id	sid	eid	entity	type
aiti-178	2	1	1	CARDINAL
aiti-178	2	2	2	CARDINAL
aiti-178	2	3	2016	DATE
aiti-178	3	1	41 45 41	CARDINAL
aiti-178	3	2	jian-hong wu2	PERSON
aiti-178	3	3	chen-chih	PERSON
aiti-178	3	4	3 1	CARDINAL
aiti-178	3	5	national formosa university	ORG
aiti-178	3	6	yunlin	GPE
aiti-178	3	7	taiwan	GPE
aiti-178	4	1	2	CARDINAL
aiti-178	4	2	taiwan	GPE
aiti-178	4	3	hsinchu	GPE
aiti-178	4	4	taiwan	GPE
aiti-178	5	1	3	CARDINAL
aiti-178	5	2	wufeng university	ORG
aiti-178	5	3	chiayi county	GPE
aiti-178	5	4	taiwan	GPE
aiti-178	5	5	february 2016	DATE
aiti-178	5	6	28 march 2016	DATE
aiti-178	5	7	april 2016	DATE
aiti-178	6	1	four	CARDINAL
aiti-178	7	1	five	CARDINAL
aiti-178	8	1	1	CARDINAL
aiti-178	9	1	1-3	CARDINAL
aiti-178	11	1	4	CARDINAL
aiti-178	14	1	the 1920s	DATE
aiti-178	14	2	european	NORP
aiti-178	14	3	6	CARDINAL
aiti-178	15	1	later years	DATE
aiti-178	15	2	japanese	NORP
aiti-178	15	3	8	CARDINAL
aiti-178	18	1	tio2	GPE
aiti-178	19	1	four	CARDINAL
aiti-178	20	1	o	DATE
aiti-178	21	1	four	CARDINAL
aiti-178	22	1	1	CARDINAL
aiti-178	22	2	2	CARDINAL
aiti-178	22	3	2016	DATE
aiti-178	23	1	41 45 42	CARDINAL
aiti-178	23	2	2	CARDINAL
aiti-178	23	3	0.035	CARDINAL
aiti-178	23	4	0.105	CARDINAL
aiti-178	23	5	0.175	CARDINAL
aiti-178	23	6	35-g	QUANTITY
aiti-178	24	1	four	CARDINAL
aiti-178	25	1	1(a)~(d	CARDINAL
aiti-178	26	1	1	CARDINAL
aiti-178	27	1	2.1	CARDINAL
aiti-178	29	1	2	CARDINAL
aiti-178	29	2	300 mm	QUANTITY
aiti-178	31	1	three	CARDINAL
aiti-178	32	1	fig	ORG
aiti-178	33	1	2	CARDINAL
aiti-178	33	2	2.2	CARDINAL
aiti-178	34	1	810	CARDINAL
aiti-178	35	1	3	CARDINAL
aiti-178	35	2	150 mm	QUANTITY
aiti-178	35	3	3 mm	QUANTITY
aiti-178	35	4	1 mm	QUANTITY
aiti-178	36	1	10	CARDINAL
aiti-178	36	2	-1 s -1	ORG
aiti-178	38	1	three	CARDINAL
aiti-178	41	1	1	CARDINAL
aiti-178	41	2	2	CARDINAL
aiti-178	41	3	2016	DATE
aiti-178	42	1	41 45 43	CARDINAL
aiti-178	43	1	fig	ORG
aiti-178	44	1	3	CARDINAL
aiti-178	44	2	3	CARDINAL
aiti-178	44	3	3.1	CARDINAL
aiti-178	46	1	4	CARDINAL
aiti-178	46	2	four	CARDINAL
aiti-178	47	1	less than 1	CARDINAL
aiti-178	47	2	five	CARDINAL
aiti-178	49	1	four	CARDINAL
aiti-178	50	1	three	CARDINAL
aiti-178	51	1	fig	ORG
aiti-178	52	1	4	CARDINAL
aiti-178	52	2	3.2	CARDINAL
aiti-178	54	1	5	CARDINAL
aiti-178	56	1	approximately 8.03	CARDINAL
aiti-178	57	1	around 7.04mpa	CARDINAL
aiti-178	61	1	fig	ORG
aiti-178	62	1	5	CARDINAL
aiti-178	62	2	3.3	CARDINAL
aiti-178	65	1	6	CARDINAL
aiti-178	66	1	approximately 1.8	CARDINAL
aiti-178	67	1	approximately 1.09	CARDINAL
aiti-178	68	1	tio2	GPE
aiti-178	70	1	just 0.13	CARDINAL
aiti-178	70	2	8	CARDINAL
aiti-178	72	1	1	CARDINAL
aiti-178	72	2	2	CARDINAL
aiti-178	72	3	2016	DATE
aiti-178	73	1	41 45 44	DATE
aiti-178	73	2	taeti	DATE
aiti-178	74	1	6	CARDINAL
aiti-178	74	2	3.4	CARDINAL
aiti-178	74	3	0.45	CARDINAL
aiti-178	76	1	0.6	CARDINAL
aiti-178	76	2	around 50%	PERCENT
aiti-178	76	3	0.4	CARDINAL
aiti-178	80	1	4	CARDINAL
aiti-178	81	1	fig	ORG
aiti-178	82	1	7	CARDINAL
aiti-178	82	2	4	CARDINAL
aiti-178	83	1	tio2	GPE
aiti-178	84	1	four	CARDINAL
aiti-178	88	1	two	CARDINAL
aiti-178	91	1	s.c. lin	PERSON
aiti-178	91	2	nat ional formosa university	ORG
aiti-178	91	3	taiwan	GPE
aiti-178	92	1	training co. ltd	ORG
aiti-178	92	2	taiwan	GPE
aiti-178	93	1	1	CARDINAL
aiti-178	93	2	n. r. park	PERSON
aiti-178	93	3	i. y. ko	PERSON
aiti-178	93	4	j. m. doh	PERSON
aiti-178	93	5	w. y. kong	PERSON
aiti-178	93	6	j. k. yoon	PERSON
aiti-178	93	7	shon	ORG
aiti-178	93	8	3ni	ORDINAL
aiti-178	93	9	61	DATE
aiti-178	93	10	3	CARDINAL
aiti-178	94	1	227-282	CARDINAL
aiti-178	94	2	march 2010	DATE
aiti-178	95	1	2	CARDINAL
aiti-178	95	2	x. w. liu	PERSON
aiti-178	95	3	o. soderberg	PERSON
aiti-178	97	1	kes ki-honkola	PERSON
aiti-178	97	2	v. pitkanen	PERSON
aiti-178	97	3	o	DATE
aiti-178	97	4	ric curren	PERSON
aiti-178	97	5	t. s	ORG
aiti-178	97	6	o3 compos ites	ORG
aiti-178	97	7	ia	GPE
aiti-178	97	8	10	CARDINAL
aiti-178	98	1	124	CARDINAL
aiti-178	99	1	3	CARDINAL
aiti-178	99	2	g. z. zhao	PERSON
aiti-178	99	3	l. s. d. s. zhang	PERSON
aiti-178	99	4	x. feng	PERSON
aiti-178	99	5	s. yuan	PERSON
aiti-178	99	6	j. zhou	PERSON
aiti-178	99	7	35	DATE
aiti-178	99	8	847-853	QUANTITY
aiti-178	99	9	march 2012	DATE
aiti-178	100	1	1	CARDINAL
aiti-178	100	2	2	CARDINAL
aiti-178	100	3	2016	DATE
aiti-178	101	1	41 45 45	DATE
aiti-178	102	1	4	CARDINAL
aiti-178	102	2	m. jayalakshmi	PERSON
aiti-178	102	3	n. venugopal	PERSON
aiti-178	103	1	k. phan	PERSON
aiti-178	103	2	m. mohan rao	PERSON
aiti-178	103	3	sno2al2	PERSON
aiti-178	103	4	app lications	PERSON
aiti-178	103	5	158	CARDINAL
aiti-178	103	6	1538-1543	CARDINAL
aiti-178	103	7	august 2006	DATE
aiti-178	104	1	5	CARDINAL
aiti-178	104	2	c. l. arqu imedes	PERSON
aiti-178	104	3	j. r. isaias	PERSON
aiti-178	104	4	m. lilia	PERSON
aiti-178	104	5	b. carrillo	PERSON
aiti-178	104	6	z. m. elv	PERSON
aiti-178	104	7	o	DATE
aiti-178	104	8	9	CARDINAL
aiti-178	104	9	5	CARDINAL
aiti-178	105	1	474-477	CARDINAL
aiti-178	106	1	6	CARDINAL
aiti-178	108	1	h. wu	PERSON
aiti-178	108	2	london	GPE
aiti-178	109	1	206	CARDINAL
aiti-178	109	2	1998	DATE
aiti-178	110	1	7	CARDINAL
aiti-178	110	2	l. crognier	PERSON
aiti-178	110	3	quarterly	DATE
aiti-178	110	4	72	DATE
aiti-178	110	5	2, 2001	DATE
aiti-178	111	1	8	CARDINAL
aiti-178	111	2	m. dicks	PERSON
aiti-178	111	3	k. davids	PERSON
aiti-178	112	1	40	DATE
aiti-178	112	2	4	CARDINAL
aiti-178	113	1	506-524	CARDINAL
aiti-178	113	2	2009	DATE
aiti-178	114	1	9	CARDINAL
aiti-178	114	2	pinder	ORG
aiti-178	114	3	i. renshaw	PERSON
aiti-178	114	4	k. davids	PERSON
aiti-178	114	5	h. kerherve	PERSON
aiti-178	114	6	41	CARDINAL
aiti-178	114	7	10	CARDINAL
aiti-178	115	1	793, 2011	DATE
aiti-178	116	1	10	CARDINAL
aiti-178	116	2	g. tenenbaum	PERSON
aiti-178	116	3	t. sar-el	PERSON
aiti-178	116	4	1	CARDINAL
aiti-178	116	5	2	CARDINAL
aiti-178	116	6	117	CARDINAL
aiti-178	116	7	october 2000	DATE