id	sid	eid	entity	type
aiti-1020	2	1	3	CARDINAL
aiti-1020	2	2	4, 2018	DATE
aiti-1020	3	1	157 165	CARDINAL
aiti-1020	3	2	m. bakowski	PERSON
aiti-1020	3	3	4	DATE
aiti-1020	3	4	j. lang 1	PERSON
aiti-1020	3	5	j-k. lim 4	PERSON
aiti-1020	3	6	j. hellén 3	PERSON
aiti-1020	3	7	t. m. j. nilsson 3	PERSON
aiti-1020	3	8	b. schodt	PERSON
aiti-1020	3	9	5	CARDINAL
aiti-1020	3	10	r. poder 5	PERSON
aiti-1020	3	11	i. belov 2	PERSON
aiti-1020	3	12	1 1sp	CARDINAL
aiti-1020	3	13	sweden	GPE
aiti-1020	3	14	857	CARDINAL
aiti-1020	3	15	501 15	CARDINAL
aiti-1020	3	16	borås	GPE
aiti-1020	3	17	sweden	GPE
aiti-1020	4	1	2jönköping	CARDINAL
aiti-1020	4	2	1026	CARDINAL
aiti-1020	4	3	551 11	QUANTITY
aiti-1020	4	4	sweden	GPE
aiti-1020	5	1	3saab	CARDINAL
aiti-1020	5	2	10	CARDINAL
aiti-1020	5	3	412 76	CARDINAL
aiti-1020	5	4	gothenburg	GPE
aiti-1020	5	5	sweden	GPE
aiti-1020	6	1	4rise	CARDINAL
aiti-1020	6	2	1070	DATE
aiti-1020	6	3	164	CARDINAL
aiti-1020	6	4	kista	GPE
aiti-1020	6	5	sweden	GPE
aiti-1020	7	1	5sp technical research institute	ORG
aiti-1020	7	2	sweden	GPE
aiti-1020	7	3	a.c. meyers v. 15,	ORG
aiti-1020	7	4	2450	CARDINAL
aiti-1020	7	5	denmark	GPE
aiti-1020	8	1	21	CARDINAL
aiti-1020	8	2	july 2017	DATE
aiti-1020	8	3	19	CARDINAL
aiti-1020	8	4	september 2017	DATE
aiti-1020	8	5	one	CARDINAL
aiti-1020	9	1	two	CARDINAL
aiti-1020	9	2	sac305	NORP
aiti-1020	9	3	two	CARDINAL
aiti-1020	9	4	nanotim	ORG
aiti-1020	9	5	805	CARDINAL
aiti-1020	11	1	tim	PERSON
aiti-1020	12	1	1	CARDINAL
aiti-1020	13	1	two	CARDINAL
aiti-1020	14	1	first	ORDINAL
aiti-1020	16	1	second	ORDINAL
aiti-1020	16	2	gaas devices	ORG
aiti-1020	17	1	gaas transistors	ORG
aiti-1020	17	2	1	CARDINAL
aiti-1020	18	1	2	CARDINAL
aiti-1020	20	1	tim	PERSON
aiti-1020	24	1	+46-70-7817760	CARDINAL
aiti-1020	25	1	3	CARDINAL
aiti-1020	25	2	4, 2018	DATE
aiti-1020	26	1	157 165	CARDINAL
aiti-1020	26	2	158 2	ORG
aiti-1020	26	3	50	CARDINAL
aiti-1020	27	1	8	CARDINAL
aiti-1020	27	2	one	CARDINAL
aiti-1020	28	1	two	CARDINAL
aiti-1020	28	2	sac305	NORP
aiti-1020	28	3	two	CARDINAL
aiti-1020	28	4	nanotim	ORG
aiti-1020	28	5	805	CARDINAL
aiti-1020	29	1	8	CARDINAL
aiti-1020	29	2	25x35 mm	QUANTITY
aiti-1020	29	3	2	CARDINAL
aiti-1020	29	4	7	CARDINAL
aiti-1020	29	5	3	CARDINAL
aiti-1020	29	6	25%	PERCENT
aiti-1020	31	1	0.3	CARDINAL
aiti-1020	31	2	0.5 mm	QUANTITY
aiti-1020	32	1	1	CARDINAL
aiti-1020	33	1	24	CARDINAL
aiti-1020	33	2	2300	CARDINAL
aiti-1020	33	3	80°	QUANTITY
aiti-1020	33	4	26	CARDINAL
aiti-1020	33	5	100	CARDINAL
aiti-1020	33	6	45	CARDINAL
aiti-1020	33	7	2 min	TIME
aiti-1020	36	1	2300	CARDINAL
aiti-1020	36	2	1100	CARDINAL
aiti-1020	36	3	4700	CARDINAL
aiti-1020	36	4	14500	CARDINAL
aiti-1020	37	1	2d	CARDINAL
aiti-1020	39	1	1	CARDINAL
aiti-1020	40	1	standard ipc 785	ORG
aiti-1020	41	1	one	CARDINAL
aiti-1020	41	2	113 min	DATE
aiti-1020	41	3	one month	DATE
aiti-1020	41	4	about one year	DATE
aiti-1020	42	1	at least one	CARDINAL
aiti-1020	43	1	fig	ORG
aiti-1020	44	1	2	CARDINAL
aiti-1020	44	2	3	CARDINAL
aiti-1020	44	3	4, 2018	DATE
aiti-1020	45	1	157 165	CARDINAL
aiti-1020	45	2	159	CARDINAL
aiti-1020	45	3	tim	PERSON
aiti-1020	48	1	2 min	QUANTITY
aiti-1020	48	2	20 years	DATE
aiti-1020	51	1	3	CARDINAL
aiti-1020	53	1	tim	PERSON
aiti-1020	54	1	3.1	CARDINAL
aiti-1020	54	2	26	CARDINAL
aiti-1020	54	3	0.015 l/s	MONEY
aiti-1020	55	1	45	CARDINAL
aiti-1020	55	2	3.0	CARDINAL
aiti-1020	56	1	2 min	QUANTITY
aiti-1020	56	2	14 500	CARDINAL
aiti-1020	56	3	20 years	DATE
aiti-1020	57	1	26	CARDINAL
aiti-1020	57	2	two	CARDINAL
aiti-1020	57	3	one	CARDINAL
aiti-1020	59	1	2.	CARDINAL
aiti-1020	59	2	3.1.1	CARDINAL
aiti-1020	61	1	3	CARDINAL
aiti-1020	63	1	14500	CARDINAL
aiti-1020	64	1	4	CARDINAL
aiti-1020	64	2	three	CARDINAL
aiti-1020	64	3	tim	PERSON
aiti-1020	64	4	sac305&nanotim	PERSON
aiti-1020	65	1	about 16 %	PERCENT
aiti-1020	65	2	tim	PERSON
aiti-1020	66	1	about 5	CARDINAL
aiti-1020	66	2	12	DATE
aiti-1020	66	3	16 %	PERCENT
aiti-1020	66	4	1100	DATE
aiti-1020	66	5	4700	CARDINAL
aiti-1020	66	6	14500	CARDINAL
aiti-1020	67	1	0	CARDINAL
aiti-1020	67	2	2 4 6 8	TIME
aiti-1020	67	3	500	CARDINAL
aiti-1020	67	4	1100	CARDINAL
aiti-1020	67	5	4700	CARDINAL
aiti-1020	67	6	14500	CARDINAL
aiti-1020	68	1	0.8	CARDINAL
aiti-1020	69	1	0.6	CARDINAL
aiti-1020	69	2	0.4	CARDINAL
aiti-1020	69	3	0.2	CARDINAL
aiti-1020	70	1	0.8	CARDINAL
aiti-1020	70	2	10	CARDINAL
aiti-1020	70	3	340 360	CARDINAL
aiti-1020	70	4	400	CARDINAL
aiti-1020	70	5	420	CARDINAL
aiti-1020	70	6	440	CARDINAL
aiti-1020	70	7	sac305	NORP
aiti-1020	70	8	tim	PERSON
aiti-1020	71	1	3	CARDINAL
aiti-1020	72	1	4	CARDINAL
aiti-1020	72	2	14500	CARDINAL
aiti-1020	73	1	3	CARDINAL
aiti-1020	73	2	4, 2018	DATE
aiti-1020	74	1	157 165	CARDINAL
aiti-1020	74	2	160	CARDINAL
aiti-1020	75	1	0	CARDINAL
aiti-1020	76	1	sac305&nanotim	PERSON
aiti-1020	76	2	fig.	DATE
aiti-1020	77	1	5	CARDINAL
aiti-1020	77	2	-0.1	ORG
aiti-1020	77	3	-0.15	PERSON
aiti-1020	77	4	about -2.25	CARDINAL
aiti-1020	77	5	10	CARDINAL
aiti-1020	77	6	s h o ld v o lt a g e	ORG
aiti-1020	79	1	sac305	NORP
aiti-1020	79	2	tim fig	PERSON
aiti-1020	80	1	5	CARDINAL
aiti-1020	80	2	14500	CARDINAL
aiti-1020	82	1	2	CARDINAL
aiti-1020	84	1	6	CARDINAL
aiti-1020	85	1	vds	ORG
aiti-1020	85	2	up to 100	CARDINAL
aiti-1020	88	1	6	CARDINAL
aiti-1020	89	1	3.2	CARDINAL
aiti-1020	90	1	24	CARDINAL
aiti-1020	90	2	2300	CARDINAL
aiti-1020	91	1	2-3 °	TIME
aiti-1020	91	2	15 min	QUANTITY
aiti-1020	91	3	12	CARDINAL
aiti-1020	91	4	12	CARDINAL
aiti-1020	92	1	3	CARDINAL
aiti-1020	92	2	4, 2018	DATE
aiti-1020	93	1	157 165	CARDINAL
aiti-1020	93	2	161	CARDINAL
aiti-1020	94	1	two	CARDINAL
aiti-1020	95	1	2	CARDINAL
aiti-1020	96	1	3.2.1	CARDINAL
aiti-1020	96	2	7	CARDINAL
aiti-1020	100	1	2d	DATE
aiti-1020	102	1	fig	ORG
aiti-1020	103	1	7	CARDINAL
aiti-1020	103	2	3.2.2	CARDINAL
aiti-1020	104	1	tc	ORG
aiti-1020	104	2	figs 8 and 9	DATE
aiti-1020	106	1	fig	ORG
aiti-1020	107	1	8	CARDINAL
aiti-1020	107	2	2300	CARDINAL
aiti-1020	108	1	9	CARDINAL
aiti-1020	108	2	2300	CARDINAL
aiti-1020	108	3	3.3	CARDINAL
aiti-1020	109	1	1.3 ghz	QUANTITY
aiti-1020	110	1	10	CARDINAL
aiti-1020	111	1	16.04±0.24	CARDINAL
aiti-1020	111	2	15.51±0.28	CARDINAL
aiti-1020	111	3	ids=100 ma	PERSON
aiti-1020	111	4	5	CARDINAL
aiti-1020	111	5	1.3 ghz	QUANTITY
aiti-1020	113	1	11	CARDINAL
aiti-1020	114	1	sac305	NORP
aiti-1020	115	1	12	CARDINAL
aiti-1020	118	1	3	CARDINAL
aiti-1020	118	2	4, 2018	DATE
aiti-1020	119	1	157 165	CARDINAL
aiti-1020	119	2	162	CARDINAL
aiti-1020	120	1	10	CARDINAL
aiti-1020	120	2	30 khz to 3	QUANTITY
aiti-1020	121	1	11	CARDINAL
aiti-1020	121	2	14500	CARDINAL
aiti-1020	122	1	12	CARDINAL
aiti-1020	122	2	3.4	CARDINAL
aiti-1020	123	1	13	CARDINAL
aiti-1020	124	1	3	CARDINAL
aiti-1020	124	2	4, 2018	DATE
aiti-1020	125	1	157 165	CARDINAL
aiti-1020	125	2	163	CARDINAL
aiti-1020	126	1	13	CARDINAL
aiti-1020	126	2	7.2 w	MONEY
aiti-1020	128	1	0.15-0.19	QUANTITY
aiti-1020	129	1	less than 1°	QUANTITY
aiti-1020	129	2	nanotim	ORG
aiti-1020	129	3	7°	QUANTITY
aiti-1020	129	4	805	CARDINAL
aiti-1020	131	1	14	CARDINAL
aiti-1020	132	1	15	CARDINAL
aiti-1020	132	2	fig	ORG
aiti-1020	133	1	14	CARDINAL
aiti-1020	134	1	15	CARDINAL
aiti-1020	135	1	16	CARDINAL
aiti-1020	138	1	16	CARDINAL
aiti-1020	138	2	ir	ORG
aiti-1020	138	3	3.5	CARDINAL
aiti-1020	139	1	2d	CARDINAL
aiti-1020	139	2	fig	PERSON
aiti-1020	140	1	17	CARDINAL
aiti-1020	141	1	18	CARDINAL
aiti-1020	144	1	3	CARDINAL
aiti-1020	144	2	4, 2018	DATE
aiti-1020	145	1	157 165	CARDINAL
aiti-1020	145	2	164	CARDINAL
aiti-1020	146	1	17	CARDINAL
aiti-1020	146	2	305	CARDINAL
aiti-1020	147	1	18	CARDINAL
aiti-1020	147	2	305	CARDINAL
aiti-1020	149	1	19 and 20	DATE
aiti-1020	151	1	6	CARDINAL
aiti-1020	153	1	two	CARDINAL
aiti-1020	154	1	fig	ORG
aiti-1020	155	1	19	CARDINAL
aiti-1020	156	1	20	CARDINAL
aiti-1020	157	1	3	CARDINAL
aiti-1020	157	2	4, 2018	DATE
aiti-1020	158	1	157 165	CARDINAL
aiti-1020	158	2	165	CARDINAL
aiti-1020	158	3	8 and 9	DATE
aiti-1020	160	1	7	CARDINAL
aiti-1020	163	1	11	CARDINAL
aiti-1020	163	2	10	CARDINAL
aiti-1020	163	3	26	CARDINAL
aiti-1020	163	4	1	CARDINAL
aiti-1020	163	5	24	CARDINAL
aiti-1020	164	1	5	CARDINAL
aiti-1020	166	1	two	CARDINAL
aiti-1020	167	1	40%	PERCENT
aiti-1020	170	1	tim	PERSON
aiti-1020	170	2	2d	CARDINAL
aiti-1020	171	1	sweden	GPE
aiti-1020	171	2	sweden energy authority	ORG
aiti-1020	171	3	2014-05667	DATE
aiti-1020	172	1	1	CARDINAL
aiti-1020	172	2	k. mishra	PERSON
aiti-1020	172	3	l. shen	PERSON
aiti-1020	172	4	t. e. kazior	PERSON
aiti-1020	172	5	y. f. wu	PERSON
aiti-1020	174	1	96	DATE
aiti-1020	174	2	2	CARDINAL
aiti-1020	175	1	287	CARDINAL
aiti-1020	175	2	february 2008	DATE
aiti-1020	176	1	2	CARDINAL
aiti-1020	176	2	h. kim	PERSON
aiti-1020	176	3	v. tilak	PERSON
aiti-1020	176	4	b. m. green	PERSON
aiti-1020	176	5	j. a. smart	PERSON
aiti-1020	176	6	w. j. schaff	PERSON
aiti-1020	176	7	j. r. shealy	PERSON
aiti-1020	176	8	l. f. eastman	PERSON
aiti-1020	177	1	188	CARDINAL
aiti-1020	177	2	1	CARDINAL
aiti-1020	178	1	203-206	CARDINAL
aiti-1020	178	2	november 2001	DATE
aiti-1020	179	1	3	CARDINAL
aiti-1020	179	2	y. c. chou	PERSON
aiti-1020	179	3	d. leung	PERSON
aiti-1020	179	4	i. smorchkova	PERSON
aiti-1020	179	5	m. wojtowicz	PERSON
aiti-1020	179	6	r. grunbacher	PERSON
aiti-1020	179	7	l. callejo	PERSON
aiti-1020	179	8	q. kan	PERSON
aiti-1020	179	9	r. lai	PERSON
aiti-1020	179	10	p. h. liu	PERSON
aiti-1020	179	11	d. eng	PERSON
aiti-1020	179	12	a. oki	PERSON
aiti-1020	179	13	44	DATE
aiti-1020	179	14	1033-1038	CARDINAL
aiti-1020	179	15	july 2004	DATE
aiti-1020	180	1	4	CARDINAL
aiti-1020	180	2	e. zanoni	PERSON
aiti-1020	180	3	g. meneghesso	PERSON
aiti-1020	180	4	m. meneghini	PERSON
aiti-1020	180	5	a. stocco	PERSON
aiti-1020	180	6	f. rampazzo	PERSON
aiti-1020	180	7	r. silvestri	PERSON
aiti-1020	180	8	i. rossetto	PERSON
aiti-1020	180	9	n. ronchi	PERSON
aiti-1020	180	10	ecs	ORG
aiti-1020	180	11	41	CARDINAL
aiti-1020	180	12	8	CARDINAL
aiti-1020	180	13	237	CARDINAL
aiti-1020	181	1	5	CARDINAL
aiti-1020	181	2	g. meneghesso	PERSON
aiti-1020	181	3	m. meneghini	PERSON
aiti-1020	181	4	d. bisi	PERSON
aiti-1020	181	5	r. silvestri	PERSON
aiti-1020	181	6	a. zanandrea	PERSON
aiti-1020	181	7	o. hilt	PERSON
aiti-1020	181	8	e. bahat-treidel	PERSON
aiti-1020	181	9	f. brunner	PERSON
aiti-1020	181	10	a. knauer	PERSON
aiti-1020	181	11	j. wuerfl	PERSON
aiti-1020	181	12	e. zanoni	PERSON
aiti-1020	181	13	power hemts	ORG
aiti-1020	181	14	ecs	ORG
aiti-1020	182	1	58	DATE
aiti-1020	182	2	4	CARDINAL
aiti-1020	183	1	187-198	CARDINAL
aiti-1020	183	2	2013	DATE
aiti-1020	184	1	6	CARDINAL
aiti-1020	184	2	a. barnes	PERSON
aiti-1020	184	3	2013	DATE
aiti-1020	184	4	12	CARDINAL
aiti-1020	184	5	holland	GPE
aiti-1020	185	1	7	CARDINAL
aiti-1020	185	2	f. b. mclean	PERSON
aiti-1020	185	3	h. e. boesch	PERSON
aiti-1020	185	4	j. m. mcgarrity	PERSON
aiti-1020	186	1	r. b. oswald	PERSON
aiti-1020	186	2	21	CARDINAL
aiti-1020	186	3	6	CARDINAL
aiti-1020	187	1	47-55	CARDINAL
aiti-1020	187	2	december 1974	DATE