id	sid	tid	token	lemma	pos
ijassa-479	1	1	advances	advance	NOUN
ijassa-479	1	2	in	in	ADP
ijassa-479	1	3	systems	system	NOUN
ijassa-479	1	4	science	science	NOUN
ijassa-479	1	5	and	and	CCONJ
ijassa-479	1	6	application	application	NOUN
ijassa-479	1	7	(	(	PUNCT
ijassa-479	1	8	2016	2016	NUM
ijassa-479	1	9	)	)	PUNCT
ijassa-479	2	1	vol.16	vol.16	PROPN
ijassa-479	2	2	no.3	no.3	VERB
ijassa-479	2	3	76	76	NUM
ijassa-479	2	4	-	-	SYM
ijassa-479	2	5	93	93	NUM
ijassa-479	2	6	optical	optical	ADJ
ijassa-479	2	7	mems	mem	NOUN
ijassa-479	2	8	sensor	sensor	NOUN
ijassa-479	2	9	for	for	ADP
ijassa-479	2	10	measurement	measurement	NOUN
ijassa-479	2	11	of	of	ADP
ijassa-479	2	12	low	low	ADJ
ijassa-479	2	13	stress	stress	NOUN
ijassa-479	2	14	using	use	VERB
ijassa-479	2	15	ptolemy	ptolemy	PROPN
ijassa-479	2	16	ii	ii	PROPN
ijassa-479	2	17	i.	i.	PROPN
ijassa-479	2	18	mala	mala	PROPN
ijassa-479	2	19	serene	serene	PROPN
ijassa-479	2	20	,	,	PUNCT
ijassa-479	2	21	rajasekhara	rajasekhara	PROPN
ijassa-479	2	22	babu	babu	PROPN
ijassa-479	2	23	m	m	PROPN
ijassa-479	2	24	,	,	PUNCT
ijassa-479	2	25	zachariah.c.alex	zachariah.c.alex	PROPN
ijassa-479	2	26	school	school	NOUN
ijassa-479	2	27	of	of	ADP
ijassa-479	2	28	computing	compute	VERB
ijassa-479	2	29	science	science	NOUN
ijassa-479	2	30	and	and	CCONJ
ijassa-479	2	31	engineering	engineering	NOUN
ijassa-479	2	32	,	,	PUNCT
ijassa-479	2	33	vit	vit	PROPN
ijassa-479	2	34	university	university	NOUN
ijassa-479	2	35	,	,	PUNCT
ijassa-479	2	36	school	school	NOUN
ijassa-479	2	37	of	of	ADP
ijassa-479	2	38	electronics	electronic	NOUN
ijassa-479	2	39	engineering	engineering	NOUN
ijassa-479	2	40	,	,	PUNCT
ijassa-479	2	41	vit	vit	PROPN
ijassa-479	2	42	university	university	NOUN
ijassa-479	2	43	,	,	PUNCT
ijassa-479	2	44	vellore-632	vellore-632	VERB
ijassa-479	2	45	014	014	NUM
ijassa-479	2	46	,	,	PUNCT
ijassa-479	2	47	tamil	tamil	PROPN
ijassa-479	2	48	nadu	nadu	NOUN
ijassa-479	2	49	,	,	PUNCT
ijassa-479	2	50	india	india	PROPN
ijassa-479	2	51	abstract	abstract	PROPN
ijassa-479	2	52	modeling	modeling	NOUN
ijassa-479	2	53	and	and	CCONJ
ijassa-479	2	54	simulation	simulation	NOUN
ijassa-479	2	55	plays	play	VERB
ijassa-479	2	56	vital	vital	ADJ
ijassa-479	2	57	role	role	NOUN
ijassa-479	2	58	in	in	ADP
ijassa-479	2	59	the	the	DET
ijassa-479	2	60	micro	micro	NOUN
ijassa-479	2	61	electro	electro	PROPN
ijassa-479	2	62	mechanical	mechanical	ADJ
ijassa-479	2	63	systems	system	NOUN
ijassa-479	2	64	(	(	PUNCT
ijassa-479	2	65	mems	mems	NOUN
ijassa-479	2	66	)	)	PUNCT
ijassa-479	2	67	field	field	NOUN
ijassa-479	2	68	.	.	PUNCT
ijassa-479	3	1	optical	optical	ADJ
ijassa-479	3	2	mems	mem	NOUN
ijassa-479	3	3	comprise	comprise	NOUN
ijassa-479	3	4	of	of	ADP
ijassa-479	3	5	three	three	NUM
ijassa-479	3	6	domains	domain	NOUN
ijassa-479	3	7	namely	namely	ADV
ijassa-479	3	8	optical	optical	ADJ
ijassa-479	3	9	,	,	PUNCT
ijassa-479	3	10	electrical	electrical	ADJ
ijassa-479	3	11	and	and	CCONJ
ijassa-479	3	12	mechanical	mechanical	ADJ
ijassa-479	3	13	.	.	PUNCT
ijassa-479	4	1	the	the	DET
ijassa-479	4	2	existing	exist	VERB
ijassa-479	4	3	mems	mem	NOUN
ijassa-479	4	4	software	software	NOUN
ijassa-479	4	5	for	for	ADP
ijassa-479	4	6	modeling	modeling	NOUN
ijassa-479	4	7	is	be	AUX
ijassa-479	4	8	very	very	ADV
ijassa-479	4	9	expensive	expensive	ADJ
ijassa-479	4	10	.	.	PUNCT
ijassa-479	5	1	this	this	DET
ijassa-479	5	2	cost	cost	NOUN
ijassa-479	5	3	of	of	ADP
ijassa-479	5	4	modeling	model	VERB
ijassa-479	5	5	software	software	NOUN
ijassa-479	5	6	increases	increase	VERB
ijassa-479	5	7	the	the	DET
ijassa-479	5	8	design	design	NOUN
ijassa-479	5	9	and	and	CCONJ
ijassa-479	5	10	development	development	NOUN
ijassa-479	5	11	of	of	ADP
ijassa-479	5	12	optical	optical	ADJ
ijassa-479	5	13	mems	mem	NOUN
ijassa-479	5	14	sensors	sensor	NOUN
ijassa-479	5	15	.	.	PUNCT
ijassa-479	6	1	this	this	DET
ijassa-479	6	2	paper	paper	NOUN
ijassa-479	6	3	proposes	propose	VERB
ijassa-479	6	4	the	the	DET
ijassa-479	6	5	design	design	NOUN
ijassa-479	6	6	and	and	CCONJ
ijassa-479	6	7	development	development	NOUN
ijassa-479	6	8	of	of	ADP
ijassa-479	6	9	a	a	DET
ijassa-479	6	10	novel	novel	ADJ
ijassa-479	6	11	optical	optical	NOUN
ijassa-479	6	12	read	read	VERB
ijassa-479	6	13	out	out	ADP
ijassa-479	6	14	mechanism	mechanism	NOUN
ijassa-479	6	15	.	.	PUNCT
ijassa-479	7	1	this	this	DET
ijassa-479	7	2	mechanism	mechanism	NOUN
ijassa-479	7	3	is	be	AUX
ijassa-479	7	4	used	use	VERB
ijassa-479	7	5	to	to	PART
ijassa-479	7	6	measure	measure	VERB
ijassa-479	7	7	the	the	DET
ijassa-479	7	8	maximum	maximum	ADJ
ijassa-479	7	9	stress	stress	NOUN
ijassa-479	7	10	applied	apply	VERB
ijassa-479	7	11	on	on	ADP
ijassa-479	7	12	the	the	DET
ijassa-479	7	13	cantilever	cantilever	NOUN
ijassa-479	7	14	and	and	CCONJ
ijassa-479	7	15	its	its	PRON
ijassa-479	7	16	corresponding	correspond	VERB
ijassa-479	7	17	deflection	deflection	NOUN
ijassa-479	7	18	of	of	ADP
ijassa-479	7	19	the	the	DET
ijassa-479	7	20	cantilever	cantilever	NOUN
ijassa-479	7	21	.	.	PUNCT
ijassa-479	8	1	the	the	DET
ijassa-479	8	2	experiments	experiment	NOUN
ijassa-479	8	3	have	have	AUX
ijassa-479	8	4	been	be	AUX
ijassa-479	8	5	carried	carry	VERB
ijassa-479	8	6	out	out	ADP
ijassa-479	8	7	using	use	VERB
ijassa-479	8	8	ptolemy	ptolemy	PROPN
ijassa-479	8	9	ii	ii	PROPN
ijassa-479	8	10	software	software	PROPN
ijassa-479	8	11	for	for	ADP
ijassa-479	8	12	design	design	NOUN
ijassa-479	8	13	and	and	CCONJ
ijassa-479	8	14	simulation	simulation	NOUN
ijassa-479	8	15	of	of	ADP
ijassa-479	8	16	mems	mems	ADJ
ijassa-479	8	17	optical	optical	ADJ
ijassa-479	8	18	sensors	sensor	NOUN
ijassa-479	8	19	.	.	PUNCT
ijassa-479	9	1	laser	laser	NOUN
ijassa-479	9	2	actor	actor	NOUN
ijassa-479	9	3	,	,	PUNCT
ijassa-479	9	4	a	a	DET
ijassa-479	9	5	photo	photo	NOUN
ijassa-479	9	6	detector	detector	NOUN
ijassa-479	9	7	and	and	CCONJ
ijassa-479	9	8	force	force	NOUN
ijassa-479	9	9	actor	actor	NOUN
ijassa-479	9	10	have	have	AUX
ijassa-479	9	11	been	be	AUX
ijassa-479	9	12	created	create	VERB
ijassa-479	9	13	using	use	VERB
ijassa-479	9	14	ptolemy	ptolemy	PROPN
ijassa-479	9	15	ii	ii	PROPN
ijassa-479	9	16	.	.	PUNCT
ijassa-479	10	1	comsol	comsol	NOUN
ijassa-479	10	2	software	software	NOUN
ijassa-479	10	3	has	have	AUX
ijassa-479	10	4	been	be	AUX
ijassa-479	10	5	used	use	VERB
ijassa-479	10	6	to	to	PART
ijassa-479	10	7	model	model	VERB
ijassa-479	10	8	cantilever	cantilever	NOUN
ijassa-479	10	9	.	.	PUNCT
ijassa-479	11	1	a	a	DET
ijassa-479	11	2	comparative	comparative	ADJ
ijassa-479	11	3	study	study	NOUN
ijassa-479	11	4	has	have	AUX
ijassa-479	11	5	been	be	AUX
ijassa-479	11	6	done	do	VERB
ijassa-479	11	7	for	for	ADP
ijassa-479	11	8	cantilever	cantilever	NOUN
ijassa-479	11	9	with	with	ADP
ijassa-479	11	10	three	three	NUM
ijassa-479	11	11	modes	mode	NOUN
ijassa-479	11	12	of	of	ADP
ijassa-479	11	13	eigen	eigen	PROPN
ijassa-479	11	14	frequencies	frequency	NOUN
ijassa-479	11	15	using	use	VERB
ijassa-479	11	16	comsol	comsol	NOUN
ijassa-479	11	17	.	.	PUNCT
ijassa-479	12	1	the	the	DET
ijassa-479	12	2	experimental	experimental	ADJ
ijassa-479	12	3	result	result	NOUN
ijassa-479	12	4	shows	show	VERB
ijassa-479	12	5	that	that	SCONJ
ijassa-479	12	6	the	the	DET
ijassa-479	12	7	parylene	parylene	ADJ
ijassa-479	12	8	optical	optical	ADJ
ijassa-479	12	9	mems	mem	NOUN
ijassa-479	12	10	force	force	NOUN
ijassa-479	12	11	sensor	sensor	NOUN
ijassa-479	12	12	can	can	AUX
ijassa-479	12	13	sense	sense	VERB
ijassa-479	12	14	less	less	ADJ
ijassa-479	12	15	range	range	NOUN
ijassa-479	12	16	of	of	ADP
ijassa-479	12	17	stress	stress	NOUN
ijassa-479	12	18	0.0003	0.0003	NUM
ijassa-479	12	19	n	n	CCONJ
ijassa-479	12	20	/	/	SYM
ijassa-479	12	21	m	m	NOUN
ijassa-479	12	22	to	to	ADP
ijassa-479	12	23	0.272	0.272	NUM
ijassa-479	12	24	n	n	CCONJ
ijassa-479	12	25	/	/	SYM
ijassa-479	12	26	m	m	PROPN
ijassa-479	12	27	when	when	SCONJ
ijassa-479	12	28	compared	compare	VERB
ijassa-479	12	29	to	to	ADP
ijassa-479	12	30	the	the	DET
ijassa-479	12	31	polyimide	polyimide	ADJ
ijassa-479	12	32	optical	optical	ADJ
ijassa-479	12	33	mems	mem	NOUN
ijassa-479	12	34	sensor	sensor	NOUN
ijassa-479	12	35	.	.	PUNCT
ijassa-479	13	1	keywords	keyword	NOUN
ijassa-479	13	2	microcantilever	microcantilever	VERB
ijassa-479	13	3	,	,	PUNCT
ijassa-479	13	4	optical	optical	ADJ
ijassa-479	13	5	mems	mem	NOUN
ijassa-479	13	6	,	,	PUNCT
ijassa-479	13	7	ptolemy	ptolemy	NOUN
ijassa-479	13	8	,	,	PUNCT
ijassa-479	13	9	sensor	sensor	NOUN
ijassa-479	13	10	,	,	PUNCT
ijassa-479	13	11	laserdiode	laserdiode	NOUN
ijassa-479	13	12	,	,	PUNCT
ijassa-479	13	13	comsol	comsol	NOUN
ijassa-479	13	14	1	1	NUM
ijassa-479	13	15	introduction	introduction	NOUN
ijassa-479	13	16	optical	optical	ADJ
ijassa-479	13	17	mems	mem	NOUN
ijassa-479	13	18	can	can	AUX
ijassa-479	13	19	be	be	AUX
ijassa-479	13	20	defined	define	VERB
ijassa-479	13	21	as	as	ADP
ijassa-479	13	22	micro	micro	ADJ
ijassa-479	13	23	devices	device	NOUN
ijassa-479	13	24	with	with	ADP
ijassa-479	13	25	three	three	NUM
ijassa-479	13	26	functionalities	functionality	NOUN
ijassa-479	13	27	like	like	ADP
ijassa-479	13	28	electrical	electrical	ADJ
ijassa-479	13	29	,	,	PUNCT
ijassa-479	13	30	mechanical	mechanical	ADJ
ijassa-479	13	31	and	and	CCONJ
ijassa-479	13	32	optical	optical	ADJ
ijassa-479	13	33	at	at	ADP
ijassa-479	13	34	the	the	DET
ijassa-479	13	35	same	same	ADJ
ijassa-479	13	36	time	time	NOUN
ijassa-479	13	37	and	and	CCONJ
ijassa-479	13	38	can	can	AUX
ijassa-479	13	39	be	be	AUX
ijassa-479	13	40	fabricated	fabricate	VERB
ijassa-479	13	41	using	use	VERB
ijassa-479	13	42	batch	batch	NOUN
ijassa-479	13	43	processing	processing	NOUN
ijassa-479	13	44	techniques	technique	NOUN
ijassa-479	13	45	developed	develop	VERB
ijassa-479	13	46	from	from	ADP
ijassa-479	13	47	microelectronic	microelectronic	ADJ
ijassa-479	13	48	fabrication	fabrication	NOUN
ijassa-479	14	1	[	[	X
ijassa-479	14	2	1	1	NUM
ijassa-479	14	3	]	]	PUNCT
ijassa-479	14	4	.	.	PUNCT
ijassa-479	15	1	for	for	ADP
ijassa-479	15	2	integrated	integrate	VERB
ijassa-479	15	3	micro	micro	NOUN
ijassa-479	15	4	-	-	NOUN
ijassa-479	15	5	systems	system	NOUN
ijassa-479	15	6	composed	compose	VERB
ijassa-479	15	7	of	of	ADP
ijassa-479	15	8	electrical	electrical	ADJ
ijassa-479	15	9	,	,	PUNCT
ijassa-479	15	10	optical	optical	ADJ
ijassa-479	15	11	and	and	CCONJ
ijassa-479	15	12	mechanical	mechanical	ADJ
ijassa-479	15	13	components	component	NOUN
ijassa-479	15	14	,	,	PUNCT
ijassa-479	15	15	the	the	DET
ijassa-479	15	16	need	need	NOUN
ijassa-479	15	17	to	to	PART
ijassa-479	15	18	model	model	VERB
ijassa-479	15	19	large	large	ADJ
ijassa-479	15	20	numbers	number	NOUN
ijassa-479	15	21	of	of	ADP
ijassa-479	15	22	linear	linear	ADJ
ijassa-479	15	23	and	and	CCONJ
ijassa-479	15	24	non	non	ADJ
ijassa-479	15	25	-	-	ADJ
ijassa-479	15	26	linear	linear	ADJ
ijassa-479	15	27	components	component	NOUN
ijassa-479	15	28	with	with	ADP
ijassa-479	15	29	sufficient	sufficient	ADJ
ijassa-479	15	30	accuracy	accuracy	NOUN
ijassa-479	15	31	to	to	PART
ijassa-479	15	32	analyze	analyze	VERB
ijassa-479	15	33	cross	cross	NOUN
ijassa-479	15	34	-	-	ADJ
ijassa-479	15	35	talk	talk	ADJ
ijassa-479	15	36	,	,	PUNCT
ijassa-479	15	37	noise	noise	NOUN
ijassa-479	15	38	and	and	CCONJ
ijassa-479	15	39	tolerance	tolerance	NOUN
ijassa-479	15	40	in	in	ADP
ijassa-479	15	41	an	an	DET
ijassa-479	15	42	interactive	interactive	ADJ
ijassa-479	15	43	environment	environment	NOUN
ijassa-479	15	44	leads	lead	VERB
ijassa-479	15	45	to	to	ADP
ijassa-479	15	46	the	the	DET
ijassa-479	15	47	requirement	requirement	NOUN
ijassa-479	15	48	of	of	ADP
ijassa-479	15	49	an	an	DET
ijassa-479	15	50	efficient	efficient	ADJ
ijassa-479	15	51	yet	yet	ADV
ijassa-479	15	52	accurate	accurate	ADJ
ijassa-479	15	53	mixed	mixed	ADJ
ijassa-479	15	54	-	-	PUNCT
ijassa-479	15	55	technology	technology	NOUN
ijassa-479	15	56	simulation	simulation	NOUN
ijassa-479	15	57	technique[2	technique[2	PROPN
ijassa-479	15	58	]	]	PUNCT
ijassa-479	15	59	.	.	PUNCT
ijassa-479	16	1	stevan	stevan	PROPN
ijassa-479	16	2	p.	p.	PROPN
ijassa-479	16	3	levitan	levitan	PROPN
ijassa-479	16	4	et	et	PROPN
ijassa-479	16	5	al	al	PROPN
ijassa-479	16	6	reported	report	VERB
ijassa-479	16	7	a	a	DET
ijassa-479	16	8	computer	computer	NOUN
ijassa-479	16	9	aided	aid	VERB
ijassa-479	16	10	design	design	NOUN
ijassa-479	16	11	tool	tool	NOUN
ijassa-479	16	12	for	for	ADP
ijassa-479	16	13	free	free	ADJ
ijassa-479	16	14	-	-	PUNCT
ijassa-479	16	15	space	space	NOUN
ijassa-479	16	16	optoelectronic	optoelectronic	ADJ
ijassa-479	16	17	systems	system	NOUN
ijassa-479	16	18	and	and	CCONJ
ijassa-479	16	19	achieved	achieve	VERB
ijassa-479	16	20	system	system	NOUN
ijassa-479	16	21	-	-	PUNCT
ijassa-479	16	22	level	level	NOUN
ijassa-479	16	23	modeling[3	modeling[3	NOUN
ijassa-479	16	24	]	]	X
ijassa-479	16	25	.	.	PUNCT
ijassa-479	17	1	the	the	DET
ijassa-479	17	2	advantages	advantage	NOUN
ijassa-479	17	3	of	of	ADP
ijassa-479	17	4	optical	optical	ADJ
ijassa-479	17	5	mems	mem	NOUN
ijassa-479	17	6	sensors	sensor	NOUN
ijassa-479	17	7	over	over	ADP
ijassa-479	17	8	electrical	electrical	ADJ
ijassa-479	17	9	sensors	sensor	NOUN
ijassa-479	17	10	are	be	AUX
ijassa-479	17	11	high	high	ADJ
ijassa-479	17	12	adaptability	adaptability	NOUN
ijassa-479	17	13	in	in	ADP
ijassa-479	17	14	harsh	harsh	ADJ
ijassa-479	17	15	environments	environment	NOUN
ijassa-479	17	16	high	high	ADJ
ijassa-479	17	17	temperature	temperature	NOUN
ijassa-479	17	18	,	,	PUNCT
ijassa-479	17	19	chemical	chemical	NOUN
ijassa-479	17	20	corrosion	corrosion	NOUN
ijassa-479	17	21	,	,	PUNCT
ijassa-479	17	22	strong	strong	ADJ
ijassa-479	17	23	electromagnetic	electromagnetic	ADJ
ijassa-479	17	24	interference	interference	NOUN
ijassa-479	17	25	and	and	CCONJ
ijassa-479	17	26	high	high	ADJ
ijassa-479	17	27	-	-	PUNCT
ijassa-479	17	28	energy	energy	NOUN
ijassa-479	17	29	radiation	radiation	NOUN
ijassa-479	17	30	exposure[4	exposure[4	X
ijassa-479	17	31	]	]	X
ijassa-479	17	32	.	.	PUNCT
ijassa-479	18	1	currently	currently	ADV
ijassa-479	18	2	,	,	PUNCT
ijassa-479	18	3	no	no	DET
ijassa-479	18	4	single	single	ADJ
ijassa-479	18	5	cad	cad	NOUN
ijassa-479	18	6	tool	tool	NOUN
ijassa-479	18	7	completely	completely	ADV
ijassa-479	18	8	models	model	VERB
ijassa-479	18	9	the	the	DET
ijassa-479	18	10	complexity	complexity	NOUN
ijassa-479	18	11	of	of	ADP
ijassa-479	18	12	these	these	DET
ijassa-479	18	13	mixed	mixed	ADJ
ijassa-479	18	14	tools	tool	NOUN
ijassa-479	18	15	to	to	ADP
ijassa-479	18	16	model	model	VERB
ijassa-479	18	17	,	,	PUNCT
ijassa-479	18	18	simulate	simulate	VERB
ijassa-479	18	19	,	,	PUNCT
ijassa-479	18	20	and	and	CCONJ
ijassa-479	18	21	analyze	analyze	VERB
ijassa-479	18	22	each	each	DET
ijassa-479	18	23	stage	stage	NOUN
ijassa-479	18	24	of	of	ADP
ijassa-479	18	25	the	the	DET
ijassa-479	18	26	design[4	design[4	NOUN
ijassa-479	18	27	]	]	PUNCT
ijassa-479	18	28	.	.	PUNCT
ijassa-479	19	1	hence	hence	ADV
ijassa-479	19	2	we	we	PRON
ijassa-479	19	3	have	have	AUX
ijassa-479	19	4	chosen	choose	VERB
ijassa-479	19	5	advances	advance	NOUN
ijassa-479	19	6	in	in	ADP
ijassa-479	19	7	systems	system	NOUN
ijassa-479	19	8	science	science	NOUN
ijassa-479	19	9	and	and	CCONJ
ijassa-479	19	10	application	application	NOUN
ijassa-479	19	11	(	(	PUNCT
ijassa-479	19	12	2016	2016	NUM
ijassa-479	19	13	)	)	PUNCT
ijassa-479	20	1	vol.16	vol.16	PROPN
ijassa-479	20	2	no.3	no.3	VERB
ijassa-479	20	3	77	77	NUM
ijassa-479	20	4	ptolemy	ptolemy	NOUN
ijassa-479	20	5	as	as	ADP
ijassa-479	20	6	our	our	PRON
ijassa-479	20	7	framework	framework	NOUN
ijassa-479	20	8	for	for	ADP
ijassa-479	20	9	developing	develop	VERB
ijassa-479	20	10	optical	optical	ADJ
ijassa-479	20	11	mems	mem	NOUN
ijassa-479	20	12	based	base	VERB
ijassa-479	20	13	sensors	sensor	NOUN
ijassa-479	20	14	.	.	PUNCT
ijassa-479	21	1	ptolemy	ptolemy	PROPN
ijassa-479	21	2	ii	ii	PROPN
ijassa-479	21	3	is	be	AUX
ijassa-479	21	4	a	a	DET
ijassa-479	21	5	system	system	NOUN
ijassa-479	21	6	level	level	NOUN
ijassa-479	21	7	design	design	NOUN
ijassa-479	21	8	environment	environment	NOUN
ijassa-479	21	9	that	that	PRON
ijassa-479	21	10	supports	support	VERB
ijassa-479	21	11	heterogeneous	heterogeneous	ADJ
ijassa-479	21	12	modeling	modeling	NOUN
ijassa-479	21	13	and	and	CCONJ
ijassa-479	21	14	design	design	NOUN
ijassa-479	21	15	of	of	ADP
ijassa-479	21	16	concurrent	concurrent	ADJ
ijassa-479	21	17	systems	system	NOUN
ijassa-479	21	18	.	.	PUNCT
ijassa-479	22	1	for	for	ADP
ijassa-479	22	2	simulating	simulate	VERB
ijassa-479	22	3	optical	optical	ADJ
ijassa-479	22	4	mems	mem	NOUN
ijassa-479	22	5	devices	device	NOUN
ijassa-479	22	6	it	it	PRON
ijassa-479	22	7	is	be	AUX
ijassa-479	22	8	essential	essential	ADJ
ijassa-479	22	9	to	to	PART
ijassa-479	22	10	integrate	integrate	VERB
ijassa-479	22	11	tools	tool	NOUN
ijassa-479	22	12	with	with	ADP
ijassa-479	22	13	different	different	ADJ
ijassa-479	22	14	models	model	NOUN
ijassa-479	22	15	of	of	ADP
ijassa-479	22	16	computation	computation	NOUN
ijassa-479	22	17	to	to	PART
ijassa-479	22	18	simulate	simulate	VERB
ijassa-479	22	19	the	the	DET
ijassa-479	22	20	whole	whole	ADJ
ijassa-479	22	21	system	system	NOUN
ijassa-479	22	22	[	[	X
ijassa-479	22	23	5	5	NUM
ijassa-479	22	24	]	]	PUNCT
ijassa-479	22	25	.	.	PUNCT
ijassa-479	23	1	the	the	DET
ijassa-479	23	2	ptolemy	ptolemy	PROPN
ijassa-479	23	3	ii	ii	PROPN
ijassa-479	23	4	software	software	NOUN
ijassa-479	23	5	provides	provide	VERB
ijassa-479	23	6	an	an	DET
ijassa-479	23	7	infrastructure	infrastructure	NOUN
ijassa-479	23	8	that	that	PRON
ijassa-479	23	9	allows	allow	VERB
ijassa-479	23	10	designers	designer	NOUN
ijassa-479	23	11	explore	explore	VERB
ijassa-479	23	12	and	and	CCONJ
ijassa-479	23	13	integrate	integrate	VERB
ijassa-479	23	14	the	the	DET
ijassa-479	23	15	different	different	ADJ
ijassa-479	23	16	models	model	NOUN
ijassa-479	23	17	of	of	ADP
ijassa-479	23	18	computation	computation	NOUN
ijassa-479	23	19	[	[	X
ijassa-479	23	20	6	6	NUM
ijassa-479	23	21	]	]	PUNCT
ijassa-479	23	22	.	.	PUNCT
ijassa-479	24	1	it	it	PRON
ijassa-479	24	2	is	be	AUX
ijassa-479	24	3	system	system	NOUN
ijassa-479	24	4	levels	level	NOUN
ijassa-479	24	5	tool	tool	VERB
ijassa-479	24	6	it	it	PRON
ijassa-479	24	7	.	.	PUNCT
ijassa-479	25	1	it	it	PRON
ijassa-479	25	2	does	do	AUX
ijassa-479	25	3	not	not	PART
ijassa-479	25	4	provide	provide	VERB
ijassa-479	25	5	the	the	DET
ijassa-479	25	6	functionality	functionality	NOUN
ijassa-479	25	7	for	for	ADP
ijassa-479	25	8	implementation	implementation	NOUN
ijassa-479	25	9	-	-	PUNCT
ijassa-479	25	10	level	level	NOUN
ijassa-479	25	11	simulation	simulation	NOUN
ijassa-479	25	12	.	.	PUNCT
ijassa-479	26	1	but	but	CCONJ
ijassa-479	26	2	external	external	ADJ
ijassa-479	26	3	tools	tool	NOUN
ijassa-479	26	4	based	base	VERB
ijassa-479	26	5	on	on	ADP
ijassa-479	26	6	different	different	ADJ
ijassa-479	26	7	model	model	NOUN
ijassa-479	26	8	of	of	ADP
ijassa-479	26	9	computation	computation	NOUN
ijassa-479	26	10	can	can	AUX
ijassa-479	26	11	be	be	AUX
ijassa-479	26	12	integrated	integrate	VERB
ijassa-479	26	13	into	into	ADP
ijassa-479	26	14	each	each	DET
ijassa-479	26	15	domain	domain	NOUN
ijassa-479	26	16	and	and	CCONJ
ijassa-479	26	17	ptolemy	ptolemy	PROPN
ijassa-479	26	18	ii	ii	PROPN
ijassa-479	26	19	can	can	AUX
ijassa-479	26	20	serve	serve	VERB
ijassa-479	26	21	as	as	ADP
ijassa-479	26	22	semantic	semantic	ADJ
ijassa-479	26	23	glue	glue	NOUN
ijassa-479	26	24	.	.	PUNCT
ijassa-479	27	1	in	in	ADP
ijassa-479	27	2	this	this	DET
ijassa-479	27	3	present	present	ADJ
ijassa-479	27	4	work	work	NOUN
ijassa-479	27	5	,	,	PUNCT
ijassa-479	27	6	the	the	DET
ijassa-479	27	7	simple	simple	ADJ
ijassa-479	27	8	component	component	NOUN
ijassa-479	27	9	of	of	ADP
ijassa-479	27	10	mems	mem	NOUN
ijassa-479	27	11	,	,	PUNCT
ijassa-479	27	12	a	a	DET
ijassa-479	27	13	microcantilever	microcantilever	NOUN
ijassa-479	27	14	is	be	AUX
ijassa-479	27	15	used	use	VERB
ijassa-479	27	16	to	to	PART
ijassa-479	27	17	sense	sense	VERB
ijassa-479	27	18	the	the	DET
ijassa-479	27	19	stress	stress	NOUN
ijassa-479	27	20	.	.	PUNCT
ijassa-479	28	1	it	it	PRON
ijassa-479	28	2	can	can	AUX
ijassa-479	28	3	be	be	AUX
ijassa-479	28	4	operated	operate	VERB
ijassa-479	28	5	in	in	ADP
ijassa-479	28	6	two	two	NUM
ijassa-479	28	7	modes	mode	NOUN
ijassa-479	28	8	:	:	PUNCT
ijassa-479	28	9	static	static	ADJ
ijassa-479	28	10	and	and	CCONJ
ijassa-479	28	11	dynamic	dynamic	ADJ
ijassa-479	28	12	mode	mode	NOUN
ijassa-479	28	13	.	.	PUNCT
ijassa-479	29	1	in	in	ADP
ijassa-479	29	2	static	static	ADJ
ijassa-479	29	3	mode	mode	NOUN
ijassa-479	29	4	,	,	PUNCT
ijassa-479	29	5	the	the	DET
ijassa-479	29	6	bending	bending	NOUN
ijassa-479	29	7	of	of	ADP
ijassa-479	29	8	microcantilever	microcantilever	NOUN
ijassa-479	29	9	depends	depend	VERB
ijassa-479	29	10	upon	upon	SCONJ
ijassa-479	29	11	the	the	DET
ijassa-479	29	12	force	force	NOUN
ijassa-479	29	13	or	or	CCONJ
ijassa-479	29	14	stress	stress	NOUN
ijassa-479	29	15	on	on	ADP
ijassa-479	29	16	the	the	DET
ijassa-479	29	17	cantilever	cantilever	NOUN
ijassa-479	29	18	.	.	PUNCT
ijassa-479	30	1	in	in	ADP
ijassa-479	30	2	dynamic	dynamic	ADJ
ijassa-479	30	3	mode	mode	NOUN
ijassa-479	30	4	,	,	PUNCT
ijassa-479	30	5	the	the	DET
ijassa-479	30	6	resonant	resonant	ADJ
ijassa-479	30	7	frequency	frequency	NOUN
ijassa-479	30	8	of	of	ADP
ijassa-479	30	9	microcantilever	microcantilever	NOUN
ijassa-479	30	10	changes	change	NOUN
ijassa-479	30	11	when	when	SCONJ
ijassa-479	30	12	the	the	DET
ijassa-479	30	13	mass	mass	NOUN
ijassa-479	30	14	added	add	VERB
ijassa-479	30	15	to	to	ADP
ijassa-479	30	16	it	it	PRON
ijassa-479	30	17	.	.	PUNCT
ijassa-479	31	1	the	the	DET
ijassa-479	31	2	different	different	ADJ
ijassa-479	31	3	read	read	VERB
ijassa-479	31	4	out	out	ADP
ijassa-479	31	5	mechanisms	mechanism	NOUN
ijassa-479	31	6	of	of	ADP
ijassa-479	31	7	the	the	DET
ijassa-479	31	8	microcantilever	microcantilever	NOUN
ijassa-479	31	9	are	be	AUX
ijassa-479	31	10	optical	optical	ADJ
ijassa-479	31	11	readout	readout	NOUN
ijassa-479	31	12	,	,	PUNCT
ijassa-479	31	13	piezoelectric	piezoelectric	NOUN
ijassa-479	31	14	and	and	CCONJ
ijassa-479	31	15	piezoresistive	piezoresistive	ADJ
ijassa-479	31	16	[	[	X
ijassa-479	31	17	7	7	NUM
ijassa-479	31	18	]	]	PUNCT
ijassa-479	31	19	.	.	PUNCT
ijassa-479	32	1	many	many	ADJ
ijassa-479	32	2	researchers	researcher	NOUN
ijassa-479	32	3	reported	report	VERB
ijassa-479	32	4	that	that	SCONJ
ijassa-479	32	5	the	the	DET
ijassa-479	32	6	microcantilever	microcantilever	NOUN
ijassa-479	32	7	is	be	AUX
ijassa-479	32	8	made	make	VERB
ijassa-479	32	9	of	of	ADP
ijassa-479	32	10	materials	material	NOUN
ijassa-479	32	11	like	like	ADP
ijassa-479	32	12	silicon	silicon	NOUN
ijassa-479	32	13	,	,	PUNCT
ijassa-479	32	14	silicon	silicon	NOUN
ijassa-479	32	15	nitride	nitride	NOUN
ijassa-479	32	16	and	and	CCONJ
ijassa-479	32	17	polysilicon	polysilicon	NOUN
ijassa-479	33	1	[	[	X
ijassa-479	33	2	8	8	NUM
ijassa-479	33	3	-	-	SYM
ijassa-479	33	4	9	9	NUM
ijassa-479	33	5	]	]	PUNCT
ijassa-479	33	6	.	.	PUNCT
ijassa-479	34	1	but	but	CCONJ
ijassa-479	34	2	the	the	DET
ijassa-479	34	3	fabrication	fabrication	NOUN
ijassa-479	34	4	cost	cost	NOUN
ijassa-479	34	5	of	of	ADP
ijassa-479	34	6	the	the	DET
ijassa-479	34	7	silicon	silicon	NOUN
ijassa-479	34	8	based	base	VERB
ijassa-479	34	9	cantilevers	cantilever	NOUN
ijassa-479	34	10	is	be	AUX
ijassa-479	34	11	expensive	expensive	ADJ
ijassa-479	34	12	.	.	PUNCT
ijassa-479	35	1	so	so	ADV
ijassa-479	35	2	silicon	silicon	NOUN
ijassa-479	35	3	can	can	AUX
ijassa-479	35	4	be	be	AUX
ijassa-479	35	5	replaced	replace	VERB
ijassa-479	35	6	by	by	ADP
ijassa-479	35	7	a	a	DET
ijassa-479	35	8	polymer	polymer	NOUN
ijassa-479	35	9	which	which	PRON
ijassa-479	35	10	offers	offer	VERB
ijassa-479	35	11	a	a	DET
ijassa-479	35	12	shining	shine	VERB
ijassa-479	35	13	future	future	NOUN
ijassa-479	35	14	for	for	ADP
ijassa-479	35	15	the	the	DET
ijassa-479	35	16	development	development	NOUN
ijassa-479	35	17	of	of	ADP
ijassa-479	35	18	chemical	chemical	ADJ
ijassa-479	35	19	and	and	CCONJ
ijassa-479	35	20	biological	biological	ADJ
ijassa-479	35	21	sensors	sensor	NOUN
ijassa-479	35	22	.	.	PUNCT
ijassa-479	36	1	the	the	DET
ijassa-479	36	2	merits	merit	NOUN
ijassa-479	36	3	of	of	ADP
ijassa-479	36	4	the	the	DET
ijassa-479	36	5	polymer	polymer	NOUN
ijassa-479	36	6	microcantilever	microcantilever	NOUN
ijassa-479	36	7	over	over	ADP
ijassa-479	36	8	silicon	silicon	PROPN
ijassa-479	36	9	microcantilever	microcantilever	PROPN
ijassa-479	36	10	are	be	AUX
ijassa-479	36	11	low	low	ADJ
ijassa-479	36	12	cost	cost	NOUN
ijassa-479	36	13	,	,	PUNCT
ijassa-479	36	14	more	more	ADJ
ijassa-479	36	15	flexibility	flexibility	NOUN
ijassa-479	36	16	,	,	PUNCT
ijassa-479	36	17	transparency	transparency	NOUN
ijassa-479	36	18	to	to	ADP
ijassa-479	36	19	visible	visible	ADJ
ijassa-479	36	20	uv	uv	NOUN
ijassa-479	36	21	,	,	PUNCT
ijassa-479	36	22	easily	easily	ADV
ijassa-479	36	23	mouldable	mouldable	ADJ
ijassa-479	36	24	capability	capability	NOUN
ijassa-479	36	25	,	,	PUNCT
ijassa-479	36	26	improved	improve	VERB
ijassa-479	36	27	bio	bio	NOUN
ijassa-479	36	28	-	-	NOUN
ijassa-479	36	29	compatibility[10	compatibility[10	NOUN
ijassa-479	36	30	]	]	PUNCT
ijassa-479	36	31	.	.	PUNCT
ijassa-479	37	1	in	in	ADP
ijassa-479	37	2	this	this	DET
ijassa-479	37	3	paper	paper	NOUN
ijassa-479	37	4	,	,	PUNCT
ijassa-479	37	5	polyimide	polyimide	NOUN
ijassa-479	37	6	and	and	CCONJ
ijassa-479	37	7	parylene	parylene	NOUN
ijassa-479	37	8	are	be	AUX
ijassa-479	37	9	identified	identify	VERB
ijassa-479	37	10	as	as	ADP
ijassa-479	37	11	suitable	suitable	ADJ
ijassa-479	37	12	polymers	polymer	NOUN
ijassa-479	37	13	for	for	ADP
ijassa-479	37	14	microcantilevers	microcantilever	NOUN
ijassa-479	37	15	given	give	VERB
ijassa-479	37	16	their	their	PRON
ijassa-479	37	17	low	low	ADJ
ijassa-479	37	18	youngs	young	NOUN
ijassa-479	37	19	modulus	modulus	ADJ
ijassa-479	37	20	,	,	PUNCT
ijassa-479	37	21	high	high	ADJ
ijassa-479	37	22	planarity	planarity	NOUN
ijassa-479	37	23	,	,	PUNCT
ijassa-479	37	24	chemical	chemical	NOUN
ijassa-479	37	25	resistance	resistance	NOUN
ijassa-479	37	26	and	and	CCONJ
ijassa-479	37	27	biocompatibility	biocompatibility	NOUN
ijassa-479	38	1	[	[	X
ijassa-479	38	2	11	11	NUM
ijassa-479	38	3	]	]	PUNCT
ijassa-479	38	4	.	.	PUNCT
ijassa-479	39	1	2	2	NUM
ijassa-479	39	2	expermental	expermental	ADJ
ijassa-479	39	3	and	and	CCONJ
ijassa-479	39	4	simulation	simulation	NOUN
ijassa-479	39	5	laser	laser	NOUN
ijassa-479	39	6	source	source	NOUN
ijassa-479	39	7	emits	emit	VERB
ijassa-479	39	8	the	the	DET
ijassa-479	39	9	light	light	NOUN
ijassa-479	39	10	of	of	ADP
ijassa-479	39	11	wavelength	wavelength	NOUN
ijassa-479	39	12	(	(	PUNCT
ijassa-479	39	13	λ=850nanaometers).this	λ=850nanaometers).this	PRON
ijassa-479	39	14	laser	laser	NOUN
ijassa-479	39	15	beam	beam	NOUN
ijassa-479	39	16	is	be	AUX
ijassa-479	39	17	then	then	ADV
ijassa-479	39	18	passing	pass	VERB
ijassa-479	39	19	through	through	ADP
ijassa-479	39	20	the	the	DET
ijassa-479	39	21	two	two	NUM
ijassa-479	39	22	optical	optical	ADJ
ijassa-479	39	23	fibers	fiber	NOUN
ijassa-479	39	24	separated	separate	VERB
ijassa-479	39	25	apart	apart	ADV
ijassa-479	39	26	axially	axially	ADV
ijassa-479	39	27	.	.	PUNCT
ijassa-479	40	1	the	the	DET
ijassa-479	40	2	cantilever	cantilever	NOUN
ijassa-479	40	3	structure	structure	NOUN
ijassa-479	40	4	is	be	AUX
ijassa-479	40	5	fixed	fix	VERB
ijassa-479	40	6	at	at	ADP
ijassa-479	40	7	one	one	NUM
ijassa-479	40	8	end	end	NOUN
ijassa-479	40	9	and	and	CCONJ
ijassa-479	40	10	free	free	ADJ
ijassa-479	40	11	at	at	ADP
ijassa-479	40	12	other	other	ADJ
ijassa-479	40	13	end	end	NOUN
ijassa-479	40	14	.	.	PUNCT
ijassa-479	41	1	a	a	DET
ijassa-479	41	2	slit	slit	NOUN
ijassa-479	41	3	is	be	AUX
ijassa-479	41	4	connected	connect	VERB
ijassa-479	41	5	at	at	ADP
ijassa-479	41	6	the	the	DET
ijassa-479	41	7	free	free	ADJ
ijassa-479	41	8	end	end	NOUN
ijassa-479	41	9	of	of	ADP
ijassa-479	41	10	the	the	DET
ijassa-479	41	11	cantilever	cantilever	NOUN
ijassa-479	41	12	moves	move	NOUN
ijassa-479	41	13	between	between	ADP
ijassa-479	41	14	the	the	DET
ijassa-479	41	15	two	two	NUM
ijassa-479	41	16	optical	optical	ADJ
ijassa-479	41	17	fibers	fiber	NOUN
ijassa-479	41	18	when	when	SCONJ
ijassa-479	41	19	force	force	NOUN
ijassa-479	41	20	is	be	AUX
ijassa-479	41	21	applied	apply	VERB
ijassa-479	41	22	.	.	PUNCT
ijassa-479	42	1	the	the	DET
ijassa-479	42	2	deflection	deflection	NOUN
ijassa-479	42	3	of	of	ADP
ijassa-479	42	4	the	the	DET
ijassa-479	42	5	beam	beam	NOUN
ijassa-479	42	6	will	will	AUX
ijassa-479	42	7	be	be	AUX
ijassa-479	42	8	in	in	ADP
ijassa-479	42	9	y	y	PROPN
ijassa-479	42	10	direction	direction	NOUN
ijassa-479	42	11	and	and	CCONJ
ijassa-479	42	12	by	by	ADP
ijassa-479	42	13	virtue	virtue	NOUN
ijassa-479	42	14	of	of	ADP
ijassa-479	42	15	this	this	DET
ijassa-479	42	16	deflection	deflection	NOUN
ijassa-479	42	17	the	the	DET
ijassa-479	42	18	output	output	NOUN
ijassa-479	42	19	power	power	NOUN
ijassa-479	42	20	detected	detect	VERB
ijassa-479	42	21	at	at	ADP
ijassa-479	42	22	one	one	NUM
ijassa-479	42	23	of	of	ADP
ijassa-479	42	24	the	the	DET
ijassa-479	42	25	fiber	fiber	NOUN
ijassa-479	42	26	ends	end	VERB
ijassa-479	42	27	is	be	AUX
ijassa-479	42	28	varied	varied	ADJ
ijassa-479	42	29	continuously	continuously	ADV
ijassa-479	42	30	from	from	ADP
ijassa-479	42	31	maximum	maximum	ADJ
ijassa-479	42	32	to	to	ADP
ijassa-479	42	33	minimum	minimum	NOUN
ijassa-479	42	34	though	though	SCONJ
ijassa-479	42	35	the	the	DET
ijassa-479	42	36	slit	slit	NOUN
ijassa-479	42	37	arrangement	arrangement	NOUN
ijassa-479	42	38	as	as	SCONJ
ijassa-479	42	39	shown	show	VERB
ijassa-479	42	40	below	below	ADV
ijassa-479	42	41	.	.	PUNCT
ijassa-479	43	1	this	this	DET
ijassa-479	43	2	output	output	NOUN
ijassa-479	43	3	power	power	NOUN
ijassa-479	43	4	variation	variation	NOUN
ijassa-479	43	5	can	can	AUX
ijassa-479	43	6	be	be	AUX
ijassa-479	43	7	calibrated	calibrate	VERB
ijassa-479	43	8	according	accord	VERB
ijassa-479	43	9	to	to	ADP
ijassa-479	43	10	change	change	NOUN
ijassa-479	43	11	in	in	ADP
ijassa-479	43	12	minute	minute	ADJ
ijassa-479	43	13	force	force	NOUN
ijassa-479	43	14	variation	variation	NOUN
ijassa-479	43	15	over	over	ADP
ijassa-479	43	16	the	the	DET
ijassa-479	43	17	cantilever	cantilever	NOUN
ijassa-479	43	18	which	which	PRON
ijassa-479	43	19	in	in	ADP
ijassa-479	43	20	turn	turn	NOUN
ijassa-479	43	21	will	will	AUX
ijassa-479	43	22	constitute	constitute	VERB
ijassa-479	43	23	an	an	DET
ijassa-479	43	24	accurate	accurate	ADJ
ijassa-479	43	25	optical	optical	ADJ
ijassa-479	43	26	mems	mem	NOUN
ijassa-479	43	27	sensor	sensor	NOUN
ijassa-479	43	28	.	.	PUNCT
ijassa-479	44	1	the	the	DET
ijassa-479	44	2	light	light	NOUN
ijassa-479	44	3	coming	come	VERB
ijassa-479	44	4	out	out	ADP
ijassa-479	44	5	of	of	ADP
ijassa-479	44	6	the	the	DET
ijassa-479	44	7	second	second	ADJ
ijassa-479	44	8	optical	optical	ADJ
ijassa-479	44	9	fiber	fiber	NOUN
ijassa-479	44	10	is	be	AUX
ijassa-479	44	11	detected	detect	VERB
ijassa-479	44	12	by	by	ADP
ijassa-479	44	13	the	the	DET
ijassa-479	44	14	photo	photo	NOUN
ijassa-479	44	15	detector	detector	NOUN
ijassa-479	44	16	.	.	PUNCT
ijassa-479	45	1	78	78	NUM
ijassa-479	45	2	i.	i.	NOUN
ijassa-479	45	3	mala	mala	PROPN
ijassa-479	45	4	serene	serene	PROPN
ijassa-479	45	5	,	,	PUNCT
ijassa-479	45	6	rajasekhara	rajasekhara	PROPN
ijassa-479	45	7	babu	babu	PROPN
ijassa-479	45	8	m	m	PROPN
ijassa-479	45	9	and	and	CCONJ
ijassa-479	45	10	zachariah.c.alex	zachariah.c.alex	PROPN
ijassa-479	45	11	:	:	PUNCT
ijassa-479	45	12	optical	optical	ADJ
ijassa-479	45	13	mems	mem	NOUN
ijassa-479	45	14	sensor	sensor	NOUN
ijassa-479	45	15	for	for	ADP
ijassa-479	45	16	...	...	PUNCT
ijassa-479	45	17	fig	fig	NOUN
ijassa-479	45	18	.	.	PUNCT
ijassa-479	46	1	1	1	NUM
ijassa-479	46	2	flowchart	flowchart	NOUN
ijassa-479	46	3	of	of	ADP
ijassa-479	46	4	individual	individual	ADJ
ijassa-479	46	5	particle	particle	NOUN
ijassa-479	46	6	update	update	NOUN
ijassa-479	46	7	3	3	NUM
ijassa-479	46	8	details	detail	NOUN
ijassa-479	46	9	of	of	ADP
ijassa-479	46	10	software	software	NOUN
ijassa-479	46	11	development	development	NOUN
ijassa-479	46	12	in	in	ADP
ijassa-479	46	13	the	the	DET
ijassa-479	46	14	present	present	ADJ
ijassa-479	46	15	investigation	investigation	NOUN
ijassa-479	46	16	,	,	PUNCT
ijassa-479	46	17	we	we	PRON
ijassa-479	46	18	have	have	AUX
ijassa-479	46	19	developed	develop	VERB
ijassa-479	46	20	software	software	NOUN
ijassa-479	46	21	codes	code	NOUN
ijassa-479	46	22	for	for	ADP
ijassa-479	46	23	various	various	ADJ
ijassa-479	46	24	actors	actor	NOUN
ijassa-479	46	25	that	that	PRON
ijassa-479	46	26	make	make	VERB
ijassa-479	46	27	an	an	DET
ijassa-479	46	28	optical	optical	ADJ
ijassa-479	46	29	mems	mem	NOUN
ijassa-479	46	30	sensor	sensor	NOUN
ijassa-479	46	31	in	in	ADP
ijassa-479	46	32	a	a	DET
ijassa-479	46	33	software	software	NOUN
ijassa-479	46	34	platform	platform	NOUN
ijassa-479	46	35	called	call	VERB
ijassa-479	46	36	ptolemy	ptolemy	PROPN
ijassa-479	46	37	.	.	PUNCT
ijassa-479	47	1	the	the	DET
ijassa-479	47	2	various	various	ADJ
ijassa-479	47	3	actors	actor	NOUN
ijassa-479	47	4	are	be	AUX
ijassa-479	47	5	laser	laser	NOUN
ijassa-479	47	6	,	,	PUNCT
ijassa-479	47	7	a	a	DET
ijassa-479	47	8	photo	photo	NOUN
ijassa-479	47	9	detector	detector	NOUN
ijassa-479	47	10	and	and	CCONJ
ijassa-479	47	11	a	a	DET
ijassa-479	47	12	force	force	NOUN
ijassa-479	47	13	actor	actor	NOUN
ijassa-479	47	14	.	.	PUNCT
ijassa-479	48	1	the	the	DET
ijassa-479	48	2	individual	individual	ADJ
ijassa-479	48	3	figures	figure	NOUN
ijassa-479	48	4	of	of	ADP
ijassa-479	48	5	the	the	DET
ijassa-479	48	6	various	various	ADJ
ijassa-479	48	7	actors	actor	NOUN
ijassa-479	48	8	like	like	ADP
ijassa-479	48	9	laser	laser	NOUN
ijassa-479	48	10	actor	actor	NOUN
ijassa-479	48	11	,	,	PUNCT
ijassa-479	48	12	force	force	NOUN
ijassa-479	48	13	actor	actor	NOUN
ijassa-479	48	14	and	and	CCONJ
ijassa-479	48	15	photodiode	photodiode	NOUN
ijassa-479	48	16	actor	actor	NOUN
ijassa-479	48	17	are	be	AUX
ijassa-479	48	18	given	give	VERB
ijassa-479	48	19	in	in	ADP
ijassa-479	48	20	the	the	DET
ijassa-479	48	21	fig	fig	NOUN
ijassa-479	48	22	2	2	NUM
ijassa-479	48	23	(	(	PUNCT
ijassa-479	48	24	a)-(c	a)-(c	NOUN
ijassa-479	48	25	)	)	PUNCT
ijassa-479	48	26	below	below	ADP
ijassa-479	48	27	:	:	PUNCT
ijassa-479	48	28	fig	fig	NOUN
ijassa-479	48	29	.	.	PUNCT
ijassa-479	49	1	2	2	NUM
ijassa-479	49	2	(	(	PUNCT
ijassa-479	49	3	a	a	PRON
ijassa-479	49	4	)	)	PUNCT
ijassa-479	49	5	laser	laser	NOUN
ijassa-479	49	6	actor	actor	NOUN
ijassa-479	49	7	(	(	PUNCT
ijassa-479	49	8	b	b	NOUN
ijassa-479	49	9	)	)	PUNCT
ijassa-479	49	10	force	force	NOUN
ijassa-479	49	11	actor	actor	NOUN
ijassa-479	49	12	and	and	CCONJ
ijassa-479	49	13	(	(	PUNCT
ijassa-479	49	14	c	c	NOUN
ijassa-479	49	15	)	)	PUNCT
ijassa-479	49	16	photodiode	photodiode	NOUN
ijassa-479	49	17	actor	actor	NOUN
ijassa-479	49	18	3.1	3.1	NUM
ijassa-479	49	19	laser	laser	NOUN
ijassa-479	49	20	actor	actor	NOUN
ijassa-479	49	21	the	the	DET
ijassa-479	49	22	abbreviation	abbreviation	NOUN
ijassa-479	49	23	of	of	ADP
ijassa-479	49	24	laser	laser	NOUN
ijassa-479	49	25	is	be	AUX
ijassa-479	49	26	light	light	ADJ
ijassa-479	49	27	amplification	amplification	NOUN
ijassa-479	49	28	by	by	ADP
ijassa-479	49	29	stimulated	stimulated	ADJ
ijassa-479	49	30	emission	emission	NOUN
ijassa-479	49	31	of	of	ADP
ijassa-479	49	32	radiation	radiation	NOUN
ijassa-479	49	33	.	.	PUNCT
ijassa-479	50	1	laser	laser	NOUN
ijassa-479	50	2	operates	operate	VERB
ijassa-479	50	3	on	on	ADP
ijassa-479	50	4	the	the	DET
ijassa-479	50	5	principle	principle	NOUN
ijassa-479	50	6	called	call	VERB
ijassa-479	50	7	stimulated	stimulated	ADJ
ijassa-479	50	8	emission	emission	NOUN
ijassa-479	50	9	.	.	PUNCT
ijassa-479	51	1	it	it	PRON
ijassa-479	51	2	was	be	AUX
ijassa-479	51	3	postulated	postulate	VERB
ijassa-479	51	4	by	by	ADP
ijassa-479	51	5	albert	albert	PROPN
ijassa-479	51	6	einstein	einstein	PROPN
ijassa-479	51	7	before	before	ADP
ijassa-479	51	8	1920	1920	NUM
ijassa-479	51	9	.	.	PUNCT
ijassa-479	52	1	this	this	PRON
ijassa-479	52	2	is	be	AUX
ijassa-479	52	3	a	a	DET
ijassa-479	52	4	semiconductor	semiconductor	NOUN
ijassa-479	52	5	laser	laser	NOUN
ijassa-479	52	6	diode	diode	NOUN
ijassa-479	52	7	(	(	PUNCT
ijassa-479	52	8	gaas	gaas	NOUN
ijassa-479	52	9	)	)	PUNCT
ijassa-479	52	10	which	which	PRON
ijassa-479	52	11	emits	emit	VERB
ijassa-479	52	12	light	light	NOUN
ijassa-479	52	13	when	when	SCONJ
ijassa-479	52	14	we	we	PRON
ijassa-479	52	15	apply	apply	VERB
ijassa-479	52	16	a	a	DET
ijassa-479	52	17	forward	forward	ADV
ijassa-479	52	18	biased	biased	ADJ
ijassa-479	52	19	across	across	ADP
ijassa-479	52	20	the	the	DET
ijassa-479	52	21	p	p	NOUN
ijassa-479	52	22	-	-	PUNCT
ijassa-479	52	23	n	n	NOUN
ijassa-479	52	24	junction	junction	NOUN
ijassa-479	52	25	.	.	PUNCT
ijassa-479	53	1	the	the	DET
ijassa-479	53	2	laser	laser	NOUN
ijassa-479	53	3	diode	diode	NOUN
ijassa-479	53	4	actor	actor	NOUN
ijassa-479	53	5	is	be	AUX
ijassa-479	53	6	modelled	model	VERB
ijassa-479	53	7	using	use	VERB
ijassa-479	53	8	the	the	DET
ijassa-479	53	9	mathematical	mathematical	ADJ
ijassa-479	53	10	equations	equation	NOUN
ijassa-479	53	11	which	which	PRON
ijassa-479	53	12	include	include	VERB
ijassa-479	53	13	internal	internal	ADJ
ijassa-479	53	14	power	power	NOUN
ijassa-479	53	15	of	of	ADP
ijassa-479	53	16	the	the	DET
ijassa-479	53	17	laser	laser	NOUN
ijassa-479	53	18	,	,	PUNCT
ijassa-479	53	19	external	external	ADJ
ijassa-479	53	20	power	power	NOUN
ijassa-479	53	21	of	of	ADP
ijassa-479	53	22	the	the	DET
ijassa-479	53	23	laser	laser	NOUN
ijassa-479	53	24	and	and	CCONJ
ijassa-479	53	25	reverse	reverse	ADJ
ijassa-479	53	26	leakage	leakage	NOUN
ijassa-479	53	27	current	current	NOUN
ijassa-479	53	28	of	of	ADP
ijassa-479	53	29	the	the	DET
ijassa-479	53	30	diode	diode	NOUN
ijassa-479	53	31	.	.	PUNCT
ijassa-479	54	1	the	the	DET
ijassa-479	54	2	external	external	ADJ
ijassa-479	54	3	power	power	NOUN
ijassa-479	54	4	of	of	ADP
ijassa-479	54	5	the	the	DET
ijassa-479	54	6	laser	laser	NOUN
ijassa-479	54	7	diode	diode	NOUN
ijassa-479	54	8	is	be	AUX
ijassa-479	54	9	given	give	VERB
ijassa-479	54	10	by	by	ADP
ijassa-479	54	11	po	po	NOUN
ijassa-479	54	12	=	=	NOUN
ijassa-479	54	13	pint	pint	NOUN
ijassa-479	54	14	n(n+	n(n+	NOUN
ijassa-479	54	15	1)2	1)2	NUM
ijassa-479	54	16	(	(	PUNCT
ijassa-479	54	17	1	1	NUM
ijassa-479	54	18	)	)	PUNCT
ijassa-479	54	19	where	where	SCONJ
ijassa-479	54	20	n	n	CCONJ
ijassa-479	54	21	,	,	PUNCT
ijassa-479	54	22	pint	pint	NOUN
ijassa-479	54	23	,	,	PUNCT
ijassa-479	54	24	po	po	PROPN
ijassa-479	54	25	is	be	AUX
ijassa-479	54	26	refractive	refractive	ADJ
ijassa-479	54	27	index	index	NOUN
ijassa-479	54	28	of	of	ADP
ijassa-479	54	29	the	the	DET
ijassa-479	54	30	gaas	gaas	NOUN
ijassa-479	54	31	,	,	PUNCT
ijassa-479	54	32	internal	internal	ADJ
ijassa-479	54	33	power	power	NOUN
ijassa-479	54	34	and	and	CCONJ
ijassa-479	54	35	external	external	ADJ
ijassa-479	54	36	power	power	NOUN
ijassa-479	54	37	of	of	ADP
ijassa-479	54	38	the	the	DET
ijassa-479	54	39	laser	laser	NOUN
ijassa-479	54	40	.	.	PUNCT
ijassa-479	55	1	advances	advance	NOUN
ijassa-479	55	2	in	in	ADP
ijassa-479	55	3	systems	system	NOUN
ijassa-479	55	4	science	science	NOUN
ijassa-479	55	5	and	and	CCONJ
ijassa-479	55	6	application	application	NOUN
ijassa-479	55	7	(	(	PUNCT
ijassa-479	55	8	2016	2016	NUM
ijassa-479	55	9	)	)	PUNCT
ijassa-479	56	1	vol.16	vol.16	PROPN
ijassa-479	56	2	no.3	no.3	VERB
ijassa-479	56	3	79	79	NUM
ijassa-479	56	4	3.2	3.2	NUM
ijassa-479	56	5	force	force	NOUN
ijassa-479	56	6	actor	actor	NOUN
ijassa-479	56	7	the	the	DET
ijassa-479	56	8	force	force	NOUN
ijassa-479	56	9	actor	actor	NOUN
ijassa-479	56	10	made	make	VERB
ijassa-479	56	11	of	of	ADP
ijassa-479	56	12	a	a	DET
ijassa-479	56	13	cantilever	cantilever	NOUN
ijassa-479	56	14	beam	beam	NOUN
ijassa-479	56	15	and	and	CCONJ
ijassa-479	56	16	two	two	NUM
ijassa-479	56	17	optical	optical	ADJ
ijassa-479	56	18	fibers	fiber	NOUN
ijassa-479	56	19	.	.	PUNCT
ijassa-479	57	1	the	the	DET
ijassa-479	57	2	deflection	deflection	NOUN
ijassa-479	57	3	of	of	ADP
ijassa-479	57	4	the	the	DET
ijassa-479	57	5	cantilever	cantilever	NOUN
ijassa-479	57	6	is	be	AUX
ijassa-479	57	7	modelled	model	VERB
ijassa-479	57	8	using	use	VERB
ijassa-479	57	9	stoneys	stoney	NOUN
ijassa-479	57	10	equation	equation	NOUN
ijassa-479	57	11	,	,	PUNCT
ijassa-479	57	12	spring	spring	NOUN
ijassa-479	57	13	constant	constant	ADJ
ijassa-479	57	14	and	and	CCONJ
ijassa-479	57	15	the	the	DET
ijassa-479	57	16	three	three	NUM
ijassa-479	57	17	modes	mode	NOUN
ijassa-479	57	18	of	of	ADP
ijassa-479	57	19	the	the	DET
ijassa-479	57	20	resonant	resonant	ADJ
ijassa-479	57	21	frequency	frequency	NOUN
ijassa-479	57	22	.	.	PUNCT
ijassa-479	58	1	the	the	DET
ijassa-479	58	2	optical	optical	ADJ
ijassa-479	58	3	fiber	fiber	NOUN
ijassa-479	58	4	actor	actor	NOUN
ijassa-479	58	5	is	be	AUX
ijassa-479	58	6	created	create	VERB
ijassa-479	58	7	using	use	VERB
ijassa-479	58	8	the	the	DET
ijassa-479	58	9	power	power	NOUN
ijassa-479	58	10	output	output	NOUN
ijassa-479	58	11	detected	detect	VERB
ijassa-479	58	12	at	at	ADP
ijassa-479	58	13	the	the	DET
ijassa-479	58	14	second	second	ADJ
ijassa-479	58	15	fiber	fiber	NOUN
ijassa-479	58	16	and	and	CCONJ
ijassa-479	58	17	the	the	DET
ijassa-479	58	18	loss	loss	NOUN
ijassa-479	58	19	of	of	ADP
ijassa-479	58	20	light	light	NOUN
ijassa-479	58	21	due	due	ADP
ijassa-479	58	22	to	to	ADP
ijassa-479	58	23	the	the	DET
ijassa-479	58	24	force	force	NOUN
ijassa-479	58	25	applied	apply	VERB
ijassa-479	58	26	on	on	ADP
ijassa-479	58	27	the	the	DET
ijassa-479	58	28	cantilever	cantilever	NOUN
ijassa-479	58	29	.	.	PUNCT
ijassa-479	59	1	3.2.1	3.2.1	NUM
ijassa-479	59	2	cantilever	cantilever	NOUN
ijassa-479	59	3	beam	beam	NOUN
ijassa-479	59	4	micro	micro	PROPN
ijassa-479	59	5	cantilever	cantilever	NOUN
ijassa-479	59	6	is	be	AUX
ijassa-479	59	7	a	a	DET
ijassa-479	59	8	widely	widely	ADV
ijassa-479	59	9	used	use	VERB
ijassa-479	59	10	component	component	NOUN
ijassa-479	59	11	in	in	ADP
ijassa-479	59	12	micro	micro	ADJ
ijassa-479	59	13	electro	electro	VERB
ijassa-479	59	14	mechanical	mechanical	ADJ
ijassa-479	59	15	system	system	NOUN
ijassa-479	59	16	devices	device	NOUN
ijassa-479	59	17	[	[	X
ijassa-479	59	18	12	12	NUM
ijassa-479	59	19	]	]	PUNCT
ijassa-479	59	20	.	.	PUNCT
ijassa-479	60	1	cantilever	cantilever	NOUN
ijassa-479	60	2	is	be	AUX
ijassa-479	60	3	a	a	DET
ijassa-479	60	4	type	type	NOUN
ijassa-479	60	5	of	of	ADP
ijassa-479	60	6	beam	beam	NOUN
ijassa-479	60	7	fixed	fix	VERB
ijassa-479	60	8	at	at	ADP
ijassa-479	60	9	one	one	NUM
ijassa-479	60	10	end	end	NOUN
ijassa-479	60	11	and	and	CCONJ
ijassa-479	60	12	suspended	suspend	VERB
ijassa-479	60	13	freely	freely	ADV
ijassa-479	60	14	at	at	ADP
ijassa-479	60	15	the	the	DET
ijassa-479	60	16	other	other	ADJ
ijassa-479	60	17	end	end	NOUN
ijassa-479	60	18	and	and	CCONJ
ijassa-479	60	19	the	the	DET
ijassa-479	60	20	beam	beam	NOUN
ijassa-479	60	21	is	be	AUX
ijassa-479	60	22	originally	originally	ADV
ijassa-479	60	23	straight	straight	ADJ
ijassa-479	60	24	.	.	PUNCT
ijassa-479	61	1	the	the	DET
ijassa-479	61	2	equation	equation	NOUN
ijassa-479	61	3	(	(	PUNCT
ijassa-479	61	4	2	2	X
ijassa-479	61	5	)	)	PUNCT
ijassa-479	61	6	is	be	AUX
ijassa-479	61	7	the	the	DET
ijassa-479	61	8	stoneys	stoney	NOUN
ijassa-479	61	9	formula	formula	NOUN
ijassa-479	61	10	[	[	X
ijassa-479	61	11	13	13	NUM
ijassa-479	61	12	]	]	PUNCT
ijassa-479	61	13	,	,	PUNCT
ijassa-479	61	14	which	which	PRON
ijassa-479	61	15	relates	relate	VERB
ijassa-479	61	16	cantilever	cantilever	NOUN
ijassa-479	61	17	end	end	VERB
ijassa-479	61	18	deflection	deflection	NOUN
ijassa-479	61	19	δ	δ	PROPN
ijassa-479	61	20	to	to	PART
ijassa-479	61	21	applied	apply	VERB
ijassa-479	61	22	stress	stress	NOUN
ijassa-479	61	23	σ	σ	PROPN
ijassa-479	61	24	:	:	PUNCT
ijassa-479	61	25	δ	δ	X
ijassa-479	61	26	=	=	SYM
ijassa-479	61	27	3σ(1−	3σ(1−	NUM
ijassa-479	61	28	ν	ν	NOUN
ijassa-479	61	29	)	)	PUNCT
ijassa-479	61	30	e	e	NOUN
ijassa-479	61	31	(	(	PUNCT
ijassa-479	61	32	l	l	NOUN
ijassa-479	61	33	t	t	NOUN
ijassa-479	61	34	)	)	PUNCT
ijassa-479	61	35	2	2	NUM
ijassa-479	61	36	(	(	PUNCT
ijassa-479	61	37	2	2	NUM
ijassa-479	61	38	)	)	PUNCT
ijassa-479	61	39	where	where	SCONJ
ijassa-479	61	40	δ	δ	PROPN
ijassa-479	61	41	,	,	PUNCT
ijassa-479	61	42	σ	σ	PROPN
ijassa-479	61	43	,	,	PUNCT
ijassa-479	61	44	l	l	PROPN
ijassa-479	61	45	,	,	PUNCT
ijassa-479	61	46	t	t	PROPN
ijassa-479	61	47	,	,	PUNCT
ijassa-479	61	48	e	e	NOUN
ijassa-479	61	49	,	,	PUNCT
ijassa-479	61	50	ν	ν	NOUN
ijassa-479	61	51	are	be	AUX
ijassa-479	61	52	deflection	deflection	NOUN
ijassa-479	61	53	,	,	PUNCT
ijassa-479	61	54	stress	stress	NOUN
ijassa-479	61	55	,	,	PUNCT
ijassa-479	61	56	length	length	NOUN
ijassa-479	61	57	of	of	ADP
ijassa-479	61	58	the	the	DET
ijassa-479	61	59	cantilever	cantilever	NOUN
ijassa-479	61	60	beam	beam	NOUN
ijassa-479	61	61	,	,	PUNCT
ijassa-479	61	62	youngs	young	NOUN
ijassa-479	61	63	modulus	modulus	NOUN
ijassa-479	61	64	,	,	PUNCT
ijassa-479	61	65	poissons	poisson	NOUN
ijassa-479	61	66	ratio	ratio	NOUN
ijassa-479	61	67	.	.	PUNCT
ijassa-479	62	1	the	the	DET
ijassa-479	62	2	spring	spring	NOUN
ijassa-479	62	3	constant	constant	ADJ
ijassa-479	62	4	(	(	PUNCT
ijassa-479	62	5	k	k	NOUN
ijassa-479	62	6	)	)	PUNCT
ijassa-479	62	7	of	of	ADP
ijassa-479	62	8	the	the	DET
ijassa-479	62	9	cantilever	cantilever	NOUN
ijassa-479	62	10	beam	beam	NOUN
ijassa-479	62	11	is	be	AUX
ijassa-479	62	12	given	give	VERB
ijassa-479	62	13	by	by	ADP
ijassa-479	62	14	k	k	PROPN
ijassa-479	62	15	=	=	SYM
ijassa-479	62	16	ewt3	ewt3	NOUN
ijassa-479	62	17	4l3	4l3	NUM
ijassa-479	62	18	(	(	PUNCT
ijassa-479	62	19	3	3	NUM
ijassa-479	62	20	)	)	PUNCT
ijassa-479	62	21	where	where	SCONJ
ijassa-479	62	22	e	e	NOUN
ijassa-479	62	23	,	,	PUNCT
ijassa-479	62	24	w	w	PROPN
ijassa-479	62	25	,	,	PUNCT
ijassa-479	62	26	t	t	PROPN
ijassa-479	62	27	and	and	CCONJ
ijassa-479	62	28	l	l	NOUN
ijassa-479	62	29	are	be	AUX
ijassa-479	62	30	the	the	DET
ijassa-479	62	31	youngs	young	NOUN
ijassa-479	62	32	modulus	modulus	ADJ
ijassa-479	62	33	,	,	PUNCT
ijassa-479	62	34	width	width	ADJ
ijassa-479	62	35	,	,	PUNCT
ijassa-479	62	36	thickness	thickness	NOUN
ijassa-479	62	37	and	and	CCONJ
ijassa-479	62	38	length	length	NOUN
ijassa-479	62	39	of	of	ADP
ijassa-479	62	40	the	the	DET
ijassa-479	62	41	cantilever	cantilever	NOUN
ijassa-479	62	42	beam	beam	NOUN
ijassa-479	62	43	.	.	PUNCT
ijassa-479	63	1	the	the	DET
ijassa-479	63	2	frequency	frequency	NOUN
ijassa-479	63	3	at	at	ADP
ijassa-479	63	4	which	which	PRON
ijassa-479	63	5	a	a	DET
ijassa-479	63	6	cantilever	cantilever	NOUN
ijassa-479	63	7	tends	tend	VERB
ijassa-479	63	8	to	to	PART
ijassa-479	63	9	oscillate	oscillate	VERB
ijassa-479	63	10	in	in	ADP
ijassa-479	63	11	the	the	DET
ijassa-479	63	12	absence	absence	NOUN
ijassa-479	63	13	of	of	ADP
ijassa-479	63	14	any	any	DET
ijassa-479	63	15	force	force	NOUN
ijassa-479	63	16	is	be	AUX
ijassa-479	63	17	the	the	DET
ijassa-479	63	18	eigen	eigen	PROPN
ijassa-479	63	19	frequency	frequency	PROPN
ijassa-479	63	20	.the	.the	PUNCT
ijassa-479	63	21	eigen	eigen	PROPN
ijassa-479	63	22	frequency	frequency	NOUN
ijassa-479	63	23	of	of	ADP
ijassa-479	63	24	a	a	DET
ijassa-479	63	25	cantilever	cantilever	NOUN
ijassa-479	63	26	beam	beam	NOUN
ijassa-479	63	27	[	[	X
ijassa-479	63	28	14	14	NUM
ijassa-479	63	29	]	]	PUNCT
ijassa-479	63	30	can	can	AUX
ijassa-479	63	31	be	be	AUX
ijassa-479	63	32	find	find	VERB
ijassa-479	63	33	out	out	ADP
ijassa-479	63	34	from	from	ADP
ijassa-479	63	35	the	the	DET
ijassa-479	63	36	optimized	optimize	VERB
ijassa-479	63	37	cantilever	cantilever	NOUN
ijassa-479	63	38	geometry	geometry	NOUN
ijassa-479	63	39	for	for	ADP
ijassa-479	63	40	the	the	DET
ijassa-479	63	41	l	l	NOUN
ijassa-479	63	42	and	and	CCONJ
ijassa-479	63	43	t	t	PROPN
ijassa-479	63	44	and	and	CCONJ
ijassa-479	63	45	density	density	NOUN
ijassa-479	63	46	,	,	PUNCT
ijassa-479	63	47	for	for	SCONJ
ijassa-479	63	48	the	the	DET
ijassa-479	63	49	two	two	NUM
ijassa-479	63	50	sensors	sensor	NOUN
ijassa-479	63	51	is	be	AUX
ijassa-479	63	52	given	give	VERB
ijassa-479	63	53	by	by	ADP
ijassa-479	63	54	f	f	PROPN
ijassa-479	63	55	=	=	SYM
ijassa-479	63	56	αn	αn	PROPN
ijassa-479	63	57	t	t	NOUN
ijassa-479	63	58	l2	l2	NOUN
ijassa-479	63	59	√	√	PROPN
ijassa-479	63	60	e	e	PROPN
ijassa-479	63	61	ρ	ρ	PROPN
ijassa-479	63	62	(	(	PUNCT
ijassa-479	63	63	4	4	NUM
ijassa-479	63	64	)	)	PUNCT
ijassa-479	63	65	αn	αn	NOUN
ijassa-479	64	1	=	=	SYM
ijassa-479	64	2	1	1	NUM
ijassa-479	64	3	4π	4π	NUM
ijassa-479	64	4	√	√	NUM
ijassa-479	64	5	ε	ε	PROPN
ijassa-479	64	6	λ2	λ2	PROPN
ijassa-479	64	7	n	n	CCONJ
ijassa-479	64	8	(	(	PUNCT
ijassa-479	64	9	5	5	NUM
ijassa-479	64	10	)	)	PUNCT
ijassa-479	64	11	where	where	SCONJ
ijassa-479	64	12	λn=1.8751	λn=1.8751	NOUN
ijassa-479	64	13	,	,	PUNCT
ijassa-479	64	14	4.6941	4.6941	NUM
ijassa-479	64	15	,	,	PUNCT
ijassa-479	64	16	7.8547	7.8547	NUM
ijassa-479	64	17	......	......	PUNCT
ijassa-479	65	1	3.2.2	3.2.2	NUM
ijassa-479	65	2	optical	optical	ADJ
ijassa-479	65	3	fibre	fibre	NOUN
ijassa-479	65	4	we	we	PRON
ijassa-479	65	5	have	have	AUX
ijassa-479	65	6	designed	design	VERB
ijassa-479	65	7	two	two	NUM
ijassa-479	65	8	fibres	fibre	NOUN
ijassa-479	65	9	with	with	ADP
ijassa-479	65	10	core	core	ADJ
ijassa-479	65	11	diameter	diameter	NOUN
ijassa-479	65	12	2a=	2a=	NUM
ijassa-479	65	13	175	175	NUM
ijassa-479	65	14	m	m	AUX
ijassa-479	65	15	coupled	couple	VERB
ijassa-479	65	16	longitudinally	longitudinally	ADV
ijassa-479	65	17	such	such	ADJ
ijassa-479	65	18	that	that	SCONJ
ijassa-479	65	19	the	the	DET
ijassa-479	65	20	free	free	ADJ
ijassa-479	65	21	end	end	NOUN
ijassa-479	65	22	of	of	ADP
ijassa-479	65	23	the	the	DET
ijassa-479	65	24	cantilever	cantilever	NOUN
ijassa-479	65	25	will	will	AUX
ijassa-479	65	26	move	move	VERB
ijassa-479	65	27	the	the	DET
ijassa-479	65	28	slit	slit	NOUN
ijassa-479	65	29	vertically	vertically	ADV
ijassa-479	65	30	down	down	ADV
ijassa-479	65	31	between	between	ADP
ijassa-479	65	32	the	the	DET
ijassa-479	65	33	fiber	fiber	NOUN
ijassa-479	65	34	ends	end	VERB
ijassa-479	65	35	as	as	SCONJ
ijassa-479	65	36	force	force	NOUN
ijassa-479	65	37	is	be	AUX
ijassa-479	65	38	applied	apply	VERB
ijassa-479	65	39	on	on	ADP
ijassa-479	65	40	it	it	PRON
ijassa-479	65	41	.	.	PUNCT
ijassa-479	66	1	as	as	ADP
ijassa-479	66	2	a	a	DET
ijassa-479	66	3	result	result	NOUN
ijassa-479	66	4	the	the	DET
ijassa-479	66	5	light	light	NOUN
ijassa-479	66	6	coupled	couple	VERB
ijassa-479	66	7	from	from	ADP
ijassa-479	66	8	fiber1	fiber1	PROPN
ijassa-479	66	9	to	to	PART
ijassa-479	66	10	fiber2	fiber2	VERB
ijassa-479	66	11	decreases	decrease	NOUN
ijassa-479	66	12	gradually	gradually	ADV
ijassa-479	66	13	as	as	ADP
ijassa-479	66	14	the	the	DET
ijassa-479	66	15	amount	amount	NOUN
ijassa-479	66	16	of	of	ADP
ijassa-479	66	17	force	force	NOUN
ijassa-479	66	18	increases	increase	NOUN
ijassa-479	66	19	.	.	PUNCT
ijassa-479	67	1	there	there	PRON
ijassa-479	67	2	are	be	VERB
ijassa-479	67	3	two	two	NUM
ijassa-479	67	4	formulas	formula	NOUN
ijassa-479	67	5	used	use	VERB
ijassa-479	67	6	for	for	ADP
ijassa-479	67	7	calculating	calculate	VERB
ijassa-479	67	8	loss	loss	NOUN
ijassa-479	67	9	and	and	CCONJ
ijassa-479	67	10	power	power	NOUN
ijassa-479	67	11	detected	detect	VERB
ijassa-479	67	12	at	at	ADP
ijassa-479	67	13	the	the	DET
ijassa-479	67	14	second	second	ADJ
ijassa-479	67	15	at	at	ADP
ijassa-479	67	16	the	the	DET
ijassa-479	67	17	second	second	ADJ
ijassa-479	67	18	fiber	fiber	NOUN
ijassa-479	67	19	is	be	AUX
ijassa-479	67	20	given	give	VERB
ijassa-479	67	21	below	below	ADV
ijassa-479	67	22	.	.	PUNCT
ijassa-479	68	1	pout	pout	NOUN
ijassa-479	68	2	=	=	PUNCT
ijassa-479	68	3	pin	pin	PROPN
ijassa-479	68	4	[	[	PUNCT
ijassa-479	68	5	1−	1−	NUM
ijassa-479	68	6	(	(	PUNCT
ijassa-479	68	7	w	w	PROPN
ijassa-479	68	8	2a	2a	NUM
ijassa-479	68	9	)	)	PUNCT
ijassa-479	68	10	]	]	PUNCT
ijassa-479	68	11	(	(	PUNCT
ijassa-479	68	12	6	6	NUM
ijassa-479	68	13	)	)	SYM
ijassa-479	68	14	80	80	NUM
ijassa-479	68	15	i.	i.	NOUN
ijassa-479	68	16	mala	mala	PROPN
ijassa-479	68	17	serene	serene	PROPN
ijassa-479	68	18	,	,	PUNCT
ijassa-479	68	19	rajasekhara	rajasekhara	PROPN
ijassa-479	68	20	babu	babu	PROPN
ijassa-479	68	21	m	m	PROPN
ijassa-479	68	22	and	and	CCONJ
ijassa-479	68	23	zachariah.c.alex	zachariah.c.alex	PROPN
ijassa-479	68	24	:	:	PUNCT
ijassa-479	68	25	optical	optical	ADJ
ijassa-479	68	26	mems	mem	NOUN
ijassa-479	68	27	sensor	sensor	NOUN
ijassa-479	68	28	for	for	ADP
ijassa-479	68	29	...	...	PUNCT
ijassa-479	68	30	loss	loss	NOUN
ijassa-479	68	31	=	=	SYM
ijassa-479	68	32	20log10a	20log10a	NUM
ijassa-479	68	33	(	(	PUNCT
ijassa-479	68	34	7	7	NUM
ijassa-479	68	35	)	)	PUNCT
ijassa-479	68	36	where	where	SCONJ
ijassa-479	68	37	a	a	PRON
ijassa-479	68	38	stands	stand	VERB
ijassa-479	68	39	for	for	ADP
ijassa-479	68	40	ratio	ratio	NOUN
ijassa-479	68	41	of	of	ADP
ijassa-479	68	42	pout	pout	NOUN
ijassa-479	68	43	/	/	SYM
ijassa-479	68	44	pin	pin	NOUN
ijassa-479	68	45	.	.	PUNCT
ijassa-479	69	1	loss	loss	NOUN
ijassa-479	69	2	is	be	AUX
ijassa-479	69	3	a	a	DET
ijassa-479	69	4	function	function	NOUN
ijassa-479	69	5	f(w	f(w	PROPN
ijassa-479	69	6	)	)	PUNCT
ijassa-479	69	7	,	,	PUNCT
ijassa-479	69	8	where	where	SCONJ
ijassa-479	69	9	w	w	NOUN
ijassa-479	69	10	is	be	AUX
ijassa-479	69	11	the	the	DET
ijassa-479	69	12	cantilever	cantilever	NOUN
ijassa-479	69	13	deflection	deflection	NOUN
ijassa-479	69	14	,	,	PUNCT
ijassa-479	69	15	which	which	PRON
ijassa-479	69	16	is	be	AUX
ijassa-479	69	17	numerically	numerically	ADV
ijassa-479	69	18	equal	equal	ADJ
ijassa-479	69	19	to	to	ADP
ijassa-479	69	20	w/2a	w/2a	VERB
ijassa-479	69	21	,	,	PUNCT
ijassa-479	69	22	where	where	SCONJ
ijassa-479	69	23	2a	2a	NUM
ijassa-479	69	24	is	be	AUX
ijassa-479	69	25	the	the	DET
ijassa-479	69	26	fiber	fiber	NOUN
ijassa-479	69	27	diameter	diameter	NOUN
ijassa-479	69	28	.	.	PUNCT
ijassa-479	70	1	3.3	3.3	NUM
ijassa-479	70	2	detector	detector	NOUN
ijassa-479	70	3	actor	actor	NOUN
ijassa-479	70	4	a	a	DET
ijassa-479	70	5	photodiode	photodiode	NOUN
ijassa-479	70	6	is	be	AUX
ijassa-479	70	7	a	a	DET
ijassa-479	70	8	semiconductor	semiconductor	NOUN
ijassa-479	70	9	device	device	NOUN
ijassa-479	70	10	,	,	PUNCT
ijassa-479	70	11	with	with	ADP
ijassa-479	70	12	a	a	DET
ijassa-479	70	13	p	p	NOUN
ijassa-479	70	14	-	-	PUNCT
ijassa-479	70	15	n	n	NOUN
ijassa-479	70	16	junction	junction	NOUN
ijassa-479	70	17	and	and	CCONJ
ijassa-479	70	18	an	an	DET
ijassa-479	70	19	intrinsic	intrinsic	ADJ
ijassa-479	70	20	layer	layer	NOUN
ijassa-479	70	21	between	between	ADP
ijassa-479	70	22	p	p	PROPN
ijassa-479	70	23	and	and	CCONJ
ijassa-479	70	24	n	n	PRON
ijassa-479	70	25	layers	layer	NOUN
ijassa-479	70	26	.	.	PUNCT
ijassa-479	71	1	the	the	DET
ijassa-479	71	2	photo	photo	NOUN
ijassa-479	71	3	detector	detector	NOUN
ijassa-479	71	4	used	use	VERB
ijassa-479	71	5	is	be	AUX
ijassa-479	71	6	a	a	DET
ijassa-479	71	7	reverse	reverse	ADJ
ijassa-479	71	8	biased	biased	ADJ
ijassa-479	71	9	photodiode	photodiode	NOUN
ijassa-479	71	10	(	(	PUNCT
ijassa-479	71	11	pd	pd	NOUN
ijassa-479	71	12	)	)	PUNCT
ijassa-479	71	13	which	which	PRON
ijassa-479	71	14	converts	convert	VERB
ijassa-479	71	15	the	the	DET
ijassa-479	71	16	input	input	NOUN
ijassa-479	71	17	optical	optical	ADJ
ijassa-479	71	18	power	power	NOUN
ijassa-479	71	19	into	into	ADP
ijassa-479	71	20	the	the	DET
ijassa-479	71	21	photo	photo	NOUN
ijassa-479	71	22	current	current	NOUN
ijassa-479	71	23	(	(	PUNCT
ijassa-479	71	24	ip	ip	NOUN
ijassa-479	71	25	)	)	PUNCT
ijassa-479	71	26	.	.	PUNCT
ijassa-479	72	1	the	the	DET
ijassa-479	72	2	following	follow	VERB
ijassa-479	72	3	formulas	formula	NOUN
ijassa-479	72	4	are	be	AUX
ijassa-479	72	5	applied	apply	VERB
ijassa-479	72	6	to	to	PART
ijassa-479	72	7	create	create	VERB
ijassa-479	72	8	a	a	DET
ijassa-479	72	9	detector	detector	NOUN
ijassa-479	72	10	actor	actor	NOUN
ijassa-479	72	11	:	:	PUNCT
ijassa-479	72	12	the	the	DET
ijassa-479	72	13	photocurrent	photocurrent	NOUN
ijassa-479	72	14	is	be	AUX
ijassa-479	72	15	given	give	VERB
ijassa-479	72	16	by	by	ADP
ijassa-479	72	17	i	i	PROPN
ijassa-479	72	18	=	=	PUNCT
ijassa-479	72	19	rpout	rpout	NOUN
ijassa-479	72	20	(	(	PUNCT
ijassa-479	72	21	8)	8)	NUM
ijassa-479	72	22	the	the	DET
ijassa-479	72	23	responsivity	responsivity	NOUN
ijassa-479	72	24	measure	measure	NOUN
ijassa-479	72	25	the	the	DET
ijassa-479	72	26	electrical	electrical	ADJ
ijassa-479	72	27	output	output	NOUN
ijassa-479	72	28	per	per	ADP
ijassa-479	72	29	optical	optical	ADJ
ijassa-479	72	30	input	input	NOUN
ijassa-479	72	31	of	of	ADP
ijassa-479	72	32	the	the	DET
ijassa-479	72	33	photodiode	photodiode	NOUN
ijassa-479	72	34	is	be	AUX
ijassa-479	72	35	given	give	VERB
ijassa-479	72	36	by	by	ADP
ijassa-479	72	37	r	r	NOUN
ijassa-479	72	38	=	=	PUNCT
ijassa-479	72	39	ηqλ	ηqλ	NOUN
ijassa-479	72	40	hc	hc	PROPN
ijassa-479	72	41	(	(	PUNCT
ijassa-479	72	42	9	9	NUM
ijassa-479	72	43	)	)	PUNCT
ijassa-479	72	44	where	where	SCONJ
ijassa-479	72	45	η	η	NOUN
ijassa-479	72	46	,	,	PUNCT
ijassa-479	72	47	q	q	NOUN
ijassa-479	72	48	,	,	PUNCT
ijassa-479	72	49	h	h	NOUN
ijassa-479	72	50	,	,	PUNCT
ijassa-479	72	51	c	c	X
ijassa-479	72	52	,	,	PUNCT
ijassa-479	72	53	λ	λ	NOUN
ijassa-479	72	54	are	be	AUX
ijassa-479	72	55	internal	internal	ADJ
ijassa-479	72	56	quantum	quantum	ADJ
ijassa-479	72	57	efficiency	efficiency	NOUN
ijassa-479	72	58	,	,	PUNCT
ijassa-479	72	59	charge	charge	NOUN
ijassa-479	72	60	of	of	ADP
ijassa-479	72	61	electron	electron	NOUN
ijassa-479	72	62	,	,	PUNCT
ijassa-479	72	63	plancks	planck	NOUN
ijassa-479	72	64	constant	constant	ADJ
ijassa-479	72	65	,	,	PUNCT
ijassa-479	72	66	velocity	velocity	NOUN
ijassa-479	72	67	of	of	ADP
ijassa-479	72	68	light	light	NOUN
ijassa-479	72	69	in	in	ADP
ijassa-479	72	70	vacuum	vacuum	NOUN
ijassa-479	72	71	,	,	PUNCT
ijassa-479	72	72	wavelength	wavelength	NOUN
ijassa-479	72	73	of	of	ADP
ijassa-479	72	74	light	light	NOUN
ijassa-479	72	75	.	.	PUNCT
ijassa-479	73	1	using	use	VERB
ijassa-479	73	2	the	the	DET
ijassa-479	73	3	above	above	ADJ
ijassa-479	73	4	actors	actor	NOUN
ijassa-479	73	5	,	,	PUNCT
ijassa-479	73	6	the	the	DET
ijassa-479	73	7	optical	optical	ADJ
ijassa-479	73	8	mems	mem	NOUN
ijassa-479	73	9	sensor	sensor	NOUN
ijassa-479	73	10	model	model	NOUN
ijassa-479	73	11	are	be	AUX
ijassa-479	73	12	created	create	VERB
ijassa-479	73	13	in	in	ADP
ijassa-479	73	14	the	the	DET
ijassa-479	73	15	ptolemy	ptolemy	NOUN
ijassa-479	73	16	framework	framework	NOUN
ijassa-479	73	17	as	as	SCONJ
ijassa-479	73	18	shown	show	VERB
ijassa-479	73	19	in	in	ADP
ijassa-479	73	20	the	the	DET
ijassa-479	73	21	fig	fig	NOUN
ijassa-479	73	22	3	3	NUM
ijassa-479	73	23	and	and	CCONJ
ijassa-479	73	24	fig	fig	NOUN
ijassa-479	73	25	4	4	NUM
ijassa-479	73	26	.	.	PUNCT
ijassa-479	74	1	in	in	ADP
ijassa-479	74	2	the	the	DET
ijassa-479	74	3	present	present	ADJ
ijassa-479	74	4	work	work	NOUN
ijassa-479	74	5	,	,	PUNCT
ijassa-479	74	6	two	two	NUM
ijassa-479	74	7	force	force	NOUN
ijassa-479	74	8	actors	actor	NOUN
ijassa-479	74	9	were	be	AUX
ijassa-479	74	10	created	create	VERB
ijassa-479	74	11	using	use	VERB
ijassa-479	74	12	the	the	DET
ijassa-479	74	13	same	same	ADJ
ijassa-479	74	14	geometrical	geometrical	ADJ
ijassa-479	74	15	parameters	parameter	NOUN
ijassa-479	74	16	but	but	CCONJ
ijassa-479	74	17	the	the	DET
ijassa-479	74	18	cantilever	cantilever	NOUN
ijassa-479	74	19	beam	beam	NOUN
ijassa-479	74	20	is	be	AUX
ijassa-479	74	21	made	make	VERB
ijassa-479	74	22	of	of	ADP
ijassa-479	74	23	different	different	ADJ
ijassa-479	74	24	polymer	polymer	NOUN
ijassa-479	74	25	materials	material	NOUN
ijassa-479	74	26	like	like	ADP
ijassa-479	74	27	polyimide	polyimide	NOUN
ijassa-479	74	28	and	and	CCONJ
ijassa-479	74	29	parylene	parylene	NOUN
ijassa-479	74	30	.	.	PUNCT
ijassa-479	75	1	the	the	DET
ijassa-479	75	2	maximum	maximum	ADJ
ijassa-479	75	3	stress	stress	NOUN
ijassa-479	75	4	sensed	sense	VERB
ijassa-479	75	5	by	by	ADP
ijassa-479	75	6	the	the	DET
ijassa-479	75	7	cantilever	cantilever	NOUN
ijassa-479	75	8	is	be	AUX
ijassa-479	75	9	measured	measure	VERB
ijassa-479	75	10	for	for	ADP
ijassa-479	75	11	two	two	NUM
ijassa-479	75	12	different	different	ADJ
ijassa-479	75	13	materials	material	NOUN
ijassa-479	75	14	of	of	ADP
ijassa-479	75	15	the	the	DET
ijassa-479	75	16	cantilever	cantilever	NOUN
ijassa-479	75	17	beam	beam	NOUN
ijassa-479	75	18	.	.	PUNCT
ijassa-479	76	1	the	the	DET
ijassa-479	76	2	material	material	NOUN
ijassa-479	76	3	properties	property	NOUN
ijassa-479	76	4	of	of	ADP
ijassa-479	76	5	the	the	DET
ijassa-479	76	6	cantilever	cantilever	NOUN
ijassa-479	76	7	beam	beam	NOUN
ijassa-479	76	8	include	include	VERB
ijassa-479	76	9	the	the	DET
ijassa-479	76	10	youngs	young	NOUN
ijassa-479	76	11	modulus	modulus	NOUN
ijassa-479	76	12	(	(	PUNCT
ijassa-479	76	13	e	e	NOUN
ijassa-479	76	14	)	)	PUNCT
ijassa-479	76	15	,	,	PUNCT
ijassa-479	76	16	poisson	poisson	NOUN
ijassa-479	76	17	ratio	ratio	NOUN
ijassa-479	76	18	(	(	PUNCT
ijassa-479	76	19	ν	ν	NOUN
ijassa-479	76	20	)	)	PUNCT
ijassa-479	76	21	and	and	CCONJ
ijassa-479	76	22	density	density	NOUN
ijassa-479	76	23	(	(	PUNCT
ijassa-479	76	24	ρ	ρ	NOUN
ijassa-479	76	25	)	)	PUNCT
ijassa-479	76	26	is	be	AUX
ijassa-479	76	27	given	give	VERB
ijassa-479	76	28	in	in	ADP
ijassa-479	76	29	the	the	DET
ijassa-479	76	30	table	table	NOUN
ijassa-479	76	31	1	1	NUM
ijassa-479	76	32	:	:	PUNCT
ijassa-479	76	33	table	table	NOUN
ijassa-479	76	34	1	1	NUM
ijassa-479	76	35	material	material	NOUN
ijassa-479	76	36	properties	property	NOUN
ijassa-479	76	37	of	of	ADP
ijassa-479	76	38	the	the	DET
ijassa-479	76	39	cantilever	cantilever	NOUN
ijassa-479	76	40	beam	beam	NOUN
ijassa-479	76	41	material	material	NOUN
ijassa-479	76	42	properties	property	NOUN
ijassa-479	76	43	polyimide	polyimide	ADJ
ijassa-479	76	44	parylene	parylene	ADJ
ijassa-479	76	45	youngs	young	NOUN
ijassa-479	76	46	modulus	modulus	NOUN
ijassa-479	76	47	(	(	PUNCT
ijassa-479	76	48	gpa	gpa	PROPN
ijassa-479	76	49	)	)	PUNCT
ijassa-479	76	50	3.2	3.2	NUM
ijassa-479	76	51	2.8	2.8	NUM
ijassa-479	76	52	poison	poison	NOUN
ijassa-479	76	53	ratio	ratio	NOUN
ijassa-479	76	54	0.42	0.42	NUM
ijassa-479	76	55	0.4	0.4	NUM
ijassa-479	76	56	density	density	NOUN
ijassa-479	76	57	(	(	PUNCT
ijassa-479	76	58	kg	kg	NOUN
ijassa-479	76	59	/	/	SYM
ijassa-479	76	60	m3	m3	PROPN
ijassa-479	76	61	)	)	PUNCT
ijassa-479	76	62	1300	1300	NUM
ijassa-479	76	63	1289	1289	NUM
ijassa-479	76	64	advances	advance	NOUN
ijassa-479	76	65	in	in	ADP
ijassa-479	76	66	systems	system	NOUN
ijassa-479	76	67	science	science	NOUN
ijassa-479	76	68	and	and	CCONJ
ijassa-479	76	69	application	application	NOUN
ijassa-479	76	70	(	(	PUNCT
ijassa-479	76	71	2016	2016	NUM
ijassa-479	76	72	)	)	PUNCT
ijassa-479	77	1	vol.16	vol.16	PROPN
ijassa-479	77	2	no.3	no.3	VERB
ijassa-479	77	3	81	81	NUM
ijassa-479	77	4	fig	fig	NOUN
ijassa-479	77	5	.	.	PUNCT
ijassa-479	78	1	3	3	NUM
ijassa-479	78	2	model	model	NOUN
ijassa-479	78	3	of	of	ADP
ijassa-479	78	4	the	the	DET
ijassa-479	78	5	optical	optical	ADJ
ijassa-479	78	6	mems	mem	NOUN
ijassa-479	78	7	sensor(polyimide	sensor(polyimide	NOUN
ijassa-479	78	8	material	material	NOUN
ijassa-479	78	9	)	)	PUNCT
ijassa-479	78	10	using	use	VERB
ijassa-479	78	11	ptolemy	ptolemy	PROPN
ijassa-479	78	12	ii	ii	PROPN
ijassa-479	78	13	fig	fig	PROPN
ijassa-479	78	14	.	.	PUNCT
ijassa-479	79	1	4	4	NUM
ijassa-479	79	2	model	model	NOUN
ijassa-479	79	3	of	of	ADP
ijassa-479	79	4	the	the	DET
ijassa-479	79	5	optical	optical	ADJ
ijassa-479	79	6	mems	mem	NOUN
ijassa-479	79	7	sensor	sensor	NOUN
ijassa-479	79	8	(	(	PUNCT
ijassa-479	79	9	parylene	parylene	NOUN
ijassa-479	79	10	material	material	NOUN
ijassa-479	79	11	)	)	PUNCT
ijassa-479	79	12	using	use	VERB
ijassa-479	79	13	ptolemy	ptolemy	PROPN
ijassa-479	79	14	ii	ii	PROPN
ijassa-479	79	15	3.4	3.4	NUM
ijassa-479	79	16	model	model	NOUN
ijassa-479	79	17	the	the	DET
ijassa-479	79	18	mems	mem	NOUN
ijassa-479	79	19	cantilever	cantilever	NOUN
ijassa-479	79	20	beam	beam	NOUN
ijassa-479	79	21	using	use	VERB
ijassa-479	79	22	comsol	comsol	NOUN
ijassa-479	79	23	comsol	comsol	NOUN
ijassa-479	79	24	multiphysics	multiphysics	PROPN
ijassa-479	79	25	version	version	PROPN
ijassa-479	79	26	5.0	5.0	NUM
ijassa-479	79	27	,	,	PUNCT
ijassa-479	79	28	a	a	DET
ijassa-479	79	29	commercial	commercial	ADJ
ijassa-479	79	30	fem	fem	NOUN
ijassa-479	79	31	tool	tool	NOUN
ijassa-479	79	32	for	for	ADP
ijassa-479	79	33	mems	mem	NOUN
ijassa-479	79	34	was	be	AUX
ijassa-479	79	35	used	use	VERB
ijassa-479	79	36	to	to	PART
ijassa-479	79	37	develop	develop	VERB
ijassa-479	79	38	a	a	DET
ijassa-479	79	39	finite	finite	ADJ
ijassa-479	79	40	element	element	NOUN
ijassa-479	79	41	model	model	NOUN
ijassa-479	79	42	[	[	X
ijassa-479	79	43	15	15	NUM
ijassa-479	79	44	]	]	PUNCT
ijassa-479	79	45	of	of	ADP
ijassa-479	79	46	the	the	DET
ijassa-479	79	47	polymer	polymer	NOUN
ijassa-479	79	48	cantilevers	cantilever	NOUN
ijassa-479	79	49	.	.	PUNCT
ijassa-479	80	1	in	in	ADP
ijassa-479	80	2	the	the	DET
ijassa-479	80	3	present	present	ADJ
ijassa-479	80	4	work	work	NOUN
ijassa-479	80	5	,	,	PUNCT
ijassa-479	80	6	the	the	DET
ijassa-479	80	7	cantilever	cantilever	NOUN
ijassa-479	80	8	beam	beam	NOUN
ijassa-479	80	9	modelled	model	VERB
ijassa-479	80	10	using	use	VERB
ijassa-479	80	11	cost	cost	NOUN
ijassa-479	80	12	effective	effective	ADJ
ijassa-479	80	13	open	open	ADJ
ijassa-479	80	14	source	source	NOUN
ijassa-479	80	15	ptolemy	ptolemy	NOUN
ijassa-479	80	16	software	software	NOUN
ijassa-479	80	17	and	and	CCONJ
ijassa-479	80	18	its	its	PRON
ijassa-479	80	19	eigen	eigen	PROPN
ijassa-479	80	20	frequency	frequency	NOUN
ijassa-479	80	21	of	of	ADP
ijassa-479	80	22	the	the	DET
ijassa-479	80	23	first	first	ADJ
ijassa-479	80	24	three	three	NUM
ijassa-479	80	25	modes	mode	NOUN
ijassa-479	80	26	are	be	AUX
ijassa-479	80	27	compared	compare	VERB
ijassa-479	80	28	with	with	ADP
ijassa-479	80	29	the	the	DET
ijassa-479	80	30	rectangular	rectangular	ADJ
ijassa-479	80	31	beam	beam	NOUN
ijassa-479	80	32	of	of	ADP
ijassa-479	80	33	two	two	NUM
ijassa-479	80	34	different	different	ADJ
ijassa-479	80	35	materials	material	NOUN
ijassa-479	80	36	polyimide	polyimide	NOUN
ijassa-479	80	37	and	and	CCONJ
ijassa-479	80	38	parylene	parylene	NOUN
ijassa-479	80	39	using	use	VERB
ijassa-479	80	40	the	the	DET
ijassa-479	80	41	using	use	VERB
ijassa-479	80	42	comsol	comsol	NOUN
ijassa-479	80	43	software	software	NOUN
ijassa-479	80	44	.	.	PUNCT
ijassa-479	81	1	the	the	DET
ijassa-479	81	2	free	free	ADJ
ijassa-479	81	3	tetrahedral	tetrahedral	ADJ
ijassa-479	81	4	meshing	meshing	NOUN
ijassa-479	81	5	is	be	AUX
ijassa-479	81	6	applied	apply	VERB
ijassa-479	81	7	.	.	PUNCT
ijassa-479	82	1	82	82	NUM
ijassa-479	82	2	i.	i.	PROPN
ijassa-479	82	3	mala	mala	PROPN
ijassa-479	82	4	serene	serene	PROPN
ijassa-479	82	5	,	,	PUNCT
ijassa-479	82	6	rajasekhara	rajasekhara	PROPN
ijassa-479	82	7	babu	babu	PROPN
ijassa-479	82	8	m	m	PROPN
ijassa-479	82	9	and	and	CCONJ
ijassa-479	82	10	zachariah.c.alex	zachariah.c.alex	PROPN
ijassa-479	82	11	:	:	PUNCT
ijassa-479	82	12	optical	optical	ADJ
ijassa-479	82	13	mems	mem	NOUN
ijassa-479	82	14	sensor	sensor	NOUN
ijassa-479	82	15	for	for	ADP
ijassa-479	82	16	...	...	PUNCT
ijassa-479	82	17	fig	fig	NOUN
ijassa-479	82	18	.	.	PUNCT
ijassa-479	83	1	5	5	NUM
ijassa-479	83	2	5(a	5(a	NUM
ijassa-479	83	3	)	)	PUNCT
ijassa-479	83	4	model	model	NOUN
ijassa-479	83	5	of	of	ADP
ijassa-479	83	6	the	the	DET
ijassa-479	83	7	rectangular	rectangular	ADJ
ijassa-479	83	8	cantilever	cantilever	NOUN
ijassa-479	83	9	beam	beam	NOUN
ijassa-479	83	10	using	use	VERB
ijassa-479	83	11	comsol	comsol	NOUN
ijassa-479	83	12	,	,	PUNCT
ijassa-479	83	13	fig	fig	NOUN
ijassa-479	83	14	5(b	5(b	NUM
ijassa-479	83	15	)	)	PUNCT
ijassa-479	83	16	mesh	mesh	NOUN
ijassa-479	83	17	model	model	NOUN
ijassa-479	83	18	of	of	ADP
ijassa-479	83	19	the	the	DET
ijassa-479	83	20	cantilever	cantilever	NOUN
ijassa-479	83	21	beam	beam	NOUN
ijassa-479	83	22	4	4	NUM
ijassa-479	83	23	results	result	NOUN
ijassa-479	83	24	and	and	CCONJ
ijassa-479	83	25	discussion	discussion	NOUN
ijassa-479	83	26	4.1	4.1	NUM
ijassa-479	83	27	optical	optical	ADJ
ijassa-479	83	28	mems	mem	NOUN
ijassa-479	83	29	sensor	sensor	NOUN
ijassa-479	83	30	using	use	VERB
ijassa-479	83	31	ptolemy	ptolemy	NOUN
ijassa-479	83	32	in	in	ADP
ijassa-479	83	33	the	the	DET
ijassa-479	83	34	optical	optical	ADJ
ijassa-479	83	35	mems	mem	NOUN
ijassa-479	83	36	sensor	sensor	NOUN
ijassa-479	83	37	model	model	NOUN
ijassa-479	83	38	,	,	PUNCT
ijassa-479	83	39	the	the	DET
ijassa-479	83	40	laser	laser	NOUN
ijassa-479	83	41	diode	diode	NOUN
ijassa-479	83	42	is	be	AUX
ijassa-479	83	43	modelled	model	VERB
ijassa-479	83	44	the	the	DET
ijassa-479	83	45	fig.6	fig.6	PROPN
ijassa-479	83	46	(	(	PUNCT
ijassa-479	83	47	a	a	NOUN
ijassa-479	83	48	)	)	PUNCT
ijassa-479	83	49	and	and	CCONJ
ijassa-479	83	50	fig	fig	NOUN
ijassa-479	83	51	7(a	7(a	NUM
ijassa-479	83	52	)	)	PUNCT
ijassa-479	83	53	represents	represent	VERB
ijassa-479	83	54	the	the	DET
ijassa-479	83	55	output	output	NOUN
ijassa-479	83	56	power	power	NOUN
ijassa-479	83	57	of	of	ADP
ijassa-479	83	58	the	the	DET
ijassa-479	83	59	laser	laser	NOUN
ijassa-479	83	60	and	and	CCONJ
ijassa-479	83	61	output	output	NOUN
ijassa-479	83	62	current	current	ADJ
ijassa-479	83	63	of	of	ADP
ijassa-479	83	64	laser	laser	NOUN
ijassa-479	83	65	diode	diode	NOUN
ijassa-479	83	66	.	.	PUNCT
ijassa-479	84	1	the	the	DET
ijassa-479	84	2	output	output	NOUN
ijassa-479	84	3	power	power	NOUN
ijassa-479	84	4	increases	increase	VERB
ijassa-479	84	5	linearly	linearly	ADV
ijassa-479	84	6	with	with	ADP
ijassa-479	84	7	the	the	DET
ijassa-479	84	8	applied	apply	VERB
ijassa-479	84	9	current	current	NOUN
ijassa-479	84	10	,	,	PUNCT
ijassa-479	84	11	when	when	SCONJ
ijassa-479	84	12	the	the	DET
ijassa-479	84	13	applied	apply	VERB
ijassa-479	84	14	current	current	NOUN
ijassa-479	84	15	is	be	AUX
ijassa-479	84	16	larger	large	ADJ
ijassa-479	84	17	than	than	ADP
ijassa-479	84	18	the	the	DET
ijassa-479	84	19	threshold	threshold	NOUN
ijassa-479	84	20	current	current	ADJ
ijassa-479	84	21	.	.	PUNCT
ijassa-479	85	1	when	when	SCONJ
ijassa-479	85	2	the	the	DET
ijassa-479	85	3	force	force	NOUN
ijassa-479	85	4	applied	apply	VERB
ijassa-479	85	5	on	on	ADP
ijassa-479	85	6	the	the	DET
ijassa-479	85	7	cantilever	cantilever	NOUN
ijassa-479	85	8	,	,	PUNCT
ijassa-479	85	9	the	the	DET
ijassa-479	85	10	cantilever	cantilever	NOUN
ijassa-479	85	11	bends	bend	NOUN
ijassa-479	85	12	and	and	CCONJ
ijassa-479	85	13	light	light	NOUN
ijassa-479	85	14	passing	pass	VERB
ijassa-479	85	15	from	from	ADP
ijassa-479	85	16	the	the	DET
ijassa-479	85	17	optical	optical	ADJ
ijassa-479	85	18	fiber	fiber	NOUN
ijassa-479	85	19	1	1	NUM
ijassa-479	85	20	to	to	ADP
ijassa-479	85	21	optical	optical	ADJ
ijassa-479	85	22	2	2	NUM
ijassa-479	85	23	is	be	AUX
ijassa-479	85	24	blocked	block	VERB
ijassa-479	85	25	based	base	VERB
ijassa-479	85	26	on	on	ADP
ijassa-479	85	27	the	the	DET
ijassa-479	85	28	amount	amount	NOUN
ijassa-479	85	29	of	of	ADP
ijassa-479	85	30	force	force	NOUN
ijassa-479	85	31	applied	apply	VERB
ijassa-479	85	32	.	.	PUNCT
ijassa-479	86	1	the	the	DET
ijassa-479	86	2	range	range	NOUN
ijassa-479	86	3	of	of	ADP
ijassa-479	86	4	the	the	DET
ijassa-479	86	5	force	force	NOUN
ijassa-479	86	6	applied	apply	VERB
ijassa-479	86	7	and	and	CCONJ
ijassa-479	86	8	the	the	DET
ijassa-479	86	9	deflection	deflection	NOUN
ijassa-479	86	10	of	of	ADP
ijassa-479	86	11	the	the	DET
ijassa-479	86	12	cantilever	cantilever	NOUN
ijassa-479	86	13	is	be	AUX
ijassa-479	86	14	recorded	record	VERB
ijassa-479	86	15	for	for	ADP
ijassa-479	86	16	the	the	DET
ijassa-479	86	17	two	two	NUM
ijassa-479	86	18	optical	optical	ADJ
ijassa-479	86	19	sensors	sensor	NOUN
ijassa-479	86	20	are	be	AUX
ijassa-479	86	21	tabulated	tabulate	VERB
ijassa-479	86	22	in	in	ADP
ijassa-479	86	23	table	table	NOUN
ijassa-479	86	24	2	2	NUM
ijassa-479	86	25	.	.	PUNCT
ijassa-479	87	1	in	in	ADP
ijassa-479	87	2	fig.6	fig.6	PROPN
ijassa-479	87	3	(	(	PUNCT
ijassa-479	87	4	b)-(d	b)-(d	NOUN
ijassa-479	87	5	)	)	PUNCT
ijassa-479	87	6	and	and	CCONJ
ijassa-479	87	7	fig	fig	NOUN
ijassa-479	87	8	.	.	PUNCT
ijassa-479	88	1	7(b)-(d	7(b)-(d	NUM
ijassa-479	88	2	)	)	PUNCT
ijassa-479	88	3	,	,	PUNCT
ijassa-479	88	4	the	the	DET
ijassa-479	88	5	sample	sample	NOUN
ijassa-479	88	6	of	of	ADP
ijassa-479	88	7	the	the	DET
ijassa-479	88	8	force	force	NOUN
ijassa-479	88	9	applied	apply	VERB
ijassa-479	88	10	in	in	ADP
ijassa-479	88	11	the	the	DET
ijassa-479	88	12	cantilever	cantilever	NOUN
ijassa-479	88	13	and	and	CCONJ
ijassa-479	88	14	corresponding	correspond	VERB
ijassa-479	88	15	deflection	deflection	NOUN
ijassa-479	88	16	of	of	ADP
ijassa-479	88	17	the	the	DET
ijassa-479	88	18	cantilever	cantilever	NOUN
ijassa-479	88	19	is	be	AUX
ijassa-479	88	20	recorded	record	VERB
ijassa-479	88	21	,	,	PUNCT
ijassa-479	88	22	then	then	ADV
ijassa-479	88	23	the	the	DET
ijassa-479	88	24	deflected	deflected	ADJ
ijassa-479	88	25	laser	laser	NOUN
ijassa-479	88	26	power	power	NOUN
ijassa-479	88	27	is	be	AUX
ijassa-479	88	28	converted	convert	VERB
ijassa-479	88	29	into	into	ADP
ijassa-479	88	30	current	current	NOUN
ijassa-479	88	31	by	by	ADP
ijassa-479	88	32	the	the	DET
ijassa-479	88	33	photodiode	photodiode	NOUN
ijassa-479	88	34	and	and	CCONJ
ijassa-479	88	35	plotted	plot	VERB
ijassa-479	88	36	in	in	ADP
ijassa-479	88	37	the	the	DET
ijassa-479	88	38	graph	graph	NOUN
ijassa-479	88	39	.	.	PUNCT
ijassa-479	89	1	4.2	4.2	NUM
ijassa-479	89	2	comsol	comsol	NOUN
ijassa-479	89	3	cantilever	cantilever	NOUN
ijassa-479	89	4	beam	beam	NOUN
ijassa-479	89	5	result	result	VERB
ijassa-479	89	6	the	the	DET
ijassa-479	89	7	results	result	NOUN
ijassa-479	89	8	of	of	ADP
ijassa-479	89	9	the	the	DET
ijassa-479	89	10	first	first	ADJ
ijassa-479	89	11	three	three	NUM
ijassa-479	89	12	modes	mode	NOUN
ijassa-479	89	13	of	of	ADP
ijassa-479	89	14	the	the	DET
ijassa-479	89	15	cantilever	cantilever	NOUN
ijassa-479	89	16	beam	beam	NOUN
ijassa-479	89	17	of	of	ADP
ijassa-479	89	18	two	two	NUM
ijassa-479	89	19	materials	material	NOUN
ijassa-479	89	20	modeled	model	VERB
ijassa-479	89	21	using	use	VERB
ijassa-479	89	22	comsol	comsol	NOUN
ijassa-479	89	23	software	software	NOUN
ijassa-479	89	24	are	be	AUX
ijassa-479	89	25	shown	show	VERB
ijassa-479	89	26	in	in	ADP
ijassa-479	89	27	the	the	DET
ijassa-479	89	28	fig	fig	NOUN
ijassa-479	89	29	8(a)-(f	8(a)-(f	NUM
ijassa-479	89	30	)	)	PUNCT
ijassa-479	89	31	.	.	PUNCT
ijassa-479	90	1	the	the	DET
ijassa-479	90	2	analytical	analytical	ADJ
ijassa-479	90	3	values	value	NOUN
ijassa-479	90	4	of	of	ADP
ijassa-479	90	5	the	the	DET
ijassa-479	90	6	eigen	eigen	PROPN
ijassa-479	90	7	frequencies	frequency	NOUN
ijassa-479	90	8	are	be	AUX
ijassa-479	90	9	compared	compare	VERB
ijassa-479	90	10	with	with	ADP
ijassa-479	90	11	eigen	eigen	PROPN
ijassa-479	90	12	frequencies	frequency	NOUN
ijassa-479	90	13	of	of	ADP
ijassa-479	90	14	the	the	DET
ijassa-479	90	15	two	two	NUM
ijassa-479	90	16	cantilevers	cantilever	NOUN
ijassa-479	90	17	modelled	model	VERB
ijassa-479	90	18	using	use	VERB
ijassa-479	90	19	comsol	comsol	NOUN
ijassa-479	90	20	are	be	AUX
ijassa-479	90	21	tabulated	tabulate	VERB
ijassa-479	90	22	in	in	ADP
ijassa-479	90	23	the	the	DET
ijassa-479	90	24	table	table	NOUN
ijassa-479	90	25	3	3	NUM
ijassa-479	90	26	and	and	CCONJ
ijassa-479	90	27	the	the	DET
ijassa-479	90	28	same	same	ADJ
ijassa-479	90	29	is	be	AUX
ijassa-479	90	30	represented	represent	VERB
ijassa-479	90	31	using	use	VERB
ijassa-479	90	32	bar	bar	NOUN
ijassa-479	90	33	chart	chart	NOUN
ijassa-479	90	34	is	be	AUX
ijassa-479	90	35	shown	show	VERB
ijassa-479	90	36	in	in	ADP
ijassa-479	90	37	fig	fig	NOUN
ijassa-479	90	38	9(a)-(b	9(a)-(b	NUM
ijassa-479	90	39	)	)	PUNCT
ijassa-479	90	40	.	.	PUNCT
ijassa-479	91	1	5	5	NUM
ijassa-479	91	2	optimization	optimization	NOUN
ijassa-479	91	3	of	of	ADP
ijassa-479	91	4	the	the	DET
ijassa-479	91	5	geometrical	geometrical	ADJ
ijassa-479	91	6	parameters	parameter	NOUN
ijassa-479	91	7	the	the	DET
ijassa-479	91	8	different	different	ADJ
ijassa-479	91	9	lengths	length	NOUN
ijassa-479	91	10	(	(	PUNCT
ijassa-479	91	11	200	200	NUM
ijassa-479	91	12	µm	µm	NOUN
ijassa-479	91	13	,	,	PUNCT
ijassa-479	91	14	300	300	NUM
ijassa-479	91	15	µm	µm	NOUN
ijassa-479	91	16	,	,	PUNCT
ijassa-479	91	17	400	400	NUM
ijassa-479	91	18	µm	µm	NOUN
ijassa-479	91	19	,	,	PUNCT
ijassa-479	91	20	450	450	NUM
ijassa-479	91	21	µm	µm	NOUN
ijassa-479	91	22	,	,	PUNCT
ijassa-479	91	23	500	500	NUM
ijassa-479	91	24	µm	µm	NOUN
ijassa-479	91	25	)	)	PUNCT
ijassa-479	91	26	of	of	ADP
ijassa-479	91	27	the	the	DET
ijassa-479	91	28	two	two	NUM
ijassa-479	91	29	different	different	ADJ
ijassa-479	91	30	materials	material	NOUN
ijassa-479	91	31	of	of	ADP
ijassa-479	91	32	the	the	DET
ijassa-479	91	33	cantilever	cantilever	NOUN
ijassa-479	91	34	are	be	AUX
ijassa-479	91	35	kept	keep	VERB
ijassa-479	91	36	constant	constant	ADJ
ijassa-479	91	37	and	and	CCONJ
ijassa-479	91	38	the	the	DET
ijassa-479	91	39	thickness	thickness	NOUN
ijassa-479	91	40	of	of	ADP
ijassa-479	91	41	the	the	DET
ijassa-479	91	42	cantilever	cantilever	NOUN
ijassa-479	91	43	is	be	AUX
ijassa-479	91	44	varied	varied	ADJ
ijassa-479	91	45	from	from	ADP
ijassa-479	91	46	0.5	0.5	NUM
ijassa-479	91	47	µm	µm	NOUN
ijassa-479	91	48	to	to	ADP
ijassa-479	91	49	3.0	3.0	NUM
ijassa-479	91	50	µm	µm	NOUN
ijassa-479	91	51	.	.	PUNCT
ijassa-479	92	1	for	for	ADP
ijassa-479	92	2	each	each	DET
ijassa-479	92	3	length	length	NOUN
ijassa-479	92	4	and	and	CCONJ
ijassa-479	92	5	the	the	DET
ijassa-479	92	6	maximum	maximum	ADJ
ijassa-479	92	7	stress	stress	NOUN
ijassa-479	92	8	/	/	SYM
ijassa-479	92	9	force	force	NOUN
ijassa-479	92	10	is	be	AUX
ijassa-479	92	11	recorded	record	VERB
ijassa-479	92	12	for	for	ADP
ijassa-479	92	13	each	each	DET
ijassa-479	92	14	simulation	simulation	NOUN
ijassa-479	92	15	is	be	AUX
ijassa-479	92	16	shown	show	VERB
ijassa-479	92	17	in	in	ADP
ijassa-479	92	18	table	table	NOUN
ijassa-479	92	19	4	4	NUM
ijassa-479	92	20	and	and	CCONJ
ijassa-479	92	21	table	table	NOUN
ijassa-479	92	22	6	6	NUM
ijassa-479	92	23	and	and	CCONJ
ijassa-479	92	24	the	the	DET
ijassa-479	92	25	results	result	NOUN
ijassa-479	92	26	are	be	AUX
ijassa-479	92	27	plotted	plot	VERB
ijassa-479	92	28	is	be	AUX
ijassa-479	92	29	shown	show	VERB
ijassa-479	92	30	in	in	ADP
ijassa-479	92	31	figure	figure	NOUN
ijassa-479	92	32	10	10	NUM
ijassa-479	92	33	.	.	PUNCT
ijassa-479	93	1	(	(	PUNCT
ijassa-479	93	2	a)-(f	a)-(f	PROPN
ijassa-479	93	3	)	)	PUNCT
ijassa-479	93	4	.	.	PUNCT
ijassa-479	94	1	for	for	ADP
ijassa-479	94	2	different	different	ADJ
ijassa-479	94	3	thickness	thickness	NOUN
ijassa-479	94	4	(	(	PUNCT
ijassa-479	94	5	t=0.5	t=0.5	NOUN
ijassa-479	94	6	µm	µm	NOUN
ijassa-479	94	7	,	,	PUNCT
ijassa-479	94	8	1.0	1.0	NUM
ijassa-479	94	9	µm,1.5	µm,1.5	NOUN
ijassa-479	94	10	µm,2.0	µm,2.0	PROPN
ijassa-479	94	11	µm,2.5	µm,2.5	VERB
ijassa-479	94	12	µm	µm	ADP
ijassa-479	94	13	and	and	CCONJ
ijassa-479	94	14	3.0	3.0	NUM
ijassa-479	94	15	µm	µm	NOUN
ijassa-479	94	16	)	)	PUNCT
ijassa-479	94	17	,	,	PUNCT
ijassa-479	94	18	the	the	DET
ijassa-479	94	19	length	length	NOUN
ijassa-479	94	20	is	be	AUX
ijassa-479	94	21	varied	varied	ADJ
ijassa-479	94	22	from	from	ADP
ijassa-479	94	23	200	200	NUM
ijassa-479	94	24	µm	µm	NOUN
ijassa-479	94	25	to	to	ADP
ijassa-479	94	26	500	500	NUM
ijassa-479	94	27	µm	µm	NOUN
ijassa-479	94	28	for	for	ADP
ijassa-479	94	29	each	each	DET
ijassa-479	94	30	thickness	thickness	NOUN
ijassa-479	94	31	and	and	CCONJ
ijassa-479	94	32	the	the	DET
ijassa-479	94	33	maximum	maximum	ADJ
ijassa-479	94	34	stress	stress	NOUN
ijassa-479	94	35	/	/	SYM
ijassa-479	94	36	force	force	NOUN
ijassa-479	94	37	is	be	AUX
ijassa-479	94	38	recorded	record	VERB
ijassa-479	94	39	for	for	ADP
ijassa-479	94	40	each	each	DET
ijassa-479	94	41	advances	advance	NOUN
ijassa-479	94	42	in	in	ADP
ijassa-479	94	43	systems	system	NOUN
ijassa-479	94	44	science	science	NOUN
ijassa-479	94	45	and	and	CCONJ
ijassa-479	94	46	application	application	NOUN
ijassa-479	94	47	(	(	PUNCT
ijassa-479	94	48	2016	2016	NUM
ijassa-479	94	49	)	)	PUNCT
ijassa-479	95	1	vol.16	vol.16	PROPN
ijassa-479	95	2	no.3	no.3	VERB
ijassa-479	95	3	83	83	NUM
ijassa-479	95	4	fig	fig	NOUN
ijassa-479	95	5	.	.	PUNCT
ijassa-479	96	1	6	6	NUM
ijassa-479	96	2	simulation	simulation	NOUN
ijassa-479	96	3	result	result	NOUN
ijassa-479	96	4	of	of	ADP
ijassa-479	96	5	the	the	DET
ijassa-479	96	6	polyimide	polyimide	ADJ
ijassa-479	96	7	optical	optical	ADJ
ijassa-479	96	8	mems	mems	PROPN
ijassa-479	96	9	force	force	NOUN
ijassa-479	96	10	sensor	sensor	NOUN
ijassa-479	96	11	(	(	PUNCT
ijassa-479	96	12	a	a	PRON
ijassa-479	96	13	)	)	PUNCT
ijassa-479	96	14	output	output	NOUN
ijassa-479	96	15	power	power	NOUN
ijassa-479	96	16	of	of	ADP
ijassa-479	96	17	laser	laser	NOUN
ijassa-479	96	18	diode	diode	NOUN
ijassa-479	96	19	(	(	PUNCT
ijassa-479	96	20	b	b	NOUN
ijassa-479	96	21	)	)	PUNCT
ijassa-479	96	22	,	,	PUNCT
ijassa-479	96	23	(	(	PUNCT
ijassa-479	96	24	c	c	X
ijassa-479	96	25	)	)	PUNCT
ijassa-479	96	26	and	and	CCONJ
ijassa-479	96	27	(	(	PUNCT
ijassa-479	96	28	d	d	X
ijassa-479	96	29	)	)	PUNCT
ijassa-479	96	30	deflected	deflect	VERB
ijassa-479	96	31	laser	laser	NOUN
ijassa-479	96	32	power	power	NOUN
ijassa-479	96	33	vs	vs	ADP
ijassa-479	96	34	output	output	NOUN
ijassa-479	96	35	current	current	NOUN
ijassa-479	96	36	at	at	ADP
ijassa-479	96	37	the	the	DET
ijassa-479	96	38	photodetector	photodetector	NOUN
ijassa-479	96	39	fig	fig	NOUN
ijassa-479	96	40	.	.	PUNCT
ijassa-479	97	1	7	7	NUM
ijassa-479	97	2	simulation	simulation	NOUN
ijassa-479	97	3	result	result	NOUN
ijassa-479	97	4	of	of	ADP
ijassa-479	97	5	the	the	DET
ijassa-479	97	6	parylene	parylene	ADJ
ijassa-479	97	7	optical	optical	ADJ
ijassa-479	97	8	mems	mem	NOUN
ijassa-479	97	9	sensor1	sensor1	NOUN
ijassa-479	97	10	(	(	PUNCT
ijassa-479	97	11	a	a	X
ijassa-479	97	12	)	)	PUNCT
ijassa-479	97	13	output	output	NOUN
ijassa-479	97	14	power	power	NOUN
ijassa-479	97	15	of	of	ADP
ijassa-479	97	16	laser	laser	NOUN
ijassa-479	97	17	diode	diode	NOUN
ijassa-479	97	18	(	(	PUNCT
ijassa-479	97	19	b	b	NOUN
ijassa-479	97	20	)	)	PUNCT
ijassa-479	97	21	,	,	PUNCT
ijassa-479	97	22	(	(	PUNCT
ijassa-479	97	23	c	c	X
ijassa-479	97	24	)	)	PUNCT
ijassa-479	97	25	and	and	CCONJ
ijassa-479	97	26	(	(	PUNCT
ijassa-479	97	27	d	d	X
ijassa-479	97	28	)	)	PUNCT
ijassa-479	97	29	deflected	deflect	VERB
ijassa-479	97	30	laser	laser	NOUN
ijassa-479	97	31	power	power	NOUN
ijassa-479	97	32	vs	vs	ADP
ijassa-479	97	33	output	output	NOUN
ijassa-479	97	34	current	current	NOUN
ijassa-479	97	35	at	at	ADP
ijassa-479	97	36	the	the	DET
ijassa-479	97	37	photo	photo	NOUN
ijassa-479	97	38	detector	detector	NOUN
ijassa-479	97	39	84	84	NUM
ijassa-479	97	40	i.	i.	NOUN
ijassa-479	97	41	mala	mala	PROPN
ijassa-479	97	42	serene	serene	PROPN
ijassa-479	97	43	,	,	PUNCT
ijassa-479	97	44	rajasekhara	rajasekhara	PROPN
ijassa-479	97	45	babu	babu	PROPN
ijassa-479	97	46	m	m	PROPN
ijassa-479	97	47	and	and	CCONJ
ijassa-479	97	48	zachariah.c.alex	zachariah.c.alex	PROPN
ijassa-479	97	49	:	:	PUNCT
ijassa-479	97	50	optical	optical	ADJ
ijassa-479	97	51	mems	mem	NOUN
ijassa-479	97	52	sensor	sensor	NOUN
ijassa-479	97	53	for	for	ADP
ijassa-479	97	54	...	...	PUNCT
ijassa-479	97	55	table	table	NOUN
ijassa-479	97	56	2	2	NUM
ijassa-479	97	57	stress	stress	NOUN
ijassa-479	97	58	/	/	SYM
ijassa-479	97	59	force	force	NOUN
ijassa-479	97	60	applied	apply	VERB
ijassa-479	97	61	vs.	vs.	ADP
ijassa-479	97	62	cantilever	cantilever	NOUN
ijassa-479	97	63	deflection	deflection	NOUN
ijassa-479	97	64	of	of	ADP
ijassa-479	97	65	the	the	DET
ijassa-479	97	66	two	two	NUM
ijassa-479	97	67	optical	optical	ADJ
ijassa-479	97	68	mems	mem	NOUN
ijassa-479	97	69	sensor	sensor	NOUN
ijassa-479	97	70	using	use	VERB
ijassa-479	97	71	ptolemy	ptolemy	PROPN
ijassa-479	97	72	polyimide	polyimide	ADJ
ijassa-479	97	73	optical	optical	ADJ
ijassa-479	97	74	mems	mem	NOUN
ijassa-479	97	75	sensor	sensor	NOUN
ijassa-479	97	76	parylene	parylene	ADJ
ijassa-479	97	77	optical	optical	ADJ
ijassa-479	97	78	mems	mem	NOUN
ijassa-479	97	79	sensor	sensor	NOUN
ijassa-479	97	80	stress	stress	NOUN
ijassa-479	97	81	/	/	SYM
ijassa-479	97	82	force	force	NOUN
ijassa-479	97	83	applied	apply	VERB
ijassa-479	97	84	cantilever	cantilever	NOUN
ijassa-479	97	85	stress	stress	NOUN
ijassa-479	97	86	/	/	SYM
ijassa-479	97	87	force	force	NOUN
ijassa-479	97	88	applied	apply	VERB
ijassa-479	97	89	cantilever	cantilever	NOUN
ijassa-479	97	90	(	(	PUNCT
ijassa-479	97	91	n	n	CCONJ
ijassa-479	97	92	/	/	SYM
ijassa-479	97	93	m	m	NOUN
ijassa-479	97	94	)	)	PUNCT
ijassa-479	97	95	deflection	deflection	NOUN
ijassa-479	97	96	(	(	PUNCT
ijassa-479	97	97	n	n	CCONJ
ijassa-479	97	98	/	/	SYM
ijassa-479	97	99	m	m	NOUN
ijassa-479	97	100	)	)	PUNCT
ijassa-479	97	101	deflection	deflection	NOUN
ijassa-479	97	102	0.0005	0.0005	NUM
ijassa-479	97	103	2.72e-07	2.72e-07	NUM
ijassa-479	97	104	0.0003	0.0003	NUM
ijassa-479	97	105	1.93e-07	1.93e-07	NUM
ijassa-479	97	106	0.05	0.05	NUM
ijassa-479	97	107	2.72e-05	2.72e-05	NUM
ijassa-479	97	108	0.05	0.05	NUM
ijassa-479	97	109	3.21e-05	3.21e-05	NUM
ijassa-479	97	110	0.2	0.2	NUM
ijassa-479	97	111	1.09e-04	1.09e-04	NUM
ijassa-479	97	112	0.1	0.1	NUM
ijassa-479	97	113	6.43e-05	6.43e-05	NUM
ijassa-479	97	114	0.321	0.321	NUM
ijassa-479	97	115	1.75e-04	1.75e-04	NUM
ijassa-479	97	116	0.272	0.272	NUM
ijassa-479	97	117	1.75e-04	1.75e-04	NUM
ijassa-479	97	118	0.322	0.322	NUM
ijassa-479	97	119	1.75e-04	1.75e-04	NUM
ijassa-479	97	120	0.273	0.273	NUM
ijassa-479	97	121	1.76e-04	1.76e-04	NUM
ijassa-479	97	122	fig	fig	NOUN
ijassa-479	97	123	.	.	PUNCT
ijassa-479	98	1	8	8	NUM
ijassa-479	98	2	eigen	eigen	PROPN
ijassa-479	98	3	frequency	frequency	NOUN
ijassa-479	98	4	of	of	ADP
ijassa-479	98	5	the	the	DET
ijassa-479	98	6	result	result	NOUN
ijassa-479	98	7	of	of	ADP
ijassa-479	98	8	the	the	DET
ijassa-479	98	9	rectangular	rectangular	ADJ
ijassa-479	98	10	cantilever	cantilever	NOUN
ijassa-479	98	11	beam1	beam1	NOUN
ijassa-479	98	12	(	(	PUNCT
ijassa-479	98	13	a)-(c	a)-(c	NUM
ijassa-479	98	14	)	)	PUNCT
ijassa-479	98	15	and	and	CCONJ
ijassa-479	98	16	(	(	PUNCT
ijassa-479	98	17	d)-(f)cantilever	d)-(f)cantilever	NOUN
ijassa-479	98	18	beam2	beam2	NOUN
ijassa-479	98	19	using	use	VERB
ijassa-479	98	20	comsol	comsol	NOUN
ijassa-479	98	21	table	table	NOUN
ijassa-479	98	22	3	3	NUM
ijassa-479	98	23	comparison	comparison	NOUN
ijassa-479	98	24	of	of	ADP
ijassa-479	98	25	eigen	eigen	PROPN
ijassa-479	98	26	frequency	frequency	NOUN
ijassa-479	98	27	values	value	NOUN
ijassa-479	98	28	usingptolemy	usingptolemy	PROPN
ijassa-479	98	29	andcomsol	andcomsol	PROPN
ijassa-479	98	30	software	software	NOUN
ijassa-479	98	31	modes	mode	NOUN
ijassa-479	98	32	of	of	ADP
ijassa-479	98	33	polyimide	polyimide	NOUN
ijassa-479	98	34	cantilever	cantilever	NOUN
ijassa-479	98	35	parylene	parylene	NOUN
ijassa-479	98	36	cantilever	cantilever	NOUN
ijassa-479	98	37	eigen	eigen	PROPN
ijassa-479	98	38	frequency	frequency	PROPN
ijassa-479	98	39	ptolemy(khz	ptolemy(khz	NOUN
ijassa-479	98	40	)	)	PUNCT
ijassa-479	98	41	comsol(khz	comsol(khz	NOUN
ijassa-479	98	42	)	)	PUNCT
ijassa-479	98	43	ptolemy(khz	ptolemy(khz	NOUN
ijassa-479	98	44	)	)	PUNCT
ijassa-479	98	45	comsol(khz	comsol(khz	NOUN
ijassa-479	98	46	)	)	PUNCT
ijassa-479	98	47	1	1	NUM
ijassa-479	99	1	0.5071	0.5071	NUM
ijassa-479	99	2	0.5074	0.5074	NUM
ijassa-479	99	3	0.4764	0.4764	NUM
ijassa-479	99	4	0.4678	0.4678	NUM
ijassa-479	99	5	2	2	NUM
ijassa-479	99	6	3.178	3.178	NUM
ijassa-479	99	7	3.2392	3.2392	NUM
ijassa-479	99	8	2.986	2.986	NUM
ijassa-479	99	9	3.037	3.037	NUM
ijassa-479	99	10	3	3	NUM
ijassa-479	99	11	8.899	8.899	NUM
ijassa-479	99	12	9.1789	9.1789	NUM
ijassa-479	99	13	8.3597	8.3597	NUM
ijassa-479	99	14	8.602	8.602	NUM
ijassa-479	99	15	advances	advance	NOUN
ijassa-479	99	16	in	in	ADP
ijassa-479	99	17	systems	system	NOUN
ijassa-479	99	18	science	science	NOUN
ijassa-479	99	19	and	and	CCONJ
ijassa-479	99	20	application	application	NOUN
ijassa-479	99	21	(	(	PUNCT
ijassa-479	99	22	2016	2016	NUM
ijassa-479	99	23	)	)	PUNCT
ijassa-479	100	1	vol.16	vol.16	PROPN
ijassa-479	100	2	no.3	no.3	VERB
ijassa-479	100	3	85	85	NUM
ijassa-479	100	4	fig	fig	NOUN
ijassa-479	100	5	.	.	PUNCT
ijassa-479	101	1	9	9	NUM
ijassa-479	101	2	(	(	PUNCT
ijassa-479	101	3	a	a	DET
ijassa-479	101	4	-	-	PUNCT
ijassa-479	101	5	b	b	NOUN
ijassa-479	101	6	):	):	PUNCT
ijassa-479	101	7	comparison	comparison	NOUN
ijassa-479	101	8	of	of	ADP
ijassa-479	101	9	the	the	DET
ijassa-479	101	10	modes	mode	NOUN
ijassa-479	101	11	vs.	vs.	ADP
ijassa-479	101	12	eigen	eigen	PROPN
ijassa-479	101	13	frequency	frequency	NOUN
ijassa-479	101	14	of	of	ADP
ijassa-479	101	15	the	the	DET
ijassa-479	101	16	polyimide	polyimide	NOUN
ijassa-479	101	17	and	and	CCONJ
ijassa-479	101	18	parylene	parylene	ADJ
ijassa-479	101	19	cantilever	cantilever	NOUN
ijassa-479	101	20	beam	beam	NOUN
ijassa-479	101	21	using	use	VERB
ijassa-479	101	22	ptolemy	ptolemy	PROPN
ijassa-479	101	23	and	and	CCONJ
ijassa-479	101	24	comsol	comsol	NOUN
ijassa-479	101	25	table	table	NOUN
ijassa-479	101	26	4	4	NUM
ijassa-479	101	27	different	different	ADJ
ijassa-479	101	28	length	length	NOUN
ijassa-479	101	29	of	of	ADP
ijassa-479	101	30	the	the	DET
ijassa-479	101	31	cantilever	cantilever	NOUN
ijassa-479	101	32	beam	beam	NOUN
ijassa-479	101	33	vs.	vs.	ADP
ijassa-479	101	34	maximum	maximum	ADJ
ijassa-479	101	35	stress	stress	NOUN
ijassa-479	101	36	/	/	SYM
ijassa-479	101	37	force	force	NOUN
ijassa-479	101	38	applied	apply	VERB
ijassa-479	101	39	at	at	ADP
ijassa-479	101	40	constant	constant	ADJ
ijassa-479	101	41	thickness	thickness	NOUN
ijassa-479	101	42	of	of	ADP
ijassa-479	101	43	the	the	DET
ijassa-479	101	44	polyimide	polyimide	ADJ
ijassa-479	101	45	optical	optical	ADJ
ijassa-479	101	46	mems	mem	NOUN
ijassa-479	101	47	force	force	NOUN
ijassa-479	101	48	sensor	sensor	NOUN
ijassa-479	101	49	polyimide	polyimide	NOUN
ijassa-479	101	50	optical	optical	ADJ
ijassa-479	101	51	mems	mem	NOUN
ijassa-479	101	52	sensor	sensor	NOUN
ijassa-479	101	53	cantilever	cantilever	NOUN
ijassa-479	101	54	max	max	PROPN
ijassa-479	101	55	.	.	PUNCT
ijassa-479	102	1	stress	stress	NOUN
ijassa-479	102	2	/	/	SYM
ijassa-479	102	3	force	force	NOUN
ijassa-479	102	4	applied	apply	VERB
ijassa-479	102	5	(	(	PUNCT
ijassa-479	102	6	n	n	CCONJ
ijassa-479	102	7	/	/	SYM
ijassa-479	102	8	m	m	NOUN
ijassa-479	102	9	)	)	PUNCT
ijassa-479	102	10	thickness	thickness	NOUN
ijassa-479	102	11	(	(	PUNCT
ijassa-479	102	12	µm	µm	NOUN
ijassa-479	102	13	)	)	PUNCT
ijassa-479	102	14	l=200	l=200	VERB
ijassa-479	102	15	µm	µm	ADP
ijassa-479	102	16	l=300	l=300	NUM
ijassa-479	102	17	µm	µm	ADP
ijassa-479	102	18	l=400	l=400	NOUN
ijassa-479	102	19	µm	µm	ADP
ijassa-479	102	20	l=450	l=450	PROPN
ijassa-479	102	21	µm	µm	ADP
ijassa-479	102	22	l=500	l=500	PROPN
ijassa-479	102	23	µm	µm	ADP
ijassa-479	102	24	0.5	0.5	NUM
ijassa-479	102	25	2.01	2.01	NUM
ijassa-479	102	26	0.88	0.88	NUM
ijassa-479	102	27	0.502	0.502	NUM
ijassa-479	102	28	0.397	0.397	NUM
ijassa-479	102	29	0.321	0.321	NUM
ijassa-479	102	30	1	1	NUM
ijassa-479	102	31	8.045	8.045	NUM
ijassa-479	102	32	3.57	3.57	NUM
ijassa-479	102	33	2.011	2.011	NUM
ijassa-479	102	34	1.588	1.588	NUM
ijassa-479	102	35	1.287	1.287	NUM
ijassa-479	102	36	1.5	1.5	NUM
ijassa-479	102	37	18.1	18.1	NUM
ijassa-479	102	38	8.04	8.04	NUM
ijassa-479	102	39	4.52	4.52	NUM
ijassa-479	102	40	3.575	3.575	NUM
ijassa-479	102	41	2.89	2.89	NUM
ijassa-479	102	42	2	2	NUM
ijassa-479	102	43	32.1	32.1	NUM
ijassa-479	102	44	14.29	14.29	NUM
ijassa-479	102	45	8.04	8.04	NUM
ijassa-479	102	46	6.35	6.35	NUM
ijassa-479	102	47	5.14	5.14	NUM
ijassa-479	102	48	2.5	2.5	NUM
ijassa-479	102	49	50	50	NUM
ijassa-479	102	50	22.3	22.3	NUM
ijassa-479	102	51	12.56	12.56	NUM
ijassa-479	102	52	9.93	9.93	NUM
ijassa-479	102	53	8.04	8.04	NUM
ijassa-479	102	54	3	3	NUM
ijassa-479	102	55	72.3	72.3	NUM
ijassa-479	102	56	32.17	32.17	NUM
ijassa-479	102	57	18.08	18.08	NUM
ijassa-479	102	58	14.3	14.3	NUM
ijassa-479	102	59	11.58	11.58	NUM
ijassa-479	102	60	table	table	NOUN
ijassa-479	102	61	5	5	NUM
ijassa-479	102	62	different	different	ADJ
ijassa-479	102	63	thickness	thickness	NOUN
ijassa-479	102	64	of	of	ADP
ijassa-479	102	65	the	the	DET
ijassa-479	102	66	cantilever	cantilever	NOUN
ijassa-479	102	67	beam	beam	NOUN
ijassa-479	102	68	vs.	vs.	ADP
ijassa-479	102	69	maximum	maximum	ADJ
ijassa-479	102	70	stress	stress	NOUN
ijassa-479	102	71	/	/	SYM
ijassa-479	102	72	force	force	NOUN
ijassa-479	102	73	applied	apply	VERB
ijassa-479	102	74	at	at	ADP
ijassa-479	102	75	constant	constant	ADJ
ijassa-479	102	76	length	length	NOUN
ijassa-479	102	77	of	of	ADP
ijassa-479	102	78	the	the	DET
ijassa-479	102	79	polyimide	polyimide	ADJ
ijassa-479	102	80	optical	optical	ADJ
ijassa-479	102	81	mems	mem	NOUN
ijassa-479	102	82	sensor	sensor	NOUN
ijassa-479	102	83	polyimide	polyimide	NOUN
ijassa-479	102	84	optical	optical	ADJ
ijassa-479	102	85	mems	mem	NOUN
ijassa-479	102	86	sensor	sensor	NOUN
ijassa-479	102	87	cantilever	cantilever	NOUN
ijassa-479	102	88	max	max	PROPN
ijassa-479	102	89	.	.	PUNCT
ijassa-479	103	1	stress	stress	NOUN
ijassa-479	103	2	/	/	SYM
ijassa-479	103	3	force	force	NOUN
ijassa-479	103	4	applied	apply	VERB
ijassa-479	103	5	(	(	PUNCT
ijassa-479	103	6	n	n	CCONJ
ijassa-479	103	7	/	/	SYM
ijassa-479	103	8	m	m	NOUN
ijassa-479	103	9	)	)	PUNCT
ijassa-479	103	10	length	length	NOUN
ijassa-479	103	11	(	(	PUNCT
ijassa-479	103	12	µm	µm	NOUN
ijassa-479	103	13	)	)	PUNCT
ijassa-479	103	14	t=0.5	t=0.5	NOUN
ijassa-479	103	15	µm	µm	ADP
ijassa-479	103	16	t=1.0	t=1.0	NOUN
ijassa-479	103	17	µm	µm	NOUN
ijassa-479	103	18	t=1.5	t=1.5	NOUN
ijassa-479	103	19	µm	µm	ADP
ijassa-479	103	20	t=2.0	t=2.0	NOUN
ijassa-479	103	21	µm	µm	ADP
ijassa-479	103	22	t=2.5	t=2.5	NOUN
ijassa-479	103	23	µm	µm	ADP
ijassa-479	103	24	t=3.0	t=3.0	ADV
ijassa-479	103	25	µm	µm	ADP
ijassa-479	103	26	200	200	NUM
ijassa-479	103	27	µm	µm	ADP
ijassa-479	103	28	2.01	2.01	NUM
ijassa-479	103	29	8.045	8.045	NUM
ijassa-479	103	30	18.1	18.1	NUM
ijassa-479	103	31	32.1	32.1	NUM
ijassa-479	103	32	50	50	NUM
ijassa-479	103	33	72.3	72.3	NUM
ijassa-479	103	34	300	300	NUM
ijassa-479	103	35	µm	µm	ADP
ijassa-479	103	36	0.88	0.88	NUM
ijassa-479	103	37	3.57	3.57	NUM
ijassa-479	103	38	8.04	8.04	NUM
ijassa-479	103	39	14.29	14.29	NUM
ijassa-479	103	40	22.3	22.3	NUM
ijassa-479	103	41	32.17	32.17	NUM
ijassa-479	103	42	400	400	NUM
ijassa-479	103	43	µm	µm	ADP
ijassa-479	103	44	0.502	0.502	NUM
ijassa-479	103	45	2.011	2.011	NUM
ijassa-479	103	46	4.52	4.52	NUM
ijassa-479	103	47	8.04	8.04	NUM
ijassa-479	103	48	12.56	12.56	NUM
ijassa-479	103	49	18.08	18.08	NUM
ijassa-479	103	50	450	450	NUM
ijassa-479	103	51	µm	µm	ADP
ijassa-479	103	52	0.397	0.397	NUM
ijassa-479	103	53	1.588	1.588	NUM
ijassa-479	103	54	3.575	3.575	NUM
ijassa-479	103	55	6.35	6.35	NUM
ijassa-479	103	56	9.93	9.93	NUM
ijassa-479	103	57	8.04	8.04	NUM
ijassa-479	103	58	500	500	NUM
ijassa-479	103	59	µm	µm	ADP
ijassa-479	103	60	0.321	0.321	NUM
ijassa-479	103	61	1.287	1.287	NUM
ijassa-479	103	62	2.89	2.89	NUM
ijassa-479	103	63	5.14	5.14	NUM
ijassa-479	103	64	8.04	8.04	NUM
ijassa-479	103	65	11.58	11.58	NUM
ijassa-479	103	66	86	86	NUM
ijassa-479	103	67	i.	i.	PROPN
ijassa-479	103	68	mala	mala	PROPN
ijassa-479	103	69	serene	serene	PROPN
ijassa-479	103	70	,	,	PUNCT
ijassa-479	103	71	rajasekhara	rajasekhara	PROPN
ijassa-479	103	72	babu	babu	PROPN
ijassa-479	103	73	m	m	PROPN
ijassa-479	103	74	and	and	CCONJ
ijassa-479	103	75	zachariah.c.alex	zachariah.c.alex	PROPN
ijassa-479	103	76	:	:	PUNCT
ijassa-479	103	77	optical	optical	ADJ
ijassa-479	103	78	mems	mem	NOUN
ijassa-479	103	79	sensor	sensor	NOUN
ijassa-479	103	80	for	for	ADP
ijassa-479	103	81	...	...	PUNCT
ijassa-479	103	82	fig	fig	NOUN
ijassa-479	103	83	.	.	PUNCT
ijassa-479	104	1	10	10	NUM
ijassa-479	104	2	(	(	PUNCT
ijassa-479	104	3	a)-(f	a)-(f	PROPN
ijassa-479	104	4	)	)	PUNCT
ijassa-479	104	5	different	different	ADJ
ijassa-479	104	6	length	length	NOUN
ijassa-479	104	7	of	of	ADP
ijassa-479	104	8	the	the	DET
ijassa-479	104	9	cantilever	cantilever	NOUN
ijassa-479	104	10	beam	beam	NOUN
ijassa-479	104	11	vs	vs	ADP
ijassa-479	104	12	maximum	maximum	ADJ
ijassa-479	104	13	stress	stress	NOUN
ijassa-479	104	14	/	/	SYM
ijassa-479	104	15	force	force	NOUN
ijassa-479	104	16	applied	apply	VERB
ijassa-479	104	17	of	of	ADP
ijassa-479	104	18	the	the	DET
ijassa-479	104	19	polyimide	polyimide	ADJ
ijassa-479	104	20	optical	optical	ADJ
ijassa-479	104	21	mems	mem	NOUN
ijassa-479	104	22	sensor	sensor	NOUN
ijassa-479	104	23	at	at	ADP
ijassa-479	104	24	constant	constant	ADJ
ijassa-479	104	25	thickness	thickness	NOUN
ijassa-479	104	26	advances	advance	NOUN
ijassa-479	104	27	in	in	ADP
ijassa-479	104	28	systems	system	NOUN
ijassa-479	104	29	science	science	NOUN
ijassa-479	104	30	and	and	CCONJ
ijassa-479	104	31	application	application	NOUN
ijassa-479	104	32	(	(	PUNCT
ijassa-479	104	33	2016	2016	NUM
ijassa-479	104	34	)	)	PUNCT
ijassa-479	105	1	vol.16	vol.16	PROPN
ijassa-479	105	2	no.3	no.3	VERB
ijassa-479	105	3	87	87	NUM
ijassa-479	105	4	fig	fig	NOUN
ijassa-479	105	5	.	.	PUNCT
ijassa-479	106	1	11	11	NUM
ijassa-479	106	2	(	(	PUNCT
ijassa-479	106	3	a)-(f	a)-(f	PROPN
ijassa-479	106	4	)	)	PUNCT
ijassa-479	106	5	different	different	ADJ
ijassa-479	106	6	length	length	NOUN
ijassa-479	106	7	of	of	ADP
ijassa-479	106	8	the	the	DET
ijassa-479	106	9	cantilever	cantilever	NOUN
ijassa-479	106	10	beam	beam	NOUN
ijassa-479	106	11	vs	vs	ADP
ijassa-479	106	12	maximum	maximum	ADJ
ijassa-479	106	13	stress	stress	NOUN
ijassa-479	106	14	/	/	SYM
ijassa-479	106	15	force	force	NOUN
ijassa-479	106	16	applied	apply	VERB
ijassa-479	106	17	of	of	ADP
ijassa-479	106	18	the	the	DET
ijassa-479	106	19	polyimide	polyimide	ADJ
ijassa-479	106	20	optical	optical	ADJ
ijassa-479	106	21	mems	mem	NOUN
ijassa-479	106	22	sensor	sensor	NOUN
ijassa-479	106	23	at	at	ADP
ijassa-479	106	24	constant	constant	ADJ
ijassa-479	106	25	thickness	thickness	NOUN
ijassa-479	106	26	88	88	NUM
ijassa-479	106	27	i.	i.	NOUN
ijassa-479	106	28	mala	mala	PROPN
ijassa-479	106	29	serene	serene	PROPN
ijassa-479	106	30	,	,	PUNCT
ijassa-479	106	31	rajasekhara	rajasekhara	PROPN
ijassa-479	106	32	babu	babu	PROPN
ijassa-479	106	33	m	m	PROPN
ijassa-479	106	34	and	and	CCONJ
ijassa-479	106	35	zachariah.c.alex	zachariah.c.alex	PROPN
ijassa-479	106	36	:	:	PUNCT
ijassa-479	106	37	optical	optical	ADJ
ijassa-479	106	38	mems	mem	NOUN
ijassa-479	106	39	sensor	sensor	NOUN
ijassa-479	106	40	for	for	ADP
ijassa-479	106	41	...	...	PUNCT
ijassa-479	106	42	fig	fig	NOUN
ijassa-479	106	43	.	.	PUNCT
ijassa-479	107	1	12	12	NUM
ijassa-479	107	2	(	(	PUNCT
ijassa-479	107	3	a)-(f	a)-(f	PROPN
ijassa-479	107	4	)	)	PUNCT
ijassa-479	107	5	different	different	ADJ
ijassa-479	107	6	thickness	thickness	NOUN
ijassa-479	107	7	of	of	ADP
ijassa-479	107	8	the	the	DET
ijassa-479	107	9	cantilever	cantilever	NOUN
ijassa-479	107	10	beam	beam	NOUN
ijassa-479	107	11	vs.	vs.	ADP
ijassa-479	107	12	maximum	maximum	ADJ
ijassa-479	107	13	stress	stress	NOUN
ijassa-479	107	14	/	/	SYM
ijassa-479	107	15	force	force	NOUN
ijassa-479	107	16	applied	apply	VERB
ijassa-479	107	17	of	of	ADP
ijassa-479	107	18	the	the	DET
ijassa-479	107	19	polyimide	polyimide	ADJ
ijassa-479	107	20	optical	optical	ADJ
ijassa-479	107	21	mems	mem	NOUN
ijassa-479	107	22	sensor	sensor	NOUN
ijassa-479	107	23	at	at	ADP
ijassa-479	107	24	constant	constant	ADJ
ijassa-479	107	25	length	length	NOUN
ijassa-479	107	26	advances	advance	NOUN
ijassa-479	107	27	in	in	ADP
ijassa-479	107	28	systems	system	NOUN
ijassa-479	107	29	science	science	NOUN
ijassa-479	107	30	and	and	CCONJ
ijassa-479	107	31	application	application	NOUN
ijassa-479	107	32	(	(	PUNCT
ijassa-479	107	33	2016	2016	NUM
ijassa-479	107	34	)	)	PUNCT
ijassa-479	108	1	vol.16	vol.16	PROPN
ijassa-479	108	2	no.3	no.3	VERB
ijassa-479	108	3	89	89	NUM
ijassa-479	108	4	fig	fig	NOUN
ijassa-479	108	5	.	.	PUNCT
ijassa-479	109	1	13	13	NUM
ijassa-479	109	2	(	(	PUNCT
ijassa-479	109	3	a)-(f	a)-(f	PROPN
ijassa-479	109	4	)	)	PUNCT
ijassa-479	109	5	different	different	ADJ
ijassa-479	109	6	length	length	NOUN
ijassa-479	109	7	of	of	ADP
ijassa-479	109	8	the	the	DET
ijassa-479	109	9	cantilever	cantilever	NOUN
ijassa-479	109	10	beam	beam	NOUN
ijassa-479	109	11	vs.	vs.	ADP
ijassa-479	109	12	maximum	maximum	ADJ
ijassa-479	109	13	stress	stress	NOUN
ijassa-479	109	14	/	/	SYM
ijassa-479	109	15	force	force	NOUN
ijassa-479	109	16	applied	apply	VERB
ijassa-479	109	17	at	at	ADP
ijassa-479	109	18	constant	constant	ADJ
ijassa-479	109	19	thickness	thickness	NOUN
ijassa-479	109	20	of	of	ADP
ijassa-479	109	21	the	the	DET
ijassa-479	109	22	parylene	parylene	ADJ
ijassa-479	109	23	optical	optical	ADJ
ijassa-479	109	24	mems	mem	NOUN
ijassa-479	109	25	sensor	sensor	NOUN
ijassa-479	109	26	90	90	NUM
ijassa-479	109	27	i.	i.	NOUN
ijassa-479	109	28	mala	mala	PROPN
ijassa-479	109	29	serene	serene	PROPN
ijassa-479	109	30	,	,	PUNCT
ijassa-479	109	31	rajasekhara	rajasekhara	PROPN
ijassa-479	109	32	babu	babu	PROPN
ijassa-479	109	33	m	m	PROPN
ijassa-479	109	34	and	and	CCONJ
ijassa-479	109	35	zachariah.c.alex	zachariah.c.alex	PROPN
ijassa-479	109	36	:	:	PUNCT
ijassa-479	109	37	optical	optical	ADJ
ijassa-479	109	38	mems	mem	NOUN
ijassa-479	109	39	sensor	sensor	NOUN
ijassa-479	109	40	for	for	ADP
ijassa-479	109	41	...	...	PUNCT
ijassa-479	109	42	fig	fig	NOUN
ijassa-479	109	43	.	.	PUNCT
ijassa-479	110	1	14	14	NUM
ijassa-479	110	2	(	(	PUNCT
ijassa-479	110	3	a)-(e	a)-(e	NOUN
ijassa-479	110	4	)	)	PUNCT
ijassa-479	110	5	different	different	ADJ
ijassa-479	110	6	thickness	thickness	NOUN
ijassa-479	110	7	of	of	ADP
ijassa-479	110	8	the	the	DET
ijassa-479	110	9	cantilever	cantilever	NOUN
ijassa-479	110	10	beam	beam	NOUN
ijassa-479	110	11	vs.	vs.	ADP
ijassa-479	110	12	maximum	maximum	ADJ
ijassa-479	110	13	stress	stress	NOUN
ijassa-479	110	14	/	/	SYM
ijassa-479	110	15	force	force	NOUN
ijassa-479	110	16	applied	apply	VERB
ijassa-479	110	17	at	at	ADP
ijassa-479	110	18	constant	constant	ADJ
ijassa-479	110	19	length	length	NOUN
ijassa-479	110	20	of	of	ADP
ijassa-479	110	21	the	the	DET
ijassa-479	110	22	parylene	parylene	ADJ
ijassa-479	110	23	optical	optical	ADJ
ijassa-479	110	24	mems	mems	PROPN
ijassa-479	110	25	force	force	NOUN
ijassa-479	110	26	sensor	sensor	NOUN
ijassa-479	110	27	advances	advance	NOUN
ijassa-479	110	28	in	in	ADP
ijassa-479	110	29	systems	system	NOUN
ijassa-479	110	30	science	science	NOUN
ijassa-479	110	31	and	and	CCONJ
ijassa-479	110	32	application	application	NOUN
ijassa-479	110	33	(	(	PUNCT
ijassa-479	110	34	2016	2016	NUM
ijassa-479	110	35	)	)	PUNCT
ijassa-479	111	1	vol.16	vol.16	PROPN
ijassa-479	111	2	no.3	no.3	VERB
ijassa-479	111	3	91	91	NUM
ijassa-479	111	4	table	table	NOUN
ijassa-479	111	5	6	6	NUM
ijassa-479	111	6	different	different	ADJ
ijassa-479	111	7	length	length	NOUN
ijassa-479	111	8	of	of	ADP
ijassa-479	111	9	the	the	DET
ijassa-479	111	10	cantilever	cantilever	NOUN
ijassa-479	111	11	beam	beam	NOUN
ijassa-479	111	12	vs.	vs.	ADP
ijassa-479	111	13	maximum	maximum	ADJ
ijassa-479	111	14	stress	stress	NOUN
ijassa-479	111	15	/	/	SYM
ijassa-479	111	16	force	force	NOUN
ijassa-479	111	17	applied	apply	VERB
ijassa-479	111	18	at	at	ADP
ijassa-479	111	19	constant	constant	ADJ
ijassa-479	111	20	thickness	thickness	NOUN
ijassa-479	111	21	of	of	ADP
ijassa-479	111	22	the	the	DET
ijassa-479	111	23	parylene	parylene	ADJ
ijassa-479	111	24	optical	optical	ADJ
ijassa-479	111	25	mems	mem	NOUN
ijassa-479	111	26	sensor	sensor	NOUN
ijassa-479	111	27	parylene	parylene	ADJ
ijassa-479	111	28	optical	optical	ADJ
ijassa-479	111	29	mems	mem	NOUN
ijassa-479	111	30	sensor	sensor	NOUN
ijassa-479	111	31	cantilever	cantilever	NOUN
ijassa-479	111	32	max	max	PROPN
ijassa-479	111	33	.	.	PUNCT
ijassa-479	112	1	stress	stress	NOUN
ijassa-479	112	2	/	/	SYM
ijassa-479	112	3	force	force	NOUN
ijassa-479	112	4	applied	apply	VERB
ijassa-479	112	5	(	(	PUNCT
ijassa-479	112	6	n	n	CCONJ
ijassa-479	112	7	/	/	SYM
ijassa-479	112	8	m	m	NOUN
ijassa-479	112	9	)	)	PUNCT
ijassa-479	112	10	thickness	thickness	NOUN
ijassa-479	112	11	(	(	PUNCT
ijassa-479	112	12	µm	µm	NOUN
ijassa-479	112	13	)	)	PUNCT
ijassa-479	112	14	l=200	l=200	PROPN
ijassa-479	112	15	µm	µm	ADP
ijassa-479	112	16	l=300	l=300	PROPN
ijassa-479	112	17	µm	µm	ADP
ijassa-479	112	18	l=400	l=400	NOUN
ijassa-479	112	19	µm	µm	NOUN
ijassa-479	112	20	l=450	l=450	PROPN
ijassa-479	112	21	µm	µm	ADP
ijassa-479	112	22	l=500	l=500	NOUN
ijassa-479	112	23	µm	µm	ADP
ijassa-479	112	24	0.5	0.5	NUM
ijassa-479	112	25	1.7	1.7	NUM
ijassa-479	112	26	0.755	0.755	NUM
ijassa-479	112	27	0.425	0.425	NUM
ijassa-479	112	28	0.336	0.336	NUM
ijassa-479	112	29	0.272	0.272	NUM
ijassa-479	112	30	1	1	NUM
ijassa-479	112	31	6.78	6.78	NUM
ijassa-479	112	32	3.02	3.02	NUM
ijassa-479	112	33	1.7	1.7	NUM
ijassa-479	112	34	1.342	1.342	NUM
ijassa-479	112	35	1.088	1.088	NUM
ijassa-479	112	36	1.5	1.5	NUM
ijassa-479	112	37	15.3	15.3	NUM
ijassa-479	112	38	6.8	6.8	NUM
ijassa-479	112	39	3.824	3.824	NUM
ijassa-479	112	40	3.02	3.02	NUM
ijassa-479	112	41	2.448	2.448	NUM
ijassa-479	112	42	2	2	NUM
ijassa-479	112	43	27.2	27.2	NUM
ijassa-479	112	44	12.07	12.07	NUM
ijassa-479	112	45	6.8	6.8	NUM
ijassa-479	112	46	5.37	5.37	NUM
ijassa-479	112	47	4.35	4.35	NUM
ijassa-479	112	48	2.5	2.5	NUM
ijassa-479	112	49	42.5	42.5	NUM
ijassa-479	112	50	18.84	18.84	NUM
ijassa-479	112	51	10.63	10.63	NUM
ijassa-479	112	52	8.39	8.39	NUM
ijassa-479	112	53	6.8	6.8	NUM
ijassa-479	112	54	3	3	NUM
ijassa-479	112	55	61.1	61.1	NUM
ijassa-479	112	56	27.16	27.16	NUM
ijassa-479	112	57	15.3	15.3	NUM
ijassa-479	112	58	12.09	12.09	NUM
ijassa-479	112	59	9.79	9.79	NUM
ijassa-479	112	60	table	table	NOUN
ijassa-479	112	61	7	7	NUM
ijassa-479	112	62	different	different	ADJ
ijassa-479	112	63	thickness	thickness	NOUN
ijassa-479	112	64	of	of	ADP
ijassa-479	112	65	the	the	DET
ijassa-479	112	66	cantilever	cantilever	NOUN
ijassa-479	112	67	beam	beam	NOUN
ijassa-479	112	68	vs.	vs.	ADP
ijassa-479	112	69	maximum	maximum	ADJ
ijassa-479	112	70	stress	stress	NOUN
ijassa-479	112	71	/	/	SYM
ijassa-479	112	72	force	force	NOUN
ijassa-479	112	73	applied	apply	VERB
ijassa-479	112	74	at	at	ADP
ijassa-479	112	75	constant	constant	ADJ
ijassa-479	112	76	length	length	NOUN
ijassa-479	112	77	of	of	ADP
ijassa-479	112	78	the	the	DET
ijassa-479	112	79	parylene	parylene	ADJ
ijassa-479	112	80	optical	optical	ADJ
ijassa-479	112	81	mems	mem	NOUN
ijassa-479	112	82	sensor	sensor	NOUN
ijassa-479	112	83	parylene	parylene	ADJ
ijassa-479	112	84	optical	optical	ADJ
ijassa-479	112	85	mems	mem	NOUN
ijassa-479	112	86	sensor	sensor	NOUN
ijassa-479	112	87	cantilever	cantilever	NOUN
ijassa-479	112	88	max	max	PROPN
ijassa-479	112	89	.	.	PUNCT
ijassa-479	113	1	stress	stress	NOUN
ijassa-479	113	2	/	/	SYM
ijassa-479	113	3	force	force	NOUN
ijassa-479	113	4	applied	apply	VERB
ijassa-479	113	5	(	(	PUNCT
ijassa-479	113	6	n	n	CCONJ
ijassa-479	113	7	/	/	SYM
ijassa-479	113	8	m	m	NOUN
ijassa-479	113	9	)	)	PUNCT
ijassa-479	113	10	length	length	NOUN
ijassa-479	113	11	(	(	PUNCT
ijassa-479	113	12	µm	µm	NOUN
ijassa-479	113	13	)	)	PUNCT
ijassa-479	113	14	t=0.5	t=0.5	NOUN
ijassa-479	113	15	µm	µm	ADP
ijassa-479	113	16	t=1.0	t=1.0	NOUN
ijassa-479	113	17	µm	µm	NOUN
ijassa-479	113	18	t=1.5	t=1.5	NOUN
ijassa-479	113	19	µm	µm	ADP
ijassa-479	113	20	t=2.0	t=2.0	NOUN
ijassa-479	113	21	µm	µm	ADP
ijassa-479	113	22	t=2.5	t=2.5	NOUN
ijassa-479	113	23	µm	µm	ADP
ijassa-479	113	24	t=3.0	t=3.0	ADV
ijassa-479	113	25	µm	µm	ADP
ijassa-479	113	26	200	200	NUM
ijassa-479	113	27	µm	µm	ADP
ijassa-479	113	28	1.7	1.7	NUM
ijassa-479	113	29	6.78	6.78	NUM
ijassa-479	113	30	15.3	15.3	NUM
ijassa-479	113	31	27.2	27.2	NUM
ijassa-479	113	32	42.5	42.5	NUM
ijassa-479	113	33	61.1	61.1	NUM
ijassa-479	113	34	300	300	NUM
ijassa-479	113	35	µm	µm	ADP
ijassa-479	113	36	0.755	0.755	NUM
ijassa-479	113	37	3.02	3.02	NUM
ijassa-479	113	38	6.8	6.8	NUM
ijassa-479	113	39	12.07	12.07	NUM
ijassa-479	113	40	18.84	18.84	NUM
ijassa-479	113	41	27.16	27.16	NUM
ijassa-479	113	42	400	400	NUM
ijassa-479	113	43	µm	µm	ADP
ijassa-479	113	44	0.425	0.425	NUM
ijassa-479	113	45	1.7	1.7	NUM
ijassa-479	113	46	3.824	3.824	NUM
ijassa-479	113	47	6.8	6.8	NUM
ijassa-479	113	48	10.63	10.63	NUM
ijassa-479	113	49	15.3	15.3	NUM
ijassa-479	113	50	450	450	NUM
ijassa-479	113	51	µm	µm	ADP
ijassa-479	113	52	0.336	0.336	NUM
ijassa-479	113	53	1.342	1.342	NUM
ijassa-479	113	54	3.02	3.02	NUM
ijassa-479	113	55	5.37	5.37	NUM
ijassa-479	113	56	8.39	8.39	NUM
ijassa-479	113	57	12.09	12.09	NUM
ijassa-479	113	58	500	500	NUM
ijassa-479	113	59	µm	µm	ADP
ijassa-479	113	60	0.272	0.272	NUM
ijassa-479	113	61	1.088	1.088	NUM
ijassa-479	113	62	2.448	2.448	NUM
ijassa-479	113	63	4.35	4.35	NUM
ijassa-479	113	64	6.8	6.8	NUM
ijassa-479	113	65	9.79	9.79	NUM
ijassa-479	113	66	simulation	simulation	NOUN
ijassa-479	113	67	is	be	AUX
ijassa-479	113	68	shown	show	VERB
ijassa-479	113	69	in	in	ADP
ijassa-479	113	70	table	table	NOUN
ijassa-479	113	71	5	5	NUM
ijassa-479	113	72	and	and	CCONJ
ijassa-479	113	73	table	table	NOUN
ijassa-479	113	74	7	7	NUM
ijassa-479	113	75	and	and	CCONJ
ijassa-479	113	76	the	the	DET
ijassa-479	113	77	results	result	NOUN
ijassa-479	113	78	are	be	AUX
ijassa-479	113	79	plotted	plot	VERB
ijassa-479	113	80	is	be	AUX
ijassa-479	113	81	shown	show	VERB
ijassa-479	113	82	in	in	ADP
ijassa-479	113	83	figure	figure	NOUN
ijassa-479	113	84	11	11	NUM
ijassa-479	113	85	.	.	PUNCT
ijassa-479	114	1	(	(	PUNCT
ijassa-479	114	2	a)-(f	a)-(f	PROPN
ijassa-479	114	3	)	)	PUNCT
ijassa-479	114	4	.	.	PUNCT
ijassa-479	115	1	from	from	ADP
ijassa-479	115	2	the	the	DET
ijassa-479	115	3	recorded	record	VERB
ijassa-479	115	4	values	value	NOUN
ijassa-479	115	5	,	,	PUNCT
ijassa-479	115	6	low	low	ADJ
ijassa-479	115	7	stress	stress	NOUN
ijassa-479	115	8	/	/	SYM
ijassa-479	115	9	force	force	NOUN
ijassa-479	115	10	is	be	AUX
ijassa-479	115	11	achieved	achieve	VERB
ijassa-479	115	12	at	at	ADP
ijassa-479	115	13	the	the	DET
ijassa-479	115	14	length	length	NOUN
ijassa-479	115	15	500	500	NUM
ijassa-479	115	16	µm	µm	NOUN
ijassa-479	115	17	and	and	CCONJ
ijassa-479	115	18	the	the	DET
ijassa-479	115	19	thickness	thickness	NOUN
ijassa-479	115	20	is	be	AUX
ijassa-479	115	21	0.5	0.5	NUM
ijassa-479	115	22	m	m	NOUN
ijassa-479	115	23	for	for	ADP
ijassa-479	115	24	both	both	CCONJ
ijassa-479	115	25	the	the	DET
ijassa-479	115	26	sensors	sensor	NOUN
ijassa-479	115	27	.	.	PUNCT
ijassa-479	116	1	6	6	NUM
ijassa-479	116	2	conclusion	conclusion	NOUN
ijassa-479	116	3	different	different	ADJ
ijassa-479	116	4	actors	actor	NOUN
ijassa-479	116	5	like	like	ADP
ijassa-479	116	6	laser	laser	NOUN
ijassa-479	116	7	actor	actor	NOUN
ijassa-479	116	8	,	,	PUNCT
ijassa-479	116	9	force	force	NOUN
ijassa-479	116	10	actor	actor	NOUN
ijassa-479	116	11	and	and	CCONJ
ijassa-479	116	12	photodetector	photodetector	NOUN
ijassa-479	116	13	have	have	AUX
ijassa-479	116	14	been	be	AUX
ijassa-479	116	15	developed	develop	VERB
ijassa-479	116	16	and	and	CCONJ
ijassa-479	116	17	added	add	VERB
ijassa-479	116	18	in	in	ADP
ijassa-479	116	19	ptolemy	ptolemy	PROPN
ijassa-479	116	20	framework	framework	PROPN
ijassa-479	116	21	.	.	PUNCT
ijassa-479	117	1	the	the	DET
ijassa-479	117	2	physical	physical	ADJ
ijassa-479	117	3	functioning	functioning	NOUN
ijassa-479	117	4	of	of	ADP
ijassa-479	117	5	each	each	DET
ijassa-479	117	6	component	component	NOUN
ijassa-479	117	7	of	of	ADP
ijassa-479	117	8	the	the	DET
ijassa-479	117	9	optical	optical	ADJ
ijassa-479	117	10	mems	mem	NOUN
ijassa-479	117	11	force	force	NOUN
ijassa-479	117	12	sensor	sensor	NOUN
ijassa-479	117	13	device	device	NOUN
ijassa-479	117	14	has	have	AUX
ijassa-479	117	15	been	be	AUX
ijassa-479	117	16	simulated	simulate	VERB
ijassa-479	117	17	using	use	VERB
ijassa-479	117	18	these	these	DET
ijassa-479	117	19	actors	actor	NOUN
ijassa-479	117	20	.	.	PUNCT
ijassa-479	118	1	the	the	DET
ijassa-479	118	2	results	result	NOUN
ijassa-479	118	3	have	have	AUX
ijassa-479	118	4	been	be	AUX
ijassa-479	118	5	presented	present	VERB
ijassa-479	118	6	.	.	PUNCT
ijassa-479	119	1	the	the	DET
ijassa-479	119	2	two	two	NUM
ijassa-479	119	3	optical	optical	ADJ
ijassa-479	119	4	mems	mem	NOUN
ijassa-479	119	5	force	force	NOUN
ijassa-479	119	6	sensor	sensor	NOUN
ijassa-479	119	7	are	be	AUX
ijassa-479	119	8	simulated	simulate	VERB
ijassa-479	119	9	in	in	ADP
ijassa-479	119	10	ptolemy	ptolemy	PROPN
ijassa-479	119	11	ii	ii	PROPN
ijassa-479	119	12	.	.	PUNCT
ijassa-479	120	1	the	the	DET
ijassa-479	120	2	parylene	parylene	ADJ
ijassa-479	120	3	optical	optical	ADJ
ijassa-479	120	4	mems	mem	NOUN
ijassa-479	120	5	sensor	sensor	NOUN
ijassa-479	120	6	can	can	AUX
ijassa-479	120	7	sense	sense	VERB
ijassa-479	120	8	the	the	DET
ijassa-479	120	9	low	low	ADJ
ijassa-479	120	10	stress	stress	NOUN
ijassa-479	120	11	/	/	SYM
ijassa-479	120	12	force	force	NOUN
ijassa-479	120	13	in	in	ADP
ijassa-479	120	14	the	the	DET
ijassa-479	120	15	range	range	NOUN
ijassa-479	120	16	of	of	ADP
ijassa-479	120	17	0.0003	0.0003	NUM
ijassa-479	120	18	n	n	CCONJ
ijassa-479	120	19	/	/	SYM
ijassa-479	120	20	m	m	NOUN
ijassa-479	120	21	to	to	ADP
ijassa-479	120	22	0.272	0.272	NUM
ijassa-479	120	23	n	n	CCONJ
ijassa-479	120	24	/	/	SYM
ijassa-479	120	25	m	m	PROPN
ijassa-479	120	26	with	with	ADP
ijassa-479	120	27	the	the	DET
ijassa-479	120	28	present	present	ADJ
ijassa-479	120	29	fiber	fiber	NOUN
ijassa-479	120	30	optic	optic	NOUN
ijassa-479	120	31	setup	setup	NOUN
ijassa-479	120	32	.	.	PUNCT
ijassa-479	121	1	the	the	DET
ijassa-479	121	2	eigen	eigen	PROPN
ijassa-479	121	3	frequency	frequency	NOUN
ijassa-479	121	4	of	of	ADP
ijassa-479	121	5	the	the	DET
ijassa-479	121	6	two	two	NUM
ijassa-479	121	7	cantilever	cantilever	NOUN
ijassa-479	121	8	beam	beam	NOUN
ijassa-479	121	9	is	be	AUX
ijassa-479	121	10	modelled	model	VERB
ijassa-479	121	11	using	use	VERB
ijassa-479	121	12	open	open	ADJ
ijassa-479	121	13	source	source	NOUN
ijassa-479	121	14	ptolemy	ptolemy	PROPN
ijassa-479	121	15	ii	ii	PROPN
ijassa-479	121	16	and	and	CCONJ
ijassa-479	121	17	the	the	DET
ijassa-479	121	18	three	three	NUM
ijassa-479	121	19	modes	mode	NOUN
ijassa-479	121	20	of	of	ADP
ijassa-479	121	21	eigen	eigen	PROPN
ijassa-479	121	22	frequencies	frequency	NOUN
ijassa-479	121	23	are	be	AUX
ijassa-479	121	24	compared	compare	VERB
ijassa-479	121	25	with	with	ADP
ijassa-479	121	26	92	92	NUM
ijassa-479	121	27	i.	i.	NOUN
ijassa-479	121	28	mala	mala	PROPN
ijassa-479	121	29	serene	serene	ADJ
ijassa-479	121	30	,	,	PUNCT
ijassa-479	121	31	rajasekhara	rajasekhara	PROPN
ijassa-479	121	32	babu	babu	PROPN
ijassa-479	121	33	m	m	PROPN
ijassa-479	121	34	and	and	CCONJ
ijassa-479	121	35	zachariah.c.alex	zachariah.c.alex	PROPN
ijassa-479	121	36	:	:	PUNCT
ijassa-479	121	37	optical	optical	ADJ
ijassa-479	121	38	mems	mem	NOUN
ijassa-479	121	39	sensor	sensor	NOUN
ijassa-479	121	40	for	for	ADP
ijassa-479	121	41	...	...	PUNCT
ijassa-479	121	42	the	the	DET
ijassa-479	121	43	results	result	NOUN
ijassa-479	121	44	of	of	ADP
ijassa-479	121	45	the	the	DET
ijassa-479	121	46	comsol	comsol	NOUN
ijassa-479	121	47	.	.	PUNCT
ijassa-479	122	1	the	the	DET
ijassa-479	122	2	low	low	ADJ
ijassa-479	122	3	stress	stress	NOUN
ijassa-479	122	4	/	/	SYM
ijassa-479	122	5	force	force	NOUN
ijassa-479	122	6	is	be	AUX
ijassa-479	122	7	measured	measure	VERB
ijassa-479	122	8	for	for	ADP
ijassa-479	122	9	the	the	DET
ijassa-479	122	10	optimized	optimize	VERB
ijassa-479	122	11	length	length	NOUN
ijassa-479	122	12	(	(	PUNCT
ijassa-479	122	13	500	500	NUM
ijassa-479	122	14	µm	µm	NOUN
ijassa-479	122	15	)	)	PUNCT
ijassa-479	122	16	and	and	CCONJ
ijassa-479	122	17	the	the	DET
ijassa-479	122	18	thickness	thickness	NOUN
ijassa-479	122	19	(	(	PUNCT
ijassa-479	122	20	0.5	0.5	NUM
ijassa-479	122	21	µm	µm	NOUN
ijassa-479	122	22	)	)	PUNCT
ijassa-479	122	23	is	be	AUX
ijassa-479	122	24	found	find	VERB
ijassa-479	122	25	by	by	ADP
ijassa-479	122	26	varying	vary	VERB
ijassa-479	122	27	the	the	DET
ijassa-479	122	28	thickness	thickness	NOUN
ijassa-479	122	29	and	and	CCONJ
ijassa-479	122	30	length	length	NOUN
ijassa-479	122	31	of	of	ADP
ijassa-479	122	32	the	the	DET
ijassa-479	122	33	cantilever	cantilever	NOUN
ijassa-479	122	34	using	use	VERB
ijassa-479	122	35	ptolemy	ptolemy	NOUN
ijassa-479	122	36	.	.	PUNCT
ijassa-479	123	1	7	7	NUM
ijassa-479	123	2	acknowledgement	acknowledgement	NOUN
ijassa-479	123	3	we	we	PRON
ijassa-479	123	4	are	be	AUX
ijassa-479	123	5	thankful	thankful	ADJ
ijassa-479	123	6	for	for	ADP
ijassa-479	123	7	support	support	NOUN
ijassa-479	123	8	by	by	ADP
ijassa-479	123	9	the	the	DET
ijassa-479	123	10	npmass	npmass	NOUN
ijassa-479	123	11	mems	mems	PROPN
ijassa-479	123	12	design	design	NOUN
ijassa-479	123	13	centre	centre	NOUN
ijassa-479	123	14	,	,	PUNCT
ijassa-479	123	15	sense	sense	NOUN
ijassa-479	123	16	,	,	PUNCT
ijassa-479	123	17	vit	vit	PROPN
ijassa-479	123	18	university	university	NOUN
ijassa-479	123	19	for	for	ADP
ijassa-479	123	20	doing	do	VERB
ijassa-479	123	21	this	this	DET
ijassa-479	123	22	project	project	NOUN
ijassa-479	123	23	.	.	PUNCT
ijassa-479	124	1	references	reference	NOUN
ijassa-479	124	2	[	[	X
ijassa-479	124	3	1	1	X
ijassa-479	124	4	]	]	PUNCT
ijassa-479	124	5	e.	e.	PROPN
ijassa-479	124	6	ollier(2002	ollier(2002	PROPN
ijassa-479	124	7	)	)	PUNCT
ijassa-479	124	8	,	,	PUNCT
ijassa-479	124	9	“	"	PUNCT
ijassa-479	124	10	optical	optical	ADJ
ijassa-479	124	11	mems	mem	NOUN
ijassa-479	124	12	devices	device	NOUN
ijassa-479	124	13	based	base	VERB
ijassa-479	124	14	on	on	ADP
ijassa-479	124	15	moving	move	VERB
ijassa-479	124	16	waveguides	waveguide	NOUN
ijassa-479	124	17	”	"	PUNCT
ijassa-479	124	18	,	,	PUNCT
ijassa-479	124	19	ieee	ieee	PROPN
ijassa-479	124	20	j.sel	j.sel	PROPN
ijassa-479	124	21	.	.	PUNCT
ijassa-479	125	1	topics	topic	NOUN
ijassa-479	125	2	quantum	quantum	PROPN
ijassa-479	125	3	elect	elect	NOUN
ijassa-479	125	4	,	,	PUNCT
ijassa-479	125	5	vol	vol	NOUN
ijassa-479	125	6	.	.	PROPN
ijassa-479	125	7	8	8	NUM
ijassa-479	125	8	,	,	PUNCT
ijassa-479	125	9	no	no	INTJ
ijassa-479	125	10	.	.	NOUN
ijassa-479	125	11	1	1	NUM
ijassa-479	125	12	,	,	PUNCT
ijassa-479	125	13	pp	pp	ADJ
ijassa-479	125	14	.	.	PUNCT
ijassa-479	126	1	155c62	155c62	NUM
ijassa-479	126	2	.	.	PUNCT
ijassa-479	127	1	[	[	X
ijassa-479	127	2	2	2	NUM
ijassa-479	127	3	]	]	X
ijassa-479	127	4	selvarajan	selvarajan	PROPN
ijassa-479	127	5	,	,	PUNCT
ijassa-479	127	6	a	a	PRON
ijassa-479	127	7	and	and	CCONJ
ijassa-479	127	8	pattnaik	pattnaik	ADJ
ijassa-479	127	9	,	,	PUNCT
ijassa-479	127	10	prasant	prasant	ADJ
ijassa-479	127	11	kumar	kumar	PROPN
ijassa-479	127	12	and	and	CCONJ
ijassa-479	127	13	badrinarayana	badrinarayana	PROPN
ijassa-479	127	14	,	,	PUNCT
ijassa-479	127	15	t	t	PROPN
ijassa-479	127	16	and	and	CCONJ
ijassa-479	127	17	srinivas	srinivas	PROPN
ijassa-479	127	18	,	,	PUNCT
ijassa-479	127	19	t	t	PROPN
ijassa-479	127	20	(	(	PUNCT
ijassa-479	127	21	2006	2006	NUM
ijassa-479	127	22	)	)	PUNCT
ijassa-479	127	23	,	,	PUNCT
ijassa-479	127	24	“	"	PUNCT
ijassa-479	127	25	a	a	DET
ijassa-479	127	26	comparative	comparative	ADJ
ijassa-479	127	27	study	study	NOUN
ijassa-479	127	28	of	of	ADP
ijassa-479	127	29	moem	moem	NOUN
ijassa-479	127	30	pressure	pressure	NOUN
ijassa-479	127	31	sensors	sensor	NOUN
ijassa-479	127	32	using	use	VERB
ijassa-479	127	33	mzi	mzi	PROPN
ijassa-479	127	34	,	,	PUNCT
ijassa-479	127	35	dc	dc	PROPN
ijassa-479	127	36	,	,	PUNCT
ijassa-479	127	37	and	and	CCONJ
ijassa-479	127	38	racetrack	racetrack	VERB
ijassa-479	127	39	resonator	resonator	NOUN
ijassa-479	127	40	io	io	X
ijassa-479	127	41	structures	structure	NOUN
ijassa-479	127	42	”	"	PUNCT
ijassa-479	127	43	,	,	PUNCT
ijassa-479	127	44	in	in	ADP
ijassa-479	127	45	proceedings	proceeding	NOUN
ijassa-479	127	46	spie	spie	ADJ
ijassa-479	127	47	international	international	PROPN
ijassa-479	127	48	conference	conference	NOUN
ijassa-479	127	49	on	on	ADP
ijassa-479	127	50	smart	smart	ADJ
ijassa-479	127	51	structures	structure	NOUN
ijassa-479	127	52	and	and	CCONJ
ijassa-479	127	53	materials	material	NOUN
ijassa-479	127	54	2006	2006	NUM
ijassa-479	127	55	:	:	PUNCT
ijassa-479	127	56	smart	smart	ADJ
ijassa-479	127	57	electronics	electronic	NOUN
ijassa-479	127	58	,	,	PUNCT
ijassa-479	127	59	mems	mem	NOUN
ijassa-479	127	60	,	,	PUNCT
ijassa-479	127	61	biomems	biomem	NOUN
ijassa-479	127	62	,	,	PUNCT
ijassa-479	127	63	and	and	CCONJ
ijassa-479	127	64	nanotechnology	nanotechnology	NOUN
ijassa-479	127	65	,	,	PUNCT
ijassa-479	127	66	pages	page	NOUN
ijassa-479	127	67	vol.61726	vol.61726	NOUN
ijassa-479	127	68	,	,	PUNCT
ijassa-479	127	69	61721a	61721a	NUM
ijassa-479	127	70	,	,	PUNCT
ijassa-479	127	71	san	san	PROPN
ijassa-479	127	72	diego	diego	PROPN
ijassa-479	127	73	,	,	PUNCT
ijassa-479	127	74	california	california	PROPN
ijassa-479	127	75	,	,	PUNCT
ijassa-479	127	76	usa	usa	PROPN
ijassa-479	127	77	.	.	PUNCT
ijassa-479	128	1	[	[	X
ijassa-479	128	2	3	3	NUM
ijassa-479	128	3	]	]	X
ijassa-479	128	4	levitan	levitan	PROPN
ijassa-479	128	5	,	,	PUNCT
ijassa-479	128	6	s.p	s.p	PROPN
ijassa-479	128	7	.	.	PROPN
ijassa-479	128	8	,	,	PUNCT
ijassa-479	128	9	kurzweg	kurzweg	PROPN
ijassa-479	128	10	,	,	PUNCT
ijassa-479	128	11	t.p	t.p	PROPN
ijassa-479	128	12	.	.	PROPN
ijassa-479	128	13	,	,	PUNCT
ijassa-479	128	14	marchand	marchand	PROPN
ijassa-479	128	15	,	,	PUNCT
ijassa-479	128	16	p.j	p.j	PROPN
ijassa-479	128	17	.	.	PROPN
ijassa-479	128	18	,	,	PUNCT
ijassa-479	128	19	rempel	rempel	NOUN
ijassa-479	128	20	,	,	PUNCT
ijassa-479	128	21	m.a	m.a	PROPN
ijassa-479	128	22	.	.	PROPN
ijassa-479	128	23	,	,	PUNCT
ijassa-479	128	24	chiarulli	chiarulli	PROPN
ijassa-479	128	25	,	,	PUNCT
ijassa-479	128	26	d.m	d.m	PROPN
ijassa-479	128	27	.	.	PROPN
ijassa-479	128	28	,	,	PUNCT
ijassa-479	128	29	martinez	martinez	PROPN
ijassa-479	128	30	,	,	PUNCT
ijassa-479	128	31	j.a	j.a	PROPN
ijassa-479	128	32	,	,	PUNCT
ijassa-479	128	33	bridgen	bridgen	NOUN
ijassa-479	128	34	,	,	PUNCT
ijassa-479	128	35	j.m	j.m	PROPN
ijassa-479	128	36	.	.	PROPN
ijassa-479	128	37	,fan	,fan	PROPN
ijassa-479	128	38	,	,	PUNCT
ijassa-479	128	39	c.	c.	PROPN
ijassa-479	128	40	and	and	CCONJ
ijassa-479	128	41	mccormick	mccormick	PROPN
ijassa-479	128	42	,	,	PUNCT
ijassa-479	128	43	f.b.(1998	f.b.(1998	PROPN
ijassa-479	128	44	)	)	PUNCT
ijassa-479	128	45	,	,	PUNCT
ijassa-479	128	46	“	"	PUNCT
ijassa-479	128	47	chatoyant	chatoyant	NOUN
ijassa-479	128	48	:	:	PUNCT
ijassa-479	128	49	a	a	DET
ijassa-479	128	50	computer	computer	NOUN
ijassa-479	128	51	-	-	PUNCT
ijassa-479	128	52	aided	aid	VERB
ijassa-479	128	53	design	design	NOUN
ijassa-479	128	54	tool	tool	NOUN
ijassa-479	128	55	for	for	ADP
ijassa-479	128	56	free	free	ADJ
ijassa-479	128	57	-	-	PUNCT
ijassa-479	128	58	space	space	NOUN
ijassa-479	128	59	optoelectronic	optoelectronic	ADJ
ijassa-479	128	60	systems	system	NOUN
ijassa-479	128	61	”	"	PUNCT
ijassa-479	128	62	,	,	PUNCT
ijassa-479	128	63	applied	apply	VERB
ijassa-479	128	64	optics	optic	NOUN
ijassa-479	128	65	,	,	PUNCT
ijassa-479	128	66	vol	vol	NOUN
ijassa-479	128	67	.	.	PROPN
ijassa-479	129	1	37	37	NUM
ijassa-479	129	2	,	,	PUNCT
ijassa-479	129	3	no	no	INTJ
ijassa-479	129	4	.	.	NOUN
ijassa-479	129	5	26	26	NUM
ijassa-479	129	6	,	,	PUNCT
ijassa-479	129	7	pp	pp	ADJ
ijassa-479	129	8	.	.	PUNCT
ijassa-479	130	1	6078	6078	NUM
ijassa-479	130	2	-	-	SYM
ijassa-479	130	3	6092	6092	NUM
ijassa-479	130	4	.	.	PUNCT
ijassa-479	131	1	[	[	X
ijassa-479	131	2	4	4	NUM
ijassa-479	131	3	]	]	X
ijassa-479	131	4	t.p	t.p	PROPN
ijassa-479	131	5	.	.	PROPN
ijassa-479	131	6	kurzweg	kurzweg	PROPN
ijassa-479	131	7	,	,	PUNCT
ijassa-479	131	8	j.a	j.a	PROPN
ijassa-479	131	9	.	.	PROPN
ijassa-479	131	10	martinez	martinez	PROPN
ijassa-479	131	11	,	,	PUNCT
ijassa-479	131	12	s.p	s.p	PROPN
ijassa-479	131	13	.	.	PROPN
ijassa-479	131	14	levitan	levitan	PROPN
ijassa-479	131	15	,	,	PUNCT
ijassa-479	131	16	p.j	p.j	PROPN
ijassa-479	131	17	.	.	PROPN
ijassa-479	131	18	marchand	marchand	PROPN
ijassa-479	131	19	and	and	CCONJ
ijassa-479	131	20	d.m	d.m	PROPN
ijassa-479	131	21	.	.	PUNCT
ijassa-479	131	22	chiarulli(2001	chiarulli(2001	PROPN
ijassa-479	131	23	)	)	PUNCT
ijassa-479	131	24	,	,	PUNCT
ijassa-479	131	25	“	"	PUNCT
ijassa-479	131	26	dynamic	dynamic	ADJ
ijassa-479	131	27	simulation	simulation	NOUN
ijassa-479	131	28	of	of	ADP
ijassa-479	131	29	optical	optical	ADJ
ijassa-479	131	30	mem	mem	ADJ
ijassa-479	131	31	switches	switch	NOUN
ijassa-479	131	32	”	"	PUNCT
ijassa-479	131	33	,	,	PUNCT
ijassa-479	131	34	optics	optic	NOUN
ijassa-479	131	35	in	in	ADP
ijassa-479	131	36	computing	compute	VERB
ijassa-479	131	37	(	(	PUNCT
ijassa-479	131	38	oc’01),lake	oc’01),lake	PROPN
ijassa-479	131	39	tahoe	tahoe	NOUN
ijassa-479	131	40	,	,	PUNCT
ijassa-479	131	41	nv	nv	PROPN
ijassa-479	131	42	,	,	PUNCT
ijassa-479	131	43	pp	pp	ADJ
ijassa-479	131	44	.	.	PUNCT
ijassa-479	131	45	35	35	NUM
ijassa-479	131	46	-	-	SYM
ijassa-479	131	47	37	37	NUM
ijassa-479	131	48	.	.	PUNCT
ijassa-479	132	1	[	[	X
ijassa-479	132	2	5	5	X
ijassa-479	132	3	]	]	PUNCT
ijassa-479	132	4	j.	j.	PROPN
ijassa-479	132	5	davis	davis	PROPN
ijassa-479	132	6	,	,	PUNCT
ijassa-479	132	7	etc.(1999	etc.(1999	NOUN
ijassa-479	132	8	)	)	PUNCT
ijassa-479	132	9	,	,	PUNCT
ijassa-479	132	10	“	"	PUNCT
ijassa-479	132	11	heterogeneous	heterogeneous	ADJ
ijassa-479	132	12	concurrent	concurrent	ADJ
ijassa-479	132	13	modeling	modeling	NOUN
ijassa-479	132	14	and	and	CCONJ
ijassa-479	132	15	design	design	NOUN
ijassa-479	132	16	in	in	ADP
ijassa-479	132	17	java	java	PROPN
ijassa-479	132	18	”	"	PUNCT
ijassa-479	132	19	,	,	PUNCT
ijassa-479	132	20	ucb	ucb	PROPN
ijassa-479	132	21	/	/	SYM
ijassa-479	132	22	erl	erl	PROPN
ijassa-479	132	23	memorandum	memorandum	NOUN
ijassa-479	132	24	m99/	m99/	NOUN
ijassa-479	132	25	40	40	NUM
ijassa-479	132	26	,	,	PUNCT
ijassa-479	132	27	dept	dept	NOUN
ijassa-479	132	28	.	.	PROPN
ijassa-479	132	29	of	of	ADP
ijassa-479	132	30	eecs	eec	NOUN
ijassa-479	132	31	,	,	PUNCT
ijassa-479	132	32	university	university	PROPN
ijassa-479	132	33	of	of	ADP
ijassa-479	132	34	california	california	PROPN
ijassa-479	132	35	,	,	PUNCT
ijassa-479	132	36	berkeley	berkeley	PROPN
ijassa-479	132	37	,	,	PUNCT
ijassa-479	132	38	ca	ca	NOUN
ijassa-479	132	39	94720	94720	NUM
ijassa-479	132	40	.	.	PUNCT
ijassa-479	133	1	[	[	X
ijassa-479	133	2	6	6	NUM
ijassa-479	133	3	]	]	PUNCT
ijassa-479	133	4	j.	j.	PROPN
ijassa-479	133	5	liu	liu	PROPN
ijassa-479	133	6	,	,	PUNCT
ijassa-479	133	7	b.	b.	PROPN
ijassa-479	133	8	wu	wu	PROPN
ijassa-479	133	9	,	,	PUNCT
ijassa-479	133	10	x.	x.	PROPN
ijassa-479	133	11	liu	liu	PROPN
ijassa-479	133	12	and	and	CCONJ
ijassa-479	133	13	e.	e.	PROPN
ijassa-479	133	14	a.	a.	PROPN
ijassa-479	133	15	lee(2001	lee(2001	PROPN
ijassa-479	133	16	)	)	PUNCT
ijassa-479	133	17	,	,	PUNCT
ijassa-479	133	18	“	"	PUNCT
ijassa-479	133	19	interoperation	interoperation	NOUN
ijassa-479	133	20	of	of	ADP
ijassa-479	133	21	heterogeneous	heterogeneous	ADJ
ijassa-479	133	22	cad	cad	NOUN
ijassa-479	133	23	tools	tool	NOUN
ijassa-479	133	24	in	in	ADP
ijassa-479	133	25	ptolemy	ptolemy	PROPN
ijassa-479	133	26	ii	ii	PROPN
ijassa-479	133	27	”	"	PUNCT
ijassa-479	133	28	,	,	PUNCT
ijassa-479	133	29	department	department	NOUN
ijassa-479	133	30	of	of	ADP
ijassa-479	133	31	electrical	electrical	ADJ
ijassa-479	133	32	engineering	engineering	NOUN
ijassa-479	133	33	and	and	CCONJ
ijassa-479	133	34	computer	computer	NOUN
ijassa-479	133	35	science	science	NOUN
ijassa-479	133	36	,	,	PUNCT
ijassa-479	133	37	university	university	PROPN
ijassa-479	133	38	of	of	ADP
ijassa-479	133	39	california	california	PROPN
ijassa-479	133	40	,	,	PUNCT
ijassa-479	133	41	berkeley	berkeley	PROPN
ijassa-479	133	42	,	,	PUNCT
ijassa-479	133	43	ca	ca	AUX
ijassa-479	133	44	94720	94720	NUM
ijassa-479	133	45	u.s.a.journal	u.s.a.journal	ADJ
ijassa-479	133	46	of	of	ADP
ijassa-479	133	47	modeling	modeling	NOUN
ijassa-479	133	48	and	and	CCONJ
ijassa-479	133	49	simulation	simulation	NOUN
ijassa-479	133	50	of	of	ADP
ijassa-479	133	51	microsystems	microsystem	NOUN
ijassa-479	133	52	,	,	PUNCT
ijassa-479	133	53	vol	vol	NOUN
ijassa-479	133	54	.	.	PROPN
ijassa-479	134	1	2	2	NUM
ijassa-479	134	2	,	,	PUNCT
ijassa-479	134	3	no	no	INTJ
ijassa-479	134	4	.	.	NOUN
ijassa-479	134	5	1	1	NUM
ijassa-479	134	6	,	,	PUNCT
ijassa-479	134	7	pp	pp	ADJ
ijassa-479	134	8	.	.	PUNCT
ijassa-479	135	1	1	1	NUM
ijassa-479	135	2	-	-	SYM
ijassa-479	135	3	10	10	NUM
ijassa-479	135	4	.	.	PUNCT
ijassa-479	136	1	[	[	X
ijassa-479	136	2	7	7	X
ijassa-479	136	3	]	]	X
ijassa-479	136	4	p.sangeetha	p.sangeetha	NOUN
ijassa-479	136	5	and	and	CCONJ
ijassa-479	136	6	a.vimala	a.vimala	PROPN
ijassa-479	136	7	juliet	juliet	PROPN
ijassa-479	136	8	,	,	PUNCT
ijassa-479	136	9	“	"	PUNCT
ijassa-479	136	10	mems	mems	X
ijassa-479	136	11	cantilever	cantilever	NOUN
ijassa-479	136	12	based	base	VERB
ijassa-479	136	13	immunosensors	immunosensor	NOUN
ijassa-479	136	14	for	for	ADP
ijassa-479	136	15	biomolecular	biomolecular	ADJ
ijassa-479	136	16	recognition	recognition	NOUN
ijassa-479	136	17	”	"	PUNCT
ijassa-479	136	18	,	,	PUNCT
ijassa-479	136	19	international	international	ADJ
ijassa-479	136	20	journal	journal	NOUN
ijassa-479	136	21	of	of	ADP
ijassa-479	136	22	computer	computer	NOUN
ijassa-479	136	23	technology	technology	NOUN
ijassa-479	136	24	and	and	CCONJ
ijassa-479	136	25	electronics	electronic	NOUN
ijassa-479	136	26	engineering	engineering	NOUN
ijassa-479	136	27	(	(	PUNCT
ijassa-479	136	28	ijctee	ijctee	NOUN
ijassa-479	136	29	)	)	PUNCT
ijassa-479	136	30	,	,	PUNCT
ijassa-479	136	31	vol	vol	NOUN
ijassa-479	136	32	.	.	PROPN
ijassa-479	136	33	2	2	NUM
ijassa-479	136	34	,	,	PUNCT
ijassa-479	136	35	no	no	INTJ
ijassa-479	136	36	.	.	NOUN
ijassa-479	136	37	1	1	NUM
ijassa-479	136	38	.	.	X
ijassa-479	136	39	advances	advance	NOUN
ijassa-479	136	40	in	in	ADP
ijassa-479	136	41	systems	system	NOUN
ijassa-479	136	42	science	science	NOUN
ijassa-479	136	43	and	and	CCONJ
ijassa-479	136	44	application	application	NOUN
ijassa-479	136	45	(	(	PUNCT
ijassa-479	136	46	2016	2016	NUM
ijassa-479	136	47	)	)	PUNCT
ijassa-479	137	1	vol.16	vol.16	PROPN
ijassa-479	137	2	no.3	no.3	VERB
ijassa-479	137	3	93	93	NUM
ijassa-479	138	1	[	[	X
ijassa-479	138	2	8	8	NUM
ijassa-479	138	3	]	]	PUNCT
ijassa-479	138	4	m.	m.	NOUN
ijassa-479	138	5	maute	maute	PROPN
ijassa-479	138	6	,	,	PUNCT
ijassa-479	138	7	s.	s.	PROPN
ijassa-479	138	8	raible	raible	PROPN
ijassa-479	138	9	,	,	PUNCT
ijassa-479	138	10	f.e	f.e	PROPN
ijassa-479	138	11	.	.	PROPN
ijassa-479	138	12	prins	prins	PROPN
ijassa-479	138	13	,	,	PUNCT
ijassa-479	138	14	d.p	d.p	PROPN
ijassa-479	138	15	.	.	PROPN
ijassa-479	138	16	kern	kern	PROPN
ijassa-479	138	17	,	,	PUNCT
ijassa-479	138	18	h.	h.	PROPN
ijassa-479	138	19	ulmer	ulmer	PROPN
ijassa-479	138	20	,	,	PUNCT
ijassa-479	138	21	u.weimar	u.weimar	PROPN
ijassa-479	138	22	and	and	CCONJ
ijassa-479	138	23	w.	w.	PROPN
ijassa-479	138	24	gopel(1999	gopel(1999	PROPN
ijassa-479	138	25	)	)	PUNCT
ijassa-479	138	26	,	,	PUNCT
ijassa-479	138	27	“	"	PUNCT
ijassa-479	138	28	detection	detection	NOUN
ijassa-479	138	29	of	of	ADP
ijassa-479	138	30	volatile	volatile	ADJ
ijassa-479	138	31	organic	organic	ADJ
ijassa-479	138	32	compounds	compound	NOUN
ijassa-479	138	33	vocs/	vocs/	NUM
ijassa-479	138	34	with	with	ADP
ijassa-479	138	35	polymer	polymer	NOUN
ijassa-479	138	36	-	-	PUNCT
ijassa-479	138	37	coated	coat	VERB
ijassa-479	138	38	cantilevers	cantilever	NOUN
ijassa-479	138	39	”	"	PUNCT
ijassa-479	138	40	,	,	PUNCT
ijassa-479	138	41	sensors	sensor	NOUN
ijassa-479	138	42	and	and	CCONJ
ijassa-479	138	43	actuators	actuator	NOUN
ijassa-479	138	44	,	,	PUNCT
ijassa-479	138	45	pp.505c511	pp.505c511	NOUN
ijassa-479	138	46	.	.	PUNCT
ijassa-479	139	1	[	[	X
ijassa-479	139	2	9	9	NUM
ijassa-479	139	3	]	]	PUNCT
ijassa-479	139	4	denis	denis	PROPN
ijassa-479	139	5	spitzer	spitzer	PROPN
ijassa-479	139	6	,	,	PUNCT
ijassa-479	139	7	thomas	thomas	PROPN
ijassa-479	139	8	cottineau	cottineau	PROPN
ijassa-479	139	9	,	,	PUNCT
ijassa-479	139	10	nelly	nelly	PROPN
ijassa-479	139	11	piazzon	piazzon	PROPN
ijassa-479	139	12	,	,	PUNCT
ijassa-479	139	13	sbastien	sbastien	PROPN
ijassa-479	139	14	josset	josset	PROPN
ijassa-479	139	15	,	,	PUNCT
ijassa-479	139	16	fabien	fabien	PROPN
ijassa-479	139	17	schnell	schnell	PROPN
ijassa-479	139	18	,	,	PUNCT
ijassa-479	139	19	sergey	sergey	PROPN
ijassa-479	139	20	nikolayevich	nikolayevich	PRON
ijassa-479	139	21	pronkin	pronkin	PROPN
ijassa-479	139	22	,	,	PUNCT
ijassa-479	139	23	elena	elena	PROPN
ijassa-479	139	24	romanovna	romanovna	VERB
ijassa-479	139	25	savinova	savinova	VERB
ijassa-479	139	26	and	and	CCONJ
ijassa-479	139	27	valerie	valerie	PROPN
ijassa-479	139	28	keller(2012	keller(2012	PROPN
ijassa-479	139	29	)	)	PUNCT
ijassa-479	139	30	,	,	PUNCT
ijassa-479	139	31	“	"	PUNCT
ijassa-479	139	32	research	research	NOUN
ijassa-479	139	33	on	on	ADP
ijassa-479	139	34	the	the	DET
ijassa-479	139	35	sustainable	sustainable	ADJ
ijassa-479	139	36	utilization	utilization	NOUN
ijassa-479	139	37	of	of	ADP
ijassa-479	139	38	water	water	NOUN
ijassa-479	139	39	resources	resource	NOUN
ijassa-479	139	40	of	of	ADP
ijassa-479	139	41	jinan	jinan	PROPN
ijassa-479	139	42	city	city	PROPN
ijassa-479	139	43	”	"	PUNCT
ijassa-479	139	44	,	,	PUNCT
ijassa-479	139	45	bio	bio	ADJ
ijassa-479	139	46	-	-	PUNCT
ijassa-479	139	47	inspired	inspire	VERB
ijassa-479	139	48	nanostructured	nanostructure	VERB
ijassa-479	139	49	sensor	sensor	NOUN
ijassa-479	139	50	for	for	ADP
ijassa-479	139	51	the	the	DET
ijassa-479	139	52	detection	detection	NOUN
ijassa-479	139	53	of	of	ADP
ijassa-479	139	54	ultralow	ultralow	ADJ
ijassa-479	139	55	concentrations	concentration	NOUN
ijassa-479	139	56	of	of	ADP
ijassa-479	139	57	explosives	explosive	NOUN
ijassa-479	139	58	,	,	PUNCT
ijassa-479	139	59	angew	angew	NOUN
ijassa-479	139	60	.	.	PUNCT
ijassa-479	140	1	chem	chem	PROPN
ijassa-479	140	2	.	.	PUNCT
ijassa-479	141	1	int	int	NOUN
ijassa-479	141	2	.	.	PUNCT
ijassa-479	142	1	ed	ed	NOUN
ijassa-479	142	2	.	.	PUNCT
ijassa-479	142	3	pp.5334c5338	pp.5334c5338	NOUN
ijassa-479	142	4	.	.	PUNCT
ijassa-479	143	1	[	[	X
ijassa-479	143	2	10	10	NUM
ijassa-479	143	3	]	]	SYM
ijassa-479	143	4	b	b	NOUN
ijassa-479	143	5	g	g	NOUN
ijassa-479	143	6	sheeparamatti	sheeparamatti	NOUN
ijassa-479	143	7	,	,	PUNCT
ijassa-479	143	8	m	m	PROPN
ijassa-479	143	9	s	s	NOUN
ijassa-479	143	10	hebbal	hebbal	ADJ
ijassa-479	143	11	,	,	PUNCT
ijassa-479	143	12	r	r	NOUN
ijassa-479	143	13	b	b	NOUN
ijassa-479	143	14	sheeparamatti	sheeparamatti	NOUN
ijassa-479	143	15	,	,	PUNCT
ijassa-479	143	16	v	v	PROPN
ijassa-479	143	17	b	b	PROPN
ijassa-479	143	18	math	math	NOUN
ijassa-479	143	19	and	and	CCONJ
ijassa-479	143	20	j	j	PROPN
ijassa-479	143	21	s	s	PROPN
ijassa-479	143	22	kadadevaramath(2006	kadadevaramath(2006	PROPN
ijassa-479	143	23	)	)	PUNCT
ijassa-479	143	24	,	,	PUNCT
ijassa-479	143	25	‘	'	PUNCT
ijassa-479	143	26	simulation	simulation	NOUN
ijassa-479	143	27	of	of	ADP
ijassa-479	143	28	biosensor	biosensor	NOUN
ijassa-479	143	29	using	use	VERB
ijassa-479	143	30	fem	fem	PROPN
ijassa-479	143	31	”	"	PUNCT
ijassa-479	143	32	,	,	PUNCT
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ijassa-479	143	35	physics	physics	PROPN
ijassa-479	143	36	:	:	PUNCT
ijassa-479	143	37	conference	conference	NOUN
ijassa-479	143	38	series	series	NOUN
ijassa-479	143	39	,	,	PUNCT
ijassa-479	143	40	vol.34	vol.34	PROPN
ijassa-479	143	41	,	,	PUNCT
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ijassa-479	144	1	[	[	X
ijassa-479	144	2	11	11	NUM
ijassa-479	144	3	]	]	X
ijassa-479	144	4	richardson	richardson	PROPN
ijassa-479	144	5	r	r	PROPN
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ijassa-479	144	8	.	.	PROPN
ijassa-479	144	9	miller	miller	PROPN
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ijassa-479	144	11	w.m	w.m	PROPN
ijassa-479	144	12	.	.	PROPN
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ijassa-479	144	14	)	)	PUNCT
ijassa-479	144	15	,	,	PUNCT
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ijassa-479	144	17	.	.	PUNCT
ijassa-479	144	18	,	,	PUNCT
ijassa-479	144	19	vol.(14	vol.(14	PROPN
ijassa-479	144	20	)	)	PUNCT
ijassa-479	144	21	,	,	PUNCT
ijassa-479	144	22	pp.627c635	pp.627c635	NOUN
ijassa-479	144	23	.	.	PUNCT
ijassa-479	145	1	[	[	X
ijassa-479	145	2	12	12	NUM
ijassa-479	145	3	]	]	X
ijassa-479	145	4	subhashini	subhashini	X
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ijassa-479	146	2	)	)	PUNCT
ijassa-479	146	3	,	,	PUNCT
ijassa-479	146	4	“	"	PUNCT
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ijassa-479	146	6	based	base	VERB
ijassa-479	146	7	micromechanical	micromechanical	ADJ
ijassa-479	146	8	cantilever	cantilever	NOUN
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ijassa-479	146	13	,	,	PUNCT
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ijassa-479	146	15	journal	journal	NOUN
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ijassa-479	146	17	network	network	NOUN
ijassa-479	146	18	security	security	NOUN
ijassa-479	146	19	and	and	CCONJ
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ijassa-479	146	25	,	,	PUNCT
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ijassa-479	147	1	[	[	X
ijassa-479	147	2	13	13	NUM
ijassa-479	147	3	]	]	X
ijassa-479	147	4	stoney	stoney	PROPN
ijassa-479	147	5	g(1909	g(1909	PROPN
ijassa-479	147	6	)	)	PUNCT
ijassa-479	147	7	,	,	PUNCT
ijassa-479	147	8	the	the	DET
ijassa-479	147	9	tension	tension	NOUN
ijassa-479	147	10	of	of	ADP
ijassa-479	147	11	metallic	metallic	ADJ
ijassa-479	147	12	films	film	NOUN
ijassa-479	147	13	deposited	deposit	VERB
ijassa-479	147	14	by	by	ADP
ijassa-479	147	15	electrolysis	electrolysis	NOUN
ijassa-479	147	16	,	,	PUNCT
ijassa-479	147	17	proc	proc	NOUN
ijassa-479	147	18	r	r	PROPN
ijassa-479	147	19	soc	soc	NOUN
ijassa-479	147	20	lond	lond	PROPN
ijassa-479	147	21	ser	ser	NOUN
ijassa-479	147	22	a	a	DET
ijassa-479	147	23	1909	1909	NUM
ijassa-479	147	24	;	;	PUNCT
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ijassa-479	147	26	:	:	SYM
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ijassa-479	147	30	..	..	PUNCT
ijassa-479	147	31	stoney	stoney	NOUN
ijassa-479	147	32	,	,	PUNCT
ijassa-479	147	33	g.	g.	PROPN
ijassa-479	147	34	gerald	gerald	PROPN
ijassa-479	147	35	.	.	PUNCT
ijassa-479	148	1	“	"	PUNCT
ijassa-479	148	2	the	the	DET
ijassa-479	148	3	tension	tension	NOUN
ijassa-479	148	4	of	of	ADP
ijassa-479	148	5	metallic	metallic	ADJ
ijassa-479	148	6	films	film	NOUN
ijassa-479	148	7	deposited	deposit	VERB
ijassa-479	148	8	by	by	ADP
ijassa-479	148	9	electrolysis	electrolysis	NOUN
ijassa-479	148	10	”	"	PUNCT
ijassa-479	148	11	,	,	PUNCT
ijassa-479	148	12	proceedings	proceeding	NOUN
ijassa-479	148	13	of	of	ADP
ijassa-479	148	14	the	the	DET
ijassa-479	148	15	royal	royal	ADJ
ijassa-479	148	16	society	society	NOUN
ijassa-479	148	17	of	of	ADP
ijassa-479	148	18	london	london	PROPN
ijassa-479	148	19	,	,	PUNCT
ijassa-479	148	20	pp.40	pp.40	PROPN
ijassa-479	148	21	-	-	SYM
ijassa-479	148	22	43	43	NUM
ijassa-479	148	23	.	.	PUNCT
ijassa-479	149	1	[	[	X
ijassa-479	149	2	14	14	NUM
ijassa-479	149	3	]	]	PUNCT
ijassa-479	149	4	suryansh	suryansh	PROPN
ijassa-479	149	5	arora	arora	PROPN
ijassa-479	149	6	,	,	PUNCT
ijassa-479	149	7	sumati	sumati	PROPN
ijassa-479	149	8	,	,	PUNCT
ijassa-479	149	9	arti	arti	PROPN
ijassa-479	149	10	arora	arora	PROPN
ijassa-479	149	11	and	and	CCONJ
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ijassa-479	149	13	(	(	PUNCT
ijassa-479	149	14	2012	2012	NUM
ijassa-479	149	15	)	)	PUNCT
ijassa-479	149	16	,	,	PUNCT
ijassa-479	149	17	“	"	PUNCT
ijassa-479	149	18	design	design	NOUN
ijassa-479	149	19	of	of	ADP
ijassa-479	149	20	mems	mem	NOUN
ijassa-479	149	21	based	base	VERB
ijassa-479	149	22	microcantilever	microcantilever	NOUN
ijassa-479	149	23	using	use	VERB
ijassa-479	149	24	comsol	comsol	NOUN
ijassa-479	149	25	multiphysics	multiphysic	NOUN
ijassa-479	149	26	”	"	PUNCT
ijassa-479	149	27	,	,	PUNCT
ijassa-479	149	28	international	international	ADJ
ijassa-479	149	29	journal	journal	NOUN
ijassa-479	149	30	of	of	ADP
ijassa-479	149	31	applied	apply	VERB
ijassa-479	149	32	engineering	engineering	NOUN
ijassa-479	149	33	research	research	NOUN
ijassa-479	149	34	,	,	PUNCT
ijassa-479	149	35	vol.7	vol.7	PROPN
ijassa-479	149	36	no.11	no.11	NOUN
ijassa-479	149	37	.	.	PUNCT
ijassa-479	150	1	pp.1	pp.1	NOUN
ijassa-479	150	2	-	-	PUNCT
ijassa-479	150	3	3	3	NUM
ijassa-479	150	4	.	.	PUNCT
ijassa-479	151	1	[	[	X
ijassa-479	151	2	15	15	NUM
ijassa-479	151	3	]	]	X
ijassa-479	151	4	g.	g.	PROPN
ijassa-479	151	5	louarn	louarn	PROPN
ijassa-479	151	6	and	and	CCONJ
ijassa-479	151	7	s.	s.	PROPN
ijassa-479	151	8	cuenot(2008	cuenot(2008	PROPN
ijassa-479	151	9	)	)	PUNCT
ijassa-479	151	10	,	,	PUNCT
ijassa-479	151	11	“	"	PUNCT
ijassa-479	151	12	finite	finite	PROPN
ijassa-479	151	13	element	element	NOUN
ijassa-479	151	14	modelling	modelling	NOUN
ijassa-479	151	15	of	of	ADP
ijassa-479	151	16	microcantilevers	microcantilever	NOUN
ijassa-479	151	17	used	use	VERB
ijassa-479	151	18	as	as	ADP
ijassa-479	151	19	chemical	chemical	ADJ
ijassa-479	151	20	sensors	sensor	NOUN
ijassa-479	151	21	”	"	PUNCT
ijassa-479	151	22	,	,	PUNCT
ijassa-479	151	23	recent	recent	ADJ
ijassa-479	151	24	advances	advance	NOUN
ijassa-479	151	25	in	in	ADP
ijassa-479	151	26	modelling	modelling	NOUN
ijassa-479	151	27	and	and	CCONJ
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ijassa-479	151	29	,	,	PUNCT
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ijassa-479	151	31	-	-	SYM
ijassa-479	151	32	222	222	NUM
ijassa-479	151	33	.	.	PUNCT
ijassa-479	152	1	corresponding	correspond	VERB
ijassa-479	152	2	author	author	NOUN
ijassa-479	152	3	rajasekhara	rajasekhara	PROPN
ijassa-479	152	4	babu	babu	PROPN
ijassa-479	152	5	m	m	PROPN
ijassa-479	152	6	can	can	AUX
ijassa-479	152	7	be	be	AUX
ijassa-479	152	8	contacted	contact	VERB
ijassa-479	152	9	at	at	ADP
ijassa-479	152	10	:	:	PUNCT
ijassa-479	152	11	rajababu.m1@gmail.com	rajababu.m1@gmail.com	X