id	sid	eid	entity	type
aiti-13503	1	1	microsoft	ORG
aiti-13503	1	2	3-v9n3(2024)-aiti#13503(186-196).docx	QUANTITY
aiti-13503	1	3	9	CARDINAL
aiti-13503	1	4	3	CARDINAL
aiti-13503	1	5	2024	DATE
aiti-13503	2	1	186-196 english language	QUANTITY
aiti-13503	2	2	chih-wen teng	PERSON
aiti-13503	2	3	firnanda pristiana nurmaida	ORG
aiti-13503	2	4	indra gunawan*	PERSON
aiti-13503	2	5	raden sanggar dewanto department of electrical engineering	ORG
aiti-13503	2	6	negeri surabaya	PERSON
aiti-13503	2	7	surabaya	GPE
aiti-13503	2	8	indonesia	GPE
aiti-13503	2	9	23	CARDINAL
aiti-13503	2	10	march 2024	DATE
aiti-13503	2	11	june 2024	DATE
aiti-13503	4	1	two	CARDINAL
aiti-13503	7	1	three	CARDINAL
aiti-13503	9	1	only four	CARDINAL
aiti-13503	9	2	1	CARDINAL
aiti-13503	9	3	3mm	QUANTITY
aiti-13503	9	4	5mm	QUANTITY
aiti-13503	9	5	8mm	QUANTITY
aiti-13503	9	6	3mm	QUANTITY
aiti-13503	15	1	almost 50%	PERCENT
aiti-13503	16	1	1	CARDINAL
aiti-13503	18	1	one	CARDINAL
aiti-13503	19	1	2	CARDINAL
aiti-13503	20	1	0.1	CARDINAL
aiti-13503	22	1	9	CARDINAL
aiti-13503	22	2	3	CARDINAL
aiti-13503	22	3	2024	DATE
aiti-13503	23	1	186	CARDINAL
aiti-13503	24	1	3	CARDINAL
aiti-13503	25	1	2	CARDINAL
aiti-13503	25	2	znfe2	LOC
aiti-13503	25	3	tio2	GPE
aiti-13503	25	4	4	CARDINAL
aiti-13503	27	1	5	CARDINAL
aiti-13503	32	1	7	CARDINAL
aiti-13503	34	1	1.8 ppm	QUANTITY
aiti-13503	34	2	800	CARDINAL
aiti-13503	35	1	8	CARDINAL
aiti-13503	36	1	9	CARDINAL
aiti-13503	37	1	7	CARDINAL
aiti-13503	40	1	10-12	CARDINAL
aiti-13503	41	1	two	CARDINAL
aiti-13503	44	1	five	CARDINAL
aiti-13503	44	2	3 mm	QUANTITY
aiti-13503	44	3	5 mm	QUANTITY
aiti-13503	44	4	8 mm	QUANTITY
aiti-13503	44	5	3 mm	QUANTITY
aiti-13503	44	6	5 mm	QUANTITY
aiti-13503	45	1	three	CARDINAL
aiti-13503	47	1	2	CARDINAL
aiti-13503	49	1	2.1	CARDINAL
aiti-13503	52	1	13	CARDINAL
aiti-13503	53	1	15-16	CARDINAL
aiti-13503	54	1	10-12	CARDINAL
aiti-13503	54	2	17	CARDINAL
aiti-13503	55	1	20	CARDINAL
aiti-13503	55	2	296	CARDINAL
aiti-13503	55	3	1982	DATE
aiti-13503	55	4	bambang djaja	PERSON
aiti-13503	55	5	indonesia	GPE
aiti-13503	56	1	three	CARDINAL
aiti-13503	56	2	8 ppm	QUANTITY
aiti-13503	56	3	23 ppm	CARDINAL
aiti-13503	56	4	33 ppm	QUANTITY
aiti-13503	57	1	1	CARDINAL
aiti-13503	57	2	188	CARDINAL
aiti-13503	58	1	9	CARDINAL
aiti-13503	58	2	3	CARDINAL
aiti-13503	58	3	2024	DATE
aiti-13503	59	1	186	CARDINAL
aiti-13503	60	1	1	CARDINAL
aiti-13503	60	2	2.2	CARDINAL
aiti-13503	61	1	20 khz	QUANTITY
aiti-13503	62	1	18	CARDINAL
aiti-13503	63	1	19-22	CARDINAL
aiti-13503	65	1	2	CARDINAL
aiti-13503	65	2	two	CARDINAL
aiti-13503	66	1	first	ORDINAL
aiti-13503	66	2	third	ORDINAL
aiti-13503	66	3	second	ORDINAL
aiti-13503	67	1	fig	ORG
aiti-13503	68	1	2	CARDINAL
aiti-13503	68	2	2.3	CARDINAL
aiti-13503	69	1	3	CARDINAL
aiti-13503	70	1	9	CARDINAL
aiti-13503	70	2	3	CARDINAL
aiti-13503	70	3	2024	DATE
aiti-13503	71	1	186	CARDINAL
aiti-13503	71	2	189	CARDINAL
aiti-13503	72	1	3	CARDINAL
aiti-13503	73	1	60 mm	QUANTITY
aiti-13503	73	2	140 mm	QUANTITY
aiti-13503	73	3	10 mm	QUANTITY
aiti-13503	75	1	two	CARDINAL
aiti-13503	75	2	chamber_2	GPE
aiti-13503	76	1	4	CARDINAL
aiti-13503	80	1	20	CARDINAL
aiti-13503	80	2	five	CARDINAL
aiti-13503	80	3	1	CARDINAL
aiti-13503	80	4	four	CARDINAL
aiti-13503	81	1	24 ℃	QUANTITY
aiti-13503	83	1	4	CARDINAL
aiti-13503	83	2	3	CARDINAL
aiti-13503	84	1	1	CARDINAL
aiti-13503	84	2	first	ORDINAL
aiti-13503	85	1	second	ORDINAL
aiti-13503	85	2	two	CARDINAL
aiti-13503	85	3	one	CARDINAL
aiti-13503	86	1	third	ORDINAL
aiti-13503	88	1	4	CARDINAL
aiti-13503	88	2	two	CARDINAL
aiti-13503	89	1	1	CARDINAL
aiti-13503	91	1	2	CARDINAL
aiti-13503	94	1	3	CARDINAL
aiti-13503	94	2	1	CARDINAL
aiti-13503	95	1	1	CARDINAL
aiti-13503	95	2	3.1	CARDINAL
aiti-13503	96	1	5 mm	QUANTITY
aiti-13503	96	2	1	CARDINAL
aiti-13503	97	1	5	CARDINAL
aiti-13503	97	2	190	CARDINAL
aiti-13503	97	3	9	CARDINAL
aiti-13503	97	4	3	CARDINAL
aiti-13503	97	5	2024	DATE
aiti-13503	98	1	186	CARDINAL
aiti-13503	99	1	5	CARDINAL
aiti-13503	103	1	5	CARDINAL
aiti-13503	103	2	first	ORDINAL
aiti-13503	103	3	first	ORDINAL
aiti-13503	104	1	first	ORDINAL
aiti-13503	106	1	23.67	CARDINAL
aiti-13503	107	1	1	CARDINAL
aiti-13503	107	2	1	CARDINAL
aiti-13503	109	1	1	CARDINAL
aiti-13503	109	2	23.67	CARDINAL
aiti-13503	109	3	3 23 ppm	QUANTITY
aiti-13503	110	1	18	CARDINAL
aiti-13503	111	1	1+	CARDINAL
aiti-13503	111	2	1 2 1 1−	TIME
aiti-13503	112	1	2	CARDINAL
aiti-13503	113	1	1	CARDINAL
aiti-13503	114	1	2	CARDINAL
aiti-13503	114	2	2	CARDINAL
aiti-13503	115	1	3	CARDINAL
aiti-13503	115	2	2	CARDINAL
aiti-13503	117	1	4	CARDINAL
aiti-13503	117	2	first	ORDINAL
aiti-13503	117	3	second	ORDINAL
aiti-13503	119	1	4	CARDINAL
aiti-13503	119	2	first	ORDINAL
aiti-13503	119	3	second	ORDINAL
aiti-13503	120	1	1	CARDINAL
aiti-13503	120	2	8 ppm	QUANTITY
aiti-13503	120	3	23 ppm	CARDINAL
aiti-13503	120	4	33 ppm	MONEY
aiti-13503	121	1	1	CARDINAL
aiti-13503	122	1	4	CARDINAL
aiti-13503	123	1	fig	ORG
aiti-13503	124	1	6	CARDINAL
aiti-13503	125	1	7	CARDINAL
aiti-13503	125	2	1	CARDINAL
aiti-13503	125	3	fig	ORG
aiti-13503	126	1	6 vrms	QUANTITY
aiti-13503	126	2	7	CARDINAL
aiti-13503	126	3	1	CARDINAL
aiti-13503	127	1	24 ℃	QUANTITY
aiti-13503	127	2	1.494	CARDINAL
aiti-13503	128	1	23	CARDINAL
aiti-13503	129	1	9	CARDINAL
aiti-13503	129	2	3	CARDINAL
aiti-13503	129	3	2024	DATE
aiti-13503	130	1	186	CARDINAL
aiti-13503	133	1	5	CARDINAL
aiti-13503	133	2	0	CARDINAL
aiti-13503	135	1	tgt tgt	PERSON
aiti-13503	136	1	6	CARDINAL
aiti-13503	136	2	ztgt	ORG
aiti-13503	137	1	two	CARDINAL
aiti-13503	138	1	1 1   	QUANTITY
aiti-13503	140	1		GPE
aiti-13503	141	1		GPE
aiti-13503	142	1		GPE
aiti-13503	143	1		GPE
aiti-13503	143	2		GPE
aiti-13503	144	1		GPE
aiti-13503	144	2	 tgt	PERSON
aiti-13503	146	1	7	CARDINAL
aiti-13503	146	2	3.08	CARDINAL
aiti-13503	146	3	18	CARDINAL
aiti-13503	146	4	23	CARDINAL
aiti-13503	146	5	25 ℃	QUANTITY
aiti-13503	146	6	1.494	CARDINAL
aiti-13503	147	1	18	CARDINAL
aiti-13503	148	1	1.28	CARDINAL
aiti-13503	148	2	920 kg/m3	QUANTITY
aiti-13503	148	3	18	CARDINAL
aiti-13503	148	4	23	CARDINAL
aiti-13503	152	1	2	CARDINAL
aiti-13503	156	1	3.24	CARDINAL
aiti-13503	157	1	2	CARDINAL
aiti-13503	157	2	(kg/m3	QUANTITY
aiti-13503	157	3	3 mm	QUANTITY
aiti-13503	157	4	2284.25	CARDINAL
aiti-13503	157	5	2626.68	CARDINAL
aiti-13503	157	6	3.186 5 mm	QUANTITY
aiti-13503	157	7	3655.06	CARDINAL
aiti-13503	157	8	3.277 8 mm	QUANTITY
aiti-13503	157	9	3.24	CARDINAL
aiti-13503	158	1	7	CARDINAL
aiti-13503	160	1	3	CARDINAL
aiti-13503	160	2	3	CARDINAL
aiti-13503	162	1	vrms vpp	PERSON
aiti-13503	162	2	1	CARDINAL
aiti-13503	162	3	1.494	CARDINAL
aiti-13503	162	4	1.301 1.085	CARDINAL
aiti-13503	162	5	3	CARDINAL
aiti-13503	164	1	4	CARDINAL
aiti-13503	164	2	3	CARDINAL
aiti-13503	164	3	1	CARDINAL
aiti-13503	165	1	192	CARDINAL
aiti-13503	165	2	9	CARDINAL
aiti-13503	165	3	3	CARDINAL
aiti-13503	165	4	2024	DATE
aiti-13503	166	1	186	CARDINAL
aiti-13503	167	1	1.28	CARDINAL
aiti-13503	167	2	18	CARDINAL
aiti-13503	167	3	23	CARDINAL
aiti-13503	169	1	1.301	CARDINAL
aiti-13503	169	2	8 ppm	MONEY
aiti-13503	172	1	3.2	CARDINAL
aiti-13503	172	2	5 mm	QUANTITY
aiti-13503	172	3	1	CARDINAL
aiti-13503	173	1	zero	CARDINAL
aiti-13503	173	2	24-28	CARDINAL
aiti-13503	175	1	3	CARDINAL
aiti-13503	175	2	10 mm	QUANTITY
aiti-13503	176	1	24 ℃	QUANTITY
aiti-13503	176	2	1497	CARDINAL
aiti-13503	176	3	20 mm	QUANTITY
aiti-13503	176	4	4	CARDINAL
aiti-13503	178	1	two	CARDINAL
aiti-13503	179	1	4	CARDINAL
aiti-13503	179	2	zero	CARDINAL
aiti-13503	179	3	1497 1497 1497	DATE
aiti-13503	179	4	12569.77	CARDINAL
aiti-13503	179	5	12607.91 13275.50	CARDINAL
aiti-13503	179	6	5.915	CARDINAL
aiti-13503	179	7	20 mm	QUANTITY
aiti-13503	180	1	5	CARDINAL
aiti-13503	181	1	zhu et al	PERSON
aiti-13503	182	1	29	CARDINAL
aiti-13503	183	1	3	CARDINAL
aiti-13503	184	1	5	CARDINAL
aiti-13503	185	1	25 ℃	QUANTITY
aiti-13503	185	2	0.998 kg/dm3	QUANTITY
aiti-13503	185	3	0.92 kg/dm3	QUANTITY
aiti-13503	185	4	18	CARDINAL
aiti-13503	185	5	between 0.92–0.98 kg/dm3	QUANTITY
aiti-13503	187	1	5 tof	QUANTITY
aiti-13503	187	2	8 ppm 23 ppm	MONEY
aiti-13503	187	3	14022.25	CARDINAL
aiti-13503	187	4	13863.94 13798.64	CARDINAL
aiti-13503	187	5	13275.5	CARDINAL
aiti-13503	187	6	1426.3	CARDINAL
aiti-13503	187	7	1.301 1.34	CARDINAL
aiti-13503	187	8	1.349 1.494	CARDINAL
aiti-13503	187	9	0.912	CARDINAL
aiti-13503	188	1	3 mm	QUANTITY
aiti-13503	188	2	8 mm	QUANTITY
aiti-13503	188	3	1	CARDINAL
aiti-13503	188	4	5 mm	QUANTITY
aiti-13503	188	5	the 3 mm	QUANTITY
aiti-13503	188	6	8 mm	QUANTITY
aiti-13503	189	1	6	CARDINAL
aiti-13503	189	2	7	CARDINAL
aiti-13503	189	3	3 mm	QUANTITY
aiti-13503	189	4	8 mm	QUANTITY
aiti-13503	190	1	8 ppm	QUANTITY
aiti-13503	190	2	23 ppm	CARDINAL
aiti-13503	190	3	33 ppm	QUANTITY
aiti-13503	190	4	5	CARDINAL
aiti-13503	190	5	6	CARDINAL
aiti-13503	190	6	7	CARDINAL
aiti-13503	192	1	9	CARDINAL
aiti-13503	192	2	3	CARDINAL
aiti-13503	192	3	2024	DATE
aiti-13503	193	1	186	CARDINAL
aiti-13503	193	2	6	CARDINAL
aiti-13503	193	3	7	CARDINAL
aiti-13503	194	1	1	CARDINAL
aiti-13503	197	1	6 tof	QUANTITY
aiti-13503	197	2	3 mm	QUANTITY
aiti-13503	197	3	8 ppm 23 ppm	MONEY
aiti-13503	197	4	14022.25	CARDINAL
aiti-13503	197	5	13863.94 13798.64	CARDINAL
aiti-13503	197	6	13275.5	CARDINAL
aiti-13503	197	7	1426.3	CARDINAL
aiti-13503	198	1	1.299 1.34	CARDINAL
aiti-13503	198	2	0.910	CARDINAL
aiti-13503	198	3	0.930 0.998	CARDINAL
aiti-13503	198	4	7	CARDINAL
aiti-13503	198	5	8 mm	QUANTITY
aiti-13503	198	6	8 ppm 23 ppm	MONEY
aiti-13503	198	7	14022.25	CARDINAL
aiti-13503	198	8	13863.94 13798.64	CARDINAL
aiti-13503	198	9	13275.5	CARDINAL
aiti-13503	198	10	1426.3	CARDINAL
aiti-13503	198	11	1.291	CARDINAL
aiti-13503	198	12	1.336	MONEY
aiti-13503	198	13	1.494	MONEY
aiti-13503	198	14	0.905 0.926	MONEY
aiti-13503	198	15	0.998 3.4	CARDINAL
aiti-13503	199	1	5 mm	QUANTITY
aiti-13503	199	2	3 mm	QUANTITY
aiti-13503	199	3	1	CARDINAL
aiti-13503	199	4	5 mm	QUANTITY
aiti-13503	199	5	3 mm	QUANTITY
aiti-13503	199	6	1	CARDINAL
aiti-13503	201	1	18	CARDINAL
aiti-13503	201	2	10.1	CARDINAL
aiti-13503	201	3	16	CARDINAL
aiti-13503	205	1	8	CARDINAL
aiti-13503	205	2	two	CARDINAL
aiti-13503	206	1	11.475	CARDINAL
aiti-13503	206	2	3 mm	QUANTITY
aiti-13503	206	3	13.91	CARDINAL
aiti-13503	206	4	5 mm	QUANTITY
aiti-13503	207	1	8	CARDINAL
aiti-13503	207	2	(kg/m3	QUANTITY
aiti-13503	207	3	3	CARDINAL
aiti-13503	207	4	1238.81	CARDINAL
aiti-13503	207	5	2371.22	CARDINAL
aiti-13503	207	6	11.475 5 mm	QUANTITY
aiti-13503	207	7	5349.73	CARDINAL
aiti-13503	207	8	13.91	CARDINAL
aiti-13503	207	9	9	CARDINAL
aiti-13503	207	10	10	CARDINAL
aiti-13503	207	11	3 mm	QUANTITY
aiti-13503	207	12	5 mm	QUANTITY
aiti-13503	208	1	5	CARDINAL
aiti-13503	208	2	6	DATE
aiti-13503	208	3	7	CARDINAL
aiti-13503	209	1	between 3 mm	QUANTITY
aiti-13503	209	2	5 mm	QUANTITY
aiti-13503	211	1	5 mm	QUANTITY
aiti-13503	213	1	8	CARDINAL
aiti-13503	214	1	9	CARDINAL
aiti-13503	215	1	9 tof	QUANTITY
aiti-13503	215	2	3 mm	QUANTITY
aiti-13503	215	3	8 ppm 23 ppm	MONEY
aiti-13503	215	4	14022.25	CARDINAL
aiti-13503	215	5	13863.94 13798.64	CARDINAL
aiti-13503	215	6	13275.5	CARDINAL
aiti-13503	215	7	1426.3	CARDINAL
aiti-13503	215	8	1.309 1.339	CARDINAL
aiti-13503	215	9	0.918	CARDINAL
aiti-13503	216	1	9	CARDINAL
aiti-13503	216	2	3	CARDINAL
aiti-13503	216	3	2024	DATE
aiti-13503	217	1	186	CARDINAL
aiti-13503	217	2	10	CARDINAL
aiti-13503	217	3	5 mm	QUANTITY
aiti-13503	217	4	8 ppm 23 ppm	MONEY
aiti-13503	217	5	14022.25	CARDINAL
aiti-13503	217	6	13863.94 13798.64	CARDINAL
aiti-13503	217	7	13275.5	CARDINAL
aiti-13503	217	8	1426.3	CARDINAL
aiti-13503	217	9	1.228	CARDINAL
aiti-13503	217	10	1.494	MONEY
aiti-13503	217	11	0.898	MONEY
aiti-13503	218	1	8	CARDINAL
aiti-13503	219	1	9	CARDINAL
aiti-13503	220	1	1	CARDINAL
aiti-13503	221	1	5	CARDINAL
aiti-13503	222	1	1	CARDINAL
aiti-13503	224	1	9	CARDINAL
aiti-13503	225	1	10	CARDINAL
aiti-13503	225	2	3 mm	QUANTITY
aiti-13503	225	3	5 mm	QUANTITY
aiti-13503	225	4	8 mm	QUANTITY
aiti-13503	225	5	3 mm	QUANTITY
aiti-13503	225	6	1	CARDINAL
aiti-13503	227	1	5 mm	QUANTITY
aiti-13503	229	1	5 mm	QUANTITY
aiti-13503	230	1	30	CARDINAL
aiti-13503	231	1	4	CARDINAL
aiti-13503	233	1	five	CARDINAL
aiti-13503	233	2	3 mm	QUANTITY
aiti-13503	233	3	5 mm	QUANTITY
aiti-13503	233	4	8 mm	QUANTITY
aiti-13503	234	1	9	CARDINAL
aiti-13503	234	2	3	CARDINAL
aiti-13503	234	3	2024	DATE
aiti-13503	235	1	186	CARDINAL
aiti-13503	235	2	3 mm	QUANTITY
aiti-13503	235	3	5 mm	QUANTITY
aiti-13503	240	1	only four	CARDINAL
aiti-13503	240	2	1	CARDINAL
aiti-13503	240	3	3 mm	QUANTITY
aiti-13503	240	4	5 mm	QUANTITY
aiti-13503	240	5	8 mm	QUANTITY
aiti-13503	240	6	3 mm	QUANTITY
aiti-13503	240	7	1	CARDINAL
aiti-13503	241	1	5 mm	QUANTITY
aiti-13503	242	1	5 mm	QUANTITY
aiti-13503	245	1	negeri surabaya	PERSON
aiti-13503	245	2	nuswanggono	PERSON
aiti-13503	245	3	handipo	PERSON
aiti-13503	245	4	bambang	PERSON
aiti-13503	247	1	1	CARDINAL
aiti-13503	247	2	493tm, 2007	ORG
aiti-13503	248	1	2	CARDINAL
aiti-13503	248	2	h. alizadeh	PERSON
aiti-13503	248	3	h. pourpasha	PERSON
aiti-13503	248	4	s. z. heris	PERSON
aiti-13503	248	5	31	DATE
aiti-13503	248	6	101713	DATE
aiti-13503	248	7	march 2022	DATE
aiti-13503	249	1	3	CARDINAL
aiti-13503	249	2	h. pourpasha	PERSON
aiti-13503	249	3	s. z. heris	PERSON
aiti-13503	249	4	m. mohammadpourfard	PERSON
aiti-13503	249	5	tio2	GPE
aiti-13503	249	6	41	CARDINAL
aiti-13503	249	7	article no. 102607	LAW
aiti-13503	250	1	4	CARDINAL
aiti-13503	250	2	h. pourpasha	PERSON
aiti-13503	250	3	s. z. heris	PERSON
aiti-13503	250	4	s. b. mousavi	PERSON
aiti-13503	250	5	tio2	GPE
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aiti-13503	253	8	8	CARDINAL
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aiti-13503	287	1	79-87	DATE
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aiti-13503	288	1	23	CARDINAL
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aiti-13503	288	3	2023	CARDINAL
aiti-13503	289	1	24	CARDINAL
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aiti-13503	289	9	2	CARDINAL
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aiti-13503	291	1	25	CARDINAL
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aiti-13503	293	1	26	CARDINAL
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aiti-13503	293	7	168	CARDINAL
aiti-13503	293	8	article no. 108398	LAW
aiti-13503	293	9	january 2021	DATE
aiti-13503	294	1	27	CARDINAL
aiti-13503	294	2	r. hanus	PERSON
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aiti-13503	295	1	146	CARDINAL
aiti-13503	296	1	792-799	CARDINAL
aiti-13503	296	2	november 2019	DATE
aiti-13503	297	1	28	CARDINAL
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aiti-13503	297	4	3d	CARDINAL
aiti-13503	298	1	7	CARDINAL
aiti-13503	298	2	2	CARDINAL
aiti-13503	299	1	77-91	DATE
aiti-13503	300	1	29	CARDINAL
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aiti-13503	300	6	2nd	ORDINAL
aiti-13503	300	7	1621-1624	CARDINAL
aiti-13503	300	8	december 2010	DATE
aiti-13503	301	1	30	CARDINAL
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aiti-13503	301	5	h. bendjador	PERSON
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aiti-13503	301	7	s. s. hsieh	PERSON
aiti-13503	301	8	zeitschrift für	PERSON
aiti-13503	301	9	medizinische physik	PERSON
aiti-13503	301	10	33	DATE
aiti-13503	301	11	3	CARDINAL
aiti-13503	302	1	267-291	CARDINAL
aiti-13503	304	1	taeti	GPE
aiti-13503	304	2	taiwan	GPE
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