scheme	NOUN
app01-6686	49	38	of	of	ADP
app01-6686	49	39	law	law	NOUN
app01-6686	49	40	method	method	NOUN
app01-6686	49	41	(	(	PUNCT
app01-6686	49	42	instrument	instrument	NOUN
app01-6686	49	43	)	)	PUNCT
app01-6686	49	44	in	in	ADP
app01-6686	49	45	figure	figure	NOUN
app01-6686	49	46	2	2	NUM
app01-6686	49	47	.	.	PUNCT
app01-6686	50	1	the	the	DET
app01-6686	50	2	dispersion	dispersion	NOUN
app01-6686	50	3	curve	curve	NOUN
app01-6686	50	4	is	be	AUX
app01-6686	50	5	then	then	ADV
app01-6686	50	6	calculated	calculate	VERB
app01-6686	50	7	using	use	VERB
app01-6686	50	8	the	the	DET
app01-6686	50	9	following	follow	VERB
app01-6686	50	10	equation	equation	NOUN
app01-6686	50	11	:	:	PUNCT
app01-6686	50	12	ν(f	ν(f	PROPN
app01-6686	50	13	)	)	PUNCT
app01-6686	50	14	=	=	SYM
app01-6686	51	1	2πf	2πf	NOUN
app01-6686	51	2	(	(	PUNCT
app01-6686	51	3	x2	x2	INTJ
app01-6686	51	4	−	−	PROPN
app01-6686	51	5	x1	x1	PROPN
app01-6686	51	6	)	)	PUNCT
app01-6686	51	7	φ2(f	φ2(f	ADP
app01-6686	51	8	)	)	PUNCT
app01-6686	51	9	−	−	PROPN
app01-6686	51	10	φ1(f	φ1(f	PROPN
app01-6686	51	11	)	)	PUNCT
app01-6686	51	12	,	,	PUNCT
app01-6686	51	13	(	(	PUNCT
app01-6686	51	14	2	2	X
app01-6686	51	15	)	)	PUNCT
app01-6686	51	16	where	where	SCONJ
app01-6686	51	17	x1	x1	PROPN
app01-6686	51	18	and	and	CCONJ
app01-6686	51	19	x2	x2	PROPN
app01-6686	51	20	are	be	AUX
app01-6686	51	21	two	two	NUM
app01-6686	51	22	different	different	ADJ
app01-6686	51	23	distances	distance	NOUN
app01-6686	51	24	between	between	ADP
app01-6686	51	25	the	the	DET
app01-6686	51	26	sensor	sensor	NOUN
app01-6686	51	27	and	and	CCONJ
app01-6686	51	28	the	the	DET
app01-6686	51	29	point	point	NOUN
app01-6686	51	30	of	of	ADP
app01-6686	51	31	incidence	incidence	NOUN
app01-6686	51	32	,	,	PUNCT
app01-6686	51	33	φ1(f	φ1(f	ADJ
app01-6686	51	34	)	)	PUNCT
app01-6686	51	35	and	and	CCONJ
app01-6686	51	36	φ2(f	φ2(f	PROPN
app01-6686	51	37	)	)	PUNCT
app01-6686	51	38	are	be	AUX
app01-6686	51	39	the	the	DET
app01-6686	51	40	phase	phase	NOUN
app01-6686	51	41	values	value	NOUN
app01-6686	51	42	of	of	ADP
app01-6686	51	43	the	the	DET
app01-6686	51	44	surface	surface	NOUN
app01-6686	51	45	wave	wave	NOUN
app01-6686	51	46	frequency	frequency	PROPN
app01-6686	51	47	f	f	PROPN
app01-6686	51	48	.	.	PUNCT
app01-6686	52	1	the	the	DET
app01-6686	52	2	whole	whole	ADJ
app01-6686	52	3	experimental	experimental	ADJ
app01-6686	52	4	set	set	NOUN
app01-6686	52	5	-	-	PUNCT
app01-6686	52	6	up	up	NOUN
app01-6686	52	7	can	can	AUX
app01-6686	52	8	be	be	AUX
app01-6686	52	9	seen	see	VERB
app01-6686	52	10	in	in	ADP
app01-6686	52	11	figure	figure	NOUN
app01-6686	52	12	2	2	NUM
app01-6686	52	13	.	.	PUNCT
app01-6686	52	14	substrate	substrate	NOUN
app01-6686	52	15	laser	laser	NOUN
app01-6686	52	16	oscilloscope	oscilloscope	NOUN
app01-6686	52	17	saw	see	VERB
app01-6686	52	18	v	v	ADP
app01-6686	52	19	pvdf	pvdf	PROPN
app01-6686	52	20	foil	foil	NOUN
app01-6686	52	21	substrate	substrate	NOUN
app01-6686	52	22	figure	figure	NOUN
app01-6686	52	23	2	2	NUM
app01-6686	52	24	.	.	PUNCT
app01-6686	52	25	schematic	schematic	ADJ
app01-6686	52	26	representation	representation	NOUN
app01-6686	52	27	of	of	ADP
app01-6686	52	28	the	the	DET
app01-6686	52	29	law	law	NOUN
app01-6686	52	30	set	set	NOUN
app01-6686	52	31	-	-	PUNCT
app01-6686	52	32	up	up	NOUN
app01-6686	52	33	.	.	PUNCT
app01-6686	53	1	1.2	1.2	NUM
app01-6686	53	2	.	.	PUNCT
app01-6686	54	1	experimental	experimental	ADJ
app01-6686	54	2	details	detail	NOUN
app01-6686	54	3	the	the	DET
app01-6686	54	4	experiments	experiment	NOUN
app01-6686	54	5	were	be	AUX
app01-6686	54	6	performed	perform	VERB
app01-6686	54	7	on	on	ADP
app01-6686	54	8	a	a	DET
app01-6686	54	9	laser	laser	NOUN
app01-6686	54	10	acoustic	acoustic	ADJ
app01-6686	54	11	test	test	NOUN
app01-6686	54	12	system	system	NOUN
app01-6686	54	13	lawave	lawave	NOUN
app01-6686	54	14	(	(	PUNCT
app01-6686	54	15	fraunhofer	fraunhofer	PROPN
app01-6686	54	16	institute	institute	PROPN
app01-6686	54	17	,	,	PUNCT
app01-6686	54	18	dresden	dresden	PROPN
app01-6686	54	19	,	,	PUNCT
app01-6686	54	20	germany	germany	PROPN
app01-6686	54	21	)	)	PUNCT
app01-6686	54	22	.	.	PUNCT
app01-6686	55	1	acoustic	acoustic	ADJ
app01-6686	55	2	waves	wave	NOUN
app01-6686	55	3	with	with	ADP
app01-6686	55	4	frequency	frequency	NOUN
app01-6686	55	5	ranging	range	VERB
app01-6686	55	6	from	from	ADP
app01-6686	55	7	∼	∼	NOUN
app01-6686	55	8	1	1	NUM
app01-6686	55	9	mhz	mhz	NOUN
app01-6686	55	10	up	up	ADP
app01-6686	55	11	to	to	PART
app01-6686	55	12	∼	∼	NOUN
app01-6686	55	13	250	250	NUM
app01-6686	55	14	mhz	mhz	NOUN
app01-6686	55	15	were	be	AUX
app01-6686	55	16	generated	generate	VERB
app01-6686	55	17	using	use	VERB
app01-6686	55	18	a	a	DET
app01-6686	55	19	337	337	NUM
app01-6686	55	20	nm	nm	ADJ
app01-6686	55	21	n2	n2	ADJ
app01-6686	55	22	laser	laser	NOUN
app01-6686	55	23	with	with	ADP
app01-6686	55	24	a	a	DET
app01-6686	55	25	0.5	0.5	NUM
app01-6686	55	26	ns	ns	NUM
app01-6686	55	27	pulse	pulse	NOUN
app01-6686	55	28	duration	duration	NOUN
app01-6686	55	29	and	and	CCONJ
app01-6686	55	30	58	58	NUM
app01-6686	55	31	vol	vol	NOUN
app01-6686	55	32	.	.	PUNCT
app01-6686	56	1	27/2020	27/2020	NUM
app01-6686	56	2	laser	laser	NOUN
app01-6686	56	3	-	-	PUNCT
app01-6686	56	4	induced	induce	VERB
app01-6686	56	5	surface	surface	NOUN
app01-6686	56	6	acoustic	acoustic	ADJ
app01-6686	56	7	waves	wave	NOUN
app01-6686	56	8	for	for	ADP
app01-6686	56	9	thin	thin	ADJ
app01-6686	56	10	film	film	NOUN
app01-6686	56	11	characterization	characterization	NOUN
app01-6686	56	12	35	35	NUM
app01-6686	56	13	93	93	NUM
app01-6686	56	14	142	142	NUM
app01-6686	56	15	163	163	NUM
app01-6686	56	16	34	34	NUM
app01-6686	56	17	90	90	NUM
app01-6686	56	18	136	136	NUM
app01-6686	56	19	156	156	NUM
app01-6686	56	20	0	0	NUM
app01-6686	56	21	50	50	NUM
app01-6686	56	22	100	100	NUM
app01-6686	56	23	150	150	NUM
app01-6686	56	24	200	200	NUM
app01-6686	56	25	1	1	NUM
app01-6686	56	26	min	min	NOUN
app01-6686	56	27	60	60	NUM
app01-6686	56	28	min	min	NOUN
app01-6686	56	29	120	120	NUM
app01-6686	56	30	min	min	PROPN
app01-6686	56	31	180	180	NUM
app01-6686	56	32	min	min	PROPN
app01-6686	56	33	fi	fi	PROPN
app01-6686	56	34	lm	lm	INTJ
app01-6686	56	35	t	t	PROPN
app01-6686	56	36	h	h	NOUN
app01-6686	57	1	ic	ic	PROPN
app01-6686	57	2	kn	kn	PROPN
app01-6686	57	3	es	es	X
app01-6686	57	4	s	s	PROPN
app01-6686	58	1	[	[	X
app01-6686	58	2	n	n	NOUN
app01-6686	58	3	m	m	PRON
app01-6686	58	4	]	]	PUNCT
app01-6686	58	5	law	law	NOUN
app01-6686	58	6	optical	optical	ADJ
app01-6686	58	7	figure	figure	NOUN
app01-6686	58	8	3	3	NUM
app01-6686	58	9	.	.	PUNCT
app01-6686	58	10	film	film	NOUN
app01-6686	58	11	thickness	thickness	NOUN
app01-6686	58	12	of	of	ADP
app01-6686	58	13	samples	sample	NOUN
app01-6686	58	14	from	from	ADP
app01-6686	58	15	dry	dry	ADJ
app01-6686	58	16	thermal	thermal	ADJ
app01-6686	58	17	growth	growth	NOUN
app01-6686	58	18	measured	measure	VERB
app01-6686	58	19	by	by	ADP
app01-6686	58	20	law	law	NOUN
app01-6686	58	21	compared	compare	VERB
app01-6686	58	22	to	to	ADP
app01-6686	58	23	results	result	NOUN
app01-6686	58	24	from	from	ADP
app01-6686	58	25	optical	optical	ADJ
app01-6686	58	26	method	method	NOUN
app01-6686	58	27	.	.	PUNCT
app01-6686	59	1	400	400	NUM
app01-6686	59	2	µj	µj	INTJ
app01-6686	59	3	pulse	pulse	NOUN
app01-6686	59	4	energy	energy	NOUN
app01-6686	59	5	.	.	PUNCT
app01-6686	60	1	the	the	DET
app01-6686	60	2	signal	signal	NOUN
app01-6686	60	3	from	from	ADP
app01-6686	60	4	the	the	DET
app01-6686	60	5	pvdf	pvdf	PROPN
app01-6686	60	6	foil	foil	NOUN
app01-6686	60	7	was	be	AUX
app01-6686	60	8	averaged	average	VERB
app01-6686	60	9	from	from	ADP
app01-6686	60	10	64	64	NUM
app01-6686	60	11	measurements	measurement	NOUN
app01-6686	60	12	for	for	ADP
app01-6686	60	13	each	each	PRON
app01-6686	60	14	of	of	ADP
app01-6686	60	15	the	the	DET
app01-6686	60	16	5	5	NUM
app01-6686	60	17	-	-	SYM
app01-6686	60	18	7	7	NUM
app01-6686	60	19	measuring	measuring	NOUN
app01-6686	60	20	points	point	NOUN
app01-6686	60	21	along	along	ADP
app01-6686	60	22	the	the	DET
app01-6686	60	23	15	15	NUM
app01-6686	60	24	mm	mm	NOUN
app01-6686	60	25	and	and	CCONJ
app01-6686	60	26	20	20	NUM
app01-6686	60	27	mm	mm	NOUN
app01-6686	60	28	measuring	measuring	NOUN
app01-6686	60	29	path	path	NOUN
app01-6686	60	30	for	for	ADP
app01-6686	60	31	glass	glass	NOUN
app01-6686	60	32	and	and	CCONJ
app01-6686	60	33	silicon	silicon	NOUN
app01-6686	60	34	substrates	substrate	NOUN
app01-6686	60	35	respectively	respectively	ADV
app01-6686	60	36	.	.	PUNCT
app01-6686	61	1	all	all	DET
app01-6686	61	2	measurements	measurement	NOUN
app01-6686	61	3	were	be	AUX
app01-6686	61	4	done	do	VERB
app01-6686	61	5	at	at	ADP
app01-6686	61	6	a	a	DET
app01-6686	61	7	room	room	NOUN
app01-6686	61	8	temperature	temperature	NOUN
app01-6686	61	9	.	.	PUNCT
app01-6686	62	1	2	2	X
app01-6686	62	2	.	.	X
app01-6686	62	3	results	result	NOUN
app01-6686	62	4	and	and	CCONJ
app01-6686	62	5	discussion	discussion	NOUN
app01-6686	62	6	2.1	2.1	NUM
app01-6686	62	7	.	.	PUNCT
app01-6686	63	1	thin	thin	ADJ
app01-6686	63	2	film	film	NOUN
app01-6686	63	3	characterization	characterization	NOUN
app01-6686	63	4	–	–	PUNCT
app01-6686	63	5	film	film	NOUN
app01-6686	63	6	thickness	thickness	NOUN
app01-6686	63	7	evaluation	evaluation	NOUN
app01-6686	63	8	silicon	silicon	NOUN
app01-6686	63	9	dioxide	dioxide	NOUN
app01-6686	63	10	thin	thin	ADJ
app01-6686	63	11	films	film	NOUN
app01-6686	63	12	on	on	ADP
app01-6686	63	13	si(100	si(100	NOUN
app01-6686	63	14	)	)	PUNCT
app01-6686	63	15	were	be	AUX
app01-6686	63	16	used	use	VERB
app01-6686	63	17	for	for	ADP
app01-6686	63	18	the	the	DET
app01-6686	63	19	film	film	NOUN
app01-6686	63	20	thickness	thickness	NOUN
app01-6686	63	21	characterization	characterization	NOUN
app01-6686	63	22	.	.	PUNCT
app01-6686	64	1	it	it	PRON
app01-6686	64	2	is	be	AUX
app01-6686	64	3	well	well	ADV
app01-6686	64	4	known	know	VERB
app01-6686	64	5	that	that	SCONJ
app01-6686	64	6	high	high	ADJ
app01-6686	64	7	quality	quality	NOUN
app01-6686	64	8	sio2	sio2	NOUN
app01-6686	64	9	films	film	NOUN
app01-6686	64	10	are	be	AUX
app01-6686	64	11	prepared	prepare	VERB
app01-6686	64	12	by	by	ADP
app01-6686	64	13	dry	dry	ADJ
app01-6686	64	14	thermal	thermal	ADJ
app01-6686	64	15	growth	growth	NOUN
app01-6686	64	16	which	which	PRON
app01-6686	64	17	is	be	AUX
app01-6686	64	18	considerably	considerably	ADV
app01-6686	64	19	slower	slow	ADJ
app01-6686	64	20	than	than	ADP
app01-6686	64	21	for	for	ADP
app01-6686	64	22	example	example	NOUN
app01-6686	64	23	wet	wet	ADJ
app01-6686	64	24	thermal	thermal	ADJ
app01-6686	64	25	growth	growth	NOUN
app01-6686	64	26	but	but	CCONJ
app01-6686	64	27	yields	yield	NOUN
app01-6686	64	28	high	high	ADJ
app01-6686	64	29	quality	quality	NOUN
app01-6686	64	30	films	film	NOUN
app01-6686	64	31	–	–	PUNCT
app01-6686	64	32	the	the	DET
app01-6686	64	33	oxide	oxide	NOUN
app01-6686	64	34	film	film	NOUN
app01-6686	64	35	is	be	AUX
app01-6686	64	36	more	more	ADV
app01-6686	64	37	uniform	uniform	ADJ
app01-6686	64	38	and	and	CCONJ
app01-6686	64	39	its	its	PRON
app01-6686	64	40	density	density	NOUN
app01-6686	64	41	is	be	AUX
app01-6686	64	42	higher	high	ADJ
app01-6686	64	43	.	.	PUNCT
app01-6686	65	1	this	this	PRON
app01-6686	65	2	allows	allow	VERB
app01-6686	65	3	for	for	ADP
app01-6686	65	4	more	more	ADV
app01-6686	65	5	precise	precise	ADJ
app01-6686	65	6	and	and	CCONJ
app01-6686	65	7	reliable	reliable	ADJ
app01-6686	65	8	comparison	comparison	NOUN
app01-6686	65	9	of	of	ADP
app01-6686	65	10	law	law	NOUN
app01-6686	65	11	and	and	CCONJ
app01-6686	65	12	other	other	ADJ
app01-6686	65	13	methods	method	NOUN
app01-6686	65	14	as	as	ADP
app01-6686	65	15	these	these	DET
app01-6686	65	16	sio2	sio2	PROPN
app01-6686	65	17	films	film	NOUN
app01-6686	65	18	represent	represent	VERB
app01-6686	65	19	an	an	DET
app01-6686	65	20	ideal	ideal	ADJ
app01-6686	65	21	model	model	NOUN
app01-6686	65	22	system	system	NOUN
app01-6686	65	23	.	.	PUNCT
app01-6686	66	1	the	the	DET
app01-6686	66	2	si	si	PROPN
app01-6686	66	3	substrates	substrate	NOUN
app01-6686	66	4	were	be	AUX
app01-6686	66	5	oxidized	oxidize	VERB
app01-6686	66	6	at	at	ADP
app01-6686	66	7	1000	1000	NUM
app01-6686	66	8	◦	◦	NOUN
app01-6686	66	9	c	c	NOUN
app01-6686	66	10	in	in	ADP
app01-6686	66	11	quartz	quartz	NOUN
app01-6686	66	12	tube	tube	NOUN
app01-6686	66	13	for	for	ADP
app01-6686	66	14	1	1	NUM
app01-6686	66	15	,	,	PUNCT
app01-6686	66	16	60	60	NUM
app01-6686	66	17	,	,	PUNCT
app01-6686	66	18	120	120	NUM
app01-6686	66	19	and	and	CCONJ
app01-6686	66	20	180	180	NUM
app01-6686	66	21	minutes	minute	NOUN
app01-6686	66	22	,	,	PUNCT
app01-6686	66	23	the	the	DET
app01-6686	66	24	heating	heating	NOUN
app01-6686	66	25	rate	rate	NOUN
app01-6686	66	26	was	be	AUX
app01-6686	66	27	20	20	NUM
app01-6686	66	28	◦	◦	NOUN
app01-6686	66	29	c	c	NOUN
app01-6686	66	30	/	/	SYM
app01-6686	66	31	min	min	NOUN
app01-6686	66	32	.	.	PUNCT
app01-6686	67	1	the	the	DET
app01-6686	67	2	resulting	result	VERB
app01-6686	67	3	film	film	NOUN
app01-6686	67	4	thickness	thickness	NOUN
app01-6686	67	5	can	can	AUX
app01-6686	67	6	be	be	AUX
app01-6686	67	7	seen	see	VERB
app01-6686	67	8	in	in	ADP
app01-6686	67	9	figure	figure	NOUN
app01-6686	67	10	3	3	NUM
app01-6686	67	11	.	.	PUNCT
app01-6686	68	1	the	the	DET
app01-6686	68	2	optical	optical	ADJ
app01-6686	68	3	reference	reference	NOUN
app01-6686	68	4	measurement	measurement	NOUN
app01-6686	68	5	of	of	ADP
app01-6686	68	6	the	the	DET
app01-6686	68	7	film	film	NOUN
app01-6686	68	8	thickness	thickness	NOUN
app01-6686	68	9	was	be	AUX
app01-6686	68	10	performed	perform	VERB
app01-6686	68	11	on	on	ADP
app01-6686	68	12	spectral	spectral	ADJ
app01-6686	68	13	reflectometer	reflectometer	NOUN
app01-6686	68	14	calibrated	calibrate	VERB
app01-6686	68	15	on	on	ADP
app01-6686	68	16	polished	polished	ADJ
app01-6686	68	17	silicon	silicon	NOUN
app01-6686	68	18	wafer	wafer	NOUN
app01-6686	68	19	with	with	ADP
app01-6686	68	20	known	know	VERB
app01-6686	68	21	profile	profile	NOUN
app01-6686	68	22	of	of	ADP
app01-6686	68	23	spectral	spectral	ADJ
app01-6686	68	24	reflectance	reflectance	NOUN
app01-6686	68	25	.	.	PUNCT
app01-6686	69	1	results	result	NOUN
app01-6686	69	2	from	from	ADP
app01-6686	69	3	both	both	DET
app01-6686	69	4	methods	method	NOUN
app01-6686	69	5	are	be	AUX
app01-6686	69	6	similar	similar	ADJ
app01-6686	69	7	with	with	ADP
app01-6686	69	8	the	the	DET
app01-6686	69	9	results	result	NOUN
app01-6686	69	10	from	from	ADP
app01-6686	69	11	law	law	NOUN
app01-6686	69	12	being	be	AUX
app01-6686	69	13	slightly	slightly	ADV
app01-6686	69	14	higher	high	ADJ
app01-6686	69	15	in	in	ADP
app01-6686	69	16	all	all	DET
app01-6686	69	17	cases	case	NOUN
app01-6686	69	18	.	.	PUNCT
app01-6686	70	1	the	the	DET
app01-6686	70	2	highest	high	ADJ
app01-6686	70	3	percentage	percentage	NOUN
app01-6686	70	4	difference	difference	NOUN
app01-6686	70	5	(	(	PUNCT
app01-6686	70	6	4.6	4.6	NUM
app01-6686	70	7	%	%	NOUN
app01-6686	70	8	)	)	PUNCT
app01-6686	70	9	is	be	AUX
app01-6686	70	10	for	for	ADP
app01-6686	70	11	the	the	DET
app01-6686	70	12	thinnest	thin	ADJ
app01-6686	70	13	sample	sample	NOUN
app01-6686	70	14	.	.	PUNCT
app01-6686	71	1	the	the	DET
app01-6686	71	2	standard	standard	ADJ
app01-6686	71	3	deviation	deviation	NOUN
app01-6686	71	4	for	for	ADP
app01-6686	71	5	law	law	NOUN
app01-6686	71	6	is	be	AUX
app01-6686	71	7	very	very	ADV
app01-6686	71	8	small	small	ADJ
app01-6686	71	9	.	.	PUNCT
app01-6686	72	1	thus	thus	ADV
app01-6686	72	2	,	,	PUNCT
app01-6686	72	3	it	it	PRON
app01-6686	72	4	may	may	AUX
app01-6686	72	5	be	be	AUX
app01-6686	72	6	concluded	conclude	VERB
app01-6686	72	7	that	that	SCONJ
app01-6686	72	8	law	law	NOUN
app01-6686	72	9	gives	give	VERB
app01-6686	72	10	reasonable	reasonable	ADJ
app01-6686	72	11	results	result	NOUN
app01-6686	72	12	for	for	ADP
app01-6686	72	13	film	film	NOUN
app01-6686	72	14	thickness	thickness	NOUN
app01-6686	72	15	if	if	SCONJ
app01-6686	72	16	young	young	ADJ
app01-6686	72	17	’s	’s	PART
app01-6686	72	18	modulus	modulus	NOUN
app01-6686	72	19	and	and	CCONJ
app01-6686	72	20	density	density	NOUN
app01-6686	72	21	are	be	AUX
app01-6686	72	22	uniform	uniform	ADJ
app01-6686	72	23	and	and	CCONJ
app01-6686	72	24	known	know	VERB
app01-6686	72	25	.	.	PUNCT
app01-6686	73	1	the	the	DET
app01-6686	73	2	native	native	PROPN
app01-6686	73	3	sio2	sio2	PROPN
app01-6686	73	4	oxide	oxide	NOUN
app01-6686	73	5	layer	layer	NOUN
app01-6686	73	6	(	(	PUNCT
app01-6686	73	7	grown	grow	VERB
app01-6686	73	8	at	at	ADP
app01-6686	73	9	room	room	NOUN
app01-6686	73	10	temperature	temperature	NOUN
app01-6686	73	11	)	)	PUNCT
app01-6686	73	12	was	be	AUX
app01-6686	73	13	measured	measure	VERB
app01-6686	73	14	as	as	ADV
app01-6686	73	15	well	well	ADV
app01-6686	73	16	in	in	ADP
app01-6686	73	17	order	order	NOUN
app01-6686	73	18	to	to	PART
app01-6686	73	19	find	find	VERB
app01-6686	73	20	out	out	ADP
app01-6686	73	21	how	how	SCONJ
app01-6686	73	22	accurate	accurate	ADJ
app01-6686	73	23	can	can	AUX
app01-6686	73	24	law	law	NOUN
app01-6686	73	25	be	be	AUX
app01-6686	73	26	for	for	ADP
app01-6686	73	27	very	very	ADV
app01-6686	73	28	thin	thin	ADJ
app01-6686	73	29	films	film	NOUN
app01-6686	73	30	.	.	PUNCT
app01-6686	74	1	its	its	PRON
app01-6686	74	2	thickness	thickness	NOUN
app01-6686	74	3	,	,	PUNCT
app01-6686	74	4	when	when	SCONJ
app01-6686	74	5	kept	keep	VERB
app01-6686	74	6	in	in	ADP
app01-6686	74	7	dry	dry	ADJ
app01-6686	74	8	pure	pure	ADJ
app01-6686	74	9	oxygen	oxygen	NOUN
app01-6686	74	10	,	,	PUNCT
app01-6686	74	11	is	be	AUX
app01-6686	74	12	around	around	ADP
app01-6686	74	13	∼1	∼1	PROPN
app01-6686	74	14	nm	nm	NOUN
app01-6686	75	1	[	[	X
app01-6686	75	2	9	9	NUM
app01-6686	75	3	]	]	PUNCT
app01-6686	75	4	,	,	PUNCT
app01-6686	75	5	but	but	CCONJ
app01-6686	75	6	thickness	thickness	NOUN
app01-6686	75	7	around	around	ADV
app01-6686	75	8	1.5	1.5	NUM
app01-6686	75	9	-	-	SYM
app01-6686	75	10	2.5	2.5	NUM
app01-6686	75	11	nm	nm	NOUN
app01-6686	75	12	can	can	AUX
app01-6686	75	13	be	be	AUX
app01-6686	75	14	expected	expect	VERB
app01-6686	75	15	when	when	SCONJ
app01-6686	75	16	exposed	expose	VERB
app01-6686	75	17	to	to	ADP
app01-6686	75	18	air	air	NOUN
app01-6686	75	19	depending	depend	VERB
app01-6686	75	20	on	on	ADP
app01-6686	75	21	the	the	DET
app01-6686	75	22	temperature	temperature	NOUN
app01-6686	75	23	and	and	CCONJ
app01-6686	75	24	humidity	humidity	NOUN
app01-6686	75	25	with	with	ADP
app01-6686	75	26	2.1	2.1	NUM
app01-6686	75	27	nm	nm	NOUN
app01-6686	75	28	given	give	VERB
app01-6686	75	29	in	in	ADP
app01-6686	75	30	[	[	NOUN
app01-6686	75	31	9	9	NUM
app01-6686	75	32	]	]	PUNCT
app01-6686	75	33	.	.	PUNCT
app01-6686	76	1	since	since	SCONJ
app01-6686	76	2	law	law	NOUN
app01-6686	76	3	is	be	AUX
app01-6686	76	4	very	very	ADV
app01-6686	76	5	sensitive	sensitive	ADJ
app01-6686	76	6	to	to	ADP
app01-6686	76	7	the	the	DET
app01-6686	76	8	top	top	ADJ
app01-6686	76	9	surface	surface	NOUN
app01-6686	76	10	conditions	condition	NOUN
app01-6686	76	11	as	as	ADV
app01-6686	76	12	well	well	ADV
app01-6686	76	13	as	as	ADP
app01-6686	76	14	presence	presence	NOUN
app01-6686	76	15	of	of	ADP
app01-6686	76	16	(	(	PUNCT
app01-6686	76	17	sub)surface	sub)surface	NOUN
app01-6686	76	18	flaws	flaw	NOUN
app01-6686	76	19	[	[	X
app01-6686	76	20	10	10	NUM
app01-6686	76	21	]	]	PUNCT
app01-6686	76	22	and	and	CCONJ
app01-6686	76	23	any	any	DET
app01-6686	76	24	structural	structural	ADJ
app01-6686	76	25	imperfections	imperfection	NOUN
app01-6686	76	26	,	,	PUNCT
app01-6686	76	27	different	different	ADJ
app01-6686	76	28	si(100	si(100	NOUN
app01-6686	76	29	)	)	PUNCT
app01-6686	76	30	wafers	wafer	NOUN
app01-6686	76	31	of	of	ADP
app01-6686	76	32	the	the	DET
app01-6686	76	33	same	same	ADJ
app01-6686	76	34	type	type	NOUN
app01-6686	76	35	and	and	CCONJ
app01-6686	76	36	doping	dope	VERB
app01-6686	76	37	65	65	NUM
app01-6686	76	38	67	67	NUM
app01-6686	76	39	65	65	NUM
app01-6686	76	40	66	66	NUM
app01-6686	76	41	101	101	NUM
app01-6686	76	42	85	85	NUM
app01-6686	76	43	67	67	NUM
app01-6686	76	44	68	68	NUM
app01-6686	76	45	0	0	NUM
app01-6686	76	46	20	20	NUM
app01-6686	76	47	40	40	NUM
app01-6686	76	48	60	60	NUM
app01-6686	76	49	80	80	NUM
app01-6686	76	50	100	100	NUM
app01-6686	76	51	120	120	NUM
app01-6686	76	52	34	34	NUM
app01-6686	76	53	nm	nm	NUM
app01-6686	76	54	90	90	NUM
app01-6686	76	55	nm	nm	NUM
app01-6686	76	56	136	136	NUM
app01-6686	76	57	nm	nm	NOUN
app01-6686	76	58	156	156	NUM
app01-6686	76	59	nm	nm	INTJ
app01-6686	76	60	yo	yo	NOUN
app01-6686	76	61	u	u	NOUN
app01-6686	76	62	n	n	DET
app01-6686	76	63	g	g	NOUN
app01-6686	76	64	’	'	PUNCT
app01-6686	76	65	s	s	PART
app01-6686	76	66	m	m	NOUN
app01-6686	76	67	o	o	NOUN
app01-6686	76	68	d	d	X
app01-6686	76	69	u	u	X
app01-6686	76	70	lu	lu	NOUN
app01-6686	76	71	s	s	VERB
app01-6686	77	1	[	[	X
app01-6686	77	2	g	g	X
app01-6686	77	3	p	p	NOUN
app01-6686	77	4	a	a	DET
app01-6686	77	5	]	]	X
app01-6686	77	6	law	law	NOUN
app01-6686	77	7	nanoindentation	nanoindentation	NOUN
app01-6686	77	8	figure	figure	NOUN
app01-6686	77	9	4	4	NUM
app01-6686	77	10	.	.	PUNCT
app01-6686	78	1	young	young	PROPN
app01-6686	78	2	’s	’s	PART
app01-6686	78	3	modulus	modulus	NOUN
app01-6686	78	4	of	of	ADP
app01-6686	78	5	sio2	sio2	PROPN
app01-6686	78	6	thin	thin	ADJ
app01-6686	78	7	films	film	NOUN
app01-6686	78	8	with	with	ADP
app01-6686	78	9	different	different	ADJ
app01-6686	78	10	thickness	thickness	NOUN
app01-6686	78	11	measured	measure	VERB
app01-6686	78	12	by	by	ADP
app01-6686	78	13	law	law	NOUN
app01-6686	78	14	and	and	CCONJ
app01-6686	78	15	nanoindentation	nanoindentation	NOUN
app01-6686	78	16	.	.	PUNCT
app01-6686	79	1	were	be	AUX
app01-6686	79	2	explored	explore	VERB
app01-6686	79	3	(	(	PUNCT
app01-6686	79	4	university	university	NOUN
app01-6686	79	5	wafer	wafer	NOUN
app01-6686	79	6	,	,	PUNCT
app01-6686	79	7	usa	usa	PROPN
app01-6686	79	8	)	)	PUNCT
app01-6686	79	9	.	.	PUNCT
app01-6686	80	1	this	this	PRON
app01-6686	80	2	was	be	AUX
app01-6686	80	3	confirmed	confirm	VERB
app01-6686	80	4	by	by	ADP
app01-6686	80	5	a	a	DET
app01-6686	80	6	strong	strong	ADJ
app01-6686	80	7	variance	variance	NOUN
app01-6686	80	8	in	in	ADP
app01-6686	80	9	measured	measure	VERB
app01-6686	80	10	thickness	thickness	NOUN
app01-6686	80	11	of	of	ADP
app01-6686	80	12	native	native	ADJ
app01-6686	80	13	sio2	sio2	PROPN
app01-6686	80	14	film	film	NOUN
app01-6686	80	15	between	between	ADP
app01-6686	80	16	different	different	ADJ
app01-6686	80	17	wafers	wafer	NOUN
app01-6686	80	18	.	.	PUNCT
app01-6686	81	1	the	the	DET
app01-6686	81	2	native	native	PROPN
app01-6686	81	3	sio2	sio2	PROPN
app01-6686	81	4	thickness	thickness	NOUN
app01-6686	81	5	of	of	ADP
app01-6686	81	6	(	(	PUNCT
app01-6686	81	7	3.2	3.2	NUM
app01-6686	81	8	±	±	NUM
app01-6686	81	9	0.5	0.5	NUM
app01-6686	81	10	)	)	PUNCT
app01-6686	81	11	nm	nm	PROPN
app01-6686	81	12	was	be	AUX
app01-6686	81	13	obtained	obtain	VERB
app01-6686	81	14	after	after	ADP
app01-6686	81	15	the	the	DET
app01-6686	81	16	exclusion	exclusion	NOUN
app01-6686	81	17	of	of	ADP
app01-6686	81	18	the	the	DET
app01-6686	81	19	most	most	ADV
app01-6686	81	20	extreme	extreme	ADJ
app01-6686	81	21	values	value	NOUN
app01-6686	81	22	that	that	PRON
app01-6686	81	23	might	might	AUX
app01-6686	81	24	be	be	AUX
app01-6686	81	25	among	among	ADP
app01-6686	81	26	others	other	NOUN
app01-6686	81	27	related	relate	VERB
app01-6686	81	28	to	to	ADP
app01-6686	81	29	the	the	DET
app01-6686	81	30	sub	sub	ADJ
app01-6686	81	31	-	-	ADJ
app01-6686	81	32	surface	surface	ADJ
app01-6686	81	33	damage	damage	NOUN
app01-6686	81	34	.	.	PUNCT
app01-6686	82	1	these	these	DET
app01-6686	82	2	values	value	NOUN
app01-6686	82	3	are	be	AUX
app01-6686	82	4	slightly	slightly	ADV
app01-6686	82	5	higher	high	ADJ
app01-6686	82	6	in	in	ADP
app01-6686	82	7	comparison	comparison	NOUN
app01-6686	82	8	with	with	ADP
app01-6686	82	9	the	the	DET
app01-6686	82	10	literature	literature	NOUN
app01-6686	82	11	data	datum	NOUN
app01-6686	82	12	.	.	PUNCT
app01-6686	83	1	this	this	DET
app01-6686	83	2	overestimation	overestimation	NOUN
app01-6686	83	3	might	might	AUX
app01-6686	83	4	be	be	AUX
app01-6686	83	5	caused	cause	VERB
app01-6686	83	6	by	by	ADP
app01-6686	83	7	the	the	DET
app01-6686	83	8	silicon	silicon	NOUN
app01-6686	83	9	suboxide	suboxide	PROPN
app01-6686	83	10	interface	interface	NOUN
app01-6686	83	11	layer	layer	NOUN
app01-6686	83	12	formed	form	VERB
app01-6686	83	13	between	between	ADP
app01-6686	83	14	the	the	DET
app01-6686	83	15	si	si	PROPN
app01-6686	83	16	and	and	CCONJ
app01-6686	83	17	sio2	sio2	PROPN
app01-6686	83	18	,	,	PUNCT
app01-6686	83	19	with	with	ADP
app01-6686	83	20	thickness	thickness	NOUN
app01-6686	83	21	estimated	estimate	VERB
app01-6686	83	22	to	to	PART
app01-6686	83	23	be	be	AUX
app01-6686	83	24	∼0.35	∼0.35	DET
app01-6686	83	25	nm	nm	NOUN
app01-6686	83	26	[	[	X
app01-6686	83	27	11	11	NUM
app01-6686	83	28	]	]	PUNCT
app01-6686	83	29	.	.	PUNCT
app01-6686	84	1	the	the	DET
app01-6686	84	2	interface	interface	NOUN
app01-6686	84	3	behaves	behave	VERB
app01-6686	84	4	like	like	ADP
app01-6686	84	5	a	a	DET
app01-6686	84	6	second	second	ADJ
app01-6686	84	7	thin	thin	ADJ
app01-6686	84	8	film	film	NOUN
app01-6686	84	9	and	and	CCONJ
app01-6686	84	10	might	might	AUX
app01-6686	84	11	increase	increase	VERB
app01-6686	84	12	the	the	DET
app01-6686	84	13	resulting	result	VERB
app01-6686	84	14	film	film	NOUN
app01-6686	84	15	thickness	thickness	NOUN
app01-6686	84	16	since	since	SCONJ
app01-6686	84	17	in	in	ADP
app01-6686	84	18	our	our	PRON
app01-6686	84	19	fit	fit	ADJ
app01-6686	84	20	only	only	ADJ
app01-6686	84	21	single	single	ADJ
app01-6686	84	22	film	film	NOUN
app01-6686	84	23	system	system	NOUN
app01-6686	84	24	with	with	ADP
app01-6686	84	25	characteristics	characteristic	NOUN
app01-6686	84	26	of	of	ADP
app01-6686	84	27	sio2	sio2	PROPN
app01-6686	84	28	is	be	AUX
app01-6686	84	29	assumed	assume	VERB
app01-6686	84	30	.	.	PUNCT
app01-6686	85	1	this	this	PRON
app01-6686	85	2	means	mean	VERB
app01-6686	85	3	that	that	SCONJ
app01-6686	85	4	even	even	ADV
app01-6686	85	5	few	few	ADJ
app01-6686	85	6	nm	nm	PRON
app01-6686	85	7	thick	thick	ADJ
app01-6686	85	8	films	film	NOUN
app01-6686	85	9	may	may	AUX
app01-6686	85	10	be	be	AUX
app01-6686	85	11	explored	explore	VERB
app01-6686	85	12	via	via	ADP
app01-6686	85	13	law	law	NOUN
app01-6686	85	14	method	method	NOUN
app01-6686	85	15	provided	provide	VERB
app01-6686	85	16	the	the	DET
app01-6686	85	17	dispersion	dispersion	NOUN
app01-6686	85	18	caused	cause	VERB
app01-6686	85	19	by	by	ADP
app01-6686	85	20	the	the	DET
app01-6686	85	21	film	film	NOUN
app01-6686	85	22	can	can	AUX
app01-6686	85	23	be	be	AUX
app01-6686	85	24	easily	easily	ADV
app01-6686	85	25	seen	see	VERB
app01-6686	85	26	and	and	CCONJ
app01-6686	85	27	substrate	substrate	NOUN
app01-6686	85	28	of	of	ADP
app01-6686	85	29	superb	superb	ADJ
app01-6686	85	30	quality	quality	NOUN
app01-6686	85	31	,	,	PUNCT
app01-6686	85	32	with	with	ADP
app01-6686	85	33	no	no	DET
app01-6686	85	34	surface	surface	NOUN
app01-6686	85	35	and	and	CCONJ
app01-6686	85	36	sub	sub	ADJ
app01-6686	85	37	-	-	ADJ
app01-6686	85	38	surface	surface	ADJ
app01-6686	85	39	damage	damage	NOUN
app01-6686	85	40	,	,	PUNCT
app01-6686	85	41	is	be	AUX
app01-6686	85	42	used	use	VERB
app01-6686	85	43	and	and	CCONJ
app01-6686	85	44	effects	effect	NOUN
app01-6686	85	45	of	of	ADP
app01-6686	85	46	interface	interface	NOUN
app01-6686	85	47	layers	layer	NOUN
app01-6686	85	48	are	be	AUX
app01-6686	85	49	included	include	VERB
app01-6686	85	50	in	in	ADP
app01-6686	85	51	the	the	DET
app01-6686	85	52	calculation	calculation	NOUN
app01-6686	85	53	.	.	PUNCT
app01-6686	86	1	2.2	2.2	NUM
app01-6686	86	2	.	.	PUNCT
app01-6686	87	1	thin	thin	ADJ
app01-6686	87	2	film	film	NOUN
app01-6686	87	3	characterization	characterization	NOUN
app01-6686	87	4	–	–	PUNCT
app01-6686	87	5	young	young	ADJ
app01-6686	87	6	’s	’s	PART
app01-6686	87	7	modulus	modulus	ADJ
app01-6686	87	8	evaluation	evaluation	NOUN
app01-6686	87	9	in	in	ADP
app01-6686	87	10	order	order	NOUN
app01-6686	87	11	to	to	PART
app01-6686	87	12	explore	explore	VERB
app01-6686	87	13	the	the	DET
app01-6686	87	14	inherent	inherent	ADJ
app01-6686	87	15	limits	limit	NOUN
app01-6686	87	16	of	of	ADP
app01-6686	87	17	depth	depth	NOUN
app01-6686	87	18	sensing	sense	VERB
app01-6686	87	19	indentation	indentation	NOUN
app01-6686	87	20	and	and	CCONJ
app01-6686	87	21	law	law	NOUN
app01-6686	87	22	the	the	DET
app01-6686	87	23	sio2	sio2	PROPN
app01-6686	87	24	films	film	NOUN
app01-6686	87	25	with	with	ADP
app01-6686	87	26	different	different	ADJ
app01-6686	87	27	thicknesses	thickness	NOUN
app01-6686	87	28	were	be	AUX
app01-6686	87	29	measured	measure	VERB
app01-6686	87	30	by	by	ADP
app01-6686	87	31	both	both	DET
app01-6686	87	32	methods	method	NOUN
app01-6686	87	33	.	.	PUNCT
app01-6686	88	1	the	the	DET
app01-6686	88	2	high	high	ADJ
app01-6686	88	3	quality	quality	NOUN
app01-6686	88	4	sio2	sio2	NOUN
app01-6686	88	5	films	film	NOUN
app01-6686	88	6	with	with	ADP
app01-6686	88	7	thickness	thickness	NOUN
app01-6686	88	8	ranging	range	VERB
app01-6686	88	9	from	from	ADP
app01-6686	88	10	34	34	NUM
app01-6686	88	11	to	to	PART
app01-6686	88	12	156	156	NUM
app01-6686	88	13	nm	nm	NOUN
app01-6686	88	14	grown	grow	VERB
app01-6686	88	15	on	on	ADP
app01-6686	88	16	si(100	si(100	NOUN
app01-6686	88	17	)	)	PUNCT
app01-6686	88	18	mentioned	mention	VERB
app01-6686	88	19	in	in	ADP
app01-6686	88	20	previous	previous	ADJ
app01-6686	88	21	chapter	chapter	NOUN
app01-6686	88	22	were	be	AUX
app01-6686	88	23	used	use	VERB
app01-6686	88	24	.	.	PUNCT
app01-6686	89	1	nanoindentation	nanoindentation	NOUN
app01-6686	89	2	experiments	experiment	NOUN
app01-6686	89	3	were	be	AUX
app01-6686	89	4	performed	perform	VERB
app01-6686	89	5	using	use	VERB
app01-6686	89	6	the	the	DET
app01-6686	89	7	fully	fully	ADV
app01-6686	89	8	calibrated	calibrate	VERB
app01-6686	89	9	nanotest	nanot	ADJ
app01-6686	89	10	instrument	instrument	NOUN
app01-6686	89	11	equipped	equip	VERB
app01-6686	89	12	with	with	ADP
app01-6686	89	13	a	a	DET
app01-6686	89	14	brand	brand	NOUN
app01-6686	89	15	new	new	PROPN
app01-6686	89	16	berkovich	berkovich	PROPN
app01-6686	89	17	indenter	indenter	PROPN
app01-6686	89	18	.	.	PUNCT
app01-6686	90	1	at	at	ADV
app01-6686	90	2	least	least	ADJ
app01-6686	90	3	15	15	NUM
app01-6686	90	4	measurements	measurement	NOUN
app01-6686	90	5	for	for	ADP
app01-6686	90	6	each	each	DET
app01-6686	90	7	film	film	NOUN
app01-6686	90	8	were	be	AUX
app01-6686	90	9	analyzed	analyze	VERB
app01-6686	90	10	by	by	ADP
app01-6686	90	11	standard	standard	PROPN
app01-6686	90	12	oliver	oliver	PROPN
app01-6686	90	13	-	-	PUNCT
app01-6686	90	14	pharr	pharr	PROPN
app01-6686	90	15	method	method	NOUN
app01-6686	90	16	.	.	PUNCT
app01-6686	91	1	the	the	DET
app01-6686	91	2	indentation	indentation	NOUN
app01-6686	91	3	modulus	modulus	NOUN
app01-6686	91	4	e	e	NOUN
app01-6686	91	5	values	value	NOUN
app01-6686	91	6	were	be	AUX
app01-6686	91	7	calculated	calculate	VERB
app01-6686	91	8	using	use	VERB
app01-6686	91	9	sio2	sio2	PROPN
app01-6686	91	10	poisson	poisson	PROPN
app01-6686	91	11	’s	’s	PART
app01-6686	91	12	ratio	ratio	NOUN
app01-6686	91	13	of	of	ADP
app01-6686	91	14	0.17	0.17	NUM
app01-6686	91	15	and	and	CCONJ
app01-6686	91	16	considering	consider	VERB
app01-6686	91	17	the	the	DET
app01-6686	91	18	correction	correction	NOUN
app01-6686	91	19	for	for	ADP
app01-6686	91	20	diamond	diamond	NOUN
app01-6686	91	21	elastic	elastic	ADJ
app01-6686	91	22	deformation	deformation	NOUN
app01-6686	91	23	(	(	PUNCT
app01-6686	91	24	poisson	poisson	PROPN
app01-6686	91	25	’s	’s	PART
app01-6686	91	26	ratio	ratio	NOUN
app01-6686	91	27	of	of	ADP
app01-6686	91	28	0.07	0.07	NUM
app01-6686	91	29	and	and	CCONJ
app01-6686	91	30	young	young	ADJ
app01-6686	91	31	’s	’s	PART
app01-6686	91	32	modulus	modulus	NOUN
app01-6686	91	33	of	of	ADP
app01-6686	91	34	1141	1141	NUM
app01-6686	91	35	gpa	gpa	NOUN
app01-6686	91	36	)	)	PUNCT
app01-6686	91	37	.	.	PUNCT
app01-6686	92	1	it	it	PRON
app01-6686	92	2	should	should	AUX
app01-6686	92	3	be	be	AUX
app01-6686	92	4	noted	note	VERB
app01-6686	92	5	that	that	SCONJ
app01-6686	92	6	indentation	indentation	NOUN
app01-6686	92	7	modulus	modulus	NOUN
app01-6686	92	8	can	can	AUX
app01-6686	92	9	be	be	AUX
app01-6686	92	10	considered	consider	VERB
app01-6686	92	11	as	as	ADP
app01-6686	92	12	young	young	ADJ
app01-6686	92	13	’s	’s	PART
app01-6686	92	14	modulus	modulus	NOUN
app01-6686	92	15	as	as	ADV
app01-6686	92	16	long	long	ADV
app01-6686	92	17	as	as	SCONJ
app01-6686	92	18	pile	pile	NOUN
app01-6686	92	19	-	-	PUNCT
app01-6686	92	20	up	up	NOUN
app01-6686	92	21	and	and	CCONJ
app01-6686	92	22	sink	sink	NOUN
app01-6686	92	23	-	-	PUNCT
app01-6686	92	24	in	in	ADP
app01-6686	92	25	effects	effect	NOUN
app01-6686	92	26	are	be	AUX
app01-6686	92	27	absent	absent	ADJ
app01-6686	92	28	[	[	X
app01-6686	92	29	12	12	NUM
app01-6686	92	30	]	]	PUNCT
app01-6686	92	31	.	.	PUNCT
app01-6686	93	1	comparison	comparison	NOUN
app01-6686	93	2	of	of	ADP
app01-6686	93	3	the	the	DET
app01-6686	93	4	results	result	NOUN
app01-6686	93	5	can	can	AUX
app01-6686	93	6	be	be	AUX
app01-6686	93	7	seen	see	VERB
app01-6686	93	8	in	in	ADP
app01-6686	93	9	figure	figure	NOUN
app01-6686	93	10	4	4	NUM
app01-6686	93	11	.	.	PUNCT
app01-6686	93	12	figure	figure	VERB
app01-6686	93	13	4	4	NUM
app01-6686	93	14	shows	show	VERB
app01-6686	93	15	that	that	SCONJ
app01-6686	93	16	the	the	DET
app01-6686	93	17	values	value	NOUN
app01-6686	93	18	obtained	obtain	VERB
app01-6686	93	19	from	from	ADP
app01-6686	93	20	law	law	NOUN
app01-6686	93	21	and	and	CCONJ
app01-6686	93	22	nanoindentation	nanoindentation	NOUN
app01-6686	93	23	are	be	AUX
app01-6686	93	24	similar	similar	ADJ
app01-6686	93	25	for	for	ADP
app01-6686	93	26	the	the	DET
app01-6686	93	27	156	156	NUM
app01-6686	93	28	nm	nm	NOUN
app01-6686	93	29	and	and	CCONJ
app01-6686	93	30	136	136	NUM
app01-6686	93	31	nm	nm	ADV
app01-6686	93	32	thick	thick	ADJ
app01-6686	93	33	films	film	NOUN
app01-6686	93	34	because	because	SCONJ
app01-6686	93	35	nanoindentation	nanoindentation	NOUN
app01-6686	93	36	was	be	AUX
app01-6686	93	37	not	not	PART
app01-6686	93	38	strongly	strongly	ADV
app01-6686	93	39	affected	affect	VERB
app01-6686	93	40	by	by	ADP
app01-6686	93	41	the	the	DET
app01-6686	93	42	substrate	substrate	NOUN
app01-6686	93	43	.	.	PUNCT
app01-6686	94	1	however	however	ADV
app01-6686	94	2	,	,	PUNCT
app01-6686	94	3	for	for	ADP
app01-6686	94	4	the	the	DET
app01-6686	94	5	90	90	NUM
app01-6686	94	6	nm	nm	ADJ
app01-6686	94	7	film	film	NOUN
app01-6686	94	8	the	the	DET
app01-6686	94	9	indenter	indenter	NOUN
app01-6686	94	10	penetrated	penetrate	VERB
app01-6686	94	11	up	up	ADP
app01-6686	94	12	to	to	PART
app01-6686	94	13	25	25	NUM
app01-6686	94	14	%	%	NOUN
app01-6686	94	15	of	of	ADP
app01-6686	94	16	59	59	NUM
app01-6686	94	17	r.	r.	PROPN
app01-6686	94	18	kudělka	kudělka	PROPN
app01-6686	94	19	,	,	PUNCT
app01-6686	94	20	l.	l.	PROPN
app01-6686	94	21	václavek	václavek	PROPN
app01-6686	94	22	,	,	PUNCT
app01-6686	94	23	j.	j.	PROPN
app01-6686	94	24	tomáštík	tomáštík	VERB
app01-6686	94	25	et	et	PROPN
app01-6686	94	26	al	al	PROPN
app01-6686	94	27	.	.	PROPN
app01-6686	95	1	acta	acta	PROPN
app01-6686	95	2	polytechnica	polytechnica	PROPN
app01-6686	95	3	120	120	NUM
app01-6686	95	4	80	80	NUM
app01-6686	95	5	40	40	NUM
app01-6686	95	6	160	160	NUM
app01-6686	95	7	120	120	NUM
app01-6686	95	8	200	200	NUM
app01-6686	95	9	80	80	NUM
app01-6686	95	10	40	40	NUM
app01-6686	95	11	0	0	NUM
app01-6686	95	12	200	200	NUM
app01-6686	95	13	160	160	NUM
app01-6686	95	14	y	y	NOUN
app01-6686	95	15	o	o	X
app01-6686	95	16	u	u	NOUN
app01-6686	95	17	n	n	PRON
app01-6686	95	18	g	g	PROPN
app01-6686	95	19	’s	’s	NOUN
app01-6686	95	20	m	m	VERB
app01-6686	96	1	o	o	NOUN
app01-6686	96	2	d	d	X
app01-6686	96	3	u	u	X
app01-6686	96	4	lu	lu	NOUN
app01-6686	96	5	s	s	VERB
app01-6686	97	1	[	[	X
app01-6686	97	2	g	g	X
app01-6686	97	3	p	p	X
app01-6686	97	4	a	a	X
app01-6686	97	5	]	]	X
app01-6686	97	6	(	(	PUNCT
app01-6686	97	7	a	a	X
app01-6686	97	8	)	)	PUNCT
app01-6686	98	1	p	p	X
app01-6686	98	2	o	o	NOUN
app01-6686	98	3	is	be	AUX
app01-6686	98	4	so	so	ADV
app01-6686	98	5	n	n	CCONJ
app01-6686	98	6	’s	’s	NOUN
app01-6686	98	7	r	r	NOUN
app01-6686	98	8	a	a	DET
app01-6686	98	9	tio	tio	NOUN
app01-6686	98	10	0.00	0.00	NUM
app01-6686	98	11	0.30	0.30	NUM
app01-6686	98	12	0.25	0.25	NUM
app01-6686	98	13	0.20	0.20	NUM
app01-6686	98	14	0.15	0.15	NUM
app01-6686	98	15	0.10	0.10	NUM
app01-6686	98	16	0.05	0.05	NUM
app01-6686	98	17	0.10	0.10	NUM
app01-6686	98	18	0.15	0.15	NUM
app01-6686	98	19	0.20	0.20	NUM
app01-6686	98	20	0.25	0.25	NUM
app01-6686	98	21	0.30	0.30	NUM
app01-6686	98	22	0.05	0.05	NUM
app01-6686	98	23	(	(	PUNCT
app01-6686	98	24	b	b	NOUN
app01-6686	98	25	)	)	PUNCT
app01-6686	98	26	figure	figure	NOUN
app01-6686	98	27	5	5	NUM
app01-6686	98	28	.	.	PUNCT
app01-6686	98	29	si(100	si(100	NOUN
app01-6686	98	30	)	)	PUNCT
app01-6686	98	31	anisotropy	anisotropy	VERB
app01-6686	98	32	(	(	PUNCT
app01-6686	98	33	a	a	DET
app01-6686	98	34	)	)	PUNCT
app01-6686	98	35	young	young	ADJ
app01-6686	98	36	’s	’s	PART
app01-6686	98	37	modulus	modulus	ADJ
app01-6686	98	38	(	(	PUNCT
app01-6686	98	39	b	b	NOUN
app01-6686	98	40	)	)	PUNCT
app01-6686	98	41	poisson	poisson	PROPN
app01-6686	98	42	’s	’s	PART
app01-6686	98	43	ratio	ratio	NOUN
app01-6686	98	44	.	.	PUNCT
app01-6686	99	1	the	the	DET
app01-6686	99	2	film	film	NOUN
app01-6686	99	3	and	and	CCONJ
app01-6686	99	4	the	the	DET
app01-6686	99	5	results	result	NOUN
app01-6686	99	6	are	be	AUX
app01-6686	99	7	strongly	strongly	ADV
app01-6686	99	8	affected	affect	VERB
app01-6686	99	9	by	by	ADP
app01-6686	99	10	the	the	DET
app01-6686	99	11	substrate	substrate	NOUN
app01-6686	99	12	which	which	PRON
app01-6686	99	13	has	have	VERB
app01-6686	99	14	higher	high	ADJ
app01-6686	99	15	young	young	ADJ
app01-6686	99	16	’s	’s	PART
app01-6686	99	17	modulus	modulus	NOUN
app01-6686	99	18	than	than	ADP
app01-6686	99	19	the	the	DET
app01-6686	99	20	film	film	NOUN
app01-6686	99	21	.	.	PUNCT
app01-6686	100	1	the	the	DET
app01-6686	100	2	34	34	NUM
app01-6686	100	3	nm	nm	ADV
app01-6686	100	4	thick	thick	ADJ
app01-6686	100	5	film	film	NOUN
app01-6686	100	6	shows	show	VERB
app01-6686	100	7	even	even	ADV
app01-6686	100	8	stronger	strong	ADJ
app01-6686	100	9	substrate	substrate	NOUN
app01-6686	100	10	effect	effect	NOUN
app01-6686	100	11	as	as	SCONJ
app01-6686	100	12	59	59	NUM
app01-6686	100	13	%	%	NOUN
app01-6686	100	14	of	of	ADP
app01-6686	100	15	the	the	DET
app01-6686	100	16	film	film	NOUN
app01-6686	100	17	was	be	AUX
app01-6686	100	18	penetrated	penetrate	VERB
app01-6686	100	19	and	and	CCONJ
app01-6686	100	20	the	the	DET
app01-6686	100	21	resulting	result	VERB
app01-6686	100	22	value	value	NOUN
app01-6686	100	23	of	of	ADP
app01-6686	100	24	young	young	ADJ
app01-6686	100	25	’s	’s	PART
app01-6686	100	26	modulus	modulus	NOUN
app01-6686	100	27	is	be	AUX
app01-6686	100	28	somewhere	somewhere	ADV
app01-6686	100	29	in	in	ADP
app01-6686	100	30	the	the	DET
app01-6686	100	31	middle	middle	NOUN
app01-6686	100	32	between	between	ADP
app01-6686	100	33	the	the	DET
app01-6686	100	34	value	value	NOUN
app01-6686	100	35	of	of	ADP
app01-6686	100	36	the	the	DET
app01-6686	100	37	film	film	NOUN
app01-6686	100	38	and	and	CCONJ
app01-6686	100	39	the	the	DET
app01-6686	100	40	value	value	NOUN
app01-6686	100	41	of	of	ADP
app01-6686	100	42	the	the	DET
app01-6686	100	43	substrate	substrate	NOUN
app01-6686	100	44	.	.	PUNCT
app01-6686	101	1	this	this	PRON
app01-6686	101	2	clearly	clearly	ADV
app01-6686	101	3	shows	show	VERB
app01-6686	101	4	the	the	DET
app01-6686	101	5	unambiguous	unambiguous	ADJ
app01-6686	101	6	advantage	advantage	NOUN
app01-6686	101	7	of	of	ADP
app01-6686	101	8	the	the	DET
app01-6686	101	9	law	law	NOUN
app01-6686	101	10	as	as	SCONJ
app01-6686	101	11	the	the	DET
app01-6686	101	12	results	result	NOUN
app01-6686	101	13	obtained	obtain	VERB
app01-6686	101	14	from	from	ADP
app01-6686	101	15	law	law	NOUN
app01-6686	101	16	are	be	AUX
app01-6686	101	17	constant	constant	ADJ
app01-6686	101	18	despite	despite	SCONJ
app01-6686	101	19	the	the	DET
app01-6686	101	20	changing	change	VERB
app01-6686	101	21	film	film	NOUN
app01-6686	101	22	thickness	thickness	NOUN
app01-6686	101	23	as	as	SCONJ
app01-6686	101	24	opposed	oppose	VERB
app01-6686	101	25	to	to	ADP
app01-6686	101	26	nanoindentation	nanoindentation	NOUN
app01-6686	101	27	.	.	PUNCT
app01-6686	102	1	this	this	PRON
app01-6686	102	2	is	be	AUX
app01-6686	102	3	crucial	crucial	ADJ
app01-6686	102	4	for	for	ADP
app01-6686	102	5	the	the	DET
app01-6686	102	6	characterization	characterization	NOUN
app01-6686	102	7	of	of	ADP
app01-6686	102	8	very	very	ADV
app01-6686	102	9	thin	thin	ADJ
app01-6686	102	10	films	film	NOUN
app01-6686	102	11	.	.	PUNCT
app01-6686	103	1	law	law	NOUN
app01-6686	103	2	can	can	AUX
app01-6686	103	3	be	be	AUX
app01-6686	103	4	affected	affect	VERB
app01-6686	103	5	by	by	ADP
app01-6686	103	6	the	the	DET
app01-6686	103	7	film	film	NOUN
app01-6686	103	8	thickness	thickness	NOUN
app01-6686	103	9	as	as	ADV
app01-6686	103	10	well	well	ADV
app01-6686	103	11	,	,	PUNCT
app01-6686	103	12	but	but	CCONJ
app01-6686	103	13	only	only	ADV
app01-6686	103	14	in	in	ADP
app01-6686	103	15	the	the	DET
app01-6686	103	16	case	case	NOUN
app01-6686	103	17	of	of	ADP
app01-6686	103	18	much	much	ADV
app01-6686	103	19	thinner	thin	ADJ
app01-6686	103	20	films	film	NOUN
app01-6686	103	21	as	as	SCONJ
app01-6686	103	22	shown	show	VERB
app01-6686	103	23	in	in	ADP
app01-6686	103	24	the	the	DET
app01-6686	103	25	previous	previous	ADJ
app01-6686	103	26	chapter	chapter	NOUN
app01-6686	103	27	reporting	report	VERB
app01-6686	103	28	on	on	ADP
app01-6686	103	29	characterization	characterization	NOUN
app01-6686	103	30	of	of	ADP
app01-6686	103	31	native	native	ADJ
app01-6686	103	32	sio2	sio2	PROPN
app01-6686	103	33	layer	layer	NOUN
app01-6686	103	34	of	of	ADP
app01-6686	103	35	∼2	∼2	PROPN
app01-6686	103	36	nm	nm	ADJ
app01-6686	103	37	thickness	thickness	NOUN
app01-6686	103	38	.	.	PUNCT
app01-6686	104	1	comparison	comparison	NOUN
app01-6686	104	2	in	in	ADP
app01-6686	104	3	figure	figure	NOUN
app01-6686	104	4	4	4	NUM
app01-6686	104	5	shows	show	VERB
app01-6686	104	6	that	that	SCONJ
app01-6686	104	7	the	the	DET
app01-6686	104	8	elastic	elastic	ADJ
app01-6686	104	9	modulus	modulus	NOUN
app01-6686	104	10	values	value	NOUN
app01-6686	104	11	obtained	obtain	VERB
app01-6686	104	12	by	by	ADP
app01-6686	104	13	nanoindentation	nanoindentation	NOUN
app01-6686	104	14	are	be	AUX
app01-6686	104	15	almost	almost	ADV
app01-6686	104	16	identical	identical	ADJ
app01-6686	104	17	to	to	ADP
app01-6686	104	18	those	those	PRON
app01-6686	104	19	measured	measure	VERB
app01-6686	104	20	by	by	ADP
app01-6686	104	21	law	law	NOUN
app01-6686	104	22	as	as	ADV
app01-6686	104	23	long	long	ADV
app01-6686	104	24	as	as	SCONJ
app01-6686	104	25	the	the	DET
app01-6686	104	26	film	film	NOUN
app01-6686	104	27	thickness	thickness	NOUN
app01-6686	104	28	is	be	AUX
app01-6686	104	29	high	high	ADJ
app01-6686	104	30	enough	enough	ADV
app01-6686	104	31	.	.	PUNCT
app01-6686	105	1	in	in	ADP
app01-6686	105	2	this	this	DET
app01-6686	105	3	case	case	NOUN
app01-6686	105	4	for	for	ADP
app01-6686	105	5	the	the	DET
app01-6686	105	6	films	film	NOUN
app01-6686	105	7	thinner	thin	ADJ
app01-6686	105	8	than	than	ADP
app01-6686	105	9	100	100	NUM
app01-6686	105	10	nm	nm	NOUN
app01-6686	105	11	the	the	DET
app01-6686	105	12	unavoidable	unavoidable	ADJ
app01-6686	105	13	substrate	substrate	NOUN
app01-6686	105	14	effect	effect	NOUN
app01-6686	105	15	leads	lead	VERB
app01-6686	105	16	to	to	ADP
app01-6686	105	17	overestimation	overestimation	NOUN
app01-6686	105	18	of	of	ADP
app01-6686	105	19	the	the	DET
app01-6686	105	20	elastic	elastic	ADJ
app01-6686	105	21	modulus	modulus	NOUN
app01-6686	105	22	.	.	PUNCT
app01-6686	106	1	for	for	ADP
app01-6686	106	2	such	such	ADJ
app01-6686	106	3	thin	thin	ADJ
app01-6686	106	4	films	film	NOUN
app01-6686	106	5	law	law	NOUN
app01-6686	106	6	can	can	AUX
app01-6686	106	7	be	be	AUX
app01-6686	106	8	viable	viable	ADJ
app01-6686	106	9	alternative	alternative	NOUN
app01-6686	106	10	.	.	PUNCT
app01-6686	107	1	in	in	ADP
app01-6686	107	2	order	order	NOUN
app01-6686	107	3	to	to	PART
app01-6686	107	4	present	present	VERB
app01-6686	107	5	the	the	DET
app01-6686	107	6	robustness	robustness	NOUN
app01-6686	107	7	and	and	CCONJ
app01-6686	107	8	universal	universal	ADJ
app01-6686	107	9	use	use	NOUN
app01-6686	107	10	of	of	ADP
app01-6686	107	11	law	law	NOUN
app01-6686	107	12	other	other	ADJ
app01-6686	107	13	films	film	NOUN
app01-6686	107	14	were	be	AUX
app01-6686	107	15	also	also	ADV
app01-6686	107	16	explored	explore	VERB
app01-6686	107	17	.	.	PUNCT
app01-6686	108	1	young	young	ADJ
app01-6686	108	2	’s	’s	PART
app01-6686	108	3	modulus	modulus	NOUN
app01-6686	108	4	was	be	AUX
app01-6686	108	5	evaluated	evaluate	VERB
app01-6686	108	6	for	for	ADP
app01-6686	108	7	aluminum	aluminum	NOUN
app01-6686	108	8	film	film	NOUN
app01-6686	108	9	on	on	ADP
app01-6686	108	10	glass	glass	NOUN
app01-6686	108	11	,	,	PUNCT
app01-6686	108	12	and	and	CCONJ
app01-6686	108	13	titanium	titanium	NOUN
app01-6686	108	14	and	and	CCONJ
app01-6686	108	15	chromium	chromium	NOUN
app01-6686	108	16	on	on	ADP
app01-6686	108	17	silicon	silicon	NOUN
app01-6686	108	18	.	.	PUNCT
app01-6686	109	1	the	the	DET
app01-6686	109	2	thickness	thickness	NOUN
app01-6686	109	3	of	of	ADP
app01-6686	109	4	all	all	DET
app01-6686	109	5	three	three	NUM
app01-6686	109	6	films	film	NOUN
app01-6686	109	7	was	be	AUX
app01-6686	109	8	around	around	ADV
app01-6686	109	9	100	100	NUM
app01-6686	109	10	nm	nm	NOUN
app01-6686	109	11	.	.	PUNCT
app01-6686	110	1	values	value	NOUN
app01-6686	110	2	obtained	obtain	VERB
app01-6686	110	3	by	by	ADP
app01-6686	110	4	law	law	NOUN
app01-6686	110	5	are	be	AUX
app01-6686	110	6	compared	compare	VERB
app01-6686	110	7	with	with	ADP
app01-6686	110	8	the	the	DET
app01-6686	110	9	values	value	NOUN
app01-6686	110	10	given	give	VERB
app01-6686	110	11	by	by	ADP
app01-6686	110	12	other	other	ADJ
app01-6686	110	13	authors	author	NOUN
app01-6686	110	14	[	[	X
app01-6686	110	15	13–17	13–17	NUM
app01-6686	110	16	]	]	PUNCT
app01-6686	110	17	and	and	CCONJ
app01-6686	110	18	in	in	ADP
app01-6686	110	19	case	case	NOUN
app01-6686	110	20	of	of	ADP
app01-6686	110	21	al	al	PROPN
app01-6686	110	22	and	and	CCONJ
app01-6686	110	23	ti	ti	PROPN
app01-6686	110	24	also	also	ADV
app01-6686	110	25	with	with	ADP
app01-6686	110	26	the	the	DET
app01-6686	110	27	results	result	NOUN
app01-6686	110	28	from	from	ADP
app01-6686	110	29	nanoindentation	nanoindentation	NOUN
app01-6686	110	30	.	.	PUNCT
app01-6686	111	1	table	table	NOUN
app01-6686	111	2	1	1	NUM
app01-6686	111	3	shows	show	VERB
app01-6686	111	4	that	that	SCONJ
app01-6686	111	5	,	,	PUNCT
app01-6686	111	6	the	the	DET
app01-6686	111	7	values	value	NOUN
app01-6686	111	8	of	of	ADP
app01-6686	111	9	young	young	ADJ
app01-6686	111	10	’s	’s	PART
app01-6686	111	11	modulus	modulus	NOUN
app01-6686	111	12	obtained	obtain	VERB
app01-6686	111	13	by	by	ADP
app01-6686	111	14	law	law	NOUN
app01-6686	111	15	correspond	correspond	NOUN
app01-6686	111	16	to	to	ADP
app01-6686	111	17	those	those	PRON
app01-6686	111	18	obtained	obtain	VERB
app01-6686	111	19	from	from	ADP
app01-6686	111	20	nanoindentation	nanoindentation	NOUN
app01-6686	111	21	and	and	CCONJ
app01-6686	111	22	are	be	AUX
app01-6686	111	23	within	within	ADP
app01-6686	111	24	the	the	DET
app01-6686	111	25	range	range	NOUN
app01-6686	111	26	reported	report	VERB
app01-6686	111	27	in	in	ADP
app01-6686	111	28	literature	literature	NOUN
app01-6686	111	29	.	.	PUNCT
app01-6686	112	1	2.3	2.3	NUM
app01-6686	112	2	.	.	PUNCT
app01-6686	113	1	silicon	silicon	NOUN
app01-6686	113	2	anisotropy	anisotropy	VERB
app01-6686	113	3	mapping	map	VERB
app01-6686	113	4	single	single	ADJ
app01-6686	113	5	-	-	PUNCT
app01-6686	113	6	crystal	crystal	NOUN
app01-6686	113	7	silicon	silicon	NOUN
app01-6686	113	8	is	be	AUX
app01-6686	113	9	a	a	DET
app01-6686	113	10	well	well	ADV
app01-6686	113	11	-	-	PUNCT
app01-6686	113	12	known	know	VERB
app01-6686	113	13	material	material	NOUN
app01-6686	113	14	with	with	ADP
app01-6686	113	15	interesting	interesting	ADJ
app01-6686	113	16	properties	property	NOUN
app01-6686	113	17	and	and	CCONJ
app01-6686	113	18	wide	wide	ADJ
app01-6686	113	19	range	range	NOUN
app01-6686	113	20	of	of	ADP
app01-6686	113	21	applications	application	NOUN
app01-6686	113	22	[	[	X
app01-6686	113	23	18	18	NUM
app01-6686	113	24	]	]	PUNCT
app01-6686	113	25	that	that	PRON
app01-6686	113	26	exhibits	exhibit	VERB
app01-6686	113	27	a	a	DET
app01-6686	113	28	strong	strong	ADJ
app01-6686	113	29	anisotropy	anisotropy	NOUN
app01-6686	113	30	.	.	PUNCT
app01-6686	114	1	therefore	therefore	ADV
app01-6686	114	2	,	,	PUNCT
app01-6686	114	3	it	it	PRON
app01-6686	114	4	is	be	AUX
app01-6686	114	5	an	an	DET
app01-6686	114	6	ideal	ideal	ADJ
app01-6686	114	7	object	object	NOUN
app01-6686	114	8	for	for	ADP
app01-6686	114	9	testing	test	VERB
app01-6686	114	10	the	the	DET
app01-6686	114	11	law	law	NOUN
app01-6686	114	12	ability	ability	NOUN
app01-6686	114	13	to	to	PART
app01-6686	114	14	explore	explore	VERB
app01-6686	114	15	material	material	NOUN
app01-6686	114	16	anisotropy	anisotropy	NOUN
app01-6686	114	17	.	.	PUNCT
app01-6686	115	1	material	material	PROPN
app01-6686	115	2	young	young	PROPN
app01-6686	115	3	’s	’s	PART
app01-6686	115	4	modulus	modulus	NOUN
app01-6686	115	5	(	(	PUNCT
app01-6686	115	6	gpa	gpa	PROPN
app01-6686	115	7	)	)	PUNCT
app01-6686	115	8	law	law	NOUN
app01-6686	115	9	reference	reference	NOUN
app01-6686	115	10	indentation	indentation	NOUN
app01-6686	115	11	al	al	PROPN
app01-6686	115	12	63.5	63.5	NUM
app01-6686	115	13	55	55	NUM
app01-6686	115	14	-	-	SYM
app01-6686	115	15	81	81	NUM
app01-6686	115	16	69.6	69.6	NUM
app01-6686	115	17	ti	ti	NOUN
app01-6686	115	18	116.1	116.1	NUM
app01-6686	115	19	102	102	NUM
app01-6686	115	20	-	-	SYM
app01-6686	115	21	123	123	NUM
app01-6686	115	22	111.5	111.5	NUM
app01-6686	115	23	cr	cr	ADP
app01-6686	115	24	204.4	204.4	NUM
app01-6686	115	25	185	185	NUM
app01-6686	115	26	-	-	SYM
app01-6686	115	27	215	215	NUM
app01-6686	115	28	–	–	PUNCT
app01-6686	115	29	table	table	NOUN
app01-6686	115	30	1	1	NUM
app01-6686	115	31	.	.	PUNCT
app01-6686	115	32	comparison	comparison	NOUN
app01-6686	115	33	of	of	ADP
app01-6686	115	34	young	young	ADJ
app01-6686	115	35	’s	’s	PART
app01-6686	115	36	modulus	modulus	ADJ
app01-6686	115	37	values	value	NOUN
app01-6686	115	38	of	of	ADP
app01-6686	115	39	al	al	PROPN
app01-6686	115	40	,	,	PUNCT
app01-6686	115	41	ti	ti	PROPN
app01-6686	115	42	,	,	PUNCT
app01-6686	115	43	cr	cr	PROPN
app01-6686	115	44	thin	thin	ADJ
app01-6686	115	45	film	film	NOUN
app01-6686	115	46	measured	measure	VERB
app01-6686	115	47	by	by	ADP
app01-6686	115	48	law	law	NOUN
app01-6686	115	49	,	,	PUNCT
app01-6686	115	50	nanoindentation	nanoindentation	NOUN
app01-6686	115	51	and	and	CCONJ
app01-6686	115	52	literature	literature	NOUN
app01-6686	115	53	data	datum	NOUN
app01-6686	115	54	in	in	ADP
app01-6686	115	55	general	general	ADJ
app01-6686	115	56	,	,	PUNCT
app01-6686	115	57	elastic	elastic	ADJ
app01-6686	115	58	behavior	behavior	NOUN
app01-6686	115	59	of	of	ADP
app01-6686	115	60	cubic	cubic	ADJ
app01-6686	115	61	crystals	crystal	NOUN
app01-6686	115	62	may	may	AUX
app01-6686	115	63	be	be	AUX
app01-6686	115	64	fully	fully	ADV
app01-6686	115	65	described	describe	VERB
app01-6686	115	66	by	by	ADP
app01-6686	115	67	three	three	NUM
app01-6686	115	68	elastic	elastic	ADJ
app01-6686	115	69	stiffness	stiffness	NOUN
app01-6686	115	70	constants	constant	NOUN
app01-6686	115	71	c11	c11	NOUN
app01-6686	115	72	,	,	PUNCT
app01-6686	115	73	c12	c12	PROPN
app01-6686	115	74	and	and	CCONJ
app01-6686	115	75	c44	c44	PROPN
app01-6686	115	76	(	(	PUNCT
app01-6686	115	77	for	for	ADP
app01-6686	115	78	silicon	silicon	NOUN
app01-6686	115	79	at	at	ADP
app01-6686	115	80	room	room	NOUN
app01-6686	115	81	temperature	temperature	NOUN
app01-6686	115	82	c11	c11	NOUN
app01-6686	115	83	=	=	SYM
app01-6686	115	84	165.6–165.7	165.6–165.7	NUM
app01-6686	115	85	,	,	PUNCT
app01-6686	115	86	c12	c12	NOUN
app01-6686	115	87	=	=	SYM
app01-6686	115	88	63.9	63.9	NUM
app01-6686	115	89	,	,	PUNCT
app01-6686	115	90	c44	c44	NOUN
app01-6686	115	91	=	=	SYM
app01-6686	115	92	79.5–79.6	79.5–79.6	NUM
app01-6686	115	93	gpa	gpa	PROPN
app01-6686	115	94	[	[	X
app01-6686	115	95	18	18	NUM
app01-6686	115	96	,	,	PUNCT
app01-6686	115	97	19	19	NUM
app01-6686	115	98	]	]	NUM
app01-6686	115	99	)	)	PUNCT
app01-6686	115	100	.	.	PUNCT
app01-6686	116	1	young	young	PROPN
app01-6686	116	2	’s	’s	PART
app01-6686	116	3	modulus	modulus	NOUN
app01-6686	116	4	and	and	CCONJ
app01-6686	116	5	poisson	poisson	PROPN
app01-6686	116	6	’s	’s	PART
app01-6686	116	7	ratio	ratio	NOUN
app01-6686	116	8	can	can	AUX
app01-6686	116	9	be	be	AUX
app01-6686	116	10	calculated	calculate	VERB
app01-6686	116	11	in	in	ADP
app01-6686	116	12	any	any	DET
app01-6686	116	13	direction	direction	NOUN
app01-6686	116	14	from	from	ADP
app01-6686	116	15	those	those	DET
app01-6686	116	16	constants	constant	NOUN
app01-6686	116	17	.	.	PUNCT
app01-6686	117	1	for	for	ADP
app01-6686	117	2	example	example	NOUN
app01-6686	117	3	,	,	PUNCT
app01-6686	117	4	si(100	si(100	NOUN
app01-6686	117	5	)	)	PUNCT
app01-6686	117	6	has	have	VERB
app01-6686	117	7	young	young	ADJ
app01-6686	117	8	’s	’s	PART
app01-6686	117	9	modulus	modulus	NOUN
app01-6686	117	10	ranging	range	VERB
app01-6686	117	11	from	from	ADP
app01-6686	117	12	130.2	130.2	NUM
app01-6686	117	13	to	to	ADP
app01-6686	117	14	168.9	168.9	NUM
app01-6686	117	15	gpa	gpa	NOUN
app01-6686	117	16	[	[	X
app01-6686	117	17	20	20	NUM
app01-6686	117	18	]	]	PUNCT
app01-6686	117	19	,	,	PUNCT
app01-6686	117	20	the	the	DET
app01-6686	117	21	minimal	minimal	ADJ
app01-6686	117	22	value	value	NOUN
app01-6686	117	23	is	be	AUX
app01-6686	117	24	for	for	ADP
app01-6686	117	25	the	the	DET
app01-6686	117	26	[	[	X
app01-6686	117	27	100	100	NUM
app01-6686	117	28	]	]	X
app01-6686	117	29	direction	direction	NOUN
app01-6686	117	30	and	and	CCONJ
app01-6686	117	31	can	can	AUX
app01-6686	117	32	be	be	AUX
app01-6686	117	33	calculated	calculate	VERB
app01-6686	117	34	as	as	ADP
app01-6686	117	35	:	:	PUNCT
app01-6686	117	36	e[100	e[100	NUM
app01-6686	117	37	]	]	X
app01-6686	117	38	=	=	PUNCT
app01-6686	117	39	c11	c11	NOUN
app01-6686	117	40	−	−	PROPN
app01-6686	117	41	2	2	NUM
app01-6686	117	42	c12	c12	NOUN
app01-6686	117	43	c11	c11	NOUN
app01-6686	117	44	+	+	CCONJ
app01-6686	117	45	c12	c12	PROPN
app01-6686	117	46	c12	c12	NOUN
app01-6686	117	47	.	.	PUNCT
app01-6686	118	1	(	(	PUNCT
app01-6686	118	2	3	3	X
app01-6686	118	3	)	)	PUNCT
app01-6686	118	4	in	in	ADP
app01-6686	118	5	this	this	DET
app01-6686	118	6	work	work	NOUN
app01-6686	118	7	,	,	PUNCT
app01-6686	118	8	the	the	DET
app01-6686	118	9	elastic	elastic	ADJ
app01-6686	118	10	stiffness	stiffness	NOUN
app01-6686	118	11	constants	constant	NOUN
app01-6686	118	12	were	be	AUX
app01-6686	118	13	measured	measure	VERB
app01-6686	118	14	in	in	ADP
app01-6686	118	15	various	various	ADJ
app01-6686	118	16	directions	direction	NOUN
app01-6686	118	17	on	on	ADP
app01-6686	118	18	several	several	ADJ
app01-6686	118	19	si	si	X
app01-6686	118	20	(	(	PUNCT
app01-6686	118	21	100	100	NUM
app01-6686	118	22	)	)	PUNCT
app01-6686	118	23	wafers	wafer	NOUN
app01-6686	118	24	.	.	PUNCT
app01-6686	119	1	the	the	DET
app01-6686	119	2	resulting	result	VERB
app01-6686	119	3	average	average	ADJ
app01-6686	119	4	values	value	NOUN
app01-6686	119	5	were	be	AUX
app01-6686	119	6	c11	c11	ADJ
app01-6686	119	7	=	=	NOUN
app01-6686	119	8	165.4	165.4	NUM
app01-6686	119	9	,	,	PUNCT
app01-6686	119	10	c12	c12	PROPN
app01-6686	119	11	=	=	SYM
app01-6686	119	12	63.5	63.5	NUM
app01-6686	119	13	and	and	CCONJ
app01-6686	119	14	c44	c44	NOUN
app01-6686	119	15	=	=	SYM
app01-6686	119	16	79.6	79.6	NUM
app01-6686	119	17	gpa	gpa	NOUN
app01-6686	119	18	that	that	PRON
app01-6686	119	19	is	be	AUX
app01-6686	119	20	in	in	ADP
app01-6686	119	21	excellent	excellent	ADJ
app01-6686	119	22	agreement	agreement	NOUN
app01-6686	119	23	with	with	ADP
app01-6686	119	24	literature	literature	NOUN
app01-6686	119	25	values	value	NOUN
app01-6686	119	26	listed	list	VERB
app01-6686	119	27	above	above	ADV
app01-6686	119	28	.	.	PUNCT
app01-6686	120	1	using	use	VERB
app01-6686	120	2	these	these	DET
app01-6686	120	3	constant	constant	ADJ
app01-6686	120	4	it	it	PRON
app01-6686	120	5	is	be	AUX
app01-6686	120	6	possible	possible	ADJ
app01-6686	120	7	to	to	PART
app01-6686	120	8	plot	plot	VERB
app01-6686	120	9	a	a	DET
app01-6686	120	10	polar	polar	ADJ
app01-6686	120	11	dependence	dependence	NOUN
app01-6686	120	12	of	of	ADP
app01-6686	120	13	young	young	ADJ
app01-6686	120	14	’s	’s	PART
app01-6686	120	15	modulus	modulus	NOUN
app01-6686	120	16	and	and	CCONJ
app01-6686	120	17	poisson	poisson	NOUN
app01-6686	120	18	’s	’s	PART
app01-6686	120	19	ratio	ratio	NOUN
app01-6686	120	20	.	.	PUNCT
app01-6686	121	1	figure	figure	NOUN
app01-6686	121	2	5	5	NUM
app01-6686	121	3	clearly	clearly	ADV
app01-6686	121	4	shows	show	VERB
app01-6686	121	5	the	the	DET
app01-6686	121	6	strong	strong	ADJ
app01-6686	121	7	anisotropy	anisotropy	NOUN
app01-6686	121	8	of	of	ADP
app01-6686	121	9	silicon	silicon	NOUN
app01-6686	121	10	elastic	elastic	ADJ
app01-6686	121	11	constants	constant	NOUN
app01-6686	121	12	.	.	PUNCT
app01-6686	122	1	using	use	VERB
app01-6686	122	2	law	law	NOUN
app01-6686	122	3	,	,	PUNCT
app01-6686	122	4	anisotropy	anisotropy	NOUN
app01-6686	122	5	of	of	ADP
app01-6686	122	6	any	any	DET
app01-6686	122	7	cubic	cubic	ADJ
app01-6686	122	8	crystals	crystal	NOUN
app01-6686	122	9	can	can	AUX
app01-6686	122	10	be	be	AUX
app01-6686	122	11	explored	explore	VERB
app01-6686	122	12	and	and	CCONJ
app01-6686	122	13	elastic	elastic	ADJ
app01-6686	122	14	constants	constant	NOUN
app01-6686	122	15	can	can	AUX
app01-6686	122	16	be	be	AUX
app01-6686	122	17	calculated	calculate	VERB
app01-6686	122	18	for	for	ADP
app01-6686	122	19	any	any	DET
app01-6686	122	20	other	other	ADJ
app01-6686	122	21	plane	plane	NOUN
app01-6686	122	22	orientations	orientation	NOUN
app01-6686	122	23	.	.	PUNCT
app01-6686	123	1	3	3	X
app01-6686	123	2	.	.	X
app01-6686	123	3	conclusions	conclusion	NOUN
app01-6686	123	4	law	law	NOUN
app01-6686	123	5	is	be	AUX
app01-6686	123	6	a	a	DET
app01-6686	123	7	combined	combine	VERB
app01-6686	123	8	acousto	acousto	ADJ
app01-6686	123	9	-	-	PUNCT
app01-6686	123	10	optic	optic	ADJ
app01-6686	123	11	method	method	NOUN
app01-6686	123	12	developed	develop	VERB
app01-6686	123	13	for	for	ADP
app01-6686	123	14	assessment	assessment	NOUN
app01-6686	123	15	of	of	ADP
app01-6686	123	16	material	material	ADJ
app01-6686	123	17	characteristics	characteristic	NOUN
app01-6686	123	18	of	of	ADP
app01-6686	123	19	surfaces	surface	NOUN
app01-6686	123	20	and	and	CCONJ
app01-6686	123	21	can	can	AUX
app01-6686	123	22	be	be	AUX
app01-6686	123	23	used	use	VERB
app01-6686	123	24	to	to	PART
app01-6686	123	25	obtain	obtain	VERB
app01-6686	123	26	values	value	NOUN
app01-6686	123	27	of	of	ADP
app01-6686	123	28	young	young	ADJ
app01-6686	123	29	’s	’s	PART
app01-6686	123	30	modulus	modulus	NOUN
app01-6686	123	31	,	,	PUNCT
app01-6686	123	32	poisson	poisson	PROPN
app01-6686	123	33	’s	’s	PART
app01-6686	123	34	ratio	ratio	NOUN
app01-6686	123	35	and	and	CCONJ
app01-6686	123	36	density	density	NOUN
app01-6686	123	37	for	for	ADP
app01-6686	123	38	both	both	CCONJ
app01-6686	123	39	the	the	DET
app01-6686	123	40	film	film	NOUN
app01-6686	123	41	as	as	ADV
app01-6686	123	42	well	well	ADV
app01-6686	123	43	as	as	ADP
app01-6686	123	44	60	60	NUM
app01-6686	123	45	vol	vol	NOUN
app01-6686	123	46	.	.	PUNCT
app01-6686	124	1	27/2020	27/2020	NUM
app01-6686	124	2	laser	laser	NOUN
app01-6686	124	3	-	-	PUNCT
app01-6686	124	4	induced	induce	VERB
app01-6686	124	5	surface	surface	NOUN
app01-6686	124	6	acoustic	acoustic	ADJ
app01-6686	124	7	waves	wave	NOUN
app01-6686	124	8	for	for	ADP
app01-6686	124	9	thin	thin	ADJ
app01-6686	124	10	film	film	NOUN
app01-6686	124	11	characterization	characterization	NOUN
app01-6686	124	12	the	the	DET
app01-6686	124	13	substrate	substrate	NOUN
app01-6686	124	14	.	.	PUNCT
app01-6686	125	1	it	it	PRON
app01-6686	125	2	can	can	AUX
app01-6686	125	3	also	also	ADV
app01-6686	125	4	be	be	AUX
app01-6686	125	5	used	use	VERB
app01-6686	125	6	to	to	PART
app01-6686	125	7	obtain	obtain	VERB
app01-6686	125	8	the	the	DET
app01-6686	125	9	values	value	NOUN
app01-6686	125	10	of	of	ADP
app01-6686	125	11	elastic	elastic	ADJ
app01-6686	125	12	stiffness	stiffness	NOUN
app01-6686	125	13	constants	constant	NOUN
app01-6686	125	14	for	for	ADP
app01-6686	125	15	anisotropic	anisotropic	NOUN
app01-6686	125	16	materials	material	NOUN
app01-6686	125	17	with	with	ADP
app01-6686	125	18	cubic	cubic	ADJ
app01-6686	125	19	symmetry	symmetry	NOUN
app01-6686	125	20	.	.	PUNCT
app01-6686	126	1	films	film	NOUN
app01-6686	126	2	’	'	PUNCT
app01-6686	126	3	thicknesses	thickness	NOUN
app01-6686	126	4	measured	measure	VERB
app01-6686	126	5	via	via	ADP
app01-6686	126	6	law	law	NOUN
app01-6686	126	7	are	be	AUX
app01-6686	126	8	very	very	ADV
app01-6686	126	9	close	close	ADJ
app01-6686	126	10	to	to	ADP
app01-6686	126	11	those	those	PRON
app01-6686	126	12	from	from	ADP
app01-6686	126	13	optical	optical	ADJ
app01-6686	126	14	thickness	thickness	NOUN
app01-6686	126	15	measurements	measurement	NOUN
app01-6686	126	16	if	if	SCONJ
app01-6686	126	17	input	input	NOUN
app01-6686	126	18	parameters	parameter	NOUN
app01-6686	126	19	are	be	AUX
app01-6686	126	20	precisely	precisely	ADV
app01-6686	126	21	known	know	VERB
app01-6686	126	22	.	.	PUNCT
app01-6686	127	1	young	young	ADJ
app01-6686	127	2	’s	’s	PART
app01-6686	127	3	modulus	modulus	ADJ
app01-6686	127	4	measurements	measurement	NOUN
app01-6686	127	5	by	by	ADP
app01-6686	127	6	law	law	NOUN
app01-6686	127	7	and	and	CCONJ
app01-6686	127	8	by	by	ADP
app01-6686	127	9	nanoindentation	nanoindentation	NOUN
app01-6686	127	10	yielded	yield	VERB
app01-6686	127	11	same	same	ADJ
app01-6686	127	12	results	result	NOUN
app01-6686	127	13	for	for	ADP
app01-6686	127	14	films	film	NOUN
app01-6686	127	15	with	with	ADP
app01-6686	127	16	thickness	thickness	NOUN
app01-6686	127	17	over	over	ADP
app01-6686	127	18	100	100	NUM
app01-6686	127	19	nm	nm	NOUN
app01-6686	127	20	,	,	PUNCT
app01-6686	127	21	however	however	ADV
app01-6686	127	22	as	as	SCONJ
app01-6686	127	23	the	the	DET
app01-6686	127	24	indentation	indentation	NOUN
app01-6686	127	25	depth	depth	NOUN
app01-6686	127	26	/	/	SYM
app01-6686	127	27	film	film	NOUN
app01-6686	127	28	thickness	thickness	NOUN
app01-6686	127	29	ratio	ratio	NOUN
app01-6686	127	30	increased	increase	VERB
app01-6686	127	31	the	the	DET
app01-6686	127	32	data	datum	NOUN
app01-6686	127	33	from	from	ADP
app01-6686	127	34	nanoindentation	nanoindentation	NOUN
app01-6686	127	35	started	start	VERB
app01-6686	127	36	to	to	PART
app01-6686	127	37	be	be	AUX
app01-6686	127	38	affected	affect	VERB
app01-6686	127	39	by	by	ADP
app01-6686	127	40	substrate	substrate	NOUN
app01-6686	127	41	as	as	SCONJ
app01-6686	127	42	the	the	DET
app01-6686	127	43	predicted	predict	VERB
app01-6686	127	44	by	by	ADP
app01-6686	127	45	the	the	DET
app01-6686	127	46	commonly	commonly	ADV
app01-6686	127	47	used	use	VERB
app01-6686	127	48	10	10	NUM
app01-6686	127	49	%	%	NOUN
app01-6686	127	50	rule	rule	NOUN
app01-6686	127	51	of	of	ADP
app01-6686	127	52	thumb	thumb	NOUN
app01-6686	127	53	(	(	PUNCT
app01-6686	127	54	indenter	indenter	NOUN
app01-6686	127	55	should	should	AUX
app01-6686	127	56	not	not	PART
app01-6686	127	57	penetrate	penetrate	VERB
app01-6686	127	58	deeper	deeply	ADV
app01-6686	127	59	than	than	ADP
app01-6686	127	60	to	to	ADP
app01-6686	127	61	the	the	DET
app01-6686	127	62	10	10	NUM
app01-6686	127	63	%	%	NOUN
app01-6686	127	64	of	of	ADP
app01-6686	127	65	the	the	DET
app01-6686	127	66	film	film	NOUN
app01-6686	127	67	)	)	PUNCT
app01-6686	127	68	.	.	PUNCT
app01-6686	128	1	acknowledgements	acknowledgement	NOUN
app01-6686	128	2	the	the	DET
app01-6686	128	3	authors	author	NOUN
app01-6686	128	4	gratefully	gratefully	ADV
app01-6686	128	5	acknowledge	acknowledge	VERB
app01-6686	128	6	the	the	DET
app01-6686	128	7	support	support	NOUN
app01-6686	128	8	from	from	ADP
app01-6686	128	9	the	the	DET
app01-6686	128	10	project	project	NOUN
app01-6686	128	11	iga_prf_2019_008	iga_prf_2019_008	NOUN
app01-6686	128	12	of	of	ADP
app01-6686	128	13	palacky	palacky	PROPN
app01-6686	128	14	university	university	NOUN
app01-6686	128	15	and	and	CCONJ
app01-6686	128	16	the	the	DET
app01-6686	128	17	project	project	NOUN
app01-6686	128	18	th03020245	th03020245	PROPN
app01-6686	128	19	of	of	ADP
app01-6686	128	20	the	the	DET
app01-6686	128	21	technology	technology	NOUN
app01-6686	128	22	agency	agency	NOUN
app01-6686	128	23	of	of	ADP
app01-6686	128	24	the	the	DET
app01-6686	128	25	czech	czech	PROPN
app01-6686	128	26	republic	republic	NOUN
app01-6686	128	27	and	and	CCONJ
app01-6686	128	28	the	the	DET
app01-6686	128	29	operational	operational	ADJ
app01-6686	128	30	program	program	NOUN
app01-6686	128	31	research	research	NOUN
app01-6686	128	32	,	,	PUNCT
app01-6686	128	33	development	development	NOUN
app01-6686	128	34	and	and	CCONJ
app01-6686	128	35	education	education	NOUN
app01-6686	128	36	,	,	PUNCT
app01-6686	128	37	project	project	NOUN
app01-6686	128	38	no	no	NOUN
app01-6686	128	39	.	.	PUNCT
app01-6686	129	1	cz.02.1.01/0.0/0.0/17_049/0008422	cz.02.1.01/0.0/0.0/17_049/0008422	NOUN
app01-6686	129	2	of	of	ADP
app01-6686	129	3	the	the	DET
app01-6686	129	4	ministry	ministry	PROPN
app01-6686	129	5	of	of	ADP
app01-6686	129	6	education	education	PROPN
app01-6686	129	7	,	,	PUNCT
app01-6686	129	8	youth	youth	NOUN
app01-6686	129	9	and	and	CCONJ
app01-6686	129	10	sports	sport	NOUN
app01-6686	129	11	of	of	ADP
app01-6686	129	12	the	the	DET
app01-6686	129	13	czech	czech	PROPN
app01-6686	129	14	republic	republic	NOUN
app01-6686	129	15	.	.	PUNCT
app01-6686	130	1	references	reference	NOUN
app01-6686	130	2	[	[	X
app01-6686	130	3	1	1	NUM
app01-6686	130	4	]	]	PUNCT
app01-6686	130	5	w.	w.	PROPN
app01-6686	130	6	oliver	oliver	PROPN
app01-6686	130	7	,	,	PUNCT
app01-6686	130	8	g.	g.	PROPN
app01-6686	130	9	pharr	pharr	PROPN
app01-6686	130	10	.	.	PUNCT
app01-6686	131	1	measurement	measurement	NOUN
app01-6686	131	2	of	of	ADP
app01-6686	131	3	hardness	hardness	NOUN
app01-6686	131	4	and	and	CCONJ
app01-6686	131	5	elastic	elastic	ADJ
app01-6686	131	6	modulus	modulus	NOUN
app01-6686	131	7	by	by	ADP
app01-6686	131	8	instrumented	instrumented	ADJ
app01-6686	131	9	indentation	indentation	NOUN
app01-6686	131	10	:	:	PUNCT
app01-6686	131	11	advances	advance	NOUN
app01-6686	131	12	in	in	ADP
app01-6686	131	13	understanding	understanding	NOUN
app01-6686	131	14	and	and	CCONJ
app01-6686	131	15	refinements	refinement	NOUN
app01-6686	131	16	to	to	ADP
app01-6686	131	17	methodology	methodology	NOUN
app01-6686	131	18	.	.	PUNCT
app01-6686	132	1	journal	journal	PROPN
app01-6686	132	2	of	of	ADP
app01-6686	132	3	materials	material	NOUN
app01-6686	132	4	research	research	NOUN
app01-6686	132	5	19(1):3–20	19(1):3–20	NUM
app01-6686	132	6	,	,	PUNCT
app01-6686	132	7	2004	2004	NUM
app01-6686	132	8	.	.	PUNCT
app01-6686	133	1	doi:10.1557	doi:10.1557	PROPN
app01-6686	133	2	/	/	SYM
app01-6686	133	3	jmr.2004.19.1.3	jmr.2004.19.1.3	PROPN
app01-6686	133	4	.	.	PUNCT
app01-6686	134	1	[	[	X
app01-6686	134	2	2	2	NUM
app01-6686	134	3	]	]	PUNCT
app01-6686	134	4	a.	a.	NOUN
app01-6686	134	5	korsunsky	korsunsky	PROPN
app01-6686	134	6	,	,	PUNCT
app01-6686	134	7	m.	m.	PROPN
app01-6686	134	8	mcgurk	mcgurk	PROPN
app01-6686	134	9	,	,	PUNCT
app01-6686	134	10	s.	s.	PROPN
app01-6686	134	11	bull	bull	PROPN
app01-6686	134	12	,	,	PUNCT
app01-6686	134	13	t.	t.	NOUN
app01-6686	134	14	page	page	NOUN
app01-6686	134	15	.	.	PUNCT
app01-6686	135	1	on	on	ADP
app01-6686	135	2	the	the	DET
app01-6686	135	3	hardness	hardness	NOUN
app01-6686	135	4	of	of	ADP
app01-6686	135	5	coated	coated	ADJ
app01-6686	135	6	systems	system	NOUN
app01-6686	135	7	.	.	PUNCT
app01-6686	136	1	surface	surface	NOUN
app01-6686	136	2	and	and	CCONJ
app01-6686	136	3	coatings	coating	NOUN
app01-6686	136	4	technology	technology	NOUN
app01-6686	136	5	99(1	99(1	NOUN
app01-6686	136	6	-	-	PUNCT
app01-6686	136	7	2):171–183	2):171–183	NUM
app01-6686	136	8	,	,	PUNCT
app01-6686	136	9	1998	1998	NUM
app01-6686	136	10	.	.	PUNCT
app01-6686	137	1	doi:10.1016	doi:10.1016	PROPN
app01-6686	137	2	/	/	SYM
app01-6686	137	3	s0257	s0257	PROPN
app01-6686	137	4	-	-	PUNCT
app01-6686	137	5	8972(97)00522	8972(97)00522	NUM
app01-6686	137	6	-	-	PUNCT
app01-6686	137	7	7	7	NUM
app01-6686	137	8	.	.	PUNCT
app01-6686	138	1	[	[	X
app01-6686	138	2	3	3	NUM
app01-6686	138	3	]	]	PUNCT
app01-6686	138	4	a.	a.	NOUN
app01-6686	138	5	bhattacharya	bhattacharya	PROPN
app01-6686	138	6	,	,	PUNCT
app01-6686	138	7	w.	w.	PROPN
app01-6686	138	8	nix	nix	PROPN
app01-6686	138	9	.	.	PUNCT
app01-6686	139	1	analysis	analysis	NOUN
app01-6686	139	2	of	of	ADP
app01-6686	139	3	elastic	elastic	ADJ
app01-6686	139	4	and	and	CCONJ
app01-6686	139	5	plastic	plastic	ADJ
app01-6686	139	6	deformation	deformation	NOUN
app01-6686	139	7	associated	associate	VERB
app01-6686	139	8	with	with	ADP
app01-6686	139	9	indentation	indentation	NOUN
app01-6686	139	10	testing	testing	NOUN
app01-6686	139	11	of	of	ADP
app01-6686	139	12	thin	thin	ADJ
app01-6686	139	13	films	film	NOUN
app01-6686	139	14	on	on	ADP
app01-6686	139	15	substrates	substrate	NOUN
app01-6686	139	16	.	.	PUNCT
app01-6686	140	1	international	international	ADJ
app01-6686	140	2	journal	journal	NOUN
app01-6686	140	3	of	of	ADP
app01-6686	140	4	solids	solid	NOUN
app01-6686	140	5	and	and	CCONJ
app01-6686	140	6	structures	structure	NOUN
app01-6686	140	7	24(12):1287–1298	24(12):1287–1298	NUM
app01-6686	140	8	,	,	PUNCT
app01-6686	140	9	1988	1988	NUM
app01-6686	140	10	.	.	PUNCT
app01-6686	141	1	doi:10.1016/0020	doi:10.1016/0020	PROPN
app01-6686	141	2	-	-	PUNCT
app01-6686	141	3	7683(88)90091	7683(88)90091	NOUN
app01-6686	141	4	-	-	NOUN
app01-6686	141	5	1	1	NUM
app01-6686	141	6	.	.	PUNCT
app01-6686	142	1	[	[	X
app01-6686	142	2	4	4	NUM
app01-6686	142	3	]	]	PUNCT
app01-6686	142	4	m.	m.	NOUN
app01-6686	142	5	sakai	sakai	PROPN
app01-6686	142	6	.	.	PUNCT
app01-6686	142	7	substrate	substrate	NOUN
app01-6686	142	8	-	-	PUNCT
app01-6686	142	9	affected	affect	VERB
app01-6686	142	10	indentation	indentation	NOUN
app01-6686	142	11	contact	contact	NOUN
app01-6686	142	12	parameters	parameter	NOUN
app01-6686	142	13	of	of	ADP
app01-6686	142	14	elastoplastic	elastoplastic	ADJ
app01-6686	142	15	coating	coating	NOUN
app01-6686	142	16	/	/	SYM
app01-6686	142	17	substrate	substrate	NOUN
app01-6686	142	18	composites	composite	NOUN
app01-6686	142	19	.	.	PUNCT
app01-6686	143	1	journal	journal	NOUN
app01-6686	143	2	of	of	ADP
app01-6686	143	3	materials	material	NOUN
app01-6686	143	4	research	research	NOUN
app01-6686	143	5	24(3):831–843	24(3):831–843	NOUN
app01-6686	143	6	,	,	PUNCT
app01-6686	143	7	2009	2009	NUM
app01-6686	143	8	.	.	PUNCT
app01-6686	144	1	doi:10.1557	doi:10.1557	PROPN
app01-6686	144	2	/	/	SYM
app01-6686	144	3	jmr.2009.0102	jmr.2009.0102	PRON
app01-6686	144	4	.	.	PUNCT
app01-6686	145	1	[	[	X
app01-6686	145	2	5	5	NUM
app01-6686	145	3	]	]	PUNCT
app01-6686	145	4	a.	a.	NOUN
app01-6686	145	5	c.	c.	PROPN
app01-6686	145	6	fischer	fischer	PROPN
app01-6686	145	7	-	-	PUNCT
app01-6686	145	8	cripps	cripps	PROPN
app01-6686	145	9	.	.	PUNCT
app01-6686	146	1	nanoindentation	nanoindentation	NOUN
app01-6686	146	2	.	.	PUNCT
app01-6686	147	1	springer	springer	PROPN
app01-6686	147	2	new	new	PROPN
app01-6686	147	3	york	york	PROPN
app01-6686	147	4	,	,	PUNCT
app01-6686	147	5	2004	2004	NUM
app01-6686	147	6	.	.	PUNCT
app01-6686	148	1	doi:10.1007/978	doi:10.1007/978	ADJ
app01-6686	148	2	-	-	PUNCT
app01-6686	148	3	1	1	NUM
app01-6686	148	4	-	-	PUNCT
app01-6686	148	5	4757	4757	NUM
app01-6686	148	6	-	-	PUNCT
app01-6686	148	7	5943	5943	NUM
app01-6686	148	8	-	-	SYM
app01-6686	148	9	3	3	NUM
app01-6686	148	10	.	.	PUNCT
app01-6686	149	1	[	[	X
app01-6686	149	2	6	6	NUM
app01-6686	149	3	]	]	PUNCT
app01-6686	149	4	t.	t.	PROPN
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app01-6686	149	6	,	,	PUNCT
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app01-6686	149	8	akiyama	akiyama	PROPN
app01-6686	149	9	,	,	PUNCT
app01-6686	149	10	a.	a.	PROPN
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app01-6686	149	12	,	,	PUNCT
app01-6686	149	13	k.	k.	PROPN
app01-6686	149	14	tanaka	tanaka	PROPN
app01-6686	149	15	.	.	PUNCT
app01-6686	150	1	nanoindentation	nanoindentation	NOUN
app01-6686	150	2	of	of	ADP
app01-6686	150	3	a	a	DET
app01-6686	150	4	10	10	NUM
app01-6686	150	5	nm	nm	ADV
app01-6686	150	6	thick	thick	ADJ
app01-6686	150	7	thin	thin	ADJ
app01-6686	150	8	film	film	NOUN
app01-6686	150	9	.	.	PUNCT
app01-6686	151	1	journal	journal	PROPN
app01-6686	151	2	of	of	ADP
app01-6686	151	3	materials	material	NOUN
app01-6686	151	4	research	research	NOUN
app01-6686	151	5	14(6):2228–2232	14(6):2228–2232	NUM
app01-6686	151	6	,	,	PUNCT
app01-6686	151	7	1999	1999	NUM
app01-6686	151	8	.	.	PUNCT
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app01-6686	152	2	/	/	SYM
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app01-6686	152	4	.	.	PUNCT
app01-6686	153	1	[	[	X
app01-6686	153	2	7	7	X
app01-6686	153	3	]	]	X
app01-6686	153	4	d.	d.	PROPN
app01-6686	153	5	schneider	schneider	PROPN
app01-6686	153	6	,	,	PUNCT
app01-6686	153	7	p.	p.	PROPN
app01-6686	153	8	siemroth	siemroth	PROPN
app01-6686	153	9	,	,	PUNCT
app01-6686	153	10	t.	t.	PROPN
app01-6686	153	11	schülke	schülke	PROPN
app01-6686	153	12	,	,	PUNCT
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app01-6686	153	14	al	al	PROPN
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app01-6686	153	16	quality	quality	PROPN
app01-6686	153	17	control	control	NOUN
app01-6686	153	18	of	of	ADP
app01-6686	153	19	ultra	ultra	ADJ
app01-6686	153	20	-	-	ADJ
app01-6686	153	21	thin	thin	ADJ
app01-6686	153	22	and	and	CCONJ
app01-6686	153	23	super	super	ADJ
app01-6686	153	24	-	-	ADJ
app01-6686	153	25	hard	hard	ADJ
app01-6686	153	26	coatings	coating	NOUN
app01-6686	153	27	by	by	ADP
app01-6686	153	28	laser	laser	NOUN
app01-6686	153	29	-	-	PUNCT
app01-6686	153	30	acoustics	acoustic	NOUN
app01-6686	153	31	.	.	PUNCT
app01-6686	154	1	surface	surface	NOUN
app01-6686	154	2	and	and	CCONJ
app01-6686	154	3	coatings	coating	NOUN
app01-6686	154	4	technology	technology	NOUN
app01-6686	154	5	153(23):252–260	153(23):252–260	NUM
app01-6686	154	6	,	,	PUNCT
app01-6686	154	7	2002	2002	NUM
app01-6686	154	8	.	.	PUNCT
app01-6686	155	1	doi:10.1016	doi:10.1016	PROPN
app01-6686	155	2	/	/	SYM
app01-6686	155	3	s0257	s0257	PROPN
app01-6686	155	4	-	-	PUNCT
app01-6686	155	5	8972(01)01664	8972(01)01664	NUM
app01-6686	155	6	-	-	SYM
app01-6686	155	7	4	4	NUM
app01-6686	155	8	.	.	PUNCT
app01-6686	156	1	[	[	X
app01-6686	156	2	8	8	NUM
app01-6686	156	3	]	]	X
app01-6686	156	4	d.	d.	PROPN
app01-6686	156	5	schneider	schneider	PROPN
app01-6686	156	6	,	,	PUNCT
app01-6686	156	7	t.	t.	PROPN
app01-6686	156	8	schwarz	schwarz	PROPN
app01-6686	156	9	.	.	PUNCT
app01-6686	157	1	a	a	DET
app01-6686	157	2	photoacoustic	photoacoustic	ADJ
app01-6686	157	3	method	method	NOUN
app01-6686	157	4	for	for	ADP
app01-6686	157	5	characterising	characterise	VERB
app01-6686	157	6	thin	thin	ADJ
app01-6686	157	7	films	film	NOUN
app01-6686	157	8	.	.	PUNCT
app01-6686	158	1	surface	surface	NOUN
app01-6686	158	2	and	and	CCONJ
app01-6686	158	3	coatings	coating	NOUN
app01-6686	158	4	technology	technology	NOUN
app01-6686	158	5	91(1	91(1	NOUN
app01-6686	158	6	-	-	PUNCT
app01-6686	158	7	2):136–146	2):136–146	NUM
app01-6686	158	8	,	,	PUNCT
app01-6686	158	9	1997	1997	NUM
app01-6686	158	10	.	.	PUNCT
app01-6686	159	1	doi:10.1016	doi:10.1016	PROPN
app01-6686	159	2	/	/	SYM
app01-6686	159	3	s0257	s0257	PROPN
app01-6686	159	4	-	-	PUNCT
app01-6686	159	5	8972(96)03147	8972(96)03147	NUM
app01-6686	159	6	-	-	PUNCT
app01-6686	159	7	7	7	NUM
app01-6686	159	8	.	.	PUNCT
app01-6686	160	1	[	[	X
app01-6686	160	2	9	9	NUM
app01-6686	160	3	]	]	X
app01-6686	160	4	c.	c.	PROPN
app01-6686	160	5	bohling	bohling	NOUN
app01-6686	160	6	,	,	PUNCT
app01-6686	160	7	w.	w.	NOUN
app01-6686	160	8	sigmund	sigmund	PROPN
app01-6686	160	9	.	.	PUNCT
app01-6686	161	1	self	self	NOUN
app01-6686	161	2	-	-	PUNCT
app01-6686	161	3	limitation	limitation	NOUN
app01-6686	161	4	of	of	ADP
app01-6686	161	5	native	native	ADJ
app01-6686	161	6	oxides	oxide	NOUN
app01-6686	161	7	explained	explain	VERB
app01-6686	161	8	.	.	PUNCT
app01-6686	162	1	silicon	silicon	PROPN
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app01-6686	162	3	,	,	PUNCT
app01-6686	162	4	2015	2015	NUM
app01-6686	162	5	.	.	PUNCT
app01-6686	163	1	doi:10.1007	doi:10.1007	VERB
app01-6686	163	2	/	/	SYM
app01-6686	163	3	s12633	s12633	NOUN
app01-6686	163	4	-	-	PUNCT
app01-6686	163	5	015	015	NUM
app01-6686	163	6	-	-	PUNCT
app01-6686	163	7	9366	9366	NUM
app01-6686	163	8	-	-	SYM
app01-6686	163	9	8	8	NUM
app01-6686	163	10	.	.	PUNCT
app01-6686	164	1	[	[	X
app01-6686	164	2	10	10	NUM
app01-6686	164	3	]	]	X
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app01-6686	164	5	paehler	paehler	PROPN
app01-6686	164	6	,	,	PUNCT
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app01-6686	164	11	herben	herben	PROPN
app01-6686	164	12	.	.	PUNCT
app01-6686	165	1	nondestructive	nondestructive	ADJ
app01-6686	165	2	characterization	characterization	NOUN
app01-6686	165	3	of	of	ADP
app01-6686	165	4	sub	sub	ADJ
app01-6686	165	5	-	-	ADJ
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app01-6686	165	8	in	in	ADP
app01-6686	165	9	rotational	rotational	ADJ
app01-6686	165	10	ground	ground	NOUN
app01-6686	165	11	silicon	silicon	NOUN
app01-6686	165	12	wafers	wafer	NOUN
app01-6686	165	13	by	by	ADP
app01-6686	165	14	laser	laser	NOUN
app01-6686	165	15	acoustics	acoustic	NOUN
app01-6686	165	16	.	.	PUNCT
app01-6686	166	1	microelectronic	microelectronic	ADJ
app01-6686	166	2	engineering	engineering	NOUN
app01-6686	166	3	84(2):340–354	84(2):340–354	PROPN
app01-6686	166	4	,	,	PUNCT
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app01-6686	166	6	.	.	PUNCT
app01-6686	167	1	doi:10.1016	doi:10.1016	PROPN
app01-6686	167	2	/	/	SYM
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app01-6686	167	4	.	.	PUNCT
app01-6686	168	1	[	[	X
app01-6686	168	2	11	11	NUM
app01-6686	168	3	]	]	PUNCT
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app01-6686	168	5	d.	d.	PROPN
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app01-6686	168	7	,	,	PUNCT
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app01-6686	168	9	e.	e.	PROPN
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app01-6686	168	11	,	,	PUNCT
app01-6686	168	12	j.	j.	PROPN
app01-6686	168	13	w.	w.	PROPN
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app01-6686	168	18	.	.	PROPN
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app01-6686	168	34	x	x	ADJ
app01-6686	168	35	-	-	NOUN
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app01-6686	168	39	.	.	PUNCT
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app01-6686	169	5	&	&	CCONJ
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app01-6686	169	7	b	b	PROPN
app01-6686	169	8	:	:	PUNCT
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app01-6686	169	16	.	.	PUNCT
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app01-6686	170	2	.	.	PUNCT
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app01-6686	171	3	]	]	X
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app01-6686	171	5	materials	material	NOUN
app01-6686	171	6	.	.	PUNCT
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app01-6686	172	2	indentation	indentation	NOUN
app01-6686	172	3	test	test	NOUN
app01-6686	172	4	for	for	ADP
app01-6686	172	5	hardness	hardness	NOUN
app01-6686	172	6	and	and	CCONJ
app01-6686	172	7	materials	material	NOUN
app01-6686	172	8	parameters	parameter	NOUN
app01-6686	172	9	.	.	PUNCT
app01-6686	173	1	doi:10.3403	doi:10.3403	NOUN
app01-6686	173	2	/	/	SYM
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app01-6686	173	4	.	.	PUNCT
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app01-6686	174	2	13	13	NUM
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app01-6686	174	6	,	,	PUNCT
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app01-6686	174	9	,	,	PUNCT
app01-6686	174	10	y.	y.	PROPN
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app01-6686	174	12	.	.	PUNCT
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app01-6686	175	4	on	on	ADP
app01-6686	175	5	the	the	DET
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app01-6686	175	8	of	of	ADP
app01-6686	175	9	an	an	DET
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app01-6686	175	12	-	-	PUNCT
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app01-6686	175	15	laser	laser	NOUN
app01-6686	175	16	optical	optical	ADJ
app01-6686	175	17	measurement	measurement	NOUN
app01-6686	175	18	techniques	technique	NOUN
app01-6686	175	19	.	.	PUNCT
app01-6686	176	1	coatings	coating	NOUN
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app01-6686	176	3	,	,	PUNCT
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app01-6686	176	5	.	.	PUNCT
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app01-6686	177	2	/	/	SYM
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app01-6686	179	5	pressure	pressure	NOUN
app01-6686	179	6	on	on	ADP
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app01-6686	179	10	,	,	PUNCT
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app01-6686	179	21	,	,	PUNCT
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app01-6686	179	25	.	.	PUNCT
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app01-6686	180	5	-	-	SYM
app01-6686	180	6	2):260–263	2):260–263	NUM
app01-6686	180	7	,	,	PUNCT
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app01-6686	180	9	.	.	PUNCT
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app01-6686	181	2	-	-	PUNCT
app01-6686	181	3	6090(95)06990	6090(95)06990	NUM
app01-6686	181	4	-	-	SYM
app01-6686	181	5	9	9	NUM
app01-6686	181	6	.	.	PUNCT
app01-6686	182	1	[	[	X
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app01-6686	182	3	]	]	PUNCT
app01-6686	182	4	t.	t.	PROPN
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app01-6686	184	7	,	,	PUNCT
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app01-6686	184	9	.	.	PUNCT
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app01-6686	185	6	.	.	PUNCT
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app01-6686	186	9	,	,	PUNCT
app01-6686	186	10	t.	t.	PROPN
app01-6686	186	11	rogul	rogul	PROPN
app01-6686	186	12	,	,	PUNCT
app01-6686	186	13	r.	r.	PROPN
app01-6686	186	14	ctvrtlik	ctvrtlik	PROPN
app01-6686	186	15	.	.	PUNCT
app01-6686	187	1	effect	effect	NOUN
app01-6686	187	2	of	of	ADP
app01-6686	187	3	small	small	ADJ
app01-6686	187	4	concentrations	concentration	NOUN
app01-6686	187	5	of	of	ADP
app01-6686	187	6	oxygen	oxygen	NOUN
app01-6686	187	7	and	and	CCONJ
app01-6686	187	8	nitrogen	nitrogen	NOUN
app01-6686	187	9	on	on	ADP
app01-6686	187	10	the	the	DET
app01-6686	187	11	structure	structure	NOUN
app01-6686	187	12	and	and	CCONJ
app01-6686	187	13	mechanical	mechanical	ADJ
app01-6686	187	14	properties	property	NOUN
app01-6686	187	15	of	of	ADP
app01-6686	187	16	sputtered	sputtered	ADJ
app01-6686	187	17	titanium	titanium	NOUN
app01-6686	187	18	films	film	NOUN
app01-6686	187	19	.	.	PUNCT
app01-6686	188	1	surface	surface	NOUN
app01-6686	188	2	and	and	CCONJ
app01-6686	188	3	coatings	coating	NOUN
app01-6686	188	4	technology	technology	NOUN
app01-6686	188	5	206(17):3580–3585	206(17):3580–3585	NUM
app01-6686	188	6	,	,	PUNCT
app01-6686	188	7	2012	2012	NUM
app01-6686	188	8	.	.	PUNCT
app01-6686	189	1	doi:10.1016	doi:10.1016	PROPN
app01-6686	189	2	/	/	SYM
app01-6686	189	3	j.surfcoat.2012.02.039	j.surfcoat.2012.02.039	PROPN
app01-6686	189	4	.	.	PUNCT
app01-6686	190	1	[	[	X
app01-6686	190	2	17	17	NUM
app01-6686	190	3	]	]	X
app01-6686	190	4	d.	d.	PROPN
app01-6686	190	5	schneider	schneider	PROPN
app01-6686	190	6	,	,	PUNCT
app01-6686	190	7	m.	m.	PROPN
app01-6686	190	8	tucker	tucker	PROPN
app01-6686	190	9	.	.	PUNCT
app01-6686	191	1	non	non	ADJ
app01-6686	191	2	-	-	ADJ
app01-6686	191	3	destructive	destructive	ADJ
app01-6686	191	4	characterization	characterization	NOUN
app01-6686	191	5	and	and	CCONJ
app01-6686	191	6	evaluation	evaluation	NOUN
app01-6686	191	7	of	of	ADP
app01-6686	191	8	thin	thin	ADJ
app01-6686	191	9	films	film	NOUN
app01-6686	191	10	by	by	ADP
app01-6686	191	11	laserinduced	laserinduced	ADJ
app01-6686	191	12	ultrasonic	ultrasonic	ADJ
app01-6686	191	13	surface	surface	NOUN
app01-6686	191	14	waves	wave	NOUN
app01-6686	191	15	.	.	PUNCT
app01-6686	192	1	thin	thin	ADJ
app01-6686	192	2	solid	solid	ADJ
app01-6686	192	3	films	film	NOUN
app01-6686	192	4	290291:305–311	290291:305–311	NUM
app01-6686	192	5	,	,	PUNCT
app01-6686	192	6	1996	1996	NUM
app01-6686	192	7	.	.	PUNCT
app01-6686	193	1	doi:10.1016	doi:10.1016	PROPN
app01-6686	193	2	/	/	SYM
app01-6686	193	3	s0040	s0040	PROPN
app01-6686	193	4	-	-	PUNCT
app01-6686	193	5	6090(96)09029	6090(96)09029	NUM
app01-6686	193	6	-	-	PUNCT
app01-6686	193	7	3	3	NUM
app01-6686	193	8	.	.	PUNCT
app01-6686	194	1	[	[	X
app01-6686	194	2	18	18	NUM
app01-6686	194	3	]	]	PUNCT
app01-6686	194	4	l.	l.	PROPN
app01-6686	194	5	zhang	zhang	PROPN
app01-6686	194	6	,	,	PUNCT
app01-6686	194	7	r.	r.	PROPN
app01-6686	194	8	barrett	barrett	PROPN
app01-6686	194	9	,	,	PUNCT
app01-6686	194	10	p.	p.	NOUN
app01-6686	194	11	cloetens	cloetens	PROPN
app01-6686	194	12	,	,	PUNCT
app01-6686	194	13	et	et	PROPN
app01-6686	194	14	al	al	PROPN
app01-6686	194	15	.	.	PUNCT
app01-6686	194	16	anisotropic	anisotropic	PROPN
app01-6686	194	17	elasticity	elasticity	NOUN
app01-6686	194	18	of	of	ADP
app01-6686	194	19	silicon	silicon	NOUN
app01-6686	194	20	and	and	CCONJ
app01-6686	194	21	its	its	PRON
app01-6686	194	22	application	application	NOUN
app01-6686	194	23	to	to	ADP
app01-6686	194	24	the	the	DET
app01-6686	194	25	modelling	modelling	NOUN
app01-6686	194	26	of	of	ADP
app01-6686	194	27	x	x	NOUN
app01-6686	194	28	-	-	NOUN
app01-6686	194	29	ray	ray	NOUN
app01-6686	194	30	optics	optic	NOUN
app01-6686	194	31	.	.	PUNCT
app01-6686	195	1	journal	journal	NOUN
app01-6686	195	2	of	of	ADP
app01-6686	195	3	synchrotron	synchrotron	NOUN
app01-6686	195	4	radiation	radiation	NOUN
app01-6686	195	5	21(3):507–517	21(3):507–517	PROPN
app01-6686	195	6	,	,	PUNCT
app01-6686	195	7	2014	2014	NUM
app01-6686	195	8	.	.	PUNCT
app01-6686	196	1	doi:10.1107	doi:10.1107	PROPN
app01-6686	196	2	/	/	SYM
app01-6686	196	3	s1600577514004962	s1600577514004962	PROPN
app01-6686	196	4	.	.	PUNCT
app01-6686	197	1	[	[	X
app01-6686	197	2	19	19	NUM
app01-6686	197	3	]	]	PUNCT
app01-6686	197	4	j.	j.	PROPN
app01-6686	197	5	kim	kim	PROPN
app01-6686	197	6	,	,	PUNCT
app01-6686	197	7	d.	d.	PROPN
app01-6686	197	8	il	il	PROPN
app01-6686	197	9	cho	cho	PROPN
app01-6686	197	10	,	,	PUNCT
app01-6686	197	11	r.	r.	PROPN
app01-6686	197	12	s.	s.	PROPN
app01-6686	197	13	muller	muller	PROPN
app01-6686	197	14	.	.	PUNCT
app01-6686	198	1	why	why	SCONJ
app01-6686	198	2	is	be	AUX
app01-6686	198	3	(	(	PUNCT
app01-6686	198	4	111	111	NUM
app01-6686	198	5	)	)	PUNCT
app01-6686	198	6	silicon	silicon	NOUN
app01-6686	198	7	a	a	DET
app01-6686	198	8	better	well	ADJ
app01-6686	198	9	mechanical	mechanical	ADJ
app01-6686	198	10	material	material	NOUN
app01-6686	198	11	for	for	ADP
app01-6686	198	12	mems	mem	NOUN
app01-6686	198	13	?	?	PUNCT
app01-6686	199	1	in	in	ADP
app01-6686	199	2	transducers	transducer	NOUN
app01-6686	199	3	’	'	PUNCT
app01-6686	199	4	01	01	NUM
app01-6686	199	5	eurosensors	eurosensor	NOUN
app01-6686	199	6	xv	xv	PROPN
app01-6686	199	7	,	,	PUNCT
app01-6686	199	8	pp	pp	ADJ
app01-6686	199	9	.	.	PUNCT
app01-6686	200	1	662–665	662–665	NUM
app01-6686	200	2	.	.	PUNCT
app01-6686	200	3	springer	springer	PROPN
app01-6686	200	4	berlin	berlin	PROPN
app01-6686	200	5	heidelberg	heidelberg	PROPN
app01-6686	200	6	,	,	PUNCT
app01-6686	200	7	2001	2001	NUM
app01-6686	200	8	.	.	PUNCT
app01-6686	201	1	doi:10.1007/978	doi:10.1007/978	ADJ
app01-6686	201	2	-	-	PUNCT
app01-6686	201	3	3	3	NUM
app01-6686	201	4	-	-	PUNCT
app01-6686	201	5	642	642	NUM
app01-6686	201	6	-	-	PUNCT
app01-6686	201	7	59497	59497	NUM
app01-6686	201	8	-	-	PUNCT
app01-6686	201	9	7_157	7_157	NOUN
app01-6686	201	10	.	.	PUNCT
app01-6686	202	1	[	[	X
app01-6686	202	2	20	20	NUM
app01-6686	202	3	]	]	PUNCT
app01-6686	202	4	m.	m.	NOUN
app01-6686	202	5	a.	a.	NOUN
app01-6686	202	6	hopcroft	hopcroft	ADV
app01-6686	202	7	,	,	PUNCT
app01-6686	202	8	w.	w.	PROPN
app01-6686	202	9	d.	d.	PROPN
app01-6686	202	10	nix	nix	PROPN
app01-6686	202	11	,	,	PUNCT
app01-6686	202	12	t.	t.	PROPN
app01-6686	202	13	w.	w.	PROPN
app01-6686	202	14	kenny	kenny	PROPN
app01-6686	202	15	.	.	PUNCT
app01-6686	203	1	what	what	PRON
app01-6686	203	2	is	be	AUX
app01-6686	203	3	the	the	DET
app01-6686	203	4	young	young	ADJ
app01-6686	203	5	’s	’s	PART
app01-6686	203	6	modulus	modulus	NOUN
app01-6686	203	7	of	of	ADP
app01-6686	203	8	silicon	silicon	NOUN
app01-6686	203	9	?	?	PUNCT
app01-6686	204	1	journal	journal	NOUN
app01-6686	204	2	of	of	ADP
app01-6686	204	3	microelectromechanical	microelectromechanical	ADJ
app01-6686	204	4	systems	system	NOUN
app01-6686	204	5	19(2):229–238	19(2):229–238	PROPN
app01-6686	204	6	,	,	PUNCT
app01-6686	204	7	2010	2010	NUM
app01-6686	204	8	.	.	PUNCT
app01-6686	205	1	doi:10.1109	doi:10.1109	PROPN
app01-6686	205	2	/	/	SYM
app01-6686	205	3	jmems.2009.2039697	jmems.2009.2039697	PROPN
app01-6686	205	4	.	.	PUNCT
app01-6686	206	1	61	61	NUM
app01-6686	207	1	https://doi.org/10.1557/jmr.2004.19.1.3	https://doi.org/10.1557/jmr.2004.19.1.3	ADJ
app01-6686	207	2	https://doi.org/10.1016/s0257-8972(97)00522-7	https://doi.org/10.1016/s0257-8972(97)00522-7	PROPN
app01-6686	207	3	https://doi.org/10.1016/0020-7683(88)90091-1	https://doi.org/10.1016/0020-7683(88)90091-1	PROPN
app01-6686	207	4	https://doi.org/10.1557/jmr.2009.0102	https://doi.org/10.1557/jmr.2009.0102	VERB
app01-6686	207	5	https://doi.org/10.1007/978-1-4757-5943-3	https://doi.org/10.1007/978-1-4757-5943-3	PROPN
app01-6686	207	6	https://doi.org/10.1557/jmr.1999.0299	https://doi.org/10.1557/jmr.1999.0299	NOUN
app01-6686	207	7	https://doi.org/10.1016/s0257-8972(01)01664-4	https://doi.org/10.1016/s0257-8972(01)01664-4	PROPN
app01-6686	207	8	https://doi.org/10.1016/s0257-8972(96)03147-7	https://doi.org/10.1016/s0257-8972(96)03147-7	PROPN
app01-6686	208	1	https://doi.org/10.1007/s12633-015-9366-8	https://doi.org/10.1007/s12633-015-9366-8	PROPN
app01-6686	208	2	https://doi.org/10.1016/j.mee.2006.11.001	https://doi.org/10.1016/j.mee.2006.11.001	PROPN
app01-6686	208	3	https://doi.org/10.1116/1.2218865	https://doi.org/10.1116/1.2218865	PROPN
app01-6686	208	4	https://doi.org/10.3403/bseniso14577	https://doi.org/10.3403/bseniso14577	PROPN
app01-6686	208	5	https://doi.org/10.3390/coatings7090143	https://doi.org/10.3390/coatings7090143	NOUN
app01-6686	208	6	https://doi.org/10.1016/0040-6090(95)06990-9	https://doi.org/10.1016/0040-6090(95)06990-9	PROPN
app01-6686	208	7	https://doi.org/https://doi.org/10.1016/j.tsf.2005.02.024	https://doi.org/https://doi.org/10.1016/j.tsf.2005.02.024	PROPN
app01-6686	208	8	https://doi.org/10.1016/j.surfcoat.2012.02.039	https://doi.org/10.1016/j.surfcoat.2012.02.039	NOUN
app01-6686	208	9	https://doi.org/10.1016/s0040-6090(96)09029-3	https://doi.org/10.1016/s0040-6090(96)09029-3	VERB
app01-6686	208	10	https://doi.org/10.1107/s1600577514004962	https://doi.org/10.1107/s1600577514004962	PROPN
app01-6686	208	11	https://doi.org/10.1007/978-3-642-59497-7_157	https://doi.org/10.1007/978-3-642-59497-7_157	PROPN
app01-6686	208	12	https://doi.org/10.1109/jmems.2009.2039697	https://doi.org/10.1109/jmems.2009.2039697	PROPN
app01-6686	208	13	acta	acta	PROPN
app01-6686	208	14	polytechnica	polytechnica	PROPN
app01-6686	208	15	27(0):57–61	27(0):57–61	NUM
app01-6686	208	16	,	,	PUNCT
app01-6686	208	17	2020	2020	NUM
app01-6686	208	18	1	1	NUM
app01-6686	208	19	introduction	introduction	NOUN
app01-6686	208	20	1.1	1.1	NUM
app01-6686	208	21	principle	principle	NOUN
app01-6686	208	22	of	of	ADP
app01-6686	208	23	law	law	NOUN
app01-6686	208	24	1.2	1.2	NUM
app01-6686	208	25	experimental	experimental	ADJ
app01-6686	208	26	details	detail	NOUN
app01-6686	208	27	2	2	NUM
app01-6686	208	28	results	result	NOUN
app01-6686	208	29	and	and	CCONJ
app01-6686	208	30	discussion	discussion	NOUN
app01-6686	208	31	2.1	2.1	NUM
app01-6686	208	32	thin	thin	ADJ
app01-6686	208	33	film	film	NOUN
app01-6686	208	34	characterization	characterization	NOUN
app01-6686	208	35	–	–	PUNCT
app01-6686	208	36	film	film	NOUN
app01-6686	208	37	thickness	thickness	NOUN
app01-6686	208	38	evaluation	evaluation	NOUN
app01-6686	208	39	2.2	2.2	NUM
app01-6686	208	40	thin	thin	ADJ
app01-6686	208	41	film	film	NOUN
app01-6686	208	42	characterization	characterization	NOUN
app01-6686	208	43	–	–	PUNCT
app01-6686	208	44	young	young	ADJ
app01-6686	208	45	's	's	PART
app01-6686	208	46	modulus	modulus	ADJ
app01-6686	208	47	evaluation	evaluation	NOUN
app01-6686	208	48	2.3	2.3	NUM
app01-6686	208	49	silicon	silicon	NOUN
app01-6686	208	50	anisotropy	anisotropy	NOUN
app01-6686	208	51	mapping	map	VERB
app01-6686	208	52	3	3	NUM
app01-6686	208	53	conclusions	conclusion	NOUN
app01-6686	208	54	acknowledgements	acknowledgement	NOUN
app01-6686	208	55	references	reference	NOUN