id	sid	eid	entity	type
aiti-1026	2	1	3	CARDINAL
aiti-1026	2	2	2, 2018	DATE
aiti-1026	3	1	51 58	CARDINAL
aiti-1026	3	2	hsiang-chen hsu1,2	PERSON
aiti-1026	3	3	shaw-yuan wang1	ORG
aiti-1026	3	4	li-ming chu3,4	PERSON
aiti-1026	3	5	1	CARDINAL
aiti-1026	3	6	i-shou university	ORG
aiti-1026	3	7	kaohsiung	GPE
aiti-1026	3	8	taiwan	GPE
aiti-1026	3	9	roc	GPE
aiti-1026	3	10	2	CARDINAL
aiti-1026	3	11	i-shou university	ORG
aiti-1026	3	12	kaohsiung	GPE
aiti-1026	3	13	taiwan	GPE
aiti-1026	3	14	roc	GPE
aiti-1026	3	15	3	CARDINAL
aiti-1026	3	16	national taitung university	ORG
aiti-1026	3	17	taitung	GPE
aiti-1026	3	18	taiwan	GPE
aiti-1026	3	19	roc	GPE
aiti-1026	3	20	4	CARDINAL
aiti-1026	3	21	national taitung university	ORG
aiti-1026	3	22	taitung	GPE
aiti-1026	3	23	taiwan	GPE
aiti-1026	3	24	roc	GPE
aiti-1026	3	25	21	CARDINAL
aiti-1026	3	26	july 2017	DATE
aiti-1026	3	27	09 september 2017	DATE
aiti-1026	3	28	13	CARDINAL
aiti-1026	3	29	september 2017	DATE
aiti-1026	3	30	3-d	QUANTITY
aiti-1026	4	1	bc	ORG
aiti-1026	4	2	first	ORDINAL
aiti-1026	7	1	2 mil	MONEY
aiti-1026	7	2	50	CARDINAL
aiti-1026	7	3	4n	CARDINAL
aiti-1026	7	4	first	ORDINAL
aiti-1026	11	1	first	ORDINAL
aiti-1026	12	1	1	CARDINAL
aiti-1026	12	2	1-3	CARDINAL
aiti-1026	13	1	4	CARDINAL
aiti-1026	14	1	4n	CARDINAL
aiti-1026	14	2	99.99%	PERCENT
aiti-1026	15	1	5	CARDINAL
aiti-1026	16	1	three	CARDINAL
aiti-1026	16	2	efo (electric	ORG
aiti-1026	17	1	three	CARDINAL
aiti-1026	17	2	5	CARDINAL
aiti-1026	18	1	poisson	PERSON
aiti-1026	24	1	3	CARDINAL
aiti-1026	24	2	2, 2018	DATE
aiti-1026	25	1	51 58	CARDINAL
aiti-1026	26	1	al-cu	ORG
aiti-1026	29	1	6	CARDINAL
aiti-1026	30	1	1	CARDINAL
aiti-1026	31	1	60	CARDINAL
aiti-1026	31	2	28	CARDINAL
aiti-1026	32	1	imd	ORG
aiti-1026	33	1	2	CARDINAL
aiti-1026	33	2	fig	ORG
aiti-1026	34	1	1	CARDINAL
aiti-1026	34	2	8	CARDINAL
aiti-1026	35	1	2	CARDINAL
aiti-1026	35	2	imd	ORG
aiti-1026	35	3	8	CARDINAL
aiti-1026	37	1	0.8 mil	MONEY
aiti-1026	37	2	20	CARDINAL
aiti-1026	37	3	m	ORG
aiti-1026	37	4	2 mil	MONEY
aiti-1026	37	5	50	CARDINAL
aiti-1026	37	6	m	ORG
aiti-1026	40	1	9	CARDINAL
aiti-1026	42	1	11	CARDINAL
aiti-1026	42	2	ansys	PERSON
aiti-1026	44	1	2d	DATE
aiti-1026	44	2	3d	CARDINAL
aiti-1026	45	1	2	CARDINAL
aiti-1026	45	2	4n	CARDINAL
aiti-1026	45	3	efo	ORG
aiti-1026	48	1	microtensile	PERSON
aiti-1026	48	2	5n±0.5%	PERCENT
aiti-1026	49	1	25	CARDINAL
aiti-1026	49	2	125	CARDINAL
aiti-1026	49	3	200	CARDINAL
aiti-1026	52	1	efo	ORG
aiti-1026	52	2	haz	ORG
aiti-1026	53	1	fig	ORG
aiti-1026	54	1	3	CARDINAL
aiti-1026	54	2	haz	ORG
aiti-1026	56	1	3	CARDINAL
aiti-1026	56	2	2, 2018	DATE
aiti-1026	57	1	51 58	CARDINAL
aiti-1026	58	1	3	CARDINAL
aiti-1026	58	2	2.1	CARDINAL
aiti-1026	60	1	4	CARDINAL
aiti-1026	61	1	5	CARDINAL
aiti-1026	61	2	efo bare cu	ORG
aiti-1026	62	1	fig	ORG
aiti-1026	63	1	4	CARDINAL
aiti-1026	64	1	5	CARDINAL
aiti-1026	64	2	efo bare cu	ORG
aiti-1026	66	1	1	CARDINAL
aiti-1026	66	2	n tt k	PERSON
aiti-1026	68	1	1	CARDINAL
aiti-1026	69	1	10	CARDINAL
aiti-1026	70	1	tt nk	PERSON
aiti-1026	70	2		GPE
aiti-1026	70	3		LANGUAGE
aiti-1026	72	1		PERSON
aiti-1026	72	2	3	CARDINAL
aiti-1026	73	1	4	CARDINAL
aiti-1026	73	2	  	PERSON
aiti-1026	73	3		GPE
aiti-1026	73	4		NORP
aiti-1026	74	1		GPE
aiti-1026	76	1		GPE
aiti-1026	76	2		GPE
aiti-1026	77	1		ORG
aiti-1026	77	2		GPE
aiti-1026	78	1	 	GPE
aiti-1026	79	1		GPE
aiti-1026	79	2		GPE
aiti-1026	80	1		ORG
aiti-1026	80	2		ORG
aiti-1026	80	3		CARDINAL
aiti-1026	80	4		ORG
aiti-1026	80	5		CARDINAL
aiti-1026	80	6	loglog loglog	PERSON
aiti-1026	80	7		LANGUAGE
aiti-1026	80	8		NORP
aiti-1026	80	9		GPE
aiti-1026	80	10		GPE
aiti-1026	80	11		GPE
aiti-1026	80	12		LANGUAGE
aiti-1026	80	13	5	CARDINAL
aiti-1026	81	1	3	CARDINAL
aiti-1026	81	2	2, 2018	DATE
aiti-1026	82	1	51 58	CARDINAL
aiti-1026	82	2	54	DATE
aiti-1026	82	3	1	CARDINAL
aiti-1026	82	4	y	GPE
aiti-1026	83	1	2	CARDINAL
aiti-1026	83	2	408	CARDINAL
aiti-1026	83	3	1	CARDINAL
aiti-1026	83	4	200℃	QUANTITY
aiti-1026	83	5	19.3 0.43	CARDINAL
aiti-1026	83	6	12	CARDINAL
aiti-1026	83	7	2.71	CARDINAL
aiti-1026	83	8	1.38 13	CARDINAL
aiti-1026	83	9	1.31	CARDINAL
aiti-1026	83	10	80	CARDINAL
aiti-1026	83	11	1.80 3	CARDINAL
aiti-1026	83	12	8.91	CARDINAL
aiti-1026	83	13	330	CARDINAL
aiti-1026	83	14	2.64	CARDINAL
aiti-1026	83	15	430	CARDINAL
aiti-1026	83	16	usg	ORG
aiti-1026	83	17	2.00	CARDINAL
aiti-1026	83	18	3	CARDINAL
aiti-1026	83	19	al-cu	ORG
aiti-1026	83	20	2.85 0.31	CARDINAL
aiti-1026	83	21	400	CARDINAL
aiti-1026	83	22	2.33	CARDINAL
aiti-1026	83	23	2.2	CARDINAL
aiti-1026	84	1	2-d and	QUANTITY
aiti-1026	84	2	3-d	QUANTITY
aiti-1026	85	1	first	ORDINAL
aiti-1026	87	1	fig	ORG
aiti-1026	88	1	6	CARDINAL
aiti-1026	89	1	7	CARDINAL
aiti-1026	89	2	2d	DATE
aiti-1026	89	3	3d	CARDINAL
aiti-1026	93	1	3d	CARDINAL
aiti-1026	95	1	2	CARDINAL
aiti-1026	95	2	3	CARDINAL
aiti-1026	96	1	50	CARDINAL
aiti-1026	96	2	m	ORG
aiti-1026	96	3	85	CARDINAL
aiti-1026	96	4	m	ORG
aiti-1026	97	1	fig	ORG
aiti-1026	98	1	6	CARDINAL
aiti-1026	98	2	2d	CARDINAL
aiti-1026	100	1	7	CARDINAL
aiti-1026	100	2	3d	CARDINAL
aiti-1026	102	1	3	CARDINAL
aiti-1026	102	2	2, 2018	DATE
aiti-1026	103	1	51 58	CARDINAL
aiti-1026	103	2	55	CARDINAL
aiti-1026	103	3	2	CARDINAL
aiti-1026	103	4	58um	CARDINAL
aiti-1026	103	5	81um	ORDINAL
aiti-1026	103	6	11um	ORDINAL
aiti-1026	103	7	90°	QUANTITY
aiti-1026	103	8	fa	ORG
aiti-1026	103	9	22°	QUANTITY
aiti-1026	103	10	(or) 38um	DATE
aiti-1026	103	11	3	CARDINAL
aiti-1026	103	12	146	CARDINAL
aiti-1026	103	13	73 5.2	CARDINAL
aiti-1026	103	14	146	CARDINAL
aiti-1026	103	15	146	CARDINAL
aiti-1026	103	16	73	CARDINAL
aiti-1026	103	17	4	CARDINAL
aiti-1026	103	18	14	CARDINAL
aiti-1026	103	19	14 4	DATE
aiti-1026	103	20	146	CARDINAL
aiti-1026	103	21	73 1.8	CARDINAL
aiti-1026	103	22	146	CARDINAL
aiti-1026	103	23	73 1.8 2.3	QUANTITY
aiti-1026	104	1	three	CARDINAL
aiti-1026	105	1	first	ORDINAL
aiti-1026	105	2	10	CARDINAL
aiti-1026	105	3	m	ORG
aiti-1026	105	4	0.7	CARDINAL
aiti-1026	106	1	second	ORDINAL
aiti-1026	107	1	third	ORDINAL
aiti-1026	107	2	120	CARDINAL
aiti-1026	107	3	1 μm	QUANTITY
aiti-1026	107	4	4	CARDINAL
aiti-1026	108	1	1	CARDINAL
aiti-1026	108	2	0.3	CARDINAL
aiti-1026	108	3	2	CARDINAL
aiti-1026	108	4	36	CARDINAL
aiti-1026	108	5	m	ORG
aiti-1026	108	6	3	CARDINAL
aiti-1026	108	7	2	CARDINAL
aiti-1026	109	1	fig	ORG
aiti-1026	110	1	8	CARDINAL
aiti-1026	111	1	8	CARDINAL
aiti-1026	111	2	2.4	CARDINAL
aiti-1026	112	1	3d	CARDINAL
aiti-1026	113	1	9	CARDINAL
aiti-1026	115	1	3	CARDINAL
aiti-1026	115	2	2, 2018	DATE
aiti-1026	116	1	51 58	CARDINAL
aiti-1026	116	2	56	CARDINAL
aiti-1026	117	1	9	CARDINAL
aiti-1026	117	2	3d	CARDINAL
aiti-1026	117	3	3	CARDINAL
aiti-1026	117	4	3.1	CARDINAL
aiti-1026	118	1	10	CARDINAL
aiti-1026	119	1	fig	ORG
aiti-1026	120	1	10	CARDINAL
aiti-1026	121	1	2	CARDINAL
aiti-1026	121	2	1	CARDINAL
aiti-1026	121	3	2	CARDINAL
aiti-1026	121	4	fab	ORG
aiti-1026	126	1	11	CARDINAL
aiti-1026	127	1	fig	ORG
aiti-1026	128	1	11	CARDINAL
aiti-1026	129	1	3	CARDINAL
aiti-1026	129	2	2, 2018	DATE
aiti-1026	130	1	51 58	CARDINAL
aiti-1026	130	2	57 3.2	CARDINAL
aiti-1026	131	1	fig	ORG
aiti-1026	132	1	12	CARDINAL
aiti-1026	132	2	fig.	DATE
aiti-1026	133	1	13	CARDINAL
aiti-1026	133	2	fig	ORG
aiti-1026	134	1	12	CARDINAL
aiti-1026	135	1	13	CARDINAL
aiti-1026	135	2	3.3	CARDINAL
aiti-1026	138	1	4	CARDINAL
aiti-1026	139	1	4	CARDINAL
aiti-1026	140	1	m	ORG
aiti-1026	140	2	5.2	CARDINAL
aiti-1026	140	3	6.2 7.2	QUANTITY
aiti-1026	140	4	131	CARDINAL
aiti-1026	140	5	109	CARDINAL
aiti-1026	140	6	m	ORG
aiti-1026	140	7	2.22	CARDINAL
aiti-1026	140	8	1.44 1.34	QUANTITY
aiti-1026	140	9	96.76	MONEY
aiti-1026	140	10	4	CARDINAL
aiti-1026	144	1	stu	PERSON
aiti-1026	147	1	3	CARDINAL
aiti-1026	147	2	2, 2018	DATE
aiti-1026	148	1	51 58	CARDINAL
aiti-1026	148	2	58	CARDINAL
aiti-1026	148	3	1	CARDINAL
aiti-1026	148	4	y. j. lin	PERSON
aiti-1026	148	5	c. kang	PERSON
aiti-1026	148	6	l. chua	PERSON
aiti-1026	148	7	w. k. choi	PERSON
aiti-1026	148	8	s. w. yoon	PERSON
aiti-1026	148	9	3d	CARDINAL
aiti-1026	149	1	66	CARDINAL
aiti-1026	149	2	may 2016	DATE
aiti-1026	150	1	1772-1777	DATE
aiti-1026	151	1	2	CARDINAL
aiti-1026	151	2	m. c. hsieh	PERSON
aiti-1026	151	3	k. t. kang	PERSON
aiti-1026	151	4	h. c. choi	PERSON
aiti-1026	151	5	y. c. kim	PERSON
aiti-1026	152	1	11	CARDINAL
aiti-1026	152	2	oct ober 2016	DATE
aiti-1026	153	1	143-147	CARDINAL
aiti-1026	154	1	3	CARDINAL
aiti-1026	154	2	n. srikanth	PERSON
aiti-1026	154	3	s. murali	PERSON
aiti-1026	154	4	y. m. wong	PERSON
aiti-1026	154	5	c. j. vath iii	PERSON
aiti-1026	155	1	462	CARDINAL
aiti-1026	155	2	september 2004	DATE
aiti-1026	156	1	4	CARDINAL
aiti-1026	156	2	d. s. liu	PERSON
aiti-1026	156	3	y. c. chao	PERSON
aiti-1026	156	4	c. h. wang	PERSON
aiti-1026	156	5	three	CARDINAL
aiti-1026	156	6	40	DATE
aiti-1026	156	7	3	CARDINAL
aiti-1026	157	1	263-286	CARDINAL
aiti-1026	157	2	january 2004	DATE
aiti-1026	158	1	5	CARDINAL
aiti-1026	158	2	y. liu	PERSON
aiti-1026	158	3	s. irving	PERSON
aiti-1026	158	4	t. luk	PERSON
aiti-1026	159	1	31	DATE
aiti-1026	159	2	1	CARDINAL
aiti-1026	160	1	61	CARDINAL
aiti-1026	160	2	january 2008	DATE
aiti-1026	161	1	6	CARDINAL
aiti-1026	161	2	f. y. hung	PERSON
aiti-1026	161	3	t. s. lui	PERSON
aiti-1026	161	4	l. h. chen	PERSON
aiti-1026	161	5	y. t. wang	PERSON
aiti-1026	162	1	42	DATE
aiti-1026	162	2	14	CARDINAL
aiti-1026	163	1	5476-5482	CARDINAL
aiti-1026	163	2	july 2007	DATE
aiti-1026	164	1	7	CARDINAL
aiti-1026	164	2	c. hanga	PERSON
aiti-1026	164	3	c. wang	PERSON
aiti-1026	164	4	m. shi	PERSON
aiti-1026	164	5	x. wu	PERSON
aiti-1026	164	6	h. wang	PERSON
aiti-1026	165	1	6	CARDINAL
aiti-1026	165	2	august-september, 2005	DATE
aiti-1026	166	1	414-418	CARDINAL
aiti-1026	167	1	8	CARDINAL
aiti-1026	167	2	w. y. chang	PERSON
aiti-1026	167	3	h. c. hsu	PERSON
aiti-1026	167	4	s. l. fu	PERSON
aiti-1026	167	5	y. s. lai	PERSON
aiti-1026	167	6	c. l. yeh	PERSON
aiti-1026	167	7	3	CARDINAL
aiti-1026	167	8	rd	ORG
aiti-1026	167	9	assembly & circuits technology conference	ORG
aiti-1026	167	10	october 2008	DATE
aiti-1026	167	11	419	CARDINAL
aiti-1026	168	1	9	CARDINAL
aiti-1026	168	2	c. l. yeh	PERSON
aiti-1026	168	3	y. s. lai	PERSON
aiti-1026	168	4	c. l. kao	PERSON
aiti-1026	168	5	29	CARDINAL
aiti-1026	168	6	3	CARDINAL
aiti-1026	169	1	631-638	CARDINAL
aiti-1026	169	2	august 2006	DATE
aiti-1026	170	1	10	CARDINAL
aiti-1026	170	2	h. c. hsu	PERSON
aiti-1026	170	3	c. y. hu	PERSON
aiti-1026	170	4	w. y. chang	PERSON
aiti-1026	170	5	c. l. yeh	PERSON
aiti-1026	170	6	y. s. lai	PERSON
aiti-1026	171	1	453-478	CARDINAL
aiti-1026	171	2	august 2010	DATE
aiti-1026	172	1	11	CARDINAL
aiti-1026	172	2	s. k. prasad	PERSON
aiti-1026	172	3	kluwer	ORG
aiti-1026	173	1	3-55	CARDINAL
aiti-1026	174	1	12	CARDINAL
aiti-1026	174	2	r. c. j. wang	PERSON
aiti-1026	174	3	c. c. lee	PERSON
aiti-1026	174	4	l. d. chen	PERSON
aiti-1026	174	5	k. wu	PERSON
aiti-1026	174	6	k. s. chang-liao	PERSON
aiti-1026	174	7	46	DATE
aiti-1026	174	8	9-11	CARDINAL
aiti-1026	174	9	pp.1673-1678	ORG
aiti-1026	174	10	september-november 2006	DATE