id	sid	tid	token	lemma	pos
app01-6687	1	1	acta	acta	PROPN
app01-6687	1	2	polytechnica	polytechnica	PROPN
app01-6687	1	3	doi:10.14311	doi:10.14311	PROPN
app01-6687	1	4	/	/	SYM
app01-6687	1	5	app.2020.27.0062	app.2020.27.0062	PROPN
app01-6687	1	6	acta	acta	PROPN
app01-6687	1	7	polytechnica	polytechnica	PROPN
app01-6687	1	8	27(0):62–66	27(0):62–66	NUM
app01-6687	1	9	,	,	PUNCT
app01-6687	1	10	2020	2020	NUM
app01-6687	1	11	©	©	PROPN
app01-6687	1	12	czech	czech	PROPN
app01-6687	1	13	technical	technical	PROPN
app01-6687	1	14	university	university	PROPN
app01-6687	1	15	in	in	ADP
app01-6687	1	16	prague	prague	PROPN
app01-6687	1	17	,	,	PUNCT
app01-6687	1	18	2020	2020	NUM
app01-6687	1	19	available	available	ADJ
app01-6687	1	20	online	online	ADV
app01-6687	1	21	at	at	ADP
app01-6687	1	22	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-6687	1	23	hardness	hardness	NOUN
app01-6687	1	24	of	of	ADP
app01-6687	1	25	hybrid	hybrid	ADJ
app01-6687	1	26	pvd	pvd	PROPN
app01-6687	1	27	-	-	PUNCT
app01-6687	1	28	pecvd	pecvd	NOUN
app01-6687	1	29	w	w	PROPN
app01-6687	1	30	-	-	PUNCT
app01-6687	1	31	c	c	NOUN
app01-6687	1	32	:	:	PUNCT
app01-6687	1	33	h	h	NOUN
app01-6687	1	34	coatings	coating	NOUN
app01-6687	1	35	vs.	vs.	ADP
app01-6687	1	36	substrate	substrate	NOUN
app01-6687	1	37	type	type	NOUN
app01-6687	1	38	františek	františek	NOUN
app01-6687	1	39	lofaj∗	lofaj∗	ADV
app01-6687	1	40	,	,	PUNCT
app01-6687	1	41	margita	margita	PROPN
app01-6687	1	42	kabátová	kabátová	PROPN
app01-6687	1	43	slovak	slovak	PROPN
app01-6687	1	44	academy	academy	PROPN
app01-6687	1	45	of	of	ADP
app01-6687	1	46	sciences	sciences	PROPN
app01-6687	1	47	,	,	PUNCT
app01-6687	1	48	institute	institute	NOUN
app01-6687	1	49	of	of	ADP
app01-6687	1	50	materials	material	NOUN
app01-6687	1	51	research	research	NOUN
app01-6687	1	52	,	,	PUNCT
app01-6687	1	53	watsonova	watsonova	VERB
app01-6687	1	54	47	47	NUM
app01-6687	1	55	,	,	PUNCT
app01-6687	1	56	040	040	NUM
app01-6687	1	57	01	01	NUM
app01-6687	1	58	košice	košice	NOUN
app01-6687	1	59	,	,	PUNCT
app01-6687	1	60	slovakia	slovakia	PROPN
app01-6687	1	61	∗	∗	NOUN
app01-6687	1	62	corresponding	correspond	VERB
app01-6687	1	63	author	author	NOUN
app01-6687	1	64	:	:	PUNCT
app01-6687	1	65	flofaj@saske.sk	flofaj@saske.sk	ADJ
app01-6687	1	66	abstract	abstract	ADJ
app01-6687	1	67	.	.	PUNCT
app01-6687	2	1	the	the	DET
app01-6687	2	2	effects	effect	NOUN
app01-6687	2	3	of	of	ADP
app01-6687	2	4	substrate	substrate	NOUN
app01-6687	2	5	on	on	ADP
app01-6687	2	6	the	the	DET
app01-6687	2	7	measurement	measurement	NOUN
app01-6687	2	8	of	of	ADP
app01-6687	2	9	hardness	hardness	NOUN
app01-6687	2	10	(	(	PUNCT
app01-6687	2	11	and	and	CCONJ
app01-6687	2	12	indentation	indentation	NOUN
app01-6687	2	13	modulus	modulus	NOUN
app01-6687	2	14	)	)	PUNCT
app01-6687	2	15	penetration	penetration	NOUN
app01-6687	2	16	depth	depth	NOUN
app01-6687	2	17	profiles	profile	NOUN
app01-6687	2	18	were	be	AUX
app01-6687	2	19	investigated	investigate	VERB
app01-6687	2	20	on	on	ADP
app01-6687	2	21	hybrid	hybrid	ADJ
app01-6687	2	22	pvd	pvd	PROPN
app01-6687	2	23	-	-	PUNCT
app01-6687	2	24	pecvd	pecvd	NOUN
app01-6687	2	25	w	w	PROPN
app01-6687	2	26	-	-	PUNCT
app01-6687	2	27	c	c	NOUN
app01-6687	2	28	:	:	PUNCT
app01-6687	2	29	h	h	NOUN
app01-6687	2	30	coatings	coating	NOUN
app01-6687	2	31	made	make	VERB
app01-6687	2	32	with	with	ADP
app01-6687	2	33	the	the	DET
app01-6687	2	34	additions	addition	NOUN
app01-6687	2	35	of	of	ADP
app01-6687	2	36	c2h2	c2h2	NOUN
app01-6687	2	37	or	or	CCONJ
app01-6687	2	38	ch4	ch4	NOUN
app01-6687	2	39	using	use	VERB
app01-6687	2	40	high	high	ADJ
app01-6687	2	41	power	power	NOUN
app01-6687	2	42	impulse	impulse	ADJ
app01-6687	2	43	magnetron	magnetron	NOUN
app01-6687	2	44	sputtering	sputtering	NOUN
app01-6687	2	45	(	(	PUNCT
app01-6687	2	46	hipims	hipim	NOUN
app01-6687	2	47	)	)	PUNCT
app01-6687	2	48	method	method	NOUN
app01-6687	2	49	.	.	PUNCT
app01-6687	3	1	the	the	DET
app01-6687	3	2	substrates	substrate	NOUN
app01-6687	3	3	involved	involve	VERB
app01-6687	3	4	100cr6	100cr6	NUM
app01-6687	3	5	bearing	bearing	NOUN
app01-6687	3	6	steel	steel	NOUN
app01-6687	3	7	,	,	PUNCT
app01-6687	3	8	al2024	al2024	NOUN
app01-6687	3	9	aluminum	aluminum	NOUN
app01-6687	3	10	alloy	alloy	NOUN
app01-6687	3	11	and	and	CCONJ
app01-6687	3	12	(	(	PUNCT
app01-6687	3	13	111	111	NUM
app01-6687	3	14	)	)	PUNCT
app01-6687	3	15	si	si	NOUN
app01-6687	3	16	wafer	wafer	NOUN
app01-6687	3	17	.	.	PUNCT
app01-6687	4	1	although	although	SCONJ
app01-6687	4	2	no	no	DET
app01-6687	4	3	clear	clear	ADJ
app01-6687	4	4	influence	influence	NOUN
app01-6687	4	5	of	of	ADP
app01-6687	4	6	the	the	DET
app01-6687	4	7	substrate	substrate	NOUN
app01-6687	4	8	type	type	NOUN
app01-6687	4	9	on	on	ADP
app01-6687	4	10	hardness	hardness	NOUN
app01-6687	4	11	and	and	CCONJ
app01-6687	4	12	indentation	indentation	NOUN
app01-6687	4	13	modulus	modulus	NOUN
app01-6687	4	14	of	of	ADP
app01-6687	4	15	the	the	DET
app01-6687	4	16	coatings	coating	NOUN
app01-6687	4	17	at	at	ADP
app01-6687	4	18	different	different	ADJ
app01-6687	4	19	acetylene	acetylene	NOUN
app01-6687	4	20	and	and	CCONJ
app01-6687	4	21	hydrogen	hydrogen	NOUN
app01-6687	4	22	additions	addition	NOUN
app01-6687	4	23	was	be	AUX
app01-6687	4	24	observed	observe	VERB
app01-6687	4	25	,	,	PUNCT
app01-6687	4	26	when	when	SCONJ
app01-6687	4	27	both	both	DET
app01-6687	4	28	measured	measure	VERB
app01-6687	4	29	properties	property	NOUN
app01-6687	4	30	were	be	AUX
app01-6687	4	31	combined	combine	VERB
app01-6687	4	32	in	in	ADP
app01-6687	4	33	hiteit	hiteit	NOUN
app01-6687	4	34	ratio	ratio	NOUN
app01-6687	4	35	,	,	PUNCT
app01-6687	4	36	significant	significant	ADJ
app01-6687	4	37	shift	shift	NOUN
app01-6687	4	38	of	of	ADP
app01-6687	4	39	hit	hit	NOUN
app01-6687	4	40	/	/	SYM
app01-6687	4	41	eit	eit	PROPN
app01-6687	4	42	ratio	ratio	NOUN
app01-6687	4	43	dependencies	dependency	NOUN
app01-6687	4	44	obtained	obtain	VERB
app01-6687	4	45	on	on	ADP
app01-6687	4	46	al	al	PROPN
app01-6687	4	47	alloy	alloy	NOUN
app01-6687	4	48	vs.	vs.	ADP
app01-6687	4	49	steel	steel	NOUN
app01-6687	4	50	and	and	CCONJ
app01-6687	4	51	si	si	NOUN
app01-6687	4	52	wafer	wafer	NOUN
app01-6687	4	53	substrates	substrate	NOUN
app01-6687	4	54	occurred	occur	VERB
app01-6687	4	55	.	.	PUNCT
app01-6687	5	1	thus	thus	ADV
app01-6687	5	2	,	,	PUNCT
app01-6687	5	3	the	the	DET
app01-6687	5	4	effect	effect	NOUN
app01-6687	5	5	of	of	ADP
app01-6687	5	6	substrate	substrate	NOUN
app01-6687	5	7	type	type	NOUN
app01-6687	5	8	on	on	ADP
app01-6687	5	9	the	the	DET
app01-6687	5	10	measurementlevaluation	measurementlevaluation	NOUN
app01-6687	5	11	was	be	AUX
app01-6687	5	12	confirmed	confirm	VERB
app01-6687	5	13	.	.	PUNCT
app01-6687	6	1	keywords	keyword	NOUN
app01-6687	6	2	:	:	PUNCT
app01-6687	6	3	hardness	hardness	INTJ
app01-6687	6	4	,	,	PUNCT
app01-6687	6	5	indentation	indentation	NOUN
app01-6687	6	6	modulus	modulus	NOUN
app01-6687	6	7	,	,	PUNCT
app01-6687	6	8	substrate	substrate	NOUN
app01-6687	6	9	effect	effect	NOUN
app01-6687	6	10	,	,	PUNCT
app01-6687	6	11	w	w	NOUN
app01-6687	6	12	-	-	PUNCT
app01-6687	6	13	c	c	NOUN
app01-6687	6	14	:	:	PUNCT
app01-6687	6	15	h	h	NOUN
app01-6687	6	16	coating	coating	NOUN
app01-6687	6	17	.	.	PUNCT
app01-6687	7	1	1	1	X
app01-6687	7	2	.	.	X
app01-6687	7	3	introduction	introduction	NOUN
app01-6687	7	4	tribological	tribological	ADJ
app01-6687	7	5	properties	property	NOUN
app01-6687	7	6	of	of	ADP
app01-6687	7	7	hard	hard	ADJ
app01-6687	7	8	coatings	coating	NOUN
app01-6687	7	9	,	,	PUNCT
app01-6687	7	10	especially	especially	ADV
app01-6687	7	11	their	their	PRON
app01-6687	7	12	wear	wear	NOUN
app01-6687	7	13	resistance	resistance	NOUN
app01-6687	7	14	,	,	PUNCT
app01-6687	7	15	coefficient	coefficient	NOUN
app01-6687	7	16	of	of	ADP
app01-6687	7	17	friction	friction	NOUN
app01-6687	7	18	(	(	PUNCT
app01-6687	7	19	cof	cof	PROPN
app01-6687	7	20	)	)	PUNCT
app01-6687	7	21	depend	depend	VERB
app01-6687	7	22	on	on	ADP
app01-6687	7	23	large	large	ADJ
app01-6687	7	24	number	number	NOUN
app01-6687	7	25	of	of	ADP
app01-6687	7	26	parameters	parameter	NOUN
app01-6687	7	27	including	include	VERB
app01-6687	7	28	loading	loading	NOUN
app01-6687	7	29	and	and	CCONJ
app01-6687	7	30	environmental	environmental	ADJ
app01-6687	7	31	conditions	condition	NOUN
app01-6687	7	32	but	but	CCONJ
app01-6687	7	33	also	also	ADV
app01-6687	7	34	material	material	NOUN
app01-6687	7	35	system	system	NOUN
app01-6687	7	36	used	use	VERB
app01-6687	7	37	for	for	ADP
app01-6687	7	38	the	the	DET
app01-6687	7	39	coating	coating	NOUN
app01-6687	7	40	,	,	PUNCT
app01-6687	7	41	its	its	PRON
app01-6687	7	42	structure	structure	NOUN
app01-6687	7	43	,	,	PUNCT
app01-6687	7	44	surface	surface	NOUN
app01-6687	7	45	roughness	roughness	NOUN
app01-6687	7	46	and	and	CCONJ
app01-6687	7	47	such	such	ADJ
app01-6687	7	48	properties	property	NOUN
app01-6687	7	49	as	as	ADP
app01-6687	7	50	hardness	hardness	NOUN
app01-6687	7	51	,	,	PUNCT
app01-6687	7	52	elastic	elastic	ADJ
app01-6687	7	53	modulus	modulus	NOUN
app01-6687	7	54	,	,	PUNCT
app01-6687	7	55	and	and	CCONJ
app01-6687	7	56	others	other	NOUN
app01-6687	7	57	.	.	PUNCT
app01-6687	8	1	it	it	PRON
app01-6687	8	2	was	be	AUX
app01-6687	8	3	reported	report	VERB
app01-6687	8	4	that	that	SCONJ
app01-6687	8	5	the	the	DET
app01-6687	8	6	wear	wear	NOUN
app01-6687	8	7	properties	property	NOUN
app01-6687	8	8	of	of	ADP
app01-6687	8	9	hard	hard	ADJ
app01-6687	8	10	coatings	coating	NOUN
app01-6687	8	11	more	more	ADV
app01-6687	8	12	strongly	strongly	ADV
app01-6687	8	13	correlate	correlate	VERB
app01-6687	8	14	with	with	ADP
app01-6687	8	15	h	h	NOUN
app01-6687	8	16	/	/	SYM
app01-6687	8	17	e	e	NOUN
app01-6687	8	18	ratio	ratio	NOUN
app01-6687	8	19	than	than	ADP
app01-6687	8	20	just	just	ADV
app01-6687	8	21	with	with	ADP
app01-6687	8	22	the	the	DET
app01-6687	8	23	hardness	hardness	NOUN
app01-6687	8	24	itself	itself	PRON
app01-6687	8	25	[	[	X
app01-6687	8	26	1	1	NUM
app01-6687	8	27	]	]	PUNCT
app01-6687	8	28	.	.	PUNCT
app01-6687	9	1	moreover	moreover	ADV
app01-6687	9	2	,	,	PUNCT
app01-6687	9	3	it	it	PRON
app01-6687	9	4	was	be	AUX
app01-6687	9	5	also	also	ADV
app01-6687	9	6	found	find	VERB
app01-6687	9	7	out	out	ADP
app01-6687	9	8	that	that	SCONJ
app01-6687	9	9	the	the	DET
app01-6687	9	10	h	h	NOUN
app01-6687	9	11	/	/	SYM
app01-6687	9	12	e	e	NOUN
app01-6687	9	13	and/or	and/or	CCONJ
app01-6687	9	14	h3	h3	NOUN
app01-6687	9	15	/	/	SYM
app01-6687	9	16	e2	e2	PROPN
app01-6687	9	17	ratios	ratio	NOUN
app01-6687	9	18	are	be	AUX
app01-6687	9	19	related	relate	VERB
app01-6687	9	20	to	to	ADP
app01-6687	9	21	the	the	DET
app01-6687	9	22	level	level	NOUN
app01-6687	9	23	of	of	ADP
app01-6687	9	24	plasticity	plasticity	NOUN
app01-6687	9	25	and	and	CCONJ
app01-6687	9	26	can	can	AUX
app01-6687	9	27	be	be	AUX
app01-6687	9	28	used	use	VERB
app01-6687	9	29	to	to	PART
app01-6687	9	30	estimate	estimate	VERB
app01-6687	9	31	changes	change	NOUN
app01-6687	9	32	in	in	ADP
app01-6687	9	33	the	the	DET
app01-6687	9	34	toughness	toughness	NOUN
app01-6687	9	35	of	of	ADP
app01-6687	9	36	the	the	DET
app01-6687	9	37	coatings	coating	NOUN
app01-6687	9	38	[	[	X
app01-6687	9	39	2–4	2–4	NUM
app01-6687	9	40	]	]	PUNCT
app01-6687	9	41	.	.	PUNCT
app01-6687	10	1	this	this	PRON
app01-6687	10	2	is	be	AUX
app01-6687	10	3	of	of	ADP
app01-6687	10	4	significant	significant	ADJ
app01-6687	10	5	interest	interest	NOUN
app01-6687	10	6	because	because	SCONJ
app01-6687	10	7	toughness	toughness	NOUN
app01-6687	10	8	is	be	AUX
app01-6687	10	9	among	among	ADP
app01-6687	10	10	the	the	DET
app01-6687	10	11	main	main	ADJ
app01-6687	10	12	parameters	parameter	NOUN
app01-6687	10	13	,	,	PUNCT
app01-6687	10	14	besides	besides	SCONJ
app01-6687	10	15	hardness	hardness	NOUN
app01-6687	10	16	,	,	PUNCT
app01-6687	10	17	young	young	ADJ
app01-6687	10	18	’s	’s	PART
app01-6687	10	19	modulus	modulus	NOUN
app01-6687	10	20	,	,	PUNCT
app01-6687	10	21	cof	cof	PROPN
app01-6687	10	22	,	,	PUNCT
app01-6687	10	23	wear	wear	NOUN
app01-6687	10	24	,	,	PUNCT
app01-6687	10	25	scratch	scratch	NOUN
app01-6687	10	26	,	,	PUNCT
app01-6687	10	27	oxidation	oxidation	NOUN
app01-6687	10	28	and	and	CCONJ
app01-6687	10	29	corrosion	corrosion	NOUN
app01-6687	10	30	resistance	resistance	NOUN
app01-6687	10	31	of	of	ADP
app01-6687	10	32	the	the	DET
app01-6687	10	33	coatings	coating	NOUN
app01-6687	10	34	for	for	ADP
app01-6687	10	35	engineering	engineering	NOUN
app01-6687	10	36	applications	application	NOUN
app01-6687	10	37	.	.	PUNCT
app01-6687	11	1	the	the	DET
app01-6687	11	2	measurement	measurement	NOUN
app01-6687	11	3	of	of	ADP
app01-6687	11	4	mechanical	mechanical	ADJ
app01-6687	11	5	properties	property	NOUN
app01-6687	11	6	,	,	PUNCT
app01-6687	11	7	involving	involve	VERB
app01-6687	11	8	hardness	hardness	NOUN
app01-6687	11	9	,	,	PUNCT
app01-6687	11	10	elastic	elastic	ADJ
app01-6687	11	11	modulus	modulus	NOUN
app01-6687	11	12	and	and	CCONJ
app01-6687	11	13	toughness	toughness	NOUN
app01-6687	11	14	in	in	ADP
app01-6687	11	15	the	the	DET
app01-6687	11	16	coatings	coating	NOUN
app01-6687	11	17	with	with	ADP
app01-6687	11	18	the	the	DET
app01-6687	11	19	thickness	thickness	NOUN
app01-6687	11	20	in	in	ADP
app01-6687	11	21	the	the	DET
app01-6687	11	22	range	range	NOUN
app01-6687	11	23	of	of	ADP
app01-6687	11	24	few	few	ADJ
app01-6687	11	25	micrometers	micrometer	NOUN
app01-6687	11	26	is	be	AUX
app01-6687	11	27	a	a	DET
app01-6687	11	28	challenge	challenge	NOUN
app01-6687	11	29	even	even	ADV
app01-6687	11	30	by	by	ADP
app01-6687	11	31	nanoindentation	nanoindentation	NOUN
app01-6687	11	32	because	because	SCONJ
app01-6687	11	33	of	of	ADP
app01-6687	11	34	the	the	DET
app01-6687	11	35	inevitable	inevitable	ADJ
app01-6687	11	36	influence	influence	NOUN
app01-6687	11	37	of	of	ADP
app01-6687	11	38	the	the	DET
app01-6687	11	39	substrate	substrate	NOUN
app01-6687	11	40	on	on	ADP
app01-6687	11	41	the	the	DET
app01-6687	11	42	measurement	measurement	NOUN
app01-6687	11	43	of	of	ADP
app01-6687	11	44	the	the	DET
app01-6687	11	45	coating	coating	NOUN
app01-6687	11	46	properties	property	NOUN
app01-6687	11	47	.	.	PUNCT
app01-6687	12	1	to	to	PART
app01-6687	12	2	reduce	reduce	VERB
app01-6687	12	3	this	this	DET
app01-6687	12	4	influence	influence	NOUN
app01-6687	12	5	,	,	PUNCT
app01-6687	12	6	the	the	DET
app01-6687	12	7	indentations	indentation	NOUN
app01-6687	12	8	depths	depth	NOUN
app01-6687	12	9	used	use	VERB
app01-6687	12	10	for	for	ADP
app01-6687	12	11	the	the	DET
app01-6687	12	12	determination	determination	NOUN
app01-6687	12	13	of	of	ADP
app01-6687	12	14	coating	coat	VERB
app01-6687	12	15	hardness	hardness	NOUN
app01-6687	12	16	should	should	AUX
app01-6687	12	17	be	be	AUX
app01-6687	12	18	substantially	substantially	ADV
app01-6687	12	19	smaller	small	ADJ
app01-6687	12	20	than	than	ADP
app01-6687	12	21	the	the	DET
app01-6687	12	22	thickness	thickness	NOUN
app01-6687	12	23	of	of	ADP
app01-6687	12	24	the	the	DET
app01-6687	12	25	coating	coating	NOUN
app01-6687	12	26	.	.	PUNCT
app01-6687	13	1	physical	physical	ADJ
app01-6687	13	2	explanation	explanation	NOUN
app01-6687	13	3	is	be	AUX
app01-6687	13	4	that	that	SCONJ
app01-6687	13	5	the	the	DET
app01-6687	13	6	stress	stress	NOUN
app01-6687	13	7	field	field	NOUN
app01-6687	13	8	under	under	ADP
app01-6687	13	9	the	the	DET
app01-6687	13	10	indenter	indenter	NOUN
app01-6687	13	11	,	,	PUNCT
app01-6687	13	12	corresponding	correspond	VERB
app01-6687	13	13	to	to	ADP
app01-6687	13	14	the	the	DET
app01-6687	13	15	zone	zone	NOUN
app01-6687	13	16	with	with	ADP
app01-6687	13	17	the	the	DET
app01-6687	13	18	stresses	stress	NOUN
app01-6687	13	19	above	above	ADP
app01-6687	13	20	the	the	DET
app01-6687	13	21	yield	yield	NOUN
app01-6687	13	22	stress	stress	NOUN
app01-6687	13	23	(	(	PUNCT
app01-6687	13	24	zone	zone	NOUN
app01-6687	13	25	of	of	ADP
app01-6687	13	26	plasticity	plasticity	NOUN
app01-6687	13	27	)	)	PUNCT
app01-6687	13	28	,	,	PUNCT
app01-6687	13	29	has	have	VERB
app01-6687	13	30	to	to	PART
app01-6687	13	31	be	be	AUX
app01-6687	13	32	fully	fully	ADV
app01-6687	13	33	confined	confine	VERB
app01-6687	13	34	in	in	ADP
app01-6687	13	35	the	the	DET
app01-6687	13	36	coating	coating	NOUN
app01-6687	13	37	.	.	PUNCT
app01-6687	14	1	so	so	ADV
app01-6687	14	2	called	call	VERB
app01-6687	14	3	“	"	PUNCT
app01-6687	14	4	10	10	NUM
app01-6687	14	5	%	%	NOUN
app01-6687	14	6	(	(	PUNCT
app01-6687	14	7	of	of	ADP
app01-6687	14	8	the	the	DET
app01-6687	14	9	coating	coat	VERB
app01-6687	14	10	thickness	thickness	NOUN
app01-6687	14	11	)	)	PUNCT
app01-6687	14	12	rule	rule	NOUN
app01-6687	14	13	”	"	PUNCT
app01-6687	14	14	is	be	AUX
app01-6687	14	15	often	often	ADV
app01-6687	14	16	applied	apply	VERB
app01-6687	14	17	to	to	PART
app01-6687	14	18	determine	determine	VERB
app01-6687	14	19	such	such	ADJ
app01-6687	14	20	maximum	maximum	ADJ
app01-6687	14	21	depth	depth	NOUN
app01-6687	14	22	and	and	CCONJ
app01-6687	14	23	true	true	ADJ
app01-6687	14	24	hardness	hardness	NOUN
app01-6687	14	25	of	of	ADP
app01-6687	14	26	the	the	DET
app01-6687	14	27	coating	coating	NOUN
app01-6687	14	28	,	,	PUNCT
app01-6687	14	29	respectively	respectively	ADV
app01-6687	14	30	[	[	X
app01-6687	14	31	5–10	5–10	ADJ
app01-6687	14	32	]	]	X
app01-6687	14	33	.	.	PUNCT
app01-6687	15	1	another	another	DET
app01-6687	15	2	approach	approach	NOUN
app01-6687	15	3	to	to	PART
app01-6687	15	4	eliminate	eliminate	VERB
app01-6687	15	5	substrate	substrate	NOUN
app01-6687	15	6	influence	influence	NOUN
app01-6687	15	7	and	and	CCONJ
app01-6687	15	8	to	to	PART
app01-6687	15	9	determine	determine	VERB
app01-6687	15	10	true	true	ADJ
app01-6687	15	11	coatings	coating	NOUN
app01-6687	15	12	properties	property	NOUN
app01-6687	15	13	is	be	AUX
app01-6687	15	14	to	to	PART
app01-6687	15	15	use	use	VERB
app01-6687	15	16	hardness	hardness	NOUN
app01-6687	15	17	(	(	PUNCT
app01-6687	15	18	and	and	CCONJ
app01-6687	15	19	elastic	elastic	ADJ
app01-6687	15	20	modulus	modulus	NOUN
app01-6687	15	21	)	)	PUNCT
app01-6687	15	22	–	–	PUNCT
app01-6687	15	23	indentation	indentation	NOUN
app01-6687	15	24	depth	depth	NOUN
app01-6687	15	25	profiles	profile	NOUN
app01-6687	15	26	obtained	obtain	VERB
app01-6687	15	27	from	from	ADP
app01-6687	15	28	continuous	continuous	ADJ
app01-6687	15	29	multi	multi	NOUN
app01-6687	15	30	-	-	NOUN
app01-6687	15	31	cycle	cycle	ADJ
app01-6687	15	32	(	(	PUNCT
app01-6687	15	33	cmc	cmc	NOUN
app01-6687	15	34	)	)	PUNCT
app01-6687	15	35	or	or	CCONJ
app01-6687	15	36	continuous	continuous	ADJ
app01-6687	15	37	stiffness	stiffness	ADJ
app01-6687	15	38	measurements	measurement	NOUN
app01-6687	15	39	(	(	PUNCT
app01-6687	15	40	csm	csm	X
app01-6687	15	41	)	)	PUNCT
app01-6687	16	1	[	[	X
app01-6687	16	2	11	11	NUM
app01-6687	16	3	]	]	PUNCT
app01-6687	16	4	.	.	PUNCT
app01-6687	17	1	the	the	DET
app01-6687	17	2	coating	coat	VERB
app01-6687	17	3	properties	property	NOUN
app01-6687	17	4	correspond	correspond	VERB
app01-6687	17	5	to	to	ADP
app01-6687	17	6	the	the	DET
app01-6687	17	7	maximum	maximum	ADJ
app01-6687	17	8	or	or	CCONJ
app01-6687	17	9	plateau	plateau	NOUN
app01-6687	17	10	on	on	ADP
app01-6687	17	11	the	the	DET
app01-6687	17	12	corresponding	corresponding	ADJ
app01-6687	17	13	depth	depth	NOUN
app01-6687	17	14	profile	profile	NOUN
app01-6687	17	15	at	at	ADP
app01-6687	17	16	the	the	DET
app01-6687	17	17	depths	depth	NOUN
app01-6687	17	18	smaller	small	ADJ
app01-6687	17	19	than	than	ADP
app01-6687	17	20	10	10	NUM
app01-6687	17	21	%	%	NOUN
app01-6687	17	22	of	of	ADP
app01-6687	17	23	the	the	DET
app01-6687	17	24	coating	coating	NOUN
app01-6687	17	25	thickness	thickness	NOUN
app01-6687	17	26	.	.	PUNCT
app01-6687	18	1	however	however	ADV
app01-6687	18	2	,	,	PUNCT
app01-6687	18	3	the	the	DET
app01-6687	18	4	liability	liability	NOUN
app01-6687	18	5	of	of	ADP
app01-6687	18	6	10	10	NUM
app01-6687	18	7	%	%	NOUN
app01-6687	18	8	rule	rule	NOUN
app01-6687	18	9	is	be	AUX
app01-6687	18	10	limited	limit	VERB
app01-6687	18	11	by	by	ADP
app01-6687	18	12	the	the	DET
app01-6687	18	13	accuracy	accuracy	NOUN
app01-6687	18	14	of	of	ADP
app01-6687	18	15	the	the	DET
app01-6687	18	16	measurement	measurement	NOUN
app01-6687	18	17	at	at	ADP
app01-6687	18	18	coating	coat	VERB
app01-6687	18	19	thicknesses	thickness	NOUN
app01-6687	18	20	below	below	ADP
app01-6687	18	21	1	1	NUM
app01-6687	18	22	µm	µm	NUM
app01-6687	18	23	related	relate	VERB
app01-6687	18	24	to	to	ADP
app01-6687	18	25	tip	tip	PROPN
app01-6687	18	26	surface	surface	NOUN
app01-6687	18	27	area	area	PROPN
app01-6687	18	28	calibration	calibration	NOUN
app01-6687	18	29	function	function	NOUN
app01-6687	18	30	,	,	PUNCT
app01-6687	18	31	by	by	ADP
app01-6687	18	32	indenter	indenter	NOUN
app01-6687	18	33	tip	tip	PROPN
app01-6687	18	34	radius	radius	NOUN
app01-6687	18	35	[	[	X
app01-6687	18	36	12	12	NUM
app01-6687	18	37	]	]	PUNCT
app01-6687	18	38	,	,	PUNCT
app01-6687	18	39	surface	surface	NOUN
app01-6687	18	40	roughness	roughness	NOUN
app01-6687	18	41	,	,	PUNCT
app01-6687	18	42	pile	pile	NOUN
app01-6687	18	43	-	-	PUNCT
app01-6687	18	44	up	up	NOUN
app01-6687	18	45	or	or	CCONJ
app01-6687	18	46	sink	sink	NOUN
app01-6687	18	47	-	-	PUNCT
app01-6687	18	48	in	in	ADP
app01-6687	18	49	behavior	behavior	NOUN
app01-6687	18	50	[	[	X
app01-6687	18	51	13	13	NUM
app01-6687	18	52	]	]	PUNCT
app01-6687	18	53	,	,	PUNCT
app01-6687	18	54	residual	residual	ADJ
app01-6687	18	55	stresses	stress	NOUN
app01-6687	18	56	as	as	ADV
app01-6687	18	57	well	well	ADV
app01-6687	18	58	as	as	ADP
app01-6687	18	59	by	by	ADP
app01-6687	18	60	the	the	DET
app01-6687	18	61	ratio	ratio	NOUN
app01-6687	18	62	between	between	ADP
app01-6687	18	63	the	the	DET
app01-6687	18	64	yield	yield	NOUN
app01-6687	18	65	stresses	stress	NOUN
app01-6687	18	66	and	and	CCONJ
app01-6687	18	67	the	the	DET
app01-6687	18	68	elastic	elastic	ADJ
app01-6687	18	69	moduli	modulus	NOUN
app01-6687	18	70	of	of	ADP
app01-6687	18	71	the	the	DET
app01-6687	18	72	coating	coating	NOUN
app01-6687	18	73	and	and	CCONJ
app01-6687	18	74	the	the	DET
app01-6687	18	75	substrate	substrate	NOUN
app01-6687	18	76	,	,	PUNCT
app01-6687	18	77	respectively	respectively	ADV
app01-6687	18	78	[	[	X
app01-6687	18	79	9	9	NUM
app01-6687	18	80	,	,	PUNCT
app01-6687	18	81	14	14	NUM
app01-6687	18	82	]	]	PUNCT
app01-6687	18	83	.	.	PUNCT
app01-6687	19	1	the	the	DET
app01-6687	19	2	measurements	measurement	NOUN
app01-6687	19	3	of	of	ADP
app01-6687	19	4	indentation	indentation	NOUN
app01-6687	19	5	modulus	modulus	NOUN
app01-6687	19	6	are	be	AUX
app01-6687	19	7	much	much	ADV
app01-6687	19	8	more	more	ADV
app01-6687	19	9	sensitive	sensitive	ADJ
app01-6687	19	10	to	to	ADP
app01-6687	19	11	substrate	substrate	NOUN
app01-6687	19	12	properties	property	NOUN
app01-6687	19	13	than	than	ADP
app01-6687	19	14	hardness	hardness	NOUN
app01-6687	19	15	because	because	SCONJ
app01-6687	19	16	the	the	DET
app01-6687	19	17	elastic	elastic	ADJ
app01-6687	19	18	stress	stress	NOUN
app01-6687	19	19	field	field	NOUN
app01-6687	19	20	under	under	ADP
app01-6687	19	21	the	the	DET
app01-6687	19	22	indenter	indenter	NOUN
app01-6687	19	23	would	would	AUX
app01-6687	19	24	be	be	AUX
app01-6687	19	25	much	much	ADV
app01-6687	19	26	larger	large	ADJ
app01-6687	19	27	than	than	ADP
app01-6687	19	28	the	the	DET
app01-6687	19	29	zone	zone	NOUN
app01-6687	19	30	of	of	ADP
app01-6687	19	31	plasticity	plasticity	NOUN
app01-6687	19	32	and	and	CCONJ
app01-6687	19	33	therefore	therefore	ADV
app01-6687	19	34	,	,	PUNCT
app01-6687	19	35	10	10	NUM
app01-6687	19	36	%	%	NOUN
app01-6687	19	37	rule	rule	NOUN
app01-6687	19	38	may	may	AUX
app01-6687	19	39	not	not	PART
app01-6687	19	40	be	be	AUX
app01-6687	19	41	sufficient	sufficient	ADJ
app01-6687	19	42	.	.	PUNCT
app01-6687	20	1	thus	thus	ADV
app01-6687	20	2	,	,	PUNCT
app01-6687	20	3	the	the	DET
app01-6687	20	4	problem	problem	NOUN
app01-6687	20	5	of	of	ADP
app01-6687	20	6	proper	proper	ADJ
app01-6687	20	7	measurement	measurement	NOUN
app01-6687	20	8	of	of	ADP
app01-6687	20	9	hardness	hardness	NOUN
app01-6687	20	10	simultaneously	simultaneously	ADV
app01-6687	20	11	with	with	ADP
app01-6687	20	12	the	the	DET
app01-6687	20	13	elastic	elastic	ADJ
app01-6687	20	14	modulus	modulus	NOUN
app01-6687	20	15	in	in	ADP
app01-6687	20	16	thin	thin	ADJ
app01-6687	20	17	hard	hard	ADJ
app01-6687	20	18	coatings	coating	NOUN
app01-6687	20	19	persists	persist	NOUN
app01-6687	20	20	and	and	CCONJ
app01-6687	20	21	it	it	PRON
app01-6687	20	22	is	be	AUX
app01-6687	20	23	even	even	ADV
app01-6687	20	24	emphasized	emphasize	VERB
app01-6687	20	25	by	by	ADP
app01-6687	20	26	the	the	DET
app01-6687	20	27	applicability	applicability	NOUN
app01-6687	20	28	of	of	ADP
app01-6687	20	29	the	the	DET
app01-6687	20	30	h	h	NOUN
app01-6687	20	31	/	/	SYM
app01-6687	20	32	e	e	NOUN
app01-6687	20	33	ratio	ratio	NOUN
app01-6687	20	34	for	for	ADP
app01-6687	20	35	toughness	toughness	NOUN
app01-6687	20	36	and	and	CCONJ
app01-6687	20	37	wear	wear	VERB
app01-6687	20	38	resistance	resistance	NOUN
app01-6687	20	39	estimations	estimation	NOUN
app01-6687	20	40	.	.	PUNCT
app01-6687	21	1	in	in	ADP
app01-6687	21	2	our	our	PRON
app01-6687	21	3	earlier	early	ADJ
app01-6687	21	4	works	work	NOUN
app01-6687	21	5	,	,	PUNCT
app01-6687	21	6	the	the	DET
app01-6687	21	7	influence	influence	NOUN
app01-6687	21	8	of	of	ADP
app01-6687	21	9	indenter	indenter	NOUN
app01-6687	21	10	tip	tip	PROPN
app01-6687	21	11	radius	radius	NOUN
app01-6687	21	12	on	on	ADP
app01-6687	21	13	the	the	DET
app01-6687	21	14	hardness	hardness	ADJ
app01-6687	21	15	–	–	PUNCT
app01-6687	21	16	depth	depth	NOUN
app01-6687	21	17	profiles	profile	NOUN
app01-6687	21	18	has	have	AUX
app01-6687	21	19	been	be	AUX
app01-6687	21	20	analyzed	analyze	VERB
app01-6687	21	21	using	use	VERB
app01-6687	21	22	a	a	DET
app01-6687	21	23	combination	combination	NOUN
app01-6687	21	24	of	of	ADP
app01-6687	21	25	the	the	DET
app01-6687	21	26	experimental	experimental	ADJ
app01-6687	21	27	and	and	CCONJ
app01-6687	21	28	finite	finite	ADJ
app01-6687	21	29	element	element	NOUN
app01-6687	21	30	modelling	model	VERB
app01-6687	21	31	approaches	approach	NOUN
app01-6687	21	32	[	[	X
app01-6687	21	33	12	12	NUM
app01-6687	21	34	]	]	PUNCT
app01-6687	21	35	.	.	PUNCT
app01-6687	22	1	however	however	ADV
app01-6687	22	2	,	,	PUNCT
app01-6687	22	3	the	the	DET
app01-6687	22	4	influence	influence	NOUN
app01-6687	22	5	of	of	ADP
app01-6687	22	6	the	the	DET
app01-6687	22	7	young	young	PROPN
app01-6687	22	8	’s	’s	PART
app01-6687	22	9	modulus	modulus	NOUN
app01-6687	22	10	of	of	ADP
app01-6687	22	11	the	the	DET
app01-6687	22	12	substrate	substrate	NOUN
app01-6687	22	13	on	on	ADP
app01-6687	22	14	the	the	DET
app01-6687	22	15	nanoindentation	nanoindentation	NOUN
app01-6687	22	16	measurements	measurement	NOUN
app01-6687	22	17	was	be	AUX
app01-6687	22	18	not	not	PART
app01-6687	22	19	investigated	investigate	VERB
app01-6687	22	20	.	.	PUNCT
app01-6687	23	1	therefore	therefore	ADV
app01-6687	23	2	,	,	PUNCT
app01-6687	23	3	the	the	DET
app01-6687	23	4	aim	aim	NOUN
app01-6687	23	5	of	of	ADP
app01-6687	23	6	the	the	DET
app01-6687	23	7	present	present	ADJ
app01-6687	23	8	work	work	NOUN
app01-6687	23	9	is	be	AUX
app01-6687	23	10	to	to	PART
app01-6687	23	11	investigate	investigate	VERB
app01-6687	23	12	the	the	DET
app01-6687	23	13	influence	influence	NOUN
app01-6687	23	14	of	of	ADP
app01-6687	23	15	the	the	DET
app01-6687	23	16	substrate	substrate	NOUN
app01-6687	23	17	properties	property	NOUN
app01-6687	23	18	on	on	ADP
app01-6687	23	19	the	the	DET
app01-6687	23	20	measurements	measurement	NOUN
app01-6687	23	21	of	of	ADP
app01-6687	23	22	hardness	hardness	NOUN
app01-6687	23	23	,	,	PUNCT
app01-6687	23	24	and	and	CCONJ
app01-6687	23	25	indentation	indentation	NOUN
app01-6687	23	26	modulus	modulus	NOUN
app01-6687	23	27	in	in	ADP
app01-6687	23	28	thin	thin	ADJ
app01-6687	23	29	hard	hard	ADJ
app01-6687	23	30	coatings	coating	NOUN
app01-6687	23	31	used	use	VERB
app01-6687	23	32	for	for	ADP
app01-6687	23	33	engineering	engineering	NOUN
app01-6687	23	34	applications	application	NOUN
app01-6687	23	35	.	.	PUNCT
app01-6687	24	1	the	the	DET
app01-6687	24	2	measurements	measurement	NOUN
app01-6687	24	3	were	be	AUX
app01-6687	24	4	performed	perform	VERB
app01-6687	24	5	on	on	ADP
app01-6687	24	6	hipims	hipims	NOUN
app01-6687	24	7	(	(	PUNCT
app01-6687	24	8	high	high	ADJ
app01-6687	24	9	power	power	NOUN
app01-6687	24	10	impulse	impulse	ADJ
app01-6687	24	11	magnetron	magnetron	NOUN
app01-6687	24	12	sputtering	sputtering	NOUN
app01-6687	24	13	)	)	PUNCT
app01-6687	24	14	w	w	PROPN
app01-6687	24	15	-	-	PUNCT
app01-6687	24	16	c	c	NOUN
app01-6687	24	17	and	and	CCONJ
app01-6687	24	18	w	w	NOUN
app01-6687	24	19	-	-	PUNCT
app01-6687	24	20	c	c	NOUN
app01-6687	24	21	:	:	PUNCT
app01-6687	24	22	h	h	NOUN
app01-6687	24	23	coatings	coating	NOUN
app01-6687	24	24	deposited	deposit	VERB
app01-6687	24	25	using	use	VERB
app01-6687	24	26	hybrid	hybrid	ADJ
app01-6687	24	27	pvd	pvd	PROPN
app01-6687	24	28	-	-	PUNCT
app01-6687	24	29	pecd	pecd	NOUN
app01-6687	24	30	(	(	PUNCT
app01-6687	24	31	physical	physical	ADJ
app01-6687	24	32	vapor	vapor	NOUN
app01-6687	24	33	deposition	deposition	NOUN
app01-6687	24	34	–	–	PUNCT
app01-6687	24	35	plasma	plasma	NOUN
app01-6687	24	36	enhanced	enhance	VERB
app01-6687	24	37	chemical	chemical	NOUN
app01-6687	24	38	vapor	vapor	NOUN
app01-6687	24	39	deposition	deposition	NOUN
app01-6687	24	40	)	)	PUNCT
app01-6687	24	41	process	process	NOUN
app01-6687	24	42	with	with	ADP
app01-6687	24	43	different	different	ADJ
app01-6687	24	44	acetylene	acetylene	NOUN
app01-6687	24	45	and	and	CCONJ
app01-6687	24	46	hydrogen	hydrogen	NOUN
app01-6687	24	47	additions	addition	NOUN
app01-6687	24	48	on	on	ADP
app01-6687	24	49	three	three	NUM
app01-6687	24	50	different	different	ADJ
app01-6687	24	51	substrates	substrate	NOUN
app01-6687	24	52	.	.	PUNCT
app01-6687	25	1	62	62	NUM
app01-6687	25	2	http://dx.doi.org/10.14311/app.2020.27.0062	http://dx.doi.org/10.14311/app.2020.27.0062	PROPN
app01-6687	25	3	http://ojs.cvut.cz/ojs/index.php/app	http://ojs.cvut.cz/ojs/index.php/app	NOUN
app01-6687	25	4	vol	vol	NOUN
app01-6687	25	5	.	.	PUNCT
app01-6687	26	1	27/2020	27/2020	NUM
app01-6687	26	2	coatings	coating	NOUN
app01-6687	26	3	vs.	vs.	ADP
app01-6687	26	4	substrate	substrate	NOUN
app01-6687	26	5	type	type	NOUN
app01-6687	26	6	hardness	hardness	ADJ
app01-6687	26	7	figure	figure	NOUN
app01-6687	26	8	1	1	NUM
app01-6687	26	9	.	.	X
app01-6687	26	10	load	load	NOUN
app01-6687	26	11	–	–	PUNCT
app01-6687	26	12	indentation	indentation	NOUN
app01-6687	26	13	depth	depth	NOUN
app01-6687	26	14	curves	curve	NOUN
app01-6687	26	15	from	from	ADP
app01-6687	26	16	the	the	DET
app01-6687	26	17	nanoindentation	nanoindentation	NOUN
app01-6687	26	18	tests	test	NOUN
app01-6687	26	19	on	on	ADP
app01-6687	26	20	the	the	DET
app01-6687	26	21	hipims	hipims	NOUN
app01-6687	26	22	w	w	PROPN
app01-6687	26	23	-	-	PUNCT
app01-6687	26	24	c	c	NOUN
app01-6687	26	25	:	:	PUNCT
app01-6687	26	26	h	h	NOUN
app01-6687	26	27	coatings	coating	NOUN
app01-6687	26	28	deposited	deposit	VERB
app01-6687	26	29	with	with	ADP
app01-6687	26	30	2	2	NUM
app01-6687	26	31	sccm	sccm	NOUN
app01-6687	26	32	c2h2	c2h2	VERB
app01-6687	26	33	on	on	ADP
app01-6687	26	34	si	si	NOUN
app01-6687	26	35	wafer	wafer	NOUN
app01-6687	26	36	,	,	PUNCT
app01-6687	26	37	100cr6	100cr6	NUM
app01-6687	26	38	bearing	bear	VERB
app01-6687	26	39	steel	steel	NOUN
app01-6687	26	40	and	and	CCONJ
app01-6687	26	41	al	al	PROPN
app01-6687	26	42	2024	2024	NUM
app01-6687	26	43	alloy	alloy	NOUN
app01-6687	26	44	substrates	substrate	NOUN
app01-6687	26	45	–	–	PUNCT
app01-6687	26	46	a	a	X
app01-6687	26	47	)	)	PUNCT
app01-6687	26	48	the	the	DET
app01-6687	26	49	depth	depth	NOUN
app01-6687	26	50	profiles	profile	NOUN
app01-6687	26	51	of	of	ADP
app01-6687	26	52	hardness	hardness	ADJ
app01-6687	26	53	–	–	PUNCT
app01-6687	26	54	b	b	NOUN
app01-6687	26	55	)	)	PUNCT
app01-6687	26	56	and	and	CCONJ
app01-6687	26	57	indentation	indentation	NOUN
app01-6687	26	58	modulus	modulus	NOUN
app01-6687	26	59	–	–	PUNCT
app01-6687	26	60	c	c	NOUN
app01-6687	26	61	)	)	PUNCT
app01-6687	26	62	.	.	PUNCT
app01-6687	27	1	2	2	X
app01-6687	27	2	.	.	X
app01-6687	27	3	experimental	experimental	ADJ
app01-6687	27	4	material	material	NOUN
app01-6687	27	5	and	and	CCONJ
app01-6687	27	6	methods	method	NOUN
app01-6687	27	7	the	the	DET
app01-6687	27	8	studied	studied	ADJ
app01-6687	27	9	w	w	NOUN
app01-6687	27	10	-	-	PUNCT
app01-6687	27	11	c	c	NOUN
app01-6687	27	12	:	:	PUNCT
app01-6687	27	13	h	h	ADJ
app01-6687	27	14	coatings	coating	NOUN
app01-6687	27	15	were	be	AUX
app01-6687	27	16	simultaneously	simultaneously	ADV
app01-6687	27	17	deposited	deposit	VERB
app01-6687	27	18	on	on	ADP
app01-6687	27	19	three	three	NUM
app01-6687	27	20	different	different	ADJ
app01-6687	27	21	substrates	substrate	NOUN
app01-6687	27	22	:	:	PUNCT
app01-6687	28	1	polished	polished	ADJ
app01-6687	28	2	tempered	temper	VERB
app01-6687	28	3	bearing	bear	VERB
app01-6687	28	4	steel	steel	NOUN
app01-6687	28	5	100cr6	100cr6	NUM
app01-6687	28	6	discs	disc	NOUN
app01-6687	28	7	(	(	PUNCT
app01-6687	28	8	diameter	diameter	NOUN
app01-6687	28	9	–	–	PUNCT
app01-6687	28	10	25	25	NUM
app01-6687	28	11	mm	mm	NOUN
app01-6687	28	12	,	,	PUNCT
app01-6687	28	13	thickness	thickness	NOUN
app01-6687	28	14	–	–	PUNCT
app01-6687	28	15	3	3	NUM
app01-6687	28	16	mm	mm	NOUN
app01-6687	28	17	)	)	PUNCT
app01-6687	28	18	,	,	PUNCT
app01-6687	28	19	polished	polished	ADJ
app01-6687	28	20	al2024	al2024	NOUN
app01-6687	28	21	aluminum	aluminum	NOUN
app01-6687	28	22	alloy	alloy	NOUN
app01-6687	28	23	discs	disc	NOUN
app01-6687	28	24	with	with	ADP
app01-6687	28	25	similar	similar	ADJ
app01-6687	28	26	size	size	NOUN
app01-6687	28	27	and	and	CCONJ
app01-6687	28	28	on	on	ADP
app01-6687	28	29	approximately	approximately	ADV
app01-6687	28	30	1cm2	1cm2	NUM
app01-6687	28	31	polished	polished	ADJ
app01-6687	28	32	(	(	PUNCT
app01-6687	28	33	111	111	NUM
app01-6687	28	34	)	)	PUNCT
app01-6687	28	35	si	si	NOUN
app01-6687	28	36	wafer	wafer	NOUN
app01-6687	28	37	fragments	fragment	NOUN
app01-6687	28	38	with	with	ADP
app01-6687	28	39	∼	∼	NOUN
app01-6687	28	40	200	200	NUM
app01-6687	28	41	nm	nm	NOUN
app01-6687	28	42	cr	cr	NOUN
app01-6687	28	43	bond	bond	NOUN
app01-6687	28	44	layer	layer	NOUN
app01-6687	28	45	.	.	PUNCT
app01-6687	29	1	the	the	DET
app01-6687	29	2	deposition	deposition	NOUN
app01-6687	29	3	was	be	AUX
app01-6687	29	4	carried	carry	VERB
app01-6687	29	5	out	out	ADP
app01-6687	29	6	at	at	ADP
app01-6687	29	7	a	a	DET
app01-6687	29	8	minimum	minimum	ADJ
app01-6687	29	9	working	working	NOUN
app01-6687	29	10	pressure	pressure	NOUN
app01-6687	29	11	of	of	ADP
app01-6687	29	12	0.5	0.5	NUM
app01-6687	29	13	pa	pa	NOUN
app01-6687	29	14	in	in	ADP
app01-6687	29	15	a	a	DET
app01-6687	29	16	magnetron	magnetron	NOUN
app01-6687	29	17	deposition	deposition	NOUN
app01-6687	29	18	system	system	NOUN
app01-6687	29	19	(	(	PUNCT
app01-6687	29	20	cryofox	cryofox	ADJ
app01-6687	29	21	discovery	discovery	PROPN
app01-6687	29	22	500	500	NUM
app01-6687	29	23	,	,	PUNCT
app01-6687	29	24	polyteknik	polyteknik	NOUN
app01-6687	29	25	,	,	PUNCT
app01-6687	29	26	denmark	denmark	NOUN
app01-6687	29	27	)	)	PUNCT
app01-6687	29	28	using	use	VERB
app01-6687	29	29	high	high	ADJ
app01-6687	29	30	power	power	NOUN
app01-6687	29	31	impulse	impulse	ADJ
app01-6687	29	32	magnetron	magnetron	NOUN
app01-6687	29	33	sputtering	sputtering	NOUN
app01-6687	29	34	(	(	PUNCT
app01-6687	29	35	hipims	hipim	NOUN
app01-6687	29	36	)	)	PUNCT
app01-6687	29	37	source	source	NOUN
app01-6687	29	38	at	at	ADP
app01-6687	29	39	350	350	NUM
app01-6687	29	40	w	w	PROPN
app01-6687	29	41	average	average	ADJ
app01-6687	29	42	power	power	NOUN
app01-6687	29	43	achieved	achieve	VERB
app01-6687	29	44	at	at	ADP
app01-6687	29	45	2.62	2.62	NUM
app01-6687	29	46	%	%	NOUN
app01-6687	29	47	duty	duty	NOUN
app01-6687	29	48	cycle	cycle	NOUN
app01-6687	29	49	related	relate	VERB
app01-6687	29	50	to	to	ADP
app01-6687	29	51	the	the	DET
app01-6687	29	52	frequency	frequency	NOUN
app01-6687	29	53	of	of	ADP
app01-6687	29	54	150hz	150hz	PROPN
app01-6687	29	55	and	and	CCONJ
app01-6687	29	56	impulse	impulse	ADJ
app01-6687	29	57	length	length	NOUN
app01-6687	29	58	of	of	ADP
app01-6687	29	59	175	175	NUM
app01-6687	29	60	µs	µs	NOUN
app01-6687	29	61	.	.	PUNCT
app01-6687	30	1	a	a	DET
app01-6687	30	2	set	set	NOUN
app01-6687	30	3	of	of	ADP
app01-6687	30	4	14	14	NUM
app01-6687	30	5	coatings	coating	NOUN
app01-6687	30	6	with	with	ADP
app01-6687	30	7	variable	variable	ADJ
app01-6687	30	8	additions	addition	NOUN
app01-6687	30	9	of	of	ADP
app01-6687	30	10	c2h2	c2h2	INTJ
app01-6687	30	11	precursor	precursor	NOUN
app01-6687	30	12	(	(	PUNCT
app01-6687	30	13	0	0	NUM
app01-6687	30	14	,	,	PUNCT
app01-6687	30	15	2	2	NUM
app01-6687	30	16	,	,	PUNCT
app01-6687	30	17	4	4	NUM
app01-6687	30	18	,	,	PUNCT
app01-6687	30	19	6	6	NUM
app01-6687	30	20	,	,	PUNCT
app01-6687	30	21	8	8	NUM
app01-6687	30	22	sccm	sccm	NOUN
app01-6687	30	23	)	)	PUNCT
app01-6687	30	24	and	and	CCONJ
app01-6687	30	25	(	(	PUNCT
app01-6687	30	26	0	0	NUM
app01-6687	30	27	,	,	PUNCT
app01-6687	30	28	5	5	NUM
app01-6687	30	29	,	,	PUNCT
app01-6687	30	30	10	10	NUM
app01-6687	30	31	,	,	PUNCT
app01-6687	30	32	20	20	NUM
app01-6687	30	33	sccm	sccm	NOUN
app01-6687	30	34	)	)	PUNCT
app01-6687	30	35	into	into	ADP
app01-6687	30	36	ar	ar	NOUN
app01-6687	30	37	atmosphere	atmosphere	NOUN
app01-6687	30	38	was	be	AUX
app01-6687	30	39	prepared	prepare	VERB
app01-6687	30	40	for	for	ADP
app01-6687	30	41	the	the	DET
app01-6687	30	42	study	study	NOUN
app01-6687	30	43	.	.	PUNCT
app01-6687	31	1	the	the	DET
app01-6687	31	2	thicknesses	thickness	NOUN
app01-6687	31	3	of	of	ADP
app01-6687	31	4	the	the	DET
app01-6687	31	5	coatings	coating	NOUN
app01-6687	31	6	were	be	AUX
app01-6687	31	7	in	in	ADP
app01-6687	31	8	the	the	DET
app01-6687	31	9	range	range	NOUN
app01-6687	31	10	from	from	ADP
app01-6687	31	11	0.7	0.7	NUM
app01-6687	31	12	µm	µm	NOUN
app01-6687	31	13	up	up	ADP
app01-6687	31	14	to	to	ADP
app01-6687	31	15	almost	almost	ADV
app01-6687	31	16	3	3	NUM
app01-6687	31	17	µm	µm	ADP
app01-6687	31	18	depending	depend	VERB
app01-6687	31	19	on	on	ADP
app01-6687	31	20	the	the	DET
app01-6687	31	21	amount	amount	NOUN
app01-6687	31	22	of	of	ADP
app01-6687	31	23	precursor	precursor	NOUN
app01-6687	31	24	gas	gas	NOUN
app01-6687	31	25	additions	addition	NOUN
app01-6687	31	26	[	[	X
app01-6687	31	27	15–18	15–18	NUM
app01-6687	31	28	]	]	X
app01-6687	31	29	.	.	PUNCT
app01-6687	32	1	the	the	DET
app01-6687	32	2	nanoindentation	nanoindentation	NOUN
app01-6687	32	3	tests	test	NOUN
app01-6687	32	4	were	be	AUX
app01-6687	32	5	carried	carry	VERB
app01-6687	32	6	out	out	ADP
app01-6687	32	7	on	on	ADP
app01-6687	32	8	a	a	DET
app01-6687	32	9	nanoindenter	nanoindenter	NOUN
app01-6687	32	10	(	(	PUNCT
app01-6687	32	11	model	model	NOUN
app01-6687	32	12	g200	g200	PROPN
app01-6687	32	13	,	,	PUNCT
app01-6687	32	14	agilent	agilent	PROPN
app01-6687	32	15	,	,	PUNCT
app01-6687	32	16	usa	usa	PROPN
app01-6687	32	17	)	)	PUNCT
app01-6687	32	18	using	use	VERB
app01-6687	32	19	a	a	DET
app01-6687	32	20	diamond	diamond	NOUN
app01-6687	32	21	berkovich	berkovich	NOUN
app01-6687	32	22	tip	tip	NOUN
app01-6687	32	23	in	in	ADP
app01-6687	32	24	csm	csm	PROPN
app01-6687	32	25	mode	mode	NOUN
app01-6687	32	26	with	with	ADP
app01-6687	32	27	the	the	DET
app01-6687	32	28	preset	preset	ADJ
app01-6687	32	29	maximum	maximum	ADJ
app01-6687	32	30	penetration	penetration	NOUN
app01-6687	32	31	depth	depth	NOUN
app01-6687	32	32	of	of	ADP
app01-6687	32	33	1000	1000	NUM
app01-6687	32	34	nm	nm	NOUN
app01-6687	32	35	,	,	PUNCT
app01-6687	32	36	strain	strain	ADJ
app01-6687	32	37	rate	rate	NOUN
app01-6687	32	38	of	of	ADP
app01-6687	32	39	0.05	0.05	NUM
app01-6687	32	40	s−1	s−1	PROPN
app01-6687	32	41	,	,	PUNCT
app01-6687	32	42	frequency	frequency	NOUN
app01-6687	32	43	of	of	ADP
app01-6687	32	44	45	45	NUM
app01-6687	32	45	hz	hz	VERB
app01-6687	32	46	and	and	CCONJ
app01-6687	32	47	amplitude	amplitude	NOUN
app01-6687	32	48	of	of	ADP
app01-6687	32	49	2	2	NUM
app01-6687	32	50	nm	nm	NOUN
app01-6687	32	51	on	on	ADP
app01-6687	32	52	a	a	DET
app01-6687	32	53	set	set	NOUN
app01-6687	32	54	of	of	ADP
app01-6687	32	55	16	16	NUM
app01-6687	32	56	indents	indent	NOUN
app01-6687	32	57	.	.	PUNCT
app01-6687	33	1	the	the	DET
app01-6687	33	2	hardness	hardness	NOUN
app01-6687	33	3	and	and	CCONJ
app01-6687	33	4	indentation	indentation	NOUN
app01-6687	33	5	modulus	modulus	ADJ
app01-6687	33	6	depth	depth	NOUN
app01-6687	33	7	profiles	profile	NOUN
app01-6687	33	8	were	be	AUX
app01-6687	33	9	obtained	obtain	VERB
app01-6687	33	10	by	by	ADP
app01-6687	33	11	averaging	average	VERB
app01-6687	33	12	the	the	DET
app01-6687	33	13	results	result	NOUN
app01-6687	33	14	of	of	ADP
app01-6687	33	15	at	at	ADV
app01-6687	33	16	least	least	ADV
app01-6687	33	17	10	10	NUM
app01-6687	33	18	measurements	measurement	NOUN
app01-6687	33	19	.	.	PUNCT
app01-6687	34	1	the	the	DET
app01-6687	34	2	young	young	PROPN
app01-6687	34	3	’s	’s	PART
app01-6687	34	4	modulus	modulus	NOUN
app01-6687	34	5	and	and	CCONJ
app01-6687	34	6	poisson	poisson	NOUN
app01-6687	34	7	’s	’s	PART
app01-6687	34	8	ratio	ratio	NOUN
app01-6687	34	9	of	of	ADP
app01-6687	34	10	the	the	DET
app01-6687	34	11	diamond	diamond	NOUN
app01-6687	34	12	tip	tip	NOUN
app01-6687	34	13	used	use	VERB
app01-6687	34	14	for	for	ADP
app01-6687	34	15	calculations	calculation	NOUN
app01-6687	34	16	were	be	AUX
app01-6687	34	17	etip	etip	NOUN
app01-6687	34	18	=	=	SYM
app01-6687	34	19	1141	1141	NUM
app01-6687	34	20	gpa	gpa	PROPN
app01-6687	34	21	and	and	CCONJ
app01-6687	34	22	νtip	νtip	NOUN
app01-6687	34	23	=	=	PROPN
app01-6687	34	24	0.07	0.07	NUM
app01-6687	34	25	,	,	PUNCT
app01-6687	34	26	respectively	respectively	ADV
app01-6687	34	27	.	.	PUNCT
app01-6687	35	1	the	the	DET
app01-6687	35	2	indenter	indenter	PROPN
app01-6687	35	3	tip	tip	NOUN
app01-6687	35	4	was	be	AUX
app01-6687	35	5	calibrated	calibrate	VERB
app01-6687	35	6	on	on	ADP
app01-6687	35	7	a	a	DET
app01-6687	35	8	fused	fuse	VERB
app01-6687	35	9	silica	silica	NOUN
app01-6687	35	10	reference	reference	NOUN
app01-6687	35	11	sample	sample	NOUN
app01-6687	35	12	.	.	PUNCT
app01-6687	36	1	the	the	DET
app01-6687	36	2	poisson	poisson	NOUN
app01-6687	36	3	’s	’s	PART
app01-6687	36	4	ratios	ratio	NOUN
app01-6687	36	5	of	of	ADP
app01-6687	36	6	the	the	DET
app01-6687	36	7	coatings	coating	NOUN
app01-6687	36	8	of	of	ADP
app01-6687	36	9	v	v	NOUN
app01-6687	36	10	=	=	SYM
app01-6687	36	11	0.25	0.25	NUM
app01-6687	36	12	was	be	AUX
app01-6687	36	13	used	use	VERB
app01-6687	36	14	for	for	ADP
app01-6687	36	15	the	the	DET
app01-6687	36	16	evaluation	evaluation	NOUN
app01-6687	36	17	of	of	ADP
app01-6687	36	18	the	the	DET
app01-6687	36	19	corresponding	corresponding	ADJ
app01-6687	36	20	properties	property	NOUN
app01-6687	36	21	.	.	PUNCT
app01-6687	37	1	3	3	X
app01-6687	37	2	.	.	NOUN
app01-6687	37	3	results	result	NOUN
app01-6687	37	4	and	and	CCONJ
app01-6687	37	5	discussion	discussion	NOUN
app01-6687	37	6	3.1	3.1	NUM
app01-6687	37	7	.	.	PUNCT
app01-6687	37	8	substrate	substrate	NOUN
app01-6687	37	9	effects	effect	NOUN
app01-6687	37	10	on	on	ADP
app01-6687	37	11	hardness	hardness	NOUN
app01-6687	37	12	and	and	CCONJ
app01-6687	37	13	indentation	indentation	NOUN
app01-6687	37	14	modulus	modulus	NOUN
app01-6687	37	15	in	in	ADP
app01-6687	37	16	hipims	hipims	PROPN
app01-6687	37	17	w	w	PROPN
app01-6687	37	18	-	-	PUNCT
app01-6687	37	19	c	c	NOUN
app01-6687	37	20	:	:	PUNCT
app01-6687	37	21	h	h	NOUN
app01-6687	37	22	coatings	coating	NOUN
app01-6687	37	23	fig	fig	NOUN
app01-6687	37	24	.	.	PUNCT
app01-6687	38	1	1a	1a	NOUN
app01-6687	38	2	1c	1c	NOUN
app01-6687	38	3	illustrate	illustrate	VERB
app01-6687	38	4	the	the	DET
app01-6687	38	5	differences	difference	NOUN
app01-6687	38	6	between	between	ADP
app01-6687	38	7	load	load	NOUN
app01-6687	38	8	indentation	indentation	NOUN
app01-6687	38	9	depth	depth	NOUN
app01-6687	38	10	curves	curve	NOUN
app01-6687	38	11	,	,	PUNCT
app01-6687	38	12	hardness	hardness	ADJ
app01-6687	38	13	–	–	PUNCT
app01-6687	38	14	indentation	indentation	NOUN
app01-6687	38	15	depth	depth	NOUN
app01-6687	38	16	and	and	CCONJ
app01-6687	38	17	indentation	indentation	NOUN
app01-6687	38	18	modulus	modulus	NOUN
app01-6687	38	19	–	–	PUNCT
app01-6687	38	20	depth	depth	NOUN
app01-6687	38	21	profiles	profile	NOUN
app01-6687	38	22	in	in	ADP
app01-6687	38	23	the	the	DET
app01-6687	38	24	studied	studied	ADJ
app01-6687	38	25	w	w	NOUN
app01-6687	38	26	-	-	PUNCT
app01-6687	38	27	c	c	NOUN
app01-6687	38	28	:	:	PUNCT
app01-6687	38	29	h	h	NOUN
app01-6687	38	30	coating	coating	NOUN
app01-6687	38	31	deposited	deposit	VERB
app01-6687	38	32	with	with	ADP
app01-6687	38	33	the	the	DET
app01-6687	38	34	addition	addition	NOUN
app01-6687	38	35	of	of	ADP
app01-6687	38	36	2	2	NUM
app01-6687	38	37	sccm	sccm	NOUN
app01-6687	38	38	c2h2	c2h2	NOUN
app01-6687	38	39	,	,	PUNCT
app01-6687	38	40	respectively	respectively	ADV
app01-6687	38	41	.	.	PUNCT
app01-6687	39	1	the	the	DET
app01-6687	39	2	load	load	NOUN
app01-6687	39	3	–	–	PUNCT
app01-6687	39	4	displacement	displacement	ADJ
app01-6687	39	5	curve	curve	NOUN
app01-6687	39	6	in	in	ADP
app01-6687	39	7	the	the	DET
app01-6687	39	8	coating	coating	NOUN
app01-6687	39	9	on	on	ADP
app01-6687	39	10	al	al	PROPN
app01-6687	39	11	alloy	alloy	NOUN
app01-6687	39	12	differs	differ	VERB
app01-6687	39	13	significantly	significantly	ADV
app01-6687	39	14	from	from	ADP
app01-6687	39	15	those	those	PRON
app01-6687	39	16	on	on	ADP
app01-6687	39	17	si	si	NOUN
app01-6687	39	18	and	and	CCONJ
app01-6687	39	19	steel	steel	NOUN
app01-6687	39	20	substrates	substrate	NOUN
app01-6687	39	21	,	,	PUNCT
app01-6687	39	22	which	which	PRON
app01-6687	39	23	were	be	AUX
app01-6687	39	24	practically	practically	ADV
app01-6687	39	25	identical	identical	ADJ
app01-6687	39	26	,	,	PUNCT
app01-6687	39	27	at	at	ADP
app01-6687	39	28	the	the	DET
app01-6687	39	29	displacements	displacement	NOUN
app01-6687	39	30	above	above	ADP
app01-6687	39	31	400	400	NUM
app01-6687	39	32	nm	nm	NUM
app01-6687	39	33	63	63	NUM
app01-6687	39	34	františek	františek	NOUN
app01-6687	39	35	lofaj	lofaj	ADJ
app01-6687	39	36	,	,	PUNCT
app01-6687	39	37	margita	margita	PROPN
app01-6687	39	38	kabátová	kabátová	PROPN
app01-6687	39	39	acta	acta	PROPN
app01-6687	39	40	polytechnica	polytechnica	PROPN
app01-6687	39	41	figure	figure	NOUN
app01-6687	39	42	2	2	NUM
app01-6687	39	43	.	.	PUNCT
app01-6687	40	1	the	the	DET
app01-6687	40	2	comparison	comparison	NOUN
app01-6687	40	3	of	of	ADP
app01-6687	40	4	the	the	DET
app01-6687	40	5	hardness	hardness	NOUN
app01-6687	40	6	,	,	PUNCT
app01-6687	40	7	hit	hit	VERB
app01-6687	40	8	−	−	PROPN
app01-6687	40	9	a	a	NOUN
app01-6687	40	10	)	)	PUNCT
app01-6687	40	11	and	and	CCONJ
app01-6687	40	12	indentation	indentation	NOUN
app01-6687	40	13	modulus	modulus	NOUN
app01-6687	40	14	,	,	PUNCT
app01-6687	40	15	eit	eit	ADP
app01-6687	40	16	−	−	PROPN
app01-6687	40	17	b	b	NOUN
app01-6687	40	18	)	)	PUNCT
app01-6687	40	19	in	in	ADP
app01-6687	40	20	hipims	hipims	PROPN
app01-6687	40	21	w	w	PROPN
app01-6687	40	22	-	-	PUNCT
app01-6687	40	23	c	c	NOUN
app01-6687	40	24	:	:	PUNCT
app01-6687	40	25	h	h	NOUN
app01-6687	40	26	coatings	coating	NOUN
app01-6687	40	27	deposited	deposit	VERB
app01-6687	40	28	at	at	ADP
app01-6687	40	29	different	different	ADJ
app01-6687	40	30	acetylene	acetylene	NOUN
app01-6687	40	31	(	(	PUNCT
app01-6687	40	32	and	and	CCONJ
app01-6687	40	33	hydrogen	hydrogen	NOUN
app01-6687	40	34	)	)	PUNCT
app01-6687	40	35	additions	addition	NOUN
app01-6687	40	36	on	on	ADP
app01-6687	40	37	three	three	NUM
app01-6687	40	38	types	type	NOUN
app01-6687	40	39	of	of	ADP
app01-6687	40	40	substrates	substrate	NOUN
app01-6687	40	41	.	.	PUNCT
app01-6687	41	1	the	the	DET
app01-6687	41	2	data	data	NOUN
app01-6687	41	3	-	-	PUNCT
app01-6687	41	4	points	point	NOUN
app01-6687	41	5	corresponding	correspond	VERB
app01-6687	41	6	to	to	ADP
app01-6687	41	7	5	5	NUM
app01-6687	41	8	,	,	PUNCT
app01-6687	41	9	10	10	NUM
app01-6687	41	10	and	and	CCONJ
app01-6687	41	11	20	20	NUM
app01-6687	41	12	sccm	sccm	NOUN
app01-6687	41	13	h2	h2	NOUN
app01-6687	41	14	additions	addition	NOUN
app01-6687	41	15	were	be	AUX
app01-6687	41	16	intentionally	intentionally	ADV
app01-6687	41	17	shifted	shift	VERB
app01-6687	41	18	by	by	ADP
app01-6687	41	19	0.2	0.2	NUM
app01-6687	41	20	,	,	PUNCT
app01-6687	41	21	0.4	0.4	NUM
app01-6687	41	22	and	and	CCONJ
app01-6687	41	23	0.4	0.4	NUM
app01-6687	41	24	sccm	sccm	NOUN
app01-6687	41	25	respectively	respectively	ADV
app01-6687	41	26	,	,	PUNCT
app01-6687	41	27	for	for	ADP
app01-6687	41	28	better	well	ADJ
app01-6687	41	29	visibility	visibility	NOUN
app01-6687	41	30	.	.	PUNCT
app01-6687	42	1	(	(	PUNCT
app01-6687	42	2	fig	fig	NOUN
app01-6687	42	3	.	.	PUNCT
app01-6687	43	1	1a	1a	NOUN
app01-6687	43	2	)	)	PUNCT
app01-6687	43	3	.	.	PUNCT
app01-6687	44	1	however	however	ADV
app01-6687	44	2	,	,	PUNCT
app01-6687	44	3	this	this	DET
app01-6687	44	4	difference	difference	NOUN
app01-6687	44	5	is	be	AUX
app01-6687	44	6	not	not	PART
app01-6687	44	7	important	important	ADJ
app01-6687	44	8	for	for	ADP
app01-6687	44	9	the	the	DET
app01-6687	44	10	determination	determination	NOUN
app01-6687	44	11	of	of	ADP
app01-6687	44	12	the	the	DET
app01-6687	44	13	hardness	hardness	NOUN
app01-6687	44	14	and	and	CCONJ
app01-6687	44	15	indentation	indentation	NOUN
app01-6687	44	16	modulus	modulus	NOUN
app01-6687	44	17	,	,	PUNCT
app01-6687	44	18	because	because	SCONJ
app01-6687	44	19	they	they	PRON
app01-6687	44	20	have	have	VERB
app01-6687	44	21	to	to	PART
app01-6687	44	22	be	be	AUX
app01-6687	44	23	determined	determine	VERB
app01-6687	44	24	from	from	ADP
app01-6687	44	25	the	the	DET
app01-6687	44	26	indentation	indentation	NOUN
app01-6687	44	27	depths	depth	NOUN
app01-6687	44	28	within	within	ADP
app01-6687	44	29	the	the	DET
app01-6687	44	30	range	range	NOUN
app01-6687	44	31	of	of	ADP
app01-6687	44	32	100	100	NUM
app01-6687	44	33	300	300	NUM
app01-6687	44	34	nm	nm	NOUN
app01-6687	44	35	due	due	ADP
app01-6687	44	36	to	to	ADP
app01-6687	44	37	the	the	DET
app01-6687	44	38	earlier	early	ADV
app01-6687	44	39	mentioned	mention	VERB
app01-6687	44	40	10	10	NUM
app01-6687	44	41	%	%	NOUN
app01-6687	44	42	rule	rule	NOUN
app01-6687	44	43	.	.	PUNCT
app01-6687	45	1	fig	fig	NOUN
app01-6687	45	2	.	.	PUNCT
app01-6687	46	1	1b	1b	PROPN
app01-6687	46	2	shows	show	VERB
app01-6687	46	3	the	the	DET
app01-6687	46	4	depth	depth	NOUN
app01-6687	46	5	profile	profile	NOUN
app01-6687	46	6	of	of	ADP
app01-6687	46	7	hardness	hardness	NOUN
app01-6687	46	8	:	:	PUNCT
app01-6687	46	9	on	on	ADP
app01-6687	46	10	si	si	X
app01-6687	46	11	and	and	CCONJ
app01-6687	46	12	steel	steel	NOUN
app01-6687	46	13	substrates	substrate	NOUN
app01-6687	46	14	,	,	PUNCT
app01-6687	46	15	very	very	ADV
app01-6687	46	16	wide	wide	ADJ
app01-6687	46	17	plateau	plateau	NOUN
app01-6687	46	18	at	at	ADP
app01-6687	46	19	their	their	PRON
app01-6687	46	20	maxima	maxima	NOUN
app01-6687	46	21	of	of	ADP
app01-6687	46	22	around	around	ADV
app01-6687	46	23	20	20	NUM
app01-6687	46	24	gpa	gpa	NOUN
app01-6687	46	25	extending	extend	VERB
app01-6687	46	26	up	up	ADV
app01-6687	46	27	to	to	ADP
app01-6687	46	28	almost	almost	ADV
app01-6687	46	29	500	500	NUM
app01-6687	46	30	nm	nm	ADJ
app01-6687	46	31	depth	depth	NOUN
app01-6687	46	32	can	can	AUX
app01-6687	46	33	be	be	AUX
app01-6687	46	34	seen	see	VERB
app01-6687	46	35	.	.	PUNCT
app01-6687	47	1	in	in	ADP
app01-6687	47	2	contrary	contrary	PROPN
app01-6687	47	3	,	,	PUNCT
app01-6687	47	4	the	the	DET
app01-6687	47	5	influence	influence	NOUN
app01-6687	47	6	of	of	ADP
app01-6687	47	7	substrate	substrate	NOUN
app01-6687	47	8	is	be	AUX
app01-6687	47	9	much	much	ADV
app01-6687	47	10	stronger	strong	ADJ
app01-6687	47	11	in	in	ADP
app01-6687	47	12	the	the	DET
app01-6687	47	13	case	case	NOUN
app01-6687	47	14	of	of	ADP
app01-6687	47	15	measurement	measurement	NOUN
app01-6687	47	16	on	on	ADP
app01-6687	47	17	al	al	PROPN
app01-6687	47	18	substrate	substrate	NOUN
app01-6687	47	19	:	:	PUNCT
app01-6687	47	20	the	the	DET
app01-6687	47	21	onset	onset	NOUN
app01-6687	47	22	of	of	ADP
app01-6687	47	23	hardness	hardness	ADJ
app01-6687	47	24	decrease	decrease	NOUN
app01-6687	47	25	occurred	occur	VERB
app01-6687	47	26	already	already	ADV
app01-6687	47	27	at	at	ADP
app01-6687	47	28	250	250	NUM
app01-6687	47	29	nm	nm	NOUN
app01-6687	47	30	.	.	PUNCT
app01-6687	48	1	such	such	ADJ
app01-6687	48	2	difference	difference	NOUN
app01-6687	48	3	is	be	AUX
app01-6687	48	4	a	a	DET
app01-6687	48	5	natural	natural	ADJ
app01-6687	48	6	consequence	consequence	NOUN
app01-6687	48	7	of	of	ADP
app01-6687	48	8	lower	low	ADJ
app01-6687	48	9	young	young	ADJ
app01-6687	48	10	’s	’s	PART
app01-6687	48	11	modulus	modulus	NOUN
app01-6687	48	12	of	of	ADP
app01-6687	48	13	al	al	PROPN
app01-6687	48	14	alloy	alloy	NOUN
app01-6687	48	15	in	in	ADP
app01-6687	48	16	comparison	comparison	NOUN
app01-6687	48	17	with	with	ADP
app01-6687	48	18	steel	steel	NOUN
app01-6687	48	19	and	and	CCONJ
app01-6687	48	20	si	si	NOUN
app01-6687	48	21	wafer	wafer	NOUN
app01-6687	48	22	.	.	PUNCT
app01-6687	49	1	however	however	ADV
app01-6687	49	2	,	,	PUNCT
app01-6687	49	3	the	the	DET
app01-6687	49	4	maximum	maximum	NOUN
app01-6687	49	5	of	of	ADP
app01-6687	49	6	the	the	DET
app01-6687	49	7	hardness	hardness	NOUN
app01-6687	49	8	profile	profile	NOUN
app01-6687	49	9	obtained	obtain	VERB
app01-6687	49	10	on	on	ADP
app01-6687	49	11	al	al	PROPN
app01-6687	49	12	alloy	alloy	NOUN
app01-6687	49	13	overlapped	overlap	VERB
app01-6687	49	14	with	with	ADP
app01-6687	49	15	those	those	PRON
app01-6687	49	16	on	on	ADP
app01-6687	49	17	the	the	DET
app01-6687	49	18	other	other	ADJ
app01-6687	49	19	two	two	NUM
app01-6687	49	20	substrates	substrate	NOUN
app01-6687	49	21	and	and	CCONJ
app01-6687	49	22	essentially	essentially	ADV
app01-6687	49	23	no	no	DET
app01-6687	49	24	difference	difference	NOUN
app01-6687	49	25	of	of	ADP
app01-6687	49	26	the	the	DET
app01-6687	49	27	substrate	substrate	NOUN
app01-6687	49	28	on	on	ADP
app01-6687	49	29	hardness	hardness	NOUN
app01-6687	49	30	can	can	AUX
app01-6687	49	31	be	be	AUX
app01-6687	49	32	seen	see	VERB
app01-6687	49	33	.	.	PUNCT
app01-6687	50	1	however	however	ADV
app01-6687	50	2	,	,	PUNCT
app01-6687	50	3	the	the	DET
app01-6687	50	4	situation	situation	NOUN
app01-6687	50	5	was	be	AUX
app01-6687	50	6	different	different	ADJ
app01-6687	50	7	in	in	ADP
app01-6687	50	8	the	the	DET
app01-6687	50	9	case	case	NOUN
app01-6687	50	10	of	of	ADP
app01-6687	50	11	indentation	indentation	NOUN
app01-6687	50	12	modulus	modulus	ADJ
app01-6687	50	13	profiles	profile	NOUN
app01-6687	50	14	.	.	PUNCT
app01-6687	51	1	a	a	DET
app01-6687	51	2	plateau	plateau	NOUN
app01-6687	51	3	at	at	ADP
app01-6687	51	4	around	around	ADV
app01-6687	51	5	225	225	NUM
app01-6687	51	6	gpa	gpa	NOUN
app01-6687	51	7	extending	extend	VERB
app01-6687	51	8	up	up	ADP
app01-6687	51	9	to	to	PART
app01-6687	51	10	500	500	NUM
app01-6687	51	11	nm	nm	NOUN
app01-6687	51	12	can	can	AUX
app01-6687	51	13	be	be	AUX
app01-6687	51	14	seen	see	VERB
app01-6687	51	15	on	on	ADP
app01-6687	51	16	steel	steel	NOUN
app01-6687	51	17	substrates	substrate	NOUN
app01-6687	51	18	but	but	CCONJ
app01-6687	51	19	the	the	DET
app01-6687	51	20	measurement	measurement	NOUN
app01-6687	51	21	on	on	ADP
app01-6687	51	22	si	si	X
app01-6687	51	23	wafer	wafer	NOUN
app01-6687	51	24	resulted	result	VERB
app01-6687	51	25	in	in	ADP
app01-6687	51	26	a	a	DET
app01-6687	51	27	maximum	maximum	ADJ
app01-6687	51	28	plateau	plateau	NOUN
app01-6687	51	29	at	at	ADP
app01-6687	51	30	around	around	ADV
app01-6687	51	31	220	220	NUM
app01-6687	51	32	gpa	gpa	NOUN
app01-6687	51	33	only	only	ADV
app01-6687	51	34	up	up	ADP
app01-6687	51	35	to	to	PART
app01-6687	51	36	∼	∼	VERB
app01-6687	51	37	300	300	NUM
app01-6687	51	38	nm	nm	NOUN
app01-6687	51	39	.	.	PUNCT
app01-6687	52	1	the	the	DET
app01-6687	52	2	effect	effect	NOUN
app01-6687	52	3	of	of	ADP
app01-6687	52	4	al	al	PROPN
app01-6687	52	5	alloy	alloy	NOUN
app01-6687	52	6	substrate	substrate	NOUN
app01-6687	52	7	was	be	AUX
app01-6687	52	8	much	much	ADV
app01-6687	52	9	more	more	ADV
app01-6687	52	10	pronounced	pronounced	ADJ
app01-6687	52	11	:	:	PUNCT
app01-6687	52	12	the	the	DET
app01-6687	52	13	maximum	maximum	NOUN
app01-6687	52	14	was	be	AUX
app01-6687	52	15	around	around	ADV
app01-6687	52	16	175	175	NUM
app01-6687	52	17	gpa	gpa	NOUN
app01-6687	52	18	and	and	CCONJ
app01-6687	52	19	it	it	PRON
app01-6687	52	20	extended	extend	VERB
app01-6687	52	21	only	only	ADV
app01-6687	52	22	to	to	ADP
app01-6687	52	23	150	150	NUM
app01-6687	52	24	nm	nm	ADJ
app01-6687	52	25	indentation	indentation	NOUN
app01-6687	52	26	depth	depth	NOUN
app01-6687	52	27	.	.	PUNCT
app01-6687	53	1	the	the	DET
app01-6687	53	2	values	value	NOUN
app01-6687	53	3	of	of	ADP
app01-6687	53	4	hit	hit	NOUN
app01-6687	53	5	and	and	CCONJ
app01-6687	53	6	eit	eit	PROPN
app01-6687	53	7	determined	determined	ADJ
app01-6687	53	8	from	from	ADP
app01-6687	53	9	the	the	DET
app01-6687	53	10	corresponding	corresponding	ADJ
app01-6687	53	11	depth	depth	NOUN
app01-6687	53	12	profiles	profile	NOUN
app01-6687	53	13	according	accord	VERB
app01-6687	53	14	to	to	ADP
app01-6687	53	15	the	the	DET
app01-6687	53	16	above	above	ADJ
app01-6687	53	17	mentioned	mention	VERB
app01-6687	53	18	way	way	NOUN
app01-6687	53	19	are	be	AUX
app01-6687	53	20	summarized	summarize	VERB
app01-6687	53	21	in	in	ADP
app01-6687	53	22	fig	fig	NOUN
app01-6687	53	23	.	.	PUNCT
app01-6687	54	1	2a	2a	NUM
app01-6687	54	2	and	and	CCONJ
app01-6687	54	3	2b	2b	NOUN
app01-6687	54	4	,	,	PUNCT
app01-6687	54	5	respectively	respectively	ADV
app01-6687	54	6	.	.	PUNCT
app01-6687	55	1	they	they	PRON
app01-6687	55	2	reveal	reveal	VERB
app01-6687	55	3	number	number	NOUN
app01-6687	55	4	of	of	ADP
app01-6687	55	5	effects	effect	NOUN
app01-6687	55	6	and	and	CCONJ
app01-6687	55	7	differences	difference	NOUN
app01-6687	55	8	.	.	PUNCT
app01-6687	56	1	they	they	PRON
app01-6687	56	2	involve	involve	VERB
app01-6687	56	3	the	the	DET
app01-6687	56	4	effects	effect	NOUN
app01-6687	56	5	of	of	ADP
app01-6687	56	6	substrate	substrate	NOUN
app01-6687	56	7	type	type	NOUN
app01-6687	56	8	but	but	CCONJ
app01-6687	56	9	also	also	ADV
app01-6687	56	10	of	of	ADP
app01-6687	56	11	acetylene	acetylene	NOUN
app01-6687	56	12	and	and	CCONJ
app01-6687	56	13	hydrogen	hydrogen	NOUN
app01-6687	56	14	additions	addition	NOUN
app01-6687	56	15	during	during	ADP
app01-6687	56	16	hybrid	hybrid	ADJ
app01-6687	56	17	pvd	pvd	PROPN
app01-6687	56	18	-	-	PUNCT
app01-6687	56	19	pecvd	pecvd	NOUN
app01-6687	56	20	.	.	PUNCT
app01-6687	57	1	the	the	DET
app01-6687	57	2	pvd	pvd	PROPN
app01-6687	57	3	process	process	NOUN
app01-6687	57	4	without	without	ADP
app01-6687	57	5	additional	additional	ADJ
app01-6687	57	6	precursor	precursor	NOUN
app01-6687	57	7	gases	gas	NOUN
app01-6687	57	8	resulted	result	VERB
app01-6687	57	9	in	in	ADP
app01-6687	57	10	(	(	PUNCT
app01-6687	57	11	possibly	possibly	ADV
app01-6687	57	12	over	over	ADP
app01-6687	57	13	-	-	PUNCT
app01-6687	57	14	stoichiometric	stoichiometric	NOUN
app01-6687	57	15	[	[	X
app01-6687	57	16	18	18	NUM
app01-6687	57	17	]	]	PUNCT
app01-6687	57	18	)	)	PUNCT
app01-6687	57	19	wc	wc	PROPN
app01-6687	57	20	coatings	coating	NOUN
app01-6687	57	21	exhibiting	exhibit	VERB
app01-6687	57	22	much	much	ADV
app01-6687	57	23	lower	low	ADJ
app01-6687	57	24	values	value	NOUN
app01-6687	57	25	of	of	ADP
app01-6687	57	26	hardness	hardness	NOUN
app01-6687	57	27	(	(	PUNCT
app01-6687	57	28	22	22	NUM
app01-6687	57	29	gpa	gpa	PROPN
app01-6687	57	30	)	)	PUNCT
app01-6687	57	31	and	and	CCONJ
app01-6687	57	32	modulus	modulus	NOUN
app01-6687	57	33	(	(	PUNCT
app01-6687	57	34	<	<	X
app01-6687	57	35	220	220	NUM
app01-6687	57	36	gpa	gpa	NOUN
app01-6687	57	37	)	)	PUNCT
app01-6687	57	38	in	in	ADP
app01-6687	57	39	the	the	DET
app01-6687	57	40	coatings	coating	NOUN
app01-6687	57	41	deposited	deposit	VERB
app01-6687	57	42	on	on	ADP
app01-6687	57	43	al	al	PROPN
app01-6687	57	44	alloy	alloy	NOUN
app01-6687	57	45	substrates	substrate	NOUN
app01-6687	57	46	than	than	ADP
app01-6687	57	47	on	on	ADP
app01-6687	57	48	si	si	NOUN
app01-6687	57	49	and	and	CCONJ
app01-6687	57	50	steel	steel	NOUN
app01-6687	57	51	substrates	substrate	NOUN
app01-6687	57	52	(	(	PUNCT
app01-6687	57	53	26	26	NUM
app01-6687	57	54	–	–	SYM
app01-6687	57	55	29	29	NUM
app01-6687	57	56	gpa	gpa	NOUN
app01-6687	57	57	and	and	CCONJ
app01-6687	57	58	280	280	NUM
app01-6687	57	59	–	–	SYM
app01-6687	57	60	340	340	NUM
app01-6687	57	61	gpa	gpa	NOUN
app01-6687	57	62	,	,	PUNCT
app01-6687	57	63	respectively	respectively	ADV
app01-6687	57	64	)	)	PUNCT
app01-6687	57	65	.	.	PUNCT
app01-6687	58	1	it	it	PRON
app01-6687	58	2	is	be	AUX
app01-6687	58	3	known	know	VERB
app01-6687	58	4	from	from	ADP
app01-6687	58	5	earlier	early	ADJ
app01-6687	58	6	works	work	NOUN
app01-6687	58	7	on	on	ADP
app01-6687	58	8	dc	dc	PROPN
app01-6687	58	9	magnetron	magnetron	PROPN
app01-6687	58	10	sputtered	sputter	VERB
app01-6687	58	11	and	and	CCONJ
app01-6687	58	12	hipims	hipim	NOUN
app01-6687	58	13	w	w	NOUN
app01-6687	58	14	-	-	PUNCT
app01-6687	58	15	c	c	NOUN
app01-6687	58	16	:	:	PUNCT
app01-6687	58	17	h	h	NOUN
app01-6687	58	18	coatings	coating	NOUN
app01-6687	59	1	[	[	X
app01-6687	59	2	17	17	NUM
app01-6687	59	3	,	,	PUNCT
app01-6687	59	4	18	18	NUM
app01-6687	59	5	]	]	PUNCT
app01-6687	59	6	that	that	SCONJ
app01-6687	59	7	the	the	DET
app01-6687	59	8	structure	structure	NOUN
app01-6687	59	9	of	of	ADP
app01-6687	59	10	the	the	DET
app01-6687	59	11	pvd	pvd	PROPN
app01-6687	59	12	coatings	coating	NOUN
app01-6687	59	13	without	without	ADP
app01-6687	59	14	additions	addition	NOUN
app01-6687	59	15	of	of	ADP
app01-6687	59	16	acetylene	acetylene	NOUN
app01-6687	59	17	may	may	AUX
app01-6687	59	18	vary	vary	VERB
app01-6687	59	19	from	from	ADP
app01-6687	59	20	nano	nano	NOUN
app01-6687	59	21	-	-	PUNCT
app01-6687	59	22	columnar	columnar	NOUN
app01-6687	59	23	to	to	ADP
app01-6687	59	24	nanocrystalline	nanocrystalline	NOUN
app01-6687	59	25	,	,	PUNCT
app01-6687	59	26	which	which	PRON
app01-6687	59	27	resulted	result	VERB
app01-6687	59	28	in	in	ADP
app01-6687	59	29	the	the	DET
app01-6687	59	30	variations	variation	NOUN
app01-6687	59	31	of	of	ADP
app01-6687	59	32	hardness	hardness	NOUN
app01-6687	59	33	from	from	ADP
app01-6687	59	34	34	34	NUM
app01-6687	59	35	gpa	gpa	PROPN
app01-6687	59	36	to	to	ADP
app01-6687	59	37	28	28	NUM
app01-6687	59	38	gpa	gpa	NOUN
app01-6687	59	39	,	,	PUNCT
app01-6687	59	40	respectively	respectively	ADV
app01-6687	59	41	.	.	PUNCT
app01-6687	60	1	the	the	DET
app01-6687	60	2	additions	addition	NOUN
app01-6687	60	3	of	of	ADP
app01-6687	60	4	acetylene	acetylene	NOUN
app01-6687	60	5	caused	cause	VERB
app01-6687	60	6	gradual	gradual	ADJ
app01-6687	60	7	increase	increase	NOUN
app01-6687	60	8	of	of	ADP
app01-6687	60	9	the	the	DET
app01-6687	60	10	content	content	NOUN
app01-6687	60	11	of	of	ADP
app01-6687	60	12	hydrogenated	hydrogenate	VERB
app01-6687	60	13	free	free	ADJ
app01-6687	60	14	carbon	carbon	NOUN
app01-6687	60	15	phase	phase	NOUN
app01-6687	60	16	and	and	CCONJ
app01-6687	60	17	a	a	DET
app01-6687	60	18	transition	transition	NOUN
app01-6687	60	19	from	from	ADP
app01-6687	60	20	nanocomposite	nanocomposite	NOUN
app01-6687	60	21	to	to	ADP
app01-6687	60	22	amorphous	amorphous	ADJ
app01-6687	60	23	structure	structure	NOUN
app01-6687	60	24	accompanied	accompany	VERB
app01-6687	60	25	by	by	ADP
app01-6687	60	26	a	a	DET
app01-6687	60	27	decrease	decrease	NOUN
app01-6687	60	28	of	of	ADP
app01-6687	60	29	hardness	hardness	NOUN
app01-6687	60	30	[	[	X
app01-6687	60	31	16–18	16–18	NUM
app01-6687	60	32	]	]	PUNCT
app01-6687	60	33	.	.	PUNCT
app01-6687	61	1	the	the	DET
app01-6687	61	2	substrate	substrate	NOUN
app01-6687	61	3	itself	itself	PRON
app01-6687	61	4	may	may	AUX
app01-6687	61	5	also	also	ADV
app01-6687	61	6	play	play	VERB
app01-6687	61	7	significant	significant	ADJ
app01-6687	61	8	role	role	NOUN
app01-6687	61	9	in	in	ADP
app01-6687	61	10	the	the	DET
app01-6687	61	11	formation	formation	NOUN
app01-6687	61	12	of	of	ADP
app01-6687	61	13	the	the	DET
app01-6687	61	14	coating	coating	NOUN
app01-6687	61	15	structure	structure	NOUN
app01-6687	61	16	and	and	CCONJ
app01-6687	61	17	its	its	PRON
app01-6687	61	18	morphology	morphology	NOUN
app01-6687	61	19	[	[	X
app01-6687	61	20	15	15	NUM
app01-6687	61	21	]	]	PUNCT
app01-6687	61	22	.	.	PUNCT
app01-6687	62	1	without	without	ADP
app01-6687	62	2	detail	detail	NOUN
app01-6687	62	3	structure	structure	NOUN
app01-6687	62	4	observations	observation	NOUN
app01-6687	62	5	,	,	PUNCT
app01-6687	62	6	it	it	PRON
app01-6687	62	7	is	be	AUX
app01-6687	62	8	difficult	difficult	ADJ
app01-6687	62	9	to	to	PART
app01-6687	62	10	decide	decide	VERB
app01-6687	62	11	,	,	PUNCT
app01-6687	62	12	which	which	PRON
app01-6687	62	13	of	of	ADP
app01-6687	62	14	the	the	DET
app01-6687	62	15	mentioned	mention	VERB
app01-6687	62	16	effects	effect	NOUN
app01-6687	62	17	could	could	AUX
app01-6687	62	18	be	be	AUX
app01-6687	62	19	responsible	responsible	ADJ
app01-6687	62	20	for	for	ADP
app01-6687	62	21	the	the	DET
app01-6687	62	22	changes	change	NOUN
app01-6687	62	23	of	of	ADP
app01-6687	62	24	hardness	hardness	NOUN
app01-6687	62	25	and	and	CCONJ
app01-6687	62	26	indentation	indentation	NOUN
app01-6687	62	27	modulus	modulus	NOUN
app01-6687	62	28	in	in	ADP
app01-6687	62	29	the	the	DET
app01-6687	62	30	studied	studied	ADJ
app01-6687	62	31	w	w	PROPN
app01-6687	62	32	-	-	PUNCT
app01-6687	62	33	c	c	NOUN
app01-6687	62	34	coatings	coating	NOUN
app01-6687	62	35	.	.	PUNCT
app01-6687	63	1	as	as	SCONJ
app01-6687	63	2	expected	expect	VERB
app01-6687	63	3	,	,	PUNCT
app01-6687	63	4	the	the	DET
app01-6687	63	5	additions	addition	NOUN
app01-6687	63	6	of	of	ADP
app01-6687	63	7	acetylene	acetylene	NOUN
app01-6687	63	8	resulted	result	VERB
app01-6687	63	9	in	in	ADP
app01-6687	63	10	gradual	gradual	ADJ
app01-6687	63	11	decrease	decrease	NOUN
app01-6687	63	12	of	of	ADP
app01-6687	63	13	these	these	DET
app01-6687	63	14	properties	property	NOUN
app01-6687	63	15	.	.	PUNCT
app01-6687	64	1	there	there	PRON
app01-6687	64	2	were	be	VERB
app01-6687	64	3	certain	certain	ADJ
app01-6687	64	4	variations	variation	NOUN
app01-6687	64	5	among	among	ADP
app01-6687	64	6	the	the	DET
app01-6687	64	7	values	value	NOUN
app01-6687	64	8	obtained	obtain	VERB
app01-6687	64	9	on	on	ADP
app01-6687	64	10	various	various	ADJ
app01-6687	64	11	substrates	substrate	NOUN
app01-6687	64	12	,	,	PUNCT
app01-6687	64	13	but	but	CCONJ
app01-6687	64	14	they	they	PRON
app01-6687	64	15	were	be	AUX
app01-6687	64	16	within	within	ADP
app01-6687	64	17	the	the	DET
app01-6687	64	18	scatter	scatter	NOUN
app01-6687	64	19	bars	bar	NOUN
app01-6687	64	20	of	of	ADP
app01-6687	64	21	the	the	DET
app01-6687	64	22	measurements	measurement	NOUN
app01-6687	64	23	and	and	CCONJ
app01-6687	64	24	the	the	DET
app01-6687	64	25	differences	difference	NOUN
app01-6687	64	26	decrease	decrease	NOUN
app01-6687	64	27	,	,	PUNCT
app01-6687	64	28	especially	especially	ADV
app01-6687	64	29	in	in	ADP
app01-6687	64	30	the	the	DET
app01-6687	64	31	case	case	NOUN
app01-6687	64	32	of	of	ADP
app01-6687	64	33	elastic	elastic	ADJ
app01-6687	64	34	moduli	modulus	NOUN
app01-6687	64	35	(	(	PUNCT
app01-6687	64	36	fig	fig	NOUN
app01-6687	64	37	.	.	PUNCT
app01-6687	64	38	2b	2b	NUM
app01-6687	64	39	)	)	PUNCT
app01-6687	64	40	.	.	PUNCT
app01-6687	65	1	apparently	apparently	ADV
app01-6687	65	2	,	,	PUNCT
app01-6687	65	3	the	the	DET
app01-6687	65	4	amorphization	amorphization	NOUN
app01-6687	65	5	of	of	ADP
app01-6687	65	6	the	the	DET
app01-6687	65	7	structure	structure	NOUN
app01-6687	65	8	at	at	ADP
app01-6687	65	9	high	high	ADJ
app01-6687	65	10	acetylene	acetylene	NOUN
app01-6687	65	11	additions	addition	NOUN
app01-6687	65	12	seems	seem	VERB
app01-6687	65	13	to	to	PART
app01-6687	65	14	result	result	VERB
app01-6687	65	15	in	in	ADP
app01-6687	65	16	the	the	DET
app01-6687	65	17	unification	unification	NOUN
app01-6687	65	18	of	of	ADP
app01-6687	65	19	the	the	DET
app01-6687	65	20	properties	property	NOUN
app01-6687	65	21	and	and	CCONJ
app01-6687	65	22	has	have	VERB
app01-6687	65	23	stronger	strong	ADJ
app01-6687	65	24	effect	effect	NOUN
app01-6687	65	25	than	than	ADP
app01-6687	65	26	the	the	DET
app01-6687	65	27	possible	possible	ADJ
app01-6687	65	28	influence	influence	NOUN
app01-6687	65	29	of	of	ADP
app01-6687	65	30	the	the	DET
app01-6687	65	31	substrate	substrate	NOUN
app01-6687	65	32	.	.	PUNCT
app01-6687	66	1	thus	thus	ADV
app01-6687	66	2	,	,	PUNCT
app01-6687	66	3	the	the	DET
app01-6687	66	4	differences	difference	NOUN
app01-6687	66	5	in	in	ADP
app01-6687	66	6	coating	coat	VERB
app01-6687	66	7	properties	property	NOUN
app01-6687	66	8	deposited	deposit	VERB
app01-6687	66	9	on	on	ADP
app01-6687	66	10	different	different	ADJ
app01-6687	66	11	substrates	substrate	NOUN
app01-6687	66	12	seem	seem	VERB
app01-6687	66	13	to	to	PART
app01-6687	66	14	be	be	AUX
app01-6687	66	15	statistically	statistically	ADV
app01-6687	66	16	significant	significant	ADJ
app01-6687	66	17	only	only	ADV
app01-6687	66	18	in	in	ADP
app01-6687	66	19	the	the	DET
app01-6687	66	20	cases	case	NOUN
app01-6687	66	21	without	without	ADP
app01-6687	66	22	or	or	CCONJ
app01-6687	66	23	with	with	ADP
app01-6687	66	24	very	very	ADV
app01-6687	66	25	small	small	ADJ
app01-6687	66	26	acetylene	acetylene	NOUN
app01-6687	66	27	additions	addition	NOUN
app01-6687	66	28	.	.	PUNCT
app01-6687	67	1	however	however	ADV
app01-6687	67	2	,	,	PUNCT
app01-6687	67	3	they	they	PRON
app01-6687	67	4	may	may	AUX
app01-6687	67	5	interfere	interfere	VERB
app01-6687	67	6	with	with	ADP
app01-6687	67	7	the	the	DET
app01-6687	67	8	effects	effect	NOUN
app01-6687	67	9	of	of	ADP
app01-6687	67	10	coating	coat	VERB
app01-6687	67	11	structure	structure	NOUN
app01-6687	67	12	and	and	CCONJ
app01-6687	67	13	therefore	therefore	ADV
app01-6687	67	14	,	,	PUNCT
app01-6687	67	15	can	can	AUX
app01-6687	67	16	not	not	PART
app01-6687	67	17	be	be	AUX
app01-6687	67	18	fully	fully	ADV
app01-6687	67	19	attributed	attribute	VERB
app01-6687	67	20	to	to	ADP
app01-6687	67	21	the	the	DET
app01-6687	67	22	substrate	substrate	NOUN
app01-6687	67	23	effect	effect	NOUN
app01-6687	67	24	.	.	PUNCT
app01-6687	68	1	figs	fig	NOUN
app01-6687	68	2	.	.	PUNCT
app01-6687	69	1	2	2	NUM
app01-6687	69	2	also	also	ADV
app01-6687	69	3	show	show	VERB
app01-6687	69	4	the	the	DET
app01-6687	69	5	influence	influence	NOUN
app01-6687	69	6	of	of	ADP
app01-6687	69	7	hydrogen	hydrogen	NOUN
app01-6687	69	8	additions	addition	NOUN
app01-6687	69	9	;	;	PUNCT
app01-6687	69	10	it	it	PRON
app01-6687	69	11	should	should	AUX
app01-6687	69	12	be	be	AUX
app01-6687	69	13	noted	note	VERB
app01-6687	69	14	that	that	SCONJ
app01-6687	69	15	the	the	DET
app01-6687	69	16	data	data	NOUN
app01-6687	69	17	-	-	PUNCT
app01-6687	69	18	points	point	NOUN
app01-6687	69	19	corresponding	correspond	VERB
app01-6687	69	20	to	to	ADP
app01-6687	69	21	5	5	NUM
app01-6687	69	22	,	,	PUNCT
app01-6687	69	23	10	10	NUM
app01-6687	69	24	and	and	CCONJ
app01-6687	69	25	20	20	NUM
app01-6687	69	26	sccm	sccm	NOUN
app01-6687	69	27	h2	h2	NOUN
app01-6687	69	28	additions	addition	NOUN
app01-6687	69	29	were	be	AUX
app01-6687	69	30	intentionally	intentionally	ADV
app01-6687	69	31	shifted	shift	VERB
app01-6687	69	32	by	by	ADP
app01-6687	69	33	0.2	0.2	NUM
app01-6687	69	34	,	,	PUNCT
app01-6687	69	35	0.4	0.4	NUM
app01-6687	69	36	and	and	CCONJ
app01-6687	69	37	0.4	0.4	NUM
app01-6687	69	38	sccm	sccm	NOUN
app01-6687	69	39	from	from	ADP
app01-6687	69	40	the	the	DET
app01-6687	69	41	position	position	NOUN
app01-6687	69	42	of	of	ADP
app01-6687	69	43	the	the	DET
app01-6687	69	44	corresponding	correspond	VERB
app01-6687	69	45	acetylene	acetylene	NOUN
app01-6687	69	46	addition	addition	NOUN
app01-6687	69	47	to	to	PART
app01-6687	69	48	show	show	VERB
app01-6687	69	49	the	the	DET
app01-6687	69	50	tendency	tendency	NOUN
app01-6687	69	51	of	of	ADP
app01-6687	69	52	the	the	DET
app01-6687	69	53	changes	change	NOUN
app01-6687	69	54	without	without	ADP
app01-6687	69	55	overlap	overlap	NOUN
app01-6687	69	56	.	.	PUNCT
app01-6687	70	1	it	it	PRON
app01-6687	70	2	can	can	AUX
app01-6687	70	3	be	be	AUX
app01-6687	70	4	seen	see	VERB
app01-6687	70	5	that	that	SCONJ
app01-6687	70	6	the	the	DET
app01-6687	70	7	hydrogen	hydrogen	NOUN
app01-6687	70	8	additions	addition	NOUN
app01-6687	70	9	have	have	VERB
app01-6687	70	10	different	different	ADJ
app01-6687	70	11	effects	effect	NOUN
app01-6687	70	12	on	on	ADP
app01-6687	70	13	hit	hit	NOUN
app01-6687	70	14	and	and	CCONJ
app01-6687	70	15	eit	eit	NOUN
app01-6687	70	16	in	in	ADP
app01-6687	70	17	pvd	pvd	PROPN
app01-6687	70	18	w	w	PROPN
app01-6687	70	19	-	-	PUNCT
app01-6687	70	20	c	c	NOUN
app01-6687	70	21	coatings	coating	NOUN
app01-6687	70	22	and	and	CCONJ
app01-6687	70	23	in	in	ADP
app01-6687	70	24	hybrid	hybrid	ADJ
app01-6687	70	25	pvd	pvd	PROPN
app01-6687	70	26	-	-	PUNCT
app01-6687	70	27	pecvd	pecvd	NOUN
app01-6687	70	28	w	w	PROPN
app01-6687	70	29	-	-	PUNCT
app01-6687	70	30	c	c	NOUN
app01-6687	70	31	:	:	PUNCT
app01-6687	70	32	h	h	NOUN
app01-6687	70	33	coatings	coating	NOUN
app01-6687	70	34	made	make	VERB
app01-6687	70	35	with	with	ADP
app01-6687	70	36	acetylene	acetylene	NOUN
app01-6687	70	37	additions	addition	NOUN
app01-6687	70	38	.	.	PUNCT
app01-6687	71	1	in	in	ADP
app01-6687	71	2	the	the	DET
app01-6687	71	3	first	first	ADJ
app01-6687	71	4	case	case	NOUN
app01-6687	71	5	,	,	PUNCT
app01-6687	71	6	hydrogen	hydrogen	NOUN
app01-6687	71	7	additions	addition	NOUN
app01-6687	71	8	resulted	result	VERB
app01-6687	71	9	in	in	ADP
app01-6687	71	10	the	the	DET
app01-6687	71	11	increase	increase	NOUN
app01-6687	71	12	of	of	ADP
app01-6687	71	13	hardness	hardness	NOUN
app01-6687	71	14	and	and	CCONJ
app01-6687	71	15	elastic	elastic	ADJ
app01-6687	71	16	modulus	modulus	NOUN
app01-6687	71	17	64	64	NUM
app01-6687	71	18	vol	vol	NOUN
app01-6687	71	19	.	.	PUNCT
app01-6687	72	1	27/2020	27/2020	NUM
app01-6687	72	2	coatings	coating	NOUN
app01-6687	72	3	vs.	vs.	ADP
app01-6687	72	4	substrate	substrate	NOUN
app01-6687	72	5	type	type	NOUN
app01-6687	72	6	hardness	hardness	NOUN
app01-6687	72	7	whereas	whereas	SCONJ
app01-6687	72	8	they	they	PRON
app01-6687	72	9	were	be	AUX
app01-6687	72	10	decreased	decrease	VERB
app01-6687	72	11	in	in	ADP
app01-6687	72	12	the	the	DET
app01-6687	72	13	coatings	coating	NOUN
app01-6687	72	14	made	make	VERB
app01-6687	72	15	with	with	ADP
app01-6687	72	16	4	4	NUM
app01-6687	72	17	sccm	sccm	NOUN
app01-6687	72	18	and	and	CCONJ
app01-6687	72	19	6	6	NUM
app01-6687	72	20	sccm	sccm	NOUN
app01-6687	72	21	acetylene	acetylene	NOUN
app01-6687	72	22	additions	addition	NOUN
app01-6687	72	23	regardless	regardless	ADV
app01-6687	72	24	of	of	ADP
app01-6687	72	25	the	the	DET
app01-6687	72	26	substrate	substrate	NOUN
app01-6687	72	27	.	.	PUNCT
app01-6687	73	1	moreover	moreover	ADV
app01-6687	73	2	,	,	PUNCT
app01-6687	73	3	the	the	DET
app01-6687	73	4	corresponding	corresponding	ADJ
app01-6687	73	5	values	value	NOUN
app01-6687	73	6	principally	principally	ADV
app01-6687	73	7	followed	follow	VERB
app01-6687	73	8	the	the	DET
app01-6687	73	9	dependencies	dependency	NOUN
app01-6687	73	10	described	describe	VERB
app01-6687	73	11	for	for	ADP
app01-6687	73	12	the	the	DET
app01-6687	73	13	coatings	coating	NOUN
app01-6687	73	14	without	without	ADP
app01-6687	73	15	hydrogen	hydrogen	NOUN
app01-6687	73	16	additions	addition	NOUN
app01-6687	73	17	and	and	CCONJ
app01-6687	73	18	agree	agree	VERB
app01-6687	73	19	with	with	ADP
app01-6687	73	20	the	the	DET
app01-6687	73	21	above	above	ADJ
app01-6687	73	22	conclusions	conclusion	NOUN
app01-6687	73	23	concerning	concern	VERB
app01-6687	73	24	exclusivity	exclusivity	NOUN
app01-6687	73	25	of	of	ADP
app01-6687	73	26	w	w	PROPN
app01-6687	73	27	-	-	PUNCT
app01-6687	73	28	c	c	NOUN
app01-6687	73	29	coatings	coating	NOUN
app01-6687	73	30	compared	compare	VERB
app01-6687	73	31	to	to	ADP
app01-6687	73	32	w	w	NOUN
app01-6687	73	33	-	-	PUNCT
app01-6687	73	34	c	c	NOUN
app01-6687	73	35	:	:	PUNCT
app01-6687	73	36	h	h	NOUN
app01-6687	73	37	coatings	coating	NOUN
app01-6687	73	38	.	.	PUNCT
app01-6687	74	1	the	the	DET
app01-6687	74	2	above	above	ADJ
app01-6687	74	3	results	result	NOUN
app01-6687	74	4	indicate	indicate	VERB
app01-6687	74	5	only	only	ADV
app01-6687	74	6	a	a	DET
app01-6687	74	7	small	small	ADJ
app01-6687	74	8	influence	influence	NOUN
app01-6687	74	9	of	of	ADP
app01-6687	74	10	substrate	substrate	NOUN
app01-6687	74	11	type	type	NOUN
app01-6687	74	12	on	on	ADP
app01-6687	74	13	hardness	hardness	NOUN
app01-6687	74	14	and	and	CCONJ
app01-6687	74	15	indentation	indentation	NOUN
app01-6687	74	16	modulus	modulus	NOUN
app01-6687	74	17	.	.	PUNCT
app01-6687	75	1	however	however	ADV
app01-6687	75	2	,	,	PUNCT
app01-6687	75	3	they	they	PRON
app01-6687	75	4	are	be	AUX
app01-6687	75	5	measured	measure	VERB
app01-6687	75	6	simultaneously	simultaneously	ADV
app01-6687	75	7	and	and	CCONJ
app01-6687	75	8	it	it	PRON
app01-6687	75	9	is	be	AUX
app01-6687	75	10	reasonable	reasonable	ADJ
app01-6687	75	11	to	to	PART
app01-6687	75	12	check	check	VERB
app01-6687	75	13	the	the	DET
app01-6687	75	14	simultaneous	simultaneous	ADJ
app01-6687	75	15	effect	effect	NOUN
app01-6687	75	16	of	of	ADP
app01-6687	75	17	both	both	DET
app01-6687	75	18	properties	property	NOUN
app01-6687	75	19	on	on	ADP
app01-6687	75	20	different	different	ADJ
app01-6687	75	21	substrates	substrate	NOUN
app01-6687	75	22	.	.	PUNCT
app01-6687	76	1	thus	thus	ADV
app01-6687	76	2	,	,	PUNCT
app01-6687	76	3	the	the	DET
app01-6687	76	4	results	result	NOUN
app01-6687	76	5	from	from	ADP
app01-6687	76	6	fig	fig	NOUN
app01-6687	76	7	.	.	PUNCT
app01-6687	77	1	2a	2a	NUM
app01-6687	77	2	and	and	CCONJ
app01-6687	77	3	2b	2b	NUM
app01-6687	77	4	were	be	AUX
app01-6687	77	5	replotted	replotte	VERB
app01-6687	77	6	as	as	ADP
app01-6687	77	7	a	a	DET
app01-6687	77	8	function	function	NOUN
app01-6687	77	9	of	of	ADP
app01-6687	77	10	hit	hit	NOUN
app01-6687	77	11	/	/	SYM
app01-6687	77	12	eit	eit	PROPN
app01-6687	77	13	ratio	ratio	NOUN
app01-6687	77	14	on	on	ADP
app01-6687	77	15	acetylene	acetylene	NOUN
app01-6687	77	16	(	(	PUNCT
app01-6687	77	17	and	and	CCONJ
app01-6687	77	18	hydrogen	hydrogen	NOUN
app01-6687	77	19	)	)	PUNCT
app01-6687	77	20	additions	addition	NOUN
app01-6687	77	21	in	in	ADP
app01-6687	77	22	fig	fig	NOUN
app01-6687	77	23	.	.	PUNCT
app01-6687	78	1	3	3	X
app01-6687	78	2	.	.	X
app01-6687	78	3	the	the	DET
app01-6687	78	4	obtained	obtain	VERB
app01-6687	78	5	plots	plot	NOUN
app01-6687	78	6	show	show	VERB
app01-6687	78	7	that	that	SCONJ
app01-6687	78	8	the	the	DET
app01-6687	78	9	acetylene	acetylene	NOUN
app01-6687	78	10	and	and	CCONJ
app01-6687	78	11	hydrogen	hydrogen	NOUN
app01-6687	78	12	additions	addition	NOUN
app01-6687	78	13	usually	usually	ADV
app01-6687	78	14	result	result	VERB
app01-6687	78	15	in	in	ADP
app01-6687	78	16	gradual	gradual	ADJ
app01-6687	78	17	hit	hit	NOUN
app01-6687	78	18	/	/	SYM
app01-6687	78	19	eit	eit	NOUN
app01-6687	78	20	increase	increase	NOUN
app01-6687	78	21	and	and	CCONJ
app01-6687	78	22	that	that	SCONJ
app01-6687	78	23	the	the	DET
app01-6687	78	24	difference	difference	NOUN
app01-6687	78	25	between	between	ADP
app01-6687	78	26	substrates	substrate	NOUN
app01-6687	78	27	was	be	AUX
app01-6687	78	28	strongly	strongly	ADV
app01-6687	78	29	magnified	magnify	VERB
app01-6687	78	30	.	.	PUNCT
app01-6687	79	1	although	although	SCONJ
app01-6687	79	2	the	the	DET
app01-6687	79	3	differences	difference	NOUN
app01-6687	79	4	between	between	ADP
app01-6687	79	5	hit	hit	NOUN
app01-6687	79	6	/	/	SYM
app01-6687	79	7	eit	eit	NOUN
app01-6687	79	8	in	in	ADP
app01-6687	79	9	the	the	DET
app01-6687	79	10	coatings	coating	NOUN
app01-6687	79	11	on	on	ADP
app01-6687	79	12	100cr6	100cr6	NUM
app01-6687	79	13	steel	steel	NOUN
app01-6687	79	14	and	and	CCONJ
app01-6687	79	15	si	si	NOUN
app01-6687	79	16	substrates	substrate	NOUN
app01-6687	79	17	were	be	AUX
app01-6687	79	18	negligible	negligible	ADJ
app01-6687	79	19	in	in	ADP
app01-6687	79	20	the	the	DET
app01-6687	79	21	studied	study	VERB
app01-6687	79	22	additions	addition	NOUN
app01-6687	79	23	range	range	VERB
app01-6687	79	24	,	,	PUNCT
app01-6687	79	25	the	the	DET
app01-6687	79	26	corresponding	corresponding	ADJ
app01-6687	79	27	values	value	NOUN
app01-6687	79	28	on	on	ADP
app01-6687	79	29	al	al	PROPN
app01-6687	79	30	alloy	alloy	NOUN
app01-6687	79	31	substrates	substrate	NOUN
app01-6687	79	32	followed	follow	VERB
app01-6687	79	33	the	the	DET
app01-6687	79	34	same	same	ADJ
app01-6687	79	35	tendency	tendency	NOUN
app01-6687	79	36	but	but	CCONJ
app01-6687	79	37	they	they	PRON
app01-6687	79	38	were	be	AUX
app01-6687	79	39	by	by	ADP
app01-6687	79	40	0.02	0.02	NUM
app01-6687	79	41	–	–	PUNCT
app01-6687	79	42	0.025	0.025	NUM
app01-6687	79	43	higher	high	ADJ
app01-6687	79	44	.	.	PUNCT
app01-6687	80	1	since	since	SCONJ
app01-6687	80	2	both	both	CCONJ
app01-6687	80	3	hardness	hardness	NOUN
app01-6687	80	4	and	and	CCONJ
app01-6687	80	5	indentation	indentation	NOUN
app01-6687	80	6	modulus	modulus	NOUN
app01-6687	80	7	decrease	decrease	NOUN
app01-6687	80	8	with	with	ADP
app01-6687	80	9	the	the	DET
app01-6687	80	10	acetylene	acetylene	NOUN
app01-6687	80	11	addition	addition	NOUN
app01-6687	80	12	increase	increase	NOUN
app01-6687	80	13	,	,	PUNCT
app01-6687	80	14	the	the	DET
app01-6687	80	15	increase	increase	NOUN
app01-6687	80	16	of	of	ADP
app01-6687	80	17	hit	hit	NOUN
app01-6687	80	18	/	/	SYM
app01-6687	80	19	eit	eit	PROPN
app01-6687	80	20	has	have	VERB
app01-6687	80	21	to	to	PART
app01-6687	80	22	result	result	VERB
app01-6687	80	23	from	from	ADP
app01-6687	80	24	faster	fast	ADJ
app01-6687	80	25	decrease	decrease	NOUN
app01-6687	80	26	of	of	ADP
app01-6687	80	27	indentation	indentation	NOUN
app01-6687	80	28	moduli	modulus	NOUN
app01-6687	80	29	.	.	PUNCT
app01-6687	81	1	another	another	DET
app01-6687	81	2	consequence	consequence	NOUN
app01-6687	81	3	of	of	ADP
app01-6687	81	4	the	the	DET
app01-6687	81	5	shift	shift	NOUN
app01-6687	81	6	of	of	ADP
app01-6687	81	7	the	the	DET
app01-6687	81	8	dependencies	dependency	NOUN
app01-6687	81	9	between	between	ADP
app01-6687	81	10	steel	steel	NOUN
app01-6687	81	11	,	,	PUNCT
app01-6687	81	12	si	si	PROPN
app01-6687	81	13	and	and	CCONJ
app01-6687	81	14	al	al	PROPN
app01-6687	81	15	alloy	alloy	NOUN
app01-6687	81	16	substrates	substrate	NOUN
app01-6687	81	17	was	be	AUX
app01-6687	81	18	that	that	SCONJ
app01-6687	81	19	all	all	PRON
app01-6687	81	20	hit	hit	NOUN
app01-6687	81	21	/	/	SYM
app01-6687	82	1	eit	eit	PROPN
app01-6687	82	2	values	value	NOUN
app01-6687	82	3	obtained	obtain	VERB
app01-6687	82	4	on	on	ADP
app01-6687	82	5	al	al	PROPN
app01-6687	82	6	alloy	alloy	NOUN
app01-6687	82	7	were	be	AUX
app01-6687	82	8	above	above	ADP
app01-6687	82	9	the	the	DET
app01-6687	82	10	plasticity	plasticity	NOUN
app01-6687	82	11	limit	limit	NOUN
app01-6687	82	12	of	of	ADP
app01-6687	82	13	0.1	0.1	NUM
app01-6687	82	14	while	while	SCONJ
app01-6687	82	15	the	the	DET
app01-6687	82	16	identical	identical	ADJ
app01-6687	82	17	coatings	coating	NOUN
app01-6687	82	18	deposited	deposit	VERB
app01-6687	82	19	on	on	ADP
app01-6687	82	20	si	si	X
app01-6687	82	21	and	and	CCONJ
app01-6687	82	22	steel	steel	NOUN
app01-6687	82	23	substrates	substrate	NOUN
app01-6687	82	24	at	at	ADP
app01-6687	82	25	0	0	NUM
app01-6687	82	26	and	and	CCONJ
app01-6687	82	27	2	2	NUM
app01-6687	82	28	sccm	sccm	NOUN
app01-6687	82	29	acetylene	acetylene	NOUN
app01-6687	82	30	(	(	PUNCT
app01-6687	82	31	and	and	CCONJ
app01-6687	82	32	hydrogen	hydrogen	NOUN
app01-6687	82	33	)	)	PUNCT
app01-6687	82	34	additions	addition	NOUN
app01-6687	82	35	would	would	AUX
app01-6687	82	36	be	be	AUX
app01-6687	82	37	below	below	ADP
app01-6687	82	38	that	that	DET
app01-6687	82	39	limit	limit	NOUN
app01-6687	82	40	.	.	PUNCT
app01-6687	83	1	obviously	obviously	ADV
app01-6687	83	2	,	,	PUNCT
app01-6687	83	3	such	such	ADJ
app01-6687	83	4	systematic	systematic	ADJ
app01-6687	83	5	differences	difference	NOUN
app01-6687	83	6	in	in	ADP
app01-6687	83	7	hit	hit	NOUN
app01-6687	83	8	/	/	SYM
app01-6687	83	9	eit	eit	ADV
app01-6687	83	10	on	on	ADP
app01-6687	83	11	the	the	DET
app01-6687	83	12	same	same	ADJ
app01-6687	83	13	coatings	coating	NOUN
app01-6687	83	14	do	do	AUX
app01-6687	83	15	not	not	PART
app01-6687	83	16	have	have	VERB
app01-6687	83	17	real	real	ADJ
app01-6687	83	18	physical	physical	ADJ
app01-6687	83	19	reason	reason	NOUN
app01-6687	83	20	.	.	PUNCT
app01-6687	84	1	they	they	PRON
app01-6687	84	2	have	have	VERB
app01-6687	84	3	to	to	PART
app01-6687	84	4	be	be	AUX
app01-6687	84	5	related	relate	VERB
app01-6687	84	6	to	to	ADP
app01-6687	84	7	the	the	DET
app01-6687	84	8	influence	influence	NOUN
app01-6687	84	9	of	of	ADP
app01-6687	84	10	the	the	DET
app01-6687	84	11	substrate	substrate	NOUN
app01-6687	84	12	type	type	NOUN
app01-6687	84	13	on	on	ADP
app01-6687	84	14	the	the	DET
app01-6687	84	15	measurement	measurement	NOUN
app01-6687	84	16	method	method	NOUN
app01-6687	84	17	and/or	and/or	CCONJ
app01-6687	84	18	data	datum	NOUN
app01-6687	84	19	evaluation	evaluation	NOUN
app01-6687	84	20	rather	rather	ADV
app01-6687	84	21	than	than	ADP
app01-6687	84	22	on	on	ADP
app01-6687	84	23	true	true	ADJ
app01-6687	84	24	hardness	hardness	NOUN
app01-6687	84	25	and	and	CCONJ
app01-6687	84	26	indentation	indentation	NOUN
app01-6687	84	27	modulus	modulus	ADJ
app01-6687	84	28	changes	change	NOUN
app01-6687	84	29	.	.	PUNCT
app01-6687	85	1	it	it	PRON
app01-6687	85	2	is	be	AUX
app01-6687	85	3	a	a	DET
app01-6687	85	4	clear	clear	ADJ
app01-6687	85	5	indication	indication	NOUN
app01-6687	85	6	that	that	SCONJ
app01-6687	85	7	the	the	DET
app01-6687	85	8	substrate	substrate	NOUN
app01-6687	85	9	type	type	NOUN
app01-6687	85	10	definitely	definitely	ADV
app01-6687	85	11	affects	affect	VERB
app01-6687	85	12	the	the	DET
app01-6687	85	13	nanoindentation	nanoindentation	NOUN
app01-6687	85	14	measurements	measurement	NOUN
app01-6687	85	15	.	.	PUNCT
app01-6687	86	1	the	the	DET
app01-6687	86	2	question	question	NOUN
app01-6687	86	3	is	be	AUX
app01-6687	86	4	what	what	PRON
app01-6687	86	5	is	be	AUX
app01-6687	86	6	the	the	DET
app01-6687	86	7	main	main	ADJ
app01-6687	86	8	parameter	parameter	NOUN
app01-6687	86	9	controlling	control	VERB
app01-6687	86	10	the	the	DET
app01-6687	86	11	influence	influence	NOUN
app01-6687	86	12	of	of	ADP
app01-6687	86	13	the	the	DET
app01-6687	86	14	substrate	substrate	NOUN
app01-6687	86	15	.	.	PUNCT
app01-6687	87	1	young	young	ADJ
app01-6687	87	2	’s	’s	PART
app01-6687	87	3	moduli	modulus	NOUN
app01-6687	87	4	of	of	ADP
app01-6687	87	5	steel	steel	NOUN
app01-6687	87	6	and	and	CCONJ
app01-6687	87	7	si	si	NOUN
app01-6687	87	8	substrates	substrate	NOUN
app01-6687	87	9	are	be	AUX
app01-6687	87	10	rather	rather	ADV
app01-6687	87	11	similar	similar	ADJ
app01-6687	87	12	(	(	PUNCT
app01-6687	87	13	210	210	NUM
app01-6687	87	14	gpa	gpa	NOUN
app01-6687	87	15	vs.	vs.	ADP
app01-6687	87	16	193	193	NUM
app01-6687	87	17	gpa	gpa	NOUN
app01-6687	87	18	)	)	PUNCT
app01-6687	87	19	while	while	SCONJ
app01-6687	87	20	that	that	PRON
app01-6687	87	21	of	of	ADP
app01-6687	87	22	al	al	PROPN
app01-6687	87	23	alloy	alloy	NOUN
app01-6687	87	24	is	be	AUX
app01-6687	87	25	considerably	considerably	ADV
app01-6687	87	26	lower	low	ADJ
app01-6687	87	27	(	(	PUNCT
app01-6687	87	28	∼	∼	NOUN
app01-6687	87	29	73	73	NUM
app01-6687	87	30	gpa	gpa	NOUN
app01-6687	87	31	)	)	PUNCT
app01-6687	87	32	and	and	CCONJ
app01-6687	87	33	this	this	DET
app01-6687	87	34	difference	difference	NOUN
app01-6687	87	35	is	be	AUX
app01-6687	87	36	reflected	reflect	VERB
app01-6687	87	37	in	in	ADP
app01-6687	87	38	the	the	DET
app01-6687	87	39	difference	difference	NOUN
app01-6687	87	40	obtained	obtain	VERB
app01-6687	87	41	fig	fig	NOUN
app01-6687	87	42	.	.	PUNCT
app01-6687	88	1	3	3	X
app01-6687	88	2	.	.	PUNCT
app01-6687	88	3	however	however	ADV
app01-6687	88	4	,	,	PUNCT
app01-6687	88	5	the	the	DET
app01-6687	88	6	yield	yield	NOUN
app01-6687	88	7	strength	strength	NOUN
app01-6687	88	8	and	and	CCONJ
app01-6687	88	9	hardness	hardness	NOUN
app01-6687	88	10	of	of	ADP
app01-6687	88	11	substrate	substrate	NOUN
app01-6687	88	12	materials	material	NOUN
app01-6687	88	13	should	should	AUX
app01-6687	88	14	play	play	VERB
app01-6687	88	15	a	a	DET
app01-6687	88	16	role	role	NOUN
app01-6687	88	17	because	because	SCONJ
app01-6687	88	18	they	they	PRON
app01-6687	88	19	control	control	VERB
app01-6687	88	20	plasticity	plasticity	NOUN
app01-6687	88	21	of	of	ADP
app01-6687	88	22	the	the	DET
app01-6687	88	23	substrate	substrate	NOUN
app01-6687	88	24	4	4	NUM
app01-6687	88	25	.	.	PUNCT
app01-6687	88	26	conclusions	conclusion	NOUN
app01-6687	88	27	the	the	DET
app01-6687	88	28	investigations	investigation	NOUN
app01-6687	88	29	of	of	ADP
app01-6687	88	30	the	the	DET
app01-6687	88	31	influence	influence	NOUN
app01-6687	88	32	of	of	ADP
app01-6687	88	33	the	the	DET
app01-6687	88	34	substrate	substrate	NOUN
app01-6687	88	35	type	type	NOUN
app01-6687	88	36	on	on	ADP
app01-6687	88	37	the	the	DET
app01-6687	88	38	measurements	measurement	NOUN
app01-6687	88	39	of	of	ADP
app01-6687	88	40	hardness	hardness	NOUN
app01-6687	88	41	and	and	CCONJ
app01-6687	88	42	indentation	indentation	NOUN
app01-6687	88	43	modulus	modulus	NOUN
app01-6687	88	44	in	in	ADP
app01-6687	88	45	hipims	hipims	PROPN
app01-6687	88	46	w	w	PROPN
app01-6687	88	47	-	-	PUNCT
app01-6687	88	48	c	c	NOUN
app01-6687	88	49	and	and	CCONJ
app01-6687	88	50	w	w	NOUN
app01-6687	88	51	-	-	PUNCT
app01-6687	88	52	c	c	NOUN
app01-6687	88	53	:	:	PUNCT
app01-6687	88	54	h	h	NOUN
app01-6687	88	55	coatings	coating	NOUN
app01-6687	88	56	with	with	ADP
app01-6687	88	57	different	different	ADJ
app01-6687	88	58	acetylene	acetylene	NOUN
app01-6687	88	59	and	and	CCONJ
app01-6687	88	60	hydrogen	hydrogen	NOUN
app01-6687	88	61	additions	addition	NOUN
app01-6687	88	62	on	on	ADP
app01-6687	88	63	si	si	ADJ
app01-6687	88	64	wafer	wafer	NOUN
app01-6687	88	65	,	,	PUNCT
app01-6687	88	66	100cr6	100cr6	NUM
app01-6687	88	67	steel	steel	NOUN
app01-6687	88	68	and	and	CCONJ
app01-6687	88	69	al	al	PROPN
app01-6687	88	70	2024	2024	NUM
app01-6687	88	71	aluminum	aluminum	NOUN
app01-6687	88	72	alloy	alloy	NOUN
app01-6687	88	73	substrates	substrate	NOUN
app01-6687	88	74	revealed	reveal	VERB
app01-6687	88	75	:	:	PUNCT
app01-6687	88	76	•	•	NUM
app01-6687	88	77	significant	significant	ADJ
app01-6687	88	78	influence	influence	NOUN
app01-6687	88	79	of	of	ADP
app01-6687	88	80	substrate	substrate	NOUN
app01-6687	88	81	type	type	NOUN
app01-6687	88	82	on	on	ADP
app01-6687	88	83	hit	hit	NOUN
app01-6687	88	84	and	and	CCONJ
app01-6687	88	85	eit	eit	NOUN
app01-6687	88	86	in	in	ADP
app01-6687	88	87	pvd	pvd	PROPN
app01-6687	88	88	w	w	PROPN
app01-6687	88	89	-	-	PUNCT
app01-6687	88	90	c	c	NOUN
app01-6687	88	91	coatings	coating	NOUN
app01-6687	88	92	deposited	deposit	VERB
app01-6687	88	93	without	without	ADP
app01-6687	88	94	the	the	DET
app01-6687	88	95	0	0	NUM
app01-6687	88	96	2	2	NUM
app01-6687	88	97	4	4	NUM
app01-6687	88	98	6	6	NUM
app01-6687	88	99	8	8	NUM
app01-6687	88	100	0.075	0.075	NUM
app01-6687	88	101	0.100	0.100	NUM
app01-6687	88	102	0.125	0.125	NUM
app01-6687	88	103	0.150	0.150	NUM
app01-6687	88	104	hipims	hipim	NOUN
app01-6687	88	105	w	w	NOUN
app01-6687	88	106	-	-	PUNCT
app01-6687	88	107	c	c	NOUN
app01-6687	88	108	:	:	PUNCT
app01-6687	88	109	h	h	NOUN
app01-6687	88	110	coatings	coating	NOUN
app01-6687	88	111	5,10,20	5,10,20	NUM
app01-6687	88	112	h	h	NOUN
app01-6687	88	113	2	2	NUM
app01-6687	88	114	5,10,20	5,10,20	NUM
app01-6687	88	115	h	h	NOUN
app01-6687	88	116	2	2	NUM
app01-6687	89	1	h	h	NOUN
app01-6687	90	1	i	i	PRON
app01-6687	90	2	t	t	INTJ
app01-6687	90	3	/e	/e	PUNCT
app01-6687	91	1	it	it	PRON
app01-6687	91	2	ra	ra	INTJ
app01-6687	92	1	tio	tio	INTJ
app01-6687	92	2	x	x	PROPN
app01-6687	92	3	c	c	NOUN
app01-6687	92	4	2	2	NUM
app01-6687	92	5	h	h	NOUN
app01-6687	92	6	2	2	NUM
app01-6687	92	7	(	(	PUNCT
app01-6687	92	8	+	+	NUM
app01-6687	92	9	y	y	PROPN
app01-6687	92	10	h	h	NOUN
app01-6687	92	11	2	2	NUM
app01-6687	92	12	)	)	PUNCT
app01-6687	92	13	flow	flow	NOUN
app01-6687	92	14	,	,	PUNCT
app01-6687	92	15	sccm	sccm	NOUN
app01-6687	92	16	al	al	PROPN
app01-6687	92	17	substrate	substrate	NOUN
app01-6687	92	18	si	si	NOUN
app01-6687	92	19	substrate	substrate	NOUN
app01-6687	92	20	fe	fe	NOUN
app01-6687	92	21	substrate	substrate	NOUN
app01-6687	92	22	5,10,20	5,10,20	NUM
app01-6687	92	23	h2	h2	NOUN
app01-6687	92	24	al	al	PROPN
app01-6687	92	25	2024	2024	NUM
app01-6687	92	26	substrate	substrate	NOUN
app01-6687	92	27	si	si	NOUN
app01-6687	92	28	substrate	substrate	NOUN
app01-6687	92	29	100cr6	100cr6	NUM
app01-6687	92	30	substrate	substrate	NOUN
app01-6687	92	31	figure	figure	NOUN
app01-6687	92	32	3	3	NUM
app01-6687	92	33	.	.	PUNCT
app01-6687	93	1	the	the	DET
app01-6687	93	2	dependence	dependence	NOUN
app01-6687	93	3	of	of	ADP
app01-6687	93	4	hit	hit	NOUN
app01-6687	93	5	/eit	/eit	PUNCT
app01-6687	93	6	ratio	ratio	NOUN
app01-6687	93	7	in	in	ADP
app01-6687	93	8	hipims	hipims	PROPN
app01-6687	93	9	w	w	PROPN
app01-6687	93	10	-	-	PUNCT
app01-6687	93	11	c	c	NOUN
app01-6687	93	12	:	:	PUNCT
app01-6687	93	13	h	h	NOUN
app01-6687	93	14	coatings	coating	NOUN
app01-6687	93	15	on	on	ADP
app01-6687	93	16	the	the	DET
app01-6687	93	17	substrate	substrate	NOUN
app01-6687	93	18	type	type	NOUN
app01-6687	93	19	at	at	ADP
app01-6687	93	20	different	different	ADJ
app01-6687	93	21	acetylene	acetylene	NOUN
app01-6687	93	22	(	(	PUNCT
app01-6687	93	23	and	and	CCONJ
app01-6687	93	24	hydrogen	hydrogen	NOUN
app01-6687	93	25	)	)	PUNCT
app01-6687	93	26	additions	addition	NOUN
app01-6687	93	27	.	.	PUNCT
app01-6687	94	1	note	note	VERB
app01-6687	94	2	that	that	SCONJ
app01-6687	94	3	the	the	DET
app01-6687	94	4	data	data	NOUN
app01-6687	94	5	-	-	PUNCT
app01-6687	94	6	points	point	NOUN
app01-6687	94	7	corresponding	correspond	VERB
app01-6687	94	8	to	to	ADP
app01-6687	94	9	5	5	NUM
app01-6687	94	10	,	,	PUNCT
app01-6687	94	11	10	10	NUM
app01-6687	94	12	and	and	CCONJ
app01-6687	94	13	20	20	NUM
app01-6687	94	14	sccm	sccm	NOUN
app01-6687	94	15	h2	h2	NOUN
app01-6687	94	16	additions	addition	NOUN
app01-6687	94	17	to	to	ADP
app01-6687	94	18	the	the	DET
app01-6687	94	19	corresponding	correspond	VERB
app01-6687	94	20	acetylene	acetylene	NOUN
app01-6687	94	21	flows	flow	NOUN
app01-6687	94	22	were	be	AUX
app01-6687	94	23	intentionally	intentionally	ADV
app01-6687	94	24	shifted	shift	VERB
app01-6687	94	25	to	to	PART
app01-6687	94	26	emphasize	emphasize	VERB
app01-6687	94	27	the	the	DET
app01-6687	94	28	role	role	NOUN
app01-6687	94	29	of	of	ADP
app01-6687	94	30	hydrogen	hydrogen	NOUN
app01-6687	94	31	additions	addition	NOUN
app01-6687	94	32	.	.	PUNCT
app01-6687	95	1	additions	addition	NOUN
app01-6687	95	2	of	of	ADP
app01-6687	95	3	acetylene	acetylene	NOUN
app01-6687	95	4	.	.	PUNCT
app01-6687	96	1	however	however	ADV
app01-6687	96	2	,	,	PUNCT
app01-6687	96	3	these	these	DET
app01-6687	96	4	differences	difference	NOUN
app01-6687	96	5	may	may	AUX
app01-6687	96	6	overlap	overlap	VERB
app01-6687	96	7	with	with	ADP
app01-6687	96	8	the	the	DET
app01-6687	96	9	influence	influence	NOUN
app01-6687	96	10	of	of	ADP
app01-6687	96	11	substrates	substrate	NOUN
app01-6687	96	12	on	on	ADP
app01-6687	96	13	the	the	DET
app01-6687	96	14	coating	coating	NOUN
app01-6687	96	15	structure	structure	NOUN
app01-6687	96	16	.	.	PUNCT
app01-6687	97	1	•	•	ADP
app01-6687	97	2	an	an	DET
app01-6687	97	3	enhanced	enhanced	ADJ
app01-6687	97	4	scatter	scatter	NOUN
app01-6687	97	5	of	of	ADP
app01-6687	97	6	the	the	DET
app01-6687	97	7	measured	measure	VERB
app01-6687	97	8	properties	property	NOUN
app01-6687	97	9	in	in	ADP
app01-6687	97	10	hybrid	hybrid	ADJ
app01-6687	97	11	pvd	pvd	PROPN
app01-6687	97	12	-	-	PUNCT
app01-6687	97	13	pecvd	pecvd	NOUN
app01-6687	97	14	w	w	PROPN
app01-6687	97	15	-	-	PUNCT
app01-6687	97	16	c	c	NOUN
app01-6687	97	17	:	:	PUNCT
app01-6687	97	18	h	h	NOUN
app01-6687	97	19	coatings	coating	NOUN
app01-6687	97	20	with	with	ADP
app01-6687	97	21	the	the	DET
app01-6687	97	22	additions	addition	NOUN
app01-6687	97	23	of	of	ADP
app01-6687	97	24	acetylene	acetylene	NOUN
app01-6687	97	25	on	on	ADP
app01-6687	97	26	the	the	DET
app01-6687	97	27	studied	study	VERB
app01-6687	97	28	substrates	substrate	NOUN
app01-6687	97	29	.	.	PUNCT
app01-6687	98	1	the	the	DET
app01-6687	98	2	differences	difference	NOUN
app01-6687	98	3	between	between	ADP
app01-6687	98	4	the	the	DET
app01-6687	98	5	substrates	substrate	NOUN
app01-6687	98	6	were	be	AUX
app01-6687	98	7	within	within	ADP
app01-6687	98	8	the	the	DET
app01-6687	98	9	scatter	scatter	NOUN
app01-6687	98	10	of	of	ADP
app01-6687	98	11	measurement	measurement	NOUN
app01-6687	98	12	.	.	PUNCT
app01-6687	99	1	•	•	NUM
app01-6687	99	2	when	when	SCONJ
app01-6687	99	3	the	the	DET
app01-6687	99	4	effects	effect	NOUN
app01-6687	99	5	of	of	ADP
app01-6687	99	6	substrate	substrate	NOUN
app01-6687	99	7	type	type	NOUN
app01-6687	99	8	on	on	ADP
app01-6687	99	9	hardness	hardness	NOUN
app01-6687	99	10	and	and	CCONJ
app01-6687	99	11	indentation	indentation	NOUN
app01-6687	99	12	modulus	modulus	NOUN
app01-6687	99	13	were	be	AUX
app01-6687	99	14	combined	combine	VERB
app01-6687	99	15	in	in	ADP
app01-6687	99	16	hit	hit	NOUN
app01-6687	99	17	/	/	SYM
app01-6687	99	18	eit	eit	NOUN
app01-6687	99	19	ratio	ratio	NOUN
app01-6687	99	20	,	,	PUNCT
app01-6687	99	21	significant	significant	ADJ
app01-6687	99	22	shift	shift	NOUN
app01-6687	99	23	between	between	ADP
app01-6687	99	24	the	the	DET
app01-6687	99	25	dependencies	dependency	NOUN
app01-6687	99	26	obtained	obtain	VERB
app01-6687	99	27	on	on	ADP
app01-6687	99	28	al	al	PROPN
app01-6687	99	29	alloy	alloy	NOUN
app01-6687	99	30	vs.	vs.	ADP
app01-6687	99	31	steel	steel	NOUN
app01-6687	99	32	and	and	CCONJ
app01-6687	99	33	si	si	NOUN
app01-6687	99	34	wafer	wafer	NOUN
app01-6687	99	35	substrates	substrate	NOUN
app01-6687	99	36	was	be	AUX
app01-6687	99	37	obtained	obtain	VERB
app01-6687	99	38	.	.	PUNCT
app01-6687	100	1	thus	thus	ADV
app01-6687	100	2	,	,	PUNCT
app01-6687	100	3	the	the	DET
app01-6687	100	4	effect	effect	NOUN
app01-6687	100	5	of	of	ADP
app01-6687	100	6	substrate	substrate	NOUN
app01-6687	100	7	type	type	NOUN
app01-6687	100	8	on	on	ADP
app01-6687	100	9	the	the	DET
app01-6687	100	10	measurement	measurement	NOUN
app01-6687	100	11	/	/	SYM
app01-6687	100	12	evaluation	evaluation	NOUN
app01-6687	100	13	was	be	AUX
app01-6687	100	14	confirmed	confirm	VERB
app01-6687	100	15	.	.	PUNCT
app01-6687	101	1	•	•	NUM
app01-6687	101	2	the	the	DET
app01-6687	101	3	effect	effect	NOUN
app01-6687	101	4	of	of	ADP
app01-6687	101	5	substrate	substrate	NOUN
app01-6687	101	6	properties	property	NOUN
app01-6687	101	7	on	on	ADP
app01-6687	101	8	nanoindentation	nanoindentation	NOUN
app01-6687	101	9	measurements	measurement	NOUN
app01-6687	101	10	can	can	AUX
app01-6687	101	11	not	not	PART
app01-6687	101	12	be	be	AUX
app01-6687	101	13	related	relate	VERB
app01-6687	101	14	only	only	ADV
app01-6687	101	15	to	to	ADP
app01-6687	101	16	the	the	DET
app01-6687	101	17	difference	difference	NOUN
app01-6687	101	18	in	in	ADP
app01-6687	101	19	young	young	ADJ
app01-6687	101	20	’s	’s	PART
app01-6687	101	21	moduli	moduli	NOUN
app01-6687	101	22	of	of	ADP
app01-6687	101	23	the	the	DET
app01-6687	101	24	substrates	substrate	NOUN
app01-6687	101	25	and	and	CCONJ
app01-6687	101	26	further	further	ADJ
app01-6687	101	27	investigations	investigation	NOUN
app01-6687	101	28	are	be	AUX
app01-6687	101	29	required	require	VERB
app01-6687	101	30	to	to	PART
app01-6687	101	31	find	find	VERB
app01-6687	101	32	the	the	DET
app01-6687	101	33	way	way	NOUN
app01-6687	101	34	to	to	PART
app01-6687	101	35	eliminate	eliminate	VERB
app01-6687	101	36	this	this	DET
app01-6687	101	37	influence	influence	NOUN
app01-6687	101	38	.	.	PUNCT
app01-6687	102	1	the	the	DET
app01-6687	102	2	above	above	ADJ
app01-6687	102	3	conclusions	conclusion	NOUN
app01-6687	102	4	imply	imply	VERB
app01-6687	102	5	that	that	SCONJ
app01-6687	102	6	the	the	DET
app01-6687	102	7	reliable	reliable	ADJ
app01-6687	102	8	evaluation	evaluation	NOUN
app01-6687	102	9	of	of	ADP
app01-6687	102	10	the	the	DET
app01-6687	102	11	wear	wear	NOUN
app01-6687	102	12	resistance	resistance	NOUN
app01-6687	102	13	and	and	CCONJ
app01-6687	102	14	fracture	fracture	ADJ
app01-6687	102	15	toughness	toughness	NOUN
app01-6687	102	16	of	of	ADP
app01-6687	102	17	thin	thin	ADJ
app01-6687	102	18	coatings	coating	NOUN
app01-6687	102	19	based	base	VERB
app01-6687	102	20	on	on	ADP
app01-6687	102	21	hit	hit	NOUN
app01-6687	102	22	/	/	SYM
app01-6687	102	23	eit	eit	PROPN
app01-6687	102	24	ratio	ratio	NOUN
app01-6687	102	25	requires	require	VERB
app01-6687	102	26	the	the	DET
app01-6687	102	27	elimination	elimination	NOUN
app01-6687	102	28	of	of	ADP
app01-6687	102	29	the	the	DET
app01-6687	102	30	influence	influence	NOUN
app01-6687	102	31	of	of	ADP
app01-6687	102	32	the	the	DET
app01-6687	102	33	substrate	substrate	NOUN
app01-6687	102	34	type	type	NOUN
app01-6687	102	35	on	on	ADP
app01-6687	102	36	hit	hit	NOUN
app01-6687	102	37	/	/	SYM
app01-6687	102	38	eit	eit	NOUN
app01-6687	102	39	ratio	ratio	NOUN
app01-6687	102	40	.	.	PUNCT
app01-6687	103	1	acknowledgements	acknowledgement	NOUN
app01-6687	103	2	the	the	DET
app01-6687	103	3	support	support	NOUN
app01-6687	103	4	provided	provide	VERB
app01-6687	103	5	by	by	ADP
app01-6687	103	6	the	the	DET
app01-6687	103	7	projects	project	NOUN
app01-6687	103	8	apvv-17	apvv-17	NOUN
app01-6687	103	9	-	-	NOUN
app01-6687	103	10	0320	0320	NUM
app01-6687	103	11	,	,	PUNCT
app01-6687	103	12	apvv	apvv	NOUN
app01-6687	103	13	17	17	NUM
app01-6687	103	14	-	-	SYM
app01-6687	103	15	0059	0059	NUM
app01-6687	103	16	,	,	PUNCT
app01-6687	103	17	apvv-17	apvv-17	NOUN
app01-6687	103	18	-	-	NOUN
app01-6687	103	19	0049	0049	NUM
app01-6687	103	20	and	and	CCONJ
app01-6687	103	21	vega	vega	PROPN
app01-6687	103	22	2/0017/19	2/0017/19	PROPN
app01-6687	103	23	is	be	AUX
app01-6687	103	24	acknowledged	acknowledge	VERB
app01-6687	103	25	.	.	PUNCT
app01-6687	104	1	the	the	DET
app01-6687	104	2	equipment	equipment	NOUN
app01-6687	104	3	used	use	VERB
app01-6687	104	4	in	in	ADP
app01-6687	104	5	the	the	DET
app01-6687	104	6	work	work	NOUN
app01-6687	104	7	was	be	AUX
app01-6687	104	8	acquired	acquire	VERB
app01-6687	104	9	from	from	ADP
app01-6687	104	10	the	the	DET
app01-6687	104	11	projects	project	NOUN
app01-6687	104	12	“	"	PUNCT
app01-6687	104	13	research	research	NOUN
app01-6687	104	14	centre	centre	NOUN
app01-6687	104	15	of	of	ADP
app01-6687	104	16	advanced	advanced	ADJ
app01-6687	104	17	materials	material	NOUN
app01-6687	104	18	and	and	CCONJ
app01-6687	104	19	technologies	technology	NOUN
app01-6687	104	20	for	for	ADP
app01-6687	104	21	recent	recent	ADJ
app01-6687	104	22	and	and	CCONJ
app01-6687	104	23	future	future	ADJ
app01-6687	104	24	applications	application	NOUN
app01-6687	104	25	”	"	PUNCT
app01-6687	104	26	promatech	promatech	NOUN
app01-6687	104	27	,	,	PUNCT
app01-6687	104	28	itms	itms	PROPN
app01-6687	104	29	:	:	PUNCT
app01-6687	104	30	26220220186	26220220186	NUM
app01-6687	104	31	.	.	PUNCT
app01-6687	105	1	65	65	NUM
app01-6687	105	2	františek	františek	NOUN
app01-6687	105	3	lofaj	lofaj	NOUN
app01-6687	105	4	,	,	PUNCT
app01-6687	105	5	margita	margita	PROPN
app01-6687	105	6	kabátová	kabátová	PROPN
app01-6687	105	7	acta	acta	PROPN
app01-6687	105	8	polytechnica	polytechnica	PROPN
app01-6687	105	9	references	reference	NOUN
app01-6687	105	10	[	[	X
app01-6687	105	11	1	1	NUM
app01-6687	105	12	]	]	PUNCT
app01-6687	105	13	a.	a.	NOUN
app01-6687	105	14	leyland	leyland	PROPN
app01-6687	105	15	,	,	PUNCT
app01-6687	105	16	a.	a.	NOUN
app01-6687	105	17	matthews	matthews	PROPN
app01-6687	105	18	.	.	PUNCT
app01-6687	106	1	on	on	ADP
app01-6687	106	2	the	the	DET
app01-6687	106	3	significance	significance	NOUN
app01-6687	106	4	of	of	ADP
app01-6687	106	5	the	the	DET
app01-6687	106	6	h	h	NOUN
app01-6687	106	7	/	/	SYM
app01-6687	106	8	e	e	NOUN
app01-6687	106	9	ratio	ratio	NOUN
app01-6687	106	10	in	in	ADP
app01-6687	106	11	wear	wear	NOUN
app01-6687	106	12	control	control	NOUN
app01-6687	106	13	:	:	PUNCT
app01-6687	106	14	a	a	DET
app01-6687	106	15	nanocomposite	nanocomposite	NOUN
app01-6687	106	16	coating	coat	VERB
app01-6687	106	17	approach	approach	NOUN
app01-6687	106	18	to	to	ADP
app01-6687	106	19	optimised	optimise	VERB
app01-6687	106	20	tribological	tribological	ADJ
app01-6687	106	21	behaviour	behaviour	NOUN
app01-6687	106	22	.	.	PUNCT
app01-6687	107	1	wear	wear	VERB
app01-6687	107	2	246(1	246(1	NUM
app01-6687	107	3	-	-	SYM
app01-6687	107	4	2):1	2):1	NUM
app01-6687	107	5	–	–	PUNCT
app01-6687	107	6	11	11	NUM
app01-6687	107	7	,	,	PUNCT
app01-6687	107	8	2000	2000	NUM
app01-6687	107	9	.	.	PUNCT
app01-6687	108	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	108	2	/	/	SYM
app01-6687	108	3	s0043	s0043	PROPN
app01-6687	108	4	-	-	PUNCT
app01-6687	108	5	1648(00)00488	1648(00)00488	NUM
app01-6687	108	6	-	-	PUNCT
app01-6687	108	7	9	9	NUM
app01-6687	108	8	.	.	PUNCT
app01-6687	109	1	[	[	X
app01-6687	109	2	2	2	X
app01-6687	109	3	]	]	PUNCT
app01-6687	109	4	j.	j.	PROPN
app01-6687	109	5	musil	musil	PROPN
app01-6687	109	6	.	.	PUNCT
app01-6687	110	1	hard	hard	ADJ
app01-6687	110	2	and	and	CCONJ
app01-6687	110	3	superhard	superhard	ADJ
app01-6687	110	4	nanocomposite	nanocomposite	NOUN
app01-6687	110	5	coatings	coating	NOUN
app01-6687	110	6	.	.	PUNCT
app01-6687	111	1	surface	surface	NOUN
app01-6687	111	2	and	and	CCONJ
app01-6687	111	3	coatings	coating	NOUN
app01-6687	111	4	technology	technology	NOUN
app01-6687	111	5	125(1	125(1	PROPN
app01-6687	111	6	-	-	SYM
app01-6687	111	7	3):322–330	3):322–330	NUM
app01-6687	111	8	,	,	PUNCT
app01-6687	111	9	2000	2000	NUM
app01-6687	111	10	.	.	PUNCT
app01-6687	112	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	112	2	/	/	SYM
app01-6687	112	3	s0257	s0257	PROPN
app01-6687	112	4	-	-	PUNCT
app01-6687	112	5	8972(99)00586	8972(99)00586	NUM
app01-6687	112	6	-	-	SYM
app01-6687	112	7	1	1	NUM
app01-6687	112	8	.	.	PUNCT
app01-6687	113	1	[	[	X
app01-6687	113	2	3	3	X
app01-6687	113	3	]	]	PUNCT
app01-6687	113	4	j.	j.	PROPN
app01-6687	113	5	musil	musil	PROPN
app01-6687	113	6	.	.	PUNCT
app01-6687	114	1	hard	hard	ADJ
app01-6687	114	2	nanocomposite	nanocomposite	ADJ
app01-6687	114	3	coatings	coating	NOUN
app01-6687	114	4	:	:	PUNCT
app01-6687	114	5	thermal	thermal	ADJ
app01-6687	114	6	stability	stability	NOUN
app01-6687	114	7	,	,	PUNCT
app01-6687	114	8	oxidation	oxidation	NOUN
app01-6687	114	9	resistance	resistance	NOUN
app01-6687	114	10	and	and	CCONJ
app01-6687	114	11	toughness	toughness	NOUN
app01-6687	114	12	.	.	PUNCT
app01-6687	115	1	surface	surface	NOUN
app01-6687	115	2	and	and	CCONJ
app01-6687	115	3	coatings	coating	NOUN
app01-6687	115	4	technology	technology	NOUN
app01-6687	115	5	207:50–65	207:50–65	NUM
app01-6687	115	6	,	,	PUNCT
app01-6687	115	7	2012	2012	NUM
app01-6687	115	8	.	.	PUNCT
app01-6687	116	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	116	2	/	/	SYM
app01-6687	116	3	j.surfcoat.2012.05.073	j.surfcoat.2012.05.073	PROPN
app01-6687	116	4	.	.	PUNCT
app01-6687	117	1	[	[	X
app01-6687	117	2	4	4	X
app01-6687	117	3	]	]	PUNCT
app01-6687	117	4	j.	j.	PROPN
app01-6687	117	5	musil	musil	PROPN
app01-6687	117	6	,	,	PUNCT
app01-6687	117	7	m.	m.	NOUN
app01-6687	117	8	jirout	jirout	NOUN
app01-6687	117	9	.	.	PUNCT
app01-6687	118	1	toughness	toughness	NOUN
app01-6687	118	2	of	of	ADP
app01-6687	118	3	hard	hard	ADJ
app01-6687	118	4	nanostructured	nanostructure	VERB
app01-6687	118	5	ceramic	ceramic	ADJ
app01-6687	118	6	thin	thin	ADJ
app01-6687	118	7	films	film	NOUN
app01-6687	118	8	.	.	PUNCT
app01-6687	119	1	surface	surface	NOUN
app01-6687	119	2	and	and	CCONJ
app01-6687	119	3	coatings	coating	NOUN
app01-6687	119	4	technology	technology	NOUN
app01-6687	119	5	201(9	201(9	PROPN
app01-6687	119	6	-	-	PROPN
app01-6687	119	7	11):5148–5152	11):5148–5152	PROPN
app01-6687	119	8	,	,	PUNCT
app01-6687	119	9	2007	2007	NUM
app01-6687	119	10	.	.	PUNCT
app01-6687	120	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	120	2	/	/	SYM
app01-6687	120	3	j.surfcoat.2006.07.020	j.surfcoat.2006.07.020	PROPN
app01-6687	120	4	.	.	PUNCT
app01-6687	121	1	[	[	X
app01-6687	121	2	5	5	X
app01-6687	121	3	]	]	X
app01-6687	121	4	b.	b.	PROPN
app01-6687	121	5	jönsson	jönsson	PROPN
app01-6687	121	6	,	,	PUNCT
app01-6687	121	7	s.	s.	PROPN
app01-6687	121	8	hogmark	hogmark	PROPN
app01-6687	121	9	.	.	PUNCT
app01-6687	122	1	hardness	hardness	ADJ
app01-6687	122	2	measurements	measurement	NOUN
app01-6687	122	3	of	of	ADP
app01-6687	122	4	thin	thin	ADJ
app01-6687	122	5	films	film	NOUN
app01-6687	122	6	.	.	PUNCT
app01-6687	123	1	thin	thin	ADJ
app01-6687	123	2	solid	solid	ADJ
app01-6687	123	3	films	film	NOUN
app01-6687	123	4	114(3):257–269	114(3):257–269	NUM
app01-6687	123	5	,	,	PUNCT
app01-6687	123	6	1984	1984	NUM
app01-6687	123	7	.	.	PUNCT
app01-6687	124	1	doi:10.1016/0040	doi:10.1016/0040	NOUN
app01-6687	124	2	-	-	PUNCT
app01-6687	124	3	6090(84)90123	6090(84)90123	NUM
app01-6687	124	4	-	-	PUNCT
app01-6687	124	5	8	8	NUM
app01-6687	124	6	.	.	PUNCT
app01-6687	125	1	[	[	X
app01-6687	125	2	6	6	NUM
app01-6687	125	3	]	]	PUNCT
app01-6687	125	4	a.	a.	NOUN
app01-6687	125	5	korsunsky	korsunsky	PROPN
app01-6687	125	6	,	,	PUNCT
app01-6687	125	7	m.	m.	PROPN
app01-6687	125	8	mcgurk	mcgurk	PROPN
app01-6687	125	9	,	,	PUNCT
app01-6687	125	10	s.	s.	PROPN
app01-6687	125	11	bull	bull	PROPN
app01-6687	125	12	,	,	PUNCT
app01-6687	125	13	t.	t.	NOUN
app01-6687	125	14	page	page	NOUN
app01-6687	125	15	.	.	PUNCT
app01-6687	126	1	on	on	ADP
app01-6687	126	2	the	the	DET
app01-6687	126	3	hardness	hardness	NOUN
app01-6687	126	4	of	of	ADP
app01-6687	126	5	coated	coated	ADJ
app01-6687	126	6	systems	system	NOUN
app01-6687	126	7	.	.	PUNCT
app01-6687	127	1	surface	surface	NOUN
app01-6687	127	2	and	and	CCONJ
app01-6687	127	3	coatings	coating	NOUN
app01-6687	127	4	technology	technology	NOUN
app01-6687	127	5	99(1	99(1	NOUN
app01-6687	127	6	-	-	PUNCT
app01-6687	127	7	2):171–183	2):171–183	NUM
app01-6687	127	8	,	,	PUNCT
app01-6687	127	9	1998	1998	NUM
app01-6687	127	10	.	.	PUNCT
app01-6687	128	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	128	2	/	/	SYM
app01-6687	128	3	s0257	s0257	PROPN
app01-6687	128	4	-	-	PUNCT
app01-6687	128	5	8972(97)00522	8972(97)00522	NUM
app01-6687	128	6	-	-	PUNCT
app01-6687	128	7	7	7	NUM
app01-6687	128	8	.	.	PUNCT
app01-6687	129	1	[	[	X
app01-6687	129	2	7	7	X
app01-6687	129	3	]	]	X
app01-6687	129	4	r.	r.	PROPN
app01-6687	129	5	saha	saha	PROPN
app01-6687	129	6	,	,	PUNCT
app01-6687	129	7	w.	w.	PROPN
app01-6687	129	8	d.	d.	PROPN
app01-6687	129	9	nix	nix	PROPN
app01-6687	129	10	.	.	PUNCT
app01-6687	130	1	effects	effect	NOUN
app01-6687	130	2	of	of	ADP
app01-6687	130	3	the	the	DET
app01-6687	130	4	substrate	substrate	NOUN
app01-6687	130	5	on	on	ADP
app01-6687	130	6	the	the	DET
app01-6687	130	7	determination	determination	NOUN
app01-6687	130	8	of	of	ADP
app01-6687	130	9	thin	thin	ADJ
app01-6687	130	10	film	film	NOUN
app01-6687	130	11	mechanical	mechanical	ADJ
app01-6687	130	12	properties	property	NOUN
app01-6687	130	13	by	by	ADP
app01-6687	130	14	nanoindentation	nanoindentation	NOUN
app01-6687	130	15	.	.	PUNCT
app01-6687	131	1	acta	acta	PROPN
app01-6687	131	2	materialia	materialia	PROPN
app01-6687	131	3	50(1):23–38	50(1):23–38	NUM
app01-6687	131	4	,	,	PUNCT
app01-6687	131	5	2002	2002	NUM
app01-6687	131	6	.	.	PUNCT
app01-6687	132	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	132	2	/	/	SYM
app01-6687	132	3	s1359	s1359	VERB
app01-6687	132	4	-	-	PUNCT
app01-6687	132	5	6454(01)00328	6454(01)00328	NUM
app01-6687	132	6	-	-	PUNCT
app01-6687	132	7	7	7	NUM
app01-6687	132	8	.	.	PUNCT
app01-6687	133	1	[	[	X
app01-6687	133	2	8	8	NUM
app01-6687	133	3	]	]	X
app01-6687	133	4	r.	r.	PROPN
app01-6687	133	5	saha	saha	PROPN
app01-6687	133	6	,	,	PUNCT
app01-6687	133	7	w.	w.	PROPN
app01-6687	133	8	nix	nix	PROPN
app01-6687	133	9	.	.	PUNCT
app01-6687	133	10	soft	soft	ADJ
app01-6687	133	11	films	film	NOUN
app01-6687	133	12	on	on	ADP
app01-6687	133	13	hard	hard	ADJ
app01-6687	133	14	substrates	substrate	NOUN
app01-6687	133	15	—	—	PUNCT
app01-6687	133	16	nanoindentation	nanoindentation	NOUN
app01-6687	133	17	of	of	ADP
app01-6687	133	18	tungsten	tungsten	NOUN
app01-6687	133	19	films	film	NOUN
app01-6687	133	20	on	on	ADP
app01-6687	133	21	sapphire	sapphire	NOUN
app01-6687	133	22	substrates	substrate	NOUN
app01-6687	133	23	.	.	PUNCT
app01-6687	134	1	materials	material	NOUN
app01-6687	134	2	science	science	NOUN
app01-6687	134	3	and	and	CCONJ
app01-6687	134	4	engineering	engineering	NOUN
app01-6687	134	5	:	:	PUNCT
app01-6687	134	6	a	a	DET
app01-6687	134	7	319321:898–901	319321:898–901	NOUN
app01-6687	134	8	,	,	PUNCT
app01-6687	134	9	2001	2001	NUM
app01-6687	134	10	.	.	PUNCT
app01-6687	135	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	135	2	/	/	SYM
app01-6687	135	3	s0921	s0921	PROPN
app01-6687	135	4	-	-	PUNCT
app01-6687	135	5	5093(01)01076	5093(01)01076	NUM
app01-6687	135	6	-	-	PUNCT
app01-6687	135	7	0	0	NUM
app01-6687	135	8	.	.	PUNCT
app01-6687	136	1	[	[	X
app01-6687	136	2	9	9	X
app01-6687	136	3	]	]	PUNCT
app01-6687	136	4	j.	j.	PROPN
app01-6687	136	5	chen	chen	PROPN
app01-6687	136	6	,	,	PUNCT
app01-6687	136	7	s.	s.	PROPN
app01-6687	136	8	bull	bull	PROPN
app01-6687	136	9	.	.	PUNCT
app01-6687	137	1	on	on	ADP
app01-6687	137	2	the	the	DET
app01-6687	137	3	factors	factor	NOUN
app01-6687	137	4	affecting	affect	VERB
app01-6687	137	5	the	the	DET
app01-6687	137	6	critical	critical	ADJ
app01-6687	137	7	indenter	indenter	NOUN
app01-6687	137	8	penetration	penetration	NOUN
app01-6687	137	9	for	for	ADP
app01-6687	137	10	measurement	measurement	NOUN
app01-6687	137	11	of	of	ADP
app01-6687	137	12	coating	coat	VERB
app01-6687	137	13	hardness	hardness	NOUN
app01-6687	137	14	.	.	PUNCT
app01-6687	138	1	vacuum	vacuum	NOUN
app01-6687	138	2	83(6):911–920	83(6):911–920	NUM
app01-6687	138	3	,	,	PUNCT
app01-6687	138	4	2009	2009	NUM
app01-6687	138	5	.	.	PUNCT
app01-6687	139	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	139	2	/	/	SYM
app01-6687	139	3	j.vacuum.2008.11.007	j.vacuum.2008.11.007	NOUN
app01-6687	139	4	.	.	PUNCT
app01-6687	140	1	[	[	X
app01-6687	140	2	10	10	NUM
app01-6687	140	3	]	]	PUNCT
app01-6687	140	4	x.	x.	NOUN
app01-6687	140	5	cai	cai	PROPN
app01-6687	140	6	,	,	PUNCT
app01-6687	140	7	h.	h.	PROPN
app01-6687	140	8	bangert	bangert	PROPN
app01-6687	140	9	.	.	PUNCT
app01-6687	141	1	hardness	hardness	ADJ
app01-6687	141	2	measurements	measurement	NOUN
app01-6687	141	3	of	of	ADP
app01-6687	141	4	thin	thin	ADJ
app01-6687	141	5	films	film	NOUN
app01-6687	141	6	-	-	PUNCT
app01-6687	141	7	determining	determine	VERB
app01-6687	141	8	the	the	DET
app01-6687	141	9	critical	critical	ADJ
app01-6687	141	10	ratio	ratio	NOUN
app01-6687	141	11	of	of	ADP
app01-6687	141	12	depth	depth	NOUN
app01-6687	141	13	to	to	ADP
app01-6687	141	14	thickness	thickness	NOUN
app01-6687	141	15	using	use	VERB
app01-6687	141	16	fem	fem	PROPN
app01-6687	141	17	.	.	PUNCT
app01-6687	142	1	thin	thin	ADJ
app01-6687	142	2	solid	solid	ADJ
app01-6687	142	3	films	film	NOUN
app01-6687	142	4	264(1):59–71	264(1):59–71	NUM
app01-6687	142	5	,	,	PUNCT
app01-6687	142	6	1995	1995	NUM
app01-6687	142	7	.	.	PUNCT
app01-6687	143	1	doi:10.1016/0040	doi:10.1016/0040	NOUN
app01-6687	143	2	-	-	PUNCT
app01-6687	143	3	6090(95)06569	6090(95)06569	NUM
app01-6687	143	4	-	-	PUNCT
app01-6687	143	5	5	5	NUM
app01-6687	143	6	.	.	PUNCT
app01-6687	144	1	[	[	X
app01-6687	144	2	11	11	NUM
app01-6687	144	3	]	]	PUNCT
app01-6687	144	4	x.	x.	NOUN
app01-6687	144	5	li	li	PROPN
app01-6687	144	6	,	,	PUNCT
app01-6687	144	7	b.	b.	PROPN
app01-6687	144	8	bhushan	bhushan	PROPN
app01-6687	144	9	.	.	PUNCT
app01-6687	145	1	a	a	DET
app01-6687	145	2	review	review	NOUN
app01-6687	145	3	of	of	ADP
app01-6687	145	4	nanoindentation	nanoindentation	NOUN
app01-6687	145	5	continuous	continuous	ADJ
app01-6687	145	6	stiffness	stiffness	NOUN
app01-6687	145	7	measurement	measurement	NOUN
app01-6687	145	8	technique	technique	NOUN
app01-6687	145	9	and	and	CCONJ
app01-6687	145	10	its	its	PRON
app01-6687	145	11	applications	application	NOUN
app01-6687	145	12	.	.	PUNCT
app01-6687	146	1	materials	material	NOUN
app01-6687	146	2	characterization	characterization	NOUN
app01-6687	146	3	48(1):11–36	48(1):11–36	NUM
app01-6687	146	4	,	,	PUNCT
app01-6687	146	5	2002	2002	NUM
app01-6687	146	6	.	.	PUNCT
app01-6687	147	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	147	2	/	/	SYM
app01-6687	147	3	s1044	s1044	PROPN
app01-6687	147	4	-	-	PUNCT
app01-6687	147	5	5803(02)00192	5803(02)00192	NUM
app01-6687	147	6	-	-	PUNCT
app01-6687	147	7	4	4	NUM
app01-6687	147	8	.	.	PUNCT
app01-6687	148	1	[	[	X
app01-6687	148	2	12	12	NUM
app01-6687	148	3	]	]	PUNCT
app01-6687	148	4	t.	t.	PROPN
app01-6687	148	5	csanádi	csanádi	PROPN
app01-6687	148	6	,	,	PUNCT
app01-6687	148	7	d.	d.	PROPN
app01-6687	148	8	németh	németh	PROPN
app01-6687	148	9	,	,	PUNCT
app01-6687	148	10	f.	f.	PROPN
app01-6687	148	11	lofaj	lofaj	PROPN
app01-6687	148	12	.	.	PUNCT
app01-6687	149	1	mechanical	mechanical	ADJ
app01-6687	149	2	properties	property	NOUN
app01-6687	149	3	of	of	ADP
app01-6687	149	4	hard	hard	ADJ
app01-6687	149	5	w	w	PROPN
app01-6687	149	6	-	-	PUNCT
app01-6687	149	7	c	c	NOUN
app01-6687	149	8	coating	coating	NOUN
app01-6687	149	9	on	on	ADP
app01-6687	149	10	steel	steel	NOUN
app01-6687	149	11	substrate	substrate	NOUN
app01-6687	149	12	deduced	deduce	VERB
app01-6687	149	13	from	from	ADP
app01-6687	149	14	nanoindentation	nanoindentation	NOUN
app01-6687	149	15	and	and	CCONJ
app01-6687	149	16	finite	finite	ADJ
app01-6687	149	17	element	element	NOUN
app01-6687	149	18	modeling	modeling	NOUN
app01-6687	149	19	.	.	PUNCT
app01-6687	150	1	experimental	experimental	ADJ
app01-6687	150	2	mechanics	mechanic	NOUN
app01-6687	150	3	57(7):1057–1069	57(7):1057–1069	NUM
app01-6687	150	4	,	,	PUNCT
app01-6687	150	5	2016	2016	NUM
app01-6687	150	6	.	.	PUNCT
app01-6687	151	1	doi:10.1007	doi:10.1007	VERB
app01-6687	151	2	/	/	SYM
app01-6687	151	3	s11340	s11340	NOUN
app01-6687	151	4	-	-	PUNCT
app01-6687	151	5	016	016	NUM
app01-6687	151	6	-	-	PUNCT
app01-6687	151	7	0190	0190	NUM
app01-6687	151	8	-	-	PUNCT
app01-6687	151	9	x.	x.	NOUN
app01-6687	152	1	[	[	X
app01-6687	152	2	13	13	NUM
app01-6687	152	3	]	]	PUNCT
app01-6687	152	4	a.	a.	NOUN
app01-6687	152	5	bolshakov	bolshakov	PROPN
app01-6687	152	6	,	,	PUNCT
app01-6687	152	7	g.	g.	PROPN
app01-6687	152	8	m.	m.	PROPN
app01-6687	152	9	pharr	pharr	PROPN
app01-6687	152	10	.	.	PUNCT
app01-6687	152	11	influences	influence	NOUN
app01-6687	152	12	of	of	ADP
app01-6687	152	13	pileup	pileup	NOUN
app01-6687	152	14	on	on	ADP
app01-6687	152	15	the	the	DET
app01-6687	152	16	measurement	measurement	NOUN
app01-6687	152	17	of	of	ADP
app01-6687	152	18	mechanical	mechanical	ADJ
app01-6687	152	19	properties	property	NOUN
app01-6687	152	20	by	by	ADP
app01-6687	152	21	load	load	NOUN
app01-6687	152	22	and	and	CCONJ
app01-6687	152	23	depth	depth	NOUN
app01-6687	152	24	sensing	sense	VERB
app01-6687	152	25	indentation	indentation	NOUN
app01-6687	152	26	techniques	technique	NOUN
app01-6687	152	27	.	.	PUNCT
app01-6687	153	1	journal	journal	NOUN
app01-6687	153	2	of	of	ADP
app01-6687	153	3	materials	material	NOUN
app01-6687	153	4	research	research	NOUN
app01-6687	153	5	13(4):1049–1058	13(4):1049–1058	NUM
app01-6687	153	6	,	,	PUNCT
app01-6687	153	7	1998	1998	NUM
app01-6687	153	8	.	.	PUNCT
app01-6687	154	1	doi:10.1557	doi:10.1557	PROPN
app01-6687	154	2	/	/	SYM
app01-6687	154	3	jmr.1998.0146	jmr.1998.0146	X
app01-6687	154	4	.	.	PUNCT
app01-6687	155	1	[	[	X
app01-6687	155	2	14	14	NUM
app01-6687	155	3	]	]	X
app01-6687	155	4	s.	s.	PROPN
app01-6687	155	5	kataria	kataria	PROPN
app01-6687	155	6	,	,	PUNCT
app01-6687	155	7	s.	s.	PROPN
app01-6687	155	8	goyal	goyal	PROPN
app01-6687	155	9	,	,	PUNCT
app01-6687	155	10	s.	s.	PROPN
app01-6687	155	11	dash	dash	PROPN
app01-6687	155	12	,	,	PUNCT
app01-6687	155	13	et	et	PROPN
app01-6687	155	14	al	al	PROPN
app01-6687	155	15	.	.	PUNCT
app01-6687	155	16	evaluation	evaluation	NOUN
app01-6687	155	17	of	of	ADP
app01-6687	155	18	nano	nano	ADJ
app01-6687	155	19	-	-	PUNCT
app01-6687	155	20	mechanical	mechanical	ADJ
app01-6687	155	21	properties	property	NOUN
app01-6687	155	22	of	of	ADP
app01-6687	155	23	hard	hard	ADJ
app01-6687	155	24	coatings	coating	NOUN
app01-6687	155	25	on	on	ADP
app01-6687	155	26	a	a	DET
app01-6687	155	27	soft	soft	ADJ
app01-6687	155	28	substrate	substrate	NOUN
app01-6687	155	29	.	.	PUNCT
app01-6687	156	1	thin	thin	ADJ
app01-6687	156	2	solid	solid	ADJ
app01-6687	156	3	films	film	NOUN
app01-6687	156	4	522:297–303	522:297–303	NUM
app01-6687	156	5	,	,	PUNCT
app01-6687	156	6	2012	2012	NUM
app01-6687	156	7	.	.	PUNCT
app01-6687	157	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	157	2	/	/	SYM
app01-6687	157	3	j.tsf.2012.09.001	j.tsf.2012.09.001	NOUN
app01-6687	157	4	.	.	PUNCT
app01-6687	158	1	[	[	X
app01-6687	158	2	15	15	NUM
app01-6687	158	3	]	]	X
app01-6687	158	4	f.	f.	PROPN
app01-6687	158	5	lofaj	lofaj	PROPN
app01-6687	158	6	,	,	PUNCT
app01-6687	158	7	p.	p.	NOUN
app01-6687	158	8	hviščová	hviščová	ADV
app01-6687	158	9	,	,	PUNCT
app01-6687	158	10	p.	p.	PROPN
app01-6687	158	11	zubko	zubko	PROPN
app01-6687	158	12	,	,	PUNCT
app01-6687	158	13	et	et	PROPN
app01-6687	158	14	al	al	PROPN
app01-6687	158	15	.	.	PROPN
app01-6687	158	16	mechanical	mechanical	ADJ
app01-6687	158	17	and	and	CCONJ
app01-6687	158	18	tribological	tribological	ADJ
app01-6687	158	19	properties	property	NOUN
app01-6687	158	20	of	of	ADP
app01-6687	158	21	the	the	DET
app01-6687	158	22	high	high	ADJ
app01-6687	158	23	target	target	NOUN
app01-6687	158	24	utilization	utilization	NOUN
app01-6687	158	25	sputtering	sputter	VERB
app01-6687	158	26	w	w	NOUN
app01-6687	158	27	-	-	PUNCT
app01-6687	158	28	c	c	NOUN
app01-6687	158	29	coatings	coating	NOUN
app01-6687	158	30	on	on	ADP
app01-6687	158	31	different	different	ADJ
app01-6687	158	32	substrates	substrate	NOUN
app01-6687	158	33	.	.	PUNCT
app01-6687	159	1	international	international	ADJ
app01-6687	159	2	journal	journal	PROPN
app01-6687	159	3	of	of	ADP
app01-6687	159	4	refractory	refractory	NOUN
app01-6687	159	5	metals	metal	NOUN
app01-6687	159	6	and	and	CCONJ
app01-6687	159	7	hard	hard	ADJ
app01-6687	159	8	materials	material	NOUN
app01-6687	159	9	80:305–314	80:305–314	PROPN
app01-6687	159	10	,	,	PUNCT
app01-6687	159	11	2019	2019	NUM
app01-6687	159	12	.	.	PUNCT
app01-6687	160	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	160	2	/	/	SYM
app01-6687	160	3	j.ijrmhm.2016.12.015	j.ijrmhm.2016.12.015	PROPN
app01-6687	160	4	.	.	PUNCT
app01-6687	161	1	[	[	X
app01-6687	161	2	16	16	NUM
app01-6687	161	3	]	]	X
app01-6687	161	4	f.	f.	PROPN
app01-6687	161	5	lofaj	lofaj	PROPN
app01-6687	161	6	,	,	PUNCT
app01-6687	161	7	m.	m.	NOUN
app01-6687	161	8	kabátová	kabátová	PROPN
app01-6687	161	9	,	,	PUNCT
app01-6687	161	10	m.	m.	NOUN
app01-6687	161	11	klich	klich	PROPN
app01-6687	161	12	,	,	PUNCT
app01-6687	161	13	et	et	PROPN
app01-6687	161	14	al	al	PROPN
app01-6687	161	15	.	.	PROPN
app01-6687	161	16	tribological	tribological	ADJ
app01-6687	161	17	behavior	behavior	NOUN
app01-6687	161	18	of	of	ADP
app01-6687	161	19	hydrogenated	hydrogenate	VERB
app01-6687	161	20	w	w	PROPN
app01-6687	161	21	-	-	PUNCT
app01-6687	161	22	c	c	NOUN
app01-6687	161	23	/	/	SYM
app01-6687	161	24	a	a	DET
app01-6687	161	25	-	-	PUNCT
app01-6687	161	26	c	c	NOUN
app01-6687	161	27	:	:	PUNCT
app01-6687	161	28	h	h	NOUN
app01-6687	161	29	coatings	coating	NOUN
app01-6687	161	30	deposited	deposit	VERB
app01-6687	161	31	by	by	ADP
app01-6687	161	32	three	three	NUM
app01-6687	161	33	different	different	ADJ
app01-6687	161	34	sputtering	sputtering	ADJ
app01-6687	161	35	techniques	technique	NOUN
app01-6687	161	36	.	.	PUNCT
app01-6687	162	1	cerâmica	cerâmica	PROPN
app01-6687	162	2	65(suppl	65(suppl	NUM
app01-6687	162	3	1):58–69	1):58–69	NUM
app01-6687	162	4	,	,	PUNCT
app01-6687	162	5	2019	2019	NUM
app01-6687	162	6	.	.	PUNCT
app01-6687	163	1	doi:10.1590/0366	doi:10.1590/0366	NOUN
app01-6687	163	2	-	-	PUNCT
app01-6687	163	3	6913201965s12577	6913201965s12577	NUM
app01-6687	163	4	.	.	PUNCT
app01-6687	164	1	[	[	X
app01-6687	164	2	17	17	NUM
app01-6687	164	3	]	]	X
app01-6687	164	4	f.	f.	PROPN
app01-6687	164	5	lofaj	lofaj	PROPN
app01-6687	164	6	,	,	PUNCT
app01-6687	164	7	m.	m.	NOUN
app01-6687	164	8	kabátová	kabátová	PROPN
app01-6687	164	9	,	,	PUNCT
app01-6687	164	10	l.	l.	PROPN
app01-6687	164	11	kvetková	kvetková	PROPN
app01-6687	164	12	,	,	PUNCT
app01-6687	164	13	et	et	PROPN
app01-6687	164	14	al	al	PROPN
app01-6687	164	15	.	.	PROPN
app01-6687	164	16	hybrid	hybrid	PROPN
app01-6687	164	17	pvd	pvd	PROPN
app01-6687	164	18	-	-	PUNCT
app01-6687	164	19	pecvd	pecvd	PROPN
app01-6687	164	20	w	w	PROPN
app01-6687	164	21	-	-	PUNCT
app01-6687	164	22	c	c	NOUN
app01-6687	164	23	:	:	PUNCT
app01-6687	164	24	h	h	ADJ
app01-6687	164	25	coatings	coating	NOUN
app01-6687	164	26	prepared	prepare	VERB
app01-6687	164	27	by	by	ADP
app01-6687	164	28	different	different	ADJ
app01-6687	164	29	sputtering	sputtering	ADJ
app01-6687	164	30	techniques	technique	NOUN
app01-6687	164	31	:	:	PUNCT
app01-6687	164	32	the	the	DET
app01-6687	164	33	comparison	comparison	NOUN
app01-6687	164	34	of	of	ADP
app01-6687	164	35	deposition	deposition	NOUN
app01-6687	164	36	processes	process	NOUN
app01-6687	164	37	,	,	PUNCT
app01-6687	164	38	composition	composition	NOUN
app01-6687	164	39	and	and	CCONJ
app01-6687	164	40	properties	property	NOUN
app01-6687	164	41	.	.	PUNCT
app01-6687	165	1	surface	surface	NOUN
app01-6687	165	2	and	and	CCONJ
app01-6687	165	3	coatings	coating	NOUN
app01-6687	165	4	technology	technology	NOUN
app01-6687	165	5	375:839–853	375:839–853	NUM
app01-6687	165	6	,	,	PUNCT
app01-6687	165	7	2019	2019	NUM
app01-6687	165	8	.	.	PUNCT
app01-6687	166	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	166	2	/	/	SYM
app01-6687	166	3	j.surfcoat.2019.07.078	j.surfcoat.2019.07.078	PROPN
app01-6687	166	4	.	.	PUNCT
app01-6687	167	1	[	[	X
app01-6687	167	2	18	18	NUM
app01-6687	167	3	]	]	X
app01-6687	167	4	f.	f.	PROPN
app01-6687	167	5	lofaj	lofaj	PROPN
app01-6687	167	6	,	,	PUNCT
app01-6687	167	7	m.	m.	NOUN
app01-6687	167	8	kabátová	kabátová	PROPN
app01-6687	167	9	,	,	PUNCT
app01-6687	167	10	j.	j.	PROPN
app01-6687	167	11	dobrovodský	dobrovodský	PROPN
app01-6687	167	12	,	,	PUNCT
app01-6687	167	13	g.	g.	PROPN
app01-6687	167	14	cempura	cempura	PROPN
app01-6687	167	15	.	.	PROPN
app01-6687	167	16	hydrogenation	hydrogenation	NOUN
app01-6687	167	17	and	and	CCONJ
app01-6687	167	18	hybridization	hybridization	NOUN
app01-6687	167	19	in	in	ADP
app01-6687	167	20	hard	hard	ADJ
app01-6687	167	21	w	w	NOUN
app01-6687	167	22	-	-	PUNCT
app01-6687	167	23	c	c	NOUN
app01-6687	167	24	:	:	PUNCT
app01-6687	167	25	h	h	ADJ
app01-6687	167	26	coatings	coating	NOUN
app01-6687	167	27	prepared	prepare	VERB
app01-6687	167	28	by	by	ADP
app01-6687	167	29	hybrid	hybrid	ADJ
app01-6687	167	30	pvd	pvd	PROPN
app01-6687	167	31	-	-	PUNCT
app01-6687	167	32	pecvd	pecvd	NOUN
app01-6687	167	33	method	method	NOUN
app01-6687	167	34	with	with	ADP
app01-6687	167	35	methane	methane	NOUN
app01-6687	167	36	and	and	CCONJ
app01-6687	167	37	acetylene	acetylene	NOUN
app01-6687	167	38	.	.	PUNCT
app01-6687	168	1	international	international	ADJ
app01-6687	168	2	journal	journal	PROPN
app01-6687	168	3	of	of	ADP
app01-6687	168	4	refractory	refractory	NOUN
app01-6687	168	5	metals	metal	NOUN
app01-6687	168	6	and	and	CCONJ
app01-6687	168	7	hard	hard	ADJ
app01-6687	168	8	materials	material	NOUN
app01-6687	168	9	88:105211	88:105211	NUM
app01-6687	168	10	,	,	PUNCT
app01-6687	168	11	2020	2020	NUM
app01-6687	168	12	.	.	PUNCT
app01-6687	169	1	doi:10.1016	doi:10.1016	PROPN
app01-6687	169	2	/	/	SYM
app01-6687	169	3	j.ijrmhm.2020.105211	j.ijrmhm.2020.105211	PROPN
app01-6687	169	4	.	.	PUNCT
app01-6687	170	1	66	66	NUM
app01-6687	170	2	https://doi.org/10.1016/s0043-1648(00)00488-9	https://doi.org/10.1016/s0043-1648(00)00488-9	NOUN
app01-6687	170	3	https://doi.org/10.1016/s0257-8972(99)00586-1	https://doi.org/10.1016/s0257-8972(99)00586-1	NOUN
app01-6687	170	4	https://doi.org/10.1016/j.surfcoat.2012.05.073	https://doi.org/10.1016/j.surfcoat.2012.05.073	NOUN
app01-6687	170	5	https://doi.org/10.1016/j.surfcoat.2006.07.020	https://doi.org/10.1016/j.surfcoat.2006.07.020	NUM
app01-6687	170	6	https://doi.org/10.1016/0040-6090(84)90123-8	https://doi.org/10.1016/0040-6090(84)90123-8	PROPN
app01-6687	170	7	https://doi.org/10.1016/s0257-8972(97)00522-7	https://doi.org/10.1016/s0257-8972(97)00522-7	PROPN
app01-6687	170	8	https://doi.org/10.1016/s1359-6454(01)00328-7	https://doi.org/10.1016/s1359-6454(01)00328-7	NOUN
app01-6687	170	9	https://doi.org/10.1016/s0921-5093(01)01076-0	https://doi.org/10.1016/s0921-5093(01)01076-0	PROPN
app01-6687	170	10	https://doi.org/10.1016/j.vacuum.2008.11.007	https://doi.org/10.1016/j.vacuum.2008.11.007	PROPN
app01-6687	170	11	https://doi.org/10.1016/0040-6090(95)06569-5	https://doi.org/10.1016/0040-6090(95)06569-5	PRON
app01-6687	170	12	https://doi.org/10.1016/s1044-5803(02)00192-4	https://doi.org/10.1016/s1044-5803(02)00192-4	PROPN
app01-6687	170	13	https://doi.org/10.1007/s11340-016-0190-x	https://doi.org/10.1007/s11340-016-0190-x	PROPN
app01-6687	170	14	https://doi.org/10.1557/jmr.1998.0146	https://doi.org/10.1557/jmr.1998.0146	NOUN
app01-6687	170	15	https://doi.org/10.1016/j.tsf.2012.09.001	https://doi.org/10.1016/j.tsf.2012.09.001	PROPN
app01-6687	170	16	https://doi.org/10.1016/j.ijrmhm.2016.12.015	https://doi.org/10.1016/j.ijrmhm.2016.12.015	X
app01-6687	170	17	https://doi.org/10.1590/0366-6913201965s12577	https://doi.org/10.1590/0366-6913201965s12577	PROPN
app01-6687	170	18	https://doi.org/10.1016/j.surfcoat.2019.07.078	https://doi.org/10.1016/j.surfcoat.2019.07.078	NUM
app01-6687	170	19	https://doi.org/10.1016/j.ijrmhm.2020.105211	https://doi.org/10.1016/j.ijrmhm.2020.105211	PROPN
app01-6687	170	20	acta	acta	PROPN
app01-6687	170	21	polytechnica	polytechnica	PROPN
app01-6687	170	22	27(0):62–66	27(0):62–66	PROPN
app01-6687	170	23	,	,	PUNCT
app01-6687	170	24	2020	2020	NUM
app01-6687	170	25	1	1	NUM
app01-6687	170	26	introduction	introduction	NOUN
app01-6687	170	27	2	2	NUM
app01-6687	170	28	experimental	experimental	ADJ
app01-6687	170	29	material	material	NOUN
app01-6687	170	30	and	and	CCONJ
app01-6687	170	31	methods	method	NOUN
app01-6687	170	32	3	3	NUM
app01-6687	170	33	results	result	NOUN
app01-6687	170	34	and	and	CCONJ
app01-6687	170	35	discussion	discussion	NOUN
app01-6687	170	36	3.1	3.1	NUM
app01-6687	170	37	substrate	substrate	NOUN
app01-6687	170	38	effects	effect	NOUN
app01-6687	170	39	on	on	ADP
app01-6687	170	40	hardness	hardness	NOUN
app01-6687	170	41	and	and	CCONJ
app01-6687	170	42	indentation	indentation	NOUN
app01-6687	170	43	modulus	modulus	NOUN
app01-6687	170	44	in	in	ADP
app01-6687	170	45	hipims	hipims	PROPN
app01-6687	170	46	w	w	PROPN
app01-6687	170	47	-	-	PUNCT
app01-6687	170	48	c	c	NOUN
app01-6687	170	49	:	:	PUNCT
app01-6687	170	50	h	h	NOUN
app01-6687	170	51	coatings	coating	NOUN
app01-6687	170	52	4	4	NUM
app01-6687	170	53	conclusions	conclusion	NOUN
app01-6687	170	54	acknowledgements	acknowledgement	NOUN
app01-6687	170	55	references	reference	NOUN