id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
aiti-207	Lee, Shui-Pin	EWMA Controller with Concurrent Adjustment for a High-Mixed Production Process	2017	4	.pdf	application/pdf	1847	92	62	[2] E. Sachs, A. Hu, and E. Ingolfsson, “Run by run process control: combining SPC and feedback control,” IEEE Transactions Sem- iconductor Manufacturing, vol. 8, pp. In this study, a modified threaded EWMA feedback controller, the EWMA with concurrent adjustment, is proposed to deal with the issue of multiple products in a tool.	cache/aiti-207.pdf	txt/aiti-207.txt