id	sid	eid	entity	type
aiti-175	2	1	1	CARDINAL
aiti-175	2	2	2	CARDINAL
aiti-175	2	3	2016	DATE
aiti-175	3	1	29 32 29	TIME
aiti-175	3	2	shih-jeh wu1	PERSON
aiti-175	3	3	hsiang-chen hsu1,2	PERSON
aiti-175	3	4	wen-fei	PERSON
aiti-175	3	5	1	CARDINAL
aiti-175	3	6	i-shou university	ORG
aiti-175	3	7	kaohsiung	GPE
aiti-175	3	8	taiwan	GPE
aiti-175	4	1	2	CARDINAL
aiti-175	4	2	i-shou university	ORG
aiti-175	4	3	kaohsiung	GPE
aiti-175	4	4	taiwan	GPE
aiti-175	5	1	3	CARDINAL
aiti-175	5	2	i-shou university	ORG
aiti-175	5	3	kaohsiung	GPE
aiti-175	5	4	taiwan	GPE
aiti-175	5	5	february 2016	DATE
aiti-175	5	6	30 march 2016	DATE
aiti-175	5	7	april 2016	DATE
aiti-175	13	1	1	CARDINAL
aiti-175	13	2	corning ®	ORG
aiti-175	18	1	9	CARDINAL
aiti-175	18	2	one	CARDINAL
aiti-175	18	3	1	CARDINAL
aiti-175	18	4	2	CARDINAL
aiti-175	19	1	0.15-5.5	CARDINAL
aiti-175	22	1	3	CARDINAL
aiti-175	22	2	4	CARDINAL
aiti-175	28	1	plas ma	PERSON
aiti-175	28	2	5	CARDINAL
aiti-175	29	1	first	ORDINAL
aiti-175	29	2	1	CARDINAL
aiti-175	29	3	2	CARDINAL
aiti-175	29	4	2016	DATE
aiti-175	30	1	29 32 30	DATE
aiti-175	32	1	second	ORDINAL
aiti-175	34	1	one	CARDINAL
aiti-175	37	1	7	CARDINAL
aiti-175	40	1	8	CARDINAL
aiti-175	42	1	2	CARDINAL
aiti-175	43	1	1	CARDINAL
aiti-175	43	2	1	CARDINAL
aiti-175	47	1	2	CARDINAL
aiti-175	48	1	1	CARDINAL
aiti-175	48	2	first	ORDINAL
aiti-175	49	1	3	CARDINAL
aiti-175	51	1	fig.	DATE
aiti-175	52	1	4	CARDINAL
aiti-175	53	1	2	CARDINAL
aiti-175	54	1	3	CARDINAL
aiti-175	54	2	3d	CARDINAL
aiti-175	54	3	4	CARDINAL
aiti-175	54	4	3d	CARDINAL
aiti-175	54	5	1	CARDINAL
aiti-175	54	6	2	CARDINAL
aiti-175	54	7	2016	DATE
aiti-175	55	1	29 32 31	DATE
aiti-175	55	2	3	CARDINAL
aiti-175	55	3	fig.	DATE
aiti-175	56	1	5	CARDINAL
aiti-175	58	1	1.44mm	QUANTITY
aiti-175	59	1	6	CARDINAL
aiti-175	62	1	fig	PERSON
aiti-175	63	1	5	CARDINAL
aiti-175	64	1	6	CARDINAL
aiti-175	64	2	1.44mm	QUANTITY
aiti-175	64	3	0.4mm	QUANTITY
aiti-175	65	1	7	CARDINAL
aiti-175	66	1	0.7	CARDINAL
aiti-175	66	2	300 seconds	TIME
aiti-175	67	1	0.5 μm	CARDINAL
aiti-175	67	2	360 seconds	TIME
aiti-175	70	1	7	CARDINAL
aiti-175	70	2	0.4mm	QUANTITY
aiti-175	70	3	0.4mm	QUANTITY
aiti-175	70	4	fig.	DATE
aiti-175	71	1	8	CARDINAL
aiti-175	74	1	180 seconds	TIME
aiti-175	74	2	0.57 μm	QUANTITY
aiti-175	77	1	fig	PERSON
aiti-175	78	1	8	CARDINAL
aiti-175	78	2	0.4mm	QUANTITY
aiti-175	78	3	1	CARDINAL
aiti-175	78	4	2	CARDINAL
aiti-175	78	5	2016	DATE
aiti-175	79	1	29 32 32	DATE
aiti-175	79	2	fig.	DATE
aiti-175	83	1	9	CARDINAL
aiti-175	83	2	4	CARDINAL
aiti-175	88	1	taiwan	GPE
aiti-175	88	2	roc	GPE
aiti-175	89	1	2221-e-214-018	DATE
aiti-175	90	1	e&r engineering corp.	ORG
aiti-175	91	1	1	CARDINAL
aiti-175	92	1	gorillaglasssuccess.aspx	ORG
aiti-175	93	1	2	CARDINAL
aiti-175	93	2	3	CARDINAL
aiti-175	93	3	d. wang	PERSON
aiti-175	93	4	j. lee	PERSON
aiti-175	93	5	k. holland	PERSON
aiti-175	93	6	t. bibby	GPE
aiti-175	93	7	s. beaudoin	PERSON
aiti-175	93	8	t. cale	ORG
aiti-175	93	9	j. electrochem	PERSON
aiti-175	95	1	144	CARDINAL
aiti-175	95	2	3	CARDINAL
aiti-175	96	1	1121-1127, 1997	DATE
aiti-175	97	1	4	CARDINAL
aiti-175	97	2	g. kermouche	PERSON
aiti-175	97	3	j. rech	PERSON
aiti-175	97	4	h. hamdi	PERSON
aiti-175	97	5	j. m. bergheau	PERSON
aiti-175	97	6	269	CARDINAL
aiti-175	97	7	1-2	CARDINAL
aiti-175	98	1	86-92	CARDINAL
aiti-175	98	2	may 2010	DATE
aiti-175	99	1	5	CARDINAL
aiti-175	99	2	c. paschke	PERSON
aiti-175	99	3	k. bock	PERSON
aiti-175	99	4	325	CARDINAL
aiti-175	99	5	659-665	CARDINAL
aiti-175	99	6	2011	DATE
aiti-175	100	1	6	CARDINAL
aiti-175	100	2	k. gurnett	PERSON
aiti-175	100	3	t. adams	PERSON
aiti-175	100	4	19	CARDINAL
aiti-175	101	1	38	CARDINAL
aiti-175	101	2	40, 2006	DATE
aiti-175	102	1	7	CARDINAL
aiti-175	102	2	z. j. pei	PERSON
aiti-175	102	3	g. r. fisher	PERSON
aiti-175	102	4	j. liu	PERSON
aiti-175	102	5	48	DATE
aiti-175	102	6	1297-1307, 2008	DATE
aiti-175	103	1	8	CARDINAL
aiti-175	103	2	j. wang	PERSON
aiti-175	103	3	p. shrotriya	PERSON
aiti-175	103	4	k. s. kim	PERSON
aiti-175	103	5	46	DATE
aiti-175	104	1	39	CARDINAL
aiti-175	104	2	2006	DATE